LTーNP-5000
Contents
1. 7 22. 5 OE ti pes Ye 1 ED A 14 5 5 1 ET I N OUT
3. ON ON OF F OF F UV UV UV UV UV UV
4. 4 U V UV NE x BR 1 UV ON OFF 0 UV MAX UV MIN UV
5. 4 4 1 A POWER B C D E CFP TE G H
6. en 200V
7. ON OFEF 2 0 13mm JOG OG JOG JOG TOG JOG JOG OG 9 3 UV ON OFF 3
8. 2 9 8 4 UV 2 3 8 5 2 4 9 2 5 5 2 6 1 UV 2 1 6 Si 2 40mm 38 4 1 0 KN 5 6 2 0 0 7 8
9. T NT RA 4 1 LN kd tt NCC PROC FS ADUDEFGHIJKLMNOPQRST VA 1 lt 1 1 lt Fon2x2E l 1 lt 2 ff 1 UV 1 1 NO No 2
10. 11 5 ON 0 2 0KN
11. 50KPa 9 1 0sec 10 11 12 UV EXECURE4000 D HOYA CANDEO OPTRONICS AC200V383 0 5MPa HEC002 A5B SMC GLD 136C 13 W800XD700XH1750 479 ol _ _2 17 _ NN co Co 1 i Ee ss ey NT dL La a KT is UV FA es a ll 2 Pa 1 Sa WM a fy Ny gs
12. 10 3 4
13. 4 2 5 UV A Co D 1 1
14. 3 No UV UV MANUAL PROSESS UV UTILITY i 2
15. LTINP 5000 V1 0 Litho lech Japan 1 lt lt 3 2 3 3 4 4 6 4 1 6 4 2 7 1 4 2 9 3 10 4 UV 18 5 I 5 5 6 6 6 1 1 6 52 1 6 6 3 8 6 4 18 7 ee 19 8 8 1 2 0 8 2 2 1 8 3
16. Ly 8 _ 1 UV 3 4
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