PDJ
Contents
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11. OFF D VIT D FIX ROM FIX FIX 5 5 3 82 9 POWER CODITION SW POWER ON CONDITION SW AUT MAN AUT MAN AUT INI
12. FLASH WAR3
13. D ED ccm 4 2 122 6 1 1 4 8 3 1 PCMCIA 0000000 20 32MB SDCFB 4 101 00 4MB SDCFB 20 101 00 20MB 1 1 1 SDCFB 32 1
14. m 8 1 4 4Pen 32 POINT MIN MAX 0 1 MENU2 3 TREND SETTING 000009 00009 Um www 1222712231 22 29 10 TN DATAS gt Pani 8 02 0000000
15. 1 21 COMMAND START RESET STOP RESET STOR CARD Pen 10 4 STARTI RESETI TAR _CARD_END CARD ENH INTERVAL 1 2 5 10 30SEC 15 1 2 5 10 15 1 2 3 6 12HOURJ 1 2 7 14da
16. 0500000000000 32 000000000 4 10 0 2 5 1digit ON 1V OFF 100 A 5 10596 1 100 3 100mA 0 2 FS 100 33 1 FS ON 1V OFF 100 A 100mS 22 000000000 10 100mA 24V ON 4 8mA DC30V 10mA PV1 ON 2000 PV2 OFF 100 2 1V OFF 1001 8 30 0
17. D MENU MENUJ1 3 2 MENU MENU MENU1 32 2 3 MENU3 32 MENU 3 9 v 4 I 9 Sel 8 3 6 Back 1 MENU MENU1 3 MENU 1 3
18. Ree 5 31 0000 RUNG STOP P 5 13 STOP STOP 5 11 naa tied 5 12 2 3 3 3 KAANANE A NANA NAN 5 27 P 5 41
19. 1 2 01 50 0 og 40 0 201 25 0 3 901 RH 4 5 6 8 l00mm 9 812 15 50 1 2 3 50 8 13 1 600 JIS C330 JIS C3401I 125x 3 5S 2x 3 55 0 250 2mm 2 600 JIS C330 JIS C3401 0 20 2 5 3 G sco AO VPH PCD MODI MOD 4
20. IK dt ebore Puna a a 1 1 DN Sasa RT 12 TEARS ITL a en RES 1 3 o aa ERREUR NA EIE 1 3 E M EROR NGA apay 1 5 JEDA KE BU CN PORC OC c PROPERE 1 7 RE PRX 1 8 TAY pn E 1 8 LAS 1 10 IER SN 1 11 a aga 2 1 PA I ANE S a 2 2 2 2 ppp II BH RUR un here 2 3 PAK 2 4 2 5
21. INP IN512178 110 000000 HUB 7 2 721 PLC
22. 00009 00000000000000 000 000 00000000000004000 00000 0000 0000000000000000 0 6 1 INTERVAL LOG TY PE Pen1 Pen4 E 8 e 000000000 COMMAND Erti 000 00000 wn 2000000 STARTE Ent
23. Windows PCMCIA PCMCIA 641 PCMCIA 6 4 Q PCMCIA PCMCIA Windows a Ccrr card 6 5 Ccomecard 6 5
24. PV1 00000 00000 0 2 125 00 25 00 125 00 1 PV L 00000 02 25 00 25 00 125 00 1 PV L DPH 1 000000 PVI 0 00 100 00 100 00 DPHI D D ELELO D BL EE EE l CUT 000000000 327 67 0 01 0 00 0 0 000 327 67 5 11 TF 1 0 01 900 0 0 00 PV P 5 12 PV2 00000 00000 0 2 125 00 25 00 125 00 PV2 PV H 00000 02 25 00 25 00 125 00 2 PV L DPH 20 000000 2 0 00 100 00 100 00 CUT 000000000 PV2 327 67 0 01 0 00 0 0 000 327 67 5 11 TF 2 0 01 900 0 0 00 PV P 5 12 0000000
25. LOOP e gt gt e 5 1 D T LINK TTI T Link STATE TI T Link SETUP 9 Master Se SY UKUTAI FTLS USE FAULT CLEAR PDA INP TN2PDA AUT AUT MAN 9 44 44 d Mi 1 4mA No 44 OFF gt ON 4mA ix CD ROM INP TN2PDJ 1 RCJ
26. 5 1511 SET 4 51512 01000000000 171 CONNECT OUT CONNECT CH 1 0 14 CH 2 24 CH 3 0000 CH 4 0000 CH 5 0000 Back 5 41 CH5 0000 0000 FFFF 5 36 5152 A 0000000000000000000000000 0000 0000000060000 5 1
27. A ABA 00000004 74
28. 8 8 844 2 1000 5 1 10u 10 1 COR D goog D 24 i13 100 Ba 8 10 F 8 9 85 000000 851 000000000
29. 000000 1 WAFER 1 4 4 lt 4 Loop 2 o gt 1 gt 22 32 CODE UD Ent 0000 o 4 1 0000 1 0020 ario 1614 0000000 A 00000000000000000000000 0000000000 0000000000000000000000000 5 33 00000000 5 34 m 00000000
30. 0000000 DC1 5V BH la 141 DUDO 00000000 21
31. 1 21 3 5 PV PV 3 13 EP E BS 3 6 TREND SETTING 2 3 SZ Lec 3 9 FL ANAA ET TEN E E RE P 5 3 9 aa anna 5 8 Q PI
32. 5 47 2 Y A Page lt gt 20 FIK FIK l 5 17 2 1100 LI MENU 2 3 gt CONTROL TIME 5 17 21 51722 5 49 000000 0 000000000000000000000 Y 000000000 Ent gt 00000000000 00000000 00000000000 gt 00001410000000000000000 5 42 5 17 3 1 B EH B E D E E E E E
33. 41 41 4 1 41 4 e o o 00000000 4 1 PDZB1001 43 00000 PDZN0001 TY 23M Fix
34. DD Ti 1 0 2 WNo99 7 3 1 0 100 1 00 WNo00_ WNo03 WNoO4 WNoO 1 0 000 WNoO3T 1 0 WNoO4 WNoO I O WNo00_ WNo03 WNoO4 WNo07
35. TAG 0000000000000000000000 TAG 2 2 22 0000000000000000 ON OFF A 0000000000000000000000 000000
36. 01000 WAFER v A WaferNo 01 T CODE 0000 5 35 WaferNo 01 CODE 0021 Ent 5 35 5 36 v WaferNo O1 1 Ent WaferNo 01 10 Aill 1 0032 Ent 5 3 v WaferNo 01 3 Ent WaferNo O1 3 1 LS1 0918 Ent 5 38 WaferNo 01 WaferNo 02 WaferNo 3 5 39 5 39 1 0000 5 39 WaferNo 04 00 lt gt 3 5143 000000 RUN STOP a A AA 00000 1 5 RUN RUN STOP
37. 0000000 0000000 2 7 9 659 5 12154115 atas 24 95 22 Ho folle 26 o gt 69 Gs IET 25s O m ovo 69 05 25 bile 9 19 Hem GS 299 lels meal posi saen Ep zgo Iu 220 E N O Y N F 000000 000000 d gt gt gt dil ls 5 0000000 25 00000
38. 45 0 0000000000000 DPL DPH PVL PVH 0 000 100 00 0 000 100 00 CHECK DAI CHECK OPTION Ai ON OFF ON OFF 11 50 111 5094 5 00 105 0094 FLASH WAR ROM WAFER STOP CNCT ERROR L 0
39. 43 nn
40. 2 4 2 2 OFF Pilc 12 ON 4 3 e e eo 00000 44 44
41. A 8mA DC24V 24V DI DO
42. AN U D RH 4 9 52 viii
43. 0 0 0 PV1 2 2 PV1H PV20 PV2 PV2 00001 10000 20 0 0 PVO D 9 0000000000 00000000000 D D 100000000 000 000 0 00000000 2 0 0 PVO D 2 10111 TAG 1 00 20 0 0 0 MENU Pv2000000000 1 m 00000000 lt gt 100000000000001 00000000000001 Back 1000000000 lt 0002 000000000002 000001 H 200 0000000000000000000 LOOP 1 20 1 0 0 00 2 20 20 0000000600 313 B AB nn 381
44. 0000009
45. I ALM FLT Ack A PALARM 1 16 1201 4401 IRINN 0000000 od EE 4 5 lt 0282017 3 7 AlmS 1 1 2 PV2
46. 1 BASIC CYCLE 100 50 20 200msed 2 PI PI FULL STROKE PI1 PI2 4 DI1 0 DI X 013 0 DIA 015 0 DI6 21790 018 00101 0013 00140 001 100 sed x 100 x 0 1 sed 1 11 2000 2000 1000 10000 111 2000 011 200 300 3 POWERDOWN TIME INIT CONT SW CONT 01 3276 180 5 20 5 112 0000000000000 UUUDDDUDUDUUDUDUDUDDUUDUUDUDUUDUDUUDUUDUuU 51LL1 00000000000000000000000000 51112 0000000000000 SYSTEM SET 10000000 5 22 00000000 PV20 DPLI
47. 000 PV1 2 A110 nr 5 1141 00 000 000000 0000 1 5 12 50 11251 0 5 0000 1250 0 10VDC 0000 1125 0000 000000 1125 5 1142 Pvi2ch SYSTEM 1 6chi 0000 1 2600 00000000 5 24 00000000 0 D 0000 100000 PVchl PV1 2ch PVich 2ch0 00000000000 ON OFF OFF E Alch1 PV1 2ch 00000000000 ch6 DAIch1 12 0000 1280 0000000000 oND 0 000 500000 10500 0 0000 DAI check 00000 00000 60 000000000000 512 000000000 5
48. 64 0000000000000 642 000000000000000 1 POINT Point 1 dat 2 MIN MAX 0000000 Maxmin 1 dat 1 1 POINT
49. ALM 5 51 1 ALARM STATE Flt lt lt gt gt Clr 31 6 1 1 Ack 4 00000 1593 127 11 85 1L 000006 L 000 Mawinan regs 215
50. 000000000000000000000000000000000 5141 5 31 5 33 1 No 00000 3 0000000 4 Em 1001 yoon 1 0000 30002 000000 rana 03000 1003 04000 0003 1 000000000 00000000 5 31 00000000001 IN1 OUT 5 32 INI D 001 200 L CUT E 3113 000000 Ha IN A OUT H CUT L CUTI m 5 32 5 32 T CC S M INP TN2PDA 5 31 MENENT 0000 0000000 D ou 0032 1 12 0033 2 0048000 5 33 5 33 No 01 048 4
51. 6 1 HD aa Beg aa a 6 2 62 usse 6 3 itd 63 6 4 aja a aa ea A 0000000000 e TREND SETTING TI I LI L 2 3 TREND SETTING 1 8
52. 61 9T L n AC100V AC240V 50 60Hz 000000000 0000000 100 240v 50 60Hz DC24V 000000000 AC85V AC264V 20ms DC20V DC30V DC24V 20ms 47Hz 63Hz PXJ 60VA AC100V 240 00000000 30W DC24VIT DC20 30V 40mA VP PC 10 CPU 71 DC500V 50MQ 2000 1 AC100V 240V FLT FLT FLT AC500V 1 DC24V 11 ABS AC500V 1 60A AC240V UL94V 0 100ppni 4 IP54 1 1 72x 144x 272mm 72 144 280mm 1 9kg 81 45 50 0 90 45 10 200 70 C 20 0 50 90 RH 3 5 50 95 RH 4 9m 52 60cm
53. 84 841 0 0000000000000000000000000000000000000000000 00000000000 m v N 4 64 L 83 qu N DL 000 2400 0 DC2AVI 000000000000 000000 8 4 Lou 228 JA 0 24 0 842 0 69 DC24V VPD 8210 D D PCD mu 6200 0 24 19 C9 69 DC24V 0 8 6 2011 0 D PCD 2100 DC24V pczav 0000000000000 VPDD Lr E 00000000 00000000 0000000000000000000 40mMAU U PC 86 843 5
54. 82 82 821 2500 0 2500 mm m TA 0 7 68 8 1 000000 822 00000
55. PVI PV INPUT 8 00000000 8 PVI PV 9999 0 SCALE 32767 0 BASE SCALE gt FULL SCALE FULL PVI PV 9999 10000 SCALE 32767 PV 100 BASE SCALE FULL SCALE DIMENSION PV1 PV 04 2 0 UNIT PVI PV SETTING 173 1 BASE SCALE FULL SCALE BASE SCALE FULL SCALE 0 O FULL SCALE gt BASE SCALED 0000000000 5 25 m 00000000 8 TAG 000000000 qui 0000001 0000002 5 26 000000 000000 UNIT SETTING Eni 0
56. 8 13 VP 00 JAE S DC20 30 4 00000 000 54 0 0 00001000000000000 00000 400 00000000000000000000000000000000000 00000000000000000000000000 24V VP VPD 0 DO L DI 7 O x k PC 8 14 810 86 000000000000000000 0 17000000 861 587 59 0000 60 elelee
57. CD ROM 000000000 000000000 http www adobe com e i Dv 8 85 s 58 lt 2 O _ lt H go
58. DIRECT 5 5 13 3 1 1000000000000000000800 5 1332 0000000 0 00 0 000 0010000000000 00000000 D 00000 0000 00000 000000000000 0000000 000000000 INPUT TYPE 000000 0000000 000 0 00 000079 0000000 010 TCO 0 0000 INPUT RANCE 000000000000 00000000000000 00 000 15 00 0000 000000 0000000 0 ON OFF ON OFF OFF 0000000000000 0 00000000000000000000000000000000000000000 00000000 0 0 400 0 Pt1000 0 00 150 0 0 0 800 0 Pt1000 0 00 300 0 0 0 400 0 Pt1000 0 00 500 0 0 0 800 0 Pt1000 0 0 600 0 0 0 1200 0 Pt1000 50 0 100 0 0 0 1600 0 Pt1000 100 0 200 0 C
59. 32 3 2 9 9 00000000000 NG ue MENU 0000000 00 32 0000000000060 3 21 0000000 MENU D MENU1 3 MENU2 3 MENU3 3 MENU1 3
60. Modbus T4 1 0 op D T Modbus 0 71 0000 3 Q 5 5 5 5 CC M PDA 1 1 L1 C1 L1 VOTI DUDU 7 2
61. 2 0 Eni U LOL L LDL LI LI L uu Back 000000 FL1 IMH DPHI IMH 0000 1 1 gt gt 33 0000000 PMI 000 000000 bow 1 2 PV Ear e NO x 9 98 00 000009 000000 Y A 0000 00000 ES 00009 0 00 1 001 1 802 T lt D GC M 2210 1 lt 0 000000
62. PH INH 0000 0000 PL INH 1 FFFF DPH INH DPL INH 1 0 1 LSB _ _ _ 5 38 536 1100000000000 5 16 1 O T LINK SLAVE T LINK SLAVE T LINK 5 16 1 1 T LINK SLAVED 1600 16 51612 1 2 OUT WNO 00 40 01 0000 1140 02 0000 WNO 03 0000 WNO 04 0000 WNO 05 0000 WNO O6 0000 4007 0000 lt lt gt gt T LINK SLY OUT T LINK SLAVE
63. 0000000000000 62 0000000000000000 5mm o0000 0000 _ Non X bono 8 EXE 3 uml 0 6 2 000 BUSY 0 0 BUSY 000000 000 6 3 000000 8951 0000000000000000000000000000 0000000000000
64. TAG 3 2 1 001 PVL 3 2 128 3 62
65. m lt U ea gia 5566060909 00000060 0090595000909 o 19 81 00000 862 PDZR1001 PDZR2001
66. 5 17 3 o PT rrr rrr 63 00000000000000000 0000000000
67. A 0000 III U 000 5 15 3 1 PVI PV 51532 O0 00000000 OUT CONNECT PHI INH PL PL1 INH 00007 DPH DPH1 INH 00004 DPL1 IMH 00008 PPL lt lt To 2 5 43
68. 722 PV 0 76 0000 000000 DUDUL 8 1 8 2 8 3 4 8 5 8 6 8 7 61 00000000 811
69. OO ONOI OU N 10 00 8 000000 MENU 2 3 0000000 PASSWORD 00000000 uuu De fault 0000 D MENU2 S 000 PARAMETER PV_H 125 00 5 PV_L D 25 00 FS 0 0 DPH 100 00 CUT 0 01 TF 0 0sec PV_H 125 00 FS 0
70. 007000 9 EJ ES 00 5 00000000 00 6 0000000 1 pvz ModBUS IF 1 001 All DI10 DO10 16
71. MENU1 3 MENU2 3 MENU3 3 e 000000 0 10203040 00000000000 24
72. 0 000000000000000000000000000000000 0 00000000000000000000000000000000000 aa cn EEIE 12 12 0000000
73. AI MONITOR Al Al AO MONITOR AO AO DI MONITOR DI DI DO MONITOR DO DO WAFER OUT T LINK MAS T linki Ting SLV T link Ting 53 523 STATUS MONITOR STATUS MONITOR IB I COM 28 6 ES D 5 3 5 4 011 AIO6 AO CHO CH04 0000 10 1 CH05 00000000 0000000000 H PVD01 00000000000000000000 0 1 PVD02 000000000000000000 den PV 00 25 000 125 00 20 25 00 125 00 105 106 i 20 25 00 125 00 5 4 i ZERO FU U Q 00000000 Lr 15 Tg Tim Ta Tg 5 4 524 DI O 0 ODOL STATUS DI MONITOR STATUS DO MONITOR 55 9000000 5 6
74. H 5V 5V 5249 RO 5M 00 Dm 1 1 0 1 0 0 SC 100 8 10 Al scg 3 1MO 5V 15 PXJ SC 8 11 88 852 DC1 5V 500 3 10 0000 8 12 1 89 8535
75. PDZT0001 CPU IJ O 00000000000000 0 500m 1 0 00 0000000000 00000600 CFA 5V 4MB 20MB 32MB 32 1 4MB 18 20MB 90 32MB 135 00010000000 40 0000 00000 0000000 4000000 160 0000 000000000 0000000 PCMCIA 0120 893009 5
76. PV PV 21 00000 0 23520555 101 RHITI 0 H 100 AC240V TI 50 60 1 0 0 DC2AVITI 0 00000000 01000000000 5 5 10V 5V 0 1 1digit 327670 32767 4131211 0 00 0 100 0096 8
77. 4 5 00000000 e 7 8 00000
78. 4 MI 4 1 AO2 5 6 AI2 7 8 9 10 4 PCD 12 DI1 DI2 DI3 13 14 15 DI4 DI5 DI6 16 17 18 DI7 DI8 DI9 19 20 21 0110 22 001 002 23 24 25 0 30 DO3 DO4 26 27 28 DO5 DO6 29 30 31 DO7 DO8 32 DO9 DO10 8 2 8 15 00000 872 0000 1 MI42 AO1 MI 2 SC 2 3 3 MI44 SC MI 4 4 DO6 FLT DO7 DO1 DO8 DO2 DIO COM DO3 DI6 DO4 DI7 DO5 DIO COM DI1 DI8 DIO COM OPT DI2 OPT DI3 COM DIO COM 142 DIA lo2 015 Rcj 2 12 lo1 Rcj 1 G NA 1 1 8 22 m 0000 0000 24 D 5485 0 PCD Mo
79. FIX Ll MENUO 3 MENUJ3 00000 00 0000000000000 G amp 1 EB D D U UD D U 00000 000 000 READY WAIT 00000000 0000 0 0 0000 ___ ___ ______ 511 00000000 56 00000 000000 3300 SYSTEM SETTING 0000000000000000000 5 6 1 UUDDUDUUUUDUDUUDBUDUDDUDUBUDDUDDUuUuun 1000000000000000000 5 62 174 SYSTEM SET 00000003000 000000000 a 5 16 00000000 00000000000000000000000000000000000000000000 5 12 00000000 5 7 5 5 71 5 7 2 RUN STOP MENU 3 3 sc OFF FIX READY PASSWORD 0000 Run Stop RUN STOP Loori RUN j RUN ST
80. OFF BUS 1 TI 10 9 2 6 00 3 1 3 2 3 3 3 4 3 6 3 7 3 8 31 0000 311 00000 0 LOOP
81. T4 1 0 A 00000001000000000000000000000000 0 FLTUD 00000010 00000000000000 Modbus Modbus Modbus 7 12 0000000000
82. 12000000000 121 Modhbus 00000000000 0000000 Modbus EIA RS485 2 500m EVEN 00 12 2 110000000 RS232C RS485
83. 8 17 10 T LINK PDZR1001 0000 001 PDZK PDZK 1 7 21 Modbus PDZR1001 0000 078 001 PDZKe l PDZKes1 PDZKeel K _ K PDJ PDJ PDJ PDJ 812 8 19 87 871 0000 MOD F 79 922224 60 MI 2 0000000 osto VST1 S0 Ono 95 61 2 81 osos 3 62 VP PCD 7g VPD our 020207 83 H 64 L N 0000000 00 000 00 00 00 00 gt 0 000 lt 9 001 ae gt UL 000 lt ke 002 Le RS485 Modbus 24 D 00030000 00 000330000 UD 00034000 00 00 000510000 AC100V 240V 000 000520000 4 000710000 T 000720000 gt 00073000 e 9 0 000 7
84. 19 142 00000 MENU Sel lt Back 3 2 2 1415 PDJ 9 10111213 r3 r3 r3 r3 r3 gt Hj cB r3 a m r3 ENNAN Pa a ET ricum ES r3 T I 10 e mg 2 m EJ ma O52000 o 55 Rc z um o0005208 51
85. MENU 322 0000000 Cx Cmd 111100019 0000000 10 20304 65 1
86. 0 41 0 5 0 21 0 3 00000000000 0 20 0 3 0 40 0 5 m 3 0000 8 84 67 5 n n JL D 8mm 0 0000 N 00000 000 N 8 137 5 7 0 Kx 4 NI N 2 00000 emn 0
87. 511 5 4 5 3 5 3 1 2 1 PV2 11 PV2 11 PV2 5 12 000000 5 3 PV2 485 Modbus DU TO 2000 4 1 5 o2 lt Q0 Qog a a s a CICI 151244 LL N oa oo E 2o00 2 a a E mi a 000000000 000010 Pvt 00000000 20 2 00000000 051 0000000 AN 00000000000000000000000000000000000000000000
88. 390 0000000000350 0000000000000000 000000 MENU18 TRENDIT RESET 00 00 00 00 72000 22010 5 19 00000000
89. 1 2 1d Windows Microsoft corporation Sc
90. 52 52 000000 JE 5 2 1 8 5 2 2 STATUS I I J B Al MONITOR E DI DI MONITOP EM DO DO MONITOR EC QUT NH SLV _ T Linki Back Y Sel 5 2 5 T LINK J
91. 000 CON48 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 0 00 5 18 000000 u U 0000 000 1910000 00000 CONI 000000 0000 0000006000000 000000 327 67 327 67 100 0 00 000000 230 TREND SETTING T 0 c D 00 0000 00 0 D D 0 0 00 0 000 10001 0 4 80 0 320 D
92. PC 12 00 00 PCD 21 00000000 00 DIO COM 31 34 58 61 00000000 00 N 00 8 17 SANA NAK s H g 22 TEB PDH 22a a n s DD 6 TER Pasean aaa naa pa 00 7 sq TP BRE 8 8 TT DS 10 EA ENE ML EE DD 17 18 0 1 0000 1 0000000000000 0 000000000000000000000 00801000000000000000 0 0000000000000000000 EN AN L3 7000000 81 20000 200mS
93. ALM FLT STATUS MENU 2 3 PARAMETER CONSTANT LINEARIZER TRENDSETTING ALARM SETTING IC CONTROL PANEL MENU 3 3 SCC FIX RUN STOP Run Stop SYSTEM SETTIG CONFIGRATION WAFER CONNECT OUT CONNECT COMMUNICATION 3 1 00000 U 300 MENU2 3 I MENU3 0000000000000000000000 2 PASSWORD MENU 00000000000000000000000000000000000 SYSTEM 38 36 000000000000000 361
94. YYYY MM DD hh mnyss 000 00 000 00 000 00 LIN ee 000 00 0000000 2 MIN MAX hh mnyss 000 00 000 00 000 00 000 00 Pen4 Min Pen4 Min 4 hh 2 2 mmi 2 DD 2 SS 2 E B Dya a Z nnnnnnnnn apanan aaa aaa laani Ru 7 2 aaa agep eg aaa het 7 6 BA A 7 1 00000000000 7 11 0000000000000
95. 5 44 T LINK SLAVE WNo 00 T LINK SLAVE 0000 0000 WNo 15 FFFF 1 5 59 AAN 5162 T LINK MODED TLink 00001 00000 5 16 21 0000 990000000000000000000000000000000 5 16 22 000000000 10 19000000000 00000 5 45 000000 00000000 u 0 u 0 0000 00000 WORD MODE 10000000 4W_IN 169 00000000 4W OUT 4Word In Out 0 00000 4W 2Word 2Word 00000 8W IN 00000 8W OUT 4Word 0 000 Word 00000000000 i c DUE 4Word 0 000 16 00000000000 0000
96. FLT 4 3 AI CHECK DAI OPTION FLASH WAR WAFER STOP CNCT ERROR 128 3 10 363
97. 7 6 BUN HAH 8 1 E bl 8 2 8 2 812 8 2 Dan 8 2 B TEN OK Tg aaa ua m 8 3 HE 8 3 22 L IEEE UN OUR 8 3 tA NEA 8 5 T 8 6 SE T M DT NE KA 8 6 842 24 Estate deum CA uu Ls cn 8 6 zu uwa waman m 8 7 84400 pou ECT MG 8 7 S DT a SEE E DEEP 8 8 ef eut 8 8 8 5 2 mi SE Sega 8 9 CERE BE EI CD u EE CN hu na au 8 10 RE 8 11 85 H TEB SUME t 8 11 862 mag oto 8 12 8 13 ER 8 13
98. 00000040 000000 5 32 5142 000000 EG WAFER E 01 cm 9009 EJ Cass CODE 9000 Water sooo No 04 2284 cope 9908
99. ananas sas qh atopan sb mans asss 5 31 5 35 9m TT tamam amara eta E Sui 5 33 SSS FF TITI IL Ll a As sumay A 5 35 AA A 5 36 a S A asss 5 36 5 52 T EPI aa aa 5 37 a 5 38 EL RE MAR GA A EP PD Sauna 5 39 e ag pam uyu Sanaba mashi 5 39 ord e m da ie 5 40 a AP D TR RR D H 5 41 512 09 aaa Ma ap aa Na as ete e m ie enitn ttd 5 41 MR Mu AREK a PEN M MO OD M E 5 42 5 12 99 Rb D EIC R 5 43 NE NA 5 44 Bp aa unn 5 45 000 aaa San u atum mkn aoa 6 1 a Na Ja AA AE AH A a LL 6 2 62 6 3 6 3 TERR MR RR QE A mrak aa E A 6 4 AS HN a asa s aaa ban T 6 4 HHH EL SL HNH 6 5 00 7 1 ma Bay ass ay taqa a kas 7 2 Anu Ha Djs OS SIS kn WA aaa BATAN A 7 2 7 2 AN 7 6 7 6 NR AREE NONE
100. m 141 0032 00000000000 10 20 000000000000000 0 www fesys co j p http www fic n amp j p 0421 585 2800 FAX 042 585 2810 0000 91 001 120 00 001 50 00
101. 00000000 HU D 0000 00000 ALARM LATCH 0000000 2000000000000 ON OFF OFF SYSTEM FLT LATCH ON OFF OFF 1 5 21 00000000 5 113 O UL 0000000000000 5 11 3 1 TR uuuunu 5 113 2 LU DJ LU I SYSTEM SET 000000000 0000 Modbus 5 23 00000000 00000000 0000 00000 SATIONADR 0000000000000 5 20 255 1 BAUD 0000 7 2400 4800 9600 9600 MODBUS i 19200 PARITY 0000 000000000 NONE EVEN ODD NONE 0000000 000000000 1002 1 0100000000000000 0 0000000000000 0 0000000000000000000000 3000000 0201000000000 6250 00 MODBUSII 000 0 0 19200651 0000000000 A 2 0000 0000000000000 5 22 5 114
102. 8 16 M uh aaa M E bM Roue aa KA 2 6 Moe 7 a aa a Na b 8 8 me HER 9 catu LLL IL 10 TE 11 wc 17 18 lt gt
103. ER MUERE 4 2 eg RR A 42 a ana abue an s qatuqa ag aga aa 4 3 aca pep TREE nu EU a 4 5 4 5 1 3 00000000000000 unn 4 6 Pl E MEA 5 1 Sen W Pape UL 5 2 A NGE GN E 5 2 EAM n NGANA Nak 5 2 BOUT JT KANAN A 5 3 BOT ra sn aa aan ak ek c na 5 3 Eos TATU ayaqa aaa naa qamun yaya 5 3 5 a maa a A 5 4 I a aee a 5 5 55 eaaa 5 6 526 5 7 ES a a 5 9 BEGUN Seat NGANG AE Me 5 8 5 8 5 10 54 100 sonus E 5 10 C Soda M TEB 5 10 A PATET 5 11 DET sasha LR LR T eN LT 5 11 lj e NGANA AG NGANA ONG BA KAN 5 11 EN NA a A KK 5 12 BI lent RN s MALE a xa 5 12 5 5 2 DEDERE aaa 5 12 RUNIST
104. 0 23 2 55 100 100 D AC240VI TI 0000 50 60Hz DC24VITI 000000000000000000 31 00000000 50 0 700000000 1000000 5 4 DC0 5V 1 5V DCO 10V 4 0000 FFFF 0000 DC1 5V 0 1 FS 15 DC1 5V 12 5 112 596 20000000 DCO 5V0 0 112 5 PV 8 DC1 10V 0901 10596 0 1 FS
105. 1 5 7 RFPSUM RFONF1 RFTPCM RFLIMT RFSLCT RFPUGE RFABSO RFTIME RFLNR1 RFRAMP RFLNR2 RFAVRG RMISPV RFSUMA BITCN2 RFLNR1 BITCN3 RFLNR2 BITCN4 RFLNR3 BITCN5 RFLNR4 BITCN6 RFFLIP BITCN7 RFDCOD BITCN8 RFLNR3 BITDIV RFRALP RM2SPV RFADDE RFROOT RFSUBE RFSUMM RFMULE RFSBML RFDIVE RFMULT RFPCNT RFADDV RFALM1 RFLOGI RFAPUL RFSWCH RFLLAG RFECOD RFMAV1 RFSTGE RFMAV2 RFABCD RFAPWM BCTO1BI RFHOLD BCTO2BI RFDET4 BIN BCD RFDET5 BI2TOBC BIN BCD RFDET6 RFDET1 RFLGC2 RFDET2 RFLGC3 RFDET3 RFLGCA RFPRDV RFLGC5 RFFLAG RFLGC6
106. 5 10 000000000 4 REY 000000 0 5 12 000000 0 5 11 000000
107. 0000 00000 FL TEL EL BL LL L a 5 2 S 5 3 hasa a 5 8 ANNA DHAN 5 10 2 5 11 5 12 57 RUNAS VOD e mua etie 5 13 5 14 n nanas 5 15 ana anyan 5 18 ERAN E 5 19 5X2 E AN 5 24 5130 assa eth aieo tta eid 5 27 ttr tdt 5 31 5 36 5 16 T E HDHH E dat 5 39 tae un atu 5 41 PR E 51 000000
108. 0 0 1800 0 Pt1000 200 0 600 0 C 200 00 200 0 C Pt1000 200 0 850 0 C 150 0 400 0 C J Pt1000 0 00 150 0 0 0 800 0 J Pt100Q 0 00 300 0 C 200 00 800 0 J Pt100Q 0 00 500 0 C 0 0 1600 0 J Pt100Q 0 00 600 0 C 0 0 1300 0 J Pt100Q 50 0 100 0 C 200 0 400 0 C J Pt100Q 100 0 200 0 C WRe 5 26 0 0 2300 0 J Pt100Q 200 0 600 0 C 5 30 0 0 1300 0 00000000 214
109. MENU 2 3 CONTROL PANEL IC CARDO IC CARD IC 5 17 31 IC 5 17 3 2 CARD FORMAT NONE HIC READY IC Y 4 5 50 IC Sel
110. 00000000 D D D D D D 00000 D D CHO1 0000000000 00000000000 00 20 OFF _ CH10 ON CH01 50000 000000000 2900000000000 00 000 OFF H CH10 DO ON 5 5 00000000 5 25 2 al D UW N T Wafer 1100000 8 fer s No 04 57 0000000000 58 0000000000 00000000 00000000 0000010 40000 0 0000011 300000 000000 000000 0000000000 56 5 2 6 VO O T LINKO 00000000000 MONITOR MONITOR T LINK SLV IN T LINK SLV 00 08 92 m ONE D 5 9 T LINK SLVIN T LINK SLV 0000000000000000000000000 00000000 D D D D D D 00000 D D Wno 00 0000000 00000000600 1600 Wno 15 00000 57 53 00000000000 531 2 30 000000000000000000000000 00 00000000000000000000000000 532 5 8 0000000
111. O X 1 LL O a PD li a 1 2 toppa EDT veneto a a riae 1 3 an 1 7 BDE yun 1 8 TEH EN Qua nu nln uu 1 11 11 00000 HIERBA o O o S 0 1 5 0 000000000000000000000000000000000000000000 0 000 00000000000 000 00000000650 00000000000000000 0000000000000000000000 I E 2 r3 L1 r3 ESI L3 000000000000000000000000000000 00000000000 EJ
112. W02 W03 W04 A00 A04 A08 A0C 0001 0010 A01 A05 A09 A0D 0013 A02 A06 A0A A0E A03 A07 A0B A0F itg PV 1d 2 W15 W16 W17 W18 Ai 6cl 1 00 m n n un A38 i A39 A3D A41 A45 42 46 Wafer 0000 Wafer 0 Loop10 00 A3B A3F A43 47 W29 W30 W31 W32 A70 A74 A78 A7C A71 A75 A79 A7D A72 A76 A7A A73 77 A7B A7F W36 W37 w38 w39 A8C A90 A94 A98 A8D A91 A95 A99 A8E A92 A96 A9A A93 97 9 W43 W44 AA8 AA9 AAA AAB 18 W07 D 1 2 4 5 DO1 DO2 DO3 DO5 DO7 DO8 DO10 Wno 0 Wno 1 Wno 2 Wno 3 Wno 4 Wno 5 Wno 6 Wno 7 Wno 8 Wno 9 Wno 10 Wno 11 Wno 12 Wno 13 Wn
113. IC 1 Sel READY 2 WAIT 3 Sel WAITI 4 READY IC WAIT 1 IC PC 5 17 4 100000000000000 0 UNIT MAKE 100 100001 5 17 41 10 00000000000 Unit List K amp hout 0551 000000 0552 00000000 000000 0 0000000000000000000000000000000000000 000000000000000 0000000000000000 00000000000000000000000 5 44 5 175 0000000 00 MENU 3 3 gt
114. MENU Scc FIX PASSWORD Run Stor Looei RUN 3 3 OFF RERDY 0000 RUN STOP SYSTEM SETTING CONF IGURATION WAFER CONN OUT CONNEC Jy COMMUNICATION Pase Y 5 40 RUN Sel OFF ON 3 7 OUT CONNECTTTI 0 0000 0000 0000 000 0000 5 RUN STOP 5 5 35 BANA 515 0000000 5 151 0000000000000000
115. 00000 000 ni lt TEN ES y 21 6 1 280 E gt 3 0000 S Y
116. 2 Sel 520 00000000 000000 0000000000000000000 NONE NONE 00000000000000000000000 PH PL PHPL 0 00000000000000000000000001 DPL DPHDPL 000000000000000000000000 0 00000 D D 0000 0000000000000000000 0 5 300000 5 18 00000000 511 00000000 000000 3300 SYSTEM SETTING D D HU C D 000 00 0 0 0 0 0 0 U 1000000000000000040000000 5 11 1 51LL1 00000000 000000000000000000000000000000000 51112 1 4 SYSTEM SET nnuundguun 521 00000000 5 19
117. 5121 PVI 5 122 00000000 1100010 0000000000 0 5 25 000000000 5 24
118. CONTROL PANEL MENU2 3 gt 0 CONTROL 0000 D CONTRAST SET 000000000000 TIME SET year month day 00000 hour min sec 000000 CARD CARD FORMAT UNITO1 UNITO2 UNITOS UNIT MAKE Unit List UNITO4 UNITO5 UNITOG UNITO7 9 o rm E E m prc L3 rm E E E E E c rm E c3 ia rm E E33 rm ia rm i o rm a UNIT10 00 12 D 100000000 000 00 0000 0 De MENU 3 3 SCC 000000 FIK PASSWORD LOOP1 SYSTEM SETTING 0 MENU3 3 gt 0 SYSTEM SETTING 00000 BASIC CYCLE 000000 200 x 100 mas Di1 2 PI FULL STROKE 1 300 Di3 4 PI FULL STROKE 2 300 Di5 6 PI FULL STROKE 3 300 Di7 8 PI FULL STROKE 4 300 MENU2 3 MEN 00000 0000 MENU3 3 00000 0000 RESTART SET 0 1805 PV1 LATCH CH OFF PV2 LATCH CH OFF OFF STATION ADR BAUD RATE 9600 PARITY NONE STOP BIT STATION ADR BAUD RATE MODBUS PARITY STOP BIT 000 6 DAI Ch1 MODULE SETING MENUS3 3
119. Ta N aa gt io 5 gt is en mama Tong oopop0op000 gt 55 22 200000 El e 25 Ta x Es als jen jan jm 63 i jen jen jan 85 Eje e guod jem fun mm 45 amp oo r3 i 50 ru pague uo s mala ES oooo00p000 Een uuu 2 e 05 lt E aaa 050205 T T c CO st LO a 2 12345678 l5 0000 1 112 T ERROR 2 2 22 0 000000000000008 2 3 EL ED Don ido to bte e ptt 2 4 zu 2 5 2 5 0000000000000000000 00000000 2 6
120. PV_L 25 00 FS 0 DPH 100 00 0 01 0 0sec CONSTANT MENU2 3 2 CONSTANTII 00000 LINEARIZER MENU2 3 LINEARIZER 0 0000 000000 00000 25 00 125 00 a 125 00 25 00 125 00 125 0076 000000 00000 25 00 125 00 a 125 00 25 00 125 00 a 125 00 000000 00000 25 00 125 00 125 00 25 00 125 00 125 00 Y16 000000 00000 25 00 125 00 a 125 00 25 00 125 00 a 125 00 11 TREND SET MENU2 3 gt TREND SETTINGI 00000 COMMAND INTERVAL LOG TYPE SAMPLING Pen 1 Pen Tag2 Pen Tag3 Pen Tag4 Pen Data1 Pen Data2 Pen Data3 1 8 8 8 Pen Data4 FULL D P Pen1 UNIT Pen2 BASE Pen2 FULL Pen2 D P Pen2 UNIT Pen3 BASE Pen3 FULL Pen3 D P Pen3 UNIT Pen4 BASE Pen4 FULL Pen4 D P Pen4 UNIT D AaMSET A X J gt 0 ALARM SETTINGO 00000
121. 25 EA ES 2 6 aw Lt k e M Mr S SIENNA US DUM MC T 32 eri Pac ADD 32 3 2 EEEREN apk 3 3 a TG 3 3 a o CE ettet a 3 4 3 3 m ED B CT H y ae ana 3 5 TNR RR NR 3 6 ROT NS 3 7 351000 aa EIE ERR eoo usan a BEA A 3 7 apa NGE E a 3 7 IPE BHN eaae ouest nto adiectae daa A aana 3 9 Sa pa bei a aa ete 3 9 EDEN tec t outta 3 10 3 653 RE BED GI E aaa aaa ue un MD RUE 3 11 ict A LU LM EDU E 3 13 S SN SNNT Qr X TD PE 3 14 E WH a Wu EIER AAA 3 14 31852 SE AT t ROO 3 14
122. gt CONFIGURATION BASE SCALE TAG1 001 TAG INPUT 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING TAG INPUT TAG2 001 BASE SCALE 0 FULL SCALE 10000 DIMENSION 2 UNIT SETTING 0000 3 c3 3 c3 3 c3 rm rm prm 00 13 AO SETTING D gt CONFIGURATION AI SETTING CH1 RANGE AOSETTINGU 00000 BASE FULL CH2 RANGE BASE FULL CH3 RANGE BASE FULL CH4 RANGE BASE FULL CH5 RANGE BASE FULL 0 gt CONFIGURATION PV1 RANGE gt AISETTINGI 00000 BASE FULL PV2 RANGE BASE FULL CH1 RANGE BASE FULL CH2 RANGE BASE FULL CH3 RANGE BASE FULL CH4 RANGE BASE FULL CH5 RANGE BASE FULL CH6 RANGE BASE FULL DIRECT SETTING D MENUS S gt CONFIGURATION INPUT TYPE gt 0 DIRECT SETU 00000 INPUT RANGE ON OFF INPUT TYPE INPUT RANGE RCJ ON OFF TREND JUMP 0 MENU3 3 gt 0 CONFIGURATION 00000 PV1 gt TREN
123. 5 105 35V 1MO 0 1 50 10 0 1 FS 2500 02000000000 4 0 2 FS 1digit 4000 5 FS 500 q 1 FS 1001 50 FS 1 00 50 5 105 1 0 1000 0 254 0 2 5 10 1 0 290 5 1
124. SCC EN CEN1 091D PV2 4 14 SCC SCC2 0934 1 PV1 SCC EN CEN2 093D 2 PV2 1 PV H PH1 0942 6 Al6 PV L PL1 0943 1 PVD1 A PV H APH1 0944 2 PVD2 A PV L APL1 0945 10 DI10 2 1000 PV H PH2 0952 1 DI1 PV L PL2 0953 A PV H APH2 0954 A PV L APL2 0955 1 WNO01 0A00 TU 16 WNO 16 PV 1ch FLT3 1 PV 2ch FLT3 2 Ai 1ch FLT3 3 Ai 6ch FLT3 8 PVD 1ch FLT5 1 PVD 2ch FLT5 2 ROM WAR2 1 ROM WAR2 2 WAR2 3 ROM WAR2 4 ROM WAR2 5 Wafer Loop1 WAR3 1 Wafer Loop1 000 WAR4 1 ra 1 1 0880 t day mmH20 mg mPa mm sec kcal F kg day kg h kg min kg sec mm min cal g day mm h kcal m Nm day Nm h min Nm sec m sec day m h m min m sec m min NI day NI h NI min NI sec m h RH 1 km h Vol cc day cc h cc min cc sec e 00 HH 4 00000000 0000000 00000000 0000000
125. amaha a am rcu anan o000 rcm anan 2 o0 rn EE rn EE o0 rn o0 rn 1 9 m 5 27 5 132 0 U T AI SETTINGI T 15 5 13 21 001 001 51322 00000 4 a U 5 29 00000000000 00000000 gt E E gt 0 5 gt gt mr NK NG oaod m o0 d janjan rH ma o0 Qu mm m EEG rico Lr o0 rire L3 p 5 ma gt 3 ma m m 5 00020 pj Jangga a ma 0 oon pya C303 E03 Aj C3 ooo amu ooog ooo aooaa am a aaa rema anaa ccm ES EXE o0 o0 o0 o0 o0 o0 Ta wu 9 9 ac m LL 5 28 5 133 0000000
126. 0 0 T Llink STATE IT T Link SETUP 000000000000 000000 0000000 5 40 Master 56 SYUKUTAI FTLS FAULT 0 0 0000000000 517 0000000000 CONTRAST SET 5 17 1 U D U D LH MENU 2 35 CONTROL gt CONTRAST SET 5 17 11 LCD 3 5 17 12 273 3 3 CONTRAST CONTRAST CONTRAST Adjust Contrast 1
127. 0 0000000 0000000 0000 0000 00000 MENUJ 3 TI 0 00000 00000000000 9999 0 0000000000000 32767 090 00 SCALE 00000 BASE SCALE FULL 00000000000 0000000 FULL PODOD 0 0 0000000000000000 9990 10000 0000000000000 32767 000000 100 DFFULL SCALET 000000 BASE SCALE FULL 00000000000 00000000 2 D 00000000 4 UNIT 0000000 MENU1 3I 00000000000000 00 00000 100000 00000000000 00000000 00000 00000000 2730 0 0 0000 00000 0 5 17 00000000 5 10 000000000 2 300 ALARM SETTING 5 10 1 PV PV PV 5 10 2 1 ALARM Ber ararh alarm
128. 00 4 ON 000000000 9220 0000 0 2 0000000 OFF 0 2 59 54 00000000 541 2 300 LINEARIZER 542 5 10 LOOP 1 25 0 125 8 125 8 125 8 125 8 125 8 125 08 125 8 125 8 125 8 125 08 125 8 125 8 125 9 125 9 125 8 125 08 125 8 125 08 125 8 125 08 125 8 125 08 125 8 125 88 125 8 125 88 125 8 125 08 125 8 125 00 125 00 125 00 125 00 125 00 125 08 125 00 125 00 125 00 125 00 125 00 125 00 125 00 125 08 125 00 125 88 125 00 125 08 KI 1 L U 5 14 0000000000 Output Y LIN1 J LIN4 4 KO Y 16 X02 Y02 X16 Y16 19 X01 Y01 777005 Y15 X03 03 Y04 Input
129. 0000 10g 22V 0 D 0000820000 000 5657 76 000 62 PCD 000620000 000000 35 36 37 77 78 79 800 00000000 0 1 2 3 41 000000000 0000 8 21 8 13 0000 1 1 1 101 11 12 13 0 2 1 2 2 14 15 16 1 MI 1 77 78 2 MI 2 79 80 AI2 AI5 71 72 73 74 75 AO1 2 4 5 51 52 53 54 55 5 56 57 76 011 012 001 FLT T1 T2 VST2 MOD MOD VST1 VP VPD 000000 00 8 1
130. 00000 10 0000 v 4 0000000009 00009 W lt 00009 AO D 000 gt gt 5000000 _ 19 y e 19 Tune 11119 000000000 00000000004 m lt 000000000 0000000 0 Ls 0000000 79 5 000000 0000019 RUN STOP 00000090 S4 P 000000000 gt 0 00000 gt 00000000 0000 0000000 0 0000000000 9 0 T LINK SLAVE 9 000000 gt 0000000000 gt 0000000 000000 ne O o Y Y 0000000000 000000000 000000 9 mune P
131. 000000 0 0000000000000 se 1 00000002 Bak ND 000000000000 Constant Parameter 1 20 10 0000 2 20 Pv20000000000 LOOP 0000000 20 000000000 35 34
132. 0000000000000000 0000000000000000000000 0000000000000000000000 0000 O00000 A OFF ON A 0 AUTII 0000000 OFF AUTO BUSY A 0000000000000000000000 000000000000 000000000 23 23 OR 34 26 D 2 MENU
133. 01 00 32MB 000000000000 http www sandisk com PCMCIA PCMCIA PCMCIA 0000000000 000000 15 16 EA ra 5 29 TC O 7 2 T LinkT PDA T MICREX F120 P 7 2 Modbus 1 00000 1 1
134. 4 101 000 4MB SDCFB 20 101 00 20MB SDCFB 32 101 00 32MB 141 40000 010 1990 61010 1993 50081 2 1994 50082 2 1995 151 8 21 8 23 161 INP TN512178 M INP TN2PDA2 00 2 000000000 1 1 1 1 0010 PV1 4 4 0013 5 SCC1 0914 1 0014
135. 5 2 1 0 ON 10 5 15 22 DO CONNEC OUT CONNECT CH OH CH CH CH CH CH CH CH CH 01 02 03 04 05 06 07 08 09 10 0000 0000 0000 0000 0000 0000 0942 0943 0952 0953 Back 5 42 0000 00000 CH1 CH10 00000 FFFF 0000 5 37 00000000 5 15 3 000000000 ALARM
136. 8 5 33 No44 00000000000 441000000000000000000000000000 000 00000 4 000000000000000 441 0000000000000000000000 00
137. CONFIGURATION TREND J TREND JUMP 5 17 3 1 Tmd 5 17 33 22 TREND JUMP 0000000 0000000000000000 EA 00000 1 80 8980 00000 2 1 9 Sel 48 00 19728712731 13 83 18 1 p gt 6 60 00 1 001 T gt T 1 I lt gt gt 000000 000 006
138. DJUMPU 00000 PV2 WAFER CONNECT MENU3 3 gt WAFER CODE 0000 No 1 No 4 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 000 5 INPUT 1 00000000 0030 INPUT 2 00000000 0000 INPUT 3 00000000 0000 000000 0021 6 INPUT 1 00000000 0a10 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 0000 No 7 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 0000 8 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 0006 9 INPUT 1 00000000 0031 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 0041 10 INPUT 1 00000000 0 20 INPUT 2 00000000 0000 INPUT 3 00000000 0000 CODE 000000 0000 No 11 No 48 INPUT 1 00000000 0000 INPUT 2 00000000 0000 INPUT 3 00000000 0000 15 T LINK SLV OUT 0 MENU3 3 gt 0 OUT 000 WN0 00 0000 gt 0 T LINK 00000 WNO 01 0000 000 0 0 WNO 14 000000 0000 WN0 15 000000 0000 MENU3 3 gt 0
139. GAE 0 00 Para 0000 eui 0000009 00000 0 3 3 lt gt lt lt gt 10 36 35 000000000 351 352
140. I UNIT SET UNIT SET 5 27 000000 513 00000000000 5 131 lt Oo 2 lt 5 lt 3 c8 O lt Lo lt 5 13 11 51312 00000 M 0000000 0 0 5 28 00000000000 00000000 o gt gt o 2 gt gt mr mr AN Tm o0 d 23 163 20H 3 o0 o0 jun jan H 1 o0 pj ooga o0 ma 2 t3 oonan pya 030303 Ay C3 maa
141. OP SYSTEM SETTING CONF IGURAT ION WAFER CONNECT OUT CONNECT COMMUNICATION Y Sel 5 17 MENU3 3 STOP RUN 1 MENU3 3 WAFER CONNECT 2 T LINK 5 AO CONNECT DO CONNECT ALARM CONNECT STOP STOP RUN RunyStop RUN STOP FLT 00000000 58 00000 000000 2 31 CONSTANTI 0 480 480 000
142. OR IESU EE 5 13 5711 noD 5 13 DHA m RR luan i qatana 5 13 gt MR I E 5 14 ms M NGA 5 14 Sa gia 5 14 SO TL LELE an tat asp s Po 5 15 PG 5 15 BOT sap BET 5 15 SO NE a na Ta as 5 18 a a AN 5 18 5 RO 5 18 PR RT E E UR aa a NG NGANG C NG A 5 19 5111PIDQDO00000000000000000 sesse 5 19 ak a ka A aka Da H H a NE NA qan 5 21 T NE A EN NE A EN 5 22 STA e a M MR TA RETE 5 24 RR RR REN 5 24 catre MEET PPM RE 5 24 Ae saa NENTENG KA KN NAN 5 24 SEEDS FEET amun n Sa 5 27 5131000 000TA atio ie n it AN EA redo ettet 5 27 5322 esiste et sos enia ah 5 28 5133000 a ERR 5 29 e DDR Ds Qe 5 31 AWE M NE
143. OUT CH1 000000 0 14 5 AO CH2 0 24 000 CH3 0000 0000 CH5 0000 DO 0 MENU3 3 gt 0 OUT CH01 000000 0000 5 0 DO 00000 2 000000 0000 CH03 0000 000 CH04 0000 CH05 0000 CH06 0000 CH07 0942 CH08 0943 CH09 0952 CH10 000000 0953 ALARM z 0 MENU3 3 gt OUT PV1 PH INH 0000 PL INH 0000 10000 DPH INH DPH D D 0000 DPL INH 0000 PV1 PH INH 0000 PL INH 0000 10000 DPH D D D 0000 DPL INH 000241000 0000 T LINK WORD MENU3 3 gt COMMUNICATION WORD MODE wonp 16W 10 5 000 SYUKUTAI 000000 ON FTLS USE 0 NO FAULT CLEAR OFF 16 00 9 199 HNI LHd 01 000000 0000 0 04 Leod soq voa LOG S0V S 000000 00000 17 1 10 00000
144. PV D 1 001 0 3 1 1LOOP J 0 1 20 0000 2 20 20 0800000000 B 0 LOOP B 0000000 20 000000000 312 MAN POWER ON CONDITION 2 DD IL 21 0000 MANT 0 e CONT SY STEM SET RESTART TIME
145. T CONTI INIT e CONT AUTO 0000000 4 2 E a 4 2 ERUNT 4 3 44 ce caes 4 5 41 42 FLT FLT DO
146. X 513 00000000 0 00000000000000000000000000 WNo 0000000 00000000 91 1 92 LIN 2 93 A7 LIN 3 94 LIN 4 20000000000 5 000000 LNI Pv20000000000 00 LIN2 0 RIDEI 55 55 1 55 2 MENU 3 3 SCC OFF T scc OFF sec OFF FIK D Ent rmx 000 Jm PASSWORD 0000 gt PASSWORD 0000 p PASSWORD 0000 RunzStoP RunzStoP Run Stor Inm RUN RUN ass RUN CONF I GURAT TON WAFER CONNECT OUT CONNECT COMMUNICATION 5 35
147. dbus 100 rhl 000 0000 DIO 24 0 T 1 000000 000000 22 23 24 25 26 27 36 37 38 43 440 0 D 0000000 8 23 8 16 1 1 1101 64 67 65 Rcj 1 66 2 2 102 39 42 40 Rcj 2 41 1 MI 1 43 44 2 MI 2 22 23 3 3 24 25 4 4 26 27 AIL AI2 AI3 1 3 4 6 7 9 4 5 6 AO1 AO2 45 47 48 50 Jd NU 4 10V SC 2 5 8 10 46 49 6000000610 DI1 DI2 DI3 57 59 60 DI4 DI5 DI6 62 63 32 017 018 019 33 35 13 0110 14 DO1 DO2 52 53 54 0000000 DO3 DO4 55 56 28 DO5 DO6 29 30 15 DO7 DO8 16 DO9 DO10 FLT 51 0000000 OPT COM MOD COM VP
148. hneider Electric 0000000000000 2002 2 00000 3 00000
149. o 14 Wno 15 PH INH PL INH DPH INH DPL INH DH1 INH DL1 INH Wnol Wno2 Wno3 Wno4 Wno5 Wo Wno7 Wno8 Wnol0 Wnoll Wno12 Wnol3 Wno 14 ___ DPL INH DHIINH DLLINH R ACK A18 A19 1 W12 w13 W14 A2C A30 A34 A2D A31 A35 A2E A32 A36 A2F A33 A37 Wal 50 51 52 A53 W26 W28 A64 5 A6D A66 A6E A67 A6F W35 A88 A89 A8A A8B W40 W41 W42 A9C AA0 AA4 A9D AA1 AA5 A9E AA2 AA6 A9F AA3 AA7 19 APAL ET N
150. y LOG TYPE FILL FILL FILL ROUND FULL ROUND LOG TYPE RESET POINT 200 MIN MAK 2120 ROUND T CARD RESET SAMPLING POINT POINT POINT MIN_MAX MIN MAX 0 1 RESET 5 16 220 2B 0000 00000 Pen 14 00000 100 0000 0000 000000000000 000000000000 RESET FFFF 00000000000000000000000000 Penl 00 0 00 00000000000000
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