〈 5G～0.00001G 〉 精密機器の保全システム 三次元空気ばね
Contents
1. 5 1 YCS 18 TEL 045 450 2211 FAX 045 450 2221 e mail sales herz f cojp URL www herz f coJp 7 E2. SVT I P 15mm 5 S 30mm SVT I P 40mm mm S 30mm 1 T S 380mm Hz Hz 1 0 1 s 4 5 5 6 6 7 1 0 1 s 4 5 5 6 6 7 2 a 2
3. 1 LR h pr mF a 5m 5 0 5MPa 1 0MPa 0 25MPa 0 3MPa PT1 4 1 PT1 4 1 6mm 4mm 5m 1 10f 130 000 i ED Re em 9 3
4. AI AH SI SI a 0 P 15mm 30mm P 40mm 80mm S 30mm 60mm 380mm EE 80 0gal 142 0gal 1 157
5. SVT 1812LA 200kg TP kr i 40 40 40 2 8 o 8 0 a 20 20 20 ji 40 1 40 40 60 60 60 1979 Il a EE 33 3 Ts SVT 1812LA 200kg X Y Z 1995 2007 2011
6. a 9 gt a 0 5 2 _2 a 4 4 5G 6 6 6 0 1 am 3 4 0 1 2 3 4 UE 5 08 G 5 09 G
7. SVT107UL4920mm 40mm 3 0 3mm a SUS 430 5mm SS 4 5mm LA 7 am i 1N 100Hz 1KHz 0 04um N 0 01um N 2m x 1m 300kg m N LNM M6 25mm XY 25mm
8. 3 4 5 3 5 6 7 1 GELLHHM 0 3 lm lm em lm lm lm ii ol 200 am 700 200 2 12 826 9626 17731 30566 53194 EE ET ii 0 Wi 5 02 697 2216 6966 12665 22797 37995 69658 osl se 172 il ts 4s tsz 279 507 se7 1570 1 1i 6 19 6o 1io 200 350 620 05 2 9 28 90 160 280 500 900 _ 1 os 2 os is 5s7 il 177 s7 570 02 5 02 05 15 27 48 86 152 005 20 01 02 06 13 22 38 63 http Wwww SeiSvol kishou 90 jp eq kyoshin kaisetsu comp htm SVT 1512LS 1I SVT 129LA T
9. 4 56 G 0 11 G 0 12 G 0 24 G 98 98 959 Hz i EE 10000 2 8gal 1000 7 800gal
10. 380mm LA LS 1 II II 80mm 160mm 0 1gal 5000gal S 0 1S Hz 10Hz 800gal 7 4 6 f 1 2Hz 1 0Hz
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