ダイアフラム型ドライ真空ポジプ
Contents
1. 5 5 1 0 4 0 6 4 6 42. 5 3 2 7X10 4X10 Pa P 0 4 P 0 4 J P 0 6 DJ lt P 0 7 JO 4 1 2
3. 8 0 03MP a 9 lt gt 9 1 1 O lt gt
4. gt lt 3 0 oe _ A lt gt
5. gt 1 1 1 lt gt
6. 1 2 1 1 50Hz 60Hz Oi21D IpA 121DAIDA 12108 DA 241S pa 241SA pa 24158 L min 120 145 240 260 kPa 3 3 16 0 ct00V 2Ci00 AC200V AC100V AC200V AC100V AC200V 2 igo cE100 i09 109 10 1 E100 10 10 19 4 0 0W 4P 17 927 9 YM7 0779 5 175 1 5 6 2 92 915 676 212 872 9 5 676 2 2 872 9 1400 1380 MOO 1380 rp Gao 1620 1630 1620 1380 1620 O D 16xI D b12 PF1 2 kg 26 0 0 40 mw 180 WxX411 OX285 Excess Voltage I Category Pollution Degree 2 Instlation Et Class 1 1 3 1
7. 11 1 11 2 11 1 6 DA 241S No 1 5 DA 1210 1 Cs 12 DA 121D 2415 0 No 1 2 3 4 5 6 2 DA 121D P 48 0 13 14 1 3 P 48 0 0 O 0O 1 4 P 18 O
8. gt gt
9. 2 P 0 4 J9 2 1 DA 1210 2 2 DA 241S 3 3 1 P 0 4 JD WORE lt 3 2 0 4 0 85 a
10. NN _ AN 6 0 _
11. 1 P0 0 4 OO P0 0 4 J8 P0 RETTO P 0 7 1 OFF 2 4 2 4 3 1 ON OFF 2 3
12. 05 _N lt gt 1 0 40 85 H 2 40 Fu ooao Sp gt 538
13. 0 1 1 1 2 241S 2 1 15 16 1 1 1 2 N 15 O 1 5 241S 2 1 2 2 4 O 0 1 1 1 2 1 6 241S 2 1 2 2 4 O 2 DA 1210
14. 4 1 gt 0
15. gt 3 4
16. 222 0033 2 7 19 M50 3F TEL 05 474 2011 FAX 045 474 2010 531 0071 6 7 1 MSF TEL 05 6453 2621 FAK 06 6453 3354 351 0022 1 7 30 E M4F TEL 048 457 9971 FAX 048 467 9981 491 0859 4 17 9 2 g2F TEL 0586 73 6991 FAX 0586 73 6992 981 3304 2 3 5 TEL 022 358 7522 FAX 022 358 1354 812 0011 4 3 22 MSF TEL 092 473 9541 FA 092 474 7507 196 0022 1228 20 TEL 042 549 7651 FAX 042 549 8681 604 8111 57 TEL 075 257 4751 FAX 075 257 4752 224 0043 408 TEL 045 474 3063 FAX 045 474 3064 6899 6301 3313 TEL 0995 72 1122 FAX 0995 72 1228 881 0037 291 7 TEL 0983 42 1411 FAX 0983 42 1422
17. 40 eaeoo 3 3 3 2 3 4 1 2 OF F 100 V
18. 3 1 0 mm lt eem 8 3 ON 4 OFF 3 5 1 2 1 0m 3 0 0 3MPa 4 3 1 3 1 3 6 OF F
19. _ N lt gt lt lt gt
20. 1 4 6mm 2 6mm H 18 20 Nrm 3 2 4m 4 0 5 88 6 No 5 6 gt 1 DA 121D 241S O No 3 5 6 9 gt
21. gt DA 1210 gt 0 4 0 lt
22. 8 1 A A 8 2 8 1 8 2 1210 1 2 C 1 B 2 A 1 8 3 B X 2 C Q 2 A 8 3 121D 2 M5 X 1 5 6 O 1 4 DA 241S No 1 2 5 6 DA 1210 D
23. 9 A 1 1 1 2 1 1 0 A 1 0 C 1 1 1 2 1 B 1 A 1 10 1 10 2 10 1 IE EE EE ME HE i EE rm 10 2 9 M5 X 1 5 7 O 1 5 DA 121D No 1 5 DA 1210 2 2
24. 0 2 3 3 5 5 1 5 2
25. gt 9 2 DA 121D 2413 2 No 1 2 4 5 6 7 1 1 M8 X25 8 2 1 2 M10X25 3 M10X25 3 4 5 1 0 4 2 5 1 M8 X25 4 1 8 N m
26. 6 5 6 3 ON 10 3 4 0 4 0 4 3 0 WW 9 9 64 885 MET
27. os lt gt lt gt lt gt
28. 1 2 M8X25 4 18 Nm ON 2 M8x25 8 2 0 N m 5 10 3 DA 121D No 1 2 5 6 1 1 2 6 M5 x 1 5 lt A C A B A 1 1 1 2 1
29. lt gt 6 2 gt BE EE 2 8 P 0 6 1 3 0
30. 30 10 16 0101 01 001 2 7 1 9 50 222 0033 DA 121DA 121D8 241SA 241S8 EMC EN 55011 1991 Group1 Class B EN 61000 3 2 1995 EN 61000 3 2 A2 1998 EN 61000 3 3 1995 EN 50082 2 1995 EN 61000 6 2 1999 EN 1012 2 1996 EMC 89 336 EEC 92 31 EEC 2001 2 20 7 Nobuyoshi Murata gt
31. 2 DA 1210 241S3 3 DA 1210 4 DA 241S 5 DA 121D 6 DA 241S 7 DA 1210 2418S 6 5 7 2 1 DE121D P 2 2 2 DA 241S 3 1 4 1 1 1 6 1 8 6 2 6 3 lt
32. ee EN RE Sh SE 1
33. 3 4 O 6 2 3 1 2 3 6 5 6 3 3 0 0 0h 6 4 gt SUS EPOM A C B SUS A O P 4 8 FPW IO P 1 8 FPW O N 1 5 FPMW US
34. No 26700 2 01 7 ULVAC DA 121D 1 2 1 3 3 3 3 4 3 5 3 6 OO El 4 1 4 2 4 3 ROW UW oO a 5 5 1 5 2 5 3 6 HE 6 2 6 3 6 4 1 DA 1210 241S
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