3．大気圧プラズマを準備しよう
Contents
1.2.
3. 2
4. 59 3 2 2
5. 1987 He DBD Dielectric Barrier Discharge APGD Atmos pheric Pressure Glow Discharge 16 48 49 1 He 2 1 kHz 3 1
6. Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 3
7. 4 NM MCD Electric field srength Magnetic flumx densmty HH gt IO Ii00 8 a It 8 8 1 1 ld Il I 10 IO IO 1O 10 IO 1 Im 10 IO oe 10 1 FrequercYIHz 19
8. 10 ko 1 MG E Ek
9. 150
10. L C 3 3 EH 1 4 i
11. CNs O03 VOC NOx CO CN ppm
12. 18 17 18 344 1
13. SBSL Gn liquid plasma technology 75 77 16 27 12 MHz 200 W
14. Keywords atmospheric pressure plasma corona discharge DBD Dielectric Barrier Discharge streamer discharge atmospheric pressure glow discharge sonoluminescence liquid phase discharge pulsed discharge RF plasma microwave plasma safety measure 3 1 3 1 1
15. 13 60mm 60 mm 130 mm SBSL 13 28 kHz 5 W Power Amplifier Ultrasonic Generator Personal Computer CCD Camera
16. 1 2 a 2 b
17. DBD DBD 10 10 cm 1 10 eV 9 1 DBD
18. 0mm 35 mm 11 0 01 2 0 948 11 a 0 01 atm b 0 5 atm c 1 0 atm d 2 0 atm
19. 19 8 20 V 1 A 10 101 A m 20 1 2 3 21 22 23 5 24 ns Lecture Note 5 24
20. 3 How to Practice 945 T Nozaki et al T 2 nF 14 5 kV 5mm 25 6 Va kV Ea J t us 7 1 89 uF 4 mm 500Torr 24 3000 _e 0 nF 0 4nF 5 2500 4 1 0nF V 2 0nF 8 2000 1500 O 8 1000 O 500 0 0 20 40 60 80 100 120 140 160 Pulse repetition rate DDS 8 14 5 kV 5 mm mL min 25 33 300
21. Ca 3 d 50 um DBD 10 pd p d 11 10 2 2400 Torr 5x10 20 cm 15 860C 11 12
22. kHz usec 1 50 51 2 Re sistive Barrier Discharge RBD
23. 1 1 1 R E e7 y Obtain an Atmospheric Pressure Plasma 3 How to Practice NOZAKI Tomohiro TAKAKT Koichi NAMIHIRA Takao KITANO Katsuhisa KIM Jaeho NOMURA Shinfuku ICHIKAWA Norimitsu TOMITA Hajime HAYASHI Nobuya and IWAO Toru 2007 The Japan Society of Plasma Science and Nuclear Fusion Research Lecture Note
24. 3 How to Practice 947 T Nozaki et al 55 DC RF CCP ICP 17 TEMP Thermoelectron enhanced micrometer scale plasma
25. 71 72 74 1 SBSL 13 SBSL
26. 14 SBSL 300 Hz CCD 15 78 um 4 um 300 K 78 um 4um 6 7 3 r x 300 10600 K 43 14 15 Lecture Note 2 SBSL
27. Duration of current flow ms 51020 50 100 200 500 ZOO00 10000 Body current mA 17 15Hz 100Hz IEC479 1 AC 1 AC 2 AC 3 2 AC 4 AC 4 1 5 AC 4 2 50 AC 4 3 50 Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 Tn Duration of currernt fow ms p 1020 50 100 200 500 2000 10000 Body current mA IEC479 1 DC 1 DC 2 DC 3 DC 4 DC 4 1
28. 41 44 3 2 3 2 1 1 CCP Capacitively Coupled Plasma ICP Inductively Coupled Plasma 17 45 47
29. 9 2 10 ns 500 ns 9 a 500 ns 9 b 7 9 a 7 2Z gz 1 9 T 2NyLC 2 2Z ce x C LC 9 a J 9 b Z 27 LIC 4 Coaxial cable E Switchsy
30. 12 2 RF 13 56 MHz RF Radio Frequency 10 kHz LF Lower Frequency RF 13 56 MHz 22 m RF LF
31. 1 10 MHz 100 kHz 10 GHz SAR 100 kHz 10 MHz SAR 10 GHz 300 GHz 4 Hz 1 kHz 100 mA m2 10 10 mA m2 1 5 2 mA m 10 MHz GHz 4 W kg 10 0 4 W kg 5 0 08 W kg 19
32. 3 3 3 3 1 16 27 12 MHz
33. 3 2 3 1 8 Single Bubble Sonoluminescence SBSL 1980 1990 68 69 SBSL um 50 Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 70
34. PLL Phase Locked Loop 0 W MHz GHz 200 W 100 4
35. 1994 1999 2005 2000 2002 2005 2004 2005 gt 1980 1984 1988 10 1989 9 Ne ei
36. a R etc 50 500 kHz 3 3 How to Practice a T Nozaki et al a b Elon 1 a Y gl 2 Ex Fion 6 7 2 a b 2 Dielectr
37. LC Lecture Note SAAR FT 3 How to Practice T Nozaki et al lt a LC C EH Open short stub 1 4 W kW PPL 1 W W 0 W 12
38. Di electric Barrier Discharge DBD 1857 Siemens 1840 1 2 3 4 5 DBD DBD 1 94
39. Cuasi peak group2 EE gTOUD Quasi peak group2 140 Averagetgroup2 13 PF PF RE 1 FFP PF 1 FFP 1 FFP IT FFP FF 1 1 FFP PP 3 FFP F Ea FI 1UU 1 IMains terminal disturbance valtageldB uV Frequency MHz 20 A a CISPR V LISN AMN 1 100 A 3 How to Practice 953 T Nozaki et al JST 1
40. Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 34 37 9 38 39
41. 3 3 3 1991 CVD
42. 5 DBD 13 14 1 2 944 10 mm 50 mm 4 3mm Ni 20 mm Nz CH4H20O DBD 3 mm 3 4 DBD 15 3
43. 2 RF 56 Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 c a c b mm 57
44. 3 3 2 Hz 1 kHz 100 mA m2 100 kHz GHz 952 1 C 4 W kg SAR 4 W kg 80
45. 1997 1997 2004 1996 4 1997 3 FE 2000 PD 2004 2005 06 2006
46. 31 32 8 33 NO NO 3 1 3 3 1 1
47. 1980 16 1 2 3 kHz CVD DBD 4 17 3 1 2 2300 K 18 2000 K
48. rms Lecture Note ISM CISPR11 81 2 ISM A 20 2 A 100 CISPR11
49. 10 a 10 b 58 10 c 10 c ja 40 mm SUS 6 5 mm
50. 60 67 1 GHz 30 cm 12 1 13 56 MHz 245 GHz VHF UHF GHz
51. 4
52. MQ cm 52 53 54 mm 10 ns
53. 2004 4 2 2004 2004 4 2006 gt 10 2007 4 956 0 1993
54. 55 mm 83 mm 3 How to Practice T Nozaki et al mA 20 13 78 13 15 3 PP IEC479 1 79 17 18 17 15 Hz 100 Hz
55. 5 DC 4 2 50 DC 4 3 50 0 5 2 18 1 344 V kV d cm 154 V 187 187 V 220 V 220 0 5 5
56. 1987 19 T Ito and K Terashima Appl Phys Lett 80 2854 2002 72 457 2003 69 284 2002 T Nozakr H Tsukijihara and K Okazakr Energy amp Fu els 20 339 2006 S Ukazakr M Kogoma M Uehara and Y Kimura J Phys D Appl Phys 26 889 1993 79 1000 2003 J S Chang 82 682 2006 J R Roth Industrial Plasma Engineering vol l Principles 1995 IOP Publishing p 354 AE Guile Proc IEE IEE Reviews 118 1131 1971 H Bluhm W Frey H Giese P Hoppe C SchulteiB and R StraBner IEEE Trans Dielectrics and Electrical Insu lation 7 625 2000 69 434 2003 69 301 2003 K Takaki H Akiyama Jpn J Appl Phys 40 979 2001 126 784 2006 T Ito Y Ueda H Komura and T Nitta Proc IEEE 59 573 1971 W D Kimura M J Kushner E A Crawford and S R By ron IEEE Trans Plasma Sci 14 246 1986 SL Braginskii Sov Phys JETP 34 1068 1958 M J Kushner W D Kimura S R Byron J Appl Phys 58 1744 1985 K Takaki T Kobayashi T Fujiwara Rev Sci Instrum 71 1548 2000 R Monta
57. 1999 2003 1999 2003 i 2004 2006 2007 IEEE 2001 3
58. Lecture Note 24 5 eV 20 eV 4eV CCD
59. ns us us A kA 6 25 7 102m 26 27 28 29 30
60. 2 10 a 1
61. Filament 13 950
62. U Kogelschatz Plasma Chemistry and Plasma Process ing 23 1 2003 679 1998 2007 2006 2006 1 2 L8 4 5 954 6 7 18 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 1 28 29 30 31 32 33 34 35 36 37 38 F Tochikubo and H Arai Jpn J Appl Phys Part 1 41 844 2002 T Nozaki N Muto S Kado and K Okazaki Catalysis To day 89 57 2004 1986 18 B Ehasson M Hirth and U Kogelschatz Phys D Appl Phys 20 1421 1987 J Kitayama and M Kuzumoto Phys D Appl Phys 32 3032 1999
63. 734 2006 A Schutze J Y Jeong SE Babayan J Park G S Selwyn and RF Hicks IEEE Trans Plasma Sci 26 1685 1998 A D MacDonald and S C Brown Phys Rev Let 75 411 1949 75 399 2006 K Kitano H Aoki and S Hamaguchi Jpn J Appl Phys 45 8294 2006 83 594 2007 2003 9D9 3 How to Practice 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 T Nozaki et al 2006 2004 CQ 2003 1979 2003 1996 Fawwaz T Ulaby Fundamentals of Applied Electromagnet ics Prentice Hall 2004 D F
64. 8 d dz 2 mm cathode matal anode glass b a 10 ns c 943 Journal of Plasma and Fusion Research Vol 83 No 12 December 2007 7 kV 100 um 3 b 1 10 ns
65. Coaxial cable a Switch L L b 9 946 9 a b V nzE 5 Zpe IGBT MOSFET FINEMET 40 41 1
66. Commission on Non lonizing Radiation Pro tection April 1998 CISPR 11 2003 Industrial scientfic and medicalSM radio frequency equlpment Electromagnetic distur bance characteristcs Limits and methods of measure ment International Electrotechnical Commission 1995 IHT 0 0 2003 3 0 NE DC 1988 2000 10 2001 9 1997
67. Gaitan L A Crum R A Roy and C C Church J Acoust Soc Am 91 3166 1992 B P Barber and S J Putterman Nature 352 318 1991 D J Flannigan and K S Suslick Nature 434 52 2005 R P Teleyarkhan C D West J S Cho R T Lahey Jr R L Nigmatulin and R C Block Science 295 1868 2002 D Shapira and M Saltmarsh Phys Rev Lett 89 104302 2002 R P Taleyarkhan C D West R T Lahey Jr R I Nigmatu lin R C Block and Y Xu Phys Rev Lett 96 034301 2006 C G Gamara S D Hopkins K S Suslick and S J Putter man Phys Rev Lett 98 064301 2007 S Nomura and H Toyota Appl Phys Lett 83 4503 2003 S Nomura H Toyota S Mukasa H Yamashita T Mae hara and M Kuramoto Appl Phys Lett 88 211503 1 2006 T Maehara H Toyota M Kuramoto A Iwamae A Ta dokoro S Mukasa H Yamashita Ayato kawashima and S Nomura Jpn J Appl Phys 45 8864 2006 12 1 2006 p 5 IEC technicalreport type 2 Effects of current on human 101 CQ beings and livestock partl general aspects IEC479 1 1994 third edition Guidehnes for hmiting exposure to time varyIng electrc magnetic and electromagnetc fields up to 300GHz In ternational
68. A 126 703 2006 81 350 2005 T Namihira D Wang S Katsuki R Hackam and H Aki yama IEEE Trans Plasma Sci 31 1091 2003 T Namihira S Tsukamoto D Wang H Hori S Katsuki R Hackam H Akiyama M Shimizu and K Yokoyama IEEE Trans Plasma Sci 29 592 2001 T Namihira S Tsukamoto D Wang S Katsuki R Hackam H Akiyama Y Uchida and M Koike IEEE Trans Plasma Science 28 434 2000 D Trunec A Brablec F Stastny Contributions to Plasma Physics 38 435 1998 E E Kunhardt IEEE Trans Plasma Sci 28 189 2000 J Laimer and H Stori Plasma Process and Polym 4 266 2007 S Kanazawa M Kogoma T Moriwaki and S Okazakr Proc Japan Symp Plasma Chemnistry 3 Tokyo 1987 1839 S Kanazawa M Kogoma T Moriwaki and S Okazakr J Phys D Appl Phys 21 828 1988 F Massines A Rabehi P Decomps R B Gadri P Segur C Mayoux J Appl Phys 83 2950 1998 T Nozaki Y Unno and K Ozaki Plasma Sources Sci Technol 11 431 2002 ML Laroussi L Alexeff P Richardson and F F Dyer Plasma Sci IEEE Trans 30 Issue 1 p 158 2002 X Duten D Packan L Yu C O Laux and C H Kruger IEEE Trans Plasma Science 30 178 2002 K Takaki H Kirihara C Noda S Mukaigawa and T Fu jiwara Plasma Processes and Polymers 3
69. J Plasma Fusion Res Vol 83 No 12 2007 942 956 3 7 2 9 9 7 9 2007 10 10
70. ic Barrier Discharge DBD DBD 3 DBD 3 1 2 DBD 3 DBD 35 kV cm
71. no M Becerra V Cooray M Rahman and P Li yanage IEEE Trans Plasma Sci 34 1610 2006 R T Robiscoe A Kadish and W B Maier ll J Appl Phys 64 1744 1988 T Namihira et al Proc 16th GD 2 657 2006 1991 X 1992 2002 2003 H Tamaribuchi D Wang T Namihira S Katsuki and H Akiyama Effect of pulse width on ozone generation in pulsed streamer discharges 2007 IEEE Pulsed Power and Plasma Science Conference Albuquerque USA 2007 in print Lecture Note 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 Li S Sakai C Yamada D Wang S Chung X Lin T Namnihira S Katsuki and H Akiyama IEEE Trans Plasma Sci 34 1719 2006
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