水晶発振式成膜コントローラ【CRTM-6000G】
Contents
1. CRTM 6000G CRTM 6000G Ll EE RTM UDGU 3ch POWER RATE THK 3ch 2 2 3 gt gt 125ms ge gt 992. www ulvac co jp TEL 03 5218 5708 5 TEL 06 6397 2286 TEL 81 467 89 2261 1708N 2011095000UYO
3. gt 99 99 y 30 30 y 3m RS 232C PC 3m 4m yp D 25 D 9 12ch CD ROM 5 Nl a lt ULVAC SOLUTIONS ULVAC SOLUTIONS CRTM 6000G 1 3 0 5 01MHz 5MHz 4 0 6 01MHz 6MHz 0 024Hz 0 001 MHz 0 999 9kA 2 0 041A 5MHz 0 029A 6MHz 0 001kA 0 9 999kA 0 01kA 10 99 99kA
4. THK a UM RS 282C a a er i 6 WxDxH 240mmx350mmx99mm 3 6kg lo AC85 230V_50 60Hz 2 380W Max 5 40C 5 95 RH 1 2 Tooling Density _ fe ef 9 3 BCD 99 240 S CRTM 4m 8m 8 8 12m 16m EW CRTS 80 a 4m 8m 12m 16m TEess CRTM RS 232C PC PC 1 gt
5. 0 1kA 100 999 9kA 0 999 9As 2 0 041As 5MHz 0 029A s 6MHz 0 1As CE 1 CRTS 80 2 1 CRTM 3 1 1 CRTM 125ms 2 CRTS 99 3 30 gt CRTS 99 3 12ch BCD 4ch 2 3ch POWER RATE
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