ピラニ真空計 PG-20 取 扱 説 明 書
Contents
1. IT 4S SFX A 5 2 AC85 132V 50 60Hz2. 90 3 DED
3. 1 2 92x92 mm 1 1 Reece AP ao 4 1 2 9 1 POWER
4. At 3 1 EE HVA DUDS gt OES 3 2 3 3
5. 4 4 Al 5 40C 10 90 5 40C 10 90 5 40 4 5 5 5 1 A
6. No PG 20 15 16 2 TOKYO ELECTRONICS CO LTD lt
7. 4 4 4 1 E mo ub Oo t
8. my oh Db gt nl lt nu 4 2 4 3
9. od 30cm Ae Fay E H GA 6 PIRANI GAUGE CONTROLLER ane 3 ELECTRONICS SP SERIAL NO TOKYO ELECTRONICS CO LTD 3a 8 NU
10. 1 O S N 2 O O 3 3 MSDS Material Safety Data Sheet 3 TEL or E mail Mar 2011 Rev B 16 PG 20 2 14 TOKYO ELECTRONICS CO LTD 174 0063 1 3 4 Head office and factory 3 4 Maeno cho 1 chome ltabashi ku Tokyo 174 0063 Japan
11. 5 3 I1 0 5 4 1 100V JA AMR
12. c ZERO ZERO ERO FUNC ENT 1 FUNC ENT e ZERO 10 Ec 10 3 2 1 O 9 9 1 4 0 0 0 ERR 1 0 4 1 0
13. 13 13 096 120 O90 GG wo Gra mee sic 9M f x10 a G8 0 x10 ZERO FuNc A B gt ENT SERIAL NO TOKYO ELECTRONICS CO LTD 9 SENSOR PIRANI GAUGE CONTROLLER PG 20 TOKYO ELECTRONICS _ MADE IN JAPAN 5 PG 20 14 110 mm 92 mm 92 mm 110 mm 6 14 15 OR
14. AC100 V ERR
15. 1 1 0 4 1 2 SP1 SP2 FUNC SP1 PI QEHOOQ OK IK CAHMOREMBAACAKS E SV gt SP1 SP2 LED 1 0 SP1 O SP2 SP1 SP2 LED 1 0 SP1 SP2 a D gt 4 c E
16. 30mA MAX 4 6 7 8 12 N C 14 15 D 15pin BHAT HA 2 BUNA oo o 3 pions 9 11 2 C2 ERR 4 D 12 11 1 0 1 P Pa V V V ogi P 1 P 10 aa al ae es a 1 V logioP 1 amp P 10 V VI 0 00 1 0E 02 1 0E 0 1 1 0E 00 1 0E 0 1 1 0E 02 1 0E 03 1 0E 04 1 0E 05 P Pa 12 1 AC100V 1A 2 1 0X10 Pa
17. 15 18 FM M4 1 X2 M4 2 ST 1004 4 I 0 CN 15MM 1 D 15pin 1 Tel 03 3969 4156 Fax 03 3969 4158 Mail sales toel co URL http www to 1 3 4 jp el co jp T 174 0063 1 f
18. POWER 7 LED ay 2 ae NO ae ELECTRONICS CO LTD MADE IN JAPAN Tw 2 2 HEM 1 010 Pa fer EN a 0 0 EN 0 0 1 1 0 1 b EN 0 0
19. Uy 1 0 1 0 perm SC PU3M ee Ooo ES SC PU3M 5S 212 96 4 8 8 28 5 67 5 T 1 7 r CH 1 0X10 1 0X10 Pa 2 1 0X10 1 0X 10 Pa 5 40 C 10 90 2 AC100V 1A DCO 5V 1V 1 AC85 132V 50 60Hz 12VA AC100V 50 60Hz 1 0kg 96 H X96 W x 120 mm S 212 15 18 SC PU3M 1 1 92X92 E
20. Phone 03 3969 4156 Fax 03 3969 4158
21. 11 P13 12 Se A We a eR Ub we eee ER we Beas were eee Bw EE WAR aha Aenea ee Wa ate P13 13 OO P14 14 ee P14 15 eteeeeeeeee ee P15 16 P16 1 PG 20 eet Ber PG 20 1 PSC 3M 1 3P 3m KPR 24Y 1 3 2 SC PU3M 1 3m S 212 1
22. Rev 2 14 TOKYO ELECTRONICS CO LTD P1 1 5 P2 2 OO P3 3 P4 4 em P5 5 P6 6 P8 7 ca P9 8 P9 9 P10 1 tte P10 2 ee P10 3 P11 4 0 ti P11 Be p12 10 170 ee P12
23. U 10 SP LED gt sist PIRANI GAUGE CONTROLLER PG 20 SP 3 11 b ENT FUNd C 5 FUNC 10 1 0 No 1 DCO 5V 1 9 1kQ pi 10 3 9 HH 11 eo AC100V 1A 5 ERR 13
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