マスフローコントローラ SAM ® SFC1480FX/2480FXシリーズ
Contents
1. 473 1480FX UG L 473 2480FX UG L 1 LU SFC1480FX SFC1481FX SFC1482FX SFC1483FX SFC2480FX SFC2481FX SFC2482FX SFC2483FX 5SCCM NM 5 500SCCM 11SLM 30SLM 50SLM 2 100 F S 0 05 0 3 MPa G 0 1 0 3 MPa G 0 15 0 3 MPa G USM 1 0 MPa G 5 50 C 15 35 65N0 UN 35 80 RRH 0 100 0 5 S P 0 15 F S 2 10 0 2 F S 10 100 15 SP 0 35 F S 2 10 0 5 F S Ns 0 3 F S 0 10 100 0 1 S P 0 05 F S io 2 10 0 06 F S 0 59 F S 0 01 F S C 15 35 0 01 S P 15 35 0 20 1002. 5 24VDC 15VDC DeviceNet D SUB9 D Subminiature9 M3 17JE 13090 02 D8B DDK 1 Q No No 1 15VDC 15VDC 1 COM 2 0 5VDC 2 0 5VDC 3 15VDC 3 15VDC 4 COM 15VDO 4 COM 15VDO 5 15VDC 5 15VDC 6 0 1 5VDC 6 0 1 5VDC 7 COM COM 8 COM 8 COM 9 0 5VDO 9 COM
3. SFC1480FX SFC2480FX SFC FMT 1 5 1 125 80C 6 150C 8 0 5 5 500 SCCM FR 01 11 1 118SLM FR 12 2 308SLM FR 13 0 50 SLM FR 14 EN gt gt Optional code 1 5 W 1 5 C 1 5 H1G Hitachi IGS 1 125 W 1 125 C D sub9 15VDC D sub9 COM D sub9 DeviceNet Note 174 HMJ UJR 124mm 4H1G SFC1480FX 4SUG 4SAG T
4. PI Pressure Insensitive G P G1 PI FX PI PI G1 F PI a mem SFC1480FX SFC2480FX PSy MG MR SFC1480FX D SFC2480FX D _ LED NE FLOW D subminiature 9 RJ 12 x2 D subminiature 9 RJ 12 x2 93 5 6 50 8 12 1
5. 5 II SFC1480F a KS SE SAM SFC1480FX SFC2480FX 0 100 1 0 0 20 1 5
6. Ns MG MR FR 01 1 5 SCCM FR 02 6 14 SCCM FR 03 15 27 SCCM FR 04 og8 38 SCCM FR 05 39 71 SCCM FR 06 108 SCCM FR 07 104 192 SCCM FR 08 193 279 SCCM FR 09 S80 754 SCCM FR 10 755 2037 SCCM FR 1 1 S038 5500 SCCM FR 1 5501 11000 SCCM FR 13 11001 30000 SCCM FR 14 30001 50000 SCCM C2Fe NF3 SiF4 CO 6020 NG MG MR FX Ns FX
7. Ni CIF3 HF Ni SUS316L NLCO GEOMWRENHE NOAEEE G FX Next Generation MG MR MFC MFC MFC MFC MFC MFC s NN Ar O2 Hz C2H4 SF6 SIH4 MFC MFC MFC MFC MFC MFC ee 1 s RN EN NN CF4 PH3 SFC1480FX SFC2480FX FX Next Generation
8. 43814 6621 Molex RJ 12 X 2 N SA RS232C RS485 1 COM Siginal 2 No Connection SN 3 Rxd RS 4 Txd RS N C Front View 6 N C 1 Rxd Txd RS232C RS232C 2 RS RS RS485 RS485 DeviceNet DeviceNet V Male Micro Connector DDK CM02 8DR5P D5 No CAN_H lt 1 Drain 2 V CAN L 8 V E CAN 1 Drain 5 CAN L SW 0 5VDC 1
9. 3 DeviceNet P6 4 5 1 G SFC1 4 FX MG MR MG MR GUI MG MH gt RS232C A J ml hE Wituhi SFe 100SCCM Os 300SCCM HBr400SCCM
10. 8 3 RJ 12 DeviceNet W Connector RJ 12 RS 232C DeviceNet M Connector Male Micro Connector 16 84 Te 1 RS 232C 16 7 27 Sneady amp heearate 1482 42 5 20 2 M4 3 1480FX UG D 2480FX UG D 1 SFC1480FX D SFC1481FX D SFC1482FX D SFC1483FX D SFC2480FX D SFC2481FX D SFC2482FX D SFC2483FX D 5SCCM 11SLM 30SLM 50SLM Ns 5 500SCCM 2 100 F S 0 05 0 3 MPa G 0 1 0 3 MPa G 0 15 0 3 MPa G 2 0fE 1 0 MPa G 5 50 C 15 35 65 35 80 RRH P OES 0 900 0 5 S P 0 15 F S
11. DeviceNet DeviceNet SEMI amp PLC I O DeviceNet ODVA Open DeviceNet Vendor Association Inc DeviceNet 1 O AD DA O 2 3 DeviceNet CAN Controller Area Network CAN 4 DDVA IEC SEMI
12. ei G G MG MR 1 1 1 8 MG MR FX 14 1SCCM 50SLM P6 MG MR Ns
13. 2 S P 1 0 9 0 2 20 0 4 F S 1 5 1x101 Pa m3 s He 0 1 5 VDC 15 VDC 0 5 VDC 15 VDC 0 15 VDC 49 140 mA max 15 VDC 4 140 mA max SUS316L ea 2 YET101 Ni Co 82220 SUS316L Ni 3 SUS316L 4 W C H1G 1 4 HMJ UJR 1 MFC 2 SFC147 FX SFC247 FX 3 4 1 G SFC1 4 FX 7 CAN E24 SY MG MR FLOW 1
14. 2 10 0 2 F S 0 10 100 1 5 S P 0 35 F S 2 10 0 5 F S Ns 0 3 F S 10 F S 10 100 0 1 S P 0 05 F S F l 2 10 0 06 F S 0 5 F S 8 0 019 F S 15 35 0 01 S P 15 35 0 gt 20 100 29 S P 1 0 7 09 2 20 0 4 F S 1 5 1x10 Pa m3 s He _ DeviceNet 3 24VDC 03Amax SUS316L YET101 Ni Co SUS316L Ni 4 SUS316L 5 W C H1G 1 4 HMJ UJR 1 MFC 2 SFC147 FX SFC247 FX
15. 2007 11 Tel 03 5765 4076 Fax 03 5765 8312 Email hmcc hitachi metals co jp PRINTED WITH lsoyINk HL K243 2007 11 T MT3 2 HITACHI Materials Maglc SA M Speedy Accuracy Maintainability SFC1480FX SFC2480FX Tu ET 1 WT Pe SAM Speedy Accuracy Maintainability SFC1480FX SFC2480FX F FX SFC480 SAM Ni Co YET101
16. 5VDC LED 1 109 F S 10 15VDC 15VDC 12VDC 17VDC 0 5 EEPROM EEPROM 109 F S 10 ga gt W 0 5 209 F S
17. SFC2480FX http www hitachi metals co jp 105 8614 2 1 N RB 03 5765 4296 FAX 03 5765 8313 DeviceNet ODVA 2007 11 F
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