Operating Instructions - Australian National University
Contents
1. 9999 anne rn 15 9 3 SHUTDOWN A RR cttm Rte E RC EN VR Er REN 19 dA a M 17 6 1 MAINTENANCE A AR 17 6 2 SPARE PARTS flj 17 6 3 REPAIR REPLACEMENT 17 6 4 TRAINING yz arada an na rrt rao m P p EUR ER Er a a Rr EAE E YY e TENA 18 O A 19 7 1 DIAGRAM OF THE VACUUM 5 9 ccoo ccoo ocn nooo nono ao 19 7 2 DIAGRAM OF THE GAS DOSING SYSTEM 20 I3 DIAGRAM OF THE WATER SYSTEM 21 7 4 INTERLOCK 27 1 5 TESGHBIDAL DET A 23 1 INTRODUCTION 1 1 General Description AK 400 PECVD systems are systems vvhich may be flexibly equipped plasma supported CVD coating processes suitable for R amp D and small lot production The system described here has a cuboid recipient that is provided with several flanges Its dimensions are as follows Front to back 540 mm width 980 mm and height 350 mm All flanges are metal sealed CF flanges The pumping system plasma source substrate holder system gas dosing system and heating system are connected with the recipient The chamber is made of chemically resistant high grade special steel with glass bead blasted surfaces in welded design The chamber s front door is used for loading the system Operation of this door is facilitated by gas springs The rear flange may be opened to perform operational and servicing tasks which may be necessary At least two persons are necessary to do this or lifting gear has to be used The system further includes a2. PL19QUE IST NT LO O I 00 10 59 1 9 SdH SS L lrd VlvAT 1 JU aed 6 JN ININ F1Z N N Z AUIMO Y JN ININ PLZ WN opeunaug 8 8 010 39 0LAdO 2 01594 IA OL Ad OL AdO leute NBA 0298061279 YE LMOZZXS6211 SAN ZOMENA ZN WOOS 002 UOMA snqgod OAN 9 0292061279 Ni LMOZSXS6211 SAN u 1do N ZN WOOS DOS UOlA SNQUOJA OAIN S 029v240Zv NYLYDZZXBELLL SAN UOHA ZN WOOS 002 AVZ HOA UOYA SNQUOJA OAN y 02061 0 AVLYOTLXE6LLL SAN UOHA ZN WOOS QOL APZ VYOA uojA snqyold OJW 0296920279 NrLHOZSX864LL SAN ueJdoeN ZN WOOS 005 UOUA snqyold OAN 2 029 240Zv AvLHOZZXS864LL SAN UOHA ZN 4098 00Z AvZ vHOA uoyA snqgoud IHN w o s s oBesop seb auueyo 9 ZV 99 ZIEH uel s nssaud yBIH 6 GLOOLWW 2 bb niy 8 10289 88 SIZ SO00Z HN 1 M 0002 YM peeu 2 9078S 88 SIZ S000Z HIN 1 M 0002 YM peeu uoyeu e 9 S0 60 8 S0 60 q309z V600Z 2 Jeun qnse G 50 60 8 50 60 03092 06002 MIN 2 Jepis NOD Nous p dy 21198 9AEMOJOIIN 2 euer O2IS DO9XZXO xn IIS s qn Burdno 9AEMOJOIIA c S0 LO 012 Sd1 L ue lurq euisejd ong eonos euseld 493 1 JY 9ABMOIDIN L ueussng V sz 2 9 068 LYNE 2 susweis voo
3. M g gt Bpiasmosource AAA Eat A A A A A E a 2 Se 7 3 Diagram of the water system water requirement min 4 Ro 1 1 T Dr VA gt as i s r la gt TE eN PF amy EE t vi WOt r vel 2 WO t ITA lt WO ver WO te V my WO Ler Ye EFT 4 7 4 Interlock description 7 4 1 Safety of persons and machines 7 4 1 1 Emergency shutdown switch The purpose of the emergency shutdown switch is to switch off the system master switch and to prevent the master switch from being turned on again The emergency shutdown chain consists of the following components Safety relay with emergency shutdown button at the front of the operator cabinet More emergency shutdown buttons may be connected to the system 7 4 1 2 Risks posed by the plasma process System parts necessary for the plasma process are released via a process master switch They include the following components Heater e Microwave power supply units e RF generator e Valve island for gas supply Switching on of the process master switch is controlled by the software The hardware and software will disable operation unless the conditions listed below are met e Pumping unit is running e Angle valve of pumping unit is open e Door of process chamber is closed Siguard switching relay active e Pressure in process chamber less than 50 mbar These conditions run together in a safety circuit PNOZ X7 yel
4. 18 17 18 The switch off procedures described in the operating instructions shall be observed for all work concerning installation start up operation and maintenance It is imperative to refrain from any operation that may affect the operator s safety or the safety of the AK 400 PECVD system The operator shall be among those responsible for ensuring that only authorised persons work on the system and that they follow operating algorithms only This particularly applies to children The operator shall report any occurring change of the AK 400 PECVD system that may affect the system s safety to the company operating it promptly The company operating the system shall not operate the AK PECVD system unless it is in perfect condition The company operating the system shall be required to ensure proper housekeeping for the system by issuing instructions and performing checks accordingly Arbitrary reconstruction and changes affecting safety shall not be permitted Any change of the operating software of this system shall not be permitted as well Disconnect the system from power before carrying out any installation or maintenance work Before restarting the system after repairs make sure that all protective devices are in place and that they are functioning properly e g safety circuits Do not remove protective devices unless the system has come to a standstill and unless it has been disconnected from power The AK
5. The master switch is marked in red The snap in emergency shutdown button also marked in red is arranged at a height that is easy to reach for the operator at the front of the rack cabinet To operate the emergency shutdown switch simply push in the marked button Whenever an emergency shutdown operation is set off the entire system is disconnected from the mains via the master switch To re connect the system after operating the switch unlock emergency shutdown switch by turning to the left In case of an emergency shutdown the master switch takes an intermediate position and it has to be fully switched off before it may be re connected 3 8 3 Process switch The process switch is an internal protective switch to prevent personal injury and damage to the system by incorrect operation door gas inlet excess temperature or failure of system components pumps valves seal gas vacuum PC The protective switch is activated and deactivated through the software when required process conditions have been reached The switch is opened irrespective of the PC when a hardware safety chain into which several safety relevant contacts have been integrated is disconnected see section 8 3 Interlock description 3 8 4 Specific safety regulations for plasma systems Additional safety regulations as detailed below apply to the AK 400 PECVD plasma system The system may only be operated by duly qualified skilled persons or by specifically instr
6. flanges DN 16CF to DN 160CF The distributor of water circuits for temperature equalisation is installed in the system rack For a functional diagram and illustrations showing all subassemblies and components please refer to the Appendix 3 2 Load lock It is possible to install a Load Lock system 3 3 Vacuum system 3 3 1 Pumping unit and pressure control Essentially the vacuum pumping unit consists of Roots pump unit WOD 412 BC WKP 500 Pumping unit rotary WOD 412 BC DUO 65 C pump ouction control valve Butterfly valve DN 100 CF Vacuum valves Angle valve DN 100 ISO KF Oil mist filter ONF 65 see also the Diagram of the system in the Appendix The Roots pump unit is suitable for use with corrosive gas It is filled with Fomblin lubricant Follow the operating instructions for the components concerned when adding and checking lubricants For further information on the function and maintenance of pumps please also refer to the operating instructions provided separately 3 4 Vacuum gauges The measured parameters of vacuum gauges are analysed using a PC interface card and displayed Recipient Compact FullRange Gauge PKR 251 metal sealed Measuring range 1000 mbar to 5x10 mbar Absolute pressure sensor MKS Baratron Type 127 Measuring range 1 mbar to 107 mbar Description see relevant operating instructions 3 5 Plasma source and substrate holder An LPS 1 0 linear microwa
7. 400 PECVD system may only be transported completely using a fork lift truck low lift platform truck or lifting crane Safety precautions used shall be tested following electrical installation and repair work e g leakage resistance higher than 1 MQ In any case relevant national and local safety and accident prevention regulations shall apply to the operation of the system Cooling water hoses and power cables shall be fed to the AK 400 PECVD system separately from the connection point provided by the customer They shall not interfere with any electrical equipment 2 3 Safety concept of the system 2 3 1 Protection against personal injury All protective covers against high voltage and RF are locked using tools All connections and the interior space of the recipient have been designed to be RF proof High voltage current parts are arranged apart from control units The safety circuits listed below provide protection against risks of personal injury posed by high voltage electromagnetic radiation and emission of hazardous substances e Personal safety circuits see section Interlock description in the Appendix e Emergency shutdown circuit The company operating the system shall be responsible for implementing any additional safety precautions 2 3 2 Protection against property damage Unacceptable operating states resulting from incorrect operation faults relating to the supply of media or system defects are pre
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9. Operating Instructions AK 400 PECVD System for Silicon Nitride and Silicon Carbide Layers PECVD Plasma Enhanced Chemical Vapour Deposition System for Silicon Nitride and Silicon Carbide Coating Customer The Australian National University Canberra Australia Project 23131 Manufacturer Roth amp Rau Oberfl chentechnik AG Gewerbering 3 OT W stenbrand D 09337 Hohenstein Ernstthal Tel 49 3723 49880 Fax 49 3723 498825 E mail info roth rau de Web www roth rau de TABLE OF CONTENTS 1 INTRODUCTION vvovooo 3 1 1 GENERAL DESCRIPTION co 3 P A iiiter octies om PEDIR IEEE Y 3 1 3 USE FOR THE INTENDED PURPOSE ooo nn 4 A A a anna 5 2 1 si PHONE 5 2 2 GENERAL SAFETY k REO UATI ONS 5 2 0 SAFETY CONCEPT OF THE SYSTEM rf 3 DESCRIPTION OF THE CONSTRUCTIONAL DESIGN 2 2 8 C ux eot REV 8 3 2 te ik AAA 8 3 9 VACUUM SYSTEM coercere ck EET ERES anna nenn 8 3 4 VACUUM f 6 I ee eee eee 9 2 8 PLASMA SOURCE AND SUBSTRATE eld 9 3 6 GAS DOSING SYSTEM ies rare tremere m EY P V D UY 10 ELECTRICAL EQUIPMENT AND CONTROL uuu 10 3 8 SAFETY DEVICES A Ti 4 INSTALLATION Lesen panama aa ee 13 4 1 ELECTRICAL CONNECTION rateros 13 4 2 A A 13 4 3 COMPRESSED AIR 14 4 4 HA Tan nn en ll 14 9 UPERATION cies 15 5 1 A 19 9 2 SOFTWARE DESCRIPT ON
10. The information provided in the operating instructions for the AK 400 system applies to the system s latest development status This documentation shall remain applicable provided that the customer refrains from effecting any change of the system whatsoever The customer will be furnished with relevant documentation if the manufacturer deems it necessary to amend these instructions 1 3 Use for the intended purpose Use for the intended purpose of the plasma deposition system described herein refers solely to high vacuum experiments for the coating of substrate surfaces using PECVD processes in the areas of R amp D and production Using the system for the intended purpose also requires reading these operating instructions and complying with them before the start up of the system by the user 2 SAFETY 2 1 Overview This section provides an overview of the safety concept of the AK 400 PECVD high vacuum system under consideration of the requirements pursuant to the EC Directive Machinery 98 37 EEC IMPORTANT All persons involved in the installation operation or maintenance of the AK 400 PECVD system are required to have read and understood relevant parts of the operating instructions in particular Section 2 Safety as well as all safety related instructions in the other sections e g Safety devices etc The company operating the system is advised to demand written confirmation thereof accordingly 2 2 General safety regul
11. asuring voltage max 15 kW 400 5 96 V 3P N PE 90 Hz 220 V 24 V 24 V supplied internally 15V 7 5 3 2 Pneumatic system Compressed air 5 to 6 bar oil free Connection Festo hose nozzle 6 mm OD 7 5 3 3 Process gas system Central connection of all gas lines 4VCR 7 5 3 4 Cold water Pressure 4 to 6 bar Run off unpressurised Inlet temperature max 25 C System flow quantity Connection Run off to atmosphere approx 840 Ih 72 nipple 13mm 72 nipple 13mm Pressure drop p up to 4 bar 7 5 3 5 Exhaust gas Exhaust connection DN 40 KF to rotary pump 7 5 3 6 Ambient temperature Maximum ambient temperature 30 C outside the system Make sure that this temperature is not exceeded in the room of installation even while the boiler heater is active 7 6 Operating instructions for individual components Please refer to the documentation s table of contents 9980 2000 811629 2100 100 OLOSCTO60cC 20 2607 1 20 7 E v9cSvOLc 22881012 Jequunu 9002 20 20 18 WW PLZ JN924 91 30 21213 dA 1000020 LO L8LZ L SE 42 0814 94 Sea 20601 3 6002 Nd 166 A9019 OV9L INdOL9 2930 119 ALIOWLOXILZI 082 OU 2 12 963H4 LA o eo 04 INdd 9 X YSZ 0 INdd 9 X 1ejeureip OZ Wd4 S X 6Z 19 uueID cvv 000 S002 Cu 7 ELS d E n D iy cud pss e mo mm 12 2 miS niim LU r mE m es
12. ations In addition to the safety related instructions provided in relevant sections follow the regulations set forth below The AK 400 PECVD system has been constructed using the best available technology and is considered to be safe to operate However if it is used by unskilled staff or in case of failure to use it properly or for its intended purpose certain risks may be posed by this system 1 AK 400 PECVD systems have been solely designed for adequate experiments and operations in the areas of R amp D and production under vacuum conditions No other applications are available unless specifically agreed Any use going beyond this information shall be deemed as failing to comply with the system s intended purpose The manufacturer shall not be liable for any personal injury or damage whatsoever 2 Using the system for its intended purpose also includes complying with the rules for installation start up operation and maintenance stipulated by the manufacturer 3 The AK 400 PECVD system may only be operated maintained and serviced by duly authorised skilled and instructed staff Such staff is required to have been given special instructions on all risks that may occur 4 Responsibilities vvith regard to installation start up operation and maintenance shall be clearly defined and complied vvith to prevent any situation where it may be unclear who is responsible with regard to safety 10 11 12 13 14 15
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14. dix The pneumatic diaphragm valves used are suitable for applications with high purity gas and UHV and they are triggered via a pneumatic valve island Gas valves and MFCs are controlled using the PC control system In order to meet the requirements of safety and observe the purity of the gas used only gas pipes made of chemically resistant high grade special steel having a surface roughness of Ra 1um and VCRO high grade special steel screw connections are used 3 Electrical equipment and control The entire system is controlled using an industrial PC installed into a 19 rack cabinet by 40HE which contains the entire electrical supply system It further includes the system and application software based on Windows NT with manual automatic and service mode The rack cabinet also includes all other control and power supply devices 3 8 Safety devices 3 8 1 Vacuum controller The vacuum controller for the recipient is a pressure sensitive switch having two switching points atmosphere and vacuum Switching points are set depending on process and vacuum parameters In order to ensure that the system is safe to operate this controller is a part of the safety chain see the interlock description in the Appendix 3 8 2 Emergency shutdown switch and master switch Arranged at the rear of the system cabinet is the master switch of the entire system When it is operated the system is either turned on or disconnected from power
15. enting gases and seal gases have to be available as required Software description See User Manual Software Shutdown Normally the vacuum remains in the system after the valves concerned have been closed Before the entire system is turned off e g for maintenance work the recipient has to be vented To do this residual gas has to be pumped off after the process for at least 20 minutes the process master switch has to be deactivated and then the sequence Venting has to be activated in the Pumping unit menu After the recipient has been vented to bring the pressure up to normal venting valve is closed when switching point is reached at the pressure switch the system may be turned off Thereafter all media have to be turned off IMPORTANT If the system was heated never turn off the hardware and software system until the heater temperature has dropped below 100 C Failure to vent the recipient involves the risk of vapour flowing back or of residue from rotary pumps to be left over when the system is off 6 SERVICES To achieve a high level of availability and productivity for the system we offer the support services described below 6 1 Maintenance Specific maintenance agreements may be concluded with Roth amp Rau Oberfl chentechnik AG to ensure that maintenance and servicing of the system is duly performed at regular intervals as prescribed by the maintenance plan Such maintenance agreements rela
16. er circuits The quantity of water required for the entire system is approx 840 l hour Water primary pressure should be approximately 4 bar When running back the cooling water should be in a depressurised state 4 3 4 4 Compressed air connection The entire compressed air system has been installed and is ready for operation To achieve a better safety of operation and a longer service life of pneumatic elements use only filtered and oil free compressed air at 5 bar minimum preferably 6 bar Observe compressed air quality standards in accordance with ISO 8573 1 Class 4 provide maintenance unit where appropriate The compressed air connection is designed as a 6 mm hose connection Compressed air is controlled distributed and monitored within the system Gas connections The system is provided with a four channel gas dosing system Connections are executed as 4VCR and Swagelock 6mm To ensure the safety of operation primary pressure of mass flow controllers may not exceed 10 bar and it should be at least 1 5 bar See MFC operating instructions Recommended primary pressure for a high control precision is 2 to 3 bar It is necessary for the safe operation of the system to add nitrogen having a purity of at least 5 0 at a primary pressure of 3 bar minimum Silane ammonia processes may require a consumption of up to 20 l min The nitrogen connection is designed as a separate connection Using pressure controllers contr
17. frame on which the recipient the lock and the gas box are mounted The electrical equipment and control unit are integrated into a separate 19 rack cabinet Flange configurations make the system highly flexible for the connection of further components Pumps are configured for the respective processes in the coating chamber and for the process requirements concerned A Roots pump and a rotary pump are used here The gas dosing system substrate heater and substrate holder have been developed for the specific processes concerned The only materials used are chemically resistant high grade special steel ceramics and graphite An LPS 1 0 linear microwave plasma source with quartz tube applicator is used as plasma source MW coupling is performed on both sides A multipole magnetic field generated by permanent magnets may serve as plasma stabiliser 1 2 Applicability The operating instructions for the AK 400 system are a customer document by Roth amp Rau Oberfl chentechnik AG They contain a description of the system and its functions and they provide essential information for using the system Operating instructions of individual components are a part of the document as a whole They listed in the last section The description of the system is made in accordance with the EC Machinery Directive 98 37 EEC This involves taking into account the increased need for information with regard to function and new safety requirements
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20. low at the nodal point If one of the conditions is not fulfilled the process master switch will be switched off Switching it back on again will not be possible 7 4 2 Risks posed by gases Gas valves may only be activated while the process master switch is turned on Gas valves may only be opened while e the safety circuit referred to above is active seal gas is flowing flow meter is active 7 4 3 Heaters Heaters may only be activated while e the process master switch is active for conditions see above no excess temperature is signalled by Eurotherm 2408 e water cooling of the substrate holder the process chamber and air cooling of plasma source tubes are temperature controlled by the software of the system 7 5 Technical data 7 5 1 Dimensions Rack cabinet width x front to back x height Recipient system width x front to back x height Pumping system width x front to back x height 7 5 1 1 Weight Weight of the complete standard system 7 5 1 2 Foundation 600 x 810 x 2130 mm 1400 x 1650 x 1500 mm 650 x 1000 x 9500 mm approx 700 kg No special foundation is necessary The surface load of the complete system is approx 200 kg m 7 5 2 Pumping unit For information on the suction capacity of individual pumps please refer to the relevant operating instructions 7 5 3 Connection parameters 7 5 3 1 Electrical system Power input Voltage Frequency Control voltage Me
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22. ol valves and sensors it is used in order to vent the boiler purge the gas lines and as seal gas simultaneously diluting process waste gas The rules and regulations listed below have to be observed for the pre installation of the process gas feeder carried out by the customer and for the storage of these gases TRG 280 Technical rules for pressurised gases Operation of pressurised gas vessels TRGS 220 Technical rules for hazardous materials Safety data sheet for hazardous substances and preparations VBG 61 Accident Prevention Regulations Gases ZH 1 119 Guidelines for laboratories 5 5 1 5 2 5 3 OPERATION The function of the AK 400 PECVD has been tested The entire system is operated using a PC and related control software based on MICROSOFT WINDOWS NT4 0 Manual operation includes the operation of the master switch activation of media such as cooling water compressed air nitrogen process gases as well as loading the process chamber The software is neither capable of circumventing nor of deactivating the hardware interlock chain with its process master switch and interlock switches see section 8 3 Interlock description Start After turning on the master switch and starting the PC the software for operating the system may be loaded and run under WINDOWS NT The following conditions have to be met e Cooling water stop valves are open e Compressed air valve is open e Process gases v
23. on the types of gas used it is also possible to use hose connections In this respect the length and cross section of the exhaust line have to be dimensioned in such a manner as to prevent any dynamic pressure from building up within the line The operating instructions for the vacuum pumps have to be observed Electrical connection It is imperative to ensure that earthing with a conductor cross sectional area of at least 16 mm has been provided by the customer before the start up of the system copper earth vvire The system has been designed for three phase current 400 V 50 Hz vvith neutral conductor and protective earthing Connected vvattage is approx 20 KW depending on the equipment used Mains connection is provided by a CEE plug 32 A 400 V or a fixed connection with an appropriate connected load Before connection to the mains make sure that the mains voltage matches the voltage indicated on the nameplate Water supply The cooling water system of this system has been installed and is ready for operation It is provided with one central connection point for the inlet pipe and one for the outlet pipe respectively The have to be connected with the appropriate house service connections Flow controllers have been integrated into the interlock chain in order ensure the safety of operation If actual water quantity is lower than the set quantity the contact will open discontinuing the process There are four separate wat
24. take up surface is 300 mm x 200 mm and it is installed as a subassembly inside the recipient In order to ensure a stable and DC bias controlled plasma process an automatic matchbox with DC bias display has been firmly flange mounted at the bottom of the recipient after a water cooled RF feedthrough An RF generator 13 56 MHz 600 W arranged in the rack cabinet of the system provides the substrate holder with RF The dark space shield consists of a carrier made of high grade special steel It is water cooled The substrate holder represents the central processing station For an illustration of the constructional design please refer to the assembly drawing in the Appendix The substrate holder is supplied as a completely assembled component adjusted to suit the customer s specific needs Any other fine tuning and specific adjustments required by the customer should be performed solely by Roth amp Rau Oberfl chentechnik AG service staff by service staff of third party companies that have been duly authorised by our company to perform such servicing and by such staff of the company operating the system that has been duly trained and qualified by our company 3 6 Gas dosing system The four channel gas dosing system allows a defined inlet of inert one channel and reactive gases three channels via MFCs Reactive gas channels may be purged using nitrogen through another gas inlet see Diagram of the gas dosing system in the Appen
25. te to the system and the components used therein with regard to specific products and applications 6 2 Spare parts In case of any necessary repairs store managed spare parts will be available at short notice Instant commissioning enables us to despatch the parts requested on the day when a notification of a defect is received To reduce downtime for maintenance and repair as much as possible we recommend keeping a stock of spare parts spare part packages and consumables to be managed in accordance with the order f repairs are carried out by the customer necessary special tools should be used A detailed offer for the items required may be provided if desired 6 3 Repair Replacement If a repair becomes necessary there are the following options Repair is carried out by the customer using spare parts and spare part packages e Repair is carried out on site by Roth amp Rau service mechanics or service mechanics of component manufacturers Defective components are replaced e Components are repaired at the manufacturer s plant The inspection criteria applicable to new devices also apply to replaced devices and devices repaired at the manufacturers plant Performance parameters will be absolutely identical In case of replacement a device conforming to the current status of line production will be supplied at all times As a basic principle replacement will be made for a defective though reparable device If the c
26. ucted staff Specified operating parameter fields have to be observed Any assembly removal and maintenance work may only be performed on the system while it is voltage free Disconnect system from mains before removing any protective covers or enclosures Before restarting re install all protective covers and enclosures that were removed earlier DANGER HIGH VOLTAGE When using reactive gases as working gases observe the generally applicable guidelines as well as the laws and regulations pertaining to the use of such gases while installing gas feeder pipes and during the process see also section 4 4 Gas connections Before carrying out any assembly removal and maintenance work make sure that if radioactive reactive or toxic process substances are used the components and surfaces which have come into contact with such substances are decontaminated When despatching parts and components be sure that the form Declaration about Contamination S completed 4 4 1 4 2 INSTALLATION Install the system horizontally on a plane vibration free surface The pumping unit is decoupled elastically and it is installed in an oil pan made of high grade special steel which is capable of taking up all of the pumping unit s oil in case of an emergency The connection DN 40 KF on the exhaust side of the rotary pump should be connected to an active exhaust gas ventilator or exhaust gas cleaner Taking into considerati
27. ustomer carries out repair or maintenance of devices which have come into contact with materials that may pose a health hazard the relevant applicable rules and regulations have to be observed The following rules have to be observed for devices sent to us for repair or maintenance e Before sending contaminated devices to us decontaminate them in accordance with radiation protection regulations e Provide all devices we receive for repair or maintenance with a clearly visible notation Free from harmful substances Apply the same notation on the bill of delivery and on the cover letter Please use the enclosed Declaration about contamination e he customer may have the devices decontaminated by us except for devices contaminated by radioactivity In that case additions have to be made to the repair order accordingly and the process gases the device has come into contact with have to be specified In case of failure to specify them they will be determined by us and the costs incurred for this will be charged Observe all specific handling regulations We will carry out a decontamination and charge you for it if you have failed to provide the notation Free from harmful substances on the device or in its supporting documents Harmful substances shall be defined as Materials and preparations pursuant to Council Directive 67 548 EEC of 27 June 1967 Article 2 6 4 Training Special customer training is carried o
28. ut for the maintenance and repair of the components used Participation in such courses will enable the customer to repair the devices properly himself For more detailed information please contact Roth amp Rau Oberfl chentechnik AG APPENDIX 7 I 3390022 Mte ZN a ud H s I l i mp x i i i Zr 52 1 INS f 2 SEN nz 1 l i i i R 1 l 1 l Y ex I I r 3g L lt k gt E A d p r p 4 I n e MOUSE uj oos ze o su u g wen hs yz N f Y 4 gt i T las i 5 p 1 5 29 gt Cs In 1 1 wk a mit y 4 lt Y el y JE ME x na 7 L N x V LA Da 23 t o e H l l n At Mores gt 5 r em gt gt AP re tS GO mM p vx Ims Ou Tar Nye uq vr oer a a S P tnr dy eel ap ar at arn md IINE v s 2 mm mmm BE a eg b ray e 2 R 5 Bye z pee rd lt i Pri 1 i i i al 1 EN C Vs we 2 Ari a i u 1794 se id 4 4 1 m 1120 425 ML Ww NZ FU aL IRA uu i Diagram of the vacuum system 11 7 2 Diagram of the gas dosing system MFC e 23 MF 4 erem
29. ve plasma source with quartz tube applicator and microwave coupling on both sides is arranged horizontally in the recipient as process source In addition to the two quartz glass tubes the source includes a shield on the quartz glass side facing away from the substrate and a multipole magnetic field permanent magnets whose purpose is to improve plasma stability in particular for silicon processes Two gas showers for process gas intake one leading into the source and the second one over the substrate table ensure that gas distribution within the plasma space optimises the process The plasma source is powered by two magnetron heads 2 46 GHz 2000 W with circulator and 3 rod tuner The microwave generators are supplied with power from two units of 2000 W 3 5 kV in the rack cabinet The substrate holder is made of high grade special steel ceramics and graphite It may be heated up to 800 C The substrate carrier plate is heated using two graphite heating elements having the shape of wave patterns This rear side radiation heater is necessary because the substrate carrier plate lles on RF potential The heater includes a power supply unit with PID temperature controller power controller and a transformer with output voltages up to 2 x 25 V 50 Hz Temperature is measured using a Type K thermocouple at a reference measuring location just below the substrate carrier plate The substrate holder is RF bias capable up to 600 W 500 V Its substrate
30. vented using hardwired interlocks and suitable sensors The system software also monitors all the system s operating states and shuts off components and subassemblies if an error occurs and an error message is displayed on the screen accordingly A protective cut out in case of loss of povver or undervoltage vvill cause the master switch to open preventing any uncontrolled restarting IMPORTANT When installing further system components the customer shall comply with relevant regulations for avoiding unacceptable operating states and he shall obtain the manufacturer s specific approval 3 3 1 DESCRIPTION OF THE CONSTRUCTIONAL DESIGN Recipient Made of high grade special steel the coolable recipient of the system has the following inside dimensions L x W x H 400 x 500 x 250 mm It is installed in a horizontal position There is an inspection glass in the rectangular chamber door making it possible to observe the process visually The chamber door at the rear has been provided for purposes of installation and maintenance only The substrate to be coated is inserted through the front door and placed on the substrate carrier plate of the substrate holder The recipient has been mounted on a sectional frame made of high grade special steel The plasma source the pumping system with slide valves the substrate holder pressure gauges gas inlets feedthroughs and other components are mounted to the chamber walls using different
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