USER MANUAL
Contents
1. 4 Ix threshold lout arc occurs A arc detected B i a i E E E as rnd sya sss arc switch off C ty te t4 ts t Ux Uout cross detection criteria arc detection example cross detection criteria arc detection example Operating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Page 37 TRUMPF MP Family dU Uout Switch off time 300ns LE arc occurs A i arc detected 0 ty tots t Fig 5 5 dU dynamic voltage change criteria example Operating Instructions for MP 1 Generator Page 38 Rev 3 1 1 4 P 07 TRUMPF MP Family APPENDIX B Presputter mode in MP power supplies The idea of the new presputter mode is to deliver greater energies into arcs which occur during presputtering in order to decrease the presputter time of the cathode Increasing the arc energy The normal arc suppression feature performs a short circuit at the output of the power supply when the arc occurs This keeps the internal inductor current as well as some capacitive current from going into the arc In order to increase arc energy in the presputter mode this short circuit is not performed Selecting presputter mode The presputter mode is selected through the analog interface signals As you know the power supplies can work in 3 modes power voltage or current control The selection of one of these 3 modes i2. Wa Ty L HOSNAS INIYYNI m d3A Od TvNH3LNI sx J CESHA 4 5190024 SAY 13H uaMod Tuc ua yr qalas L 1 1 IN3 aia XE Page 9 Operating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Eq MP Family 3 2 Output power characteristic for the MP 1 module 9 1 25 25 I A Fig 1 Output power characteristic for MP 1 module Operating Instructions for MP 1 Generator Page 10 Rev 3 1 1 4 P 07 Eq MP Family 4 Electrical and mechanical specification 4 1 Electrical and mechanical specification in tables Electrical specification input characteristics Overall Mains voltage V 3 x 400V 10 Mains frequency Hz 50 60Hz Maximum mains input current A 3x2A Electrical specification output characteristics Power supply section Output voltage and current V 0 80V 0 1 25A 0 4000 O 2 5A see power characteristic Fig 1 Control modes Local display panel Remote RS232 Remote Profibus Output parameters control U voltage regulation current regulation P power regulation Arc detection criteria Imax arc is detected when output A adj Imax threshold 100 2600 mA current exceeds the Im Uxl cross detection an arc is detected if detection V adj U threshold O
3. MP 1 424V External Interlock Interlock signal Female Male Operating Instructions for MP 1 Generator Page 17 Rev 3 1 1 4 P 07 Ed MP Family 7 Working with the Front Panel Console All indications and settings can be accessed through the front panel of the device The next several pages contain description of the MP 1 Front Panel Console functions illustrated in the menu map on page 20 and step by step instructions on how to access them Bl H TTINGER Electronic LCD Display N Magnetron Power Supply MP 1 LED columns represent R voltage and current levels standby alarm voltage B Reg U analog Reg Enter Accept Key amp digital Reg P current E NS The most important states are displayed on LED indicators for quick identification These are Name Color Meaning The power supply is powered but not switched on yet ON green The power supply is running instab green Not used analog green Show the actual control mode Analog LED lights if controlled through digital green the analog connector Digital LED lights if controlled through the RS232 or RS485 connector Both LEDs are dark when controlled by the display console Digital LED blinks to show proper RS transmission during PC monitoring Alarm red Blinks when critical conditions occur Also an audible signal is sounded then Interlock yellow Interlock or door
4. Cable endings RS232 RS232 Com with Standard 5232 cable SUBD 9pin female PC Pins 6 and 7 must be shorted See RS 232 cable description Profibus Communication One twisted pair shielded for SUBD 9pin male Operating Instructions for MP 1 Generator Page 14 Rev 3 1 1 4 P 07 Eq MP Family 6 2 RS 232 terminal description Pin no Name Type Description n c n c 7 n c n c c Operating Instructions for MP 1 Generator Page 15 Rev 3 1 1 4 P 07 MP Family 6 3 Profibus terminal description Name Pin no RxD TxD P EE O sss signal DGND 5V DC n c Isolated Profibus ground Isolated Profibus supply voltage n c RxD TxD N X 4 Ear 9 ZU O Differential I O signal PROFIBUS RxD TxD P RxD TxD N Operating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Page 16 2 MP Family 6 4 External Interlock The Interlock feature is a circuit used for emergency interlock system After disconnecting interlock loop pins 12 and 19 power supply is immediately switched off power relays are open SUBD25pin MALE at device side Pin nr Name Type Description Interlock Digital input Must be connected to 24V pin 19 to enable power supply switch ON This is a relay based hardware connection 19 v Supply output 24V supply for all digital inputs Interlock
5. Laws relating to electromagnetic compatibility Check the external fuse value and grounding circuit before switching the mains on A Never unscrew the front terminal cover before switching the mains off The positive output of the power supply must be connected to the chamber frame potential must be grounded 1 4 Transport and storage Transport MP 1 system must be firmly situated in a horizontal position Storage Storage environments should be dry free of aggressive vapors and not exposed to temperatures from beyond the 3k3 clas range EN 50178 i e 25 55 C See table Environment Operating Instructions for MP 1 Generator Page 6 Rev 3 1 1 4 P 07 Eq MP Family 2 Explanation of symbols and notes Failure to comply with these precautions means that slight physical injury or damage to property is possible AN Failure to comply with these warnings means that death serious physical injury or damage to property are possible Q Failure to comply with these information can cause faults or failure of the MP 1 system performance lt Useful notice and tips about correct handling operation and maintenance Operating Instructions for MP 1 Generator Page 7 Rev 3 1 1 4 P 07 Eq MP Family 3 General information The MP 1 Power Supply is designed to provide power for the magnetron ion source in an industrial vacuum process chamber for PVD surface treatment technologies
6. The power electronic design is based on switched mode technology which ensures low output current ripples high efficiency small dimensions and weight low audio noise generation Modular construction of the power converter circuits simplify transportation installation and servicing duties All units are microprocessor controlled All control signal connections are digital and opto isolated giving high resistance to electric disturbances A multi control system gives the user a possibility of selecting from three optional control sources e Local DISPLAY console located on the front panel of the MP 1 e Remote from a PC computer through an RS232 or RS485 link Remote Profibus The power supply is assembled in one industrial steel enclosure in the 19 standard 3 1 MP 1 block diagram The power circuit consists of the following functional blocks input EMI filter to reduce the EMI delivered to the mains power relays which provide soft mains switch on rectifier and filter high frequency switched mode power converter high frequency transformer high frequency rectifier output filter arc switch off circuit control electronics and auxiliary power supplies Operating Instructions for MP 1 Generator Page 8 Rev 3 1 1 4 P 07 MP Family A block diagram of the MP 1 is shown below qavoag JOH1NO2 UNOHO TOHINO2 NOI193130 9HY uoSN3S LINDUID uana dedi ONIHOLIMS dalduoas
7. gt Ix setting NORM U 0 800V 1 0 2 5 Profibus ID 120 lt PROGRAM VERSIONS RS SPEED 9600 bps lt 15 4 MP01 9 P15AD2 AD 4 Pl15user2 U 7 There is one more level It is the SERVICE SERV access level It enables modification of input and output calibration values voltage thresholds etc Since improper modification of any of these settings may cause a malfunction of the device the access code to this level is known by the service staff only Operating Instructions for MP 1 Generator Page 20 Rev 3 1 1 4 P 07 Ed MP Family 8 Description of displayed data and settings 8 1 Basic controls and readouts Display Modif Description gt Pout 1000 700 W Yes Power regulator setting first number and actual power supply s output power readout second number gt Uout 680 545 V Yes Voltage regulator setting first number and actual power supply s output voltage readout second number Iout 1 0 0 5 A lt Yes Current regulator setting first number and actual power supply s output current readout second number ALARM NONE No When the ALARM LED blinks this cyclically displays the states which caused the alarm dU ARC CNT 45 No Number of arcs detected by the dU criteria which occurred from the last counter reset max 10000 UxI ARC CNT 1300 No Number of arcs detected by U I criteria which occurred from the last counter reset max 10000 I
8. 200 V mode is enabled when output current A adj threshold 50 2500 mA exceeds the Ix threshold value while the output voltage drops below the Ux value dU dynamic voltage change is a in case preset AU 75 actual output etection mode is enabled when the output vue voltage drops rapidly by 75 of its value Maximum arcing frequency Arc s max 20 Fusing A 10A C class installed inside of the enclosure Efficiency ca 95 Operating Instructions for MP 1 Generator Page 11 Rev 3 1 1 4 P 07 Ed MP Family Mechanical Specification Mechanical Specification Size Width x Height x Length mm 19 482 x 133 x 545 Weight kg 11 Environmental specification Ambient operating temperature 0 35 F 32 95 Storage temperature C 25 55 F BS coe 2131 Relative humidity 5 85 Non condensing g m 25 Air pressure kPa 80 106 mbar 800 1060 approximately 2000 above sea level Pollution degree 2 see chapter 5 1 installation site contamination Operating Instructions for MP 1 Generator Page 12 Rev 3 1 1 4 P 07 Ed MP Family 5 Installation 5 1 Installation site Enclosure The MP 1 power supply is built in a standard 19 enclosure and is designed to fit into a standard 19 600mm deep rack cabinet The weight of this device is ca 11kg and the mechanical construction o
9. ValH ValL write integer value These three bytes enables to write new threshold values The first byte ChanO represent channel number second and third bytes ValH ValL represent the new value in integer If new value was wrote properly the MP confirm this sending in ValHi and ValLi new just written value The list of available channels presented is on the next page Scaling is 0 10000 represents 0 1000 value Chan1 read integer value This output byte enables to read threshold values or temperatures and represent channel number of the value which will be read The list of available channels presented is on the next page Chan2 Val write byte value These three bytes enables to write new byte values new regulators settings etc The first byte ChanO represent the channel number and the second byte Val represent the new value in byte If new value was wrote properly the MP confirm this sending in ValB new just written value The list of available channels presented is on the next page Chan3 read byte value This output byte enables to read byte value from selected channel and represents channel number of the value which will be read The list of available channels presented is on the next page Module 1 Inputs identification 0x42 0x12 0x00 0x02 _ 1 2 3 5 6 7 8 9 0 1 UactO Uact1 lactO lact1 dUcnO dUcn1 12 13 14 15 16 This module is re
10. 0A F5 40 00 Valo Vall Val2 vas sie Val3 SH SL MP reply Fail L0 12 3 4 5 Operating Instructions for MP 1 Generator Page 25 Rev 3 1 1 4 P 07 EW MP Family 8006 Set a byte value PC to MP 0 1 2 3 4 5 0A F5 80 06 Adr Chant 7 8 9 Where Adr Adres for RS485 0 255 9 Chan int Channel number Val byte Value to be set MP reply L0 1 2 3 4 5 8007 Read a byte value PC to MP _ 1 2 3 4 5 6 8 Where Adr Adres for RS485 0 255 Chan int Channel number MP reply OK 0 a7 2 3 5 6 Asked byte value MP reply Fail Operating Instructions for MP 1 Generator Page 26 Rev 3 1 1 4 P 07 Eq MP Family 8008 Set an integer value PC to MP 0 1 4 5 2 3 0B F4 80 08 Adr Chan 7 8 9 ValL SH S Where Adr Adres for RS485 0 255 9 Chan int Channel number ValH ValL word Value to be set MP reply L0 1 2 3 4 5 8009 Read an integer value PC to MP 00 4 2 3 4 6 Ooo _ 8 sey Where Adr Adres for RS485 0 255 Chan int Channel number MP reply OK 08 F7 40 00 ValH ValL SH 512 Where Val byte Asked byte value MP reply Fail L0 a 2 3 4 5 Operating Instructions for MP 1 Generator Page 27 Rev 3 1 1 4 P 07 T
11. Iset Pset ignor Bits SH SL ed Where Adr Address for RS485 0 255 Uset float Voltage setpoint V 0 800V Iset float Current setpoint A O 2500mA Pset float Power setpoint kW 0 1kW Bits Control bits PC controls the MP 1 Monitoring only 0 Mains relays ON 1 OFF 0 Power ON 1 OFF 0 Reset arc counters for 1 transmission is enough RegSel RegSel2 RegSel1 RegSel2 Regulator 0 0 Regulator 1 0 Regulator U 0 1 Presputter 1 1 Operating Instructions for MP 1 Generator Page 23 Rev 3 1 1 4 P 07 2 MP Family MP to PC 2 3 47 en 12 13 1415 16 17 16 9 40 00 lact_ Imcnt Uxicnt Bits1 Bits2 18 20 21 dU cnt SH SL Where Uact float Output average voltage V 0 800V lact float Output average current A 0 2500mA Im cnt integer Arc counter Imax criteria 0 10000 Uxl cnt integer Arc counter criteria 0 10000 Ud cnt integer Arc counter dU criteria 0 10000 BitsO Acknowledge bits PC control acknowledge 1 analog or display console 0 Relays ON 1 or OFF 0 Power ON 1 INHIBIT 0 Uxl enabled dU enabled 1 after RESET until the 1 st transmission to PC O Bits1 more acknowledge bits Interlock 1 no interlock 0 OverTemp Bit 1 Overtem
12. console of MP The software read the ID number from MP at the beginning the program If the ID number was changed the unit must be restarted PROFIBUS module construction MP01 use two modules which have a different length of byte It is very important to put modules in properly order otherwise the Parameter data error can be appearing All integer 2 byte values are given with the MSB first There is no possibility to set the float value but it can be implemented if it is necessary All types of modules are presented below Module 1 Outputs identification 0x82 0x0D 0x00 0x01 0 1 2 3 4 5 6 7 9 10 ffi 12 13 This module is represented by 16 bytes where Ctrl control byte represented by 8 control bits 0 PROFIBUS master controls the MP 1 1 2 Mains relays ON 1 OFF 0 3 4 5 6 Reset arc counters for 1 transmission is enough Presputter N Uset Voltage setpoint represented by 16bit two bytes UsetO and Uset1 integer number Scaling 0 10000 represents 0 800V Operating Instructions for MP 1 Generator Page 30 Rev 3 1 1 4 P 07 TRUMPF 2 MP Family Iset Current setpoint represented by a 16bit two bytes Iset0 and Iset1 integer number Scaling 0 10000 represents 0 2500 mA Pset Power setpoint represented by a 16bit two bytes PsetO and Pset1 integer number Scaling 0 10000 represents 0 1000 W
13. mode without changing the settings The ACCESS CODE feature keeps critical data from being accidentally changed It also provides access to additional item lists which are used during testing and service operations The initial access level is STANDARD STRD This allows the user to change the voltage current and power settings for the power supply s regulators reset the arc counters switch the power supply on and off change the operating modes and of course change the access level by entering the appropriate ACCESS CODE Selecting SETUP SETP access level will reveal a fourth item list the USER SETUP and allow the user to change the rest of the settings The access code for this level is initially 1 Operating Instructions for MP 1 Generator Page 19 Rev 3 1 1 4 P 07 MP Family The available item lists after entering the SETUP access code will be Init On Off User Setup Menu Producer and product information see see above USER SETUP MENU HUETT INGER gt CONTROL DISPLAY lt Electronic gt ArcDet Imax 2500mA lt tel 48 22 7620000 gt ArcDet Ix 2500mA lt tel 48 606 298900 gt ArcDet Ux 100V lt infol Enable Disable pl huettinger com gt Imax ENABLE lt DEVICE MP 01 UxI ENABLE lt PVD Power Supply gt ENABLE lt MAINS 3x400V 10 gt BreakTime 20ms lt 50 60Hz 3x 2A gt RampRate 30units lt OUTPUT Pmax 1kW
14. shall not be liable for any loss and damages resulting in such usage Correct usage also includes e compliance with all instructions from the operating manual e adherence to inspection and maintenance intervals 1 2 Personnel Only qualified personnel may work with the MP 1 Qualified means that the staff will be familiar with safe installation maintenance and operation All of the personnel working with this equipment must take precautions to protect themselves against possible electrical shocks or fatal injuries They must be acquainted with the entire MP 1 operating instruction manual and understand all of its contents AN Do not be careless around the equipment 1 3 Safety standards profile The MP 1 Power Supply was designed and constructed in compliance with requirements included in the following standards and EC directives e EN 60950 1992 Safety of information technology equipment including electrical business equipment e EN 50178 1998 Electronic equipment for use in power installations e EN 61000 6 4 2001 Generic standards Emission standards for industrial environments EN 61000 6 2 2001 Generic standards Immunity for industrial environments Operating Instructions for MP 1 Generator Page 5 Rev 3 1 1 4 P 07 Eq MP Family EC directives e 73 23 EEC Low Voltage Directive Law for electrical equipment within certain voltage limits 89 336 EMC Directive as amended by 93 68 EEC
15. the number of the last byte of transmission 3 AckH and AckL are acknowledge codes which are listed below Acknowledge and failure codes HEX format 4000 OK Transmission OK and command executed 4001 Transmission length error Byte1 is not a negation of byteO 4002 Check sum error The two byte checksum is not equal to the sum of bytes nr 2 n 2 4003 Command not executable Command is understood but can not be executed due to technical conditions 4004 Command not understood Command is not implemented Operating Instructions for MP 1 Generator Page 29 Rev 3 1 1 4 P 07 Eq MP Family 9 1 Profibus communication protocol PROFIBUS is an interface that allows you communicate with the MP01 from a PROFIBUS master The BP unit acts as a slave device in the communication process It never initiates a transmission The PROFIBUS master sends a command coded in modules which is executed by the MP after that generated is reply The recognized modules are presented below Additional modules or functions can be implemented if it is necessary Baud Rate for communication between PROFIBUS master and PROFIBUS slave The PROFIBUS slave in the MP has the auto baude feature which allows to adjust automatically to the rate of the PROFIBUS master system during start up Baud rate are accessible in discrete steps from 9 6 kbits to 12 Mbits Settings of PROFIBUS ID The ID number is setting by using the front panel
16. MP 1 DC Generator USER MANUAL Notice This operating manual is required for the safe operation of the MP 1 Generators Therefore you should keep the operating manual close to the unit Ed MP Family Operating instructions for MP 1 Generator DC Generator Y qar eee HUETTINGER Electronic Sp Z 0 0 Marecka 47 PL 05 220 Zielonka tel 48 22 761 38 00 fax 48 22 761 38 01 info pl huettinger com www huettinger com Operating Instructions for MP 1 Generator Page 1 Rev 3 1 1 4 P 07 MP Family Headquarters HUTTINGER Elektronik GmbH Co KG B tzinger StraBe 80 79111 Freiburg Germany Tel 49 761 89 71 0 Fax 49 761 89 71 1150 info de huettinger com HUETTINGER Electronic Inc 111 Hyde Road Farmington CT 06032 USA Tel 1 860 255 65 55 Fax 1 860 255 64 23 info us huettinger com HUTTINGER Electronic K K Shinyokohama Tobu AK bldg 7F 3 23 3 Shinyokohama Kohoku ku Yokohama city Kanagawa 222 0033 Japan Tel 81 45 470 3761 Fax 81 45 470 3510 info jp huettinger com HUTTINGER Electronics Ltd 11H Century Ba Shi Building 398 Huai Hai Zhong Road Shanghai 200020 P R China Phone 86 21 63 85 12 38 ext 301 Telefax 86 21 63 85 16 60 info cn huettinger com HUETTINGER Electronic Sp z 0 0 Marecka 47 PL 05 220 Zielonka Poland Tel 48 22 761 38 00 Fax 48 22 761 38 01 info pl huettinger com Ope
17. RUMPF MP Family Channel numbers Byte Text Adjustable Address for RS485 communication 0 255 Break time ms Ramp rate V ms 40 YES PID settings for regulators KpU_HV TiU_HV TdU_HV 0 200 Kpl HV 0 200 Til HV Tdl HV 0 100 YES ImPsp 20 255 YES 8003 arc detection criteria enabled 0 1 8004 UXI arc detection criteria enabled YES 8005 dU arc detection criteria enabled 0 1 5 Integer Text Adjustable Power supply software version 0 255 Pulse controller software version 0 255 30 Analog interface if installed software version 0 255 NO Float Text Adjustable Arc detection threshold settings D y ly l o Current threshold for Imax arc det criteria Current threshold for Ix arc det criteria Voltage threshold for Ix arc det criteria Internal temperature values and voltages At control PCB 0 100 C NO GB 0 100 C NO Rect At transformer Rectified mains voltage nomin 650V Controller supply voltage nomin 24V NOTES 1 If Adr 255 the MP will always react to the received command regardless its own address but it will send a reply confirmation only if its own address matches the Adr Operating Instructions for MP 1 Generator Page 28 Rev 3 1 1 4 P 07 2 MP Family 2 SH SL are the high and low bytes of the check sum The check sum is an arithmetic sum of bytes 2 n 2 where n is
18. closed detection circuits open Blinks each time an arc is detected Reg Indicate which regulator is currently active Reg Reg P This LED blinks in standby mode when parameters are being changed display panel in Modify Mode to indicate the mode that the parameters refer to Operating Instructions for MP 1 Generator Page 18 Rev 3 1 1 4 P 07 Ed MP Family The data displayed on the LCD display is organized into several item lists The 2 basic ones are e Basic controls and readouts e Basic ON OFF and mode control Use arrow keys A and to Use MENU CANCEL key to scroll display window along the list switch between the item lists Basic controls and readouts Initial menu ON OFF settings gt POWER ON OFF lt LstAlm NONE T ALARM dU ARC CNT UxI ARC CNT Imax ARC CNT RESET COUNTE ACCESS CODE On Off An item which can be modified is indicated by a line cursor gt modifiable item In this case it is sensitive to the ENTER ACCEPT key If the correct ACCESS CODE has been previously selected pressing ENTER ACCEPT will bring us into MODIFY mode and allow modification of the selected item values The MODIFY mode is indicated by two arrows gt Value 0000 lt The value can be now modified by using the A and v keys Press ENTER ACCEPT soft key to activate the new setting Press MENU CANCEL soft key to leave MODIFY
19. e MP01 turn off output power and restart PROFIBUS slave After then the PROFIBUS slave will be try to connect with PROFIBUS master Physical layer and configuration of MPO1 To connect the MP with the PROFIBUS an isolated RS 485 interface according with EN 50170 is required Please ensure that termination resistors are available at both ends of the cable If special PROFIBUS connectors are being used these resistors are often found inside the connector and must be switched on The cable shield should be firmly connected to ground at every device Make sure that there is no potential difference between the grounds at the devices VP RxD TxD P RxD TxD P RxD TxD N RxD TxD N GSD files GSD Electronic data sheet of a device files contain and describe the functions and character of PROFIBUS device Therefore to use this unit in a PROFIBUS system it needs to have a specific GSD file that is compatible with the unit Please use only this GSD file which is delivered with MP Specification for PROFIBUS slave MP Configuration data in accordance with GSD file MP v2 gsd Technology ASIC Physical separation fieldbus side Standard Baud rate for RS485 Automatic detection up to 12 Mbaud Sync Supported Freeze Supported Primitive fieldbus ID 126 Dipswitch Supported Operating Instructions for MP 1 Generator Page 34 Rev 3 1 1 4 P 07 TRUMPF MP Family APPENDIX A Arc detection criteria This circuit is respon
20. e shut down signal is activated and the output power of the power supply is switched off At this same moment a time control procedure is called and a shut down time interval is provided When the shut down time interval has elapsed the shut down signal is released and the power units return to it s previous voltage setting with a voltage ramp which is also programmable By setting the ramp rate parameter the time after which the voltage reaches its stable value may be controlled Operating Instructions for MP 1 Generator Page 35 Rev 3 1 1 4 P 07 Eq MP Family Imax l Switch off time lt 300ns gt lt Ramp d Break time time S gt gt gt Imax threshold a a ee NM NN lout arc occurs A arc detected B arc switch off C 0 tr tt t4 ts t Fig 5 1 Imax Criteria arc detection example Ux lt Uout l lout Switch off lt 300 5 Uout 11121 t4 ts t Fig 5 2 cross detection criteria arc detection example Ux lt Uo lx lt lo Operating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Page 36 MP Family Fig 5 3 Fig 5 4 gt L gt lout Switch off time lt 300ns Break time Ux threshold Ix threshold lout arc occurs A arc detected B arc switch off C U gt Uo lle Ux lt Uout gt Switch off time lt 300ns Break time time Ux threshold
21. f the cabinet should be strong enough to hold it Forced ventilation inside cabinet is recommended Inlet air temperature should not exceed 35 Contamination Cooling air should be free from corrosive vapors and particles that could become conductive particularly after exposure to moisture A proper environment conditions ensure long lasting reliable performance significantly increasing the MTBF Unpacking Inspect the devices packaging for damage and compare its contents with delivery documents 5 2 Fusing The MP 1 power supply has a set of 10A class C mains fuses installed on the rear side of the enclosure Also small fuses are installed inside the unit to protect the control circuits supply transformer In case these fuses break an examination of the power supply s interior is necessary so the user should not exchange these fuses by himself Operating Instructions for MP 1 Generator Page 13 Rev 3 1 1 4 P 07 Ed MP Family 6 Connecting the power supply All connection terminals are located at the rear side and should be covered by a protection grid after cabling Mains supply and PE 4x at least 1 5mm cable Output 2x at least 1 5mm cable PRofibus Interlock 6 1 Connection terminals Terminal Description Cable Cable endings MAINS 3 x 400VAC min 3 x 1 5mm OUTPUT 800V 2 5A min 2 x 1 5mm twisted pair cable PE Protective earth min 1 5mm Terminal Description Cable
22. hold 0 200V Enable Disable gt Imax ENABLE Enable Disable for Imax function gt UxI DISABLE Enable Disable for U x I function gt dU DISABLE Enable Disable for dU function gt BreakTime 20ms lt Yes After an arc is detected the power supply s output shuts off for the amount of time 2 60ms gt RampRate 30units lt Yes The voltage recovery ramp slope setting The higher the setting the faster steeper the recovery ramp gt Ix setting NORM lt Yes AUTO The actual Ix threshold is set either to the Ix setting or the lout setting depending on which one of them is LOWER NORM AUTO feature disabled gt Profibus ID 120 Profibus ID setting RS SPEED 9600bps Baud Rate for serial port 2400 38400 Operating Instructions for MP 1 Generator Page 22 Rev 3 1 1 4 P 07 Eq MP Family 9 Interfaces 9 1 RS 232 communication protocol The MP acts as a slave device in the communication process It never initiates a transmission The master computer PC sends a command which is executed by the MP and a reply is generated with respect to note 1 The recognized commands are presented below Additional commands can be implemented if necessary The baud rate can be set from 2400 to 38400 from the MP s front panel console to correspond to the rate set at the PC 8913 Normal run PC to MP 16 bE9 89 13 Adr Uset
23. information from the controllers display and understand the behavior of the entire power supply Introducing any changes into the devices settings will obviously require full knowledge of the system and also the password Operating Instructions for MP 1 Generator Page 40 Rev 3 1 1 4 P 07
24. lable at no charge Operating Instructions for MP 1 Generator Page 3 Rev 3 1 1 4 P 07 9 1 RS 232 communication protocol 9 2 Profibus communication protocol APPENDIX A Arc detection criteria APPENDIX B Presputter mode in MP power supplies MP Family Table of contents page Safety information 5 1 1 Important information 1 2 Personnel 1 3 Safety standards profile 1 4 Transport and storage Explanation of symbols and notes 7 General information 8 3 1 1 block diagram 3 2 Output power characteristic for the MP 1 module Electrical and mechanical specification 11 Installation 13 5 1 Installation site 5 2 Fusing Connecting the power supply 14 6 1 Connection terminals 6 2 RS 232 terminal description 6 3 Profibus terminal description 6 4 External Interlock Working with the Front Panel Console 17 Description of displayed data and settings 20 8 1 Basic controls and readouts 8 2 ON OFF control 8 3 User setup menu Interfaces 22 Operating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Page 4 Eq MP Family 1 Safety information 1 1 Important information Safe operating procedures and proper use of the equipement are the responsibility of the user of this system The MP 1 Power Supply is designed to power industrial vacuum process chambers in PVD surface treatment technologies Any other use or any use beyond the foregoing is deemed to be improper The HUETTINGER Electronic company
25. maxARC CNT 300 No Number of arcs detected by the Imax which occurred from the last counter reset max 10000 RESET COUNTERS Press ENTER to reset the arc counters gt ACCESS CODE STRD Yes Entering the appropriate access code gives access to the USER SETUP MENU list and SERVICE SETUP list 8 2 ON OFF control Display Modif Description gt POWER OFF lt Yes Setting this item to ON or OFF will switch the power supply ON or OFF if the DISPLAY control mode is selected user setup menu LstAlm NONE No If the power supply has been switched off due to an alarm state this alarm statement will be displayed here Operating Instructions for MP 1 Generator Page 21 Rev 3 1 1 4 P 07 23 MP Family 8 3 User setup menu User setup menu accessible from USER access level Display Modif Description gt CONTROL ANALOG Yes The control mode control source can be switched between DISPLAY console control or ANALOG connector control The RS232 connection mode is automatically activated when RS232 transmission is detected and the RS232 control feature in PVD Power is selected at the PC and deactivated when this feature is deselected or no transmission is present for more then 5sec gt ArcDet Imax 2500mA lt Yes threshold 0 1 2 6A ArcDet Ix 2500mA Yes threshold 0 05 2 5A gt ArcDet Ux 200V Yes U thres
26. p PowerFail 1 power OK 0 Display Fail 1 display OK 0 Communication with pulse unit Fail 1 OK 0 EEprom data sum error 1 OK 0 EEprom write Error 1 OK 0 AlarmActive 1 inactive 0 O Other parameters can be accessed for reading adjustment through their channel numbers Byte integer and float values have separate channel number lists The command strings for reading and setting these values together with the channel lists are presented below However the user must be aware that changing the values by using these Set commands will interrupt the operation of the power supply for ca 100ms each time the command is executed This time is needed to store the new data into an EEPROM memory verify the contents and calculate new checksums Therefore it is wise not to use these commands under power on conditions Also changing some parameters dynamic settings may spoil the performance of the power supply Operating Instructions for MP 1 Generator Page 24 Rev 3 1 1 4 P 07 24 Family 8003 Set a point value PC to MP 4 505 mE a Chan1 10 12 Where Adr Adres for RS485 0 255 Chan int Channel number Val float Value to be set MP reply 0 1 2 4 5 8004 Read a floating point value PC to MP a sm nue Where Adr Adres for RS485 0 255 Chan int Channel number MP reply OK
27. presented by 19 bytes where Uact Average voltage readout represented by a 16bit two bytes UactO and Uact1 integer number Scaling 0 10000 represents 0 800V lact Average current readout represented by a 16 bit two bytes lactO and lact1 integer number Scaling 0 10000 represents 0 2500 mA Pact Average power readout represented by a 16bit two bytes PactO and Pact1 integer number Scaling 0 10000 represents 0 1000 W Imcn Arc counter for Imax criteria represented by a 16bit two bytes ImcnO and Imcn 1 integer number Show actual value of Imax counter The range of Imcn counter is O 10000 Operating Instructions for MP 1 Generator Page 31 Rev 3 1 1 4 07 Ed MP Family Uxlc Arc counter for criteria represented by a 16bit two bytes UxlcO and Uxlc1 integer number Show actual value of Uxl counter The range of Imcn counter is O 10000 dUcn Arc counter for dU criteria represented by a 16bit two bytes dUcnO and dUcn1 integer number Show actual value of dU counter The range of Imcn counter is O 10000 Bits Represented by 16bit two bytes BitsO and Bits1 show basis information about MP The description and complete information about acknowledge BitsO Acknowledge bits PC control acknowledge 1 analog or display console 0 Relays ON ack 1 or OFF 0 Power ON 1 INHIBIT 0 Uxl enabled dU enabled 1 after RESET until the 1 st transmission
28. rating Instructions for MP 1 Generator Rev 3 1 1 4 P 07 Page 2 Eq MP Family 2007 HUETTINGER Electronic All rights reserved This manual is purposed to enable the reader to install and operate safely the equipment described below Making copies of any part of this manual for any purpose other than these is a violation of Poland copyright law In the interest of providing even better equipment HUETTINGER Electronic reserves the right to make product modifications without notification or obligation To the best of our knowledge the information contained in this manual is the most accurate available as of the date on the front page 2007 HUETTINGER Electronic To ensure years of dependable service HUETTINGER Electronic products are thoroughly tested be among the most reliable and highest quality systems available All parts and labour carry our standard 3 year warranty For Customer Service or Support call HUETTINGER Electronic Sp z 0 0 tel 48 22 761 38 00 fax 48 22 761 38 01 service pl huettinger com Returning Units for Repair Before returning any product for repair or adjustment call HUETTINGER Electronic Service and discuss the problem with a representative service engineer Be prepared to give the serial number of the unit and the reason for the purposed return This consultation call will allow Customer Service to determine if the unit needs to be returned Such technical consultation is always avai
29. s done by a 2 bit digital signal RegSelO and RegSel1 Since 2 bits give 4 possible states and we only need 3 to select control mode the 4 th combination both signals HIGH is used to select presputter mode In this mode the power supply operates in power control mode Controlling the presputter mode performance In presputter mode the Uxl and dU arc detection criteria are automatically disabled leaving Imax as the only one active Also the Imax value is set separately for the presputter mode Imax presptr value in the USERS SETUP MENU on the display panel This allows the user to set the amount of the charge in the internal inductor at switch off The arc energy is proportional to the square of this current value Imax adjustable larc normal Ix laro presputter Operating Instructions for MP 1 Generator Page 39 Rev 3 1 1 4 P 07 MP Family The MP 1 power supply is delivered in a ready to use condition If all connections have been made properly and the operating instructions will carefully be followed there should be no problems with the activation of the power supply The default settings should give proper behavior of the device in the most commonly used system configuration It would be useful however to learn as much about the maintenance and operation principals as possible before proceeding with the startup Understanding the systems operating principals will help the user obtain more useful
30. send in all theses bytes the OxFF value Operating Instructions for MP 1 Generator Page 32 Rev 3 1 1 4 P 07 TRUMPF MP Family Channel address Byte Adjustable 11 12 ID number 1 127 NO Break time ms 2 60 YES 13 Ramp rate V ms PID settings for regulators 14 KpU O 200 15 TiU 0 200 YES but do 17 TdU 0 200 not change Kpl 0 200 the setting without consulting AC 23 24 Profibus version 0 255 NO Power supply software version 0 255 NO 25 Pulse controller software version 0 255 26 Analog interface if installed software version 0 255 NO Integer Chan Text Adjustable Arc detection threshold settings 1 Current threshold for Imax arc det criteria 100 YES 2600A 2 Current threshold for Ix arc det 50 2500A 2 Current threshold for Ix arc det criteria 3 Voltage threshold for Ix arc det criteria 2 200V Internal temperature values and voltages At control PCB 100 C NO At HF rectifier 100 C NO Rectified mains voltage nomin 650V 0 700V 0 0 At pulse switch semicond 0 100 C 0 Controller supply voltage nomin 24V 0 35V Operating Instructions for MP 1 Generator Page 33 Rev 3 1 1 4 P 07 TRUMPF MP Family Profibus safety In any case when the PROFIBUS slave lost connection with PROFIBUS master or when master stops communicating th
31. sible for e measuring the voltage and current at the output terminals of the power supply e arc occurrence detection and a switch off initiation e atime control of a switch off procedure The output voltage is measured through a high voltage isolation amplifier The output current is measured a LEM transducer The arc detector circuit bears quite complex ideas which may require some theoretical explanation Electric arcs which will occur inside the vacuum chamber during any stage of the surface treatment process may negatively affect the treated surface and for that reason should be extinguished as soon as possible From the electrical point of view an arc occurrence is a rapid change of impedance at the chambers electric terminals The MP arc detection system is equipped with three types of parameter traps to ensure fast response to arc occurrence Imax a programmable maximum current trap level voltage current trap pair with both constant programmable voltage Ux and current Ix levels dU a dynamic voltage trap level Imax and dU traps are a single parameter type an arc is detected when the working point crosses one current or voltage level requires crossing both current and voltage levels to detect the arc Once arcs are detected their number is displayed on the LCD display with respect to 2 types of traps Imax and Uxl dU which has detected the arc Once an arc has been detected th
32. to PC Bits1 more acknowledge bits Interlock 1 no interlock 0 OverTemp Bit 1 Overtemp PowerFail 1 power OK 0 Display Fail 1 display OK 0 Communication with pulse unit Fail 1 OK 0 EEprom data sum error 1 OK 0 EEprom write Error 1 OK 0 AlarmActive 1 inactive 0 O Chan4 ValHi ValLi read integer value These three bytes are reply for a command read integer value setting channel Chan1 or write integer setting channel ChanO in output module Chan4 byte represents channel number of written or read value After writing value setting channel Chan1 MP unit confirm its if new value was written properly send in Chan4 channel number and in ValHi and ValLi new just written value If not the MP unit will send in all theses bytes the OxFF value The scaling is For channel number 1 to channel 3 is 0 10000 represents 0 10000 value For channel number 4 to channel 9 is 0 10000 represents 0 1000 value Chan5 ValB read byte value These two bytes are reply for a command read byte value setting by channel Chan3 or write byte setting by channel Chan2 in output module Chan5 byte represents channel number of written or read value After writing value setting channel Chan3 MP unit confirm its if new value was written properly send in Chan5 channel number and in ValB new just written value If not the MP unit will
Download Pdf Manuals
Related Search