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USER'S GUIDE TO AUTOPROBE CP

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1. gt AC 2 um HIF Topography Slope _ OY Repeat iimport Scan OFF mage X offset u Y offset u Scan rate Setpoint_ Servo gain H Z servo Zm 4 Size Set point 2 um div 15 14 13 512 buffer lines allocated Press F1 for Help dx 10 000 dy 10 000 dz 00 000 Figure 3 1 The Image mode window 3 The Topography signal i e the signal representing surface topography should be displayed on the Oscilloscope Display The Signal Name listbox underneath the Oscilloscope Display lists the signal that is currently being monitored Topography should appear by default If you do not see the signal trace on the Oscilloscope Display click the Auto Rescale button to rescale the signal trace to fit the display 4 To take an image click the button 3 10 Chapter 3 Taking an AFM Image AutoProbe will generate an image for you which will be displayed in the Active Display Images are displayed in gray scale format In a gray scale image brightness corresponds to vertical height on the surface
2. Correct All three balls are engaged in the slots cantilever chip Figure 2 15 The chip carrier correctly inserted under the spring clip Now you are ready to load the cartridge in the probe head CAUTION Any time that you load a cartridge or remove a cartridge it is very important to raise the probe head first If you dont raise the head the cantilever tip will scrape across the surface of your sample Your sample and the tip will be damaged 7 Move the Z stage up using the z direction pad in the Move mode window When the probe head has been raised you are ready to load the probe cartridge 8 To insert the probe cartridge in the head hold the cartridge by the two prongs Make sure you hold it with the cantilever chip facing down so that the tip can contact the sample The probe cartridge slides along a ledge in the probe head The ledge of the probe head has three contact zones two conical depressions and a flat region The underside of the cartridge has three balls embedded in it These three balls fit over the three contact zones in the probe head The cartridge slides along the ledge until all three balls are engaged by the contact zones 2 24 Chapter 2 Setting Up to Take an Image 9 Insert the cartridge into the head by sliding it along the ledge CAUTION Make sure the cantilever chip faces down You can use one hand or two whichev
3. Bild 0 1 R ckwand des AEM zeigt die Position des Erdungspoles xxviii Vorwort und bersicht Einstellen der Versorgungsspannung Die Einstellung der Versorgungsspannung muss mit der Versorungsspannung des Landes bereinstimmen in dem das AutoProbe MS betrieben wird Die Einstellung erfolgt ber einen Spannungs Wahl Schalter der sich an der R ckseite des AEM befindet Die Spannung kann folgendermassen eingestellt werden 100V 120V 220V oder 240V Um die Einstellung der Versorgungsspannung zu ndern m ssen folgende Schritte befolgt werden 1 Versichern sie sich dass die Spannung des AEM ausgeschaltet ist 2 Stecken sie das Versorgungskabel des AEM aus 3 Entfernen sie die Abdeckung der Spannung Wahl Schalter Einheit mit Hilfe eines passenden Schraubenziehers 4 F hren sie ein passendes Werkzeug in den Schlitz des Spannung Wahl Schalters und l sen sie mit dessen Hilfe das Spannungs Wahl Rad aus der Einheit 5 Stellen sie das Spannungs Wahl Rad in der ben tigte Spannung ein 100V 120V 220V oder 240V 6 Stecken sie das Spannungs Wahl Rad zur ck in seine Position in der Einheit Versichern sie sich dass die gew hlte Spannung im Fenster sichtbar ist 7 Befestigen sie die Abdeckung ber der Spannungs Wahl Schalter Einheit Die Versorgungsspannung sollte nun ordnungsgem ss eingestellt sein Betriebssicherheit xxix Laser Sicherheit Beachte In diesem Teil b
4. H 00000 Betriebssicherheit xxxiii 1171 Borregas Ave Sunnyvale CA 94089 1304 Date Serial No Patents 5 157 251 5 210 410 5 376 790 5 448 399 100 120 220 240 VAC 50 60 Hz 400W Complies with 21 CRR 1040 10 and1040 11 Made in the USA IMTHERMOMICROSCOPES AutoProbe Electronics Module Model No APEM 1000 Bild 0 7 R ckseite des den Ort der Lasersicherheits bereinstimmungskennzeichnung anzeigend xxxiv Vorwort und bersicht XXXV Spezifikationen und Ausf hrungen des AutoProbe CP s System Ausf hrungen Standard Multitask Messleistung Standard Scanner Scannreichweite Reglerresolution Multitask Scanner Scannreichweite Reglerresolution Beinhaltet einen AFM Tastkopf f r T tigkeit in der AFM Betriebsart Ein AFM NC AFM Tastkopf f r T tigkeit in AFM ber hrungsfreies AFM periodisch kontaktierendes AFM und MFM Betriebsarten ist zus tzlich erh ltlich Ein AFM LFM Tastkopf f r T tigkeit in AFM und LFM Betriebsarten ist zus tzlich erh ltlich Ein STM Werkzeugset f r T tigkeit in STM Betriebsart ist zus tzlich erh ltlich Beinhaltet einen Multitasktastkopf f r T tigkeit in den folgenden Betriebsarten ber hrendes ber hrungsfreies und periodisch kontaktierendes AFM MFM LFM und STM 5 um piezoelektrischer Scanner Maximale laterale Scannreichweite 5 um
5. 1 12 Chapter 1 AutoP robe CP Basics Working in the Windows 95 Environment This manual assumes that you are already familiar with the Windows 95 operating system If you are unfamiliar with Windows 95 learning the necessary basic skills does not take long For a quick tour of Windows 95 read Introducing Microsoft Windows 95 included with your Microsoft Windows bundle You will learn enough to proceed with the AutoProbe CP tutorials The following section describes conventions are used throughout this document Definitions Parts of a Screen To avoid possible confusion this section defines some of the terms used frequently in this manual to refer to windows and their features window image scan An application open on the desktop The front most window is the active window There are two main Data Acquisition windows and there are several Image Processing windows To switch between different windows click buttons on the window representing the various program modes The gray scale display of data and also a 3 dimensional rendition of data The data for each image are truly 3 dimensional containing height information for each x y location scanned All of the data associated with an image including measurement results and scan records Scanning also refers to the back and forth motion of the scanner as an image is acquired Figure 1 9 uses a portion of the Image mode window as am example to illustrate
6. CAUTION Any time that you load a cartridge or remove a cartridge it is very important to raise the probe head first If you don t raise the head the cantilever tip will scrape across the surface of the sample The sample and the tip will be damaged 1 Remove the probe cartridge from the probe head by grabbing the two prongs using one or two hands and sliding the cartridge out towards you as shown in Figure 2 12 Figure 2 12 Removing the cartridge from the probe head Loading a Probe 2 21 2 To remove the old chip carrier grab the ceramic plate by the edges and slide it wiggle it from under the spring clip You can place a chip carrier on a flat surface with the chip facing up Note To prevent the chip carrier from sliding around in a container secure the chip carrier to the container using a small piece of tape over a corner of the ceramic plate Or you can store a chip carrier in the original chip carrier box 3 To mount a new chip carrier on the cartridge using either your fingers or a pair of tweezers take out a new chip carrier from the box containing contact Ultralevers CAUTION Hold the chip carrier by the ceramic plate Don t let your fingers or the tweezers touch the microfabricated cantilever chip which is very fragile Touching the cantilever chip can damage or break off the tips 4 Take hold of the chip carrier using two fingers as shown in Figure 2 13 Orient the chip
7. XY Translation Stage Figure 2 6 Removing the probe head from the XY stage Removing and Installing the Probe Head 2 13 Set the probe head on a flat surface or back into its original box To reinstall the probe head do the following 1 Before you can remove the probe head the power to the probe head and the power to the laser inside the probe head must be turned off To turn the power to the probe head and the laser off do the following 1 deselect Head ON from the Mode menu or click the Head ON icon 7 and 2 turn the LASER ON OFF switch of the probe head to the OFF position 2 Slide the probe head onto the support arms of the XY stage The electrical connector on the head plugs into a connector mounted on the back of the support arms as shown in Figure 2 7 below electrical connectors XY Translation Stage Figure 2 7 Installing the probe head by sliding it onto the support arms of the XY stage The probe head is now installed Note If you have the standard configuration and install a different probe head you need to reconfigure the system software so that it is consistent with the new probe head This procedure is described in Chapter 3 2 14 Chapter 2 Setting Up to Take an Image Removing and Installing the Scanner This section describes how to remove and install the scanner The scanner is the component that rasters your sample beneath the probe tip during a scan and is depicted
8. WARNUNG Der durch das AutoProbe CP System versehene Schutz ist beeintr chtigt falls die in diesem Benutzerhandbuch beschriebenen Arbeitsabl ufe nicht genaustens befolgt werden Sicherheits Zeichen In Tabelle 0 1 sind die im Benutzerhandbuch und auf dem AutoProbe CP System vorkommenden Zeichen aufgelistet Sie sollten mit der Wirkung der Zeichen vertraut werden in welcher Weise sie mit der Betriebssicherheit des AutoProbe CP in Zusammnehang stehen Tabelle 0 1 Sicherheits Zeichen und ihre Wirkung Zeichen Wirkung Gleichstromquelle Wechselstromquelle Wechselstrom und Gleichstromquelle NY Dreiphasenstromquelle Erdungsanschluss D Schutzerdungsanschluss 777 Geh use oder Rahmenanschluss Y quipotentialanzeige Schaltet Stromversorgung ein xxiv Vorwort und bersicht Tabelle 0 1 Fortsetzung Sicherheits Zeichenund ihre Wirkung Zeichen Wirkung Schaltet Stromversorgung aus Bezeichnet doppelte oder verst rkte Isolierung des Ger tes ZN Weisst den Benutzer auf eine in der Dokumentation enthaltene Information hin A Zeigt eine Ber hrungsgefahr an Definitionen Warnung Vorsicht und Beachte Im Benutzerhandbuch werden drei verschiedene Bezeichnungen Warnung Vorsicht und Beachte benutzt um auf die Betriebssicherheit des AutoProbe CP hinzuweisen Diese Bezeichnungen sind in Tabelle 0 2 definiert Tabelle 0 2 Sicherheits Bezeichnungen und ihre De
9. A message box appears asking you if you would like to Abort Retry or Ignore Click the button to close the AutoProbe SPM Controller You may need to reboot your computer after an abnormal termination of ProScan Data Acquisition To reboot the computer you can do one of the following Press Ctrl Alt Delete simultaneously on your keyboard to restart the system Press the Reset button on the front of your computer Turn the computer off and then on using the OFF ON switch on the front of the computer unit Where to Go from Here 2 39 Where to Go from Here Now you should be familiar with the procedures for setting up the instrument to take an image You can move the probe in x y and z You can install a probe head and a scanner You can load a sample on the sample holder You can load a chip carrier and probe cartridge on the probe head You can use the instrument s optics You know how to align the deflection sensor At this point you can continue on with the next tutorial or You can end your session and come back to the instrument later You dont need to remove the probe cartridge If you like you may also leave your sample loaded on the sample holder The tutorial in the next chapter will show you how to configure the system software approach the sample and take an AFM image In Chapter 4 you will learn more about the controls of ProScan Data Acquisition software Chapte
10. L interrupteur on off du laser active ou d sactive le laser dans la t te du microscope Une lumi re rouge est allum e dans l interrupteur lorsque le laser est enclench Vis directrices du rayon laser Les deux vis directrices du rayon laser situ es sur le dessus droite de la t te du microscope sont utilis es pour ajuster la position du rayon laser touchant le cantilever Les vis bougent le spot du laser dans deux directions comme montr sur la Figure 0 1 ci dessus Si votre syst me inclus l option CP optique vous pouvez contr ler ces ajustements en utilisant la vue optique sur votre moniteur vid o Vis d ajustement PSPD y a deux vis PSPD sur la t te du microscope haut bas et avant arri re Ces vis ajustent la position du PSPD dans la t te du microscope pour centrer la lumi re du laser reflet e sur le photodetecteur La vis d ajustement avant arri re est utile pour l alignement PSPD sur la t te du microscope L ajustement haut bas est utile principalement pour la t te du microscope AFM LFM pour un syst me de configuration standard Indicateurs d intensit du laser Indique l intensit avec laquelle la lumi re refl t e du laser touche le PSPD photod tecteur sensible la position Pour une configuration standard il y a trois t tes de microscope AFM AFM NC AFM AFM LFM Il y a diff rents indicateurs pour les diff rentes t tes de microscope lil Preface and Overview Note La
11. Maximale verticale Scannreichweite 2 5 um Maximale Lateralresolution 0 0013 Maximale Verticalresolution 0 009 100 um piezoelectrischer Scanner Maximale laterale Scannreichweite 100 um Maximale verticale Scannreichweite 7 5 um Maximale Lateralresolution 0 25 Maximale Verticalresolution 0 025 xxxvi Vorwort und bersicht Mikroscopb hne Verschiebbarkeit Probengr sse Spitze zu Probe Einfahrt Optisches Mikroscop Akustische Isolation Arbeitsplatz AEM Computer Massenspeicher Software Graphik Systemspannungen Dimensionen und Gewicht CP Grundeinheit AEM Computer Betriebssumgebung Temperatur Luftfeuchtigkeit Reinigungsmittel CP Grundeinheit Messkopf AEM und computer 8 mm x 8 mm 50 mm w x 50 mm 1 x 25 mm h f r die Standardkonfiguration 50 mm w x 50 mm 1 x 20 mm h f r die Multitaskkonfiguration Automatisch mit 3 unabh ngigen Schrittmotoren Zus tzliches axiales Mikroscop mit Farbvideobildschirm zur Ansicht von Messf hlerspitze und Probe 5 1 Zoom bis zu 3 500X Vergr sserung Zus tzliche akustische Isolationskammer 20 bit DACS f r x y und z Achsen 16 bit DACs f r System berwachung 100 MHz Pentium Prozessor 256 Kbyte Cachespeicher 16 MB RAM 1 GB Hard Drive 3 1 2 in 1 4 MB Floppydisk Drive ProScan Data Acquisition und Image Processing arbeitets mit Windows 95 Windows Graphikbeschleuniger 17 in hochaufl sender F
12. The position of the laser spot on the PSPD can be monitored by viewing the laser position indicator which is the left hand column of three lights pictured in Figure 2 23 The center light is green and the upper and lower lights are red All three lights are digital If the laser is correctly positioned on the PSPD then the center green light will be on The upper and lower red lights indicate the adjustment direction for the PSPD 6 Look at the laser position indicator to see if the green light is lit If the green light is not lit then you need to adjust the position of the PSPD laser _ position indicators green OOO OOOO prism Figure 2 23 Laser position indicator Ta The controls for adjusting the position of the PSPD are pictured in Figure 2 24 Using the small allen wrench supplied with AutoProbe CP adjust the position of the PSPD forward backward adjustment screw until you see the green light You may also turn the PSPD forward backward adjustment screw by hand if you prefer When the lower red light is on turn clockwise When the upper red light is on turn counterclockwise Turn the screws until the green light is lit At the optimum position only the green light should be on 2 34 Chapter2 Setting Up to Take an Image O00 Figure 2 24 Adjusting the PSPD position using the PSPD adjustment screws Again only small adjustments should be needed si
13. ThermoMicroscopes sans d lai Sont exclus entre autre de cette garantie tout les consommables tels que Microlevers Ultralevers et les pointes STM La garantie des quipements vendus pour une utilisation en dehors des Etats Unis d pend des conditions de garantie sp cifi es lors de la vente Le mat riel qui aurait t soumis un mauvais traitement emploi un accident une catastrophe une utilisation inappropri e qui aurait subi des dommages provoqu s par un quipement non fournis avec le syst me une erreur d utilisation une modification une r paration ou installation non autoris e ne sont pas couverts par la garantie Garantie des pi ces remplac es ThermoMicroscopes garanti toutes les pi ces de remplacement pendant une dur e de 90 jours partir de la date de livraison contre les d fauts de mat riel ou de fabrication ThermoMicroscopes remplacera ou r parera selon sa d cision les pi ces renvoy es ThermoMicroscopes Le client doit demander l avance une autorisation d exp dition de mat riel ThermoMicroscopes RMA et suivre la proc dure ThermoMicroscopes d exp dition Exception faite aux conditions de garantie pr cit es le vendeur ne fourni aucune garantie de fa on formelle ou implicite et exclu d savoue express ment toutes formes de garantie se rapportant la marchandabilit ou l adaptation un usage particulier ThermoMicroscopes ne pourra en aucun cas tre design
14. and Note There are three terms that are used in this User s Guide to alert you to matters related to the operating safety of AutoProbe CP warning caution and note These terms are defined in Table 0 2 below Term Warning Caution Note Table 0 2 Safety terms and their definitions Definition Alerts you to possible serious injury unless procedures described in this User s Guide are followed exactly Do not proceed beyond a warning until conditions are fully understood and met Calls your attention to possible damage to the system or to the impairment of safety unless procedures described in this User s Guide are followed exactly Calls your attention to a rule that is to be followed or to an out of the ordinary condition It is important that you read all warnings cautions and notes in this manual carefully Warnings cautions and notes include information that when followed ensures the operating safety of your AutoProbe CP system Vil Summary of Warnings and Cautions This section includes warnings and cautions that must be followed whenever you operate AutoProbe CP WARNING AutoProbe CP must be properly grounded before you turn on the power to its components The mains power cord must only be inserted into an outlet with a protective earth ground contact See the section Grounding AutoProbe CP later in this preface for more information WARNING The line voltage selection mu
15. la terre Si vous n avez pas acc s une prise munie d une fiche de mise terre vous devez mettre AutoProbe CP la terre en utilisant la connection de mise terre de AEM La Figure 0 1 ci dessous montre ou est situ la connection de mise terre Ground connection Figure 0 1 Panneau arri re du AEM montrant l emplacement du connecteur de mise la terre xlix Configuration de la tension d alimentation Le choix de la tension d alimentation doit correspondre la tension d alimentation du pays o le syt me AutoProbe CP est utilis Le choix de la tension d alimentation se fait l aide d un s lecteur de tension Ce s lecteur est situ sur le panneau arri re du AEM Le s lecteur de la tension d alimentaion permet un choix parmi les tensions suivantes 100 V 120 V 220 V or 240 V Pour changer la tension d alimentation proc dez comme suit 1 Assurez vous que l interrupteur de soit d clench 25 Debranchez le cordon secteur de l AEM de prise d alimentation 3 Enlevez le couvercle du s lecteur de tension d alimentation en utilisant un tourne vis de taille appropri e 4 Ins rer un outil de taille appropri e dans la fente du s lecteur d alimentation et utiliser cet outil pour enlever le disque du s lecteur de tension Positionner le disque de s
16. with four hex head screws Using the appropriately sized allen wrench 3 32 loosen the four hex head screws at the corners of the scanner Turn the screws counterclockwise until they become loose When they are loose you will be able to lift the screws into a raised position as illustrated in Figure 2 9 below It is not necessary to remove the screws completely Figure 2 9 The scanner with four hex head screws loosened and in raised position Side fingerholds on scanner are indicated 4 The electrical connector on the front of the scanner plugs directly into the CP stage Carefully pry the scanner up using the fingerholds on the left and right sides of the scanner to disconnect the electrical connector from the CP stage You can also pry the scanner up very gently using a flathead screwdriver As a third alternative you can remove the scanner by carefully pulling the screws use two diagonally opposite screws CAUTION Do not allow the top of the scanner especially the sample holder to come into contact with another surface If the scanner hits another surface the scanner tube may break The electrical connector may fit snugly In this case pry the scanner up a little at a time 2 16 Chapter2 Setting Up to Take an Image 9 When the electrical connector inside the hole has been disengaged lift the scanner up and tilt it towards you to remove it from the CP stage 6 Store the scanner on its side in
17. you select Scan Config Configuration from the Setup menu Alternatively you can click the Scan Config icon to open the dialog box 256 x 256 image is selected by default In general a larger number of data points gives you higher lateral resolution than a smaller number of data points For example for the same scan size a512 x 512 image contains 64 times the number of data points as a 64 x 64 image and therefore has a higher lateral resolution However collecting a 512 x 512 image takes more time Note An efficient way to increase the lateral resolution of an image is to zoom in on a smaller region and then take a scan This increases the number of data points per scan size See the section Taking an Image at aNew Location in this chapter for details To select a number of data points do the following 1 From the Setup menu select Scan Config Alternatively click the Scan Config icon The Scan Configuration dialog box will open 2 Select anew number of data points by clicking the option button that corresponds to the number you want to use and then click the button to close the dialog box For example if you want to take a512 x 512 image click the 512 x 512 option button 3 To start a scan using the selected number of data points click the button Try taking images using several different numbers of data points to see what results 4 16 Chapter 4 Taking Better Images Taking an Image at a New Loca
18. 9 Take an image When the scan is finished the image is automatically saved on your hard disk and displayed in the Image Gallery 4 24 Chapter 4 Taking Better Images Taking High Resolution Topography Images The Topography signal referred to in Chapter 3 of this manual Taking an AFM Image is actually the output of the feedback loop When the gain parameter is set to a moderate or high value the output of the feedback loop varies in order to minimize the Error signal The Topography signal is thus an approximation of sample topography AutoProbe CP uses 20 bit DACs for sending the output of the feedback loop to the scanner so the voltage can be expressed as a 20 bit number which has 220 possible values The total range of motion of the scanner in the z direction can therefore be divided into 220 digitized steps However the image file format used by ProScan software can only accommodate 16 bit numbers to represent height data Therefore the total contrast range of the image produced using the Topography signal has only 216 possible values This means that ProScan cannot save the Topography signal data in its original form with 220 possible values When the Topography signal is used the system drops the four least significant bits of data from the output of the Z feedback This process is roughly analogous to recording measurements taken in millimeters as lengths in centimeters to avoid writing out more digits for each r
19. AutoProbe CP instrument has built in vibration isolation moving the instrument using the micrometers creates damping effects These effects stop when you stop moving the micrometers 6 When you have moved the cantilever to the center of the field of view adjust the fine focus using the small focusing knob on the end of the swing arm Adjust the focus until the cantilever is clearly visible Note If you have a 20X or 50X objective lens in addition to a 10X objective lens follow the instructions of Figure 2 18 to change the lens You are now ready to align the deflection sensor Skip to the section Aligning the Deflection Sensor which describes this procedure 2 28 Chapter2 Setting Up to Take an Image KL b LE Figure 2 18 Instructions for changing the objective lens for the CP Optics Using the Separate Optical Microscope These procedures assume that the separate optical microscope is properly assembled and that you are using the fiberoptic light source supplied with it This section also assumes that a probe head a chip carrier and a sample are already loaded focus Na adjustment ng N objective lens Tr forward U backward positioning adjustment clamps fiberoptic optical light source microscope Figure 2 19 Separate optical microscope and fiberoptic light source standard with AutoProbe CP Using the Optical View 2 29 To focus
20. Deflection Sensor describes this procedure 2 30 Chapter 2 Setting Up to Take an Image Aligning the Deflection Sensor Aligning the deflection sensor means first steering the laser beam so that it reflects off of the back of the cantilever and then moving the position sensitive photodetector PSPD so that it is aligned with the laser spot This section describes how to align the deflection sensor It includes two subsections The AFM Probe Head and The Multitask Probe Head The AFM Probe Head describes how to align deflection sensor for AFM probe head for the standard configuration The Multitask Probe Head describes how to align the deflection sensor for the multitask configuration Note For the standard configuration procedures are similar for an AFM NC AFM or an AFM LFM probe head However the laser position and intensity indicators for all three types of probe heads are different The procedures for aligning the deflection sensor for an AFM NC AFM or an AFM LFM probe head are included in Part II of this User s Guide Learning to Use AutoProbe CP Advanced Techniques WARNING Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous laser light exposure Aligning the Deflection Sensor 2 31 How does the deflection sensor work The deflection sensor works by reflecting a laser beam off the back of the cantilever onto a position sensitive photodetector
21. MHz Pentium processor 256 Kbyte cache memory 16 MB RAM 1 GB hard drive 3 1 2 in 1 4 MB floppy disk drive ProScan Data Acquisition and Image Processing operates under Windows 95 Windows graphics accelerator 17 in high resolution color monitor 115 230 V AC 50 60 Hz 600 W 10 5 in 267 mm x 8 in 203 mm 22 Ib 10 kg 17 in 432 mm x 7 1 2 in 191 mm x 17 1 2 in 445 mm 43 Ib 20 kg 17 in 432 mm x 7 1 2 in 191 mm x 17 1 2 in 445 mm 27 Ib 12 kg 0 C to 30 C 32 F to 112 F 90 noncondensing Isopropyl alcohol Isopropyl alcohol Isopropyl alcohol WARNING To avoid risk of electric shock do not clean AutoProbe CP system components when power to the components is turned on CAUTION Do not use acetone to clean AutoProbe CP system components Acetone may damage important safety warning labels xvii ThermoMicroscopes Warranty Statement Warranty on New Systems and Accessories ThermoMicroscopes warrants to the original purchaser of the equipment that the equipment will be free from defects in material and workmanship for a period of one year from date of delivery ThermoMicroscopes agrees as its sole responsibility under this limited warranty that it will replace or repair at its option the warranted equipment at no charge to the purchaser and will perform services either at ThermoMicroscopes s facility or at the customers facility at ThermoMicroscopes s option For
22. Now change the fast scan direction by clicking the Y option button When the Y option button is selected the y direction is the fast scan direction 4 To adjust the slope in the y direction enter a new value from 1 to 1 arbitrary units scaled with the x y and z ranges of scanner motion in the Slope scrollbox Or use the scrollbox arrows to scroll through a range of values Watch the signal trace on the Oscilloscope Display and continue adjusting until the signal trace is no longer tilted Note In order to adjust the slope in either the x or y direction you must first make that direction the fast scan direction You can compensate for a diagonally slanted sample by adjusting the slope parameter for both the x and y fast scan directions 5 If desired switch the fast scan direction back to the x direction by clicking the X option button 6 To start a new scan click the button 4 10 Chapter 4 Taking Better Images If you saw a lot of slope in the before image your after image should now look better less tilted Note There are several ways to compensate for sample slope Adjusting the slope value can remove slight tilt before a scan is started Another way to remove tilt is to turn on Auto Flat in the Input Configuration dialog box In general Auto Flat should be turned on unless the actual slope of the surface is important in your results analysis For more information about the Auto Flat feature see the sec
23. PSPD This technique is known as beam bounce detection As the cantilever bends the position of the laser spot on the PSPD shifts The shift in position gives a measure of how much the cantilever has been deflected laser diode cantilever feedback loop Image zn fe ____ PZT scanner Figure 2 21 The components of the deflection sensor in the probe head For proper alignment of the sensor two conditions must be met The intensity of the reflected laser beam hitting the PSPD must be above a certain level For maximum intensity the laser beam must hit the correct spot on the back of the cantilever tip The reflected laser beam must be centered on the PSPD To center the laser spot the PSPD must be correctly positioned 2 32 Chapter2 Setting Up to Take an Image The AFM Probe Head To align the deflection sensor for the AFM probe head follow these steps 1 Make sure that the power to the probe head is on If the power to the probe head is turned off turn it on by clicking the Head ON icon 7 If the LASER ON OFF switch is in the OFF position turn it to the ON position 2 Focus on the cantilever using the optical view as described in the section Using the Optical View earlier in this chapter 3 If the laser beam is not reflecting off the back of the cantilever tip then you need to adjust the position of the laser beam The controls for adjusting the laser be
24. The computer on off switch is located on the front panel of the computer unit The computer monitor on off button is located on the front of the monitor below the screen When you start the computer you automatically enter the Windows desktop 4 Open ProScan Data Acquisition From Start point to the Program folder and select ThermoMicroscopes ProScan Then click the Data Acquisition icon Alternatively double click the Data Acquisition icon in the desktop When ProScan Data Acquisition first opens you will see Move mode as shown in Figure 2 2 below The controls unique to Move mode are located on the left side of the window and the other controls are shared with Image mode ProScan HI SPS INSTR CP OFF EC AFM HDM AFMSTM HD 100UM SCN GENERIC BBC olx File Edit Mode View Setup Tools Help alle HE 0 50 t Go to Approach Z um 0 Tilt down Pitch down Zm E Left Right Back Front Optics H View On Off 2 um div 15 14 13 512 buffer lines allocated Press F1 for Help dx 10 000 dy 10 000 dz 0
25. and data analysis results The User s Guide to AutoProbe CP will lead you through these steps beginning with Part I Learning to Use AutoProbe CP Basic Imaging Techniques Note Throughout this chapter the drawings refer to the AFM probe head for the standard system configuration of AutoProbe CP System Components System Components AutoProbe CP comes in two system configurations standard and multitask The only difference between the components of the two system configurations is the probe head and its imaging capabilities The principal and optional components are the same The AutoProbe CP system consists of three principal components AutoProbe CP instrument AutoProbe electronics module AEM a computer its monitor and its keyboard Figure 1 1 shows the above listed system components computer 7 i monitor Le JE AutoProbe CP Figure 1 1 AutoProbe CP system components PI AEM a The AutoProbe CP system offers three optional components optical microscope and fiberoptic light source on axis optical microscope and a color video monitor acoustic isolation chamber 1 3 1 4 Chapter 1 AutoP robe CP Basics Figure 1 2 depicts the optional components video optical fiberoptic oe microscope light source CP Optics acoustic isolation chamber Figure 1 2 Optional comp
26. arrow to display a list of items and then you can select an item from the list A small box on the screen where you type in text You can enter a comment or you can enter a number that represents a new parameter value 1 14 Chapter 1 AutoProbe CP Basics checkbox A small box on the screen that can be either selected filled with a check mark or deselected empty You click the checkbox to toggle between these two states option button A circular button on the screen that can either be selected filled with a black dot or deselected not filled with a black dot You click the option button to toggle between these two states Special to Windows 95 taskbar A bar usually at the bottom of the screen containing the Start button and buttons for open applications Start button A button on the taskbar Clicking the Start button opens the Start menu Chapter 2 Setting Up to Take an Image 2 2 Chapter 2 Setting Up to Take an Image Introduction This chapter shows you how to set up the hardware of AutoProbe CP to take an AFM image Specifically you will learn about the following procedures connecting cables starting AutoProbe CP removing and installing a probe head removing and installing a scanner loading a sample loading a prealigned chip carrier aligning the deflection sensor This chapter is the first of three tutorial chapters that give you the basic knowledge you need to take
27. carrier with the cantilever chip facing up and the chip pointing towards you as shown Be careful not to touch the chip Figure 2 13 One hand holding the cartridge and the other holding a chip carrier The chip carrier has three slots in it arranged in a triangle These three slots fit over three balls on the cartridge mount A spring clip on the cartridge will hold the slots securely against the balls 5 Pick up the cartridge with your other hand and hold it as shown in Figure 2 13 2 22 Chapter2 Setting Up to Take an Image 6 Using the procedure illustrated in Figure 2 14 insert the chip carrier under the lip of the spring clip Use either a flat edge or a corner of the ceramic plate to force the spring clip open Then slide the chip carrier under the spring clip until you feel the balls engage the slots Wiggle the chip carrier from side to side to ensure that all three balls fit snugly 3 balls cantilever chip chip carrier spring clip cartridge 1 Chip carrier in 7 position to install 2 Insertthe chip carrier under 7 the 11 of the spring clip Push the chip carrier further 7 opening the clip 4 Insert the chip carrier until you feel the balls engage all three slots Figure 2 14 Procedure for inserting the chip carrier under the spring clip Loading a Probe 2 23 A correctly installed chip carrier is shown in Figure 2 15 below clip
28. check that the A B signal representing the position of the PSPD is optimized The position of the PSPD is optimized when the A B signal is less than 300 mV To check the A B signal follow these steps 1 Open a DVM by clicking the DVM icon 2 Click the button on the DVM to see a selection of channels or signals and select A B The display of the DVM will show the value of the A B signal given in volts or millivolts depending on the value 3 Adjust the PSPD forward backward screw and or laser beam steering screws to move the laser until the value of the A B signal is greater than 1 V 4 Close the and click the button The approach should work Taking an AFM Image 3 9 Taking an AFM Image You are ready to take an AFM image using AutoProbe CP 1 If you have not already done so place the cover over the instrument Covering or closing the instrument helps block acoustic and electrical noise CAUTION It is recommended that you place the metal cover on the CP base unit while imaging as this preserves EMC immunity 2 Switch to Image mode now by clicking the Image Mode icon The Image mode window is shown in Figure 3 1 below ProScan HI SPS INSTR CP OFF EC AFM HDM AFMSTM HD 100UM SCN GENERIC BBC aOlx File Edit Mode View Setup Tools Help eo Er EN or 5707 2
29. clicking the Zm A button As you Zoom in the units per division of the display panel change 4 Zoom back out again by successively clicking the Zm V button Next you will select a region in the image for a follow up scan To select a region for the next scan you vary the dimensions of the green cursor box and then drag it to a new location in the image as shown in Figure 4 5 5 To change the size of the green cursor box position the cursor near any corner of the green cursor box The cursor will change to a bi directional arrow N or 7 Click and drag the corner until you reach the desired scan size Select a scan size that lies within the displayed image 4 18 Chapter 4 Taking Better Images Import New size and location next image Size and location of previous image 20um div Figure 4 5 Changing the size and location of the green cursor box After you resize the green cursor box the new scan size is displayed in the Size textbox 6 To drag the green cursor box to a new location position the cursor near the center of the green cursor box The cursor will change to a four way arrow Click and drag the green cursor box until you reach the desired scan location Position the green cursor box within the displayed image After you reposition the green cursor box the scanner coordinates displayed
30. comme responsable des pertes ou dommages indirects directs ou cons cutifs survenus lors d une utilisation ou d une immobilisation de produits services pi ces fournitures ou quipement ThermoMicroscopes sera galement d gag de toutes responsabilit s vis vis de la loi lix incluant mais sans s y limiter aux pertes de profits retards mauvaise volont dommage et toutes sortes de co ts de r cup ration reprogrammation ou reproduction des programmes ou informations contenues ou utilis es avec les produits ThermoMicroscopes Certains tats n admettent pas de limitation dans le temps de garanties implicites et ou l exclusion ou la limitation d incidents ou de dommages sp ciaux Dans ce cas les limitations et ou exclusions pr cit es ne vous concernent pas Ces garanties vous donnent des droits sp ciaux et vous pouvez galement tre soumis d autres droits qui peuvent varier d un tat l autre Information du fabricant Toutes les questions relatives au service devront tre address es votre representant ThermoMicroscopes local ThermoMicroscopes USA ThermoMicroscopes USA 1171 Borregas Avenue 6 Denny Road No 109 Sunnyvale CA 94089 Wilmington DE 19809 T 408 747 1600 T 302 762 2245 F 408 747 1601 F 302 762 2847 ThermoMicroscopes SA ThermoMicroscopes Korea 16 rue Alexandre Gavard Suite 301 Seowon Building 1227 CAROUGE 395 13 Seokyo dong Mapo ku Geneva Swit
31. computer monitor cable to the computer monitor connector on the back panel of the computer unit 3 Connect the 50 pin ISA bus extender cable between the connector labeled 50 pin ISA bus on the back panel of the computer unit and the connector labeled 50 pin ISA bus on the back panel ofthe AEM This connects the computer unit to the AEM 4 Connect the 44 pin 1 cable between the connector labeled 44 pin on the back panel of the AEM to the connector labeled 44 pin I O Cable on the back panel of the AutoProbe CP instrument The 44 pin I O cable carries low voltage signals for instance the set point to the AutoProbe CP instrument 5 Connect the 17 pin high voltage cable between the connector labeled 17 pin HV on the back panel of the AEM to the connector labeled 17 pin High Voltage Cable on the back panel of the AutoProbe CP instrument The 17 pin high voltage cable carries high voltage signals that are applied to the piezoelectric scanner 6 Connect the 62 pin stepper motor cable between the connector labeled 62 pin on the back panel of the AEM to the connector labeled 62 pin Stepmotor Cable on the back panel of the AutoProbe CP instrument The 62 pin stepper motor cables carries low voltage signals to the Z stage Cable Connections 2 5 7 If you have the multitask configuration or the standard configuration with the optional AFM NC AFM probe head connect a BNC cable from the connector labeled NC Synthesizer Card on the back p
32. des diff rentes parties list es ci dessus est d crit en d tails dans la section ci dessous Partie I Apprendre utiliser l AutoProbe CP Techniques d imagerie de base La partie I de ce guide de l utilisateur Apprendre utiliser l AutoProbe CP Techniques d imagerie de base contient un chapitre d introduction et trois formations pratiques les chapitres 2 4 En travaillant sur les formations pratiques tout au long de ces chapitres vous allez apprendre les bases dont vous aurez besoin pour faire fonctionner l instrument et obtenir des images AFM Commencez par lire le Chapitre 1 Les bases de l AutoProbe CP comme introduction aux configurations et composants du syst me AutoProbe CP Puis travaillez sur la formation pratique du Chapitre 2 Faire fonctionner le syst me pour obtenir une image afin d apprendre comment configurer le syst me logiciel et mat riel en mode AFM De fa on pr cise vous allez apprendre des proc dures pour connecter les c bles enlever et installer une t te de microscope et un scanner et charger un chantillon Chapter 3 Acquisition d un image AFM vous guide tout au long de la configuration du logiciel durant l approche de l chantillon et pour prendre une image AFM Chapter 4 Obtenir de meilleures images vous apprend optimiser les param tres de balayages et de feedback afin de prendre des images de meilleure qualit et comment les sauvegarder e
33. die Orte der Lasersicherheitskennzeichnungen der Srahlen ffnungskennzeichnungen und der bereinstimmungskennzeichnungen angezeigt xxx Vorwort und bersicht indicators green Die Steuerungen und Anzeigen bezeichnet in Bild 0 3 oben haben folgende Funktionen Laser power on off switch Schaltet den Laser des Tastkopfes ein oder aus Ein rotes Licht laser intensity indicators laser position Ub V7 prism ED PA up down PSPD forward backward AVOID EXPOSURE LASER LIGHT IS EMITTED FROM THIS APERTURE ee G7 amp laser power on off switch laser beam steering screws ID I 7 SE PER EN60825 1 1994 video display X CAUTION LASER LIGHT DO NOT STARE INTO 0 2 mW AT 600 700 nm CLASS II LASER PRODUCT BILD 0 3 Ort der Lasersteuerung des Tastkopfes im Schalter leuchtet auf falls der Laser eingescchaltet ist Laser beam steering screws Die zwei Laserstrahl Steuerungsschrauben welche sich oben and der rechten Seite des Tastkopfes befinden dienen zur justierung der Position des Aufteffpunktes des Laserstrahles auf den Balken Die Schrauben bewegen den Laserpunkt in zwei Richtungen wie in Bild 0 3 oben gezeigt wird Falls ihr System die zus tzliche CP Optics enth lt k nnen sie diese Justierung berwachen indem sie die optische Ansicht auf ihrem Videobildschirm darstellen PSPD adjustment
34. different parts of the screen dialog box box button scrollbar scrollbox listbox textbox Working in the Windows 95 Environment 1 13 2 Im AC 2 um button HTF Topography 4 FTALE listbox option button ______ e P Slope x Oy Repeat Scan OFF Image Size um _ X offset Y offset t textbox Rate Hz Set P nN Gain scrollbox Mzsero checkbox Figure 1 9 Parts of a screen A special window accessed by using an icon or menu A dialog box allows you to alter values and parameters when using ProScan A section of a dialog box or window usually with a label and containing a list of items A labeled area on a computer screen usually in a window or taskbar Clicking a button performs the labeled command A strip alongside a bordered section of a window The strip is terminated on both ends by arrows that can be used to scroll through items in the bordered section A slider bar inside the strip can be dragged along the strip to scroll through the items as well A small box on the screen with an up and a down arrow at one end You can either type numbers in the box or use the arrows to scroll through numerical values A box on the screen with a down arrow at one end You can click the down
35. green cursor box at the center of the Import View will enclose the imported image The imported image won t completely fill the display The labeled components of the Import View are shown in Figure 4 4 below Taking an Image ata New Location 4 17 Imports an image from the Image Gallery to Import View 4 Zooms in on the image Import in the cursor M Toms m IwZooms out of the 1 in the cursor box Total lateral range of gt Scanner motion The cursor box shows _ the scan size and the scan location for a follow up scan 20 um 20um div 20 um Figure 4 4 The Import View The Import View can show up to a 5 um range of motion for the standard configuration s 5 um scanner or a 100 um range of motion for the multitask configuration s 100 um scanner The units per division of the Import View are indicated in the lower left corner ofthe display The size of a displayed image is proportional to its scan size and the position of a displayed image corresponds to its scanner coordinates which represent scan location The scanner coordinates are referenced to the scanner s undeflected or home position You can zoom in or out on the image in the Import View by clicking the Zm A or Zm button to the left of the display respectively 3 Zoom in on the scanner s range now by first clicking the button and then successively
36. imported from the Image Gallery and then to select a scan size and scanner coordinates scan location for a follow up scan In this tutorial you will learn how to import an image from the Image Gallery into the Import View and how to select a scan size and scanner coordinates using a green cursor box in the Import View Image Gallery The Image Gallery displays newly acquired images By default those images are saved on your hard disk Previously saved images can also be loaded to the Image Gallery for comparison with new images In this tutorial you will learn how to save delete and retrieve image files Saving only the most useful images will save disk space since each image contains a large amount of data This tutorial is meant to give you an overview of these screen controls It introduces the most important features and shows you how to use them For more detailed information about specific screen controls consult Part III Software Reference of this User s Guide The first chapter of the Software Reference manual ProScan Data Acquisition describes each feature of the screen individually and gives you a more detailed description of how each feature works Adjusting Scan Parameters 4 5 Adjusting Scan Parameters In this section you will learn how to adjust scan parameters such as scan size and scan rate You will also learn how to change the scan direction and how to compensate for a slightly tilted sample by adjusting
37. in Figure 2 8 below scanner tube directly underneath Figure 2 8 The scanner The size of the scanner depends on your system configuration Note the following differences 5 Um scanner is standard with the standard configuration 100 um scanner is standard with the multitask configuration The scanner fits into the hole in the center of the stage beneath the probe head The electrical connector on one side of the scanner plugs into a hole in the stage Inside the scanner housing is a piezoelectric ceramic tube The sample holder is attached to the top of this tube Voltages applied to the piezoelectric tube cause it to bend and the back and forth bending motion moves the sample in a raster pattern under the probe tip CAUTION The scanner is extremely fragile The piezoelectric ceramic tube inside can easily break under mechanical shock Use extreme care when handling the scanner Do not apply any pressure to the sample holder on the top surface of the scanner or the scanner tube may break Removing and Installing the Scanner 2 15 To remove the scanner do the following 1 Remove the probe head as described in the previous section Removing and Installing the Probe Head Be sure to turn off the power to the probe head before removing it 5 If sample is already loaded remove it from the sample holder 3 The scanner fits into a hole in the center of the CP stage The scanner is secured
38. lection de tension enlev pr cedemment sur la tension de ligne appropri e 100V 110V 220V ou 240V 6 Remettre le disque de s lection de tension en place dans l unit Assurez vous que la tension de ligne d sir e apparait dans la fen tre 7 Installer le cap t sur le s lecteur de tension de ligne La tension d alimentation devrait a pr sent tre s lectionn e a la valeur appropri e Preface and Overview Recommandations l usage du laser Note Tout au long de cette section les sch mas se r f rent la t te du microscope AFM pour la configuration standard du syst me AutoProbe CP sauf notifications contraires L AutoProbe CP contient une diode laser aliment e par une basse tension avec une puissance maximum de 0 2mW CW d une longeur d onde de 600 700nm La diode laser aliment e jusqu 0 2mW 600 700nm doit tre accessible l int rieur L AutoProbe CP doit toujours fonctionner avec la t te du microscope correctement install e ATTENTION Les contr les les ajustements et l ex cution de proc dures autres que ceux sp cifi s ici peuvent provoquer une exposition dangereuse aux rayons laser Figure 0 2 Montre les deux tiquettes d avertissement propos du laser de la t te du microscope Il est recommand de respecter rigoureusement les tiquettes d avertissement sur le laser CAUTION LASER LIGHT DO NOT STARE INTO K 0 2 mW AT 6
39. position x et y donn e sur la surface de l chantillon en utilisant le traceur X Y de ProScan Data Acquisition Une courbe force distance est un relev de la force verticale que la pointe applique au levier en fonction de la distance pointe chantillon Les variations de la courbe fournissent des informations concernant les propriet s locales d lasticit la surface de l chantillon Le chapitre 5 Spectroscopie I V vous apprend utiliser la fen tre Spectroscopie I V de ProScan Data Acquisition pour g n rer des courbes courant tension I V et des courbes dI dV Ces courbes fournissent des informations importantes concernant les propri t s lectroniques de la surface Le chapitre 6 calibration du scanner d crit comment le scanner de votre systeme AutoProbe CP fonctionne et comment le calibrer afin de maintenir ses performances optimales Partie Ill R ferences du logiciel La partie III de ce guide de l utilisateur References du logiciel est un manuel de r f rence pour ProScan Data Acquisition and Image Processing et comprend des informations pour les systemes AutoProbe suivant CP LS et M5 Les chapitres de cette partie du guide de l utilisateur vous donnent des informations plus d taill es sur certaines caract ristiques et contr les les informations qui vous sont donn es dans les chapitres de formation pratique Les chapitres sont congus de telle sorte que vous pui
40. t te de microscope AFM est comprise dans la configuration standard du systeme Les t tes de microscope AFM NC AFM et AFM LFM peuvent tre achet es s par ment Les indicateurs de la t te AFM sont montr s dans la Figure 0 3 ci dessus Pour cette t te de microscope l intensit de la lumi re du laser touchant le PSPD est maximis lorsque la colonne de quatre Leds rouge est allum e Les indicateurs des t tes de microscope AFM NC AFM et AFM LFM sont montr s dans la Figure 0 4 ci dessous Pour ces t tes de microscope lorsque la brillance du centre de la Led verte qui a une brillance variable est maximis e l intensit du laser touchant le PSPD est maximis laser intensity and position indicators for other probe heads AFM NC AFM AFM LFM probe heads probe heads O green analog analog for variable for variable brightness brightness Figure 0 4 Intensit du laser et indicateurs de position de la t te de microscope AFM NC AFM et de la t te de microscope AFM LFM d une configuration de syst me standard Pour la configuration multitask lorsque la brillance du centre de la lumi re qui a une brillance variable est maximis e l intensit du laser touchant le PSPD est maximis Voir Figure 0 5 ci dessous Recommandations l usage du laser liii Multitask probe heads analog for variable brightness Figure 0 5 Intensite du laser e
41. textbox and then click the button to close the dialog box 15 Expand the display of the image by clicking the zoom button above the image Reduce the display of the image by clicking the button again 16 Increase the contrast of the image by clicking the button Decrease the contrast by clicking the B button Changes you make to the contrast will be saved if you click the button to exit the View dialog box They will not be saved if you click the button to exit 17 Click either or to exit the View dialog box Where to Go from Here 4 33 Where to Go from Here Now you should be familiar with the main features of ProScan Data Acquisition and how to use them You are familiar with the scan parameters and know how to adjust them You know the basics of how the z feedback loop operates and can optimize feedback parameters You can select an image size You can use the Import View to position a follow up scan You know how to use low voltage mode and the Topo x 16 signal channel to take higher resolution images You know how to save delete and retrieve images At this point you can practice exploring the sample and taking images under different scan conditions Or you can go to Part II of this User s Guide and learn about advanced techniques If you are interested in learning about a specific software control refer to Chapter 1 of the Software Reference manual ProScan Data Acquisition If you d like you ca
42. the AFM position This configures the probe head for operation in contact AFM mode For contact AFM mode the LFM NC AFM switch must be set to the LFM position 3 Focus on the cantilever using the optical view as described in the section Using the Optical View earlier in this chapter 4 If the laser beam is not reflecting off the back of the cantilever tip then you need to adjust the position of the laser beam The controls for adjusting the laser beam position are pictured in Figure 2 25 LFM AFM video display NC AFM STM a laser beam steering screws 9 lt amp Figure 2 25 Aligning the laser spot on the end of the cantilever To steer the laser spot adjust the laser beam steering screws Figure 2 25 shows the direction the laser spot moves when you turn the laser beam steering screws You may need to turn both screws at the same time Move the laser until you can see ared reflected spot on the back of the cantilever tip 2 36 Chapter2 Setting Up to Take an Image After you have aligned the laser spot on the end of the cantilever you no longer need to move the laser beam Now you are ready to move the PSPD so that its center is aligned with the laser spot 5 Adjust the position of the PSPD to align the laser spot with the center of the PSPD The laser position indicator has five lights Four lights are red and one light is g
43. the optical microscope on the probe tip complete the following steps 1 Position the fiberoptic light source so that it shines directly down on the sample about 2 to 3 inches above the sample surface 2 If your AutoProbe CP is in an acoustic isolation chamber you may need to set the optical microscope on top of a book or two to compensate for the additional height of the acoustic isolation chamber 3 Position the optical microscope so that the lens points at approximately 45 relative to the sample by adjusting the four positioning clamps 4 Move the objective lens forward or backward along its length of travel using the two large adjustment knobs on either side of the microscope body You should see the cantilever chip and two triangularly shaped cantilevers near the center of the field of view 5 If necessary shift the base of the microscope so that the cantilever chip is near the center of the field of view Figure 2 20 below shows a 45 view of the cantilever chip with the cantilever chip reflected off the sample surface Figure 2 20 45 view of cantilever chip and reflection of the chip in the sample surface 6 When the cantilever chip is in the center of the field of view adjust the focus up or down by rotating the housing of the objective lens Adjust the focus so that the cantilever is clearly visible You are now ready to align the deflection sensor The next section Aligning the
44. the padded wooden box originally supplied To install the scanner with no probe head currently installed do the following 1 If the four hex head screws supplied with the scanner are not already inserted and in the raised position insert the four screws now 2 Orient the scanner so that the electrical connector and the label face towards you and insert it into the hole of the CP stage There is only one correct fit The scanner should fit snugly 3 Tighten the four hex head screws supplied with the scanner using the 3 32 allen wrench supplied until the scanner fits securely into the hole 4 Install the probe head as described in the previous section Removing and Installing the Probe Head The scanner is now installed Note If you have changed any of the following items make sure to reconfigure the system software so that it is consistent with the new hardware the probe head for the standard configuration the position of the AFM STM or LFM NC AFM switches for the multitask configuration the scanner for all configurations This procedure is described in Chapter 3 Loading a Sample 2 17 Loading a Sample This section explains how to load a sample The assumption here is that you are starting from scratch with no sample loaded These step by step instructions also apply when you want to change a sample that is already loaded To load a sample you must first move the probe head to provide acces
45. the rear of the head plugs into a connector mounted on the rear of the translation stage To remove the probe head do the following 1 Before you can remove the probe head the power to the probe head and the power to the laser inside the probe head must be turned off To turn the power to the probe head and the laser off do the following 1 deselect Head ON from the Mode menu or click the Head ON icon 7 and 2 turn the LASER ON OFF switch of the probe head to the OFF position 2 Use the z direction pad to raise the Z stage providing ample clearance between the probe and the sample for removing the probe head Note If you are using AutoProbe CP with CP Optics move the objective lens out of the way of the probe head by rotating the swing arm towards you before you raise the Z stage 3 there is a probe cartridge installed in the probe head remove it now by grabbing the two prongs using one or two hands and sliding the cartridge out towards you as shown in Figure 2 5 2 12 Chapter 2 Setting Up to Take an Image Figure 2 5 Removing the cartridge from the probe head Set the probe cartridge on a flat surface with the cantilever facing upwards 4 Remove the probe head by sliding it off the support arms of the XY stage as shown in Figure 2 6 As you slide the head off the XY stage the electrical connector on the back of the probe head will become disengaged electrical connectors
46. the slope in the x and y directions The controls for scan parameters are located in the Scan and Feedback Control sections of Image mode as illustrated in Figure 4 1 Before adjusting these scan parameters you need to perform an auto approach and take an image 1 Switch to Move mode by either selecting Move Mode from the Mode menu or clicking the Move Mode icon lt 2 Perform an auto approach as described in Chapter 3 3 Switch to Image mode by either selecting Image Mode from the Mode menu or clicking the Image Mode icon Y 4 Click the button to take an image You are now ready to practice adjusting scan parameters Adjusting the Scan Size The scan size refers to the scan width Since all scans are square you only need to enter the scan width to set the scan size for a scan The scan size you choose depends entirely on what features you want to see in an image and of course on the size of your scanner Note the following differences between the standard and the multitask configurations For the standard configuration s 5 um scanner the maximum scan size is 5 um When you use a um grating a scan size of around 5 um will allow you to see about 5 lines of grating With a scan size of 1 um you may only see one line of grating For the multitask configuration s 100 um scanner the maximum scan size is 100 um When you use the 10 um grating a scan size of around 30 um will allow y
47. voltage selection is made using a line voltage selector The line voltage selector unit is located on the rear panel of the AEM The line voltage can be set to the following voltages 100 V 120 V 220 V or 240 V To change the line voltage selection follow these steps 1 Make sure the power to the AEM is turned off 2 Unplug power cord from the power outlet 3 Remove the cover of the line voltage selector unit using an appropriately sized screwdriver 4 Insert an appropriately sized tool into the line voltage selector slot and use the tool to remove the line voltage selector wheel from the unit 5 Set the line voltage on the line voltage selector wheel to the desired value 100 V 110 V 220 V or 240 V 6 Put the line voltage selector wheel back into its location in the unit Make sure that the desired voltage is shown in the window 7 Install the cover onto the line voltage selector unit The line voltage should now be set to the appropriate value Xi Laser Safety Note Throughout this section the drawings refer to the AFM probe head for the standard system configuration of AutoProbe CP unless otherwise noted AutoProbe CP contains a diode laser powered by a low voltage supply with a maximum output of 0 2 mW CW in the wavelength range 600 to 700 nm Diode laser power up to 0 2 mW at 600 to 700 nm could be accessible in the interior AutoProbe CP should always be operated with the probe head prope
48. 0 000 Figure 2 2 The Move mode window of the ProScan Data Acquisition screen Starting AutoP robe CP 2 7 The different sections of the ProScan Data Acquisition screen are labeled in Figure 2 3 500 nm Title bar Menu bar Toolbar LH KSSSE AFMSTM HD 100UM SCNGENERIC BEC EEK Fr A Active Display Move 1 mode mage gallery Import View Import Zm amp Approach Message log 0 Tilt down Pitch down Status bar Right Back Front 2 um div Figure 2 3 Sections of the ProScan Data Acquisition screen Move mode controls allow you to turn on and off the optics light move the Z stage which moves the probe up and down in the z direction and perform an auto approach CAUTION Improper use of the controls in Move mode can result in severe damage to your instrument For instance you can ruin the probe tip damage the sample and break the scanner tube Before you use these controls complete the tutorials in Part I of this User s Guide In these tutorials you learn how to use Move mode controls You can also refer to Part III Software Reference of this User s Guid
49. 00 700 nm CLASS II LASER PRODUCT CLASS 2 PER EN60825 1 1994 Figure 0 2 Etiquettes d avertissement propos du laser de la t te du microscope L tiquette d avertissement de gauche dans la Figure 0 2 ci dessus sp cifie que la t te du microscope est un laser de Classe II selon 21 CFR 1040 10 et 1040 11 L tiquette d avertissement de gauche dans la Figure 0 2 ci dessus sp cifie que la t te du microscope est un laser de Classe II selon EN60825 Les figures 0 3 0 7 ci dessous montrent l emplacement de tout les instruments de contr le et indicateurs se rapportant aux op rations effectu es avec le laser du syst me AutoProbe CP Ils montrent galement l emplacement de toutes les tiquettes d avertissements sur le laser d orifices et de conformit Recommandations l usage du laser li laser power laser laser on off switch position intensity N video display V indicators indicators N laser beam steering screws ds Ly green PSPD u Pa up down PSPD a CAUTION LASER LIGHT DO NOT STARE INTO BEAM 0 2 mW AT 600 700 nm CLASS II LASER PRODUCT AVOID EXPOSURE LASER LIGHT IS EMITTED FROM THIS APERTURE gt EN60825 1 1994 Figure 0 3 Emplacement des contr les laser sur la t te du microscope Les contr les et indicateurs montr s ci dessus en figure 0 3 ont les fonctions suivantes
50. 25 1 1994 Figure 0 3 Location of laser controls indicators and labels on the probe head The controls and indicators shown above in Figure 0 3 have the following functions Laser power on off switch Turns the laser in the probe head on or off A red light in the switch is lit when the laser power is on Laser beam steering screws The two laser beam steering screws located on the top right side of the probe head are used to adjust the position of the laser beam hitting the cantilever The screws move the laser spot in two directions as shown in Figure 0 3 above If your system includes the optional CP optics you can monitor these adjustments using the optical view displayed on your video monitor PSPD adjustment screws There are two PSPD position sensitive photodetector screws on the probe head up down and forward backward These screws adjust the position of the PSPD in the probe head to center the reflected laser light on the photodetector The forward backward adjustment screw is useful for PSPD alignment on all probe heads The up down adjustment is useful primarily for the AFM LFM probe head of the standard system configuration Laser intensity indicators Indicates the intensity of reflected laser light hitting the PSPD For the standard configuration there are three probe heads that require laser intensity indicators AFM AFM NC AFM and AFM LFM There are different indicators for the different probe heads x
51. E Ces termes sont d finis dans le tableau 0 2 suivant Terme Attention Avertissement Remarque Tableau 0 2 Description des termes Description Vous alerte des blessures s rieuses pouvant survenir dans le cas ou les proc dures d crites dans ce manuel ne sont pas suivies correctement N outrepassez pas un message de ce type si les conditions ne sont pas comprises et remplies Vous met en garde des dommages possibles que le systeme pourrait subir ou des alt rations de s curit dans le cas ou les proc dures decrites dans ce manuel ne sont pas suivies correctement Vous met en garde des r gles suivre ou des conditions d utilisations particuli res Il est important que vous lisiez attentivement tous les messages Alerte Avertissement et Remarque de ce manuel afin de garantir les mesures de s curit mises en place pour l utilisation de votre syst me AutoProbe CP xlvi Preface and Overview R capitulatif des messages d Alerte et d Avertissement Cette section comprend les messages d alerte et d avertissement auxquels vous devrez tre attentifs chaque fois que vous utiliserez l AutoProbe CP ATTENTION L AutoProbe CP doit tre correctement mis la terre avant l enclenchement de ses composants Le cordon d alimentation principal doit simplement tre ins r dans une prise munie d une fiche de mise la terre Pour les instructions reportez vous la section Mise la masse de
52. Higher points are brighter and lower points are darker When the scan is finished the image is automatically loaded into the Image Gallery You can see how linear the scan is by observing how perpendicular the lines of the grating are in your image Starting and Stopping a Scan 3 11 Starting and Stopping a Scan When a scan is in progress the button is replaced by a button At any time you can cancel a scan that is in progress by clicking the button You can save time by canceling a scan that doesn t interest you 1 Start a scan by clicking the button Before the scan is finished click the button The scan stops immediately and the incomplete image remains frozen in the Active Display until you start a new scan Note The incomplete image will be displayed in the Image Gallery and saved on your hard disk You can delete an image you do not wish to keep when it is displayed in the Image Gallery For details see Chapter 4 Taking Better Images You can also start a continuous scan one that repeats continuously by starting a single scan and then enabling the Repeat checkbox located above the button Continuous scans can be useful while you are adjusting parameters 2 Start a continuous scan now First click the button Before the scan is finished click the Repeat checkbox so that it is selected A continuous series of images is built up one after the other After each scan is finished the image is automatically s
53. Images 8 From the View menu select Layout Alternatively click the Layout icon a The Image Layout dialog box will open Click the option button and then click the button There should now be two images in the Active Display of the Image mode window so that you can view the Topography and Topo x 16 images simultaneously 9 Click the button to take an image If the system is operating at a wrap around point the Topo x 16 signal trace on the Oscilloscope Display will show sudden shifts in level and the Topo x 16 image will show sudden shifts in contrast To move the system away from the wrap around point do the following 10 Click the button to cancel the scan in progress Note You cannot use Move mode while a scan is in progress 11 Switch to Move mode by either selecting Move Mode from the Mode menu or clicking the Move Mode icon 12 Click once on the upper portion of the z direction pad near the center line This should raise the Z stage by a fraction of a micron 13 Return to Image mode and take more images of the sample Try comparing the Topography and Topo x 16 images for large and small scan areas and for areas with large and small variations in height Saving Loading and Deleting Images 4 29 Saving Loading and Deleting Images This section gives you a brief overview of how to save load and delete image files For a more detailed description of working with image files refer to the sectio
54. Kunde muss ThermoMicroscopes vorzeitig kontaktieren um eine Genehmigung f r die R cksendung des Teiles zu erhalten F r den Transport des Teiles muss den ThermoMicroscopes Transportanleitungen unbedingt Folge geleistet werden Ausser den bis anhin bestimmten Bedingungen ob ausgedr ckt oder stillschweigend angenommen bernimmt der Verk ufer keine Garantie Der Verk fer schliesst ausserdem ausdr cklich jegliche Garantie f r eine Marktg ngigkeit oder Tauglichkeit f r besondere Zwecke aus Unter keinen Umst nden kann ThermoMicroscopes f r Verlust oder Sch digung jeglicher Art haftbar gemacht werden ob direkt speziell indirekt oder Folgesch den welche durch die Ben tzung oder Ben tzungsausfall eines Produktes einer Serviceleistung eines Teils einer Lieferung oder eines Ger tes entstehen Noch soll ThermoMicroscopes unter jeglichem Rechtssystem f r Sch den Einschliesslich aber nicht begrenzt auf wie Profitverluste Stillstandzeiten Firmenansehen Sch digung oder Auswechslung des Ger tes oder Eigentum und jeglicher Kosten f r R ckgewinnung Umprogrammierung oder Reproduktion jeglicher Programme oder Daten gespeichert oder ben tzt in ThermoMicroscopes Produkten haftbar gemacht werden Gewisse Staten erlauben keine zeitliche Begrenzung einer unausgesprochenen Garantie und oder der Ausschliessung spezieller nebens chlicher oder Folgesch den In diesem Falle treffen die obenstehenden Einschr nkungen und oder Ausschlies
55. P Optics The microscope swing arm is mounted on the CP Optics base and has a 90 range of travel over the base The zoom slider located on the swing arm allows you to zoom the field of view in and out An objective lens is focused using the coarse and fine focusing knobs at the end of the swing arm The AutoProbe CP instrument is placed directly onto the support plate of the CP Optics You can move AutoProbe CP relative to the field of 2 26 Chapter2 Setting Up to Take an Image view of the CP Optics using the micrometer adjustments located on the base These adjustments give you 5 mm of travel in the x and y directions To activate the CP Optics and focus on the probe tip complete the following steps 1 Slowly rotate the swing arm counterclockwise until the objective lens fits between the two arms of the probe head The lens should then be positioned over the cantilever and the sample CAUTION A built in stop inside the swing arm should ensure that the objective lens will stop before it hits the probe head However you should rotate the swing arm slowly in case the XY positioning of the probe head needs slight adjustment 2 Click the View button in the Optics section of the Move mode window The sample will be illuminated with light from the CP Optics The video monitor will brighten displaying a blurry image 3 Zoom out to the widest field of view by moving the zoom slider knob all the way to the right To move
56. PSPD When the laser spot is centered on the photodetector the center green light is lit as shown in Figures 0 4 and 0 5 above Figure 0 6 below shows the location of the laser warning labels on the outer housing of AutoProbe CP CAUTION LASER LIGHT WHEN OPEN DO NOT STARE INTO BEAM Figure 0 6 Laser warning location on AutoProbe CP housing Figure 0 7 below shows the location of the laser safety compliance label on the rear panel of the AutoProbe electronics module AEM AEM PM THERMOMICROSCOPES 1171 Borregas Ave Sunnyvale CA 94089 1304 AutoProbe Electronics Module Model No APEM 1000 Date Serial No Patents 5 157 251 5 210 410 5 376 790 5 448 399 100 120 220 240 VAC 50 60 Hz 400W Complies with 21 CRR 1040 10 and1040 11 Made in the USA Figure 0 7 Rear panel of the AEM showing location of laser safety compliance label System Configurations Standard Multitask Measurement Performance Standard Scanner Scan range Control resolution Multitask Scanner Scan range Control resolution Microscope Stage Translation range Sample size Tip to sample approach Optical microscope XV Specifications and Performance for AutoProbe CP Includes an AFM probe head for operation in AFM mode Optional AFM NC AFM probe head can be purchas
57. The microscope swing arm is mounted on the CP Optics base and has a 90 range of travel over the base The zoom slider located on the swing arm allows you to zoom the field of view in and out An objective lens is focused using the coarse and fine focusing knobs at the end of the swing arm The AutoProbe CP instrument is placed directly onto the support plate of the CP Optics You can move AutoProbe CP relative to the field of view of the CP Optics using the micrometer adjustments located on the base for up to 5 mm of travel in both the x and y directions System Components 1 9 The Acoustic Isolation Chamber The components of the optional acoustic isolation chamber are shown in Figure 1 8 below AutoProbe CP base Figure 1 8 Location of the components for AutoProbe CP s optional vibration isolation chamber The primary components are the base and the glass cover The acoustic isolation chamber is recommended for taking atomic scale images The base for the acoustic isolation chamber can sit directly on an air table or it can be placed directly on the CP Optics support plate AutoProbe CP fits inside the base and the glass cover fits over the instrument to provide isolation from acoustic vibration 1 10 Chapter 1 AutoP robe CP Basics ProScan Data Acquisition ProScan Data Acquisition controls AutoProbe CP and collects data ProScan Data Acquisition consists of two modes Move mode and Ima
58. YMTHERMOMICROSCOPES USER S GUIDE TO AUTOPROBE CP ThermoMicroscopes 1171 Borregas Avenue Sunnyvale California 94089 Tel 408 747 1600 Fax 408 747 1601 Part 1 Learning to Use AutoProbe CP Basic Imaging Techniques 48 101 1121 Rev For ThermoMicroscopes ProScan Software Version 1 5 August 4 2000 Copyright Notice Copyright 1994 2000 by ThermoMicroscopes All rights reserved No part of this publication may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying for any purpose without written permission from ThermoMicroscopes Trademarks AutoProbe Piezolever Ultralever Microlever MicroCell Materials Analysis Package MAP MapPlot ProScan ScanMaster the ThermoMicroscopes logo and ThermoMicroscopes are trademarks of ThermoMicroscopes Windows and Excel are trademarks of Microsoft Corporation Paradox is a trademark of Borland International Inc Trinitron is a trademark of Sony Corporation Mitsubishi is a trademark of Mitsubishi Electric America Inc HP LaserJet and PaintJet are trademarks of Hewlett Packard Company PostScript and Adobe Photoshop are trademarks of Adobe Systems Inc Phaser is a trademark of Tektronix Incorporated Others are trademarks of their respective owners Contents Preface Operating Safety sisi naine hit hide Safety D RME RON RAE ARI eS ER NE Defin
59. ages 4 24 Saving Loading and Deleting Images 4 29 Wheie 10 G0 from ensemble 4 33 Preface Operating Safety This section includes important information about your AutoProbe CP system It describes in detail procedures related to the operating safety of AutoProbe CP and therefore must be read thoroughly before you operate your AutoProbe CP system WARNING The protection provided by the AutoProbe CP system may be impaired if the procedures described in this User s Guide are not followed exactly Safety Symbols Table 0 1 lists symbols that appear throughout this User s Guide and on the AutoProbe CP system You should become familiar with the symbols and their function The symbols are used to alert you to matters related to the operating safety of the AutoProbe CP system Table 0 1 Safety symbols and their functions Symbol Function ee Direct current source Alternating current source Direct and alternating current source PNR Three phase alternating current dr Ground earth terminal Protective conductor terminal Frame or chassis terminal N Y Equipotentiality Power VI Symbol i Preface Table 0 1 continued Safety symbols and their function Function Power off Equipment protected by double or reinforced insulation Refer to system documentation Electric shock risk Definitions Warning Caution
60. al ist laser intensity and position indicators for other probe heads AFM NC AFM AFM LFM probe heads probe heads O 5 mp0 green analog analog for variable for variable brightness brightness Bild 0 4 Laserintensit t und Position des Indikators der AFM NC AFM und AFM LFM Tastk pfe der Standardsystemkonfiguration Bei der Multitaskkonfiguration ist die maximale Laserlichtintensit t die die PSPD teffen kann erreicht wenn die Helligkeit des mittleren Lichtes welches eine ver nderliche Helligkeit aufweisst maximal ist Eingezeichnet in Bild 0 5 unten xxxii Vorwort und bersicht Multitask probe heads Kai analog for variable brightness Bild 0 5 Laserintensit t und Position des Indikators des Multitasktastkopfes Laser position indicators Zeigen die Position des reflektierten Laserlichtes das die PSPD trifft an Wenn der Laserpunkt auf dem Photodetektor zentriert ist leuchtet das mittlere gr ne Licht auf wie in Bild 0 4 und 0 5 oben gezeigt wird Bild 0 6 unten zeigt den Ort der Laserwarnungsmarkierungen auf dem usseren AutoProbe CP Geh use an CAUTION LASER LIGHT WHEN OPEN DO NOT STARE INTO BEAM Bild 0 6 Laserwarnungsort des AutoProbe CP Geh uses Bild 0 7 unten zeigt den Ort der Lasersicherheits bereinstimmungskennzeichnung auf der R ckseite des AutoProbe Elektronic Modules AEM an AEM
61. am position are pictured in Figure 2 22 laser intensity video display indicators laser beam steering screws V lan 5 3 x prism Figure 2 22 Adjusting laser intensity using the laser beam steering screws 4 Using the two laser beam steering screws move the laser until you can see ared reflected spot on the back of the cantilever tip Note Don t try to maximize the brightness of the laser spot you see in the optical view Your goal is to produce the maximum amount of reflected light hitting the PSPD When the spot is positioned so that most of the laser beam is reflected onto the PSPD the laser spot on the back of the cantilever is not necessarily bright The laser intensity incident on the PSPD can be monitored by viewing the laser intensity indicator which is the right hand column of four lights All four lights are red The lights turn on from the bottom up with increasing incident laser intensity If fewer than three red lights are lit you must use the laser beam steering screws to adjust the position of the laser beam hitting the cantilever Aligning the Deflection Sensor 2 33 5 While watching the column of red lights make small adjustments to the laser position by turning first one and then the other steering screw Adjust both screws so that 3 or 4 red lights are lit Only small adjustments to the beam steering should be needed since the system is very sensitive
62. an image Chapter 3 shows you how to take an AFM image and Chapter 4 introduces you to more features of ProScan Data Acquisition If the system has just been installed perform an initial checkout of the system by following the tutorial of this chapter For instance the first section of this chapter shows you the system s cable connections These connections should be made initially by the authorized ThermoMicroscopes representative who installs your system but you should check the connections to familiarize yourself with the system Note Throughout this chapter the drawings refer to the AFM probe head for the standard system configuration of AutoProbe CP The text refers to the standard system configuration of AutoProbe CP Procedures are similar for the multitask system configuration unless otherwise noted Before You Begin 2 3 Before You Begin This chapter assumes you have already read Chapter 1 AutoProbe CP Basics which introduces you to AutoProbe CP Chapter 1 describes the standard and optional hardware components of both AutoProbe CP system configurations standard and multitask Chapter 1 also includes a brief description of the system software ProScan Data Acquisition and ProScan Image Processing This chapter assumes that you are familiar with working in a Windows environment You should be familiar with mouse techniques including pointing and clicking double clicking and holding the left mouse button down whil
63. anel of the AEM to the connector labeled NC clock on the back panel of the AutoProbe CP instrument The BNC cable carries the AC voltage signal to the cantilever that causes the cantilever to oscillate at a constant frequency All of your system s cables should now be properly connected and power cords should be plugged in You are now ready to turn on the components and set up to take an image Computer Q Back panel of AutoProbe CP NC Clock 1 Aux2 Aux3 Aux4 camera Ref 62 pin 17 pin 2 pis 44 pin 44 pin cable 62 pin stepper ee motor cable gt power keyboard lt a7 NC synthesizer card mouse O I C computer monitor 50 pin ISA bus extender cable 17 pin HV cable AEM power 44 pin 62 pin 17 pin HV Figure 2 1 Diagram of cable connections for AutoProbe CP system components 2 6 Chapter2 Setting Up to Take an Image Starting AutoProbe CP To start AutoProbe CP complete the following steps 1 Turn on the AutoProbe electronics module AEM The on off button is located on the front panel of the module 2 If you purchased CP optics turn on the color video monitor The on off button is located on the front of the monitor below the screen 3 Turn the computer and the monitor on
64. apter 1 AutoProbe CP Basics 1 2 Chapter 1 AutoP robe CP Basics Step by Step through AutoProbe CP Scanning Probe Microscopes SPMs are a family of microscopes used to study surface properties of a wide range of materials with high resolution Since the first real space images of the surface of silicon in the early 1980 s SPM applications have expanded to cover a wide variety of disciplines including fundamental surface science routine surface roughness analysis and spectacular three dimensional imaging from atoms to micron sized protrusions on the surface of a cell Depending on your system configuration the AutoProbe family of SPMs allow you to take images using many different SPM techniques including atomic force microscopy AFM non contact atomic force microscopy NC AFM lateral force microscopy LFM scanning tunneling microscopy STM and magnetic force microscopy MFM Taking an SPM image using AutoProbe typically involves the following steps Loading a sample Loading a pre aligned probe Performing an auto approach Navigating over the surface to a region of interest Adjusting and optimizing scan and feedback parameters Taking an image made up of 3 dimensional topographical data Analyzing the image to obtain surface measurements and statistics Printing out plots and tables of data analysis results DE OOF HONS om a os Processing the image and printing it out 10 Saving image files
65. arbmonitor 115 230 V AC 50 60 Hz 600 W 10 5 in 267 mm x 8 in 203 mm 22 Ib 10 kg 17 in 432 mm x 7 1 2 in 191 mm x 17 1 2 in 445 mm 43 Ib 20 kg 17 in 432 mm x 7 1 2 in 191 mm x 17 1 2 in 445 mm 27 16 12 kg 0 C bis 30 C 32 F bis 112 F 90 nicht kondensierend Isopropylalkohol Isopropylalkohol Isopropylalkohol XXXVII WARNUNG Um eine Ber hrungsgefahr zu vermeiden sollen w hrend dem Reinigen der AutoProbe CP Systemkomponenten diese immer ausgeschaltet sein VORSICHT Es sollte kein Aceton verwendet werden um die Komponenten des AutoProbe CP Systems zu reinigen da dabei wichtige Sicherheits Warnungs Etiketten von den Komponenten losgel st werden k nnten xxxviiiV orwort und bersicht ThermoMicroscopes Garantieerkl hrung Garantie von neuen Systemen und Zubeh rteile ThermoMicroscopes garantiert dem Orginalk ufer des Ger tes das dieses frei von Material und Verarbeitungsfehlern ist Diese Garantie gilt f r ein Jahr ab dem Lieferdatum ThermoMicroscopes bernimmt die Verantwortung das Ger t welches unter diese begrenzte Garantie f llt nach eigenem Ermessen zu reparieren oder zu ersetzen ohne Kosten f r den K ufer Alle Serviceleistungen werden je nach ermessen von ThermoMicroscopes in ThermoMicroscopes Niederlassungen oder beim Kunden durchgef hrt Bei Reparaturen welche in ThermoMicroscopes Niederlassungen durchgef hrt werden muss ThermoMicroscopes
66. ation acoustic Station de travail AEM Ordinateur Mass storage Memoire de masse Logiciel Graphiques Alimentation Dimensions et poids Unit de base CP AEM Ordinateur Conditions d utilisation Temperature Humidite Entretien Unit de base CP T te de microscope AEM et ordinateur En option microscope droit avec moniteur vid o couleur pour la visualisation de la pointe et de l chantillon En option chambre d isolation acoustique DAC 20 bit pour la commande des axes x y et z DAC 16 bit pour le syst me de contr le Processeur Pentium 133 MHz 256 Kbyte de m moire cache 16 MB RAM 1 GB hard drive 3 1 2 in 1 4 MB floppy disk drive Disque dur 1 GB lecteur de disquette 3 5 1 4 MB Proscan Data Acquisition et Image Processing fonctionnent sous Windows 95 Carte graphique acc l ratrice Windows moniteur couleur 17 haute r solution 115 230 V AC 50 60 Hz 600 W 267 mm 10 5 in x 203 mm 8 in 10 kg 22 Ib 432 mm 17 in x 191 mm 7 1 2 in x 445 mm 17 1 2 in 20 kg 43 Ib 432 mm 17 in x 191 mm 7 1 2 in x 445 mm 17 1 2 in 12 kg 27 Ib 0 C to 30 C 32 F to 112 F 90 sans condensation alcool Isopropylique alcool Isopropylique alcool Isopropylique ATTENTION Pour viter tout risques de choc lectrique aucun des composants du systeme AutoProbe CP ne doit tre nettoy lorsque le s
67. aved on your hard disk in the default directory c spmdata and displayed in the Image Gallery 3 12 Chapter 3 Taking an AFM Image Where to Go from Here Now you should be familiar with the procedures for taking a contact AFM image You can configure the software You can perform an auto approach You can take AFM image At this point you can practice lifting the tip performing an auto approach and taking an image Or you can go to Chapter 4 to learn how to optimize scan and feedback parameters move to a new location on the sample surface and save delete and retrieve images If you d like you can end your AutoProbe session now and continue with the tutorials at another time To end your AutoProbe session follow these steps 1 Exit ProScan by selecting Exit from the File menu If the power to the probe head is turned on turn it off now by clicking the Head ON icon T and setting the LASER ON OFF switch to the OFF position CAUTION Be sure to move the probe away from the sample using the z direction pad before exiting ProScan 2 A message box will appear reminding you to close any open ThermoMicroscopes DVM windows digital voltmeter windows Close any open DVMs and then click the button 3 On the taskbar you should see the AutoProbe SPM Controller button Right click this button once to view its pop up menu then select Close from the menu Note If you do not see the AutoPr
68. ce setting the status of a new image 2 First take an image with the Save to Buffer menu item selected The Save to Buffer menu item should be selected under the Mode menu by default If it is not selected select it now Then click the button to take an image When the scan is finished the image is automatically displayed in the Image Gallery and stored on your hard disk The file name should include the date and a sequence number A folder icon should be displayed before the file name indicating that the image was saved on your hard disk 3 Now deselect Save to Buffer from the Mode menu and then click the button to see what results Saving Loading and Deleting Images 4 31 When the scan is finished the image will not be displayed in the Image Gallery or saved on your hard disk You can also load images that have been previously saved to your hard disk or a diskette For previously saved images a diskette icon appears next to the file name of the image in the Image Gallery indicating that the image was loaded from your hard disk or a diskette to the Image Gallery Try loading a previously saved image to the Image Gallery 4 From the File menu select Load The Load to Buffer dialog box will open allowing you to select an image file from any drive or directory 5 Select the image file you want to load to the Image Gallery in the File Name listbox and then click the button The image will be loaded in the Image Gal
69. ce topography The z feedback loop operates to keep the cantilever deflection constant by adjusting the z position of the probe The hardware components and signal pathways for AFM operation are shown in Figure 4 3 image Error 4 ref z feedback signal differential controller amplifier a Topography signal lt A B signal probe signal 2 scanner voltage 0 Si cantilever wo 2 sample scan piezoelectric nt generator Figure 4 3 Hardware components and signal pathways for AFM operation The cantilever deflection is compared to the set point value in the Set Point scrollbox the reference value for the z feedback loop and an Error signal is generated The Error signal is sent to the feedback electronics which generate a feedback voltage This feedback voltage controls the scanner tube causing it to extend or retract The probe is moved toward or away from the sample and a constant cantilever deflection is maintained For AFM the feedback signal can be used to generate an image of sample topography The gain parameter controls how much the Error signal is amplified before being used to generate the feedback signal Higher gain values mean that the feedback loop is more sensitive to changes in cantilever deflection Surface features can then be tracked more closely However if the gain is set too high
70. e if you want information about a specific control in Move mode 2 8 Chapter2 Setting Up to Take an Image Controlling the XY and Z Stages This section shows you how to control the manual XY stage and the motorized Z stage for moving the probe in x y and z respectively You will need to know how to move these stages to perform the procedures described in the remainder of this chapter The probe head is placed on the manual XY stage and is used to move the probe in the x and y directions to select a location on the sample for imaging The XY stage is controlled using the two translation screws on the sides of the XY stage The motorized Z stage is essentially the three threaded posts that extend from the XY stage The Z stage is used to move the probe head and therefore the probe up and down relative to the sample in the z direction The Z stage is controlled using the z direction pad in Move mode The sections that follow describe in detail how to move the XY and Z stages Before you can move the XY stage you must be sure that there is ample distance between the probe and the sample If the probe and the sample are too close to one and other the probe can be dragged across the sample thereby damaging both the probe and the sample Therefore you will first learn how to control the Z stage to move the probe a safe distance away from the sample Before you can move the Z stage you must first check if the Z stage needs to be re
71. e Beam bounce cantilever Select the file that corresponds to the cantilever you are using For example you would select ULO6B if you are using the B cantilever of a contact AFM Ultralever Electrochemistry ON OFF OFF Voltage mode HI selects a high voltage mode of scanning After you finish entering these selections click the button to return to the Move mode window The software is now configured for taking an AFM image Approaching the Sample 3 5 Approaching the Sample This section teaches you how to perform a tip to sample approach to lower the probe tip and bring it into contact with the sample Once contact has been made you will be ready to take an image Setting Up for an Auto Approach To set up for an auto approach follow these steps 1 Before you can set up for an auto approach the power to the probe head and the power to the laser inside the probe head must be turned on To turn on the power to the probe head and the laser do the following 1 select Head ON from the Mode menu or click the Head ON icon and 2 turn the LASER ON OFF switch of the probe head to the ON position 2 Bring the cantilever into the optics field of view 3 Focus on the sample 4 Use the z direction pad to lower the probe until it is within a few millimeters of the sample surface The farther the probe tip is from the sample the longer the auto approach process will take Note If you are using CP O
72. e par de mauvaises manipulations AVERTISSEMENT Le courant du AEM doit tre coup position OFF avant d enlever ou d installer le scanner AVERTISSEMENT interrupteur laser ON OFF de la t te du microscope doit tre en position OFF avant de retirer ou d installer la t te du microscope sur l tage de translation XY Dans le cas contraire des dommages aux diodes lectroluminescentes de la t te du microscope LEDs peuvent survenir AVERTISSEMENT En retirant et en installant le scanner vous devez tre mis la terre l aide d un bracelet conducteur vous reliant la terre pour vous assurez que le scanner n est pas endommag Le scanner est sensible aux d charges lectrostatiques AVERTISSEMENT Les quatres vis qui connectent le scanner l unit de base du CP doivent tre serr es proprement pour assurer une mise terre correcte Lorsque les quatres vis sont serr es correctement les performances maximum de l instruments sont assur es puisque les vibrations sont r duites xlviii Preface and Overview AVERTISSEMENT Afin de prot ger le EMC placer le couverde m tallique sur la base du CP lors de l acquisition de l image Mise la terre de I AutoProbe CP L AutoProbe CP doit tre correctement mis la terre avant l enclenchement de ses composants Le c ble d alimentation g n rale doit tre ins r dans une prise munie d une fiche de mise
73. e set point while a scan is in progress so that you can immediately see its effect Note Controls in the Scan Configuration dialog box allow you to take images simultaneously with different set points For details see Chapter 1 of the Software Reference manual ProScan Data Acquisition To adjust the set point do the following 1 Position the cursor over the number in the Set Point scrollbox and double click to highlight the old value Or click and drag the cursor to select the number 2 Type in a new set point value and then press the Enter key Alternatively use the scrollbox arrows to scroll through the range of values The units used to display the set point depend on how your system is calibrated Typically the set point is displayed in units of um microns Note You can change the units used to display the set point in the Servo Unit dialog box For more information refer to Chapter of the Software Reference manual ProScan Data Acquisition 3 Start a new scan by clicking the button Try adjusting the set point while a scan is in progress so you can immediately see its effect Selecting a Number of Data Points 4 15 Selecting a Number of Data Points When you take an image you can choose the number of data points contained in an image You can choose amongst 64 x 64 128 x 128 256 x 256 or 512 x 512 You select a number of data points in the Scan Configuration dialog box which is displayed when
74. e you drag the mouse You should know how to use the mouse to open up an application pull down menus and drag an icon to a different location on the screen This chapter also assumes that your AutoProbe CP instrument has been properly installed by a ThermoMicroscopes representative The computer and its components as well as the control electronics have all been set up Cables are properly connected between system components and the power cords are plugged in WARNING This instrument contains a laser Use of controls or adjustments or performance of procedures other than those specified herein could result in hazardous laser light exposure 2 4 Chapter2 Setting Up to Take an Image Cable Connections This section illustrates the components of your AutoProbe CP system and shows how they are connected System components include the computer the AutoProbe electronics module AEM and the AutoProbe CP instrument You can refer to this section if you need to disconnect and then reconnect your system components for any reason of the cable connections are depicted in Figure 2 1 1 Make sure that all system components are turned off 2 Set up the computer components including the keyboard the mouse and the monitor a Connect the keyboard cable to the keyboard connector on the back panel of the computer unit b Connect the mouse cable to the mouse connector on the back panel of the computer unit Connect the
75. eading When you are taking an image of a sample with a wide variation in topography the loss of precision does not affect the value of each data point significantly However when you are imaging an extremely flat sample especially one with fine detail the loss of resolution can cause quantization of the data Because the Topography signal can only be displayed in limited increments an area that varies smoothly with height over a small range is displayed as a series of flat areas on the image The Topography signal on the Oscilloscope display will appear to have steps as shown in Figure 4 6 Taking High Resolution Topography Images 4 25 actual slope Topography signal Figure 4 6 Quantization of Topography signal data For imaging the smallest variations in sample topography with the highest Z resolution you can take an image using the Topo x 16 signal available from the Input Configuration dialog box The Topo x 16 signal uses the 16 least significant bits of the 20 bit DAC output to produce an image This allows you to regain the precision lost when using the Topography signal However the cost of added precision is a loss in the overall height range that can be imaged Specifically the height range covered by the Topo x 16 signal is 1 16th of the scanners Z range As long as you are imaging a region where the variation in topography is within 1 16th of the scanner s
76. ecting Image Mode from the Mode menu or clicking the Image Mode icon The Image mode window is shown in Figure 4 1 below Note The Image Mode menu item or alternatively the Image Mode icon M is enabled only when the probe head is on If the probe head is off you can turn it on by either deselecting Head ON from the Mode menu or clicking the Head ON icon 7 ProScan HI SPS INSTR CP OFF EC AFM HDM AFMSTM HD 100UM SCN GENERIC BBC EX File Edit Mode View Setup Tools Help gt Blei ES Br FS a 500 2 ym Active Oscilloscope gt Display Display Image Sim Gallery Topography 1 ate 2 Slope _ X_OY Repeat import 3 Scan OFF image a Import Size Y offset 2M Fe Scan and 1 Scan rate Setpoint Servo gain Feedback 21 i Controls Z servo i Set point i 2 umidiv 15 14 13 512 buffer lines allocated Pres
77. ed for operation in AFM non contact AFM intermittent contact AFM and MFM modes Optional AFM LFM probe head can be purchased for operation in AFM and LFM modes Optional STM toolkit can be purchased for operation in STM mode Includes a multitask probe head for operation in the following modes contact non contact and intermittent contact AFM MFM LFM and STM 5 um piezoelectric scanner Maximum lateral scan range 5 um Maximum vertical scan range 2 5 um Maximum lateral resolution 0 0013 A Maximum vertical resolution 0 009 A 100 um piezoelectric scanner Maximum lateral scan range 100 um Maximum vertical scan range 7 5 um Maximum lateral resolution 0 25 A Maximum vertical resolution 0 025 A 8 mm x 8 mm 50 mm w x 50 mm 1 x 25 mm h for the standard configuration 50 mm w x 50 mm 1 x 20 mm h for the multitask configuration Automatic With 3 independent stepper motors Optional on axis microscope with color video monitor for probe tip and sample view 5 1 zoom up to 3 500X magnification Xvi Preface Acoustic isolation Workstation AEM Computer Mass storage Software Graphics System power Dimensions and Weights CP base unit AEM Computer Operating Environment Temperature Humidity Cleaning Agents CP base unit Probe head AEM and computer Optional acoustic isolation chamber 20 bit DACs for x y and z axes 16 bit DACs for system control 100
78. el in diesem Abschnitt der Bedienungsanleitung vermitteln mehr detailierte Informationen ber die Softwareeigenschaften und steuerungen als die in den Schulungskapiteln vermittelten Informationen Der Aufbau der Kapitel erlaubt ihnen ein direktes Angehen der Eigenschaft oder der Steuerung mit welcher sie sich vertieft befassen m chten Kapitel 1 ProScan Data Acquisition beschreibt im Detail die Softwareeigenschaften von ProScan Data Acquisition Dieses Kapitel diskutiert jede Region des Bildschirms mit spezieller Beachtung jeder Steuerung und seiner Funktion Dieses Kapitel diskutiert auch die Menus mit einer Beschreibung jedes Menuelementes und seiner Funktion xliii Kapitel 2 ProScan Image Processing beschreibt im Detail die Softwareeigenschaften von ProScan Image Processing Dieses Kapitel erkl rt das Bearbeiten der Bilder wie Oberfl chenmessungen gemacht werden und wie Bilder vorbereitet werden um sie in unterschiedlichen Formaten auszudrucken xliv Preface and Overview Preface S curit lors de l utilisation Ce chapitre comprend des informations importantes propos de votre syst me AutoProbe CP Les proc dures relatives la s curit lors de l utilisation de l AutoProbe CP y sont d crites et par cons quent doivent tre lues scrupuleusement avant toute mise en route de votre syst me AutoProbe CP ATTENTION Les protections pr vues par le syst me pourraient tre inefficaces si les proc dure
79. eneral when you switch between the x and y scan directions you will not see a significant difference in your image In some cases though you may be able to distinguish effects due to tip anisotropy Anisotropy is the condition of having different properties along different axes or directions Adjusting Scan Parameters 4 9 Adjusting the X and Y Slope Slope occurs when the sample is not flat relative to the scanning plane For instance slope can be due to a slightly wedge shaped sample or a crooked sample mount By adjusting the slope in the x and y directions you can compensate for a slight tilt or slope of the sample surface You can tell if any slope adjustment is needed by looking at the signal trace on the Oscilloscope Display If the signal trace is tilted on the display adjusting the slope in the x and y directions can usually remove most of this tilt To adjust the slope in the x and y directions do the following 1 Click the X option button in Image mode This sets x to be the fast scan direction 2 To adjust the x slope enter a new value from 1 to 1 arbitrary units scaled with the x y and z ranges of scanner motion in the Slope scrollbox Or use the scrollbox arrows to scroll through a range of values Watch the signal trace on the Oscilloscope Display while you adjust the value of the slope parameter Continue adjusting the value of the slope parameter until the signal trace is no longer tilted 3
80. er works best for you The cartridge should fit snugly inside the probe head Wiggle the cartridge in and out a bit to make sure that all three balls are engaged Next you will learn how to use the optical view to focus on the cantilevers at the end of the cantilever chip Using the Optical View 2 25 Using the Optical View This set of instructions shows you how to use either the CP Optics or the separate optical microscope to focus on the cantilever and the sample The optical view allows you to view the cantilever as you align the deflection sensor It also allows you to monitor the cantilever as it approaches the sample Later in this chapter you will align the deflection sensor If you are using the AutoProbe CP Optics read the next section Using the CP Optics If you are using the separate optical microscope and fiberoptic light source instead skip to the section Using the Separate Optical Microscope Using the AutoProbe CP Optics These procedures assume that the CP Optics and the video monitor are properly installed and that a probe head a chip carrier and a sample are already loaded AutoProbe CP is shown mounted on the base of the CP Optics in Figure 2 16 The principal components are the microscope swing arm the zoom slider the on axis objective lens the coarse and fine focusing knobs and the support plate Figure 2 16 Location of the instrument controls for the optional C
81. erden Der Versorgungsspannungs schalter befindet sich an der R ckwand des AEM und kann folgendermassen eingestellt werden 110 V 120 V 220 V und 240 V F r weitere Informationen soll der Teil Einstellen der Versorgungsspannung folgend in diesem Vorwort beachtet werden WARNUNG Das AutoProbe Elektronik Modul AEM oder die CP Grundeinheit d rfen nicht ge ffnet werden Das AEM und die CP Grundeinheit f hren Hochspannung welche bei Freilegung zu ernsthaften Verletzungen f hren kann WARNUNG ThermoMicroscopes verlangt eine routinem ssige berpr fung der Kabel des AutoProbe CP Systems um sicherzustellen dass sie nicht durchgescheuert lose oder besch digt sind Kabel welche durchgescheuert lose oder besch digt sind m ssen augenblicklich dem rtlichen ThermoMicroscopes Servicevertreter gemeldet werden Das AutoProbe CP soll nicht benutzt werden falls Kabel durchgescheuert lose oder besch digt sind xxvi Vorwort und bersicht VORSICHT Alle AutoProbe CP Systemkomponenten m ssen mit Vorsicht behandelt werden In den Systemkomponenten befinden sich empfindliche elektromechanische Messger tausr stungen welche bei unsachgem sser Behandlung besch digt werden k nnen VORSICHT Um eine Ber hrungsgefahr zu vermeiden muss beim Entfernen und Installieren des Scanners die Spannung des AEM immer ausgeschaltet sein VORSICHT Der LASER ON OFF Schalter des Tastkopfes muss immer ausgeschalte
82. es in topography and can result in an image that appears smeared The scan rate you use depends on the type of image you are taking For AFM images of the Topography signal acquired using a scan size from 1 to 10 um and with feedback enabled typical scan rates are from 1 to 4 Hz To determine which scan rate is best to use for a particular set of scan conditions take a scan at several scan rates If you see no discernible difference in image quality until you reach a certain scan rate use a scan rate that lies below the point where image quality begins to degrade To adjust the scan rate do the following 1 Position the cursor over the number in the Rate textbox and double click to highlight the old text Or click and drag the cursor to select the number Adjusting Scan Parameters 4 7 2 Type in a new scan rate in Hertz and then press the Enter key Alternatively use the scrollbox arrows to scroll through a range of values You dont need to type in the Hz units 3 Start a new scan by clicking the button You can practice adjusting the scan rate while an image is being acquired As you adjust the scan rate you can monitor differences in image quality After you determine which scan rate is best take a new image using that scan rate Did you notice the gray scale of the image change immediately after the scan finished A feature called Keep Level can be turned on to prevent the gray scale from saturating w
83. eziehen sich alle Darstellungen auf den AFM Tastkopf der standard system Konfiguration des AutoProbe CP ansonsten ist es anderwertig bezeichnet Das AutoProbe CP enth lt eine Laserdiode welche von einer Niederspannungsquelle betrieben wird und eine maximalen Arbeitsleistung von 0 2 mW CW in der Wellenl nge 600 700 nm hat Im innern des Ger tes k nnte eine Diodelaserleistung bis zu 0 2 mW bei 600 700 nm zug nglich sein Das AutoProbe CP sollte nur bedient werden wenn der Scanner Kopf ordnungsgem ss montiert ist WARNUNG Die Benutzung von Steuerungen Reglern oder das Ausf hren von Verfahren anders als bis hierhin beschrieben kann zu Freisetzung von gef hrlichem Laserlicht f hren Bild 0 2 zeigt die zwei Laserwarnungsmarkierungen des Tastkopfes Strickte Beachtung dieser Warnungsmarkierungen ist erwartet CAUTION LASER LIGHT DO NOT STARE INTO BEAM gt 0 2 mW 600 700 nm CLASS II LASER PRODUCT 2 PER EN60825 1 1994 Bild 0 2 Laserwarnungsmarkierungen des Tastkopfes Die linke Warnungsmarkierung in Bild 0 2 oben stuft den Tastkopf als ein Klasse II Laserprodukt nach 21 CFR 1040 10 und 1040 11 ein Die Warnungsmarkierung in Bild 0 2 oben stuft den Tastkopf als ein Klasse 2 Laserprodukt nach EN60825 ein Bild 0 3 bis 0 7 unten bezeichnen die Orte aller Instrumentensteuerungen und Anzeiger im Zusammenhang der Laserbedienung des AutoProbe CP Systems Weiter werden auch
84. f xy motion is reduced to approximately one fourth of its full range and the range of z motion is reduced to approximately one third of its full range For example the xy range of a 100 um scanner is reduced to about 25 um and the z range is reduced to about 2 5 u m This section explains why low voltage mode is important for obtaining improved lateral resolution with smaller scan sizes and gives step by step instructions for switching from high to low voltage mode CAUTION The z scanner ranges in high and low voltage modes do not overlap the scanner z range in low voltage mode is more extended To avoid damage to the probe tip and sample when you select low voltage mode you must raise the Z stage a short distance using the z direction pad to keep the probe tip clear of the sample surface For CP systems be sure to move the optics out of the way to protect the objective lens before you raise the Z stage Move the optics by rotating the swing arm away from the probe head 4 20 Chapter 4 Taking Better Images Why You Need Low Voltage Mode Lateral Resolution Low voltage mode can be useful when you want to look at smaller features on your sample Without low voltage mode you would not be able to obtain the highest lateral resolution for small scan sizes below about 500 A The main factors limiting the lateral resolution of your images are the following the scan size divided by the number of data points per sca
85. finition Bezeichnung _ Definition Warnung Warnt vor m glicher ernsthafter Verletzungsgefahr falls dem im Benutzerhandbuch beschriebenen Arbeitsablauf nicht unbedingt Folge geleistet wird Der Arbeitsablauf darf nicht fortgefiihrt werden bis nicht alle Voraussetzungen verstanden und erfiillt sind Vorsicht Macht auf m gliche Sch digung des Systems oder Verschlechterung der Sicherheit aufmerksam falls dem im Benutzerhandbuch beschriebenen Arbeitsablauf nicht unbedingt Folge geleistet wird Beachte Macht auf eine zu beachtende Benutzungsregel oder ungew hnliche Voraussetzung aufmerksam Es ist wichtig dass alle Warnungen Vorsichts und Beachte in diesem Handbuch achtsam gelesen werden um die Bedienungssicherheit ihres AutoProbe CP Systems zu gew hrleisten Betriebssicherheit xxv Zusammenfassung der Warnungen und Vorsichts Dieser Abschnitt beinhaltet die Warnungen und Vorsichts die unbedingt befolgt werden miissen wann immer das AutoProbe CP betrieben wird WARNUNG Das AutoProbe CP muss ordnungsgem ss geerdet werden bevor Spannung an seine Komponenten angelegt werden darf Das Versorgungskabel darf nur mit einen Anschluss verbunden werden der mit einem Erdungspol versehen ist F r weitere Informationen soll der Teil Erdung des AutoProbe CP folgend in diesem Vorwort beachtet werden WARNUNG Vor dem Einschalten der AutoProbe CP Systemkomponenten muss der Versorgungsspannungsschalter berpr ft w
86. formance Scanner Aire de balayage Resolution de contr le Scanner Aire de balayage Resolution de contr le Etage du microscope Course de translation Taille d chantillon Approche pointe chantillon Caract ristiques et performances pour l AutoProbe CP Inclus une t te de microscope pour des op rations en mode AFM En option la t te de microscope AFM NC AFM peut tre achet e pour des operations en modes AFM non contact contact intermittent et MFM En option la t te de microscope AFM LFM peut tre achet e pour des op rations en modes AFM et LFM En option le kit d outils STM peut tre achet pour des op rations en mode STM Inclus une t te de microscope multitask pour des op rations dans les modes suivants AFM contact non contact contact intermittent MFM LFM et STM scanner piezo lectrique Sum Balayage lat ral maximum Sum Balayage vertical maximum 2 5um R solution lat rale maximum 0 0013 A R solution verticale maximum 0 009 Scanner piezo lectrique 100 um Balayage lat ral maximum 100um Balayage vertical maximum 7 5um R solution lat rale maximum 0 25 R solution verticale maximum 0 025 8 mm x 8 mm 50 mm w x 50 mm 1 x 25 mm h pour une configuration standard 50 mm w x 50 mm 1 x 20 mm h pour une configuration multitask Automatique avec 3 moteurs pas pas ind pendants Preface and Overview Microscope optique Isol
87. g repeated information In most cases the largest limiting factor to the lateral resolution is the interaction area between the tip and the sample or the effective tip radius This interaction area is affected by both the physical radius of curvature of the tip or the tip sharpness as well as the range and rate of change of the quantity being measured for the mode you are operating in Specific conditions such as a water layer on the tip can affect the lateral resolution as well For example in STM mode the exponential relationship between tunneling current and tip to sample spacing isolates the interaction between the tip and the sample to atoms at the very end of the tip Thus even a very blunt tip with a radius on the order of 1000 A can be used in STM mode to achieve atomic resolution as long as it has a single atom that Taking Images in Low Voltage Mode 4 21 protrudes more than its neighbors This same tip however may not be able to resolve features that are wide if those features are also very deep high aspect ratio features For other modes however the lateral resolution as limited by the effective tip radius is on the order of nanometers to tens of nanometers Factors such as tip wear and deformation increase the interaction area for contact AFM operation The response of the measured signal to changes in tip to sample spacing affects the lateral resolution for non contact AFM modes The only real way to determine the s
88. g the auto approach A green indicator light at the top of the screen in Move mode flashes during the auto approach process When the approach is complete the green light stops flashing When the tip has made contact with the sample surface you are ready to take an image If you have difficulty performing an auto approach the next section provides troubleshooting tips CAUTION If you plan to turn off the probe head after the tip and sample are in contact remember to raise the probe head first When the probe head is turned off the z feedback loop is disabled Both the probe and the sample can be damaged if the probe head is turned off while the tip and sample are in contact Troubleshooting Tips This section lists some common problems that can make it difficult to align the deflection sensor or that can cause the sensor to become misaligned The deflection sensor must be properly aligned before an auto approach can be performed successfully Here are some common problems that can cause misalignment of the deflection sensor and their solutions The cartridge is not properly inserted in the probe head Wiggle the cartridge in and out to make sure that all three contact zones are engaged by the three balls on the cartridge You should be able to feel when the cartridge is correctly positioned over the contact zones The chip carrier is not properly inserted in the cartridge mount Remove the cartridge from the head Then wi
89. ge mode Move mode controls allow you to move the probe up and down in the z direction and to perform an auto approach Image mode controls allow you to select a region for scanning on the sample surface to set scan and feedback parameters and to take an image Certain software features such as the Menu bar the Toolbar and the Image Gallery are shared by both Move mode and Image mode You will learn more about Move mode and Image mode by working through the tutorials in Chapters 2 through 4 ProScan Data Acquisition is described in detail in Part III of this User s Guide Software Reference ProScan Image Processing 1 11 ProScan Image Processing ProScan Image Processing provides tools for image processing data analysis and presentation of images for printout Measurement tools generate useful quantitative data from your images including the dimensions of surface features surface roughness statistics and height distributions You can analyze individual height profiles cross sections of an image or surface regions Image processing tools allow you to remove imaging artifacts such as curvature slope and noise Printing tools allow you to set up a single image or multiple images for printout in a desired format You can print an image with a title and comments You can also generate a 3 dimensional rendition of an image ProScan Image Processing is described in detail in Part III of this User s Guide Software Reference
90. ggle the chip carrier from side to side to make sure that all three balls on the cartridge mount are engaged by the three slots on the chip carrier You should be able to feel the chip carrier click into place The cantilever tips are broken You should be able to see if the cantilever tips have broken off by using the optical view If the tips are broken replace the chip carrier Approaching the Sample 3 7 The laser power is not on Check that the LASER ON OFF switch of the probe head is in the ON position The switch is lit red when in the ON position If the laser is not switched on switch it on now If none of these problems is causing the misalignment and you still cannot perform an auto approach you need to realign the laser beam to maximize the intensity of the reflected beam and to center the laser spot on the PSPD Refer to the section Aligning the Deflection Sensor in Chapter 2 The software generates an A B or A B nulling range error message If the nulling range error message appears in the Message log at the bottom of the window after you align the deflection sensor and attempt an auto approach then the PSPD may have become misaligned during the approach If you are using a highly reflective sample such as the gold grating this misalignment during the approach may be caused by extraneous reflections of laser light hitting the PSPD First try rotating the sample This changes the angle of reflection of the laser
91. hile an image is being collected It works by keeping the average gray level of each line constant Keep Level is a menu item of the View menu and is turned on by default You can turn Keep Level off by deselecting it from the View menu Without leveling if the contrast range of the gray scale is set to match the initial height range of the data the gray scale may saturate if a taller or deeper feature is encountered later in the scan Keep Level only affects how the image is displayed during a scan When the scan is finished the original contrast range of the gray scale is restored Additionally when a scan is finished the computer can make various adjustments to optimize the gray scale image To see your options for image display modes select the Input Configuration menu item of the Setup menu Alternatively click the Input Configuration icon gt The Input Configuration dialog box will open showing checkboxes and controls that you can use to select the image display mode To learn more about the Input Configuration dialog box see Part III Software Reference of this User s Guide The section Input Config The Input Configuration Dialog Box describes what image display modes are available when to use them and how to turn them on or off In Chapter 1 of the Software Reference manual you will also learn how to manually adjust the gray scale using the gray scale bar 4 8 Chapter 4 Taking Better I
92. ht source left and optical microscope right The optical microscope is used to view the probe relative to the sample Its primary components are the objective lens the focus adjustment knob and the forward backward adjustment knobs The optical microscope has interchangeable 10X 20X and 50X objective lenses which may be focused by turning the focus adjustment knob The position of the objective lens is adjusted using the four positioning clamps and the forward backward adjustment knobs In general viewing the sample at a 45 angle at a distance of about 2 to 3 inches is recommended The fiber optic light source can easily be positioned to illuminate the sample and has one switch for setting the light source intensity The settings are OFF LOW MED and HIGH 1 8 Chapter 1 AutoProbe CP Basics The CP Optics The controls of the optional CP Optics are shown in Figure 1 7 below swing arm 7 coarse and fine focus knobs 10X or 50X on axis objective lens zoom slider knob RE Se u support plate Nez u ED een CP Optics base micrometer adjustments Figure 1 7 Location of the instrument controls for the optional CP Optics The primary components of the CP Optics include the following the microscope swing arm the zoom slider the on axis objective lens the coarse and fine focusing knobs the support plate and the video monitor
93. iii Note The AFM probe head comes with the standard system configuration The AFM NC AFM and AFM LFM probe heads can be purchased separately for the standard system configuration The indicators for the AFM probe head are shown in Figure 0 3 above For this probe head the intensity of laser light hitting the PSPD is maximized when the column of four red lights is lit The indicators for the AFM NC AFM and AFM LFM probe heads are shown in Figure 0 4 below For these probe heads when the brightness of the center green light which has variable brightness is maximized the laser intensity hitting the PSPD is maximized laser intensity and position indicators for other probe heads AFM NC AFM AFM LFM probe heads probe heads O O eee eel analog analog for variable for variable brightness brightness Figure 0 4 Laser intensity and position indicators for the AFM NC AFM and AFM LFM probe heads of the standard system configuration For the multitask configuration when the brightness of the center green light which has variable brightness is maximized the laser intensity hitting the PSPD is maximized See Figure 0 5 below Multitask probe heads sc analog for variable brightness Figure 0 5 Laser intensity and position indicators for the multitask probe head XIV Preface Laser position indicators Indicate the position of the reflected laser light hitting the
94. ilable Selected Input config Topography Scan config pror Signal Add Topography etector lt 2 Scanner Remove Tip bias option Topo i lt lt Clear All ScanMaster abs Probe Signal gt Unit Phase lt um 4 Servo unit T Force Modulation S EFM racl Edit i ee LP Filter 0 0 Edit locations Capacitance LI NGM frequency X Det Auto flat 0 10 0 Configure parts Reset stage Description Reset Z origin Scanner calibration Calibration edit Help OK Cancel Figure 4 8 The Input Configuration dialog box 3 Select Topo x 16 from the Available scrollbox 4 Click the button Topo x 16 appears in the Selected box 5 Click the button to register your selection and close the dialog box Next configure ProScan to monitor both the Topography and Topo x 16 signals 6 Switch to Image mode by either selecting Image Mode from the Mode menu or clicking the Image Mode icon 7 In Image mode click the arrow on the Signal Name listbox under the Oscilloscope Display Make sure that the Topography and Topo x 16 signals are available to be viewed on the Oscilloscope Display You will monitor these signals to adjust parameters for taking simultaneous Topography and Topo x 16 images Next you will set up the Active Display so that you can view the Topography image and the Topo x 16 image at the same time 4 28 Chapter 4 Taking Better
95. ility allows you to compare results with both methods To use the Topo x 16 signal do the following 1 If the power to the probe head is turned off turn it on now by clicking the Head ON icon T and setting the LASER ON OFF switch to the ON position 2 Select the Input Config menu item of the Setup menu Alternatively click the Input Configuration icon The Input Configuration dialog box will open Note The Input Config menu item or alternatively the Input Configuration icon is only enabled if the probe head is turned on The Input Configuration dialog box shown in Figure 4 8 allows you to select various signals for viewing on the Oscilloscope Display and for producing images The list of available signals is displayed in the Available listbox The list of selected signals is displayed in the Selected box Taking High Resolution Topography Images 4 27 The and buttons allow you to add or remove signals from the Selected box The other buttons and checkboxes allow you to select additional options for selected signals Refer to the section Input Config The Input Configuration Dialog Box in Chapter 1 ofthe Software Reference manual for more information about the Input Configuration dialog box Input Configuration x Setu Ava
96. ill learn how to take an image in constant height mode with feedback minimized For constant height mode an image is generated from the Error signal which represents the cantilever deflection for AFM imaging as it changes in response to the surface topography 2 Now raise the gain until the system begins to oscillate Increase the gain value incrementally by clicking the up scrollbox arrow of the Gain scrollbox Stop when you begin to see oscillations appearing on the Oscilloscope Display superimposed on the signal trace of the grating As you increase the gain from a low value first you will see the contours of the grating lines reestablished on the Oscilloscope Display As the gain is increased further oscillations appear superimposed on the signal trace of the grating See Figure 4 2 3 Lower the gain until the oscillations disappear The gain value is now optimized When you optimize the gain parameter for a scan you will find that a range of acceptable values exists rather than a specific fixed value When the scan conditions change you should check that the gain parameter is still optimized If you start to see oscillations lower the gain until the system is just below the oscillation point You should also check that the gain is set high enough to track the sample topography Adjusting Feedback Parameters 4 13 How does z feedback work When the feedback loop is optimized the scanner s motion matches surfa
97. in X Offset and Y Offset textboxes are updated T Now start anew scan by clicking the button The new image will be built up in the Active Display Using the cursor box in the Import View you can successively decrease the scan size to zoom in on a feature of interest Note You can also select a wider region than the previous scan To learn more about the Import View see the section Import View in Chapter 1 of the Software Reference manual Taking Images in Low Voltage Mode 4 19 Taking Images in Low Voltage Mode Both a high voltage mode and a low voltage mode are available when you use AutoProbe CP High voltage mode allows you to image micron size features on the sample surface Low voltage mode allows you to take scans with smaller scan sizes and to image smaller features such as atoms without losing lateral resolution High voltage mode applies the full voltage range to the scanner to produce xy and z motion and is most often used for scan sizes in the micron range The maximum scan size in high voltage mode represents a scanner s available range of motion For example the maximum xy range of a 100 um scanner is about 100 um The maximum z range of a 100 um scanner is about 8 um which is the maximum height variation the scanner can respond to Low voltage mode uses only a portion of the scanner s full xy and z range and is generally used for smaller scans on the order of tens to hundreds of angstroms The range o
98. includes ScanMaster position detectors that accurately measure the scanner s x y position Note The 100 um scanner is available as an option with the standard configuration The 5 um scanner is available as an option with the multitask configuration 1 6 Chapterl AutoProbe CP Basics The components described above all fit into or onto the AutoProbe CP base unit shown in Figure 1 4 below The cover fits over the probe head and scanner to provide isolation from electrical and acoustic noise and EMC immunity base unit AutoProbe CP Figure 1 4 The AutoProbe CP base unit and cover The CP base unit connects to the AEM The rear panel of the CP base unit has three large multi pin connectors one small multi pin connector five BNC connectors and two buttons as illustrated in Figure 1 5 WARNING HIGH VOLTAGE RISK OF ELECTRIC SHOCK DO NOT OPEN NC Clock Aux1 Aux2 Aux3 Aux4 O Ref 62 pin 17 pin ec Trim 44 pin 0 gt camera norm Figure 1 5 The rear panel of the CP base unit System Components 1 7 The Optical Microscope and Fiberoptic Light Source The controls of the optional optical microscope and fiberoptic light source are illustrated in Figure 1 6 below focus adjustment objective lens forward backward positioning adjustment clamps fiberoptic optical light source microscope Figure 1 6 Location of instrument controls for AutoProbe CP s fiberoptic lig
99. inden der Kabel entfernen und einrichten des Messkopfes und des Scanners sowie das laden einer Probe und eines Messf hlers Kapitel 3 Taking an AFM Image lehrt sie die Software f r AFM Mode zu konfigurieren ein Auto Approach einzurichten und auszuf hren und ein AFM Bild aufzunehmen Kapitel 4 Taking Better Images erkl rt wie ein Scan und die R ckkoppelungsparameter f r bessere Aufnahmen optimiert werden k nnen sowie das sichern und laden von Bildern Abschnitt Il Lernen das AutoProbe CP zu gebrauchen Fortgeschrittene Aufnahmetechniken Abschnitt II dieser Bedienungsanleitung Lernen das AutoProbe CP zu gebrauchen Fortgeschrittene Aufnahmetechniken beinhaltet praktische Schulungen ber die Bedinung des Ger tes mit den folgenden Methoden STM LFM NC AFM IC AFM und MFM Er f hrt sie aussedem in die fortgeschrittenen F higkeiten des AutoProbe CP s ein wie Kraft Abstand Kurven Strom Spannungs Kurven und das kalibrieren des Scanners xlii Vorwort und bersicht Kapitel 1 STM Imaging f hrt sie durch das Aufnehmen eines STM Bildes In diesem Kapitel werden sie lernen eine STM Spitze zu preparieren eine STM Kartusche zu benutzen die Hardware und Sofrware f r die Aufnahmen von STM Bildern einzustellen und ein STM Bild aufzunehmen Kapitel 2 LFM Imaging f hrt sie durch das gleichzeitige Aufnehmen von LFM und AFM Bildern Kapitel 2 enth lt des weiteren Informationen dar ber wie LFM Bilder entstehen
100. ins how to optimize scan and feedback parameters to get the highest quality AFM images Chapter 1 AutoProbe CP Basics This chapter introduces the system configurations of AutoProbe CP standard and multitask It describes the hardware components for each system configuration as well as the system software Chapter 2 Setting Up to Take an Image This chapter describes how to set up your AutoProbe CP to take images In this chapter you will learn the following how to connect the cables between the system components how to start the system software how to install a scanner how to load a sample how to move the XY translation stage and how to load a probe Chapter 3 Taking an AFM Image This chapter provides you with step by step instructions for taking an AFM image You will learn how to configure the software for AFM mode how to set up and perform an auto approach and how to take an AFM image Chapter 4 Taking Better Images This chapter is designed to help you learn the basics of adjusting scan and feedback parameters to get better AFM images You will also learn how to take an image at a new location on the sample surface how to take an image in low voltage mode and how to save load and delete image files A special section of this chapter explains how you can operate in low voltage mode to obtain higher lateral resolution for smaller scan sizes Partl Learning to Use AutoProbe CP Basic Imaging Techniques Ch
101. ion superimposed on the signal trace The second panel represents surface topography of a calibration grating with feedback optimized 50 nm 50 nm Wy PAL AY y AC 1 um AC 1 um HIF Topography AIS HIF Topography 7 Figure 4 2 The signal trace on the Oscilloscope Display 4 12 Chapter 4 Taking Better Images To see the effect of lowering the gain 1 In Image mode lower the gain incrementally by clicking the down scrollbox arrow of the Gain scrollbox The gain value will decrease in 0 001 increments As you lower the gain watch the signal trace on the Oscilloscope Display You should see the contours of the calibration lines on the grating become gradually blurred or less defined CAUTION Do not lower the gain value all the way to zero When the gain is set to zero the feedback loop is disabled and the system will not track changes in surface features If the feedback is completely disabled the tip can be damaged if the sample surface is very rough For STM operation some finite feedback response is needed to prevent the tip from crashing into the sample When the gain is set to a low value the feedback loop is disabled and therefore cannot track surface topography In Chapter 1 of the Software Reference manual you w
102. itions Warning Caution and Note ss vi Summary of Warnings and Cautions u22u0rsenseensenseennennnnnnnnennnennennnennne non Grounding AutoProbe CP sise ix Setting the Line Voltage ss x Laser NP ne riRenereeeeiiee xi Specifications and Performance for AutoProbe CP XV ThermoMicroscopes Warranty Statement Warranty on New Systems and ACCESSOries xviii Warranty on Replacement Parts eccseseeseeceeeeeeeeceeeeesseeceeneeeaeeceeeeeaeeeee xviii Manufacturer Information xix How to Use this Manual XX A ne A ee FON Betriebssicherheit pa 22222 EIER spe xxiii Sicherheits Zer hen s ere EE E Hassett E E E E S EIEE xxiii Definitionen Warnung Vorsicht und Beachte XXIV Zusammenfassung der Warnungen und Vorsichts XXV Erdung des AutoProbe VP2 sens xxvii Einstellen der Versorgungsspannung onen xxviii Laser Sicherheits a r a EE nn EENE tin Aa TE AE es XXIX Spezifikationen und Ausf hrungen des AutoProbe CP s XXXIV ThermoMicroscopes Garantieerkl hrung eee ceseeseceeeeeceseeeeceeeeeeeseeeeeeseees xxxvii Garantie von neuen Systemen und Zubeh rteile
103. l AutoProbe CP dans la pr face ATTENTION Le choix et le contr le de la tension d alimentation doivent tre effectu s avant l enclenchement des composants de l AutoProbe CP L interrupteur pour le choix de la tension d alimentation est situ sur le panneau arri re de l AEM Le s lecteur de tension d alimentation permet un choix parmi les tensions suivantes 110 V 120 V 220 V et 240 V Pour plus d informations reportez vous la section Configuration de la tension d alimentation dans la pr face ATTENTION Ne pas ouvrir ou l unit de base du CP L AEM et l unit de base du CP utilisent des tensions potentiellement dangereuses et peuvent pr senter de s rieux dangers de choc lectrique AVERTISSEMENT ThermoMicroscopes vous demande d inspecter r guli rement les fils conducteurs du syst me AutoProbe CP afin de vous assurer qu ils ne soient pas emm l s d connect s ou endommag s Les fils conducteurs emm l s d connect s ou endommag s doivent imm diatement tre signal s l quipe de support technique de ThermoMicroscopes Ne pas utiliser l AutoProbe CP lorsque les fils conducteurs sont emm l s d connect s ou endommag s xlvii AVERTISSEMENT Tous les composants du syst me AutoProbe M5 doivent tre manipul s avec pr caution Les composants du syst me contiennent une instrumentation lectrom canique d licate qui peut facilement tre endommag
104. layed in the Image Gallery and saved on your hard disk When the Save to Buffer menu item is not selected new images are not displayed in the Image Gallery or saved on your hard disk The Save to Buffer menu item is selected by default Note You can also toggle the Save to Buffer icon to set the status of new images When the Save to Buffer icon is on new images are displayed in the Image Gallery and saved on your hard disk When the Save to Buffer icon is off new images are not displayed in the Image Gallery or saved on your hard disk Newly acquired images are stored in the directory c spmdata which is set up on your hard disk during installation You can save images to a directory other than c spmdata using the New Session dialog box To learn more about the New Session dialog box see Chapter 1 of the Software Reference manual ProScan Data Acquisition An image file name is generated automatically for each new image you acquire and is displayed beneath the image in the Image Gallery The file name consists of the date the image was taken and a sequence number which is displayed in hexadecimal format The file extension hdf shows that the image was saved using the hdf file format hierarchical data format For example the first image taken on August 15 will have the file name 08150001 hdf An icon next to the file name of an image displayed in the Image Gallery sets the save delete status of the image Practi
105. lery A diskette icon will appear next to the image file name indicating that the image was loaded from your hard disk or a diskette You can delete a new image or a previously saved image when the image is displayed in the Image Gallery Try deleting an unwanted image now 6 First click either the folder icon for new images or the diskette icon for previously saved images that is displayed next to the image file name The folder or diskette icon will change to a gray wastebasket icon indicating that the image is tagged to be deleted 7 Select Delete Files from the File menu The image will be deleted from your hard disk A white wastebasket icon should replace the gray wastebasket icon indicating that the file has been deleted 8 Clear the deleted image from the Image Gallery by selecting Clean Buffers from the File menu Any images displayed in the Image Gallery can be shared between Data Acquisition and Image Processing This sharing of the images allows you to analyze images before deciding whether to save or delete them Saving only the most useful images makes more efficient use of your hard disk space Try importing an image from Data Acquisition to Image Processing 4 32 Chapter 4 Taking Better Images 9 Select an image in the Image Gallery A green box will enclose the selected image 10 Switch to Image Processing by either selecting Image Processing from the Tools menu or clicking the Image Processi
106. light off of the sample After rotating the sample make sure that the deflection sensor is aligned and try the auto approach again If you are still having problems you can use a Digital Volt Meter window a DVM window to optimize the position of the PSPD DVM windows can be used to check instrument signals such as the signal representing the difference between voltages from the two halves of the bi cell PSPD This signal called A B should be small on the order of tens to hundreds of millivolts when the PSPD is properly aligned with the laser spot To check the A B signal follow these steps 1 Open a DVM by clicking the DVM icon 2 Click the button on the DVM to see a selection of channels or signals and select A B The display of the DVM will show the value of the A B signal given in volts or millivolts depending on the value 3 Adjust the PSPD forward backward screw to move the PSPD until the absolute value of the A B signal is less than 300 mV The laser spot should now be centered between the A and B halves of the PSPD 4 Once you have minimized the A B signal close the DVM and click the button The approach should work 3 8 Chapter 3 Taking an AFM Image You can also use aDVM to check the intensity of the reflected laser beam on the PSPD This signal called A B should have a value greater than 1 V when the intensity of the laser is optimized After optimizing the A B signal you may again
107. mages Changing the Scan Direction The sample is rastered under the probe in the x and y directions while an image is being acquired In the fast scan direction the computer collects a line of data made up of individual data points Movement in the slow scan direction positions the probe for the next line of data The X and Y option buttons set the fast scan direction When the X option button is selected the x direction is the fast scan direction Each line of data that builds up an image is collected horizontally and the slow scan direction is displayed vertically When the Y option button is selected the y direction is the fast scan direction Each line of data that builds up an image is collected vertically and the slow scan direction is displayed horizontally The X option button is selected by default Note When x is the fast scan direction data are collected from left to right by default When y is the fast scan direction data are collected from bottom to top by default You can reverse the direction in which data are collected for example from left to right to right to left when x is the fast scan direction using controls in the Input Configuration dialog box For details see Part III Software Reference of this User s Guide To change the scan direction do the following 1 Click the Y option button to set as the fast scan direction 2 To start anew scan with y as the fast scan direction click the button In g
108. mallest features you can image using a particular tip in a particular operating mode is to optimize all of the other factors that limit the lateral resolution and then try to image small features on a sample Assuming a small scan size and good tip conditions the next factor most likely to limit the lateral resolution of your images is the resolution of the x y detector which is on the order of 20 nm This limit only applies if ScanMaster is on Thus if you are trying to achieve the highest lateral resolution for small scan sizes you may want to turn ScanMaster off Note ScanMaster is not available with 5 um scanners Finally the digitized step size of the scanner in the fast scan direction also limits the lateral resolution of your images The voltage applied to the scanner is digitized and the number of possible voltage values depends on the number of bits of the digital to analog converter the DAC used to send the voltage signal to the scanner AutoProbe CP uses 20 bit DACs for sending the voltage signal to the scanner so the voltage can be expressed as a 20 bit number which has 220 possible values The total range of motion of the scanner can therefore be divided into 229 digitized steps If you are in high voltage mode with a 100 um scanner the minimum step size of the scanner is 100 um 220 steps 1 0 Alstep For a 100 scanner and a 20 bit digital to analog converter the resolution as limited by the step size of the scanne
109. mit in the z direction A green indicator light near the top of the window flashes while the Z stage is moving When the system has finished the reset stage process the green light will stop flashing and the button will be enabled 5 Click the button when the reset stage process is complete A number representing the z coordinate of the stage should appear in the Z um textbox in Move mode Once the Z stage has been reset you can practice moving the probe head up and down using the z direction pad in Move mode The z direction pad controls both the speed and the direction of the probe head To move the probe using the z direction pad do the following 1 Practice moving the probe toward the sample The direction the probe moves in z is set by the position of the cursor on the z direction pad The upper portion of the z direction pad moves the probe in the positive z direction or away from the sample The lower portion of the z direction pad moves the probe in the negative z direction or toward the sample Improper use of the controls in Move mode can result in severe damage to your instrument For instance you can ruin the probe tip damage the sample and break the scanner tube Before you use these controls complete the tutorials in Part I of this User s Guide In these tutorials you learn how to use Move mode controls You can also refer to Part III Software Reference of this User s Guide if you want information about a
110. n CAUTION Dont let the metal disk snap down hard on the magnetic sample stub The piezoelectric scanner mounted underneath the sample holder is a ceramic material that can easily break under mechanical shock 2 18 Chapter2 Setting Up to Take an Image 5 Gently slide the disk onto the sample holder as illustrated in Figure 2 10 Position the disk so that the sample is centered on the sample holder sample on mounting disk sample holder Figure 2 10 Sliding the sample mounting disk onto the sample holder 6 Use the z direction pad to lower the Z stage to within several millimeters of the sample surface 7 Move the CP optics back into position after lowering the Z stage Now you are ready to load a prealigned AFM chip carrier in the probe head Loading a Probe 2 19 Loading a Probe The step by step instructions in this section show you how to load a contact Ultralever probe in the probe head Each contact Ultralever probe comes pre mounted on a ceramic chip carrier These carriers come in a box of 25 and are disposable The probe is a microfabricated cantilever chip shown in Figure 2 11 below The size of the cantilevers in Figure 2 11 is greatly exaggerated cantilever chip chip carrier probe spring clip til Underside of cantilever cartridge shown points down when cartridge is correctly inserted lt 3 balls Figure 2 11 Microfabricated cantilever chip mounted
111. n The Image Gallery in Chapter 1 of the Software Reference manual By default all newly acquired images are displayed in the Image Gallery and these images are automatically saved on your hard disk You can load images that have been previously saved on your hard disk or a diskette to compare them with new images The Image Gallery along with the Active Display and the Import View are shown in Figure 4 9 below Active Display Image Gallery 500 t EEE un TE Import Zm 2 2um div Import View Figure 4 9 The Image Gallery The number of images that can be displayed in the Image Gallery is only limited by the amount of space available on your hard disk Up to 28 images can be displayed on the screen at one time and scrollbars allow you to scroll through all of the stored images You can display the Image Gallery using a partial or full screen display 4 30 Chapter 4 Taking Better Images To scroll through the images displayed in the Image Gallery do the following 1 Click and drag the scrollbar up or down to scroll through images displayed in the Image Gallery The Save to Buffer menu item under the Mode menu sets the status of newly acquired images When the Save to Buffer menu item is selected new images are disp
112. n end your AutoProbe session now as you normally do and return to the tutorials at another time 4 34 Chapter 4 Taking Better Images
113. n line the effective tip radius the x y detector resolution if ScanMaster is enabled the digitized step size of the scanner in the fast scan direction The scan size divided by the number of data points per scan line is one factor that limits the lateral resolution If a 10 um image is taken with 256 x 256 data points then one data point is taken every 10 um 256 or 391 which represents the limit of the lateral resolution Lateral resolution will be a factor of 2 better for a 10 um image taken with 512 x 512 data points However it will take twice as long to collect the data since there are twice as many lines of data In order to improve the lateral resolution as limited by the scan size without increasing the time it takes to take an image you can use a smaller scan size For example for a 256 x 256 image and a scan size of 500 A 0 05 um the lateral resolution limit improves to 500 A 256 or 1 95 A However the lateral resolution can only be as good as the largest limiting factor If you are using small scan sizes below about 5 um the largest limiting factor is not likely to be the scan size divided by the number of data points per scan line As a rule of thumb do not select a scan size that is smaller than the lateral resolution as limited by any of the factors described here multiplied by the number of data points per scan line Selecting a smaller scan size will only result in adjacent data points containin
114. nce the system is very sensitive to these adjustments 8 After adjusting the forward backward position of the PSPD to obtain a green light check the laser intensity indicator again If you see only one red light or no red light turn the PSPD up down adjustment screw until you see 3 or 4 red lights When the green light is on and 3 or 4 red lights are lit the deflection sensor is properly aligned You are now ready to move on to Chapter 3 which describes how to configure the system software perform an approach and take an image The last section of this chapter explains how to end your AutoProbe session if you would like to stop for now and continue with the tutorials at a later time Aligning the Deflection Sensor 2 35 The Multitask Probe Head The following steps describe how to align the deflection sensor for the multitask probe head To align the deflection sensor you must first steer the laser beam so that it reflects off of the back of the cantilever Then you move the position sensitive photodetector PSPD so that it is aligned with the laser spot To align the deflection sensor for the multitask probe head follow these steps 1 Make sure that the power to the probe head is on If the power to the probe head is turned off turn it on by clicking the Head ON icon If the LASER ON OFF switch is in the OFF position turn it to the ON position 2 Set the AFM STM switch of the multitask probe head to
115. ng icon X The Image Processing program will open and the selected image will appear in the Active Display 11 Exit Image Processing by clicking the Exit button at the top right of the window To learn more about ProScan Image Processing refer to Chapter 2 of the Software Reference manual ProScan Image Processing You can view a list of scan parameters associated with an image and you can read or add comments to an image displayed in the Image Gallery using the View dialog box You can also change the contrast level of an image in the View dialog box The View dialog box is displayed when you double click an image in the Image Gallery Open the View dialog box for an image now 12 Double click an image in the Image Gallery The View dialog box will open 13 Review the scan parameters listed in the Parameters listbox 14 Practice entering comments in the Comments textbox You can either overwrite the comments in the original image file or create a duplicate image file with the new comments To overwrite the comments in the original image file click the button after you add to or change the text and then click the button To create a duplicate copy of the image file with the new comments click the button after you add to or change the text and then click the button The Save As dialog box will open allowing you to save the image file to any pre existing directory Enter a name for the image file in the File Name
116. oProbe session at a later time go to the next section Ending Your AutoProbe Session 2 38 Chapter 2 Setting Up to Take an Image Ending Your AutoProbe Session To end your AutoProbe session complete these steps 1 Exit ProScan by selecting Exit from the File menu The Exit menu item is only enabled when the power to the probe head is turned off If the power to the probe head is turned on turn it off now by clicking the Head ON icon and setting the Laser On Off switch to the Off position CAUTION Be sure to move the sample away from the probe using the z direction pad before turning off the power to the probe head 2 A message box will appear reminding you to close any open ThermoMicroscopes DVMs ThermoMicroscopes Digital Voltmeter windows Since you have not opened any DVM windows in this working session just click the button A DVM window is a software tool that is described in Part III Chapter 1 or this User s Guide 3 On the taskbar you should see the AutoProbe SPM Controller button Right click this button once to view its pop up menu then select Close from the menu Note If you do not see the AutoProbe SPM Controller button hold down the Alt key on your keyboard While holding down the Alt key press and release the Tab key until the AutoProbe SPM Controller window is displayed on the screen Click the Close button X at the top right of the window 4
117. obe SPM Controller icon hold down the Alt key on your keyboard While holding down the Alt key press and release the Tab key until the AutoProbe SPM Controller window is displayed on the screen Click the Close button X at the top right of the window 4 When you close the AutoProbe SPM controller window a message box appears asking you if you would like to Abort Retry or Ignore Click the button to close the AutoProbe SPM Controller Chapter 4 Taking Better Images 4 2 Chapter 4 Taking Better Images Introduction In Chapter 3 you learned how to configure the software how to perform an auto approach and how to take AFM images This chapter takes you several steps further It is designed to answer some of the questions you may have after taking an image What are the scan and feedback parameters and how do I optimize them to get best image How do take an image at a new location on the sample surface How do I save delete and retrieve images After completing this tutorial you will know techniques for taking a better image including the following how to set scan parameters and choose a reasonable range of values how to set feedback parameters and optimize the operation of the z feedback loop how to select an image size how to take an image at a new location on the sample surface how to position a follow up scan using an image you just took how to use low vol
118. on probe cartridge At the end of the chip are two cantilevers probably too small for you to see by eye At the end of each cantilever is a sharp tip One of these tips will be brought into contact with your sample and your sample will be raster scanned beneath it In order to load the small chip carrier onto the probe head you must first mount the chip carrier on a probe cartridge You can then easily insert the cartridge in the probe head The chip carrier is designed to fit snugly and securely in the cartridge mount The cartridge also is designed to slide securely in place in the probe head 2 20 Chapter 2 Setting Up to Take an Image How Does AFM Work Atomic force microscopy in contact mode measures the repulsive forces between atoms in the probe tip and atoms in the sample surface The tip is located at the end of a flexible cantilever As the tip responds to the peaks and valleys of the sample surface the cantilever bends A deflection sensor in the probe head monitors this bending or deflection of the cantilever The scanner then moves the sample up or down in order to keep the deflection constant This up and down motion of the scanner matches the surface topography and is used to generate an image of the surface If the probe cartridge is already installed in the probe head you will first need to remove it To remove the probe cartridge complete Steps 1 and 2 If no probe cartridge is installed skip to Step 3
119. onents for AutoProbe CP The AutoProbe CP Instrument The AutoProbe CP instrument is the central component of the AutoProbe CP system Its primary components are a probe head a manual XY stage a motorized z stage and a scanner These components are illustrated in Figure 1 3 below Tul probe head probe cartridge scanner sample holder sample Z stage Figure 1 3 Location of AutoProbe CP instrument controls System Components 1 5 The components labeled in Figure 1 3 are described in the sections below The probe head contains a deflection sensor which consists of a laser diode a mirror and a position sensitive photodetector PSPD The probe head type depends on your system configuration Note the following differences For the standard system configuration there are three probe head types available AFM AFM NC AFM and AFM LFM The AFM probe head comes with the standard configuration and is for operation in AFM mode The AFM probe head can be upgraded to include STM mode The AFM NC AFM probe head is optional and is for operation in AFM NC AFM IC AFM and MFM modes The AFM LFM probe head is also optional and is for operation in AFM and LFM modes For the multitask system configuration there is only one probe head type multitask The multitask probe head is used for operation in the following modes AFM NC AFM IC AFM MFM LFM and STM The multitask probe head has two switches an AFM STM
120. ore VOW B nin hs avs ee Rte andre rte fs 3 2 Eonfiguning the SoftWare ebenen et 3 3 Approaching the Sample ss 3 5 Setting Up for an Auto Approach 3 5 Performing an Auto Approach ss 3 6 Troubleshooting Tips en 3 6 Taking an AFM nn en nent ramener ete 3 9 Starting and Stopping SaN si EEKE SIRE ernennen 3 11 Where to Go from Here Hr kennen 3 12 Contents yi Contents Chapter 4 Taking Better 1 4 1 Introd ctio A te Ri is Bele a BEA i ae a 4 2 Before You Beginn a 4 2 A Brief Four of Image Mode este eat ent 4 3 Adjusting Scan Parameters 4 5 Adjusting the Scan Size siin r E 4 5 Adjusting the Scan ar es EE E isn 4 6 Changing the Scan Direction siriasi aign nenn 4 8 Adjusting the X and Y Slope ss 4 9 Adjusting Feedback Parameters ss 4 11 Optimizing the Servo Gain 4 11 Adjusting the S t Pointes eto este haste 4 14 Selecting a Number of Data Points 4 15 Taking an Image at a New Location ss 4 16 Taking Images in Low Voltage Mode ss 4 19 Why You Need Low Voltage Mode Lateral Resolution 4 20 Switching to Low Voltage Mode 4 22 Taking High Resolution Topography Im
121. oscopes Korea 16 rue Alexandre Gavard Suite 301 Seowon Building 1227 CAROUGE 395 13 Seokyo dong Mapo ku Geneva Switzerland Seoul Korea T 41 22 300 4411 T 82 2 325 3212 F 41 22 300 4415 F 82 2 325 3214 If you return system components to ThermoMicroscopes for service that have come into contact with harmful substances you must observe certain regulations Harmful substances are defined by European Community Countries as materials and preparations in accordance with the EEC Specification dated 18 September 1979 Article 2 For system components that have come into contact with harmful substances you must do the following Decontaminate the components in accordance with the radiation protection regulations Construct a notice that reads free from harmful substances The notice must be included with the components and the delivery note How to Use This User s Guide The User s Guide to AutoProbe CP is divided into three easy to use parts The parts include the following PartI Learning to Use AutoProbe CP Basic Imaging Techniques PartIl Learning to Use AutoProbe CP Advanced Techniques Part Il Software Reference The contents of the above listed parts are described in detail in the sections below Part 1 Learning to Use AutoProbe CP Basic Imaging Techniques Part I of this User s Guide Learning to Use AutoProbe CP Basic Imaging Techniques contains an introductory chapter and three hand
122. ou to see about three lines of the grating With a scan size of 10 um you may only see one line of the grating 4 6 Chapter 4 Taking Better Images To adjust the scan size do the following 1 Position the cursor over the number in the Size textbox and double click to highlight that number Or click and drag the cursor to select the number 2 Type in a new scan size in microns and then press the Enter key on your keyboard Alternatively use the scrollbox arrows to scroll through a range of values You don t need to type the Um units 3 Start anew scan with this scan size by clicking the button 4 Now try a smaller scan about half as wide You should be able to see the change in your image By choosing successively smaller scans you can zoom in on a region of interest An alternative way to change the scan size involves varying the dimensions of the green cursor box in the Import View This method is described in a later section Taking an Image at a New Location Adjusting the Scan Rate The scan rate sets the frequency of the back and forth rastering of the sample beneath the probe and can be adjusted while you are acquiring an image A general rule of thumb is that slower scan rates give you better resolution because the feedback system has time to respond while faster scan rates save you time On the other hand if the scan rate is too fast the feedback loop may not have time to respond to chang
123. ptics and the optics are focused on the sample you can lower the probe head until the cantilever is almost in focus but not in focus At this point the cantilever will be close to but not touching the sample surface CAUTION Be careful not to lower the probe head too far If the probe tip hits the sample surface both the probe tip and the sample will be damaged Performing an Auto Approach To perform an auto approach follow these steps 1 Check the alignment of the deflection sensor by looking at the laser position and intensity indicator on the probe head If realignment is necessary follow the procedures of the section Aligning the Deflection Sensor in Chapter 2 2 Click the button in Move mode to initiate an auto approach 3 6 Chapter 3 Taking an AFM Image The first noise you hear is the system lifting the tip before the approach Then the system decreases the tip to sample spacing The auto approach stops when the force on the cantilever matches that represented by the set point value displayed in Image mode Note The set point parameter is described in Chapter 4 For now there is no need to change the set point parameter its default value can be used In Chapter 4 you will learn more about how to select a value for the set point parameter If the sample surface is in focus on the video monitor then you will see the cantilever come into focus as the probe is brought into contact with the sample durin
124. r 2 to set up the instrument for taking an image WARNING This instrument contains a laser Use of controls or adjustments or performance of procedures other than those specified herein could result in hazardous laser light exposure Configuring the Software 3 3 Configuring the Software The procedures for configuring the system software prompt the instrument to load files that correspond to the installed hardware For example files containing information about the probe head the scanner the probe and the mode of operation are loaded When you configure the system software you are selecting the files that will be loaded This section describes how to configure the system software for operation in contact AFM mode 1 If the power to the probe head is turned on turn it off now by clicking the Head ON icon T and setting the LASER ON OFF switch to the OFF position 2 Select the Configure Parts menu item of the Setup menu Alternatively click the Configure Parts icon eS The ProScan Database Configuration dialog box will open Note Configure Parts menu item or alternatively the Configure Parts icon is only enabled if the probe head is turned off When the probe head is turned back on the system is prompted to load files pertaining to the installed hardware and mode of operation Therefore enabling the Configure Parts menu item only when the probe head is turned off ensures that files a
125. r 3 Taking an AFM Image 3 2 Chapter 3 Taking an AFM Image Introduction In Chapter 2 you learned how to set up your system for taking an AFM image This chapter guides you through configuring the system software approaching the sample and taking an image In Chapter 4 you will learn how to set and optimize scan and feedback parameters explore different areas on the sample surface and save delete and retrieve image files Note Throughout this chapter the text refers to the standard system configuration of AutoProbe CP Procedures are similar for the multitask system configuration unless otherwise noted Before You Begin This chapter assumes you have already read Chapter 1 AutoProbe CP Basics and Chapter 2 Setting Up to Take an Image Chapter introduces you to AutoProbe CP Chapter 2 includes information on how to start AutoProbe CP and how to load a probe head a scanner a sample and a probe This chapter also assumes that the probe is positioned over the sample ready for an auto approach and the deflection sensor is aligned It also assumes that your sample is the calibration grating provided with your system Using a calibration grating is recommended because the features of a grating are relatively easy to identify For the multitask head the AFM STM switch should be in the AFM position and the LFM NC AFM switch should be in the LFM position If this is not the case follow the instructions in Chapte
126. r Reparatur oder Wartung eingehende Ger te m ssen mit deutlich sichtbarem Vermerk Frei von Schadstoffen versehen sein Derselbe Vermerk ist auch auf dem Lieferschein und Anschreiben anzubringen xli ber die Benutzung dieser Bedienungsanleitung Die Bedienungsanleitung zum AutoProbe 5 ist in drei einfach zu ben tzende Abschnitte unterteilt Die Abschnitte beinhalten das folgende Abschnitt I Lernen das AutoProbe CP zu gebrauchen Grundaufnahmetechniken Abschnitt II Lernen das AutoProbe CP zu gebrauchen Fortgeschrittene Aufnahmetechniken Abschnitt III Software Verweis Die Inhalte der oben aufgeliesteten Abschnitte sind im Detail in den folgenden Sektionen beschrieben Abschnitt I Lernen das AutoProbe CP zu gebrauchen Grund Aufnahmetechniken Abschnitt I dieser Bedienungsanleitung Lernen das AutoProbe CP zu gebrauchen Grund Aufnahmetechniken beinhaltet ein Einf hrungskapitel und drei praktische Schulungen Kapitel 2 bis 4 Beim Durcharbeiten der Schulungskapitel lernen sie die Grundkentnisse welche ben tigt werden um AFM Bilder aufzunehmen Beginnen sie mit lesen des Kapitel 1 AutoProbe CP Basics zur Einf hrung in die Systemkonfigurationen und Komponenten des AutoProbe CP Arbeiten sie sich dann durch die Schulung in Kapitel 2 Setting Up to Take an Image lehrt sie die Systemharware und Software f r AFM Mode zu konfigurieren Genauer gesagt werden sie die folgenden Prozeduren lernen das Verb
127. r T E nn Motte a meee 1 8 The Acoustic Isolation Chamber 1 9 ProScan Data Acquisition siennes 1 10 ProScan Image Processing 1 11 Working in the Windows 95 Environment 1 12 Definitions Parts of a Screen uceeeeeeeeeeeeenesenennnennnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnn 1 12 Chapter2 Setting Up to Take an 1 2 1 Introduction 232222 Re nn Rie ee isn PS A aot Cat te ie Gaul 2 2 Before ess er ne nd er ER ns en As at is 2 3 Cable Connections ss faste st ne ais ST 2 4 Starting AutoProbe CP ennsensssnsennsenssonsonnsonsennennsennernossnennnenonsonsnensonnnnsnnsons nennen 2 6 Controlling the XY and Z Stages 2 8 Removing and Installing the Probe Head 2 12 Removing and Installing the Scanner 2 15 Loading a Sample esse bsl isn 2 18 Loading a Probe sisi ns te nr te eG t Mets 2 20 Using the Optical etre E A Med 2 26 Using the AutoProbe CP Optics 2 26 Using the Separate Optical Microscope 2 29 Aligning the Deflection Sensor 2 31 The AFM Probe Head nine eine 2 33 The Multitask Probe Had een 2 36 Ending Your AutoProbe Session ss 2 39 Where to Go from Here ea nie e Ri an A I SARA nt 2 40 Introduction its MM Aint Gh nt Mere Gases Ga Rates assed 3 2 Bef
128. r is always 1 0 A Since 1 0 A is much smaller than the typical interaction area between the tip and the sample for modes other than STM mode the digitized step size of the scanner is not likely to be the factor limiting the lateral resolution of your images However low voltage mode prevents the step size of the scanner from limiting the lateral resolution of your images STM or other by reducing the maximum scan width from 100 um to 25 um Since the same number of digitized voltage steps is used to produce a smaller range of motion the resolution due to the scanner step size improves to 25 um 220 or 0 24 Using low voltage mode you are guaranteed that the step size of the scanner will not limit the lateral resolution of your images 4 22 Chapter 4 Taking Better Images Switching to Low Voltage Mode Now that you understand how low voltage mode works to improve lateral resolution for small scan sizes you are ready to switch to low voltage mode and take an image CAUTION The z scanner ranges in high and low voltage modes do not overlap the scanner s z range in low voltage mode is more extended To avoid damage to the probe tip and sample when you select low voltage mode you must raise the Z stage a short distance using the z direction pad to keep the probe tip clear of the sample surface For CP systems be sure to move the optics out of the way to protect the objective lens before you raise the Z stage Move the optic
129. re updated before an image is taken 3 Configure the system software for taking an AFM image To do this make the following selections in the ProScan Database Configuration dialog box For the standard configuration Head type Select the file that names the type of probe head you are using For the AFM probe head you select AFMSTM Scanner Select the file that has the scanner calibration values for the scanner you are using Head mode AFM selects AFM mode Beam bounce cantilever Select the file that corresponds to the cantilever you are using For example you would select ULO6B if you are using the B cantilever of a contact AFM Ultralever Electrochemistry ON OFF OFF Voltage mode HI selects a high voltage mode of scanning Note AFMSTM is selected because the AFM probe head can be upgraded to include STM mode thereby making the probe head an AFMSTM probe head 3 4 Chapter 3 Taking an AFM Image For the multitask configuration Head type Select the file that corresponds to the positions of the switches on top of the multitask probe head For this tutorial the AFM STM switch should be set to the AFM position and the LFM NC AFM switch should be set to the LFM position for operation in contact AFM mode Select the file that reads AFMLFM in the software Scanner Select the file that has the scanner calibration values for the scanner that you are using Head mode AFM selects AFM mod
130. reen The green light is at the center of the indicator When the PSPD is correctly positioned the center green light is on When the PSPD is not correctly positioned one or more red lights will be on Figure 2 26 shows how the PSPD adjustment screws move the PSPD laser _ position indicators NV 99 green 9 N pr sm lt el re 4 gt ra laser CD up down laser forward backward Figure 2 26 Adjusting the PSPD position up down and forward backward When the back or front red light is on adjust the PSPD forward backward screw For the back red light rotate the screw counterclockwise CCW For the front red light rotate the screw clockwise CW When the left or right red light is on adjust the PSPD up down screw For the left red light rotate the screw clockwise CW For the right red light rotate the screw counterclockwise CCW After making adjustments to the up down position you may need to readjust the forward backward position and vice versa Near the correct position the red lights are very sensitive and you may find it difficult to position the PSPD so that all of the red lights stay off You are now ready to move on to Chapter 3 which describes how to configure the system software perform an approach and take an image If you d like to stop for now and Aligning the Deflection Sensor 2 37 continue your Aut
131. repairs performed at ThermoMicroscopes s facility the customer must contact ThermoMicroscopes in advance for authorization to return the equipment and must follow ThermoMicroscopes s shipping instructions If returned the equipment must be insured ThermoMicroscopes will supply replacement parts on loan whenever possible to enable field repair by customers with minimum downtime once the system is operational the defective parts are then returned to ThermoMicroscopes Specifically excluded from this warranty are all consumable parts including but not limited to Microlevers Ultralevers and tips The warranty of equipment sold for use outside the United States depends on the condition of each sale Equipment which has been subjected to misuse accident abuse disaster unreasonable use damage caused by third party systems with which the equipment is used operational error neglect unauthorized repair alteration or installation is not covered by this warranty Warranty on Replacement Parts ThermoMicroscopes warrants all replacement parts to be sold free from defects in materials or workmanship for a period of 90 days from the date received by the customer ThermoMicroscopes will repair or replace at its discretion such parts when returned to ThermoMicroscopes Customers must contact ThermoMicroscopes in advance to obtain authorization to return parts and follow ThermoMicroscopes s shipping instructions Except as herein p
132. rly installed WARNING Use of controls or adjustments or performance of procedures other than those specified herein could result in hazardous laser light exposure Figure 0 2 shows the two laser warning labels of the probe head Strict observance of these laser warning labels is required CAUTION LASER LIGHT DO NOT STARE INTO BEAM gt K 0 2 mW AT 600 700 nm CLASS II LASER PRODUCT CLASS 2 PER EN60825 1 1994 Figure 0 2 Laser warning labels of the probe head The left warning label in Figure 0 2 above specifies that the probe head is a Class II laser product per 21 CFR 1040 10 and 1040 11 The right warning label in Figure 0 2 above specifies that the scanning head is a Class 2 laser product per EN60825 Figures 0 3 through 0 7 below show the location of all instrument controls and indicators pertaining to laser operation for AutoProbe CP systems They also show the locations of all laser safety warning labels the aperture label and the compliance label xii Preface laser power laser laser on off switch position intensity N video display indicators indicators laser bean steering screws NA V green prism PSPD je up down U PSPD forward backward CAUTION LASER LIGHT DO NOT STARE INTO 0 2 mW AT 600 700 nm CLASS II LASER PRODUCT aH AVOID EXPOSURE LASER LIGHT IS EMITTED FROM THIS APERTURE PER EN608
133. rovided seller makes no warranties express or implied and seller expressly excludes and disclaims any warranty of merchantability or fitness for a particular purpose Under no circumstances shall ThermoMicroscopes be liable for any loss or damage direct special indirect or consequential arising from the use or loss of use of any product service part supplies or equipment Nor shall ThermoMicroscopes be liable under any legal theory including but not limited to lost profits down time goodwill damage to or replacement of equipment or property and any cost of recovering reprogramming or reproducing any program or data stored in or used with ThermoMicroscopes products xviii Preface Some states do not allow limitations on the period of time an implied warranty lasts and or the exclusion or limitation of special incidental or consequential damages so the above limitations and or exclusions may not apply to you This warranty gives you specific legal rights and you may also have other rights which vary from state to state Manufacturer Information AutoProbe CP systems contain no user serviceable parts All service issues should be addressed to your local ThermoMicroscopes representative ThermoMicroscopes USA ThermoMicroscopes USA 1171 Borregas Avenue 6 Denny Road No 109 Sunnyvale CA 94089 Wilmington DE 19809 T 408 747 1600 T 302 762 2245 F 408 747 1601 F 302 762 2847 ThermoMicroscopes SA ThermoMicr
134. s F1 for Help 10 000 dz 00 000 Figure 4 1 The Image mode window Below is a brief description of the controls on the screen and their functions Title Bar The Title bar displays the file names of the files currently loaded in the software These file names should represent the hardware components you have installed If this is not the case then you should reconfigure the software as described in the section Configuring the Software of Chapter 3 Menu Bar The Menu bar contains drop down menus that contain menu items These menu items give you access to instrument controls Toolbar The Toolbar contains icons that represent the most frequently used menu items in the Menu bar 4 4 Chapter 4 Taking Better Images Oscilloscope Display The Oscilloscope Display displays in real time the signal trace as an image is built up in the Active Display Monitoring the signal trace helps you to optimize scan and feedback parameters Scan and Feedback Controls Scan controls allow you to adjust scan parameters such as the scan size and scan rate Feedback controls allow you to adjust feedback parameters such as the set point and gain to optimize the operation of the z feedback loop In this tutorial you will learn how to choose reasonable values for these and other parameters Active Display The Active Display is where an image is built up during a scan Import View The Import View allows you to view an image
135. s by rotating the swing arm away from the probe head When you switch between voltage modes the z position of the scanner changes in response to a change in the voltages applied to the scanner In some cases the change in voltages may cause the probe to crash into the sample surface Therefore you must move the probe away from the sample at least 5 um before switching between voltage modes To switch from high to low voltage mode follow these steps 1 Make sure you are in Image mode 2 Enter 0 in both the X and Y Offset textboxes to set the scanner coordinates to 0 0 3 Switch to Move mode 4 Move the probe about 5 um away from the sample using the z direction pad to keep the probe clear of the sample surface 5 Turn off the power to the probe head by deselecting Head ON under the Mode menu or by clicking the Head ON icon 6 Select the voltage mode you are switching to High Voltage or Low Voltage from the Mode menu Note You can also change the voltage mode by using the ProScan Database Configuration dialog box Refer to the section Configuring the System Software in Chapter 3 of this manual for more information on using the ProScan Database Configuration dialog box Taking Images in Low Voltage Mode 4 23 7 Turn on the power to the probe head by selecting Head ON from the Mode menu or by clicking the Head ON icon 8 Click the button to perform an auto approach
136. s d crites dans ce manuel ne sont pas suivies scrupuleusement Symboles de s curit Le tableau 0 1 pr sente les symboles utilis s tout au long de ce manuel d utilisation ainsi que sur le syst me AutoProbe CP Vous devrez vous familiariser avec leurs symboles et d finitions car elles sont utilis es pour vous mettre en garde des probl mes li s la s curit lors de l utilisation de l AutoProbe CP Tableau 0 1 Symboles de s curit et leur d finition Symbole D finition Source de courant continu Source de courant alternatif Source de courant alternatif avec une composante continue BZ Source de courant alternatif triphase Borne de mise la masse terre D Borne conductrice isol e 77 Borne connect e au ch ssis ou la structure Indique un niveau quipotentiel Interrupteur enclench Symbole IN A S curit lors de l utilisation xlv Table 0 1 suite Symboles de s curit et leur d finition D finition Interrupteur d clench Equipement prot g par une isolation renforc e ou par une double isolation Se r f rer la documentation Indique un risque de choc lectrique D finitions ATTENTION AVERTISSEMENT et REMARQUE Ces trois termes sont utilis s dans ce manuel d utilisation pour vous mettre en garde des probl mes li s la s curit lors de l utilisation de l AutoProbe CP ATTENTION AVERTISSEMENT ET REMARQU
137. s on tutorials Chapters 2 through 4 By working through the tutorial chapters you will learn the basic skills needed to set up the instrument and to take an AFM image Start by reading Chapter 1 AutoProbe CP Basics for an introduction to the system configurations and the components of AutoProbe CP Then work through the tutorial in Chapter 2 Setting Up to Take an Image to learn how to set up the system hardware and software for AFM mode More specifically you will learn the procedures for connecting cables removing and installing a probe head and a scanner and loading a sample and a probe Chapter 3 Taking an AFM Image guides you through setting up the system software approaching the sample and taking an AFM image Chapter 4 Taking Better Images teaches you how to optimize scan and feedback parameters to take higher quality images and how to save and retrieve images Part Il Learning to Use AutoProbe CP Advanced Techniques Part II of this User s Guide Learning to Use AutoProbe CP Advanced Techniques includes hands on tutorials for operation in the following modes NC AFM IC AFM MFM STM and LFM It also includes tutorials that introduce you to advanced capabilities of AutoProbe CP such as force vs distance and current vs voltage data acquisition and scanner calibration Chapter 1 NC AFM IC AFM and MFM Imaging provides step by step instructions for taking NC AFM IC AFM and MFM images Chapter 1 al
138. s to the sample holder If you are using AutoProbe CP Optics move the objective lens out of the way of the probe head by rotating the swing arm towards you CAUTION You must move the objective lens out of the way before loading a sample Otherwise when you raise the probe head it will hit the objective lens damaging both the probe head and the lens Use the z direction pad to raise the probe head The z direction pad is described in the section Moving the XY and Z Stages earlier in this chapter Raise the probe head to provide ample clearance for loading a sample For a sample use the calibration gratings provided with your instrument The standard configuration comes with a 1 um grating The multitask configuration comes with a 10 um grating The grating size refers to the spacing between the calibration lines Secure the sample to one of the sample mounting disks supplied with the instrument A piece of double stick double sided tape can be used to attach the sample to the disk Next you will slide the sample mounting disk onto the sample holder as shown in Figure 2 10 The sample holder is a small round stub attached to the top of the scanner The magnet of the sample holder holds the sample mounting disk securely in place The scanner located underneath the sample holder where you can t see it is the element that rasters your sample back and forth under the probe head while an image is being take
139. screws Am Tastkopf befinden sich zwei PSPD Schrauben auf ab und forw rts r ckw rts Diese Schrauben justieren die Position des PSPD s im Tastkopf aH um das reflektierte Laserlicht auf dem Photodetektor zu zentrieren Die forw rts r ck w rts Justierungsschraube kann an allen Tastk pfen zur PSPD Einstellung benutzt werden Die auf ab Justierung kann haupts chlich f r den AFM LFM Tastkopf der Standardkonfiguration benutzt werden Laser intensity indicators Zeigt die Intensit t des reflektierten Laserlichtes das auf den PSPD Positions sensiblen Photodetektor trifft an Betriebssicherheit xxxi Es gibt drei Tastk pfe f r die Standardkonfiguration AFM AFM NC AFM AFM LFM Die verschiedenen Tastk pfe haben verschiedene Indikatoren Beachte Der AFM Tastkopf kommt mit der Standardsystemkonfiguration Die AFM NC AFM und AFM LFM Tastk pfe sind zus tzlich zur Standard systemkonfiguration erh ltlich Die Indikatoren des AFM Tastkopfes sind in Bild 0 3 oben eingezeichnet Bei diesem Tastkopf ist die maximale Laserlichtintensit t die die PSPD teffen kann erreicht wenn die Reihe der vier roten Lichter erleuchtet ist Die Indikatoren der AFM NC AFM und AFM LFM Tastk pfe sind in Bild 0 4 unten eingezeichnet Bei diesen Tastk pfen ist die maximale Laserlichtintensit t die die PSPD teffen kann erreicht wenn die Helligkeit des mittleren gr nen Lichtes welches eine ver nderliche Helligkeit aufweisst maxim
140. set If the Z stage needs to be reset there will be dashed lines instead of coordinates in the Z um textbox in Move mode Resetting the Z stage synchronizes its position with the coordinate system of the software After you reset the Z stage the dashes should be replaced by a number that represents the z position of the stage in microns In general the Z stage only needs to be reset when you first enter Data Acquisition To reset the Z stage 1 When the ProScan program opens the probe head is turned on This means that the power to the probe head is turned on Turn off the power to the probe head by deselecting the Head ON menu item of the Mode menu Alternatively you can turn the probe head off or on by clicking the Head ON icon of the Toolbar The Menu bar and the Toolbar are indicated in Figure 2 3 above Turning off the power to the probe head enables the Reset Stage menu item of the Setup menu 2 From the Setup menu select Reset Stage to open the Reset Stage dialog box Note window appears warning you to move the optics or any other obstacle to stage motion out of the way of the Z stage If you are using CP optics move the objective lens out of the way of the probe head by rotating the swing arm towards you Then click the button Controlling the XY and Z Stages 2 9 3 Click the Z Head checkbox if it is not already selected 4 Click the button The probe head should move to its upper li
141. so describes the principles behind NC AFM IC AFM and MFM modes of operation XX Preface Chapter 2 STM Imaging guides you through taking an STM image In this chapter you learn procedures for preparing an STM tip and using a STM cartridge setting up the hardware and software for operation in STM mode and taking an STM image Chapter 3 LFM Imaging leads you through taking simultaneous LFM and AFM images Chapter 3 also includes information on how LFM images are produced and the usefulness of having both LFM and AFM images available Chapter 4 Force vs Distance Curves describes how to use the F vs D Spectroscopy window of ProScan Data Acquisition to generate force vs distance curves at x y locations on the sample surface A force vs distance curve is a plot of the vertical force that the tip applies to the cantilever as a function of the tip to sample distance Variations in the shape of force vs distance curves provide information about the local elastic properties of the sample surface Chapter 5 I V Spectroscopy teaches you how to use the I V Spectroscopy window of ProScan Data Acquisition to generate current vs voltage I V and dI dV curves These curves are used to provide important information about surface electronic properties Chapter 6 Scanner Calibration describes how the scanner of your AutoProbe CP instrument works and how to calibrate it to maintain its optimal performance Part Ill Soft
142. specific control in Move mode CAUTION Be extremely careful when you use the z direction pad to move the probe toward the sample If you move the probe too close to the sample you can crash and ruin the probe and the sample and break the scanner tube To do this place the cursor on the lower portion of the z direction pad and then click and hold the mouse button When the probe is a few millimeters away from the sample release the mouse button to stop movement of the probe Z Try varying the speed of the probe 2 10 Chapter2 Setting Up to Take an Image The speed of the probe is set by the position of the cursor relative to the center 0 of the z direction pad The probe has zero velocity when the cursor is at the center ofthe pad The farther the cursor is from the center of z direction pad the faster the probe motion will be Click and hold the cursor farther from and closer to the center line of the z direction pad 3 Move the probe away from the sample To move the probe away from the sample place the cursor on the upper portion of the z direction pad and then click and hold the mouse button Release the mouse button to stop movement of the probe Now that the probe is a safe distance away from the sample you can move the XY stage to position the probe over the location on the sample surface you wish to image The XY stage has a range of motion of 8 mm in both the x and y directions To move the probe in
143. ssiez allez directement aux caract ristiques et contr le sur lesquels vous d sirez apprendre quelque chose Ixii Preface and Overview Le chapitre 1 ProScan Data Acquisition d crit en detail les caract ristiques du logiciel ProScan Data Acquisition Ce chapitre traite chaque portion de l cran pr tant une attention sp ciale chaque possibilit de contr le et ses fonctions Ce chapitre traite galement des menus avec une description de chaque article du menu et de sa fonction Le chapitre 2 Traitement d image ProScan d crit en d tail les caract ristiques du logiciel ProScan Image Processing Ce chapitre explique comment obtenir des images comment faire des mesures de surface et comment pr parer les images pour l impression sous diff rents formats PARTI LEARNING TO USE AUTOPROBE CP BASIC IMAGING TECHNIQUES Partl Learning to Use AutoProbe CP Basic Imaging Techniques Part 1 Overview Part I Overview Part I of this User s Guide Learning to Use AutoProbe CP Basic Imaging Techniques introduces you to AutoProbe CP It contains four tutorial chapters that guide you through setting up AutoProbe CP and taking AFM images You should start by reading Chapters 1 and 2 which introduce you to the components of AutoProbe CP and describe how to set up the instrument for imaging Then you should follow the tutorial in Chapter 3 which teaches you how to take AFM images Chapter 4 expla
144. st be checked before you turn on the power to AutoProbe CP s system components The line voltage selector switch is on the rear panel of the AEM The line voltage selector switch can be set to the following voltages 100 V 120 V 220 V and 240 V See the section Setting the Line Voltage later in this preface for more information WARNING Do not open the AutoProbe electronics module AEM or the CP base unit The AEM and the CP base unit use hazardous voltages and therefore present serious electric shock hazards WARNING ThermoMicroscopes requires that you routinely inspect the cables of the AutoProbe CP system to make sure that they are not frayed loose or damaged Cables that are frayed loose or damaged must be immediately reported to your local ThermoMicroscopes service representative Do not operate AutoProbe CP when wires are frayed loose or damaged vil Preface CAUTION All AutoProbe CP system components must be handled with care System components contain delicate electromechanical instrumentation that can easily be damaged by improper handling CAUTION The power to the AEM must be turned OFF before you remove or install the scanner CAUTION The LASER ON OFF switch of the probe head must be in the OFF position before you remove or install the probe head on the XY translation stage Otherwise damage to the light emitting diodes LEDs of the probe head may result CAUTION When remo
145. sungen f r sie nicht zu Diese Garantie gibt ihnen spezielle juristische Rechte neben den m glichen anderen Rechten die sie haben welche von Staat zu Staat varieren Hersteller Information Das AutoProbe CP beinhaltet keine Teile die vom Benutzer selber gewartet werden d rfen Alle Unterhaltsprobleme sollten unverz glich den rtlichen ThermoMicroscopes Vertretern gemeldet werden ThermoMicroscopes USA ThermoMicroscopes USA 1171 Borregas Avenue 6 Denny Road No 109 Sunnyvale CA 94089 Wilmington DE 19809 T 408 747 1600 T 302 762 2245 F 408 747 1601 F 302 762 2847 ThermoMicroscopes SA ThermoMicroscopes Korea 16 rue Alexandre Gavard Suite 301 Seowon Building 1227 CAROUGE 395 13 Seokyo dong Mapo ku Geneva Switzerland Seoul Korea T 41 22 300 4411 T 82 2 325 3212 F 41 22 300 4415 F 82 2 325 3214 Falls sie ihre Systemkomponenten welche mit Schadstoffen in Ber hrung kamen zu Unterhaltszwecken zu ThermoMicroscopes zur cksenden m ssen folgende Regeln beachtet werden XXXIX x Vorwort und bersicht Schadstoffe wurden von den L ndern der Europ ischen Gemeinschaft als Stoffe und Zubereitungen gem ss EG Richtlinie vom 18 9 1979 Artikel 2 definiert Mit Systemkomponenten welche mit Schadstoffen in Kontakt kamen muss folgendes beachtet werden Kontaminierte Komponenten sind vor der R cksendung zu ThermoMicroscopes entsprechend den Strahlenschutzvorschriften zu dekontaminieren Zu
146. switch and a LEM NC AFM switch These switches are used to select the mode of operation For both configurations the probe head holds a probe cartridge which contains a removable chip carrier with a cantilever chip mounted on it The probe cartridge slides in and out of the probe head on side rails and clicks into place for precise positioning The probe head itself slides on and off an XY translation stage An electrical connector on the probe head plugs into a connector mounted on the back of the XY translation stage The XY translation stage is used to position the probe in x and y over the desired location on the sample The XY translation stage is moved using two translation screws on the sides of the XY translation stage The probe head moves up and down on the Z stage Up and down movement of the probe head moves the probe farther from and closer to the sample surface and is controlled using software tools in ProScan Data Acquisition The scanner is a piezoelectric ceramic tube The scanner is installed in an opening below the probe head with a sample holder attached to the top of the scanner The sample is set on the sample holder and the scanner rasters the sample holder and thereby the sample beneath the probe to generate an image of the sample surface The size of the scanner depends on your system configuration The standard configuration comes with a5 um scanner The multitask configuration comes with a 100 um scanner that
147. t OFF Stellung sein bevor der Tastkopf entfernt oder an der XY B hne installiert wird Bei Nichtbefolgen des letzteren k nnen die Laserdioden LEDs des Tastkopfes besch digt werden VORSICHT Um ein besch digen des Scanners zu vermeiden m ssen sie beim Entfernen und Installieren des Tastkopfesopfes ber ein Erdungskabel geerdet sein Der Tastkopf ist sehr empfindlich gegen elektromagnetische Entladungen VORSICHT Um eine ordungsgem sse Erdung des CP Scanners zu gew hrleisten m ssen die vier Schrauben die den Scanner mit der CP Grundeinheit verbinden sicher angezogen werden Wenn die vier Schrauben sicher angezogen sind ist eine maximale Instrumentenaufl sung gew hrleistet da die Vibrationen reduziert sind Betriebssicherheit xxvii VORSICHT Um die EMV Best ndigkeit zu gew hrleisten sollte w hrend dem Aufnahmen die CP Grundeinheit mit dem metallenen Deckel geschlossen werden Erdung des AutoProbe CP Das AutoProbe CP muss ordungsgem ss geerdet werden bevor seine Komponenten eigeschaltet werden Das Versorgungskabel darf nur mit einen Anschluss verbunden werden der mit einem Erdungspol versehen ist Falls sie keinen Anschluss mit einem Erdungspol haben m ssen sie das AutoProbe CP System ber den Erdungspol am AEM mit Erde verbinden Die Position des Erdungspoles is im folgenden Bild 0 1 eingezeichnet AEM Ground connection O0000
148. t indicateurs de position pour la t te de microscope multitask Indicateurs de position du laser Indique la position de la lumi re du laser r flechi touchant le PSPD Lorsque le point du laser est centr sur le photod tecteur la led verte du centre est allum e comme en figures 0 4 et 0 5 ci dessus La Figure 0 6 ci dessous montre la position de l tiquette d avertissement du laser l ext rieur de la coupole de l AutoProbe CP CAUTION LASER LIGHT WHEN OPEN DO NOT STARE INTO BEAM Figure 0 6 Position de l tiquette d avertissement du laser sur la base de L AutoProbe CP La Figure 0 7 ci dessous montre la position de l tiquette de conformit concernant la s curit du laser sur le panneau arri re du Module Electronic de AutoProbe AEM liv Preface and Overview AEM an FMTHERMOMICROSCOPES 1171 Borregas Ave Sunnyvale CA 94089 1304 SSS AutoProbe Electronics Module Model No APEM 1000 Een Date Serial No Dj Patents 5 157 251 5 210 410 5 376 790 5 448 399 100 120 220 240 VAC 50 60 Hz 400W Complies with 21 CRR 1040 10 and1040 11 Made in the USA C Figure 0 7 Panneau arri re du AEM montrant la position de l tiquette de conformit concernant la s curit du laser Configuration du Systeme Standard Multitask Mesures de per
149. t les recharger Partie Il Apprendre a utiliser l AutoProbe CP Techniques avanc es La partie II de ce Guide de l Utilisateur Apprendre utiliser l AutoProbe CP Techniques avanc es comprend des formations pratiques pour des op rations dans les modes suivants STM LFM NC AFM IC AFM and MFM Elle comprend galement des travaux pratiques qui vous introduisent aux possibilit s avanc es de AutoProbe CP tels que les courbes force distance les courbes courant tension et la calibration du scanner Ixi Le chapitre 1 Imager en mode STM vous guide afin de prendre une image en mode STM Dans ce chapitre vous apprendrez des proc dures pour pr parer des pointes STM et utiliser des cartouches STM pour configurer ordinateur et le programme afin de travailler en mode STM et prendre une image en mode STM Le chapitre 2 Imager en mode LFM vous guide afin de prendre simultan ment des images en mode LFM et AFM Le chapitre 2 vous donne galement les informations pour obtenir des images LFM et les avantages d avoir disposition les 2 images LFM et AFM Le chapitre 3 Imager en mode NC AFM IC AFM et MFM d crit les principes des modes d op ration NC AFM IC AFM et MFM Le chapitre 3 vous donne galement les instructions pas a pas afin d obtenir des images NC AFM IC AFM et MFM Le chapitre 4 Courbes Force Distance D crit comment obtenir des courbes force distance une
150. tage mode and the Topo x 16 signal channel to take higher resolution images how to save delete and retrieve images Note Throughout this chapter the text refers to the standard system configuration of AutoProbe CP Procedures are similar for the multitask system configuration unless otherwise noted Before You Begin This chapter assumes you have already read Chapter 2 Setting Up to Take an Image and Chapter 3 Taking an AFM Image In Chapter 2 you learned how to start AutoProbe CP how to load a probe head a scanner a sample and a probe and how to move the probe Chapter 3 showed you how to configure the software how to set up and perform an auto approach and how to take an AFM image The beginning of this chapter assumes that your sample is a calibration grating Using a calibration grating is recommended because a grating is flat and has periodic features that make it easier to see the effects of adjusting scan and feedback parameters This chapter assumes that both a sample and a probe are already loaded and that you are ready to perform an auto approach If this is not the case follow the instructions in Chapter 2 to load a sample and a probe A Brief Tour of Image Mode A Brief Touroflmage Mode 4 3 Image mode includes controls for setting scan and feedback parameters and taking an image Image mode also includes an Oscilloscope Display for monitoring instrument signals Enter Image mode by either sel
151. the feedback signal will fluctuate too strongly in response to small changes As a result the system will oscillate You will be able to see these oscillations in the signal trace displayed on the Oscilloscope Display The optimal value of the gain parameter depends on a number of factors including the scan rate scan size and the sample topography You should check that the gain parameter is optimized for each scan and adjust it as needed To learn more about the z feedback loop see Chapter 1 of the Software Reference manual ProScan Data Acquisition 4 14 Chapter 4 Taking Better Images In addition to adjusting the gain you should also adjust the set point Adjusting the set point is described in the following section Adjusting the Set Point The set point sets the amount of cantilever bending or deflection during a scan When the z feedback loop is enabled the system operates to keep the set point constant by either extending or retracting the scanner a short distance toward or away from the sample The optimal value of the set point parameter depends on a number of factors including what sample you are looking at If you notice horizontal streaking in an image the set point is too high and you are dragging dirt unidentified particles material etc around on the sample If you still see streaking after reducing the set point value your sample is probably too soft to examine using contact AFM You can adjust th
152. the zoom slider knob place your thumb on the slider knob and place your forefinger on the peg attached to the left side of the slider Then squeeze your thumb and forefinger together to move the slider knob all the way to the right 4 Adjust the coarse focus to move the objective lens up or down using the large focusing knob on the end of the swing arm Monitor the focus adjustment by looking at the video monitor You should see the end of the cantilever chip with a triangularly shaped cantilever in the center of the optical view as shown in Figure 2 17 Figure 2 17 End of a cantilever chip showing the cantilever as seen through the optical view Using the Optical View 2 27 CAUTION When you adjust the coarse focus of the optical view the objective lens moves up and down Do not drive the objective lens all the way down into the probe head Driving the objective lens into the probe head can damage the probe head and the lens 3 If the cantilever you will be using is not in the center of the field of view you can adjust the position of the cantilever until you can see it on the video monitor Move the cantilever chip relative to the optics field of view by using the two micrometer adjustments attached to the CP Optics support plate These micrometers move the entire AutoProbe CP instrument base relative to the CP Optics Note You may notice that using the micrometers causes the optical view to wobble Because the
153. tion This section shows you how to take an image at a new location on the sample surface There are two ways to take an image at a new location on the sample coarse positioning of the probe using the x and y translation screws of the XY stage fine positioning of the scanner using the green cursor box in the Import View When you move the probe using the screws of the XY stage the range of motion can be on the order of millimeters When you move the scanner using the green cursor box in the Import View the range of motion is on the order of micrometers or angstroms The section Controlling the XY and Z Stages in Chapter 2 describes how to coarsely position the probe to select a location on the sample for imaging This section describes how to select a scan size and scanner coordinates scan location for a follow up scan using the green cursor box in the Import View The Import View allows you to position a follow up scan using an image you recently took First you transfer a recent image from the Image Gallery into the Import View Then you resize and move the green cursor box around in the image to select a new scan size and a new scan location To use the Import View to position a follow up scan do the following 1 Take an AFM image as you normally do 2 Transfer the current image from the Image Gallery into the Import View by selecting the image in the Image Gallery and then clicking the button in the Import View The
154. tion Input Config The Input Configuration Dialog Box in Chapter 1 of the Software Reference manual Chapter 2 of the Software Reference manual describes ProScan Image Processing which includes computer fitting routines that also allow you to remove slope from an image See Chapter 2 ProScan Image Processing of the Software Reference manual for details Adjusting Feedback Parameters 4 11 Adjusting Feedback Parameters This section introduces the z feedback loop You will learn about controlling the gain parameter and adjusting the set point parameter 1 e the reference cantilever deflection for AFM imaging The controls for feedback parameters are located in the Scan and Feedback Controls section of Image mode as illustrated in Figure 4 1 Optimizing the Gain To get the best images the gain parameter needs to be optimized for each set of scan conditions If the gain is set too low fine topographical features do not show clearly in an image On the other hand if it is set too high the system oscillates The procedure for checking that the gain is set to an optimal value is simple First you start with the gain set to a low value Then you gradually increase the value until the system is on the brink of oscillation CAUTION If you allow the system to oscillate too severely the probe and the sample may be damaged Figure 4 2 below shows the signal trace on the Oscilloscope Display The first panel shows oscillat
155. und ber den Nutzen beides LFM und AFM Bilder zur Verf gung zu haben Kapitel 3 NC AFM IC AFM and MFM Imaging beschreibt die Grunds tze hinter NC AFM IC AFM und MFM Betriebsart Kapitel 3 beinhaltet weiterhin schrittweise Anweisungen zur Aufnahme von NC AFM IC AFM und MFM Bilder Kapitel 4 Force vs Distance Curves beschreibt das Aufnehmen von Kraft Abstands Kurven an x y Orten auf der Probenoberfl che in ProScan Data Acquisition Eine Kraft Abstands Kurve ist die Dartellung der Vertikalkraft die die Spitze auf den Balken bertr gt als Funktion des Abstandes zwischen Spitze und Probe Unterschiede in der Form der Kraft Abstands Kurve lassen auf die rtliche Elastizit tskonstante der Probenoberfl che r ckschliessen Kapitel 5 I V Spectroscopy lernt ihnen das I V Spectroscopy Fenster in der ProScan Data Acquisition zu benutzen um eine Strom Spannungs Kurve 1 und dI dV Kurven aufzunehmen Diese Kurven enthalten wertvolle Informationen ber die electrischen Eigenschaften von Oberfl chen Kapitel 6 Scanner Calibration beschreibt die Arbeitsweise des AutoProbe CP Scanners und die Kalibration des selben um eine optimale Funktion zu erhalten Abschnitt Ill Software Verweis Abschnitt II dieser Bedienungsanleitung Software Verweis ist ein Verweishandbuch f r ProScan Data Acquisition and Image Processing und schliesst Informationen ber folgenden AutoProbe Systeme ein CP LS and M5 Die Kapit
156. ving and installing the scanner you must be grounded via a grounding strap to ensure that the scanner is not damaged The scanner is sensitive to electrostatic discharge CAUTION The four screws that connect the scanner to the CP base unit must be securely fastened to ensure proper grounding When the four screws are securely fastened maximum instrument performance is ensured since vibrations are reduced CAUTION To preserve safety and EMC compliance AutoProbe CP must be used with the EMI filter supplied with the AutoProbe CP system CAUTION To preserve EMC immunity place the metal cover on the CP base unit while imaging Grounding AutoProbe CP AutoProbe CP must be properly grounded before you turn on the power to its components The main power cord must be inserted into an outlet with a protective earth ground contact If you do not have access to an outlet with a protective earth ground contact you must ground the AutoProbe CP system using the ground connection of the AEM The location of the ground connection is shown in Figure 0 1 below AEM Ground connection Figure 0 1 Rear panel of the AEM showing the location of the ground connection X Preface Setting the Line Voltage The line voltage selection must correspond to the line voltage of the country where the AutoProbe CP system is operated The line
157. vorzeitig kontaktiert werden um eine Genehmigung f r die R cksendung des Gr tes zu erhalten F r den Transport des Ger tes muss den ThermoMicroscopes Transportanleitungen unbedingt Folge geleistet werden Falls das Ger t zur ckgesendet wird muss es versichert werden Wenn immer m glich liefert ThermoMicroscopes Ersatzteile als Leihgabe um eine Reparatur beim Kunden mit m glichst geringer Stillstandzeit zu erm glichen Wenn das System wieder betriebsbereit ist m ssen die defekten Teile umgehend zu ThermoMicroscopes zur ck gesandt werden Speziell ausgeschlossen von dieser Garantie sind alle Verbrauchsartikel wie Piezolevers Microlevers Ultralevers Spitzen und hnliches F r Ger te die ausserhalb der Vereinigten Staaten verkauft wurden gelten die Garantiebedingungen des individuellen Verkaufes Ger te welche Gegenstand von falscher Benutzung Unfall Missbrauch Missgeschick unzumutbarer Benutzung Besch digung durch Drittger te mit welchen das Ger t benutzt wurde Bedienungsfehler Vernachl ssigung unerlaubtes Reparieren Ver ndern oder Installieren sind nicht gedeckt durch diese Garantie Garantie von Ersatzteilen ThermoMicroscopes garantiert das alle verkauften Ersatzteile frei von Material und Verarbeitungsfehlern sind Diese Garantie gilt f r 90 Tage ab dem Lieferdatum ThermoMicroscopes repariert oder ersetzt solche Teile nach eigenem Ermessen falls sie zu ThermoMicroscopes zur ck gesandt werden Der
158. ware Reference Part III of this User s Guide Software Reference is the reference manual for ProScan Data Acquisition and Image Processing and includes information for the following AutoProbe systems CP LS and M5 The chapters in this part of the User s Guide provide more detailed information about the software features and controls than the information that is provided in the tutorial chapters The chapters are designed so that you can skip straight to the feature or control that you are interested in learning more about Chapter 1 ProScan Data Acquisition describes in detail the software features of ProScan Data Acquisition This chapter discusses each region of the screen giving special attention to each control and its function This chapter also discusses the menus with a description of each menu item and its function Chapter 2 ProScan Image Processing describes in detail the software features of ProScan Image Processing This chapter explains how to process images how to make surface measurements and how to prepare images for printout in a variety of formats xxi xxii Vorwort und bersicht Betriebssicherheit xxiii Vorwort Betriebssicherheit Dieses Kapitel enth lt wichtige Informationen ber ihr AutoProbe CP System Es beschreibt im Detail den Arbeitsablauf in Bezug auf die Betriebssicherheit des AutoProbe CP und muss daher vollst ndig durchgelesen werden bevor sie ihr AutoProbe CP System bedienen
159. x and y do the following 1 Practice moving the probe in x The direction the probe moves in x is set by the direction you turn the x translation screw of the XY stage The x translation screw is the knob located on the right side of the XY stage When you turn the x translation screw away from you the probe moves to the right as you face the sample which is defined as the positive x direction When you turn the x translation stage screw toward you the probe moves to the left as you face the sample which is defined as the negative x direction 2 Practice moving the probe in y The direction the probe moves in y is set by the direction you turn the y translation screw of the XY stage The y translation screw is the knob located on the front of the XY stage When you turn the y translation screw counterclockwise the probe moves away from you as you face the sample which is defined as the positive y direction When you turn the y translation stage screw clockwise the probe moves towards you as you face the sample which is defined as the negative y direction Now you are ready to learn how to remove and install the probe head Removing and Installing the Probe Head 2 11 Removing and Installing the Probe Head The probe head is installed on a manual XY stage shown in Figure 2 4 Figure 2 4 The XY stage with no probe head installed The probe head slides onto the two support arms of the XY stage An electrical connector on
160. xxxvii Garantie Von Ersatzteilen seen ee Beten xxxvii Hersteller Information ss xxxviii Uber die Benutzung dieser Bedienungsanleitung xl iv Contents Pr face D ec Ae RN Al Aa ana S curit lors de l utilisation xliv Symboles de secutlte beige sags Anse tre xliv D finitions ATTENTION AVERTISSEMENT et xlv R capitulatif des messages d Alerte et xlvi Mise la terre de 1 AutoProbe CP xlviii Configuration de la tension alimentation eee ee eee cesecesecssecseeceecaeenaes xlix Recommandation Tusage du laser 1 Caracteristiques et performances pour I AutoProbe CP lv D claration de Garantie de ThermoMicroscopes u uursensensseeseenseennennnnnnneennennennnennnn lviii Garantie des Syst mes neufs et des Accessoires lviii Garantie des pi ces remplac es 0 0 eee lviii Information du fabricant lix Comment utiliser ce guide de l utilisateur Ix Part Learning to Use AutoProbe Contact AFM Chapter 1 AutoProbe CP Basics 1 1 Step by Step through AutoProbe CP ss 1 2 System COMPONENES end AE de en nt ardt arret rend 1 3 The AutoProbe CP Instrument 1 4 The Optical Microscope and Fiberoptic Light Source 1 7 Phe CP Opt Senn sess nl mee
161. ysteme est enclench AVERTISSEMENT Ne pas utiliser d ac tone pour nettoyer les composants du syst me AutoProbe CP L ac tone peut endommager les tiquettes d avertissement concernant la s curit ivili Preface and Overview Declaration de Garantie de ThermoMicroscopes Garantie des Systemes neufs et des Accessoires ThermoMicroscopes garanti au premier acqu reur que son syst me est exempt de tout d fauts de mat riel ou de fabrication et ceci pour une p riode d une ann e compter de la date de livraison Pendant cette periode de garantie ThermoMicroscopes est seul responsable du remplacement ou de la r paration selon son propre choix du mat riel sous garantie et ceci sans charge pour l acqu reur autre que des frais d envois ventuels ThermoMicroscopes se r serve le droit d ex cuter ces services soit sur site chez le client soit dans ses propres locaux Pour les r parations effectu es par ThermoMicroscopes le client doit demander l avance une autorisation d exp dition de mat riel ThermoMicroscopes RMA et suivre la proc dure ThermoMicroscopes d exp dition Le mat riel renvoy doit tre assur par l exp diteur ThermoMicroscopes fourni en pr t dans la mesure du possible des pi ces de remplacement pour permettre au client une r paration sur site dans les meilleurs d lais Une fois le syst me op rationnel les pi ces d fectueuses doivent tre envoy es chez
162. z range it can be represented by the 16 least significant bits of the DAC output In this case the Topo x 16 image represents the variations in topography accurately However if the DAC output crosses either the high or low limit of the 16 bit range the signal abruptly changes to the opposite limit If you cross this wrap around point at the high limit the Topo x 16 data point representing a higher region will be represented by a low number Conversely if you cross the wrap around point at the low limit the Topo x 16 signal representing a lower region is represented by a higher number Figure 4 7 illustrates the high end wrap around point 4 26 Chapter 4 Taking Better Images actual topography wrap around point I be x 16 signal Topography signal Figure 4 7 Representation of sample topography by the Topo x 16 signal and the Topography signal Wrap around points show up on a Topo x 16 image as sudden changes in contrast If the probe frequently crosses a wrap around point the resulting sudden shifts in contrast make the image difficult to interpret When you are using the Topo x 16 signal channel you may need to use the Z stage to back the tip away from the sample This forces the scanner into a shifted range of voltages where it will not cross a wrap around point You can collect image files using the Topography signal and the Topo x 16 signal simultaneously This capab
163. zerland Seoul Korea T 41 22 300 4411 T 82 2 325 3212 F 41 22 300 4415 F 82 2 325 3214 Si le mat riel que vous renvoyez au service technique a t en contact avec des substances toxiques vous devez observer certaines r glementations Les substances toxiques sont r glement es par les pays de la Communit Europ enne par Materials and Preparations en accord avec les directives EEC du 18 Septembre 1979 Article 2 Pour le mat riel qui a t en contact avec des substances toxiques vous devez proc der comme suit Decontaminate the components in accordance with the radiation protection regulations Le mat riel contamin doit tre d contamin en accord avec les directives et r glementations de protection radioactive Construct a notice that reads free from harmful substances The notice must be included with the components and the delivery note Le materiel renvoy doit tre accompagn d un avis Exempt de substances toxiques Cet avis doit galement appara tre sur le bulletin de livraison Ix Preface and Overview Comment utiliser ce guide de l utilisateur Le guide de l utilisateur pour AutoProbe CP est divis en trois parties faciles utiliser qui sont les suivantes Partie I Apprendre utiliser l AutoProbe CP Techniques d imagerie de base Partie Apprendre utiliser l AutoProbe Techniques avanc es Partie III References du logiciel Le contenu

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