Nanolithography for AutoProbe Operating Instructions
Contents
1. 1 using the Run command or 2 using the Add Remove Programs icon in the Control Panel To install Nanolithography using the Run command follow these steps a Click the button b Next click Run c The Run dialog box opens Enter a setup exe in the Open listbox and then click the button To install Nanolithography using the Add Remove Programs icon in the Control Panel follow these steps Click the button a b From the Start menu point to Settings and click Control Panel Double click the Add Remove Programs icon The Add Remove Programs dialog box opens Click the button in the dialog box e Next the Install Program from the Floppy Disk or CD ROM dialog box opens Click the button f The Run Installation dialog box appears displaying the command line for the installation program a setup exe Click the button to begin the R installation of Nanolithography 3 The Setup dialog box opens with the following message Copying Initialization Files The installation program places the Nanolithography software files into the directory c psi litho The directory c psi litho is a subdirectory of ProScan The directories for the Nanolithography software are listed in Table 1 below Table 1 Nanolithography directories Directory Files c psi litho lithography executable files c psi litho bitmaps bitmap files c psi litho scripts lithography parameter files The installation program creates a fo2. b Remove the cover of the LVM by loosing the two screws at each end using an appropriately sized allen wrench The screws are located above the electrical connectors at each end of the LVM Lift off the cover c Inside the LVM is a PCB printed circuit board with eight I O BNCs a series of jumper blocks that can be removed in order to break connections through the board eight differential amplifiers and a total of 136 connection points two associated with each of the eight BNCs four associated with each of the eight differential amplifiers and 88 test points d Configure a BNC for input from the external amplifier and connect the I O test point to test point 42 sample bias voltage e Place the cover over the BNC connectors and secure it using the two allen head screws Warning Never make connections to the LVM with the cover off 2 Install the reconfigured LVM as follows a TURN OFF THE POWER to the computer and the AEM AutoProbe Electronics Module The on off switch for the computer is located on the front panel of the computer unit The on off switch for the AEM is located on its front panel b Disconnect the 44 pin I O cable from the rear panel of the AEM c Plug the 44 pin I O cable into the appropriate 44 pin connector on the LVM This connects the interface module to the LVM d Plug the 10 44 pin I O cable into the 44 pin connector of the AEM Then plug the other end of the 10 44 pin I O cable into the
3. Modifying a Sample Surface Using Nanolithography e e eee eee eee aaa aaa ac 11 Setting Up the Instrument for AFM AutoProbe CP ou eee eee cee ereeeeee 12 Setting Up the Instrument for AFM AutoProbe MS uu eee eee eee eeeeeeee 14 Setting Up the Instrument for AFM AutoProbe VP2 0 eee eee eee eneeeeee 16 Taking an AFM mape ninnau nnanet na n a a a aa 17 Starting Nanolithography and Loading an Image eseeeeeseeeeeeeeersereereerrrreeeeee 18 Defining Important Parameters 0 0 0 0 eee eee eeceeeceeecesecesecaecnaecsaecneeeneseneeeaeees 19 Selecting the Lithography Pattern eee eee eee aaa 20 Updating Parameters for the Lithography Pattern eese oeaoeaa aaa aaa 20 Saving the Lithography Technique e e eeee eee aaa aaa aaa anaaa 21 Executing the Lithography Technique ecceescecssecesececeeceeeeeceaeceeneecsaeensnees 21 Re imaging the Modified Sample 0 0 0 ee eee ceescesecesecesecsecaecseeeneseneeees 22 Nanolithography Software Reference eueo eee aaa ania 23 Nanolithography Controls e oeee see aaa aaa aee 24 Pattern Controls od i A O A OO OO 25 Object Control ss a A O O O O A R AA O WO A Aa 27 Nanolithography Menus e eeee eee aaa aaa aaa aaa aaa aan aniae 30 File MENU 3 83 Z O OWN AO O ER WSA 30 Fdit Meny e Se Bad A suntan iio dE NA 31 Insert M RU a a Z A A W Ee dE 31 Lithogr
4. cantilever Select the file that corresponds to the cantilever you are using e g select ULO6B if you are using the B cantilever of a contact Ultralever Electrochemistry ON OFF OFF Voltage mode HI d Click the button to close the dialog box Next you will take an AFM image of the sample surface Go to the section Taking an AFM Image 16 Nanolithography Operating Instructions Setting Up the Instrument for AFM AutoProbe VP2 This section assumes that the UHV head is mounted onto the protective cover or the vacuum chamber To set up AutoProbe VP2 for operation in contact AFM mode follow these steps 1 Turn on the interface module The on off button is a red button labeled POWER on the front panel of the interface module 2 Set the PROBE knob on the front panel of the interface module to the AFM position This selects the contact AFM mode of operation 3 Turn on the power to the AEM Then turn on the power to the computer 4 Load a sample onto the sample holder as you normally do 5 Load an AFM probe onto the scanner contact pad as described in the User s Guide 6 Open ProScan Data Acquisition as you normally do 7 Configure the software for contact AFM as follows a If the power to the scanner is turned on turn it off now by clicking the Head ON icon b Select Configure Parts from the Setup menu Alternatively click the Configure Parts icon B The ProScan Database Confi
5. represents the number of data points collected in the horizontal i e the x direction The number in the Y Points textbox represents the number of data points collected in the vertical i e the y direction Modifying a Sample Surface Using Nanolithography 19 Defining Important Parameters Parameters for lithography must be defined before you create a lithography pattern The parameters you set determine the lithography technique voltage pulse lithography or z scanner movement lithography In this section you define parameters that are appropriate for z scanner movement lithography 1 From the Setup menu select Tools The Tools Setup dialog box will appear 2 Enable the Point Setup option button This displays parameters that you may want to set for a pattern that consists of points 3 Set up z scanner movement lithography as follows a Make sure that the Z Scanner checkbox is enabled i e checked This enables you to define movement of the scanner in the z direction The z range for the scanner that is installed on your system is listed in the Z Scanner Range textboxes The default z position of the scanner is listed in the Default um textbox For this tutorial enter a value of 0 in the textbox This sets the z position of the scanner to the middle of its range The position that the scanner extends to at each point in the pattern is listed in the Move To um textbox Enter the z position in the textbox that
6. you want the scanner to extend to Again the position that you select depends on the characteristics of your sample Enter a value of in the Approach N textbox This sets the number of steps that the scanner uses to approach the sample before an object in a pattern e g a point is written on the sample Make sure that the Z Servo checkbox is not enabled i e checked For z scanner movement lithography the feedback loop must be disabled Disable i e uncheck the Sample Bias checkbox The Sample Bias checkbox should only be enabled when you want to apply a bias voltage between the tip and the sample for example in voltage pulse lithography 4 The Speed im second textbox lists the speed at which the lithography pattern is written on the sample For a pattern that consists of points the optimum value is around 3 im second 5 Click the button to refresh the parameters in the dialog box 6 Click the button to close the dialog box 20 Nanolithography Operating Instructions THERMOMICROSCOPES Selecting the Lithography Pattern There are four Pattern controls that can be used to create a lithography pattern These controls include the following a Point icon for creating points a Vector icon for creating vectors a Grid icon for creating grids a Bitmap icon for importing bitmap bmp images In this section you will learn how to create a pattern that consists of points Points are created at x y loca
7. 44 pin connector of the LVM This connects the AEM to the LVM 3 Connect a BNC cable to the output BNC configured above in Step 1 Connect the other end of the BNC cable to the input of an external amplifier The external amplifier supplies voltage to the sample via the sample holder 10 Nanolithography Operating Instructions THERMOMICROSCOPES 4 Check that the LVM is securely attached to the M5 instrument Make sure that the BNC cable is securely fastened to the BNC connector Configuring Nanolithography AutoProbe VP2 This section includes step by step instructions for configuring AutoProbe VP2 for use with the Nanolithography option The configuration you use depends on the lithography technique you wish to design Note the following No reconfiguration of the instrument or the software is required for z scanner movement lithography A reconfiguration of the software is required for voltage pulse lithography in STM mode Voltage pulse lithography is not available in AFM mode Note The procedures described in this section also apply to AutoProbe VP To configure the software for voltage pulse lithography in STM mode follow these steps 1 Open the Nanolithography software as you normally do 2 Select Instruments from the Setup menu The Instrument Output Control dialog box opens 3 Enable the DAC 3 option button in the Instrument Output Control dialog box DAC 3 provides access to the sample bias voltage sign
8. FM THERMOMICROSCOPES Nanolithography for AutoProbe Operating Instructions ThermoMicroscopes 1171 Borregas Avenue Sunnyvale California 94089 Tel 408 747 1600 Fax 408 747 1601 48 101 1089 Rev C For AutoProbe CP LS M5 VP2 and VP December 8 2000 THERMOMICROSCOPES Copyright Notice Copyright 1992 2000 by ThermoMicroscopes All rights reserved No part of this publication may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying for any purpose without written permission from ThermoMicroscopes Trademarks AutoProbe BioProbe Piezolever Ultralever Microlever ScanMaster MicroCell Materials Analysis Package MAP ProScan MapPlot the TM logo and ThermoMicroscopes are trademarks of ThermoMicroscopes Others are trademarks of their respective owners Contents ING JUCH N sissies ROZA RE WOPR ai eo ee eee ee 3 About Nanolithography Techniques sceeccecssecesececseceeeeeceaeceeneeceaeceeaeecaeeeeaeecnaeeeeneecea 4 setting Up Nanolithography seia t O os a O a bt 5 Required Components 00 0 0 ee ee cescesecssecsseceeecaeecseecseseaeeeeeeseeeeseeeecsaecsaecsaeeneeaes 5 Installing Nanolithography Software 0 cece eeceseeesecesecseeceeeeeecaeeeseseeeeeeeeeens 5 Configuring Nanolithography AutoProbe M5 eee eeeeea aaa aaa anawa ewaae 8 Configuring Nanolithography AutoProbe VP2 ee eeeeaeaaeeaaeaocnew 10
9. Guide 6 Turn on the power to the AEM Then turn on the power to the computer 7 Turn on the power to the color video monitor 8 Open ProScan Data Acquisition as you normally do 9 Align the deflection sensor as follows a Turn on the scanning head by clicking the Head ON icon b Locate and focus on the cantilever using the optical view as described in Part I of the User s Guide c Ifthe laser beam is not reflecting off the back of the cantilever tip then you need to adjust the position of the laser d Use the laser adjustment lever to center the spot on the laser The laser adjustment lever positions the laser coarsely in the x and y directions e When the laser spot is reflecting off of the back of the cantilever tip adjust the laser position on the PSPD using the AFM control screw 10 Configure the software for contact AFM as follows a If the scanning head is turned on turn it off now by clicking the Head ON icon 5 b Select Configure Parts from the Setup menu Alternatively click the Configure Parts icon e The ProScan Database Configuration dialog box will open c Configure the software for operation in contact AFM mode by making the following selections in the dialog box Modifying a Sample Surface Using Nanolithography 15 M5 Head Scanner Select the file that has the calibration parameter values for the scanning head that is installed M5 Mechanical Switch AFM NCM Head mode AFM Beam bounce
10. Menu The File menu contains menu items for opening and saving lithography files or lithography scripts Lithography files contain parameters and patterns for lithography techniques Lithography files use the file extension lit File menu items include the following New Save As Open Exit Save The above listed menu items are described in Table 8 below Nanolithography Software Reference 31 Table 8 File menu items Menu item Function New Clears the pattern shown in the image in the Image Display Open Displays the Open dialog box which allows you to load a previously saved lithography file lit into the software Save Displays the Save dialog box which allows you to save a lithography file lit in the default directory c psi litho scripts Save As Performs the same function as the Save menu item Exit Closes the Nanolithography software Edit Menu The Edit menu contains a menu item for copying a lithography pattern to the Notepad Windows 95 or to the Clipboard Windows 3 1 Other menu items are currently not enabled The Edit menu items that are displayed on the screen include Undo Edit Copy Repeat Edit Paste Cut Paste Special The Copy menu item copies the lithography pattern for the image in the Image Display to the Notepad Windows 95 or to the Clipboard Windows 3 1 You can then paste the lithography pattern into any third party software application Insert Menu The Insert me
11. al Your instrument should now be configured for voltage pulse lithography in STM mode Modifying a Sample Surface Using Nanolithography 11 Modifying a Sample Surface Using Nanolithography This tutorial teaches you the basics of using the Nanolithography option to design a lithography technique This tutorial provides general guidelines for modifying a sample surface in contact AFM mode The lithography technique you design and use in this tutorial is z scanner movement lithography The sample you use in this tutorial depends on your interests In general we suggest that you choose a sample that is somewhat soft in composition so that the surface can be easily modified using the lithography technique Instructions are included in this tutorial for AutoProbe CP M5 and VP2 This tutorial assumes that you are familiar with the basics of using your instrument such as loading a probe head for CP or scanning head for M5 a probe and a sample This tutorial does not provide details for these procedures Instead it refers you to your User s Guide where applicable Note The procedures that refer to AutoProbe CP are applicable to AutoProbe LS instruments as well The procedures that refer to AutoProbe VP2 are applicable to AutoProbe VP as well Designing the z scanner movement lithography technique described in this tutorial consists of the following general procedures setting up the instrument for operation in contact AFM mod
12. aphy Menu e e e e eee eo 32 Setup MENU zi Wiki ka Beis eke eres 32 Help Menai za a od ee eee eed 33 Contents i Contents THERMOMICROSCOPES ThermoMicroscopes Disclaimer 1 ThermoMicroscopes Disclaimer The ThermoMicroscopes Nanolithography option enables you to design and implement lithography techniques Components other than those supplied by ThermoMicroscopes may be required for the design and the implementation of lithography techniques Note that with the design and the implementation of lithography techniques there is risk of damage to the instrument and to the hardware components not supplied by ThermoMicroscopes ThermoMicroscopes reserves the right to decide at our discretion if an instrument failure is due to workmanship and thus covered under warranty or if the failure is induced by improper use of the AutoProbe instrument and the Nanolithography option In the case of the latter repair will not be covered under warranty and the customer will be charged at the prevailing time and material rates The Nanolithography option requires the AutoProbe Extended Signal Access Package eSAP low voltage module LVM for use with AutoProbe M5 instruments and for use with AutoProbe CP and LS instruments without an EC Norm switch on the rear panel of the base unit Using the LVM the user can open any signal path to alter input and output signals or to inject user defined signals There is risk of damage to the i
13. ate a vector in the image in the Image Display Click the Vector icon Use the mouse to place the cursor over the x y location where you want the vector to begin Click at that location and drag the cursor to the x y location where you want the vector to end The vector is displayed as a red line with an arrow at the x y location where the vector terminates Repeat this procedure to define multiple vectors To change the location of a vector Click the desired vector To change the location where the vector begins in the XO um and YO um textboxes enter new x and y coordinates respectively To change the location where the vector ends in the X1 um and Y1 um textboxes enter new x and y coordinates respectively Click the button to update the vector s position To delete a vector Double click the vector that you wish to delete The vector will be removed from the image Repeat this procedure to delete multiple vectors To define a grid in the image in the Image Display Double click the Grid icon By default a grid is displayed in the upper left corner of the image Repeat this procedure to define multiple grids To resize a grid Use the mouse to place the cursor on one of the four corners of the grid The cursor will change to a double arrow Click and drag the double arrow until the grid is the desired size Alternatively change the grid s size in x and y by entering new values in the Width um and Height um textbox
14. box c The SPMRUN dialog box will open The SPMRUM dialog box displays the command lines for the selected lithography technique The SPMRUN dialog box will close when the software has performed the lithography technique The pattern you created should now be written on the sample surface 22 Nanolithography Operating Instructions THERMOMICROSCOPES Re imaging the Modified Sample To see the effects of the lithography technique you can reimage the sample The image of the sample surface should show the pattern 1 Click the button to start a scan A topography AFM image will be built up in the Active Display Look at the image See if you can identify the location of the points or holes on the sample surface Nanolithography Software Reference 23 Nanolithography Software Reference This section of the operating instructions is the reference manual for the Nanolithography software The sections begins with a description of the controls in the Nanolithography window Then menus are introduced with special attention given to each menu item This section is designed so that you can skip straight to the software feature i e the control or the menu that you are interested in Note If you are new to Nanolithography you should begin with the tutorial Modifying a Sample Surface Using Nanolithography earlier in these operating instructions The tutorial gives you the basic skills you need to use Nanolithography Then y
15. cated above the Image Display The Menu bar includes a list of menus which contain menu items for controlling Nanolithography The next section Nanolithography Menus describes in detail each menu in the Menu bar The Status bar is located below the Image Display The Status bar displays information about the image in the Image Display Information can include the image file name and the parameters used to generate the image such as the scan size Some of the above mentioned regions of the Nanolithography window are discussed further in the sections below Nanolithography Software Reference 25 Pattern Controls The Pattern Pat controls include the following a Point icon for creating points a Vector icon for creating vectors a Grid icon for creating grids o a Bitmap icon for importing bitmap bmp images The above listed controls are used to create objects in a lithography pattern The function of each Pattern control is summarized in the Table 3 below Table 3 Pattern controls Control Function Background Loads the most recently saved image from a specified directory into the Image Display The directory that images are loaded from is set up using the Directories menu item of the Setup menu Point Allows you to define a point in the image in the Image Display Vector Allows you to define a vector in the image in the Image Display Grid Allows you to define a grid in the image in the Image Di
16. ch on the rear panel of the base unit AutoProbe Extended Signal Access Package Operation and Reference Guide for M5 and for CP and LS instruments that require an LVM The Nanolithography software must be run in tandem with ProScan Version 1 5 If you do not have ProScan Version 1 5 please contact the Customer Support Department Installing Nanolithography Software This section describes how to install the Nanolithography software on your system The software diskettes for Nanolithography include an automatic installation program that uses a disk compression utility The installation program is contained on two high density diskettes The diskettes are labeled in accordance with the operating system under which they should be installed Windows 95 or Windows 3 1 Follow the procedures in this section that are appropriate for operating system Important Before you install the Nanolithography software on your system you must install ProScan Version 1 5 If you do not have ProScan Version 1 5 contact the Customer Support Department For Windows 95 follow these steps to install the Nanolithography software 1 Insert the Nanolithography software diskette labeled Disk 1 for Windows 95 into the a drive of your computer If you use the b drive instead substitute b for a in the following procedures 6 Nanolithography Operating Instructions 2 There are two ways to install the Nanolithography software under Windows 95
17. ctor To change the vector s starting location in the XO um and YO um textboxes enter x and y coordinates respectively To change the vector s ending location in the X1 um and Y1 um textboxes enter x and y coordinates respectively Click the button to update the vector s position To resize a grid Click the desired grid In the Width um and Height um textboxes enter new x and y values respectively for the grid s size Click the button to update the grid s size To resize a bitmap image Click the desired bitmap In the Width um and Height um textboxes enter new x and y values respectively for the bitmap image s size Click the button to update the bitmap image s size 30 Nanolithography Operating Instructions THERMOMICROSCOPES Nanolithography Menus The Nanolithography Menu bar contains a list of menus The menus include the following File Lithography Edit Setup Insert Help These menus contain menu items which give you access to lithography controls as illustrated in Figure 2 below File Edit Insert Lithography Setup Help New Undo Edit SPM Image Export Tools About Open Repeat Edit Histogram Start Pattern Save Cut Stop Instruments Save As Copy Directories Exit Paste Colors Paste Special Figure 2 Nanolithography Menus The menus and menu items are described in detail in the sections below File
18. ctory c psi litho The directory c psi litho is a subdirectory of ProScan The directories for the Nanolithography software are listed in Table 2 below Table 2 Nanolithography directories Directory Files c psi litho lithography executable files c psi litho bitmaps bitmap files c psi litho scripts lithography parameter files The installation program creates a new program group called PSI Nanolithography in the Program Manager 7 8 Nanolithography Operating Instructions THERMOMICROSCOPES The installation program will ask for Disk 2 Insert the diskette labeled Disk 2 for Windows 3 1 into your floppy drive and then click the button to continue the installation process The Nanolithography Setup window appears on the screen The default directory for the software files c psi litho is displayed in the window The installation program gives you the option of renaming the directory c psi litho We strongly suggest that you do not rename this directory since it will cause confusion when future versions of Nanolithography are released Click the Computer button to continue the installation process When installation of the Nanolithography software is complete the installation program returns to the Program Manager Configuring Nanolithography AutoProbe M5 This section includes step by step instructions for configuring AutoProbe M5 for use with the Nanolithography option The configuration you use de
19. e The following topics are covered in these operating instructions a section that describes the installation and the setup of the Nanolithography option a tutorial that describes modifying a surface using a common lithography technique a software reference chapter that describes the features and the controls of the Nanolithography software These operating instructions assume that you are familiar with your AutoProbe system and that you know how to operate in AFM and STM modes If you are new to AutoProbe refer to the User s Guide that is appropriate for your system Note The instructions in this document that refer to AutoProbe CP are applicable to AutoProbe LS instruments as well The instructions in this document that refer to AutoProbe VP2 are applicable to AutoProbe VP as well 4 Nanolithography Operating Instructions About Nanolithography Techniques THERMOMICROSCOPES The Nanolithography option is used to design lithography in AFM or STM mode specific to your application There are two lithography techniques that can be developed with the Nanolithography option 1 voltage pulse lithography and 2 z scanner movement lithography Voltage pulse lithography uses short or long duration voltage current pulses that are applied between the tip and the sample to modify the sample surface Voltage pulse lithography results in the deposition of some barrier contaminants at an x y location on the surface Voltage pulse li
20. e and taking an image in ProScan Data Acquisition opening and loading the image into the Nanolithography software defining important parameters for the lithography technique using Nanolithography software tools creating a lithography pattern using Nanolithography software tools saving the parameters and the pattern for the lithography technique using Nanolithography software tools writing the pattern on the sample surface using Nanolithography software tools reimaging the sample in ProScan Data Acquisition to see how it was modified The above listed procedures are described in detail in the sections below Follow the procedures in the sections that are appropriate for your instrument 12 Nanolithography Operating Instructions THERMOMICROSCOPES Setting Up the Instrument for AFM AutoProbe CP To set up AutoProbe CP for operation in contact AFM mode follow these steps 1 Install a scanner as described in the User s Guide 2 Secure a sample onto a sample mounting disk with a hard glue for example epoxy Place the sample mounting disk onto the sample holder of the scanner as described in the User s Guide 3 Install one of the probe heads AFM STM AFM LFM or AFM NCM onto the XY stage as described in the User s Guide 4 Insert a premounted contact Ultralever probe cassette into a contact AFM probe cartridge See Part I of the User s Guide for details 5 Insert the probe cartridge into the pr
21. es respectively Click the button to update the grid s size To change the location of a grid Use the mouse to place the cursor at the center of the grid Then click and drag the grid to the desired location To delete a grid Use the mouse to place the cursor over the grid that you wish to delete Then click the button The grid will be removed from the image Repeat this procedure to delete multiple grids Nanolithography Software Reference 27 To load a bitmap image into the image in the Image Display Double click the Bitmap icon The Open dialog box will open allowing you to load a previously saved bitmap file from any drive or directory into the Image Display Select the file name of the bitmap bmp image that you want to load and then click the button The bitmap image will be enclosed in a black box Repeat this procedure to load multiple bitmap images To resize a bitmap image Use the mouse to place the cursor on one of the four corners of the black box that encloses the bitmap image The cursor will change to a double arrow Click and drag the double arrow until the bitmap is the desired size Alternatively change the bitmap image s size in x and y by entering new values in the Width um and Height um textboxes respectively Click the button to update the bitmap image s size To change the location of a bitmap image Use the mouse to position the cursor at the center of the black box that encloses the bitmap ima
22. ge Click and drag the bitmap image to the desired location To delete a bitmap image Use the mouse to place the cursor over the bitmap image that you want to delete Then click the button The bitmap image will be removed from the image Repeat this procedure to delete multiple bitmap images Object Controls The Object controls display information about the image in the Image Display Information includes the scan size and the number of data points used to generate the image The function of each Object control is summarized in the Table 4 below 28 Nanolithography Operating Instructions THERMOMICROSCOPES Table 4 Object controls Control Function Resize This control is currently not used Expands a grid to include the entire image in the Image Display Update Updates the size and or the location of an object for example a point in the image in the Image Display Delete Deletes a selected grid or bitmap image from the image in the Image Display Lists the scan size of the image in the Image Display in the x direction m D a gt Rl Fl pl ks 5 3 Lists the scan size of the image in the Image Display in the y direction dx Displays the number of data points used to collect the image in the Image Display in the x direction dy Displays the number of data points used to collect the image in the Image Display in the y direction When you define an object in the image the Object controls on t
23. graphy Technique The parameters and the pattern that constitute a lithography technique can be saved as a lithography file lit By default lithography files are stored in the directory c psi litho scripts Lithography files can be retrieved at any time To save the lithography technique you defined in this tutorial follow these steps 1 From the File menu select Save The Save As dialog box will appear 2 Select the drive and the directory where you want to store the lithography file By default lithography files are saved in the directory c psi litho scripts In general we recommend that you store any lithography files you create in this directory so that they can be easily located and retrieved 3 Enter a name for the lithography technique in the File Name textbox and the file extension it 4 Click the button to save the lithography technique and close the dialog box Executing the Lithography Technique 1 Go to ProScan Data Acquisition To obtain control of the Nanolithography software do the following a Disable i e uncheck the Z Servo checkbox in Image mode This disables the z feedback loop b Open X Y Trace by selecting X Y Trace from the Tools menu 2 Implement the lithography technique as follows a From the Lithography menu select Start b The Lithography Check Off dialog box will appear containing several important warnings After you read these warnings click the button to close the dialog
24. guration dialog box will open c Configure the software for operation in contact AFM mode by making the following selections in the dialog box VP Scanner Select the file that contains the calibration parameters for the scanner that is installed VP Analog Digital Switch DIGITAL VP Mode Switch AFM Piezo Cantilever Select the filename that corresponds to the cantilever you are using for example select PL20 if you are using a contact Piezolever Voltage Mode HI d Click the button to close the dialog box The next section describes how to take an AFM image THERMOMICROSCOPES Modifying a Sample Surface Using Nanolithography 17 Taking an AFM Image To take an AFM image do the following 1 Perform an auto approach a For VP2 unlock the vibration isolation stage as described in Part I of the User s Guide b Click the button in Move mode to initiate an auto approach c After the tip has engaged the sample switch to Image mode by selecting Image Mode from the Mode menu Or click the Image mode icon Z Select the Topography signal to collect topography data a From the Setup menu select Input Config to open the Input Configuration dialog box Alternatively click the Input Config icon ol b The Topography signal should be selected by default If it is not in the Available Signals listbox select Topography and then click the button This enables you to collect topography data and to moni
25. he screen are replaced by new controls The new controls are specific to the object you define For instance when you define a point in the image the Object controls enable you to enter x and y coordinates for that point The controls for each object type are listed in Table 5 through Table 7 below The Object controls for a point are listed in Table 5 below Table 5 Point controls Control Function X0 um Enables you to enter a point s x location YO um Enables you to enter a point s y location Nanolithography Software Reference 29 The Object controls for a vector are listed in Table 6 below Table 6 Vector controls Control Function X0 um Enables you to enter a vector starting location in x Y0 um Enables you to enter a vector starting location in y X1 um Enables you to enter a vector s ending location in x Y1 um Enables you to enter a vector s ending location in y The Object controls for a grid and a bitmap are the same and are listed in Table 7 below Table 7 Grid and bitmap controls Control Function Width um Enables you to enter a grid or bitmap image size in x Height um Enables you to enter a grid or bitmap image s size in y To change the location of a point Click the desired point In the XO um and YO um textboxes enter the point s x and y coordinates respectively Click the button to update the point s location To change the location of a vector Click the desired ve
26. lder called PSI Nanolithography in the Program folder of the Start menu THERMOMICROSCOPES Installing Nanolithography Software 4 The Nanolithography Setup window appears on the screen The default directory for the software files c psi litho is displayed in the window The installation program gives you the option of renaming the directory c psi litho We strongly suggest that you do not rename this directory since it will cause confusion when future versions of Nanolithography are released 5 Click the Computer button to continue the installation process 6 The installation program will ask for Disk 2 Insert the diskette labeled Disk 2 for Windows 95 into your floppy drive Then click the button to continue the installation process When installation of the Nanolithography software is complete the installation program returns to the Desktop For Windows 3 1 follow these steps to install the Nanolithography software 1 Insert the Nanolithography software diskette labeled Disk 1 for Windows 3 1 into the a drive of your computer If you use the b drive instead substitute b for a in the following procedures Z In the Program Manager from the File menu select Run Enter a setup in the Command Line textbox and then click the button 3 The Setup dialog box appears with the following message Copying Initialization Files The installation program places the Nanolithography software files into the dire
27. nstrument since the LVM makes it possible to modify input and output signals Note that these instructions do not pertain to the low voltage SAM model APCT 1000 001 which has safety and configuration considerations that differ from the eSAP LVM If using the low voltage SAM with Nanolithography refer to the AutoProbe Signal Access Module Operation and Reference Guide for details on safety and configuring and connecting the low voltage SAM Read all instructions before installing Before installing removing or reconfiguring the LVM TURN OFF THE POWER When using the LVM take all appropriate precautions to ensure that the operator is never exposed to voltage Call the Customer Support Department at 408 747 1600 with any safety or operating questions you may have when installing or using the Nanolithography option and the LVM 2 Nanolithography Operating Instructions THERMOMICROSCOPES Introduction 3 Introduction These operating instructions describe Nanolithography an optional extension to your AutoProbe CP LS M5 VP2 or VP system The Nanolithography option includes software and the AutoProbe Extended Signal Access Package eSAP low voltage module LVM if required The Nanolithography option can be used to develop lithography techniques specific to your application for instance modifying a photoresistive surface that has been deposited on a substrate Lithography techniques can be developed using AFM or STM mod
28. nu contains menu items for loading an image into the Image Display and creating a custom color map Insert menu items include the following Insert Histogram The above listed menu items are described in Table 9 below 32 Nanolithography Operating Instructions THERMOMICROSCOPES Table 9 Insert menu items Menu item Function Insert Opens the Open dialog box which allows you to load an image from any drive or directory into the Image Display Histogram Opens the Chameleon dialog box which allows you to create a custom color map for the image in the Image Display Lithography Menu The Lithography menu contains menu items for starting and stopping lithography techniques Lithography menu items include the following Export Start Stop The above listed menu items are described in Table 10 below Table 10 Lithography menu items Menu item Function Export This menu item is currently not enabled Start Starts the implementation of a lithography technique Stop Stops the implementation of a lithography technique Setup Menu The Setup menu contains menu items for defining lithography parameters and for managing lithography files Setup menu items include the following Tools Directories Pattern Colors Instruments The above listed menu items are described in Table 11 below Nanolithography Software Reference 33 Table 11 Setup menu items Menu item Function Tools Opens the Tool
29. obe head as described in Part I of the User s Guide 6 Turn on the power to the AEM Then turn on the power to the computer 7 Turn on the power to the color video monitor 8 Open ProScan Data Acquisition as you normally do 9 Align the deflection sensor as follows a Turn on the power to the probe head by clicking the Head ON icon b Locate and focus on the cantilever using the optical view as described in Part I of the User s Guide c Ifthe laser beam is not reflecting off the back of the cantilever tip then you m need to adjust the position of the laser Use the two laser beam steering screws to move the laser Move the laser until you can see a red spot on the back of the cantilever Modifying a Sample Surface Using Nanolithography 13 d When the laser spot is reflecting off of the back of the cantilever adjust the laser position on the PSPD to maximize the laser intensity using the PSPD forward backward and PSPD up down screws Note Maximum laser intensity is indicated differently on different probe heads for example AFMSTM or AFMLFM See the User s Guide for details 10 Configure the software for contact AFM as follows a If the probe head is turned on turn it off now by clicking the Head ON icon e b Select Configure Parts from the Setup menu or click the Configure Parts icon Ta The ProScan Database Configuration dialog box will open c Configure the softwa
30. olithography Operating Instructions Summary THERMOMICROSCOPES In these operating instructions you learned about the Nanolithography components about the different types of lithography techniques how to install Nanolithography software your system how to set up your system for use with Nanolithography how to modify a sample surface using z scanner movement lithography in contact AFM mode about the Nanolithography software controls Once you are familiar with the information provided in these operating instructions you should be ready to develop lithography techniques specific to your application
31. ou can return to this section to learn more about specific software features To open Nanolithography do the following For Windows 95 From Start click PSI Nanolithography in the Program folder For Windows 3 1 Double click the PSI Nanolithography icon in the Program Manager The Nanolithography window is shown in Figure 1 below Ale Edit nast Litegraphy Setup Help Erect grourei Fair t TELET rid Eitrnap Irae Display cea Lovee C mdh pr C Haart ur Status tar Figure 1 The Nanolithography window 24 Nanolithography Operating Instructions THERMOMICROSCOPES Nanolithography Controls The Nanolithography window is divided into several regions The window includes the Image Display Pattern controls Object controls a Menu bar and a Status bar The Image Display is located at the center of the window Images that are loaded into Nanolithography are displayed in the Image Display The Pattern Pat controls are displayed to the right of the Image Display Pattern controls are used for creating objects that constitute a lithography pattern for example a point or a grid The Object controls are displayed to the right of the Image Display Object controls display the scan size and the number of data points for the image in the Image Display When you select an object in the Pattern controls the Object controls allow you to adjust the size and the location of an object The Menu bar is lo
32. pends on the lithography technique you wish to design Note the following No reconfiguration of the instrument or the software is required for z scanner movement lithography A reconfiguration of the software is required for voltage pulse lithography with a sample bias voltage up to 8 V A reconfiguration of the hardware using an eSAP LVM and an external amplifier is required for voltage pulse lithography for a sample bias voltage greater than 8 V To reconfigure the software for voltage pulse lithography using a sample bias voltage up to 8 V follow these steps Open the Nanolithography software as you normally do Select Instruments from the Setup menu The Instrument Output Control dialog box opens Select the DAC 3 option button in the Instrument Output Control dialog box DAC 3 provides access to the sample bias voltage signal Setting Up Nanolithography AutoP robe M5 9 To reconfigure the hardware for voltage pulse lithography using a sample bias voltage greater than 8 V follow these steps 1 Configure the LVM for use with Nanolithography so that the voltage from the external amplifier can be applied to the sample bias voltage signal via one of the 8 BNC connectors on the LVM For complete details on configuring the LVM refer to the AutoProbe Extended Signal Access Package Operation and Reference Guide a Place the LVM ona flat surface At this point the LVM should NOT be connected to the instrument
33. re for operation in contact AFM mode by making the following selections in the dialog box Head type Select the probe head type that you have installed Scanner Select the file that has the calibration parameter values for the scanner that you have installed e g select 100UM for a 100um scanner Head mode AFM Beam bounce cantilever Select the file that corresponds to the cantilever you are using e g select ULO6B if you are using the B cantilever of a contact Ultralever Electrochemistry ON OFF OFF Voltage mode HI d Click the button to close the dialog box Next you will take an AFM image of the sample surface Go to the section Taking an AFM Image 14 Nanolithography Operating Instructions THERMOMICROSCOPES Setting Up the Instrument for AFM AutoProbe M5 To set up AutoProbe M5 for operation in contact AFM mode follow these steps 1 If a scanning head is installed on your instrument remove it as described in Part I of the User s Guide 2 Install a premounted contact Ultralever probe cassette onto the spring clip of the scanning head as described in the User s Guide 3 Install the scanning head on your instrument as described in the User s Guide 4 Set the NCAFM switch on the front panel of the interface module to the NC AFM position This selection makes contact AFM operation available 5 Place a sample onto the sample chuck as described in the User s
34. s Setup dialog box which allows you to define parameters for a lithography technique For example you can choose a Point Setup for use with points and bitmaps or a Continuos Line Setup for use with vectors and grids You can also set Z Scanner parameters for z scanner movement lithography and Sample Bias parameters for voltage pulse lithography as well as the scanner speed Pattern Opens the Setup Pattern dialog box For a grid the dialog box enables you to select the method used to write lines of the grid on the sample surface Lines of a grid can be written in the same direction or in alternating directions Instruments Opens the Instrument Output Controls dialog box For M5 and VP2 the includes for configuring the software to match the installed hardware See the section appropriate for your instrument in these operating instructions Setting Up Nanolithography AutoProbe M5 or Setting Up Nanolithography AutoProbe VP2 Directories Opens the Default Directories dialog box which allows you to select the default directories for the following files lithography files lit bitmap files bmp and image files hdf Colors Opens the Chameleon dialog box which allows you to create a custom color map for the image in the Image Display Help Menu The Help menu contains the About menu item The About menu item opens the About dialog box which lists the version of Nanolithography that is installed on your system 34 Nan
35. splay Bitmap Allows you to load a previously saved bitmap bmp image into the Image Display To load the most recently saved image into the Image Display using the Background control Set up the directory that you want to load images from using the Default Directories dialog box To open this dialog box from the Setup menu select Directories In the SPM Image textbox enter the path for the directory where the image you just acquired is stored Then click the button to close the dialog box Double click the Background icon The image that was most recently saved to the directory specified in the Default Directories dialog box will be loaded into the Image Display To create a point in the image in the Image Display Click the Point icon Use the mouse to place the cursor over the x y location in the image where you want to define a point Then double click the mouse button A red circle indicates the location of the point Repeat this procedure to define multiple points 26 Nanolithography Operating Instructions THERMOMICROSCOPES To change the location of a point Click the desired point and drag it to a new x y location in the image Alternatively in the XO um and YO um textboxes enter the x and y coordinates respectively for the point s location Click the button to move the point to its new location To delete a point Double click the point that you wish to delete The point will be removed from the image To cre
36. thography is performed with the z feedback loop on or off Note Voltage pulse lithography can only be performed in STM mode with AutoProbe VP2 instruments Z scanner movement lithography uses a voltage signal that is applied to the scanner causing the scanner to extend in the z direction There are two key parameters that must be defined for z scanner movement lithography 1 the scanner extension distance and 2 the force with which the scanner extends Z scanner movement lithography is performed with the z feedback loop off Note The lithography technique you wish to develop may require hardware components including electronics other than those provided by ThermoMicroscopes Setting Up Nanolithography 5 Setting Up Nanolithography This section describes how to set up the Nanolithography option on your instrument Setting up the Nanolithography option consists of the following general procedures making sure that you have the components required for set up installing the Nanolithography software modifying your instrument for the lithography technique you plan to use The sections below describe the above listed procedures in detail Required Components The Nanolithography option consists of the following components aset of software diskettes for Windows 95 or Windows 3 1 an AutoProbe Extended Signal Access Package eSAP low voltage module LVM for M5 and for CP and LS instruments without an EC Norm swit
37. tions on the image in the Image Display 1 Select the point shape by clicking the Point icon 2 To define the location of a point use the mouse to place the cursor over an x y location in the image Then double click the mouse button A red circle will be displayed on the image at the selected x y location When you define a point the Width um and Height um textboxes are replaced by X0 um and the YO um textboxes The XO um textbox displays the x coordinate of the point The YO um textbox displays the y coordinate of the point 3 You can define multiple points in the image by repeating step 2 above 4 If you wish to delete a point in the image double click the desired point The point will be removed from the image Updating Parameters for the Lithography Pattern When you want to change the parameters for an object in a pattern you must update the parameters in the Tools Setup dialog box This section describes this procedure 1 Click the icon in the Pattern controls that represents the object for which you want to define new parameters In this tutorial if you wish to change the parameters for a point you click the Point icon 2 Click the desired object in the image e g a point 3 Change the desired parameters in the Tools Setup dialog box See the section Defining Important Parameters in these operating instructions for details Modifying a Sample Surface Using Nanolithography 21 Saving the Litho
38. tor the Topography signal on the Oscilloscope Display c Click the button to close the Input Configuration dialog box 3 Select scan and feedback parameters as you normally do e g the scan rate Make sure that the Z servo checkbox is enabled When the Z Servo checkbox is enabled the z feedback loop is on and an image of surface topography is generated 4 Check to be sure that the Save to Buffer icon dal is ON or that the Save to Buffer menu item of the Mode menu is selected This sets the image you acquire to be saved on your hard disk By default the image is be saved to the directory c spmdata unless you specify otherwise in the New Session dialog box 5 Click the button to start a scan A topography AFM image will be built up in the Active Display 18 Nanolithography Operating Instructions THERMOMICROSCOPES Starting Nanolithography and Loading an Image This section describes how to start Nanolithography and how to load the AFM image you just acquired in Data Acquisition into the Nanolithography software 1 Open Nanolithography as you normally do The Nanolithography window is divided into several regions The image you work with will be displayed at the center of the window in the Image Display Above the Image Display is a Menu bar which contains menus that are used in the design and the implementation of lithography techniques Below the Image Display is a Status bar which contains information abo
39. ut the image Information can include the image file name and the parameters used to acquire the image such as the scan size At the right of the Image Display are Pattern and Object controls which are used to create lithography patterns 2 Load the AFM image that you acquired in Data Acquisition as follows a From the Insert menu select SPM Image The Open dialog box will appear b Select the directory where the image you just acquired is stored By default this directory is c spmdata unless you specified otherwise in the New Session dialog box c Select the file name of the image Then click the button Before the image is loaded into the software a lst order polynomial fit is automatically applied to the image The Ist order polynomial fit removes slope in the image in the x and y directions The circular red light in the upper right corner of the window blinks while the 1st order polynomial fit is performed on the image When the software completes the fit the image will be loaded into the Image Display The scan size of the image is listed in the Width um and Height um textboxes The number in the Width um textbox represents the scan size in the horizontal i e the x direction The number in the Height um textbox represents the scan size in the vertical i e the y direction The number of data points used to collect the image is listed in the X Points and Y Points textboxes The number in the X Points textbox
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