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Agilent 4155C/4156C User's Guide, Volume 2

1. STRESS STRESS SETUP S4JANO1 01 30PM STRESS MODE PULSE PURAT EON UNIT PGUL pele PULSE 1 0ms AME COUNT PERIOD 10 0 ma KACCUMULATED STRESS WIDTH 5 00ms 5 00ms 0 0000s DELAY TIME 0 00000 s 0 00000 s PEAK VALUE 100mY 100mY HOLD TIME BASE VALUE 0 000 Y 0 000 Y 0 000 s LEADING TIME 200 ns 200 ns TRAILING TIME 100 ns 100 ns XFILTER 9 IMPEDANCE LOW LOW STRESS CONTINUE AT ANY Status CONS TAN UNIT NAME MODE SOURCE COMPLIANCE DURATIO CHANNEL 2 PREV NEXT DEF PAGE PAGE GO1012 100x 5 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Defining Stress Conditions To Set up ac Pulse Output 1 Press the Stress key in the PAGE CONTROL key group Confirm that the following is set on the STRESS CHANNEL DEFINITION screen for the PGUs that you want to set up for ac stress e VPULSE is set in the MODE field e SYNC is set in the FCTN field Select STRESS SETUP primary softkey In the PERIOD field enter the pulse period In the WIDTH field enter the pulse width In the DELAY TIME field enter the delay time which is the time from the stress start to the beginning of the pulse leading edge See Delay time on page 5 18 In the PEAK VALUE field enter the pulse peak value In the BASE VALUE field enter the pulse base value In LEADING TIME field enter the leading edge transition time of p
2. STRESS CHANNEL DEFINITION S4JANO1 04 30PM CHANNELS SMU PG SELECTOR REYNE MEASURE STRESS MEASURE STRESS UNIT NAME MODE NAME FCTN 1 SMU PGU SMUL MP vi 2 SMU PGU SMU2 MP v2 3 OPEN OPEN SMU3 MP v3 4 OPEN OPEN SMU4 MP SMUS MP SMUG MP VSUL ysue PGUL VPULSE SYNC TRIGGER SETUP PGU2 VPULSE EINE DISABLE GNDU POLARITY POSITIVE DELETE ROW SYNC STRESS STRESS NEXT SETUP FORCE PAGE UGTO1011 100x70 5 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Defining Stress Conditions To Set up Stress Condition Timing 1 Press Stress key in the PAGE CONTROL key group 2 Select STRESS SETUP primary softkey 3 In the MODE field of the STRESS MODE area select e DURATION secondary softkey to specify how long to force stress e PULSE COUNT secondary softkey to specify how many pulses to output for force stress for ac stress only 4 In the DURATION or PULSE COUNT field enter the duration or pulse count You can select FREE RUN secondary softkey to output stress continuously 5 Inthe STRESS Status field select e CONT AT ANY secondary softkey to continue forcing the stress even if an abnormal status occurs STOP AT ANY ABNORM secondary softkey to stop forcing the stress when any abnormal status occurs e STOP AT COMPLIANCE secondary softkey to stop forcing the s
3. GRAPHILIST GRAPHICS SHORT 93Aug09 06 18PM MARKER 751 2530mV 10 00UA 1 0342uA CA CA ARKER 1 00 1 00 IN MAX TER POLATE 8 18 OFF LA DIRECT JARKER CURSOR decode decode div div ARKER SKIP AUTO ANALY SIs 100 f 100 f CURSOR 0 000 VBE V 100 m div 1 08 OFF AXIS LINE SCALING DISPLAY SWEEP TIMING CONST kes SETUP SETUP SETUP SETUP UGTO2001 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 15 Analyzing Measurement Results Manual Analysis To Specify between Measurement Points on Curve 1 Select MARKER CURSOR primary softkey 2 Set MARKER secondary softkey to ON Marker and marker coordinates are displayed Selecting MARKER toggles between ON and OFF 3 if both Y1 and Y2 axis are set up Select the desired marker axis by using AXIS primary softkey The selected marker is highlighted Selecting AXIS primary softkey toggles between Y1 and Y2 4 Set INTERPOLATE secondary softkey to ON Selecting INTERPOLATE secondary softkey toggles between ON and OFF 5 Rotate rotary knob to move the marker to desired measurement point If both Y1 and Y2 axis are set up a circle marker 0 is displayed on measurement curve of Y1 axis and an asterisk marker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and
4. Current Voltage Output Range Measurement Constant Range 2V 20 V 40 V 100 V 10 pA 100 pA Ap 4 0 4 0 4 0 4 0 Bp 0 0025 0 018 0 035 0 088 Cp 0 0023 0 0052 0 008 0 019 Dp 0 0009 0 002 0 003 0 0076 Ao 0 07 Bo 3 7E 15 Boc 2 6E 18 Co 3 1E 15 Coc 6 6E 18 Do 7 2E 16 Doc 2 6E 18 1 nA Ap 0 51 0 51 0 52 0 52 Bp 0 0057 0 024 0 047 0 11 Cp 0 003 0 0048 0 0088 0 018 Dp 0 0041 0 008 0 015 0 027 Ao 0 041 Bo 7 0E 15 Boc 8 7E 18 Co 3 0E 14 Coc 6 0E 18 Do 4 0E 15 Doc 8 7E 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 29 Quasi static C V Measurements Considering Measurement Accuracy Current Voltage Output Range Measurement Constant Range 2V 20 V 40 V 100 V 10 nA Ap 0 51 0 51 0 52 0 52 Bp 0 036 0 024 0 047 0 11 Cp 0 003 0 0048 0 0088 0 018 Dp 0 0041 0 008 0 015 0 027 Ao 0 041 Bo 7 3E 15 Boc 8 7E 18 Co 6 0E 14 Coc 6 0E 18 Do 4 3E 15 Doc 8 7E 18 4 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 4 2 Quasi static C V Measurements Considering Measurement Accuracy Constant Value for calculating the Measurement Accuracy MPSMU HPSMU Current Voltage Output Range 200 V is only for HPSMU Measurement Constant Range 2V 20 V 40 V 100 V 200 V 1I nA Ap 0 521 0 52 0 52 0 53 0 54 Bp 0 00398 0
5. o DC Stress Signal displaying the stress force time The STRESS STRESS FORCE screen is displayed while stress is being forced On this screen the time that stress has been forced is displayed and updated every second Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 3 Table 5 1 Stress Force Stress Function Stress Output Channels Stress output channel is defined as the unit used to force stress Available Units The 4155C 4156C can force dc voltage stress de current stress and ac voltage stress by PGUs in Agilent 41501 A B but cannot force ac current stress Table 5 1 shows available units and allowable modes for stress sources Available Units and Modes for Stress Force Units DC Voltage Stress DC Current Stress dica 3 SMU yes yes VSU yes PGU yes yes Also SMUs can be set to COMMON mode Setting the Stress Channels You can set up units for the stress force state on the STRESS CHANNEL DEFINITION screen independently from the measurement and standby states that you set on the CHANNELS CHANNEL DEFINITION screen For example you can use the same SMU as a measurement channel in the measurement state and as a stress force source in the stress force state To set a unit to the stress channel select SYNC in the FCTN field for the unit If you select NSYNC the 4155C 4156C does not monitor the bias output time for the unit The unit
6. Figure 4 17 Calculation Example of Measurement Accuracy MPSMU HPSMU 10 9 ah 7 gt 6 E lt 2 4 a 3 e 2 1 0 Se 0 001 0 01 0 1 1 QSCV Measurement Voltage V Offset Accuracy F 0 001 0 01 0 1 1 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 2 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 45 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 18 Calculation Example of Measurement Accuracy MPSMU HPSMU 20 18 16 14 S i2 3 10 lt EZ 8 3 a 6 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 Offset Accuracy F 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF 4 46 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements
7. This setup is to assign X axis to time and Y1 axis to VG 4 Move the field pointer to the DATA VARIABLES field Then select the INDEX softkey to display the data index above graph in the results display screen GRAPH LIST GRAPHICS screen DISPLAY DISPLAY SETUP OODECO7 02 18PM GRAPH Ics DISPLAY MODE GRAPHICS LIST GRAPHICS Xaxis Ylaxis Y2axis NAME TIME vG SCALE LINEAR LINEAR MIN 0 000000000 s 0 000000000 v MAX 200 00ms 1 000000 V GRID LINE PARAMETER ON ON DATA VARIABLES DATA DISPLAY RESOLUTION INDEX NORMAL GRAPHICS Select Display Mode with softkey or rotary knob B DISPLAY ANLYSIS PREV NEXT SETUP SETUP PAGE PAGE 3 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Making a Measurement Step 6 Execute the measurement Press Single front panel key to execute the measurement The 4155C 4156C starts the thinned out sampling measurement and repeats one point measurement until the stop condition is satisfied then stops the sampling After the sampling measurement You will get measurement results as shown in the following example GRAPH LIST GRAPHICS SHORT OQODECO7 04 52PM MARKER MARKER 196ms 921 20mv INDEX 20 ON v MARKER MIN MAX 1 00 INTER ve
8. Figure 8 5 Simplified Circuit Diagram of the 16441A R Box 164414 R Box Input guard CH1 Sense Cc oo Sense SW From SMU D CH 4 on oo Output E To DUT swe Force 1M0 Force 100 k o SW3 DKO so Sw4 Input gir circuit common ae Sense G os t fe Sense SW l From SMU DCH 2 Tog A Output E To DUT Swe Force 1M9 Force 100 kQ a SW3 10kQ o W4 Control a From a 4155 4156 D H Control Logic E 0 7 UGDO4020 8 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Example Support Functions R BOX Control To Use R Box 1 Connect the 16441A R Box to the 4155C 4156C and to the 16442A B Test Fixture or connector plate on your shield box 2 Press Chan front panel key of the PAGE CONTROL key group 3 Select CHANNEL DEF primary softkey to display the CHANNELS CHANNEL DEFINITION screen 4 Inthe SERIES RESISTANCE fields select e 0 ohm secondary softkey to connect 0 Q resistance 10k ohm secondary softkey to connect 10 KQ resistance e 100k ohm secondary softkey to connect 100 KQ resistance 1M ohm secondary softkey to connect 1 MQ resistance Resistance is switched just before and just after measurement state The following figure shows an example setup to connect 10 KQ resistance to SMU1 and SMU2 CHANNELS CHANNEL DEFINITION 94JANO1 01 30PM MEASUREMENT MODE SWEEP CHANNELS MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE 100k SMUL
9. 0 001 0 01 0 1 1 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 2 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF 4 52 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 25 Calculation Example of Measurement Accuracy MPSMU HPSMU 20 18 16 14 S 12 E 3 10 lt 2 8 El e 6 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 1 E 11 1 E 12 Offset Accuracy F 1 E 13 1 E 14 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 53 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 26 Calculation
10. Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 19 Built in Functions L2G L2G Returns the slope of LINE2 Syntax L2G If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the slope by using the following formula e If X and Y axes are both linear scaling a Y1 YX Xp If X axis is logarithmic scaling and Y axis is linear scaling a Y1 yo log x log Xp If X axis is linear scaling and Y axis is logarithmic scaling a log y log yo x Xp If X and Y axes are both logarithmic scaling a log y log yo log x log Xp Where a Slope of LINE2 Xo Yo XY X and Y coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area 9 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions L2G1 L2G1 Returns the slope of LINE2 for Y1 axis Syntax L2G1 This function calculates the slope by using the following formula e If X and Y1 axes are both linear scaling a y1 JMX Xp e If X axis is logarithmic scaling and Y1 axis is linear scaling a Y1 yo log x log xo e If X axis is linear scaling and Y1 axis is logarithmic scaling a log y log yo x1 Xp If X and Y1 axes are both logarithmic scaling a log y log yo log x log Xp Where a Slope of LINE2 XQ Yo X1 y1 X and Y1 coordinate values at the two points where LINE2 intercepts the perimeter of
11. 1 Connecting your DUT to the 4155C 4156C See Chapter 10 for procedures 3 87 o ese 8 53 coe A ajeg eeeee0 Ooo 29998895 A l ESE 2 Defining the stress units and constant IR o ang output units See To Set up Stress Source peame Pe Channels on page 5 13 To use the selector see Chapter 8 E Ga Ma cz aE sical eel JJ 3 Setting the stress forcing parameters and ene cna constant output value The following tasks BGO e ec are described mamoe oe LEE aR gong ie Ee e To Set up Stress Condition Timing ssrrees CONTINE ATA status e To Set up ac Pulse Output SOURCE COPLIANE e To Set up de Output DURATION mor pie pace Executing the stress forcing See To Force Stress on page 5 20 Ona ooo DE 0 ooo0o0000 seso o gouu ooo o is Oo ooo oooooo N aS 5 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Defining Stress Conditions To Set up Stress Source Channels 1 Press Stress key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 In the MODE field of desired unit in CHANNELS area select e V secondary softkey for dc voltage stress forcing mode SMU VSU and PGU e I secondary softkey for de current stress forcing mode SMU e VPULSE secondary softkey for ac voltage stress forcing m
12. KNOB SWEEP screen KNOB SWEEP 94JANO4 01 30PM CSRI 500 0000mV 5 000000mA mA 10 00 IF ne EN 1 000 f Idiv a E ARA 0000 0000 VF 1000 div V 1 000 Y AXIS SETUP DISPLAY VARI VARZ CONST ASSIGN COPY SETUP SETUP SETUP SETUP UGDO4007 To start the knob sweep measurement press the green key and then the Single front panel key The 4155C 4156C displays KNOB SWEEP screen and starts measurements To stop the knob sweep measurement press the Stop front panel key or a PAGE CONTROL group key Cursor On the KNOB SWEEP screen the long cursor is always displayed and you cannot turn it off In the CURSOR field coordinate values of the cursor are displayed in X Y order X axis setting X axis always plots the VAR1 source value Maximum value of X axis is the setting value of the VARI RANGE secondary softkey of VAR1 SETUP softkey group Y axis setting Y axis always plots the measurement data of the measurement channel You can select the measurement channel by using the secondary softkeys of the Y AXIS ASSIGN softkey group Maximum value of Y axis scale is the compliance value of the measurement channel 2 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Measurement Functions Analysis of the Knob Sweep Measurement Results On the KNOB SWEEP screen you cannot use analysis functions and user functi
13. Manual Analysis e Automatic Analysis 6 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Analysis Function Analysis Function The 4155C 4156C provides the following functions for analyzing measurement results Marker on the GRAPH LIST GRAPHICS screen Marker on the GRAPH LIST LIST screen Cursor Line Drawing Scaling Functions Overlay Display Function Automatic Analysis Function Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 3 Figure 6 1 Analyzing Measurement Results Analysis Function Marker on the GRAPH LIST GRAPHICS screen Markers on the GRAPH LIST GRAPHICS screen GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM MARKER 751 2530mv 10 00UA 1 0342UuA CA CA MARKER 4 00 1 00 MIN MAX LH E IC IB Ki P DIRECT MARKER CURSOR decode decode div div MARKER SKIP AUTO ANALY SIS 100 f 100 f CURSOR 0 000 VBE y 100 m div 1 00 OFF AXIS LINE SCALING DISPLAY SWEEP TIMING CONST Y2 SETUP SETUP SETUP SETUP UGTO2002 You can display the markers on the plotted measurement curves on the GRAPH LIST GRAPHICS screen by selecting MARKER CURSOR primary softkey then selecting MARKER secondary softkey The marker for Y1 axis
14. Maximum 8 units if the 41501 is used 6 SMUs and 2 VMU s If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units d jf compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time e Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 23 Sampling Measurements Defining Measurement Conditions Defining Measurement Conditions This section covers the tasks for sampling measurements The basic procedure to test your DUT is as follows a E N i XY Connecting your DUT to the 4155C 4156C See Chapter 10 for procedures 8 8 Q ss g So y 200 Y o eos ooo v Ojoo 000000 eS O 00 00000 p Y Oooo oooO 8sssse0 Y Mee 0 PPeeen9n 2 Defining measurement mode and ee is measurement units that you use to make a measurement See To Def
15. Vo Voltage at the Nth step voltage Vq V ILo Leakage current at the Nth step voltage Vq V I Current at the voltage transition to the Nth step voltage Vq V V Voltage at the Nth step voltage Vq V IL Leakage current at the Nth step voltage Vq V f After the sweep measurement the sweep source changes output voltage to 0 V Measurement data at the Nth sweep step is the Nth step voltage center value of the voltage range for the Nth measurement and the capacitance measurement data at the Nth sweep step When step voltage capacitance measurement voltage cvoltage V and IL are not measured for the second step and later The capacitance calculation uses the V and IL values at the previous step instead 4 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 4 1 stop voltage Quasi static C V Measurements Measurement Functions VAR1 Output and Measurement Items of QSCV Measurement limit of sweep source output 2nd step cvoltage 2 X Vq A Q AY 3rd step last step delay time ES OV Measurement items MZ at Nth sweep step hold time I v IL Vo ILo step voltage Ist ste p y Vq M cinteg q Va t linteg linteg delay time step voltage start voltage source output value when starting sweep output delay time e following conditions are true ignore the measurement items an shown NOTE If the foll g dit t g th tit IL and IL sh above Leakage current
16. 3 Sampling Measurements Measurement Functions 0 0 cece eee eee eee 3 3 Available Units oneone eek a de 3 3 Sampling Interval and Measurement Time 000 0 3 4 Sampling Measurement Data 0 0 00 eee eee eee eee 3 7 Sampling Completion 0 0 0 eee eee cee eee 3 9 Source Output Sequence and Time Origin 0 0 3 11 Linear Sampling Measurement 0 00 0 ce eee ee eee eee 3 13 Thinned out Sampling Measurement 00 000005 3 16 Logarithmic Sampling Measurement 0 00 00 000005 3 19 Defining Measurement Conditions 0 0 0 2 o 3 24 To Define Measurement Units 00 00 e eee eee eee eee 3 26 To Set up Sampling Parameters 00 0 0 0c eee eee ee eee 3 27 To Set up Constant Output 0 ee eee 3 29 To Set up PGU Output sssi cr eee 3 30 To Define Stop Conditions 0 0 0 2 eee eee ee eee 3 32 To Display Graphics Results 0 0 0 0 eee eee eee 3 33 To Display List Results o oi ayen iaie e o E ee eee 3 34 To Execute or Stop Measurement 0 0 00 rreren 3 35 Making a Measurement 0 0 cece eee eee 3 36 Contents 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents Step 1 Prepare for the measurement 0 0 0 0 00000 e eee Step 2 Mount your DUT on the test fixture o ooooooooooooooo o Step 3 Define
17. Al PAGE PAGE UGTO2020 6 48 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions This chapter explains measurement units and measurement functions of the Agilent 4155C 4156C Semiconductor Parameter Analyzer and Agilent 41501A B Expander e Measurement Units e Compliance e Measurement Ranging Mode e Measurement Time e SMU Filter e Self calibration e Zero Offset Cancel e QSCV Zero Offset Cancel e Operation States e Output Sequence e Measurement Sequence 7 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 7 1 Measurement Units and Functions Measurement Units Measurement Units The 4155C 4156C and 41501A B have the measurement units listed below This section explains source and measurement functions of the measurement units GNDU Ground Unit SMU Source Monitor Unit VSU Voltage Source Unit VMU Voltage Monitor Unit PGU Pulse Generator Unit GNDU Ground Unit GNDU is a0 V constant voltage source and used for the reference of the measurement ground Also GNDU can sink up to 1 6 A so it is effective for using the HPSMU high power SMU Figure 7 1 shows a simplified circuit diagram of GNDU The GNDU is installed in the 41501A B Expander Simplified GNDU Circuit
18. As a condition for an automatic analysis function on the DISPLAY ANALYSIS SETUP screen For direct keyboard calculations The following functions are available Function Read Out Function Marker MI MX MY MY1 MY2 Cursor CX CY CY1 CY2 Line IX TY IY1 TY2 LICO ELIG L1G1 L1G2 LIX L1Y EL1Y1 EL1Y2 L2CO L2G L2G1 L2G2 L2X L2Y L2Y1 L2Y2 The following are restrictions for using read out functions GRAPHICS must be selected in the DISPLAY MODE field on the DISPLAY DISPLAY SETUP screen when you use the read out function If not invalid data is returned EMI is an exception EMI can be used in GRAPHICS or LIST mode If the marker cursor or line that are referred to by the read out function are not displayed the read out function uses the position at which it was most recently displayed If the marker cursor and line have not been displayed the read out function returns invalid data You cannot assign a data variable that includes a read out function to an axis of graphics plot 9 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions CX CX Returns the value of X coordinate at the active cursor position Syntax CX CY Returns the value of Y coordinate at the active cursor position Syntax CY If there are Y1 and Y2 axes this function returns the value for selected axis CY1 Returns the value of Y1 coordinate
19. In the idle state output switches of all units are on and the units output 0 V When moving to the measurement stress force or standby state the units operate as shown below 1 Disabled units keep 0 V output and turn the output switch off where disabled unit means the unit you select the DELETE ROW softkey in the CHANNELS table on the CHANNELS CHANNEL DEFINITION screen 2 Output channels start the output in the order specified in the OUTPUT SEQUENCE table Stopping Outputs When returning to the idle state the units operate as shown below 1 Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table 2 Disabled units keep 0 V output and turn the output switch on Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 49 Measurement Units and Functions Output Sequence Example Output sequence in the following conditions is shown in Figure 7 13 e Units available SMU1 to SMU 4 VSU1 to VSU2 e Units disabled SMU4 and VSU2 e Output sequence No change from the default setting Figure 7 13 Output Sequence Example for the Sequential Mode Idle State Measurement State Idle State 2j Ne SMU4 disabled VSUZ disabled AAA MUY COMMON wn SMU2 CONST PY U3 VAR1 VSU1 CONST a er x an output order x an order that channels return to O V A output switch is off eeessse channel is common channel outputs a specified s
20. Making a Measurement In this section you learn how to execute the QSCV measurements using the 4155C 4156C As an example you measure MOS capacitor Measurement circuit and typical characteristics are shown below MOS Capacitor Capacitance A V V SMU1 SMU2 voltage For accurate measurements let the 4155C 4156C warm up for at least 40 minutes after you turn on the instrument and then execute calibration For self calibration see Chapter 7 Step 1 Prepare for measurement Before executing measurement configure the 4155C 4156C and Agilent 16442A Test Fixture See Step 1 Prepare for the measurement in Making a Measurement in Chapter 1 The measurement example uses the same connection as the sweep measurement example connection Step 2 Mount your DUT on the test fixture 1 Select a suitable socket module for your DUT MOS capacitor Mount the socket module on the test fixture Mount the capacitor on the socket module eS Make connections with connection wires miniature banana to pin plug etc The capacitor must be connected between SMU1 and SMU2 5 After finishing connections shut the lid of the test fixture 4 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Making a Measurement Step 3 Define the channel assignments Set the connection information on the CHANNELS CHANNEL DEFINITION screen 1 If the 4155C 4156C has been turned off turn it
21. One of the sampling completion conditions so sampling stops after this time elapses Allowable range when INITIAL INTERVAL lt 480 us AUTO Allowable range when INITIAL INTERVAL gt 480 us INITIAL INTERVAL x NO OF SAMPLES 1 sec to 1x 10 sec AUTO or NO LIMIT AUTO Enables the number of sampling points sampling completion condition NO LIMIT Disables the total sampling time sampling completion condition 3 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions HOLD TIME Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 e Allowable range when INITIAL INTERVAL gt 2 ms 0 to 655 35 s with 100 us resolution e Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution Table 3 1 Effective Parameter Values INITIAL INTERVAL 60 us to 480 us 560 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Max 10001 number of measurement units TOTAL SAMP TIME AUTO AUTO NO LIMIT INITIAL INTERVAL X NO OF SAMPLES 1 s to1x 101 s HOLD TIME 30 ms to 655 35 s 100 us resolution 0 to 655 35 s 100 us resolution Stop Condition DISABLE DISABLE ENABLE Measurement Units 1 Max 8 Measurement Range d FIX FIX AUTO LIMITED Integration Time Short Short Medium Long a Number of units SMUs or VMUs used for measurements If voltage source
22. S 5 1 E 11 o lt 3 p O 1 E 12 0 00 0 01 0 10 00 0 00 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 20 V Integration Time 2 1 0 5 0 3 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 G ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 43 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 16 Calculation Example of Measurement Accuracy HRSMU 10 Reading Accuracy 0 001 0 01 0 1 1 0 QSCV Measurement Voltage V 1 E 10 E gt E 3 o lt 3 Lal O 1 E 11 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 20 V Integration Time 2 1 0 5 0 3 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF 4 44 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy
23. Sweep Measurements Making a Measurement Step 1 Prepare for the measurement Before executing measurement configure the 4155C 4156C and accessories 1 Make sure that the 4155C 4156C is off 2 Connect the 16442A B test fixture to the 4155C 4156C See figure below 3 Ifyou use the keyboard connect it to the 4155C 4156C Connection between 4156C and 16442A B 16442A B Kelvin Triaxial Cables a p Coaxial Cables Interlock LED Cable 4156 4156C cable 16442A B 4156C cable 16442A B Intlk Interlock LED Intlk VSU 1 Coaxial VSU 1 SMU 1 Kelvin triaxial SMU 1 VSU 2 Coaxial gt VSU 2 SMU 2 Kelvin triaxial SMU 2 VMU 1 Coaxial gt VMU 1 SMU 3 Kelvin triaxial SMU 3 VMU 2 Coaxial gt VMU 2 a Interlock LED cable Agilent 16493J b Coaxial cable Agilent 16493B You do not need to connect VSUs and VMUs for this measurement c Kelvin triaxial cable Agilent 16493K or Triaxial cable Agilent 16493C For the non kelvin connections open the Sense terminals Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 31 Sweep Measurements Making a Measurement Connection between 4155C and 16442A B Triaxial Cables 16442A B Se ES 4155 4155C cable 16442A B 4155C cable 16442A B Intlk Interlock LED Intlk SMU 1 Triaxial SMU 1 VSU 1
24. To Execute or Stop Measurement on page 3 35 For the self calibration and zero offset cancel function see Chapter 7 6 GRAPH LIST GRAPHICS nanet m sHoRT DODECOT 04 52PM gt aooe rary MARKER CURSOR TINE SCALING DISPLAY SETUR TANPLNG SETUP STOP coup Results For example displayed graphically Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 25 Sampling Measurements Defining Measurement Conditions To Define Measurement Units 1 Press Chan key in the PAGE CONTROL key group Select CHANNEL DEF primary softkey In the MEASUREMENT MODE area select SAMPLING secondary softkey SP In the VNAME column enter a unique name for voltage variable For example enter Vce for collector emitter voltage If channel does neither V force nor V measurement you can omit VNAME 5 Inthe INAME column enter a unique name for current variable For example enter Ic for collector current If channel does neither I force nor I measurement you can omit INAME 6 Inthe MODE column select the following softkey e V voltage output for SMU VSU and PGU V grounded mode voltage measurement for VMU e I current output for SMU e VPULSE pulsed voltage output for PGU e COMMON circuit common for SMU and GNDU e DVOLT differential mo
25. in MAX field press 2 then Enter type 2 then press Enter To enter SQID in NAME field select MORE 1 2 then SQID secondary softkeys press Shift F7 keys then Shift F3 keys To enter 0 00000 A in MIN field press 0 then Enter type 0 then press Enter To enter 100 000mA in MAX field press 1 0 0 m then Enter type 100m then press Enter To enter DSQID in NAME field select MORE 1 2 then DSQID secondary softkeys press Shift F7 keys then Shift F4 keys Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 41 Sweep Measurements Making a Measurement Figure 1 9 Display Setup Screen DISPLAY DISPLAY SETUP O1JAN29 10 58AM GRAPH Ics DISPLAY MODE GRAPHICS GIST GRAPHICS Xaxis Ylaxis Y2axis NAME VD SQID DSQID SCALE LINEAR LINEAR LINEAR MIN 0 000000000 V 0 0000000000 0 0000000000 MAX 2 0000000 V 100 00000000m 100 00000000m GRID LINE PARAMETER ON ON DATA VARIABLES DATA DISPLAY RESOLUTION NORMAL GRAPHICS Select Display Mode with softkey or rotary knob B DISPLAY ANLYSIS PREV NEXT SETUP SETUP S PAGE PAGE 1 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Making a Measurement Step 7 Execute the measurement Press Single fron
26. setup value of the LEAK field a If the integration time was too short for the offset measurement the value is automatically changed to the setup value of the QSCV field and the off set measurement is executed again b The leakage current data is just used for the offset data calculation Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 43 NOTE Measurement Units and Functions QSCV Zero Offset Cancel To Perform Offset Cancel Set the ZERO CANCEL field to ON and start the quasi static CV measurement The offset cancel is automatically performed while measurement is performed The measurement data is automatically compensated by using the offset data The compensated data is displayed on the GRAPH LIST screen To disable the function select the OFF softkey in the ZERO CANCEL field When you change the measurement conditions If you change the following measurement conditions the offset data will be deemed invalid The message Offset data for previous setup will appear e When UNIT is changed The ZERO CANCEL field is automatically set to OFF Execute the offset measurement again If you set the ZERO CANCEL field to ON without doing it again the old data will be used for the offset cancel e When RANGE is changed Execute the offset measurement again If you do not do it again the old data will be used for the offset cancel 7 44 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Func
27. 2 3 4 o 2 2 0 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 1E 11 E rN mal ES 3 1E 12 i 3 y lt 3 ES a 1E 13 0 001 0 01 0 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 pA 100 pA Output Range 20 V Integration Time 2 1 0 5 0 3 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 100 G ohm Guard Capacitance of Measurement Path 200 pF 4 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 9 Calculation Example of Measurement Accuracy HRSMU Reading Accuracy 0 001 0 01 0 1 1 QSCV Measurement Voltage V Offset Accuracy F 0 001 0 01 0 1 1 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 2 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 37 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 10 Calculation Example of Measurement Accuracy HRSMU 10 8 e 36 E
28. 3 3 lt B 4 uo 3 2 2 0 0 001 0 01 0 1 1 0 QSCV Measurement Voltage V Offset Accuracy F 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 1 nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF 4 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 11 Calculation Example of Measurement Accuracy HRSMU 12 10 SE i gt g 8 6 lt on S 34 o 2 2 0 0 001 0 01 0 1 1 0 QSCV Measurement Voltage V 1 E 10 E gt 2 3 1 E 11 o lt 3 E O 1 E 12 0 001 0 01 0 1 0 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 20 V Integration Time 2 1 0 5 0 3 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 G ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 39 Figure 4 12
29. 3 DE hn 25 amp LO0B 11 lt ie 3 SR Drs D O 1008 12 PS Mi mE PAL A Mi 1s 1 00E 13 e LAA p 500 ms 1 00E 14 ar me ms 1 00E 15 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V 4 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Maximum Measurement Value Figure 4 3 Maximum Measurement Value Using 1 nA range HRSMU MPSMU HPSMU 1 00E 05 1 00E 06 hs 1 00E 07 a ae NLL TN My S 1 00E 08 m Sa SS 8 D N Integration El NN ISR NI Time 2 1 00E 09 Pa a E Sasi NN N A DI SU 2s pue ls 1 00E 10 LE g gt y 500 ms Ma NY we 300 ms 100 1 00E 11 pe m me Mm DA 50 ms MNL 30 ms 1 00E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Figure 4 4 Maximum Measurement Value Using 10 nA range HRSMU MPSMU HPSMU 1 00E 04 1 00E 05 N Noth 1 00E 06 SE IANN TN T T wN we S 1 00E 07 8 ree ne bane Integration Un Py Rage Time 3 N N 1 00E 08 Das Hd SS MN Nel AA 2s Sul WU ls 1 00E 09 Se S gt 500 ms TN PAN ay 300 ms NE 100 ms 1 00E 10 Ned ime line ean 50 ms 30 ms 1 008 11 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Agilent 4
30. 4 Press Standby key in the MEASUREMENT key group The indicator above the Standby key shows whether the Standby function is enabled If this indicator is ON then for the units that you selected STANDBY ON the units have the following output value during the Standby state that is before and after measurements or stress Function of a Unit Output during Standby State VARI VAR Start value VARI Ratio x Start Offset VAR2 VAR2 Start value CONSTANT Output value For sampling measurements only the CONSTANT function is available From Standby state you can execute measurements or force stress by pressing Single Repeat Append or Stress key After measurement or stress the STANDBY ON units are returned to same output value as before measurement or stress If Standby indicator is ON then pressing the Standby key disables the Standby function and Standby output stops Pressing the Stop key has no affect on the Standby state Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 17 Support Functions R BOX Control R BOX Control Agilent 16441A R Box must be used for applications which need to connect a series resistor between SMU and DUT For example the R Box is effective for the DUT protection If sudden voltage change occurs at DUT excessive current flows to the DUT and it may damage the DUT without the R Box In other case you may want to measure negative resistance characteristics This applicat
31. ANALYSIS SETUP screen is displayed Move pointer to field 1 then select secondary softkey to set desired data variable name In field 2 enter desired expression In field 3 select AFTER secondary softkey if you want to set a search start condition for finding specified point e DISABLE secondary softkey to disable clear the AFTER settings If you selected AFTER in field 4 select secondary softkey to set desired data variable If you selected AFTER in field 5 enter desired expression The marker can be displayed on the measurement curve only So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 4 and 7 see Chapter 8 To specify a point between two measurement points Set Interpolate field to ON Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 47 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically display marker at specified point DISPLAY ANALYSIS SETUP 93JUL22 11 32AM LINEL REGRESSION line on Yi between a point AT LINEZ 1 2 la Z xMARKE At a pointywwhere cal Poa AFTER VCE EMAXEWS A Winter poate OFF F 3 4 5 MAX VCE E Aly PREV NEXT SETUP
32. Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement resolution depends on the integration time setting For Knob sweep measurement see the 7 11 Measurement Units and Functions Measurement Units HPSMU High Power SMU HPSMU Output and Measurement Ranges Figure 7 5 Current mA UGD02005 Table 7 9 HPSMU Output Voltage Ranges and Resolutions Output Current Range Output Value p A Compliance Resolution Range 2V 0 lt V lt 2V 100 uV 1000 mA 20 V 0 lt V lt 20 V 1 mV 1000 mA 40 V 0 lt V lt 40 V 2 mV 500 mA 100 V 0 lt V lt 100 V 5 mV 125 mA 200 V 0 lt V lt 200 V 10 mV 50 mA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units Table 7 10 HPSMU Measurement Voltage Values and Resolutions Measurement Resolutions Range as Integration Time pih m m or 640 ps 101 92 SO yis to 560 ps A onger ms 2V 0 lt V lt 2 2 V 2 uV 20 uV 200 uV 2 mV 20 V 0 lt V lt 22 V 20 uV 200 uV 2 mV 20 mV 40 V 0 lt V lt 44 V 40 uV 400 uV 4mV 40 mV 100 V 0O lt V lt 110 V 100 uV 1 mV 10 mV 100 mV 200 V 0 lt V lt 200 V 200 uV 2 mV 20 mV 200 mV a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob swe
33. Current mA UGDO2004 MPSMU Output Voltage Ranges and Resolutions Output Current Range Output Value pu Compliance Resolution Range 2V 0 lt V lt 2V 100 uV 100 mA 20 V 0 lt V lt 20 V 1 mV 100 mA 40 V 0 lt V lt 40 V 2 mV 50 mA 100 V 0 lt V lt 100 V 5 mV 20 mA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 9 Measurement Units and Functions Measurement Units Table 7 6 MPSMU Measurement Voltage Values and Resolutions Measurement Resolutions P Range jean Integration Time High Speed alue i 1PLC or 640 us to 1 92 Sampling Longer ms 80 us to 560 us Measurement 2V 0 lt V lt 2 2V 2 uV 20 uV 200 uV 2 mV 20 V 0 lt V lt 22 V 20 uv 200 uV 2 mV 20 mV 40 V 0 lt V lt 44 V 40 uV 400 uV 4 mV 40 mV 100 V 0 lt V lt 100 V 100 uV 1 mV 10 mV 100 mV a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Table 7 7 MPSMU Output Current Ranges and Resolutions Range Output Value Be Gans Range InA O lt I lt 1nA 100 fA 100 V 10nA 0 lt I lt 10 nA 1 pA 100
34. DISPLAY SETUP Used to change graph display The following secondary softkeys are available X AXIS REGION Selects the X axis display range from 5 or Y AXIS REGION Selects the Y axis display range from or X AXIS DISPLAY Selects the X axis direction from NORMAL or REVERSE Y AXIS DISPLAY Selects the Y axis direction from NORMAL or REVERSE GRID Sets grid on or off VAR1 SETUP Used to change VAR 1 sweep source setup The following secondary softkeys are available SWEEP MODE Sets sweep mode to SINGLE or DOUBLE POLARITY Sets polarity of VAR1 output to POS NEG or BIPOLAR VARI RANGE Sets VARI sweep range This sets X axis scale NO OF STEPS Sets number of sweep steps COMPLIANCE Sets VARI compliance value This sets Y axis scale HOLD TIME Sets hold time STEP TIME Sets step time 2 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Executing Measurements Softkey Description VAR2 SETUP Used to change VAR2 sweep source setup The following secondary softkeys are available VAR2 START Sets VAR2 sweep start value VAR2 STEP Sets VAR2 sweep steps VAR2 POINTS Sets number of sweep steps COMPLIANCE Sets VAR2 compliance value CONST SETUP Used to change CONST source setup Secondary softkeys are available for selecting CONST source Select a secondary softkey to change the CONST source output value To copy knob sweep setups
35. ENABLE INITIAL INTERVAL 2 00ms ENABLE DELAY 0 0000000 s NO OF SAMPLES 20 NAME ve TOTAL SAMP TIME NO LIMIT THRESHOLD 900 00000mV LOG25 EVENT Val gt Th HOLD TIME 0 000000 s EVENT NO 3 FILTER ON see CONSTANT THINNED UNIT SMU2 MP OUT NAME IG MODE I SOURCE 500 0nA COMPLIANCE 1 0000 v THINNED OUT Select Sampling Mode with softkey or rotary knob B SAMPLNG MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ PAGE PAGE 5 In addition to the SAMPLING SETUP screen you may need to set the MEASURE SETUP screen to obtain 2 ms sampling interval Do following a Select the MEASURE SETUP primary softkey to change the screen b Move the field pointer to the RANGE field of SMU2 c Set RANGE field to FIXED and 2 V by using the FIXED and 2 V secondary softkeys Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 39 Sampling Measurements Making a Measurement Step 5 Set up the results display You set the results display information on the DISPLAY DISPLAY SETUP screen 1 Press Display front panel key The DISPLAY DISPLAY SETUP screen appears 2 Move the field pointer to the DISPLAY MODE field Then select GRAPHICS softkey to set the results display mode to the graph mode 3 Set the X and Y1 axes information as shown below X axis Y1 axis NAME TIME VG SCALE LINEAR LINEAR MIN Os OV MAX 200 ms 1V
36. INAME Enter a unique name for current variable For example enter Ic for collector current If channel does neither I force nor I measurement you can omit INAME MODE Select one of the following softkeys e WV Voltage output for SMU VSU and PGU V Grounded mode voltage measurement for VMU e I Current output for SMU e VPULSE Pulsed voltage output for SMU and PGU JPULSE Pulsed current output for SMU e COMMON Circuit common for SMU and GNDU e DVOLT Differential mode voltage measurement for VMU FCTN Select one of the following softkeys to set the output function e CONST Constant output function for SMU VSU and PGU VARI Primary sweep output function for SMU and VSU VAR2 Secondary sweep output function for SMU and VSU VARI Synchronous sweep output function for SMU and VSU 1 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions 6 DISCHARGE Select ON secondary softkey to connect the discharge resistor to VMU input or OFF to disconnect the resistor The discharge resistor is used to prevent the VMU inputs from charge up in the idle state When DISCHARGE is ON the discharge resistor is automatically connected to the VMU input and disconnected from the input in the measurement state VNAME and INAME You can use VNAME and INAME names in user function definitions or for analysis on the GRAPHICS LIST screens The
37. NAME for No 5 of the LIST table NAME for No 6 of the LIST table NAME for No 7 of the LIST table NAME for No 8 of the LIST table Upper field of DATA VARIABLES 13 Lower field of DATA VARIABLES O eV Os AAN h o N Re If a variable is set to multiple fields or user functions measurement will be performed only for the first entry If a variable not set to the fields is defined in a user function not set to the fields the 4155C 4156C performs measurement for the variable after the measurement for the variable set to the lower field of DATA VARIABLES For the sampling measurements that use the stop condition the 4155C 4156C performs measurement for the variable set to the following field before the measurement for the variable set to the NAME for X axis NAME STOP CONDITION table MEASURE SAMPLING SETUP screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 53 Measurement Units and Functions Measurement Sequence 7 54 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions This chapter explains functions that can be used in measurements Agilent 4155C 4156C Semiconductor Parameter Analyzer and Agilent 41501 A B Expander has the following useful measurement functions e User Function and User Variable e Standby Function R BOX Control e SMU PG Selector Control e
38. Output Range 20 V Integration Time 2 1 0 5 0 3 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF 4 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 7 Calculation Example of Measurement Accuracy HRSMU 12 10 Reading Accuracy 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Offset Accuracy F 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 pA 100 pA Output Range 20 V Integration Time 2 1 0 5 0 3 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 1 nF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 35 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 8 Calculation Example of Measurement Accuracy HRSMU 12 10 e 38 mal 8 36 lt
39. Quasi static C V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy HRSMU 10 z 6 Sa 3 3 lt w 4 5 3 A 2 0 0 01 0 1 10 QSCV Measurement Voltage V 1 E 10 E Pa 2 5 o o lt 3 Y a 1 E 11 0 01 0 1 10 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 40 V Integration Time 2 1 0 5 0 3 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF 4 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 13 Calculation Example of Measurement Accuracy HRSMU 10 Reading Accuracy 0 01 0 1 10 QSCV Measurement Voltage V 1E 10 E Pa 3 3 3 lt E amp O 1E 11 0 01 0 1 0 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 100 V Integration Time 2 1 0 5 0 3 0 1 0 05
40. SMU1 to 1 00 mA STRESS STRESS SETUP 94JANO1 01 30PM STRESS MODE DURATION 10m XACCUMULATED STRESS HOLD TIME 0 000 s FILTER ON sTRESS CONTINUE AT ANY Status CONSTANT UNIT SMUL MP NAME ysu MODE v SOURCE 5 00 Y COMPLIANCE FA age bire 0 0010000 CHANNEL DEF PREV NEXT PAGE PAGE Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 19 Stress Force Defining Stress Conditions To Force Stress Press Stress key in the MEASUREMENT key group The STRESS area shows the specified stress duration time Even if you set STRESS MODE to PULSE COUNT the stress duration time is calculated and shown in seconds The ACCUMULATED STRESS area shows the total stress that has already been forced To change the stress time duration mode Select CHANGE DURATON secondary softkey then enter desired value The CHANGE DURATON secondary softkey is displayed only if the DURATION mode is selected on the STRESS STRESS SETUP screen To change pulse count pulse count mode Select CHANGE PLS CNT secondary softkey then enter desired value The CHANGE PLS CNT secondary softkey is displayed only if the PULSE COUNT mode is selected on the STRESS STRESS SETUP screen To reset STATUS value to 0 s and 0 Select RESET STATUS secondary softkey To reset ACCUMULATED STRESS value to 0 s Select RE
41. Select SETUP COPY primary softkey This copies knob sweep setups to the MEASURE SWEEP SETUP and DISPLAY DISPLAY SETUP screens Then you can see the setups on the screens and use the setups for the normal sweep measurement Note that the power compliance function is not available for the knob sweep measurement So the POWER COMP column is set to OFF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 15 Knob Sweep Measurements Executing Measurements 2 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements This chapter explains how to execute sampling measurements and consists of the following sections e Measurement Functions e Defining Measurement Conditions e Making a Measurement For details about how to enter or input setup data refer to Setup Screen Reference manual 3 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Measurement Functions For a sampling measurement you can monitor current or voltage changes at a DUT while forcing constant current constant voltage or pulsed constant bias The 4155C 4156C provides the following three types of sampling measurement according to the sampling interval e Linear Sampling Measurement e Thinned out Sampling Measure
42. The measurement stop condition defines the condition to stop the sampling measurement The stop condition is one of the sampling completion conditions 1 Press Meas key in the PAGE CONTROL key group 2 Select SAMPLNG SETUP primary softkey 3 In the ENABLE DISABLE field of the STOP CONDITION area select ENABLE secondary softkey 4 In NAME field of STOP CONDITION area select the secondary softkey for the desired variable name or user function name to be used for EVENT comparison 5 In THRESHOLD field of STOP CONDITION area enter the threshold value for the name selected in the previous step 6 In EVENT field of STOP CONDITION area select e Val gt Th secondary softkey to stop the sampling when the sampled value is greater than the threshold value e Val lt Th secondary softkey to stop the sampling when the sampled value is less than the threshold value e Val gt Th secondary softkey to stop the sampling when the absolute sampled value is greater than the absolute threshold value e Vall lt Th secondary softkey to stop the sampling when the absolute sampled value is less than the absolute threshold value 7 In EVENT NO field enter a value which specifies the sampling to stop when EVENT occurs EVENT NO times If you select DISABLE in the ENABLE DISABLE field the sampling measurement continues until Stop key in the MEASUREMENT key group is pressed e Specified total sample time has elapsed e The
43. VARIABLE VARI VAR2 VAR1 UNIT SMU3 HR UNIT SMU2 HR NAME VD NAME VG SWEEP MODE SINGLE OFFSET 0 0000 V DOUBLE LIN LOG LINEAR RATIO 1 000 START 0 0000 V COMPLIANCE 100 00mA STOP 2 0000 V POWER COMP OFF STEP 20 0mV NO OF STEP 101 COMPLIANCE 100 00mA POWER COMP OFF TIMING HOLD TIME 0 0000 s DELAY TIME 0 0000 s SWEEP STOP AT ANY ABNORM Status CONSTANT UNIT NAME MODE SOURCE A Sea SSeS COMPLIANCE SPR ree SAA SINGLE Select Sweep Mode with softkey or rotary knob B SWEEP MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ S PAGE PAGE 1 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Step 6 Set up the results display Sweep Measurements Making a Measurement You set the results display information on the DISPLAY DISPLAY SETUP screen 1 Press Display front panel key The DISPLAY DISPLAY SETUP screen appears 2 Make sure GRAPHICS is displayed in the DISPLAY MODE field If not select GRAPHIC secondary softkey in the DISPLAY MODE field 3 Set the X Y1 and Y2 axes information as shown below For the actual setup see Figure 1 9 To enter VG in NAME field on Front Panel select VG secondary softkey on Keyboard press Shift F3 keys To set LINEAR in SCALE field select LINEAR secondary softkey press Shift F1 keys To enter 0 00000 V in MIN field press 0 then Enter type 0 then press Enter To enter 2 00000 V
44. ae A LA y 100 f 100 7 0 000 VBE V 100 mfdiv AXIS MARRET LINE SCALING DISPLAY SWEEP TIMING CONST v2 CURSE SETUP SETUP__ SETUP__ SETUP UGTO2003 6 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Adjust Display Range to Measurement Curve Automatically 1 Select SCALING primary softkey 2 if both Y1 and Y2 axis are set up Select desired measurement curve by using AXIS primary softkey 3 Select AUTO SCALING secondary softkey Scale is changed automatically to fit the selected measurement curve When you set VAR2 parameter or when you perform append measurement the scale is changed so that all measurement curves can be displayed To cancel auto scaling Select CANCEL SCALING secondary softkey To Zoom the Display Range 1 Position the cursor at the center of area that you want to zoom For details about displaying and moving cursor see To Display or Move Cursor on page 6 18 2 Select SCALING primary softkey 3 Select e ZOOM IN secondary softkey to change the X and Y scaling to half the present scaling This enlarges measurement curve on the plot area e ZOOM OUT secondary softkey to change the X and Y scaling to double the present scaling This reduces measurement curve on the plot area e The X and Y scaling is changed and cursor is moved to the center of the plotting area If no cursor is displayed before
45. b e Figure a When the function FCTN is set to VAR1 VAR2 or VARI The pulse peak values are the sweep output values calculated from the sweep start stop step values and so on Figure b When the function FCTN is set to CONST The pulse peak value is the output value of the constant output source Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 23 Sweep Measurements Defining Measurement Conditions To Set up PGU Output 1 Define PGU to be VPULSE and CONST as described in To Define Measurement Units on page 1 16 Press Meas key in the PAGE CONTROL key group Select PGU SETUP primary softkey In the PERIOD field of PGU1 enter the pulse period value In the WIDTH field of desired PGU column enter the pulse width value In the DELAY TIME field of desired PGU column enter delay time value In the PEAK VALUE field of desired PGU column enter pulse peak value In the BASE VALUE field of desired PGU column enter pulse base value oo 2 AA pe A In the LEADING TIME field of desired PGU column enter the leading edge transition time 10 In the TRAILING TIME field of desired PGU column enter the trailing edge transition time 11 In the IMPEDANCE field of desired PGU column select e LOW secondary softkey for approximately zero ohm output impedance e 50 ohm secondary softkey for 50 ohm output impedance 12 In the PULSE COUNT field do one of the following e Select FREE RUN secondary softkey t
46. div 3 00 CURSOR MARKER LINE SCALING DISPLAY CURSOR S SETUP OFF B TIMING CONST SETUP SETUP Qscv SETUP In the QSCV measurement the 4155C 4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage This example does not execute the capacitance measurement at 3 1 V and 3 1 V Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 25 NOTE Figure 4 2 Quasi static C V Measurements Maximum Measurement Value Maximum Measurement Value The maximum measurement value is not the specifications but the reference data The maximum measurement value depends on the settings of the current measurement range the QSCV measurement voltage and the integration time See Figures 4 2 to 4 4 Each figure shows the characteristics of the capacitance value vs the QSCV measurement voltage by the integration time setting Each line in the graph specifies the maximum measurement value for each integration time setting The graph data is applied to the measurement when the QSCV integration time is set to the same value as the LEAK integration time Maximum Measurement Value Using 10 pA and 100 pA range HRSMU 1 00E 07 4 N 1 00E 08 N 1 00E 09 N na MA Integration Z 1O0E 10 gt de Time oy
47. knob sweep measurements you cannot set the delay time Instead you set the step time which you can only set on the KNOB SWEEP screen primary sweep source VARI steo time Setup range is 0 5 ms to 100 ms with 100 Us resolution For normal sweep measurement the step time depends on the measurement time For knob sweep measurement step time is always this specified value Measurement Channel You select the measurement channel by selecting the Y AXIS ASSIGN softkey on the KNOB SWEEP screen then selecting the desired secondary softkey You can select one measurement channel only so the Y2 axis is not available on the KNOB SWEEP screen e default measurement channel When an SMU is set to VARI Measurement channel is the VAR1 channel When a VSU is set to VARI Measurement channel is the first found channel that can measure Searching order is SMUl gt gt SMU6 gt VMU1 gt VMU2 e restrictions If you use series resistance for VAR1 channel and VAR1 channel is V force mode only VAR1 measurement channel can be assigned to Y axis Measurement Resolution When performing knob sweep measurement measurement resolution of each measurement unit is worse than the measurement resolution of normal sweep measurements 2 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Measurement Functions Sweep Step Value For the VAR1 channel you do not set the step value You can con
48. monadic operator Monadic operator performs operation on expression immediately to its right positive negative dyadic operator Dyadic operator performs operation between two expressions addition multiplication exponentiation subtraction division Operation between data variables Operation between data variables is performed between data at the same measurement points numeric constant Numeric constant can consist of digits decimal point and optional exponent notation Refer to Figure 8 3 e Mantissa decimal part of greater than seven digits is truncated to seven digits e The following predefined notations are available f 10715 p 102 n 10 u 10 u 10 m 10 k 10 M 10 G 10 8 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 8 3 Support Functions User Function and User Variable Numeric Constant 7 OQOQOOQOOOO Oe VGD 07003 scientific constant The following scientific constants are available q electric charge 1 60217710 k Boltzmann s constant 1 38065810 2 e space permittivity 8 85418810 2 data variable name Any data variable name read out function keyword A keyword that invokes the 4155C 4156C s built in read out function Refer to Chapter 9 built in function keyword A keyword that invokes the 4155C 4156C s built in function Refer to Chapter 9 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 11 Support Functions Us
49. s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Sampling Completion The sampling measurement completes when one of the following conditions is satisfied Stop condition The stop condition is satisfied See below Total sampling time The specified total sampling time has elapsed Available for linear and thinned out sampling Setting TOTAL SAMP TIME to auto or no limit disables this sampling completion condition Number of sampling points The specified number of samples has elapsed Available for logarithmic sampling For linear sampling setting TOTAL SAMP TIME to auto enables this sampling completion condition Stop front panel key The Stop front panel key is pressed GPIB Command The 4155C 4156C receives GPIB command to stop sampling Emergency Condition An emergency condition occurs on the 4155C 4156C Interlock Open Interlock terminal opens due to high voltage Stop Condition The stop condition is defined by using the STOP CONDITION table of MEASURE SAMPLING SETUP screen This function stops the measurement as shown below 1 Compares the value of the parameter set to NAME field and the value defined in THRESHOLD field Counts how many times the selected EVENT occurs When the count reaches the value defined in EVENT NO field sampling is stopped immediately Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 9 Sampling Measurements Measurement Functions To use this f
50. 0 e eee eee eee eee 6 12 Manual Analysis ses ciiy ee tad tee ie eae ye ee Ge ee eee 6 13 To Specify a Measurement Point on Curve 000005 6 14 To Specify between Measurement Points on Curve 6 16 To Display or Move Cursor 2 0 0 cee ce eee 6 18 To Adjust Display Range to Measurement Curve Automatically 6 19 Contents 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents To Zoom the Display Range 0 0 0 eee ee eee eee 6 19 To Center Display at Cursor Location 000000002 eee 6 20 To Draw Line through Two Specified Points ooooooooooooo ooo 6 20 To Draw Line through Specified Point with Specified Gradient 6 22 To Draw Tangent to Specified Point of Measurement Curve 6 24 To Draw Regression Line for Specified Region 6 26 To Display and Selecta Line 0 0 0 eee eee eee 6 28 To Display Grid on the Graph 2 0 0 00 cece eee eee 6 28 To Change Data Variable on Graph 0 0 0 c eee eee ee 6 29 To Change Range of X or Y Axis Scale 0 0 00 0 00002 6 30 To Change Variable Assigned to X Y1 or Y2 Axis o ooo ooooooooo 6 31 To Overlay an Internal Memory Measurement Curve onto Plotting Area 6 32 To Scroll the LIST screen como da Sede adalat 6 34 To Display or Move Marker on LIST screen 000000 6 35 To Change Variables of LIS
51. 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 41 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 14 Calculation Example of Measurement Accuracy HRSMU Reading Accuracy 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 E 09 Offset Accuracy F 0 001 0 01 0 1 1 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 2 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF 4 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 15 Calculation Example of Measurement Accuracy HRSMU 10 Reading Accuracy 0 001 0 01 0 1 1 0 QSCV Measurement Voltage V 1 E 10 E gt
52. 4155C 4156C receives GPIB command to stop sampling e An emergency condition occurs on the 4155C 4156C e Interlock terminal opens due to high voltage 3 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions To Display Graphics Results 1 Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select GRAPHICS secondary softkey gt Po R In the X axis column enter variable name select axis scale and enter minimum and maximum values In the sampling mode TIME time is entered initially 5 Inthe Y1 axis column enter variable name select axis scale and enter minimum and maximum values 6 Ifyou use Y2 axis enter variable name select axis scale and enter minimum and maximum values in Y2 axis column When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on the CHANNEL DEFINITION USER FUNCTION and USER VARIABLE screens To display a grid on the plotting area In the GRID field select ON to display or OFF to not display To display line parameters on the plotting area In the LINE PARAMETER field select ON to display or OFF to not display Line parameters are the X and Y intercepts and gradient of the analysis lines To display variables o
53. 4156C User s Guide Vol 2 Edition 5 9 5 Syntax Example Built in Functions DELTA DELTA Returns the difference of the expression DELTA expression The difference is defined as follows n a a1 when n 1 On 4 41 an4q 2 whenl lt n lt N n ay ay4 when n N Where on difference for measurement index number n an value of an expression for measurement index number n N number of sweep steps or number of samples For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each primary sweep If expression is a data variable for a secondary sweep source this function returns the sweep step value of the secondary sweep To return the difference of ID DELTA ID 9 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Syntax Example Built in Functions DIFF DIFF Returns differential coefficient of 1st expression by 2nd expression DIFF 1st expression 2nd expression The differential coefficient is defined as follows Yn Y2 Y PAR 1 when n 1 Y n Yn 1 Yn4 Xn41 Ama when 1 lt n lt N Yn YN YN AAN Xp 4 when n N Where ya differential coefficient for measurement index number n Yn value of 1st expression for measurement index number n Xp value of 2nd expression for measurement index number n N number of sweep steps or number of samples For each primary sweep use same defini
54. Capacitance of Measurement Path 200 pF 4 48 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 21 Calculation Example of Measurement Accuracy MPSMU HPSMU 20 18 16 t 14 S gt 12 3 10 lt ER Es 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 1 nA Output Range 40 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 49 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 22 Calculation Example of Measurement Accuracy MPSMU HPSMU 50 40 S 30 lt 2 20 10 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range nA Output Rang
55. Example of Measurement Accuracy MPSMU HPSMU 20 18 16 14 3 12 3 10 a 2 eZ 8 E 6 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 E 2 5 3 lt El O 1E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF 4 54 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force This chapter explains how to execute stress force and consists of the following sections e Stress Function e Defining Stress Conditions For details about the 4155C 4156C setup screens and entry fields refer to Setup Screen Reference manual For an example to use the stress force function refer to Flash EEPROM Test in Sample Application Programs Guide Book 5 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Stress Function Stress Function The 4155C 4156C can force both dc stress and ac stress pulsed stress as shown in the following figure Stress is defined as the bias that the 4155C 4156C can monitor the bias output time correctly To start stress force press Stress front panel key
56. Rotate rotary knob to move the marker to desired measurement point To turn off marker Set MARKER secondary softkey to OFF To move marker to next VAR2 step Select MARKER SKIP secondary softkey Marker moves to next VAR2 step data or next append data every time you select MARKER SKIP secondary softkey To move marker to next append data Select NEXT APPEND secondary softkey Marker moves to next append data every time you select NEXT APPEND secondary softkey Example The following figure shows an example to display marker GRAPH LIST LIST SHORT O3AUgO9 06 18PM YF IF y A DIRECT MARKER 1 10 00000m 24 150000p MARKER pa 0 000000 4 2 0 1 150000p SKIP 3 3 300000p FFF EIN R 14 80000p DIF 575 00009 A V SWEEP SETUP RE SPREAD SHEET SETUP TIMING CONST SETUP SETUP UGTO2013 100x80 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 35 Analyzing Measurement Results Manual Analysis To Change Variables of LIST screen 1 Select RE SETUP primary softkey 2 Move pointer to desired column variable or data variable field by using arrow keys then select secondary softkey of desired variable 3 Select EXIT primary softkey to exit RE SETUP LIST mode To exit without changing LIST variables Select CANCEL primary softkey Example The following figure sho
57. SMU is connected to R BOX only this SMU can be used for the measurement Maximum 8 units if the 41501 is used 6 SMUs and 2 VMUs If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units dyf compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Thinned out Sampling Measurement Thinned out sampling mode operates like the linear sampling mode Difference is that the sampling interval is not changed in the thinned out sampling measurement So even if both the following two conditions occur thinned out sampling mode does not change the sampling interval and continues sampling measurement e number of sampling points reaches specified NO OF SAMPLES e sampling completion condition is not satisfied Example Operation This example assumes the following sampling setup e INITIAL INTERVAL value is longer than the measurement time NO OF SAMPLES value is set to 10 1 Executes one point measurement and stores data in memory Repea
58. SWEEP TIMING CONST Y2 SETUP SETUP SETUP SETUP UGTO2002 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 17 Analyzing Measurement Results Manual Analysis To Display or Move Cursor 1 Select MARKER CURSOR primary softkey 2 Set CURSOR secondary softkey to SHORT or LONG Short or long cursor and cursor coordinates are displayed Selecting CURSOR secondary softkey toggles as follows OFF SHORT LONG OFF 3 Move the cursor by using arrow keys of the MARKER CURSOR key group The CURSOR coordinate fields indicate the location of cursor The first second and third fields are X Y1 and Y2 coordinates respectively To move cursor diagonally Press two adjacent arrow keys of the MARKER CURSOR key group simultaneously To turn off cursor Set CURSOR secondary softkey to OFF To move cursor fast Press arrow keys and Fast key of the MARKER CURSOR key group simultaneously Example The following figure shows an example to display a short cursor GRAPHILIST GRAPHICS SHORT 93AUgOS 06 18PM MARKER CURSOR 751 2530mv 10 02u4 10 024 OFF 5 a CA MARKER 00 1 00 MIN MAX 7 INTER POLATE I a ol a EN DIRECT sl MARKER Pi CURSOR decode gt decode taiv parr rdiv MARKER p SKIP
59. UGDA2008 120x80 Parameters Specify SMU pulse parameters MEASURE SWEEP SETUP Parameter Description pulse period SMU forces the next pulse after specified pulse period Allowable range 5 ms to 1 s Resolution 100 us pulse width Time from when SMU output starts to change from base value to time when SMU starts to return from peak value Measurements are made while the peak value is output Allowable range 0 5 ms to 100 ms Resolution 100 us base value The base output value of the SMU pulse Be aware that if any of following are true pulsed SMU channel may not output the pulse period and pulse width you specified e Measurement range differs from compliance range lowest range that includes compliance e Ranging mode is set to auto range or limited auto range Multi channel measurement is set 1 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE Sweep Measurements Measurement Functions Pulse width If the measurement settings do not meet the following conditions pulse width setting of SMU may be insufficient to make measurement If so the pulse width is automatically changed to be appropriate Number of Meas Channels 1 Integration Time Short Ranging Mode Fixed Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 13 Sweep Measurements Defining Measurement Conditions Defining Measurement Conditions This section describes the sweep measurement tasks The basic pro
60. Vol 2 Edition 5 1 9 Sweep Measurements Measurement Functions Parameters The parameters for primary sweep source VAR1 are same as the parameters for sweep source of basic sweep measurement For synchronous sweep source VARI specify the following parameters on MEASURE SWEEP SETUP screen Parameter offset ratio compliance power compliance Description Offset between outputs of primary and synchronous sweep sources Ratio between outputs of primary and synchronous sweep sources Compliance value of synchronous sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of synchronous sweep source For the compliance range of each measurement channel refer to Chapter 7 Optional Power compliance value of synchronous sweep source This parameter applies to SMU only Allowable range of power compliance depends on the power compliance range of synchronous sweep source For details refer to Chapter 7 The relationship between the output of primary and synchronous sweep sources is determined by the following equation synchronous output primary output X ratio offset The synchronous output determined by above equation must not exceed the output range of synchronous sweep source Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Measurement Functions Pulse Sweep Measurement For a sweep measurement a sweep or constant source S
61. a POLATE OFF DIRECT MARKER CURSOR 100 m div Y MARKER A SKIP AUTO ANALY SIS 0 00 CURSOR 0 00 TINE sJ 0 0m div 0 m OFF MARKER LINE SCALING DISPLAY SAMPLNG STOP CONST CURSOR SETUP SETUP COND SETUP Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 41 Sampling Measurements Making a Measurement If you change the results display to the GRAPH LIST LIST screen you will see the screen as shown below GRAPH LIST LIST SHORT OODECO7 04 52PM MARKER TIME 0 0000 s to 196ms ON NO TIME VG i i s v 6 160ms 754 96mV 7 164ms 773 46mV 8 168ms 791 98mV 9 172ms 810 44mV 10 176ms 828 90mV ii 178ms 838 18mV egies MARKER 12 180ms 847 42mV 13 182ms 856 66mV 14 184ms 865 88mV MARKER 15 186ms 875 12mV SKIP 16 188ms 884 30mV 17 190ms 893 50mV 18 192ms 902 76mV 19 194ms 911 92mV 20 196ms 321 20mV NEXT INDEX 20 APPEND B MARKER SPREAD RE SAMPLNG STOP CONST SHEET SETUP SETUP COND SETUP 3 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements This chapter consists of the following sections which explai
62. a gate trigger while stress channels are forcing stress For details about this gate trigger refer to Chapter 8 e gate trigger of PGUs The output trigger terminal of PGUs 41501A B can output a gate trigger to external pulse generators So use this function if you need more than two ac stress channels For example you can use Agilent 8110A pulse generator to force ac stress by using this trigger PGU outputs a gate trigger that is synchronized with pulse output For details of the trigger signal refer to Chapter 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 5 Stress Force Stress Function Stress Mode You set stress mode to the pulse count mode or duration mode Pulse count mode You specify the pulse count 1 to 65535 The total stress time is determined by the pulse count and pulse period The pulse count mode is used only when a PGU is used to force ac stress that is PGU is set to MODE VPULSE and FCTN SYNC on the STRESS CHANNEL DEFINITION screen Duration mode You specify the total stress time directly in seconds Allowable range is 500 us to 1 year 3 1536x 10 s setting resolution e When the specified time is 10 s or less 100 us e When the specified time is more than 10 s 10 ms 5 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Stress Function Stress Force Sequence This section explains the source output sequence when starting the stress force and when finishin
63. are set to OFF If you select ON only the available paths are set to ON If measurement range setup is changed to a lower range than the range at which the offset data was measured then offset cancel is not performed for the unit For example if HRSMU measurement range is changed to auto range from nA fixed range after measuring offset data in 1 nA range OFF is displayed in the unit s ZERO CANCEL field Because it is possible that auto range will use range lower than 1 nA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 41 NOTE Measurement Units and Functions QSCV Zero Offset Cancel QSCV Zero Offset Cancel This function is available for the quasi static CV measurements This function enables you to minimize measurement error offset caused by stray capacitance of cables prober and so on To Measure Offset Data Measure the offset data as follows 1 Set the measurement conditions on the MEASURE QSCV SETUP and MEASURE QSCV MEASURE SETUP screen The QSCV measurement setup must be completed before executing the offset measurement The offset measurement uses setups on the screen See Table 7 27 2 Open the measurement terminals at the cable end of the device side 3 Select the ON softkey in the ZERO CANCEL field on the MEASURE QSCV MEASURE SETUP screen 4 Press the green key and Stop front panel key in this order The measurement unit executes a one point capacitance measurement between the start volta
64. at the active cursor position Syntax CY1 CY2 Returns the value of Y2 coordinate at the active cursor position Syntax CY2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 13 Built in Functions IX IX Returns the value of X coordinate at the cross point of LINE1 and LINE2 Syntax IX This function calculates the cross point by using the following formula x y2 y1 2 04 Where x Value of X coordinate at the cross point If the X axis is logarithmic scale this function returns 10 Yn Y intercept value of LINEn If the Y axis is logarithmic scale y is the log value of the y intercept of LINEn Op Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY Returns the value of Y coordinate at the cross point of LINE and LINE2 Syntax IY If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the cross point by using the following formula y y 04 X y2 y1 01 02 Where y Value of Y coordinate at the cross point If the Y axis is logarithmic scale this function returns 10 Yn Y intercept value of LINEn If the Y axis is logarithmic scale y is the log value of the y intercept of LINEn Ob Slope of LINEn If LINE is parallel to LINE2 this function returns invalid data with the status Arithmetic error 9 14 Agilent 4155C 4156C User s Guide Vol 2 E
65. be pulse width x 0 8 or less e trailing edge transition time must be pulse period pulse width x 0 8 or less e Leading and trailing edge transition times for a PGU must be in the same range Trigger Output PGUs output trigger signal to synchronize with external pulse generators If an 41501A B has PGUs you can see a trigger output terminal on its rear panel For details of trigger functions see Chapter 8 7 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Compliance Compliance Compliance is available for SMU HPSMU MPSMU HRSMU and VSU To prevent damage to the test device due to overcurrent overvoltage or overpower you can set current compliance voltage compliance or power compliance for SMU For VSU current compliance is automatically set to approximately 100 mA You cannot change it Voltage and Current Compliance Voltage compliance V compliance and current compliance I compliance are limiters that can be set with the same resolution and accuracy as output current or output voltage Voltage compliance is for the SMU in current output mode current compliance is for the SMU in voltage output mode When a unit reaches compliance the unit acts as a constant voltage source or a constant current source The unit keeps the output value when reaching compliance For compliance setting range and resolution refer to Table 7 17 to Table 7 20 Polarity and Output Area e Pola
66. defined to be the value that is output if the PGU output terminal is open PGU Setting Ranges and Resolutions Peak Setting Base Setting Maximum Range Resolution b Value Value Current 20 V 0 lt V lt 20 V 0 lt V lt 20 V 4mV 100 mA 40 V 0 lt V lt 40 V 0 lt V lt 40 V 8 mV 100 mA a Maximum peak to peak voltage is 40 V b If pulse width lt 1 ms pulse duty is lt 50 and average current output is lt 100 mA the peak current output can be up to 200 mA 7 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 7 15 Measurement Units and Functions Measurement Units Output Impedance For the PGU pulsed outputs you must select the PGU output impedance from 50 Q and Low impedance approx 0 Q And PGU output value is defined to be the value that is output if the PGU output terminal is open So when a load is connected and PGU impedance is set to 50 Q the actual output value will be different For example if connected load is 50 Q specified PGU output impedance is 50 Q and specified output value is 2 V the PGU outputs 1 V If the impedance of the load connected to the PGU is not 50 Q or low impedance the average output current may exceed 100 mA If so a warning message is displayed Pulse Count Allowable range 1 to 65535 If you use two PGUs both PGUs are set to the same pulse count You cannot set different values for each PGU Pulse Period Width Delay T
67. enable the bias port function x or will be displayed at this point After defining the E5250A setup on the screen After defining the E5250A setup on the setup screen do Step 7 Step 8 or Step 9 Then you can change the screen page or execute the measurements Output Port Numbers Output port numbers available are 1 to 12 for normal configuration mode In auto configuration mode available numbers are 1 to 12 with 1 card 1 to 24 with 2 cards 1 to 36 with 3 cards or 1 to 48 with 4 cards Setup Example The figure on page 8 36 shows an example to control the E5250A which installs three E5252As and in the AUTO configuration mode The setup connects INPUT 1 SMU1 through INPUT 5 SMUS to the output ports 1 through 5 respectively Also the setup connects INPUT 8 VSU2 to the output ports 6 to 36 The INPUT 8 VSU2 is the input bias port 8 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE NOTE NOTE Support Functions Switching Matrix Control Step 6 To define the matrix connection for LIST display mode Enter the output port numbers to be connected Use a comma to specify multiple numbers Use a hyphen for a continuous range of numbers For example 1 6 specifies the output ports and 6 and 1 12 specifies output ports through 12 To apply the setup to the E5250A select the APPLY SETUP softkey After defining the E5250A setup on the screen After defining the E5250A setup on the
68. figure shows an example setup to change maximum value of Y1 axis GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM CA 1 00 li Ic IB A ae decode decode idiv a fdiv LE Zz we N 100 f i 100 f 0 000 VBE V 100 m div 1 00 1 00 EXIT CANCEL UGT02010 6 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Change Variable Assigned to X Y1 or Y2 Axis 4 Select DISPLAY SETUP primary softkey Select RE SETUP GRAPH secondary softkey Move pointer to variable field of X Y1 or Y2 axis by using arrow keys then select secondary softkey to set the desired variable Select EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing variable assigned to X Y1 or Y2 axis Select CANCEL primary softkey Example The following figure shows an example setup to change the variable that is assigned to Y1 axis GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM mA VG 2 00 7 VD E fi A Vee 200u di IS 7 IG Z 4 0 00 ji MORE 0 000 VD V 1 00 div 10 00 1 3 1 EXIT CANCEL VETADO Agilent 4155C 4156C User s G
69. if SMU reaches its compliance setting This is automatically set when power compliance is set for SMUs or when 10k ohm 100k ohm or 1M ohmis selected in the SERIES RESISTANCE field Abnormal status means the following e SMU reaches its compliance setting e Current of VSU exceeds approximately 100 mA e SMU or VSU oscillates A D converter overflow occurs e Average current of PGU exceeds 100 mA 1 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions To Display Graphics Results 1 Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select GRAPHICS secondary softkey gt 2 In the X axis column enter variable name select axis scale and enter minimum and maximum values 5 In the Y1 axis column enter variable name select axis scale and enter minimum and maximum values 6 If you use Y2 axis enter variable name select axis scale and enter minimum and maximum values in Y2 axis column When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on the CHANNEL DEFINITION USER FUNCTION and USER VARIABLE screens To display a grid on the plotting area In the GRID field select ON to display or OFF to not display To display line paramet
70. if you want to execute sampling measurement with the specified sampling interval you need to know the actual measurement time upon your measurement setup and set the sampling interval value enough longer than the actual measurement time You can see typical measurement time by repeating the sampling measurements with several sampling interval settings See Sampling Measurement Data on page 3 7 Measurement time is given by the following fomula Tmeas Tinteg Toh where Tmeas Measurement time Tinteg Integration time Toh Overhead time caused by the following elements e range changing time during measurement when measurement ranging mode is set to auto or limited auto e range changing time at measurement start when using measurement range less than the compliance value 3 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Figure 3 1 Sampling Measurement Operation Summary Case 1 Sampling Interval gt Meas Time SMU Output PGU Output Meas Time FeO gt Time 4 6 i Hora Tame Sampling Sampling Sampling 2 Interval Interval Interval 3 N A N 5 Trigger Trigger Trigger Trigger Trigger i i Total Sampling Time TOTAL SAMP TIME a AN TOTAL SAMP TIME is one of the stop condition N Starts Sampling Stops Sampling 7 Case 2 Sampling Interval lt Meas Time SMU Output PGU Output
71. keyboard A maximum four of alphanumeric characters are available The first character must be a letter of the alphabet Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 35 Step 1 Step 2 Support Functions Switching Matrix Control To Control Connections To control the matrix connections select the ES250A SETUP softkey The 4155C 4156C sends a query for the present setup of the E5250A and displays it on the E5250A CONNECTION SETUP screen CHANNELS E5250A CONNECTION SETUP 01JAN20 04 13PM ARRAY SETUP DISPLAY MODE MATRIX CONNECTION STATUS whee INPUT PORT 111 111111122222 222223333333 333444444444 AA 345678901234 567890123456 789012345678 SMU1 SMU2 SMU3 SMU4 SMU5 SMU6 vsul vVSU2 VMU1 VMU2 v OPEN X CLOSE BIAS DISABLED x CLOSE ON BIAS PORT ARRAY Select Setup Display Mode with softkey or rotary knob fos 4 cu a E 4 cu a To select the setup display mode In the SETUP DISPLAY MODE field select the display mode using the following softkeys ARRAY Sets the array display mode You can define the matrix connections by using the softkeys LIST Sets the list display mode You can define the matrix connections by specifying the output port numbers To select card number only for LIST display mode When the CONFIG MODE is NORMAL and the SETUP DISPLAY MODE is LIST the CARD NUMBER field is displayed In this field select the card for
72. less than for SW3 However the switching speed of SW3 is faster and life is longer than SW1 and SW2 If you need to switch PGU many times use PGU OPEN not OPEN to disconnect PGU Restrictions using Selector e 41501A B Expander equipped with PGU must be connected to 4155C 4156C e Kelvin connection is not available 8 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions SMU PG Selector Control To Use Selector 1 Press Stress key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 In the MEASURE field of the SMU PG SELECTOR area select one of the following softkeys This field sets the switching status of selector in the measurement state e SMU secondary softkey to connect SMU to DUT e PGU secondary softkey to connect PGU to DUT e OPEN secondary softkey to disconnect SMU PGU and DUT e PGU OPEN secondary softkey to disconnect PGU from DUT by semiconductor switch 4 Inthe STRESS field of the SMU PG SELECTOR area select one of the following softkeys This field sets the switching status of selector in the stress force state e SMU secondary softkey to connect SMU to DUT e PGU secondary softkey to connect PGU to DUT e OPEN secondary softkey to disconnect SMU PGU and DUT e PGU OPEN secondary softkey to disconnect PGU from DUT by semiconductor switch Example F
73. measurement is not executed e Leakage current name INAME is not defined in the user function and the DISPLAY DISPLAY SETUP screen e Leakage current compensation LEAK COMPENSATION is off Then the capacitance data is calculated as shown below C Ix cinteg V Vo F The INAME and LEAK COMPENSATION fields appear on the MEASURE QSCV MEASURE SETUP screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 5 Quasi static C V Measurements Measurement Functions Parameters Specify the following parameters for VAR1 and CONST channels on the MEASURE QSCV SETUP screen Parameter sweep mode Start stop step compliance OSCV meas voltage hold time delay time source 4 6 Description Single start to stop or double sweep start to stop to start Start voltage of sweep This is the output voltage at the start of the sweep output The permissible range of start stop and step depends on the output range of the source unit The VAR 1 source unit uses the minimum range that covers all sweep output values For the output range see Chapter 7 Stop voltage of sweep Upper or lower limit of the sweep output Incremental step voltage of sweep The value must be greater than or equal to double the resolution of the output range You must set the start stop and step values so that the NO OF STEP value is in the range 1 to 1001 The value is calculated from the following formula fractions below de
74. on and wait until the self test is completed 2 Make sure that the CHANNELS CHANNEL DEFINITION screen appears on the screen of the 4155C 4156C If not press the Chan front panel key 3 Move the field pointer to the MEASUREMENT MODE field then select the QSCV softkey to set the 4155C 4156C to QSCV measurement mode 4 Move the field pointer to the CHANNELS table and set SMU1 and SMU2 as shown below UNIT VNAME INAME MODE FCTN SMU1 V1 Il V VARI SMU2 v2 12 COMMON CONST Only the SMU1 and SMU2 are used for this example measurement Disable other units by selecting the DELETE ROW softkey CHANNELS CHANNEL DEFINITION SWEEP MEASUREMENT MODE Qscv SAM PLING CHANNELS MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE osev SMU1 HR V1 11 v VAR1 0 ohm SMU2 HR v2 12 COMMON CONST SMU3 HR rer DEFAULT SMUS HP 0 oh MIOS oan SETUP vsul vVsu2 f gt faatere MEM1 M vMu1l DISCHARGE B Tr vmMu2 on VCE IC peur pause jheeeseae MEM2 M FET enbu _ VDS ID MORE Qscv 1 2 Select Measurement Mode with softkey or rotary knob B CHANNEL USER USER E5250A B5250A NEXT DEF FCTN VAR s PROP SETUP PAGE Agilent 4155
75. panel key be aware that stress force may stop during the pulse peak output as shown in the following figure AC Stress Force Peak Value gt Base Value gt 2 pea t t Stress Start Stress Stop Sequence for returning to 0 V stress force state to the idle state When the state changes from the stress state to the idle state the outputs of the channels are returned to 0 V in opposite order that forcing occurred Delay time of PGUs When PGUs are set to VPULSE ac source you can set a delay time as follows e IfPGU is set to SYNC the PGU waits the delay time after the stress start trigger is received then starts to force ac stress e IfPGU is set to NSYNC the PGU waits the delay time after stress force state starts then starts pulse output Example Figure 5 1 shows an example of output sequence when forcing stress Figure 5 1 assumes the output sequence is set on the MEASURE OUTPUT SEQUENCE screen as follows PGU1 SMU1 PGU2 SMU2 SMU3 PA ie 5 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 5 1 Stress Force Stress Function Example of the Stress Force Sequence Idle State Stress Force State Idle State a saad Stress Force PGU i l A AC Stress Al SMU1 f 2 tE NSYNC PGU2
76. softkey The settings for the unit are deleted Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 11 Knob Sweep Measurements Executing Measurements To Execute Measurements 1 Press the green key then Single front panel key The KNOB SWEEP screen is displayed and knob sweep measurement starts During measurements self test or forcing stress this operation is ignored If you want to change the Y axis parameter press Stop front panel key and Y AXIS ASSIGN primary softkey Then select a secondary softkey for the Y axis parameter you want To start knob sweep measurement again press Single front panel key only 2 Rotate the rotary knob to stretch or shrink the sweep range Knob sweep measurement is executed and measurement curve appears on the graph Warning messages If the CHANNELS or MEASURE screen group have incorrect settings for knob sweep measurements when starting the knob sweep a warning message is displayed then the STOP and CONT primary softkeys are available Select STOP softkey to know the incorrect setting The setting is highlighted on the screen Select CONT softkey to perform knob sweep measurement with the following settings e If VAR function FCTN has been set The unit works as CONST channel The output value is VAR start value If VPULSE or IPULSE mode MODE has been set for the VAR1 or VAR2 unit The unit works as V or I channel e Ifthe power compliance function POWER COMP has bee
77. the E5250A So you may find the unmatched connections for the single rule on the CHANNELS E5250A CONNECTION SETUP screen after you change the connection rule from free to single Then select the APPLY OPEN ALL softkey to apply the open to all connections on the E5250A To select connection sequence In the CONN SEQ field select the connection sequence either BBM MBBR or NSEQ using the softkey BBM Sets the break before make sequence This connection sequence breaks the previous connection waits for an open status and makes the new connection MBBR Sets the make before break sequence This connection sequence makes the new connection waits for a close status and breaks the previous connection NSEQ Sets no sequence This connection sequence breaks the previous connection and then makes the new connection 8 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Switching Matrix Control Step 10 To define E5250A input connection In the E250A INPUT CONNECTION fields enter the unit name device terminal name or any identifications The definitions are used to classify the E5250A input ports on the E5250A CONNECTION SETUP screen If you define the unit name use the softkeys For the default settings see Table 8 3 NOTE Value of INPUTn The INPUT fields are labels used to classify the E5250A input ports You can use another name instead of the unit name Enter the name using the front panel keys or
78. the channel assignments 0000000008 Step 4 Set up the measurement parameters 000 Step 5 Set up the results display 0 00 0 eee ee eee eee Step 6 Execute the measurement 0 0 0 2 eee eee eee eee 4 Quasi static C V Measurements Measurement Functions 0 00 ccc eect eee nes Available Units aiii da os Capacitance Data Calculation 0 0 eee eee eee Operation smire li cave es gh E A A O A a ES Parameters v 04 ei nia cake a Defining Measurement Conditions 00 0 e eee eee eee eee To Define Measurement Units 0 0 0 0 cee eee eee To Set up QSCV Sweep Source 00 eee eee To Set up Stop Condition 0 0 00 eee eee eee To Set up Constant Output oo oococoococooo eee To Set up PGU Output sisan iie a eee eee To Define Measurement Conditions 0 0 0 2 eee eee eee To Display Graphics Results 0 00 0 eee ec eee eee To Display List Results 2 0 00 cee eee To Execute or Stop Measurement 00 0 0 eee eee eee eee Making a Measurement 0 0 cece eect eens Step 1 Prepare for measurement 00 0 0 e eee ee eee Step 2 Mount your DUT on the test fixture o ooo oooooooooooo o Step 3 Define the channel assignments 00 0000 ooo Step 4 Set up the source parameters 0 00 02 e eee eee eee Step 5 Set up
79. the measurement parameters 0005 Step 6 Set up the results display 0 0 00 00 e eee eee eee Step 7 Execute the measurement 0 00 00 eee eee ee eee Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 3 Contents Maximum Measurement Value 0 0 cece eee eee ooo 4 26 Considering Measurement Accuracy 0 0 00 c eee eee eee eee eee 4 28 Stress Force Stress FUNCION a eS 5 3 Stress Output Channels syo cers Me a ERE eel BE eee 5 4 Stress Mode stars sc Sci sibs dd ii 5 6 Stress Force Sequence 1 0 eee eee eee nee 5 7 Stress Stop Function at Abnormal Status oooooooooococoooooo 5 10 Defining Stress Conditions o ooooocococoocroo ro 5 11 To Set up Stress Source Channels 00 00 0c eee ee eee ee 5 13 To Set up Stress Condition Timing 0 00 00 nren errn 5 15 To Set up ac Pulse Output 0 eee 5 17 To Setup de Output s iee sey bbe de rr 5 19 To Force Stress ay ee AA E anata ees es 5 20 Analyzing Measurement Results Analysis PUNCHOM sesgar o to ate ea ai 6 3 Marker on the GRAPH LIST GRAPHICS screen 4 6 4 Marker on the GRAPH LIST LIST screen 000 0004 6 6 CAU seein Rei A Ded AA E ETE 6 8 Eine Drawing ira is a ds 6 9 Scaling FUNCHONS coin e a e 6 11 Overlay Display Function 0 0 0 0 eee eee eee eee 6 12 Automatic Analysis Function 0 0
80. the plotting area Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 21 Built in Functions L2G2 L2G2 Returns the slope of LINE2 for Y2 axis Syntax L2G2 This function calculates the slope by using the following formula e If X and Y2 axes are both linear scaling a y1 JMX Xp e If X axis is logarithmic scaling and Y2 axis is linear scaling a Y1 yo log x log xo e If X axis is linear scaling and Y2 axis is logarithmic scaling a log y log yo x1 xp If X and Y2 axes are both logarithmic scaling a log y log yo log x log xp Where OL Slope of LINE2 XQ Yo X1 y X and Y2 coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area 9 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions L2X OL2X Returns the X intercept value Y 0 of LINE2 Syntax L2X If LINE2 is horizontal this function returns invalid data L2Y Returns the Y intercept value X 0 of LINE2 Syntax L2Y If there are Y1 and Y2 axes this function returns the value for selected axis If LINE2 is vertical this function returns invalid data L2Y1 Returns the Y1 intercept value X 0 of LINE2 Syntax L2Y1 If LINE2 is vertical this function returns invalid data L2Y2 Returns the Y2 intercept value X 0 of LINE2 Syntax L2Y2 If LINE2 is vertical this function returns invalid data MI Returns the index number of measurement
81. the pulse output mode MODE VPULSE set up the MEASURE PGU SETUP screen as same as the normal sweep mode For setting up the PGU SETUP screen refer to Chapter 1 2 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Executing Measurements To Define Measurement Units Press Chan front panel key to define the measurement units CHANNELS CHANNEL DEFINITION screen is displayed 1 MEASUREMENT MODE Select SWEEP secondary softkey VNAME and INAME Enter a unique name for voltage or current variable These names must be 6 or less alphanumeric characters First character must be alphabet character For example enter Vce for collector emitter voltage If channel does neither output nor measurement you can omit VNAME and INAME MODE Select one of the following softkeys to set the output mode e V Voltage output for SMU VSU and PGU V Grounded mode voltage measurement for VMU J Current output for SMU VPULSE Pulsed voltage output for PGU e IJPULSE Not available e COMMON Circuit common for SMU and GNDU e DVOLT Differential mode voltage measurement for VMU FCTN Select one of the following softkeys to set the output function e CONST Constant output function for SMU VSU and PGU e VARI Primary sweep output function for SMU and VSU e VAR2 Secondary sweep output function for SMU and VSU e VARI Not available To disable a unit Select DELETE ROW
82. the sampling interval is enough longer than the measurement time Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 7 Sampling Measurements Measurement Functions For example if Thold 10 ms Tinterval 5 ms and TIME values are as shown below estimated measurement time is 15 ms to 20 ms and there are 3 triggers between INDEX 1 and INDEX 2 e TIME for INDEX 1 10 ms 10 5 x 1 1 0 ms e TIME for INDEX 2 30 ms 10 5 x 2 1 3 ms Sampling Interval Hold Time Saale ila ila a a Meas time TIME at INDEX 1 TIME at INDEX 2 To Use Multiple Measurement Units If you define multiple measurement parameters in the NAME column of the DISPLAY DISPLAY SETUP screen sampling measurement is executed by using multiple measurement units Differences between this measurement and the measurement using only one unit are shown below e Measurement Sequence Measurement units start measurement in the order below Parameters for GRAPH X Y1 Y2 Parameters for LIST Order of No assigned for the parameters e Value of TIME TIME stores the time the first measurement unit starts measurement TIME does not store the time another unit starts measurement Measurement Time Measurement time is sum of the measurement time by all units To execute sampling measurement with the specified sampling interval the sampling interval must be enough longer than the measurement time 3 8 Agilent 4155C 4156C User
83. the value greater than or equal to START STOP the measurement unit executes a one point capacitance measurement between the START and STOP values HOLD TIME Enter the hold time 0 to 655 35 seconds 10 ms resolution Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 11 NOTE Quasi static C V Measurements Defining Measurement Conditions 8 DELAY TIME Enter the delay time 0 to 65 535 seconds 100 Us resolution You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINTTION screen In the QSCV measurement the 4155C 4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage At each sweep step the capacitance measurement is executed over the voltage range output voltage capacitance measurement voltage 2 To Set up Stop Condition 1 Press the Meas key in the PAGE CONTROL key group 2 Move the field pointer to the QSCV Status field 3 Select one of the following softkeys CONT AT ANY Sweep will continue even if an abnormal status occurs STOP AT ANY ABNORM Sweep will stop if any abnormal status occurs STOP AT COMPLIANCE Sweep will stop if the abnormal status 1 or 2 listed below occurs Abnormal status means the following 1 Integration time too short for the capacitance measurement Compliance on the leakage current measurement unit Compliance on the non measurement unit Overflow on ADC Hi 5 oe N
84. third fields are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn off markers Set the MARKER secondary softkey to OFF To move marker to maximum or minimum value of measurement curve Select MARKER MIN MAX secondary softkey The marker searches for minimum or maximum value in measurement order from the present location every time you select the MARKER MIN MAX secondary softkey To move marker to next VAR2 step or append curve Select MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP To move marker fast Press Fast front panel key of the MARKER CURSOR key group while rotating rotary knob 6 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to points between measurement points by setting INTERPOLATE softkey to ON GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM MARKER 751 2530mY 10 00UA 1 0342uA4 CA CA MARKER 1 00 1 00 MIN MAX las IC IB ery DIRECT MARKER CURSOR decode decode taiv div MARKER SKIP AUTO ANAL Y SIS 100 f 100 f CURSOR 0 000 VBE v 100 m div 1 00 ace AXIS LINE SCAL ING DISPLAY
85. which you are going to set up the connection information on the screen Use the CARD1 CARD2 CARD3 or CARD4 softkey to select the card 8 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Step 3 Step 4 Support Functions Switching Matrix Control To change the enable input ports for ARRAY display mode optional INPUT 1 to INPUT 4 are always enabled INPUT 5 to INPUT 10 are selectable You can select one from INPUT 5 7 and 9 and you can also select one from INPUT 6 8 and 10 To change the enable input port move the pointer on the field of the input port that you are going to enable then select the ENABLE PORT softkey This softkey is not available for the enabled input port the bias port and the input ports that are internally connected to the bias port For example if you select the ENABLE PORT softkey on INPUT 7 then INPUT 5 and INPUT 9 are disabled and INPUT 7 is enabled The information for the disabled ports is cleared In the figure on page 8 36 INPUT 1 to INPUT 5 and INPUT 8 are enabled And INPUT 6 7 9 and 10 are disabled To change the enable input ports for LIST display mode optional INPUT 1 to INPUT 4 are always enabled INPUT 5 to INPUT 10 are selectable You can select one from INPUT 5 7 and 9 and you can also select one from INPUT 6 8 and 10 To change the enable input port move the pointer to the field of the INPUT 5 or INPUT 6 SMUS or SMU6 in the following figure Then select t
86. with specified gradient cursor sn A eae a eat a Y GRAD VALUE Y X uams t0 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 9 Analyzing Measurement Results Analysis Function e Tangent line mode can draw tangent line to marker which is on measurement curve marker measurement curve UEDOTOOS 80x60 e Regression line mode can draw regression line within area specified by two cursors cursor i HORE L_ cursor regression line UGDOTO1O SOGO 6 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Analysis Function Scaling Functions You can change the axis scales after plotting the measurement results on the GRAPH LIST GRAPHICS screen The following scaling functions are provided e Autoscaling Changes X and Y axis scaling to fit the measurement curve e Zooming in Changes the scaling to half the present scaling This enlarges the measurement curve on the plot area e Zooming out Changes the scaling to double the present scaling This reduces the measurement curve on the plot area e Centering at cursor Centers the display around the cursor at the same resolution Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 11 Analyzing Measurement Results Analysis Function Overlay Display Function You can overlay a measurement curve that was previously saved into one of the fou
87. you to move the marker on lines between adjacent measurement points Marker to Min Max Moves the marker to the maximum or minimum measurement point value Direct Movement Moves the marker directly to specified coordinates on measurement curve Marker Skip Moves the marker to the next measurement curve This function only has meaning for subordinate sweep measurements and append measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 5 Figure 6 2 Analyzing Measurement Results Analysis Function Marker on the GRAPH LIST LIST screen Marker on the GRAPH LIST LIST screen GRAPH LIST LIST SHORT 293AUg09 06 18PM VF IF V A DIRECT MARKER 1 10 00000m 4 150000p 2 0 000000 1 150000p MRR 3 10 00000m 3 300000p O OE o O tart 5 30 00000m 14 80000p 6 7 8 9 DIF 575 0000p A V SPREAD RE SWEEP TIMING CONST SHEE SETUP SETUP SETUP SETUP UGTOZ2013 100x80 When marker function is enabled on GRAPH LIST LIST screen a marker highlighted row is displayed Marker has following functions on this screen e displaying values of data variables The data variable values are displayed for the highlighted row e specifying the position for direct keyboard calculation If you enter an expression that has data variables related to measurement points the va
88. 0 255 patience EEE aceon eoulec hey bodes e Budd pa bod AE R 7 36 To Specify Source Output Time 0 0 00 eee eee eee 7 36 SMU Filter iesca ie pe ee teeth ten Rida ee pli heeded show ve 7 37 Self Calibratione s a a alii e 7 38 Auto Calibration 0 2 cece eee een eben eens 7 38 Zero Offset Cancel cre cece wea TELE orto dae See RS 7 39 To Measure Offset Data 0 0 0 ccc ee ee eens 7 39 To Perform Offset Cancel 20 0 cece eee eee eens 7 41 OSCV Zero Offset Cancel en aa A lo es es 7 42 To Measure Offset Datas srne norberak tk rerainan en a eE teens 7 42 To Perform Offset Cancel 0 0 0 0 cece cece eee eens 7 44 Operation States imc a bee 7 45 Me Stat dede a ad ios Madd ies 7 45 Measurement States cree vee eas Voss dee see a aero 7 45 Stress Forcada a a doe Materiales 7 46 Standby State oia a ee 7 46 Changing among Operation States 0 0 00 02 eee eee eee 7 46 OUIipUL Sequence iia Mk ee he a he ee ets Ls 7 48 Sequential Mode iio eae bs oa earn oi y dees 7 49 Simultaneous Mode esotas datare cece eee eee n ene nee 7 51 Contents 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents Measurement Sequence 0 eee cence 7 53 Support Functions User Function and User Variable 0 0 0 eee eee eee eee 8 3 Output or Measurement Data 0 00 0 8 3 User PUNCUON oriras enama oka eee bation Slee iste dt nial E aes ee eas 8 5 User Variable iio ai A ie ibi 8
89. 00 Intrept 1 421 1 Orad y 521 61ul GRAD MOCE OFF 200u idiv TANGENT ODE OFF Intrept 2 88976 0 00 SELECT 0 000 VO CV 1 00 div 10 00 aa MARKER fl SCALING DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP UGT02008 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 27 Analyzing Measurement Results Manual Analysis To Display and Select a Line 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON Selected line and two cursors are displayed Selecting the LINE secondary softkey toggles as follows OFF gt ON gt OFF Set LINE SELECT secondary softkey to desired line 1 or 2 Selected line is highlighted To select line to analyze Selecting LINE SELECT secondary softkey toggles as follows 1742 gt NONE gt 1 The following are independent for each line So changing the active line also changes the following e locations of marker and cursors e X and Y intercepts and gradient To Display Grid on the Graph 1 Select DISPLAY SETUP primary softkey 2 Set GRID secondary softkey to ON Grid is displayed Selecting GRID secondary softkey toggles between ON and OFF To turn off grid Set GRID secondary softkey to OFF 6 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Change Data V
90. 0000 s 0 00000 s PEAK VALUE 1oomv 100mV HOLD TIME BASE VALUE 0 000 Y 0 000 V 0 000 s LEADING TIME E 100 ns TRAILING TIME fite d 100 18 FILTER ON IMPEDANCE Low Low STRESS CONTINUE AT ANY Status ACONSTANT UNIT SMU1 MP NAME VSU MODE Vv SOURCE 5 00 V COMPLIANCE 4 0000mA 0 000000100 CHANNEL STRE STRESS PREV NEXT DEF SEH FORCE PAGE PAGE VCOA 5 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Defining Stress Conditions To Set up de Output 1 Press Stress key in the PAGE CONTROL key group Confirm that the following is set on the STRESS CHANNEL DEFINITION screen for the units that you want to set up for dc stress e Vor I is set in the MODE field SYNC is set in the FCTN field 2 Select STRESS SETUP primary softkey 3 Inthe SOURCE field for the desired unit in the CONSTANT area enter the desired dc stress value 4 In the COMPLIANCE field in the CONSTANT area enter the compliance value The non stress NSYNC constant units also appear in the CONSTANT area You can set SOURCE and COMPLIANCE values for these units the same way as you set the dc stress units To set other areas of the STRESS STRESS SETUP screen see To Set up Stress Condition Timing on page 5 15 To modify the UNIT NAME and MODE fields Modify the UNIT NAME and MODE fields on the STRESS CHANNEL DEFINITION screen Example The following figure shows an example setup to set source SMU1 to 5 00 V and compliance
91. 01 Po AFTER pa o Aens M 6 7 8 LINE2 AMAPKER At a point where XInterpolate OFF 8 8 DISPLAY AUI PREV NEXT SETUP i PAGE PAGE UGTO2016 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 41 Analyzing Measurement Results Automatic Analysis To Draw Tangent to Specified Measurement Point 1 Press Display front panel key 2 Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen 3 Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select TANGENT secondary softkey In field 2 select secondary softkey to specify desired axis In field 3 select secondary softkey to select desired data variable name In field 4 enter desired expression In field 5 select Ba ON A e e AFTER secondary softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings 9 Ifyou selected AFTER select secondary softkey to enter desired data variable in field 6 10 If you selected AFTER enter desired expression in field 7 Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning o
92. 027 0 047 0 12 0 23 Cp 0 000798 0 0072 0 0088 0 022 0 045 Dp 0 00238 0 011 0 015 0 036 0 072 Ao 0 041 Bo 7 2E 15 Boc 6 0E 18 Co 4 3E 14 Coc 5 1E 18 Do 4 2E 15 Doc 6 0E 18 10 nA Ap 0 52 0 52 0 52 0 53 0 54 Bp 0 004 0 027 0 047 0 12 0 23 Cp 0 0008 0 0072 0 0088 0 022 0 045 Dp 0 0024 0 011 0 015 0 036 0 072 Ao 0 041 Bo 6 2E 15 Boc 6 0E 18 Co 7 4E 14 Coc 5 1E 18 Do 3 2E 15 Doc 6 0E 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 31 Quasi static C V Measurements Considering Measurement Accuracy Table 4 3 Conditions for Calculating Measurement Accuracy Conditions Measurement Unit Equivalent Guard Measurement Output Parallel Capacitance of HRSMU MPSMU Range Range Resistance Measurement HPSMU of DUT Path 10 pA 2V 10 T ohm 200 pF Figure 4 5 ee 20 V 10 T ohm 200 pF Figure 4 6 20 V 10 T ohm 1 nF Figure 4 7 20 V 100 G ohm 200 pF Figure 4 8 1nA 2V 10 T ohm 200 pF Figure 4 9 Figure 4 17 20 V 10 T ohm 200 pF Figure 4 10 Figure 4 18 20 V 10 T ohm 1 nF Figure 4 19 20 V 10G ohm 200 pF Figure 4 11 Figure 4 20 40 V 1Gohm 200 pF Figure 4 12 Figure 4 21 100 V 1 G ohm 200 pF Figure 4 13 Figure 4 22 200 V 1 G ohm 200 pF Figure 4 23 10 nA 2V 10 T ohm 200 pF Figure 4 14 Figure 4 24 20 V 10 T ohm 200 pF Figure 4 25 20 V 10 G ohm 200 pF Figure 4 15 20 V 1 G ohm 200 pF Figure 4 16 Figure 4 26 Calculation example data shown
93. 10 for procedures gE Q ses 8 22 g 900 o 29 oO 000 O oo 000000 O o2 00090 y OOOO 86seeeea z B5 B8858 E 2 Defining measurement mode and i i ii _ measurement units that you use to do esc Measurement mapa a ce al o E See To Define Measurement Units on anos bak pages 4 10 Also see Chapter 8 for the E colors 57 user function and standby function crno s Ignore the SERIES RESISTANCE and a w DISCHARGE fields they are not je je a e ra available for the QSCV measurements 3 Setting the source conditions See the MEASURE QSCV SETUP ieee ag aes max following in this section ao ein To Set up QSCV Sweep Source carino Coti e To Set up Stop Condition TIMING HOLD TIME 10 00 8 DELAY TIME 100 0m8 oscv CONTINUE AT ANY status e To Set up Constant Output consTant UNIT re e To Set up PGU Output source A A O one one PEET L SINGLE For setting the measurement conditions fe peer e m mea see following in this section serue serue seo s PAGE PAGE e To D
94. 155C 4156C User s Guide Vol 2 Edition 5 4 27 NOTE Quasi static C V Measurements Considering Measurement Accuracy Considering Measurement Accuracy The measurement accuracy is not the specifications but the reference data The capacitance measurement accuracy can be calculated by the following formula Measurement Accuracy A B F A Reading accuracy accuracy of the measured value B Offset accuracy Bp Cp x Tinteg Dp Xx Tinteg A A Tleak Ap JJ Vstep E Tinteg Bo Boc x Cg Co Coc xX Cg x Tinteg Do Doc x Cg x gt B Ao F Tleak Rdut Vstep where Tinteg Integration time for the capacitance measurement in seconds Tleak Integration time for the leakage current measurement in seconds Vstep QSCV measurement voltage in V Rdut Equivalent parallel resistance of DUT in Q Cg Guard capacitance of the measurement path in F Ax Bx Cx and Dx values are the constant For the values see Table 4 1 for the high resolution SMU HRSMU and Table 4 2 for the medium power high power SMU MPSMU and HPSMU Calculation examples of the measurement accuracy are shown in Figures 4 5 through 4 26 Conditions of the calculation are shown in Table 4 3 4 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 4 1 Quasi static C V Measurements Considering Measurement Accuracy Constant Value for calculating the Measurement Accuracy HRSMU
95. 44 9 17 OLIG2 events A EAS aden A egy eee eee 9 18 OLIX RR Wer aa die ea wl 9 19 OLIY es alec at ce cae E R eee RLA oS slate pa arate Sod arden doe argue ae 9 19 Q TAN AD ui its ata Bada ok a e ed Bk 9 19 OLA Lts A dees ye sie bie eh ae Gee 9 19 L2CO A A ards ena eats aes te 9 19 OIE ri di a Ya 9 20 LIGI 2 ey 5 226 WRIA Gea eye hod eens bat Ra et a a E 9 21 L 262 ii dk Gh eee ii Sie Ane Lao Gd Sed ees la 9 22 OL2X fies bach nh eek he eh ga eae es Fa ba aaa a Seles EREE 9 23 A esd sedan baked ee Geiger elite et nid aerated ieee 9 23 OLY T 03 pata Pas bi ey it Sete 9 23 A A E ed wae a RN 9 23 OM AA iia 9 23 OMX A NN 9 24 OMA A A AA A A A E 9 24 MY dit A A AA A eal AA 9 24 OMV A a NS a wy 9 24 10 Connecting Measurement Devices Using Test Fixture cuina idad Ged a eee 10 3 Using Connector Plate 2 eee eee 10 5 To Reduce Leakage Current 0 00 0 0 cece aia eee eee 10 5 To Measure Low Resistance 22 0 0 0 0 eee eee 10 7 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 9 Contents Conients 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements This chapter consists of the following sections which describes how to execute a sweep measurement e Measurement Functions e Defining Measurement Conditions e Making a Measurement For details about the measurement setup screens s
96. 5 4 9 Quasi static C V Measurements Defining Measurement Conditions To Define Measurement Units Press the Chan front panel key to define the measurement units The CHANNELS CHANNEL DEFINITION screen appears 1 MEASUREMENT MODE Select the QSCV secondary softkey for the quasi static CV QSCV measurement 2 VNAME Enter a unique name for the voltage variable For example enter Vg for gate voltage If the channel does neither V force nor V measurement you can omit VNAME 3 INAME Enter a unique name for the current variable For example enter Ig for gate current If the channel does neither I force nor I measurement you can omit INAME 4 MODE Select one of the following softkeys e V Voltage output for SMU VSU and PGU e J Current output for SMU e COMMON Circuit common for SMU and GNDU In the QSCV measurements pulsed output is not available 5 FCTN Select one of the following softkeys to set the output function e VARI QSCV sweep output function for the V mode SMU e CONST Constant output function for SMU VSU PGU and GNDU VNAME and INAME You can use VNAME and INAME names in user function definitions or for analysis on the GRAPHICS LIST screens These names must consist of up to six alphanumeric characters The first character must be a letter of the alphabet To disable a unit Select the DELETE ROW softkey The settings for the unit are deleted 4 10 Agilent 4155C 4156C User s Guide Vol 2
97. 55C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Source Output Sequence and Time Origin Source unit output sequence and the time origin depends on the setup value of the OUTPUT SEQUENCE MODE OF SAMPLING field in the MEASURE OUTPUT SEQUENCE screen The following two modes are available for the field e SIMULTANEOUS mode All source unit starts output at same timing This timing is defined as the Time Origin See figure below CONST 1 Pulse Bias Pa CONST 2 e fold time time origin sampling start sampling completion UGDO3O14 120x80 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 11 Sampling Measurements Measurement Functions e SEQUENTIAL mode Source units starts output in the order defined in the OUTPUT SEQUENCE table of the MEASURE OUTPUT SEQUENCE screen Time Origin is when the last source reaches the specified output value See figure below If there is pulse bias sources PGUs they start to force pulse base value in the order shown above and start to force pulse bias at the Time Origin j const 1 o Pulse Bias PG CONST 2 o t hold time time origin sampling start sampling stop UGDO3007 120x80 3 12
98. 6 Syntax of Data Variable Name 0 0 0 eee 8 8 Expressit aa i 555 A ke ore ty acute akan Weta wo chiara anaes A 8 9 Standby Function oo ee ed SW ATA eS Vaan sO ewan 8 13 Standby Channels iuris ye eee ae sees oredr we ya ees 8 13 Standby State iii A a Chee ete yak 8 13 Available Units and Output Values 00 0 0 002s 8 14 Output Values of non Standby Channels 0 00 0008 8 14 Output Sequence of Standby Channels 0 0 00 ooo 8 15 When Getting Setup File 0 0 eee eee 8 16 To Use Standby Function 0 0 cee eee eee 8 17 R BOX Control scs crei ee PE we ee ee 8 18 Resistance Valte ocu sok ae suse be Valeo Gude elds eae la di 8 18 Connections 2 Sa ie wee ee wie EN Seed 8 18 NOUS et DS wee Ms eee ne ee ee ath Sees 8 20 Circuit Diagrams ae nee A oe ele a eke ae We 8 21 To Us R Box iio be Sie er cee tide Medea bt ou des 8 23 SMU PG Selector Control 0 0 00 eee eee eee ene ene 8 25 Setup and Switching Conditions 0 0 00 0 8 26 Restrictions using Selector 2 0 0 0 eee eee eee eee eee 8 26 To Use Selector iii hale Sah bie salty ba bo tada 8 27 Switching Matrix Control 0 0 ee eee eae 8 28 R6qUITEMENIS esenp pe et o ee EE 8 28 To Control Functions sss sieca i ee beatae Siew Sse Hdl a Sagas 8 31 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 7 Contents To Control Connections ss eies aro ahoni i a a aA
99. AC Stress F a elay time of PGU pulse ee SMU2 NSYNC Hold Time SMU3 E t l DC Stress Stress Start Stress Stop UGDO4003 e output sequence from idle state to the stress state PGUI1 SMU1 PGU2 SMU2 SMU3 e stress force sequence in the stress force state E a ce aera The stress force channels PGU1 PGU2 and SMU3 start stress and stop stress at the same time e output sequence from stress state to the idle state SMU3 SMU2 PGU2 SMU1 PGU1 ERAS Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 9 Stress Force Stress Function Stress Stop Function at Abnormal Status On the STRESS STRESS SETUP screen you can select whether the stress stops or continues when an abnormal status occurs When an 4155C 4156C is stopped by the stress stop function a message is displayed in the message display area The stress stop function is not effective until the stress has been forced for 10 seconds For example if STOP AT ANY ABNORMor STOP AT COMPLIANCE is selected and abnormal status occurs after forcing stress for 5 seconds the stop function does not stop stress until stress is forced for 10 seconds Setting the Stress Stop Function You can select one of the following in the STRESS Status field on the STRESS STRESS SETUP screen e STRESS Status CONT AT ANY Stress continues even if an abnormal status occurs e STRESS Status STOP AT ANY ABNORM
100. AR information See Figure 1 8 Set the VARI information as shown below To move the pointer on Front Panel use arrow keys of MARKER CURSOR area on Keyboard use arrow keys To set SINGLE in SWEEP MODE field select SINGLE secondary softkey press Shift F1 keys To set LINEAR in LIN LOG field select LINEAR secondary softkey press Shift F1 keys To enter 2 000 V in STOP field press 2 then Enter type 2 then press Enter To enter 20 00 mv in STEP field press 2 0 m then Enter type 20m then press Enter Drain voltage sweeps from 0 V to 2 V with 20 mV step The current compliance is set to 100 mA 3 Set the VAR1 information as shown below on Front Panel on Keyboard To enter 0 000 V in OFFSET field press 0 then Enter type 0 then press Enter To enter 1 000 in RATIO field press 1 then Enter type 1 then press Enter To force the same voltage to the drain and gate set RATIO 1 and OFFSET 0 Because VAR is defined as follows VAR1 output RATIO x VAR1 output OFFSET Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 39 Sweep Measurements Making a Measurement Figure 1 8 Sweep Setup Screen MEASURE SWEEP SETUP O1JAN29 10 58AM SINGLE
101. Agilent Technologies products will be uninterrupted or error free If Agilent Technologies is unable within a reasonable time to repair or replace any product to a condition as warranted customer will be entitled to a refund of the purchase price upon prompt return of the product The Agilent Technologies products may contain remanufactured parts equivalent to new in performance or may have been subject to incidental use The warranty period begins on the date of delivery or on the date of installation if installed by Agilent Technologies If customer schedules or delays Agilent Technologies installation more than 30 days after delivery warranty begins on the 31st day from delivery Warranty does not apply to defects resulting from a improper or inadequate maintenance or calibration b software interfacing parts or supplies not supplied by Agilent Technologies c unauthorized modification or misuse d operation outside of the published environmental specifications for the product or e improper site preparation or maintenance Agilent 4155C 4156C User s Guide Vol 2 Edition 5 To the extent allowed by local law the above warranties are exclusive and no other warranty or condition whether written or oral is expressed or implied and Agilent Technologies specifically disclaims any implied warranties or conditions of merchantability satisfactory quality and fitness for a particular purpose Agilent Technologies will be lia
102. Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Linear Sampling Measurement Linear sampling mode keeps a constant sampling interval that is the interval of measurement trigger And if the measurement units are ready to measure the units start measurement and the result data is stored in memory This is repeated until one of the sampling completion conditions is satisfied However if both the following two conditions occur linear sampling mode changes the sampling interval to two times the previous sampling interval and continues sampling measurement e number of sampling points reaches specified NO OF SAMPLES e sampling completion condition is not satisfied Example Operation This example assumes the following sampling setup e INITIAL INTERVAL value is longer than the measurement time e NO OF SAMPLES value is set to 10 e TOTAL SAMP TIME is long for example 50x INITIAL INTERVAL Do not set to AUTO which enables the number of sampling points sampling completion condition 1 Executes one point measurement and stores data in memory Repeats this 10 times every sampling interval INITIAL INTERVAL setting value because of the sampling interval enough longer than the measurement time initial interval 2 If the sampling completion condition is not satisfied after 10 points measurement linear sampling mode changes the sampling interval to two times the INITIAL INTER
103. BLE and QSCV MEASURE SETUP screens To display variables on the data variable area In the DATA VARIABLES fields select the secondary softkey for the desired variable Up to two variables can be displayed on the data variable area which is located below the list area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for the 10 pA measurement range 4 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Defining Measurement Conditions To Execute or Stop Measurement To execute a measurement press Single Clears GRAPHICS or LIST screen then executes measurement one time Measurement results are displayed on the GRAPHICS or LIST screen Repeat Executes measurements continuously Before each measurement is executed the GRAPHICS or LIST screen is cleared Most recent measurement results are displayed on the GRAPHICS or LIST screen Append Executes measurement one time Does not clear the GRAPHICS or LIST screen That is measurement results are added to the existing results To stop a measurement press the Stop key in the MEASUREMENT key group Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 17 NOTE Quasi static C V Measurements Making a Measurement
104. C 4156C User s Guide Vol 2 Edition 5 4 19 NOTE Quasi static C V Measurements Making a Measurement Step 4 Set up the source parameters Set the output parameters on the MEASURE QSCV SETUP screen Define the source parameters as shown below In the QSCV measurement the 4155C 4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage At each sweep step the capacitance measurement is executed over the voltage range output voltage capacitance measurement voltage 2 1 Press the Meas front panel key The MEASURE QSCV SETUP screen appears 2 Set the VARIABLE table The following values are just an example SWEEP MODE SINGLE START 3 1V STOP 3 1 V STEP 100 mV COMPLIANCE 100 mA The SWEEP MODE field selects the sweep mode SINGLE or DOUBLE START STOP and STEP mean the sweep start stop and step values The minimum STEP value is double the resolution of the output range of the source unit 3 Set the QSCV MEAS VOLTAGE field The following value is just an example QSCV MEAS VOLTAGE 80 mV This field specifies the capacitance measurement voltage in each sweep step The value must be less than or equal to the STEP value If you set the value greater than the STEP value this value is automatically set to the same value as the STEP value If you set the value greater than the START STOP value NO OF STEP is auto
105. Coaxial VSU 1 blue label SMU 2 Triaxial SMU 2 VSU 2 Coaxial VSU 2 blue label SMU 3 Triaxial SMU 3 VMU 1 Coaxial VMU 1 blue label SMU 4 Triaxial SMU 4 VMU 2 Coaxial VMU 2 blue label pao Interlock LED cable Agilent 164933 b Triaxial cable Agilent 16493C You do not need to connect SMU4 for this measurement c Coaxial cable Agilent 16493B You do not need to connect VSUs and VMUs for this measurement 1 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Making a Measurement Step 2 Mount your DUT on the test fixture 1 Select a suitable socket module for your DUT 2 Mount the socket module on the test fixture Socket Module QAND 50x60 3 Mount your DUT on the socket module 4 Make connections with four connection cables miniature banana to pin plug You make the following connections e Source to SMU1 e Gate to SMU2 e Drain to SMU3 e Substrate to SMU1 Both the source and substrate terminals are connected to SMU1 5 After finishing connections shut the lid of the test fixture Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 33 Sweep Measurements Making a Measurement Wiring for the 4156C For this measurement non Kelvin connections are used So connect only the force terminals as shown in the following figure Substrate 1 S o to Connection Cable SMU 42004 1A Max 2 ro Guard
106. Compliance Setting Range HPSMU 2V 1 pA to 1000 mA 20 V 1 pA to 1000 mA 40 V 1 pA to 500 mA 100 V 1 pA to 125 mA 200 V 1 pA to 50 mA Table 7 20 I Compliance Resolution Unit I Compliance Resolution HRSMU 100 fA lt I lt 100 pA 10 fA 100 pA lt I lt 1 nA 100 fA 1 nA lt I lt 10 nA 1 pA 10 nA lt I lt 100 nA 10 pA 100 nA lt I lt 1 uA 100 pA 1 A lt I lt 10 uA 1nA 10 pA lt I lt 100 uA 10nA 100 pA lt I lt 1 mA 100 nA 1 mA lt I lt 10 mA 1 UA 10 mA lt I lt 100 mA 10 pA MPSMU 1 pA lt I lt 1nA 100 fA 1 nA lt I lt 10nA 1 pA 10 nA lt I lt 100 nA 10 pA 100 nA lt I lt 1 uA 100 pA 1 A lt I lt 10 uA 1nA 10 pA lt I lt 100 uA 10 nA 100 pA lt I lt 1 mA 100 nA 1 mA lt I lt 10 mA 1 UA 10 mA lt I lt 100 mA 10 pA 7 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Compliance Unit I Compliance Resolution HPSMU 1 pA lt I lt 1 nA 100 fA LnA lt I lt 10nA LpA 10 nA lt I lt 100 nA 10 pA 100 nA lt I lt 1 uA 100 pA 1 uA lt I lt 10 pA 1 nA 10 uA lt I lt 100 uA 10 nA 100 uA lt I lt 1 mA 100 nA 1 mA lt I lt 10 mA 1 uA 10 mA lt I lt 100 mA 10 uA 100 mA lt I lt 1 A 100 uA Power Compliance In addition to V compliance or I compliance you can set power compliance for the VAR1 VAR2 and VAR1 channels of sweep measurement H
107. Considering Measurement Accuracy Figure 4 19 Calculation Example of Measurement Accuracy MPSMU HPSMU 20 18 16 14 S ES 12 3 10 lt T 4 2 0 0 001 0 01 0 1 10 QSCV Measurement Voltage V Offset Accuracy F 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 1 nF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 47 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 20 Calculation Example of Measurement Accuracy MPSMU HPSMU Reading Accuracy o0 gt 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 1 nA Output Range 20 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 G ohm Guard
108. Diagram ee 2 GNDU NFORCE Output Switch UGDO20OI Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 3 Figure 7 2 Measurement Units and Functions Measurement Units SMU Source Monitor Unit SMU can force a constant voltage constant current pulse voltage or pulse current and can measure a de current or de voltage Only one SMU can be set to pulsed source Figure 7 2 shows a simplified SMU circuit diagram SMU has the following three modes e voltage source and current monitor mode V source and I monitor mode e current source and voltage monitor mode I source and V monitor mode e source common mode Simplified SMU Circuit Diagram V Source Mode Output Switch Sig os oN o NFORCE COPOS Y OT Source Mode COMMON E V UGDO2002 7 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units Type of SMUs Following three types of SMUs are available e HRSMU high resolution SMU Only for the 4156C The 4156C has four HRSMUs Force and measure up to 100 V or 100 mA Maximum output power 2 W Minimum current measurement range 10 pA with 1 fA resolution Output and measurement ranges see HRSMU High Resolution SMU on page 7 6 Kelvin connection is available e MPSMU medium power SMU The 4155C has four MPSMUs and the 41501A B option 420 or 422 has two MPSMUs Fo
109. Edition 5 Quasi static C V Measurements Defining Measurement Conditions To Set up QSCV Sweep Source The QSCV sweep source is the source unit defined as VARI in the CHANNELS CHANNEL DEFINITION screen To set up the sweep source press the Meas front panel key The MEASURE QSCV SETUP screen appears Ls VARI SWEEP MODE Select one of the following softkeys to set the sweep mode e SINGLE single sweep mode start to stop DOUBLE double sweep mode start to stop to start VARI START Enter the sweep start voltage VARI STOP Enter the sweep stop voltage Upper or lower limit of the output voltage VARI STEP Enter the sweep step voltage The minimum available value is double the resolution of the output range You must set the START STOP and STEP values so that the NO OF STEP value is in the range 1 to 1001 The value is calculated from the following formula NO OF STEP START STOP STEP 1 If the NO OF STEP value is set to 1 the measurement unit executes a one point capacitance measurement between the START and STOP values VARI COMPLIANCE Enter the compliance value for the sweep source QSCV MEAS VOLTAGE Enter the capacitance measurement voltage The minimum value is double the resolution of the output range and the maximum value is 10 V The value must be ISTEP If you enter a value greater than the STEP value this value is automatically set to the same value as the STEP value If you enter
110. Edition 5 4 13 Quasi static C V Measurements Defining Measurement Conditions To Define Measurement Conditions Press the Meas front panel key and select the MEASURE SETUP softkey The MEASURE QSCV MEASURE SETUP screen appears 1 UNIT and FCTN Select one of the secondary softkeys to specify the measurement unit The FCTN field just displays the function of the unit RANGE Select one of the secondary softkeys to specify the measurement range CNAME Enter a unique name for the capacitance measurement data variable Up to six alphanumeric characters The first character must be a letter of the alphabet INAME Enter a unique name for the leakage current measurement data variable Up to six alphanumeric characters The first character must be a letter of the alphabet INTEG TIME QSCV and LEAK QSCV Enter the integration time for the capacitance measurement 0 04 to 400 sec for 50 Hz line frequency 0 033333 to 333 33 sec for 60 Hz LEAK Enter the integration time for the leakage current measurement 0 02 to 2 sec for 50 Hz line frequency 0 016667 to 1 6667 sec for 60 Hz The setting value is rounded to the following value integ time NPLC value selected line frequency where NPLC value is integer in the range 2 to 20000 for the capacitance measurement and 1 to 100 for the leakage current measurement The Short Medium and Long front panel keys have no effect for the QSCV measurement LEAK COMPENSATION Sel
111. GDO4008 HOw100h Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 15 Support Functions Standby Function When Getting Setup File Usually the 4155C 4156C is in the idle state after getting setups from a file or an internal memory But if all of the following must be true the 4155C 4156C keeps the standby state e standby channel assignments do not change e MODE and FCTN setups of standby channels do not change e Following setups of standby channels do not change FCTN MODE Parameters VARI V START STOP COMPLIANCE VAR2 I START COMPLIANCE VPULSE BASE START STOP COMPLIANCE IPULSE BASE COMPLIANCE VART V START STOP COMPLIANCE OFFSET RATIO I START COMPLIANCE OFFSET RATIO VPULSE BASE START STOP COMPLIANCE OFFSET RATIO IPULSE BASE COMPLIANCE CONST V SOURCE COMPLIANCE I SOURCE COMPLIANCE Pulse setup VPULSE BASE PEAK COMPLIANCE IPULSE BASE COMPLIANCE a This parameter is checked for SMUs only b This parameter is checked even if VAR1 channel is not standby channel c PGU setups on the MEASURE PGU SETUP screen 8 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Standby Function To Use Standby Function 1 Press Chan key in the PAGE CONTROL key group 2 Select CHANNEL DEF primary softkey 3 In the STBY column of the desired unit select STANDBY ON secondary softkey
112. ISABLE If sampling interval is enough longer than measurement time INITIAL INTERVAL value decides the range of a decade 10 ms to 100 ms 1st decade Sampling is executed at the following TIME value 10 ms 20 ms 30 ms 40 ms 50 ms 60 ms 70 ms 80 ms 90 ms 100 ms LOG10 mode allows to have 10 data in 1 decade Therefore all measurement data is stored in memory 100 ms to 1s There are 90 sampling points in this range Number of data can remain is only 10 They can plot the data on the X axis in almost the same interval TIME values are as follows 140 ms 170 ms 210 ms 270 ms 330 ms 410 ms 520 ms 650 ms 810 ms 1 02 s If sampling interval is less than measurement time Measurement time decides the range of a decade If the measurement time is 18 ms interval of measurement is 20 ms and the following data are stored in memory 20 ms to 200 ms 1st decade Sampling is executed at the following TIME value 20 ms 40 ms 60 ms 80 ms 100 ms 120 ms 140 ms 160 ms 180 ms 200 ms LOG10 mode allows to have 10 data in decade Therefore all data is stored in memory 200 ms to 2 s There are 90 sampling points in this range Number of data can remain is only 10 They can plot the data on the X axis in almost the same interval 3 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Rule to determine TIME TIME value is determined by the following rule Data measured
113. ISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP eran Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 21 Analyzing Measurement Results Manual Analysis To Draw Line through Specified Point with Specified Gradient 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF gt ON gt OFF 4 Select GRAD MODE secondary softkey if it is not highlighted Softkey becomes highlighted One cursor disappears if there are two cursors in the plotting area before this step Selecting GRAD MODE secondary softkey toggles between highlighted and not highlighted 5 Move the cursor to desired location by using arrow keys of the MARKER CURSOR key group 6 Select GRAD VALUE secondary softkey then enter gradient value The line goes through the cursor with specified gradient When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradients of selected line are also displayed in the plotting area To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following proc
114. MP Vbe Tb 1 VAR2 ARA ohm SMUZ MP Vee Ie v VARL 10k ohm SMU MP COMMON CONST AM PSA SMU4 MP SMUS MP SMUG MP veld vsue 0 Jenne wut fee e sake w2 foo A Pout peua Jose enou o gt 10k ohm USER NEXT VAR PAGE UGI035 100x70 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 23 Support Functions R BOX Control To measure negative resistance characteristics The 16441A R Box allows SMUs to measure current controlled negative resistance 1 MQ characteristics Connect the resistance of the 16441A as shown in following figure 16441A R Box SMU DUT 8 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 8 6 Support Functions SMU PG Selector Control SMU PG Selector Control The 4155C 4156C can control the 16440A SMU Pulse Generator Selector to automatically switch units that are connected to a DUT pin You set up this automatic control using the SMU PG SELECTOR field on the STRESS CHANNEL DEFINITION screen For example you can specify to connect the PGU to the DUT during stress and connect the SMU to the DUT during measurement So when you press the Stress key in the MEASUREMENT key group the PGU is automatically connected to the DUT And when you press a measurement key the SMU is automatically connected
115. MU can be a pulse source But only one SMU can be a pulse source Figure 1 4 shows the relationship between pulse source and other sources Figure 1 4 Pulse Source and Other Sources Pulsed on Primary Source Unit VAR Pulsed on Synchronous Source Unit VAR1 A M Primary Primary it n Synchronous Synchronous Secondary Secondary Constant Constant Pulsed on Secondary Source Unit VAR2 Pulsed on Constant Source Unit Primary Primary Synehroneus Synchronous Secondary Secondary Constant Constant e UUU e UBD02005 12000 For the pulse sweep measurement the delay time of the primary sweep source is ignored and each step of the primary sweep source is synchronized with output of the SMU pulse source Measurements are made during the pulse output The pulse output of PGU is not synchronized with any other source Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 11 Figure 1 5 Sweep Measurements Measurement Functions SMU Pulse hold time pulse period e ulse width a step value of Pulse sweep Source Sweep Source base value 7 output value of Pulse constant Source Constant Source base value l y NN S
116. Meas Time gt Time 4 6 Hold aT gt lt gt lt gt lt gt 2 ame Sampling Sampling Sampling 2 Interval en Interval A AN A N a 5 i Trigger Trigger Trigger Trigger Trigger 1 Total Sampling Time TOTAL SAMP TIME TOTAL SAMP TIME is one of the stop condition A Starts Sampling Stops Sampling 7 sys Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 5 Sampling Measurements Measurement Functions Sampling measurement is executed as explained below ee a Forces constant current constant voltage or pulsed constant bias Waits hold time Triggers one point measurement Measurement unit executes measurement Measurement result data is stored in memory Triggers one point measurement Interval of trigger is same as Sampling Interval Case 1 Measurement unit executes measurement if it is ready to measure Measurement result data is stored in memory Case 2 Measurement unit waits next trigger if it is busy or in measurement Repeats steps 5 and 6 until that a sampling completion condition is satisfied In Figure 3 1 sampling measurement stops when the completion condition total sampling time is satisfied Number of measurement data stored in memory depends on the sampling completion condition Maximum number is specified by the NO OF SAMPLES field of the MEASURE SAMPLING SETUP screen However the measurement will be immediately stopped if a sampling completion condition is satisfied before r
117. N Oscillation on any unit 4 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Defining Measurement Conditions To Set up Constant Output Constant source is the source unit defined as CONST in the CHANNELS CHANNEL DEFINITION screen To set up the constant output source press the Meas front panel key The MEASURE QSCV SETUP screen is displayed 1 CONSTANT SOURCE Enter the desired output value of the constant source 2 CONSTANT COMPLIANCE Only for SMU Enter the compliance value for the constant source You cannot change UNIT NAME and MODE in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen To Set up PGU Output In the QSCV measurements you can use the PGU as the DC voltage source not the pulsed voltage source To set up the constant voltage source press the Meas front panel key and select the PGU SETUP softkey The MEASURE PGU SETUP screen appears The PGU SETUP softkey is available when you set PGU in the CHANNELS CHANNEL DEFINITION screen 1 IMPEDANCE Select a secondary softkey to set the output impedance value e LOW for approximately zero ohm output impedance e 50 ohm for 50 ohm output impedance 2 CONSTANT SOURCE Enter the desired output value of the constant voltage source You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINTTION screen Agilent 4155C 4156C User s Guide Vol 2
118. N SQRT Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 3 Syntax Example Syntax Example Syntax Example Built in Functions ABS ABS Returns the absolute value of the expression ABS expression To return the absolute value of ID ABS ID AT Returns the value of st expression at the index number specified by the 2nd expression AT Ist expression 2nd expression If 2nd expression is not integer linear interpolated value of Ist expression will be returned To return difference of Id from its first value Id AT Id 1 AVG Returns the average value of sweep data or sampling data AVG expression For subordinate sweep measurement this function returns the average value of the primary sweep for the secondary sweep step To return the absolute value of ID AVG ID 9 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Syntax Example Built in Functions COND COND This function does the following e If st expression lt 2nd expression returns 3rd expression e If Ist expression 2nd expression returns 4th expression COND 1st expression 2nd expression 3rd expression 4th expression If value of st expression or a 2nd expression is invalid the value for the previous measurement index number is used for the comparison COND ID VG SORT ID VG VD VGS VTH returns e VDif ID VG lt SQRT ID VG e VGS VTH if ID VG gt SQRT ID VG Agilent 4155C
119. R E DAS 8 36 To Use Matrix Setup File oes cnerenr en eo eee 8 40 Trigger Function muta AR ee RO OA Glee 8 41 Tigger inNput cti a ati 8 43 Trigger Output ua da dt 8 44 9 Built in Functions Built in FUNCION rotas a 9 3 ADS dt o ed tes o de LO tra dde e o 9 4 A earn thai eae ake Sane eee FURR ee ee ee ed 9 4 AVG oat oe at Di aut hash A A A aay eed 9 4 COND emi bak deeded a AN ek eda eee da eds dd 9 5 DELTA 35 ces 28 lot kk Je dete ocd eek E te ee ee es 9 6 DRE cores Sooo Sie ee titers eo lhe aes ie eta sch E a ee aus ee eee EET 9 7 EXP at dee fol eh be ba oh ee bee thee ed de deh os 9 8 INTEG a e ao MN ae 9 8 EEE A ee A a 9 9 LOGY fad ful Ses bk Ge a A Mae eee eo pe ee dare ete 9 9 Ji BAA E EEA a a Ae add oie tl talked ak Mie 9 10 MAX aoe eS eee ody Bee Be hee te 9 11 MIN CS ito Pech Ste ect ead Hee Reece ated arate sna ata bene anaes waked eaten 9 11 O tobe iene dag a gee ne ay A eee ee eet ee 9 11 Read Out Function 0 0 ete errores 9 12 OCX A O ton cit ele lc ER A 9 13 OLS A A T ds 9 13 GY a A a dates bobs 9 13 CY A eee eee ed Gi ee oe ea he ee BP a 9 13 OA D EEEE Seth Se eae SWAG ee nie as Wile Dee bE ek Se ee a 9 14 OA D oF es heise O sedate ent ceca flee 9 14 Oli d 9 15 DI ad te a dd bd a de Rett ed es 9 15 Contents 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents OLICO ii Gon eka hae ERO Rede ee ai ted ae Sade te es 9 16 OLIG otai eae AOA OS es CA i ee ae 9 16 OLIGI Dat dee gt dh Sed ER
120. RIG OUT or TRIG IN in the TRIGGER SETUP table on the MEASURE OUTPUT SEQUENCE screen Then the trigger inputs or outputs are performed automatically after you start a measurement by selecting a measurement front panel key Single Repeat or Append The trigger output function is not available for sampling measurements When you perform knob sweep measurements the trigger function is not available For the electrical specifications of trigger signals refer to User s Guide General Information 8 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 8 8 Support Functions Trigger Function Trigger Input The 4155C 4156C can receive an edge trigger from external instruments via the trigger input terminal and initiate a sweep or sampling measurement Following figure shows examples of externally triggered sampling and sweep measurements For the trigger polarity you can select positive or negative Examples of Externally Triggered Measurements Ih Hola lime Th Td Delay Time 4155 4156 Trigger Input External Instrument Trigger Signal a Sampling Measurement step delay time _ThtTd Te 4155 4150 Start Value Trigger Input External Instrument Trigger Signal Teneo HOMO b Sweep Measurement After you press the Single Repeat or Append front panel key the 4155C 4156C waits for the trigger signal only once When the 4155C 4156C receives the trigger signal th
121. RO Guard ou O PGU 40V 100r Tt PO eo O mo vsy ZO TOOMA tax mE 20v ST 3 SJ o S TO PACKAGE 12PI DUT Gate Drain Source A High Voltage AN AGOBIO Wiring for the 4155C Substrate 1 2 Sens o Qj TO O Connection SMU 200V 1A Max 3 For o O ho 5 su O Senso par LO E Cable EGU 240V 100m xt o S vsy Hov wee VIO 20V MaN L S z 00 o TO PACKAGE 1241 DUT Gate Drain Source NIT High Voltage AN en 1004 100580 1 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Making a Measurement Step 3 Define the channel assignments You set the connection information on the CHANNELS CHANNEL DEFINITION screen 1 Turn on the 4155C 4156C Self test starts 2 After self test is finished make sure that CHANNELS CHANNEL DEFINITION screen appears on the screen of the 4155C 4156C If not press Chan front panel key where softkeys located bottom of screen are the primary softkeys and softkeys located right side of screen are the secondary softkeys 3 Make sure that SWEEP is displayed in the MEASUREMENT MODE field If not select SWEEP secondary softkey in the MEASUREMENT MODE field 4 Set the connection information in the CHANNELS area as shown in the following
122. SET ACCUM STRESS secondary softkey To change ACCUMULATED STRESS value On the STRESS STRESS SETUP screen enter the desired value in the ACCUMULATED STRESS field 5 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Example Stress Force Defining Stress Conditions The following figure shows an example of STRESS STRESS FORCE screen STRESS STRESS FORCE 94JANO1 01 30PM CHANGE COMMENT XSTRESS DURATION 10 0000 s CHANGE DURA TON 0 0010 xSTATUS 5 0000 s 50 00 RESET ACCUMULATED STRESS STATUS 123 4500 s RESET ACCUM STRESS CHANNEL STRESS s PREV DEF SETUP PAGE UD ODT Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 21 Stress Force Defining Stress Conditions 5 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results You can analyze measurement results by using lines markers and cursors on the Agilent 4155C 4156C screen If you want to display lines and marker automatically set up the DISPLAY ANALYSIS SETUP screen before starting measurements Then after the measurements the lines and marker are positioned automatically according to the setup This chapter consists of the following sections e Analysis Function e
123. SMU Pulse Generator Expander 1 E5250A Low Leakage Switch Mainframe 1 E5252A 10x 12 Matrix Card 1 to 4 GPIB Cable 1 Triaxial Cable a Coaxial Cable b Test Fixture or Prober with Connector Plate 1 a Quantity depends on the number of SMU input ports and output ports you use b Quantity depends on the number of AUX input ports you use Figure 8 7 Rear Panel View of Agilent E5250A 2000000000000 sota OO 0 00 OOO 0010 O 4 2000000000000 lt sora DO 0010 00 0000 00 ta 103050 10 0 204060 80100 slot 2 E5252A output connectors f 7 f GPIB t SMU INPUT AUX INPUT ERE GPIB address switch Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 29 Support Functions Switching Matrix Control Table 8 3 Connecting E5250A Entry field name and Connectors on default setup onan Connect to on the E5250A dic PROPERTIES screen SMU INPUT 1 4155C 4156C SMU connector or INPUT1 SMU1 41501 HPSMU MPSMU connector SMU INPUT 2 INPUT2 SMU2 SMU INPUT 3 INPUT3 SMU3 SMU INPUT 4 INPUT4 SMU4 SMU INPUT 5 INPUTS SMU5 SMU INPUT 6 INPUT6 SMU6 AUX INPUT 7 4155C 4156C VSU VMU connector INPUT7 VSU1 41501 PGU connector or other AUX INPUT 8 instruments INPUT8 VSU2 AUX INPUT 9 INPUT9 VMU1 AUX INPUT 10 INPUT10 VMU2 E5252A output Test fixture or na Connector plate conne
124. Stop S Stress a 7 Stress oa ae Finish measurement or stress force is completed UGNO4009 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 47 Measurement Units and Functions Output Sequence Output Sequence When you perform measurements or force stress or when you use the standby function you can specify an output sequence for the source channels The 4155C 4156C has two output sequence modes e sequential mode The source channels output in the order that you specify in the OUTPUT SEQUENCE table on the MEASURE OUTPUT SEQUENCE screen The source outputs are stopped in the opposite order You can set the output sequence to prevent damage to DUTs e simultaneous mode for sampling measurements only All the source channels output simultaneously The source outputs are stopped in the opposite order that you specify in the OUTPUT SEQUENCE table on the MEASURE OUTPUT SEQUENCE screen For a sampling sequence example see Chapter 3 For a stress sequence example see Chapter 5 For a standby sequence example see Chapter 8 7 48 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Output Sequence Sequential Mode Default output sequence in the sequential mode is shown below In the default settings output channels start the output in this order and stop the output in the opposite order SMUI SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 POS AA SA Starting Outputs
125. Stress stops if any abnormal status occurs e STRESS Status STOP AT COMPLIANCE Stress stops only if SMU reaches its compliance setting STOP AT ANY ABNORM and STOP AT COMPLIANCE are available at the following conditions e in PULSE COUNT mode when pulse period x pulse count is more than 10 s e in DURATION mode when specified duration is more than 10 s Abnormal Status Abnormal statuses are as follows e SMU reaches its compliance setting e Current of a VSU exceeds 100 mA e SMU ora VSU oscillates e A D converter overflow occurs e Average current of PGU exceeds 100 mA 5 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Defining Stress Conditions Defining Stress Conditions This section covers the tasks for stress forcing Two types of stress can be forced by the 4155C 4156C e dc stress e Dc voltage stress can be forced from SMUs VSUs or PGUs e Dc current stress can be forced from SMUs e ac Stress also called pulsed stress e Ac voltage stress can be forced from PGUs Ac current stress cannot be forced from the 4155C 4156C Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 11 Stress Force Defining Stress Conditions The following illustrates the basic procedures for stress forcing
126. Switching Matrix Control e Trigger Function 8 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions User Function and User Variable User Function and User Variable User function and user variable are kind of the 4155C 4156C internal data variable The data variables are used for displaying and analyzing measurement results You use data variables to assign output or measurement data to an axis for display Each data variable has a name You refer to a data variable by its name The following are the three types of data variable e Output or Measurement Data e User Function e User Variable Output or Measurement Data Data variables are available for the following measurement result data e Output data that you set for SMU or VSU e Measurement data of SMU or VMU e Output data that you set for PGU e Time data of sampling measurement Index of measurement result data Output data of SMU or VSU The data variable names are the output names that you set in the VNAME or INAME columns of CHANNELS CHANNEL DEFINITION screen For a voltage MODE the output name is specified in the VNAME column For a current MODE output name is specified in INAME column Measurement data of SMU or VMU The data variable names are the measurement result names that you set in the VNAME or INAME columns of CHANNELS CHANNEL DEFINITION screen For a voltage MODE the measurement result name is specifi
127. T screen 0 00 00 2 eee eee eee 6 36 Automatic Analysis etica Fo oa Sas Ee ea Na sete 6 37 To Draw Line by Specifying Two Points 0 0 0 2 0000 6 38 To Draw Line by Specifying Gradient and One Point 6 40 To Draw Tangent to Specified Measurement Point 6 42 To Draw Regression Line by Specifying Two Points 6 44 To Display Marker at Specified Point 00 0000 6 47 Measurement Units and Functions Measurement Units a See ee ee Siem sae eae 7 3 GNDU Ground Unit reisene aeia a ne 7 3 SMU Source Monitor Unit 0 0 0 ec eee ee en eee 7 4 VSU Voltage Source Unit 0 eee 7 17 VMU Voltage Monitor Unit 0 0 0 eee 7 18 PGU Pulse Generator Unit 2 0 0 0 eee 7 20 Compliance sc ast ee ht batted Ale eo ae ates ed tee oe 7 23 Voltage and Current Compliance 20 2 0 0 00 2 e eee eee eee ee 7 23 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 5 Contents Power Compliance scscsero areni iresten a eee Be a ees 7 27 Measurement Ranging Mode 0 0 0 eee cee ee ee 7 29 Auto Ranging cit ahs Lae Sa Shed A A er tes 7 30 Limited Auto Ranging 0 0 ee eee eee 7 31 Compliance Range 0 0 cece eee e ee 7 32 Fixed Ranges scence ets eee nae ead Bp eb a ee Ele ete 7 32 Measurement TIME ii taa a 7 33 Integration Timen 22 gt a AEC IAS BE mee Se 7 33 Overhead TIME oo 3
128. U PGU means This is available for knob sweep measurement n a means This is not available for knob sweep measurement means This is not available for this unit Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 3 Table 2 2 Knob Sweep Measurements Measurement Functions Normal Sweep and Knob Sweep Measurements Table 2 2 compares the normal sweep measurement performed by measurement front panel keys and knob sweep measurement by the front panel knob Comparison of Sweep Measurement and Knob Sweep Measurement Item Sweep Measurement Knob Sweep Measurement Spacing of VARI linear or log linear Sweep Mode of VARI single or double single or double Number of Steps for VAR1 1 to 1001 1 to 1001 Hold Time 0 to 655 35 s 0 to 655 35 s Power Compliance available not available Measurement Ranging Mode auto limited auto or fixed compliance range Standby Function available available Measurement Channel 1 to 8 ch 1 ch only Output Sequence can set can set Trigger Function available not available Integration Time short medium or long 80 us a Measurement range is automatically set according to specified compliance value b Settings on the MEASURE OUTPUT SEQUENCE screen also apply to knob sweep measurement 2 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Measurement Functions Features
129. URSOR To MARKER 3 572000Y 289 23uA MARKER mA 2 00 Intrept 1 421 Grad F 521 614 GRAD MODE Y OFF 20du idiv A REGRESS e MODE OFF AA Intrept 2 98976 0 00 f MARKER 0 000 vo tv 1 00 d1v 10 00 SKIP MARKER DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP UGTO2006 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 25 Analyzing Measurement Results Manual Analysis To Draw Regression Line for Specified Region 1 Select MARKER CURSOR primary softkey then set the MARKER secondary softkey to ON Select the desired axis for regression calculation by selecting AXIS primary softkey if both Y1 and Y2 axis are set up Then if necessary move marker to desired measurement curve by selecting MARKER SKIP secondary softkey Select LINE primary softkey Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF gt ON gt OFF Select REGRESS MODE secondary softkey if it is not highlighted Softkey becomes highlighted Selecting REGRESS MODE secondary softkey toggles between highlighted and not highlighted Move cursors to specify range of regression calculation Use arrow keys of the MARKER CURSOR key group to move cursors to desired location e To select the cursor you want to move use the SELECT CURSOR secondary softkey The r
130. User s Guide Volume 2 Measurement and Analysis Agilent 4155C Semiconductor Parameter Analyzer Agilent 4156C Precision Semiconductor Parameter Analyzer Eee Agilent Technologies 04156 90020 August 2003 Edition 5 Legal Notice The information contained in this document is subject to change without notice Agilent Technologies Inc 2001 2003 This document contains information which is protected by copyright All rights are reserved Reproduction adaptation or translation without prior written permission is prohibited except as allowed under the copyright laws Product Warranty Agilent Technologies warrants Agilent Technologies hardware accessories and supplies against defects in materials and workmanship for the period of one year from the warranty start date specified below If Agilent Technologies receives notice of such defects during the warranty period Agilent Technologies will at its option either repair or replace products which prove to be defective Replacement products may be either new or like new Warranty service of this product will be performed at Agilent Technologies Buyer shall prepay shipping charges to Agilent Technologies and Agilent Technologies shall pay shipping charges to return the product to Buyer However Buyer shall pay all shipping charges duties and taxes for products returned to Agilent Technologies from another country Agilent Technologies does not warrant that the operation of
131. V 100 nA 0 lt I lt 100 nA 10 pA 100 V 1 uA O lt I lt 1 pA 100 pA 100 V 10 uA 0 lt I lt 10 pA 1 nA 100 V 100 uA o lt I lt 100 uA 10 nA 100 V 1 mA 0 lt I lt 1 mA 100 nA 100 V 10 mA 0 lt I lt 10 mA 1 uA 100 V 100 mA 0 lt I lt 20 mA 10 pA 100 V 20 mA lt I lt 50 mA 10 pA 40 V 50 mA lt I lt 100 mA 10 pA 20 V 7 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units Table 7 8 MPSMU Measurement Current Values and Resolutions Measurement Resolutions gt Range er Integration Time pa m wre or 640 ps 101 92 SO yis to 560 ps a onger ms 1nA 0 lt I lt 1 15 nA 10 fA 10 fA 100 fA 1 pA 10 nA 0 lt I lt 11 5 nA 10 fA 100 fA 1 pA 10pA 100 nA 0 lt I lt 115 nA 100 fA 1pA 10pA 100 pA 1 uA O lt I lt 1 15 pA 1 pA 10 pA 100 pA 1 nA 10 pA 0 lt I lt 11 5 pA 10 pA 100 pA 1nA 10nA 100 pA O lt I lt 115 pA 100 pA 1nA 10nA 100 nA 1 mA 0 lt I lt 1 15 mA 1nA 10nA 100 nA 1 uA 10 mA 0 lt I lt 11 5 mA 10nA 100 nA 1pA 10 pA 100 mA 0 lt I lt 100 mA 100 nA 1 uA 10 pA 100 uA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter
132. VAL and continues sampling measurement 2 times initial interval Discard To store new measurement data linear sampling mode discards a data every couple of nearest data as shown above Data is updated every measurement Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 13 Sampling Measurements Measurement Functions 3 Ifthe sampling completion condition is not satisfied after additional 5 points measurement linear sampling mode changes the sampling interval to two times the previous interval and continues sampling measurement Measurement data is updated as described in step 2 4 times initial interval NO Discard 4 This discarding and doubling of the sampling interval is repeated until the sampling completion condition is satisfied By the end of the measurement 10 measurement result data is stored in memory Parameters To set up the linear sampling measurement specify the following parameters on MEASURE SAMPLING SETUP screen See Table 3 1 Parameter Description MODE Sampling mode LINEAR INITIAL INTERVAL The sampling interval for first NO OF SAMPLES samples Allowable range 60 us to 65 535 s NO OF SAMPLES Number of data to be stored by end of measurement Maximum 10001 If there are multiple measurement units this value must be 10001 number of units or less TOTAL SAMP TIME Total sampling time Does not include HOLD TIME This is the time from the Ist trigger to the sampling completion
133. X FIX AUTO LIMITED Integration Time Short Short Medium Long Number of units SMUs or VMUs used for measurements i voltage source SMU is connected to R BOX only this SMU can be used for the measurement Maximum 8 units if the 41501 is used 6 SMUs and 2 VMUs If multiple measurement units are used total measurement time will be more than the sum of the measurement time by all units dr compliance value is more than the measurement range range change when starting measurement makes long measurement time Also if ranging mode is set to AUTO or LIMITED range changing makes long measurement time e Integration time is an element of the measurement time If automatic measurement data compensation is executed the measurement time will be more than two times the integration time 3 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 3 2 Sampling Measurements Measurement Functions Logarithmic Sampling Measurement Logarithmic sampling mode plots the measurement data on the X axis TIME set to the logarithmic scale by doing the following operation See Figure 3 2 1 Forces constant current constant voltage or pulsed constant bias 2 Waits hold time 3 Triggers one point measurement 4 Measurement unit executes measurement Measurement result data is stored in memory 5 Triggers one point measurement Interval of trigger is constant setting value of INITIAL INTERVAL 6 Measurement
134. Y X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 If you selected BY X Y COORDINATE secondary softkey a Inthe X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coordinate c Goto step 8 If you selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select AFTER secondary softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings d If you selected AFTER select secondary softkey to enter desired data variable in field 7 e If you selected AFTER enter desired expression in field 8 Specify the other point by step 5 then step 6 or 7 6 44 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Regression calculation is performed in the range defined by the two specified points as shown in the following figure specified two points mA A the range of regression calculation 200u div I y 0 000 vD v 1 00 div 10 00 U6T02018 Data condition mode specifies a point related to the measurement curve So if no measurement
135. ailable for voltage measurements or current measurements using the 10 nA range or greater However in FLEX command control mode you can disable this function by using the AZ command Long mode is effective when you need high resolution and noise reduction measurement but the measurement is slow To set long mode press the Long front panel key Initial setting 16 PLC Integration time Available values 2 PLC to 100 PLC with 1 PLC resolution For the current measurements the integration time is automatically set as shown in Table 7 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 33 MEDIUM SHORT Table 7 22 Table 7 23 Measurement Units and Functions Measurement Time Medium mode automatically sets the integration time You cannot change this value To set medium mode press the Medium front panel key Integration time 1 PLC For the current measurements the integration time is automatically set as shown in Table 7 23 Short mode is effective when you need high speed measurements but the measurement data has lower resolution To set short mode press the Short front panel key In this mode the ADC zero function is always disabled Initial setting 640 us Integration time Available values 80 us to 1 92 ms with 80 us resolution For the current measurements if the integration time you set is from 960 us to 1 92 ms integration time is automatically set as shown in Table 7 24 Integration Time in Long Mode
136. alues and Resolutions Measurement Resolutions P Range Integration Time High Speed alue 1PLC or 640 us to Sampling Longer 1 92 ms 80 us to 560 uS Measurement av 0 lt V lt 2 2V 2 uV 20 uV 200 uV 2 mV 20 V 0 lt V lt 22 V 20 uv 200 uV 2 mV 20 mV 40 V 0 lt V lt 44 V 40 uV 400 uV 4 mV 40 mV 100 V 0 lt V lt 100 V 100 uV 1 mV 10 mV 100 mV a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter Table 7 3 HRSMU Output Current Ranges and Resolutions Range Output Value Rae hat inde Range 10 pA o lt I lt 10 pA 10 fA 100 V 100 pA 0 lt I lt 100 pA 10 fA 100 V 1 nA 0 lt I lt 1nA 100 fA 100 V 10 nA 0 lt I lt 10 nA 1pA 100 V 100 nA 0 lt I lt 100 nA 10 pA 100 V 1 pA O lt I lt 1 pA 100 pA 100 V 10 uA 0 lt I lt 10 pA 1nA 100 V 100 pA 0 lt I lt 100 pA 10 nA 100 V 1 mA 0 lt I lt 1 mA 100 nA 100 V 10 mA 0 lt I lt 10 mA 1 yA 100 V 100 mA 0 lt I lt 20 mA 10 pA 100 V 20 mA lt I lt 50 mA 10 pA 40 V 50 mA lt I lt 100 mA 10 pA 20 V Agilent 4155C 4156C User s Guide Vo
137. and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen 1 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions To Set up Secondary Sweep Secondary sweep source is the measurement unit defined as VAR2 in the CHANNELS CHANNEL DEFINITION screen On the MEASURE SWEEP SETUP screen set up the primary sweep source VAR1 then do following 1 VAR2 START Enter the secondary sweep start value 2 VAR2 STEP Enter the secondary sweep step value 3 VAR2 NO OF STEP Enter the number of steps for the secondary sweep 4 VAR2 COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the secondary sweep source SWEEP MODE and LIN LOG are automatically set to SINGLE and LINEAR respectively You cannot change the settings The STOP value is automatically calculated from START STEP and NO OF STEP values You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 19 Sweep Measurements Defining Measurement Conditions To Set up Synchronous Sweep Synchronous sweep source is the measurement unit defined as VAR in the CHANNELS CHANNEL DEFINITION screen VAR is available for the measurement units set to the output mode same as the VAR1 output mode The output value of VARI
138. and the output level is TTL The following figure shows the trigger signal The leading edge and tailing edge of the trigger are synchronized with the leading edge and tailing edge of PGU1 trigger signal PGUI delay time pulse width PGU2 UGDO4024 100100 pulse start This function allows you to perform multiple pulse outputs using external pulse generators synchronized with the PGUs Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 47 Support Functions Trigger Function 8 48 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions This chapter explains the following functions built in the Agilent 4155C 4156C that are used for calculating or reading the measurement setup data and the measurement result data e Built in Function Read Out Function 9 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions Built in Function You can use built in functions for the following e In the expression that is used to define a user function on the CHANNELS USER FUNCTION DEFINITION screen e As the condition for an automatic analysis function on the DISPLAY ANALYSIS SETUP screen e For direct keyboard calculations The following functions are available ABS AT AVG COND DELTA DIFF EXP INTEG LGT LOG MAVG MAX MI
139. ange used for calculating the regression line is defined by the position of the two cursors as shown in the following figure cursors mA N 2 00 the range of regression calculation 200u idiv 0 00 f T T 1 Y T 1 0 000 VD V 1 00 div 10 00 Lustre Anz 6 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis If it seems that only one cursor is displayed the cursors are at the same location When regression lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradient of selected line are also displayed in the plotting area To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey Example The following figure shows an example to draw a regression line for the specified region GRAPH LIST GRAPHICS SHORT 93Aug09 06 18PM m CURSOR CURSOR 3 572000Y 289 23uA MARKER 3 572000Y 289 23uA MARKER mA 2
140. are the measurement data at each sweep step see Operation And a is a coefficient given by the following formula a 2k 1 4n where n is the number of power line cycles required for cinteg And k is the number of power line cycles until the current becomes stable at each sweep step and it is the value the 4155C 4156C internally monitors and counts Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 3 NOTE Quasi static C V Measurements Measurement Functions Operation In the QSCV measurement the 4155C 4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage At each sweep step the capacitance measurement is executed over the voltage range output voltage cvoltage 2 V where cvoltage is the capacitance measurement voltage See Figure 4 1 The operation of the quasi static CV measurements are explained below This is the case of start lt stop a Measurement trigger enables the sweep source output The sweep source forces start V b The sweep source changes the output voltage to the first step output voltage Vq V and waits for hold time where Vq cvoltage 2 V c Repeats d and e for the Nth sweep step where N is integer 1 to NO OF STEP NO OF STEP start stop step 1 d The sweep source changes the output voltage to the Nth step output voltage Vq V and waits for delay time e The measurement unit measures the following items
141. ariable on Graph 4 Select DISPLAY SETUP primary softkey Select RE SETUP GRAPH secondary softkey Move the pointer to desired data variable field by using the arrow keys then select secondary softkey to enter the desired variable name Select EXIT primary softkey to exit the RE SETUP GRAPH mode To exit without changing data variable Select CANCEL primary softkey Example The following figure shows an example setup to change the data variable to be displayed GRAPHILIST GRAPHICS SHORT 93Aug09 06 18PM m MARKER 3 572000V 289 23uA ERA 590 1uS mA f f 14 2 00 1 4 7 INDEX 200u div Lie 0 00 i t MORE 0 000 VD V 1 00 div 10 00 3 3 OM EXIT CANCEL UGTO2009 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 29 Analyzing Measurement Results Manual Analysis To Change Range of X or Y Axis Scale 1 2 3 4 Select DISPLAY SETUP primary softkey Select RE SETUP GRAPH secondary softkey Move pointer to maximum or minimum value field of X or Y axis scale by using the arrow keys then edit the setup value by using ENTRY keys or rotary knob Select EXIT primary softkey to exit RE SETUP GRAPH mode To exit without changing range of X or Y axis scale Select CANCEL primary softkey Example The following
142. as a residual resistance of 10 Qor less Therefore the specified voltage appears at the sense point point where sense line contacts force line 10 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5
143. asurement uses one sweep source VAR1 The following sweep types are available e LIN LOG e Linear staircase e Logarithmic staircase e SWEEP MODE e Single Source channel sweeps the output from user specified start value to stop value e Double Source channel sweeps the output from user specified start value to stop value then from stop value to start value You can select any combination of LIN LOG and SWEEP MODE as shown in the following table Single Sweep Double Sweep Linear Sweep Log Sweep UGDO3001 1 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 1 1 Sweep Measurements Measurement Functions Basic Sweep Measurement Output Voltage Th hold time or Current Td delay tme A N number of steps Stop Value F N i ThtTd Td C Single Sweep lt lt gt 3 0 Start Value F a Time 4 Trigger Completion Th hola tine Output Voltage Td delay time or Corrent N number of steps Td Stop N NH Value Td pa ps Double Sweep 2N Start t Value i gt Time Trigger Completion uco3002 To set up basic sweep measurement select VAR1 function for desired SMU or VSU on CHANNELS CHANNEL DEFINITION screen Parameters Also specify the following parameters for VAR1 on MEASURE SWEEP SETUP screen Parameter Description sweep mode Single
144. at TIME Tlog are stored in memory Tlog Ttarget Tlog Ttarget lt Ttarget Tprev where Tlog Data stored in TIME Actual measurement point Ttarget Target value of TIME The values can plot data on the logarithmic X axis in the same interval completely Tprev Tlog sampling interval Actual measurement point Discard yer a E Tlog gt Stored in TIME A ES C Tprev Sampling de Interval Ttarget lt Tlog QA A gt B Ttarget A A B7 A v Ys TIME Measurement A Ttarget Tprev B Tlog Ttarget Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 21 Sampling Measurements Measurement Functions Parameters To set up the logarithmic sampling measurement specify the following parameters on MEASURE SAMPLING SETUP screen See Table 3 3 Parameter MODE INITIAL INTERVAL NO OF SAMPLES HOLD TIME 3 22 Description Sampling mode LOG10 LOG25 or LOGSO MODE Number of data in 1 decade LOG10 10 LOG25 25 LOG50 50 The sampling interval during logarithmic sampling Allowable range 560 us to 65 535 s If this value is 560 us to 10 ms number of measurement data may be less than the specified number of data for top 2 decades Then sampling continues to get all samples Number of data to be stored by end of measurement One of the sampling completion conditions so sampling stops after this point elapses Maxi
145. ate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard e KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them e DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 WARNING r OF P e DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained e DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed Dangerous Voltage capable of causing death are present in this instrument Use extreme caution when handling
146. be more pulsed shaped sweep measurement When you perform sweep measurements the SMU filter conditions are automatically set as follows For a pulsed SMU Filter is off For non pulsed SMUs Filters are on Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 37 NOTE NOTE Measurement Units and Functions Self calibration Self calibration Agilent 4155C 4156C provides the self calibration function To execute the self calibration do following 1 Open the measurement terminals or disconnect the device under test from the measurement terminals to perform the calibration properly 2 Press System key in the PAGE CONTROL key group 3 Select CALIB DIAG primary softkey The SYSTEM SELF CALIBRATION DIAGNOSTICS screen is displayed 4 Select CALIB ALL secondary softkey to start the calibration After the calibration each test result is displayed in each STATUS field While calibration is executed the 4155C 4156C cannot start the measurement Auto Calibration The 4155C 4156C also provides the automatic calibration capability that triggers the self calibration automatically every 30 minutes after the measurements and executes the calibration To enable the function do following 1 Move the pointer to the AUTO CALIB field on the SYSTEM SELF CALIBRATION DIAGNOSTICS screen 2 Select the ON secondary softkey If you enable the function do not forget to open the measurement terminals or to disconnect the device u
147. ble for damage to tangible property per incident up to the greater of 300 000 or the actual amount paid for the product that is the subject of the claim and for damages for bodily injury or death to the extent that all such damages are determined by a court of competent jurisdiction to have been directly caused by a defective Agilent Technologies product To the extent allowed by local law the remedies in this warranty statement are customer s sole and exclusive remedies Expect as indicated above in no event will Agilent Technologies or its suppliers be liable for loss of date or for direct special incidental consequential including lost profit or date or other damage whether based in contract tort or otherwise For consumer transactions in Australia and New Zealand the warranty terms contained in this statement except to the extent lawfully permitted do not exclude restrict or modify and are in addition to the mandatory statutory rights applicable to the sale of this product to you e Assistance Product maintenance agreements and other customer assistance agreements are available for Agilent Technologies products For any assistance contact your nearest Agilent Technologies Sales Office e Certification Agilent Technologies Inc certifies that this product met its published specifications at the time of shipment from the factory Agilent Technologies further certifies that its calibration measurements are traceable to t
148. ble shows the output value of non standby channels in the standby state Function of Unit Output Value Range Voltage Output OV Output Range used in the Current Output Output value in the previous state previous state Output Range used in the Voltage Measurement previous state Current Measurement a outputs the latest value of previous state For example if previous state was measurement state and latest value of VARI was stop value the stop value is output for VARI during standby 8 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Standby Function Output Sequence of Standby Channels Output sequence of measurement units is defined on the MEASURE OUTPUT SEQUENCE screen Example output sequence setup is shown in the following table and Figure 8 4 shows timing diagram of this example Unit Output Sequence STBY SMU1 1 ON SMU3 2 OFF SMU4 3 OFF PGU1 4 ON PGU2 5 ON SMU2 6 ON Figure 8 4 Example of the Output Sequence of the Standby Channels Measurement Idle State Standby State State Standby State Idle State SMU1 L PGUI PGU2 4 SMU2 4 Pulse Start 2 Pulse Stop SMU3 po SMU4 an output order an order that channels return to OV U
149. cedure to test your DUT is as follows a Z Connecting your DUT to the 4155C 4156C See Chapter 10 for procedures y 887 C 388 g oo Eo ooo o oo ooo O oo 000000 O o2 00090 y OOOO og gogo o sy BS 88885 2 Defining measurement mode and CHANNELS CHANNEL DEFINITION pas dover oo measurement units that you use to make jams sven neue measurement ponanners _ pte See To Define Measurement Units on aume fve fee oomen eener one j page 1 16 Also see Chapter 8 for the user ae aia sao function standby function and R box z E control 3 Setting the source parameters of the units MEASURE SWEEP SETUP O1JAN29 10 58AM See following in this section araar woor ae sre e p To Set up Primary Sweep m aslie To Set up Secondary Sweep oe e To Set up Synchronous Sweep a e To Set up Constant Output pe To Set up SMU Pulsed Output pepe Spree ose o E E E e To Set up PGU Output e To Set up Stop Condition 1 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement C
150. changes the V or I output range and I or V compliance range during a V or I sweep Figure 7 11 shows an example of the difference in SMU output when power compliance is set and when power compliance is not set Allowable I Output when the MPSMU Sweeps Voltage 0 V to 100 V Current mA Current mA A A 100 100 50 50 20 20 PA PAE O 20 40 100 Voltage M O 20 40 100 voltage M la When power compliance is set b When power compliance is not set If you specify power compliance the measurement time increases slightly because of the range changing for every step When the ranges are changed during a sweep to accommodate power compliance the SMU output is momentarily set to 0 V 7 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 7 21 Measurement Units and Functions Measurement Ranging Mode Measurement Ranging Mode Before executing measurements you select a ranging mode from the following four modes You can set the ranging mode for each measurement unit e Auto Ranging e Limited Auto Ranging e Compliance Range e Fixed Range The following table lists the allowable measurement ranging modes for each measurement mode Allowable Measurement Ranging Modes Measurement Mode Ranging Mode Sweep Measurement Auto Limited Auto Fixed Sampling Measurement Auto Limited Auto Fixed Initial Interval gt 2 ms Sampling Measureme
151. cimal point are rounded down NO OF STEP start stop step 1 If the calculation result is 0 this value is automatically set to 1 Compliance value of source unit SMU The permissible range of compliance depends on the output range of the source unit Capacitance measurement voltage cvoltage The value must be lt step The minimum value is double the resolution of the output range and the maximum value is 10 V Time from the start of the first sweep step to the beginning of the delay time Time from the start of each sweep step to the start of the measurement Constant source output value The permissible range of source depends on the output range of the source unit Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE NOTE Quasi static C V Measurements Measurement Functions Specify the following parameters to define the measurement conditions on the MEASURE QSCV MEASURE SETUP screen See also Setup Screen Reference for setting these parameters Parameter Description unit Unit used to measure capacitance range Measurement range nA or 10 nA for the MPSMU HPSMU 10 pA 100 pA 1 nA or 10 nA for the HRSMU cname Variable name of the capacitance data iname Variable name of the leakage current data The leakage current data at each sweep step is calculated from the following formula Leakage current ILy IL 2 qscv time Integration time for the capacitance measurement leak time Inte
152. cted to prober GPIB connector 4155C 4156C GPIB connector n a 8 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Step 1 Step 2 Support Functions Switching Matrix Control To Control Functions To control the E5250A functions use the CHANNELS E5250A PROPERTIES screen Press the Chan front panel key then select the E5250A PROP primary softkey The E5250A PROPERTIES screen appears CHANNELS E5250A PROPERTIES O1JAN15 05 04PM E5250A SETUP GPIB ADDRESS 22 CONTROL CARD TYPE E5252A CONFIG MODE NORMAL MATRIX CONNECTION MODE PORT BIAS COUPLE PORT STATUS CONN CONN FCTN PORT 1 3 5 7 9 RULE SEQ CARD1 NO FOTN FREE BBM CARD2 NO FCTN FREE BBM CARD3 NO FCTN FREE BBM CARD4 NO FCTN FREE BBM E5250A INPUT CONNECTION INPUT 1 SMU1 INPUT 5 SMU5 INPUT 2 SMU2 INPUT 6 SMU6 INPUT 3 SMU3 INPUT 7 vsul INPUT 4 SMU4 INPUT 8 vsu2 4 1 INPUT VMU1 INPUT 0 VMU2 DUO 22 Enter GPIB address of E5250A 0 to 30 B CHANNEL USER USER E5250A DEF FCTN VAR S PROP To set GPIB address Enter the GPIB address of the E5250A into the GPIB ADDRESS field To set control mode In the CONTROL field select the ON softkey Then the 4155C 4156C sends a query for the present setup of the E5250A and displays it In the E5250A c
153. d to measure low resistance The sense line is extended to the probing pad and contacts the force line through the pad so the voltage drop due to the residual resistance caused by cables and test leads is canceled a ge Se oo Probing Needle CEA E US i Y Contact Pad necio Plate Xx be ME Pa Contact Pad This example uses test leads To reduce the leakage current use coaxial cables Agilent 4155C 4156C User s Guide Vol 2 Edition 5 10 7 Connecting Measurement Devices Using Connector Plate Kelvin Connection Kelvin connections give good measurement results when you force high current The following figure shows the equivalent circuits for Kelvin and non Kelvin connections For the non Kelvin connection the voltmeter measures the voltage drop of resistances rp Rput and rp gt For the Kelvin connection the voltmeter measures the voltage drop of resistance Rpur only The impedance of the voltmeter is very high so the voltage drop of resistances rg and rg can be ignored lp gt V7 V a non Kelvin connection b Kelvin connection The Kelvin connection is effective even when forcing voltage The voltage drop due to the residual resistance of the force line wiring is fed back to the voltage source via a comparator in the sense line The input impedance of comparator is high and current flow into the sense line is very low So output error is not significant if the sense line wiring h
154. d to port 7 e INPUT9 and INPUT1O can be coupled to port 9 Operation of couple port Coupled ports work as described below e When the coupled port is opened coupled input ports INPUTm 1 and INPUTm are disconnected from all output ports e When the coupled port is closed coupled input ports INPUTm 1 and INPUTm are connected as follows Input port INPUTm 1 is connected to output port n 1 Input port INPUTm is connected to output port n Where m and n are integers even numbers The maximum value is 10 for m and 48 for n Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 33 CAUTION NOTE Step 8 Step 9 Support Functions Switching Matrix Control To select connection rule In the CONN RULE field select the connection rule either SROU or FREE using the softkey SROU Sets the single route connection rule Each input port can be connected to only one output port on a matrix card FREE Sets the free connection rule Each input port can be connected to multiple output ports and each output port can be connected to multiple input ports Do not connect multiple inputs to an output If the free connection rule has been specified ensure multiple input ports are not connected to the same output port Such configurations can cause damage to the instrument connected to the input terminals Connection after connection rule changed Changing the connection rule does not change the connection setup of
155. data at the marker location Syntax MI This function can be used in both GRAPHICS and LIST display modes If the interpolation mode is enabled in GRAPHICS display and the marker is located between the measurement data this function returns a non integer value Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 23 Built in Functions MX MX Returns the value of the X coordinate at the marker location Syntax MX MY Returns the value of the Y coordinate at the marker location Syntax MY If there are Y1 and Y2 axes this function returns the value for selected axis MY1 Returns the value of the Y1 coordinate at the marker location Syntax MY1 MY2 Returns the value of the Y2 coordinate at the marker location Syntax MY2 9 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 10 Connecting Measurement Devices Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Connecting Measurement Devices This section describes how to connect device under test DUT to the 16442A B test fixture and how to connect cables to the connector plate For connecting the test fixture or the connector plate to the 4155C 4156C see User s Guide General Information If you use a wafer prober see wafer prober manuals Note that you must set the 4155C 4156C to the idle state when connecting or disconnecting DUTs If not the DUTs may be damaged To set to idle state press Stop key and make sure Standby i
156. data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 and 7 see Chapter 8 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 45 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a regression line The range for the regression calculation is specified by two points One point is specified by X Y coordinate mode and other point is specified by data condition mode 1 fa 3 DISPLAY ANALYSIS SETYB OBJUL22 11 324 7 y LINE1 REGRESSION line on Y1 between a point AT SO a 5 Y TO and a goint WAERE vee a a AFTER VCE S 4 4 ALINEZ S E g SS me MARKER At a point where l Interpolate OFF MAX VCE DISPLAY A PREV NEXT stup A PAGE PAGE UGTO20 6 46 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis To Display Marker at Specified Point 7 Press Display front panel key Select ANLYSIS SETUP primary softkey The DISPLAY
157. de voltage measurement for VMU 7 Inthe FCTN column select CONST secondary softkey for all source units 8 Inthe DISCHARGE field select ON secondary softkey to connect the discharge resistor to VMU input or OFF to disconnect the resistor The discharge resistor is used to prevent the VMU inputs from charge up in the idle state When DISCHARGE is ON the discharge resistor is automatically connected to the VMU input and disconnected from the input in the measurement state VNAME and INAME You can use VNAME and INAME in user function definitions or for analysis on the GRAPHICS LIST screens These names must be 6 or less alphanumeric characters First character must be alphabet character To disable a unit Move the pointer to the row of the unit then select the DELETE ROW secondary softkey The settings in the row are deleted 3 26 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions To Set up Sampling Parameters 1 Confirm that SAMPLING is set in the MEASUREMENT MODE field on the CHANNELS CHANNEL DEFINITION screen If SAMPLING is not set select SAMPLING secondary softkey in the MEASUREMENT MODE field Press Meas key in the PAGE CONTROL key group Select SAMPLING SETUP primary softkey In the MODE field of SAMPLING PARAMETER select LINEAR secondary softkey for equally spaced sampling intervals e LOG XX secondary softkey for logarithmically spaced sampling in
158. dition 5 Built in Functions lY1 IyY1 Returns the value of Y1 coordinate at the cross point of LINE1 and LINE2 Syntax IY1 This function calculates the cross point by using the following formula Y y1 04 X y2 y1 04 Ay Where yy Value of Y1 coordinate at the cross point If the Y1 axis is logarithmic scale this function returns 10 Yn Y 1 intercept of LINEn If the Y1 axis is logarithmic scale y is the log value of the Y1 intercept of LINEn Op Slope of LINEn If LINE1 is parallel to LINE2 this function returns invalid data with the status Arithmetic error IY2 Returns the value of Y2 coordinate at the cross point of LINE1 and LINE2 Syntax IY2 This function calculates the cross point by using the following formula Y y1 04 X Y2 y1 01 09 Where y2 Value of Y2 coordinate at the cross point If the Y2 axis is logarithmic scale this function returns 10 Yn Y2 intercept of LINEn If the Y2 axis is logarithmic scale y is the log value of the Y2 intercept of LINEn Ob Slope of LINEn If LINE1 is parallel to LINE2 this function returns invalid data with the status Arithmetic error Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 15 Built in Functions L1CO L1CO Returns the correlation coefficient of the regression for LINE1 Syntax L1CO LINE1 must be in regression mode If not this function returns invalid data L1G Returns the slope of LINE1 Sy
159. e 100 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF 4 50 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 23 Calculation Example of Measurement Accuracy HPSMU 80 70 60 S 50 E 40 lt El E 30 E 20 10 0 E 0 001 0 01 0 1 10 QSCV Measurement Voltage V 1 E 09 1 E 10 Offset Accuracy F 1 E 11 1 E 12 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 1 nA Output Range 200 V Integration Time 2 1 0 5 0 2 0 1 0 05 0 03 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 1 G ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 51 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 24 Calculation Example of Measurement Accuracy MPSMU HPSMU 10 9 N e N mi lt Z 4 2 2 1 0 0 001 0 01 0 1 1 QSCV Measurement Voltage V Offset Accuracy F
160. e 4155C 4156C starts measurements For staircase sweep measurements you can specify the step delay time shown in Figure 8 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 43 Support Functions Trigger Function Trigger Output The 4155C 4156C triggers external instruments via the trigger output terminal For the trigger polarity you can select positive or negative The trigger output function is not available for sampling measurements Gate Trigger Output The 4155C 4156C can output gate triggers when forcing stress When stress forcing starts the trigger signal changes to the active level When stress forcing finishes the trigger signal changes to the non active level To use the gate trigger function set the TRIGGER SETUP fields on the STRESS CHANNEL DEFINITION screen Stress Force State oe z U LL ac stress m onL de stress gate trigger output Trigger Signal Edge Trigger Output For sweep measurements the 4155C 4156C can output edge triggers which are synchronized with each sweep step To set the trigger output timing use the following field on the MEASURE OUTPUT SEQUENCE screen Name of entry field depends on the measurement mode Measurement Mode Entry Field Pulse sweep measurement TRIG OUT DELAY Sweep measurement STEP DELAY 8 44 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Funct
161. e and other point is specified by data condition mode 1 2 3 93JUL22 11 y XL INE1 NORMAL line on Y1 between a point AT x o 4 5 l Y 0 gE DISPLAY ANALYSIS SETU and a point vcE 4 10 l AFTER VCE ool Z r 6 7 INE2 ys Z 8 AMARKER At a point where Interpolate OFF MAX VCE DISPLAY PREV NEXT SETUP PAGE PAGE UETO2015 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 39 Analyzing Measurement Results Automatic Analysis To Draw Line by Specifying Gradient and One Point 1 Press Display front panel key 2 Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen 3 Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed 4 In field 1 select GRAD secondary softkey 5 In field 2 select secondary softkey to specify desired axis 6 In field 3 select BY X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 7 If you selected BY X Y COORDINATE secondary softkey a Inthe X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coord
162. e cursors to desired locations by using arrow keys of the MARKER CURSOR key group To select the cursor you want to move use the SELECT CURSOR secondary softkey If it seems that only one cursor is displayed the cursors are at the same location When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen their X and Y intercepts and gradients are also displayed in the plotting area 6 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey Example The following figure shows an example to draw a line through two specified points GRAPHILIST GRAPHICS SHORT 83Aug09 06 1 4 Allo 93Aug09 06 18PM CURSOR CURSOR 3 572000V 289 25uUA anden 7 mA 2 00 Intrppt F 1 421 1 Grad 541 61u 200u ee ogy TANGENT MODE Al REGRESS L MODE 4 OFF l_ qn Inftropt 2 p8976 0 00 SELECT 0 000 vo Ov 4 00 div 10 00 AA MARKER fe D
163. e slope of LINE1 for Y2 axis Syntax L1G2 This function calculates the slope by using the following formula e If X and Y2 axes are both linear scaling a y1 JMX Xp e If X axis is logarithmic scaling and Y2 axis is linear scaling a Y1 yo log x log xo e If X axis is linear scaling and Y2 axis is logarithmic scaling a log y log yo x1 xp If X and Y2 axes are both logarithmic scaling a log y log yo log x log xp Where OL Slope of LINE1 XQ Yo X1 y X and Y2 coordinate values at the two points where LINE1 intercepts the perimeter of the plotting area 9 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions L1X OL X Returns the X intercept value Y 0 of LINE1 Syntax L1X If LINE 1 is horizontal this function returns invalid data OL1Y Returns the Y intercept value X 0 of LINE1 Syntax L1Y If there are Y1 and Y2 axes this function returns the value for selected axis If LINE 1 is vertical this function returns invalid data LI1Y1 Returns the Y1 intercept value X 0 of LINE1 Syntax L1Y1 If LINE 1 is vertical this function returns invalid data L1Y2 Returns the Y2 intercept value X 0 of LINE1 Syntax L1Y2 If LINE 1 is vertical this function returns invalid data L2CO Returns the correlation coefficient of the regression for LINE2 Syntax L2CO LINE2 must be in regression mode If not this function returns invalid data
164. eaching the maximum number For the sampling completion condition see Sampling Completion on page 3 9 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Sampling Measurement Data Measurement parameters of sampling measurement are set to the NAME column of the DISPLAY DISPLAY SETUP screen Available parameters and example parameters for the NAME field are listed in the table below Parameter Meanings of Parameter Name TIME Measurement start time This is the time the measurement unit starts one point measurement This is different from timing of the measurement trigger sent every sampling interval INDEX Data index Integer This is the index numbered to measurement data stored in memory Vi for example SMU1 voltage output value or measured value Il for example SMU1 current output value or measured value Measurement start time can be expressed by the following fomula This formula is available for the measurement points before starting the discarding operation for the linear sampling or thinned out sampling For logarithmic sampling this is available for the measurement points in the first decade TIME Thold Tinterval x INDEX 1 N where TIME Thold Tinterval INDEX N Measurement start time Hold time Sampling interval Data index Number of triggers between two nearest measurement points This value is 0 if
165. ect the ON secondary softkey to do the leakage current compensation or OFF to not perform the compensation ZERO CANCEL Select the ON secondary softkey to enable the capacitance offset cancel function or OFF to disable the function After the setup is completed press the green key then the Stop front panel key to perform the offset measurement 4 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Defining Measurement Conditions To Display Graphics Results 1 Press the Display key in the PAGE CONTROL key group Select the DISPLAY SETUP primary softkey In the DISPLAY MODE field select the GRAPHICS secondary softkey ee In the X axis column enter the variable name select the axis scale and enter minimum and maximum values 5 Inthe Y1 axis column enter the variable name select the axis scale and enter minimum and maximum values 6 If you use the Y2 axis enter the variable name select the axis scale and enter minimum and maximum values in the Y2 axis column When the pointer is in the NAME row the permissible variable names appear in the secondary softkey area Select one to be assigned to the graph axis The permissible names are the names that you already set up on the CHANNEL DEFINITION USER FUNCTION USER VARIABLE and QSCV MEASURE SETUP screens To display a grid on the plotting area In the GRID field select ON to display or OFF to not display To display line parameters
166. ed To Use Matrix Setup File The 4155C 4156C can save get copy purge rename the matrix setup file extension MAT To access the matrix setup file set the 4155C 4156C to the SYSTEM CONTROLLER and set the E5250A control mode to ON then use the filer function or press the Save Get front panel keys On the file operation screen select the MAT secondary softkey in the TYPE field to specify the matrix setup file The TYPE must be MAT 8 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Trigger Function Support Functions Trigger Function Trigger function is used to perform measurements synchronized with the measurements or source outputs by external instruments Connection The following figure shows the connection between an 4155C 4156C and an external instrument 4155 4156 o Coaxial Cable For Trigger Output IN OUT a 4155 4156 IN OG o Coaxial Cable For Trigaer Input Fu External Instrument TRIGGER INPUT OUTPUT ction External Instrument TRIGGER INPUT OUTPUT Function Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 41 Support Functions Trigger Function Setup and restrictions You cannot perform trigger outputs together with trigger inputs You must select either trigger output or trigger input To use a trigger function you must enable the trigger function and select either T
167. ed in the INAME column For a current MODE measurement result name is specified in VNAME column Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 3 Support Functions User Function and User Variable You can get the measurement results by using the measurement result names If the corresponding SMU or VMU does not perform a measurement invalid data is returned Output data of PGU The data variables for PGU output are as follows Set data Data variable name pulse peak VNAME for PGU that you defined on CHANNELS CHANNEL DEFINITION screen is the data variable name for pulse peak voltage pulse period PGT is the data variable for pulse period pulse duration PGD is the data variable for duration time of pulse stress force Duration time is the pulse count multiplied by pulse period pulse delay PGIDL is the data variable for pulse delay time of PGU1 time PG2DL is the data variable for pulse delay time of PGU2 pulse width PGI1W is the data variable for pulse width of PGU1 PG2W is the data variable for pulse width of PGU2 pulse base PGIB is the data variable for pulse base voltage or current of PGU1 PG2B is the data variable for pulse base voltage or current of PGU2 pulse leading PGILD is the data variable for leading edge transition time of PGU1 PG2LD is the data variable for leading edge transition time of PGU2 pulse trailing PGITR is the data variable for trailing edge transition t
168. edure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey 6 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Example Analyzing Measurement Results Manual Analysis The following figure shows an example to draw a line through specified point with specified gradient RADH H SHORT if GRAPHILIST GRAPHICS 93A1gOS O6ABPM eae CURSOR 3 872000V 289 23uA TO MARKER mA 2 00 7 Intrppt A 1 421 Grad 521 61u 2004 Idiy TANGENT MODE OFF REGRESS fi MODE OFF J intrest 2 8976 0 00 y 0 000 vo ov 1 00 div 0 00 MARKER SCALING DISPLAY SWEEP TIMING CONST CURSOR SETUP SETUP SETUP SETUP UGTO2005 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 23 Analyzing Measurement Results Manual Analysis To Draw Tangent to Specified Point of Measurement Curve 1 Press LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting the LINE secondary softkey toggles as follows OFF gt ON gt OFF 4 Select TANGENT MODE secondary softkey if it is not hi
169. ee Setup Screen Reference manual 1 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Available Units Output Range Sweep Measurements Measurement Functions Measurement Functions For sweep measurements the sweep source channels perform staircase sweep output of voltage or current while the monitor channels measure voltage or current for each sweep step The 4155C 4156C provides three types of sweep measurement e Basic Sweep Measurement One sweep source VAR1 is used e Subordinate Sweep Measurement A primary VAR1 and secondary sweep source VAR2 are used e Synchronous Sweep Measurement A primary VAR1 and synchronous sweep source VAR1 are used Also you can set up a combined subordinate and synchronous sweep measurement Basic Sweep Subordinate m m m Sweep 7 Synchronous Sweep UGD030E 5090 SMUs and VSUs can be sweep sources VARI VAR2 and VAR1 A sweep or constant source SMU can be set to the pulsed source to prevent thermal drift of the DUT Sweep source units use the following output range e minimum range covers all sweep output values in Linear sweep e minimum range covers all sweep output values in Log voltage sweep e optimum range for output value every sweep step in Log current sweep Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 3 Sweep Measurements Measurement Functions Basic Sweep Measurement Basic sweep me
170. efine Measurement Conditions 4 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Defining Measurement Conditions 4 DISPLAY DISPLAY serur le Ole oE o ls So f L o a 2000 ooo E LED y 0 o you aio Setting the display mode to show measurement results See following in this section e To Display Graphics Results e To Display List Results See Chapter 6 for the auto analysis function Executing the measurement See To Execute or Stop Measurement on pages 4 17 Also see Chapter 7 for executing self calibration and zero offset cancel 6 GRAPH LIST GRAPHICS MARKER i 2 900 v 108 508pF MARKER on 110 caror MARKER MIN MmAXx INTER POLATE orr DIRECT MARKER CURSOR MARKER SKIP 36 0 3 00 VI wy 500m div a AUTO ANALY sts CURSOR orz MARKER 7 CURSOR LINE scarrwo prsrrar osev serve serur TIMING serur Const setur Results For example displayed graphically Agilent 4155C 4156C User s Guide Vol 2 Edition
171. ement 0 0 e eee eee eee 1 29 Making a Measurement 0 0 eee eee ee eens 1 30 Step 1 Prepare for the measurement 00 0 00 00 00000 e ee 1 31 Step 2 Mount your DUT on the test fixture o ooooooooooooooo o 1 33 Step 3 Define the channel assignments 00000000005 1 35 Step 4 Define the user functions 0 0 0 0 e eee eee 1 37 Step 5 Set up the measurement parameters 0005 1 39 Step 6 Set up the results display 0 00 02 e eee eee eee 1 41 Step 7 Execute the measurement 00 0 0 eee eee eee eee 1 43 2 Knob Sweep Measurements Measurement Functions 0 0 cece cece eee eee nee LN 2 3 Available units and functions 0 cee eee eee eee eee 2 3 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 1 Contents Normal Sweep and Knob Sweep Measurements 04 2 4 Features of Knob Sweep Function 0 0 00 e eee eee 2 5 KNOB SWEEP screen podes kesoi srono irr cee eee 2 8 Analysis of the Knob Sweep Measurement Results o o o 2 9 Executing Measurements 0 20 20 00 0 0 e ee cece eee 2 10 To Define Measurement Units 00 0 0 eee eee eee 2 11 To Execute Measurements 0 0 0 cece eee ee eee 2 12 To Stop Measurement 0 00 eee eee eee 2 13 To Change Measurement Conditions 0 0 00 ooo 2 14
172. en Y1 and Y2 4 Rotate the rotary knob to move the marker to desired measurement point If both Y1 and Y2 axis are set up a circle marker 0 is displayed on measurement curve of Y1 axis and an asterisk marker is displayed on measurement curve of Y2 axis The MARKER coordinate fields indicate the location of markers The first second and third fields are X Y1 and Y2 coordinates respectively X and Y1 indicate location of marker on Y1 curve X and Y2 indicate location of marker on Y2 curve To turn off markers Set MARKER secondary softkey to OFF To move marker to maximum or minimum value of measurement curve Select MARKER MIN MAX secondary softkey The marker searches for minimum or maximum value in measurement order from the present location every time you select the MARKER MIN MAX secondary softkey To move marker to next VAR2 step or append curve Select MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP secondary softkey To move marker fast Press Fast front panel key of the MARKER CURSOR key group while rotating rotary knob 6 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to desired measurement point and to set the Y1 axis marker to active
173. ep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 Us or shorter Table 7 11 HPSMU Output Current Ranges and Resolutions Range Output Value e Pam Range 1nA 0 lt I lt 1 nA 100 fA 200 V 10nA 0 lt I lt 10 nA 1 pA 200 V 100 nA 0 lt I lt 100 nA 10 pA 200 V 1 pA O lt I lt 1 pA 100 pA 200 V 10 uA 0 lt I lt 10 yA 1nA 200 V 100 uA 0 lt I lt 100 pA 10 nA 200 V 1 mA 0 lt I lt 1 mA 100 nA 200 V 10 mA 0 lt I lt 10 mA 1pA 200 V 100 mA 0 lt I lt 20 mA 10 pA 200 V 50 mA lt I lt 100 mA 10 pA 100 V 1A 0 I lt 50 mA 100 uA 200 V 50 mA lt I lt 125 mA 100 JA 100 V 125 mA lt I lt 500 mA 100 uA 40 V 500 mA lt I lt 1 A 100 pA 20 V Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 13 Measurement Units and Functions Measurement Units Table 7 12 HPSMU Measurement Current Values and Resolutions Measurement Resolutions gt Range Measurement Value Integration Time High Speed gas or 640usto 95 to 560 us E onger 1 92 ms 1nA O lt I lt 1 15 nA 10 fA 10 fA 100 fA 1pA 10 nA 0 lt I lt 11 5 nA 10 fA 100 fA 1 pA 10 pA 100 nA 0 lt I lt 115 nA 100 fA 1 pA 10 pA 100 pA 1 uA 0 lt I lt 1 15 uA 1 pA 10 pA 100 pA InA 10 pA O lt I lt 11 5 pA 10 pA 100 pA LnA 10 nA 100 A 0 l
174. er Function and User Variable Arithmetic operator precedence When an expression contains more than one operation the order of operation is determined by operator precedence Operations with the highest precedence are performed first Multiple operations with the same precedence are performed left to right The following table shows the arithmetic operator precedence Precedence Operator Highest Parentheses may be used to force any order of operations Functions built in function and data variable Exponentiation Multiplication and division Lowest Addition subtraction monadic operators 8 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Standby Function Standby Function The 4155C 4156C can force standby outputs before starting or after stopping a measurement or stress You can select de or pulse bias for the standby output Standby Channels Standby channels are the measurement units which force the standby output SMUs VSUs and PGUs can be used for the standby channel VMUs and GNDU are not available To define a measurement unit as a standby channel move the field pointer to the STBY field on the CHANNELS CHANNEL DEFINITION screen and select the STANDBY ON softkey You cannot use the standby channel as the stress channel The standby channels keep the standby output when the 4155C 4156C is in the stress force state Standby State Before starting or af
175. ers on the plotting area In the LINE PARAMETER field select ON to display or OFF to not display Line parameters are the X and Y intercepts and gradient of the analysis lines To display variables on the data variable area In the DATA VARIABLES fields select secondary softkey for desired variable Up to 2 variables can be displayed on the data variable area which is located between the graph area and the marker area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for 10 pA measurement range Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 27 Sweep Measurements Defining Measurement Conditions To Display List Results 1 Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select LIST secondary softkey gt ey In the LIST area select the secondary softkey of the variables for which you want to list the measurement results When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on CHANNEL DEFINITION USER FUNCTION and USER VARIABLE screens To display variables on t
176. ey is pressed to stop the measurement e after each measurement execution before the next measurement execution e when you select the AUTO ANALYSIS secondary softkey after selecting the MARKER CURSOR primary softkey on the GRAPH LIST GRAPH or GRAPHILIST LIST screen e when you return to the GRAPH LIST GRAPH or GRAPH LIST LIST screen after changing the condition of the automatic analysis function on the DISPLAY ANALYSIS SETUP screen If you define both the automatic marker positioning and automatic line drawing functions the functions are executed in the following order 1 Automatic line drawing for LINE1 2 Automatic line drawing for LINE2 3 Automatic marker positioning Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 37 Analyzing Measurement Results Automatic Analysis To Draw Line by Specifying Two Points 1 2 Press Display front panel key Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select NORMAL secondary softkey In field 2 select secondary softkey to specify desired axis In field 3 select BY X Y COORDINATE secondary softkey to specify a point by X Y coordinate mode Go to step 6 e BY DATA CONDITION secondary softkey to specify a point by data condition mode Go to step 7 If you selected BY X Y COORDINATE secondary softkey a In
177. f Arithmetic error negative value logarithm of absolute value is returned with status of Arithmetic error To return the logarithm of ID LGT ID LOG Returns the logarithm base e of expression LOG expression If the expression is 0 Overf low is returned with status of Arithmetic error negative value logarithm of absolute value is returned with status of Arithmetic error To return the logarithm of ID LOG ID Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 9 Syntax Example Built in Functions MAVG MAVG Returns the moving average value of J st expression The 2nd expression specifies how many measurement points to use for average MAVG 1st expression 2nd expression This operation is defined as follows The moving average at measurement index number n is defined as follows when n lt r 1 n r Xn Xi r n 1 when r lt n lt N r T 1 ner Xn gt Xj 2r 1 when N r lt n Xa r Non l n l Where Xp moving average of the st expression for measurement index number n Xj value of the st expression for measurement index number i r value of the 2nd expression N number of sweep steps or number of samples If there are some invalid values in the st expression the invalid values are ignored for the calculation For each primary sweep use same definition as for basic sweep measurement and assume measurement index number for the first step of each pri
178. f expression that you can enter in step 6 and 9 see Chapter 8 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear 6 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a tangent line to a specified measurement point 3 1 14 2 DISPLAY a ae SETUP LING sete A line on Y1 l 93JUL22 11 32AM at a point where DGM MAX DGM x0 01 AFTER DGM 5 6 7 LINEZ l XMAPKER At a point where l Interpolate OFF MAX DGM DISPLAY y PREV NEXT SETUP PAGE PAGE UGTO2017 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 43 Analyzing Measurement Results Automatic Analysis To Draw Regression Line by Specifying Two Points 1 2 Press Display front panel key Confirm that ON is set on the LINE secondary softkey on the GRAPH LIST GRAPHICS screen Select ANLYSIS SETUP primary softkey The DISPLAY ANALYSIS SETUP screen is displayed In field 1 select REGRESSION secondary softkey In field 2 select secondary softkey to specify desired axis In field 3 select B
179. for desired secondary sweep source SMU or VSU Subordinate sweep measurement has the following restriction e For the secondary sweep source only single sweep mode and linear staircase mode are available Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 7 NOTE Sweep Measurements Measurement Functions Parameters The parameters for primary sweep source VAR1 are same as the parameters for sweep source of basic sweep measurement For secondary sweep source VAR2 specify the following parameters on MEASURE SWEEP SETUP screen Parameter Start step number of steps Stop value Description Start value of secondary sweep Allowable range of start depends on the output range of secondary sweep source For the output range of each measurement channel refer to Chapter 7 Step increment of secondary sweep Number of secondary sweep steps Allowable range 1 to 128 Stop value of secondary sweep is calculated from start step and number of steps Allowable range of stop depends on the output range of secondary sweep source For the output range of each measurement channel refer to Chapter 7 compliance power compliance 1 8 Compliance value of secondary sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of secondary sweep source For the compliance range of each measurement channel refer to Chapter 7 Optional Power compliance value of seco
180. fs wenn ee o DISCHARGE B Tr vMu2 wn on VCE IC PGU1 PGU2 MEM2 M GNDU jj Se s2 Ses EED VDS ID MORE SWEEP 1 2 Select Measurement Mode with softkey or rotary knob B CHANNEL USER USER E5250A NEXT DEF FCTN VAR s PROP PAGE 1 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Step 4 Define the user functions You define the user functions on the CHANNELS USER FUNCTION DEFINITION screen Sweep Measurements Making a Measurement 1 Select USER FCTN primary softkey The CHANNELS USER FUNCTION DEFINITION screen appears 2 Enter the user function information as shown in the following table For the actual screen see Figure 1 7 To move the pointer on Front Panel use arrow keys of MARKER CURSOR area on Keyboard use arrow keys To move the cursor to edit in display area use arrow keys of Edit area use Backspace key To enter SOID in NAME field press 2 keys then Enter type SQID then press Enter To enter SORT ID in DEFINITION field press 2 3 p blue key keys and ID secondary softkey then and Enter type SORT ID then press Enter To enter DSQID in press 2 keys then type DSQID NAME field Enter then press Enter To enter press 7 7 blue key type DIFF SOID VG blue key 2 blue key DIFF SQID VG i
181. fthe 4155C 4156C has turned off turn on the 4155C 4156C And wait until the self test is completed 2 Make sure that CHANNELS CHANNEL DEFINITION screen appears on the screen of the 4155C 4156C If not press Chan front panel key 3 Move the field pointer to the MEASUREMENT MODE field then select the SAMPLING softkey to set the 4155C 4156C to the sampling measurement mode 4 Move the field pointer to the CHANNELS table and set SMU1 and SMU2 as shown below UNIT VNAME INAME MODE FCTN SMU1 VB IB COMMON CONST SMU2 VG IG I CONST Only the SMU1 and SMU2 are used for this example measurement Disable other units by selecting the DELETE ROW softkey CHANNELS CHANNEL DEFINITION MEASUREMENT MODE SAMPLING CHANNELS OODECO7 02 18PM MEASURE INAME UNIT VNAME MODE FCTN STBY SERIES RESISTANCE SMU1 MP VB IB COMMON CONST CONST SMU2 MP VG IG I SMU3 MP SMU4 MP SMU5 HP vsul vsu2 VMU1 VMU2 PGU1L PGU2 GNDU 0 ohm 0 ohm DISCHARGE ON CHANNEL ASSIGN VB Enter Voltage Name max 6 chars DELETE ROW CHANNEL DEF USER FCTN USER VAR NEXT PAGE Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 37 Sampling Measurements Making a Measurement Step 4 Set up t
182. g the stress force e Output sequence from idle state to the stress state e Output sequence in the stress state e Output sequence from stress state to the idle state Output sequence idle state to the stress force state When the state changes from the idle state to the stress force state the channels output the following values ac stress SYNC channel specified base value dc stress SYNC channel OVor0A non stress NSYNC channel specified source value or pulse output The output sequence of the channels depends on the order specified on the MEASURE OUTPUT SEQUENCE screen For details about output sequence refer to Chapter 7 Stress force sequence in the stress force state e stress output Stress force channels output stress at the same time when the stress start trigger is received Stress start trigger is sent hold time after the last channel changes from idle state to stress force state e stress stop Stress force channels stop stress at the same time When you set up both ac and dc stress on the STRESS CHANNEL DEFINITION screen ac stress channels stop several microseconds before the dc stress channels If you set delay time for pulse stress finish of stress force time is after the period of the last pulse See Figure 5 1 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 7 NOTE Stress Force Stress Function Pulse Waveform when Stress Stops When you set the duration mode or press the Stop front
183. ge then the unit performs the measurement 10pA The unit changes to the next higher range when the measurement value exceeds 104 of the present range 7 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Ranging Mode Limited Auto Ranging Limited auto ranging is similar to the auto ranging But the limited auto ranging does not use the range s less than the range you specified For example if you select the 10 nA limited auto ranging measurement unit does not use the 1 nA range or less So the measurement time for limited auto ranging is less than for auto ranging Monitor unit automatically searches for and measures at measurement range that provides highest resolution but is not below the specified range as follows V measurement The unit changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 110 of the range then the unit performs the measurement If the specified range is greater than the lowest range that contains V compliance the measurement is performed at the lowest range that contains V compliance I measurement If specified range is greater than the lowest range that includes I compliance an error occurs 1AtolpA The unit changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 114 of the range then the un
184. ge VMU 0 2 V less than 1 of range Measurement a If VMU2 grounded mode measurement value is greater than or equal to 20 V error occurs 7 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE Measurement Units and Functions Zero Offset Cancel To Perform Offset Cancel Offset cancel is automatically performed during measurement The measurement execution and the offset cancel are explained below 1 Select the measurement range in the MEASUREMENT RANGE table on the MEASURE MEASURE SETUP screen See Table 7 25 for the ranging mode available 10 nA limited auto and 10 nA fixed are also available When you set 10 nA range offset cancel function uses the 1 nA range offset data for the data measured in both 1 nA range and 10 nA range For the 100 nA range or more offset cancel function is not available 2 Set the ZERO CANCEL field to ON Offset cancel is not performed for the measurement paths set to OFF in the ZERO CANCEL table 3 Press Single Repeat or Append front panel key to execute measurement The offset cancel is automatically performed while measurement is performed The measurement data is automatically compensated by using the offset data And the compensated data is displayed on the GRAPH LIST screen To disable the offset cancel function select the ZERO CANCEL ON OFF softkey on the ZERO CANCEL field It toggles ON and OFF If you select OFF all paths in the ZERO CANCEL table
185. ge and the stop voltage shown in Table 7 27 And the measured offset data is displayed in the field right next to the ZERO CANCEL field The initial offset data is 0 Invalid Offset Data If one of the following conditions is detected during the offset measurement an error message is displayed and the offset data measurement is aborted e Integration time is too short for the offset measurement e Leakage current is more than 70 of the measurement range When this happens change the measurement conditions and execute the offset measurement again 7 42 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions QSCV Zero Offset Cancel Table 7 27 Measurement Condition for the Offset Measurement Parameter for the offset measurement Internal setup not the setup on the screen Start voltage OV Stop voltage Minimum value of the following values e setup value of the QSCV MEAS VOLTAGE field x 2 e setup value of the START field e setup value of the STOP field or 5 V if the all listed above is greater than 5 V or 10 mV if the all listed above is less than 10 mV Hold time setup value of the HOLD TIME field Delay time 0 second Integration time for capacitance measurement 0 5 sec setup value of the STOP field sec for the 10 pA or 100 pA range 80 msec for the 1 nA or 10 nA range Integration time for leakage current measurement b
186. gh Current Measurements When you force or measure a large current you may want to use a Kelvin 4 wire connection to eliminate the residual resistance effects of test leads and contacts For example you can use the following connections as Kelvin connections on the test fixture The Kelvin connection is available for the 4156C s HRSMU and 41501A B s HPSMU Examples Kelvin Connection 1 gt ZN Force Q Sense Qh NS A SMU 200V 1A Max 2 3 Selected IN EN YES EN Force Oy Sense Q Force Q Sense Q A o Sy SN uae Substrate Q Source i eS SY ow 4 Ur n To cancel the effects of the residual resistance test leads must be connected as close as possible to the DUT 10 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 WARNING CAUTION Connecting Measurement Devices Using Connector Plate Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate e To Reduce Leakage Current To Measure Low Resistance To Reduce Leakage Current To reduce the leakage current caused by connection cables the guard technique is effective Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below 1 Atend of cable connect coaxial center conductor to force terminal of connector plate and connect coaxia
187. ghlighted Softkey becomes highlighted The cursors disappear and marker appears Selecting TANGENT MODE toggles between highlighted and not highlighted 5 Move marker to the desired measurement point by rotating rotary knob When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY DISPLAY SETUP screen the X and Y intercepts and gradients of selected line are also displayed in the plotting area To move marker to next VAR2 or next append curve Select MARKER SKIP secondary softkey Marker moves to next VAR2 step curve or next append curve every time you press MARKER SKIP To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey then set LINE PRMTRS secondary softkey to OFF To turn off the data variable display area Use the following procedure 1 Select DISPLAY SETUP primary softkey 2 Set DATA VAR secondary softkey to OFF To move marker between two adjacent measurement points See To Specify between Measurement Points on Curve on page 6 16 6 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a tangent to a specified measurement point GRAPH LIST GRAPHICS SHORT ugO9 06 i 3 93Aug09 06 18PM C
188. gration time for the leakage current measurement leak compensation Leakage current compensation ON or OFF zero cancel Capacitance offset cancel ON or OFF Integration Time The QSCV measurement uses the integration time that is set by the INTEGRATION TIME table on the MEASURE QSCV MEASURE SETUP screen The Short Medium and Long front panel keys have no effect for the QSCV measurement Leakage Current Compensation For the measurement using the leakage current compensation capability an error given by the following formula can be included in the measurement data Cerror IL ILo 4 x Freq x V Vo F where Freq is 50 or 60 depending on the line frequency of your site JL IL V and Vo are the measurement data see Operation For example if IL IL 10 pA and V Vo 0 1 V in 50 Hz area maximum 0 5 pF of the compensation error may be caused For the accurate measurement estimate the characteristics of the leakage current of your device And select the optimum values of the range QSCV meas voltage and the voltage sweep range The delay time and qscv time settings are also important Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 7 Quasi static C V Measurements Defining Measurement Conditions Defining Measurement Conditions This section describes the QSCV measurement tasks The overall procedure for testing your DUT is as follows 1 Connecting your DUT to the 4155C 4156C A See Chapter
189. haracters Example To define a user variable for mutual conductance gm of an FET define gm on the CHANNELS USER VARIABLE DEFINITION screen as follows NAME UNIT SIZE 8 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions User Function and User Variable Calculation between variables of different length If you perform calculation between user variables or between a user variable and a measurement data variable and the number of data are different the extra data in the longer variable are invalid Example Following IBASIC program defines a user variable that has 5 data elements 10 20 30 40 50 20 30 40 ASSIGN Hp4155 TO 800 OUTPUT Hp4155 FORM DATA ASC OUTPUT Hp4155 TRAC DEF UVAR1 5 OUTPUT Hp4155 TRAC DATA UVAR1 1 1 1 2 1 3 1 4 1 5 END Format of data to be transferred is ASCII format Defines the name of user variable and number of data Transfers the data Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 7 Support Functions User Function and User Variable Syntax of Data Variable Name A data variable name must start with alphabet character and can consist of maximum six alphanumeric characters Refer to Figure 8 1 Figure 8 1 Syntax of Data Variable Name fat Maximum 6 characters alphabet The name must be unique Name is case sensitive For example Gm is different from GM NOTE Using Built
190. he National Institute of Standards and Technology NIST to the extent allowed by the Institute s calibration facility and to the calibration facilities of other International Standards Organization members Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 NOTE NOTE e Safety Summary The following general safety precautions must be observed during all phases of operation service and repair of this instrument Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment In addition it violates safety standards of design manufacture and intended use of the instrument Agilent Technologies Inc assumes no liability for customer s failure to comply with these requirements Agilent 4155C 4156C 41501B comply with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals and POLLUTION DEGREE 2 defined in IEC 1010 1 Agilent 4155C 4156C 41501B are INDOOR USE products LEDs in Agilent 4155C 4156C 41501B are Class 1 in accordance with IEC 825 1 CLASS 1 LED PRODUCT e GROUND THE INSTRUMENT This is Safety Class I instrument To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards e DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not oper
191. he data variable area In the DATA VARIABLES fields select secondary softkey for desired variable Up to 2 variables can be displayed on the data variable area which is located below the list area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for 10 pA measurement range 1 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions To Execute or Stop Measurement e To execute a measurement press e Single key in the MEASUREMENT key group for single measurement Repeat key in the MEASUREMENT key group for repeat measurement Append key in the MEASUREMENT key group for append measurement e To stop a measurement press Stop key in the MEASUREMENT key group Single Repeat and Append Measurement There are three measurement execution modes as follows Single measurement Clears GRAPHICS or LIST screen then executes measurement one time Measurement results are displayed on GRAPHICS or LIST screen Repeat measurement Executes measurements continuously Before each measurement is executed the GRAPHICS or LIST screen is cleared Most recent measurement results are displayed on GRAPHICS or LIST screen Append measurement Executes measurement
192. he measurement parameters You set the output parameters on the MEASURE SAMPLING SETUP screen The following setup is to force 500 nA to 0 1 uF capacitor as an example 1 Press Meas front panel key The MEASURE SAMPLING SETUP screen appears 2 Set the SAMPLING PARAMETER table as shown below MODE THINNED OUT INITIAL INTERVAL 2 00 ms NO OF SAMPLES 20 TOTAL SAMP TIME NO LIMIT This setup is to repeat one point measurement in 2 ms interval until the stop condition is satisfied and to hold the result data for 20 measurement points The stop condition is defined in the next step 3 Set the STOP CONDITION table as shown below ENABLE DISABLE ENABLE ENABLE DELAY Os NAME VG THRESHOLD 900 mV EVENT Val gt Th EVENT NO 3 This setup enables the stop condition which stops sampling when detects 3 measurement data that the VG value overs 900 mV 3 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Making a Measurement 4 Set the CONSTANT table as shown below UNIT SMU2 MP NAME IG MODE I SOURCE 500 nA COMPLIANCE 1V This setup is to force a constant current of 500 nA MEASURE SAMPLING SETUP OODECO7 02 18PM LINEAR SAMPLING PARAMETER STOP CONDITION LOG10 MODE THINNED OUT ENABLE DISABLE
193. he softkey that specifies the input port you want to enabled For the bias port only the softkey that specifies the bias port is available The softkeys have the label you defined in the E5250A INPUT CONNECTION fields on the CHANNELS E5250A PROPERTIES screen INPUT OUTPUT PORT NO PORT SMU1 1 SMU2 2 SMU3 3 SMU4 SMU5 Can be replaced with input 7 or 9 SMU6 4 48 L Can be replaced with input 8 or 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 37 NOTE NOTE NOTE Step 5 Support Functions Switching Matrix Control To define the matrix connection for ARRAY display mode Repeat the following steps until the connection setup definition is completed To apply the definition to the E5250A select the APPLY SETUP softkey 1 Move the pointer to the point whose status you want to change 2 Select the CLOSE softkey to define the close status X will be displayed at this point Select the OPEN softkey to define the open status will be displayed at this point For the bias port repeat the following steps until the bias status definition is completed To apply the definition to the E5250A select the APPLY SETUP softkey 1 Move the pointer to the point whose bias status you want to change 2 Select the BIAS DISABLE softkey to disable the bias port function _ will be displayed at this point Select the BIAS ENABLE softkey to
194. he standby state the 4155C 4156C does not perform measurements or stress force but it outputs de bias and or pulses using the measurement units defined as the standby channel Following settings keep the same conditions as the previous state e output switch of each unit e output impedance of PGUs e switching condition of the 16440A selector e resistance selection of the 16441A R Box Changing among Operation States Figure 7 12 shows how to change among the operation states From measurement stress states to idle state If you perform measurements or force stress from the idle state then the 4155C 4156C returns to the idle state after one of the following conditions occurs Measurement is finished e Fixture lid is opened while an SMU is outputting more than 40 V e Stress is finished Stop front panel key is pressed 7 46 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Operation States e From measurement stress states to standby state If you perform measurements or force stress from the standby state then the 4155C 4156C returns to the standby state after one of the following conditions occurs Measurement is finished e Stress is finished Stop front panel key is pressed Figure 7 12 Changing among the Operation States se leas ie Pn e a o x o E oO E o 2 c gt D oS 2 E Eo M ON AN 0 AZ Finish or
195. ime Each parameter has six setting ranges as shown in Table 7 15 The period width and delay time must be set in the same range Also if you use two PGUs both PGUs are set to the same pulse period value So these three parameters must be set in the same range for both PGUs Ranges of Pulse Period Pulse Width and Delay Time Range Pulse Period Pulse Width Delay Time Resolution 1 2 0 us to 100 0 us 1 0 us to 99 9 us 0 to 100 0 us 0 1 us 2 100 us to 1000 us 1 us to 999 us 0 to 1000 us 1 us 3 1 00 ms to 10 00 ms 0 01 ms to 9 99 ms 0 to 10 00 ms 10 us 4 10 0 ms to 100 0 ms 0 1 ms to 99 9 ms 0 to 100 0 ms 100 us 5 100 ms to 1000 ms 1 ms to 999 ms 0 to 1000 ms 1 ms 6 1 00 s to 10 00 s 0 01 s to 9 99 s 0 to 10 00 s 10 ms a The setting range of delay time is 0 lt delay time lt specified pulse period Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 21 Table 7 16 Measurement Units and Functions Measurement Units Leading Edge and Trailing Edge Transition Time The leading edge and trailing edge transition times have five setting ranges as shown in Table 7 16 Ranges and Resolutions of Leading and Trailing Transition Time Range Leading and Trailing Transition Time Resolution 1 100 ns to 1000 ns 1 ns 2 0 50 us to 10 00 us 10 ns 3 5 0 us to 100 0 us 100 ns 4 50 us to 1000 us 1 us 5 0 5 ms to 10 00 ms 10 us where e leading edge transition time must
196. ime of PGU1 PG2TR is the data variable for trailing edge transition time of PGU2 Time data of sampling measurement TIME is the data variable for time data of sampling measurement Index of the measurement result data EINDEX is the data variable for index number of measurement data The index number of the first data is 1 For a subordinate sweep measurement the index number continues to increment by 1 between secondary sweep steps that is e last data of a primary sweep index e first data of next primary sweep index 1 8 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions User Function and User Variable User Function A user function consists of one or more data variables used in an expression You define the user function name expression and unit on the CHANNELS USER FUNCTION DEFINITION screen You can use a user function inside another user function And you can set up the user function on the DISPLAY DISPLAY SETUP screen to plot the user function values or display the numeric value To define a user function you define a name and an expression on the CHANNELS USER FUNCTION DEFINITION screen If desired you can define a unit such as ms You can define up to 6 user functions See example below e User function name must start with alphabet character and can consist of maximum six alphanumeric characters Name must be unique Name is case sensitive For example Gm is different fr
197. in Figures 4 5 through 4 26 is applied to the measurement data when the QSCV integration time is set to the same value as the LEAK integration time 4 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 5 Calculation Example of Measurement Accuracy HRSMU Reading Accuracy 0 001 0 01 0 1 1 QSCV Measurement Voltage V 1 E 10 1 E 11 E E 2 1 E 12 Es lt 3 E O 1 E 13 1 E 14 0 001 0 01 0 1 1 QSCV Measurement Voltage V Conditions Measurement Range 10 pA 100 pA Output Range 2 V Integration Time 2 1 0 5 0 3 s corresponding to the lines from top to bottom Equivalent Parallel Resistance of DUT 10 T ohm Guard Capacitance of Measurement Path 200 pF Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 33 Quasi static C V Measurements Considering Measurement Accuracy Figure 4 6 Calculation Example of Measurement Accuracy HRSMU 12 10 Reading Accuracy 0 001 0 01 0 1 1 0 QSCV Measurement Voltage V Offset Accuracy F z w 1 E 15 0 001 0 01 0 1 1 10 QSCV Measurement Voltage V Conditions Measurement Range 10 pA 100 pA
198. in Function Name as Data Variable Name You can give a data variable name the same name as a built in function But if you use the name in an expression the system considers the name to be a data variable name not a built in function name So in this case you cannot use the built in function in an expression For the built in function see Chapter 9 8 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE Figure 8 2 Support Functions User Function and User Variable Expression An expression can be used for following e Inauser function definition e As a condition for an automatic analysis function e For direct keyboard calculation Direct Keyboard Calculation You can directly calculate the value of an expression as follows Enter the expression by using the front panel keys press the green key then press Enter The value of the expression is displayed If the expression contains data variables that are related to measurement points the calculated value corresponds to the marker position Figure 8 2 shows the syntax of an expression Notice that an expression can be used within an expression Expression Syntax expression monadic operator q dyadic expression operator numeric scientific constant data variable A O O read out function keyword expression O LEDOTOOZ woe Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 9 NOTE Support Functions User Function and User Variable
199. in internal memory 1 onto the presently displayed measurement curve GRAPHILIST GRAPHICS SHOR 93AUg09 06 18PM eee SETUP GRAPH mA 2 00 Overlay Measurement Curve ha DATA E VAR 1 i OFF Present Curve e LINE PRMTRS 200u div SHOW E OVERLAY INFO 0 00 d i i i SCALE i To y 7 fdiv 10 00 0 000 vo Vv 1 00 div OVERLAY SCALING DISPLAY SWEEP TIMING CONST SETUP SETUP SETUP SETUP MARKER CURSOR UGTO2012 100 80 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 33 Analyzing Measurement Results Manual Analysis To Scroll the LIST screen e Press an arrow key of the MARKER CURSOR key group List scrolls in direction of selected arrow List can be scrolled even while performing measurements When marker is displayed marker does not move during scrolling To scroll list fast Press Fast key of the MARKER CURSOR key group while pressing an arrow key of the MARKER CURSOR key group 6 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis To Display or Move Marker on LIST screen 1 Select MARKER primary softkey 2 Set MARKER secondary softkey to ON The marker is displayed Selecting MARKER secondary softkey toggles between ON and OFF 3
200. inate c Goto step 8 8 If you selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select AFTER secondary softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings d If you selected AFTER select secondary softkey to enter desired data variable in field 7 e If you selected AFTER enter desired expression in field 8 9 In the Gradient field enter gradient expression 6 40 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 or 7 see Chapter 8 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Example The following figure shows an example setup to automatically draw a line through the specified point with the specified gradient 4 1 5 2 3 DISPLAY ANALYSTS E 93JUL22 11 32Ay XLINE1A GRAD Jine on Yi at a point ats DGM MAX DGM 0
201. ine As a po Measurement Units on page 3 26 ee A NA pee For the user function standby function e a and R Box see Chapter 8 3 Setting the source parameters of the units Sc scene dr sooner onam The following tasks are described ania waren ES a seas A e To Set up Sampling Parameters HOLD TINE 0 000000 EVENT NO 3 e To Set up Constant Output m r ae e To Set up PGU Output eset a aie ER EA MER e To Define Stop Conditions 3 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions 4 DISPLAY DISPLAY SETUP oopeco7 02 18PM ARA res DISPLAY MODE Pa TTET sorapurcs ads Waste axis NAHE TINE va Scar LINEAR LINEAR urn 0 000000000 s 0 000000000 v max 200 0088 2 000000 v sanz vurme_parawsTer on on DATA VARIABLES ADATA DISPLAY RESOLUTION GIRDER TORNAT craruzcs Select Display Mode with softkey or rotary knob DISPLAY ANLYSIS PREY Hae serue sevur pase pace Setting the display mode to show measurement results The following tasks are described e To Display Graphics Results e To Display List Results 0000 oooo Odogodo o E o ee conn Executing the measurement See
202. ion about measurement units and measurement functions e Support Functions Provides information about several functions which support measurements e Built in Functions Provides information about the built in mathematical functions and read out functions e Connecting Measurement Devices Explains how to connect the measurement devices to the instrument 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Contents 1 Sweep Measurements Measurement Functions 0 0 0 eee eee 1 3 Basic Sweep Measurement 0 0 cece eee eee 1 4 Subordinate Sweep Measurement 0 00 e eee eee eee 1 7 Synchronous Sweep Measurement 0 0 e eee eee ee eee 1 9 Pulse Sweep Measurement 0 0 0 c cece ee eee eee 1 11 Defining Measurement Conditions 0 0 00 rner eee ee eee 1 14 To Define Measurement Units 0 0 0 2 eee eee 1 16 To Set up Primary Sweep 0 0c eee eee eee 1 18 To Set up Secondary Sweep 0 eee eee eee eee 1 19 To Set up Synchronous Sweep 0 eee eee 1 20 To Set up Constant Output 0 ee ee eee 1 21 To Set up SMU Pulsed Output 0 0 00 eee eee 1 22 To Set up PGU Output 2 ee eee 1 24 To Set up Stop Condition 0 0 eee eee eee eee 1 26 To Display Graphics Results 0 0 0 eee eee 1 27 To Display List Results 2 0 0 0 cee eee 1 28 To Execute or Stop Measur
203. ion needs series resistor because SMUs cannot measure negative resistance The 4155C 4156C automatically compensates for voltage drop of the series resistance value So the GRAPH LIST screen group show the compensated data For details of the 16441A R Box refer to Agilent 16441A R Box User s Guide Resistance Value The 16441A R Box provides two sets of the series resistors So you can connect two SMU channels to the R Box Resistance values of resistors are listed below e IMQ e 100kQ e 10kQ 0Q You can select the resistance values on the 4155C 4156C setup screen The LEDs on the 16441A R Box indicate the present resistance value Connections Following table is the parts list of cables for connecting the 16441A R Box Agilent Model or Part Number Description 04155 61610 Control Cable 1 5 m 04155 61609 Control Cable 3 0 m 04155 61605 Triaxial Cable 0 4 m 16493K 001 Kelvin Triaxial Cable 1 5 m 16493K 002 Kelvin Triaxial Cable 3 0 m 8 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Non Kelvin Connections R BOX Control The following figure shows the 16441A R Box connections using non Kelvin connections 4155 To R Box Output Input triaxial cable UG DO4023 120 mm 50mm control cable Kelvin Connections 16442 triaxial cable 16441A The following figure shows the 16441A R Box connections using Ke
204. ions Trigger Function Trigger output delay time for pulsed sweep measurements When using an SMU as a pulse source the 4155C 4156C can output edge triggers at each pulse leading edge Trigger output delay time TRIG OUT DELAY specifies how much to delay the trigger after the leading edge So you set the trigger output delay time to wait until the 4155C 4156C outputs a stable pulse peak value Available setting range for the trigger output delay time is Range 0 to specified pulse width maximum 32 7 ms Resolution 100 us Trigger output delay time is shown as T1 in the following figure Pulse Width l e A155 4156 Tt oe Output r Output External Instrument l Tex Tex lt gt i UGDO4015 GOmmhxt mmw TI trigger output delay time set in TRIG OUT DELAY field on MEASURE OUTPUT SEQUENCE page Tex measurement time for external instrument If you want the external instruments to make a measurement while the pulse peak value is being forced the specified T1 and pulse width must satisfy the following equation pulse width gt T1 Tex where Tex means the measurement time Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 45 Support Functions Trigger Function Step delay time for staircase sweep measurements When performing sweep measurements without a pulsed SMU the 4155C 4156C outputs an edge trigger at the time when the 4155C 4156C starts perf
205. is a circle 0 and the marker for Y2 axis is an asterisk The active marker depends on the selected axis Markers have the following functions on the GRAPH LIST GRAPHICS screen e displaying values of measurement curve The X Y1 or Y2 coordinate values at the marker location are displayed e specifying a point at which to draw a tangent line For tangent line mode the marker is used to specify the position at which to draw a tangent to the measurement curve Refer to Line Drawing on page 6 9 e displaying values of data variables The data variable values at the marker location are displayed 6 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Analysis Function specifying the position for direct keyboard calculation If you enter an expression that has data variables related to measurement points the value of the expression at the marker position is displayed indicating measurement point determined by auto analysis expression If you set up an expression for the marker on DISPLAY ANALYSIS SETUP screen the marker moves to the point determined by the expression after auto analysis is performed Moving the marker Basically you can move the markers on measurement points of the measurement curve by using the knob on the front panel In addition to the basic movement the following functions allow you to quickly move the marker to the desired position Interpolation Mode Enables
206. is automatically set to 100 mA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units VMU Voltage Monitor Unit The VMU has two measurement modes grounded or differential Grounded mode uses one VMU Differential mode uses two VMUs Figure 7 7 is a simplified VMU circuit diagram The VMU can measure up to 20 V Table 7 13 shows the voltage measurement range of the VMU Figure 7 7 Simplified VMU Circuit Diagram eae Grounded Mode PA j E fa W ee ANNA Output Switch SIN Diterent Mode V V a Y Differential Mode sl sa Ta V Output Switch NIN Grounded Mode gt COMMON UGDO2 007 NOTE High Impedance DUT A very high impedance DUT may cause measurement error owing to the input leakage current from the VMU To check the measurement error perform voltage measurement as follows 1 Connect the SMU to the DUT 2 Force very low current under 1 pA to the DUT from the SMU 3 Measure voltage with the SMU 4 Compare the voltage measured with the SMU and the VMU 7 18 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units Table 7 13 VMU Voltage Ranges and Resolutions Measurement Resolutions P Measurement i i AK Range Integration Time High Speed Sampling 1PLC or 640 us to 1 92 Longer ms 80 us to 560 is Measurement Grounded 2V 2 uV 20 uV 200 uV 2 mV Measurement 20 V 20
207. is calculated by the following equation VARI VARI x RATIO OFFSET On the MEASURE SWEEP SETUP screen set up the primary sweep source VAR1 then do following 1 VARI OFFSET Enter the offset value of the VAR1 output against the VARI output 2 VARI RATIO Enter the ratio value of the VAR1 output against the VARI output 3 VARI COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the synchronous sweep source You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINTTION screen 1 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions To Set up Constant Output Constant voltage current source is the measurement unit defined as CONST in the CHANNELS CHANNEL DEFINITION screen To set up the constant output source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 CONSTANT SOURCE Enter the desired output value of the constant source 2 CONSTANT COMPLIANCE Only for SMU Enter the compliance value for the constant source You cannot change UNIT NAME and MODE in this screen To change the values go to the CHANNELS CHANNEL DEFINITION screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 21 Sweep Measurements Defining Measurement Conditions To Set up SMU Pulsed Output SMU pulse output source is the measu
208. is called as non stress channel or bias channel in this manual To use the stress force function at least one unit must be set to the stress channel which the FCTN field is set to SYNC You can select up to four stress source channels among SMUs VSUs and PGUs If a unit is set to STBY ON on the CHANNELS CHANNEL DEFINITION screen the unit cannot be set to the stress channel If you use two PGUs as ac pulse source both PGUs must be the stress channel or the non stress channel This means that if PGU1 is a stress channel PGU2 must be a stress channel not non stress channel 5 4 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Stress Force Stress Function Switching Channels Connected to DUT The 4155C 4156C can control Agilent 16440A SMU Pulse Generator Selector to automatically switch units that are connected to a DUT pin You set up this automatic control on the STRESS CHANNEL DEFINITION screen For example the DUT pin is connected to a PGU for stress force when Stress front panel key in the MEASUREMENT key group is pressed then connected to an SMU for measurement when Single front panel key is pressed For details about how to control the 16440A selector refer to Chapter 8 External Stress Source The following trigger functions allow you to force stress from more than 4 channels by using external pulse generators voltage sources or current sources e gate trigger while stress is forced The 4155C 4156C can output
209. it performs the measurement If the measurement value is less than 1 of the present range and if present range is 100 uA or higher range and if the present range is two or more ranges above the specified range the range changes down two ranges instead of one range e 100 nA to 100 pA The unit changes ranges up or down one range at a time but not below specified range until the measurement value is between 10 and 114 of the range then the unit performs the measurement 10pA The unit changes to the next higher range when the measurement value exceeds 104 of the present range Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 31 Measurement Units and Functions Measurement Ranging Mode Compliance Range Compliance range is available for knob sweep measurement only For details about setting compliance refer to Compliance on page 7 23 V measurement The monitor unit measures at the lowest range that includes V compliance For VMUs compliance range is automatically set as follows grounded mode 20 V differential mode 2V I measurement The monitor unit measures at the lowest range that includes I compliance Fixed Range The monitor unit measures at the specified range only For current measurement if specified range is greater than the lowest range that includes I compliance an error occurs 7 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE LONG Measurement Units and Functi
210. l 2 Edition 5 7 7 Measurement Units and Functions Measurement Units Table 7 4 HRSMU Measurement Current Values and Resolutions Measurement Resolutions Range ir Integration Time nigh spei m or 640 ps to 1 92 SO yis to 560 ps A y onger ms 10 pA 0 lt I lt 10 5 pA 1fA 1fA 1fA 10 fA 100 pA 0 lt I lt 115 pA 1fA 1fA 10 fA 100 fA l nA 0 lt I lt 1 15 nA 10 fA 10 fA 100 fA 1pA 10nA O lt I lt 11 5nA 10 fA 100 fA 1pA 10pA 100 nA O lt I lt 115 nA 100 fA 1 pA 10pA 100 pA 1 uA O lt I lt 1 15 uA 1 pA 10 pA 100 pA 1 nA 10 pA 0 lt I lt 11 5 pA 10 pA 100 pA 1 nA 10 nA 100 uA 0 lt I lt 115 pA 100 pA 1 nA 10 nA 100 nA 1 mA 0 lt I lt 1 15 mA l nA 10 nA 100 nA 1 uA 10 mA 0 lt I lt 11 5 mA 10 nA 100 nA 1 uA 10 pA 100 mA 0 lt I lt 100 mA 100 nA 1 uA 10 uA 100 uA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value b Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 us c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter 7 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 7 4 Table 7 5 Measurement Units and Functions Measurement Units MPSMU Medium Power SMU MPSMU Output and Measurement Ranges
211. l outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle Do not touch the guard terminal with bare hands because you may be shocked by high voltage The potential of the guard terminal is equal to the output voltage Never connect the guard terminal to any other output including circuit common frame ground or the terminals of any other unit Doing so may damage the unit Agilent 4155C 4156C User s Guide Vol 2 Edition 5 10 5 Connecting Measurement Devices Using Connector Plate Example The following example connection can be used to reduce the leakage current Extend the outer conductor as close as possible to the probing needle This also reduces the induced noise Center Conductor Outer Conductor me Cable a Needle Y C N o Connector Plate X UGTOI030 GAL 120Wx50H del x RAA Contact Pad Guarding Guarding reduces the leakage current between the measurement points and instrument This is important when you measure low current The following figure shows the theory of guarding The buffer amplifier x 1 keeps the potential of the guard conductor at the same potential as the force conductor so current does not flow between the force and guard conductors Therefore the current meas
212. lue of the expression for the highlighted row is displayed e indicating measurement point determined by auto analysis expression If you set up an expression for the marker on DISPLAY ANALYSIS SETUP screen the marker moves to the row determined by the expression after auto analysis is performed 6 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Analysis Function Moving the marker Basically you can move the marker up or down by using the rotary knob on the front panel or by using the upper arrow and down arrow front panel keys If you have defined more than four variable values you can scroll right or left by using the left arrow or right arrow front panel key In addition to the basic movement the following functions allow you to quickly move the marker to the desired position For these functions the row marker becomes a one cell pointer so these functions are for the column that contains the pointer not the entire row e Marker to Min Max Moves the pointer to the maximum or minimum measurement point value e Direct Movement Moves the pointer directly to the value that is closest to the specified value e Marker Skip Moves the pointer to data for the next measurement curve This function only has meaning for subordinate sweep measurements and append measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 7 Analyzing Measurement Results Analysis Function Cursor C
213. lvin connections Only 0 ohm is available for the Kelvin connection 4156 SMU PGU To R Box Kelvin triaxial cable UGDO4022 120mm 50mm control cable Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 16442 triaxial cable 16441A NOTE NOTE Support Functions R BOX Control Setups You set resistance values in the SERIES RESISTANCE column on the CHANNELS CHANNEL DEFINITION screen You can set resistance values for the following SMUs SMUI to CH1 terminal of R Box e SMU2 to CH2 terminal of R Box if the 41501A B SMU Pulse Generator Expander is not installed or does not have an HPSMU e SMUS to CH2 terminal of R Box if the 41501A B is installed and has an HPSMU If you connect the 16441A R Box to the SMUs described above the 4155C 4156C automatically compensates for voltage drop of the resistance values So the measured data displayed on the screen and the results of user function are the compensated data For the following SMUs you can set 0 Q only e SMU that is set to standby channel e SMU that is set to COMMON output mode If the 4155C 4156C is on and an emergency occurs the resistance value changes to 1 MQ There is a possibility that the 4155C 4156C cannot perform measurement circumstances If you measure device characteristics including negative resistance over 1 MQ there is a possibility that they cannot measure it If you connect the R Bo
214. mary sweep To return the moving average value of ID by using five measurement values MAVG ID 5 9 10 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Syntax Example Syntax Example Syntax Example Built in Functions MAX MAX Returns the maximum sweep or sampling value MAX expression For subordinate sweep measurement this function returns the maximum value of the primary sweep for the secondary sweep step If there are invalid values in expression invalid values are ignored To return the maximum value of ID MAX ID MIN Returns the minimum sweep or sampling value MIN expression For subordinate sweep measurement this function returns the minimum value of the primary sweep for the secondary sweep step If there are invalid values in expression invalid values are ignored To return the minimum value of ID MIN ID SQRT Returns the square root of the expression SQRT expression To return the square root of ID SQRT ID Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 11 Built in Functions Read Out Function The read out functions are built in functions for reading various values related to the maker cursor or line You can use these functions to perform complex analysis of the measurement results You can use read out functions for the following In the expression that is used to define a user function on the CHANNELS USER FUNCTION DEFINITION screen
215. matically set to 1 and the QSCV MEAS VOLTAGE and STEP values are ignored Then the 4155C 4156C executes one point spot measurement from START to STOP 4 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Making a Measurement 4 Set the TIMING table The following values are just an example HOLD TIME 10s DELAY TIME 100 ms This table sets the hold time and delay time Hold time 0 to 655 35 seconds 10 ms resolution Delay time 0 to 65 535 seconds 100 us resolution MEASURE QSCV SETUP SINGLE VARIABLE VARI UNIT SMU1 HR NAME vi SWEEP MODE SINGLE DOUBLE START 3 100 V STOP 3 100 V QSCV MEAS VOLTAGE STEP 100 0mV 80 0mV NO OF STEP 61 COMPLIANCE 100 00mA TIMING HOLD TIME 10 00 DELAY TIME 100 0ms QSCV CONTINUE AT ANY Status CONSTANT UNIT NAME MODE SOURCE a mee eae hfe 220 e i eo S COMPLIANCE S 25 asic mn e A ii se 6 SINGLE Select SWEEP Mode with softkey or rotary knob Qscv MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ S PAGE PAGE 4 21 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Making a Measurement Step 5 Set up the measurement parameters Set the output parameters on the MEASURE QSCV MEASURE SETUP screen Define the measurement parameters as shown below 1 Press the Meas fron
216. ment e Linear Sampling Measurement Available Units Available units and functions for sampling measurement are shown below Output Function Output Mode Mes Unit Pulse Mose VAR1 VARI VAR2 CONST STANDBY V I COM v I SMU n a n a n a n a vSU na n a n a VMU GNDU l le PGU _ e e e e n a means This is not available for sampling measurement means This is available for sampling measurement means This is not available for this unit For sampling measurements only the PGU output can be pulsed The pulse output timing from PGU is not synchronized with the timing of sampling measurement Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 3 Sampling Measurements Measurement Functions Sampling Interval and Measurement Time When the sampling interval enough longer than the actual measurement time measurement unit repeats measurement every specified sampling interval However if the sampling interval is less than the measurement time measurement unit cannot repeat measurements every specified interval For example if the measurement time is one and a half the specified sampling interval the interval of measurement is two times the sampling interval See Figure 3 1 which explains the operation of the sampling measurement Measurement time depends on the measurement condition integration time measurement range and so on So
217. mpling Measurements Making a Measurement Making a Measurement In this section you learn how to execute the sampling measurements using the 4155C 4156C As an example you measure charge voltage of capacitor Measurement circuit and typical characteristics are shown below Charge Voltage Time For accurate measurements allow the 4155C 4156C to warm up for a minimum of 40 minutes after you turn on the instrument and then execute calibration For the self calibration see Chapter 7 Step 1 Prepare for the measurement Before executing measurement configure the 4155C 4156C and Agilent 16442A Test Fixture See Step 1 Prepare for the measurement in Making a Measurement in Chapter 1 The sampling measurement example uses the connection same as the sweep measurement example connection Step 2 Mount your DUT on the test fixture 1 Select a suitable socket module for your DUT capacitor Mount the socket module on the test fixture Mount the capacitor on the socket module eS Make connections with connection wires miniature banana to pin plug etc The capacitor must be connected between SMU1 and SMU2 5 After finishing connections shut the lid of the test fixture 3 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Making a Measurement Step 3 Define the channel assignments You set the connection information on the CHANNELS CHANNEL DEFINITION screen 1 I
218. mum 11 decades MODE Maximum value LOG10 111 LOG25 276 LOG50 551 Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 e Allowable range when INITIAL INTERVAL gt 2 ms 0 to 655 35 s with 100 us resolution e Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution Example HOLD TIME 1 003 s and measurement interval is 3 ms decade and its range are as shown below decade Range in sec 1st decade 1 003 to 1 030 3 m 1 to 30 m 1 2nd decade 1 030 to 1 300 30 m 1 to 300 m 1 3rd decade 1 300 to 4 00 300 m 1 to 3 1 4th decade 4 to 31 3 1 to 30 1 5th decade 31 to 301 30 1 to 300 1 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions Table 3 3 Effective Parameter Values INITIAL INTERVAL 560 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Maximum 111 LOG10 276 LOG25 551 LOG50 HOLD TIME 30 ms to 655 35 s 0 to 655 35 s 100 us resolution 100 us resolution Stop Condition DISABLE DISABLE ENABLE Measurement Units e Max 8 Measurement Range 4 FIX FIX AUTO LIMITED Integration Time Short Short Medium Long Number of units SMUs or VMUs used for measurements b f voltage source SMU is connected to R BOX only this SMU can be used for the measurement
219. n DEFINITION field comma keys and then press Enter VG secondary softkey then and Enter To disable a user function select DISABLE FUNCTION secondary softkey press Shift F7 key a Square root operator Y is defined by SQRT built in function b Partial difference 0 0 is defined by DIFF built in function Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 37 Sweep Measurements Making a Measurement a oy Figure 1 7 User Function Definition Screen CHANNELS USER FUNCTION DEFINITION 01JAN29 10 53AM USER FUNCTION NAME UNIT DEFINITION SQID SQRT ID DSQID DIFF SQID VG DELETE ROW SQID Enter User Function Name max 6 chars B CHANNEL USER USER E5250A PREV NEXT DEF FCTN VAR S PROP PAGE PAGE Figure 1 7 defines the following two user functions SQID VId DSQID dSQID AVg Id IVg Where d is drain current and Vg is gate voltage 1 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Making a Measurement Step 5 Set up the measurement parameters You set the output parameters on the MEASURE SWEEP SETUP screen 1 Press Meas front panel key The MEASURE SWEEP SETUP screen appears In the screen the upper left area defines the VAR1 information and the upper right area defines the V
220. n set The function does not work Same as POWER COMP OFF 2 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Executing Measurements Example The following figure shows an example to set both X axis and Y axis display regions to positive KNOB SWEEP 94JANO1 01 30PM X AXIS CURSOR 500 0000mV 5 000000mA REGION Y AXIS mA REGION 10 00 F X AXIS DISPLAY NORMAL IF Y AXIS 4 000 DISPLAY Idiv NORMAL AE Mimo 0000 0000 VF 1000 div V 1 000 Y AXIS SETUP VARL VAR2 CONST ASSIGN COPY SETUP SETUP SETUP UGTO1034 10070 To Stop Measurement To stop the knob sweep measurement press Stop front panel key This returns the 4155C 4156C operation state to the previous state For example 1f the knob sweep measurement starts from the idle state the operation state returns to the idle state Starting knob sweep again To start the knob sweep measurement again press the following front panel key Single The knob sweep measurement will start from the point where it was stopped Green Single The knob sweep measurement will start from 0 V or 0 A Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 13 Knob Sweep Measurements Executing Measurements To Change Measurement Conditions To change the measurement conditions use the following primary softkeys Softkey Description
221. n the data variable area In the DATA VARIABLES fields select secondary softkey for desired variable Up to 2 variables can be displayed on the data variable area which is located between the graph area and the marker area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for 10 pA measurement range Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 33 Sampling Measurements Defining Measurement Conditions To Display List Results 1 Press Display key in the PAGE CONTROL key group Select DISPLAY SETUP primary softkey In the DISPLAY MODE field select LIST secondary softkey gt ey In the LIST area select the secondary softkey of the variables for which you want to list the measurement results When the pointer is in the NAME row the allowable variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The allowable names are names that you already set up on CHANNEL DEFINITION USER FUNCTION and USER VARIABLE screens To set up variable to be displayed on the LIST screen In the DATA VARIABLES fields select secondary softkey for desired variable Up to 2 variables can be displayed on the data variable area which is located below the li
222. ndary sweep source This parameter applies to SMU only Allowable range of power compliance depends on the power compliance range of sweep source For details refer to Chapter 7 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 1 3 Sweep Measurements Measurement Functions Synchronous Sweep Measurement For synchronous sweep measurement you set up a synchronous sweep source VAR1 in addition to a primary sweep source VAR1 The output of the synchronous sweep source is swept synchronously with the output of the primary sweep source at a constant offset value and ratio Synchronous Sweep Measurement Output Voltage or Gyrrent Synchronous Source Stop Value Primary Source N Stop Value T AN Synchronous Source 3 2 Start Value J Primary Source 1 Start Value ime UGDOS004 120x90 To set up synchronous sweep measurement select the following on CHANNELS CHANNEL DEFINITION screen e VARI function for desired primary sweep source SMU or VSU e VARI function for desired synchronous sweep source SMU or VSU Synchronous sweep mode has the following restrictions e For the following VAR1 is always set to the same mode as VARI e linear log staircase e single double sweep mode e VARI and VARI must be same V I output mode For example if VAR 1 is set to V mode then VAR1 must be set to V or VPULSE mode Agilent 4155C 4156C User s Guide
223. nder test from the measurement terminals after the measurements The measurement terminals should be opened during the calibration 7 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE NOTE Measurement Units and Functions Zero Offset Cancel Zero Offset Cancel The 4155C 4156C has zero offset cancel function This function allows you to minimize measurement error offset caused by resistance and leakage current of cables prober and so on You can use the zero offset cancel function for e low current measurement measurement range lt 10 nA by SMUs e differential mode V measurement by VMUs To Measure Offset Data To measure the offset data do following 1 Open the measurement terminals at the cable end of the device side 2 Select the measurement range in the MEASUREMENT RANGE table on the MEASURE MEASURE SETUP screen See Table 7 25 for the ranging mode available 3 Press green key and Stop front panel key in this order The ZERO CANCEL field is automatically set to ON and offset data is measured This data is used for the offset cancel Allowable offset value is shown in Table 7 26 If offset data is too large offset measurement for this measurement path is not performed For this path an is marked in the ZERO CANCEL table Then the previous data is used for the offset cancel The initial offset data is 0 During offset measurement integration time is automatically set to specified time or medi
224. ndicator is off This section has the following descriptions e Using Test Fixture e Using Connector Plate 10 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 CAUTION CAUTION Connecting Measurement Devices Using Test Fixture Using Test Fixture 1 Press the Stop front panel key to set your 4155C 4156C to idle state If the standby indicator is lit press the Standby front panel key 2 Select a proper socket module for your DUT then set the module on the test fixture 3 Mount your DUT on the socket module 4 Connect between the socket module and the test fixture by using the proper test leads 5 Close the lid of the test fixture To force more than 40 V close the lid of the test fixture Otherwise the interlock function will stop the 4155C 4156C output To connect between the socket module and the test fixture you can use test leads that have the following terminals e Miniature banana miniature banana e Miniature banana pin plug e Miniature banana miniature clip Do not connect or disconnect your DUT while the 4155C 4156C is forcing voltage or current Otherwise your DUT may be damaged Do not touch the terminals of the test leads Oil perspiration and dirt prevent good electrical contact deteriorate insulation and degrade measurement accuracy Agilent 4155C 4156C User s Guide Vol 2 Edition 5 10 3 Connecting Measurement Devices Using Test Fixture Connections for Hi
225. ns how to execute quasi static C V QSCV measurements e Measurement Functions e Defining Measurement Conditions e Making a Measurement e Maximum Measurement Value e Considering Measurement Accuracy For details about how to enter or input setup data refer to Setup Screen Reference manual 4 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Measurement Functions Measurement Functions For quasi static C V QSCV measurements the sweep source channel performs linear staircase sweep output of voltage while the monitor channel measures capacitance for each sweep step Available Units The QSCV measurement uses a voltage sweep source VARI and a voltage constant source Also optional constant sources may be used Units mode and function available are shown below Unit Mode Function SMU v VARI V I COMMON CONST VSU V CONST PGU V CONST GNDU COMMON CONST Only a SMU can be used for the capacitance measurement Specify the measurement unit on the MEASURE QSCV MEASURE SETUP screen Capacitance Data Calculation The capacitance data at each sweep step is calculated using the following formula This is available when the leakage current compensation capability is set to ON C cinteg x I 1 amp x IL ax ILp V Vo F where cinteg is the integration time of the capacitance measurement I IL ILo V and Vo
226. nt Fixed Initial Interval lt 2 ms Knob Sweep Compliance a You specify initial interval on the MEASURE SAMPLING SETUP screen If you choose sweep measurement or sampling measurement initial interval gt 2 ms and you do not set a ranging mode auto ranging is set for voltage measurement mode channel and limited auto 1nA ranging is set for current measurement mode channel automatically For sampling measurement initial interval lt 2 ms an error occurs if fixed range is not set Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 29 Measurement Units and Functions Measurement Ranging Mode Auto Ranging The monitor unit automatically searches for and measures at the range that provides the highest resolution as follows V measurement The unit changes ranges up or down one range at a time until the measurement value is between 10 and 110 of the range then the unit performs the measurement I measurement 1AtolpA The unit changes ranges up or down one range at a time until the measurement value is between 10 and 114 of the range then the unit performs the measurement If the measurement value is less than 1 of the present range and the present range is 100 uA or higher range the range changes down two ranges instead of one range e 100 nA to 100 pA The unit changes ranges up or down one range at a time until the measurement value is between 10 and 114 of the ran
227. ntax L1G If there are Y1 and Y2 axes this function returns the value for selected axis This function calculates the slope by using the following formula e If X and Y axes are both linear scaling a Y1 JMX Xp e If X axis is logarithmic scaling and Y axis is linear scaling O Y Yo Cog x log xp e If X axis is linear scaling and Y axis is logarithmic scaling a log y log yo x Xo If X and Y axes are both logarithmic scaling a log y log yo log x log x Where OL Slope of LINE1 Xo Yo X1 y X and Y coordinate values at the two points where LINE intercepts the perimeter of the plotting area 9 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Built in Functions L1G1 L1G1 Returns the slope of LINE1 for Y1 axis Syntax L1G1 This function calculates the slope by using the following formula e If X and Y1 axes are both linear scaling a y1 JMX Xp e If X axis is logarithmic scaling and Y1 axis is linear scaling a Y1 yo log x log xo e If X axis is linear scaling and Y1 axis is logarithmic scaling a log y log yo x1 Xp If X and Y1 axes are both logarithmic scaling a log y log yo log x log Xp Where a Slope of LINE1 XQ Yo X1 Y X and Y1 coordinate values at the two points where LINE1 intercepts the perimeter of the plotting area Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 17 Built in Functions L1G2 L1G2 Returns th
228. nts Measurement Functions Measurement Functions The knob sweep function allows you to easily perform real time sweep measurements by rotating the rotary knob on the front panel This function is useful when you want to quickly make a rough measurement of a DUT characteristic or when you want to easily define a measurement setup for normal sweep To start the knob sweep measurement press the green key and then the Single front panel key The 4155C 4156C starts knob sweep measurement and repeats measurements continuously until this function is stopped You can change the measurement setups even while the measurements are being performed When knob sweep measurements are started the VARI start value and VAR1 sweep range are 0 V or 0 A You change the sweep range from 0 to the stop value by rotating the knob To stop the knob sweep measurements press Stop front panel key or a PAGE CONTROL group key To restart the measurement press the following key s If you pressed the Stop key Single key If you pressed a PAGE CONTROL key green key and Single key Available units and functions Table 2 1 shows available units and functions for knob sweep measurement Available Units and Functions for Knob Sweep Measurement Unit SMU Output Function Output Mode Meas Mode Pulse VARI STAND COMM VARI VAR2 CONST BY V I ON V DVOLT I n a e e e O e e n a e e VSU na e VMU GND
229. o force the pulse continuously Or enter the number of pulses to output for sampling measurement only For the pulse period and pulse count values the values you set for PGU1 are also used for PGU2 The following figure shows the relation between pulse waveform and setup parameters Pulse Peak 90 A i fA Leading Time T Time Y k 10 i y Pulse Base ok loo Pulse Width Pulse Period TANTER Delay Time 1 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions To modify the UNIT and NAME fields Modify the UNIT and NAME fields on the CHANNELS CHANNEL DEFINITION screen Using PGUs as constant voltage source To use a PGU as a constant voltage source set the desired PGU as follows Vin MODE column on the CHANNEL DEFINITION screen e Desired output voltage value in SOURCE field on MEASURE PGU SETUP screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 25 Sweep Measurements Defining Measurement Conditions To Set up Stop Condition 1 Press Meas key in the PAGE CONTROL key group 2 Move field pointer to SWEEP Status field 3 Select one of the following softkeys CONT AT ANY Sweep will continue even if an abnormal status occurs If power compliance is set for an SMU this softkey is not displayed STOP AT ANY ABNORM Sweep will stop if any abnormal status occurs STOP AT COMPLIANCE Sweep will stop only
230. ode PGU e COMMON secondary softkey for circuit common SMU and GNDU 4 Inthe NAME field of desired unit in the CHANNELS area enter the stress channel name 5 Inthe FCTN field of units that will be stress force channels select SYNC secondary softkey The stress channel name is only used for reference on the STRESS SETUP screen not on any results screen So you can omit the name if desired In the FCTN column you can set up to four units to SYNC At least one unit must be set to SYNC in the FCTN column The SYNC stress force units all start forcing stress at the same time The NSYNC non stress force units channels start forcing stress in sequence when state changes to stress force state For this timing see Stress Force Sequence on page 5 7 If the row of a unit does not have settings the unit is not used To disable a unit In the row of the unit select the DELETE ROW secondary softkey The settings in the row are deleted To set up non stress output channels Perform the following procedure 1 Perform first 3 steps described above 2 Inthe FCTN field select NSYNC secondary softkey If you use two PGUs as pulsed sources VPULSE both must be SYNC or both NSYNC Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 13 Stress Force Defining Stress Conditions Example The following figure shows an example setup to set two PGUs to ac stress source
231. of Knob Sweep Function The following are parameters that are for knob sweep measurement only or that have a different meaning or range from normal sweep measurement LIN LOG mode Only linear mode is available Even if you set LOG on the MEASURE SWEEP SETUP screen the knob sweep is a linear sweep measurement VAR1 Range Sweep range of VARI source output If you do not set the VARI RANGE the default is the stop value specified for the VAR1 channel on the MEASURE SWEEP SETUP screen Polarity The following sweep polarities are available for the knob sweep function of the VARI source To set the polarity select VAR1 SETUP and POLARITY softkeys A 0 A O o f 0 j Y a positive b negative c bipolar positive Used to set the sweep output in the positive X direction negative Used to set the sweep output in the negative X direction bipolar Used to set the sweep output in both the positive and negative X directions To increase the source absolute value rotate the rotary knob in clockwise To decrease the source value toward 0 rotate the rotary knob in counterclockwise When measurement curves reach 0 the curves remain at 0 even if you continue to rotate the rotary knob counterclockwise Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 5 NOTE Knob Sweep Measurements Measurement Functions Step Time Step time is the time width of a sweep step as shown in the following figure For
232. ollowing shows an example setup that connects two SMUs to DUT during measurement state and connects two PGUs to DUT during stress force state STRESS CHANNEL DEFINITION G4JANO1 01 30PM SMU ACHANNELS XSMU PG SELECTOR MEASURE STRESS MEASURE STRESS UNIT NAME MEDE NAME FETN 1 sm PGU SMJ1 MP Vi 2 SMU Pad SMJ2 MP V2 3 OPEN OPEN SMJ3 MP V3 4 JOPEN OPEN SMJ4 MP SMJ5 MP SMJ6 MP vai v3u2 Poud VPULSE SYNC XTRIGGER SETUP PUZ VPULSE SYNC DISABLE GNDU FOLARITY POSITIVE PGU B SHANNEL STRESS STRESS NEXT oeri SETUP FoRCE PAGE Varona OO Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 27 Support Functions Switching Matrix Control Switching Matrix Control The 4155C 4156C can control the Agilent E5250A Low Leakage Switch Mainframe installed with the E5252A matrix card This section describes how to control the E5250A e Requirements e To Control Functions e To Control Connections e To Use Matrix Setup File Requirements Prepare the instruments and cables listed in Table 8 2 and provide the following environment For the location of the components on the E5250A rear panel see Figure 8 7 Also see Table 8 3 for the cable connections 1 Install the E5252A card into the E5250A slot 1 The E5252A must be installed in slot 1 If you need more than 12 output ports install the cards into the E5250A card slot continuously f
233. om gm e Unit name is optional Length 1 to 6 characters Valid characters any characters For the syntax of an expression refer to Expression on page 8 9 Example To define a user function for mutual conductance gm of an FET define gm on the CHANNELS USER FUNCTION DEFINITION screen as follows NAME UNIT DEFINITION gm S DELTA Id DELTA Vg Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 5 Support Functions User Function and User Variable User Variable A user variable is a data variable that is a numeric list which is passed via GPIB commands of PAGE CHANnels UVARiable and TRACe DATA subsystems from an external computer or the Internal IBASIC For information about the PAGE CHANnels UVARiable and TRACe DATA subsystems refer to GPIB Command Reference You can perform calculations between measurement results and the numeric list or plot the numeric list on the GRAPH LIST GRAPHICS screen To define a user variable you define a name and an data size on the CHANNELS USER VARIABLE DEFINITION screen If desired you can define a unit such as ms You can define up to 6 user variables See example below e User variable name must start with alphabet character and can consist of maximum six alphanumeric characters Name must be unique Name is case sensitive For example Gm is different from gm e Unit name is optional Length 1 to 6 characters Valid characters any c
234. ompliance Optional Power compliance value of sweep source This parameter applies to SMU only Allowable range depends on power compliance range of sweep source For details refer to Chapter 7 hold time Time required for DUT to settle after forcing start value Allowable range is 0 to 655 35s Resolution 10 ms delay time Time required for DUT to settle after stepping the output Allowable range 0 to 65 535 s Resolution 100 us Refer to Setup Screen Reference for setting up these parameters 1 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Figure 1 2 Sweep Measurements Measurement Functions Subordinate Sweep Measurement For subordinate sweep measurement you set up a secondary sweep source VAR2 in addition to a primary sweep source VAR1 After primary sweep is completed the output of secondary sweep source is incremented or decremented by the specified step value then the primary sweep source is swept again Subordinate Sweep Measurement Stoo value Primary N Sweep Source 0 m y Pp E N Start value Be Stop value N Secondary Sweep Source 0 ry Start value gt Time Sweep Start Completion YG03003 To set up the subordinate sweep measurement select the following on CHANNELS CHANNEL DEFINITION screen e VARI function for desired primary sweep source SMU or VSU e VAR2 function
235. on the plotting area In the LINE PARAMETER field select ON to display or OFF to not display Line parameters are the X and Y intercepts and gradient of the analysis lines To display variables on the data variable area In the DATA VARIABLES fields select the secondary softkey for the desired variable Up to two variables can be displayed on the data variable area which is located between the graph area and the marker area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for the 10 pA measurement range Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 15 Quasi static C V Measurements Defining Measurement Conditions To Display List Results 1 Press the Display key in the PAGE CONTROL key group Select the DISPLAY SETUP primary softkey In the DISPLAY MODE field select the LIST secondary softkey gt SP In the LIST area select the secondary softkey of the variables for which you want to list the measurement results When the pointer is in the NAME row the permissible variable names appear in the secondary softkey area To set a variable name select the desired secondary softkey The permissible names are names that you already set up on the CHANNEL DEFINITION USER FUNCTION USER VARIA
236. onditions 4 DISPLAY DISPLAY SETUP O1JAN29 10 58AM Setting the display mode to show measurement results cesestar wove See following in this section i eo e To Display Graphics Results e To Display List Results 9 Executing the measurement See To Execute or Stop Measurement on page 1 29 Also see Chapter 7 for executing self calibration and zero offset A AAA y cancel 4 j g o j oono Oooo S oE o 6 Results GRAPH LIST GRAPHICS SHORT 01JAN29 10 59AM For example displayed graphically am room t a LA 5 dal J an 7 a gt T 0 00 vD vy 200 m div 2 00 BURNER Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 15 Sweep Measurements Defining Measurement Conditions To Define Measurement Units Press Chan front panel key to define the measurement units CHANNELS CHANNEL DEFINITION screen is displayed 1 MEASUREMENT MODE Select SWEEP secondary softkey for sweep measurement VNAME Enter a unique name for voltage variable For example enter Vce for collector emitter voltage If channel does neither V force nor V measurement you can omit VNAME
237. one time Does not clear GRAPHICS or LIST screen That is measurement results are added to the existing results Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 29 Sweep Measurements Making a Measurement Making a Measurement In this section you learn how to execute the measurements with an 4155C 4156C and to display the measurement results graphically Id Vg measurement of a MOS FET is provided as an example You learn step by step how to perform this measurement You measure the device under test DUT by using the measurement circuit as shown in the following diagram SMU2 and SMU3 sweep the same voltage to the gate and drain SMU3 measures the drain current Id The source and substrate are connected to circuit common You should get result similar to the following figure Gate voltage Vg swept from 0 V to 2 V is assigned to X axis VId is assigned to Y1 axis and OVId OVg is assigned to Y2 axis Fa IN T 7 ld vd vid EN a Vg Vd r 64 x 100 A HH 7 a Do SMU3 A Vg G Y SID Y2 _ DSAID 1 alze gouk m i l 7 Or SMU2 2 F E V f ES SMU1 V Yl JO 000 0 000 0 idiv ol OG01024 14860 ar va NOTE For accurate measurements allow the 4155C 4156C to warm up for a minimum of 40 minutes after you turn on the instrument and then execute calibration For the self calibration see Chapter 7 1 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5
238. ons But you can analyze the knob sweep measurement result by quitting knob sweep mode as shown below 1 Select the SETUP COPY primary softkey on the KNOB SWEEP screen 2 Press the Graph List front panel key The knob sweep results are displayed on the GRAPH LIST screen Then you can use analysis functions To Use User Function User function is not available for the knob sweep mode If you want to use user functions in GRAPH LIST screen group after the knob sweep measurements do following before entering to the knob sweep mode 1 Define user functions on CHANNELS USER FUNCTION DEFINITION screen 2 Enter user function names in DATA VARIABLES field of DISPLAY DISPLAY SETUP screen 3 On GRAPH LIST GRAPHICS screen select DISPLAY SETUP primary softkey then set DATA VAR softkey to ON After getting the measurement data on the knob sweep mode and quitting the knob sweep mode as described above the results of user function will be displayed on the GRAPH LIST screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 9 NOTE Knob Sweep Measurements Executing Measurements Executing Measurements You can easily execute the knob sweep measurements as shown below 1 Defines measurement units on the CHANNELS CHANNEL DEFINITION screen 2 Presses the green key and then Single key In the knob sweep mode user functions and user variables are not available See To Use User Function on page 2 9 To use PGU in
239. ons Measurement Time Measurement Time Measurement time depends on integration time measurement range and other measurement conditions and can be expressed by the following formula Measurement time Integration time Overhead time Integration time is the time required for measurement and does not include range changing data compensation and so on which would be the overhead time Integration Time To reduce measurement errors caused by line frequency noise or any other environmental noise source the 4155C 4156C takes some measurement samples and averages them to obtain measurement data The number of measurement samples depends on the integration time Setting a longer integration time increases the number of measurement samples so you can get more accurate measurement data The integration time setting is effective for the all measurement units For the sweep and sampling measurements integration time is set in the INTEG TIME field of the MEASURE MEASURE SETUP screen and selected by using the Integ Time front panel keys Long Medium and Short For the quasi static CV measurements integration time is the value set in the INTEG TIME field of the MEASURE QSCV MEASURE SETUP screen The Short Medium and Long front panel keys have no effect for QSCV mode ADC Zero Function for Long Medium ADC zero function automatically works to cancel the offset of the ADC and extends the integration time to double This function is av
240. ontrol ON status e The E5250A SETUP primary softkey appears Selecting the softkey displays the CHANNELS E5250A CONNECTION SETUP screen e You can access the E5250A setup extension MAT file using the filer function If you disable the E5250A control select the OFF softkey Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 31 NOTE Step 3 Step 4 Step 5 Support Functions Switching Matrix Control To initialize the E5250A In the CONFIG MODE field select the RESET E5250A softkey All the ES250A settings will be initialized To select configuration mode In the CONFIG MODE field select the ES250A configuration mode either AUTO or NORMAL using the softkey Note that changing the mode initializes the E5250A setup except for the configuration mode AUTO Sets auto configuration mode In this mode the installed cards are treated as one card For example if the E5252As are installed in slots 1 to 4 the E5250A works as a 48 output matrix NORMAL Sets normal configuration mode Each card is considered independently Each card works as a 12 output matrix To select port function In the PORT FCTN field select the port function using the following softkeys You cannot use the bias port function and the couple port function simultaneously NO FCTN Disables the port function BIAS PORT Enables the bias port function connecting the input bias port to all output ports that are disconnected from other input port
241. or double sweep linear log Linear or logarithmic sweep For logarithmic sweep select the number steps in one decade as follows LOG10 10 steps in one decade LOG25 25 steps in one decade LOG50 50 steps in one decade Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 5 Sweep Measurements Measurement Functions start Start value of sweep For logarithmic sweep start must not be zero Allowable range of start depends on output range of sweep source For output range of each measurement channel refer to Chapter 7 stop Stop value of single sweep or turning back value of double sweep For logarithmic sweep stop must have same polarity as start and must not be zero Allowable range of stop depends on output range of sweep source For output range of each measurement channel refer to Chapter 7 step e For linear sweep step is step increment of sweep Number of sweep steps is calculated from start stop and step Calculated number of steps must be in range 2 to 1001 For logarithmic sweep step is invalid Number of sweep steps is calculated from start stop and number of steps in one decade which is specified by log parameter Calculated number of steps must be in range 2 to 1001 compliance Compliance value of sweep source This parameter applies to SMU only Allowable range of compliance depends on the compliance range of sweep source For the compliance range of each measurement channel refer to Chapter 7 power c
242. orming measurement in each sweep step as shown in the following figure The step delay time you specify for trigger is the time from when the trigger is output to when the next step occurs This is to make sure the external instrument has enough time to make the measurement Available setting range for the step delay time is Range 0 to 1 s Resolution 100 us Trigger output delay time is shown as T2 in the following figure Delay Time set in TIMING table on MEASURE SWEEP SETUP page 455 4156 l lt gt _ T2 a E Trigger Output re Output External Instrument i fex Tex M _ _ _ gt UGDO4016 12 Ommwx60mmh 12 step delay time set in STEP DELAY field on MEASURE OUTPUT SEQUENCE page Tex measurement time for external instument If the specified T2 is shorter than the measurement time of the 4155C 4156C the 4155C 4156C waits until the measurement completes then outputs the next step 8 46 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Trigger Function Trigger output function of PGU Using the Agilent 41501 A B contains PGUs the 4155C 4156C can output a gate trigger through the 41501A B Ext Pulse Generator Trig Out terminal The trigger signal is synchronized with the PGU output pulses and you cannot control trigger timing The polarity of the trigger is positive
243. ource value UGDO4010 7 50 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Output Sequence Simultaneous Mode The simultaneous mode is available only for the sampling measurements In this mode all enabled units start the specified outputs at the same time and stop the outputs in the opposite order of the OUTPUT SEQUENCE table Default output sequence defined in the OUTPUT SEQUENCE table of the MEASURE OUTPUT SEQUENCE screen is shown below In the default settings output channels stop the output in the opposite order of the following SMUI SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 O SN OS A ogee eT Starting Outputs In the idle state output switches of all units are on and the units output 0 V When moving to the measurement state the units operate as shown below 1 Disabled units keep 0 V output and turn the output switch off where disabled unit means the unit you select the DELETE ROW softkey in the CHANNELS table on the CHANNELS CHANNEL DEFINITION screen 2 Output channels start the output at the same time Stopping Outputs When returning to the idle state the units operate as shown below 1 Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table 2 Disabled units keep 0 V output and turn the output switch on Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 51 Measurement Units and Functions Output Sequence E
244. owever if the pulse output function is used for VAR1 or VARI channels you cannot set power compliance for the VAR1 or VARI channel that is set to pulse output The power compliance setting range for each SMU is as follows HRSMU 1to2W MPSMU 1 to2 W HPSMU 1 to 20 W If you specify I compliance and power compliance for a V sweep source the 4155C 4156C changes the I compliance at every voltage step The I compliance is set to the smaller value of J compliance and Attempt value below See Figure 7 10 a Icomp power compliance step voltage If you specify V compliance and power compliance for an I sweep source the 4155C 4156C changes the V compliance at every current step The V compliance is set to the smaller value of V compliance and Vcomp value below See Figure 7 10 b Vcomp power compliance step current Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 27 Figure 7 10 Figure 7 11 Measurement Units and Functions Compliance Power Compliance Output Area Current Current Compliance A Specified compliance Specified power compliance Output Area Voltage Voltage Voltage Compliance A Specified Y compliance Specified power compliance 7 Output Area Current a For voltage sweep o For current sweep UGDO4018 If you specify power compliance SMUs can be swept at their maximum output limits because the 4155C 4156C
245. r internal memories onto the curve that is presently displayed on the GRAPH LIST GRAPHICS screen This is useful for comparing measurement results Overlay Display Information You can use following information of overlaid curve instead of present information e Axis information e Cursor and marker position x yl y2 e Line x interrupt yl interrupt and gradient y2 interrupt and gradient e List of the data variables Adjusting axes You can use the axis scaling of overlaid plane instead of present scaling Automatic Analysis Function This function can automatically draw up to two lines and position a marker on the plotting area of the graph screen You set up this function on the DISPLAY ANALYSIS SETUP screen This function is performed automatically when measurement finishes e AUTO ANALYSIS secondary softkey is pressed 6 12 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Marker and cursor Display range Line Another graph functions Analysis on the LIST screen Analyzing Measurement Results Manual Analysis Manual Analysis You can position lines markers and cursors by using front panel keys rotary knob and softkeys This section covers the following manual analysis tasks To Specify a Measurement Point on Curve on page 6 14 To Specify between Measurement Points on Curve on page 6 16 To Display or Move Cursor on page 6 18 To Adjust Display Range to Measurement C
246. rce and measure up to 100 V or 100 mA Maximum output power 2 W Output and measurement ranges see MPSMU Medium Power SMU on page 7 9 e HPSMU high power SMU Only for the 41501 A B The 41501A B option 410 or 412 has one HPSMU Force and measure up to 200 V or 1 A Maximum output power 20 W Output and measurement ranges see HPSMU High Power SMU on page 7 12 Kelvin connection is available Each SMU has a compliance feature that limits output voltage or current to prevent damage to your devices When the SMU forces voltage you can specify current compliance When the SMU forces current you can specify voltage compliance For details about the compliance setting range and resolution see Compliance on page 7 23 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 5 Measurement Units and Functions Measurement Units HRSMU High Resolution SMU HRSMU Output and Measurement Ranges Figure 7 3 Current mA UGDO2003 Table 7 1 HRSMU Output Voltage Ranges and Resolutions Output Current Range Output Value P A Compliance Resolution Range 2V 0 lt V lt 2V 100 uV 100 mA 20 V 0 lt V lt 20 V 1 mV 100 mA 40 V 0 lt V lt 40 V 2 mV 50 mA 100 V 0 lt V lt 100 V 5 mV 20 mA 7 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units Table 7 2 HRSMU Measurement Voltage V
247. rce channel starts output until the measurement channel starts measurement The wait time is set on the MEASURE MEASURE SETUP screen To find the measurement time execute the sampling measurement in the same measurement conditions except for the source output value You can find the rough measurement time from the TIME value of the sampling measurement result The delay time and hold time are set on the MEASURE SWEEP SETUP screen and the step delay time is set on the MEASURE OUTPUT SEQUENCE screen The step delay time is available only for sweep measurement mode For the parameters refer to Setup Screen Reference Source output time Td Tsd Step Delay Time Tsd Delay Time Td Td Tsd PE Hold Time Measurement time I e E Wait Time 7 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Vstart Measurement Units and Functions SMU Filter SMU Filter You can set SMU filter to on or off for sampling measurements or stress forcing If filter is on noise and overshoot are decreased but settling time takes longer sampling measurement You set the FILTER field on the MEASURE SAMPLING SETUP screen If you set initial interval to a short time and if filter is set to ON be aware that settling time takes several ms stress force You set the FILTER field on the STRESS STRESS SETUP screen If you set de stress to short stress force time set OFF in this field if you want the stress signal to
248. rement unit defined as VPULSE or IPULSE in the CHANNELS CHANNEL DEFINITION screen For pulsed sweep source set the function FCTN to VAR1 VAR2 or VARI For pulsed constant source set the function to CONST To set up the SMU pulse output source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 Set the source output parameters e For VARI refer to To Set up Primary Sweep on page 1 18 e For VAR2 refer to To Set up Secondary Sweep on page 1 19 e For VARI refer to To Set up Synchronous Sweep on page 1 20 e For CONST refer to To Set up Constant Output on page 1 21 2 SMU PULSE PERIOD Enter the pulse period value 3 SMU PULSE WIDTH Enter the pulse width value 4 SMU PULSE BASE Enter the pulse base value You cannot change UNIT and NAME in this screen To change the values go to the CHANNELS CHANNEL DEFINTTION screen 1 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sweep Measurements Defining Measurement Conditions Pulse Parameters The relation between the PERIOD WIDTH and BASE values are as shown in the following figures Stop Value Step Value Start Value A E Pulse Base j i Hold Time Pulse Width Pulse Period a For Pulsed Sweep Source Output Value 1 7 1 Pulse Base Hold Time Pulse Width Pulse Period b For Pulsed Constant Source SMU outputs the pulses as shown in figure a or figure
249. rity of Voltage compliance The 4155C 4156C automatically sets V compliance polarity to the same polarity as the output current regardless of the specified V compliance polarity There is no compliance for the opposite polarity e Polarity of Current compliance The 4155C 4156C automatically sets I compliance for both the positive and negative polarity regardless of the I compliance polarity However if the output voltage and the current compliance are opposite polarity the Z compliance value is increased by an amount that is 2 5 to 12 of the range value in the lowest range that includes J compliance Figure 7 9 shows the relation of the compliance and output Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 23 Measurement Units and Functions Compliance Figure 7 9 Relation of Compliance and Output como comonance V como V camplance Current Voltage V lt 0 A A Iz0 v o lV comel A HA comp 2 Output Output 2 Voltage Current cn ARA EAS AL como EF 7 a compliance b V camoliance UGDO4017 Current Compliance for COMMON Unit If you set COMMON output mode for the unit current compliance for the unit is automatically set as follows and you cannot change the setting GNDU 1 6 A HRSMU 105 mA MPSMU 105 mA HPSMU 1A Table 7 17 V Compliance Setting Range Unit Output Range a HRSMU 10 pA to 10 mA 0 to 100 V 100 mA 0 lt I lt 20 mA 0 to 100 V 100 mA 20 mA l
250. rom slot 1 If a blank card or another card is in slot 2 3 or 4 the 4155C 4156C ignores the cards installed in those slots as well as the cards in the following slots 2 Set the GPIB address of the E5250A You will define the value later on the 4155C 4156C CHANNELS E5250A PROPERTIES screen 3 Connect the GPIB cable between the E5250A and the 4155C 4156C If an external computer is connected to the same GPIB bus disconnect the GPIB cable from the computer or pass the Active Controller capability to the 4155C 4156C 4 Connect the triaxial cables between the E5250A SMU INPUT connectors and the 4155C 4156C SMU connectors or the 41501 HPSMU MPSMU connectors 5 Connect the coaxial cables between the E5250A AUX INPUT connectors and the 4155C 4156C VSU VMU connectors 41501 PGU connectors or other instruments 6 Connect the triaxial cables between the E5252A output connectors and test fixture or prober via the connector plate 8 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Support Functions Switching Matrix Control 7 Turn the instruments on 8 Set the 4155C 4156C to SYSTEM CONTROLLER as shown below Press the System front panel key and the MISCELLANEOUS softkey then select the CONTROLLER softkey in the 4755C is or 4156C is field on the SYSTEM MISCELLANEOUS screen Table 8 2 Required Equipment aoe eg Description Quantity 4155C 4156C Semiconductor Parameter Analyzer 1 41501 optional
251. s Select the bias port using the BIAS PORT field COUPLE PORT Enables the couple port function that is effective for the kelvin connection Select the coupled ports in the COUPLE PORT STATUS field Connection after port function changed Changing the port function does not change the connection setup of the E5250A However by way of exception changing the port function from the bias port function to the couple port function or no function will disconnect the output ports from the input port that has been used as the bias port 8 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE NOTE Step 6 Step 7 Support Functions Switching Matrix Control To set bias port if you use the bias port function In the BIAS PORT field enter the port number of the E5250A input port to be used as the bias port Available values are to 10 Default value is 10 Connection after input bias port changed Changing the input port number of the bias port will disconnect the output bias ports from the previous input bias port and connect them to the new input bias port To set couple port if you use the couple port function In the COUPLE PORT STATUS field select the ON or OFF softkey to enable disable the couple port The following input ports can be coupled e INPUT1 and INPUT 2 can be coupled to port 1 e INPUT3 and INPUT4 can be coupled to port 3 e INPUTS and INPUT6 can be coupled to port 5 e INPUT7 and INPUTS can be couple
252. s display mode to the graph mode 3 Set the X and Y1 axes information The following values are just an example X axis Y1 axis NAME Vi CAPO1 SCALE LINEAR LINEAR MIN 3 V 36 pF MAX 3V 110 pF This setup is to assign the X axis to V1 and the Y1 axis to CAPO1 DISPLAY DISPLAY SETUP GRAPH Ics DISPLAY MODE erare o LIST GRAPHICS Xaxis Ylaxis y2axis NAME vi CAPO1 SCALE LINEAR LINEAR MIN 3 0000000 V 36 00000pF MAX 3 0000000 V 110 00000pF GRID LINE PARAMETER ON ON DATA VARIABLES DATA DISPLAY RESOLUTION EXTEND GRAPHICS Select Display Mode with softkey or rotary knob B DISPLAY ANLYSIS PREV NEXT SETUP SETUP S PAGE PAGE 4 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE Quasi static C V Measurements Making a Measurement Step 7 Execute the measurement Press the Single front panel key to execute the measurement The 4155C 4156C starts the QSCV measurement After the measurement the measurement results will be as shown in the following example GRAPH LIST GRAPHICS MARKER MARKER 2 900 V 108 508pF F 110 pl MARKER MIN MAX ON INTER CAP01 POLATE OFF DIRECT MARKER 10 09 CURSOR dai MARKER SKIP AUTO ANALY SIS 36 0p 3 00 v Vv 500 m
253. se names must be 6 or less alphanumeric characters First character must be alphabet character To disable a unit Select DELETE ROW softkey The settings for the unit are deleted Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 17 Sweep Measurements Defining Measurement Conditions To Set up Primary Sweep Primary sweep source is the measurement unit defined as VAR1 in the CHANNELS CHANNEL DEFINITION screen To set up the primary sweep source press Meas front panel key The MEASURE SWEEP SETUP screen is displayed 1 VARI SWEEP MODE Select one of the following softkeys to set the sweep mode e SINGLE single sweep mode e DOUBLE double sweep mode VARI LIN LOG Select one of the following softkeys to set the sweep step mode LINEAR linear step mode e LOG XX logarithmic step mode XX specifies the number of steps per decade XX is 10 25 or 50 VARI START Enter the sweep start value VARI STOP Enter the sweep stop value If you select LOG sweep step mode the polarity of stop value must be same as the polarity of start value VARI STEP If you select LINEAR sweep step mode enter the sweep step value This field is not available for the LOG mode VARI COMPLIANCE POWER COMPLIANCE Only for SMU Enter the compliance value and power compliance ON or OFF for the primary sweep source NO OF STEP is automatically calculated from START STOP and STEP values You cannot change UNIT
254. set cancel function using the ZERO CANCEL field To disable the offset cancel function select the OFF softkey The following procedure enables the function a Complete the QSCV measurement setup on the MEASURE QSCV SETUP and MEASURE QSCV MEASURE SETUP screens Remove the DUT from the socket module to open the measurement terminals Press the green front panel key and the Stop front panel key in this order to execute the offset measurement And wait for the measurement completion Select the ON softkey in the ZERO CANCEL field Mount the DUT on the socket module MEASURE QSCV MEASURE SETUP SMU1 HR MEASUREMENT UNIT UNIT FCTN RANGE CNAME INAME SMU2 HR SMU1 HR VARI 1nA CAPO1 LEAKo1 INTEG TIME TIME NPLC Qscv 100ms 5 LEAK 100ms 5 LEAK COMPENSATION ON a ZERO CANCEL ON 5 416pF SMU1 HR Select Measurement Unit with softkey B Qscv MEASURE OUTPUT PREV NEXT SETUP SETUP SEQ s PAGE PAGE Agilent 4155C 4156C User s Guide Vol 2 Edition 5 4 23 Quasi static C V Measurements Making a Measurement Step 6 Set up the results display Set the results display information on the DISPLAY DISPLAY SETUP screen 1 Press the Display front panel key The DISPLAY DISPLAY SETUP screen appears 2 Move the field pointer to the DISPLAY MODE field Then select the GRAPHICS softkey to set the result
255. setup screen do Step 7 Step 8 or Step 9 Then you can change the screen page or execute the measurements Output Port Numbers Output port numbers 1 through 12 are available in NORMAL mode In AUTO mode the available numbers are 1 through 12 with 1 card 1 through 24 with 2 cards 1 through 36 with 3 cards or 1 through 48 with 4 cards Setup Example In the following example the E5250A controls four E5252As in the AUTO configuration mode Input port 6 SMU6 is used as the bias port INPUT 1 SMU1 through INPUT 3 SMU3 are connected to output port 1 through 3 respectively INPUT 6 SMU6 is connected to output ports 4 to 48 INPUT OUTPUT PORT NO PORT SMU1 1 SMU2 2 SMU3 3 SMU4 SMU5 SMU6 4 48 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 39 Step 7 Step 8 Step 9 Support Functions Switching Matrix Control To apply the connection information to the E5250A Select the APPLY SETUP softkey to apply the setup to the E5250A To apply the open to all connections to the E5250A Select the APPLY OPEN ALL softkey to apply the open to all connections on the E5250A The setup on the screen will be also changed to open all connections To cancel the setup changes on the screen Select the CANCEL SETUP CHANGE softkey to cancel the changes you made on the screen The setup on the screen will be changed to the setup prior to the change The E5250A connection setup is not chang
256. sider the step value to be the amount you rotate the knob Then the sweep is performed for the specified number of steps The STEP field on the MEASURE SWEEP SETUP screen has no meaning Initial value 0 Step value automatically set O to VARI range number of steps Number of Steps For the VARI channel you set the number of steps on the KNOB SWEEP screen So for the knob sweep function the number of steps for VAR1 has no relation to the NO OF STEP setting on the MEASURE SWEEP SETUP screen Start Value The start value is always 0 and does not depend on the polarity You cannot set the start value So the START setting on the MEASURE SWEEP SETUP screen has no meaning for the knob sweep function Stop Value Stop value is always step value X number of steps You cannot set the stop value The measurement is continuously repeated from 0 to the stop value until the Stop front panel key is pressed or the KNOB SWEEP screen is changed to another screen Measurement Range If SMU is the measurement channel Compliance range is used That is the measurement range is set to the lowest range that includes the compliance value that is set on the MEASURE SWEEP SETUP screen If VMU is the measurement channel 20 V range is used for the grounded measurement mode and the 2 V range is used for the differential measurement mode Agilent 4155C 4156C User s Guide Vol 2 Edition 5 2 7 Knob Sweep Measurements Measurement Functions
257. st area To change resolution of the data to be displayed In the DATA DISPLAY RESOLUTION field select NORMAL for the resolution shown in the specifications or EXTEND for the ADC full scale resolution For example the data display resolution is 1 fA in NORMAL mode and 10 aA in EXTEND mode for 10 pA measurement range 3 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions To Execute or Stop Measurement e To execute a measurement press e Single key in the MEASUREMENT key group for single measurement Repeat key in the MEASUREMENT key group for repeat measurement Append key in the MEASUREMENT key group for append measurement e To stop a measurement press Stop key in the MEASUREMENT key group Single Repeat and Append Measurement There are three measurement execution modes as follows Single measurement Clears GRAPHICS or LIST screen then executes measurement one time Measurement results are displayed on GRAPHICS or LIST screen Repeat measurement Executes measurements continuously Before each measurement is executed the GRAPHICS or LIST screen is cleared Most recent measurement results are displayed on GRAPHICS or LIST screen Append measurement Executes measurement one time Does not clear GRAPHICS or LIST screen That is measurement results are added to the existing results Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 35 NOTE Sa
258. step 3 performing step 3 displays a long cursor at the center of the plotting area then zoom is performed To return to original scaling Select CANCEL SCALING secondary softkey Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 19 Analyzing Measurement Results Manual Analysis To Center Display at Cursor Location 1 Position cursor at the point where you want to center the plotting area For details about displaying and moving cursor see To Display or Move Cursor on page 6 18 2 Select SCALING primary softkey 3 if both Y1 and Y2 axis are set up Select desired measurement curve by using AXIS primary softkey 4 Select CENTER AT CURSOR secondary softkey The plotting area is centered around the cursor location If no cursor is displayed before step 4 performing step 4 displays a long cursor at the center of the plotting area To return plotting area to original position Select CANCEL SCALING secondary softkey To Draw Line through Two Specified Points 1 Select LINE primary softkey 2 Set LINE SELECT softkey to 1 or 2 Selecting this softkey toggles the setting 3 Set LINE secondary softkey to ON A line and two cursors are displayed Selecting LINE secondary softkey toggles as follows OFF gt ON gt OFF The line mode should be normal So GRAD MODE TANGENT MODE or REGRESS MODE softkeys should not be highlighted If one of these softkeys is highlighted turn off by pressing the softkey 4 Mov
259. t I lt 50 mA 0 to 40 V 100 mA 50 mA lt I lt 100 mA 0 to 20 V MPSMU 1 nA to 10 mA 0 to 100 V 100 mA 0 lt I lt 20 mA 0 to 100 V 100 mA 20 mA lt I lt 50 mA 0 to 40 V 100 mA 50 mA lt I lt 100 mA 0 to 20 V 7 24 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 7 18 Table 7 19 Measurement Units and Functions Compliance Unit Output Range ea eee HPSMU 1 nA to 10 mA 0 to 200 V 100 mA 0 lt I lt 50 mA 0 to 200 V 100 mA 50 mA lt I lt 115 mA 0 to 100 V LA 0 lt I lt 50 mA 0 to 200 V 1 A 50 mA lt I lt 125 mA 0 to 100 V 1 A 125 mA lt I lt 500 mA 0to40 V 1 A 500 mA lt I lt 1 A 0to20 V V Compliance Resolution Unit V Compliance Resolution HRSMU 0 V lt V lt 2 V 100 uV MPSMU 2 V lt V lt 20 V 1 mV HPSMU 20 V lt V lt 40 V 2 mV 40 V lt V lt 100 V 5 mV 100 V lt V lt 200 V 10 mV I Compliance Setting Range Unit Output Range I Compliance Setting Range HRSMU 2V 100 fA to 100 mA 20 V 100 fA to 100 mA 40 V 100 fA to 50 mA 100 V 100 fA to 20 mA MPSMU 2V 1 pA to 100 mA 20 V 1 pA to 100 mA 40 V 1 pA to 50 mA 100 V 1 pA to 20 mA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 25 Measurement Units and Functions Compliance Unit Output Range I
260. t I lt 115 pA 100 pA l nA 10 nA 100 nA 1 mA 0 lt I 1 15 mA 1nA 10nA 100 nA 1 uA 10 mA 0 lt I lt 11 5 mA 10 nA 100 nA l1 uA 10 pA 100 mA 0 lt I lt 50 mA 100 nA 1 uA 10 pA 100 uA 50 mA lt I lt 115 mA 100 nA 1 uA 10 uA 100 uA 1A O lt I lt 1A 1 uA 10 pA 100 LA 1 mA a This column is applied to the auto ranging or the limited auto ranging For fixed ranging maximum mea surement value is Range column value Measurement resolution depends on the integration time setting For Knob sweep measurement see the column of Integration Time 80 us to 560 ps c This column is applied to the sampling measurement that initial interval is set to 480 us or shorter 7 14 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions Measurement Units SMU Pulse Output When SMU is pulsed source set pulse parameters in following ranges Pulse width 0 5 ms to 100 ms 100 us resolution Pulse Period 5 ms to 1 s 100 us resolution where pulse period gt pulse width 4 ms Be aware that if any of following are true pulsed SMU channel may not output the pulse period and pulse width you specified e Measurement range differs from compliance range lowest range that includes compliance e Ranging mode is set to auto range or limited auto range Multi channel measurement is set Compliance Range for Pulsed SMU If you use an SMU as a pulsed source the compliance setting range is as follo
261. t panel key and select the MEASURE SETUP softkey The MEASURE QSCV MEASURE SETUP screen appears Set the MEASUREMENT UNIT table The following values are just an example UNIT SMU1 FCTN VARI RANGE 1nA CNAME CAPO1 INAME LEAKO1 The UNIT selects the measurement unit used to measure capacitance The FCTN just displays the function of the selected unit The range selects the measurement range CNAME and INAME specify the variable name of the capacitance measurement data and the leakage current data where the variable name must be unique The same name must not be assigned for the VNAME and INAME in the CHANNEL DEFINITION screen and for the user function Set the INTEG TIME table The following values are just an example TIME NPLC QSCV 100 ms 5 LEAK 100 ms 5 This table sets the integration time for the capacitance measurement QSCV and the leakage current measurement LEAK independently QSCV 0 04 to 400 sec at 50 Hz line frequency 0 033333 to 333 33 sec at 60 Hz LEAK 0 02 to 2 sec at 50 Hz line frequency 0 016667 to 1 6667 sec at 60 Hz 4 22 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Quasi static C V Measurements Making a Measurement 4 Enable or disable the leakage current compensation function using the LEAK COMPENSATION field To enable the function select the ON softkey To disable the function select the OFF softkey 5 Enable or disable the zero off
262. t panel key to execute the measurement J 00000 o0000 00000 g 00000 9 ooo oooO 0 000 QGO1013 350 You will get measurement results as shown in the following example GRAPH LIST GRAPHICS SHORT 01JAN29 10 59AM MARKER OFF y 100 m 100 m MARKER MIN MAX INTER SQID fo S DSQID POLATE 7 OFF NY IS 10 0m 10 0m div div J MARKER SKIP AUTO Z ANALY Lee sIs 0 00 SS 0 00 0 00 VD vV 200 m div 2 00 CURSOR OFF B AXIS MARKER LINE SCALING DISPLAY SWEEP TIMING Y1 CURSOR S SETUP SETUP SETUP Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 43 Sweep Measurements Making a Measurement 1 44 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Knob Sweep Measurements This chapter explains how to execute knob sweep measurements The knob sweep function is useful in the following cases e to determine a parameter value for normal sweep e to quickly make a rough measurement of a DUT characteristics 2 2 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 2 1 Knob Sweep Measureme
263. table For the actual screen see Figure 1 6 on Front Panel on Keyboard To move the pointer use arrow keys of MARKER CURSOR area use arrow keys To move the cursor to edit in display area use arrow keys of Edit area use Backspace key To enter VS in press period and keys type VS then press Enter VNAME field then Enter To enter IS in press and keys type IS then press Enter INAME field then Enter To set V in select V secondary softkey press Shift F1 keys MODE field To set VAR1 in FCTN field select VAR1 secondary softkey press Shift F4 keys To set VAR1 in FCTN field select VAR1 secondary softkey press Shift F2 keys To disable a unit select DISABLE UNIT secondary softkey press Shift F7 keys Agilent 4155C 4156C User s Guide Vol 2 Edition 5 1 35 Sweep Measurements Making a Measurement ge Figure 1 6 Channel Definition Screen CHANNELS CHANNEL DEFINITION O1JAN29 10 57AM SWEEP MEASUREMENT MODE SWEEP SAM PLING CHANNELS MEASURE STBY SERIES UNIT VNAME INAME MODE FCTN RESISTANCE oscv SMU1 HR vs Is COMMON CONST 0 ohm SMU2 HR VG IG Vv VARI1 SMU3 HR VD ID Vv VARI SMU4 HR DEFAULT MEASURE SMU5 HP 0 ohm SETUP vsul Cewa IO tree MEM1 M vMUL
264. ter stopping a measurement or stress if only the standby channels perform dc or pulse outputs the 4155C 4156C is in the standby operation state To start the standby output press Standby front panel key Then the indicator is lit However if no units are defined as the standby channel the 4155C 4156C cannot be in the standby state To stop the standby output press Standby front panel key The indicator is off When the 4155C 4156C is in the standby state you can change setting parameters for non standby channels without changing the state But if you modify the settings for the standby channels the 4155C 4156C changes from the standby state to the idle state Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 13 Support Functions Standby Function Available Units and Output Values Following table shows the output value of the standby channels in the standby state The specified values are the values that are set on the MEASURE setup screens Unit FCTN MODE SMU VSU PGU VARI Vv START START VAR2 I START VAR VPULSE BASE IPULSE BASE CONST V SOURCE SOURCE SOURCE I SOURCE s VPULSE BASE 7 Specified pulses p IPULSE BASE a VMUs and GNDU cannot be set to the standby channel b Pulses as defined in MEASURE PGU SETUP screen If both PGUs are set to VPULSE the STBY settings of both PGUs must be same Output Values of non Standby Channels Following ta
265. tervals XX is 10 25 or 50 sampling points per decade THINNED OUT secondary softkey for reduced sampling interval of more recent samples by thinning less recent samples In the INITIAL INTERVAL field enter a value for the first sampling interval In the NO OF SAMPLES field enter the number of points at which to sample If you select LINEAR or THINNED OUT in MODE field set the TOTAL SAMP TIME total sampling time which specifies the time from the start of sampling to the end This field is not available for the logarithmic sampling In the TOTAL SAMP TIME field enter a value or select e NO LIMIT secondary softkey for excluding the total sampling time from the sampling completion conditions e AUTO secondary softkey for excluding the total sampling time from the sampling completion conditions and including the number of samples to the completion conditions This softkey is available only for the linear sampling For details about sampling completion conditions see To Define Stop Conditions on page 3 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 27 Sampling Measurements Defining Measurement Conditions The following figure shows the relation between the sampling parameters and sampling measurement Initial Sampling Interval Hold Time a S Siaa TT Number of Samples Output Value UG01009 10060 3 You can set a hold time by entering a number uni
266. testing and adjusting Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage and potential for electrical shock Do not touch terminals that have this symbol when instrument is on Protective conductor terminal For protection against electrical shock in case of a fault Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply WARNING CAUTION CAT 1 OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear panel comply with INSTALLATION CATEGORY I The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personal The caution sign denotes a hazard It calls attention to an operating procedure practice condition or the like which if not correctl
267. the X field enter desired expression to specify X coordinate b Inthe Y field enter desired expression to specify Y coordinate c Goto step 8 If you selected BY DATA CONDITION secondary softkey a In field 4 select secondary softkey to set desired data variable name b In field 5 enter desired expression c In field 6 select AFTER secondary softkey if you want to set a search start condition for finding specified point DISABLE secondary softkey to disable clear the AFTER settings d If you selected AFTER select secondary softkey to enter desired data variable in field 7 e If you selected AFTER enter desired expression in field 8 Specify the other point by step 5 then step 6 or 7 6 38 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related to the measurement curve So if no measurement data satisfy the specified condition the nearest measurement point is used For the meaning of expression that you can enter in step 6 or 7 see Chapter 8 To specify a point between two measurement points Set Interpolate field to ON To disable clear the settings Move the pointer to field 1 then select DISABLE secondary softkey Setup fields disappear Example The following figure shows an example setup to automatically draw a line through two specified points One point is specified by X Y coordinate mod
268. time 10 In the TRAILING TIME field of desired PGU column enter the trailing edge transition time 11 In the IMPEDANCE field of desired PGU column select e LOW secondary softkey for approximately zero ohm output impedance e 50 ohm secondary softkey for 50 ohm output impedance 12 In the PULSE COUNT field do one of the following e Select FREE RUN secondary softkey to force the pulse continuously Or enter the number of pulses to output for sampling measurement only For the pulse period and pulse count values the values you set for PGU1 are also used for PGU2 The following figure shows the relation between pulse waveform and setup parameters Pulse Peak 90 A i fA Leading Time T Time Y k 10 i y Pulse Base ok loo Pulse Width Pulse Period TANTER Delay Time 3 30 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions To modify the UNIT and NAME fields Modify the UNIT and NAME fields on the CHANNELS CHANNEL DEFINITION screen Using PGUs as constant voltage source To use a PGU as a constant voltage source set the desired PGU as follows Vin MODE column on the CHANNEL DEFINITION screen e Desired output voltage value in SOURCE field on MEASURE PGU SETUP screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 31 Sampling Measurements Defining Measurement Conditions To Define Stop Conditions
269. tion as for basic sweep measurement and assume measurement index number 1 for the first step of each primary sweep To return the 2nd order differential coefficient of ID by VG DIFF DIFF ID VG VG Agilent 4155C 4156C User s Guide Vol 2 Edition 5 9 7 Syntax Example Syntax Example Built in Functions EXP EXP Raises e to the power of expression EXP expression To raise e to the power of the ID EXP ID INTEG Performs numerical integration of the Zst expression by the 2nd expression INTEG 1st expression 2nd expression This operation is defined as follows when n 1 6 0 when n gt 1 is presented by the following equation 1 n 2 2 Oy 4y Ma i 2 Where Q integral of Ist expression for measurement index number n ri value of J st expression for measurement index number i x value of 2nd expression for measurement index number i If there are some invalid values in the expressions the invalid values are ignored for the calculation For each primary sweep use same definition as for basic sweep measurement and assume measurement index number 1 for the first step of each primary sweep To integrate ID by VD INTEG ID VD 9 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Syntax Example Syntax Example Built in Functions LGT LGT Returns the logarithm base 10 of expression LGT expression If the expression is 0 Overf low is returned with status o
270. tions Operation States Operation States The 4155C 4156C has the following four operation states e Idle State e Measurement State e Stress Force State e Standby State Idle State In the idle state the 4155C 4156C is not doing anything no measurements forcing current or voltage forcing stress An 4155C 4156C is in the idle state after applying power In this state output switches of all the measurement units are on and all of the units output 0 V In this state you can modify any setting items on the setup screens The following are the conditions of each unit and accessories in idle state SMU 0 V output at 20 V range and 100 uA compliance at 100 pA range VSU O V output at 20 V range PGU 0 V dc output at 20 V range output impedance LOW GNDU O V output 16441A R Box 0 Qis connected 16440A selector switching condition is SMU Measurement State In the measurement state an 4155C 4156C performs sampling or sweep measurements The output switches are off for units that do not have entries in the CHANNELS table of the CHANNELS CHANNEL DEFINITION screen Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 45 Measurement Units and Functions Operation States Stress Force State In the stress force state the 4155C 4156C outputs stress The output switches are off for units that do not have entries in the CHANNELS table of the STRESS CHANNEL DEFINITION screen Standby State In t
271. to the DUT You can use up to two selectors For details about installation of the selectors refer to User s Guide General Information Figure 8 6 shows the simplified circuit diagram of an 16440A selector Simplified Circuit Diagram of the 16440A Selector 16440A Input SMU a ni Channel 1 Sw O m Selected To DUT Input PGU O ono a SW3 Swe CONTROL From41501 D Input Control Logic To 2nd K 164404 Y Output uae o en input SMU a Output anne Selected O To DUT Input PG Swe SW1 SW2 Mechanical Relay SWS Semiconductor Switch uennaond Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 25 NOTE Support Functions SMU PG Selector Control Setup and Switching Conditions Setup of the SMU PG SELECTOR field and switching conditions are explained below CH1 or CH3 for second selector Setup SW1 SW2 SW3 Description SMU ON OFF OFF Connects SMU PGU OFF ON ON Connects PGU PGU OPEN OFF ON OFF Open Disconnected OPEN OFF OFF OFF Open Disconnected CH2 or CH4 for second selector Setup Sw1 Sw2 Description SMU ON OFF Connects SMU PGU OFF ON Connects PGU OPEN OFF OFF Open Disconnected SW1 and SW2 are mechanical relays and SW3 is a semiconductor switch Leakage current and stray capacitance of SW1 and SW2 are
272. tress only when SMU reaches its compliance setting STOP AT ANY ABNORM and STOP AT COMPLIANCE secondary softkeys are displayed only when specified duration is more than 10 s If you set pulse count mode these secondary softkeys are displayed only when pulse period x pulse count is more than 10 s Stress stop function is not effective until stress has been forced for 10 s In the duration mode you set time in seconds for stress forcing In the pulse count mode you set an integer to specify how many pulses to output for stress forcing Abnormal status means the following e SMU reaches its compliance setting e Current of VSU exceeds 100 mA e SMU or VSU oscillates e A D converter overflow occurs e Average current of PGU exceeds 100 mA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 15 Stress Force Defining Stress Conditions To set hold time In the HOLD TIME field set desired value For the meaning of hold time see Stress Force Sequence on page 5 7 Setting the Accumulated Stress Time The ACCUMULATED STRESS field shows the total stress that has been forced If necessary you can change the value in this field If so the ACCUMULATED STRESS field on the STRESS STRESS FORCE screen also changes to the new value Example The following figure shows an example setup of stress condition
273. ts seconds in the HOLD TIME field 3 28 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Defining Measurement Conditions To Set up Constant Output 1 Define CONST units as described in To Define Measurement Units on page 3 26 2 Press Meas key in the PAGE CONTROL key group 3 Select SAMPLNG SETUP primary softkey 4 Inthe SOURCE field of the desired unit in the CONSTANT area enter the desired output value To modify the UNIT NAME and MODE field Modify the UNIT NAME and MODE fields on the CHANNELS CHANNEL DEFINITION screen To set up compliance value for constant output Set desired value in the COMPLIANCE field of the CONSTANT table Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 29 Sampling Measurements Defining Measurement Conditions To Set up PGU Output 1 Define PGU to be VPULSE and CONST as described in To Define Measurement Units on page 3 26 Press Meas key in the PAGE CONTROL key group Select PGU SETUP primary softkey In the PERIOD field of PGU1 enter the pulse period value In the WIDTH field of desired PGU column enter the pulse width value In the DELAY TIME field of desired PGU column enter delay time value In the PEAK VALUE field of desired PGU column enter pulse peak value In the BASE VALUE field of desired PGU column enter pulse base value oo 2 AA pe A In the LEADING TIME field of desired PGU column enter the leading edge transition
274. ts this 10 times every sampling interval INITIAL INTERVAL setting value because of the sampling interval enough longer than the measurement time initial interval oe 2 Ifthe sampling completion condition is not satisfied after 10 points measurement thinned out sampling mode keeps the sampling interval and continues sampling measurement 2 times initial interval interval Discard To store new measurement data thinned out sampling mode discards a data every couple of nearest data as shown above Data is updated every measurement 3 16 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Sampling Measurements Measurement Functions 3 Ifthe sampling completion condition is not satisfied after additional 5 points measurement thinned out sampling mode keeps the sampling interval and continues sampling measurement Data is updated as described in step 2 4 times 2 times initial interval interval interval 3 L ie _ oe Beea Discard 4 This discarding is repeated until the sampling completion condition is satisfied By the end of the measurement 10 measurement result data is stored in memory Parameters To set up the thinned out sampling measurement specify the following parameters on MEASURE SAMPLING SETUP screen See Table 3 2 Parameter Description MODE Sampling mode THINNED OUT INITIAL INTERVAL The sampling interval during thinned out sampling Allowable range 720
275. uV 200 uV 2 mV 20 mV Differential 0 2 V 0 2 uV 2 uV 20 uV 200 uV Measurement 2V 2 uV 20 uV 200 uV 2 mV a mode are available For knob sweep measurement only the 20 V range for Grounded mode and 2 V range for Differential Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement resolution depends on the integration time setting For Knob sweep measurement it is 2 mV for Grounded mode or 200 uV for Differential mode This column applies to the sampling measurement where initial interval is set to 480 us or less 7 19 Figure 7 8 Table 7 14 Measurement Units and Functions Measurement Units PGU Pulse Generator Unit Two PGUs pulse generator units are available which are in the 41501A B Expander Each PGU provides a pulsed output and can also function as a de source Figure 7 8 shows a simplified PGU circuit diagram Simplified PGU Circuit Diagram Output Impedance 50 ohm T WA or Output Switch PGU SOUT aN r pr o i f V COMMON Output Impedance Low UGDO2008 118x50 When you use two PGUs the outputs are always synchronized with each other The PGUs cannot be synchronized with the other measurement units The following describe each pulse parameter For more details open Help screen or refer to Setup Screen Reference manual Pulse Base and Peak Table 7 14 shows the peak and base setting ranges and resolutions PGU output value is
276. ue HPSMU using 100 V range or less Setting value x 2 HPSMU using 200 V range 10 A Setting value HRSMU using 2 V range Setting value x 2 HRSMU using 20 V range or more Setting value MPSMU HPSMU using 2 or 20 V range Setting value x 2 MPSMU HPSMU using 40 V range Setting value x 3 MPSMU HPSMU using 100 V range Setting value x 6 HPSMU using 200 V range 100 uA to Setting value HRSMU MPSMU HPSMU 100 mA 1A Setting value HPSMU a Voltage range is the output range used to force voltage Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 35 Measurement Units and Functions Measurement Time Overhead Time The overhead time is the time required for range changing and so on This time depends on the measurement condition and cannot be specified Major elements of the overhead time are e Range changing time during measurement when measurement ranging mode is set to auto or limited auto e Range changing time at measurement start when the measurement range is less than the compliance value To Specify Source Output Time As shown in the discussion of the overhead time you cannot specify the measurement time However in sweep measurement mode you can specify a source output time that includes the measurement time To keep source output time constant the following conditions must be satisfied e Delay Time gt Wait Time e Step Delay Time gt Measurement time where the wait time is the time after the sou
277. uide Vol 2 Edition 5 6 31 Analyzing Measurement Results Manual Analysis To Overlay an Internal Memory Measurement Curve onto Plotting Area This section explains how to overlay a measurement curve that was stored into an internal memory onto plotting area To store a measurement curve into an internal memory refer to User s Guide General Information 1 Select DISPLAY SETUP primary softkey 2 Set OVERLAY PLANE secondary softkey to the desired memory number Selected measurement curve is overlaid onto plotting area Selecting OVERLAY PLANE secondary softkey toggles as follows OFF 71 52 743 gt 4 OFF To display information of overlay measurement curve Select SHOW OVERLAY INFO secondary softkey The following information of overlay measurement curve overwrites the information of the present curve e axis names and axis scales e cursor and marker coordinates line x yl y2 interrupt and gradient e data variables To display information of original curve again select the EXIT primary softkey To change the present scale to the same scale as overlay curve Select SCALE TO OVERLAY secondary softkey To return to the original scale you need to select SCALING primary softkey then select CANCEL SCALING secondary softkey 6 32 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to overlay a measurement curve that is stored
278. ulse Se es SO Pa A E In TRAILING TIME field enter the trailing edge transition time of pulse The same period you set for PGU1 is also used for PGU2 For the other parameters you can set different values for PGU1 and PGU2 To set other areas of the STRESS STRESS SETUP screen see To Set up Stress Condition Timing on page 5 15 To modify the UNIT and NAME fields Modify UNIT and NAME fields on STRESS CHANNEL DEFINITION screen To set output impedance of PGU1 or PGU2 In the IMPEDANCE field select e LOW secondary softkey to set output impedance to low approximately zero e 50 ohm secondary softkey to set output impedance to 50 Q Agilent 4155C 4156C User s Guide Vol 2 Edition 5 5 17 Stress Force Defining Stress Conditions Delay time The following figure shows the meaning of delay time Peak Value PGUI Base Value a Tne PGU2 th Ses o UGTO1048 86x40 A Delay Time stress start Example The following figure shows an example to set up ac stress STRESS STRESS SETUP 94JANO1 01 30PM STRESS MODE PULSE DURATION UNIT PGUL Pou2 1 0ms NAME PERIOD 10 00ms ACCUMULATED STRESS WIDTH 5 00ms 5 00ms 0 0000s DELAY TIME 0 0
279. um whichever is longer After offset data measurement integration time returns to same setting as before the offset measurement was performed After you perform the offset measurement if you change the ranging mode to 10 nA limited auto or 10 nA fixed and you try to perform the offset measurement again the offset data is not measured for this unit But the previous offset data is effective So the offset cancel can be performed for this unit using the old offset data Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 39 Table 7 25 Table 7 26 Measurement Units and Functions Zero Offset Cancel Ranging Mode Available for Offset Measurement i i Measurement Measurement Mode Unit Available Ranging Mode Range ni Current Measurement HPSMU auto l nA MPSMU 1 nA limited or fixed 1nA HRSMU auto 10pA 10 pA limited or fixed 10pA 100 pA limited or fixed 100 pA 1 nA limited or fixed 1nA Differential Voltage VMU auto limited auto fixed 0 2 V Measurement a Offset data is measured in the measurement range shown above b VMU2 measures voltage in grounded mode to confirm that voltage does not exceed 20 V Allowable Offset Value e Unit reco Allowable Offset Value Mode Range Current HPSMU 1nA less than 1 of range Measurement MPSMU 1nA less than 1 of range HRSMU 1nA less than 1 of range 100 pA less than 1 of range 10pA less than 4 of range Differential Volta
280. unction the INITIAL INTERVAL value must be set to 2 ms or more The INITIAL INTERVAL is the minimum resolution of the sampling interval For details about the INITIAL INTERVAL see Linear Sampling Measurement on page 3 13 Thinned out Sampling Measurement on page 3 16 or Logarithmic Sampling Measurement on page 3 19 To set up the stop condition specify the following parameters on the MEASURE SAMPLING SETUP screen Parameter Description ENABLE DISABLE Enables or disables the stop condition ENABLE DELAY NAME THRESHOLD EVENT EVENT NO 3 10 Delay time in second This is the time from starting sampling measurement to enabling this function Allowable range 0 to INITIAL INTERVAL x 32767 s Resolution INITIAL INTERVAL Name of measurement data or user function to monitor for stop condition Val of EVENT Threshold value at which to stop sampling measurement Th of EVENT Event for stop condition Val gt Th True if NAME parameter value is greater than THRESHOLD value Val lt Th True if NAME parameter value is less than THRESHOLD value Val gt Th True if absolute NAME parameter value is greater than absolute THRESHOLD value Val lt Th Trueif absolute NAME parameter value is less than absolute THRESHOLD value Target value of the count the event occurs true When the count of true is this value sampling is immediately stopped Allowable range 1 to 200 Agilent 41
281. unit executes measurement if it is ready to measure Measurement result data is stored in memory Measurement unit waits next trigger if it is busy or in measurement Repeats steps 5 and 6 until that a sampling completion condition is satisfied Logarithmic sampling mode retains only the measurement data that can plot the data on the logarithmic X axis in almost the same interval Example Operation of Logarithmic Sampling Starts Sampling Hold Time Sampling Interval Discard A N of first decade Se Data of second decade gt gt TIME Measurement jf A 7 y This is the example fey 1 10 decade X to plot LOG10 data y y Vv VY Y 777 4 gt TIME FN First decade Second decade Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 19 Sampling Measurements Measurement Functions TIME Value TIME value of measurement data is determined by MODE INITIAL INTERVAL NO OF SAMPLES and HOLD TIME parameters Where MODE decides number of measurement points in 1 decades For example LOG10 mode obtains 10 data per 1 decade An example to get measurement data in logarithmic sampling measurement is explained below This example assumes the following settings See also Figure 3 2 e MODE LOG10 10 data 1 decade e INITIAL INTERVAL 10 ms e NO OF SAMPLES 20 e HOLD TIME 10 ms e STOP CONDITION D
282. ured by SMU is same as current at measurement point because no current is leaked G Lo a el O OD SDUT Buffer f UGTOI03290Wx40H 10 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Connecting Measurement Devices Using Connector Plate To Measure Low Resistance When you measure a low resistance high current flows through the DUT This high current increases the measurement error caused by the residual resistance of cables To cancel the effect of this resistance you can use Kelvin connections 4 wire which means the force and sense lines are extended separately to the DUT The Kelvin connection is available for the 4156C s HRSMU and the 41501A B s HPSMU Connect the probing needles to the terminals of the connector plate by using test leads or coaxial cables Following instruction uses the coaxial cables 1 Atend of cable connect coaxial center conductor to force terminal of connector plate and connect coaxial outer conductor to guard terminal of connector plate 2 At another end connect coaxial center conductor to tail of the probing needle Never connect the outer conductor at this cable end Extend the outer conductor as close as possible to the probing needle 3 Repeat 1 and 2 for the sense terminal of connector plate 4 Contact the probing needles from force and sense terminals as close as possible to the DUT Example The following example connection can be use
283. ursors are used to specify the position for line drawing or scaling functions on the GRAPH LIST GRAPHICS screen Refer to Line Drawing on page 6 9 and Scaling Functions on page 6 11 You can select a short cursor which is a cross or a long cursor which is a cross with long lines You can move the cursor anywhere in the plotting area by using arrow keys of the Marker Cursor key group Figure 6 3 Cursors on the GRAPH LIST GRAPHICS screen GRAPHILIST GRAPHICS SHORT 93Aug09 06 18PM pe CURSOR 751 2530mv 10 02uA4 10 02uA OFF A A CA MARKER 1 00 1 00 MIN MAX INTER POLATE Te He OFF Le K DIRECT MARKER CURSOR decode decode fdiv Idiv MARKER SKIP AUTO ANALY SIS 100 f 100 f 0 000 VBE Vv 100 m div 1 00 AXIS f LINE SCALING DISPLAY SWEEP TIMING CONST y2 f SETUP__ seTUP__ sETUP__ SETUP UGTO2003 6 8 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Analyzing Measurement Results Analysis Function Line Drawing You can draw up to two lines in plotting area on GRAPH LIST GRAPHICS screen To draw lines you can select one of following four line modes e Normal line mode can draw a line through two cursors cursors e Grad line mode can draw a line through a cursor
284. urve Automatically on page 6 19 To Zoom the Display Range on page 6 19 To Center Display at Cursor Location on page 6 20 To Draw Line through Two Specified Points on page 6 20 To Draw Line through Specified Point with Specified Gradient on page 6 22 To Draw Tangent to Specified Point of Measurement Curve on page 6 24 To Draw Regression Line for Specified Region on page 6 26 To Display and Select a Line on page 6 28 To Display Grid on the Graph on page 6 28 To Change Data Variable on Graph on page 6 29 To Change Range of X or Y Axis Scale on page 6 30 To Change Variable Assigned to X Y1 or Y2 Axis on page 6 31 To Overlay an Internal Memory Measurement Curve onto Plotting Area on page 6 32 To Scroll the LIST screen on page 6 34 To Display or Move Marker on LIST screen on page 6 35 To Change Variables of LIST screen on page 6 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 6 13 Analyzing Measurement Results Manual Analysis To Specify a Measurement Point on Curve 1 Select MARKER CURSOR primary softkey 2 Set MARKER secondary softkey to ON Marker and marker coordinates are displayed Selecting MARKER secondary softkey toggles between ON and OFF 3 if both Y1 and Y2 axis are set up Select the desired marker axis by using AXIS primary softkey The selected marker is highlighted Selecting AXIS primary softkey toggles betwe
285. us to 65 535 s NO OF SAMPLES Number of data to be stored by end of measurement Maximum 10001 If there are multiple measurement units this value must be 10001 number of units or less TOTAL SAMP TIME Total sampling time Does not include HOLD TIME This is the time from the 1st trigger to the sampling completion One of the sampling completion conditions so sampling stops after this time elapses Allowable range NO LIMIT or INITIAL INTERVAL X NO OF SAMPLES 1 sec to 1x 10 sec NO LIMIT Disables the total sampling time sampling completion condition HOLD TIME Hold time This is the time from starting source output to first trigger If this value is 0 first TIME value is 0 Allowable range when INITIAL INTERVAL 2 2 ms 0 to 655 35 s with 100 us resolution Allowable range when INITIAL INTERVAL lt 2 ms 30 ms to 655 35 s with 100 us resolution Agilent 4155C 4156C User s Guide Vol 2 Edition 5 3 17 Table 3 2 Sampling Measurements Measurement Functions Effective Parameter Values INITIAL INTERVAL 720 us to 1 92 ms 2 ms to 65 535 s NO OF SAMPLES Max 10001 number of measurement units TOTAL SAMP TIME NO LIMIT INITIAL INTERVAL X NO OF SAMPLES 1 s to1x 101 s HOLD TIME 30 ms to 655 35 s 100 us resolution 0 to 655 35 s 100 us resolution Stop Condition DISABLE DISABLE ENABLE Measurement Units 1P Max 8 Measurement Range 4 FI
286. without ADC Zero Measurement Range Integration Time max 100 PLC 10 pA Always 100 PLC HRSMU 100 pA Setting value x 10 HRSMU 1nA Setting value x 5 HRSMU Setting value MPSMU HPSMU 10 nA to 100 mA Setting value 1A Setting value HPSMU Integration Time in Medium Mode without ADC Zero Measurement Range Integration Time 10 pA 50 PLC HRSMU 100 pA 10 PLC HRSMU 1nA 5 PLC HRSMU 3 PLC MPSMU HPSMU 10 nA to 100 mA 1 PLC 1A 1 PLC HPSMU 7 34 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 7 24 Measurement Units and Functions Measurement Time Integration Time in Short Mode Integ time 0 96 to 1 92 ms Measurement Integration Range Time Unit and Voltage Range 10pA 10 PLC HRSMU 100 pA 2 PLC HRSMU 1 nA 1 PLC HRSMU Setting value MPSMU HPSMU using 40 V range or less Setting value x 2 MPSMU HPSMU using 100 V range Setting value x 4 HPSMU using 200 V range 10 nA Setting value x 4 HRSMU Setting value MPSMU HPSMU 100 nA Setting value x 2 HRSMU using 2 or 20 V range Setting value x 4 HRSMU using 40 or 100 V range Setting value MPSMU HPSMU using 2 or 20 V range Setting value x 2 MPSMU HPSMU using 40 V range Setting value x 4 MPSMU HPSMU using 100 V range Setting value x 8 HPSMU using 200 V range 1 uA Setting value HRSMU MPSMU Setting val
287. ws e Current Compliance For SMU used as pulsed voltage source you can set current compliance as follows IK QQ N S compliance range SS A E N 20p NY No SY NS mo NX N Sy AAN n 9 2 0 Vp p UGDOZ009 0 lt Vp o lt 2V I gt 2 nA 2 lt Vp p lt 20 V gt 11ME 6 x Vp p 2 22E 6 20 lt Vp p I gt 20 pA Agilent 4155C 4156C User s Guide Vol 2 Edition 5 7 15 Measurement Units and Functions Measurement Units 7 16 Voltage Compliance If you use SMU as pulse current source you can set voltage compliance as follows e When I lt 10 uA voltage compliance must be 2 V or less e When I gt 10 uA voltage compliance ranges are same as in tables on previous pages where meaning of I depends on the pulse output mode See below If SMU is pulsed constant source peak or base value whichever has larger absolute value If SMU is pulsed sweep source start or stop value whichever has larger absolute value Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Measurement Units and Functions VSU Voltage Source Unit Figure 7 6 shows a simplified VSU circuit diagram Figure 7 6 Simplified VSU Circuit Diagram Measurement Units Voltage Source Te COMMON Output Swite UGDO2006 VSU can force up to 20 V with 1 mV resolution Only range available is 20 V range so output range is automatically set to 20 V Current compliance
288. ws an example to change the LIST variables GRAPH LIST LIST SHORT 98Aug09 06 18PM MARKER ON VF IF lt v A DIRECT 4 1500000 MARKER 1 15000 Se sabtndd 7 7 6 650000p MARKER 14 80000p SKIP DIF 575 00000 A V B SPREAD RE SWEEP TIMING CONST SHEET SETUP SETUP SETUP SETUP UGTO2014 100x80 6 36 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE Analyzing Measurement Results Automatic Analysis Automatic Analysis You set up automatic analysis before the measurement by using the DISPLAY ANALYSIS SETUP screen Then after measurement is performed the marker and lines are automatically positioned according to automatic analysis setup This section covers the following automatic analysis tasks e To Draw Line by Specifying Two Points on page 6 38 e To Draw Line by Specifying Gradient and One Point on page 6 40 e To Draw Tangent to Specified Measurement Point on page 6 42 e To Draw Regression Line by Specifying Two Points on page 6 44 e To Display Marker at Specified Point on page 6 47 Execution Timing of the Automatic Analysis Function You set up automatic analysis on the DISPLAY ANALYSIS SETUP screen Automatic analysis function is executed e after a measurement is executed by Single or Append front panel key e when the Stop front panel k
289. x to SMUs other than described above resistance values are not compensated for automatically You need to compensate for the resistance values manually such as by using a user function or calculation in the IBASIC program To perform automatic compensation of R Box the 4155C 4156C automatically uses 1 SMU to measure current through the R Box So if the SMU forces voltage and monitors voltage value or use the monitored value for user function calculation the 4155C 4156C need additional 1 measurement channel other than the measurement channels defined in the CHANNELS CHANNEL DEFINITION screen 8 20 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Table 8 1 Support Functions R BOX Control Circuit Diagram Figure 8 5 shows a simplified circuit diagram of an 16441A R Box Table 8 1 shows switching conditions for each setting Switching Conditions of the 16441A R Box Switches Settings Swl Sw2 Sw3 Sw4 0Q ON ON OFF OFF 10 KQ OFF OFF OFF ON 100 KQ OFF OFF ON OFF 1 MQ OFF OFF OFF OFF Resistance is switched before and after measurement state In the standby state the stress state and the idle state 0 Qis connected Agilent 4155C 4156C User s Guide Vol 2 Edition 5 8 21 Support Functions R BOX Control
290. xample Output sequence in the following conditions is shown in Figure 7 14 e Units available SMU1 to SMU 4 VSU1 to VSU2 e Units disabled SMU4 and VSU2 e Output sequence No change from the default setting Figure 7 14 Default Output Sequence Example for the Simultaneous Mode Measurement State Idle State Sampling Measurement Mode lt gt x Idle State SMU4 disabled ___eescccceece VSU2 disabled epececeoon SMU4 2 COMMON a ae a gt SMU2 CONST SMU3 CONST A VSU1 CONST 1 source and common channels output simultaneously 4 an order that channels retuntooV outout switch is off eos channel outputs a specified source value UGDO4011 7 52 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 Exceptions Measurement Units and Functions Measurement Sequence Measurement Sequence The 4155C 4156C performs measurements for the variables or user functions set to the following entry fields on the DISPLAY DISPLAY SETUP screen Then measurements will be performed in the following order For the user functions measurements will be performed for the variables defined in the functions 1 NAME for X axis of the GRAPHICS table NAME for Y1 axis of the GRAPHICS table NAME for Y2 axis of the GRAPHICS table NAME for No 1 of the LIST table NAME for No 2 of the LIST table NAME for No 3 of the LIST table NAME for No 4 of the LIST table
291. y performed or adhered to could result in damage to or destruction of part or all of the product e Herstellerbescheinigung GEAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 e Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70dB operator position normal operation per ISO 7779 6 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 NOTE This ISM device complies with Canadian ICES 001 Cet appareil ISM est conforme Hla norme NMB 001 du Canada Printing History Edition 1 Edition 2 Edition 3 Edition 4 Edition 5 January 2001 June 2001 December 2001 January 2003 August 2003 Agilent 4155C 4156C User s Guide Vol 2 Edition 5 In This Manual This manual provides information for measurement and analysis functions of Agilent 4155C 4156C and consists of the following chapters e Sweep Measurements Describes how to perform sweep measurements e Knob Sweep Measurements Describes how to perform knob sweep measurements e Sampling Measurements Describes how to perform sampling measurements e Quasi static C V Measurements Describes how to perform quasi static C V measurements e Stress Force Describes how to perform stress force Stress function is effective for the reliability testing of semiconductor devices e Analyzing Measurement Results Describes how to analyze measurement results manually and automatically e Measurement Units and Functions Provides informat

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