MAX300 Series NanoMax 3-Axis Flexure Stage User Guide
Contents
1. 14 HAO0094T Rev 11 April 2011 MAX300 Series 3 Axis Flexure Stages 4 8 2 External Piezo Actuators T I T LL 26 0 4 DRV120 82 0 nominal nominal DRV181 126 0 nominal reach Fig 4 5 External piezo actuators 4 8 3 Modular Drives all dimensions in millimetres inches 112 5 4 43 42 0 1 65 DRV001 26 0 4 1 02 0 16 stepper motor drive nominal reach 28 7 nominal reach DRV3 micrometer Lt differential drive 0 31 8 0 Travel 27 5 1 88 t DRV004 O 19 0 75 e thumbscrew drive 1 02 0 16 nominal reach Fig 4 6 Dimensions modular drives ORLAES i5 Chapter 4 4 8 4 NanoMax 3 Axis Stage all dimensions in mill imetres inches 30 11 Kaes 1 18 0 43 42 6 30 cia E nem O or 3 0 56 5 87 3 43 0 12 _ ee 3 86 112 93 8 66 T dh 4 41 105 6 4 16 HO e LL 17 4 0 69 105 6 4 16 4 8 0 19 93 3 66 L 62 5 246 22. Table 3 1 Standard configurations for motor drives Maximum Velocity 2 5 mm s Minimum Velocity 1mm s Slope 1 s2 Backlash control 1 Backlash distance 0 01 mm Mode Linear Microsteps to units 40000 Offset 3mm Minimum position 0 00 mm Maximum position 4 00 mm p nmm um m us no ve Eu m m a mechanical stop at a position dependent on the axis to which it is attached The design is such that occasional driving into the stop will not cause any damage If the axis is driven towards the ve limit switch at a certain position the platform stops moving while the drive itself continues to move until the limit switch is reached The drive must then be moved positively by a certain distance before the platform begins to move This distance is just less than the offset When creating a program to control the NanoMax it is preferable to avoid running into the ve limit 3 3 Piezo Actuators Piezo actuators are used to give nanometric positioning of the top platform over a range of 20 microns 40 um or 100 um if external piezo actuators are used They can also modulate the position of the platform at high frequency On a piezo actuated NanoMax position feedback may be incorporated on the linear axes to enhance the repeatability and linearity of piezo motion The piezo actuated NanoMax should be used together with one of the Thorlabs piezoelectric controllers see the handbook for
3. fine adjustment moving plate S 7 coarse adjustment mounting bush drive rod fixed body Fig 4 1 Micrometer drive inserted into mounting bush 4 5 Orienting the Moving Platform The stage is normally oriented such that the X axis is the optical axis If it is necessary to change the orientation for left or right handed use the Y axis becomes the optical axis as shown in Fig 4 2 The Z axis is always vertical Optical axis Fig 4 2 Platform orientation NENNEN 12 HAO0094T Rev 11 April 2011 MAX300 Series 3 Axis Flexure Stages 4 6 Mounting Equipment Caution When attaching accessories e g fiber holders to the top platform or angle brackets e g AMA007 and AMA009 to the side of the unit do not use long bolts which protrude into the internal mechanism as this could cause damage to the internal flexures The weight attached to the moving platform must not exceed 1 kg Do not apply excessive forces to the moving platform Thorlabs manufacture a variety of fibre chucks holders and fixtures to fit the NanoMax stage However custom hardware can be designed using a tongue in groove arrangement and the cleats provided see Fig 4 3 for a typical fixture all dimensions in mm optical axis 3 0 0 12 slot each side for mounting cleats typical P 3 0 b
4. 6 85221 Dachau Germany Tel 49 0 8131 5956 0 Fax 49 0 8131 5956 99 www thorlabs de email Europe thorlabs com UK and Ireland Thorlabs Ltd 1 Saint Thomas Place Ely Cambridgeshire CB7 4EX Great Britain Tel 44 0 1353 654440 Fax 44 0 1353 654444 www thorlabs de email sales uk thorlabs com Support techsupport uk thorlabs com France Thorlabs SAS 109 rue des C tes 78600 Maisons Laffitte France Tel 33 0 970 444 844 Fax 33 0 811 381 748 www thorlabs de email sales fr thorlabs com Scandinavia Thorlabs Sweden AB Box 141 94 400 20 G teborg Sweden Tel 46 31 733 30 00 Fax 46 31 703 40 45 www thorlabs de email scandinavia thorlabs com Japan Thorlabs Japan Inc Higashi Ikebukuro Q Building 1st Floor 2 23 2 Toshima ku Tokyo 170 0013 Japan Tel 81 3 5979 8889 Fax 81 3 5979 7285 www thorlabs jp email sales thorlabs jp China Thorlabs China Oasis Middlering Centre 3 Building 712 Room 915 Zhen Bei Road Shanghai China Tel 86 0 21 32513486 Fax 86 0 21 32513480 www thorlabs com email chinasales thorlabs com DR E 23 Thorlabs Inc 435 Route 206 North Newton NJ07860 USA Tel 1973 579 7227 Fax 19733003600 www thorlabs com Thorlabs Ltd Saint Thomas Place Ely Cambridgeshire CB7 4EX UK Tel 44 0 1353 654440 Fax 44 0 1353 654444 www thorlabs com 24
5. and differential micrometer drives MAX314D and MAX314D M NanoMax stage with feedback piezo actuator and differential micrometer drives MAX343 and MAX343 M NanoMax stage with stepper motor drives MAX342 and MAX342 M NanoMax stage with piezo actuator and stepper motor drives MAX341 and MAX341 M NanoMax stage with feedback piezo actuator and stepper motor drives MAX303 and MAX303 M NanoMax stage only MAX302 and MAX302 M NanoMax stage with piezo actuator MAX301 and MAX301 M NanoMax stage with feedback piezo actuator 166038 SMC connector lead 134667 LEMO connector lead 131030 Mounting cleat 120992 Cable clamp ha0094T Handbook Chapter7 Regulatory 7 1 Declarations Of Conformity 7 1 4 For Customers in Europe This equipment has been tested and found to comply with the EC Directives 89 336 EEC EMC Directive and 73 23 EEC Low Voltage Directive as amended by 93 68 EEC Compliance was demonstrated by conformance to the following specifications which have been listed in the Official Journal of the European Communities Safety EN61010 2001 Installation Category II Polution Degree Il EMC EN61326 1997 7 1 2 For Customers In The USA This equipment has been tested and found to comply with the limits for a Class A digital device persuant to part 15 of the FCC rules These limits are designed to provide reasonable protection against harmful interf
6. has a 7 pin LEMO connector for each feedback channel see Fig 2 1 A corresponding number of leads for connection to the Thorlabs piezoelectric controllers are also supplied The piezo actuated models deliver 30 microns of travel with a coaxial SMC connector for each piezo channel The pin functions for the Lemo connectorare detailed below Pin Description 15V Oscillator OV Sig Out Sig Out 15V Travel on N Fig 2 3 Feedback Lemo connector pin functions ORLABS Chapter 2 75V DC MAX DRIVE VOLTAGE Auen PIN MAX303 e Fig 2 4 MAX303 NanoMax without piezo actuation The NanoMax 303 has no electrical connections 2 2 2 Drives and Actuators There are three types of drive available for the NanoMax a motorized drive as shown in Fig 2 5 and two manual drives as shown in Fig 2 6 In addition external piezo actuators are available to give an additional 20 um or 801m piezo travel see Fig 2 7 The DRV001 stepper motor drive must be used in conjunction with the BSC benchtop driver or the MST601 control module It cannot be driven by the TST001 T Cube driver Fig 2 5 DRV001 NanoStep motor drive HAO0094T Rev 11 April 2011 MAX300 Series 3 Axis Flexure Stages DRV3 differential micrometer drive DRV004 thumbscrew drive Fig 2 6 Manual Drives These external piezo actuators can be fitted in line wi
7. has been designed to integrate seemlessly into the Thorlabs Modular Electronic System and provide nanometric positioning on three orthogonal axes It is suited to the alignment of optical fibres waveguides optoelectronic packages and any other high resolution alignment or positioning application including general purpose laboratory tasks The innovative flexure design combined with the system of modular drives offers exceptional performance and flexibility Three types of drive are available the DRV001 stepper motor drive the DRV3 differential micrometer and the DRV004 thumbscrew Also available are two external piezo actuators which increase the piezo travel to 40 um or 100 um 2 2 Component Identification 2 24 NanoMax Stage The NanoMax TS 3 axis flexure stage is available in three versions piezo actuated with feedback on all axes piezo actuated without feedback and without piezo actuation as shown in Fig 2 1 to Fig 2 4 Se XN MAX301 CAUTION 75 V DC MAX SMC e e Fig 2 1 MAX301 NanoMax piezo actuated stage with feedback on all axes MAX300 Series 3 Axis Flexure Stages A P N MAX302 75 V DO MAX DRIVE VOLTAGE SMC connectors Fig 2 2 MAX302 NanoMax piezo actuated stage without feedback The piezo actuated models deliver 20 microns of travel each piezo channel has a coaxial SMC connector see Fig 2 1 and Fig 2 2 In addition the NanoMax 301
8. 1 0 83 87 0 3 43 98 0 3 86 Fig 4 7 Dimensions NanoMax 3 axis stage ssrrF nc s nsvOEO siEOIIUIAOVnsOIOIm m E HAO0094T Rev 11 April 2011 16 MAX300 Series 3 Axis Flexure Stages Chapter5 Specifications Weight without drives 800 g Load capacity 1 kg Travel Manual coarse and motor4 mm Manual fine 300 um Piezo20 micron Resolution Manual coarse 0 5mm per revolution Manual fine 50um per revolution Motor0 06 um min incremental movement Piezo without feedback 20 nm Piezo with feedback 5 nm 80 micron Arcuate displacement maximum The resolution of a manual drive corresponds to a 0 5 degree adjustment of the thimble the actual resolution obtained depends on the skill of zthe user The resolution of the motor drives is the smallest step that can be executed i e 1 microstep The resolutions of the piezo actuators are those typically obtained using Thorlabs conirollers Power supply Piezoactuated NanoMax Nominal maximum input voltage 75 V Absolute maximum input voltage 100 V Stepper Motor Maximum input voltage 24 V Caution The NanoMax should only be used in conjunction with the appropriate Thorlabs Piezoelectric Controllers DR LES 17 Chapter6 Parts and Consumables 6 1 Parts List MAX316D and MAX316D M NanoMax stage with differential micrometer drives MAX315D and MAX315D M NanoMax stage with piezo actuator
9. 19 7 1 Declarations Of Conformity 19 Z 2 Waste Electrical and Electronic Equipment WEEE Directive 20 Chapter 8 Thorlabs Worldwide Contacts 23 2 HAO0094T Rev 11 April 2011 Chapter1 Safety 1 1 Safety Information For the continuing safety of the operators of this equipment and the protection of the equipment itself the operator should take note of the Warnings Cautions and Notes throughout this handbook and where visible on the product itself The following safety symbols may be used throughout the handbook and on the equipment itself Shock Warning iven when there is a risk of injury from electrical shock Given when there is a risk of injury to users Caution Given when there is a risk of damage to the product Clarification of an instruction or additional information 1 2 General Warnings Warnings If this equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired In particular excessive moisture may impair operation Spillage of fluid such as sample solutions should be avoided If spillage does occur clean up immediately using absorbant tissue Do not allow spilled fluid to enter the internal mechanism DR E Chapter2 Introduction 2 1 Description of the NanoMax TS 3 Axis Flexure Stage The NanoMax 3 axis flexure stage
10. ORR L AN PSS D MAX300 Series NanoMax 3 Axis Flexure Stage User Guide Contents Chapter KT E 3 7 Safety Information WEE 3 1 2 General Warnings u 3 Chapter 2 Introduction U u u u u uu u 4 2 1 Description of the NanoMax TS 3 Axis Flexure Stage 4 2 2 Component Identification 4 Chapter 3 Operation J U u uuu u u u 8 3 1 Manual Differential Drives and Differential Micrometer Drives 8 3 2 NanoStep Motor Drives u 8 KREE 9 Chapter 4 Installation U u u u enne nennen nnn nnns 10 E Welte GE 10 4 2 Attaching to a Work Surface 10 4 3 Calibration of Motor Drives u 10 4 4 Fitting and Removal of Drives seen 11 4 5 Orienting the Moving Platform sss 12 4 6 Mounting Equipment nennen nnne u u 13 47 Tra spornaton EE 13 4 8 Dimensions E EE EEN REE 14 Chapter 5 Specifications l l u u u u u 17 Chapter 6 Parts and Consumables l 18 6 1 Pans EISE sU UR RO guest tee 18 Chapter 7 Regulatory u
11. ation enables the server to correct for any mechanical errors inherent in the System Mechanical components such as the leadscrew and linkages can be machined only within a certain tolerance e g the leadscrew may be nominally 1mm but actually 1 0005mm giving a 0 5 micron error In practice these errors accumulate from a number of sources however they are repeatable and therefore can be compensated During calibration the total positional error is measured at a large number of points and these errors are stored as a look up table LUT The LUT is saved as a calibration file one file for each axis on a particular stage These files are then linked to the appropriate axis as part of the Stage association process performed using the APT Config utility Whenever the stage is moved the LUT is consulted to ascertain the precise movement required to achieve the demanded position MAX300 Series 3 Axis Flexure Stages When the stage is calibrated at the factory the stepper motor controller channel number motor stage and axis are configured in a certain manner For the calibration to be effective it is important to re assemble the stage with the motors fitted to the same axis for which they were calibrated This information is contained in the table below Furthermore the correct calibration files must be associated with the correct stage axis In this regard it is important to confirm what stage axes are connected to particular channel
12. erence when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense Changes or modifications not expressly approved by the company could void the user s authority to operate the equipment ORLAES Chapter 7 7 2 Waste Electrical and Electronic Equipment WEEE Directive 7 21 Compliance As required by the Waste Electrical and Electronic Equipment WEEE Directive of the European Community and the corresponding national laws we offer all end users in the EC the possibility to return end of life units without incurring disposal charges This offer is valid for electrical and electronic equipment Sold after August 13th 2005 marked correspondingly with the crossed out wheelie bin logo see Fig 1 Sold to a company or institute within the EC currently owned by a company or institute within the EC Still complete not disassembled and not contaminated Fig 7 1 Crossed out wheelie bin symbol As the WEEE directive applies to self contained operational electrical and electronic products this end of life take back service does not refer to other
13. is 3 0 0 12 1 3 0 05 typical 14 55 0 57 2 95 0 12 32 0 1 26 Fig 4 3 Typical fixture view along X axis length as required 4 7 Transportation Caution The drives should be removed before transporting the NanoMax When packing the unit for shipping use the original packing If this is not available use a strong box and surround the NanoMax with at least 100 mm of shock absorbent material ORLAES 5 Chapter 4 4 8 Dimensions 4 8 1 Top Platform all dimensions in millimetres 1 6 0 06 3 0 0 12 inches 4 0 0 16 60 0 2 36 3 Pitches of 15 00 059 45 0 17006 170067 03 1000039 10 0 0 39 el LJ la Ie O zg slg e O SE 19 SU IN e a Ty s CY S io WEI JA 8 3 21 o IIS 531021 531021 2000029 200 079 30 0 1 18 3 00 0 12 60 2 36 rs 0371 4 A L L EEN F 20 _ oe 60 eU 238 079 i ADA holes M3 6 32 UNC Product No A B AMA001 28 1 10 12 0 47 35 1 38 12 0 47 AMA005 45 1 77 14 0 55 extended top platform Fig 4 4 Dimensions top platform LI
14. products such as pure OEM products that means assemblies to be built into a unit by the user e g OEM laser driver cards components mechanics and optics left over parts of units disassembled by the user PCB s housings etc If you wish to return a unit for waste recovery please contact Thorlabs or your nearest dealer for further information 7 2 2 Waste treatment on your own responsibility If you do not return an end of life unit to the company you must hand it to a company specialized in waste recovery Do not dispose of the unit in a litter bin or at a public waste disposal site 20 HAO0094T Rev 11 April 2011 MAX300 Series 3 Axis Flexure Stages 7 2 3 Ecological background It is well known that WEEE pollutes the environment by releasing toxic products during decomposition The aim of the European RoHS directive is to reduce the content of toxic substances in electronic products in the future The intent of the WEEE directive is to enforce the recycling of WEEE A controlled recycling of end of life products will thereby avoid negative impacts on the environment ORLAES T 22 Chapter8 Thorlabs Worldwide Contacts USA Canada and South America Thorlabs Inc 435 Route 206 Newton NJ 07860 USA Tel 973 579 7227 Fax 973 300 3600 www thorlabs com www thorlabs us West Coast email feedback thorlabs com Support techsupport thorlabs com Europe Thorlabs GmbH Hans B ckler Str
15. s on particular motor units It is then a simple task to use the APT Config utility to associate the correct calibration file with a particular serial numbered hardware unit and channel The use of a calibration file is optional Without it the repeatability and resolution of the stage are unaffected but no compensations are made to enhance the accuracy Details on assigning a calibration file are contained in the APTConfig On Line Helpfile Table 4 1 Calibration details NanoMax serial number Axis Motor Serial number Calibration File Remarks X Y Z 4 4 Fitting and Removal of Drives This section is applicable only to Part Numbers MAX301 MAX302 and MAX303 The following procedure details how to fit drive to the NanoMax 300 stage micrometer drive is shown for illustration purposes but the procedure is equally applicable to motor or thumbscrew actuators 1 For manual drives rotate the coarse adjuster counter clockwise a few turns to retract the drive rod For motor drives retract the drive rod by turning the manual adjuster clockwise Then referring to Fig 4 1 on the next page 2 Insert the drive into the mounting bush 3 Tighten the knurled locking ring until finger tight E remove a a reverse um mmm When removing a motor drive rotate only the locking ring do not rotate the motor body Chapter 4 mounting lock ring coarse adjustment cet mo locking screw
16. th the standard drives described on the previous page The DRV120 provides an additional 20 um of piezo travel The DRV181 gives 80 um of travel DRV120 External piezo actuator with feedback DRV181 External piezo actuator without feedback Fig 2 7 External piezo actuators Chapter3 Operation 3 4 Manual Differential Drives and Differential Micrometer Drives 3 1 4 Adjusting Micrometer Drives Turn the coarse adjustment clockwise until the platform of the NanoMax begins to move By use of the fine adjustment sub micron resolution is now achievable 3 1 2 Reading Micrometer Drives 50 um per rev 1 0 um per division coarse adjuster 8 mm N 4 mm on stage fine adjuster 300 um Fig 3 1 Reading micrometer drives 3 2 NanoStep Motor Drives When used together with a Thorlabs stepper motor Controller the NanoStep motor drives allow fully automatic control of the NanoMax Basic steps in controlling the stage are as follows 1 Set commands to configure each axis setting velocities accelerations etc see the handbook for relevant stepper motor controller 2 Move each axis to its home position to establish a zero datum 3 Set commands to move each axis by relative and absolute amounts see APTServer Helpfile A default configuration is set at the factory and stored in the non volatile memory of the motor controller see Table 3 1 MAX300 Series 3 Axis Flexure Stages
17. the relevant piezoelectric controller The NanoMax monitors the ambient temperature using thermistors and applies small movements to the stage to compensate for the expansion and contraction of metals within the stage Note that this compensation is active only when the associated piezo controller is set to closed loop feedback on mode see the relevant piezo controller handbook for more details on the operation of piezo actuators OR LES Chapter4 Installation 4 4 Unpacking um E m Ze unit was e E use in PE transportation nce removed from its packaging the NanoMax is easily damaged by mishandling The unit should only be handled by its base not by the top platform or any attachments to the top platform 4 2 Attaching to a Work Surface The base of the NanoMax is provided with a number of fixing holes and slots for attachment to metric or inch optical tables as supplied by Thorlabs and other manufacturers Bolting the unit down minimizes the risk of damage from dropping When mounting the NanoMax close to other equipment ensure that the travel of the moving platform is not obstructed If the moving platform is driven against a solid object damage to the internal flexures could occur The range of travel on each axis is 4 mm total that is 2 mm about the nominal position 4 3 Calibration of Motor Drives This section is applicable only to motor drives when a calibration has been requested Calibr
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