CMS1500 Gas Mass Flow Meter User's Manual
Contents
1. Flowrate L min standard The graph shows the data in air The values for the gases other than air can be obtained by multiplying the specific gravities shown in the table below Gas type Specific gravity With air as 1 0 Example The primary pressure is 20 kPa and the flowrate is 600L min the pres sure loss for argon is calculated as follows From the graph of CMS1500 the pressure loss is about 950 Pa when the primary pressure is 20 kPa and the flowrate is 600L min Multiply this value by 1 38 the specific gravity of argon and the result is 950 X 1 38 1311Pa 23 Revision History Date 01 08 CP SP 1119E 1st Edition qo 0212 andEdition _ Fully revised by addition of CMS1500B model 1 In features high rangeability added 3 7th caution corrected 3 In mounting position new illustration added 17 Measurement accuracy temperature characteristics pressure characteristics changed 20 Pressure loss added Yamatake Corporation Advanced Automation Company 1 12 2 Ravvana Fujisavva Ranagavva 251 8522 Japan URL http www azbil com Printed on recycled paper 07 azbil Specifications are subject to change without notice Printed in Japan 1st Edition Issued in Aug 2001 C 4th Edition Issued in Apr 20072. Storage temperature range 20 to 70 C Operating humidity range 10 to 90 RH condensation not allowed Connection aperture Rect Body material Aluminum Cover material Polycarbonate resin Mounting position Horizontal mounting Top surface must not face down If this device is mounted vertically drift may cause erroneous measurement when the actual flow rate is zero For details contact Yamatake Corporation Standard compliance EN61326 1 1997 A1 1998 A2 2001 A3 2003 Mass Approx 3kg 1 The following table shows the maximum measured flowrate and output volt age for each gas type The output at the maximum measured flowrate is indicated as the voltage Gas type Flowrate Output voltage Setup display L min standard V resolution L min N Air Nitrogen 1500 A Argon 1500 User specified 1500 L min x Gas conversion factor 5 5 5 5 2 Measurement accuracy in the operating temperature and gas temperature of Ds 3 Amount of change on a flowrate referenced to 23 C in 101 325kPa 4 Amount of change on a flowrate referenced to 101 325kPa in 23 C 21 Chapter 6 SPECIFICATIONS E External dimensions 22 127 4 M5 depth 10min Unit mm mM Pressure loss Chapter 6 SPECIFICATIONS CMS1500 4500 4000 3500 3000 Primary pressure 20kPa 2500 2000 Pressure loss Pa 1500 1000 500
3. EV2 ve av Tn io 7 XI p al Cd X al HI we Lag 0 Um 1 j7 al ar i a al Ow Tn al ON delay setting Disabled Valid only when function EV 1 ON ais Set to 4 i Or id ON delay setting Disabled Valid only when function EV2 ON H is set tof for ae Event standby Disabled Valid only when function setting ON es or 4 is set to Wc gt Page 17 Gas type Air nitrogen When gas type is changed selection Argon sometimes flowrate measure Carbon dioxide CO2 ment rate changed User specified gt Page 20 O to 1500L min For details Page 15 0 to 900L min 0 to 600L min 0 to 300L min Desired scaling O to 5V Analog output scaling 7 En a Li Re 4 an N 7 a al at a al 7 nga Make sure that the selected analog output type matches the input type of the receiving device Analog output type selection 4 to 20mA Reference GG to Oto 35 C in 1 C intervals temperature 35 101 325kPa 1atm standard Low flow cutoff No low flow cutoff Cutoff below the rated minimum display 15L min 15L min 37 5L min 75L min If gas type function setup 76 is set to user specified 15 the low flow cutoff is the amount set here multiplied by Ni w ba nan Ee CF the gas type conversion parameter setup F 08 7 a and 7 are the same value h Chapter 4 METHOD OF
4. No CP SP 1119E CMS1500 Gas Mass Flovv Meter User s Manual Thant you for purchasing the CMS1500 Gas Mass Flow Meter This manual contains information for ensuring correct use of the CMS1500 It also provides necessary information for installation maintenance and troubleshooting This manual should be read by those who design and maintain devices that use the CMS1500 Be sure to keep this manual nearby for handy reference Yamatake Corporation RESTRICTIONS ON USE This product has been designed developed and manufactured for general purpose application in machinery and equipment Accordingly when used in applications outlined below special care should be taken to implement a fail safe and or redundant design concept as well as a periodic maintenance program e Safety devices for plant worker protection e Start stop control devices for transportation and material handling machines e Aeronautical aerospace machines e Control devices for nuclear reactors Never use this product in applications where human safety may be put at risk REQUEST Ensure that this User s Manual is handed over to the user before the product is used Copying or duplicating this User s Manual in part or in whole is forbid den The information and specifications in this User s Manual are sub ject to change without notice Considerable effort has been made to ensure that this User s Manual is free from inaccuracies and omissions If y
5. OAh Totalizer flow rate 100 L min standard Instantaneous flow rate e Communications specifications Communications system RS 232C start stop transmission 11 Chapter 4 METHOD OF OPERATION A CAUTION Do not operate the keys with a mechanical pencil screwdriver or other sharp tipped object Doing so might cause faulty operation Make sure that the selected analog output type matches the input type of the receiving device The output receiving device could be damaged if the analog output type selection is incorrect mM State transition diagrams Function setup mode 12 Upon power up with the factory settings the instantaneous flow rate is displayed and the instantaneous flow rate indicator lamp lights up The diagram below shows the relationship between a change in mode and the dis play If the measurement mode function setup item 2 is set to Le or iz the last four digits of the integrated flow or integrated flow countdown can be displayed by pressing the key while the instantaneous flow rate is displayed Pressing again displays the first four digits of the integrated flow or integrated flow count down Pressing again returns the display to the instantaneous flow rate When the power is turned OFF and then back ON again the display state before the power was turned OFF resumes CENT key Key Instantaneous flow rate display CD key held down for 3s or more L Re En Integrated flovv or integra
6. by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction We recommend using a harness with connector sold separately Connector pin layout 1 9 H H H H H View from connector end OOOO 2 10 Compatible connector DF11 10DS 2C made by HIROSE ELECTRIC CO LTD Model number Remarks Harness with dedicated 81446594 005 Harness 2m for model without communications connector plain wire termination One harness is required for 81446594 006 Harness 5m for model without communications one CMS unit plain wire termination 81446594 007 Harness 2m for model with communications M3 5 Y terminals 81446594 008 Harness 5m for model with communications M3 5 Y terminals e Connector signal names Pin Signal el Description Remarks DC OUT Instantaneous flowrate output DC OUT Instantaneous flowrate output Power 12 to 24Vdc Power GND For RS 485 communications Connect RS 485 model only GND DA i IN Integration count reset input V2 Event 2 output Integration pulse output V1 V D E Event 1 output Serial data output 10 EVCOM SG Event output common SG for RS 485 Chapter 3 MOUNTING AND VVIRING Connection example n 1 ka noe 3 3 4 V DA DB DIN 8 JEV2 pA 2 EV 1 ents EV
7. factor is set in parameter setup see pages 16 15 Chapter 4 METHOD OF OPERATION E Parameter setup If the key lock function is ON parameter settings cannot be changed To enter the parameter setup mode hold down the and Cy keys simultane ously for at least three seconds If conditions do not allow parameter setup P is displayed Otherwise in parameter setup mode P is displayed The last two digits identify the parameter setup item Pressing the CP key moves the display to the next setup item Pressing the C4 key moves to the previous setup item The currently set value for that item is displayed If the key is pressed again the last digit blinks Z MODE key ma ma PU re bobo _ booo If you press the key the blinking cursor moves to the left To change the set ting at each of these digits use the 42 and QD keys To change the setting to the displayed value press the key Ot F Oh If event type function setup 3 or 4 has been set to 5 or 4 the setting of 8 4 digit numbers is necessary in Ft 4 1 i 3 we and ere To do this switch between the first 4 digits and the last 4 digits as shown below Last four digits First four digits Ui oi fi Oo ii oi fi Oo DEO p Dot indicates display 4 of last four digits Whether parameters 4 i to 147 are displayed for setup depends upon the func tion settings The following tables show the parameters and t
8. output at this moment is now treated as zero 6 Press key to return to the instantaneous flow rate or integrated flow dis play U Handling Precautions e Use flow rate zero calibration only after ensuring that the flow path con tains only the gas being measured and after stabilizing the actual flow rate at zero Chapter 5 TROUBLESHOOTING mM Remedying problems Refer to the following table if a problem occurs Nothing on the display e Make sure that power with the correct voltage and polarity is being supplied e Make sure that connectors are correctly connected ALA is displayed La rr is displayed Err is displayed Signal is output even though the flowrate should be zero Flow rate has deviated excessively The displayed value is lower than expected There should be no flow but the The instantaneous flow rate has exceeded 120 of the measurement range Reduce the flow rate so that it is within range and normal operation will automatically resume Sensor error e Make sure that gas is not flowing back or the gas flow direction is not reversed e Make sure that an excess current is not flowing If the unit is not restored after turning the power OFF contact Yamatake Corporation and ask for repair Memory data error Contact Yamatake Corporation and ask for repair e Check the piping for any gas leaks e Check the wiring to make sure that it is correct e If the device is mounted v
9. subject this device to a pressure above the pressure resistance Doing so might damage this device Do not peel off the pipe connector port seals until immediately before you connect the piping Doing so might allow foreign objects to enter the connector port and cause defective operation When connecting piping fasten the hexagonal section of the pipe connector port and turn the pipe side to connect When mounting the device firmly fasten to prevent vibration Do not overapply sealant Allowing entry of dirt or burrs inside the pipes might Cause error Do not hold a resin cover portion at the time of carrying or piping this device Doing so might damage the cover or dropping the device due to slipping might result in getting hurt Do not remove a resin cover and disassemble pipe connections Doing so might cause malfunction S 9 Q Q 9 9 9 Chapter 3 MOUNTING AND WIRING E Mounting Installation site Avoid mounting the CMS1500 in the following locations 1 Locations where operating temperature falls below 10 C and rises above 60 C Locations where operating humidity exceeds 90 RH Locations subject to sudden changes in temperature and condensation Locations subject to corrosive gases and flammable gases Tn 8 W N Locations where there are lots of conductive substances e g dust salt or iron dust water droplets oil mist or organic solvents Locations subject to vibration or shock Locations
10. ta Hh ewes be ee 17 E Total ZATION lt 6 Ke ana eee ecb bd beh oho hb ee Sek eke eee 17 MH Resetting the count for integrated flow integrated flow countdown 17 mM Event standby bas erate E E mea ee aco wher wee er BE a rac ee eee tes ne EEE E ee ee ee 17 EM Event ON delay Spies aces ae Ca a as ee oreo eed ee ae oes pe ee eee eee ee 17 mM Flowrate zero calibration 0 cc ccc cc ec ee eee eee eee eee eee ees 18 Chapter 5 TROUBLESHOOTING E Remedying problemS eee a cece cette eect eee e eee eees 19 Chapter 6 SPECIFICATIONS M General specificationS naa 20 E External diMeENSIONS ii 22 MN PressurelOSSo oo so ee eds consens cemesesneders ueizesd ase cer 23 Chapter 1 INTRODUCTION mM Introduction The CMS 1500 Gas mass flow meter uses uF M Micro Flow sensor in the sensing section The UF sensor is a thermal flow speed sensor made using propri etary technology Integrating this ultra minute flow speed sensor with high grade channel design technology has achieved high accuracy and high rangeability mM Features e Incorporates a uF sensor made possible by silicon micro machining technology and thin film forming technology One side of the uF sensor is a mere 1 7mm and at a thickness of 0 5mm this thermal flow speed sensor exhibits high sensitivity and response e As the CMS1500 is a mass flow meter it is not influenced by temperature nor pressure e High accuracy of 5
11. COM SG Black Or less Internal circuit o 10 DC OUT Brown DC OUT Red Orange S 12 to 24Vdc GND Yellow Pink BI RS 485 ue communication Installed externally Green ane Q Q Load 30Vdc 50mA or less Gray ra White Load Ade LZ or less 30Vdc 50mA External connection example Handling Precautions e Power source GND instantaneous flow rate output and event out put common lines are all connected inside this device If these lines are connected to an external device through a common power supply interference will cause device failure or faulty operation e Take care that the event output does not exceed the output rating of this device Ifa relay is used the coil should have a built in surge absorption diode Otherwise device failure could occur Chapter 3 MOUNTING AND VVIRING Connection of totalizer pulse output to a counter e Non voltage input type Counter EVCOM e Voltage input type 30Vdc or less Use of flow rate serial data output e Connection example RS 232C driver Interface Computer RS 232C port e Communications protocol Currently displayed instantaneous flow rate data and totalizer flow data is sent as ASCII code F and the instantaneous flow rate data is sent first followed by T and the totalizer flow data Example The instantaneous flow rate is 100 L min standard and the totalizer flow is 100 x 10L F0100 100000100 CR 100X10L ODh
12. OPERATION Item Function Setting Setting description Factory Remarks setting Communications Communication function disabled address Communication address Transmission 9600bps speed 4800bps 2400bps Data format 8 data bits even parity 1 stop bit 8 data bits no parity 2 stop bits Analog output scaling If gas type selection function setup 4 is changed the measurable flow rate range changes as specified on page 21 Maximum measurable flow rate for each gas type However scaling according to the analog output scaling setting will be applied to the output regardless of what gas type is selected Example If gas type function setup 44 is changed to ve carbon dioxide the measurable flow rate range changes to 0 to 900 L min If scaling is set to uu Oto 1500 L min the 0 to 5V output will be as shown below Wollage output V 5 00 aa ana aan Ana aan 3 00 ee ee ee ee ee ee ee ee ap Measurement range of carbon dioxide 900 1500 Flowrate L min It the output type is Oto 5V and if output scaling is used the maximum output voltage can be calculated as follows e When gas types VW to tit are selected Max measurable flow rate for the gas X5V Scaling upper limit value e When gas type v is selected Max measurable flow rate for the gas x 1 Scaling upper limit value Gas type conversion factor For the maximum measurable flow rate for each gas see page 20 The gas type conversion
13. RD and high rangeability of 50 1 e Models with display meter are provided with extensive functions to suit a wide range of applications analog output event output integrating reverse integrat ing display output scaling gas type selection e Through the RS 485 communications the integrated flowrate can be read out correctly Note RD Reading indicates the accuracy of the read value mM Model selection guide The following shows the model Nos for this flow meter model range type method type buk function No No HHH ems TSC C _ GasMassFlowMeter CS SS SS ES A A LA a EE Modelwithdisplay S SSS a r O ee E UN J YAir Nitrogen Argon Carbon dioxide CO2 1 m if winRS 485 communications Without optional function O sd Additional treatment not supported Without options S E 5 0 Es 1 of Inspection certificate provided Traceability certification provided Note L min standard refers to a flowrate after conversion to 20 C in air 101 325kPa 1 atmospheric pressure Chapter 2 NAMES AND FUNCTIONS OF PARTS The following describes the names and functions of parts EV1 EV2 indicators Lights when event 1 and event 2 are output Flowrate display 7 segment display indicates flowrate by a 4 digit number While function setup the upper two digits on the display indicate the functi
14. V If 4 20mAdc is selected e Allowable load resistance 300Q max e Even if the measurement range is exceeded output remains less than 24mA Output scaling function Selectable from 0 to 300 O to 600 0 to 900 0 to 1500L min Factory setting 0 to 1500L min Event output Number of outputs 2 Open collector absolute maximum ratings 30Vdc 50mA Totalizer pulse output 100ms 10 width Totalizer pulse output 110 100 1000L pulse weight External input Number of inputs 1 integrated count reset only Remote circuit Circuit type on other side No voltage contact or open collector type Contact OFF terminal voltage 4 5 amp 1V Contact ON terminal current Approx 0 5mA current flowing to contact Allowable ON contact resistance 250Q max Allowable OFF contact resistance 100kQ min Allowable ON residual voltage 0 8V max open collector on other side Allowable OFF leakage current 50UA max open collector on other side Serial data output Open collector rated 30Vdc 50mA 20 Chapter 6 SPECIFICATIONS Specifications Gas type switching function Selection of air nitrogen argon carbon dioxide CO2 using the control panel keys Gas type setup function Gas type conversion factor between 0 100 and 8 000 can be set using the control panel keys Electrical connection e Harness with a special connector optional e Mating connector Hirose Electric Co DF 11 10DS 2C Operating temperature range 10 to 60 C
15. e The table on the following pages shows all the functions and settings 13 Chapter 4 METHOD OF OPERATION Function setup menu setting When key lock is ON other function and parameter settings can be checked but cannot be changed Key lock disabled Lock ON Key lock Measurement mode O O NO NO Instantaneous flow rate and integrated flow are measured Instantaneous flow rate and integrated flow countdown are measured E Only instantaneous flow rate is measured Z gt or a Integrated flow count integrated flow countdown and totalizer pulse output settings are effective only when function setup item Li is set to is i Or ae Integrated flovv count and integrated flow countdown cannot be set simultaneously Not used Instantaneous flow rate upper limit value Instantaneous flow rate lower limit value Integrated flow count up Reverse integrated flow count down Flow rate data serial output Error output Not used Instantaneous flow rate upper limit value Instantaneous flow rate lower limit value Integrated flow count up Reverse integrated flow count down Totalizer pulse output rate 10L pulse Totalizer pulse output rate 100L pulse Totalizer pulse output rate 1000L pulse Event 1 type EV 1 7 a al i ms 7 XI p La 7 a al 7 apa Ong mm 7 a al gt Um 1 we a al r v w Lana a al Event 2 type
16. ertically mount it horizontally If it seems possible that the sensor s zero point has shifted try flow rate zero calibration page 18 e Check the piping for any gas leaks e Check the piping and connection ports for dirt oil or other foreign matter If oily contact Yamatake Corporation and ask for repair e Check the wiring to make sure that it is correct e Check if the flow rate is extremely unstable or greatly exceeds the measurement range e Check if the gas contains foreign matter such as dust rust oil or water If it seems that there is foreign matter in the flow meter contact Yamatake Corporation and ask for repair indicated flow rate is higher than zero The indicated instantaneous flow rate is zero but the integrated flow counting up or counting down e Check the piping for any gas leaks and check if the gas flow has actually stopped e Even if the instantaneous flow rate display is 0 a minute flow smaller than the minimum display value of the flowmeter might be present For integrated measurements even a flow under the minimum display value is counted Set the low flow cutoff to prevent integrated flow countup or countdown Function setup page 13 19 Chapter 6 SPECIFICATIONS mM General specifications Specifications Applicable gas Air Nitrogen Argon Carbon dioxide Not applicable to oxygen and flammable gases Gas must not contain corrosive components chlorine sulfur acid etc It a
17. graphically represent the actual prohibited action The example on the left notifies the user that disassembly is prohibited Black filled in circles instruct the user to carry out a specific obligatory action to prevent possible danger These icons graphically represent the actual action to be carried out The example on the left instructs the user to remove the plug from the outlet WARNING S Do not use this device for oxygen or flammable gases Materials of this device are not selected on the premise that it is used for oxygen or flammable gases In addition oil inhibiting treatment is not performed to the gas contacting sections A CAUTION Prevent foreign matter from entering the device Q If the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device If there is a possibility that any foreign matter flows into the device provide a filter strainer or mist trap capable of eliminating more than Tum foreign matter at the upstream and periodically inspect and replace the filter This device is a precision instrument Do not drop it nor subject it to S shock Doing so might damage the device Do not operate the keys with a propelling pencil or sharp tipped object S Doing so might cause faulty operation Do not use this device outside of the operating pressure range Also S do not subject this device to a pressure above the p
18. gularly contain oil mist or applications where rust in the piping is expected be sure to install a filter Model Number MFF100 series Specifications For details refer to Lineup of Mist Separators and Filters for Micro Flow Sensors Yamatake specifications sheet CP SS 1824E Chapter 3 MOUNTING AND VVIRING Straight pipe section In case of different diameter piping diameters A and B are different a straight pipe section is required Upstream side enlarged Downstream side reduced 5D 3D T cms cms bo A B B A Different diameter socket Different diameter socket 5D 3D F cms oms Fo A B B A Upstream side reduced Downstream side enlarged 5D 3D CMS os Different diameter socket Different diameter socket 5D 3D A B A D indicates the connecting port size CMS1500 25mm In case of same diameter piping diameters A and B are the same a straight pipe section is not required Upstream elbow Downstream elbow ai B Upstream ball valve Downstream ball valve a valve whose structure does a valve whose structure not disturb the el flovv does not disturb the the gas flow 1 Handling Precautions e When using a valve that disturbs the gas flow such as a butterfly valve put a 5D straight pipe section between the CMS and the valve Chapter 3 MOUNTING AND VVIRING e Coating sealant Coat with an appropriate amount of sealant Do not coat the top two threads of the screw Remo
19. he input type of the receiving device The output receiving device could be damaged if the analog output type selection is incorrect Conventions Used in This Manual The following conventions are used in this manual U Handling Precautions Handling Precautions indicate items that the user should pay attention to when handling the CMS1500 Note Notes indicate useful information that the user might benefit by Knowing gt This indicates the item or page that the user is requested to refer to 1 2 8 The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation a P This indicates 7 segment indication on the setup display key This indicates a key on the setup display ili Contents SAFETY PRECAUTIONS Conventions Used in This Manual Chapter 1 INTRODUCTION E NO CUCNOmeceeanesteseems maritasesnsmraussteeeseconstestsssseemelmes ee E FestUres ciociciasostzecestzeeetmetzeittatesceyistecenss seus cessa opus m M Model selection guide naa Chapter 2 NAMES AND FUNCTIONS OF PARTS Chapter 3 MOUNTING AND WIRING E Mounting 6 eee cee nana E PIPES es a ee mean E Wiring nana Chapter 4 METHOD OF OPERATION mM State transition diagrams se Deia ind Gea deute ee ee mea eee eee eee ena 12 mM Function SETUP Naa ee ae ae ae E a aa una nk 13 NM Parameter 1 1 oe ee ee ee 16 mn Display OFF Mollteciorosessssossotmesemess sua tida
20. he necessary function settings function settings Event output 1 setting value amp Oto 9995 L min ltem 3is flor 32 EV1 0 to 99999999 X 10L Item 5 is 44 or v4 Event output 2 setting value BP 0109995 L min si Item OY is 4 i Or Us EV2 Item 4 is G3 or EH EV2 hysteresis SG Oto 100 L min Item 84 is 4 or SE EV1 ON delay Ni 0 to 60 s Item 45 is Odor de EV2 ON delay 0 to 60 s Item 24 is oor oe Initial value for integrated 0 to 99999999 X 10L Item oe is d flow countdown Gas type conversion factor SABRE 0 100 to 8 000 Item i is Analog output scaling we 10 to 250 90 U Handling Precautions e Set a value for event output that is vvithin the measurable range 16 mM Display OFF mode mM Totalization Chapter 4 METHOD OF OPERATION If the key is held down for at least three seconds all display is turned off except for the instantaneous flow rate indicator lamp which blinks If integrated flow exceeds T4794 the count returns to and counting contin ues When this happens event output for integrated flow remains OFF until the set value is reached again If the integrated flow countdown reaches s counting stops mM Resetting the count for integrated flow integrated flow countdown E Event standby E Event ON delay To reset the count hold down the WM and C keys simultaneously for at least one second while the integrated amount or integrated countdown amount is dis played The
21. integrated flow count is reset to 0 and the countdown is reset to the default After reset counting up or counting down resumes Event standby operates only on the basis of the instantaneous flow rate lower limit This function prevents an erroneous low flow alarm when there is no gas flow because the device has just started up for example After the power is turned ON and until the instantaneous flow rate has exceeded the value set for the event lower limit there is no event action After the instantaneous flow lower limit has been exceeded once event action operates normally Instantaneous flow rate value No event action Event action Lower limit setting value Time Event output ON delay times 0 to 60s can be set for both events 1 and 2 Event output ON delay time OFF Instantaneous flow rate value A Event detected 17 Chapter 4 METHOD OF OPERATION mM Flowrate zero calibration 18 If the indicated flow rate is not zero even though the actual flow rate is zero and it seems possible that the sensor s zero point may have shifted try the following pro cedure for flow rate zero calibration 1 Display the flow rate or integrated flow amount 2 Press and hold the Rey TX Tn 3 After approx 10s have elapsed 4 He blinks on the flow rate display 4 Press and hold again 67 DA ha 5 After approx 1 second amp 4 He stops blinking and remains lit The amount of sensor
22. lso must be a clean gas which does not contain dust or oil mist Flow range 1 1500L min standard standard indicates the standard calibration condition 20 C 101 325RPa 1 atm Maximum measured Air nitrogen 1500 L min bas eren Argon 500 Lmin gas at 20 C Argon 1500 L min 101 325kPa Carbon dioxide 900 L min Measurement accuracy 2 1 FS 1 digit 30 lt X lt 150L min X measured flowrate 5 RD 1digit 150 lt X lt 1500L min Temperature characteristics 3 0 1 FS C 1digit O lt xX lt 1125L min Xx measured flowrate 0 15 FS C 1digit 1125 8 X 1500L min Pressure characteristics 4 1 FS 1 digit 30 lt X lt 150L min x measured flowrate 5 RD 1digit 150 lt X lt 1500L min at pressure range 0 to 0 6 MPa Rated voltage 12 to 24Vdc Supply voltage range 11 4 to 25 2 Vdc Current consumption 100mA max Sampling cycle 100ms 10ms Display Flow rate display 4 digit 7 segment LED selectable between instantaneous flow rate and integrated flow display tegrated Data storage Data is written to memory every 10 minutes Integrated flow count or countdown can be reset by control panel key or external contact input Indicator LEDs Instantaneous flow rate display integrated flow display event 1 amp 2 display Output signal If 0 5 or 1 5Vdc is selected instantaneous flowrate output e Allowable load resistance 250kQ min e Even if the measurement range is exceeded output remains less than 6
23. on type and the lower two digits indicate the setup Instantaneous flowrate indicator lamp Lights when instantaneous flowrate is displayed Massflow CMS Integrated flowrate Display meter indicator lamp Lights when integrated flowrate is displayed CD key keys Change the display Select the mode and the mode setup MODE Key CENT key MODE Select the setup mode CENT Fix a mode setup Signal connector Connects the power supply and output signals map Pipe connection outlet The gas outflow is YAMATAKE connected here Pipe connection inlet The gas inflow is connected here Chapter 3 MOUNTING AND VVIRING ANWARNING Do not use this device for oxygen or flammable gases Materials of this device are not selected on the premise that it is used for oxygen or flammable gases In addition oil inhibiting treatment is not performed to the gas contacting sections CAUTION Prevent foreign matter from entering the device lf the rust water droplet oil mist or dust in the piping flows into the device measurement error might occur and result in damaging the device lf there is a possibility that any foreign matter flows into the device provide a filter strainer or mist trap capable of eliminating more than 1um foreign matter at the upstream and periodically inspect and replace the filter Do not use this device outside of the operating pressure range Also do not
24. ou should find any inaccuracies or omissions please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2001 Yamatake Corporation ALL RIGHTS RESERVED uF Micro Flow are trademarks of Yamatake Corporation in Japan EF SAFETY PRECAUTIONS IX E About Icons Safety precautions are for ensuring safe and correct use of this product and for preventing injury to the operator and other people or damage to property You must observe these safety precautions Ihe safety precautions described in this manual are indicated by various icons As the following describes the icons and their meanings be sure to read and understand the descriptions before reading this manual Q WA R N I N G Warnings are indicated when mishandling this product might result in death or serious injury to the user CA U TI O N Cautions are indicated when mishandling this product might result in minor injury to the user or only physical damage to this product E Examples Triangles vvarn the user of a possible danger that may be caused by wrongful operation or misuse of this product These icons graphically represent the actual danger The example on the left warns the user of the danger of electrical shock White circles with a diagonal bar notify the user that specific actions are prohibited to prevent possible danger These icons
25. ressure resistance Doing so might damage this device Do not peel off the pipe connector port seals until immediately before S you connect the piping Doing so might allow foreign objects to enter the connector port and cause defective operation When connecting piping fasten the flange section of the pipe Q connector port and turn the pipe side to connect Q When mounting the device firmly fasten to prevent vibration Do not overapply sealant Allowing entry of dirt or burrs inside the S pipes might cause error Mount this device horizontally Do not mount so that the display is Q facing down Doing so might cause error or trouble When using a relay as the contact for integrated count reset input use Q a relay gold contact type for low currents Otherwise defective contact may cause the device to malfunction A CAUTION If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Do not remove a resin cover and disassemble pipe connections Doing so might case malfunction Do not hold a resin cover portion at the time of carrying or piping this device Doing so might damage the cover or dropping the device due to slipping might result in getting hurt Make sure that the selected analog output type matches t
26. subject to direct sunlight Locations splashed by water or rain Oo ON DN Locations subject to splashing by fluids e g oil chemicals 10 Locations where strong magnetic or electrical fields are generated Chapter 3 MOUNTING AND VVIRING mM Pipes Precautions for piping installation This device is a precision instrument If foreign matter such as dust oil mist or water enters the device it may cause measurement error or faulty operation When installing piping be sure to follow the procedures below to prevent foreign matter from entering the device 1 Before installing the device be sure to flush the upstream and downstream pip ing thoroughly to remove welding fume particulate and dust 2 Be sure to wipe the inside of the pipe to be directly connected to this device 3 After the above two operations are complete check to be sure that there is no welding fume particulate or dust and then install the device n Handling Precautions e If foreign matter cannot be fully eliminated by flushing or wiping or if the regular presence of foreign matter can be expected be sure to install a filter If dust oil or moisture adheres to the metallic mesh or to the Micro Flow sensor chip measurement error or device failure may result ON IN SS a id hd P semi ow deaton gt A H H At Filter installation For a dedicated filter contact Yamatake Corporation For applications with compressed air or propane which re
27. ted CDISP key flow countdown display last key four digits key L min O g g z A CH toy xa 8 ae ai Dot display ON 4 ISP key ISP key GP key Eoy Cey Integrated flow or integrated flow countdown display first four digits CENT key L O MODE key paci JO g g z zji ED sy ea 3s or more Dot display ae DiSP key o Handling Precautions e If the key is pressed during setup the setting returns to its previ ous value e Leave the device powered up for about 30min before use to allow it to stabilize mM Function setup Chapter 4 METHOD OF OPERATION To enter the setup mode press the key The first two digits on the display blink The first two digits identify the function setup item and the second two dig its indicate the setting for that item e Pressing the CY key moves the display to the next setup item Pressing the Ca key moves to the previous setup item Key lock setup Measurement mode setup Event 1 type setup Communications setup e Pressing QD key when 3g is displayed changes the display to ti e Pressing C4 key when Wi is displayed changes the display to 57 e When the first two digits display the desired setup item press the key while it is blinking This selects the setup item and the second two digits blink e Press the C4 and CD keys to select the desired setting and then press key All four digits light up e Check that the item and the setting are correct
28. ve any dirt or burrs from inside the pipes C Correct Sealant Sealant e Connecting Pipes Connect pipes while gripping the hexagonal section of the pipe connection port with a spanner or wrench Resin cover Flange Hexagonal section Pipe o Handling Precautions e Do not grip and turn the body Doing so might damage the body or cause leakage e When connecting pipes do not grasp the resin cover Doing so might damage the cover e Gas flow 1 Handling Precautions When feeding gas into the meter make it flow following the arrow on the side of the channel If gas is fed in the opposite direction the gas flow cannot be measured accurately Chapter 3 MOUNTING AND VVIRING Mounting the body A CAUTION Q Mount this device horizontally Do not mount so that the display is facing down Doing so might cause error or trouble e Mounting Position C Correct Xx Wrong 4 C Correct es A LL e Mounting Install this device from the rear by the four M5 screws using the mounting holes on the base of the device M5 depth 10mm Hole dimensions Unitmm Chapter 3 MOUNTING AND VVIRING E Wiring A CAUTION When using a relay as the contact for integrated count reset input use a relay gold contact type for low currents Otherwise defective contact may cause the device to malfunction If there is a risk of a power surge caused
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