User Manual TS316_new2
Contents
1. Klaus Binder Labortechnik D 85241 Hebertshausen Flurstra e 7 www binder labortechnik de TPS 316 Plasma Cleaner User Guide Topics signed with also applicable for TS 316 Drying Station 1 0 Installation Procedure Remove the packaging from main recipient and from the head of the plasma source After unpacking set the device on a vibration free surface Fit the reception tubes for the sample holders to the corresponding chambers A to A or B C D In doing so keep the O rings perfectly clean Check the fit of the sight glass The sample holder can now be inserted into one of the reception tubes 1 1 Transport Locking Devices Connectors and cable attachments within the pumping unit may have come loose during transport Therefore disconnect the device from the electrical supply safety Remove the side plates loosen the screws and gently lift the plates First remove the earth connection cables and check all cables and connectors inside the pump unit VOR INBETRIEBNAHME TRANSPORTSICHERUNG LOSEN BEFORE USE UNFASTEN THE TRANSPORT PRCTECTION Loosen the knurled head screw in that way that the base plate of the pumping unit can move freely on the dampers Reconnect the earth connection cables to the side plates and put the plates back in reverse order 1 Klaus Binder Labortechnik D 85241 Hebertshausen Flurstra e 7 www binder labortechnik de 1 3 Nitrogen Gas Supply Connect the N2 IN inlet upper rig2. 49 0 172 563 52 46 Fax 49 0 8131 255 49 13
3. 0 atm 0 atm Turbo pump Turbo pump l 0 00A yee oN system shutdown aaa lt system shutdown 11 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 5 3 Error Messages Whenever inserting the specimen holders all recipients must always be closed to prevent an inrush of air into the turbo pump If air gets into the pumping unit by a flawed operation an error message appears on the touchscreen the red info field gives you further advice after the automatic venting of the pumping unit pressing the key on the left of the display After correcting your settings touch READY 5 4 Adjustment of Vacuum Read Out activate menu by ferrite magnet Adjustment windows 15 17 will only be visible after activating the menu by touching a ferrite magnet to the right side on the panel Vacuum read out adjustment constant offset digit 0 constant d mbar calculated pressure gt 3x07 imbar constant gain 1 AD 10 digit offset 1024 4 gain AD q i Cancel The vacuum read out calibration is done by manufacturer of the gauge Changes in the values above might lead to huge changes of the vacuum read out values If you need to make own adjustments please follow the instructions from Pfeiffer PKR 251 active penning gauge 5 5 Adjustment of Plasma Read Out activate with ferrite magnet during plasma run Plasma read
4. each side of course without specimen Yacuum read out Turbo pump J A Attention Carbon support films and perforated films Exposure time for these specimen should be less than three minutes Longer exposures can damage the films Precise values can be determined by tests If you don t use the plasma source please store the source in the place of deposit SP 4 5 Vent the Main Recipient Use the START STOP button to vent the main recipient Please follow the instructions on the display 5 0 Drying Venting Recipients 2 and 3 Method 1 Choose recipient 2 or 3 or both by touching the recipient on the display For venting the recipient the valve on the touch screen must indicate in green color Push the ON OFF oder START STOP button on the panel and wait until the turbo molecular pump speed comes down to 0 Hertz and the recipient is on atmospheric pressure Insert specimen holder and check for cleanliness of O rings If you don t use the recipient close all ports with a dummy connector Push the START STOP button and follow the instructions on the display Caution Specimen holder loaded with sensitive specimen should be brought back to atmospheric pressure according to method 1 The reason is that if you break the vacuum according to method 2 the specimen can be damaged by differential pressure TPS 316 Plasma Cleaner User Guide V 1 0 2013 10 Klaus Binder Labortechnik D 85241 Hebertsha
5. out adjustment constant offset digit CAA omc constant gain 1 calculated power AD 2 5 digit einen es power AD gain TPS 316 Plasma Cleaner User Guide V 1 0 2013 12 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de Switch on Plasma application and adjust needle valve until brightness on the sight glass is on maximum Adjust plasma power read out value from 86 to 94 by moving offset and gain sliders 5 6 Adjustment of Recipient Switch On activate with ferrite magnet during plasma run Recipient switch on procedure setup Valve impulse time ms Wait time after imp ms ox Count of impulses Recovery time rec on s If a recipient is switched from park to use its valve will open for Valve impulse time Pump frequency will be stored After waiting for Wait time the next impulse will be started if the frequency of the pump has recovered This will be repeated for Count of impulses Then the rec will be switched on for permanent The recovery of frq is checked after Recovery time This is done by the manufacturer Please record the values before changing anything on this page for more information at http www binder labortechnik de or Klaus Binder Labortechnik Flurstra e 7 Check Email webmaster binder labortechnik de D 85241 Hebertshausen Telefon 49 0 8131 255 49 Mobile
6. User Guide V 1 0 2013 6 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 3 0 Instructions for Use Switching On Turn the device on with the green toggle switch at the rear panel above the power connector Push the ON switch on the front panel Follow the informations on the touchscreen Please close all recipients either with specimen holders or with dummy flanges Attach the plasma source on the working chamber and fix it with the bayonet lock The image below shows adaptors at the main recipients A and B and also at the sub recipients C and D plasma source and Penning gauge The plasma recipient is sealed on top with a dummy flange that can be replaced as required by a Top entry tube option This option is provided for especially intense plasma treatments A vertical reception tube for sample holders and another one for cleaning aperture discs are available Klaus Binder Labortechnik D 85241 Hebertshausen Flurstra e 7 www binder labortechnik de 3 1 Creating Operating Vacuum Insert the sample holder into one of the reception tubes Place the plasma source on the plasma chamber and close the main recipient with specimen holder or dummy also the drying chamber s recipient 2 or recipient 3 option Touch READY Check the flowchart color on the touchscreen Grey Working chamber on atmospheric pressure Dark blue Turbo molecular pump below 700 H
7. Working Chamber For better results wait until the vacuum read out is 1x10 3 mbar or all bar graphs are turning green 4 2 Setting the Timer oO ooon oom HABE Dh ge BB Use UP and or DOWN key for timer setting If you want store the time use one of the QUICK KEYS For starting the plasma cleaning process press READY 4 3 Adjustment of Parameters Use the needle valve NV to adjust the plasma to maximum brightness as observed by the maximum deflection on the bar graph or by visual inspection in the sight glass SG on the plasma source This will happen at working chamber pressures between ca 0 1 and 0 5 mbar The pressure shown on the gauge however is the pressure at the exhaust point which should read between 1 5 and 1 9x10 3 mbar during the cleaning cycle 3 Runtime After elapse of the programmed time the plasma cleaner shuts off The needle valve will be disconnected and recipients B and C activated depending on the pre set sequence Klaus Binder Labortechnik D 85241 Hebertshausen Flurstra e 7 www binder labortechnik de 4 4 Cleaning the Specimen Holder The time to clean the sample holder with your sample needs to be determined by trial Start first with a five minutes run The sample in the holder should not directly be touched by the plasma Beiter tilt the holder perpendicularly to the source thus allowing the plasma to stream past To initially clean the sample holder we recommend ca 10 minutes from
8. hem if possible Only O rings on movable parts should be slightly lubricated Inspect with a magnifier before install that no dust hairs or other particles are on the O ring lf needed use Fomblin vacuum grease only 2 1 Handling the sample holder adapters Never use silicone grease on the adapters Watch the cleanliness of the sample holders especially of the O rings Clean the O rings with ethanol and lubricate the ring slightly with Fomblin lf required the adapters may be cleaned in an ultrasonic acetone bath If possible bake out afterwards at approximately 80 Philips Jeol 2000x Jeol 4000x and Hitachi will be screwed into the adapter Zeiss Jeol 2010 are connected to the KF flange For this purpose the dummy flange is removed In both cases verify for a proper fit and vacuum tight connection Always vacuum seal unused openings before pumping down 2 2 Plasma Source For plasma etching times longer than 15 minutes use Argon and 20 Oxygen as working gas Longer treatments with air plasma might not help to remove more hydrocarbons TPS 316 Plasma Cleaner User Guide V 1 0 2013 4 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 2 3 Top entry Adapter and Plasma Source When working with the plasma cleaner please consider the following advices Check all o rings for cleanliness Top Entry Adapter For intense cleaning loosen the KF flange above the plasma source and ca
9. ht rear to a nitrogen bottle Set the pressure at ca 0 1 bar to use with the plasma cleaner The plasma cleaner can also be flooded with air In this case the inlet remains open 1 4 Working Gas Supply Connect the AR O2 IN inlet upper right rear with a flexible tube to the compressed gas cylinder Ar 20 oxygen or leave the connection open if you intend to use air as your working gas 1 5 Operating Instructions Using the Working Chambers The vacuum unit has two inlets from the pump stand one directly connected via A B to the plasma chamber the other via magnetic valve C or D optional to the drying chamber From outside each chamber is accessible via horizontal tubes A B C or D into which the specimen holder needs to be inserted TPS 316 Plasma Cleaner User Guide V1 0 2013 2 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 2 0 Safety Instructions Binder Labortechnik Flurstr 7 85241 Hebertshausen Telefon Fax 08131 25549 www binder labortechnik de NEVER open the pumping unit or the plasma source power supply before unplugging the mains plug Working on mains voltage may cause life threatening injuries or death The plasma source is sealed and cannot be opened by the customer Any attempt to open the source voids the warranty Any damaged parts can be removed or re installed under the instruction of the manufacturer after lodging a query I
10. nstallation and Removal of the Plasma Source Power Supply To be done only after contacting the manufacturer Please switch off the pumping unit and disconnect the device from the 230V mains voltage Open the right side of the pumping unit with a Philips screwdriver The power supply is mounted on an aluminium frame Remove the plugs at the front side of the power supply Detach the power supply from the frame of the pumping unit fixed with two screws Mail back the defective one Re install new unit in reverse order Removing the Control Unit Before proceeding carefully read the safety instructions above Loosen the four screws at the control panel Before removing all connected cables note carefully the colours and position of the connections or better make some images of the situation Mail back the defective panel Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de Cleaning the Penning Gauge First follow the previous instructions printed in bold letters Safety instructions To detach the Penning gauge control cable unfasten small screw Open KF flange The inner parts of the Penning tube can be cleaned mechanically ultrasonic cleaner If available follow the instructions of the Penning manufacturer Never put magnetic parts into the ultrasonic cleaner Install in reverse order after cleaning O rings Clean O rings in ethanol only dry them thoroughly and do not lubricate t
11. refully insert the specimen holder Close the side entry ports with dummy plugs or flanges Check for cleanliness of the o rings before mounting Use a VERY small amount of FOMBLIN grease on the o rings NEVER use silicone based grease We recommend FOMBLIN Keep the unused plasma source under vacuum or store it at the gray storage shelf near the needle valve SP Use the plasma source only when working vacuum is sufficient Normally the cleaning time should not be longer than 15 minutes Up to now no negative effect if ion bombardment on the specimen holders is known Because of the complex possibilities to use the plasma cleaner we decline any liability on specimen and or specimen holders when used in the plasma cleaner Binder Labortechnik Flurstr 7 85241 Hebertshausen Telefon Fax 08131 25549 www binder labortechnik de a Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 2 4 How to Use the SEM Tool Kit Caution Before you re install the plasma source check for correct height setting Otherwise the specimen or the specimen holder might get damaged Adjust the height Use the adjustment gauge and put it across the specimen chamber Now adjust the height of the mounted specimen until it nearly touches the lower side of the gauge For a better contact and less vibrations use the Allen screw to fix the specimen within the SEM specimen holder TPS 316 Plasma Cleaner
12. usen _ FlurstraBe 7 www binder labortechnik de Method 2 Close the appropriate valve of recipient 2 or 3 or both and break the vacuum by pulling out the specimen holder or opening one of the unused flanges If you don t use the recipient please keep it closed with the dummy connectors Push the START STOP button and follow the instructions on the display With the pumping unit on atmospheric pressure insert the sample holder into the reception tube A or B C D Make sure all vacuum connections are clean and tight Yacuum read out Yacuum read out Warning p 6 5x10 mbar p 5 0x10 mbar The frequency of the turbo pump has fallen sharply All used recipients were 0 atm 0 atm Turbo pump f 1500Hz Turbo pump vacuum unknown sealings and switch recipients on again Ready Runtime 01 00 A Vacuum unknown Yacuum read out p 6 6x10 f mbar 0 atm Turbo pump f 1500Hz Runtime 01 00 FA Activate Recipient 2 C or recipient 3 D Option Start the pump by pressing the button 1 on the vacuum control panel and wait for the vacuum to stabilize below 1x10 5 mbar All pump sequences are pre programmed to run automatically 5 1 Shutting Down To shut down the plasma cleaner push START STOP on the touchscreen and wait until the recipient reaches atmospheric pressure Turn off green toggle switch at the back Yacuum read out Yacuum read out p 3 6x10 mbar p 2 4x10 mbar
13. z Bright blue Turbo molecular pump above 700 Hz Cyan The plasma source is ready for work The status monitor below in the middle of the screen shows you the actual situation Yacuum read out p 2 4x10 mbar 0 atm Turbo pump l 0 00A A Vacuum i Press ON to operate Grey Recipient on atmospheric pressure Vacuum read out Vacuum read out Recipient Recipient Recipient Initialization Initialization Dark blue Turbo molecular pump below 700 Hz Bright blue Turbo molecular pump above 700 Hz Recipient After the flowchart changes to Cyan the plasma cleaner is ready for use The status window mid screen shows the actual process stat Help for Main screen Statement In the main screen the flowsheet of the TPS 316 is shown The information display on the bottom of the screen shows the current status of the system Tap the symbols for recipients 2 amp 3 to use or park them After the system has initiated the plasma generator can be used The running time of the plasma generator is displayed on the information display To set this time press lt set runtime gt press lt Use plasma gt to start the plasma application Vacuum read out p 6 5xl0 mbar Runtime 01 00 TPS 316 Plasma User Guide V1 0 2013 8 Klaus Binder Labortechnik D 85241 Hebertshausen _ FlurstraBe 7 www binder labortechnik de 4 0 Plasma Cleaning Procedure 4 1 Preparing the
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