E-AFM Operating Instructions
Contents
1. amplifies the gnal in Z direction 2 Reduce the scan range as follows dick the TopV iew D isplay to activate it its title bar should be the same colour as the title bar of the scan panel Click zoam The mouse pointer becomes a cross and the Tool Info Panel opens look for an interesting region in TopV iew and make a square there with the mouse pointer T he size of the square isshown in the Tool Info Panel Zoutput 0 256 256 Plane Topview ForwardScan Wels G 2 55 5um Size 13 5um 5 a v 151um E 2 Dum m Iw Popup Apply 33 A FIRST MEASUREMENT OPTIMISING RESOLUTION Release the mouse button when the squares size is for example about 20 um Confirm the selection by double clicking the display using the left mouse button N ow the selection is enlarged to the whole display size You can abort the zoom function by clicking the right mouse button 3 The best resolution very much depends on the tip sample conditions effective tip radius sample cleanness etc In the following an example is given on the XYZ calibration grid to examine the step quality Reduce the Z rangeso that the signal displayed in the LineV iew window does not exceed the upper or lower limits Then lower the scan range to between 2 5um Set the values in Scan Panel one after the other Experiment with these values they can be reduced even further Between changes always allow t2. away from the instrument and the electronics Plug in the power supply 4 with the mains cable 6 and turn it on Finally remove the H eadG uard 10 and unscrew the scan head and put it in the operating position figure Scan head mounting right N ow the electronics and the microscope are connected T he Power LED sin the N anosurf logo should now be flashing and remain flashing until the control electronics has been initialized T he sensor status LED s can be ig nored for now UN PACKING AND INSTALLATION SOFTWARE INSTALLATION Warning This product contains a Class 1 Laser Invisible laser radiation T he laser is located behind the sensor Although the optical power should do no damage when the instrument is assembled avoid looking directly into the laser beam Laser source information Wavelength 830nm O ptical power lt 0 4mW Class one Laser Software installation System requirements T he System requirements for the easyScan E Line software are e PC with a Pentium 133M H z processor or higher a free CO M Port or USB port e Windows 95 or higher 6M B RAM or more 16M B recommended graphics adapter with 800 x 600 resolution and 16 bit colours high color or better resolution of 1024 x 768 recommended The N anosurf USB Adapter for easyScan option must be acquired to use the USB port Installation Procedure Turn on your computer and start W indows D o not run any other pr
3. for the start menu entry to hold the icons for easyScan E Line Cancel Help To accept the default click OK easyScan E Line M Accept the proposed name by clicking O K or type another name T he installation setup will now ask for the CO M Port Serial Port Selection xi Select the serial port where the easyScan Electronics is plugged into COM Part Select the serial port to which you have connected the E SPM electronics See section hardware installation T he setup program will start copying files onto your hard disk After successful installation you will get this confirmation SOFTWARE INSTALLATION UN PACKING AND INSTALLATION Installation Completed x Message p easyScan E Line has been installed successfully ut we need to restart Windows for the changes to take effect __Stayhere Heb Important T he E Line software CD delivered with the instrument contains calibra tion information specific to your instrument therefore you should keep a backup copy of the CD delivered with the instrument Simulated microscope You can start the easyScan software without having the microscope con nected to your computer We recommend using this simulation to explore the easyScan system measurements and software off line W hen the simulate microscope mode is started the following dialog box appears easy 5can communication error x AN No connect
4. measurement without waiting to finish the frame stop the scanning us ing ste and generate a copy of the view using ees After finishing the measurements you can store the photographs of your measurements in a storage medium eg your PC s hard drive see section Finish measuring 35 A FIRST MEASUREMENT JUDGING THE QUALITY OF THE IMAGES Judging the quality of the images From the quality of the measured images the quality of the tip can be ob served A good tip quality is necessary for high quality images of high reso lution When the image quality deteriorates dramatically during a previously good measurement the tip has most probably picked up some particles See section Problems an Solutions Image quality suddenly deteriorates In the following cases the sensor has to be replaced in order to re establish high image quality images in the top view consist of uncorrelated lines only images appear blurred First follow the suggestions in section Problems an Solutions Image quality suddenly deteriorates f these do not help the cantilever should be changed e f all peaksin the image have the same usually triangular shape the tip is no longer sharp and has to be replaced T he measured structure is called atip artefact ZOoutput 0 51 2 51 2 Plane TopVview ForwardScan CA aq m e ce E ar 5 Image containing tip artifacts 36 FINISH MEASURING A FIRST MEASUREMENT Finish meas
5. 90 E ae uoneqieo Nu SNJEIS 10sueg 9AU Jost i pe H UEIS NHV 3 EN 10109819 21 1 uonepeg sso U OSPIA 110 O8plA JexejdiynN OSPIA JOSIMSd NS snjejs peaH 9AUQ IN3V 3 ET e ova Hd OL TET ES ova g z FAG eDeyoA dij der NVE WOU peeds uoeouddy doosoauoeds yoeoiddy yoeqpss Z UEIS GEGSU AL SIXV Z A X lt ova ugar nor wojsn H gt user oav j Ndod 9160 Hoad 9S2 0 Jeuueu2 AUN uod 924 OGV c euueu2 S9IUu0J199 3 NdS 9eur1 3 UEIS SEO Od 180H Schematic of the easyScan dectronics 43
6. HE MEASUREMENT PLANE Adjusting the measurement plane scan Panel stop Finish Up Down Zoom Full move spec Photo Datatypes 2 Views 2 ZOutput 0 256 256 Raw Lineview ZOutput 0 256 256 Raw Topview ForwardScan ForwardScan 0 0537um Hg H 3 Fr a Due e e E Go oO d 0537 um wt Z Range 0 108um Time Line 0 5002 Slope 0 007 E ScanRangel1 99um 2 Offzet 0 36um X Slope 0 00 E m Rotation 0 0 Offeet 0 Oum Measure Fy amp Ew Meas ChO 1 Samples 295 Offset 0 O0um ScanDir Continous Ch142 Unadjusted dope measurement with improperly st X dope Hi UAE Ideally the plane of the measurement and the sample surface lie in the x y plane of the scanner But mostly the sample plane is tilted with respect to that ideal plane as shown is figure U nadjusted dope In this case the sample cross section in the X measurement direction as shown in the LineV iew window has a certain slope T his slope depends on the direction of the X direction and therefore on the rotation of the measurement as shown in figure Slope position A and B T he measurement plane should be parallel to the sample plane because this makes it easier to see smaller details in the measurement and because the z feedback loop functions more accurately in this case T herefore the measurement plane should adjusted by properly setting the values of X Slope and Y Slope It is also p
7. Yet Operating Instructions easyScan E AFM Version 1 0 TEXT amp LAYOUT ROBERT SUM PIETER VAN SCHENDEL ENGLISH VICK CONNOLLY NANOSURF AND THE NANOSURF LOGO ARE TRADEMARKS OF NANOSURF AG REGISTERED AND OR OTHERWISE PROTECTED IN VARIOUS COUNTRIES Aucusr 2003 Bv NANOSURF AG SWITZERLAND RO 2 Table of contents Introduction Whats AFM EEE EE Scanning with the easyScan E AFM Un packing and Installation Unpacking the instrument eeeeeessseeeee Storing the Instrument cccccceeeeceseeeeeseeeeeeeeeeeeeeaaaes Hardware installation eeeeeeeesseeeessse Software installation rrrrrrronrrrrerrrrrnnrrorervrnnnnnnnvennnnnnn System requirements Installation Procedure Simulated microscope Preparing for Measurement Installing the sensor ccccccsseeeeceeeeeeeccesseeeceeaeseeeseaees Selecting a sensor Inserting the sensor in the scan head Installing the sample seeeeeeeeees Preparing the Sample Stand alone measurements The small sample stage A First Measurement Starting the microscope cccccceeeeseeeeeeeeceeseseeeseeeaeeees Approaching the sample eeseeeeees ees 1 Coarse approach by hand 2 Fine approach by linear motor 3 Automatic final approach Starting a measurement ccccceeeeseeeceeeeee
8. ck loop thus corresponds to the local sample height Scanner coordinate system An image of the surface is made by recording the sample height asthetip is scanned over the sample surface in the x and y direction T he direction of the x and y axes of the scanner Is shown in the figure Scanner coordinate system The scanner axes may not be the same as the measurement axes INTRODUCTION SCANNING WITH THE EASYSCAN E AFM when the measurement is rotated or when the X or Y plane of the measure ment are changed T herefore the image x and y axes are denoted by an asterisk to avoid confusion i e X Y T he sample structure image is now obtained by recording the output of the height control loop asa function of thetip position see figure Sample struc ture images ZoOutput 0 256 256 Plane Lineview ZOutput 0 256 256 Plane Topview ForwardScan ForwardScan dE Sd 2 Hz m a 5 LL I S do Sample structure images surface of a plastic CD ROM asviewsfrom the sde and the top UN PACKING AND INSTALLATION Un packing and Installation T he following sections describe the installation of the easyScan E AFM Important To make high quality measurements the following precautions must be taken to keep equipment clean e N ever touch the sensor tips the cantilevers figure Components 11 d or the open part of the scan head figure Components 3 Ensurethat the surfaceto be measured is free of dust and
9. ed special preparation to clean its sur face Generally clean as little as possible If the surface is dusty try to measure on a clean area between the dust It is possibleto blow coarse particles away with dry oil free air but small parti cles generally stick so well to the surface that they can not be removed N ote that bottled pressurized air is generally dry but pressurised air from an in house supply is generally not In this case an oil filter should be in stalled Blowing dust away by breath is not advisable because it is not dry If surface contaminants such as grease or oil are present the surface should be cleaned with a solvent Suitable solvents are distilled or demineralised water alcohol or acetone depending on thecontaminant T hesolvent should be very pure in order to prevent the collection of impurities on the surface when the solvent evaporates T he sample should be cleaned several timesto remove dissolved and redeposited contaminants if it is very contaminated D elicate samples can be cleaned in an ultrasound bath 21 PREPARING FOR MEASUREMENT INSTALLING THE SAMPLE Standard samples T he M icrostructure sample supplied with the instrument figure Compo nents 11 b is meant as a test sample It can be used to check the correctness of the instrument calibration T he grid is manufactured using a standard silicon process that creates square holes in a silicon oxide layer on a silicon substrate T he grid per
10. eeeeeeeeeeeeeees Adjusting the measurement plane Optimising resolution eseseeeeeeeeeeeeeene Snapshots of images ccccccccessseeseseeeeeeeeeeeesseeaeeeeeeeees Judging the quality of the images Finish measuring eeeeecsseeeeeeeeeee nnne Maintenance Scan head Scan electronics 5 m 9 Problems and Solutions Sensor Fail LED Image quality suddenly deteriorates No connection to microscope Technical Data 39 39 40 41 Wuat is AFM INTRODUCTION Introduction T his manual gives instructions on how to set up and use your easyScan E AFM system T his introduction chapter gives some general information on the atomic force microscopy technique and its implementation in the easy Scan E AFM The next chapter Un packing and Installation should be read when installing your easyScan system T he chapters Preparing for M eas urement and A Firg M easurement should be read by all users because they contain useful instructions for everyday measurements T he other chapters give more information for advanced users T hose who need a more detailed description of the functions of the easyScan software should refer to the Software Reference manual What is AFM M icroscopy is one of the most exciting scientific techniques T he insight into small dimensions has led to a new understanding of the s
11. er 40 TECHNICAL DATA Technical Data T he specifications given here are typical values of the N anosurf products T he exact specifications vary somewhat from instrument to instrument and are given on the calibration certificate delivered with the instrument Scan range and resolution M aximum X Y Scan range 60 80 um M aximum Z range 20 um Drive resolution XY 1 7 nm Drive resolution is calculated by dividing the scan range over 16 bits Common Scanner Features Tripod stand alone design Automatic approach range 5 mm M ax approach speed 0 1 mm s Sample size Unlimited Sample observation optics Dual lens system top view side view O ptical magnification top x12 side x10 Field of view top 4x4 mm side 3x5 mm Sample illumination LEDs Alignment of cantilever Automatic adjustment Scan head weight 350g easyScan electronics M ax scan speed 1800 data points per second feedback loop bandwidth 3 kHz Electronic weight 2 5 kg Power consumption 25 VA 41 TECHNICAL DATA 42 Compatible cantilevers M anufacturers Static Force M odes Available tips Typical static load N anoSensors N anoW orld 0 2N m Type CONTR 1 6N m Type ZEILR Standard SuperSharpSilicon H ighAspectR atio Diamond 10nN TECHNICAL DATA euondo snyeysabels uoeoJddy z 9 i Jengiqueg 4 seAug 109 JOUUBDS 100 ZAX 1 1 r 1 1 D 1 1 1 1 Jose Jeyijduuv 101981
12. f this process Important Nothing should ever touch the sensor especially the tip end e The sensor holder spring in the open part of the scan head see figure mounting the sensor is very delicate and should not be bent Selecting a sensor T he sensor should have the following properties T he bottom of the sensor chip must have grooves that fit into the align ment chip T he cantilever should have a nominal length of 225 um or more and a width of 40 um or more e T he backside of the cantilever must have a reflective coating Uncoated cantilevers transmit much of theinfrared light of the deflection detection system Presently only sensors from the companies N anoWorld and N anoSensors can be used Tyoe CONTR and ZEILR sensors can be used INSTALLING THE SENSOR PREPARING FOR MEASUREMENT Sensor Left Sensor alignment system Right Sensor chip viewed from the top Inserting the sensor in the scan head 1 Turn the scan head upside down 2 Take the D ropStop figure Contents 11 f and remove the sensor inser tion tool Gently snap the DropStop over the scan head see drawing Installing the D ropStop Installing the D ropStop 3 Plug the sensor insertion tool Components 11 9 into the hole behind the sensor holder figure mounting the sensor top right T he sensor holder flap opens 4 Use the tweezers to take the sensor out of its box T he sensor IS now oriented face up 5 Let the sensor ca
13. he computer to scan a couple of lines before continuing Pay attention to the height of the signal in the LineView window It should not exceed the window height if it does the z R ange is too small and should be increased 4 In the TopView window values which do not fit in the selected colour range appear saturated i e they become white or black To improve image display quality open the View Panel and click arii in the Visible Input Range section T his improves the contrast x DataType Forward can Input Z0utput Delete LineMath GENE Display Topyiew Visible Data Range Range EG um B Eull Offset 0 020um B Optimize gt gt Mew 34 SNAPSHOTS OF IMAGES A FIRST MEASUREMENT Datatypes 1 Views 2 FOutput 0 256 256 Raw DualLinevieyw FOutput 0 256 256 Average TopView ForwardScan ForwardScan E E 3 3 oo ce r C oc E om E base 5 s o E o I E I ps E e 3 Dum xt 18 5um Dum xt 18 5um mages of a succesful measurement Snapshots of images W hen you are satisfied with your image and would liketo keep it you can take a snapshot and save it for later During the measurement you can select ete in the Scan Panel After having completed the actual frame a copy of the measured image is taken and displayed in a separate window behind the Scan Panel f you would liketo takethe snapshot of the view asit appears during the
14. igh humidity corrosion will ap pear Clean the sensor holder adjustment chip by blowing away dust using dry oil free air Scan electronics Clean the case and the controls with a soft cloth lightly moistened with a mild detergent solution D o not useany abrasive pads or solvents like alco hol or spirits 38 PROBLEMS AND SOLUTIONS Problems and Solutions Sensor Fail LED e T hered Sensor Fail LED on theE AFM Drive electronics can be caused by a misaligned sensor chip e Check that the sensor chip is lying perfectly in the alignment chip Remove the sensor using the sensor insertion tool 11 9 Blow away dust from the alignment chip and the sensor s back side using dry oil free air Remount the sensor Image quality suddenly deteriorates e When a scan line suddenly starts reproducing badly the tip may have picked up some particles e Continue measuring for a while 1 2 images the tip may eventually loose these particles again e Retract the sensor by clicking wie then perform a new ap proach e Try to induce changes in the tip s end W hile measuring increase the force SetPoint in the Feedback Panel Restore the set point to its old value when the contrast improves or nothing happens after scan ning several lines Change the sensor if no improvement can be seen after these procedures e f the scan line in the LineView suddenly disappears the tip has lost contact Increase the value
15. iod is 10 um for the large scan heads the depth of the holes is approximately 100 nm The exact period and height with 3 accuracy are given on the box Certified XYZ calibration grids are available as an option TheCD ROM piece is a part of a stamped CD ROM on which no reflec tive and protective coatings have been deposited T his allows you to meas ure the pits that have been stamped in the CD Both sample should be kept in their boxes T hen it should be unnecessary to clean them Cleaning is not advisable because the samples are rather delicate Stand alone measurements You can either use the instrument with the supplied small sample stage or as a stand alone instrument Use the small sample stage if possible and limit the stand alone operation to samples that are too large For stand alone measurements the scan head itself can be put directly on top of the sample Small plastic protection feet for under the three metal feet are pro vided to protect delicate samples from scratching figure components 11 i E AFM used as Stand Alone instrument INSTALLING THE SAMPLE PREPARING FOR MEASUREMENT The small sample stage T he small sample stage can be used to comfortably position the sample An x y positioning table with micrometer screws IS available as an option Small Sample Stage Mount the small sample onto the sample holder T he simplest way to do this is to use put the sample on the sticky side of a Post it
16. ion to microscope Check power supply and serial cable connection Start Simulation Config COM Por By clicking Start Simulation a simulation of the microscope is started T his imitates most of the functions of the real microscope T he sample is replaced by a mathematical description of a surface You can now follow the instructions in the chapter A firs measurement To explorethe system in the Simulate M icroscope mode with the micro scope connected activate it in the menu O ptions PREPARING FOR MEASUREMENT INSTALLING THE SENSOR Preparing for Measurement T his chapter describes actions that you perform on a day to day basis as a preparation for your measurements T hese steps are changing the sensor selecting a sample stage and preparing the sample Installing the sensor To maximise ease of use the N anosurf E AFM is designed so that the sen sor can be installed and removed without having to readjust the cantilever deflection detection system T his is possible because an alignment system is used that consists of an alignment chip and matching grooves in the back side of the sensor T his positions the sensor with micrometer accuracy see figure Sensor Left N otethough that this accuracy is only guaranteed when the sensor and the mounting chip are absolutely clean Installation of the sensor should therefore still be carried out with great care because good results are strongly dependant on the accuracy o
17. is measurement is a so called static measurement mode in which the static deflection of the cantilever is used H owever to achieve atomic resolution ultra clean and flat surfaces pre pared in highly sophisticated vacuum systems are needed N evertheless measurements in air can though give useful results for many technically relevant surfaces In this manual the use of the dynamic modes in air on technically such surfaces will be described Scanning with the easyScan E AFM T he easyScan E line atomic force microscope E AFM can be used in the static force contact operating mode The AFM sensor isa microfabricated cantilever with an integrated tip mounted on a sensor holder chip see fig ure Cantilever W hen the sensor tip comes In contact with the sample a repulsive force acts on it that increases with decreasing tip sample distance In the static force operating mode the cantilever bending due to the force acting on thetip is measured using alaser beam deflection system S Qum 9 3um Oum E AFM system Compute Cantilever with deflection measurement system scanning the sample SCANNING WITH THE EASYSCAN E AFM INTRODUCTION Cantilever microfabricated Silicon cantilever with integrated tip 450 um long 50 um wide T he measured laser beam deflection can now be used as an Input for a feedback loop that keeps the tip sample interaction constant by changing the tip height T he output of this feedba
18. nce of a fraction of a millimetre T he distance between the cantilever and its mirror image should now be around a cantilever length depending on the type of cantilever 3 Automatic final approach Open the Feedback Panel in the menu Panels Feedback Panel x SetPoint 20 011nN E P Gain B Default 10 I Gain 10 Hot available fo 050v B gt Check that the correct settings are used e SetPoint 20nN or less e P Gain I Gain 10 W hen you haveto changethe instrument settings in any panel you can use thefollowing methods to change them Activate any input by clicking in it with the mouse pointer or by select ing it with the Tab key e T he value of an activated input can be increased and decreased using the up and down arrow keyson the keyboard T he new valueis automatically used after one second T he value of a numerical input can also be increased and decreased by clicking the arrow buttons amp with the mouse pointer T he new value is automatically applied after one second The value of an active numerical input can be entered using the key board T he entered value must be confirmed by pressing the Enter or Return key or by clicking with the mouse pointer 28 STARTING A MEASUREMENT A First MEASUREMENT T he selection of a drop down menu e g Zour J can be changed using the mouse T he selected value must be confirmed by pressing the Enter or Ret
19. note that is attached to the sample holder using double sided adhesive tape It is ad vantageous to measure the standard samples using the small sample stage because It allows better positioning Sample mounted onto the sample holder Important Avoid all mechanical impact on the sensor when placing the sample holder under the scan head Any impact will damage the tip A FIRST MEASUREMENT STARTING THE MICROSCOPE A First Measurement Preparations are now complete T he instrument has been assembled and the software installed A static force mode sensor and the microstructure sample figure Components 11 b are ready for measurement In this chapter step by step instructions are given as to how to operate the microscope and get your first pictures M ore detailed explanations for the software and the system are given in the software reference manual Important e Never touch the sensor or the surface of the sample Good results rely heavily on the accuracy of the preparation of the tip and the sample Avoid exposing the system to direct light during measuring T his could influencethe sensor unit and deterioratethe quality of the measurement Starting the microscope Check that the power supply 4 is connected to the AC mains power supply and that the power supply is on The red LED of the control electronics 2 3 are flashing and the green Sensor OK LED is shining Start the easyScan E Line software on your c
20. of Z Range in the Scan Panel Increase the force load Set Point e Click me in the Approach Panel then repeat the steps in chap ter Start measurement 39 PROBLEMS AND SOLUTIONS No connection to microscope easyScan communication Error xj AN No connection to microscope Check power supply and serial cable connection Start Simulation Config COM Por T his error message appears when the scanning software is waiting for an answer from scan electronics T his can have various reasons T he microscope is not connected f you wish to perform a simulated measurement select statsmustion Otherwise check the connection and select T assn e T he easyScan SPM electronics is not connected to the power supply check that the power LED son the electronics are on check the connection T he easyScan SPM electronics is not connected to the computer check the connection e T he wrong COM port has been selected during software installation Use Giacom Po and select the correct CO M port in the dialog COM Port Configuration X easyScan Electronics connection COM Port l Cancel e T hescan electronics Is performing a task which lasts an unforeseen length of time causing a timeout Using Windows NT this can happen when the system is occupied with itself and blocks the serial port Use Try again T he electronics is damaged Contact your deal
21. ogram while installing the scan software SOFTWARE INSTALLATION UN PACKING AND INSTALLATION f you want to use the U SB Adapter for easyScan install it first following the instructions included with the adapter Insert the backup copy of your E LineCD Windows NT 2000 XP Make sure you have administrator privileges before installing the soft ware All operating systems Start the setup exe program on the CD the following screen will now appear v easyScan E Line Messag x This program will install the ET easyScan E Line Programm o comi Disk space needed 3280 kB a i Don t Install Help Select the button Install to install the data acquisition program easy Scan on your computer UN PACKING AND INSTALLATION SOFTWARE INSTALLATION Setup will ask for the directory in which the program files are to be copied Target Directory x Message F OK p Please enter the directory where the easyScan E Line files should be copied into Er To accept the default click OK Help C Program Files N anosurfseasyScan E Line Browse Put them in the proposed directory unless the Program Files directory has a different name in your language of the W indows operating system Afterwards setup will ask for the start menu entry or program group in which easyScan isto be placed Start Menu Entry j x i Message OK p Please enter name
22. omputer T he main program window and a message box appear Process Window ES Downloading firmware to easyScan Electronics RH N ow your computer is communicating with the control electronics to ini tialise the system T his process is repeated every timethe control electronics is turned off and on again When download is completed the electronics red LED s change from flashing to constantly shining some control panels appear see figure M ain program window 24 STARTING THE MICROSCOPE A FIRST MEASUREMENT Nanosurf easyScan E Line File Panels Tools Options Window m amp Appr Scan Feed Spec View Datal Tool Resut i t ou Rs Ry i gt A x x Start Finish Up Down Zoom Full Move Spec Photo DataType ForwardScan Apply Input ZOutput Delete ZOutput 0 256 256 Raw LineView ZOutput 0 255 256 Plane Topview LineMah Plane v New ForwardScan ForwardScan Display TopView Visible Data Range Range 2 790um B Full Offset 0 022um B Optimize gt SetPoint 20 011nn E P Gain B Default Gain p B not available pv 4 x E z Status Adjustment done ZRange 11 250um a Time Line 0 700s El X Slope 0 00 E Apply Mes ScanRange 9 88um E Z Offset 0 43um El Y Slope 0 00 E T Withdraw 4 Approach gt Ready Online Default E AFM ea Default E AFM ez 16 03 002 ezh E AFM A M ain program window C heck that the spring constant corre
23. or the side view 1 Coarse approach by hand Ensure a large enough distance is available between sensor and sample surface so as not to break the cantilever off then push the sample holder 12 carefully under the sensor APPROACHING THE SAMPLE PPROACHING THE SAMPLE A FIRST MEASUREMENT Use the three levelling screws to lower the scan head so that the sensor is within 1 2 mm of the sample Figure coarse approach Take care that all screws are moved approximately the same distance so that the scan head remains levelled Coarse approach with the leveling screws W hen the sample is reflective the mirror image of the cantilever should be visible in the side view of the integrated optics W hen the sample is not reflective the shadow of the cantilever may be visible If neither a mirror image nor a shadow are visible change the lighting conditions until it is visible for example by changing the Illumination or by shading the light from bright surfaces in the room or outside 2 Fine approach by linear motor Choosethe menu Panels in the easyScan program Open the Approach Panel Approach Panel xj Status Adjustment done Move withdraw Approach gt 27 A FIRST MEASUREMENT APPROACHING THE SAMPLE Watch the distance between tip and sample in the side view of the inte grated optics N ow click and hold Jin the Approach Panel to move the tip towards the sample to a dista
24. ossible to align the x 30 DJUSTING THE MEASUREMENT PLANE A FIRST MEASUREMENT y plane of the scanner with the sample plane using the three coarse ap proach screws on the scan head but this should not be done when thetip is approached to the sample cantilever Z with tip scan line X Slope in the LineView middle line of the LineView Wi thas th W Ling i O A tion vA rotatio with 0 e ine Vie Slope Samples and measurement orientation before dope adjutment You can align the measurement plane using the following procedure Alter the value of X Slope using the arrow buttons until the x axis of the scan line lies parallel to the x axis of the sample You can measure the slope in the LineV iew using the angle tool see Software Reference Enter the value 90 in the Rotation input to scan along the y direction of the scanner i e the samples slope as shown in the schematics view B If the input for Rotation is not visible you can make it visible by clicking If the scan line is not horizontal alter the value for Y slope until the y axis of the scan lies parallel to the y axis of the sample Reset the Rotation to 0 The LineView shows the X slope again 31 A FIRST MEASUREMENT OPTIMISING RESOLUTION T he value of the Z O ffset varies slightly during measurement T his is cor rect because the option Auto Adjust Z O ffset in the menu O ptions sh
25. ould be active x Stop Finish Up Down Zoom Full move spec Photo Datatypes 2 views 2 ZOutput 0 256 256 Raw Lineview ZOutput 0 256 256 Raw Topview ForwardScan ForwardScan E a re i iri m e ZOutput 0 0267um 0537um wt Z Range D 108um Time Line 0 5002 X Slope 0 30 E ScanRange 1 98um 2 Offset 0 28um X Slope 0 00 B ex Rotation 0 0 Offset0 Oum Measure Fa amp Ew Meas Ch l Samples 235 v Offzet 0 O0um ScanDir Continous C Chl 2 Displays after adjusting the dopes a ul Optimising resolution You have prepared your measurement so that the scan line in the centre of the LineV iew reproduces stably N ow the scan range hasto be reduced and the measured signals amplified in order to observe the surface structure Reminder M easurements on the micrometer nanometer scale are very sen sitive Direct light fast movements causing air flow and temperature varia tions near the scan head can influence and disturb the measurement T he following procedure applies to measurements on the M icrostructure sample figure components 11 b 32 OPTIMISING RESOLUTION A FIRST MEASUREMENT 1 Reduce the data range by reducing Z Range in the Scan Panel to about 0 3 um in order to improve the resolution of the measured data ZOutput 0 256 256 Raw LineView ZOutput 0 256 256 Raw LineView ForwardScan ForwardScan Diminishing Z Rang
26. possible residues Note that the scan head is fixed onto the small sample stage by three levelling screws figure Scan head mounting left ALWAYS secure the scan head in this way for transportation or storage Scan head mounting left transport postion right operating postion UN PACKING AND INSTALLATION UNPACKING THE INSTRUMENT Unpacking the instrument Before unpacking the instrument suitcase check for the following items Documents and software 12 CG S 1 D sa se 3 e E Pate af 9 h Components T he easyScan E AFM system T he easyScan E AFM system consists of the following components Fun oa l easyScan E SPM electronics E AFM Drive electronics E AFM scan head Power supply LPS 1 ul BR UN RS232 cable connectsthe easyScan SPM electronicsto the computer s serial port STORING THE INSTRUMENT UN PACKING AND INSTALLATION Mains cable Cable connects the easyScan SPM electronics to the E AFM Drive Helix cable connects the E AFM scan head to the E AFM Drive Small sample stage H eadG uard E AFM tool se containing a Sample holder br 2 Samples CD ROM piece M icrostructure C screwdriver ct Set of 10 sensors type CONTR e tweezers f DropStop g sensor insertion tool h Allen key I Protection feet T he sensor insertion tool is normally mounted inside the DropStop 12 Software installation CD containing easyScan E Line softwa
27. re a cali bration file E AFM Operating Instructions this manual easyScan E Line software reference EBS ONO A Calibration certificate for your E AFM scan head and electronics 13 Instrument case In addition a computer is needed that meets the requirements described in the section Software Installation Storing the Instrument If you have to send in the instrument transport it or if you are not using it for some time please pack it in the instrument suitcase T hen the instru ment is protected from dust and the rubber feet of the sample stage vibra tion isolation are relieved UN PACKING AND INSTALLATION HARDWARE INSTALLATION Turn off the instrument as described in the section finish measuring and remove all cables in the opposite order as they were mounted Fix the microscope in the transport position and fix the H eadG uard with its two screws see figure Scan head mounting Pack all components as shown in figure Components Important For transport always secure the microscope to the small sample stage and put it in the original N anosurf case Hardware installation Important Please check that your local mains voltage correspondsto that of the power supply figure Components 4 M ake sure that your mains connection is protected against excess voltage surges Choose a steady table where you can work undisturbed To ensure the faultless operation of the E AFM it has to be isolated f
28. refully slide into the silver alignment chip in the scan head M ake sure the sensor lies precisely in the alignment chip figure mounting the sensor bottom left PREPARING FOR MEASUREMENT INSTALLING THE SENSOR M ounting the sensor top left T he sensor holder spring top right Plugging in the sensor insertion tool bottom left inserting the sensor Bottom right a correctly built in sensor 6 GENTLY pull the sensor insertion tool out of the hole the sensor holder flap closes and holds the sensor chip tightly figure mounting the sensor bottom right 7 Remove the DropStop from the scan head Please note that the laser beam is blocked by the DropStop as long as it IS in place T he sensor LED on the E AFM Drive only displays the actual status of the sensor after removing the D ropStop 8 T he green OK sensor control LED on the E AFM Drive electronics should now be on If this is not the case refer to Chapter Problems and Solutions 20 INSTALLING THE SAMPLE PREPARING FOR MEASUREMENT SENSOR Lm 6 FAIL ok i Sensor tatus LED s Installing the sample Preparing the Sample TheE AFM can be used to examine any material with a surface roughness that does not exceed the height range of the scanning tip N evertheless the choiceand preparation of thesurfacecan influencethe surface tip interaction Examples of influencing factors are excess moisture dust grease etc Be cause of this some of the samples ne
29. rom vibrations heat emission and air current We also recommend covering the instru ment with a box to shield it from near infrared light from artificial light sources because this light may cause noise in the cantilever deflection detection system If the vibration isolation of your table is insufficient for your measurement purposes an optional active vibration isolation table is available Keep the E AFM scan head figure Components 3 in the transport posi tion figure Scan head mounting left on the small sample stage when using small sized samples 9 Fix the helix cable 8 to the plug using the screwdriver 11 c T he helix cable is used to isolate the scan head from vibrations of thetableit is standing on Takecarethat it islying loosely on the tableto ensure proper operation and avoid stretching it Connect the helix cable 8 to the E AFM Drive electronics 2 HARDWARE INSTALLATION UN PACKING AND INSTALLATION M easurement setup complete with small sample tage Connect the E SPM Electronics 1 to the E AFM Drive 2 using cable 7 Make sure your computer is turned off T hen connect the E SPM elec tronics 1 to a free serial port CO M Port on your computer with the RS232 cable 5 f you are using the U SB adapter for easyScan electron ics DO NOT connect it Connect the power supply 4 to the E SPM electronics 1 For optimal system performance put the power supply some distance
30. sponds to that of your cantilever Open the Sensor Configuration dialog via the menu O ptions C onfig Sensor Enter the correct spring constant The value is approximately 0 2 for CONTR cantilevers the exact value is sometimes given on a separate piece of paper delivered with the sensors Sensor Configuration x Cantilever spring constant 29 A FIRST MEASUREMENT 26 Approaching the sample To start measuring the sensor s tip must come within a fraction of a nano meter of the sample without touching it with to much force To achieve this a very careful and sensitive approach of the sensor is required T his delicate operation is carried out in three steps Coarse approach by hand fine approach by motor and the automatic final approach If the sample is reflective the different stages of the approach are best ob served using the side view of the integrated optics of the scan head figure Integrated optics right You can use the cantilever as a yardstick to judge distances in the views of the integrated optics Integrated optics left view through the magnifier from top right sde view An optional video camera is available that allows you to see both views from your chair T his camera is particularly useful when the microscope is in a position that is difficult to reach or when you do not wish to contami nate the sample with dust particles from your body Click for the top view click 3 f
31. tructure of materials and forms of life With the invention of the scanning tunnelling microscope ST M in the early eightiesit became possibleto look into thefascinating world of atoms TheSTM was developed by Gerd Binnig and H einrich Rohrer in the early 90 s at the IBM research laboratory in R schlikon Switzerland For this revolutionary innovation Binnig and Rohrer were awarded the N obel prize in Physics of 1986 H owever the STM technique is restricted to electrically conducting sur faces A further development of the STM called the Atomic Force M icro scope AFM was developed by Gerd Binnig Calvin Q uate and Christoph Gerber The AFM extended the abilities of the STM to include insulating material Both the AFM and theSTM microscopy techniques works with out optical focusing elements Instead a small sharp probing tip is scanned very closely across the sample s surface T he distance between the tip and the sample surface is so small that atomic range forces act between them The tip is attached to the end of a cantilever in order to measure these forces T heforce acting on thetip can then be determined by detecting the deflection of this cantilever INTRODUCTION SCANNING WITH THE EASYSCAN E AFM T he measurement of the cantilever deflection can be used to control the tip surface distance on an atomic scale T hus enormous resolution can be achieved such that even atomic arrangements of surfaces can be probed T h
32. uring Click stop to stop measuring You can retract the sensor to asafe and visible distance from the sample by clicking __witrdaw in the Approach Panel and afterwardsclicking__ for some time Close all panels in order to see the saved snapshots Activate the measurement document you would liketo save by clicking It Select the menu File gt Save as Select the name and the folder where you would like to store the measurement T hese stored measurements can be reload with the easyScan software and then viewed analysed and printed see also Software Reference manual any time Turning off the instrument Exit the easyScan E Line program after having stored all desired images If you leave the program without saving some data the program asks if you wish to save them ET MEER x AN Save changes to ezD atal Ho Cancel Turn off the power supply If you perform measurements regularly Leave the instrument and cover the scanner to protect it from dust If you do not operate the instrument for several weeks Put the instrument back into the instrument suitcase See also Storing the Instrument 37 MAINTENANCE Maintenance To ensure fault free operation of the microscope the following instructions for maintenance have to be followed Scan head It is very important to keep the sample holder and the open part of the scanner clean If exposed to moisture h
33. urn key or by clicking with the mouse pointer Click an in the Approach Panel T he sensor holder is now moved towards the sample with the help of a linear motor The motion continues until the measured signal crosses the threshold value given in the SetPoint input of the feedback panel From now on the distance between sample and sensor is controlled automatically by the electronics The dialogue box Approach done appears when the approach has been completed Nanosurf easyScan x Approach Done I Click OK Starting a measurement After a successful approach the instrument starts measuring automatically In the scan panel enter an image size of about half the maximum scan range of your scan head in the scan range input An image of the measurement will be drawn on your screen showing aline in the LineView and a plane in the TopView Watch the displays for a while until about a quarter of the TopV iew image has been measured A nervous line in the LineV iew indicates too many vibrations too much acoustic noise or direct light shining onto the sensor T his means that you should stop measuring and reduce or eliminate the disturbances Click step and follow the instructions of the chapter Problems and Solu tions When the line in the LineView is calm and reproduces consistently you can continue with the next section 29 A FIRST MEASUREMENT ADJUSTING T
Download Pdf Manuals
Related Search