Teledyne Stud Sensor 452 User's Manual
Contents
1. rone eo aae e rona vo on kovo 2 1 2 1 MECHANICAL SPECIFICATIONS 0 4 444448 2 1 2 2 PERFORMANCE SPECIFICATIONS 2 2 2 3 OPERATING LIMITS ccccccceeeeeseseseseseesseseseseseseseseseseseseseseeeeeeees 2 2 2 4 ELECTRICAL SPECIFICATIONS 2 0 444 2 2 2 5 CALIBRATION 2 2 2 6 PRESSURE DROD an se Ene ee Exe ee eu e 2 3 2 T OPTIONS er E 2 4 27 1 AC Power Adapter e t m ni 2 4 2 7 2 Ozone Destructor 1 4 Tube Fittings sss 2 4 3 THEORY OF OPERATION ee eene eee eo ee sese et tn aee ena 3 1 4 INSTALLEXTIQN eerie eres oe eoi erbe nep oe v 4 1 4 1 4 1 4 2 MECHANICAL 5 4 1 4 3 ELECTRICAL 4 1 4 3 1 Power Supply sues ono oen eee 4 2 4 3 2 Analog Output cessent nenne 4 3 4 3 3 Zero Calibration 1 eee 4 3 4 3 4 Status isa reete pepe ires 4 4 A DRS232 A BI It F aGO i i ion a 4 5 4 4 GAS CONNECTIONS 4 6 4 5 START UP AND CALIBRATION PROCEDURE nenne 4 7 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 5 SENSOR AND SYSTEM TROUBLESHOOTING 5 1 S T STATUS 8 asie2. MODEL 452 PROCESS OZONE SENSOR Teledyne Instruments Advanced Pollution Instrumentation Division 9480 Carroll Park Drive San Diego CA 92121 5201 TOLL FREE 800 324 5190 TEL 858 657 9800 FAX 858 657 9816 E MAIL api sales teledyne com WEB SITE www teledyne api com Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E SAFETY MESSAGES NOTE IN The M452 contains no user serviceable parts A CAUTION There is risk of dangerous UV exposure when the cover is removed from the sensor Take necessary precautions to avoid exposure CAUTION N High voltages exist inside the sensor Please use caution when sensor cover is removed Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E TABLE OF CONTENTS SAFETY MESSAGES esiscsssscssasssestscssssssscssssccasssssessessecssecscassoeescsousencsoes I TABLE OF CONTENTS siscccsscccsssssassecssscssvsescssscccsesssaassssessoosesassoeseses LIST OF V LIST OF TABLES eere en us svk osb eto ava osa no V WARRANTY POLICY 1 PRODUCT DESCRIPTIONS eee ee eene ee eate ee eee 0000000000000 1 1 1 1 M452 PROCESS OZONE SENSOR 4 4 1 1 1 2 M452 HIGH PURITY PROCESS OZONE 1 1 2 SPECIFICATIONS ice ee oo eo
3. The M452 has four digital status outputs for indicating error status and when operational parameters have moved out of normal limits These outputs are in the form of opto isolated open collector transistors They can be used to drive status LED s on a display panel or interface to a digital device such as a Programmable Logic Controller PLC Figure 4 2 below shows the most common way of connecting the digital outputs to an external device such as PLC Note Most devices such as PLC s have internal provision for limiting the current that the input will draw from an external device When connecting to a unit that does not have this feature external dropping resistors must be used to limit the current through the transistor output to 50mA or less See Section for details on using the Status Outputs for diagnosing sensor and system level malfunctions M452 Programmable Logic Controller or other device 5V Digital Output 1 4 Collector T Digital A 4 Input Digital Output Common Emmiter Ground Provided Opto Isolator by PLC Figure 4 2 Digital Output Connections Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 4 3 5 RS232 485 Interface The M452 features a bi directional digital serial interface that can be used for sensor control and data acquisition Please contact Teledyne API for documentation on the use of the RS232 485 interface 4 5 Teledyne API M452 Ozone Sensor Instruction Manual 028
4. EXPRESSED OR IMPLIED THE REMEDIES SET FORTH IN THIS SECTION ARE THE EXCLUSIVE REMEDIES FOR BREACH OF ANY WARRANTY CONTAINED HEREIN TELEDYNE API SHALL NOT BE LIABLE FOR ANY INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF OR RELATED TO THIS AGREEMENT OF TELEDYNE 5 PERFORMANCE HEREUNDER WHETHER FOR BREACH OF WARRANTY OR OTHERWISE TERMS AND CONDITIONS All units or components returned to Teledyne API should be properly packed for handling and returned freight prepaid to the nearest designated Service Center After the repair the equipment will be returned freight prepaid viii Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 1 Product Descriptions 1 1 M452 Process Ozone Sensor The Teledyne API M452 is a microprocessor based sensor for measuring the concentration of gaseous ozone in processes such as semiconductor wafer fabrication water treatment and ozone research The M452 can be used as a full flow process sensor or as a sensor to monitor a small flow of gas diverted from a process stream The M452 features a standard 0 5 volt analog signal for reporting process concentration as well as 4 digital status outputs for sensor diagnostics A bi directional serial interface is also provided for computer control The M452 operates from an external 15 vdc power source 1 2 M452 High Purity Process Ozone Sensor The M452A High Purity Process Ozone Sensor includes a 316L manifold with a 10Ra finish
5. state 1 Sensor Normal State Reference or O K Measure gt 4995mV Reference lt 1000mV 2 Invalid Pressure gt 45 psia Normal State Reading Negative Ozone Concentration 3 Lamp Reference Normal State Low Detector lt 600mV 4 Cell Dirty Measure Reference Normal State ratio lt 0 5 zero gas 5 3 Sensor O K The normal state for the Sensor O K output in ON During the warm up period on start up this output will stay off until the UV lamp reaches a minimum intensity If this output remains off after the 15 minute warm up period or goes off during normal operation then the M452 is in need of servicing If the Sensor O K output turns off AND the Lamp Low output is on this indicates that the lamp intensity has below the minimum level required for proper operation If the Sensor O K output turns off and the Lamp Low output is also off then one of the analog voltages in the sensor has exceeded the range of the internal A D converter Adjustment by qualified service personnel is required 5 2 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 5 4 Invalid Reading The normal state for the Invalid Reading output is OFF If this output turns on this indicates that the M452 is still operational but a system fault or calibration fault exists that may make the current ozone reading invalid The Invalid Reading output is turned on for any of the following conditions 1 When the measured pressure i
6. 14 VCR face seal fittings are standard 1 1 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E INTENTIONALLY BLANK 1 2 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 2 Specifications Note All specifications contained herein are subject to change without notice Please contact Teledyne API to obtain the current specifications 2 1 Mechanical Specifications 15 CONNECTOR 3l uuu Model 452A Electrical connections 1 Analog out 2 Analog out 3 Ground 4 15V in 5 15Vin 6 Digital in 1 6 71 7 Digital in 2 8 Digital out 1 170 4 9 Digital out 2 10 Digital out 3 11 Digital out 4 12 Digital out common emitters 18 RS485 A 14 RS485 B 15 Ground Female 1 4 VCR Gland and Nut 1 06 Z 99 49 27 0 ze 25 1 7 E M 2 13 Male 1 4 VCR 5 13 54 0 Gland and Nut 130 3 3 15 ry al 80 0 1 an X XX Dimensions in inches XX X Dimensions in millimeters 4X 8 32UNC 2B X 125 3 2 DP 4 1 10 MOUNTING HOLES 27 9 Figure 2 1 M452A High Purity Ozone Sensor Weight 2 8 Ibs 1 27 kg Surface Finish M452 32 winch Ra M452A 10 inch Ra Fittings M452 Gyrolok M452A 4 VCR Wetted Materials 316L Stainless Steel Sapphire Virgin PTFE 2 1 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 2 2 Performance Specifications Acc
7. 52 Rev E 4 4 Gas Connections Gas connections to the M452 are made using compression tube fittings M452 or 4 VCR face seal fittings M452A The compression fittings can be used with 4 O D Stainless Steel or Teflon tubing The M452 is not sensitive to flow direction it does not matter which of the two fittings is used as the gas inlet To avoid contamination of the optical cell in the M452 ensure that all tubing upstream of the M452 is properly cleaned and purged before the M452 is installed In order to achieve an acceptable response time and to avoid sample degradation the system should be set up so that a minimum flow rate of 0 1 LPM is established through the M452 If long tubing runs are used between the measurement point and the M452 then higher flow rates should be used to avoid sample degredation Appropriate tests should be conducted to determine minimum flow requirements 4 6 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 4 5 Start Up and Calibration Procedure 1 Verify that the proper electrical connections have been made See Section 4 3 and apply power to the M452 Allow the M452 to warm up for at least 15 minutes 2 Purge the M452 with zero gas usually oxygen at a minimum flow rate of 0 1 LPM for at least 2 minutes 3 Check that the Status Outputs See Section 4 3 4 are in their normal states and no errors are indicated 4 Close the zero calibration inp
8. The coaxial power jack is configured so that the ground connection is on the outside shield and the 15V connection is on the center pin If power is to be supplied through the DB 15 connector the positive terminal of the power supply should be connected to pins 4 and 5 on the 15 pin connector and the common terminal should be connected to pins 3 and 15 If the optional AC Power Adapter is used to provide power it should be connected to the coaxial power connector adjacent to the DB 15 connector on the top of the M452 Use only the approved AC Power Adapter provided by Teledyne API Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 4 3 2 Analog Output The analog output is a 0 5 volt signal representing the ozone concentration measured by the sensor The output is scaled to the concentration range that the sensor has been set to measure Check the serial number label on the M452 to determine the concentration range For best performance the analog output should be connected to a voltmeter or A D converter with a differential input and a minimum input impedance of 2KO 4 3 3 Zero Calibration Input The zero calibration input is located on Digital Input 1 To zero the M452 Digital Input 1 should be connected to the power common for at least 1 second This can be accomplished using a Normally Open switch or relay 4 3 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 4 3 4 Status Outputs
9. e and the first level of field troubleshooting are to be performed by the customer NON API MANUFACTURED EQUIPMENT Equipment provided but not manufactured by Teledyne API is warranted and will be repaired to the extent and according to the current terms and conditions of the respective equipment manufacturers warranty GENERAL Teledyne API warrants each Product manufactured by Teledyne API to be free from defects in material and workmanship under normal use and service for a period of one year from the date of delivery All replacement parts and repairs are warranted for 90 days after the purchase If a Product fails to conform to its specifications within the warranty period Teledyne API shall correct such defect by in Teledyne API s discretion repairing or replacing such defective Product or refunding the purchase price of such Product The warranties set forth in this section shall be of no force or effect with respect to any Product i that has been altered or subjected to misuse negligence or accident or ii that has been used in any manner other than in accordance with the instruction provided by Teledyne API or iii not properly maintained vii Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E THE WARRANTIES SET FORTH IN THIS SECTION AND THE REMEDIES THEREFORE ARE EXCLUSIVE AND IN LIEU OF ANY IMPLIED WARRANTIES OF MERCHANTABILITY FITNESS FOR PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY WHETHER
10. e of ozone a Absorption coefficient 2 Path length o Concentration of ozone T Sample temperature in degrees Kelvin P Pressure in pounds per square inch absolute As can be seen the concentration of ozone depends on more than the intensity ratio Temperature and pressure influence the density of the sample The density changes the number of ozone molecules in the absorption cell which impacts the amount of light removed from the light beam These effects are addressed by directly measuring temperature and pressure and including their actual values in the calculation The absorption coefficient is a number that reflects the inherent ability of ozone to absorb 254 nm light Lastly the absorption path length determines how many molecules are present in the column of gas in the absorption cell Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E The intensity of light is converted into a voltage by the detector preamp module The voltage is converted into a number by a voltage to frequency V F converter capable of 80 000 count resolution The digitized signal along with the other variables is used by the CPU to compute the concentration of ozone using the above formula Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 4 Installation 4 1 Unpacking Upon receiving the M452 please verify that no apparent shipping damage has occurred If damage has occurred please advise shipper first th
11. en Teledyne API 4 2 Mechanical Installation Mount the M452 to a stable platform using four 8 32UNC screws See Figure 2 1 for mounting hole dimensions NOTE If the mounting platform is non conductive or note connected to earth ground then a separate connection to earth ground should be made using one of the mounting screws Failure to provide a proper earth ground connection may make the M432 susceptible to electrical interference from external sources 4 3 Electrical Connections Electrical connections are made to the M452 using the 15 pin D Sub connector on the top of the device Figure 4 1 shows the pin out of the 15 pin connector and typical connections 4 1 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E Ozone Concentration Meter 0 5 VDC or Data Acqusition Device DAE Analog Out Analog Out Power Supply 15V Common S Digital Out 2 Status Display or Power Common PLO Digital Out 4 k 15 Volt Supply Digital Out 3 Digital Out Common 15 Volt Supply RS485 A 2 N Zero Cal Closed Digital In 1 RS485 B Digital In 2 Power Common 7 Digital Out 1 Figure 4 1 Electrical Connections 4 3 1 Power Supply The M452 requires 15 VDC power source capable of supplying 1 0 DC power can be connected through the male DB 15 connector or through the coaxial power jack
12. is OFF and X indicates the output is in either state Table 5 2 Status Output Truth Table Sensor Invalid Lamp Cell Reading Low 0005 Normal operation 9 9 5 action required 0 X X X Service required Check Pressure gt 45 psia Verify that concentration 1 1 X X has not exceeded full scale range of sensor Calibrate at Zero Lamp adjustment useful though not required Calibrate at zero Clean Cell 5 4 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E INTENTIONALLY BLANK 5 5
13. iversal Input 100 240 VAC 50 60Hz Power Adapter with a standard IEC320 modular AC receptacle A North American standard 3 prong power cord is also provided 2 7 2 Ozone Destructor 1 4 Tube Fittings This option consists of an external catalytic Ozone Destructor for connecting to the gas outlet of the M452 The Ozone Destructor is provided with 14 compression tube fittings When the Ozone Descructor is used in conjunction with the M452 the gas flow rate must be limited to a maximum of 1 0 L min Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 3 Theory of Operation The detection of ozone molecules is based on absorption of 254 nm UV light due to an internal electronic resonance of the molecule The Model 452 uses a mercury lamp constructed so that a large majority of the light emitted is at the 254 nm wavelength Light from the lamp shines through an absorption cell through which the sample gas being measured is passed The ratio of the intensity of light passing through the gas to a reference measurement which does not pass through the gas forms the ratio I I This ratio forms the basis for the calculation of the ozone concentration The Beer Lambert equation shown below calculates the concentration of ozone from the ratio of light intensities Gy ee 1 2 T 5 14 695 psi 273 K P I Where I Intensity of light passed through the sample I Intensity of light through sample fre
14. n dienen 5 1 5 2 STATUS OUTPUTS s A U A eee ERU ae 5 2 5 3 SENSOR O K noce lU 5 2 5 4 002002000 0 0 0 00000000008 5 3 25 9 LGA MIP TOW 5 3 nr 5 4 5 7 STATUS OUTPUT SUMMARY 0 5 4 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E LIST OF FIGURES FIGURE 2 1 M452A HIGH PURITY OZONE 2 1 FIGURE 2 2 PRESSURE DROP VS FLOW HIGH PURITY VERSION 2 3 FIGURE 4 1 ELECTRICAL CONNECTIONS 1 2 00 200 000000000000 42 FIGURE 4 2 DIGITAL OUTPUT CONNECTIONG cscsesseceeeceesensseeeeeeees 4 4 LIST OF TABLES TABLE 5 1 STATUS 5 2 TABLE 5 2 STATUS OUTPUT TRUTH 5 4 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E WARRANTY POLICY ADVANCED POLLUTION INSTRUMENTATION DIVISION 02024c Prior to shipment Teledyne API equipment is thoroughly inspected and tested Should equipment failure occur Teledyne API assures its customers that prompt service and support will be available COVERAGE After the warranty period and throughout the equipment lifetime Teledyne API stands ready to provide on site or in plant service at reasonable rates similar to those of other manufacturers in the industry All maintenanc
15. n the M452 exceeds 45 psia 2 When the measured concentration has exceeded the full scale concentration range of the sensor Check the serial number tag for the full scale concentration range 3 The sensor is indicating an excessive negative reading 5 5 Lamp Low The normal state for the Lamp Low output is OFF If this output turns on this indicates that the UV lamp intensity as measured by the reference detector has dropped below 600mV If the Lamp Low output turns ON and the Sensor O K output is ON this indicates that the lamp intensity is still adequate for measurement but adjustment should be made when possible If the Lamp Low output turns ON and the Sensor O K output is OFF this indicates a failure condition and accurate measurement is no longer possible Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 5 6 Cell Dirty The normal state for the Cell Dirty output is OFF If this output turns on then the ratio of the measure detector to the reference detector at zero is lt 0 5 This value is calculated when the zero calibration is performed When this output is on it indicates a loss of optical transmission through the windows in the absorption cell or a calibration fault 5 7 Status Output Summary Table Table 5 2 below is a logic truth table summarizing the recommended actions based on the states of the four status outputs A 1 indicates the output is ON a 0 indicates the output
16. uracy 1 of Full Scale Repeatability 1 of Full Scale Response Time 2 sec To 95 Zero Drift 1 Full Scale month non cumulative 2 3 Operating Limits Measurement Range 5 10 15 20 w w 25 50 100 200 400 g Nm3 Proof pressure 115 psia Flow 0 1 5 0 LPM See Figure 2 2 Temperature range 5 to 45 C Warm Up Period 15 minutes 2 4 Electrical Specifications Power Input 15 volts 1 0 volt 1 0A maximum Analog Output 0 5 Full Scale Zero Cal Contact Closure Input Digital Outputs Sensor OK Invalid Reading Lamp Low Cell Dirty Serial Data Interface RS232 or RS485 Half Duplex 9600 Baud 2 5 Calibration Reference Span Calibration Traceable to Buffered KI laboratory calibration Standard 09 and 760 mmHg Temperature and Pressure g Nm3 only 2 2 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 2 6 Pressure Drop Figure 2 2 below shows the approximate pressure drop from the inlet fitting to the outlet fitting as a function of volumetric flow rate Pressure Drop vs Flow 1 000 y 0 0008 2 0 0048x 0 800 0 600 AP psi 0 400 0 200 0 000 0 5 10 15 20 25 Flow LPM Figure 2 2 Pressure Drop vs Flow High Purity Version 2 3 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 2 7 Options The M452 is available with the following options 2 7 1 AC Power Adapter This option consists of a Un
17. ut See Section 4 3 3 for a minimum of second to perform the automatic zero calibration 5 Re check the Status Outputs to ensure that no errors are indicated 6 Check the voltage on the analog output See Section 4 3 2 and verify that it reads 0 000 0 010 volts 7 M452 is now ready for operation 4 7 Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 5 Sensor and System Troubleshooting This chapter gives guidelines for diagnosing system and sensor malfunctions using the four digital Status Outputs provided by the M452 All troubleshooting should be done after the M452 has been turned on and allowed to warm up for at least 15 minutes 5 1 Status LED s On the top of the M452 are five status LED s The Status LED labeled CPU STATUS is used to verify the status of the CPU inside the M452 This LED should blink on and off continuously while the sensor is on If this LED stops blinking while power is applied to the sensor a CPU failure is indicated The other four Status LED s on the M452 exactly mirror the four Status Outputs described in the following sections Teledyne API M452 Ozone Sensor Instruction Manual 02852 Rev E 5 2 Status Outputs Table 5 1 below describes the function of the status outputs More details as to the meaning of the status outputs are described in the following sections Table 5 1 Status Outputs Output Name On State Off
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