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Olicom 9600 User's Manual

1. Section 4 Operation Figure 3 1 9600 Compressor Installation Flowchart Refer to 3 2 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Supply and Return Water Line Connections NOTE The water used for cooling the Compressor must meet the specifications outlined in Section I Compressor Description Hard Water Lines 1 Apply a light coating of standard plumbing thread sealant to the hard line pipe threads 2 Install the Supply hard line into the INPUT connection on the rear panel of the Compressor Tighten the fitting by hand 3 Install the Return hard line into the OUTPUT connection on the rear panel of the Compressor Tighten the fitting by hand CAUTION Do not overtighten the ferrules Damage to the input and output connector threads may occur 4 Using a wrench tighten the fittings 5 Allow water to flow and check for leaks at the rear of the Compressor Flexible Water Lines 1 Apply a light coating of standard plumbing thread sealant to the barbed fitting threads 2 Install the barbed fittings into the INPUT and OUTPUT connections on the rear panel of the Compressor CAUTION Do not overtighten the barbed fittings Damage to the INPUT and OUTPUT connector threads may occur 3 Using a wrench tighten the barbed fittings 4 Connect the Supply flexible water line to the INPUT barbed fitting and
2. P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Cryopump Power Phase Switch NOTE The Cryopump Power Phase Switch is behind the system circuit breaker cover The Cryopump Power Phase Switch matches the output power phase of the 9600 compressor to that of the cryopump The switch is set to the two or three phase position based upon cryopump power requirements Refer to Section 3 Installation for more information Compressor Remote Connector The Compressor Remote Connector is a two pin connector that can be used in conjunction with the On Board setpoint relays relays in the Cryo Torr Interface or a signal from the vacuum system to turn the Compressor ON or OFF Refer to Table 1 6 for connector pin identification Switching contacts must be rated at 24VDC 2 7A inductive NOTE The Compressor is shipped with a mating plug which must remain installed in the Compressor Remote Connector to ensure Compressor operation when the Compressor remote feature is not being used Table 1 6 Compressor Remote Connector Pin Assignments Compressor Remote Control Make ON Break OFF Supply Gas Coupling The Supply Gas Coupling provides a connection for high pressure compressed helium to the cryopump cold head Refer to CTI CRYOGENICS Helium Refrigeration System within this section for more information Multiple On Board Cryopump Connections The On
3. 3 16 9600 Compressor Installation Operation and Maintenance Table of Contents continued Figure 5 1 Disconnecting Self Sealing Couplings 5 2 Figure 5 2 Adsorber Location within the 9600 Compressor Rear Panel Removed 5 3 Figure 5 3 9600 Compressor Helium Pressure Control Components 5 4 Figure B 1 9600 Compressor Flow Diagram B 1 Figure D 1 9600 Motor Drive Compressor Schematic D 2 Tables Table 1 1 Compressor Weight 1 5 Table 1 2 Electrical Input Specifications 1 5 Table 1 3 Cooling Water Specifications 1 6 Table 1 4 General Compressor Operating Specifications 1 7 Table 1 5 Cryopump Electrical Outlet Pin Assignments 1 10 Table 1 6 Compressor Remote Connector Pin Assignments 1 11 Table 4 1 9600 Compressor Helium Static Charge 4 1 Table 5 1 Suggested Maintenance Equipment 5 1 Table C 1 Compressor Troubleshooting Procedures C 2 7 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Section 1 9600 Compressor Description General This manual provides the information required to install operate and maintain the CTI
4. Section 5 Maintenance Scheduled Maintenance Suggested Maintenance Equipment It is recommended to have the following equipment and disposable supplies available as listed in Table 5 1 Table 5 1 Suggested Maintenance Equipment Supply CTI CRYOGENICS P N Helium 99 999 pure Pressure regulator 0 3000 0 400 psi Assy 8031403 Helium charging line terminating in a 1 4 inch 7021002P001 female flare fitting Lint free gloves and cloth Oakite or equivalent detergent soap Denatured alcohol Refer to Appendix A and contact the local Customer Support Center to obtain the CTI CRYOGENICS parts listed in this table BEE gt gt gt gt gt gt gt gt gt 3 P N 8040540 5 1 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Maintenance AAA Adsorber Replacement Use the following procedure to change the adsorber every three years 1 Set the System Circuit Breaker on the rear of the 9600 Compressor to the OFF position 2 Remove the 4 screws which secure the rear panel to the Compres sor and remove the rear panel NOTE Use two wrenches in Step 3 to prevent loosening the body of the coupling 3 Using a 1 3 16 in wrench and a 1 1 8 in wrench as shown in Fig ure 5 1 disconnect the two self sealing coupling connectors quickly to minimize helium leakage To Tighten Coupling Halves Turn Here Hold Here Hi Hold Here Turn Here This 1 1 8 in wrench This 1 3 16 in
5. z HELIUM RETURN shit T REMOTE O O Kg CRYO TORR INTERFACE CRYOPUMP POWER CABLES WATER POWER USER REMOTE FROM VACUUM SYSTEM Figure 3 9 Alternative Multiple Cryo Torr Cryopump Installation 3 16 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Section 4 Operation Adjusting System Helium Pressure Your CTI CRYOGENICS high vacuum pump system is comprised of several pressurized components i e compressor flex lines and cryopumps Each component is charged with helium before shipment After all cryopumps helium lines and manifolds are attached to the compressor the system static helium charge pressure must be verified before system operation Once the static helium system pressure has been verified the system is ready for operation After cooldown the normal system operating pressure is recorded NOTE The 9600 Compressor is designed for continuous operation and should remain ON even when the cryopumps are in a regeneration cycle Static Helium System Pressure Verification The proper system static helium charge pressure is necessary so that the cryopumps operate at maximum performance as well as to assure that the compressor will operate below the maximum design motor win
6. BOLT ST EF TA lit Fa Figure 5 2 Adsorber Location within the 9600 Compressor Rear Panel Removed P N 8040540 5 3 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Maintenance AAA a a E Adjusting System Helium Pressure NOTE These procedures can be performed on a compressor that is turned ON or OFF However the helium pressure gauge should be set to the static helium charge pressure value if the compressor is turned OFF or set to the normal system operating pressure if the compressor is turned ON Refer to Section 4 Operation for more information Reducing Helium Pressure NOTE You must obtain the normal system operating pressure from the Compressor Operation procedure in Section 4 Operation in order to perform this procedure If the normal system operating pressure is unknown then shut the compressor OFF and perform the Static Helium System Pressure Verification procedure in Section 4 Operation instead 1 Remove the flare cap from the gas charge fitting as shown in Figure 5 3 GAS CHARGE FLARED FITTING HELIUM PRESSURE GAUGE GAS CHARGE CONTROL VALVE REAR PANEL Figure 5 3 9600 Compressor Helium Pressure Control Components 2 Open the gas charge control valve very slowly to allow a slight amount of helium to escape Leave the valve open until the helium pressure gauge indicates one of the following e To the appropriate value in Table 4 1
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8. NOTE Your installation number of pumps per compressor will vary based upon the On Board Cryopump models used Refer to Appendix to consult your local CTI CRYOGENICS Customer Support Center for information on specific compressor pump applications NOTE The On Board Splitter Box can be installed at the process tool containing the pumps as shown in Figure 3 6 or on the rear of the Compressor as shown in Figure 3 7 CTI CRYOGENICS recommends that the On Board Splitter box be installed near the process tool to reduce cable requirements HELIUM RETURN se pi REMOTE ON BOARD SPLITTER al WATER ON BOARD POWER CABLE Figure 3 6 Recommended Multiple On Board Cryopump or Waterpump Installation Splitter Box located at Process Tool 3 12 P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance HELIUM SUPPLY HELIUM RETURN ON BOARD REMOTE SPLITTER BOX gt ele ON BOARD POWER CABLES WATER POWER Figure 3 7 Alternative Multiple On Board Cryopump or Waterpump Installation Splitter Box located at Compressor Multiple Cryo Torr Cryopump Connections CAUTION Make sure the Compressor power is OFF before
9. Board Splitter Box permits the connection of multiple On Board Cryopumps or Waterpumps to one 9600 Compressor as shown in Figure 1 5 Refer to Section 3 Installation for more information on connecting single or multiple On Board Cryopumps or Waterpumps to the Compressor P N 8040540 1 11 9600 Compressor Description CTI CRYO G EN C S HELIK TECHNOLOGY CORPORATION HELIUM SUPPLY HELIUM RETURN 2 7 ON BOARD SPLITTER EA BOX WATER POWER ON BOARD POWER CABLE Figure 1 5 9600 Compressor Connected to Multiple On Board Cryopumps NOTE Your installation number of pumps per compressor will vary based upon the On Board Cryopumps or Waterpumps used Refer to Appendix A to consult your local CTI CRYOGENICS Customer Support Center for information on specific compressor pump applications P N 8040540 9600 Compressor Installation Operation and Maintenance CTI CRYO G EN C 5 HELIK TECHNOLOGY CORPORATION Muiltiple Cryo Torr Cryopump Connections The Cryo Torr Interface permits the connection of multiple Cryo Torr Cryopumps to one Compressor as shown in Figure 1 6 Refer to Section 3 Installation for more information on connecting single or multiple Cryo Torr Cryopumps to the Compre
10. CRYOGENICS 9600 Compressor NOTE All personnel with installation operation and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation Operation Maintenance and appropriate cryopump manuals to ensure safe high quality and reliable system performance Benefits The 9600 Compressor is a universal compressor that accepts three phase 50Hz or 60 Hz power input and provides two phase or three phase 60Hz power output to On Board or Cryo Torr Cryopumps The 9600 Compressor design eliminates the use of three phase motor controllers and or frequency converters and significantly reduces the amount of equipment required and cost associated with the Cryopump power circuit CAUTION Refer to Appendix A to contact the local Customer Support Center for information on connecting 9600 Compressors to a manifold with other CTI CRYOGENICS compressors Compressor Configurations The 9600 Compressor supports either On Board or Cryo Torr Cryopumps For multiple cryopump installations an On Board Splitter Box or Cryo Torr Interface can be used for cold head power distribution that reduces total cable requirements as shown in Figure 1 5 and 1 6 EMNER P N 8040540 1 1 CTI CRYOGENICS 9600 Compressor Description HELIX TECHNOLOGY CORPORATION System Documentation The manuals for a system cover two basic components the cryopump and the Compressor manual is shipped with ea
11. On Board Cryopumps can operate on two or three phase power Cryo Torr Cryopumps only operate on two phase power 1 Inspect the On Board Cryopump s being installed for the presence of a THREE PHASE label by the RETURN helium connector 2 If a three phase label is present set the cryopump power phase switch shown in Figure 3 2 to the 3PH position 3 Ifathree phase label is not present or Cryo Torr Cryopumps are being installed set the cryopump power phase switch shown in Figure 3 2 to the 2PH position NOTE All Cryopumps being connected to the 9600 Compressor must operate at the same phase Connecting Disconnecting Helium Flex Lines CAUTION Make sure the helium flex lines are connected and disconnected from the 9600 Compressor using the following procedure and as shown in Figure 3 3 Failure to follow this procedure could damage connector O ring seals or cause a helium circuit leak Connecting 1 Remove all dust plugs and caps from the Gas Supply and Return lines and the Compressor and cryopump Supply and Return connectors Check for the presence of a flat gasket in the male connector and no gasket in the female connector 2 Connect the Gas Return line to the GAS RETURN connector on the rear of the Compressor and then to the GAS RETURN connector on the cryopump Using two wrenches as shown in Figure 3 3 tighten the connector 3 Connect the Gas Supply line to the GAS SUPPLY connector on the rear of the Comp
12. Outside the United States of America Product Information Please have the following information available when calling so that we may assist you e Product Part Number e Product Serial Number e Product Application e Specific Problem Area e Hours of Operation Equipment Type e Vacuum System Brand Model Date of Manufacture E mail For your convenience you may also e mail us at techsupport helixtechnology com EEE 2004 Helix Technology Corporation Pub No 8040509 Rev 101 01 26 04 ECO No 16210 A 1 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance Appendix B Flow Diagram RELIEF VALVE X 400 PSIG ADSORBER MIST ARATOR BYPASS COOL ING VALVE A rot aP 235 PSI PIETERS i COMPRESSOR 3 i FILTER SOLENOID AFTER VALVE y COOLER N O ACCUMULATOR i TEMPERATURE l 5 4 l SWITCH N C PRESSURE SOLENOID TSI GAUGE VALVE y N C WITH ORIFICE l CHARGE VALVE 1 1 1 gt B FILTER gt y 1 i 7 gt 1 ps Ls y 1 i 4 S QUICK DISCONNECTS OE ENER gt 1 I i LA et gt a dia OIL FLOW A A A 4 4 A OIL FLOW T52 TEMPERATURE SWITCH N C 4 SUPPLY WATER l GAS FLOW ji 1 2 NPT FEMALE PIPE THREAD CODLING WATER IN
13. all internal components of the Compressor except the Compressor motor The Compressor motor is protected by a separate overload protector The Control Circuit Breaker opens automatically and must be reset manually Power ON Indicator The Power On Indicator illuminates when the system circuit breaker is placed in the ON position The Compressor pump is energized when the power indicator is illuminated and the elapsed time meter records system operation time Gas Charge Flared Fitting The Gas Charge Flared Fitting is used to connect a 99 999 pure helium supply to the Compressor when helium charging is required The fitting has a 45 flare and 7 16 in x 20 threads inch Refer to Section 5 Maintenance for information on adding helium to the Compressor Helium Pressure Gauge The Helium Pressure Gauge indicates system static helium charge pressure when the Compressor and cryopumps are OFF and Compressor suction or inlet pressure when the Compressor is ON Refer to Table 4 1 for the appropriate static helium charge pressure Power Inlet The Power Inlet is used to connect your power cable to the Compressor Refer to Section 3 Installation for information on power cable installation ESS P N 8040540 1 9 9600 Compressor Description CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Return Gas Coupling The Return Gas Coupling returns the helium which has been cycled through the cryopump back to the Compressor Re
14. if the compressor is OFF and acclimated to a temperature between 60 F and 80 F 15 5 C 26 69 C gt 5 4 P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance e To the value previously recorded in the Compressor Operation procedure in Section 4 Operation if the compressor is ON 3 Close the gas charge control valve and install the flare cap Increasing Helium Pressure Use the following procedure to increase the helium pressure if the indicated pressure is below the appropriate value as shown in Table 4 1 CAUTION If helium is being added more than once every several months check for leaks caused by improperly connected self sealing connections or any mechanical joint within the Compressor Adding Helium NOTE You must obtain the normal system operating pressure from the Compressor Operation procedure in Section 4 Operation in order to perform this procedure If the normal system operating pressure is unknown then shut the compressor OFF and perform the Static Helium System Pressure Verification procedure in Section 4 Operation instead This procedure ensures that both the regulator and the charging line will be purged of air and that the air trapped in the regulator will not diffuse back into the helium bottle For best results CTI CRYOGENICS suggests a dedicated helium bottle regulator and line which are never separated for a
15. it from the pallet 3 Cutthe tape which holds the ramp in the vertical position 4 Swing the ramp down until the end touches the floor as shown in Figure 2 1 5 Remove any excess shipping material from around the Compressor WARNING Be certain to maintain control over the movement of the Compressor as it rolls down the ramp Injury to personnel may result if the Compressor is allowed to roll freely down the ramp CAUTION Be certain to maintain control over the movement of the Compressor as it rolls down the ramp Damage to the Compressor may result if the Compressor is allowed to roll freely down the ramp 6 Unlock the swivel casters as shown in Figure 2 1 7 Carefully roll the Compressor down the ramp and onto the floor as shown in Figure 2 1 EE gt gt gt gt P N 8040540 2 1 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Unpacking and Inspection UNLOCK SWIVEL CASTERS Figure 2 1 Using the Shipping Carton Ramp Compressor Inspection Inspect the Compressor for visible signs of damage as indicated in the following paragraphs Compressor Inspect the exterior of the Compressor for visible signs of damage evidence of an oil leak and check the Helium Pressure Gauge for proper helium pressure Report any damage to the shipping company at once Helium Static Pressure
16. kg NOTE Use a slotted screwdriver which is capable of holding a screw when performing steps 9 and 10 9 Remove the screws from the Compressor circuit breaker terminals X Y and Z as shown in Figure 3 2 P N 8040540 9600 Compressor Installation Operation and Maintenance CTI CRYO G EN C 5 HELIK TECHNOLOGY CORPORATION O O CRYOPUMP MOTOR NE PHASE MN Hr y CIRCUIT BREAKER p O E TERMINAL COVER o SEE DETAIL A o o ai REAR PANEL X E el Z gt THREE PHASE POWER E o DETAIL A COVER REMOVED Figure 3 2 9600 Compressor Circuit Breaker Terminals Cover Removed NOTE The phase order in which the conductor terminal lugs are connected to circuit breaker terminals X Y and Z will be determined during the Phase Check Procedure NOTE For installation where one of the three phase legs is at or near ground potential connect that leg to terminal Y on the Compressor as shown in Figure 3 2 10 Install the conductor terminal lugs to the circuit breaker terminals X Y and Z as shown in Figure 3 2 11 Torque the screws to 12 in lbs 0 14m kg 12 Allow enough cable to stay in the electrical enclosure to prevent strain on the electrical connections and tighten the screws on the cable strain relief 13
17. secure with a hose clamp 5 Connect the Return flexible water line to the OUTPUT barbed fitting and secure with a hose clamp 6 Allow water to flow and check for leaks at the rear of the Compressor E P N 8040540 3 3 Installation CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Electrical Connections The following procedures provide information for making all three phase 180 250 VAC electrical connections to the Compressor Power Cable Preparation WARNING Follow all local high voltage safety precautions when performing this procedure to reduce the possibility of electrical shock Make sure all electrical power is OFF before proceeding with this procedure CAUTION The cable used for making the Compressor power cable must be 10 gauge 3 conductor cable with ground rated at 600 VAC nm a Cut a 10 AWG 6 00 mn 3 conductor cable with ground to an appropriate length Strip the cable jacket back 4 in 101 6 mm Strip the insulation back 3 8 in 9 3 mm on each individual conductor Install a 10 ring tongue terminal on the end of each conductor using the appropriate size double crimping tool Remove the rear panel as shown in Figure 3 2 Remove the circuit breaker terminal cover as shown in Figure 3 2 Install the cable into the Compressor through the cable strain relief Remove the 10 32 nut and install the grounding wire on the ground stud Install the nut and tighten to 18 in Ibs 0 21m
18. the Cryo Torr Interface and the respective Cryo Torr Cryopumps as shown in Figures 3 8 or 3 9 Connect the User Remote cable to the Cryo Torr Interface as shown in Figures 3 8 or 3 9 Connect the Remote cable between the Cryo Torr Interface and the Compressor as shown in Figures 3 8 or 3 9 NOTE Your installation may vary based upon the Cryo Torr Cryopump models used Refer to Appendix A to consult your local CTI CRYOGENICS Customer Support Center for information on specific compressor cryopump applications P N 8040540 9600 Compressor Installation Operation and Maintenance CTI CRYO G EN C 5 HELIK TECHNOLOGY CORPORATION AAA AA AAA NOTE The Cryo Torr Interface can be installed at the process tool containing the cryopumps as shown in Figure 3 8 or near the Compressor as shown in Figure 3 9 CTI CRYOGENICS recommends that the Cryo Torr Interface be installed at the process tool to reduce cable requirements HELIUM SUPPLY ER RBD 4 HELIUM RETURN reset iii ike CRYO TORR INTERFACE CRYOPUMP POWER CABLE WATER POWER USER REMOTE FROM VACUUM SYSTEM Figure 3 8 Recommended Multiple Cryo Torr Cryopump Installation P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Installation HELIUM SUP PLY
19. wrench To Loosen Coupling Halves holds the coupling in a is used to turn the self stationary position sealing coupling Side View connector Figure 5 1 Disconnecting Self Sealing Couplings 4 Using a 7 16 in 11mm wrench remove the adsorber mounting bolt as shown in Figure 5 2 5 Move the adsorber from under the mounting tabs in the base as shown in Figure 5 2 and remove the adsorber from the Compressor 6 Install the replacement adsorber under the mounting tabs and secure it into place with the bolt removed during Step 4 7 Using two wrenches as shown in Figure 5 1 connect the two self sealing couplings quickly to minimize helium leakage 8 Install the Compressor rear panel MMSR 5 2 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION 9 Ensure that the pressure gauge reads the proper value as shown in Table 4 1 If additional gas pressure is required refer to Adding Helium within this section If gas pressure needs to be reduced refer to Reducing Helium Pressure within this section 10 Record the adsorber replacement date on the label as shown in Fig ure 5 2 and also note that the next adsorber replacement should be performed every three years m HTG DATE L ADSORBER E Bi ADSORBER MOUNTING Ral
20. 2PL Figure B 1 9600 Compressor Flow Diagram EEE P N 8040540 B 1 Appendix B Flow Diagram B 2 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Appendix C Troubleshooting Procedures Troubleshooting the Compressor The compressor troubleshooting procedures are summarized in Table C 1 Technical Inquiries Please refer to Appendix of this manual for a complete list of the CTI CRYOGENICS world wide customer support centers WARNING Disconnect the compressor before performing any troubleshooting pro cedures The compressor pump is hot after operating Wait for the pump to cool down before working on the inside of the compressor Do not change or modify any compressor internal wiring circuits this may cause failure of the compressor and cold head due to improper phas ing P N 8040540 C 1 Appendix C Troubleshooting Procedures CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Table C 1 Compressor Troubleshooting Procedures Problem 1 System circuit breaker CB1 trips immediately to the OFF 0 position when switched to the ON 1 position Possible Cause 1 Incorrect phasing of input power Corrective Action 1 Check phasing of input power Refer to Phase Check in Section 3 2 System CB1 and Con trol Circuit CB2 circuit breakers remain in the ON 1 position when switched ON but t
21. CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance Instructions 8040540 Rev 101 12 2004 HELIX TECHNOLOGY CORPORATION http www helixtechnology com FELIX The information in this document is believed to be accurate and reliable However Helix Technology Corporation cannot accept any financial or other responsibilities that may result from the use of this information No warranties are granted or extended by this document Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice Revisions may be issued at the time of such changes and or deletions Any duplication of this manual or any of its parts without expressed written permission from Helix Technology Corporation is strictly prohibited Any correspondence regarding this document should be forwarded to Helix Technology Corporation Mansfield Corporate Center Nine Hampshire Street Mansfield Massachusetts 02048 9171 U S A Telephone 508 337 5000 FAX 508 337 5464 The following Helix Technology Corporation trademarks and service marks may appear in this document Conductron Convectron Cryodyne Cryogem Cryogenerator Cryo Torr CTI Cryogenics FastRegen GOLDLink Granville Phillips GUTS Helix Helix Technology o o _ sm Micro lon Mini Convectron Mini Ion Your Vacuum Connection On Board Re
22. Install the power source end of the power cable according to the local electrical codes 14 Install the circuit breaker terminal cover 15 Proceed with Phase Check P N 8040540 3 5 Installation Phase Check CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION WARNING Follow all high voltage safety precautions when performing this procedure to prevent the possibility of electrical shock Make sure power is applied to compressor circuit as described in Table 1 2 NOTE The circuit breaker will trip immediately during step 2 if the power phase connections are not correct 2 Turn the Compressor circuit breaker to the ON position If the circuit breaker trips refer to step 3 If the circuit breaker does not trip refer to step 4 Tf the circuit breaker trips perform the following steps a Turn the Compressor circuit breaker to the OFF position b Disconnect the power cord from the power source c Remove the circuit breaker terminal cover d Reverse the wiring order of Compressor circuit breaker terminals X and Y e Torque the circuit breaker terminal screws to 12 in lbs f Install the circuit breaker terminal cover g Repeat steps 1 2 of this procedure Install the rear panel Proceed with Cryopump Power Phase Switch Setting P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Cryopump Power Phase Switch Setting NOTE
23. Ree ee eee le 3 8 Single On Board Cryopump Connections 3 9 Single Cryo Torr Cryopump Connections 3 10 Multiple On Board Cryopump Connections 3 11 Helium Line Connections 3 11 Power Cable Connections 0241 ads pla sud bed eee gt Gallen 3 12 Multiple Cryo Torr Cryopump Connections 3 13 Helium Line Connections 3 13 Power Cable Connections 3 14 Section 4 Operation Adjusting System Helium Pressure 4 Static Helium System Pressure Verification 4 Compressor Operation aoe gee ew ae A 4 2 Replacement of Helium Circuit Components 4 3 Section 5 Maintenance Scheduled Mamtenanee Less ee al wae hoe ke Gate sere SUNSET 5 1 Suggested Maintenance Equipment 5 1 Adsorber Replacement vrir sladrer oe tee Bea de 5 2 Adjusting System Helium Pressure 5 4 Reducing Helium Pressure 5 4 Increasing Helium Pressure 5 5 Adding Hellum or sn eee a a 5 5 P N 8040540 9600 Compressor Installation Operation and Maintenance Table of Contents continued Appendix A Cust
24. S JOSSIAULO MA 10J0JN 0096 I JINSIA T a Y lo ms is he 5 Va vO NAISIO ONY NOUVIBIOINI SHL 6961 g NN OL RV ONY AHS gt 10988060518 w o x cou ENN SONOSORIO 119 39031 a on no 3000 390 26 HONDO JOROH ISN JHL 48 OHM x 00 10 an 0 3 MONX OL GN 3NIONGO Y HUM MORIA CIZUOHIAY OL IDA 00 10 x EN IG 910900 L9 JOSINO INYO SOON SISSOU 9di 00 6 0096 040 w Nav ON INGIS YO 409 38 SUNIX WK LON ISNIN ONY SOIN9ORA UD GNOA NO DHINDO CBUNLIVNNYN 38 JON 010 Ci NH ONG 10 ANTON JHL IW is toss TES son pug UM FR 030 NH ESOTISIO NISO ON sogo peu MVH NOLIVJOHOO ADO ONHOAL XMIH pe DAMS he one NEI wameuwa NU ayn NEOVO SHa SAINTIOANI II a 2 saou vo sssouo of NO 0026 UNIX 80 y mo C av NIO HM RO ay VIVO WEBS wie me EL a TA ET fus 9409 Gi mo O ma NIO HM NEAHM HMOJ GMOE NO J TE 210 68 MET n ET TAN D S TAA INIST 191 7 9L bid CRAM 109 AMO 40 OT SOIN 02 87 E NE DE
25. Verification Refer to Section 4 Operation for more information on the static helium charge pressure of the 9600 Compressor Shipping Carton Contents The shipping carton should contain the following items e Compressor e Two barbed fittings for flexible water lines e Installation Operation and Maintenance manual e Compressor remote start connector and strain relief ESS zz 3 AAA SS 2 2 P N 8040540 9600 Compressor Installation Operation and Maintenance Introduction P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Section 3 Installation Section 3 provides you with the information required to install the 9600 Compressor and connect it to single or multiple On Board or Cryo Torr Cryopump configurations Figure 3 1 highlights the major tasks for Compressor installation and refers to the appropriate installation procedures within this section CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Installation Y Supply and Return Water Line Connections refer to page 3 3 Y Electrical Connections refer to page 3 4 Y Phase Check refer to page 3 6 29 or 30 Cryopump Power refer to page 3 7 Connect Disconnect Helium Flexlines refer to page 3 7 Single or Multiple Cryopump Installation Single Cryopump Connections refer to page 3 9 Multiple Cryopump Connections refer to page 3 11
26. ble to the cryopump cold head cable connector HELIUM SUPPLY PARA HELIUM RETURN REMOTE E WATER POWER ON BOARD POWER CABLE Figure 3 4 Single On Board Cryopump Connections P N 8040540 3 9 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Installation Fm um Single Cryo Torr Cryopump Connections CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel 1 Connect the Supply and Return lines to the 9600 Compressor as described in Connecting Disconnecting Helium Flex Lines within this section 2 Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3 5 Connect the opposite end of the cold head cable to the cryopump cold head cable connector as shown in Figure 3 5 HELIUM SUPPLY HELIUM RETURN REMOTE CRYO TORR POWER CABLE WATER POWER Figure 3 5 Single Cryo Torr Cryopump Installation 3 10 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Multiple On Board Cryopump Connections CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel Helium Line Connections CAUTION The us
27. ch system component to provide information for installation and operation of that component loose leaf binder with index tab separators is also provided so you can compile a complete set of tabulated manuals CTI CRYOGENICS Helium Refrigeration System The operation of CTI CRYOGENICS cryopumps is based upon a closed loop helium expansion cycle The system is made up of two major components the cryopump which contains the cold head and the helium Compressor which compresses the helium gas Refrigeration is produced in the cryopump cold head through periodic expansion of high pressure helium in a regenerative process The high pressure helium is provided by the Compressor Low pressure helium returning from the cold head is compressed into the necessary high pressure to be returned to the cold head The energy required to compress the helium is rejected as heat through the cooling water High pressure room temperature helium is transferred to the cold head through the supply lines After expansion low pressure helium is returned to the Compressor at or near room temperature to repeat the cycle in a closed loop fashion Large separation distances can be accommodated between the Compressor and the cryopump In the Compressor helium is compressed using a highly reliable oil lubricated commercial Compressor Helium purification takes place via several stages of oil removal The final stage of purification is performed with a replaceabl
28. dding helium NOTE You are required to supply the helium charging line terminating in a 1 4 inch female flare fitting and a two stage pressure regulator rated at 0 3000 0 400 psig for this operation CAUTION Use only 99 999 pure helium gas Helium circuit contamination may result if a lower quality of helium is used 1 Attach a regulator 0 3000 0 400 psig and charging line to a helium bottle 99 999 pure NOTE Do not open the bottle at this time EH P N 8040540 5 5 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Maintenance AAA EEE 2 Purge the regulator and charging lines as follows a Open the regulator a small amount by turning the adjusting knob clockwise until it contacts the diaphragm then turn approximately 1 8 to 1 4 turn more so that the regulator is barely open b Loosely connect the charge line to the helium pressure regulator c Slowly open the bottle valve and purge the regulator and line for 10 to 15 seconds Turn the regulator knob counterclockwise until the helium stops flowing 3 Remove the flare cap of the gas charge flared fitting on the rear of the Compressor 4 Loosely connect the charging line from the helium pressure regula tor to the 1 4 inch male flare fitting installed on the helium charge valve Purge the charge line again as in step a for 30 seconds and tighten the charge line flare fitting onto the gas charge fitting while the helium is flowing 5 Set
29. ding temperature which will maximize the life of the compressor motor 1 Make sure the Compressor and Cryopump s are OFF 2 Make sure all system components are connected together as described in Section 3 Installation 3 Allow all system components to acclimate to a temperature between 60 F and 80 F 15 5 C 26 6 C 4 Read the compressor helium pressure gauge located on the com pressor rear panel as shown in Figure 1 4 Compare the gauge reading to the appropriate 50 60 Hz line frequency value depend ing upon your system installation indicated in Table 4 1 Table 4 1 9600 Compressor Helium Static Charge Line Frequency Helium Static Charge Pressure 240 250 psig 16 5 17 2 bars 255 265 psig 17 6 18 3 bars P N 8040540 4 1 CTI CRYOGENICS Operation HELIX TECHNOLOGY CORPORATION NOTE The use of a higher helium charge pressure for 50 HZ operation is necessary in order to compensate for the slower speed at which the compressor operates at 50 HZ The static charge level for 60 Hz remains at 240 250 PSIG CAUTION Exceeding the recommended system static helium charge pressure will result in the compressor and cryopump safety relief valves opening and releasing excess helium gas 5 If the static helium charge pressure is not within the ranges as indi cated in Table 4 1 then adjust the charge pressure as described in Section 5 Maintenance Compressor Operation The system
30. e adsorber cartridge In order to maintain peak efficiency the adsorber must be replaced every three years The 9600 Compressor is shown in Figure 1 1 1 2 P N 8040540 CTI CRYOGENICS PARA EIEA EN EN EI RIPE RIE CA CA EAN FA III 9600 Compressor Description Specifications Dimensions CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION The dimensions of the Compressor are shown in Figure 1 2 19 52 IN ll 496 MM gt 21 50 IN 546 MM D 23 36 IN 593 MM EEE gt gt RARA EH ER RR EEE gt gt AAA GEA gt gt gt gt EAR SS III EEE gt gt SSS gt gt HE UN NRS 14 4 IN q T 3 18 IN 81 MM 366 MM gt Figure 1 2 9600 Compressor Dimensions CAUTION ai 1 28 32MM Do not place a weight greater than 75 lbs 34Kg on top of the Compressor P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Weight The weight of the Compressor is listed in Table 1 1 Table 1 1 Compressor Weight 200Ibs 91kg Electrical The electrical specifications of the Compressor are listed in Table 1 2 Table 1 2 Electrical Input Specifications Paramet
31. e of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions Contact CTI CRYOGENICS for a review of the intended installation and for specific technical instructions The use of a 9600 compressor on a manifold with other CTI CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200 210 psig charge pressure to avoid helium safety valves from inadvertently venting Refer to Section 4 Operation and Section 5 Maintenance for more information 1 Connect the Supply and Return lines to the 9600 Compressor as described in Connecting Disconnecting Helium Flex Lines within this section 2 Connect the Gas Return Line to the customer supplied helium manifold and then to the GAS RETURN connector on the On Board Cryopump 3 Connect the Gas Supply Line to the customer supplied helium manifold and then to the GAS SUPPLY connector on the On Board Cryopump P N 8040540 3 11 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Installation HSS Power Cable Connections 1 Connect the On Board Splitter Box power cable between the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor and the On Board Splitter Box power connector as shown in Figure 3 6 2 Connect the On Board Cryopump or Waterpump power cables to the CRYOPUMP 1 2 or 3 connectors on the On Board Splitter Box and the respective cryopumps as shown in Figure 3 6
32. er Value Operating Voltage Range 180 253 VAC Line Frequency 50 60 Hz Phase 3 Nominal Input Power 5 5 KW Nominal Power Factor 0 85 Rated FL LR Current 16 2 80 Minimum Electrical Service 30 Amps FL LR Full Load Locked Rotor N P N 8040540 1 5 9600 Compressor Description CTI a CRYO G EN C S HELIK TECHNOLOGY CORPORATION Cooling Water The water used to cool the Compressor must meet the specifications shown in Table 1 3 for proper system operation Table 1 3 Cooling Water Specifications Parameter Value Maximum Inlet Temperature 90 F 32 C Minimum Inlet Temperature 50 F 10 C Flow Rate 2 75 1 25 gpm 10 4 4 7 lpm Pressure Drop inlet to outlet See Figure 1 3 Maximum Inlet Pressure 100 psi 6 9 bars Alkalinity 6 0 8 0 pH Calcium Carbonate lt 75 ppm NOTE Water conditioning may be required for applications not meeting these requirements WATER PRESSURE DROP Bars 7 LE aal 35 49 63 77 3 50 3 00 2 50 2 00 1 50 WATER FLOW RATE GPM WATER FLOW RATE LPM 1 00 0 50 1 90 1 3 5 7 9 11 WATER PRESSURE DROP PSID NOTE Figure 1 3 defines the water flow rate through the Compressor as a function of the pressure drop from water inlet to water outlet You must provide the correct pressure drop in your water supply system to ensure that the water flow c
33. fer to CTI CRYOGENICS Helium Refrigeration System within this section for more information Cooling Water IN The Cooling Water IN connector provides water to the Compressor from your facility to cool the Compressor during operation The connector thread size is a 1 2 in female pipe thread The water must meet the specifications outlined in Table 1 3 Refer to Section 3 Installation for more information on cooling water connections Cooling Water OUT The Cooling Water OUT connector returns the water that has been used to cool the Compressor to your facility The connector thread size is a 1 2 in female pipe thread Refer to Section 3 Installation for more information on cooling water connections Cryopump Electrical Outlet The Cryopump Electrical Outlet provide power to a single On Board or Cryo Torr Cryopump an On Board Splitter Box or a Cryo Torr Interface The Compressor requires the use of an On Board Splitter Box or Cryo Torr Interface for multiple cryopump system connections Refer to Table 1 5 for connector pin identification Refer to Multiple On Board Cryopump Connections or Multiple Cryo Torr Cryopump Connections within this section for more information Table 1 5 Cryopump Electrical Outlet Pin Assignments Identifier Function Heater Power 208 VAC nominal C Center tap for D and E D and E 24 VCT 4 6 Amps F G and G H Cold Head Voltage Output 130 160 VAC 4 5 Amps J Chassis Ground K Not Used
34. he compressor will not run 1 No power coming from source Insufficient power Remote control jumper plug not in place This will apply only if remote cir cuit is not being used Improperly wired external remote control circuit NOTE Only applies if remote control feature is being used Check source fuses cir cuit breakers and wiring associated with the power source Repair as needed 2 Verify adequate phase to phase input voltage Refer to Table 1 2 3 Check to insure that remote jumper plug is fully seated See Figure 1 4 for location Refer to Compressor Remote Connector in Section I for more information 4 Verify correct installation ofremote control feature Refer to Table 1 6 P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance Table C 1 Compressor Troubleshooting Procedures Continued Problem 3 System circuit breaker CB1 will not remain in the ON 1 position when switched ON The Control Circuit circuit breaker CB2 trips when excessive current is being drawn by the cold head or 24 volt compressor control cir cuits Possible Cause 1 Damaged On Board power cable connectors or drive motor 2 Damaged component in the compressor power or control circuit Corrective Action 1 Check for compressor operation with cryopump cable disconnected from compressor Refer to Appendix A t
35. making any connections to the rear panel Helium Line Connections CAUTION The use of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions Contact CTI CRYOGENICS for a review of the intended installation and for specific technical instructions The use of a 9600 compressor on a manifold with other CTI CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200 210 psig charge pressure to avoid helium safety valves from inadvertently venting Refer to Section 4 Operation and Section 5 Maintenance for more information P N 8040540 3 13 Installation 1 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Connect the Supply and Return lines to the 9600 Compressor as described in Connecting Disconnecting Helium Flex Lines within this section Connect the Gas Return Line to the customer supplied helium manifold and then to the Gas Return connector on the Cryo Torr Cryopump Connect the Gas Supply Line to the customer supplied helium manifold and then to the Gas Supply connector on the Cryo Torr Cryopump Power Cable Connections 1 Connect the Cryo Torr power cable between the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor and the CRYOPUMP ELECTRICAL INPUT on the Cryo Torr Interface as shown in Figures 3 8 or 3 9 Connect the Cryo Torr Power Cables between the CRYOPUMP 1 2 or 3 connectors on
36. may be operated once the helium charge pressure is correct Perform the following steps to start the compressor 1 Setthe System Circuit Breaker to the ON UP position 2 Set the Control Circuit Breaker to the ON UP position 3 Close all Cryopump gate valves 4 Refer to the On Board Module Programming and Operation manual or Cryo Torr Cryopump Installation and Service man ual that came with your cryopump and perform the cryopump start up procedure 5 Once the second stage temperature for all cryopumps is below 17K record the compressor pressure gauge reading as the normal system operating pressure NOTE During compressor operation the compressor gauge reads the pressure of the gas entering the compressor prior to it being compressed 6 Affix a copy of the data next to the compressor gauge on each com pressor This data is to be verified for each tool installation and whenever a configuration change is made affecting the amount of system helium gas and line volume The compressor pressure reading will decrease from the normal system operating pressure during cryopump regeneration or if fewer cryopumps are being operated These are normal variations in the compressor pressure reading and should not be cause for concern EE E 5 gt TRD E H gt gt gt gt gt gt gt gt gt 4 2 P N 8040540 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation Operation and Maintenance If
37. mote Connector 1 11 Supply Gas Coupling 1 11 Multiple On Board Cryopump Connections 1 11 Multiple Cryo Torr Cryopump Connections 1 13 Section 2 Unpacking and Inspection MOCO ss oes le es toys E ote bre 2 1 Shipping Carton Inspection 2 1 Removal from Shipping Carton 2 1 Compressor Inspection 2 2 COMPELESSOT vad agere de nema pee ewe enden 2 2 Helium Static Pressure Verification 2 2 Shipping Carton Contents 2 2 P N 8040540 9600 Compressor Installation Operation and Maintenance Table of Contents continued Section 3 Installation Introductio ii A A sere rea 3 1 Supply and Return Water Line Connections 3 3 Hard Water Lines wwa cabe deta bd 3 3 Flexible Water Lines caca nea ss 3 3 Electrical Connections 20 A da Get Ai an 3 4 Power Cable Preparatorias 3 4 Phase Cee ES tt tenor eae Ne Oy AA dn 3 6 Cryopump Power Phase Switch Setting 3 7 Connecting Disconnecting Helium Flex Lines 3 7 COMMS CITE eri nie tha SP EA AO ERMA GS OME REGS REA ORR EWR EW AS 3 7 DISCOMNECUNE Saude ete sg Bieta eee Hie eet
38. n The components of the 9600 Compressor that are accessible from the rear panel are shown in Figure 1 4 and described in the following paragraphs POWER ON COMPRESSOR REMOTE SYSTEM CIRCUIT INDICATOR CONNECTOR BREAKER SERVICE I O CONNECTOR CONTROL CIRCUIT CRYOPUMP BREAKER ELECTRICAL OUTLET if GAS CHARGE FLARED FITTING gt r CRYOPUMP a POWER PHASE UM SWITCH PRESSURE ri GAUGE SS SS GAS CHARGE SS SUPPLY GAS CONTROL A COUPLING VALVE RETURN GAS COUPLING l POWER INLET SS st REAR PANEL COOLING WATER IN I COOLING WATER d h OUT EE Figure 1 4 9600 Compressor Rear View Component Locations 1 8 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION System Circuit Breaker The System Circuit Breaker protects main input power to the Compressor pump and module The circuit breaker positions are labeled ON 1 which is in the UP position and OFF 0 which is in the DOWN position NOTE The phase monitor within the Compressor will cause the system circuit breaker to open when input power phases are incorrect Control Circuit Breaker The Control Circuit Breaker provides current overload protection for
39. o contact the Customer Support Center if the compressor operates improperly Refer to Appendix to contact the Customer Support Center 4 System circuit breaker CB1 remains in the ON 1 position and the com pressor stops after sev eral minutes of operation and remains OFF 0 1 Thermal protective switches are open 2 Very cold water has caused a restriction of oil flow through the oil injection orifice during start up 1 Check for inadequate water cooling Refer to Table 1 3 2 Recheck for proper cool ing water temperature Refer to Table 1 3 Restart compressor repeatedly until continu ous operation is achieved 5 System circuit breaker CB1 trips after a period of running 1 Loss or degradation of power from the source 2 Defective motor windings 1 Check that line voltage is correct on all phases 2 Check running current on all phases 3 Refer to Appendix to contact the local Cus tomer Support Center 6 All cryopumps making loud noise P N 8040540 1 Cryopump power phase switch is in the wrong position 1 Set power phase switch in opposite position CTI CRYOGENICS Appendix C Troubleshooting Procedures HELIX TECHNOLOGY CORPORATION gt gt gt C 4 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Appendix D Schematic P N 8040540 D 1 IJVULIYI
40. omer Support Information Appendix B Flow Diagram Appendix C Troubleshooting Procedures Appendix D Schematic P N 8040540 Figures Figure 1 1 9600 Compressor 1 3 Figure 1 2 9600 Compressor Dimensions 1 4 Figure 1 3 Water Flow Rate versus Pressure Drop 1 6 Figure 1 4 9600 Compressor Rear View Component Locations 1 8 Figure 1 5 9600 Compressor Connected to Multiple On Board Cryopumps 1 12 Figure 1 6 9600 Compressor Connected to Multiple Cryo Torr Cryopumps 1 13 Figure 2 1 Using the Shipping Carton Ramp 2 2 Figure 3 1 9600 Compressor Installation Flowchart 3 2 Figure 3 2 9600 Compressor Circuit Breaker Terminals Cover Removed 3 5 Figure 3 3 Connecting Disconnecting Helium Flex Line Self scaling Couplings sisi is as 3 8 Figure 3 4 Single On Board Cryopump Connections 3 9 Figure 3 5 Single Cryo Torr Cryopump Installation 3 10 Figure 3 6 Recommended Multiple On Board Cryopump or Waterpump Installation Splitter Box located at Process Tool 3 12 Figure 3 7 Alternative Multiple On Board Cryopump or Waterpump Installation Splitter Box located at Compressor 3 13 Figure 3 8 Recommended Multiple Cryo Torr Cryopump Installation 3 15 Figure 3 9 Alternative Multiple Cryo Torr Cryopump Installation
41. ondition meets the requirements specified in Table 1 3 Figure 1 3 Water Flow Rate versus Pressure Drop 1 6 P N 8040540 9600 Compressor Installation Operation and Maintenance General CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION The information in Table 1 4 provides general Compressor operating specifications Table 1 4 General Compressor Operating Specifications Specification Values Part Numbers Input Power Cable Customer Supplied 600 VAC 10 Gauge 3 conductor wire with ground Must conform to local electrical codes Nominal Helium Pressure Refer to Table 4 1 Ambient Operating Temperature Range 50 100 F 10 38 C Interface Gas Supply Connector Gas Return Connector Remote Control Receptacle Cryopump Power Receptacles mates with the CTI CRYOGENICS supplied cryopump power cable for single pump use Mates with remote junction box power cable for multiple cryopump use 1 2 in Aeroquip self sealing coupling 1 2 in Aeroquip self sealing coupling 24VAC 2 7A inductive mates with P5 connector P N MS3106A Adsorber Service Schedule 3 Years Supplied by CTI CRYOGENICS NOTE The 9600 Compressor is designed for continuous operation and should remain ON when the cryopumps are in a regeneration cycle EE 55 gt gt gt P N 8040540 1 7 CTI CRYOGENICS 9600 Compressor Description HELIX TECHNOLOGY CORPORATION Component Descriptio
42. ressor and then to the GAS SUPPLY connector on the cryopump Using two wrenches as shown in Figure 3 3 tighten the connector 4 Attach the Supply and Return line identification labels to each end of the appropriate lines EMISE P N 8040540 3 7 CTI CRYOGENICS HELIX TECHNOLOGY CORPORATION Installation Disconnecting 1 Using two wrenches as shown in Figure 3 3 disconnect the two self sealing coupling connectors quickly to minimize helium leakage To Tighten Coupling Halves Turn Here Hold Here amp This 1 1 8 in wrench This 1 3 16 in wrench holds the coupling in a is used to turn the self e 3 3 Hold H Turn H stationary position sealing coupling Eg connector To Loosen Coupling Halves Side View Figure 3 3 Connecting Disconnecting Helium Flex Line Self Sealing Couplings Er gt gt 3 8 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Single On Board Cryopump Connections CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel 1 Connect the Supply and Return lines to the 9600 Compressor as described in Connecting Disconnecting Helium Flex Lines within this section 2 Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3 4 3 Connect the opposite end of the cold head ca
43. ssor HELIUM SUPPLY me HELIUM RETURN i I O CRYO TORR INTERFACE pen EU CRYOPUMP POWER WATER POWER CABLE USER REMOTE FROM VACUUM SYSTEM Figure 1 6 9600 Compressor Connected to Multiple Cryo Torr Cryopumps NOTE Your installation number of pumps per compressor will vary based upon the Cryo Torr Cryopump models used Refer to Appendix to consult your local CTI CRYOGENICS Customer Support Center for information on specific compressor cryopump applications P N 8040540 1 13 CTI CRYOGENICS 9600 Compressor Description HELIX TECHNOLOGY CORPORATION gt 1 14 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION Section 2 Unpacking and Inspection Introduction The 9600 Compressor is shipped in a shipping carton incorporating a ramp system which makes removing the Compressor from the carton safe and easy Shipping Carton Inspection Inspect the exterior of the shipping carton for visible signs of damage before opening the shipping carton Report any damage to the shipping company at once Removal from Shipping Carton 1 Cutthe two straps on the exterior of the shipping pallet 2 Lift the cardboard carton straight up and remove
44. the helium pressure regulator to 300 psig 20 7 bars If the compressor is ON proceed with step a If the compressor is OFF proceed with step b a Obtain the previously recorded normal system operating pressure from the Compressor Operation procedure in Section 4 Operation Open the gas charge control valve very slowly and allow helium to flow until the compressor gauge reading is the same as the value obtained from Section 4 Quickly close the gas charge control valve b Obtain the appropriate 50 or 60 Hz static system operating pressure from Table 4 1 Open the gas charge control valve very slowly and allow helium to flow until the compressor gauge reading is the same as the appropriate value in Table 4 1 Quickly close the gas charge control valve 6 Ensure that the helium charge valve on the Compressor is tightly closed Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting Reinstall the flare cap 5 6 P N 8040540 Prelimary Document Title HE L X Appendix A Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you please visit our website www helixtechnology com on the world wide web and select CONTACT on the home page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 1 800 367 4887 Inside the United States of America 1 508 337 5599
45. troEase RetroFast Stabil 1 Stabil Ion ThinLine TurboPlus TrueBlue Vacuum Assurance All other trademarks or registered trademarks are the property of their respective holders E 2004 Helix Technology Corporation Printed in USA 9600 Compressor Installation Operation and Maintenance Table of Contents Section 1 9600 Compressor Description G n ral aa 1 1 O A ee 1 1 Compressor Configurations 1 1 System Documentation seveso as Sois ae OSS aw REGS 1 2 CTI CRYOGENICS Helium Refrigeration System 1 2 Pes CAOS En Godse PT whieh ee a rev 1 4 O E ode er 1 4 Weight aars amenant seede Leer dr Layee 1 5 El ctrical RSR Sra tb ond ete 4 bord eder ae 1 5 Cooling Water Lina ta rd eda oee blade hehe days 1 6 Generals tan ket a cet Ae Se Ne eo hale seer 1 7 Component Description 1 8 Sen Circ it Breaker INA AA 1 9 Control Circuit Breaker pots e SE ad pod 1 9 Power ON Indicator 1 9 Gas Charge Flared PUEDE Lada 1 9 Hen Pressure als e NS ae a EN Ad a 1 9 Poweminlet 20 A A A A A 1 9 Return Gas Coupling 1 10 Cooling Water IN nii IA Wa 1 10 Cooling Water OUT iD 1 10 Cryopump Electrical Outlet 1 10 Cryopump Power Phase Switch 1 11 Compressor Re
46. you have concerns about system performance changing then check the normal system operating pressure Which was determined in Compressor Operation within this section If the normal system operating pressure is not correct check the system for leaks Once the leaks have been repaired helium must be added to return the system to normal operating system pressure as described in Section 5 Maintenance Replacement of Helium Circuit Components On occasion it may be necessary to replace components such as cryopumps helium gas lines or compressors or change the configuration of the system Whenever any of these conditions occur Static Helium System Pressure Verification should be performed to ensure that static helium pressure has not changed CAUTION The use of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions Contact CTI CRYOGENICS for a review of the intended installation and for specific technical instructions The use of a 9600 compressor on a manifold with other CTI CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200 210 psig charge pressure to avoid helium safety valves from inadvertently venting SUSER P N 8040540 4 3 CTI CRYOGENICS Operon HELIX TECHNOLOGY CORPORATION aaa 4 4 P N 8040540 CTI CRYOGENICS 9600 Compressor Installation Operation and Maintenance HELIX TECHNOLOGY CORPORATION

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