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HP 4140b User's Manual

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1. Interface Function HP IB Capabilities Source Handshake Acceptor Handshake Talker basic talker serial poll talk only mode unaddress to talk if addressed to listen Listener basic listener unaddress to listen if addressed to talk Service Request Remote Local with local lockout Device Clear ij Device Trigger Interface functions provide the means for a device to receive process and transmit messages over the bus xx The suffix number of the interface code indicates the limitation of the function capability as defined in Appendix C of IEEE Std 488 1975 3 53 Section IlI Model 41 j Table 3 12 Table 3 12 Remote Program Code sheet 2 of 3 LL entrer Program coe Description INTEGRATION SHORT 11 TIME MEDIUM BE x LONG 13 FILTER OFF JO ON a I TRIG INT EXT MAN These codes are used only to set and not for triggering When FUNCTION is set to FI I or F4 HSI TI is automatically set C Enable pF CO When FUNCTION is set to F3 C V CO is 1 automatically set C1 SWEEP 5 WI W4 is used when 41408 is set to AUTO CONTROL brad SWEEP Mode MANUAL W2 W2 W5 and W6 are used when 4140B is set to MANUAL SWEEP Mode PAUSE W3 RESTART W4 y W5 9 W6 O REDES 4 k W 7 VA MODE 3f Al When FUNCTION is set to Fl 1 F2 I V or F4 HSI A3 is automatically set a E A3 When FUNCTION is set to F3 C V
2. cy Sheet 2 of 4 nt Accura Figure 3 22 C V Measureme Mode js Up Pi LE gt t9 amp a i gt G e basa i mn a q 1 ta a G G pF a m ek 258 3e A a A ANNA AVI At VS y 01 gt 1 V 1BBv r i Il Figure 3 22 l i dV dt V7s 188V 100v M rere arra a ern Cy Measurement Accuracy Sheet 3 of 4 ba AA AN Section III Figure 3 22 MU qum mem pm AA H wa 4 Fd pa et H ms ma aa a tt paaa BN reem nent eer tm te Sr KAN EAS ABA re bag o ii SEES NAAA le ae H EEG 2 o ia pa E m e Qo ENS PROPER Me a Gg o w G um x e og N m gt Toc gt FOI ma ma LL a S pol ki f menm gt bh RENA cia ME NG TEAS este REPA DL S os eee amp a NS Gi e MM amp ON Pe HEROS ue TR O tm d Pon C V Measurement Accuracy Sheet 4 of 4 dV dt V s dV dt V s Figure 3 22 Bf 1908V 180Y 206pF 1999pF EB 08 ee M Section III Model am i Figure 3 23 ES 4 16055A Test Fixture 16053A Test Leads PROCEDURE 1 Turn 4140B OFF pagi P an nago GAD eN simil E O S
3. Voltage Burden XlOuV at full scale Internal Electromotive Force lt 100uV at 23 C 5 Maximum Input Hi Lo peak value 2V at 107 107 A range NE 30V at 107 107 A range 120V at 195 4 107 A range Lo Guard z200V Zero Offset Cancels leakage current of test leads fixtures p Offset Ranges 0 100fA Trigger INT EXT or MAN High Speed I Data Output Outputs current measurement data with max 4ms inter vals Refer to reference data for accuracy Input Terminal Triaxial BNC HP Part No 1250 0687 1 5 ALA io aum um Mm oA amp NET Section I Table 1 1 Table 1 1 Specifications sheet 3 of 7 DC VOLTAGE SOURCE VA AND VB Output Mode Va ef es Uy Na m OFF EC NE OFF Voltage Range O 10 00Y O 4 100 0Y 2 ranges autoranging only Max Current Capacity TOm Sweep Control Auto pause available man up down manually available in hold Operating Parameters Setting Ranges Start Stop DC Voltage 0 210 00V in 0 01V Steps 0 100 0V in 0 1V steps tep Voltage 0 01V x10 00V in 0 01V steps 0 1Y step at 10V of absolute value of output voltage Hold Time 0 199 9s in O 1s steps 0 1999s in Is steps Step Delay Time 0 10 00s in 0 01s steps O 100 0s in O 1s steps Ramp Rate dV dt 0 001V s 1 000V s in 0 001V s steps Accuracy at 23 C 5 C Output Voltage 97 fh 10V 0 07 11mV 100Y 0 09 110mV
4. HOLD STEP RANGIN INTES TIME DELAY TIME TIME TIME BC DISPLAY Ys Di SP LAY Figure 3 13 Relationship between l V Measurement and Displays for s Single Staircase Wave START Y V ce mw ams mame VAM uM T Mam aum Mi vum AB emm KH um Ate amm dam mtn roc RANGING STEP HOLD INTEG TIME DELAY TIME TIME E STEP DELAY TIME am oem ara euer cu ea mA KA ann em n s a ce a em rm aum m om ARE SY MOREM El du c x SS SA CNN NA aa Tisa a eu a EN O ullas gu re ipe pep cce t pit eee AN OS ot pod Ki HOLD STEP RANGING INTEG DELAY TIME TIME TIME Time TIME DELAY TIME Time i 1 t i i ist y i loth 1th estan v 204 30d 4th oe oe Sth 9th rp visse v Fia i Figure 3 14 Relationship between I V Measurement and Displays for d ha M 12 DISPLAY 1th 12h 13th 14eh 15th VS DISPLAY Double Staircase Wave 3 23 PANAMA RA a Mode qi Figures 3 15 and 3 16 i HOLO TIME NT YA A ae aa nA e wa e a a m m a E KI Hi E E START V i oa me 1 VS DISPLAY Figure 3 15 Relationship between 1 Y Measurement and Displays for Single Ramp Wave mat TIME STOP v i th 5th l STEP y i bo 3rd 6th o Dg NG EA dy 2nd 7th i Ist 8th i l lexa INTEG TIME X START v fam dt TC a i
5. 3 53 3 85 Parameter Setting 3 5 3 87 Data Qutput lx 9 we x 3 5 3 89 I C Measurement Value and VA Output Voltage 3 56 3 91 Parameter Output 3 5 3 93 Key Status Data 3 3 95 Service Request og SOB Byta AAA 3 ER 3 97 High Speed I HSI FUNCTION arras Bal 3 99 Programming Guide for A1 JOB sc 3 6 d XAR d Toa LIST OF TABLES Title Page Specifications AN 1 4 General Information 1 17 Available Options 1 13 Accessories Avilable 1 14 Application Ranges of Accessories 1 13 Automatic Control Settings 3 8 Current Measurement Integration Time 3 10 VS Section Output Modes 3 14 VS Section Operating Parameters 3 15 Inhibitation of Controls and Operating Parameters when VS Section is Operating 3 16 C V Measurement Accuracy RN 3 33 41408 Annunciations 3 47 Analog Output Data at I C OUTPUT Connector 3 49 Analog Output Data at VA OUTPUT Connector 3 49 X Y Recorder Pen Position Contro essosses 3 50 HP IB Interface Capabilities 3 53 Remote Program Code 3 53 Program Code for Parameter SELLING anus dd aala 3 56 Accuracy and Data Output Interval in HSI Function 3 59 Sample Program Using HP 9825A or 98354 Calculator a 3 60 Recommended Test Equipment L 4 2 Auto Setting Modes for Performance
6. Soe ae een GG R SSS ao NG AA Se a TH E a PA E IA SIERO LS CIA O MUA ed al ana O A Ne AG S A NE 1 HT AG AG MN t ELENA EE Da a A S O Me AEn me ae AAA A LE ES A merr iN HRS MAS UA OS MU TETE ges som Mi Y LO dd n n Lo Ha Ed UND mm ums ma HARA RG ee ra Ee TE MAA Y ME MC URN RN ro III DO IA DAA mm ma aa m d mri A mn PP NBA et ng mM SE HG AA JAG a SSA H L ee GG SG AA NA AN PN AN E AI a RET gt E UR ERR EV HR SAU LE aa aan es toot a SA ki GG NA AA N amp O o ae AG RA KR AN AG TF NG BN E A NA PAS AE S E A A R ri YA HN FO 0 001 0 01 PANG t dv dt V s L RANGE IOA a a Lp AA LA JA HIER ooo AAA b cote TTI d Se pn OSA SE a A An reee oa wm ae a sa an aor AI IS NP SE SOP EIA An S AEREO Al CipF CipF Ex wit y rA ani n Nas T 14 10 0 Miete iz ER AMS jt m mr me arai Gt ama Sraya gt y ya 5a AG a AA se a a Sere WS spa TR c ALIENI Sl NIE IMMER LG GT EP GN Ba AA H NAG RUIN DES PP M 2 KABA GA EM S UA UA E TS E KG RG IC EEES la NGA IC AM EA o OA SO FRESNO 11 586 SN CA Ao MM AS maa ALIS BEL NA MIB IMG CUNG EEE NES PN 0 100 x 10 A EHI BID ISC UE SEE ooo e NIT SEAN ME MU ISSUES ATCT 0 004 2 0 es 1 0 00 0 01 Qi o PU 0 001 x IOTA 6 00 x10 Pa onoxio a dv dt V s dV dt V s Note 1 Accuracies are specified in shaded areas only Note 2 Numerics in each area mean digits of capacita
7. 110 E NUM A 3 1 1 4 3 1 1 4 120 Ce BINIOR SHIFT H 8 L 130 PRINT USING 70 C 1000 E R 140 NEXT I im 150 END 1 N Number of data sent i 2 9825A Sets name 4140B8 size 3N 1 and type high speed read write i buffer of the buffer for high speed I 0 NG 9835A Sets name AS and size 23N 1 of string variable for high E speed 1 0 b Sets 41408 to HSI Sends measurement data from 4 40B to controller l Inputs first byte of measurement data from buffer to variable S Range of first measurement F High byte of count of first measurement Low byte of count of first measurement 16 data count bits make up H and C CoU Xx NG 3 4 5 6 7 8 9 C Figure 3 37 Sample Program 5 Using 9825A 9835A sheet 2 of 2 3 66
8. SERES sal Ramp Voltage ee m w H o ig X SIAR O rage VJ z amp Rate 20 264 10W s HOLD TIME s 2s und 107 x START Voltage V 0 22 80 V s HOLD TIME s 2s if absolute setting value for START or STOP Voltage gt 10V Linearity 0 1 0 0003V s 4 _ 0 001 x START Voltage V aA TP RAMP RATE V s RAMP RATE V s x HOLD TIME s 2s 0 22 0 003V s ing 0 001 x START Voltage V Tice T RAMP RATE V s RAMP RATE V s x HOLD TIME s 2s if absolute setting value for START or STOP voltage gt 10V 1 Temperature Change 3 6 C hour 2 Time after start of rampz2s Section I Table 1 1 Table 1 1 Specifications sheet 4 of 7 start Stop Voltage only for N 20mV s200mV gt 10V of absolute setting value for START or STOP voltage gt Display of Output Voltage only for X 500 075 16mV 20 098 160mV 2 10V of absolute setting value for START or STOP voltage Step Delay Hold Time Accuracy is dependent on accuracy of line frequency 50Hz or 60Hz Current Limit 107 A 107A or 107 A 102 Output Terminals BNC L GND C V MEASUREMENT Calculation Equation C F measured current value A ramp rate V s Measurement Range 0 0pF 199 9pF 200pF 1999pF 2 ranges of Auto range 4 change Display Capacitance change 7s displayed as a of the initial setting value of Cox 100 4 Display Range 0 0 199 95
9. 0 54 2 0 543 0 moa Pu E Saol a 0 5 7 0 5 3 mE 5410 pe Parts ZnO CONECTOR 190731 OFF 5 30 5 15 5 10 ae a ee a RE 505 stem nog of reading counts at 23 C s 5 C lt 70 humidity Zero offset is performed Minimum Data Output Trigger Cycle f i i i 1 11 Section I Mode Table 1 2 Table 1 2 General Information sheet 2 of 3 I Data Output Trigger Dm om omm ME At 50Hz line frequency x5 6 at 60Hz operation oe xx Triggered when the logic signal 2 lus goes to 0 short or 1002 of resistance from 7 Triggered by HOLD MAN key 2Integration Time t 3ms Current Measurement Ranging Time ms Start s Optimum Range A A A eee CATANA E EDO Dui Ciis Ca 2 EN 340 960 PM 2260 3080 3420 4940 mn 7760 1973 ES Eb 620 960 1580 1920 2740 3080 bana 4940 7420 1 on 320 300 NEL 640 620 960 1300 2120 2460 3980 4320 6800 B Siem MUR Mom EUM MELOS rM EEE E oe cota Bee Se td Kha aha RR 1075 340 320 660 640 340 X 960 1780 2120 3640 3980 pr 640 620 320 300 960 940 640 620 340 1160 1500 3020 3360 5840 107 660 640 340 320 980 960 660 _640 820 M 2680 3020 19 960 940 640 620 320 300 1280 1260 960 940 640 620 340 1860 2200 4680 ma 980 960 660 640 340 320 20 1300 1280 98
10. 3rd F E q 7 2nd ist 1 START Y ju sm aa i dt Y i l tis HOLD TIME i VS DISPLAY lst START v Figure 3 9 Relationship between Output Voltage and Display for Single Ramp Wave Va tv HOLD TIME Ps tr BET a ka BG 7th 8 STEP Y Lo 4th 8th A ELNE A TER AENA A AI eS eee 3rd dy dV Sth Ane 10th t pi MN ist START V pu i dt y IA at pa Pe iag TIME I i i HOLD TIME I j PAA t s lith iTaRT vil ov Figure 3 10 Relationship between Output Voltage and Display for N Double Ramp Wave 3 18 gt wode 3 2 range chang ing methods 1 Figure 3 11 The VS section 1 41408 Output Voltage Range of the 41408 provides tput voltage ranges a xl range 10 00Y at the 0 01V step and a x10 0 0V 100 0V in 0 1V steps Range ing is done automatically by the follow depending on VS output mode DC Va and VB Output voltage range selected depending on the value of the parameter Va or Vp The xl range is selected when VA Vg is 0 00V 10 00V The x10 range is se lected when Va Vg is 100 0V 10 1V or 10 1V 100 0Y Staircase Wave 47 is individually Output voltage range changes automat ically from xl range to x10 range or from x10 range to xl range at 10 00V If STEP Y is set to 0 01Y resolution step voltage value is raised automat ically to 0 1V resolution on x10
11. i i HOLD TIME HOLD ting iU INVALID l IG DISPLAY DAN t VS DISPLAY Figure 3 16 Relationship between I V Measurement and Displays for Double Ramp Wave 3 24 y 41408 Section 111 Paragraphs 3 47 and 3 48 ment Operating Instructions ting instructions for taking an I nt are given in Figure 3 17 8 Opera y measureme 16055A Test Fixture TTA 16053A Test Leads PROCEDURE 1 Turn 4140B OFF 2 Connect 16055A Test Fixture to I INPUT and V OUTPUT connectors of the 4140B with 16053A Test Leads Figure 3 17 I V Function Operating Instructions sheet 1 of 4 3 25 Section 111 Model qui Figure 3 17 gt 160554 Test Fixture The 16055A can be used for stable pA current measurements of general de vices with the electrostatic light shielded hood DUT can be connected easily with alligator clips or with the TO 5 type sockets which are furnished accessories of the 160554 refer to Table 1 4 for photos and part numbers of accessories LOW lead connection of pA Meter section in the 41408 is selected with 16055A LOW LEAD CONNECTION select switch as follows o VA VB LOW HIGH HE foo DUTT P LOW HIGH VA Or VB po pee L oe CAUTION AE reni N Oy paper races rubi atem a a a PAGHIGA KANO hahaaha i src atrio PNG OR e GND FOR SAFETY THE 16055A SETS VOLTAGE SOURCES Va Vp AND EXTERNAL TO OFF BY A MICRO SWITCH WHEN THE HOOD IS OPENE
12. over wide measurement ranges 40 001 x10 PAN 11 999 x 107A enabling stable pA current measurement at 10 PA 1 count This is achieved by employing a new unique variable digital integration method This stable and fast less than 35ms at InA measurement technique is very useful not only for the measurement of the small leakage currents of semiconductor devices and the static charac teristics of FET s but also for making insu lation resistance leakage current absorption measurements analyses of capacitance and in sulation materials One of the two program a a B tob fo ba 5 3 H SEN us Pa cp aaa ETE pan ten PF TY Ls rand koaa HU we WR WO i section i Paragraphs 1 6 to 1 13 mable DC voltage sources VA can operate not only as a programmable DC voltage source but also as a unique staircase s n and accurate ramp tr JN generator The DC Voltage Source has an output range of 100V in 100mV steps or 210V in lOmV steps and the ramp rate can be set from 0 001V s to 1V s at 0 001V s resolution The sweeps of the staircase and ramp functions operate both in the AUTO sweep mode with a pause key for changing step voltage and sweep direction during measurement and in the MANUAL sweep mode with down and up 3 keys Each programmable DC voltage source VA and Vg has a current limiter to avoid damaging the DUT by excessive current
13. Analog Output circuitry Table 3 10 X Y Recorder Pen Position Control Key Voltage Output Voltage Output from VA OUTPUT Connector from I C OUTPUT Connector UR Greater voltage START V or STOP Voltage at plus full scale of I C Upper Right V DISPLAY 5y LL Lesser voltage START V or STOP I V Lower Left V SV Voltage at minus ful scale A C V OY To VA OUTPUT Connector To I C OUTPUT Connecctor EQUIPMENT ATA KAPPA HP 70474A etc BNC male Dual Banana Plug Cable HP 11001A 2ea Figure 3 29 Analog Output Operating Instructions sheet 1 of 2 Section III y 41408 Figure 3 29 mode PROCEDURE 1 Turn 4140B and X Y Recorder OFF 2 Connect I C OUTPUT connector on rear panel of 4140B to Y axis input termi nals of X Y Recorder and VA OUTPUT connector to X axis input terminals with BNC male dual banana plug cables 3 When Y Y Recorder is provided with pen lift TTL controls connect PEN LIFT connector on rear panel of 41408 to X Y Recorder connector 4 Connect test leads or fixture ex 160534 Test Lead to 4140B TIN eterna tome C 5 Turn 41408 and X Y Recorder ON 6 Set front panel controls and parameters Refer to Figure 3 17 for I V measurement or Figure 3 23 for C V maeasurement g Note The 41408 HOLD TIME parameter should be set after considering the relationship between the pen posi
14. Cox Setting Range 0 1pF 199 9pF 200pF 1999pF Capacitance Calculation Accuracy Depends on accuracies of both current meas urement and linearity of ramp wave refer to paragraph 3 53 Zero Offset Cancels stray capacitances of test leads fixtures Offset range 0 lOOpF Section I MOGEL 4149 Table 1 1 Table 1 1 Specifications sheet 5 of 7 3 MTM ey OTHER Analog Output Output Data VA I and 5 Output Voltage Output Data Output Voltage Resolution VA 10V 0 vn 1 000V 1mV count 10 1Y 100V 1 01 10 00Y 10mV count I Full Scale 45V 5mV count C Full Scale l 100pF 0 5V 0 5mV count 1000pF 5V 5mV count 1004 4 Display 5V 5mV count Accuracy 0 55 20mV Low Pass Filter OFF 0 22s 20 and 1s 20 applied to both VA and I C Data Output Pen Lift Output TTL low level 20 8V during sweep period in I V C V function Recorder Scale Output Upper right lower left scale output for location adjustment of recorder VA output T C output Either maximum voltage value Full scale value of of START or STOP voltages plus sign Either minimum voltage value Full scale value of of START or STOP voltages minus sign OV OpF e for C V measurement UR Upper Right bee 3 Lower Left HP IB Interface IEEE 488 1975 ANSI STANDARD MC 1 1 Interface Functions SHI AHI T5 L4 SRI RLI DCI DT Remotely Controllab
15. High Speed I HSI Function 3 96 The 4140B sends an RQS Request Service 3 98 The 41408 has not only I I V and d signal whenever one of bits 1 thru 4 6 or 8 functions but also has a High Speed I usb is set Figure 3 31 shows the Status Byte function This facilitates high speed de makeup of 41405 output of the current measurement Thig8 function can be set only by remote Prograt CT Signal bit 7 RQS signal establishes whether or not a service request exists Signal bits 1 thru4 6 or 8 identify the character of the service request states Service request states of the 41408 are 1 Bit 1 If Data Ready is set to ON this state is set when measurement data is provided 2 Bit 2 When CURRENT LIMIT is operating when LED lamp on front panel is lit this state is set 3 Bit 3 When SELF TEST or Auto Sweep Measurement is completed this state is set Note Bits 1 thru 3 are set when SRQ MASK refer to Table 3 12 is set to ON 4 Bit 4 CD When the 4140B receives an erroneous remote program code this state is set If the 4140B receives an illegal program when DC Voltage Source 1S operating when V OUTPUT lamp on front panel is Tit this State is set 8 When parameter is set to a value over its setting limit when VS 1 ISPLAY on front panel displays O F this state is set a If VA is swept when parameters are not set correctly when VS ISPLAY on front panel disp
16. South Africa India Rhodesia Singapore etc HP Part No 8120 1689 CEET VII Color MINT GRAY 250V 6A for East West Europe Iran etc Note E Earth Or safety ground L Line of active conductor N Neutral or identified conductor Figure 2 2 Power Cables Supplied Section II Paragraphs 2 10 to 2 18 o power Cable 2 14 Humidity The instrument may be oper p2 10 ated in enyironments with humidities up to EN 1 This instrument is equipped with a 70 at 40 C However the instrument should WE 2 vive power cable When connected to an be protected from temperature extremes which eres riate ac power receptacle this cable cause condensation within the instrument Vae the instrument cabinet The type of EF Ta cable plug shipped with each instrument 2 15 Installation Instructions E pa bands on the country of destination Refer JE 0 Figure 2 2 for power cable part numbers 2 16 The HP Model 41408 can be operated on HE and plug configurations available the bench or in a rack mount The 41408 is 3 ready for bench operation as shipped from the Note factory For bench operation a two leg in strument stand is used For use the instru check local electrical codes for ment stands are designed to be pulled towards proper plug attachment cap selec the front of instrument tion for your area 2 17 Installation of Options 907 E 2 12 Operating Environment N ange 2 18 The 41408 can be installed in a rack and
17. Tests and Adjustment L we 4 3 Output Voltage Accuracy Test 4 5 Current Measurement Accuracy Test 4 7 m pa sinakal mgwa Number tel Model 41408 LIST OF ILLUSTRATIONS Title Page Model 4140B and Supplied Accessories 1 1 Line Voltage and Fuse SE1ECEION s c ANAKAN oe 2 1 Power Cables Supplied 2 2 RACK MOUNE KIT ecos NG cxx x 2 3 Front Panel Features 3 2 Rear Panel Features 3 6 Octal Codes of Control Keys 3 8 Less Significant Zero ov xs 3 9 Integration Time and Data Output when I TRIG is Set to INT 3 11 pA Meter Section Operating Instructions when FUNCTION 15 Set to al Gode WES PES Relationship between Output Voltage and Display for Single Staircase Wave Relationship between Output Voltage and Display for M Double Staircase Wave Relationship between Output Voltage and Display for Y Single Ramp Wave NG wo Relationship between Output Voltage and Display for N Double Ramp Wave LG NG BR Pee amp Output Voltage Range of Staircase Wave VS Section Operating Instructions when FUNCTION is Set to Dl olibdaue X4 n lt Relationship between I V Meas urement and Displays for s Single Staircase Wave 3 23 Relationship between I V Meas urement and Displays for sv Double Staircase Wave 3 23 Relationship between I V Meas urement
18. VA setting refer to fer to paragraph 3 35 Auto Sweep 5 BET am Manual Sweep ae al Connections for typical applicatons for I V measurements are given below 1 I V Characteristic Measurement of FET 2 Breakdown Voltage Measurement of Diode r a de VA 3 Threshold Voltage Measurement of FET i Note Specific information on DUT connection is described in paragraph 3 61 Figure 3 17 I V Function Operating Instructions sheet 4 of 4 3 28 or TO 5 socket depending on Egel 41408 sa C Y MEASUREMENT The Mode 41408 can automatically syn 50 measurement timing between the pA on ction and the VS Voltage Source on to make Quasi Static C V character tics measurements when the FUNCTION is set C Y Accurate C V measurements using the cise ramp waves and the high pt tity pA Meter with its 107 9A max re subir d Pan be made by taking advantage of E instruments variable digital integration average method described in para a Ihe capacitance value is calcu ated from the following formula I measured current value be dV dt ramp rate Y measurement operations are described in ragraphs 3 49 thru 3 60 For basic oper ational instructions of the pA Meter section refer to paragraphs 3 12 thru 3 26 and for V operation of the VS section refer to para 8 graphs 3 27 thru 3 42 i CL CN Measurement D
19. and Displays for Single Ramp Wave vc Relationship between I V Meas urement and Displays for A Double Ramp Wave LAG LK a E E I V Function Operating Instructions Number Measurement Range 3 3 3 21 Suitable Current Measurement Range for C V Measurement 3 32 3 22 C V Measurement Accuracy 3 34 3 23 C V Function Operating Instructions 3 38 3 24 Effects of Leakage Current and External Noise 3 41 3 25 Effects of the Low Guard o ss oue RN SR PRAE 3 41 3 26 DUT Connections with Each Accessory er Eh 3 42 3 27 DUT Connection Examples 3 43 3 28 DUT Connections on Wafers at the Prober Station 3 45 3 29 Analog Output Operating Instructions 3 50 3 30 HP IB Control Switch 3 52 3 31 Status Bytes of the 4140B 3 58 3 32 Data Output Format of the HSI High Speed I ogni Meg 3 59 3 33 Sample Program Using 9825A 9835A 3 61 3 34 Sample Program 2 Using 9825A 9835A 3 62 3 35 Sample Program 3 Using 9825A 9835A 3 63 3 36 Sample Program 4 Using 9825A 9835A 3 64 3 37 Sample Program 5 Using 9825A 9835A sta 3 65 4 1 Voltage Output Accuracy Test Setup 4 4 4 2 Current Measurement Accuracy Test Setup 4 6 List of Illustrations Title Page Relationship between C Y Measurement and Displays for Single Ramp Wave 3 30 Relati
20. i MES MT ae 1 6 A key capability of the 41404 ds its ability to make accurate V C V measurements Measurement timing can be automatically syn chronized between the DC Voltage Source and the p Meter section The start stop and step voltages can be set from 100V to 100V at 100mV resolution from 10V to 10V at 10mY resolution The hold step delay time can also easily be set depending upon the characteristics of the material being tested All these capabilities are featured in the HP 4140B itself which up to now has required an extensive instrument system Static char acteristics of semiconductors diodes and FET s the analysis of MIS construction and the measurement of the threshold voltages of FET s in addition to 1 minute value measure ments for insulation resistances resistance values of approximately 0 52 10 2 can be calculated from the I V measured values can be made easily quickly and efficiently with the 4140B With the 41408 it is especially easy to make a quasi static C V measurement a capacitance measurement utilizing a ramp wave which is usually employed as one of the measurements when trying to improve semicon ductor quality The 4140A measures capaci tance value by the following formula C I measured current value m dV dt ramp rate This is possible with the 41408 because both the desired setting of the ramp voltage and the capacitance measurement are completely sync
21. ii icm O 3 2 ne T a3 gt co D rpm Su a ct 1 am M o Troes i y y Ungrounded DUT Measurement a Measurement Example High resistance measurement of the insulating materials condensers etc connection VA or V8 Wiring t i 1 INPUT 16054 A 16053 A Smeided Box Section 111 Figure 3 27 b Grounded DUT Measurement Measurement Example Breakdown voltage measurement of diode Quasi Static C V characteristics measurement of MOS diode etc Connection YA or VB Wiring T INPUT 41408 i i 1 i NB 160544 EA a K Shieided Box Figure 3 27 DUT Connection Examples sheet 1 of 2 3 43 Section III Paragraphs 3 63 and 3 64 c Three Terminal DUT Measurement Measurement Example tics or threshold voltage measurement of an FET Connection en Veeri Va or Vg Figure 3 27 3 44 Shielded Box DUT Connection Examples sheet 2 of 2 I V characteris Model p 3 63 DUT Connection Using the Wafer Proben 3 64 The following rules must be obsti when making pA measurements on wafers at th 4 prober station with the 4140B E E 1 The entire prober station shou HE i housed a shielded box made from il plate etc and the m braids E the 41408 both I INPUT and V OUTPUREE should be connected to the shielded pm I a to increase the shieding effect 3 1 d 2 The HIGH termin
22. or VB If output current goes to limit value this lamp flashes select keys select output current lim it of VA or VB to 100uA 1mA or 10mA 20 V SWEEP AUTO START SET key Thi key is used to start auto sweep when Vj is set to sweep mode and sets DC volt age of VB When VA is set to DC mode this key is used to set DC volt ages for VA or Vg Features sheet 3 of 5 ef urere MAN PAUSE STEP DOWN 9 v sita UP EJ Keys MAN PAUSE ai is usually used to start manual E do When VA is operating in auto KE mode this key is used as the auto sweep pause control The key can change the sweep from auto when LED lamp is not it to manual mode when LED lamp is lit or from manual to auto The STEP DOWN and STEP UP keys are used for manual sweep Ng SWEEP ABORT RESET Key This key is used to abort all operations of the DC Voltage Source 5 ENTER Key When this key is pushed af ter the value of the parameter is set with the PARAMETER select 2 and DATA keys the set value is stored in the A A0A The VS DISPLAY 6 indication flashes once when this key is pushed 24 Blue Key Functions in blue letters Cox SELF TEST X Y RECORDER are ef fective after this key is pushed 5 DATA Keys These keys are used to in put parameter values They are made up of numeric 019 decimal and minus keys 25 X Y RECORDER Control Keys These keys are used to control pen position
23. repeated at 200ms or UP key Also pressing approximate rate LIMIT key after pressing the Blue key sets the lower 1imit of AUTO mode 1 EXT MAN In external manual trigger SXNGE When a lower limit other than mode a trigger signal is 10 2A is set the LED lamp will flash provided by not only apply ing to EXT TRIGGER input on rear panel but also by Note pressing this key Refer to paragraph 3 I5 Pressing DOWN 9 or UP 3 key sets the ranging mode to Manual even if the ranging mode was set to Note AUTO TE A 4140B can be triggered by 0 INTEGRATION TIME Select Key These 3 trigger command GET keys select digital integration time regardless of mode setting in accordance with the following table of 1 TRIG for the various measurina conditions Integration Time ms Note at 50 60 Hz line frequency I INPUT Connector This connector is a triaxial female connector for connect ing unknown current source test lead or test fixture Range A 12 GROUND Terminal This terminal is con nected to chassis ground of instrument and can be used as ground terminal in measurements which specifically require use of a guard GD FILTER Key An internal filter for re jecting ac noise can be set to ON OFF by pressing this key When the filter is OFF LED lamp is flashing Figure 3 1 Front Panel Features sheet 2 of 5 Section III Figure 3 1 DC VOLTAGE GOU
24. to paragraph 3 31 12 Input values for VA operating parameters START V STOP V STEP V HOLD TIME and dV dt refer to paragraph 3 33 13 When calculated capacitance value is to be displayed in percent input value for Cox refer to paragraph 3 57 14 If VB is to be used input value for VB 15 Select current limit values of VA and Vg with CURRENT LIMIT Select keys refer to paragraph 3 39 l 16 Select Jow lead connection of pA Meter section in the 41408 with 16055A LOW LEAD CONNECTION Select switch depending on kind of measurement 17 Connect nothing to 16055A Open 18 Start C V measurement with AUTO START key on front panel 19 Set I C DISPLAY to O 0pF with ZERO offset key refer to paragraph 3 55 Note Any residual capacitance which exists on test leads or test fixture increases the error of the C V measurement To avoid this condition doa ZERO offset under the same conditions as for an actual measurement 20 When calculated capacitance value is to be displayed in percent set displayed value of I C DISPLAY to percent change with percent key 21 Connect DUT to 16055A with alligator clips Or T0 5 socket depending on kind of measurement 22 Start C V measurement with AUTO START key Figure 3 23 C V Function Operating Instructions sheet 2 of 3 Figure 3 23 Connection for Quasi Static C V characteristic measurement are given below MOS Diode Note Spec
25. 0 960 660 640 340 1860 1071 1480 1460 1160 1140 840 820 520 1800 1780 1480 1460 1160 1140 840 m pn 1500 Das 1180 1160 860 840 540 520 a 1820 11800 1500 1480 1180 1160 860 840 2480 197 2 2700 2680 2380 2360 2060 2040 1740 1720 1220 1200 3020 3000 2700 2680 2380 2360 2060 2040 2500 3750 Each value is the ranging time from the start range to the optimum range All values are in milliseconds Times to the right of the diagonal line are downward ranging times Times to the left of the diagonal line are upward ranging times the upper values are ranging times when the internal Current measurement circuit is saturated and the lower values are when it isn t saturated Table 1 2 Section I Paragraphs 1 19 to 1 28 General Information sheet 3 of 3 DC VOLTAGE SOURCE output Resistance lt 19 Output Inpedance lt 12 at 10Hz lt 1002 at 100Hz Program Speed 7 MM Ranging approx 30ms Approx 2 5ms 1V ms through rate 1 19 OPTIONS 1 20 Available Options for the Model 41408 are listed in Table 1 3 i Table 1 3 Available Options Option Description 907 Front Handle Kit 908 Rack Flange Kit 909 Rack Flange and Front Handle Kit 910 Extra Manual 1 21 Option 907 908 or 909 1 22 Option 907 908 or 909 provides the me chanical parts neccessary for rack mounting Installation procedures for these options a
26. 1001 t Connection Plate with triaxial 1 and BNC OE female connectors Useful for connecting prober station kahina f xture designed by user and other 41408 accesso ries 16054A Connection Selector Selects connection of low lead for 41408 pA vete f section Used in conjunction with the 16053A Interna connections are MA as follows E node 41408 Section I Table 1 4 Table 1 4 Accessories Available Sheet 2 of 2 16055A Test Fixture Furnished with the 41408 Used for general device measurements For stable pA current measurements with electrostatic light shielded hood Furnished accessories used in conjunction with the 16053A include the following Descriptions ALEA plate with alligator clip Alligator clips 5ea Connection plate with TO 5 socket Connection leads for TO 5 sock et 5ea TO 5 Socket 8 pins T0 5 Socket 10 pins TO 5 Socket 12 pins 16055 65001 16055 65003 16055 65002 16055 65004 1200 0238 1200 0239 1200 0240 16056A Current Divider Extends 1072A range to 1071A Useable only on 107 A range Section II Paragraphs 2 1 to 2 9 SECTION ii INSTALLATION 2 1 INTRODUCTION 2 2 This section provides installation in structions for the Model 41408 pA Meter DC Voltage Source and its accessories his section also includes information for initial inspection and
27. 3 14 pA Meter Display 15 The primary display sub display and two LED lamps provide visual data outputs of 5 current measurement result or the result of capacitance calculations The primary dis play I C DISPLAY provides a readout of cur rent measurement value calculated capaci tance value or the capacitance value as a percent of the reference value Cox as a maximum 4 digit decimal number with decimal point If measurement overflows an alpha betic annunciation either O F COF or POF is displayed refer to paragraph 3 65 The sub display provides the exponent of the cur rent measurement 2 to 12 in eleven ranges when FUNCTION is set to I or I V Two LED lamps serve as the unit indicators for the capacitance measurement These lamps indicate that the value of the I C DISPLAY is the cal culated capacitance pF or the capacitance value in percent referenced toa capacitance value Cox In a C V measurement lesser Significant digit data of the calculated ca Pacitance is displayed when the current meas urement data has few significant digits In an I C DISPLAY the lesser significant digit data 1 represented by a small zero mj fig ure to differentiate it from a more signifi cant digit which is represented by a large jas shown in Figure 3 3 zero Ri Less Significant Zero Significant Zero Figure 3 4 Less Significant Zero Section III Paragraphs 3 12 to 3 17 The display for the pA Meter d
28. 8 M a at 4 Set I RANGE to AUTO 5 Select desired Va output mode with VA Mode Select key 6 Make an I V measurement 7 Set current measurement range to maxi mum range for an I V measurement 3 29 Paa ad Section 111 Figures 3 18 and 3 19 ma HOLD TIME lst i i i RO INTES TIME HA START V PC DISPLAY Ist el dus 8th START V dt mn KOLO TIME f l HOLD TIME t s INVALID t DATA IC DISPLAY Figure 3 19 Relationship between C V Measurement and Displays for N Double Ramp Wave 3 30 sonda tar Section III Figure 3 20 RANGE 107 E RANGE 1C70A a MEA a A pp tpt DAS td eo LL SS Tt ERA AAH HSA A A AA AL E UL LS R SA SN AM ss TEE HA ipa 1 Hee OS 1000 x 10 bes His js TA 1113 H rm DEus Ss MESURE hA E i Daa Palapag ee an cas hs FOOT XE 000 XT et AA E o Ve AAA GA AN AS A H A ELA Lj E ERE EA YA S HIDE HAS RK aes 10 5 i z Jn T E HA iii EN R um aj NOI ang sin ie PAA q l dui 4 4 nG LL or e 0 100 x 1079 100 0 MILE SHES SUE 1 000 1 109A 000 o A 0 Rha te a eee eNe ERE a Ola SEE T edd T e rcd MICI ITI i EE j i CipF rii UN Hd 4 KAN E 7 i4 5 X RES ERE E n va e ct 343 MS M Nag 0 010 x 1079A om TIN BI 0 100 x 1098 MON M NG NTN 106 a mere AG ei to 0 C pF Td
29. 95 Snv count 8 LINE Input Receptacle AC power cord is connected to this receptacle and to AC power line 3 VOLTAGE SELECTOR Switch These switch es select the appropriate operating power voltage 100 120 220V 10 or 240V 5 10 48 v 66Hz Refer to paragraph 2 8 Figure 3 2 Rear Pane Features sheet 2 of 2 Mode Paragraphs 3 8 to 3 11 CURRENT LIMIT lai atte NG tamaan fip i af 7 NG El EJE 35 3 B 3 bi pe FUSE EE edhe d 1 INPUT Y outas 36 o omm TAAS nem Figure 3 3 Octal Codes of Control Keys 3 8 INITIAL CONTROL SETTINGS C measurement Unit indicator is set t pA 3 9 One of the convenient functions which facilitate ease of Operation is the automatic 3 10 MEASUREMENT FUNCTION initial contro setting performed after the instrument is turned on Initia panel con 3 11 The 41408 has three measurement func trol functions are automatically set as fol tions which are ELT lows 7 6 I For independent Operations as a yn FUNCTION V wawa bana Ae I Versal pA Meter and DC Voltage Sourc k RANGE aang pat aan HI OR MAGA Wang AUTO Lower Limit of AUTO Mode 10445 I V LV characteristics measurement usi AA S oed LONG Staircase and Ramp wave APA leads ON I IRIG Q2 2224 lE a ese AASA INT C V Quasi Static C Y Characteristic NA vespere is Vi Ead du eua eatur A measurement using Ramp wav
30. A E O PAP NAIG ARAN SS 4 i4 ait were ANO peret MAD JENNI VETERES A PEET Ee me s vum Ae P E a 1 dise pis nt 2 Connect 16055A Test Fixture to I INPUT and V OUTPUT connectors of the 41408 with 16053A Test Lead 3 Tum 41408 ON 4 Self Test is performed automatically refer to paragraph 3 5 Note The 41408 requires a one hour warm up time to sat isfy all specifications listed in Table 1 1 5 The 41408 is set automatically as follows eo ha DL cca AR FUNCTION teeth agarang sien I I RANGE o xd AAA AAA AUTO Lower Limit of AUTO Mode 10 A INTEG TIME comia a RR INT FILTER 54e o sede O ON I TRIG Las a AER INT VA cono ro roer cnnrrrcarrooooon n o a n ra VB NTPC no OFF PARAMETER cussatis cos all parameters are O I ZERO OFFSET sonoras cs OR ofA C ZERO OFFSET srs BA x RR AN NANAKAWAN OpF VA CURRENT LIMIT oommooooonooornono 107A VB CURRENT LIMIT zoe retirer mr enn 107 A 6 Confirm that the I C Data Output Trigger lamp is flashing Figure 3 23 C V Function Operating Instructions sheet of 3 3 38 7 Select desired current measurement range with I RANGE keys refer to par agraph 3 53 8 Select desired integration time with the INTEG TIME keys refer to para graph 3 18 9 Set FUNCTION to C V 10 VA output mode is automatically set to 11 Select desired VA and VB output modes with VS Mode Select keys refer
31. Al is automatically set A A4 ik me 7 A5 1 OFF AG a VB MODE VA I LIMIT TOOHA L1 TmA 12 TOMA L3 i 4 demit G3 1 un 4 Ecc sc imei Sene DII PE SRQ MASK TRIGGER KEY STATUS RECORDER e power ON Section III Table 3 12 Remote Program Code sheet 3 of 3 These program codes are used to control bits 1 thru 3 of SRQ Status Byte as fol lows Bit 1 DATA READY Bit 2 CURRENT LIMITER Bit 3 AUTO SWEEP or SELF TEST END Refer to Figure 3 31 for more specific information on SRQ Status Byte Section III Paragraphs 3 85 to 3 90 3 85 Parameter Setting 3 86 A 4140B can be set to refer to Table 3 13 by as follows KXENNNN NNX 2 3 4 1 3 nine parameters remote programming 1 Program Code for Parameter Setting refer to Table 3 13 2 Setting Value numeric or space 3 Delimiter semi colon gt comma N 4 Terminator Table 3 13 Program Code for Parameter Setting Setting Value 10 00 10 00 100 0 a 100 0 10 00 10 00 100 0 100 0 10 00 10 00 100 0 100 6 10 00 10 00 a 92 a Fr e oO ct lt nm ARM e u M o ne rm 0 1 1999 1 000 1 000 0 1 1999 PD 0 01 100 0 10 00 10 00 100 0 a 100 0 TIME s 3 87 Data Output ME Eo Syn NT hinang mko Po Aa NUS co T 3 88 Data output by t
32. Byte is cleared oa within lOms after it is output to the controller Therefore if the Status E Byte is output within lOms after the last output the last state may remain is Figure 3 35 Sample Program 3 Using 98254 9835A sheet 2 of 2 Sample Program 4 Description f The remote programming code K can be used to recognize 4140B key settings This program shows how to use K i Note tion for the I RANGE using K is RAI Therefore the I RANGE should be set to RAO MANUAL to recognize the true I measuring range E When the I RANGE is set to RAJ AUTO key setting informa E 9825A Program 9835A Program m ji 0 dim A 30 10 DIM A 30 l wrt 717 R 20 OUTPUT 717 K 2 red 717 A 30 ENTER 717 AS 3 dsp A prt A 40 DISP A 4 end 50 PRINT A 60 END Note The statements on lines 1 and 2 or 20 and 30 should be con tinuously programmed Note The remote program code K can not be used while the self test is performed Besides if K is used when the measure ment data is provided this data will be lost 3 64 Figure 3 36 Sample Program 4 Using 9825A 9835A Section 111 Figrue 3 37 Sample Program 5 Description This program enables remote control and 41408 is set to HSI High Speed 1 function ties is a data output program when the This program has three capabili 1 Control of the 41408 HSI function via HP IB 2 High speed I
33. D AS ILLUSTRATED IN FIGURE AT RIGHT MICRO SWITCH CONTACTS ARE LOW RE SISTANCE CONTACTS HOWEVER THIS RESISTANCE INCREASES WITH TIME TO CLEAN CON TACT DRIVE A CURRENT OF 0 1 TO TA THROUGH CONTACT Va A OPEN AND CLOSE CONTACTS ONCE OR TWICE THE HEAT AND voo Oo va ARCING WILL CLEAN CONTACTS MENS e INPUT OUPUT A WARNING DO NOT USE 16055A WITH HP MODEL 16054A CONNECTION SELECTOR A HAZARDOUS VOLTAGE MAY EXIST ON LOW LEAD TERMINAL EVEN IF 16055A LOW LEAD CONNECTION SELECT SWITCH IS SET TO GND POSI TION WHEN 16054A LOW LEAD SELECT SWITCH IS SET TO VA OR VB POSITION Figure 3 17 I V Function Operating Instructions sheet 2 of 4 etree Pako S Be Hs d 3 26 T al 41408 Section III E vod Figure 3 17 3 Turn 41408 ON 4 At turn on Self Test of 41408 is performed automatically refer to paragraph 3 5 Note The 41408 requires a one hour warm up time to satisfy all specifications listed in Table 1 1 5 The 41408 is automatically set as follows FUNCTION oooncooroonrarancocnnacaro no I Y RANGE ica aasa aw coe de AUTO Lower Limit of AUTO Mode 107 7A INTEG TIME cc a ax INT EIUTER orar es haad ANAY ON A edes ep INT A cce be pe PIER BASA KG SEE T Us P e ced c ete ernie ro OFF PARAMETER all parameters are O I ZERO OFFSET ooomooommmooo Mom O fA C ZERO OFFSET cc cewcevedeccssteesrwente O pF VA CURRENT LIMIT csccseceee
34. LED lamp will flash When the I RANGE is set to MANUAL the meas urement range will not change even if the measured current changes If the DOWN 9 or UP 9 key is pressed while I RANGE is set to AUTO the I RANGE will change to MANUAL and the measurement range will change accordingly If the internal measurement circuit is saturated when I RANGE is set to MANUAL MIENNE wilt be displayed on the I C DISPLAY or if the measured value is over 1999 counts will be displayed on the I C DISPLAY Ranging times the time the instruments takes to change from one range to another are given in Table 1 2 6n Laman minamana nam PAA AA tels T Meme AN amp tg an au aman ae ment interval Section III Paragraphs 3 18 to 3 22 3 18 Integration Time and Data Output 3 19 The raw current measurement of the 4140B pA Meter section is made by making suc cessive approximations between the reference voltage using a high speed D A converter and a voltage proportional to the measured current This raw current measurement is syn chronized with the Tine frequency Thus the raw current measurement interval of the 41408 is 10 8 3 ms at 50 60 Hz line frequency and this measurement continues from the time the 41408 is turned ON until it is turned OFF dig These raw current measurement data are itally integrated and this result is output to the I C DISPLAY The number of the raw current measurem
35. Mode 4140 Table 1 1 E Table 1 1 Specifications sheet 7 of 2 Other Accessories Recommended Stock Parts Descriptions HP Model Part Number HP IB Cable 0 5m 10631D Im 10631A 2m 106318 m 10631C Triaxial Connector Female 1250 0687 1250 1413 16053 24001 Male 16053 24002 BNC Connector Female 1250 1279 l Male 1250 0408 16055A Accessories Connection Plate with Alligator Clip Connection Plate with TO 5 Socket lOpins Alligator Clips 5ea Connection Leads for TO 5 Socket 5ea 16055 65001 16055 65002 16055 65003 16055 65004 TO 5 Socket 8pins 1200 0238 TO 5 Socket 10pins 1200 0239 TO 5 Socket 12pins 1200 0240 paaa m annaa MS rc Triaxial Cable approx lm 16053 61002 BNC BNC Cable approx 1m 16053 61003 Connection Plate for the 16053A 16053 61001 l wode 41408 Section I Table 1 2 Table 1 2 General Information sheet 1 of 3 CURRENT MEASUREMENT Typical Response time 0 90 FILTER OFF AE Measurement Range CS opr Range A TE 2pF res lt 600ms 1071 to 1005 107 ms PE m capacitance value of test leads fixtures When FILTER is ON add 60ms at 50Hz or 50ms at 60Hz Common Mode Rejection Ratio 212048 lt 2 counts Current Measurement Accuracy INTEGRATION TIME High Speed D RANGE A FILTER sHORT T MEDIUM LONG anal sal iu 40 50 Sa dii T
36. O control between the 41408 and controller via HP IB 3 Data processing for the 4140B HSI function via HP IB Note Data output interval of the HSI function is quite short 2 5 to 10ms Therefore general 1 0 programming 98254 wrt red 98354 OUTPUT ENTER can not be used Only high speed I O programming can be used for the HSI function High speed I 0 programming with the 9825A and 9835A is slightly different 7 A sample program for HSI is given below More specific infor mation for high speed I 0 programming with the 9825A or 98354 i is provided in the 9825A or 9835A programming manuals 9825A Program 0 ent Number N 1 l buf 4140B 3N 1 3 2 2 wrt 717 F4 3 3 tfr 717 41408 3N 1 4 rdb 41408 S 5 Ft T 76 3462 f2 0 c for Tr to N rdb 4140B R 5 rdb 41408 H Ps Co YOO Qn 7 9 rdb 4140B oL 8 10 ior shf H 8 L C 9 11 wrt 16 1 C 1000 E R A 12 next I end Figure 3 37 Sample Program 5 Using 98254 9835A sheet 1 of 2 Section III MUST ido Figure 3 37 l 9835A Program 2 20 OUTPUT 717 F4 3 1 50 ENTER 717 BFHS 3 N 1 NO FORMAT AS 4 60 S NUM AS 1 1 10 OPTION BASE 1 E 20 INPUT Number N 0 30 DIM AS 1000 l 5 l 70 IMAGE D DDD AA DD 80 FOR I TON NE 90 R NUM A 3 1 1 2 3 1 1 2 6 l 100 HENUM AS 3 1 1 3 3 1 1 3
37. P IB 2 Auto sweep of I V or C V measurement of the 41408 via HP IB 3 Data output from the 41408 via HP IB 9825A Program 0 dim AS 100 30 1 1 wrt 717 F3RA112A181L2M3 2 wrt 717 PS 1 1 PTI 1 PE INPHT PVI PB 50 3 wrt 717 WT 4 xl 5 red 717 A I 6 if AS 1 2 2 L1 1 1 1 3jmp 2 7 for J to I 8 prt AS J 9 next d 10 end 9835A Program 10 DIM A 100 30 1 20 OUTPUT 57 F3RAT12A181L2M3 30 OUTPUT 717 PS 1 1 PT1 1 PE TNPHT PVI PB 50 40 OUTPUT 717 Wl 50 BO 60 I 1 1 70 ENTER 717 AS I 80 IF AS I Y2 2 L THEN 60 2 90 FOR J 1 TO I 100 PRINT AS J 110 NEXT J 120 END 1 Dimensions a string variable array that is larger than the number of measurement points 2 When the 41408 is set to AUTO SWEEP the second byte of last data is refer ot paragraph 3 89 Figure 3 35 Sample Program 3 Using 9825A 9835A sheet of 2 3ectlun aia Mode Au Figures 3 35 and 3 36 ng The same results can be obtained by using the following program Lines 1 and 6 or 20 and 80 have been altered to allow use of the SRQ Status Byte 9825A Program 3 wrt 717 F3RA1I2ATB1L2M3D4 bi IC bit 2 vds 717 NG Os p 1 gt I jmp 1 SeA Program 20 OUTPUT 717 F3RA112A181L2M3D4 75 STATUS 717 A 80 IF BIT A 2 0 THEN 60 First bit of the 4140B output data space just after the SRQ Status Byte is output to the controller may be lost Also the Status
38. PERATION AND SERVICE MANUAL 4140B pA METER DC VOLTAGE SOURCE Kin HEWLETT PACKARD GOrly dii Table of Contents Section Title Page I GENERAL INFORMATION oooomooooooc 1 1 1 1 Introd cbtl0nl sc KA NA 1 1 Jed Description vex xn esses 1 1 dy Specification rio 1 2 1 11 Safety Considerations 1 2 1 14 Instruments Covered by Manual 1 3 o LAP tals 1 21 Option 907 908 or 909 1 13 1 23 Option 910 Extra Manual 1 13 1 25 Accessories Supplied 1 13 1 27 Accessories Available 1 13 TI INSTALLATION n AA are os 2 1 delo INTPOCUCTI N ar 2 1 2 3 Initial Inspection ccc exon ma 2 1 2 5 Preparation for Use 2 1 2 6 Power Requirements 2 1 2 8 Line Voltage and Fuse Selection waa kpa EXE XE US 2 1 2 10 Power Cable vovv yr RS 2 3 2 12 Operating Environment 2 3 2 15 Installation Instructions 2 3 2 17 Installation of Options 907 908 and 909 2 3 2 19 Storage and Shipment 2 4 2 20 Environment s ssesseseo 2 4 2 22 Packaging gh ate UV ed 2 4 TIL OPERATION aset a 0 e 3 1 3 1 Introduction 44 ite ba na 3 1 3 3 Panel Features eo eren 3 1 Saba Self TeSt eua rack Ce are aga del 3 8 Initial Control Settings 3 8 3 10 Measurement Function 3 8 3 12 pA Pico Ampere Meter SECTION cqdqus cad esce ev bw 3 9 3 14 pA Meter Display 3 9 3 16 Current Measurement Ranges 3 9 3 18 Integration Time and Data O
39. RCE KA AIROB pA EN NISLET Scene ag C PAMPYT P OUTPUT 0 6 00 RET 6 Vu PUER DOO i VA Lamps These Tamps indicate Hi md value of the VS DISPLAY s is VA or VB Usually VA lamp is illumi nated When VA is set to OFF and VB is set to ON VS Mode key 29 VB lamp is illuminated VS Voltage Source voltage value including decimal point and sign is displayed as a maximum 3 1 2 digit decimal number from 0000 to 1900 the number of digits change depending on instrument control set tings Usually output voltage VA value 15 displayed When VA is set to OFF and VB is set to ON VS Mode Key D output voltage Vp value is dis played In addition when Y OUTPUT lamp is not lit this display can be used to display parameter values If the input parameter value exceeds its limit value and overflow annunciation appears If the 4140A is swept at in correct parameter settings an illegal annunciator appears Display Output Figure 3 1 Front Panel 3 4 ALO TALE 1 A ka m ZERO m B H B x H Mode 4 Dn ID These Da in unit Indicator Tamps dicate unit of VS AA LONG fol lows Br Output Voltage V or VB START V STOP V STEP V rm s HOLD TIME STEP DELAY TIME V s dV dt pF Cox Q V OUTPUT Lamp When the DC Voltag Source is operating this lamp is lit 9 CURRENT LIMIT Lamps and Select Keys These lamps indicate output curren limit of VA
40. RT V STOP V STEP V HOLD TIME STEP DELAY TIME sr iA a START V STOP V STEP V HOLD TIME dV dt Input value for Vp when VB will also be used Set current limit values for VA and VB with CURRENT LIMIT Select keys refer to paragraph 3 39 VS Section Operating Instructions when FUNCTION is set to I sheet of 2 Section III Figure 3 12 10 Start voltage output with following keys for each VA setting refer to paragraph 3 35 ne o9 6 9 9 ot 3 B n 3 o4 Pot 9 o 9 9 9 99 9 9 t o 9 3 e o3 o o 9 o9 Y d 5 D auto stan Auto Sweep 5 Manual Sweep divine a e fe eGR e 06 Ras ue s 11 During the time that VS section is outputting voltage the Y OUTPUT lamp is lit Note VS DISPLAY will display VA output voltage during the time that VS section is outputting voltage exept when VA is set to OFF But when VB is set to both VA and VB sources are outputting voltages at the same time VB output voltage can be monitored with VB key The equivalent circuit of the VS Voltage Source section in the 4140B is shown below O VA OUTPUT connector Ya OUTPUT connector WARNING 100V MAX MAY EXIST ON THE CENTER CONDUCTOR OF BNC FEMALE CONNECTORS OF VA AND VB 12 IF VA is set to Auto Sweep VA and Vp are automatically set to abort con dition OV when auto sweep is completed When VA is set to Manual Sweep 2 VA and VB can be
41. T sul 1 INPUT rri Va rti Va 1 l Jar E da EN Vida til i SERE at 1p A Ei A l lt ii ab cp 160834 Hi 160532A T H Y pi EX dp db E t 7 E ay il i rapa ii pj pU III gs EN ili 3 dH Li rT GNO VA Va HIGH LOW oie 4 E A i m RA o Isotaror Isotoror 7777 ZA pa Stage Stage i E MG mi c E Shielded Box Shielded Box j C3 Figure 3 28 DUT Connections on Wafers at the Prober Station sheet 2 of 2 Section III B pen te Paragraphs 3 65 and 3 66 bos ANNUNCIATIONS Ke y 4 a rf control key parameters are set in jy or when the measured current value correct ione upper range limit the 4140A S one of the annunciations given in displ 7 If one of these annunciations is Table follow the correction procedures display d in Table 3 7 In addition if one descr DC voltage sources VA or VB exceeds of terrent limit its CURRENT LIMIT lamp 1 flash Table 3 7 4140B Annunciations Sheet 1 of 2 rc DISPLAY Annunciations E E Indicated Condition and CORRECTION PROCEDURE Control Settings Indicated Condition Measured current value ex ceeds upper range limint Control Settings 1 FUNCTION I or I V 1 1 Set I RANGE to AUTO I RANGE 3603 MANUAL 1 2 If a range hold measurement is being made set maximum range for auto range measurment as in step 1 1 above a i i 2 FUNCTION sesse C V 2 1 Set I RANGE to AU
42. TO I RANGE MANUAL 2 2 If a range hold measurement is being made refer to paragraph 3 53 ur 3 I RANGE aia AUTO 3 1 Change measurement condition The internal measurement Perform the same correction procedure circuit of the pA Meter used for MA section is saturated Indicated Condition Change measurement condition ex set dv dt to lower value Calculated capacitance val ue exceeds the upper limit 1999pF Increase the value of Cox Indicated Condition Calculated capacitance val ue in percent exceeds its upper limit 199 92 o SAT Section III Mode an Y Table 3 7 A Table 3 7 41408 Annunciations Sheet 1 of 2 2 VS DISPLAY Annunciations Indicated Condition Correction Procedure G E Parameter value exceeds up Reset parameter value Refer to Table per limit 3 4 AA VA is swept when parameters Reset parameter values Refer to Table LE are incorrectly set 3 4 3 48 Section III p Paragraphs 3 67 to 3 70 Be Output can be used to output iti 5 88 e ME tha BA Meter and DC Voltage oo i a Pts i gpatog C2 an in Tables 3 8 and 3 9 When IB Refer to paragra hs 3 71 th t gurc pa is connected to an X Y Recorder 3 100 for more Specific infor eon a pe AMD Jo 7047A the system can be used on the HP IB es I V C V curves The procedures for i Na to tihe 41408 and an X Y Recorder ar
43. able 1 1 Specifications sheet 1 of 7 Measurement Functions I V C V and I I For independent operations as universal pA Meter Programmable Voltage Source l F I V I V characteristic measurement using staircase ramp wave C V Quasi Static C V characteristic measurement using ramp wave Voltage Source Two separate sources VA and VB VA 100V function generator programmable source VB 100V programmable DC voltage source Function 1 V A Voltage Sweep Auto pause available Manual E i paaa cueedarm20p Timer T2 h 0 ur ma aaa go GENERAL Operating Temperature O C to 40 C Relative Humidity lt 70 at 40 C Power 100 120 220V2108 2401 1085458 50H2 60Hz1455 max 135VA with any option Dimensions 426mmW x 177mmH x 498mmD Weight Approx 14 4kg Accessory Furnished 16053A Test Leads 1 set 16055A Test Fixture EJ H Dx El P p H 1 4140B Section I del Table 1 1 Table 1 1 Specifications sheet 2 of 7 CURRENT MEASUREMENT Display 3 1 2 digit 99 97 overrange Measurement Range 0 001x107 2A 1 999x107 A 11 ranges auto manual range selection Measurement Accuracy Integration Time Sr Measurement Integration a Accuracy 320 eee of rdg counts 23 C 5 C lt 70 humidity integration time LONG filter ON at 50Hz line frequency x 5 6 at 60Hz operation Tero offset is performed
44. al of the pA Meten should be guarded bv the LOW terminal Y at a point near the DUT 3 The HIGH terminal of the pA Meter ge TE the wafer at the prober station show be sufficiently isolated 4 Figure 3 28 shows various connection method Y for wafers at the prober station i E XE TC i 1 L3 B i 1 Y c B LEE 4 i Apa sd ndo tse eme HO y He a H a E AA s i MEL ba E P DA Y wg a Section III pes Figure 3 28 oth measurement terminals are on the Wafer Surface qi 8 1 2 Ungrounded DUT Measurement 1 b Grounded DUT Measurement Connection Connection va or VB Va or VB Wiring 4140B8 Ki D INPUT CTA Va Va t 1 RR ipi NG d 1 E ila _ 16054A Ni Ej ap ria VB f ar i i d db il sossa li sj CD Cp i EH i tds 144 i le ai ih VA Va HIGH l ow ZZ i 722 Water papi d Mani i isolator NG 4 Lamay FLA fsotetor ee s 109ge T p Shielded Box paa Shieided Box Figure 3 28 DUT Connections on Wafers at the Prober Station sheet 1 of 2 3 45 Section 111 Model ni Figure 3 28 i 2 One of the measurement terminals is on the Substrate 2 a Ungrounded DUT Measurement 2 b Grounded DUT Measurement Connection Connection Va or V8 VA or v8 Wiring Wiring Va va 1 INPUT b LT va aa BE l Fart i _16054A 160544 FT Fr 1 5 j i o i e i INPU
45. ata Output 3 52 Timing in C V measurements is automati cally synchronized between the pA Meter and the accurate ramp wave N by the VS section to assure that the measure ments are taken at the correct times Output voltage of the ramp wave changes continuously at a specific ramp rate dv dt so that dig ital integration for each voltage step is done using the raw current measurement data before and after VA goes to its step voltage in equal periods above and below the step E voltage as fixed by the integration time Therefore the relationship between the C V measurement and its data output to the IC DISPLAY and VS DISPLAY will be as shown in Figures 3 18 and 3 19 Note When the raw current measurement data Y for digital integration is short an invalid data annunciation SR a is displayed on the I C DISPLAY This annunciation always appears just i after changing FUNCTION after a pa rameter s is changed or at the 2 START V If the STEP V is set to a ko small value when the ramp rate dV dt is set to a fast value and the inte 7 gration time is set to LONG this an J nunciation also appears at several Section III Paragraphs 3 49 to 3 54 step voltages just after START V In a C V measurement lesser significant digit data of the calculated capaci tance is displayed when the number of significant digits for the current measurement data is Jess than the total digits of the
46. be operated as a component of a measure ment system Rack mounting information for the 41408 is presented in Figure 2 3 Kit Part Number Parts Included Part Number JE 2 13 Temperature The instrument may be F operated at temperatures from 0 C to 2407C Handle Kit Front Handle 5060 9900 2 5061 0090 Trim Strip 5060 8897 2 2510 0195 8 9 525mm Rack Flange Kit Rack Mount Flange 5020 8863 2 5061 0078 8 32 x 3 8 Screw 2510 0193 8 9 525mm Rack Flange 4 Front Handle 5060 9900 2 Handle Kit Rack Mount Flange 5020 8875 2 5061 0084 8 32 x 3 8 Screw 2510 0194 8 15 875mm 1 Remove adhesive backed trim strips O from sides at right and left front of instru ment 2 HANDLE INSTALLATION Attach front handle to sides at right and left front of in strument with screws provided and attach trim stripG to handle 3 RACK MOUNTING Attach rack mount flange 2 to sides at right and left front of in strument with screws provided 4 HANDLE AND RACK MOUNTING Attach front handle 3 and rack mount flange 5 together to sides at right and left front of in strument with screws provided 5 When rack mounting 3 and 4 above re move all four feet Figure 2 3 Rack Mount Kit 2 3 aa E i A LI Paragraphs 2 19 to 2 24 2 19 STORAGE AND SHIPMENT 2 20 Environment 2 21 The instrument may be stored or shipped in environments within the following limits Tempera
47. calculated capac itance refer to Figure 3 20 In an I C DISPLAY the lesser significant digit data is represented by a small zero figure to differentiate it from the more significant digit which is represented by a large zero as shown in Figure 3 4 3 53 C V Measurement Range 3 54 For a C V measurement the 4140A pro vides two measurement ranges 0 0pF4199 9pF in 0 1pF steps and 200pFu1999pF in IpF steps Range changing is done automatically In ad dition a current measurement range which is an actual measurement range is provided as in ID or I V measurements refer to paragraph 3 16 If the I C DISPLAY count is over 1999 counts when the current measurement range is held the I C DISPLAY displays an Fb annunciation as in I or I V measurements If the calculated capacitance value is over 1999 pF the I C DISPLAY displays an annunciation If the calculated capacitance value in percent is over 199 9 when the I C DISPLAY is set to percent display the I C DISPLAY displays an annunciation The relationship between the calculated ca pacitance value and current measurement ranges are shown in Figure 3 20 To make C V measurements on the most suitable current measurement range use the following proce dures 1 Set the 41408 for C V measurement re fer to Figure 3 23 2 Set FUNCTION to I V 3 At this time the 41408 pane control functions are automatically set as follows refer to paragraph 3
48. d The test pro dure for the specifications are covered Section IV Performance Test Table 1 2 lis general information General information not specifications but is typical charac istics included as additional information f the operator When the 4140B pA Meter Voltage Source is shipped from the rd it meets the specifications listed in T 1 1 A l 1 11 SAFETY CONSIDERATIONS 1 12 The Model 41408 pA Meter DC Volt Source has been designed to conform tog safety requirements of an IEC Intemati Electromechanical Committee Safety Clas instrument provided with a protective ea terminal and is shipped from the un a safe condition tion cautions and warnings which mus followed by the user to ensure safe oper and to maintain the instrument in a saf dition bU 3 KA EN E o A f m p 1 13 This operating manual contains mus SAAN et i pon 1 E UNS A Gum PP c EU a we kaz 1 15 tth gt W 5 aid t E Q o I L 1 wO arts Ee are the five digits f the same 4 changes only when a instrument B sequentially and B strument E to instruments E es listed under SERIAL NUMBERS on the ti E tle page Model 41408 44 INSTRUMENTS COVERED BY MANUAL plate is attached to A serial number The serial num e rear of the instrument E ber is in the form XXXXJXXXX tt is in the first four digits and the serial prefix an
49. d Se o VB Mode lect Keys These lamps indicate VS mode settings as follows DC DC voltage is VA Mode 3 OFF Vp is not operating J Single Ramp Wave Output volt age is changing continuously dv Select keys select VA and dt from start voltage to stop accord with following table voltage X Double Ramp Wave Output volt age is changing continuously dv dt from start voltage to stop voltage Successively output voltage is returned to start voltage at same ramp rate x Single Staircase Wave Output voltage is changed step by step in step voltage fashion from x This mode is not used start to stop voltage Initial Settings l Pis Double Staircase Wave Output V OUTPUT Connectors These connectors voltage is changed in step by are BNC female connectors to connect step voltage fashion from start unknown samples test leads or test to stop voltage Successively fixtures output voltage is returned to start voltage by same step volt oe age DC DC voltage is outputted E OFF VA is not operating Figure 3 1 Front Panel Features sheet 5 of 5 000000 Figure 3 2 Rear Panel Features sheet 1 of 2 3 6 Enge 0408 Section 111 Figure 3 2 O FILTER TIME CONST Select Switch This 4 PEN LIFT Connector PEN LIFT control switch selects filter rise time OFF signal for an X Y recorder connected to 0 22s or 1s for optimizing analog out the 4140B i
50. d the last are the suffix The prefix is for all identical instruments IT change is made to the The suffix however is assigned is different for each in The contents of this manual apply with the serial number prefix 1 16 An instrument manufactured after the printing of this manual may have a serial f number prefix that is not listed on the title page This unlisted serial number prefix in dicates that the instrument is different from those described in this manual The manual Section I Paragraphs 1 14 to 1 18 for this newer instrument is accompanied by a yellow Manual Changes supplement This sup plement contains change information that explains how to adapt the manual to the newer instrument 1 17 In addition to change information the supplement may contain information for cor recting errors in the manual To keep this manual as current and accurate as possible Hewlett Packard recommends that you periodi cally request the latest Manual Changes sup plement The supplement for this manual is identified with the manual print date and part number both of which appear on the manual title page Complimentary copies of the supplement are available from Hewlett Packard 1 18 For information concerning a serial number prefix that is not listed on the title page or in the Manual Changes supplement contact your nearest Hewlett Packard office 1 3 Section i luci Tira Table 1 1 E T
51. damage claims preparations for using the 41408 and packaging storage and shipment 2 3 INITIAL INSPECTION 2 4 Inspect the shipping container for dam age If the shipping container or cushioning material is damaged it should be kept until the contents of the shipment have been checked for completeness and the instrument has been checked mechanically and electrical ly The contents of the shipment should be as shown in Figure 1 1 procedures for check ing electrical performance are given in Section IV If the contents are incomplete if there is mechanical damage or defects or if the 41408 does not pass the Performance Tests notify the nearest Hewlett Packard office or the cushioning material shows signs of stress notify the carrier as well as your Hewlett Packard office Keep the shipping 100V OPERATION TIQOY w 220V OPERATION 100V 220V 220V J J GOV An 20V 240V OPERATION 100V peel i20V If the shipping container is damaged ZA 240V materials for carrier s inspection The HP office will arrange for repair or replacement at HP option without waiting for claim set tlement WARNING TO AVOID HAZARDOUS ELECTRICAL SHOCK DO NOT PERFORM ELECTRICAL TESTS WHEN THERE ARE SIGNS OF SHIPPING DAMAGE TO ANY PORTION OF THE OUTER ENCLOSURE COVERS PANELS OR METERS 2 5 PREPARATION FOR USE 2 6 Power Requirements 2 7 The 4140A req
52. displayed on the I C DISPLAY for approximately second 3 7 When 41408 is set to Self Test mode by the SELF TEST key the 4140B has an addition al Self Test function a Control Key Test If each control key s normal the I C DIS PLAY displays an octal code as shown in Fig ure 3 3 when a control key is pushed 3 1 Figure Su 14 QD LINE ON OFF Switch Turns instrument 3 2 on and readies instrument for measure ment l HP IB Status Indicator and LOCAL Key LED Tamps for SRQ LISTEN TALK and REMOTE indicate status of interface be tween the 41408 and HP IB controller LOCAL key enables front panel contro instead of remote contro from HP IB line Refer to paragraphs 3 71 thru 3 100 ZERO Offset Key This key is used to compensate for pA Meter offset errors Current or capacitance value on I C display G is stored when button is pressed The stored offset value is Subtracted from subsequent measurement values Refer to the paragraph 3 23 Trigger Lamp Turns on in synchroniza tion with measurement or data output on I C DISPLAY 5 When FUNCTION 8 is Set to I and I TRIG is set to INT the lamp flashes repeatedly at approxi mately 200ms Mode q maps q i O I C Display Current or capacitance value including decima point and sig is displayd as a maximum 3 1 2 digi decimal number from 0000 to 1999 I the measurement value exceeds fuli co
53. e XB udis esed cc a ull ANG Gn Wala G s OFF PARAMETERS t all parameters are 0 The paragraphs that follow give basic infor SELF TEST Pr OFF mation on the PA Meter and DC Voltage Sourc 0 25002 E AN A ss 0 when FUNCTION is set for I I V and C Y meas C ZERO OFFSET Kd Ve ud sa oe DA 0 urement CURRENT LIMIT Ne da Qu 100uA Additionally when FUNCTION is changed pane control functions are automatically set as in Table 3 1 Table 3 1 Automatic Contro Settings Model 41408 2 12 pA PICO AMPERE METER SECTION 4 13 The pA Meter section operates as an in vependent highly stable universal pA Meter 710 A max when FUNCTION is set to I When gt UNCTION is set to I V accurate current voltage measurements can be made with the Cra ircase or ramp wave of the DC Voltage Source the timing between the pA Meter and nc Voltage Source can be automatically syn chronized When FUNCTION is set to C V ac curate I V measurements are made using the ramp wave nd capacitance is calculated from the measured current value and the ramp rate dV dt the result is displayed on the I C DISPLAY Independent operation as a univer sal pA Meter is described in paragraphs 3 12 thru 3 26 These paragraphs should be read even if only I V or C V measurements are to be made Instructions for I V measurements are given in paragraphs 3 43 thru 3 48 For C V measurements paragraphs 3 49 thru 3 60 should be read
54. e given Ka y f a Figure 3 29 2 Control signals for X Y Recorder pen 369 Control Capabilities for Analog Output lift TTL controls 0 The Analog Output has three capabili When the X Y Recorder is provided with 7 uickly and clear pen lift TTL controls pen lift can be E us forme rss 3 is sanaili es done automatically by TTL signals output 5 tracing from the PEN LIFT connector on the rear are of the 41408 This TIL signal is High PEN UP when Y OUTPUT lamp is lit and Low PEN DOWN when V QUTPUT lamp is not 1 Control of pen position on the X Y Re Ht corder With control keys LL ZERO and UR the 41408 is able to control the X Y recorder d pen position as in Table 3 10 Table 3 8 Analog Output Data at I C OUTPUT Connector EE 0 0 199 9 0 000 9 995 5mV count Table 3 9 Analog Output Data at VA OUTPUT Connector Outputted Va Voltage V Analog Output Data V 0 00 10 00 0 000 1 000 10 1 a 100 0 1 01 210 00 1OmV count 3 49 Mode rigure 3 29 T can be used to reduce the noise allowing I V C V Curves to be trad 3 Low pass filter for reducing noise on Analog Output data smoothly the filters apply to p If the analog data output includes con and I C OUTPUT data Filter rig siderable noise and the I V C V curves can be changed with FILTER TIME CONS are strong curves the low pass filters lect switch on the rear panel provided in the
55. e pA Meter of 4140B will automatically display measured value of un known Note The display value of a measurement On the 10 2A range may be unstable immediately af ter connecting unknown current Source because of the leakage currents described above Note If the approximate value of the unknown cur rent source is known the ranging time can be eliminated from the measurement time by set ting the current measurement range to hold on the desired range by using the DOWN or UP 8 keys Measurement time can also be reduced by setting the lower limit of AUTO mode to prevent changing down to unnecessary lower ranges Note When the 41408 is turned ON an internal FILTER for rejecting ac noise is set to ON As shown in Table 1 2 when this FILTER is ON response time and ranging time are 60ms for 50Hz line frequency or 50ms at the 60Hz longer than when the FILTER is OFF To re duce response time and ranging time turn the FILTER OFF When the FILTER is OFF the LED amo OT the selected INTEG TIME key will flash The equivalent circuit of the pA Meter section in the 4140B is shown below INPUT connector Figure 3 6 pA Meter Section Operating Instructions when FUNCTION is set to I sheet 2 of 2 Section III Paragraphs 3 27 to 3 32 3 27 VS VOLTAGE SOURCE SECTION 3 28 The VS section of the Model 41408 oper ates as two independent programmable voltage sources Va and V8 One of the pr
56. ent data selected for digital integration 2 256 is fixed by the INTEG TIME select key on the front panel The in tegration time of the 4140B p Meter section is the product of the number of raw current measurement data selected for digital inte gration and the current measurement interval The 4140B has nine integration times as given in Table 3 2 which are selected by measure ment r nge and unknown condition Table 3 2 Current Measurement Integration Times Integration Time ms Range A Short Medium 107 107 20 16 7 80 66 7 107 80 66 7 320 266 7 io 160 133 3 640 533 3 2560 2133 3 Note at 50 60 Hz line frequency 320 266 7 1280 1066 7 ma N 3 20 When FUNCTION is set to I and I TRIG is set to INT digital integration is made using raw Current measurement data already avail able when the I Trigger is received as shown in Figure 3 5 Therefore I data Output is completed as soon as the 1 Trigger is re ceived The I Trigger interval requires only 10 8 3 ms which is the raw current measure and is not related to integra tion time The relationship between integra tion time and the data output when FUNCTION Ts set to I V or C y is described in para graph 3 47 or 3 53 Model 4 3 Note ae When the I TRIG is set to EXT MAN digital integration is made using the raw current measurement data after the trigger signal is re ceived Therefore in t
57. ezeereerzee JU SN Vg CURRENT LIMIT eee metn 107 A 6 Confirm that the I C Data Output Trigger lamp is flashing 7 Select desired integration time with the INTEG TIME keys on front panel refer to paragraph 3 18 8 Connect nothing to 16055A Open 9 When using the 10777A measurement range set L C DISPLAY to 0 00 x 107 A with ZERO offset key refer to paragraph 3 23 10 Set FUNCTION to I V 11 Select desired current measurement range with 1 RANGE keys refer to paragraph 3 16 12 Select desired VA and VB output modes with VS Mode Select keys on front panel refer to paragraph 3 31 13 Input values for VA operating parameters depending on selected VA output mode as follows refer to paragraph 3 33 a Fi START V STOP Y STEP V HOLD TIME STEP DELAY TIME Kos NS START Y STOP V STEP V HOLD TIME dV dt 14 Input value for VB when VB is also to be used 15 Select current limit values of VA and VB with CURRENT LIMIT Select keys keys refer to paragraph 3 39 l 16 Select Low lead connection of PA Meter section in the 4140A with 16055A LOW LEAD CONNECTION Select switch depending on kind of measurement Figure 3 17 I V Function Operating Instructions sheet 3 of 4 3 27 B ki SECTION 111 Mode Figure 3 17 17 Connect DUT to 160554 with alligator clips kind of measurement 18 Start C V measurement with following keys for each
58. f 2 no 3 51 Section III Paragraphs 3 71 to 3 80 3 71 HP IB INTERFACE 3 72 The Model 41408 can be trolled by means of the HP IB The HP IB is a carefully defined instrumentation inter facing method that simplifies the integration of instruments and a calculator or computer into a system remotely con Note HP IB is Hewlett Packard s implemen tation of IEEE Std 488 1975 Standard Digital Interface for Programmable Instrumentation 3 73 Connection to HP IB 3 74 A 41408 may be connected into an HP IB bus configuration with or without a control ler e g with or without an HP calculator In an HP IB system without a controller the 4140B can function as a Talk Only unit refer to paragraph 3 79 3 75 HP IB Status Indicators 3 76 The HP IB Status Indicators are four LED lamps on the front panel These lamps show the status of the 4140A in an HP IB sys tem as follows SRQ SRQ signal on HP IB line from 41408 refer to paragraph 3 95 LISTEN The 41408 is set to be listener TALK The 4140B is set to be talker REMOTE The 41408 is remotely controlled 3 77 LOCAL Key 3 78 The LOCAL key disables remote contro from HP IB control and enables setting meas urement conditions at front panel controls pushbutton keys REMOTE HP IB status indi cator lamp turns off when LOCAL key is de pressed This function can not be used when the 41408 is set to local lockout status by contr
59. formation for panel displays 2 controls is covered starting in paragraph pa 3 5 SELF TEST 3 6 The 4140B has the following self test Fun A Program Memory Test 1 2 pA Meter Test 3 A Display Test These tests are automatically performed each time the LINE button is pushed to turn the instrument on In addition these tests are enabled when SELF TEST key is pushed Under this latter condition the tests are per formed repeatedly while SELF TEST lamp is lit These tests can also be enabled by a remote program via the HP IB 1 Program Memory Test During the Self Test mode the instru ment checks the internal program memo ry If an abnormality is detected the instrument displays one of nine error messages E E 9 Seven of the error messages E E 7 indicate an abnormality in the ROM Read Only Memo ry and the other two error messages E 8 or E 9 indicate an abnormality in the RAM Random Access Memory Suffix numbers are the same as those for ROM or RAM DOPO pA Meter Test This test verifies basic operation of the instruments pA Meter section If an abnormality is detected the instru ment will display an error message E P on the I C DISPLAY 3 Display Test During the Self Test mode all front panel indicator lamps and all segments of numeric and character displays are illuminated When the instrument is turned on the current setting of the HP IB address switches is
60. he Model 41408 consi of y Padi ASH ux T EBEN gp ec 1 I C Measurement Value and VA Qu Voltage 2 Setting Parameter Output timete 3 Key Status 4 Service Request Status Byte Vries a oett in the following several paragraphs eac output data form is described zt 3 89 I C Measurement Value and VA Output Voltage ve ut sane 3 90 Two output formats are possible adl the 41408 i e d wel Rd a Format A To output either the L C measurement value or Ya output voltage in a continu g ous string the delimiter form bit TAI control switch Bit 6 on the rear pane is set to 0 see paragraph 3 79 h this mode data is output in the follow E ing format XXEN NNNE NN AENNN NN CR CD QXeX3 4 Ke 17 8 Note The 41408 is set at the factory for output Format A b Format B To break the data into two groups limits line length for output to certain pe ripherals such as the HP Model SEE Thermal Printer the delimiter form biti on the rear panel is set to 1 see para graph 3 79 All data is then output in the following format HI XXEN NNNE NN CR CB i QXeX3 a 8 po AzNNN NN CR CD 6 7 8 ANA aya etes a A ma HR ai en 1 Space 2 Date Status N Normal Data Q Over Flow x No Data only measurements using ramp wave L Last Data only in Auto Sweep Mode 3 I e
61. his case the measurement time from receiv ing the trigger signal to output ting current measurement data is the sum of the integration time and D processing time approximately 3ms 3 21 External Triggering 3 22 The 4140B pA Meter section can be trig gered by an externa trigger signal for cur rent measurement To trigger the 414 externally set 41408 front panel controls follows The external triggering device should be cor nected to EXT TRIGGER connector BNC femal type on rear panel The 4140B can be trig gered by a TTL level Signal that changes f ram HIGH 45V to LOW OV Trigger pulse wi must be greater than lus Triggering w also be done by alternately shorting or with resistance lower than 1000 and opening the center conductor of the EXT TRIGGER connecto to ground chassis Note The center conductor of the EXT TRIGGER connector is normally HIGH no input Note Triggering can be also done by trigger command GET or remote Program code E via the HP IB Refer to Figure 3 33 41408 ac Line o Mam uu o Tr wa Gutput Trigger Ta lst trigger fof Display Previous Measurement Output Data ist Trigger Output Data Section Ill Paragraphs 3 23 to 3 26 i nd Trigger t 3rd Trigger Ta TB 2nd Trigger Output Data 3rd Trigger Output Data fy Integration Time refer to Table 3 2 Ta approximately 200
62. hronized and the calculated capacitance value 0 0 1999pF or percent change 0 02 i 199 95 VS Cox the capacitance of oxide film and the appropriate ramp voltage value are simultaneously displayed Model A 1 7 The 41408 employs certain ril functions which make the best use of th telligence capability of its microprocess r For example its zero offset current capab ity cancels leakage current of test leads fixtures and its zero offset capacitance cz pability cancels stray capacitances of i leads and fixtures for accurate current capacitance measurements The self test pability checks ROM s RAM s displays ind cators and control keys of the 4140B auton ically when the 4140B is turned to ON or Y SELF TEST front panel key is pushed 7i measurement parameters of the 41408 VA VB START V STOP V STEP V HOLD TIME dt STEP DELAY TIME and Cox are stored the 41408 memory and can be used repeatedly 1 8 The 41408 provides Analog Output f can be used to output analog data to an Recorder and to trace I V C V curves T 41408 also provides HP IB Interface for mote control and data output via the J In addition four unique accessories available for making a wide range of unive Sal measurements mE 1 9 SPECIFICATIONS 1 10 Complete specifications of the 2H 41408 pA Meter DC Voltage Source are givens Table 1 1 These specifications are the pe formance standards or limits against whg the instrument is teste
63. ific information on DUT connection is described in paragraph 3 6 Figure 3 23 C V Function Operating Instructions sheet 3 of 3 sodel 41408 Nar DUT CONNECTION 22 The 4140B pA Meter DC Voltage Source he following features that make pA cur pee measurements reliable and efficient re 1 Integration times suitable to the cur rent measurement range and UNKNOWN con ditions can be selected via front panel controls or HP IB programming 2 AC noise can be reduced by digital in tegration moving average technique using the even raw current measurement data synchronized with the line fre quency 3 AC noise can also be reduced by the in ternal filter circuit 4 The 16055A Test Fixture with electro static light shielded hood is provided for measuring general devices VA or VB VA or VB Section III Paragraphs 3 61 and 3 62 However to realize stable low current meas urements at 107A down to 10 A care must be observed in DUT connection to minimize the effects of leakage current in the measurement systsem external noise light etc Figure 3 24 shows measurement errors caused by leak age current g and external noisein The errors can be reduced by employing a LOW guard method where the HIGH terminal the center conductor of the I INPUT connector of the pA meter is guarded by the LOW termina the inner braid of the I INPUT connector as shown in Figure 3 25 The effects of exte
64. ifications listed in Table 1 1 5 The pA Meter section of 41408 is automatically set as follows Figure 3 6 3 12 8 Connect nothing to test leads or to test fixture FUNCTION Vases ade eai Rx pe riw RD I I RANGE egy yd E Vic ea pila We al XE AUTO Lower Limit of AUTO Mode TO 24h A O a Ot LONG R5 PANATA OO ON AA dace PAN INT IS A O O fA 6 Confirm that the I C Data Output Trigger lamp is flashing 7 Select desired integration time with the INTEG TIME key on front panel refer to paragraph 3 18 open 9 When using the 10724 measurement range set I C DISPLAY to 0 00 10 77 A with ZERO offset key refer to paragraph 3 23 Note The measured current at the 107124 range is a very small value 107124 4107 5A There fore any leakage current generated by changing test lead connection test fixture or unknown current source increases the er ror of the measurement at the 107 A range To avoid this condition do a zero offset after the I C DISPLAY has settled allow more than five minutes P Meter Section Operating Instructions when FUNCTION is set to 1 male cable of 16053A Test Lead HP Part No 16053 61002 to INPUT is performed automatically refer to sheet 1 of 2 7 3 del 41408 Section 111 m Figure 3 6 10 Connect unknown current source to the test lead or test fixture Note Specific information on DUT connection is described in paragraph 3 61 11 Th
65. ing In any correspondence refer to instru ment by model number and full serial number E UE gol 41408 Section III Paragraphs 3 1 to 3 7 SECTION 1i OPERATION 31 INTRODUCTION E 12 This section provides the operating in E structions for acquainting the user with the d Model 41408 pA Meter DC Voltage Source In UE structions for panel controls measurement E functions operating procedures self test and option information are included in this section Operating precautions given throughout the text should be carefully ob served WARNING BEFORE THE INSTRUMENT IS SWITCHED ON ALL PROTECTIVE EARTH TERMINALS EX TENSION CORDS AUTO TRANSFORMERS AND DEVICES CONNECTED TO IT SHOULD BE CONNECTED TO A PROTECTIVE EARTH GROUNDED SOCKET ANY INTERRUPTION OF THE PROTECTIVE EARTH GROUNDING WILL CAUSE A POTENTIAL SHOCK HAZARD THAT COULD RESULT IN PERSONAL INJURY ONLY FUSES OF THE SPECIFIED TYPE AND OF THE REQUIRED RATED CURRENT SHOULD BE USED DO NOT USE REPAIRED FUSES OR SHORT CIRCUITED FUSEHOLDERS TO DO SO COULD CAUSE A SHOCK OR FIRE HAZARD CAUTION BEFORE THE INSTRUMENT 1S SWITCHED ON THE LINE VOLTAGE SWITCH ON THE REAR PANEL MUST BE SET FOR THE VOLTAGE OF THE POWER SOURCE OR DAMAGE TO THE IN STRUMENT MAY RESULT 3 3 PANEL FEATURES 3 4 Front and rear panel features are de scribed in Figures 3 1 and 3 2 Description numbers match the numbers on the illustration Other detailed in
66. isplays the following parameter values in like manner to those described above Measuring Current 0 001 x 107 A v 1 999 x 10774 Calculated Capacitance 0 0pF 199 9 pF 200pF 1 1999pF Capacitance in Percent 0 06 n199 9x 3 16 Current Measurement Ranges 3 17 The pA Meter of the 4140B can measure currents from 107 A to 107 A in 11 ranges Each range allows a 99 94 overrange of the 1000 full scale count maximum 1999 counts The 4140B has two range modes AUTO and MANUAL to select the optimum range for the various current measurements When I RANGE is set to AUTO an optimum range is auto matically selected for each measurement If the internal measurement circuit is saturated or the I C DISPLAY count refer to paragraph 3 18 exceeds 1999 the measurement range is automatically changed up If the 1 C DISPLAY count is less than 150 the measurement range is changed down by the AUTO ranging system Also using the following procedure a lower limit for AUTO range can be set 1 Select the desired lower limit using the DOWN or UP key 2 Press the Blue key and then press AUTO This sets the present I RANGE as the lower limit of the AUTO range mode At lower limit the measurement range will not change down even if the I C DISPLAY count is less than 150 Note When range mode is set to AUTO the LED lamp in the AUTO key will be lit If a lower limit other than 1077 A is set this
67. lays ILLE this state is set ir the 41408 receives trigger command when the FUNCTION is set l to I V or C V this state is set l 5 Bit 6 If Self Test is faulty this state is set 6 Bit 8 When the 4140B receives a trigger signal before the last meas urement is completed this state is set When the 41408 provides measurement data while the last meas urement data is being output this state is set Signal bit 5 is independent of bit 7 ROS Signal When DC Voltage Source is operating when V OUTPUT lamp on front panel is lit this State is set Figure 3 31 Status Bytes of the 4140B 3 58 l 41408 Section III Bi kad Figure 3 32 B FA and can not be set by front panel Table 3 14 Accuracy and Data Output controls When the 41408 is set to HSI func interval in HSI Function the I C DISPLAY on the front panel dis tion 1 1 The 4140B outputs current meas Data Output Interval ms play Range A Accuracy p program for HSI function using an HP Desktop P ement data via HP IB as in Figure 3 32 when 107 ma 5 10 no PEDO 5 100 E Fomputer 9825A 9835A is given in Figure 3 37 408 is set to HSI function This output data is the raw current measurement value ES of reading counts at 23 C 8 C lt 70 humidity before it is digitally integrated refer to at 50 60 Hz line frequency paragraph h 3 18 This permits the 4140B in its HSI function to outpu
68. le Functions Measurement Function Current Range Lower Limit of Auto Mode Integration Time I Trig Filter Voltage Sweep Con trol Current Limit Voltage of Va Vg Setting Times and Self Test Data Output Measured Data 1 C and VA Voltage Settings VA VB Setting Times Setting Value of Cox and Front Panel Key Status mam GG CG ee e 98 E A ET 41408 Section I Hodel Table 321 Table 1 1 Specifications sheet 6 of 7 OPTIONS Option 907 Front Handle Kit 5061 0090 Option 908 Rack Flange Kit 5061 0078 Option 909 Rack and Handle Kit 5061 0084 Option 910 Extra Manual ACCESSORIES AVAILABLE 16053A Test Leads furnished with the 41408 One triaxial male triaxial male cable two BNC male BNC male cables and connection plate with female connectors one 7 triaxial and two BNC are furnished Each cable is 1 meter long Useful for connecting user designed prober station measurement fixture 16054A Connection Selectors Selects connection of low lead for pA Meter section as in following figure Used in conjunction with the 16053A 16055A Test Fixture for General Device Measurements furnished with the 41408 For stable pA current measurements with electrostatic light shielded hood Alligator clips TO 5 socket with connection plates for easy connection to actual devices 16056A Current Divider 10 1 Extends 1072A range to 10 A use only on 1072A range Section I
69. meters DC Voltage 10V range 10 00V 1 70 00Y START Y Start voltage of staircase or ramb wave 100Y range STOP Y Stop voltage of staircase or ramp wave 100 0V v 100 0V STEP YY Step voltage of staircase or ramp wave 10 00V v 10 00Y HOLD TIME Hold time for start and stop voltages oi 0 0s 1999s staircase or ramp wave STEP DELAY Delay time for each voltage of staircase 0 00s 100 0s TIME wave e DC Voltage 10V range 10 00V 10 00V 100V range 100 0V 100 0V Step voltage of the ramp wave means displayed step voltage of VS DISPLAY STEP V dV dt must be more than 50ms Step voltage value automatically rises to 0 1Y resolution when absolute value of output voltage is over 10 volts Ag abo AN cr MANGUNA ae SCLLIVIE lak Table 3 5 2 Staircase Wave M The VA output voltage is swept with set operating parameters START V STOP V STEP V HOLD TIME and STEP DELAY TIME There are two sweep control methods auto sweep and manual sweep O Auto Sweep The VA output voltage is swept auto matically according to the set operat ing parameters when the AUTO START key is pushed The relation between out put voltage and its display is given in Figures 3 7 and 3 8 The Va output sweep can be stopped halfway and the operating parameters except for START V STOP V and integration time can be changed When the VA output Sweep is completed VA is automatically set
70. ms at the SOHz iine frequency 8 3ms at the 60Hz Figure 3 5 Integration Time and Data Output When I TRIG is Set to INT 3 23 Zero Offset for Current Measurement 3 24 The 41408 has a zero offset function which can be used to cancel the offset error of an undesired input current e g leakage current of test leads test fixtures to mini mize measurement error How to perform zero offset is described in Figure 3 6 The cur rent measurement offset limit is O 100fA and the zero offset function can be used only at the 10 A range If ZERO OFFSET key is pushed when measurement range is other than 10712A this action is ignored The zero offset value is set to OfA when the 4140B is turned ON When the ZERO offset key is Pushed the value of the I C DISPLAY adds to zero offset value Note The zero offset can also be done by remote program code Z via the HP IB 3 25 pA Meter Operating Instructions when FUNCTION is set to I 3 26 Instructions for operating the pA Meter of the 4140B when FUNCTION is set to I are given in Figure 3 6 3 11 e Sum Mer wow GLUE sii Figure 3 6 triaxial male triaxial male cable To DUT PROCEDURE 1 Turn 41408 OFF 1 2 Connect test lead or test fixture e g triaxia male triaxia connector of 4140B Turn 41408 ON 4 At turn on Self Test of 4140B paragraph 3 5 Note The 4140B requires a one hour warm up time to satisfy all spec
71. nce current Figure 3 20 Relationship between Calculated Capacitance Value and Current Measurement Range 3 31 Me EX Diss Que ome N Paragraphs 3 55 and 3 56 8 Set FUNCTION to C Y 9 At this time the 41408 panel control functions are automatically set as follows refer to paragraph 3 8 M aaa C measurement unit indicator as DE 10 If calculated capacitance value is to be displayed in percent set displayed value of I C DISPLAY to percent change with Percent key 11 Select desired Va output mode with VA Mode Select Key 12 Start C V measurement with AUTO START key Note These procedures are the most effec tive methods for setting up the most suitable current measurement range for C V measurement However this method may take a relatively Tong time when the ramp rate dv dt is set to a slow value If the approxi mate capacitance value of the DUT is known the most suitable current range for a C V measurement can be selected by using Figure 3 21 The accuracy of the 41408 C V measurement is determined by the accuracy of the bA Meter current measurement and of the ramp rate dV dt accuracy of the ramp wave from the above equation Calculated ccuracies for C V measurements are given in Table 3 6 and Figure 3 22 as reference data not as speci fications 3 55 C V Measurement Zero Offset 3 56 Ina C V measurement the 4140B has a zero offset function for capacitance
72. nd C Measurement Functions I Current Measurement C Capacitance Measurement Display j a Capacitance Display pF Measurement 4 4 Value of I C Measurement 5 Comma 6 Symbol of Va Output Voltage 7 Value of VA Output Voltage 8 Data Terminator Note The 41408 sets EOI End or Identi fy line in the HP IB to 1 when 4s output Each data Only last data 3 91 Parameter Output 3 92 Nine parameters can be set in the 41408 as given in Table 3 13 refer to paragraph 3 85 Setting values of parameters can be output in the following format by using their program codes refer to Figure 3 34 XXENNNN NNN Mea 3 4 1 Space 2 Program cades for 4140B parameter 3 Setting value of 4140B parameter 4 Data Terminator Section Ill Paragraphs 3 91 to 3 94 3 93 Key Status Data 3 94 This data is output from the 4140B when program code K is used refer to Figure 3 36 The data is output in the following format 1 Space 2 FT F4 FUNCTION 3 RAO RAT RO2 R12 RANGE 4 11 I3 INTEGRATION TIME 5 Tl T3 I TRIGGER MODE 6 CO Cl CX Enable 7 Al AG Va MODE 8 B1 B2 Vg MODE 9 L1 v L3 VA I LIMIT 10 MI M3 Vg I LIMIT 11 DO D7 SRQ MASK SELF TEST OFF HO2 H12 LIMIT AUTO RANGE JO Ji 12 S0 FILTER Data Terminator Section 111 Paragraphs 3 95 to 3 98 3 95 Service Request Status Byte 3 97
73. of the X Y recorder connected to ANALOG OUTPUT connectors on rear panel and include LL Moves pen position to lower left of sweep area ZERO Sets both outputs to OV UR Moves pen position to upper right of sweep area These control keys are effective after Blue key is pushed QD SELF TEST Key and Lamp This key is used to set 41408 to Self Test mode Lamp is lit during Self Test mode oper ation This key is effective after the Blue key 2 is pused Refer to para graph 3 5 Figure Jel Section III Figure 3 1 28 PARAMETER Select Keys These keys are used to set and monitor measurement parameters for DC Voltage Source When V OUTPUT Lamp H is lit Parame ters can not be set Parameters can be monitored when these keys are pushed e VA Mode DC Voltage V of no sweep mode START V Start voltage V of sweep mode STOP V Stop voltage V of sweep mode STEP V Step voltage V of sweep mode HOLD TIME Hold time s of start and stop voltages of the sweep mode dV dt Rate of change of ramp wave voltage Cox Reference capacitance value C oxide pF of a C Y measurement in percent This key is effective after Blue key is pushed STEP DELAY TIME Delay time s of each step of staircase wave e Vp Mode DC Voltage V Front Panel Features sheet 4 of 5 3 5 arepe Section III Mode 474p Figures 3 1 and 3 2 VS Voltage Source Mode Lamps an
74. ogrammable DC voltage sources Va can operate not only as a programmable DC voltage source but also as a unique staircase 4 or ac curate ramp generator In addi tion accurate I V measurements with the staircase or ramp waves the timing of either of which can be automatically synchronized between the pA Meter section and the DC Volt age Source section can be done in the I V section In the C V function accurate C V measurements using the ramp wave and calcu lating the capacitance from the current meas urement value and ramp rate dV dt can be done Paragraphs 3 27 thru 3 42 describe in dependent operation as two programmable volt age sources These paragraphs should be read even if only an I V or C V measurement is to be made Instructions for I V measurements are given in paragraphs 3 43 thru 3 48 For C V measurements paragraphs 3 49 thru 3 60 should be read 3 29 VS Section Display 3 30 A numeric display and thirteen indica tor lamps provide visual data outputs of out put voltages and operating parameters The VS DISPLAY provides a readout of output volt ages or operating parameters as a maximum 3 Mode 2 digit decimal number with decimal If the input parameter value exceeds ii imum limit value an overflow annuncis 0 F appears If the 41408 is swept a correct parameter settings an illegal aa ciation ILLE appears Va Vg lamps ir cate voltage value if the VS DISPLAY i
75. oller 3 79 HP IB Control Switch 3 80 The HP IB Control Switch on panel controls seven digits bilities as follows the rear and three capa XD Bit 1 amp 5 The HP 18 address is estab lished by these five digits of the control switch 3 52 Mode 414935 2 Bit 6 delimiter form bit data as follows 0 Format A comma 1 Format B carriage return lin feed 3 Bit 7 talk only bit This bit deter instrument capabilities whic i mines are 0 Addressable 1 Talk Only Note The 4140B is set at the factory as shown in Figure 3 30 TALK ONLY q ADDRESSABLE FMTA A5 ADDRESS bit lube 17 bit Format A comma bit 7 Addressable Figure 3 30 HP IB Control Switch 4NA ter This b determines delimiter format of outgj d A HEU 3 PAG RE tor rrr E E us up 1B interface Capabilities of 4140B q np 1B is specified by the interface func me Hirit into the device The 41408 has HP IB interface functions as given in 14 83 Remote Program Code va Remote program codes for the 41408 are ted in Table 3 12 FUNCTION a RAO RAT RO2 RIZ QO AN 10 22A H02 H12 she interface of a device connected to Table 3 12 Remote Program Code sheet LOs Description of HSI high speed 1 func tion is provided in paragraph 3 97 Section Ill Paragraphs 3 8 to 3 84 Table 3 11 HP IB Interface Capabilities
76. on Til EN Figure 3 33 sample Program 1 Description This program enables remote control of the pA Meter section and provides a data output program when the 41408 is set to I function The program has three capabilities 1 Control of the 4140B pA section via HP IB 2 Trigger of the 41408 pA section via HP IB 3 Data output from the 4140A via HP IB 9825A Program 9835A Program 0 fit3 10 FLOAT3 1 wrt717 FIRALI3T2 20 OUTPUT717 FIRALI3T2 0x2 3 4 G2 3 4 2 wrt717 E 30 OUTPUT717 E i 5 5 3 red717 A B 40 ENTER7175A B 4 dspA B prtA B 50 DISP A B 5 end 60 PRINT A B 70 END 1 Select code of 98034A 2 Address code of 4140B 3 Sets 41408 to 1 function 4 Program codes for pA section of the 41408 refer to Table 3 12 5 This Tine is equivalent to 9825A trg717 9835A TRIGGER717 By using string variables complete output information from the 4140B is stored by the following program 9825A Program 9835A Program 0 dimA 30 10 DIM A 30 1 wrt717 FIRA113T2 20 OUTPUT717 FTRATIST2 2 t117 E 80 OUTPUT717 E 3 red717 A 40 ENTER717 A 4 dspA prtA 50 DISP A 5 end 60 PRINT A 70 END Figure 3 33 Sample Program Using 9825A 9835A 3 61 Section III Figure 3 34 Sample Program 2 Description This program enables remote control of the VS section and provides parameter output ties when the 41408 is set to I function Tha program has
77. onship between C V Measurement and Displays for Double Ramp Wave 3 30 Relationship between Calculated Capacitance Value and Current UB amp 48459295 9522392 9 F 1 1 INTRODUCTION E 1 2 This Operating Manual contains the in formation required to install operate and test the Hewlett Packard Mode 41408 pA Meter oc Voltage Source Figure 1 1 shows the in Y strument and supplied accessories This sec tion covers the instrument identification tions and other basic information To order an additional manual use the part number listed on manual title page 1 3 Also listed on the title page isa microfiche part number This number can be used to order 4 x 6 inch microfilm transpar encies of the manual Each microfiche con tains up to 98 photo duplicates of the manual sages The microfiche package also includes the latest Manual Changes supplement as well as pertinent Service Notes onis s n T T NEL ENT ds MA 41408 160534 Tan N po on A O a2 A description options accessories specifica Section I Paragraphs 1 1 to 1 5 SECTION I GENERAL INFORMATION 1 4 DESCRIPTION 1 5 The HP MOdel 41408 pA Meter DC Voltage Source comprises a high stability pA Meter with 10775A max resolution coupled with two programmable DC voltage sources to ensure useability in many appiication areas The pA meter has a basic accuracy of 0 5
78. or 1072A If the output current goes to the limit value an LED lamp on the front panel flashes and the voltage source VA or Vg outputs current only at this maximum value Output voltage value of the VS DISPLAY is then invalid 3 41 VS Section Operating Instructions 3 42 Instructions for operating the VS sec tion of the 41408 when FUNCTION is set to I are given in Figure 3 12 Section III Figure 3 12 Figure 3 12 3 20 8 9 BNC male BNC male cable Model d To DUT PROCEDURE 1 Turn 4140B OFF 2 Connect test leads or test fixture e g BNC male BNC male cables of 16053A Test Lead HP Parts No 16053 61003 to V OUTPUT connectors of 4140B 3 Turn 41408 ON 4 At turn on Self Test of 41408 is performed automatically refer to paragraph 3 5 Note The 4140B requires a one hour warm up time to satisfy all Specifications listed in Table 1 1 5 The VS section of 41408 is set automatically as follows FUNCT MMC I O DEN SO NB ur NANG NGA Aen Matta nai a ROME OFF PARAMETER e s All parameters are 0 VA CURRENT LIMIT So e aida NAAN 107A NG CURRENT LIMIT da esie dada Terrae dae es 107 A 6 Select desired VA and Vp output modes with VS Mode Select keys on front panel refer to paragraph 3 31 Input values for VA operating parameters depend on selected VA output modes as follows refer to paragraph 3 33 gt i gt VAL P ad STA
79. oth VA and VB Sources are outputting voltages at the same time Vg output volt age can be monitored with VB key Table 3 5 Inhibition of Controls and Operating Parameters VS Sweep Mode MANUAL PAUSE O Can be changed X Can not be changed pressing SET FUNCTION INTEG TIME aro oo a Jesse a Ilol amp Can not be changed during ramp wave perating Parameters ce Sb osuere story greey dasrwe A OIDO mo X X If the changed value is to be used after restarting press PAUSE after When VS Section is Operating X X X X X X X Section III Figures 3 7 and 3 8 RANGING TIME HOLD TIME STEP DELAY TIME RANGING TIME STEP DELAY TIME HOLD TIME YS DISPLAY Figure 3 7 Relationship between Qutput Voltage and Display for m Single Staircase Wave VaiV STEP HOLO DELAY TIME TIME STEP DELAY TIME RANGING TIME i i HOLD STE step y HOLD DELAY DELAY TIME Li TIME TIME Ist je 415 6 7 819 j 13N4 1516N17118 120 21th ESPERE RARE 10h71 thistopy 12th Vli el leni pie n oo len star Figure 3 8 Relationship between Output Voltage and Display for Po VS DISPLAY Double Staircase Wave 3 17 Section III Figures 3 9 and 3 10 vaty HOLD TIME STOP V mm a JAB ae 8th STEP Y Y 2th T 5th n E EE AI AAA NOCT ia Eus a 1 4th Ha NG T 1
80. r nally generated noise and light can also be reduced by measuring the DUT in the electro static light shielded box Figure 3 26 shows the connection methods using the 16053A 16055A 16053A shielded box 16053A 16054A shielded box When using the 160534 16055A shielding is accomplished using the hood of the 16055A Also LOW lead connec tion can be changed easily via the LOW LEAD CONNECTION switch on the 16055A refer to Figure 3 17 Figure 3 27 shows a typical DUT connection using the 16053A 16054A shielded box Note the position of the LOW LEAD CONNECTION switch on the 16054A The dotted lines show the connection method when the 16054A is not used Va or VB Va or VB Figure 3 25 Effects of the LOW Guard Method 3 41 ai nt A sA SCH d teni oy zt a ng o Re oth ec Q vp 0 027 SR cele A aa fae AEN MM DII M LUI cc EE TO n a o Ca EE 0 7 IX AA vas nnn Sonar Perea eL A h Vf 7 tb 9 Melee a C TXv7v70v af Nm Mn NG E mee c E lt x t x D om a I xt QO gt D D NG E 2 B 2 9 Ava a Ki x e pa AN fh Se 3 j z ie Ut FB 5 o ps ipag to th AA cr IVO aea T HER Y EE x O po o Fin mM Sans 33 Da a WY c o apa 42 O o e O oO Pr gt Oo a O e 1 t i m 9 p tx 8 gt m EL S o o o Pr A xt 2 O br Li LO na o pat 9 B et v 2 Nia E IU sag e un 5 ex GG LO c5 1 2 e
81. range Note When output voltage range is changed from x range to x10 range or from x10 range to xl range out put voltage is always set to 10 00V or 10 00V as shown in Figure 3 11 The ranging time needed is approximately 20ms refer to Figures 3 7 and 3 8 10 2 V y A bagbag x 10 range SK eS x range STEP Y 0 15 x 10 range Output Voltage Range of Staircase Wave Section III Paragraphs 3 37 to 3 42 3 Ramp Wave N Output voltage range is selected de pending on parameter values START V and STOP V The xl range is selected with absolute values of START V and STOP V up to 10 volts The x10 range is selected when absolute values of START V or STOP V exceeds 10 volts 3 39 Current Limit 3 40 The VS section of the 41408 can be used not only as independently programmable DC voltage sources function generator but also as a function generator synchronized to the pA Meter section for I V C V measurements I V C V measurements are generally used to make characteristic measurements and analyses of semiconductor devices e g diodes FET s etc or of electronic devices e g capaci tors pc boards cables etc Some of these devices may be damaged by excessive current Each of the programmable DC voltage sources VA and Vg has a current limiter to avoid damaging the DUT by excessive current The individual current limiters can be set for the current limit value 107 A 107 A
82. re detailed in Section Il 1 23 Option 910 Extra Manual 1 24 Option 910 Extra Manual provides an extra copy of the Operating and Service Manual 1 25 ACCESSORIES SUPPLIED 1 26 Figure 1 1 shows the HP Model 41408 pA Meter DC Voltage Source Model 16053A Test Lead Model 16055A Test Fixture and power cord HP Part No 8120 1378 The 16053A the 16055A and the power cord are furnished accessories 1 27 ACCESSORIES AVAILABLE 1 28 For convenience and ease of measurement four styles of accessories are available Photos and descriptions of accessories are given in Table 1 4 and application ranges of accessories are given in Table 1 5 AN WARRING DO NOT USE 16055A TEST FIXTURE WITH 16054A CONNECTION SELECTOR HAZARD OUS VOLTAGE MAY EXIST ON LOW LEAD TERMINAL EVEN IF 16055A LOW LEAD CONNECTION SELECT SWITCH IS SET TO GND POSITION WHEN 16054A LOW LEAD CONNECTION SELECT SWITCH IS SET TO VA OR Vg POSITION Table 1 5 Application Ranges of Accessories All ranges _ 10712A 10 7A 107 A range Eh iii Table 1 4 Table 1 4 Accessories Available Sheet 1 of 2 5 Description 16053A Test Lead Furnished with the 414087 Ti axial Cable 1 BNC Cable 2 and Connect Plate e Triaxial Cable HP P N 16053 61002 E Triaxial cable with triaxial male wi im length T BNC cable HP P N 16053 61003 Coaxial cable with BNC male connectors Connection Plate HP P N 16053 6
83. rror Construction Percent change VS Cox is the and analyzing C Y characteristics of MIS con Ncc in 0 1pF steps and 190pFr1900pF in surement are given in Figure 3 23 LEDs moueri rper esc NENNEN S C o L MEN LL TEENS e Note The Cox value can be set via the HP 18 refer to paragraph 3 85 Patag ngaa pond 3 57 C V Measurement in Percent No te Ron The C V measurement of the 41408 can 1f setting of Cox value exceeds the e displayed as percent change VS Cox the setting limit described above the VS reference capacitance value Display range DISPLAY displays an annunciation i percent is 0 06189 9k in 0 1 steps Cox MEER and the Cox value selected s the capacitance of an oxide film of MIS is not input Section 111 Paragraphs 3 57 to 3 60 most suitable display method for normalizing 3 59 C V Measurement Operating Instructions Struction The Setting limit for Cox is 0 1 3 60 Operating instructions for a C V mea 3 33 Nam an i1gV 10V V ni 4unoj 40443 Section III Figure 3 22 P a N Lu gt Q ng o L n 5 20 ks N G po N gt E z a 1 9 t Ce hu LLLL gt ox v NGI pr 9 sl KAG IOS S gt dv dt V s IBY 1 V V rt ua E a V Measurement Accuracy Sheet 1 of 4 3 22 C igure F Section 111 Figure 3 22
84. s Vg Unit indicator lamps indicate uni measured values Va OUTPUT lamp is Tit y the VS section is operating CURRENT L lamps indicate output current limit of Vg If output current goes to limit v this lamp flashes The display for the section displays the following values in 1 manner to those described above Output Voltage 0 00V x100 0 Operating Parameters START V STOP V DC 0 00V v amp 10 C SUE uei A 0 01V 10 0u HOLD TIME RR ere auia od 0 05 4 1999 STEP DELAY TIME os rb sus 0 00s 4100 dV dt Ramp Rate 0 001V s 1 00V CURRENT LIMIT seras 107A TOA 10 3 31 VS Section Output Modes 3 32 The VS section of the 4140B provi two voltage sources VA programmab Voltage Source Function Generator ai programmable DC Voltage Source Eac the voltage sources provide output modes given in Table 3 3 Table 3 3 VS Section Output Modes Description simple ramp wave Output voltage changes continuously dV dt from start voltage to stop voltage Double ramp wave Output voltage changes continuously dV dt from start voltage to stop voltage Succes sively output voltage is returned to start voltage at same ramp rate dV dt single staircase wave Output voltage changes step by step from start voltage to stop voltage by step from start voltage to stop voltage Succes sively output voltage is returned to start voltage by same step voltage Double staircase wave Outpu
85. s output from this connec put tor When Va OUTPUT and I C OUTPUT connectors are outputting analog output a O VA OUTPUT Connector Analog output data this connector outputs a LOW data of 41408 VA OUTPUT 1s output from level TTL signal PEN DOWN At other this connector 1n accordance with the times this connector outputs a HIGH following table level TTL signal PEN UP S HP IB Control Switch This switch se lects HP IB address data output format and interface capability Refer to paragraph 3 79 VA OUTPUT V RESOLUTION 0 00 10 00 0 000 x1 000 imV count 10 1 ae100 0 1 01 amp 10 00 lOmV count 6 HP IB Connector An HP IB cable can be connected for intercommunication with other HP 1B devices through the bus line cable 3 1 0 OUTPUT Connector Analog output EXT TRIGGER Connector This connector data of 41408 I C DISPLAY is output is used for externally triggering PA from this connector in accordance with Meter by inputting an external trigger the following table signal when FUNCTION is set to Il TRIGGER switch on front panel should be set to EXT Refer to paragraph 3 21 0 1999 0 0007 29 995 5mV count C DISPLAY covievr Y RESOLUTION 0 0 199 9 0 0000 n0 9995 500uV count 200 1999 7 000 9 995 5mV count Go FUSE Holder Instrument power Tine fuse is installed in this holder Re DISPLAY OUTPUT V RESOLUTION fer to paragraph 2 8 0 0 199 9 0 000 n 3 9
86. s to its step voltage Therefore the relationship between the I V measurement and its data output to the 1 C DISPLAY and VS DISPLAY fora staircase wave will be as shown in Figures 3 13 and 3 14 2 Ramp wave 7 AN Note When FUNCTION is changed to I V the invalid data annun ciation is displayed on the I C DISPLAY Output voltage of the ramp wave changa continuously at a specific ramp rate dV dt so that digital integrate for each voltage step is done US in the raw current measurement data befoy and after VA goes to its step voltag in equal periods above and below th step voltage as fixed by the integra tion time Therefore the relationshij between the I V measurement and d data output to the I C DISPLAY and y DISPLAY for a ramp wave wil be a shown in Figures 3 15 and 3 16 E Note When raw current measurement 1 data for digital integration CK is short an invalid data an nunciation Eme is dis played on the I C DISPLAY This annunciation always ap pears just after changing FUNCTION or after a para meter s is changed or at the START V If the STEP V is Set to a small value when the ramprate dV dt is set to a fast value and the integra tion time is set to LONG this annunciation also ap pears at several step voltage just after START V Section Ill Figures 3 13 and 3 14 RANGING STEP INTEG TIME TIME TIME TIME t i i 19 START Y i D
87. set to abort condition OV with ABORT RESET ey Note VA auto sweep can be stopped at the halfway point with the ABORT key Figure 312 VS Section Operating Instructions when FUNCTION is set to 1 sheet 2 of 2 3 21 Section 111 Paragraphs 3 43 to 3 46 3 43 I V MEASUREMENT 3 44 The Model 41408 can automatically syn chronize measurement timing between the pA Meter section and the VS Voltage Source section when the FUNCTION is set to I V Ac curate I V measurements with the staircase s 4 or ramp 7 N waves can be made by taking advantage of the variable digital integration moving average method which is described in paragraph 3 18 Opera tions of the I V measurement are described in paragraphs 3 43 thru 3 48 For basic opera tional instructions of the pA Meter section refer to paragraphs 3 12 thru 3 26 and for the VS section refer to paragraphs 3 27 thru 3 42 3 45 I V Measurement Data Output 3 46 Measurement timing is automatically synchronized between the pA Meter section and the VS section in I V measurements to assure that the measurement is taken at the correct timing The methods for taking raw current measurement data for digital integration of the pA Meter section changes dependent on the output modes of the VS section as follows 1 Staircase wave 7 ila Digital integration refer to paragraph 3 18 or each step measurement is done using the raw current measurement data after VA goe
88. t data at a higher speed than in its general I function Accu racy and data output intervals for the HSI function are shown in Table 3 14 Sample HSI HIGH SPEED I FUNCTION Program code F4 for the 4140B establishes not only the HSI High Speed I function but also starts data output from 4140B When 4140B receives FA from controller the 4140B output is zero Next the 4140B sends an invalid byte 32 in decimal space in ASCII as the first byte Beginning with the second byte 4140B current measurement data in binary code is transmitted Each transmission of current measurement data is made up of three bytes which are RRA AA AXARARRR RREKKEKK KKK KK kkk Kk kkk 1 2 3 4 5 1 Space Invalid data 00100000 2 Range Range of the first measurement 2 00000010 v12 00001100 3 4 Counts Counts of the first measurement Typical 3600 3800 This data is made up of two bytes sixteen bits and sent in 2 s complement 5 Range Range of the second measurement Subsequently each measurement data transmission is made up of three bytes sent in the same format as in 2 thru 4 above Note When set to the HSI function the 41408 does not send a data terminator e g CD LE nor does it set EOI End or Identi fy line in the HP IB to 1 Therefore the 4140B is sending current measurement data during the time the 4140B is set to HSI function If 4140B is set to another function HSI func tion is abor
89. t voltage changes step DC voltage is output VA is not operating NB ES DC voltage is output OFF VB is not operating v d 1 E Mode NE gt tug E 3 4 4140B Section III Paragraphs 3 33 to 3 36 3 VS Section Operating Parameters 3 35 Voltage Output and Display of VS 34 The VS section of the 41408 provides 3 36 The 41408 VS section outputs a voltage ight operating parameters as given in Table and provides for its display by one of the Values of these parameters can be in following methods depending on the VS output put using the following procedure mode 1 Press desired PARAMETER key Note Set desired value with DATA keys VS DISPLAY displays setting value When the VS section is operating 3 Input displays parameter value with when V OUTPUT lamp is lit no con ENTER key Displayed parameter value trols or operating parameters can be is flashed changed as noted in Table 3 5 Note 1 DC 1B refer to paragraph 3 85 The Va DC voltage whose value is set Parameter values can be set via HP with the Va PARAMETER key is out put from the Va OUTPUT connector with the SET key Output voltage Note value is displayed on the VS DISPLAY VA can be cancelled and set to OV with If setting parameter value exceeds RESET key the setting limit listed in Table 3 4 VS DISPLAY displays and this value is not input Table 3 4 VS Section Operating Para
90. ted and stops data output A sample program for using HSI function is given in Figure 3 37 Figure 3 32 Data Output Format of the HSI High Speed I Function Section III Paragraphs 3 99 and 3 100 3 99 Programming Guide for 4140B 3 100 Sample Programs for HP Model 9825A 9835A Desktop Computer are provided in Figure 3 33 thru 3 37 These programs are listed in Table 3 15 Note Specific information for HP IB p gramming with the 9825A or 98354 provided in the 98254 or 9835A pro gramming manuals Note The equipment required for these sam ple programs include 1 4140B pA Meter DC Voltage Source 2 98034A HP IB Interface Card 3 9825A Desktop Computer with 98210A String Advanced Pro gramming ROM 98213A General 1 0 Extended 1 0 ROM or 9835A Desktop Computer with 98332A General I O ROM Model Aly Table 3 15 Sample Program Using HP 98254 or 9835A Various 1 eres entem Vid Remote control of pA sectio E RIA and data output when d4l4op is set to I function Remote control of VS section and parameter output when Remote control and data out EE ing put when 41408 is set to I 1 f or C V function E How to use remote program E ming code K E Remote control and data pro E a cessing when 4140B is set tolf High Speed 1 HSI function ret corp MARA a NU KG to AG YU TO ly E aa ri deo i n nena ED xode SUP Secti
91. three capabili 1 Control of the 4140B VS section via HP IB 2 Auto sweep of the 41408 VS section via HP 1B 3 Parameter output from the 41408 via HP IB 98254A Program 0 dimA 30 1 wrt717 F1A4B1L 2M3 o 2 2 wrt717 PS 10 PT10 PEINPH25PD 5 PB 50 3 4 3 4 3 4 3 4 3 4 3 3 wrt717 ps 5 4 red717 A 5 5 dspA prta 6 wrt717 W1 6 7 end 9835A Program 10 DIM A 30 20 0UTPUT717 F1A4B1L2M3 1 2 30 QUTPUT717 PS 10 PTIO PETNPH2 PD 5 PB 50 3 4 3 4 3 4 2 4 3 4 3 40 QUTPUT717 ps 5 50 ENTER717 A 5 60 DISP A 70 PRINT A 80 QUTPUT717 wi 5 90 END 1 Sets 41408 to I function 2 Program codes for the VS section of the 41408 refer to Table 3 12 3 Program codes for parameter setting of the 4140B refer to Table 3 13 4 Parameter terminators for the 4140B 5 Statements on lines 3 and 4 or 40 and 50 are used to output setting value of the parameter for 41408 These statements should be contin uously programmed 6 Statement for AUTO START of V SWEEP 3 62 Figure 3 34 Sample Program 2 Using 98254 98354 41408 Section III Mode Figure 3 35 Sample Program 3 Description This program enables remote control and provides a data output program when the 41408 is set to I V or C V function The program has three capabilities 1 Control of I V or C V measurement of the 41408 via H
92. tion as the 4140B starts its sweep measurement and the slewing speed accleration of the X Y Recorder 7 Place chart paper on recorder platen us 8 Install disposable pen in X Y Recorder 9 Adjust zero position of X Y Recorder Note Voltages output from the VA and 1 C OUTPUT connectors are set to OV by the ZERO key on 41408 front panel i 10 Set input ranges of X and Y axis for X Y Recorder Note When setting input ranges check amplitude of I V or C V curve by using control keys LL Lower Left and UR Upper Right 11 Connect DUT to test leads or test fixture connected to the 4140B 12 Lower X Y Recorder pen onto chart paper If X Y Recorder is provided with pen lift TIL controls pen is lowered automatically when sweep meas urement is started when V OUTPUT lamp is Tit 13 Start 41408 I V or C V measurement and make X Y Recorder trace of I V or C V curve 14 Lift X Y Recorder pen from the chart paper when measurement 1s complete and X Y Recorder stops If X Y Becorder is provided with pen lift TTL controls pen is raised automatically when measurement is complete when V OUTPUT lamp is extinguished Bina ar BAN uo aro e IERI Ls seo RENEW cnn IERI e a mataya arog BIER eerop moann TARA A iM TERT eene an AG n ns rr e TM enm TT Tent ne ENS TI paa p 7 A eee TRIO ne teary FIRE E 4 me meteo PT RN Ne cea CTN c 7 emong RA Figure 3 29 Analog Output Operating Instructions sheet 2 o
93. to OV The VA output sweep can be can ceiled and set to OV at the halfway point with the ABORT key Manual Sweep The Va output voltage is set to manual sweep mode with MAN key The VA out put voltage is swept at its operating parameters except for HOLD TIME STEP DELAY TIME in this mode using Step Down G9 and Step Up 8 keys Output voltage is displayed on VS DIS PLAY Note The MAN PAUSE key changes the Sweep mode from auto LED lamp is not lit to manual LED lamp is lit or from manual to auto Moadei i 3 Ramp Wave 7 N ae The VA output voltage is swept auto ically at its Operating parameters START V STOP V STEP V HOLD TIME ar dV dt when the AUTO START key 15 push ed The relationship between Output voltage and its display is given I Figures 3 9 and 3 10 The VA outpy Sweep can be stopped halfway at Which time its operating parameters except for START V STOP V can be changed When the Va output sweep is complete VA is automatically set to 0V The Vi output sweep can be cancelled and sat to OV at the halfway point with th ABORT key Note The VA output voltage can be set to START V and initially held at this voltage with the PAUSE key After the desired wait time VA Output sweep can be restarted Note VS DISPLAY will display VA output voltage during the time that VS section is outputting voltage ex cept when Va is set to OFF Bus when VB is set to b
94. ture simo 40 C to 75 C Hume Tiu eres isa Up to 95 at 45 C The instrument should also be protected from temperature extremes which could cause con densation within the instrument 2 22 Packaging 2 23 Original Packaging Containers and materials identical to those used in factory packaging are available through Hewlett Packard offices If the instrument is being returned to Hewlett Packard for servicing attach a tag indicating the type of service required return address model number and full serial number Also mark the container FRAGILE to ensure careful handling In any correspondence refer to the instrument by model number and full serial number 2 24 Other Packaging The following genera instructions should be used for re packing with commercially available materials 2 4 a MOGE 419p Wrap instrument in heavy paper or pi tic If shipping to Hewlett Pac office or service center attach ks indicating type of service require return address model number and fut serial number E Use strong shipping container A doy ble wall carton made of 350 pound tec material is adequate Use a layer of shock absorbing materia 70 to 100mm 3 to 4 inches thie around al sides of the instrument d provide firm cushioning and to preyen shifting inside container Protec control panel with cardboard Seal shipping container securely Mark shipping container FRAGILE to en Sure careful handl
95. uires a power source of 100 120 220Vac 102 or 240Vac 5 10 50 60Hz 5 single phase Power consumption is less than 135VA i 2 8 Line Voltage and Fuse Selection 2 9 Figure 2 1 provides instructions for line voltage and fuse selection The line voltage selection switch and the proper fuse are factory installed for 100 or 120Vac oper ation FUSE SELECTION Fuse Fuse ratings Part No 100V 1 254 120V Stow Blow 2110 0303 220V 0 64 240V Slow Blow 2110 0016 Operating voltage Figure 2 1 Line Voltage and Fuse Selection 2 1 rap TRATA E S rte meret eem mm An aa remm etn Section Li Figure 2 2 A N WHITE fit E GREEN YELLOW BLACK L BLACK eae umi At E GREEN YELLOW mi E E GREEN m L RED E ce N BLACK A mU Vi MERE LIGHT BLUE en i E GREEN Eurum J YELLOW NENNEN mm L BROWN L BROWN Tee ma cm mis Eo d J N WHITE er L RED E GREEN p N BLACK Ve E GREEN YELLOW N LIGHT BLUE N LIGHT BLUE E GREEN YELLOW L BROWN N LIGHT BLUE M m E L BROWN mode 4140 HP Part No 8120 1378 NEMA 5 15P Color JADE GRAY Furnished for countries other than those listed below HP Part No 8120 1369 AS C112 N Z S S 198 Color GRAY 250V 6A for Australia New Zealand etc HP Part No 8120 1351 BS 1363A Color MINT GRAY 250V 5A for Great Britain
96. unt on the selected range an ove flow annunciation appears ki O Exponential Display for Current Meas urement Current measurement exponen 2 12 in eleven ranges is display ed when FUNCTION is set to I or I V O Capacitance Measurement or Percent Ke Unit Indicator PF indicator is il luminated in general C Y measurements When percent key is pushed percent in dicator is illuminated and I C DISPLAY is in percent FUNCTION Select Key These keys select measurement functions as follows 1 For independent Operations as universal pA meter and DC voltage source j I V I V characteristics measure ment using staircase or ramp Wave C V Quasi Static C V characteris tics measurement using ramp wave l Figure 3 Front Panel Features sheet 1 of 5 angat 41408 Section III pode Figure 3 1 S I RANGE Select Key These keys select 2 I TRIG Select Key These keys select o the current measurement ranging method trigger mode for triggering measurement a AUTO mode when LED lamp is lit or I Data Output when FUNCTION is set optimum range for the current value is to I as follows automatically selected In MANUAL mode l when LED lamp is not lit measurement INT This key provides internal range remains the same even when the trigger which enables instru current value is changed Manual rang ment to output current data ing is done by pressing adjacent DOWN measurement
97. utput vv 3 10 3 21 External Triggering 3 10 3 23 Zero Offset for Current Measurement 3 11 3 25 pA Meter Operating Instructions 3 11 3 27 VS Voltage Source Section 3 14 3 29 VS Section Display 3 14 3 31 VS Section Output Modes 3 14 ii TABLE OF CONTENTS Section Title Page 3 33 VS Section Operating Parameters 3 15 3 35 Voltage Output and Display of VS 3 15 3 37 Output Voltage Range 3 19 3 39 Current Limit ii 3 16 3 41 VS Section Operating Instructions 3 19 3 43 I V Measurement 3 22 3 45 I V Measurement Data QUIDUL ras 3 22 3 47 I V Measurement Operating Instructions 3 27 3 49 C V Measurement 3 25 3 5 C V Measurement Data OUtSut eis eb 3 29 3 53 C V Measurement Range 3 2 3 55 C V Measurement LBPOCUTTSBL cra 3 32 3 57 C Y Measurement in Percent coa 3 3 3 59 C Y Measurement Operating Instructions 3 33 3 61 DUT Connection 25405 waa ka 3 4 3 63 DUT Connection Using ae the Wafer Prober Bodas 3 65 Annunciations sa 3 47 3 67 Analog Output naasa 3 4 3 69 Control Capabilities for Analog Output ccce ys 3 49 Sell HP IB InterfacB ed na ve vr 3 52 3 73 Connection to HP IB 3 5 i 3 75 HP IB Status Indicators 3 5 Ballad Locat KEY A 3 52 3 79 HP IB Control Switch 3 57 3 81 HP IB Interface Capabilities of 41408 3 5 3 83 Remote Program Code
98. which is independent of the zero offset function for a Current measurement refer to paragraph 3 23 To minimize measurement error the zero off set for C V measurement can be used to cancel the offset error caused by Stray capacitance in the test leads test fixture the method for doing a zero offset is described in Fig ure 3 23 Offset limit for a C V measurement is 0 0 7 100 0pF The zero offset value is set to OpF when the 41408 is turned to ON When the ZERO offset key is pushed the value of the I C DISPLAY adds to the zero offset value 3 32 MOde 1 4 C pF dV dt V s Figure 3 21 Suitable Current Measurement Ranges for C Y Measurements Note A zero offset can also be done by remote program code Z via the HP IB Table 3 6 C V Measurement Accuracy Current Measurement Range A 0 001 amp 0 01 0 01 0 1 ae Tea 100 0 odii x 82 OL ye 12 0 001 5 0 08 x 52 qua 2 War 9 001 5 0 008 aviar dVjdi 10 7 asar o 4 008 0 8 052 var ET a B098 yg 0 08 5 2 4 aviar ar 0 008 0 2 22 Ta avia 0 008 0 03 0 008 a 0 008 52 a a Note z 4 of reading counts at 23 15 C 70 humidity Note 2 Accuracies can be specified only in shaded areas of Figure 3 20 Note 3 Leakage current through resistance of DUT and test leads contributes additional e

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