Hitachi S-570 User's Manual
Contents
1. as 2944 g Be 1K ENSI NAS 2 54 ISVOSA a SAA A 2 H lt EV IA D RE 5654 epa dimar de Dro wo 3 Kor cere 72 1 re ett AL Ud A E 57 MIY4DC2JV o Qi ENS CNIS CHIE i LU LINA d IRANS 284 FORMER 2 mua 221 4 VAC MVLIWK ISC 44A ZSA 4342 4 OPERATION aav JOY GA er vari JOA DE eN a ET Esa A gt 1 TOWER Surrey af IVA e CA HY TN CANA uut Zu 2 6809 ROM 56507 cru fj CEE ES ETT 5 HALT 4 MM C VU DRM i m e 5 CLK CLK EN DVN6 GND 4 MOTHER BOARD WIRING gt v R Y ta gt 9 Y gt 5 gt gt HRE lt ia ADS i gt 2 gt 5 8 3 8 ielui o 244 o24 b amp HHZCLK O 254 MINH 025 92744 IFVAZCLK ane 5 m CNI sals 4 Hifl sop OPERATION PAWEL DATA DISPLAY BLOCK 29 99 9 2121212182. 22Cux 234 o La N e A RJ an OF RY 236 26b OPERATION UNIT CN 10 CN CNT 14 2 OPTION CONNECTER yen 1 e ir 3 STAGE Low AY STAGE nien x D vr Fl DSH 4 79 rst Mie ja ja o LS gt Y 3 gt 3 E ojo gt 6 RES n Aule RESET 14 sk 54001 Rr 34498 1 7 5 DIGITAL CONTROL oos ADG 20003 AD W285 Ret Zoe 19051 LAY sv ose seo 4 sy D2 xy 22 co EPROM 4 2732 4 1498 452026 gt K 15978 307 4 er By 000 Este 000 ROMEO mano Pi UA CMO SRAM 76776 2 33 307 2 m e 42 Re m un 4 IS 2000 74 1800 144 ram Rare REESE n NAO P KE tow to 20 sr en gt a R Ar3 thet
3. 5 MODE CONTROL CONTROL LENS CONTROL 2 9 o Seed Y 2 IT lt 25 2 3 1 MODE UNIT 51 5 DA v 4 s 75 8 4 4 0 PEPR 2 E 3 poi 2t 2 4 2 a 2 REDIF Ak ex ie reres P ld PES 1 3 s em 77 a A ere sy rs 2 lia iras a irr ee J C ag H erp IA yt de Grated i 4 gt Ga rt weal 4 H Gere 40 k x ro mI E gs nd E EI er D yr VA 5 1447 76 om 3 pac ot sz ED 4 C ns v9 4 so a E r 2 29937 BIO ur Livi 2 D a 42 7 1 arm thd 2 y H rast 2 arr esirna 7 1 A ae Tue 27 Faario PA e 7 yy Um virs gt APOT i r 3 H 19 5 ans D V 2477 HS FEAR 24 4 vox la ESSE 41 1 ee x 226 a ne a o 47 5754 ARSS 2144 2757 xt RIES yes 2128 em 3 757 7
4. 39 17 Sie 2399309050 MODE LINE ANALYSIS a2 39058 Mtv A AO A e ouv V PUT 2 11257 97620549 pe QOO QS reg NS SEMIS a let ARE CNS OOP OS UNIT j PHOTO CRT 2 3 WIRING DIAGRAM 4 R32 R39 5 1006 CS CE 0P DYNAMIC FOCUS COLL MAIN FOCUS COIL 5716 x Y STIG XY 1 3 ADS32IA VRI 10K T 7S 4 Y 44 at ES O 2 5 8 7 222 200 57160 COIL FOCUS COIL DYN FOCUS COLL 00 IP OUT PENNINGOUT TON PUMP ee 9 O en 1 SISTA Ls 55007400 4 sa TER RANGE 2 PO O 1 gere n pv 1 3 PSN 25 4 HS 0 S 1 220 08 BH ee DCTAT 1 4 8 Ns Aereo 132060 e 2 2 CI HH po PTE ME p S EE ape Anl S Gea hs T sr ar Q 9 ek D 4 1 ase 5 o lt AIN N 15 E ma RECORDER NL O mo 27 Ok esr 4 er S O O er 19 OLS Pas lt 134078 EL M 1 lt
5. ra Kai T 0 617 ut gn f oodd r sv N v gt Q dt gi ES 3 3 1 K al es a izej Te CHAMBER OLN 2003AN HDIAZZ 7 1 2 27 3 254552 DINI 082 28 0 5 2 STAGE LIMITTER 7 KEYBOARD KBR 12AC S 2 Modified 2 570 DATA ENTRY KEY BOARD ONES CHS 70 RIA 100K R2F xs lo eze a RES LOOK y fo REELE 73 IIK za 4 x3 PRA p ij nt 17 KB OK s ol qt AS k s 3 pages sm paag deae 2 CHES T 22 E mea le Ones Ys Qe NAS ss su cL yok 10K wr Pa lv 43 Posi raw m O pus A ee cese RSP TAR 6 6 xs Y 34 0 MAG o POSITION Es gt 20 es ly 536 62 T EAN bros K En Dd wre res Y 585 Ga 10724 18 1 33 99 35 19 wr 4 13 28 77 2 30 3 32 dO 33 24 LAMIN 4525 25 ALAN JC 20 ef ___ ERY 27 XS 9 V t 69 5 MODE WORM POSITION 5279 7337 av
6. s 2 gt Acor M d si a DISPLAY CONSOLE ore MIG CLOSE GOKVHV POWER SUPPLY RNEHVS 5M01x 047 022 427 0 R18 LU gt 25 26 5 C2 7 C c CS O O 6 4 8 RIZ 5 R17 J 3k D 9 44 6 w GA cre CH RIO qx 1 17 POWER SUPPLY POST WV UPPER DETECTOR POST HV LOWER DETECTOR wv PORT WV t24V POST ON 2 UPP ORTER POWER POST OM SUPPLY LOWER 22 Mao Pda lt av 17 25146 pl ES Go o Cod sloy 22 P eco 3478 1 5954 24 4 uw ZEA treat 5 ls Da A 24 4 520 EIN aps fs EMES nE 1227 or Kor 27 VAL cos Sw CLOSE s vatv T 21274 STAGE Janr IH sw 274 22 IN uo Nes SPECIMEN 2 44 Ex PUE DISPLAY nargaz dos asc X34 100 ar moren c BEES DISPLAY 1 lt D lee wes rer 244 toral 2 HA 7 peor diclis 1
7. 7 2 t 1 gt 25 FIFI zs zz Cl 7 T exe a AA ALU Pii SE d 12021123 st t ss NUN 11 1 52 7 M paies SLs 2 B A ba i 3 6 RERERER es7 for 25 rt 3r T sr DACOIIZ 2 22 AE 5 3374 4 2 4 7 B TT 8 113 CAF 4 1 9 7 eT e s INT ANLG 8 ANALOG CONTROL R R3 220K J IC HD74 2 AWLG BOARD 2 ADG200CJ AD 10 253 9 RAPID SWEEP GENERATOR EXT 2 24 47 2 org ku 4 100 00 IES eZ est gt 13 O lii as 33355552 75 1 se y DETECIER re PANEL Cw 026 2wes z P con 29 COL VDE VDAY Y e vary 7504 Cr Q 4 RSI s 095 pz 223 1 5 Deg rt Vero 7 6 22 Stow x ER Pas IK 08 PAP x osy 7 Coso o7 ar ee ee EE la e EPCR7 3 9 va 009 Y 1797 3 28 css 2 520250 9 D23 D649 mi 2224 Y on 1622 7 oov Px es eo2 US 4 0 2 0227 wok 6 DEF sox pies 0022 85 44 508 MOTE 007 LETECTER BIAS e 55 lt SWOTTORYDI
8. DIAGRAM HNEG BOARD PANEL DG BOARD 2 A A Y DEF CEWG COLUMN 2 a 2 1 4 av a DISPLAY CONSOLE POWER SVPPLY ROOT i DG BOARD PANEL ANLG BOARD VIDEO AMP OO 3 ver 56 voc O wee LENS LENSO LENS 8 VIPEO AMP 2 GND WIRING DIAGRAMS 0 1 811 23D1130 107 2 UD 45 55V ase ja PI sov 2 O 4004 SA 6 52x Iman 27 AY Ise Oya Y Gt Pres 134 n COON DEE A owes PI ud 36111020 ajes rsa osnsm P 2 ces ate ri ST 2 sev 28A pe 22A x IA alo dw 230 IANA DEF meer sio 384 al 207 MO 27 IZA 72 510 20 4 73 459 95 28 0001 gt 2543 2 eov wid 51 41 25 40 ol esse esa US 45 DEF 7 2 j Jas PV 08A EN 2 COA Mx 22 2 2 4 no a ILLUMINA TON ISE 2 56 PERA 6 5 254 hg PAG 212 15 ve xa 9200 1 14 5 1107 20 DER olo 70 1 seg en SA lt e xr o 2407 IOMA A o u 2 5 Ree 205 Imax HAN 7 SIR
9. v O O O o 14 5 m Orrs m Y 9 p 2245 06 ser 57 620 57 Ores 41007 us 2 C 0F 0 8 ree esr cs eros sor 21424 4 090 24 5 petal 437 gt lt _GL PRS 2 5 La Bs ION PUMP POWER SUPPLY AA SK ul ri VA AYU T PUMP PENN WS 7 PRI thy tis ron Al gat em 1 TE AA DEO 25 7 D 17 CONT ens 145532774 rio Y wel 35427426 AA if 144 co 5 LIISA A 13 4 2207 METER P 43 2 5 72 5 lt 5 i ir 1 70 1220 012526 02297 B NIA SY LE SLI EA ez Ser 44100 3 2 4 2 4 Le Peel MPG 1247 ARE EN e 24827 zaart 15 44 TIS 57 ZERE 743 sr f IE 77 4427 42 1 02221 DAS popen 4 ae 77 N AN Ry MEE FICS 7 23 3532573 10 07 3 1 eov Pi ocv 3 m g 106 rota Tred 104 7 02 35027301 5 Ee p Fa M w N x e Ea E
10. 30 A CPERATION RL mmn m 710 TTT RH Sricr e 3 STIGMAY 145084 Y es sr 3 vo A 4 TOUT d 277 x gt 3 370 A mc 5 22356 6 1 ers 1 cwo PAL at 14 YCE7Xla GAY a 1 Lo 2204 vere DES OT an 1 govs PVF a o A50 A d Ow x 3 3 4 SWIFTYT i rri ok na 23 2 4 WIE SOMA Vox syr D G ro a 54007 10 tsr rS Ka gi 2 2463 2 s eles 213 3c gt 3 4 7212 Pury ces 8 5 var 3 3 4 4 D 457 UNIT a FOATY taah g rin HPUKIY Less 4 Pacem ii 9 1113 34 15 4 FU DER ALANS PURER ALY 7 OBI core OVER HEAT SW Cook 21 0 25 7 4 MEATISINK OVER HEAT 51 16 VIO KZ REFERENCE 1 3 gt Or360 72 2 4074 1 HAITOB2PS R20 t1 15 ar 24 5 3 THERMISTER UNIT CNIS LA m vkef P28 R24 14 ra MEA 8 3 7 4 4 ALIGNMENT UNIT UPPER GU
11. 670 yo FIH1 ZEoP DENOMINATOR g C 707 2 INPUT DIZDIS 152074 2 2 5 6540 UNIVERSAL VIDEO AMP UNIT 5 Ke 4 0007 6007 4 77 2 22 266 OUT 1 Omir 0022 100 o CAHAYA 00V 7500 44 2 22 RS 70K IK ja 22 2 21881 47K Rig v 30x 2 35 3 Yoma d low 21 07 Of E RII 00 V r R28 680 M 5 1 u 9 vox 7 n 22 yj D 3 46V 00474 6000 4 CONTRAST CHI 25 27 R woh SIR SO 4 cs 2272 RIO PHN 2 10 100K ca CMI R23 100K 7j 1 D a98600 8 772 3 479600 7 1 5 2 CHE t 2 8 5 654 DUAL SUPPLY 944 99920 v vop Uroo va Y TL Se 3 i NIWIOIAS 2 7 S 542 PRE AMP UNIT Hitachi Ltd Tokyo Japan Head Office 5 1 1 chome Marunouchi Chiyoda ku Tokyo Tel Tok yo 212 1111 1510 1520 211 1411 270 2111 Cable Address HI TACHY TOKYO Codes All Codes Used Copyright 1982 Hitachi Ltd All rights reserved Printed in Japan
12. CIRCUIT DIAGRAMS FOR MODEL S 570 SCANNING ELECTRON MICROSCOPE CONFIDENTIAL Part No 538 8601 Hitachi Ltd Tokyo Japan HGT NK TABLE OF CONTENTS 1 55 570 1 1 WIRING DIAGRAM 1 2 GND WIRING DIAGRAM 1 3 DC POWER SUPPLY 1 4 MOTHER BOARD WIRING 1 5 DIGITAL CONTROL 1 6 DATA DISPALY 1 7 CPU BOARD 1 8 ANALOG CONTROL 1 9 RAPID SWEEP GENERATOR 1 10 VIDEO AMP 1 11 HEAD AMP 1 12 DEF LENS POWER SUPPLY 1 13 THERMISTER UNIT 1 14 ALIGNMENT UNIT 1 15 COLUMN DISTRIBUTER 1 16 30kV HV POWER SUPPLY 1 17 10 HV POWER SUPPLY 1 18 SEQUENCE 1 19 STAGE LIMITTER 2 OPTIONAL ACCESSORIES 2 1 S 5701 DATA ENTRY KEYBOARD 2 2 S 5704 MODE DUAL MAG UNIT 2 3 5 5707 WIRING DIAGRAM 2 4 5 5707 07 01 2 5 5 5790 LaBg ION PUMP POWER SUPPLY 2 6 5 6509 RASTER ROTATION DYNAMIC FOCUS UNIT 2 7 S 6540 UNIVERSAL VIDEO AMP UNIT 2 8 S 6541 DUAL PMHV UNIT 2 9 S 6542 PRE AMP UNIT CONFIDENTIAL OPERATION UNIT _ PANEL obey d ELECIRON OPTICAL COLUMN w l ELECTROV GUN 3 6507 leer POST NV UPPER ARS Posz LOWER 10P770V 1 1 dE ALIG COLL TY COND LENS ezis KL FORMER UE EXT LENS IM fouy 1777 77 four 2 2 2 DEF COIL STIGMA COIL E 2 198 6440 o la 4 E WIDEOAMP j cuu ccm 159 6547 Lal TRANS FORMER WIRING
13. N ALIGNMENT LOWER COLUMN UPPER DETECTOR BIAS LOWER DETECTOR Col DEF 9177 25223 I EE 9999 Jd Wt 5 Ei i n 2 Y n 9990 8 3 amp 5 ALIG lt 5960090900009 LJ z4srow UPPER LOWER 8745 BIAS 5 COLUMN DISTRIBUTER m G A 2 1s 2 e PES A 0031 72 3 or jo Ll OP 0 94 5 6 9 2 3 ZSC 28 5 mur eee LESA EJ 99 4 9407 porzony 46A 20O3AN a 5 MID 222 x47 7 Reo zxa 127210 owes POST 4 NN o rer SKW2200P s f 2130 H A 7 2 DZD D D DADI DODI av Dae wes OK nei m 7707 O 213 z Trio 26 2 oros 100 0 j 222 me ADDRESS 1004 030v METER Ve mese R20 x 10 C 2 cep IVS amp gp74 0 130p ce 7 80 2 Sat i Ort FILLED or a JOGA 74 Ho el add 22 Rem has s BSS 15 MAD 4 14 IN 35 377 1 i 220 1 OVER LIUTTER 1 i D9 A 1
14. OLE y ors Cno ace ol 9 R noz NU IN 5 5 ML 42 CN FS 5 P op 3 gt swor 25 4 F 4 72 2 96 90 3164 73 wr TI 5 sO um 12 5 te PREX 21 PDET 4 75 v 7 40 x Z Y 22 P 23 25 B ox U 12 ip 5 78 16 T 77 7 22 45 di RSS 6 227 BZA PDEY i La om TRAST omu 7 1 10 VIDEO AMP 23 FMT R 268 DS R 2 220K 5 3 77 RIPAZA LIR L SM 470K D7 HEAD RI 10K AMP C2 104 ili 2742 152074 750 2 2 LHOO3S2CG RIO R4 IK Ke OK R3 IP 700 4 amp 5 2 820K JE t R7 820K CS Os 5 O sv 4 4 r rd lt 287 226 223 pM M y denis 7080 a 1 COFISICNB 5 33 222 a cw 3 167 cuss ES 25 5 54507 2 a 4 2 3 3 5 PPS 2 2 85 2227 274 FT 2 25226 a 22 5 ys gm gt X 3 Be Xs Euer lt tt L 3039 IPI mo ENIS x s 704 C3 cor core 1 3 cx 270 4 mo 74 rms 20418 111122 19 em pry 410 e o lpn STIGA y 3 STIGAR 14
15. Y m 5 01 weit 85 95 31 ZAC 2215 26 247 1 311 825 52 04127223 PEL WEB 4 E T 223 C 7 ta CLOSE OPEN GUN VALVE AO tu Ww r a 2 9 ut E 2 S 7 a 0924 0 ISZ ZBOLIVH 3 1 4 42752 DAP7573 S 7 5 7 tate IRR e EE 25 8 N 27 5 HHG E 7442A ie FARO ar 15 7405 38 6 60 6 CPU BUS 24 4 2 WA2 2525 5 de gt sex 804 277 e 2 MPCASTA 2420 3 RY R12 2U400 V gre O PE RG WIRE RT TE 7 gt OUT 4 4 8 2 47 b 4 7 pazor 2 DZ 7 2 6 27 23 Dal tX nee lt E 3 az E abc 9 10 BRIGHT AE RE 6 iil wc mA ERIC 2 72 3 2 ae elo CONTRAS 1OGMA 2 3 e 410 5 4 Sm ISTP2200M BI Gee HR A Los B4DM M0 9011U8 ras EM 27 ins 220 elo 5 OK GSP 2200 LM 320K 5 5 435 3 3 242 DIS KJ QA 2312 127 Jt ON OFF O GAMMA DIFF
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