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972B DualMag - MKS Instruments, Inc.

1. HUINI P m N N S 9 2 IHH TTT TN L HHTHH a s ull ar a a ab o0 w 5 3 5 o 2 5 0 3 Go S o 3 Bo 110 aunssaid 110 aunssaid uabo1pAH 1 00E 2 1 00E 3 1 00E 1 1 00E 0 1 00E 1 MicroPirani Nitrogen reading Torr 1 00 2 1 00E 3 00E 4 1 Query Command list Communication information Command Explanation xxxBR FF QXXxACK9600 FF Communication baud rate 4800 9600 19200 38400 57600 115200 230400 QXxxAD FF QXXXACK253 FF Transducer communication address 001 to 253 QXxxRSD FF xxxACKON FF Communication delay between receive and transmit sequence Pressure reading MicroPirani sensor pressure as 3 digit floating point value Setpoint information Explanation xxxSS 1 FF xxxACKSET FF Setpoint relay 1 3 status SET Relay energized CLEAR Relay QxxxSS2 FF deenergized QxXxxSS3 FF xxxSP1 FF xxxACK1 00E 2 FF Setpoint 1 3 switch value xxxSP2 FF QXXXSP3 FF xxxSH1 FF xxxACK1 10E 2 FF Setpoint 1 3 hysteresis switch value xxxSH2 FF QXXXSH3 FF xxxEN1 FF xxxACKOFF FF Setpoint 1 3 enable status OFF PIR MicroPirani CC Cold xxxEN2 FF Cathode CMB Combined
2. 11 Calibration and 19 Calibration certificate 58 CE Declaration of Conformity 59 CE MAN 2 Cold Cathode 17 Communication delay 11 Communication Protocol 10 Communication software 10 Contami aliofl u ao l ko tk ake n pk n Be a 6 Type kn e 24 DIMENSIONS 56 DOS al REPRINT 4 Dual Analog output 27 Explosive Environments 2 6 Factory default 22 Firmware 5 49 Firmware upgrades RS232 only 49 Firmware Version 24 Frequently Asked Questions 50 2 55 Gas calibration 19 Gas dependence 45 Grounding 2 Hardware Version 24 Hellum gas
3. 45 SR Command i a uuu uu uu uuu T 47 Setup and configuration command 15 48 Firmware upgrades RS232 49 FAQ Frequently Asked 50 TOUDE SKOOT m 52 i E 53 C AMON S usu 55 Accessories and replacement part 58 Declaration OF CGOMOFN UN 59 60 For more information contact MKS Denmark Ndr Strandvej 119G DK 3150 Hellebaek Denmark Tel 45 44 92 92 99 Fax 45 44 92 94 99 E mail mksdenmark mksinst com MKS Instruments HPS Products 5330 Sterling Dr Boulder CO 80301 USA Tel 303 449 9861 Fax 303 449 2003 Safety information Symbols used The first symbol below is used throughout this manual to further define the safety concerns associated with the product The last two symbols identify other information in this manual that is essential or useful in achieving optimal performance from the 972B DualMag transducer Caution Refer to manual Failure to read message could result in personal injury or serious damage to the equipment or both Critical STOP Failure to read message could result in damage
4. 9 Safety information 2 Sensor CHECK waya 24 Sensor technology 4 Serial Number 24 Serial user interface 9 Service and 2 51 53 Setpoint functionality 12 Setpoint relay 12 Setup and configuration command list 48 Specifications 55 Supply Voltage 55 Temperature 6 24 Termination resistor 9 Time ON 24 Transducer installation electrical 7 Transducer installation mechanical 6 Trouble shooting 02 Unit calibration 19 klip A A 3 User Switch 5 23 Vacuum conneclions 6 VIDA NONS u m la 6 Warranty E rc rp pn 2 Zero
5. 45 Hydrogen gas 46 Inductive relay 12 Input Output Wiring 8 Internal volume 55 LED Status 5 LOCK u L ian AAS 23 972 DualMag 62 Magnetic interference 2 Manufaciturer 24 ijr 24 Modu cell 925 c 32 NAK Code 10 NAK l 13 23 52 Operating 55 Part number 3 Part Number 24 EDE uu 58 61 PDR900 controller relays 12 Pressure oulpult 15 Process compatibility 6 Query Command i list 47 gir 53 Repeatability 55 RS232 user interface 9 RS485 user interface
6. LET HELLE Ey EE 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Pressure torr 9 5 5 3 4 8 5 7 2 4 8 2 4 0 7 8 8 9 1 Analog out calibration 17 Edwards AIM X XL The Edwards AIM X XL emulation provides a log linear output Torr Pascal Vout ai d i 5 00E 5 6 67E 5 6 67E 3 7 513 1 00 5 1 33E 5 1 33E 3 6 714 Analog out VDC 0 4 1 0E 08 1 0E 07 1 0 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Pressure torr 972B DualMag 35 Operation manual Analog out calibration 18 Pfeiffer IKR251 The Pfeiffer IKR251 emulation provides a log linear output Tor Pasal Vout Q i 4 Analog out VDC 1 QVout 1 4 Vout logio P mbar 1 05 1 00E 08 1 00E 07 1 00 06 1 00 05 1 00 04 1 00 03 1 00E 02 Torr 10 625 Pa 8 5 Pressure torr Analog out calibration 19 Pfeiffer TPR265 The Pfeiffer TPR265 emulation provides a log linear output 9 8 74 3 1 33E 3 1 33 5 Analog out VDC 1 0 04 1 0 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure torr 972B DualMag 36 Operation manual Analog out calibration 20 OBE Special The OBE special emulation provides a linear output from 1 to 1000 Torr 10 Pascal
7. gt 5 9 5 2 Te lt 972 DualMag 32 Operation manual Analog out calibration 10 5 Baratron 0 1 Torr The 0 1 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 0 1 Torr Torr mbr Vout vi 1 00E 3 1 33E 3 1 33E 1 0 100 5 00E 3 6 66E 3 6 66E 1 0 500 5 00E 2 6 66 2 6 66 0 5 000 s 1 00E 1 1 33E 1 1 33E 1 10 000 1 00E 2 1 33E 2 1 33 0 1 000 Analog out VDC 0 0 00 1 0E 02 2 0E 02 3 0 02 4 0 02 5 0E 02 60 02 7 0E 02 80 02 9 0E 02 1 0E 01 Pressure torr Analog out calibration 11 MKS Baratron 1 Torr The 1 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 1 Torr Tor mbr Pasa Si j Analog out VDC on 0 0E 00 1 0E 01 2 0 01 3 0 01 4 0 01 5 0 01 6 0E 01 7 0E 01 8 0E 01 9 0E 01 1 0E 00 Analog out calibration 12 MKS Baratrun UI 1J The 10 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 10 Torr Pressure torr Torr Pascal Vout 1 00E 1 1 33E 1 1 33E 1 1 000 5 00E 1 6 66E 1 6 66E 1 5 000 1 00E0 1 33E0 1 33E 2 10 000 5 00 0 6 66 0 6 66E 2 5 000 1 00E 1 1 33E 1 1 33E 3 10 000 Analog out VDC Pressure torr 972B DualMag 33 Operation manual
8. xxxSD1 FF xxxACKBELOW FF Setpoint relay direction ABOVE or BELOW xxxSD2 FF If set to above relay will be energized above setpoint value If set to QXxxSD3 FF below relay will be energized below setpoint value Transducer information Calibration and adjustment information QXxxU FF xxxACKTORR FF Pressure unit setup Torr mbar or Pascal QXXXGT FF xxxACKNITROGEN FF MicroPirani sensor calibration gas Nitrogen Air Argon Helium Hydrogen 2 Neon CO2 Xenon zero adjustment and factory calibration zero adjustment and factory calibration adjustment and factory calibration scale adjustment and factory calibration xxxAO1 FF xxxACK30 FF Analog voltage output 1 Pressure assignment and calibration first digit is pressure assignment second and third digit is calibration QXxxAO2 FF xxxACK30 FF Analog voltage output 2 Pressure assignment and calibration first digit is pressure assignment second and third digit is calibration 972B DualMag Setup and configuration command list Setpoint setup and configuration Explanation xxxSP1 2 00E 1 FF xxxACK2 00E 1 FF Setpoint 1 3 switch value xxxSP2 2 00E 1 FF QXxxSP3 2 00E 1 FF xxxSH1 5 00E 1 FF xxxACK5 00E 1 FF Setpoint 1 3 hysteresis switch value QXxxSH2 5 00E 1 FF QXXxSH3 5 00E 1 FF QXXxXEN 1 ON FF xxxACKON FF Setpoint 1 3 enable status ON or OFF QXxxEN2 ON FF xxxSD1 BELOW FF
9. 20 Operation manual 100017133 972 DualMag Transducer Operation and Installation Manual Revision H September 2014
10. A Not likely when a confined space is evacuated and the pumping is stopped the pressure will rise because of out gassing mainly by water vapor The pressure can easily rise to a few Torr over time Q When the transducer is leak checked on a helium leak detector leak reading is building up slowly after approximately 30 seconds Is the transducer leaking A No the internal sealing of the 972B transducer uses elastomer viton sealing and consequently helium molecules can penetrate through the viton material and cause slow increase of helium leak readout If a leaking transducer is tested directly on a helium leak detector the leak is almost instant displayed Q Can the transducer be mounted in any orientation A Yes the transducer can be mounted in any orientation without compromise of performance or calibration However it is recommended not to mount the transducer with the flange port facing upwards to avoid contamination like particulates or liquids from entering the device Q Can the transducer withstand instant ventilation A Yes the MicroPirani and Cold cathode sensor elements are extremely robust to mechanical forces and can withstand continuously pressure cycles and instant air ventilation It s not recommended to perform instant ventilation when the Cold Cathode is turned on Q connect a valve to be controlled by the transducer relay contact A Driving inductive loads such as valves requires special precautions
11. Analog out calibration 13 MKS Baratron 100 Torr The 100 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 100 Torr mbar Pascal X Vout 1 333E 2 0 100 _____666 6 66 2 0 500 1 333E 3 0 100 66 66 6 66E 3 0 500 100 0 133 3 1 333E 4 1 000 Analog out VDC 0 10 20 so 40 50 5 70 M Yo 100 Pressure tor Analog out calibration 2 14 MKS Baratron 1000 Torr The 1000 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 1000 Torr Tor mbr Pascal 1 333E 3 0 100 66 66 6 66E 3 0 500 e522 133 3 1 333E 4 1 000 666 6 6 666E 4 5 000 1 333 2 1 3332 5 10 000 Analog out VDC 0 100 200 300 400 500 600 700 800 900 1 000 Pressure torr 972B DualMag 34 Operation manual Analog out calibration 16 Edwards AIM S SL The Edwards AIM S SL emulation provides a strongly non linear output Vout 2 2 Torr mbar Pascal 1 00E 8 1 80E 8 4 40E 8 6 10E 8 W 8 30 8 1 10 7 2 20 7 5 50E 7 7 40E 7 4 9 80E 7 1 30E 6 2 10E 6 3 40E 6 4 20E 6 5 20E 6 gt O C1 N Analog out VDC O N O IN 7 50E 6 9 00E 6 1 10 5 2 20E 5 3 20E 5 4 30E 5 5 90E 5 9 00E 5 1 40E 4 2 5E 4 5 0E 4 1 3 2 7 3 7 5E 3 g a
12. Low out gassing epoxy resin 28 6 cm 20 7 cm 21 7 cm Stainless steel 304 Stainless steel 304 360 g 5704 390 g 0 to 40 C 32 to 104 F 85 C 185 F 0 95 Non condensing IP40 54 1 Accuracy and repeatability are typical values measured in Nitrogen atmosphere after zero adjustment at ambient temperature 2 Special 972B version available with IP 54 rating 972 DualMag Operation manual Dimensions 25 flange 972 2 Inch 240 8 1 60 40 0 1 57 Dimensions CF2 75 flange P N 972 7 mm Inch 40 8 1 60 81 7 3 22 116 1 4 57 2 69 9 2 75 Dimensions KF40 flange P N 972 9 mm Inch 40 8 1 60 97 8 3 85 255 0 2 17 Accessories and replacement part numbers PDR900 controller PDR900 12 EU PDR900 Controller EU Schuko power cable PDR900 12 US PDR900 Controller US power cable PDR900 12 UK PDR900 Controller UK power cable PDR900 12 JP PDR900 Controller JP power cable mbar Pascal unit PDR900 12 DK PDR900 Controller Danish power cable PDR900 Transducer Cables for 972B 15 pin HD DSUB For transducer part number 9 2B x12x 972 13 972 15 For transducer part number 972 22 972 23 972B x25x PDR900 Connectors amp cables Part number 100010757 100013638 100013686 100013693 RS232 Cable for Hirschmann
13. eemks Technology for Productivity 972B DualMag Vacuum pressure transducer RS232 RS485 Display Operation and Installation Manual P N 100017133 972B DualMag Transducer Operation and Installation Manual Revision H September 2014 Extent of the Warranty MKS Instruments Inc HPS Products Inc and MKS Denmark ApS warrants the 972 DualMag Vacuum Transducer and its accessories to be free from defects in materials and workmanship for one 1 year from the date of shipment by HPS or authorized representative to the original purchaser PURCHASER Any product or parts of the product repaired or replaced by HPS under this warranty are warranted only for the remaining unexpired part of its one 1 year original warranty period After expiration of the applicable warranty period the PURCHASER shall be charged HPSw current prices for parts and labour plus any transportation for any repairs or replacement ALL EXPRESS AND IMPLIED WARRANTIES INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE LIMITED TO THE WARRANTY PERIOD NO WARRANTIES EXPRESS OR IMPLIED WILL APPLY AFTER THIS PERIOD Warranty Service The obligations of HPS TM under this warranty shall be at its option 1 to repair replace or adjust the product so that it meets applicable product specifications published by HPS TV or 2 to refund the purchase price What Is Not Covered The product is subject to above
14. 75K 85K PIN O O1 Q N Description RS232 Transmit RS232 Ground RS232 Receive RS232 Receive RS232 Ground RS232 Transmit RS232 Cable for Hirschmann and RJ45 FCC68 Transducers 19 1 Voltmeter Voltmeter Operation manual Serial user interface The 972B is as standard supplied with RS232 or RS485 user interface The user interface allows change of transducer parameters such as setpoint settings and calibration The serial interface uses the following data format 8 data bits 1 stop bit and no parity bit RS232 user interface The 972B is DCE Data Communication Equipment and can PC 972 Transducer be connected to DTE Data Terminal Equipment typically a DTE DCE PC The serial communication does not use hardware handshake The RS232 standard does not specify the maximum cable length but length depends on environment cable quality and communication speed In general cable spans shorter than 15m 50ft do not require any extra precautions The RS232 connection on transducers delivered with 6 pin Hirschmann and 8 pin RJ45 FCC68 connector is available at a separate connector Refer to Accessories and Replacement part number page 58 for RS232 programming cable The connector is located under the label on the top of the transducer RS485 user interface RS485 is a network communication system that enables the External 972 Transducer user to communicate with sev
15. m 4 0 1 00 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 1 00E 03 1 00E 02 Pressure Torr 972B DualMag 43 Operation manual Analog Output calibration 31 Varian Eysys Tor mbar Pascal 7 A 7 Analog out VDC 0 1 00 04 1 00 03 1 00E 02 1 00 01 1 00E 00 1 00E 01 1 00E 02 1 00E 03 Pressure Torr Analog Output calibration 32 Alcatel TA111 Tor mbar _ Pascal Vout 1 50E 03 2 00E 03 20001 0 1 225 03 3 00E 03 3 0001 0 2 3 00E 03 4 00E 03 4 00E 01 0 3 3 75 03 5 00 03 5 00E 01 04 4 50E 03 6 00E 03 6 00E 01 0 5 25E 03 7 00E 03 7 00E 01 OG 6 00E 03 8 00E 03 800E01 07 6 75E 03 9 00E 03 9 00E 01 08 7 50E 03 1 00E 02 1 00E 00 09 Fuss 0 x 25 0 1 0 2 0 3 0 4 0 5 0 7 8 25 03 1 10 02 1 10E 00 1 1 50E 02 2 00E 02 2 00E 00 1 8 2 25E 02 3 00E 02 3 00E 00 5 3 00E 02 4 00E 02 4 00E 00 3 75E 02 5 00E 02 5 00E 00 4 50E 02 6 00E 02 6 00E 00 1 2 5 s 5 4 7 7 8 1 84 75 9 2 9 2 Analog out VDC 4 85 lt 7 50E02 1 0001 1 0001 54 225E 01 300501 30001 77 3 0001 2400501 2400 01 _ 81 3 75 01 50001 500E 01 84 450E 01 6 0001 60001 86 875 S 9 92 1 0E 03 1 0 02 1 0E 01 1 0E 00 1 0E401 Pressure Torr 2 5 25E 02 7 00E 02 7 00E 00 485 8 225 00 3 00E 00 3 00E 02 92 Analog O
16. 2 800 0 9076 3 000 3 164 3 500 4 000 4 390 3 26 5 000 4 57 5 500 6 65 6 000 10 1 6 548 129 6 800 16 1 7 000 29 4 7 383 56 6 7 647 64 1 7 700 114 1 7 800 200 7 7 910 257 0 8 000 314 3 8 100 368 5 8 200 478 0 8 400 606 0 8 600 Analog out VDC a 972B DualMag 38 Operation manual Analog Output calibration 24 Thyracont MT241 1 5 The MT241 emulation provides a strongly none linear output with limited resolution in the low range and close to atmosphere mbar Pascal Vout 7 50E 4 1 00E 03 1 00 01 0 41 3 00E 3 4 00 03 4 00 01 0 48 0 0 55 0 61 0 79 1 1 37 _ 7 50E 2 1 00 01 1 00 01 1 83 1 50 1 2 00 01 2 00E 01 2 64 Analog out VDC 5 1 2 25E 1 3 00E 01 3 00E 01 3 00E 1 4 00E 01 4 00E 01 3 71 3 75E 1 5 00 01 5 00E 01 4 5 7 N w 4 50E 1 6 00 01 6 00E 01 4 45 6 00E 1 8 00E 01 8 00E 01 7 50 1 00E 00 1 00E 02 5 44 3 400E 00 4 00E 02 _ 7 96 75 6 00E 00 6 00E 02 8 5 8 100E 01 1 00E 03 9 01 15 200E 01 2 00 03 9 45 3 4 9 45 6 75 150 1 0 04 1 0 03 1 0 02 1 0 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr 9 78 9 85 150 9 92 9 95 600 8 00E 02 8 00 04 1 3 5 15 30 45 75 9 98 Analog Output calibration 25 Brooks Granville Phillips GP275 Emulation 5 6 VDC FS The GP275 emulation with 5 6VDC full scale provides a strongly non linear output with v
17. 240 FF xxxACK240 FF Cold cathode protect setpoint time and enable xxxPD 1 00E 2 FF QXXxACK1 00E 2 FF Cold cathode pressure dose setpoint xxx Transducer communication address 001 to 253 Broadcast addresses 254 255 Firmware upgrades 5232 only The 910 firmware can be upgraded by the user The following procedure should be used 1 Install the 900 Series firmware download software from the Documentation CD or download from www mksinst com vtsw Turn power off Hold down the User switch while turning power on Release the User switch Run the 900 Series firmware download software and start download l P i gt MKS Firwmare Downloader status M Code File z Log file 7 Document Download Exit 8 Transducer with RS485 interface cannot be firmware upgraded by the user Contact MKS customer service for upgrade 972B DualMag 49 Operation manual FAQ Frequently Asked Questions Applications Q Can the transducer and sensor element continuously withstand vibrations from a mechanical fore pump A Yes the MEMS MicroPirani sensor element and cold cathode sensor can withstand continuous vibrations Q Is the transducer compatible with fluorine gases A No the 972B is not intended for use in aggressive environments like semiconductor etch applications Q When the transducer is pumped down and isolated by closing a valve the pressure is raising Is the transducer leaking
18. 31 Varian Eyesys 32 Alcatel TA111 33 MKS 685 9253ACK15 FF 253A01 FF 9253ACK15 FF 30 26 Operation manual Dual analog output Optional The 972B is available with dual analog output which can be used to provide an alternative output for amplification of range or to emulate another transducer type while still using the MKS standard output This feature is a hardware option and must be specially ordered Refer to part number specifications page 3 The secondary analog output provides 12 bit resolution Command 253AO2 15 FF Command values 10 to 319 xy First digit x Use same parameters as primary analog output Second digit y Use same parameters as primary analog output Command reply 253ACK15 FF Query 253A02 FF Query reply 253ACK15 FF Factory default 30 972B DualMag 27 Operation manual Analog output calibration 1 Edwards APG L emulation The APG L emulation provides a strongly non linear output with very poor resolution in the low range and virtually no signal from 100 Torr to atmosphere Torr 3 00E 5 1 00E 4 5 00E 4 1 00E 3 2 00E 3 5 00E 3 7 00E 3 1 00E 2 2 00E 2 1 00E 1 2 00E 1 5 00E 1 eeen 666 Analog out VDC 0 1 Th 9 _ eat Y 1 0E 05 1 0 04 1 0 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 26 600 9 96 Pressure torr 50 6661 66 600 1013 101 300 10 00 Analog output calibration 2 Edwards APG 100 emulation The APG L emulation pr
19. AIR ARGON HELIUM HYDROGEN 20 NEON 2 XENON Command reply 253ACKARGON FF Query 253GT FF Query reply 253ACKARGON FF Factory default NITROGEN The cold cathode gas Nitrogen calibration does not change with the GT command Pressure unit calibration The transducer can provide digital and analog output in Torr mbar and Pascal pressure units When changing pressure unit all parameters such as setpoint settings are automatically converted to the new unit so it will represent the same pressure level All pressure parameters such as setpoint settings and calibration values must be entered in the actual transducer unit setting Change of pressure unit calibration setup Command 253U PASCAL FF Command values TORR MBAR PASCAL Command reply 253ACKPASCAL FF Query Q253U FF Query reply 253ACKTORR FF Factory default TORR The Torr unit is most common in the US and mbar is most common in Europe Pascal is the official pressure unit as specified by SI from the French Le Systeme International d Unit s and is widely used in Asia 972B DualMag 19 Operation manual MicroPirani Auto Zero limit Adjustment MZL The MicroPirani will be zero adjusted whenever the pressure measured by the Cold Cathode is lower than 8E 6 Torr MZL For applications that do not go below 8E 6 Torr the MicroPirani auto zero limit can be set to higher pressure Change of pressure auto zero limit Command 253MZL 1 00E 4 FF Comma
20. FF 160 Unrecognized message 253S FF 169 Invalid argument 253EN1 of FF 172 Value out of range Q253SP115 00E 9 FF 175 Command query character invalid Q253FVI FF 180 Protected setting locked 195 Control setpoint enabled ENC Q253FP ON FF 972B DualMag 10 Operation manual Baud rate The baud rate represents the communication speed The 972B supports 4800 9600 19200 38400 57600 115200 and 230400 baud rates The transducer is always delivered with 9600 bps factory default baud rate Change of Baud rate Command 253BR 19200 FF Command values 4800 9600 19200 38400 57600 115200 230400 Command reply 253ACK19200 FF Factory default 9600 The transducer will reply in the current baud rate and then change to the new value Addressing The transducer uses an addressable communication protocol that allows multiple MKS 900 Series transducer devices to be connected in RS485 network The address 15 required in both RS232 and RS485 communication The address can be set from 001 to 253 Address 254 and 255 are universal addresses which can be used to broadcast a command to all devices on the network Commands sent with address 254 will be executed by all transducers on the network and all transducers will transmit a reply Commands sent with address 255 will be executed by all transducers on the network but the transducers will not transmit replies For example use address 254 to communicate with a device if its ad
21. Refer to detailed description page 12 Q How many pressure cycles can the transducer withstand A Both the MicroPirani and Cold Cathode sensor element is very mechanical robust to pressure changes and there are no limits on the number of pressure cycles In applications where fast pressure cycles occur the Cold Cathode sensor can be sputtered and this can lead to change of accuracy Q The Cold Cathode sensor chamber has changed color Why A If the Cold Cathode is operated at high pressure gt 1 00E 4 Torr the inside walls of the cold cathode ionization cell can be sputtered This will change the color of the internal measuring chamber and can also result in change of measuring accuracy Analog output Q What is the update rate of the analog output A 16 times per second Q What is the maximum length of analog output cable A The length of analog cable depends on cable quality and electrical noise environment but cable length up to 100 m do not normally require any special precautions other than the cable must be screened Q The digital reading is correct but the analog output reading has some deviation from actual pressure A Check that the analog out is connected to a floating input and not an input that is connected to ground If connected analog out return is connected to ground the supply current will flow in the signal line and cause voltage drop and ground looping Digital output Q How fast I request pressure
22. X Vout 1 33E 1 1 33E 1 5 1 33E 0 1332 5 5005 5 5 5 005 7 Analog out VDC o 2 0 100 200 300 400 500 600 700 800 900 1 000 Pressure torr Analog out calibration 21 Edwards DV6M The Edwards DV6M emulation provides a strongly non linear output with up to 10 Torr Tor mbar Pascal Vout 25782 2 67 2 2 67E 0 5 33E 2 5 33E 0 Analog out VDC 1 33E 1 1 33 Analog out calibration 22 Edwards APG M The Edwards APG M emulation provides a strongly non linear output 7 Torr mbar Vot T 1 27E 1 1 27E 3 2 24E 1 2 24E 3 3 53E 1 3 53E 3 Analog out VDC cn f 1 0 04 1 0 03 1 0E 02 1 0 01 1 0 00 1 0 01 1 0E 02 1 0E 03 Pressure Torr 972 DualMag 37 Operation manual Analog Output calibration 23 Brooks Granville Phillips GP275 Emulation 9 VDC FS The GP275 with 9VDC full scale emulation provides a strongly non linear output with very poor resolution in the low range and close to atmospheric pressure mbar Pascal __ Voout 3 38E 3 8 4 81E 3 6 28E 3 0 090 d 7 03 3 0 100 1 52 2 0 200 2 45E 2 0 300 3 50E 2 0 400 4 67E 2 0 500 5 98E 2 0 600 7 42E 2 0 700 3 9 01E 2 0 800 1 07E 1 0 900 2 1 26 1 1 000 1 69 1 1 200 2 18E 1 1 400 aie A ponn 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 s 2 Pressure Torr 0 4092 2 000 0 4879 2 200 0 5755 2 400 0 6734 2 600 0 7836
23. it represents 0 5 VDC decade Torr or 0 5 VDC decade mbar or Pascal 7 on CN T TIqui EL Analog out VDC sen ii 4 HHH eet H Mil m 0 t 1 0 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr 6 0E 8 1 8891 6 0E 5 3 3891 6 0E 2 4 8891 60 65891 80 8 1 9515 8 0E 5 3 4515 80E2 49515 80 64515 6 0E 7 2 3891 6 0E 4 3 8891 6 0E 1 5 3891 60 6 8891 _2 0E 6 26505 20 3 4455 2 0 5650 40E 6 71 2 8010 40 53 1 43010 40 58000 6 0E6 2 8891 6 0E 3 14581 60 5890 80 6 2 9515 80E3 4 4515 80 5945 2 3010 4 0E 4 3 8010 4 0E 1 5 3010 6 8010 Analog output setup The 972B can emulate analog voltage outputs from other vacuum transducers The 972B analog output can be assigned to the MicroPirani sensor measurement PR1 Cold Cathode sensor measurement PR2 PR5 and the combined Cold cathode MicroPirani reading PR3 This is set by the first digit The second and third digit represents the analog output calibration The primary analog output provides 16 bit resolution Due to curve form and limits some of the alternative analog outputs will cause loss of measuring ran
24. not damaged if the transducer output enters Sensor defect mode page 15 or in case of power failure When designing pressure data collecting software and controlling loop make sure that the software does not interpret a communication error as a valid pressure value 972B DualMag 15 Operation manual Cold Cathode ignition startup When the Cold Cathode high voltage is enabled automatically by the MicroPirani or manually an ignition delay may occur The ignition waiting time is from less than a second at high pressures to minutes at low pressures The ignition time is a function of gas density cleanness of the gauge and presence of any other ion sources in the system The combined analog output and PR3 PR4 reading provides the MicroPirani reading until ignition has occurred and valid Cold Cathode measurements is present When the Cold Cathode is enabled but ionization not ignited the LED will flash red The LED will flash green when valid measurements are present Pressure Typical ignition time 1 00E 8 Torr 12 Minutes 1 00E 6 Torr 10 Seconds 1 00E 4 Torr 1 Second Resolution The digital pressure output can provide 3 digit or 4 digit values however the resolution is limited in certain parts of the measuring range MicroPirani 1 00E 5 to 1 00E 4 Torr 1 digit resolution 1 000 5 1 00 4 to 1 00E 3 Torr 2 digits resolution 1 200E 4 1 00E 3 to 900 Torr 3 or 4 digits resolution 1 234E 3 Cold Cathode 1 00E to 1 00E 8 Torr 2
25. or configuration parameters like setpoint settings it is always delivered with factory default parameters exchanged flange assembly should not be disposed the normal unsorted waste stream It should be deposited at an appropriate collection point or facility to enable recovery or recycling 972B Cold cathode maintenance When a Cold Cathode sensor is turned on and operated at pressures higher than 1 0E 3 Torr the inside wall of the ionization chamber can be sputtered by ions formed by the high energetic plasma Inert gases like argon are easier to ionize and consequently the sputter effect is more significant in such environment If the transducer is contaminated the pressure measurement will typical be lower than actual pressure Sputtering can also be visually detected since the inside wall of the transducer changes color When operated in oil lubricated pumping systems hydrocarbons can cause contamination of cold cathode measuring cell The cold cathode hour counter and pressure dose can be used to determine if service is required See page 16 and 24 If sputtering or contamination occurs the ionization cell kit or anode module can be changed from the flanges side without disassembling of the transducer The anode module p n 970B ANODE and cell kit p n 970B CELLKIT is available as spare parts The basic accuracy of the cold cathode sensor can change after replacement of anode The cell kit and anode module can a
26. out The transducer electronics can withstand 85 C 185 F when the power is turned off Contamination Locate and orient the 972B where contamination is least likely The MicroPirani sensor has a low filament temperature of only 35 C above ambient temperature therefore the MicroPirani is less prone to contamination by cracking products from fore vacuum pump oil If the transducer is backfilled with a liquid like pump oil the sensor element is likely permanently damaged The transducer cannot be cleaned using solvents Vibrations and instant air inrush The 972B sensor elements are extremely robust to mechanical forces like vibration and G forces The sensor element cannot be damaged by fast and repeated pressure cycles or instant inrush of air Vacuum connections The 972B transducer is available with different types of vacuum fittings When mounting the transducer always ensure that all vacuum sealing items and surfaces are clean without damage and free of particles Do not touch the vacuum flange sealing surface If the transducer will be exposed to pressures above atmospheric pressure make sure that proper vacuum fittings are used Ensure that the internal system pressure is at ambient pressure conditions before opening the vacuum system and removing any connections Pressure range The standard 972B transducer is internally sealed with elastomer viton sealing for use down to 1x108 Torr The 972B can be exposed to positive pressur
27. to PDR900 manual for setup of relay output Do not connect any external sources to the transducer relay pins when using it together with the PDR900 controller Always use the PDR900 relay outputs Setpoint functionality The setpoint relays can be activated either above or below the setpoint values The graphs below show the different relays stages in either below or above configuration The NC contact will always be closed in case of power failure Above Pressure 1 10 of Hysteresis SetPoint Value eresis Pressure SetPoint C NC o COM uo Activated C N N NC COMo COMe N NO on NO Deactivated Q Deactivated Deactivated w 972 DualMag 12 Operation manual When using the setpoint relay to control process equipment always take appropriate precautions to prevent system damage in case of transducer power failure The NC contact will be closed in case of transducer power failure If the transducer is supplied as a special version P N 972 with pre configured parameters such as setpoint settings the setup is per default locked The transducer will reply with error code 180 if the user tries to change parameters To change pre configured parameters refer to unlock procedure page 23 Setpoint setup by Serial inter
28. to the equipment Attention 8 Calls attention to important procedures practices or conditions General safety information The safety instructions should always be followed during installation and operation of the 972 DualMag transducer Pass safety information to all users Safety Precautions Electrical connections The 972B must be properly electrically connected in order to perform according to the specifications Output pins are not protected against wrong electrical connections Wrong electrical connections can cause permanent damage to the transducer or interference to measuring performance Refer to Electrical connections description page 7 Fuse The 972B power supply input has an internal thermal fuse The fuse is self recoverable and should not be changed Explosive Environments Do not use the 972B in presence of flammable gases or other explosive environments Corrosive Environments The 972B is not intended for use in corrosive environments Refer to Transducer installation page 6 Service and Repair Do not substitute parts or modify instrument other than described in Service and Repair page 53 Do not install substituted parts or perform any unauthorized modification to the instrument Return the instrument to a MKS Calibration and Service Center for service and repair to ensure all of the safety features are maintained Magnetic interference The 972B contains a strong permanent magnet that can interfere with
29. xxxACKBELOW FF Setpoint relay direction ABOVE or BELOW xxxSD2 BELOW FF If set to above relay will be energized above setpoint value QXxxSD3 BELOW FF If set to below relay will be energized below setpoint value Communication setup Explanation xxxBR 19200 FF xxxACK19200 FF Set communication Baud rate 4800 9600 19200 38400 57600 115200 230400 QXXXAD 123 FF QXXXACK 123 FF Set Transducer communication address 001 to 253 QXXxRSD OFF FF xxxACKOFF FF Turn on or off communication delay between receive and transmit sequence Calibration and adjustment Explanation QXXxXU MBAR FF QXXXACKMBAR FF Set pressure unit setup Torr mbar Pascal xxxGT ARGON FF xxxACKARGON FF Set MicroPirani sensor calibration gas Nitrogen Air Argon Executes MicroPirani zero adjustment Executes MicroPirani full scale atmospheric adjustment Executes Cold Cathode zero adjustment Executes Cold Cathode full scale adjustment Set analog voltage output 1 calibration Set analog voltage output 2 calibration MicroPirani auto zero limit Information setup QXXXUTIDUALMAG FF xxxACKDUALMAG FF_ Set transducer user tag User Switch xxxSW ION FF xxxACKON FF Enable disable user switch Cold Cathode setup Command Explanation xxxSLC 5 00E 4 FF CC turn on pressure xxxSHC 8 00E 4 FF CC turn off pressure QxxxSLP 1 00E 4 FF Setpoint low CC MP integration QxxxSHP 4 00E 4 FF xxxACK4 00E 4 FF Setpoint high CC MP integration xxxPRO
30. 0E 3 Command reply 253ACK8 00E 4 FF Query 253SHP FF Query reply 253ACK8 00E 4 FF Factory default 8 00E 4 Torr Value out of range Q253NAK 1 72 FF Cold cathode MicroPirani smoothing The combined output PR3 switches automatically between the MicroPirani and Cold Cathode sensor The high and low switch value can be set and should correspond to the cold cathode turn on and off pressure SLP SHP f a TU CC MP integ cuori 1E 4 1E 3 Sensor smoothing low value Command 253SLP 1 00E 4 FF Command values 1 00 4 to SHP turn off pressure Command reply 253ACK1 00E 4 FF Query 253SLP FF Query reply 253ACK1 00E 4 FF Factory default 1 00E 4 Torr Value out of range 253NAK172 FF When setting the turn on value the turn off value is automatically set to 30 higher than the low value 972B DualMag 17 Operation manual Sensor smoothing high value Command 253SHP1 8 00E 4 FF Command values 1 00E 4 to 5 00E 3 Command reply 253ACK8 00E 4 FF Query 253SHP FF Query reply 253ACK4 00E 4 FF Factory default 4 00E 4 Torr Value out of range 0253 172 Cold Cathode control setpoint The Cold Cathode control setpoint automatically turn on the Cold Cathode high voltage when the MicroPirani pressure is lower than the SLC value Command 253ENC ON FF Command values ON OFF Command reply 253ACKON FF Query Q253ENC FF Query reply 253ACKON FF Fa
31. 1 33 1 2446 100E 2 133E 2 133E 0 1 00E 1 1 00E 0 1 00E 1 1 00E 2 7 60E 2 Analog out VDC 1 0E 05 972B DualMag Vout 10010 1 286 6 304 Vout 10010 Pmbar X1 286 6 143 Vout 10010 1 286 3 572 1 0 04 1 0 03 1 0 02 1 0 01 1 0 00 1 0 01 1 0E 02 1 0E 03 Pressure torr 29 Operation manual Analog output calibration 5 Inficon MPG400 Pfeiffer PKR251 emulation Prom 10 Vout 6 875 0 6 Vout logio Pror x0 646 875 Pmbar 104 6 8 0 6 Vout logio Pmbar X0 6 6 8 Ppascal 10 Vout 5 6 0 6 Vout 10010 PPascal 0 6 5 6 81 1 00 3 1 33E 3 1 33E 1 5 075 a Analog out VDC 0 1 0E 08 1 0E 07 1 0E 06 1 0 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0 01 1 0E 02 1 0 03 Pressure torr Analog output calibration 6 Inficon BPG400 emulation 10 Vout 7 75 0 75 0 125 Vout logio 0 125 0 75 7 75 Pmbar 10 Vout0 75 Vout 10010 Pmbar 0 75 10 Voutl0 75 2 Vout 10010 2 x 0 75 Torr Pascal Vout 1 00E 3 1 33E 3 1 33E 1 5 593 Analog out VDC 0 i 1 i i 1 0E O8 1 0E 07 1 0E 06 1 0E 05 1 0 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure torr 972B DualMag 30 Operation manual Analog output calibration 7 Brooks Granville Phi
32. 2 9 00E 02 9 00E 04 5 61 7 60E 02 1 00E 03 1 00E 05 5 666 972 DualMag 42 Operation manual Analog Output calibration 29 6080 Tor Pascal 7 50E 06 3 75E 05 7 50E 05 3 00E 04 6 00E 04 7 50E 04 0 41 0 0 0 0 0 4 4 4 4 4 2 4 3 00E 03 4 00E 03 4 00E 01 0 48 3 5E 03 5 00E 03 5 00E 01 0 6 75E 03 9 00E 03 9 00E 01 0 55 1 50E 02 2 00E 02 2 00E 00 0 61 5 3 75E 02 5 00 02 5 00E 00 0 79 4 13E 02 5 50 02 5 50E 00 1 1 4 50E 02 6 00E 02 6 00E 00 1 37 6 00E 02 8 00E 02 8 00E 00 7 50E O2 1 00 01 1 00 01 1 83 1 50 01 2 00 01 2 00E 01 2 64 2 60E 01 3 47E 01 3 47E 01 3 4 12E 01 5 50E 01 5 50E 01 3 71 5 31 01 7 08 01 7 08E 01 4 5 7 Analog out VDC in O QJ N 7 50E 01 1 00E 00 1 00E 02 4 45 1 14E 00 1 51E 00 1 51E 02 1 72E 00 2 29E 00 2 29E 02 5 44 0 1 0 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E O3 Pressure Torr 3 00E 00 4 00E 00 4 00E 02 6 12 4 50E 00 6 00E 00 6 00E 02 4 88E 00 6 50E 00 6 50E 02 7 5 25E 00 7 00E 00 7 00E 02 7 96 6 00E 00 8 00E 00 8 00E 02 8 5 7 50E 00 1 00E 01 1 00E 03 9 01 1 50E 01 9 45 3 00E 01 9 4 50E 01 9 78 7 50E 01 9 85 1 50E 02 9 92 3 00E 02 9 95 4 50E 02 6 00E 02 9 98 7 60E 02 10 Analog Output calibration 30 Inficon PEG100 10 Tor Pascal Vout 1 00E 08 1 00 07 1 00 06 1 00E 04 5 00E 04 1 00E 03 1 00E 02 1 00E 05 1 33E 05 1 33E 03 6 176111 Analog out VDC
33. 54 1 00 2 3 2221 2 50 2 3 2342 5 00 2 3 2382 6 00 2 3 2389 7 00 2 3 2394 7 60 2 3 2396 8 00 2 3 2398 1 00 5 100E 4 2 50E 4 5 00E 4 7 50 4 100E 3 2 50E 3 5 00E 3 7 50 3 100E 2 2 50E 2 7 50E 2 1 00E 1 2 50E 1 5 00E 1 7 50 1 1 00 0 2 50E 0 5 00E 0 7 50E 0 100E 1 2 50E 1 5 00E 1 7 50E 1 100E 2 2 50E 2 5 00E 2 6 00E 2 7 00 2 7 60E 2 8 00E 2 Analog out calibration 9 MKS Moducell 325 amplified 3 times The Moducell x3 emulation is in curve form identical with the standard Moducell however to provide better signal resolution the signal is amplified by a factor three Torr mbar Pascal Vout 05 a SS n a 1 00E 5 0 753 1 00 4 0 757 91 2 50E 4 0 765 5 00E 4 0 778 8 7 50 4 0 790 1 00 3 0 802 7 2 50 3 0 871 5 00 3 0 975 7 50E 3 1 068 1 00E 2 1 154 2 50E 2 1 565 5 00E 2 2 060 7 50E 2 2 443 1 00E 1 2 762 3 2 50E 1 4 047 5 00E 1 5 251 2 7 50E 1 5 996 1 00E 0 6 516 14 2 50E 0 7 954 5 00E 0 8 704 mas 7 50E 0 9 007 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 00E 1 9 171 Pressure torr 2 50E 1 9 492 5 00E 1 9 607 7 50E 1 9 646 1 00E 2 9 666 2 50E 2 9 702 5 00E 2 9 715 6 00E 2 9 717 7 00E 2 9 718 7 60E 2 Sure 8 00E 2
34. Cathode turn setpoint SHC 8 00E 4 x Cold Cathode control setpoint x Cold Cathode protect setpoint PRO OFF x MP CC Smoothing low limit SLP 1 00E 4 x MP CC Smoothing high limit SHP 4 00E 4 x MicroPirani auto Zero limit MZL 1 00E 4 x x 1 If the transducer is delivered with other analog output than standard mks part number specified then the factory default value will be specified by the specials part number Calibration setup Description Command Parameter FD FD ALL Gas calibration MP Vacuum adjustment VAC Factory adjustment value x x MP Span atmospheric adjustment ATM Factory adjustment value x x CC Vacuum adjustment VAC3 Factory adjustment value x x CC full scale adjustment CFS Factory adjustment value x x Pressure unit U TORR x Resetting to factory default The factory default command resets all or certain parameters of the 972B to factory default settings as listed above If other digital communication setup than factory default values are used then the communication will be lost after execution of factory default and the transceiver equipment should be set to transducer values The factory default command resets parameters to default values and consequently user adjustments setup and factory configured parameters are lost Use with caution Command Command values 0253FD ALL FF None ALL UNLOCK LOCK VAC VAC3 ATM CFS Command reply 0253AC
35. Command 253PD 1 00E 2 FF Command values 1 00E 6 to 100 Command reply 0253ACK1 00E 2 FF Query 0253PD FF Query reply 0253ACK1 00E 2 FF Factory default 1 00E 00 Torr Value out of range 0253 172 972B DualMag 16 Operation manual Cold Cathode setup The 972B can be configured to the process and application by individually programming of the cold cathode turn on and off pressure and pressure settings for MicroPirani integration Cold cathode auto turn on and off The 972B has a control setpoint for turning the cold Cc CC MP intearatio MicroPiran cathode on and off The SLC command sets the turn on pressure and SHC command sets the turn off pressure 1E 4 1E 3 SLC SHC If the Cold Cathode control setpoint is disabled the sensor control must be executed manually with the FP command Operation of the cold cathode at higher pressure than 1E 3 Torr can cause loss of measurement performance If the SLC and SHC value are too close the Cold Cathode can turn off immediately after turning on Cold cathode turn on pressure Only if ENC is ON Command Q253SLC 1 00E 4 FF Command values 1 00E 4 to 5 00E 3 Command reply 0253ACK1 00E 4 FF Query 253SLC FF Query reply 0253ACK5 00E 4 FF Factory default 5 00E 4 Torr Value out of range 0253NAK172 FF Cold cathode turn off pressure Only if ENC is ON Command 253SHC 8 00E 4 FF Command values gt SLC turn on pressure or 1 00E 4 to 5 0
36. FF Reset to default Q253FDIVAC FF Factory default Factory adjustment value Value out off range 9253 172 After execution of zero adjustment the PR1 reading will be 1x10 Torr If the pressure measured by the transducer is higher than approximately 1x107 Torr then the zero adjustment cannot be executed This indicates that the transducer is contaminated and should be serviced See page 53 for Service and Repair procedures The query feature 5 the delta value between the user offset value and factory default value This can be used to monitor the positive and negative offset trend regardless of how many times the zero adjustment is executed Zero Adjustment by use of the User switch The transducer can also be adjusted by activating the user switch When using the switch the transducer must be evacuated to a pressure below 8 10 Torr Press down the switch for 2 seconds and the LED will flash green three times to acknowledge the zero adjustment has been executed successfully The LED will flash red three times if the adjustment has failed 972 DualMag 20 Operation manual MicroPirani Atmospheric adjustment The MicroPirani atmospheric adjustment allows the user to adjust the MicroPirani full scale reading Vent the transducer to atmospheric pressure using the gas that corresponds to the gas calibration setup Atmospheric adjustment can only be executed with air or Nitrogen Atmospheric adjustment only changes
37. KFD FF 972B DualMag 22 Operation manual Transducer lock function To ensure that no unauthorized personal are able to change transducer setup and parameters the transducer lock function can prevent direct access to parameter changes Transducers delivered with pre configured custom specified parameters special part number are per default locked and will reply with 180 if the user tries to change locked parameters The unlock procedure must be executed to change these parameters Disable lock function command Command Command reply 253FD UNLOCK FF 253ACKFD FF Enable lock function command Command Command reply 9253FDILOCK FF 253ACKFD FF Standard transducer 7 digits part number 972B xxxx Factory default Transducer unlocked Special configuration transducer 11 digits part number 972 Factory default Transducer locked If the transducer is delivered with special configuration the lock function will only be temporally disabled and will be enabled again after cycling power cycle or executing the enable lock command The 972B transducer can be delivered with factory locked tamperproof settings for safety interlock applications This option is defined in the special settings If delivered with factory lock the transducer settings can only by changed by return of gauge to MKS User Switch Command The User Switch function can be disabled to prevent accidental execution of zero
38. aced with new parts 1 For units with S N 1202347357 and lower use P N 970B ANODE Operation manual Specifications Measuring range N2 and Air MicroPirani Accuracy 1x104 to 1x10 Torr 1x10 to 100 Torr 100 Torr to Atm Repeatability N2 1x10 to 100 Torr Cold cathode Accuracy Cathode 1x10 to 1x10 Torr Supply Voltage Power consumption Fuse thermal recoverable Analog output MKS standard Analog output 1 resolution Analog output 2 resolution Analog output impedance Analog output update rate Setpoint relay range Setpoint relay contact rating Setpoint relay contact resistance Setpoint relay contact endurance 30VDC 1A load Setpoint relay contact endurance 30VDC 0 2A load Setpoint relay response time Materials exposed to vacuum Internal volume KF25 flange 2 75 flange KF40 flange Housing material Flange material Weight KF25 flange 2 75 flange KF40 flange Operating temperature Bake out temperature Power off Humidity Ingress Protection Rating 1x10 Torr to atmosphere 10 of reading 5 of reading 25 of reading 2 of reading 30 of reading 9 30 VDC 2 Watt 200 mA 1 9 VDC 16 bit 12 bit 100 O 16 Hz 1x10 to 500 Torr 1A 30 VDC ac resistive load 100 mQ max 100 000 min 2 000 000 min 100 ms 304 stainless steel 403 stainless steel Ceramic Al203 Silicon SiO2 Si3N4 Gold Viton
39. and RJ45 FCC68 Transducers Description 100013367 Cable RS232 3m 972B Transducer calibration certificate 100013147 DKD Calibration certificate Europe 100013200 Internal Calibration certificate Europe 972B Transducer repair kit Circlip ring plier Manufacturer Model Type of Equipment CE Declaration of Conformity MKS Denmark ApS Ndr Strandvej 119G DK 3150 Hellebaek Denmark 972B DualMag Vacuum pressure transducer Application of Council Directive s Type of Equipment Vacuum pressure transducer Application of Council Directive s 2004 108 EC Electromagnetic Compatibility Standard s to which conformity is declared EN61326 1 2006 Emissions EN 55011 1997 Immunity EN 61000 4 2 EN 61000 4 3 EN 61000 4 4 EN 61000 4 6 Safety EN 61010 1 2001 EMC requirements for electrical equipment for measurement control and laboratory use Industrial location Limits and Methods of measurements of radio disturbances characteristic of industrial scientific medical RF equipment Class B Group1 Electrostatic discharge Radiated RF electromagnetic fields EFT burst Conducted disturbances by RF fields Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use the undersigned hereby declare that the equipment above conforms to the above Directive s and Standard s when installed in accordance with specifications specified in this short form manual and O
40. and atmospheric adjustments Command 0253SW OFF FF Command values Command reply Query Query reply Factory default Transducer test ON OFF Q253ACKOFF FF 253SW FF 253ACKON FF ON The transducer test command can be used to visually indentify a transducer If the test mode is enabled the LED will flash with a 1 sec cycle Command Command values Command reply Query Query reply Factory default 972 DualMag 253TSTION FF ON OFF 253ACKON FF 253TST FF 9253ACKON FF OFF 23 Operation manual Status Query Commands Query replies are examples that might be different from actual transducer reply Device Type DT Specifies transducer device type name Query 0253DT FF Query reply 253ACKDUALMAG FF Firmware Version FV Specifies transducer firmware version Query 253FV FF Query reply 253ACK1 12 FF Hardware Version HV Specifies transducer hardware version Query Q253HV FF Query reply Q253ACKA FF Manufacturer MF Specifies transducer manufacturer Query 0253MF FF Query reply 253ACKMKS FF Model MD Specifies transducer model number Query 253MD FF Query reply 0253ACK972B FF Part Number PN opecifies transducer part number Query 253PN FF Query reply 253ACK972B 11030 FF Serial Number SN Specifies transducer serial number Query 253SN FF Query reply 253ACK0925123456 FF Time ON TIM The TIM command returns the number of hours t
41. ansducer repair required pressure Corroded sensor Transducer repair required Incorrect ATM adjustment has been executed Other gas or gas trace present than transducer gas setting Cold Cathode does not provide If the Cold cathode is turned on at low pressure 1 00E 7 measurements Torr or is contaminated a delay can occur from turning on high voltage to the ionization begins At low pressure the delay can be several minutes Cold Cathode value is lower than If the Cold Cathode sensor has been operated a too high actual pressure pressure or exposed to fast pressure cycles the sensor can be sputtered Sputtering of sensor will normally provide lower reading than actual pressure Setpoint relay does not trip Setpoint not enabled Setpoint value not set to proper value Setpoint direction is different than the user expects Check electrical connection Check part number to see if transducer has setpoint relays No analog output Power supply turned off Check electrical connections Status LED illuminating red Sensor element defect Refer to Service and Repair page 53 972B DualMag 52 w Operation manual Service and Repair The 972B Transducer repair kit includes the flange and calibrated sensor 1 electronics and can be used for quick and easy customer in field service of the 972 Transducer After the installation of the repair kit the transducer will be operating as a new transducer Transducers with integrated displa
42. arm up time Reliable measurements are typically available within 1 minute The cold cathode has a stabilization of a few minutes after turning the high voltage on Q Will the transducer retain user calibration after power is shut off A Yes all transducer parameters including calibration data are stored internally in the transducer non volatile memory Q The 972B reads 900 Torr at atmospheric pressure of 60 Torr A The transducer is based on measurement of thermal conductivity and if exposed to ambient pressure the higher thermal conductivity of air will cause the transducer to read higher values The transducer is per factory default calibrated with Nitrogen Service and repair Q Can the sensor element be changed if contaminated A No the sensor elements cannot be changed without its measuring electronics The transducer flange assembly can be exchanged with the 972B repair kit Refer to Service and Repair page 53 Q How offend does the Cold Cathode sensor require cleaning A Contaminants such as oil vapors from oil lubricated for pump will cause carbonaceous deposits which will affect sensitivity of the gauge The cleaning interval depends on contamination type and pressure range but can be down to a few hundred of hours of Cold Cathode operation time Cold Cathode time on can be read by using the command 254TIM2 FF The anode module and screens can be removed and mechanical polished or replaced Q 24 VDC supply voltage
43. be downloaded at www mksinst com vtsw Advanced Restore Delauks In OEM applications transducer communication software routines are normally integrated with other system control software Query and Command Syntax Queries return current parameter settings commands change the parameter setting according to the value the user enters into the command syntax Each query or command must begin with the attention character and end with the termination FF Command syntax for an information query lt device address query FF Command syntax for a command lt device address command parameter FF The command set allows upper and lower case ASCII characters Response Syntax ACK NAK The ASCII characters ACK or NAK preface the query or command response string The ACK sequence signifies the message was processed successfully The NAK sequence indicates there was an error The response to a query or a successful command is Q device address ACK data FF The response to a message with an error is lt device address NAK NAK code gt FF Examples ACK response 253ACK9600 FF baud rate changed to 9600 response 253NAK160 FF command had an error possible typo The following list provides descriptions of the NAK codes that may be returned NAK Code Error description Example 8 Zero adjustment at too high pressure Q253VAC FF 9 Atmospheric adjustment at too low pressure 253ATM 7 60
44. combined reading CMB the Cold Cathode CC or MicroPirani measurement PIR 972B transducer has auto hysteresis setting of 10 of the setpoint value that overwrites the current hysteresis value whenever the setpoint value or setpoint direction is changed If other hysteresis value than 10 is required first set the setpoint value and setpoint direction before setting hysteresis value 972B DualMag 13 Operation manual Setpoint safety delay The setpoint safety delay function requires 5 continuously measurements that exceeds setpoint value before the relay is tripped This feature prevents that noise or pressure pulse can trig the relay If fast setpoint response is required the setpoint safety delay can be disabled Setpoint safety delay Command 253SPDION FF Command values ON OFF Command reply 253ACKON FF Query 253SPD FF Query reply 253ACKON FF Factory default ON Display The 972B with integrated display provides real time pressure readout pressure trend and setpoint status The display setup can be changed via the intuitive menu interface The settings menu views transducer settings Use the A and Y keys to scroll the cursor and select menu point by pressing the key Sensor Select MicroPirani PIR Cold Cathode CC or combined reading Unit Select pressure unit Torr mbar or Pascal Will not change transducer unit setup Orientation Select display orientation Settings View tra
45. ctory default ON Cold Cathode protect setpoint The Cold Cathode protect setpoint automatically turns off the Cold Cathode high voltage if the cold cathode measurement exceeds 5 00E 3 Torr for 120 seconds The protect setpoint can be turned off disabled or time set between 0 and 999 seconds Command 253PRO ON FF Command values ON 120 OFF 0 to 999 seconds Command reply 253ACK120 FF Query Q253PRO FF Query reply 253ACK120 FF Factory default OFF Cold Cathode power If the Cold Cathode control setpoint is disabled OFF then the Cold Cathode high voltage can be manually controlled by the FP command Command 253FP ION FF Command values ON OFF Command reply 253ACKON FF Query 253FP FF Query reply 253ACKOFF FF Factory default OFF ENC is ON 253NAK195 FF If Cold Cathode control setpoint ENC is on the Cold Cathode power cannot be controlled manually Cold Cathode pressure dose The Cold Cathode pressure dose continuously monitors the Cold Cathode time on as function of the pressure If the cold cathode is on for 100 hours at 1E 4 Torr the pressure dose is 100x1E 4 1E 2 Torr hours The pressure dose readout can be used to determine the time interval between Cold Cathode maintenance and service Pressure dose request Query Q253TIM3 FF Query reply 253ACK1 23E 4 FF 972 DualMag 18 Operation manual Calibration and adjustment The 972B is factory calibrated when delivered and in many applicat
46. digits resolution 1 50E 8 5 00E 3 to 1 00E 7 Torr 3 digits resolution 1 230E 4 Measuring noise External sources can interfere with the sensor signal and cause noise in the signal The low measuring range is most sensitive to measuring noise due to low signal levels Magnetic interference External magnetic sources can interfere with the Cold Cathode sensor and cause measurement deviation from actual pressure Avoid having magnetic material located close to the 972 Transducer Cold Cathode pressure dose The Cold Cathode pressure dose continuously monitors the Cold Cathode time on as function of the pressure If the cold cathode is on for 100 hours at 1E 4 Torr the pressure dose is 100x1E 4 1E 2 Torr hours The pressure dose readout can be used to determine the time interval between Cold Cathode maintenance and service Pressure dose request Query Q253TIM3 FF Query reply 0253ACK1 23E 4 FF The pressure dose reading is only a rough indication of the cold cathode status When the cold cathode is contaminated the sensitivity of the gauge is decreased and it will provide a lower reading than actual pressure Therefore the calculated pressure dose can be lower than the actual pressure dose Cold Cathode pressure dose setpoint The Cold Cathode pressure dose setpoint provides an indication when a defined pressure dose is exceeded The transducer status query will provide R when pressure dose is exceeded Pressure dose setpoint command
47. dress is unknown Change of Address Command 253AD 123 FF Command values 001 to 253 Command reply 253ACK123 FF Query 0254AD FF Query reply 925 253 Factory default 253 Communication delay RS485 The 972B half duplex RS485 interface requires that data is transmitted and received on the same communication line Some RS485 transceiver equipment have a settling time when changing from transmit to receive mode If the transducer replies too fast the first character s will not be received as the following example illustrates Sending pressure request 254PR1 FF Receiving data 23E 4 FF Correct data 253ACK1 23E 4 FF The RS delay introduces a baud rate dependent delay between receive and transmit sequence to prevent loss of data in the receiving string Communication delay Command 0253RSD ON FF Command values ON OFF Command reply 253ACKON FF Query Q253RSD FF Query reply 253ACKON FF Factory default ON 972B DualMag 11 Operation manual Setpoint relays The 972B can be ordered with 3 mechanical relays that can be used for controlling external process equipment The relay has closing and breaking contacts and the contacts are rated 30 VDC 1A resistive load If the transducer is supplied without setpoint relays the setpoint commands can still be accessed Refer to part number definition page 3 to verify if setpoint relays are included Inductive relay load Special precautions should be tak
48. e the worse the error will be Do not connect the setpoint relay terminals to the analog output Correct connection of analog output to floating input Incorrect connection of analog output to none floating input 972B DualMag f Operation manual Input Output Wiring 972B I O Connector 15 pin 15 pin male HD DSUB 972B I O Connector 6 pin PESCA 972B I O Connector 8 pin rea PIN Description PIN O Z TU RS485 RS232 Transmit RS485 RS232 Receive Power 9 30 VDC Power return Analog Output Analog Output _ m 9 30Vde Relay 1 Normally Open 2 3 Relay 1 Common p Relay 1 Normally Closed 4 aei Relay 2 Normally Closed Relay 2 Common Relay 2 Normally Open Relay 3 Normally Closed or Analog Out 2 Hardware option Relay 3 Common Relay 3 Normally Open Description Identification resistor 11K HV OFF 9K1 HV ON Analog Output Analog Output Power 9 30 VDC Power return Chassis r Description Power 9 30 VDC Power return Analog Output Identification resistor 7 Analog Output Setpoint output Not Connected Not Connected I 1010101 111 1 Identification resistor varies with part number Part number 972B x1380 972B x1580 972B RS232 connector 6 pin Hirschmann 8 pin RJ45 FCC68 P N 10001367 972 DualMag Value
49. e up to 3000 Torr absolute 972B DualMag 6 Operation manual Transducer installation electrical The 972B is available with different input output connectors Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors Ensure a low impedance electrical connection between the 972B transducer body and the grounded vacuum system to shield the sensor from external electromagnetic sources Ensure that the analog output is connected to a floating input To comply with EN61326 1 immunity requirements use a braided shielded cable Connect the braid to the metal hoods at both ends of the cable with the end for power supply connected to earth ground The power supply input is 9 to 30 VDC The power supply input is protected by an internal thermal fuse The fuse is self recoverable do not replace it Damage may occur to the circuitry if excessive voltage is applied polarity reversed or if a wrong connection is made If using the analog voltage output connect the positive analog out and negative analog out pins to differential input voltmeter or an analog to digital A D converter Do not connect the negative side of the analog output to the negative side of the power supply input or to any other ground Doing so will cause half of the power current to flow through this wire Measurement errors the output voltage may be seen due to the voltage drop from this current The longer the cabl
50. e upgrade mode see page 49 or Power off Transducer installation mechanical Temperatures lower than 0 C or higher than 40 C Corrosive or explosive gases Direct sunlight or other heat sources Magnetic fields Do or install the 972B transducer where the following conditions occur Process compatibility The 972B transducer is intended for use in relatively clean environments The transducer cannot be used in corrosive environments like a semiconductor etch process chamber where aggressive gases such 5 are used If the 972B transducer is located close to a gas source connection like a flow controller or leak valve the transducer pressure measurement can be higher than the actual chamber pressure Location close to a pumping system connection can cause a lower pressure measurement than actual chamber pressure The 972B transducer and its sensor design can be mounted in any orientation without compromising accuracy Explosive Environments The 972B should not be used in explosive environments due to its high voltage potential that can cause ignition Temperature The 972B has an active and individual sensor temperature compensation circuit that ensures accurate measurement in a wide temperature range For best measuring performance avoid large temperature gradients and direct cooling like air condition air stream or direct heating like a pump exhaust stream Unas i NOT RECOMMENDED Bake
51. en when driving inductive loads at the relay contact When an inductive load like a solenoid is energized the in rush current is significant higher than the regular load current In rush currents exceeding the relay contact rating can cause reduction of relay contact life time or contact reliability When a solenoid is de energized the collapsing magnetic field can cause significant voltage spikes These spikes can couple capacitive from cable to cable and interfere with measuring electronics or transducer signal protection Inadequate protection can cause permanent damage to the transducer or interfere with the analog output signal Always ensure that inductive inrush currents do not exceed relay contact rating Relay Contact D Driving inductive loads via the setpoint relay contacts requires de energizing spike An arc suppression network as shown schematically to the right is recommended The values of the capacitance C and the resistance R can be calculated by the following equations C x 107 R E l where C is in Farad R is in Ohm is DC or ACpeak load current in Ampere E is DC or ACpeak Source voltage in Volt 1 50 E Note that Rmin 0 5 and Cmn 1x10 F D is a fast transient suppression diode PDR900 controller relays The PDR900 controller has power relays that can drive higher current loads and voltages than the transducer relays If the transducer is used with the PDR900 controller refer
52. eral units on the same RS485 Unit RS485 communication line m RS485 is a balanced communication system because signal on one wire is ideally the exact opposite of the signal on the second wire Compared to RS232 communication RS485 allows significantly longer cable span The maximum length of cable span depends on the environment cable quality and communication speed but relative long cable spans up to 1 200m 4 000 ft is possible There 2 wires other than ground that are used to transmit the digital RS485 signal The 972B uses half duplex communication Always use high quality shielded data cables for serial communication For long cable runs use twisted pairs See also Accessory and Replacement part number page 58 The EIA 485 and NMEA standards specification states that signal A is the inverting and signal B is the non inverting or This is in conflict with the A B naming used by a number of different transceiver manufacturers which 15 incorrect but their practice is used throughout the industry Therefore care must be taken when using A B naming In addition to the A and B connections the EIA standard also specifies a third interconnection point called C which is the common ground At high communication baud rates and when using long cable runs a termination resistor of typical 120 Ohm should be connected between pin 1 and 2 at the 972 DSUB connector and between pin A and B at the data communication equ
53. erials before the product will be accepted by HPS for repair and or replacement In the course of implementing this policy HPS V Customer Service Personnel may inquire of the PURCHASER whether the product has been contaminated with or exposed to potentially corrosive reactive harmful or radioactive materials gases or chemicals when the PURCHASER requests a return authorization Notwithstanding such inquiries it is the responsibility of the PURCHASER to ensure that no products are returned to HPS which have been contaminated in the aforementioned manner Other Rights and Remedies These remedies are exclusive HPS SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES FOR ANTICIPATED OR LOST PROFITS INCIDENTAL DAMAGES OR LOSS OF TIME OR OTHER LOSSES INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT COVERED BY THIS WARRANTY OR OTHERWISE Some states do not allow exclusion or limitation of incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts If such laws apply the limitations or exclusions expressed herein may not apply to PURCHASER Il Unless otherwise explicitly agreed in writing it is understood that these are the only written warranties given HPS Any statements made by any persons including representatives of HPS which are inconsistent or in conflict with the terms of the warranty shall not be binding on HPSrwunless reduced to writing and appr
54. ery poor resolution in the low range and close to atmospheric pressure Tor mbar Pascal Vout gt 8 7 Analog out VDC m 3 1 0 04 1 0 03 1 0 02 1 0E 01 1 0 00 1 0E 01 1 0E 02 1 0E 03 972 DualMag 39 Operation manual Analog Output calibration 26 Edwards APG100 LC The APG100 L emulation provides a strongly none linear output with limited resolution in the low range and close to atmosphere Torr mbar Pascal 7 50 06 1 70 04 3 75 04 8 10 04 1 26E 03 Vout 10 1 95E 03 2 88E 03 3 86E 03 5 15E 03 7 88E 03 1 17E 02 1 58E 02 2 08E 02 2 59E 02 3 12E 02 Analog out VDC 3 78E 02 5 04E 02 5 04E 00 4 44E 02 5 92E 02 5 92E 00 6 56E 02 8 74 02 8 74E 00 r 9 53E 02 1 28E 01 1 67E 01 2 18E 01 2 68E 01 3 26E 01 4 00E 01 4 80E 01 5 75E 01 6 92E 01 8 55E 01 1 05E 00 1 25E 00 1 44E 00 1 79E 00 2 21E 00 2 63E 00 3 13E 00 4 05E 00 5 30E 00 7 27E 00 9 68E 00 1 25E 01 1 0 04 1 0E 03 1 0E 02 1 0 01 1 0 400 1 0E 01 1 0E 02 1 0E 03 Pressure Torr 2 2 2 2 2 3 3 3 3 4 4 4 5 5 5 5 6 6 7 7 7 7 8 8 8 9 9 9 9 1 55E 01 2 54E 01 4 74E 01 1 08E 02 9 95 7 60E 02 2 1 2 4 6 8 3 2 4 6 8 4 2 4 6 5 2 4 6 8 2 4 7 2 4 6 8 2 4 8 2 4 5 T 10 972B DualMag 40 Operation manual Analog Output calibration 27 Edwards APG100 M The APG100 M emulation provides a strongly
55. face The correct procedure for setting up setpoint parameters are 1 Enter setpoint value 5 00E 1 Torr Command 253SP1 5 00E 1 FF Reply 253ACK5 00E 1 FF 2 Select setpoint direction ABOVE BELOW Command 253SD1 BELOW FF Reply Q253ACKBELOW FF 3 Enter setpoint hysteresis value if other than default 10 of setpoint value is required Command 253SH1 4 00E 1 FF Reply 253ACK4 00E 1 FF 4 Enable setpoint OFF CMB PIR CC Command 253EN1 CC FF Reply 253ACKCC FF Setpoint setup by PDR900 Controller 1 Edit gt Setpoint gt Setpoint 1 gt Setpoint Value 1 Enter pressure Enter setpoint value 5 00E 1 Torr 5 00E 1 Torr 2 Edit Setpoint Setpoint 1 Direction 1 Ditection 1 Select setpoint direction BELOW 3 Edit Setpoint Setpoint 1 Hysteresis 1 Enter setpoint hysteresis value Only if other than default 10 of setpoint value is required Enter pressure 6 00E 1 Torr 4 Edit gt Setpoint gt Setpoint 1 Enable 1 Enable 1 Enable setpoint CMB Setpoint value The setpoint value is the pressure either below or above which the setpoint relay will be energized Setpoint hysteresis value The hysteresis value is the pressure value at which the setpoint relay will be de energized Setpoint direction The setpoint direction determines whether the relay is energized above or below the setpoint value Enable setpoint The enable setpoint command enables disables or assigns the setpoint relay to either the
56. ge and accuracy For best performance use the standard MKS analog output Change of analog output setup does not interfere on digital reading Change of analog output setup Command Command values First digit x Second digit y Command reply Query Query reply Factory default 972 DualMag 253A01 15 FF 10 to 319 xy 1 PR1 MicroPirani pressure value assignment 2 PR2 Cold Cathode pressure value assignment 3 PR3 Combined pressure value assignment 0 MKS Standard 0 5 VDC decade 1 Edwards APG L 1 99 10 VDC 2 Edwards APG100 3 Edwards WRG 4 Inficon PSG500 Oerlikon Leybold TTR91 5 Inficon MPG400 Pfeiffer PKR251 6 Inficon BPG400 MKS 999 Quattro 7 Brooks Granville Phillips GP275 8 MKS Moducell 325 9 MKS Moducell 325 x3 10 MKS Baratron 0 1 Torr 0 10 VDC 11 MKS Baratron 1 Torr 0 10 VDC Hasting 2002 Channel 2 12 MKS Baratron 10 Torr 0 10 VDC 13 MKS Baratron 100 Torr 0 10 VDC 14 MKS Baratron 1000 Torr 0 10 VDC Hasting 2002 Channel 1 15 Piezo differential output 16 Edwards AIM S SL 17 Edwards AIM X XL 18 Pfeiffer IKR251 19 Pfeiffer TPR 265 20 OBE Channel 2 21 Edwards DV6M 22 Edwards APG M 23 Brooks Granville Phillips GP275 0 9VDC 24 MT 241 1 25 Brooks Granville Phillips GP275 0 5 6VDC 26 Edwards APG100 LC 2 Edwards APG100M 28 MKS 907 29 K6080 06 30 Inficon PEG100
57. has been connected to analog output Is the transducer damaged A Likely the analog output is not protected against applying power to the output pin Q Reverse voltage has been connected to power supply input Is the transducer damaged A Not likely the transducer power supply circuit has reverse voltage and over voltage protection however MKS cannot guarantee that the transducer will not be damaged Q The status LED is constantly illuminating red A The red status indicates a defect MicroPirani sensor element most likely damaged by corrosion or contamination Refer to Service and Repair page 53 972B DualMag 51 Operation manual Trouble shooting Symptom Possible Cause Remedy No digital communication Check electrical connections 3 wires from transducer to communication equipment Transducer and communication equipment baud rate matches Use of incorrect transducer address Try address 254 Attention characters missing Termination characters missing FF Incorrect pressure value Other gas present than transducer gas setting or trace of gas Contaminated sensor Transducer repair required Corroded sensor Transducer repair required Incorrect pressure value at low Contaminated sensor Transducer repair required pressure Corroded sensor Transducer repair required Incorrect Vac adjustment has been executed Transducer exposed to heat or cooling air stream Incorrect pressure value at high Contaminated sensor Tr
58. he chip forms the other surface of the cavity Due to the geometry of the sensor convection cannot take place within the cavity and consequently the sensor is insensitive to mounting position Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured MicroPirani Sensor X The cold cathode inverted magnetron utilizes a high voltage anode cathode and a permanent magnet Electrons are accelerated towards the anode and will ionize molecules by collision The magnetic field deflects the electrons causing them to spiral as they move across the magnetic field to the anode This spiraling movement increases the opportunity for them to encounter and ionize the molecules The ionization of the molecules creates an electric current as a function of the pressure Both sensor elements are very robust and can withstand high G forces and fast inrushes of air Applications The 972B can be used in many different vacuum applications within the semiconductor analytical and coating industries General vacuum pressure measurement Gas backfilling measurement and controlling Coating Mass spectrometer control oystem process control Sense abnormal pressure and take appropriate security measures using setpoint relays Control system pressure Disposal European Union only The 972B transducer is manufactured according to the RoHS directive be disposed in the normal unsorted waste strea
59. he transducer has been on Query 253TIM FF Query reply 253ACK123 FF Time 2 Cold Cathode sensor TIM2 The TIM2 command returns the number of hours the cold cathode sensor has been on Query 253TIM2 FF Query reply 253ACK123 FF Time ON Cold Cathode pressure dose TIM3 The TIM3 command returns the cold cathode pressure dose Query 0253TIM3 FF Query reply 0253ACK1 00E 2 FF Temperature TEM The command returns the MicroPirani on chip sensor temperature C typical within 3 C Query 253TEM FF Query reply 253ACK2 50E 1 FF Transducer Status T The T command returns the Transducer sensor status as O for OK M for MicroPirani failure C for Cold Cathode failure R pressure dose setpoint exceeded or G for Cold Cathode ON Query 0253T FF Query reply 253ACKO FF 972B DualMag 24 Operation manual Analog output The 972B transducer provides a voltage output as function of pressure The standard output is 0 5 VDC decade but can also be configured to emulate other analog outputs Analog output calibration 0 MKS standard 0 5 VDC decade 11 Prop 10 2 Vout 11 Vout A Pmbar 11 10 2 Vout 11 Vout A L P Ppascal 1 O 2 Vout 9 Vout standard MKS analog output always provides 0 5 VDC decade If the transducer pressure unit is changed from Torr to Pascal or mbar the analog output scaling will change as well so
60. iffer Inficon type Standard mks Edwards APG L Edwards WRG Inficon MPG400 Pfeiffer PKR251 Inficon BPG400 999 DAC2 RS232 Analog RS485 Analog opecial versions Part number 972B x1380 Edwards WRG pin and output compatible 972B x1580 Oerlikon PTR90O Inficon 400 pin and output compatible 972B x1590 Pfeiffer PKR251 pin and output compatible 972B DualMag 3 w Operation manual Description The 972 DualMag vacuum transducer offers a wide measuring range from 1x10 8 Torr to atmosphere and is based on measurement of thermal conductivity and measurement cold cathode ionization current The 972B is designed for general purpose pressure measurement and control as a standalone unit or with the PDR900 display and controller unit The transducer uses RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement The 972B has up to three mechanical relays which can be used for process control for example interlocking valves or pumps The analog voltage output can be interfaced to external analog equipment for pressure readout or control Sensor technology The 972B transducer contains two separate sensor elements The MicroPirani sensor element is based on measurement of thermal conductivity The MicroPirani sensor consists of a silicon Cold Cathode chip with a heated resistive element forming one surface of a Sensor cavity A cover on top of t
61. ions further calibration is not required If the sensor element has been contaminated or damaged by process gases adjustment of zero and full scale can be executed to compensate for small measurement errors If operated in oil lubricated pumping systems or other none clean environments the cold cathode reading changes over time The cold cathode reading can be adjusted or the sensor anode can be replaced or cleaned Refer to Service and Repair page 53 972B is per factory default calibrated for reading in Nitrogen gas When exposed to atmospheric air the MicroPirani sensor PR1 will read higher values typically 900 Torr at ambient pressure Accuracy and repeatability The 972B measuring accuracy is specified as transducer reading a percentage of the actual pressure The basic measuring accuracy is factory calibrated and cannot be user adjusted The repeatability specification is the transducers ability to repeat the same measurement value after multiple pressure cycles Refer to the transducer specification page 55 for actual values Gas calibration The 972B is based on measurement of thermal conductivity and ionization of the gas and consequently its reading depends on the gas type and concentration The factory default setting is Nitrogen calibration however the transducer has MicroPirani calibration curves for several common gases Change of gas calibration setup Command Q253GT ARGON FF values NITROGEN
62. ipment The termination resistors provides low impedance that reduces the sensitivity to electrical noise and prevents data reflection that can cause data communication corruption JODIE ee 972 piri 4 RS485 twisted pair cable run with 120 Q terminator resistors 972B with 15 pin connector When connecting multiple devices in a RS485 network make sure that proper guidelines and specifications are followed to ensure optimal communication performance of the 972B Improper network design can cause data communication interruption and data collision 972B DualMag 9 Operation manual Communication Protocol The 972B transducer command set allows the user to change transducer parameters and receive pressure measurements Settings and parameters like setpoint values setpoint configurations and calibration data are stored in the transducers non volatile memory Communication software ommunications Port COM T Propetties E Communication software is required to communicate from 5232 485 Sea interface to the transducer In the standard Microsoft Windows package the nt hyper terminal software can be used to type and transmit serial commands to m the transducer To the right is illustrated the Windows communication port properties for communicating with transducer factory default settings yo 5 5 also offers communication software examples that
63. llips GP275 emulation The GP275 emulation provides a strongly non linear output with very poor resolution in the low range and close to atmospheric pressure 10 x Tor X mbar Pascal Vout T 5 00E 4 7 50E 4 0 385 1 00E 3 0 388 j 2 50E 3 0 406 5 00E 3 0 431 B 7 50 3 0452 1 00 2 0470 g 2 50 2 0 563 5 00E 2 4 7 50 2 0 780 1 00 1 0 867 ai 2 50 1 1 255 5 00 1 1 684 7 50 1 1 990 1 00E 0 2 228 1 2 50E 0 3 053 5 00E 0 3 664 0 7 50E 0 3 986 1 0E 05 1 0E 04 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 00E 1 4 191 Pressure torr 2 50E 1 4 706 5 00E 1 4 965 7 50E 1 5 075 1 00E 2 5 137 2 50E 2 5 274 5 00E 2 5 333 6 00E 2 5 345 7 00E 2 5 353 7 60 2 972 DualMag 31 Operation manual Analog out calibration 8 MKS 325 The Moducell emulation provides a strongly non linear output Torr mbar Pascal Vout 1 00 5 0 2509 1 00 4 0 2524 a 2 50 4 0 2550 5 00 4 0 2592 an FH 7 50E 4 0 2633 1 00E 3 0 2674 a 2 50E 3 0 2905 5 00E 3 0 3251 7 50 3 0 3561 1 00 2 0 3845 2 50 2 0 5215 5 00E 0 6868 Analog out VDC on 7 50E 2 1 00E 1 0 8144 1 00E 1 0 9205 34 2 50 1 1 3489 5 00E 1 1 7504 2 7 50 1 1 9986 1 00E 0 2 1720 E 2 50E 0 2 6512 5 00E 0 2 9012 0 7 50E 0 3 0022 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 000 1 0E 01 1 0402 1 0E 03 1 00E 1 3 0569 Pressure torr 2 50 1 3 1639 5 00 1 3 2023 7 50 1 3 21
64. lso be cleaned by mechanical polishing c Pl 8 22 JE P N 970B CELLKIT Do not touch cell kit anode module screen screws or clip ring by hand If items are accidental touched by hand use alcohol to clean items Changing the Cell kit 1 Turn power off and remove cable 2 Dismount the transducer from the vacuum system 3 Remove the clip ring 1 using a clip ring remove insert tool p n 100017193 Remove the screen 2 Unscrew the Torx screws 3 at the rear screen 4 Remove the rear screen 4 Insert the new screen Do not touch hand Insert the Torx T6 screw 3 and tighten Insert the front screen 2 and clip ring 1 ds Changing the 1 Remove cell kit point 1 6 2 Unscrew the 3 screws at the anode module 3 Remove the anode module and clean module or insert new 4 Insert the anode module screw and DO tighten After all screws are inserted carefully tighten the screw a little and move on to the next one Continue to tighten the screws one by one until all tight 5 Perform leak testing of transducer Insert cell kit point 7 9 Cleaning anode module and screens Contaminated parts can be cleaned by mechanical polishing or ultra sonic cleaned followed by alcohol degreasing Make sure that all parts are clean and remove any discoloring of the stainless steel and titanium parts Alternatively the anode module or screens can be repl
65. m It should be deposited at an For the benefit of the environment at the end of life of the 972B it should not appropriate collection point or facility to enable recovery or recycling 972B DualMag 4 A Operation manual 972B Functions User Switch Connector Red or Green LED Status Indicator User Switch The user switch has the following functions 1 Vacuum Zero adjustment VAC Command 2 MicroPirani Atmospheric adjustment ATM Command 3 Transducer firmware upgrade mode Refer to pages 20 21 and 43 for operation procedure If the user switch is activated by accident and Vacuum Zero or Atmospheric adjustment is executed the original factory adjustment can be recovered using the FD VAC or FDIATM command See factory default page 22 If the transducer is delivered with customer specified parameters the User Switch is disabled For enabling the switch see page 22 LED Status Indicator The red green LED status indicator has the following stages 1 GREEN Normal operation 2 2 sec RED Power on sequence 3 GREEN 1 sec flash cycle Test mode TST ON see page 22 4 GREEN 0 5 sec flash cycle Cold Cathode high voltage turned on 5 Red 0 5 sec flash cycle Cold Cathode high voltage turned on but ionization has not ignited 6 3x GREEN flash User Adjustment executed successfully 7 RED flash User Adjustment failed 8 RED MicroPirani sensor failure see page 16 9 OFF Firmwar
66. measurements via the digital interface A 10 times per second is the fastest recommended pressure request frequency 972B DualMag 50 Operation manual Q How long is the waiting time from turning power to valid measuring values A The power on sequence is approximately 2 seconds The LED is illuminating red during power up sequence and the digital interface will not reply to commands Q The first character is sometimes lost in the transducer digital communication reply A This can be caused by too fast transducer communication reply See RS delay command description page 11 Q 5 it necessary to use the ground wire between RS485 communication equipment and transducer A Yes both RS232 and RS485 communication requires a 3 wire connection between transducer and communication equipment Calibration and adjustment Q How often does the transducer require calibration or Zero adjustment A It depends on the application and pressure range but in many applications user adjustment is never required Factors that temporally or permanently can influence the measuring performance are contamination corrosion heat and electronic interference The MicroPirani is automatically zero adjusted whenever the pressure measured by the cold cathode is below the MicroPirani zero limit Q How long is the warm up time before obtaining reliable measurements from the transducer A The small mass of the MicroPirani sensor element ensures short sensor w
67. nd values 1 00E 6 to 5 00E 4 Command reply 0253ACK1 00E 4 FF Query 253MZL FF Query reply 253ACK1 00E 4 FF Reset to default 253FD MZL FF Factory default 1 00E 4 Torr Value out off range 9253 172 MicroPirani Zero Adjustment by serial interface The zero adjustment function changes the MicroPirani measurement offset at low pressure Temporary or permanent shift in zero offset can be caused by contamination corrosion electrical noise interference and temperature 8 Zero adjustment only changes the low measuring range and will have no influence on measuring errors in the range from 1x10 and above If the transducer is reading 8 00E 5 Torr at an actual pressure of 1 00E 5 Torr the offset error is 7 00E 5 or 700 error of actual pressure At two decades higher pressure of 1 00E 3 Torr the same offset error is a factor 100 lower At 1 00E 3 Torr an offset error of 7 00E 5 Torr is equivalent to a 7 error To obtain best measuring performance the transducer should be evacuated to a pressure below 8x10 Torr before executing zero adjustment Zero adjustment can be executed at higher pressures but this can cause inaccurate reading below the zero adjustment value Executing zero adjustment Evacuate the transducer to a pressure below 8x10 Torr or enter the zero pressure Command 0253VAC 5 00E 5 FF Command values None 3 00E 3 Command reply 253ACK FF Query 0253VAC FF Query reply 253ACK0 00 00
68. none linear output with limited resolution in the low range and close to atmosphere Torr Vout 0 mbar 7 50 05 1 73E 04 2 05 4 66E 04 1 02E 03 2 23E 03 3 46E 03 4 88E 03 7 65E 03 1 10 02 1 43E 02 2 21E 02 3 12E 02 4 21E 02 Analog out VDC un ta 5 40 02 6 71E 02 8 48E 02 1 09E 01 1 32E 01 1 67E 01 2 37E 01 1 0E 04 1 0 03 1 0E 02 1 0 01 1 0E 00 1 08 01 1 0E 02 1 08 03 Pressure Torr 3 10E 01 4 05E 01 5 12E 01 6 31E 01 7 95 01 9 98E 01 1 20E 00 1 40E 00 1 70E 00 2 06E 00 2 43E 00 2 80E 00 3 29E 00 3 97E 00 4 70E 00 5 72E 00 7 04E 00 9 53E 00 1 25E 01 1 68E 01 2 16E 01 2 65E 01 3 36E 01 2 2 1 2 2 2 6 2 8 3 3 3 3 6 3 8 4 4 4 4 6 4 8 5 5 5 5 6 5 8 6 6 7 7 7 7 6 7 8 8 8 8 8 9 9 9 5 9 7 2 4 2 4 2 4 2 4 2 4 2 4 2 4 2 4 4 99E 01 1 06E 02 4 62E 02 9 95 7 60E 02 10 972B DualMag 41 Operation manual Analog Output calibration 28 MKS 907 mbar Pascal Vout 0 387 0 397 0 418 0 437 5 0 456 0 473 0 551 0 619 0 679 0 733 0 783 0 83 0 874 Analog out VDC 0 915 2 0 955 1 271 1 508 1 701 1 864 2 007 OE H A Ta Wes NI SPS 2 246 Pressure Torr 2 348 2 442 3 083 3 452 3 698 3 875 4 009 4 114 4 198 4 268 4 327 4 627 4 695 4 743 4 805 4 843 4 872 4 891 4 898 4 904 4 914 4 923 4 987 5 025 5 071 5 183 5 301 5 397 5 478 5 514 5 548 6 5E 0
69. nsducer parameters Trend display 5 o Pressure reading 1 Exponent Sensor reading Combined Setpoint Status pall Tor Pressure unit Green Activated Red Deactivated mm mn Ge Tet fe 2 n1 I Main menu Orientation P Settinaz P e Eeturtn Unit selection Pascal A dhl Model 301 301 47134 View Settings S N 0123456783 UserTagzMKS Address 253 Baudrate 3600 972B DualMag 14 Operation manual Pressure output The 972B transducer can provide pressure measurement output as an analog voltage or RS232 RS485 digital value The digital value is 3 digits scientific notation for PR1 PR3 PR5 reading and 4 digits for PR4 reading Pressure request Query 253 1 Query reply 253ACK1 23E 4 FF Pressure outputs PR1 MicroPirani sensor reading PR2 Cold Cathode reading same as PR5 PR3 MicroPirani and Cold Cathode combined reading PR4 MicroPirani and Cold Cathode combined reading 4 digits PR5 Cold Cathode reading The default analog output is based on the combined PR3 reading and provides a 16 bit voltage output of 0 5 VDC decade standard configurations Refer to Analog output page 25 for details 8 If ionization does not ignite the combined output will provide the MicroPirani measurement until valid ignition is detected Combined reading PR3 and PR4 The PR3 PR4 and the analog output combines the Cold Cathode reading and the MicroPirani reading into one smooth pressure
70. oved by an authorized officer of HPS Ill This warranty gives PURCHASER specific legal rights and PURCHASER may also have other rights which vary from state to state IV For HPS products sold outside of the U S contact your MKS representative for warranty information and service Warranty Performance To obtain warranty satisfaction contact the following US amp ASIA MKS Instruments Inc HPS Products Inc 5330 Sterling Drive Boulder CO 80301 USA Phone 303 449 9861 EUROPE MKS Denmark ApS Ndr Strandvej 1196 DK3150 Hellebaek Denmark Phone 45 44 92 92 99 E mail mksdenmark mksinst com Statement of Export Control These commodities technology or software were provided in accordance with the US Export Administration Regulations and Export regulations of the European Union Diversion or transfer contrary to U S or European Union law is prohibited Part number 972B Serial number Please fill in these numbers and have them readily available when calling for service or additional information The part number can be found on your packing slip and both the part number and serial number are located on the side of the housing This manual is valid for 972B transducers with serial number 1022432056 and higher 2009 MKS Instruments All rights reserved Trademarks used this manual HPS Baratron DualMag DualTrans MicroPirani and Quattro are trademarks of MKS Inst
71. ovides a log linear output of 1 VDC mbar 10 Vout 6 125 Vout logio Pror 6 125 Pmbar 10 Vout 6 Vout 10010 Pmbar 6 10 Vout 4 Vout 10010 PPascal 4 T 4 de Analog out VDC 1 0 05 1 0 04 1 0 03 1 0 02 1 0 01 1 0 00 1 0E 01 1 0E 02 Pressure torr 972B DualMag 28 Operation manual Analog output calibration 3 Edward WRG emulation The WRG emulation covers a wider measuring range than supported by the 972B range 10 1 5 Vout 12 125 Pmbar 10 1 5 Vout 12 Prascal 10 1 5 Vout 10 Pascal 1 00E 8 1 33E 8 1 33E 6 2 75 2 37E 8 3 16E 8 3 16E 6 300 Yi 4 237 s16 3160 900 7 50E 7 1 00E 6 1 00E 4 2 37E 5 3 16E 5 3 16E 2 8 Analog out VDC 0 1 0E 08 Vout logio 12 125 1 5 Vout 10010 Pmbar 12 1 5 Vout 10010 PPascal 10 1 5 1 0 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure torr Analog output calibration 7 4 Inficon PSG500 Oerlikon TTR91 emulation The TTR91 emulation provides a log linear output The output does not provide a pressure dependent signal at pressures below 2 00E 4 Torr Prop 10 Vout 6 304 1 286 Pmbar 1 0 Vout 6 143 1 286 Ppascal 10 Vout 3 572 1 286 Torr mbar Pascal Vout 1 00E 5 2 00E 4 5 00E 4 1 00E 3 1 33E 3
72. peration and Installation manual MKS Denmark 5 Hellebaek Denmark July 1 2009 ui Ole Wenzel Managing Director 972B DualMag 59 Operation manual Notes PDR 900 Display and power supply e Plug and play readout for 900 Series transducers e The easy way for setup and configuration Data logger tool for data analysing See more www mksinst com pdr900 900 Series VacuumLog software Data logger software ES mes e Pressure curve plotting 4 ON Rate of raise diagnostic tool se E e Pump down monitoring Wa T Export of data to Excel spread sheet T uns l AA e Windows 7 compatible HIPH ma Free trial version available on et T Re Maa s http www mksinst com vtsw en ZI 972B DualMag 61 Operation manual Index Accessories and replacement part numbers 58 rele cz ya ab kek a kl 55 Accuracy and repeatability 19 Addressing 11 Analog 25 50 uuu u 4 50 AT00 11 g3a9 MH FE A AR W A A 46 Atmospheric adjustment 21 Auto Zero Adjustment 20 sriRel mW MMMT 6 Bake out temperature 55 Baud rate
73. performance and operation of other electronics equipment and life support devices like pacemakers Only install the 972B where it cannot interfere with other electronics CE marking The 972B transducer complies with European standards for CE m marking Refer to Declaration of Conformity page 59 972 DualMag 2 Operation manual Unpacking Before unpacking your 972B DualMag transducer check all surfaces of the packing material for shipping damage Inspect for visible damage If found notify the carrier immediately Please be sure that your 972B package contains these items 972 972B Transducer 100017132 Short form manual 100017096 Documentation amp Software CD If any items are missing please call MKS Customer Service at 800 345 1967 or 303 449 9861 or your local MKS sales office or distributor Part number The 972B DualMag part number system has 5 digits that identify flange communication interface analog output type I O connector and sensor sealing type Transducers be delivered with customer configuration of various parameters like setpoint settings and these specials have additional 4 digits after the regular part number Analog out Connector Relays Enclosure sealing 0 Standard viton sealing 4 Display viton sealing SUBD 15pinHD male no relay SUBD 15pinHD male 3 relays SUBD 15pinHD male 3 relays Dual Aout RJ45 FCC68 8 pin Edwards type Hirschmann 6 pin Pfe
74. reading at high pressure Command 253CFS 4 00E 3 FF Command values 1 00 4 to 5 00E 3 Torr Command reply 253ACK FF Query Q253CFS FF Query reply Q253ACK5 00E 3 FF Reset to default 253FD CFS FF Factory default Factory adjustment value Value out off range 253NAK172 FF 972B DualMag 21 Operation manual Factory default The transducer is per factory default delivered with parameters and setup as listed below If the transducer is delivered with customer preconfigured parameters the values are different than listed below and the parameters will be locked per default Communication parameters Description Command Parameter FD FD ALL Address AD 253 x Baud rate BR 9600 x Communication delay Transducer parameters Description Command Parameter FD FD ALL Test mode LED flash TST OFF x x User tag UT MKS x Setpoint 1 value SP 1 1 00E0 x Setpoint 1 hysteresis value SH1 1 10 0 Setpoint 1 direction 501 BELOW x Setpoint 1 enable x Setpoint 2 value SP1 1 00E0 x Setpoint 2 hysteresis value SH1 1 10E0 x Setpoint 2 direction SD1 BELOW x Setpoint 2 enable EN1 OFF x Setpoint 3 value SP1 1 00E0 x Setpoint 3 hysteresis value SH1 1 10E0 x Setpoint 3 direction SD1 BELOW x Setpoint 3 enable EN1 OFF x Switch enable SW ON x Analog out 1 AO1 30 4 x Analog out 2 AO2 30 x Cold Cathode turn on setpoint SLC 5 00 4 Cold
75. reading with accurate measuring performance throughout the entire pressure range of 11 decades The MicroPirani automatically turn on the Cold Cathode at 5E 4 Torr SLC and turn it off at 8E 4 Torr SHC Above 4E 4 the combined reading is the MicroPirani pressure measurement and below 1E 4 Torr it is the Cold Cathode pressure measurement Between 1 4 and 4E 4 Torr the two measurements are smoothly integrated The PR3 reading provides 3 digits resolution and the PR4 reading provides 4 digits resolution Analog output VDC MKS Standard 59 2 2 5 3 2 5 4 4 5 5 5 5 6 6 5 7 1 0 8 1 0 7 1 0 6 1 0 5 1 0 4 1 0 3 1 0 2 1 0 1 1 0 0 1 0E 1 1 0E 2 1 0E 3 Pressure Torr PR3 PR4 output SLC Low CC turn on pressure 5 0E 4 Torr SHC High CC turn off pressure 8 0E 4 Torr SLP Low CC MP integration 1 0E 4 Torr CC MP integratio SHP High CC MP integration 4 0E 4 Torr Cold Cathode ON 1E 4 1E 3 SLC SHC In some application it is preferred not to have the Cold Cathode high voltage turned on during vacuum process or during mass spectrometer analyzing The 972B Cold cathode turn on pressure SLC and turn off pressure SHC can be changed by the user Furthermore the high and low integration levels between the Cold Cathode reading and MicroPirani reading can be changed by the user When designing external pressure control loops make sure that external equipment like pumping system is
76. ruments Inc Windows is a trademark of Microsoft Corporation Viton is a trademark of DuPont Performance Elastomers L L C Table of Contents NW ON r il u u u kt ka pt 2 2 e 3 5 2 SEN PLI ON e A 4 IS olie 5 5 SA NS OUE r NN 5 Transducer installation 6 Transducer installation 7 Sonal user MENACE csere ea a Eana ED AEE a Sa Aaa EEE E E a Sa Aea EAE a mm 9 Protocol uuu luu e a pa tn Steerer ore Sa pt lp aa E ple 10 mm 12 L Ly 14 mcer MT m 22 SOIC Cl WUC NON aza sis ewo lapen pik year enb pk nt pa 23 I O NR 23 JI CIS OTT uuu ea pakay e bik eee ve ba ik taa e rekin ela De 23 SANS Query ON ANS estes a 24 FAN OO ki uuu 25 MicroPirani gas dependence
77. sa LI VN n LEE DI LE LET a E A S SZ SN n 1 2 F eh SR 1 O L ITEELHI ELEC HLETI E li ES iss 3 in 525 Muse s HI 9 3 HH 1 00E 1 E E IH IH WT SS ISI Sa Ieri AYE Se a SL DE D HELL DD ee T 0 F t N I Fi si HE L OPT ST GL T S 1 00E 0 AN e E E TS 2 I HH H44 M3H8H1H H Giclee 5 HEFTE THEE HINL II ST H TTT U HU z III N 2 LL EE IME Le A rp a ti ge S Hi N C t A HH 2S ee SE HEF iw MIND lt OTIT 111100 A HI k i II ITE INI a j Nen
78. terms only if located in the country of the seller from whom the product was purchased The above warranties do not apply to l Damages or malfunctions due to failure to provide reasonable and necessary maintenance in accordance with HPS TV operating instructions Il Damages or malfunctions due to chemical or electrolytic influences or use of the product in working environments outside the specification III Fuses and all expendable items which by their nature or limited lifetime may not function for a year If such items fail to give reasonable service for reasonable period of time within the warranty period of the product they will at the option of HPS TM be repaired or replaced IV Defects or damages caused by modifications and repairs effected by the original PURCHASER or third parties not authorized in the manual Condition of Returned Products HPSrw will not accept for repair replacement or credit any product which is asserted to be defective by the PURCHASER or any product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated mat
79. the high measuring range and will influence on measuring errors in the range below 10 Torr Executing atmospheric adjustment Vent transducer to Nitrogen or air pressure of 500 780 Torr Command 253ATM 7 60E 2 FF Command values 4 00E 2 to 8 00E 2 Command reply 253ACK7 60E 2 FF Query 253ATM FF Query reply 253ACK0 00E 0 FF Reset to default QFD ATM FF Factory default Factory adjustment value The query feature reads the delta value between the user atmospheric adjustment value and the factory default value Cold cathode zero adjustment The Cold Cathode zero adjustment allows the user to adjust the cold cathode zero reading Executing zero adjustment Evacuate the transducer to a base pressure below 1x10 Torr or enter the zero pressure by use of a calibrated reference gauge To obtain measuring performance the transducer should be evacuated to pressure below 5x10 8 Torr If the Cold Cathode zero adjustment is executed at high pressure the measurement below the zero value can become unreliable Always zero at the system base pressure Command 0253VAC3 2 00E 8 FF Command values 1 00E 6 to 1 00E 8 Torr Command reply 253ACK FF Query Q253VAC3 FF Query reply 253ACK0 00 00 FF Reset to default 253FD VAC3 FF Factory default Factory adjustment value Value out off range 253NAK172 FF Cold cathode full scale adjustment The Cold Cathode full scale adjustment allows the user to adjust the cold cathode
80. utput calibration 33 MKS 685 40 Vout 4 9 Vout 4 logio P 8 Tor mbar Pascal Vout Analog out VDC 1333 2 133 3 1 33E 04 600 1000 1333 2 1 33E 05 0 1 00E 03 1 00E 02 1 00 01 1 00E 00 1 00E 01 1 00E 02 1 00E 03 Pressure Torr 972B DualMag 44 Operation manual MicroPirani gas dependence The 972B MicroPirani is based on measurement of thermal conductivity and consequently its reading depends on gas and gas concentration The 972B has calibration curves for a number of common gases For gas setup refer to gas calibration page 19 The 972B is per factory default calibrated for Nitrogen gas and below is showed the 972B Nitrogen MicroPirani reading in different gas types Air 1 000E 2 Argon Helium 1 000E 1 Hydrogen 1 000E 0 1 000E 1 Actual gas pressure Torr 1 000E 2 1 000E 3 1 000E 4 i pG 1 00E 4 1 00E 3 1 00E 2 1 00E 1 1 00E 0 1 00E 1 1 00E 2 1 00E 3 MicroPirani reading Torr Nitrogen setup Helium gas dependence 1 00E 3 Ex L EEEEER iii 1 00E 2 1 00E 1 1 00E 0 1 00E 1 Helim pressure Torr 1 00E 2 1 00E 3 1 00E 4 1 00 4 1 00 3 1 00 2 1 00E 1 1 00E 0 1 00E 1 1 00E 2 1 00E 3 MicroPirani Nitrogen reading Torr 5 1 00E 3 1 00 2 Wa
81. y P N 972 4 and 972B xxxx6 cannot be disassembled by user and must sent to MKS service facility for repair 972B Transducer repair kit Description 972B 2REP 972 Sensor repair kit KF25 flange 972B 7REP 972 Sensor repair kit CF2 75 flange 972B 9REP 972B Sensor repair kit KF40 flange Before disassembling the transducer take precautions to avoid static discharge which can damage the electronics Use grounded wrist band if available 4 pe Printed circuit board alignment identification Incorrect alignment will cause A permanent damage on transducer electronics Installing the 972B transducer repair kit 1 Turn power off and remove cable 2 Dismount the transducer from the vacuum system 3 Unscrew the two hex screws 4 at the DSUB connector using a 5mm hex screw driver 4 Usea paper clip a small screwdriver or similar tool to press down the two mounting taps 1a on the side Carefully remove the enclosure 3 Remove the top circuit board 2 Mount the top circuit board 2 on the new 972B Sensor repair kit flange and make sure the printed circuit board alignment identifications match the two boards 8 Carefully assemble the enclosure 3 and make sure the mounting taps 1a click out 9 Mount the two hex screws 4 10 If required reenter transducer setpoints unit gas type and other application parameters 972B Sensor repair kit flange does not have customer setup

972B DualMag - MKS Instruments, Inc.

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