Bissell HS-20 Water Pump User Manual
Contents
1. Figure 1 1 Speed and Throughput Curves HS 20 Diffusion Pump 1 3 PHYSICAL SPECIFICATIONS See Figure 1 2 Flange dimensions inches ISO 630k Inlet ISO 160k Foreline Foreline 9 0 5 06 0 75 7 5 8 0 OD 27 50 ID 21 25 Thickness 1 12 Bolt Circle 25 0 No of Holes 20 0 Size of Holes 1 25 0 75 Orientation Straddle center line Requires NW 630 Centering Ring not included with pump Requires NW 160 Centering Ring not included with pump 21 625 5 31 0 48 0 375 0 25 0 09 Gasket Groove ID wide deep Height 48 inches allow additional Materials Body Mild steel 8 inches min for heater removal Flanges Mild steel 4 Jet Assembly Aluminum Jer Assembly Sel aligning mactonat Foreline Baffle Stainless Steel ing design with four diffusion Cooling Coils stages and one ejector stage SOPPA Quick Coils Stainless Steel Foreline Stacked disk and ring Cold Cap Copper Nickel plated Weight 500 pounds Cold Cap Water cooled Shipping 580 pounds Water 74 FPT body and foreline Weight Connections 98 quick cool coils Thermal Upper set at 185 F 29 C Switches Lower set at 390 F 93 C Installation Thermal Switch 38 F P T Cold Cap Enclosre Connections 20 ASA Inlet Flange 20 x 61 25 Holes on 25 00 B C Electrical rT SEA 45 4 ASA Foreline Flange2. 3 9 List of Tables Table Title Page Tali SS9DOCIHCADODISA E a EAR po RA a SEa i 1 1 41 Troubleshooting sereine E E EK UR i a he E a DORE eas 4 1 SECTION I INSTALLATION 1 1 GENERAL Upon receipt inspect the container for evidence of damage in shipment Do not discard any evidence of rough handling Factory packing provides for maximum protection during shipment However the pump should be inspected immediately and any damage should be reported to the carrier without delay Before unpacking and installing the pump the user should thoroughly familiarize himself with the contents of this instruction manual particularly the physical and operating specifications listed in the following paragraphs in order to gain a better understanding of the operating principles limitations correct application of the diffusion pump the hazards involved and what to do and what not to do in order to avoid these hazards 1 2 OPERATING SPECIFICATIONS See Figure 1 1 Table 1 1 lists the specifications for all standard models of the HS 20 diffusion pump Table 1 1 HS 20 Diffusion Pump Specifications Model Optimum Operating Range Maximum Pumping Speed See Figure 1 1 Maximum Throughput at 1 x 10 Torr Maximum Forepressure Backstreaming Rate at Pump Inlet Power Required approximately Warmup Time Cooldown Time using quick cool Fluid Charge Cooling Wa
3. Integrate pressure relief valve in vacuum system Prevent personnel contact with high voltages design and attach warnings Toxic and or corrosive gases must be vented to a safe loca tion ensuring adequate dilution or scrubbing to safe levels taking all action required to meet air quality standards Integrate pressure relief valves in all systems using pumps 10 inches or larger in diameter Do not use or recommend the use of hydrocarbon based pumping oils Hazard Suggested Corrective Action a Explosion Operation of the diffusion pump without prior and continuous evacuation below 0 5 Torr 66 5 Pa or coolant and introducing a strong oxidizer such as air or explosive vapors or powders or materials which may react with pumping fluids into a hot above 300 F or 150 C pump can cause an explosion Such an explosion can violently expel valves and other hardware slam open doors that are not designed for appropriate pressure relief or burst other components of the vacuum system Serious injury or death may result from expelled parts doors shrapnel and or shock waves b All diffusion pumps are typically cleaned with acetone and alcohol When combined with air oxy gen and other oxiders alcohol and most other solvents are very flammable and explosive Never permit any trace of these cleaners to remain in or on the pump Always remove all traces of alco hol and acetone and other cleaners with clean dry oil free compresse
4. D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Varian Asia Ltd 1123 Serangoon Road 03 02 Singapore 328207 Tel 65 296 9688 Fax 65 296 9733 Spain Varian Iberica Avda Pedro Diez 25 28019 Madrid Spain Tel 34 91 4727612 Fax 34 91 4725001 Russia Varian Moscow 19A Khlebny per 121019 Moscow Russia Tel 70 95 9374280 Fax 70 95 9374281 Taiwan Varian Technologies Asia Ltd Taiwan Branch 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan Tel 886 2 2698 9555 Fax 886 2 2698 9678 Internet Users Visit us on the web at www eVarian com Representatives in most countries ap VARIAN Telephone Numbers For technical support and service within the continental United States Alaska and Hawaii Continental U S only 1 800 8 VARIAN 1 800 882 7426 Order Entry Sales sernir t pene Qo OMA de RE Rep nae ga Press 1 Technical Support and Field Press 2 Training Information and Press 3 or 4 Hawaii and Alaska 781 861 7200 Sales Service and Product Press 1 For other depart bmelils oai pap bna o FERNER DIU ER ERA Ea VER DES Press 3 FAX Numbers Order Entry Salas ouo cadi vade etie pateat FAX 781 860 5405 Technical Support
5. n enseeic etes kon nan FAX 781 860 5465 Field canes 781 860 9210 Training Information and Registration FAX 781 860 5479 Copyright 9 by Varian Inc All rights reserved This manual may not in whole or in part be copied photocopied reproduced translated or converted to any electronic or machine readable form without prior written consent of Varian Vacuum Technologies Lexington MA 02421 3133 Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve 12 months from date of shipment thereof to Customer and Seller s liability under valid war ranty claims is limited at the option of Seller to repair replacement or refund of an equitable portion of the purchase price of the Product Items expendable in normal use are not covered by this warranty All warranty replacement or repair of parts shall be limited to equipment malfunctions which in the sole opinion of Seller are due or traceable to defects in original materials or workman ship All obligations of Seller under this warranty shall cease in the event of abuse accident alter ation misuse or neglect of the equipment In warranty repaired or replacement parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts After expiration of the applic
6. and should be clearly identified in accordance with their type Do not mix pumping flu ids of different types and origins Generally it is not a good idea to mix used and new fluid for a pump charge 1 11 Installation The recommended fluid charge for the pump is five U S quarts The fluid charge will gradually be depleted through use but the pump will continue to operate normally When the charge is reduced to approximately 60 of the initial amount the boiler temperature may begin to rise and under this condition the thermal switch is designed to open the heater circuit This diffusion pump is furnished with fill and drain fittings with special Viton elastomer sealed plugs If the pump is hot wait until the pump has cooled then vent it to atmosphere Remove the plug from the filling port of the pump and install the needed quantity of fluid up to the FULL COLD level indicator on the sight glass see Figure 1 5 The fluid can also be poured in from the pump inlet or foreline Replace the fill plug with a new Viton gasket Tighten the fill plug using moderate torque 75 inch pounds maximum Lubricate the O ring with pump fluid before installation Once the pump is running the oil level should be in the FULL HOT operating range as indi cated on the sight glass assembly Figure 1 6 Sight Glass Assembly Ls NOTE It is not recommended that Santovac 5 diffusion pump fluid be used with the HS 20 SECTION Il O
7. assembly 84889301 Foreline baffle assembly F6097301 Sight glass service kit includes glass tube O rings and fittings valves not included for pumps built prior to October 1994 F1755301 Sight glass assembly includes seal valve glass tube removable bracket cover for sight glass assembly and fittings for pumps built prior to October 1994 77261001 Threaded plug fill and drain K9050001 Upper thermal switch 185 F K9050002 Lower thermal switch 390 F 656118114 Nickel wire No 14 AWG 648056329 Nickel lug for No 14 AWG 647320025 Heater element with leads 2000W 200V 647320020 Heater element with leads 2000W 240V or 380V 647320035 Heater element with leads 2000W 400V 647320040 Heater element with leads 2000W 430V 647320045 Heater element with leads 2000W 440V 647320030 Heater element with leads 2000W 480V K7108001 Crush plate replace with each heater K7107001 Clamping plate L6514001 Insulation for heaters Cerablanket 0 50 inch thick 84497001 Heater cover plate L9223001 Sight glass for pumps built after October 1994 K0377165 O ring kit includes 1 butyl ASA inlet flange O ring 84349002 1 butyl ASA foreline flange O ring 660893432 8 Viton fill and drain O rings 660892213 1 Sight glass O ring 660892240 1 Graphite sight glass gasket L9228001 695472008 DC 702 diffusion pump fluid one gallon container 695474008 DC 704 diffusion pump fluid one gallon container 695475008 DC 705 diffusi
8. especially when it is hot Prohibited Action Explosion Causing Condition Contaminate pump with explosive vapors powders or reactive materials Remove defeat or override safety counter measures such as pressure and thermal switches and valve sequencer interlocks Machine or weld without removing all oil or solvent residue in pump Use unsuitable pumping fluid especially in large pumps Systems larger than 10 inches must be designed with pressure relief devices to provide safe pres sure relief from internal explosions Always recognize that safety devices can fail or malfunction pro vide redundant protection by installing devices having different failure modes failure mechanisms and failure causes Be certain that exhaust duct materials are capable of withstanding the corrosivity Lower explosive threshold of gas mixtures Overtemperature overpressure more combustible mixtures Source of ignition Lower explosive threshold of gas mixture temperature and pressure of exhausted products c Pressure Pumps and their components are designed for vacuum service they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities Serious accidents have been caused by intentional pressurization of vacuum systems and their components Never pressurize any part of a vacuum system for test or any other purpose Always provide pressure relief when designing diffusion pumps
9. heaters are bolted snugly to the boiler plate and that all heater terminal connections are tightly fastened inside the junction box d Check the total heater input and balance of load if a multi phase heater is used e Check to insure that cooling water flow is unobstructed and not below specified quantities 3 3 CLEANING Complete cleaning of the pump may be periodically required because of the gradual deterioration of some pump fluids Removal of the pump from the system is then necessary A WARNING If hazardous gas vapors chemicals or combustible mixtures are pumped sufficient quantities may exist during operation This pump may contain decomposed and or overheated pump oils or poisonous and or corrosive process materials which are highly toxic and also can be an asphyxiant Proper operation will not always ensure that all haz ardous materials have been removed Diffusion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use near a high temperature source Ventilate work ing area with a blower and use in large well ventilated room When heated or sprayed solvents also become 4 to 5 times heavier than air and will flow down settling in tanks pits and low areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a
10. high Check for leak in foreline poor mechanical pump performance breakdown of pump fluid and incorrect valve operation Prolonged operation at high throughput at pressure above10 3 Torr Review procedures Improper system operation and air release procedures Review procedures Pump will not start Safety circuits and or protective prevent contactor from staying closed Check utilities flow devices switches interlocks Check thermostat operation
11. in handling Carefully remove the fourth stage jet from the jet base Clean all parts thoroughly Maintenance Cold Cap Top Jet Seal Sleeve Cap Securing Screw Yt Cold Cap lt a pem Assembly Orifice Plug Coupling Assembly 2nd Stage Jet Shield 2nd Stage A Central Tube i 3rd Stage Lower Jet Assembly 3rd Stage Jet Shield 4th Stage Jet Base hol Lower Anchor Nut Welded to Boiler Figure 3 2 20 inch Jet Assembly Maintenance 3 5 3 Reassembling the Lower Jet Assembly a Carefully replace the fourth stage jet on the jet base b Replace the third stage jet shield Ls NOTE Before completing the following step check that the gaps are even and tighten the screws uniformly and in a cyclic pattern Jet spacings are preset at the factory and controlled by the spacers secured to respec tive stages C Replace and tighten the securing screws between the third and fourth stage jets 3 5 4 Reassembling the Jet Assembly Ls NOTE Before securing the jet assembly to the pump check that the lower jet assembly is firmly seated on the pump with the ejector correctly posi tioned For proper alignment a pin is provided in the base of the pump the large slot in the jet base must register on this pin a Complete the steps in para 3 5 1 in reverse order Ls NOTE If the jet coupling became loose during step 3 5 1c refer to Figure 3 3 Jet Coupling 3 6 HEATER R
12. into systems and ensure that pres sure relief motion is limited to safe envelopes Never permit the following Prohibited Action Block inlet and vent of liquid nitrogen trap and lines Close isolation valves at inlet and discharge of main watercooling coils and pump is reheated Pressurize pump body Hole through vacuum wall Result LN trap and or lines burst Water turns to steam and bursts coils Body of pump bursts Loss of structural integrity of wall d Poisonous and or Corrosive Compounds When pumping poisonous reactive and or corro sive gas vapors or chemicals even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed If hazardous gas vapors chemicals or combustible mixtures are pumped sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death Overheating the pump oil exposing it to air or reac tive materials or overpressurizing it above the normal operating range approximately 1 mTorr 133 Pa will decompose the oil and possibly make it toxic This is especially true of back streamed mechanical pump oils which are more volatile unstable Overheating of accidentally introduced or backstreamed mechanical pump oils cannot be protected against by thermal switch es which are set for diffusion pump oil Refer to specific instruction manuals for detailed instructions and precautions Always vent t
13. self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eyeshields gloves and protective clothing A WARNING Acetone and other solvents degrade O ring materials reducing their ability to hold a vacuum Do not use solvents on O rings If necessary to clean O rings wipe with a lint free clean cloth or use a small amount of diffusion pump oil Maintenance Disconnect all water cooling lines and break the primary circuit supplying power to the pump heaters Unbolt the inlet and foreline connections and remove the pump from the system Drain the pump of all fluid Remove the cold cap and jet assembly following the procedures outlined Thoroughly clean the pump body interior using acetone followed by an isopropyl alcohol rinse Dry with clean dry oil free compressed air or heat gun Thoroughly clean the jet assembly using acetone wipe all surfaces with isopropyl alcohol and dry with clean dry oil free compressed air or heat gun Install the jet and cold cap in the pump body Ensure that the ejector is properly aligned with the foreline Check the condition of the O r
14. 3 3 3 5 Disassembling and Reassembling the Jet Assembly 3 5 3 6 Heater Replacement 3 7 3 7 Replaceable x2 RO e Sot beide do kG eto Org SURES 3 11 Section IV Troubleshooting sullssesessleee tenes 4 1 4 1 Eoakdio so suas Seeing NEIN dau P du eV ERE 4 1 4 2 OUtgassihpg eese yore e exu tete uade y heeled Mo uan oue va Pat 4 1 4 3 Poor Pump or System Performance 4 1 List of Illustrations Figure Title Page 1 1 Speed and Throughput Curves HS 20 Diffusion Pump 1 2 1 2 Outline Drawing HS 20 Diffusion Pump 1 3 1 3 Cooling Water Connections ES ER ends 1 7 1 4 200 240 400 430 440 480 V Wiring Diagram HS 20 Diffusion Pump 1 9 1 5 380 415V Wiring Diagram HS 20 Diffusion Pump 1 10 1 6 Sight Glass Assembly Eon E ERST RE d esi eet eau 1 12 3 1 External Fittings Cold Cap Assembly 3 4 3 21 20 Inch Jer Assembly ie esce EUR A Re sewed aS AD DR ese 3 6 351 Jet COUBIITIO sess euo d a wed en RE b caso SO d UR wake I 3 8 3 4 Heater Element Assembly
15. EPLACEMENT The HS 20 diffusion pump heater array consists of six elements arranged to give as close a balanced load as practical over the three supply phases The heater design employs a long convoluted tubular heating element which is clamped directly to the boiler plate A thin stainless steel membrane with a number of elongated dimples referred to as a crush plate is placed in contact with the opposite side of the heating element A stiff clamping plate forces the membrane against the heating element When the clamping nuts are tightened the dimples on the membrane are deformed at the points of contact with the heating element This permits adjustment to dimensional variations in the boiler surface and or in the thickness of the heating element During a replacement of heaters only the crush plate and element must be purchased These part numbers are listed on the Replaceable Parts List The crush plate should be replaced if the heaters are removed for inspection or maintenance To replace the heaters proceed as follows refer to Figure 3 4 3 7 Maintenance Cold Cap Securing Screw Orifice Plug Top Jet Cold Cap Assembly dest E 4 4 LY XN N N ESSS ea Jet Coupling Jam Nut Jet Rod t7 X at D Detail A Location of Jet Coupling prior to assembling jet cap BEN ee SSH Note If the jet co
16. NECTIONS Safety Considerations and Interlocks Large pumps are equipped with two thermal switches Both thermal switches on the HS 20 diffusion pump are mounted on a thermal strap located on the side of the pump These ther mal switches are supplied normally closed The thermal switches have been designed so that a cooling water failure high inlet pressure or low oil level in the boiler will result in an increase in temperature causing the normally closed contacts of the switches to open When the problem has been corrected and the temperature lowered the thermal switch will automatically reset itself A WARNING Utility failure can cause damage to the equipment overheating and possible explosions Designers of the equipment using diffusion pumps must design their system to protect personnel and property from possi ble hazards A small lamp of the same voltage as the diffusion pump heater may be connected across the ter minals of the thermal switch The lamp will normally be shunted by the contacts However when the contacts open the lamp will receive full line voltage and give a visual trouble indication Vacuum Connections The pump must be installed with the body vertical and plumb Check that the mating flange on the system to the pump inlet is horizontal within plus or minus 1 degree If this condition is not met correct the system before installing the pump The boiler of the pump especially for large pumps must be horizo
17. NG ORGANIZATION AND ITS PERSONNEL READ THE INSTRUCTION MANUAL AND UNDERSTAND HOW TO AVOID HAZARDS PRIOR TO OPERATING THE DIFFUSION PUMP ALL PERSONS WHO WORK WITH OR ARE EXPOSED TO DIFFUSION PUMPS OR EQUIPMENT WHICH UTILIZES SUCH PUMPS OR DIFFUSION PUMP FLUID MUST TAKE PRECAUTIONS TO PROTECT THEMSELVES AGAINST POSSIBLE SERIOUS BODILY INJURY OR DEATH DO NOT BE CARELESS AROUND SUCH PRODUCTS THESE SHEETS AND THE INSTALLATION OPERATION AND MAINTENANCE INSTRUCTIONS CAN HELP YOU TO OPERATE THIS PUMP SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMANCE DAMAGE TO THE PUMP OR OTHER PROPERTY SERIOUS BODILY INJURY AND POSSIBLE DEATH USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED BY THE FOLLOWING SYMBOLS A WARNING Warnings are used when failure to observe instructions or precautions could result in injury or death to humans CAUTION Cautions are used when failure to observe instructions could result in significant damage to equipment and or facilities Designers of systems which utilize diffusion pumps must design out hazards wherever possible pro vide guards safety features and interlocks for hazards which cannot be designed out warn with respect to hazards which cannot be designed out and which remain after utilizing guards safety fea tures and inter
18. PERATION During initial installation the newly installed pump fluid may be subjected to a degassing process This may result in foreline pressure fluctuations and bursts Such fluctuations are considered normal 2 1 a START UP PROCEDURE A WARNING The following conditions increase the risk of explosion any air leaks into the system roughing through a hot diffusion pump may cause some hot hydrocar bon fluids to ignite or explode when exposed to air air release or admitting air to a pump with a hot boiler permit a strong oxidizer to contact the hot pump oil high above 1 micron 133 Pa inlet pressure insufficient or low level of pump fluid operating pump without cooling water circulating to main water cooling coils operating pump with water trapped in quick cool coil foreign matter in the pumping fluid which changes its viscosity and obstructs flow passages CAUTION Do not turn on the heater without fluid in the pump This may ruin the heaters and damage the pump Do not air release the pump while the boiler is hot Most diffusion pump fluids are heat sensitive and will break down under these conditions Do not operate the pump without the foreline baffle This may cause a greater than normal fluid loss Do not operate the pump for extended periods at an inlet pressure above 1 micron 133 Pa High pressure operation may cause exces sive backstreaming Do not operate the pump heater unless the cooling wa
19. Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 Sales and Service Offices France Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 38 Fax 33 1 69 28 23 08 Germany Varian GmbH Alsfelder Strasse 6 Postfach 11 14 35 64229 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 Hong Kong Varian Technologies Asia Ltd Rm 2611 Concordia Plaza New Mandarin Plaza 1 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 26206173 Fax 852 26206338 India Varian India PVT LTD 1010 Compotent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via Flli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi Dong Kangnam Gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Netherlands Varian Vacuum Technologies Rijksstraatweg 269 H 3956 CP Leersum The Netherlands Tel 31 343 469910 Fax 31 343 469961 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico
20. Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 781 861 7200 ap A VARIAN HS 20 Diffusion Pump Instruction Manual For sales and service please call PTB Sales Ph 626 334 0500 Fax 626 334 2151 Toll Free 866 332 0500 SALE 5 www ptb sales com Manual No 6999 01 120 Revision G October 2000 America Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 Argentina Varian Argentina Ltd Sucursal Argentina Av Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel 54 1 783 5306 Fax 54 1 786 5172 Australia Varian Australia Pty Ltd 6 81 Frenchs Forest Road Frenchs Forest NSW 2086 Australia Tel 61 2 9975 8805 Fax 61 2 9452 2600 Varian Industria e Comercio Ltda Avenida Dr Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel 55 11 820 0444 Fax 55 11 820 9350 Canada Varian Canada 6705 Millcreek Drive Unit 5 Mississauga Ontario L5N 5R9 Canada Tel 800 882 7426 Fax 781 860 5437 China Varian China Ltd Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 100031 P R China Tel 86 10 6641 1530 Fax 86 10 6641 1534 Varian Shanghai Service Station 716 Yishan Road Shanghai P R China 200233 Tel 86 21 6483 5576 Fax 86 21 6485 9031 England Varian Ltd 28 Manor Road Walton On Thames
21. able warranty period Customer shall be charged at the then current prices for parts labor and transportation Reasonable care must be used to avoid hazards Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures Except as stated herein Seller makes no warranty express or implied either in fact or by operation of law statutory or otherwise and except as stated herein Seller shall have no liability under any warranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized repre sentative Such claims should include the Product serial number the date of shipment and a full description of the circumstances giving rise to the claim Before any Products are returned for repair and or adjustment written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained Any Pro
22. been used to protect the internal components For non critical work after making sure that there are no foreign materials inside the pump it may be charged with fluid and used without disassembly Otherwise it should be disassem bled and cleaned In general cleaning may be required if the expected vacuum level is to be below the 10 6 Torr 000133 Pa range Check the internal jet assembly It should be concentric and firmly seated on the bottom of the pump Using a flashlight check to make sure that the ejector nozzle is opposite the foreline the pump outlet connection The jet assembly should not rotate because of an indexing pin at the bottom CLEANING A NEW PUMP Remove the cold cap as described in Section Ill para 3 4 of this manual Disassemble the internal jet system from the body of the pump See Figure 3 2 for a section drawing of a typical jet assembly Remove fill and drain plugs and the sight glass with its O ring and graphite gasket Thoroughly clean all components of the jet assembly and pump casing interior but not O rings with acetone followed by an alcohol rinse Installation A WARNING Diffusion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use near high temperature source Ventilate work ing area with a blower and use in large w
23. d air Three elements are required fuel oxidizer and source of ignition A combination of temperature and pressure can be a source of ignition Most diffusion pump fluids except mercury are fuels Hydrocarbon oils are more prone to oxidize and explode than synthetic silicone based oil Oxidizer can be air a strong oxidizer from a leak or can be deliberately introduced in a process or can be inadvertently admitted to the system by operator or process controller error Oxygen and other strong oxidizers are even more dangerous Certain conditions of temperature and pressure can cause a combustible mix ture to explode The larger the diffusion pump the greater the risk of explosion and the greater the risk of damage and or injury Never operate diffusion pumps larger than 10 inches in diameter with hydro carbon oils without a complete safety analysis for the complete system and application Never operate any diffusion pump in the following ways because they increase the probability of an explosion Prohibited Action Explosion Causing Condition Run pump with no cooling water Overtemperature Run pump with low level of Overtemperature pump fluid Run pump without proper backing or Overpressure holding pump Run pump when not evacuated below Overpressure 0 5 Torr 66 5 Pa Admit air to or rough through Overpressure plus strong oxidizer a pump with hot boiler Open drain or fill plug while pump is Overpressure plus strong oxidizer under vacuum
24. duct returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non acceptable means of transportation When any Product is returned for examination and inspection or for any other rea son Customer shall be responsible for all damage resulting from improper packing or handling and for loss in transit notwithstanding any defect or non conformity in the Product in all cases Seller has the sole responsibility for determining the cause and nature of failure and Seller s determination with regard thereto shall be final If it is found that Sellers Product has been returned without cause and is still serviceable Customer will be notified and the Product returned at its expense in addition a charge for testing and examina tion may be made on Products so returned 3 5 97 OPERATION AND MAINTENANCE OF THIS EQUIPMENT INVOLVES SERIOUS RISK IT IS THE RESPONSIBILITY OF THE USER TO MAINTAIN SAFE OPERATING CONDITIONS AT ALL TIMES VARIAN ASSUMES NO LIABILITY FOR PERSONAL INJURY OR DAMAGE RESULTING FROM OPERATION OR SERVICE OF THE EQUIPMENT Carelessly or improperly operated equipment can cause serious injury or death and or damage to the equipment The emergency and safety procedures in this manual are provided to help users and qualifi
25. e the new unit heater element clamping plate and crush plate Support the heating unit by the clamping plate line up the holes with the boiler studs and push the unit up against the boiler plate Use two nuts finger tight to hold it in place Screw on the remaining nut finger tight then tighten all nuts evenly up to 250 inch pounds of torque Label the heater leads according to the schematic diagram then run the wires into the con duit and up into the junction box Connect the leads to the terminal strip then replace the elbow cover plate Replace the insulation and heater cover A CAUTION Should it be necessary to use a new wire it is important that no 14 stranded nickel wire with high temperature insulation is used If copper or copper plated wire is used they will oxidize rapidly because of the high temperature and the terminals will overheat and fail 3 10 3 7 Maintenance REPLACEABLE PARTS The following is a list of replaceable parts for the Varian HS 20 Diffusion Pump Part Number Description 84358301 Cold cap assembly includes No 10 32 SST Rd Hd screw and No 10 32 hex nut SST 660811494 Cold cap gasket see Figure 3 2 F2622001 Cold cap follower brass 75786001 Cold cap nut 622445026 Cold cap female coupling 12 inch OD tube x inch Imperial Flexfitting No 66 FL L6367301 Sprint coupling 84350301 Jet coupling
26. ed persons to operate and service the unit safely Recommendations are believed to reflect accepted industry practices in effect on the date of publication of this manual Special applications must be reviewed and approved by an industrial hygienist or chemical safety engineer Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazardous materials of any kind is the sole responsibility of the user Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved It is the sole responsibility of users of Varian equipment to comply with all local state and federal safe ty requirements laws and regulations applicable to their system Employ the services of an industrial hygienist and or a qualified chemical safety engineer in order to ensure safe installation and use This instruction manual contains information which will assist qualified operators in the operation and qualified service engineers to carry out field servicing the Varian equipment SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER TAKE APPROPRIATE ACTION THROUGH REDUNDANCY AND OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION OPERATION AND MAINTENANCE INSTRUCTION MANUAL SAFE OPERATION IS THE RESPONSIBILITY OF THE USI
27. ell ventilated room When heated or sprayed acetone or alcohol also becomes 4 to 5 times heav ier than air and will flow down settling in tanks pits and low areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eyeshields gloves and protective clothing e Remove all traces of the cleaning fluid by carefully drying with clean dry oil free compressed air f For reassembly reverse the above procedure g Clean the flanges and O ring grooves thoroughly with acetone or alcohol using clean lint free rags AA CAUTION Alcohol acetone and other solvents degrade O ring materials reducing their ability to hold a vacuum Do not use any solvents on O rings If necessary to clean O rings wipe with lint free clean cloth wash in detergent and water or use a small amount of pump oil h Remove all traces of acetone or alcohol by carefully drying with clean dry oil free com pressed air Install O ring gasket 1 6 2 Installation UTILITY AND SYSTEM CON
28. emperatures Touching or rupture of the cooling surface can cause serious burns Water left inside quick cool coils from previous use will turn to steam when the pump is reheated This steam must be allowed to escape without contacting personnel Whenever possible design the water system with inter lock valves so that power cannot be applied to the pump unless water is flowing in the main cool ing coils not quick cooling coils h Cold Surfaces Liquid nitrogen traps cooled by liquid nitrogen are commonly used in diffusion pumps Metal surfaces at liquid nitrogen temperature can cause severe frostbite if contacted by unprotected skin These surfaces remain cold for some time at least a half hour after the liquid nitrogen has evaporated vi Cold Coolant Liquid nitrogen a cryogenic liquid is used in traps If it is splashed on body tis sues or eyes it can cause severe frostbite or blindness The extremely low temperature of lique fied nitrogen can cause skin damage similar to high temperature burns Contact with the cold gas evolving from the liquid may produce the same effect Delicate tissues such as the eye tissues are most easily damaged by exposure to cold gas or liquid To minimize the risk of hazardous con tact of cold gaseous nitrogen with any part of the body wear personal safety equipment recom mended for use with cryogenic materials including face shield full sleeved lab coat and clean dry gloves which fit loosely so t
29. exceed 130 F 54 C The quick cool coil at the boiler plate must be connected to an open drain and the feed line controlled by a separate water 3 way valve open closed and vent to atmosphere The drain must be below the boiler level so that it is drained completely when the quick cool coil water supply is shut off and the pump is operating l Cold Cap L D m ick Cool Quick Coo vent Open Drain Drain Supply Water Requirements 1 5 gallons per minute at 60 to 80 inlet temperature pressure drop across series circuit of cold cap and body 15 PSI Figure 1 3 Cooling Water Connections Installation 1 6 4 Electrical Connections See Figure 1 4 and 1 5 Diffusion Pump Wiring Diagram A WARNING High voltages up to 480V can kill Always break the primary circuit to the pump before starting to work on the heater and or its wiring a The pump heater has been designed to operate at a certain voltage Check the heater for cor rect supply voltage and in the case of multiphase connections for load balance by measuring the resistance of each branch See pages 1 9 1 10 for proper resistance b Make connections to the terminals in the junction box at the foreline The use of flexible con duit is recommended to facilitate removal of the pump for service The pump should not be operated at more than 5 over the rated voltage Make connections in accordance with the wiring diagram prov
30. federal environmental laws and regulations Table of Contents Section Page Safety Considerations 212 eere at pereat e iesus ux eee dae um wee WE i Section I Installation 2564029404 QA reg ibt uen Pee ue 1 1 General 1 1 1 2 Operating Specifications es hws IT xe DE We d S S 1 1 1 3 Physical Specifications sese ER Re EE lee ewe pee ges ick m Y RE Rn 1 2 Unpacking np asian tox a Wienges uper ardores E ET 1 4 1 5 Cleaning a New PUMP oos s sd D qu s est bs ea i 1 4 1 6 Utility and System Connections 0 0 ce 1 6 1 7 Adding PUMP sr UNG S Sedis Mata esa are a reete dpt 1 11 Section Il Operation us DE Wa IS Se E ETE See quat audis 2 1 2 1 Start up AR RPSEEAE RES 2 1 2 2 Shutdown PIOCedUIe seti gx eer ENS Wate ete lues d elbow 2 2 Section 11 Maintenance ssessseeee nen 3 1 3 1 General 22020 ce Psy eed XR ELSE NR KO ERU a HUE 3 1 3 2 Periodic Inspecliom s cedes Paene er a T eate eor e ue eap qe a ed 3 1 eaae soi ered tio Eat eei RU MEA Mud RM Sup et 3 2 3 4 Disassembling and Reassembling the Cold Cap
31. gt 8 x 6 75 Holes on 67 50 B C Thermal Switch 25 635 Enclosre Cold Cap Connections Far Side NW25 Sp Gauge Port oo m 14 El Water Connection 25 584 See SS 1 j Electrical 48 BRENNEN I VES 1219 prd EI LIE CP puo gt E Va Thermal Switch pu Md NA Enclosre LE Sight Glass D w Fill and Drain ME 38 Quick Cool optional Figure 1 2 Outline Drawing HS 20 Diffusion Pump with ASA Flanges Installation 1 4 UNPACKING Pumps are factory packaged to permit prolonged storage in suitably protected areas without special precautions Ay WARNING When lifting some Varian diffusion pumps use power assisted equip ment and trained moving installation personnel to avoid dropping slip ping and or overturning the pump and severely injuring personnel check weight of equipment before lifting and do not stand under equip ment being moved a Remove flange covers blank plugs protective plugs from water connections etc Be careful not to scratch or otherwise damage or mark the sealing surface usually an O ring groove on top of the large inlet flange Carefully remove the outer shipping container and save it for evidence if damaged Notify the carrier immediately Visually inspect the pump for damage that may have occurred during shipping Discard any internal packing which may have
32. he pump and relief valve to a safe location thus ensuring adequate dilution to safe levels and take all other action required to meet quality air standards Always handle pump fluids and hardware with an awareness of the possible deadly hazards involved and the necessity for great care and atten tion to safety precautions Diffusion pumps are typically cleaned with acetone or alcohol Acetone alcohol and most other solvents are irritants narcotics and depressants and or carcinogenic Their inhalation and inges tion may produce serious effects Even absorption through the skin can result in moderate toxicity Always ensure that cleaning operations are performed in large well ventilated rooms Use of self contained breathing apparatus may be necessary depending upon the solvent type and vapor concentration in surrounding air e High Voltage Diffusion pumps operate at voltages high enough to kill through electrical shock Design equipment utilizing these pumps to prevent personnel contact with high voltages Securely attach prominent hazard warnings Personnel should always break the primary circuit to the power supply when direct access to the heater or wiring is required f Hot Surfaces Boiler temperatures reach 530 F 275 C which can cause serious burns when touched Always ensure that surfaces have cooled near room temperature before touching them g Hot Coolant and or Steam The water used to cool the pump can reach scalding t
33. hey can be thrown off quickly if frozen by contact with the gas Asphyxiation If a large amount of liquid nitrogen is spilled in a small poorly ventilated room or equipment death from suffocation can result All diffusion pumps are typically cleaned with ace tone or alcohol Acetone alcohol and most other solvents are very volatile unstable During cleaning the volatility of these cleaners may permit their gases to displace air and its life support ing oxygen which could cause death or serious injury by asphyxiation Always ensure that clean ing operations are performed in large well ventilated areas While still hot the diffusion pump may also contain decomposed and or overheated pump oils which can also be an asphyxiant Large Heavy Weights Diffusion pumps larger than 10 inches in diameter require power assist ed equipment and the use of trained moving installation personnel in order to avoid dropping slip ping and or overturning the pump thus severely injuring personnel Check weight of equipment before lifting and do not stand under equipment being moved vii A WARNING High voltages up to 480 V can kill Always break the primary circuit to the power supply before starting to work on the heater and or its wiring A WARNING Diffusion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosi
34. ided with each pump 1 6 5 Thermal Switches The thermal switches have been pre set at the factory and should not require adjustment The lower thermal switch is set at 390 F the upper switch is set at 185 F Should any thermal switch be thrown out of adjustment it can be adjusted as follows 1 Boiler thermal switch The boiler thermal switch is mounted on the bottom of the brass strap on the side of the pump The thermal switch should be adjusted with the pump operating as follows a After several hours operation disconnect the lead wires and place an ohmmeter across the terminals of the thermal switch b Turn the adjusting screw until of a turn either way will make the contact open or close Turn the adjusting screw clockwise 4 turn 2 Cooling water thermal switch The cooling water thermal switch is mounted on the top of the same brass strap located on the side of the pump The switch should be adjusted with the pump in operation as follows a Disconnect the lead wires and place an ohmmeter across the terminals of the switch b Turn the switch adjusting screw until of a turn either way will make the contact open or close Turn the adjusting screw clockwise turn Thermal switches are to be operated on AC power only and should be connected in series with the coil of the diffusion pump heater contactor 1 6 6 Initial Vacuum Test The purpose of this test is to establish the leak tightness of the
35. ings and replace them if necessary Reinstall the pump in the system DISASSEMBLING AND REASSEMBLING THE COLD CAP Refer to Figure 3 1 To disassemble the cold cap a Remove the female coupling nut follower and gasket located at the end of the cold cap water line on the outside of the pump b Remove the cold cap securing screw which secures the cold cap to the jet assembly C Lift out the cold cap To reassemble the cold cap a Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before setting the cold cap on top of the jet assembly Be careful not to damage the sealing surfaces b Replace the cold cap securing screw which secures the cold cap to the jet assembly Do not overtighten the screw C Replace the gasket the follower the nut and the female coupling to the side of the pump Maintenance COLD CAP ASSEMBLY 84358301 includes Rd Hd screw No 10 32 x 1 in SST amp hex nut No 10 32 SST WSS ae Td lg LLL LO NES cs Sleeve Seal Follower Gasket Figure 3 1 External Fittings Cold Cap Assembly E NOTE Customer to supply water tubing to be connected to coupling with FPT threads shown above 3 4 3 5 Maintenance JET ASSEMBLY The HS 20 jet assembly consists of several subassemblies The lower jet assembly consists of the jet base and stages 3 and 4 A jet shield is provided for the third stage
36. jet The second stage jet is secured to the central tube and forms a subassembly A shield is provided for the second stage jet The top of the central tube carries an orifice plug The top jet spacer passes through this plug and by a spring loaded coupling and tie rod secures all stages firmly All external and accessible internal surfaces of the jet assembly have been cleaned prior to shipment 3 5 1 a 3 5 2 Disassembling the Jet Assembly Refer to Figure 3 2 Disassemble the cold cap water line feedthrough compression seals by removing the nut the follower and the gasket from the side of the pump Remove the cold cap securing screw and withdraw the cold cap assembly carefully Be sure that the seal sleeves are not scored or otherwise damaged Firmly grasp the jet cap and unscrew it from the coupling assembly Remove the orifice plug Withdraw the central tube complete with second stage jet and jet shield Raise the lower jet assembly which consists of the third stage jet the jet shield the fourth stage jet and the jet base Disassembling the Lower Jet Assembly Remove the third stage shield Ls NOTE Before removing the securing screws in the following step scribe a ref erence mark at the interface to assure that original holes are mated when reassembled Remove the securing screws between the third and fourth stage jets Carefully preserve the screws Be sure that the jet spacers are not damaged
37. l coil when the pump is cold or out of ser vice to prevent harmful collection of condensation on the boiler plate heater and heater terminals Switch off the power to the diffusion pump heaters Admit cooling water to the quick cool coil if necessary and continue to circulate it until the pump body just above the boiler heat shield can be touched approximately 130 F or 54 C In valved systems which have tight inlet and foreline connections it is possible to close valves to isolate the diffusion pump at inlet and discharge to air release the remainder of the sys tem shut off the heat to the diffusion pump and stop the mechanical pump With this method the quick cool coil does not have to be used However the water flow through the pump must be maintained until the boiler cools down below approximately 300 F 150 C SECTION Ill MAINTENANCE 3 1 GENERAL Diffusion pumps generally require little attention when correctly operated However it is advisable to perform some periodic checks to insure continued trouble free operation By simple preventive main tenance costly down time and cleaning procedures can be avoided A day to day log of pump and system performance will indicate the condition of the pump and marked variations will show the need for corrective action 3 2 PERIODIC INSPECTION The frequency of inspection will depend on the type of system its operation and utilization The maxi mum interval between inspection
38. locks and lastly provide procedures and instructions on proper use servicing etc so as to minimize risk THE INSTALLATION OPERATION AND OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS ANY ONE OF WHICH IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL Hazard Suggested Corrective Action Loss of utility water and or electricity Overpressure in foreline Overtemperature Insufficient water flow through the maincooling coils Water trapped between inlet and outlet of quick cool coil or liquid nitrogen trapped between inlet and outlet of liquid nitrogen trap Loss of ground integrity Positive pressure in pumping system High voltage Toxicity Corrosivity Explosion Provide sufficient backup water and power supply as neces sary to effect a safe shutdown under worst case conditions Provide an interlock to ensure that the power supply to the pump heater cannot be activated if the foreline pump is not run ning AND OR pressure in foreline is above 0 5 Torr 66 5 Pa Fit temperature sensors and pump fluid level sensors with feedback to an interlock on the heater power supply Use water flow sensor and feedback to interlock the heater power supply Provide vent or pressure relief valves for both quick cool coil and liquid nitrogen trap Incorporate ground fault interrupt circuit into heater power supply
39. lved system close the roughing valve and main isolation valve ahead of the dif fusion pump In the case of unvalved systems the entire work chamber volume must be included in the test Evacuate the entire system with the mechanical pump only Let the mechanical pump reach an ultimate pressure in the system This reading should approximate the value obtained in step a above usually 10 to 50 microns 1 33 to 6 65 Pa If it does not examine for leakage If leakage is suspected follow standard procedures for leak testing These will depend on the type of vacuum gauges and or leak detection equipment available The most effective are Varian s heli um leak detectors ADDING PUMP FLUID A WARNING The risk of explosion in large pumps is increased by hydrocarbon oils low fuel levels or admitting atmospheric pressure during operation Never operate diffusion pumps larger than 6 inches with hydrocarbon oils without a complete safety analysis for the specific system and appli cation Hydrocarbon oils are more prone to explode than synthetic sili cone based oils similarly the larger the diffusion pump the greater the risk of explosion Running the pump with low oil level causes overheat ing and the oil to be decomposed and become very toxic Such decom posed oil and any residue from toxic corrosive materials pumped may be present on the dipstick when the fluid level is measured NOTE Fluids must be stored in clean tightly closed containers
40. n Note Pumps operated with 380 volts line voltage operate at 84 of their full power 10 1KW Pumps with 415 volts line voltage operate with full power 12KW I I 153A 380V 16 5A 415V Y Parallel L1 L2 L2 L3 L3 L1 zx Rtot 208 380 415 V Figure 1 5 380 415 V Wiring Diagram HS 20 Diffusion Pump 1 10 Installation A WARNING Pumps and their components are designed for vacuum service they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities Serious accidents have been caused by intentional pressurization of vacuum systems and their components Never pressurize any part of a vacuum system for test or any other purpose Always provide pressure relief when designing diffusion pumps into systems and ensure that pressure relief motion is limited to safe envelopes Confirm the vacuum ultimate pressure characteristics of the mechanical pump This should closely approximate the value quoted in the manufacturer s data if the mechanical pump is correctly installed adjusted and filled with clean oil Pressure measurements should be made with a con tinuously indicating total pressure gauge such as a thermocouple gauge This test can be per formed to evaluate either valved or unvalved systems Connect the outlet or foreline of the diffusion pump to the inlet of the mechanical backing pump using appropriate vacuum tight connections In the case of a va
41. ntal to prevent uneven fluid level and avoid local overheating where the fluid level would be too shallow Prepare inlet O ring seals by wiping them with a clean cloth Do not use solvents Use a small amount of diffusion pump oil to wet the cleaning cloth Install the O ring in the groove being careful not to damage the sealing surface with cuts nicks or scratches Using appropriate lifting apparatus align the bolt holes of the flanges and assemble the bolts Tighten the bolts evenly to compress the O ring seal until light contact is achieved between metal flanges Check fill and drain plugs and the sight glass assembly for tightness Apply light to medium torque enough to compress gaskets Minute leaks through the gaskets may develop with use in this location They may be detectable with very sensitive mass spectrometer leak detectors 1 6 3 Cooling Water Connections See Figure 1 3 The following method of external connections is recommended a Water connections are designed for fittings The cold cap cooling coil and all of the body and foreline cooling should be connected in series A cooling water supply of 1 5 gpm at 60 F to 80 F 16 C to 27 C should be adequate A higher flow than this will not be harmful 1 6 Installation The cooling water discharge should if possible be connected to an open drain so that cooling water flow can readily be checked The temperature of the discharged cooling water should not
42. on pump fluid one gallon container 3 11 Maintenance 3 12 SECTION IV TROUBLESHOOTING 4 1 LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to the incidence of leaks The following locations should be checked first if leakage is the suspected cause of poor system performance a Inlet and foreline connections b Drain and fill plugs e Other compression fittings such as high vacuum gauges in the system d Threaded connections such as a foreline gauge 4 2 OUTGASSING High vacuum systems even without external leakage can have high gas loads due to outgassing from internal surfaces or processes The pressure in the system is a result of gas load divided by pumping speed p Q S If the gas load Q exceeds the maximum throughput capability of the diffu sion pump the diffusion pump will not function and the pumping action will essentially be due to the mechanical backing pump To estimate the gas load isolate the system from all pumps after evacuation and measure the rate of pressure increase The gas load can be estimated as follows Vx AP At Q where V is the isolated volume AP is the pressure rise and At time period of measurement 4 3 POOR PUMP OR SYSTEM PERFORMANCE Before proceeding with a program of step by step troubleshooting check the performance and accu racy of the vacuum gauges used on the system Table 4 1 show
43. rosive and toxic when trapped in oil Always wear protective gloves when handling dirty pump oil drain it into a closable container and do not breathe the fumes of the oil Always use fully self contained breathing apparatus A WARNING If hazardous gas vapors chemicals or combustible mixtures are pumped sufficient quantities may exist during operation This pump may contain decomposed and or overheated pump oils or poisonous and or corrosive process materials which are highly toxic and also can be an asphyxiant Proper operation will not always ensure that all haz ardous materials have been removed A WARNING Hot oils can cause serious burns Wear protective gloves and long sleeved loose fitting heat resistant garments when draining pump oil A WARNING When lifting some Varian diffusion pumps use power assisted equipment and trained moving installation personnel to avoid dropping slipping and or overturning the pump and severely injuring personnel Check weight of equipment before lifting and do not stand under equipment being moved CAUTION Acetone alcohol and other solvents degrade O ring materials reducing their ability to hold a vacuum Do not use acetone or other solvents on O rings If necessary to clean O rings wipe with lint free clean cloth wash in detergent and water or use a small amount of pump oil Ls NOTE Always dispose of used or dirty oil properly and in compliance with all local state and
44. s common faults and lists the proba ble cause and corrective actions to correct for poor performance Table 4 1 Troubleshooting Fault Probable Cause Corrective Action Leaks in system virtual or real Locate and repair High process gas load Measure gas load eliminate cause System dirty Clean system to reduce outgassing 4 1 Fault Poor ultimate pressure Troubleshooting Table 4 1 Troubleshooting Cont d Probable Cause Contaminated pump fluid Corrective Action Examine and clean pump replace fluid Low heat input Check voltage Check for continuity burned out element poor thermal contact Inadequate cooling water flow Check water pressure Check tubing for obstructions and backpressure Excessive or too cold cooling water Check temperature Adjust flow High forepressure Check for leak in foreline poor mechanical pump performance breakdown of mechanical pump fluid Water in quick cool coil Check and remove cause Low heat input Check heaters Low fluid level Malfunctioning pump assembly Improperly located jets Damaged jet system Add fluid Check and repair or replace Inlet pressure surges Incorrect heater input Check and correct Fluid outgassing Leak in system ahead of pump inlet Condition fluid by operating the pump for a few hours Check and correct High chamber contamination Forepressure too
45. s is established on the basis of experience It is recommended that the following items be regularly examined A WARNING High voltages up to 480V can kill Always break the primary circuit to the power supply before starting to work on the heater and or its wiring Make sure that the pump is at room temperature before attempting ser vice Serious burns can result if this Warning is not headed Depending on system process poisonous or corrosive compounds may be present when opening the fill or drain Always wear appropriate gloves and clothing and use a self contained breathing apparatus An explosion could occur if the fill or drain is opened when the pump is running or when it is hot Check oil level only when the pump is cold a When the pump is cold check the condition and level of fluid These can be inspected by withdrawing a sample through the drain and by visually checking the level of fluid through the sight glass respectively Use new O ring gaskets when replacing fill and drain plugs Slight discoloration of the fluid does not affect performance b Loss of the fluid can be caused by the following 1 incorrect air admittance procedures and or admittance of excessive air or other gas to a hot pump inadequate water cooling continuous operation at inlet pressures above 10 Torr 133 Pa or failure to reinsert the foreline baffle in the pump assembly 3 1 Maintenance C When the pump is cold check that the
46. system specifically the vacuum connec tions to the diffusion pump To eliminate misleading indications and the masking of leaks by the fluid the tests should be carried out with the diffusion pump dry i e before it is charged with the pumping fluid 1 8 Installation To Control Magnetic Contactor To 3 Ph 200 240 400 430 440 480 V Supply uH 12 000 W R Element Resistance TOT 4 T x P Thermal Switches OPEN ON TEMP RISE TSW2 TSW1 Upper Lower 185 F 880 F Heaters 6 2000 W ex By Customer 41096 596 200V 202 240V 290 400V 800 430V 930 440V 97 9 480 V 81150 L1 L2 L2 L3 L3 L1 200V 72 240V 100 400V 2260 430 V 312 440V 320 480 V 380 lj 29 240V 14 5A 480V 200 240 400 430 440 480 V By Varian 1 240V Delta Parallel 200 240 400 430 440 480 V Figure 1 4 200 240 400 430 440 480 V Wiring Diagram HS 20 Diffusion Pump Installation Tor vx AC Thermal Switches Control TTD EN OPEN ON TEMP RISE TSW2 Magnetic Upper Lower 185 F 380 TB aux iu r z 380 415 V Supply Heaters 6 2000W 240V See note 12 000 W lt lt lt lt I a x By Customer By Varia
47. ter Requirements Pressure drop across cooling circuits of cold cap and body in series Backing Pump Size Recommended Technical Specifications 6 x 104 Torr to lt 1 x 10 9 Torr 8x 10 Pa to 1 3 x 107 Pa 7 8 x 10 4 mbar to 1 3 x 10 Torr 17 500 liters sec for air 21 000 liters sec for helium 18 Torr liters sec 2394 Pa liters sec 23 4 mbar liters sec No Load 0 65Torr 86 5 Pa 0 85 millibar Full Load 0 55Torr 73 2 Pa 0 72 mbar 0 0015 mg cm2 min 12 KW 240 380 480V 50 60 Hz 3 phase 45 minutes 85 minutes 45 minutes 5 U S quarts 4 75 liters 1 5 gpm at 60 F to 80 F inlet temperatures 15 psi 100 cfm for maximum throughput 1 1 Installation 24000 oo TIE TIAS m 44 iT 40 18000 TT 11 171 36 22000 20000 16000 ra i 32 i 28 HH fi 24 10000 L 7 B LL 20 16 aou 4 12 HAT Arid 4 li i Lil di ili 0 1 09 1 08 46 07 1 06 1 05 4p 04 4p 03 4Ep 02 4p 01 INLET PRESSURE TORR 14000 12000 i AIR SPEED L SEC 8000 i Hel 6000 tt LH Hh THROUGHPUT TORR L SEC 4000 2000
48. ter is circulat ing It will cause the pump and fluid to overheat Evacuate the diffusion pump by means of the mechanical roughing pump to a pressure level below 0 5 Torr 66 5 Pa The diffusion pump will not function unless the discharge pressure is less than the tolerable forepressure approximately 0 5 Torr 66 5 Pa Turn on the cooling water supply to the pump body and check that adequate flow is provided by examining the amount of water discharged at the visual drain points Switch on the power to the diffusion pump heater 2 1 2 2 Operation Check inlet and forepressure performance by means of the system instrumentation During operation the gas load at the inlet of the diffusion pump should not exceed the maxi mum throughput capability of the pump This means that the pressure at the inlet flange should not except in transient conditions exceed approximately 1 x 10 3 Torr 133 Pa Dur ing operation the discharge or fore pressure must be below the specified tolerable forepres sure SHUTDOWN PROCEDURE A WARNING Boiler temperatures reach 530 F 275 C which can cause serious burns when touched Always ensure surfaces have cooled near room temperature before touching them Air release or admitting air to a pump with a hot boiler especially when it is under vacuum permits a strong oxidizer to contact the hot pump oil and thereby increases the risk of an explosion AA CAUTION Do not operate the quick coo
49. upling loosens from the jet rod during disassembly position it so that the top of the jet coupling is flush with the bottom of the orifice plug Figure 3 3 Jet Coupling 3 8 Maintenance Boiler Plate Heater Element Dimple Vow L Hm AA Clamping p eS Kigh Teme eK Washer High Temp Sleeving AX Figure 3 4 Heater Element Assembly Ls NOTE Tighten clamping nuts to 250 in lbs 10 Maintenance A WARNING High voltages up to 480V can kill Always break the primary circuit to the power supply before starting to work on the heater and or its wiring A CAUTION Poor clamping resulting in inadequate thermal contact may result in reduced heater life and poor pump performance Tighten nuts finger tight on clamping plate then gradually and evenly tighten them to 250 in pounds of torque Determine which heater element has failed at the junction box then disconnect the two corre sponding leads from the terminal strip Pull the leads out of the terminal box then out the elbow cover plate Remove the heater cover from the bottom of the diffusion pump Move the insulation to expose the faulty heater s Remove the nuts holding the clamping plate Lower the entire heating unit heater element clamping plate and crush plate until it is off the mounting studs Apply an anti seize compound such as FEL PRO C 5A or common milk of magnesia to the studs as needed Assembl
50. ve causing serious injury or death Do Not Use Near A High Temperature Source Ventilate working area with a blower and use in large well ventilated room When heated or sprayed acetone also becomes 4 to 5 times heavier than air and will flow down settling in tanks pits and low areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eyeshields gloves and protective clothing A WARNING Varian has no control over the types of gases passing through this pump These are entirely under the control of the process user and or the hardware systems integrator Frequently process gases are toxic flammable corrosive explosive or otherwise reactive Since these gases can cause serious injury or death it is very important to plumb the exhaust of the pump to the facility s hazardous gas exhaust system which incorporates appropriate filters scrubbers etc to insure that the exhaust meets all air and water pollution control regulations A WARNING Certain gases can become cor
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