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Agilent 10707A Beam Bender - Advanced Test Equipment Rentals

1. 6 6 N i gt oa a E i 3 00 mm O 44 gs oO v D Y 3J Bee 8 d ea a ET E ee pr LZ 4 6 00 _ gt I DN Figure 310 Agilent 10884B Power Supply dimensions Laser and Optics User s Manual Vol II 767 36 Accessories Number of receivers in a system The Agilent 10884B provides 15V 3 0A This 15V is used to power the laser head and the receivers Table 88 lists recommended cable and the number of receivers that can be used with the Agilent 10880A B C cable Table 88 Recommended Receiver cables Product Number of Receivers 10880A 5 m 16 4 ft Up to six 10780C F or up to four E1708 09A 10880B 10m 32 8 ft Up to four 10780C F or up to two E1708 09A 10880C 20 m 65 5 ft Up to two 10780C F or one E1708 09A Powering multiple receivers 768 The receiver is connected to the measurement connector on the Agilent measurement board Receiver power is provided by a trace on the board A multiple receiver setup will use multiple Agilent axis boards The 15V receiver power will be carried from one board to the next by a ribbon cable between measurement boards As the number of receivers being used increases the 15V current demand on the
2. Plate Ref MEASUREMENT PATH fp j wc Z Agilent 10719A One Axis 7 Differential Interferometer 2 2 2 From Laser ands 22 y 7 fg 2Af Z To Receiver eum m m m lt m n Plate Mirror bun m dd A4 Plate COMPOSITE fA and fp Ser 2 Agilent 10719 One Axis E Differential Interferometer Y Y SS f A an From Laser pt EM EE EH ND UN cQ gt Y fA fg 2Af V fB 7 To Receiver amp p m ED GN pue Measurement Mirror A lt D Plate d LEGEND y fa m Qm Em um gt fg lt f and fp f r Rounded corners are used to help you trace paths Figure 174 Agilent 10719A One Axis Differential Interferometer optical schematic Laser and Optics User s Manual Vol II 517 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Special Considerations Configuration and beam locations The Agilent 10719A interferometer is designed to be used in a straight through configuration only Its input face and measurement face are parallel to each other on opposite sides of the housing The locations of the reference and measurement beams with inputs and outputs identified are shown in Figure 175 The Agilent 10719A interferometer is similar to other plane
3. Interferometer m Input Face lt gt 14 38 mm Input for 68 92 0 566 all axes 2 71 lt 7 19 mm Axis No 1 MP2 0 283 Output See Note 1 SGE Nole 7 19 mm iT 0 283 AN FROM LASER 4 HEAD A Bottom of A interferometer as shown in Axis No 3 24 49 mm 10 11 mm MP3 specification Output 0 964 0 39 See drawing 17 3 mm 20 90 mm Notes 1 8 2 0 68 0 83 Laser Beam turns right viewed from top GENERAL NOTES e 1 For Each Axis gt gt Secondary Measurement beam o e lt MP Measurement Point lt Darker Beam 2 Indicates 8 Primary Measurement beam z 2 Drawing not to scale From Laser Head Figure 199B Agilent 10737R Interferometer beam patterns Laser and Optics User s Manual Vol II 591 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Mounting 592 Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking an Agilent 10737L or Agilent 10737R interferometer in position Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its physical centerline simplifying installation Note however that since the input aperture is not centered on the input face some translation of the interferometer or beam delivery optics may be required when the interfe
4. _ radian 7 19 mm or 0 283 inch Yaw For the Agilent 10737L R interferometer yaw rotation about the Z axis can be measured as the difference between the data returned from measurement axis 1 and measurement axis 2 divided by the distance between them 14 38 mm or 0 566 inch measurement axis 1 measurement axis 3 Yaw radian 14 38 mm or 0 5666 inch Laser and Optics User s Manual Vol II 603 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Error The deadpath distance for an Agilent 10737L R interferometer is the distance between the interferometer s measurement face and the measurement mirror at the measurement zero position This is the same as for the Agilent 10706B interferometer on which it is based Specifications and Characteristics 604 Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Plane mirror systems have a fundamental optical resolution of one quarter wavelength 0 158 micron 6 23 microinches Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897B and 108984 is usually available Laser and Optics User s Manual Vol Il
5. 2 41 mm 19 3 mm Dia 09 0 76 Anti reflection Coating Transmitting Face Minimum Clear Aperture 16 50 mm 0 65 Concentric to O D Figure 91 Agilent 10725A 9mm Laser Beam Splitter dimensions Agilent 10726A Beam Bender Specifications Use Bend a laser beam having a diameter up to 9 mm nominal This beam bender requires a user supplied mount This optic can be made vacuum compatible Dimensions See drawings below Weight 10 grams 0 35 ounce Materials Used Optic Fused silica Optical Efficiency Typical 9996 Worst Case 9896 374 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Minimum Clear Aperture Central 19 05 mm 0 75 x 26 92 mm 1 06 Figure 92 Agilent 10726A 9mm Laser Beam Bender dimensions Agilent 10725B 4 and Agilent 10725C 15 Beam Splitters Each of these bare optics non polarizing beam splitter is designed for use in multiaxis laser measurement systems They are designed to handle the 9 mm beam from an Agilent 5517C 009 The Agilent 10725B Beam Splitter is the same optical element as that used in the Agilent 10700B described earlier in this chapter except that the Agilent 10725B is supplied without a housing Likewise the Agilent 10725C Beam Splitter is the same optic as that used in the 10700C minus housing CAUTION Agilent Technologies does not provide mounting hardware for the Agilent 10725B C beam splitters These devices are intended for use
6. TORT 3i Agilent Agilent Technolo gies P N 10706 60202 Agilent Technologies Agilent Target Agilent Aid Agilent Aid P N 10702 60001 P N 10706 60001 P N 10706 60202 Figure 136 Agilent 10706B Interferometer alignment aids Laser and Optics User s Manual Vol II Agilent 10706B High Stability Plane Mirror Interferometer 21 Using the Alignment Aid Figure 137 Using the Agilent 10706 60202 Alignment Aid Alignment Procedures Two alignment procedures are given for the Agilent 10706B High Stability Plane Mirror Interferometer the straight through configuration as shipped in a single axis application the turned configuration for two axis X Y stage applications Straight Through Configuration Signal Axis Alignment This procedure describes the alignment of the Agilent 10706B High Stability Plane Mirror Interferometer used in the straight through configuration Before proceeding review Alignment principles in Chapter 4 System Installation and Alignment in Volume I of this manual This procedure minimizes cosine error and the thermal drift coefficient of the Agilent 10706B interferometer and maximizes signal strength at the receiver Two separate autoreflection adjustment steps are performed using the two alignment aids 1 Move the stage to its point furthest from the laser head Align the laser beam perpendicular to the measurement mirror by autoreflection 2 Position the Agilent 10706B
7. modulation can occur with the amplitude depending on the bend radius Amplitude modulation can cause signal attenuation but not measurement errors A A ASWY Alignment and adjustments To aid in aligning the laser beam three features are available Initial receiver positioning and coarse beam alignment are achieved with a snap on beam target fixture Agilent part number 10780 40009 which is supplied with the receiver The target is for beam alignment only and should be removed before operating the receiver LEDs on the top and front of the receiver light to provide visual indication that the receiver photo detector has received both frequency components of the laser beam Adc voltage which is a function of the incoming laser signal level is made available for assistance in fine tuning the laser beam alignment The remote sensor allows the receiver s body to be located well away from the point of beam intercept Some Agilent interferometers allow for direct mounting of the remote sensor Laser and Optics User s Manual Vol II 711 35 Receivers Operation Two LEDs light to indicate that the receiver s photodetector has received the laser beam If the LEDs do not light during operation try adjusting the attenuator and squelch controls as described in the Alignment and Adjustments of the Agilent E1707A Dynamic Receiver and Agilent E1708A Remote Dynamic Receiver Operating Manual Specifications and cha
8. 4 1 18 18 0 Aperture 0 71 DIA 2 places lt gt 30 0 mm 27 0 mm 1 18 1 06 30 0 mm 40 0 mm 1 18 1 57 Figure 209 Agilent 10771A Angular Reflector 616 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume 11 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Introduction 618 Squareness and Parallelism 619 Principles of Operation 619 Installation and Alignment 621 Operation 632 Specifications 632 RE Agilent Technologies a 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Introduction Straightness measures displacement perpendicular to the axis of intended motion of the optics The straightness measurement optics described in this chapter are designed for use in a calibrator system such as the Agilent 5529A 55292A More detailed information about the use of these optics can be found in Agilent calibrator system user s documentation Agilent offers two different sets of straightness measuring optics see Figure 210 The Agilent 10774A Short Range Straightness Optics will measure straightness over a range of 0 1 meter to 3 meters 4 inches to 120 inches The Agilent 10775A Long Range Straightness Optics will measure straightness over a range of 1 meter to 30 meters 3 feet to 100 feet 61
9. AGILENT 10716A BEAM LOCATIONS Adapter 2 12 7 mm gt lt 0 50 Standard Configuration Figure 156 Beam Locations for standard Agilent 10716A Interferometer Laser and Optics User s Manual Vol 11 Agilent 10716A High Resolution Interferometer 23 Agilent 10716A 001 BEAM LOCATIONS 8 1 mm 12 7 0 50 Adapter Turned Configuration Figure 157 Beam Locations for Agilent 10716A 001 Turned Configuration Alignment Aids The Agilent 10716A High Resolution Interferometer is supplied with two of the alignment aids shown in Figure 158 Alignment Aid Agilent Part Number 10706 60001 Alignment Aid Agilent Part Number 10706 60202 Alignment Aid Agilent Part Number 10706 60202 eases the autoreflection alignment for the high stability adapter to achieve minimal thermal drift and maximum signal strength It contains a quarter wave plate to reflect the reference beam back on itself and return it to the laser without offset Figure 161 shows how the aid is positioned between the beam splitter and the high stability adapter during alignment Laser and Optics User s Manual Vol II 487 23 Agilent 10716A High Resolution Interferometer ALIGNMENT AIDS FOR AGILENT 10716A Alignment Aid Insert between Beam Splitter and High Stability reflector during autoreflection a REMOVE TARGE AFTER ALIGNING Agilent Technologies AE Agilent P N 10706 60202
10. Accessories 36 Agilent E1848A Laser Head Cable The Agilent E1848A Laser Head Cable shown in Figure 291 is used to connect a customer supplied 15V power supply to an Agilent 5517B BL C D DL FL Laser Head It has a 5 pin male DIN connector for connecting the laser head to a customer supplied power supply Figure 291 Agilent E1848A Laser Head Cable Figure 292 shows the pinouts of 5 pin male DIN connector that connected to the Agilent E1848A Laser Head Cable Pins see Rear View P3 Rear View P3 2 YEL GND BLK 15 4 5 RED 15 GND YEL 1 3 NO CONNECT KEY SLOT SHIELD Agilent Part Number 1252 7302 NOTE SWITCHCRAFT part number 05CL5M or equivalent The mating connector is SWITCHCRAFT part number 57HBF or equivalent Figure 292 Male DIN Connector Pinout Laser and Optics User s Manual Vol II 745 36 Accessories 746 Agilent E1848B Laser Head Cable The Agilent E1848B Laser Head Cable shown in Figure 293 is used to connect the Agilent 10884B Power Supply to an Agilent 5517B BL C D DL FL Laser Head It has a 5 pin female DIN connector for connecting the laser head to the Agilent 10884B Power Supply Figure 293 Agilent E1848B Laser Head Cable Laser and Optics User s Manual Vol Il Alignment Targets and Aids Accessories 36 Alignment targets and alignment aids shown in Figure 294 can ease the job of aligning optical components of the laser measurement system Tabl
11. Available Agilent Technologies measurement optics are described in Chapter 5 Measurement Optics General Information in Volume I of this manual Available Agilent Technologies beam directing optics are described in Chapter 17 Beam Directing Optics in Volume I of this manual Laser and Optics User s Manual Vol II 749 36 Accessories Table 86 Optics Component Commeni s Order as required to manipulate beam path for your application Agilent 10724A Plane Mirror Reflector Agilent 10728A Plane Mirror requires user supplied mounting hardware Agilent 10772A Turning Mirror Agilent 10773A Flatness Mirror Agilent 10776A Straightness Accessory Kit Agilent 10777A Optical Square All Agilent laser systems can use the same Agilent 107XX series of optics Vacuum applications Many of the optical components of the laser measurement system have vacuum options which are compatible with vacuum environments Contact Agilent Call Center for information telephone numbers of various call centers are listed on the Service and Support page at the back of this manual Typically these components have housings made of stainless steel and optical elements attached to the housings using a lower volatility vacuum grade adhesive See the specifications for a list of materials used in the optics For those optics such as the Agilent 10728A mirror which require a user created mount arrangement it is the
12. Change of indicated distance per degree C temperature change NOTE Flatness deviations will appear as measurement errors 0 05 micron C 1 6 pinch C typical Fundamental Optical Resolution X 8 Non linearity Error 2 nm peak value Maximum Angular Beam Deviation 30 minutes of arc Maximum Mirror Pitch Yaw Tolerance when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Depends on distance between mirror and interferometer Misalignment of interferometer to measurement mirror will degrade the Thermal Drift Coefficient 55 lt 12 7 mm See Note 0 50 38 9 mm Tm 5 1 53 12 7 0 50 gt 32 0 mm O E Lasa mm SYM Center Line EL 1 26 3 38 8 1 23 9 0 32 0 94 6 32 UNC 4 Places Y Thru Clearance Y For No 4 or25mm E 28 4 mm 1 12 From Laser To From Mirrors 12 7 mm 0 50 o e 3 38 1 mm 28 4 mm 1 50 1 12 7 Note To Receiver 14 0 For 10716A 001 this dimension m is 100 1mm 3 94 0 55 d nn Figure 162 Agilent 10716A High Resolution Interferometer and Agilent 10716A 001 Turned Configu
13. Receivers of this manual Unblock the stage mirror beams Comparing beam path alignments 1 2 Remove the receiver assembly Look for any lack of overlap between the reference and measurement return beams translucent tape will help If beams do not overlap check reference mirror alignment Note that if you must realign the measurement mirror you will also have to realign the reference mirror Install the receiver assembly and make sure all screws are tight Laser and Optics User s Manual Vol Il Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Operation Measurements For an interferometer setup to measure distances along the X axis measurements of displacement pitch and yaw are derived as described below These computations are done via software on the system controller or computer Displacement For the Agilent 10737L R interferometer displacement along the X axis can be measured as the average of the data returned from measurement axis 1 and measurement axis 2 measurement axis 1 measurement axis 2 Displacement 3 Pitch For Agilent 10737L R interferometer pitch rotation about the Y axis can be measured using data returned from all three measurement axes and the vertical offset between the common centerline of measurement axes 1 and 2 and the centerline of measurement axis 3 7 19 mm or 0 283 inch Displacement measurement axis 3 Pitch
14. The tools shown in Figure 307 contained in the kit are Agilent N1206A Ball Adjustment Lever long 176 mm Agilent N1206B Adjustment Lever Adapter Agilent N1206F Ball Adjustment Lever short 123 mm Agilent N1206G Ball Adjustment Lever bent 173 mm with 45 angle A Agilent 206 238 Agilent N1206B 222 Agilent 206 235 Agilent N12066 Figure 307 Agilent N1206T Adjustment Tool Kit Customer supplied hardware A 5 mm Hex key customer supplied is needed to adjust the Agilent N1203C Precision Beam Translator Bender from the top or bottom depending on how the translator is mounted 762 Laser and Optics User s Manual Vol 1 Accessories 36 Agilent 10884B Power Supply The Agilent 10884B Power Supply converts ac power into 15 V to power a single Agilent laser head and the multiple Agilent receivers that make up the Agilent laser transducer or laser calibrator system The Agilent 10884B can be used with the following products Agilent 5517A B BL C DL FL laser heads Agilent 10780C F receivers E1708A and E1709A remote receivers Agilent 10881A B C or N1251B laser head cable Agilent 10881A B C or N1251B laser head cables The 10884B was designed to be used with 10881A B C or N1251B laser head cables These cables connect the power supply to the rear panel connector of an Agilent laser head and also connect the reference frequency from the laser
15. y Ed i a o9 3 o 2 REFERENCE PATH fp High Reflector Quarter wave a fg P mmm he L V I Agilent 10706 High Stability Plane Mirror Interferometer Ed z Au o9 3 o 2 COMPOSITE fA and fp High Reflector Quarter wave Plates i fat Af fA fa fg gt _ gt V fA 2Af fg M fa 24f fat lt X lt lt y tpl 2 I tas at Agilent 10706B High Stability Plane Mirror Interferometer S a o9 3 5 LEGEND A m um um um pa ig lt gt faand fg f r Rounded corners are used to help you trace paths Figure 134 Agilent 10706B High Stability Plane Mirror Interferometer optical schematic 448 Laser and Optics User s Manual Vol II Agilent 10706B High Stability Plane Mirror Interferometer 21 Special Considerations Mounting See the Agilent 10706A Special Considerations information in Chapter 20 of this manual Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking the Agilent 10706B interferometer in position Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its centerline simplifying installation Fasteners The Agilent 10706B interferometer is supplied with English mount
16. The Agilent 5519A and 5519B laser heads which are a component of the Agilent 5529A 55292A Dynamic Calibrator system has a built in receiver This chapter includes a brief description of that receiver However the installation and alignment of that receiver occurs as part of the Agilent 5519A B Laser Head installation and alignment procedures given in the Agilent 5519A Laser Head Service Manual Receiver specifications are given later in this chapter Comparison of Agilent Laser Receiver Families 688 Table 77 summarizes the features characteristics and specifications the Agilent 10780C F Agilent E1708A and Agilent E1709A receivers The Agilent E1708A receiver is functionally similar to the Agilent 10780F receiver However the E1708A is not a direct replacement for 10780F Comparisons of the two laser receiver families are provided in Table 13 Laser and Optics User s Manual Vol Il Table 77 Comparison of Agilent Laser Receiver families Characteristic Dynamic Range E1709A Receiver 25 1 to 6 1 depending on the AC DC ratio E1708A Receiver 10 1 35 Receivers 10780C 10780F Receivers Not specified Sensitivity 20 80 pW depending on the AC DC ratio with 2 meter plastic cable 2 2 uW E1708A with 2 meter fiber optic cable 5 uW E1708A with 10 meter fiber optic cable 1 5 uW 10780C 2 2 uW 10780F with 2 meter fiber optic cable 5 pW 10780F with 10 meter fiber optic cable Align
17. 10885A 10895A or X256 resolution extension electronics 10897C 108984 2Linear range here is the sum of the ranges for all axes Angular range is the maximum measurement mirror angle due to all components i e yaw and pitch or yaw and roll between the measurement mirror and the interferometer for a 6 axis system Range will be reduced when the reference mirror is misaligned Laser and Optics User s Manual Vol II 529 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 63 5 mm 2 500 Recommended Minimum INT 10707A BEAM enm a BENDER pearsa 2 1 Fiber Mirrors ase AER Optic gt 35 56 mm anima mS gt 43 18 mm 1 70 gt 25 40 mm 1 00 lt gt 12 70 mm 0 500 lt Two beams to 60 33 mm reference mirror 2 375 e t Two beams to measurement mirror 31 75 mm 1 250 E Y b 12 70 mm Input or output Output or Input 0 500 Aperture Aperture 12 70 mm for 3 mm beam 0 500 REAR VIEW FRONT VIEW Fiber optic pd sensor head mounting pins Four mounting holes Na m lt 9 53 mm on top and bottom 0 375 surfaces 6 32 41 28 mm 8 0 mm 0 31 deep 1 63 Figure 176 Agilent 10719A One Axis Differential Interferometer dimensions 530 Laser and Optics User s Manual Vol
18. 32 Agilent E1827A Two Axis Vertical Beam Interferometer Description NOTE See Chapter 6 NGI Measurement Optics General Information in Volume of this manual for general description and alignment and mounting procedures 650 The Agilent E1827A Two Axis Interferometer is described in this chapter The interferometer uses the compact monolithic interferometer MIF design The outputs of the interferometer are coupled to a 400 micron fiber with an ST connector and NA of 0 39 The Agilent E1827A interferometer see figures 232 and 233 produces a two axis set of beams used for measurements of translation along or rotation around an axis of motion The Agilent E1827A interferometer can be mounted using three screws in either the upright or hanging position Figure 232 Agilent E1827A Two Axis Interferometer Laser and Optics User s Manual Vol Il Agilent E1827A Two Axis Vertical Beam Interferometer 32 Figure 233 Agilent E1827A Two Axis Beam Interferometer beams shown Laser and Optics User s Manual Vol II 651 32 Agilent E1827A Two Axis Vertical Beam Interferometer Agilent E1827A Beam Pattern Spacing and Labels Figure 234 shows the beam pattern and spacing of the Agilent E1827A interferometer viewing from the stage to the interferometer position Primary Beam Secondary Beam _ Axis 2 Axis 1 C 4 30 19 13 13 Figure 234 Agilent E1827A beam
19. 658 E1837A Three Axis Vertical Beam Interferometer specifications 661 E1847A Laser Head Cable 744 E1848A Laser Head Cable 745 E1848B Laser Head Cable 746 Laser and Optics User s Manual Vol II F f1 frequency 1 334 336 f2 frequency 2 334 336 feet of beam manipulator 380 fiber optic cables 734 fiber optic cable 705 fiber optic cable considerations 709 fiber optic cable E1705A 719 five axis interferometer Z4421B 676 five axis interferometers 74420 676 fixed mounting platform 523 footspacing kit 10759A Footspacing Kit 749 frequency f1 336 frequency f2 336 frequency reference 334 336 frequency split 336 G general purpose applications 396 Gunsight method of alignment 627 H height adjuster and post 727 high resolution interferomenter 10716A 482 high stability adapter 10723A 424 Agilent 10723A High Stability Adapter 442 high stability plane mirror interferometer 446 indicators 5517A Laser Head 341 5517B BL C D DL Laser Head 346 input and output ports optical 380 inteferometer 10706B High Stability Plane Mirror 446 interfereometer 10735A Three Axis 556 interferometer 397 10702A Linear Interferometer 396 10705A Single Beam 414 10706A Plane Mirror 424 10706B Plane Mirror 464 10712A Two Axis Differential 534 10715A Differential 466 10716A High Resolution 482 494 10716A 001 Turned Configuration 494 10719A One Axis Differential 510 Index 10719
20. A5 Pitch and yaw the interferometer until the voltmeter reading which may be fluctuating is maximum Carefully readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded This aligns the laser beam to within 1 2 arc minutes of the direction of travel resulting in a cosine error of approximately 0 05 ppm 0 05 micron per meter of travel or 0 05 microinch per inch 25 Fasten the interferometer X axis securely making sure the alignment is not disturbed 26 Remove the alignment aid Agilent Part Number 10706 60001 from the interferometer Also remove the plane mirror converter from the interferometer Switch to the small aperture on the laser head Block the measurement beam by placing something between the interferometer and the measurement mirror Insert Agilent 10706B alignment aid Agilent Part Number 10706 60202 between the beam splitter and the high stability adapter as shown in Figure 137 This allows the reference beam to be autoreflected from the high stability adapter back toward the small aperture of the laser head 2 2 co Observe the reflection of the reference beam back at the laser head Adjust two of the four adjustment screws until th
21. As in the earlier three axis system the first three degrees of motion are column referenced and the yaw measurement is electronically subtracted Pitch and roll are measured by adding two more Agilent 10719A interferometers to the three axis setup Inverting the Agilent 10719A interferometers so the measurement beams and the reference beams both reflect off the stage mirror creates an optically subtracted angle measurement Inverting the Agilent 10719A interferometers instead of just shifting them vertically keeps the input beams for all interferometers in the same plane which significantly simplifies installation and alignment However this also causes the inverted interferometers to be mounted with a 3 18 mm 0 125 inch offset relative to the non inverted ones as described in Figure 173 Optical schematic Figure 174 shows the optical schematic of the Agilent 10719A One Axis Differential Interferometer After entering the input aperture the laser beam is split into its separate components The measurement beam continues straight through the interferometer to the measurement mirror The reference path includes two 90 degree bends causing the reference beam to be parallel to the measurement beam but offset from it by 19 05 mm 0 750 inch for the standard10719A or 30 6 mm 1 025 inches for the 10719A C02 To reduce thermal drift errors the measurement and reference beam paths have the same optical path length in glass This reduces
22. M5 x 0 8 Socket Head Captive Optical Efficiency input Screw SHCS power axis output power 0 02 mm Typical for Axis 3 13 0 4 um Worst Case for Axis 3 10 9 mm maximum visible Typical for all axes except 18 Axis 3 Worst Case for all axes 13 except Axis 3 A4 Operating Temperature Range 19 to 26 C 0 62 nm using 256 x Measurement and Reference resolution extension Mirror Recommendations 0 15 nm using 1024 x Reflectivity gt 92 resolution extension Flatness 20 1 Interferometer allows 7 5 mm 1 2 2 Linear and angular resolutions dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A 3 See Measure Point Tolerance in Chapter 6 in Volume of this manual for a description of these tolerances 4 Beam Parallelism is specified between primary beams See Figure 249 Laser and Optics User s Manual Vol II 671 33 Agilent E1837A Z4399A and 24422B Three Axis Interferometers Input Beam Primary Beam To Secondary Beam Screw Figure 250 Agilent 24422 Three Axis Interferometer dimen
23. Special Considerations 589 Mounting 592 Installation and Alignment 593 Procedure 596 Operation 603 Specifications and Characteristics 604 RE Agilent Technologies 581 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description 582 Statements In this chapter refer to either or both of the Agilent 10737L and Agilent 10737R interferometers The Agilent 10737L R Compact Three Axis interferometers see figures Figure 194 through Figure 196 allow up to three measurements displacement pitch and yaw to be made on a single axis The Agilent 10737L and Agilent 10737R interferometers are identical except that the L bends the measurement beams to the left and the R bends the beams to the right as viewed from the incoming beam see figures Figure 195 and Figure 196 These interferometers are designed to use a 3 mm diameter laser beam available from an Agilent 5517C 003 Laser Head The measurement beam parallelism inherent in the design of the Agilent 10737L R interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy for pitch and yaw measurements These interferometers are designed for direct attachment of Agilent 10780F 037 Remote Receiver s fiber optic sensor head one per axis The Agilent 10780F 037 receiver is the same as the standard receiver except it does not include the lens assembly that attaches to some
24. The manipulators are already clamped Thermal The Agilent N1203C N1204C and N1207C beam manipulators exhibit improved thermal stability since all components of the manipulator are of the same material and the ball is suspended symmetrically in a spring nest The symmetry of this design enables the contact points between the ball and the springs to remain precisely the same as the temperature changes Hence as the temperature changes there is no rotation imparted to the ball Mechanical The beam manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of up to 20 C Thus there will be no unrecoverable beam displacement due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 6 to 21 8 x 10 C provided the feet are secured with the specified bolt torque value see the specifications and characteristic sections for the beam manipulators at the end of this chapter Optical Input Output ports and adjustment access The Agilent N1203C N1204C and N1207C manipulators have six input and output I O ports There is only one mounting face From this one mounting either horizontal or vertical bends in any direction may be accomplished Adjustment tools may be attached at any of ten access ports allowing two of the I O ports for entrance and exit of the la
25. Typical Power Requirements 15 volts 1V at 267 mA maximum Heat Dissipation 4 0 W typical for receiver 0 0 W for remote sensor Temperature Range 0 40 C operating Warm up Time 45 minutes typical for still air 15 minutes typical for 60 m min 200 ft min moving air Recommended Electrical Cables for Agilent 10885A 10889B Optical Input Dynamic Range ratio 25 1 to 6 1 depending on the AC DC ratio Maximum input 50 uW ac 150 uW dc Output Signal Differential square wave at Doppler shifted split frequency 100 kHz to 15 5 MHz Slew rates to 1 m s with plane mirror optics 2 m s with linear optics Fixed Data Delay 33 2 ns typical Fixed Delay Temperature Coefficient 0 015 ns C Fiber Optic Cable Type 2 m plastic Remote Sensor Alignment Tolerance Roll 3 Pitch 1 Yaw 1 Errors due to Doppler frequency variations and amplitude variations within the Dynamic Range ratio specification 1 2 nm for linear optics 0 6 nm plane mirror optics 0 3 nm for high resolution optics For overdrive condition errors are two times these values Signal Strength Voltage 0 10 volts proportional to ac optical input signal Alignment and Sensitivity see table below 10896B 10897C 10898A or N1231A B axis board Agilent N1250A High Performance Receiver Cable 5 m Agilent N1250B High Performance Receiver Cable 10 m Agilent N1251A Matching High Performance Laser Head Cable 3 m Agilent N
26. Weight 1 4 grams 0 05 ounce Nodal Point Depth 6 33 mm 0 248 inch 0 25 12 70 go 9 mm 0 010 _ 0 500 9 999 P a 11 43 mm 0 450 Dia min Clear Aperture lt gt 9 537 000 0 000 0 375 9 020 Figure 117 Agilent 10713C 1 2 Inch Cube Corner no housing dimensions Laser and Optics User s Manual Vol II 421 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Agilent 10713D 1 4 Inch Cube Corner Specifications Dimensions see figure below Weight 0 2 grams 0 007 ounce Nodal Point Depth 3 14 mm 0 123 inch Angular Deviation 2 inches arc second 6 35 0 2 mm Dia 0 250 0 008 in Dia 5 71 mm 0 225 Dia min Clear Aperture lt gt 4 75 0 25 mm 0 187 0 010 Figure 118 Agilent 10713D Cube Corner no housing dimensions 422 Laser and Optics User s Manual Vol Il Agilent Laser and Optics User s Manual Volume ll 20 Agilent 10706A Plane Mirror Interferometer Description 424 Special Considerations 428 Mounting 430 Installation 431 Alignment 432 Specifications and Characteristics 438 Converting to High Stability Plane Mirror Interferometer 442 RE Agilent Technologies 423 20 Agilent 10706A Plane Mirror Interferometer Description This chapter describes the Agilent 10706A Plane Mirror Interferometer the Agilent 10723A High Stability Adapter The Agilent 10706A Plane Mirror Interferometer can be used with a plane mir
27. mounting surface and further compress the springs 6 Adjust the mirror in the pitch and yaw planes until it is perpendicular to the machine axis of travel by unscrewing the 2 56 cap screws An auto collimator or pre aligned laser beam may be used for this purpose 7 Again confirm that the springs have not been compressed solid by passing a piece of paper about 0 001 inch thickness through the coils Agilent 10724A Plane Mirror Reflector Specifications Dimensions see figure below Weight 50 grams 1 8 ounces Housing Material 416 Stainless Steel Reflectivity 98 at 633 nanometers at normal incidence Flatness A 10 at 633 nanometers Installed Angular Adjustment Range Pitch Yaw 1 Configurations 20 066 mm 0 790 2 x 3 556 mm Dia Thru gt lt 3 810 mm 0 140 0 150 3 x 2 56 NC Class 3 Thru 12 0 Apart 42 164 mm Dia 28 388 mm Dia 1 660 1 118 AA Yo 32 766 mm Dia 28 36 068 mm Dia 1 290 1 420 22 860 Aperture Dia 0 900 Figure 297 Agilent 10724A Plane Mirror dimensions Laser and Optics User s Manual Vol II 753 36 Accessories Agilent 10728A Plane Mirror This mirror is intended for use in a laser measurement system that uses a 9 mm nominal diameter or smaller laser beam The 9 mm beam diameter requires use of this mirror rather than a mirror that can only handle a beam up to 6 mm in diameter A typical use of the Agilent 10728A Plane Mirror woul
28. the Agilent 10719A interferometer will be oriented upright that is with its top and bottom mounting surfaces horizontal In this orientation the internal polarizing beam splitter will send the vertical polarization into the measurement beam path and the horizontal polarization into the reference beam path As mentioned in Chapter 16 Laser Heads of this manual the Agilent 5517C 003 Laser Head produces f its lower frequency with horizontal polarization and f its higher frequency with vertical polarization Thus an Agilent 5517C 003 with its mounting plane horizontal will direct fi into the reference path and f into the measurement path This configuration will result in the fringe counts DECREASING when the measurement mirror moves AWAY from the interferometer The direction sense will change sign for any configuration which rotates either the laser head or the interferometer by 90 degrees The configuration of the beam directing optics between the laser head and the interferometer may effectively rotate the laser beam changing which laser frequency polarization is in which interferometer path and thus the direction sense of the interferometer Air Deadpath The air deadpath is defined as the difference between the reference and measurement air paths when the stage is at its zero position This difference must be compensated in most applications For the Agilent 10719A interferometer zero deadpath the conditio
29. the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897B and 10898 is usually available Fundamental Optical Resolution A 2 316 5 nm 12 5 pin System Resolution 1 see NOTE A 64 10 0 nm 0 4 pin System Resolution 2 see NOTE A 512 1 2 nm 0 047 pin Agilent 10766A 406 2 316 5 nm 12 5 pin A 64 10 0 nm 0 4 pin A 512 1 2 nm 0 047 pin The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on using 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics Laser and Optics User s Manual Vol Il Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Agilent 10702A Linear Interferometer Specifications Dimensions see figure below Weight 232 grams 8 2 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Maximum Angular Beam Deviation 30 arc minutes Optical Efficiency including Agilent 10703A Reflector Typical 75 Worst Case 71 Fundamental Optical Resolution 2 Non linearity Error 4 2 nm 0 17 yi
30. 0 88 mrad 3 arc min 0 44 mrad 1 5 arc min Parallelism Input to output beams 0 1 mrad 20 arc sec Optical Efficiency output beam input beam Average 60 Worst Case 40 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation requires a referenced surface Receivers Agilent 10780F fiber optic remote receivers or Agilent 10780C receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE Plane MIRROR RECOMMENDATIONS Reflectance 98 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from A 4 to 20 0 16 to 0 03 umeters 6 to 1 2 uinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mirror mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics
31. 0 mm Accessories 36 4 m 20 mm 0 mm 5 m 20 mm 0 mm 6 m 20 mm 0 mm 7 m 20 mm 8 m 20 mm 0 mm 9 m 100 mm 0 mm 10 m 100 mm 0 mm Laser head cables for power only Table 84 lists the laser head cables with no reference leg that carry power only The are available under the part numbers listed in the table The cables are shown in figures 290 through 293 Table 84 Power only laser head cables Part Number Description E1847A 060 Laser Head Power only cable 3 m 0 15 0 m 6 spade lugs E1847A 140 Laser Head Power only cable 7 m 0 15 0 6 spade lugs E1847A 200 Laser Head Power only cable 10 m 0 15 m 0 m 6 spade lugs E1847A 300 Laser Head Power only cable 1b m 0 25 m 0 m 6 spade lugs E1847A 400 Laser Head Power only cable 20 m 0 25 m 0 m 6 spade lugs E1848A 300 Laser Head Power only cable 15 m 0 1 0 m male DIN connector E1848B 060 Laser Head Power only cable connector 3m 0 15 m 0 m female DIN E1848B 140 Laser Head Power only cable connector 7 m 0 15 0 m female DIN E1848B 200 Laser Head Power only cable connector 10 m 0 1 5m 0 m female DIN E1848B 300 Laser Head Power only cable 15 m 0 25 m 0 m female DIN connector E1848B 400 Laser and Optics User s Manual Vol II La
32. 1 575 in high 108 0 mm 4 250 in wide centered on receiver body centerline 2 holes 107 8 mm 4 25 in apart on receiver centerline For ac input signal power E1708A 200 uW E1709A 50 uW 690 Laser and Optics User s Manual Vol Il Receivers 35 Agilent 10780C and Agilent 10780F Receivers Description General The Agilent 10780C Receiver or Agilent 10780F Remote Receiver converts the Doppler shifted laser light from an interferometer or the wavelength tracker into electrical signals that can be processed by the rest of the laser system Lens and polarizer Light enters either receiver through a lens and polarizer The Agilent 10780C lens and polarizer are built into the same assembly that houses the receiver electronics see Figure 262 Agilent 10780C receiver s lens focuses the laser light onto a silicon PIN photodiode Between the lens and the diode is a small piece of polarizing material oriented at 45 to the horizontal and vertical axes of the receiver The Agilent 10780F Remote Receiver s lens and polarizer are contained in a small assembly that is connected to the electronics housing by a fiber optic cable see Figure 262 The fiber optic cable allows the receiver module to be mounted away from the measurement area removing a source of heat The interference signal between the f1 and 2 polarizations is sent through the fiber optic cable to the electronics housing The Agilent 10780F receiv
33. 192 Agilent 10736A Three Axis Interferometer dimensions Laser and Optics User s Manual Vol II 579 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 203 50 mm c 8 01 68 72 mm 13 11 mm 0 51 2 70 190 0 mm 7 48 0 P 5 0 mm 0 19 0 19 Zomm 27 02 mm 0 27 1 06 40mm 13 91 mm 0 15 0 54 8 0 mm 0 31 A 11 7 mm es mm m 0 46 S148 mm 1 74 28 6 mm 1 22 63 96 mm 29 0 mm 1 12 2 51 r 36 0 mm 1 14 26 0 mm 1 41 Laser Beam gt 1 02 gt F o 50mm 0 59 O a h NU RK T B 4 A Y H o o W O 105 0 88 5 Y amp 4 13 3 48 9 i im Y E n Y e 2X 11 0 mm gt L enna P 11 0 mm 26 0 mm 0 43 0 228 0 43 179 mm 31 25 mm lt 7 04 3 lt Q6 Bottom View This surface is recessed from Datum A by 0 5 mm 0 02 Figure 193 Agilent 10736A Three Axis Interferometer with Beam Bender dimensions 580 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Description 582
34. 552 RE Agilent Technologies 533 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Description 534 General The Agilent 10721A Two Axis Differential Interferometer see Figure 178 is a plane mirror type of interferometer similar to the Agilent 10719A One Axis Differential Interferometer described in Chapter 25 except that it provides an additional measurement axis The Agilent 10721A Two Axis Differential Interferometer is intended for making differential linear and angular measurements simultaneously between two separate plane mirrors The Agilent 10721A interferometer makes two simultaneous adjacent parallel linear measurements spaced 12 7 mm 0 500 inch apart The parallelism between the two measurements is guaranteed by the internal optics and eliminates the parallelism adjustment required when separate linear interferometers are used for measuring angle An Agilent 10721A interferometer angle measurement is implemented in software via electronic subtraction The concept of electronic subtraction and a method to calibrate the angle measurement with high accuracy are described in Chapter 4 System Installation and Alignment in Volume I of this manual The Agilent 10721A interferometer is designed to use a 3 mm diameter laser beam available from an Agilent 5517C 003 Laser Head This beam is smaller than the standard 6 mm beam and allows the measurement plane center of the beam to be closer t
35. 558 Laser and Optics User s Manual Vol II Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 AGILENT 10736A 001 THREE AXIS INTERFEROMETER To Measurement Mirror See View A Axis zi Not Used Input for all Axes Axis 3 Do not loosen Output these or any screws Axis 2 Axis 1 Output Output E lE Axis 1 Axis 2 Bent Axis View A View B INPUT FACE MEASUREMENT FACE Figure 186 Agilent 10736A 001 Three Axis Interferometer Applications General The Agilent 10735A or Agilent 10736A interferometer by making three simultaneous distance measurements along or parallel to the X axis can make these measurements displacement along the X axis rotation pitch about the Y axis rotation yaw about the Z axis Because it has only two parallel measurement axes the Agilent 10736A 001 can make the displacement measurement and one angular measurement Laser and Optics User s Manual Vol II 559 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers MEASUREMENT USING AGILENT 10735A AND AGILENT 10736A 001 INTERFEROMETERS Laser Head Directing Optics Agilent 10735A Fiber Optics Three Axis Receivers P d Interferometer Agilent 10736A 001 E lt Three Axis Interferometer To Plane Mirror Auxiliary Measurement Multiaxis Stage To Fiber Optics Receiv
36. 60001 10706 60202 Supplied with the Agilent 10737L R Interferometer See Figure 200 for illustration Supplied with the Agilent 10737L R Interferometer See Figure 200 for illustration Laser and Optics User s Manual Vol Il Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 a couple more figure references gt 195 there s another one on page 593 303 of 478 pdf gt 199 Alignment aid Agilent Part Number 10706 60001 is the same as one used on the Agilent 10706B Plane Mirror Interferometer Refer to the Alignment aids section for the Agilent 10706B Plane Mirror Interferometer in Chapter 21 of this manual for a further discussion of its use Alignment aid Agilent Part Number 10706 60202 shown in Figure 200 facilitates autoreflection alignment for the high stability adapter to achieve minimal thermal drift It contains a quarter wave plate which allows the reference beam to return to the laser head without offset Figure 203 illustrates how the aid is positioned between the beam splitter and the high stability adapter during alignment m 4 Alignment Aid Insert between Beam Splitter and High Stability reflector during autoreflection _ Segoe TARGET i Agilent AFTER ALIGNING Agilent Technologies P N 10706 60202 Alignment Aid Alignment Aid P N 10706 60001 P N 10706 60202 Figure 200 Agilent 10737L R interferometers alignment aids Lase
37. AC Light Power beam overlap of 50 Only the overlapping portion of the beam 4 J3 and J2 4 Reference Beam 5 5 Remote Sensor Clear Aperture Figure 273 AC DC light power relationship DC Light Power In the Agilent laser measurement system the receiver captures the light power intensity from the two beams the Measurement Beam and the Reference Beam which are at slightly different frequencies The sum of the light power in each beam is the dc component of the light power assuming both beams are within the sensor clear aperture area For the Agilent E1708A the dc portion of the laser beam has little impact on the specification However with the Agilent E1709A the amplitude of the dc light signal directly affects the receiver sensitivity Therefore it is important to measure both the ac and the dc components at the First Stage Output Laser and Optics User s Manual Vol II 715 35 Receivers 716 AC Light Power When the two beams overlap this produces a difference frequency split frequency which is detected by the receiver as the ac component of the light power It is the ac light power that is converted to an electrical signal which becomes the measurement frequency AC DC Ratio This is the proportion of ac light power to the total dc light power For example Figure 273 shows the AC DC ratio as approximately 50 The importance of the AC DC ratio is discussed in detail in Chapter 3 of the Agilent E1709A Remote High Perfor
38. Agilent 5517A B BL C D DL FL Laser Head to an Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board It has a DIN connector for connecting the laser head to the Agilent 10884B Power Supply Figure 285 Agilent 10881A B C Laser Head Cable Laser and Optics User s Manual Vol II 739 36 Accessories 740 Agilent 10881D E F Laser Head Cable The Agilent 10881D E F Laser Head Cable shown in Figure 286 is used to connect an Agilent 5517A B BL C D DL FL Laser Head to an Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board It has spade lugs for connecting the laser head to a customer supplied power supply Figure 286 Agilent 10881D E F Laser Head Cable Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10882A B C Laser Head Cable Agilent 10882A B C Laser Head Cable shown in Figure 287 is used to connect the Agilent 5519A B Laser Head to the Agilent 10887P Programmable PC Calibrator Board Figure 287 Agilent 10882A B C Laser Head Cable Laser and Optics User s Manual Vol II 741 36 Accessories
39. Agilent 5517FL Laser Head 10881 N1251 Agilent 5519A Laser Head 108822 Agilent 5519B Laser Head 108822 Agilent 10780C Receiver 10880 1250 Agilent 10780F Remote Receiver 10880 1250 Agilent E1708A Remote Dynamic Receiver 10880 1250 Agilent E1709A Remote High Performance Receiver 10880 1250 These axis boards do not have sufficient bandwidth to work with these laser heads Do not use them together in a system Specific options must be ordered for these cables to get the correct connectors and cable configuration for proper system interconnect Contact Agilent for configuration assistance 732 Laser and Optics User s Manual Vol 1 Table 82 Cables 36 Accessories Receiver Cable connects the measurement signal from the Agilent 10780C F Receiver to the Agilent 10895A VME Axis Board one cable required per receiver Agilent 10790A 5 meters 16 4 feet Agilent 10790B 10 meters 32 8 feet Agilent 10790C 20 meters 65 6 feet Receiver Cable connects the measurement signal from the Agilent 10780C F Receiver to an Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A PCI Three Axis Board one required per receiver Agilent 10880A 5 meters 16 4 feet Agilent 10880B 10 meters 3
40. Axis Interferometers Installation Installation and alignment procedures for these interferometers do not involve adjusting or aligning the interferometer itself Instead the procedures adjust the beam coming into the interferometer Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Supply plane mirror reflectors See Chapter 12 Accuracy and Repeatability or Specifications and Characteristics section at the end of this chapter for mirror specifications Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in this manual Supply suitable mounting means for all components of the laser measurement system based on the recommendations given earlier in this chapter and elsewhere in this manual Provide for aligning the optics laser head and receiver s on the machine Ideally you want to be able to translate beam i
41. Begin by installing the laser head and the optics in their desired locations and roughly aligning the laser beam so it is centered on the input aperture of each interferometer Do not install the receivers yet If the interferometers are mounted on adjustable mounts instead of fixed platforms which predetermine their locations position them to within the translational and rotational tolerances described in the previous Mounting section This determines locations of the measurement points on the mirrors Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 3 With the interferometers and mirrors properly positioned finish the alignment by adjusting the input laser beam s angle and position for each interferometer individually a Adjust the angle of the input beam first using the autoreflection technique Start by selecting the small aperture on the front turret of the laser head Insert the alignment aid Agilent Part Number 10706 60202 into the measurement beam between the interferometer and the measurement mirror This may be held in position temporarily by affixing a piece of tape to its yellow label This will cause the beam reflecting off the mirror to reflect back out through the input aperture toward the laser head Angularly adjust the input beam using the beam directing optics or the laser head or both until the reflected beam re enters the small aper
42. Board for VMEbus with Agilent 10717A Wavelength Tracker Agilent 10897C High Resolution VMEbus Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board Agilent N1231A B PCI Three Axis Board Use one of these Receiver Cables 5 meters Agilent 10880A 10 meters Agilent 10880B For cable lengths longer than 10 meters use high performance cables Contact Agilent for information about high performance cables Use high performance cables b meters Agilent N1250A 10 meters Agilent N1250B Contact Agilent for additional information Description These cables have a 4 pin BNC connector on one end and a 4 pin LEMO connector on the other These cables have a 4 pin BNC connector on one end and a 4 pin LEMO connector on the other Use high performance cables for both the receiver and the laser head Agilent 10895A Laser Axis Board for VMEbus 5 meters Agilent 10790A 10 meters Agilent 10790B These cables have a 4 pin BNC connector on each end Each of these receivers has a polarizer as part of its input lens assembly The E1708A receiver s lens assembly is in the remote sensor assembly When mounting either receiver remember the following points For maximum input signal strength align the polarizer so its polarization vectors are the same as those of the incoming laser beam At a 45 degree roll position the signal goes to zero For either receiver body power diss
43. Design Considerations in Volume I of this manual Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in this manual Provide for aligning the optics laser head and receiver s on the machine Alignment targets To help in aligning the straightness interferometers the alignment targets shown in Figure 212 are included with each Alignment Target Alignment Target P N 10774 20021 P N 10774 67001 Figure 212 Alignment Targets for use with straightness interferometers General considerations 1 Choose the optical configuration carefully for best results The diagrams in figures 213 and 214 indicate which of the possible configurations are acceptable The diagrams in figures 215 and 216 also indicate system performance based on minimizing power returned to the laser head which can cause instability of the laser output and maximizing power returned to the receiver Laser and Optics User s Manual Vol II 621 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics SINGLE AXIS SYSTEM Straightness Reflector Agilent 10774A or Agilent 10775A Straightness Optics Straightness Interfe
44. Figure 239 shows the beam pattern and spacing of the Agilent E1837A interferometer viewing from the stage to the interferometer position Axis Axis Axis 3 1 2 y m it it t DE E uo oq jg N Y e T L po 15115 205 gt LC Figure 239 Agilent E1837A beam labels and relative positions 660 Laser and Optics User s Manual Vol II Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Agilent E1837A Three Axis Interferometer specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Resonance Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear Angular yaw or roll resolution 2 67 kg 5 93 Ibs See Figure 240 on page 662 See Figure 241 on page 663 Passivated 416 Stainless Steel 9 9 x 106 C BK 7 800 Hz M5 x 0 8 Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible A A 0 62 nm using 256 xresolution extension 0 15 nm using 1024 x resolution extension See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular Non linearity Error 2nm Output Efficiency input power axis output power Typical for all axes 18 Worst case for all axes 12 Meas
45. Figure 299 is a 100 reflectance mirror which turns the direction of an incoming laser beam 90 degrees It can be used in place of the Agilent 10707A Beam Bender if a larger aperture is needed such as for use with a 9 mm diameter laser beam The primary use of the Agilent 10772A Turning Mirror is in the laser calibration systems for machine tools The Agilent 10772A mounting screws have metric threads The same mirror is used in both the Agilent 10772A Turning Mirror and the Agilent 10773A Flatness Mirror only the mounting is different 10772 67001 10772 67002 Turning Mirror Assembly Mount Assembly Agilent 10772A Turning Mirror Figure 299 Agilent 10772A Turning Mirror Laser and Optics User s Manual Vol II 755 36 Accessories Agilent 10772A Turning Mirror Specifications Dimensions see figure below Weight 510 grams 18 ounce Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade 30 0 mm 40 0 mm 1 18 M3 x 0 5 1 57 fe 4 Places A Apeture Dia 40 0mm 30 0 mm oma 1 57 EH 2 Places lt 40 0 mm Captive Screw 1 57 2 Places Figure 300 Agilent 10772A Turning Mirror dimensions Agilent 10773A Flatness Mirror The Agilent 10773A Flatness Mirror see Figure 301 is a 100 reflectance mirror which turns the direction of an incoming laser beam 90 degrees The same mi
46. II Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 63 5 mm 2 500 Recommended Minimum 4 40707A BEAM S gt BENDER To Dee 1 Mirrors 35 56 mm R1 400 es Ha gt 43 18 mm Minimum 1 70 72 7 mm gt 25 40 mm z gt 1 00 2 860 57 15 mm a een 19 05 mm 0 500 0 750 Ref Two beams to 60 33 mm reference mirror 2 375 gt I 1Meas Two beams to measurement mirror 31 75 mm 1 250 Y 31 75 mm 12 70 mm Input or output J Output or Input 1 250 3 18 mm 0 500 Aperture Aperture 0 125 I i 12 70 mm for 3 mm beam 0 500 REAIEVIEN Y FRONT VIEW Fiber optic sensor head mounting pins Four mounting holes on top and bottom surfaces 6 32 8 0 mm 0 31 deep 1 63 Figure 177 Agilent 10719A C02 One Axis Differential Interferometer dimensions Laser and Optics User s Manual Vol II 531 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 532 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Description 534 Special Considerations 540 Mounting 545 Installation 547 Alignment 548 Operation 550 Agilent 10721A and 10721 01 Two Axis Differential Interferometer Specifications
47. Il Agilent 10716A High Resolution Interferometer 23 Agilent 10716A High Resolution Interferometer Figure 154 Agilent 10716A High Resolution Interferometer Laser and Optics User s Manual Vol II 483 23 Agilent 10716A High Resolution Interferometer MEASUREMENT PATH fA id Plates Mansuramant High Reflector al fat Af gt fat4Af fa 4Af fat3Af High Reflector Y P High Reflector Cube Corners fat3Af Agilent 10716A Top View REFERENCE PATH fp 4 Plates High Reflector T A Measurement I Y Mirror gt T pu om m m m m m m m m m mmm High Reflector Y a High Reflector Cube Corners Agilent 10716A Top View COMPOSITE fA and fp Plates Measurement Mirror lt _ gt fatAt ty Tat gaat nr ae fat At High Reflector Cube Corners Agilent 10716A Top View LEGEND lt gt fp mage m m pem 1 KS fa and fg f r Rounded corners are used to help you trace paths Figure 155 Agilent 10716A High Resolution Interferometer optical schematic 484 Laser and Optics User s Manual Vol II Agilent 10716A High Resolution Interferometer 23 Special Considerations Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking the Agilent 10716A interferometer in position Since the mount
48. Mirror Interferometer A 4 before electronic resolution extension The Agilent 10719A interferometer is designed to use a 3 mm diameter laser beam available from an Agilent 5517C 003 Laser Head This beam is smaller than the standard 6 mm beam and allows the measurement plane centerline of the beams to be closer to the upper edge of the X Y stage measurement mirror thereby reducing Abb offset The measurement and reference beam paths are parallel and are spaced 19 05 mm 0 750 inch apart The Agilent 10719A interferometer is designed primarily for use with the Agilent 10780F Remote Receiver which can be attached directly to the housing however any other Agilent receiver may be used The C02 special option Agilent 10719A C02 is designed to reduce the thermal drift coefficient A metal housing extension is added to the front of the interferometer to protect the optic This increases the length of the interferometer by 15 5 mm The thermal drift specification in the Agilent 10719 02 is reduced from 150 nm C to 50 nm C typical provided you compensate for the internal air dead path Internal air dead path for this interferometer is 30 6 mm 1 025 inches It may be compensated by either of the two methods described in Operation on page 528 of this chapter using 30 6 mm rather than the 19 05 mm for the standard Agilent 10719A interferometer Applications Differential measurements A differential measurement is
49. Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 POSITIONING OF REFLECTOR Dots located Over Scribed Center line Figure 218 Initial Positioning of Reflector This ends the Gunsight method alignment method Slope removal The slope should be removed as much as possible by readjusting the Straightness Reflector s mirror axis Slope removal is typically required only for the short range optics because long range alignment is normally more accurate Slope removal can be done by the following procedure 1 Reset the measurement reset the counter to zero with the optics at the near end of travel 2 Move the optics to the far end of travel and note the last data point see Figure 219 Laser and Optics User s Manual Vol II 629 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics SLOPE ERROR I Straightness Reflector s Mirror Axis Axis of Travel I l I I l I l o EE 47 M i 0 4 Spi x n X Seat True Distance of Out of Straightness b Data Points Figure 219 Slope Error 3 Adjust the reflector if using the straightness mount adjust the micrometer in the plane of the reflector s aperture slot to cause the straightness measurement to change to the following calculated value x r s d where x thenew value distance between optics at near
50. Receivers ptics PR Agilent 10737L Compact Three axis Interferometer To Fiber Optics Receivers 39 Agilent 10737R lt A Compact Three axis D G Interferometer Multiaxis Stage Figure 197 Measurement using two Agilent 10737R interferometers Optical Schematics Optical schematics for these interferometers are given in Figure 198 Each interferometer functions similarly to three parallel Agilent 10706B High Stability Plane Mirror interferometers with a three way beam splitter in front of them To reduce thermal drift errors the measurement and reference beam paths have the same optical path length in glass This minimizes measurement errors due to temperature changes in the interferometer Laser and Optics User s Manual Vol II 587 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers MEASUREMENT PATH fp Agilent 10737L and Agilent 10737R 1 4 Compact Three Axis Interferometers Y ds y Reference A A A Mirror a At 1 pig 2 leanne monium I 2 From aep 9 Axis 2 E g Y Laser a lt P i a mm 22 e 0 2 a Axis 3 a um um um um Eo I P 7 om m mumu maj I 2 A Axis 1 fg 2Af4 Axis 1 um um um um um 2 Axis 2 fpt2Af2 i J 225 Plate qoem mpm gt mpm mm Axis 3 fg 2A fa M og NOTE Because the Measu
51. Suspension The laser beam Manipulator comprises a very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in final assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the assembly is at 3 5 kHz which is the Ball itself The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Mirror Spring Suspension The Mirror is held against three mounting pads machined into the Ball by spring forces opposite the pads This spring mass system is not free to vibrate unless the Mirror is separated from the contact with pads It requires a shock load of 280 g far in excess of the shock damage threshold to separate the Mirror from the Ball Thus it is not possible in practice to excite a resonance Note The calculated resonance for the Mirror Spring system the ball were free to oscillate is 340 Hz Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignm
52. Then only the laser beam itself will need to be aligned to its proper position Adjustable Mount The adjustable mount approach is recommended when the mechanical tolerances within the application do not permit the use of a pre determined non adjustable platform Coarse adjustments may be provided in a variety of ways such as using slotted holes for the mounting screws For fine adjustments micro positioning stages are available from a variety of vendors When using adjustable mounts a key consideration is to ensure that the adjustment capability does not introduce creep or instability into the mounting system In some applications a combined approach may be best For example perhaps a platform having an accurate fixed height can be used in conjunction with an adjustment for yaw and side to side translation Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 Whatever approach is used the interferometer should always be held rigidly and stably once installed Installation Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application Li Receivers 1 Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Suppl
53. Travel Axis Figure 265 Effects of Angular Misalignment to the Direction of Travel The presence of measurement signal through the total length of travel does not guarantee that the measurement axis is aligned for minimum cosine error Also any angular misalignment of the laser beam to the direction of travel causes a decrease in the measurement signal strength Receiver alignment and gain adjustment procedure The procedures presented here are common to most of the alignment procedures or techniques presented in Chapter 4 System Installation and Alignment and Chapter 5 Measurement Optics General Information in Volume I of this manual Usually aligning the receiver and adjusting its gain will be done after all other optics alignment has been done 700 Laser and Optics User s Manual Vol II Receivers 35 To align and adjust the Agilent 10780C or Agilent 10780F receiver 1 Align the optics on the machine in the desired configuration See the alignment procedures or techniques applicable to the interferometer s or wavelength tracker installed in your system Use alignment targets alignment aids or both to establish proper beam spacing and positioning Run the system stage out to its limit such that the retroreflector or plane mirror for one axis is at its furthest position from the interferometer Mount the Agilent 10780C or Agilent 10780F receiver on that axis if this has not already been don
54. Yaw Calculation Method and Optical Yaw Calculation Method subsections under the Three axis measurement system using discrete plane mirror interferometers X Y YAW section in Chapter 3 System Design Considerations in Volume I of this manual Measurements possible using the Agilent 10721A interferometer are illustrated in Figure 179 Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 LINEAR ANGULAR MEASUREMENT WITH AGILENT 10721A REAR VIEW Figure 179 Agilent 10721A Two Axis Differential Interferometer measurements Laser and Optics User s Manual Vol II 537 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 538 Multiaxis configurations Refer to the Multiaxis Configurations subsection in the Agilent 10719A chapter Chapter 25 of this manual Optical schematic Figure 180 shows the optical schematic of the Agilent 10721A Two Axis Differential Interferometer After entering the input aperture the laser beam is split into two parallel beams 12 7 mm 0 500 inch apart Each of these beams is then split into its separate reference and measurement components Each of the two measurement beams continues straight through the interferometer to its measurement aperture Each reference path includes two 90 degree bends causing that reference beam to be parallel to its related measurement beam but off
55. a differential measurement configuration the reference cube corner can simply be detached from the interferometer housing and attached to the reference surface of interest This is shown in Figure 106 Be aware that all installation and alignment requirements for the measurement reflector now apply also to the reference reflector DIFFERENTIAL MEASUREMENT Reference Reflector r mn 1 see note 4 fat f f Either reflector or both may move B sy A B Ex R 12 Measurement Reflector fatAfy fgt fg fat Afa see note 4 lt lt Agilent 10702A Linear Interferometer LEGEND fA m Qm m m fg lt E fy and fg Figure 106 Differential measurements with the Agilent 10702A Laser and Optics User s Manual Vol Il Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Special Considerations Effect of optics on measurement direction sense The orientation and configuration of the interferometers affects the measurement direction sense The direction sense depends on which frequency is in the measurement path of the interferometer For example if f lower frequency is in the reference path and the optics are moving away from each other the fringe counts will be INCREASING This corresponds to using an Agilent 5517A or Agilent 5517B BL C D DL F Laser Head mounting feet
56. allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its centerline simplifying installation Fasteners The Agilent 10716A interferometer is supplied with English mounting hardware which is required to fasten it to its adjustable mount Installation Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability in Volume I of this manual complete the following items before installing a laser positioning system into any application L Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual You must supply the plane mirror reflectors if the Agilent 10724A Plane Mirror Reflector will not work for your installation See Chapter 12 Accuracy and Repeatability Chapter 17 Beam Directing Optics or Chapter 5 Measurement Optics General Information in Volume I of this manual for mirror specifications Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in Volume I of this manual Provide for aligning the
57. and Optics User s Manual Vol 11 Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Agilent E1837A glass dimensions A E lo gt N iii E B 29 5 44 5 C 59 5 Figure 241 Agilent E1837A glass dimensions Laser and Optics User s Manual Vol II 663 33 Agilent E1837A Z4399A and 24422B Three Axis Interferometers Agilent Z4399A Three Axis Interferometer The Agilent Z4399A Three Axis Interferometer see figures 242 and 243 has integral remote sensors with ST connectors eliminating the need to mount separate remote sensors Plastic or glass fiber optics with ST connectors are available Multiple fiber lengths are available contact Agilent for details Figure 242 Agilent 24399A Three Axis Interferometer Figure 243 Agilent 24399A Three Axis Interferometer beams shown 664 Laser and Optics User s Manual Vol Il Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Agilent 24399 beam pattern spacing and labels Figure 244 shows the beam pattern and spacing of the Agilent Z4399A interferometer viewing from the stage to the interferometer position Axis 2 Axis 1 33 30 8 I Axis 3 I 20 29 _ Figure 244 Agilent Z4399A beam labels and relative positions shown with datums Laser and Optics User s Manual Vol II 665 33 Agilent E1837A Z4399A and 24422B Th
58. aperture on the laser head 12 Insert the Alignment Aid Agilent Part Number 10706 60202 between the now exposed glass beam splitter and the reference reflector the one with the four adjustment cap screws and two springs See Figure 161 This will allow the reference beam to autoreflect back toward the small aperture on the laser head 13 Return light will now be visible from this reflector near the laser output aperture 14 Now adjust TWO of the small cap screws on the housing so that this return beam autoreflects back into the small output aperture of the laser 15 GENTLY snug the other two cap screws while observing the return beam on the output aperture Preserve the beam alignment 16 Remove the alignment aid Agilent Part Number 10706 20202 and replace the Plane Mirror Converter 17 Unblock the measurement beam 18 Verify autoreflection of the measurement beam by attaching the magnetic alignment aid to the output measurement side of the interferometer and observing the autoreflected beam on the laser aperture Remove the magnetic alignment aid 19 Verify that you now see four unclipped spots in a rectangular pattern on the face of the measurement plane mirror The room lights may have to be dimmed to see these weak spots of scattered light 20 Install the Agilent 10780C or Agilent 10780F Receiver so that light from the top aperture A aperture of the interferometer enters the center of the lens parallel to the
59. are far off from the desired location check for obstructions and recheck the alignment by performing steps 3 through 7 above Laser and Optics User s Manual Vol II 599 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Figure 202 Agilent 10737L Compact Three Axis Interferometer return beam pattern 12 Install the receiver assembly To do this reverse the Removing the receiver assembly procedure above 13 Plug in the fiber optic cables 14 Adjust each receiver s gain by turning its gain adjustment screw to cause the receiver s LED to light then reduce the gain until the LED just turns off For more information see Agilent 10780F instructions in Chapter 35 Receivers of this manual 600 Laser and Optics User s Manual Vol 11 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Aligning the reference beam path The measurement path must be aligned and the laser beam centered on the input aperture before aligning the reference mirror 1 Remove the receiver assembly and the plane mirror converter see figures 194 and 197 and set aside on a clean surface Do not touch any glass surface of any optic 10706 60202 Figure 203 Agilent 10737L Compact Three Axis Interferometer with 10706 60202 Alignment Aid 2 Install the reference mirror assembly see figures 194 and 197 The 4 40 screws on springs hold the mirror in place The four
60. as a support for the post Dimension drawings for these items are provided in Chapter 35 Receivers of this manual The Angular Interferometer s apertures are 18 0 mm in diameter With this aperture the beam spacing will be 11 0 mm This beam spacing 11 0 mm differs from that used for other interferometers This difference means that you cannot use the receiver s alignment aid to establish proper spacing between the receiver and the beam from the laser head to the interferometer Alignment target To help in aligning the Agilent 10770A Interferometer an alignment target Agilent Part Number 10767 67001 is included Alignment procedure There are two techniques for aligning the angular optics They are Autoreflection Method and Moving Dot Method 610 Laser and Optics User s Manual Vol Il Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector 29 Autoreflection Method The principal alignment procedure for the angular optics is the same as that for the linear interferometer and retroreflector The following is the step by step procedure that corresponds to the example in Chapter 4 System Installation and Alignment of this manual In this case however the angular optics instead of the linear interferometer and retroreflector will be used on the X axis 1 With all optical components in place visually align the laser beam parallel to the axis of travel Do this by blocking th
61. axis since this has no influence on the measurement 2 The recommended tolerances for locating along the Y axis and Z axis are 0 15 mm 0 006 inch Positional errors here will displace the effective measurement points on the mirrors by an equal amount Also mislocation can offset the beam centering in the input and output apertures 3 The recommended tolerances for pitch roll and yaw of the interferometer are 15 arc minutes each relative to the input beam Here again mislocation chiefly affects beam centering although gross errors in roll that is over 1 degree can start to induce non linearity error due to polarization mixing The primary reason for these tolerances is to control the measurement points on the mirrors and to ensure that the laser beams will reach the receivers properly aligned with no clipping or signal loss Small positional errors do not impair the measurement accuracy provided they are fixed and do not change during the measurement With these positional accuracy goals in mind there are two recommended approaches to designing the mounting system Create an accurate fixed mounting platform which predetermines the location of each interferometer using reference surfaces or Create an adjustable mount with adjustments to dial in the positional accuracy after each interferometer is installed Fixed Mounting Platform If you use the first approach the best design for a mounting platform is to
62. be changed because the measurement reference paths are exchanged Mounting Adjustable mounts Agilent 10710B Adjustable Mount provides a convenient means of mounting aligning and securely locking in position the Agilent 10705A interferometer Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized This mount allows the optic mounted on it to be rotated about its optical centerline simplifying installation Chapter 4 System Installation and Alignment in this manual shows how to install an optic in various orientations using an adjustable mount Fasteners The Agilent 10705A interferometer is designed to be used with an Agilent 10710B Adjustable Mount and is supplied with English mounting hardware Laser and Optics User s Manual Vol II 417 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Adapter plate Installation The Agilent 10705A 080 Adapter Plate adds an easy mounting surface to the interferometer for mounting the remote lens assemblies of the Agilent 10780F Agilent E1708A and Agilent E1709A remote receivers directly to the interferometer Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability in Volume I of this manual complete the following items before installing a laser positioning system into any application Complete Beam Path Loss Calculation see Calculatio
63. be mounted perpendicular to the laser beam This may be done by autoreflecting off the front face with a gage block Rotate the interferometer s bezel until the bezel s scribe line see Figure 217 is oriented perpendicular to the aperture slot on the Straightness reflector Two beams should now exit the interferometer in a plane perpendicular to the aperture slot on the reflector Laser and Optics User s Manual Vol II 627 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 628 AGILENT 10774A OR HP 10775A STRAIGHTNESS INTERFEROMETER LO Line Figure 217 Agilent 10774A or Agilent 10775A Interferometer scribe line 7 Position the reflector so that the two dots are located over the scribed center line of the reflector housing and the face is square relative to the incoming beam See Figure 217 8 Move the optics to their far end of travel 9 Realign the laser beam in this case by using the 33 beam splitter so that the two dots are located over the scribed center line of the reflector housing See Figure 218 Since the dots will move apart as the optics move you may have to hold a card on each side of the reflector s slot to follow their movement The beam splitter may need to be translated to re center the laser beam in the interferometer target The laser beam should now be aligned parallel to the axis of travel Laser and Optics User s Manual Vol II Agilent 10774A Short
64. beam is centered on the interferometer s input aperture 10 Lock down all beam benders beam splitters and the laser head 1 If finer alignment is required continue the alignment procedure as described below Otherwise the procedure ends here and you can remove the alignment target Finer alignment Perform the Initial angular alignment procedure above before you begin this procedure 1 Connect an Agilent 10780F Remote Receiver to the interferometer s measurement axis 1 output aperture 2 Connect a fast responding voltmeter preferably an analog type to the receiver s test point If necessary adjust the interferometer s input beam angle via beam bender or beam splitter manipulation until the voltmeter jumps to a value greater than 0 25 volt This indicates that a signal has been detected 3 Continue adjusting the interferometer s input beam to obtain a maximum voltage indication on the voltmeter The voltmeter reading may fluctuate 4 Carefully adjust the interferometer s input beam until the voltmeter indication suddenly drops back to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded 5 Remove the alignment aid from the interferometer This completes the interferometer input beam alignment procedure Las
65. centered vertically about the output beam Yaw the baseplate back and forth until the autoreflected beam is concentric with the laser head aperture 12 Tighten all three mounting screws alternately see Figure 167 until finger tight Now tighten the screws by applying a torque of 0 9 Newton meter 8 inch pounds Maintain proper autoreflection as the screws are tightened Correct for any change by readjusting the wavelength tracker in pitch and yaw until the laser beam is autoreflected back into the laser head This insures proper angular alignment Laser and Optics User s Manual Vol II 505 24 Agilent 10717A Wavelength Tracker INSTALLATION OF ALIGNMENT AID Laser Beam Alignment Aid Tightening the mounting screws unevenly or exceeding the specified torque specification will disrupt alignment and degrade overall system performance 13 Remove the alignment aid 14 Return the laser head turret to its larger aperture Two parallel unclipped beams should now exit the differential interferometer 15 Check for a circular unclipped laser beam As long as the two beams are not clipped the wavelength tracker alignment is adequate 16 Alignment of the receiver is accomplished by moving it or its sensor head from side to side and pitching and yawing it to center the beam on its lens Coarse beam alignment is performed using the snap on Alignment Target fixture Agilent Part Number 10780 40003 or Agilent Part
66. end of travel r S distance of moving optic at far end of travel and d old value read See Figure 220 for a representation of this Laser and Optics User s Manual Vol 11 630 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 MANUAL SLOPE REDUCTION Figure 220 Manual Slope Reduction 4 Reset the measurement again and return the optics to the near end of travel 5 Ifthe signal strength gets too low adjust the laser beam to achieve peak signal strength 6 Repeat steps a through e as often as necessary to make the straightness measurement at both ends of travel to be near zero The alignment procedure for the straightness optics is now complete Laser and Optics User s Manual Vol II 631 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Operation When taking straightness data there will still be some residual slope that has not been removed During data reduction the best fit straight line should be determined and the straightness errors recalculated based on that line Accuracy considerations There are several sources of error under the control of the operator The calibration factor on the interferometer must be used to
67. exists the beam overlap in the output aperture s will be degraded which may be visible You can check beam overlap qualitatively by alternately blocking the reference and measurement beams and observing their respective positions on the tape across the output aperture s Remove the tape when done If a beam overlap problem exists recheck the parallelism of the reference mirror relative to the measurement mirror Adjust as needed 5 Attach the Agilent 10780F receiver s fiber optic sensor heads using 4 40 screws Avoid kinking or excessive bending of the cable as explained under the Receivers subsection earlier in this chapter 6 Repeat the above steps for all other interferometers in the application being careful to adjust only beam directing optics which do not disturb the alignments already completed Laser and Optics User s Manual Vol II 527 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Operation 528 Reset considerations If the reflectors you use with the interferometer are not at their zero deadpath positions when you reset the system you should enter a zero deadpath compensation value as described in the Air Deadpath compensation considerations below Air Deadpath compensation considerations Proper use of deadpath compensation is essential to achieving maximum accuracy Air deadpath is defined as the difference in the air path length between the reference and meas
68. head to most Agilent laser axis boards See Figure 308 General information on laser head cables 10881A 3 m laser head cable 10881B 7 m laser head cable 10881C 20 m laser head cable N1251B 7 m high performance laser head cable Overall length is from the 18 pin laser head connector to the 4 pin LEMO axis card connector A different cable is required for operation with an Agilent 10887 A PC calibrator board Contact your Agilent representative for assistance with this application Laser and Optics User s Manual Vol II 763 36 Accessories Installation 764 Installing the 10884B and 10881A B C and N1251B 1 Connect the 18 pin connector cable on the 10881A B C or N1251B to the laser head 2 Connect the LEMO connector on the 10881A B C or N1251B to the reference connector on the laser axis board 3 Connect the DIN connector on the 10881A B C or N1251B to the end of the output cable of the 10884B 4 Connect all receivers to the axis boards 5 Connect any multi axis Interconnect cables between axis boards See the individual manuals for additional information 6 Connect the AC line cord to the input connector of the 10884B 7 Plugthe ac line cord into an operating AC line outlet The Agilent 10884B Power Supply has no power switch As soon as it is plugged in it will provide output power and the LED indicator will light Agilent 5517A B C D Note Laser Head An external Agilent 10780C F Receiver is required fo
69. in a resolution of 128 5 nanometers or 0 2 microinch with the plane mirror interferometer compared to 64 10 nanometers 0 4 microinch with the linear or single beam interferometers The Agilent 10706A interferometer can be converted to the Agilent 10706B high stability interferometer configuration by retrofitting the Agilent 10706A with an Agilent 10723A High Stability Adapter Information for the conversion is contained later in this chapter The Agilent 10706B interferometer is described in Chapter 21 of this manual Laser beam paths For purposes of this discussion the laser beam input is through the interferometer s Aperture B and the output to the receiver is through Aperture A see Figure 121 After entering Aperture B the beam from the laser head is split at the surface of a polarizing beam splitter One frequency fp enters the interferometer s reference path which directs it to the reference cube corner and then out to the receiver The second frequency enters the interferometer s measurement path This beam is transmitted out to the plane mirror reflector and is reflected back on itself Figure 121 The interferometer s quarter wave plate causes the polarization of the return frequency to be rotated through 90 so that f4 Af is reflected out a second time where it is Doppler shifted again The polarization of fa 2Af is rotated again through 90 so it is now transmitted back to the receiver Reso
70. in user designed mounts The user is responsible for devising a mounting method that does not cause stress in the optic which will result in distortion of the reflected laser wavefronts To preserve polarization see Preventing Depolarization on page 362 To preserve efficiency see Note on page 362 Laser and Optics User s Manual Vol II 375 17 Beam Directing Optics Agilent 10725B C Beam Splitter Specifications Use Split a laser beam having a diameter up to 9 mm nominal This beam splitter requires a user supplied mount This optic can be made vacuum compatible Type Non polarizing Dimensions See drawings below Weight 2 grams 0 07 ounce Materials Used Optic Fused silica Optical Efficiency 10725B Reflected Path Typical 4 worst case 3 Transmitted Path Typical 95 worst case 94 10725C Reflected Path Typical 15 worst case 9 Transmitted Path Typical 84 worst case 78 Beam Splitting Coating Incident Face gt lt 2 41 mm 19 3 mm Dia 09 0 76 Anti reflection Coating Transmitting Face Minimum Clear Aperture 16 50 mm 0 65 Concentric to O D Figure 93 Agilent 10725B C 9mm Laser Beam Splitter dimensions 376 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Agilent E1833C E G J M Bare Beam Splitter The Agilent E1833C E G J M are bare beam splitters that can be used for routing the laser beam throughout the laser interferom
71. interferometer and back to the small aperture of the laser head Once this autoreflection is achieved secure the interferometer while preserving the alignment For high accuracy alignment or for installations where there is less then 0 5 meter 20 inches between the laser and mirror perform steps 5 through 7 Remove the plane mirror interferometer alignment target and select the large aperture of the laser head Do not remove the plane mirror interferometer alignment aid on the output side of the plane mirror interferometer Center the output beams on the receiver aperture by moving the receiver side to side Translucent tape over the receiver aperture will help you observe when the beams are centered Connect a fast responding voltmeter preferably an analog type to the Y Axis receiver test point Pitch and yaw the interferometer until a signal is received This is indicated by the voltmeter suddenly jumping to a value greater than 0 25 volt This adjustment is a critical and may require great care to achieve the desired result Adjust the voltmeter reading which may be fluctuating for a maximum by pitching and yawing the interferometer Carefully readjust the interferometer until the voltage reading suddenly drops back to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage s
72. interferometer in the beam path between the laser head and the measurement mirror 3 Place the interferometer alignment target Agilent Part Number 10702 60001 on the laser input side of the interferometer Place the alignment aid Agilent Part Number 10706 60001 on the outside side of the Laser and Optics User s Manual Vol II 453 21 454 Agilent 10706B High Stability Plane Mirror Interferometer interferometer in the correct orientation the hole allows transmission of the primary measurement beam Select the small aperture on the front turret of the laser head Move the interferometer until the beam passes 1 through the center of one hole on the alignment target 2 through the hole on the alignment aid and 3 strikes the measurement mirror Use translucent tape over the target aperture to observe when the beam is centered If the distance between the laser head and the reflector is greater than 0 5 meter 20 inches the formula given in the Overlapping Dots Method Summary section of Chapter 4 in Volume determines the cosine error based on the offset of the return beam at the laser head For example with a distance between the laser head and reflector of 0 5 meter and an offset of the return beam at the small aperture of the laser of 500 microns 0 0202 inch the cosine error is approximately 0 12 ppm Pitch and yaw the laser beam until the beam reflected from the measurement mirror returns upon itself through
73. labels and relative positions 652 Laser and Optics User s Manual Vol 11 Agilent E1827A Two Axis Vertical Beam Interferometer 32 Agilent E1827A Two Axis Interferometer Specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Resonance Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear Angular yaw Measurement Optics this manual for expla 2 35 kg 5 22 Ibs See Figure 235 on page 654 See Figure 236 on page 655 Passivated 416 Stainless Steel 9 9 x 10 BK 7 AkHz M5 x 0 8 Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible A4 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension See NGI Angular Resolution section in Chapter 6 NGI General Information in Volume of nation of angular resolution Thermal Drift due to Glass Path lt 10nm C Imbalance Non linearity Error t1nm Output Efficiency Typical of all axes 26 Worst case for all axes 19 Measure Point Tolerance Mean 0 15 mm Deviation 0 05 mm Input Beam Cone Angle lt 1 mrad Beam Parallelism Figure 234 on page 652 Axis 1 Axis 2 25 urad Operating Temperature Range 19 to 26 C Measurement and Reference Mirror Recommendations Reflectivity 29296 Flatness A 20 Linear and ang
74. laser transducer measurement system applications Also the Agilent 10766A interferometer has metric dimensions and metric threads whereas the Agilent 10702A interferometer does not Similarly the Agilent 10767A Linear Retroreflector see Figure 103 is optically identical to the Agilent 10703A Retroreflector However in order to withstand the handling and repeated installations of calibrator type applications the Agilent 10767A retroreflector has a more robust housing than the Agilent 10703A retroreflector which is intended for laser transducer measurement system applications Also the Agilent 10767A interferometer has metric dimensions and metric threads whereas the Agilent 10703A interferometer does not The Agilent 10722A Plane Mirror Converter see Figure 104 is a quarter wave plate accessory for the Agilent 10702A interferometer With the Agilent 10722A converter and an additional Agilent 10703A Retroreflector the Agilent 10702A interferometer can be converted to an Agilent 10706A Plane Mirror Interferometer This configuration allows measurements of axial displacement of a plane mirror With the Agilent 10722A Plane Mirror Converter and the Agilent 10723A High Stability Adapter the Agilent 10702A Linear Interferometer can be converted to an Agilent 10706B High Stability Plane Mirror Interferometer This configuration also allows measurements of axial displacement of a plane mirror The Agilent 10723A adapter is discussed in Chapt
75. m if unplated OR Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Angular Adjustment Tool Leverage Lever rotatation ball rotation 2 9 1 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Unless otherwise specified dimensions are in millimeters mm Figure 96 Agilent N1203C N1204C N1207C beam manipulator dimensions Laser and Optics User s Manual Vol II 387 17 Beam Directing Optics Agilent N1208C D E F G Bare Beam Splitter 388 The Agilent N1208C D E F G are bare beam splitters that can be used for routing the laser beam throughout the laser interferometer system These splitters require user supplied mounts and can handle beam diameters up to 9 mm nominal The Agilent N1208C 33 Bare Beam Splitter nominally reflects one third or 33 of the laser beam intensity perpendicular to the original beam direction while the remaining two thirds continues through the optic The Agilent N1208D 40 Bare Beam Splitter nominally reflects 40 of the laser beam intensity perpendicular to the original beam direction while the remaining 60 continues through the optic The Agilent N1208E 50 Bare Beam Splitter nominally reflects 50 of the laser beam intensity perpendicular to the original beam direction while the remaining 50 continues through the optic The Agilent N1208F 66 Bare Beam
76. make it kinematic Kinematic means that all six degrees of freedom are singly and unambiguously restricted It is best to use a locating plane a locating line and a locating point The locating plane will be the surface to which the top or the bottom of the interferometer is bolted primary datum The locating line should be a 2 point contact or rail which aligns the front face of the interferometer secondary datum The locating point should be a 1 point contact or pad which constrains side to side translations of the interferometer tertiary datum To install the interferometer it should be firmly pressed against its locating datums while the mounting screws are torqued down If the platform is made with the above mentioned accuracy this mounting method can completely eliminate the need to adjust or align the interferometers during installation Then only the laser beam itself will need to be aligned to its proper position Laser and Optics User s Manual Vol II 523 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Installation Adjustable Mount The adjustable mount approach is recommended when the mechanical tolerances within the application do not permit the use of a predetermined non adjustable platform Coarse adjustments may be provided in a variety of ways such as using slotted holes for the mounting screws For fine adjustments micro positioning stages are available from a variety of vendors W
77. measurement errors due to temperature changes in the interferometer Laser and Optics User s Manual Vol II 515 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers FIVE AXIS SYSTEM CONFIGURATION Agilent 10721A Fiber Optic Cables Two Axis Differential Interferometer to Recei B troni LINEAR and YAW MEASUREMENTS 9 eectromce Top 4 Beams are Reference Beams Agilent 10701A Bottom 4 Beams are Measurement Beams Beam Bender See View A Agilent 10700A Back Side Agilent 10721A Agilent 10719A 33 Beam Splitter Agilent 10719A One Axis DEW See View A Non Inverted Inverted Differential Interferometer inverted PITCH MEASUREMENT Top 2 Beams are Measurement Beams Bottom 2 Beams are Reference Beams ER See View A Agilent 10700 View A j 33 Beam Splitter See Note 4 Column Agilent 5517C 003 Laser Head Stage Mirrors Differential Interferometer Stage LINEAR MEASUREMENT Back Side Top 2 Beams are Reference Beams ais Bottom 2 Beams are Measurement Beams ST See View B See View B Agilent 10719A Agilent 10719A Agilent 10701A Non Inverted Inverted 50 Beam Splitter Agilent 10707A l Beam Bender Fiber Optic Cables to Receiver Electronics Lx LINEAR and YAW MEASUREMENTS ViewB 4 Agilent 10719A One Axis or 10721A Two Axis Differential Interferometer See Note 4 Agilent 10719A One Axis Reference Differential Interferometer inverted Beams PITCH ME
78. measurement frequency The Agilent compensation electronics uses this phase information to update the compensation number for use by the rest of the system Maintaining the 0 20 ppm accuracy typical of this compensation technique requires that air within the etalon s cavity have the same temperature pressure and humidity as the air in the measurement paths To accomplish this the Agilent 10717A Wavelength Tracker should be mounted as close to the measurement area as possible Figure 165 shows an X Y stage application using a Wavelength Tracking Compensation system The components that comprise the Wavelength Tracking Compensation system are Agilent 10717A Wavelength Tracker Beam Bender or Beam Splitter Agilent 10710B Adjustable Mounts for mounting beam bender or beam splitter Agilent 10780C or Agilent 10780F receiver Receiver Cable the cable used depends on the measurement system electronics used see Chapter 36 Accessories in this manual for a listing and description of the cables available Automatic Compensation Board for the system electronics you are using Recommended see Automatic Compensation paragraphs in your electronics documentation for installation procedures Alternately an axis board can also be used to monitor the wavelength tracker s output Laser and Optics User s Manual Vol Il Agilent 10717A Wavelength Tracker 24 X Y STAGE APPLICATION X Axi Differential lt Interfero
79. measurements between a measurement plane mirror and a reference plane mirror Since mirror size requirements depend on the application both plane mirrors must be supplied by the user Recommended optical specifications for these reflectors can be found in the Agilent 10721A and 10721 01 Two Axis Differential Interferometer Specifications section at the end of this chapter You must also provide the mounting system for the mirrors An important consideration in designing the mountings is to provide the means to ensure that the two mirrors are aligned substantially parallel to each other during System reset even though they are not in general coplanar Initial parallelism at reset is important for keeping the permitted measurement mirror angle range symmetrical about the initial zero angle position For example a parallelism error of 10 seconds during reset will effectively reduce the angle range in one direction by 10 seconds and increase it in the other direction by the same amount The general solution is to provide a way to adjust at least one and possibly both mirrors As explained below the alignment procedure requires that the reference and measurement mirrors both be made initially perpendicular to the input laser beam and of course perpendicular to the axis of travel Thus with three items to adjust two mirrors and one input beam at least two of them should be adjustable The input beam itself usually allows the first
80. micron C 0 08 typical Flatness Depending on the application and accuracy requirements of Fundamental Optical Resolution 4 the application mirror flatness may range from X 4 to 20 i e 0 16 Non linearity Error 3 5 nm 0 14 pinch to 0 03 umeters 6 to 1 2 pinches 12 7 90 2 mm nm lt lt 3 55 gt 12 7 SYM Center Line See Note 0 50 A 38 9 mm g 1 53 5 4 E 35 a A y 859mm Q 1 26 3 38 vy Agilent c oS 10715A Y A 8 1 mm 23 9 mm 0 32 0 94 6 32 UNC 4 Places y Thru Clearance Y For No 4 or 25 mm 28 4 32 0 1 12 1 26 From Laser To Mirrors 12 7 mm 0 50 Qs A 38 1 mm 28 4 mm 1 50 1 12 fe 8 g 3 To Receiver Note 14 0 mm For 10715A 001 this dimension 0 55 is 100 1mm 3 94 Figure 153 Agilent 10715A Differential Interferometer and Agilent 10715A 001 Turned Configuration dimensions 480 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume II 23 Agilent 10716A High Resolution Interferometer Description 482 Special Considerations 485 Installation 485 Alignment 486 Specifications and Characteristics 493 RE Agilent Technologies 481 23 Agilent 10716A High Resolution Interferometer Description 482 The Agilent 10716A High Resoluti
81. mirror interferometers except that its reference path is redirected to be parallel to the measurement path outside the interferometer Thus the reference path also requires a plane mirror for its reflector Beam diameter The Agilent 10719A interferometer requires the 3 mm diameter beam available from an Agilent 5517C 003 Laser Head The smaller diameter beam enables the beam positions on the stage mirror to be closer to the lithographic image plane reducing Abb offset errors Receiver considerations The Agilent 10719A interferometer is designed primarily for use with the Agilent 10780F Remote Receiver however any other Agilent receiver may be used The advantage of using the remote receiver is that the fiber optic sensor head can be directly attached to the interferometer eliminating the need for separate mounting brackets When laying out an application be sure to allow enough clearance for the fiber optic cable without bending it tighter than its minimum bend radius of 35 mm 1 4 inches Also avoid any kinking where the fiber connects to the sensor head Kinking or excessive bending of this cable can cause signal attenuation 518 Laser and Optics User s Manual Vol Il Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 BEAM LOCATIONS FOR AGILENT 10719A Choice of Ha Measurement Reference Four Positions 1 250 Beams Beams See Note Note Either aperture can be used FRON
82. mm 0 060 in AXIAL SEPARATION Typical with proper alignment 15 25 C distance between the interferometer and reflector Short Range Optics 0 1 3 m 4 120 in Long Range Optics 1 30 m 3 100 feet Dimensions see Figure 221 on next page Weight Straightness Interferometer 164 grams 5 8 ounces Straightness Reflector 800 grams 28 2 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency 9096 Worst Case 633 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 0 mm 1 18 7 9 mm M3x0 5 Aperture 16 Places 0 31 Dia 40 0 mm 25 0 mm 1 57 0 98 21 0 mm 0 83 lt gt 20 0 mm 4 33 0 79 8 0x98 0 mm Aperture 0 31 x 3 66 Dia Net Weight 800 g 28 2 oz Net Weight 164 g 5 8 oz Angular Reflector Straightness Interferometer Figure 221 Agilent 10774A Short Range Straightness optics and Agilent 10775A Long Range Straightness optics 634 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 31 Agilent E1826E F G One Axis Plane Mirror Interferometer Description 636 Available Options 640 Agilent E1826E One Axis Plane Mirror Interferometer Specifications 641 Agilent E1826F One Axis Pl
83. obtain the correct value Multiply the measured value by the interferometer calibration factor number to get the correct straightness The optical reference accuracy term can be eliminated by rotating the mirror 180 and making another measurement The slope must be removed manually or in software Environmental conditions such as temperature changes of the machine or optics vibration and air turbulence can cause errors Errors due to thermal expansion can be minimized by allowing the machine and optics to reach thermal equilibrium before making a measurement The effects of vibration can be reduced by good fixturing averaging successive runs reducing the slew rate and more accurate manual slope removal Air turbulence effects can be minimized by using baffles while thermal gradient effects can be minimized by mixing the air with fans Specifications Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device 632 Laser and Optics User s Manual Vol Il Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Specifications ACCURACY Overall accuracy Optical Reference Accuracy Measurement Accuracy This is analogous t
84. of multiaxis stages where linear and angular control of the stage is required The Agilent 10736A provides three linear measurements Two angular measurements can be calculated from this data When the interferometer is placed along the X axis yaw theta Z and pitch theta Y can be derived in addition to linear X displacement When it is placed on the Y axis yaw theta Z and roll theta X can be derived in addition to linear Y displacement Redundant yaw is useful when mapping measurement mirrors which provides improved accuracy The Agilent 10736A 001 provides a beam bender for one measurement path When 10736A 001 is installed yaw is not measured The interferometer and beam bender can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 5 5 kg 12 Ibs Dimensions see figures 191 and 192 on following pages Materials Used Housing Invar and aluminum Optics Optical grade glass Adhesives Vacuum grade Axis 3 Linear axes which provide linear X pitch and yaw or linear Y roll or yaw Available Beam Size 3 6 or 9 mm Thermal Drift Coefficient Average Axes 1 amp 2 40 nm 1 6 Axis 3 50 nm 2 0 pin C Non linearity Error 1 nm for each axis Resolution Optical AX 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 24 urad 0 049 arc sec using X32 electronics 0 029 urad 0 0061 ar
85. of two ways move the measurement mirror to the zero air deadpath position before each system reset or use a deadpath compensation number in software If you use this method be aware that the compensation number can be either positive or negative depending on the relative position of the mirrors at reset Be sure to use the correct sign for your application When the Agilent 10721A interferometer is used in its angle measuring configuration you must use the second software method since the measurement and reference path lengths are inherently unequal by 19 05 mm 0 750 inch Laser and Optics User s Manual Vol II 551 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Agilent 10721A and 10721A C01 Two Axis Differential Interferometer Specifications USE Multiple axis applications such as precise positioning of a multiaxis stage where the stage must be linearly and angularly positioned with respect to an external object such as a column or inspection tool The interferometer can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 300 grams 11 ounces Dimensions see Figure 182 10721A Figure 183 10721A C01 Materials Used Housing Aluminum Optics Optical grade glass Adhesives Vaccum grade Axis Linear and yaw Available Beam Size 3 mm Thermal Drift Coefficient Average 150 nm 5 9 for Option C01 50 nm C typical Resoluti
86. right angles in the beam paths from the laser head to the interferometers An Agilent 10777A Optical Square may be used True square L S Starret Athol Mass Recommended but not required For setting up beam paths parallel to or perpendicular to machine surfaces that are parallel to or perpendicular to the stage mirrors Washer lock 0 115 in id 0 270 in od internal tooth qty 6 2190 0004 Supplied with Agilent 10737L R Interferometer Screw cap 4 40 0 500 in Ig hex trim head 0 187 in 3 16 in across flats qty 2 2940 0269 Supplied with Agilent 10737L R Interferometer Screw machine 4 40 1 75 in Ig pan head pozidriv qty 6 2200 0127 Supplied with Agilent 10737L R Interferometer Screw socket head cap 4 40 0 250 in Ig hex recess 0 094 in 3 32 in across flats qty 2 3030 0253 Supplied with Agilent 10737L R Interferometer Screw socket head cap 2 56 0 187 in lg 0 064 in radius oval point hex recess qty 2 3030 0983 Supplied with Agilent 10737L R Interferometer Hex key 5 64 in 0 078 in 8710 0865 Supplied with Agilent 10737L R Interferometer Hex key 3 32 in 0 094 in 8710 0896 Supplied with Agilent 10737L R Interferometer Wrench 3 16 in open end 8710 1740 Supplied with Agilent 10737L R Interferometer Used to secure the Agilent 10711A Adjustable Mount Alignment Aid Alignment Aid 10706
87. supplied with the Agilent 10715A The measurement mirror must be a plane mirror such as the Agilent 10724A Plane Mirror Reflector or other user supplied plane mirror The major benefit of the Agilent 10715A interferometer is that the optical path is common to both the reference and the measurement beams see Figure 141 This makes the Agilent 10715A extremely tolerant of changes such as thermal expansion or changes in air characteristics When used in a positioning system the small reference mirror supplied can be mounted very close to the measurement mirror The advantages of the common beam path and the small reference mirror combine to significantly reduce deadpath Deadpath is the optical path length difference between the reference and measurement beams when the stage is at its initial zero position Reducing deadpath results in extremely high stability and resistance to spurious changes in the optical path Since the measurement beam travels twice between the interferometer and the plane mirror the resolution of the measurement is twice that of a linear or single beam interferometer A turned configuration Agilent 10715A 001 is available to turn the beam 90 degrees thereby eliminating the need for a beam bender The orientation of the optics determines which frequency polarization is in the measurement or reference path thus affecting direction sense A differential measurement is one in which both the reference beam and the me
88. surfaces on the interferometer s housing This simplifies user installation and alignment of the interferometer in the measurement system These interferometers are of the same type of high stability plane mirror interferometer design as the Agilent 10706B interferometer Laser and Optics User s Manual Vol Il Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 AGILENT 10735A THREE AXIS INTERFEROMETER To Measurement Mirror See seas View A Not Used Input for all Axes Axis 3 Do not loosen Output these or any screws eS Primary x i ol Beams Axis 1 Axis 2 Output i Output om ae Let Axis 1 Axis 2 O View A INPUT FACE View B MEASUREMENT FACE Figure 184 Agilent 10735A Three Axis Interferometer Laser and Optics User s Manual Vol II 557 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers AGILENT 10736A THREE AXIS INTERFEROMETER To Measurement Mirror See View A Input for all Axes Axis 3 Do not loosen Output these or any Primary X screws Axis 1 9 C di Axis 2 Output 71 Output ola Beams Axis 1 Axis 2 View A View B INPUT FACE MEASUREMENT FACE Figure 185 Agilent 10736A Three Axis Interferometer
89. system being installed The Agilent E1708A receives the laser beam via a remote sensor Agilent E1706A containing a lens and polarizer A fiber optic cable Agilent E1705A carries the beam from the remote sensor to the electronics in the receiver body The fiber optic cable length is 2 0 meters to allow for considerable mounting flexibility and ease of use This arrangement provides several benefits it allows the receiver body to be located well away from the point of beam intercept so receiver heat is not dissipated near the measurement area it makes easier access to the attenuator and squelch adjustments possible and there is a much smaller package size in the measurement area Laser and Optics User s Manual Vol II 705 35 Receivers b Agilent E1705A Fiber Optic Agilent E1706A I Remote Sensor Agilent E1708A Remote Dynamic Receiver Figure 268 Agilent E1708A Remote Dynamic Receiver Principles of operation 706 The Agilent E1708A receiver s body contains the photodetector preamplifiers and a detector circuit designed to convert the laser beam returning from an interferometer into a differential square wave at the Doppler frequency 100 kHz to 7 2 MHz The Doppler frequency contains the measured displacement information MEAS signal representing the relative motion between an interferometer and its associated reflector A squelch circuit allows the receiver s signal output to be turned
90. the interferometer and back to the small aperture of the laser head Move the laser head or the interferometer to keep the laser beam centered on one hole of the alignment target Fasten the laser and or the beam steering optics securely taking care not to disturb the alignment For high accuracy alignment or for installations where there is less than 0 5 meter 20 inches between the laser and mirror perform steps 6 through 8 Remove the alignment target Agilent Part Number 10702 60001 and select the large aperture of the laser head Do not remove the alignment aid Agilent Part Number 10706 60001 on the output side of the interferometer Center the output beams on the receiver aperture by moving the receiver Translucent tape over the receiver aperture will help to observe when the beam is centered Connect a fast responding voltmeter preferably an analog type to the receiver test point Pitch and yaw the laser beam until a signal is received This is indicated by the voltmeter suddenly jumping to a value greater than 0 25 volt This adjustment is critical and may require great care to achieve the desired result Pitch and yaw the laser beam to achieve maximum voltmeter reading Carefully readjust the interferometer until the voltage reading suddenly drops back to about 0 3 volt Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 The alignment should be adjusted such that the vol
91. the receiver specification drawings at the end of this chapter Laser and Optics User s Manual Vol 1 Receivers 35 RECEIVER BEAM CLEARANCES AND ALIGNMENT TARGETS Laser Beam From Laser Head Small Aperture On Laser Head Agilent 10780C gt amp Receiver Small Aperture Laser Beam From Interferometer Alignment Target NS Small Laser Beam Going To Interferometer 2103 Agilent 10780F Remote Receiver Laser Beam From Laser Head m Small Aperture On Laser Head rii SOA 7 Laser Beam From Agilent E1706A Interferometer Remote Sensor Alignment Target w Small Laser Beam N Going To Interferometer Pel ael Figure 263 Agilent 10780C and Agilent 10780F Receiver beam clearances and alignment targets Laser and Optics User s Manual Vol II 697 35 Receivers Alignment 698 General Each Agilent 10780C or Agilent 10780F Receiver in the measurement system requires an alignment relative to its input beam to maximize its measurement signal strength This alignment is typically done by positioning the receiver so the two polarization vectors from the laser head are parallel or perpendicular to the plane defined by the centerlines of the two mounting holes within 3 Also the beams should be centered on the receiver s input lens Alignment target The Agilent 10780C or Agilent 10780F receiver is supplied with a snap on beam target to ease coarse alignment The
92. to the angular reflector Laser and Optics User s Manual Vol II 609 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Installation and Alignment General considerations 1 Carefully read chapters 2 through 4 and Chapter 12 Accuracy and Repeatability and complete the following items before installing a laser positioning system into any application Alignment of the angular optics is similar to alignment of a Linear Interferometer Read the alignment procedure for the Linear Interferometer given in Chapter 18 of this manual The angular interferometer must be located between the laser head and the angular reflector The beam from the laser head must enter the angular interferometer either through the single opening on one side for an in line measurement or through the opening in the bottom for a measurement along an axis perpendicular to the laser beam The side of the angular interferometer with two openings should always face the angular reflector When initializing the laser measurement system the angular optics must be parallel to within 20 arc minutes to achieve the specified accuracy corresponds to 40 arc minutes misalignment by autoreflection Supply a rigid mounting surface for both optics The mounts should be adjustable for alignment The adjustable mounts available from Agilent for these optics include the Agilent 10785A Height Adjuster and Post The Agilent 10784A Base may be used
93. until the laser beam is autoreflected back into the laser head This insures proper alignment It may be necessary to move the interferometer again to center the laser beam on the input aperture aperture B Use a piece of translucent tape to help observe the beam 6 Once the autoreflection alignment of the interferometer is complete remove the gage block and select the large aperture on the laser head Two parallel unclipped beams should now leave the interferometer See Figure 148 Laser and Optics User s Manual Vol II 475 22 Agilent 10715A Differential Interferometer The autoreflection procedure above is used only to reduce clipping and is not as critical as the autoreflection procedure used to reduce cosine error As long as the two beams are not clipped the alignment of the interferometer is adequate One of the two beams will be directed to the measurement mirror the other will be directed to the stationary reference mirror Which beam goes to which mirror affects only the direction sense discussed in the Effect of optics on measurement direction sense section in Chapter 3 System Design Considerations in Volume I of this manual Since it is important that the beam going to the measurement mirror be properly aligned to avoid cosine error this alignment will be performed first Alignment is iterative because both the incoming beam and the interferometer require adjustment AGILENT 10715A VIEWED FROM PLANE MI
94. user s responsibility to create a vacuum compatible mounting if one is required Agilent 10724A Plane Mirror Reflector 750 For linear applications requiring a plane mirror reflector the Agilent 10724A Plane Mirror Reflector see Figure 295 is recommended It can be used with the Agilent 10706A Agilent 10706B Agilent 10715A or Agilent 10716A plane mirror interferometers The Agilent 10724A can only be used for single axis linear measurements for multiaxis applications that involve compound motions such as X Y stages custom mirrors must be supplied by the user Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10724A Plane Mirror Reflector Figure 295 Agilent 10724A Plane Mirror Reflector Agilent 10724A Plane Mirror Reflector Mounting These instructions give the details for mounting and installing the Agilent 10724A Plane Mirror Reflector The Agilent 10724A is shipped with the 5061 6009 Hardware Kit The Agilent 10724A is designed to be mounted into a hole or pocket on the stage moving object The mounting surface for the Agilent 10724A should be closely perpendicular to the axis of machine travel Figure 296 shows the mounting hole details Provision is made to lift the flange slightly off the mounting surface thereby allowing pitch and yaw corrections to be made to align the Agilent 10724A exactly to the axis of machine travel Laser and Optics User s Manual Vol II 751 36 Accessories Agil
95. www agilent com services English index html Agilent s Test Measurement Fax Service for United States and Canada Technical information for test and measurement products and services is available 24 hours a day 7 days a week by calling 1 800 829 4444 Technical Support If you need technical assistance with an Agilent test and measurement product or application you can find a list of local service representatives on the web site listed above If you do not have access to the Internet one of the following centers can direct you to your nearest representative Asia Pacific Japan Hong Kong SAR Measurement Assistance Center Tokyo Japan Tel 852 2599 7777 Fax 852 2506 9284 Tel 81 426 56 7832 Fax 81 426 60 8747 Australia New Zealand Blackburn Victoria Australia United States Test amp Measurement Call Center Tel 61 3 9210 5555 Englewood CO U S A Canada Tel 800 829 4444 Toll free in US Mississauga ON Canada Tel 877 894 4414 Fax 805 206 4700 Europe European Marketing Organization The Netherlands Tel 31 20 547 2000 Fax 31 20 547 7799 Printed in U S A Data subject to change Rev 12 06 Continued from front matter Warranty contd Agilent does not warrant that the operation of Agilent products will be uninterrupted or error free If Agilent is unable within a reasonable time to repair or replace any product to a condition as warranted customer will be entitled to a re
96. 0 slew rate Agilent E1708A vs Agilent E1709A 720 related to cables 721 specifiations 10780C Receiver 703 specifications 10567A Dual Beam Beam Splitter 364 10700A 33 Beam Splitter 367 10700B 4 Beam Splitter 370 10700C 15 Beam Splitter 371 10701A 50 Beam Splitter 368 10702A 001 Linear Interferometer with Windows 408 10703A Retroreflector 409 10704A Retroreflector 421 10705A Single Beam Interferometer 420 10706A Plane Mirror Interferometer 439 10706B Plane Mirror Interferometer 464 10707A Beam Bender 372 10710B 10711A Adjustable Mount 729 10713 1 Inch Cube Corner 409 10715A Differential Interferometer 480 10715A 001 Turned Configuration 480 10716A High Resolutions Interferometer 494 Laser and Optics User s Manual Vol II 10716A 001 Turned Configuration 494 10717A Wavelength Tracker 508 10719A One Axis Differential Interferometer 529 10720A Linear Interferometer 407 10721A Two Axis Differential Interferometer 552 10722A Plane Mirror Converter 440 10723A High Stability Adapter 440 10724A Plane Mirror 753 10724A Plane Mirror Reflector 441 10725A Beam Splitter 374 10725B 4 Beam Splitter 376 10725C 15 Beam Splitter 376 10726A Beam Bender 374 10728A Plane Mirror 754 10736A Three Axis Interferometer 578 10736A 001 Three Axis Interfereometer 578 10737L R Three Axis Inteferometer 605 10766A Linear Inteferometer 410 10767A Retroreflector Specifica
97. 0 5ppm 0 5 micrometer per meter of travel 8 x 600 For high accuracy alignment or for installations where there is less than 0 5 meter 20 inches between the laser and mirror perform steps 5 through 7 5 Remove the receiver target and plane mirror interferometer alignment target and select the large aperture of the laser head Do not remove the plane mirror interferometer alignment aid on the output side of the plane side of the plane mirror interferometer 6 With a fast responding voltmeter preferably an analog type attached to the receiver test point pitch and yaw the plane mirror interferometer until a signal is received on the receiver The voltmeter will suddenly jump to some value greater than 0 25 volt This is a critical adjustment and may initially require great care 7 Adjust the plane mirror interferometer in pitch and yaw until the voltmeter reading which may be fluctuating is maximum Now carefully readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt Laser and Optics User s Manual Vol II 435 20 Agilent 10706A Plane Mirror Interferometer 436 The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded This aligns the laser beam to within 1 2 arc minutes to the direction of travel result
98. 0 Agilent 10706A Plane Mirror Interferometer 444 Install the Agilent 10723A High Stability Adapter in place of the removed reference cube corner Either set of mounting slots may be used to attach the High Stability Adapter to the interferometer Refer to Figure 131 Locate and remove the PLANE MIRROR CONVERTER The black plastic bezel under the plane mirror converter must be removed to allow access for an Alignment Aid during setup The bezel is secured with silicone adhesive but can be easily removed Place the blade of a small screwdriver under the lip of the bezel and pry the bezel out PRY THE SCREWDRIVER AWAY FROM THE BEAM SPLITTER GLASS TAKING CARE THAT IT DOES TO COME IN CONTACT WITH OR SCRATCH THE OPTIC Discard the bezel Replace the plane mirror converter that was removed in step 4 This completes the conversion The converted interferometer must be realigned as described in the alignment sections for the Agilent 10706B High Stability Plane Mirror Interferometer in Chapter 21 of this manual Laser and Optics User s Manual Vol Il Agilent Laser and Optics User s Manual Volume ll 21 Agilent 10706B High Stability Plane Mirror Interferometer Description 446 Special Considerations 449 Mounting 449 Installation 449 Alignment 449 Straight Through Configuration 450 Turned Configuration 450 Specifications and Characteristics 463 RE Agilent Technologies 445 21 Agilent 10706B High Stability Plane Mirro
99. 02 One Axis Differential 510 10721A Two Axis Differential 513 10721A Two Axis Differential Interferometer 552 10721 01 Two Axis Differential 534 10736A 556 10737L Compact Three Axis 582 10737R Compact Three Axis 582 10766A Linear Interferometer 396 10770A Angular Interferometer 608 E1826E F G 636 E1827A Two Axis 650 E1837A Three Axis 658 74399 Three Axis 658 Z4420B Five Axis NGI 676 Z4421B Five Axis 676 Z4422B Three Axis 658 K kit 10776A Straightness Accessory 758 L laser beam path 401 laser head 334 5517A 341 5517B BL C D DL FL 345 5519A 688 5519A B 354 5519B 688 descriptions 341 warm up 339 wavelength of light 337 laser head cables 732 735 laser head cables for power only 735 laser head differences 341 laser head orientation 338 laser heads comparison 341 thermally stabilized cavity lengths 338 laser tripod 10753B Laser Tripod 749 linear inteferometer 10766A 396 linear interferometer 10702A 396 10702A 001 with windows 397 list of cables 732 M manipulator N1209A RPT 390 measurement parallelism 619 squareness 619 straigntness 618 771 Index measurement frequency definition 716 measurement signal error 338 measurements angular 536 mechanical stability 380 metrology primary standard 337 mount adjustable 524 mounting and clearance 5517A Laser Head 342 5517B BL C D DL FL Laser Head 348 mounting platform fixed 523 mounting surfac
100. 0702A interferometer it must be the fixed component Laser and Optics User s Manual Vol II 403 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Mounting Vibration considerations To achieve the highest possible measurement accuracy be sure your measurement system design and installation provide sufficient and appropriate isolation of the optical components from the effects of vibration See Chapter 3 System Design Considerations and Chapter 4 System Installation and Alignment in Volume I of this manual for more information Adjustable mounts The optical elements inside these Agilent laser measurement system optics are not precisely referenced to their housings In most applications involving these optics a few simple alignments during system installation can usually provide equal or better alignment than referencing the optics to their housings Therefore slight positioning adjustments of the unreferenced interferometers beam splitters and beam benders are needed for proper system alignment Positioning adjustments for the Agilent 10702A interferometer can be provided by using an Agilent 10711A Adjustable Mount Positioning adjustments for the Agilent 10766A interferometer can be provided by using an Agilent 10785A Height Adjuster and Post a base plate accessory Agilent 107844 for the post is available where appropriate These mounting arrangements allow adj
101. 0721A and 10721A C01 Two Axis Differential Interferometers Alignment 548 Alignment aid To help in aligning the Agilent 10721A interferometer an alignment aid Agilent Part Number 10706 60202 is provided with it Alignment procedure The objectives of the alignment procedure are 1 2 3 4 to position the measurement point accurately on the measurement mirror to minimize cosine error to maximize signal strength at the receiver and to ensure a symmetrical range of stage tilt about the zero angle point To accomplish these goals 1 the measurement mirror must be aligned perpendicular to its axis of linear motion and the reference mirror must be aligned parallel to the measurement mirror before the following steps When using the Agilent 10721A interferometer for angle measurements comments in the procedure below regarding reference mirror alignment may be disregarded since they are inherently satisfied by the use of a single mirror for these measurements For a system having more than one measurement axis choose a practical sequence in which to align the axes before beginning the interferometer alignment Be aware that the laser head and certain beam directing optics may be adjusted for the first axis but then will not be permitted to move while aligning subsequent axes In fact the convenience of independent adjustments may suggest the use of additional beam directing optics in certain cases 1
102. 0736B 001 Agilent 10766A Agilent 10767A Agilent 10770A Agilent 10774A Agilent 10775A Agilent 10780C none none none 10774 20021 10774 20021 10780 40003 10706 60001 10767 67001 10767 67001 10767 67001 10774 67001 10774 67001 none Agilent 10780F with 9 mm beam sensor head 10780 40009 none Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10753B Laser Tripod The Agilent 10753B Laser Tripod is intended primarily for use with the Agilent 5519A B Laser Head in an Agilent 5529A 55292A Dynamic Calibrator system Information about the Agilent 10753B Laser Tripod is presented in the Agilent 5529A 55292A Dynamic Calibrator Getting Started Guide Agilent manual part number 10747 90047 Agilent 10759A Footspacing Kit Optics The Agilent 10759A Footspacing Kit is intended primarily for use when making Flatness Measurements with the Agilent 5529A 55292A Dynamic Calibrator system Information about the Agilent 10759A Footspacing Kit is presented in the Agilent 5529A 55292A Dynamic Calibrator Measurement Reference Guide Agilent manual part number 10747 90051 The optics listed here are those that are 1 not interferometers and 2 not usually referred to as beam directing optics Table 86 provides summary descriptions of the optics More complete descriptions follow the table Specification drawings of the optics described in this chapter are provided as part of the descriptions
103. 0776A Straightness Accessory Kit 618 10777A Optical Square 760 1077A Optical Square Specifications 761 10780C Receiver 691 10780C Receiver Specifications 703 10784A Base 727 10785A Height Adjuster and Post 727 10785A Height Adjuster Post and the Agilent 10784A Base Specifications 731 10787A Case 618 10790A B C Receiver Cable 736 769 Index 10791A B C Receiver Cable 737 10880A B C Receiver Cable 738 10881A B C Laser Head Cable 739 10881D E F Laser Head Cable 740 10882A B C Laser Head Cable 741 10884A Power Supply specifications and characteristics 767 5517A Laser Head 341 5517A Laser Head dimensions illustrated 344 5517A Laser Head Specifications 344 5517A Laser Head mounting and clearance 342 5517B BL Laser Head Specifications 349 5517B BL C D DL FL Laser Head 345 5517B BL C D DL FL Laser Head mounting and clearance 348 5517C Laser Head Specifications Standard and 5517C 003 349 5517C 003 Laser Head 510 5517C 009 Laser Head Specifications 350 5517D DL Laser Head Specifications 350 5517FL Laser Head Specifications Standard 351 5517FL 009 Laser Head Specifications 351 5519A Laser Head 688 5519A B Laser Head 354 5519A B Laser Head dimensions illustrated 356 5519A B Laser Head Specifications 356 5519B Laser Head 688 55283A Straightness Measurement Kit 618 A Abb error 358 Abb offset error 424 ac light power defined 716 AC Optical Signal Intensity Agilent E170
104. 0780C Receiver dimensions Laser and Optics User s Manual Vol II 703 35 Receivers Agilent 10780F Remote Receiver Specifications Weight 126 grams 4 5 ounces for Agilent 10780F receiver 26 grams 0 9 ounce for remote sensor with a 2 meter cable Dimensions see figure below Typical Power Requirements 15 volts at 136 mA Heat Dissipation 2 0 W typical for receiver 0 W for remote sensor Alignment Tolerances Roll 3 degrees Pitch 1 degree Yaw 1 degree Maximum Sensitivity 2 2 uW with 2 meter cable Factory adjusted to 5 0 uW can be adjusted to maximum sensitivity using procedures in the Agilent 10780C F Operating and Service Manual Becomes 5 0 W with a 10 meter fiber cable Output Signal Differential square wave at Doppler shifted split frequency 100 kHz to 7 2 MHz Electrical Cables Agilent 10790A 5 m 15 2 ft Agilent 10790B 10 m 30 5 ft Agilent 10790C 20m 61 ft Electrical cables for Agilent 10885A 10889B 10896B 10897C 10898A or N1231A B axis board Agilent 10880A 5 m 15 2 ft Agilent 10880B 10 m 30 5 ft Agilent 10880C 20m 61 ft Beam Spacing r Beam Diameter lt 7 6 mm amp mm 0 24 030 030 99mm 0 30 y 0 39 Ce Clearance Hole for 4 40 Screw lt gt 23 8 mm 19 1 mm lt g
105. 10706A A 4 158 2 nm 6 2 pin A 128 5 0 nm 0 2 yin A 1024 0 62 nm 0 024 pin The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on using 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics 438 Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 Agilent 10706A Plane Mirror Interferometer Specifications Weight 308 grams 10 9 ounces NOTE Flatness deviations will appear as measurement errors Dimensions see figure below when the mirror is translated across the beam Mount should be Materials Used same as Agilent 10702A Interferometer kinematic so as not to bend mirror If accuracy requirements Optical Efficiency including a 98 efficient plane mirror reflector demand it mirror flatness might be calibrated scanned and Typical 70 stored in the system controller to be used as a correction Worst Case 54 factor Fundamental Optical Resolution 4 Optical Surface Quality 60 40 per MIL 0 13830 Non linearity Error 2 2 nm 0 09 MIRROR ALIGNMENT REQUIREMENTS VS DISTANCE PLANE MIRROR MEASUREMENT MIRROR SPECIFICATIONS Maximum Angular Misalignment Depends on distance Reflectance 98 for 633 nanometers at normal incidence between interferometer and plane mirror minimum 80 Typic
106. 10884B will increase up to the maximum 15V specification of the power supply No additional receivers should be connected If more receivers are needed a second 10884B power supply should be added to the system and used to power the additional receivers Laser and Optics User s Manual Vol Il Index Numerics 10567A Dual Beam Beam Splitter 363 10567A Dual Beam Beam Splitter dimensions 365 10567A Dual Beam Beam Splitter Specifications 364 10700A 33 Beam Splitter 366 10700A 33 Beam Splitter Specifications 367 10700B 4 Beam Splitter 369 10700B 4 Beam Splitter Specifications 370 10700C 15 Beam Splitter 369 10700C 15 Beam Splitter Specifications 371 10701A 50 Beam Splitter 366 10701A 50 Beam Splitter Specifications 368 10702A Linear Interferometer 396 10702A Linear Interferometer Specifications 407 10702A 001 Linear Interferometer with Windows 397 10702A 001 Linear Interferometer with Windows Specifications 408 10703A Retroreflector 396 10703A Retroreflector Specifications 409 10704A Retroreflector 414 10704A Retroreflector Specifications 421 10705A Single Beam Interferometer 414 10705A Single Beam Interferometer Specifications 420 10705A 080 Adapter Plate 418 10706A Plane Mirror Interferometer 424 10706A Plane Mirror Interferometer Specifications 439 10706A 080 Adapter Plate 431 449 10706B 446 10706B High Stability Plane Mirror 397 10706B High Stability Plane Mi
107. 1251B Matching High Performance Laser Head Cable 7 m Sensitivity AC DC ratio 90 0 20 uw See the Agilent E1709A Remote High Performance Receiver Operating Manual Agilent Part Number E1709 90006 English or E1709 90007 Japanese for more details on sensitivity Laser and Optics User s Manual Vol Il 7 6 mm 0 30 N Clearance Hole 039 for 4 40 Screw 23 8 mm 3 67 mm 144 0 94 19 1 mm 0 75 22 4 mm 3 5 mm 4 0 14 y 0 88 x19 43 1 15 5 i 1 70 0 61 Clearance Hole for M3 5 6 32 Screw 2 Places 4 32mm 170 R35 Minimum 1 4 Bend Radius Agilent E 7 6 mm 0 30 1709A 010 40 0 mm 1 575 Y Figure 276 Agilent E1709A receiver dimensions Laser and Optics User s Manual Vol II Receivers 35 10 2 mm 11 1 mm 0 403 0 436 9 0 mm 9 9 mm 0 354 0 390 15 1 mm 10 072 10 4 0150 0 410 11 4mm 0 450 1 7mm 0 065 723 35 Receivers 724 Laser and Optics User s Manual Vol 11 Agilent Laser and Optics User s Manual Volume II 36 Accessories General 726 Adjustable Mounting Hardware 726 Cables 732 Alignment Targets and Aids 747 Agilent 10753B Laser Tripod 749 Agilent 10759A Footspacing Kit 749 Optics 749 Agilent 10724A Plane Mirror Reflector 750 Agilent 10728A Plane Mirror 754 Agilent 10772A Turning Mirr
108. 1A adjustable mounts Y 0 77 Clearance for 4 Screw 84 40 3 mm Screw Thru m 4 Clearance for u A 4 40 Cap Screw Opposite side i a 19 6 mm 41 66mm 47 mm 0 77 1 64 1 85 Y 17 70 mm 0 696 12 7 mm Thru 0 50 Dia Clearance for 4 40 Cap Screw Opposite side Aglient 10700A Beam Splitter Agilent 10701A Linear Interferometer Agilent 10705A Single Beam Interferometer Agilent 10707A Beam Bender Beam Center Line 25 4 mm 1 00 m 12 7 mm 78 m 0 50 Figure 279 Agilent 10710B Adjustable Mount dimensions Laser and Optics User s Manual Vol II 729 36 Accessories 4 40 Thru Clearance for 4 40 Cap Screw 2 Places 4 Places 25 44 mm Thru 0 90 Dia 33 27 mm 1 31 Clearance for 4 Screw 2 5 mm Screw 32 0 mm 59 7 mm 64 77 mm 1 26 2 35 2 55 Agilent 10702A Linear Interferometer Agilent 10706A Plane Mirror Interferometer Agilent 10715A Differential Interferometer M EON i Cd 12 7mm 27 0 50 Beam Spacing 3175mm m 1 25 Sats 100 sadua 12 7 0 50 Figure 280 Agilent 10711A Adjustable Mount dimensions 730 Laser and Optics User s Manual Vol 11 Accessories 36 Agilen
109. 2 56 screws tilt the mirror for alignment Back off the 2 56 screws so the mirror housing is flush with the interferometer Tighten the 4 40 screws to compress the springs completely and then back off approximately 1 1 2 turns 3 Place the 10706 60202 alignment aid between the beam splitting cube and the reference mirror see Figure 203 4 Block the beams going to the stage mirror 5 Setthe laser to the small aperture 6 Tilt the reference mirror by adjusting the 2 56 screws until the beam from the reference mirror autoreflects back to the center of the laser small aperture Laser and Optics User s Manual Vol II 601 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 602 10 11 12 13 Remove the alignment aid Check the position of the beams in the interferometer s output apertures see Figure 202 Once again translucent tape is helpful for viewing the beams in the apertures If any beam clipping occurs or if the beams are far off from the desired location check for obstructions and recheck the alignment by performing steps 6 through 10 above Install the receiver assembly To do this reverse the Removing the receiver assembly procedure above Plug in the fiber optic cables Adjust each receiver s gain by turning its gain adjustment screw to cause the receiver s LED to light then reduce the gain until the LED just turns off For more information see Agilent 10780F instructions in Chapter 35
110. 2 8 feet Agilent 10880C 20 meters 65 6 feet Agilent 10791A B C Laser Head Cable connects the Agilent 5517 series Laser Head to an Agilent 10895A VME axis board t has spade lugs for connection to a power supply to provide power to the laser head one required per system Agilent 10791A 5 meters 16 4 feet Agilent 10791B 10 meters 32 8 feet Agilent 10791C 20 meters 65 6 feet Agilent 10881A B C Laser Head Cable connects the Agilent 5517 series Laser Head an Agilent 10885A 10889B 10896B 10897C 10898A or N1231A B axis board t has a DIN connector for connecting to the Agilent 10884B Power Supply to provide power to the laser head one required per system Agilent 10881A 3 meters 9 8 feet Agilent 10881B 7 meters 23 0 feet Agilent 10881C 20 meters 65 6 feet Agilent 10881D E F Laser Head Cable connects the Agilent 5517x series Laser Head to an Agilent 10885A 10889B 10896B 10897C 10898A or N1231A axis board t has spade lugs for connection to a power supply to provide power to the laser head one required per system Agilent 10881D 3 meters 9 8 feet Agilent 10881E 7 meters 23 0 feet Agilent 10881F Laser and Optics User s Manual Vol II 20 meters 65 6 feet 733 36 Accessories Table 82 Cables continued Laser Head Cable connects the Agilent 5519A B Laser Head to the Agilent 10887P Programmable PC
111. 2 Laser and Optics User s Manual Vol II Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 MEASUREMENT PATH fp Agilent 10736A 001 J lt 4l interferometer T y I i Al Reference m B v Z Axis 1 um um 1I pal 2 mm mm um m I I From ZS o gt muy v pg 7 Laser P Ice ge xiu Yul 2 et XIS lt ja mm mm um EE TA 7 2 4 f 2 Axis 3 bid 7A Axis 1 fg 24f4 I Axis 2 fgpt2Afo Iipan aa Plate Axis 3 fgp 2Af3 Ang t 7 NOTE B heM ARE Because the Measurement 4 mirror may have a combination of Measurement Mirror displacement pitch and yaw motions I Measurement Axis 2 the Measurement Axes may have n n d different Df values as shown A A A A 2 WY uv rcc Measurement Mirror Measurements Axes 1 and 3 LEGEND f a Dum um gt fp fA and fp f Rounded corners are used to help you trace paths Figure 188B Agilent Three Axis Interferometers beam paths continued Optical Schematics Optical schematics for these interferometers are given in figures 188A and 188B Each interferometer functions similarly to three parallel Agilent 10706B High Stability Plane Mirror Interferometers with a three way beam splitter in front of them To reduce thermal drift errors the measurement and reference beam paths have the same optical path
112. 21B Five Axis Interferometer beams shown 682 Laser and Optics User s Manual Vol II Agilent Z4420B and Agilent Z4421B Five Axis Interferometers 34 Agilent Z4421B beam pattern spacing and labels Figure 259 shows the beam pattern and spacing of the Agilent Z4421B interferometer viewing from the stage to the interferometer position Al 41 5 97 29 i e S811 Primary Beam 13 113 13 290 b Ic Secondary Beam 18 t Figure 259 Agilent Z4421B beam labels and relative positions Laser and Optics User s Manual Vol II 683 34 Agilent Z4420B and Agilent 24421B Five Axis Interferometers Agilent Z4421B Five Axis Interferometer specifications Weight 3 15 kg 7 lbs Dimensions See Figure 260 on page 685 Glass Dimensions See Figure 261 on page 686 Materials Baseplate Passivated 416 Stainless Steel Coefficient of Thermal Expansion 9 9 x 10 Optics BK 7 Natural Frequency 1kHz Mounting Interface Fasteners M5 x 0 8 Socket Head Captive Screw SHCS Surface Profile 0 02 mm Surface Finish 0 4 um Beam Diameter 9 mm maximum visible Resolution Optical A4 Linear 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension Angular yaw or roll See NGI Angular Resolution section in Chapter 6 Next Generation Interferometers General Information in Volume of this manual for expl
113. 2B Three Axis Interferometers Agilent 24422 beam pattern spacing and labels Figure 249 shows the beam pattern and spacing of the Agilent Z4422B interferometer viewing from the stage to the interferometer position P w N Axis 3 X oe TS X Axis 2 2 Axis 1 Primary Beam _13_ 30 t LE e Secondary Beam Figure 249 Agilent Z4422B beam labels and relative positions 670 Laser and Optics User s Manual Vol 11 Agilent E1837A 24399A and Z4422B Three Axis Interferometers 33 Agilent 24422 Three Axis Interferometer specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Natural Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear Angular yaw or roll See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular resolution 1 95 kg 4 3 Ibs Thermal Drift due to Glass Path Imbalance 40nm C See Figure 250 on page 672 Non linearity Error t1nm See Figure 251 on page 673 Measure Point Tolerance Mean 0 15 mm Passivated 416 Stainless Steel Deviation 0 05 mm Input Beam Cone Angle lt 1 mrad 9 9 x 10 C IBCA BK 7 Beam Parallelism See Figure 249 on page 670 1kHz Axis 1 Axis 2 lt 25 urad Axis 2 Axis 3 lt 100 urad
114. 3 x 10 32 UNF 2A x 13 mm 0 5 DP 260 35 mm 10 25 177 80 0 25 mm 7 00 010 I 8 13 mm gt lt 0 320 K Max Y YB 15 88 mm Centerline of laser beam 0 625 o 4 2 63 Input beam from laser Seat Customer mounting surface _ 32 0 mm 12 70 mm 1 25 0 500 Output beam to receiver oa Y 67 0 mm 0 0 Figure 169 Agilent 10717A Wavelength Tracker dimensions 508 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Description 510 Three Axis System 513 Five Axis System Using Agilent 10719A and Agilent 10721A Interferometers 515 Special Considerations 518 Mounting 522 Installation 524 Alignment 525 Operation 528 Agilent 10719A and 10719A C02 One Axis Differential Interferometer Specifications 529 RE Agilent Technologies 509 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Description 510 General The Agilent 10719A One Axis Differential Interferometer see Figure 170 is a plane mirror type of interferometer that allows differential measurements to be made between a measurement mirror and a reference mirror Both mirrors are usually provided by the user The Agilent 10719A interferometer has the same fundamental optical resolution as the Agilent 10706B High Stability Plane
115. 38 Before proceeding review Alignment principles in Chapter 4 System Installation and Alignment in Volume I of this manual This procedure minimizes cosine error and the thermal drift coefficient of the Agilent 10706B interferometer and maximizes the signal at the receiver Two separate autoreflection adjustment steps are performed using the two alignment aids Steps 1 through 17 constitute the Y axis alignment 1 Send the beam through the center of the 50 beam splitter Align the Y Axis laser beam parallel to the plane of the stage and measurement mirror by pitching and yawing the laser head and moving it side to side This ensures that the interferometer turns the beam 90 Using an optical square or pentaprism is helpful Secure the laser head Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 X Y STAGE APPLICATION High Stability Plane Mirror Adapter Converter X Y STAGE X Axis Agilent 10706B O X h X Axis MIRRORS Receiver X Axis Laser Beam Ss Plane Mirror Alignment Aid A Converter W P N 10706 60001 Y Axis n Laser Beam aser gt lt 50 Splitter Y Axis Agilent 10706B Receiver Alignment Target High Stability P N 10702 60001 Adapter Figure 138 Agilent 10706B High Stability Plane Mirror Interferometer in an X Y Stage Application 2 Position
116. 5 N1250A B Receiver Cable 742 N1251A B Laser Head 743 cables 732 fiber optic 705 709 719 laser head 735 cables list 732 case Laser and Optics User s Manual Vol II Agilent 10787A 618 compact three axis interferometer 10737L R 582 comparison of Agilent Laser Receiver Families 688 comparison of laser heads 341 converting an Agilent 10706A Plane Mirror Interferometer to the Agilent 10706B configuration 442 cube corner 10713B 1 Inch 409 10713C 1 2 Inch 421 D de light power defined 715 depolarization preventing 362 descriptions of laser heads 341 differences between Agilent E1708 and Agilent E1709A 720 differential interferometer 10715A 466 dimensions 10567A Dual Beam Beam Splitter 365 5517A Laser Head 344 5517B C D Laser Head 352 5517BL CL DL Laser Head 353 5519A B Laser Head 356 beam manipulators 387 dual beam beam splitter 363 Dynamic Range Agilent E1708A vs Agilent E1709A 720 E E1705A Fiber Optic Cable 705 709 719 E1706A Remote Sensor 705 E1706A Remoter Sensor 719 E1708A and E1709A differences 720 E1708A Remote Dynamic Receiver 705 E1709A Remote High Performance Receiver 714 E1826E One Axis Plane Mirror Interferometer Specifications 641 E1826E F G Single Axis Plane Mirror Interferometer 636 E1827A Two Axis Interferometer 650 E1827A Two Axis Interferometer Specifications 653 E1833x Bare Beam Splitter Specifications 378 E1837A Three Axis Interferometer
117. 58 Agilent 24399 Three Axis Interferometer 664 Agilent 24422B Three Axis Interferometer 669 RE Agilent Technologies 657 33 Agilent E1837A 24399A and Z4422B Three Axis Interferometers Description See Chapter 6 NGI Measurement Optics General Information in Volume of this manual for general description and alignment and mounting procedures The Agilent E1837A Agilent Z4399A and Agilent Z4422B Three Axis interferometers are described in this chapter All three interferometers use the compact monolithic interferometer MIF design The outputs of these interferometers are coupled to a 400 micron fiber with an ST connector and NA of 0 39 The Agilent E1837A Agilent Z4399A and Agilent Z4422B interferometers can be mounted using three screws in either the upright or hanging position Agilent E1837A Three Axis Vertical Beam Interferometer The Agilent E1837A Three Axis Interferometer is used for measurements of translation along or rotation around an axis of motion see figures 237 and 238 Figure 237 Agilent E1837A Three Axis Vertical Beam Interferometer 658 Laser and Optics User s Manual Vol II Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Figure 238 Agilent E1837A Three Axis Vertical Beam Interferometer beams shown Laser and Optics User s Manual Vol II 659 33 Agilent E1837A 24399A and Z4422B Three Axis Interferometers Agilent E1837A beam pattern spacing and labels
118. 6 resolution extension 0 15 nm using 1024 x resolution extension Angular pitch or See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular Thermal Drift due to Glass Path Imbalance Non linearity Error Output Efficiency Typical Worst case Measure Point Tolerance Input Beam Cone Angle IBCA Operating Temperature lt 10 nm C 1nm 65 50 0 15 mm lt 1 mrad 19 to 26 C Measurement and Reference Mirror Recommendations Reflectivity Flatness gt 92 2 20 1 Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A Laser and Optics User s Manual Vol II 643 31 Agilent E1826E F G One Axis Plane Mirror Interferometer 60 25 E LJ i E 7 v e o lt 17 75 Input Beam Q Primary Beam 47 mm Radius Figure 229 Agilent E1826F One Axis Plane Mirror Interferometer left t
119. 6A Plane Mirror Interferometer described in Chapter 20 of this manual this configuration requires one Agilent 10704A retroreflector The C01 10705A interferometer s receiver signal is separated by an Agilent 10700A or Agilent 10701A Beam Splitter Typical measurement mirror alignment requirements for the C01 10705A as function of distance are the same as those for the Agilent 10706A Plane Mirror Interferometer Agilent 10706A interferometer specifications are given in Chapter 20 of this manual 416 Laser and Optics User s Manual Vol Il Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector 19 Special Considerations Effect of optics on measurement direction sense The orientation and configuration of the interferometer affects the measurement direction sense The direction sense depends on which frequency is in the measurement path of the interferometer For example if f lower frequency is in the measurement path and f higher frequency is in the reference path and the optics are moving away from each other the fringe counts will be INCREASING Interchanging f and fo perhaps by rotating the interferometer 90 the measurement direction sense will change This rotation causes switching of frequencies in the measurement path Configuration effects The Agilent 10705A interferometer can be configured to turn the beam at right angles Be aware that doing this will cause the measurement direction sense to
120. 7 Mounting 417 Installation 418 Specifications and Characteristics 419 RE Agilent Technologies 413 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Description The Agilent 10705A Single Beam Interferometer see Figure 113 is intended for use in low mass or limited space applications This Interferometer is designed for use with the Agilent 10704A Retroreflector see Figure 113 The single beam interferometer is called that because the outgoing and returning beams are superimposed on each other giving the appearance of only one beam traveling between the interferometer and the retroreflector Functionally this interferometer operates like a linear interferometer but is preferred when space for optics and beam paths is limited The Agilent 10704A Retroreflector is a cube corner but is considerably smaller and lighter than the Agilent 10703A Retroreflector Agilent 10705A Agilent 10704A Single Beam Interferometer Retroreflector Figure 113 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector 414 Laser and Optics User s Manual Vol II Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector 19 When using a single beam interferometer the receiver is usually mounted perpendicular to the measurement beam and the interferometer held stationary An optical schematic diagram of this interferometer is shown in Figure 114 REFERENCE and MEASUREME
121. 8 Agilent 10774A Short Range Straightness Optics Agilent 10775A Long Range Straightness Optics Figure 210 Straightness optics The Agilent 10774A is available separately or as part of the Agilent 55283A Straightness Measurement Kit which also includes the Agilent 10776A Straightness Accessory Kit the Agilent 10772A Turning Mirror with Mount and the Agilent 10787A Case This chapter describes only the basic measurements using the Agilent 10774A and Agilent 10775A straightness optics For descriptions of other optics included in the Agilent 107764 kit see the Agilent 5529A 55292A Dynamic Calibrator Measurement Reference Guide Laser and Optics User s Manual Vol II Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 Squareness and Parallelism A squareness measurement consists of two perpendicular straightness measurements made from the same straightness reflector Perpendicularity is achieved using the Agilent 10777A Optical Square Squareness is calculated by adding or subtracting the slopes from each straightness measurement based on a right angle For details see the Agilent 5529A 55292A Dynamic Calibrator Measurement Reference Guide A parallelism measurement is similar to a squareness measurement except that it does not use an optical square A parallelism measurement consists of two straightness measurements made along the same axis from the same straightness reflector Para
122. 8A vs Agilent E1709A 720 AC DC ratio defined 716 light power relationship illustrated 715 accessories 10776A Straightness Accessory Kit 758 beam manipulator 762 cables 732 N1203C N1204C N1207C Beam Manipulators 762 accuracy considerations 337 adapter plate 10705A 080 418 770 10706A 080 431 449 adjustable mount 524 adjustable mounting hardware 726 adjustable mounts 361 726 adjuster height 727 Agilent 10719A C02 One Axis Differential Interferometer 510 Agilent 10721 01 Two Axis Differential Interferometer 534 Agilent 10780C F vs Agilent E1709A application replacement 720 power consumption 721 use of metal screws 721 Agilent 10780F Remote Receiver Specifications 704 Agilent 5517A indicators 341 Agilent 5517B BL C D DL FL Laser Head indicators 346 Agilent E1705A Fiber Optic Cable 705 709 719 Agilent E1706A Remote Sensor 705 719 Agilent E1708A Remote Dynamic Receiver Specifications 713 Agilent E1708A vs Agilent E1709A alignment requirements 720 DC light power 715 dynamic range 720 power requirements 721 retrofit issues 720 sensitivity 720 size 720 slew rate 720 technical enhancements 720 temperature sensitivities 720 use of scope probe 721 Agilent 10772A 618 Agilent 10776A 618 Agilent 5517B BL C D DL FL Laser Head 345 Agilent 55283A 618 alignment Agilent E1708A vs Agilent 1709 720 Autoreflection method 627 Gunsight method 627 alignment targets and alignment
123. A 15 Vdc 1V at less than 250 mA 15 Vdc at 136 mA Heat Dissipation 0 0 W for remote sensor 4 0 W typical for receiver 0 0 W for remote sensor 3 8 W typical for receiver 0 0 W for remote sensor 2 0 W typical for receiver Temperature Range 0 to 40 C operating Laser and Optics User s Manual Vol II 0 to 40 C operating 0 to 40 C operating 689 35 Receivers Table 77 Comparison of Agilent Laser Receiver families continued Characteristic Fiber Optic Cable Length E1709A Receiver Option 010 2m plastic Contact Agilent for longer fiber optic cables E1708A Receiver 2 m standard plastic Contact Agilent for longer fiber optic cables 10780C 10780F Receivers 2 m standard 10 m maximum Receiver body 190 g Option 010 Remote sensor with 2 m cable 26 g Receiver body 170 g Remote sensor with 2 m cable 26 g 136 g 10780C 126 g 10780F body 26 g remote sensor with 2 m cable Dimensions Height 78 1 mm 3 075 in Width 115 6 mm 4 552 in Depth 19 8 mm 0 780 in Height 78 1 mm 3 075 in Width 115 6 mm 4 552 in Depth 19 8 mm 0 780 in Height 38 1 mm 1 50 in Width 114 8 mm 4 52 in Depth 19 8 mm 0 78 in Dimensions receiver body mounting area 4 holes at corners of a rectangle 40 0 mm 1 575 in high 108 0 mm 4 250 in wide centered on receiver body centerline 4 holes at corners of a rectangle 40 0 mm
124. A and fp Reference Cube Corner o f Agilent 10703A B Retroreflector fataf Agilent 10702A Linear Interferometer LEGEND m Qm m m fg ta and fg Figure 105 Linear interferometer laser beam path Laser and Optics User s Manual Vol II 401 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 402 Differential measurements A differential measurement is one in which both the reference beam and the measurement beam travel to external reflectors either cube corners or mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of which may be moving Viewed another way this allows measuring the motion of one reflector relative to a reference datum elsewhere in the machine external to the interferometer itself This is unlike the typical interferometer configuration because usually the reference beam path length does not change in differential configurations it can Take care during design and layout of a differential measurement to avoid introduction of alignment errors thermal or mechanical instabilities and potential deadpath problems Both reflectors reference and measurement should be of the same type cube corner or plane mirror this minimizes thermal drift problems with ambient temperature changes To use an Agilent 10702A or Agilent 10766A interferometer in
125. ASUREMENT Top 2 Beams are Measurement Beams Bottom 2 Beams are Reference Beams See View B NOTES Measurement Beams 1 Yaw measurement is column referenced as aic linear measurements are and uses electronic PITCH MEASUREMENTS differencing to measure angle Pitch measure Agilent 10719A One Axis ment is not column referenced and uses optical Differential Interferometer Inverted differencing to measure angle 2 Inverted Agilent 10719A s for pitch permit all four input beams to be in one plane significantly reducing beam directing optics and installation complexity 3 Upper measurement point for pitch beams is in same horizontal plane as all linear measure ments simplifying stage metrology 4 Note 3 18 mm 0 125 inch height change in mounting the inverted Agilent 10719As Reference Beams 5 Required vertical dimension of stage mirror clear aperture is approximately 22 225 mm 0 875 inch Measurement Figure 173 Five axis system with Agilent 10719A and Agilent 10721A interferometers 516 Laser and Optics User s Manual Vol II Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 9 a Plate Ref REFERENCE PATH fA J Mirror Y Agilent 10719A One Axis ry Differential Interferometer A 2 _ fA E 7 From Laser p A Y 2 I Y 7 fA Y To Receiver Z Measurement Plate
126. Advanced Test Equipment Rentals www atecorp com 800 404 ATEC 2832 LN Established 1981 17 Beam Directing Optics Agilent 10707A Beam Bender The Agilent 10707A Beam Bender contains a 100 reflectance mirror which turns the direction of an incoming laser beam 90 degrees To preserve polarization see Preventing Depolarization on page 362 To preserve efficiency see Note on page 362 Agilent 10707A Beam Bender Figure 89 Agilent 10707A Beam Bender Agilent 10707A Beam Bender Specifications Dimensions See drawings below Weight 58 grams 2 1 ounces Materials Used Housing Stainless Steel Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Coatings Hard Dielectric Optical Efficiency Typical 99 Worst Case 98 372 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 4 40 0 15 Deep 2 Sides Center Line E 19 6 mm 0 77 Typ 6 32 UNC Thru Clearance For 4 or 2 5 mm 2 Places 19 6 mm 0 77 Typ Figure 90 Agilent 10707A Beam Bender dimensions Agilent 10725A 50 Beam Splitter and 10726A Beam Bender The Agilent 10725A 50 Beam Splitter and the Agilent 10726A Beam Bender are designed for use in a laser measurement system that includes an Agilent 10735A or a standard Agilent 10736A Three axis Interferometer or an Agilent 10736A 001 Three axis Interferometer with Beam Bender They are designed to handle the 9 mm beam from an Agi
127. Agilent interferometers in this case the required lens assembly is part of the Agilent 10737L R interferometer This simplifies user assembly since no optical alignment of the receiver is required The fiber optic cables from the receivers attach directly to the axis output apertures on the input face of the interferometer See figures Figure 195 and Figure 196 The Agilent 10737L R interferometers are based on the Agilent 10706B High Stability Plane Mirror Interferometer s design Figure 194 shows two views of an Agilent 10737L interferometer In addition to the Agilent 10706B components the interferometer includes the following assemblies The receiver assembly This can be removed during alignment using the 4 40 socket head cap screws The 4 40 button head screws hold the 0 100 inch thick cover plate and the receiver assembly parts in place do not try to loosen these screws or remove the plate The shear plate assembly This assembly is factory aligned and must not be loosened or removed The corner cube assembly This assembly is factory aligned to produce the required beam pattern Do not remove the corner cube assembly or loosen the screws holding the assembly in place Moving this assembly will change the output beam pattern Laser and Optics User s Manual Vol Il Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 1 Corner cube assembly Do not loosen or remove 2 Reference mirror or high stabili
128. Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Optical Resolution Linear Resolution Yaw Resolution Pitch and Roll Resolution Yaw Range Pitch and Roll Range Linear Range Operating Temperature Thermal Drift Coefficient Non linearity Error Weight Dimensions Materials Used Installation Measurement Plane Mirror Recommendations Optical Surface Quality 28 Agilent 10737L R Compact Three Axis Interferometer Specifications 4 158 2 nm 6 2 uin 5 nm using Agilent 108854 or Agilent 108954 electronics 0 6 nm using Agilent 10897A or Agilent 10898A electronics 0 35 urad 0 07 arc sec using Agilent 10885A or Agilent 10895A electronics 0 04 urad 0 01 arc sec using Agilent 10897A or Agilent 108984 electronics 0 7 0 14 arc sec using Agilent 10885A or Agilent 10895A electronics 0 1 rad 0 02 arc sec using Agilent 108974 or Agilent 108984 electronics 0 44 mrad 1 5 arc min 0 44 mrad 1 5 arc min 10 m 33 ft total for all three axes 0 40 C 17 23 C to ensure system non linearity specification Same as Agilent 10706B 1 for each axis 490 g 18 oz see Figure 204 on the next page Housing stainless steel and aluminum Optics optical grade glass Adhesives vacuum grade cyanoacrylate polarizer material Receiver inserts urethane foam acetal 1596 glass fill polyester Uses 3 mm beam available from Agilen 5517C 003 Requires thre
129. Agilent 10780A and Agilent 10780B models is the increased bandwidth and sensitivity of the Agilent 10780C to laser light Laser and Optics User s Manual Vol Il Receivers 35 Agilent 10780C Receiver Specifications Weight 136 grams 4 8 ounces Output Signal Dimensions see figure below Differential square wave at Doppler shifted split frequency Typical Power Requirements 15 volts at 136 mA 100 kHz to 7 2 MHz Heat Dissipation 2 0 W typical Electrical Cables Alignment Tolerances Agilent 10790A 5 m 15 2 ft Roll 3 degrees Agilent 10790B 10 m 30 5 ft Pitch 1 degree Agilent 10790C 20m 61 ft Yaw 1 degree Electrical cables for Agilent 10885A 10889B 10896B 10897C Maximum Sensitivity 1 5 uW 10898A or N1231A B axis board Agilent 10880 5 15 2 ft Factory adjusted to 5 0 uW can be adjusted to maximum sensitivity using procedures in the Agilent 10780C F Operating and Service PONE 109806 10 m 905 cnt Agilent 10880C 20m 61 ft Beam Diameter Beam Spacing 6 0 24 12 7 0 50 Y 1 iT Insulating Mounting Pads i 10780C RECEIVER Agilent Techn ologies il T 0 45 50 mm 114 8 mm 2 0 zx 4 52 Clearance hole 23 mm for M3 6 32 Screw ED 0 09 T yp 2 Places Use Only Nylon Mounting Screw HP 2360 0369 to void Ground Loop Figure 266 Agilent 1
130. Agilent N1250A B High Performance Receiver Cable The Agilent N1250A B Receiver Cable shown in Figure 288 is used to connect the measurement signal from an Agilent E1708A Receiver or Agilent E1709A Receiver to an Agilent 10889B PC Servo Axis Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Laser Board Figure 288 Agilent N1250A B High Performance Receiver Cable 742 Laser and Optics User s Manual Vol Il Accessories 36 Agilent N1251B High Performance Laser Head Cable The Agilent N1251B Laser Head Cable shown in Figure 289 is used to connect an Agilent 5517A B BL C D DL FL Laser Head to an Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Laser Board It has a DIN connector for connecting the laser head to the Agilent 10884B Power Supply Figure 289 Agilent N1251B High Performance Laser Head Cable Laser and Optics User s Manual Vol II 743 36 Accessories Agilent E1847A Laser Head Cable The Agilent E1847A Laser Head Cable shown in Figure 290 is used to connect a customer supplied 15V power supply to an Agilent 5517B BL C D DL FL Laser Head It has spade lugs 6 for connecting the laser head to a customer supplied power supply Figure 290 Agilent E1847A Laser Head Cable 744 Laser and Optics User s Manual Vol Il
131. Alignment Aid P N 10706 60001 Alignment Aid P N 10706 60202 Figure 158 Alignment Aids for the Agilent 10716A Interferometer Alignment Overview The alignment procedure is a five part process Alignment of the laser beam perpendicular to the plane mirror reflector using autoreflection Alignment of the Agilent 10716A Interferometer to the beam using a reflective gage block and autoreflection Realignment of the laser beam to correct for slight angular beam deviation caused by the interferometer Alignment of the reference reflector in the interferometer for minimum thermal drift and maximum signal strength e Installation of the Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver to properly receive the reference and measurement beams 488 Laser and Optics User s Manual Vol II Agilent 10716A High Resolution Interferometer 23 Alignment Procedure This alignment procedure is for the Standard Configuration with the laser beam entering the interferometer in aperture B The alignment procedure for the Turned Configuration is similar except it is more sensitive to angular alignment of the interferometer Either aperture A or B of the interferometer may be used as the input aperture The remaining aperture is the output 1 Select the small aperture on the laser head 2 The laser beam for each axis should be aligned perpendicular to the measurement mirror This is done by autor
132. Calibrator Board in the Agilent 5529A system Agilent 10882A 3 meters 9 8 feet Agilent 10882B 7 meters 23 0 feet Agilent 10882C 20 meters 65 6 feet High Performance Receiver Cable connects the measurement signal from the Agilent E1708A or Agilent E1709A Receiver to an Agilent 10897C 10898A or N1231A B axis board one required per receiver Agilent N1250A 5 meters 16 4 feet Agilent N1250B 10 meters 32 8 feet High Performance Laser Head Cable connects the Agilent 5517A B C D Laser Head to an Agilent 10897C 10898A or N1231A B axis board one required per system Agilent N1251B 7 meters 23 0 feet Fiber optic cables If you are replacing Agilent 10897 8 VME High Resolution Laser Axis Board s with the Agilent N1225A Four Channel High Resolution Laser Axis Board for VME the fiber optic cables may need to be replaced with cables that have ST connectors Refer to these Agilent product numbers E1705B XXX Plastic Vpin to ST fiber E1705E XXX Glass Vpin to ST fiber e E1705F XXX Glass ST to ST fiber Where XXX is the option number of the product and designates the nominal fiber length Table 83 lists the standard fiber lengths available Table 83 Standard fiber cable lengths 0 50 04 2 20 mm 0 mm 0 2 5 m 20 0 mm 734 Laser and Optics User s Manual Vol Il Table 83 Standard fiber cable lengths continued Option XXX Fiber Length 3m 20 mm
133. Laser and Optics User s Manual Vol II 463 21 Agilent 10706B High Stability Plane Mirror Interferometer Agilent 10706B Plane Mirror Interferometer Specifications Weight 323 grams 11 4 ounces Dimensions see figure below Materials Used Housing Stainless Steel Apertures Plastic Nylon Spacers Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency Typical 60 Worst Case Calculated 43 Thermal Drift Coefficient Change of indicated distance per degree C temperature change 0 04 micron C 1 6 pinch C typical Fundamental Optical Resolution 4 Non linearity Error 2 2 nm peak value PLANE MIRROR MEASUREMENT MIRROR RECOMMENDATIONS Reflectance 98 for 633 nanometers at normal incidence minimum 80 From Laser 12 7 mm 0 50 Beam Spacing ME 0 3 A Y z 9 Flatness Depending on the application and accuracy requirements of the application mirror flatness may range from A 4 to A 20 i e 0 16 to 0 03 meters 6 to 1 2 pinches NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Optical Surface Quality 60 40 per MIL 0 13830 Measurement or Reference
134. Laser and Optics User s Manual Vol II 507 24 Agilent 10717A Wavelength Tracker Agilent 10717A Wavelength Tracker Specifications and Characteristics Specifications describe the device s warranted performance Mounting Supplemental characteristics indicated by TYPICAL or NOMINAL are Three 10 32 UNF2A tapped holes hardware supplied intended to provide non warranted performance information useful in See drawi bel applying the device leh Dimensions see figure below Mounting Screw Torque 0 9 Newton meter 8 inch pounds Weight 1 7 kg 3 7 pounds Minimum Mounting Clearance Required Etalon Length 127mm 5 inches nominal 3 mm 0 12 inch around perimeter Optical Efficiency Calibration none required Typical 3696 NOTE If an Agilent Automatic Compensation Board is not Worst Case 2596 used system measurement repeatability may be calculated as Angular Adjustment Range at nominal position follows Pitch 1 R 127 0 028 ppm AT 0 06 ppm C Yaw 1 AP 0 002 ppm mm Hg Translational Adjustment Range at nominal position l tion i 5 Vertical 3 mm 0 12 inch electronics resolution in nm 5 nm for Agilent Automatic Compensation Boards Horizontal 3 mm 0 12 inch 79 25 mm 3 120 39 62 mm 1 560 30 10 mm 1 185 30 10 mm 1 185 A Mounting Holes
135. Laser and Optics User s Manual Vol Il Agilent E1826E F G One Axis Plane Mirror Interferometer 31 Figure 226 Agilent E1826G One Axis Plane Mirror Interferometer Figure 227 Agilent E1826G One Axis Plane Mirror Interferometer beams shown These interferometers are not meant to be the replacements for the Agilent 10706A B Different from the Agilent 10706A Bs these interferometers have ST connectors pre aligned at the factory so the customer needs only to connect the fibers that can be obtained at Agilent Either glass or plastic fibers can be used Contact Agilent for your requirements If an ST type bulk head feed through is necessary for connecting the fibers customers can use AMP s 504021 1 Fiber Optic Connectors ST Coupling Receptacle Laser and Optics User s Manual Vol II 639 31 Agilent E1826E F G One Axis Plane Mirror Interferometer Available Options Table 76 lists the options that are available for the Agilent E1826E F G Interferometer Table 76 Available options for Agilent E1826E F G Agilent Product Numbers 082 083 Product Name 082 With installation cover standard configuration 083 Without installation cover 090 091 090 With reference mirror installed standard configuration 091 Without reference mirror installed 070 071 640 070 Invar base plate standard configuration 071 SS416 base plate Laser and Optics User s Manual Vol Il Agilent E1826E F G One Axis Pl
136. Mirror Pitch Yaw Depends on distance between interferometer and plane mirror Typical mirror pitch yaw angles are 6 arc minutes for 152mm 6 inches 3 arc minutes for 305 mm 12 inches 1 5 arc minutes for 508 mm 20 inches Misalignment of interferometer to measurement mirror will degrade the Thermal Drift Coefficient To Plane Mirror 28 5 mm 1 12 id r 14 mm ren QU 53 mm A X N 381mm 2 09 32 mm UR J s 1 50 1 26 5 2 J _ gt NA 0 D S 333 mm 1 31 Aperture 20 8 mm Dia 4x Drilled For Clearance 0 82 38 1 mm gt 1 50 Of 4 40 Screw and Tapped 6 32 UNC 2B x 250 Deep 4x This Side and 4x Far Side Figure 139 Agilent 10706B Plane Mirror Interferometer dimensions 464 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 22 Agilent 10715A Differential Interferometer Description 466 Special Considerations Configuration Effects 469 Mounting 471 Installation and Alignment 472 Specifications and Characteristics 479 RE Agilent Technologies 465 22 Agilent 10715A Differential Interferometer Description 466 The Agilent 10715A Differential Interferometer see Figure 140 allows differential measurements to be made between two plane mirrors the reference plane mirror and the measurement plane mirror The reference mirror is
137. NN 22 fg ms 7 From gt um m pres Z Laser dor OF axis 2 ee ey 4 59 m m A Axis 1 f gx244 Axis 3 um m um ee ee Z Axis 2 f gt24 2 i 1 2 Axis 3 f p 24 AR mena ninm Plate NOTE Because the Measurement A A A A A A mirror may have a combination of 8 8 8 83 5 displacement pitch and yaw motions y y y v Y the Measurement Axes may have MII ie cee Measurement different Df values as shown Mirror REFERENCE PATH fA Agilent 10735A Agilent 10736A and Agilent 10736A 001 Y1 IY bt sta Interferometers 7 Axis 1 lt 4 5 gt 4 9 fA From Laser Axis 42 Y gt C f Axis 1 f A NEZ Axis 2 f A Axis 3 lt a SS gt Axis 3 f A Plate Vie oe Measurement Mirror COMPOSITE f A and f p A E E Agilent 10735A and Agilent 10736A Yl lY lY Reference Three Axis Interferometers AN JAN Mirror Axis 1 lt lt gt 2 lt gt 2 Lr 7 Laser P Axis 2 lt gt Axis 3 lt amp pay Axis 1 fgt2 Afy fA ud 1A Axis 2 fgt24f2 fA M NUM Am i Axis 3 fgt2Afy fA AALAAA x B LEGEND fp m Qu um m fg f F Rounded corners are used to help you trace paths Figure 188A Agilent Three Axis interferometers beam paths 56
138. NT PATHS fA and Reference Cube corner Agilent 10705A Single Beam Interferometer Quarter wave Plates obs Agilent 10704A Retroreflector fA fat Af fA From pe J N Laser Head mm yY 7 Y y Af To Receiver LEGEND lt P fa m Qm m m cm E ig lt f r Rounded corners are used to help you trace paths Figure 114 Single Beam Interferometer laser beam path Laser beam path A polarizing beam splitter reflects fp to the reference cube corner and transmits f to the Agilent 10704A Retroreflector Figure 114 The return path is superimposes on the outgoing path Since both beams leaving the beam splitter pass through a quarter wave plate the returning polarizations are rotated through 90 This causes fp to be transmitted and f Af to be reflected so that they are directed coaxially to the receiver along a path perpendicular to the input beam Rotating the interferometer 90 switches which optical frequency is in the measurement path and thus changes the direction sense Laser and Optics User s Manual Vol II 415 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Differential measurements A differential measurement is one in which both the reference beam and the measurement beam travel to external reflectors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either o
139. Number 10780 40009 supplied with the receiver see Chapter 35 Receivers in this manual For the wavelength tracker this target is used only to align the receiver or its sensor head to the incident beam 506 Laser and Optics User s Manual Vol 11 Agilent 10717A Wavelength Tracker 24 17 To check the final optical alignment of the Wavelength Tracking Compensation system place a rectangular gage block over the lens of the receiver and pressed against the receiver s case or its sensor head s input face and autoreflect the beam back toward the differential interferometer of the wavelength tracker When the receiver or its sensor head is mounted properly which occurs when the beam enters the receiver s or sensor head s input aperture parallel to its housing the autoreflected beam will be coincident on itself back to the laser head Refer to the receiver alignment procedures in Chapter 35 Receivers in this manual for more receiver alignment information After optical alignment of the receiver the gain of the receiver is adjusted This procedure ensures that the leakage signal from one of the beams isn t sufficient to turn on the receiver The following procedure sets the gain just below the optical leakage threshold 18 Connect a fast responding voltmeter to the test pin on the receiver 19 Block one of the two beams incident on the front etalon mirror see Figure 167 with a piece of paper Be sure to bloc
140. RROR Reference Beam x Measurement Beam m X IF Figure 148 Differential interferometer as viewed from plane mirrors 7 Place the alignment aid over the output aperture plane mirror converter of the Differential Interferometer such that the beam going to the measurement mirror which becomes the measurement beam passes through the alignment target See Figure 149 476 Laser and Optics User s Manual Vol II Agilent 10715A Differential Interferometer 22 AGILENT 10715A WITH ALIGNMENT AID 4 Zor Alignment Aid NM b Part Number 10706 60001 Measurement Beam Figure 149 Agilent 10715A with alignment aid attached over measurement beam 8 This beam should clear the reference mirror and strike the measurement mirror Select the small aperture on the front turret of the laser head Adjust the laser beam until the beam is autoreflected back through the small aperture of the laser head This ensures that the beam is perpendicular to the measurement mirror This step requires pitching and yawing the laser head beam benders or beam splitters depending on optical layout Steps 4 and 5 should be performed after each adjustment to prevent the interferometer from clipping the laser beam 9 Remove the alignment aid Laser measurement beams should now exit the interferometer aperture in diametrically opposite positions See Figure 150 AGILENT 10715A VIEWED FROM PLANE MIRRORS WITH MEASUREMENT BEAMS ALIGNED Measurement B
141. Small positional errors do not impair the measurement accuracy provided they are fixed and do not change during the measurement With these positional accuracy goals in mind there are two recommended approaches to designing the mounting system Create an accurate fixed mounting platform which predetermines the location of each interferometer using reference surfaces or Create an adjustable mount with adjustments to dial in the positional accuracy after each interferometer is installed Fixed Mounting Platform If you use the first approach the best design for a mounting platform is to make it kinematic Kinematic means that all 6 degrees of freedom are singly and unambiguously restricted It is best to use a locating plane a locating line and a locating point The locating plane will be the surface to which the top or the bottom of the interferometer is bolted primary datum The locating line should be a 2 point contact or rail which aligns the front face of the interferometer secondary datum The locating point should be a 1 point contact or pad which constrains side to side translations of the interferometer tertiary datum To install the interferometer it should be firmly pressed against its locating datums while the mounting screws are torqued down If the platform is made with the above mentioned accuracy this mounting method can completely eliminate the need to adjust or align the interferometers during installation
142. Splitter nominally reflects 66 of the laser beam intensity perpendicular to the original beam direction while the remaining 34 continues through the optic The Agilent N1208G 60 Bare Beam Splitter nominally reflects 60 of the laser beam intensity perpendicular to the original beam direction while the remaining 40 continues through the optic To preserve polarization see Preventing Depolarization on page 362 To preserve efficiency see Note on page 362 Laser and Optics User s Manual Vol II Beam Directing Optics 17 Agilent N1208C D E F G Bare Beam Splitter Specifications Use Split a laser beam having a diameter up to 9 mm nominal This beam splitter requires a user supplied mount This optic can be made vacuum compatible Dimensions See drawings below Weight 2 grams 0 07 ounce Materials Used Optics Fused silica Coatings Hard Dielectric Optical Efficiency Reflective path Transmitted path N1208C 33 6 66 6 N1208D 40 6 56 6 N1208E 50 6 49 6 N1208F 66 6 33 6 N1208G 60 6 39 6 All edges beveled Minimum clear aperture 045 x 0 35 mm central elipse 15mm 21mm 6 7 mm 01 Figure 97 Agilent N1208C D E F G Bare Beam Splitter dimensions Laser and Optics User s Manual Vol II 389 17 Beam Directing Optics Agilent N1209A Risley Prism Translator RPT Manipulator 390 Overview The purpose of the Agilent N1209A RPT Manipulator see Fig
143. T VIEW for input or output The Sensor Head can be installed in either orientation on the output Aperture Figure 175 Agilent 10719A Interferometer Reference and Measurement beams Mounting pins on the interferometer eliminate the need for any user alignment of the sensor head The sensor head may be installed on the mounting pins either right side up or upside down whichever is best for your measurement situation Use 4 40 x 1 inch screws to fasten the sensor head to the interferometer Spacing to beam directing optic The recommended minimum spacing between the interferometer and its beam directing optic is 63 5 mm 2 50 inches This spacing will provide the minimum clearance for the fiber optic cable when the Agilent 10780F Remote Receiver is used Laser and Optics User s Manual Vol II 519 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 520 Input and output apertures The Agilent 10719A interferometer has two apertures which may be used interchangeably as the input or output apertures Each aperture is equipped with mounting pins for the Agilent 10780F receiver s fiber optic sensor head therefore either aperture can be used for the output beam Direction sense The Agilent 10719A interferometer direction sense depends fundamentally on which laser frequency is in its measurement path This is affected by the mounting orientations of both the interferometer and the laser head In most cases
144. T fBO2 7 Receiver lt amp lt lt m m um uu m mr Beam Divider fA X2 fg X2 2Af Ss V Mirror fg X2 LY i fg X1 Plate LEGEND EM M fy Qum um gt fg lt gt f and f r Rounded corners are used to help you trace paths Figure 180 Agilent 10721A Two Axis Differential Interferometer laser beam path Laser and Optics User s Manual Vol II 539 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Special Considerations Laser beam power consideration When you are working with an application that has more than one measurement axis make sure that you provide enough laser beam power to the Agilent 10721A so it can drive both receivers connected to it The method for calculating this is described under the Beam Path Loss Computation section in Chapter 3 System Design Considerations in Volume I of this manual In addition you should try to balance the available net power after all losses have been computed so all receivers in the application will receive nearly equal power For example in an application using both an Agilent 10719A interferometer and an Agilent 10721A interferometer use a 33 beam splitter to send one third of the laser power to the Agilent 10719A interferometer which has one receiver and two thirds of the laser power to the Agilent 10721A interferometer which has two receivers Configuration an
145. THS Mirrors Straightness Reflector I Mirror 1 fAtMA fpt fp of n1 for one plane of polarization and n2 for the other plane Wedges n2 1 have the opposite property Figure 211 Straightness optics beam paths In practice the interferometer angles can vary due to manufacturing tolerances Therefore the result must be multiplied by the calibration factor K which is stamped on each interferometer The final result is D 36KX for short range optics and D 360KX for long range optics Small pitch yaw or roll motions of the interferometer do not create a path difference and therefore do not affect the measurement accuracy This is an advantage of using the interferometer as the moving optic The two return beams from the Straightness Reflector combine in the prism at the same point where the beam from the laser head was split The combined beam is returned along the same path as the laser head s exit beam Laser and Optics User s Manual Vol II Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 Installation and Alignment Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application E Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System
146. Tighten the front mounting screw Figure 167 until slight resistance is sensed 5 Place a piece of translucent tape over the differential interferometer s A input aperture see Figure 166 Flatten the tape tightly against the input A aperture to produce a high resolution outline of the input aperture You should see a well defined laser pattern on the tape 504 Laser and Optics User s Manual Vol II Agilent 10717A Wavelength Tracker 24 6 Rotate the vertical translator adjustment screw see Figure 167 until the input beam is vertically centered about the input aperture At the same time move the tracker horizontally to center the laser beam horizontally 7 Tighten the front mounting screw see Figure 167 finger tight when the laser beam is centered on the input aperture 8 Remove the translucent tape from the differential interferometer input aperture 9 Install the quarter waveplate alignment aid so the primary measurement beam passes through the hole in it see Figure 168 Standard input aperture for the wavelength tracker is A positive sense If the input beam goes to aperture B the direction sense changes negative sense See Special Considerations section in this chapter and Table 74 for wavelength tracker direction sense change details 10 Select the small aperture of the laser head 11 Rotate the pitch adjustment screw see Figure 167 until the laser beam autoreflected back to the laser head is
147. Vacuum Grade Optical Efficiency interferometer combination plus remote Agilent 10767A Retroreflector Typical 73 Worst Case 69 M3x0 5 d qiu et de 24 Places 40 0 mm 30 0 1 57 1 18 zs RES 30 0 mm 1 18 65 0 mm 2 56 Note Dotted outline shows possible Agilent 10767A retroreflector mounting positions Figure 111 Agilent 10766A Linear Interferometer dimensions 410 Laser and Optics User s Manual Vol Il Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Agilent 10767A Retroreflector Specifications Dimensions see figure below Weight 224 grams 7 9 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Captive Screw i 2 Places M3x0 5 25 0 mm 4 Places 0 98 20 0 mm Aperture 0 79 Dia 30 0 mm 1 18 lt gt 30 0 mm 1 18 Figure 112 Agilent 10767A Linear Retroreflector dimensions Laser and Optics User s Manual Vol II 411 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 412 Laser and Optics User s Manual Vol 11 Agilent Laser and Optics User s Manual Volume II 13 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Description 414 Special Considerations 41
148. YVATD US LNAWLSNFAV MYA 0 09 Figure 99 Agilent N1209A RPT manipulator dimensions Laser and Optics User s Manual Vol 11 394 Agilent Laser and Optics User s Manual Volume II 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Introduction 396 Description 396 Laser Beam Path 401 Special Considerations 403 Mounting 404 Installation 405 Specifications and Characteristics 406 RE Agilent Technologies s 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Introduction This chapter describes the Agilent 10702A Linear Interferometer including the Agilent 10702A 001 Linear Interferometer with Windows the Agilent 10703A Retroreflector the Agilent 10766A Linear Interferometer the Agilent 10767A Retroreflector use of the Agilent 10722A Plane Mirror Converter e use of the Agilent 10723A High Stability Adapter Description The Agilent 10702A Linear Interferometer see Figure 100 and the Agilent 10766A Linear Interferometer are intended for general purpose applications Designed for use with a separate cube corner reflector these products are paired with the Agilent 10703A Retroreflector see Figure 100 or the Agilent 10767A Retroreflector see Figure 103 respectively Agilent 10702A Agilent 10703A Linear Interferometer Retroreflector Agilent 10702A 001 Linear Interferomete
149. a 4 40 x 25 Inch Deep 8 Places Figure 108 Agilent 10702A 001 Linear Interferometer with Windows dimensions 408 Laser and Optics User s Manual Vol II Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Agilent 10703A Retroreflector Specifications Dimensions see figure below Weight 41 5 grams 1 5 ounces Materials Used Housing Stainless Steel 416 Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade 20 3 mm Aperture 0 80 Dia 37 6 mm 28 5 mm 1 48 Dia 1 12 Dia 2 5 mm e 0 12 0 10 33 3 mm 23 9 mm 1 31 0 94 Bolt Circle Figure 109 Agilent 10703A Retroreflector dimensions Agilent 10713B 1 Inch Cube Corner Specifications Dimensions See drawings below Weight 11 4 grams 0 4 ounces Nodal Point Depth 12 57 mm 0 495 inch 0 00 25 40 0 25 mm 1 000 MU Dia 22 86 mm 0 900 Dia min Clear Aperture 0 00 19 1 0 76 mm 000 750 030 Figure 110 Agilent 10713B 1 Inch Cube Corner no housing dimensions Laser and Optics User s Manual Vol II 409 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Agilent 10766A Linear Interferometer Specifications Dimensions see figure below Weight 312 grams 11 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility
150. a horizontal surface AP Pitch 5 C itcn aT u p AY Y 0 5 urad per C aw AT u p Drift of beam steering angle can occur in the presence of thermal gradients in the Manipulator assembly This drift is transitory and alignment is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housin Beam angle steering alignment is recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly i e AT At 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable misalignment due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x 108 C provided the feet are secured with the specified bolt torque value Laser and Optics User s Manual Vol II 385 17 386 Beam Directing Optics Resonant Frequencies Ball Spring Suspension The laser beam Manipulator comprises a very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in fin
151. accessories Its purpose is to facilitate vertical straightness measurements in calibrator applications Refer to the Agilent 5529A 55292A Dynamic Calibrator Measurement Reference Guide Agilent manual p n 10747 90051 for application information p n 10776 20022 2 p n 10776 20010 S CK p n 10776 20006 p n 10776 67001 i gt 10776 67002 OU B tn p n 10768 20215 pin 10776 20008 p n 10776 67003 Agilent 10776A Straightness Accessory Figure 303 Agilent 10776A Straightness Accessory Kit 758 Laser and Optics User s Manual Vol 11 Accessories 36 Agilent 10776 67001 Straightness Retroreflector Specifications Dimensions see figure below Weight 374 grams 13 2 ounces Materials Used Housing Aluminum Optics Optical Grade Glass Optical Efficiency 80 Worst Case 86 2 mm 3 39 Aperture Dia 63 5 mm 76 2 mm 2 5 3 00 Clears M3 x 0 5 2 Places Figure 304 Agilent 10776 67001 Straightness Retroreflector dimensions Laser and Optics User s Manual Vol II a M10 x 1 5 759 36 Accessories Agilent 10777A Optical Square The Agilent 10777A Optical Square see Figure 305 directs an output beam at precisely 90 degrees to an input beam It is used to measure the squareness of axes during laser calibration of a machine tool The Agilent 10777A Optical Square is used in specialized application
152. acy requirements demand it mirror flatness might be calibrated scanned and Stored in the system controller to be used as a correction factor Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics 10885A 10895A or X256 resolution extension electronics 10897C 108984 Angular range for this specification is the maximum angle between the measurement mirror and the interferometer for a 6 axis system Both angles either pitch and yaw or roll and yaw can be at the angular limit concurrently Laser and Optics User s Manual Vol 1 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 203 50 mm 8 01 rm 44 3 mm 1 74 63 96 31 18 mm 251 gt lt 2X 15 0 mm 0 59 0 31 B X B 7 0 mm 105 0 mm 0 27 4 13 88 5 mm 3 48 x Y 2X 11 0 mm gt L 4x 5 8 n tax 11 0 mm 0 43 0 228 0 43 179 mm 5 Bottom View This surface is recessed from Datum A by 0 5 mm 0 02 Figure
153. adjustment therefore one of the two mirrors must provide the second Laser and Optics User s Manual Vol II 543 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers In a typical lithography application the reference mirror will usually be stationary that is mounted to the optical column so it is often the convenient choice for attaching to an adjustable mount Whether mounted with adjustment capability or not the mirrors must be held rigidly and stably once they are installed Choose your mounting method with care to avoid introducing mounting stresses which deform the mirrors surface flatness Adhesives can be used successfully but beware of any stress which may be introduced during curing Your mounting method should also minimize thermal expansion effects which could displace the mirrors and give false displacement or rotation measurements Many methods exist for mounting optics with low stress and high thermal stability For additional information a useful introductory article is The Optic As A Free Body Photonics Spectra Aug 1985 pp 49 59 Also textbooks on opto mechanical design can provide more information 544 Laser and Optics User s Manual Vol 1 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 Mounting Vibration isolation Agilent 10721A interferometers are inherently less susceptible to vibration effects than some other interferometers The stability of
154. aids 747 angular interferometer 10770A 608 angular measurements 536 angular reflector 10771A 608 application 380 applications general purpose 396 automatic tuning and warmup period 338 Autoreflection method of alignment 627 B ball and spring suspension 381 382 bare beam splitters E1833x bare beam 377 N1208C D E F G 388 beam bender 10707A 372 10726A 373 10726A Beam Bender 373 N1204C Precision Horizontal 383 N1207C Precision Vertical 385 beam bender specific purpose 379 beam manipulator N1203C 378 N1204C 378 N1207C 378 beam manipulator accessories 762 beam manipulator dimensions 387 beam manipulator feet 380 beam manipulators description of 378 beam path 401 beam shutters 338 beam splitter 375 10700A 33 366 10700B 4 369 10700C 15 369 10701A 50 366 10725A 50 373 10725B 4 375 376 10725C 15 376 E1833x 378 N1208C 33 389 N1208C D E F G bare 388 N1208D 40 389 N1208E 50 389 N1208F 66 389 N1208G 60 389 beam translator N1203C Precision 381 beam translator specific purpose 379 beam bending optics 358 beam directing optics 358 beam splitting optics 358 C cable 10790A B C Receiver 736 10791A B C Receiver 737 10880A B C Receiver 738 10881A B C Laser Head 739 10881D E F Laser Head 740 10882A B C Laser Head 741 E1847A Laser Head 744 E1848A Laser Head 745 E1848B Laser Head 746 fiber optic 734 laser head for power only 73
155. al Vol II 709 35 Receivers See Figure 79 for fiber optic cable characteristics that require special handling and consideration for installation and operation Table 79 Fiber optic cable considerations Attribute Description comment etc Attenuation Normal cable attenuation is covered by the Sensitivity section of the Specifications in Appendix A Attenuation due to environmental changes is covered in the information below Temperature Sensitivity The fiber optic cable is relatively insensitive to temperature changes The only characteristic that is affected is the cable attenuation which changes only 2 to 3 percent from 0 to 50 degrees C Note that measurement accuracy is unaffected by amplitude variations 2 aj e i 0 e Sp el Ni sj When the cable is flexed continuously around a small radius the cable will develop permanent attenuation The attenuation increases as the flexing continues Using a larger bend radius allows a considerable increase in lifetime The lifetime specification is 1000 cycles with a 90 degree bend around a 10 millimeter 0 4 inch radius In tests using a 75 millimeter 3 0 inch bend radius the cables survived more than 260 000 cycles of bending with no increase of signal attenuation Cables in permanent installations should not have bends less than 35 millimeters 1 4 inches radius If the cable must flex rep
156. al assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the assembly is at 3 5 kHz which is the Ball itself The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Mirror Spring Suspension The Mirror is held against three mounting pads machined into the Ball by spring forces opposite the pads This spring mass system is not free to vibrate unless the Mirror is separated from the contact with pads It requires a shock load of 280 g far in excess of the shock damage threshold to separate the Mirror from the Ball Thus it is not possible in practice to excite a resonance Note The calculated resonance for the Mirror Spring system the ball were free to oscillate is 340 Hz Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignment of the Ball Mirror or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment Recommended Mounting Screws Four screws M5x 20 long Alloy Steel Grade 12 9 Seating Torque is 5 N m if Cadmium plated or 6 5 N
157. al values are Flatness Depending on the application and accuracy requirements of 6 arc minutes for 152 mm 6 inches the application mirror flatness may range from A 4 to 20 i e 0 16 3 arc minutes for 305 mm 12 inches to 0 03 meters 6 to 1 2 pinches 1 5 arc minutes for 508 mm 20 inches To Plane Mirror From Laser Beam Spacing 12 7 mm 0 50 gt 3 AM V 3 To Receiver 28 5 mm PER 55 1 12 1 mm gt i 2 05 14 mm 0 55 38 1 P 32 mm 28 5 mm E 85 9 1 50 Be H 1 26 1 12 3 38 5 Aperture Dia Eci 20 8 mm 0 82 Y 33 3 mm __ 4x Drilled For Clearance 1 31 492mm of 4 40 Screw and tapped lt 38 1mm 1 26 6 32 UNC 2B x 250 deep 1 50 4x this side and 4x far side Figure 127 Agilent 10706A Plane Mirror Interferometer dimensions Laser and Optics User s Manual Vol II 439 20 Agilent 10706A Plane Mirror Interferometer Agilent 10722A Plane Mirror Converter Specifications Weight 34 3 grams 1 2 ounces Dimensions see figure below Materials Used Housing 416 Stainless Steel Optics Optical Grade Glass Clear Aperture 0 900 in 22 9mm Thru 0 90 Dia 28 5 mm 37 6 mm 3 0 mm 1 12 Dia 1 48 Dia pa on 0 12 2 PLS 32 7 mm m 1 29 lt E Bolt Circle 13 97 mm 0 10 0 55 Figure 128 Agilent 10722A Plane Mirror Converter dime
158. alignment targets are shown in Figure 294 of Chapter 36 Accessories in this manual The alignment target attaches at the receiver lens and helps align the receiver to the center of the incident beam It is also used to adjust the spacing between the beam going to the interferometer and the return beam incident on the receiver The Agilent Part Number for the standard Alignment Target for the Agilent 10780C Receiver is 10780 40003 The alignment target for use with an Agilent 10780F Remote Receiver having a 9 mm lens is Agilent Part Number 10780 40009 Principle The receiver is aligned by moving it and rotating it relative to the beam axis Receiver alignment is performed during the optical system alignment The receiver is moved to center the incident beam on its input lens The receiver photodetector only measures the overlapping portion of the laser beams For maximum signal strength the interferometer and retroreflector are aligned so the reference beam from the interferometer and the measurement beam from the retroreflector exactly overlap upon recombination These recombined laser beams then enter the receiver at the center of its input lens From Figure 264 it is clear that if the recombined laser beams entering the receiver are not centered on the photodetector measurement signal loss will occur If the interferometer or the retroreflector is misaligned Figure 264 the reference and measurement beams no longer complet
159. anation of angular resolution Thermal Drift due to Glass Path Imbalance lt 10nm C Non linearity Error 1nm Measure Point Tolerance Mean 0 15 mm Deviation 0 05 mm Input Beam Cone Angle lt 1 mrad IBCA Beam Parallelism See Figure 259 on page 683 Axis 1 Axis 2 25 urad Axis 2 Axis 4 25 urad Axis 1 Axis 3 lt 25 urad Axis 3 Axis 4 lt 25 urad Axis 3 Axis 5 lt 100 urad Optical Efficiency input power axis output power Typical for Axis 5 796 Worst Case for Axis 5 596 Typical for all axes except 10 Axis 5 Worst Case for all axes 7 except Axis 5 Operating Temperature Range 19 to 26 C Measurement and Reference Mirror Recommendations Reflectivity Flatness gt 92 A 20 Interferometer allows 7 5 mm 1 e2 Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N12254A 3 See Measure Point Tolerance in Chapter 6 in Volume of this manual for a description of these tolerances Beam Parallelism is specified between primary beams See Figure 259 on page 683 684 Las
160. ane Mirror Interferometer 31 Agilent E1826E One Axis Plane Mirror Interferometer Specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Natural Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear 0 40 kg 89 1 5 See Figure 228 on page 642 See Figure 231 on page 647 Invar Option 070 Passivated 416 Stainless Steel Option 071 1 5 x 10 mm mm C Invar 9 9 x 10 mm mm C SS416 BK 7 1 kHz 3 x Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible M4 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension Angular pitch or See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular resolution Thermal Drift due to Glass Path Imbalance lt 10 nm C Non linearity Error 1nm Output Efficiency Typical 65 Worst case 50 Measure Point Tolerance 0 15 mm Input Beam Cone Angle 1 mrad IBCA Operating Temperature 19 to 26 C Measurement and Reference Mirror Recommendations gt 92 A 20 Reflectivity Flatness Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be u
161. ane Mirror Interferometer Specifications 643 Agilent E1826G One Axis Plane Mirror Interferometer Specifications 645 E e eo ad Agilent Technologies 635 31 Agilent E1826E F G One Axis Plane Mirror Interferometer Description 636 See Chapter 6 NGI Measurement Optics General Information in Volume of this manual for general description and alignment and mounting procedures The Agilent E1826E F G One Axis Plane Mirror Interferometer provides one measurement displacement The Agilent E1826E interferometer has a right turn configuration design see figures 222 and 223 The Agilent E1826F interferometer has a left turn configuration design see figures 224 and 225 The Agilent E1826G interferometer has a straight through configuration design see figures 226 and 227 The Agilent E1826E F G interferometer can be mounted using three screws in either the upright or hanging position Laser and Optics User s Manual Vol Il Agilent E1826E F G One Axis Plane Mirror Interferometer 31 Figure 222 Agilent E1826E One Axis Plane Mirror Interferometer Figure 223 Agilent E1826E One Axis Plane Mirror Interferometer beams shown Laser and Optics User s Manual Vol II 637 31 Agilent E1826E F G One Axis Plane Mirror Interferometer Figure 224 Agilent E1826F One Axis Plane Mirror Interferometer Figure 225 Agilent E1826F One Axis Plane Mirror Interferometer beams shown 638
162. angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A 3 See Measure Point Tolerance in Chapter 6 in Volume of this manual for a description of these tolerances 4 Beam Parallelism is specified between primary beams See Figure 254 on page 678 Laser and Optics User s Manual Vol II 679 34 Agilent Z4420B and Agilent Z4421B Five Axis Interferometers Input Beam e Primary Beam secondary Beam Figure 255 Agilent 24420B Five Axis Interferometer dimensions 680 Laser and Optics User s Manual Vol Il Agilent Z4420B and Agilent Z4421B Five Axis Interferometers 34 Agilent Z4420B glass dimensions Figure 256 Agilent 24420B glass dimensions Laser and Optics User s Manual Vol II 681 34 Agilent Z4420B and Agilent Z4421B Five Axis Interferometers Agilent 24421 Five Axis Interferometer The Agilent Z4421B Five Axis Interferometer produces a five axis set of beams used for measurements of translation along or rotation around an axis of motion see figures 257 and 258 It differs from the Agilent Z4420B in that the beams closest to the base are centered horizontally in the beam pattern Figure 257 Agilent 24421B Five Axis Interferometer Figure 258 Agilent 244
163. anical 380 thermal 380 stability pointing 339 straightness accessory kit 618 straightness measurement kit 618 straightness measurement optics 618 10774A 618 10775A 618 T temperature sensitivities Agilent E1708A vs Agilent E1709A 720 thermal equilibrium 339 thermal stability 380 thermal stabilization 338 339 three axis interferometer 10735A Three Axis Interferometer 556 Agilent 10736A Three Axis Interferometer 556 E1837A 658 Z4399A 658 Z4422B 658 turning mirror with mount 618 two axis differential interferometer 534 two axis interferometer E1827A 650 V vacuum applications beam directing optics 361 vibration isolation 338 W warm up period 338 warm up laser head 339 Index wavelength of light from the laser head 337 wavelength tracker 10717A 496 Z Z4399A Three Axis Interferometer 658 74399 Three Axis Interferometer specifications 666 Z4420B Five Axis Interferometer 676 Z4420B Five Axis Interferometer specifications 679 Z4421B Five Axis Interferometer 676 Z4421B Five Axis Interferometer specifications 684 Z4422B Three Axis Interferometer 658 Z4422B Three Axis Interferometer specifications 671 773 Index 774 Laser and Optics User s Manual Vol 11 Agilent Technologies Service and Support Contacting Agilent Technologies For more information about Agilent test and measurement products applications and services visit our web site at http
164. ar Aperture Aperture B Y Mirror CREE Mirror To Agilent fa 7 7 Receiver lt lt q Zi From Laser gt gt A Head Vg lt f ETALON X M4 Plate Fixed Optical Path Agilent 10715A Differential Interferometer Top View Agilent 10717A Wavelength Tracker gt S MEASUREMENT PATH fp Aperture A Aperture B i Eran 2 4 Plate A y Miror h Mirror Em ll fg 7 7 f m E P amaram To Agilent Receiver lt i ig um um um m m m m From Laser m m um um m m Mead m m m m 29 d K fg m mm um A Y T ZA P4 a v ETALON Plate a y E Fixed Optical Path di Agilent 10715A Differential Interferometer Top View Agilent 10717A Wavelength Tracker COMPOSITE fA and fp 4 Plat Aperture A Aperture B r IE T Plate Front Rear A Y y _______ Mirror To Agilent a M fa 7 Receiver lt amp lt 4 Uj f From Laser 5 gt Z lt 4 ob Wine a sil fa A ZA vVBWA ETALON Plate Fixed Optical Path i Agilent 10715A Differential Interferometer Top View Agilent 10717A Wavelength Tracker LEGEND p gt fy m um mm m p ig lt gt fg f r Rounded corners are used to help you tra
165. ar and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A Laser and Optics User s Manual Vol Il Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 13 13 13 30 25 20 29 Input Beam 106 Ww 129 Figure 245 Agilent 24399A Three Axis Interferometer dimensions Laser and Optics User s Manual Vol II 667 33 Agilent E1837A Z4399A and 24422B Three Axis Interferometers Agilent Z4399A glass dimensions 56 5 Figure 246 Z4399A glass dimensions 668 Laser and Optics User s Manual Vol Il Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Agilent Z4422B Three Axis Interferometer The Agilent Z4422B Three Axis Interferometer produces a three axis set of beams used for measurements of translation along or rotation around an axis of motion see figures 247 and 248 Figure 247 Agilent 24422B Three Axis Interferometer Figure 248 Agilent 24422B Three Axis Interferometer beams shown Laser and Optics User s Manual Vol II 669 33 Agilent E1837A Z4399A and 2442
166. asurement beam travel to external mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of which may be moving Viewed another way this allows measuring the motion of one reflector relative to a reference datum elsewhere in the machine external to the interferometer itself This is unlike the typical interferometer configuration because usually the reference beam path length does not change in differential configurations it can For more information about differential measurements see Chapter 3 System Design Considerations in Volume I of this manual Laser and Optics User s Manual Vol Il Agilent 10715A Differential Interferometer 22 Agilent 10715A Differential Interferometer Figure 140 Agilent 10715A Differential Interferometer Laser and Optics User s Manual Vol II 467 22 Agilent 10715A Differential Interferometer fA 2Af MEASUREMENT PATH fA Plate fataf fA Aperture B Aperture 4 LM v Yj i fa 2Af X d lt r fat Af Plate Agilent 10715 e Top View REFERENCE PATH fp m um i Plate l Aperture um um um um m m Aperture A um um um um um m m um uen m A Reference Mirror Plate Stage Agil
167. asurement beams on the measurement mirror The mounting system for each interferometer should be designed to restrict each of the six degrees of freedom three translational three rotational The recommended positional tolerances for mounting the interferometers are given below Consider an ideal case in which the input laser beam is perfectly aligned to its desired axis 1 There is no recommended tolerance for locating the Agilent 10721A interferometer along the X axis since this has no influence on the measurement 2 The recommended tolerances for locating the interferometer along the Y axis and Z axis are 0 15 mm 0 006 inch Positional errors here will Laser and Optics User s Manual Vol II 545 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 546 displace the effective measurement points on the mirrors by an equal amount Also mislocation can offset the beam centering in the input and output apertures 3 The recommended tolerances for pitch roll and yaw of the interferometers are 15 arc minutes relative to the input beam Here again mislocation chiefly affects beam centering though gross errors in roll that is over 1 degree can start to induce non linearity error due to polarization mixing The primary reason for these tolerances is to control the measurement points on the mirrors and to ensure that the laser beams will reach the receivers properly aligned with no clipping or signal loss
168. ay also be necessary to achieve alignment Select the large aperture on the laser head Verify that the receiver s LED is ON and that the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A Laser and Optics User s Manual Vol Il Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector 29 COMPOSITE PATH fA and fp Agilent 10771A Agilent 10771A Agilent 10770A Angular Reflector Angular Reflector Angular Interferometer Position 1 Position 2 257 7 L fA m c a gt pas Y P M Y TT TP 1 Pa ee i y I IY fg Laser Beam i gt l gt t J E yp i 42 B I I Receiver lt lt 1 aeee dl Aen Displaced Measurement Beams Travel Axis Laser Axis Figure 207 Measurement beam dots movement Laser and Optics User s Manual Vol II 613 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Operation Accuracy considerations There are three error sources that are controlled by the operator 1 The accuracy depends on the nodal point spacing The optics must be temperature stabilized in the 15 to 25 degree C range or thermal expansion will change the nodal point spacing ca
169. c sec using X256 electronics Yaw 0 19 urad 0 039 arc sec X32 0 024 urad 0 0049 arc sec X256 Angular Range Pitch or roll at distance 150 mm at distance 300 mm 2 mrad 6 8 arc min 1 mrad 3 4 arc min 1 mrad 3 4 arc min 2 mrad 6 8 arc min Yaw for 6 mm beam 1 5 mrad 5 1 arc min Yaw for 9 mm beam 3 mrad 10 2 arc min 578 Parallelism Measurement beams Axes 1 amp 2 40 prad 8 arc sec Axes 1 amp 3 50 urad 11 arc sec Optical Efficiency output beam total input beam Average 18 Worst Case 10 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation procedure requires three referenced pins mounted onto a referenced surface Inter axis Alignment All internal optics are referenced to the mounting surface and have fixed alignment Receivers Agilent 10780F fiber optic remote receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE PLANE MIRROR RECOMMENDATIONS Reflectance 9896 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from 4 to 4 20 0 16 to 0 03 umeters 6 to 1 2 uinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accur
170. cal to the Agilent 10736A interferometer except that its Measurement Axis 2 beam paths are bent at right angles away from its other measurement axis paths These interferometers are designed to use a 9 mm diameter laser beam available from an Agilent 5517C 009 Laser Head Smaller diameter laser beams can be used but the usable angle range is reduced Agilent 10725A 50 Beam Splitters and Agilent 10726A Beam Benders are available for use in delivering the beam from the laser head to the interferometer Agilent 10780F E1708A E1709A remote receivers are used at the Agilent 10735A s laser output apertures The measurement beam parallelism inherent in the design of the Agilent 10735A and Agilent 10736A interferometers ensures that there is essentially no cosine error between their three measurements and also ensures angle accuracy for pitch and yaw measurements The Agilent 10736A 001 interferometer has the same parallelism characteristic for its two parallel measurement axes These interferometers are designed for direct attachment of Agilent 10780F E1708A or E1709A remote receiver fiber optic sensor heads one per axis This simplifies user assembly since no optical alignment of the receiver is required The three fiber optic receiver sensor heads are attached directly to apertures on the same face of the interferometer as the input aperture The optics of each of these interferometers are factory aligned to predetermined mounting
171. ce paths Figure 164 Agilent 10717A Wavelength Tracker laser beam path Laser and Optics User s Manual Vol II 497 24 Agilent 10717A Wavelength Tracker 498 The Agilent 10717A Wavelength Tracker provides a higher degree of accuracy than environmental sensors such as the Agilent 10751C or Agilent 10751D Air Sensor thereby improving the laser system measurement performance For a more detailed comparison of compensation methods see WOL Compensation Method Comparison in Chapter 12 Accuracy and Repeatability in Volume I of this manual The Agilent 10717A Wavelength Tracker s output must be directed to an Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver where a measurement signal is generated The laser measurement system electronics use this signal and the laser head s reference signal to monitor changes in the wavelength of light For maximum accuracy the etalon s length the number written on the end of the etalon must be used in the electronics Operation is straightforward The etalon consisting of two mirrors separated by a thermally stable spacer presents a fixed distance to the differential interferometer The interferometer monitors the optical path length between these two mirrors Any change in the wavelength of light that is changes in the air density or index of refraction within the etalon cavity causes an optical path length change which is detected as a phase shift in the
172. d Optics User s Manual Vol II 44 20 Agilent 10706A Plane Mirror Interferometer Converting to High Stability Plane Mirror Interferometer 442 General The Agilent 10706A Plane Mirror Interferometer can be converted to a version having improved thermal stability equivalent to the Agilent 10706B High Stability Plane Mirror Interferometer by replacing the REFERENCE cube corner with an Agilent 10723A High Stability Adapter see Figure 129 Instructions for the conversion are given below To convert an Agilent 10706A Plane Mirror Interferometer to the Agilent 10706B configuration The Agilent 10723A adapter MUST be installed in place of the REFERENCE cube corner on the Agilent 10706A interferometer If it is inadvertently installed on the other side the thermal stability will become worse Refer to Figure 131 for the proper installation orientation 1 Refer to Figure 131 and positively identify the position in which to install the Agilent 10723A adapter Note that in either configuration the Agilent 10723A adapter replaces the REFERENCE CUBE CORNER Agilent 10703A Retroreflector 2 Remove the REFERENCE CUBE CORNER and store it in a safe place 3 Refer to Figure 131 If the interferometer is in the straight through configuration proceed to step 5 and install the Agilent 10723A adapter using the mounting screws that were used to mount the Reference Cube Corner If the interferometer is in the turned configuration use the new ha
173. d adding new mounting and adjusting hardware for the High Stability Adapter Note the location of the plane mirror converter and high stability adapter with respect to the graphics on the label The new mounting and adjusting hardware is contained in a bag shipped with the Agilent 10706B interferometer 1 Using the hex key provided install the four 2 56 x 3 16 inch long screws into the holes on the flange of the High Stability Adapter housing Be sure that they do not protrude through the flange 2 Equip both 4 40 x 1 2 inch long mounting screws with a compression spring and use them to mount the High Stability Adapter in place of the plane mirror converter as shown in Figure 135 Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 Agilent 10706B High Stability Plane Mirror Interferometer Conversion Using the Agilent 10723A High Stability Adapter A A Agilent 10723A High Stability Plane Mirror Adapter Y Converter b Agilent 10723A High Stability Adapter Plane Mirror Converter Y Cube Corner Y Cube Corner A Straight through Configuration Turned Configuration Figure 135 Agilent 10706B Interferometer configurations 3 Tighten both mounting screws until the head of each just begins to compress the spring Then tighten each screw two turns to properly compress each spring Changing to the turned configuration changes the measurement direct
174. d be in a system that includes one or more of the following interferometers Agilent 10735A Agilent 10736A Agilent 10736A 001 This mirror can also be used with smaller diameter laser beams The Agilent 10728A Plane Mirror can be used with the Measurement Axis 2 beam paths from the Agilent 10736A 001 Three axis Interferometer with Beam Bender The Agilent 10728A is supplied without a housing Agilent Technologies does not provide mounting hardware for the Agilent 10728A mirror This optic is intended for use in user designed mounts The user is responsible for devising a mounting method that does not cause stresses in the optical devices that will result in distortion of the reflected laser wavefronts Use of the Agilent 10728A mirror in a vacuum application depends on the materials used in the user created mounting arrangement Contact Agilent call center for information on a vacuum option Agilent 10728A Agilent 10728A Plane Mirror Specifications 754 Dimensions see figure below Weight 21 grams 0 74 ounce Reflectivity 98 at 633 nanometers at normal incidence Flatness A 10 at 633 nanometers 6 35 mm 0 25 i 38 0 mm 1 50 43 4 va 0 18 yY 38 0 mm lt 1 50 Figure 298 Agilent 10728A Plane Mirror specifications Laser and Optics User s Manual Vol 1 Accessories 36 Agilent 10772A Turning Mirror The Agilent 10772A Turning Mirror see
175. d beam locations The Agilent 10721A interferometer is designed to be used in a straight through configuration only Its input face and measurement face are parallel to each other on opposite sides of the housing The locations of the reference and measurement beams with inputs and outputs identified are shown in Figure 181 The Agilent 10721A interferometer is similar to other plane mirror interferometers except that its reference paths are redirected to be parallel to their related measurement paths outside the interferometer Thus each reference path also requires a plane mirror for its reflector Beam diameter The Agilent 10721A interferometer requires the mm diameter beam available from an Agilent 5517C 003 Laser Head The smaller diameter beam enables the beam positions on the stage mirror to be closer to the lithographic image plane reducing Abb offset errors 540 Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 BEAM LOCATION FOR AGILENT 10721A Sensor Heads for Remote Receivers Input Beam to Interferometer Top Four Beams are Reference Beams Bottom Four Beams are Measurement Beams FRONT VIEW REAR VIEW Figure 181 Agilent 10721A Two Axis Differential Interferometer Reference and Measurement beams Receiver considerations The Agilent 10721A interferometer is designed primarily for use with the Agilen
176. d with a small reference plane mirror see Figure 145 Mount the mirror on an adjustable mount so proper alignment can be obtained When alignment is achieved rigidly fix the position of the mirror The recommended method is to use an adhesive to attach the mirror to the mount The adhesive should not induce stress into the glass during curing Place the mirror and mount assembly as close as possible to the near end of travel of the stage to reduce potential deadpath errors Laser and Optics User s Manual Vol II 473 22 Agilent 10715A Differential Interferometer REFERENCE MIRROR FOR AGILENT 10715A 6 3 mm 2X 3 2 mm R 0 25 0 13 8 1 mm 2X 3 6 mm R 0 32 0 14 22 9 0 90 Either Both Reference or Measurement Beams Y 3 4 mm 0 13 1 5 1 mm 9 9 mm 0 20 0 39 18 3 mm 0 72 Either Both Reference or Measurement Beams Agilent Part Number 10715 20205 Weight 3 2 grams 0 11 ounce Figure 146 Agilent 10715A Interferometer reference mirror Alignment aid Alignment Aid Agilent Part Number 10706 60001 is included with the Agilent 10715A interferometer This is the same alignment aid used on the Agilent 10706A Plane Mirror Interferometer For information about use of this alignment aid see Chapter 20 in this manual which deals with the Agilent 10706A Plane Mirror Interferometer Alignment procedure This alignment procedure is
177. determining deadpath compensation Agilent 10736A 001 Interferometer Bent Axis For the Agilent 10736A 001 bent measurement axis measurement axis 2 zero deadpath would require that the measurement reflector be inside the interferometer 34 42 mm 1 355 inches behind the interferometer s beam bender measurement face To determine the true deadpath distance for this axis use steps 1 and 2 the general procedure above and then add 34 42 mm 1 355 inches to the distance measured in step 2 Laser and Optics User s Manual Vol II 575 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Specifications and Characteristics Agilent 10735A Three Axis Interferometer Specifications USE Multiaxis applications such as precise positioning of multiaxis stages where linear and angular control of the stage is required The Agilent 10735A provides three linear measurements Two angular measurements can be calculated from this data When the interferometer is placed along the X axis yaw theta Z and pitch theta Y can be derived in addition to linear X displacement When it is placed on the Y axis yaw theta Z and roll theta X can be derived in addition to linear Y displacement Redundant yaw is useful when mapping measurement mirrors which provides improved accuracy The interferometer can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 5 5 kg 12 lbs Dimensions see F
178. e Connect a digital voltmeter DVM or oscilloscope to the test point on the back of the receiver Align the receiver for a maximum positive voltage at the test point You may have to adjust the gain potentiometer to keep the test point voltage out of saturation and in the linear region 0 1 to 0 8V A simple way to align the receiver is to use a gage block to autoreflect the beam Remember that the objective is to position the receiver or sensor head such that the beam enters the input aperture perpendicular to its front face and centered in the aperture Hold the gage block against the front face and adjust the receiver or sensor head position and angular orientation so that the beam is autoreflected that is coincident upon itself at the laser head This will provide excellent alignment of the receiver in pitch and yaw but not roll relative to the beam axis Roll must be aligned so the two polarization vectors from the laser head are parallel to or perpendicular to the plane defined by the centerlines of the two mounting holes within 3 Turn the GAIN potentiometer fully clockwise Block the measurement beam the beam between the interferometer and the measurement reflector Adjust the GAIN potentiometer counter clockwise until the test point voltage drops below 0 1V Unblock the measurement beam The test point voltage should be at least 0 7V Record the voltage reading at the beam monitor test point as an axis referenc
179. e Agilent 10780F 037 Remote Receivers Compatible with Agilent 10711A Adjustable Mount Reflectance 9896 at 633 nm at normal incidence Flatness Flatness deviations will appear as measurement errors when the mirror is scanned perpendicular to the beam Recommended range 1 4 0 16 um or 6 uin to 1 20 0 03 um or 1 2 dependent on accuracy requirements 60 40 per Mil 0 13830 At a distance of 300 mm maximum measurement mirror angle due to all components i e yaw and pitch or yaw and roll between the measurement mirror and the interferometer A six axis system is assumed Laser and Optics User s Manual Vol II 605 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 32 lt 1 26 gt 3 x Fiber Optic 1 Connectors li for Agilent 10780F 037 Receivers a From Laser 6 32 UNC 2B 250 deep 4x this side and 4x far side 3 0 4x Drilled For Clearance a a Da 66 mm 0 12 of 4 40 Screw and tapped lt lt 2 6 To Plane Mirror 0283 4 92 EM 1 50 747 N x i 7 19mm 125 mm 7 19 mm gt 7 19 mm 22 63 mm d 17 3 mm 0 283 0 283 0 891 0 68 7 19 mm gt lt 17 3 mm Input 0 283 oa 0 68 Aperture Agilent 10737L interferometer is shown Agilent 10737R interferometer dimensions are simila
180. e 342 mounts adjustable 726 multiaxis measurement configurations 512 N N1203C Precision Beam Translator 379 N1203C Precision Beam Translator Specifications 381 N1203C Precision Beam Translator description 379 N1204C Horizontal Precision Beam Bender 379 N1204C Horizontal Precision Beam Bender description 379 N1204C Precision Horizontal Beam Bender Specifications 383 N1207C Precision Vertical Beam Bender 379 N1207C Precision Vertical Beam Bender Specifications 385 N1207C Precision Vertical Beam Bender description 379 N1208C 33 Bare Beam Splitter 388 N1208C D E F G Bare Beam Splitter Specifications 389 N1208D 40 Bare Beam Splitter 388 N1208E 50 Bare Beam Splitter 388 N1208E Bare Beam Splitter 388 N1208F 66 Bare Beam Splitter 388 N1208G 60 Bare Beam Splitter 388 N1209A RPT Manipulator 390 N1209A RPT Manipulator Specifications 393 N1250A B Receiver Cable 742 N1251A B Laser Head Cable 743 0 one axis differential interferometer 10719A One Axis Differential Interferometer 510 optical input and output ports 380 optical power change see also Dynamic Range 720 optics 749 712 10724A Plane Mirror Reflector 750 751 10728A Plane Mirror 754 10772A Turning Mirror 755 10773A Flatness Mirror 756 10777A Optical Square 760 beam bending 358 beam splitting 358 straightness measurement 618 options for 5517B BL C D DL FL Laser Head 346 orientation horizontal or vertica
181. e measurement and reference path lengths are inherently unequal by 19 05 mm 0 750 inch Laser and Optics User s Manual Vol Il Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Agilent 10719 and 10719 02 One Axis Differential Interferometer Specifications USE Single and multiple axis applications such as precise positioning of a multiaxis stage where the stage must be linearly positioned with respect to an external object such as a column or inspection tool Alternatively an angle is measured when both reference and measurement beams measure distance to the same mirror The interferometer can be made vacuum compatible SPECIFICATIONS Operating Temperature 17 to 23 C Weight 300 grams 11 ounces Dimensions see Figure 176 10719A Figure 177 10719 C02 Materials Used Housing Aluminum Optics Optical grade glass Adhesives Vacuum grade Axis Linear or pitch or roll Available Beam Size 3 mm Thermal Drift Coefficient Average 150 nm 5 9 for Option C02 50 nm C typical Non linearity Error 2 2 nm 0 09 pin Resolution Optical A 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 7 0 14 arc sec using X32 electronics 0 1 urad 0 02 arc sec using X256 electronics Range Linear 10m 33 ft Angular pitch or roll at distance 150 mm at distance 300 mm
182. e 85 lists the alignment targets and aids Dgivent Technologies Alignment Target P N 10702 60001 Alignment Aid Insert between Beam Splitter and High Stability reflector during autoreflection Es Agilent P N 10706 60202 Alignment Aid P N 10706 60202 mmm REMOVE TARG AFTER ALIGNMENT Alignment Target P N 10705 60001 Agilent Technologies REMOVE TARGET AFTER ALIGNING Agilent Technologies Alignment Aid P N 10706 60001 3 Agilent Alignment Target P N 10774 20021 Alignment Aid P N 10767 67001 e IU Alignment Aid P N 10774 67001 Alignment Target Alignment Target P N 10780 40003 Alignment Target P N 10780 40009 P N 7121 1114 Figure 294 Alignment targets and aids Laser and Optics User s Manual Vol II 747 36 Accessories 748 Table 85 Alignment targets and aids Interferometer other optic or Receiver Agilent 10702A or Agilent 10702A 001 Alignment Target 10702 60001 Alignment Aid Agilent 10705A 10705 60001 none Agilent 10706A 10702 60001 10706 60001 Agilent 10706B 10702 60001 10706 60001 10706 60202 Agilent 10715A 10706 60001 Agilent 10716A 10706 60001 10706 60202 Agilent 10717A 10706 60001 Agilent 10719A 10706 60202 Agilent 10721A 10706 60202 Agilent 10722A 10706 60001 Agilent 10735A 10706 60001 Agilent 10736A or Agilent 1
183. e adjust the Interferometer s bezel and Reflector until the receiver test voltage is maximized See Chapter 35 Receivers in this manual for the adjustment procedures of the Receiver c Move the optic over its full travel range making sure that the receiver signal strength is adequate 0 7 to 1 3 Volts over the entire travel range The straightness optics are now aligned There may be further fine adjustment to be done but first make several measurement passes and observe the data If a steady change in the data occurs rather than either a random scattering of numbers or a constant number this indicates misalignment between the axis of travel and the reflector s mirror axis See Figure 219 for an illustration of this error This error is called slope and must be removed to obtain proper straightness information 626 Laser and Optics User s Manual Vol II Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 Autoreflection method Remove the Straightness Interferometer from its mount surface Place a referenced mirror or gage block between the beam splitter and reflector so that the laser beam strikes its reflective surface Align the referenced mirror until its reflective surface is perpendicular to the axis of travel Select the small aperture on the laser head by rotating the front turret Adjust the laser beam angularly until the beam reflects back on itself from th
184. e beam autoreflects into the small aperture of the laser head Once autoreflection is achieved gently snug the two remaining set screws Be careful to preserve the autoreflection alignment 29 Remove the Agilent 10706B interferometer alignment aid P N 10706 60202 from between the beam splitter and the high stability adapter Replace the plane mirror converter removed in step 26 above Remove the beam block from between the interferometer and the measurement mirror 30 The reference and measurement beams must be centered on the receiver aperture Using translucent tape over the receiver aperture to observe the beams move the receiver side to side to center the beams Laser and Optics User s Manual Vol II 461 21 462 Agilent 10706B High Stability Plane Mirror Interferometer 31 32 33 34 Place the interferometer alignment aid P N 10706 60001 back on the output side of the interferometer and switch to the large aperture on the laser head Connect a fast responding voltmeter to the receiver test point Monitor the voltage reading along the complete travel of the stage The voltage should not jump up to the previous maximum voltage reading If the voltage does jump readjust the interferometer as in step 21 until the voltage reading suddenly drops back to about 0 3 volt If readjustment of the interferometer is required in step 31 return to step 26 and repeat the procedure from that point Remove the interferometer alignm
185. e equal or better alignment than referencing the optics to their housings Therefore slight positioning adjustments of the unreferenced interferometers beam splitters and beam benders are needed for proper system alignment In general it will be necessary to adjust most or all of the optical components In general when aligning Agilent optics it will be necessary to adjust most or all of the optical components Most optics are not referenced to their housings some simple adjustments by the user can provide optimum alignment The Agilent 10710B and Agilent 10711A Adjustable mounts should be used to provide the adjustment capability for most optical components In general the alignment procedures are performed with all optical components in place Your measurement system design should allow for adjustment of the laser optics and receivers during alignment 726 Laser and Optics User s Manual Vol Il Accessories 36 For optics that are not referenced to their housings use of an Agilent 10710B or Agilent 10711A adjustable mount is recommended These mounts provide a convenient means for mounting aligning and securely locking measurement optics into position Both mounts allow angular adjustment in two directions tilt and yaw The Agilent 10710B allows 8 in tilt and yaw adjustment The Agilent 10711A allows 5 in tilt and yaw adjustment The mounts also allow a component to be rotated about its optical centerline roll pro
186. e for future troubleshooting Laser and Optics User s Manual Vol II 701 35 Receivers Operation The Agilent 10780C Receiver or Agilent 10780F Remote Receiver normally receives its operating power from the measurement electronics to which it is connected When the measurement electronics are turned on the receiver will turn on An LED on the Agilent 10780C or Agilent 10780F receiver signals beam capture An available dc voltage output on the Agilent 10780C or Agilent 10780F receiver indicates incoming laser beam intensity Specifications and characteristics 702 Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Specifications for the Agilent 10780C Receiver and Agilent 10780F Remote Receiver are given below Specifications for the Agilent 5519A B Laser Head s internal receiver are given in Chapter 16 Laser Heads of this manual Sensitivity The maximum sensitivity of the Agilent 10780C is 1 5 uW factory set at 5 uW and can be adjusted via an externally accessible potentiometer The adjustment procedure is given earlier in this chapter Maximum sensitivity of the Agilent 10780F Remote Receiver is 2 2 uW with its standard 2 m cable a 10 m cable reduces the sensitivity to 5 0 uW The difference between the Agilent 10780C and the discontinued
187. e general mounting arrangements for Agilent 10735A Agilent 10736A and Agilent 10736 001 interferometers are similar they are not the same The relation of their measurement beam patterns to the alignment point datum C are slightly different An Agilent 10736A or Agilent 10736 001 interferometer installed in a mounting location designed for an Agilent 10735A interferometer or vice versa may not give exactly the same results One important consideration in determining interferometer placement is the relationship of the interferometer s beam pattern to the coordinate origin of the system you want to measure See Figure 189 Looking at the interferometer s measurement aperture face the coordinate origin should be aligned with the imaginary vertical centerline of measurement axis 3 For an Agilent 10735A interferometer this will also be the mid point of a line joining measurement axis 1 and measurement axis 2 For an Agilent 10736A interferometer this line will also be the vertical centerline of measurement axis 1 Datum C is at the end of the interferometer away from the interferometer s input face In the discussion below your viewpoint of the interferometer is looking into its measurement face with the interferometer s mounting plate as the bottom surface This is the view presented in the specifications dimension drawing at the end of this chapter For an Agilent 10735A interferometer datum C should be 62 17 mm 2 448 inches
188. e laser beam with a piece of paper and moving the paper along the axis of travel With the laser beam passing through the 50 beam splitter coarsely adjust optical components so the measurement beams strike the center of the receiver aperture Use the Moving Dot method described in the following subsection to do this Place a referenced mirror between the interferometer and the reflector so the measurement beams from the interferometer strike this mirror Align the referenced mirror with a precision indicator until the mirror s reflective surface is perpendicular to the direction of travel Select the small aperture on the laser head by rotating the front turret Adjust the laser head angularly until the beam reflects back on itself from the referenced mirror and is centered on the small aperture of the laser head Lock down the laser head and interferometer securely Make sure the alignment is not disturbed Reposition the reflector until the return measurement beams are centered on the receiver Select the large aperture on the laser head Placing a piece of translucent tape over the receiver lens will help in observing the impinging beams CAUTION Do not let the tape adhesive touch any optical surface 8 Verify that the receiver s LED is ON and that the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A Laser and Opt
189. e mounted on a horizontal surface or a vertical surface The direction sense will be different for each orientation If any two of the conditions described above including the laser head orientation are changed there is no net change in the direction sense Table 73 Agilent 10715A direction sense Laser Head Laser Head Orientation Agilent 10715A Agilent 10715A F1 Path Horizontal or Rolled 90 Input Aperture Orientation About Beam Aor B Horizontal or Vertical Horizontal Horizontal Vertical Agilent 5517A B C D F1 Horizontal F2 Vertical Horizontal Rotated 90 Vertical Horizontal Horizontal Vertical Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking the Agilent 10715A interferometer in position Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its centerline simplifying installation Fasteners The Agilent 10715A interferometer is supplied with English mounting hardware which is required to fasten it to its adjustable mount Laser and Optics User s Manual Vol II 471 22 Agilent 10715A Differential Interferometer Installation and Alignment 472 The Agilent 10715A Differential Interferometer alignment procedure has more steps than those for other Agilent interferometers because its ref
190. e referenced mirror and is centered on the small aperture of the laser head Make sure that the laser beam is centered over the intended measurement axis Lock down the laser head and beam splitter securely Make sure not to disturb the alignment Remove the referenced mirror Orient the Straightness Reflector horizontally or vertically to match the type of measurement to be made horizontal or vertical straightness Center the reflector about the laser beam The laser beam should strike centered between the two mirrors in the reflector The laser beams should now be aligned parallel to the axis of travel This ends the Autoreflection alignment method Gunsight method 1 Position the optics for their near end of travel that is when the interferometer and reflector are nearest each other For short range measurements this should be about 100 mm 4 inches For long range measurements this should be about 1 meter 3 feet Orient the Straightness Reflector horizontally or vertically to match the type of measurement to be made horizontal or vertical straightness Select the small aperture on the laser head by rotating the front turret Attach the round target supplied with the straightness optics to the entrance face of the interferometer Make sure that the target is centered over the interferometer bezel Adjust the interferometer or laser beam so the laser beam goes through the target s hole The interferometer should
191. ea t provides easier access to the attenuator and squelch adjustments t provides a much smaller package size in the measurement area Application characteristics The Agilent E1709A e Has high sensitivity of 20 u to 0 80 uW depending on ac signal strength with a 2 meter cable Accommodates a high Doppler frequency shift to allow greater speed in stage velocity with slew rates to 1m s with plane mirror optics Has a wide operating temperature range of 0 40 C Has a wide Dynamic Range of 25 1 to 6 1 depending on ac signal strength Laser and Optics User s Manual Vol II 718 35 Receivers Agilent E1709A relationship to Agilent E1708A 720 There are several additional features provided by the Agilent E1709A that are not provided by earlier model receivers such as the Agilent E1708A Remote Dynamic Receiver For detailed comparison of Agilent E1708A and Agilent E1709A see Figure 77 Technical enhancements The Agilent E1709A compared to the Agilent E1708A has 3 to 11 times greater sensitivity enabling the measurement system to function with weaker beam signal This allows a much longer distance between receiver and sensor or more axes per laser head accommodates a higher Doppler frequency shift to allow greater speed in stage velocity slew rate The Agilent E1709A can tolerate approximately two times the slew rate limit of the Agilent E1708A has approximately 10 times greater immunity to tem
192. eadpath positions when you reset the system you should enter a zero deadpath compensation value as described under Air Deadpath compensation considerations below Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 Air Deadpath compensation considerations Proper use of deadpath compensation is essential to achieving maximum accuracy Air deadpath is defined as the difference in the air path length between the reference and measurement arms of the interferometer when the stage is at its zero or home position If air deadpath exists and is not compensated your zero point or home position will appear to move around as the air temperature pressure and humidity change Zero deadpath is the condition in which the measurement beam path length and the reference beam path length are equal For the Agilent 10721A interferometer this does NOT occur when the measurement and reference mirrors are coplanar as a cursory look might imply Because the reference beam travels an additional 19 05 mm 0 750 inch for the standard10721A or 30 6 mm 1 025 inches for the 10721A CO1 through air inside the interferometer housing the zero deadpath condition occurs when the measurement mirror is 19 05 mm 30 6 mm for option C01 farther from the interferometer housing than the reference mirror Deadpath compensation for the Agilent 10721A interferometer can be performed in one
193. eam In the Standard configuration the beam is not turned it passes straight through the interferometer to the measurement reflector Agilent 10715A upside down Mounting the Agilent 10715A in this manner has no effect on the direction sense assuming the same input aperture is used Table 73 shows the direction sense for various optical configurations Configurations that change the direction sense Agilent 10715A Input and Output Apertures The laser beam may enter either of the two apertures on the Agilent 10715A or Agilent 10715A 001 These apertures are labeled A and B If aperture A is used as the input then aperture B is the output aperture and vice versa Functionally it is arbitrary which aperture is the input aperture However the choice of A or B does determine which frequency is passed to the measurement mirror and thereby determines the direction sense Laser and Optics User s Manual Vol II 469 22 Agilent 10715A Differential Interferometer AGILENT 10715A STANDARD CONFIGURATION Adapter Plane Mirror Converter Figure 142 Agilent 10715A Standard Configuration AGILENT 10715A 001 TURNED CONFIGURATION Adapter Plane Mirror Converter Figure 143 Agilent 10715A 001 Turned Configuration 470 Laser and Optics User s Manual Vol II Agilent 10715A Differential Interferometer 22 Agilent 10715A orientation horizontal or vertical The Agilent 10715A may b
194. eams Figure 150 Differential interferometer as viewed from plane mirrors with measurement beams aligned 10 Switch to the large aperture on the laser head Laser and Optics User s Manual Vol II 477 22 Agilent 10715A Differential Interferometer 11 Check to ensure that both measurement beams pass clear of the stationary reference mirror If necessary move the reference mirror until both measurement beams pass clear The return beam should now pass unclipped to the receiver 12 Replace the alignment aid over the output aperture of the differential interferometer such that the beam going to the reference mirror which becomes the reference beam passes through the alignment aid See Figure 151 The full reference beam should strike the reference mirror Select the small aperture on the laser head If the reference mirror is parallel to the movable mirror the reference beam will now be reflected back to the small aperture on the laser head If not the reference mirror must be adjusted in pitch and yaw until the reference beam is centered on the small aperture 13 Remove the alignment aid The measurement beam and the reference beam should now exit the interferometer aperture in diametrically opposite positions Switch the laser head to its large aperture See Figure 152 The measurement beam and the reference beam should pass unclipped to the receiver Verify this by checking that these beams are centered in the output aperture apertu
195. eatedly the bend radius should not be less than 100 millimeters 4 inches Coiling Excess Cable Coil diameter 150 mm minimum O The cable coil diameter should be 150 millimeters 6 inches or larger to avoid any increase in attenuation Environmental Considerations i 710 The fiber optic cables are UL recognized components that pass UL VW 1 flame retardancy specifications In most instances the use of conduit is probably not necessary since the cable has excellent safety properties in flammable environments Also the cable is electrically non conductive so it requires no shielding Laser and Optics User s Manual Vol Il Receivers 35 Table 79 Fiber optic cable considerations continued Attribute Description comment etc The cable s polyethylene jacket provides protection against abrasion and chemicals Avoid placing the cable directly in organic or alkaline solvents for extended periods of time hundreds of hours since these chemicals can penetrate the polyethylene gt lt jacket and degrade the optical properties of the fiber The fiber cable is specified to withstand a 0 5 kilogram weight shaped in the form of a half cylinder that is dropped from a height of 150 millimeters 150 mm max f Cable Bending and Shaking bending and vibration of the cable will not result in measurement errors but Movement can cause signal attenuation If the movement is periodic and continuous amplitude
196. ee simultaneous distance measurements along or parallel to the X axis can make these measurements displacement along the X axis rotation pitch about the Y axis rotation yaw about the Z axis The angular measurements made by either of these interferometers can be calculated by taking the arctangent of the difference between two linear measurements involved divided by their separation THETA arctan aoe This method for determining angle is described in more detail under the Electronic yaw calculation method and Optical yaw calculation method subsections under the Three axis measurement system using discrete plane mirror interferometers X Y YAW section in Chapter 3 System Design Considerations in Volume I of this manual X Y Stage These interferometers are well suited for X Y stage or multiaxis applications such as lithography equipment Two of these interferometers can measure all X Y pitch roll and yaw motions of a stage Since only five axes are required to make all these measurements the sixth axis can be used as a redundant yaw measurement useful for mirror mapping In these applications the measurement mirrors are attached to the X Y stage Laser and Optics User s Manual Vol 1 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 MEASUREMENT USING AGILENT 10737R L COMPACT THREE AXIS INTERFEROMETERS Laser Head Beam To Fiber Optics piraetng
197. eflecting off this mirror and adjusting the laser head or beam bender until the reflected beam is centered in the small aperture on the laser head 3 Move the interferometer so the laser beam enters the input aperture aperture B in this example 4 Place a rectangular gage block over the input aperture so the laser beam is reflected back toward the laser See Figure 159 5 Adjust the interferometer in pitch and yaw until the laser beam is autoreflected back into the laser head ensuring proper alignment It may be necessary to move the interferometer again to center the laser beam on the input aperture Use a piece of translucent tape to help observe the beam 6 Remove the gage block Note that the autoreflection procedure above is used only to reduce clipping and is not as critical as the autoreflection procedure used to reduce cosine error As long as the four beams are not clipped the alignment of the interferometer is adequate The next steps refine the alignment to reduce cosine error 7 Place the alignment aid Agilent Part Number 10706 60001 over the output aperture plane mirror converter on the interferometer such that the measurement beam passes through the aperture on the alignment aid See Figure 160 Laser and Optics User s Manual Vol II 489 23 Agilent 10716A High Resolution Interferometer AGILENT 10716A WITH GAGE BLOCK Laser Beam lt Figure 159 Agilent 10716A
198. el cosine errors can result When interferometer axis 1 is correctly aligned the other measurement axes will automatically be aligned because of the parallelism designed into the interferometer Since the physical relationship of the interferometer and the stage and its mirror is fixed by the alignment pins at the interferometer s mounting location the only way to change the angle of the interferometer measurement output beams is to change the angle of the laser beam at its input aperture The alignment procedure does not make any adjustment to or within the interferometer Procedure The interferometer should not be moved during this procedure or afterward Moving the interferometer will require that it be realigned Movement of the laser head is allowed assuming an adjustable mounting for the laser head is provided Most of the alignment is performed by translating or rotating the optical devices that establish the laser path from the laser head to the interferometer The goal of the alignment is to provide the four necessary degrees of adjustment of the input of each interferometer vertical and horizontal translation to center the input beam on the interferometer input aperture and pitch and yaw of the input beam to make the measurement beams perpendicular to the stage mirror You should have handy e a gage block or similar device you can use to autoreflect the beam back along its original path apiece of w
199. elow Weight 2 grams 0 07 ounce Materials Used Optics BK7 Optical Efficiency Reflective path E1833C 15 5 E1833E 33 5 E1833G 50 5 E1833J 67 5 E1833M 100 5 Minimum clear aperture central elipse 29 mm x 19 mm 6 38 mm 01 lt lt Figure 94 Agilent E1833C E G J M Bare Beam Splitter dimensions Agilent N1203C N1204C and N1207C Beam Manipulators Overview The purpose of the Agilent N1203C N1204C and N1207C beam manipulators shown in Figure 95 is to precisely bend or translate a laser beam to achieve sub nanometer distance measurements The precise bending and translating results in a properly aligned laser beam An improperly aligned laser system will produce errors The beam manipulators are very useful in rapid laser system alignment used for precision distance measurements 378 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 The Agilent N1203C Precision Beam Translator is a precision optical mount for a refracting window The Agilent N1204C Precision Horizontal Beam Bender and Agilent N1207C Precision Vertical Beam Bender are precision optical mounts for bending mirrors These products are designed to provide high resolution positioning of laser beams for precise distance measurements by the application of removable tooling see Agilent N1203C 04C 07C Beam Manipulator Accessories in Chapter 36 Accessories of this manual for details on the adju
200. ely overlap resulting in signal loss Typically a lateral offset of 1 4 of the beam diameter between Laser and Optics User s Manual Vol Il Receivers 35 the beams is allowable for an adequate measurement signal However you must make every effort to optimize the laser beam overlap for maximum performance Optics Misalignment Reference Beam MT Retroreflector IN b N Laser Beam Receiver Measurement Beam lt Receiver Detects Only Overlapped Portion View A A Measurement Beam Je Beam View A A Figure 264 Effect of optics misalignment If the measurement beam is not aligned parallel to the direction of retroreflector travel there are two effects First a cosine error is generated of a magnitude directly related to the angle of misalignment For a complete description of cosine error refer to Chapter 12 Accuracy and Repeatability in Volume I of this manual Second when movement occurs between the optics the angular misalignment also causes a lateral displacement of the measurement beam with respect to the reference beam at recombination resulting in additional signal loss Figure 265 illustrates the result of angular misalignment Laser and Optics User s Manual Vol II 699 35 Receivers Angular Misalignment Laser Axis Reference Beam Retroreflector Position 1 Retroreflector Position 2 Laser Beam Receiver Interferometer Measurement Beam
201. ent 10715A Mirror Top View COMPOSITE fA and fg gt 22 Plate AY fa fAE2Af Aperture amp lt gt Aperture A amp mmm fA 2 Af mE m E mm e Reference fAXAf zm Plate Agilent 10715A Top View LEGEND mage m m pen i 4 f and fg C fn f r Rounded corners are used to help you trace paths Figure 141 Agilent 10715A Differential Interferometer laser beam path Laser and Optics User s Manual Vol II 468 Agilent 10715A Differential Interferometer 22 Special Considerations Configuration Effects For purposes of convention aperture B will be considered the input aperture when referring to all configurations Note that the choice of input aperture is one of the configuration variables that affects the direction sense The Agilent 10715A Differential Interferometer is available in two configurations the Agilent 10715A see Figure 142 and the Agilent 10715A 001 see Figure 143 Both have the same direction sense however it may change depending on the mounting and orientation as shown in Table 73 Configurations with the same direction sense Standard configuration Agilent 10715A The Agilent 10715A is assembled and shipped in the Standard configuration see Figure 142 Turned configuration Agilent 10715A 001 The primary reason for using the Agilent 10715A 001 is to turn the b
202. ent 10724A MOUNTING REQUIREMENTS 4 40 X 200 Deep Minimum 2X 36 068 mm Dia E LA 1 420 NN SS A lt dug 0 75 Minimum Agilent 10724A m Plane Mirror Reflector 30 480 mm Dia 1 200 Figure 296 Agilent 10724A Plane Mirror Reflector mounting requirements and installation To install the Agilent 10724A 1 Install three 42 56 cap screws into the flange from the mirror side but do not let the screws protrude through the flange 2 Insert the labeled end non flanged end of the Agilent 10724A into the mounting hole or pocket Start the two 4 40 cap screws through the compression springs and the clearance holes in the flange and then into the mounting surface See Figure 296 3 Tighten the 4 40 screws so they contact but do not compress the springs CAUTION In steps 4 through 7 below take care not to distort the mirror by over compressing the springs The springs should never be tightened down solid leave at least 0 001 clearance between the coils at all times This may be checked by passing a piece of paper about 0 001 inch thickness through the coils 752 Laser and Optics User s Manual Vol II Accessories 36 4 Tighten each of the 4 40 screws one and a half turns The springs are now initially compressed 5 Advance the three 2 56 screws until they just contact the mounting surface Then tighten each by one and a half turns to lift the housing off the
203. ent aid Rotate the turret on the laser head to the large aperture Verify that the LED indicator on the receiver is illuminated and the voltage at the receiver test point is between 0 6 and 1 3 volts DC Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Plane mirror systems have a fundamental optical resolution of one quarter wavelength 0 158 micron 6 23 microinches Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897C and 10898 is usually available Interferometer Fundamental Optical System Resolution 1 System Resolution 2 Resolution see NOTE see NOTE Agilent 10706B A 4 158 2 nm 6 2 A 128 5 0 nm 0 2 pin A 1024 0 62 nm 0 024 The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on using 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics
204. ent of the Ball Mirror or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment Recommended Mounting Screws Four screws M5x 20 long Alloy Steel Grade 12 9 Seating Torque is 5 N m if Cadmium plated or 6 5 N m if unplated OR Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Angular Adjustment Tool Leverage Lever rotatation ball rotation 2 9 1 Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Agilent N1207C Precision Vertical Beam Bender Specifications and Characteristics Dimensions See Figure 96 Weight 920 grams Materials Used Martensitic stainless steel Optical grade glass Optical Efficiency 99 typical 97 5 Worst case Input Output Clear Aperture 13 0 mm Input Beam Position Tolerance 1 6 mm for 69mm beam Angular Beam Steering Range from nominal 90 9 mm beam centered on 13 mm Aperture Yaw 3 using Adjustment Lever and adapter at 625 mm port Pitch 6 using Adjustment Lever and adapter at 25 mm port Yaw 0 7 using Adjustment Lever only at 49 mm port Pitch 1 using Adjustment Lever only at port Angular Adjustment Sensitivity and Beam Steering Resolution 10 15 uradians better with operator patience Thermal Drift With the Manipulator feet on
205. ent of the plane mirror interferometer uses the autoreflection alignment technique described in Chapter 4 System Installation and Alignment in Volume I of this manual In most cases the accuracy demands of the X Y positioning devices used along with the relatively short travels encountered dictate that the high accuracy alignment technique described in the autoreflection alignment procedure be used The alignment procedure follows the instructions for using the alignment aids which begin below Alignment aids Figure 125 shows the two alignment aids supplied with the Agilent 10706A Plane Mirror Interferometer Alignment Target Agilent Part Number 10702 60001 Alignment Aid Agilent Part Number 10706 60001 Both aids are magnetic to simplify positioning on the interferometer 432 Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 REMOVE T ARGET AFTER ALIGNING Agilent Technologies nologies Agilent Tech Alignment Target Alignment Aid P N 10702 60001 P N 10706 60001 Figure 125 Agilent 10706A Interferometer alignment aids The Alignment Target Agilent Part Number 10702 60001 is used on the input side of the interferometer to properly position the beam in the aperture The Alignment Aid Agilent Part Number 10706 60001 is placed on the output aperture of the interferometer to allow autoreflection This aid contains a quarter wave plate to reflect the meas
206. eparation Typical with proper alignment 15 25 C distance between the laser head and the reflector 15 meters 50 feet 614 Laser and Optics User s Manual Vol Il Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Agilent 10770A Angular Interferometer Specifications Dimensions see figure below Weight 553 grams 19 5 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Maximum Angular Beam Deviation 30 arc seconds Optical Efficiency Typical 75 Worst Case 71 Non linearity Error lt 4 nm M3x0 5 16 Places A 72 6 mm 2 86 A 30 0 mm 1 18 Y 18 0 mm Aperture amp gt 30 0 mm 0 71 1 18 4 Places Figure 208 Agilent 10770A Angular Interferometer Laser and Optics User s Manual Vol II 29 615 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Agilent 10771A Angular Reflector Specifications Dimensions see figure below Weight 650 grams 23 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade M3x0 5 19 Places A Nodal Point Spacing 32 61 mm 72 6 mm 1 284 2 86 rN 30 0 mm
207. er s fiber optic sensor head may be mounted directly to certain interferometers Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A Alignment pins are provided for easy installation and alignment This eliminates the need for any other user supplied mount for the sensor head When the receiver input is oriented properly that is with its vertical axis parallel or perpendicular to the axes of the laser head the polarizer passes one half the incident power from each of the two incoming orthogonally polarized components of the received laser beam Photodiode The output from the polarizer assembly is an amplitude modulated sine wave that is sent to a photodiode chip in the receiver s electronic housing The frequency is the Doppler shifted split frequency The amplitude is proportional to the product of the incident powers of the two orthogonal components The photodiode generates an ac current which is converted to an ac voltage at a frequency of 100 kHz to 6 0 MHz Laser and Optics User s Manual Vol II 691 35 Receivers 692 The detected signal voltage goes through an impedance transformation stage two gain stages and a level translation stage The result a TTL level signal goes to a TTL differential line driver which is ac coupled to the rest of the measurement electronics by a shielded twisted pair cable The output is a differential square wave at the Doppler shifted split frequency An available dc v
208. er 20 Agilent 10706A Plane Mirror Interferometer of this manual The High stability Plane Mirror Interferometer is described in Chapter 21 of this manual Laser and Optics User s Manual Vol II 397 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 398 From Laser j 1 To Receiver If the Agilent 10702A Linear Interferometer is placed in a beam which has been aligned parallel to the motion of travel the outgoing beam can be deflected by as much as 30 arc minutes 0 due to the incoming outgoing beam parallelism specifications of the Agilent 10702A interferometer This could cause not only cosine error but also possible loss of signal during movement of the Agilent 10703A Retroreflector To compensate for this alignment is performed with the Agilent 10702A Linear Interferometer in place This allows the laser beam to be aligned parallel to the motion of travel to minimize cosine error and maximize signal Since the incoming beam is now not parallel to the motion of travel the Agilent 10702A Linear Interferometer must remain stationary See below If the Agilent 10702A Linear Interferometer instead of the Agilent 10703A Retroreflector is moved during the measurement the beam in the measurement path will remain parallel but will be displaced This displacement 6 will occur at the receiver causing a decrease and eventual loss of signal dependin
209. er alignment check place a piece of translucent tape across the output aperture s to make the output beam s easily visible Each output beam should now be approximately centered in its aperture without clipping Any clipping observed here indicates a centering problem at the input aperture or an autoreflection problem e Clamp down the laser and the beam directing optics without altering their alignment 4 At this point the reference beam has also been automatically aligned assuming the reference mirror is parallel to the measurement mirror If any parallelism error exists then the beam overlap in the output aperture s will be degraded and this may be visible Beam overlap can be checked qualitatively by alternately blocking the reference and measurement beams and observing their respective positions on the tape across the output aperture s Remove tape when done If a beam overlap problem exists recheck the parallelism of the reference mirror relative to the measurement mirror Adjust as needed Attach the fiber optic sensor head using a 4 40 screw Avoid kinking or excessive bending of the fiber cables as explained in the Receivers on page 547 Repeat the above steps for all other interferometers in the application being careful to adjust only beam directing optics which do not disturb the alignments already completed Reset considerations 550 If the reflectors you use with the interferometer are not at their zero d
210. er and Optics User s Manual Vol II 573 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Operation Measurements For an interferometer setup to measure distances along the X axis measurements of displacement pitch and yaw are derived as described below These computations are done via software on the system controller or computer Displacement For the Agilent 10735A interferometer displacement along the X axis can be measured as the average of the data returned from measurement axis 1 and measurement axis 2 measurement axis 1 measurement axis 2 Displacement 5 For the Agilent 10736A or Agilent 10736A 001 interferometer displacement along the X axis is simply the measurement axis 1 distance Pitch For the Agilent 10735A interferometer pitch rotation about the Y axis can be measured using data returned from all three measurement axes and the vertical offset between the common centerline of measurement axes 1 and 2 and the centerline of measurement axis 3 21 00 mm or 0 827 inch Displacement measurement axis 3 Pitch radian 21 00 mm or 0 827 inch For the Agilent 10736A or Agilent 10736A 001 interferometer pitch rotation about the Y axis can be measured using data returned from measurement axis 1 and measurement axis 3 and the vertical offset between the centerline of measurement axis 1 and the centerline of measurement axis 3 21 00 mm or 0 827 inc
211. er and Optics User s Manual Vol Il Agilent Z4420B and Agilent Z4421B Five Axis Interferometers 34 Input Beam n o Oo N eo 5 1 Primary Beam 13 13 30 Secondary E 3X M5 Captive Screws Figure 260 Agilent 24421B Five Axis Interferometer dimensions Laser and Optics User s Manual Vol II 685 34 Agilent Z4420B and Agilent Z4421B Five Axis Interferometers Agilent Z4421B glass dimensions A Figure 261 Agilent 24421B glass dimensions 686 Laser and Optics User s Manual Vol Il Agilent Laser and Optics User s Manual Volume II 35 Receivers General 688 Comparison of Agilent Laser Receiver Families 688 Agilent 10780C and Agilent 10780F Receivers 691 Operation 702 Agilent E1708A Remote Dynamic Receiver 705 Agilent E1709A Remote High Performance Receiver 714 Agilent E1709A relationship to Agilent E1708A 720 RE Agilent Technologies 687 35 Receivers General One receiver is required for each measurement or wavelength tracker axis The receiver converts the Doppler component of the laser beam from an interferometer or wavelength tracker into an electrical signal for the measurement electronics This chapter describes the following receivers Agilent 10780C Receiver Agilent 10780F Remote Receiver Agilent E1708A Remote Dynamic Receiver and Agilent E1709A Remote High Performance Receiver
212. erence mirror must also be aligned Before discussing the alignment procedure for this interferometer details on beam locations and reference mirror mounting will be covered Configurations Two configurations are available for the Agilent 10715A Differential Interferometer allowing flexibility in optical layout of a measurement system They are Standard Turned 10715 001 Figure 144 shows the location of the measurement and reference beams for the standard configuration using input aperture B The beams are switched if input aperture A is used STANDARD AGILENT 10715A BEAM LOCATIONS Measurement Reference Beam Beam fw je 8 1 mm 0 32 SERA CN P Reference Beam Measurement Beam 12 7 mm 0 5 Figure 144 Beam locations for standard Agilent 10715A Differential Interferometer Laser and Optics User s Manual Vol II Agilent 10715A Differential Interferometer 22 Figure 145 shows the location of the measurement and reference beams for the turned configuration Agilent 10715A 001 using input aperture B The beams are switched if input aperture A is used AGILENT 10715A 001 TURNED CONFIGURATION BEAM LOCATIONS Measurement Reference Reference Measurement Beam Beam Figure 145 Beam locations for Agilent 10715A 001 Turned Configuration Reference mirror mounting The Agilent 10715A interferometer is supplie
213. erferometer by 90 degrees The configuration of the beam directing optics between the laser head and the interferometer may effectively rotate the laser beam changing which laser frequency polarization is in which interferometer path and thus the direction sense of the interferometer Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 Air Deadpath The air deadpath is defined as the difference between the reference and measurement air paths when the stage is at its zero position This difference must be compensated in most applications For the Agilent 10721A interferometer zero deadpath the condition in which the measurement beam path length and the reference beam path length are equal does not occur when the reference and measurement mirrors are coplanar Because the reference beam travels 19 05 mm 0 750 inch 30 6 mm 1 025 inches for option C01 further through air inside the interferometer than the measurement beam does the zero deadpath condition for the Agilent 10721A interferometer occurs when the measurement mirror is 19 05 mm 30 6 mm for option C01 farther from the interferometer housing than the reference mirror is The consequences of this are discussed in more detail under the Operation section later in this chapter Reference and measurement mirror requirements A key feature of the Agilent 10721A interferometer is its ability to make relative
214. ers Figure 187 Measuring Using Agilent 10735A and Agilent 10736A 001 Interferometers The angular measurements made by any of these interferometers can be calculated by taking the arctangent of the differences between two linear measurements involved divided by their separation THETA arctan This method for determining angle is described in more detail under the Electronic yaw calculation method and Optical yaw calculation method subsections under the Three axis measurement system using discrete plane mirror interferometers X Y YAW section in Chapter 3 System Design Considerations in Volume I of this manual 560 Laser and Optics User s Manual Vol II Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 X Y stage These interferometers are well suited for X Y stage or multiaxis applications such as lithography equipment One Agilent 10735A or Agilent 10736A interferometer used with any other one of these three axis interferometers can measure all X Y pitch roll and yaw motions of a stage In these applications the measurement mirrors are attached to the X Y stage Laser and Optics User s Manual Vol II 561 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers MEASUREMENT PATH fp 4 m Agilent 10735A and Agilent 10736A v Reference Three Axis Interferometers Miner Axis 1 m m um um 1 7 7 E EE EE Do
215. eter system These splitters require user supplied mounts and have a clear apeture of 29 mm x19 mm The Agilent E1833C 15 Bare Beam Splitter nominally reflects 15 of the laser beam intensity perpendicular to the original beam direction while the 85 continues through the optic The Agilent E1833E 33 6 Bare Beam Splitter nominally reflects one third or 33 of the laser beam intensity perpendicular to the original beam direction while the remaining two thirds continues through the optic The Agilent E1833G 50 Bare Beam Splitter nominally reflects 50 of the laser beam intensity perpendicular to the original beam direction while the remaining 50 continues through the optic The Agilent E1833J 67 Bare Beam Splitter nominally reflects 67 of the laser beam intensity perpendicular to the original beam direction while the remaining 33 continues through the optic The Agilent E1833M 100 Bare Beam Splitter beam bender nominally reflects 100 of the laser beam intensity perpendicular to the original beam To preserve polarization see Preventing Depolarization on page 362 To preserve efficiency see Note on page 362 Laser and Optics User s Manual Vol II 377 17 Beam Directing Optics Agilent E1833C E G J M Bare Beam Splitter Specifications Use Split a laser beam having a diameter up to 9 mm nominal This beam splitter requires a user supplied mount This optic can be made vacuum compatible Dimensions See drawings b
216. extended electronically by 32X to give 0 05 arc second resolution The concept of optical subtraction and a method to calibrate the angle measurement with high accuracy are described in Chapter 4 System Installation and Alignment in Volume I of this manual Both types of measurements using the Agilent 10719A interferometer are illustrated in Figure 171 Laser and Optics User s Manual Vol II 511 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 512 LINEAR ANGULAR MEASUREMENT FOR AGILENT 10719A REAR VIEW Figure 171 Agilent 10719A Interferometer Measurements Multiaxis configurations The maximum number of independent axes of displacement that can be measured using one laser head depends on 1 the measurement system electronics 2 the strength of the beam from the laser head 3 the sensitivity of the receivers used 4 linear and angular range to be measured and 5 the reflectivity and wavefront of the plane mirrors used for the reference and measurement mirrors By using the proper combination of beam splitters beam benders and interferometers the measurement axes can be established with a minimum number of components The following paragraphs provide examples of routing the laser beam for multiaxis measurement configurations Agilent 10719A and Agilent 10721A interferometers can be used in combination to create multiaxis stage measurements of one to six axes Some
217. f the stage that is allowed to move in the Y direction and not in the X direction These constraints prevent two axis measurements from being made on the same part of the stage Further there will be some geometry error in the system if it is not perfectly rigid The Agilent 10706A Plane Mirror Interferometer uses a flat mirror reflector For X Y stage applications the user must provide the mirror s For single axis applications the Agilent 10724A Plane Mirror Reflector may be used This device is described more fully in Chapter 36 Accessories of this manual 424 Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 Agilent 10706A Plane Mirror Interferometer Figure 119 Agilent 10706A Plane Mirror Interferometer Work Surface Plane Laser Beam Laser Beam Plane Mirror Interferometer Be Plane Mirror Interferometer NC Ve Receiver X Axis ES Receiver Agilent 5517C Laser Head Plane Mirrors Figure 120 XY Stage measurement with Agilent 10706A Plane Mirror Interferometer Laser and Optics User s Manual Vol II 425 20 Agilent 10706A Plane Mirror Interferometer 426 In an Agilent 10706A interferometer the measurement beam travels twice between the interferometer and the plane mirror thus the resolution of the measurement is twice that of the linear or single beam interferometers With 32X electronic resolution extension this results
218. fA J M fat2AfA fata lt p lt q Y Measurement Plane Mirror Agilent 10706A Reflector Plane Mirror Interferometer LEGEND a fA m m m p f5 lt gt f4 and fg f r Rounded corners are used to help you trace paths Figure 122 Differential measurements with the Agilent 10706A Agilent 10706A Plane Mirror Interferometer Reference Cube corner New Location Plane Mirror Converter x Turned Configuration Figure 123 Differential measurements with the Agilent 10706A Laser and Optics User s Manual Vol II 429 20 Agilent 10706A Plane Mirror Interferometer XA xis Plane Mirror Interferometer X Y STAGE X Y XA xis MIRRORS Receiver XA xis Laser Beam Alignment A Laser A A PIN 10706 60001 YA xis r4 Laser Beam xis D gt gt EA Plane Mirror 50 TT Interferometer Ri Alignment T arget ecelver P N 40702 60001 Test Point Voltmeter Figure 124 Agilent 10706A Plane Mirror Interferometer alignment Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting aligning and securely locking the Agilent 10706A interferometer in position Since the mount allows some tilt and yaw adjustment the need for custom fixturing is minimized The mount allows the interferometer to be rotated about its centerline simplifying installat
219. ferometers and Agilent 10703A and 10767 Retroreflectors Agilent 10766A Agilent 10767A Linear Interferometer Linear Retroreflector Figure 103 Agilent 10766A Linear Interferometer and Agilent 10767A Linear Retroreflector Agilent 10722A Plane Mirror Converter Figure 104 Agilent 10722A Plane Mirror Converter 400 Laser and Optics User s Manual Vol II Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Laser Beam Path The beam from the laser head is split at the surface of a polarizing beam splitter One frequency fp is reflected to the reference cube corner mounted on the housing Figure 105 See the Measurement Direction Sense section in Chapter 5 Measurement Optics General Information for explanation of fA and fp beam paths The second frequency f is sent to the Agilent 10703A Retroreflector and returned parallel to but displaced from the outgoing beam Both frequencies then recombine with the polarizing beam splitter and travel back along a common axis to the photodetector in the receiver One frequency includes a Doppler frequency shift whenever there is a relative motion between the Agilent 10703A Retroreflector and the Agilent 10702A Linear Interferometer Rotating the interferometer 90 about the axis of the input beam switches which optical frequency is in the measurement path thus changing the direction sense REFERENCE and MEASUREMENT PATHS f
220. fully recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly i e AD AT 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable beam displacement due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 10 C to 21 8 x 10 C provided the feet are secured with the specified bolt torque value Resonant Frequencies Ball and Spring Suspension The laser beam Manipulator comprises a very stiff nonlinear spring mass system At shock levels below the shock damage threshold it is not possible to excite a free vibration resonance in the ball suspension This is due to three phenomena 1 Prestress stiffening due to compression of the springs in final assembly 2 Stiffening due to geometrical deformation of the beam springs as a result of the compressive load 3 Frictional damping between ball and springs Laser and Optics User s Manual Vol II 381 17 382 Beam Directing Optics Resonant Frequencies Continued Ball and Spring Suspension Continued The natural resonance of the spring mass system 350 Hz is completely supressed by these effects The first FFT measured resonance in the as
221. fund of the purchase price upon prompt return of the product Agilent products may contain remanufactured parts equivalent to new in performance or may have been subjected to incidental use The warranty period begins on the date of delivery or on the date of installation if installed by Agilent If customer schedules or delays Agilent installation more than 30 days after delivery warranty begins on the 31st day from delivery Warranty does not apply to defects resulting from a improper or inadequate maintenance or calibration b software interfacing parts or supplies not supplied by Agilent c unauthorized modification or misuse d operation outside of the published environmental specifications for the product or e improper site preparation or maintenance TO THE EXTENT ALLOWED BY LOCAL LAW THE ABOVE WARRANTIES ARE EXCLUSIVE AND NO OTHER WARRANTY OR CONDITION WHETHER WRITTEN OR ORAL IS EXPRESSED OR IMPLIED AND AGILENT SPECIFICALLY DISCLAIMS ANY IMPLIED WARRANTIES OR CONDITIONS OF MERCHANTABILITY SATISFACTORY QUALITY AND FITNESS FOR A PARTICULAR PURPOSE Agilent will be liable for damage to tangible property per incident up to the greater of 300 000 or the actual amount paid for the product that is the subject of the claim and for damages for bodily injury or death to the extent that all such damages are determined by a court of competent jurisdiction to have been directly caused by a defect
222. g Adjustment Lever and adapter at 625 mm port Yaw 1 using Adjustment Lever only at 9 mm port Pitch 0 7 using Adjustment Lever only at 9mm port Angular Adjustment Sensitivity and Beam Steering Resolution 10 15 uradians better with operator patience Thermal Drift With the Manipulator feet on a horizontal surface AP Pitch 5 C itcn u p AY Y 0 5 urad per C aw AT u p Drift of beam steering angle can occur in the presence of thermal gradients in the Manipulator assembly This drift is transitory and alignment is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housin Beam angle steering alignment is recoverable over a slow environmental temperature change of 20 C provided there are no sharp thermal gradients within the assembly i e AT At 20 C hr Housing to Mounting Plate The Manipulator feet are designed not to slip due to differential thermal expansion between the stainless steel housing and an Invar mounting plate in the presence of an environmental temperature change of 20 C Thus there should be no unrecoverable misalignment due to foot slippage when mounted to any material whose CTE is in the range of 1 6 x 108 C to 21 8 x 108 C provided the feet are secured with the specified bolt torque value Laser and Optics User s Manual Vol II 383 17 384 Beam Directing Optics Resonant Frequencies Ball Spring
223. g Interface Fasteners Surface Profile Surface Finish Beam Diameter M5 x 0 8 Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible Resolution Optical M4 Linear 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension Angular yaw or roll See NGI Angular Resolution section in Chapter 6 Next Generation Interferometers General Information in Volume of this manual for explanation of angular resolution Thermal Drift due to Glass Path Imbalance lt 10nm C Non linearity Error t1nm Measure Point Tolerance Mean 0 15 mm Deviation 0 05 mm Input Beam Cone Angle lt 1 mrad IBCA Beam Parallelism See Figure 254 on page 678 Axis 1 Axis 2 lt 25 urad Axis 2 Axis 4 lt 25 urad Axis 1 Axis 3 lt 25 urad Axis 3 Axis 4 lt 25 urad Axis 3 Axis 5 lt 100 urad Optical Efficiency input power axis output power Typical for Axis 5 796 Worst Case for Axis 5 596 Typical for all axes except 1096 Axis 5 Worst Case for all axes 7 except Axis 5 Operating Temperature Range 19 to 26 C Measurement and Reference Mirror Recommendations Reflectivity Flatness gt 92 2 20 Interferometer allows 7 5 mm 1 2 2 Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and
224. g on the distance traveled gt gt If motion of the linear interferometer is required the Agilent 10702A 001 Linear Interferometer withWindows should be used This provides special wedge windows which makes the outgoing beam parallel to the incoming beam This allows motion by either the Agilent 10703A Retroreflector or the Agilent 10702A 001 Linear Interferometer Figure 101 Agilent 10702A 001 Linear Interferometer with Windows Laser and Optics User s Manual Vol Il Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 THREE AXIS MACHINE TOOL INSTALLATION 10703A Retroreflector Attached to MEASUREMENT 1 Spindle Head Saddle Movement moving 10780C Receiver 10702A Linear Interferometer fixed 10703A Retroreflector Attached to Saddle moving 10702A Linear Interferometer fixed 10780C Receiver Power P Reference 2 5517C Laser MEASUREMENT 2 Head Movement 10707A E Beam Bender 2 a PS 10700A 33 Splitter 10701A 50 Splitter 10703A Retroreflector Attached to Table moving 10707A Beam Benders Attached to Saddle MEASUREMENT 3 Table Movement 10702A Linear Interferometer Attached to Saddle 8 10780C Receiver Attached to Saddle Figure 102 Three axis machine tool Installation Laser and Optics User s Manual Vol II 399 18 Agilent 10702A and 10766A Linear Inter
225. ght or hanging position Agilent Z4420B Five Axis Interferometer The Agilent Z4420B Five Axis Interferometer produces a five axis set of beams used for measurements of translation along or rotation around an axis of motion see figures 252 and 253 676 Laser and Optics User s Manual Vol Il Agilent 24420 and Agilent Z4421B Five Axis Interferometers 34 Figure 252 Agilent 24420B Five Axis Interferometer Figure 253 Agilent 24420B Five Axis Interferometer beams shown Laser and Optics User s Manual Vol II 677 34 Agilent Z4420B and Agilent Z4421B Five Axis Interferometers Agilent 24420 beam pattern spacing and labels Figure 254 shows the beam pattern and spacing of the Agilent Z4420B interferometer viewing from the stage to the interferometer position 78 M Axis 5 _ e e a o N E Ais e e ris 8 E Axis 2 Axis 1 ne T E Primary Beam 30 113113113 secondary Beam Figure 254 Agilent 24420 beam labels and relative positions 678 Laser and Optics User s Manual Vol 11 Agilent 24420B and Agilent Z4421B Five Axis Interferometers 34 Agilent 24420 Five Axis Interferometer specifications Weight 3 13 kg 6 9 lbs Dimensions See Figure 255 on page 680 Glass Dimensions See Figure 256 on page 681 Materials Baseplate Passivated 416 Stainless Steel Coefficient of Thermal Expansion 9 9 x 10 Optics BK 7 Natural Frequency 1kHz Mountin
226. gilent 10884B has no power switch As soon as it is plugged in it will provide output power and the LED indicator will light When making the connections shown in Figure 2 the last connection you should make is plugging the line cord from the power supply into the power line 1 Connect the equipment as shown in Figure 309 2 Plug the ac line cord into an operating ac line outlet Agilent 10886A PC Compensation Board gilent 10751A B ir Sensor Agilent 5518A Air Sensor 5 Laser Head Agilent P N 10751 60209 A Adapter Cable Mat l Temp x Agilent 10757A B C Agilent 10887A Material Temperature Agilent P N PC Calibrator DS Sensor 10757 60306 Board m Adapter Cable ES Laser Head AC Line Power Input Indicator 110 60 Hz Agilent 10883A B C Laser Head Cable Remote Agilent P N 05508 60212 Agilent 10884B Adapter Cable Power Supply Agilent P N 05508 60021 Remote Control Figure 309 Installing the 10884B and 10883A B C 766 Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10884B Power Supply Specifications and Characteristics Dimensions see figure below Input 110 240 Vac 47 63 Hz 1 9A Output 65W max Voltage Output 45 Vdc at3 A 15 Vdc at 0 8 A 5 Vdc at 6 A not used
227. ginning with the Alignment principles section for additional information about aligning your measurement setup Laser and Optics User s Manual Vol Il Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Installing and aligning an interferometer CAUTION In performing the procedure below perform only the removal disassembly or assembly steps described Do not remove or take apart anything you are not instructed Do not touch any glass surface or allow it to be scratched dirtied or otherwise harmed CAUTION Do not touch any glass surface of any optic For cleaning instructions see Chapter 7 Maintenance in Volume of this manual Perform this procedure for each interferometer in your measurement system This procedure assumes that the laser head and all optics except the interferometer s have been installed and that the appropriate beam path s to the stage mirror s have been established as described in Chapter 4 System Installation and Alignment in Volume I of this manual The procedure has these major parts 1 a A Co N Removing the receiver assembly Removing the high stability adapter reference mirror Aligning the measurement beam path Aligning the reference beam path Comparing beam path alignments Removing the receiver assembly To remove the receiver assembly refer to figures 194 and 201 1 Use the 5 64 inch hex key to remove the two cap screws that hold t
228. gnment in Volume I of this manual for alignment instructions Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device The basic optical resolution using a linear interferometer is one half wavelength 0 316 micron 12 26 microinches Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897C and 108984 is usually available Interferometer Fundamental Optical System Resolution 1 System Resolution 2 Resolution see NOTE see NOTE Agilent 10705A A 2 316 5 nm 12 5 pin A 64 10 0 nm 0 4 pin A 512 1 2 nm 0 047 pin The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on using 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics Laser and Optics User s Manual Vol II 419 19 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector Agilent 10705A Single Beam Interferometer Specifications Dimensions see figure below Weight 85 5 grams 3 0 ounces Materia
229. h Displacement measurement axis 3 Piteh radian 21 00 mm or 0 827 inch 574 Laser and Optics User s Manual Vol Il Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 Yaw For the Agilent 10735A or Agilent 10736A interferometer yaw rotation about the Z axis can be measured as the difference between the data returned from measurement axis 1 and measurement axis 2 divided by the distance between them 26 22 mm or 1 032 inches measurement axis 1 measurement axis 2 Yaw radian 26 22 mm or 1 032 inch Because its measurement axis 2 is bent away from the path of its measurement axis 1 and measurement axis 8 the Agilent 10736A 001 interferometer cannot make a yaw measurement Error General A true zero deadpath condition cannot be achieved with these interferometers because of the interferometer s design For all measurement paths except the bent path of the Agilent 10736A 001 interferometer zero deadpath requires that the measurement reflector would have to be inside the interferometer 6 59 mm 0 259 inch behind the interferometer s measurement face To determine the true deadpath distance 1 Move the measurement optics to their measurement zero position 2 Measure the distance between interferometer s measurement face and measurement mirror 3 Add 6 59 mm 0 259 inch to the distance you measured in step 2 Use this distance for
230. hapter you should also read about the Agilent 10706A interferometer in Chapter 20 of this manual Laser beam paths 446 Figure 134 shows the optical schematic for the Agilent 10706B High Stability Plane Mirror Interferometer Note that the usual reference beam cube corner see the Agilent 10706A laser beam path schematic in Chapter 20 of this manual has been replaced with a quarter wave plate with a high reflectance coating on the back In this configuration the measurement and reference beams have the same optical path length through glass which virtually eliminates measurement errors due to the temperature changes in the optic The remaining thermal errors are due to mechanical tolerances in the geometry of the device Typically the Agilent 10706B exhibits drift of 0 04 micron per degree C of optics temperature change Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 Turned Configuration Straight Through Configuration Agilent 10706B High Stability Plane Mirror Interferometer Figure 133 Agilent 10706B High Stability Plane Mirror Interferometer Laser and Optics User s Manual Vol II 447 21 Agilent 10706B High Stability Plane Mirror Interferometer MEASUREMENT PATH fA High Reflector _ Quarter wave Plates fA fa r Y fat 2Af 1 2 1 fyatAf lt lt q A I I nent Agilent 10706B High Stability Plane Mirror Interferometer
231. has three apertures which are not interchangeable The middle aperture must be used for the input beam The outer two apertures are for the output beams Both output apertures are equipped with mounting pins for the Agilent 10780F fiber optic sensor head therefore either aperture can be used for the output beam Direction sense The Agilent 10721A interferometer direction sense depends fundamentally on which laser frequency is in its measurement path This is affected by the mounting orientations of both the interferometer and the laser head In most cases the Agilent 10721A interferometer will be oriented upright that is with its top and bottom mounting surfaces horizontal In this orientation the internal polarizing beam splitter will send the vertical polarization into the measurement beam path and the horizontal polarization into the reference beam path As mentioned in Chapter 16 Laser Heads of this manual the Agilent 5517C 003 Laser Head produces f its lower frequency with horizontal polarization and f its higher frequency with vertical polarization Thus an Agilent 5517C 003 with its mounting plane horizontal will direct f into the reference path and f into the measurement path This configuration will result in the fringe counts DECREASING when the measurement mirror moves AWAY from the interferometer The direction sense will change sign for any configuration which rotates either the laser head or the int
232. he receiver assembly to the interferometer Set the screws in a clean safe place where they will not be lost Remove the receiver assembly from the interferometer Set the receiver assembly in a clean safe place Laser and Optics User s Manual Vol II 597 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Removing the high stability adapter reference mirror To remove the high stability adapter refer to figures 194 and 201 and 1 Use the 5 64 inch hex key to remove the two cap screws with springs that hold the high stability adapter reference mirror to the interferometer Set the screws in a clean safe place where they will not be lost 2 Remove the high stability adapter reference mirror from the interferometer Set the high stability adapter in a clean safe place CENTER ON ONE MEASUREMENT BEAM ALIGNMENT AID 10706 60001 A MEASUREMENT BEAM Figure 201 Agilent 10737L Compact Three Axis Interferometer with Agilent 10706 60001 Alignment Aid From here on this procedure assumes that the interferometer is installed on an Agilent adjustable mount 598 Laser and Optics User s Manual Vol II Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Aligning the measurement beam path 1 Remove the receiver assembly and high stability adapter as described in the respective procedures above 2 Install the interferometer so the beam from the laser source enters its input a
233. he laser and mirror perform steps 16 through 18 16 Remove the receiver alignment target and plane mirror interferometer alignment target and select the large aperture of the laser head Do not remove the plane mirror interferometer alignment aid on the output side of the plane mirror interferometer 17 With a fast responding voltmeter attached to the receiver s test point pitch and yaw the plane mirror interferometer until a signal is received on the receiver The voltmeter will suddenly jump to some value greater than 0 25 volt This is a critical adjustment and may initially require great care to achieve the desired result 18 Adjust the plane mirror interferometer in pitch and yaw until the voltmeter reading which may be fluctuating is maximum Now carefully readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt The alignment should be adjusted such that the voltage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded This aligns the laser beam to within 1 2 arc minutes to the direction of travel resulting in a cosine error of approximately 0 05 ppm That is 0 05 micron per meter of travel 0 05 microinch per inch of cosine error 19 Fasten the plane mirror interferometer X axis securely preserving the alignment 20 Monitor the voltage reading along the com
234. hen using adjustable mounts ensure that the adjustment capability does not introduce creep or instability into the mounting system In some applications a combined approach may be best For example perhaps a platform having an accurate fixed height can be used in conjunction with an adjustment for yaw and side to side translation Whatever approach is used the Agilent 10719A interferometer should always be held rigidly and stably once it has been installed Pre installation checklist 524 In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Supply plane mirror reflectors See Chapter 12 Accuracy and Repeatability or Agilent 10719A and 10719 02 One Axis Differential Interferometer Specifications section at the end of this chapter for mirror specifications Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in this manual Supply suitable moun
235. hite paper or card stock you can use to check for the presence of the laser beam by making it visible to you Initial angular alignment To achieve initial angular alignment of the input beam 1 Adjust the laser head turret to select the small beam output 2 Place a gage block over the interferometer s input aperture Hold the gage block in place by hand or with a rubber band 3 Adjust the angle of the input beam until the small beam from the laser head is autoreflected 4 Adjust the laser head turret to select the large beam output Laser and Optics User s Manual Vol Il Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 5 Center the beam from the laser head on the interferometer s input aperture by translating the input beam 6 Change back to the small beam aperture at the laser head 7 Place a magnetic alignment aid Agilent Part Number 10706 60001 over the interferometer s measurement axis 1 primary output aperture See Figure 189 earlier in this chapter 8 Adjust the input beam angle such that the measurement axis 1 primary beam is autoreflected by the stage mirror You may have to reduce ambient lighting in order to be able to see the laser beam autoreflection back at the laser head You can do this by providing a temporary hood over the laser head output 9 Once the autoreflection described above has been achieved change to the large aperture on the laser head and check to see that the input
236. hole transmits the first pass of the measurement beam to the measurement mirror Remove the opaque material from between the plane mirror interferometer and the mirror ALIGNMENT TARGET FOR RECEIVER Laser Beam Receiver Alignment Target Position 2 Receiver Alignment Receiver From Interferometer Figure 126 Receiver and receiver alignment target 434 Laser and Optics User s Manual Vol II Agilent 10706A Plane Mirror Interferometer 20 4 The laser beam will now exit the interferometer and be reflected by the mirror back upon itself into the interferometer Pitch and yaw the plane mirror interferometer until the beam reflected from the mirror returns upon itself through the plane mirror interferometer and back to the small aperture of the laser head Slight lateral translations of the plane mirror interferometer may be required to ensure that the reference beam is still centered on the receiver alignment target If the distance between the mirror and the laser head is at least 0 5 meter 20 inches the formula below determines the cosine error based on the offset of the return beam at the laser head where E is the cosine error value S is the offset of the returning beam in micrometers or microinches D is the measured displacement distance in millimeters or inches For example if the distance measured is 600 mm and it results in a 1 2 mm 1200 micrometer offset cosine error E will be 1200 E
237. ibes the step by step alignment of an axis of straightness optics Figure 213 shows the measurement setup with only the straightness axis shown 1 With all optical components in place visually align the laser beam parallel to the axis of travel This may be done by blocking the laser beam with a piece of paper and moving this paper along the axis of travel while watching the beam creative to the axis Align the laser beam even closer to the axis of travel This may be done by using the Autoreflection or Gunsight alignment method Instructions for these methods are presented after this procedure Refer to the basic explanation of this method in Chapter 4 System Installation and Alignment in Volume I of this manual Remove the interferometer from its mount if not already done Select the large aperture on the laser head by rotating the front turret The laser beam should strike the center of the reflector When properly centered the laser beam will be reflected back as two semicircles See Figure 216 Adjust the Straightness Reflector angularly if using the Straightness Reflector Mount adjust its micrometers until the reflected semicircular dots are centered about the aperture of the beam splitter Place a piece of cardboard with a hole cut in the middle between the beam splitter and the reflector This will help locate these dots The mirror axis of the reflector the optical straight edge should now be aligned paral
238. ications 374 10725B 4 Beam Splitter 375 10725B 4 Beam Splitter Specifications 376 10725C 15 375 10725C 15 Beam Splitter 375 10726A Beam Bender 373 10726A Beam Bender Specifications 374 10728A Plane Mirror 754 10728A Plane Mirror specifications 754 10735A Three Axis Interferometer Specifications 576 10735C 15 Beam Splitter 376 10736A Three Axis Interferometer 556 10736A Three Axis Interferometer and Agilent 10736A 001 Three Axis Interferometer with Beam Bender Specifications 578 10737L R Compact Three Axis Interferometer 582 10737L R Compact Three Axis Interferometer Specifications 605 10753B laser tripod 749 10759A Footspacing Kit 749 10766A Linear Interferometer 396 10766A Linear Interferometer Specifications 410 10767A Retroreflector 396 10767A Retroreflector Specifications 411 10770A Angular Interferometer 608 10770A Angular Interferometer Specifications 615 10771A Angular Reflector 608 10771A Angular Reflector Specifications 616 10772A Turning Mirror 755 10772A Turning Mirror Specifications 756 10772A Turning Mirror with Mount 618 10773A Flatness Mirror 756 10773A Flatness Mirror Specifications 757 10774A Short Range Straightness Optics 618 10774A Short Range Straightness Optics Specifications 633 10775A Long Range Straightness Optics 618 10775A Long Range Straightness Optics Specifications 633 10776 67001 Straightness Retrorelector specifications 759 1
239. ics User s Manual Vol II 611 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Moving Dot Method The principal steps used for the moving dot method of alignment are 1 2 3 The laser head and optics are mounted in their desired locations Select the small beam aperture on the laser head With the reflector as close as possible to the interferometer adjust any component laser head interferometer or reflector to center the measurement beams on the receiver aperture Placing a piece of translucent tape over the receiver lens will help in observing the impinging beams CAUTION Take care that you do not let the tape stick to any optical surface 4 5 612 Move the reflector away from the interferometer If the laser beam is not parallel to the axis of travel the measurement beams will begin to move away from their original position on the receiver aperture The impinging beams will move until the beam is cut off by the edge of the interferometer s aperture Stop moving the reflector before the beam is blocked or when the end of travel is reached Figure 207 illustrates this situation Adjust the laser beam by angularly moving the beam until the dots again overlap at the receiver This adjustment of the laser beam is accomplished by moving the laser head beam bender or interferometer depending on the optical layout Some translations of either the laser head or interferometer m
240. igure 191 on the next page Materials Used Housing Invar and aluminum Optics Optical grade glass Adhesives Vacuum grade Axis 3 Linear axes which provide linear X pitch and yaw or linear Y roll or yaw Available Beam Size 3 6 or 9 mm Thermal Drift Coefficient Average Axes 1 amp 2 40 nm 1 6 uin C Axis 3 50 nm 2 0 pin C Non linearity Error 1 nm for each axis Resolution Optical A 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 24 urad 0 049 arc sec using X32 electronics 0 029 urad 0 0061 arc sec using X256 electronics Yaw 0 19 urad 0 039 arc sec X32 0 024 urad 0 0049 arc sec X256 Angular Range Pitch or roll Yaw for 6 mm beam Yaw for 9 mm beam 576 at distance 150 mm 2 mrad 6 8 arc min 2 mrad 6 8 arc min 3 mrad 10 2 arc min at distance 300 mm 1 mrad 3 4 arc min 1 mrad 3 4 arc min 1 5 mrad 5 1 arc min Parallelism Measurement beams Axes 1 amp 2 40 urad 8 arc sec Axes 1 amp 3 50 urad 11 arc sec Optical Efficiency output beam total input beam Average 18 Worst Case 10 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation procedure requires three referenced pins mounted onto a referenced surface Inter axis Alignment All internal optics are referenced to the mounting surface a
241. in horizontal plane with an Agilent 10702A Linear Interferometer mounted with labels facing up and down see Figure 105 Interchanging f and f perhaps by rotating the interferometer 90 in this example will result in the fringe counts DECREASING The optical schematic for the interferometers in Figure 105 shows the reference and measurement laser beam paths for these interferometers As with the laser heads when the interferometers are rotated 90 the measurement direction sense will change This rotation causes switching of frequencies in the measurement path Configuration effects Many of the distance measuring interferometers can be configured to turn the beam at right angles When configuring the linear single beam and plane mirror interferometers to turn the beam the measurement direction sense will be changed This is because the measurement reference paths are switched on the interferometers therefore changing the direction sense Moving interferometer instead of reflector When moving the interferometer instead of the measurement reflector is required the Agilent 10702A 001 or Agilent 10766A interferometer should be used In practice for alignment reasons these are two of the few interferometers that can be moved while making measurements For a detailed explanation of the beam alignment problems involved with a moving interferometer setup see Figure 101 If a right angle beam bend is made through the Agilent 1
242. in the system receives the optimum signal strength in the intended application Orientation Note that although illustrations may show an interferometer in one orientation you may orient the unit as required by your measurement application vertically horizontally or upside down Laser and Optics User s Manual Vol II 589 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers AGILENT 10737L THREE AXIS INTERFEROMETER Interferometer 14 38 mm _ Input Face 0 566 68 92 Axis No 1 2 71 Output T 19mm MP4 0 283 MP2 pare ioe See Note 1 See ER Note 1 Input for pm all axes gt x amp FROM T LASER Bottom of A HEAD interferometer A as shown in specification 10 11 mm 24 49 mm Axis No 3 drawing 0 39 0 964 Output MP3 20 90 mm 17 3 mm See Notes 1 amp 2 0 83 0 68 Laser Beam turns left viewed from top e lt MP Measurement Point lt Darker Beam Indicates Primary Measurement beam o E GENERAL NOTES 1 For Each Axis 9 Secondary Measurement beam lt 2 Drawing not to scale From Laser Head Figure 199A Agilent 10737L Interferometer beam patterns 590 Laser and Optics User s Manual Vol II Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 AGILENT 10737R THREE AXIS INTERFEROMETER
243. ing hardware which is required to fasten it to its adjustable mount Adapter plate Installation Alignment The Agilent 10706A 080 Adapter Plate adds an easy mounting surface to the interferometer for mounting the remote lens assemblies of the Agilent 10780F Agilent E1708A and Agilent E1709A remote receivers directly to the interferometer Refer to the Agilent 10706A interferometer Installation information in Chapter 20 of this manual The alignment procedure for the Agilent 10706B High Stability Plane Mirror Interferometer is similar to that for the Agilent 10706A except for an additional alignment of the High Stability Adapter Laser and Optics User s Manual Vol II 449 21 Agilent 10706B High Stability Plane Mirror Interferometer The alignment procedure follows the instructions for reconfiguring the Agilent 10706B interferometer and using the alignment aids which begin below Straight Through Configuration The Agilent 10706B High Stability Plane Mirror Interferometer is shipped in the straight through configuration as shown in Figure 135 Note the location of the plane mirror converter and high stability adapter with respect to the graphics on the label Turned Configuration 450 The Agilent 10706B interferometer can be configured to turn the beam to reduce the number of beam bending optics as shown in Figure 135 This is done by interchanging the high stability adapter and the plane mirror converter an
244. ing in a cosine error of approximately 0 05 ppm That is 0 05 micron per meter of travel 0 05 microinch per inch of cosine error 8 10 11 12 13 14 15 Fasten the plane mirror interferometer Y axis securely preserving the alignment Monitor the voltage reading along the complete travel of the stage Y axis The voltage should not jump up to the previous maximum voltage reading If the voltage does jump readjust the interferometer until the voltage reading suddenly drops back down to about 0 3 volt Remove the plane mirror interferometer alignment target and alignment aid The reference beam and the measurement beam must be centered on the receiver alignment target Remove the receiver alignment aids and rotate the turret on the laser head to the large aperture Verify that the LED indicator on the receiver is lighted and the voltage at the receiver test point is between 0 6 and 1 3 Vdc Steps 12 through 20 constitute the X axis alignment With the laser head turret in the large aperture position place the plane mirror interferometer alignment target on the laser head side of the X axis plane mirror interferometer and the receiver alignment target on the receiver Figure 126 position 1 Place a piece of opaque material between the X axis plane mirror interferometer and the mirror Pitch and yaw the 50 beam splitter until the laser beam enters one hole of the plane mirror interferometer alignment target and exits
245. ion Fasteners The Agilent 10706A interferometer is supplied with English mounting hardware which is required to fasten it to its adjustable mount 430 Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 Adapter plate The Agilent 10706A 080 Adapter Plate adds an easy mounting surface to the interferometer for mounting the remote lens assemblies of the Agilent 10780F Agilent E1708A and Agilent E1709A remote receivers directly to the interferometer Installation Pre installation check In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability in Volume I of this manual complete the following items before installing a laser positioning system into any application Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual You must supply the plane mirror reflectors if the Agilent 10724A Plane Mirror Reflector will not work for your installation See Chapter 12 Accuracy and Repeatability Chapter 17 Beam Directing Optics or Chapter 5 Measurement Optics General Information in Volume I of this manual for mirror specifications Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapte
246. ion sense see the Effect of optics on measurement direction sense section of Chapter 3 System Design Considerations in Volume of this manual If the High Stability Adapter is installed in the wrong location the interferometer will have worse thermal stability Laser and Optics User s Manual Vol II 451 21 452 Agilent 10706B High Stability Plane Mirror Interferometer Alignment aids The Agilent 10706B High Stability Plane Mirror Interferometer is supplied with the alignment aids shown in Figure 136 Alignment Aid Agilent Part Number 10706 60001 Alignment Target Agilent Part Number 10702 60001 Alignment Aid Agilent Part Number 10706 60202 The first two of these alignment aids are the same as those used on the Agilent 10706A Plane Mirror Interferometer Refer to the Alignment Aids for the Agilent 10706A Plane Mirror Interferometer in Chapter 20 for a further discussion of their use Alignment Aid Agilent Part Number 10706 60202 facilitates autoreflection alignment for the high stability adapter to achieve minimal thermal drift It contains a quarter wave plate to reflect the reference beam back on itself and return it to the laser head without offset Figure 137 illustrates how the aid is positioned between the beam splitter and the high stability adapter during alignment Alignment Aid Insert between Beam Splitter and High Stability reflector during autoreflection os ft Agi penoy
247. ion 1 System Resolution 2 Resolution see NOTE see NOTE Agilent 10716A A 8 79 1 nm 3 1 pin A 256 2 5 nm 0 1 pin A 2048 0 31 nm 0 012 pin The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on using 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics Laser and Optics User s Manual Vol II 493 23 Agilent 10716A High Resolution Interferometer Agilent 10716A High Resolution Interferometer and 10716A 001 Turned Configuration Specifications Weight 502 grams 1 11 pounds Dimensions see figure below Typical values are 6 minutes for 152 mm 6 inches Materials Used 3 minutes for 305 mm 12 inches Housing 416 Stainless Steel and 6061 Aluminum Spacers Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade 2 minutes for 508 mm 20 inches MEASUREMENT MIRROR RECOMMENDATIONS Reflectance 98 for 633 nanometers at normal incidence Optical Efficiency including a 98 efficient plane mirror reflector and Flatness Depending on the application and accuracy the Reference Mirror requirements of the application mirror flatness may range from Typical 30 4 to A 20 i e 0 16 to 0 03 meters 6 to 1 2 pinches Worst Case 25 Thermal Drift Error Optical Surface Quality 60 40 per Mil 0 13830
248. ipation is typically 3 8 watts The receiver s mounting feet keep an air gap around the receiver and also act as thermal and electrical isolators Leave enough clearance for the signal cable that connects to the receiver s 4 pin signal and power connector See dimensional drawing in Figure 271 The receiver housing must be electrically isolated from the equipment it is mounted on The clearance holes in the receiver s insulating mounting feet let you use either 6 32 or M3 5 screws 708 Laser and Optics User s Manual Vol Il Receivers 35 CAUTION When installing or removing the fiber optic cable from the receiver body or sensor head DO NOT PULL ON THE CABLE PROPER GRIP THE CONNECTOR AND PULL IT STRAIGHT OUT see Figure 270 Figure 270 Grip and fiber optic cable connector Agilent E1705A Fiber Optic Cable considerations The Agilent E1705A Fiber Optic Cable supplied with the Agilent E1708A receiver is 2 0 meters long The Agilent E1705A cable comes in different lengths and is made of plastic or glass Contact Agilent Call Center to order a fiber optic cable of your preference telephone numbers of various call centers are listed on the Service and Support page at the back of this manual The radius of any bend should be 35 mm 1 4 inches or more When coiled to take up excess cable slack the coil diameter should not be less than 150 mm 6 inches Details of coiling are given below Laser and Optics User s Manu
249. is determines the locations of the measurement points on the mirrors With the interferometers and mirrors properly positioned finish the alignment by adjusting the input laser beam s angle and position for each interferometer individually a First adjust the angle of the input beam using the autoreflection technique Start by selecting the small aperture on the front turret of the laser head Insert the alignment aid Agilent Part Number 10706 60202 into the measurement beam between the interferometer and the measurement mirror This may be held in position temporarily by affixing a piece of tape to its yellow label This will cause the beam reflecting off the mirror to reflect back out through the input aperture toward the laser head Angularly adjust the input beam using the beam directing optics or the laser head or both until the reflected beam re enters the small aperture of the laser head N ow Careful accurate autoreflection at this step is essential to minimizing cosine errors assuming the mirror is perpendicular to the linear axis of travel For higher accuracy alignment see the Autoreflection information in Chapter 4 System Installation and Alignment in Volume of this manual for additional methods to optimize the autoreflection alignment b Second adjust the centering of the input beam on the input aperture by visual alignment Start by switching back to the large aperture on the
250. is interferometers beam patterns 566 Laser and Optics User s Manual Vol II Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 TO MEASURMENT MIRROR 190 mm i 7 48 170 mm eso 6 69 gt 3 Pins X 4 mm Dia 0 16 Max Height lt 5 mm 0 20 MM A2 2X 8 0 mm d 0 31 5 B lt 2 0 mm 15 0 mm 0 08 88 5 mm 0 59 3 48 FROM LASER HEAD 179 mm 7 04 lt 11 0 mm 4X 6 0 mm Dia Thru 0 43 0 24 or 4X M5 Threaded Hole g A SECTION Figure 190 Three Axis interferometer mounting The line of the interferometer s mounting location is identified as datum B It lies in datum A and should be parallel to the surface of the stage mirror being measured Physically the datum B line is created by placing two dowel pins in the surface that forms the datum A plane The point of the interferometer s mounting location is identified as datum C It establishes a specific installation location for the interferometer along the line of datum B Physically the datum C point is created by placing a single dowel pin in the surface that forms the plane of datum A Laser and Optics User s Manual Vol II 567 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 568 Although th
251. ive Agilent product TO THE EXTENT ALLOWED BY LOCAL LAW THE REMEDIES IN THIS WARRANTY STATEMENT ARE CUSTOMER S SOLE AND EXCLUSIVE REMEDIES EXCEPT AS INDICATED ABOVE IN NO EVENT WILL AGILENT OR ITS SUPPLIERS BE LIABLE FOR LOSS OF DATA OR FOR DIRECT SPECIAL INCIDENTAL CONSEQUENTIAL INCLUDING LOST PROFIT OR DATA OR OTHER DAMAGE WHETHER BASED IN CONTRACT TORT OR OTHERWISE For consumer transactions in Australia and New Zealand the warranty terms contained in this statement except to the extent lawfully permitted do not exclude restrict or modify and are in addition to the mandatory statutory rights applicable to the sale of this product to you Assistance Product maintenance agreements and other customer assistance agreements are available for Agilent products For any assistance contact your nearest Agilent Sales and Service Office 8 CD L 03 11 97 R1 J CW1Bm RE Agilent Technologies Manual Part Number 05517 90086 Volume II Printed in U S A SEPTEMBER 2007
252. k only one beam at this time Observe the voltmeter reading If the reading is greater than 0 1 Vdc turn the gain adjustment screw counterclockwise until the voltage reads 0 1 Vdc 20 Block one of the two beams incident on the rear etalon mirror see Figure 167 with a piece of paper Again be sure to block only one beam at this time If the measured voltage is greater than 0 1 Vdc turn the gain adjustment screw clockwise until the reads 0 1 Vdc 2 Remove the beam blocking device The voltmeter should now read at least 0 7 Vdc If the measured voltage is below 0 7 Vdc the wavelength tracker or the receiver or both is not properly aligned If after repeating the receiver alignment steps 16 through 20 the voltage measured at the test point is still below 0 7 Vdc the entire alignment procedure must be repeated until the misalignment is corrected 22 Disconnect the voltmeter from the receiver s test point All alignment and adjustment procedures are now complete After the wavelength tracker and receiver have been properly aligned in the measurement system you should lock the vertical translator adjustment screw see Figure 167 in place This will prevent possible cosine error in the wavelength tracker due to thread clearance between the adjustment screw and the baseplate A suitable low strength wicking adhesive Locktite 425 is recommended In vibration free environments this precaution may not be necessary
253. l 10715A 471 orientation laser head 338 P parallelism measurement 619 plane mirror converter 10722A 397 plane mirror interferometer 10706A 424 E1826E F G 636 plane mirror reflector Agilent 10724A 441 466 pointing stability 339 ports inputs and outputs optical 380 post and height adjuster 727 power requirements Agilent E1708A vs Agilent E1709A 721 primary standard for metrology 337 R rcube corner 10713D 1 4 Inch 422 receiver 10780F Remote Receiver 691 5519A B internal receiver 693 Agilent 10780C Receiver 691 Agilent 10780F Remote Receiver 691 Agilent E1708A Remote Dynamic Receiver 705 receiver cables 732 receivers Agilent E1709A Remote High Performance Receiver 714 comparison 688 recommendation scope probe 721 reference frequecny 334 reference frequency 336 reflector 466 10771A Angular 608 remote sensor 705 remote sensor E1706A 719 removable tooling 379 requirements alignment 720 DC power 721 measurement axis 714 retrofit issues Agilent E1708A vs Agilent E1709A 720 retroreflector 10703A 396 10704A 414 10767A 396 roll 339 S scope probe Agilent E1708A vs Agilent E1709A 721 sensitivity Agilent E1708A vs Agilent E1709A 720 shutter controls 338 single beam interferometer 10705A 414 single axis plane mirror interferometer E1826E F G 636 six degrees of freedom 523 size Agilent 10780F vs Agilent E1709A 720 Agilent E1708A vs Agilent E1709A 72
254. lectronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A Laser and Optics User s Manual Vol II 645 31 Agilent E1826E F G One Axis Plane Mirror Interferometer 42 5 29 5 ES Input Beam 3X M3 Captive Screws E Input Beam t 47mm bend 135 Figure 230 Agilent E1826G One Axis Plane Mirror Interferometer straight through dimensions and beam pattern 646 Laser and Optics User s Manual Vol 11 Agilent E1826E F G One Axis Plane Mirror Interferometer 31 Agilent E1826E F G glass dimensions 30 5 o 078 z b 9 4 1I Figure 231 Agilent E1826E F G glass dimensions 87 T 30 5 Laser and Optics User s Manual Vol II 647 31 Agilent E1826E F G One Axis Plane Mirror Interferometer 648 Laser and Optics User s Manual Vol 11 Agilent Laser and Optics User s Manual Volume II 32 Agilent E1827A Two Axis Vertical Beam Interferometer Description 650 Agilent E1827A Beam Pattern Spacing and Labels 652 Agilent E1827A Two Axis Interferometer Specifications 653 RE Agilent Technologies 649
255. lel to the laser beam and the axis of travel Install the Straightness Interferometer so that it is centered about the laser beam The interferometer should also be perpendicular to the laser beam This may be done by autoreflecting off the front face with a gage block Rotate the Interferometer s bezel to bring the scribed line parallel to the Straightness Reflector s aperture slot See Figure 217 Turn the bezel until the dots overlap on the reflector side of the interferometer Use a card to locate the return beam and make the appropriate angular adjustments to Laser and Optics User s Manual Vol II 625 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics the reflector to get the beam back through the interferometer and the beam splitter 7 Adjust the receiver position to center the laser beam in its aperture REFLECTED SEMICIRCULAR BEAMS a Mirrors Straightness Reflected Beam E Reflector Laser Beam Cross Sections Beam From Laser Head gt Laser Beam Reflected Beam Cross Section Figure 216 Reflected semicircular beams a Ifthe receiver LED is not on carefully rotate the interferometer s bezel until the LED goes on To maximize the receiver signal attach a fast responding voltmeter or oscilloscope to the receiver test point and receiver case ground Only very slight rotation of the bezel is required typically less than 1 degree b Fin
256. length in glass This minimizes measurement errors due to temperature changes in the interferometer Laser and Optics User s Manual Vol II 563 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter make sure that you provide enough laser beam power to any multiaxis interferometer so all receivers connected to it receive adequate light power This will help ensure that each measurement receiver in the system receives the optimum signal strength in the intended application 9 mm laser beam considerations These interferometers are designed to use a 9 mm laser beam The 9 mm beam is available from an Agilent 5517C 009 Laser Head For more information about this laser head see Chapter 16 Laser Heads in this manual Most Agilent beam directing optics are designed for use with a 6 mm laser beam For use in 9 mm installations Agilent offers the Agilent 10725A Laser Beam Splitter and the Agilent 10726A Laser Beam Bender These two optical devices do not include a housing or mounting hardware For these optics the user must devise mounts that will hold the required optics in position without causing stress that may distort the optic The recommended receiver for the 9 mm beam is an Agilent 10780F Remote Receiver The standard Agilent 10780C Receiver input aperture is designed for
257. lent 10700A and Agilent 10701A in your design See the offset specifications under the Agilent 10717A Wavelength Tracker Specifications and Characteristics section at the end of this chapter Alignment aid To help in aligning the Agilent 10717A Wavelength Tracker an Alignment Aid Agilent Part Number 10706 60001 is included This is the same alignment aid used on the Agilent 10706A Plane Mirror Interferometer and Agilent 10715A Differential Interferometer Procedure This procedure describes the installation and alignment of the wavelength tracker axis The two units that require alignment are the Agilent 10717A Wavelength Tracker and the Agilent 10780C or Agilent 10780F Receiver The wavelength tracker unit itself is prealigned at the factory and requires no internal alignment The Wavelength Tracking Compensation system should be installed and aligned with the following considerations in mind The wavelength tracker should be installed so that the air it samples is the same air through which the measurement axis beam passes The wavelength tracker should be aligned to obtain maximum laser beam signal at the receiver See multiaxis applications information in Chapter 3 System Design Considerations in Volume I and elsewhere in this manual The Agilent 10780C 10780F E1708A or E1709A receiver should be mounted in such a way that its LED indicator and gain adjustment potentiometer are accessible Laser and Optic
258. lent 5517C 009 The Agilent 10725A Beam Splitter is the same optical element as that used in the Agilent 10701A described earlier in this chapter except that the Agilent 10725A is supplied without a housing The Agilent 10726A Beam Bender is the same optical element as that used in the Agilent 10772A turning mirror or Agilent 10773A flatness mirror described in Chapter 36 Accessories except that the Agilent 10726A is supplied without a housing CAUTION Agilent Technologies does not provide mounting hardware for the Agilent 10725A beam splitter or the Agilent 10726A beam bender These devices are intended for use in user designed mounts The user is responsible for devising a mounting method that does not cause stress in the optic which will result in distortion of the reflected laser wavefronts To preserve polarization see Preventing Depolarization on page 362 To preserve efficiency see Note on page 362 Laser and Optics User s Manual Vol II 373 17 Beam Directing Optics Agilent 10725A Beam Splitter Specifications Use Split a laser beam having a diameter up to 9 mm nominal This beam splitter requires a user supplied mount This optic can be made vacuum compatible Type Non polarizing Dimensions See drawings below Weight 2 grams 0 07 ounce Materials Used Optic Fused silica Optical Efficiency Typical 45 each beam Worst Case 39 each beam Beam Splitting Coating Incident Face
259. ligned substantially parallel to each other during system reset even though they are not in general coplanar Initial parallelism at reset is important for keeping the permitted angle range symmetrical about the initial zero angle position For example a parallelism error of 10 seconds during reset will effectively reduce the angle range in one direction by 10 seconds and increase it in the other direction by the same amount The general solution is to provide a way to adjust at least one and possibly both mirrors As explained below the alignment procedure requires that the reference and measurement mirrors both be made initially perpendicular to the input laser beam and of course perpendicular to the axis of stage travel Thus with three items to adjust 2 mirrors and 1 input beam at least two of them should be adjustable The input beam itself usually allows the first adjustment so one of the two mirrors must provide the second In a typical lithography application the reference mirror will usually be stationary that is mounted to the optical column hence it is often the convenient choice for attaching to an adjustable mount Whether mounted with adjustment capability or not the mirrors must be held rigidly and stable after installation Choose the mounting method with care to avoid the introduction of mounting stresses which deform the surface flatness of the mirrors Adhesives can be used successfully but beware of an
260. llelism is calculated by comparing the slopes of the two straightness measurements For details see the Agilent 5529A 55292A Dynamic Calibrator Measurement Reference Guide Principles of Operation Figure 211 shows the laser beam path in the straightness optics Initially the two paths from the interferometer to the straightness reflector have the same length As the interferometer or reflector is moved along the axis of travel without lateral motion both of the beams between them will increase or decrease in length at the same rate If either the interferometer or the reflector moves perpendicular to the intended axis of motion the relative lengths of the two beams will change The change in relative path lengths will be X where D 0 X Then D 2D sin 0 2 the distance of offset out of straightness the angle between the two beams leaving the interferometer and the indicated change in path length X 2 sin 0 2 the angle of the Short Range Interferometer is 1 5916 degrees the angle of the Long Range Interferometer is 0 1592 degrees Thus for short range optics D 36X and for long range optics D 360X Laser and Optics User s Manual Vol II 619 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 620 Compensated Wollaston Prism Straightness Interferometer Assembly Note Wedge n1 2 has a refractive index STRAIGHTNESS OPTICS BEAM PA
261. ls Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Maximum Angular Beam Deviation 30 arc minutes Optical Efficiency including Agilent 10703A Reflector Typical 62 Worst Case 59 Fundamental Optical Resolution 2 Non linearity Error 4 2 nm 0 17 pin Thermal Drift Coefficient 0 05 micron C typical 0 005 micron C minimum 0 110 micron C maximum 2 56 Screws 2 e 6 32 UNC 4 Places Centerline Thru Clearance a on Lo For 4 or 2 5mm A 1 39 88 mm 1 57 25 65 N Centerline 1 01 m 19 56 mm msg un Figure 115 Agilent 10705A Single Beam Interferometer dimensions 420 Laser and Optics User s Manual Vol 11 Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector 19 Agilent 10704A Retroreflector Specifications Dimensions see figure below Weight 10 5 grams 0 37 ounce Materials Used Housing Stainless Steel 416 Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade 19 5 mm 0 77 10 2 mm Aperture F 0 40 Dia Bolt Circle 20 5 mm 15 2 mm 0 81 Dia 0 60 Dia Y Y 2 5 mm lt 2 5mm ee 0 10 0 10 0 56 Figure 116 Agilent 10704A Retroreflector dimensions Agilent 10713C 1 2 Inch Cube Corner Specifications Dimensions see figure below
262. lution doubling is inherent because of the double Doppler shift Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 MEASUREMENT PATH fA Quarter wave Plate fA fat Af fA Y fat 2Af fat 2Af A a HEN V TEE Af Aperture B gt oh Agilent 10706A Reflector Plane Mirror Interferometer REFERENCE PATH fp Quarter wave p Aperture gt n Aperture A lt Q m m m N N Agilent 10706A Plane Mirror Interferometer COMPOSITE fA and fp F A a 31 f f f Aperture B Xx gt d Y SS fAt2Af fp fat 2 N Aperture A lt amp q lt q Agilent 10706 Refelctor Plane Mirror Interferometer LEGEND T fA m um um um fg lt gt fp and fg f r Rounded corners are used to help you trace paths Figure 121 Plane mirror interferometer laser beam path Laser and Optics User s Manual Vol II 427 20 Agilent 10706A Plane Mirror Interferometer Special Considerations 428 Differential measurements A general discussion of differential measurements using laser interferometers is given in the introduction to this section To use the Agilent 10706A interferometer in a differential configuration 1 replace the reference cube Corner or high stability adapter with the Agilent 10722A Pla
263. m block from between the interferometer and measurement mirror 14 The reference and measurement beams must be centered on the receiver aperture Use translucent tape over the receiver aperture to observe the beams Move the receiver side to side to center the beams on the receiver aperture 15 Place the alignment aid Agilent Part Number 10706 60001 back on the output side of the interferometer and switch to the large aperture on the laser head Connect a fast responding voltmeter to the receiver test point Monitor the voltage reading along the complete travel of the stage The voltage should not jump up to the previously peaked voltage reading If the voltage does jump readjust the laser beam as in step 5 until the voltage reading suddenly drops back down to about 0 3 volt 16 If readjustment of the laser head or beam steering optics is required in step 15 then return to step 9 and repeat the procedure 17 Remove the interferometer alignment aid Laser and Optics User s Manual Vol II 455 21 456 Agilent 10706B High Stability Plane Mirror Interferometer 18 Rotate the turret on the laser head to the large aperture Verify that the LED indicator on the receiver is illuminated and the voltage at the receiver test point is between 0 6 and 1 3 volts DC Turned Configuration X Y Stage Example Alignment This procedure describes the alignment of Agilent 10706B interferometers used in an X Y stage application as shown in Figure 1
264. m f R1 400 lt E Minimum 28 98 mm 1 141 lt 19 05 mm 0 750 9 12 mm 0 359 kf 60 33 2 375 MN 31 75 mm 2 1 250 Y Output Aperture 1 L Output 2 Input Aperture for 3 mm input beam REAR VIEW Fiber Optic sensor head mounting pins lt Four mounting holes on top and bottom surfaces 6 32 8 0 mm 0 31 deep 26 TE To Mirrors 7 X 9 12 lt 0 359 19 86 mm 0 782 gt lt 7 16 mm es 0 282 f Four beams to reference mirror Four beams to lt lt 3 31 75 mm 1 250 Y 38 10 mm 1 500 l 31 75 mm 1 250 9 53 0 375 0 500 12 70 mm measurement mirror 12 70 mm 0 500 spacing between linear measurements FRONT VIEW Figure 182 Agilent 10721A Two Axis Differential Interferometer dimensions Laser and Optics User s Manual Vol II 553 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 63 5 mm 2 500 Recommended Minimum 35 56mm R1 400 1 m ji a TT 8 RET Mirrors TEE EN E gt 43 18 mm 1 70 9 12 mm lt Tn 0 359 Le 19 86 mm E 19 05 lt 2 860 ai 0 750 57 15 mm 7 16 mm 7 16 mm lt gt 0 282 F
265. mance Receiver Operating Manual The alignment procedure described in Chapter 4 of the Operating Manual involves calculating the AC DC ratio and comparing the values to the Agilent E1709A specifications First Stage vs Second Stage In the first stage of the Agilent E1709A electronics both the dc and the ac signals are present In the second stage the dc is stripped away and only the ac signal is used to create the receiver output signal The first and second stages are shown in Figure 274 Laser and Optics User s Manual Vol Il Receivers 35 Photodetector first stage amplifier Attenuator adjustment First Stage Output J3 connector Second stage amplifier Squelch adjustment Signal strenght detector circuit Sinewave to squarewave converter LEDs Signal strength voltage J2 connector 10 Cable driver 11 Output signal input power J1 connector FAWN Figure 274 Agilent E1709A Receiver block diagram Figure 275 illustrates the location and signal characteristics of J2 and J3 Laser and Optics User s Manual Vol II 717 35 Receivers Reference Description 1 J3 First Stage Output Indicates ac and dc portions of the light signal 2 J2 Signal Strength Voltage indicates only the ac portion of light signal as a dc voltage This is an SMC connector An SMC f to BNC f Adapter Agilent part number 1250 0832 is available Figure 275 Agilent E1709A with fiber and lens assembly First Stage Outpu
266. ment Tolerance For plastic fiber optic cable Option 010 Roll 3 Pitch 1 Yaw 1 Agilent remote sensor is self aligning with some interferometers For plastic fiber optic cable Roll 3 Pitch 1 Yaw 1 Agilent remote sensor is self aligning with some interferometers Roll 3 Pitch 1 Yaw 1 10780F is self aligning with some interferometers Output Signal Frequency Differential square wave at Doppler shifted frequency 100 kHz to 15 5 MHz slew rates to 1 m s with plane mirror optics 100 kHz to 7 2 MHz slew rate to 500 mm s with plane mirror optics 100 kHz to 7 2 MHz Fixed Data Delay typical 33 2 ns typical 0 01 ns C 86 ns Not specified Errors due to frequency variations at fixed temperature For 25 1 to 6 1 input amplitude variations and frequency range of 100 kHz to 15 5 MHz lt 11 2 nm for linear optics lt 40 6 nm for plane mirror optics lt 0 3 nm for high resolution optics For 3 1 input amplitude variations and frequency range of 100 kHz to 7 2 MHz lt 1 2 nm for linear optics lt 0 6 nm for plane mirror optics 0 3 nm for high resolution optics Not specified Signal Strength Monitor 0 to 10 volts output proportional to optical input signal power 0 to 8 volts output proportional to optical input signal power Range 0 to 0 8 volts Power Requirements 15 Vdc 1V at less than 267 m
267. meter 10715 001 Reference Mirror Y Axis Laser Beam Y Axis Receiver X Axis Receiver X Axis See Note Laser Beam 33 A See Note Y Splitter Beam Bender a Wavelength Tracker Receiver See Note X Y STAGE T Y ass Reference Mirror Y Axis Differential Interferometer 10715 001 Wavelength Tracker Note Beams pass under receivers to interferometers then return to receivers at receiver height Figure 165 Two axis differential interferometer with wavelength tracker Laser and Optics User s Manual Vol II 499 24 Agilent 10717A Wavelength Tracker Special Considerations The orientation of the laser head with respect to the Agilent 10717A Wavelength Tracker and the selection of the input aperture on the wavelength tracker s differential interferometer affect the direction sense of the compensation output The correct direction sense of the wavelength tracker signal occurs when the compensation number gets larger as the wavelength of light increases Refer to Chapter 12 Accuracy and Repeatability in Volume I of this manual for a discussion on atmospheric compensation The direction sense of the wavelength tracker signal may be changed on the Agilent 10896A VME Compensation Board by swapping the Ref and Meas input connections so that the Ref signal is connected to the Meas input Refer to the board s user s manual for details Table 74 gives the correct Meas signal co
268. n 344 40 Screws 2 6 32 UNC 4 Places 28 5 mm Centerline Thru Clearance 1 12 Dia For 4 or 2 5 mm 62 0 2 44 po 2 Centerline p OO 20 83 mm lt 38 2 ia 5 32 0 mm 33 3mm Aperture 1 50 1 26 Typ 1 31 0 82 Dia 4 Sides 34 40 x 25 Inch Deep 8 Places Figure 107 Agilent 10702A Linear Interferometer dimensions Laser and Optics User s Manual Vol II 407 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Agilent 10702A 001 Linear Interferometer with Windows Specifications Dimensions see figure below Weight 246 grams 8 7 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Maximum Angular Beam Deviation 30 arc seconds Optical Efficiency including Agilent 10703A Reflector Typical 73 Worst Case 69 Fundamental Optical Resolution 2 Non linearity Error 4 2 nm 0 17 pin 4 40 Screws 2 Beam Spacing gt 12 7 0 50 po 6 32 UNC 4 Places 28 5 mm Centerline Thru Clearance 1 12 Dia For 4 or 2 5 mm A 62 0 mm 3 y 2 44 n 3 2 i Centerline oo i 20 83 mm lt 38 2 32 0 lt lt Aperture 1 50 1 26 Typ 0 82 Di
269. n in which the measurement beam path length and the reference beam path length are equal does not occur when the reference and measurement mirrors are coplanar Because the reference beam travels 19 05 mm 0 750 inch 30 6 mm 1 025 inches for option C02 further through air inside the interferometer than the measurement beam does the zero deadpath condition for the Laser and Optics User s Manual Vol Il Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Agilent 10719A interferometer occurs when the measurement mirror is 19 05 mm 30 6 mm for option C02 farther from the interferometer housing than the reference mirror is The consequences of this are discussed in more detail under the Operation section later in this chapter Reference and measurement mirror requirements A key feature of the Agilent 10719A interferometer is its ability to make relative measurements between a measurement plane mirror and a reference plane mirror Since mirror size requirements depend on the application both plane mirrors must be supplied by the user Recommended optical specifications for these reflectors can be found under the Agilent 10719A and 10719 02 One Axis Differential Interferometer Specifications section at the end of this chapter The mounting system for the mirrors must also be provided by the user An important consideration in designing the mountings is to provide the means to ensure the mirrors are a
270. n of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in Volume I of this manual Provide for aligning the optics laser head and receiver s on the machine Ideally you want to be able to translate beam in two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications heading at the end of this chapter Refer to Chapter 4 System Installation and Alignment in Volume I of this manual for installation instructions Alignment 418 Alignment aids Alignment aids for these interferometers are listed in Chapter 4 System Installation and Alignment in Volume I and Chapter 36 Accessories of this manual Laser and Optics User s Manual Vol Il Agilent 10705A Single Beam Interferometer and Agilent 10704A Retroreflector 19 Procedure Refer to Chapter 4 System Installation and Ali
271. n two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications and Characteristics section at the end of this chapter Allow for transmitted beam offset of beam splitters in your design 570 Laser and Optics User s Manual Vol Il Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 Procedure Alignment The positions of the interferometer s measurement beams its outputs to and inputs from the stage mirror are referenced to datums A B and C as shown in Figure 190 Once the appropriately referenced mounting location is provided 1 place the interferometer against the mounting plane datum A then 2 push the interferometer against the pins that physically define datums B and C and 3 fasten the interferometer in position with four M5 mounting screws Torque the mounting screws to 5 NM or 44 in lbs while holding the interferometer firmly against the alignment pins to keep it from moving After the interferometer has been installed and secured into position install the receiver s that will be used with it Recommended receivers for use with these interferometers are Agilent 10780F Remote Receivers Interferometer output apertures have alignment
272. nd have fixed alignment Receivers Agilent 10780F fiber optic remote receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE PLANE MIRROR RECOMMENDATIONS Reflectance 9896 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from A 4 to 20 0 16 to 0 03 meters 6 to 1 2 pinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and Stored in the system controller to be used as a correction factor Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics 10885A 10895A or X256 resolution extension electronics 10897C 108984 Angular range for this specification is the maximum angle between the measurement mirror and the interferometer for a 6 axis system Both angles either pitch and yaw or roll and yaw can be at the angular limit concurrently Laser and Optic
273. ne Mirror Converter and 2 attach the reference plane mirror to the reference surface of interest This is shown in Figure 122 Be sure to install and align the reference reflector the same as you would the measurement reflector Turned configuration To reduce the number of beam benders for this application the interferometer can be configured to turn the beam This is done by interchanging the reference cube corner and the plane mirror converter Figure 123 shows a reconfigured Plane Mirror Interferometer that turns the beam Note the location of the plane mirror converter with respect to the arrows on the label In this configuration Figure 123 the laser measurement beam is turned to the left When the measurement beam needs to be turned to the right as Figure 123 X axis the interferometer is rotated 180 about the incoming beam s optical axis With this change in configuration the measurement direction sense will change see the Effect of optics on measurement direction sense section in Chapter 3 System Design Considerations in Volume of this manual Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 REFERENCE and MEASUREMENT PATHS fA and fp Reference SS wer c fpt fg fp fpt2Afg Y fpgt fp Quarter wave Agilent 10722A Plate Plane Mirror Converter m mm um m p v f A fB f A I gt fat2A
274. ne in which both the reference beam and the measurement beam travel to external mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of which may move FRONT VIEW REAR VIEW Agilent 10721A Two Axis Differential Interferometer Figure 178 Agilent 10721A Two Axis Differential Interferometer One useful example of a differential measurement application is in lithography where the motion of an X Y stage is measured relative to its related optical column An example of a laser measurement system for this application including both Agilent 10721A and Agilent 10719A interferometers is presented in the Agilent 10719A chapter Chapter 25 of this manual Laser and Optics User s Manual Vol II 535 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 536 Angular measurements Because the Agilent 10721A interferometer combines the capabilities of two discrete linear interferometers into a single package it can be used to make angular measurements For angular measurements the Agilent 10721A interferometer makes two linear measurements Y and Y with built in parallelism spaced 12 7 mm 0 5 inch apart The angular measurement is calculated by taking the arctangent of the difference between these linear measurements divided by their separation THETA arctan For more information about angular measurements see the Electronic
275. nity to errors induced by changes in measurement signal power level One receiver is required for each measurement axis in the Laser Transducer system being installed See the Agilent E1709A Remote High Performance Receiver Operating Manual for compatible cable information as well as signal and connector information Agilent E1705A Fiber Optic Cable E p Agilent E1706A 5 Remote Sensor Tul li Agilent E1709A Remote High Performance Receiver Figure 272 Agilent E1709A Remote High Performance Receiver 714 Laser and Optics User s Manual Vol II Receivers 35 Key definitions and concepts Sensitivity dependencies are explained in terms of AC DC ratio It is important to understand this concept and how its measurement relates to the resultant electrical output of the Agilent E1709A receiver Understanding the following terms will also clarify the differences between the Agilent E1708A and the Agilent E1709A which are discussed and listed later in Agilent E1709A relationship to Agilent E1708A subsection in this chapter The definitions include references to connectors J2 and J3 shown in Figure 273 Detailed descriptions of the Agilent E1709A connectors and signal outputs are covered in Agilent E1709A Remote High Performance Receiver Operating Manual Figure 273 illustrates the ac and dc light power relationship 1 1 DC Light Power Sum of both beams including overlap area 5 23 m 2 Measurement Beam 3 3
276. nnection for various system configurations For a quick reality check write a short program to initialize and display the WTI compensation number and then monitor this value as the air is warmed slightly The compensation number should go up Table 74 Agilent 10717A direction sense Laser Head Laser Head Orientation Agilent 10717A Agilent 10717A Meas Horizontal or Rolled 90 Input Aperture Orientation Signal About Beam Aor B Horizontal or Connected Rotated 90 About Etalon Axis Horizontal Ref Input Horizontal Rotated 90 Meas Input Agilent 5517A B BL C DL FL Horizontal typical Meas Input F1 Horizontal F2 Vertical Rotated 90 Ref Input Horizontal Meas Input Rotated 90 Rotated 90 Ref Input Horizontal Ref Input Rotated 90 Meas Input 500 Laser and Optics User s Manual Vol Il Agilent 10717A Wavelength Tracker 24 Installation and Alignment Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability complete the following items before installing a laser positioning system into any application L Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Provide for aligning the optics laser head and receiver s on the machine O Be sure to allow for transmitted beam offset of beam splitters Agi
277. nsions Agilent 10723A High Stability Adapter Specifications Weight 48 8 grams 1 7 ounces For Specifications of an upgraded Agilent 10706A replacement of Dimensions see drawings below reference cube corner with Agilent 10723A see Agilent 10706B Materials Used Specifications in Chapter 21 of this manual Housing Stainless Steel Cap Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade 22 9mm Thru 5 6 mm 0 90 Dia 4 2 56 UNC 3B Thru 28 5 mm K 20mm Dia 0 08 32 7 mm 1 29 Bolt Circle _ 3 0 mm 0 10 0 13 23 9 mm Figure 129 Agilent 10723A High Stability Adapter dimensions 440 Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 Agilent 10724A Plane Mirror Reflector Specifications Weight 50 grams 1 8 ounces Flatness A 10 at 633 nanometers Dimensions see figure below Installed Angular Adjustment Range Pitch Yaw 1 configurations Materials Used 416 Stainless Steel Reflectivity 98 at 633 nanometers at normal incidence i 20 066 mm 0 790 2 3 556 mm Dia Thru 3 810 mm gt 0 150 0 140 42 164 mm Dia 1 660 32 766 mm Dia 22 860 mm Dia Aperture 1290 7 Meet 0 900 28 388 mm Dia 1 118 p 36 068 mm Dia 1 420 3 2 56 NC Class 3 Thru 120 Apart Figure 130 Agilent 10724A Plane Mirror Reflector dimensions Laser an
278. o the traditional straight edge and indicator method of measuring straightness where Optical Reference Accuracy corresponds to the straight edge accuracy and Measurement Accuracy corresponds to the indicator accuracy OPTICAL REFERENCE ACCURACY This can be eliminated by using straight edge mirror reversal techniques Short Range Optics Metric Units Mode 0 15 M micron English Units Mode 0 5 F microinch where M distance of travel of the moving optic in meters and F distance of travel of the moving optic in feet Long Range Optics Metric Units Mode 0 015 M micron English Units Mode 0 5 F microinch where M distance of travel of the moving optic in meters and F distance of travel of the moving optic in feet Laser and Optics User s Manual Vol II MEASUREMENT ACCURACY Short Range Optics Displayed Value 0 10 um 0 400 uin 10 1500 um 400 60000 uin Temperature Range 15 26 3 5 1 0 25um 10 uin 1 0 5um 20 uin 0 40 C 6 Long Range Optics Displayed Value 0 100 um 0 4000 pin 100 1500 pm 400 60000 yin Temperature Range 1 0 25um 10 uin 15 26 C 1 0 5um 20 uin 0 40 C STRAIGHTNESS MEASUREMENT RESOLUTION 0 01 micron 0 4 microinch Short Range Optics 35 micron 14 0 microinches Long Range 3 6 microns 0 01 micron 4 0 microinch Optics 140 microinches STRAIGHTNESS MEASUREMENT RANGE 1 5
279. o the upper edge of the X Y stage measurement mirror thereby reducing Abb errors The Agilent 10721A interferometer s basic optical resolution is the same as that of the Agilent 10719A and Agilent 10706B interferometers The Agilent 10721A interferometer s basic angular resolution is 2 56 arc seconds which can be extended electronically by 32X to give 0 08 arc second resolution The Agilent 10721A interferometer is designed primarily for use with the Agilent 10780F Remote Receiver which can be attached directly to the housing however any other Agilent receiver may be used The C01 special option Agilent 10721 01 is designed to reduce the thermal drift coefficient A metal housing extension is added to the front of the interferometer to protect the optic This increases the length of the interferometer by 15 5 mm The thermal drift specification in the Agilent 10721 01 is reduced from 150 nm C to 50 nm C typical provided you compensate for the internal air dead path Internal air dead path for this interferometer is 30 6 mm Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 1 025 inches It may be compensated by either of the two methods described in Operation on page 550 of this chapter using 30 6 mm rather than the 19 05 mm for the standard Agilent 10721A interferometer Applications Differential measurements A differential measurement is o
280. of these applications are described in the following sections Laser and Optics User s Manual Vol II Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Three Axis System The three axis system described here consists of an Agilent 10719A One Axis Differential Interferometer an Agilent 10721A Two Axis Differential Interferometer The Agilent 10719A One Axis Differential Interferometer and the Agilent 10721A Two Axis Differential Interferometer described in Chapter 26 are well suited for X Y stage applications such as lithography equipment With these interferometers the measurement mirror is attached to the X Y stage and the reference mirror is attached to the exposure column allowing positioning of the stage relative to the column itself see Figure 172 This configuration also allows yaw measurements of the X Y stage The Agilent 10721A interferometer combines the capabilities of two discrete linear interferometers into a single package It makes two linear measurements with built in parallelism spaced 12 7 mm 0 5 inch apart The angular measurement can be calculated by taking the arctangent of the difference between these linear measurements divided by their separation Y Y THETA arctan D Laser and Optics User s Manual Vol II 513 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers THREE AXIS SYSTEM CONFIGURATION Fiber Optic Cables to Receiver Electronics Agilen
281. off automatically if the input signal is not strong enough A secondary output from the receiver is a dc level that is proportional to the input signal strength LED indicators on the receiver light when any input signal is detected For a block diagram see Figure 268 Laser and Optics User s Manual Vol Il Receivers 35 1 Photodetector amplifier 2 Attenuator adjustment 3 Amplifier 4 LEDs 5 Squelch adjustment 6 Signal level detector circuit 7 Sinewave to squarewave converter 8 Signal strength connector J2 see Figure 268 9 Output signal input power connector J1 see Figure 268 9 LED Figure 269 Agilent E1708A Receiver block diagram Installation Refer to Agilent 10780C F Receiver s placement mounting installation examples and procedures for alignment to the laser beam For more specific mounting installation and alignment and adjustment procedures see the Agilent E1707A Dynamic Receiver and Agilent E1708A Remote Dynamic Receiver Operating Manual Laser and Optics User s Manual Vol II 707 35 Receivers Cables for electronics The receiver cable to be used depends on the electronics system to be used Table 78 lists the available cables Refer to the manual for your system for more cabling information Table 78 Cables for use with an E1708A receiver For use with these electronics Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B Laser Compensation
282. oltage output on the Agilent 10780C or Agilent 10780F receiver indicates incoming laser beam intensity Agilent 10780C Receiver Agilent 10780F Remote Receiver Figure 262 Agilent 10780C Receiver and Agilent 10780F Remote Receiver Laser and Optics User s Manual Vol 11 Receivers 35 Agilent 5519A B Laser Head Receiver The Agilent 5519A B internal measurement receiver amplifies and converts the difference frequency of the laser beam returned by the system optics to TTL levels and supplies the signal to the measurement electronics During the measurement the vertical and horizontal components pass through the turret and measurement optics and return to the measurement receiver The difference between their frequencies will change whenever the measurement optics are moving The laser light returning from the measurement optics is directed through a polarizer and onto a photodiode Because of the polarizer orientation the beam power past the polarizer varies sinusoidally at the difference frequency of the two laser frequency components The beam power at the difference frequency is converted to TTL levels The frequency of the TTL output is the measurement frequency Special considerations Cables General Each Agilent 10780C or Agilent 10780F receiver requires a cable to carry signals and power between it and the measurement electronics axis board with which it is to be used One cable is required per measurement axi
283. on Optical 4 Linear 5 nm using 32 x resolution extension 0 62 nm using 256 x resolution extension Angular pitch or roll 0 39 urad 0 08 arc sec using X32 electronics 0 01 0 049 arc sec using X256 electronics Non linearity Error 2 2 nm for each axis Range Linear 10m 33 ft Angular yaw at distance 150 mm at distance 300 mm 0 88 mrad 0 44 mrad arc min 1 5 Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X32 resolution extension electronics 10885A 10895A or X256 resolution extension electronics 10897C 108984 Pitch or roll measurements are done by having both meas and ref beams reflect off the same mirror in which case only angular measurements are made there are no linear displacement values available 3 Linear range here is the sum of the ranges for all axes Angular range is the maximum measurement mirror angle due to all components i e yaw and pitch or yaw and roll between the measurement mirror and the interferometer for a 6 axis system Range will be reduced when the reference mirror is misaligned 552 Parallelism Input to outpu
284. on Interferometer see Figure 154 offers twice the resolution of conventional plane mirror interferometers and has the same excellent thermal characteristics as the Agilent 10706B interferometer typically only 0 04 micron of drift per degree C Measurement drift is typically 1 12 of that exhibited by a conventional plane mirror interferometer These features result in improved accuracy repeatability and positioning capability Although the Agilent 10716A interferometer is larger than the conventional plane mirror interferometer and the slew rate is halved the finer resolution of this optic allows laser measurement system measurement resolution of 2 5 nanometers 0 1 microinch with most Agilent laser electronics The Agilent 10716A interferometer can be used in the same applications as other Agilent plane mirror interferometers but with different alignment techniques A turned configuration Agilent 10716A 001 is available to turn the beam 90 degrees thereby eliminating the need for a beam bender Like other plane mirror interferometers the Agilent 10716A uses plane mirror reflectors such as the Agilent 10724A Plane Mirror Reflector or a suitable user supplied plane mirror Figure 155 shows the optical schematic of the Agilent 10716A High Resolution interferometer The unit consists of a cube corner a plane mirror converter a retroreflector a high stability adapter and a polarizing beam splitter Laser and Optics User s Manual Vol
285. one in which both the reference beam and the measurement beam travel to external mirrors outside the interferometer housing This allows measurement of the relative positions of the two external mirrors either or both of which may move Laser and Optics User s Manual Vol Il Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 One useful example of a differential measurement in a lithography application is for measuring the motion of the X Y stage relative to the optical column The Agilent 10719A One Axis Differential Interferometer and the Agilent 10721A Two Axis Differential Interferometer described in Chapter 26 are ideally suited to this type of measurement because they provide parallel reference and measurement paths which are offset vertically by 19 mm 0 750 inch For such an application a user supplied reference plane mirror is required in addition to the measurement reflector on the X Y stage s e MES b ROS h M e US FRONT VIEW REAR VIEW Agilent 10719A One Axis Differential Interferometer Figure 170 Agilent 10719A One axis Differential Interferometer Angular measurements The Agilent 10719A interferometer can measure angular displacement instead of linear displacement by directing its reference and measurement beams to the same plane mirror This creates an optically subtracted angular measurement with a fundamental optical resolution of 1 73 arc seconds which can be
286. optical axis of the lens 21 With a piece of translucent tape over the lens verify that the spots from Reference and Measurement beams overlap adequately Laser and Optics User s Manual Vol II 491 23 Agilent 10716A High Resolution Interferometer USING THE AGILENT 10706 60202 ALIGNMENT AID Figure 161 Using the Agilent 10706 60202 Alignment Aid 22 If these spots do not overlap at the receiver the alignment should be rechecked It may be necessary to adjust the Reference Reflector adjustment screws to improve overlap 23 Select the large aperture at the output of the laser head and traverse the full travel at the machine Verify that the LED indicator on the receiver is lighted through the full travel and the voltage measured at the receiver test point is between 0 6 and 1 3 Vdc 492 Laser and Optics User s Manual Vol II Agilent 10716A High Resolution Interferometer 23 Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897C and 10898 is usually available Interferometer Fundamental Optical System Resolut
287. optics laser head and receiver s on the machine Ideally you want to be able to translate beam in two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations Laser and Optics User s Manual Vol II 485 23 Agilent 10716A High Resolution Interferometer Alignment Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications and Characteristics section at the end of this chapter The objective of these instructions is to align the Agilent 10716A to make measurements with 1 minimal cosine error and thermal drift and 2 maximum signal strength at the Agilent 10780C Agilent 10780F Agilent E1708A or Agilent E1709A receiver The procedure below assumes that the plane mirror reflector is the movable optic and has been installed perpendicular to the axis of travel see the Agilent 10724A installation procedure for details Before proceeding with the alignment procedures details on interferometer configurations and alignment aids are covered Configurations 486 The two configurations available for the High Resolution Interferometer allow flexibility in optical layout of a measurement system They are e Standard Turned 10716 001 Figures 156 and 157 illustrate the location of the measurement beams for each configuration
288. or 755 Agilent 10773A Flatness Mirror 756 Agilent 10776A Straightness Accessory Kit 758 Agilent 10777A Optical Square 760 Agilent N1203C 04C 07C Beam Manipulator Accessories 762 Agilent 10884B Power Supply 763 RE Agilent Technologies 725 36 Accessories General This chapter lists and describes Agilent Technologies optic mounts and cables alignment aids and other devices available for Agilent Laser measurement systems Adjustable Mounting Hardware Table 80 Adjustable mounting hardware Component Commeni s Adjustable Mounts Adjustable mounts simplify installation and alignment of the optics listed below Agilent 10710B Use with Agilent 10700A 10701A 10705A 10707A Agilent 10711A Use with Agilent 10702A 10706A 10706B 10715A 10716A Height Adjuster The Height Adjuster and Post simplifies installation and alignment of the optics listed and Post below Agilent 10785A Agilent 10767A 10770A 10771A 10774A 10775A 10776A The Height Adjuster and Post may be used with the Agilent 10784A Base The Straightness Accessory Kit simplifies installation and alignment of the optics listed below Agilent 10776A Agilent 10774A 10775A Adjustable mounts The optical elements inside many of the Agilent Laser Transducer System optics are not precisely referenced to their housings In most applications involving these optics a few simple alignments during system installation will usually provid
289. our beams to reference mirror Four beams to measurement mirror C 12 70 mm 0 500 Output Output spacing between Aperture 1 utpu Aperture 2 12 70 mm linear measurements Input Aperture 25 zn 30 A25 0 500 for 3 mm input beam FRONT VIEW REAR VIEW Fiber Optic sensor head 38 10 mm mounting pins 1 500 Four mounting holes adam on top and bottom surfaces 6 32 1 230 0 8 0 mm 0 31 deep Figure 183 Agilent 10721A C01 Two Axis Differential Interferometer dimensions 554 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 2 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description 556 Special Considerations 564 Mounting 565 Installation 570 Alignment 571 Operation 574 Specifications and Characteristics 576 RE Agilent Technologies 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Description 556 The Agilent 10735A and Agilent 10736A Three Axis interferometers see figures 184 and 185 respectively provide three parallel interferometers in a single housing They allow up to three measurements displacement pitch yaw to be made on a single axis The Agilent 10735A and Agilent 10736A interferometers are identical except for their measurement beam patterns The Agilent 10736A 001 interferometer see Figure 186 is identi
290. path Y or Z have no effect on the measurement The only restriction is that sufficient light returns to the receiver Although the Laser Head or the Receiver may be rotated in 90 increments about the beam axis roll other roll deviations from the four optimum positions degrade the measurement signal If either the Laser Head or Receiver is rotated 45 about the beam axis all position information will be lost because the receiver will not be able to distinguish between the two frequencies Angular motion of the receiver about the Y axis the Z axis or both has no effect on the measurement within certain alignment limits Mounting 694 Offset aperture Offset aperture allows flexibility in mounting the Agilent 10780C or Agilent 10780F receiver that is the bulk of the receiver or sensor head can be mounted above below right or left of the incoming laser beam Agilent 10780F Remote Receiver sensor head The Agilent 10780F receiver s fiber optic sensor head may be mounted directly to certain interferometers Agilent 10719A Agilent 10721A Agilent 10735A Agilent 10736A Alignment pins are provided for easy installation and alignment This eliminates the need for any other user supplied mount for the sensor head Laser and Optics User s Manual Vol Il Receivers 35 Installation When installing the receiver keep the following points in mind At a 45 position roll the signal will go to zero Plastic mounting ha
291. perature variations allows approximately 5 times more dynamic range optical power change Adjustment and additional alignment requirements The Agilent E1709A has much greater sensitivity specifications than the Agilent E1708A In order to obtain the optimum sensitivity performance for the Agilent E1709A additional measurements and alignment procedures are required to maximize the ratio of ac light signal to dc light signal at the receiver input Figure 273 illustrates ac light and dc light at the receiver input The Agilent E1709A features an oscilloscope probe connection to measure the AC DC ratio Retrofit issues The Agilent E1709A can be used in most applications where the Agilent 10780F or Agilent E1708A is used In most respects the Agilent E1709A has better specifications than these other receivers and will perform as well or better However several specifications should be checked Size is the same as the Agilent E1708A and larger than the Agilent 10780F e Maximum AC Optical Signal Intensity specification is 50uW for the Agilent E1709A which is 4 times less than for the Agilent E1708A The maximum optical signal can be larger if larger position error is acceptable e AC DC ratio is more important for the Agilent 1709 than for other Agilent laser system receivers Laser and Optics User s Manual Vol Il Receivers 35 DC power consumption is considerably larger than the Agilent 10780F and slightly large
292. perture and is normal to its input face 3 Set the alignment aid Agilent Part Number 10706 60001 on the interferometer s Measurement beam aperture as shown in Figure 201 With the alignment aid installed the beam will be reflected off the stage mirror back to the laser head 4 Setthe laser head to the small aperture 5 Rolland yaw the interferometer until the autoreflected beam is centered on the small aperture of the laser 6 Select the laser head s large output aperture and translate the interferometer horizontally until the input beam is centered on the interferometer s input aperture A piece of translucent tape over the interferometer s input aperture will make the input beam visible This procedure assumes that the vertical height of the beam was set before the interferometer was installed see the Initial installation and setup procedure alternatively fixturing for a vertical adjustment for the interferometer may be used 7 Select the laser head s small output aperture and check that the beam is still autoreflecting 8 Repeat steps 3 through 7 until the beam is both autoreflecting and centered on the interferometer s input aperture 9 Tighten all mount adjustment screws 10 Remove the alignment aid 11 Check the position of the beams in the interferometer s output apertures see Figure 202 Once again translucent tape is helpful for viewing the beams in the apertures If any beam clipping occurs or if the beams
293. pins to ease the work of attaching the receiver sensor heads The installation and alignment procedures do not involve adjusting or aligning the interferometer itself Instead the procedures adjust the beam coming into the interferometer An Agilent 10735A Agilent 10736A or Agilent 10736A 001 interferometer has no user adjustments Its optics are calibrated at the factory You can treat it as a rigid pre aligned optical bench It is fastened in place against a referenced flat surface and against three reference pins to be supplied by the user in the measurement system Adjustments required to align the system include positioning translation rotation or both of the laser head and of the beam directing optics which deliver the laser beam to the interferometer input aperture Laser beam alignment Objective The objective of the laser beam alignment procedure is to have the interferometer s axis 1 measurement output beam perpendicular to the stage mirror when the mirror is in its zero angle position that is perpendicular to the direction of stage travel You can do this using autoreflection with the help of alignment aid Agilent Part Number 10706 60001 The input beam should also be centered on the interferometer s input aperture Laser and Optics User s Manual Vol II 571 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 572 Note that if the stage mirror is not perpendicular to the direction of stage trav
294. plete travel of the stage x axis The voltage should not jump up to the previously peaked voltage reading If the voltage does jump readjust the interferometer until the voltage reading suddenly drops down to about 0 3 volt 21 Remove the plane mirror interferometer alignment target and alignment aid The reference beam and the measurement beam must be centered on the receiver alignment target Laser and Optics User s Manual Vol II 437 20 Agilent 10706A Plane Mirror Interferometer 22 Remove the receiver alignment aids and rotate the turret on the laser head to the large aperture Verify the LED indicator on the receiver is lighted and the voltage at the receiver test point is between 0 6 and 1 3 Vdc Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Plane mirror systems have a basic optical resolution of one quarter wavelength 0 158 micron 6 23 microinches Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897C and 10898A is usually available Interferometer Fundamental Optical System Resolution 1 System Resolution 2 Resolution see NOTE see NOTE Agilent
295. r Figure 204 Agilent 10737L R Compact Three Axis Interferometer dimensions 606 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume 11 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Description 608 Installation and Alignment 610 Operation 614 Specifications 614 RE Agilent Technologies 607 29 Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Description The Agilent 10770A Angular Interferometer and the Agilent 10771A Angular Reflector are normally supplied as part of the Agilent 55281A Angular Optics Kit They are shown in Figure 205 These Angular Measurement optics are designed for use in a calibrator system such as the Agilent 5529A 55292A More detailed information about the use of these optics can be found in Agilent calibrator system user s documentation With these optics the angular rotation of the Agilent 10771A Angular Reflector can be measured over a range of 10 degrees Agilent 10770A Agilent 10771A Angular Interferometer Angular Reflector Figure 205 Agilent 10770A Angular Interferometer and Agilent 10771A Angular Reflector Optical schematic 608 Figure 206 shows the laser beam path through the optics The angular optics create two parallel beam paths between the angular interferometer and the angular reflector The spacing between the two paths 32 61 mm or 1 28 inches is precisel
296. r with Windows Figure 100 Agilent 10702A Linear Interferometer Agilent 10702A 001 Linear Interferometer with Windows 396 Laser and Optics User s Manual Vol II Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 The Agilent 10702A Linear Interferometer being the simplest interferometer should be used whenever possible The measurement retroreflector for this interferometer is the Agilent 10703A Retroreflector Displacement is measured between the interferometer and the retroreflector cube corner Either one or both can move If the linear interferometer must move the Agilent 10702A 001 Linear Interferometer with Windows must be used see Figure 101 Normally one optic is mounted on a moving part and the other is mounted on a fixed part and the displacement between the two is measured A diagram of this is shown in Figure 102 Note that for multi axis installations each axis must be mechanically independent of the other In other words motion in the Y axis should have no effect on the alignment of the X axis optics The Agilent 10766A Linear Interferometer see Figure 103 is optically identical to the Agilent 10702A 001 Linear Interferometer with Windows However in order to withstand the handling and repeated installations of calibrator type applications the Agilent 10766A interferometer has a more robust housing than the Agilent 10702A Option 001 interferometer which is intended for
297. r 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in Volume I of this manual Provide for aligning the optics laser head and receiver s on the machine Ideally you want to be able to translate beam in two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications heading at the end of this chapter Laser and Optics User s Manual Vol II 431 20 Agilent 10706A Plane Mirror Interferometer Alignment General This procedure covers specifically the alignment of the Agilent 10706A Plane Mirror Interferometer as applied to an X Y positioning system using flat mirrors as measurement reflectors It is assumed that 1 the mirror surfaces are flat to within the tolerances required for operation of the plane mirror interferometer Refer to the recommendations under the Specifications heading at the end of this chapter and 2 the mirror surfaces have been aligned perpendicular to each other and their respective directions of travel Figure 124 illustrates the most common 2 axis plane mirror interferometer installation The interferometers have been configured to turn the beam in this example The alignm
298. r Interferometer Description The Agilent 10706B High Stability Plane Mirror Interferometer see Figure 133 is an improved version of the Agilent 10706A interferometer It offers very high thermal stability Its thermal drift is typically 1 12 that of a conventional plane mirror interferometer The Agilent 10706B High Stability Plane Mirror Interferometer uses plane mirror reflectors For X Y stage applications the user must provide the mirror s Using plane mirror reflectors allows for a marked improvement in measurement stability thereby reducing the designer s error budget Existing system designs can be easily upgraded since the Agilent 10706B interferometer is an exact functional replacement for the Agilent 10706A interferometer and is the same size and weight It can be used in the same applications as the Agilent 10706A interferometer but requires different alignment techniques See the Alignment section later in this chapter for alignment procedures Externally and in its use the Agilent 10706B interferometer is identical to the Agilent 10706A Plane Mirror Interferometer described in the previous chapter Chapter 20 Internally however the design and configuration of the Agilent 10706B interferometer s optical elements differs from that of the Agilent 10706A interferometer You can see this difference by comparing the laser path drawings for the two interferometers In addition to the material presented in this c
299. r and Optics User s Manual Vol II 595 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Procedure Planning the measurement setup Determine the general plan for your measurement Examples of measurement setups are given throughout this manual Particularly your plan should address 1 Which axes you want to measure and what measurements you want to make Where the interferometers will be positioned with respect to the stage mirrors Where the laser head will be positioned and how the laser beam will be delivered to the interferometers and Making sure you will have enough laser power to drive all receivers in your measurement system Good practice defines the plane and direction of all beam paths against machined surfaces known to be parallel or perpendicular to the stage plane You may need to provide special mounting arrangements for the laser head and the optics in order to place the measurement beams where you want them on the stage mirrors Initial installation and setup 1 596 Install the laser head the beam steering optics and the beam splitting optics in their general locations as specified in your plan The interferometer s will be installed after the beam paths have been established as described below Turn on power to the laser head and select the laser head s small output aperture Refer to Chapter 4 System Installation and Alignment in Volume I of this manual be
300. r any laser head used with See Note the Agilent 10881A B C or N1251B Laser Head Cable Agilent 10780C F Receiver Agilent 10885A PC Axis Board Agilent 10880A B C Receiver Cable See Note Input 110 240 Vac 50 60 Hz Agilent 10881A B C Reference or N1251B Laser Laser Head Cable on Board for 15V Wu Agilent 10884B Power Supply Cable Part of Agilent 10884B Figure 308 Connection the 10884B and 10881A B C and N1251B Laser and Optics User s Manual Vol II Accessories 36 Agilent 10883A B C upgrade kit The Agilent 10884B is part of the 10883A B C upgrade kit which enables the laser head and environment sensors from an Agilent 5528A laser measurement system to be converted to an Agilent 5529A dynamic calibrator system See Figure 309 Table 87 lists the upgrade kit components for a typical system configuration Table 87 Upgrade Kit Components Quantity Agilent Part Description Number 10883A Upgrade Kit 10884B Power Supply 05508 60212 Remote Cable Adaptor 10751 60209 Cable Adaptor 10751 60306 Cable Adaptor 10883 60201 3 m Laser Head Cable 10883B Upgrade Kit Same as 10883A 10883 60202 7 m Laser Head Cable 10883C Upgrade Kit Same as 10883A 1 10883 60203 20 m Laser Head Cable Laser and Optics User s Manual Vol II 765 36 Accessories Agilent 10884B and 10883A B C installation and use The A
301. r both of which may be moving Viewed another way this allows measuring the motion of one reflector relative to a reference datum elsewhere in the machine external to the interferometer itself This is unlike the typical interferometer configuration because usually the reference beam path length does not change in differential configurations it can Take care during design and layout of a differential measurement to avoid introduction of alignment errors thermal or mechanical instabilities and potential deadpath problems Both reflectors reference and measurement should be of the same type cube corner or plane mirror this minimizes thermal drift problems with ambient temperature changes To use an Agilent 10705A Interferometer in a differential measurement configuration the reference cube corner can simply be detached from the interferometer housing and attached to the reference surface of interest This is shown using an Agilent 10702A Interferometer for the example in Figure 7A 7 Be aware that all installation and alignment requirements for the measurement reflector now apply also to the reference reflector Plane mirror measurements The special option C01 10705A interferometer is an Agilent 10705A interferometer specially modified to allow its use with plane mirrors or highly reflective surfaces The C01 10705A modification removes one quarter wave plate resulting in an optical configuration similar to that of the Agilent 1070
302. r optic is set to translate the beam horizontally and vertically Laser and Optics User s Manual Vol II 391 17 Beam Directing Optics Thermal stability The RPT manipulator can be fastened to most materials without concern for the difference between material thermal expansion coefficients due to the transmissive design Optical input output ports and adjustment access The Agilent N1209A RPT Manipulator has one input port and one output port There is only one mounting face An adjustment tool is used to adjust the pitch and yaw of the translator optic The Risley prism set is adjusted by hand Adjustment tools Customer supplied hardware 4mm hex key wrench 2mm hex key wrench A customer supplied 4 mm hex key wrench is needed to adjust the pitch and yaw of the translator optic A 2 mm hex key wrench is used to tighten the locking screws after making adjustments See the Agilent N1209A Risley Prism Translator RPT Manipulator User s Guide for details on mounting aligning adjusting etc of this beam manipulator 392 Laser and Optics User s Manual Vol Il Beam Directing Optics Agilent N1209A RPT Manipulator Specifications Physical Characteristics Dimensions Weight Resonant Frequency Material Glass Metal Thermal Drift Translation Angle Optical Efficiency Risley Prism Clear Aperture Translator Clear Aperture Beam Translation Range Beam Translation Resolution Maximum Angular Beam Deviation Ang
303. r than the Agilent E1708A Agilent recommends the use of a scope probe to align the Agilent E1709A Approximately 130 mm 5 in of space above the top of the receiver is needed to allow the scope probe to be plugged in to the J3 connector The Agilent E1708A which is almost identical to the Agilent E1709A does not have a scope probe connector and does not have this space requirement Therefore when retrofitting the Agilent E1709A into an Agilent E1708A application make sure there are provisions for this scope probe access For maximum slew rate the Agilent 10898A Dual Laser Axis Board and high performance cables are required When replacing an Agilent 10780C F with either an Agilent E1708A or Agilent E1709A metal mounting screws can be used Plastic screws are recommended for the Agilent 10780C F Specifications and characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Specifications for the Agilent E1709A Remote High Performance Receiver are provided in the following subsection Laser and Optics User s Manual Vol II 721 35 722 Receivers Agilent E1709A Remote High Performance Receiver Specifications Weight For Agilent E1709A 190 grams 6 7 ounces For remote sensor with 2m cable 26g 0 9 oz Dimensions see Figure on next page
304. r to the wavelength tracker s installation refer to Figure 166 for an exploded view of the tracker s hardware and a listing of their respective Agilent part numbers 502 Laser and Optics User s Manual Vol 1 WAVELENGTH TRACKER MOUNTING HARDWARE Reference Designator Description Screw HD cap 10 32 0 75 in Ig Agilent 10717A Wavelength Tracker Agilent Part Number 3030 0182 Washer spring 3050 1274 Washer flat 1 4 in 0 281 in lg 3050 0583 Hitch pin clip 1480 0694 Subplate 10717 20209 Figure 166 Wavelength tracker mounting hardware Laser and Optics User s Manual Vol Il Washer 2 part spherical 3050 1272 503 24 24 Agilent 10717A Wavelength Tracker 1 Setthe wavelength tracker over the tapped holes on your equipment Do not remove red tape and hitch pin clips at this time 2 Engage three to four threads of the three mounting screws see Figure 166 by rotating each screw three to four revolutions using the hex ball driver supplied WAVELENGTH TRACKER ADJUSTMENT HARDWARE Rear Mirror Mounting Screw hidden Front Mirror Mounting Screw Pitch Adjustment Screw A Input Aperture Mounting Screw Vertical Translator Adjustment Screw Figure 167 Agilent 10717A Wavelength Tracker adjustment hardware 3 Remove the three hitch pin clips by pulling on the red tape 4
305. racteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Specifications for the Agilent E1708A Remote Dynamic Receiver are provided in the following subsection 712 Laser and Optics User s Manual Vol Il Receivers 35 Agilent E1708A Remote Dynamic Receiver Specifications Weight 170 grams 6 0 ounces Electrical Cables 26 g 0 9 ounces for remote sensor with 2 m cable Agilent 10790A 5 m 16 4 ft Dimensions see figure below Agilent 10790B 10 m 82 8 ft Typical Power Requirements 15 volts 1V at 250 mA Agilent 10790C 20 m 65 6 ft maximum Electrical cables for Agilent 10885A 10889B 10896B 10897C Heat Dissipation 3 8 W typical for receiver 10898A or N1231A B axis board 0 0 W for remote sensor Agilent 10880A 5 m 16 4 ft Agilent 10880B 10 m 32 8 ft Agilent 10880C 20m 65 6 ft Pitch 1 degree or high performance electrical cables Yaw 1 degree Agilent N1250A 5 m 16 4 ft Maximum Sensitivity 2 2 uW E1708A with 2 m cable Agilent N1250B 10 m 32 8 ft 5 0 uW E1708A with 10 m cable Fiber Optic Cables Length 2 m standard Alignment Tolerances Roll 3 degrees Output Signal Differential square wave at Doppler shifted split frequency 10 m maximum 100 kHz to 7 2 MHz Designed to operate wi
306. ration 494 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume ll 24 Agilent 10717A Wavelength Tracker Description 496 Special Considerations 500 Installation and Alignment 501 RE Agilent Technologies 495 24 Agilent 10717A Wavelength Tracker Description The Agilent 10717A Wavelength Tracker see Figure 163 uses one axis of a laser measurement system to report wavelength of light changes not changes in position displacement The Agilent 10717A Wavelength Tracker s output can be used to correct displacement values reported via other measurement axes in the system Since the wavelength of the laser light is the length standard used in Agilent laser measurement systems being able to track these changes helps to make more accurate measurements The Agilent 10717A Wavelength Tracker consists of an optical reference cavity called an etalon and an Agilent 10715A Differential Interferometer Both components are mounted on a common metal baseplate and prealigned at the factory Built in baseplate adjustments simplify installation and alignment to the laser system Figure 164 shows the optical schematic for the Agilent 10717A Wavelength Tracker Al Il Agilent 10717A Wavelength Tracker Figure 163 Agilent 10717A Wavelength Tracker 496 Laser and Optics User s Manual Vol II Agilent 10717A Wavelength Tracker 24 REFERENCE PATH fa In Plate Front Re
307. rdware supplied with the Agilent 10723A adapter to mount the adapter as described in step 4 4 Using the hex key provided install the four 2 56 x 3 16 inch long screws into the holes on the flange of the Agilent 10723A adapter housing Be sure they do not protrude through the flange a Equip both 4 40 x 1 2 inch long mounting screws with a compression spring and use them to install the Agilent 10723A adapter in place of the removed Reference Cube Corner Either set of mounting slots may be used to attached the High Stability Adapter to the interferometer Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 b Tighten both mounting screws until the head of each just begins to compress the spring Then tighten each screw two turns to properly compress each spring c Continue to step 5 Agilent 10723A High Stability Adapter Figure 131 Agilent 10723A High Stability Adapter Agilent 10706A Plane Mirror Interferometer Conversion Using the Agilent 10723A 1 rr High Stability Adapter A Compression Springs Agilent 10723A 3 High Stability for turned configuration only Plane Mirror Adapter b Y Converter Agilent 10723A High Stability Adapter Plane Mirror Converter Y Cube Corner Straight through Configuration Turned Configuration A Cube Corner Figure 132 Agilent 10706A Conversion Using the Agilent 10723A Laser and Optics User s Manual Vol II 443 2
308. rdware electrically isolates the Agilent 10780C or Agilent 10780F receiver from the machine and reduces problems with heat conduction The receiver typically dissipates 2 0 watts with a maximum dissipation of 2 7 watts Plastic pads keep an air gap around the receiver and act as thermal and electrical isolators CAUTION Use Nylon screws only Agilent 2360 0369 The receiver housing must be electrically isolated from the mounting fixture The remote sensor in the Agilent 10780F Remote Receiver does not dissipate any power The remote sensor does not require a nylon screw Allow a 5 cm space at the rear of each receiver housing for each cable connection e Maintain a bend radius of at least 35 mm 1 4 inches to prevent signal attenuation in the Agilent 10780F receiver s fiber optic cable Cable connection Agilent 10790A B C Receiver Cable This cable s connectors are identical on either end as shown in Figure 282 of Chapter 36 Accessories The connectors on the cable and on the receiver and Agilent 10895A axis board are keyed to go together only one way The connectors on the cable each have a locking ring which takes a 1 4 turn clockwise to secure the cable to its mating connector CAUTION Each connector on an Agilent 10790A Agilent 10790B or Agilent 10790C cable has both a male and female half Before making a connection be sure the male half of the cable connector is properly aligned with the female half of
309. re A Use a piece of translucent tape to help observe the laser beam AGILENT 10715A WITH ALIGNMENT AID 2 257 Alignment Aid Part Number 10706 60001 ae Reference Beam Figure 151 Alignment aid attached over reference beam 478 Laser and Optics User s Manual Vol 11 Agilent 10715A Differential Interferometer 22 AGILENT 10715A VIEWED FROM PLANE MIRRORS WITH PROPER ALIGNMENT Reference Beam Measurement Beam Measurement Beam Reference Beam Figure 152 Differential interferometer as viewed from plane mirrors with proper alignment Specifications and Characteristics Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Using electronic resolution extension the system resolution is increased significantly Depending on the system an additional resolution extension factor of 32 for Agilent 10885A and 10895A or 256 for Agilent 10897C and 10898A is usually available Interferometer Fundamental Optical System Resolution 1 System Resolution 2 Resolution see NOTE see NOTE Agilent 10715A A 4 158 2 nm 6 2 pin A 128 5 0 nm 0 2 yin A 1024 0 62 nm 0 024 pin The system resolution 1 is based on using 32X electronic resolution extension This is available with the Agilent 10885A and Agilent 10895A electronics The system resolution 2 is based on u
310. re visually aligned parallel to the axes of travel 2 Align the laser beam parallel to the axis of travel by using the Gunsight or Autoreflection alignment method ONE LINEAR and ONE STRAIGHTNESS AXIS RE ee RUM Straightness Interferometer Position Straightness a A Beam Interferometer l Y Splitter Position B B Receiver at 1 lt pe 1 fi i A Linear Interferometer Beam ie and Receiver Retroreflector Beam Beam Straightness Straightness Splitter A Splitter B Position A Position B OK OK Figure 215 One linear and one straightness axis 624 Laser and Optics User s Manual Vol 11 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 Align the Straightness Reflector so that its mirror axis see Figure 211 is parallel to the laser beam and axis of travel This mirror axis forms the optical straight edge analogous to traditional straight edge Adjust the interferometer to align its optic to the reflector to obtain a measurement signal at the receiver green LED is on Fine adjust the interferometer bezel and reflector to obtain maximum measurement signal at the receiver monitor the voltage at the receiver test point Remove measurement slope This slope refers to the angle inscribed by the mirror axis and the axis of travel see Figure 219 Alignment procedures The following procedure descr
311. ree Axis Interferometers Agilent Z4399A Three Axis Interferometer specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Natural Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear Angular yaw or roll resolution 1 66 kg 3 65 Ibs See Figure 245 on page 667 See Figure 246 on page 668 Invar 7 1 x 106 mm mm C BK 7 1 5 x 10 mm mm C Invar BK 7 700 Hz M5 x 0 8 Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible M4 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular Thermal Drift due to Glass Path Imbalance Non linearity Error Output Efficiency Typical of all axes Worst case for all axes Measure Point Tolerance Absolute Input Beam Cone Angle IBCA Beam Parallelism Axis 1 Axis 2 Axis 1 Axis 3 Operating Temperature lt 10nm C 1nm 18 12 0 5 mm relative to nominal location lt 1 mrad Figure 249 on page 670 25 urad 25 urad 19 to 26 C Measurement and Reference Mirror Recommendations Reflectivity Flatness gt 92 20 666 1 Line
312. rement mirror may have a combination of 8 displacement pitch and yaw motions v the Measurement Axes may have uU Measurement different Df values as shown Mirror REFERENCE PATH fA Agilent 10737L and Agilent 10737R Reference Compact Three Axis Interferometers Mirror fA lt gt From Axis 2 lt lt gt Laser Y 4 9 7 lt P Axis 1 fa 2c Axis 2 fy Axis 3 fA Plate Measurement Mirror COMPOSITE fA and fg Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers P Y y Reference AN iN AN Axis 1 fg amp 2A fa fy Axis 2 fpt2Afo fA l 3 Axis 3 fg 2A fa fa mpm mmm lt gt mpm gt n m S S N N N ZZ Measurement Mirror LEGEND a gt fa m Qm m m ig lt fa and fg f F Rounded corners are used to help you trace paths Figure 198 Agilent 10737L R Compact Three Axis interferometers beam paths 588 Laser and Optics User s Manual Vol II Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter make sure that you provide enough laser beam power to any multiaxis interferometer so all receivers connected to it receive adequate light power This will help ensure that each measurement receiver
313. rometer 7y Agilent 10780C Receiver Agilent 10700A 33 Beam Splitter Figure 213 Single axis system 622 Laser and Optics User s Manual Vol 11 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics 30 ONE LINEAR and ONE STRAIGHTNESS AXIS Retroreflector Linear Interferometer Y Straightness Receiver Interferometer Position A Beam Splitter 1 1 1 1 Straightness Interferometer Position Splitter Figure 214 linear and one straightness axis 1 Supply a rigid mounting surface for both optical components Fine position adjustments of both components will be necessary The Straightness Reflector Mount gives full angular adjustment capability for the reflector 2 The Straightness Interferometer must be located between the laser head or beam directing optic and the Straightness Reflector 3 The measurement beams are returned to the receiver See the previous configuration diagrams Laser and Optics User s Manual Vol II 623 30 Agilent 10774A Short Range Straightness Optics and Agilent 10775A Long Range Straightness Optics Principal alignment steps The principal steps used to align the Straightness optics are listed below followed by a detailed alignment procedure for a specific configuration 1 Thelaser head and optics are mounted in the desired locations and the laser beams a
314. rometer is rotated Fasteners The Agilent 10737L R interferometers are supplied with English mounting hardware which is required to fasten it to its adjustable mount Laser and Optics User s Manual Vol 1 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 Installation and Alignment Summary The installation and alignment procedure has two major parts Planning and setting up the laser beam path s Installing and aligning the interferometer s Objectives of the installation and alignment procedure are 1 Minimizing cosine error 2 Maximizing signal strength at the receivers 3 Ensuring a symmetrical range of rotation about the zero angle point General Refer to the Agilent 10706A interferometer Installation information in Chapter 20 of this manual Tools and Equipment Required or Recommended Table 75 lists and describes the tools and equipment needed to install and align the Agilent 10737L and 10737R interferometers Laser and Optics User s Manual Vol II 593 Table 75 Tools and Equipment Required or Recommended Item and Description Penta prism or similar prism that bends light exactly 90 degrees 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers Mfr Part Number Mfr Agilent unless otherwise indicated Prisms of this type are available from scientific or optical supply shops Comment Note etc Recommended but not required For setting up
315. ror reflector to obtain distinct advantages The unique contribution of the Agilent 10706A Plane Mirror Interferometer see Figure 119 is its tolerance of angular misalignment of the plane mirror reflector A simple linear interferometer would require a plane mirror to remain perpendicular to the laser beam within several arc seconds otherwise the interference fringes would not be detectable With the Agilent 10706A interferometer angular deviations of minutes of arc are commonly acceptable With this measurement optic interference fringes are detectable even though the measurement beam is not at perfect right angles to the mirror Therefore several valuable applications become possible For example in a two axis laser measurement system the X reflector can be allowed to move in the Y direction without affecting the signal strength or the X measurement Consequently both reflectors of a two axis system can be mounted on the same moving part to minimize Abb offset error Defining the measuring point as the point where the two axis beams cross the measurement is essentially independent of yaw of the moving stage Such a design is shown in Figure 120 Compare the system shown in Figure 120 to a two axis system using linear or single beam interferometers The X axis retroreflector must be mounted ona part of the stage that moves in the X direction and not in the Y direction Also the Y axis retroreflector must be mounted on a different part o
316. rror Interferometer 397 446 10706B Plane Mirror Interferometer Specifications 464 10707A Beam Bender 372 10707A Beam Bender Specifications 372 10710B 10711A Adjustable Mount Specifications 729 10713B 1 Inch Cube Corner 409 Laser and Optics User s Manual Vol II 10713B 1 Inch Cube Corner Specifications 409 10713C 1 2 Inch Cube Corner 421 10713D 1 4 Inch Cube Corner 422 10715A Differential Interferometer 466 10715A Differential Interferometer Specifications 480 10715A orientation horizontal or vertical 471 10715A 001 Turned Configuration Specifications 480 10716A High Resolution Interferometer 482 10716A High Resolution Interferometer Specifications 494 10716A 001 Turned Configuration Specifications 494 10717A Wavelength Tracker 496 10717A Wavelength Tracker Specifications 508 10719A One Axis Differential Interferometer Specifications 529 10721A and 10721 01 Two Axis Differential Interferometer Specifications 552 10721A Two Axis Differential Interferometer 513 534 10721 COITwo Axis Differential 552 10722A Plane Mirror Converter 397 10722A Plane Mirror Converter Specifications 440 10723A High Stability Adapter 424 442 10723A High Stability Adapter Specifications 440 10724A Plane Mirror Reflector 441 466 750 751 10724A Plane Mirror Reflector Specifications 441 10724A Plane Mirror specifications 753 10725A 50 Beam Splitter 373 10725A Beam Splitter Specif
317. rror is used in both the Agilent 10772A and Agilent 10773A only the mounting is different The Agilent 10773A can be used in place of the Agilent 10707A Beam Bender if a larger aperture is needed The Agilent 10773A Flatness Mirror is used mostly in laser calibrator systems for machine tools Its mounting is via a swivel attached baseplate having no other tapped holes for alternate mounting The Agilent 10773A is shipped with the 5061 6019 Hardware Kit 756 Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10773A Flatness Mirror Figure 301 Agilent 10773A Flatness Mirror Agilent 10773A Flatness Mirror Specifications Dimensions see figure below Weight 661 grams 23 3 ounce Materials Used Housing Stainless Steel Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Optical Efficiency Typical 99 Worst Case 98 30 0 mm 50 0 mm 1 18 1 97 Y To Match Agilent 10770A E Clears M3 x 0 5 250 mm 1 18 Aperture Dia bou Mirror 18 0 x 26 0 mm 4 33 Turns 0 71 x 1 02 45 7 12 2 mm 1 80 0 48 32 2 mm Figure 302 Agilent 10773A Flatness Mirror dimensions Laser and Optics User s Manual Vol II 757 36 Accessories Agilent 10776A Straightness Accessory Kit The Agilent 10776A Straightness Accessory Kit see Figure 303 consists of a large retroreflector Agilent part number 10776 67001 and mounting
318. rror must be aligned perpendicular to its axis of linear motion and the reference mirror must be aligned parallel to the measurement mirror before proceeding with the steps below When using the Agilent 10719A interferometer for angle measurements comments in the procedure below regarding reference mirror alignment may be disregarded since they are inherently satisfied by the use of a single mirror for these measurements For a system having more than one measurement axis choose a practical sequence in which to align the axes before beginning the interferometer alignment Be aware that the laser head and certain beam directing optics may be adjusted for the first axis but then must not be readjusted while Laser and Optics User s Manual Vol II 525 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 526 aligning any other axis In fact the convenience of being able to make independent adjustments may suggest the use of additional beam directing optics in certain cases Begin by installing the laser head and the optics in their desired locations and roughly aligning the laser beam so it is centered on the input aperture of each interferometer Do not install the receivers yet If the interferometers are mounted on adjustable mounts instead of fixed platforms which predetermine their locations position them to within the translational and rotational tolerances described in Mounting section above Th
319. s The cable used depends on the axis board used and the cable length required Cables are described in Chapter 36 Accessories of this manual The Agilent 5519A B Laser Head receiver connection is made via the cable that also provides power for the laser The cable depends on the axis board used Cables are described in Chapter 36 Accessories of this manual Agilent 10790A B C cables An Agilent 10790A Agilent 10790B or Agilent 10790C Receiver Cable is used to connect the Agilent 10780C or Agilent 10780F receiver to the Agilent 10895A VME Axis Board for both measurement and Wavelength Tracker axes Agilent 10880A B C cables An Agilent 10880A Agilent 10880B or Agilent 10880C Receiver Cable is used to connect an Agilent 10780C or Agilent 10780F receiver to an Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A PCI Three Axis Board for both measurement and Wavelength Tracker axes Laser and Optics User s Manual Vol II 693 35 Receivers Effects of motion and orientation Motion of the receiver or laser head along the beam path X has no effect on the measurement since both f and f would exhibit Doppler shift Small motions of the laser head receiver interferometer or retroreflector in a direction perpendicular to the beam
320. s User s Manual Vol II 501 24 Agilent 10717A Wavelength Tracker The Agilent 10780C 10780F E1708A or E1709A receiver is properly aligned when 1 the laser beam is centered on its input aperture 2 the LED indicator on top is lighted and 3 the voltage at the its test point is greater than 0 7 Vdc A receiver alignment procedure is provided in Chapter 35 Receivers in Volume II of this manual No more than six measurement axes are installed in addition to the wavelength tracker Alignment starts at the laser head and moves out one component at a time laser head beam bending and beam splitting optics wavelength tracker and then receiver until the last component of the Wavelength Tracking Compensation system is aligned and the laser beam is centered on the receiver s aperture This alignment procedure has the laser beam entering the Agilent 1071 A s differential interferometer through aperture A Do not remove the red tape and three hitch pin clips until instructed to do so in this procedure The clips make installation of the wavelength tracker easier The red tape and clips see Figure 166 item H4 keep the three mounting screws in place during installation and allow installation of the unit at any angle without having to physically hold the three mounting screws in place After installation is complete the clips are removed by pulling on the red tape If the red tape and mounting hardware are removed or lost prio
321. s User s Manual Vol 1 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 203 50 mm lt 8 01 68 72 mm lt 270 r 21 0 mm gilent 0 82 3 Axis Interferometer 26 0 mm y 1 02 VSELOL E Y 63 96 mm 190 0 mm 2 51 7 48 11 2 44 3 mm 5 0mm 0 44 1 74 Laser Beam 0 19 18 80 mm 0 74 4 0 mm 2X 15 0 mm 0 15 31 18 mm 0 59 2X 8 0 mm 1 22 0 31 _1 B o O oo 9 Cy tI 7 0 mm A 0 27 105 0 mm 88 5 mm y 4 13 3 48 Y B E Y 2X 11 0 mm gt 4x 5 8 mm Thru d vd mm lt 26 0 0 43 0 228 0 43 1 02 31 25 a 179mm gt lt 5 5 mm 470 mm 29 7 04 2 16 lt 1 85 Bottom View 60 0 mm 2 36 This surface is recessed from Datum A by 0 5 mm 0 02 Figure 191 Agilent 10735A Three Axis Interferometer dimensions Laser and Optics User s Manual Vol II 577 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers Agilent 10736A Three Axis Interferometer and Agilent 10736A 001 Three Axis Interferometer with Beam Bender Specifications USE Multiaxis applications such as precise positioning
322. s where the input beam must be turned at exactly 90 degrees It contains two accurately aligned mirrors in a special housing The optical square is a constant deviation device because the 90 degree bend is constant even if there is an angular rotation between optical square and the input beam Agilent 10777A Optical Square Figure 305 Agilent 10777A Optical Square 760 Laser and Optics User s Manual Vol II Agilent 10777A Optical Square Specifications Dimensions see figure below Weight 4 0 kilograms 8 8 pounds Materials Used Housing Aluminum Optics Optical Grade Glass Optical Efficiency 92 Worst Case WLLLOL 3uvnos 12140 M10 X 1 5 4 Places Accessories 36 49 5mm 2 8 0 mm 0 31 2 Places 1 95 145 0 mm 5 71 28 0 mm 1 10 2 Places 145 0 mm 5 71 43 0 mm 1 69 Figure 306 Agilent 10777A Optical Square dimensions Laser and Optics User s Manual Vol II 14 0 mm 0 55 2 Places 761 36 Accessories Agilent N1203C 04C 07C Beam Manipulator Accessories Adjustment tools Adjustment tool kit Agilent N1206T This kit contains a set of adjustment levers and an adapter that are designed to make user desired beam alignment by rotating the ball mirror inside the manipulator accessible from many different positions
323. sed to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N12254A Laser and Optics User s Manual Vol II 641 31 Agilent E1826E F G One Axis Plane Mirror Interferometer 1 5 gt Input La Beam Primary Beam Q Secondary Beam 3x M3 Captive Screws Radius 128 Figure 228 Agilent E1826E One Axis Plane Mirror Interferometer right turn dimensions and beam pattern 642 Laser and Optics User s Manual Vol II Agilent E1826E F G One Axis Plane Mirror Interferometer 31 Agilent E1826F One Axis Plane Mirror Interferometer Specifications Weight Dimensions Glass Dimensions Materials Baseplate Coefficient of Thermal Expansion Optics Natural Frequency Mounting Interface Fasteners Surface Profile Surface Finish Beam Diameter Resolution Optical Linear resolution 0 41 kg 91 Ibs See Figure 229 on page 644 See Figure 231 on page 647 Invar Option 070 Passivated 416 Stainless Steel Option 071 1 5 x 10 mm mm C Invar 9 9 x 10 mm mm C SS416 BK 7 1 kHz 3 x Socket Head Captive Screw SHCS 0 02 mm 0 4 um 9 mm maximum visible 0 62 nm using 25
324. sembly is at 3 5 KHz which is the Ball itself The next resonance is at 3 7 kHz which is the Housing Thus there is no resonance which could disturb laser beam alignment or position in the operating environment Shock Operating 40 g half sine 2 9 ms A shock load of 40 g half sine 2 9 ms will not disturb the alignment of the Ball Refractive Translator or laser beam Non Operating 60 g half sine 2 9 ms A shock load of 60 g half sine 2 9 ms will not damage the Manipulator components but may disturb alignment of the Ball Recommended Mounting Screws Four screws M5x 20 long Alloy Steel Grade 12 9 Seating Torque is 5 N m if Cadmium plated or 6 5 N m if unplated OR Four screws 10 32 UNF x 75 inches long Alloy Steel Seating Torque is 39 in lbs if Cadmium plated or 51 in lbs if unplated Adjustment Tooling 5 mm Hex key wrench Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Agilent N1204C Precision Horizontal Beam Bender Specifications and Characteristics Dimensions See Figure 96 Weight 920 grams Materials Used Martensitic stainless steel Optical grade glass Optical Efficiency 99 typical 97 5 Worst case Input Output Clear Aperture 13 0 mm Input Beam Position Tolerance 1 6 mm for 69mm beam Angular Beam Steering Range from nominal 90 9 mm beam centered on 13 mm Aperture Yaw 6 using Adjustment Lever and adapter at 25 mm port Pitch 3 usin
325. ser Head Power only cable 20 m 0 25 m 0 m female DIN connector 735 36 Accessories Agilent 10790A B C Receiver Cable The Agilent 10790A B C Receiver Cable shown in Figure 282 is used to connect the measurement signal from any Agilent receiver to the Agilent 10895A VME Axis Board Figure 282 Agilent 10790A B C Cable 736 Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10791A B C Laser Head Cable The Agilent 10790A B C Laser Head Cable shown in Figure 283 is used to connect an Agilent 5517A B BL C D DL FL Laser Head to an Agilent 10895A VME Laser Axis Board It has spade lugs for connecting the laser head to a customer supplied power supply Figure 283 Agilent 10791A B C Cable Laser and Optics User s Manual Vol Il 737 36 Accessories 738 Agilent 10880A B C Receiver Cable The Agilent 10880A B C Receiver Cable shown in Figure 284 is used to connect the measurement signal from any Agilent receiver to the Agilent 10885A PC Axis Board Agilent 10889B PC Servo Axis Board Agilent 10896B VME Laser Compensation Board Agilent 10897C VME High Resolution Laser Axis Board Agilent 10898A VME High Resolution Dual Laser Axis Board or Agilent N1231A B PCI Three Axis Board Figure 284 Agilent 10880A B C Cable Laser and Optics User s Manual Vol Il Accessories 36 Agilent 10881A B C Laser Head Cable The Agilent 10881A B C Laser Head Cable shown in Figure 285 is used to connect an
326. ser beam See the Agilent N1203C Precision Beam Translator and Agilent 1204C and N1207C Precision Beam Benders User s Guide for details on mounting aligning adjusting etc of these beam manipulators Laser and Optics User s Manual Vol Il Beam Directing Optics Agilent N1203C Precision Beam Translator Specifications and 17 Characteristics Dimensions See Figure 96 Weight 920 grams Materials Used Optical Efficiency Input Output Clear Aperture Input Beam Position Tolerance on center of clear aperture Angular Beam Deviation Beam Translation Sensitivity Resolution Beam Translation Range from input at normal incidence Martensitic stainless steel Optical grade glass 99 typical 98 7 Worst case p 19 0 mm 5mm Note input beam de centering may limit translation range See range specification below 3 mm with 9 mm beam 4 0 mm with 96 mm beam 4 4 mm with 3 mm beam 10 microradian maximum 1 0 micrometer Thermal Drift Translated Beam Displacement per C 10 100 C Shift of output beam position is theroretically possible in the presence of a thermal gradient the assembly but the refractive translator is quite insensitive to small angular changes Nevertheless even these miniscule shifts are transitory and the original position is recovered when the gradient has settled out Thermal Stability of Alignment Ball to Housin Beam position alignment is
327. set from it by 19 05 mm 0 750 inch To reduce thermal drift errors the measurement and related reference beam paths have the same optical path length in glass This reduces measurement errors due to temperature changes in the interferometer Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 26 Plate Reference REFERENCE PATH fA Mirror lt lt 7 fAXT 7 Agilent 10721A Two Axis 0 Differential Interferometer Z lt fA X2 c lt lt 22 fA X1 To A Z Receiver f I Y fi vali fA X2 Y 1 Vs w n JB 22 A Receiver Stage ay hh fA X2 Y Mirror Beam Divider fA X2 t Y ifa 4 Plate Plate MEASUREMENT PATH fp Reference Mirror Agilent 10721A Two Axis Differential Interferometer 4 fg Xt s2af A Receive im 57 7 From pie Qu e Laser ymmmmmmp m m m MN Em EM gt sow fg X2 2 b Receiver mm EN N e xim gt Beam Divider J A irror 1 4 Plate A MM Plate Reference COMPOSITE fA and fB 2 Minor 7 fa X1 27 SA I Agilent 10721A Two Axis E 7 Differential Interferometer Y R aA 7 7 fA X1 fg X1 2Af Recelver lt lt A gt fa and fB gt m mm m um m m mod From EX L XR p gt m m m um um m m E
328. similar to that for the Agilent 10706A Plane Mirror Interferometer The main difference is that in this procedure the laser beam must pass through small apertures which requires fairly precise alignment to avoid clipping part of the beam It is assumed that the measurement mirror has been aligned perpendicular to the axis of travel 474 Laser and Optics User s Manual Vol II Agilent 10715A Differential Interferometer 22 The alignment procedure below is for the Standard Configuration with the laser beam entering the interferometer in aperture B The alignment procedure for the Turned Configuration is similar except it is more sensitive to angular alignment of the interferometer 1 Select the small aperture on the laser head 2 Roughly align the laser beam for each axis perpendicular to the measurement mirror This is done by autoreflecting off this mirror and adjusting the laser head or beam bender until the reflected beam is centered in the small aperture on the laser head 3 Movethe interferometer side to side so that the laser beam enters the input aperture aperture B in this example 4 Placea rectangular gage block over the input aperture so that it reflects the laser beam back toward the laser See Figure 147 AGILENT 10715A WITH GAGE BLOCK Laser Beam amp Gage Block Figure 147 Agilent 10715A with gage block in position 5 Adjust the differential interferometer in pitch and yaw
329. sing 256X electronic resolution extension This is available with the Agilent 10897C and Agilent 10898A electronics Laser and Optics User s Manual Vol II 479 22 Agilent 10715A Differential Interferometer Agilent 10715A Differential Interferometer and 10715A 001 Turned Configuration Specifications Weight 504 grams 1 1 pounds NOTE Flatness deviations will appear as measurement errors Dimensions see figure below when the mirror is translated across the beam Mount should be Materials Used kinematic so as not to bend mirror If accuracy requirements Housing Stainless Steel and Aluminum demand it mirror flatness might be calibrated scanned and Optics Optical Grade Class stored in the system controller to be used as a correction Adhesives Vacuum Grade factor Optical Efficiency including a 98 efficient plane mirror reflector and MEASUREMENT OR REFERENCE MIRROR ALIGNMENT the Reference Mirror REQUIREMENTS VS DISTANCE Typical 40 Maximum Angular Misalignment pitch and yaw Worst Case 30 Depends on distance between interferometer and plane mirror Fundamental Optical Resolution X 4 Typical values are Non linearity Error 2 2 nm 0 09 2 5 arc minutes for 152 mm 6 inches MEASUREMENT PLANE MIRROR RECOMMENDATIONS 1 3 arc minutes for 305 mm 12 inches Reflectance 98 for 633 nanometers at normal incidence 0 7 arc minute for 508 mm 20 inches Optical Surface Quality 60 40 per Mil 0 13830 Thermal Drift 0 002
330. sions 672 Laser and Optics User s Manual Vol Il Agilent E1837A Z4399A and Z4422B Three Axis Interferometers 33 Agilent Z4422B glass dimensions Figure 251 Agilent 24422B glass dimensions Laser and Optics User s Manual Vol II 673 33 Agilent E1837A 24399A and Z4422B Three Axis Interferometers 674 Laser and Optics User s Manual Vol 11 Agilent Laser and Optics User s Manual Volume 11 34 Agilent 24420 and Agilent 24421 Five Axis Interferometers Description 676 Agilent Z4420B Five Axis Interferometer 676 Agilent 24421B Five Axis Interferometer 682 RE Agilent Technologies 675 34 Agilent Z4420B and Agilent 24421B Five Axis Interferometers Description See Chapter 6 NGI Measurement Optics General Information in Volume of this manual for general description and alignment and mounting procedures The Agilent Z4420B and Agilent Z4421B Five Axis interferometers are described in this chapter The two interferometers use the compact monolithic interferometer MIF design The outputs of these interferometers are coupled to a 400 micron fiber with an ST connector and NA of 0 39 The Agilent Z4420B Five Axis Interferometer has a right turn configuration design see figures 252 and 253 The Agilent Z4421B Five Axis Interferometer has a left turn configuration design see figures 257 and 258 The Agilent Z4420B and Agilent Z4421B interferometers can be mounted using three screws in either the upri
331. stance between the laser head and reflector of 0 5 meter and an offset of the return beam at the small aperture of the laser of 500 microns 0 0202 inch the cosine error is approximately 0 12 pp Pitch and yaw the interferometer until the beam reflected from the measurement mirror returns upon itself through the interferometer and back to the small aperture of the laser head Once autoreflection is achieved secure the interferometer preserving the alignment For high accuracy alignment or for installation where there is less than 0 5 meter 20 inches between the laser and mirror perform steps 22 through 24 Remove the alignment target Agilent Part Number 10702 60001 and rotate the turret of the laser head to select the large aperture Do not remove the alignment aid Agilent Part Number 10706 60001 on the output side of the interferometer Center the output beams on the receiver aperture by Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 moving the receiver side to side Translucent tape over the receiver aperture will help you observe when the beam is centered 23 Connect a fast responding voltmeter to the receiver test point Pitch and yaw the plane mirror interferometer until a signal is received at the receiver The voltmeter will suddenly jump to some value greater than 0 25 volt This adjustment is critical and may require great care to achieve the desired result 2
332. stitute the X axis alignment Align the X axis laser beam parallel to the plane of the stage and measurement mirror by adjusting the pitch and yaw of the 50 beam splitter do not adjust the laser head This ensures that the interferometer turns the beam 90 degrees Using an optical square or pentaprism is helpful Secure the 50 beam splitter Place the Agilent 10706B interferometer in the beam path to turn the beam 90 degrees toward the measurement mirror Place the alignment target Agilent Part Number 10702 60001 on the laser input side of the interferometer Place the alignment aid Agilent Part Number 10706 60001 on the output side of the interferometer in the correct orientation the hole allows transmission of the primary measurement beam Select the small aperture on the front turret of the laser head Move the interferometer side to side until the beam 1 passes through the center of one hole on the alignment target 2 passes through the hole on the alignment aid Agilent Part Number 10706 60001 and 3 strikes the measurement mirror Use translucent tape over the aperture of the alignment target to observe centering of the beam If the distance between the laser head and the reflector is greater than 0 5 meter 20 inches the formula given in the Overlapping Dots Method Summary section of Chapter 4 in Volume determines the cosine error based on the offset of the return beam at the laser head For example with a di
333. stment tool kit Once the adjustment is completed and tools removed this mount will provide long term stability of the initial setting in the presence of specified thermal shock and vibration environments P aeo AM Agilent N1204C Precision Agilent N1207C Precision Horizontal Beam Bender Vertical Beam Bender Figure 95 Agilent precision beam manipulators The Agilent N1203C translates the beam so that the measurement beam is positioned where you want it on the stage mirror The offset laser beam remains parallel to the original beam direction The translator is useful whenever a high precision distance measurement with a laser is performed because it can reduce Abb error The Agilent N1204C and N1207C steer the laser beam in angle in either the horizontal or vertical plane The beam bender s optical component a mirror is intended to turn the laser beam 90 relative to the original beam direction The beam bender is useful whenever high precision distance measurements with a laser is performed because it can reduce cosine error Laser and Optics User s Manual Vol II 379 17 Beam Directing Optics 380 Application simplified These beam manipulators are easier to use and more durable than previous versions The manipulators provide more stability to laser measurement systems than previous solutions The operator merely aligns the manipulator with removable tools The operator need not perform the secondary clamping operation
334. t 0 94 0 75 22 4 mm 0 88 r 3 5 mm y 0 14 1 43 1 mm 1 70 lo C15 5 mm 0 61 Toi mim Clearance Hole Insulating 0 75 107 8 mm for M3 6 32 Screw Mounting Pads e 4 25 2 Places 7 1 EI R35 Minimum Y 38 1 mm Y EY 1 4 Bend Radius 1 50 if 10780F RECEIVER Agilent Technologies L 7 6 mm lan N 0 30 Clearance Hole p 1148mm E for M3 6 32 Screw 2 0 4 52 2 Places gt lt 2 3 mm Use Only Nylon Mounting Screw 0 09 Typ HP 2360 0369 to Avoid Ground Loop Figure 267 Agilent 10780F Remote Receiver dimensions 704 Laser and Optics User s Manual Vol II Receivers 35 Agilent E1708A Remote Dynamic Receiver Description The Agilent E1708A Remote Dynamic Receiver shown in Figure 268 is intended for use in applications requiring sub nanometer resolutions of systems in motion It extends the performance of systems that use the Agilent 10897C High Resolution Laser Axis board for VMEbus by providing performance consistent with the high resolution and low variable data age of that board As the Doppler shift caused by motion of the system stage changes the measurement frequency the Agilent E1708A receiver ensures minimal phase processing errors The E1708A also provide immunity to errors induced by changes in measurement signal laser input power level One receiver package is required for each measurement axis in the Laser Transducer
335. t 10721A Two Axis Differential Interferometer LINEAR and YAW MEASUREMENTS Agilent 10707A COLUMN Beam Bender Agilent 10700A N 33 Beam Splitter STAGE Agilent 5517C 003 Laser Head Agilent 10707A Beam Bend Agilent 10719 One Axis Differential Interferometer Fiber Optic Cable LINEAR MEASUREMENT to Receiver Electronics Agilent 10719A or Agilent 10721A Interferometer Reference NOTES COLUMN 1 Linear and yaw measurements are column referenced 2 Yaw measurement uses electronic differencing to measure angle 3 Interferometers use 3 mm diameter laser beam available from the Agilent 5517C 003 4 Required vertical dimension of stage mirror clear aperture is approximately the same as beam diameter 3 mm Measurement Beams Figure 172 Three axes with Agilent 10719A and Agilent 10721A interferometers 514 Laser and Optics User s Manual Vol II Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Five Axis System Using Agilent 10719A and Agilent 10721A Interferometers The five axis system described here consists of three Agilent 10719A One Axis Differential Interferometers an Agilent 10721A Two Axis Differential Interferometer The Agilent 10719A One Axis Differential Interferometers and the Agilent 10721A Two Axis Differential Interferometer may be used in a multiaxis configuration to measure X Y Yaw Pitch and Roll of an X Y stage
336. t 10780F Remote Receiver however any other Agilent receiver may be used One receiver is required for each Agilent 10721A output to be used The advantage of using the remote receiver is that the fiber optic sensor head can be directly attached to the interferometer eliminating the need for separate mounting brackets When laying out an application be sure to allow enough clearance for the fiber optic cable without bending it tighter than its minimum bend radius of 35 mm 1 4 inches Also avoid any kinking where the fiber connects to the sensor head Kinking or excessive bending of this cable can cause signal attenuation Laser and Optics User s Manual Vol II 541 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 542 Mounting pins on the interferometer eliminate the need for any user alignment of the sensor head With the Agilent 10721A interferometer the receiver s sensor head can be oriented only one way at each interferometer output aperture as determined by the location of the threaded mounting hole Use 4 40x1 inch screws to fasten the sensor heads to the interferometer Spacing to beam directing optic The recommended minimum spacing between the interferometer and its beam directing optic is 63 5 mm 2 50 inches This spacing will provide the minimum clearance for the fiber optic cable when the Agilent 10780F Remote Receiver is used Input and output apertures The Agilent 10721A interferometer
337. t 10785A Height Adjuster Post and the Agilent 10784A Base Specifications Figure 281 shows the specifications for the Agilent 10785A Height Adjuster and Post and the Agilent 10784A Base 90 0 mm 3 54 50 0 mm 1 97 30 0 mm To 30 0 mm 1 18 1 18 Captive Screw 2 Places 107 8 mm M3 X 0 5 4 24 4 Places 19 0 mm 0 75 11 7mm O 0 46 Y Side M10 X 1 5 Figure 281 Agilent 10785A Height Adjuster and Post and Agilent 10784A Base dimensions Laser and Optics User s Manual Vol II 731 36 Accessories Cables Cables for transmission of power reference and measurement signals are available from Agilent A typical laser measurement system requires cables as listed in Table 82 If you use the Agilent 5519A B Laser Head s internal receiver a receiver cable is not necessary Table 81 is a summary listing of the Agilent cables that are available for connecting the laser head and receiver s in a measurement system to the system control electronics Note that cable numbers shown in Table 81 identify a family of cables available in different lengths Table 82 provides additional cable information Table 81Summary of available laser system cables PC Device 108851 10889 1231 10881 N1251 10881 N1251 Agilent 5517BL Laser Head 10881 N1251 Agilent 5517C Laser Head 10881 N1251 Agilent 5517D Laser Head 10881 N1251 Agilent 5517DL Laser Head 10881 N1251
338. t Voltage J3 This is the actual output voltage of the Agilent E1709A s first electrical stage It contains both the dc and ac portions of the incoming light signal and hence is used to determine the AC DC ratio This signal is affected by adjustments of the Agilent E1709A attenuator Signal Strength Voltage J2 This is a dc voltage that is proportional to the ac component of the signal at the output of the second electrical stage This signal is affected by any adjustments of the Agilent E1709A attenuator This dc voltage should not be confused with the dc light signal component 718 Laser and Optics User s Manual Vol II Receivers 35 Features Agilent E1706A Remote Sensor The Agilent E1709A requires an Agilent E1706A Remote Sensor containing a lens polarizer and Agilent E1705A Fiber Optic Cable that can be purchased separately or as an option to the Agilent E1709A Glass or plastic fiber cables are available Contact Agilent call center for details The fiber optic cable carries the beam from the remote sensor to the electronics in the receiver body The fiber optic cable length is 2 0 meters to allow for considerable mounting flexibility and ease of use if you require some length other than the standard 2 0 meters contact Agilent call center This arrangement provides several benefits It allows the receiver body to be located well away from the point of beam intercept so receiver heat is not dissipated near the measurement ar
339. t beams 0 1 mrad 20 arc sec Optical Efficiency output beam input beam Average 27 Worst Case 18 INSTALLATION RECOMMENDATIONS Installation and alignment Kinematic installation requires a referenced surface Inter axis Alignment All internal optics are reference to mounting surface and have fixed alignment Receivers Agilent 10780F fiber optic remote receivers or Agilent 10780C receivers Receiver Alignment Self aligning when mounted to interferometer MEASUREMENT AND REFERENCE PLANE MIRROR RECOMMENDATIONS Reflectance 98 at 633 nm normal incidence Flatness Depending on accuracy requirements of the application mirror flatness may range from 4 to 20 0 16 to 0 03 umeters 6 to 1 2 pinches Optical Surface Quality 60 40 per Mil 0 13830 NOTE Flatness deviations will appear as measurement errors when the mirror is translated across the beam Mirror mount should be kinematic so as not to bend mirror If accuracy requirements demand it mirror flatness might be calibrated scanned and stored in the system controller to be used as a correction factor Laser and Optics User s Manual Vol Il Agilent 10721A and 10721A C01 Two Axis Differential Interferometers 43 18 mm 1 70 63 5 mm I 2 500 gt Recommended Minimum 35 56 mm R1 400 m Fiber ARCET mm Optic 10707A BEAM 1 BENDER 8 m Optic 3556m
340. tage reading from the receiver test point occurs just below the sudden jump up in voltage If the alignment is fixed to sustain this peaked voltage system operation will be degraded This aligns the laser beam to within 1 2 arc minutes to the direction of travel resulting in a cosine error of approximately 0 05 ppm 0 05 microns per meter of travel or 0 05 microinch per inch 9 Remove the alignment aid Agilent Part Number 10706 60001 from the interferometer Also remove the plane mirror converter from the interferometer Switch to the small aperture on the laser head Block the measurement beam by placing something between the interferometer and the measurement mirror 10 Insert the Agilent 10706B interferometer alignment aid Agilent Part Number 10706 60202 between the beam splitter and the high stability adapter as shown in Figure 137 This allows the reference beam to be autoreflected from the high stability adapter back toward the small aperture of the laser head 11 Observe the reflection of the reference beam back at the laser head Pitch and yaw the interferometer until this reflection is returned back into the small aperture of the laser head 12 Fasten the interferometer securely to preserve the pitch and yaw adjustments 13 Remove the Agilent 10706B interferometer alignment aid Agilent Part Number 10706 60202 from between the beam splitter and the high stability adapter Replace the plane mirror converter Remove the bea
341. th Agilent laser boards Signal Strength Monitor 0 8 volts proportional to optical input signal 7 6 mm 0 30 8mm 0 30 9 9 i 1 9 mm Clearance Hole 0 39 for 4 40 Screw 23 8 mm lt gt 3 8 mm 69 9 mm 0 94 e 19 1 mm 0 151 2 750 0 75 My Q0 2 400 10 2 mm 11 1 mm 3 5 mm gr n 52 6 mm 0 403 0 436 0 14 i 2 070 A A 15 5 mm A 0 61 115 6 mm 9 0 mm Clearance Hole for M3 5 6 32 Screw 10 4 mm 2 Places 0 410 R35 Minimum 4 1 4 Bend Radius 4i 11 4 mm 0 450 1 7 mm 8 1 mm SE zd x 0 320 16 5mm 0065 0 650 19 8 mm 0 780 Figure 271 Agilent E1708A receiver dimensions Laser and Optics User s Manual Vol II 713 35 Receivers Agilent E1709A Remote High Performance Receiver Description The Agilent E1709A Remote High Performance Receiver see Figure 272 is an important component of the measurement electronics for an Agilent Laser Interferometer Measurement System The Agilent E1709A converts light from the remote sensor to electrical signals that can be processed by the system electronics See Figure 275 The Agilent E17094 is for use in the most demanding applications requiring sub nanometer resolutions of systems in motion As the Doppler shift caused by motion of the system stage changes the measurement frequency the Agilent E1709A receiver ensures minimal phase position processing errors The E1709A also provides immu
342. the Agilent 10706B interferometer in the beam path to turn the beam 90 toward the measurement mirror Place the alignment target Agilent Part Number 10702 60001 on the input side of the interferometer Place the alignment aid Agilent Part Number 10706 60001 on the output side of the interferometer in the correct orientation the hole allows transmission of the primary measurement beam Select the small aperture on the laser head turret 3 Move the interferometer side to side until the beam 1 passes through the center of one hole on the alignment target 2 through the hole on the alignment aid and 3 strikes the measurement mirror Use translucent tape over the target aperture to observe when the beam is centered Laser and Optics User s Manual Vol II 457 21 458 Agilent 10706B High Stability Plane Mirror Interferometer If the distance between the laser head and the reflector is greater than 0 5 meter 20 inches the formula given in the Overlapping Dots Method Summary section of Chapter 4 in Volume determines the cosine error based on the offset of the return beam at the laser head For example with a distance between the laser head and reflector of 0 5 meter and an offset of the return beam at the small aperture of the laser of 500 microns 0 0202 inch the cosine error is approximately 0 12 ppm Pitch and yaw the interferometer until the beam reflected from the measurement mirror returns upon itself through the
343. the machine Ideally you want to be able to translate beam in two directions and rotate beam in two directions for each interferometer input This typically takes two adjustment optics with proper orientations Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design See the offset specifications under the Specifications heading at the end of this chapter Refer to Chapter 4 System Installation and Alignment in Volume I of this manual for installation instructions Alignment Alignment aids Alignment aids for these interferometers are listed in Chapter 4 System Installation and Alignment in Volume I and Chapter 36 Accessories of this manual Procedure Refer to Chapter 4 System Installation and Alignment in Volume I of this manual for alignment instructions Laser and Optics User s Manual Vol II 405 18 Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors Specifications and Characteristics Interferometer Agilent 10702A Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device The basic optical resolution using a linear interferometer is one half wavelength 0 316 micron 12 26 microinches Using electronic resolution extension
344. the mating connector Failure to align the pins prior to mating the connectors may result in damaged pins Laser and Optics User s Manual Vol II 695 35 Receivers 696 Agilent 10880A B C Receiver Cable The connectors at each end are different as shown in Figure 284 of Chapter 36 Accessories One connector is a bayonet connector that inserts into the Agilent 10885A 10889B 10896B 10897C 10898A or N1231A axis board The connectors lock together To unlock the connectors slide the cable connector sleeve away from the Agilent axis board s panel until the connectors separate CAUTION Any attempt to twist the cable connector when it is connected to the Agilent 10885A panel connector may cause damage The other connector fits the connector on the receiver this connector is keyed to go together only one way This connector has a locking ring which takes a 1 4 turn clockwise to secure the cable to its mating connector on the receiver Fasteners The supplied nylon screws must be used to assure that the receiver housing is electrically isolated from the mounting fixture Clearance for laser beam Figure 263 shows 1 the clearance requirement for the laser beam passing the receiver or sensor head on its way to the interferometer or wavelength tracker and 2 how the receiver alignment target can be used to be sure the receiver is positioned correctly with respect to this beam Laser beam clearance is also shown in
345. the other centered on the receiver alignment target do not adjust the laser head Slight lateral translations of the 50 beam splitter may be necessary to ensure there is no beam clipping Fasten the 50 beam splitter securely Select the small aperture on the front turret of the laser head and install the alignment aid on the output of the plane mirror interferometer in the correct orientation the hole transmits the first pass of the measurement beam to the measurement mirror Remove the opaque material from between the plane mirror interferometer and the mirror The laser beam now exits the interferometer and is reflected by the mirror back upon itself and into the interferometer Pitch and yaw the plane mirror interferometer until the beam reflected from the mirror returns Laser and Optics User s Manual Vol Il Agilent 10706A Plane Mirror Interferometer 20 through the plane mirror interferometer and back to the small aperture of the laser head Slight lateral translations of the plane mirror interferometer may be required to ensure that the reference beam is still centered on the receiver alignment target If the distance between the mirror and the laser head is at least 0 5 meter 20 inches the formula given earlier in this alignment procedure will determine the cosine error based on the offset of the return beam at the laser For high accuracy alignment or for installation where there is less than 0 5 meter 20 inches between t
346. these interferometers is due to the fact that both their reference beams and their measurement beams travel to external mirrors Any motion of the interferometer itself is common to both beams and will not appear as a measurement Of course any vibration between the reference and measurement mirrors will constitute real measurable displacements Interferometer mounting system user supplied Since the mounting system requirements depend on the application the mounting system must be designed and provided by the user The following paragraphs provide some guidelines and recommendations for designing the mounting system The Agilent 10721A interferometer is designed for easy mounting and alignment It may be mounted in any orientation using the mounting hole patterns on either the top or bottom surfaces of the housing The mounting screw thread is English 6 32 UNC A key feature of the Agilent 10721A interferometer is that it is designed as a referenced interferometer In other words the location and orientation of its internal optical components and laser beam paths are related to reference surfaces on its housing This opens the possibility of a mounting scheme which eliminates the need for aligning or adjusting the interferometer Designing the mounting system The first step in designing the mounting scheme is to determine the nominal position of each interferometer This is generally dictated by the intended location of the me
347. ting location Kinematic mounting should be used This means that the interferometer s mounting location is completely defined by a plane a line and a point The mounting plane is identified as datum A It should be parallel to the plane of the X and Y axes of the stage being measured Laser and Optics User s Manual Vol II 565 27 Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers AGILENT 10735A THREE AXIS INTERFEROMETER Axis 3 MP3 Z Axis See Notes 1 amp 2 Not Us Jum Wi 62 17 2 45 e Axis 1 Axis 2 A FROM 21 0 LASER ASER 0 83 EE HSE MP1 MP2 See Note 3 See Note 1 See Note 1 AGILENT 10736A THREE AXIS INTERFEROMETER Axis 3 Datum MP3 Z Axis 75 28 See Notes 1 amp 2 2 96 FROM 21 0 i Axis 2 Not Used SER 0 83 26 0 1 02 MP1 MP2 See Note 3 See Note 1 See Note 1 AGILENT 10736A 001 THREE AXIS INTERFEROMETER Axis 3 Datum MP3 Z Axis i 75 28 See Notes1 amp 2 2 96 Not ce Used GENERAL NOTES A nem is FROM Axis 2 1 For Each Axis LASER 21 0 Darker Beam HEAD 0 83 Bent Axis A Indicat OL i Measurement MP Measurement Point Beams 2 Suggested Position for Z Axis Plane of Measurement is Axis 3 Measurement Point MP3 MP1 3 Datum A bottom of corner feet See Note 3 See Note 1 4 Drawing not to scale Figure 189 Three Ax
348. ting means for all components of the laser measurement system based on the recommendations given earlier in this chapter and elsewhere in this manual Provide for aligning the optics laser head and receiver s on the machine Be sure to allow for transmitted beam offset of beam splitters e g Agilent 10700A and Agilent 10701A in your design Laser and Optics User s Manual Vol Il Receivers Alignment Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Agilent 10780F E1708A or E1709A receiver s fiber optic sensor heads may be mounted directly to the Agilent 10719A interferometer s output aperture Alignment pins are provided for easy installation and alignment This eliminates the need for any other user supplied mount for the sensor head Maintain a bend radius not less than 35 mm 1 4 inches to prevent signal attenuation in the Agilent 10780F receiver s fiber optic cable Alignment aid To help in aligning the Agilent 10719A interferometer an alignment aid Agilent Part Number 10706 60202 is included with the interferometer Alignment procedure The objectives of the alignment procedure are 1 2 3 4 to locate the measurement point accurately on the measurement mirror to minimize cosine error to maximize signal strength at the receiver and to ensure a symmetrical range of stage tilt about the zero angle point To accomplish these goals 1 the measurement mi
349. tions 411 10770A Angular Interferometer 615 10771A Angular Reflector 616 10772A Turning Mirror 756 10773A Flatness Mirror 757 10774A Short Range Straightness Optics 633 10775A Long Range Straightness Optics 633 10776 67001 Straightness Retroreflector 759 10777A Optical Square 761 10780F Remote Receiver 704 10784A Base 731 10785A Height Adjuster Post 731 10884A Power Supply Specifications and Characteristics 767 5517A Laser Head 344 5517B BL Laser Head 349 5517C Laser Head Standard 349 5517C 009 Laser Head 350 5517D DL Laser Head 350 5517FL Laser Head 351 5517FL 009 Laser Head 351 5519A B Laser Head 356 E1708A Remote Dynamic Receiver 713 E1826E One Axis Plane Mirror Interferometer 641 E1827A Two Axis Interferometer 653 E1833x Bare Beam Splitter 378 E1837A Three Axis Vertical Beam Interferometer 661 N1203C Precision Beam Translator 381 N1204C Precision Horizontal Beam Bender 383 Laser and Optics User s Manual Vol II N1207C Precision Vertical Beam Bender 385 N1208C D E F G Bare Beam Splitter 389 N1209A RPT Manipulator 393 Z4399A Three Axis Interferometer 666 Z4420B Five Axis Interferometer 679 Z4421B Five Axis Interferometer 684 Z4422B Three Axis Interfereometer 671 specifications 5517C 003 Laser Head 349 specifications 10735A Three Axis Interferometer 576 split frequenc 336 split frequency definition 716 squareness measurement 619 stability mech
350. to the right of the origin when looking into the interferometer s measurement face For an Agilent 10736A interferometer datum C should be 75 28 mm 2 964 inches to the right of the Z axis when looking into the interferometer s measurement face The vertical distance between datum A the interferometer mounting plane and the common centerline of measurement axes 1 and 2 is 26 mm 1 024 inches With the interferometer installed in its predefined location it is necessary to align the laser beam input to the interferometer The input beam angle tolerance zone is defined as follows When the interferometer s measurement axis 1 primary beam is perpendicular to the measurement mirror and when the measurement mirror is perpendicular to datum A the plane and parallel to datum B the line of the mounting location and therefore of the interferometer the angular tolerance zone for the interferometer input beam is 1 milliradian mrad Laser and Optics User s Manual Vol Il Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 This input beam tolerance zone plus the tolerance to which the stage measurement mirror is perpendicular to datum A the plane and parallel to datum B the line determines the range of angular adjustment required of the beam benders directing the laser beam to the interferometer s input aperture Laser and Optics User s Manual Vol II 569 27 Agilent 10735A 10736A and 10736A 001 Three
351. tter and the high stability adapter Replace the plane mirror converter removed in step 9 Remove the beam block from between the interferometer and the measurement mirror 13 The reference and measurement beams must be centered on the receiver aperture Use translucent tape over the receiver aperture to observe the beams Move the receiver side to side to center the beams on the receiver aperture 14 Place the alignment aid Agilent Part Number 10706 60001 back on the output side of the interferometer and switch to the large aperture on the laser head Connect a fast responding voltmeter to the receiver test point Monitor the voltage reading along the complete travel of the stage The voltage should not jump up to the previous maximum voltage reading If the voltage does jump readjust the interferometer as in step 4 until the voltage reading suddenly drops back to about 0 3 volt 1 If readjustment of the interferometer is required in step 14 return to step 9 and repeat the procedure from that point 16 Remove the alignment aid Agilent Part Number 10706 60001 17 Rotate the turret on the laser head to the large aperture Verify that the LED indicator on the receiver is lighted and the voltage at the receiver test point is between 0 6 and 1 3 volts DC Laser and Optics User s Manual Vol II 459 21 460 Agilent 10706B High Stability Plane Mirror Interferometer 18 19 20 21 22 Steps 18 through 34 con
352. ture of the laser head N ow Careful accurate autoreflection at this step is essential to minimizing cosine errors assuming the mirror is perpendicular to the linear axis of travel For higher accuracy alignment see the Autoreflection information in Chapter 4 System Installation and Alignment in Volume of this manual for additional methods to optimize the autoreflection alignment b Adjust the centering of the input beam on the input aperture by visual alignment Start by switching back to the large aperture on the turret of the laser head because the small aperture is only roughly aligned to the beam center N Place a piece of translucent tape across the input aperture of the interferometer to make the input beam easily visible Be careful not to stick the tape to any glass surface ow Translate the beam directing optics or the laser head or both to center the input beam on the aperture Do not disturb the angular alignments already made With care you can center the beam visually to within 0 15 mm 0 006 inch of its ideal position c Go back to steps 3a and 3b and alternately recheck and readjust the input beam angle and centering until both are simultaneously optimized Laser and Optics User s Manual Vol II 549 26 Agilent 10721A and 10721A C01 Two Axis Differential Interferometers Operation Then remove the tape from the input aperture and remove the alignment aid d Asa furth
353. turret of the laser head because the small aperture is only roughly aligned to the beam center N Place a piece of translucent tape across the input aperture of the interferometer to make the input beam easily visible Laser and Optics User s Manual Vol 1 Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Be careful not to stick the tape to any glass surface 3 Translate the beam directing optics or the laser head or both to center the input beam on the aperture Do not disturb the angular alignments already made With care you can center the beam visually to within 0 15 mm 0 006 inch of its ideal position c Go back to steps 3 a and 3 b and alternately recheck and readjust the input beam angle and centering until both are simultaneously optimized Then remove the tape from the input aperture and remove the alignment aid d Asa further alignment check place a piece of translucent tape across the output aperture s to make the output beam s easily visible Each output beam should now be approximately centered in its aperture without clipping Any clipping observed here indicates a centering problem at the input aperture or an autoreflection problem e Clamp down the laser and the beam directing optics without changing their alignment 4 At this point the reference beam has also been automatically aligned assuming the reference mirror is parallel to the measurement mirror If any parallelism error
354. ty adapter 3 Plane mirror converter 4 Polarizing beam splitter 5 Shear plate assembly Do not loosen or remove 6 Receiver assembly 7 4 40 socket head cap screws attaching receiver assembly Figure 194 Agilent 10737L Compact Three axis Interferometer Laser and Optics User s Manual Vol II 583 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers AGILENT 10737L COMPACT THREE AXIS INTERFEROMETER n To Measurement Mirror See Axis 2 View A Output A Axis Axis 1 EB e 3 Primary measurement beam ONDE e Measurement Point Input for all A xes Secondary measement beam View A View B MEASUREMENT FACE INPUT FACE Figure 195 Agilent 10737L Compact Three Axis Interferometer 584 Laser and Optics User s Manual Vol II Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 28 AGILENT 10737R COMPACT THREE AXIS INTERFEROMETER 4 To Measurement Mirror Axis 1 Output 1 Axis 2 7 Output Primary measurement beam Input for all A xes e Measurement Point Secondary measurement beam View A View B INPUT FACE MEASUREMENT FACE Figure 196 Agilent 10737R Compact Three Axis Interferometer Laser and Optics User s Manual Vol II 585 28 Agilent 10737L and Agilent 10737R Compact Three Axis Interferometers 586 Applications General The Agilent 10737L or Agilent 10737R interferometer by making thr
355. ular Beam Resolution Recommended Mounting Screws See Figure 99 350 grams gt 500 Hz BK7 416 stainless passivated lt 100 nm C lt 10 mradians C gt 95 16mm 19mm radial 20 microns 18 milliradians lt 30 microradians 17 Four screws 5 20 long Alloy Seating Torque is 5 N m if Cadmium plated or 6 5 N m if unplated Steel Grade 12 9 OR Four screws 10 32 UNF x 0 75 Seating Torque is 39 in lbs if Cadmium plated or 51 in Ibs if inches long Alloy Steel Adjustment Tooling Locking Screw Torque Laser and Optics User s Manual Vol II unplated 4 mm and 2 mm hex key wrenches M2 5 screws at 0 56N m 5 in Ibs 393 17 Beam Directing Optics NOLLWISNVYL WY39 1vIavu Wad OL 008 4 m gti H31N32 i Wv38 OL GLE E 1001 s3ulno3u M382S DNDIDO1AWA SERV T RR Y31139 81 3503 1001 S3ulno3u M38U2S DNIMDOT HDL Id 3uniu3dv uv31o OSL SNIMVHO NO NMOHS LON SS322V Y04 32vdS 1VNOLLIQQV 3UlnO38 SM382S DNIMDOT ANY SLNAWLSNray NOILLO3HHOO 315NV p WV38 XVW g b 1001 s3uino39 M382S DNDIDOT35Q3M SS t VIG YO 1001 X3H wwr S3dInYO38 LNAWLSNFAV HOLld 1 SIYINDAY Juas os Xy WWOLXSW JDNV
356. ular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A See Measure Point Tolerance in Chapter 6 of Volume of this manual for a description of these tolerances 3 Beam Parallelism is specified between primary beams See Figure 234 on page 652 Laser and Optics User s Manual Vol II 653 32 Agilent E1827A Two Axis Vertical Beam Interferometer o Primary Beam Secondary Beam Input Beam B 4 103 3X M5 Captive Screw Figure 235 Agilent E1827A Two Axis Interferometer dimensions 654 Laser and Optics User s Manual Vol Il Agilent E1827A Two Axis Vertical Beam Interferometer 32 Agilent E1827A glass dimensions Figure 236 Agilent E1827A glass dimensions Laser and Optics User s Manual Vol II 655 32 Agilent E1827A Two Axis Vertical Beam Interferometer 656 Laser and Optics User s Manual Vol II Agilent Laser and Optics User s Manual Volume II Jo Agilent E1837A 74399A 74422B Three Axis Interferometers Description 658 Agilent E1837A Three Axis Vertical Beam Interferometer 6
357. ure 98 is to provide you with a means of quickly making precise translation and angular adjustments on a laser beam This manipulator can precisely translate and steer a laser beam for measurements that require extreme accuracy in applications where you do not want to spend a great deal of time aligning the laser beam The Agilent N1209A RPT Manipulator provides high resolution over a large range in a compact lightweight package with high mechanical stability The laser beam can quickly be bent and translated by elements in a single package using separate controls enabling you to place the beam at the desired angle and location in space No special tools or mounting pins are required The Agilent N1209A RPT Manipulator is easy to use and provides both translation and angular adjustments at an affordable cost The transmissive design provides excellent long term stability during temperature and humidity fluctuations and is suited for applications requiring up to 3 mm of translation and 18 milliradians of angular adjustment Laser and Optics User s Manual Vol Il Beam Directing Optics 17 Figure 98 Agilent N1209A RPT Manipulator 1 Yaw clamping screw 2 Pitch clamping screw 3 Risley prism set 4 Translator optic Elements in the Agilent N1209A RPT Manipulator The Agilent N1209A RPT Manipulator is comprised of e a Risley prism set e a translator optic The Risley prism set is used to adjust the angle of the beam The translato
358. ure Point Tolerance Mean 0 5 mm Deviation 0 1 mm Input Beam Cone Angle lt 1 mrad IBCA 4 Beam Parallelism see Figure 244 on page 665 Axis 1 Axis 3 lt 100 urad Axis 2 Axis 3 lt 100 urad Operating Temperature 19 to 26 C Measurement and Reference Mirror Recommendations gt 92 A 20 Reflectivity Flatness 2i 1 Linear and angular resolutions are dependent on the electronics used Optical resolution is dependent only on the interferometer and can be used to determine linear and angular resolutions when the electronic resolution extension is known The linear and angular specifications in this section are for interferometer use with the X256 resolution extension electronics 10897B C 10898A or X1024 resolution extension electronics N1231B N1225A AC Signal DC Signal Out AC Signal in DC Signal at nominal zero stage angle See Measure Point Tolerance in Chapter 6 in Volume of this manual for a description of these tolerances range Laser and Optics User s Manual Vol II See Adjusting the input beam angle in Chapter 6 in Volume Deviation from the ideal location reduces angle 661 33 Agilent E1837A Z4399A and 24422B Three Axis Interferometers 81 16 16 38 25 Input Beam 114 25 88 91 Figure 240 Agilent E1837A Three Axis Interferometer dimensions 662 Laser
359. urement arms of the interferometer when the stage is at its zero or home position If air deadpath exists and is not compensated your zero point or home position will appear to move around as the air temperature pressure and humidity change Zero deadpath is the condition in which the measurement beam path length and the reference beam path length are equal For the Agilent 10719A interferometer this does NOT occur when the measurement and reference mirrors are coplanar as a cursory look might imply Because the reference beam travels an additional 19 05 mm 0 750 inch for the standard10719A or 30 6 mm 1 025 inches for the 10719A C02 through air inside the interferometer housing the zero deadpath condition occurs when the measurement mirror is 19 05 mm 30 6 mm for option C02 farther from the interferometer housing than the reference mirror Deadpath compensation for the Agilent 10719A interferometer can be performed in one of two ways move the measurement mirror to the zero air deadpath position before each system reset or use a deadpath compensation number in software If you use this method be aware that the compensation number can be either positive or negative depending on the relative position of the mirrors at reset Be sure to use the correct sign for your application When the Agilent 10719A interferometer is used in its angle measuring configuration you must use the second software method since th
360. urement beam back on itself and return it to the laser head without offset The Alignment Aid must be positioned to transmit the primary measurement beam This is the first of the two measurement beams that travel between the Agilent 10706A interferometer and the plane mirror reflector To identify the primary beam block one of the two measurement beams if the other beam also disappears the beam you blocked is the primary measurement beam Laser and Optics User s Manual Vol II 433 20 Agilent 10706A Plane Mirror Interferometer Alignment procedure This procedure describes the alignment of Agilent 10706A Plane Mirror Interferometers used on an X Y stage application See Figure 124 Steps 1 through 11 constitute the Y axis alignment 1 Place the interferometer alignment target on the laser side of the Y axis plane mirror interferometer and place the receiver alignment target on the receiver Figure 126 position 1 Place a piece of opaque material such as translucent tape between the Y axis plane mirror interferometer and the mirror 2 Adjust the laser head until the laser beam 1 passes through the 50 beam splitter 2 enters one hole of the interferometer alignment target and 3 exits the other hole centered on the receiver alignment target Fasten the laser head securely 3 Select the small aperture of the laser head and install the alignment aid on the output of the plane mirror interferometer in the correct orientation the
361. urn dimensions and beam pattern 644 Laser and Optics User s Manual Vol II Agilent E1826E F G One Axis Plane Mirror Interferometer 31 Agilent E1826G One Axis Plane Mirror Interferometer Specifications Weight 0 41 kg 91 Ibs Dimensions See Figure 230 on page 646 Glass Dimensions See Figure 231 on page 647 Materials Baseplate Invar Option 070 Passivated 416 Stainless Steel Option 071 Coefficient of Thermal 1 5 x 109 mm mm C Invar Expansion 9 9 x 10 mm mm C SS416 Optics BK 7 Natural Frequency 1 kHz Mounting Interface Fasteners 3 x M3 Socket Head Captive Screw SHCS Surface Profile 0 02 mm Surface Finish 0 4 um Beam Diameter 9 mm maximum visible Resolution Optical A 4 Linear 0 62 nm using 256 x resolution extension 0 15 nm using 1024 x resolution extension Angular pitch or roll See NGI Angular Resolution section in Chapter 6 NGI Measurement Optics General Information in Volume of this manual for explanation of angular resolution Thermal Drift due to Glass Path Imbalance lt 10 Non linearity Error 1nm Output Efficiency Typical 65 Worst case 50 Measure Point 0 15 mm Tolerance Input Beam Cone Angle lt 1 mrad IBCA Operating Temperature 19 to 26 C Measurement and Reference Mirror Recommendations gt 92 A 20 Reflectivity Flatness Linear and angular resolutions are dependent on the e
362. use with a 6 mm laser beam so this receiver is not recommended for use in a 9 mm laser system Using a 6 mm laser source allows use of standard Agilent 10700A Agilent 10701A and Agilent 10707 beam directing optics and use of Agilent 10710B Adjustable Mounts however this also reduces the usable angle range Orientation Note that although illustrations may show the interferometer in one orientation you may orient the unit as required by your measurement application vertically horizontally or upside down 564 Laser and Optics User s Manual Vol Il Mounting General Agilent 10735A 10736A and 10736A 001 Three Axis Interferometers 27 Before any of these interferometers are installed a suitable mounting location must be prepared for it These are referenced interferometers this means that the relationships of their internal optical components and laser beam paths to reference locations on their bases are specified These dimensions are presented in the Specifications and Characteristics section at the end of this chapter and in Figure 189 The specifications plus the information in this subsection are intended to allow you to select design and build a mounting location for a three axis interferometer The interferometer s mounting location defines the relationship of its measurement beams to the stage whose motion is to be measured Figure 190 shows a recommended design for the interferometer s moun
363. using excessive error 2 Misalignment in roll effectively reduces the nodal point spacing in the plane of the measurement The accuracy specification includes allowance for 1 degree of roll misalignment by the operator 3 The initial angle must be near zero when the system is initialized or the measured change in angle will have an error The accuracy specification includes allowance for 20 arc minutes of initial angle The error in measured path length due to an initial angle error is given by Dt Dm sinOt sin Ot 0i sin0i Where Dt the true change in path for the true angle of rotation true angle of rotation Dm measured change in path length caused by an initial angle error and 0i the initial angle error Specifications Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device Accuracy Angle measurements are accurate to 0 2 of calculated value 0 05 arc second per meter of distance traveled by the moving optic This assumes that the Agilent 10771A Reflector is aligned within 40 arc minutes using retroreflection techniques roll alignment by the operator is within 1 relative to the measurement plane and the temperature of all optics is stabilized in the range 15 25 C Resolution 0 06 arc second Range 36000 arc seconds 10 Axial S
364. ustment of pitch and yaw of any attached optic Roll adjustment is typically not required and can usually be avoided by careful optical system layout Fasteners The Agilent 10702A interferometer is supplied with mounting screws to mount it on the Agilent 10711A Adjustable Mount The Agilent 10785A Height Adjuster and Post and the Agilent 10767A Linear Retroreflector include captive hardware necessary for mounting and aligning the Agilent 10766A Laser Interferometer 404 Laser and Optics User s Manual Vol Il Agilent 10702A and 10766A Linear Interferometers and Agilent 10703A and 10767 Retroreflectors 18 Installation Pre installation checklist In addition to reading chapters 2 through 4 and Chapter 12 Accuracy and Repeatability in Volume I of this manual complete the following items before installing a laser positioning system into any application L Complete Beam Path Loss Calculation see Calculation of signal loss in Chapter 3 System Design Considerations in Volume I of this manual Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in Volume I of this manual Provide for aligning the optics laser head and receiver s on
365. viding simple time saving installations Any optical component that fits an adjustable mount is supplied with a Hardware Kit 5061 6021 kit for the Agilent 10710B 5061 6022 kit for the Agilent 10711A to mount it on the appropriate adjustable mount Agilent 10710B Agilent 10711A Adjustable Mount Adjustable Mount Figure 277 Agilent 10710B and Agilent 10711A adjustable mounts Height adjuster and post and base Some of the optics described in this manual primarily those intended for use in an Agilent Laser Calibrator System are designed for use with the Agilent 10785A Height Adjuster and Post In many cases the Agilent 10785A can be installed in an existing tapped hole in the device being measured where this is not possible it may be possible to use the Agilent 10784A Base as a mounting surface Laser and Optics User s Manual Vol II 727 36 Accessories Agilent 10785A Agilent 10784A Base Height Adjuster and Post Figure 278 Agilent 10785A Height Adjuster and Post and Agilent 10784A Base Specifications Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide non warranted performance information useful in applying the device 728 Laser and Optics User s Manual Vol II Accessories 36 Agilent 10710B 10711A Adjustable Mount Specifications Figures 279 and 280 show the specifications for the Agilent 10710B and Agilent 1071
366. with gage block attached AGILENT 10716A USING 10706 60001 ALIGNMENT AID Ali t Aid 4 amp att Number 10706 60001 Ge J Measurement Beam Figure 160 Agilent 10716A with alignment aid attached over measurement beam 8 Select the small aperture on the front turret of the laser head The return beam from the moving plane mirror may not autoreflect back to the small aperture of the laser head as it did in step 5 This must be corrected Adjust the laser beam until the laser beam is perpendicular to the measurement mirror This step requires pitching and yawing the laser head beam benders or beam splitters depending on optical layout 9 If substantial adjustment of the laser beam was required in step 8 the interferometer will have to be repositioned so that the beam goes through the center of the input aperture Repeat steps 1 through 5 and secure the interferometer to its mount 490 Laser and Optics User s Manual Vol II Agilent 10716A High Resolution Interferometer 23 The Agilent 10716A High Resolution Interferometer is now aligned for minimum cosine error The final steps 10 through 23 will align the reference reflector for minimum thermal drift coefficient and maximum signal strength 10 Remove the Plane Mirror Converter assembly i e the quarter wave plate from the measurement side of the interferometer by loosening one cap screw and removing the other 11 Block the measurement beam and select the small
367. y known because it is set by the optics and the retroreflectors within the angular reflector Both components are positioned 32 61 mm apart at their centerlines The optics are initially set parallel to each other and the system is initialized Laser and Optics User s Manual Vol II Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector 29 COMPOSITE PATHS fA and fp Angular Angular _ Interferometer _ _ Reflector _ 1 fA Beam Bender r mim uium m EXE l LX ea EE EE E fA fB fg From Laser Head bpl um 7 fAtMA fpgt fpg fiM Photodetector lt lt St a LIE 1 qe 1 LEGEND m Qm m m 5 Figure 206 Angular optics laser beam paths The two beam paths are initially the same length If either optic is rotated the relative path lengths will change This change will cause a Doppler shifted frequency change in the beam returned from the interferometer to the receiver The change will result in an indicated change in path length From geometry the angle of rotation is related to the change in relative path length by sin 0 D 32 61 mm so 0 arcsin D 32 61 mm where 0 the angle of rotation and D the indicated change in relative path length in mm and 32 61 mm is the spacing of the retroreflectors in the angular reflector and also the spacing between the parallel beam paths from the angular interferometer
368. y mounting and alignment It may be mounted in any orientation using the mounting hole patterns on either the top or bottom surface of the housing The mounting screw thread is English 6 32 UNC The Agilent 10719A interferometer is a referenced interferometer This means that the location and orientation of its internal optical components and laser beam paths are related to reference surfaces on its housing This information is shown in Figure 176 on page 530 Figure 177 on page 531 provides the information for option C02 This allows the possibility of a mounting scheme which eliminates the need for aligning or adjusting the interferometer Designing the mounting system The first step in designing the mounting system is to choose the nominal position of the interferometer in the application This is primarily dictated by the desired location of the measurement beams on the measurement mirror 522 Laser and Optics User s Manual Vol Il Agilent 10719A and 10719A C02 One Axis Differential Interferometers 25 Next the mounting system for the interferometer should be designed to restrict each of the six degrees of freedom three translational three rotational The recommended positional tolerances for mounting the interferometer are given below Consider an ideal case in which the input laser beam is perfectly aligned to its desired axis 1 There is no recommended tolerance for locating the Agilent 10719A interferometer along the X
369. y plane mirror reflectors See Chapter 12 Accuracy and Repeatability or Agilent 10721A 10721 01 Two Axis Differential Interferometer Specifications section at the end of this chapter for mirror specifications Determine the direction sense for each axis based on the orientation of the laser head beam directing optic and interferometer Enter the direction sense for each axis into the measurement system electronics See Chapter 16 Laser Heads Chapter 11 Principles of Operation and Chapter 12 Accuracy and Repeatability in this manual Supply suitable mounting means for all components of the laser measurement system based on the recommendations given earlier in this chapter and elsewhere in this manual Provide for aligning the optics laser head and receiver s on the machine Be sure to allow for transmitted beam offset of beam splitters Agilent 10700A and Agilent 10701A in your design Agilent 10780F E1708A or E1709A receiver s fiber optic sensor heads may be mounted directly to the Agilent 10721A interferometer s output aperture Alignment pins are provided for easy installation and alignment This eliminates the need for any other user supplied mount for the sensor head Maintain a bend radius not less than 35 mm 1 4 inches to prevent signal attenuation in the Agilent 10780F E1708A or E1709A receiver s fiber optic cable Laser and Optics User s Manual Vol II 547 26 Agilent 1
370. y stresses which may be introduced during curing The mounting method should also be designed to minimize thermal expansion effects which could displace the mirrors and give false displacement or rotation measurements Many methods exist for mounting optics with low stress and high thermal stability For additional information a useful introductory article is The Optic As A Free Body Photonics Spectra Aug 1985 pp 49 59 Also textbooks on opto mechanical design can provide more information Laser and Optics User s Manual Vol II 521 25 Agilent 10719A and 10719A C02 One Axis Differential Interferometers Mounting Vibration considerations Agilent 10719A interferometers are inherently less susceptible to vibration effects than some other interferometers The stability of these interferometers is due to the fact that both their reference beams and their measurement beams travel to external mirrors Any motion of the interferometer itself is common to both beams and will not appear as a measurement Of course any vibration between the reference and measurement mirrors will constitute real measurable displacements Interferometer mounting system user supplied Since the mounting system requirements depend on the application the mounting system must be designed and provided by the user Here are some guidelines and recommendations for designing the mounting system The Agilent 10719A interferometer is designed for eas
371. ystem operation will be degraded This aligns the laser beam to within 1 2 arc minutes to the direction of travel resulting in a cosine error of approximately 0 05 ppm 0 05 micron per meter of travel or 0 05 microinch per inch Fasten the interferometer Y Axis securely preserving the alignment Laser and Optics User s Manual Vol Il Agilent 10706B High Stability Plane Mirror Interferometer 21 9 Remove the alignment aid Agilent Part Number 10706 60001 from the interferometer Also remove the plane mirror converter from the interferometer Switch to the small aperture on the laser head Block the measurement beam by placing something between the Y Axis interferometer and the measurement mirror 1 Insert Agilent 10706B interferometer alignment aid Agilent Part Number 10706 60202 between the beam splitter and the high stability adapter as shown in Figure 137 This allows the reference beam to be autoreflected from the high stability adapter back toward the small aperture of the laser head Observe the reflection of the reference beam back at the laser head Adjust two of the four alignment set screws until the beam autoreflects into the small aperture of the laser head Once autoreflection is achieved gently snug the two remaining set screws Be careful to preserve the autoreflection alignment 1 12 Remove the Agilent 10706B interferometer alignment aid Agilent Part Number 10706 60202 between the beam spli

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