Galvos specs
Contents
1. 805 000 2 UN WI83S 39000000008 HITA 0388 7 3 V S vH NOLONINTIM QN h E858 093 did 38 3 033 did Ada 8 62L01 N93 NOILONGOYd OL 13593138 V 080338 NOISIA3 amp WAS NOLDNIWIIM SOJUQUINT ISS 28 9 31 413345 553 NINI 3d 4211 05 90v 304 9 X TUNG NT 836 A38 ZEIG 62 01 N23 Udd 34d OL 3SV3 138 140933 151 38 GMAX M2 M2T 9 5mm XY Open Frame Head INDEX Customer Support 3 p Driver Card Address Selection 13 Backplane Schematic 41 Block Diagram 41 Diagnostic Connector 13 Features 12 Front Panel Indicators 12 Scanner Cable 12 SIC Backplane Card 12 Temperature Controller 14 o Federal Register 8 Laser Classes 8 Hazard Zones 9 Shutter Installation 9 Shutter Location 9 Warning Label 8 M Maintenance Mirror Cleaning 19 Scan Head 19 Mirror Cleaning 19 Flatness 24 Reflectivity 25 Scratch Dig 24 Selection 21 Specifications 6 Types 22 p Package list 5 Power Requirements 12 ee Scan Head Accuracy 23 Aperture 21 Drive Signals S2. 05 5555555999 555555 54 5 13 4 2 1 9 Traditional Temperature Controller 13 4 2 2 Scan Head Description coc oderint aan 13 4223 9680l8lz xi ia 14 2 79 A a a ek are Ee HERES RR 14 BD PD Scan Angler 14 4 2 2 4 Outline and Mounting 444444440nnnnnnnnnnnnnnnnnannnnnnnnnnnnnnnnnn nn 14 4 2 2 5 Thermal Behavior Maximum Allowable Temperature 14 4 2 2 6 Current Cutoff Circuit Sco REPRE 15 4 2 2 7 Dynamic Heating by Coils rra 16 4 2 3 System Performance Data Dynamics 16 5 OPERATING ENVIRONMENT see 17 GMAX M2 M2T 9 5mm XY Open Frame Head 6 HANDLING MAINTENANCE ueeeeeeeeeeeee nennen nnne nnn nnn nnn nnn 19 6 1 Mirror Cleaning tee Hcet ee 19 la BE FENDIR A rr PS 21 7 1 Mirror Selection Guide a RE 21 7 1 1 Aperture Considerati ns un 21 2 1 2 Types or Mirrors 22 7 1 3 Use in XY Scan Heads ea Pte uic 23 Z 4 ACCURACY 2 u es ca ek creel PEE 23 7 1 5 Mirror Flainess Standards e I eR REP 24 7 1 6 Scratch and Dig Specifications 24 7 1 7 Reflectivity A 25 7 1 8 Special Example Computing P
3. ON 3114 ava WYN N 131 3345 553 JINGALV3SL 1 1831 1 C9101 00 59 52 tna 5 XE NAHL 6029 XE INdNI 981 SaNa NO Navya MAY dd 185 X 1018 JIM SOF 002 dd SU X 1015 301 200 ZcT 00 62 9 6992 E6 19 sere 1 os 805 805 0002 000 2 LAdNI 25 1 94 0 REES E 2 VEN NOLONIWTIM 08 WHY 09 samowm 9 cal 05 121 ga 664946 479 96 11 01 2 Z v1 a 2 08 S Aza t SUR 28 15 TVEG E2 8 geno 4 01 03831 id 8 66 1 8 0 3 834 AZA E 1 55 2 5 2 34 0 WAS uam Ube sui 35 2599 sui Wi Ko eeyoainad s luounq 159 45 NU LDBNIW TA JOUINT ISD LAO 3111 i 3 dE NAVS S3H9 SNUISN3N XYW ON 3114 awa NOLLONN 4 31319398 553 IN3WLYISL 1 1 11 1 NAHL TE SP NAHL 6029 XE 805 0002
4. A3NNVIS SINI 2951 29V 593809 QNS 915 Ind ova NI 1X3 IND NDILISUS ing ALIOD3A OD 80583 1118 22 and 358 1nDD38A 29v gH1 S d IHL S d and DIS AIT NI 39 V 01315 IAS er ADT S31V3H IH 831V3H 8 1 5 ADT DATO IH DAW SINANI ova 6513 113 0084 384 01 359213 Y Seas ee 50 32 NOISIASS SINN 159 0 Aldd OPTICAL SCANNERS y GENERAL SCANNING INC DRTICAL SCANNING PRODUCTS DIVISION M2 Series Optical Scanners Features v Y www v v Repeatability to 5u radians optical Non linearity as low as 0 0596 Low sensor thermal drift Low wobble and jitter Rugged moving magnet rotor design Higher precision writing speeds Angles up to 30 degrees optical Lightweight 210 g he new M2 optical scanners offer an innovative motor design coupled with an advanced capacitive position detector This new design offers higher speeds wider angles lower linearity error and improved operational sta bility over existing scanner technology Using moving magnet technology this scanner incor porates the more familiar characteristics of both
5. scanner linearity error AR acceptability ratio scan mirror error The most useful form of this equation comes from solving for D AR D 0 006 e0 7 radian peak to peak Thus K D AR e 238 MBM Where SLE is assumed to be 0 3 peak So for the two Scan Heads mentioned we have solved for D at three acceptability ratios XY3035 D 126 0 mm 630 0 mm When short scan radii must be used off center mirrors probably will not suffice If linearity is a concern use scan radii greater than those shown in the AR 10 column As mentioned before the focus path change is the sum of X and Y errors Actually this error improves flat field focus however the improvement is not large enough to be significant and additional flat field focus correction is required 40 GMAX M2 M2T 9 5mm XY Open Frame Head 8 APPENDIX B 8 1 Outline Drawings Data Sheets e Driver Board Block Diagram s Block Diagram e Driver Board Connectors SIC Backplane Schematic Backplane Schematic e Board Connectors e M2 Scanner Data Sheet M2 Scanner Data Sheet e Outline M2 9 5mm XY Head Outline Drawing with M2 e Outline M2T 9 5mm XY Head Outline Drawing with M2T e Outline M2T 9 5mm XY w Baseplate DWG 3BD 16835 DWG 3BD 16836 DWG tt 3WD 16841 DWG 3CD 16384 DWG 3CD 18018 DWG 3CD 18016 41 C 39 q E YW NOLONIW TIM coco 59 0 3
6. Y 20 18 18 18 19 19 20 21 21 22 23 24 18 16 16 17 17 17 18 19 20 21 22 23 16 14 14 15 15 16 17 17 18 19 21 22 14 12 13 13 13 14 15 16 17 18 19 21 12 11 11 11 12 13 14 15 16 17 18 20 10 9 9 9 10 11 12 14 15 16 18 19 7 8 9 10 11 12 14 15 17 18 6 5 6 6 7 9 10 12 13 15 16 18 4 4 4 5 6 8 9 11 13 14 16 17 2 2 2 4 6 7 9 11 12 14 16 17 0 0 2 3 5 7 9 10 12 14 15 17 deg X 0 2 4 6 8 10 12 14 16 18 20 For example at the angle X 20 Y 20 the variation in focus range is 24 of the frame size A 0 25 square frame at corner field extreme has a field diagonal of 0 35 and thus requires 0 35 x 0 24 0 08 depth of focus or blur would occur at the frame corners In most cases large frame imaging prevents this problem by avoiding the extreme angles Using small F numbers also alleviates the blur Lasers of course have small image sizes and COS focus distortion is frequently ignored 7 3 Drive Signals Drive Signals Step Vector Raster The mechanical Scan Head design requirements vary depending on the criteria for optimal performance Specifically each of the three motions STEP VECTOR or RASTER has different performance definitions and requirements 7 3 1 Step Step motion occurs when the scanners rotate directly to a new position This new position may be randomly located anywhere in the scanner s legal operating angle The performance parameters of Step motion are e Phase Delay The dwell after the input of a signal b
7. If more stringent tolerances are needed consult the factory for recommendations 23 GMAX M2 M2T 9 5mm XY Open Frame Head Typical Mirror Recognizing Alalness Problems Scratch NOTE Common Scratch Dig Call onts 7 1 5 Mirror Flatness Standards For the optical system to perform the mirror surface must be of adequate flatness to prevent degradation of the image The next table lists recommended minimum specifications for various pupils and applications APERTURE POWER FRINGES IRREG FRINGES Notes 1 Fringes are equal to 1 2 wave OPD Optical Path Distortions at 633 nm For longer wavelengths the effect of OPD must be scaled inversely to the wavelength refer Section Image Distortions Section 7 2 2 Power refers to the symmetrical spherical distortion of the surface in fringes Power degrades optical performance to a lesser degree than Irreg 3 Irreg refers to the non symmetrical commonly cylindrical distortions of mirror surfaces It is the key offender in the OPD deformities of out of round spots and astigmatism Mirror non flatness in imaging systems usually appears as astigmatism in the image That is vertical and horizontal axes do not focus optimally at the same plane In focused laser spots the spot is oval and in vision images the vertical and horizontal image features do not focus at the same planes 7 1 6 Scratch and Dig Specifications A mirror is surface specified by a scratch di
8. Scan Head 3 1 Laser Shutter Installation The laser attenuator shutter is not included with the XY Scan Head Because each laser is unique it is the user s responsibility to insure that such a device is incorporated in the installation in conformance with CFR regulations 1040 10 f 6 which reads as follows A beam attenuator is required on Class II IIIa IIIb and IV laser systems The beam attenuator is a mechanical or electrical device such as a shutter or attenuator that blocks emission The beam attenuator blocks bodily access to laser radiation above Class I limits without the need to turn off the laser The beam attenuator must be available for use at all times during operation Power switches and key controls do not satisfy the attenuator requirement focus I Dynamic Expander Lens Objective Turning Mirrors Shutter Location Target Scan Plane Mirrors The beam shutter should be installed between the laser head and the Scan Head The following figure shows the recommended location of the shutter We strongly recommend that you specify a laser with a vendor supplied shutter mechanism If this is not possible consult the laser vendor to design a proper safety shutter ENCLOSURE SHUTTER The figure shows hau WW HPM the laser s internal Pisco 952 and external LASER st leeren optical path LASER See towards the target plane specifically where the hazard zo
9. This coil temperature may be estimated by the method below 1 Determine the pattern which has the highest RMS power This power may be measured by connecting a true RMS meter to the drive current output of the diagnostic connector This RMS current is then multiplied by the coil resistance at 100 C 6 05 ohms to determine power Do not apply this pattern for more than 5 seconds until the power has been calculated or damage may result 2 Next measure the maximum scanner case temperature under conditions of maximum internal system ambient temperature and zero internal scanner power 3 The preliminary coil temperature is calculated by adding the scanner temperature rise power times 2 5 C W scanner thermal resistance to the maximum scanner case temperature 4 If the coil temperature calculated in 3 above is acceptable apply maximum scanner drive power and again measure the scanner case temperature Recalculate the coil temperature GMAX M2 M2T 9 5mm XY Open Frame Head WARNING 4 2 2 6 Current Cutoff Circuit The circuit described below is sensitive to RMS current only and not coil temperature It is essential that the user perform the above calculations to prevent malfunction or damage to the scanner Should the current cutoff circuit cause the scanner to operate intermittently the user should cease operation immediately and review his input drive command There is a current cutoff circuit on each driver board which calcu
10. axis is directly over the X axis Y Optimized Heads These rotate the X axis 5 to 15 degrees reducing the required width of the Y mirror by a more normal angle of incidence In some cases this allows the inertia of the Y mirror to be reduced to match the X The disadvantage is the possibility of X mirror clip occurring This may happen when the Scan Head is directed to the lower right corner of the field The corner of the X mirror may clip the Y output beam Where applicable this is specified in the aperture specifications as a clipping beam radius Outboard supported Scan Heads XY5067 only This Scan Head uses a specially designed outboard bearing and drive coupling to support the mirrors It is implemented in cases where the bending inertia of mirror loads exceeds practical scanner limits 7 1 4 Accuracy As a general rule the accuracy constraints of the Scan Heads in this manual are the following Accuracy The accuracy derived from non linearity in scanners of the angular position at rest 0 3 of full field For a 20 degrees scan the maximum error would be 7 min arc or 2 milli radians in each axis Mirror Angles The mirror angles to the mounting references are within 10 milli radians and within 6 milli radians to each other Mirror Axes The mirror axes are true position to the mounting references within 0 015 inches 0 38mm This is not a guaranteed specification for all configurations
11. before performing any inspections Wear finger cots or cotton gloves when handling optics for inspection All contamination on optical surfaces must be remove prior to operation or serious damage and or hazard may result The Scan Head must be protected from airborne contaminates Dust attaching through impact or heating and vapors condensing on the optical surfaces reduces the mirror s reflectivity Furthermore avoid scanner exposure to dust condensation or cleaning fluids in the exposed bearing area You must be extremely careful not to allow contamination from entering the galvanometer though it s exposed bearing Serious scanner damage may result If you feel that cleaning or service is necessary contact the customer service group at General Scanning for information regarding service 6 1 Mirror Cleaning Although the mirrors can be replaced by the user we do not recommend you do so Furthermore GSI Lumonics does not recommend cleaning front surface mirrors Mirrors damaged by cleaning are not included under the warranty The surface of these mirrors damages easily It is difficult to prevent hard dust particles from being entrained in the process and causing scratches In many cases small defects in the mirror s surface may less harmful than the surface damage resulting from continued cleaning It requires special equipment typically not available to customers There are times however when cleaning the mirror becomes a necessity e
12. besides radiation lasers may present other hazards e g electric shock or creation of poisonous fumes Classes and Characteristics of Lasers CAUTION Class IV Warning Label REMINDER GMAX M2 M2T 9 5mm XY Open Frame Head LASER CLASS DESCRIPTION Lasers are not considered to be hazardous Class lla Lasers are hazardous if viewed for periods greater than one thousand seconds Class Il Lasers are chronic viewing hazards Class Illa Lasers may represent acute intrabeam viewing or chronic or acute viewing hazards when viewed with optical instruments Class Ilib Lasers are an acute hazard to skin and eyes from direct radiation Class IV Lasers are an acute hazard to skin and eyes from direct or scattered radiation Do not use equipment outside of these ranges as additional hazards may result Because we do not determine the laser used with our product all GSI Lumonics end user XY Scan Heads are labeled at the highest hazard level Class IV You should obtain information on output power or energy wavelength s of output duration of pulse beam size and beam divergence from the manufacturer of the laser you are using The wavelength and power of the laser actually used should be written on the warning logo type label Position 2 See Section page 33699 and 33700 of the Federal Register Appendix B Be sure to use a permanent indelible ink The Federal Register Rules and Regulations Vol 50 N No 16
13. g stains such as fingerprints must be removed immediately to prevent permanent etching of the reflective surface The information below includes general recommendations for those special occasions when mirrors must be cleaned Remove lint from mirrors with a jet of low pressure clean air Blowing on front surface mirrors deposits moisture that may stain the finish 19 Removing Stains 20 CAUTION Ec NOTE CAUTION GMAX M2 M2T 9 5mm XY Open Frame Head A thin overcoating of silicon monoxide protects most mirrors from oxidation Like many optical coatings it is easily damaged when attempts are made to clean the mirror surface with a dry tissue The safest method of cleaning is to place a piece of lens tissue on the mirror surface and wet it with reagent grade highly pure alcohol or acetone If you use acetone take precautions regarding possible health and fire hazards Grasp an overhanging corner of the tissue and gently agitate it several times then slide the tissue off This should remove the problem blemishes Do not let solvent enter the bounding zone of the mirror Note that the mirror is not rubbed If the mirror surface is still contaminated use a highly pure solvent such as alcohol or acetone and generously wet the mirror surface with a sterile cotton swab or lens tissue Gently wipe the dirty areas Turn your cotton swab or tissue with each stroke so that a clean area is exposed Do not let solvent enter the
14. of pixels retrace plus deceleration plus acceleration Wobble Deviation in pixel position perpendicular e Jitter Deviation in pixel position along the fast scan axis Note For jitter and wobble values refer to the component catalogs di RETRACE ins LINE SHELL ae FAST SCAN POS TIME TIME FAST AXIS SLOW AXIS 34 GMAX M2 M2T 9 5mm XY Open Frame Head 7 4 XY Calculations The calculations in this application note are computed for orthogonally positioned 2 mirror 2 axis Scan Heads incorporating first surface on the center line of rotation mirrors When a 2 mirror 2 axis Scan Head draws a box onto a flat field the image is distorted in the familiar pincushion shape shown in the next figure Pi ri Dist bi The computation of scan coordinates for 2 mirror 2 axis Scan Heads in a Cartesian axis frame work is easily introduced with Scan Heads with first surface mirrors The following figure shows the geometry 35 GMAX M2 M2T 9 5mm XY Open Frame Head Cartesian Coordinate Y x v 2 Computation Geometry 2 IMAGE CUT V The equations derived from the presented figure are as follows ATAN gt T Z GAN ERA D Z Y e tr uz Y e x Or when arranged with respect to the variables of scanner angle Y ZTAN X Z Y e TANG z s xa e sy The variables in each of these equations are X The distance on the target field from the center to the coordinate in ques
15. required for settling error to diminish to 70 radians typically e Vector Motion Ka Y2 X Y rd POINT TO POINT X Y DECEL ACCEL r gt Ya Gg Ya SKYWRITING Example TOTAL DYNAMIC ERROR VS VECTOR SPEED Vector Performance 2 Based XY Scan Heads XY30 XY5067 ERROR MILLI RAD 0 5 10 15 20 7 3 3 Raster 35 XY2030 XY1013 xY0507 25 30 VELOCITY RAD SEC A raster scan is generated by two scanners one operating at high speed in a sawtooth pattern and one incrementing the line in the other axis This is unidirectional scanning The alternate method of fast axis motion triangle wave is bi directional raster It is almost never used because of the inherent Z line spacing The slow axis must step and settle extremely quickly in order to synchronize data in both directions at high speed with accuracy 33 GMAX M2 M2T 9 5mm XY Open Frame Head Raster Motion Unlike Vector Raster writing is synchronized more with time than position Raster scanning requires scan purity 10 or 20 times better than vector The eye is very sensitive to raster errors A single misplaced pixel can be quite apparent to the human observer Not only must the scanner electronics be of high quality but the scanner bearings must operate in a smooth wobble free way Raster error parameters are Write Period The time during the scan when the pixels are located Retrace The time between lines
16. scanner bearings When wetting the mirror s surface hold the scanner at an angle so that the liquid does not wet the scanner If any solvent is found in the bearings of the scanner the warranty is voided GMAX M2 M2T 9 5mm XY Open Frame Head Aperture Positions of Apertures Typical Aperture Dimensions of Some XY Scan Heads mm 7 APPENDIX 7 1 Mirror Selection Guide 7 1 1 Aperture Considerations The aperture of the Scan Head is the limiting opening through which the optical system must image The most important trade off to recognize when selecting a Scan Head is that larger apertures provide better optical properties but slower motion capability A two mirror two axis Scan Head has a number of distinct apertures One or more of the apertures determine the pupil of the Scan Head in any given situation These apertures are EA Entrance Aperture or location where the Scan Head structure limits the size of a lens element This is the usual location of the last imaging element The EA defines the maximum allowable diameter of a lens and its housing X mirror near aperture is sized and located by the near edge of the X mirror when rotated to its shallowest angle typically 35 degrees mechanical X mirror far aperture is similar to X but it is sized and located at the far edge of the X mirror Generally X does not come into play in computations Y mirror near is the Y mirror counterpart of X Y mirror far is th
17. 1 dated Tuesday August 20 1985 contains y 4 the performance standards adopted by the Food and AN DAN G E H 4 Drug Administration FDA which gives detailed D information regarding the determination of laser classification and labeling The ANSI and the FDA classifications are not the same For purposes of labeling use only the FDA classifications If your laser falls in a classification below Class 4 replace the warning label type with the correct label and I appropriate classification The factory provides alternate labels upon request gt VISIBLE AND OR INVISIBLE LASER RADIATION un E AVOID EYE OR SKIN EXPOSURE N TO DIRECT OR SCATTERED RADIATION NS NN CLASS IV LASER PRODUCT POSITION TWO AREA The GSI Lumonics XY Scan Heads provide you with the ability to aim the laser beam over a roughly pyramidal volume The divergence of the focused beam beyond the focal point which is a function of the lenses selected and their position can cause radiation to exit the pyramid When analyzing safety you must consider all regions within this aiming pyramid the divergent beam and the effects of all focal possibilities in the zone of hazard Reflections must also be considered GMAX M2 M2T 9 5mm XY Open Frame Head REMINDER Example of Laser Shutten Location in a APLK System EC NOTE Laser Scanner Hazard Sones of an HOM
18. CDRH regulations are used with GSI Lumonics XY Scan Heads 2 Certified lasers contain features to assist in their safe usage These protective features and the protective features within the GSI Lumonics XY Scan Heads should not be defeated Prior to operating any configuration of the GSI Lumonics XY Scan Heads you must make a through analysis of system safety Key information for this purpose is contained in this manual You would thoroughly familiarize yourself with all this information before proceeding A full description of laser hazard analysis is beyond the scope of this manual A good technical survey of laser safety requirements can be found in ANSI Z136 1 American National Standard For the Safe Use of Lasers This is available from American National Standards Institute Inc 1430 Broadway New York New York 10018 Among the many other sources of laser safety information the following institution offers several excellent publications The Laser Institute of America 5151 Monroe Street Suite 118W Toledo Ohio 43623 Final analysis of all safety features should be made by your Laser Safety Officer or a competent specialist in this field The first consideration in a safety analysis is the laser mated to the GSI Lumonics XY Scan Head The hazard level of the laser is roughly indicated by the Laser Class label that is on the device A brief description of the radiation classes are shown in the following table Note that
19. GSI Lumonics M2 M2T 9 5 mm Reference Manual Open Frame Head with 6U EDD Style Drivers 60 FORDHAM ROAD WILMINGTON MA 01887 GMAX SYSTEMS MULTI AXIS BEAM HANDLING P N 176 20027 GSI Lumonics 1996 GMAX M2 M2T 9 5mm XY Open Frame Head TABLE OF CONTENTS E UNERODUGTION SS 1 Ub Enc o UU a a ee en 2 122 Customer SUPPO eraan DC ES 3 ESSI c did 3 2 GENERAL DESCRIPTION ana 5 2 1 S an Head Types G ee an wate 5 2 2 MITO TIPOS ti A Ba ga pana TG a ET T 6 2 3 Controller Types ea 6 So A FET AND WARNING uuu Bann 7 3 1 Laser Shutter InStallallOrt s eoi eio reo euo v C rt e een OA 9 3 2 Installation Safety Requirements aana anana nennen 10 4OPERATION IR 11 4 1 Installation m 11 4 2 Operating Instructions ot Seien oer e da d 11 4 2 1 Driver Gard DesbrpllOli runter er REPE e 12 4 2 1 1 FOatUres petet ep e ER Guus e En 12 4 2 1 2 Power Requirements eed ee ee 12 4 2 1 3 The SIC Backplane Gard oet erret ee 12 4 2 1 4 A b dte leot eet d eoram nd 12 4 2 1 5 Front Panel Indieators acc cansadas 12 4 2 1 6 Address Selection o ee 12 4 2 1 7 Diagnostic Connector uem ede s RR RS DUE 13 4 2 1 8 Setting for External or DAC Input
20. HCI no EDDs E00 7017512 DSC2000 M DIC no EDDs E00 7017014 DSC3000 M DIC amp LT EDD only E00 7017507 DSC3000 M DIC no EDDs E00 7017517 The controller user manual provides all necessary information for the safe operation of the XY Scan Head 11 GMAX M2 M2T 9 5mm XY Open Frame Head 4 2 1 Driver Card Description 4 2 1 1 Features The driver card is configured specifically for use with M class scanners with sum dif LA detector configurations In many ways it is identical to the M3H driver pom Include output stage double push pull double push pull detector input voltage mode sum dif derived AGC input filters slew rate limiter scanner protection fuse fuse and temperature estimation mechanical 6U Euro DIN std 6U Euro DIN std backplane M3H type MSH type 4 2 1 2 Power Requirements The analog section and scanner power amp requires 18V 1A continuous and 5A peak The digital portion requires 5V 9 1A max 4 2 1 3 The SIC Backplane Card Each driver must interface through the Scanner Interface This is identified by the dual connectors for the galvo cable It is the same used for the M3H 4 2 1 4 Scanner Cable To connect the scanner to the SIC backplane use the same cable used with the M3H Note that the M2 called for has a 15 pin connector 4 2 1 5 Front Panel Indicators Three green indicators signal status of the scanner driver InField when lit indicates the galvo is operating withi
21. N Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure 4 1 Installation Installation of the XY Scan Head is relatively simple Four holes that will accept 1 4 screws have been provided in the baseplate Additionally two dowel pins have been placed in the baseplate allowing repeatable alignment of the XY Scan Head to it s mounting surface Refer to outline drawings in the appendix for exact locations of these features After securely mounting the XY Scan Head connect the drive cables provided to the X and Y servos If you have purchased GSI Lumonics controllers the X and Y servo drivers are clearly identified on the front panel Be careful to connect the X servo on the XY Head to the driver card labeled X servo and the Y servo on the XY Head to the driver card labeled Y servo Tighten screws to capture the connectors 4 2 Operating Instructions GSI Lumonics XY Scan Heads have been designed to provide optimal performance when driven with a number of different scan controllers The EDD cards are designed for use in a number of different scan controllers These include use with advanced GMAX software through interface connections to GSI Lumonics PC based HelperCard series DSC with HCI card and the traditional Digital Scanning Controller DSC with DIC card The DSC3000 nomenclature references a full 19 width 6U high rack CONTROLLER PART S DSC2000 M
22. UNV 0 600 10 5 3 8310 NOLLONNA4 S3HONI NI 38 SNOISNSWIC 31 413315 SSI ALIOU IZA Ti NOILISOG 1416811124 NIL LIS Id 7 y ONIdAVU anas NDILIS X NIV LVADSLNI N 0 8 3NNVvOS AJAI H LON 11 8 11 6001 N23 113 0 849 28 OL 035 3 38 V alva 080338 NOISIN3Y WAS SIINVAF 10 Jav SNOIS JNV 1 4 8 a 521180 9 10 SP yaLU3H ONY 300301 f 31899 H 31892 A 230991d 52 6 155 o1 pesu 5 f 8 1338 159 30 1834084 VH NDLONIW ADH TONG 56 2 8 c DNI Dan HSA 5290 56 52 8 3 v ONS S3I saana 55 5278 runs 8 vo 0 0 580133 03 08 oa 5 i regt 10 XX sawan auu sezmizv annis se N wM sahONI NI Suv SNDISRON ON WIS4 80 I 897 XVW9 3713 0 3 a va RUN 91 42 4 031 13325 553 1NGAIVGBL VIAL AGE AS UND ABT ABITE ABI ND 41 88
23. al Zero Drift y radian C 18 1 5 Typical Gain Drift ppm C 60 10 Notes 1 Angular specifications in terms of optical deflection 3 Distribution STD deviation is 27 ppm C and 3 ppm C for 2 STD deviation M2 and M2T respectively 4 Depends strongly on mirror size and operational speed i lees 2 32 58 931 31123 2 32 1 225 1046 8 26 57 1 976 P 350 9 89 24 79 062 350 18 89 7 0009 T 0000 5 r 931873 E 9 1873 905 14 7574 0075 4 7574 6076 T 91 31 01 177 1 180 1327 79 86 28 97 1500 138 10 1 AN 91177 1180 33273 58 56 18986 29371 075 1 312 nin o Y gt i Note 9 Pin Configuration Available M2 Outline Drawing MOT Outline Drawing Ey GENERAL SCANNING INC OPTICAL SCANNING PRODUCTS DIVISION Specifications subject to change without notice Copyright 1992 500 Arsenal Street Watertown MA 02172 GSI 700170 Telephone 617 924 1010 FAX 617 924 7250 060195 I 8 1 03 2 ATA 62 2 07 V NDW MOYA 38 838 ONIMVAC 2215 ISD 2 8 1 Wd 9 53903 d vHS 291 N3AD1 Y 5 saana Tv 3 0 28 I S 8 ONVTINOY 8 e ZW 000 1976 31414 NNAM NIJ cem 533 8 CIS NINI 38V SNOISNAWIC
24. can linearity errors associated with this construction The next figure shows that the symmetry a b of the main reflected ray shifts as the mirror surface rotates At the extreme angles the aperture symmetry a b shifts from the center field case Additional aperture compensates for this effect but increases inertia For example for offsets of 0 5 to 1 5 mm inertia increases 5 10 and for larger offset of 3 mm increases of 8 15 are realized Generally this is a small amount of inertial penalty and in the case of large offset the additional inertia is offset by sculpturing of the substrate as is done in integral mirrors 37 GMAX M2 M2T 9 5mm XY Open Frame Head Reflection at tuo angles NOTE Example Scan Error a utr TARGET TARGET The offset T also causes an additional scan non linearity error This error function is T Kesin o eos a ERR Here T is the mirror surface offset K is the input beam offset and alpha is the mechanical scan angle Mass balanced Scan Heads minimize these two problems by directing the input beam slightly below the pivotal center of the mirror This helps to center the beam at the extreme shallow angle and minimizes the offset linearity error when scanning The presented graph is typical of single axis flat field scan error for a mirror with a unity surface offset The scan angle in the graph is optical for convenience optical 2 mechanical T
25. cant time and the ultimate drawing speed is limited by Tracking Linearity the same as point to point There are two key aspects to accurate vectors 1 The synchronization of the axes is a function of Scan Head design and servo tuning 2 The control of the vector velocity on the target field The evaluation parameters of Vector scanning are Vector Rate The angular velocity of the drawn line or optical scan angle e Phase Delay a The time at the beginning of the vector after the ramp has begun before the scanners have moved b The period after the ramp has ended and the scanners continue at constant velocity toward the ending coordinate Acceleration Length The length of line drawn while the scanners are accelerating to full velocity GMAX M2 M2T 9 5mm XY Open Frame Head Tracking Offset The steady state error between input signal position and actual position during the vector motion Tracking Linearity The deviations in tracking offset from the average offset of X and Y during the vector motion e Acceleration Error At the start of each vector the two axes must accelerate identically to produce a straight line e Settling Error After a vector is complete the scanners must settle precisely to the starting point of the next vector If not the next vector will squiggle at the start It looks like an acceleration error but is caused by different servo factors e Settling Time Time
26. e Controller This driver includes a traditional temperature controller which is wired to the backplane The M2 does not use this capability 4 2 2 Scan Head Description 13 14 NOTE WARNING GMAX M2 M2T 9 5mm XY Open Frame Head 4 2 2 1 Scanner M2 with 15 pin connector See the data sheet in Section Outline Drawings Data Sheets Appendix B 4 2 2 2 Mirrors 9 5 mm clear aperture See options in Section Mirror Types on page 5 4 2 2 3 Scan Angle 21 optical clear aperture calibrated for 20 20 596 4 2 2 4 Outline and Mounting See Section Outline Drawings Data Sheets Appendix B for an outline drawing 4 2 2 5 Thermal Behavior Maximum Allowable Temperature The following Thermal Behavior discussion is most important for raster applications Vector applications typically require only 0 1 W to 1 0 W 0 2 C rise of applied power to the scanner Failure to perform these measurements and calculations for raster applications may result in significant scanner damage caused by an over temperature condition The current cutoff circuitry in the driver electronics described in Section Current Cutoff Circuit on page 15 will only protect the scanner if the scanner mount temperature is held below 48 C The scanner temperature is limited by a maximum allowable coil temperature of 100 C It is critical that the coil temperature does not exceed 100 C for each application of this Scan Head
27. e Y mirror counterpart of Xs Unlike As it will be important in certain vision computations X mirror clip is the beam radius to the corner of the X mirror viewed by the Y mirror This occurs when the scanners are pointed to the extreme lower right hand corner of the field Distance from EA to the surface of the X mirror nearest the axis of rotation in the center of rotation Sxn and Syf are similarly located Distance from a to the surface of the Y mirror nearest the axis of rotation in the center of rotation b TARGET ITI ST T TT 5mm 66 0 40 0 3 6 gt 2 5 21 Finst Surface Minors Mass Balanced Mirrors Type of Mirrors Typical Surface Offset Heads 22 GMAX M2 M2T 9 5mm XY Open Frame Head 10 30 0 28 4 7 1 10 0 13 0 5 5 10 0 8 10 0 gt 5 Kn 20 38 1 25 2 14 3 20 0 26 0 11 3 20 0 1 20 0 gt 10 Kn 30 50 8 28 4 21 4 30 0 37 0 14 4 27 7 20 3 26 1 11 7 Yn 50 58 0 70 0 35 7 50 0 67 0 221 47 4 42 4 46 4 22 6 Yn 7 1 2 Types of Mirrors To optimize their performance GSLI Scan Heads incorporate one or more of the mirror constructions described below First Surface Mirrors are designed with the reflective surface on the axis of rotation This simplifies the computation of dynamic geometric correction discussed in Section KY Calculations on page 35 Unfortunately it also creates a lateral imbalanc
28. e in the scanner when the mirror rotates First surface mirrors are restricted to scanners carrying apertures either outboard supported as in the 50 mm Scan Head or structurally stiff enough as in the 10 mm and 20 mm Scan Heads Mass balanced mirrors position the mirror mass in a balanced configuration about the scanner s axis of rotation thus eliminating lateral forced due to rotation This allows less robust scanner structures to more easily support large aperture mirrors This increases the sensitivity of the input beam to mechanical alignment errors and adds a small amount of X Y and focus linearity error For scan radii greater than a few hundred times the mirror offset these errors become negligible FIRST SURFACE MASS BALANCED MIRROR SIZE OFFSET GMAX M2 M2T 9 5mm XY Open Frame Head Inertially Matched Mirror NOTE Inertially Matched Mirrors are designed with X and Y mirrors having nearly the same moment of inertia This allows the scanners to be tuned to match each other and improves vector performance The small reduction in Y aperture matches typical laser focus cones A canting of the X axis also increases the Y incident angle These serve to reduce Y inertia to match X 7 1 3 Use in XY Scan Heads The three basic configurations of Scan Heads are e STD 45 Degrees Heads These are the simplest to configure Each mirror is designed to reflect the beam at a nominal incident angle of 45 degrees therefore the Y
29. efore 1 of the scanner motion occurs Motion The period during which 99 of the scanner motion is executed e Settling After 99 of the motion is completed the scanners settle and correct for any small position errors that might exist Error The deviation from the programmed scan angle 31 Step Motion 32 GMAX M2 M2T 9 5mm XY Open Frame Head SETTLE 4 1 V V PHASE DELAY ec To T T T INPUT VOLTAGE COMMAND POSITION OUTPUT VOLTAGE Step operation requires the longest settling time due to the saturation effects of the amplifier and variations in scanner parameters These allow for optimized tuning over small range of angles only Use over the full range requires greater settling time Vector type slewing is the preferred way to obtain point to point motion It is likely to be just as fast for large steps and faster for small ones 7 3 2 Vector A Vector is created by the coordinated rotation of one or both axes of an XY Scan Head Two types of vectors may be drawn Point to Point Vectors begin and end at drawn line endpoints In most cases this 15 the fastest point to point transit 9 Skywriting The scanners back up then scan across the start point and across the end point stopping beyond the end point Although this type vector solves acceleration and deceleration exposure problems it may not be faster than point to point This is because the acceleration and deceleration lengths take signifi
30. ervice c Check contents of the box against the packing list to assure all parts have been received d Inspect each item to assure it is not damaged GMAX M2 M2T 9 5mm XY Open Frame Head 2 GENERAL DESCRIPTION Enclosed with this package are the following qm 6U EDD Style Driver card 2 tuned for XY Each Scan Head is unique in the servo parameters it requires for optimum operation Therefore each XY Scan Head must be used with its calibrated driver See Section Operation on page 11 for information regarding system set up 2 1 Scan Head Types Scan Head Types with py SCANNER APERTURE MIRROR PART 5 CO2 UV UV M2Tw EDDs w Baseplate OEM M2Tw EDDs OEM 000 3010527 000 3010528 GMAX M2 M2T 9 5mm XY Open Frame Head 2 2 Mirror Types LASER TYPE YAG 602 ARGON VISIBLE HP Aperture mm 9 5 9 5 9 5 9 5 9 5 9 5 Wavelength 1 064 10 600 488 514 488 514 325 360 450 700 nm Coating Dielectric Dielectric Dielectric Dielectric Dielectric Durable Ag on Metal Reflection min 99 5 99 5 98 0 99 5 98 0 96 0 Wavelength nm 1 064 480 514 325 350 80 0 50 0 95 0 450 650 633 350 360 45 0 633 Power Capability cw 500 500 100 5 MW cm2 50 10 W cm Power Capability 100 400 2 GW cm 100 ns pulsed 10 ns pulsed MW cm Surface Quality 40 20 40 20 60 40 40 20 40 20 40 20 Scratch Dig See your GSI Lumonics sales representative
31. esponsibility for CDRH Center for Devices and Radiological Health certification There is no implied warranty of fitness for a particular purpose and GSLI is not responsible for consequential damages Individual components manufactured by GSLI or others may be covered by their own warranties Refer to the appropriate manuals for this information GMAX M2 M2T 9 5mm XY Open Frame Head CALL 1 2 Customer Support GSI Lumonics has support services available to you concerning problems with either the product or manual you are using Before calling for assistance please make sure you refer to any appropriate sections in the manual that may answer your questions The Outline Drawings Data Sheets in Appendix B may be particularly helpful If you need further assistance The customer service personnel will be able to give you direct assistance and answers to your questions U S Massachusetts 978 661 4300 in the U S 01 978 661 4300 outside the U 5 Germany Munich 49 89 899134 0 Italy Monza 39 39 2025387 UK Banbury 44 132 787 2424 Japan Tokyo 81 3 3406 7990 ask for the GMAX Customer Service Department 1 3 Unpacking The package you receive will include those items mentioned in the packing list is included in the shipment that details the exact items shipped 8 CAREFULLY unpack the contents from the box b Save shipping container and packaging material in case you need to return unit for s
32. for more details 2 3 Controller Types The EDD cards are designed for use in a number of different DSC scan controller configurations These include use with advanced GMAX software through interface connections to GSI Lumonics PC based HelperCard series DSC with HCI card and the traditional Digital Scanning Controller DSC with DIC card The DSC3000 nomenclature references a full 19 width 6U high rack DSC3000 M HCI amp LT EDD only E00 7017525 DSC3000 M HCI 8 LT EDD only PostGrid Softw E10 155141 DSC3000 M DIC amp LT EDD only E00 7017507 DSC3000 M DIC no EDDs E00 7017517 GMAX M2 M2T 9 5mm XY Open Frame Head User R 7 ubi 7 CAUTION Laser Hazard Analysis 3 SAFETY AND WARNINGS he United States Food and Drug Administration through the Center for Devices and Radiological Health CDRH has promulgated regulations 21 CFR parts 1000 and 1040 controlling the safety of lasers and laser products for sale or manufacture in the United States GSI Lumonics XY Scan Heads are regulated by the CDRH This section is a guide to the specific areas of this product and to the manual s Pay particular attention to CDRH compliance information GSI Lumonics XY Scan Head are designed to provide maximum flexibility and ease of use Such a design inherently requires the user to assure the overall safety of the configuration in use It is the user s responsibility to insure that 1 Only lasers certified to comply to
33. g notation such as 40 20 40 referring to the scratch and 20 to the dig number A scratch is a gouge or tear in the mirrors reflective surface The scratch number defines the sum of the scratch widths in micro meters That number must not be exceeded when all the scratches in the useful aperture are summed The sum of the lengths of all the scratches in the useful aperture must not exceed 1 4 of the useful aperture diameter Digs are pits or gouges more or less round in nature When summed all the dig diameters in the useful aperture must not exceed the dig number times 10 micro meters In the Y Mirror of many Scan Heads the useful aperture is defined by a moveable ellipse of the size typical of the image beam on the mirror not the full mirror for both scratch dig and flatness SCRATCH DIG DESCRIPTION 24 GMAX M2 M2T 9 5mm XY Open Frame Head Typical XY Head Mirror Scratch Dig Specifications x Normal ta 45 Incidence 10 5 Highest quality laser surface Scatter free 20 10 Laser quality Used particularly with smaller apertures where scatter or interference patterns cannot be tolerated 40 20 Very good optical quality Beam splitters and laser photographic The small defects have little effect on relatively large apertures 60 40 General optical quality Visual optics and general purpose laser photographic 80 50 Good plate glass quality APERTURE SCRATCH 7 1 7 Reflectivity Reflectivity is
34. incorrect position in the image plane In focused laser systems OPD frequently appears as elongated or distorted spots These defects appear in different axes in the near and far focus about the optimum focus or as lobes of energy projecting from the focused spot In vision systems the image is not always diffraction limited particularly with the larger apertures As much as 1 2 or even 1 wave of distortion may produce acceptable results Mirror non flatness in imaging systems is a common cause of OPD and is likely to appear as astigmatism in the image Vertical and horizontal axes do not focus optimally at the same plane This is seen in the two views of the image beam in the figure shown on the next page The incorrect imaging position of certain bundles of light typically reduces contrast in the image 27 Asligmalism Caused by Cylindrical Mirror Surface 28 GMAX M2 M2T 9 5mm XY Open Frame Head The front view of the image beam when reflected forms a cylindrically deformed mirror Because the beam s convergence is reduced 1t focuses at a farther point than the undisturbed focus cone in the side view The spot diagrams show that in this case the spot takes on an oval or enlarged size however it never attains the theoretical focus and size of the well formed image on the right LESS CONVERGENT LENS CONVERGING BEAM FOCUS FRONT SIDE pp CN es cc 4 CYLINDRICAL PROPER DISTORTION MIRROR If the image
35. istered trademarks of Microsoft Corporation NOTE GMAX M2 M2T 9 5mm XY Open Frame Head 1 1 Warranty GSI Lumonics warrants this product to be free from defects in materials and workmanship for 12 months from the date of shipment GSLI will at its option repair or replace the product if it is defective within the warranty period and returned freight pre paid to a service center designated by GSLI GSI Lumonics requests that customers obtain a Return Authorization Number prior to returning units and that they carefully pack units in their original packing or equivalent Under warranty GSLI is not obligated to repair damage to any units resulting from the following conditions customers are responsible for defining which conditions are applicable to their product a Personnel other than GSLI representatives attempting to repair or service the product b Improper use of the equipment c Connecting the product to incompatible equipment d Personnel other than GSLI representatives modifying the product e Scratches and chips on any optical surface after three weeks from the date of receipt f Damage to any optical surface from improper handling or cleaning procedures This applies specifically to those items subjected to excess laser radiation contaminated environments extreme temperature or abrasive cleaning Customers assume all responsibility for maintaining a laser safe working environment OEM customers must assume all r
36. lates RMS current in the scanner coil and disconnects the driver when the current exceeds 1 7 amps RMS square wave input and 1 42 amps RMS sine wave steady state for 30 seconds The power permitted at these currents must be calculated using the coil resistance at the galvo operating temperature The power at room temperature 25 C is calculated using a coil resistance of 4 65 ohms At 100 C the power is calculated using a coil resistance of 6 05 ohms Since the circuit has a built in delay the current may exceed these values for periods of time shorter than 30 seconds For instance the circuit will permit 2 13 amps square wave for 13 seconds This circuit should prevent coil damage under most long term over power situations but does not eliminate the possibility of damage due to brief fault conditions involving significantly higher currents In summary this circuit will not prevent damage due to unusual fault conditions during tuning or system debug 15 NOTE Heat Sinking Test 16 GMAX M2 M2T 9 5mm XY Open Frame Head 4 2 2 7 Dynamic Heating by Coils This is the standard open frame Scan Head with high conductance mounting rings installed between the scanners and bracket These have a thermal impedance of approximately 0 6 C W This combined with the M2 coil impedance of 2 5 C W can be used to calculate a max average power capacity for example 100 Ccoil max 30 C rame ambient 2 5 C W 25W Because the i
37. measured by the ratio of incident to reflected light at 45 10 PERCENT REFLECTANCE 400 Legend A Protected aluminum C Durable silver 609 700 800 900 Enhanced aluminum non stock ref only First surface gold non stock ref only 1000 es Example Theoretical Coatings CAUTION 26 GMAX M2 M2T 9 5mm XY Open Frame Head 2 LJ ua a 30 35 40 45 50 55 60 65 INCIDENT ANGLE TO NORMAL Legend A Polarization 10 6 um B Polarization 10 6 um C Polarization 1 06 um D Polarization 1 06 um 7 1 8 Special Example Computing Power Capability of CO and YAG Mirrors The power capability of high power laser working mirrors can be computed Assume the reflected beam is a TEMoo Gaussian beam The table below gives peak irradiance capability Compute the total power for a 2 3 filled aperture in Watts given the peak irradiance Ip aperture Ap as follows _ IpePle Ap Watt atts 18 This eguation assumes that the 1 e diameter is 2 3 filling the aperture which ensures that 99 of 6 power is transmitted Should there be extra power 86 transmission is acceptable The full 1 e diameter may fill the mirror providing a beam stop aperture is supplied prior to the Scan Head This ensures fringe energy does not overheat the mirror mounts and the surrounding scanners Compute the total beam power for a filled aperture as follows Ip PI e Ap Watts Any c
38. moving coil and moving iron torque transducers The M2 has the low The M2T is designed to provide inertia rigidity and low tempera ture control of moving iron devices as well as the low inductance of moving coil units This new scanner however is smaller and lighter than either moving coil or moving iron models Our rugged M2 is available in two configurations The MOT is our high performance unit the M2 the standard Both the M2T and M2 when used with GSI s innovative servo loop achieve higher band width faster mirror settling and lower drift than other designs a higher degree of gain and offset stability in environments where moderate ambient temperature changes are anticipated High speed laser beam posi tioning now meets the absolute accuracy requirements for stereo lithography micromachining imaging and communications Customization is available for OEM s OPTICAL SCANNERS M2 Series Optical Scanners Specifications Parameters Units M2 M2T Rated Excursions max degrees optical 30 30 Rotor Inertia g cm 1 7 1 7 Wobble urad 1 5 1 5 Jitter urad 6 6 Repeatability urad 12 12 Magnetic Driver Coil Resistance Ohms 4 5 4 5 Coil Inductance mH kHz 0 62 0 62 Torque Constant Nm A 023 023 Peak Current Instantaneous A 25 25 Thermal Conductivity Coil to Case C W 2 5 2 5 Position Sensor Angular Sensitivity HAS optical 11 11 Non Linearity max 0 05 0 05 Typic
39. n its rated angle Tracking when lit indicates the difference between command and position error is lower than a preset limit Blinking may be normal in applications with high slew rate commands Power when lit confirms that 18 and 5 V supplies are operating 4 2 1 6 Address Selection WS is configured to set the strobe select address and status signal read back W5 is found on the PCB in the exposed section towards the DIN connectors Configure the jumpers connecting as the shaded segments show in the following chart s 12 GMAX M2 M2T 9 5mm XY Open Frame Head W5 Jumper Settings W5 Jumper Settings y Resulting ulputs on HO Bus NOTE NOTE SELECT MODULE Y servo X servo 4 2 1 7 Diagnostic Connector The following signals are available on the diagnostic connector located on SIC backplane gene om Se S 6 etmaPOSRiN 6 oyo 10X POS Err out key 4 2 1 8 Setting for External or DAC Input Eo The board can be configured for either DAC or Analog input thought the diagnostic connector Only the DAC analog passes thought the slew rate limit circuit Analog inputs will not be slew rate limited To make the selection remove the front panel via six Phillips head screws Locate segments 5 and 6 labeled DAC ENBL and EXT ENBL Left left close close enables DAC input and disables external input Right Right enables external input 4 2 1 9 Traditional Temperatur
40. nes are located HAZARD ZONE Rad as the optical beam passes through as HPM Scan Head TARGET PLANE 10 E NOTE CAUTION GMAX M2 M2T 9 5mm XY Open Frame Head 3 2 Installation Safety Requirements Because of the possible hazard increase of scanning stopping or slowing to an unsafe velocity it is required that the controller software shuts down the laser power a scanning safeguard In all cases we recommend that you fully enclose and interlock the zone of hazard for your application to prevent possible opening while the laser is energized When laser radiation exceeding Class 1 levels may exit the enclosure you must have suitable protection for eyes available At no time should you stare into the beam place any parts of your body in the beam path or expose yourself to reflections of powerful beams You should use only a Class 1 HeNe Laser for alignment If this is not possible you should use the available laser s lowest power setting and remote beam sensing technique Using optical instruments with this product increases eye hazard Additional Safety requirements may be applicable during initial alignment of the optical system Refer to Section Safety and Warnings Section 3 GSI Lumonics XY Scan Heads are labeled in conformance to the requirements of 21 CFR parts 1000 and 1040 GMAX M2 M2T 9 5mm XY Open Frame Head CAUTION DSC Types with Part Numbers 4 OPERATIO
41. nternal temperature of the scanner varies with coil heating some thermal drift will occur A coefficient of approximately 100 PPM gain per C of coil temperature can be anticipated Coil Frame In the Scan Head supplied heat sinking tests resulted in the following typical values Rc 2 5 C W Rm 0 6 C W Riotal 3 1 C W 4 f N 4 4 4 2 3 System Performance Data Dynamics System Slew rate limiter setting 375 rad sec Tracking offset 340E 6 rad sec rad 23 Spec Velocity 10 rad sec Spec Velocity Settling 1 5 msec Tracking Linearity 300E 6 Rad 3 Step and settle 7 mrad 1 5 msec to 70E 6 Rad err Notes 1 Allangles in optical radians 2 rad sec rad rad sec vel position lag in radians 3 May be converted to volts by 10V 698 rad GMAX M2 M2T 9 5mm XY Open Frame Head OPERATING ENVIRONMENT The following recommendations cover the handling use or storage of Scan Heads Environmental Storage Temperature 10 C to 60 C Requirements Minimum Operation Temperature 15 C Maximum Operating Temperature 34 C Humidity Non condensing 17 GMAX M2 M2T 9 5mm XY Open Frame Head NOTE CAUTION Removing Dust 6 HANDLING MAINTENANCE he GSI Lumonics XY Scan Head does not contain any user serviceable or user maintainable parts However you should visually inspect all optical surfaces each time lenses and alignment mirrors are handled Make sure that the laser is off
42. o compute the error on the target field first compute the X and Y scanner angles refer to Section AY Calculations on page 35 Next look up each respective angle on this graph and multiply the scan error fraction times the mirror offset for each axis Add the respective X and Y errors to the computed Cartesian field coordinates directly The focus path length error is the sum of the X and Y errors XY0507 G120DT 0 014 mm 0 011 mm 0 025 mm XY3037 G325DT 0 054 mm 0 042 mm 0 960 mm Maximum peak to peak errors 38 GMAX M2 M2T 9 5mm XY Open Frame Head Scan Error us Scan Angle T SCAN ERROR VS OPT SCAN ANGLE ERROR AS A FRACTION OF T en mS N BEAM SCAN ANGER DEG OPT D THETA 37 DEG THETA 45 DEG It is usually not necessary to evaluate errors for each configuration The following analysis shows that mass balance scanning non linearities are generally less than inherent scanner non linearities You may evaluate the consequence of this error by comparing it to nominal scanner non linearity which is specified at 0 3 of full field Peak to peak error on the target field therefore may be computed by Scanner Field error D 2SLE SA D scan radius SLE scanner linearity error peak to peak SA scanner angle peak to peak 39 GMAX M2 M2T 9 5mm XY Open Frame Head When equated to the mirror offset error MBM D2eSLE eSA MBM scan error caused by mirror offset
43. on 15 only dependent on the X and Y scan angles By computing the X and Y scanner angles for a field coordinate of a proposed field you can look up the cosine distortion 29 GMAX M2 M2T 9 5mm XY Open Frame Head Distortion of Cosine Cosine Distortion as of image size Distortion in First deg Y Quadrant 20 6 8 6 8 7 0 7 3 7 7 8 2 8 8 9 5 104 11 3 12 4 18 5 4 5 5 5 6 5 9 6 3 6 8 7 5 8 2 91 10 0 11 1 16 4 2 4 3 4 4 4 7 5 1 5 7 6 3 7 0 7 9 8 8 10 0 14 3 2 3 2 3 4 3 7 4 1 4 6 5 3 6 0 6 9 7 9 9 0 12 2 3 2 4 2 5 2 8 3 2 3 8 4 4 5 2 6 1 7 1 8 2 10 1 6 1 6 1 8 2 1 2 5 3 1 3 7 4 5 5 4 6 4 7 5 1 0 1 1 1 2 1 5 2 0 2 5 3 2 4 0 4 9 5 9 7 0 6 0 6 0 6 0 8 1 1 1 5 2 1 2 7 3 5 4 4 5 4 6 6 4 0 2 0 3 0 5 0 8 1 2 1 8 2 4 3 2 4 1 5 2 6 3 2 0 1 0 1 0 3 0 6 1 0 1 6 2 3 3 0 4 0 5 0 6 1 0 0 0 0 1 0 2 0 6 1 0 1 5 2 2 3 0 3 9 4 9 6 1 X 0 2 4 6 8 10 12 14 16 18 20 deg 7 2 2 2 COS Focus Distortion When the image beam is incident on the target field at an angle as shown in the figure below the path length to diagonal corners of the field varies as the angel theta calculated previously COS Focus Distortion SCAN HEAD F SIN 2 297 2922 gt The next table shows the distribution of COS focus error in terms of the focus depth required expressed as a of frame size not to be confused with the field size 30 GMAX M2 M2T 9 5mm XY Open Frame Head Distribution of COS Focus Error as of Image Size deg
44. ontamination on a high power mirror surface degrades its capability Contamination must be considered when figuring power capability GMAX M2 M2T 9 5mm XY Open Frame Head Safe Peak Imadiance Capability Laser Power Capability for Mirrors 2 3 Filled Aperture Among the Variations to Consider WAVELENGTH CE PEAK IRRADIANCE PEAK PULSED IRRADIANCE 10 6 um 500 W cm2 400 MW cm2 1 06 um 100 W cm2 80 MW cm2 1 06 uM 1 06 uM 10 6 uM 10 6 uM APERTURE PULSE CW PULSE CW For the same reasons as CW lasers pulsed laser power must be examined for peak irradiance of the pulse for damage threshold and also for average power If the beam is multi mode estimate its peak irradiance from profiles supplied by manufacturers 7 2 Image Distortions Two types of image distortions are of principal interest 1 OPD Optical Path Distortion causes imaging distortions These are dependent on mirror quality only Scan angle does not affect the results 2 Cosine distortion causes spot elongation for laser and compression of the image frame for vision Both occur approaching the field edges 7 2 1 OPD Distortion Optical Path Distortion may be caused by the Scan Head or imaging system Path length variations for different portions of the beam may cause blurring in parts of the image Focusing at an image plane before or after the primary image place also may result in distortion Alternately portions of the image beam may be directed to image at an
45. ower Capability of CO and YAG Mirrors 26 72 image ID ISTOMONS si a 27 7 2 1 OPD Distortion e eo teer ee 27 7 2 2 Cosine COS Distorlion acordes 28 7 2 2 1 COS Image DISIOFLIODL Rem re 29 7 2 2 2 COS Focus Distortion A NR EAE 30 723 Drve Sidnale decode tes tv enam da nga a aaa aas 31 7 3 1 8le gt ee een 31 TEE ARAO DEEE 32 E e a a a aaae Aa a Ea a E NEEE E E E as 33 74 XY GalculatlOnts ecd o ee dee det ennt Pulse een 35 7 5 Lnearty Distortions ar p eere e ta rh aa aie Ctt Dec iuuat 37 O ARRENDADOR ee P 41 8 1 Outline Drawings Data Sheets cisco it nana aa anane 41 GMAX M2 M2T 9 5mm XY Open Frame Head 1 INTRODUCTION SI Lumonics 2 mirror 2 axis XY galvanometer based Scan Heads provide the Gas of deflecting optical beams in laser and vision applications In laser writing the XY Scan Head requires a light source focused through the XY Scan Head onto a target The XY Scan Head then directs the focused spot to generate raster or vector patterns as programmed For vision these Scan Heads are used with CCD and Vidicon cameras or with single point detectors such as photomultiplie
46. quality does not meet expectations test the lens system without the XY Scan Head Frequently lens systems are to blame Decentering stress and other manufacturing problems can cause image deformities similar to the mirrors 7 2 2 Cosine COS Distortion COS has two aspects 1 Image Distortion and 2 Focus Distortion These distortions are functions of the theoretical geometry of a two axis dynamically corrected post objective dynamically focused scan system REFLECTION FROM CYLINDRICAL MIRROR GMAX M2 M2T 9 5mm XY Open Frame Head COS Distortion in Vision 7 2 2 1 COS Image Distortion Because the scanners point from a single point in a space on the target field the incident angle varies with position The following diagram depicts COS distortion for a vision system The shape of the target images seen in the Scan Head pupil is shortened along the shadow axis to the dimension H H COS theta SCAN HEAD VIEWING ANGLE RS Eh a SHADOW_AXIS OBJECT Ls AXIS And of course in a laser scanning configuration the imaged spot lengthens by the same percentage The elongation axis is along a line drawn from the center field to the coordinate acquired The equation to compute the incident angle is TRUE SHAPE TAN2 TAND Y ATAN i CoS The table following shows the distribution of cosine distortion over one quadrant of a typical scan field Note that this distorti
47. rs Like the human eye the XY Scan Head directs the image path to view different target areas Typically the Scan Head executes RANDOM ACCESS motions to acquire various images for vision system evaluation This manual describes GSI Lumonics M2 and M2T 9 5mm XY Open Frame Head with EDD drivers It is ideally designed for vector applications Raster applications are also well suited with this product when temperature monitoring and control is incorporated in the system design As a component in a system instructions for the safe installation and usage of systems that use GSI Lumonics XY Scan Heads should be obtained from the manufacturer of the complete product WARNING Conventions Throughout the manual you will see graphic icons representing pertinent information in the text The purpose of these icons is to provide a visual convention to alert you of a stop in the flow of the manual where an important note or safety hazard alert is posted NOTE is an important procedure you should be aware of before proceeding CAUTION alerts you of a potential danger to equipment or the user WARNING indicates an imminent danger to the user TIP and REMINDER are helpful hints to procedures listed in the text The conventions are listed as follows showing both the text and the picture ers will see NOTE CAUTION WARNING 8 GMAX HC 2 HCI PC MARK MT HPM and HPLK are trademarks of GSI Lumonics Microsoft MS DOS and Windows are reg
48. tep Vector Raster 31 Heat Sink 16 Installation 11 M2 Scanner Data Sheet 41 Max Temperature 14 Mirror Aperture 14 Operating Environment 17 Operating Instructions 11 Outline Drawing with M2 41 Outline Drawing with M2T 41 Outline Drawing with M2T Baseplate 41 Scan Angle 14 Scanner 14 Types 5 System Performance Data 16 y E Unpacking 3 W Warranty 2 Index 1
49. tion 36 GMAX M2 M2T 9 5mm XY Open Frame Head Mass balanced Offset Surfaces Y The distance on the target field from the center to the coordinate in question Z From the center of the distance perpendicular to the target to the pivotal axis of the Y mirror Dx The optical scan angle of the X scanner 2 the mech y The optical scan angle of the Y scanner 2 the mech fr The focus radius or the distance from a the point of the mirror e The distance from points a to b The shortest distance from the X mirror surface to the Y mirror surface at their respective rotation axes 7 5 Linearity Distortions Offset first surface mirrors are mass balanced about the center of rotation as shown in the next figure Mass balance provides two attractive features 1 It minimizes the bending moments that are generated whenever an eccentric mass is rotated 2 It presents the minimum polar moment of inertia therefore the least load on the scanner If the bending moment is forceful enough to deflect the scanner shaft it may cause wobble or cross axis scan deviations Mass balanced mirrors optimize performance when the velocity bending forces of the mirror become significant as compared to the bending stiffness of the scanner shaft SURFACE OFFSET EQUAL MASS EQUAL MASS Offset first surface mirrors however have two minor drawbacks First with rotation there 15 variation in the aperture exposed Second there are s
Download Pdf Manuals
Related Search