MacroNode I/O User Manual
Contents
1. Liefault CP Interval ms 0 Up time Variables w Figure 36 Edit Collection Plan 4 1 5 Charting Applet Once a data collection plan is configured you can view the data using a built in charting applet Plot Collection Plan Default CP at e pet a TE Pe DC n AU 19 SIE Defaut CP on ToolWeb v Checkall v3 0 5E 23122 0049 7102 0539 e 4 Manual scale Y min oo Y max 00 0 Sef Last data 3 12 2006 15 07 14 727 Copyright C 1995 2003 MES Instruments CIT Products Figure 37 Charting Applet Page 39 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual 4 1 6 Download Data to Local PC Collection plan data can also be downloaded in CSV format 8 57 53 5 11739 9 57 540 11740 57 55 0 11742 57 55 5 11743 57 56 0 11744 57 56 5 11745 57 57 0 11746 57 57 5 11747 57 58 0 11748 57 58 5 11749 57 59 0 11750 57 59 5 11751 58 00 0 11752 58 00 5 11753 58 01 0 11754 58 01 5 11755 58 02 0 11756 58 02 5 11757 58 03 0 11758 58 03 5 11759 58 04 0 11760 58 04 5 11761 31 58 05 0 11762 32 58 05 5 11763 33 58 06 0 11764 4 2 TOOLwe M 4 gt ncpdata 1 ZS Collection Plan Default CP Period 500 milliseconds 5846 0 02 0 0 004 0 4 88E 05 5846 0 0 004 U 5847 0 004 0 02 0 004 0 0 0 004 5847 0 0 004 0 0 004 5646 0 0 0 0042. 0 0 004 0 0 004 0 0 D 0 0 0 009 0 860 004 0 0 004 0 0 004 0 0 0 004 0 0 004 0 0 004 0 0 004 D a 0 n 0 0 0 004 0 009 U U 0 0 0 009 0 0 004 0 0 004 0 0 004 0 0 004 0 0 009 QO U 0 004 0 D 004 0 0 009 0 0 004 0 0 004 ov Figure 38 Collection Plan Data b Tool Side Interface The tool side interface is relevant when a MacroNode is connected to a BlueBox in a semiconductor process tool APC and e diagnostic system The following messages are supported via the TOOLweb tool side Interface Message Supported apabilitiesRequest Response The names and units as exposed in the CapabilitesResponse are the same as defined in the channel configuration Reference the BlueBox Manual for additional details on interfacing with BlueBox Note P Microsoft Internet Explorer 5 0 1 or higher is required Microsoft Internet Explorer versions less than 5 5 may not function as expected due to limitations of the browser Page 40 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual 5 Specifications Physical Specifications Criteria Dimensions I O Connector Ethernet Connector RS 232 Connector Weight Environmental Specifications Criteria Operating Temperature otorage Humidity Functional Specifica
3. Rotary switch IP address base 132 188 0 1 ic Autostart U Protocol Module Included modbus Modbus Throttle gt Back Back Limit Modbus Throttle Min Task Fri 1 Press NI in 3 seconds to modify these settings Shell Figure 23 Serial Diagnostics Menu Command Page 25 of 44 MKS Instruments CIT Products 2011 All rights reserved e e Tag MacroNode UO User Manual Tar Product The modbus Throttle 2 Back2Back Limit is the number of back to back modbus commands threshold before modbus request is changed to lower priority to allow other processes time to run Modbus Throttle gt Min Task Pri should be set at 11 The serial interface provides diagnostics for the device The help command can be used to display all commands available through the serial interface U Tera Term Web 3 1 COM2 VT MEG File Edit Setup Web Control Window Help iShell help t query tasks g query zemaphorez query mutexez query queues Query nexuzses query timers query partitions query regions query CPU use co clear gt use values jlog display system call log lstacks display task stack use lrezet Reset the board and CPU larp display ARP table jdhcp display DHCP status dns display DNS cache Inbuf display network buffer status Imbufl display network buffer location Ingtztat display network interface status route display routing table Ochs display list of socket s status la
4. a sz po1e sz poss sz p014 sz no13 sz n012 sz 0013 sz b010 52 009 UU Tee 51 AU1 LSE 51 A01 MSE 51 A02 LSE Stuff Byte gem ES a E STRESSEG EEN SES EE E SES EEN as S1 AM MSB a4 S1 AM LSB Analog outputs as SOS MSB RSC SCENE EE as S1 AM MSB 20 S1 AM LSB Ca EE MSB Ca o S2 AM LSB Ca SND MSB Ca S2 AM LSB as S2 AU2 MSB Humber of Consume Bytes 26 51 A06 LSE Figure 30 Instance 101 Output Mapping Page 34 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual 3 3 3 Assembly Instance 102 smks Below is an example of Instance 102 which describes the information provided by the unit input values plus the virtual inputs This example demonstrates the fact that digital bytes always appear before analog bytes and physical I O appears before virtual I O Also notice that byte number nine is a stuff byte that forces the least significant analog bytes to fall on an even byte boundary The last line displays the total number of bytes this unit produces including the virtual inputs Assembly Instance Instance 102 v T gt 0 Assembly Byte Offset Bit7 Bit 6 Bit5 Bit 4 VDI21 vDI20 vpri9 8 VDI32 VDI31 VDISO VDI29 VDI28 VDI27 VDI26 VDI25 E Eh SATE SB 33 S
5. 2 for how to connect the unit using serial COM port The diagnostics serial port is also used to display all legally required Copyright messages current version information and hardware configuration information during the unit s power up sequence Table 14 Diagnostic Serial Port Connector Pin Out DB 9 Female Connector RS232 Function TXD RXD SGND MKS Instruments CIT Products 2011 All rights reserved Page 15 of 44 e emis MacroNode UO User Manual NONO TUE PV 2 10 Ethernet Connector The 100 10 BaseT Ethernet Port uses a standard shielded RJ45 connector or Fiber Optic Channels Indicators for the Ethernet Port are located on the front panel 2 11 Status LED s The MacroNode has one LED that indicates the unit status and an additional LED that indicates the network status The function of these LED s meets the requirements for each network protocol The following tables describe meaning of the various LED state for each protocol Table 10 Modbus TCP Status LEDs LED Color Status LED Network LED Ne EG Power Alternating Red Green Watchdog failure outputs off Network Configuration Error Table 11 Ethernet IP Status LEDs LED Color Status LED Network LED OFF Mopoe A Y NoPower OFF Solid Green Device Operational Blinking Green Not Supported No Connections Blinking Red Minor Fault recoverable Connection Timeout 2 12 Rotary Switches The Ethernet MacroNode has three rotary switches o
6. 28 29 30 31 32 33 34 35 36 37 a O3 OC Oz OO CN Oo a TAH A O A gt gt a2 2 z Ze Ze eer Z aa uou L Z 9 4 oo st oo st os oo To zs oo 1o r x lt lt lt lt lt lt lt lt Figure 4a Analog Inputs Single ended Mode Top Side Connector Q Q Q Q Q Q Q O AQA Z Ak ZZ kt SZ A SZ A Z Z Z ZZZ 2 gt gt zoso eo 2 og o o E o o o o L 2 e oc st oc oc sf sf st oc oc sf sf LILLI oc 2 QR RU mee UE e 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 ER 9aoe94O89e9 98923 2 Toto 5 5 zt 5 X 5 X 5 X on lt lt lt lt lt lt lt lt Figure 4b Analog Inputs Differential Mode Top Side Connector Q Q Q Q Q Q Q O A uc UM ZOZ ZI 2 O zZ mN a O 2 Z S v CO OO OO oO oO o Oo oo oo o LF e ft sf sf sf sf sf sf st st st sf bs sf et t CO 2RABETBSDITIASMESTTES NC US 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 JA gt LO 15V Figure 5 Analog Outputs Bottom Side Connector d Note All Analog power comes from an internal power converter External Il pins for 15 volts should be used as reference only Supplies have limited power and should not be used to drive external loads Page 9 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 4 4 Digital Expansion UO Wiring The MacroNode digital expansion board has two 37 pin D Sub connectors used to access the UO points The 24V power must be supplied by an external source via these connectors Ea
7. 4 Open your PC web browser Netscape Internet Explorer or equivalent Enter the IP address in the web browser s address line http 192 168 0 10 The main page for the MacroNode will open Page 24 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 3 2 Connecting via a Serial Terminal Session Connect your computer to the diagnostics port DB9 using a standard straight thru cable Using a terminal program such as Microsoft HyperTerminal or Tera Term Pro you can now communicate via the diagnostics port of the unit The serial connection parameters are listed in the following table Table 13 Serial Connection Parameters Parameter Value 38400 Data bits 8B Stop bits Flow Control Once connected the IP Address can be changed by typing the menu command and pressing m within 3 seconds The current the IP address of the unit can be view by just typing menu a Tera Term Web 3 1 COM VT File Edit Setup Web Control Window Help IShe1l menu atarting HacroHode Combo Iu Terminal baud rate 38400 patani gateway 110 202 3 1 Primary DHS server 150 100 100 30 Secondary DHS server 150 100 100 893 FEC routable IP addr DHCP FEC routable IP mask DHCP EAR local IP address enabled FEC MAC address A C1 17 11 12 23 loyslog Console Yerbosity N IL O Map Format CONTIGUOUS Product Part Humber AS 00966 1 Serial Number 10721847 MoolWeb Control Access ANY
8. 5848 0 0 004 0 02 U 0 58483 0 004 0 004 0 02 0 0 004 0 004 0 0 004 5849 0 009 0 004 U 5850 0 004 0 004 0 02 0 0 0 004 5850 0 004 0 004 U 5851 0 0 004 0 02 0 4 66E 05 0 004 5851 D 0 02 U 0 4 88E 05 0 004 5852 0 004 0 004 0 02 0 0 004 5852 0 004 0 004 0 0 004 0 5853 0 0 004 0 0 004 0 5853 0 004 0 004 0 02 0 004 0 5854 0 004 0 004 0 02 0 0 4 88E 05 5854 0 004 0 004 0 02 0 004 0 60 004 U 5855 0 004 0 0 02 QO 0 0 009 5855 0 004 0 0 004 0 004 0 0 004 5856 0 004 0 0 004 0 0 004 0 5856 0 02 0 0 004 0 5857 0 004 0 02 0004 0 004 0 0 004 5857 0 004 0 0 004 5858 D 0 02 0 004 0 0 004 0 5858 0 0 004 0 02 0 0 004 U 58598 0 004 0 004 0 0 004 0 0 004 0 0 004 5858 0 004 0 02 U 0 4 88E 05 5860 0 02 0 004 0 5860 0 004 0 004 0 02 0 0 004 0 5861 0 004 0 004 0 0 004 488E 05 0 004 VID 214 VID 222 VID 223 lt 0 00 A Collection Plan Default VID 224 VID 225 VID 226 VID 227 VID 228 VID 229 D 0 0 009 D 0 004 0 0 004 0 0 004 0 0 0 009 D 0 0 004 0 0 0 004 0 0 004 0 4 0 0 009 U DE 0 0 0 004 0 0 004 a 0 0 0 0 004 U 0 0 0 009 0 0 004 0 0 004 0 0 004 0 004 0 004 U 0 0 004 0 0 004 0 0 0 009 a 0 0
9. Lm si fr Seiren hei Wsi ien iaki f i See ii CH J ier cmm l Analog spur Me Dn HLUIEEFEREL ALT j HER n abi ea Manama C 1 tye ur hie Fina Bie Pics wk gens Hes Vote Spam j 10 ee tinvdc Uem ix uem oe tum Medbus Magie ant 1 5 13 15 Dar dei Taimeris Analog Gurai Bong Dis z t Ve LL singte ended Hw Res gt Ge ee Dreior en UC 14 bir Lake Vilage Spa j 10 to fiuvdc Dupong zx um is tome Mimma Cn ek i mea ica Im eu ED qaem TC Mie odor Caen RIO Su dienen Figure 25 Device Homepage Dynamic diagnostic details available from this page are e Unit data model number serial number and software version Operational Mode Operation statistics Ethernet load Fieldbus Protocol Unit MAC address Page 27 of 44 MKS Instruments CIT Products 2011 All rights reserved e mks MacroNode I O User Manual Tar Product By selecting an I O of interest from the main page a pop up will appear for each section of I O e Inputs can be read dynamic e Outputs can be set manually if the unit is in diagnostics mode Note m The I O is arranged in blocks which represent expansion modules The J last block is always a virtual I O block which can be used in conjunction with the cLogic feature Please contact MKS for the cLogic API document
10. and enter http 192 168 0 10 in the address line There is a slight delay as the unit transfers content to your local browser The main Device page is displayed If you are unable to load the page check the units switch settings and ensure the IP address of the PC is 192 168 0 1 Also check the Ethernet cable connections to your PC and to the MacroNode oaks Gp Hincim hicks irri niie ers amis Minds F udo Henr eet Pn Mew Sack Into sce F Pat 1 Mere 3 OO Physical Physical Virtual Warihi R dn d ww e e Sinum mok ok Digma Inputs Ca Tor wus icri ve Co KZ es oo Gereral nda COT eo Accive Lei Hat Sum Det De re _ 6 Digital Gutpus FOE Wipe E Ld TE WaTRUM Ten jActiwm Le CET ree eom amp nale4i rip ut ime C __ olfferencial _ ga Fa EE ML EES Patina au ae ae Vibia Sec GE Ee Uem Leen s tum Magie gen LKH Re Analog Cipa Zus D ls wp GE f Hie Bra zl SS SE Pratordifa aue bir Par bit Vitae Edge km fl wdC Goer Sucen Mima C nc iek a Macs odio Cent RAO pu dian end KN eu ED da erm TC Figure 17 Device ControlWeb page Page 19 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual e To access configuration mode reset the unit and refresh the above page within 30 seconds after the unit boots sik WD Glace Wach TIS ica 3 Dec d Bag eun E
11. are accessed and configured through the web browser interface Users must determine the I O points of interest those usually referred to as Key Process Variables Once these variables are named and scaled they are available for data collection and analysis 4 1 1 Control Access Create the allowed permissions to process data ToolWeb Write Access Control Designated Controller aoon IP Address seit Your IP Address 10 112 0 103 1188 CONFIGURATION ACCESS DENIED Figure 33 Access Control 4 1 2 UO Bindings Select the I O points to be available for TOOLweb functions Each point is selected given a description and scaled to meaningful process units Up to 64 variables can be configured Page 37 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual Technelogy Tor Praducbylty Current Variables Figure 34 Collection Variables 4 1 3 Data Collection Plans A data collection plan selects the process variables of interest and the frequency of data collection Each collection plan can then be viewed using a Charting Applet or can be downloaded in CSV format to your local PC Data Collection Plans Figure 35 Collection Plan Page 38 of 44 MKS Instruments CIT Products 2011 All rights reserved Hu TOHE MacroNode UO User Manual 4 1 4 Data Collection Plan Editing Create a collection plan and select the key process variables of interest Edit Collection Plan 0
12. modules The A last block is always a virtual I O block which can be used in conjunction with the cLogic feature Please contact MKS for the cLogic API document for more information on implementing the virtual UC e pps YE hip j 10 3963 LOL ic anni 2906 06 15 17 23 20 UTC Figure 27 Ethernet IP I O Mapping Page 31 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual Below is an example of one way the expansion slots can be populated and the following sections explains the resulting input and output bytes for this configuration Note this is only one example of how the expansion slots can be populated The byte order conforms to the following rules Digital control bytes for each slot always come before the analog control bytes Analog falls on even byte boundaries a null byte is used for stuffing Analog is always low byte first then high byte Virtual I O is after physical I O Expansion Slot 0 Expansion Slot 1 Expansion Slot 2 Expansion Slot 3 CPU Slot MacroNode 1 0 Z7 PDON 7 AAON 7 Combo e m LINK 100M 1 2 1 2 ES 24 H n E Verar24v7 L erarasd MsraT2 v2 S Y Figure 28 MacroNode with Digital Analog and Combo Expansion cards Page 32 of 44 MKS Instruments CIT Products 2011 All rights reserved e smks Technalpmu Tar Pradubblby MacroNode UO User Manual echnealpgy Tar Praducbviby 3 3 1 Assembly Instance 100 Below is an examp
13. 103 e O gt T Assembly Byte Offset Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 40 VAOe LOE 41 VAOe MSE 42 WADOS LOE 47 WAOS MSE 44 YAOS LSE 45 YAOS MSE Humber of Consume Bytes 46 0 so nos so 007 50 06 50 005 so no4 50 003 so noz so no1 1 s0 0016 50 0015 s0 v014 50 0013 s0 012 s0 011 s0 p010 50 003 z sz nos sz bo7 sz boe sz pos 52 004 sz nos sz noz sz no1 Physical Digital Outputs a sz oo16 sz no15 sz n014 sz n013 sz D012 sz 011 sz D010 52 003 s Virtual Digital Outputs gt s gt oo Stuff Byte 19 m 12 13 T 1s T 17 1s 15 Physical Analog Outputs zo P 22 23 T 25 26 27 T T T m F 33 T T T 37 T Virtual Analog Outputs 39 wane LSB 7 nr MSB MAD LSB wA MSB E a RE MSB Figure 32 Instance 103 Output Mapping with Virtual I O Page 36 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 4 TOOLweb Interface TOOLweb is a system wide program for enabling and gathering real time data from multiple elements of a process and providing this data to factory based modules for analysis FDC and APC The Ethernet MacroNode uses TOOLweb functionality for the following e Web based tools for data analysis and debug directly from the I O module e Real time data acquisition using XML over HTTP 4 1 TOOLweb User Interface TOOLweb functions
14. AIN IONIAN EE 5 1 1 CONVENTIONS USED IN THIS USER MANUAL c 0ccceeccceeeeceececeeeceeceeeeeeaecesseeeeseeeseeeeseesaeeesaeeeseeeaes 5 WARS UAV ANG Le EE 6 2 1 SHIPPING OKO NT CA 6 2 2 EE 6 2 3 Inca HE TON pee seetent 7 2 4 POWER AND VO VV E 7 2 4 1 Power SUDDIY WINING E 7 2 4 2 I O Mating Connector Information 00 ccccccccseccceccceeccseessueessuscesuessueessesesaeessaeessueessesesseessneesens 8 2 4 3 Analog Expansion VO WINN O E 9 2 4 4 Digtal Expansion V Do EE 10 2 4 5 o0 WIO EE 11 2 5 Buer CT BRITTEN 12 2 6 DIGITAL OUTPUT INTERFACE EXAMPLE susie ecsiecsceaceducthavi slider eu os eere bans x it beve da danses leto eoru eux ideas 12 2 ANALOG INPUTS eae eee ne nee eee ee ee ee a ee eee ee eee 13 2 7 1 Configuring Analog INDUS EE 14 2 8 EC 15 2 9 DIAGNOSTIC SERIAL PORT 2 scaituoiuiy moist imos eaumocUi mE um EUG nEROM mb uda i LA AU E UELLE 15 GEERT 16 Ped SN OTAS LED e O 16 L OTT E assess I 16 KR le ln re EE 17 IUe Qe NRI TEE 18 Network Ero pille P rz iilo EE 24 3 1 CONNECTING TO A COMPUTER VIA T CP IP ccccccccceeecceececeeeeeececeeceseeeeceeeseeeseeeesueeseeessneeseneesaees 24 3 2 CONNECTING VIA A SERIAL TERMINAL SESSION enne nnnnnnnn nnn nna rns nnns nnne nis 25 CONTROLweb User Interface 27 UO MAPPING MODBUSJ T Ch 28 3 3 VO MAPPING ETHERNET IP caius eee ae er ene ee nee aera een dps
15. ATE RSR SAT LSB SAT SB A9 SATE SB SATE SB 16 SATA SB o az o0 SI AI SB 18 S1 AIS SB SATS MSB 20 ATE SB SATE SB O SAT SB 8ST SB SAT SB 25 SATE SB 6 ATSB rT SB 28 RATIO SB 29 S1 AI10 MSB 30 S1 AIMi SB SATIRE SATE SB 033 O S1 AI32 ISB 34 SATS SATIS MSB 36 0 SICA SB O37 0 00000 S1 AI14 MSB 28 SATIS SB 40 S1 AI16 LSB 41 S1 AI16 MSB 42 43 44 45 46 47 48 49 50 VAI1 LSB 51 52 53 54 VAI3 LSB 55 56 57 58 VAIS LSB 59 60 VAI6 LSB 61 62 VAI7 LSB 63 64 VAI8 LSB 65 VAIS MSB Number of Produce Bytes 66 Physical Digital Inputs 8 Virtual Digital Inputs Stuff Byte Physical Analog Inputs Virtual Analog Inputs Figure 31 Instance 102 Input Mapping with Virtual UO Page 35 of 44 MKS Instruments CIT Products 2011 All rights reserved mks MacroNode UO User Manual 3 3 4 Assembly Instance 103 Below is an example of Instance 103 which describes the information provided to the unit Outputs including the virtual outputs This example demonstrates the fact that digital bytes always appear before analog bytes and that physical I O appears before virtual I O Also notice that byte number nine is a stuff byte that forces the least significant analog bytes to fall on an even byte boundary The last line displays the total number of bytes this unit consumes including the virtual outputs Assembly Instance Instance
16. NY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT Page 44 of 44 MKS Instruments CIT Products 2011 All rights reserved
17. P Address Switches 23 24 Device Status Lestat 2vJ stat is I O Expansion Figure 1 MacroNode Front Panel Page 6 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 3 Installation The MacroNode mounts on a standard 35mm DIN rail system Make sure there is sufficient side clearance for ventilation to maintain an ambient operating temperature of 0 C to 50 C Figure 2 MacroNode DIN Rail Mounting 2 4 Power and l O Wiring The MacroNode requires three connections one to the Ethernet network one for device power and one for I O signals Ethernet and I O cables are available from a variety of industrial sources 2 4 1 Power Supply Wiring Connect an external 18 30 VDC power supply to the 3 terminal power connector The connector should be wired according to the labeling on the case Pin Signal 18 30 VDC Chassis GND Figure 3 Power Terminal Block The manufacturer and ordering part number for the power terminal block connector is described in the following table Table 1 Terminal Block Ordering Information Description MFG Part Number 3 pin Terminal Block Weidmuller 1625620000 Page 7 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 4 2 I O Mating Connector Information The following tables supply reference part numbers for mating l O connectors Table 2 describes a connector that uses termin
18. TIONS For the period commencing with the date of shipment of this equipment and ending one year later MKS will at its option either repair or replace any part which is defective in materials or workmanship or with respect to the date related operations warranty without charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS CIT home office in San Jose CA This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment MKS shall not be liable under any circumstances for indirect special consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES EXPRESSED OR IMPLIED INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE AND A
19. al Schottky diodes are provided for output transient protection and each UO point is protected with a self resetting poly fuse rated for 500 mA Page 12 of 44 MKS Instruments CIT Products 2011 All rights reserved e mks MacroNode I O User Manual Tar Product Outputs default to the OFF condition during power up and processor reset conditions The figure below shows the output circuitry 24V Output Driver DIO X 24 GND Figure 14 Digital Output Below is an example of how to interface with the digital outputs for both the sinking and sourcing hardware configurations The digital I O circuitry is again powered from an external 24 volt power source via the I O connector ES O 24V GND Q O DIO1 Q o O DIO1 O O Figure 15 Sinking Output Figure 16 Sourcing Output 2 Analog Inputs The analog inputs are coupled directly to the processor The processor is limited to 14 bits analog to digital conversion MacroNode SW allows analog conversion up to 16 bits single ended or differential for easy implementation and compatibility Resolution data is left shifted if resolution is set at 16 bits The analog voltage span is fixed at 10V to 10V See Section 3 for configuration All analog circuitry is powered from an internal 15 Vdc power source The 15 V and 15 V power is protected with a self resetting poly fuse rated at 100 mA Table 8 Analog Voltage 2 s Complement Convers
20. al blocks and therefore appropriate for development Table 3 contains part numbers that are suitable for production purposes with solder cup connections Table 2 also contains the part number for a D SUB hood that conforms to the 0 65 inch 1 65 cm maximum height requirement Table 2 Development Mating I O Connector Description MFG Part Number 37 pin D SUB with Shell Terminal Block 2300986 erch Table 3 Production Mating UO Connector and Hood Description MFG Part Number 37 pin D Sub Receptacle solder cup 523 L77 DC37S 37 pin D Sub Metal Hood 523 17E 1727 2 Caution In order to guarantee proper operation and to prevent damage to the product insure that the chassis ground is properly attached for the application Follow all applicable electrical codes when mounting and Warning SCH i wiring any electrical device Page 8 of 44 MKS Instruments CIT Products 2011 All rights reserved e mks MacroNode I O User Manual Tar Product 2 4 3 Analog Expansion UO Wiring The MacroNode analog expansion board has two 37 pin D Sub connectors used to access the I O points Each I O card type has unique pin assignments the assignments for the analog card are shown in the following figures CO OO OO OO OO O O OO OO CO Z z zZz zz zz zz zZz Zz zZz zZz Z Z Z Q Q Q Q Q Q Q O o Z zZ Z Z Z 222 E xc D EM cD 9 OD OP Of 5 Ff 68 2 c5 c c sf sf sf sf sf sf sf LLL LLLI et ei EE qu 20 21 22 23 24 25 26 27
21. ch UO card type has unique pin assignments the assignments for the digital card are shown in the following figures All 24 GND labels are one net they are not separate ground points SCENE EK E x O X O x O X O X O O savha js5aysa n5nas 060 EEGENEN z Z RRNRRRRNRRH EARS BRR m ogeop90259029 02 092929259 Sox RoXRRGEXQGBXQBO Os FOS FOF RST PASS g N N N N N Figure 6 Digital Top Side Connector Table 4 Source Sink Select for Digital Top Connector Sink Source Select Sinking Input Sourcing Output Short Pin 18 to 37 Sourcing Input Sinking Output Short Pin 19 to 37 d 4 AIN 2 3 4 5 6 z 8 9 1 11 12 13 14 15 16 17 8 SourceSel be M DIO 13 24 GND 24 IN DIO 14 24 GND 24 IN DIO 15 24 GND 24 IN DIO 16 24 GND 24 IN DIO 17 24 GND DIO 48 NC SinkSel S ib Ww Ww X RRRRRKRRRREESHESERb inco 9OZROZROZRNOZROAXRO9O o No Jo Nogo Qs QW QW QW Qao Figure 7 Digital Bottom Side Connector Table 5 Source Sink Select for Digital Bottom Connector Sink Source Select Sinking Input Sourcing Output Short Pin 18 to 37 Sourcing Input Sinking Output Short Pin 19 to 37 Page 10 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 4 5 Combo I O Wiring The Combo I O Expansion Card has two 37 pin D Sub connectors used to access the I O points The 24V power must be supplied by an external sourc
22. dM EMI EM UE 31 3 3 1 ccn duque ce H 33 3 3 2 crc INStante TOT EE 34 3 3 9 cueste E I 35 3 3 4 FAS SOTO TSEC LG EE 36 TOOLwep En e 37 4 1 TOQOLWEB M USERINTERFACE E 37 4 1 1 Zeie 37 4 1 2 VO PAVIA E 37 4 1 3 Dala Colecon E 38 4 1 4 Data Collection Plan Editing cccccccsccccssccceccnsusensusccsueccusesauessusessusensuseasaesausensusensusensassaneess 39 4 1 5 CAAPI ADDICT E 39 4 1 6 Download Data To Local E 40 4 2 TOOLWEB TOOL SIDE INTERFACE scsnies veniet eid np eann aN EAA O EET Ea a Uter a Ue 40 lere MAU aa eebe 41 Model Code Description ccccccceecccseeceeeecenceceucecseeccaeecseeceueecaueessueeseeecseeseucesaueesseeesueeseusesseesageess 43 Page 3 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual WARRANTY e 44 Page 4 of 44 MKS Instruments CIT Products 2011 All rights reserved mks MacroNode UO User Manual General Information The MacroNode I O product line provides high density compact and economical I O solutions for Ethernet Networks The MacroNode supports up to 4 expansion slots of I O which can be ordered with any arrangement of digital analog or combination cards Both Modbus TCP and Ethernet IP networks are supported Additional data monitoring is available through a standard web browser and the TOOL web too
23. dd Add network interface del Delete network interface lird zaddr reg read bytes from I2C device rg zaddr reg ivali write 1 byte to LZ device print SHTP client statistics print current date display HTTP sessions Enables HTTP debug messages disables HTTP debug messages Ic help show cLogic help EA Oe enable modbus debug jdnbdebug disable modbus debug menu display the boot menu bye gxit monitor resume application Shell Figure 24 Serial Diagnostics Help Command Page 26 of 44 MKS Instruments CIT Products 2011 All rights reserved ah Hu MacroNode UO User Manual CONTROLweb User Interface The user interface is web based You can access it by simply browsing to the IP address of the CONTROLweb node Note u2 Microsoft Internet Explorer versions older than 5 5 may not function as expected ell due to limitations of the browser The main page of the CONTROLweb unit shows a top view of the module This is referenced as the Device tab near the top of the page mks Deke mem ee Vu we Heip V0 lors Sick Into Daaf Fh 1 Ieri 7 me PhyercaT Physical virtual ww e ao Econ t E ES pm fof i na Digma paus d ee A Tore acelee to General Info borom Aceive Lm Ad e ech Binim Op i 26 ine KR VG ph A T EE Diesal Gupi Fiera ams i Tol rus to ee 7 Mei nora Ten Actium
24. e via these connectors The 15V power is supplied by an internal converter The pin assignments are shown in the following tables All 24 GND labels are one net they are not separate ground points 22727 4286264 549 5 E ee DN a 2 3 4 5 6 T 8 9 10 Rl 2 13 14 15 16 17 18 P d wA aan SEEEEEEEEEEEEEEERER o6oao 6R 6BaR 0BRaAS D B x D ON e a dk dt dek Figure 8 Combo Top Side Connector Table 6 Digital Source Sink Select for Combo Top Connector Sink Source Select Sinking Input Sourcing Output Short Pin 18 to 37 Sourcing Input Sinking Output Short Pin 19 to 37 Q Q o Z Z Z e T O 9x88 xo99 5292921 2902924 Cc ge N eum 2 3 4 5 6 T 8 9 0 1 2 3 4 5 6 T 8 SN An H H a HWH P SW SS WS a B lcs e H H e SH D e 4 IB p 4 Gogo 6 g oeec 2 22 Go 5 jor og g oR Figure 9 Combo Diffrential Mode Bottom Side Connector Card Type Number of Inputs Type Single ended differential See Figures 4a and 4b in section 2 4 3 for wiring information Differential only Single ended inputs must be connected in pairs to create differential inputs Particular pairs must be used input 1 5 2 6 3 7 4 8 Single ended mode input is not supported on combo card Analog Expansion Card Combo Expansion Card Page 11 of 44 MKS Instruments CIT Products 2011 All rights reserved mks MacroNode UO Use
25. ed 2120 Gsnsral Into Bleilel Sela KEN paerd t M cage Coss bat Si Tees SEmi HET TU 15 22 04 UIL Figure 18 Device Configuration Webpage Page 20 of 44 MKS Instruments CIT Products 2011 All rights reserved eMKS MacroNode UO User Manual echindlogy Tor Praductil e Click on the Config I O for the block to open the configuration page for the card The digital IO card debounce setting for all the digital IO point for the card is currently not implemented Please refer to cLogic documentation for software work around Attp 10 202 3 109 Bl E E Digital Config Options for Block 0 Input Options Output Options db Internet Figure 19 Device Digital Card Configuration Webpage e The analog configuration is fixed for Ethernet IP protocol except for analog input for single ended or differential Modbus TCP protocol allows protocol resolution data representation and type configuration as shown below http indo Ioj x http H10 202 3 108 7slot 1 Black 1 Analog Config Options for Block 1 oe Comp p Comp 10 to 10V dc 10 to 10Vdc F Differential single Ended ba Figure 20 Configurable analog parameters for Modbus TCP protocol Page 21 of 44 MKS Instruments CIT Products 2011 All rights reserved emks MacroNode UO User Manual e The Device page provides current status on the unit and provides basic I O control and monitoring when the device is in diagno
26. eemks Technology for Productivity MacroNode UO User Manual Copyright Preface smks This manual and the software described in it are copyrighted with all rights reserved Under the copyright laws this manual and software may not be copied in whole or part without the prior written consent of MKS Instruments The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all of the materials purchased may be sold given or loaned to another person Under the law copying includes translating into another language or format MKS Instruments Controls Group 2011 134 W Rio Robles Drive San Jose CA 95134 About this manual This manual is designed to serve as a guideline for the installation setup operation and basic maintenance of the MacroNode device The information contained within this manual including product specifications is subject to change without notice Please observe all safety precautions and use appropriate procedures when handling the MacroNode product and its related software Export Regulation MKS Products provided subject to the US Export Regulations Diversion or transfer contrary to U S law is prohibited Page 2 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual Table of Contents 2 3 4 5 6 SNS V
27. ess For example A switch setting of 330 means that the diagnostic mode is set and the IP address is statically configured to 192 168 0 30 ul Note Rotary switches decimal representation above 554 are reserved and d should not be used 2 13 I O Monitoring There are multiple control and data monitoring interfaces for the unit e Modbus TCP or Ethernet IP control e Web browser manual control e Web browser configuration and graphical data monitoring e XML streaming data acquisition using TOOLweb protocol Page 17 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 3 Quick Start e Setthe IP address switches on the front of the unit to 3 1 0 The unit is now in Diagnostic mode with a static IP address The units IP address will be 192 168 0 10 Power the MacroNode by supplying 24 volts to the 3 position terminal block power connector e Power the I O modules by supplying 24V for Digital modules via the I O connector Note Analog 15 volts for Analog modules is supplied internally e Attach a network cross over cable between the unit and your PC or use a HUB to build a small network e Modify your PC network TCP IP settings using the computer s Connection Properties menu to match the following PC IP Address 192 168 0 1 PC Netmask 255 255 255 0 Page 18 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual e Open a web browser window
28. for more information on implementing the virtual UO UO Mapping Modbus TCP The unit Modbus Slave ID is fixed at 255 The Modbus mapping details can be viewed through the web browser interface by clicking on the O Mapping Tab from the main page The figure below is one example of what will appear on the screen The mapping will change depending on which I O expansion modules are installed and whether IO mapping is in block or contguous The last block is not a physical expansion module it consists of virtual UO only Page 28 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual amis Mass odes Te F i ee HX wie hele Modbus kets Mapping Biren Cerne Rr ati tag a Fe en RE E E X NN KU SES oe 0 a EE HE 7 mwi CH E lr uil 5 zt mrmckz m Iur meg a moneo Hulding geg a ck 5 Lupe sey 3 ef inm po EREECHEN a de dat t eir 2 Sr Auldinu Aug acisi wu Amaluu Off amp Seet e ing BI i asina Is Holding seg est isti sey ers 51 Holding Beg s n gt CE m g ees 1 a Holding eq skiss 1 en Tyne Tange SE HEES Tad On iacit UTE an Ve S neve Figure 26 Modbus Data Mapping for unit with 2 expansion modules Page 29 of 44 MKS Instruments CIT Products 2011 All rights reserved e mks MacroNode I O User Man
29. he network LED should be blinking green If the states are different reference the LED status table in section 2 10 Also check all power connections Page 23 of 44 MKS Instruments CIT Products 2011 All rights reserved mks MacroNode UO User Manual Network Configuration The MacroNode network settings configure the 10 100 BaseT Ethernet port The following are factory default Ethernet settings Parameter Setting IP Address 192 168 0 X Subnet mask 255 255 255 0 Default Gateway Note ud Reading or changing the network settings of an unknown unit is achieved by eb connecting via a serial terminal session 3 1 Connecting to a computer via TCP IP The Ethernet MacroNode is configured and controlled via its Ethernet port The following steps show how to configure a Windows PC for first time communication with a unit 1 Connect the unit to your PC by using an Ethernet crossover cable for direct point to point connection or connect through an Ethernet switch or hub i Some 10 100MB Ethernet interfaces may not detect the MacroNode when Note Do using an Ethernet crossover cable If you experience problems connect through an Ethernet switch or hub 2 Change IP switches on the MacroNode to 3 1 O 3 Change your PC network TCP IP settings so that PC resides on same sub network as the MacroNode I O Use the following TCP IP settings IP Address 192 168 0 1 Subnet Mask 255 255 255 0 Default Gateway none
30. ion Table for 12 bits A D Conversion Table 0x07FF 0x0001 0x0000 OxFFFF OxF800 Page 13 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual Table 9 Analog Voltage 2 s Complement Conversion Table for 14 bits A D Conversion Table Ox1 FFF OxOFFF 0 0012 V 0x0001 0x0000 0 0012V OxFFFF Ox2FFF 0x2000 Table 10 Analog Voltage Straight Binary Conversion Table for 14 bits A D Conversion Table Table 11 Number and Type of Al Card Type Number of Inputs Type Single ended differential See Figures 4a and 4b in section 2 4 3 for wiring information Differential only Single ended inputs must be connected in Analog Expansion Card pairs to create differential inputs Particular pairs must be used input 1 5 2 6 3 7 4 8 Single ended mode input is not supported on combo card Combo Expansion Card 2 1 Configuring Analog Inputs Analog inputs can be configured as single ended differential mode up to 16 bit resolution straight binary or 2s complement format These are configured through the Webpage interface To configure these unit has to be reset and the unit Webpage is refreshed within 30 second after the unit boots Page 14 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 8 Analog Outputs The analog outputs are implemented using 12 bit D A s with a 10V to 10V output range MacroNode al
31. l side Interface XML over HTTP The MacroNode package provides DIN rail mounting and easy access to I O through standard 37 pin D Sub connectors 1 1 Conventions used in this User Manual H Caution The CAUTION sign higlights information that is important to the safe operation of the MacroNode or to the integrity of your files Warning The WARNING sign denotes a hazard to personnel It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel n2 Note The NOTE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight On screen buttons or menu items appear in bold and italics Example Click OK to save the settings Keyboard keys appear in brackets Example ENTER and CTRL Pages with additional information about a specific topic are cross referenced within the text Example See page xxx Page 5 of 44 MKS Instruments CIT Products 2011 All rights reserved smks MacroNode UO User Manual 2 Installation and Setup This section describes the MacroNode hardware setup as well as the interface with the Ethernet network I O connection examples are given in section 2 4 2 1 Shipping Box Contents e MacroNode Product e Power mating connector 2 2 Hardware Description MacroNode 1 0 77 PDON APON LINK 100M 1 2 LAN Interface I
32. le of Instance 100 which describes the information provided by the unit input values This example demonstrates the fact that digital bytes always appear before analog bytes Also notice that byte number five is a stuff byte that forces the least significant analog bytes to fall on an even byte boundary The last line displays the total number of bytes this unit produces Instance 100 T gt 0 Assembly Digital Inputs Stuff Byte Analog Inputs Figure 29 Instance 100 Input Mapping Page 33 of 44 MKS Instruments CIT Products 2011 All rights reserved emks MacroNode UO User Manual 3 3 2 Assembly Instance 101 Below is an example of Instance 101 which describes the information provided to the unit Outputs This example demonstrates the fact that digital bytes always appear before analog bytes Also notice that byte number five is a stuff byte that forces the least significant analog bytes to fall on an even byte boundary The last line displays the total number of bytes this unit consumes Assembly Instance Instance 101 e O gt T Assembly Byte Offset Bit Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 e so pos 50 007 so noe so nos so no so os so poz 50 001 i so po1e so po1s so n014 so no13 so n012 so 0011 so bo10 50 009 a so noz4 so noz3 so no22 so n021 so n020 so n019 so n01s so n017 Digital outputs a sz pos s2 no7 sz noe sz nos sz no sz pos sz poz 52 001
33. lows configuration up to 16 bits for compatibility Data is left shifted is resolution is set higher than the HW resolution at 12 bit DAC Analog outputs can also be configured as Ze complement or straight binary The output drivers are capable of driving 2 KO 5 mA output loads Analog outputs default to O volt during power up and processor reset conditions Table 12 Analog Voltage 2 s complement Conversion Table Conversion Table 0x07FF 0x0001 0x0000 OxFFFF OxF 800 Table 13 Number and Type AO Card Type Number of Outputs Type Analog Expansion Card Single ended outputs See Figure 5 in section 2 4 3 for wiring information Combo Expansion Card 2 Differential outputs See Figure 9 in section 2 4 5 for wiring information 2 9 Diagnostic Serial Port The MacroNode has an RS 232 serial diagnostics interface available The serial port will also provide access to a proprietary command line interface with specific commands to display advanced or detailed status information and control of configuration parameters including those available via the Web interface and others that are intended for advanced or factory use that are not normally exposed via the Web interface The command line interface supports the help command which displays a brief synopsis of all other supported commands which should be self explanatory to anyone sufficiently familiar with the controller theory of operation and the technologies involved see section 3
34. n the front panel each switch representing a decimal digit O through 9 These three switches serve two purposes 1 Determines the least significant section of the IP address 2 Determines the operating mode Table 12 Switch Conditions Mode Switch Settings Watchdoq IP address Production OOO Enabled DHCP Production 001 254 Enabled 192 168 0 Switch Settings Disabled DHCP Diagnostic 301 554 Disabled _ 192 168 0 Switch Settings 300 Page 16 of 44 MKS Instruments CIT Products 2011 All rights reserved e mks MacroNode I O User Manual Tar Product When the unit is in normal production mode the combinations of the rotary switches represent a decimal number between 000 and 254 When the number is between 001 and 254 this number is used to configure the last network segment of the static IP address with a factory set prefix 192 168 0 xxx or any other prefix that may be configured through the diagnostic serial port If the rotary switch combination is set to 000 the unit will obtain an IP address automatically using DHCP protocol To set the operating mode to diagnostics mode set the rotary switches to 300 or above In Diagnostic mode the watchdog is disabled and the user is allowed to change the value of the outputs via the Web based diagnostic pages Setting the switches to a value of 300 configures the IP address using DHCP and setting the switches above 300 configures the unit to a static IP addr
35. nter register will increment 1 count for every timeout event that occurs In the event that a timeout occurs the Status LED will alternate between red amber and green Once a timeout occurs all outputs are disabled The Watchdog Timeout value can be set from 100ms to 65535ms and can be disabled by writing a value of 0 to the register The Watchdog Timeout Counter increments on each timeout event and is cleared by writing any value to the register Note qe To ensure that the Watchdog Counter register is cleared the register should be i written to during initialization Page 30 of 44 MKS Instruments CIT Products 2011 All rights reserved ssmks Technelpgy Tar Productivity MacroNode UO User Manual 3 3 I O Mapping Ethernet IP The Ethernet IP I O details can be viewed through the web browser interface by clicking on the I O Mapping Tab from the main page The figure below is one example of what will appear on the screen The mapping will change depending on which UO expansion modules are installed This page provides information for Instances 100 103 The table is broken down by byte number as well as by the bits within said bytes The byte total is displayed at the bottom of the table To change the instance use the Assembly Instance drop down menu at the top of the screen Instances 100 and 101 do not include the virtual I O where as instances 102 and 103 do Note i The I O is arranged in blocks which represent expansion
36. put ON Voltage Output OFF Voltage AIAO Card Analog Accuracy Analog Response Time Analog Input Analog Output COMBO Card Number of Digital I O Response Time Digital Input Current sinking Current sourcing Digital Output Current sinking Current sourcing Current max Analog Accuracy Analog Response Time Analog Input Analog Output ny emks Min 6 5V to Max 30V 200 mA max channel Min 23 8V 580uA R 22400 Min 23 8V 1mA QR 71200 Max 240mV 200mA R 21200 Max 133mV 100mA R 22400 200 mA max channel 750 mA per 6 DO Min 23 3V 100mA R 2400 Min 23 1V 200mA R 721200 Max OV OuA R 1200 Max OV 0mA RL 2400 0 1 Full scale 10V to 10V 200 usec 16 single ended points or 8 differential points s w selectable 14 bit 1Khz RC filter 8 single ended points 12 bit Range 10 to 10V omA channel into a 2 KO load 16 points input or output 50 usec 1 5 mA min 1 5 mA min 200 mA max channel 200 mA max channel 750 mA per 6 DO 0 1 Full scale 10V to 10V 200 usec 4 differential points s w selectable 14 bit 1khz RC filter 2 differential points 12 bit Range 10 to 10V 5mA channel into a 2 KO load Page 42 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual emks rechnelpgvy Tor Praducbyiby 6 Model Code Description The Model code of MacroNode defines the features of the Unit for Hardware soft
37. r Manual Table 7 Digital Source Sink Select for Combo Bottom Connector Sink Source Select Sinking Input Sourcing Output Short Pin 18 to 37 Sourcing Input Sinking Output Short Pin 19 to 37 uil Note All Analog power comes from an internal power converter External pins for 15 volts should be used as reference only Supplies have limited power and should not be used to drive external loads 2 5 Digital Input Interface Example Digital I O can be configured as either sinking or sourcing Each input circuit includes an indicator LED in series with the detection opto coupler The opto coupler provides isolation between the input and the processing circuitry The inputs require 1 5 mA in order to turn on V Ref o Digital Input point Voc Figure 10 Sourcing Input Figure 11 Sinking Input Below is an example of how to use the digital input interface for both the sinking and sourcing hardware configurations The digital I O circuitry is powered from an external 24 volt power source via the I O connector 24VGND 24 VIN Q A DIO1 Q oJ DIO1 Q ol Figure 12 Sourcing Input Figure 13 Sinking Input 2 6 Digital Output Interface Example The individual outputs will support up to a 200 mA load per channel Each output is thermally protected against short circuiting 500 mA typically and includes under voltage protection The output Fault State is accessible through software Extern
38. stic mode Once in production mode the outputs can no longer be controlled via the webpage e Selecting the underlined items in the I O blocks chart will launch secondary I O pages The following figures show the digital and analog input statuses that are displayed after an underlined link is selected http 10 202 3 109 Block 1 Al Microsoft In E Block 1 Analogue Inputs Yoli Figure 21 Digital and Analog Input WebPages Page 22 of 44 MKS Instruments CIT Products 2011 All rights reserved Hu MacroNode UO User Manual e The digital and analog output WebPages provide basic control of the output points if the unit is in diagnostics mode The pull down menu allows the user to select the digital output state or to enter in a value for an analog output There is also a Blinking Output pull down menu that allows the user to put an output into a blinking or oscillating state CERTE Blink Output More v Gi Internet A http 10 202 3 109 Block 1 AO ALSS Block 1 Oscillate DLL Te Figure 22 Digital and Analog Output WebPages e Click on the link for the analog or digital output page Change the state of one of the outputs by selecting an option from the pull down menu and for the case of analog enter a number within the range of 10V to 10V If the output does not come on check the status and network LEDs on the front of the unit The module LED should be blinking amber and t
39. tions Criteria BUS Interface Front Panel Indicators Rotary Switches Power Specifications Criteria Input Isolation Power Specifications Criteria Input Isolation Over Current Protection Each Channel Total smks Specifications 4 H x 4 W x 1 5 D plus 0 7 per I O slot 37 pin male D sub 10 100 BaseT auto switched RJ45 with EMI filter LED indicators OR Fiber optic connector TXD RXD DB9 connector 600g 1 32 Ib Specifications 0 to 55 C 40 to 85 C o to 95 non condensing Specifications Ethernet Modbus TCP or Ethernet IP Network Status Module Status LINK 100MB IP address operating mode Specifications Powered from I O connector 24VDC 120 mA min DC DC Isolation Specifications Powered from I O connector 24VDC 120 mA min DC DC Isolation 2 5KVrms 1 5A 3 0A Input Output Specifications per Card Criteria DIDO Card Number of Digital I O Response Time Digital Input Sink Current sinking Logic Low Voltage Logic High Voltage Source Current sourcing Input Low Voltage Specifications 24 points input or output 50usec Max 2 18 mA at Vin 0V Min 4 1V to Max 30V Min OV to Max 3 6V Max 2 33 mA at Vin 24V Min OV to Max 6V Page 41 of 44 MKS Instruments CIT Products 2011 All rights reserved MacroNode UO User Manual Input High Voltage Digital Output Sink Current sinking Output OFF Voltage Output ON Voltage Source Current sourcing Current max Out
40. ual Tar Product The MacroNode IO supports the following MODBUS Functions 1 ReadDiscretelnputs As defined in the MODBUS Application Protocol Specification the device shall support reading one or more discrete inputs via the ReadDiscretelnputs function 2 ReadCoils For the purposes of this device a coil shall be synonymous with a Discrete Output As defined in the MODBUS Application Protocol Specification the device shall support reading one or more coils discrete outputs via the ReadCoils function WriteSingleCoil WriteMultipleCoils ReadHoldingRegisters As defined in the MODBUS Application Protocol Specification the device shall support reading one or more registers via the ReadHoldingRegisters function 6 WriteSingleRegister Is defined to access the HoldingRegisters d gt When accessing an IO point the following method is used DI address Reference of DI Number 1 For example for DI number 4 with a reference of 4 the DI address would be 3 Map this data in your Modbus TCP scanner I Note Do For more details on Modbus see http www modbus org WATCHDOG TIMER The Modbus TCP Interface includes a watchdog timer to monitor and react in the event that communications are not maintained between the client and the server within a programmable amount of time If communications exceed the timeout value programmed into the Watchdog Timeout Value Holding Register a timeout will occur and the Watchdog Timeout Cou
41. ware and other options Format MNOD Options E FE Slot Designations DIDO AIAO Al AIC COMB OPTIONS E DIDO DIDO DIDO DIDO FE AIAO AIAO AIAO AIAO Al Al Al Al AIC AIC AIC AIC COMB COMB COMB COMB Ethernet RJ45 Ethernet Fiberoptic 24 Channel Digital I O Card 16 Channel Analog In 8 Channel Analog Out 16 Analog Inputs Voltage Type Inputs 8 Analog Inputs Current Type Inputs Combination 16DIDO AAL DIE 2AO DIF LJ E 2 Lo Nul HA Ng ea 2 E Se S Hes cr a dk et Page 43 of 44 MKS Instruments CIT Products 2011 All rights reserved mks MacroNode UO User Manual WARRANTY MKS Instruments Inc MKS warrants that for one year from the date of shipment the equipment described above the equipment manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date related operations including without limitation accepting data entry sequencing sorting comparing and reporting regardless of the date the operation is performed or the date involved in the operation provided that if the equipment exchanges data or is otherwise used with equipment software or other products of others such products of others themselves correctly perform all date related operations and store and transmit dates and date related data in a format compatible with MKS equipment THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE RELATED OPERA
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