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1. E 8 H8 H H H E 8m 9 mm 8 8 H E Ed 8 H Hd d GB E E 8 El El m m 8 8 m 8 8 8 8 El El E E E E E Hl E E E E E Hl E E E E E Hl E E E E E E E E 6 H HH H 8 8 H 8 8 8 El E 9 8 E E E E E E Ed E E E E E E El E E E E E E E E E E Ed ud 8 8 8 H Hd d 8 GE E E E E E E E E E E Ed ud 8 8 8 E E E E Ed E E E E E Ed El El El El El El El El El E E El El El El El 109 45 50 00 0 00 50 00 109 45 Figure 79 Calibration Grid Display 5 If grid elements at the edges of the field are incomplete or missing due to the initial distortion start with a smaller field size and adjust for the full field after achieving a square field P0900 0157 Revision D Page 50 Cambridge Calibration Wizard Technology User Manual 6 some situations it is convenient to cut the media on which the pattern is marked for the measurement step If your laser is powerful enough you can do this using the Enable cutting feature of CalWizard 7 the box and define the cut dimensions Note that a notch is cut at the positive X dire
2. 64 CSI MM U 64 Save Correction table To 65 Guided Grid Measurement Window 2 0 0 0100101 65 Pincushion amp Barrel Distortions 2 2 0 000000000 sehen esee seien soie non 66 PROT T Y Y UU 67 Edit 67 67 ORI 68 Flar Bed Scanner CharacterzallOl eseese arrira E EEA 69 Select cl OF 018 VDE 69 dic d ERROR 69 Select measurement data file csse eene hehehe 70 SCOTI NM PE EL RM E MEM I EE PEE EU 70 70 12 91 RR 70 71 Correction Table Editor Graphic 5 72 Mirror induced Pincushion Distortion Visualization 73 Mirrors Pincushion Corrections Visualization 74 Configure Advanced usage 74 Ped
3. 18 File Save calibration 18 File Load calibration 19 System Type Selection amp Menu 3 Axis configuration 2 02220 000000000 19 Task Parameters 3 Axis nnns nhanh nsn aaron nna 19 Hoa iz cc 20 a E 20 ge 20 File Save calibration 21 CIS TS RI rM 21 a c 22 m m 22 4 FONU ccc 22 DU O 23 Focus Marking Cutting Parameters 000000000000000000000555500000 23 Create correction table button s O ED anis ness 24 luii IO PET 24 Correction Table Editor sana a aano 25 2 xis Design 1
4. Calibration grid definition Marking job Ideal command generation 4 Noelle Correction Current New compilation Model based Error model Correction Replace Correction current table Md extrapolation to Data analysis s 24 ELA Pim and selection Remove unless using guided T io Radial T id Offset and measurement Linearity and scale and pack orthogonality distortion distortion rotation X Servo and PUES Projection Galvo Mirror Lens S ee Calibration Measurement Measurement data generation Geometry Geometry Orthogonality Grid Artifact Tool Ideal vs Actual D A Y Servo and Galvo Modeled lt Physical plant error sources gt measurement errors Figure 1 Overall View of the Calibration Process While it is possible to create a correction table starting without any correction it is recommended to start the process by applying a synthesized correction a correction calculated based on the system s geometry For a 3D correction table the above process is used to define the X amp Y corrections while the initial calculated Z correction is adjusted by Flattening the Field ensuring consistent focus over the entire scan field The Calibration Wizard supports the following methods to acquire the measured coordinates Automatic analysis of a scanned grid image from a flat bed scanner Analysis of a grid
5. 61 Grid 65 EA GONE ee ee E m 66 Appendix A Flat Bed Scanner Characterization 69 Appendix B Correction Table Editor Graphic Display 72 aere ugs m 72 iz cele MT MET 72 Pala to Vow ci ERREUR 7 P0900 0157 Revision D Page 3 Cr Cambridge Calibration Wizard Technology User Manual Content 0 00 0000000000 esas ases 7 View 5 73 PIOUAD VIGW 73 FOL VW 74 Table PO CANN isa tcc aransmceuaesaene 76 Appendix C Calibration Wizard Menu Options 78 Table Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Figure 21 Figure 22 Figure 23 Figure 24 Figure 25 Figure 26 Figure 27 Figure 28 Figure 29 Figure 30 Figure 31 Figure 32 Figure 33 Fi
6. CHO Iq E Go GE UD OOOO Sooo GO HO RE DO 40 8 COO EO GO o Qt T E mU eo c GO QU GC CO ORG BO 2G 20 O Error radius j 2 mm Figure 122 Correction Table Editor Graphic Display Views Selection The editor s graphic display shows a visualization of the the correction table s contents The first two views are available for all configurations and the other three are used for 3 Axis systems only v Plat XY Plot Ideal locations adjusted locations galvos command limitsand lens field Plot 4D Default view Correction distortion vectors for each grid location 7 Axis Z Axis Correction values as a 3D surface New tip New tip Current Focal Plane corrections as a 3D surface Total tip Total tip Overall Focal Plane corrections as a 3D surface For XY Plot and Plot 4D a visualization of the entire correction table is not practical the information density is too high so a 17x17 grid of a sampled data subset is presented P0900 0157 Revision D Page 72 e Cambridge Calibration Wizard Technology User Manual Data to View Selection These selections are used to include exlude various information types and will change based on the view Content Selection The Show selector lets you switch between a representio
7. PS1 10 LINOS F160 Baseline Figure 37 Get user text 10 Now enter revision information if you wish or leave it blank and click OK Get user text 2 Figure 38 Enter a Revision P0900 0157 Revision D Page 28 Cambridge Calibration Wizard Technology User Manual 11 Next specify a path and file name and click OK Please enter a file name 2 Save in Ui Correction Files Date modified Type 7 Aerotech Conversion Testing 2 9 2012 11 50 AM File folder Calculated Correction Files 2 9 2012 11 24 AM File folder VL 3 Library 5 11 2012 12 08 PM File folder Desktop CO2 L00mm xml 6 21 2011 11 58 AM XML Docu atm CO2 200mm xml 6 21 2011 1 57 AM XML Docu P S2 14 100mm 2 CP 53p4 052 5 23 2011 3 14 PM XML Docu Libraries 52 14 Ln200 C02 CF449 xml 11 12 2010 5 04PM Docu ScanSysConf amp Lens Ring Database 6 14 2011 2 50 Shortcut Recent Places Computer Network 4 File name Save as type Custom Pattern xml Y Cancel Figure 39 Specify Path and File 12 Finally use File Quit to close the editor window You ll be asked to select if to use the new correction in the future Click OK accept to all Do you want to use the new calibration factors for futher marking operations Load table to controller Figure 40 Close the Edit
8. 15 Set System Configuration 2 Axis 0 0 110000 17 Set System Configuration 3 Axis Heads 19 Align Laser 3 Axis Heads MI ETT TE TOT 21 S l 23 Create Correction Table 2 AXIS oes i ett o Sees soU uS 24 Create Correction Table 3 Axis 29 Set Center Focus Offset 2 Axis 34 Set Center Focus Offset 3 Axis 4 9 35 Laser Galvo 37 e EASE DE 2 c 38 SEUNG APPICAUON Delay S E E EE TES 41 Adjust Focal Plane 3 Axis 46 quo MR 48 create Cara A ME 48 Generation of a Calibration Grid 1 49 Measurement of Ideal vs Actual 51 Analysis of a Grid Measurement 52 Adjust Correction TADIG ERE 54 Adjust Focal Plane Tip 3 Axis 9 57 is EUER NEUE 61 Automatic Measurement and
9. Q Pattern 7 5x5 Size mm y 5 Focus Start 7 12 Stop 7 12 Delta E 1 Edit table Patterning job control Tables jas iterations 2 1 Figure 70 Adjust Focal Plane View oimilarly to the Center Focus step the software uses the 3x3 or 5x5 Focusing Array but this time it is positioned not only at the center of the field but also along the edges and in the corners Figure 71 Adjust Focal Plane Pattern Once again the 3 axis DFM is moved before marking each of the grid s images in each of the locations The Z calibration factor for the DFM is adjusted to achieve a reasonably focused beam all over the field P0900 0157 Revision D Page 46 Calibration Wizard User Manual Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury 1 Click the Run button to get the pattern marked 2 Now click the Edit table button to open the c Correction Table Editor and then select Measure Collect focal plane data F koe Analyze scanned image Calibrate flat bed scanner Analyze flat bed scanner calibration image Guided grid measurement Collect Box Cross grid data Collect grid data into table 3 For each Focusing array location discern the offset value that results in a focused beam and enter it into the corresponding field in the window Figure 73 Focal Plane Data Entry Window 4 Check the checkbox at the bottom to en
10. 9 Analyze scanned image 4 Calibrate flat bed scanner Analyzeflat bed scanner calibration image 7 Guided grid measurement Collect Box Cross grid data Collect grid data into table Collect focal plane data Analyze correction table errors Figure 100 Automatic Scan amp Analyze Menu Option 2 Enter the file name you want to use This will serve as a prefix to various files the software will create during the operation Please enter a measurement file name prefix Figure 101 Get user data 3 Browse to the folder where you want the software to save image files Type in a sub folder name and click Save to create a new sub folder or click Current folder to save the file into the selected one P0900 0157 Revision D Page 62 Cambridge Calibration Wizard 7 Technology User Manual 4 Select the Scanner size and define the orientation of the scanned image on the flat bed document scanner Indicate orientation of the paper on the Mote the X axis marker r Select scanner Top view Select scanner type 2 Small 8 5 x 11 cancel Figure 102 Select Scanner Type and Field Orientation 5 Select the scanner you ll be using from the list of installed scanners Cr Select scanner Figure 103 Select the Scanner 6 An activity bar will be displayed while the scanner processes the item The image is scanned twice first a
11. 25 Edit Synthesize baseline 6 1011 2440000000000000500000055000000 26 New Correction 6 lt n 27 File Save Correction table To local 1 0 00000000000000050000 seen 28 TS 28 T 28 File Name 29 Close the Editor and Load the 6 10 201 000600600000000550000000000 29 CREATE COMECHON 120e DUTON MR MI 29 OTA E EE 30 Table VOW 30 P0900 0157 Revision D 4 G Cambridge Calibration Wizard Technology User Manual Figure 44 3 Design 31 Figure 45 Edit Synthesize baseline 5 2 2 60000000000000050000 32 Figure 46 Correction Table 32 Figure 47 File Save Correction table To local file eiiis 33 Figure 48 Description for the Correction 16 0 000000000000000
12. File Edit Measure Show Configure Operate Help 2 ES Figure 46 Correction Table Editor P0900 0157 Revision D Page 32 Cambridge Calibration Wizard 7 Technology User Manual 13 Now save the Correction Table 277 Edit Measure Show Configure Operate Help Import Export Quit Calibration factors 5334 Figure 47 File Save Correction table To local file 14 Enter a description for the correction table and click OK Get user text 12 30mm YAG 200mm Baseline Figure 48 Description for the Correction Table 15 Now enter revision information and click OK x Getusertext M Figure 49 Revision Information 16 Next specify a path and file name and ees file name Click OK Save in Correction Files ex Name Date modified Type Aerotech Conversion Testing 2 9 2012 11 50 AM File folder Calculated Correction Files 2 9 2012 11 24 AM File folder VL3 Library 5 11 2012 12 08 PM File folder CO2 100mm xml 6 27 2011 1153 AM XML Docu CO2 200mm xml 6 21 2011 11 57 AM XML Docu PS2 14 100mm 2 CP853p4 052 5 23 2011 3 14PM XML Docu PS2 14 Ln200 C02 CF449 xml 11 12 2010 5 04 PM XML Docu Recent Places ScanSysConf amp Lens Ring D
13. gt 100 Upper Right 100 1 Ideal 100 Center Right X 200 Lower Left r gt 100 Lower Right r gt 100 1 Center Lower Y gt 100 Lower Left X Figure 88 Box amp Cross Data Entry Window Note Do NOT change the Ideal X and Y values P0900 0157 Revision D Page 55 G Cambridge Calibration Wizard Technology User Manual 5 Before quitting the editor save the correction table by clicking OK in the Box amp Cross Data Entry Window 6 You will be prompted to save the measurement data Click OK in this dialog box Save this measurement data Figure 89 Save this measurement data 7 Select an existing pset file or enter a new one in which to save the measurement data Then click OK in this dialog box e Date modified Type items match your search 4 File name New Measurement Data Save as type Custom Pattem pset Cancel 2 Figure 90 Select existing or new pset file P0900 0157 Revision D Page 56 G Cambridge Calibration Wizard Tedmolgy 8 Ifthe whole pattern needs to be offset click the Edit boot offset button in the CTI Calibration Wizard to display the following dialog box Edit the boot offsets in the following Performance file dialog box and click the OK button GlobalConfigGeneric Boot time adjustments Figure 91 Boot Offsets 9 The Boot Offsets dialog box will be redisplayed showing the actual
14. 3 the Task parameters window you can select or set the following head related parameters for synthesizing a correction table Task Parameters Lens max mech angle deg Lens effective focal length mm Galvo max mech angle deg 160 Lens effective focal length mm 11 0 max mech angle deg Head parameters Laser type J Background laser modulation Frequency 5 KHz Duty cycle 0 Figure 13 Task Parameters 2 Axis configuration P0900 0157 Revision D Page 17 G Cambridge Calibration Wizard Technology User Manual 4 n addition the following laser related parameters can be set to inform the software what laser controls to display in subsequent screens and how to manage the laser when it is NOT lasing type Jj 20W Background laser modulation Laser type co Background laser modulation Waveform number Frequency 9 100 KHz Frequency 5 KHz Simmer power 96 50 Duty cycle 50 Duty cycle 9 0 Figure 14 Laser Settings Laser type IPG YLP IPG YLS IPG YLR SPI 12W SPI 20W Generic Waveform number For SPI laser types only Simmer power 96 For SPI laser types only Frequency kHz For Background modulation when laser is off Duty cycle For Background modulation when laser is off 5 At this time it is recommended that you verify adjust your laser properties through the Configure Laser Prope
15. Check to T d activate cutting mode at the end of the grid marking Page 48 6 Cambridge Calibration Wizard Technology User Manual As mentioned in the introduction the calibration process is made of three distinct parts 1 Generation of a Calibration Grid Artifact 2 Measurement of Ideal vs Actual coordinates 3 Analysis of measurement data amp generation of a correction table Generation of a Calibration Grid Artifact Adjusting the correction table requires comparison of a known pattern s coordinates with measurements of actual coordinates on a marked piece The Create calibration grid menu provides parameters to define a grid pattern Five grid types are available E E E E E E E E E E El 8 8 8 8 F8 8 8 F8 E E E E E E E E E E Hi 8 8 8 8 8 8 8 8 8 EB BE EB E E El E E El Hi 8 8 8 F8 8 F8 8 8 8 E E E E E E E E E E Hj 8 8 8 8 8 F8 8 8 8 E E E E E E E E E E Hi 8 8 8 8 8 8 8 8 8 E E E E E E E El E E Ej 8 F8 8 8 8 F8 8 8 F8 E E E E E E E E E E Hi 8 8 8 8 8 8 8 8 8 E E E E E E E E E E Hi 8 8 8 8 8 8 8 8 8 8 E E E E E E E E E E E E E E E E E E E E E E E E E H H H H Hi 8 8 8 B B B B E E E E E E E E E E EB d 0 8 d d 8 8 d d 8 E E E E E E E E E EB d d 8 d d 8 8 d d 8
16. b Start by setting the pattern size to a size similar to the job you want to run Set the speed to be 1096 2096 higher than the speed you expect to use for the application as higher speed will exaggerate deviations you may not have noticed before d Observe points G and H of the pattern as these are locations where separate marks should touch each other and will often show small timing issues not noticed in other places P0900 0157 Revision D Page 43 Cr Cambridge Calibration Wizard Technology User Manual Laser On Delay Laser On Delay Laser Off Laser Off Delay Too Short Too Long Doray Too Long Figure 65 Laser Delays Fine Adjustment e To adjust reduce the value of the relevant delay until a defect is visible then increase it slightly to correct the defect Do not increase the value too much as no defect will be noticeable but the mirror will dwell for too long a time increasing the job execution time for no good reason f Ignore points F and as they may be affected by the Polygon delay as well as the Mark Delay Mark Delay Polygon Delay Polygon Delay Too Short Too Short amp Mark Delay Too Short Figure 66 Polygon Delay and Mark Delay Are Too Short 4 Make fine adjustments of application delays a Now that the Laser delays are set properly let s optimize the Application delays b Set the speed to what you intend to use for the application To maintain the mark s quality Mark delay Jump delay and Poly
17. ideal position These offsets are measured in pixel units but are easily converted into English or Metric units based on the scanning resolution of the equipment being used Calibration grid artifact E E E ET ET 1116 Params Image While more fiducials Set scanner parameters and scanimage Invoke process The advantage of such a system is that it uses readily available low cost digital image scanning equipment as a metrology tool instead of low accuracy and error prone human measurement or high accuracy and expensive metrology equipment that uses linear X Y stages coupled with optical microscopes image capture and vision processing software Find grid center and calculate nominal fiducial spacing Walk grid to find corner fiducial Find Rura Centar didi a E Calculate offset from ideal fiducial location 9 Record ideal and actual coordinate Find grid borders and orientation Fiducial size and spacing Number af rows and callumns X Y dX dY Point set data Figure 99 Scanner Based Metrology Data Flow Today s document scanning equipment is fabricated using high precision semiconductor process equipment and large area lithography methods that ensure good dimensional tolerances For applications that require the utmost accuracy the flat bed document scanner s inaccuracies can be characterized and eliminated from the measurements See Appendix A Flat Bed Scanner Chara
18. the following confirmation pop up is displayed This action will create an empty correction table You will lose any in process modifications you may have done that were not saved Do you want to continue Continue Cancel Figure 31 Confirmation Pop up P0900 0157 Revision D Page 24 Cambridge Calibration Wizard Tedmolgy 3 Once you press Continue in the Confirmation Pop up the correction table editor is displayed 11 0 Lens max mech angle deg 160 Lens effective focal length mm 11 0 max mech angle deg RCE ORG RO DO e QUO Qo OO qu odo 240 BORO ORG OOOO0OQOOOO0Q0Q mU OO 0G GO Neu OI ti OOO00O0Qo00o00000oQ oO 000147 09 OU o O9 1 OR 0 RCO EO ao Figure 32 Correction Table Editor View 4 Use the selectable tabs at the upper left region of the editor to define your table You can edit the parameters of the head to reflect your actual situation 11 0 Lens max mech angle deg 160 Lens effective focal length mm 11 0 Galvo max mech angle deg Figure 33 2 Axis Design Parameters P0900 0157 Revision D Page 25 Cambridge Calibration Wizard Technology User Manual 5 he Projection parameters in the Design tab a
19. to the middle of the segment Reduce the Jump delay value until a defect can be seen and then increase it slightly to correct the defect Once again avoid increasing the value too much to prevent the mirror from dwelling for too long a time increasing the job execution time for no good reason a a Jump Delay Jump Delay Jump Delay Set properly Too Short Set properly Figure 69 Jump Delay Fine Adjustment 5 At this point Laser delays should all be set properly and Application delays will be proper for a given type of job For applications with very stringent quality requirements final adjustments should be done with the actual job you want to mark Keep in mind that some settings are interrelated so changes to one delay can affect others If things to go wrong repeate the fine adjustments step to correct them P0900 0157 Revision D Page 45 Cambridge Calibration Wizard Technology User Manual To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Adjust Focal Plane 3 Axis Heads With good marking parameters we can now adjust the focal plane in a 3 Axis system to ensure a focused beam over the entire field Select 3 axis calibration step Focal plane parameters X Y Pattern 7 3x3 Size mm 7 220 2 Keep size and offset Offset mm 7 0
20. 00 20 00 4000 5740 Message Paring cnm Window Tables 1 1 43 iterations 2 1 1 Boor T Interactive control e Cambridge Pointer GD Technology Figure 2 Calibration Wizard main interface The use of the Controller Selection Operational Menu Tasks Parameters and Graphic Window is described later in the manual The use of Patterning Job Control Interactive Control and the Message Window is as follows e Patterning Job Control used to select the following Tables 1 amp 3 Correction tables for Main Laser 1 and Main Laser 2 respectively 2 amp 4 Correction tables for Guide Laser 1 and Guide Laser 2 respectively Iterations How many times the job will be executed Run Instructs the connected controller to execute the current job Abort Instructs the connected controller to abort execution of the current job e Interactive control window used to do the following Pointer On Off Activates deactivates the guide laser Go To XYZ Moves the galvos to point at the required XYZ coordinate within the scanner s field Messages Window used to display event information error messages and other information generated during the controller s operation P0900 0157 Revision D Page 8 Cambridge Calibration Wizard Tedmolgy Correction Table Editor Geometric Design Calibration Contr
21. Application delays Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury 1 Click the Run button to mark the pattern 2 Make coarse adjustments of application delays a Observing the squares ABCDA2 amp look for quality issues in the B C amp D corners If b you initially set this delay to zero it is likely to be too short as shown in the image on the left B Polygon Delay Polygon Delay Too Short Too Lona Figure 60 Polygon Delay Defects If the delay is set too short the three corners will be rounded because the mirrors will not have enough time to reach those points If the delay is set too long there will be burned in spots at three corners as the mirrors dwell on these points for too long The fourth is affected by the Jump delay at the start and the Mark delay at the end and will be adjusted next It is now time to adjust the Mark delay the delay at the end of a mark sequance before the laser is turned off for a jump The effects of this delay are easily observed at point J of the V Test pattern If you initially set this delay to zero it is likely to be too short as shown in the image on the left Mark Delay Mark Delay Too Short Too Long Figure 61 Mark Delay Defects If the Mark delay is too short the line at the end of the V will be bent in in the direction of the jump that follows if the Mark delay is too long the end of the V might be burned in With
22. Doc Rev D May 2014 Cambridge Technology Inc reserves the right to change the information in this document without notice The information contained in this document is the sole property of Cambridge Technology Inc The disclosure of this information does not constitute the release of any proprietary rights therein Permission to reproduce this information or the products disclosed herein must be obtained in writing from Cambridge Technology Inc P0900 0157 Revision D Page 2 Cr Cambridge Calibration Wizard Technology User Manual Table of Contents Introduction nnnm nnn nnmnnn nnmnnn nnmnnn 7 EE pE E E E E o Lm RS 8 MATA TO O EA E AES 8 EONI E E E AE 9 10 Eo SI GUUS 10 Correction Table 10 Using the Calibration Wizard 11 To create new correction 11 To adjust a previously saved correction 11 2 AxIS Head Procedure QVOIVIOW RYE FRU ER FEL 13 3 Axis Head Procedure cccccccsesccecceeceeceeeceeceeececseeeceeseaeeeessuseeesseecessegeceesaueeesseecessaaeeeeesaaes 14 Procese U 15 OAC CMON NET E
23. PermStoragePath Disk set id XYCalFactor 570 898600 lt set TORNEO set id ZCalFactor gt 500 000100 lt set gt 00000186 set id VelocityComp gt 0 lt set gt XPower YPower J interlock 20110 JobMarker 0 JobDataCntr 0 EC1000 Broadcast Information nw P0900 0157 Revision D FreeUSBStorage 0 00 50 c2 4f a5 a1 2552552550 Met amp ssign 1 192 168 100 10 192 168 100 1 5 1000 EC1000 lt set id MarkSpeed gt 10 11 41 9 2 lt set gt lt set id JumpSpeed gt 10 11 41 972 lt set gt set id EnableLaser gt TRUE set set id HeadParams 0 000000 0 000000 set gt set id FieldOffset 0 0 0 set set id Transform 1 0 0 0 0 0 1 0 set set id FieldOrientation 20 lt Segment gt Segment id Params Default deferred TRUE gt set id LaserPower 102 set Page 80
24. Power 9 10 95 IPG YLP Generic IPG YLS amp YLR SPI 12W amp 20W Figure 25 Laser Params 2 Set Duration to the number of seconds you want to laser before automatically turning off 3 Entering will turn the laser ON indefinitely 4 Click the Go To XYZ button and enter 0 0 0 aim the mirrors at the center of the field Figure 26 Go to XYZ Position Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury 5 After parameters are set as needed press the Activate laser button to fire the laser 6 A confirmation pop up will appear Pressing OK will fire the laser for the set duration or until a manual OFF command is given whichever comes first ES CAUTION Laser emission will begin if you continue nmi Figure 27 Confirmation Pop up P0900 0157 Revision D Page 22 Cambridge Calibration Wizard Technology User Manual 7 Toturn off the laser flashing OFF button or click any key on the keyboard Laser ON Warning L3 DFM Position Control Figure 28 The Flashing OFF Button 8 The control below the button DFM Position is used to set coarse focus for heads with variable field adjustment To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Set Focus Marking Params CalWizard supports the following laser settings for different modes of operation e Marking Medium power level t
25. activity bar will be displayed while the scanner processes the grid Note The grid is processed twice the first time as a low resolution image and the second time as the full resolution image Figure 119 Select scanner 8 Now the software will start the analysis by opening the image file Opening Image Figure 120 Select scanner P0900 0157 Revision D Page 70 Cr Cambridge Calibration Wizard Technology User Manual 9 small window will display the sub region of the image being analyszed including highlights of identified features while a progress message will show progress status Curent Objet Traversing Grid 47 of 121 Figure 121 Traversing Grid P0900 0157 Revision D Page 71 G Cambridge Calibration Wizard 8 Technology User Manual Appendix B Correction Table Editor Graphic Display Graphic Display Controls The editor s graphic display provides the following controls Active Graphic ee Table Selection Measurement data Min Data to Max View Mean Selection SDev 0 0 0 0 Show table data Model accuracy 0 Min 0 Max 0 0 SDev Show modeled data Magnification 2 Gc Ip d GHI COE EO 00 D cou Gu LO 0 10 rq XR OU m E QUID US IE DN DI T D m C S Gra OUO Od GUI Iq X RED
26. center of the field e Identify the offset step that achieves best focus and set it in Set Center Focus Offset the Correction Table Editor launched with the Edit Table button Set optimum laser and scanner delays as well as Velocity compensation if used Adjust Laser Galvo Timing e point you may want to save the setup parameters file Save calibration configuration Define the grid s type sizes and spacing Mark the grid Measure grid coordinates Analyze the measurement results Close the correction table editor and select yes to apply the new corrections Create Calibration Grid e Repeat the marking amp analysis process until the required accuracy is achieved Save the correction data to an xml file Adjust Correction Table Optional End P0900 0157 Revision D Page 13 Cambridge Calibration Wizard Technology User Manual 3 Axis Head Procedure Overview e Select head type from list or create a custom one by entering the Controller Connection head s parameters as required Set System Configuration e Set laser information along with the background modulation frequency and duty cycle e Activate the Calibration Wizard Connect to an EC1000 or SM1000 controller e Check the Three axis system checkbox Set relevant laser parameters for alignment can vary based laser type selection Align Laser Use the manual Activate laser control to align or verify the alignment o
27. data P0900 0157 Revision D Page 52 Cambridge Technology Calibration Wizard User Manual 3 Below are examples for the two data formats one using the Tab separator and the other the semicolon separator dat Format tab separator Y Ideal X Actual 128 0 127 6778 gt 102 4 127 8725 gt 6 8 127 9894 51 2 gt 128 0576 gt 25 6 gt 128 0836 gt 0 0 gt 128 0820 gt 25 6 128 0528 gt 51 2 127 9810 gt 76 8 gt 127 8751 gt 102 4 127 7240 gt 128 0 127 4911 gt 128 0 102 2990 102 4 102 4243 gt 6 8 102 5034 51 2 1025497 Y Actual 128 011 102 5328 6 9497 51 3114 25 6478 0 0108 25 6455 51 2527 76 8149 102 3285 127 7597 127 8040 102 3363 6 7 153 51 1900 pset Format semicolon separator X ldeal Y Ideal X Delta Y Delta 30 000000 30 000000 0 298739 0 583034 25 000000 30 000000 0 325006 0 518194 20 000000 30 000000 0 358461 0 454425 15 000000 30 000000 0 383666 0 390759 10 000000 30 000000 0 423006 0 31 1030 5 000000 30 000000 0 423832 0 222179 0 000000 30 000000 0 457070 0 151964 5 000000 30 000000 0 492804 0 087841 10 000000 30 000000 0 529238 0 016025 15 000000 30 000000 0 535826 0 059729 20 000000 30 000000 0 531174 0 149579 25 000000 30 000000 0 563012 0 227755 30 000000 30 000000 0 623177 0 302295 30 000000 25 000000 0 521047 0 373780 25 000000 25 000000 0 466701 0 30
28. discussion a reference to segment EF2 relates to the marked vector that is the left side of the first V in the middle 279 pattern Following the same guidelines square refers to the start point path and end point of the leftmost square drawn from point A to point B to Point C to point D and Back to Point A in Vtest1 lt may help to print Figure 58 V Test 3 Pattern Array on page 41 and Figure 59 below for reference in the following few pages 1 Jump to A1 11 Jump to point A2 21 Jump to point A3 2 Mark square ABCDA1 12 Mark square ABCDA2 22 Mark square 3 Jump to point E1 13 Jump to point E1 23 Jump to point E3 4 Mark V EFG1 14 Mark V EFG2 24 Mark V EFG3 5 Jump to point H1 15 Jump to point H2 25 Jump to point H3 6 Mark V HIJ1 16 Mark V HIJ2 26 Mark V HIJ3 7 Jump to point K1 17 Jump to point K2 27 Jump to point 8 Mark segment KF1 18 Mark segment KF2 28 Mark segment KF3 9 Jump to L1 19 Jump to L2 29 Jump to L3 10 Mark segment 111 20 Mark segment LI2 30 Mark segment Figure 59 V Test Pattern Sequence P0900 0157 Revision D Page 41 Cambridge Calibration Wizard 7 Technology User Manual Adjust Pattern height and number for the V Test If you want to use the default values change one and then change back to get the pattern displayed on the screen With the Laser delays set with the results of our previous test we ll start to adjust the
29. images is marked Alternately you can set the start offset and step size and the stop offset will be calculated Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury 3 Click the Run button and wait for the whole pattern to be marked 4 Observe the resulting mark With large enough steps the mark quality will vary as the offset of the DFM is changed during marking 5 n a poorly focused system the mark quality will be poor on one side of the array and better on the opposite side see image on next page 6 In a well focused system the mark quality will start very poor improve towards the center of the array and then deteriorate again System out of focus System in focus P0900 0157 Revision D Page 36 Cambridge Calibration Wizard Technology User Manual 7 Open the Correction Table Editor by clicking the Edit table button 8 ldentify the offset value that resulted with the best focused beam based on the individual grids marked value and subtract it from the current Z Offset V ve som vas open trame 200 Z Offset value Figure 54 Z Offset Value 9 Repeat the process until you achieve a good focused image at the central grid 0 0 offset Reduce the start offset and step size to get better granularity of the offset value To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Adjust Laser Galvo T
30. measurement file provided by the user e Manual guided grid adjustments e Basic Box corrections Each of the above methods differs in required effort and achievable accuracy Refer to Calibration Methods on page 61 to select the method that best suits your needs P0900 0157 Revision D Page 7 Cambridge Q Technology Calibration Wizard User Manual Interface Identification Interaction with the Calibration Wizard is done through the Main Window and the Correction Table Editor Main Window Controller Selection Task Parameters Operational Menu Patterning Job Control Interactive Control CTI Calibration Wizard m File Configure Show Help EC1000 Units Double click to select Units Calibration factors bits mm Graphic 5 1000 EC1000 EC1000 11451146 192 168 100 10 z a 5 1000 EC1000 EC1000 11451146 192 168 100 1 al unu 7 Show J gj 570 9 Y 5 570 9 22 500 57 40 Window 50 00 1 4000 A d EH E E E E E El 30 00 E Selected EC1000 SM1000 EC1000 EC1000 11451146 192 168 100 10 Three axis systemes 20 00 Task Parameters Select 2 axis calibration step 10 00 0 00 11 0 Lens max mech angle deg 160 Lens effective focal length mm m 11 0 max mech angle deg 20 00 30 00 Head parameters 40 00 co 50 00 Frequency J 5 KHz A 57 40 40 00 2000 0
31. mm af Xto Y mirror dist mm 38 Y mirror to ref surface dist mm 11 0 X mech half angle deg 7 k 9 i T 11 0 Y galvo mech half angle deg Figure 20 Head Parameters 5 n addition the following laser related parameters can be set to inform the software what laser controls to display in subsequent screens and how to manage the laser when it is NOT lasing Laser type spi2pyy Background laser modulation Laser type j coz Background laser modulation ry E Waveform number 7 27 Frequency y 100 KHz Frequency 9 5 KHz Simmer power 96 2 50 Duty cycle 7 50 Duty cycle 1 0 Figure 21 Laser Settings IPG YLP IPG YLS IPG YLR SPI 12W SPI 20W Generic For SPI laser types only For SPI laser types only For Background modulation when laser is off For Background modulation when laser is off Laser type Waveform number Simmer power 96 Frequency kHz Duty cycle 6 Atthis time it is recommended that you verify adjust your laser properties through the Configure Laser Properties menu option Edit laser configuration V Activate Laser Help 7 Active high LASERMOD 1 polarity 5 Active high LASERMOD2 polarity Job AML Style 9 J Active high LASERFPK polarity Laser properties Axis DAC J Active high LASERENABLE polarity is DAC range 9
32. models based on bi linear interpolation are used to populate table entries where measurements are not directly available This is possible as the errors encountered in such a steering system are smoothly varying functions Measurement results are folded back into the table to create more optimized values The final accuracy of the steering system is a direct function of the number of points that are measured and how accurate the measurements are Correction Table Utilization The controller can use up to four different correction tables in pairs of two There are two tables in use at all times Tables 1 amp 2 are used with the analog outputs and the XY2 100e output while tables 3 amp 4 are used with the standard XY2 100 output Typically tables 1 amp 3 are used to correct for distortions when using the marking laser while Tables 2 amp 4 are used when a pointer laser is active In cases where the controller is driving two scan heads it is possible to specify data for tables 3 amp 4 independent of the data in tables 1 amp 2 P0900 0157 Revision D Page 10 Cr Cambridge Calibration Wizard Technology User Manual Using the Calibration Wizard The Calibration Wizard can be used for three different activities 1 Creation of a new correction table 2 Full adjustment of an existing correction table using a grid 3 Global adjustment of an existing correction table using a simple Box amp Cross pattern The following pages pro
33. 00000 00090 0 oOo o 0 0 0000000000090 0 ooo 00 000 0000000090 0 oOo o 00 0000 000090 0009 06 oo 00000 0000000 9 oooooooooooooooooco oOo o 0 00 00000 009000090 06 oOo o 00 0000 000090 oOo o 00 000 0000090 00090 06 oOo o0 00000000090 00090 06 oOo oOo 0 00000000090 0009006 Figure 43 Correction Table Editor View P0900 0157 Revision D Page 30 Cr Cambridge Calibration Wizard Technology User Manual 4 For 3 axis systems a correction table is calculated based on the pre set or custom head type that was set in the Set system configuration ation Params Target field size 200 mm L2 30mm Open Frame Z Offset A 0 bits 0 Margin mm Plus 36 3 Minus 2 9 Indep XY cal factors DFM Pos J mm Figure 44 3 Axis Design Parameters 5 Setthe Working distance field to be 595 larger than the actual field you intend to use This will ensure that the features of the calibration grid used later will fit within the useable field 6 Once the desired Working distance field size is defined the software will calculate the theoretical working distance required The default is for X amp Y calibration factors to be set to the same value to produce a square imaging field but they can be set independently to allow for rectangular fields limited by the Y field dimension 7 2 Offset is used for electrical fine tuning of the nominal pos
34. 0000000005555550000 50 Figure 80 Check the Box and Define the Cut Dimensions 51 Figure 81 File Import Measurement data from CTI point set 52 Figure 82 Import grid error data isses esses 52 Figure 83 User Measurement File Samples 10112 0000000000000005000000 53 Figure 84 Measurement Data and Model Accuracy 53 Figure 85 Adjust correction table 54 gU Esci se deci i 54 Figure 87 Measure Collect Box Cross grid data 0 0 100000000000000000 55 Figure 88 Box amp Cross Data Entry 2 2 2 000200000000000000005000000000 00 nhanh nnns nna a nnns 55 Figure 89 Save this measurement data isses sessi sese 56 Figure 90 Select an existing or new pset file 2 2 2 22 0000000000000000050000 0 56 Figure 91 Boot OT c P 57 Figure 92 Adjust focal plane tip View nnne nnne 57 Figure 93 Adjust focal plane 58 Figure 94 Corrections Constraints 002 2 0 00 0000000
35. 00000005050 000 33 Figure 49 Revision Information 33 Figure 50 Specify a Path and File Name 33 Figure 51 Close the Editor and Load the 34 Figure 52 Set Center Focus Offset 34 Figure 53 Set Center Focus Offset 35 LOA VAO 37 Figure 55 Set Laser Galvo Timing 37 Figure 56 Discovery Raster Pattern 38 Figure 57 Discovery Raster Pattern Setup 39 58 Vel CSE All AY E 41 Figure 59 V Test Pattern Sequence saa sara 41 Figure 60 Polygon Delay Defects 42 Figure 61 Mark Delay Defects Mrd ad cV o OA EE d Bu LER E E 42 Figure 62 Mark Delay sans assa asas sss saa asas nasa aa aan 43 Figure 63 Jump Delay DeteCis 43 Figure 64 Jump Delay Adjustment aa ass
36. 01000000 nns nnnaa arn n nnns 58 Figure 95 Auto scaling Message 58 Figure 96 Auto scaling Magnification Message 59 Figure 97 Measure Collect focal plane data 000 00000000000000000000000555050 0000 59 Figure 98 Focal Plane Tip Data Entry 22 2 2 640000000000000000500000 e enarrare 60 Figure 99 Scanner Based Metrology Data 61 Figure 100 Automatic Scan amp Analyze Menu 62 P0900 0157 Revision D G Cambridge 7 Technology Figure 101 Figure 102 Figure 103 Figure 104 Figure 105 Figure 106 Figure 107 Figure 108 Figure 109 Figure 110 Figure 111 Figure 112 Figure 113 Figure 114 Figure 115 Figure 116 Figure 117 Figure 118 Figure 119 Figure 120 Figure 121 Figure 122 Figure 123 Figure 124 Figure 125 Figure 126 Figure 127 Figure 128 Figure 129 Figure 130 Figure 131 Calibration Wizard User Manual Gel User 62 Select Scanner Type and Field 0022 00000100000000000050500000 63 Select ihe Scanner 63 Scanning Status WINKOW scccccccccscnsseeeesecccssesssuseeeeceesesasseesseeeeesesssaeeeeeecessssasaeeseceessssssaenseess 63 Opening the Image File
37. 0140 X Delta X Actual X Ideal Y Delta Y Actual Y Ideal Figure 83 User Measurement File Samples 4 Regardless of the method used to calculate the correction table the editor DOES NOT includes rotation and offset corrections in the table data 5 Measurement data statistics represent the errors in the actual raw data with offset and rotation removed Model accuracy statistics represent how well the mathematical models are predicting the actual measurements i e the difference between the actual measurements and the modeled measurements at each location Min and Max represent the worst case errors in the field Mean is the average error and SDev is the standard deviation Measurement data 6 Save the adjusted correction table before you quit the editor 001 Min 0 91 0 34 Mean 0 26 SDev Show table data Model accuracy 0 Min 0 05 Max 0 02 0 04 SDev Show modeled data Figure 84 Measurement Data and Model Accuracy To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview P0900 0157 Revision D Page 53 Cambridge Calibration Wizard Technology User Manual Adjust Correction Table In some situations an existing correction table requires a global adjustment for scaling or trapezoid to address system to system variations or mechanical misali
38. 2 Click the Run button to mark the grid 3 Adjust the work distance and repeat until you get a well focused mark To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview Set Center Focus Offset 3 Axis Heads Selected EC1000 5 1000 1000 1000 1 1451 145192 1665 100 10 bration step X Y Pattern 1x1 size mm 220 220 Keep size and offset Offset mm 2 0 Cell Pattern Size mm gt Focus Start 12 Stop 12 Patterning job control mee 1 Figure 53 Set Center Focus Offset View In this step the system is adjusted to achieve a focused beam at the center of the field P0900 0157 Revision D Page 35 Cambridge Calibration Wizard Technology User Manual Coarse adjustment of the nominal focal length is done by changing the DFM module s distance to the XY block Position the DFM module so you get a mark at the center of the field regardless of its quality Fine adjustment of the nominal focal length is done by updating the Z Axis offset value 1 Forthis step of the process leave the Field portion without change and set the Cell values for a 5x5 Focusing Array as shown on the right 2 hen set the Focus portion values to define the start offset and stop offset The software will automatically calculate the step size that the DFM is moved before each of the
39. 4 52221 2222 90 0 o 0000000000000 55050 C 00000000000005005 G00000000000000050 O00000000000005000505 o00000000000000500529 co0000000000500707 ccoooooooooocooo00 une ra mes ooooooootot SINUS Figure 130 Lens Barrel Corrections Visualization The combined effect of galvo mirrors and lens distortions will result in the following correction table 00 09 9 0 09 9 VUE p o o Q 20 9 o6 o o 0 0 Oo o o 0 20 0 0 0 0 0 0 0 0 90 DD ODD 5 6 6 6 o o o o 6 6 OO OOO 0 0 707070 0 0 6 07 60 D 07076 76 o0 o 0 6 76 6 9o e o bee ee Figure 131 Combined Pincushion amp Barrel Corrections Visualization O G 9 8 A 09 c o o Core ea c o OS SOG oc 6 9 9 9 9 9 P0900 0157 Revision D Page 77 Cambridge Q Technology Calibration Wizard User Manual Appendix C Calibration Wizard Menu Options File Configure Show Help EC1000 Units Double click to select 5M1000 EC1000 EC1000 11451146 2192 168 100 10 CTI
40. 4 0 reg14 lt 015 gt 0 lt 15 gt 16 gt 20753 16 gt reg1720z reg17 8418 gt 0 418 gt reg19265521 reg19 JobTimer gt 0 lt JobTimer gt z XVectCmd s XVectCmd zYVectCmd 0 Y VectCmd AuxiO Anal xFFFFe AuxiO 1 gt AuxiO Ana2 xFFFFz AuxlQO AuxiO Din20xFFFF e AuxiO Din amp uxiO DOut x z A amp uxiO DOut Data reg31 305419896 reg31 2 gt 0 2 gt lt 433 gt 444 lt 433 gt _ reg34 2816 reg34 arene fen wT Es Raw mode Auto refresh P0900 0157 Revision D Page 79 YActPos 27 XTemp J YTemp J ContiTemp 55 XStatus YStatus ObExtVer FPGAFirmVer EC1000 11451145 2 0 2 2 8 0 21980 280140270 StateCode 1 LastError 0 Calibration Wizard User Manual Data type JobData rev 2 0 gt Sequence lt DeleteAllSegments DeleteAllsegments lt Sequence gt lt Data gt Data type JobData rev 2 0 gt Segment id deferred True gt Beginlob lt BeginJob gt set id LaserModeConfig 2 0x0 set lt set idz GalvoDACConfig gt 0 0 lt lt gt set ActrveCorrectionTable gt 1 lt set gt lt set id XV 2AddressMode gt 0 lt set gt lt set id RTCCompatibility gt FALSE lt set FreeTempStorage set id Units gt 1 lt set gt
41. Calibration Wizard Configure Show Help Save calibration configuration eee to select Job to HPGL Quit Load calibration configuration Edit laser confiquration Activate Laser Active high LASERON T polarity Active high LASERON polarity Internal Laser mod sync Source Active high LASERMOD1 polarity Active high LASERMOD2 polarity Active high LASERFPK polarity Active high LASERENABLE polarity Active high LASERPWRDOUT polarity Laser power mode LASERON Config Laser power port LASERON 1 config Laser mod type P0900 0157 Revision D CTI Calibration Wizard File Configure Help Register data Broadcast data CTI Calibration Wizard Job XML 92 168 100 10 File Show Help Job XML Style 7 1 Rev 2 x lt Automatic Laser properties Axis DAC range 3D Compensation Use 16 bit addressing RTC compatibility mode Edit axis DAC range BM X amp voltage range rz 25V Z voltage range lt Edit 3D compensation params Enable 3D compensation J 0 Y mirror to ref surface 2 0 Ref surface to work surface mm 0 X Y mirror distance mm amend Page 78 G Cambridge Calibration Wizard Technology User Manual zATDACS sATDAC zAPSDACSOSAZDAC xiregd reg102280140220 reg10 reg1120z reg112 912 gt 9001 12 gt reg13 0 reg13 _ reg1
42. Compensation mode to None even if you intend to use it d Click on the Edit button to set up a Discovery Raster pattern Edit laser timing pattern parameters 2 100 Center Pipeline Delay usec Laser Delay Delta usec 7 50 Pipeline Delay Delta usec Humber Laser Off Delay Steps 7 5 Humber Pipeline Delay Steps Pattern Size X mm 3 Pattern Size Y mm r Pattern Orientation degrees 7 Flyback Pattern Type Figure 57 Discovery Raster Pattern Setup 2 The array is defined using the following parameters as shown in Figure 57 Center value for each delay use 700 for 3 Axis heads and 100 for 2 Axis heads e Delta value between columns rows Start with 50 and adjust as needed e Number of columns rows e Width and length of each pattern in the array Angular orientation of the array Setthe pattern type to flyback for this first mark Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury Page 39 P0900 0157 Revision D Cambridge Calibration Wizard 4 Once the pattern is marked examine across the columns left to right looking at the left edge to find the best Pipeline Delay value i e the one where the horizontal lines meet the left vertical line but are not over burnt Over burned Too short Not meeting Too Just right 5 Inthe best Pipeline Delay column examine from bottom to top the right edge looking where the corner is
43. Cr Cambridg e Calibration Wizard Technology User Manual Table Auto Scaling Unlike the pincushion distortion induced by the galvo mirror configuration the Lens induced distortions are radial zero in the center of the field and increasing in magnitude the further you move from the center in all directions An uncorrected view of the distortions is shown below LI LLL LL LL LL LUE Figure 128 Lens Barrel Distortion Visualization ooobbbo5ooo0oooco cdccoo oooo0o0oooooooooccccscsscsos gt 5 6 lt o00000000000000 2 0000000000000000 6520c 006668 OOO 2 99990 Soo peppeeoooceceeqaqaeaoo As a result correction values in the table might require galvo commands that exceed the 16 bit range used by the controller In the above illustration the vectors at the perimeter of the table are pointing away from the circles at the edge of the view which
44. E E E E E E E E E E EB d d 8 d d 8 8 8 E E E E E E E E E E EB d d d d 8 8 d 8 E E E E E E E E E E EB d d 8 d d 8 8 8 E E E E E E E E E E Ed d d d d 8 8 d 8 8 E E E E E E E E E E EB d d 8 d d 8 d 8 E E E E E E E E E E EB d d 8 d d 8 8 d 8 8 E E E E E E E E E E Ed d d 8 d d 8 8 d d 8 E E E E E E E E E E Ed d 8 d d 8 Grid with Box and Cross Grid with Lines Grid with Box only Figure 76 Calibration Grid Types 00000000000000000000 00000000000000000000 Grid with Dots Grid with Circles Figure 77 Calibration Grid Types cont 1 The preferred type is the Line as it results in
45. Edit PAGEMA Show Configure Operate Help Automatic scan and analyze Fi Analyze scanned image Calibrate flat bed scanner Analyze flat bed scanner calibration image Collect Box Cross grid data Collect grid data into table S amp yr 1 Current point index Collect focal plane data Focal offset mm Analyze correction table errors X amp Y represent directions in ED the galvo coordinate system These might differ from what your machine is using Figure 108 Guided Grid Measurement Window 2 Use the Focal offset control to focus your guide laser on the target This is required to compensate for the difference in wavelength from the main laser This adjustment will NOT affect the Z offset value that was set previously P0900 0157 Revision D Page 65 Cr Cambridge Calibration Wizard Technology User Manual 3 Define the grid you want to use through the Grid size Points along axis amp Spacing controls note that they are inter related Define the nudge size and scale and then click the Start button in middle of the arrows 4 The software will move the guide laser to the first point of the grid Use the arrows to nudge it to the required position on the target Change nudge size and scale as needed 5 Once in position click the Accept button to add this correction to the table in the computer s
46. G Cambridge Calibration Wizard Technology User Manual 7 Cambridge Technology User Manual Calibration Wizard zeoe RR File Configure Show Help EC1000 Units Double click to select Unts mm 5 1000 EC1000 EC1000 11451146 192 168 100 10 570 9 Y 570 9 7 500 57 40 H B EH HA A BJ GH H HA A H B A H a H AA A E B A H LH H HA A Selected EC1000 5 1000 EC1000 EC1000 11451146 192 168 100 10 Task Parameters Three axis system Select 2 axis calibration step HH A H A Bl B E GHA A H B A HH A H B A HH A 11 0 Lens max mech angle deg E 9 E 9 E 160 Lens effective focal length mm 9 9 11 0 Galvo max mech angle deg Head parameters H H H E A H H H GH E EH E A E E A H E E E El A H H H E A Laser type CO2 Background laser modulation Frequency 2 5 KHz Duty cycle J 0 Patterning job control Messa ens 7 Interactive control ane on gt P0900 0157 Revision D Page 1 Cr Cambridge Calibration Wizard Technology User Manual Cambridge Technology 125 Middlesex Turnpike Bedford MA USA 01730 Tel 1 781 266 5700 Fax 1 781 266 5123 scancontrol cambridgetechnology com http www cambridgetechnology com Cambridge Technology Inc
47. J Active high LASERPWRDOUT polarity 3D Compensation A 8 Bit Laser power mode j LENA LASERON2 Config Use 16 bit addressing Figure 22 Laser Properties P0900 0157 Revision D 9 Active high 9 Active high 9 Internal 9 Analog 9 Gate 9 LASERON1 polarity LASERON2 polarity Laser mod sync source Laser power port LASERON1 config Laser mod type Cambridge Calibration Wizard Technology User Manual 7 Finally save the configuration for future reference through the File menu Figure 23 File Save calibration configuration To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Align Laser 3 Axis Heads 2 Axis heads are mechanically aligned to the laser by the way they are attached 3 Axis systems the other hand require alignment of the laser beam to the optical path of the head To enable the alignment process manual laser control is available by clicking the Align laser button Figure 24 Laser Align View P0900 0157 Revision D Page 21 Cambridge Calibration Wizard Technology User Manual 1 The available Laser params dependent on the laser selection in the previous step Laser params for alignment Laser params for alignment Laser params for alignment Modulated CW mode Frequency 9 20 KHz Frequency j 20 KHz Frequency 9 20 KHz Duty cycle j 10 Duty cycle 9 10 Power 9 10 Power j 10
48. able the software to recalculate the Z calibration factor that will compensate for non flatness across the marking field Note The information entered through this tool is accumulative so while the presented values are reset to zero every time you open the tool previously applied corrections remain in effect P0900 0157 Revision D Page 47 Cambridge Q Technology 3D Compensation Calibration Wizard User Manual If you are planning to mark on a plane different than the one on which you perform the calibration the conical nature of galvo scanning will cause a dimensional change in X amp Y due to the change in Z The Calibration Wizard can calculate a compensation for this distortion based on the head s geometry To enable the option go to Configure 3D Compensation Confiqure Job XML Style Laser properties Axis DAC range 30 Compensation Use 16 bit addressing 20 bit addressing RTC compatibility mode Figure 74 3D Compensation Parameters To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Create Calibration Grid P0900 0157 Revision D Cal grid basic params Include grid outline X Y Enable cutting 1 Sizes 200 200 n Offset D 0 j 0 mm Keep size and offset Spacing 3 10 mm Fiducial size 4 mm Patterning job control Tables 183 Figure 75 Create calibration grid View coe udi
49. atabase 6 14 2011 2 50 Shortcut File name Save as type Custom Pattern xml Figure 50 Specify a Path and File P0900 0157 Revision D Page 33 G Cambridge Calibration Wizard Technology User Manual 17 Finally use File Quit to close the editor window You ll be asked if you want to use the new calibration factors for future marking operations Then you ll be asked if you want to load the table to the controller Click OK in each dialog box Do you want to use the new calibration factors for futher marking operations Load table to controller Figure 51 Close the Editor and Load the Table To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Set Center Focus Offset 2 Axis Heads Size mm 123 Keep size and offset Offset mn 0 EM Pattern 9 1x1 Size mm 5 10 Focus Tables Figure 52 Set Center Focus Offset View In this step the system is adjusted to achieve a focused beam at the center of the field P0900 0157 Revision D Page 34 G Cambridge Calibration Wizard Tedmolgy The optical path through the head s mirrors and the lens is fixed so the distance between the head and the target surface is adjusted to achieve a focused grid image 1 Define the size of the grid Your Next Action Will Fire The Laser Use Caution To Avoid Damage Or Injury
50. atically set all the fields 2 f you do not have a previously saved configuration start by selecting the type of system you have 3 Axis to display the relevant menu The first button is the Set system configuration button selected ECTOOU sM1000 EC1000 13171344 m182 168 100 10 Three axis system Task Parameters Head type L2 30mm Y AG Open Frame Head parameters Laser type J co Background laser modulation Frequency Jj 5 KHz Duty cycle D 0 Patterning job conti Tables iterations Figure 18 System Type Selection amp Menu 3 Axis configuration 3 the Task parameters window you i2 som Y 0 select or set head related parameters to be used for synthesizing a correction table For 3 Axis heads preset parameters selected by selecting from the supported head type list Laser type 2257 Frequency 5 KHz Duty cycle Figure 19 Task Parameters 3 Axis configuration P0900 0157 Revision D Page 19 Cambridge Calibration Wizard 7 Technology User Manual 4 custom head configuration is used click the Edit button to enter the following head parameters X mirror to objective distance mm X to Y mirror distance mm Y mirror to work surface distance mm Galvo mech half angle deg Y Galvo mech half angle deg Edit parameters 128 X mirror to objective dist
51. boot offsets Click the OK button to accept these offsets To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Adjust Focal Plane Tip 3 Axis Heads The final step for a 3 Axis head is fine adjustment of the focal plane if needed Fine focus tip parameters Field ie T Pattern 3x3 Size mm x 200 D 200 r r Keep size and offset Offset mm E n E 0 Cell Pattern 5 5 Size mm 3 5 Focus UA Start D B Stop Delta 0 5 Patterning job control weis ij nm d Figure 92 Adjust focal plane tip view The same Focusing Array pattern is used as for the initial focal plane adjustment P0900 0157 Revision D Page 57 Calibration Wizard User Manual Figure 93 Adjust focal plane Pattern Your Next Action Will Fire The Use Caution Avoid Damage Injury 1 the grid pattern and then click the Run button to mark it 2 Once the pattern is marked click on the Edit table button to open the Correction Table Editor 3 If you get the following message dialog click the OK button The corrections constrain the use of available command range resulting in a field size that is smaller than it could be Figure 94 Corrections Constraints Message 4 The following message dialog
52. clearly identifiable Fiducial the junctions 2 he parameters in this view allow you to define the grid For best accuracy the grid size and position should be similar to the field area you intend to utilize A grid is computed and presented in the editor s viewing area P0900 0157 Revision D Page 49 Ca Cambridg e Calibration Wizard Technology User Manual Cal grid basic params Grid type Box Include grid outline X Y Size 100 100 mm Offset 0 j imm Keep size and offset Spacing 10 mm Fiducial size 4 mm Figure 78 Calibration Grid Parameters 3 The software will attempt to utilize the full field size available modifying the grid based on the Size Offset Spacing and Fiducial Size values The software might display windows that inform you on required changes as a Fiducial must always be positioned at the center of the field 4 Check the Include grid outline box if you wish to mark the field s perimeter using the galvo s maximum command values Additional registration marks are drawn in the corners of the outline and at the X and Y positive maximum extents These marks are useful for proper orientation on measurement tools Note that even without the outline a dot is marked just outside the grid to identify the positive X direction ET ENT 109 Units mm Show Jumps 9 j 2994 7 9 744 8 m m tm B m
53. cterization on page 69 for more information If the above measurement method is not initiated immediately following marking the grid make sure to reload whatever correction file was used for the marking and to redefine the grid the same way it was for the marking P0900 0157 Revision D Page 61 C Cambridge Calibration Wizard Technology User Manual To ensure the best results load the flatbed scanner calibration file before starting as described in Appendix A Flat Bed Scanner Characterization on page 69 Note Calibration Wizard currently supports two types of Flatbed Scanners 1 Canon Canoscan Lide 700F and 2 Plustek OpticPro A320 In addition the Calibration Wizard is based on LabView libraries and the user will need to purchase a NI Vision Development Module Run Time License from National Instruments Use National Instrument s Software Vision860 and not a newer version You can contact CTI to get this software product The following is a step by step procedure for the Automatic scan and analyze method 1 After the grid is patterned on a suitable substrate the artifact place it in the document scanner so that scanning start at the positive Y edge and progresses along the Y axis Then click the Edit table button to open the Correction Table Editor From the editor s menu select Measure Automatic scan and analyze CTI Correction Table Editor File Edit Show Configure Operate Help Automatic scan and analyze
54. ction for easy orientation Zoom Reset unis x 1 2994 2994 2 1 7448 Show all images Show Jumps 1 i U i 109 45 E E E E E E E E E Hi 8 8 8 8 8 8 8 8 HR RB HH 8 Sm m m m rm m m E E E E E E E E E Hi 8 8 8 8 8 8 8 8 8mm rmm m rr rtm E E E E E E E E E Hi 8 8 8 8 8 8 8 8 E E E E E E E E E Hi 8 8 8 8 8 8 8 8 E E E E E E E E E Hi 8 8 8 8 8 8 8 8 E E E E E E E E E Hi 8 8 8 8 8 8 8 8 2 RI HI Hi 8 8 8 8 8 8 E E E HE E EB 8 Hi B 8 8 H 8 B 8 8 E E E E E E E E E Ed 8 8 Hg 8 8 n E E E E E E E E E Ed 83 8 8 8 n E E E E E E E E E Ed Hd 8 8 8 H Hd d 8 d E E E E E E E E Ed Ed 0 83 8 8 8 GB E E E E E E E E Ed Ed Hd 8 8 8 8 8 d E E E E E E E E E Ed 0 8 8 H Hg 8 8 d E E E E E E E E E Ed Hd 8 8 8 H d 8 8 d E E E E E E E E Ed Ed 8 8 8 8 8 8 n E E E E E E E E E Ed 8 8 8 8 d 109 45 50 00 0 00 50 00 109 45 Figure 80 Check the Box and Define the Cut Dimensions Your Next Action Will Fire The Laser Use Caution Avoid Damage Injury 8 Wh
55. d to EC1000 0 mms 5 416 7 Max mm File View D Plot D Units mm Measurement data 0 Min G 4 o 0 Max e P o 0 Mean 999 EN C 2 Show table data OGG OQ QOO S XD xo xx Ec Model GEOGGESEOOCSGOSOS8O605 COO lt 0000 Tr croco Show modeled data 6 6 ovre v9 OOOO 82 COCOTTE 6 Cer co O Error radius 7 1 mm Figure 35 New Correction Table P0900 0157 Revision D Page 27 G Cambridge Calibration Wizard Technology User Manual 7 f you change any of the parameters the calibration factors will be recalculated and will override the values passed in when the editor was started 8 Now save the Correction Table 3 3 Edit Measure Show Configure Operate local file To controller Import Export Quit tic ae Three axis Calibration factors x YE Figure 36 File Save Correction table To local file 9 Enter a description for the correction table and click OK Get user text IJ
56. e following is an example of the XY Plot View that displays in Advanced Usage Mode The X Y Plot View has different Data to View control elements than the Plot 4D one File View 3 Units 100 Data views 100 8 Table Grid 7 Ir qoum II eie tenes i w Lens Limit v 7 B I 7 1 Meas Grid 1 2 Meas Data 7 in Model Dat 7 J Resid Ers 7 27 New table components c Current table 50 E Modeled corrections 80 Use these sub components p 100 Composite 100 Measurement Projection 100 1 1 i lens 100 100 80 50 0 30 50 80 100 100100 li in E n Show Corrections po mv Figure 126 XY Plot View In the default view above four data types are overlaid in the display Ideal locations of the table entry points green signs P0900 0157 Revision D eee 4 x x x Px fx xx x x x x X TERREI CHEESE CAPERS Sa CCS CSE ast Hi sis Adjusted locations of the table points red marks Maximum command position of the galvos blue border Perimeter of the lens field green circle Figure 127 Default Data Types in XY Plot View Page 75
57. en you are done setting the grid pattern click the Run button to mark it on the target Note Using Bindakote or Chromalux black paper results in good contrast for most laser types Measurement of Ideal vs Actual Coordinates As mentioned in the introduction the Calibration Wizard supports the following methods for acquiring the measured coordinates Automatic analysis of a scanned grid image from a flat bed scanner limited to 300mm x 300mm field Analysis of a grid measurement file provided by the user Manual guided grid adjustments useful for fields larger than 300mm x 300mm e Basic Box Cross corrections quick method for initial or good enough accuracy Each of the above methods differs in its required effort and achievable accuracy Please refer to Calibration Methods on page 61 to select the method that best suits your needs P0900 0157 Revision D Page 51 G Cambridge Calibration Wizard Technology User Manual Analysis of a Grid Measurement File Correction tables are created based on the analysis of the ideal vs measured coordinate sets This analysis is done by the software but requires different actions depending on the method you chose e f you use the automated measurement method or Guided Grid Measurement tool the analysis will be done automatically as part of the process e Forthe Basic Box correction method measurement is done through observation and no data is entered Otherwise mark the g
58. es 43 Figure 65 Laser Delays Fine suas nasus assassin aas nasa ad 44 Figure 66 Polygon Delay and Mark Delay Are Too essen nnn naa 44 Figure 67 Polygon Delay Fine 45 Figure 68 Mark Delay Fine 45 Figure 69 Jump Delay Fine 45 Figure 70 Adjust Focal Plane 46 Figure 71 Adjust Focal Plane Pattern 46 Figure 72 Measure Collect focal plane data 00 00000000000000000000005550000 47 Figure 73 Focal Plane Data Entry Window esses sese na ann nna 47 Figure 74 3D Compensation Parameters 48 Figure 75 Create calibration grid 48 Foure SO GUO TYPOS NE 49 Figure 77 Calibration Grid Types 49 Figure 78 Calibration Grid Parameters 0 00000 000000000000 50 Figure 79 Calibration Grid 0 000000000
59. f the laser beam with the optical axis of the head Set Mark and Jump speeds for focus test general marking and cutting Set Focus Marking Params Set Focus Marking Params e Set laser frequency duty cycle and power levels for the above Load a Correction Table if available Exit the correction table editor by selecting File and Quit Create Correction Table Accept the table when prompted Mark the grid at the center of the field Identify the offset step that achieves best focus and set it in the Set Center Focus Offset Correction Table Editor launched with the Table button e Set optimum laser and scanner delays as well as Velocity compensation if used e point you may want to save the setup parameters apio Adjust Laser Galvo Timin file Save calibration configuration e Mark the pattern and adjust the Z Calibration factor until focus is achieved near the center of all marked grids Adjust Focal Plane Define the grid s type sizes and spacing Mark the grid Measure grid coordinates Analyze the measurement results e Close the correction table editor and select yes to apply the new corrections Create Calibration Grid Y Repeat the marking amp analysis process until the required accuracy is achieved e Save the correction data to an xml file Y correction table editor and select Measure Collect Box Cross grid data to adjust the table for overall
60. g field in the following screen to enable the software to compensate for non flatness across the marking field Figure 98 Focal Plane Tip Data Entry Window Note the information entered through this tool is accumulative while the presented values are reset to zero every time you open the tool previously applied corrections remain in effect To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview P0900 0157 Revision D Page 60 Cr Cambridge Calibration Wizard Technology User Manual Calibration Methods This chapter discusses the various calibration methods supported by the Calibration Wizard Automatic Measurement and Analysis The preferred method to acquire measured coordinates is the automatic analysis of a scanned image This correction method is suitable for calibrating scan fields up to 300mm x 300mm In this method Cambridge Technology s patent pending Scanner Based Metrology uses standard document scanning equipment coupled with advanced vision processing algorithms to create a good correction table with one or two passes of imaging measurement and analysis This system electronically captures a large array of fiducial images produced by a laser system on a substrate into a TIFF pixel based image file The image file is then methodically analyzed in sub regions using vision processing software at each ideal fiducial location to produce an X Y offset of the fiducial relative to the
61. gnments This can also be an easy calibration method if your system does not require the utmost accuracy Both adjustment and coarse calibration can be achieved through the Adjust correction table menu Grid type Line mm Keep size and offset Figure 85 Adjust correction table view 1 Use the controls in Task parameters to define a simple box amp cross design in the graphic display Figure 86 Box amp Cross Pattern P0900 0157 Revision D Page 54 Cambridge Calibration Wizard Technology User Manual Your Next Action Will Fire The Use Caution Avoid Damage Injury 3 Once the pattern is marked click on the Edit corr table button to open the Correction Table Editor Then select the Measure Collect Box Cross grid data menu option File Edit 102 A Automatic scan and analyze 2 Analyze scanned image Show Configure Operate Help Calibrate flat bed scanner Analyze flat bed scanner calibration image Guided grid measurement Collect Box Cross grid data Collect grid data into table Collect focal plane data Analyze correction table errors 4 NOW measure relevant dimensions on the marked pattern and enter them into the relevant locations the presented diagram Collect Box Cross grid data 100 UpperleftX ight x 24 Di pper Upper Right 100 Center Upper Y Upper
62. gon delay may require adjustment when the speed changes The Laser delays were set at a higher speed so they will get more precise even as you slow down the speed c Once again we ll start with the Polygon delay d Set the Mark delay to a value 25 higher than its current value This will ensure that segments KF and LI end at points F and respectively as the mirrors have plenty of time to reach the end of those vectors before the next jump P0900 0157 Revision D Page 44 Cr Cambridge Calibration Wizard Technology User Manual e Observe points and for the position of the tip of each V relative to the segment it should touch Adjust the Polygon delay until the tips of the V s touch those segments and no burn in Occurs Polygon Delay Polygon Delay Too Short Too Long Figure 67 Polygon Delay Fine Adjustment f Next restore the Mark delay value to the coarse adjustment value 20 less than the current one and then continue to reduce it until the segment s edge no longer touches the tip of the V Now increase it slightly to correct the defect Do not increase the value too much as no defect will be noticeable but the mirror will dwell for too long a time increasing the job execution time for no good reason Mark Delay Mark Delay Mark Delay Set properly Too Short Set Figure 68 Mark Delay Fine Adjustment g For Jump delay fine adjustments repeat the above process while observing point H s connection
63. gure 34 Figure 35 Figure 36 Figure 37 Figure 38 Figure 39 Figure 40 Figure 41 Figure 42 Figure 43 of Figures Overall View of the Calibration Process 4020 0 0000000000000000000 7 Calibration Wizard main 0 0000000000000000000 8 Correction Table EANO seen nans nn nua EE EEE 9 Load Correction Table Menu 12 Select Correction Table 12 Calibration Wizard Main 00 000000000000 00 15 Select Adaptor Address w 1 ccccccecsseecsescnncccasseecsnescnccssssveeneecssvecasssenseceasecoassesenencsacceanesedeecesnecessesestesees 15 Controller Selection WindOw sssssseeiiiiiiis 16 Controller Connection Status Windows 16 RE 16 File Load calibration 17 System Type Selection amp Menu 2 Axis configuration 0 0 00 0 0000 0010000000015050000 17 Task Parameters 2 Axis configuration nena nnns nnn nna 17 gocce cte 18 FODEN
64. h on the Mirrors correction to introduce pincushion distortion compensation The magnitude of the required pincushion correction depends on the maximum mirror angle and the lens effective focal length 8 Adjust the lens correction factor then exit the editor accepting the changes and loading the new table to the controller Mark the pattern again and examine the left and right edges Usually smaller factor values will pull the corners towards the center of the field 9 Repeat this process until these two edges are straight Figure 113 Mirrors Distortion Correction The User adjustments controls allow you to induce additional compensations into the table These factors are added to the lens and mirror compensations These are normally not used except in special cases P0900 0157 Revision D Page 68 Cr Cambridge Calibration Wizard Tedmolgy Appendix A Flat Bed Scanner Characterization Today s document scanning equipment is fabricated using high precision semiconductor process equipment and large area lithography methods that ensure good dimensional tolerances For applications that require the utmost accuracy the flat bed document scanner s inaccuracies can be characterized and eliminated from the measurements using the following process 1 Acquire a Characterization grid from Cambridge Technology and place it in the document scanner r CTI Correction Table Edito File Edit Show Configure O
65. ibration Wizard Technology User Manual 13 To complete the process save the resulting correction information onto the controller or to a local file Edit Measure Show Configure Operate Load E Correction table local file Flat bed scanner calibration data To controller Calibration factors I r X 2022 Figure 107 Save Correction table To local file Guided Grid Adjustments This correction method is suitable for calibrating any scan field size but is most useful for fields larger than 300mm x 300mm The software is using the information in the current correction table to position a guide laser on the points of a user defined grid The user then uses on screen controls to adjust the laser beam onto an accurate position referring to a grid paper or other fiducials on the work surface This method s accuracy is limited by the guide laser s spot size and the targets used In addition it can require more effort than the other calibration methods 1 To activate this feature use the Create correction table menu and select the Measure Guided grid measurement menu option Cr Guided grid measurement Square grid X Y Target point Grid size mm 2 100 3 100 Points along axis 2 5 5 Achual pomi Spacing mm 5 9 25 X 5 v 250 Ci al 0 02 Nudge mm 2 X10 Scale Error i h X p Y 25 Number of points
66. ile menu option to load the file you have saved before Edit Measure Show Configure Operate From local file From default startup configuration on 1000 From stored file on the 1000 board From dual axis scan head library deg 180 Lens effective focal length mm Figure 4 Load Correction Table Menu Option 3 Abrowser window will open to enable you to find and select the file you want to load Save in Calibration e Mame Date modified Type TestTablel xml 5 7 2014 1 02 PM XML Figure 5 Select Correction Table Window P0900 0157 Revision D Page 12 Cambridge Calibration Wizard Technology User Manual 2 Axis Head Procedure Overview v e Activate the Calibration Wizard Controller Connection e Connect to an EC1000 or SM1000 controller e Enter the lenss maximum mechanical angle amp effective focal length and the galvo s maximum mechanical angle set System Configuration e Set the laser information along with the background modulation frequency and duty cycle e Set Mark and Jump speeds for focus test general marking and cutting Set Focus Marking Params e Set laser frequency duty cycle and power levels for the above Load a Correction Table if available Exit the correction table editor by selecting File and Quit Create Correction Table Accept the table when prompted e Mark the grid at the
67. iming Now that the laser is focused it is time to optimize laser and scanner delays under Adjust laser galvo timing Do not skip this step as low quality marking of the grid might cause the upcoming measurement and analysis to fail je m ee P SEES Figure 55 Set Laser Galvo Timing View P0900 0157 Revision D Page 37 Cr Cambridge Calibration Wizard Technology User Manual Different lasers require different settings for the Pipeline delay Laser On delay and Laser Off delay while application considerations may require different values for the Mark Jump and Polygon delays referred to as Application Delays Many of the delays are interdependent so changing one may affect another resulting in a long trial and error process until you find the values you need Cambridge Technology has developed a process to guide you through proper streamlined set up of the various delays for your specific laser and application needs 1 The process starts with a coarse adjustment to get the parameters close to the required values followed by a much finer adjustment to optimize those values For the coarse adjustments use a mark size that can be seen easily and a speed 3096 5096 higher than you intend to use for the application For the finer adjustments the pattern size should be similar to your job while the speed is adjusted as needed 2 Laser and laser Off delays are better set with a higher speed than you intend t
68. ion table present it will be loaded and the selection of 2 Axis vs 3 Axis will be done automatically to reflect the information in this table To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview P0900 0157 Revision D Page 16 Cambridge Calibration Wizard Technology User Manual Set System Configuration 2 Axis Heads If you have saved a calibration configuration in the past you can load it from the File menu CTI Calibration Wizard 21 Configure Show Help Load calibration configuration Save calibration configuration Export Quit Figure 11 File Load calibration configuration 1 The software will recognize the configuration and will automatically set all the fields 2 f you do not have a previously saved configuration start by selecting the type of system you have 2 Axis to display the relevant menu The first button is the Set system configuration button Selected EC1000 5 SM1000 EC1000 13171344 2192 168 100 10 Select 2 axis calibration step Task Parameters 11 0 Lens max mech angle deg 180 Lens effective focal length mm 11 0 max mech angle deg Head parameters Laser type Jl coz ie etf Frequency 5 Duty cycle 0 Figure 12 System Type Selection amp Menu 2 Axis configuration
69. ition of the focusing mirror to achieve good focus at the center of the field see Set Focus Marking Params on page 23 The Z Margin shows the available travel distance beyond field flattening for 3D operation 8 For applications that require varying work distance Marking the Z offset can be adjusted to modify the margin available beyond the range used for field flattening 9 Lastly for systems with varying field size motorized 2 axis a Home position is required for the DFM Dynamic Focusing Module 10 If you change any of these parameters the calibration factors will be recalculated and will override the values passed in when the editor was started P0900 0157 Revision D Page 31 Cambridge Calibration Wizard 11 To synthesize a baseline table use the Edit menu Measure Show Configure Operate Help Boot time correction table adjustments Synthesize baseline corrections Reset correction table Reset user error measurements Reset focal plane tip Reset flat bed scanner calibration Figure 45 Edit Synthesize baseline corrections 12 The editor will calculate pin cushion distortion compensation that comes from the mirror spacing It will automatically rescale the table contents and the calibration factors to optimize the use of the galvo command range After this process the new table will be displayed Correction Table Editor x
70. may be displayed If you want to enable Auto scaling click the OK button if you do not want to enable Auto scaling click the No button For more information on Auto scaling refer to Table Auto Scaling on page 76 P0900 0157 Revision D G Do you want to enable Auto scaling to adjust the table and calibration factors to optimum values Figure 95 Auto scaling Message Page 58 Cambridg 6 Technology Calibration Wizard User Manual 5 the following message is displayed take note of it and click the OK button Enabling or disabling auto scale may change the magnification of the system You should re image and measure your test pattern using the new calibration factors Figure 96 Auto scaling Magnification Message 6 Select the Measure Collect focal plane data menu option from the Correction Table Editor P0900 0157 Revision D CTI Correction Table Editor File Edit Show Configure Operate Automatic scan and analyze Analyze scanned image Calibrate flat bed scanner Analyze flat bed scanner calibration image Guided grid measurement Collect Box Cross grid data Collect grid data into table Collect focal plane data Analyze correction table errors Figure 97 Measure Collect focal plane data Page 59 Cambridge Calibration Wizard Technology User Manual 7 Discern the best offset to get a focused beam in each location and enter them into the correspondin
71. memory and move the laser to the next point in the grid 6 Use the Next and Back buttons to move between points on the grid without affecting the correction value in memory 7 Use the Save button to save a copy of the updated table from the computer s memory to a pset file Refer to the next section for information about pset files and their use for generating a correction table 8 Use the Done button to close the tool window and load the corrections into the Correction Table editor tool Note You can use a 3x3 point grid for the first iteration to eliminate the bulk of the errors so that the position accuracy of the software for subsequent iteration will be much improved Basic Box Correction For 2 Axis applications that only require basic accuracy it looks straight to a simple correction can be achieved by doing the following 1 Follow the steps listed in 2 Axis Head Procedure Overview on page 13 skipping Create calibration grid The first time you mark the box amp cross under the Adjust correction table menu your box will most likely not look good due to mirror separation pincushion and lens barrel effects Pincushion Distortion Figure 109 Pincushion amp Barrel Distortions P0900 0157 Revision D Page 66 6 Cambridge Calibration Wizard 2 Click on the Edit corr table button to open the Correction Table editor and select the Adjust tab on the upper left area of
72. n of the actual distortion and that of the corrections View Controls These controls are used to change the properties of the display area and will change based on the view Plot 4D View In Plot 4D view circles are centered at the coordinates of the table entries and vectors represent the magnitude and direction of the X Y correction distortion at each point of the grid For example the mirror induced pincushion distortion on the left will result in the pattern on the right Figure 123 Mirror induced Pincushion Distortion Visualization Note that the red vectors emanating from the circles are always in the X direction and increase in magnitude as you move away from the Y 0 and X20 axes The vectors are pointing away from the center indicating that for these points the actual mark will be pushed out compared to the intended location P0900 0157 Revision D Page 73 G Cambridg e Calibration Wizard Technology User Manual Changing the Content selection Show to Corrections the vectors now point toward the center as they represent the corrections required to bring these points to their intended locations _ LLLLLLI Veit y eA ET pt EET pT EET Figure 124 Mirrors Pincushion Corrections Visualization The radius of the circles and the magnification of the error
73. o leave a clear mark on the media e Focusing Low power level to enhance variations in the mark due to focus quality e Cutting High power level to cut the marked pattern to be measured SM1000 EC1000 13171344 2192 168 100 10 Figure 29 Focus Marking Cutting Parameters View P0900 0157 Revision D Page 23 G Cambridge Calibration Wizard Technology User Manual Notes 1 Mark and Jump speed selections depend on the scan head model being used as well as the application s accuracy and throughput requirements 2 The availability of specific Laser controls will vary based on the laser type selected see previous sections for details When done save the configuration for future reference through the File menu To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview To return to the procedure overview for 3 axis heads click on 3 Axis Head Procedure Overview Create Correction Table 2 Axis Heads The calibration process is an additive process each calculation result is E gt superimposed over the current corrections Three axis system n pou Select 2 axis calibration step 1 To eliminate any potential for error all existing correction information is cleared when you open the Correction Table Editor by clicking the Create correction table button Figure 30 Create correction table button 2 To prevent erroneous clearing of information
74. o use for the application as they may no longer be valid when the speed is increased However laser timing will improve as the speed is decreased ensuring better accuracy in turning the laser on and off 3 The same is not true for the Application delays As you mark faster you may need to increase the application delays to maintain the quality of the mark while as you slow down you might create excessive delays that will either burn in or waste time idling at some points For that reason Laser delays are set first at a higher speed and then the Application delays are set at the intended operational speed Setting Laser Delays To set the Laser delays a Discovery Raster pattern is used An array of patterns is defined with Pipeline delay kept fixed per column and increases between columns while Laser Off Delay kept fixed per row and increases between rows PPE Bc FIFE 180 PPE 11 Ej EL EL EL ER 150 Ej Ee EL EL EIL EE SEE EL ERR ER Figure 56 Discovery Raster Pattern 1 To Laser Delays shown in Figure 56 do the following Set Laser On delay to 0 b SetJump and Mark delays to a large value 21 000 Pipeline delay is used to delay the laser control signal relative to those of the Galvo for better synchronization P0900 0157 Revision D Page 38 Calibration Wizard 5 Cambridge 7 Technology User Manual c Set Velocity
75. ol Design 160 Lens effective focal length mm Statistics 11 0 max mech angle deg Measurement Statistics Oo0000000000000020 Field 0000000000000000 Correction Display 00000000000000000 Figure 3 Correction Table Editor The use of these controls is described later in the manual P0900 0157 Revision D Page 9 Cr Cambridge Calibration Wizard Technology User Manual Principles of Operation Correction Table Structure The correction table has 4225 entries for each of the three axes X Y and Z The table is arranged in a 65x65 matrix corresponding to command values ranging from 32768 32768 to 32767 32767 in X Y Cartesian coordinates The coordinates of the table are spaced apart at 1024 counts in both X and Y An X Y and Z correction value is defined at each coordinate of the table Table entries are offsets that are added to the command value to create a new corrected value that causes the beam to deflect in such a way as to compensate for distortions induced by the lens mirror spacing and system alignment errors Job command values that fall between the defined coordinates of the table are compensated by using a bi linear interpolation of the four immediately adjacent defined table coordinates The number of measured points is often very low compared to the size of the table so mathematical error sources
76. or and Load the Table To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview Create Correction Table 3 Axis Heads The calibration process is an additive process each calculation result is superimposed over the current corrections 1 To eliminate any potential for error all existing correction information is cleared when you open the Correction Table Editor by clicking the Create correction table button gt Figure 41 Create correction table button P0900 0157 Revision D Page 29 Cambridge Calibration Wizard Tedmolgy Manual 2 To prevent erroneous clearing of information the following confirmation pop up is displayed This action will create an empty correction table You will lose any in process modifications you may have done that were not saved Do you want to continue Figure 42 Confirmation Pop up 3 Once you press Continue the correction table editor will appear 7 Correction Table Editc File Edit Measure Show Configure Operate Help 4 SM1000 EC1000 EC1000 11451146 2192 168 100 10 4 g 12 30mm YAG Open Frame 20 omy 29 Ao Ll M oo oo oOo o 00 0000000090 000900 oOo o 0 0 0 0000 000 0009 0 oo 8 so oOo oo 0 000
77. perate Help Automatic scan and analyze n Module 2 Analyze scanned image 4 Calibrate flat bed scanner Amnalyzeflat bed scanner calibration image Guided grid measurement x 2 Click the Edit table button to open the Correction Table Editor From the editor s menu select Measure Calibrate flat bed scanner Collect Box Cross grid data 3 Collect grid data into table Collect focal plane data stal Analyze correction table errors Figure 114 Flat Bed Scanner Characterization 3 Select your scanner type and click the OK button 6 Select scanner Select scanner type Small 8 5 x 11 1 Figure 115 Select scanner type 4 Enter the file name you want to use This will serve as a prefix to various files the software will create during the operation Then click the OK button Please enter a measurement file name prefix Figure 116 Get user text P0900 0157 Revision D Page 69 G Cambridge Calibration Wizard Technology User Manual Select a measurement data file and click the OK Savein Coen button Name Date modified Type NewMeasurementData pset 5 14 2014 9 52 AM File Recent Places Libraries Computer Network 4 File name Save as type 6 Select the scanner you ll be using from the list of installed scanners 7
78. re set to the values you have entered previously and are used to synthesize a correction table based on your optical path geometry To synthesize a baseline table select Edit Synthesize baseline corrections Reset correction table Reset user error measurements Reset focal plane tip Reset flat bed scanner calibration 160 Lens effective focal length mm 11 0 max mech angle deg Figure 34 Edit Synthesize baseline corrections 6 The editor will calculate pin cushion distortion compensation that comes from the mirror spacing and lens distortion compensation It will automatically rescale the table contents and the calibration factors to optimize the use of the galvo command range This process is described in Table Auto Scaling on page 76 After this process is complete the new table will be displayed For an example see the figure on the next page P0900 0157 Revision D Page 26 G Cambridge Calibration Wizard Technology User Manual Cr CTI Correction Table Editor 52 File Edit Measure Show Configure Operate Help Module Correction Table ID 183 Using flatbed scanner calibration data Projection parameters Three axis Calibration factors bits mm X 7 5618 Y 5618 7 7 855 9 15 0 Lens max mech angle deg Preserve these cal factors 2 160 Lens effective focal length mm 11 0 Galvo max mech angle deg Sen
79. represent the maximum command values the controller can generate Creating a table with such entries would result in command values bigger than what is possible in the system hence clipping at the edge of the commanded field To avoid this situation the editor will detect such circumctances and present the following warning followed by a dialog box Do you want to enable Auto scaling to adjust the table and calibration factors to optimum values 3 Enabling or disabling auto scale may change the magnification of the system The corrections exceed the available command range and will result in command clipping at the edge of You should re image and measure your the field test pattern using the new calibration factors Figure 129 Auto Scale Warning amp Dialog Box If you change the Auto Scale setting a dialog box will remind you that the adjusted value should be used Once enabled auto scaling will introduce an adjustment factor to pull the maximum command value to the limit of the controller s range P0900 0157 Revision D Page 76 Cambridge Calibration Wizard Technology User Manual Checking the Autoscale control box in the Overall adjustments area of the editor has the same effect as checking the Enable autoscale control in the preceding dialog box The display changes as shown below to illustrate the effects of this scaling correction opt 222222 24
80. rid pattern or a pattern of your choice and use your own method to measure the coordinates of the marked pattern points Then create an ASCII text file listing ideal and measured coordinates side by side Alternately you can list the ideal coordinate together with the position error of the corresponding measured coordinates Both Point set pset formats use multiple lines of text in a file each line representing a separately measured grid point expressed in standard units of measurement mm or inch In each line values can be separated by Spaces Tabs or commas 1 Once the file is ready go back to the correction table editor and select File Import Measurement data from CTI point set format file then choose the format of the table you have for import CTI Correction Table Edito Edit Measure Show Configure Operate Help Load b 5 1000 EC1000 EC1000 114511454 2182 168 100 10 Correctio Correction table from Export Quit Measurement data from zi point set format file Scanlab CorreXion control file imm Var nen Frame E 1 Pai Figure 81 File Import Measurement data from CTI point set format file 2 Click Import for the format pset or dat of the table you have for import B Import gria eror data pset Format X ideal Y ideal dX ideal d Y ideal dat Format X ideal ideal X actual actual SwapX amp Y Axes Figure 82 Import grid error
81. rties menu option 6 Edit laser Activate Laser Active high LASERON polarity Jj Active high LASERON2 polarity Internal Laser mod sync source 9 Active high LASERMOD1 polarity Active high LASERMOD2 polarity Job XML Style R Axis DAC range 8100 40 3D Compensation Use 16 bit addressing Use 20 bit addressing RTC Active high LASERFPK polarity 9 Active high LASERENABLE polarity Active high LASERPWRDOUT polarity Laser power mode LASERON2 Config compatibility mode 9 Analog Laser power port LASERON1 config 9 Laser mod type Figure 15 Laser Properties 6 Finally save the configuration for future reference through the File menu Figure 16 File Save calibration configuration To return to the procedure overview for 2 axis heads click on 2 Axis Head Procedure Overview P0900 0157 Revision D Page 18 Cambridge Calibration Wizard Technology User Manual Set System Configuration 3 Axis Heads If you have saved a calibration configuration in the past you can load it from the File menu Calibration Wizard Configure Show Help Load calibration configuration Save calibration configuration uble click to selec Export k Quit Figure 17 File Load calibration configuration 1 The software will recognize the configuration and will autom
82. s a low resolution image of the item and next as the full resolution image Figure 104 Scanning Status Window 7 Atthe end of the scan the scanned image is saved to the folder you have previously selected and can be used for repeating the analysis without the original artifact P0900 0157 Revision D Page 63 Cr Cambridge Calibration Wizard Technology User Manual 8 Now the software will start the analysis by opening the image file Opening Image Figure 105 Opening the Image File 9 A small window will display the sub region of the image being analyszed including highlights of identified features while a progress message will show progress status Traversing Grid 47 of 121 Figure 106 Traversing Grid 10 At this point pset file is created from the scanned image and is saved to the folder you have previously selected 11 Once a set of measured coordinates is available for each of the design points the differences are analyzed using least squares regression techniques to develop coefficients for mathematical models of the system errors 12 In addition Calibration factors are calculated automatically based on the deviation of the measured overall dimension from the designed one These values control how units are converted between user measurements normally expressed in millimeters or inches and system units of Galvo command counts P0900 0157 Revision D Page 64 Cambridge Cal
83. scaling and trapezoid distortion If required mark the pattern Then go to the correction table editor and select Measure gt Collect focal plane data to adjust Adjust Focal Plane Ti the focal plane s tip until focus is achieved at the center of all e If global field adjustment is needed mark the grid Then go to the Optional marked grids End P0900 0157 Revision D Page 14 Cambridge Calibration Wizard Technology User Manual Process Steps Controller Connection 6 CTI Calibration Wizard File Configure Show Help 5 1000 1000 13171344 9192 168 100 10 Figure 6 Calibration Wizard Main Window 1 Upon activation if your computer has more than one network adaptor you will be asked to select the one that is used for scan control by double clicking it Figure 7 Select Adaptor Address P0900 0157 Revision D Page 15 Cambridge Calibration Wizard Technology User Manual 2 he Calibration Wizard application will search for available controllers and display them in the Controller Selection window SM1000 EC1000 13171344 0192 168 100 10 Figure 8 Controller Selection Window 3 Double click on the controller you wish to connect to 4 Status windows will appear for a few seconds Figure 9 Controller Connection Status Windows 5 And finally the Connected indicator will turn green SM1000 EC1000 13171 Figure 10 Connected Indicator Note If the controller has a correct
84. the Laser Off delay set properly no noticeable artifact is produced although the mirrors dwell there for too long a time This is not a concern just yet as it will be properly handled during the fine adjustment stage P0900 0157 Revision D Page 42 Cr Cambridge Calibration Wizard Technology User Manual e Adjust the Mark delay to produce a properly marked V shape gt Figure 62 Mark Delay Adjustment f Lastly we ll adjust the Jump delay the delay at the end of a jump The effects of this delay are easily observed at point E of the V Test pattern If you initially set this delay to zero it is likely to be too short resulting in the image shown on the left Jump Delay Jump Delay Too Short Too Long Figure 63 Jump Delay Defects g the Jump delay is too short the line at the start of the V will be bent the direction of the jump that preceeded it If the delay is too long the start of the V might be burned in However with the Laser On delay set properly no noticeable artifact is produced although the mirrors dwell there for too long a time This is not a concern just yet as it will be properly handled during the fine adjustment stage h Adjust the Jump delay to produce a properly marked V shape Figure 64 Jump Delay Adjustment 3 Make fine adjustments of laser delays a Now that the delays are set to produce a reasonable mark it is time to set them closer to our required parameters
85. the window Figure 110 Adjust Tab 3 Select the Edit Reset correction table menu option to enable the Mirrors and Lens controls CTI Correction Table Editor 2 1 Measure Show Configure Operate Boot time correction table adjustments Synthesize baseline corrections Reset correction table Reset user error measurements Reset focal plane tip Reset flat bed scanner calibration D 2 Figure 111 Edit Reset correction table 4 Start by switching on the Lens correction to introduce radial lens distortion compensation Switching Lens correction on will also trigger a dialog box that queries you to enable auto scaling of the table contents Auto scaling alters the table contents to ensure that all galvo commands that emerge from the run time table computation are physically attainable This is explained in more detail in Table Auto Scaling on page 76 5 Adjust the lens correction factor then exit the editor accepting the changes and loading the new table to the controller Mark the pattern again and examine the top and bottom edges Usually larger factor values will push the corners away from the center of the field 6 Repeat this process until these two edges are straight ignore the left and right edges for now Figure 112 Lens Distortion Correction P0900 0157 Revision D Page 67 e Cambridge Calibration Wizard 7 Now switc
86. uc TP 5 Default Data Types in XY Plot View 75 Lens Barrel Distortion VISUAIIZAQUON 6 Aulto Scale Warning amp Dialog BOX it i E a HH FE LUE REESE SER dA Sau ER EROS 76 Lens Barrel Corrections Visualization 77 Combined Pincushion amp Barrel Corrections Visualization 77 Table 1 Revision history A 2 14 2012 10 16 2012 09 26 2013 04 03 2014 05 12 2014 P0900 0157 Revision D Page 6 Calibration Wizard G Cambridge Technology User Manual Introduction A correction table is used by a scan controller to compensate for projection distortions due to physical geometry of the steering system non ideal opto mechanical fabrication tolerances electrical non linearity of the galvanometer position control system lens radial distortion system misalignment and scaling errors The process of creating a correction table is iterative as depicted in Figure 1 below
87. vectors are controlled via the Radius and Zoom controls in the View controls section located at the bottom of the viewing area In the Data to View area you can select what information is displayed Table Data is displayed by default You can also visualize patterns in imported measurement data and numerical analysis model predictions of that data At the bottom of the Data to View area is a statistics box that shows information about the data being viewed XY Plot View An alternative view of the distortion correction data is in X Y Plot mode To see the X Y Plot the user needs to turn on Advanced Usage Mode Remember Advance Usage Mode is only for the user who is using Calibration Wizard for advanced study of Distortion or correction For general correction files Advanced user Mode is not required To turn on Advanced Usage Mode select Configure Advanced usage mode from the menu bar of the Correction Table Editor File Edit Measure Show Operate Help lt Use multi dimensional model 4 5 1000 Use hardware behavior model lt Use 16 bit addressing User adjustments Use 20 bit addressing 1 Offset RTC Compatibility 0 949 TEM Advanced usage mode nid at lens nrniectinn limit Correction Table ID jas Figure 125 Configure Advanced usage mode P0900 0157 Revision D Page 74 Cambridge Technology G Calibration Wizard User Manual Th
88. vide a brief overview of the creation of a new correction table A separate overview is provided for 2 Axis configurations and for 3 Axis ones as a 3 Axis configuration requires a few additional steps This high level overview is useful for understanding the full process and it also serves as a check list for experienced users The chapters that follow describe each of the process steps in detail If you use the manual on a computer use the links to jump from the overview into the detailed section of each step and then back to the overview If you prefer a printed version identify the sections that are relevant for your situation and rearrange the printed pages to create your own manual To create a new correction table Follow the full process without skipping a step To adjust a previously saved correction table To perform a complete adjustment of the correction table skip to the Create correction table step of the relevant overview in the following pages Click on the Edit table button to invoke the CTI Correction Table Editor window 1 To perform a simple adjustment of the correction table skip to the Adjust correction table step of the relevant overview in the following pages Click on the Edit corr table button to invoke the CTI Correction Table Editor window P0900 0157 Revision D Page 11 Cambridge Calibration Wizard Technology User Manual 2 Usethe File Load Correction table From local f
89. well connected and not over burnt The best row identifies the best Laser Off Delay 6 In the above example the best values will be Pipeline Delay 50us and Laser Off Delay 100 Set these values as your new center values reduce the delta to get better resolution and mark again If you intend to use Velocity Compensation change its mode to the desired one and repeat the process several times to achieve ideal settings P0900 0157 Revision D Page 40 Cr Cambridge Calibration Wizard Technology User Manual Setting Application Delays To set the Application delays we will be using the V Test Pattern on the right The V Test pattern is a series of marks and jumps that is set up to highlight the effect of the various delays It contains small square two V shapes one pointing down and the other pointing up and two lines connecting the tip of one V with the middle of the other at both the top and bottom To avoid confusion due to random irregularities two or three V Test patterns should be used as seen in the image below E L Vtest 1 Vtest 2 Vtest 3 Figure 58 V Test 3 Pattern Array To properly use the process you need to know the path the laser follows for each jump and mark For that we will label each point where a delay might be observed with a letter and number each of the V Test patterns in the array We will also depict a jump as a dashed line and a mark as a solid line During the process

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