- Physik Instrumente
Contents
1. custom models with two E 618 10 modules 220 VAC to 240 VAC 2 x IEC TAAH 250 V slow blow 100 VAC to 120 VAC 2 x IEC T8AH 250 V slow blow IEC fuses are cited other fuse standards may require higher nominal current rating Rotate the fuse carrier so that the valid voltage setting 115 V or 230 V will show through the window when the door is closed Reinstall the carrier and close the door 3 2 Cleaning The outside surface of the chassis can be cleaned using mild detergents or disinfectant solutions Organic solvents must not be used WWW pi ws E 618 PZ221E Release 1 0 0 Page 23 Troubleshooting Piezo Nano Positioning PI 4 Troubleshooting 4 1 Miechanics Does not Move W Check the connecting cables W Check the analog control signal CONTROL INPUT and DC OFFSET setting See p 17 for more information m The piezo voltage output PZT socket may be deactivated due overheating of mechanics and or electronics See p 21 for more information 4 2 The TEMP OFL LED Lights W The connected temperature sensor is reporting 150 C and the piezo voltage output has thus been shut off Turn off the E 618 Wait until the temperature at the mechanics has dropped before powering the E 618 up again 4 3 Customer Service Still having problems Call your local distributor or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products2. the use of a temperature sensor PT1000 on the piezo actuator is recommended to avoid destruction of the piezo due to heat generation See p 15 for details Connect the piezo system or actuator to the E 618 via the PZT Lemo socket on the front panel E 618 amplifiers output high voltages and high currents which can cause death or injury Take special care if connecting products from other manufacturers Follow general accident prevention rules Modifications of high voltage connectors must be carried out by adequately trained and educated personnel If your PICMA piezo actuator with high current termination electrodes is not equipped with a connector you have to attach a suitable connector according to the type and pinout of the PZT socket shown below A connecting cable with open end for soldering piezo actuators can be ordered separately order No E 618 X11 PZT socket on E 618 PZT Out Type LEMO 30 to EGG 1B 302 CLL with 2 conductors and a shield 130 V PGND Amplifier socket front view Pin Assignments PZT Out Piezo output 30 to 130 V PGND Power ground Housing Cable shield for protective ground WWW pi ws E 618 PZ221E Release 1 0 0 Page 15 Operation Piezo Nano Positioning PI 2 7 Temperature Sensor Connection WWW pi ws E 618 amplifier modules are equipped with a temperature monitoring circuit to avoid overheating of the connected mechanics It can be used with PT1000 tempera
3. 15 VA no load 160 VA max load Deactivation of the piezo voltage output at 85 C internal temperature overtemp protection for electronics or if 150 C are measured by the temperature sensor at the piezo actuator 5 2 Frequency Response Diagram 160 140 120 100 80 60 Amplitude V peak peak 40 20 0 j 10 10 10 Frequency Hz Figure 5 E 618 10 operating limits with various piezo loads open loop capacitance is measured in uF WWW pi ws E 618 PZ221E Release 1 0 0 Page 26 Technical Data Piezo Nano Positioning PI 5 3 Block Diagram E 618 10 Amplifier CONTROL INPUT DC OFFSET Analog Control Signal TEMP OFL oo Figure 6 E 618 10 block diagram www pi ws E 618 PZ221E Release 1 0 0 Page 27 Technical Data Piezo Nano Positioning PI 5 4 Signal Path with Servo Controller and PC Interface Modules The block diagram below shows the signal path for the E 618 1G model upgraded with an E 509 servo control module and an E 517 interface and display module FRONT PANEL REAR CONNECTOR PC oen TCPAP SERVO ON OFF CONNECTION USB RS 232 D A 18 bit e IEEE 488 TARGET OUT 3 to 13 V TARGET IN 3to 13 V E 517 Computer Interface Display CONTROL QUT CONTROL IN P T D HV OUT CONTROL IN E 618 10 Amplifier Module SERVO ON OFF ort SERV E B02 SERVO y C
4. Keep the instruction readily available close to the device in a safe place When the instruction is lost or has become unusable ask the manufacturer for a new copy Add all information given by the manufacturer to the instruction e g supplements or Technical Notes The E 618 amplifier is capable of generating high output voltages and high output currents It may cause serious or even lethal injury if used improperly Working with high voltage amplifiers requires adequately trained operating personnel Strictly observe the following W Do not touch the pins of the LEMO connector which carries the piezo output voltage The high voltage output may be active whenever the device is turned on The output value depends on the control input Voltages between 30 V and 130 V can be present on the LEMO connector B The E 618 amplifier does not contain any user serviceable parts Never disassemble the device Hazardous voltage can be present on the internal components h All work done with and on the E 618 10 amplifier module requires adequate knowledge and training in handling high voltages and high currents Allow operation of the E 618 10 amplifier module only if installed properly W Install E 618 10 in a shielded EMC compatible enclosure B Provide suitable line filter and fuses for the line voltage connection and install them in the enclosure WWW pi ws E 618 PZ221E Release 1 0 0 Page 5 Introduction WARNING WWW p
5. Make sure that the full voltage swing is attained If an E 509 servo module is installed the SENSOR MONITOR signal will show a voltage from about 0 up to 10 V and then 0 V again proportional to the piezo extension Example A piezo actuator with a nominal travel of 100 uim shows a sensor monitor signal of 1 5 V at 15 um For an actuator with 30 um nominal travel 1 5 V at sensor monitor would correspond to 4 5 um 15 of 30 um 9 If desired connect a signal source to the CONTROL INPUT BNC socket You can adjust the resulting analog control signal with the DC OFFSET potentiometer See Control Signal Connection p 17 for details E 618 1G models equipped with E 509 servo control modules If you switch to closed loop operation servo ON the yellow OFL overflow LED on the E 509 module may light up In this case a zero point adjustment is necessary Follow the instructions for zero point adjustment given below To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range 3 to 13 V WWW pi ws E 618 PZ221E Release 1 0 0 Page 19 Operation Piezo Nano Positioning PI 2 11 Zero Point Adjustment in Closed Loop Operation with E 509 WWW pi ws Zero point adjustment on the E 509 sensor and servo control module has the following goals m Making the full travel range available If the electrical zero point is adjusted properly the full output voltage range of the am
6. and Line Power Fuses essen 22 S2 Sag EE 23 Troubleshooting 24 41 Mechanics Does not Move rnnr nenn n nenn n ena 24 42 The TEMP ee BR GA Be LC 24 43 Customer SONIC EE 24 Technical Data 25 bl Specifications E 25 52 Frequency Response Diagram esee 26 53 Block Dia jt m PM m 27 54 Signal Path with Servo Controller and PC Interface Modules 28 Appendix 29 61 Lifetime of PICMA Actuators A 29 62 Power Bandwidth essien eee ee ienaa aapne Hee 31 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Overview WWW pi ws The E 618 10 high power amplifier module is specifically designed for ultra high dynamics operation of piezo actuators It can output and sink a peak current of 20 A and an average current of 800 mA in a voltage range of 30 to 130 V Besides the amplifier module three standard configurations are available m 2 E 618 10G is a bench top amplifier in a 9 5 chassis for open loop operation 1 channel B E 618 1G is the amplifier module in a 19 rackmount chassis that can hold additional E 509 controller and E 517 interface display modules m E 618 20G is a 2 channel version in a 19 rackmount chassis Fast Switching The amplifier features a high bandwidth of more than 15 kHz combined with extremely short rise times in the microsecond range and a high output power This makes it ideal for fast switching applications for valves pumps for microstructure an
7. be used with the E 618 Contact your PI sales engineer or write info pi ws For dynamic applications or continuous operation the use of a temperature sensor PT1000 on the piezo actuator is recommended to avoid destruction of the piezo due to heat generation See p 16 for details E 618 PZ221E Release 1 0 0 Page 6 A Introduction Piezo Nano Positioning PI 1 4 Model Survey and Upgrades WWW pi ws The E 618 series of amplifiers controllers is based on the following module E 618 10 High Power Piezo Amplifier Module 1 Channel 30 to 130 V 20A The E 618 10 module can be ordered separately and is furthermore available integrated in the following standard configurations E 618 10G E 618 1G E 618 20G High Power Piezo Amplifier 1 Channel 30 to 130 V 20 A 9 5 Chassis High Power Piezo Controller 1 Channel 30 to 130 V 20 A 19 Chassis Upgradable with a servo control module E 509 and or a computer interface and display module E 517 E 515 for display only All modules ordered come installed directly in the 19 chassis If the servo module and a piezo actuator are ordered with the system your E 618 1G will be fully calibrated before being shipped High Power Piezo Amplifier 2 Channels 30 to 130 V 20 A 19 Chassis Contact your PI sales engineer or write info pi ws if you want to upgrade your E 618 1G Any additional modules are described in their own separate manuals The fo
8. below and then operate the system as described in the E 517 User Manual 1 Make sure the E 618 is connected to line voltage but powered down See Line Voltage Connection p 14 for details 2 Connect the piezo actuator to the PZT socket of the E 618 3 If the piezo actuator is equipped with a PT 1000 temperature sensor connect this sensor to the TEMP SENSOR socket of the E 618 Otherwise connect the included dummy plug order No 000016103 to this socket 4 For closed loop systems only E 618 1G with E 509 module see also the E 509 User Manual 41 Connect the sensor cable to the corresponding socket E 618 PZ221E Release 1 0 0 Page 18 Operation Piezo Nano Positioning PI 42 Ifyou are using the sensor monitor signal connect your appropriate electronics to the SENSOR MONITOR socket 43 Set SERVO toggle switch on the servo module OFF 5 Turn the DC OFFSET potentiometer fully counterclockwise CCW 6 Make sure that the voltage at CONTROL INPUT is set to 0 V 7 Turn on the E 618 The green POWER LED will light up 8 Command the first motion of the piezo actuator by turning the offset potentiometer fully clockwise CW to run the actuator over the nominal travel range then turn the potentiometer back fully CCW If an E 517 interface and display module is installed watch the voltage and if an E 509 servo module is present the position on the display to check whether the system is operating properly
9. rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 23 June 2010 Document Number PZ221E BRo Release 1 0 0 E 618 User PZ221E100 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 618 High Power Piezo Amplifier Controller It assumes that the reader has a fundamental understanding of motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 618 High Power Piezo Amplifier Controller as well as the procedures which are required to put the system into operation Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or ap
10. the DC OFFSET potentiometer fully clockwise 10 V and then back fully counterclockwise 0 V to exercise the mechanics Adjust the ZERO potentiometer on the E 509 until a sensor monitor signal of 1 V is measured by the precision voltmeter on the SENSOR MONITOR socket E 618 PZ221E Release 1 0 0 Page 20 Operation Piezo Nano Positioning PI After successful zero point adjustment the OFL overflow LED on the E 509 module should no longer glow in closed loop operation Permanent glow of this LED in spite of zero point adjustment may indicate hardware failure To avoid an overflow of the amplifier in open loop operation do not exceed the allowable control input range 3 to 13 V 2 12 Protection Against Overheating To protect the system against overheating the piezo voltage output on the PZT socket is deactivated automatically in the following cases m APT1000 temperature sensor connected to the E 618 detects a temperature of 150 C on the mechanics In this case the red TEMP OFL LED on the front panel lights up B The internal temperature sensor of the E 618 detects a temperature of 85 C at the electronics In this case the red TEMP OFL LED on the front panel does not light up If the piezo voltage output has been deactivated the piezo actuator will no longer move Proceed as follows 1 Turn off the E 618 for a cooling phase 2 Wait until the temperature has dropped on the mechanics and or inside th
11. to peak E 618 PZ221E Release 1 0 0 Page 31
12. ONTROL QUT T s ON OFF SLEW RATE ONTAOL OU P I SERVO 3to 13 V SENSOR DIEM SENSOR DUT UT E 509 SERVO CONTROLLER Figure 7 E 618 1G Interconnections between E 517 Interface power amplifier E 618 10 and E 509 Servo Controller www pi ws E 618 PZ221E Release 1 0 0 Page 28 Appendix Piezo Nano Positioning PI 6 Appendix 6 1 Lifetime of PICMA Actuators The following factors can have an impact on the actuator lifetime and must be considered Applied voltage Temperature Relative humidity The effect of each individual factor on the lifetime can be read off the diagrams shown below The lifetime calculated in hours simply results as the product of all three values read off the diagrams The impact of the applied voltage is particularly important With decreasing voltage the lifetime increases exponentially This must always be taken into consideration in an application The recommended maximum range of the control input voltage for E 618 therefore is 2 to 12 V resulting in a piezo voltage range of 20 to 120 V A control input range of 3 to 13 V is possible results in 30 to 130 V piezo voltage but will reduce the actuator lifetime accordingly Lifetime Factor Au Piezo Voltage V Fig 1 Interdependency between the mean MTTF of a PICMA actuator and the value of the voltage applied WWW pi ws E 618 PZ221E Release 1 0 0 Page 29 Appendix www pi ws Piezo Nano Positioni
13. Piezo Nano Positioning PI PZ221E User Manual E 618 High Power Piezo Amplifier Controller Release 1 0 0 Date 23 June 2010 This document describes the following product s LLL A tYYyy See B E 618 10 High Power Piezo Amplifier Module 1 Channel 30 to 180 V 20A B E 618 10G High Power Piezo Amplifier 1 Channel 30 to 130 V 20 A 9 5 Chassis B E 618 1G High Power Piezo Controller 1 Channel 30 to 130 V 20 A Controller amp Interface Display Upgrade possible 19 Chassis B E 618 20G High Power Piezo Amplifier 2 Channels 30 to 130 V 20 A 19 Chassis Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 299 a info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PILine8 PIFOC PiezoWalk8 NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties LabVIEW The products described in this document are in part protected by the following patents US Patent No 6 950 050 Copyright 2010 by Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all
14. ase 1 0 0 Page 16 Piezo Nano Positioning PI Operation 2 8 Control Signal Connection 2 8 1 Analog Operation All E 618 versions can be operated by an analog control signal The output voltage if in open loop operation or the actuator position closed loop operation is directly proportional to this analog control signal The analog control signal consists of two components Analog control signal CONTROL INPUT DC OFFSET where CONTROL INPUT is the voltage connected to the corresponding BNC socket on the front panel DC OFFSET is the DC offset voltage set via the corresponding potentiometer on the front panel 0 to 10 V 2 to 12 V is the recommended range for the analog control signal resulting in 20 to 120 V piezo output voltage A range of 3 to 13 V is possible and will result in 30 to 130 V output voltage but working with increased output voltage will decrease actuator lifetime See Lifetime of PICMA Actuators on p 29 for details The signal applied to the CONTROL INPUT BNC socket can be generated using a DAC board in a PC PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI In addition Pl s patented HyperBit technology for providing position resolution higher than that of the D A board is included in the E 500 ACD driver set see Model Survey and Upg
15. d material testing Furthermore it is perfectly suited for systems for active vibration control Piezo Overtemperature Protection To protect the mechanics especially in high dynamics applications the E 618 features a temperature sensor input and controller circuit that shuts down the amplifier if the piezo actuator exceeds the maximum temperature threshold Analog and Digital Control All E 618 amplifiers come with a high bandwidth analog interface An optional 24 bit computer interface for integration in E 618 1G models is available as E 517 Ceramic Insulated Piezo Actuators Provide Superior Lifetime The highest possible reliability is assured by employing PICMA multilayer piezo actuators PICMAQ actuators have a ceramic only insulation which makes them resistant to ambient humidity and leakage current failures They are thus far superior to conventional actuators in reliability and lifetime Note Spezial Connector Required The high electrical currents require adequate connectors and cabling Therefore standard piezo systems and actuators have to be adapted E 618 PZ221E Release 1 0 0 Page 3 Introduction Piezo Nano Positioning PI 1 2 Prescribed Use Based on their design and realization E 618 High Power Piezo Amplifiers are intended to drive capacitive loads in the present case piezoceramic actuators with high current termination electrodes E 618s must not be used for applications other than stated in this manual e
16. done with and on the E 618 10 amplifier module requires adequate knowledge and training in handling high voltages and high currents Allow operation of the E 618 10 amplifier module only if installed properly W Install E 618 10 in a shielded EMC compatible enclosure W Provide suitable line filter and fuses for the line voltage connection and install them in the enclosure W Connect pin 32 of the 15 pin main connector on the rear of the E 618 10 amplifier module to a protective earth conductor WWW pi ws E 618 PZ221E Release 1 0 0 Page 10 Operation WWW pi ws Piezo Nano Positioning PI CAUTION Do not cover the ventilation slots on the top side of the E 618 Place the system in a location with adequate ventilation to prevent internal heat build up The device needs to be installed horizontally with 3 cm air circulation area Vertical mounting prevents internal convection Insufficient air flow will cause overheating and premature failure When installing the E 618 10 amplifier module make sure that the enclosure is equipped with suitable ventilation slots for free air circulation and internal convection For installing an E 618 10 amplifier module proceed as follows 1 Provide a suitable enclosure with connections for the signals on the rear 15 pin main connector of the E 618 module See section 2 3 for pinout of the 15 pin main connector and section 2 5 for line voltage connection details For connection inside t
17. e electronics 3 Power up the E 618 again Permanent deactivation of the piezo output voltage due to overheating may indicate hardware failure WWW pi ws E 618 PZ221E Release 1 0 0 Page 21 Maintenance Piezo Nano Positioning PI 3 Maintenance WARNING Before changing the AC fuses or cleaning the E 618 switch the device off and disconnect it from the line voltage 3 1 AC Power and Line Power Fuses www pi ws Unless otherwise requested the unit will be set up for the power predominant in your country New line power fuses are required when changing the supply voltage CAUTION Both fuses are active and have to be checked if there is a fault Figure 4 Fuse carrier Figure 3 Position of the line fuses and fuse carrier only one of two fuses visible E 618 PZ221E Release 1 0 0 Page 22 Maintenance Piezo Nano Positioning PI To access the line fuses proceed as follows 1 2 Switch off the E 618 and remove the line cord Wait a minute to be sure that any residual voltage has dissipated Pry open the door that covers the fuse carrier and pry out the fuse carrier see figures above Be sure to replace both fuses with fuses of the type appropriate for the new voltage Single channel systems E 618 10G E 618 1G custom models with one E 618 10 module 220 VAC to 240 VAC 2 x IEC T2AH 250 V slow blow 100 VAC to 120 VAC 2 x IEC T4AH 250 V slow blow Two channel systems E 618 20G
18. ected to the E 618 does not feature a temperature sensor the included dummy plug must be used CONTROL BNC connector for control input voltage INPUT 2 to 12 V is the recommended control input range resulting in 20 to 120 V piezo output voltage without DC offset potentiometer usage 8 to 13 V control input are possible and will result in 30 to 130 V output voltage without DC offset potentiometer usage but working with increased output voltage will decrease actuator lifetime See Lifetime of PICMA Actuators on p 29 for details PZT Lemo socket for piezo stage carries the output voltage for the piezo actuator 30 to 130 V in the stage with security cover E 618 1G models may be equipped with optional servo control E 509 and PC interface display E 517 E 515 modules The controls of these modules are described in their own separate manuals WWW pi ws E 618 PZ221E Release 1 0 0 Page 13 Operation Piezo Nano Positioning PI 2 5 Line Voltage Connection Models with Chassis Unless you request otherwise upon delivery the E 618 will be set up for the voltage predominant in your country either 110 V 50 60 Hz or 230 V 50 60 Hz To adapt the E 618 to a different line voltage the line power fuses must be replaced See AC Power and Line Power Fuses p 22 for instructions and for the required fuse types Connect the included line cord from the E 618 rear panel to an appropriate power ou
19. ely inside the user housing E 618 10G 1G and 20G models in addition come with 3763 Line cord Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately Save all packing materials in case the product needs be shipped again WWW pi ws E 618 PZ221E Release 1 0 0 Page 9 Operation Piezo Nano Positioning PI Operation 2 1 Calibrated System If an E 618 1G with an included servo module is ordered together with a piezo actuator the system will be fully calibrated at PI according to your specifications before being shipped and will come with a calibration information sheet Calibration should only be done by qualified authorized personnel after consultation with Pl otherwise internal configuration data may be destroyed by erroneous operation If you inform PI about your application your E 618 1G will be fully calibrated before being shipped It is usually not necessary for you to do anything more than adjust the zero point before operating the system Do not interchange controller whole devices or individual modules and or piezo stages if they are matched and calibrated together Respect the assignment of the piezo actuators to the individual controller channels as indicated by the serial numbers on the labels affixed to the devices With multi axis stages respect the channel axis assignments indicated by the cable labeling 2 2 Installation All work
20. from PI For order numbers see below E 500 ACD CD with LabVIEW analog driver set available free of charge upon request The PI LabVIEW drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards E 500 HCD Access to HyperBit Functionality for Enhanced System Resolution Supports Certain D A Boards Pls patented HyperBit technology for providing position resolution higher than that of the D A board is included in the E 500 ACD driver set Activating HyperBit requires purchase of the password which can be obtained from PI under Order No E 500 HCD WWW pi ws E 618 PZ221E Release 1 0 0 Page 8 Piezo Nano Positioning PI Introduction 1 6 Unpacking Unpack the E 618 with care Compare the contents against the items covered by the contract and against the packing list The following components are included with all E 618 models PZ221E User manual for E 618 this document 000016103 Dummy plug for the temperature sensor socket must be used when the piezo actuator connected to the E 618 does not feature a temperature sensor E500T0011 Technical Note for LabVIEW Analog Driver Set E 618 10 amplifier modules in addition come with 824005964 Backplane connector type H 15 pole female contacts with straight 4 0 mm solder pins type Harting 0906 F127 200 matches the 15 pin main connector of E 618 for installation complet
21. he enclosure you can use the included backplane connector or other suitable female multipoint connectors See the note below for details and recommendations 2 Insert the module into the enclosure Make sure that its 15 pin main connector is fitted in the backplane connector 3 Fix the module to the enclosure using the four included cross head screws on the front panel corners NOTE Details regarding the included backplane connector Pl order No 824005964 type H 15 pole female contacts with straight 4 0 mm solder pins Harting 0906 F127 200 Other recommended female connectors according to EN 60603 DIN 41612 H 15F Manufacturer Schroff order numbers Schroff 69001 981 solder pins length 4 mm 0 8 mm x 0 8 mm straight 69001 980 solder pins length 10 mm 0 8 mm x 0 8 mm straight 69001 733 FASTON connector 6 3 mm x 0 8 mm straight E 618 PZ221E Release 1 0 0 Page 11 Operation Piezo Nano Positioning PI 2 3 15 Pin Main Connector on E 618 10 Modules Connector type 15 pin male connector type H with protective earthing contact 232 according to EN 60 603 DIN 41 612 4 GND power 6 15 V 0 3 A e g for a display electronics 8 15 V 0 3 A e g for a display electronics 10 5 V 1 0 A e g for a display electronics 1 GND measurement 1 2 4 Control output CONTROL INPUT DC OFFSET 16 Monitor of piezo output voltage 196 of PZT output 18 Control input to amplifier stage 20 S
22. i ws Piezo Nano Positioning PI W Connect pin 32 of the 15 pin main connector on the rear of the E 618 10 amplifier module to a protective earth conductor Connect the AC power cord of the E 618 to the wall socket 220 VAC to 240 VAC or 100 VAC to 120 VAC New line power fuses are required when changing the supply voltage Both fuses are active and have to be replaced or checked if there is a fault See AC Power and Line Fuses p 22 for how to replace the line power fuses Connect an E 618 10 amplifier module to the wall socket only if installed properly To disconnect the system from the supply voltage completely remove the power plug from the wall socket Install the system near the AC outlet and such that the AC power plug can be reached easily CAUTION Do not cover the ventilation slots on the top side of the E 618 Place the system in a location with adequate ventilation to prevent internal heat build up The device needs to be installed horizontally with 3 cm air circulation area Vertical mounting prevents internal convection Insufficient air flow will cause overheating and premature failure When installing the E 618 10 amplifier module make sure that the enclosure is equipped with suitable ventilation slots for free air circulation and internal convection CAUTION Use only PICMA piezo actuators with high current termination electrodes Standard piezo systems and actuators have to be adapted before they can
23. in the system W Current firmware version of the controller W Software version of drivers and or host software m Operating system on host PC WWW pi ws E 618 PZ221E Release 1 0 0 Page 24 PI Technical Data Piezo Nano Positioning 5 Technical Data 5 1 Specifications E 618 10 Function Power amplifier module for PICMA multilayer piezo actuators Amplifier Input voltage Output voltage Peak output power Average output power Peak current Average current Current limitation Voltage gain Ripple noise 0 to 100 kHz Input impedance Interfaces and operation Piezo connector Control input Temperature sensor piezo actuator Display DC Offset E 618 PZ221E Release 1 0 0 2 to 12 V 30 to 130 V gt 3200 W lt 0 3 ms 100 W gt 0 3 ms gt 20 A lt 0 3 ms 0 8 A gt 0 3 ms Short circuit proof 10 0 1 200mVpp 24mVrms no load 2mVrms 1pF 100 kO LEMO EGG 1B 302 CLL with security cover BNC PT 1000 LEMO socket deactivation of the piezo voltage output at 150 C actuator temperature Power Temp Overflow LEDs 10 turn pot adds 0 to 10 V to Control In Page 25 Technical Data Piezo Nano Positioning PI Miscellaneous Operating temperature range 5 C to 50 C output 1096 derated over 40 C Dimensions 215 x 123 x 185 mm insert for 42HP 3U 19 rackmount chassis Mass 2 65 kg Operating voltage 100 to 120 or 220 to 240 VAC selectable Max power consumption
24. llowing modules are available E 509 C1A E 509 L1 E 509 S1 E 517 11 E 515 01 Sensor Servo Controller Module for capacitive LVDT or SGS position sensors respectively 1 channel to eliminate drift and hysteresis from positioning operations Interface Display Module 24 bit D A TCP IP USB RS 232 IEEE 488 Single Channel displays the current voltage and if servo module also present the position of the PZT communicates with a host PC for remote control of the E 618 DLL LabVIEW drivers and convenient interactive user interface software are provided Display Module for PZT Voltage and Position 1 channel E 618 PZ221E Release 1 0 0 Page 7 Introduction Piezo Nano Positioning PI 1 5 Additional Components Contact your PI sales engineer or write info pi ws if you need one of the additional components listed below Extension cables for the piezo stages E 618 X11 Piezo cable 1 m Lemo 2 pin open end for soldering piezo actuators E 618 X01 Extension cable Lemo 2 pin m f 1 m E 618 X03 Extension cable Lemo 2 pin m f 3 m The E 618 can be controlled via a signal connected to its analog input line see Analog Operation p 17 for more information This signal can for example be generated using a D A board in a PC PI offers a LabVIEW driver set which can be used with certain D A boards It is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers
25. ng PI Lifetime Factor Ar Fig 2 Interdependency between the mean MTTF of a PICMA actuator and the ambient temperature Fig 3 Interdependency between the mean MTTF of a PICMAQO actuator and the relative humidity Example The simple formula MTTF Ay A Ar provides a quick estimate of the reliability in hours For example the values for 75 RH Ar 14 100 VDC Ay 75 and 45 C A12100 result in an approximate MTTF of 105 000 h i e more than 11 years see markings on the diagrams Read the Tutorial Piezoelectrics in Positioning in the PI Catalog for detailed information E 618 PZ221E Release 1 0 0 Page 30 Appendix Piezo Nano Positioning PI 6 2 Power Bandwidth WWW pi ws The maximum frequency for sinusoidal operation of the E 618 depends on the actuator capacitance and on the piezo output voltage It is given by the following equation B P CFU nax a D p e fa maximum operating frequency Hz P average power W 100 W with E 618 10 amplifier modules C piezo actuator capacitance Note that the actuator capacitance values given in the technical data tables are small signal values For large signal conditions actuator deflection is at least 10 of the travel range multiply the small signal capacitance value by 2 U aax nominal voltage of the amplifier V 180 V with E 618 10 U peak to peak drive voltage V i e the piezo output voltage peak
26. plication hints The optional components which might be mentioned in this document are described in their own manuals All documents are available as PDF files Updated releases are available for download at www pi ws http www pi ws or via e mail contact your Physik Instrumente Sales Engineer or write info pi ws mailto info pi ws Related Documents E 509 User PZ77E E 517 User PZ214E E 515 User PZ68bE gt gt Contents Introduction 3 TT e 3 12 Prescribed se nennen nennen rene 4 Ti3 oSately P FecalltioriS EE 5 14 Model Survey and Upogrades AANEREN 1 5 Additional Gomponents oret rertece a a E eb d een 8 TO Upa kg eene Canta toc bien ees headset uet based eS 9 Operation 10 2 1 lee E RE EE 10 ue EE 10 23 15 Pin Main Connector on E 618 10 Modules 0snsnnnnssseseeerenneea 12 24 Front Panel Elements 13 25 Line Voltage Gegner dee 14 26 Piezo Actuator Connection iiit c p eodera is sia guia e paese 15 27 Temperature Sensor Connection 16 28 Control Signal Connection sssssseennn 17 28 1 Analog Operation aisr tct e e E ete tete 17 282 Remote Control via Computer Interface 17 29 Mod s ET Ee EE 18 291 Open Loop Operaton essen 18 292 Closed Loop Operation ssssssss eene 18 210 First St ps EAEE 18 241 Zero Point Adjustment in Closed Loop Operation with E 509 20 2 12 Protection Against Overheating kuk 21 Maintenance 22 31 AC Power
27. plifier can be used in closed loop operation This prevents overflow conditions from occurring Preserving the piezo actuators in the mechanics The point of zero sensor readout should correspond to zero or a small negative output voltage This technique can reduce the average applied voltage without loss of displacement and thereby increase piezo lifetime There might be some small deviation of the electrical zero point caused by thermal drift or changes in mechanical loading Let the system warm up for several minutes before setting the zero point See also the E 509 User Manual PZ77E If an E 517 interface and display module is present in the system zero point adjustment can be performed without additional equipment see the E 517 user manual for further information Otherwise a precision voltmeter is required for zero point adjustment How to perform zero point adjustment in analog open loop operation 1 Make sure the piezo actuator is mounted in the same way and with the same load as during normal operation in the application Make sure that the analog signal on CONTROL INPUT is 0 V and turn the DC OFFSET potentiometer fully CCW Connect a precision voltmeter to the SENSOR MONITOR socket on the E 509 front panel Power up the system Set the SERVO toggle switch on the E 509 front panel to OFF If an E 517 interface and display module is present in the system make sure that servo is not set on with the SVO command Turn
28. rades p 7 2 8 2 Remote Control via Computer Interface E 618 1G models equipped with an E 517 computer interface and display module can be controlled from a host computer via the TCP IP USB RS 232 or IEEE 488 PC interface See the E 517 User Manual for details WWW pi ws E 618 PZ221E Release 1 0 0 Page 17 Operation Piezo Nano Positioning PI e 9 Miodes of Operation 2 9 1 QOpen Loop Operation All E 618 versions can be operated in open loop mode Open loop operation means that any control input provided by the user determines the output voltage directly 2 9 2 Closed Loop Operation Closed loop operation requires a position sensor and a servo control module e g E 509 Only E 618 1G models can be upgraded with E 509 modules Closed loop operation means that the user commands the piezo excursion The output voltage required to reach this target position is calculated internally by the servo loop based on the given target and the feedback of the position sensors see E 509 User Manual PZ77E Note In closed loop operation up to 1096 of the amplifier output range may be required for compensating nonlinearity and drift 2 10 First Steps WWW pi ws The following instructions refer to analog operation p 17 of the system If your E 618 is equipped with an E 517 computer interface and display module and you want to control the system via the computer interface perform only steps 1 and 2 of the instructions
29. specially not for driving ohmic resistive or inductive loads Observe the safety precautions given in this User Manual The E 618 may only be used for applications suitable according to the device specifications Operation other than instructed in this User Manual may affect the safeguards provided The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases The E 618 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum specifications for safe operation m Indoor use only m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C W Line voltage fluctuations not greater than 10 of the line voltage W Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 W Degree of pollution 2 These data are no limitations for the specifications in the technical data table p 25 WWW pi ws E 618 PZ221E Release 1 0 0 Page 4 Introduction Piezo Nano Positioning PI 7 3 Safety Precautions Install and operate the E 618 High Power Piezo Amplifier only when you have read the operating instruction
30. tlet E 618 10 Amplifier Modules All work done with and on the E 618 10 amplifier module requires adequate knowledge and training in handling high voltages and high currents Connect an E 618 10 amplifier module to the wall socket only if installed properly B Install E 618 10 in a shielded EMC compatible enclosure W Provide suitable line filter and fuses for the line voltage connection and install them in the enclosure W Connect pin 32 of the 15 pin main connector on the rear of the E 618 10 amplifier module to a protective earth conductor The line voltage connection is to be done via the following pins of the 15 pin main connector pinout on p 12 220 VAC to 240 VAC Use pins 24 30 and 32 100 VAC to 120 VAC Use pins 24 28 and 32 Never connect both pins 28 and 30 at the same time We recommend the following line filter PEOSXDS6B Corcom For the fuses to be used with the line filter see p 22 for an orientation Depending on the design of your system it may be necessary to use other line filters and fuses WWW pi ws E 618 PZ221E Release 1 0 0 Page 14 Operation Piezo Nano Positioning PI e Piezo Actuator Connection CAUTION Use only PICMA piezo actuators with high current termination electrodes Standard piezo systems and actuators have to be adapted before they can be used with the E 618 Contact your PI sales engineer or write info pi ws For dynamic applications or continuous operation
31. ture sensors Connect the PT1000 to the TEMP SENSOR Lemo socket on the front panel of the E 618 When the mechanics connected to the E 618 does not feature a temperature sensor the included dummy plug order No 000016103 must be used When a temperature of 150 C is detected on the mechanics the E 618 temperature monitoring circuit deactivates the output of the amplifier PZT socket and the red TEMP OFL LED on the front panel lights up See p 21 for how to proceed in this case To avoid overheating you can reduce the maximum operating frequency and output voltage The maximum operating frequency and output voltage travel depend on operating conditions such as thermal coupling single or double ended with or without air cooling length to diameter ratio and of course on the driving waveform The maximum possible frequency for a particular system should be determined after the system is set up with the defined operating conditions by slowly running the system up to the point where the controller performs a thermal shutdown It is important to take proper account of the temperature sensor time constant the mechanical characteristics of the system and the amplifier parameters Pini Pin2 Pin3 Figure 1 Temperature sensor connector of the Figure 2 Temperature sensor E 618 10 view from solder side diagram Pin assignment Pin 1 Temp_SA Pin 2 Temp_S Pin 3 GND PE Housing Shield GND PE E 618 PZ221E Rele
32. ync return conductor 22 Sync input TTL 200 Hz 50 duty cycle recommended 30 i i IN Line voltage if set for 220 to 240 VAC 3 Protective earth NOTES The line voltage connection is to be done as follows 220 VAC to 240 VAC Use pins 24 30 and 32 100 VAC to 120 VAC Use pins 24 28 and 32 Never connect both pins 28 and 30 at the same time Pins 14 and 18 must be interconnected Pins 20 and 22 can be used to synchronize the E 618 10 using an external TTL signal If you use an E 517 interface and display module you have to connect it to E 618 10 via pins 4 6 8 10 12 14 16 18 20 and 22 If you use an E 509 servo control module you have to connect it to E 618 10 via pins 4 6 8 12 14 and 18 Pins 20 and 22 only have to be connected with E 509 models for capacitive sensors WWW pi ws E 618 PZ221E Release 1 0 0 Page 12 Operation Piezo Nano Positioning PI 2 4 Front Panel Elements LS P I4 e 30 to 130 V E amp Name Function DC OFFSET 10 turn potentiometer for DC offset POWER LED Green light indicates that the device is powered on green TEMP OFL LED Red light indicates that the temperature on the connected red temperature sensor exceeds 150 C The output voltage for the piezo actuator is then deactivated p 16 TEMP SENSOR Lemo socket for connection of a PT1000 temperature sensor p 16 When the piezo actuator conn
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