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Semiconductor Characterization System Technical Data

1. 4200 SCS Semiconductor Characterization System Technical Data mhz tuum Suami ey iei a 4200 SPEC Rev K c o Q m Z O Eu un 1 888 K EITHLEY us only A GREATER MEASURE OF CONFIDENCE e o Q m Z o LL un 4200 SCS Introduction Configuration Options Hardware Specifications KTE Interactive Software Tools 14 Microsoft Windows 15 The Keithley Interactive Test Environment KITE 22 Keithley User Library Tool KULT 23 System Configuration and Diagnostics KCON 23 Keithley External Control Interface KXCI Support Contracts Value Add Services Upgrades Warranty Information Embedded PC Policy Switch Matrix Support and Configurations Optional Accessories 1 888 KEITHLEY us only Semiconductor Characterization System Technical Data Introduction The Model 4200 SCS provides a total system solution for DC I V C V and pulse characterization and stress measure reliability testing of semiconductor devices and test structures This advanced parameter analyzer provides intuitive and sophisticated capabilities for semiconductor device characterization The 4200 SCS combines unprecedented measurement speed and accuracy with an embedded Windows based PC and the Keithley Interactive Test Environment KITE to provide a powerful single box solution The Keithley Interactive Test Environment allows users to gain familiarity quickly with tasks such
2. Keithley Instruments Inc warrants the Keithley manufactured portion of the hardware for a period of one year from defects in materials or workmanship provided that such defect has not been caused by use of the Keithley hardware which is not in accordance with the hardware instructions The warranty does not apply upon any modification of Keithley hardware made by the customer or operation of the hardware outside the environmental specifications Software Warranty Keithley warrants for the Keithley produced portion of the software or firmware will conform in all material respects with the published specifications for a period of ninety 90 days provided the software is used on the product for which it is intended in accordance with the software instructions Keithley does not warrant that operation of the software will be uninterrupted or error free or that the software will be adequate for the customer s intended application The warranty does not apply upon any modification of the software made by the customer 1 888 K EITHLEY us only www keithley com Semiconductor Characterization System Technical Data Embedded PC Policy Caution Keithley Instruments warrants the performance of the Model 4200 SCS only with the factory approved Windows Operating System and applications software pre installed on the 4200 SCS by Keithley Instruments Systems that have been modified by the addition of un approved third party appli
3. Sheet Graph Status KEITHLE NMOS Drain Family T i D ka o G i a 0 0E 00 Drain Yoltage V Output Files Sheet tab test results can be saved as a Microsoft Excel Workbook or delimited ASCII text file Plots can be saved as bit map image bmp JPEG jpg or TIFF tif files Display e Flat Panel 1024 x 768 resolution e External SVGA 1024 x 768 or 800 x 600 resolution Printers e A generic printer driver is factory installed using standard Windows printer support 1 888 K EITHLEY u s only www keithley com GREATER Example Projects The 4200 SCS includes the following KITE projects to facilitate rapid startup and provide examples for common semiconductor lab applications Default Project Default The default project includes standard tests for MOSFETS BIPOLAR transistors resistors and diodes This project helps users get started quickly Memory Projects These projects test floating gate FLASH and embedded NVM memory They test up to four independent multi level pulse channels with up to 40V pulsing on the gate The waveforms can be predefined or custom These projects also offer three types of DUT setups NAND NOR and switch based Flash NOR Flash NAND Flash Switch These projects provide the ability to send n pulses to the DUT then perform a V sweep The tests in these projects support four and eight terminal testing and allow investigation int
4. dual sweep and selecting Engineering labels for the axes Demo PulseIV This project demonstrates PIV pulse I V tests including tests that generate I vs Vp graphs and I vs V graphs as well as tests that show the effect of self heating on devices due to DC voltages It also provides a test that demonstrates the oscilloscope Demo QPulseIV This project demonstrates quiescent Q point tests utilizing the PIV hardware Demo ALL This project collects more than 400 different test libraries in one convenient location 1 888 K EITHLEY u s only www keithley com GREATER Automation Test Sequencing The Keithley Interactive Test Environment KITE provides point and click test sequencing on a device a group of devices subsite module or test element group or a user programmable number of probe sites on a wafer Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober operations during the test sequence Supported Probers Manual Prober Use the manual prober driver to test without utilizing automatic prober functionality Manual prober replaces all computer control of the prober with that of the operator At each prober command a dialog box will a
5. n A C n 2 D Pr Un U xl je je N sy E DS ilo SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Additional DC SMU Specifications GENERAL MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU TEMPERATURE RANGE 3c both are four quadrant source sink operation Operaning W tott DC FLOATING VOLTAGE COMMON can be floated 32 volts f hassi a men a NG V can be floated 32 volts from chassis HUMIDITY RANGE 5 Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE VOLTAGE MONITOR SMU in VMU mode nca at Measure Storage 0 to 4600m o Voltage Measure Accuracy POWER REQUIREMENTS 100V to 240V 50 to 60Hz i 0 Range Resolution rdg volts MAXIMUM VA 1000VA O a 200 pv uir RN d REGULATORY COMPLIANCE I 20 V 20 uV 0 01 1 mV Safety Low Voltage Directive 73 23 EEC a 2 V 2 uV 0 012 110 uV EMC Directive 89 336 EEC 20m NF 80 MV DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 17 in x 8 O INPUT IMPEDANCE gt 108Q in x 22 in 2 INPUT LEAKAGE CURRENT lt 30pA WEIGHT approx 29 7kg 65 5 lbs for typical configuration of four SMUs uU MEASUREMENT NOISE 0 02 of measurement range rms I O PORTS USB SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard Un e DIFFERENTIAL VOLTAGE MONITOR NOTES cr Differential Voltage Monitor is available by measuring with two SMU
6. pins through a supported switch matrix configuration See Switch Matrix Support and Configurations Once connections are defined users need only enter the instrument terminal name and pin number to establish connections The 4200 SCS applications and standard user libraries manage the routing of test signals between instrument terminals and DUT pins The user doesn t need to remember and program row and column closures Test modules can transfer between 4200 SCS systems without re entering connection information 4200 SCS Instrument Diagnostics Users can confirm system integrity of SMUs C V measurement unit pulse generator oscilloscopes and Remote PreAmps by running a system self test For more complex problems the system s configuration analysis tool can generate reports that assist Keithley s Technical Support staff in diagnosing problems Keithley External Control Interface KXCI KXCI allows you to use an external computer to control the SMUs C V measurement unit pulse generator cards and oscilloscope in the Model 4200 SCS remotely over GPIB or Ethernet When controlled by an external computer the Model 4200 SCS functions like any other GPIB instrument The KXCI GPIB command set is similar to the command set used by the Agilent Model 4145B This similarity allows many programs already developed for the Agilent model to be used by the Model 4200 SCS 1 888 K EITHLEY u s only www keithley com GREATER Access
7. tangent TAN Conversion Functions Radians to degrees DEG degrees to radians RAD Line Fits and Parameter Extraction Functions Exponential line fit EXPFIT coefficient a EXPFITA coefficient b EXPFITB Linear Fit LINFIT linear slope LINFITSLP x intercept LINFITXINT y intercept LINFITYINT Logarithmic line fit LOGFIT coefficient a LOGFITA coefficient b LOGFITB Linear Regression line fit REGFIT slope REGFITSLP x intercept REGFITXINT y intercept REGFITYINT Tangent line fit TANFIT slope TANFITSLP x intercept TANFITXINT y intercept TANFITYINT Polynomial line fit including POLY2FIT and POLY2COEFF Maximum value MAX minimum value MIN midpoint MEDIAN 2 A C n 2 os D p WY U V je je N cr E TO ilo Search Functions Find Down FINDD Find Up FINDU Find using linear interpolation FINDLIN Maximum position MAXPOS minimum position MINPOS First Position FIRSTPOS Last Position LASTPOS Sub Array SUBARRAY return a specified number of points INDEX Formulator Constants The Formulator supports user supplied constants for use in parameter extractions These constants are factory installed PI 3 14159 rad T K 1 38065 x 107 J K Boltmann s constant Q 1 60218 x 10 C Charge of electron M 9 10938 x 10 kg Electron mass E 1 60218 x 10 J Electron voltage U 1 25664 x 10 5 N A Permeability
8. 4200 MMPC C Multi measurement cable set for Cascade Microtech probers Requires one set per manipulator 4200 MMPC S Multi measurement cable set for SUSS MicroTec probers Requires one set per manipulator 4200 MTRX 1 Ultra Low Noise SMU Triax Cable Im Mini Triax Triax connects 4200 SMUS to a test fixture 4200 MTRX 2 Ultra Low Noise SMU Triax Cable 2m Mini Triax Triax connects 4200 SMUs to a test fixture two included with each 4200 SMU that is not configured with a Remote PreAmp 4200 MTRX 3 Ultra Low Noise SMU Triax Cable 3m Mini Triax Triax connects 4200 SMUS to a test fixture 4200 PRB C SSMC to SMA Cable with local ground 4200 RPC 0 3 Remote PreAmp Cable 0 3m for use inside prober shield 4200 RPC 2 Remote PreAmp Cable 2m for remote location of 4200 PA one included with each 4200 PA 4200 RPC 3 Remote PreAmp Cable 3m for remote location of 4200 PA 4200 RPC 6 Remote PreAmp Cable 6m for remote location of 4200 PA 4200 TRX 0 3 Ultra Low Noise PreAmp Triax Cable 0 3m Triax Triax connects 4200 PA to a test fixture recommended for remote location of the 4200 PA 4200 TRX 1 Ultra Low Noise PreAmp Triax Cable 1m Triax Triax connects 4200 PA to a test fixture 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m Triax Triax connects 4200 PA to a test fixture two included with each 4200 PA 4200 TRX 3 Ultra Low Noise PreAmp Triax Cable 3m Triax Triax connects 4200 PA to a test fixture 7007 1 Double Sh
9. 4200 PIV Q Typical Specifications continued MAXIMUM DRAIN SOURCE 40V Range typical STABILIZATION KIT Maximum V V Maximum I A Ry Q The stabilization kit for the 4200 PIV Q the 4200 Q STBL KIT minimizes the oscillations caused be III V RF transistors and LDMOS RF devices The stabilization kit includes 10 resistors and 2 6 65 1 55 5 blanks for customization 12 3 1 23 10 25 1 0 25 38 0 76 50 50 0 54 92 51 6 0 51 100 65 0 26 250 75 8 0 075 1k Approximate maximum does not account for interconnect losses MAXIMUM GATE SOURCE 20V Range typical Maximum V V Maximum I A Res Q 3 6 0 769 5 6 67 0 667 10 13 3 0 533 25 20 0 400 50 Approximate maximum does not account for interconnect losses 1 6 J CQ n d M am D E WY U ts je je N sy E TO lo 1 4 1 2 1 0 0 8 0 6 0 4 CASE KEYS e v bO o gt x ea gt lt Max Drain Current A 0 2 0 0 10 100 1000 10000 DUT Drain Source Resistance Q 10 resistors 2 blanks in the kit Maximum Pulse Drain I and V vs Drain Source Resistance SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data 4200 FLASH Non volatile Memory Test Option The 4200 FLASH package tests single FLASH memory cells or small arrays This package inc
10. E Dlie a e w TE TE IH ve t ee VI SE Pe Hi Fl e w e Uw elm 314g rebl Berar or DOR MER ier wd r EI di gan nn er o en koe fie ie fie ee Fi H E i The User Test Module UTM has virtually identical functionality as the GUI to control switch matrix UTMs ITM However users enter input parameters in a tabular interface in the UTM s Definition Tab SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Data Analysis Two methods of parameter extraction are available The Formulator provides automated line fits and parameter extraction A spreadsheet offers standard spreadsheet analysis tools Formulator functions The Formulator performs data transformations for performing parameter analysis and line fits The Formulator supports the following functions Mathematical Functions Addition subtraction division multiplication exponent absolute value ABS value at an index position AT Average AVG moving average MAVG conditional computation COND derivative DELTA differential coefficient DIFF exponential EXP square root SORT natural logarithm LN logarithm LOG integral INTEG standard deviation STDEV moving summation SUMMV arc cosine ACOS arc sine ASIN arc tangent ATAN cosine COS sine SIN
11. Light Pen 4200 GP RS 24 36 48 60 72 1 707A Switch Mainframe 1 7071 Switch Card for each 12 pins 1 7078 MTC 20 Cable for each 12 pins 1 7007 1 IEEE Cable 1 7078 PEN Light Pen Maximum Signal Level 200V 1A Offset Current lt 100pA Maximum Leakage 100pA V 3dB Bandwidth 5MHz typical Connector Type Quick disconnect using 38 pin connectors or screw terminals KEI TI HLEY CONFIDENCE MEASURE OF 2 A C n 2 om D Pr Un U xl je je N sy E 5 ilo SEMICONDUCTOR 2 CQ n de M em D E N U u je je N ng E DS io SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Optional Accessories COMPUTER OPTIONS 4200 MOUSE Microsoft Ambidextrous 2 Button Mouse Note a pointing device is integrated with the 4200 keyboard REMOTE PREAMP MOUNTING ACCESSORIES 4200 MAG BASE Magnetic base for mounting 4200 PA on a prober platen 4200 TMB Triaxial mounting bracket for mounting 4200 PA on a triaxial mounting panel 4200 VAC BASE Vacuum base for mounting 4200 PA on a prober platen CABINETS AND MOUNTING ACCESSORIES 4200 CAB 20UX 20U Cabinet 35 in 4200 CAB 25UX 25U Cabinet 44 in 4200 CAB 34UX 34U Cabinet 60 in 4200 KEY RM Slide Rack Mounting Kit for standard keyboard and pointing device 4200 RM Slide Rack Mounting Kit for 4200 SCS F and 4200 SCS C CONNECTORS ADAPTERS AND FIXTURES
12. OF MEASUREMENT POINTS 4096 o EXAMPLE OF INCLUDED LIBRARIES Ee C V POWER PACKAGE TYPICAL e C V C t and C f measurements and analysis of iz me PERFORMANCE CHARACTERISTICS High and low x structures MEASUREMENT PARAMETERS Cp Gp DCV timestamp MOSFETs RANGING 1pF to InF i MEASUREMENT TERMINALS 2 wire SMA with BNC adapters Diodes TEST SIGNAL 100kHz to 10MHz 10mV to 100mV DC VOLTAGE SOURCE 200V with 5mV resolution DC CURRENT 100mA or 300mA maximum TYPICAL CP ACCURACY 1MHz 1 096 DC CURRENT SENSITIVITY 10nA V SMU BIAS TERMINALS SUPPORTED 4 III V compound devices Carbon nanotube CNT devices Doping profiles Tox and carrier lifetime tests Junction pin to pin and interconnect capacitance measure ments Solar cells including Si organic thin film CIGS etc The C V instrument integrates directly into the Model 4200 SCS chassis It can be purchased as an upgrade to existing systems or as an option for new systems c o Q m Z O Eu un 1 888 K EITHLEY u s only www keithley com A GREATER MEASURE OF CONFIDENCE KEITHLEY Er m n ed M am D aa N U A je je N ng E DS io SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data 4205 PG2 Dual Channel Pulse Generator Specifications The 4205 PG2 includes three operational modes
13. and occupies the same rack space as semiconducor parametric analyzers that may already be in use 2 O m 2 Ie D Pr N en oO le N wg E B le RS 232 port on Ethernet ports Standard parallel printer port allow easy access i e to network files and printers Low noise 4200 SCP2 Digital Oscilloscope for ground unit measuring pulses and monitoring waveforms with remote 4210 CVU Card 41 b CEDE sense OW o a Sea Configurable with from 2 to 9 SMUs and optional sub femtoamp Remote PreAmps Adding high power SMUs won t restrict SMU capacity Dual channel pulse generator supports pulse I V SVGA monitor port testing and other pulse applications Additional USB port Use the GPIB interface to control external instruments or to allow external control of the 4200 SCS using an Agilent 4145 style command language 1 888 K EITHLEY u s only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data PreAmp Mounting and Cabling i a i 7 2 i It s easy to connect the Model 4200 PreAmps can be mounted on the probe station with either a platen base or a SCS to a probe station or a switch triax mounting bracket By reducing the signal path between the DUT and the matrix with standard triax cables PreAmp from several feet to a fraction of an inch the Model 4200 SCS can eliminate cable effect
14. apply at 23 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup c o Q m Z O Eu un 1 888 K EITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE J em n id re D E N U A je je N ng E UO lo SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data 4200 PIV A Pulse I V Option The 4200 PIV A package combines the 4205 PG2 dual channel pulse generator with the 4200 SCP2 oscilloscope a specialized interconnect and patented software to provide a turnkey pulse I V solution The software controls sourcing from the pulse generator and data acquisition from the digital oscilloscope to automate a variety of pulse I V tests The specialized interconnect solves most of the problems typically encountered in high speed pulse testing Combining pulse and DC sources to a single DUT pin permits both DC and pulse characterization without the need for re cabling or switching Impedance matching which minimizes reflection and maintains pulse fidelity Easy setup as a result of straightforward cabling and connection to the DUT Pulse I V for leading edge CMOS devices Pulse voltage on gate DC bias on drain Measure drain current during gate pulse e 5V pulses for the gate 40ns to 150ns 200V DC for the drain Included tests e Vys Ip Both pulse and DC V s I Both pulse a
15. as managing tests and results and generating reports Sophisticated and simple test sequencing and external instrument drivers simplify performing automated device and wafer testing with combined I V and C V measurements Our new integrated capacitance voltage measurement unit the Model 4210 CVU makes C V measurements as easy as DC measurements The 4200 SCS is modular and configurable The system supports up to nine Source Measure Units including up to nine high power SMUs with 1A 20W capability An optional Remote PreAmp extends the resolution of any Source Measure Unit from 100fA to 0 1fA KTEI provides software support for DC SMUs and a number of new instruments Besides the C V measurement unit described previously it supports a dual channel pulse generator card the Model 4205 PG2 that plugs into one of the Model 4200 SCS s slots just like an SMU and a choice of dual channel digital oscilloscopes for time and voltage domain measurements Together the pulse generator and oscilloscope make it simple and cost effective to integrate pulsing waveform generation and signal observation capabilities into the Model 4200 SCS s test environment Our KTEI software supports three test application packages to expand the Model 4200 SCS s pulsed testing capabilities 4200 PIV A performs charge trapping and isothermal testing for leading edge CMOS research 4200 PIV Q tests for higher power pulse in III V LDMOS and other higher frequency FET
16. base 4200 SCS including all SMUs and PAs Before and after data reports compliant with ANSI NCSL Z540 1 Does not cover Scope Cards or Pulse Gen Cards PIV Pulse Scope C V and Flash options 4200 FLASH 3Y CAL 3 cals within 3 years of purchase of the 4200 FLASH Requires purchase of 4200 FLASH 3Y EW 4200 PIV A 3Y CAL 4200 PIV A 3Y EW 4200 PIV Q 3Y CAL 4200 PIV Q 3Y EW 4200 SCP2 3Y CAL 4200 SCP2 3Y EW 4205 PG2 3Y EW 4205 PG2 3Y CAL 4210 CVU 3Y EW 4210 CVU 3Y CAL 1 888 K EITHLEY us only www keithley com 4200 3Y CAL 1 year factory warranty on the 4200 FLASH extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 3 cals within 3 years of purchase of the 4200 PIV A Package Requires purchase of 4200 3Y CAL 1 year factory warranty on the 4200 PIV A Package extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 3 cals within 3 years of purchase of the 4200 PIV Q Requires purchase of 4200 3Y CAL 1 year factory warranty on the 4200 PIV Q extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 3 cals within 3 years of purchase of the 4200 SCS Scope Card Standard or HR version Requires purchase of 4200 3Y CAL 1 year factory warranty on the 4200 SCS Scope Card Standard or HR version extended to 3 years fro
17. nl www keithley nl ITALY Peschiera Borromeo Mi Ph 02 5538421 Fax 02 55584228 info keithley it www keithley it A GREATER CHINA Beijing Ph 8610 82255010 Fax 8610 82255018 china Q keithley com www keithley com cn JAPAN Tokyo Ph 81 3 5733 7555 Fax 81 3 5733 7556 info jp keithley com www keithley jp SWEDEN Stenungsund Ph 08 50904600 Fax 08 6552610 sweden keithley com www keithley com Copyright 2009 Keithley Instruments Inc Semiconductor Characterization System Technical Data Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY FINLAND Espoo Ph 358 40 7600 880 Fax 44 118 929 7509 finland keithley com www keithley com KOREA Seoul Ph 82 2 574 7778 Fax 82 2 574 7838 keithley keithley co kr www keithley co kr SWITZERLAND Zurich Ph 044 8219444 Fax 044 820308 1 info keithley ch www keithley ch Printed in the U S A MEAS URE O F FRANCE Saint Aubin Ph 01 64532020 Fax 01 60117726 info keithley fr www keithley fr MALAYSIA Penang Ph 60 4 643 9679 Fax 60 4 645 5794 chan patrickQkeithley com www keithley com TAIWAN Hsinchu Ph 886 3 572 9077 Fax 886 3 572 9031 info twQkeithley com www keithley com tw CONFIDENCE GERMANY Germering Ph 089 84930740 Fax 089 84930
18. standard distribution of Microsoft Windows Upgrades are available for older systems Contact the Keithley factory for supported versions and service packs Data Security and Recovery Data security and recovery are handled by the included software package Acronis True Image This utility can be used to create exact hard disk images including all operating systems applications and configuration files software updates personal settings and data If failures occur that block access to information or affect system operation or if files are accidentally deleted the user can easily restore the system and lost data with the Acronis tool Data Storage Fixed disk Internal high capacity fixed disk drive stores the operating system application programs and data files DVD CD RW Drive Standard DVD CD read write drive is provided for data storage and retrieval USB Ports Four USB 2 0 ports for typical PC USB peripherals Connectivity The 4200 SCS includes two LAN Ethernet ports 10 100 1000 with software drivers installed KEI TI HLEY A GREATER MEASURE OF CONFIDENCE 4200 SCS f mosfet_tests WISE subsite WARE 4dterminal n fet WE ig jt subwt AF oy ckeid wild vgs id IE win n FE FrojgcP ew 1 888 K EITHLEY us only www keithley com Semiconductor Characterization System Technical Data The Keithley Interactive Test Environment KITE The Keithley Interactive Test Environment KITE is the
19. voltage mode into a 50Q load 4 Specifications apply to a 10 90 transition typical Minimum slew rate for high speed range 72 mV ms For high voltage range 2 71V ms which applies to both the standard pulse and Segment ARB mode 5 For multiple 4205 PG2 cards when using appropriate cabling and the trigger per waveform trigger mode All specifications apply at 23 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup KEI TI HLEY MEAS URE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data 4200 SCP2 1 25GS Dual Channel Oscilloscope Card and 4200 SCP2HR 200MS Dual Channel Oscilloscope Card Specifications ANALOG INPUT ANALOG TO DIGITAL CONVERTER 4200 SCP2 4200 SCP2HR 4200 SCP2 4200 SCP2HR No of Channels 2 2 Resolution 8 bit 16 bit Bandwidth 500 DC to 750 MHz DC to 250 MHz typical 2 5 kS s to 1 25 GS s in 10 kS s to 200 MS s in Bandwidth 1MQ DC to 350 MHz DC to 125 MHz typical Sample Rate 1 2 5 5 steps 1 2 5 4 5 steps 0 05 0 1 0 25 0 5 1 2 5 0 05 0 1 0 25 0 5 1 2 5 2 5 GS s 1 channel interleaved 400 MS s 1 channel interleaved Full Scale Input Range 50 Q 10 Vp p 10 Vp p Mente Doom 1 MS channel 1 MS channel 0 1 0 2 0 5 1 2 5 5 10 20 0 25 0 5 1 25 2 5 5 10 25 LOS 2 MS on 1 channel interleaved 2 MS on 1 channel interleaved fo Bull SE Input Range 50 100 Vp p idi 50 Vp p Sack Acquisition Time Range 50 ns to
20. 00 CVU PROBER KIT Optional accessory kit for connection to popular analytical probers 4200 CVU PWR CVU Power Package for 200V C V 4200 SMU Medium Power Source Measure Unit for 4200 SCS 100mA to 100fA 200V to 1uV 2 Watt 4210 SMU High Power Source Measure Unit for 4200 SCS 1A to 100fA 200V to 1uV 20 Watt 4200 PA Remote PreAmp Option for 4200 SMU and 4210 SMU extends SMU to 0 1fA resolution 4205 PG2 Dual Channel Pulse Generator 4200 SCP2 Dual Channel Integrated Oscilloscope 4200 SCP2HR High Resolution Dual Channel Integrated Oscilloscope 4200 SCP2 ACC Optional Scope Probe Application Packages 4200 PIV A Complete Pulse I V Package for leading edge CMOS 4200 PIV Q Pulse I V Package with Q Point and Dual Channel Pulsing 4200 FLASH Non volatile Memory Test package NOTE Page 28 lists all optional accessories KEI TI HLEY CONFIDENCE MEASURE OF 2 A C n 2 om D LI WY U xl je je N sy E DS ilo SEMICONDUCTOR 2 CQ n d M am D E N e d je je N ng E DS io SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Support Contracts Base System 4200 3Y EW 4200 3Y CAL 1 year factory warranty on the base 4200 SCS including all SMUs and PAs extended to 3 years from date of shipment Includes calibration reports compliant to ANSI Z540 1 and return shipping 3 cals within 3 years of purchase of the
21. 237 BAN 3A Triax Cable Center Conductor terminated in a safety banana plug 237 BNC TRX Male BNC to 3 lug Female Triax Adapter 237 TRX BAR 3 lug Triax Barrel for use with triax interconnect 237 TRX T 3 slot Male to Dual 3 Lug Female Triax Tee Adapter 237 TRX TBC 3 lug Female Triax Bulkhead Connector 7078 TRX BNC Coaxial Connector for connecting coax instruments to a triax matrix 7078 TRX GND Male Triax to Female BNC Connector guards removed 8101 4TRX 4 pin Transistor Fixture 8101 PIV Pulse I V Demo Fixture CA 404B SMA Plug to SMA Plug RG188 2m CA 405B SMA Plug to SMA Plug RG188 6in CA 406B SMA Plug to SMA Plug RG188 13in CA 451A SMA SMA Plug RG188 4 25in CA 452A SMA SMA Plug RG188 8in CS 565 Female BNC to Female BNC Adapter CS 633 Adapter TRIAX to BNC CS 701 BNC Tee Adapter CS 1247 SMA Female to BNC Male CS 1249 SMA Female to SMB Plug CS 1251 BNC Female to SMB Plug CS 1252 SMA Male to BNC Female CS 1281 SMA Female to SMA Female CS 1382 MMBX to SMA Adapter CS 1390 TRIAX to SMA Adapter no guard CS 1391 SMA TEE Adapter female male female 1 888 KEITHLEY us only www keithley com GREATER DRIVER OPTIONS 4200ICCAP 6 0 IC CAP Driver and Source Code for 4200 SCS UNIX Windows ADDITIONAL CABLES 5 236 ILC 3 Interlock Cable 3m one included with each 4200 SCS 237 ALG 2 Low Noise Triax Cable 2m terminated with a 3 slot male triax connector on one end and 3 alligator clips on the other
22. 30 minutes of warm up SMU 100 mA 210 V 0 045 3A 5 uA 0 050 15 uA Speed set to NORMAL High 0 045 34A 0 050 15 uA Guarded Kelvin connection Power 4200 0 037 300 nA 0 042 15 uA e 1 C and 24 hours from ACAL SMU ir 0 035 30nA 0 040 150 nA no 0 033 3nA 0 038 15 nA SMU 0 050 600 pA 0 06096 1 5 nA 4200 SMU and 4210 SMU with optional 4200 PA PreAmp 0 050 100 pA 0 050 30 pA 0 050 1pA 0 050 100 fA 0 100 30 fA 0 500 15 fA 1 000 10 fA 0 060 200 pA 0 060 30 pA 0 060 3 pA 0 060 300 fA 0 100 80 fA 0 500 50 fA 1 000 40 fA VOLTAGE COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected voltage range VOLTAGE SPECIFICATIONS VOLTAGE MAX RANGE CURRENT 4200 SMU 4210 SMU Resolution 0 05 3 mV 0 0 012 150 pV 0 012 100 pV MEASURE rdg volts SOURCE Accuracy rdg volts 0 02 15 mV 0 02 15 mV 0 02 300 uV 0 02 150 pV Accuracy Resolution 01 6 1 mV CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range Supplemental Information Supplemental information is not warranted but provides useful information about the Models 4200 SMU 4210 SMU and 4200 PA COMPLIANCE ACCURACY Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications OVERS
23. 419 seconds 250 ns to 3 355 seconds n DC Gain Accuracy lt 1 of full scale 0 25 of full scale Acquisition Modes Normal Average Envelope and Normal Average Envelope and A Impedance 1 MQ 12 pF or 50 Q 1 MQ 12 pF or 50 Q aE guivalenttime SS Equivalenttime Te Impedance Accuracy 1 1 ES Coupling DC or AC DC or AC c Offset Adjust full scale range 2 full scale range 2 TRIGGER 5 Offset Accuracy 1 offset 1 full scale 1 4200 SCP2 4200 SCP2HR D Input Connectors BNC BNC Trigger Source Channels 1 or 2 External Channels 1 or 2 External m Absolute Maximum Input 50 Q 5V DC 5V DC Pattern Software Pattern Software Un Absolute Maximum Input 1 MQ 210V DC 210V DC Post Trigger Delay 0 to 655 seconds 0 to 655 seconds m Pre Trigger Delay 0 to waveform time 0 to waveform time I Trigger Hold Off Range 0 to 655 seconds 0 to 655 seconds Trigger Modes Edge or Pulse Width Edge or Pulse Width N Edge Trigger Mode Rising or Falling Edge Rising or Falling Edge lt 20ns to 655 seconds 20ns to 655 seconds N Pulse WALL Range 10ns resolution 10ns resolution 3 TTL Compatible TTL Compatible Paten Te put 10 kQ input fem 10 kO input EUER Connector SMB SMB OPTIONAL SCOPE PROBE 4200 SCP2 ACC BANDWIDTH 70MHz 4200 SCP2 15MHz 4200 SCP2HR ATTENUATION 1x MAX DC 300V DC rated LOADING 100pF and 1MQ LENGTH 1m CONNECTOR BNC NOTES 1 Inputs are referenced to 4200 chassis ground All specifications
24. 734 info Q keithley de www keithley de NETHERLANDS Gorinchem Ph 0183 635333 Fax 0183 630821 info keithley nl www keithley nl UNITED KINGDOM Theale Ph 0118 9297500 Fax 0118 9297519 info keithley co uk www keithley co uk No 2199 B CLEVELAND OHIO 44139 1891 M 440 248 0400 M Fax 440 248 6168 M 1 888 KEITHLEY W www keithley com INDIA Bangalore Ph 080 2677 1071 72 73 Fax 080 26771076 support_india keithley com www keithley com SINGAPORE Singapore Ph 65 6747 9077 Fax 65 6747 299 1 koh_william keithley com www keithley com sg Rev 03 06 09
25. Ch 2 7 DUT D DC Sense SMU2 G DC Force 7 9 1 1 m S AC Input m DC Sense SMU DC Sense ES See DC Force 7 DC Force RBTI Interconnection for 4200 PIV A for leading edge CMOS high x and isothermal testing PIV A pulses the voltage on the gate and provides a DC bias on the drain KEI T HLEY CONFIDENCE MEASURE OF 4200 SCS Semiconductor Characterization System Technical Data 4200 PIV Q Pulse I V with Q point and Dual Channel Pulsing The 4200 PIV Q package is designed for quiescent point pulsing for scaled down RF transistors such as HEMT and FET devices in III V or LDMOS technologies This package supports multiple 4205 PG2s and the 4200 SCP2HR oscilloscope and includes capabilities such as dual channel pulsing i e for pulsing on both the gate and the drain simultaneously higher power pulsing than the 4200 PIV A package and pulsing from a non zero quiescent point Pulse widths can be adjusted from 500ns to near DC and the same setup can also be used for performing true DC tests without re cabling the system The PIV Q package is useful for a variety of large signal tests on high frequency transistors as well as for 4200 PIV Q Typical Specifications CHANNELS 2 TYPICAL PULSE PERFORMANCE investigation of dispersion phenomena and device performance at speed It also offers a good approach for avoiding the isothermal problems inherent in DC testing Dual channel pulse I V testing
26. E 8 85419 x 10 1 F m Permittivity of a vacuum H 6 62607 x 10 J s Planck s constant C 299792 x 10 8 m s Speed of light KT Q 0 02568 V Thermal voltage 1 888 K EITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Sheet Tab Data Viewing and Analysis The Sheet Tab of a test module captures data from a test execution and allows calculations in a spreadsheet The Sheet Tab operates like an Excel workbook with the following spreadsheets the Data sheet the Calc sheet the Settings sheet and the Append sheets o Senda b i F G sein oral DNE GNU ip S DNE SCENE DONE Te IQ WES OE 30K I BR MELLE 1 6 50 1 SE 3 snnm 3 a SEE 3X DODOE ASI WE S SE 37XBE1 MOONE 3 BYHiE3 AXXDUE 3 LAWES SOO CUES ARTE HABE MODE o Fang each are Y 4ME 3 METES oo 2 300086 DE TE Be j it T gt Neue Ata pama iii _ f at semen 2 J 8 5 amp f a 3 ti 12 n u 1 TE Er Ti H E n n g9 2 CQ n id re D E Un U th je je N wg E UO lo Data Sheet The Data sheet displays test results in real time It is read only so that results cannot be modified Calc Sheet A spreadsheet that operates much like a standard Microsoft Excel spreadsheet is available for computation with e
27. HOOT lt 0 1 typical Voltage Full scale step resistive load and 10mA range Current 1mA step R 10kQ 20V range RANGE CHANGE TRANSIENT Voltage Ranging lt 200mV Current Ranging lt 200mV ACCURACY SPECIFICATIONS Accuracy specifications are multiplied by one of the following factors depending upon the ambient temperature and humidity Relative Humidity MAXIMUM GUARD OFFSET VOLTAGE 3mV from FORCE GUARD OUTPUT IMPEDANCE 100kQ MAXIMUM GUARD CAPACITANCE 1500pF MAXIMUM SHIELD CAPACITANCE 3300pF 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to COMMON gt 107Q 100nA 1uA ranges 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 Q 1pA and 10pA ranges gt 10C2 100pA 100nA ranges OUTPUT TERMINAL CONNECTION Dual triaxial connectors for 4200 PA dual mini triaxial connectors for 4200 SMU and 4210 SMU NOISE CHARACTERISTICS typical Voltage Source rms 0 01 of output range Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range Temperature Ze en Current Measure p p 0 2 of measurement range NE _ MAXIMUM SLEW RATE 0 2V us 18 28 C x1 x3 28 40 C x3 x5 REMOTE SENSE lt 10Q in series with FORCE terminal not to exceed a 5V dif ference between FORCE and SENSE terminals 30V maximum between COMMON and SENSE LO MAXIMUM LOAD CAPACITANCE 10nF 1 888 K EITHLEY us only www keithley com KEITHLEY MEASURE A GREATER OF CONFIDENCE
28. Model 4200 SCS Windows device characterization application It provides advanced test definition parameter analysis and graphing and automation capabilities required for modern semiconductor characterization KITE Projects A project is a collection of related tests organized in a hierarchy that parallels the physical layout of the devices on a wafer KITE operates on projects using an interface called the project navigator The project navigator simplifies organizing test files test execution and test sequencing The project navigator organizes tests into a logical hierarchy presented in a browser style format This structure allows users to define projects around wafer testing The project level organizes subsites and controls wafer looping execution The subsite level organizes devices and controls subsite test sequencing The device level organizes test modules manages test module libraries and controls device test sequencing The test module level performs tests analyzes data and plots results Selectable checkboxes allow enabling disabling individual tests plans Test Modules Within KITE two types of test modules are provided to capture the test input parameters data analysis and plot setting for data Interactive Test Modules provide a point and click interface for defining test input parameters and controlling the 4200 SCS SMUs User Test Modules provide a fill in the blank interface to either factory provided or use
29. Offset and resolution specified when using adaptive filtering after system cable compensation and offset correction Leakage measured after a 5 second settling time All typical specs apply to the AC DC output cable from the SMU Force connected to the SMA tee attached to Triax to SMA adapter after system compensation For the high power 4210 SMU For the medium power 4200 SMU the maximum current is 100mA Drain Pulse Source is a voltage pulser with 55Q output impedance To calculate the approximate maximum Drain current for any DUT resistance Idmax 80V 55 Rpg To calculate approximate maximum Drain voltage input the Imax calculated above Vdmax Idmax X Ry For more information refer to the tables titled Maximum Drain Source and Maximum Gate Source Also see the figure titled Maximum Pulse Drain I and V vs DUT Drain Source Resistance All specifications apply at 23 5C within 1 year of calibration RH between 5 and 60 after 30 minutes of warmup DC Sense DC Force DC Sense DC Force Interconnection for 4200 PIV Q for III V and LDMOS scaled down RF transistors PIV Q pulses voltage on both the gate and drain from non zero bias quiescent conditions GREATER KEITHLEY CONFIDENCE MEASURE OF n A C n 2 om D Pr Un U xl je je N cr E UO ilo SEMICONDUCTOR 11 4200 SCS Semiconductor Characterization System Technical Data
30. RjX Example of C G Measurement Accuracy 4210 CVU Typical C Accuracy with 1 5m Cables Z theta Measured C G supplemental RANGING Auto and fixed Frequency Capacitance Accuracy Accuracy Measured MEASUREMENT TERMINAL CONFIGURATION p 092 20m CaPadtance 1 kHz 10kHz 100kHz 1MHz 10MHz Four terminal pair onma 10 pF 0 32 990 ns 1 pF N A udo lee CONNECTOR TYPE Four SMA female connectors 100 pF 0 29 9 us 10 pF N A 0 946 20 2 6 0 18 1 100 pF N A 0 29 0 20 0 15 1 CABLE LENGTH 0m 1 tom selectable 1 nF 0 35 99 us p wenn 1 pF 0 38 ELEM 1 nF 0 72 0 17 0 12 0 16 2X m INTEGRATION TIME FAST NORMAL QUIET and CUSTOM ms EN T 0 28 2012 013 025 2X 1 MHz 100 pF 0 09 500 ns 100 nF 0 12 0 13 0 22 1 14 N A m TEST SIGNAL Inf 0 09 Sa 1 uF 0 17 0 21 NA NA NA 5 FREQUENCY RANGE 1kHz to 10MHz 10 pF 0 17 15 ns i MINIMUM RESOLUTION 1kHz 10kHz 100kHz 1MHz 100 pF 0 18 59 ns 4210 CVU Typical C Accuracy with 3m Cables 100 kHz supplemental depending on frequency range 1 nF 0 08 450 ns OQ 10 nF 0 08 3 Measured D SOURCE FREQUENCY ACCURACY 0 1 100 Fr 02 z pm Capacitance 1kHz 10kHz 100kHz 1MHz 10MHz U 0 Ts eV SIGNAL OUTPUT LEVEL RANGE 10mV rms to 100mV rms 1 a 0 15 Te 1 pF N A 8 5 2 05 0 57 N A i 0 0 0 0 RESOLUTION 1mV rms 10 kHz 10 nF 0 08 450 ns 10 pF N A u 20218 zm A ACCURACY 10 0 1mV rms unlo
31. S XX or Model 4200 UL LS XX parlib The parlib user library is used for extracting device parameters on bipolar and MOSFET transistors Extracted parameters include Beta resistance threshold voltage and V I sweeps and V I sweeps for MOSFETs prbgen The prbgen user library provides test modules to initialize the prober driver move to the next site or subsite in the prober s wafer map make or break contact between the probes and the wafer and obtain the X position and Y position of the prober Contact the factory for supported probers winulib The winulib user library provides user interface routines for operator inputs and prompts such as the abort retry and ignore decision prompts wlrlib The wlrlib user library includes routines for performing linear regression and charge to breakdown tests Q on gate dielectrics Included modules are qbd_rmpv V Ramp method and qbd_rmpj J Ramp method C language Microsoft Visual C Standard Edition provides the compiler for the Keithley User Library Tool Users can develop test subroutine libraries using the full capabilities of C language programming LPTLIB Control The LPTLIB provides an application programming interface for developing C language test routines that control integrated test hardware and supported external instruments and switches This simple connect source measure approach eliminates the need for low level programming and allows the user to
32. ach test The spreadsheet tool supports these functions Functions in the KITE Calc sheet ABS ACOS ACOSH ASIN ASINH ATAN ATAN2 ATANH AVERAGE COS COSH EXP FIXED IF LN LOG LOG10 LOOKUP MATCH MAX MIN NOW PI PRODUCT ROUND SIGN SIN SINH SQRT STDEVP SUM SUMSQ TAN TANH VARP Settings Sheet The Settings sheet stores the test setup so that when the Sheet tab is exported as a workbook users can refer to the test configuration Append Sheet Append sheets store test results when the Append button is clicked Data in Append sheets can be automatically plotted on the graph Test modules support up to 40 Append sheets SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Graph Tab Plotting The Graph Tab is a full featured plotting tool for creating report ready graphs It allows real time X Y plotting of acquired and extracted data with one or two Y axes Linear Semilog and Log Log graphs Real time auto scaling end of test auto scaling or manual scaling Six cursors with X Y readout Graphical line fitting Plot overlay of multiple test executions Four data variable readouts User formatted comment box title and axis labels Choice of engineering units on axes V volts A amps s seconds S Siemens F farads Hz Hertz Choice of engineering symbols on axes m u n etc Definition
33. aded at rear panel 100 nF 0 08 3 us 100 pF N A 0 29 0 20 0 17 1 C 1 nF 0 72 0 17 0 12 0 18 2 TPUT IMPEDANCE 1008 t L 1 nF 0 6996 40 ns O OUEL a pica WE ER mE 10nF 028 0 12 0 13 0 27 2 EX 1 kHz E 100 nF 0 12 0 13 0 22 1 16 N A 100 nF 0 10 500 ns DC BIAS FUNCTION ET ETEY S 1 uF 0 17 0 21 N A NA NA TT DC VOLTAGE BIAS E en LES Range 30V 60V differential lo ou eis S alane and conductance measurement accuracy is specified CVU CONFI DENCE CHECK 0 59 AOA uomo eae under the following conditions Dy lt 0 1 The 4210 CVU includes a diagnostic tool called Confidence MAXIMUM DC CURRENT 10mA 2 Conductance accuracy is specified as the maximum conductance Check It allows users to check the integrity of open and short grity of op measured on the referenced capacitor connections and connections to a device under test DUT 3 These specs are typical Typical and supplemental specs are hen the Model 4210 CVU i DUT Confid SWEEP CHARACTERISTICS non warranted apply at 23 C and are provided solely as useful a cn d m 10 C nn hi ur he a AVAILABLE SWEEP PARAMETERS DC bias voltage frequency information ey n 2z2nnn AC voltage Integration time QUIET ar o Check to be used as a C V meter to perform i l uick and accurate measurements SWEEP TYPE Linear custom TESSIE level oUm Ems At the rear panel of the 4210 CVU SWEEP DIRECTION Up sweep down sweep NUMBER
34. apter 1 7078 PEN Light Pen Connector Type 3 lug triax Maximum Signal Level 200V 2A Offset Current 100fA max 10fA typical Maximum Leakage 0 01pA V 3dB Bandwidth 30MHz typical Ultra Low Current Remote Sense Configuration 4200 UL RS XX Remote sensing is more accurate for voltage sourcing and measuring particularly at currents greater than approximately 10mA but degrades the performance of C V meters and pulse generators The Ultra Low Current Remote Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix Card which is designed for semiconductor research development and production applications requiring high quality high performance switching of I V and C V signals The configuration provides six instrument inputs with up to 30 output pins at only 10fA typical offset current 4200 UL RS 6 12 18 24 50 1 707A Switch Mainframe 1 7174A Switch Card for input 1 7174A Switch Card for each 6 DUT pins 12 4200 TRX 3 Cable for each 6 DUT pins 1 7007 1 IEEE Cable 2 7078 TRX BNC Adapter 1 7078 PEN Light Pen Connector Type 3 lug triax Maximum Signal Level 200V 2A Offset Current 100fA max 10fA typical Maximum Leakage 0 01pA V 1 888 K EITHLEY u s only www keithley com GREATER Low Current Local Sense Configuration 4200 LC LS XX The Low Current Local Sense switch configuration is built using the Keithley Model 7072 Semiconductor Matrix Card which is design
35. asis BJT Project BJT default The tests in this project represent the most common BJT tests that a typical user might perform on a daily basis Reliability Projects EM const I Tests electromigration using constant current It also controls a hot chuck HCI 1 DUT This is a Hot Carrier Injection HCI project on one 4 terminal N MOSFET No switch matrix is involved in the measurement Parameters monitored between two successive stresses include Ihote KEI TI HLEY MEASURE OF CONFIDENCE 2 A C n 2 D Pr Un U xl je je N ng E 5 ilo SEMICONDUCTOR 2 em n d X am D E N U A je je N wg E 5 io SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data bow Ic Vry and G Those parameters are measured on both forward normal operation condition and reverse reverse source and drain bias conditions If only a subset of these parameters is needed it is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses HCI 4 DUT This is a Hot Carrier Injection HCI project on two 4 terminal N MOSFETs and two 4 terminal p MOSFETS with a switch matrix Parameters monitored between two successive stresses include Ip Ip Ic Vp and Gp Those parameters are measured on both forward normal opera
36. cation software software that is not explicitly approved and supported by Keithley Instruments are not covered under the product warranty Model 4200 SCS systems with unapproved software may need to be restored to factory approved condition before any warranty service can be performed e g calibration upgrade technical support Services provided by Keithley Instruments to restore systems to factory approved condition will be treated as out of warranty services with associated time and material charges Approved software is listed in the Reference Manual and under Approved Third Party Software on page 25 of this document CAUTION DO NOT reinstall or upgrade the Windows operating system OS on any Model 4200 SCS This action should only be performed at an authorized Keithley service facility Violation of this precaution will void the Model 4200 SCS warranty and may render the Model 4200 SCS unusable Any attempt to reinstall or upgrade the Windows operating system will require a return to factory repair and will be treated as an out of warranty service including time and material charges Switch Matrix Support and Configurations Overview A number of useful standard switch matrix configurations are available for the 4200 SCS Each standard configuration includes all components cabling and instructions for the user to assemble the switch matrix and add the matrix configuration to the 4200 SCS test environment Once a supported configuratio
37. devices and 4200 FLASH tests FLASH embedded memory devices A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Configuration Options The 4200 SCS supports many instrument configurations that can include SMUs C V measurement units pulse generators and oscilloscopes The standard configuration includes two medium power Source Measure Units SMUs and a Ground Unit Standard 4200 SCS Models 4200 SCS F Chassis 12 1 flat panel display Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit LAN GPIB USB RS 232 parallel port hard disk DVD CD RW Chassis Composite Front Bezel i e no built in display Two 2 Model 4200 SMU medium power SMUs One 1 Remote Sense Ground Unit 4200 SCS C LAN GPIB USB RS 222 parallel port hard disk DVD CD RW Source Measure Units Each system can be configured with up to seven additional SMUs for a total of nine SMUs Two SMU models are available a medium power 100mA 2W version Model 4200 SMU and a high power 1A 20W version Model 4210 SMU The system can support up to nine high power SMUs 4200 SCS Source Measure Units MAXIMUM MAXIMUM VOLTAGE CURRENT 4200 SMU medium power 210V 100mA 4210 SMU high power 210V 1A Remote PreAmp The low current measurement capabilities of any SMU can be extended by adding an optional Remote PreAmp Model 4200 PA The 4200 PA provides 0 1fA resolution by e
38. e DUT 1 888 KEITHLEY u s only www keithley com GREATER TIMING High Speed High Voltage Frequency Range 1 Hz to 50 MHz 1 Hz to 2 MHz Timing Resolution 10 ns 10 ns RMS Jitter period width 0 01 200 ps typical 0 01 200 ps typical Period Range 20 nsto 1s 500 ns to 1s Accuracy 1 1 Pulse Width Range 10ns to period 10ns 250ns to period 100ns Accuracy 3 200 ps 3 5ns Programmable 10 ns 33 ms 100 ns 33 ms Transition Time 0 100 1 for transition time 1 for transition time Accuracy 1 lt 1 Transition Slew Rate 00 ns Hs Lineari 3 for transition time 3 for transition time i lt 100 ns lt 500 ns lt 15 ns lt 150 ns Typical Minimum Transition Time 10 90 Pulse Period and width are variable in 10 ns steps without m 0 any output glitches or dropouts va 100 us 100 us Solid state relay are TRIGGER TRIGGER OUTPUT IMPEDANCE 500 TRIGGER OUTPUT LEVEL TTL TRIGGER IN IMPEDANCE 10kQ TRIGGER IN LEVEL TTL TRIGGER IN TRANSITION TIMING MAXIMUM lt 100ns TRIGGER IN TO PULSE OUT DELAY 560ns TRIGGER SYNCHRONIZATION JITTER lt 8ns NOTES 1 Unless stated otherwise all specifications assume a 50O termination 2 Maximum number of PG2 cards in the 4200 chassis is 4 3 Level specifications are valid after 50ns typical settling time after slewing for the high speed mode and after 500ns typical settling time after slewing for the high
39. e sweep amplitude sweep rise time linear sweep fall time linear sweep frequency linear sweep and frequency log sweep ChargeTrapping The Charge Trapping project uses a single pulse technique to look at device charge trapping and de trapping behavior within a single well configured gate pulse During the rise and fall times of the voltage ramp the corresponding drain current response is captured allowing appropriate V I curves to be formed ivpgswitch 340x The tests in this project demonstrate automated device testing using a 4200 SCS a Keithley Model 3402 pulse generator and a switch matrix ivpgswitch tThe tests in this project demonstrate automated device testing using a 4200 SCS an HP8110A 81110A pulse generator and a switch matrix PulseIV Complete This project provides PIV pulse IV tests including tests that generate Ip vs Vp graphs and I vs V graphs as well as tests that show the effect of self heating on devices due to DC voltages This is the primary sample project included in the 4200 PIV A package 1 888 K EITHLEY us only www keithley com GREATER QPulseIV Complete This project includes PIV Q tests that generate I vs V and I vs Vp graphs for a FET as well as calibration routines This project is used to run characterization curves on II V and LDMOS high power devices using the pulse technique and a non zero quiescent point Solar Cell Project This project is designed for photovo
40. ed for semiconductor applications requiring good quality I V and C V signals The configuration provides eight instrument inputs with up to 72 output pins with less than 1pA offset current 4200 LC LS 12 or 12 707A 1 708A or 707A Switch Mainframe 1 7072 Matrix Switch Card 12 4200 TRX 3 Cable 1 7007 1 IEEE Cable 2 7078 TRX BNC Adapter 1 7078 PEN Light Pen 4200 LC LS 24 36 48 60 72 1 707A Switch Mainframe 1 7072 Matrix Switch Card for each 12 pins 12 4200 TRX 3 Cable for each 12 pins 1 7007 1 IEEE Cable 2 7078 TRX BNC Adapter 1 7078 PEN Light Pen Connector Type 3 lug triax Maximum Signal Level 200V 1A Offset Current lt 1pA Rows A B Maximum Leakage 0 1pA V 3dB Bandwidth 5MHz typical Rows G H General Purpose Remote Sense Configuration 4200 GP RS XX The General Purpose Remote Sense switch configuration is built using the Keithley Model 7071 General Purpose Matrix Card which is designed for applications requiring cost effective switching of I V and C V signals Remote sensing is more accurate for voltage sourcing and measuring particularly at currents greater than approximately 10mA The configuration provides eight instrument inputs with up to 72 output pins with less than 100pA offset current Each crosspoint provides HI LO and GUARD signal switching 4200 GP RS 12 or 12 707A 1 708A or 707A Switch Mainframe 1 7071Switch Card 1 7078 MTC 20 Cable 1 7007 1 IEEE Cable 1 7078 PEN
41. er TRN 4200 I K Two day training class at Keithley Optimizing the Use of Your 4200 SCS Semiconductor Characterization System Two days in depth hands on training on how to unleash the powerful capabilities of your 4200 SCS Includes theory of operation product operation making measurements optimizing measurements and troubleshooting See website for dates and locations TRN 4200 1 C On site training per day for up to 6 people Additional charges for larger audience Travel expenses not included TRN 4200 1 R Remote web based training per hour 1 888 K EITHLEY us only www keithley com GREATER Upgrades Besides the upgrades listed below the optional instrumentation listed on page 23 can also be added as upgrades 4200 SMU UPGRADE Adds a 4200 SMU to an existing 4200 system 4210 CVU UPGRADE Adds a 4210 CVU to an existing 4200 system 4210 SMU UPGRADE Adds a 4210 SMU to an existing 4200 system 4200 KTEI X X 4200 SCS Keithley Test Environment Interactive KTEI software test suite latest version includes KTEI V7 2 CD and Complete Reference V7 2 CD 4200 CPU COR2 C 4200 SCS C CRT systems only 4200 SCS upgrade service includes installation of new 2 13GHz multi core single board computer w 2GB DDR2 memory dual Gigabit LAN ports XGA graphics controller four USB 2 0 ports two front two back fresh installation of Windows XP Professional w SP3 not upgrade See Note Also includes insta
42. ffectively adding five current ranges to either SMU model The PreAmp module is fully integrated with the system to the user the SMU simply appears to have additional measurement resolution available The Remote PreAmp is shipped installed on the back panel of the 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a remote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available Remore PreAmps are installed at the factory in numerical order i e SMU1 SMU2 SMU3 up to the number of PreAmps specified Capacitance Voltage Instrument C V measurements are now as easy to perform as I V measurements with the new integrated C V instrument the Model 4210 CVU This optional capacitance voltage instrument performs capacitance measurements from femtofarads fF to nanofarads nF at frequencies from 1kHz to 10MHz It also supplies diagnostic tools that ensure the validity of your C V test results 1 888 K EITHLEY u s only www keithley com GREATER MAXIMUM POWER 2W 20W With this system you can configure linear or custom C V C f and C t sweeps with up to 4096 data points In addition through the open environment of the 4200 SCS you can modify any of the included
43. focus on creating new test routines quickly The 4200 SCS LPTLIB is derived from the Keithley S600 series and S400 series parametric test systems to simplify migration of test routines between the 4200 SCS and Keithley parametric test systems KEI TI HLEY MEAS URE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data System Configuration and Diagnostics KCON The Keithley Configuration Utility KCON simplifies programming and maintaining a fully integrated test station KCON provides a single interface for configuring external instruments switch matrices and analytical probers and for executing system diagnostics External Instrument Configuration KCON allows lab managers to integrate external instruments with the 4200 SCS and a supported switch matrix After the user configures the GPIB addresses for supported instruments Keithley supplied libraries will function and test modules can be transferred between 4200 SCS systems without any user modification In addition to the standard supported instruments the General Purpose Instrument allows users to develop subroutines and control switches for a generic two terminal or four terminal instrument For the widest possible system extensibility users can develop their own test libraries for general purpose instruments Switch Matrix Configuration Users define the connection of 4200 SCS instruments and external instruments to device under test DUT
44. for III V and LDMOS Pulse voltage on gate and drain Measure gate current and drain voltage and current e 20V pulses for the gate 38V pulses for the drain Pulse Widths 500ns to 999ms Included tests Vys Ip Both pulse and DC V 15 Both pulse and DC Single pulse scope view Useful for setup validation pulse width optimization prototyping of novel pulse tests De riion Set Gash Seas 3701 2007 22 33 33 KEIIHLEY ee epee ee pe fp bee bd EB 4 1 888 KEITHLEY us only www keithley com Measurement Accuracy Gate Current lt 50uA offset 104A resolution Drain Current lt 100A offset 101A resolution Maximum Current Measure Gate 100mA into 50 2 6 Drain 760mA into 50Q 1 33A into 5Q 6 Sample Rate 200MS s Minimum Transition Time 10 90 150ns Gate Pulse Source 20V to 20V Drain Voltage Range 38V to 38V into 50 75V into 1kQ 6 Pulse Width 500ns to 999ms Pulse Period 510ns to 1s Duty Cycle 0 00196 to 99 996 SMU TYPICAL DC PERFORMANCE Typical DC Leakage Gate lt 20nA offset for 35V Typical DC Leakage Drain 10nA V for 35V Typical DC Noise Gate 20nA RMS Gate Offset 20nA Typical DC Noise Drain 300pA RMS Maximum Voltage 210V gt 40V requires safety interlock and related precautions Maximum Current 1A NOTES 1 2 wan Unless stated otherwise all specifications assume a 50Q termination
45. for flexible reconfigurable pulsing Standard pulse Pulse between any two voltage levels Period range 20ns to 1s Arbitrary ARB waveform Output ARB waveforms built from standard wave libraries or sampled data Depth 256K points channel Timebase 20ns point up to 1sec point fixed timebase for entire waveform Waveform Libraries sine ramp gaussian white noise Input in csv format Segment ARB waveform With a single pulse channel build multi level and multi pulse waveforms with user defined line segments Depth 1024 segments channel Parameters for each segment Segment start voltage stop voltage segment time trigger out High Endurance Output relay HEOR SSR on off Time per segment 20ns to 1s 10ns increments each segment can have a different duration PULSE LEVEL High Speed High Voltage Vour 50 Q into 50 Q 5V to 5V 20V to 20V Vour 50 Q into 1 MO 10V to 10V 40V to 40V Accuracy 3 50 mV 3 100 mV Amplitude Level 50 Q into 50 Q 1 mV 5 mV Resolution 50 Q into 1 MQ 2 mV 10 mV Output Connectors SMA SMA Source Impedance 500 Nominal 500 Nominal 196 196 Short Circuit Current 200 mA 800 mA SES ngo Den oa 100 mA typical 400 mA typical at full scale Baseline Noise Overshoot Pre shoot Ringing Output Limit 0 196 5 mV RMS typical 0 1 5 mV RMS typical 5 of amplitude 20mV 5 of amplitude 80mV Programmable limit to protect th
46. gth flatband capacitance flatband voltage bulk potential threshold voltage metal semiconductor work function difference and effective oxide charge CVU MOSFET Makes a C V sweep on a MOSFET device Extracted calculated parameters include oxide thickness oxide capacitance flatband capacitance flatband voltage threshold voltage and doping concentration as a function of depletion depth CVU nanowire Makes a C V sweep on a two terminal nanowire device CVU PNjunction Measures the capacitance of a p n junction or Schottky diode as a function of the DC bias voltage across the device CVU PVcell Measures both forward and reverse biased DC characteristics of an illuminated solar cell and extracts parameters such as max power max current max voltage short circuit current open circuit voltage and efficiency Also performs characteristic C V and C f sweeps KEI T HLEY MEAS URE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data default Standard C V sweeps for generic MOSFETS diodes and capacitors ivcvswitch The tests in this project demonstrate the 4200 SCS s integra ted I V C V switching and probing capabilities lifetime The lifetime project performs high frequency C t measurements using the Keithley System 82 on MOS capacitors The minority carrier recombination lifetime and surface velocity are extracted using a Zerbst Plot QSCV Performs Quasistatic C V using t
47. han the PG2 pulse mode Pulse on and off times can be set from 5ms to 10s Pulse output goes to the specified pulse level during the pulse on time and back to a user defined base voltage during the off time If the SMU is also set to measure the measurement will occur after the on time expires and before the transition to the off time level If it s not set to measure the output will simply transition from on to off 2 Standby There s a new checkbox in the Timing window called Disable outputs at completion which is checked by default If this box is unchecked the SMU outputs will stay at their last values when the test is complete instead of returning to zero or idle state These values then change when a new test is started if that particular SMU is required in the new test or KITE is exited or a UTM calls a DEVINT KEITIHLEY A GREATER MEASURE OF CONFIDENCE 2 A C n 2 om D Pr Un U xl je je N cr E UO ilo SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Sampling Mode Linear sampling of up to 4096 points Sampling period is programmable from 1ms to 10005 Additional hold delay before first sample of up to 1000s Interactive Test Modules ITM are built from three different major functions Definition Definition Sheet Graph Status Sheet and Graph T
48. he 4200 s SMUs and PAs using the Ramp Rate method SIMCV This project provides routines for simultaneous C V measurement using the Keithley System 82 Typical MOS device parameters such as doping profile flat band voltage threshold voltage interface trap density and band bending are extracted STVS This project uses the Keithley System 82 to perform an STVS Simultaneous Triangular Voltage Sweep measurement at high temperature Mobile ion density is extracted Miscellaneous Projects FourPtProbe This project enables users to make four point collinear probe measurements on semiconductor materials ivswitch The ivswitch project integrates control of a Keithley Model 707A or Model 708A external switch matrix with device testing probesites The probesites project illustrates how KITE controls semi automatic probe stations for automated probing of one subsite per site on a single wafer probesubsites The probesubsites project illustrates how KITE controls semi automatic probe stations when testing multiple subsites per site on a single wafer vdp resistivity This project enables users to make Van der Pauw measurements on semiconductor materials LowCurrent This project demonstrates sub 10fA performance on four SMUs Demonstration Projects Demo Default The tests in this project demonstrate the most common DC tests on an FET Also new features that were recently introduced are demonstrated including pulse SMU
49. he Definition Tab allows Dess Wes eres _ o the operator to define a sweep or sampling FORCE MEASURE mode test using a graphical approach The ce cp One ene Sheet Tab stores acquired data and provides stop DV Range V Best Fred an Excel like workbook for viewing and Panis 5T UE analyzing test results The Graph Tab provides a full featured data plotting tool capable of Gate suus x Buk NDU x producing report ready graphs The Status eV esmae T NO a a o Tab reports any errors that would interfere e ange V Best Fed 4 N sun with test execution Points 4 Bu Source SMU1 v FORCE MEASURE Bias V OV Measure I NO Measure V NO Compl 0 14 JE vds idt1 1 2 m n d M am D E N e d je je N ng E DS ilo Definition Tab User Test Module The Definition Tab of a UTM presents users a tabular fill in the blank interface for entering input parameters to call a C language subroutine UTMs provide the ability to control internal SMUs and GPIB and RS 232 devices This screen allows the user to select a user library a subroutine module and then enter the desired input parameters Test results are returned to the Sheet Tab for viewing and analysis Select UTMs have a GUI interface to simplify operation 3 DULL 3 ua DO El d ddd qum ud Ba pead n aqum iie ei ua CHE Ge a CLA Fd E INIM iw de Ede Fije Fus Ria made ssepe rami Pumpe te elt FE z w e e
50. ielded IEEE 488 Cable 1m 7007 2 Double Shielded IEEE 488 Cable 2m CA 19 2 Cable Assembly CA 426B TRIAX to SSMC Cable Assembly CA 446A SMA Cable 10002 3m CA 447A SMA Cable male to male 10002 1 5m OTHER ACCESSORIES 4200 CART Roll around Cart for 4200 SCS 4200 CASE Transport Case for 4200 SCS 4200 MAN Printed Manual Set for 4200 SCS Manual on CD ROM is included in Base Unit 4200 Q STBL KIT Stabilization Kit for 4200 PIV Q NOTES 1 4200 MAG BASE is included with 4200 PIV A Remote Bias Tees 2 Also fits 4200 PIV A Remote Bias Tees 3 All 4200 SCS systems and instrument options are supplied with required cables 2m length KEITHLEY CONFIDENCE MEASURE OF 4200 SCS Semiconductor Characterization System Technical Data Integrated industrial controller and additional RAM ensure high test throughput plus system robustness stability and security Store test setups and results Industry standard right on the system with the Windows based CUI el high capacity fixed disk drive Dunes Up EEE No sorting through floppy and integration time r disks to find the desired test The integrated DVD CD RW drive allows high capacity backup and data transfer High speed high precision ADC per channel eliminates performance tradeoffs Communicate quickly with a wide range of PC accessories with the built in USB interface The 4200 SCS can be rack mounted It has the same dimensions
51. ion flexibility as the following examples illustrate A chassis can contain up to nine SMUs in any combination of high and medium powered units Any configuration can be specified without a flat panel display by substituting the 4200 SCS C for the 4200 SCS F However an external SVGA monitor is required to operate the 4200 SCS C Basic Characterization System Configuration Basic Characterization System Configuration Configuration One 1 Model 4200 SCS F Three 3 Model 4200 SMU medium power SMUs One 1 Model 4200 PA Remote PreAmp module One 1 Remote Sense Ground Unit Description A general purpose configuration for characterizing transistors and other devices Maximum DC Configuration Configuration One 1 Model 4200 SCS F includes two medium power SMUs as the standard configuration which can be substituted with two high power SMUs Seven 7 additional Model 4210 SMUs total of nine all nine can be high power SMUs Nine 9 Model 4200 PA Remote PreAmp modules Description Provides a nine SMU system with 0 1fA sensitivity on all nine SMUs and 1A capability on all nine channels 2 CQ n id re D E N U A je je N wg E UO ilo Maximum Pulse Configuration Configuration One 1 Model 4200 SCS F Four 4 Model 4205 PG2 dual channel pulse generators 8 channels One 1 digital oscilloscope Model 4200 SCP2 or 4200 SCP2HR Four 4 Model 4200 SMUs Four 4 Model 4200 PA Remote PreAmp modu
52. ise lt 300pA RMS Maximum Voltage 200V gt 40V requires safety interlock and related precautions Maximum Current 1A NOTES 1 Unless stated otherwise all specifications assume a 50Q termination 2 Leakage measured after a 5 second settling time 3 Forthe high power 4210 SMU For the medium power 4200 SMU the maximum current is 100mA DC Sense p orce D DC Sense SMU2 li DC Force D DC Sense H SMU DC Force p Trig Out a Trig In P PG2 1 E Ch 1 gt Interconnect for 4200 FLASH for single DUT shown with four SMUs and no external switch matrix FLASH provides pulsing for program erase and P E stress waveforms and DC for Vt measurements TE EUER Bit Line ense p Witc D D 1 C Sense p I2 DC Force H SMU2 C Sense p DC Force H DC Sense p SMU DC Force H Trig Out E PG2 1 emp Ch 2 b Trig Out E Trig In 5 Ch 1 6 Ch 2b PG2 2 Source DUT Interconnect for 4200 FLASH for addressable device shown with four SMUs and external switch matrix FLASH provides pulsing for program erase and P E stress waveforms and DC for Vt measurements KEITHLEY CONFIDENCE MEASURE OF 2 A C n 2 om D Pr WY U xl je je N sy E UO ilo SEMICONDUCTOR 2 CQ n id re D E N U A je je N wg E UO ilo SEMICONDUCTOR 4200 SCS 1 888 KEITHLEY u s only www keithley com Semiconductor Character
53. ization System Technical Data KTE Interactive Software Tools KTE Interactive includes a variety of software tools for operating and maintaining the 4200 SCS Keithley Interactive Test Environment KITE The 4200 SCS device characterization application Keithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE using 4200 SCS or external instruments Keithley Configuration Utility KCON Allows test engineers to define the configuration of GPIB instruments switch matrices and analytical probers connected to the 4200 SCS It also provides system diagnostics functions Keithley External Control Interface KXCI The 4200 SCS application for controlling the 4200 SCS from an external computer via the GPIB bus or Ethernet KPulse A graphical user interface GUI that is a non programming alternative to configure and control the installed Model 4205 PG2 pulse generator cards It is used for quick tests requiring minimal interaction with other Model 4200 SCS test resources Note KPulse is only included with the 4205 PG2 4200 PIV A 4200 PIV Q and 4200 FLASH KScope A graphical user interface GUI that provides a non programming alternative to control the system s scope card either Model 4200 SCP2HR or Model 4200 SCP2 Note KScope is only included with the 4200 SCP2 4200 SCP2HR 4200 PIV A and 4200 PIV Q Microsoft Windows Windows Operating System The operating system is a
54. les Description Provides a four SMU system with eight channels that support traditional pulse mode arbitrary waveform mode ARB Segment ARB waveform mode Segment ARB or SARB and trigger in Each pulse channel contains an inline High Endurance Output Relay solid state relay The oscilloscope provides pulse measure and waveform monitoring Example Broad Use Case Configuration Configuration One 1 Model 4200 SCS F Three 3 Model 4205 PG2 dual channel pulse generators 8 channels One 1 digital oscilloscope Model 4200 SCP2 or 4200 SCP2HR Four 4 Model 4200 SMUs Four 4 Model 4200 PA Remote PreAmp modules One 1 Model 4210 CVU Capacitance Voltage Instrument Description Provides an ultra flexible multi use system for a broad range of parametric tests including very low level DC measurements C V and pulse sourcing SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Hardware Specifications DC SMU Hardware Specifications CURRENT SPECIFICATIONS SPECIFICATION CONDITIONS Specifications are the performance standards against which the Models 4200 SMU 4210 SMU and 4200 PA MEASURE SOURCE are tested The measurement and source accuracy are CURRENT MAX ACCURACY ACCURACY specified at the termination of the supplied cables 4210 1 uA 0 100 200uA 50 uA 0 100 350 uA between 5 and 60 after
55. libraries of subroutines with KITE allowing the 4200 SCS to control an entire test rack from a single user interface KULT is derived from the Keithley 600 and 400 Series Parametric Test Systems This simplifies migration of test libraries between the 4200 SCS and Keithley parametric test systems Standard User Libraries The 4200 SCS includes the following useful subroutine libraries which provide out of the box integration and control of Keithley switch matrix systems and other common device characterization equipment Users access these libraries with the UTM definition tab described on page 16 chargepumping This library can be used to study charge trapping and new charge creation on a high K Si interface and within high film hotchuck temptronics 3010b This user library controls the temperature of Temptronics 3010b hotchucks This library sets the target temperature and waits until the target is reached before exiting hotchuck_triotek The hotchuck triotek user library controls the temperature of TrioTek hot chucks This library sets the target temperature and waits until the target is reached before exiting hb4284ulib The hp4284ulib user library performs capacitance measurements and C V sweeps using the Agilent 4284A or 4980 LCR meter hp4294ulib The hp4294ulib user library performs capacitance measurements C V sweeps and frequency sweeps using the Agilent 4294 LCR meter This library also includes calibration rou
56. llation of Model 4200 KTEI 7 2 software test suite Same as 4200 CPU COR2 C except for 4200 SCS F Flat Panel systems only Note The 4200 CPU COR2 C and F upgrades restore the 4200 SCS to factory conditions The hard drive is reformatted and all old data and projects will NOT be preserved Be sure to back up all data and projects prior to ordering either of these upgrades 4200 CPU COR2 C 4200 CPU COR2 F Approved Third Party Software Acronis True Image OEM Adobe Acrobat 7 0 or later Adobe Acrobat Reader 7 0 or later Diskeeper 9 0 or later Kaspersky Anti Virus 2009 or later Microsoft Excel Microsoft Internet Explorer 5 0 or later Microsoft Word Norton AntiVirus 2000 6 0 or later Symantec pcAnywhere 11 0 TrendMicro Anti Virus 2008 or later Visual C net Windows XP Professional KEI TI HLEY CONFIDENCE MEASURE OF 2 A C n 2 D LI Un U xl je je N ng E DS ilo SEMICONDUCTOR J O n M am D eco N U A je je N ng E TO lo SEMICONDUCTOR 4200 SCS Warranty Information Warranty Summary This section summarizes the warranties of the 4200 SCS For complete warranty information refer to the 4200 SCS Reference Manual Any portion of the product which is not manufactured by Keithley is not covered by this warranty and Keithley will have no duty to enforce any other manufacturer s warranties Hardware Warranty
57. ltaic cells of all types including crystalline amorphous and thin film I V C V and resistivity test are included Nanotechnology Project NanoDevices This project is designed specifically for Nanotechnology applications and includes the most common tests for nanowires nanotubes molecular and CNT transistors and biocomponents C V Projects CVU BJT Measures capacitance at 0V bias between terminals including C Cpo and Cec CVU Capacitor Performs both a C V sweep and a C f sweep on a Metal Insulator Metal MIM capacitor and calculates standard deviation CVU highV Performs C V and C T sweeps using the Model 4200 CVU PWR C V Power Package up to 400V CVU InterconnectCap Measures C V of small interconnect capacitance on wafer CVU ivcvswitch Demonstrates using DC SMUs 4210 CVU and 707A 708A switch matrix in one project Switches back and forth between DC and C V tests and connections to the DUT CVU Lifetime Determines generation velocity and lifetime testing Zerbst plot of MOS capacitors CVU MobileIon Determines mobile charge using the bias temperature stress method Extracts flatband voltage Includes built in control of a hot chuck to test a sample at room temperature heated then tested again at room temperature to determine flatband shift CVU_MOScap Measures C V on a MOS capacitor Extracted parameters include oxide capacitance oxide thickness doping density depletion depth Debye len
58. ludes all the necessary code and the interconnect needed to perform a standard set of Flash memory tests for NAND or NOR technologies with higher pulse voltages important for MLC technologies The tests included generate program and or erase cycles using the patent pending Segment ARB pulse mode as well as controlling the in line High Endurance Output Relay Endurance and Disturb tests are also included Four channels of multi level pulse e 40V pulsing into high impedance pin 20V into 500 High Endurance Output Relay provides fast open close for pin isolation during erase pulse e Pulse Widths 200ns to 1s Up to 25 pulse levels 100 pulse segments Included tests Endurance Program read Erase read Disturb 1 1 00E 07 1 Start V Stop V Time s Trig 1 0 SSR 1 0 1 1 2 00E 08 1 1 2 00E 08 2 3 Typical NOR FLASH gate program erase cycle 1 888 K EITHLEY u s only www keithley com GREATER 4200 FLASH Typical Specifications CHANNELS 4 channels optional 8 channels max TYPICAL PULSE PERFORMANCE Number of Voltage Levels Waveform 25 Minimum Transition Time 150ns Pulse Source Voltage Range 0 to 20V into 50Q 0 to 40V into high impedance Pulse Width 250ns to 1s Trigger Synchronization Jitter 8ns Switching Time for DUT Pin Isolation 100us HEOR Off Capacitance 250pF SMU TYPICAL DC PERFORMANCE Typical DC Leakage 10nA V for 35V Typical DC No
59. m date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 1 year factory warranty on the 4205 PG2 Pulse Generator Card extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 3 cals within 3 years of purchase of the 4205 PG2 Pulse Generator Card Requires purchase of 4200 3Y CAL 1 year factory warranty on the 4210 CVU C V Measurement Unit extended to 3 years from date of shipment Includes calibration and return shipping Requires purchase of 4200 3Y EW 3 cals within 3 years of purchase of the 4210 CVU C V Measurement Unit Requires purchase of 4200 3Y CAL KEI TI HLEY GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Value Add Services IMPL 4200 One 8 hour day of on site implementation An Applications Engineer will visit your facility and get your 4200 SCS implemented for your application Includes unpack installation setup configuration and basic training on product usage Does not include travel expenses APPS SERVICE Customized applications assistance Examples include e Software services KULT UTM development and customization Applications assistance test plan development test process optimization measurement troubleshooting e System development integration of a 4200 SCS with other elements of a test system such as a switch matrix or a C V met
60. n is added to the test environment the 4200 SCS standard user library matrixulib connects instrument terminals to output pins through a simple fill in the blank interface Up to Optional Card 6 Optional Card 1 Card 2 4200 Various integrated instruments SMU SMU w PA 4205 PG2 4200 SCP2 etc External Additional Card optional Additional Card optional C V Meter 7174A 7072 or 7071 Card All switch matrix cards in a system must be of the same type Pins 1 12 Pins 13 24 Pins 61 72 Model 708A Chassis 1 Card 8x12 Pins bP Model 707A Chassis 1 6 Cards Up to 8x72 Pins Basic block diagram of 4200 SCS configurations KEITHLEY CONFIDENCE A GREATER MEASURE OF 4200 SCS Semiconductor Characterization System Technical Data Ultra Low Current Local Sense Configuration 4200 UL LS XX The Ultra Low Current Local Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix Card with the Model 707A or 708A Switch Matrix which is designed for semiconductor research development and production applications requiring high quality high performance switching of I V and C V signals This configuration provides eight instrument inputs with up to 72 output pins at only 10fA typical offset current 4200 UL LS 12 or 12 707A 1 708A or 707A Switch Mainframe 1 7174A Switch Card 12 4200 TRX 3 Cable for each 12 pins 1 7007 1 IEEE Cable 2 7078 TRX BNC Ad
61. nd DC Single pulse scope view Useful for setup validation pulse width optimization and prototyping of novel pulse tests 1 888 K EITHLEY u s only www keithley com GREATER 4200 PIV A for CMOS Typical Specifications CHANNELS 2 TYPICAL PULSE PERFORMANCE with 4205 Remote Bias Tee Measurement Accuracy lt 4 of signal 1mV Maximum Current Measure 100mA Resolution 100nA Offset 500nA Sample Rate 1GS s Duty Cycle 0 196 DC Offset 200V Minimum Transition Time 10 90 15ns Pulse Source Voltage Range 0 to 5V into gate Pulse Width 40ns to 150ns SMU TYPICAL DC PERFORMANCE with 4205 Remote Bias Tee Leakage 1 10nA V Noise 1 10nA RMS Maximum Voltage 210V gt 40V requires safety interlock and related precautions Maximum Current 0 5A 4200 REMOTE BIAS TEE TYPICAL PERFORMANCE Band Pass 3 5kHz 300MHz dB Power Divider Max Power Input 0 125W DC NOTES Unless stated otherwise all specifications assume a 50Q termination When using Adaptive filtering Leakage measured after a 5 second settling time All typical specs apply to the AC DC output connector of the 4205 Remote Bias Tee and after system compensation A OW N e All specifications apply at 23 5 C within one year of calibration RH between 5 and 60 after 30 minutes of warmup Ch 1 77 SCP2 Trig In 7 Ch 2 PH 53 Trig Out Z oc a Input Trig In 3 pom AC DCH PG2 DC Force Ch 1 I RBT2
62. o program and erase state dependencies on pulse parameters using three types of waveforms program erase and fast program erase Flash Switch also includes automatic control of Keithley s Model 707A or Model 708A Switch Matrix FlashDisturb NOR FlashDisturb NAND FlashDisturb Switch The Disturb tests pulse stress a device in an array test structure then perform a measurement such as V on a device adjacent to the pulsed device The goal is to measure the amount of V shift in adjacent cells either in the programmed or erased states when a nearby device is pulsed with either program erase or program erase waveforms FlashDisturb Switch also includes automatic control of Keithley s Model 707A or Model 708A Switch Matrix FlashEndurance NOR FlashEndurance NAND FlashEndurance Switch These projects pulse stress the DUT with a number of Program Erase waveform cycles then periodically measure the V The purpose of these projects is to determine the lifetime of the DUT based on the number of program erase cycles withstood by the device before a certain amount of shift or degradation in the V or other measurement They also control in line solid state relays for the erase waveform cycle FlashEndurance Switch also includes automatic control of Keithley s Model 707A or Model 708A Switch Matrix CMOS Project CMOS default The tests in this project include the most common CMOS device tests that a typical user might perform on a daily b
63. ories and Optional Instrumentation Accessories Supplied for DC SMUs 4200 MTRX 2 Ultra Low Noise SMU Triax Cable Two supplied for each SMU 2m 6 6 ft Not included with SMUs configured with a 4200 PA Remote PreAmp 4200 TRX 2 Ultra Low Noise PreAmp Triax Cable 2m 6 6 ft Two supplied for Ground Unit Two supplied in replacement of 4200 MTRX 2 cables for each SMU configured with a 4200 PA 4200 RPC 2 Remote PreAmp Cable One supplied for each PreAmp 2m 6 6 ft 236 ILC 3 Interlock Cable 3m 10 ft Line Cord NEMA 5 15P for 100 115VAC or CEE 7 7 Continental European for 240VAC User Manual and Reference Manual supplied on the 4200 SCS Complete Reference CD ROM Printed manual available as an option Accessories Supplied with 4210 CVU User Manual CA 447A Four SMA Cables male to male 10002 1 5m CS 1247 Four Female SMA to Male BNC Adapters CS 701 Two BNC Tee Adapters TL 24 One SMA Torque Wrench Accessories Supplied with 4200 CVU Prober Kit CA 446A Four SMA Cables 10002 3m CS 565 Four Female BNC to Female BNC Adapters 237 TRX BAR Four Female Triax to Female Triax Adapters 7078 TRX GND Four Male Triax to Female BNC Adapters guards removed 7078 TRX BNC Four Male Triax to Female BNC Adapters CS 1247 Four Female SMA to Male BNC Adapters CS 1391 Two SMA Tee Adapters female male female 4200 PRB C Two SSMC to SMA Cables with local ground Optional Instrumentation 4210 CVU Integrated C V Instrument 42
64. ppear instructing the operator what operation is required Fake Prober The Fake prober is useful when prober actions are not desired such as when debugging without having to remove prober commands from a sequence Supported Semi automatic Analytical Probers Cascade Microtech Summit 12K Series verified with Nucleus UI Karl Suss Model PA 200 verified with Wafermap for ProberBench NT NI GPIB Driver for ProberBench NT PBRS222 Interface for ProberBench NT Navigator for ProberBench NT Remote Communicator for ProberBench NT MicroManipulator 8860 Prober verified with pcBridge pcLaunch pcIndie pcWfr pcNav pcRouter Signatone CM500 driver also works with other Signatone probers with interlock controller such as the WL250 and S460SE KEITHLEY MEASURE OF CONFIDENCE n C n 2 om D p N U xl je je N sy E DS ilo SEMICONDUCTOR J m n d X am D ecm N U A je je N cr E DS io SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Keithley User Library Tool KULT The Keithley User Library Tool supports creating and integrating C language subroutine libraries with the test environment User library modules are accessed in KITE through User Test Modules Factory supplied libraries provide up and running capability for supported instruments Users can edit and compile subroutines then integrate
65. r written C language subroutines These subroutines can control internal 4200 SCS instruments and or external instruments and systems through the RS 232 or GPIB interface This dual approach provides an extendable test environment that gives the users the same capabilities for data analysis plotting and output and automation whether the instrument used is part of the base system or an external instrument It also offers users the flexibility to write complex test algorithms for control of either internal or external instruments Definition Tab Interactive Test Module The Definition Tab of an ITM provides a point and click interface for setting test input parameters that control the 4200 SCS SMUs and defining parameter extractions Two modes are available Sweep Mode Forcing Common Voltage Bias Current Bias VMU Voltage Sweep Current Functions Sweep Voltage Step Current Step Voltage List Sweep Current List Sweep Open C V Differential Bias Measuring Measure Current or Programmed Current Measure Voltage or Functions Programmed Voltage C V Measurement parameters Cp G Cp D Cs Rs Cs D R jX Z theta Fast Normal Quiet and Custom Integration Times Measure voltage current or both on each sweep point regardless of forcing function 1 Pulse SMU The system s SMUs can now be set to provide pulse output for sweep linear log and list and bias forcing functions This involves having the SMU pulse which is different t
66. s in VMU bee prd Cento UXORI Sal es de or by using the low sense terminal provided with each SMU 2 Specifications apply on these ranges with or without a 4200 PA aD a y 8 3 Specified resolution is limited by fundamental noise limits Measured resolution is go 67 digits on each range Source resolution is 4 digits on each range 4 Interlock must be engaged to use the 200V range GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional errors are introduced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way binding post MAXIMUM CURRENT 2 6A using dual triaxial connection 8 5A using 5 way binding posts LOAD CAPACITANCE No limit CABLE RESISTANCE FORCE lt 1Q SENSE lt 10Q RAMP RATE QUASISTATIC C V TYPICAL PERFORMANCE CHARACTERISTICS MEASUREMENT PARAMETERS Cp DCV timestamp RANGING 1pF to 1nF Measurement Terminals Triaxial guarded Ramp Rate 0 1V s to 1V s DC Voltage 200V TYPICAL CP ACCURACY 5 at 1v s ramp rate e o _ Q m Z o LL un 1 888 K EITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data Model 4210 CVU Specifications MEASUREMENT FUNCTIONS MEASUREMENT ACCURACY SUPPLEMENTAL CABLE SPECIFICATION MEASUREMENT PARAMETERS Cp G Cp D Cs Rs Cs D
67. s like parasitic capacitance and leakage currents for more accurate low level measurements An optional vacuum Model 4200 VAC BASE or magnetic Model 4200 MAG BASE platen mount ing base allows the PreAmp to be located next to manipulators on the chuck platen eliminating measurement problems caused by long cable lengths when performing ultra low current measurements 2 m n i C D E N d le je N wg c TO ie If platen space is not available the triax mounting bracket Model 4200 TMB allows users to locate the PreAmp on dual triaxial connectors that may already be installed for HP4156 Kelvin triax cables This mounting option reduces problems caused by long cables without occupying platen space SEMICONDUCTOR 1 888 KEITHLEY us only KEITHLEY www keithley com A GREATER MEASURE OF CONFIDENCE 4200 SCS Semiconductor Characterization System Technical Data 4200 SCS Accessories Model 4200 CASE Transport case Model 4200 CART Roll around cart Model 4200 KEY RM Keyboard rack mount Model 4200 CAB XXX Cabinet c o Q m Z O Eu un 1 888 K EITHLEY us only A GREATER MEASURE OF CONFIDENCE g9 2 CQ n d M am D E N e d je je N ng E DS io SEMICONDUCTOR 4200 SCS KEITHLEY INSTRUMENTS INC M 28775 AURORA ROAD BELGIUM Sint Pieters Leeuw Ph 02 3630040 Fax 02 3630064 info keithley
68. tests Pulse Generator The Model 4205 PG2 Dual Channel Pulse Generator provides dual channel pulsing with voltage pulses as short as 10ns in high speed mode or up to 20V into 50 2 in high voltage mode It supports two new waveform generation modes in addition to the standard pulse capability The Arbitrary Waveform Mode can generate complex waveforms made up of up to 256K data points at clock speeds up to 25MHz The Segment ARB Mode patent pending generates waveforms made up of up to 1024 user defined line segments Each segment can have a different duration Oscilloscope The system supports two dual channel integrated digital oscilloscope options the Model 4200 SCP2 offers 8 bit resolution with a sample rate up to 2 5 gigasamples second while the Model 4200 SCP2HR provides 16 bit resolution and a sample rate up to 400 megasamples second Both can be programmed for automated measurement and data acquisition or used with the stand alone GUI application provided to perform traditional oscilloscope tasks They provide measurements in both the time frequency rise fall time and voltage domains amplitude peak peak etc KEI TI HLEY CONFIDENCE MEASURE OF 2 A C n 2 om D Pr Un U xl je je N sy E 5 ilo SEMICONDUCTOR 4200 SCS Semiconductor Characterization System Technical Data Configuration Examples The 4200 SCS s plug in chassis design offers exceptional configurat
69. tines to perform phase open short and load calibrations bp8110ulib The hp8110ulib user library performs initialization setup and triggering for the Agilent HP8110A or 81110A pulse generator ki42xxulib The ki42xxulib user library provides an example subroutine for performing a MOSFET ON resistance Roy test routine using the 4200 SCS LPTLIB interface ki82ulib The ki82ulib user library performs simultaneous C V C t and Q t measurements and cable compensation for the Keithley System 82 Simultaneous C V System ki340xulib For use with Keithley Series 3400 pulse pattern generators ki590ulib The ki590ulib user library performs conductance measurements and 100kHz or 1MHz capacitance measurements C V sweeps C V pulse 1 888 K EITHLEY us only www keithley com GREATER sweeps C t sweeps and cable compensation for the Keithley Model 590 C V Analyzer ki595ulib The ki595ulib user library performs Q t sweeps and C V sweeps using the Keithley Model 595 Quasistatic C V Meter kipulseulib The kipulseulib UTMs control the Model 4205 PG2 pulse card kiscopeulib The kiscopeulib UTMs control either the Model 4200 SCP2HR or 4200 SCP2 oscilloscope matrixulib The matrixulib user library connects instrument terminals to output pins using a Keithley 707A or 708A switch system when configured as a general purpose Model 4200 GP RS XX low current Model 4200 LC LS XX or ultra low current matrix Model 4200 UL R
70. tion condition and reverse reverse source and drain bias conditions If only a subset of these parameters is needed it is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses Also if less than four devices are tested it is possible to deselect the unwanted device plan in the project tree or modify it for more devices HCI PULSE This Hot Carrier Injection HCI project tests one 4 terminal N MOSFET using AC stress It is similar to HCI 1 DUT NBTI 1 DUT This is a Negative Bias Temperature Instability NBTI project on one 4 terminal P MOSFET Parameters monitored between two successive stresses include Ihor Ipon Ic Vz and G If only a subset of these parameters is needed it is possible to deselect the test s that include the unwanted parametric measurements It is also possible to add custom tests that will be monitored between successive stresses Qbd This charge to breakdown project consists of two Q tests on gate dielectrics V Ramp and J Ramp Those two tests follow JEDEC Standard 35 A An additional test performs an I V measurement under normal work conditions to obtain input parameters for the V Ramp and J Ramp tests Pulse Projects Chargepumping This project consists of Charge Pumping CP tests that characterize interface and charge trapping phenomena There are a variety of tests including bas

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