URB100CC User Manual - Newport Corporation
Contents
1. was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director v EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Uni2. S 51 ele e7 es High Speed Belt Driven Rotation Stage ND USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed URB100CC High Speed Belt Driven Rotation Stage Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0242En1020 11 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified
3. Wobble rad 50 or 25 Eccentricity um 30or 15 TBF 20000 h at 25 load and with a 30 duty cycle With disabled limit switches 2 To minimize drive chain hysteresis affecting repeatability Newport recommends always approaching positions from the same direction of motion 3 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a rotation stage can move while maintaining specifications This value is given with speed and acceleration specified for each rotation stage and with a load perpendicular to bearings Off Centered Load Q Maximum cantilever load a rotation stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter 3 4 Load Characteristics and Stiffness Cz Normal centered load capacity N 100 Ka Transversal compliance prad Nm 10 Mz Maximum torque Nm 0 6 Jz Maximum inertia kg m2 0 025 Q Off center load N Q lt Cz 1 D 35 Where D Cantilever distance mm gt Newport EDH0242En1020 1 1 1 5 4 Experience Solutions URB100CC High Speed Be
4. 5V 2 den 7 E r sy gt 5 ov Connector Sl oe Lu Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newport Stage 1 Mechanical Zero Stage End of Run lin max 10 mA lin Max 16 mA V max 30 V V max 5 6 V is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 REEL ENS OR If the Mechanical Zero output Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport Experience Solutions 1 1 EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage 8 0 Disabling of Limit Switches The URB100CC stage is equipped with a 160 optical limit switch which can be disabled for continuous 360 rotation NOTE On request the limit switch can be set in factory at the desired position Please contact our sales engineers GS LIMIT SWITCHES ACTIVE INHIBITED ACTIVED INHIBITED LIMIT SWITCHES POSITION LIMIT SWITCHES POSITION 160 TRAVEL RANGE
5. CONTINUOUS TRAVEL RANGE 9 0 Dimensions 4 HOLES 0 31 7 8 1 56 33 C BORED 9 45 11 5 ON SOR 3 97 100 8 lt 39 5 gt 8 5 p 98 A POLL x SO 25 47 LT 81 J SQR 4 49 Fe LS 346 114 59 88 CORRE A 189 k 179 Y Y Q 4 HOLES M4 THD ON SOR 1 89 48 4 HOLES M6 THD ON SOR 1 97 50 DEPTH 24 6 DEPTH 22 5 5 03 08 SUB D15M i 78 CONNECTOR if ES 1 50 Ml ere 38 rf 01 Gas 16 1 50 are Uld 0 25 Les ia 38 39 10 y f y A A A i SEES 4 96 02 28 58 a lt 3 19 81 gt 3 31 He 4 15 105 5 gt gt 84 01 65 42 MODEL SHOWN URB100CC DIMENSIONS IN INCHES AND MILLIMETERS Y Y QD Newport EDH0242En1020 1 1 1 5 1 2 Experience Solutions URB100CC High Speed Belt Driven Rotation Stage 10 0 Maintenance 10 1 10 2 10 3 gt Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The URB100CC stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The URB100CC stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your URB100CC stage to Newport s After Sales Servi
6. repeatability Motor UE34CC DC servo motor Cable 3 m long cable included RoHS Compliant NOTE This product complies with the RoHS directive Restriction of Hazardous Substances D Newport Experience Solutions URB100CC High Speed Belt Driven Rotation Stage 3 0 Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity
7. ND ELETO O EAE EEA ES EA S E E E ENE E E E 13 SErVICE POr e aoa E E Da 15 QD Newport EDH0242En1020 1 1 1 5 iv Experience Solutions URB100CC High Speed Belt Driven Rotation Stage EC Declaration of Conformity S SRE PSO Go ONG fe Ie 4 SN NS amp N S AS LS Cy as K DAS ie OND a SYG OS OAS Ie ONG x Nie XXe ENS gt Newport Experience Solutions RRS OFFEROR ROMS URB100CC EC Declaration of Conformity following Annex IT 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description URB100CC Function High Speed Belt Driven Rotation Stage Models URB100CC the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements e NF EN 55011 2010 A1 2011 Class A
8. The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Eccentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points D Newport Experience Solutions 3 EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com 3 2 Mechanical Specifications Travel Range 360 continuous inimum Incremental Motion 0 02 Uni directional Repeatability 0 015 Bi directional Repeatability 0 115 or 0 0575 Absolute Accuracy 0 2 or 0 1 aximum Speed s 720 aximum acceleration s2 1300 with of 0 025 kg m inertia
9. als and should not be connected to any other source QD Newport EDH0242En1020 1 1 1 5 6 Experience Solutions URB100CC High Speed Belt Driven Rotation Stage 5 4 5 5 gt Newport Experience Solutions Feedback Signal Position Encoder Phase A Encoder Phase A _ Direction Encoder Phase B Encoder Phase B oe Direction Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A Pin 19 Encoder Phase A Pin 23 Encoder Phase B L Pin 20 L 5 B I Pi i Output Signals Encoder Phase B_J Pin 24 4 g Index Pulse Phase x Pin 15 F 2 T Index Pulse Phase Pin 25 z T ue 5 V 5 Encoders I Pin 22 I 150 mA max amp Sensors OV Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 Pinouts The SUB D15 connection for the URB100CC rotation stage is given in the following table URB100CC UE34CC N C Motor Mechanical Zero E
10. ce after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your URB100CC stage to Newport once a year for recalibration to its original specifications 13 EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage gt Newport EDH0242En1020 11 15 14 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 15 EDH0242En1020 1 1 15 Newport Experience Solutions Visit Newport On
11. ctric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eee Stns vii EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C i
12. eed Belt Driven Rotation Stage 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely ESP These stages are ESP compatible Enhanced System Performance is COMPATIBLE 6 3 Cables Our stages are delivered with a MSCABLE 3 3 meter cable This cable is equipped with SUB D15F and SUB D25M connectors so it can be directly connected to our controllers drivers 6 4 MSCABLE 3 Cable lt 2 24 57 gt DISCONNECTED LOCKING KNOBS gt CABLE nn yee CONNECTOR STAGE SS if SUB D15 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 2 94 24 CABLE IN MOTION 22 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MSCABLE 3 included with your stage is not adequate Newport offers a 10 m longer length cable MSCABLE 10 designed to ensure t
13. ficantly higher rotation speeds of up to 720 s without sacrificing life time expectancies Typical applications are LIDAR 3D imaging or film thickness measurements of semiconductor wafers Common to these applications are fast rotations over larger angles or continuous spinning at very high duty cycles and with high precision requirements with regards to wobble angular repeatability and speed stability Like the URS series the URB100CC features a proprietary 4 contact point ball bearing The unique 2 piece design provides exceptional stiffness high reliability and outstanding wobble and eccentricity The enhanced low profile package supplies easy top down mounting options and is mechanically compatible with our ILS series of linear stages note motor protrudes the lower surface of the stage Position feedback is provided by a motor mounted 2000 cts rev rotary encoder To minimize the effects of drive chain Hysteresis impacting repeatability positions should be always approached from the same direction of motion Design Details Based material Hardened steel with Aluminum body Bearings Large diameter 4 contact point ball bearing Drive mechanism Belt drive with 18 1 reduction ratio Feedback Motor mounted rotary encoder 2 000 cts rev index pulse Limit switches Two independently adjustable optical limit switches enabled disabled by external switch Origin Optical fixed at position 0 Typical 0 015
14. he integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D15 and SUB D25 connectors WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport EDH0242En1020 11 15 10 Experience Solutions URB100CC High Speed Belt Driven Rotation Stage 7 0 Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a URB100CC stage when it is used with non Newport controllers WARNING Newport guarantees C compliance of the URB100CC stage only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a URB100CC stage is used with non Newport controllers SUB D25M SUB D15F URB100CC Connector Connector UE34CC 9 10 11 12 1 2 3 4 5 a A 2 Motor 63 rt i 1 ii 15 a 10 Motor B RE Y E o Y 4 _ E i SE TE B fh il cane 13 1 3 Mechanical Zero 19 i 7 i Y 13 Encoder Phase A 23 La 6 Encoder Phase A 20 T 1 14 Encoder Phase B 24 mm mj 1 7 Encoder Phase B 15 i t 1 15 Index Pulse 25 _ i 8 Index Pulse I 17 i 2 11 End of Run 2 18 m m 4 End of Run 2 21 Li 12
15. he power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts D Newport Experience Solutions 9 EDH0242En1020 11 15 URB100CC High Sp
16. line at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
17. load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions URB100CC High Speed Belt Driven Rotation Stage Table of Contents Warranty coi svcsalss sepagsn essence neas dececs leds das ness aa teens cap decors nec E aes ah canta stades ii EC Declaration Of CONOMIE ARE Re v Definitions and Symbols sanne eden ease vi WAPI GS nresnani ee E ea a axed due cuatectientead eee tree a tee En vii CAUTIONS session vi catseuv set sduver oastevveaevecveaaeiveey vente nlsdenidenens viii 1 0 Introduction 1 2 0 Description eee ne nes io son 2 2 1 Design Details nn NE EE ESE 2 3 0 CharacteristiCs succeer 3 Sel D finitions sssssssssisssere
18. lt Driven Rotation Stage 3 5 Stage Weight The stage weight below is the value of the rotation stage without the cable Weight Ib kg URB100CC 4 0 1 8 3 meter MSCABLE 3 Cable 0 66 0 3 4 0 Drive 4 1 DC Motor Drive Resolution Speed Mote o o r C s URB100CC 0 01 720 UE34CC D Newport Experience Solutions 5 EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage 5 0 Motor 5 1 UE34CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE34CC 20 1 0 2 0 2 52 0 51 5 2 Command Signals for the DC Motor Motor v TTT Motor v Motor v Displacement Direction Direction Displacement Motor v Direction Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 3 Sensor Position A Home Position Origin e EE RE Mechanical Zero Index Pulse Index Pulse a Stage Travel Range _ gt Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active sign
19. n its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0242En1020 11 15 viii Experience Solutions URB100CC High Speed Belt Driven Rotation Stage High Speed Belt Driven Rotation Stage URB100CC 1 0 Introduction This manual provides operating instructions for the URB100CC rotation stage URB100CC rotation stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the URB100CC rotation stage D Newport Experience Solutions 1 EDH0242En1020 11 15 URB100CC EDH0242En1020 11 15 2 1 High Speed Belt Driven Rotation Stage 20 Description The URB100CC rotation stage is based on our popular URS series but features a belt drive instead of a worm gear The belt drive offers signi
20. nd of Run OV Encoder Phase A Encoder Phase B Index Pulse N C Motor End of Run 5 V Encoder Phase A Encoder Phase B Index Pulse Olo NID OCT A GW N 0000000 OOO 0100 co D w A O1 7 EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage The SUB D25 connection at the end of the cable is given in the following table URB100CC UE34CC 1 N C 14 Shield Ground 2 N C 15 Index Pulse 3 N C 16 0 V logic ufo A 4 N C 17 End of Run O z 5 Motor 18 End of Run z 2 6 Motor 19 Encoder Phase A 7 Motor 20 Encoder Phase B 5 8 Motor 21 5 V F 9 N C 22 0 V Encoder 25 a Re 10 N C 23 Encoder Phase A 11 N C 24 Encoder Phase B 12 N C 25 Index Pulse 13 Mechanical Zero Newport EDH0242En1020 11 15 8 Experience Isolators URB100CC High Speed Belt Driven Rotation Stage 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If t
21. on CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user D Newport EDH0242En1020 1 1 1 5 vi Experience Solutions URB100CC High Speed Belt Driven Rotation Stage Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an ele
22. rnssneenennieininnninintniuniin 3 3 2 Mechanical Specifications ses cocconsee caries cos cessvtsesaacccexeess cds 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffness cece cccseeseecneeesseceseeeteeeseeesteeenes 4 3 5 Stage Weights n es 5 40 DRIVE nn nains 5 4 1 DC Motor Drive minimerer a aeS 5 SU Motor ennhidlndelintnsendtiabiadtostinticducedhians 6 5 1 UE34CC Motor Characteristics 6 5 2 Command Signals for the DC Motor ececceseeesseeeesceecesenececeneeneeneees 6 53 Sensor POSITION stresse ne Ann ital 6 5 4 Feedback Signal Position sessesessessesessesessessssessesessesessessssessesessesessesossese 7 5 5 Pim Outs ainiin E E E AS 7 6 0 Connection to Newport Controllers 9 6 1 Warnings on Controllers ao DE Gnidia isis 9 6 2 CONH CHONMS 2 LE M tas dla Mi Miele 10 6 3 Cablessssssssseserseisersnseriensereansenernnnenenenssvinennernerensenerns 10 6 4 MSCABLE 3 Cable crror eea ena EEKE REE EREE 10 7 0 Connection to Non Newport Electronics 11 PE COMMECH ONS Re ee AENEA 11 8 0 Disabling of Limit Switches 22222 12 gt Newport Experience Solutions iii EDH0242En1020 11 15 URB100CC High Speed Belt Driven Rotation Stage 9 0 Dimensions 12 10 0 Maintenance 22222 rernerrenee 13 10 1 Maintenance diese aire des A 13 10 2 R DAIT E EE AT N N E dette ay ie ate A 13 FOR E E
Download Pdf Manuals
Related Search