PZ 96E User Manual Tilt Platforms and Z
Contents
1. E 500 501 chassis D1 Stiffness Static large signal stiffness of the PZT ceramic at room temperature Small signal stiffness and dynamic stiffness may differ because of effects caused by the active nature of the piezo material compound effects etc Further details see Tutorial section of the PI catalog F1 Electrical Capacitance The PZT capacitance values indicated in the technical data tables are small signal values measured at 1 V 1000 Hz 20 C no load large signal values at room temperature are 30 to 50 higher The capacitance of PZT ceramics changes with amplitude temperature and load up to 200 of the unloaded small signal capacitance at room temperature For detailed information on power requirements refer to the amplifier frequency response curves in the PZT Control Electronics section of the PI catalog F2 Dynamic Operating Current Coefficient DOCC Average electrical current supplied by the amplifier required to drive a piezo actuator per unit frequency and unit displacement sine wave operation For example to find out if a selected amplifier can drive a given piezo tilt platform at 50 Hz with 300 urad amplitude multiply DOC coefficient by 50 and 300 and check if the result is less than or equal to the output current of the selected amplifier For details see in the Tutorial Piezoelectrics in Positioning section of the PI catalog G2 Unloaded Resonant Frequency fo Lowest tilt resonant frequency around activ2. as channels 1 2 and 3 clockwise from the cable exit point There are many ways to define the axes and tip tilt angles The definitions you use will depend on the geometry of your application The geometry and formulas shown in Fig 2 are based on a system with the Y axis passing through one of the actuators a Re apy designated A and the tilt 2 3 angles measured around fixed Fig 2 Triple piezo drive tip tilt platform axes i e the angles are geometry viewed from above A B C are measured in the three PZT drives vertical planes not planes necessarily perpendicular to the platform For this example the formulas below would be used to calculate a and B These formulas show the relationship between the displacement of each actuator from the bottom limit of the travel range extension at 0 V and the tip tilt angles in radians It Release 1 10 info pi ws Page 7 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E uses the sin a a approximation making it valid for small angles covering the full travel range of the device a A 2 B C a B B C b with A constant Z A B C 3 where A B and C are the linear displacements of the corresponding piezo actuators between 0 and 12 um a and are the tilt motions in radians measured around fixed axes Z is the linear displacement of the platform centerpoint Equation 1 Triple piezo drive
3. 10 10 Open loop Z actuator all three piezo linear actuators are electrically connected in parallel providing vertical positioning piston movement of the top ring Only one drive channel is required 314 10 Open loop Z actuator same as S 310 10 but with twice the travel range 311 10 Open loop Z tip tilt positioner all three piezo linear actuators can be driven individually or in parallel by a three channel amplifier Vertical piston movement positioning and tip tilt positioning are possible 315 10 Open loop Z tip tilt positioner same as S 311 10 but with twice the tip tilt and piston travel range 316 10 Closed loop Z tip tilt positioner all three piezo linear actuators are equipped with strain gauge position feedback sensors and can be driven individually or in parallel by a three channel amplifier position servo controller Vertical positioning piston movement and tip tilt positioning are possible The integrated position feedback sensors provide sub urad resolution and repeatability with PI control electronics Quick Start Mounting You can mount the object to be positioned for example a mirror on the platform using glue or three screws with M2 5 threads Warnings gt Mounting screws longer than 3 mm may damage the internal flexure system Vv Do not overtighten mounting screws gt Some models have visible assembly screws covered with sealing laquer These screws must not be disturbed Dam
4. GmbH amp Co KG Release 1 10 File S 310_User_PZ96E110 doc 353280 Bytes Release 1 10 info pi ws Operating Manual PZ 96E Page 1 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E Manufacturer Declarations Certification Physik Instrumente PI GmbH amp Co KG certifies that this product met its published specifications at the time of shipment Warranty This PI product is warranted against defects in materials and workmanship for a period of one year from date of shipment Duration and conditions of warranty for this product may be superseded when the product is integrated into becomes a part of other PI products During the warranty period PI will at its option either repair or replace products which prove to be defective Limitation of Warranty The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance by the Buyer Buyer supplied products or interfacing unauthorised modification or misuse operation outside of the environmental specifications for the product or improper site preparation or maintenance The design and connection of any circuitry to this product is the sole responsibility of the Buyer PI does not warrant the Buyer s circuitry or malfunctions of PI products that result from the Buyer s circuitry In addition PI does not warrant any damage that occurs as a result of the Buyer s circuit or any defects that result from Buyer supplied products No ot
5. Piezo Nano Positioning PI PZ 96E User Manual S 310 S 311 S 314 S 315 S 316 Tilt Platforms and Z axis Positioners Release 1 10 Date 2003 02 04 This document describes the following Product s E S 310 10 Z Platform open loop E S 314 10 Z Platform open loop E S 311 10 Tip tilt Z Platform open loop E S 315 10 Tip tilt Z Platform open loop E S 316 10 Tip tilt Z Platform closed loop Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws 310 S 316 Tip Tilt Platforms Table of Contents 1 1 1 2 3 1 3 2 3 3 4 1 4 2 4 3 Manufacturer Declarations INtKFOGUCTION 0 cccceeeeeceeeeeeeeeeeees Feature Srs aa e e Aaen Description cccccccecceeeeeeeeteeeeeeees Model Survey cccccccceeeeeeeeeeeeeeeees Quick Start cccceeeeeeseseeeees Mounting ticcsavtaniciecateetireateeitadiehedl Connecting to Controller 5 Testing enrii onenetara aia Operating Considerations Travel Range essserrrsesssserresseeesseeees Power Requirements c ccc cseseeees Dynamic Behavior Working Principle 00008 Technical Data ccceseeeeeeeeees Dimensions c2 ceeeeeeeceeceeeeeeees Copyright 1998 2003 by Physik Instrumente PI
6. ables of S 316 are each labeled with the sensor channel number The correct PZT and sensor channel assignment must be observed when connecting the unit to the controller The following table summarizes the connections that need to made with the controller Model Actuator Positioner Controller connector s for connector s connecting with the actuator positioner 310 10 S 314 10 PZT drive voltage PZT drive voltage open loop Z actuator 311 10 S 315 10 open loop Z tip tilt positioner S 316 10 closed loop Z tip tilt positioner 1 LEMO connector male PZT drive voltage 3 LEMO connectors male cables labeled CH1 CH2 CH3 PZT drive voltage 3 LEMO connectors male cables labeled CH1 CH2 CH3 Sensors 3 LEMO connectors female cables labeled CH1 CH2 CH3 If calibrated at PI the channel numbers will be indicated 1 output socket on the amplifier module labeled PZT PZT drive voltage 3 output sockets on the amplifier module s labeled PLT PZT drive voltage 3 output sockets on the amplifier module s labeled PZT Sensors 3 input sockets on the PZT servo controller module s labeled SENSOR Amplifier controller modules for OEM applications may be provided with other connection facilities For detailed information about connecting to position control electronics for OEM applicati
7. age to the seal will void the warranty The platform can be mounted in any orientation By default the platform metal case is floating You should ground the mechanics if so required Connecting to Controller S 310 to S 316 platforms are used with position control electronics consisting of amplifier and in case of closed loop operation a PZT servo controller see theTechnical Data table on page 9 for required devices Make sure there is no voltage on the PZT output of the amplifier when you connect the platform to the controller The best way to do so is to switch the controller off The connections that need to made between platform and controller amplifier are listed in the table below For further information on connecting the platform to the controller on controller setup and operation refer to the User Manual of the appropriate controller and to any associated software manuals Release 1 10 info pi ws Page 4 3 3 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E The Z axis only S 310 and S 314 platforms have only one connector for connecting to the PZT output socket of the amplifier Their three PZTs are electrically connected in parallel 311 S 315 and S 316 platforms have three connectors for connecting to the PZT output socket of the amplifier each connector cable is labeled with the PZT channel number With these platforms all three PZTs can be driven individually The three sensor connector c
8. e axis without mirror attached to platform is above the maximum operating frequency For further details see the Tutorial Piezoelectrics in Positioning section of the PI catalog Release 1 10 info pi ws Page 10 G3 Resonant Frequency with Mirror Example of how a load mirror attached to the platform affects the resonant frequency calculated data See Dynamic Behavior in the PI catalog for further details H2 Operating Temperature Range J1 J2 Standard range other temperature ranges on request Closed loop systems are calibrated for optimum performance at room temperature Recalibration is recommended if operation is at a significantly higher or lower temperature Voltage Connection Typical operating voltage connectors are LEMO type connectors VL Voltage Low LEMO FFA 00 250 male Cable coaxial RG 178 Teflon coated For extension cables and adapters see Accessories in the PZT Control Electronics section of the PI catalog Sensor Connection Typical sensor connectors are LEMO type connectors L LEMO FFA 0S 304 female Cable PUR For extension cables and adapters see Accessories in the PZT Control Electronics section of the PI catalog Material Case Platform Al aluminum N S non magnetic stainless steel S ferromagnetic stainless steel invar Small amounts of other materials may occur internally for spring preload piezo coupling mounting etc Release 1 10 info pi ws Page 11 7 Dimension
9. gle at 0 to 100 V operating voltage Max operating voltage range is 20 to 120 V outside 0 100 V for short durations only For details see Lifetime of PZTs in the Tutorial section of the PI catalog or at www pi ws Products gt Tutorial A3 Closed Loop Tilt Angle Tilt provided in closed loop operation PI LVPZT amplifiers have an output voltage range of 20 to 120 V to provide enough margin for the controller to compensate for load changes etc A5 Open Loop Linear Travel 0 to 100 V Typical open loop travel at 0 to 100 V operating voltage Max operating voltage range is 20 to 120 V outside 0 100 V for short durations only For details see Lifetime of PZTs in the Tutorial section of the PI catalog A6 Closed Loop Linear Travel Travel provided in closed loop operation PI LVPZT amplifiers have an output voltage range of 20 to 120 V to provide enough margin for the controller to compensate for load changes etc B Integrated Feedback Sensor Absolute measuring SG strain gauge sensors are used to provide position information to the controller For details see the Tutorial Piezoelectrics in Positioning section of the PI catalog C1 Closed Loop Open Loop Resolution Resolution of piezo tilt platforms is basically infinitesimal because it is not limited by stiction friction Instead of resolution the noise equivalent motion is specified Values are typical results RMS 10 measured with E 503 amplifier module in
10. her warranty is expressed or implied PI specifically disclaims the implied warranties of merchantability and fitness for a particular purpose Warnings gt Shock Hazard Voltages up to 130 V can be present on PZT connectors gt PZT Damage Most piezo actuators can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately Remember that any mass mounted on the platform will reduce the resonant frequency dramatically Release 1 10 info pi ws Page 2 1 1 1 2 S 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E Introduction The S 310 to S 316 Z positioners and multi axis tip tilt platforms are fast and compact units based on the triple piezo drive supported platform design All offer piston movement up to 12 um and all but the S 310 and S 314 offer tip tilt motion up to 600 urad with sub msec response and settling Features 10 mm Clear Aperture Triple PZT Actuator Supported Platform Tilt Range up to 600 urad Piston Movement up to 12 um Open and Closed Loop Versions VV VV V WV For Optics Mirrors or Other Components Fig 1 S 314 10 Z Platform open loop Description S 310 to S 316 tilt platforms are equipped with three low voltage 0 to 100 V piezoelectric linear drives spaced at 120 intervals Control of the tip tilt versions is complicated because expa
11. nsion of an individual PZT actuator can affect both 8x and Oy rotation External coordinate transformation software or hardware is required to allow platform position commands in 8x and 8y coordinates and that hardware or software will determine how the tip tilt angles are defined See the equations and Fig 2 on page 7 for examples The triple piezo actuator design exhibits excellent angular stability over a wide temperature range Temperature changes only affect the vertical position of the platform piston motion and have no influence on the angular position The units can be mounted in any orientation In open loop operation the position of each actuator roughly corresponds to the drive voltage see the discussion on p 7 for calculating vertical position platform angle as a function of actuator extension and see the Tutorial Piezoelectrics in Positioning in the PI catalog or at www pi ws for more on the behavior of open loop PZTs The open loop models S 310 to S 315 are ideal for applications where the position is controlled by an external loop based on data provided by a sensor e g quad cell CCD chip The closed loop version S 316 10 offers absolute position control high linearity and repeatability based on the internal high resolution feedback sensor Release 1 10 info pi ws Page 3 3 1 3 2 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E Model Survey Several different versions are available S 3
12. ons refer to the respective manuals Testing Before powering up the controller check the system connections carefully gt Shock Hazard Voltages up to 130 V can be present on PZT connectors gt PZT Damage Most piezo actuators can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately Remember that any mass mounted on the platform will reduce Warnings the resonant frequency dramatically Power up the controller and perform a few test moves to make sure the system is working properly Consult the controller amplifier manual to determine the best way to do this Release 1 10 info pi ws Page 5 4 1 4 2 4 3 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E Operating Considerations Travel Range For maximum tilt range of the tip tilt versions the zero tip tilt position must that with all three piezo actuators biased at 50 V Be aware that all three PZT actuators move down to the bottom limit of the travel range when you switch the amplifier off Linear travel and tilt angle are interdependent see the discussion of tilt angles on page 7 for more information The travel range and tilt angle values quoted in the documentation see Technical Data table on page 9 refer to pure linear or pure angular motion Power Requirements In dynamic applica
13. relation Example S 315 and S 316 Tilt Platforms 13 9 mm a 10 4 mm b 12 0 mm A B C actuator range 0 to 12 um Amin Amin 2 BmaxtCmax a 12 um 10 4 mm 1 15 mrad Omax Amax BmintCmin a 12 um 10 4 mm 1 15 mrad Bmin Bmin Cmax b 12 um 12 0 mm 1 mrad Bmax Bmax Cmin b 12 um 12 0 mm 1 mrad Z 0 to 12 um Release 1 10 info pi ws Page 8 Technical Data Models S 310 10 S 314 10 S 311 10 S 315 10 S 316 10 Units Notes Active axes Z Z Z 0x By Z 0x Oy Z 0x By Open loop tilt angle 0 to 100 V 300 600 600 urad 20 A2 Closed loop tilt angle gt E 600 urad A3 Open loop linear travel 0 to 100 V 6 12 6 12 12 um 20 A5 Closed loop linear travel gt 12 um A6 Integrated feedback sensor 3 x strain B gauge Closed loop angular resolution lt 0 05 urad C1 Closed loop open loop linear resolution lt 0 1 0 2 0 1 0 2 0 2 0 4 nm C1 Stiffness Z 20 10 20 10 10 N um 20 D1 Electrical capacitance 0 7 1 4 3 x 0 23 3 x 0 45 3 x 0 45 uF 20 F1 Dynamic operating current coefficient DOCC 15 15 3x5 3x5 3x5 pA Hz x um F2 Diameter max of mounted mirrors optics 25 25 25 25 25 mm Unloaded resonant frequency fo 9 5 5 5 9 5 5 5 5 5 kHz 20 G2 Resonant frequency w 15 x 4 mm glass mirror 6 5 4 4 5 5 4 1 4 1 kHz 20 G3 Resonant frequency
14. s Dimensions in mm decimal places separated by commas in drawings L mm 310 10 19 5 311 10 19 5 PZT 3 CH3 314 10 28 5 315 10 28 5 S 316 10 28 5 N A Si Sens 3 Gee PZT 2 CH2 S 316 10 only wo at PZT center at 13 9 supply voltage Fig 4 S 311 10 and S 315 10 Tip tilt Z Platform open loop cables labeled with PZT channel numbers Release 1 10 info pi ws Fig 5 S 316 10 Tip tilt Z Platform closed loop cables labeled with PZT channel numbers and sensor channel numbers Release 1 10 info pi ws Page 13
15. tangular mirror 2 2 2 I m a Ale 12 2 where m Payload Mass g Iu Moment of inertia of the payload g mm L Payload length perpendicular to the tilt axis mm Release 1 10 info pi ws Page 6 310 S 316 Tip Tilt Platforms Operating Manual PZ 96E H Payload thickness mm T Distance pivot point to platform surface see technical data table on p 9 for individual model mm R Payload radius mm Using the resonant frequency of the unloaded platform see Technical Data table p 9 and the moment of inertia of the payload the system resonant frequency is calculated according to the following equation Resonant frequency of a tip tilt platform system including payload t o yl ly Lo where f Resonant frequency of platform with payload Hz fo Resonant frequency of unloaded platform Hz I Moment of inertia of the unloaded platform see technical data table g mm I Moment of inertia of the payload g mm For more information on static and dynamic behavior of piezo actuators see the Tutorial section of the PI Catalog in particular pages 4 27 ff or consult the same material at www pi ws Products Tutorial http www physikinstrumente de products section4 content php Working Principle The three PZT actuators which support the platform are arranged symmetrically around the centerpoint see Fig 2 at right As you can see in Fig 3 on p 12 they come labeled
16. tions it is important to avoid exceeding the power output capability of the amplifier You can check this using the dynamic operating current coefficient of the PZTs DOCC which is given in pA per Hz and um in the Technical Data table on p 9 Multiply the PZT s DOCC by the desired frequency and displacement For calculations involving tilt motion first calculate the corresponding motion of each actuator using the equations that describe your geometry then use the DOCC to get the power requirements Example S 314 10 Sinusoidal scan of 10 um at 10 Hz requires approximately 1 5 mA drive current DOCC 15 YA per Hz and um The result has to be less than or equal to the average output current of the selected amplifier For further information please refer to the Tutorial section of the PI Catalog in particular page 4 32 or consult the same material at www pi ws Products Tutorial http www physikinstrumente de products prdetail php secid 4 32 Dynamic Behavior In addition to the amplifier controller and sensor bandwidths the maximum operating frequency of a tilt platform depends on its mechanical resonant frequency To estimate the effective resonant frequency of a tip tilt system platform payload the moment of inertia of the payload must also be considered Moment of inertia of a rotationally symmetric payload e g round mirror 2 2 2 I m 3R H A r 12 2 Moment of inertia of a rectangular payload e g rec
17. w 20 x 4 mm glass mirror 6 1 4 2 4 4 3 4 3 4 kHz 20 G3 Distance pivot point to platform surface T 5 5 5 mm Platform moment of inertia 150 150 150 gmm Operating temperature range 20 to 80 20 to 80 20 to 80 20 to 80 20 to 80 C H2 Voltage connection 1xVL 2m 1xVL 2m 3xVL 2m 3xVL 2m 3xVL 2m J1 cable cable cable cable cable Sensor connection 3xL 2m J2 cable Weight w o cables 45 55 45 55 55 g 5 Material case platform N S N S N S N S N S N S N S N S N S N S L Length L 19 5 28 5 19 5 28 5 28 5 mm Recommended amplifier controller Low and Medium Power Applications E 500 E 501 chassis E 503 three channel amp optional E 515 E 516 display interface Alternatively E 663 3 channel amplifier or E 610 00 OEM amplifier module Notes For maximum tilt range all three piezo actuators must be biased at 50 V Linear travel and tilt angle are interdependent The values quoted here refer to pure linear pure angular motion about fixed axes actuators starting from the center positions See discussion on page 8 for more information Dynamic Operating Current Coefficient in yA per Hertz and mm per actuator Example S 314 10 Sinusoidal scan of 10 mm at 10 Hz requires approximately 1 5 mA drive current For tilt calculation see the Power Requirements section p 6 Noise equivalent motion with E 503 amplifier A2 Open Loop Tilt Angle 0 to 100 V Typical open loop tilt an
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