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EXT75-255DX turbo pumps user manual

Contents

1. 28 Connect the purge 27 Connect the serial interface to your control equipment 31 Connection to the vacuum system 23 Controlled venting 39 Controlled venting options 44 Cooling water 17 D Decelerating and venting 54 Decoding system status words 63 Delayed start 52 Disposal oer 67 Drive electronics 3 E Earth ground connections 28 Electrical data 17 Electrical installation 28 Electrical supply failure 55 Electronic braking 5 Electronic braking options 48 F Factory settings 48 Fault finding WA a e a a a 60 FL20K foreline trap 72 Issue D 75 Flashing error codes 62 Forced air cooling 40 Full serial control 6 G General description 2 Indicator LEDs 21 Inlet connection and orientation 26 Inlet flange seals 70 Inlet screen supplied fitted 25 Inlet strainer lees 70 Installation 2 ee e
2. The Standby Speed is now stored in memory within the DX pump To check what Standby Speed is set you can send a query as follows Command 2 8 5 7 The reply you receive will be as follows Reply 5 5 8 57 d dj dij cr Normal speed setting The Normal Speed is a user configurable setting and can be set to any value between 5076 and 10076 full rotational speed When you receive the pump it will be configured with a Normal speed of 8076 full rotational speed To change the Normal Speed setting send the following command where the characters d represent the value as a percentage of full rotational speed Command cr o 5 a a a The reply you receive will be as follows Reply 8 5 6 sp r cr The Normal Speed is now stored in memory within the DX pump 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps To check what Normal Speed is set you can send a query as follows Command 8 5 6 cr The reply you receive will be as follows Reply S 8 5 6 sp did cr Timer setting and options Refer to Section 1 4 3 for a full description of Timer functionality NOI LVtl3dO The timeout period is a user configurable option and can be set to
3. 40 inlet flange EXT75DX only 2 r r gt zi 2 To remove the inlet screen from a pump with an ISO or inlet flange use a bent wire hook or small screwdriver to carefully lever the inlet screen out from the inlet flange To replace an inlet screen locate it as centrally as possible over the ISO or CF inlet flange and then with your fingers spread evenly around the edge of the screen push it firmly downwards If they are not already in place the tangs must be snapped into the locating groove in the inlet flange using a suitable tool to press them into position S AS 0258 A 1 EXT inlet flange 2 Inlet screen Figure 6 Correct installation of the inlet screen EXT75DX AG 0059 A 1 EXT inlet flange 2 Inlet screen Figure 7 Correct installation of the inlet screen EXT255DX Issue D 25 SS 20 06 06 M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 3 3 2 Mechanical fixing WARNING Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor can cause rapid movement of the pump which may cause further damage and injury to people There are two ways in which the DX pumps can be securely fixed The ideal fixing for a DX pump is via its inlet flange to a rigid firmly fixed vacuum system refer to Section 3 3 3 If this is not possible because of the nature of the vacuum sy
4. 142 58 20 06 06 5 1 5 2 5 3 5 4 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps MAINTENANCE WARNING The DX pump is not to be serviced by the customer Pumps requiring servicing should be returned to BOC Edwards or serviced by a qualified BOC Edwards engineer WARNING Allow the pump rotor to stop then disconnect the logic interface cable from the power supply before you remove the pump from your vacuum system for maintenance or fault finding procedures Introduction Instructions for bearing maintenance and surface cleaning for the DX turbomolecular vacuum pump are described in the following sections The inlet screens inlet strainer and inlet flange seals are available as spares refer to Section 7 3 Fit the inlet screen as described in Section 3 3 2 Bearing maintenance When supplied the pump contains sufficient lubricant to supply the bearings for life No routine maintenance is therefore required between bearing replacements The bearings are not user serviceable The bearings will need to be replaced when they reach the end of their service life This is typically more than 20 000 hours but may be less this depends on the type of pumping duty for which the pump is to be used When the bearings need replacement we recommend that you exchange your pump for a factory reconditioned replacement Alternatively you can send your pump to a BOC Edwards Service Centre to have the bea
5. 16 20 24 25 25 30 32 33 37 74 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps TABLES Table Page 1 Power limits 3 2 General data 9 3 DX pumps technical data 11 4 Vent gas specification and vent control 16 5 Purge gas specification 17 6 Cooling water specification 17 7 Logic interface technical data 19 8 Logic interface connector pins 20 9 Podule technical data 21 10 Indicator LEDs 21 11 Operating and storage environment 21 12 Checklist of components 23 13 Summary of commands that can be sent to the DX pump 35 14 Command abbreviations 36 15 Error codes 36 16 Vent options 39 17 Vent restrictor orifice diameter with atmospheric pressure at the inlet of the vent valve 40 18 Power limit setting 43 19 Analogue signal options 47 20 Behaviour of a pump when the power is re instated after an electrical supply failure 57 21 Fault finding 60 22 Flashing error codes 62 23 Hexadecimal conversion table 63 24 Status flags 64 25 Example decoding of system status words 65 26 Inlet flange seals 70 27 Vent restrictors 71 Issue D TT 20 06 06 M47 BOC EDWARDS EXT Compound Turbomolecular Pumps This page intentionally blank Issue D C O _ L 21 vi 20 06 06 1 1 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps INTRODUCTION Scope and definitions This manual provides installation operation maintenance and storage instructions for the BOC E
6. Improper use of the equipment could cause damage to it or injury to people The user is responsible for the safe operation installation and monitoring of the system WARNING The Podule contains electrolytic capacitors and under certain fault conditions may emit dangerous fumes Ensure that the Podule is operated in a well ventilated area CAUTION 2 2 c o zi 2 Do not attempt to separate the Podule from the pump since this will cause damage to the electrical connections The DX pumps consist of the compound turbomolecular pump with a permanently attached Podule containing drive electronics The Podule controls the electrical supply to the pump It has no manual controls and can only be operated through the logic interface To operate the DX pump you must connect it to your own control equipment and power supply or alternatively use the BOC Edwards TIC Turbo Instrument Controller or TIC Turbo Controller The Podule drives the brush less d c motor in the pump The pump has three Hall effect devices that operate as rotor position sensors and ensure that the drive current is correctly commutated around the motor phase windings The vacuum pump contains turbomolecular blades and a Holweck drag mechanism on a single shaft the Holweck mechanism allows operation at higher backing pressures than pure turbomolecular pumps DX pumps are supplied with an inlet screen fitted into the bore of the inlet flange
7. Control and Laboratory Use EN61326 1997 Electrical equipment for measurement control and laboratory use Industrial location EMC requirements Class B emissions The pumps comply with EN61010 1 2001 when installed in accordance with the instruction manual supplied following the provisions of 73 023 EEC Low Voltage Directive 89 336 EEC Electromagnetic Compatibility Directive 98 37 EC Machinery Safety Directive Ee uo 6 05 2ooG Burgess Hil B D Brewster Technical Manager Date and Place Burgess Hill Products This product has been manufactured under a quality system registered to 1509001 207 BOC EDWARDS P200 01 020 Issue B Declaration of Conformity BOC Edwards Manor Royal Crawley West Sussex RH10 2LW UK declare under our sole responsibility that the machine s EXT255DX 150100 B753 11 000 EXT255DX CF100 B753 12 000 EXT255iDX ISO100 Interstage B753 13 000 to which this declaration relates is in conformity with the following standard s or other normative document s EN ISO 12100 2 2003 Safety of Machinery Basic Concepts General Principles for Design Technical Principles EN 1012 2 1997 Safety Requirements Vacuum Pumps EN61010 1 2001 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use EN61326 1997 Electrical equipment for measurement control and laboratory use Industrial location EMC requirements Class B emissions The p
8. To clear the error send a Stop command either parallel or serial depending on the control mode Then send a Start command to ramp the pump up to designated speed Regenerative power maintains all output signals during the power failure If power is reinstated before the Timer period expires the pump will ramp up to its designated speed as quickly as possible If the Timer period expires the Podule will go into Fail condition and will display flashing error code 3 As above when the power is reinstated the pump will not ramp up until the error is cleared To clear the error send a Stop command either parallel or serial depending on the control mode Then send a Start command to ramp the pump up to designated speed Regenerative power ceases and fails to maintain output signals When power is reinstated the pump with parallel control will automatically restart if the Start control on the logic interface is set to Start The pump with serial control will require a Start command to ramp the pump up to the designated speed Any Fail signals that were triggered during the regenerative power period are lost when the power is reinstated Table 20 Behaviour of a pump when the power is re instated after an electrical supply failure Issue D 57 20 06 06 NOILVtl3dO 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps m gt 2 This page intentionally blank Issue D C O _ L
9. node to find out the multi drop address of the DX pump Command 4 9 9 9 9 S 8 5 0 cr The reply you receive will be as follows where dd denotes the multi drop address of the pump Repy 9 9 9 9 S 8 5 0 5 You can disable multi drop mode by assigning the pump an address 0 To do this send the following command where dd denotes the multi drop address of the pump and XX denotes the address of the node that is sending the command Command d d KIKI S 8 5 0 spp 0 cr The reply you receive will be as follows Reply X X d d S 8 5 o0 sp O0 cr Once multi drop mode is disabled the pump will no longer respond to multi drop commands Issue D cc LL SS 49 20 06 06 PAGE 49 NOILVtl3dO 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 2 Configuring the DX Pump using a TIC The DX pump can be configured using the BOC Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller It is possible to set the following parameters of the DX pump using the TIC Power limit setting Controlled venting options including running a fan from the Podule Standby speed setting Normal speed setting NOI LVtl3dO Timer settings both enabling disabling the timer AND setting the timeout pe
10. 100 litres or larger it will be more efficient to allow the backing pump to reduce system pressure to 10mbar before starting the DX pump In this case it will be necessary to close the vent valve in advance of starting the backing pump If you are using the Podule to control a TAV solenoid valve but you are operating in pure Parallel Interface Mode you will NOT be able to shut the valve in advance of starting the DX pump because you do not have the facility to send the appropriate serial command If you have the facility to send serial commands you can perform a delayed start refer to Section 4 5 1 Note If you are using a diaphragm pump for backing the DX pump allow a delay of 2 minutes before starting the DX pump Issue D O m 50 Ee 20 06 06 M7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 3 2 Pre start checks 1 Turn on the appropriate cooling device fan or cooling water supply Note If you have configured the Podule to drive a fan the fan will automatically start when power is supplied to the DX pump 2 Start the backing pump 3 Switch on the power supply to the pump Check that the two LEDs on the Podule light up for approximately 0 5 seconds and then extinguish If the LEDs do not light up as expected or if the yellow LED begins to flash refer to Section 5 5 NOILVYJdO 4 4 Operation with Parallel Control and Monitoring 4 4 4 Start the pump Start the DX pump by linking the Start Stop control
11. ADIAYAS Two solenoid operated vent valves are available for system venting The valves are 24 V d c normally open and can be driven by the Podule The solenoid valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and can be used with any suitable NW 10 flanged port on your vacuum system TAV5 is suitable for smaller vacuum systems TAV6 has a higher conductance and is suitable for larger vacuum systems typically with volume greater than 10 litres Product Orifice Diameter Item Number TAVS vent valve 0 5mm B580 66 010 TAV6 vent valve 1 0mm B580 66 020 7 4 6 WRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict flow of vent gas into the pump You can fit a VRX vent restrictor to the inlet of a TAV5 or TAV6 vent valve or to a PRX10 purge restrictor Refer to Table 17 for information on the selection of the correct VRX vent restrictor and to Table 27 for the item numbers of the vent restrictors available Vent restrictor Orifice diameter mm Item number VRX10 0 1 B580 66 021 VRX20 0 2 B580 66 022 VRX30 0 3 B580 66 023 Table 27 Vent restrictors Issue D TT m 71 EEE 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Vent restrictor Orifice diameter mm Item number VRX50 0 5 B580 66 024 VRX70 0 7 B580 66 025 Table 27 Vent restrictors 7 4 7 WVent port adaptor The vent port adaptor has a 1 8 inc
12. Section 2 1 3 3 6 Interstage connection iDX variants only Use suitable vacuum tube and connectors to connect the interstage port to your vacuum system or to the outlet flange of another turbo or compound turbomolecular pump if using an iDX pump to back another pump Leave the inlet strainer in the interstage port unless you are sure that debris cannot be drawn into the interstage port Note The EXT75iDX with NW16 interstage port is not supplied with an inlet strainer fitted Issue D pr SS 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 3 4 Purge gas connection 3 4 Connect the purge gas To supply a purge gas to the pump remove the plug fitted in the purge port fit a vent port adaptor refer to Section 7 4 and connect the purge gas supply to the vent port adaptor The purge gas must comply with the specification given in Section 2 4 3 4 0 Recommended purge gas flow The recommended purge gas flow for typical applications is 25 sccm 0 42 mbar s1 42 Pal gy This flow will protect the pump when pumping oxygen in concentrations above 2076 by volume The flow rate of the purge gas must be limited to the allowed range specified in Section 2 4 To limit the flow rate use a flow controller or a pressure regulator and calibrated flow restrictor The PRX10 purge restrictor accessory refer to Section 7 4 is suitable for this purpose Adjust the PRX10 as described in the instruction manual supplied wi
13. where the first number refers to voltage measured in 0 1 Volts i e divide the number by 10 to get an answer in Volts the second number refers to current measured in 0 1Amps and the third number refers to motor power measured in 0 1 Watts lt a Reply sp d d d d d d d 4 5 7 Measured motor speed You can monitor the measured rotational speed of the motor inside the DX pump by sending the following query Command 8 5 2 You will receive the following reply where the first returned number refers to motor rotational speed in revolutions per second Hz Reply v 8 5 2 ld d d d h h h h lh Ih h h cr Note The second return number is a 32 bit System Status Word set of 8 hexadecimal characters which is useful for fault finding Refer to Section 5 4 2 for advice on decoding the System Status Word Issue D 53 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 6 Simultaneous Parallel and Serial Operation Note It is not possible to use serial interface monitoring at the same time as running the pump at Standby Speed in Parallel Interface Mode because the two functions share the same logic interface pins The Analogue Output signals are always available irrespective of whether you send commands in parallel or serial con
14. 1 0 1 0 0 0 0 01 100 0 000000 01 0 0 0 1 0 Bit numbers Bit number Status flag Active flags means 0 Fail Fail status condition active 1 Stopped speed Below stopped speed 2 Normal speed Above normal speed 3 Vent valve closed Vent valve energised 4 Start Start command active 5 Serial enable Serial enable active 6 Standby Standby active 7 Half full speed Above 50 full rotational speed 8 Parallel control mode Exclusive control mode selection 9 Serial control mode Exclusive control mode selection 10 Invalid Podule software Podule internal software mismatch 11 Podule upload incomplete Podule failed internal configuration and calibration operation 12 Timer expired Failure to reach or maintain half full speed within the timer setting value 13 Hardware trip Overspeed or Overcurrent trip activated 14 Thermistor error Pump internal temperature measurement system disconnected or damaged 15 Serial control mode interlock Serial enable has become inactive following a serial Start command Table 24 Status flags Issue D cc LL SS 65 20 06 06
15. 52 Start acr teet REC dads 43 50 Stop the 51 53 Storage c er bass RR Re ey WA 67 STORAGE AND DISPOSAL 67 T vent valve and vent port adaptor 71 TAV5 or TAV6 solenoid vent valve 38 Technical data 9 Temperature readings 53 TIC DX PC Monit r 73 Mul 4 Timer setting and options 46 Typical installation 23 Issue D 76 U Unpack and inspect 23 Useful service information 65 Vent gas specification and vent control data 16 Vent options vent valve connection and control 38 Vent port adaptor 72 Vibration isolators 72 VRX vent restrictor 71 W Water cooling 41 WCX water cooler 71 SSS st 20 06 06
16. 6mm minimum Fastening torque 6Nm 0 61 kgf m EXT75DX 12Nm 1 22 kgf m EXT255DX This method of fixing must be used if your pump supports the weight of the vacuum system The weight of the vacuum system must be no more than 10kg for EXT75DX and 20kg for EXT255DX NOILVTIVLSNI 3 3 5 Backing connection WARNING Ensure safe ducting of the backing line if oil mist or hazardous substances are present WARNING To avoid over pressurising the pump the exhaust line should be restricted when venting from a positive pressure gas supply CAUTION Do not use the DX pumps with a backing pressure below 5 x 1077 mbar 5 x 10 Pa Lower backing pressures will increase the evaporation rate of the lubricating oil and so may reduce the life of the bearings Use suitable vacuum tubing and connectors to connect the NW flange of the backing port to your backing pump If necessary use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the DX pump We recommend that you use a BOC Edwards EM RV or XDS Scroll backing pump The recommended size of backing pump required is indicated in Table 3 A larger or smaller backing pump may also be suitable depending upon the application is intended for The DX pumps are suitable for use with diaphragm backing pumps although the effect of higher backing pressure on the pump s performance and cooling requirements should be noted Refer to Table 3 and
17. ADNVNALNIVW 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps The System Status word used in the example above was obtained with the pump at rest By decoding the word we can learn more about the state of the pump Refer to Table 25 Bit number We can deduce z 0 0 The pump has not failed gt 1 1 The pump is at rest 2 2 0 Speed is below normal speed 3 0 The vent valve is open gt 4 0 There is no active Start command s 5 1 Serial enable is active m 6 0 Standby is not active 7 0 Speed is below 5076 of full rotational speed 8 0 The pump is not in parallel control mode 9 0 The pump is not serial control mode 10 0 There is no Podule internal software mismatch 11 0 Podule passed internal configuration and calibration operation 12 0 The timer has not timed out 13 0 Overspeed and Overcurrent trip not activated 14 0 Pump internal temperature measurement system is fine 15 0 Seniai net KIA inactive during serial control Table 25 Example decoding of system status words 5 5 3 Useful service information If you are using the serial communications link you can access information about your pump such as pump type and internal Podule software versions This information is particularly useful for service personnel to determine what model of pump you have Send the following query to find out pump type Command 8 5 1 cr The reply you will receive is as follows where String1 is the pump type String2
18. BOC EDWARDS EXT Compound Turbomolecular Pumps 1 2 3 4 5 6 7 8 9 0920 1 RS232 interface on control equipments 3 Fuse 2 24V dc electrical supply 4 DX pump logic interface Figure 9 Logic interface connections serial mode Serial enable To send a Serial message you must first activate Serial Enable This is achieved by linking the Serial Enable input signal pin 5 to pin 2 of your logic interface mating half We recommend that you incorporate this link into your Serial communications cable so that the Serial Enable is only activated when the serial cable is connected When you subsequently remove the cable Serial Enable will become inactive Serial Enable acts as an interlock for commands sent over the Serial Interface If the pump is running having been sent a Serial Start command and the Serial Enable subsequently becomes inactive the pump will trigger a fail condition and will decelerate to rest To clear this fail condition you must re activate the Serial Enable and send a Serial Stop command Serial protocol The Serial Interface link is set to 9600 Baud 8 bits 1 stop no parity with no handshaking The commands are made up from printing ASCII characters The maximum message size you can send is 80 characters including start and end characters Note All alphabetical characters must be sent in upper case format Every complete command message you send will receive a r
19. D ii Ee 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps CONTENTS CONTINUED 4 OPERATION 43 4 1 Configuring the DX pump using Serial Commands 43 4 1 1 Power limit setting 43 4 1 2 Powering a fan from the Podule 44 4 1 3 Controlled venting options 44 4 1 4 Standby speed setting 45 4 1 5 Normal speed setting 45 4 1 6 Timer setting and options 46 4 1 7 Analogue signal options 47 4 1 8 Electronic braking options 48 4 1 9 Factory settings 48 4 1 10 Assigning a multi drop address 49 4 2 Configuring the DX Pump using a TIC 50 43 Start up 50 4 3 1 Close the vent valve 50 4 3 2 Pre start checks 51 44 Operation with Parallel Control and Monitoring 51 4 4 1 Start the pump 51 4 4 2 Running at standby speed 51 4 4 3 Stop the pump 51 4 4 4 Parallel monitoring 51 4 5 Operation with Serial Control and Monitoring 52 4 5 1 Delayed start 52 4 5 2 Start the pump 52 4 5 3 Standby Speed 52 4 5 4 Stop the pump 53 4 5 5 Temperature readings 53 4 5 6 Link parameter readings 53 4 5 7 Measured motor speed 53 4 6 Simultaneous Parallel and Serial Operation 54 4 7 Operation with a TIC 54 4 8 Decelerating and venting 54 4 9 Operation at extreme conditions 54 4 9 1 Operation with high inlet pressure 54 4 9 2 Operation at high temperatures 55 4 9 3 Operation at over speed 55 4 9 4 Electrical supply failure 55 4 10 Bakeout 56 5 MAINTENANCE 59 5 1 Introduction 59 5 2 Bearing maintenance 59 5 3 Rotor life 59 5 4 Clean the external surfaces
20. RV12 backing pump Refer to Section 3 9 for cooling conditions t Cooling water temperature at 15 Cooling water flow rate at 30 het suitable diaphram pump with ultimate lt 5 mbar may also be used Power limit setting 80 W EXT75DX 160 VW EXT255DX Issue D WARNING 13 Oo 8 8 3 Do not exceed the maximum continuous operating pressure Doing so can result in dangerous rotor temperatures and will shorten the life of the pump 20 06 06 V LVG TIWOINHOAL 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 15063 CF63 NW40 150100 m gt I i 2 gt r gt NW40 150100 gt 91299 954 935 22822 62 95 69 67 pa M 175 9 169 2 Mii 1 AS 1208 A 1 Podule 6 Purge port blanked off 2 Podule connector socket for fan TAV valve 7 Earth connection 3 Interstage port EXT75iDX only 8 Cooling block mounting face 4 Manual vent valve in vent port 9 Podule indicator LEDs 5 Logic interface connector 10 Backing port Figure 1 EXT75DX dimensions mm Issue D 14 ss 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps 150100 CF100 16 x 8 4 150100 130 2PCD TIVOINHOAL 150100 CF100 190 4 AS 1207 A 1 Podule 6 Purge por
21. be able to maintain full rotational speed if it is too hot If the pump speed falls to below 50 of full rotational speed the Timer will start if it is enabled If the speed does not recover to above 50 speed before the timeout period expires the pump will shut down and display a Fail signal If the Timer is disabled the pump will immediately shutdown and display a Fail signal if the speed drops below 50 of full rotational speed Refer to Section 2 11 for pump operating ranges and Section 3 9 for advice on pump cooling Operation at over speed Control software within the Podule regulates the pump rotational speed and prevents the pump operating above its normal full rotational speed In the unlikely event of a failure of this control software the Podule has a built in safety circuit that checks whether the pump is running at over speed If an over speed condition is detected the Podule automatically shuts down power to the pump motor and slows it down to rest The Podule will signal a Fail condition if over speed has been detected If you suspect that your pump may be running at over speed you should switch it off and consult BOC Edwards or your supplier Electrical supply failure WARNING If the power supply fails when the pump is running the impeller could continue to spin for approximately 10 minutes The control circuit may not give any indication that the impeller is still running WARNING If the parallel start control signa
22. be connected to earth through the PC If this is the case ensure that the 0 V rail of the 24 V supply is not also connected to earth at some other point such as at the power supply If you do not wish to have the 0 V rail of the 24 V supply connected to earth at the PC an opto isolated interface to the PC should be used The DX pump can connect directly to the RS232 serial input on a PC as shown in Figure 9 In this configuration the PC is the serial link master and the DX pump is the slave The distance over which the serial link will work is dependent on any difference in voltage between the OV at the sending and receiving end If the OV reference at the receiving end is within 0 3V of the OV Control Reference pin on the DX pump control connector then the serial link should be capable of operating at distances up to 6m An interface circuit external to the DX pump may be required for longer distances The software in the DX pump is capable of operating with several pumps connected to a single serial link master This is referred to as multi drop mode However the serial interface driver in the DX pump is based on the RS232 standard which is only intended for point to point serial links Some additional hardware will be required to link several DX pump units to a single serial link master A concept drawing of one possible arrangement is shown in Figure 10 NOILVTIVLSNI 2 gt r gt zi 2 3 7 3 Issue D M47
23. close it before starting the DX pump This will allow the backing pump to reduce the pressure in your vacuum system To close the vent valve send the following command Command 8 7 5 1 The reply you receive will be the following format m gt 2 Reply 8 7 5 sp r cr Note This command overrides the current vent option and closes the vent valve There is no open vent valve command but when you send a stop command to the pump the override is cleared 4 5 2 Start the pump To start the pump send the following command over the serial communications link em ng The reply you receive will be in the following format Reply iu c 8 5 2 sp r cr The pump will then accelerate to full operating speed The green indicator LED will illuminate when the pump reaches Normal speed This is 80 of full rotational speed by default but you may have selected a different value to suit your application 4 5 3 Standby Speed To run the DX pump at Standby Speed send the following command over the serial communications link Command l 8 6 9 1 The reply you receive will be as follows Reply c 8 6 9 sp r cr If the pump is currently below Standby Speed then it will accelerate until it reaches Standby Speed If it is running faster than Standby Speed
24. is the DSP software version number and String3 is the designated full speed of the pump in revolutions per second Reply S 8 5 1 sp String String2 String3 cr Send the following query to find out the PIC software version Command 8 6 8 The reply you will receive is as follows where String1 is the PIC software version number Reply S 8 8 sp string cr Issue D 66 Ee 20 06 06 6 1 6 2 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps STORAGE AND DISPOSAL Storage Use the following procedure to store the pump 1 Place protective covers over the inlet outlet interstage for the iDX only purge and vent ports 2 Place the pump in its packing materials For fastest pump down when the pump is put back into service seal the pump inside a plastic bag together with a suitable desiccant 3 Store the pump in cool dry conditions until required for use Refer to Table 11 for recommended storage environment When required prepare and install the pump as described in Section 3 4 Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir 5 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months Disposal WARNING In the unlikely event of a failure o
25. of the pump 59 5 5 Fault finding 60 5 5 1 Flashing error codes 62 5 5 2 Decoding system status words 63 5 5 3 Useful service information 65 6 STORAGE AND DISPOSAL 67 6 1 Storage 67 6 2 Disposal 67 Issue D iii EES 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps CONTENTS CONTINUED 7 4 10 7 4 11 7 4 12 SERVICE SPARES AND ACCESSORIES Introduction Service Returning a pump for service Spares ISX inlet screen Inlet strainer Inlet flange seals Accessories Installation ACX air cooler WCX water cooler BX bakeout band TAV vent valve and vent port adaptor VRX vent restrictor Vent port adaptor PRX purge restrictor Vibration isolators FL20K foreline trap Podule connector plug TIC PC Program ILLUSTRATIONS Figure Issue D EXT75DX dimensions mm EXT255DX dimensions mm Maximum allowed rate of pressure rise during venting pressure against time with pump initially at full rotational speed Podule connector plug Typical pumping system with a DX pump Correct installation of the inlet screen EXT75DX Correct installation of the inlet screen EXT255DX Logic interface connections parallel mode Logic interface connections serial mode Conceptual diagram for multi drop connection Schematic diagram of the logic interface connections Installation of optional accessories and spares 69 69 69 69 70 70 70 70 70 70 70 71 71 71 71 72 72 72 72 73 73 Page 14 15
26. rise remains within the limits shown in Figure 3 Note Ifyou use a vent restrictor you may find that the time required to vent your vacuum system is unacceptably long You may be able to reduce the vent time if you use a vent valve without a vent restrictor and wait until the pump speed has fallen to 50 of full rotational speed before you open the vent valve Controlled venting The TAV5 or TAV6 solenoid valve can be controlled by the Podule electronics To use this function fit the electrical connector supplied with the pump to the lead of the TAV5 or TAV6 solenoid valve To ensure cable cores and screen are wired correctly follow the electrical connection instructions given in the Accessories Manual supplied with the TAV valve and refer to Figure 4 and Section 2 9 Plug the connector into the socket at the top of the Podule refer to Figures 1 and 2 items 1 and 7 respectively The Podule is capable of controlling a number of different venting options these are defined in Table 16 Option number Description of vent function 0 Vent valve opens fully below 50 full rotational speed for either Stop command or Fail Note this is the factory default setting 1 Controlled venting from 100 to 50 full rotational speed vent valve opens fully below 50 for either Stop command or Fail 2 Vent valve fully opens immediately Stop command is received vent valve opens fully below 50 full rotational speed if Fail 3 Vent valve fully o
27. so change the natural frequency of your system or isolate the pump using flexible bellows If so fit flexible bellows or a vibration isolator in the backing line If so a bearing is defective Contact your supplier or BOC Edwards If so the rotor is out of balance Contact your supplier or BOC Edwards Contact your supplier or BOC Edwards Issue D Table 21 Fault finding Continued 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps 5 5 1 Flashing error codes Whenever a Fail condition becomes active the standard once per revolution flash on the Status LED is replaced with the Error Flash Codes that reflect all active error conditions The Fail status flash code positions within the Status LED error flash sequence are specified in Table 22 There is a sufficient off period between each subsequent cycle repetition to clearly mark the start of a new flash sequence The duration of a long flash L is equal to 3 times the duration of a short flash s pisi eid Error flash code Comments Action position 0 SSSSSS The speed fell below 5076 of full Check whether the pump is too rotational speed with the Timer hot or whether the inlet pressure disabled is too high 1 Lsssss Podule internal software mismatch Cycle the power to the pump and see whether the error code appears again If it does contact your supplier or BOC Edwards 2 sLssss Podule failed internal configuration Cycle the power to
28. use a smaller power supply For more information refer to Section 2 7 NOILINGOULNI 45 BOC EDWARDS EXT Compound Turbomolecular Pumps 1 4 2 Standby speed In Standby mode the pump rotational speed is lower than the full rotational speed If your application does not require the pump to be running at maximum speed at all times you can use the Standby speed feature rather than switching the pump off This can save you time since you do not have to stop or vent the pump and you do not have to wait as long for the pump to accelerate back to full speed The Standby speed is a user selectable value refer to Section 4 1 4 1 4 3 Timer When the pump is started an internal timer is automatically started within the drive electronics If the pump fails to reach 50 of full rotational speed within the timeout period the Podule will signal a Fail and will decelerate the pump to rest This is a safety feature and prevents the Podule driving the pump at maximum power for a long time which could cause damage The pump may fail to reach 50 speed if the gas load is too high for example if there is a leak in the system if the backing pump fails or if the pump is too hot 2 J c o zi 2 The timeout period is a user selectable feature refer to Section 4 1 6 so if your application requires the pump to ramp up slowly you can extend the timeout period The Timer is permanently enabled for ramp up The Timer h
29. 0 mbar DN100ISO K inlet flange 5 x 10 mbar DN100ISO K inlet flange 5 x 10 mbar DN100ISO K inlet flange Parameter EXT255DX EXT255iDX EXT255DX ISO100 ISO100 100CF Mass 6 25 kg 6 5 kg 8 5 kg Inlet flange DN100ISO K DN100ISO K DN100CF Outlet flange DN25NW DN25NW DN25NW Vent port 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP Purge port 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP Interstage port optional DN25NW Inlet pumping speed N gt 220151 220151 220151 He 230151 t 2301s 230151 t H gt 180151 180151 180151 Inlet compression ratio gt 1 108 gt 1 108 gt 1 108 4x 10 3 x 10 4 10 H gt 1 x 10 1 10 1 x 10 Interstage pumping speed for interstage DX pumps with N 70 sccm flow through interstage port E 2 5 sccm flow through interstage port E Interstage pumping speed for 10151 8151 5 x 10719 mbar DN100CF inlet flange lt 5 x 10 mbar DN100CF inlet flange Table 3 DX pumps technical data continued Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump Ultimate pressure 48 hours after bakeout with P lt 5 mbar 500 Pa i Pumping speeds are without inlet screen or inlet strainer Inlet screens and inlet strainers reduce speed by approximately 1076 Issue D 1 2 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps Parameter EXT75DX E
30. 3CF 63CF copper compression gasket pack of 5 C081 00 003 DN100CF 100CF copper compression gasket pack of 5 C082 00 003 Table 26 Inlet flange seals Accessories Installation The accessories available for use with the DX pumps are described in the following section Figure 12 shows how the accessories are fitted to the pump ACX air cooler An ACX air cooler can be fitted to the DX pump refer to Section 3 9 to check the suitability of air cooling in a particular application Air Cooler Item Number For use with ACX75 B580 53 075 EXT75DX ACX250H B580 53 160 EXT255DX 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 7 4 5 WCX water cooler A water cooler can be fitted to the DX pump refer to Section 2 5 to check the suitability of the cooling water supply Water Cooler Item Number WCX500 water cooling ki 736 00 121 7 4 4 BX bakeout band A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures It may also be used to protect the pump from condensation of contaminants The bakeout bands are available in 110 120 V or 220 240 V versions Note The bakeout band is only for use with CF variants Bakeout Band Item Number For use with BX70 110V 30W B580 52 040 EXT75DX BX70 240V 30W B580 52 060 EXT75DX BX250 110V 30W B580 52 041 EXT255DX BX250 240V 30W B580 52 061 EXT255DX 7 4 5 vent valve and vent port adaptor S3lHOSS322V SJYVdS
31. 75DX EXT75DX ISO63 63CF 40 150100 3 0 kg 4 9 kg 2 9 kg 3 2 kg Inlet flange DN63ISO K DN63CF DN40NW DN100ISO K Outlet flange DN16NW DN16NW DN16NW DN16NW Vent port 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP Purge port 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP 1 8 inch BSP Interstage port optional DN25NW 7 amp DN16NW Inlet pumping speed 61151 61157 42151 66151 5715 57 151 49157 59 s H 53 151 53151 48157 54 s Inlet compression ratio gt 1 1011 1 x 1011 gt 1 x 1011 1 x 101 He 1 x 106 1x 106 1 x 106 1 x 106 H 5 x 10 5 x 10 5 x 10 5 x 10 Interstage pumping speed for interstage DX pumps with N3 DN16NW port 70 sccm flow through interstage 10157 B z port 5 sccm flow through interstage 3157 port Interstage pumping speed for N2 Ultimate pressure with rotary vane backing pump lt 5 10 mbar lt 5 1010 mbar 5x 10 mbar lt 5 x 10 mbar with diaphragm backing pump lt 5 10 mbar lt 5 x 10 mbar lt 5 10 mbar lt 5 x 10 mbar Issue D 11 Table 3 DX pumps technical data 20 06 06 TIVOINHOAL m O I 2 O gt r gt gt 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Ultimate pressure with rotary vane backing pump with diaphragm backing pump lt 5 x 10 mbar DN100ISO K inlet flange 5 x 1
32. Both the EXT255iDX and the EXT75iDX with an NW25 interstage port are supplied with an inlet strainer that fits into the interstage port The inlet screen and inlet strainer protect the pump against damage that would be caused by debris entering the pump The inlet screen also protects the user against injury from the sharp blades in the pump Note The EXT75iDX with an NW16 interstage port is not supplied with an inlet strainer The DX pumps have a vent port for venting the pump and vacuum system to atmospheric pressure The pump is supplied with a manual vent valve fitted this can be replaced with a TAV5 or TAV6 solenoid operated vent valve available as accessories see Section 7 The DX pumps have a purge port an inert purge gas can be introduced to protect the bearing and motor from corrosion or the bearing lubricant from oxidisation An optional vent port adapter and purge restrictor can be fitted to the purge port to control the flow rate of the purge gas and to filter the gas supply Refer to Section 7 Air coolers and a water cooling block are available as optional accessories to cool the DX pumps Refer to Section 7 Issue D ka 2 20 06 06 1 3 1 4 1 4 1 Issue D M BOC EDWARDS EXT Compound Turbomolecular Pumps Drive electronics The Podule contains the drive electronics that control the pump operation and accessories such as a TAV vent valve or air cooler There is a connector socket on the to
33. DS EXT Compound Turbomolecular Pumps Water cooling CAUTION You must turn off the cooling water when you switch off the pump to prevent condensation inside the pump and Podule A WCX water cooler accessory is available for the DX pumps refer to Section 7 4 Apply a thin layer of thermal grease to the mounting face of the water cooler then fit it as described in the instruction manual supplied with it The cooling water supply must comply with the specification given in Section 2 5 Pipes in the water cooling circuit may become blocked if the cooling water contains too much calcium carbonate or if it contains particles that are too large Corrosion of the water cooling circuit may occur if there is too little calcium carbonate and oxygen in the water Good quality drinking water is usually suitable If in doubt check the quality of your cooling water supply and if necessary provide treatment and filtration Connect the cooling water supply to the water cooler on the pump as described below Either of the two riffled connectors on the water cooler can be used for the water supply or return connections Push reinforced hose approximately 6mm internal diameter over the ends of the riffled hose connectors on the water cooler on the pump Attach the hose with strong hose clips and make sure that they are tightened securely Alternatively unscrew the riffled hose connectors and remove them from the water cooler and make direct connect
34. DS EXT Compound Turbomolecular Pumps 7 4 11 Podule connector plug A Podule connector plug can be fitted to the DX pump to drive a TAV vent valve or an ACX air cooler Product Item Number Podule connector plug 722 40 808 7 4 12 TIC Turbo and instrument controllers There are three different types of controller available The first is an Instrument Controller IC used to control gauges only and is not suitable to power an EXT turbo pump or backing pump The second is a Turbo Controller TC used to control just a 24V EXT turbo pump and a backing pump The last is a Turbo Instrument Controller TIC used to control a 24V EXT turbo pump backing pump and up to 3 gauges Controller Type Item Number TIC Turbo Controller 100W D397 11 000 TIC Turbo Controller 200W D397 12 000 TIC Turbo amp Instrument Controller 100W D397 21 000 TIC Turbo amp Instrument Controller 200W D397 22 000 7 4 13 TIC PC Program S3lHOSS322V SJYVdS ADIAYAS The TIC PC Program is a piece of PC based software that is supplied with the TIC and can be used for retreiving and setting the user configurable parameters in the pump Issue D O 73 EEE 20 06 06 m 7 lt O m v gt 2 m gt 2 gt O O m o 2 m Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps AS 1209 A 1 Vibration isolator 10 PRX purge restrictor 2 Inlet flange seal supplied 11 Inlet strainer su
35. Description EXT75DX EXT75DX EXT75DX EXT75DX EXT75DX EXT75DX EXT75iDX EXT75iDX EXT75iDX EXT255DX EXT255DX EXT255iDX Instruction Manual B722 40 880 Issue D Original EXT Compound Turbomolecular Pumps EXT75DX EXT75iDX EXT255DX and EXT255iDX 158063 CF63 NW40 150100 150100 NW25 Backing 15063 Reversed NWA40 15063 NW16 Interstage 15063 NW25 Interstage 1SO100 CF100 150100 Interstage 27 7 BOC EDWARDS Item Number B722 41 000 B722 42 000 B722 43 000 B722 45 000 B722 46 000 B722 48 000 B722 35 000 B722 37 000 B722 38 000 B753 11 000 B753 12 000 B753 13 000 98 37 EC 89 336 EEC Declaration of Conformity BOC Edwards Manor Royal Crawley West Sussex RH10 2LW UK declare under our sole responsibility that the machine s EXT75iDX NYV40 interstage B722 35 000 EXT75iDX ISO63 NW 16 interstage B722 37 000 EXT75iDX ISO63 NW25 interstage 722 38 000 EXT75DX 15063 722 41 000 EXT75DX CF63 B722 42 000 EXT75DX NW40 B722 43 000 EXT75DX 150100 B722 45 000 EXT75DX 150100 NW25 B PT B722 46 000 EXT75DX 15063 Reversed B722 48 000 to which this declaration relates is in conformity with the following standard s or other normative document s EN ISO 12100 2 2003 Safety of Machinery Basic Concepts General Principles for Design Technical Principles EN 1012 2 1997 Safety Requirements Vacuum Pumps EN61010 1 2001 Safety Requirements for Electrical Equipment for Measurement
36. Fuse or equivalent current 6 A type T IEC approved or 10 A type T IEC approved or limiting device rating 6 A time delay fuse UL CSA 10 A time delay fuse UL CSA approved approved gt Factory default setting 80 W 160 W Maximum power limit 120 W 200 W gt Minimum power limit 50 W 80 W EXT75DX 15 way D type male 24 V d c 5 10 21 6 to 252 V d c EXT255DX 15 way D type male 24 V d c 596 10 21 6 to 25 2 V d c Hardware control input signal Enabled control voltage low close Disabled control voltage high open 0 to 0 8 V d c lout 0 55 mA nominal 4 to 26 4 V d c Internal pull up to 6 35 V nominal 0 to 0 8 V d c lout 0 55 mA nominal 4 to 26 4 V d c Internal pull up to 6 35 V nominal Analogue output Output voltage Output current 0 to 10 V d c directly proportional to measured parameter Motor speed 0 1500 Hz 0 100765 Motor power 0 120 W Motor temperature 0 100 Controller temperature 0 100 C 5 mA 0 to 10 V d c directly proportional to measured parameter Motor speed 0 1000 Hz 0 100765 Motor power 0 200 W Motor temperature 0 100 C Controller temperature 0 100 lt 5 mA NORMAL status output Type lt Normal speed default 80 gt Normal speed Open collector transistor Off 2 2 kQ pull up to 12 V d c On 0 8 V d c sinking 20 mA Open collector transistor Off 2 2 pull
37. Issue D Table 13 Summary of commands that can be sent to the DX pump 35 20 06 06 NOILVTIVLSNI 2 gt r r gt zi 2 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Object Command Parameter Factory Data Unite Comment name range setting type Factory 5867 1 Reset all configuration options and settings parameters to the factory settings PIC software S868 10 string chars PIC software version number version D39647620x Speed C869 0 decimal Set target speed to full speed control 1 Set target speed to standby speed Timer 5870 0 1 decimal Timer disabled options 25870 1 Timer enabled Note that the timer is permanently enabled on ramp up Analogue 5871 0 0 decimal Analogue output Measured speed signal 25871 1 Analogue output Measured power options 2 Analogue output Measured motor temp 3 Analogue output measured control temp Electronic S872 0 0 decimal Electronic braking disabled braking 25872 1 Electronic braking enabled option Close vent 875 1 decimal Closes the vent valve for delayed start and valve overrides the current vent option There is no open vent valve command but the stop command C852 0 will clear the override Table 13 Summary of commands that can be sent to the DX pump Continued Abbreviation Meaning cr chars d h r 5 string X
38. LED This green LED remains on all the time that the pump rotational speed is above the Normal speed setting irrespective of whether the pump is accelerating or decelerating Table 10 Indicator LEDs Note If excessive electrical load is applied to the Normal output line the Normal LED may illuminate 2 11 Operating and storage environment Range Data Ambient operating temperature range 5 C to 40 C Ambient operating humidity range 10 to 90 RH non condensing Maximum operating altitude 3000 m Ambient storage temperature range 30 C to 70 C Table 11 Operating and storage environment Issue D 21 80000 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps m Oo I 2 O gt r gt gt This page intentionally blank Issue D C O 27 20 06 06 3 3 1 M7 BOC EDWARDS EXT Compound Turbomolecular Pumps INSTALLATION Unpack and inspect Take care when you unpack the pump to avoid excessive shocks that could damage the bearings and reduce the life of the pump The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour Do not remove these seals until you are ready to install the pump on your vacuum system Remove all packing materials and check the pump If the pump is damaged notify your supplier and the carrier in writing within three days state the Item Number of the pump together with your or
39. Section 4 1 details the commands that you will need to configure the Podule Alternatively you could use the BOC Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller Further information regarding this is detailed in Section 4 2 If you intend to operate the DX pump in pure Parallel Interface Mode and you do not wish to reconfigure the Podule settings go straight to Section 4 3 Configuring the DX pump using Serial Commands Refer to Table 13 for a summary of the full set of serial commands Table 13 details the parameter range and factory default for each setting The following sections describe the settings in more detail Power limit setting Table 18 shows the power limit setting options for the DX pumps The pump is supplied to you with a default power limit as shown If this limit is not suitable for your application you can change it to any value between the maximum and minimum shown Pum Maximum value Minimum value Default power P setting setting setting EXT75DX 120W 50W 80W EXT255DX 200 80W 160W Table 18 Power limit setting Send the command as follows where the d characters represent the value in Watts that you are trying to set For example if you want to set the limit to 90W type 90 o wu Command cr The reply you receive will be in the following format The Power Limit Setting is now stored in memory withi
40. XT255DX Critical backing pressure t 8 mbar 12 mbar He 6 5 mbar 9 mbar 2 5 mbar 2 5 mbar Minimum backing pump displacement 0 6 m hi 0 6 m h Maximum Continuous Backing Pressure at Ultimate Inlet Pressure Nitrogen Water Cooling 40 C ambient 4 mbar 7 mbar Forced Air Cooling 35 C ambient 5 mbar 5 mbar Natural Convection Cooling 30 C ambient 2 mbar 2 mbar Maximum continuous inlet pressure at Ultimate Backing Pressure Nitrogen Water cooling 40 C ambient 2 x 102 mbar 1 x 10 mbar Forced Air cooling at 35 C ambient 3 x 10 mbar 8 x 103 mbar Natural Convection Cooling 30 C ambient 8 x 10 mbar 2 x 10 mbar Argon Water cooling 40 ambient 4 x 10 mbar 7 x 10 mbar Forced Air cooling at 35 ambient 4 x 10 mbar 5 x 10 mbar Natural Convection Cooling 30 C ambient 1 x 10 mbar 1 x 10 mbar Recommended backing pump RV3 RV12 Operating attitude Vertical and upright through Vertical and upright through to horizontal 2 to horizontal 2 Nominal rotational speed 90 000 revolutions per 60 000 revolutions per minute minute Starting time to 90 speed 110 seconds 78 seconds Sound power level 1 metre away lt 50 dB A lt 50 dB A Table 3 DX pumps technical data continued Pumping speed is reduced to 90 of its original value Above this pressure rotational speed drops below nominal Values for maximum continuous inlet pressure obtained using a
41. a radiation shield between the system and the pump This radiation shield will reduce the heat radiated onto the pump rotor Typically a bakeout of four hours is long enough to remove water condensation from the pump However the bakeout time will depend on the amount of condensation in the pump and the vacuum system and the ultimate pressure you want to achieve Issue D 56 ss 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps Length of power failure Control mode Behaviour of pump Power is reinstated before pump rotational speed falls below 50 Power is reinstated after pump rotational speed falls below 5076 but before regenerative power ceases Power is reinstated after pump rotational speed falls below 50 and the regenerative power ceases Either Parallel or Serial Control Either Parallel or Serial Control Timer disabled Either Parallel or Serial Control Timer enabled Either Parallel or Serial Control Regenerative power maintains all output signals during the power failure The pump will ramp to its designated speed as quickly as possible after the power has been restored Regenerative power maintains all output signals during the power failure As the Timer is disabled the Podule will go into fail condition as soon as speed falls below 5076 and will display flashing error code 0 When the power is reinstated the pump will not ramp up until the error is cleared
42. a different system parameter refer to Section 4 1 7 Issue D 4 ee 20 06 06 1 4 5 1 4 6 1 4 7 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Automatic vent options A BOC Edwards TAV vent valve can be connected directly to the DX pump s Podule The Podule is capable of controlling a number of different venting options The drive electronics can control the rate of venting Using this feature the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings Once the pump rotational speed has dropped to below 50 of maximum speed it is safe to hard vent open the vent valve fully There are many venting options available to you such as Hard vent when rotational speed drops below 50 Controlled vent when above 5076 speed and hard vent below 5076 speed Hard vent immediately through a suitable restrictor A full list of the venting options is given in Section 3 8 In addition there is a feature that allows a delayed start of the DX pump With this feature you can close the vent valve before you start the DX pump This allows the backing pump to reduce the pressure in the vacuum system before starting the DX pump If you do not wish to use the Podule to control a TAV vent valve you could use it to run a fan instead You can configure the Podule so that the fan is permanently enabled Normal speed setting The Normal Speed is a user selectable pa
43. al Stop the pump control 1 Start the pump 2V852 0 1800 decimal RPS motor speed 32 bits hex flags System status word Vent options 5853 0 0 decimal Hard vent only when lt 50 speed 2 853 1 Controlled vent if gt 50 speed or hard vent if lt 50 speed 2 Hard vent if stop or hard vent if fail and lt 50 speed 3 Hard vent if stop or controlled vent if fail and gt 50 speed or hard vent if fail and lt 50 speed 4 Hard vent if fail or hard vent if stop and lt 50 speed 5 Hard vent if fail or controlled vent if stop and gt 50 speed or hard vent if stop and lt 50 speed 6 Hard vent if stop or fail 7 Same as option 6 8 Vent Permanently Enabled Fan Timer 5854 1 30 8 decimal minute Timeout period for both initial ramp and setting S854 s if speed drops below 50 Power limit S855 50 120 80 decimal watts Link power maximum EXT75DX setting 2 855 80 200 160 decimal watts Link power maximum EXT255DX Normal 5856 50 100 80 decimal Normal speed as a percentage of full speed speed S856 setting Standby S857 55 100 70 decimal 76 Standby speed as a percentage of full speed speed 29857 setting Temperature 2V859 0 100 decimal C Measured motor temperature readings 0 100 decimal C Measured controller temperature Link V860 0 500 E decimal 0 1volts Measured link voltage parameter 0 300 decimal 0 1 Measured link current readings 0 15000 decimal 5 Measured link power 0 1 watt
44. aminated Is the pumping speed insufficient due to poor conductance between the pump and the gauge or too large a chamber Is the interstage inlet pressure gt 0 5 mbar 50 Pa Is the backing pressure gt 10 mbar 1x10 Pa Is the high vacuum area of the system contaminated Check the rest of your system for leaks and contamination Remove the pump from the system and test the ultimate pressure of the pump alone refer to Section 2 Is the pump rotational speed the same as the resonant frequency of the attached system Is the vibration being transmitted from the rotary backing pump Is the noise irregular and getting progressively worse Is the pump making a constant high pitched noise Action Bake the system and pump If so clean or replace them Increase the conductance or reduce the volume If the interstage inlet pressure is too high inlet pressure at the turbomolecular inlet is increased ensure that the interstage inlet pressure is lt 0 5 mbar 50 Pa If so the backing pressure may be too high Check for backing pipeline leaks If the throughput is high you may need a larger backing pump If so clean the high vacuum system If found repair the leaks and clean the contamination If inlet pressure is poor check the pump for contamination and refer to Section 5 Leak test the pump If the leak rate gt 1x1 07 mbar st 1x1 0 Pa s contact your supplier or BOC Edwards If
45. any value from 1 to 30 minutes When you receive the pump it will be configured with a default timeout period of 8 minutes To change the Timer setting send the following command where the characters d represent the timeout period in minutes Command 5 8 5 4 5 d d cr The reply you receive will be as follows roy eds je e The Timer setting is now stored in memory within the DX pump To check what timeout period is set you can send a query as follows Command 8 5 4 The reply you receive will be as follows Reply 5 8 5 4 sp cr The Timer is permanently enabled during ramp up however it is optional whether you have it enabled at other times When you receive the pump it will have the Timer enabled by default If you wish to disable the Timer send the following serial command Command l S 8 7 0 sp 0 cr The reply you receive will be as follows Reply S 8 7 0 sp r cr The state of the Timer option is stored in memory within the DX pump To enable the Timer again send the following serial command Command 8 7 0 5 1 Issue D Mu 46 ee 20 06 06 4 1 7 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps The reply you receive will be as follows Reply 8 7 0 sp r c
46. are retained even when power to the DX pump is removed This means that it is possible to use a separate system to configure the Podule before fitting the DX pump to your application This gives the benefit of tailoring the pump functionality to a customer application and allows the pump to be operated using a simple parallel interface system To configure the DX pump either use your own simple serial system or use the BOC Edwards TIC Turbo Controller or Turbo Instrument Controller The TICs have a feature which allows storage of a DX pump s configuration The configuration can then be downloaded to another DX pump This is useful when configuring a number of DX pumps with the same settings before they are fitted to a system The TIC is supplied with a WindowsTM based PC program which allows the DX pump to be configured from a single PC The program has a simple user interface which means that it is not necessary to use the ASCII message protocol described in section 3 7 The TIC PC Program has a facility to save multiple DX pump configurations which can then be downloaded into other DX pumps NOILOINGOULNI 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 2 J c o zi 2 This page intentionally blank Issue D C O __ 8 20 06 06 2 2 1 TECHNICAL DATA 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps General items Reference data Performance Dimensions Maximum i
47. as an additional function if the pump rotational speed drops below 50 full speed for any reason you may wish to allow the pump time to recover rather than trigger a Fail condition The Timer starts as soon as the speed drops to below 50 full speed If during the timeout period the pump recovers to above 50 full speed then the Timer will be reset If the pump rotational speed fails to recover by the end of the timeout period the Podule will trigger a Fail condition and will decelerate the pump to rest When you receive the pump the Timer function will be enabled however you can disable it if you wish to With the Timer disabled the pump will Fail and decelerate to rest as soon as pump rotational speed falls below 50 1 4 4 Analogue output The Podule produces an analogue output that allows you to monitor four different system parameters Measured pump rotational speed Measured motor power E Measured motor temperature Measured controller temperature The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter refer to Section 2 8 Connect the analogue output to a suitable meter or indicator to display the appropriate system parameter or connect to your control equipment for example to operate other components in the pumping system at preset values You can only monitor one system parameter at a time using the analogue output However it is easy to configure the Podule to monitor
48. battery for emergency power back up The regenerated energy is used to maintain the electrical supply to the connector socket on the Podule until the pump speed falls to below 5076 of full rotational speed this will ensure that the vent valve remains shut until below 5076 of full rotational speed and will prevent the pump from venting at full speed provided that there is not too much loading on the 24 V supply to the pump Operational features In addition to the basic start and stop commands the DX pumps have several other features for improved functionality This allows you to tailor the pump operation to your particular application Refer to Table 13 for factory default settings of the parameters discussed in the following Sections Power limit setting You can select the maximum power that will be drawn by the pump refer to Section 4 1 1 The more power you supply the quicker the pump will accelerate to reach full speed Therefore if your application requires fast cycling you should set the power limit to the maximum value If ramp time is not important in your application you can use a lower power limit down to a minimum value refer to Table 1 Bas Maximum value Minimum value P setting setting EXT75DX 120W 50W EXT255DX 200 W 80 W Table 1 Power limits You must make sure that the power supply you use is capable of delivering sufficient power to the DX pump By choosing a lower power limit setting you could
49. carriage return character characters decimal ASCII character Note Fields showing multiple d characters are to indicate typical length All data fields have a maximum of 5 decimal characters prefixed by a minus number for negative numbers hexadecimal ASCII character Returned error code refer to Table 15 space character may have several ASCII characters Multi drop decimal ASCII character Note Fields showing multiple X characters are to indicate maximum length and not fixed length Table 14 Command abbreviations Returned error code Meaning 0 1 2 3 4 Issue D No error Invalid command for object ID Invalid Query Command Missing parameter Parameter out of range Table 15 Error codes M BOC EDWARDS Returned error code EXT Compound Turbomolecular Pumps Meaning 5 Invalid command in current state e g serial command to start stop when in parallel control mode 1 IL 3 4 H J E O pr mH 7 H 4 mH IL 9 Ir lt 3 2 1 RS232 interface on control equipment 7 2 24V d c electrical supply 8 3 Fuse 9 4 Optional LED indicator system OK 10 5 Optional LED indicator normal speed 11 6 Current limit resistor for LED 12 Table 15 Error codes o JN o o a 11 yp fp pp pp pp pp gp gp gt Optional serial mode selector DX pump Opti
50. ce or LEDs This will occur at speeds below 5076 full rotational speed Therefore you will not have any indication about pump rotational speed yet the impeller may still be turning When the power is reinstated after a power failure the behaviour of the pump will depend on the control mode at the time of failure parallel or serial and the length of time the pump was without power Table 20 shows a number of scenarios 4 10 Bakeout WARNING m gt 2 Do not touch the bakeout band or surrounding surfaces during the bakeout process as they will be hot CAUTION Pumps with ISO and NW style inlet flanges are not suitable for bakeout only pumps with CF flanges must be used When baking the pump to above 70 C at the inlet flange the pump must be water cooled to prevent damage to the bearing lubricant If you heat your pump and your vacuum system you will speed up the degassing process so that the pump will reach ultimate vacuum in the shortest possible time If you heat the pump this will also prevent condensation of vapours inside the pump The BOC Edwards BX bakeout band may be used to heat the pump refer to Section 7 4 Fit the appropriate band around the pump just below the CF inlet flange When baking the pump or the system make sure that the temperature of the inlet flange does not exceed 100 C When baking your vacuum system if the temperature of the system exceeds 200 C you must put
51. d Analogue signals remain available even using Serial control mode it is possible to control the pump via the Serial interface whilst monitoring these signals using a parallel link Again the Serial data RX and TX use the same connector pins as the parallel signals Standby and Fail respectively so these parallel control and monitoring signals are not available The Serial Enable signal MUST be linked to OV and the Start switch must remain open no connection Parallel control with occasional serial monitoring or serial set up This method of control is best for users who normally wish to operate the pump in parallel mode but occasionally want to adjust the configuration settings stored in the Podule or to monitor operational status of the pump Whilst operating in Parallel mode the same controls and monitoring signals are available as described in Section 1 5 1 It must be remembered that the Serial data RX shares the same connector pin as the Standby signal so the pump cannot be commanded into Standby speed using this line The Serial Enable signal must be linked to OV for serial communications to take place We suggest that you make a special cable for serial communications that includes a link between Serial Enable and OV This way Serial Enable is automatically activated when the cable is connected and then deactivated when the cable is removed Podule configuration serial set up All the configuration settings stored within the Podule
52. der number and your supplier s invoice number Retain all packing materials for inspection Do not use the pump if it is damaged Check that your package contains the items listed in Table 12 If any of these items is missing notify your supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions following the procedure described in Section 6 1 Do not discard the packing materials retain them to re package the pump should you need to return it for service Quantity Description Check 1 1 DX pump with inlet screen fitted g Inlet seal either trapped O ring Co seal or copper compression gasket suitable g for the inlet flange type Connector 24 V for driving accessories from Podule socket g Inlet strainer iDX fitted in the NW25 interstage port only g 3 2 3 3 Issue D Table 12 Checklist of components Note An inlet strainer is not available for the NW16 interstage port of the EXT75iDX Typical installation A typical pumping system with a DX pump is shown in Figure 5 The accessories available for the DX pumps are detailed in Section 7 4 the accessories are shown in Figure 10 Connection to the vacuum system WARNING Ensure that all wires and piping are routed appropriately to avoid the risk of tripping WARNING Install the pump in the vacuum system before the logic interface cable is connected to the control equi
53. drop address When you receive your DX pump it will have multi drop mode disabled by default Each individual pump must be programmed with its own multi drop address via a point to point connection before introduction into a multi drop network Send the following command to assign a multi drop address where the d characters represent the address sp d 44 Note The address can be any decimal number from 1 to 98 The address number 0 is used to disable multi drop mode The address number 99 is reserved as a wild card and is used in the query set up detailed later The reply you receive will be as follows Reply S 8 5 O sp r cr The multi drop address is stored within the DX pump You can also send a query to the pump to find out whether it already has a multi drop address Send the following command Query 8 5 0 If you receive the reply shown below your pump has multi drop mode disabled Reply S 8 5 0 sp 0 cr If your pump already has a multi drop address you will receive no reply and you must then communicate with your pump in multi drop message protocol Refer to Section 3 7 7 for more information about multi drop mode and multi drop message protocol Use the following query using wild card address 99 which means any
54. dwards DX Compound Turbomolecular Pumps You must use the DX pumps as specified in this manual If you do not the protection provided by the DX pumps may be impaired Read this manual before you install and operate the DX pump Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process The units used throughout this manual conform to the SI international system of units of measurement When flow rates are specified the abbreviation sccm is used to mean standard cubic centimetres per 1 minute This is a flow of 1 cm at an ambient temperature of 0 C and a pressure of 1013 mbar 1 013 x 10 Pa In accordance with standard EN61010 the following warning label appears on the DX pump Warning refer to accompanying documentation Warning hot surfaces The units used throughout this manual conform to the SI international system of units of measurement where appropriate US equivalent units of measurement are also given NOILINGOULNI M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 1 2 General description WARNING
55. e D Page A C0 00 20 06 06 45 BOC EDWARDS EXT Compound Turbomolecular Pumps CONTENTS CONTINUED 3 INSTALLATION 23 3 1 Unpack and inspect 23 3 2 Typical installation 23 3 3 Connection to the vacuum system 23 3 3 1 Inlet screen supplied fitted 25 3 3 2 Mechanical fixing 26 3 3 3 Inlet connection and orientation 26 3 3 4 Base Mounting 26 3 3 5 Backing connection 27 3 3 6 Interstage connection iDX variants only 27 3 4 Purge gas connection 27 3 4 1 Connect the purge gas 27 3 4 2 Recommended purge gas flow 28 3 5 Electrical installation 28 3 5 1 Introduction 28 3 5 2 Earth ground connections 28 3 5 3 Connect the logic interface to the TIC 28 3 5 4 Connect the logic interface to your control equipment 28 3 5 5 Connect the electrical supply 29 3 6 Parallel interface mode 30 3 7 Serial interface mode 31 3 7 1 Connect the serial interface to your control equipment 31 3 7 2 Serial enable 32 3 7 3 Serial protocol 32 3 7 4 Message structure 33 3 7 5 Command set 34 3 7 6 Simultaneous parallel and serial operation 34 3 7 7 Multi drop mode 37 3 8 Vent options vent valve connection and control 38 3 8 1 Manual vent valve 38 3 8 2 TAV5 or TAV6 solenoid vent valve 38 3 8 3 Controlled venting 39 3 8 4 Alternative valve connected to the vacuum system 40 3 9 Cooling 40 3 9 1 Introduction 40 3 9 2 Forced air cooling 40 3 9 3 Water cooling 41 Issue
56. e eee 23 70 Interstage connection iDX variants only 27 INTRODUCTION 1 Introduction 28 40 59 ISX inlet screen 70 L Link parameter readings 53 Logic 6 Logic interface 18 M Maintenance 59 Manual vent valve 38 Materials exposed to gases pumped 17 Measured motor speed 53 Mechanical fixing 26 Message protocol 33 Multi drop mode 37 N Normal speed setting 5 45 Operating and storage environment 21 Operation echt peer at RERO ERR 43 Operation at extreme conditions 54 56 Operation at high temperatures 55 Operation at over speed 55 Operation with high inlet pressure 54 Operation with Parallel Control and Monitoring 51 Operation with Serial Control and Monitoring 52 Operational features 3 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps INDEX P Parallel control and monitoring 6 Parallel control with occasional serial monitoring or serial set up 7 Parallel interface mode 30 Paral
57. e is no connection to Serial Enable pin 5 2 monitor Analogue Output connect your control equipment to the pump Analogue Output pin 9 and to pin 2 of your logic interface mating half When you receive your pump the Analogue Output will be configured to monitor pump rotational speed If you wish to monitor any other parameter you must re configure your DX pump using commands over the Serial Interface Refer to Section 3 7 for further details 3 To monitor the Normal status output connect your control equipment to the Normal status output pin 15 and to pin 2 of your logic interface mating half You can use the output to control other devices in your pumping system The output can drive a low power relay of up to 24V coil rating 4 To monitor the Fail status output connect your control equipment to the Fail output pin 7 and to pin 2 of your logic interface mating half You can use the output to control other devices in your pumping system The output can drive a low power relay of up to 24V coil rating Serial interface mode The Serial Interface allows you to control the DX pump and to interrogate its operational status using a number of commands There is a multi drop mode that allows you to communicate with more than one DX pump whilst using just one control system Connect the serial interface to your control equipment CAUTION When connecting the DX pump to a PC remember that the 0 V pin on the RS232 connector may well
58. e with Table 7 If you do not have the facility to adjust the power limit setting you must use a power supply capable of delivering enough current to meet the BOC Edwards factory default power limit setting shown in Table 7 For the EXT75DX this would be around 4 amps and for the EXT255DX it would be around 7 amps If you intend to drive the DX pump using a BOC Edwards TIC be aware that there are several variants Contact BOC Edwards to determine which is most suitable for your application Logic interface connector DX pumps have a 15 way logic interface connector on the end of the logic interface cable see Figures 1 amp 2 items 11 and 3 respectively The logic interface connector can be plugged directly into the BOC Edwards TIC Turbo Instrument Controller or TIC Turbo Controller You must use a suitable connector mating half not supplied to connect the DX pump to your own equipment Refer to Table 7 for the connector mating half type and to Table 8 for Logic Interface connector pins for the electrical connections M BOC EDWARDS EXT Compound Turbomolecular Pumps Logic interface item Connector DX pumps electrical supply Allowable voltage range including any ripple Maximum voltage ripple 0 5 V rms 0 5 V rms Maximum input current with lt 6 A at 24 V during ramp lt 10 A at 24 V during ramp O maximum power limit setting I Maximum input current with lt 3 Aat 24 V lt 5 Aat 24 V 2 minimum power limit setting
59. ecification Check with your water supply authority if you are in doubt about the quality of your supply TIVWOINHOAL 2 6 Materials exposed to gases pumped The following materials and component types are exposed to the gases pumped Aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant felt rare earth magnets silicon nitride phenolic resin carbon fibre reinforced epoxy resin fire retardant polypropylene polyamide and PVC 2 7 Electrical data DX pumps can be driven either by your own system or by the BOC Edwards TIC Turbo Instrument Controller or TIC Turbo Controller Issue D 20 06 06 m O I 2 O gt r gt gt 2 8 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps If you wish to use your own system the size of the power supply you must use depends on your application The power limit setting determines how quickly you can ramp up the pump and dictates the size of power supply you will need If you have serial communications capability or have access to a BOC Edwards TIC you can select the power limit setting of the DX pump Refer to Table 7 for the maximum and minimum power limit settings for DX pumps and for the associated maximum input current requirements If your application requires rapid cycling of the pump you can achieve faster ramp times if you use a power supply that delivers higher current up to a maximum in accordanc
60. en it too quickly We recommend that you open the manual vent valve only after the pump speed has fallen to 50 of full rotational speed 3 8 2 TAV5 or TAV6 solenoid vent valve The TAV5 and TAV6 solenoid valves can be purchased as accessories see Section 7 4 The solenoid valves can be used in the following ways Use a TAV5 or TAV6 solenoid valve in place of the manual vent valve on the pump Use a TAV5 or TAV6 solenoid valve connected to a convenient flange on your vacuum system If you connect a vent valve to your vacuum system select a point upstream of the DX pump to prevent backstreaming of oil from the backing pump If using the TAV5 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 5 litres or more If using the TAV6 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 10 litres or more Issue D UU 38 sss 20 06 06 3 8 3 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps If the volume of your vacuum system is less than 5 litres when using a TAV5 vent valve or if the volume of your vacuum system is less than 10 litres when using a TAV6 vent valve you can incorporate a suitable vent restrictor and vent the pump when it is at full speed Table 17 gives an indication of the appropriate orifice size to be fitted to the vent valve for given vacuum system volumes in order that the rate of pressure
61. ers a path lt 22 between OV and earth Refer to Table 8 Logic Interface Connector Pins when you connect the electrical supply to your connector mating half 1 2 3 4 5 6 7 8 9 AS 0921 A 24 dc electrical supply 6 DX pump logic interface Fuse 7 Start switch Optional LED indicator system ok 8 Optional standby switch Optional LED indicator normal speed 9 Optional voltmeter to monitor analogue output Current limit resistor for LED Figure 8 Logic interface connections parallel mode Parallel interface mode CAUTION If you use the Normal and Fail lines to drive the coils of d c relays you must include a back EMF suppression diode in parallel with each relay coil to protect the DX pump 1 Connect your control equipment to the control input pins of your logic interface mating half Refer to Table 8 which identifies the Logic Interface connector pins The control inputs are as follows Start Standby Speed To activate either of these control inputs you must connect the control input pin to the OV control reference For example to start the pump connect pin 3 Start Stop to pin 2 0V Reference To stop the pump break the connection between pin 3 and pin 2 3 7 3 7 1 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps Note Serial Enable is also a control input but is not required in a system operating purely in Parallel Mode Make sure that ther
62. esponse either a status code or a data return The DX pump can only deal with one message at a time It will only accept a new message once the response to the previous message has been returned If the DX pump receives characters that are not framed inside start and stop characters it will ignore them Messages with the stop character missing will be discarded with no response when a new start character is received If the DX pump receives an unrecognisable message between the start and stop characters it will return an appropriate error message Refer to Section 3 7 7 for more information about operating the DX pumps in multi drop mode 0549 3 7 4 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 1 Gl ov 2 3 Leal b e 5 eal 6 lll RS232Tx 7 9 Lela 10 lll 11 Le fat 12 e 18 e LIP 15 T 1 Il ov 2 efa 5232 4 Cm 1 Main 2 RS232 6 Heim 3 RS232 Tx RS232Tx 7 mi 4 8 Hm HC m B du mH 10 e FM 12 lal re 13 UL M ela 15 duri 1 5232 interface on control equipment 2 Buffer 3 DX pump 4 OR gate Figure 10 Conceptual diagram for multi drop connection Message structure To communicate a message to the DX pump you must send the characters in a specific order If the message does not conform to the correct structure it will be ignored and no reply w
63. f the pump rotor dust can be generated from the carbon fibre reinforced components In this event use appropriate personal protective equipment when handling and disposing of the pump and ensure that all pump inlets and outlets are capped off before disposal Dispose of the DX pump and any components and accessories safely in accordance with all local and national safety and environmental requirements Particular care must be taken with any components that have been contaminated with dangerous process substances Take appropriate action to avoid inhalation of any particles that may be present in the pump Do not incinerate the pump The pump contains phenolic and fluorosilicone materials that can decompose to very dangerous substances when heated to high temperatures IVSOdSIG ADVYOLS 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps a gt m 2 o y o gt r This page intentionally blank Issue D UNE 68 20 06 06 M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 7 SERVICE SPARES AND ACCESSORIES PAGE 7 1 Introduction 69 BOC Edwards products spares and accessories are available from BOC Edwards companies in Belgium Brazil France Germany Hong Kong Italy Japan Korea United Kingdom USA and a worldwide network of distributors The majority of these employ service engineers who have undergone comprehensive BOC Edwards training courses O
64. g If it is refer to 5 4 1 Make sure the pump has a multi drop address and that commands are sent using the multi drop protocol Look up the flashing error code in Section 5 4 1 and follow the advice given Table 21 Fault finding 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps Symptom Check Action The green Normal LED Is the inlet pressure too high If so reduce the pumping load or check for a does not go on or the gross leak into the system pump is not rotating at full speed or the pump Is the pump running too hot Increase the cooling to your pump You may fails whilst running need to change from air cooling to water cooling refer to Section 2 for maximum inlet pressure and cooling requirements You may need to increase cooling water flow or decrease the water temperature or do both Check that external heat sources such as system bakeout heaters are not excessive ADNVNALNIVW Does the rotor rotate freely If not the pump bearings may be damaged Contact your supplier or BOC Edwards Table 21 Fault finding Continued Issue D 61 20 06 06 X E 2 m 2 gt 2 O m Symptom Ultimate pressure cannot be reached The pump is very noisy or there is excessive vibration or both Any other problems 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Check Is the pressure limited by water vapour Are any of the vacuum gauges cont
65. gases containing more than 20 oxygen unless the pump is gas purged If you do the lubricant will polymerise and the pump may fail prematurely CAUTION Do not use a DX pump to pump mercury vapour and do not allow mercury for example from a McLeod gauge to come into contact with the pump If you do the pump rotor may corrode and fail Note Concentrations of gases may be modified by the compression of the pump The pumps are designed to pump the following residual gases normally used in high vacuum systems Air Carbon dioxide Methane Neon Propane Krypton Butane Helium Carbon monoxide Ethane Nitrogen Argon Hydrogen You can use the pump to pump oxygen and water vapour subject to the following conditions Oxygen when the pump is purged by an inert gas oxygen can be pumped at concentrations above 20 by volume Refer to Section 2 4 for Purge gas specification However if the pump is not purged the oxygen concentration must be less than 2076 by volume Water vapour you must ensure that vapour does not condense inside the pump refer to Section 3 9 3 If you wish to pump a gas not in the list above contact your supplier for advice If you do not contact your supplier you may invalidate the warranty on the pump The pump is not suitable for pumping aggressive or corrosive gases M BOC EDWARDS EXT Compound Turbomolecular Pumps Parameter EXT75DX EXT75DX EXT
66. gle pumps An individual DX pump will remain silent and ignore all command messages unless the multi drop address matches its own address 3 8 Vent options vent valve connection and control 2 gt r gt zi 2 CAUTION If the pump is vented when it is at full rotational speed and the rate of pressure rise is too high the pump could be damaged and its life may be reduced We therefore recommend that either the rate of pressure rise is limited refer to Figure 3 or that the vent valve is only opened after the DX pump speed has fallen to 50 of full rotational speed To maintain the cleanliness of your vacuum system we recommend that whenever you switch the pump off you vent the pump or vacuum system when the speed of the DX pump is between full rotational speed and 50 of full rotational speed Over this speed range the rotor spins fast enough to suppress any backstreaming of hydrocarbon oil from your backing pump Do not connect the vent valve to the backing pipeline this may lead to contamination Connect the inlet of the vent valve to the vent gas supply refer to Section 2 3 for the vent gas specification Venting may be accomplished by using one of the following methods described in Sections 3 8 1 to 3 8 4 3 8 1 Manual vent valve A manual vent valve is supplied with the DX pump It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to op
67. h BSP male thread that can be screwed into both the vent port and purge port making them suitable for NW10 fittings Vent port adaptor Item Number Vent Port adaptor NW10 B580 66 011 1 8 inch BSP male 7 4 8 purge restrictor The PRX10 is a modified DN10NW centring ring that filters the purge gas and restricts its flow rate to the recommended flow of 25 sccm You must fit a vent port adaptor to the purge port in order to connect a purge restrictor to the pump Purge Flange size Item number restrictor PRX10 NW10 B580 65 001 m J 5 O m v gt 2 m gt 2 gt O m o 2 m 7 4 9 Vibration isolators In applications where the small amount of vibration generated by the compound turbomolecular pump is a problem a vibration isolator can be fitted The isolator consists of two special flanges separated by a flexible bellows and a rubber anti vibration outer collar The vibration isolator required depends on the pump inlet flange size Note The vibration isolator is designed for use with vertically mounted pumps only Flange Size Item Number DN63ISO K B581 15 000 DN63CF B581 01 000 DN100ISO K B581 20 000 DN100CF B581 05 000 7 4 10 FL20K foreline trap The foreline trap minimises oil vapour backstreaming from the backing pump and is recommended where the highest system cleanliness is required Foreline trap Item Number FL20K A133 05 000 Issue D 72 Ee 20 06 06 M7 BOC EDWAR
68. ill be sent The correct structure to use is as follows a valid start character either a character for a store operation or character for a query operation followed by a command which will be an upper case alphabetical character followed by an object number comprising three decimal digits followed by NOILVTIVLSNI 2 Wn gt r gt zi 2 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps for some commands only a data field comprising a sequence of characters separated from the object number by a space followed by a terminating carriage return The message protocol in multi drop mode is marginally different refer to Section 3 7 7 Command set Table 13 shows a summary of the full set of commands available for controlling and monitoring the DX pump Table 14 shows the abbreviations that are used to define commands in the following sections and Table 15 shows the error codes that might be returned Simultaneous parallel and serial operation You can control the pump using Parallel Interface control inputs and at the same time monitor various pump parameters using the Serial Interface Alternatively you can control the pump using commands sent over the Serial Interface while at the same time you can monitor the Normal signal and Analogue Output over the Parallel Interface Figure 11 shows a schematic diagram of a system that would allow you to do this You cann
69. input to the OV control reference on the logic interface connector The pump will then accelerate to full operating speed The green indicator on the Podule will illuminate when the pump reaches Normal speed this is 80 of full rotational speed by default but you may have selected a different value to suit your application 4 4 0 Running at standby speed To run the DX pump at Standby Speed link both the Standby control input to the OV control reference on the logic interface connector If the pump is currently below Standby Speed then it will accelerate until it reaches Standby speed If it is running faster than Standby Speed it will decelerate until Standby Speed is reached To return the pump to full speed disconnect the Standby control input from the OV control reference on the logic interface connector 4 4 3 Stop the pump Stop the DX pump by disconnecting the Start Stop control input from the OV control reference on the logic interface connector The pump rotor will decelerate to rest 4 4 4 Parallel monitoring It is possible to monitor the following parameters Analogue output E Normal signal Fail signal Refer to Section 3 6 for instructions on how to monitor these signals Issue D 51 20 06 06 45 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 5 Operation with Serial Control and Monitoring 4 5 1 Delayed start If you are using a TAV solenoid valve controlled by the Podule you may wish to
70. ions to the 1 8 inch BSP female threaded fittings on the water cooler If you want to remove the pump for maintenance and you do not want to break the cooling water circuit unscrew the two M4 fixing screws and remove the water cooler from the pump Make sure that there is a layer of thermal contact grease on the water cooler before you refit it to the pump NOILVTIVLSNI M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 2 N gt r gt zi 2 This page intentionally blank Issue D C O _ 4 4 1 42 20 06 06 4 1 M BOC EDWARDS EXT Compound Turbomolecular Pumps OPERATION WARNING Do not operate the DX pump unless it is connected to your vacuum system If you do the pump rotor can cause injury The pump rotor rotates at very high speeds and the rotating blades might not be visible Before operating the pump it is worthwhile configuring the various Podule settings so that they are suitable for your application If your system is designed to operate in pure Parallel Interface Mode you will not have the facility to change any of the Podule settings once the DX pump is installed on your system The pump is supplied with all settings at factory default values as shown in Table 13 If you wish to change any of the Podule settings make sure you do this separately before installing the DX pump on your system To configure the DX pump you could use your own serial system
71. it will decelerate until Standby Speed is reached To return the pump to full speed send the following command Command 8 6 9 sp 0 cr The reply you receive will be as follows Reply c 8 6 9 sp r cr Issue D 52 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 5 4 Stop the pump To stop the DX pump send the following command over the serial communications link Command Cc 8 5 2 sp 0 cr The reply you receive will be in the following format Reply c 8 5 2 sp r cr On successful receipt of the stop command the pump rotor will decelerate to rest NOILVil3dO 4 5 5 Temperature readings You can monitor the temperatures of both the pump motor and the internal electronics of the DX pump by sending the following query Command 8 5 9 The reply you receive will be as follows where the first number is the motor temperature and the second number the internal Podule temperature both measured in C Reply V 8 5 9 sp d d d d d d cr 4 5 6 Link parameter readings You can monitor the internal voltage current and motor power of the DX pump by sending the following query Command V 8 6 0 cr You will receive the following reply
72. l on the logic interface connector is set to start the pump may automatically restart when the electrical supply is restored after an electrical supply failure Ensure that people cannot be injured by the rotating blades of the pump CAUTION If you are using a vent valve powered by the pump you must ensure that no more than 2A is drawn from the regenerated power supply If higher currents are drawn the voltage of the regenerated power supply may collapse causing the vent valve to open before the speed falls through 50 of full operating speed If the electrical supply to the DX pump fails when the pump is rotating the motor of the pump is used as a generator The regenerated power is used to maintain the output signals on the logic interface such as the Normal signal and serial communications to power the two indicator LEDs on the Podule and to maintain power at the Podule output to control the vent valve if fitted The regenerated power is also available at the power supply pins of the logic interface connector and could be used to power other instruments through short power interruptions The minimum voltage of this supply will be 24V 2076 19 2V provided that the external load is not excessive NOILVtl3dO 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps As the pump rotational speed decreases the motor s ability to generate power also decreases until it is no longer able to maintain power to the logic interfa
73. lacement pumps will be supplied with default factory settings The TIC DX PC Monitor program available as an accessory allows you to automatically download and save your configuration Issue D 69 ES 20 06 06 m 7 5 O m U gt 2 m gt 2 gt O O m o 2 m 7 3 7 3 3 7 4 7 4 1 7 4 2 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps Spares ISX inlet screen An inlet screen is fitted to your pump as supplied to prevent damage from the entry of debris into the pump The Item Numbers of replacement inlet screens are given below Select the inlet screen according to the pump inlet flange size You cannot replace the inlet screen on a pump with an NW inlet flange Flange Size Inlet Screen Item Number DN63ISO K ISX 75D 63 B722 40 860 DN63CF DN100ISO K ISX100 B580 51 001 DN100CF Inlet strainer The EXT75iDX and EXT255iDX pumps are supplied with an inlet strainer for the interstage port The Item Number for a replacement inlet strainer is given below Flange Size Item Number DN25ISO K A223 05 067 Inlet flange seals DX pumps are supplied with an inlet seal The Item Numbers of replacement seals are given in Table 26 Flange size Inlet flange seal Item number DN63ISO K 15063 trapped O ring fluoroelastomer B271 58 170 DN40NW DN40NW Co seal fluoroelastomer B271 58 453 DN100ISO K 150100 trapped O ring fluoroelastomer B271 58 171 DN6
74. lel monitoring 51 Podule configuration serial set up 7 Podule connector plug 73 Podule connector socket 20 Power limit setting 3 43 Powering a fan from the podule 44 Pre start checks 51 PRX purge restrictor 72 Pumping media 9 16 Purge gas connection 27 Purge gas specification 17 R Recommended purge gas flow 28 Returning a pump for 69 Rotor life ss id eas ee ars 59 Running at standby speed 51 S Scope and definitions 1 Serial control with parallel monitoring 7 Serial 32 Serial interface mode 31 Serial protocol 32 easi rerea EKE Xr E Y 69 Shut down e hn 54 Simultaneous Parallel and Serial Operation 54 Simultaneous parallel and serial operation 34 ses seek hd e ee E ER QUE aces 70 Standby Speed 52 Standby speed 4 Standby speed setting 45 Start the 51 52 Start with parallel interface control
75. ll control and status signals 3 START STOP control input Connect to Pin 2 to start pump 4 STANDBY control input Connect to Pin 2 to enable standby speed Serial RX 5 Serial enable Connect to Pin 2 to enable serial interface mode 7 FAIL Serial TX Logic high when fail condition exists in parallel mode 9 Analogue output Positive 0 10 V output proportional to measured output 10 Chassis Screen Screen 12 Chassis Screen 15 NORMAL status output Logic low when pump rotational speed is at normal speed or above 8 13 14 Electrical supply 0 V 1 6 11 Electrical supply 24 V Positive Table 8 Logic interface connector pins Issue D 20 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Description Data Connector plug Phoenix part number FKMC1881325 Voltage output 24 V d c 10 20 19 2 to 26 4 V d c Current output 120 mA j Table 9 Podule technical data o I 2 10 Indicator LEDs 2 The DX pump has two indicator LEDs shown in Figures 1 and 2 as item 8 D LED Description Jg Status LED This yellow LED flashes with a 5076 duty cycle at the rotational frequency of the pump motor At high speeds it appears continuously gt on The LED switches off when the rotational speed is very low or stopped In a fail condition this LED flashes in a sequence to indicate error codes and can be used for fault finding Refer to Section 5 5 Normal
76. mperature greater than 35 C or when using a bakeout band CF variants only When using water cooling ambient air temperature must be less than 40 C and the water temperature must be between 10 C and 20 C We recommend that whereever possible you cool the pump by forced air cooling water cooling See Table 3 page 13 for further performance information Forced air cooling Air cooling accessories are available for DX pumps refer to Section 7 4 Fit the air cooler as described in the instruction manual supplied with it If you wish to use an alternative fan for air cooling ensure that the flow rate is above 70 m h 40 cfm The air cooler can be powered by your own external power supply the BOC Edwards TIC Turbo and Instrument Controller the TIC Turbo Controller or by the Podule It cannot be powered by the Podule if a TAV solenoid valve is already connected to the Podule Follow the electrical connection instructions in the air cooler manual to wire the lead of the air cooler into the Podule connector supplied with the pump refer to Figure 1 Plug the connector into the socket at the top of the Podule refer to Figures 1 and 2 items 1 and 7 respectively You can only configure your Podule to drive an air cooler if you can send commands via the Serial Interface or you have access to a BOC Edwards TIC Turbo and Instrument Controller or Turbo Controller Issue D Mu 40 ee 20 06 06 3 9 3 Issue D 4 7 BOC EDWAR
77. mpound Turbomolecular Pumps Logic interface The Podule can only be operated through the logic interface The signals on the logic interface are of three types Control inputs these are switch type signals that are used to control the pump Status outputs these outputs identify the status of the system Analogue output this provides a 0 10V output for a number of pump parameters The logic interface has been designed to include both serial and parallel modes of control and monitoring operating through one connector The pump can be operated using either serial or parallel method or some combination of the two The logic interface can be plugged directly into the BOC Edwards TIC Turbo Controller or TIC Turbo Instrument Controller and then use the functionality that they provide Alternatively the logic interface can be connected to a customers own control system The most useful arrangements are described in the sections below For more information about the logic interface refer to Section 2 8 Parallel control and monitoring The simple parallel interface is a quick and easy way to control the pump this is the same interface used on existing 24 BOC Edwards Turbo Pumps The controls that are available to use are Start and Standby You can monitor the system status using the Normal Fail and Analogue output signals Note The Serial Enable switch MUST be open no connection Refer to Section 3 6 for more detailed instruc
78. n the DX pump Issue D Reply 5 8 5 5 sp r cr 43 20 06 06 m gt d 2 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps To check what power limit is set you can send a query as follows Command 8 5 5 cr The reply you receive will be in the following format Reply S 8 5 5 sp did cr 4 1 2 Powering a fan from the Podule You can power a fan from the DX Podule provided that you are not already using the Podule to control a vent valve 0 m gt 2 To enable the fan send the following command Command 8 5 3 sp 8 cr The reply you receive will be in the following format Reply 8 5 3 sp r cr The permanently enabled fan setting is now stored in memory within the DX pump When you receive the pump it will be set up to run a vent valve You can send a query to find out what the setting is as follows Command 8 5 3 cr The reply you receive will be in the following format Reply 8 5 3 sp d cr If the character d is 8 then the fan is enabled If it is anything else you will need to configure the Podule to run the fan 4 1 3 Controlled venting options If you are using the Podule to au
79. nants on the pump surfaces For environmental reasons keep wastage of cleaning solutions and solvents to a minimum 5 5 Fault finding Refer to Table 21 for the possible causes of faults and the recommended actions to rectify faults Symptom Check Action The Podule LEDs do not flash for 0 5 seconds when system switched on The pump does not rotate after a parallel Start command is supplied The pump does not rotate after a serial Start command is sent The pump does not respond in multi drop mode The orange status LED flashes an error code Issue D Has the electrical supply failed Check that the electricity supply is on and whether the Fail output is active Check whether the pump returns a reply to your Start command Check that the multi drop is enabled Note the position of the long flashes within the series of 6 flashes to work out the error code Ensure that the electrical supply is switched on and the fuses and current limiting devices have not been tripped If there is a Fail signal check whether the orange status LED is flashing If it is refer to Section 5 4 1 If power is supplied there is no Fail signal and the rotor still does not rotate then there is a fault with the pump If there is no reply check that the serial communications link is plugged in and that Serial Enable is active and that the electrical supply is on Check whether the orange status LED is flashin
80. nlet flange temperature 15063 150100 NW40 70 C with cooling water DN63CF EXT75DX DN100CF EXT255DX 100 C bakeout with cooling water Maximum permitted external magnetic field EXT255DX EXT75DX Pollution degree Equipment type Enclosure protection installed EXT255DX amp 255iDX IP50 EXT75DX amp 75iDX NW25 IP50 EXT75iDX NW16 IP50 Refer to Table 3 Refer to Figures 1 and 2 3 5mT horizontal field 7mT vertical field 5mT EN61010 category 2 V LVG TIVOINHO4AL Fixed equipment for indoor use only 2 2 Issue D Table 2 General data Pumping media WARNING Vent dangerous gases and gas mixtures safely do not expose people to these gases If pumping hazardous gases or vapours observe the safety recommendations of the supplier of the gas vapour WARNING Do not use the DX pump to pump pyrophoric or explosive gas mixtures as it is not suitable for this purpose The pump and its connections are not designed to contain an explosion WARNING In the interstage versions of the DX pumps gas pumped through the interstage port will mix with gas pumped through the pump inlet Ensure that the gases will not react or combine to form dangerous gases and substances WARNING Do not expose any part of the human body to vacuum m O I 2 O gt r gt gt Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps CAUTION Do not use the DX pump to pump
81. ntrol your pump the DX pump logic interface cable connects directly into the back of the TIC Refer to the TIC Instruction Manual for further information Issue D 28 ss 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps 3 5 4 Connect the logic interface to your control equipment If you wish to operate the DX pump using your own control system use a suitable connector mating half not supplied to connect your control equipment to the connector on the logic interface cable refer to Table 7 When you make the electrical connections to the DX pump described in the following sections refer to table 8 for full details of the logic interface connector pins You can control the DX pump using a hardware parallel control interface and via commands sent over a serial interface If you wish to control the DX pump using the hardware Parallel Interface refer to Section 3 6 for more information If you wish to use the Serial Interface see the instructions given in Section 3 7 The logic interface provides the facility to work in either Parallel or Serial control modes however you cannot send commands in both modes simultaneously refer to Section 3 7 6 NOILVTIV LSNI 3 5 5 Connect the electrical supply WARNING This product requires a separate power supply not included The power supply should be adequately protected against a hazardous live condition for example in case of a short circuit WARNING Incorporate a sui
82. onal voltmeter Optional serial enable switch Optional standby switch Start switch Figure 11 Schematic diagram of the logic interface connections 3 77 Multi drop mode Using multi drop mode you can communicate with more than one DX pump using a single computer system Each DX pump must be assigned its own individual address before it can be fitted into a multi drop system The command to assign the multi drop address is sent in standard DX message format as detailed in Section 4 1 10 The message protocol in multi drop mode is marginally different to that described for serial messages in single pump systems The main differences in multi drop message protocol are detailed below Issue D 37 ss 20 06 06 NOILVTIVLSNI 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps All multi drop commands queries or replies have the first character All commands queries and replies contain a header containing the address of the node that the message is to followed by the address of the node that the message is from There is a delimiter character colon which separates the two multi drop addresses in the header The remainder of the message command query or reply follows the same protocol as already described for single pump systems The wild card address 99 is very useful and means any node After a DX pump has been assigned a multi drop address it will ignore any messages in the format for sin
83. or a full description of the Electronic Braking feature The pump is supplied with Electronic Braking disabled by default To enable Electronic Braking send the following serial command Command S 8 7 2 sp 1 cr The reply you receive will be as follows Reply S 8 7 2 sp r cr The state of the Electronic Braking option is stored in memory within the DX pump m gt 2 To disable the Electronic Braking again send the following serial command Command 8 7 2 sp 0 cr The reply you receive will be as follows s ea e To check whether Electronic Braking is enabled or disabled send the following query em s sius The reply you receive will be as follows where d 0 means disabled and d 1 means enabled Reply 8 7 2 sp d cr 4 1 9 Factory settings You can re configure your DX pump back to its original factory settings with one serial command To reset the Podule to factory settings send the following command Command 5 8 6 7 1 The reply you receive will be as follows Reply 8 6 7 sp r The factory settings are restored in the memory within the DX pump Issue D 48 Ee 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 1 10 Assigning a multi
84. ot control the pump using both the Parallel and Serial Interfaces simultaneously For example if you start the pump by sending a Start command over the Serial Interface you cannot then stop the pump by using the Start Stop switch on the Parallel Interface The pump will ignore the state of the Start Stop switch on the Parallel Interface To stop the pump you must send a Serial Stop command Only when the Serial Stop command has been received by the pump can any commands sent via the Parallel Interface be acted on Similarly if you Start the pump by using the Start switch on the Parallel Interface you cannot then stop the pump by sending a Stop command over the Serial Interface The pump will ignore any Start or Stop commands received over the Serial Interface To stop the pump you must use the Parallel Stop switch Only when the pump has been stopped using the Parallel Interface switch will any Start or Stop commands be accepted via the Serial Interface M BOC EDWARDS EXT Compound Turbomolecular Pumps Object Command Parameter Factory Data Units Comments name range setting type Node 5850 0 99 decimal address Multi drop address 2S850 0 disable multi drop address 99 wildcard Pump type 25851 7 string chars Pump type 10 string chars DSP software version number 4 string chars D39647631x for EXT75DX and D39648601x for EXT255DX Full speed RPS 1500 for EXT75DX and 1000 for EXT255DX Pump C852 0 decim
85. ou can drive your TAV solenoid valve from the TIC Refer to the TIC Instruction Manuals for more information NOILVTIVLSNI 2 gt r gt zi 2 3 8 4 3 9 3 9 2 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Alternative valve connected to the vacuum system If using another vent valve ensure that a suitable vent restrictor is fitted to your vacuum system to limit the rate of pressure rise Refer to Table 17 for information about vent restrictor sizes If you do not fit a suitable vent restrictor you must open the vent valve only after the speed of the pump has fallen to 50 of full rotational speed Vacuum system volume litres Orifice diameter mm lt 20 1 0 10 0 7 lt 5 lt 0 5 lt 2 lt 0 35 Table 17 Vent restrictor orifice diameter with atmospheric pressure at the inlet of the vent valve Cooling Introduction CAUTION You must ensure that the pump is adequately cooled to prevent damage to the rotor and bearing Natural Convection Cooling For some light pumping duties with an ambient air temperature less than 30 C natural convection cooling may be adequate to cool the DX pump Forced Air Cooling The ambient air temperature when using forced air cooling must be 5 C to 35 You must ensure that there is an adequate supply of cooling air to the pump Water Cooling You must use water cooling with an ambient air te
86. p of the Podule where the TAV vent valve or air cooler can be plugged in Refer to Section 2 9 The Podule has two indicator LEDs that signal the status and operation of the pump that can also be used for fault finding if a problem should occur Refer to Section 2 10 The drive electronics system has a number of built in safety features to protect the DX pumps from damage in the event of sustained high pressure or temperature The electronics constantly monitor the temperature inside the Podule and the temperature of the motor within the pump If either part becomes too hot the electronics reduce the power supplied to the pump motor and the pump speed will drop If the pump rotational speed falls below 50 full speed the electronics may trip into Fail condition depending on how you have configured the system Refer to Section 1 4 3 If the DX pump s inlet pressure increases the power supplied to the pump motor increases to counteract the gas frictional load However when the built in maximum power limit is reached the speed of the pump will start to drop If the pump rotational speed falls below 50 full speed the electronics may trip into Fail condition depending on how you have configured the system Refer to Section 1 4 3 In the event of an electrical supply failure the drive electronics uses the motor within the pump as a generator This means the DX pumps have their own regenerative supply and do not require a separate
87. pens immediately Stop command is received Controlled venting from 100 to 50 full rotational speed if Fail then vent valve opens fully below 50 4 Vent valve fully opens immediately if Fail vent valve opens fully below 50 full rotational speed if Stop 5 Vent valve fully opens immediately if Fail Controlled venting from 100 to 50 full rotational speed if Stop command received then vent valve opens fully below 50 6 7 Vent valve fully opens immediately for either Stop command or Fail Table 16 Vent options When you receive your pump the Podule will be configured with the factory default vent option 0 as detailed in Table 16 You can configure your Podule to one of the other venting options provided you can send commands via the Serial Interface or you have access to a BOC Edwards TIC Turbo and Instrument Controller or Turbo Controller The Podule only energises shuts the TAV solenoid valve when it receives a Start command Prior to that the valve will be in the open vent state If you have a large vacuum system you may wish to allow the backing pump to reduce the pressure in the system to an acceptable level before starting the DX pump In this case you can send a command via the Serial Interface to close the vent valve before you send a Start command this is known as a delayed start If you are controlling your DX pump with a BOC Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller y
88. pment and before the electrical supply is connected This will ensure that the pump cannot operate accidentally causing injury to people We recommend that the system is leak tested after installation has been completed NOILVTIVLSNI 2 gt r gt zi 2 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps AW 6556 A 13 VE L innnan n gt v 17 o 11 1 Vacuum system 10 Rotary backing pump 2 High vacuum gauge 11 Mist filter 3 Vibration isolator 12 Vent valve 4 Inlet screen 13 Alternative position for vent valve 5 DX pump 14 Air cooler 6 Backing valve 15 PRX purge restrictor 7 Vacuum gauge 16 Regulated purge gas supply 8 Flexible bellows 17 WCX water cooler and connections 9 Foreline trap Figure 5 Typical pumping system with a DX pump Issue D O 24 ee 20 06 06 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 3 3 1 Inlet screen supplied fitted WARNING Removal of the inlet screen will expose the risk of injury from sharp edges Do not remove the inlet screen unless you can be sure that there is no danger that debris can fall into the pump If the inlet screen is removed the pumping speed will increase by up to 10 Do not remove the inlet screen until you are ready to mount the pump onto your system since the screen protects you from exposure to sharp edges It is not possible to remove the inlet screen from a pump with an
89. pplied 3 DK pump 12 Interstage port 4 vent valve 13 Podule 5 Vent port adaptor 14 Podule connector socket for fan TAV valve supplied 6 VRX vent restrictor 15 WCX water cooler 7 Manual vent valve supplied 16 ACX Air cooler 8 Purge port blank supplied 17 BK bakeout band 9 Purge port adaptor 18 Inlet screen supplied fitted EXT75iDX and EXT255iDX only Figure 12 Installation of optional accessories and spares M BOC EDWARDS EXT Compound Turbomolecular Pumps INDEX A Accessories susou reiser cee cece 70 ACX 70 Alternative valve connected to the vacuum system 40 Analogue output 4 Analogue signal options 47 Assigning a multi drop address 49 Automatic vent options 5 Backing connection 27 cc bert Vale tuna daniels 56 Base Mounting 26 Bearing maintenance 59 BX bakeout band 71 Clean the external surfaces of the pump 59 Close the vent valve 43 50 Command 34 Configuring the DX Pump usinga TIC 50 Connect the electrical supply 29 Connect the logic interface to the 28 Connect the logic interface to your control equipment
90. r To check whether the Timer is enabled or disabled send the following query Command 2 S 8 7 0 cr The reply you receive will be as follows where d 0 means disabled and d 1 means enabled Reply 8 7 0 sp d cr NOILVYJdO Analogue signal options The Analogue Output can be used to monitor one of four different parameters as detailed in Table 19 Option number Description of analogue output number 0 Measured pump rotational speed Note this is the factory default setting 1 Measured system power 2 Measured motor temperature 3 Measured controller temperature Table 19 Analogue signal options To configure the Analogue Output send the following command where the character d denotes the option number detailed in Table 19 Command 8 7 1 sp d cr The reply you receive will be as follows Reply 8 7 1 sp r cr The Analogue Output Signal setting is now stored in memory within the DX pump To check which Analogue Output Signal setting is enabled you can send a query as follows Command 8 7 1 The reply you receive will be as follows Reply 8 7 1 sp d cr 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 4 1 8 Electronic braking options Refer to Section 1 4 7 f
91. rameter that can be set anywhere from 5076 to 10076 of full rotational speed When the pump reaches Normal Speed a signal is available on the Normal pin of the logic interface connector You can use this signal to control your application since it shows that pump speed and therefore vacuum performance has reached a minimum specific level The default setting is 8076 of full rotational speed Refer to Section 4 1 5 for instructions on altering the Normal Speed setting Electronic braking The pump has a user selectable Electronic Braking option which is disabled by default With this option disabled the pump will draw power from the supply when accelerating and running and will coast down when decelerating The Electronic Braking function may be enabled to reduce the pump deceleration time and to recover some energy from the pump This is achieved by returning power from the pump to the electrical supply The rate at which electrical energy is returned to the supply is regulated so as to limit the supply voltage to 24 V 10 In order to achieve the fastest electronic braking times there must be somewhere for the returned power to go such as a supply capable of receiving the returned power other devices sharing the 24 V bus with the pump a load resistor of approximately 10 Q switched across the 24 V supply when decelerating the pump NOILINGOULNI 2 J c o zi 2 1 5 Issue D M47 BOC EDWARDS EXT Co
92. rder spare parts and accessories from your nearest BOC Edwards company or distributor When you order please state for each part required Model and Item Number of your equipment Serial number if any Item Number and description of the part 7 2 Service BOC Edwards products are supported by a worldwide network of BOC Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment that has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide BOC Edwards engineers to support on site maintenance service or repair of your equipment S3lHOSS322V SJYVdS 39IAu3s For more information about service options contact your nearest Service Centre or other BOC Edwards company 7 2 1 Returning a pump for service If you need to send your pump to a Service Centre use the returns procedure included at the end of this manual The instruction in the returns procedure to drain all fluids does not apply to the lubricant in the pump oil reservoirs Do not return your pump with the accessories fitted Remove all accessories and retain them for future use Ensure that a completed HS2 form is returned with the pump If you have configured your pump to suit your application make sure you make a record of the configuration before returning your pump All rep
93. rings replaced Rotor life The fatigue life of EXT Turbo pump rotors is typically 40 000 to 50 000 cycles As a precautionary measure BOC Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of acceleration to full speed and back to a stop or after ten years of use whichever occurs first Clean the external surfaces of the pump WARNING Clean the external surfaces of the pump in a well ventilated location When you use cleaning solutions and solvents to clean the pump observe all precautions specified by the manufacturer Avoid inhalation of any particulates that may be present in the pump CAUTION Do not attempt to clean any parts of the pump other than external surfaces Do not disassemble the pump or remove the electronics Podule Use of solvents may damage internal pump components If the DX pump is contaminated inside it may not be possible to achieve the specified ultimate vacuum or pump down time may increase The pump should be returned to a BOC Edwards Service Centre where the pump will be dismantled and cleaned X gt 2 m 2 gt 2 O m X E 2 m 2 gt 2 O m 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps You can use any organic solvent to clean the external surfaces of your pump We recommend that you use non CFC solvents such as isopropanol or ethanol Use a cleaning solution that is suitable for the contami
94. riod Electronic braking options factory default settings For information on how to perform these settings refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals Note lt is not possible to configure the Analogue Output Options using the TIC There is also no facility within the TIC to assign a multi drop address to the DX pump There is a further option of connecting the TIC to a PC and using the TIC PC Program to configure the DX pump The TIC PC Program allows you to configure all the settings shown in the list above as well as allowing configuration of the Analogue Output Options and assignment of a multi drop address Refer to the TIC PC Program Instruction Manual for more information 4 3 Start up Irrespective of the system you use to control the DX pump work through the following steps before starting the pump 4 3 4 Close the vent valve If you are using a manual vent valve turn it clockwise to close it If you are using your own control system to drive a vent valve make sure that the vent valve is closed If you are driving a TAV solenoid valve from the Podule the TAV valve will automatically shut when the pump is started If you are using the TIC to operate the vent valve refer to Section 4 6 Note The backing pump and DX pump can be started at the same time the DX pump will not be damaged and can operate as an effective baffle However if the vacuum system is large
95. se during venting pressure against time with pump initially at full rotational speed Issue D OO __ 16 XX 00 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps 2 4 Purge gas specification Purge gas specification Purge gas Maximum dew point at atmospheric pressure Maximum size of particulates Maximum concentration of oil Allowable purge gas flow when required Recommended purge gas flow Maximum allowable purge gas supply pressure Reference data Dry air nitrogen argon or other inert gases 22 C 1 um 0 1 parts per million 20 to 50 sccm 0 33 to 0 84 mbar s or 33 to 84 Pal s 25 sccm 0 42 mbar 571 42 Pa s 2 bar gauge 29 psi 3 x 10 Pa Table 5 Purge gas specification Cooling water specification Maximum calcium carbonate concentration Maximum chloride concentration Minimum oxygen concentration Minimum cooling water flow rate at 15 Water temperature Maximum water pressure Materials exposed to cooling water Reference data Quality Mechanically clean and optically clear with no deposits or turbidity pH value 6 0 to 8 0 75 parts per million 100 parts per million 4 parts per million 151 Refer to Table 3 5 bar gauge 73 5 psig 6 x 10 Pa Nickel plated brass Table 6 Cooling water specification 2 5 Cooling water The above cooling water specification corresponds to a typical high quality drinking water sp
96. stem then the base of the pump must be fixed to a firm support refer to Section 3 3 4 for instructions on base mounting the pump 3 3 3 Inlet connection and orientation 2 gt r gt zi 2 The pump be securely fixed to the vacuum system via the inlet flange The pump be mounted any attitude from the vertical and upright through to horizontal 2 If the pump is mounted horizontally and you are using a rotary vane pump to back your DX pump then the backing port must point vertically downwards 20 to reduce the risk of contamination from the backing pump oil Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust free If the pump inlet is not kept clean the pump down time may be increased The inlet connections for the EXT75DX are CF flange ISO flanges and the NW flange The inlet connections for the EXT255DX are CF flange and the ISO flange If the pump has CF flange use the copper compression gasket supplied with the pump and use full complement of bolts to connect the inlet flange of the pump to the vacuum system If the pump has an ISO flange use the Edwards trapped O ring supplied with the pump and use a minimum of four claw clamps each torqued to 10 INm to connect the inlet flange of the pump to the vacuum system Alternatively use a rotatable collar and the trapped O ring supplied with the pump to connect the inlet flange of the pump to
97. t blanked off 2 Podule connector socket for fan TAV valve 7 Earth connection 3 Interstage port EXT255iDX only 8 Cooling block mounting frame 4 Manual vent valve in vent port 9 Podule indicator LEDs 5 Logic interface connector 10 Backing port Figure 2 EXT255DX dimensions mm m O I 2 O gt r gt gt 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 2 3 Vent gas specification and vent control data Although the pump may be vented to atmosphere high relative humidity of the air may greatly increase the subsequent pump down time To reduce pump down times you should vent with dry clean gases Refer to Section 3 8 for a description of the vent options and the vent valve connection and refer to Section 4 1 3 for configuring the venting options Vent gas specification and control Reference data Vent gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 um Maximum concentration of oil 0 1 parts per million Recommended time for rotational speed to gt 15 seconds reach 50 Maximum allowed rate of pressure rise Refer to Figure 3 Table 4 Vent gas specification and vent control Pa mbar 12x10 12x10 1x108 1x10 8x10 8 10 6x10 6x10 4x10 44107 2x10 2x10 0 0 0 50 100 150 200 250 300 350 Figure 3 Maximum allowed rate of pressure ri
98. table isolation device in the electrical supply Locate the switch in an easily accessible position and mark it as the disconnecting device for the DX pump If you do not you will not be able to switch off the DX pump in an emergency WARNING Incorporate a suitable fuse or current limiting device as specified in Section 2 8 in the 24V supply line to the DX pump If you do not and a fault develops the DX pump may develop a hazardous surface temperature or present a fire hazard WARNING Do not exceed the maximum supply voltage Excessive supply voltage will cause permanent damage to the control electronics and may result in a mechanical hazard in some failure conditions CAUTION When connecting the DX pump to the power supply ensure that all 3 pins for the 24 V connection and all 3 pins for the 0 V connection on your connector mating half are connected to the power supply Refer to Figure 8 for a schematic diagram of the logic interface connections The electrical supply you provide for the DX pump must meet the requirements of BS EN 61010 1 C22 2 1010 1 Ensure that hazardous voltages as defined in EN61010 cannot be present on the electrical interface to the DX pump Issue D a 29 20 06 06 2 gt r gt zi 2 3 6 Issue D pee ee 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps The DX pump OV is not referenced to earth ground Ensure that the electrical supply off
99. th the accessory 2 gt r gt zi 2 3 5 Electrical installation 3 5 1 Introduction WARNING You must make sure that the pump is electrically bonded to earth If you do not the system could become hazardous live in the event of a live conductor touching a metallic surface The electrical installation must be carried out by a suitably qualified person Always make the electrical connections to the DX pump after the pump has been installed on your vacuum system Earth the pump using the connection provided and refer to Section 3 5 2 You can operate the DX pump using the BOC Edwards TIC Turbo Instrument Controller or TIC Turbo Controller refer to Section 3 5 3 You can also control the DX pump using your own system refer to Section 3 5 4 for information about control and to Section 3 5 5 for instructions on how to connect your electrical supply 3 5 2 Earth ground connections We recommend that you fit a separate earth ground conductor to earth the DX pump Use an un insulated braid or a separate insulated green yellow conductor and use the M5 x 10 screw and shake proof washer supplied fitted to the earth hole on the pump to secure the earth conductor to the pump The impedance between the pump body and the earth connection point must be lt 0 1 Q 3 5 3 Connect the logic interface to the TIC If you are using the BOC Edwards TIC Turbo Instrument Controller or TIC Turbo Controller to power and co
100. the pump and and calibration operation see whether the error code appears again If it does contact your supplier or BOC Edwards 3 ssLsss Failure to reach or maintain half full Check whether the pump is too speed within the timer setting hot or whether the inlet pressure value is too high 4 sssLss Overspeed or Overcurrent trip Cycle the power to the pump and activated see whether the error code appears again If it does contact your supplier or BOC Edwards 5 ssssLs Pump internal measurement Cycle the power to the pump and system disconnected or damaged see whether the error code appears again If it does contact your supplier or BOC Edwards 6 sssssL Serial enable becomes inactive Re activate Serial Enable and send following a Serial Start command a Serial Stop command to clear the error code Table 22 Flashing error codes Note The status LED error flash sequence is capable of signalling multiple fail conditions For example error flash code sLssLs signifies both error 2 Podule failed internal configuration and calibration operation and error 5 pump internal measurement system disconnected or damaged Issue D 20 06 06 ADNVNALNIVW X E 2 m 2 gt 2 O m 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps 5 5 2 Decoding system status words If you are using the serial communications link
101. the vacuum system use a full complement of bolts with the rotatable collar If the pump has an NW flange use the centring ring supplied with the pump and a metal NW clamp to connect the inlet flange of the pump to the vacuum system In this case you must fix the base of your pump to a firm support as described in Section 3 3 4 All inlet flange bolts must be re tightened once the system is under vacuum Ensure that no torques or other forces are transmitted to the pump from the vacuum system or the associated pipelines If necessary fit an inlet vibration isolator between the pump inlet and the vacuum system refer to Section 7 4 In this case you must fix the base of your pump to a firm support as described in Section 3 3 4 3 3 4 Base Mounting The base of the DX pump can be fixed to a firm support using the tapped fixing holes Refer to Figures 1 and 2 for fixing hole details Note For EXT75DX only the four screw in rubber feet must be removed from the four tapped fixing holes before the pump can be base mounted Issue D OO _ _ 26 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps We advise the following requirements should be met to ensure the pump remains secure in the event of a total pump seizure Support must withstand a destructive torque of 333Nm EXT75DX 620Nm EXT255DX Fixing screws To ISO898 1 strength class 12 9 nom tensile strength 1200MPa Screw engagement length
102. tions of how to use the parallel interface A system operating in pure parallel mode has no facility to adjust the configuration settings stored in the Podule for example power limit setting or controlled venting options This would place a restriction in that all these features would be at their factory default settings However the Podule could be configured separately before fitting the DX pump to the system This is covered in more detail in Section 1 5 5 Full serial control The serial communications link provides complete control and monitoring using just three signal lines The Serial data RX and TX use the same connector pins as the parallel signals Standby and Fail respectively The Serial Enable signal MUST be linked to OV for the system to accept commands in Serial control mode This is a safety feature and acts as an interlock In addition the parallel Start signal must be left unconnected for Serial commands to be accepted in full Serial control mode The Podule will still provide the Normal and Analogue signals on the logic interface connector even when operating in full Serial control mode The status of the Normal signal can also be obtained by interrogating the system status via the Serial interface For more information about the Serial interface refer to Section 3 7 1 5 3 1 5 4 1 5 5 Issue D M47 BOC EDWARDS EXT Compound Turbomolecular Pumps Serial control with parallel monitoring Since Normal an
103. tomatically control a vent valve there are a number of varied venting options you can choose from refer to Table 16 To set a vent option send the following command where the character d refers to the option number shown in Table 16 Command l S 8 5 3 sp d cr The reply you receive will be in the following format Reply 5 8 5 3 sp r cr The Venting Option is now stored in memory within the DX pump Issue D 44 Ee 20 06 06 Issue D M77 BOC EDWARDS EXT Compound Turbomolecular Pumps To check what Venting Option is set you can send a query as follows Command 8 5 3 cr The reply you receive will be in the following format Reply 8 5 3 sp d cr Standby speed setting The pump can be run at Standby Speed rather than full rotational speed The Standby Speed is a user configurable option and can be set to any value between 55 and 100 full rotational speed When you receive the pump it will be configured with a standby speed of 70 full rotational speed NOILVYJdO To change the Standby Speed setting send the following command where the characters d represent the value as a percentage of full rotational speed Command The reply you receive will be in the following format Reply 8 5 7 sp r cr
104. trol mode The Analogue Output voltages are described in Table 7 4 7 Operation with a TIC For operation with a BOC Edwards Turbo Instrument Controller or TIC Turbo Controller the DX pump can be connected directly to this type of unit which will provide the power necessary to drive the DX pump Instructions on the set up and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397 00 879 which is supplied with the TIC or TIC Turbo Controller 0 m gt 2 4 8 Decelerating and venting Immediately after applying the stop command whether by the parallel or serial interface or by the TIC switch off the backing pump Then vent the pump in accordance with the advice given in Section 3 8 CAUTION Do not open a manual vent valve until the pump rotational speed has fallen below 50 otherwise the rate of pressure rise may be too high which could damage the pump In an emergency only open the vent valve quickly to decelerate the pump rotor in the shortest possible time Note If you are using the Podule to control a TAV solenoid valve there is a 2 second delay between either a Stop command being received or a fault condition being detected and the vent valve opening This delay allows time for gauges valves and other equipment to be switched off before venting occurs The green indicator LED on the Podule will extinguish as rotational speed drops below Normal speed At very low speeds
105. umps comply with EN61010 1 2001 when installed in accordance with the instruction manual supplied following the provisions of 73 023 EEC Low Voltage Directive 89 336 EEC Electromagnetic Compatibility Directive 98 37 EC Machinery Safety Directive G2 C s amp Zia Mo Zeoc Burgess Hill B D Brewster Technical Manager Date and Place Burgess Hill Products This product has been manufactured under a quality system registered to 1509001 0207 BOC EDWARDS P200 01 600 Issue A djd 0293 M47 BOC EDWARDS EXT Compound Turbomolecular Pumps CONTENTS Section 1 INTRODUCTION 1 1 Scope and definitions 1 2 General description 1 3 Drive electronics 1 4 Operational features 1 4 1 Power limit setting 1 4 2 Standby speed 1 4 3 Timer 1 4 4 Analogue output 1 4 5 Automatic vent options 1 4 6 Normal speed setting 1 4 7 Electronic braking 1 5 Logic interface 1 5 1 Parallel control and monitoring 1 5 2 Full serial control 1 5 3 Serial control with parallel monitoring 1 5 4 Parallel control with occasional serial monitoring or serial set up 1 5 5 Podule configuration serial set up 2 TECHNICAL DATA 2 1 General 2 2 Pumping media 2 3 Vent gas specification and vent control data 2 4 Purge gas specification 2 5 Cooling water 2 6 Materials exposed to gases pumped 2 7 Electrical data 2 8 Logic interface connector 2 9 Podule connector socket 2 10 Indicator LEDs 2 11 Operating and storage environment Issu
106. up to 12 V d c On 0 8 V d c sinking 20 mA Rating 20 mA to 0 V 20 mA to 0 V FAIL status output Type Open collector transistor Open collector transistor Fail Off 3 3 pull up to 12 V d c Off 3 3 pull up to 12 V d c OK On 0 1 V d c sinking 1 7 mA On 0 1 V d c sinking 1 7 mA 0 8 V d c sinking 20 mA 0 8 V d c sinking 20 mA Rating 20 mA to 0 V 20 mA to 0 V Table 7 Logic interface technical data Mating half of connector not supplied Issue D 20 06 06 M47 BOC EDWARDS EXT Compound Turbomolecular Pumps 2 9 Podule connector socket The DX pump has a 2 way Podule Connector Socket in the top of the Podule When you receive the pump this connector will be concealed by a black protective cover If you intend to use the connector this cover should be removed by levering with a small screwdriver The mating plug for this connector is supplied with the pump The connector is intended to drive a vent valve or fan connected to the two pins The connector mating plug is shown in Figure 4 with the polarity of the pins marked when the vent valve fan is energised The podule connector plug is available as an accessory see Section 7 4 m O I 2 O gt r gt gt 0547 1 Negative terminal 2 Positive terminal Figure 4 Podule connector plug Pin Number Signal Polarity Use 2 0 V Control reference 0 V reference for a
107. you will be able to access further information that may be useful for fault finding When you send a query to monitor measured motor speed the pump also returns a System Status Word The send command is as follows Command 8 5 2 You will receive the following reply where the first returned number refers to motor rotational speed in revolutions per second Hz Reply 8 5 2 d d d h h h h lh Ih le The System Status Word returned is made up of 8 hexadecimal digits To decode this word you must convert each digit into a 4 digit binary number Table 23 is provided as an aid Follow the example below 2 2 8 3 0 0 2 2 y V V V V Vy V V 001000 1 1000 1100000000001 0001 0 Hexadecimal Binary Decimal 0 0000 0 1 0001 1 2 0010 2 3 0011 3 4 0100 4 5 0101 5 6 0110 6 7 0111 7 8 1000 8 9 1001 9 A 1010 10 B 1011 11 1100 12 1101 13 1110 14 F 1111 15 Table 23 Hexadecimal conversion table Issue D M L 22 64 ss 20 06 06 M BOC EDWARDS EXT Compound Turbomolecular Pumps Each binary digit bit represents a flag that is either active state 1 or not active state 0 To help decode the System Status Word each bit is numbered starting with 0 for the least significant to 31 for the most significant as shown below Table 24 contains a list of the lower 16 status flags that will be useful for fault finding The upper 16 status flags are reserved by BOC Edwards Binary digits 00 1 0 0 0
108. you will see the yellow indicator LED flashing it will extinguish when the pump has stopped The deceleration time can be improved by using the Electronic Braking feature refer to Section 4 5 4 4 9 Operation at extreme conditions 4 9 4 Operation with high inlet pressure If the DX pump inlet pressure rises the power supplied to the pump motor will increase to counteract the gas frictional load The pump rotational speed will remain constant until the peak power level is reached beyond this level the speed of the pump will start to reduce If the pump speed falls to below 50 of full rotational speed the Timer will start if it is enabled If the speed does not recover to above 5076 speed before the timeout period expires the pump will shut down and display a Fail signal If the Timer is disabled the pump will immediately shutdown and display a Fail signal if the speed drops below 5076 of full rotational speed Refer to Section 2 7 for the maximum power delivered to the pump and to Table 3 for maximum allowable inlet pressure Issue D O 5 54 ee 20 06 06 4 9 2 4 9 3 4 9 4 Issue D 4 7 BOC EDWARDS EXT Compound Turbomolecular Pumps Operation at high temperatures Temperature sensors within the pump mechanism and electronics are monitored by an internal system If the system detects that any internal temperatures are too high the power supplied to the pump motor is reduced the pump may not therefore

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