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TV 801 Navigator Bolted Flange

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1. Interconnections The following figure shows the TV 801 Bolted Flange interconnections ENT EXTERNAL F ERIAL LINE Figure 7 P3 Vent ZZM ELD E LE Figure 8 This is a dedicated 24 Vdc connector to control the optional vent valve TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 217 248 17 Technical Information P4 External Fan Figure 9 This is a dedicated 24 Vdc connector to supply the optional external fan A shielded cable with ferrite is shipped with the controller see picture The faston contact has to be connected on the front panel in order to reduce noise and accomplish the EMC rules J1 In Out Figure 10 This connector carries all the input and output signals to remote control the TV 801 Navigator Bolted Flange 218 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics and use Tab 3 PIN N SIGNAL NAME INPUT OUTPUT 1 START STOP IN 2 START STOP IN 3 INTERLOCK IN E oe 5 SPEED SETTING IN 6 SPEED SETTING IN Ss m 8 SOFT START IN 9 424 Vdc OUT s cai 11 PROGRAMMABLE SET POINT OUT 12 RELAY CONTACT NORMALLY OPEN OUT M Te
2. When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 231 248 17 Technical Information Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 6 Type Length Value Description After a read instruction of a Logic 1 byte NA logic window After a read instruction of a Numeric 6 bytes n numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window The command execution has tia 0x6 been successfully completed NACK The command execution has Unknown Window Data Type Error Win Disabled 232 248 been failed The specified window in the command is not a valid window The data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window The value expressed during a write command is out of the range value of the specified window The specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Examples Command START Source PC Destinatio
3. CUIDADO As mensagens de cuidado s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informac es importantes destacadas do texto Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescric es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de O a 95 n o condensante a ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedic o 66 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de Istruc es 5 Hub Se por uma raz o qualquer o periodo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Agilent Preparac o para a instalac o O TV 801 Navigator Bolted Flange fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remoc o da embalagem tomar muito cuidado para n o deixar cair o controller e par
4. 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 219 248 17 Technical Information RELAY CONTACT This relay output signal is enabled when the reference quantity chosen frequency current time is higher than the set threshold The signal can be normally open it will close the circuit when activated or normally close The factory default setting are Frequency 582 Hz 90 of the max rotational frequency a Hysteresis 2 a Activation type normally open a Delay time 0 sec These setting can be changed by serial interfaces see windows meaning table windows 101 to 105 The same settings are used by the programmable set point SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 ampitude 24 V max a duty cycle range from 25
5. k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin lammitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia 130 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Ohjekasikirja 10 HUOMIO V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite MACIAS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell TV 801 Navigator Bolted Flangein k ynnistys ja k ytt TV 801 Navigator Bolted Flangein k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Pumpun ensimm inen k ynnistys tapahtuu Soft Start menetelm ll joka inaktiv
6. 162 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod k Pouziti 13 POZOR Pokud dojde z jak hokoli d vodu k piekro eni skladovac Ih ty vyv vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v vev firmy Agilent Pr prava k instalaci Vyv va TV 801 Navigator Bolted Flange se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky poSkozeni k n muz mohlo doj t b hem prepravy kontaktujte va i mistni prodejn pobo ku Pri vybalov n d vejte pozor aby zarizeni nespadlo a chra te jej pred v emi nenad l mi n razy otfesy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l Ize 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s odply ovanim nepou vejte hol ruce pii manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu Postava 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 163 248 13 N vod k Pou it Pred p ipojen m turbomolekularni v vevy do syst mu nesund vejte adhezni a ochrann v ko Instalace Pred p ipojen m turbomolekularni vyv vy do syst mu nesund vejte adhezni a ochrann v ko 164 248 Toto za zen instalujte pouze v m stnosti a v dn m p pad vyv vu nepou vejte v prost ed s atm
7. feltillst nd Att st nga av TV 801 Navigator Bolted Flange Om du vill st nga av TV 801 Navigator Bolted Flange beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion VARNING F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd pa internationell niva Anvand sladden och kontakten tillsammans med en jordad anslutning for att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av controller enheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten Nodstopp Dra ut elsladden fran styrenheten for att utf ra ett n dstopp av TV 801 Navigator Bolted Flange 108 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Underhall Bruksanvisning 8 TV 801 Navigator Bolted Flange r underhallsfritt Allt servicearbete maste utf ras av auktoriserad personal Innan nagot arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur ar l gre an 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ersatta systemet med et
8. 7 Istruktionsbog FORSIGTIG TV 801 Navigator Bolted Flange h rer til den anden installationsklasse eller overspendingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 801 Navigator Bolted Flange er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opna adgang til de spendingsforende dele Kontroll r at anordningen der er tilsluttet TV 801 Navigator Bolted Flange har en passende isolering Dette gelder ogs i tilfeelde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet bor samtlige elektriske og pneumatiske tilslutninger udf res I forbindelse med opvarmning af vakuumkammeret ma indl bsflangens temperatur ikke overstige 120 C ADVARSEL Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer 94 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D FORSIGTIG Istruktionsbog 7 Undg
9. Teknisk Information for yderligere oplysninger TV 801 Navigator Bolted Flange skal tilsluttes en hovedpumpe se skemaet Teknisk Information 92 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruktionsbog 7 Fastgorelse af pumpe Hvis rotoren beskadiges kan forbindelsen mellem pumpen og systemet blive udsat for et kraftigt drejemoment Hvis forbindelsen ikke er tilstr kkelig til at modsta dette drejemoment kan pumpen rive sig los fra systemet eller motoren kan rive sig los fra pumpens bekl dning I dette tilf lde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medf re alvorlige kv stelser eller d dsfald og eller materiel beskadigelse af apparaterne i n rheden Mont r TV 801 Navigator Bolted Flange i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8 900 Nm omkring dens egen akse Denne Bolted Flange kan for eksempel fastg res med skruer af h jstyrkest l klasse h jere end 8 8 P nedenst ende oversigt vises hvor mange skruer der kr ves samt hvilket sp ndingssmoment de skal strammes ved Tab 7 LANGE ANT DREJNINGS MOMENT 160 Bolted 8 5Nm TV 801 Navigator Bolted Flange kan installeres i en hvilken som helst position Navigator TV 801 ISO F kan ikke fastg res i fundamentet TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 93 248
10. energie A 174234180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence zran n obsluhy 160 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D N vod k Pou it 13 V eobecn informace Toto zarizeni je ur eno pro odborn ky U ivatel by si m l pred pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v pr slusnych st tn ch norm ch Vyv va TV 801 Navigator Bolted Flange se Sroubovanou prirubou je integrovan syst m s turbomolekul rn vyv vou a pr slu n m regulatorem pro takov aplikace kde se poZaduje vysok a ultravysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 38000 ot min poh n n vysoce v konn m trojf zov m elektromotorem V v va TV 801 Navigator Bolted Flange se roubovanou p rubou neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum Je vybavena p davn mi konektory pro p ipojen p davn ho ventil toru
11. remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand Afzetten van de TV 801 Navigator Bolted Flange Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden aan het systeem uit te voeren 84 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bedrijfshandleiding 6 Noodstop Om de TV 801 Navigator Bolted Flange in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden Onderhoud De TV 801 Navigator Bolted Flange is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervla
12. sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Start og anvendelse af TV 801 Navigator Bolted Flange For at starte TV 801 ISO F er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Pumpen startes f rste gang ved hj lp af SOFT START metoden N r startprocessen er afsluttet frakobles denne funktion automatisk med hensyn til alle efterf lgende aktiveringer af pumpen der vil ske uden SOFT START metoden For at aktivere SOFT START metoden p ny skal ovenn vnte m de programmeres ved hj lp af software se afsnit RS 232 COMMUNICATION DESCRIPTION i bilaget Teknisk Information Den gr nne LED LDI der er anbragt p panelet p TV 801 I
13. ter sruuveilla lujuusluokka yli 8 8 Seuraavassa taulukossa esitet n vaadittu ruuvim r ja vastaava v nt momentti Tab 1 LAIPPA M R KIRISTYS MOMENTTI 160 Bolted 8 5 Nm TV 801 Navigator Bolted Flange voidaan asentaa mihin tahansa asentoon TV 801 Navigator Bolted Flangeia ei voida kiinnitt perustansa kautta TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 129 248 10 Ohjek sikirja TV 801 Navigator Bolted Flange kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset TV 801 Navigator Bolted Flange laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett TV 801 Navigator Bolted Flange laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla K ytt Ks Technical Information liitett lis varusteiden asentamista varten T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 Citta VAROITUS lk
14. za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C 180 248 V pripade poruchy zariadenia vyhladajte kontaktn stredisko spolo nosti Agilent kde vam pokazeny syst m vymenia TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod na Obsluhu 14 Sk r nez syst m odoSlete na opravu alebo vymenu musite vyplnit dotaznik Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja Si JA TV 801 Navigator Bolted Flange User Manual 87 900
15. Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TV 801 Navigator Bolted Flange ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 38 000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell TV 801 Navigator Bolted Flange enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r Anwendungen die ein sauberes Vakuum erfordern Modell TV 801 Navigator Bolted Flange verf gt des weiteren ber Zusatzanschl sse ber die ein zus tzlicher Ventilator versorgt das Entl ftungsventil gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Absch
16. Technical Information Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Unnga stat svingninger eller plutselige bevegelser av turbinpumpen nar den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information 118 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instruksjon Manual 9 OKA N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpen skal ikke brukes i eksplosjonsfarlige milj er Starte og bruke TV 801 Navigator Bolted Flange TV 801 ISO F startes ved sette str mkabelen i veggkontakten Den innebygde styreenheten kjenner
17. for udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstreekkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TV 801 Navigator Bolted Flange systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 38000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt TV 801 Navigator Bolted Flange er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum TV 801 Navigator Bolted Flange har endvidere hj lpestik der g r det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 89 248 7 Istruktionsbog I brugsanvisningen anvendes folgende standardrubrikk
18. podstawe UWAGA TV 801 Navigator Bolted Flange nalezy do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego tez podtaczy urzadzenie do linii zasilania kt ra spetni te wymogi TV 801 Navigator Bolted Flange posiada konektory wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna cz znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si e izolacja pod czonego urz dzenia do TV 801 NAVIGATOR BOLTED FLANGENavigator posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 U ytkowanie W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 120 C 154 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Podrecznik Instrukcji 12 ZAGRO ENIE Nie nale y nigdy uruchomi pompe w przypadku kiedy kotnierz wej ciowy nie jest podtaczony do komory lub nie jest zamkniety z kotnierzem zamkniecia Nie dotyka turbopompy i jej ewentualnych akcesoriow podczas operacji nagrzewania Wysoka temperatura moze spowodowa uszkodzenia ciata na osobach Unika uderze waha lub gwa townych przesuni
19. porttal hogy lehet v tegy k k z mb s g z pl N2 Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k 142 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Felhaszn l i K zik nyv 11 Amikor a szivatty t m rgez gy l kony vagy radioakt v g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben A TV 801 Navigator Bolted Flange bekapcsol sa s haszn lata A TV 801 Navigator Bolted Flange bekapcsol s hoz biztos tani kell a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t Az els szivatty ind t s l gy ind t s m dban t rt nik Amikor az ind t si ciklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s m d n lk l t rt nnek A l gy ind t s m d jb li enged lyez s hez azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 KOMMUNIK CI LE R SA a M szaki inform ci f ggel kben A TV 801 Navigator Bolted Flange en elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit a nem villog sn l a szivatty rendesen forog a lassan villog kb 400 ms peri dus a
20. ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A TV 801 Navigator Bolted Flange nek olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg r la hogy a TV 801 Navigator Bolted Flange hez csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot Soha ne haszn lja a turb szivatty t amikor a bemeneti karima nincs csatlakoztatva a vakuumkamrahoz Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben Magas h m rs klet g st okozhat TAV Ker lje a szivatty t s t razasat vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges
21. stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down 204 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instructions for Use 16 Before returning the system to the constructor for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping If a system is to be scrapped it must be disposed of in accordance with the specific national standards Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and we of sale N AN EY X M TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 205 248 16 Ins
22. ttelse af afhentnings og bortskaffelsesprocessen efter ngje at have kontrolleret betingelserne i salgskontrakten N x AN TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar100 Allman information 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fastsattning av pump 105 Anvandning 106 Start och anvandning av TV 801 Navigator Bolted Flange Att stanga av TV 801 Navigator Bolted Flange 108 N dstopp 108 Underh ll 109 Bortskaffande 110 Oversattning av originalinstruktionerna E Agilent Technologies 99 248 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 100 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bruksanvisning 8 Allman information Utrustningen r avsedd f r yrkesm ssig anv
23. 126 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Ohjekasikirja 10 Jos varastointiaika on jostain syysta pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta Valmistelut asennusta varten TV 801 Navigator Bolted Flange toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 801 Navigator Bolted Flangein putoamista tai siihen kohdistuvia iskuja tai t rindit Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierrattaa kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta Kuva 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 127 248 10 Ohjek sikirja TV 801 Navigator Bolted Flange ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Asenna laite ainoastaan suljettuun tila
24. 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod na Obsluhu 14 Upevnenie vyvevy Ak sa objavi chyba rotora pripojenie vyvevy k systemu bude vystaven siln mu to iv mu momentu Ak pripojenie nie je dostato ne pevn aby to iv mu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v vevy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti kovov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite zariadenie TV 801 Navigator Bolted Flange do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k protipr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8900 Nm okolo vlastnej osi Napr klad toto zariadenie Bolted Flange sa m e upevni pomocou ve mi pevn ch oce ov ch skrutiek trieda vy ia ne 8 8 Nasleduj ca tabu ka uv dza potrebn po et skrutiek a relevantn stanoven to iv moment Tab 1 PR RUBA PO ET STANOVEN TO IV MOMENT 160 skrutkovacia 8 5 Nm Turbov veva s pr rubou ConFlat mus by pripojen k v kuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 801 Navigator Bolted Flange m e by nain talovan v ubovo nej polohe Zariadenie TV 801 Navigator Bolted Flange sa nem e upevni pomocou vlastnej z kladne
25. 980 01 D 181 248 14 N vod na Obsluhu Likvid cia 182 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 15 Prirocnik za Navodila Varnostna navodila za Turbomolekularne rpalke 184 Splosne informacije 185 Shranjevanje 186 Priprava za montazo 187 Montaza 188 Pritrjevanje rpalke 189 Uporaba 190 Vklop in uporaba naprave TV 801 Navigator Bolted Flange 191 Izklop naprave TV 801 Navigator Bolted Flange 191 Zaustavitev v sili 192 Vzdr evanje 192 Odlaganje opadkov 193 Prevod navodil v izvirniku Ee Agilent Technologies 183 248 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 184 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Priro nik za Navodila 15 Splosne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent
26. E Controller 15 O8 fis 08 d go 24 V 3 1 Figure 17 Typical output connection The following figure shows a typical output connection to a relay coil ILLE Eh Figure 18 Output to a relay coil TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 227 248 17 Technical Information P2 Serial 228 248 Figure 19 Output to a relay coil This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 801 Navigator Bolted Flange Tab 4 PIN N SIGNAL NAME 1 5V OUT E 2 TX RS232 E 3 RX RS232 4 apa A RS422 optional GND 6 A RS485 E 2 0 B RS422 optional 8 B RS485 E 9g RESERVED Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the Navigation software is available optional TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 Procedure to Connect the Serial and 1 0 Ports to an External Cable In the following picture it has showed the right procedure to connect a cable to the I O or to the serial port A shielded cable has to be utilized Remove the plastic protection on both the ends of the cable picture b and after it is necessary to connect the wires to the single pins like showed in the picture c Take care to have a good contact between
27. Emerg ncia Para parar o TV 801 Navigator Bolted Flange em condic es de emerg ncia necess rio desligar do controller o cabo de alimentac o Manutenc o O TV 801 Navigator Bolted Flange n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado Antes de executar qualquer operac o no sistema deslig lo da alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servico de assist ncia Agilent ou do Agilent advanced exchange service que permite obter um sistema regenerado que substitua a bomba com defeito Antes de reenviar ao fabricante um sistema para as reparac es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguranca e Sa de anexa ao presente manual de instruc es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser destru da proceder sua eliminac o respeitando as normas nacionais espec ficas TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 73 248 5 Manual de Istruc es Eliminacao Significado do log tipo WEEE presente nos r tulos O simbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para o
28. NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
29. OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable
30. Tuto Sroubovanou prirubu lze pripevnit napf vysokopevnostn mi ocelovymi Srouby tfidy vy ne 8 8 Nasledujici tabulka uv d nezbytny pocet Sroubt a pr slusny utahovac moment Tab 1 PR RUBA POCET UTAHOVAC MOMENT 160 Bolted 8 5 Nm Turbomolekul rn vyv va se vstupni p rubou ConFlat se musi pripevnit k vakuov komofe pou it m pr slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v va TV 801 Navigator Bolted Flange se roubovanou p rubou se m e instalovat v libovoln poloze V v vu TV 801 Navig tor se roubovanou pr rubou nelze p ipev ovat vyu it m jej z kladny TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 165 248 13 N vod k Pou it Podle sm rnice EN 61010 1 pat v v va TV 801 Navigator Bolted Flange do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 801 Navigator Bolted Flange je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Zajist te aby izolace za zen p ipojen ho k v v v TV 801 Navigator Bolted Flange byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Pou it Tento odstavec popisuje podrobnosti z kladn ch pracovn ch p
31. Unii Europejskiej oznacza e wyr b nim oznaczony nie mo e by przetworzony jako odpad razem z innymi domowymi lub przemys owymi odpadami lecz musi by sk adowany w miejscu przeznaczonym dla odpad w do przer bki zr nicowanej Zaleca si u ytkownikowi po uprzednim sprawdzeniu terminu i warunk w zawartych w umowie sprzeda y nawi za kontakt z dostawc lub sprzedawc w celu uruchomienia procesu zbi rki i przerobu NES wa JA 4 DL TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 13 Navod k Pouziti Bezpe nostni navod pro Turbomolekularni vyv vy 160 VSeobecn informace 161 Uskladn ni 162 Priprava k instalaci 163 Instalace 164 Upevn ni vyv vy 165 Pouziti 166 Zapnut a pou v n v v vy TV 801 Navigator Bolted Flange 167 Vypnuti vyv vy TV 801 Navigator Bolted Flangese roubovanou pfirubou 167 Nouzov zastaveni 168 dr ba 168 Likvidace 169 Preklad originalniho navodu Agilent Technologies 159 248 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v vevy Turbomolekul rn vyv vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V pripad syst mov nefuk nosti napf kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n
32. ZAGROZENIE W przypadku uszkodzenia na wirniku potaczenie miedzy pompa a systemem moze by poddane odpowiednio wysokiemu momentowi Jezeli potaczenie jest niewystarczajace aby wytrzymac dany moment pompa moze sie odczepi od systemu lub silnik mo e odczepi sie od obudowy pompy W takim przypadku fragmenty metalu moga by wyrzucone przez pompe lub przez system i moga one spowodowa powazne uszkodzenia lub mier osob jak i uszkodzi aparature znajdujaca sie w poblizu systemu Zamocowa TV 801 Navigator Bolted Flange w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu dokr caj c w taki spos b aby po czenie to wytrzyma o moment 8900 Nm wok w asnej osi Na przyk ad ta Bolted Flange mo e by zamocowana rubami stalowymi o du ej wytrzyma o ci powy ej klasy 8 8 Niniejsza tabela opisuje ilo potrzebnych rub i na jaki moment je dokr ci Tab 1 KO NIERZ Nr MOMENT DOKR CENIA 160 Bolted 8 5Nm Turbopompa z ko nierzem wej ciowym ConFlat musi by zamocowana do komory pr niowej poprzez odpowiedni hardware Agilent Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information TV 801 Navigator Bolted Flange mo e by zainstalowany w jakiejkolwiek pozycji TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 153 248 12 Podrecznik Instrukcji TV 801 Navigator Bolted Flange nie moze by zamocowany poprzez wtasna
33. a with no flashing the pump is normally rotating a slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status a fast flashing period of about 200 ms error condition TV 801 Navigator Bolted Flange Switching off To switch off the TV 801 Navigator Bolted Flange it is necessary to remove the mains The integrated controller immediately stops the pump TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 203 248 16 Instructions for Use WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the TV 801 Navigator Bolted Flange in an emergency condition it is necessary to remove the supply cable from the mains plug Maintenance The TV 801 Navigator Bolted Flange does not require any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has
34. automatisk igjen blokkerings og startsignaler og starter pumpen F rste igangsetting av pumpen skjer med MYK START som etter denne f rste igangsettingssyklusen desaktiveres slik at etterf lgende igangsettinger skjer uten MYK START For oppn en MYK START igjen er det n dvendig tilbakestille modusen via software se avsnittet RS 232 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p TV 801 ISO F basepanel angir systemets funksjon ved hjelp av blink a den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock a den blinker hurtig ca hver 200 ms feiltilstand TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 119 248 9 Instruksjon Manual Stoppe TV 801 Navigator Bolted Flange TV 801 Navigator Bolted Flange stoppes ved kople det fra str mforsyningen Den innebygde styreenheten stanser pumpen umiddelbart EVES Turbo V styreenheten m forsynes med en 3 tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r ma
35. be strictly followed 196 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TV 801 Navigator Bolted Flange is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 38000 rpm driven by a high performance 3 phase electric motor The TV 801 Navigator Bolted Flange is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of th
36. blikanie interval asi 400 ms syst m je v niektorom z t chto stavov st panie klesanie brzdenie Stop alebo Cakanie na spojenie r chle blikanie interval asi 200 ms chybov stav Vypnutie zariadenia TV 801 Navigator Bolted Flange Ak chcete vypn zariadenie TV 801 Navigator Bolted Flange mus te ho odpoji od zdroja nap jania Zabudovan kontroln modul v vevu okam ite zastav TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 179 248 14 N vod na Obsluhu NEBEZPECIE Z d vodu bezpe nosti obsluhuj ceho pracovn ka mus byt kontroln zariadenie nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smr Prv ne za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie dr ba Ak chcete zariadenie TV 801 Navigator Bolted Flange okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania Zariadenie TV 801 Navigator Bolted Flange nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE IE Sk r ne
37. contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata ASUI Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruzioni per l uso 1 Informazioni generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TV 801 Navigator Bolted Flange un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 38000 giri min max mossa da un motore elettrico trifase ad alto rendimento Il TV 801 Navigator Bolted Flange totalmente privo di agenti contaminanti
38. de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 801 Navigator Bolted Flange deve ser ligado a uma bomba prim ria consultar esquema em Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de Istruc es 5 Fixac o da bomba Em caso de dano no rotor a ligac o entre a bomba e o sistema corre o risco de sofrer um torque muito grande Se a ligac o n o resistir de maneira suficiente ao referido torque a bomba pode soltar se do sistema ou o motor pode soltar se do inv lucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os equipamentos adjacentes Colocar o TV 801 Navigator Bolted Flange em posic o est vel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma ligac o que resista a um torque de 8900 Nm a volta do seu eixo Por exemplo esta Bolted Flange pode ser fixada com parafusos de aco de alta resistencia classe maior que 8 8 A tabela seguinte descreve o n mero de parafusos necess rios e o torque de aperto com o qual apert los Tab 5 FLANGE N TORQUE DE APERTO 160 Bolted 8 5 Nm O TV 801 Navigator Bolted Flange pode ser instalado em qualquer posic o O TV 801 ISO F n o pode ser fixado atrav s da sua base
39. ed quindi adatto per applicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiuntivo comandare la valvola di vent pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 17 248 1 Istruzioni per l uso Questo manuale utilizza le seguenti convenzioni NIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE I messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni al apparecchiatura Le note contengono informazioni importanti estrapolate dal testo immagazzinamento 18 248 Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C a umidit r
40. enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de TV 801 Navigator Bolted Flange goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Gebruik Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen WAARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken 82 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D VOORZICHTIG Bedrijfshandleiding 6 Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een st
41. faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der a son limination conform ment aux r glementations nationales concernant la gestion des d chets TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 49 248 3 Mode d emploi Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un systeme de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut 50 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 U
42. fournir la tension d alimentation Le contr leur incorpor reconnait automatiquement la pr sence de signaux d interlock et de d marrage et il actionne la pompe La premi re mise en marche de la pompe se fait en mode Soft Start Au terme du cycle de d marrage ce mode se d sactive automatiquement et les mises en marche suivantes se font sans le passage Soft Start Pour obtenir 4 nouveau une mise en marche Soft Start il faut r activer ce mode op ratoire 4 l aide du logiciel Cf paragraphe RS232 COMMUNICATION DESCRIPTION dans l appendice Technical Information La LED verte LD1 plac e sur le panneau de la base du TV 801 ISO F indique par sa fr quence de clignotement les conditions op rationnelles du systeme TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 47 248 3 Mode d emploi allum e fixe la pompe est en rotation normale a clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p diode d environ 200 ms condition d erreur Arr t du TV 801 Navigator Bolted Flange Pour arr ter le TV 801 Navigator Bolted Flange il suffit de retirer la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe ARS AU Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par 48 248 un c ble d alimentation 3 fils voir le tableau des parties qui peuv
43. inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information 202 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instructions for Use 16 WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases Switching on and Use of TV 801 Navigator Bolted Flange To switch on the TV 801 Navigator Bolted Flange it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump The first pump start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start mode it must be activated by the suitable software command see the paragraph RS 232 485 COMMUNICATION DESCRIPTION in the appendix Technical Information The green LED located on the TV 801 Navigator Bolted Flange base front panel indicates with its flashing frequency the system operating conditions
44. informaciije iz besedila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil a Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij a temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti O do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja 186 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Priro nik za Navodila 15 Ce zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum Priprava za montazo TV 801 Navigator Bolted Flange je dobavljen v posebni za itni embalazi Ce je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte EmbalaZo zavrzite v skladu s pravili Material je moZno v celoti reciklirati in je v skladu z ECC direktivo 85 399 Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna izpostavljenost na okolje ne more poSkodovati naprave TV 801 Navigator Bolted Fla
45. intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione di quello guasto Prima di rispedire al costruttore un sistema per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 25 248 1 Istruzioni per l uso Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitor
46. kabel zasilania ze sterownika Konserwacja TV 801 Navigator Bolted Flange nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel Przed wykonaniem jakiejkolwiek interwencji na systemie nale y od czy go od zasilania otworzy odpowiedni zaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego systemu TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 157 248 12 Podrecznik Instrukcji Przed wysytka do konstruktora systemu do naprawy lub advanced exchange service nalezy obowiazkowo wypetni i przekaza do miejscowego biura sprzeda y karte Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wysy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy Przetworstwo odpadow 158 248 Obja nienie znajduj ce sie na etykiecie napisu WEEE U yty poni ej symbol jest zgodny z wymogiem zarz dzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach
47. kovinski delci iz rpalke ali sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo okoli ko opremo Namestite TV 801 Navigator Bolted Flang na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8900 Nm okoli osi Na primer to prirobnico lahko namestite z mo nimi jekllenimi vijaki razred vi ji od 8 8 Spodnja tabela prikazuje tevilo potrebnih vijakov in pripadajo i navor Tab 1 PRIROBNICA N NAVOR 160 Bolted 8 5Nm Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information TV 801 Navigator Bolted Flange lahko montirate v Stevilne pozicije Naprave TV 801 Navigator Bolted Flange ne morete fiksirati z njegovo lastno spodnjo ploskvijo TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 189 248 15 Priro nik za Navodila Po direktivi EN 61010 1 spada TV 801 Navigator Bolted Flange v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 801 Navigator Bolted Flange ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na TV 801 Navigator Bolted Flange prime
48. n cessaire de respecter les conditions environnementales suivantes a pression maxi 2 bar au dela de la pression atmosph rique temp rature de 10 C 45 C Cf graphique dans Technical Information humidit relative O 90 non condensante En pr sence de champs magn tiques la pompe doit tre prot g e a l aide d crans appropri s Pour tout autre renseignement se reporter a l opuscule Technical Information Le TV 801 Navigator Bolted Flange doit tre connect une pompe primaire Cf sch ma dans Technical Information 44 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Mode d emploi 3 Fixation de la pompe En cas d endommagement du rotor la connexion pompe systeme pourrait tre soumise a un couple tr s important Si la connexion n est pas en mesure de r sister au dit couple la pompe peut se d tacher du systeme ou le moteur de l enveloppe de la pompe Dans ce cas des morceaux de m tal peuvent tre expuls s par la pompe ou le systeme et entrainer des blessures graves voire la mort et ou endommager s rieusement les quipements environnants Fixer le TV 801 Navigator Bolted Flange de facon stable en assurant la collerette d entr e de la turbopompe a la contre collerette du syst me au moyen d une connexion en mesure de r sister un couple de 8900 Nm autour de son axe Par exemple cette flasque boulonn e peut tre fix e a l aide de vis en acier a
49. ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f lid av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala foreskrifter Systemet TV 801 Navigator Bolted Flange best r av en turbomolekylar pump for h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 38000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i TV 801 Navigator Bolted Flange som d rf r passar f r till mpningar som kr ver ett rent vakuum TV 801 Navigator Bolted Flange har dessutom en hj lpkontakt som gor det m jlig att forse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hjalp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01
50. of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TV 801 Navigator Bolted Flange can be installed in any position The TV 801 Navigator Bolted Flange cannot be fixed by means of its base TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 201 248 16 Instructions for Use The TV 801 Navigator Bolted Flange belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 801 Navigator Bolted Flange has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the TV 801 Navigator Bolted Flange is adequate even in the case of single fault as per directive EN 61010 1 Use This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or
51. om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 801 Navigator Bolted Flange inte tappas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd 3443 Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara hander p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd ROLLER EL SQ 3 Figur 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 n 103 248 8 Bruksanvisning Normal p verkan fr n omgivningen kan inte skada TV 801 Navigator Bolted Flange Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den Installation usara Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet Denna apparat f r endast installeras inomhus Den f r inte anv ndas i omr den med regn is sn damm fr tande gaser eller i omraden med h g explosions eller brandrisk F ljande krav p omgivningsf rh llanden g ller vid drift a maximitryck 2 bar over atmosf riskt tryck a temperatur fr n 10 C till 45 C a relativ luftfuktighet 0 90 utan kondens I narvaro av magnetfalt ska pumpen skyddas med en sarskild skarm Se bilagan Technical information f r ytterli
52. ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n t to v v vy Podrobn informace jsou uvedeny v p loze Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 161 248 13 N vod k Pou it Tento manu l pou v nasledujici standardn protokol Md IA UAH IM Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v pripad nedodr en mohly zp sobit v n raz POZOR V stra n hl en jsou uvedena pred postupy kter by v pripad nedodr en mohly po kodit zarizeni Pozn mky obsahuj d le it informace p evzat z textu Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr ovat n sleduj c pokyny a P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed a Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti O a 95 bez sr en turbomolekularni vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en
53. pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bedrijfshandleiding 6 vade e Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent Uitpakken De TV 801 Navigator Bolted Flange wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 801 Navigator Bolted Flange niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Na rate ill Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacuum in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming ROLLER MODEL SQ 3 Figuur 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 79 248 6 Bedrijfshandleiding De TV 801 Navigator Bolted Flange kan ni
54. ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 801 Navigator Bolted Flange y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada I ROLLER MODEL SQ Figura 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 55 248 4 Manual de istrucciones El TV 801 Navigator Bolted Flange no puede da arse permaneciendo simplemente expuesto a la atmosfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema 56 248 Este equipo debe ser instalado s lo en ambientes cerrados y en ninguna circunstancia podr utilizarse en ambientes expuestos a agentes atmosf ricos lluvia hielo nieve polvos gases agresivos ni en ambientes explosivos o sujetos a elevado riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xi
55. re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C a Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato 114 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instruksjon Manual 9 dua ae Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon Klargj re til installasjon TV 801 Navigator Bolted Flange leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 801 Navigator Bolted Flange pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse Serie Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Figur 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 115 248 9 Ins
56. rendszer emelked ben f kez sben ll s vagy kapcsolatra v r llapotban van gyorsan villog kb 200 ms peri dus hibafelt tel A TV 801 Navigator Bolted Flange kikapcsol sa A TV 801 Navigator Bolted Flange kikapcsol s hoz le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 143 248 11 Felhaszn l i K zik nyv A g pkezel biztons ga rdek ben a Turbo V vez rl egys get h romeres bet pk bellel kell ell tni l sd a megrendelhet alkatr szek t bl zat t ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Miel tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A TV 801 Navigator Bolted Flange v szhelyzetben val azonnali le ll t s hoz el kell t vol tani a tapkabelt a h l zati dugaszb l 144 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Felhaszn l i Kezik nyv 11 Karbantart s A TV 801 Navi
57. riska trycket F r pumpning av fr tande gaser ar dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kvave eller argon f r att skydda lagren se bilagan Technical Information VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser h r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Start och anv ndning av TV 801 Navigator Bolted Flange F r att starta TV 801 ISO F beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen Pumpens f rsta start sker i Mjukstart l get som i slutet av inledningscykeln sl s av automatiskt D refter sker pumpens inledningar utan funktionen Mjukstart F r att teraktivera Mjukstart m ste man terst lla ovann mnda l ge genom mjukvaran se stycket RS 232 COMMUNICATION DESCRIPTION i bilagan Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 107 248 8 Bruksanvisning Den gr na lysdioden LD1 p underdelen av TV 801 ISO F anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i lage for acceleration bromsning Stop eller Waiting for interlock a hastigt blinkande ungef r 200 ms
58. til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 118 Starte og bruke TV 801 Navigator Bolted Flange 119 Stoppe TV 801 Navigator Bolted Flange 120 Nodstopp 120 Vedlikehold 121 Elminering 122 Oversetting av den opprinnelige samsvarserkl ringen 83 Agilent Technologies 111 248 9 instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper Turbomolekyleer pumpene som er beskrevet i den felgende Bruksanvisningen har et hgyt kinetisk energiniva som skyldes den hoye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel pa grunn av en kontakt mellom rotor og stator eller brudd pa rotoren kan roteringsenergien bli frigitt UVA For unng skader p utsyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manaulen f lges n ye 112 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent f r utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TV 801 Navigator B
59. vorgesehen wird Gebrauch F r die Installation der Optionsteile siehe im Anhang Technical Information In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht berschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle hei e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr 34 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Gebrauchsanleitung 2 ETS hi W hrend des Betriebs sind Sto und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager beschadigt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioakti
60. 0 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 34 Wartung 37 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 5 248 Contents 6 248 Entsorgung 38 Mode d emploi 39 Normes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation pour l installation 43 Installation 44 Fixation de la pompe45 Utilization 46 Entretien 49 Mise au rebut 50 Manual de istrucciones 51 Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Mantenimiento 61 Eliminaci n 62 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Contents 5 Manual de Istruc es 63 Indicac es de Seguranca para Bombas Turbomoleculares 64 Informac es gerais 65 Armazenagem 66 Preparac o para a instalac o 67 Instalac o 68 Fixac o da bomba 69 Utilizac o 70 Manutenc o 73 Eliminac o 74 6 Bedrijfshandleiding 75 Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 82 Onderhoud 85 Afvalverwerking 86 7 Istruktionsbog 87 Sikkerhedsanvisninger for Molekyl re turbopumper 88 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 7 248 Contents 8 248 Generel Information 89 Opbevaring 90 Forberedelse f
61. 0 980 01 D 211 248 17 Technical Information Technical Specification Pumping speed with inlet screen Nz 680 I s He 810 l s Hz 850 l s Compression ratio Nz gt 1 x 109 He 5 x 107 Hz 2 x 106 Base pressure with lt 1x 10 10 mbar recommended 1 x 10 10 Torr forepump According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange ISO 160 F Foreline flange KF 25 Rotational speed 38000 rpm Start up time 4 minutes Recommended DS 402 TriScroll 300 forepump Operating position Any Operating ambient 10 C to 45 C temperature Bakeout 80 C at inlet flange max temperature Vibration level lt 0 01 um at inlet flange displacement Lubricant permanent lubrication Cooling Forced air 212 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Power supply Input voltage Input freg Max input power Stand by power Max operating power Compliance with Power cable Serial communication Navigator kit Installation category Pollution degree Storage temperature Weight kg Ibs Pump Controller TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 17 Technical Information 100 240 Vac 50 60 Hz 600 VA 30 to 35 W 450 W with forc
62. 2 Mocowanie pompy 153 Uzytkowanie 154 Konserwacja 157 Przetworstwo odpadow 158 Navod k Pouziti 159 Bezpe nostn n vod pro Turbomolekularni vyv vy 160 V eobecn informace 161 Uskladn n 162 P prava k instalaci 163 Instalace 164 Upevn ni vyv vy165 Pouziti 166 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Contents Udrzba 168 Likvidace 169 14 N vod na Obsluhu 171 Bezpe nostn n vod pre Turbomolekul rne v vevy 172 V eobecn inform cie 173 Uchov vanie 174 Pr prava na in tal ciu 175 In tal cia 176 Upevnenie v vevy 177 Pou itie 178 dr ba 180 Likvid cia 181 15 Priro nik za Navodila 183 Varnostna navodila za Turbomolekularne rpalke 184 Splo ne informacije 185 Shranjevanje 186 Priprava za monta o 187 Monta a 188 Pritrjevanje rpalke 189 Uporaba 190 Vzdrzevanje 192 Odlaganje opadkov 193 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 11 248 Contents 12 248 16 Instructions for Use 195 Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Maintenance 204 Disposal 205 17 Technical Information 207 Description of the TV 801 Navigator Bolted Flange209 Pump Description 210 Controller Description 211 Technical Specification 212 TV 801 Navigator Bolted Flange Outline 215 Interconnections 217 P3 Vent 217 P4 Exte
63. 8 17 Technical Information Connection of the Fore Vacuum Pump A flange KF 40 NW is available to connect the Turbo V 801 pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V801 pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming Connection to the Pump Figure 23 240 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 Also the pump cable is shielded and is equipped with ferrite see the following picture m T F F N E CT Figure 24 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KO resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 241 248 17 Tec
64. 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 980 001 01 D Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service
65. 95 500 595 Frequency Hz Figure 12 The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency a thereshold 582 Hz a hysteresis 2 a activation type high level a delay time 0 second The Navigator Software optional allows the operator to set all the programmable feature 222 248 When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND and 24 Vdc OUT see the following figure TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 Figure 13 How to Connect the Output Open Collector of the Controller Here below there are the typical connections of the open collector input of SQ 337 to an external system Two cases are considered a I the customer supplies the 24 Vdc a 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available TV 801 Navigator Bolted Flange User M
66. Bolted Flange User Manual 87 900 980 01 D Gebrauchsanleitung 2 Mi Falls die Lagerdauer aus verschiedentlichen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter Vor der Installation Modell TV 801 Navigator Bolted Flange wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 801 Navigator Bolted Flange ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz VORSICHT Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden CONTROLLER MODEL Abbildung 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 31 248 2 Gebrauchsanleitung Modell TV 801 Navigator Bolted Flange kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei AnschluB de
67. CRC Param PA PABXXXX where XXXX are variable 404 R A CRC parameter XXXX structure 500 Reserved to Agilent service 503 R W N RS 485 address 0 to 31 default 0 504 R W L Serial type select 0 RS 232 1 RS 485 default lt 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 21 Window N 206 Bit Description 238 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 Air Cooling Kit TV 801 Bolted Flange with Navigator Controller An air cooling kit mod 5214 NM is available to improve the TV 801 Bolted Flange cooling during heavy operational conditions Single fan specifications a air flow 187 m h input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 6 W To supply the fan it is necessary to connect the fan supply to the P4 connector of the controller with the special shielded cable included into the kit to reduce noises and to accomplish to EMC norms Figure 22 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 239 24
68. D 101 248 8 Bruksanvisning I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador sais Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Detta visar p viktig information i texten Forvaring Respektera f ljande anvisningar for att garantera optimal prestanda och drifts kerhet for Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 20 C till 70 C a Relativ fuktighet 0 till 95 utan kondens a Kunden ska alltid mjukstarta de turbomolekyl ra pumparna nar de mottas och s tts i drift for forsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet 102 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bruksanvisning 8 3443 Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information F rberedelser f r installationen TV 801 Navigator Bolted Flange levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret
69. F high vacuum flange The following pictures show the pump and the controller oosonassaan DDD Figure 2 Controller model SQ 337 Figure 3 Pump model 869 8933 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 209 248 17 Technical Information Pump Description 210 248 The pump consists of a high frequency motor driving a turbine fitted with 8 bladed stages and 4 Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block Proceeding from the high vacuum to the for vacuum region the turbine stages sequence is a Ist stage with a blade angle of 40 2nd stage with a blade angle of 34 a 8rd stage with a blade angle of 28 Ath and 5th stages with a blade angle of 24 6th stage with a blade angle of 20 7th and 8th stages with a blade angle of 16 The Macrotorr stages are in the form of four discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These a
70. Flange um sistema integrado constitu do por uma bomba turbomolecular para aplicac es de alto e ultra alto v cuo integrada no relativo controller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 88000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O TV 801 Navigator Bolted Flange totalmente isentos de agentes contaminadores e portanto adequado para aplicac es que requerem um v cuo limpo Al m disso o TV 801 Navigator Bolted Flange tem conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informac es necess rias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas sao fornecidas no ap ndice Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 65 248 5 Manual de Istru es Este manual utiliza as seguintes convenc es UNO As mensagens de aten o chamam a aten o do operador para um procedimento ou uma pr tica especifica que se n o efectuada correctamente pode provocar graves les es pessoais
71. Il TV 801 Navigator Bolted Flange non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere Installazione werd la Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema 20 248 Installare questo apparato solo in ambienti chiusi ed in ogni caso non utilizzarlo in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 10 C a 45 C umidit relativa 0 90 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli Il TV 801 Navigator Bolted Flange deve essere collegato ad una pompa primaria vedere schema in Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruzioni per l uso 1 Fissaggio della pompa Se si verifica un danno al rotore la connessione tra la pompa ed il sistema potrebbe essere sottoposta ad una coppia significativa Se la connessione non sufficiente per resi
72. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 900 980 01 D 04 2011 TV 801 Navigator Bolted Flange Pump model 869 8933 Controller model SQ 337 Instruksjon manual Ohjek sikirja Felhasznaloi kezik nyv Podrecznik instrukcji Navod k pouziti Navod na obsluhu Prirocnik za navodila User Manual E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 980 01 D Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilen
73. N DESCRIPTION w dodatku Technical Information Zielona dioda led znajdujaca sie na panelu podstawy TV 801 Navigator Bolted Flange wskazuje z cz stotliwo ci w asnego migania stan operacyjny systemu a za wiecona na sta e pompa znajduje si w normalnych obrotach miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock a miga szybko okres 200 ms stan b du Zatrzymanie TV 801 Navigator Bolted Flange Aby zatrzyma TV 801 Navigator Bolted Flange wystarczy odtaczy napiecie zasilania Wbudowany sterownik zatrzyma natychmiast pompe 156 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Podrecznik Instrukcji 12 ZAGRO ENIE Dla zagwarantowania bezpieczenstwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilajacym o 3 przewodach zobacz tabele cze ci dajacych sie zam wi i zamontowana wtyczka zgodna z miedzynarodowymi normami Kabel ten podtaczy wraz z wtyczka do kontaktu uziemionego celem unikniecia pora e pradem elektrycznym oraz spetnienia wymogow norm CE Du e sity wewnetrzne wytwarzajace sie w kontrolerze moga spowodowa powa ne uszkodzenia ciata lub mier Przed przeprowadzeniem czynno ci konserwacyjnych wewnatrz tego urzadzenia odtaczy kabel zasilajacy Zatrzymanie Alarmowe Aby zatrzyma w stanie awaryjno alarmowym TV 801 Navigator Bolted Flange nale y od czy
74. ROLLER MODEL S Posta 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 151 248 12 Podrecznik Instrukcji System TV 801 Navigator Bolted Flange nie moze by uszkodzony poprzez wystawienie go na dziatanie atmosfery Mimo to zaleca sie aby pompa do momentu jej instalacji na systemie pozostata zamknieta w celu unikniecia zanieczyszczenia jej pytem Instalacja UWAGA Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Zainstalowa ten aparat tylko w zamkni tych miejscach i nie stosowa go w miejscach wystawionych na dzia anie czynnik w atmosferycznych deszcz mr z nieg py w niszcz cych gaz w w rodowiskach wybuchowych lub z wysokim ryzykiem po arowym Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 10 C do 45 C a wzgl dna wilgo 0 90 bez opar W obecnosci pol elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania sie z tematem patrz dodatek Technical Information TV 801 Navigator Bolted Flange musi by pod czony do g wnej pompy patrz schemat w Technical Information 152 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Podrecznik Instrukcji 12 Mocowanie pompy
75. SO Fs fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 95 248 Istruktionsbog langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsing stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl Stop af TV 801 Navigator Bolted Flange For at afbryde TV 801 Navigator Bolted Flange er det tilstreekkeligt at afbryde stromtilforselen Den indbyggede styreenhed afbryder straks pumpen ADVARSEL 96 248 For operatorens sikkerhed skal Turbo V controller en stromforsynes med et 3 tradet fodekabel se tabellen over de bestilbare stykker fodekablet skal vere udstyret med et stik som skal vere godkendt pa international plan Benyt dette kabel og stik sammen med en stikkontakt som pa passende made er forbundet til jorden for at undga elektriske sted og opfylde kravene ifolge CE EF normerne De haje spendinger som udvikles i controller en kan for rsage alvorlige skader eller daden For der foretages vedligeholdelses operationer inde i enheden skal man koble fodekablet fra TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruktionsbog 7 Nodstop Afbrydelse af TV 801 Navigator Bolted Flange i ngdsituationer sker ved at koble ledningen fra styreenheden Vedligeholdelse TV 801 Navigator Bolted Flange beh ver ikke nogen vedligehold
76. TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 177 248 14 N vod na Obsluhu Zariadenie TV 801 Navigator Bolted Flange patri do druhej in tala nej prep ovej kateg rie pod a normy EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie TV 801 Navigator Bolted Flange m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k TV 801 Navigator Bolted Flange m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a normy EN 61010 1 Pou itie T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 120 C 3171418138 Nikdy nepou vajte turbov vevu ak vstupn pr ruba nie je pripojen k v kuovej komore V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na vybaven peci lnym vstupo
77. TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 69 248 5 Manual de Istruc es CUIDADO O TV 801 Navigator Bolted Flange pertence a segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria O TV 801 Navigator Bolted Flange tem dois conectores para as entradas saidas e para a comunicac o de s rie que devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de que o isolamento do dispositivo ligado ao TV 801 Navigator Bolted Flange esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instalac o dos acess rios opcionais consultar Technical Information Utilizac o Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as ligac es el ctricas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura no flange de entrada n o deve ser superior a 120 C Nunca activar a bomba se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as operac es de aquecimento A elevada temperatura pode causar les es s pessoas 70 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de Istr
78. VES ee Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 76 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TV801 Navigator is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 38 000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De TV 801 Navigator Bolted Flange is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen De TV 801 Navigator Bolted Flange is bovendien van
79. Values 000 008 100 101 104 R W R W R W R W L Start Stop in remote mode the window is a read L Remote default or Serial configuration L Soft Start write only in Stop condition N Set Point type expressed in Hz mA ors N Set Point delay time between the pump start and the set point check seconds L Set Point signal activation type the signal can be high level active or low level active N Set point hysteresis in of threshold L Intercooling TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D N Set Point threshold Start 1 Stop 0 Remote 1 Serial 0 default 1 YES 1 NO 0 0 Frequency 1 Current 2 Time default 0 default 582 0 to 99999 default 0 0 high level active 1 low level active default 0 0 to 100 default 2 0 NO 1 YES 235 248 17 Technical Information 236 248 N Read Data Description Admitted Write Type Values 107 R W L Active Stop 0 NO write only in stop 1 YES 108 R W N Baud rate 600 0 1200 1 2400 2 4800 3 9600 4 default 4 109 W L Pump life cycle To reset write 1 time cycle number reset 110 R W L Interlock type Impulse 0 default 1 Continuous 1 111 R W L Analog output type 0 frequency output voltage signal 1 power proportional to default 0 frequency or power 120 R W N Rotational frequency 272 to 646 setting Hz d
80. X gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character 230 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 a lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 a lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph a lt COM gt Command 0x30 to read the window 0x31 to write into the window a DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 5 Data Type Field Length Valid Characters Logic L 1 OFF 0 Y right d with 0 Alphanumeric 10 from blank to ASCII A lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type
81. a TV 801 Navigator Bolted Flange 179 Vypnutie zariadenia TV 801 Navigator Bolted Flange 179 N dzov zastavenie 180 dr ba 180 Likvid cia 181 Preklad origin lneho n vodu 83 Agilent Technologies 171 248 14 N vod na Obsluhu Bezpecnostny n vod pre Turbomolekul rne vyvevy Turbomolekul rne vyvevy ak s n sledovne popisovan obsahuj velk mnoZstvo kinetickej energie vd aka vysokej ot cavej rychlosti v kombin cii s konkretnym objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora sa mo e uvolni rota n energia 317119138 Pokyny k in tal cii uveden v tomto n vode musia by pr sne dodr ovan za elom prevencie zranenia obsluhy 172 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod na Obsluhu 14 Vseobecne informacie Toto zariadenie je ur en pre profesion lnych pracovn kov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie TV 801 Naviga
82. a n o submet lo a choques ou vibrac es Nao depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protecc o do meio ambiente CUIDADO Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposic o do v cuo Utilizar sempre luvas ou outra protecc o adequada ITROLLER EL SA 33 Figura 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 67 248 5 Manual de Istruc es O TV 801 Navigator Bolted Flange n o pode ser danificado permanecendo simplesmente exposto a atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instalac o no sistema para evitar eventuais acumulac es de p Instalacao CUIDADO Remover a etiqueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 68 248 Instale este equipamento somente em locais fechados e para todos os efeitos n o utilize o equipamento em ambientes expostos aos efeitos delet rios do tempo chuva gelo neve em ambientes sujeitos a p gases agressivos ambientes explosivos ou com alto risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 10 C a 45 C a humidade relativa 0 90 n o condensante Na presenca
83. a no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas 58 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D ATENCI N Manual de istrucciones 4 Evitense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Argon para proteger los rodamientos v ase el anexo Technical Information ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Encendido y Uso del TV 801 Navigator Bolted Flange Para encender el TV 801 Navigator Bolted Flange basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las se ales de interbloqueo y de arranque y activa la bomba La primera salida de la bom
84. able in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange TV 801 Navigator Bolted Flange TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 3 248 TV 801 Navigator Bolted Flange 4 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 22 Manutenzione 25 Smaltimento 26 2 Gebrauchsanleitung 27 Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine Informationen 29 Lagerung 3
85. adavky smernice EEC 85 399 POZOR Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Be n vystavenie vplyvu prostredia nem e zariadenie TV 801 Navigator Bolted Flange po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii usadzovania prachu TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 175 248 14 N vod na Obsluhu Instal cia TROLLER MODEL S Postava 1 Neodstra ujte lepiaci a ochrann uz ver skG pripoj te turbov vevu k syst mu 176 248 Zariadenie v dy nain talujte v miestnosti a v iadnom pr pade ho nepou vajte v prostred v ktorom by bolo vystaven vplyvu po asia d sneh mr z prachu agres vnym plynom v bu n m alebo ve mi hor av m l tkam Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak Z bary nad rov ou atmosf rick ho tlaku a teplota od 10 C do 45 C relat vna vlhkos O 90 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 801 Navigator Bolted Flange sa mus pripoji k prim rnej v veve pozri Technical Information TV
86. adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 61 248 4 Manual de istrucciones Eliminaci n Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta 62 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 64 Informa es gerais 65 Armazenagem 66 Preparac o para a instalac o 67 Instalac o 68 Fixac
87. agy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 136 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Felhaszn l i Kezik nyv 11 Altalanos inform ci k A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TV 801 Navigator Bolted Flange egy integr lt rendszer turbo molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A sziv
88. an l k yt sit ilmastotekij ille sade pakkanen lumi p lylle tai sy vytt ville kaasuille altistuvissa r j hdysvaarallisissa tai eritt in palovaarallisissa tiloissa K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 10 C 45 C suhteellinen kosteus 0 90 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 801 Navigator Bolted Flange tulee kytke p pumppuun ks Technical Information liitteen kaaviota 128 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Ohjekasikirja 10 Pumpun kiinnitys VECINAS Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa kohdistua huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k TV 801 Navigator Bolted Flange vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 8900 Nm n momentin akselinsa ymp ri T m ruuvilaippa voidaan kiinnitt kest vill
89. andard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 801 Navigator Bolted Flange ar utrustad med kontaktdon f r ingangarna utgangarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna sa att det inte gar att komma at nagon sp nningsf rande del Kontrollera att anordningen som r ansluten till TV 801 Navigator Bolted Flange har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information Anvandning 106 248 Anvisningar for riktig anvandning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppvarms far temperaturen vid inloppet aldrig verstiga 120 C Satt aldrig igang pumpen om intagsflansen varken ar kopplad till vakuumkammaren eller ar blockerad pa plats med lasflansen Vidr r inte turbopumpen eller nagra tillbeh r under uppv rmningen f r att undvika brannskador TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bruksanvisning 8 Weave Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r igang Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fran damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf
90. anual 87 900 980 01 D 223 248 17 Technical Information 24 Vdc 5 Vdc Customer s device Controller A QE A NPN 24 Vdc E PNP 5Vde Customer s device Controller NK Figure 14 Case 1 224 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 24 Vdc Customer s i device Controller X 5 Vdc NIIN 24 Vdc o Controller Customer s i device i 5 Vde ua Sc E i hu i Figure 15 Case 2 with relay utilization TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 225 248 17 Technical Information 24 Vdc Customer s device 07 Controller PNP 5 Vdc MT SK 24 Vdc EN Controller Customer s 5 Vdc device j lt a NPN CA Figure 16 Case 2 with transistor utilization How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The following figure refers to the programmable set point signal on pins 11 and 9 226 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 P1
91. ar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaciones importantes extra da del texto Almacenamiento 54 248 Para garantizar el nivel maximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre O y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de istrucciones 4 En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Preparaci n para la instalaci n El TV 801 Navigator Bolted Flange se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte
92. aratury i zapobiec uszkodzeniom cia a operator w nale y obowi zkowo przestrzega zalecenia dotycz ce instalacji opisane w niniejszej instrukcji obs ugi 148 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Podrecznik Instrukcji 12 Informacje ogolne Ta aparatura jest przeznaczona do uzytku zawodowego Uzytkownik musi przeczyta bardzo uwaznie niniejsza instrukcje kazda dodatkowa informacje dostarczona przez firme Agilent przed uzytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System TV 801 Navigator Bolted Flange jest zintegrowanym systeme sk adaj cym si z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 38000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System TV 801 Navigator Bolted Flange jest ca kowicie bez czynnik w zanieczyszczaj cych I dlatego te to system o
93. atty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 38000 fordulat perc biztos tja A TV 801 Navigator Bolted Flange szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS232 vagy RS485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 137 248 11 Felhaszn l i K zik nyv Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VESZ LY A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet alada ba A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T rol s A Agilent Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k v
94. avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui effectu e de facon impropre risque de provoquer de graves l sions f r Inn Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage Les notes contiennent des renseignements importants extrapol s du texte Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est indispensable de respecter les instructions suivantes a Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de O a 95 non condensante a la premiere utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois a compter de la date d exp dition 42 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Mode d emploi 3 PIANKI En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone Preparation pour l installation Le TV 801 Navigator Bolted Flange est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produ
95. ba se realiza en el modo Soft Start que al final del ciclo de puesta en marcha se deshabilita autom ticamente por lo tanto cuando la bomba se ponga en marcha posteriormente se har sin Soft Start Para volver a utilizar una puesta en marcha Soft Start activa es necesario rehabilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LDI situado en el panel de la base del TV 801 ISO F indica con la frecuencia de su parpadeo las condiciones operativas del sistema TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 59 248 4 Manual de istrucciones encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada del TV 801 Navigator Bolted Flange ADVERTENCIA Para parar el TV 801 Navigator Bolted Flange nte con desenchufarlo de la corriente El controler incorporado detiene inmediatamente la bomba Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomaco
96. cionales espec ficas El TV 801 Navigator Bolted Flange es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 38000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento El TV 801 Navigator Bolted Flange no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vac o limpio Asimismo el TV 801 Navigator Bolted Flange posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante l nea serial RS 232 RS 485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 53 248 4 Manual de istrucciones Este manual utiliza los siguientes simbolos convencionales BONE HAM Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podr a provoc
97. d entr e ne doit pas d passer 120 C Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves 46 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D ATTENTION Mode d emploi 3 Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar au dela de la pression atmosph rique Pour le pompage de gaz agressifs ces pompes sont dot es d une porte sp ciale a travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les paliers voir l appendice Technical Information AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs Mise en marche et utilisation du TV 801 Navigator Bolted Flange Pour allumer le TV 801 Navigator Bolted Flange il suffit de
98. dpowiedni do zastosowa gdzie jest wymagana tzw czysta pr nia Poza tym posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 149 248 12 Podrecznik Instrukcji W tej instrukcji zastosowano nastepujace umowne znaczenia PAVAN dO Komunikaty niebezpiecze stwa przyci gaj uwag operatora co do danej procedzury lub danego post powania kt rego nieprawid owe wykonanie mog oby spowodowa powa ne uszkodzenia cia a UWAGA Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne informacje wyci gni te z tekstu Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Agilent musz by przestrzegane nast puj ce zalecenia podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast
99. duct and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lei
100. e del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita PA L 26 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual Gebrauchsanleitung Sicherheitshinweise fiir Turbomolekularpumpen 28 Allgemeine 29 Lagerung 30 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 34 Einschaltung und Gebrauch von Modell TV 801 Navigator Bolted Flange 35 Stoppen von Modell TV 801 Navigator Bolted Flange 36 Not Aus 36 Wartung 37 Entsorgung 38 Ubersetzung der Originalanleitungen E Agilent Technologies 27 24 2 Gebrauchsanleitung Sicherheitshinweise fiir Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verfiigen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 28 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D
101. e operator when using the equipment Detailed information is supplied in the appendix Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 197 248 16 Instructions for Use This manual uses the following standard protocol Warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The caution messages are displayed before procedures which if not followed could cause damage to the equipment Notes contain important information taken from the text Storage 198 248 In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded a temperature range 20 C to 70 C a relative humidity range 0 to 90 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instructions for Use 16 If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informa
102. e sono dotate di una apposita porta attraverso la quale necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere l appendice Technical Information AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi Accensione ed Uso del TV 801 Navigator Bolted Flange Per accendere il TV 801 Navigator Bolted Flange sufficiente fornire la tensione di alimentazione I controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa La prima partenza della pompa avviene nel modo Soft Start che al termine del ciclo di avvio si disabilita automaticamente per cui tutti i successivi avvii della pompa avvengono senza il modo Soft Start Per riavere una partenza con Soft Start attivo occorre riabilitare il modo suddetto tramite software vedere il paragrafo RS 232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del TV 801 Navigator Bolted Flange indica con la frequenza del suo lampeggio le condizioni operative del sistema TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 23 248 1 Istruzioni per l uso acceso fisso la pompa in rotazione normale a lampeggiante
103. econtroleerd N ACE her f NZI A a L TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyleere turbopumper 88 Generel Information 89 Opbevaring 90 Forberedelse for installation 91 Installation 92 Fastg relse af pumpe 93 Anvendelse 94 Start og anvendelse af TV 801 Navigator Bolted Flange 95 Stop af TV 801 Navigator Bolted Flange 96 Nodstop 97 Vedligeholdelse 97 Bortskaffelse 98 Oversattelse af originalinstruktionerne Agilent Technologies 37 2 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes AVES For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 88 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren bor l se denne brugsanvisning og anden yderligere information fra Agilent
104. ed air 300 W with air 1x8A UNI EN 292 1 UNI EN 292 2 EN CENELEC 55011 IEC 1000 4 2 ex 801 2 IEC 1000 4 3 ex 801 3 IEC 1000 4 4 ex 801 4 EN 61010 1 IEC 1010 1 EN 1012 2 With European or NEMA plug 3 meters long optional RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Il 2 20 C to 70 C 27 59 4 5 4 12 213 248 17 Technical Information Technical Specification NOTE When the TV 801 Navigator Bolted Flange has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature 214 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 TV 801 Navigator Bolted Flange Outline The following figure shows the TV 801 Navigator Bolted Flange outlines dimensions are in mm inches LLER e FORELINE KF25 Figure 5 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 215 248 17 Technical Information TV 801 Navigator Bolted Flange Outline Pumping speed N2 Pumping speed L s 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Inlet Pressure mbar 0E 01 Figure 6 Graph of nitrogen pumping speed vs inlet pressure 216 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17
105. efault 646 121 R W N Maximum rotational 272 to 646 frequency in Hz default 646 active only in Stop condition 122 R W L Set vent valve On 1 on off Off 0 on closed default 1 123 Reserved to Agilent service 124 125 R W L Set the vent valve Automatic 0 see note 1 operation On command 1 see note 2 126 R W N Vent valve opening 0 to 65535 delay expressed in corresponding to 0 to 13107 0 2 sec sec 130 Reserved to Agilent service TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 N Data Description Admitted Type Values 200 N Pump current in mA 202 203 204 205 300 301 302 N Pump power in W pump current x pump voltage duty cycle N Driving frequency in Hz N Pump temperature in C N Pump status N Error code N Cycle time in minutes zeroed by the reset command N Cycle number zeroed by the reset command N Pump life in hours zeroed by the reset command 0 to 70 Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Bit description see the following figure 0 to 999999 0 to 9999 0 to 999999 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 237 248 17 Technical Information N Read Data Description Admitted Write Type Values 320 to Reserved to Agilent service 399 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 402 R A
106. ektiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverandgren av anordningen som kan veere et firma eller en forhandler som s rger for oppsamling og eliminering etter 4 ha kontrollert avtal og betingelser i kjopekontrakten N ATE Fy TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 10 Ohjekasikirja Turbomolekyylipumppujen Turvaohjeet 124 Yleisia tietoja 125 Varastointi 126 Valmistelut asennusta varten 127 Asennus 128 Pumpun kiinnitys 129 Kaytt 130 TV 801 Navigator Bolted Flangein k ynnistys ja kaytt 131 TV 801 Navigator Bolted Flangein pys ytt minen 132 H t pys ytys 132 Huolto 133 H vitt minen 134 Alkuper isen ohjeiden k nn s E Agilent Technologies 123 24 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua TUI NEE Tassa k ytt ohjeessa ku
107. elativa da 0 a 95 non condensante jl cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruzioni per l uso 1 Fait Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Preparazione per l installazione Il TV 801 Navigator Bolted Flange viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TV 801 Navigator Bolted Flange e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente add Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata TROLLER EL SQ 33 Figura 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 19 248 1 Istruzioni per l uso
108. else Ethvert indgreb skal foretages af autoriseret personale Inden der foretages noget som helst indgreb p systemet skal strommen forst afbrydes og luften i pumpen skal fjernes ved at abne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der udskifter systemet med et repareret system Inden systemet sendes til reparationsv rkstedet eller Agilent advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 97 248 7 Istruktionsbog Bortskaffelse 98 248 Betydningen af WEEE logoet p markaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun geeldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverandgren af anordningen enten fabrikken eller en forhandler for igangs
109. ent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Mode d emploi 3 Arr t d urgence Entretien Pour arr ter le TV 801 Navigator Bolted Flange en conditions d urgence il faut d brancher le cordon d alimentation du contr leur Le TV 801 Navigator Bolted Flange n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le systeme le d brancher refouler l air de la pompe en ouvrant la soupape pr vue a cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure a 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un systeme r g n r en remplacement du systeme endommag Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et
110. er L NT NIE Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udfores preecist efter anvisningerne modsat fald er der risiko for sv re personskader dijiste Denne advarselsmeddelelse vises far procedurer der skal f lges n je for ikke at risikere maskinskader Dette gor opmerksom pa vigtig information i teksten Opbevaring Det er ngdvendigt at overholde folgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne a temperatur fra 20 C til 70 C a relativ fugtighed fra O til 95 ikke kondenserende a Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang a De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen 90 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruktionsbog 7 dis ee Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger fas ved henvendelse til den lokale Agilent representant Forberedelse for installation TV 801 Navigator Bolted Flange leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen vi
111. eric pressure a temperature from 10 C to 45 C relative humidity 0 90 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 801 Navigator Bolted Flange must be connected to a primary pump see Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instructions for Use 16 Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to withstand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the TV 801 Navigator Bolted Flange in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8900 Nm around its axis For example this Bolted Flange can be fixed using high strength steel screws class higher than 8 8 The following table shows the necessary number of screws and the relevant fixing torque Tab 1 FLANGE N FIXING TORQUE 160 Bolted 8 5Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means
112. ersonnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TV 801 Navigator Bolted Flange est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 38000 tr min maxi mue par un moteur lectrique triphas haut rendement Le TV 801 Navigator Bolted Flange est totalement exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Le TV 801 Navigator Bolted Flange est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander la soupape de ventilation de le piloter distance l aide d un ordinateur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 41 248 3 Mode d emploi Cette notice utilise les signes conventionnels suivants NES TAN Les messages d
113. et beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen Installatie ela ale pie Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden 80 248 Installeer dit apparaat uitsluitend in gesloten ruimten en gebruik het in elk geval niet in ruimten die aan de weersomstandigheden regen vorst sneeuw stof of agressieve gassen zijn blootgesteld of in ruimten met explosiegevaar of groot risico op brand Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 10 C tot 45 C relatieve vochtigheid 0 90 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De TV 801 Navigator Bolted Flange moet op een primaire pomp aangesloten zijn zie schema in Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bedrijfshandleiding 6 Bevestiging van de pomp Als schade aan de rotor optreedt zou de verbinding tussen de pomp en het systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende is om dit koppel
114. etni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartom ny 20 C 70 C relativ p ratartalom 0 90 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l atveszi s el sz r zemelteti a Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz llit s d tum t l 138 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Felhaszn l i Kezik nyv 11 31043531 Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gyarba Kerem inform ci ert forduljon a helyi Agilent vakuumkereskedelmi amp s szolgaltatasi k pviselethez El keszites telepitesre A TV 801 Navigator Bolted Flanget k l nleges ved csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak FIGYELEM G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alka
115. gare upplysningar TV 801 Navigator Bolted Flange maste anslutas till en huvudpump se schemat i Technical Information 104 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Bruksanvisning 8 Fastsattning av pump VARNING handelse av rotorfel kan anslutningen mellan pumpen och systemet uts ttas for ett h gt vridmoment Om anslutningen inte tal ovann mnda vridmoment kan pumpen lossna fran systemet eller motorn kan lossna fran pumpens h lje s fall kan metallf rem l slungas ivag fran pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador pa apparater i narheten Fast TV 801 Navigator Bolted Flange i ett stabilt lage genom att ansluta turbopumpens intagsflans till systemets flans som maste tala ett vridmoment pa 8900 Nm kring sin axel Den h r Bolted Flange till exempel kan fixeras med h gh llfasta stalskruvar klass h gre n 8 8 I tabellen nedan anges hur manga skruvar som beh vs och med vilket moment de ska dras at Tab 1 FLANS ANT ATDRAGNINGS MOMENT 160 Bolted 8 5 Nm TV 801 Navigator Bolted Flange kan installeres i en hvilken som helst position TV 801 Navigator Bolted Flange systemet kan inte fastsp nnas med sin egen bas TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 105 248 Bruksanvisning mida TV 801 Navigator Bolted Flange tillh r den andra installationsklassen eller versp nningsklassen enligt st
116. gator Bolted Flange nem igenyel karbantart st A rendszeren v gzett barmely munk t jogosult szem lyzetnek kell elv geznie VESZELY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz ltsegr l szell ztesse a szivatty t a megfelel szelep kinyitasaval v rjon amig a rotor forg sa le ll s amig a szivatty fel letenek h merseklete 50 C ala esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre llitott rendszert a hib s helyett Miel tt javitasra vagy cser re visszakildi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz llit s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlanitani kell a konkret nemzeti szabv nyoknak megfelel en TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 145 248 11 Felhaszn l i K zik nyv Megsemmis t s 146 248 A c mken jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy
117. gilent com Pg 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR L HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the fallawing information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic L Corrosive Reactive 1 Flammable El Explosi
118. haute r sistance classe sup rieure a 8 8 La table ci apr s indique le nombre de vis n cessaires et le couple de serrage a appliquer Tab 3 BRIDE N COUPLE DE SERRAGE 160 Bolted 8 5 Nm Le TV 801 Navigator Bolted Flange peut tre install e dans n importe quelle position Le TV 801 Navigator Bolted Flange ne peut tre fix par sa base TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 45 248 3 Mode d emploi Wald Gin Le TV 801 Navigator Bolted Flange appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 801 Navigator Bolted Flange dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de facon qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au TV 801 Navigator Bolted Flange a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter a Technical Information Utilization Ce paragraphe pr sente les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride
119. hittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys TV 801 Navigator Bolted Flange on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st 132 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Huolto Ohjekasikirja 10 TV 801 Navigator Bolted Flange ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee jattaa valtuutetun henkil n tehtavaksi VAROITUS Ennen mink n tyyppist toimenpidetta j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pysahtymista Antakaa taman jalkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt jarjestelman pakkaukseen ennen sen lahett mist Mik li pumppu t ytyy romuttaa toimikaa sen havittamisessa kansallisen lains d
120. hnical Information Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is greater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Accessories and Spare Parts Tab 8 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 242 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the pro
121. hulpconnectors voorzien waarmee een extra ventilator kan worden gevoed de luchtuitlaatkleppen kunnen worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 71 248 6 Bedrijfshandleiding Deze handleiding gebruikt de volgende symbolen WAARSCHUWING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht Opslag 78 248 Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen a tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan a temperatuur van 20 C tot 70 C a relatieve vochtigheid van O tot 95 niet condenserend de klant moet de turbomoleculaire
122. ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami Likvidace V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku Nas EY TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 169 248 13 N vod k Pou it Likvidace 170 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 14 Navod na Obsluhu Bezpe nostn n vod pre Turbomolekul rne v vevy 172 V eobecn inform cie 173 Uchov vanie 174 Pr prava na in tal ciu 175 In tal cia 176 Upevnenie v vevy 177 Pou itie 178 Zapnutie a pou itie zariadeni
123. it pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particulierement a ne pas laisser tomber le TV 801 Navigator Bolted Flange et a ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est entierement recyclable et conforme a la directive CEE 85 399 en mati re de protection de l environnement on Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e TROLLER MODEL Figure 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 43 248 3 Mode d emploi Le TV 801 Navigator Bolted Flange ne peut s endommager en restant simplement expos atmosphere Toutefois afin viter toute pollution due a la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation Installation Nara rll Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me Installer cet appareil uniquement dans un local ferm et ne jamais l utiliser dans un milieu expos aux conditions atmosph riques pluie gel neige a la poussi re aux gaz agressifs encore moins dans un milieu pouvant pr senter un risque d explosion ou d incendie Pendant le fonctionnement il est
124. k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 125 248 10 Ohjek sikirja Tama k sikirja k ytt seuraavanlaisia merkint j UUSIN Vaara merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin HUOMIO Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st
125. ktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet voor versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 85 248 6 Bedrijfshandleiding Afvalverwerking 86 248 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben g
126. l kter Ize doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap t kter vznik v controlleru m e zp sobit v n zran n i smrteln P ed prov d n m z sah dr by uvnit jednotky p vodn kabel odpojte Nouzov zastaven Pro okam it zastaven v v vy TV 801 Navigator Bolted Flange se roubovanou p rubou v nouzov situaci je t eba odpojit nap jec kabel ze s ov z suvky Udr ba V v va TV 801 Navigator Bolted Flange se roubovanou p rubou nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby 1 17435WM Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan 168 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D N vod k Pou it 13 Pred odesl n m vyv vy v robci na opravu nebo v m nu za repasovan kus mus te list Health and Safety Zdrav a bezpe nost pr
127. lation 43 Installation 44 Fixation de la pompe 45 Utilization 46 Mise en marche et utilisation du TV 801 Navigator Bolted Flange 47 Arr t du TV 801 Navigator Bolted Flange 48 Arr t d urgence 49 Entretien 49 Mise au rebut 50 Traduction de la mode d emploi originale Ee Agilent Technologies 39 248 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due a la grande vitesse de rotation associ e a la masse sp cifique de leurs rotors En cas de panne du syst me par exemple a cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e VRS AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 40 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Mode d emploi 3 Indications Generales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill a l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un p
128. lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Arresto del TV 801 Navigator Bolted Flange AVVERTENZA Per arrestare il TV 801 Navigator Bolted Flange sufficiente togliere la tensione di alimentazione I controller incorporato arresta immediatamente la pompa Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo Cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza 24 248 Per arrestare in condizioni di emergenza il TV 801 Navigator Bolted Flange occorre staccare il cavo di alimentazione dal controller TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Istruzioni per l uso 1 Manutenzione Il TV 801 Navigator Bolted Flange non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi
129. lmas v delmet ITROLLER EL SI Abra 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 139 248 11 Felhaszn l i K zik nyv A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TV 801 Navigator Bolted Flanget M gis aj nlatos z rva tartani a rendszerbe val telep t sig gy megakad lyozva a por ltali szennyez d s b rmely form j t Telep t s FIGYELEM Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt 140 248 Csak belt ri k rnyezetbe telep tse az eszk zt s semmilyen esetben se haszn lja atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett a h m rs klet 10 C t l 45 C ig relativ p ratartalom O 90 nem kondenz l M gneses mez k jelenl t ben a szivattyut v deni kell ferromagneses pajzs segits g vel R szletes informacid rt l sd Mtiszaki inform ci A TV 801 Navigator Bolted Flange et els dleges szivatty hoz kell csatlakoztatni l sd Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Felhaszn l i Kezik nyv 11 A szivatty r gzitese Ha rotorhiba jelentkezik a
130. los Tab 4 BRIDA N PAR DE APRIETE 160 Bolted 8 5 Nm El TV 801 Navigator Bolted Flange puede instalarse en cualquier posici n El TV 801 Navigator Bolted Flange no puede fijarse utilizando su base TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 57 248 4 Manual de istrucciones ATENCI N El TV 801 Navigator Bolted Flange pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 801 Navigator Bolted Flange tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al TV 801 Navigator Bolted Flange mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Uso Para instalar los accesorios opcionales v ase Technical Information En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C ADVERTENCIA No hacer funcionar nunca la bomba si la brida de entrad
131. m Stoppen von Modell TV 801 Navigator Bolted Flange ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod f hren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Zur Stillsetzung von Mod TV 801 Navigator Bolted Flange in Notsituationen ist vom Controller das Netzkabel abzuziehen TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Wartung Gebrauchsanleitung 2 Modell TV 801 Navigator Bolted Flange erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe iiber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genomme
132. m na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad Na Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information 178 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod na Obsluhu 14 13 13418138 Ak v vevu pou vate na vy erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov Zapnutie a pou itie zariadenia TV 801 Navigator Bolted Flange Ak chcete zapn zariadenie TV 801 Navigator Bolted Flange mus te ho pripoji ku zdroju nap jania Integrovan kontrol r automaticky rozpozn spojenie spust sign l a zapne v vevu Prv spustenie v vevy prebehne v re ime Soft Start Jemn tart Po dokon en sp acieho cyklu sa re im Soft Start automaticky odpoj a v etky nasleduj ce spustenia zariadenia prebehn bez re imu Soft Start Ak chcete re im Soft Start obnovi mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS 232 485 COMMUNICATION DESCRIPTION Popis komunik cie v dodatku Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia TV 801 Navigator Bolted Flange ukazuje frekvenciou blikania sp sob innosti syst mu a iadne blikanie v veva norm lne rotuje pomal
133. ma 2 bares por encima de la presi n atmosf rica temperatura de 10 C a 45 C humedad relativa 0 90 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles EI TV 801 Navigator Bolted Flange ha de conectarse a una bomba primaria v ase diagrama en Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de istrucciones 4 Fijaci n de la bomba En caso de da arse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podr a no resistir a dicho par de fuerza y como consecuencia la bomba podr a separarse del sistema o el motor podr a separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o da os a los aparatos adyacentes Fijar el TV 801 Navigator Bolted Flange en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8900 Nm en torno a su propio eje Por ejemplo esta Bolted Flange puede ser fijada con tornillos de acero de alta resistencia clase mayor de 8 8 La tabla siguiente describe el n mero de tornillos necesarios y con cual par de apriete apretar
134. n TV 801 Navigator Bolted Flange in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 900 Nm um die eigene Achse standhalten Zum Beispiel kann dieser Bolted Flange unter Verwendung hoch widerstandsf higer Schrauben Klasse h her als 8 8 befestigt werden Die folgende Tabelle zeigt die erforderliche Anzahl Schrauben und das jeweilige Anzugsmoment Tab 2 FLANSCH ANZ ANZUGSMOMENT 160 Bolted 8 5 Nm Modell TV 801 Navigator Bolted Flange kann in jeder beliebigen Position installiert werden Modell TV 801 Navigator Bolted Flange kann nicht mittels seines Sockels befestigt werden TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 33 248 2 Gebrauchsanleitung VORSICHT Der TV 801 Navigator Bolted Flange geh rt zur zweiten Installationsklasse Uberdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Der TV 801 Navigator Bolted Flange hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die AuBenkreise angeschlossen werden m ssen sodaf kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den TV 801 Navigator Bolted Flange angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1
135. n TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc 3 Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any exce
136. n Controller Technical Information 17 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 233 248 17 Technical Information Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 234 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Window Meanings Tab 7 N Read Write Data Type Description Technical Information 17 Admitted
137. n utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp Trekk ut nettkabelen fra styreenheten for stoppe TV 801 Navigator Bolted Flange i en n dsituasjon 120 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instruksjon Manual 9 Vedlikehold TV 801 Navigator Bolted Flange er vedlikeholdsfritt Alt arbeid pa systemet m kun utf res av autorisert personell ADVARSEL F r noe arbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det delagte systemet F r systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 121 248 9 instruksjon Manual Elminering 122 248 Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC dir
138. n werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 37 248 2 Gebrauchsanleitung Entsorgung 38 248 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat V m TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation pour l instal
139. nge Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 187 248 15 Priro nik za Navodila Monta a ONTROLLER MODEL Slika 1 Lepljiv in za itni pokrov ne odstranjujte dokler ne povezete turbo rpalko na sistem 188 248 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente dez sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost pozara Tekom delovanja je treba spoSotvati naslednje pogoje a Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura Od 10 C od 45 C Relativna vla nost 0 90 brez kondenza V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information TV 801 Navigator Bolted Flange morate priklju iti na primarno rpalko glej Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Priro nik za Navodila 15 Pritrjevanje Erpalke Ce pride do napake na rotorju potem lahko med povezavo rpalke s sistemom pride do velikega navora Ce povezava ne more izdr ati tak nega navora se lahko rpalka izkljuci iz sistema ali se ohi je motorja iztrga iz nostilca rpalke V tak nem primeru lahko priletijo
140. ni odgovoren za dogodke ki bi nastali zaradi neupostevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TV 801 Navigator Bolted Flange je integriran sistem s turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 38000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 801 Navigator Bolted Flange ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremljen je s pomoZnimi priljucki za dodaten ventilator ki skrbi za nazor Sobe za zrak ki je nadzorovana z racunalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 185 248 15 Priro nik za Navodila Navodila so napisana po naslednjem standardnem protokolu SVARILO Opozorila so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo vse najbolj pomembne
141. nitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 29 248 2 Gebrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Lagerung 30 248 Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C a Relative Feuchtigkeit von O bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start ingangzusetzen a Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum TV 801 Navigator
142. nn n m r m ll tavalla TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 133 248 10 Ohjek sikirja Havittaminen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa etta tuotetta EI saa havittaa tavallisen kotitalous tai teollisuusjatteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan kerays ja havittamisprosessia varten yhteytta laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 134 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 11 Felhasznaloi Kezik nyv Biztons gi tmutat Turbomolekularis szivatty khoz 136 ltal nos inform ci k 137 Tarolas 138 El k szit s telepit sre 139 Telepit s 140 A szivatty r gzitese 141 Hasznalat 142 A TV 801 Navigator Bolted Flange bekapcsolasa s hasznalata 143 A TV 801 Navigator Bolted Flange kikapcsolasa 143 V szleallitas 144 Karbantartas 145 Megsemmisit s 146 Az eredeti utasitas forditasa UE Agilent Technologies 135 248 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva n
143. o da bomba 69 Utilizac o 70 Acendimento e Utilizac o do TV 801 Navigator Bolted Flange 71 Paragem do TV 801 Navigator Bolted Flange 72 Paragem de Emerg ncia 73 Manutenc o 73 Eliminac o 74 Traduc o das instruc es originais 5 Agilent Technologies 63 248 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es t m uma alta quantidade de energia cin tica devida a alta velocidade de rotac o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o pode ser liberada ATENCAO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instruc es de instalac o descritas neste manual 64 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contrario s normas nacionais espec ficas O TV 801 Navigator Bolted
144. oituu automaattisesti k ynnistysjakson j lkeen Siten pumpun seuraavat k ynnistykset tapahtuvat ilman Soft Start toimintoa Jotta k ynnistys voitaisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu tapa aktivoida uudelleen ohjelmiston kautta ks kappale RS 232 VIESTINN N KUVAUS Technical Information liitteess Vihre LED LD1 joka sijaitsee TV 801 ISO F n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet a palaa jatkuvasti pumppu py rii normaalisti vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms n jakso virhetila TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 131 248 10 Ohjek sikirja TV 801 Navigator Bolted Flangein pysayttaminen TV 801 Navigator Bolted Flangein pys ytt miseen riitt ett se kytket n irti s hk verkosta Sis nrakennettu valvoja pys ytt pumpun v litt m sti K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa ke
145. olted Flange systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 38000 opm koplet til en trefaset elektrisk motor TV 801 Navigator Bolted Flange har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum TV 801 Navigator Bolted Flange har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 113 248 9 instruksjon Manual Denne manualen bruker folgende standardprotokoll OKI Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsmate eller praksis som hvis den ikke folges kan medfore alvorlige skader Sala Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl
146. or installation 91 Installation 92 Fastg relse af pumpe 93 Anvendelse 94 Vedligeholdelse 97 Bortskaffelse 98 Bruksanvisning 99 S kerhetsanvisningar f r Molekyl ra turbopumpar100 Allm n information 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fasts ttning av pump 105 Anv ndning 106 Underh ll 109 Bortskaffande 110 Instruksjon Manual 111 Sikkerhetsanvisninger for Turbomolekyl r Pumper 112 Generell informasjon113 Lagring 114 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Contents Klargjore til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 118 Vedlikehold 121 Elminering 122 10 Ohjekasikirja 123 Turbomolekyylipumppujen Turvaohjeet 124 Yleisia tietoja 125 Varastointi 126 Valmistelut asennusta varten127 Asennus 128 Pumpun kiinnitys 129 K ytt 130 Huolto 133 H vitt minen 134 11 Felhaszn l i Kezik nyv 135 Biztons gi tmutat Turbomolekularis szivatty khoz 136 ltal nos inform ci k 137 T rol s 138 El k sz t s telep t sre 139 Telep t s 140 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 9 248 Contents 10 248 12 13 A szivatty r gzit se 141 Haszn lat 142 Karbantart s 145 Megsemmisit s 146 Podrecznik Instrukcji 147 Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 148 Informacje ogolne 149 Magazynowanie 150 Przygotowanie do instalacji 151 Instalacja 15
147. osf rick mi sr kami d sn h led prachem agresivn mi plyny nebo ve v bu n m prost ed a v prost ed kde hroz nebezpe po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 10 C do 45 C a relativn vlhkost 0 90 bez sr en V pritomnosti magnetickych poli se vyv va musi chranit feromagnetickym stin nim Viz podrobn informace v p loze Technical Information V v va TV 801 Navigator Bolted Flange se roubovanou pr rubou se mus pripojit k prim rn mu erpadlu viz Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod k Pouziti 13 Upevneni vyvevy Pokud dojde k poru e rotoru propojen vyv vy se syst mem by mohlo byt vystaveno velk mu to iv mu momentu Pokud toto propojen nebude schopno vydr et tento to iv moment vyv va by se mohla odpojit od syst mu nebo kryt elektromotoru by se mohl odpojit od pl t vyv vy V tomto pripad by z vyv vy nebo syst mu mohly vylet t kovov lomky kter by mohly zp sobit v n raz nebo smrt a tak po kodit okoln zarizeni V v vu TV 801 Navigator Bolted Flange se Sroubovanou pr rubou umist te do stabilni polohy a privodni prirubu turbomolekularni vyv vy pripevn te k protiprirub syst mu pomoci pripojky ktera odol tociv mu momentu 8900 Nm kolem sv osy
148. ostup P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C NEBEZPE Turbomolekul rn v v vu nikdy nepou vejte nebude li p vodn p ruba p ipojen k vakuov komo e B hem zah v n se turbov v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap Nz Ar pro ochranu lo isek v v vy viz p lohu Technical Information 166 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod k Pouziti 13 UT TTE Pokud pou v te vyv vu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn Zapnut a pou v n v v vy TV 801 Navigator Bolted Flange Pro uveden v v vy TV 801 Navigator Bolted Flange do provozu je nutn p i
149. p ndice Technical Information A luz piloto verde LD1 posicionada no painel da base do TV 801 ISO F indica atrav s da frequ ncia de intermit ncia as condic es operacionais do sistema TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 71 248 5 Manual de Istruc es acesa fixa a bomba funciona normalmente a intermit ncia lenta periodo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock intermit ncia r pida periodo de aprox 200 ms condi o de erro Paragem do TV 801 Navigator Bolted Flange ATENCAO Para parar o TV 801 Navigator Bolted Flange suficiente desligar a tens o de alimentac o O controller incorporado para imediatamente a bomba Para a seguranca do operador o controller Turbo V deve ser alimentado com um cabo de alimentac o com 3 fios ver a tabela das partes que podem ser encomendadas equipado de uma tomada aprovada a nivel internacional Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el ctricos e satisfazer os requisitos das normas CE As altas tens es que se desenvolvem no controller podem provocar graves danos ou at morte Antes de realizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o 72 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de Istruc es 5 Paragem de
150. part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum P
151. poro in prisotnost signalov za vklop ter zaZene rpalko Prvi zagon rpalke je v na inu mehkega zaganjanja Soft Start Ko se za etni cikel zaklju i se na in Soft Start samodejno onemogo i in na voljo so naslednji zagoni brez na ina Soft Start Za ponovno aktiviranje Soft Start na ina je potreben ustrezen programski ukaz glej odstavek Opis komunikacije RS 232 485 v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 801 Navigator Bloted Flange s hitrostjo utripanja ozna uje delovne pogoje sistema a Brez utripanja C rpalka je normalno vrti a Po rasno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc a Hitro utripanje perioda pribli no 200 ms Napaka Izklop naprave TV 801 Navigator Bolted Flange Za izklop naprave TV 801 Navigator Bolted Flange morate prekiniti dovod napetosti Vgrajen kontroler takoj zaustavi rpalko TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 191 248 15 Priro nik za Navodila Za varnost operaterja mora biti krmilnik Turbo V napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i h
152. poskrbeti za njihovo primerno locevanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku locevanja in odstranitve odpadkov Sele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe Ne cd AS TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 193 248 15 Priro nik za Navodila Odlaganje opadkov 194 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Switching on and Use of TV 801 Navigator Bolted Flange TV 801 Navigator Bolted Flange Switching off 203 Emergency Stop 204 Maintenance 204 Disposal 205 Original Instructions 5 Agilent Technologies 195 248 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should
153. puj ce warunki rodowiskowe a temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar a klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki 150 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Podrecznik Instrukcji 12 Jezeli z jakiegokolwiek powodu czas magazynowania jest dtuzszy nalezy odes a pompe do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa si z miejscowym przedstawicielem firmy Agilent Przygotowanie do instalacji System TV 801 Navigator Bolted Flange jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 801 Navigator Bolted Flange ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWAGA Aby unikna problemow odgazowywania nalezy nie dotyka gotymi rekoma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie IT
154. r Turbopumpe an das System abnehmen Das Ger t darf nur in geschlossenen Umgebungen installiert und nicht in Umgebungen benutzt werden wo es Witterungsbedingungen Regen Frost und Schnee Staub oder tzenden Gasen ausgesetzt ist oder die explosionsf hig oder mit einer erh hten Brandgefahr sind Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 10 C bis 45 C a Relative Luftfeuchtigkeit 0 90 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen Fir ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 801 Navigator Bolted Flange ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information 32 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Gebrauchsanleitung 2 Befestigung der Pumpe WARNUNG Wenn ein Lauferschaden auftritt konnte die Verbindung zwischen der Pumpe und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom System oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System geschleudert werden die schwere Sch den oder den Tod und oder Sch den an benachbarten Ger ten zur Folge haben k nnte
155. re made of aluminium alloy During normal operation the motor is fed with a voltage of 54 Vac three phase at 646 Hz To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump has to be air cooled and an external fan is available A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 flange NTROLLER Figure 4 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase output converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available optional TV 801 Navigator Bolted Flange User Manual 87 90
156. rna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 Uporaba Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot Na Ar za za ito nosilcev glej prilogo Technical Information 190 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Priro nik za Navodila 15 SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina Crpalke ne uporabljajte v prisotnosti eksplozivnih plinov Vklop in uporaba naprave TV 801 Navigator Bolted Flange Za vkljucitev TV 801 Navigator Bolted Flange morate prikljuciti napetost Vgrajeni kontroler samodejno prepozna za
157. rnal Fan 218 J1 In Out 218 P2 Serial 228 Procedure to Connect the Serial and 1 0 Ports to an External Cable 229 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Contents RS 232 RS 485 Communication Description 230 Window Meanings 235 Air Cooling Kit 239 Connection of the Fore Vacuum Pump 240 Connection to the Pump 240 Pump Used in Presence of Magnetic Fields 242 Accessories and Spare Parts 242 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 13 248 Contents 14 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 22 Accensione ed Uso del TV 801 Navigator Bolted Flange 23 Arresto del TV 801 Navigator Bolted Flange 24 Arresto diEmergenza 24 Manutenzione 25 Smaltimento 26 Traduzione delle istruzioni originali Agilent Technologies 15 20 1 Istruzioni per l uso di Sicurezza per Pompe Turbomolecolari Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantita di energia cinetica dovuta alla alta velocita di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un
158. roducts Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel
159. room inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlage Technical Information WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen Inschakeling en gebruik van de TV 801 Navigator Bolted Flange Om de TV801 Navigator in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De eerste start van de pomp geschiedt op de wijze Soft Start die aan het einde van de startcyclus automatisch ontmachtigd wordt Vandaar dat alle volgende starts niet op de wijze Soft Start geschieden Om opnieuw met Soft Start te starten moet bovengenoemde wijze met behulp van de software gemachtigd worden zie paragraaf RS 232 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED LD1 op het paneel van de basis van de TV 801 ISO F geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 83 248 6 Bedrijfshandleiding a brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is in de status oploop of
160. rriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves da os o incluso resultar fatales Desconectar el cable de alimentaci n antes de ejecutar las operaciones de mantenimiento en el interior de la unidad 60 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de istrucciones 4 Parada de Emergencia Para detener en condiciones de emergencia el TV 801 Navigator Bolted Flange es necesario desconectar del controlador el cable de alimentaci n Mantenimiento El TV 801 Navigator Bolted Flange no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado ADVERTENCIA Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud
161. s pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verificac o dos termos e condic es do contrato de venda 74 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 82 Inschakeling en gebruik van de TV 801 Navigator Bolted Flange 83 Afzetten van de TV 801 Navigator Bolted Flange 84 Noodstop 85 Onderhoud 85 Afvalverwerking 86 Vertaling van de originele instructies i a Agilent Technologies 75 248 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen WA
162. ser tegn p skader der kan vere opst et under transporten S rg for at TV 801 Navigator Bolted Flange ikke tabes eller uds ttes for stod ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse ae ple Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse ITROLLER EL SQ Figur 1 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 91 248 7 Istruktionsbog Normal atmosferisk pavirkning kan ikke skade TV 801 Navigator Bolted Flange Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer stov i pumpen Installation dois tele Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet Dette apparat ma kun installeres i lukkede omgivelser og ma under ingen omstzendigheder benyttes pa steder med skiftende vejrforhold regn is sne stov aggressive luftarter eller i omgivelser med eksplosionsfare eller gget risiko for brand F lgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 10 C til 45 C a relativ luftfugtighed 0 90 ikke kondenserende Hvis pumpen er anbragt i neerheden af elektromagnetiske felter skal den afskarmes Se bilaget
163. si ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al TV 801 Navigator Bolted Flange abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Uso Per l installazione degli accessori opzionali vedere Technical Information In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AVVERTENZA Non far funzionare mai la pompa se Ia flangia di ingresso non collegata alla camera a vuoto o non e chiusa con la flangia di chiusura Non toccare la turbopompa e suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone 22 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D ATTENZIONE Istruzioni per l uso 1 Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi queste pomp
164. so 58 Encendido y Uso del TV 801 Navigator Bolted Flange 59 Parada del TV 801 Navigator Bolted Flange 60 Parada de Emergencia 61 Mantenimiento 61 Eliminaci n 62 Traducci n de las instrucciones originales Agilent Technologies 51 248 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada LILLI NW Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 52 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Manual de istrucciones 4 Informacion general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informacion suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas na
165. ss residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl raQagilent com http www a
166. stere alla suddetta coppia la pompa potrebbe staccarsi dal sistema o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli apparati adiacenti Fissare il TV 801 Navigator Bolted Flange in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8900 Nm attorno al proprio asse Per esempio questa Bolted Flange pu essere fissata con viti in acciaio ad alta resistenza classe maggiore di 8 8 La seguente tabella descrive il numero di viti necessarie e con quale coppia di serraggio stringerle Tab 1 FLANGIA N COPPIA DI SERRAGGIO 160 Bolted 8 5 Nm Il TV 801 Navigator Bolted Flange puo essere installato in qualsiasi posizione Il TV 801 Navigator Bolted Flange non pu essere fissato tramite la sua base TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 21 248 1 Istruzioni per l uso ATTENZIONE Il TV 801 Navigator Bolted Flange appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Il TV 801 Navigator Bolted Flange ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connes
167. szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad IX AS A TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 12 Podrecznik Instrukeji Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 148 Informacje ogolne 149 Magazynowanie 150 Przygotowanie do instalacji 151 Instalacja 152 Mocowanie pompy 153 U ytkowanie 154 W czenie i U ytkowanie systemu TV 801 Navigator Bolted Flange 156 Zatrzymanie TV 801 Navigator Bolted Flange 156 Zatrzymanie Alarmowe 157 Konserwacja 157 Przetworstwo odpadow 158 T umaczenie instrukcji oryginalnej Agilent Technologies 147 248 12 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka energie kinetyczna spowodowana bardzo wysoka pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona PING nad Aby unikn uszkodzenia ap
168. szivatty nak a rendszerhez val csatlakoz sa jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem elegend a nyomat k elvisel s re a szivatty lev lhat a rendszerr l illetve a motorh z lev lhat a szivatty burkolat r l Ebben az esetben f mr szecsk k llhatnak ki a szivatty b l vagy a rendszerb l ami komoly ser lest vagy hal lt s vagy k rnyezet k rosod st okozhat R gzitse a TV 801 Navigator Bolted Flanget stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8600 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal P ld ul az ISO K karima r gzithet nagy teherbir s acelkapcsokkal mint az IC63250DCMZ Agilent t pus A k vetkez tablazat mindegyik karim hoz megmutatja az IC63250DCMZ kapcsok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot Tab 1 KARIMA N R GZ T NYOMAT K 160 csavarozott 8 5 Nm A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gz teni a v kuumkamr hoz R szletes le r s rt l sd Technical Information A TV 801 Navigator Bolted Flange b rmely helyzetben telep thet A TV 801 Navigator Bolted Flange nem r gz thet az alapj n kereszt l TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 141 248 11 Felhaszn l i K zik nyv dla akan ATV 801 Navigator Bolted Flange a m sodik telep t si vagy t lfesz lts g kateg
169. t renoverat system Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mot en renoverad enhet maste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 109 248 8 Bruksanvisning Bortskaffande 110 248 Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Denna symbol som endast g ller f r lander inom Europeiska gemenskapen anger att produkten p vilken den sitter INTE kan skaffas bort tillsammans med vanligt hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor W N N LA 4 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper112 Generell informasjon 113 Lagring 114 Klargjore
170. t shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applic
171. te weerstaan zou de pomp van het systeem of de motor van het pomplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het rond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig de TV 801 Navigator Bolted Flange in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8900 Nm rondom de eigen as te weerstaan Deze flens Bolted Flange kan bijvoorbeeld worden vastgemaakt met sterke stalen schroeven klasse hoger dan 8 8 In de volgende tabel staat het benodigde aantal schroeven en het bijbehorende aandraaimoment Tab 6 FLENS NR AANHAAL KOPPEL 160 Bolted 8 5 Nm De TV 801 Navigator Bolted Flange kan in alle standen worden geinstalleerd De TV801 Navigator kan niet met behulp van zijn eigen basis worden bevestigd TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 81 248 6 Bedrijfshandleiding OORZICHTIG De TV 801 Navigator Bolted Flange behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De TV 801 Navigator Bolted Flange bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen
172. the metallic case and the external shield of the wire Moreover this operation has to be done at least on the controller side In this way you will be sure to reduce the influence of the external noise and to accomplish the EMC requests In picture d is showed the cable assembled ES SHILDED CABLE Picture a HIEL 7 SHIELD SOLDERED T CONNECTOR METALLIC CASE Picture b SHELL D b Picture d ASSEMBLED SHELL Figure 20 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 229 248 17 Technical Information RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit a no parity 1 stop bit a baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way the host MASTER send a MESSAGE CRC to the controller SLAVE a 1 the controller answer with an ANSWER CRC to the host 2 the MESSAGE is a string with the following format lt ST
173. tions Preparation for Installation The TV 801 Navigator Bolted Flange is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the TV 801 Navigator Bolted Flange Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 199 248 16 Instructions for Use Figure 1 Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system 200 248 Install this device only in indoor ambient and in any case don t use in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected a maximum pressure 2 bar above atmosph
174. to 75 corresponding to an output frequency from 272 Hz to 646 Hz linearly The duty cycle percentage is referred to the low level portion of the PWM signal PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the following example diagram 220 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 0 Output V Frequency Hz Figure 11 FAULT this open collector output signal is ON when a system fault condition is detected PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz a hysteresis 1 a actiation type high level TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 221 248 17 Technical Information N gt Set point output Vdc 4
175. tor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie a z kazn k mus pri prvom spusten turbo v vevy v dy pou i re im soft tartu a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania 174 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Navod na Obsluhu 14 POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis Pr prava na in tal ciu Zariadenie TV 801 Navigator Bolted Flange sa dod va v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spl a po i
176. tor Bolted Flange predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontrol rom Syst m dok e vy erpa ubovo n typ plynu alebo plynnej zmesi Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 38000 ot ok min tu poh an vysokov konn m 3 fazovym elektrick m motorom Zariadenie TV 801 Navigator Bolted Flange neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv l mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 173 248 14 N vod na Obsluhu Navod na pouzitie obsahuje tieto Standardn oznacenia 3132418138 Varovania maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Upozornenia ozna uj postupy nedodr anie k
177. tructions for Use Disposal 206 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D TV 801 Navigator Bolted Flange User Manual 17 Technical Information Description of the TV 801 Navigator Bolted Flange 209 Pump Description 210 Controller Description 211 Technical Specification 212 TV 801 Navigator Bolted Flange Outline 215 Interconnections 217 P3 Vent 217 P4 External Fan 218 J1 In Out 218 Signal Description 219 How to Connect the Output Open Collector of the Controller 223 How to Connect the Outputs of the Controller 226 P2 Serial 228 Procedure to Connect the Serial and 1 0 Ports to an External Cable 229 RS 232 RS 485 Communication Description 230 Communication Format 230 Communication Protocol 230 Examples 233 Window Meanings 235 Original Instructions Agilent Technologies 207 248 17 Technical Information Air Cooling Kit 239 TV 801 Bolted Flange with Navigator Controller 239 Connection of the Fore Vacuum Pump 240 Connection to the Pump 240 Pump Used in Presence of Magnetic Fields 242 Accessories and Spare Parts 242 208 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Technical Information 17 Description of the TV 801 Navigator Bolted Flange The TV 801 Navigator Bolted Flange is composed by a pump 869 8933 with an envelope with fins and a shroud with two fans and a dedicated navigator controller SQ 337 The pump is equipped with a ISO 160
178. truksjon Manual Normale milj messige belastninger kan ikke delegge TV 801 Navigator Bolted Flange Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving Installasjon Serie Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet Dette apparatet m bare installeres i lukkede lokaler Det m iallfall ikke installeres i lokaler som er utsatt for v r og vind regn frost sn st v aggressive gasser i eksplosive eller brannfarlige milj er Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 10 C til 45 C se diagram i tillegget Teknisk informasjon relativ fuktighet 0 90 uten kondens Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Teknisk informasjon for detaljer TV 801 Navigator Bolted Flange m koples til en hovedpumpe se skjema i Technical Information 116 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Instruksjon Manual 9 Festing av pumpen Dersom rotoren odelegges kan tilkoplingen mellom pumpen og systemet utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til tale dette dreiemomentet kan pumpen losne fra systemet eller motoren kan losne fra pumpens hylster dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet De
179. tte kan fore til alvorlige skader eller dod og eller skader p annet utstyr i n rheten Fest TV 801 Navigator Bolted Flange i en stabil posisjon monter turbopumpens innl psflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 8900 Nm rundt sin egen akse For eksempel denne Bolted Flange kan festes med ekstra resistente st lskruer klasse over 8 8 F lgende tabell viser det n dvendige antall skruer og de korresponderende torque fester Tab 1 FLENS ANT STRAMME MOMENT 160 Bolted 8 5Nm TV 801 Navigator Bolted Flange kan monteres i en valgfri stilling TV 801 Navigator Bolted Flange m ikke festes gjennom fundamentet TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 117 248 9 Instruksjon Manual FORSIKTIG TV 801 Navigator Bolted Flange h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 801 Navigator Bolted Flange er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til TV 801 Navigator Bolted Flange har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden Bruk For installasjon av tilleggsutstyr vises det til
180. turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszcz cych gaz w pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot Argon dla zabezpieczenia o ysk Patrz dodatek Technical Information ZAGROZENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych tatwo palnych lub radioaktywnych nalezy wykonac odpowiednie procedury typowe dla kazdego z gaz w Nie stosowac pompy w obecnosci gaz w wybuchowych TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 155 248 12 Podrecznik Instrukcji W czenie i U ytkowanie systemu TV 801 Navigator Bolted Flange Aby w czy TV 801 Navigator Bolted Flange wystarczy dostarczy napiecie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygna w interlock u i uruchomienia i uruchamia pompe Pierwsze uruchomienie pompy odbywa sie w spos b Soft Start kt ry na zakonczenie cyklu uruchomienia wytacza sie automatycznie i dlatego tez wszystkie nastepne uruchomienia odbywaja sie bez sposobu Soft Start Aby m c ponownie uruchomi z Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 COMMUNICATIO
181. uc es 5 ilL Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou gas inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos consultar o ap ndice Technical Information UA Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presenca de gases explosivos Acendimento e Utilizac o do TV 801 Navigator Bolted Flange Para ligar o TV 801 Navigator Bolted Flange suficiente fornecer a tens o de alimentac o O controller incorporado reconhece automaticamente os sinais de interlock e de activac o e acciona a bomba O primeiro accionamento da bomba faz se em Soft Star que no fim do ciclo de arranque se desactiva automaticamente portanto todos os sucessivos arranques da bomba n o ser o em Soft Start Para poder arrancar a bomba em Soft Start ser preciso reactivar o modo acima referido utilizando o software consultar o par grafo RS 232 COMMUNICATION DESCRIPTION no a
182. ude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj enj izklop naprave TV 801 Navigator Bolted Flange je treba izklju iti napetostni kabel iz napetosti Vzdr evanje Naprave TV 801 Navigator Bolted Flange ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z novim Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi 192 248 TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Priro nik za Navodila 15 Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v drzavah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate
183. v st s ov nap t Integrovan regul tor automaticky zji uje blokov n p tomnost spou t c ch sign l a uvede v v vu do provozu Prvn spu t n v v vy je v re imu pozvoln ho rozb hu Jakmile bude rozb hov cyklus dokon en re im pozvoln ho rozb hu se automaticky vypne a dal starty ji budou prob hat bez pozvoln ho rozb hu Chcete li op t zapnout re im pozvoln ho rozb hu mus te jej aktivovat pat i n m programov m p kazem viz odstavec Popis komunikace RS 232 485 v p loze Technical Information Zelen kontrolka um st n na eln m panelu z kladny v v vy TV 801 Navigator Bolted Flange indikuje provozn stavy syst mu blik n m bez blik n v v va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav Vypnut v v vy TV 801 Navigator Bolted Flangese Sroubovanou p rubou V v va TV 801 Navigator Bolted Flange se roubovanou p rubou se vypne odpojen m s ov ho nap t Vestav n kontrol r v v vu okam it zastav TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 167 248 13 N vod k Pou it Pro zaji t n bezpe nosti obsluhy mus b t controller erpadla Turbo V nap jen troj ilov m p vodn m kabelem viz tabulka d
184. vattuja asennusohjeita on noudatettava tarkasti 124 248 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D Ohjekasikirja 10 Yleisia tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TV 801 Navigator Bolted Flange on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 38000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori TV 801 Navigator Bolted Flange j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin TV 801 Navigator Bolted Flange j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista
185. ve 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held raspansible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Pg 2 3 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging EEG
186. ven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Einschaltung und Gebrauch von Modell TV 801 Navigator Bolted Flange Zur Einschaltung von Modell TV 801 ISO F ist es mit der erforderlichen Versorgungsspannung zu versorgen Der eingebaute Controller erfa t automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Die Erstinbetriebnahme der Pumpe erfolgt im Modus Soft Start der sich nach dem Anlaufzyklus selbstt tig abschaltet Daher erfolgen alle nachfolgenden Pumpenanl ufe ohne den Modus Soft Start Um die Pumpe erneut im Modus Soft Start zu starten ist dieser Modus mittels der Software wieder freizugeben siehe Abschnitt RS 232 COMMUNICATION DESCRIPTION im Anhang Technical Information TV 801 Navigator Bolted Flange User Manual 87 900 980 01 D 35 248 2 36 248 Gebrauchsanleitung Die griine LED LD1 an der Bodenplatte von Modell TV 801 ISO F gibt mit der Haufigkeit ihres Blinkens die Betriebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stoppen von Modell TV 801 Navigator Bolted Flange Zu

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