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Model 4200-SCS Semiconductor Characterization System

1. Definition Sheet Graph Status Formulas _Seveds Click to export data A B a D E L M N A 1 Time 1 Drainl 1 Drain 1 __ Gate 1 Time Time 4 Drainl 4 Draii 2 000 0000E 3 000 0000E 3 000 0000E 3 2 0000E 0 796 0000E 3 E 0 2 3900E 0 000 0000E 3 000 3 15 0000E 3 000 0000E 3 100 0000E 3 2 0000E 0 812 0000E 3 E 0 2 4060E 0 000 0000E 3 100 4 31 0000E 3 000 0000E 3 200 0000E 3 2 0000E 0 828 0000E 3 E 0 2 4210E 0 O000 0000E 3 200 5 46 0000E 3 000 0000E 3 300 0000E 3 2 0000E 0 843 0000E 3 E 0 2 4370E 0 000 0000E 3 300 6 62 0000E 3 O00 0000E 3 400 0000E 3 2 0000E 0 659 0000E 3 E 0 2 4530E 0 000 0000E 3 400 7 78 0000E 3 000 0000E 3 500 0000E 3 2 0000E 0 875 0000E 3 E 0 2 4680E 0 000 0000E 3 500 8 93 0000E 3 000 0000E 3 600 0000E 3 2 0000E 0 890 0000E 3 o E 0 2 4840E 0 000 0000E 3 600 9 109 0000E 3 000 0000E 3 700 0000E 3 2 0000E 0 906 0000E 3 E 0 2 5000E 0 000 0000E 3 700 10 125 0000E 3 000 0000E 3 800 0000E 3 2 0000E 0 921 0000E 3 NOE O 2 5150E 0 000 0000E 3 800 11 140 0000E 3 000 0000E 3 900 0000E 3 2 0000E 0 937 0000E 3 pe 0 2 5310E 0 000 0000E 3 900 12 156 0000E 3 000 0000E 3 1 0000E 0 2 0000E 0 953 0000E 3 A0E 0 2 5460E 0 000 0000E 3 11 13 171 0000E 3 000 0000E 3 1 1000E 0 2 0000E 0 968 0000E 3 E 0 2 5620E 0 000 0000E 3 __1 14 187 0000E 3 000 0000E 3 1 2000E 0 2 0000E 0 98
2. 1 2 3 4 i Click OK to Continue 6 A Prober prompt test window B Dialog box Line 1 Parameter value 3 specifies three lines of text to be displayed Lines 2 thorough 5 Text messages to be displayed in dialog box when testing is finished see B Dialog box Running the test sequence To test the five wafer sites 1 Manually align the prober to test Subsite 1 of Site 1 Make sure the prober pins are making contact with the wafer probe pads 2 Inthe project navigator click probesubsites in the KITE project navigator to select the project 3 Click the green Run button gt to execute the test sequence NOTE Because a manual probe station is being used the prober will not actually move when the prober control UTMs are executed However a pop up dialog box will appear instructing you to move the probes to the next subsite in the test sequence 4200 900 01 Rev H February 2013 Return to Section Topics 4 25 Section 4 How to Control Other Instruments with the Model 4200 SCS Start 4 26 The test sequence is shown in Figure 4 35 After the prober is initialized by the prober init command the tests for subsite 1 and subsite 2 are performed at site 1 The last test for site 1 probe ss move moves the prober to site 2 where the subsite tests are repeated After all five sites are tested the prober pins separate from the wafer prober separate anda dialog box prober prompt will alert yo
3. lo 40 loaf gt OLOO i E oioi dg 7 7 2 2 7 gt i Shielded Serial Cable RS 232 Connector 4200 900 01 Rev H February 2013 Return to Section Topics 1 9 Section 1 Getting Parallel Port Connector Started Model 4200 SCS User s Manual Connecting a printer As shown in Figure 1 6 a printer can be connected to the parallel port of the Model 4200 SCS If you are using a USB printer connect it to one of the v2 0 USB connectors Figure 1 6 Printer connections Shielded Parallel Cable Parallel Printer Model 4200 SCS A Seb aeeaue DeeS aa e Ea aE E aana AA AEEA TAE wows SRE TASS AIAN B ES a A rc r o o O Eg re fe fe Pe Pe Parallel Connector 2 Jo Jo fo Jo S e le JO 2 e e e Q O O o ed A a A a 2 USB Printer alla al fal fal Pal fa USB Connectors USB A B Cable O USB Connector Connecting a LAN The two LAN connectors on the Model 4200 SCS are standard RJ 45 connectors intended for use with unshielded twisted pair UTP cable For best results use only CAT 5 UTP cables equipped with RJ 45 connectors to connect your LANs as shown in Figure 1 7 If IP addresses are statically assigned a different IP address will be needed for each of the two LAN ports F
4. Keithley Instruments provides a number of standard user libraries to control external equipment used in semiconductor characterization applications Standard libraries of user modules for the following equipment are provided in Table 4 1 Table 4 1 Supported external equipment table Category Instrument Keithley user library additional information Switch matrix Keithley Model 707 707A Switching Matrix matrixulib Model 4200 SCS Reference Manual Capacitance meter Keithley Model 590 CV Analyzer ki590ulib Model 4200 SCS Reference Manual ki595ulib Model 595 Quasistatic CV Meter Instruction Manual document number 595 901 01 ki82ulib Model 4200 SCS Reference manual Hewlett Packard Model 4284 LCR Meter hp4284ulib Model 4200 SCS Reference Manual Pulse generator Hewlett Packard Model 8110A Pulse Generator hp8110ulib Model 4200 SCS Reference Manual Keithley Model 340X Pulse Generator KI340xulib Model 4200 SCS Reference Manual Probe station Karl Suss Model PA 200 Semiautomatic probe station prbgen Model 4200 SCS Reference Manual Micromanipulator Model 8860 Semiautomatic probe station prbgen Model 4200 SCS Reference Manual Manual or Fake probe station prbgen Model 4200 SCS Reference Manual Test fixture Keithley Model 8006 Component Test Fixture not applicable Keithley Model 8007 Semiconductor Test Fixtur
5. 4200 900 01 Rev H February 2013 MyProject Keithley Interactive Test Environment 4terminal n fet tr File view Project Run Tools Window Help x CoN gt gt Baxi Fee xl equence S M E MyProject a M 5 ree AiE Test Sequence Table Test Library a M minal VE vdsid Test Name UID c s4200 kiuser T ests v ds id 1 JE vtin ws e _cvu a YHE subvt vilin 1 BT F v JE vgs id subvt i a E Capacitor E OE igvg TRI E iv vgs id i a Diode MLE cv nmostet g E i a E Flash a MK 3terminal npn ig vi 1 ry ad a E FlashSwitch MME vceic cy nmosfet 1 9 General MJE gummel a a E JFET a AME vosat C MOSFET B MAA 2 wireresistor T 3 ME res2 a E MyTestLib My a E NanoTech GMD diode a 7 E fd a Resistor S E 123xyz ME vid v A _NNhiss bi ME cv diode vE cap Include Data e MyProject 4terminal n fet Changing KITE startup behavior To stop the Default project from opening automatically when starting KITE or to change the project that opens when starting KITE perform the following steps see Figure 3 9 To change KITE startup behavior 1 Select the KITE Tools Options menu item 2 To change which project opens when starting KITE click the Change button and change the default KITE project 3 To stop any default project from opening when staring KITE uncheck the Load Default Project checkbox See the Reference Manual Customizing KITE page 6 338 for
6. __ smu v Bulk GNDU Assigns a Model 4200 SCS FORCE MEASURE FORCE MEASURE instrument to this device termi Pee penne Waele Comandi EESE EN nal Stop SY Range V Best Fixed Step 1 Compl 0 14 Paints 4 FORCE MEASURE button Click to configure the selected instrument Source Instrument object Displays a een ECE aa summary of the settings for the Biss viv Mema ND instrument object Compt 0 1A JE vds idt 1 Workspace window tab Schematic of the device When workbook mode is enabled per Reference Manual being tested by this ITM Specifying environment preferences page 6 340 each project plan component window that is active in the KITE workspace can be accessed quickly by selecting its Workspace window tab For details about defining and configuring an ITM refer to the Reference Manual Configuring the Project Plan ITMs page 6 86 Defining a UTM This section covers general information about defining a UTM For specific information about KITE projects which use either ITM or UTMs see Reference Manual KITE projects page 6 5 A UTM is defined using the UTM definition tab displayed by double clicking the UTM name in the project navigator Figure 2 5 and Figure 2 6 illustrate and explain the two versions of the UTM definition tab Figure 2 5 defines the PMU 1Ch wfm UTM in the PMU DUT Examp1es project The PMU DUT Examples project has several UTMs for use with the Model 4225 PMU Dual Channel Pu
7. voltage V Voltage Vv 0 0E 0 30 0E 3 60 0E 3 Time s Time s Channel 1 Pulse Period s 0 056001 V Enable Channel1 Channel 2 Pulse Period s 0 056001 MV Enable Channel 2 KEITHLEY Table 3 26 Segment ARB parameter values for example waveforms PMU1 Channel 1 Segment Start V Stop V Time s Trigger HEOR 1 0 8 20 00 E 8 1 1 2 8 8 50 00 E 4 0 1 3 8 0 20 00 E 8 0 1 4 0 0 10 00 E 4 0 1 5 0 7 20 00 E 8 1 1 6 7 7 5 00 E 2 0 1 7 7 0 20 00 E 8 0 1 8 0 0 20 00 E 8 0 1 PMU Channel 2 Segment Start V Stop V Time s Trigger HEOR 1 0 0 20 00 E 8 1 1 2 0 0 50 00 E 4 0 1 3 0 0 20 00 E 8 0 1 4 0 0 10 00 E 4 0 1 5 0 5 20 00 E 8 1 1 6 5 5 5 00 E 2 0 1 7 5 0 20 00 E 8 0 1 8 0 0 20 00 E 8 0 1 4200 900 01 Rev H February 2013 Return to Section Topics 3 105 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 106 NOTE HEOR The Solid state relay SSR on the output of each pulse channel that provides a high impedance disconnect Entering Segment ARB values into UTM array parameters The second method for defining a Segment ARB waveform is by entering values into arrays for the UTM tests Program e Erase e Fast Program Erase These UTM based Segment ARB waveforms have been partially pre defined to reduce the number of parameters required Figure 3 102 defines the parameters for the
8. Description of three terminal NPN BJT tests vce ic This test runs nested l V sweeps to generate an n p n transistor collector family of curves Collector current is plotted vs collector voltage gummel This test runs two voltage sweeps on the collector and base to produce a Classic n p n transistor Gummel plot vce sat This test runs a voltage sweep on the collector uses formulator functions to calculate ICSAT and VCSAT and plots a collector l V curve to show the n p n transistor saturation voltage Two wire resistor test By default the following test uses two SMUs It is also possible to use one SMU and the GNDU see Figure 3 4 3 6 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 4 Two wire resistor test Definition Sheet Graph Status Test Notes SMU1 v B SMU2 v FORCE MEASURE FORCE MEASURE Sweep V Master Measure I YES Bias OV Measure NO Type Linear Ltd4uto 1e 0114 Measure NO Start 1 Measure YES Compl 0 14 Stop 1 Range Y Best Fixed Step 0 04 Compl 0 14 Description of two wire resistor test res2t This test runs a simple negative to positive voltage sweep across a two wire resistor and plots the current vs voltage Diode tests By default these tests use two SMUs It is also possible to use one SMU on the anode and the GNDU on the cathod
9. 0 e00e 2 24 Data file management 002 cece eee eee eee 2 24 Using file and test result directories 0 cece eee 2 24 Default user director C S4200 kiuser eee eee 2 24 Devices subdirectory 002 2c cece eee eee eee 2 25 Understanding device libraries 22 2000055 2 25 How to create and adda new device 00e eee eee eee 2 27 Projects subdirectory 00 00 cee eee eee 2 28 Tests S bdirectofy ysis itoni aa o aa ele acaed le ale aa ace 2 29 Usrlib subdirectory 200 2c cee ee 2 31 System directory C S4200 sys 0 ee eee 2 31 How to manage numeric test results in Sheet tab 2 31 Displaying and analyzing data using Sheet tab 2 31 Section 2 Model 4200 SCS Software Environment Opening a Sheet tab Understanding and using the Data worksheet of a Sheet tab Understanding the formula box of the Data worksheet Understanding the data source identifier Saving a worksheet How to manage graphical te Opening a Graph tab st results in the Graph tab Accessing the Graph tab windows 2 0005 Opening the graph settings menu 2 2 55 Understanding the graph settings menu 00005 Defining data to be graphed 20000 eee ee eee Understanding table columns in the Graph Definition window Un
10. Configuration C Use the following settings to source AC drive voltage to terminal A source DC bias voltage to terminal B and measure AC current at terminal B CVU Terminal Properties x Simplified Test Circuit AC DC Source MeasureI Source Offset CVH1 4 O O 0 v CYL1 B O O Configuration D Use the following settings to source AC drive voltage and DC bias voltage to terminal B and measure AC current at terminal A Measure ACI Source ACV DUT x Simplified Test Circuit CVU Terminal Properties AC DC Measure ACI Source Y MeasureI Source Offset CYH1 A ja M O fo y CVL1 B O O Status With Status enabled as shown in Figure 3 12 the following errors will be reported in the sheet and graph tabs when a measurement fault occurs 3 18 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests e ABB fails to lock AC voltage high overflow e AC voltage low overflow e AC current overflow For more information refer to the Reference manual CVU measurement status page 15 160 Compensation After making connections for the test connection compensation must be performed and enabled before running test See the Reference manual Connection compensation page 15 16 to perform connection compensation The CVU compensation window shown in Figure 3 15 is used
11. 3 126 Running the Program or Erase UTM 22 ccctecceceeeeteceedeceeteeeeteetieeees 3 127 Running the Fast Program Erase UTM 0 ecccceceeeeeeeeeeeeeeneeeeeeeeeaees 3 129 Running the SetupDG UTM osc cc ec ccccecee se cnaaceeetcaaseeeetacaeeeeedteaaeceeetceaas 3 130 Running the VtMaxGm TTM ossis ees peecteens aina aE eas 3 130 Running the ConPin Pulse or ConPin DC UTM Switch projects only 3 130 FlashEndurance NAND tests 2 cccecceeceeeeeeeeeeeeeeaceeeeeeeeeeeeeeees 3 131 Running a FlashEndurance or FlashDisturb project cee 3 138 Running endurance or disturb lOOpING 2 cccceeeteceeeeeeeneeeeeeeeeeees 3 140 FlashDisturb tests cccccceceeeeeeeeeeececeeaeceeeeeeeeeeeseeeeccencaeeaeeeeeeeeeees 3 141 Explanation of flash UTM parameters cccceceeeseeeeeeeeceeceeeeeeeeeeees 3 142 BEYNON CG aca docs seenaccadaancnacenetaccoedexeamsadiavhaascddcerd aneneoeauanud T 3 144 TPR SS GOWNS eiaa tovnned cet auastadedee aren dencauwenedcddasaaeadeesauais 3 145 How to perform Charge Pultiping 0 c c0cccecsicceedeessnsceevesssaneeeetessaceedeesae 3 146 How to perform a Charge Trapping test cccccceceeeeeeeeeeeeeetceteeeeeeeees 3 147 Slow single pulse charge trapping high K gate stack ceeee 3 147 Charge trapping ProCeCure cceeeeeeeeeceeeneeceeeeeeeeeeeeteteeeencaaneeeneees 3 148 4 How to Control Other Instruments with
12. ma e 8 5 E a z To Scope 2 65 To Scope Card Ch 2 z 5 a Card Ch 1 z oO 2m 6ft SMA cable E o fF 2m 6ft SMA z g Q 5 cable 2 lt To 4205 PG2 Ch 1 2m 6ft SMA cable To SMU1 Force amp Sense To SMU2 Force amp Sense Pair of 2m 6ft Triax Pair of 2m 6ft Triax cables cables Figure 3 34 Pulse IV connections using the 8101 PIV test fixture 15cm 6in white SMA cable CA 405 15cm 6in white SMA cable CA 405 AC DC AC DC IN1 IN2 o5 o5 To 4200 e BPR E Of gt dD SCP2 Ch 1 a 65 To 4200 SCP2 Ch 2 a o5 2m 6ft zZz lt 6 2m 6ft white SMA 0 SMA cable g cable Q 4205 RBT 1 4205 RBT 2 To 4200 PG2 Ch 1 2m 6ft SMA cable Lo To SMU1 Force amp Sense Pair of 2 m 6 ft Triax cables To SMU2 Force amp Sense Pair of 2m 6ft Triax cables 3 34 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 35 DUT inserted in pulse socket of 8101 PIV test fixture Tab on DUT aligns above notch in socket Source Body Drain Sate Source ae Body Drain ZY Gate A Using the PulselV Complete project for the first time To use the PulselV Complete project 1 Connect PIV A as explained above in PIV A interconnect assembly procedure on page 3 33 2 If KITE is not running start KITE by double clicking the KITE icon on the Model 42
13. General Purpose Test Instrument Hewlett Packard 81110 Pulse Generator Dual Channel 3 Set the GPIB Address for the pulse generator by selecting it in the configuration navigator and entering the appropriate GPIB Address on the Properties amp Connections tab This is illustrated in Figure 4 40 Figure 4 40 Pulse generator configuration E Keithley CONfiguration utility File Tools Help Bo KI System Configuration qq KI 4200 SCS F KI 4200 MPSMU SMU1 KI 4200 PreAmp F KI 4200 MPSMU SMU2 Properties amp Connections T r Instrument Properties Model Hewlett Packard 8110 Pulse Generator Single channel KI 4200 PreAmp GEIB Address 4 KI 4210 HPSMU SMU3 Channel 1 se Channel Module KI 4200 PreAmp Channel 2 E9 KI 4210 HPSMU SMU4 Een Moed KI 4200 Pre mp Expansion Module m KI Ground Unit GNDU E HP 8110 Pulse Generator PGUINST1 e HP 811034 Pulse Channel Module PGL1 r Matrix Connections Terminal Name Terminal ID OUTPUT 1 PGU1 4 Add the Keithley Model 707 707A Switching Matrix to the system configuration using the KCON Tools menu as illustrated in Figure 4 41 Figure 4 41 Adding a switch matrix IEAS Help Add External Instrument Switch Matrix Keithley 707 7074 Switching Matrix i Capacitance Meter gt Keithley 708 7084 Switching System Pulse Generator gt Probe Station
14. Asterisks appear next to all parameter names listed under Data Series Sheet Indicates whether the data comes from the Data worksheet the Calc worksheet ora specific Append worksheet Column Lists the parameter s Data Calc or Append worksheet column label A B C and so on 4 KITE assumes that first row cells contain variable names However a first row Calc worksheet cell is allowed to contain a number and KITE displays such a number under Data Series Avoid placing numbers or any unwanted plot parameter names in the first row of a Calc worksheet 5 For more information about generation and use of Append worksheets refer to Append execution of tests test se quences and Project Plans Understanding and using Append worksheets of a Sheet tab and Appending curves from multiple runs on a single graph in Section 6 of the Reference Manual 4200 900 01 Rev H February 2013 Return to Section Topics 2 43 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual X Y1 and Y2 Are the axes of the graph as follows Xis the X axis Y1 is the Y axis on the left side of the graph Y2 is the Y axis on the right side of the graph NOTE The scale and label of the Y2 axis are allowed to be different from the scale and label of the Y1 axis The cells under the X Y1 and Y2 may be selected and deselected by clicking the boxes If you select a cell under X the corresponding Data S
15. PulselVCal JE vaime JE vosie off Piciectview E vosidpuls E vasidpuls E vosidpute IE scope shot J E vdsidpuie IS Autocatic JIE PulselvCal JE vaime JE vosie num 89M Running vgs id pulse UTM The default Vgs id pulse uses the same default settings as the DC Vgs id see Figure 3 43 If comparing Vgs ld results for DC and Pulse IV use this pulse only routine and the Comparing DC and pulse results or use the single DC and Pulse UTM as described in Running vgs id pulse vs dc UTM Alternately the source values may be entered using the UTM GUI 1 Ensure that the Vds VgStart VgStop VgStep values match the values in the DC Vgs id To sweep from a high to a low voltage enter voltages so that VdStop lt VdStart and use a negative value for VdStep If any values need to be modified remember to press the Enter key after typing in the value 2 Click the green Run button 3 To add or update the DC results on the pulse Graph perform the procedure for Comparing DC and pulse results 4 To reduce noise the smaller subthreshold currents of this test require a larger number of measurements to be averaged For best results on smaller signals Id lt 500uA use AverageNum 0 to enable the adaptive filtering mode where lower scope ranges will use a large AverageNum and higher ranges a lower AverageNum If desired a fixed number may be entered for AverageNum Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 S
16. 0060 Dat 3068 Dat 21363 Dat 5140063 ofS Projectviow E vdsidpulse E vosidpuise E vasitpukse E vdsidnosel scope shot Adjustable parameters in scopeshot_cal_pulseiv Vds DC voltage for the drain Vgs Pulse voltage level for gate PulseWidth Vgs pulse width full width half maximum FWHM PulseAmplitude PulsePeriod GateRange DrainRange Vgs gate voltage pulse Vgs pulse period When using the Pulse IV setup with RBTs use a PulsePeriod 1000 x PulseWidth to keep the pulse duty cycle less than or equal to 0 1 For most cases it is best to use 200 E 6 that will allow an appropriate duty cycle across the range of supported 40 150 ns pulse widths Scope card gate voltage range Use 0 for autoranging or a specific value for a fixed range The scope range is centered around zero so the 5 V range on the scope covers 2 5 V to 2 5 V As an example fora 3 V signal use GateRange 10 5 V to 5 V not 5 2 5 to 2 5 V Available ranges for the scope card 0 05 0 10 0 25 0 5 1 2 5 10 V Scope card drain voltage range Use 0 for autoranging or a specific value for a fixed range To calculate an appropriate fixed range use DrainRange Estimated Id x 50 x 2 See above for valid scope card ranges Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Aver
17. 2 Inthe Save In edit box of the save as window select the location for the text file 3 Inthe File name edit box of the save as window Keithley Instruments recommends that you retain the default selection which contains the data source identifier refer to Understanding the data source identifier 4 Inthe Save as type box make no changes retain the x1s type 5 Click Save NOTE Do not attempt to use the save as button to save data to the project plan Understanding Append worksheets The following applies to the worksheets that are created by Append executions e The data generated for each Append execution of a test is located in an individual Appendn worksheet where n designates the nth Append execution For example the worksheets are labeled Append1 Append2 and soon NOTE You can specify the maximum number of Append executions and worksheets the maximum value of n After the maximum number of Append worksheets have been generated the data from each Append execution replaces the data from the previous Append execution For example if the maximum value of n is 4 the data from the fifth Append execution replaces the data from the fourth Append execution Refer also to Append execution of tests test sequences and Project Plans in Section 6 of the Reference Manual 4200 900 01 Rev H February 2013 Return to Section Topics 2 37 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s
18. Title Opens the title window which allows you to add and format a title Same function as title in the main menu Crosshair Toggles the display of a pair of intersecting lines that can be positioned anywhere on the graph For more information refer to the Reference Manual Visually reading plot coordinates using cross hairs page 6 242 Save as Opens the save as window which allows you to save a graph in bitmap bmp format for use elsewhere such as in a report For more information refer to the Reference Manual Saving a graph as a bitmap file page 6 285 Synchronize graphs For use when the presently open graph is one of several graphs for the same test each graph representing the data for a different site Selecting synchronize graphs automatically configures the graphs for all sites identically using the open graph as the master For more information refer to the Reference Manual Identically configuring the graphs resulting from one test executed at multiple sites page 6 283 Move Toggles between a normal cursor and a crossed arrow cursor Moving the crossed arrow cursor moves the graph allowing you to relocate it on the Graph tab For more information refer to the Reference Manual Changing the position of a graph page 6 283 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Reset Causes colors graph size and graph pos
19. 00 cece cette eee 3 148 4200 900 01 Rev H February 2013 Return to Section Topics 3 3 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual How to perform an l V test on my device NOTE Itis assumed that the reader of this section already has a basic understanding of the Model 4200 SCS software environment and terminology Please review Model 4200 SCS Software Environment page 2 3 before proceeding to Section 3 Default project overview The Keithley Interactive Test Environment KITE default project contains more than ten of the most common I V tests a typical user might perform on a regular basis These tests serve as examples and intended to be copied and modified to work for your own devices These default tests cover 4 terminal FETs three terminal BJTs two terminal diodes resistors and capacitors The KITE project default should open automatically upon starting the KITE application If it does not the default project can be found at C S4200 kiuser default default kpr Upon opening the default project in KITE observe the following tests see Figure 3 1 Figure 3 1 Project Plan Default 5 Default Keithley Interactive Test Environment File View Project Run Tools Help f Proiect Plan Default ee A E r B MFE subsite a MAE 4terminal n fet vds id vtlin subvt vgs id ig g cv nmosfet rminal npn vce ic gummel vesat ireresistor res2t Fai Fa a Fs Q
20. If desired specify a measurement delay seconds after each stress interval to allow each device to equilibrate before measuring its parameters Simpler example Stress Measure Cycle Times First Stress Time 10 0 Total Stress Time Stress Measure Delay 0 0 et atau Return to Section Topics 3 69 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 55 Specifying timing List Sequence Subsite Setup Subsite Data Subsite Graph M Enable Cycles Stress Measure Mode Segment Stress Measure Mode Cycle Mode Stress Measure Cycle Time Cycles C Linea C Log Stress Times Number of Cycles l 100 00 150 00 Last Stress Time 200 00 1000 00 Number of Stresses Stress Measure Delay 10 0 Device Stress Properties Stress Time 1000 Remove Periodic Test Interval Log ia Total Cycles Rate s Am Periodic Select List Enter a Stress Time Click the Add button to add the stress time to the Stress Times list Repeat steps 2 and 3 to add more stress times to the list Sere a Saa 1 2 3 4 To remove a stress time select the entry in the Stress Times list and click Remove If desired specify a measurement delay seconds after each stress interval to allow each device to equilibrate before measuring its parameters Step C2 Specify number of cycles cycle mode only Figure 3 56 Specifying the number of cycles
21. P i Alinan Pega ee ie E m neon Netedtaeef i Eme Fast Stvecr Court a io S Ar keran Tota 5 wars Court focona m Hunter Sserez 1D Breese PO 3 Ta iz Fasod Tari r ersal Lag f Total Celer Aois iP 4 off Poper SE Fete HN i227 PA Figure 3 123 FlashDisturb NAND project device stress properties Desioa Stross Prepertios Gma Settings ates sae 7 BOTE Sat SMU pan toi boindicste hiak areedancs rence used hes coving atenanssath a P32 suas 0 ETE 0 t ahas 0 Y MH 0 Y Pilak L Pie DIS Jaris ome a SHish joie a Meam i Dra maa fo E EN or Sane Pubes oies f ooir aE Vg bot CT poe puei sath i Poth ted bf BEL chewed 1 Elhe j tee Pt so F Q i 53 Paerata Proparoa Ceg adas ayati Du put Valses Abs Target mga Yske a Mae Gn Pogu WT To no Davee Hane Ploatngaabe Me Was Gere Emei bs eoj a0 ce Priwe Deste Piest Device gt gt iky coy Paste Paste to an sates Ca Explanation of flash UTM parameters NumPulse Terminals int The number of pulse terminals or pulse channels to use for the test The number of pulse terminals ranges from one to eight PulseTerminals char A string representation of all the VPU channels being used in the test matching the number given in NumPulse For example if the setup is such that VPU1 Channel 1 and VPU2 3 142 Return to Section Topics 4200 900 01 Rev H February 2013 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual
22. e Create UTMs from supplied or user programmed C code modules e Automatically execute tests and associated operations switch matrix connections prober movements and so on including a A single test for one selected device transistor diode resistor capacitor and so on b A sequence of tests for one selected device c Asequence of tests for multiple devices for example all of the devices contacted by a prober at a given touchdown or subsite location on a semiconductor wafer 4200 900 01 Rev H February 2013 Return to Section Topics 2 3 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual d A sequence of tests for an entire project plan which may include multiple prober touchdowns for a single semiconductor site or die For one site For multiple sites e View test results numerically and graphically e Analyze test results using built in parameter extraction tools e View the analysis results numerically and graphically e Interactively build and edit test execution sequences using the project navigator Graphical User Interface Figure 2 1 shows the KITE GUI interface The various parts of the GUI are summarized below the figure Figure 2 1 KITE interface overview 1 2 3 4 5 default Keith ey Interactive Tes Environment OFFLINE vds id 1 1 VE Fie View ER ep Help DESS He xA Definition Sheet Graph Status Project Tree eig defeat iG 1 Timing
23. 4 KI 4210 HPSMU SMU3 m Matrix Connection j KI 4200 PreAmp TerminalName iy Terminal ID 4 KI 4210 HPSMU SMU4 INPUT CMTRIL ce Beh Preamp OUTPUT CMTRI 1 KI Ground Unit GNDU p KI 590 CV Analyzer CMTR1 4 Save the configuration using the KCON File menu as illustrated in Figure 4 61 Figure 4 61 Saving the system configuration JES Tools Help ve Configuration Save Configuration as Web Page Ctrl W Print Configuration Ctrl P Exit Create a new project To create a new project 1 On the KITE toolbar select New Project from the File menu see Figure 4 62 to open the define new project window The new project definition window is shown in Figure 4 63A Figure 4 62 New project menu selection File View Project Run Tools Help lt r O Open Project Import Project Exit 2 Type inthe name of the project cv and define it as shown in Figure 4 63A The directory path shown in the location box is the default location where the factory defined projects are located Make sure the specified number of sites is 1 and initialization and termination steps are Off 4200 900 01 Rev H February 2013 Return to Section Topics 4 39 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual 3 With the project defined as shown in Figure 4 63A click the Ok button at the bottom of the window The project name will appear in the pro
24. A saved seg_arb ksf waveform file can be imported back into the pulse generator card using the seg_arb_file function For Segment ARB stress measure testing the ksf file can be imported using the KITE Device Stress Properties dialog box shown in Model 4200 SCS Reference Manual Section 6 Figure 6 393 For details about Segment ARB stress measure testing see the Reference Manual Segment stress measure mode page 6 323 Custom file arb waveforms full arb peubereseessauseusaeseneses Waveform i A Waveform 5 8 PORPP PEO A E AEA T O E T O A ORA IAEI AE E N OE OI A E E A ET E Figure 5 6 summarizes the basic processes to create a custom full arb waveform file to load the file into a pulse card and to output the pulse waveforms Figure 5 6 Basic process to create and output custom file Arb waveforms i PG2 Tab Sequencer Scratch Pad Channel 1 SQUARE Copy SINE2 gt RAMP1 gt RAMP1 Custom Arb File i SQUARE1 B RAMP2 Waveform Type i i SINE2 RAMP2 ckaf File Channel 1 i Turn On Save As i Output i sear ey Channel 2 i Channel 2 i i SQUARE1 i i Sl SQUARE1 B Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 5 How to Generate Basic Pulses To create custom file arb waveforms full arb A Select and configure waveforms e After selecting an available waveform type
25. Figure 1 32 Chassis ground amp INSTRUMENT CONNECTIONS SMU ONLY SENSE LO GUARD SENSE LO COMMON SMU AND GNDU SENSE GUARD COMMON Chassis Earth Ground Connecting DUTs Test fixtures There are two types of test fixtures for the Model 4200 SCS e Low voltage fixtures less than 20 V and high voltage greater than 20 V e High voltage fixtures require extra precautions to ensure there are no dangerous shock hazards 1 40 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started WARNING To avoid exposure to high voltages that could result in personal injury or death whenever the interlock of the Model 4200 SCS is asserted the FORCE and GUARD terminals of the SMUs and preamps should be considered high voltage even if they are programmed to a non hazardous voltage current Testing with less than 20 V with SMUs A test fixture equipped with three lug triax connectors is necessary to connect the Model 4200 SCS discrete device for testing Figure 1 33 shows a basic test fixture to use with a two terminal device For best performance when testing with less than 20 V follow these standard industry practices e Use a metal test fixture e Connect the metal fixture to COMMON e Mount the DUT on high resistivity terminals for example Teflon e Guarding will reduce leakage and parasite capacitance t
26. Figure 1 36 Interactive Test Module vds id The checkbox for vds id must be checked in order to run the test If unchecked click the checkbox to insert a 4 Double click the vds id test icon and the test Definition tab as shown in Figure 1 35 is displayed oa default MZE subsite 3 WHE 4terminal n fet ME Rasia MIE vtin MME subvt MIE vas id MME iova La PEF Cy i ow N 1 44 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Test definition The test is defined from the test Definition tab shown in Figure 1 37 As shown in the Definition tab the device is connected to three SMUs and one Ground Unit GNDU In general SMU3 is used as a voltage step function to provide four different gate voltages 2V 3V 4V and 5V SMU2 is used to perform a 51 point sweep of drain voltage OV to 5V at each gate voltage A current measurement is performed at each voltage sweep point To define a test A If desired the setup for SMUs and the GNDU can be changed A settings window is dis played by clicking the appropriate force measure bar as shown in Figure 1 37 Figure 1 37 Vds id Definition tab How to display a setup window for SMUs and GNDU Definition Sheet Graph Status Formulator Timing Exit Conditions Output Values Speed Nomal Mode Drain SMU2
27. Identifies the terminal for example gate drain source collector anode and so on Identifies and allows assignment reassignment of the terminal to match the SMU GNDU or open circuit that is physically connected to the terminal during the test Displays the present forcing function and measurement options for the terminal Identifies and allows assignment and configuration reconfiguration of SMU forcing function and measuring options A single click of the force measure button displays the Forcing Functions Measure Options window for the terminal e Provides access to the Formulator which allows in test and post test data computations e Allows setting of preconfigured speed or custom timing parameters for the ITM e Allows exit conditions to be set if the source goes into compliance Allows you to select the measured readings output values that you want exported to the Subsite Data sheet e Displays the present test mode Sweeping Sampling Understanding the ITM forcing functions Table 2 2 summarizes the available ITM forcing functions which tells the Model 4200 SCS how to apply static or dynamic voltage or current conditions to device terminals Table 2 2 SMU Forcing function summary General type Name Description and graphical illustrations Static Open Maintains a zero current state at the terminal subject to the maximum voltage compliance of the connected SMU Common
28. The pulse IV user library contains modules required to provide low duty cycle pulsed IV testing The modules contained in the pulse IV user library are listed in Table 3 3 with detailed information following the table Table 3 3 Pulse IV UTMs User Module Description cal_pulseiv Performs a cable compensation routine vdsid_pulseiv Performs a pulsed Vd ld sweep vdid_Pulse_DC_Family_pulseiv Performs a Pulsed vs DC Vd ld sweep vgld_DC_DC_pulseiv Performs a Pulsed vs DC Vg ld sweep vgsid_pulseiv Performs a pulsed Vg lg sweep scopeshot_cal_pulseiv Used to display a single Pulse IV scopeshot_pulseiv scopeshot_pulseiv Displays a single Pulse IV scopeshot vdsid_pulseiv_demo Performs a pulsed Vd ld sweep with simplified parameter list vgsid_pulseiv_demo Performs a pulsed Vg Id sweep with simplified parameter list cal_pulseiv Description The cal_pulseiv module is used to perform a cable compensation routine for the 4200 PIV package This routine permits the system to compensate for losses in the cabling from the 4200 to the connection to the DUT Use this routine during initial system setup and whenever changes are made in any part of the interconnect cables 4200 RBTs probe manipulators or pins There are two main steps to this procedure e Open cal the gate signal is measured while there is no connection to the DUT e Through cal the drain signal is measured while making contac
29. ccccccceeeeeeeeeeeeeencaeaeeeeeeeeeeeeeeees 5 2 KPulse Goting Slane a ucid castles ina KaL aAa SaN ANa 5 2 RP UN E E E E E E E aapeccante ed 5 3 Standard pulse Wavolor mS cei ccccessicsccsasaaedadecaraneheceavaededauesaaedccetasaaadccedasidn 5 4 Segment ARB waveforms ooesicrccnnesinnrsiiinini a 5 6 Custom file arb waveforms full arb sssseesseseeenesesrrnsseeenneseennnrsseennnnne 5 8 eea E E E ETE A nae At l 1 4200 900 01 Rev H February 2013 In this section Topic Page Installation and system connections 005 1 3 Unpacking the Model 4200 SCS cc eee eee eee 1 3 Inspection for damage 20022e eee eee eee 1 3 Shipment contents 0 00 ee 1 3 Manual package 2002 cece eee eee eee 1 3 Repacking for shipment 2002220 eee 1 3 Environmental Considerations 20 2205 1 4 Shipping and storage environment 1 4 Operating environment 20 222ee eee 1 4 Powering up the Model 4200 SCS 00 eee eee 1 5 LINE POWER 2 0eg hia ee Ae oa ee Ge Wa ad AA a 1 5 Line power connection 000 c cee eens 1 6 Line frequency setting 0002 cece e eee 1 6 Line TUS S riaria eat ee fe te a tee ee ae 1 7 Warm up period cee 1 7 System connections 0 c eee eee ee 1 7 Connecting the keyboard and mouse 1 7 Connecting GPIB instruments 2 1 8 Conn
30. gt F 000 0000E 3 m 000 e ame 4 Degradation targets Lists the tests and Output Values for this device Targets can be enabled and the Target Values can be set in or Absolute Value Click to enable or disable all Targets See Degradation targets ol VtextLin 1 lt lt Prev Device Next Device gt gt Click to cancel all changes and close window See Clear copy paste and paste to all sites 6 Fora multi device Subsite Plan click Next Device to display the stress properties window for the next device Clicking Prev Device selects the previous device See Device selection 5 Use the pull down menus to control Stress Measurements Options include Do Not Measure First Stress Only Every Stress Cycle See Stress measurements 9 When active enable t leave the outputs on after the end of a stress cycle See Leave stress conditions on 11 When finished setting the stress properties for all devices and all sites click OK 12 In the Subsite Plan tab 7 Repeat steps 2 through 6 P P pg see Figure 3 51 click for all devices in the Subsite Plan 8 Repeat steps 1 through 7 to configure the Device Stress Properties for another site This button appears only when AC Voltage Stress is selected Click this button to open the window to make common settings for the Kei
31. B My Computer Vi By default the usr1ib subdirectory contains the KULT user libraries that are provided with each version of KTE Interactive Also by default you can access all Model 4200 SCS user libraries when operating KITE and KULT For more information about this directory refer to the Reference Manual Managing user libraries page 8 38 System directory C S4200 sys All binary and executable files that KTE Interactive needs to control the Model 4200 SCS are stored in the sys folder directory NOTE The files stored in the sys folder directory must not be modified not even by system administrators This folder must reside on the Model 4200 SCS hard drive How to manage numeric test results in Sheet tab Displaying and analyzing data using Sheet tab The Sheet tab of an ITM or UTM window is used to record and manipulate numerical test data and settings There is a Sheet tab corresponding to every ITM UTM for each site All data in the worksheets of the Sheet tab is exportable in Microsoft Excel format A Sheet tab is the same as a Microsoft Excel compatible workbook that always contains at least the following three worksheets e Data worksheet The Data worksheet of the Sheet tab records all of the numerical test data that is generated every time you execute an ITM or a UTM at a given site The Sheet tab Data worksheet also records data generated by the formulator Return to Section Topics 4200 900 0
32. Displays a window that contains version and copyright information How to control a switch matrix This tutorial demonstrates how to use a switch matrix to connect any instrument terminal to any test system pin automatically The ivswitch sample project will be used to illustrate this functionality Before loading and running the ivswitch project the Model 4200 SCS switch matrix and component test fixture must be connected as illustrated in Figure 4 7 The switch matrix is controlled by the Model 4200 SCS using the GPIB bus Use a Model 7007 GPIB cable to connect the Model 707 Switching Matrix to the Model 4200 SCS For connection details refer to the Reference Manual KI 70X Switching Matrix Properties tab page 7 29 and Test connections for a switch matrix page 15 11 The example below shows a Model 7174A matrix card installed in slot 1 of a Model 707A Switching Matrix The row column connection scheme is used for this tutorial A UTM is used to control the switch matrix When a test sequence for a device is started the UTM will close the appropriate matrix crosspoints to connect the specified instrument terminals to the 4200 900 01 Rev H February 2013 Return to Section Topics 4 7 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual 4 8 appropriate test system pins For details about UTMs refer to the Model 4200 SCS Reference Manual
33. Generates a collector family of curves Ic vs Vc for the transistor Moves the prober to next subsite connect vce ic 1x probe ss move Subsite2 4terminal n fet Connects the SMUs to the probes for the N channel MOSFET see connecE Figure 4 31 Generates a family of curves Ip vs Vp for the MOSFET vds id 2x 3terminal npn bjt Connects the SMUs to the probes for the NPN transistor see Figure 4 32 connect Generates a collector family of curves Ic vs Vc for the transistor vce ic 2x Moves the prober to the first subsite of the next site probe ss move TerminationSteps The following steps occur after all three sites are tested prober separate Separates the prober pins from the wafer see Figure 4 33 prober prompt Displays a pop up window indicating that testing is finished see Figure 4 34 Figure 4 30 prober init User Libraries pben o User Modules Pai o Name In Out Type Value mode Input INT 6 x_die_size Input DOUBLE 2 200000e 001 y_die_size Input DOUBLE 2 200000e 001 x_start_position Input INT 0 y_start_position Input INT 0 units Input INT 1 subprobtype Input INT 0 Line 1 Parameter value 6 selects the Learn control mode Assumes that the probe list is maintained by the prober controller software Lines 2 and 3 These parameters along with the units setting in Line 6 input a die size of 22 mm x 22 mm Lines 4 and 5 These parameters input the initial prober po
34. Range Relay Output Relay HEOR Output Relay High Speed or Closed or Open Off or On SMA High Voltage S p f we Connector Channel Output High Speed Vsrc About the pulse cards The following chart shows a comparison of features between the Model 4220 PGU and the Model 4225 PMU Table 1 5 Feature comparison of pulse cards Model 4220 PGU Model 4225 PMU Standard 2 level Pulse Yes Yes Segment ARB Yes Yes Full Arb Source only Yes Yes High Endurance Output Relay Yes Yes solid state relay SSR Integrated Current and Voltage No Yes Measure Supports option Model 4225 RPM No Yes with lower pulse current measure ranges and SMU CVU switching Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Firmware upgrade for the Model 4200 PG2 The firmware can be upgraded to allow the Model 4200 PG2 to configure and output Segment ARB and full arb waveforms However since the Model 4200 PG2 does not have the HEORs and an input trigger connector the related operations cannot be performed These exceptions will be noted where appropriate in this section The instructions to upgrade the firmware of the Model 4200 PG2 to KITE V6 2 are available by clicking on the Model 4200 SCS Complete Reference icon on the Model 4200 SCS desktop Follow the links for release notes then look for the firmware upgrade procedure for the pulse ca
35. i T FORCE MEASURE Click to set up SMU2 Sweep V Master Measure YES Type Linear Ltd uto 1e 010A Start OV Measure V YES Stop SV Range V Best Fixed Step 0 1V Compl 0 14 ts 51 Click to set up SMU3 Click to set up GNDU Gate y SMU3 vf l Bulk GNDU eal FORCE MEASURE i Step V Master Measure ENO Common OV Measure NA Start 2V Measure V YES Measure V NA Stop 5V Range V Best Fixed Step 1V Compl 0 14 Points 4 Source SMUT x Click to set up SMU1 _p gt FORCE MEASURE Bias V OV Measure NO Measure V NO Compl 0 14 oe deat JE vdsidh B Figure 1 38 shows the settings dialog box for SMU3 The settings dialog box for the other SMUs and GNDU are similar 4200 900 01 Rev H February 2013 Return to Section Topics 1 45 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 38 Setup for SMU3 Forcing Functions Measure Options Device Terminal Gate Instrument ID SMU3 Instrument Information Instrument ID SMU3 Instrument Model KI4210 HPSMU with PreAmp Mode Sweeping Defrton sheet Graph Status 7 5 Feamuistr _Tiring Evt Conditions Output Values Forcing Function Voltage Step v M Master Voltage Step Function Parameters Click to set These parameters set the gate voltage steps 2V 3V 4V and 5V Data Points Compliance 0 Src Range Best Fixed v Power On Delay Measuring Options I Current M Voltag
36. m fiif 2 LP Q fal a JETRO Y RE RRRARORROKR a f ProjectView 3 4 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 4 terminal n MOSFET tests By default the following tests use three source measure units SMUs and one ground unit GNDU It is also possible to use four SMUs one for each device under test DUT terminal see Figure 3 2 For more information about the vds id Definition tab refer to the Test definition page 1 45 Figure 3 2 4 terminal n MOSFET tests Definition Sheet Graph Status Test Notes Timing Exit Conditions Output Values Speed Normal v Mode Drain SMU2 z FORCE MEASURE Sweep Master Measure YES Type Linear Ltd amp uto 1e 0104 Start OV Measure Y YES Stop 5Y Range V Best Fixed Step 0 1 Compl 0 14 Paints 51 Gate SMU3 v Bulk GNDU FORCE MEASURE FORCE MEASURE Step Y Master Measure NO Common OY Measure NA Start 2 Measure Y YES Measure Y NA Stop 5Y Range V Best Fixed Step 1 Compl 0 14 Paints 4 Source SMUT FORCE MEASURE Bias Y OY Measure NO Description of 4 terminal n MOSFET tests vds id This test generates a family of l V curves on a 4 terminal n MOSFET and plots drain current versus drain voltage vtlin This test runs a typ
37. ox HT Hold Time Run SD Built In System Delay Test Int Programmed Interval Meas Measure Time Sweep function Force measure timing for a sweep function is similar to the timing for a bias function shown in Figure 1 20 with the following differences e The hold time is repeated at the beginning each subsequent sweep step e A programmed delay is used in place of the interval Pulse cards The Keithley Instruments pulse cards are two channel high speed voltage pulse generator cards that provide the following types of output There are two pulse generator instrument cards available for Model 4200 SCS e Model 4220 PGU Pulse Generator Unit e Model 4225 PMU Ultra Fast IV Module Both cards offer e Two output channels e Standard 2 level pulse Segment ARB waveform Full Arb Each output channels has two output ranges e 10 V into high impedance 5 V into 50 Q e 40 V into high impedance 20 V into 50 Q The Model 4220 PGU is a 2 channel voltage pulse generator The Model 4225 PMU is also a 2 channel voltage pulse generator but includes integrated simultaneous current and voltage measurement with two A D converters for each channel Both can be isolated from the DUTs by a high endurance output relay HEOR The HEOR is typically used for applications that require high speed high volume switching of the output A pulse card can be programmed for continuous pulse output or set to output a finite number of pulses bur
38. refer to the Reference Manual seg_arb_file page 8 138 seg_arb_sequence and seg_arb_wavform These more advanced functions can be used by the Models 4220 PGU and 4225 PMU cards to define a Segment ARB waveform see seg_arb_sequence and seg_arb_waveform in Section 8 of the Reference manual NOTE Because of resources necessary to run the Segment ARB engine an additional 10 ns interval is added to the end of the last segment of a Segment ARB waveform During this interval the output voltage HEOR and trigger output values remain the same as the final value reached in the last segment Full arb NOTE _ If the firmware for the Model 4200 PG2 has been upgraded to KITE V6 2 it can be used to configure and output full arb waveforms see Firmware upgrade for the Model 4200 PG2 earlier in this section Each channel of the pulse generator can be configured to generate its own unique full arb waveform A full arb waveform is made up of user defined points up to 262 144 Each waveform point can have its own unique voltage value A time interval is set to control the time spent at each point in the waveform Figure 1 24 shows an example of a user defined full arb waveform The waveform is made up of 80 voltage points with the time interval between each point set to 10 ns The arb_array function is used to define a full arb waveform This function includes parameters to specify the number of waveform points length the time interval TimePer
39. 0 2 0 cee eee 4 13 How to control a probe station 0 05 4 15 Prober control overview 00220e cece eee eee 4 16 Test system connections 000 eee eee eee eee 4 17 KOON S tUp oireitani Sate ea kek Rae waked aka a Coke aac 4 18 Probe station configuration 00220ee ee eee 4 20 Open the probesubsites project 200020e 4 21 Open the project plan window 00 200eeeeee 4 21 TeSt deScriptions iii ici ice ca race a ee role a aoe al wed 4 22 Running the test sequence 2 2000e ee eeee 4 25 TeSt data ii 3 ie sei eh eee he E S Baebes 4 26 Running individual plans or tests 4 27 How to control an external pulse generator 4 27 Test system connections 000 cece eee eee 4 28 KCON Setup ccd nnana eel ete od caved a eee ae a 4 28 Open the ivpgswitch project 000e eee eee 4 31 Description of tests ccc eee 4 32 Firste nnect testi ices jal ce atari te a epee ele bead 4 32 Firstid Vg testien E ie ate Reena dane peta eden 4 32 Second connect test 0022 cece eee eee 4 33 POUT MINNIE testi ia na oicn re esate calenin fcn a atest call eia ged oneredyerra aus 4 33 pg f set p test i cece ate eal a te eee tele ae 4 34 pgu trigger test 2 2c eee 4 34 Third connect test 20 cee eee ee eee ee 4 34 Second id vg test 022 c eee ee 4 34 Running the
40. 1 Offset V 0 Phase Degrees 0 v 8 5 gt Notes f At Time Per Point OF 1e 008s 2 0E 02 4 0E 02 6 0E 02 8 0E 02 1 0E 03 Period Se 006s Points Frequency 200000H2 Preview Cancel Square waveform An example of a square waveform using the default settings is shown in Figure 5 11 The waveform for this example is named SQUARE1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 11 Square waveform default settings Waveform Generator Waveform Type Square y Waveform Name SQUARE1 Settings Points Per Cycle 500 Number Of Cycles fz Amplitude v 1 Offset fo Phase Degrees ic Duty Cycle fs Rise Time points jz Fall Time points jz Voltage Vv oO oO oO _ ES a o Fd N Notes 0 0 At Time Per Point OF 1e 008s O 0E 00 2 0E 02 4 0E 02 6 0E 02 8 0E 02 1 0E 03 Period Se 006s Frequency 200000H2 Points Triangle waveform An example of a triangle waveform using the default settings is shown in Figure 5 12 The waveform for this example is named TRIANGLE1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad 4200 900 01 Rev H February 2013 Re
41. 300k Hz DC Bias 1 Yy v Data Points 3 Voltage 15 m AMS Measuring Options Measure Model Measured IV Test Conditions Column Names Column Names Cp_AB Gp_AB DCV_AB F_AB Parameters Cp Gp 7 DCY F H2 NOTE AB gt A to B I Status Compensation Cancel When this test is run see Figure 3 21 the following force measure sequence occurs 1 The DC source goes to the PreSoak voltage of 5 V for the hold time period 2 The DC bias goes to 1 V for the system delay and programmed delay time periods 3 The Model 4200 CVU performs a measurement for the first frequency point 100 kHz The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Step 3 is repeated for the other frequency points The system delay and programmed delay are repeated for each subsequent measurement The sweep delay hold time and output disable are set from the ITM timing window for sweeping Figure 3 22 CVU Frequency Sweep bias output PreSoak 5V 100kHz 300kHz Start 200kHz Stop Bias 1V HT 8b Delay Meas E Delay Meas D Delay Meas ov HT Hold Time AC Voltage 15mVRMS Trigger SD Built In System Delay Delay Programmed Delay Meas Measure Time 4200 900 01 Rev H February 2013 Return to Section Topics 3 23 Section 3 Common Device Characterization Tests CVU Frequency Sweep step Model 4200 SCS User s Manual
42. ConnectPins GUI V E Program W E Erse MI E Fast Program Erase Name n Out_ Type VI E Open VPU Relay OpenAll Input INT MIIE Conpin DC TermidStr1 Input CHAR_P ME Vi MaxGm Pint Mise 8Teminal FloatingGate MIE Conpin Pulse 8 M E Program 8 M E Erese 8 l A B Fast Program Erase 8 MODULE ConnectPins DESCRIPTION The ConnectPins module allows you to control your switch lt gt e Projectview x 2008 706 16 08 18 39 Model PreAmp configuration in saved test differs from system 2i configuration Performing auto adjustment INUM Figure 3 111 ConPin Pulse test GUI definition dialog Connect Pins Matrix Outputs S05 6 o e r C C C WE W E a a a 5 3 a 7 Running any Flash Project for the first time 1 Connect up the Model 4200 SCS FLASH package using the Flash Connections instructions for one of the following configurations 4200 900 01 Rev H February 2013 Return to Section Topics 3 125 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 126 2 a Direct connection no switch matrix to single DUT Use Figure 3 95 and Direct connection to single DUT b Direct connection no switch matrix to array DUT Figure 3 96 and Direct connection to array DUT for disturb testing c Switch matrix connection to array or single DUT Use Figure 3 97 and Switch matrix connection to array DUT See procedures below for using a specific Fl
43. Cycles Specify here the total number of no stress measurements only Number of Cycles foo cycles Maximum number of cycles is 128 Step D Set periodic test intervals stress measure mode log timing only In the Periodic Test Interval Log area you can specify uniform periodic intervals at which to interrupt the stress to perform tests These are in addition to the intervals specified under Stress Measure Cycle Times Specify these intervals as shown in Figure 3 57 NOTE You can use the Periodic Test Interval Log area only if you select Log in the Stress Measure Cycle Times area the Periodic Test Interval Log area is disabled if you select Linear 3 70 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 57 Setting periodic test intervals Periodic Test Interval Log Total Cycles Rate s dm Periodic Periodic Test Interval Log MV Enable Periodic Testing foo Total Cycles Rate s 0 0 w Periodic lI In the Rate s field enter the periodic interval in seconds at which stressing is to be stopped and tests are to be performed in addition to any intervals that are specified in the Stress Measure Cycle Times area Periodic Test Interval Log Total Cycles w Periodic Rate s 1000 0 KITE calculates the Total Cycles w Periodic the total number of cycles based on the Stress Measure Cycle Times and the Periodic Test Interval Th
44. Ea E es Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 94 Flash NAND pulsevoltages array entry and prepulsedelays entry __ 000 0000E 3 5 0000E 6 000 0000E 3 3 5 0000E 6 000 0000E 3 5 0000E 6 Cancel Cancel Pulsevoltages array PrePulseDelays array Flash connections The Flash package includes all the necessary cables and adapters required for the test connections Also included is an 8 in Ib torque wrench for tightening the SMA connections The Model 4200 SCS Flash package has four channels of multi level pulse capability The number of SMUs is configurable For a system without switching it is best to have four SMUs to match the number of pulse channels to connect to a three or four terminal DUT For a direct connect configuration the minimum number of pulse channels is equal to the number of DUT terminals that need to be simultaneously pulsed including terminals that must change from connected to disconnected or open states see Figure 3 82 and Figure 3 88 for either the program or erase condition The minimum number of SMUs is determined by the measurement tests and the number of DUT terminals NOTE The 4205 PG2 card is referred to as a VPU voltage pulse unit in the software Figure 3 98 shows the items that are supplied with the Flash package Interconnect diagrams for flash testing are shown in F
45. Figure 3 23 shows an example of a FFMO window with CVU Frequency Sweep step selected as the forcing function to measure Cp Gp The Sweeping test mode must be selected for this test see Figure 3 11 Figure 3 23 Forcing Function CVU Frequency Sweep step Forcing Functions Measure Options Device Terminal A Instrument ID CVH1 Instrument Information Instrument ID CVU1 Forcing Function Instrument Model KICVU CVU Frequency Sweep v M Master CVU Frequency Sweep Function Parameters DC Bias Conditions C Bias Step PreS oak La lv gt Start Doo v gt Stop 2 v x Step 1 y v Data Points 3 Measuring Options Measured Column Names AC Drive Conditions Start Frequency 100k Stop Frequency 200k Z Data Points Voltage 30 mVY RMS M Test Conditions Column Names Cp_AB Gp_AB Parameters Cp Gp Z DCV_AB F_AB DEY F H2 NOTE AB gt A to B IV Status Compensation When this test is run see Figure 3 24 the following force measure sequence occurs 1 2 3 gt NO The DC source goes to the PreSoak voltage of 1 V After the hold time DC bias goes to OV After the system delay and the programmed delay the Model 4200 CVU performs a measurement for the 100 kHz frequency point The AC signal is applied just before the start of the measurement After another system delay and programmed delay a measurement is performed for the 200
46. Maintains a zero voltage state at the terminal subject to the maximum current compliance of the connected SMU Current Maintains a selected constant current state at the terminal subject to the user specified voltage bias compliance for the connected SMU Voltage Maintains a selected constant voltage state at the terminal subject to a user specified current bias compliance of the connected SMU 2 14 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Table 2 2 continued SMU Forcing function summary General type Name Description and graphical illustrations Sweep Current Increments a series of current values or voltage values at a rate that is determined by the timing and sweep speed settings in the ITM definition tab Generates parametric curve data that is recorded in the Sheet tab Data worksheet for the ITM and can be plotted in the ITM Graph tab Voltage sweep Linear sweep ne Log sweep z 100 10 Time Time List Current Steps through a list of user specified current values or voltage values at a rate that is determined by the sweep List timing and speed settings in the ITM definition tab Generates parametric data that is recorded in the ITM Sweep Sheet tab Data worksheet and can be plotted in the ITM Graph tab if appropriate Voltage Arbitrary List function Sweep Time
47. Model 4200 SCS E VEN le a LOO OOC O O O OA T A E G E ETEO K A RSR E R ESR R i EE EE A acess scenes eee nna me EEEE E EEEa 1 OTTO TTO O O Fan oe Os 5 a S fo x Q Jos OQ O O O 2 Oz wor ronce ronce a rence a Q 10 10 ower Receptacle amp Line Fuses r a B a a A alla allay Pal fal fa 3 5 USB External 7 9 2 0 4 Monitor Interlock IEEE 488 Mouse 10 Keyboard 6 8 ides LAN Trigger Link nea 1 Fan Provides system cooling 2 Power receptacle and Connects to line power through supplied line cord Two line line fuses fuses protect the unit 3 Two v2 0 USB connectorsInterfaces to peripherals for example pointing devices printers scanners flash drives external hard drives and CD ROM drives 4 Mouse and keyboard Included Y cable to connect the mouse or other pointing connector device and the system keyboard see the Reference Manual Figure 2 1 5 External monitor port Used to connect an external CRT or other monitor 6 Two LAN connectors Interfaces the unit to an Ethernet local area network 7 Interlock connector Connects to test fixture or prober safety interlock 8 Trigger Link connectors For future use only Do not use WARNING Using the Trigger Link connectors can cause malfunction or damage to the Model 4200 SCS These connectors are for future use only and should not be used 9 IEEE 488 connector Connects to peripherals or computer with GP
48. NOTE Refer to the Forcing functions and measure options page 3 14 for details on the bias and sweep forcing functions Figure 1 17 DC bias waveform example Frequency 1MHz AC Voltage 15mVRMS Run Test Samples 15 Meas Meas Meas 1 2 15 Figure 1 18 DC voltage sweep example Stop 5 00V e Run Test Neas Ov 51 4 60V 4 80V Frequency 1MHz Start 5 00V AC Voltage 30mVRMS Meas 1 Figure 1 19 Frequency sweep example 100kHz 4MHz Start 200kHz Stop l Bias v VE Run Test Meas Meas Meas 1 2 10 AC Voltage 30mMVRMS Force measure timing Bias function Timing for the force measure process for a bias function is shown in Figure 1 20 When the test is started the following timing sequence takes place 1 The DC source outputs the presoak voltage for the hold time period 2 The DC source goes to the DC bias voltage 1 24 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started 3 After the built in system delay and time Interval periods the Model 4210 CVU performs a measurement The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Step 3 is repeated for every measurement Figure 1 20 Force measure timing PreSoak 5V Bias 1V ar leo Int Wiese ob Int rea
49. Notepad The bmp files can be created or modified using bitmap editing software such as Microsoft Paint The following procedure illustrates how to add a new device named new mosfet to the default Device Library 1 Inthe MOSFET directory locate the following three files which define the existing library device called 3terminal n fet e 3terminal n fet kdv e 3terminal n fet bmp for the project navigator device icon e 3terminal n fet big bmp for the ITM definition tab device graphic Copy 3terminal n fet bmp to a new file called new mos fet bmp If required modify new mosfet bmp using Microsoft Paint Copy 3terminal n fet big bmp file to a new file called new mosfet big bmp If required modify the new bitmap using Microsoft Paint Copy the 3terminal n fet kdv file to a new file called new mosfet kdv oak wN 2 28 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment 7 Edit the new mosfet kdv file with Notepad by replacing all occurrences of 3terminal n fet with new mosfet The edited new mosfet kdv file should appear as shown in Figure 2 18 All six lines are required Figure 2 18 Contents of the Keithley Device file new mosfet kdv new mosfet kdy Notepad oi x File Edit Search Help Bitmaps Small new mosfet bmp Big new mosfet big bmp Terminals Number 3 Orientation N Dra
50. On Time Off Time cumulative measure time if set to measure e Pulse width On Time Pulse mode can be selected only when source and measure ranges are fixed Pulse mode is disabled if the source or measure range is set to AUTO Pulse on and off times can be set from 5 ms to 10 s The base voltage or current that can be set is dependent upon the present source range An example pulse output for the voltage bias forcing function is shown in Figure 2 7 Pulse output goes to the specified pulse level during the pulse on time If the SMU is set to measure the measurement will occur after the on time expires and before the transition to the off time level This effectively increases the on time by the amount of time required to make the measurement Minimize this extra time by choosing custom in the timing tab and setting delay and filter factor to 0 and A D Integration factor to 0 01 This is the fastest but least accurate measurement timing scheme If not set to measure the output will transition from on to off During pulse off time the pulse output returns to the specified base voltage level After the off time expires the output returns to 0 V For a sweep forcing function pulse output steps to the sweep step levels during the pulse on times During the off times pulse output returns to the specified base voltage or base current level if set to measure th
51. PW 150 ns so Period 150us AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set AverageNum 0 for Adaptive Filtering GateScpRange double The voltage measure range for the scope channel measuring the Gate Use 0 for scope autoranging or specify a voltage value for a fixed range Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 These ranges are Vpp For example the 0 5 range covers 250 to 250 mV DrainScpRange double The voltage measure range for the scope channel measuring the Drain Use 0 for scope autoranging or specify a voltage value for a fixed range where V I 50 Q Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 These ranges are Vpp For example the 0 5 range covers 250 to 250 mV GateSMURange int The current measurement range to be used for the SMU on the DUT Gate terminal Values correspond to the table below Limited Auto means that the value given is the minimum measurement range used with automatic ranging for larger currents 1 Full Auto 2 Limited Auto 10 pA 3 Limited Auto 100 pA 4 Limited Auto 1 nA 5 Limited Auto 10 nA 6 Limited Auto 100 nA 7 Limited Auto 1 pA 8 Limited Auto 10 pA 9 Limited Auto 100 uA 10 Limited Auto 1 mA 11 Limited Auto 10 mA 12 Limited Auto 100 mA DrainSMURange int The current measurement range to be used for the SMU on the DUT Drain terminal Values correspond to the table below Limited Auto means that the va
52. Pulse1Voltages PrePulse1Delays TransitionTimesPulse1 Pulse1Widths PostPulse1 Delays Pulse2Voltages PrePulse2Delays TransitionTimesPulse2 Pulse2Widths PostPulse2Delays NumPulses Section 3 Common Device Characterization Tests Channel 2 are being used then PulseTerminals should look like this VPU1CH1 VPU2CH2 There are no spaces in this list of channels double Array of voltage values for the pulse height 0 V referenced of first pulse on each pulse channel Valid values range from 20 V to 20 V All voltage levels assume a 50 Q load In order to float a channel disconnect pulse output from a DUT pin using the Solid State Relay use 999 Minimum time required for a SSR open or close is 100 us double Array of time values used as a delay before the first pulse is output Valid values range from 20 ns to 1s in 10 ns increments s double The amount of time it will take the first pulse to rise fall 0 100 100 0 from the BaseValue 0 V to the given Pulse Voltage If the pulse voltage level is from 5 to 5 V then the valid transition times are from 20 ns to 33 ms in 10 ns increments else if pulse voltage is within 20 to 20 V then valid values range from 100 ns to 33 ms in 10 ns increments s double Array of values defining the pulse widths for the first pulse of each channel Minimum values are 20 ns to 1 s Pulse width is defined as FWHM so it includes half of the fall time and half of
53. TOSt CONMGILIONS esera ke eset aad a ae eo ete ee ee eae ao nee 3 16 Advanced settings terminal properties 20 222 eee eee eee 3 16 Statusin does ana A E ann ade ES wire ara E ahaha aha sen SEa 3 18 Compensation ee eeina Gad a aie a ae RR a aes 3 19 CVU ITM exam ples ns niaaa a Beene ar ai a ise ue Raveena see i ace aie 3 19 GVU Voltage Bias ieii trayan aaa aaiae A eei e Aari canine ceed hese one hades eterna apnea 3 19 CVU Voltage Sweep 1 ccc eee een eee teens 3 20 CVU Voltage List Sweep 2 00 eee eee 3 21 CVU Frequency Sweep bias 200 eee eee 3 22 CVU Frequency Sweep Step 0 0 eee eee eee eee 3 24 How to perform a Pulsed l V test on my device 00 0c cece eee eee 3 25 Introduction PIV A and PIV Q 00 cece eee eee 3 25 What is Pulse lV c ci0 ccachs incites a eee een av E ae nee eee 3 26 Why udse Pulse lV 2 2 0505 00 04 0 cain Ge ae aes teeter tenet oe 3 26 What PulselV Packages are available for the Model 4200 SCS 3 26 Pulse IV for CMOS Model 4200 PIV A 1 0 2 cece eee 3 26 What is the PIV A PulselV Package 000e cece cece eee eee 3 26 Target applications and test projects for PIV A 2 2200 ee eeee 3 27 4200 PIV A test connections 0 0 cece eee eee 3 27 Supplied interconnect parts 0 eee 3 28 SuppliedtoolS execs sed ead os eS a a ee aoa aa 3 29 Model 8101 PIV test fixture 0 0 ce
54. VdStart double The starting sweep value for Vd output by the DrainSMU defined below VdStop double The final sweep value for Vd output by the DrainSMU defined below VdStep double The sweep step size for the Vd sweep output by the DrainSMU defined below PulseWidth double The Vgs pulse width PW The PW can be 40 ns to 150 ns 10 ns resolution Pulses wider than 150 ns will begin to be attenuated by the capacitor in the 4200 RBT PulsePeriod double The pulse period for the Vgs pulse The period can be set from 100us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 The period is most easily calculated by multiplying the largest desired pulse width PW by1000 Example PW 150 ns so Period 150 us AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set AverageNum 0 for Adaptive Filtering GateRange double The voltage measure range for the scope channel measuring the Gate Use 0 for scope autoranging or specify a voltage value for a fixed range Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 DrainRange double The voltage measure range for the scope channel measuring the Drain Use 0 for scope autoranging or specify a voltage value for a fixed range where V 50 Q Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 LoadLineCorr int Determines whether to use load line correction to compensate for th
55. View and save the Sheet data e 1 46 W What if my equipment is not listed in KCON 4 44 What is the PIV A PulselV Package 4 3 26 4200 900 01 Rev H February 2013 Index 5 Model 4200 SCS User s Manual Index Index 6 4200 900 01 Rev H February 2013 Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KENT HLEY A GREATER MEASURE OF CONFIDENCE Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com 12 06
56. configuring its settings and naming it the waveform is placed in the Scratch Pad e Waveforms will remain in the Scratch Pad until they are deleted by the user e Refer to the Waveform types on page 5 12 for information about the waveform types available for custom file arb Refer to Figure 5 7 and the steps that follow for details B Copy the waveforms into the Sequencer for Channel 1 Channel 2 or both e The order that two or more waveforms appear in a channel sequencer is the order that the waveforms will be output by that channel e Refer to Figure 5 8 and the steps that follow for details C Save the waveforms in the Sequencer as a kaf file See step 5 for Figure 5 8 D Load the kaf waveform file into a pulse generator using the appropriate PG2 tab Refer to Figure 5 9 and the steps that follow for details E Turn on the output for enabled channels See step 7 for Figure 5 9 Figure 5 7 Custom Arb file operation Select and configure waveforms dit Keithley Internal Pulse Interface C s4200 kiuser KPulse Setup don kps Arb Generator 2 Scratch Pad Sequencer Settings SquareWave New Waveform Move Up Time Per Point s 2e 008 Ramp Delete Move Down Noise NoisySine Channel 1 gt gt Delete WAVEL Save As Save WAVE2 Channel 2 gt gt Notes Period Freq 0 0001s 10000Hz Type SINE Points 10000 Cycles 2 Amplitude 1 Offset 1 Phase 0 Duty Cycle 50 Move Up Graph Settings Move Down Scr
57. derated 20 dB decade above 1 MHz Coupling DC or AC DC or AC AC coupling 50 Q 200 kHz high pass 1 MQ 10 Hz high pass 50 Q 200 kHz high pass 1MQ 10 Hz high pass Probe attenuation 0 9 to 1000 1 0 9 to 1000 1 Analog filter N A 20 MHz or bypass Total memory Up to 1 M S per channel Up to 2 M S per channel 1 channel interleaved Up to 1 M S per channel Up to 2 M S per channel 1 channel interleaved Sample S rate 10kS sto200MS s 10kS sto 400 MS s 1 channel interleaved 2 5kS sto1 25GS s 2 5kS sto2 5GS s 1 channel interleaved Acquisition time range 250 ns to 3355 s 50 ns to 419 s 2 M sample memory NOTE All specifications are subject to change for the latest specifications visit www ztecinstruments com Scope card settings The following information summarizes the most frequently used settings for the scope For detailed information about all scope settings Keithley Instruments user modules are used to control waveform acquisition operations of the scope New user modules can be created or existing user modules can be modified see the Reference Manual Keithley Interactive Test Environment KITE page 6 1 for details For more information about ZTEC refer to the Model 4200 SCS Complete Reference ZTEC User s Manual 1 The ZTEC User s Manual is located on your Model 4200 SCS Complete Reference Product Information CD 4200 9
58. run Column B Lists the stress times in seconds for all cycles NOTE The stress for the first cycle is 0 0 seconds This is the no stress cycle for HCI testing Column C Output Values Lists the measured readings for the first Output Value IDOFF reading for the ID 1 test Column D Starting with Cycle 2 lists the Change between each post stress IDOFF reading and the pre stress IDOFF reading Cycle 1 The Change for an Output Value is calculated as follows Change ABS Post Stress Rdg Pre Stress Rdg Pre Stress Rdg x 100 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Column E Section 3 Common Device Characterization Tests For the example in Figure 3 74 the following shows how Change IDOFF for Cycle 2 is calculated Change IDOFF ABS 82 2013e 15 291 1666e 15 291 1666e 15 x 100 71 8 ABSJ 208 9653e 15 291 1666e 15 x 100 ABS 0 7176 x 100 This is the Target Value that was assigned to the Output Value in the Device Stress Properties window see step 4 in Figure 3 59 A Target Value of 0 0 indicates that the Target for IDDOF is disabled A Target is reached when the Change value equals or exceeds the Target Value Starting with Column F every three columns provide readings for another Output Value the Change and the Target Value Figure 3 74 Subsite Data sheet Stress Measure Mode Sequence Subsite Setup Subsite Data Subsi
59. settings for KPulse pulse high 1 V and pulse low 0 V Channel 2 uses the same settings but the complement mode is enabled Pulse high goes to pulse low level 0 V and pulse low goes to pulse high level 1 V 5 4 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 5 3 Section 5 How to Generate Basic Pulses Standard pulse operation it Keithley Internal Pulse Interface C S4200 kiuser KPulse Setup default kps al A File Tools Help C Segment Arb C Burst Mode ere yh Trigger Out Polarity Positive v Reset All Pulse High v Pulse Low v Pulse High Y 1 Pulse Low v Rise Time s Pulse Width s Se p07 Pulse Delay s Pulse Width s Se 007 Pulse Delay s Pulse Load Output Mode eneral Settings Software _x Continuous Mode Pulse Period s 1e 006 Apply Changes Immediately Channel 2 Settings Source Range S9 Current Limit A 0 105 Source Range 5Y Current Limit A 0 105 1e 007 Fall Time s Rise Time s 1e 007 Fall Time s 50 Pulse Count Pulse Load 50 Pulse Count Voltage Pulse from C S4200 kiuser KPulse Setup default kps 2 0 o o Voltage V 600 0E 9 2E 600 0E 9 Time s Time s M Complement Mode F DC Mode IV Enable Channel 1 F Complement Mode F DC Mode lt lt Click the pulse card tab 4200 900 01 Rev H February 201
60. 0 cccccccee 1 17 SENSE LO terminal 0000 cceee 1 17 SENSE terminal cccccceeeeees 1 16 SMU with Model 4200 PA overview 1 17 Basic characteristics c0ccccees 1 17 Current characteristics 00 1 17 Basic SMU PreAmp circuit configuration 1 18 PreAmp terminals and connectors 1 19 FORCE terminal 0 PreAmp CONTROL connector 3 SENSE terminal 0 0 0 0 SAMUS ssuitasansmnanerdsiacrcmemendnateamaneermnaermatecds Stressing Segment Stress Measure Mode 3 81 Submit device dialog box Submit test dialog box Submitting devices ITMs and UTMs to libraries 2 46 Subsite Cycling Segment Stress Measure Mode 3 81 Subsite cycling Configuration seisus ienien 3 67 Configuration sequence 3 93 Cycle Mode Subsite Data sheet oo 3 88 Subsite Graph sssridianesenetiindaaa 3 92 Device Connections 0 0 eee eee 3 66 Mode SEISCHON ccisrsies canpaivernesisevsreasenomeaines 3 68 Running cycle subsite ceeeeeeees 3 86 Segment Stress Measure Mode configuration 3 83 Index 4 Index Stress Measure Mode Configuring device stress properties 3 71 Subsite Data sheet cc eee 3 89 Subsite Graph Subsite Setup tab Timing setup eeeeeeeeeeeeeeeeeeeees Subsite Data sheet Cycle MOG cissecenis onratiaecsnnpeduamamuinients Stress Measure Mode Subsite Grap
61. 00 eee Setting the AC drive conditions Setting the DC bias conditions Setting the Model 590 GPIB address 4 39 Model 4200 SCS User s Manual Signal paths for 2 wireresistor tests Signal paths for 3terminal npn bjt tests Signal paths for 4terminal n fet tests F Signal paths for capacitor test c ee Signal paths for diode tests c ceeeee Signal paths for the pre and post stress tests 4 32 Signal paths to apply the pulse stress SMU terminals and connectors eee SMU with Model 4200 PA voltage characteristics 0 0 1 18 SMU with Model 4200 PA current characteristics 1 18 Source Measure Hardware Ground unit GNDU overview Basic characteristics 0 cccceee 1 36 Basic circuit configurations 1 37 Ground unit connections 1 37 Ground unit DUT connections 1 38 Chassis ground cceeeeeeeeeees COMMON terminal FORCE terminal SENSE terminal cccceeeeee Models 4200 SMU and 4210 SMU overview 1 13 Basic characteristics c0 ccccccee 1 13 Current characteristics 00 1 13 Voltage characteristics 00 0 1 14 Basic SMU circuit configuration 1 14 SMU terminals and connectors FORCE terminal cscsiversassectacsnescssneuvenes 1 16 PA CNTRL connector
62. 10 0 100 0 1000 0 10000 0 9 Last Executed 10 17 2005 15 27 39 10 Output Values and 11 Device 1 4terminal n fet Target information 12 Test Id 1 Id 1 Id 1 IgLeak 1 VtextLin Lists Output 13 Output Value IDOFF IDLIN IDSAT IGLEAK VTEXTLII Val 14 Enable Target No No No No N alues 15 Target Value 0 0 0 0 0 0 0 0 0 Identifies enabled 16 Target Reached No No No No Targets a i 0 aoe Target o ce 20 Device 4terminal n fet Indicates if a 21 Status OK Target was 22 reached 23 Stress Properties 24 Stress Type DC Voltage Stress 25 Number of Devices 1 26 Additi 27 Device Pin SMU Connections Adaitiona 28 Device 1 Drain Pin SMU Gate Pin SMU Source Pin SMU Bulk Pin SMU information 29 4terminal n fet 2 3 1 4 provided for the a a measure 32 Stress Measurements 33 Device 1 l Drain Stress Gate Stress Source Stress Bulk Stress 34 4terminal n fet Do Not Measure Do Not Measure Do Not Measure Do Not Measure 35 36 37 Stress Conditions 38 Device 1 V Drain Stress I Drain Limit V Gate Stress Gate Limit V Source Stres 39 4terminal n fet 6 0000E 0 100 0000E 3 2 6000E 0 100 0000E 3 000 0000E 40 v 4 gt 4terminal n fet_ A Stress A Calc A Settings 4 gt Subsite cycling graphs Graphs for subsite cycling are located in the Subsite Graph tab of the Subsite Plan Cycle mode The graphs for the Cycle Mode plot Output Values versus the cycle index Each data point in the graph represents an Output Valu
63. 3 Remove the fuses from the fuse holders and replace them with 250 V 15 A 5 x 20 mm slow blow fuses CAUTION For continued protection against fire or instrument damage replace the fuses only with the type and rating shown above If the instrument repeatedly blows fuses locate and correct the cause of the problem before replacing the fuses Warm up period The Model 4200 SCS can be used immediately after being turned on However the unit should be allowed to warm up for at least 30 minutes to achieve rated measurement accuracy System connections Connecting the keyboard and mouse The keyboard is connected to the Model 4200 SCS with a USB and can be plugged into any of the four USB ports two in front and two in back see Figure 1 3 The keyboard is shown in Figure 1 2 To ensure proper operation make sure the keyboard is connected to one of the four USB ports prior to power up Figure 1 3 shows the keyboard connections to the rear panel of the Model 4200 SCS 4200 900 01 Rev H February 2013 Return to Section Topics 1 7 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 2 Model 4200 SCS keyboard If you wish to use an optional mouse connect a USB mouse into any of the four Model 4200 SCS USB ports Figure 1 3 Keyboard connections Model 4200 SCS Rear Panel Model 4200 SCS Front Panel KEITHLEY 4200 SEMICONDUCTOR CHARACTERIZATION SYSTEM
64. 34 Data worksheet of a Sheet tab containing data for multiple sweeps 2 34 Data source identifier 2 36 DG Preamp nscrertatearisce Sdecencunditesraccdeiducstamenasuics 1 19 Index 1 Model 4200 SCS User s Manual Index 2 Default project overview Default test library folders Default user directory Define new project ceeeeeeeseeeeteneeeeeeeeeetees Define the system connections 0 4 10 Devic Plat sccssversstdssinnchapacebeciaasehaensanis 2 23 containing an ITM to be submitted 2 49 window containing an ITM to be submitted 2 50 Devices connected to 707A switching matrix 4 8 Digital storage oscilloscope Card 0 0 0 1 32 Dide tests srera 3 7 Displaying a Formulator equation using the Formula COMDO BOX sesasiiisessentsrnraamianaiquapmapacatiacaus 2 36 Du l SWEEP ssisinisssscmnsinsavinnnnaniarneerearesonananivansaniine 2 16 EM process floW cccceceeeeeeeeeeeeeeeeeeeeeeeeees 3 94 Environmental Considerations 0 c ee 1 4 Example PNOVSCE esi ted E E AE cae piace sted 2 24 Executing an individual test 0 ceeeee 2 23 First connect test connects the device to the SMUs 4 32 Forcing function Configuration Of c ceecceeeeeeeeeeteeeeeees 2 18 TYPOS SUMMALY ceeeceeeeeeeceteeeeeetteeeeeteeees 2 14 Front PaMe ll ssics sit caeps madeaisuse raacsevaensieaialonsiieseten 1 11 Fr t pane
65. 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 117 FlashEndurance NAND project SetupDC Definition tab Flash Feducarce MiM Keethiny Interactive Test Errironment Seep Program 21 D Fie aw Project un Took Window Help 2 C e y Ma T a Fe i drien Sie Guay See Flack edeace tN woe nes Literar arhei l 3 ME Fondo s anal rita Duta Yahoo Ure Macias eorias de fieh Bec CF Eg TIE Wider Pogan 4 ee HR Eme Hame whut Type py arre 1 unShorduksTemind Inui NT Ve satan ees 2 ShaedPuseleminsts Input CHAR_P 5 4 5 6 7 8 w 1 t La DESCRIPTION The configure 2 ilash tunotlon disoonmscre pales chenmiels by opening the Solid State Relep for sach poles chaneel in the rupplied lirt Thiz routine should be umed before runsing a DZ ITH ce iert vhen the pulee ard DC xignals are connected together at each DUT terminel In the cess of flosi the user mat choces to Tee the SHJ srd aoe outputs with p SMA Tee supplied with the 4 70I FLE5H packsge inrtesd cf usury o separots ceternol ovitch matriz io eels bot vorn the DC and pule tertz Thir module will imolat the YFU chanelle irca the estup allowing for accurate DC results THPUTS a E taph e HN IP Vt MaxGm Program test This test is used to perform a DC voltage sweep on the gate of the DUT and measure the dra
66. 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS 4 12 A test sequence for a device is executed by selecting the device plan and then clicking the green Run button P gt When a device plan is started the connect test closes the appropriate matrix crosspoints to connect the instruments to the appropriate device All devices may be tested by selecting the Subsite Plan and clicking the green Run button P gt Figure 4 14 through Figure 4 18 show the signal paths that are automatically selected for the five devices Figure 4 14 Signal paths for 4terminal n fet tests N Channel MOSFET Drain A B C D 1 2 3 4 5 6 7 8 9 10 11 12 Figure 4 15 Signal paths for 3terminal npn bjt tests NPN Collector Transistor A B C GNDU D 1 4200 900 01 Rev H February 2013 Return to Section Topics Model 4200 SCS User s Manual Figure 4 16 Signal paths for 2 wireresistor tests Resistor 1 2 3 4 5 6 7 8 9 10 11 12 Figure 4 17 Signal paths for diode tests U QO FP gt SMU3 1 2 3 4 5 6 7 8 9 10 11 12 Figure 4 18 Signal paths for capacitor test Capacitor a s c SMU4 D The connect test U A W gt Section 4 How to Control Other Instruments with the Model 4200 SCS In the p
67. 6 V LLEComp SampleRate 2 0e 8 Samples s oe PMUMode Simple v Mode statV 2 0 v Cen stopV 2 0 v tev 00 V chan MUCH baseV 0 0 v Acquisition Type Average Pulses Discrete Pulses E Test Description DESCRIPTION Voltage amplitude Pilse IV waveform captureMising one channel of the 4225 PNU It returns voltage nd current samples fersus time for a single channel EY PMU 1chw Test Parameters are shown in group boxes five groups are illustrated in this figure that group like values together Different tests will have different types and number of parameters Parameters are input as numbers drop down choices or checkboxes Hover mouse over parameter input box for additional information Return to Section Topics 2 13 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual How to create your own ITMs Understanding the ITM definition tab To define an ITM use the ITM definition tab Display it by double clicking the ITM name in the project navigator Figure 2 4 shows and describes the ITM definition tab in this case for the vds id ITM which is part of the example project shown in Figure 2 2 and Figure 2 3 An ITM definition tab defines the ITM as follows e Schematically displays the type of device to be tested by the ITM FET BUT capacitor and so on e Next to each terminal of the device displays an instrument object which acts as follows
68. Cycles Stress Measure Mode C Segment Stress Measure Mode Cycle Mode Step B Choose the mode of cycling Figure 3 53 Specifying the mode of cycling Stress Measure Mode or Cycle Mode What are your test objectives 3 68 M Enable Cycles Stress Measure Mode Segment Stress Measure Mode Cycle Mode C Stress Measure Mode Segment Stress Measure Mode Test Stress Test gt Stress gt Only repetitive Test cycles cycling through For example Hot Carrier Injection subsite tests no HCI or Negative Bias Temperature stressing of Instability NBTI studies devices Sequence Subsite Setup Subsite Data Subsite Graph Sequence Subsite Setup Subsite Data Subsite Graph M Enable Cycles NOTE In order to utilize the switching feature of Model 4225 RPMs during the transition from measure to stress ensure that the instruments connected to the RPMs are configured in KCON see Tools gt Update DC Preamp and RPM Configuration in Section 7 Step C1 Specify cycle timing linear log or list stress measure mode only Figure 3 54 explains how to set timing for the linear and log modes while Figure 3 55 explains how to set timing for the list mode Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 54 Section 3 Common Device Characterization Tests Specifying timing linear and log for stress measure mode Want logarithmic or li
69. DC Sense p Well SMU4 DC Force 5 s Source Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 85 Block diagram of a flash test setup without using a switch matrix direct connect DC Sense p SMU4 DC Force p DC Sense DP SMUS DC Force DTT DC Sense p SMU2 DC Force p DC Sense p SMU1 DC Force p The pulse waveforms are a program pulse see Figure 3 86 an erase pulse see Figure 3 87 or a waveform made up of both program and erase pulses see Figure 3 88 All of these waveforms are implemented by using the Segment ARB capability For more information about waveforms refer to the Reference Manual Pulse Source Measure Concepts page 11 1 There are many different methods and voltage levels for programming and erasing so these are only examples Figure 3 86 Program pulse waveforms for a floating gate DUT with separate pulse waveforms for the DUT gate drain source and bulk 10 12 V Va cG gv 3 30 us Vp ov 1 10 us Vs ov y B ov 4200 900 01 Rev H February 2013 Return to Section Topics 3 99 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 87 Example erase pulse waveforms for a floating gate DUT with separate pulse waveforms for the DUT gate drain source and bulk CG 10 100 ms ane Vo OPEN float 10 12 V PW lt Vee Ve Figure 3 88 Program E
70. DUTs these tests were performed on see the Default project notes by clicking on the default project tree node and then selecting the Project Notes tab see Figure 3 6 Data sheets for the test DUTs used with the default project can be found on the Model 4200 Complete Reference webpage on the data sheets page Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 6 Project Notes tab 3 Default Keithley Interactive Test Environment Default O x Fie view Project Run Tools Window Help e f x E gt HAXA E e General Sequence Project Notes MZE subsite Project Notes S MHE 4terminal n fet MME vdsid Required Equipment JE vtlin JE subvt 4200 SCS with the following JE vas id 2 4200 SMU ME igvg 2 4210 SMU 4200 S5MUs will also work if you are not measuring high current gt 100m v LE cv nmosfet 4 4200 PA mounted on the rear panel of the 4200 505 3terminal npn 1 4200 CVU with 45MA cables and 2 SMA tees JE vosie 4 2 meter PreAmp triax cables JE gummel 8101 PIV test fixture with connecting wires and adaptors JE vesat NPN type BIT 2N3904 nes n channel 4 terminal MOSFET Temic SD210DE modified for CV 2 wireresistor 1 Gokimresistae v E res2t diode JE vid JE vd JE cv diode Description 4 capacitor A iF cap eae Le Ca ae sis A ae er xl vE cv cap Dio
71. Definition Sheet Graph Status Formulas v Save As B C D E i GateV GM SQRID IDLIN VT 6 74225E 12 0 00000E 01 REF 2 59658E 06 1 02731E 02 1 19814E 00 3 93329E 11 1 00000E 01 3 25906E 10 6 27159E 06 9 41565E 03 aaanear ant A ANNAT nal 4 masanr an 4 rarear ar a rnar aa Definition Sheet Graph Status Formulas l z Save As GM DIFF DRAINLGATEV SQRID SQRT DRAINI IDLIN TANFIT GATEV DRAINI MAXPOS GM 6 741VT TANFITXINT GATEV DRAINL MAXPOS GM 2 2 A900NE 44 4 ANNAE NA D5eANee An e ATENE Ae N ECEE NI W N Click Select IDLIN TANFIT GATEV DRAINI MAXPOS GM B 74 YT TANFITXINT GATEV DRAINI MAXPOS GM 202290F 141 1 NNNNNNE ni 2 WEANCE 1N A IMMEAENG A AMMECEE NA Definition Sheet Graph Status Formulas saRiD SQRT DRAINI 7 Save As B C D E GateV Gm SQRID IDLIN VT 2 6 74225E 12 0 00000E 01 REF 2 59658E 06 1 02731 E02 1 19814E 00 2 gnooq0ne 44 4 nnnnncna 2aennec An ATANG ne N MEREC NI Understanding the data source identifier The ITM or UTM window tab at the bottom of all Sheet tab windows identifies the source of the data in the Sheet tab as shown in Figure 2 25 Figure 2 25 Data source identifier LJ FIN Valad A e The type of test ITM or UTM T 3 Number of the site at which from which the plf vds idH 1 this instance of the named data w
72. Don t forget to connect the black shield jumpers to each other as shown in the middle of Figure 3 32 Connecting shields together is necessary and very important as it greatly reduces the inductance that is caused by the loop area of the interconnect For RF probes connect the SMA cables from the RBTs to the RF probe manipulators as shown in Figure 3 33 To use the supplied 8101 PIV test fixture see Figure 3 28 connect the SMA cables from the RBTs to the 8101 PIV Test fixture as shown in Figure 3 34 Install DUT as shown in Figure 3 35 3 Finish the setup by verifying connections and running a scope shot test from the Pulse IV Complete project Figure 3 32 Pulse IV connections using PRB C adapter cables Needle Holder with SSMC connector s 4200 PRB C 15cm 6in SMA cable CA 405 15cm 6in SMA cable CA 405 e m To Scope z To Scope Card Ch2 a Card Ch 1 a E 2m 6ft SMA cable Z 2m 6ft SMA lt lt 9 cable 2 8 F To 4205 PG2 Ch 1 2m 6ft SMA cable l t 4 To SMU1 Force amp Sense To SMU2 Force Pair of 2m 6ft Triax amp Sense cables Pair of 2m 6ft Triax cables 4200 900 01 Rev H February 2013 Return to Section Topics 3 33 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 33 Pulse IV connections using RF G S G probes RF G S G Probes 15cm 6in SMA cable CA 405 15cm 6in SMA cable CA 405
73. Every Stress Cycle was selected then there would be a corresponding reading for every stress cycle 4200 900 01 Rev H February 2013 Return to Section Topics 3 79 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 66 Example of First Stress Only measurement Stress Measurements Sequence Subsite Setup Subsite Data Subsite Graph IDrain Stress First Stress Only v I Gate Stress First Stress Only A B Cc Shree ress Every Stress Cycle 1 4terminal n fet 2 Stress Stress I Drain I Bulk Stress Do Not Measure v 3 Index Time Stress 4 1 10 00 41 8017E 10 5 Drop down menus to control Stress Measurements 8 9 sai 10 Do Not Measure Do not Make the specified measurement First Stress Only Take the specified measurement on the first stress cycle only Every Stress Cycle Take the specified measurement on every stress cycle Example of First Stress Only measurement I Drain 4 4terminal n fet_A Stress A Calc A Settings Device selection The Device Stress Properties window corresponds to the selected device in the Subsite Plan The individual properties window for the each device is selected using the Next Device or Prev Device buttons If there is only one device in the Subsite Plan these buttons will be disabled Leave stress conditions on DC stressing only Enable the Leave Stress Conditions On button to leave the outputs of the SMUs on after
74. GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SMUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SMUs in the system This is the SMU that applies the DC bias to the DUT drain during the sweep DrainVMeas_DC_Size int Sizes of the output arrays All arrays should be the same size and DrainVProg_DC_Size need to be large enough to hold all sweep points Drainl_DC_Size GateVMeas_DC_Size GateVProg_DC_Size DrainVMeas_Pulse_Size DrainVProg_Pulse_Size Drain _Pulse_Size GateVMeas_Pulse_Size GatelProg_Pulse_Size Table 3 11 Outputs for Vdid_Pulse_DC_Family_pulseiv Output Type Description DrainVProg_DC double Array of programmed drain voltage values DrainVProg_Pulse DrainVMeas_DC double Array of measured drain voltage values DrainVMeas_Pulse Drainl _DC double Array of measured drain currents Drainl_Pulse GateVMeas_DC double Array of measured gate voltages GateVMeas_Pulse GateVProg_DC double Array of programmed gate voltages GateVProg_Pulse Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Table 3 12 Section 3 Common Device Characterization Tests Return values for Vdid_Pulse_DC_Family_pulseiv Value Description 0 OK 1 Invalid value for Vgs 2 Invalid value for VdStart 3 I
75. HEOR Each output channel of a pulse card has a high speed solid state output relay When this relay is closed the waveform segment is output When opened the channel output is electrically isolated floating from the DUT In Figure 1 24 the output relay is opened during segment seven This puts the output in a floating condition The minimum time for a segment with a HEOR transition open to close or close to open is 100 us for the Model 4205 PG2 or 25 us for the Models 4220 PGU and 4225 PMU 1 28 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started NOTE Ifthe firmware for the Model 4200 PG2 has been upgraded to KITE V6 2 it can be used to configure and output Segment ARB waveforms see Firmware upgrade for the Model 4200 PG2 earlier in this section However the Model 4200 PG2 does not have output relays HEOR Therefore relay control will be ignored seg_arb_define This function is used to define a Segment ARB waveform This function includes parameters to specify the number of segments nSegments and arrays for start startvals stop stopvals and time values timevals It also includes arrays for trigger levels triggervals and output relay states outputRelayVals For more information refer to the Reference Manual seg_arb_define page 8 137 seg_arb_file This function is used to load a Segment ARB waveform into a pulse card For more information
76. HP 8110 Pulse Generator PGUINST1 D sMu4Force gt 4 Pm SS 10 mo 2 HP 811034 Pulse Channel Module PGU1 E KI 7077074 Switching Matrix MTRX1 E Pcuichin Pns g 11 Pints Card CARD1 F GNDUFoce 6 Pns 12 Pn 7 E Test Fixture TF1 6 Inc H NC x 8 Save the configuration using the KCON File menu as illustrated in Figure 4 45 Figure 4 45 Saving the system configuration Tools Help Configuration Ctrl S Save Configuration as Web Page Ctrl wW Print Configuration Ctrl P Exit Open the ivpgswitch project Open the ivpgswitch project from the File menu select Open Project The project navigator for the ivpgswitch project is shown in Figure 4 46 Figure 4 46 Project navigator ivpgswitch project xl E ivpgswitch e subsite1 1E 4terminal n fet paul init pgul setup pgu trigger connect 0 1 3 1 1 1 1 1 2 2 4200 900 01 Rev H February 2013 Return to Section Topics 4 31 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Description of tests First connect test The first test connect is a UTM that connects the device to the four SMUs In the project navigator double click the first connect UTM to open it Figure 4 47 shows the parameters that connect the device to the SMUs NOTE The first parameter line 1 opens any relays that may have been closed by a previous t
77. LESSEE ETE EEE b PreutseDielyysSize Input NT 7 Trnstantimes Input ee i Trestorlinersee input nT j 3 Pubseavidite Input OBL A ee Input nT I n C PasPuke Irgut a nn t Postitee Irast nT fH DESCRIPTION The dooble cules ilazh function defines and ostputs i weretorez commizting of 2 pulams whack hare andepedent width and levelx ersse palse a a sees paia both progres sid arase a les for up t erini pulses channels J maximus chanrels vith pare rie ae aie instolled ia the 4200 chassis Tha sigla pulmi lazh functi pan dedirex Se outputs 1 3 vevetorez commizting of 1 poles ha vareicces ara daf ned uzirg linm ayer AEE megeest arb moda of the 4205 Paz The waveloce can E Erti SetupDC Erase test This test isolates the VPU outputs from the DUT It does this by opening the HEOR for each VPU channel Disconnecting the VPU channels allows for accurate DC results Vt MaxGm Erase test This test is used to perform a DC voltage sweep on the gate of the DUT and measure the drain current at each sweep step SMU3 is configured to perform a 101 point sweep from 0 to 5 V in 50 mV steps SMU1 is configured to DC bias the drain at 0 5 V and measure current at each step of the sweep The Vt MaxGm tests may be replaced with another Vt or DC test Or additional DC tests may be added after this test FlashEndurance NOR tests The FlashEndurance NOR project has tests similar to the FlashEndur
78. M ESE a ESS fo x E E I Source Stress Do Not Measure X Buk Pii fo rc s Pr rc I Bulk Stress Do Not Measure bd D Parameter Properties Degradation Targets Stress Type C DC Voltage Stress Tests _ Output Values Abs Target Target Value DC Current Stress i AC Voltage Stress Figure 3 61 VPU common settings window VPU Common Settings VPU Common Settings Rise Time 100e 9 S Low Value chi 0 00 y Fall Time 100e 9 5 Low Value ch2 0 00 y Frequency le 6 Hz Load Impedance 50 x Q 3 74 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests How to perform AC stress for wafer level reliability WLR AC or pulsed stress is a useful addition to the typical stress measure tests for investigating both semiconductor charge trapping and degradation behaviors NBTI negative bias temperature instability and TDDB time dependent dielectric breakdown tests consist of stress measure cycles The applied stress voltage is a DC signal that is used because it maps more easily to device models However incorporating pulsed stress testing provides additional data that permits a better understanding of device performance in frequency dependent circuits NOTE Key test parameters are contained in Table 3 25 1 Connect pulse generator to DUT during stress as shown in Figure 3 62 Figure 3 63 and Figure 3 64 2 Th
79. M LE Vt MaxGm Program Number of Cycles Mi First Stress Count 10 o a es ea 100000 100 v Total Stress Count 1000 Number of Stresses 1 10000 100000 Stress Measure Delay 0 0 Device Stress Properties Periodic Test Interval Log ja Total Cycles Rate s Aw Periodic Cw F e ProjectView Return to Section Topics JE Vt MaxGm JE FlashEndure E Program 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 114 FlashEndurance NAND project Device Stress Properties Device Stress Prepertics Generel Settings ortive Ske fi NOTE Set a TAJ pin tn 1 to indicate high meescianos mode used mhen sharing a temina with s PCZ SMU Giss fo wo AJZ Beas fo VOo SMUG Bas O Y SWUH fias o Y Jai Unt 016 A mizima 0 005 A Suume oie a shoe o5 a suzpne 0 SMUd Tins fo Pulsar Settings fe peL Channa 1 ci sAz nch kuser eee Sar bF eslFissh NAND Ag st PRZE Channel 1 F P EIFE 25E Output Values Abs Target Target Value WT wa r 30 Device Hame Floatingfashs lt lt Prev Dovie Hest Dereon gt Figure 3 115 FlashEndurance NAND project Subsite Graph tab T FlashEndurance HAND Keithley Interactive Test Environment SE Ble vew project Run Took Windam Help Li a gt gt FF AE XA F ee LP sift 4 MoS AashEnduence AND MSP RachEndursnce MHE AostingGais E Poran wE
80. Manual 2 38 e Each Append worksheet is labeled with a separate tab to distinguish it from the Data worksheet for the test e Each Append worksheet contains the same columns and rows as the Data worksheet for the test Each Append worksheet may be manipulated in the same way as the Data worksheet for the test See Figure 2 27 Figure 2 27 Data and Append1 worksheets for a particular vcsat test Definition Sheet Graph Status Formulas j 7 Save s A B C D E F 1 Collector Collector BaseV Emitterl IICSAT VCSAT 2 9 2308E 6 3 1265E 6 534 7498E 3 707 3059E 9 1 2979E 3 1 9999E 0 3 9 0818E 6 4 5 1516E 6 Definition Sheet Graph Status 7 16 4633E 6 A B C D E F 8 27 5268E 6 1 Collector Collector _ BaseV Emitter ICSAT VCSAT 9 44 6423E 6 2 9 2347E 6 1 3794E 6 534 9274E 3 703 4288E 9 _1 3128E 3 1 9999E 0 10 67 1907 E 6 3 9 0893E 6 10 0074E 3 544 0590E 3 844 7647 E 9 11 114 0174E 6 4 5 1573E 6 20 0197E 3 552 9827E 3 4 6594E 6 12 160 1633E 6 5 2 2390E 6 29 9963E 3 _ 560 9511E 3 7 4904E 6 13 219 7383E 6 6 5 1351E 6 40 0396E 3 _570 8129E 3 14 8968E 6 14 292 5529E 6 7 16 5503E 6 50 0843E 3 582 6951E 3 26 3800E 6 15 377 9829E 6 8 27 6858E 6 60 1005E 3 591 3251E 3 _ 37 5147E 6 16 473 9711E 6 9 44 9476E 6 70 0738E 3 600 4844E 3 54 7763E 6 17 577 0979E 6
81. Manual Appendix F Pulse generator test example Figure 4 51 PGU initialization Name In Out Type Value 1 InstldStr Input CHAR_P _PGU1 lt Initializes HP 8110 4200 900 01 Rev H February 2013 Return to Section Topics 4 33 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual 4 34 pgu1 setup test In the project navigator double click pgu1 setup to open the test The complete parameter listing for the test is shown in Figure 4 52 These parameters to configure the PGU are explained in the description area of the definition tab Figure 4 52 shows the pulse that is configured by this test Figure 4 52 PGU stress pulse specifications Amplitude 3 5V Base Value 0v NOTE The pulse is not drawn to scale pgu trigger test In the project navigator double click pgu trigger to open the test The two line parameter list for this test is shown in Figure 4 53 This test triggers the PGU to output 60 000 pulses to the N channel MOSFET Figure 4 53 pgu trigger test Trigger the burst of stress pulses Name In Out Type Value 1 InstldStr Input CHAR_P PGU1 2 Count Input INT 60000 lt Triggers burst of pulses Third connect test This connect test is the same as the first connect test It connects the device to the SMUs so that the transfer characteristics can be determined after applying the pulse stress see Figure 4 47 and Figure 4 48 Se
82. Model 4200 SCS User s Manual 3 30 Figure 3 27 Side view of scope card connections Scope Card Adapter BNC Male to SMA Female CS 1247 CHANNEL 1 C ToDivider1 EXT TRIG CEA J _To4205PG2 TRIGGER OUT Adapter SMB Male to SMA Female CS 1249 To RBT 2 AC CHANNEL 2 a Adapter BNC Male to SMA Female CS 1247 Model 8101 PIV test fixture The Model 4200 PIV A includes a test fixture and DUTs to verify proper PIV A setup and operation and is also useful for troubleshooting The test fixture Model 8101 PIV shown in Figure 3 28 has two electrically separate sockets to support testing three and four leaded devices The lower socket located near the latch is for DC testing with SMUs and uses four Triax connectors The upper or back socket located near the hinge is for Pulse IV or Pulse IV DC testing and uses two SMA connectors The SMU socket has a triax connector for each of the four DUT pins The pulse socket uses only two SMA connectors where the DUT source and bulk connections are connected to ground SMA coax shield and are optimized for use with the Model 4200 PIV A package The fixture may also be used with the Model 4200 PIV Q package but higher power testing either DC or pulse IV requires additional care to prevent damage to the included DUTs The schematic of the 8101 test fixture is shown in Figure 3 29 The tests included in both the PulselV Complete and PulselV Demo projects h
83. Period s 1e 008 V Enable Channel 2 1 2 3 4 5 6 7 8 NOTE Theo 4200 900 01 Rev H February 2013 KEITHLEY Click the tab for the pulse card to be configured Select Segment Arb to configure the Segment Arb pulse Waveform Type Enable Channel 1 and or Enable Channel 2 A channel must be enabled in order to preview its waveform and turn on its output Configure triggers for both channels of the pulse card e Trigger Source Software External or Internal Bus With External selected select the trigger source Initial Falling Initial Rising Per Pulse Falling or Per Pulse Rising e Output Mode Select the output trigger mode Continuous Mode or Burst Mode Configure the General Settings for both channels of the pulse card e Set the Trigger Polarity Positive or Negative e Select Apply Changes Immediately to automatically apply settings and update the previewer OR Click the Apply Settings button to manually apply settings and up the previewer This button is disabled when Apply Changes Immediately is enabled e Clicking Reset All returns the pulse card to the Standard Pulse waveform type and its default settings It also updates the previewer Configure the Channel 1 Settings and or Channel 2 Settings e Set the Source Range volts Current Limit amps and Pulse Load ohms If the trigger mode is set to Burst Mode set the Pulse Count e Inthe table enter the Start voltage
84. PulseWidths PostPulseDelays The minimum time is 20 E 9 20 ns Number 0 zero is not a valid input value The maximum time is 1s Enter the number of pulses into NumPulses This parameter determines the number of pulses that will be output each time the test is run 4200 900 01 Rev H February 2013 Return to Section Topics 3 127 Section 3 Common Device Characterization Tests 10 11 12 Model 4200 SCS User s Manual Enter the number of SMUs that are used as Bias Terminals into NumSMUBiasTerminals An example of using an SMU as a bias terminal is shown in Figure 3 96 The 4 SMU in Figure 3 96 is a dedicated connection to a bit line on the array DUT During a pulse test such as Program or Erase this SMU would output a DC voltage that would provide power to the drain terminal of the first column of the array Enter the SMU IDs for the SMU s used as a bias into SMUBiasTerminals For the configuration in Figure 3 96 SMUBiasTerminals SMU4 Enter the voltages in the array SMUBiasVoltages These are the voltages for the SMUs listed in SMUBiasTerminals The number of non blank entries in the array must match NumSMUtTerminals Enter the number of SMUs that are sharing a cable with a pulse channel into NumSharedSMUs Sharing means that one pulse and one SMU signal are combined to a single DUT terminal Figure 3 96 shows that three pairs of SMU pulse channels are shared Note the SMA tees on each of the top three SMUs that incorporat
85. Recent FlashDisturb Switch Documents Q FlashEndurance NAND 9 FlashEndurance NOR FlashEndurance Switch Desktop D Flash NAND Flash NOR Flash Switch CI NvM Examples My Documents fila hin Cararciter There are three similar projects that provides the ability to send n pulses to the DUT then perform a Vy sweep e Flash NAND project e Flash NOR project e Flash Switch project The pulses can be either a single pulse program or erase waveform or the combined program and erase waveform Figure 3 101 shows the program and erase tests for the Flash NAND project These tests allow investigation into program and erase state dependencies on pulse parameters There are three different waveform types available e Program Erase e Fast Program e Erase The Program waveform and Erase waveform output pulses with a single set of parameters for the pulse width transition 0 100 rise fall and level see Figure 3 102 The Fast Program and Erase test waveform uses two pulses that can have independent widths and levels see Figure 3 103 3 118 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Each test permits programming the pulse width level and transition 0 100 rise fall parameters as well as the number of pulses For extended Program Erase cycling use one of the FlashEndurance projects Instead of a voltage the disconnect
86. Return to Section Topics 3 41 Section 3 Common Device Characterization Tests 3 42 Model 4200 SCS User s Manual ensure proper cabling and ensure all connections are tight If using the Model 4200 PRB C cables Y adapter cable for pulsing with DC interconnect and structures ensure that the two ground lugs are connected together The left pulse curve blue is the pulse applied to the gate The displayed waveform data has approximate calibration factors applied but the calibrated measurement is given in the lower left portion of the Graph tab Note that the Data Variables values in the lower left corner just display the Data values not subsequent test runs Appends which are only graphically displayed The right pulse curve red is the drain current shown with approximate calibration factors applied with the calibrated Vd and Id measurements listed in the lower left corner of the graph The AverageNum value specifies the number of pulses that are averaged together to provide the data The DUT will have more pulses applied than AverageNum due to other test factors such as load line correction and measurement autoranging Figure 3 45 Typical graphical result for scope shot PulselV Complete Keithley Interactive Test Environment scope shot 1 1 inition Sheet Graph Status 10823 Defi 03 04 2007 105230 KEITHLEY 2860 22600 10 10 la x tae us 2 hoes E 1260 3 f D s oes 8
87. SMU1 Gonnects SMUT to pin 3 of test fixture 3 Pint Input INT 3 4 TermldStr2 Input CHAR_P SMU2 lt z Connects SMU2 to pin 4 of test fixture 5 Pin2 Input INT 4 6 TermldStr3 Input CHAR_P SMU3 lt z Connects SMU3 to pin 5 of test fixture 7 Pin3 Input INT 5 e e e 16 TermldStr8 Input CHAR_P GNDU Soo GNDU to pin 6 of test fixture 17 Pind Input INT 6 NOTE Ifa pin parameter is lt 1 the terminal pin pair is ignored and no matrix connections are made How to control a probe station This tutorial demonstrates how to control a probe station to test five identical sites or die or reticles on a sample wafer Each wafer site has two subsites or test element groups At each subsite there are two devices or test elements to be tested e 4 terminal N channel MOSFET e 3 terminal NPN transistor The subsites need not be identical but for simplicity they are assumed to be the same This is illustrated below in Figure 4 21 4200 900 01 Rev H February 2013 Return to Section Topics 4 15 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 21 Sample wafer organization Site or Die or Reticle Subsites or Test Element Groups Probe Pads TBST EET Subsite 1 Subsite 2 Prober control overview A probe station like any other external instrument is controlled by the Model 4200 SCS through user modules Basic system connections are
88. Seep0C Fr LE Vi MaxGrr E Es MIE SeopDC tr ma pE VAM FishEndurancetikn1 Sequence Subste Setup Subste Daa Subsie Graph Mosinggate t Maxcm trases1 Degradation 4 aaa FlsshPndurance End Subsite Cycle Total Execution Time 00 01 18 32 2007 03 09 18 47 42 20070309 18 47 42 nur 4200 900 01 Rev H February 2013 Return to Section Topics 3 133 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Program test The Definition tab for this test is shown in Figure 3 116 This test uses a partially predefined Segment ARB waveforms see Figure 3 102 to program a flash memory device and identical to the Program UTMs included in the other Flash projects Figure 3 116 FlashEndurance NAND project Program Definition tab Flash Pedurance MiN Keethiry Interactive Test Environment Progran 1 eT FE Fie haw Project fun Tool Window Help 08 C e e e T eo Dorien gies Gror seme aht adaware NAND MITE FlochEnchronce i Une Litewise Aarati l E Fesina i PE Foyn Deptidm limhsdiz ia pie ieh ae BoD C Page ME Wide Pogan WE Emre ig Sake CE vce SLE Vire eae T fame iait Ee MurPulssTerrinale input NT FulssTermirals Input PulssVolisges inui PuseVotagessire inan FrePuiseDebys i PrePuiseDelys Size Tanstonlines DOLARRA Tweinlinesses ji N J Puseiidite OBL
89. Table 3 19 continued Inputs for scopeshot_cal_pulseiv Model 4200 SCS User s Manual Input Type Description GateRange double The voltage measure range for the scope channel measuring the Gate Use 0 for scope autoranging or specify a voltage value for a fixed range Valid voltages are 0 25 0 5 1 25 2 5 5 10 25 50 The range is a full range value for example 2 5 is 1 25 V to 1 25 V LoadLineCorr int Determines whether to use load line correction to compensate for the voltage drop caused by the DUT impedance on the Drain When load line correction is on 1 the test will start by assuming a high impedance value for the device and will approach the correct bias and pulse values over a series of pulses that ensures that the sourced pulses match the requested values When load line correction is turned off the specified voltages will be sourced 1 Use Load Line 0 No Load Line VPUID char The instrument ID This should be set to VPU1 for 4200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SmUs in the system This is the SMU that applies the DC bias to the DUT drain during the sweep TimeSize GatePulseSize DrainPulseSize int These values must be set to a GatePulseSi
90. The following menus are located at the top left corner of KPulse File Use this menu to load save KPulse setups and exit KPulse By default setup files are saved at the following command path location C S4200 kiuser KPulse Setup Tools From this menu click Options to open the KPulse Options dialog box see Figure 5 2 e Graphing Options The following pulse preview graphs can be disabled or enabled Show Pulse Mode Graphs When enabled shows the Standard Pulse waveform previewers for each PG2 tab e Show Segment Arb Graphs When enabled shows the Segment ARB pulse waveform previewers for each PG2 tab e Show File Arb Graph When enabled shows the Custom File Arb pulse waveform previewer for each PG2 tab Show Arb Generator Graph When enabled shows the Arb Generator pulse waveform previewer Trigger Master Select the PG2 that will serve as the trigger master or select None if you are not using a trigger master see the Reference Manual Triggering page 5 3 Help Use this menu to access Model 4200 SCS Complete Reference information and to open the About KPulse dialog box Figure 5 2 KPulse options KPulse Options Graphing Options MV Show Pulse Mode Graphs IV Show File Arb Graph V Show Segment Arb Graphs V Show Arb Generator Graph Trigger Master None C PMUL Cancel Triggering With a Keithley pulse card selected as the trigger master its Trigger Out can be used to start trigger itself or othe
91. To avoid possible damage or deterioration the Model 4200 SCS should be shipped and stored within the following environmental limits e Temperature 10 C to 60 C e Relative humidity 5 to 90 non condensing Operating environment Temperature and humidity The Model 4200 SCS should be operated within the following environmental limits e Temperature 15 C to 40 C e Relative humidity 5 to 80 non condensing NOTE SMU and preamp accuracy specifications are based on operation at 23 C 5 C and between 5 and 60 relative humidity See the product specifications for additional temperature and humidity derating factors outside these ranges Proper ventilation To avoid overheating the Model 4200 SCS should be operated in an area with proper ventilation Allow at least eight inches of clearance at the back of the mainframe to assure sufficient airflow 1 4 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started CAUTION To prevent damaging temperatures and other harmful environmental conditions that could degrade specified performance follow these precautions Keep the venting holes and fan free of dust dirt and contaminants so that the unit s ability to dissipate heat is not impaired Keep the fan vents and cooling vents from becoming blocked Do not position any devices that force air heated or unheated adjacent to the unit into cooling v
92. a typical CV curve generated by this test Figure 4 57 Typical CV curve Definition Sheet Graph Status 0204 2000 11 43 06 i D fa e T 2 5 f i G E B cvsweep 50006 10 ed 4 000E 10 busines wissaas 4 3 000E 10 2 000E 10 t F w 2 5 0E 00 4 6 0E 00 Ss rs w o w Substrate Voltage Y Connections Connection details for the Model 590 CV Analyzer are provided in the Reference Manual Appendix C Using a Keithley Instruments Model 590 CV Analyzer The INPUT and OUTPUT connectors of the Model 590 are connected to the capacitor using Model 4801 RG 58 BNC 4200 900 01 Rev H February 2013 Return to Section Topics 4 37 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual cables The Model 590 is controlled by the Model 4200 SCS through the GPIB bus Use a Model 7007 GPIB cable to connect the Model 590 to the Model 4200 SCS Figure 4 58 provides an illustration of these connections Figure 4 58 Keithley Model 590 CV Analyzer DUT connections Faraday Shield Metal Polysilicon Gate Oxide To the 4200 SCS z ae Silcon Substrate Probe Station i Chuck KCON setup For this tutorial the Model 590 CV Analyzer must be included in the Model 4200 SCS system configuration KCON is used to add external equipment to the test system For details about KCON refer to the Reference Manual Keit
93. and the test frequency using the following formula a Ibur Cpur Capacitance of the DUT 2nfV 4c f Test frequency Hz Vac Measured AC voltage V Measurement functions The Model 4210 CVU can measure the following parameters e Z Theta Impedance and Phase Angle e R jX Resistance and Reactance Cp Gp Parallel Capacitance and Conductance e Cs Rs Series Capacitance and Conductance e Cp D Parallel Capacitance and Dissipation Factor e Cs D Series Capacitance and Dissipation Factor Figure 1 15 shows the vector diagram and fundamental equations for impedance Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Figure 1 15 Vector diagram for impedance Z Z Impedance Z Z IR Ta R Zcos0 6 Phase Angle R Resistance Z R jX X Zsin X Reactance o 8 arct 5 Y arctan R G jB Y Admittance G Conductance The simplified model of a DUT is a resistor and a capacitor As shown in Figure 1 16 the Model 4210 CVU can measure the DUT as a series configuration of the resistor capacitor RC or as a parallel RC configuration NI R Figure 1 16 Measure models simplified HCUR HPOT Cs 4200 CVU Rs DUT 4200 CVU LPOT LCUR Series RC Configuration Parallel RC Configuration Test signal The test signal can be set for the following frequencies e 1kHz through 10 kHz in 1 kHz increments e 10 kHz thro
94. are included in a single Model 4200 test project QPulse IV Complete There are two methods for performing DC IV sweeps e Use the SMUs to provide the DC source and measure Vd Id DC Vg ld DC Because SMU output impedance varies with the source and measure ranges high gain or high frequency DUTs may be difficult to test because of oscillation Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests e Pulse IV instrumentation may also be used to provide DC like IV sweeps Using the pulse source and measure hardware provides a fixed output impedance which can provide better DC test results on high gain or high frequency DUTs that are prone to oscillation Use the desired pulse test and set the duty cycle from the typical low values up to 90 to mimic a DC test by choosing a longer period up to one second with appropriate pulse width and transitions NOTE For further information on how to use Model 4200 PIV Q refer to Application Note PA 956 Rev B Model 4200 PIV Q Pulse IV Measurements for Compound Semiconductor and LDMOS Transistors This and all 4200 related notes can be found on the Model 4200 SCS Complete Reference See QPulselV Complete project in Section 12 of the Reference Manual for details on using the PIV Q package 4200 900 01 Rev H February 2013 Return to Section Topics 3 65 Section 3 Common Device Characterization Tests How to perfo
95. at a frequency of 50 Hz or 60 Hz Line voltage is automatically sensed but line frequency is not For more information see the Reference Manual Line frequency setting page 2 17 Check to ensure the operating voltage in your area is compatible CAUTION Operating the instrument on an incorrect line voltage may cause damage possibly voiding the warranty 4200 900 01 Rev H February 2013 Return to Section Topics 1 5 Section 1 Getting Started Model 4200 SCS User s Manual 1 6 NOTE To avoid possible problems caused by electrical transients or line voltage fluctuations the Model 4200 SCS should be operated from a dedicated power source Line power connection Perform the following steps to connect the unit to line power and turn it on 1 Before plugging in the power cord make sure the front panel power switch is in the off position 2 Connect the female end of the supplied power cord to the AC receptacle on the rear panel see Figure 1 1 WARNING The large diameter line cord supplied must be used to power the Model 4200 SCS DO NOT use a different line cord Using a different line cord may result in personal injury or death due to electric shock 3 Connect the other end of the supplied line cord to a grounded AC line power receptacle WARNING The power cord supplied with the unit contains a separate ground for use with grounded outlets When proper connections are made the instrument chassis is connected to power line gro
96. connection is desired set Pin1 0 Another way to set the connections is to use the GUI To use the GUI click the GUI button see Figure 3 110 that displays the dialog shown in Figure 3 111 Click the desired crosspoint closures The Input strings shown in the GUI must match the labels supplied in the KCON setup for the switch matrix card see Figure 3 99 Note that the Open All checkbox and OpenAll parameter in the UTM parameter list controls whether to open all switches before making any new switch closures This checkbox does not clear the state of the switches shown in Figure 3 111 3 130 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 3 Continue to enter values for the remaining 7 pairs of TermldStr and Pins 4 Running the test will set the switch closures as specified There are three similar projects that stress the DUT with a number of Program Erase waveforms then periodically measures the VT e FlashEndurance NAND project e FlashEndurance NOR project e FlashEndurance switch project The purpose of these projects is to determine the lifetime of the DUT based on the number of Program Erase cycles withstood by the device before a certain amount of shift or degradation in the VT or other measurement The waveforms may be unique for each pulse channel and are defined in the separate Kpulse program and saved to files For more information
97. connector adapters NOTE Use torque wrench to tighten SMA connections to 8 inch lbs A Adapter BNC Male to 3 lug Triax Male B Adapter SMA Female to BNC Female ig e r To Model 4205 PG2 Channel 1 Table 3 25 Key pulse generator parameters AC stress for WLR Parameters Range Specification Rise Fall time Variable 100 ns 500us Pulse width 200 ns 1ms single pulse Pulse amplitude 5 to 5 V Duty cycle 50 Base voltage 5 V 4200 900 01 Rev H February 2013 Return to Section Topics 3 77 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 78 Device Stress Properties configuration notes The following information is supplemental to the procedure in Figure 3 59 to configure Device Stress Properties Multi site testing If your project is set up to run on more than one site you will need to set the Device Stress Properties for each site separately This allows you to have different levels of stress on each site After performing all the steps in Figure 3 59 to configure the first site repeat step 1 in Figure 3 59 to select the next site The COPY and PASTE buttons can be used to speed up the configuration process see Clear copy paste and paste to all sites on page 3 80 DC voltage DC current or AC voltage stressing A device can be stressed with DC voltage or DC current using an SMU When stressing with DC voltage a current limit can be set and wh
98. constructed using a zero order hold and are flagged with a 1 in the least significant bit LSB of the 16 bit waveform code Also the number of points per point can be set using average equivalent time points to increase the resolution of the waveform 4200 900 01 Rev H February 2013 Return to Section Topics 1 35 Section 1 Getting Started Model 4200 SCS User s Manual Average equivalent time points When using the equivalent time acquisition mode the number of user defined points per point for equivalent time sampling of a waveform can be set Average equivalent time points can be set from 2 to 100 When using equivalent time sampling any signal up to the analog bandwidth of the scope can be acquired regardless of the sample rate The scope gathers the necessary number of samples across several triggers For more information about average equivalent time points command refer to the Model 4200 SCS Complete Reference ZTEC User s Manual Reference channels Up to four waveforms can be stored in nonvolatile flash memory as reference channels The stored waveforms are retained when power is removed These waveforms are limited to a record size of 32K samples Calculate functions The scope has two calculation channels to create new waveforms mathematically The following calculate functions can be performed Add e Subtract e Multiply Copy Invert e Integral e Derivative e Absolute Value e Limit test
99. controller NOTE KXCI and KITE cannot run simultaneously Beginning with KTE Interactive 6 0 two optional KTE Interactive tools have been added e Keithley Pulse tool KPulse A virtual front panel software application used to control the optional pulse generator cards The dual channel pulse generator cards are integrated inside the Model 4200 SCS mainframe e Keithley Scope tool KScope A virtual front panel software application used to control the optional scope card The scope card is a dual channel digital storage oscilloscope that is integrated inside the Model 4200 SCS mainframe NOTE Although KScope and KPulse can be launched at the same time as KITE KScope KPulse and KITE cannot communicate with hardware simultaneously KITE project structure This subsection overviews the primary features of KITE These features allow you to create execute and evaluate tests and complex test sequences interactively and without programming This subsection also overviews use of an essential companion tool KULT that allows you to create libraries of specialized user test modules UTMs that run in KITE KULT is discussed in detail in the Reference Manual Keithley User Library Tool KULT page 8 1 KITE interface The KITE application consists of a variety of graphical user interfaces GUIs that allow you to do the following e Customize existing supplied interactive test modules ITMs or create new ITMs from existing templates
100. described below These packages use different hardware and are not compatible with the PMU or RPM Introduction PIV A and PIV Q Pulse IV is used in addition to DC IV test results to address two DUT behaviors self heating also called joule heating and transient charging For RF Transistors especially those implemented with compound semiconductor materials these two effects are called dispersion The self heating and charging effects cause the DC and Pulse IV responses to differ Pulse IV addresses self heating by permitting the use of a low duty cycle lt 0 1 pulses to virtually eliminate heating within the DUT Pulse IV addresses the charging effects by using pulse widths short enough so that charges cannot be sufficiently mobile within the pulse NOTE The UTMs used for legacy Pulse IV tests are described in the following paragraphs These UTMs control all instrumentation for these applications The pulse generator and scope cards can also be used as stand alone instruments Reference Manual Pulse Source Measure Concepts page 11 1 explains front panel operation and provides remote programming information for the pulse generator and scope For remote programming the pulse generator card uses LPTLib functions while the scope card uses kiscopeulib UTMs Reference Manual Pulse Projects for Models 4200 PIV A and 4200 PIV Q page 12 1 provides additional information about projects for the PIV A and PIV Q packages Reference Manual
101. directory in the Test Library box in the device plan window NOTE Only the default test library directory is available in the Test Library box unless other test library directories were previously added through the directories tab of the KITE Options window The KITE Options window is accessed by selecting Options on the Tools menu 4 Inthe Test Library directory tree select a destination folder that is appropriate for the tests 5 Inthe Test Sequence Table of the device plan window select the test s to be submitted NOTE You may select and submit multiple TMs and UTMs at the same time To select a sequential group of TMs and UTMs hold down the Shift key while clicking the first and last ITM UTM in the sequence To select a group of individual ITMs and UTMs hold down the Ctrl key while clicking the individual ITMs and UTMs Figure 2 41 shows the charg_char ITM selected in the Test Sequence Table and the Capacitor destination folder selected in the Test Library 7 For example the c S4200 kiuser Tests factory default directory or another directory that was specified as the default using KCON such as C S4200 YourName Tests 2 50 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 41 Selected ITM and destination folder Sequence Test Sequence Table Test Library Test Name UID C 454200 kiuser T ests z E Mo
102. drive except CD CD R CD RW drives and write protected drives or directories The default user directory contains several subdirectories Each of these subdirectories is discussed below under a separate heading Devices subdirectory By default the Devices subdirectory contains the KITE Device Library that is provided with each version of KTE Interactive Also by default you can access this Device Library when operating KITE You can copy devices from this library to their project s or submit devices from their project s to this library NOTE For more information about submitting devices to libraries refer to the Reference Manual Submitting devices ITMs and UTMs to libraries page 6 151 Understanding device libraries A Device Library is comprised of devices stored in folders that are organized by device category To create a new device category create a new folder in the C S4200 kiuser Devices directory 2 To provide project access to additional device libraries or to change the KITE Device Library that appears by default use the KITE Options window Select Options in the Tools menu On the Directories tab of the KITE Options window that appears choose Device Libraries in the Show Directories for box See Figure 2 16 2 The C S4200 kiuser Devices is the factory default Devices directory You can also create a new folder in another Devices directory for example C S4200 YourName Devices 2 26 R
103. either three or four terminal FETs Many DC probe manipulators are available with SSMC connections at the probe needle holder e Cascade DCM 2xx Kelvin DC probe manipulators e Suss Microtec probe tips e Signatone SCA 50 coaxial probes e American Probe and Technologies 74CJ series coaxial probe holder Any probe interconnect with SSMC connectors near the probe tip Figure 3 31 shows the schematic diagram of the PRB C adapter cable The Ground Tap is to be connected to the Ground Tap of the second PRB C adapter cable as shown in Figure 3 32 4200 900 01 Rev H February 2013 Return to Section Topics 3 31 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 30 PRB C adapter cable pulse SMA to SSMC Y Figure 3 31 Schematic diagram of the PRB C adapter cable Pulse Signal to Gate or Drain SSMC Male SMA Female S Signal G Ground SSMC Mal Ground Tap connect ae to other Y cable Ground Tap These SMA to SSMC Y adapter cables are appropriate for on wafer pulse IV testing of nominally DC structures Figure 3 32 shows Pulse IV connections from RBTs to DC probes for a DC layout DUT structure using the PRB C Y adapter cable These Y cables are not appropriate for higher frequency devices The upper frequency limit is not specified because the effect of actual device layout and probe configuration can have a significant impact In general any device that has an Ft muc
104. entire sweep Best Fixed or manually specified numeri cal range Stop E Step fo Data Points jr Off Time 0 1 Base Yoltage Src Range 20v x ia Ia Compliance 0 1 A v Measuring Opt lt v lt v Select the SMU current compliance for a voltage sweep or the voltage compliance for a current sweep 3 Ina list sweep configuration window you enter a list of discrete voltages or currents instead of start stop and step values In a current bias or voltage bias configuration window you enter a fixed level value instead of start stop and step values Pulse mode Select Pulse Mode to provide pulse output for sweep linear log and list and bias forcing functions For details see Understanding pulse mode on page 2 17 2 20 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 12 Measuring Options Check to enable current If desired enter Check to enable voltage measurement options a preferred measurement options recording of current in the data label for recording of voltage in the Check to cause KITE to Sheet tab Data worksheet the current in Sheet tab Data worksheet log 32 bit measure and availability of current lieu of the and availability of voltage ment status codes in data for plotting in the default label data for plotting in the the Data worksheet Graph tab Grap
105. etter ee ee es 2 7 TOSSES a Serco ene aapa aea to Caaan eaa saenga ata E AAA aAA Ea a AARE 2 7 ITMs versus UTMS 00 cece eee eee 2 8 Definingan BA s eee aS eo a a ee ia 2 10 Defining AaUTM sisis tiae a E A teen eee 2 11 How to create your own ITMS 0 00 cece ee eee eee 2 13 Understanding the ITM definition tab 2 13 Understanding the ITM forcing functions 2 13 Understanding dual sweep 20022 ee eee eee eee 2 15 Understanding pulse mode 0 2020ee eee ee eee 2 16 How to use the definition tab to configure ITM parameters 2 17 Match the physical and virtual connections 2 17 Configuring forcing functions for each device terminal 2 17 Configuring pulse mode 20 2220 eee eee eee 2 20 Basic test execution 0 cece eee eee 2 21 Project navigator check boxes 2 22200e eee ee eens 2 21 Tests ITMs and UTMS 20 2 0c 2 21 Device plani s iirst si eka ee enn Es ee Ae oid eed Seles 2 22 S bsit pla nas alei aia anaia e aai pe See eye eee doe aa 2 22 Initialization and termination steps 000 0c ee eee 2 22 Project plan ieii weak aera aaa ada Ne ee ea A 2 22 Executing an individual test 200 0c eee eee eee 2 22 Selecting a test sieo oe oa eee pete ee E 2 22 Running the testtir ersan Wied echeg a eee a a a Ne ied nd etd 2 23 How to display and manage test results
106. example if 20 us is the expected PW try using a 2 us PW b Enter the parameter values into the Program UTM following the procedure in Running the Program or Erase UTM Initially set NumPulses 2 or another small number c Uncheck the Erase and Fast Program Erase tests d Enter the parameter values for the Vt MaxGm test following the procedure in Running the Vt MaxGm ITM e Run the test i Double click 4Terminal FloatingGate ii Press the Run button f Check the graph on the Vt MaxGm test It will likely be too low on the first few runs but note the total number of pulses sent to the DUT Rerun test until the Vq has met the target value and note the total pulse width to use to program the device using either the Program or Fast Program Erase tests g Repeat the above step with the Erase test feeding final results into the Erase and Fast Program Erase tests h Ensure that the erase parameters are fully erasing the DUT i Set the parameters in the Fast Program Erase test Set NumPulses 10 ii Uncheck the Program and Erase tests iii Double click 4Terminal FloatingGate Press run iv Note the V7 v Change NumPulses 100 or a larger number vi Double click 4Terminal FloatingGate Press Append vii Note the Vr If the V value for the tests are similar then the erase pulse is fully erasing the DUT Running the Program or Erase UTM These tests are located in all of the Flash projects It outputs a number of
107. executed the parameters will be passed from the UTM to the user module and the user module will be executed User libraries and user modules are created and managed using the Keithley User Library Tool KULT For more information about user libraries refer to the Reference Manual Keithley User Library Tool KULT Section 8 In this example the connect UTM is connected to the ConnectPins user module in the Matrixulib user library ConnectPins has a total of 17 parameters The first parameter OpenAll will cause ConnectPins to open all matrix crosspoints before closing any additional crosspoints NOTE Itis a good practice to open all the switch connections before making any new closures CAUTION Inadvertent switch closures may damage device under test DUT The 16 additional parameters are comprised of eight terminal pin pairs As shown in Figure 4 20 each specified terminal pin pair causes ConnectPins to make the desired matrix connection Because the instrument to matrix to pin connectivity was defined using KCON KITE is able to connect the specified instrument terminals to the appropriate tester pins automatically 4 14 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 20 Connect parameters for 4terminal n fet device Name In Out Type Value 1 OpenAll Input INT 1 lt Opens all relays 2 TermldStr Input CHAR_P
108. four project plans that use subsite cycling These include HCI_1_DUT HCIl_4 DUT NBTI_1_DUT and EM_const_l The process flow for these projects is shown in Figure 3 79 NOTE Anew project plan for subsite cycling can be created or one of the four existing project plans can be modified as needed For details see the Reference Manual Building modifying and deleting a Project Plan page 6 47 When adding a device plan or test to a subsite cycling project the following sequence must be followed 1 Insert a device plan for the type of device to be tested For example if testing a 4 terminal n channel MOSFET insert the 4terminal n fet device into the subsite plan 2 Under the device plan insert a new test ITM or UTM or copy a test from the test library and make the proper modifications 3 Use the Formulator for the ITM or UTM to configure data calculations on test data e The window to set the formulator is opened by clicking the Formulator button on the definition tab of the ITM or UTM For more information about how to use the Formulator refer to the Reference Man ual Analyzing test data using the Formulator page 6 288 4 Select the Output Values to be exported to the subsite data sheet for inter stressing monitoring 4200 900 01 Rev H February 2013 Return to Section Topics 3 93 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 94 The window to select output values is opened
109. from channel 1 of the scope card VgProg double Array of programmed gate voltage values Table 3 9 Return values for vdsid_pulseiv Value Description 0 OK 1 Invalid value for Vgs 2 Invalid value for VdStart 3 Invalid value for VdStop 4 Invalid value for VdStep 5 Invalid value for PulseWidth 6 Invalid value for PulsePeriod 7 Invalid value for AverageNum 8 Invalid value for LoadLineCorr 9 Array sizes do not match 10 Array sizes not large enough for sweep 11 Invalid VPUId 12 Invalid GateSMU 13 Invalid DrainSMU 14 Unable to initialize PIV solution 4200 900 01 Rev H February 2013 Return to Section Topics 3 49 Section 3 Common Device Characterization Tests Vdid_Pulse_DC_Family_pulseiv Description Connection Table 3 10 The Vdid_Pulse_DC_Family_pulseiv sweep is used to perform a Pulsed vs DC Vd ld sweep using the 4200 PIV A package This test is similar to a typical Vd Id but only two sources are used one for the DUT Gate and one for the DUT Drain Pulsed Measurements are made with the 2 channel scope 4200 SCP2 To create a family of curves choose an appropriate start and stop value for Vgs and a number of steps This routine can run the sweeps in three different ways 1 DC only 2 Pulse only 3 Pulse and DC curves This routine supports from one to 10 Vd ld curves based on up to 10 different Vgs values This routine also supp
110. gate voltage values VgProg double Array of programmed gate voltage values VdMeas double Array of measured drain currents VdProg double Array of programmed drain voltages IdArray double Array of measured drain current values Table 3 15 Return values for vgsid_pulseiv Value Description 0 OK 1 Invalid value for Vds 2 Invalid value for VgStart 3 Invalid value for VgStop 4 Invalid value for VgStep 5 Invalid value for PulseWidth 6 Invalid value for PulsePeriod 7 Invalid value for AverageNum 8 Invalid value for LoadLineCorr 9 Array sizes do not match 10 Array sizes not large enough for sweep 11 Invalid VPUId 12 Invalid GateSMU 13 Invalid DrainSMU 14 Unable to initialize PIV solution Vgld_DC_Pulse_pulseiv Description 4200 900 01 Rev H February 2013 The Vgld_DC _Pulse pulseiv sweep is used to perform a Pulsed vs DC Vg Id sweep using the 4200 PIV A package This test is similar to a typical Vg Id but only two sources are used one for the DUT Gate and one for the DUT Drain Pulsed Measurements are made with the 2 channel scope 4200 SCP2 This routine can run the sweeps in three different ways 1 DC only 2 Pulse only 3 Pulse and DC curves This routine supports from one to 10 Vd Id curves based on up to 10 different Vgs values This routine also supports the 4200 PIV A package using the 4200 RBT For this package all test parameters and limits are given below except the 4200 PIV A with th
111. groups in the periodic table of the elements but other groups or elements may be used Note that the PIV Q package is not compatible with the Model 4225 PMU or 4225 RPM See Section 16 of the Reference Manual for information on using the PMU and RPM for Pulse I V testing What is the PIV Q package The PIV Q package is an optional factory installed kit to the Model 4200 SCS The focus for the PIV package is testing RF FETs that exhibit self heating or charge trapping effects also called dispersion To accomplish pulse IV testing of LDMOS and compound semiconductor FETs the PIV Q package consists of the following e Model 4205 PG2 Dual channel voltage pulse generator Qty three e Model 4200 SCP2HR Dual channel oscilloscope e 4205 PCU Pulse Combiner Unit to create one higher power pulse channel for the DUT drain by combining the four pulse channels from two 4205 PG2 cards e Pulse IV Interconnect adapters and cabling e Pulse IV software Projects and test routines for testing of RF FETs including cable compensation and load line algorithms to provide DC like sweep results Target applications and test projects The PIV Q package includes test projects that address the most common parametric transistor tests e Vds id e Vgs id These tests are provided in both DC and Pulse modes allowing correlation between the two test methods These tests as well as initialization steps for scope auto calibration and cable compensation
112. illustrated in Figure 4 1 A library of user modules called prbgen is provided with the Model 4200 SCS to facilitate prober control This generic prober user library developed and maintained by Keithley Instruments allows KITE to control all supported probers in the same manner Therefore KITE projects utilizing prbgen will work with any prober supported by Keithley Instruments Refer to Table 4 2 for the list of supported probers NOTE The information provided in this overview is a summary of the information provided in the Reference Manual Using a Probe Station Appendix G 4 16 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Table 4 2 Supported probers Supported Probe Additional Information Stations Model 4200 SCS Reference Manual Suss MicroTec Model PA 200 Appendix H Suss MicroTec PA 200 Prober Micromanipulator Model 8860 Appendix l Micromanipulator 8860 Prober Manual or Fake Appendix H Suss MicroTec PA 200 Prober NOTE Contact Keithley Instruments for the most up to date list of supported probe stations Sophisticated prober control software available from each supported prober vendor provides access to the full feature set of each prober In all cases this prober control software provides the ability to define a list of wafer locations to be probed The Model 4200 SCS relies on the prober
113. interconnection information below is for a typical two card 4 pulse channel Model 4200 SCS FLASH configuration using four Source Measure Units SMUs In addition to the cabling there are corresponding parameters in the Segment ARB table that must be set This is also covered in the Reference Manual Multi channel synchronization with the Segment Arb Mode page 11 32 Figure 3 93 Flash NAND Project Definition Tab including arrows for the 6 input arrays Flash NAND Keithley Interactive Test Environment OFFLINE Program 1 1 j laj x E Eile yiew Project Run Tools Window Help 18 x E o Eo e CEARA G ZEF Site E Definition Shest Graph Status S Mef Flash NAND S MIE FlashSubsite Formulator User Libraries flashulb z BME AT i FloatingG ate ih ant on Output Values User Modules single_pulse_flach WIE Erase ME Fast Program Erase fa ME SetupDC Ea Name o In Out Type Value E MJE VtMaxGm 1 NumPulseTerminals Input INT E MJK STeminalFloatingGate 2 PulseTerminals Input CHAR_P VPUICHT VPUICH2 VPUZCHT VPU2CH2 IZ Programs 3 PulseVoltages Input DBL ARRAY j lt t ME Erase8 4 PulseVoltagesSize Input INT 4 MIIE FastProgramErase8 5 PrePulseDelays Input DBL ARRAY i 6 PrePulseDelaysSize Input INT 4 T SEF 7 TransitionTimes Input DBL ARRAY 4 3 8 TransitionTimesSize Input INT 4 9 PulseWidths In
114. internal auto sense resistance appears between SENSE and FORCE NOTE The SENSE terminal does not need to be connected to the DUT for the preamp to operate correctly Remote sensing is automatic If SENSE is connected to the DUT errors due to voltage drops in the FORCE path between the preamp and the DUT will be eliminated and the preamp will sense locally PreAmp CONTROL connector The preamp CONTROL connector connects to the SMU PA CNTRL connector and provides both power and signal connections from the Models 4200 SMU or 4210 SMU to the Model 4200 PA preamp Multi frequency capacitance voltage unit CVU Introduction The Model 4210 CVU is a multi frequency 1 kHz to 10 MHz impedance measurement card that is installed in the Model 4200 SCS mainframe The AC test signal 10 mV RMS to 100 mV RMS can be DC voltage biased from 30 V to 30 V The CVU measures impedance by sourcing an AC voltage across the device under test DUT and then measures the resulting AC current and phase difference The capacitance and conductance are derived parameters from the measured impedance and phase Model 4210 CVU card Measurement overview AC impedance measurement Zpyt of the device under test DUT is performed by sourcing an AC test voltage across the device and measuring the resulting AC current The AC current is measured as shown in Figure 1 14 The Model 4210 CVU uses an auto balance bridge ABB technique to achieve accurate impedanc
115. kHz frequency point DC bias goes to 1 V Steps 3 and 4 are repeated DC bias goes to 2 V Steps 3 and 4 are repeated The sweep delay hold time and output disable are set from the ITM timing window for sweeping Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 24 CVU Frequency Sweep step output 100kHz 200kHz Stop 2V 400kHz 200kHz P SD Dall wer 5D Del Mer pet msr 5D Det msr 100kHz 200kHz P f S0 Start OV Run A j lt gt lt _ gt lt gt lt gt lt lt gt lt gt HT z Hold Time Disable outputs Test HT SD Del Msr sp Del Msr SD Built In System Delay at completion Del Programmed Delay enabled PreSoak 1V AC Voltage 15mVRMS IMS Measure Time How to perform a Pulsed I V test on my device There are a few ways to perform Pulse IV testing with the Model 4200 SCS The most recent method uses the Model 4225 PMU with or without the Model 4225 RPM The PMU is an integrated solution with two channels of voltage pulsing and integrated simultaneous voltage and current sampling See Section 16 of the Reference Manual for more information on the PMU RPM and how to test using these instruments There are also pulse packages Models 4200 PIV A and 4200 PIV Q that use individual pulse and scope instruments and are
116. name that is not already used in the Scratch Pad The calculation add subtract multiple or divide performs the selected math operation on two selected Scratch Pad waveforms In Figure 5 15 SINE1 is added to RAMP1 After selecting the two waveforms and the math operation click Preview to display the result of the calculation Clicking Ok places the waveform in the Scratch Pad Figure 5 15 Calculation waveform Waveform Generator Waveform Type Calculation v Waveform Name CALC1 Settings v 3 5 gt WAVE A Type SINE Points 1000 Cycles 2 Amplitude 1 Offset 0 Phase 0 Duty Cycle 50 2 0E 02 4 0E 02 6 0E 02 8 0E 02 1 0E 03 WAVE B Points Noise waveform An example of a noise waveform using the default settings is shown in Figure 5 16 The waveform for this example is named NOISE1 but can be any name that is not already used in the Scratch Pad 4200 900 01 Rev H February 2013 Return to Section Topics 5 15 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual 5 16 After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 16 Noise waveform default settings Waveform Generator Waveform Type Noise _y Waveform Name NOISE1 Settings Number of Points 500 Base Offset V 0 Std Deviation 1 Noise Mean 0 v 3 x gt Notes s i i At Give
117. of the resistance of the drain source as mentioned above Adjusting the pulse level to match the desired drain voltage is performed iteratively with an oscilloscope to measure Vp during the pulse The projects in the Flash package use two methods to define the multi level waveforms used in flash memory testing for example Figure 3 88 For endurance or disturb testing that uses the subsite stress measure looping feature of KITE the Kpulse application is used to define each unique voltage waveform The details for using Kpulse are provided in How to Generate Basic Pulses page 5 1 4200 900 01 Rev H February 2013 Return to Section Topics 3 103 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Use Kpulse to define and export each unique waveform The following procedure details how to create and export a hypothetical program erase waveform Using Kpulse to create and export Segment ARB waveforms NOTE Each segment pulse waveform must have the same total time The minimum programmed time for any segment is 20 ns 20 E 9 but actual output waveform performance is determined by the channel output capability To use Kpulse to create and export Segment ARB waveforms 1 Close KITE and KCON if open 2 Open Kpulse 3 Load the Kpulse setup file Koulse_Flash_Example_01 kps Click File gt Load Setup then double click Kpnulse_Flash_Example_01 kps If this file is not available see Table 3 26 and enter
118. on the Complete Reference icon on the Model 4200 SCS desktop refer to Figure 1 44 and then clicking the Release Notes link see the arrow in Figure 1 45 Figure 1 44 Model 4200 SCS complete reference icon D Complete Reference Figure 1 45 Complete reference home page A f a A E C s4200 sys help indexhtrr O X f Keithley Model 4200 SCS C x amp rs Google REATER feedback this CD install acrobat m 4200 SCS User Manual Application Notes 4200 SCS Reference Manual Technical Notes 4200 SCS Technical Data White Papers QUICK START GUIDES Data Sheets 4200 CVU Quick Start Guide Related Literature 4210 MMPC S Quick Start Guide Online Support 4210 MMPC C Quick Start Guide 1 50 Return to Section Topics 4200 900 01 Rev H February 2013 Section 2 Model 4200 SCS Software Environment In this section Topic Page Understanding KITE 0 cece eee eee eee 2 3 KITE project structure 0 c eee eee eee eee 2 3 KITE interface 0 0 cece eee eee eee eee eee 2 3 Graphical User Interface 0022 cece eee eee eee 2 4 Project navigator 5 s2js e ni ete este ee ste eee eee as 2 5 Project defined 2 55 00 taken Pena de eae Ee 2 6 Project components 20 cece eee eee 2 7 SiteS 4 8c teehee eRe weeds wae dead eS 4 2 7 S bsites ra n Hag Manele aie ake alin E a a OE cre ees 2 7 Device Smi amei ai tite id Gaited 2 eh i Ea na eta at aang ep
119. portion of the test These settings are necessary when using an array DUT structure either direct connect see Figure 3 96 or using a switch matrix see Figure 3 97 a Ifa SMU bias is required then set the voltage and current limit b If using shared cabling or SMU VPU pairings set all Pins entries 1 to disconnect the SMUs during the stress allowing the pulse signals to properly reach the DUT terminals c If using a switch matrix set the pin connection If no connection is required input 0 Pulse generator settings configure the waveforms used during the stress See Using Kpulse to create and export Segment ARB waveforms to create the desired multi level pulse waveforms a Click the button for each available pulse channel Choose the desired waveform previously created and exported from the available list Each channel must have an associated ksf waveform and each waveform should have the same duration Parameter properties show which parameters are graphed in the Subsite graph and if any test should end early If a test should end after a certain VT shift either an absolute voltage shift or a shift follow the below a Choose or Abs b Check the box c Enter the Target value Before running the test for the first time it is recommended to try out the project on a scrap device a Ensure that the project navigator is showing the FlashEndurance entry highlighted as shown in Figure 3 113 b Click the R
120. power equally among its three connectors using a 16 67 W resistor in each leg see Figure 1 26 The power divider is used on the gate of a FET to provide an impedance matched signal pulse path 50 Q As shown in Figure 1 26 the power divider is equipped with two SMA female connectors and one SMA male connector The SMA male connector allows the power divider to connect directly to the RBT AC input Figure 1 26 3 port power divider Connect to Scope Card SMA Female gt Connect to Pulse ii ee Generator Card ower Divider lt SMA Male Connect Directly to RBT AC Input Using an RBT and power divider Figure 1 27 shows a block diagram of the pulse IV PIV test system that uses two SMUs a pulse generator card one channel a scope card both channels two RBTs and the power divider 4200 900 01 Rev H February 2013 Return to Section Topics 1 31 Section 1 Getting Started Model 4200 SCS User s Manual The power divider provides impedance matching an RBT functions as a coupler for DC bias from a SMU and pulse output AC from a pulse generator card The output of an RBT provides pulse output that rides on the DC bias level The scope card is used to capture pulse waveforms or pulse readings The DUT is typically a wafer site using prober or a discrete device The capacitor for an RBT functions as a low impedance component for high speed
121. probesubsites test descriptions 000 4 23 Numerics 4 terminal n MOSFET tests 0 eee 3 5 4200 SCS Hardware Overview 1 11 59283 Heading Level 3 Average equivalent time points 1 36 72968 Heading Level 4 2 4 1 5 Project Plan 0 ceeeeeeees 2 23 Acquisition sample rate ccccceceeeeeeeeeeeees Add a Device PIAN stssiscsiccscssveassresvtdeansnarorssecteaends Add a new Device Plan to a KITE project Add a new Subsite Plan e eeee Add a new Subsite Plan to a KITE project Add a switch card to the system configuration 4 10 Add a switch matrix to the system configuration 4 9 Add a test fixture to the system configuration 4 9 Add the cvsweep UTM ccceeceeeeeeeeeeeees 4 43 Adding a Keithley 590 CV Analyzer to the system COMPQUALION catxeiseoxsensseressarreuaemresnrsecennseves Adding a probe station i oa Adding a pulse generator Adding a switch matrix a se Advanced Connections oo eee 1 42 Basic ground unit characteristics 0 0 SMU source measure configuration SMU PreAmp source measure configuration 1 19 Basic test execution eeeeeeeeeeeeeeeeeeeeeteeees 2 22 Boot the system and log in n se 1 42 Buttons to close or reduce size of test documents 4 35 Calculate functions oo eee eee teeter eens 1 36 Changing KITE startup behavior 5 3 11 Chassis ground cccc
122. project plans you must first submit it to a device or test library Submitting devices to a library You may submit a project plan device an empty device plan to any Device Library if you submit it with a name that does not duplicate a device name that is already in the library To submit a device to a library 1 Inthe project navigator locate the subsite plan that contains the device plan you wish to submit Figure 2 34 highlights subsite_b of the u_build project plan developed for illustration purposes during the example in the Reference Manual Building a completely new Project Plan page 6 47 The subsite_b plan presently contains an added composite device plan to be submitted Figure 2 34 Subsite plan containing the device plan to be submitted E e u build a InitializationSteps e subsite_a 1E 4terminal n fet ME vds id ME vds id B 1E 4terminal n fet 2nd_in_subsite JE vds id2 subsite_b I de 4terminal n fet E tes_drain to source Se4 capacitor JE charg_char SE composite TerminationSteps o ni ere Cee 2 Double click the subsite plan that contains plans for the device that you wish to submit The subsite plan window opens See Figure 2 35 2 46 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 35 Subsite plan window containing the device plan to be submitted Sequence m Device Seque
123. pulses Parameter NumPulses with a shape shown similar to Figure 3 102 on a number of pulse channels Parameters NumPulseTerminals PulseTerminals 1 Enter the number of pulse waveforms required into NumPulseTerminals This must be a minimum of one channel up to a maximum of the number of channels available For a Flash system with 2 4205 PG2 cards there are four pulse channels available Enter which pulse channels will be used into PulseTerminals This is a string of channels in the form VPU1CH1 VPU1CH2 VPU2CH1 VPU2CH2 VPU1 is the 4205 PG2 in the lowest numbered slot right most slot when looking at back of Model 4200 SCS chassis a The characters are all capitalized and each channel is separated by a comma b No spaces are allowed in the PulseTerminals string Enter the values in the five arrays that define the pulse shape referring to Figure 3 102 and the instructions in Entering Segment ARB values into UTM array parameters The number of non blank entries in the array must match NumPulseTerminals as shown in Figure 3 104 NumPulseTerminals 4 and the size each array PulseVoltagesSize PrePulseDelays TransitionTimesSize PulseWidthsSize PostPulseDelaysSize are also four a PulseVoltages Use a positive value for a waveform similar to Figure 3 102 If a negative pulse is required use a negative voltage value To put a pulse channel into a disconnected or high impedance state use 999 b PrePulseDelays TransitionTimes
124. pulses and as a high impedance element for DC This allows the high speed pulses from the pulse generator card to pass through to the output while blocking DC from the SMU The inductors of an RBT function as low impedance components for DC and as high impedance components for high speed pulses This allows the DC bias from the SMU to pass through to the output while blocking the high speed pulses from the pulse generator Figure 1 27 Block diagram of a PIV test system DC Bias and Measure 4200 SMU 1 4200 SMU 2 Channel 1 S Card Pulse Generator Card 3 port Power Divider Channel 1 Output S Channel 2 Not Used SCP2 Oscilloscope Digital storage oscilloscope card Keithley Instruments offers two scope cards Models 4200 SCP2HR and 4200 SCP2 However only one scope card at a time can be used in the Model 4200 SCS system The scope card is a modular dual channel high speed digital storage oscilloscope DSO It uses a high speed memory digitizer DC to 700 MHz and an embedded digital signal processor DSP The scope card has two input channels to capture and analyze a variety of time varying signals KScope a soft front panel software used to view pulse waveforms is included with the Models 4200 SCP2HR and 4200 SCP2 see the How to Generate Basic Pulses in Section 5 for details KScope provides full control of the DSO and allows export of waveform data in a Microsoft Exce
125. sed cer eemeeaeees dae 1 45 Run vds id tOSt eee eeeeeeeceeeeee ee eeeeeeeeeeceeaaaeeeeeeeaaaeeeseseaaeeeeeseaaeeeeeeeaaes 1 46 View and save the sheet data cccccccecececeeeesececcetsnecececeeseeesteceenssene 1 46 View and save the graph data ecceeeceessteeeeeeeecteeeeeetaeeeseetiaeeeeeee 1 47 UC e E E E T 1 49 Accessing the release notes ccedencei ce cczeeesaeececevesdeccares apeceeereesaadevenees E 1 50 2 Model 4200 SCS Software Environment 0 0 cccceeeeeeeeeneeees 2 1 Understanding KITE 0 ceccccscceeeeecneeeeeeeeceeeeeeeaeeeeeeeeaeeeeeeeeaeeeeesenaeeeeeneeaaes 2 3 KITE project STAURIUING i c0c0diiscctecicisieieeteiiseend Hieeeiiilaniibiididees ilies 2 3 KITE interface nnne andun 2 3 Project MAWIGAUON nenrncciciisarini rn Ei 2 5 Project UG Sa E EEEE EA 2 6 Proiect compono E eiis a aE saccade aE 2 7 Wore VD E E A T E T 2 8 Denno an N a E E 2 10 Denning a UTM ccce aE E A 2 11 Using the UTM GUI vi W assseeesssesssrrnesesnneaansnnnnstnnnnaensnnnnntnannaannennnns 2 12 How to create your own TMS 2 ccccei cs coceecetsacceeteesinsncueesseancneeeesaeeeectesteane 2 14 Understanding the ITM definition tab ec ceeceeetteeeeeeeecteeeeeetneeeeeees 2 14 Understanding the ITM forcing functions 0 cceeccceeeeesecceeeeeeeeneeeeneees 2 14 Understanding dual Sweep 2c2s ccceecceteepectenttepeeeccted peeeecetepepeedente epee 2 16 4200 900 01 Rev H February 2013 i Table of Contents
126. settings To effectively compare the two graphs they must both have the same scale settings Figure 4 56 shows the scale settings for the graphs in Figure 4 55 Scale settings for a graph are set by clicking the axis properties item in the graph menu Agraph menu is displayed by placing the mouse pointer in an open area of the graph and then right clicking the mouse NOTE Remember that there is a separate graph menu and axis properties window for each graph Figure 4 56 Graph scale settings Scale Scale Scale Min J0 Min fo Min 0 001 Max 25 Max 0 005 Max 0 005 Auto Vv Auto E Auto E Logarithmic I Logarithmic T Logarithmic T Inverted M Inverted M Inverted T A X axis B Y axis C Y2 axis 4 Compare graphs Visually inspect the two graphs for differences caused by the stress You can also click the Sheet tabs and compare the data collected for the two tests Overlaying graphs To compare the two graphs by laying the after stress graph over the before stress graph 1 For the after stress test click the Sheet tab to display the data spreadsheet 2 Select all five columns by clicking and dragging the mouse pointer from Column A through Column E Press Ctrl C to copy those columns 3 For the before stress test click the Sheet tab and then the Calc tab located at the bottom Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to C
127. single pulse Program and Erase waveforms NOTE The sign of the PulseVoltages array determines whether the pulse is positive usually for a Program pulse or negative usually for an Erase pulse Figure 3 103 defines the parameters for the dual pulse Program and Erase pulse waveform Each parameter in these figures has a corresponding array where each entry in the array represents a pulse channel used in the test NOTE The number of parameters and number of pulse channels in the test must be the same The period of each pulse waveform must be the same This UTM method also includes the triggering settings to synchronize multiple PG2 cards as described above in the Kpulse method but they are built in and do not require user modification 1 Enter the number of pulse channels required for the test NumPulseTerminals up to the maximum number VPU channels in the Model 4200 SCS chassis two channels per pulse card Figure 3 93 shows four 2 Enter the channel names for the number of channels specified above The names are VPUnCHm where n is the number of the VPU card numbered right to left when viewing the back of the Model 4200 SCS chassis and m is the channel number one or two resulting in VPU1CH1 VPU1CH2 There is a comma separator but no spaces used 3 Click each array entry and enter the pulse parameter values for each of the four channels e There are five arrays red arrows in Figure 3 93 for the five pulse paramete
128. source terminals of the DUT and are set to 0 V to effectively ground the terminals Figure 3 68 Segment stressing Stress phase example Pulse Card Pulse Card 4200 SMU 1 SARB Waveform Ch2 SARB Waveform Signal Ground Signal Ground Setting a SMU to OV connects the device pin to signal ground Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Segment Stress Measure Mode configuration The Segment Stress Measure Mode is configured from the subsite setup tab After double clicking the name of the subsite plan in the project navigator select the subsite setup tab see Figure 3 69 For Segment ARB stressing the waveform period is the fundamental unit of time for stressing In the subsite setup tab the term stress counts is used to specify the number of times the Segment ARB waveform will stress the device For example assume the stress count is three and the waveform period is four seconds For that stress cycle the Segment ARB waveform will stress the device three times for a total stress time of twelve seconds Configure stress counts To configure the stress counts for the Segment Stress Measure Mode see Figure 3 69 Figure 3 69 Segment Stress Measure Mode Subsite Setup Sequence Subsite Setup Subsite Data Subsite Graph i rE 3 r eoe a Cycle Mode Stress Meas
129. system connections s 4 17 Controlling a pulse generator Compare the test results 0 ceeee 4 35 Overlaying graphs 0 0 0 4 36 Description of tests 0 cece eee 4 32 POUTHIMIT TEST lt p sussary euceernsmearvannsiwedneans 4 33 pgu1 setup test oo ee 4 34 pgu trigger test cceeeseeeseeeeeee 4 34 First connect test sscscisncssestsnnsrscicroes 4 32 First 1d Vg Est ciscciocnssssnrsvsssrcareemcioes 4 32 Second connect test 0 0 4 33 Second id vg test 0 cceeeeeeee 4 34 Third connect test s rsccssencscsnsreestesses 4 34 KOON S tUD appina 4 28 Open the ivpgswitch project 0 4 31 Running the test sequence ou 4 35 Test system connections s s s 4 28 Controlling a switch matrix connect test description ccceeeeeee 4 13 Running test sequences 005 4 11 Controlling external equipment overview 4 2 Copying entire KITE project 0 eee 3 10 Copying individual tests using the test library manager E E E E E E 3 10 CVU Frequency Sweep bias 3 22 CVU Frequency Sweep step i is 3 24 CVU Voltage Bias ecccccceeeeeceeeeeeeeteeeeeteeeees 3 19 CVU Voltage List Sweep cceeeeeeeteeeees 3 21 CVU Voltage SWEEP isienesrismicnrecnriariamamcnes 3 20 Data Save As WINdOW ou ee eee cee eerteeeeee 2 37 Data worksheet of a Sheet tab containing both data and Formulator results 0 0 0 0 2
130. terminal The SENSE LO terminal is a miniature triaxial connector used to apply the SMU SENSE LO signal to the DUT in a full Kelvin remote sense application e The center pin is SENSE LO The inner shield is SENSE GUARD e The outer shield is circuit COMMON Nominal internal auto sense resistance appears between SENSE LO GUARD and COMMON NOTE The remote sense capability of the ground unit should be used instead of the SENSE LO ofa SMU If it is necessary to use the SENSE LO terminal of an SMU the SENSE LO terminals of all SMUs being used in that Model 4200 SCS should be connected to the DUT PA CNTRL connector The PA CNTRL preamp control terminal is a 15 pin D connector that provides both power and signal connections to the Model 4200 PA remote preamp The preamp can either be mounted and connected directly to the SMU or it can be connected to the SMU using a cable Model 4200 RPC X when mounted remotely Refer to the Model SMU with Model 4200 PA overview for more information about the preamp SMU with Model 4200 PA overview Basic characteristics Current characteristics Current characteristics of the Models 4200 SMU and 4210 SMU when used with the Model 4200 PA are summarized in Table 1 3 The preamp extends the current source measure dynamic range of the Models 4200 SMU and 4210 SMU downward by five decades The lowest current range available without the preamp is 100nA full scale while the lowest range with the preamp is 1
131. test is run see Figure 3 18 the following force measure sequence occurs 1 The DC source goes to the PreSoak voltage of 5 V for the hold time period 2 The DC bias voltage goes to the first step of the sweep 1 V 3 After the built in system delay and programmed delay the Model 4200 CVU will perform a measurement The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Steps 2 and 3 are repeated for the 2 V and 3 V DC bias voltage steps The Sweep delay repeats at the beginning of each subsequent step The sweep delay hold time and output disable are set from the ITM timing window for sweeping 3 20 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests A dual CVU Voltage Sweep can be performed by selecting checking Dual in the Forcing Functions Measure Options window After the last stop step is measured the sweep will continue in the reverse direction For the force settings shown in Figure 3 17 the dual sweep will step as follows 1 V 2 V 3 V 3 V 2 V and 1 V The number of measurements will double to six Figure 3 18 CVU Voltage Sweep output Stop 3V Delay Meas 2V SD Delay Meas Start 1V Frequency 100kHz ae lean pais AC Voltage 15mVRMS HT SD Delay Meas Number of Steps 3 oV HT Hold Time Disa
132. the Keithley Model 707 707A Switching Matrix to the system configuration using the KCON Tools menu as illustrated in Figure 4 23 4 18 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 23 Adding a switch matrix File Help Add External Instrument Switch Matrix Keithley 707 7074 Switching Matrix Capacitance Meter Keithley 708 7084 Switching System Pulse Generator gt Probe Station Test Fixture General Purpose Test Instrument gt Formulator Constants Ctrl F 3 Set the GPIB Address for the switch matrix and add the Model 7174A matrix card in Slot 1 as illustrated in Figure 4 24 Figure 4 24 Configuring the switch matrix Keithley CONfiguration utility File Tools Help ao KI System Configuration Properties Gq KI 4200 SCS E fq KI 4200 MPSMU SMUT insturnent Piepaitise KI 4200 PreAmp Model Keithley 707 707A Switching Matrix J 4 KI 4200 MPSMU SMU2 GPIB Address 118 ha KI 4200 PreAmp F KI 4210 HPSMU SMU3 m Instrument Connection Scheme KI 4200 PreAmp Row Column C Instrument Card 4 KI 4210 HPSMU SMU4 E KI 4200 PreAmp LocalSense C Remote Sense T KI Ground Unit GNDU SDA 5 gt HP 8110 Pulse Generator PGUINST1 piste Hole 2 HP 811034 Pulse Channel Module PGU1 KI 707 7074 Sw
133. the minimum measurement range used with automatic ranging for larger currents Full Auto Limited Auto 10 pA Limited Auto 100 pA Limited Auto 1 nA Limited Auto 10 nA Limited Auto 100 nA Limited Auto 1 pA Limited Auto 10 pA Limited Auto 100 uA 10 Limited Auto 1 mA 11 Limited Auto 10 mA 12 Limited Auto 100 mA OMANDARWN LoadLineCorr int Determines whether to use load line correction to compensate for the voltage drop caused by the 50 sense resistor used to measure the drain current Id 1 load line correction active 0 no load line correction GateCompliance double The SMU current compliance for the DUT Gate DrainCompliance double The SMU current compliance for the DUT Drain NPLC double The DC measurement integration time in NPLC Number of Power Line cycles DCSourceDelay double Time in seconds between the DC source and measure for each sweep point DC_vs_ Pulse int Determines whether to run a DC and Pulse test or a DC only test or a Pulse only test 0 Pulse Only 1 DC Only 2 DC and Pulse VPUID char The instrument ID This should be set to VPU1 for 4200 systems with a 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SMUs in the system 4200 900 01 Rev H February 2013 Return to Section Topics 3 57 Section 3 Common Device Characterization Tes
134. the values into the Segment ARB definition tables in Kpulse Kpulse should look similar to Figure 3 92 See Segment ARB waveforms in Section 5 for details on using KPulse a The keyboard version of copy Ctrl c and paste Ctrl v can be used to copy the Segment ARB values between channels This is useful for ensuring that each waveform has the same period total waveform time b To select cells for copying first move the entry cell to row 1 and Start V Hold down the Shift key while using the cursor arrow keys to highlight all the cells in the Segment ARB waveform Press Ctrl c to copy c Place the entry cell into an undefined channel Row 1 Start V column and press Ctrl v to copy Use the cursor arrow keys to move around and edit the various cells as necessary 4 The trigger 1 values in the 15t and 5th segments These are the first segments in the program and erase pulses in a typical two pulse program erase waveform e In the case of multi card waveform output the trigger is not used as a typical trigger but as a synchronizing signal between pulse cards see the Reference Manual Multi channel synchronization with the Segment Aro Mode page 11 32 NOTE Itis recommended to use trigger 1 for the first segment of each pulse in a waveform 5 For each unique waveform export each to a file following the steps given in the Exporting Segment ARB waveform files page 5 8 6 The exported Segment ARB f
135. to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests INTRODUCTION seisein ade ae ee eee Stine hee al ee hag wed dw alec 3 95 Theory OF operati m szansami a aay gs eens Rice a ee een Bie eS dati pa eke aS ee eee 3 95 Programming and erasing flash memory 20020 200 ee eee eee 3 95 EMGURAMNCE TESTING sscragi agana anim ez cant neha ace B Rh Bela Seeks ae Seneca ees 3 101 Disturb testing 2 40 40 aen tienda bee ie eee ee Leeks 3 101 Using a Switch Matik 22 cs tna ele hee ainiaie eae ede nee ae nee an ees ae 3 102 Pulse waveforms for NVM testing 20 cece eee eee eee 3 103 Using Kpulse to create and export Segment ARB waveforms 3 104 Entering Segment ARB values into UTM array parameters 0005 3 106 Flash Connections i s sc6 ccc cess dei a anaia ere erate eee ee eee ee a 3 109 Direct connection to single DUT 0 ccc eee eee 3 113 Direct connection to array DUT for disturb testing 2 2 0 e eee eee 3 115 Switch matrix connection to array DUT 0 cece eee 3 116 Memory ProjeCts aeciaii e iaaa e dads anita Mare i tee fected asa ayeees 3 117 NVM exampleS iu os ss aliases ce tay doi a o a a a a eae ia ean 3 119 Flash NAND tests 0 0 0 cece eee eee eee 3 119 Flash NOR tests 0 0 e cece nee eee eee eee 3 124 Flash switch tests 0 0 0 cece cee eee 3 124 Running any Flash Project for th
136. to the DUT drain during the sweep vRange int The pulse generator card voltage source range 5 to be calibrated V Valid values are 5 20 PulsePeriod double The pulse period for the Vgs pulse The period 100 e 6 can be set from 40 us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 Vs_Size int Set to a value that is at least equal to the 100 Vm1_size number of steps in the sweep and all three must 100 Vm2_size be the same value 100 Table 3 5 Outputs for cal_pulseiv Output Type Description Vs double The pulse source value V Vm1 double The measured voltage from channel 1 of the scope card Vm2 double The measured voltage from channel 2 of the scope card Note These outputs are included for compatibility with older setups They no longer return any information Table 3 6 Return values for cal_pulseiv Value Description 0 OK 13001 Array Sizes Do Not Match 13002 Arrays Not Large Enough For Data 13003 Invalid Instruments 13004 Unable To Malloc Memory 13005 Unable To Find Delay Between Channels 13006 Scope Measurement Error 13007 Unable To Write To Calibration Files 13008 Invalid Range 13009 Invalid Calibration Type 13010 Calibration Data Does Not Meet Correlation Specification 13998 Calibration Constant Error 13999 Divider Cal Error 4200 900 01 Rev H February 2013 Return to S
137. to the gate of the transistor while its drain is biased at a certain voltage The change in drain current resulting from the gate pulse appears on the digital oscilloscope Figure 3 124 Trapping and de trapping in a single gate voltage pulse Gate Voltage Pulse Charge Trapping during transistor on Down Trace Up Trace Trapping Trapping OV De trap before ramp Clean up interface charges NOTE The Charge Trapping project provides two capabilities Slow charge trapping on a device and the ability to perform relatively generic transient IV tests on a device The time based voltages for the gate signal need to be multiplied by 1 33 if the power divider is used as shown in Figure 3 125 4200 900 01 Rev H February 2013 Return to Section Topics 3 147 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 148 Charge trapping procedure 1 Perform cable correction open and through if necessary with calibration substrate Open and through correction measurements are taken and inputted into correction algorithm to calculate cable losses 2 Connect DUT transistor as shown in Figure 3 125 and Figure 3 126 Input test parameters refer to key parameters contained in Table 3 30 4 The UTM will pulse the gate with single pulse for average gt 1 use a series of very low duty cycle pulses bias drain with a PG2 capture drain current response on oscilloscope then calculate corresponding drai
138. transistors tests consist of two parts 1 Pulse waveforms to program or erase the DUT 2 DC measurements are taken to determine the state of the device This implies switching between two conditions 1 Pulse resources are connected to the DUT 2 Pulse resources are disconnected and the DC resources are connected to the DUT The pulses are used to move charge to or from the floating gate There are two different methods to move charge 1 Tunneling 2 Hot electron injection HEI The tunneling method is commonly known as Fowler Nordheim FN tunneling or quantum tunneling and is a function of the electric potential across the tunneling oxide see Figure 3 82 HEI is considered a damage mechanism in non floating gate transistors and is commonly called hot charge injection HCI HEI HCI is a method that accelerates charges by applying a drain source field and then the charges are directed into the floating gate by a gate voltage Figure 3 82 shows examples of tunneling to move charge to and from the FG The electric field and the preferred direction of electron flow are indicated by the black arrows e The signal applied to each device terminal are indicated by the blue text and blue features NOTE Both the drain and source are not connected to any test instrumentation This condition may also be called floating or high impedance Figure 3 83 shows examples of moving charge using HEI These conditions are only examples with a
139. 0 MPSMU with Pre mp Mode Sweeping Forcing Function voltage Sweep IV Master Yoltage Sweep Function Parameters Sweep Type Linear Log I Dual Sweep Power On o s Delay Select whether a sweep is Select Dual Sweep 2 linear or logarithmic 1Do not change these parameters unless you want to customize the ITM which is beyond the scope of this User s manual Dual sweep with dual sweep enabled the SMU will sweep from start to stop and then sweep from stop back to start When disabled the SMU will sweep from start to stop For details see Understanding dual sweep on page 2 16 4200 900 01 Rev H February 2013 Return to Section Topics 2 19 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 11 Linear sweep or step SMU range Pulse Mode and SMU current compliance For a Linear sweep or step Start is the voltage current at the start of the sweep Stop is the voltage current at the end of the sweep and Step is the voltage current change between steps Data Points calculated automatically from the Start Stop and Step values is disabled For a Log sweep you specify the Data Points Select and configure value The Step value calculated automatically is disabled Pulse Mode e u a lo Prawn Select the SMU range to be used when forcing the specified voltage or current Select dynamically opti mized range Auto single best range for
140. 0 SCS F KI 4200 MPSMU SMU m Instrument Properties Model Keithley 590 CY Analyzer GPIB Address 15 z KI 4200 Pre mp KI 4200 MPSMU SMU2 KI 4200 Pre mp F KI 4210 HPSMU SMU3 Matrix Connections KI 4200 Pre mp Terminal Name Connection Terminal ID H 4 KI 4210 HPSMU SMU4 OUTPUT NC CMTRI KI 4200 PreAmp INPUT NC CMTRIL KI Ground Unit GNDU alyzer CMTR1 lt HP 8110 Pulse Generator PGUINST1 eo HP 811034 Pulse Channel Module PGU1 e HP 811034 Pulse Channel Module PGU2 KI 707 7074 Switching Matrix MTRX1 J KI 7174 Matrix Card CARD E KI 7174 Matix Card CARD2 Kl 7174 Matrix Card CARD3 Probe Station PRBR1 Selected instrument for which this configuration information is displayed m il Workspace Displays configuration properties for the instrument that is selected in the configuration navigator and for external instruments allows changing of configured properties such as the GPIB address shown above Configuration navigator Displays all instruments and equipment that are included in the Model 4200 SCS system configuration Figures 4 4 4 5 and 4 6 describe the menu options of the KCON utility graphical user interface GUI Figure 4 4 KCON utility file menu Saves the revised system configuration making it the working configuration for KITE KULT or KXCI If you do not save the changes the configuration r
141. 00 01 Rev H February 2013 Return to Section Topics Section 1 Getting Started Model 4200 SCS User s Manual Input impedance input voltage range and input voltage offset Table 1 7 lists the input impedances voltage ranges and voltage offsets that can be set for each input channel As shown in the table the setting for each of these parameters depends on the settings of the other two parameters For example to select 50 input impedance range must already be set to one of the eight ranges listed in the table for 50 and voltage offset must not be set greater than 10 V To avoid settings conflicts first set voltage offset to 0 V and then select the 10 V range These settings are compatible with both impedance settings Now you can set impedance range and then offset in that order Table 1 7 Scope impedance range and offset settings 1M Ohm impedance 50 Ohm impedance Model 4200 SCP2HR Model 4200 SCP2 Model 4200 SCP2HR Model 4200 SCP2 Range Offset Range Offset Range Offset Range Offset 50 V pp OV 100 V pp 50 V 10 V pp OV 10 V pp 5V 25 V pp 12 5 V 50 V pp 25 V 5V pp 2 5 V 5V pp 2 5 V 10 V pp 5 V 20 V pp 10 V 2V pp 1 V 2 V pp 1 V 5V pp 5 V 10 V pp 5 V 1V pp 1 V 1V pp 0 5 V 2 5 V pp 5 V 5 V pp 42 5 V 0 5 V pp 1V 0 5 V pp 0 25 V 1 25V pp 5V 2 5 V pp 1 25 V 0 25Vpp 1V 0 25 V pp 0 125 V 0 5 V pp 45 V 1V pp 0 5 V 0 1 V pp 1 V 0 1 V pp 0 05 V 0 25V pp 5V 0 5 V pp 0 25 V 0 05Vpp 1V 0 05 V p
142. 00 SCS desktop 3 Open the PulselV Complete project as follows a Click File gt Select Open Project b If necessary move up one level to display all the project folders and double click the _Pulse folder c Double click on the PulselV Complete folder d Double click Pulse IV Complete kpr to open the project Figure 3 36 shows the project plan that is displayed on the left side of the KITE window 4 Connect or touch down on the chosen DUT 5 Verify the setup as follows i Follow the instructions for Running scope shot to validate proper setup and operation of the PIV A package Ensure that both the gate and drain waveforms are visible and do not have any significant ringing or overshoot see Figure 3 45 ii Try running vds id pulse Running vds id pulse UTM or vgs id pulse Running vgs id pulse UTM and look for a characteristic response If desired DC IV tests may also be run Running vds id DC ITM Running vgs id DC ITM Once both the scope shot and a pulse IV test have been verified pulse system calibration can be performed 6 Calibration Perform the necessary pulse calibrations explained in Running AutocalScope and Running PulselVCal 7 After successful pulse calibrations the system is now ready to be used for pulse and DC characterization of transistor devices 4200 900 01 Rev H February 2013 Return to Section Topics 3 35 Section 3 Common Device Characterization Tests Figure 3 36 Project plan for Pulse lV Compl
143. 023s Frequency 4347 83Hz Delete Move Down ae C s4200 kiuser KPulse ArbFiles seq_1 kaf Channel 1 gt gt Delete Save As Save gt J serka SquareWave Move Up Graph Settings 2 Period Freq 8 04e 006s 124378Hz Type Move Down Scratch Pad Points Scale SQUARE Points 804 Cycles 2 Amplitude pa G on i 2 Offset 1 Phase 0 Duty Cycle 50 Rise Sequencer Time Scale Time points 1 Fall Time points 1 teres Chen jun Tenet Chale Voltage V Points KEITHLEY 1 Click the Arb Generator tab 2 Configure Graph Settings for the previewer e Select Scratchpad or Sequencer e Scratchpad previews the waveform that is selected in the Scratch Pad e Sequencer previews enabled waveform sequences see next bullet e To preview the waveform s in the Sequencer Enable Channel 1 and or Enable Channel 2 e Select the scale for the graph Points Scale or Time Scale 3 Copy Scratch Pad waveforms into the Sequencer a Inthe Scratch Pad click select a waveform to be copied into the Sequencer b Click Channel 1 to copy the selected waveform onto the Sequencer for Channel 1 and or click Channel 2 to copy the waveform into the Sequencer for Channel 2 c To copy another waveform into the Sequencer repeat steps a and b Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 5 9 Section 5 How to Generate Basic Pulses e Changing the waveform sequence
144. 1 37 Ground unit connections 220020005 1 37 Ground unit DUT connections 0 00 e eee eee 1 38 Ground unit terminals and connectors 1 39 FORCE termi al oari anes ene ede e ele Sa eee wee 1 39 SENSE terminal 0000 cee eee eee 1 39 COMMON terminal 20220002 eee eee eee 1 40 Chassis Qround c cc0sc clo d daha ek deh ea ee 1 40 Connecting DUTS cece eee eee 1 40 TOSETIXIUNCS oss ete ede el SE i eed eae aa S 1 40 Testing with less than 20 V 22000055 1 41 Testing with more than 20 V 225 5 1 41 PHODGRS unisti gece Bid ace sce eee Bay 1 42 Advanced connections 20000e eee ee eee 1 42 How to run a basic test 20 cee eee eee eee 1 42 Boot the system and login 2 220000e 1 42 Open KUT Ecce sok cetacean accents etna Sai areca arate Aeaee ana 1 43 Locate and run the vds id test module 1 44 Test Geminition 5 6 26 cs sae ces dhe ee wae eee ee ea ears 1 45 R n vds id test io oye cca ae eis hie pele eae ee alse 1 46 View and save the sheet data 22220000005 1 46 View and save the graph data 20 2205 1 47 Firmware upgrade 000 c cece eee eee eee 1 49 Accessing the release notes 000 0 eee e eee eee 1 50 Return to Section Topics Model 4200 SCS User s Manual 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manu
145. 1 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment e Calc worksheet The Sheet tab Calc worksheet provides a spreadsheet for local data analysis If there are multiple same named instances of an ITM or UTM in a project plan the Calc worksheet equations are unique for each instance e Settings worksheet The Sheet tab settings worksheet documents the test configuration and site number A Sheet tab may also contain one or more Append worksheets Append1 Append2 and so on as discussed in the Append execution of tests test sequences and Project Plans in Section 6 of the Reference Manual Each Append worksheet behaves like a Data worksheet However its data cannot be plotted on a separate Graph tab graph only on the same graph as the Data worksheet data For more information about Sheet tabs refer to Understanding and using the Data worksheet of a Sheet tab Each worksheet contains the following controls A data source identifier e Save as button Opening a Sheet tab To open a Sheet tab 1 Inthe site navigator enter the site number where the ITM or UTM was executed using the spin button controls the little arrows at the right 2 Inthe project navigator double click the name of the ITM or UTM that acquired the data An ITM or UTM window appears displaying the definition tab for the selected ITM or UTM NOTE Ifthe project plan contains multiple instances of an ITM or U
146. 102 Parameters for Program or Erase UTMs using single_pulse_flash module i lt PulseWidths gt iPrePulseDelayS tq __pi iq pi PostPulseDelays TransitionTimes Figure 3 103 Parameters for Fast Program Erase pulse waveform using double_pulse_flash module Pulse1Widths gt i lt Pulse2Widths gt 4 Pulse2Voltages t Pulse 1Voltages PrePulse 1Delays PostPulse1 Delays PrePulse2Delays PostPulse2Delays TransitionTimesPulse 1 TransitionTimesPulse 2 Program test This test uses a partially pre defined waveform see Figure 3 102 to program a flash memory device The Definition tab for this test is shown in Figure 3 104 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 104 Flash NAND project Program definition tab M Flenh NANMD Ketthiry Interactive Test Evironment Pregran 121 E Fae ew Propet fun Tooke Window Help 2x eee aa o me swal ME Flathiatete AE sTawwulFomingi te WG Pages Eme 15 Fat Propet nce WIR Sent FE VWieGe Ar Stave te vi Pogest ih Eweg diS Pairogert used Gouble_pulse_fleeh functics defines and cutputs 1 6 vaveforsz dating of 2 pulses vhich git oboe omer widthe end levels wavefcras ave defined using lire seguents segeent arb acde of the 4205 FG2 The wevetore one be defined for just a program erse
147. 19 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 16 CVU Voltage Bias output PreSoak 5V Frequency 100kHz AC Voltage 15mVRMS Bias 1V lt gt lt gt lt gt lt sles ie gt lt gt lt gt lt gt lt gt ut Int Meas b Int Meas IB Int Mess OV 4 HT Hold Time Disable outputs Run SD Built In System Delay at completion Test enabled Int Programmed Interval Meas Measure Time CVU Voltage Sweep Figure 3 17 shows an example of a FFMO window with CVU Voltage Sweep selected as the forcing function to measure Cp Gp The Sweeping test mode must be selected for this test see Figure 3 11 Figure 3 17 Forcing Function CVU Voltage Sweep Forcing Functions Measure Options Device Terminal A Instrument ID CVH1 Instrument Information Instrument ID CYU1 Instrument Model KICVU Mode Sweeping Select Dual to perform Forcing Function d CVU Voltage Sweep M Master Dual Advanced a dual swee p CVU Voltage Sweep Function Parameters DC Bias Conditions AC Drive Conditions PreS oak js lv Frequency 100k gt Hz Start i lv Voltage fis mY RMS stop Bo MNM se Mo MN Data Points 3 Measuring Options Measured M Test Conditions Column Names Column Names Cp_AB Gp_AB DCV_AB F_AB Parameters Cp Gp x DCV F Hz NOTE AB gt A to B IV Status Compensation Cancel Measure Model When this
148. 2 E 6 2 E 6 NumPulses 1 1 NumSMUBiasTerminals 0 0 SMUBiasTerminals SMUBiasVoltages NumSharedSMUs 4 2 SharedSMUs SMU1 SMU2 SMU3 SMU4 SMU1 SMU2 NOTE Channel count refers to the number of pulse SMU channels with a direct connect setup A setup with four channels of each pulse and SMU is in Figure 3 95 All channels in group must have the same total time Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Running the Fast Program Erase UTM This test is used in all of the Flash projects It outputs a number of pulse waveforms Parameter NumPulses with a shape shown similar to Figure 3 103 on a number of pulse channels Parameters NumPulseTerminals PulseTerminals 1 Enter the number of pulse waveforms required into NumPulseTerminals This must be a minimum of one channel up to a maximum of the number of channels available For a typical Flash system with two 4205 PG2 cards there are four pulse channels available 2 Enter which pulse channels will be used into PulseTerminals This is a string of channels in the form VPU1CH1 VPU1CH2 VPU2CH1 VPU2CH2 VPU1 is the 4205 PG2 in the lowest numbered slot right most slot when looking at back of Model 4200 SCS chassis The characters are all capitalized and each channel is separated by a comma No spaces are allowed in the PulseTerminal string 3 Enter the values in the ten arrays tha
149. 2E 9 1 8544E 3 700 0000E 3 12 6645E 9 3 6263E 3 57 6703E 9 1 9516E 3 800 0000E 3 58 6299E 9 3 9302E 3 58 5344E 9 2 0268E 3 900 0000E 3 60 1882E 9 4 2018E 3 49 3253E 9 2 0816E 3 1 0000E 0 53 2947E 9 4 4372E 3 41 4465E 9 2 1201E 3 1 1000E 0 43 1724E 9 4 6436E 3 9 7377E 9 2 1561E 3 1 2000E 0 15 1988E 9 4 8286E 3 66 1197E 9 1 3000E 0 61 2062E 9 4 9643E 3 56 6608E 9 19 4345E 9 5 0973E 3 49 5304E 9 61 2372E 9 5 1839E 3 JE vas idtt1 1 js vavidpulse JE Vds id 1 1 E vds id pulse Figure 3 48 B3 6N29F G amp OWROGF 3 Graph Definition dialog box and resulting graph that shows the three added curves Graph Definition A ___VdAray Data C WE VgMeas Data D Drain Cale A __ Drainv i Calc B o Drain Cale C ___DrainV Cac D M ___Draini _ Calc E ___Drainv Cale F m 7 0E 3 6 0E 3 5 0E 3 4 0E 3 3 0E 3 2 0E 3 Definition Sheet Graph Status 09 22 2006 11 07 18 KEITHLEY Clear All Axis Properties I Enable Multiple x s Cancel E vdsidpulse JE vosidt1 t E vosid pulse 4200 900 01 Rev H February 2013 Return to Section Topics 3 45 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Pulse IV UTM descriptions
150. 3 2 3 4 Select Pulse to configure the Standard pulse Waveform Type Enable Channel 1 and or Enable Channel 2 A channel must be enabled in order to preview its waveform and turn on its output Configure triggers for both channels of the pulse card e Trigger Source Software External or Internal Bus With External selected select the trigger source Initial Falling Initial Rising Per Pulse Falling or Per Pulse Rising e Output Mode Select the output trigger mode Continuous Mode or Burst Mode Configure the General Settings for both channels of the pulse card e Set the Pulse Period in seconds e Set the Trigger Polarity Positive or Negative e Select Apply Changes Immediately to enable automatic update for pulse output After outputs are turned on step 9 pulse output updates immediately when settings are changed OR Click the Apply Settings button to manually apply settings This button is disabled when Apply Changes Immediately is enabled e Clicking Reset All returns the pulse card to the Standard Pulse waveform type and its default settings It also updates the previewer Configure the Channel 1 Settings and or Channel 2 Settings The Pulse Count field is active if the Burst Mode is the selected trigger mode Optional DC Mode and Complement Mode e With the DC Mode selected the output will be fixed DC at the Pulse High level Disabling DC Mode returns the output to the previously defined pulse e
151. 3 44 1 If measurement parameters pulse average NPLC measure range need to be set use the definition table 2 Optional If only source parameters need to be changed use the UTM GUI by clicking on the GUI button on the Vds id pulse vs DC test Modify the source parameters and click OK when finished 3 Click the green Run button For a test with 40 points the test should take about one minute During the test neither the graph tab or sheet tab is updated Figure 3 44 Default GUI definition and typical graph for vgs id pulse vs dc Vgld_DC_Pulse_pulseiv_setupDLL Vorld Pulse IV UTM Setup p Sweep Type Pulse only C DC only c Defintion Sheet Graph Status 03 09 2007 175634 KES 503 Gate Pulse Vos Start Vgs Stop Vos step 0 Pulse width 1 406 3 Pulse Period 0 f 3063 10 3 0060 103 eE Proiectview E varidpuls IE vesidpubs E vosidpuse E scopeshot J E vdsidputs IE Autocalsc IE PubelVCal E variatie JE vosidt t NUM 9 22AM Running scope shot The scope shot test is used to verify proper connection and system setup The waveform shown in Figure 3 45 is a typical result actual results should be similar If waveform has significant ringing or overshoot the pulse IV tests will not provide good results Check the pulse interconnects to 4200 900 01 Rev H February 2013
152. 3 73 and 3 7 3 89 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual The Settings window for the Cycle Mode is shown in Figure 3 75 It provides basic information on the subsite cycling setup and lists the Output Values for each device and test The Settings window for the Stress Measure Mode is shown in Figure 3 76 It is similar to the Settings window for the Cycle Mode and includes information on Targets For each enabled Target the Target Value is listed After subsite cycling it also indicates if Targets have been reached Figure 3 75 Subsite Data Settings window for Cycle Mode Sequence Subse Setup Subsite Data Subsite Graph Subsite cycling setup 10 17 2005 15 32 26 CONDO lon 3 90 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 76 Subsite Data Settings window for Stress Measure Mode Sequence Subsite Setup Subsite Data Subsite Graph F 1 ibsite Name HCI 2 Site Number 1 3 Cycle Mode Log Stress Mode 4 First Stress Time 10 0 Subsite cyclin Total Stress Time 10009 0 setup 6 Stresses Decade 1 0 7 Stress Measure Delay 0 0 8 Stress Times
153. 340E 0 l E 0 2 6280E 0 000 0000E 3 __2 t 31 453 0000E 3 000 0000E 3 2 9000E 0 2 0000E 0 1 2500E 0 000 E 0 2 8430E 0 000 0000E 3 __2 t 32 465 0000E 3 000 0000E 3 3 0000E 0 2 0000E 0 1 2650E 0 E 0 2 8590E 0 OO0 0000E 3 3 33 484 0000E 3 000 0000E 3 3 1000E 0 2 0000E 0 1 2810E 0 OE 0 2 8750E 0 000 0000E 3 3 34 500 0000E 3 000 0000E 3 3 2000E 0 2 0000E 0 1 2960E 0 E 0 2 8900E 0 000 0000E 3 __3 35 515 0000E 3 000 0000E 3 3 3000E 0 2 0000E 0 1 3120E 0 E 0 2 9060E 0 000 0000E 3 __3 36 531 0000E 3 000 0000E 3 3 4000E 0 2 0000E 0 1 3280E 0 O00E 0 2 9210E 0 000 0000E 3 3 37 _ 546 0000E 3 000 0000E 3 3 5000E 0 2 0000E 0 1 3430E 0 E 0 2 9370E 0 000 0000E 3 3 000 0000E 3 3 6000E 0 2 0000E 0 1 3590E 0 E 0 2 9530E 0 000 0000E 3 34 000 0000E 3 _3 7000E 0 _2 0000E 0 1 3750E 0 E 0 2 9680E 0 000 0000E 3 3 v l Click to display Click to display Settings sheet Data sheet Click to display Calc sheet To select more than one sheet for selective printing hold down the Ctrl key and then click the tab The data is saved as a Microsoft Excel x1s document To save the Data sheet 1 Inthe KITE workspace click the Sheet tab to display the test data 2 Inthe Sheet tab click the Save As button as shown in Figure 1 39 3 From the Save As dialog box specify a file name and path and click Save NOTE The default directory path for exporting data is C S4200 kiuser export View
154. 4 0000E 3 E 0 2 5780E 0 000 0000E 3 1 15 203 0000E 3 000 0000E 3 1 3000E 0 2 0000E 0 1 0000E 0 E 0 2 5930E 0 000 0000E 3 1 16 218 0000E 3 000 0000E 3 1 4000E 0 2 0000E 0 1 0150E 0 E 0 2 6090E 0 000 0000E 3 1 17 234 0000E 3 000 0000E 3 1 5000E 0 2 0000E 0 1 0310E 0 E 0 2 6250E 0 000 0000E 3 __1 t 18 250 0000E 3 000 0000E 3 1 6000E 0 2 0000E 0 1 0460E 0 E 0 2 6400E 0 000 0000E 3 14 19 265 0000E 3 000 0000E 3 1 7000E 0 2 0000E 0 1 0620E 0 0E 0 2 6560E 0 000 0000E 3 1 20 281 0000E 3 000 0000E 3 1 8000E 0 2 0000E 0 1 0780E 0 E 0 2 6710E 0 000 0000E 3 __1 t 21 296 0000E 3 000 0000E 3 1 9000E 0 2 0000E 0 1 0930E 0 E 0 2 6870E 0 000 0000E 3 1 22 312 0000E 3 000 0000E 3 2 0000E 0 2 0000E 0 1 1090E 0 O00E 0 2 7030E 0 000 0000E 3 2 1 23 328 0000E 3 O00 0000E 3 21000E 0 2 0000E 0 1 1250E 0 E 0 2 7180E 0 000 0000E 3 2 24 343 0000E 3 000 0000E 3 2 2000E 0 2 0000E 0 1 1400E 0 E 0 2 7340E 0 000 0000E 3 __2 25 359 0000E 3 000 0000E 3 2 3000E 0 2 0000E 0 1 1560E 0 E 0 2 7500E 0 000 0000E 3 2 26 _ 375 0000E 3 000 0000E 3 2 4000E 0 2 0000E 0 1 1710E 0 JOE 0 2 7650E 0 000 0000E 3 2 27 390 0000E 3 000 0000E 3 2 5000E 0 2 0000E 0 1 1870E 0 A0E 0 2 7810E 0 O00 0000E 3 2 28 406 0000E 3 000 0000E 3 2 6000E 0 2 0000E 0 1 2030E 0 E 0 2 7960E 0 000 0000E 3 24 29 421 0000E 3 000 0000E 3 2 7000E 0 2 0000E 0 1 2180E 0 000E 0 2 8120E 0 000 0000E 3 2 30 437 0000E 3 O00 0000E 3 28000E 0 2 0000E 0 1 2
155. 4200 900 01 Rev H February 2013 Return to Section Topics 2 15 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Table 2 2 continued SMU Forcing function summary General type Name Description and graphical illustrations Step Current Increments a current or voltage to two or more levels each of which is held constant during the progress step of a current sweep a voltage sweep a current list sweep or a voltage list sweep at another terminal For Voltage each current step or voltage step level parametric curve data is recorded in the ITM Sheet tab Data step worksheet The combined data can be plotted in the ITM Graph tab resulting in a series family of curves Stepping the Gate Voltage of a FET Step 4 uo Step 3 Gate Voltage V N we A oO Time At Each Gate Voltage Step Sweeping the Drain Voltage of the FET Drain Voltage V N w A ez j Time 2 16 For forcing function details refer to the Reference Manual The ForcingFunctionName function parameters area page 6 102 Understanding dual sweep A SMU that is configured to perform a linear or log sweep can also be set to perform a dual sweep With dual sweep enabled the SMU will perform two sweeps The first sweep steps from the start level to the stop level The SMU then continues with the second sweep which steps from the stop level back to the start level With dual sweep disab
156. 4200 PreAmp Model Keithley 7174 Low Curent Matrix Card H 4 KI 4200 MPSMU SMU2 ae KI 4200 PreAmp H 4 KI 4210 HPSMU SMU3 Rows Columns KI 4200 PreAmp SMUT Force 1 Pn Foce l 7 Pn7 Foce Z H E9 KI 4210 HPSMU SMU4 KI 4200 PreAmp SMU2 Force 2 Pin2 Forces 8 Pin8 Force 7 T KI Ground Unit GNDU SMU3 Fore 3 Pin3Foce z 9 Pin9Force Elf KI 707 7074 Switching Matrix MTRX1 GNDU Force A Pind Foe z 10 Pin 10 Force OKI 7174 Matris Card CARD Probe Station PRBR1 5 Pin 5 Force z 11 Pintt Force 6 Pin 6 Force 7 12 Pin 12 Force Ready SSS 6 Save the configuration using the KCON File menu as illustrated in Figure 4 27 Figure 4 27 Saving the system configuration JE Tools Help Save Configuration Save Configuration as Web Page Ctrl w Print Configuration Ctrl P Exit Probe station configuration Before KITE can begin controlling a probe station the probe station must be properly configured The probe station configuration includes 1 Making test system measurement and communication connections 2 Creating a probe list using the appropriate prober control software 3 Loading and aligning the wafer Helpful configuration instructions for each supported prober are included in the Reference Manual Appendix H Probe station configuration Refer to Table 4 2 for additional information This tutorial uses a manual probe station howe
157. 4200 SCS Flash project b KITE should resemble Figure 3 116 4 Touch down or connect the DUT 5 Verify setup and connection by running Vt MaxGm test a Set appropriate voltages b Run the test by clicking the yellow and green triangle Append button c Ensure that the Vg lp and V results are reasonable 6 Determine the appropriate pulse voltage levels a Review the section Pulse waveforms for NVM testing on page 3 103 b Recall that pulse voltage levels on the gate will double i For example using PulseVoltage 2 will result in Vg 4 V for a typical high impedance 1 k Q terminal c Use oscilloscope to determine appropriate PulseVoltage values for the desired Vg and Vp making sure to use the 1 M input setting on the oscilloscope i Drain Connect the oscilloscope probe across the drain source of the DUT ii Use the Program and Erase UTMs to output pulses while using the oscilloscope to measure the pulse height Iterate by modifying the PulseVoltages to reach the target voltage 7 Once the appropriate voltage level is determined the appropriate pulse width may be determined by iteratively outputting pulses while occasionally measuring the Vr a Start by using a pulse width that is shorter than the expected PW For example if 20 us is the expected PW try using a 2 us PW b Enter the parameter values into the Program UTM following the procedure in Running the Program or Erase UTM Initially set NumPulses 2 or another s
158. 5B 4 40 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 65 Add a new subsite plan New Subsite Plan x Site j1 H subsite E _ lt ev A Cancel F subsite 0 A Window to specify the B Project navigator subsite plan name Add a device plan To add a device plan 1 A device plan is a collection of tests to be performed on a particular device Open the Add New Device Plan to Project window by clicking the Add new Device Plan button on the toolbar see Figure 4 66A It can also be opened by clicking the New Device Plan item on the Project menu see Figure 4 66B Figure 4 66 Add a new device plan to a KITE project z File View Project Run Tools Help FE F F New Subsite Plan OR gt New Device Pien Click to add device plan A Add new device plan button B Project menu 2 In the window to add a device plan Figure 4 67A double click the Capacitor folder to open it and then click Capacitor to select that device plan name 3 With the capacitor device plan selected as shown in Figure 4 67A click Ok at the bottom of the window The device plan will appear in the project navigator as shown in Figure 4 67B 4200 900 01 Rev H February 2013 Return to Section Topics 4 41 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS Us
159. 67 6992E 6 80 0903E 3 609 2988E 3 _ 77 5284E 6 18 683 8930E 6 115 3977E 6 90 1161E 3 619 4304E 3 125 2259E 6 19 789 0043E 6 162 3409E 6 100 1276E 3 627 6063E 3 172 1681E 6 20 888 2232E 6 223 2297E 6 110 1507E 3 _ 635 3917E 3 233 0558E 6 21 976 7726E 6 297 7393E 6 120 1667E 3 642 5964E 3 307 5641E 6 mD Data AGANE 385 4857E 6 130 1816E 3 649 1763E 3 395 3163E 6 i 484 2263E 6 140 1511E 3 655 0503E 3 494 0555E 6 E wamne 590 9945E 6 150 1487E 3 660 2188E 3 600 8270E 6 700 6144E 6 160 1464E 3 664 6591E 3 710 4575E 6 809 3584E 6 170 1421E 3 668 3878E 3 819 2135E 6 911 9675E 6 180 1413E 3 671 4325E 3 921 8311E 6 1 0118E 3 190 1297E 3 673 6077E 3 1 0217E 3 Data A Cale A Settings A Append A Append A Appends A Append4 4 ME vesatti t NOTE To display hidden Append worksheet tabs use the scroll buttons located at the left side of the tabs Figure 2 28 Append worksheet tabs 4 gt Data A Calc A Settings A Append _A Appen Append executions are not restricted to individual tests An entire test sequence device plan or subsite plan or a project plan may be Append executed n times resulting in n separate Append worksheets for each test in the sequence or project plan Multi site Append execution of a project plan results in multi level sets of Append worksheets Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS Use
160. 7 eo AF Site i E Meld Pise Co Definition Sheet Graph Status intion Sheet Graph Status 104850 Eomaia Timing Ext Condtions Output Valves Speed Nomai v Mode a KEITHLEY Drain E Proiectview E vosidpulse JIE vdsidpuse E vosit pulse JIE scope shot J E vdsidpuise JIE AutocaSco E PuselVCal JE vasite 7 E Proiectview E vosidpuke E vdsidpulse E varid pulse E scopeshot E vdsidpuise E AutocalSco E PulselVCal JE vasite NMI ieam NUM Running vds id pulse UTM The default vds id pulse test uses see Figure 3 40 the same drain voltage settings as the DC vds id The vds id pulse does not have the automatic step capability of the DC vds id There are two ways to generate a family of pulse IV curves The easier way is to use the vds id pulse vs DC see Running vds id pulse vs dc UTM below If using the 8101 PIV test fixture insert the metal can SD 210 DUT as shown in Figure 3 35 To run the three gate voltages using single curve vds id pulse 1 Ensure that the VdStart VdStop VdStep values match the values in the DC vds id To sweep from a high to a low voltage enter voltages so that vdstop lt vdstart and use a negative value for VdStep If any values need to be modified remember to press the Enter key af
161. After configuring the device terminals Terminal settings measurement speed Speed and the test mode Mode a forcing function can be selected from the Forcing Function drop down menu see Figure 3 12 Table 3 1 Forcing functions DC bias settings and AC drive settings FFMO window Forcing Function Test mode DC bias condition AC drive condition example CVU voltage bias Sampling PreSoak 30 V to 30 V frequency 1 kHz to 10 MHz Figure 3 12 DC bias voltage 10 mV to 100 mV CVU voltage sweep Sweeping PreSoak 30 V to 30 V frequency 1 kHz to 10 MHz Figure 3 17 Start Stop voltage 10 mV to 100 mV Step CVU voltage list sweep Sweeping Data Points 1 to 4096 frequency 1 kHz to 10 MHz Figure 3 19 Volts values 30 V to 30 V voltage 10 mV to 100 mV PreSoak CVU frequency sweep bias Sweeping PreSoak 30 V to 30 V start stop 1 kHz to 10 MHz Figure 3 21 DC bias frequency voltage 10 mV to 100 mV CVU frequency sweep step Sweeping PreSoak 30 V to 30 V start stop 1 kHz to 10 MHz Figure 3 23 Start Stop frequency Step voltage 10 mV to 100 mV The CVU voltage sweep can be configured to perform a dual sweep see CVU Voltage Sweep 4200 CVU lowest frequency is 10 kHz 4210 CVU lowest frequency is 1 kHz 4200 900 01 Rev H February 2013 Return to Section Topics 3 15 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manua
162. CS User s Manual 3 140 Running the Vt MaxGm ITM Running the ConPin Pulse or ConPin DC UTM Switch projects only Running endurance or disturb looping The Endurance or Disturb testing is essentially a stress measure test The stress portion applied a number of pulse waveforms to the DUT then periodically measurements are performed 1 2 3 Double click FlashSubsite see red arrow in Figure 3 113 then click the Subsite Setup tab The screen should resemble Figure 3 113 Ensure that the Segment Stress Measure Mode is chosen Determine the stress intervals and how often the measurements are performed Each entry in the Stress Counts box is the number of waveforms that will be output After the listed number of waveform counts is output measurements are preformed All checked boxes in the project navigator will be run after each stress interval a Choose Linear Log or List b Enter the First stress count that must be at least 1 c Enter the Total Stress Count that is the last stress interval output d Number of stresses is the number of stress intervals i For linear the number of total stress intervals ii For log the number of stress intervals per decade count of stress counts e Press the Apply button to see the updated Stress Counts and intervals Click the Device Stress Properties button that will display something similar to Figure 3 114 The General Settings show the SMU settings during the stress
163. CS User s Manual Section 3 Common Device Characterization Tests Figure 3 43 Default definition and typical graph for vgs id pulse PulselV Complete Keithley Interactive Test Environment vgs id pulse 121 B0 G Pulsetv complete Keithley Interactive Test Environment vgs id pulse 121 fe fel TE Ble View Project Run Tools Window Heip Ax E pe Mew Project Run Tools Window Heb ax CE o ee aY eo A CI gt gt e aa se A F EF Defintion Sheet Graph Status Se e Definition Sheet Graph Status Foma User Lina Pusey E E 03 03 2007 172223 ANET Output Vates User Modules vgsd_ puiser z au eR pD se 1V UTM Setup B 4063 306 3 v wi M Gate Puse vA ID scopeshot Vos start Vos step 0 7 Pulse Width Pulse Period a 10 3 o0e 0 H i 1 8640 1 9640 Picjetview Di vosid pulse E veins JIS varias ID scope shot JIS varias JIE AuocaSc J E Pussa JE Vast et JE voie Ge Gee Divorid pute E veils E vor pds E scope shot J E vasit pus JIE Autocae S Pusevcal JE Vassar IE vosmet hum oznam uM 21 AM Running vgs id pulse vs dc UTM Instead of using the separate vgs id ITM and vgs id pulse UTM to compare DC and pulse Vg ld results the vgs id pulse vs DC UTM combines both DC and pulse tests see Figure
164. Chan 2 Trigger OUT 4205 PG2 1 Trigger IN S 4205 PG2 2 Chan 1 Chan 2 DUT Connections Adapters Note All interconnect on instrument WL1 Gate chassis are white SMA cables eres SMA Tee male female male Cables from the instrument to ale device are BNC coax except for the BL2 Drain Pi LEMO Triax to SMA Adapter girect SMU4 connection which is PG BL Select Ei SMA male to BNC female black Triax Use Triax to BNC SMU BL1 adapters if necessary to connect to Instrument Connectors Triax female to BNC female probe manipulators E LEMO Triax Connector J SMA Connector 4200 900 01 Rev H February 2013 Return to Section Topics 3 111 Section 3 Common Device Characterization Tests Figure 3 97 Model 4200 SCS User s Manual Flash Switch connections characterization endurance or disturb testing 4200 SMU 78 2 m Triax 4210 SMU Force 4200 SMU 78 2 m Triax 4210 SMU Force 4200 SMU 78 2 m Triax 4210 SMU Force 4200 SMU 78 2 m Triax 4210 SMU Force Trigger OUT Trigger IN 4205 PG2 1 Chan 1 Chan 2 Trigger OUT Trigger IN 4205 PG2 2 Chan1 Chan 2 5 1 5 m BNC DUT Connections Adapters Ee WN Gate c SMA Tee male female male elt WL2 Gate BL2 Drain Pi LEMO Triax to SMA Adapter eee OM SMA male to BNC female Instrument Connectors E Triax female to BNC female LEMO Triax Connector B SMA Connector Figure 3 98
165. E Action Required ed E Action Required ed E Action Required 5 minutes consisting of two parts Disconnect The DUT For Open Calibration Short The Cables For Through Calibration D Warning This routine will take about A Please Raise The Prober Or A Please Touch Down On A Through Device Or Click Ok to continue or Cancel to abort Click OK When Ready Or Cancel To Abort Click OK When Ready Or Cancel To Abort cni csi cnai Figure 3 38 8101 PIV shorted through socket Source c Body Drain i Y Gate Source ae Body Drain Wate Running vds id DC ITM The default settings sweep the drain from 0 4 V in 100 mV steps while stepping through three gate voltages 1 5 V 2 0 V and 2 5 V see Figure 3 39 When changing these settings make note of the voltages and step size so that the same settings can be used in vds id pulse To run vds id DC ITM 1 Double click the vds id ITM in the project navigator see Figure 3 36 2 Click the green Run button Three vds id curves will be generated and displayed on the graph 4200 900 01 Rev H February 2013 Return to Section Topics 3 37 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 39 Default definition and typical graph for vds id PulselV Complete Keithley Interactive Test Environment Vds id 1 1 DER G PulselV Complete Keithley Interactive Test Environment Vds id 121 UE Fie view Projet Rur Window Help Ce gt gt e Bex
166. E interface default project shown with vds id test selected Selected Test Project Navigator Toolbar KITE Workspace default _hley Interactive Test En vironment OFFLINE vds id 101 1E te wen Yope on mooi mof tp uuu TETEN zjx e Sheet Graph Status Timing Ext Conditions Output Values Speed Normal z Mode Project Tree Wied defaut MZE subsit o le taminal vds id test will be Den SMU2 I FORCE MEASURE ce selected by default Sweer Wet TSEC Tie vos and the Definition tab See A Berar Be Fed ME iove ter 1 BE iva will display the test Pona iiy MJE cv nmostet MK 3teminalnpn bit i DE wok options MME gummel MJE vesat MAA 2 wireresistor MME res2t AD diode Gate Buk MME vid FORCE MEASURE FORCE MEASURE MMe va Step V Master Measure NO Common OV Measure NA WIE cv diode Stat W Measure V YES Measure V NA i top d capacitor a Hanae v Baat Fined ME beeny Points 4 MJE cap MME cv cap Source FORCE MEASURE Bias V WV Measure 1 NO Measure V NO Compt off Projectview JE vdsidt 1 x 2008 12 20 11 09 33 start Bnecution vds idAl l 2009 11 20 11 09 33 aBecucion started Be tee ae ats lt q _ Message Area Locate and run the vds id test module To locate the vds id test module go to the project navigator as shown in Figure 1 36
167. Ei Popes F Eina FORCE MEASURE ME Fart PropareE nss Fir SS Veanes SES RE Sete Liata 10 0 Feasa UO Vat Cong 01A RAPE Jamini ate IY Propet IE Emet WS Fact ProaareE nce x Wire Program 8 test This test uses Segment ARB waveforms to program an 8 terminal flash memory device 4200 900 01 Rev H February 2013 Return to Section Topics 3 123 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 124 Erase 8 test This test uses Segment ARB waveforms to erase an 8 terminal flash memory device Fast Program Erase 8 test This test uses Segment ARB waveforms to program and erase an 8 terminal flash memory device Flash NOR tests The Flash NOR project has tests similar to the Flash NAND project with parameter defaults for NOR type floating gate DUTs Flash switch tests The Flash Switch project has similar tests to the Flash NAND with parameter defaults for using a switch matrix for more complex multi DUT addressable test structures see Figure 3 84 Also SMU and 4205 PG2 pulse channels are connected to the matrix differently eliminating the SMU Pulse sharing of cables to the DUT Using the switch means that ConPin tests see Figure 3 109 are added after the Open VPU Relay tests in the direct connect versions Flash NAND see Figure 3 101 and Flash NOR Figure 3 109 Flash Switch project 5 Flash Switch Keithley Interactive File View Project Ru
168. Enable the Complement Mode to set pulse high to the low level and pulse low to the high level To configure other installed pulse cards for Standard Pulse click on the tab for the desired pulse card and repeat steps 1 through 7 Turn on all enabled channels Click the green triangle to turn on enabled channels for all pulse cards installed in the Model 4200 SCS With the output on the square box will turn red Clicking the red box turns off the outputs Return to Section Topics 5 5 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual 5 6 Segment ARB waveforms Segment ARB waveforms are configured and controlled from the PG2 tabs in the GUI Figure 5 4 explains how to use the GUI for standard pulse output NOTE Due to the Segment ARB engine overhead there is an additional 10 ns interval added to the end of the last segment of a Segment ARB waveform During this interval the output voltage solid state relay control high endurance output relay HEOR and trigger output values remain the same as the final value reached in the last segment Start stop and time restrictions The start level of the first segment and the stop level of the last segment must be the same In Figure 5 4 Segment 1 start and Segment 7 stop are both set for 0 0 V The stop level fora segment must be the same as the start level for the next segment In Figure 5 4 the stop level for Segment 1 is 1 0 V which is the same as
169. Ext Conditions OuiputVales Speed Noms Mode MISE subsite WHEE steminaln fet 2E FORCE MEASURE T S ae MJE subst Stat OV Measure V YES IE void Stop V Range V Best Fred AE ivg Step 0 1 Compt 0 14 MME cv nmostet Points 51 WK 3terminal npn bit MJE vceic ME gummel MJE vesat MAh Qwireresistor MJE res2t Mt diode Gate ME vid FORCE MEASURE FORCE MEASURE Mv a JE wd a Step V Mastai Measure l NO Measure NA JE cv dode Stat V Measure V YES Measure V NA Drain Me capacitor Stop SV Range V Best Fixed MJE cap Step 1V Compl 0 14 wv Me cv cap Points 4 Source FORCE MEASURE Bias V OV Measure NO Measure V NO Compt 0 14 off Projectview delat J vdsidti 2000 12 09 10 55 50 start macution vsidMal 2008 12 03 10 88 80 2008 12 03 10 55 53 stop ction wis idhlal 2008 12 03 10 55 53 Tot uemeion Tina 00 00 00 03 Startad KITE interface descriptions 1 Project navigator Where a project plan is assembled edited displayed and executed A project plan defines a series of tests of various devices at one or more locations Double clicks 2 4 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment here open the definition configuration and tool screens A selection here defines the starting loca
170. Figure 4 7 Devices connected to 707A switching matrix Model 707A Switching Matrix Model 7174A Low Current Matrix Card Columns SMU1 SMU2 GPIB To the SMU3 4200 SCS a ee 7 M GNDU s we 1 N Ch Cnanne SAFETY 1 MOSFET INTERLOCK 1 t I To the 4200 SCS 1 Model 8006 Component Test Fixture l l I aag iil lt I gaa vs I 7 ies ar Triax Se I at Connector I I 5 F F GNDU G 1 I i I I 1 L pI 707A chassis 1 E F Force G Guard C Common x x x i a FGC P i on an Pin 1 Ler KCON setup After connecting the system as indicated in Figure 4 7 run the KCON utility to add the switch matrix and test fixture to the system configuration KCON is used to manage the configuration of all instrumentation controlled by the Model 4200 SCS software Once the matrix and test fixture s have been added and the instrument to matrix to pins connections have been defined simply specify an instrument terminal and test system pin and KITE will automatically connect the three Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS using the matrix Changes to the system configuration will only be necessary when changes to instrument to matrix to pins wiring are made Follow the steps below to start KCON and modify the
171. Formulator Constants Ctrl F Test Fixture General Purpose Test Instrument gt 5 Set the GPIB Address for the switch matrix and add the Model 7174A matrix card in Slot 1 as illustrated in Figure 4 42 4200 900 01 Rev H February 2013 Return to Section Topics 4 29 Section 4 How to Control Other Instruments with the Model 4200 SCS 4 30 Figure 4 42 Configuring the switch matrix E Keithley CONfiguration utility File Tools Help Model 4200 SCS User s Manual ae KI System Configuration g KI 4200 SCS G F KI 4200 MPSMU SMU1 KI 4200 Pre mp G 4 KI 4200 MPSMU SMU2 KI 4200 Pre mp G 4 KI 4210 HPSMU SMU3 KI 4200 Pre mp G 4 KI 4210 HPSMU SMU4 KI 4200 PreAmp o KI Ground Unit GNDU p HP 8110 Pulse Generator PGUINST1 2 HP 811034 Pulse Channel Module PGU1 8 KI 707 707 Switching Matrix MTRX1 KI7174 Matris Card CARD1 Properties r Instrument Properties Model Keithley 707 7074 Switching Matrix GPIB Address 18 X r Instrument Connection Scheme Row Column C Instrument Card LocalSense C Remote Sense Switch Cards Slot3 fEmpty X Slot4 Empty X sit Slot6 Empty E 6 Add a manual probe station to the system configuration using the KCON Tools menu as illustrated in Figure 4 43 If a test fixture is already part of the configuration it must be removed before the probe station can be added To remove any exte
172. Function 4200 PA 4200 PA Voltage source range 210 mV 5 uV 210 mV 5 uV full scale set resolution 2 1 V 50 uV 2 1V 50 uV 21 V 500 uV 21 V 500 uV 210 V 5mV 210 V 5 mV Voltage measurement range 210 mV 1 uV 210 mV 1 uV full scale nominal resolution 2 1V 10 uV 2 1V 10 pV 21 V 100 uV 21 V 100 uV 210 V 1mvV 210 V 1mvV Basic SMU preamp circuit configuration Basic SMU preamp circuit configuration is shown in Figure 1 12 This configuration is similar to the SMU configuration discussed earlier exception the preamp which adds low current source measure capabilities 1 18 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started NOTE The preamp FORCE terminal is connected to DUT HI while DUT LO is connected to COMMON See the Reference Manual Basic source measure connections page 4 3 and Source Measure Concepts Section 5 for more source measure details Figure 1 12 Basic SMU preamp source measure configuration 4200 SMU 4200 PA or 4210 SMU PreAmp Control SENSE LO Ground SENSE Unit DC preamp PreAmp terminals and connectors The locations and configuration of the Model 4200 PA terminals are shown in Figure 1 13 Basic information about these terminals is summarized below For additional information about making preamp signal connections refer to the Reference Manual Basic source measure connections page 4 3 WARN
173. G2 cards continue to connect the cable and Tees to the adjacent cards Torque both connections using the wrench For a system consisting of four PG2 cards there should be three SMA tees used to connect the triggering across the four cards Take an SMA Tee and connect one SMA to BNC adapter to one of the female connectors Connect the assembly from step 5 to one Triax to SMA Adapter Connect one 8 inch 20 3 cm SMA cable to the remaining SMA female connector Connect one 5 foot 1 5 m black BNC cable to the BNC connection Perform steps 5 8 three more times Take one of the cable assemblies from step 9 connect the SMA to CHANNEL 2 of the PG2 in the left most slot PG2 in the slot with the highest number Carefully insert the LEMO Triax connector from step 10 into the Force connector on the SMU in Slot 4 Route BNC cable from SMU4 to the DUT terminal Bulk connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator Take one of the cable assemblies from step 9 connect the SMA to CHANNEL 1 of the PG2 in the left most slot PG2 in the slot with the highest number Carefully insert the LEMO Triax connector from step 13 into the Force connector on the SMU in Slot 3 Route BNC cable from SMU3 to the DUT terminal Source connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator Take one of the cable assemblies from step 9 connect the SMA to CHANNEL 2 of the PG2 in the right mos
174. GPIB and controlled by a PC station The Keithley Model 4200 SCS parameter analyzer eliminated the need for a dedicated PC Its interactive test environment KITE allows users to use the Model 4200 SCS both as a parameter analyzer and an external instrument controller making it a command and control center of the entire instrument rack KITE software already supports pulse generators switch matrices and CV analyzers through software control modules known as drivers Occasionally a user may need to control an instrument that is not supported by a standard Keithley Instruments driver library To learn more about creating external instrument drivers for the Model 4200 SCS refer to the Keithley Instruments Technotes No 2661 1005 located on the Model 4200 Complete Reference Return to Section Topics 4200 900 01 Rev H February 2013 Section 5 How to Generate Basic Pulses In this section Topic Page Keithley Pulse Application KPulse 05 5 2 KPulse Getting started 22000 eee eee eee 5 2 Starting KPulse ricco riri Behe eres Seg et eee oes 5 2 KPulse setup and help 0 00 cece eee eee 5 3 Triggering esd rc Soh es Ge oe ee eee de arent ty we eee ees 5 3 Standard pulse waveforms 0000 cece eee eens 5 4 Segment ARB waveforms 00 e eee eee eee eee 5 6 Exporting Segment ARB waveform files 5 8 Custom file arb waveforms full arb 0 0 00 e eee 5 8 Wavefor
175. HNAHBBB OH oo E ProjectView 2 24 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment How to display and manage test results Data file management Using file and test result directories KITE application files and test results are stored on the Model 4200 SCS hard drive by default However KITE projects and various other KITE application files can be stored and utilized on any available hard drive except CD CD R CD RW drives and write protected drives or directories NOTE Storing application files on a congested network drive can degrade overall test sequence performance The best Model 4200 SCS system performance is obtained by storing all KTE Interactive application files on the Model 4200 SCS internal hard drive There sweep and sampling measurement speed is not affected perceivably by network traffic or any other embedded PC system activities This subsection provides useful information regarding the default organization of KITE application and data files Additional information regarding KTE Interactive file management and system administration can be found in the Reference Manual Managing multiple users and systems page 10 6 CAUTION Never directly edit KITE application files using a test editing program with one exception noted in How to create and add a new device on page 2 28 because unexpected results and application crashes can
176. IB interface 10 Instrument slots Any of the nine slots can be used for a SMU Pulse generator cards are installed starting in Slot 9 and continuing to the right A scope card can be installed in the slot next to the last pulse generator card A CVU card will be located just after the last SMU In Figure 1 9 a pulse generator card is installed in slot 9 and a scope card is installed in slot 8 SMUs are installed in slots 1 through 4 11 Ground unit Provides a convenient way to make system level COMMON and SENSE circuit connections 12 Serial port Connects to RS 232 peripherals such as a prober 13 Parallel port Used to interface to printer or other parallel device 1 12 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started NOTE The actual rear panel layout may vary slightly from the diagram shown in Figure 1 9 Activate LAN2 connection The LAN2 connection may be deactivated by default To enable the LAN2 connection e Go to Windows Device Manager e To change network adapter settings in the Device Manager Double click Network adapters Po NS change to enable device DC source measure unit SMU Introduction Right click the network adapter for which you want to change settings and then click Properties On the Advanced tab make the desired changes Device properties for network adapters are device dependent Determine which settings you need to
177. ING The preamp terminals can carry exposed hazardous voltages that could result in personal injury or death if the safety interlock is asserted See the Reference Manual Control and data connections page 4 21 for additional information about safety interlock connections 4200 900 01 Rev H February 2013 Return to Section Topics 1 19 Section 1 Getting Started Model 4200 SCS User s Manual CAUTION The maximum allowed voltages between the preamp signals are as follows e COMMON to chassis ground 32 V peak e GUARD to COMMON 250 V peak SENSE or FORCE to GUARD 40 V peak FORCE terminal The FORCE terminal is a standard triaxial connector used to apply the preamp FORCE signal to the DUT e The center pin is FORCE The inner shield is GUARD The outer shield is circuit COMMON Figure 1 13 Model 4200 PA connectors KEITHLEY MADE IN U S A 250V COMMON PEAK l ze qE ez 20 s WARNING NO INTERNAL OPERATOR SERVICEABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY PreAmp Control Connector WY Rd YW JFOHLNOD Mounting Foot 1 20 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started SENSE terminal The SENSE terminal is a standard triaxial connector used to apply the preamp SENSE signal to the DUT in a remote sense application e The center pin is SENSE The inner shield is GUARD e The outer shield is circuit COMMON Nominal
178. In a properly configured and calibrated system the pulse IV results should correlate to the DC results within 4 with many results less than or equal to 2 when testing a device that does not exhibit heating or charging effects Figure 3 46 Highlighting all entries in vds id data sheet Definition Sheet Graph Status 2 3 4 5 6 7 8 Formulas x Save As D catel 1 16 2461E 9 Entries Selection Cell Click to select all entries JE vas idit1 1 js vos id pulse WF Yds id 1 1 E vds id pulse 3 44 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 47 Section 3 Common Device Characterization Tests Data from vds id pasted into vds id pulse calc sheet A Definition Sheet Graph Status c D E Save As Al Gatel 1 Gatel 1 Drainl 1 Drain 1 Gatel 2 Drainl 2 16 2461E 9 4 7760E 6 000 0000E 3 9 0625E 9 5 3460E 6 21 6275E 9 414 8992E 6 100 0000E 3 32 2948E 9 700 9696E 6 14 1997E 9 767 9861E 6 200 0000E 3 23 8883E 9 1 3398E 3 68 6611E 9 1 0679E 3 300 0000E 3 62 1448E 9 1 9124E 3 58 8911E 9 1 3261E 3 400 0000E 3 65 6813E 9 2 4215E 3 50 5318E 9 1 5397 E 3 500 0000E 3 55 7284E 9 2 8717E 3 42 5304E 9 1 7126E 3 600 0000E 3 45 1101E 9 3 2695E 3 COn OOF wn 9 618
179. KA vovetorn coab th at Heiene les tor s aodepa ise Channels l Keita oe 4206 PS amie camel in the a2 a300 el choszie wingle_pulee_fleeh functics defines and cutputs 1 68 vaveforar TE slot Frogers Erase test This test uses a partially pre defined waveform see Figure 3 102 to erase a flash memory device The Definition tab for this test is shown in Figure 3 105 Figure 3 105 Flash NAND project Erase definition tab M Flamh MAMD Kesthiey Ireecartive Test Frvimement Erase i 27 D Fie ew Project Run Toii Winds Help 2x Dirion Sheet Bragh Swaai AA ari Finga te rat RE Poges Cupa Veber Une Mockier angie puse Boi a Fone Mp Fart Progeret usa EAE ral Mngt rad WATE aning te ME Pazi lb Ennet PE Fat hogertuced double_pulse_flech fonctics defines and output 1 6 waveforsr iating of 2 peleme vhich kava incdepedest widthe and levels wavetcrss aya defined using lire seguents segeent arb moda of the 4206 FG2 The wevetore oan be defined for just a program oes uae or wovetorn fete both Sk ood esse ies tor 199 RRIS Channels BL l gt tna ee ac06 Pa2 sae anas ere pe an the i200 el chosriv xingle_pulzs_ lazh functics defines and cutpute 1 6 warefores 4200 900 01 Rev H February 2013 Return to Section Topics 3 121 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Fast Program Erase test This test uses a partially pre defined
180. Model 4200 SCS User s Manual Understanding pulse WONG sicacccivsccdececavcnnactevuviecceseuivadectersvianecetivvaaecebeunys 2 17 How to use the definition tab to configure ITM parameters 05 2 18 Basic test execution 0 2 2 eeeccceceeccccceeeeeecceeeenseeceeeetteeceeeensseeceeeeenseneeeeeeneaees 2 22 Project navigator check DOXG S 1i ceccccceesuieceedeeansedeetianederuuiueeesseies 2 22 Executing an individual test ccecceeeeeeeecneeeeeeeecneeeeeetaeeeeeeeiaeeeenee 2 23 How to display and manage test results 00 cccceeeeeccceeeeeeeeceeeeeeeeeeeeneneees 2 25 Data file MANAGEMENT eee ceeeeee eee ceeeeeeeeeeeeeeeeeeeeeeaeeeeeeeeeeeeeseeeaaaeees 2 25 How to manage numeric test results in Sheet tab ccceeeeeteeees 2 32 How to manage graphical test results in the Graph tab 2 39 KITE library managameni ccccccicccect eu srcecceceunnedcucstuencectesaanecedieatendeneavumnecedste 2 46 Submitting devices ITMs and UTMs to libraries cceeeeeeeeees 2 46 Submitting tests to a library dei cceseevcdgcensecdzceetentdeseletetnedsteetsnedeseebannactvenss 2 49 3 Common Device Characterization Tests 0 cccceeeeeeeeerenees 3 1 How to perform an l V test On My device eee ce eeeeeneceeeneeeeeeeeneeeneeeeeneees 3 4 Default project Ov rvi W cciicicececatadceaceeuachedessssteayscecvisiysdeesiidgdeesietaeedeceieny 3 4 How to perform a C V test On my device
181. Models 4220 PGU 4225 PMU and 4225 RPM page 16 1 provides information on using the Models 4220 PGU and 4225 PMU to perform pulse l V tests 4200 900 01 Rev H February 2013 Return to Section Topics 3 25 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 26 What is Pulse IV Pulse IV provides a user with the capability of running parametric curves on devices using pulsed rather than DC signals A pulse source with a corresponding pulse measurement can be used in two general ways The first method is to provide DC like parametric tests where the measurement happens during the flat settled part of the pulse Typical tests are IV sweeps such as a Vds ld family of curves or a Vgs ld curve used for Vt extraction The second method is transient testing where a single pulse waveform is used to investigate time varying parameter s An example of this second case would be using a single pulse waveform to investigate the Id degradation versus time due to charge trapping or self heating Why use Pulse IV Both methods of Pulse IV PIV testing listed above are used to overcome or study the effects of self heating joule heating and for time domain studies such as transient charge trapping in the DUT The pulse and pulse IV testing is increasingly important in semiconductor research device and process development This section will focus on the DC like IV sweep capability of the PIV A package although othe
182. ORCE gt 7 White SMA Cable 15cm 6in male to male HB SMB Male to SMA Female Adapter NOTE Use torque wrench to tighten SMA connections to 8 inch lbs BNC Male to SMA Female Adapter Figure 3 127 Example slow single pulse waveform graph 800 f ly degradation PW Pulse Width 600 sas Vg 1 to 2 2V PW 60us t t 5us Drain Current uA 200 Time us 4200 900 01 Rev H February 2013 Return to Section Topics 3 149 Section 3 Common Device Characterization Tests 3 150 Figure 3 128 Single slow pulse example data plot 450 1nm Chem Ox 3 5 nm HfSi O 400 y nFET W L 10 1um 350 Vg 40mV 300 250 200 150 Drain Current uA 100 50 0 0 0 Gate Voltage V Return to Section Topics Model 4200 SCS User s Manual ee ue x en Vg 1to2 2V PW 10uS tp tf Sys AN tr 4200 900 01 Rev H February 2013 Section 4 How to Control Other Instruments with the Model 4200 SCS In this section Topic Page How to control external equipment 4 2 Controlling external equipment overview 4 2 Keithley Configuration Utility KCON 05 4 5 How to control a switch matrix 005 4 7 KCON Setup sinasin a a a ae cee edt ee eS 4 8 Open KITE and the ivswitch project 4 11 Running test sequences 020e ee eee eee 4 11 The connect test
183. PIB and Ethernet instruments Device unique ID number UID A number assigned to each instance of a same named project compo nent for example ITM UTM Device or Subsite node and only once per KITE Project NOTE If UID 0 this means that this component can occur only once Initialization and Termination Steps A special UTM that can be run just like any other UTM however during looping these nodes are called only once at the beginning Init Steps or at the end Term Steps of a test looping sequence 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment NOTE Refer to Project plan later in this section The term project is sometimes used to refer to a project plan Project components Because KITE is most valuable for automatic characterization of semiconductor wafers KITE projects are organized in a manner consistent with the organization of a modern semiconductor wafer A project visits and evaluates locations on the wafer in the following logical hierarchy e Project e Sites Virtual can be switched using the Sites Navigator e Subsites e Devices e Tests These are the primary components of a project Two other components initialization steps and termination steps are discussed in the Reference Manual Project structure page 6 38 These components are defined contextually in the next subsections Sites At the macroscopic level one or more
184. Pin 1 je J5 BulkPin 4 D fi Device2 pin assignments Device Pin Switch Connections DrainPin 6 Date GatePin 7 I lim tha Source Pin 5 om ie BukPin 8 mfg The above pin assignments must match the actual device pin connections to the matrix card Device1 Device2 Source Degradation targets Tests and Output Values for the device are listed in this area of the properties window Post stress Output Value readings are compared to the first cycle pre stress readings The Change between the pre stress and post stress readings are listed in Subsite Data sheet An Output Value can be enabled checked as a Target and assigned a Target Value in or an absolute value When all Targets for a device are reached that device will not be tested for subsequent cycles The Subsite Plan will stop when all enabled targets are reached or the last subsite cycle is completed Stress measurements Stress measurements can be performed for each device When the device is being stressed by DC voltage the DC currents can be measured If the device is being stressed by DC current the DC voltages can be measured Stress measurements are placed in the Subsite Data sheet for the Stress label When a device is being stressed by AC voltage VPU the current or voltage cannot be measured by the VPU The VPU does not have measure capability Figure 3 66 shows an example of a single First Stress Only measurement for Drain If
185. Pt an array of voltage levels levelArr and a file name fname For more information refer to the Reference Manual arb_array page 8 119 The arb_file function is used to load the defined full arb waveform into the pulse generator For more information refer to the Reference Manual arb_file page 8 120 4200 900 01 Rev H February 2013 Return to Section Topics 1 29 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 24 Full arb waveform example 20V nG af Points 80 Time Interval 10ns 15V t 2e Point Level 10V 4 s 5V s ov Ons 200ns 400ns 600ns KPulse full arb waveforms The Keithley Pulse tool KPulse is a virtual front panel software application used to control the optional pulse generator cards KPulse can be used to create save and output full arb waveforms and provides a collection of basic full aro waveform types such as sine square triangle noise Gaussian and calculation After configuring one of the basic waveform types you can save itas a kaf file For more information refer to the How to Generate Basic Pulses in Section 5 Once a full arb waveform is saved as a kaf file it can later be imported back into KPulse The waveform can also be loaded into the pulse generator card using the arb_file function For more information refer to the Reference Manual arb_file page 8 120 Pulse card settings Settings and features for the pul
186. SCS User s Manual Table 3 13 Inputs for vgsid_pulseiv Input Type Description Vds double The drain source voltage output by the DrainSMU defined below Vg_off double The DC bias applied by the GateSMU to put device in the OFF state Normally set to 0 V for enhancement FETs may be non zero for depletion FETs VgStart double The starting sweep value for Vg output by channel 1 of the pulse generator card VPUID VgStop double The final sweep value for Vg output by channel 1 of the pulse generator card VPUID VgStep double The sweep step size for the Vg sweep output by channel 1 of the pulse generator card VPUID PulseWidth double The Vgs pulse width PW The PW can be 40 ns to 150 ns 10 ns resolution Pulses wider than 150 ns will begin to be attenuated by the capacitor in the 4200 RBT PulsePeriod double The pulse period for the Vgs pulse The period can be set from 100us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 The period is most easily calculated by multiplying the largest desired pulse width PW by1000 Example PW 150 ns so Period 150 us AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set AverageNum 0 for Adaptive Filtering GateRange double The voltage measure range for the scope channel measuring the Gate Use 0 for scope autoranging or specify
187. SMU1 is connected through a Tee to a pulse channel and SMU2 is also connected to another pulse channel then the SharedSMUs string would be SMU1 SMU2 int Number of Pulse channels that are paired with an SMU This parameter is used in conjunction with SharedPulseTerminals See Figure 3 89 and Figure 3 95 for examples of a SMU and VPU sharing a cable to a DUT terminal char A list of pulse channels that each share a cable with a SMU The list for two channels on the lowest numbered VPU would be VPU1CH1 VPUCH2 There are no spaces or quotation marks in the string See Figure 3 89 and Figure 3 95 for examples of a SMU and VPU sharing a cable to a DUT terminal int Value for ConPin test that determines if all matrix switch points are opened before the desired switch point closures Using OpenAll 1 essential resets the switch to an all open state then the desired switches are closed 0 No Errors 16001 Invalid number of pulse terminals 16002 PulseVoltagesSize has to match the number of pulse terminals 16003 PrePulseDelaysSize has to match the number of pulse terminals 16004 TransitionTimesSize has to match the number of pulse terminals 16005 PulseWidthsSize has to match the number of pulse terminals 16006 PostPulseDelaysSize has to match the number of pulse terminals 16007 Invalid number of bias SMU terminals 16008 Invalid name of shared pulse terminal s Return to Section Topics 4200 900 01 Rev H February 2013 M
188. SMUs and the Keithley pulse card to configure a simpler setup without the external switch matrix see Figure 3 85 Because both the SMUs and the Keithley pulse card have isolation relays located on the cards it is possible to configure a simpler setup without the external switch matrix see Figure 3 85 and Figure 3 89 The advantage of the simpler setup is lower cost while the switch matrix approach provides lower current measurement performance and flexibility necessary for testing arrays of test structures NOTE For the Model 4225 PMU the PMU Flash NAND project uses the output relays of the instrument cards to switch the SMU and PMU outputs to the device terminals see Figure 16 125 4200 900 01 Rev H February 2013 Return to Section Topics 3 97 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 98 To determine the state of the device one would perform a Vg ld sweep then perform a calculation to find the voltage threshold V The shift in V7 represents a change in the amount of charge stored in the floating gate that indicates the state of the cell from fully programmed 1 to fully erased 0 The Model 4200 SCS FLASH package does not include the ability to measure the pulse waveform or pulse response Figure 3 84 Block diagram of an example flash test setup using a switch matrix DC Sense h Switch Bit Line SMU1 DC Force p Matrix DC Sense fh SMU2 DC Force 5 DC Sense P SMU3 DC Force h
189. STawinsFlosangb te D Progra Wame oe amShoredPuleeT ermine Irgu StaredPulse Terr rade Input Emet PE raragane ace 1 2 J 4 5 7 10 z A WESCRIET IO The cont pees do Eloah furction disconnects pulso cbonrcl opaning t S5lid State Relay for sach cules channel a tie rappin llizt This rouiize zhould be used before rannisg a text whan the pulza and DC signals are consected ee at asch TUT terminal In the osse of ilash the wer xay choose to Tee the SHU snd FEU kutpote vith a GHE Tas tsopplied TEN the 4100 FLASH peckags ansteod of wains 2 ooparoko ceternol switch mokrim to ee eas the DC srd poles texte Tiiz acdul will izolete the VFU channel free the aetup ellowing for curate DC reesliz Sram Paysi 0 Emna E FP E Sete Vt MaxGm test This test is used to perform a DC voltage sweep on the gate of the DUT and measure the drain current at each sweep step The default Definition tab for this test is shown in Figure 3 108 SMU3 is configured to perform a 101 point sweep from 0 to 5 V in 50m V steps SMU1 is configured to DC bias the drain at 0 5 V and measure current at each step of the sweep Figure 3 108 Flash NAND project Vt MaxGm definition tab D Flach MAMD Ketthiey Interactive Tert Ervirorment V e lMaxtmit gi J Pie has Project fun Tool Wirama Help eee ex st ove fF Sele aa flanh HAH D oy IE Flohietes SE stewing Pasingl te Dran Jie
190. Stop voltage Time in seconds TTL output Trigger level 0 low 1 high and the state of the SSR Solid State Relay 0 open 1 closed To configure other installed pulse cards for Segment Arb repeat Steps 1 through 6 Turn on all enabled channels Click the green triangle to turn on enabled channels for all pulse installed in the Model 4200 SCS With the output on the square box will turn red Clicking the red box turns off the outputs utput trigger levels are not shown in the waveform previewers Return to Section Topics 5 7 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual Exporting Segment ARB waveform files After configuring a Segment ARB waveforms in KPulse it can be saved as a ksf file SARB ksf files should be exported into the SarbFiles folder at the following command path C S4200 kiuser KPulse SarbFiles To export a Segment ARB waveform file 1 At the top left corner of KPulse click Tools and then click Export Segment Arb to open the Segment Arb Export dialog box see Figure 5 5 2 Inthe Segment Arb Export dialog box select the PG2 and channel for the waveform to be exported 3 Inthe Segment Arb Export dialog box use the file navigation button to locate the target folder and type a name for the file The ksf extension will be added automatically Figure 5 5 Segment Arb Export dialog box Segment Arb Export TE channel 1 Export Cancel
191. Switch Matrix Card 8x12 BL1 Bit Lines BL2 BL3 Word Lines WL2 Note The trigger interconnects are white SMA cables Cables from the instrument to device are BNC coax for the PG2 channels and Triax for the SMUs Use Triax to BNC adapters if necessary to connect to probe manipulators Supplied items for Model 4200 SCS Flash package CS 1391 SMA Tee Fem Mal Fem s_1390 Lemo Triax to SMA Fem CA 452A SMA Cable 8 in 20 cm A x4 sl CA 451A SMA Cable 4 in 10 cm x2 0 0 TL 24 8 in lb SMA Torque Wrench x1 3 112 Return to Section Topics 7078 TRX BNC Triax to Fem BNC CS 1252 SMA Male to BNC Fem CA 404B SMA Cable 2m e a 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 27 Interconnect parts for Model 4200 SCS FLASH package Quantity Description Comment 6 SMA Tee female male female Trigger combine SMU and PG2 channels 4 LEMO triax to SMA adapter Adapt SMU Force output to SMA for signal interconnect 4 3 slot male triax to female BNC adapter Convert BNC cabling to Triax for prober or switch matrix connection 4 SMA male to BNC female adapter Adapt Tee to BNC for cabling from instrument to probe manipulators 2 4 25 in 10 8 cm white SMA cables Interconnect for triggering 4 8 in 20 3 cm white SMA cables Interconnect between PG2 and SMU signals 4 6 6 f
192. TM under the same name each instance generates its own data and has its own unit identification UID Ensure that you select the correct instance of the ITM or UTM 3 Click the ITM or UTM Sheet tab The Data worksheet of the Sheet tab appears as well as tabs that provide access to the corresponding Calc and Settings worksheets Figure 2 22 is the Data worksheet of a Sheet tab for the vds id ITM showing data for multiple sweeps Figure 2 23 is the Data worksheet of a Sheet tab for the vgs id ITM showing formulator calculation results in addition to test data 4200 900 01 Rev H February 2013 Return to Section Topics 2 33 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 22 Data worksheet of a Sheet tab containing data for multiple sweeps Graph Staus a ae Se Se ee ee ees javavaueaseseeearaver p Figure 2 23 Data worksheet of a Sheet tab containing both data and formulator results Formulator results E Fa E a EE G a ues lt lt ma lt a a3 CE EE a6 ar EE 9 20 A 22 33 EE 25 ive Ff Data A 2 34 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment NOTE The REF notation in a cell indicates that a valid value could not be calculated by the formulator This occurs when a formulator function needs multiple rows as arguments when a calculated v
193. The waveform sequence for each channel can he changed After clicking selecting a waveform in the Sequencer click Move Up or Move Down e Delete buttons After clicking selecting a waveform in the Scratch Pad or Sequencer click the appropriate Delete button to remove it Note that deleting a waveform from the Scratch Pad also removes it from the Sequencer Set the Time per Point in seconds This is the time interval between each point in the waveform s Save the waveform s as a Keithley Arb File kaf By default kaf files are saved ina folder named ArbFiles at the following path C S4200 kiuser KPulse ArbFiles e Use Save As to name the file and save it e After any subsequent changes click Save to overwrite the kaf file Custom Arb file operation Load waveform and turn on output dit Keithley Internal Pulse Interface C s4200 kiuser KP ulse Setup don kps Waveform Type Pulse C Segment Arb 2 Custom File Arb Channel 1 Source Range SV we 6 Range sv x Current Limit 4 0 105 50 Pulse Load Pulse Count PMU1 Arb Generator Output Mode Continuous Mode C Burst Mode Trigger Source General Settings Software Ei Channel 2 foomes r Trigger Out Polarity Positive k Reset All Waveform File 3 Pulse Period s C s4200 kiuser KPulse ArbFiles seq_1 kaf Current Limit 4 0 105 50 Notes Number Of Points 11500 Time Per Point 2e 008s Waveform Period 0 000235
194. This section provides detailed information about several Model 4200 SCS hardware components and is arranged as follows e Models 4200 SMU and 4210 SMU overview Discusses Models 4200 SMU and 4210 SMU basic source and measure characteristics basic circuit configurations operating boundaries and connectors e SMU with Model 4200 PA overview Describes how the Model 4200 PA extends Models 4200 SMU and 4210 SMU dynamic range and covers source and measure characteristics basic circuit configurations operating boundaries connectors and mounting methods e Ground unit GNDU Provides basic information about using the ground unit including basic characteristics and connectors Models 4200 SMU and 4210 SMU overview The following paragraphs discuss the basic characteristics of both the Models 4200 SMU and 4210 SMU Basic characteristics Current characteristics Current characteristics for both SMUs are summarized in Table 1 1 Table 1 1 Models 4200 SMU and 4210 SMU current characteristics Function 4200 SMU 4210 SMU Current source ranges 105 nA 5 pA 105 nA 5 pA full scale set resolution 1 05 pA 50 pA 1 05 uA 50 pA 10 5 pA 500 pA 10 5 pA 500 pA 105 pA 5nA 105 uA 5nA 1 05 mA 50 nA 10 5 mA 500 nA 105 mA 5 pA 1 05 mA 50 nA 10 5 mA 500 nA 105 mA 5 pA 1 05 A 50 pA 4200 900 01 Rev H February 2013 Return to Section Topics Section 1 Getting Started Model 4200 SCS User
195. UI 3 Click the green Run button For a test with three curves and 40 points per curve the test should take about 1 5 2 minutes During the test neither the Graph tab or Sheet tab is updated Figure 3 41 Default definition and typical graph for vds id pulse vs dc PulselV Complete Keithley interactive Test Environment vds id puise vs dc 101 PulselV Complete Keithley Interactive Test Environment vds id pulse vs dc 121 E Ele Yew projet Run Tools Window Heip CI gt gt e a eo G ae a Sterk Definition Sheet Graph Status Wie Pulselv Complete el 7 ears 24 msnen KEITHUEY ne Vds Id Pulse amp DC UTM Setup ins Sweep Type arr Pulse Only 8 0E 3 Po aa BC Only 7 Pulse and DC ims f Gate Pul J ate Pulse J Vos Start 1 eating 60 3 Y Vos Stop 2 v vt ite troselheating f Pulse Width Le 3 ERTS Pulse Period 3063 2069 4063 00600 4 069 a 5 s This routine also supporte the 4200 PIV package using the 4200 RBT EPET For this package all test parameters and limits are a ue E Proiectview E vasidpuse visidpuse E vosidpuise E scope shot IE vdsidpuse 7 E Projectview E voridpube E vdsidpuse E voridpuse B scope shot IE vasidputse JIE AutocatSco IE PubelVCal JE Vdsiairiat num a0 aM 4200 900 01 Rev H February 2013 Retur
196. USB CONNECTORS USB CONNECTORS Connecting GPIB instruments The Model 4200 SCS can control one or more external instruments by way of the IEEE 488 General Purpose Instrument Bus GPIB Instruments typically used in a test system with the Model 4200 SCS include a switch matrix and a C V meter Figure 1 4 shows how to connect GPIB instruments to the Model 4200 SCS Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Figure 1 4 GPIB instrument connections Model 4200 SCS O D R z S O O O Q 0 O o 50 OF ee 5 Oy OF RoR RoRot FE a Pa PRS a sae ee oe 7 H Sa Sa ta F te e 0 ei C 0 Or O O O 0 C C O OF OF OOO TO ED Eeee RER O Ie ie OF a C O O oR eters ae stor abt G i lsleieie sie eB QR 8 8 Q Q Q e 3 Q Q Q GPIB Connector GPIB Instrument GPIB Instrument 7007 GPIB Cable 7007 GPIB Cable Connecting a probe station A probe station can be controlled through the RS 232 interface connected to the Model 4200 SCS as shown in Figure 1 5 Figure 1 5 Probe station connections RS 232 Connector Model 4200 SCS a E EE E REES E E E T T E EEEE E S RN jsisjeisiclesicissicleleclelsscicseicsececsisiee ee Oy Probe Station
197. VPU Switch matrix With a switch matrix added to the system the pin number settings determine signal routing for the SMUs through the matrix to the device pins 4 PG2 Matrix connections e With a switch matrix added to the system fields for PG2 Channel pins are active There is a PG2 pin connection setting each channel e The pin number settings determine signal routing for the PG2 Channels through the matrix to the device pins NOTE A setting of 0 indicates no connection to the DUT PG2 1 Channel not used 5 SMU settings e ADC bias voltage and current limit is set for each SMU being used in the stress test A bias setting of 0 V effectively grounds the terminal 4200 900 01 Rev H February 2013 Return to Section Topics 3 85 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual The fields for SMUs not installed in the system are inactive Only five SMU s are supported in Segment Stress Measure Mode SMU1 through SMUS5 6 Segment ARB waveform file e Use to import the ksf Segment ARB waveform file for each pulse generator channel Animported waveform will be shown in the previewer e The ksf waveform file can be created and saved exported in KPulse see How to Generate Basic Pulses Section 5 7 Degradation Targets e Lists the tests and Output Values for this device Targets can be enabled and the target values can be set in or Absolute Value T
198. Waveform Frequency 4347 83Hz Pulse Load Pulse Count 125 0E 6 Time s V Enable Channel 1 Enable Channel 2 N ea kw wero TS aH 4200 900 01 Rev H February 2013 KEITHLEY Click a pulse card tab Select Custom File Arb Click the Waveform File button and then select and load the desired kaf file Enable Channel 1 and or Enable Channel 2 The loaded kaf file will consist of a waveform for one or both of the channels If the kaf file was saved with one or both channels enabled the kat tile will load into this tab with the same channels enabled A channel must be enabled in order to preview and output its waveform The waveform for Channel 1 is blue and the waveform for Channel 2 is red Configure triggers for both channels of the pulse card Return to Section Topics Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual e Trigger Source Software External or Internal Bus With External enabled select the trigger source Initial Falling Initial Rising Per Pulse Falling or Per Pulse Rising e Output Mode Select the output trigger mode Continuous Mode or Burst Mode 6 Configure the Channel 1 Settings and or Channel 2 Settings the Pulse Count field is active if the Burst Mode is the selected trigger mode Note To configure other installed pulse cards for Custom File Arb repeat Steps 1 through 6 7 Turn on all enabled channels Click the green triangle to turn on enabled cha
199. Window Help ivtccactive Test Module iMeaficr Frozen o Sile Mahi edaarce tN ME FlrbErchrerce VE Faighte PE Porn WM EE Eme Fa Spl CE wee hE Wieser E eae r EAD CPiogean bss Gah oe He xa T project Vt MaxGm Program Graph tab wo KE Pissing Gate ViProgan hex GH ax nas z a DEt 6 iaae OE t F F F 3 kj E H a H H rn 7 Gate aga V Threshold Vollege fw Dada eT 1 8802 T ME arr Return to Section Topics HN Eiaa 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Erase test This test uses Segment ARB waveforms to program a flash memory device The default Definition tab for this test is shown in Figure 3 120 Figure 3 120 FlashEndurance NAND project Erase Definition tab M Flash Fedurance HaN Kethiny Interactive Test Ereirorenent frene 1 21 FE Fle Rav Profect Fun Took Windows Heip Ft sc ce es e XAT eo fF feat Skea zj Guh ypa i Fe ari eham ME FlarhEnchrarce lhe Litiy Farkas HAE Fairge EERE lim Haiez rage pahe Mesh EE ADCP R FUE Ahaan Pogan ls _ z 5 Eats Ee fame EET Siz Sli Spd CE race 1 MurPulssTerrinale iret NT zat wje v 2 PulssTerm nals Input CHAR VENI VOLiCHE AAAI VEUSA 3 PulseVoliages Input ees 4 PalesVotagesSize Input wT 5 PrePuiseDebys input vial
200. Workspace window tab When workbook mode is enabled per Reference Manual Specifying environment preferences page 6 340 each Project Plan component window that is active in the KITE workspace can be accessed quickly by selecting its Workspace window tab Status tab Test definition and configuration status Sheet tab Numerical test and analysis results and test settings Test Notes tab User modules box Type in notes about i Gute Values User Modules PMU_1Chan_Waveform_Example E PMU 1Ch W Formulator User Libraries PMU_examples_ulib 3 0e 7 Name In Out Type 1 width Input DOUBLE Z rise Input DOUBLE j 3 fall Input DOUBLE _ 1 0e 7 4 delay Input DOUBLE _ 1 0e 7 5 period Input DOUBLE _ 1 0e 5 6 voltsSourceRng Input DOUBLE 10 z currentMeasureRng Input DOUBLE 8 DUTRes Input DOUBLE 9 startV Input DOUBLE 10 stopV DESCRIPTION Voltage amplitude Pulse IV waveform capture using one channel of the 4225 PMU It returns voltage and current samples versus time for a single channel a sweep of pulses or a single pulse stepV 0 Only fixed current meas The module will capture set start stop wit supported For a single pulse re ranging is The purpose of this mofule is a functional programming reference to illustrate the basic commands necessary to perform a 1 channel P
201. _ARRAY Terie oL ase aetPubalielisy Input 7 PowPurclietayesize 2255 aa e E ne wn The docble cules ilazh function defirems and catputs 1 3 waveforms commizting of 2 pulma which hare andepedent widths and levelx The wevelares ere defined uzing line segeent sejment ach mode of the 42705 PG2 The wauefcrs can be cefined for jizt b program OF ersse pulse of a esvefors combining both progres sad erase opoles for up to B independent pulss cheansls B maximus chonnclo with four 4205 PG2 cords ivstollcd ia the 4200 choosis The zirgla_pulza_ilazh function defires and cstputs 1 3 vevetcrez oaesizting of 1 pola The wavetoces are defined using linm aequents megeest arb moda of the 4205 PG2 The vavelcee can mm HH bitia SetupDC Program test The Definition tab for this test is shown in Figure 3 117 This test isolates the VPU outputs from the DUT It does this by opening the HEOR for each VPU channel Disconnecting the VPU channels allows for accurate DC results The SetupDC test is a UTM that should be used when using a directly wired DUT without an external switch matrix SetupDC disconnects the PG2 channels from the DUT to permit proper operation of any subsequent DC measurements When using a switch matrix a ConPin test is used see the Reference Manual LPT functions page 8 59 to set the appropriate matrix connections prior to any DC tests 3 134 Return to Section Topics
202. a DC Pulse p lsSeiV siis sce asta cos cuenta aeie ae a a SY ehauacin a yendvaria Se earns 3 55 scopeshot cal PuIselV psarisu dds twee ea rea a a a Saad 3 59 scopeshot_pulseiv snsaanaann nunana nann n at ac oad area eee die 3 61 vdsid pulselv demo owe isa ci eis EEEE TEER eee eet ee eee 3 63 vgsid_pulseiv_demo 000 c eee ee 3 63 scopeshot_pulseiv_demo 0 ccc eens 3 63 How to perform a Quiescent point Pulsed I V test PIV Q on my device 3 64 Q Point Pulse IV Model 4200 PIV Q 0c cece eee eee teens 3 64 What is the PIV Q package 000 c eect eee eee eee 3 64 Target applications and test projects 0 220 cece eee eee eee 3 64 How to perform reliability stress measure tests on my device 3 66 Connecting devices for stress measure cycling 00 e eee eee ee eee 3 66 Overviewing the cycling related tabs 00 0c eee eee 3 67 Configuring subsite cycling 220 e eee eee 3 67 Understanding the Subsite Setup tab 220 0 eee eee 3 67 Configuring the Subsite Setup tab 0 eee eee 3 68 Step A Enable cycling occ cence ee eee eee ee ee ee ee ee Oe eee eee ee 3 68 Step B Choose the mode of cycling 0 cece eee eee eee 3 68 Step C1 Specify cycle timing linear log or list stress measure mode only 3 68 Step C2 Specify number of cycles cycle mode only 00eeeeeee 3 70 Step D Set p
203. a coupler for DC bias from a SMU and pulse output from a Model 4205 PG2 pulse generator channel The output of the RBT provides pulse output riding on the DC V bias 1 30 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started As shown in Figure 1 25 the RBT has two three lug female triax connectors for connection to a SMU FORCE and SENSE and two female SMA connectors one for AC inputs such as a pulse generator card and scope card Model 4200 SCP2HR or 4200 SCP2 and one for AC DC output connection to a prober or directly to a DUT Figure 1 25 also shows the simplified schematic of the RBT The capacitor allows pulses from the pulse generator card to pass through to the output while blocking DC from the SMU The inductors allow DC from the SMU to pass through to the output while blocking pulses from the pulse generator Figure 1 25 Model 4205 RBT simplified schematic Connect to pulse generator card and or scope card El SMA Connectors AC Input female Connect to fo A SMU SENSE mal Connect to DUT or Prober2 Connect to SMU FORCE 3 3 Lug Triax Connectors female 1 When using a SMU PreAmp use 4200 TRX X cables for connections When NOT using a PreAmp use 4200 MTRX X cables for connections 2 Use SMA cables male to male for connections 4205 RBT Remote Bias Tee 3 port power divider The 3 port power divider divides the electrical
204. a user module that is connected to a UTM and recompile it to create a new user module Keithley Instruments provides the source code for most of the user modules that are shipped with the Model 4200 SCS User modules are modified using KULT Return to Section Topics 2 9 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Table 2 1 continued Primary differences between an ITM and a UTM ITM UTM Performs exclusively tasks on internal Performs tasks on internal Model 4200 SCS Model 4200 SCS instrumentation instrumentation and external instrumentation that is connected to the Model 4200 SCS IEEE 488 bus or the Model 4200 SCS RS 232 port Is used exclusively for parametric testing May be used to perform almost any test related task Generated data updates the Data worksheet Generated data updates the Data worksheet in real time as the test executes after test execution is complete Beginning with KTE Interactive v5 0 you have the ability to add function calls to new and existing user modules UTMs that provide real time data and graphing capabilities see the Reference Manual Enabling real time plotting for UTMs page 6 16 a The pulse generator card Model 4205 PG2 and scope card Model 4200 SCP2 or 4200 SCP2HR are not supported by ITMs at this time b Refer to the Reference Manual Viewing ITM or UTM results numerically The Sheet tab Data worksheet p
205. a voltage value for a fixed range Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 DrainRange double The voltage measure range for the scope channel measuring the Drain Use 0 for scope autoranging or specify a voltage value for a fixed range where V I 50 Q Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 LoadLineCorr int Determines whether to use load line correction to compensate for the voltage drop caused by the 50 Q sense resistor used to measure the drain current Id 1 load line correction active 0 no load line correction VPUID char The instrument ID This should be set to VPU1 for 4200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SmUs in the system This is the SMU that applies the DC bias to the DUT drain during the sweep IdSize int Set to a value that is at least equal to the number of steps in the sweep VgMeasSize and all five must be the same value VgProgSize VdMeasSize VdProgSize Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 14 Outputs for Vgsid_pulseiv Output Type Description VgMeas double Array of measured
206. age 6 20 Defining an ITM An ITM is defined by the ITM definition tab displayed by double clicking the ITM name in the project navigator illustrates and explains the ITM definition tab Figure 2 4 defines the vds id ITM one of the ITMs in the example project plan shown in Figure 2 2 and Figure 2 3 See Reference Manual Specifying environment preferences page 6 340 2 10 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 4 ITM definition tab Graph tab Graphical Status tab Test definition test and analysis results and configuration status Test Notes tab ani r Sheet tab Numerical test and T fes ab t Timing button and Speed box Mode DOK T f f ype in notes abou Custom and preconfigured test Allows sampling vs time analysis results and test settings the fae i no A timing noise rejection selections mode instead of sweeping mode Formulator Mathematical test results analysis tool Sheet Graph Status a2 Exit Conditions bution ee Drain smu2 x Hiko set the test ton FORCE MEASURE condiuons Sweep V Master Measure YES Type Linear Ltd uto 16 0104 Output Values button Stop BY Range V Best Fixed Click to set export Output Step 0 1 Compt 0 14 Values for this test to the Points 51 Subsite data sheet Instrument selection box 8
207. age pulse generator e Model 4200 SCP2 Dual channel oscilloscope e Pulse IV Interconnect Model 4205 Remote Bias Tees RBTs to combine both DC and pulse signals e Pulse IV software Projects and test routines for testing of CMOS transistors including cable compensation and load line algorithms to provide DC like sweep results Target applications and test projects for PIV A The PIV A package includes test projects that address the most common parametric transistor tests Vds id and Vgs id These tests are provided in both DC and Pulse modes allowing correlation between the two test methods and have been configured for testing leading edge lower power CMOS devices These tests as well as initialization steps for scope auto calibration and cable compensation are included in a single Model 4200 SCS test project Pulse IV Complete There is another Pulse IV test project Demo PulselV This demo project is a subset of PulselVComplete and is intended for demonstrating the Pulse IV capabilities using a packaged demonstration DUT NOTE The user test modules UTMs used for Pulse IV tests are described in the following paragraphs These UTMs control all instrumentation for these applications The pulse generator and scope cards can also be used as stand alone instruments Reference Manual Pulse Source Measure Concepts page 11 1 explains front panel operation and provides remote programming information for individual control of the pulse gener
208. ageNum Number of pulses to average For larger currents Id gt 500 pA AverageNum 10 25 is usually sufficient For smaller Id use 50 100 Larger values provide minimal additional improvement All pulse IV tests have this setting that controls how many pulses are used to return a result not how many pulses are sent to the DUT LoadLineCorr Turns drain side load line correction on or off This is similar to the vds id pulse and vgs id pulse tests and is a routine to ensure that the desired Vd is provided to the drain DUT terminal regardless of the amount of Id flowing through the DUT VPUID Pulse card identification string VPUID VPU1 GateSMU SMU for DC Vg Default is SMU1 but any other available SMU may be used DrainSMU SMU for DC Vd Default is SMU2 but any other available SMU may be used Tips for using Pulse IV Confirm connection Use scope shot as the first test after touching down on a device to confirm that there is proper connection to the DUT before running PulselVCal or any pulse tests Always calibrate after any setup changes new probe tips or manipulators cable replacement Proper pulse IV performance can be verified by testing a device that does not exhibit any selfheating or charge trapping effects The 8101 PIV Test Fixture and SD 210 DUT provide good DC and pulse correlation for Id lt 10 mA and Vd lt 5 V For Id lt 1mA set AverageNum 0 to use the Adaptive Filtering If a fixed number for AverageNu
209. al Section 1 Getting Started Installation and system connections Unpacking the Model 4200 SCS Inspection for damage After unpacking the Keithley Instruments Model 4200 Semiconductor Characterization System SCS carefully inspect the unit for any shipping damage Report any damage to the shipping agent because such damage is not covered by the warranty Shipment contents The following items are included with the Model 4200 SCS e Model 4200 SCS with any ordered source measure units SMUs factory installed e Ordered Model 4200 PA modules factory installed e Ordered Model 4220 PGU pulse generator cards factory installed e Ordered Model 4225 PMU pulse measure cards factory installed e Ordered Model 4225 RPM remote pulse and switch modules e Ordered pulse application packages For more information refer to the Reference Manual Pulsing Source and measure options page 1 9 e Cables connectors adapters and other accessories that are supplied with the pulse generator scope and pulse application packages For more information about the lists of supplied accessories for the pulsing options refer to the Reference Manual Pulsing Source and measure options page 1 9 e Line cord e Model 4200 Semiconductor Characterization System User s Manual e Model 4200 SCS technical data e Miniature triaxial cables two per Model 4200 SMU or 4210 SMU 2 m 6 ft e Triaxial cables two per Model 4200 PA 2 m 6 ft e Interlock cable
210. al is connected to a DUT all measurements will be made relative to this DUT connection 4200 900 01 Rev H February 2013 Return to Section Topics Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 29 Ground unit Internal 4200 SCS connections to each SMU SENSE LO signal Ground Unit Removable Ground Link Ground unit DUT connections Figure 1 30 shows the connections necessary to use the GNDU in conjunction with a SMU to make full Kelvin remote sense measurements Similarly Figure 1 31 includes the preamp As shown in these figures the GNDU FORCE signal provides the return path for SMU or preamp FORCE current For detailed information about the ground unit SMU and preamp connections refer to the Reference Manual Basic source measure connections page 4 3 Figure 1 30 Full Kelvin SMU ground unit connections 4200 SMU or 4210 SMU Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Figure 1 31 Full Kelvin preamp ground unit connections 4200 SMU or 4210 SMU 4200 PA FORCE Note Not used when PreAmp is attached SENSE SENSE LO Ground unit terminals and connectors The locations and configuration of the GNDU terminals are shown in Figure 1 28 Basic information about these connectors is summarized below For more information about ground unit signal connections refer to the Reference Manual Basic so
211. alue is out of range when a divide by zero is attempted and so on In the GM column in Figure 2 23 note the REF notation in the first row Each value in the GM column is a difference coefficient that is calculated as the ratio ADrainl AGateV where ADrainl and AGateV are differences between values in the present row and values in the previous row Because no previous row exists before the first row a valid calculation is not possible for the first row Hence the formulator returns the REF notation A column will contain multiple instances of REF if the formulator function requires multiple prior cells for the calculation For example if the MAVG function is using five data points to calculate a moving average of a column containing five values the first two and last two cells will contain REF Understanding and using the Data worksheet of a Sheet tab The Data worksheet first appears when you open the Sheet tab see Figures 2 22 and 2 23 The Data worksheet displays all the data that was last generated by the ITM or UTM for a particular site The Data worksheet also contains the results of any formulator calculations that were performed on the last generated data Features of the Data worksheet are e Data is reported in Microsoft Excel compatible format each column containing the results for one test parameter or for a formulator calculation NOTE Some formulator calculations return only a single value The display of al
212. ance For a gate or other high impedance gt 1 kQ terminal the voltage at the terminal will be twice 2x the value specified For example setting PulseVoltage 2 will result in a 4 V level at the DUT gate See the Reference manual Load Line Effect Compensation Coping with the Load Line Effect page 11 15 for additional details about the effect of the DUT impedance on the pulse level If the DUT terminal is the drain alternate manual methods are appropriate The most common method for determining the pulse voltage level on the drain is to use an oscilloscope with the scope input impedance set to 1 MQ a Ensure that the gate voltage level meets the desired value before setting other volt age levels b Modify the PulseVoltage until the level matched the desired level The drain voltage level is a function of the drain source impedance that is largely determined by the gate voltage How to perform Charge Pumping 3 146 Charge Pumping is a useful technique for understanding gate stack behavior Charge Pumping characterizes interface and charge trapping phenomena The change in the CP results can be used to determine the amount of degradation caused by typical reliability test methods employing either DC or pulsed stress The Model 4200 SCS provides pre configured tests to perform Charge Pumping These tests are included in the KITE project plan for Charge Pumping The User Library for Charge Pumping is also provided in Section 16
213. ance NAND project with defaults for NOR type floating gate DUTs FlashEndurance switch tests The FlashEndurance switch project Figure 3 121 has similar tests to the FlashEndurance NAND with defaults for using a switch matrix for more complex multi DUT addressable test structures see Figure 3 97 Also note the additional test Open VPU Relay added prior to Conpin DC tests This step ensures that VPU channels will not be inadvertently connected to a device terminal when the SMU testing is performed 4200 900 01 Rev H February 2013 Return to Section Topics 3 137 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 121 FlashEndurance Switch project 3 FlashEndurance Switch Keithley Intera File View Project Run Tools Window Hel FlashEndurance Switch MFE FlashEndurance ME FloatingGate E Conpin Pulse E Program B Open VP U Relay E Conpin DC JE Vt MaxGm Program E Conpin Pulse E E E Erase Open VPU Relay Conpin DC JE Vt MaxGm Erase K KRK KK KK KK Running a FlashEndurance or FlashDisturb project This section explains how to use the following Flash projects e FlashEndurance NAND e FlashEndurance NOR e FlashEndurance Switch e FlashDisturb NAND e FlashDisturb NOR e FlashDisturb Switch These Flash projects use a small number of tests and methods This section will explain the tests and how to set parameter
214. and save the graph data The graph for the vds id test is displayed by clicking the Graph tab for the test A sample graph for the vsd id test is shown in Figure 1 40 As shown there are four I V curves one for each gate voltage The graph was customized to include the Legend box and use different colors for the graph series The Graph Settings menu shown in Figure 1 41 was used to select the Legend box and change series colors For more Graph tab information Refer to the Reference Manual Viewing ITM or UTM results graphically The Graph tab page 6 21 4200 900 01 Rev H February 2013 Return to Section Topics 1 47 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 40 Sample graph for vds id test Definition Sheet Graph Status 08 02 2007 15 41 02 KEITHLEY Legend n MOSFET Drain Family e Data Draini 1 Data Drainl 2 28 0E 3 a DataDrainl 3 Data Drainl 4 24 0E 3 22 0E 3 20 0E 3 E ET CET E aa 18 0E 3 16 0E 3 14 0E 3 Drain Current A 12 0E 3 10 0E 3 8 0E 3 6 03 4 0E 3 Q o 2 Q F F F F M Mi fi M mi 8 8 8 8 8 8 S a o lt 0 Drain Voltage V e defaut JE vdsidtt 1 In Figure 1 40 you can see that the line colors line patterns plot symbols and line widths are different To learn how to define the graph line properties see Figure 1 41 below Figure 1 41 Graph settings menu IEAS Window Help To dis
215. andard PUISE seccsisscaiiicssvenssrnsncencenes 1 27 Pulse source measure UTMs PUISE VUIID ssjispateccissstaciswelerniennemancemenen 3 46 cal PUlSCIV ai sdb sainderaighiacensaitindasieaies 3 46 scopeshot_pulseiv 3 59 3 61 scopeshot_cal_pulseiv uu 3 59 scopeshot_pulseiv_demo 3 63 Vdid_Pulse_DC_Family_pulseiv 3 50 VASIC_PUISELV scscsecssivcsccnssaeesisvecrnccecseas 3 48 vdsid_pulseiv_demo n se 3 63 Vgid_DC_Pulse_pulseiv 3 55 ygsid PUISEIV cescdtesdrssrasawcnssedinsieasedetin 3 53 vgsid_pulseiv_demo s is 3 63 RBT inr A E 1 30 1 31 Rear Panel sisscsnsiiscanazesntiicaadsausdbaentsecs mavdaantaneata 1 11 Real Panel csrresrescdecescines agivatetennabieveiesecy 1 12 Remote Bias Tee RBT and 3 port Power Divider 1 30 Run Vds id testo ee eeeeeeeeeseeeeneeneeeeeereeneeees 1 46 RUNNING the test serpents 2 24 Sample wafer organization cceeeeeees 4 16 Save the system configuration 0 0 4 11 Saving the system configuration 4 20 4 31 4 39 SCP2 Oscilloscope ceceeeeeeeseeteeteeteeees 1 32 Second connect test connects the device to the PGU gcenccicsusteettamnadinctimatdonaanesed 4 33 Segment AMD sesissssiscsssewssprderaessorermameanagerercamerss 1 27 Segment Stress Measure Mode 3 81 Selected device and destination folder 2 48 Selected ITM and destination folder 00 0 2 51 Selecting a test
216. as obtained test was performed Name of the test Instance of the named test from which the in the project plan 1st data was obtained 2nd 3rd and so on Same as the UID number in the Project Navigator Saving a worksheet Saving a Sheet tab to the project plan To save the displayed data to the project plan do one of the following Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment e Click Save in the File menu e Click the single floppy disk toolbar button e Press Ctr1 Ss on the keyboard Saving the Sheet tab to an external spreadsheet file using the save as button All data in the Sheet tab for a test is in Microsoft Excel compatible format with the xls extension In other words the combined worksheets in the Sheet tab including any Append1 Append 2 and so on worksheets effectively comprise a workbook that can be used directly in an Microsoft Excel compatible spreadsheet program To save the contents of all Sheet tab worksheets to a designated folder simultaneously in a single x1s file 1 Click Save As in the upper right corner of any of the three worksheets The Save As window displays with workbook x1s as the default file type See Figure 2 26 Figure 2 26 Data Save As window configured for workbook files Save As 2 x Save in 5 data x El cl vds id2 1 1 xls Save as type workbook xls z Cancel
217. ash project a Initial characterization using the Running the Flash NAND Flash NOR or Flash Switch Project b Endurance or Disturb testing using the Running a FlashEndurance or FlashDisturb project by using FlashEndurance NAND FlashEndurance NOR FlashEndurance Switch FlashDisturob NAND FlashDisturb NOR or FlashDisturb Switch Running the Flash NAND Flash NOR or Flash Switch Project The Flash projects use a small number of tests and methods This section will explain the tests and how to set parameter values These projects allow initial characterization of a device including the determination of the pulse settings pulse width height and transition time that will provide a target programmed or erased V After the appropriate pulse settings are determined they can be used to perform Endurance or Disturb testing on the DUT 1 2 If system connections have not been made follow the instruction in Running any Flash Project for the first time If KITE is not running start KITE by double clicking the KITE icon on the Model 4200 SCS desktop Open the appropriate KITE Flash project a Within KITE click FILE gt Open Project If the dialog window is not displaying the _Memory folder move up one or two levels to the display the Projects directory b Double click the _Memory folder then double click the desired Flash test folder Flash NAND Flash NOR or Flash Switch c Double click the Flash NAND kpr Flash NOR kpr o
218. asure Mode configuration 3 83 Executing subsite Cycling ic 5 20 cccscectstaceccvnssaaaceeeestiaceeeuvaaaseeessineteeeeiad 3 86 Subsite cycling data Sheets occ ceeeeeeeeeeeeeeeeeeeseeeeeeeeeeeeeaeeeeeenaaeees 3 87 Subsite cycling graphs sarsaran ninnaa vetlel ane EANA AAAA 3 91 Configuration sequence for subsite cycling ceeeceeeeeeeeeeeeeeeeeneeees 3 93 How to perform a flash memory test on my device eeseeeeeeeeeneeeeenee 3 95 O r N 3 95 Theory of operation aeseeeessessssresseerneeeessnnastnnnnaarnnnanntaannaaannnnnanenannaannaa 3 95 Flash ConnechioNS rcer T 3 109 Direct connection to single DUT eseseeereseesrrsssernsssrerrnsssrnnsssrennns 3 113 Direct connection to array DUT for disturb testing eeceeeeeeees 3 115 ii 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Table of Contents Switch matrix connection to array DUT ceccccceciieae i aiieaeenieens eaten 3 116 Memory BOI O AG oo occ ceee ck each ecetenpeaseere detest aayesentenpenetondaeaseesie aaddney 3 117 NVM_examples 2 ceccccceceeeeeeeeeeeeeceeeneaeeeceeeeeeeeeseeeceececaneeseeeeeeeess 3 119 Flash NAND WSIS oriris ai a aE AEAEE i EA 3 119 Flash NOR tests cccccceeceeeeeeeeeeeeeeaaneeceeeeeeeeeeeseeeecenaneeceeeeeeeeeeees 3 124 FUSSY TESS aaa a a a i ad aaa adaa AAA 3 124 Running any Flash Project for the first time eceeeeeeeeeeeeeeeeeenneees 3 125 Running the Flash NAND Flash NOR or Flash Switch Project
219. atch Pad Points Scale C Sequencer Time Scale Delete IV Enable Channeli V Enable Channel 2 Waveform Generator x Waveform Type Ramp v Waveform Name Ramp1 3 0 Settings Points Per Cycle 500 Number of Cycles 3 au 2 0 Start Voltage V 0 Stop Voltage V 3 S Number of Steps 500 ta 1 04 Notes o o At Given Time Per Point Of 2e 008s 0 800 1600 Period 1e 005s i Frequency 100000Hz Points Preview Ok Cancel 1 Click the Arb Generator tab 2 Click New Waveform to open the Waveform Generator window 3 Use the drop down menu to select the Waveform Type to be created 4200 900 01 Rev H February 2013 Return to Section Topics 5 9 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual 4 Configure the Settings for the selected waveform type 5 Click Preview to update the preview of the waveform 6 Type ina name for the waveform You cannot use a name that is already used in the Scratch Pad 7 Click OK to create the waveform The new waveform will be added to the Scratch Pad Figure 5 8 shows the new waveform named Ramp1 has been added to the Scratch Pad 8 Repeat steps 2 through 7 to create another waveform in the Scratch Pad Figure 5 8 Custom Arb file operation Copy waveforms into Sequencer dit Keithley Internal Pulse Interface C s4200 kiuser KPulse Setup don kps Sequencer Settings 4 New Waveform Move Up Time Per Point s 2e 008 anewave Period 0 00
220. ator Constants Ctrl F Test Fixture Hewlett Packard 4284 LCR Meter General Purpose Test Instrument Hewlett Packard 4294 LEZ Meter Add External Instrument gt Removes from the system configuration the Delete Evtemel Insiument external instrument that is selected in the configuration navigator Selecting an external Validate Configuration Ctrl V instrument enables this item Delete External Formulator Constants Instrument Modifies the default automatically Automatically tests the system configuration for con assigned Formulator constants for newly flicts or instrument communication problems Applies created KITE test modules The Formulator to all instruments except probe stations test fixtures is a programmable in test and post test and general purpose test instruments calculation tool for test data Figure 4 6 KCON Utility Help menu Automatically starts the web browser and loads the Keithley CONfiguration utility preinstalled Complete Reference documents including the File Tools Help Model 4200 SCS User and Reference manuals product data sheets and application notes Ho 4200 SCS Complete Reference F1 Prompts you for contact information Generate Technical Support Files lt g analyzes your Model 4200 SCS and stores the results on a diskette The diskette when About KCON sent to Keithley Instruments helps Technical Support to resolve problems on your system
221. ator and scope For remote programming the pulse generator card uses LPTLib functions while the scope card uses kiscopeulib UTMs 4200 PIV A test connections The block diagram for PIV A testing is shown in Figure 3 25 and the hardware connections are shown in Figure 3 26 A side view of the scope card is provided in Figure 3 27 to show the adapters 4200 900 01 Rev H February 2013 Return to Section Topics 3 27 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 25 Pulse IV hardware setup block diagram DC Bias and Measure 4200 SMU 1 4200 SMU 2 NOTE The AC signal component to 4205 RBT 2 is required for Scope 4200 SCP2 pulse Vd Iq measurement ae 1 4205 RBT 2 Game 2 AC DC Output 3 port power divider Pulse Generator Channel 1 Output 4205 PG2 Channel 2 No Connection Supplied interconnect parts The interconnect parts listed in Table 3 2 are supplied with the PIV A package 3 28 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 2 Supplied interconnect parts for Model 4200 PIV A Qty Description Comment 1 4 25 in 10 8 cm white SMA cable Interconnect for trigger 2 6in 15cm white SMA cables Interconnect between RBT and prober manipulator 2 13 in 33 cm
222. ave parameter defaults that provide reasonable results with the included DUT metal can TO 72 SD 210 nMOS FET Figure 3 28 Model 8101 PIV test fixture Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 29 Model 8101 PIV schematic i Pulse Socket SMU Socket L Neate B BULK D DRAIN Prober Interconnect The PIV A package provides both DC and Pulse capability to the DUT pins without re cabling or switching The key to this capability is the RBT that uses passive electrical components to combine the low frequency DC signals with the high frequency pulse signals For further information about the Model 4205 RBT refer to the Reference Manual Pulse Projects for Models 4200 PIV A and 4200 PIV Q page 12 1 The cabling from the RBT output is SMA which will directly connect with RF probe manipulators using the DC probe adapter cables described below DC Prober Interconnect For DC structures an adapter cable Model 4200 PRB C is included to convert from the SMA to dual SSMC connections on DC manipulators The adapter cable is shown in Figure 3 30 Two 4200 PRB C cables are included with the 4200 PIV A package which allows testing of
223. ble outputs Sum SD Built In System Delay at completion Test _ enabled Delay Programmed Delay PreSoak 5V Meas Measure Time CVU Voltage List Sweep Figure 3 19 shows an example of a FFMO window with CVU Voltage List Sweep selected as the forcing function to measure Cp Gp The Sweeping test mode must be selected for this test see Figure 3 11 Figure 3 19 Forcing Function CVU Voltage List Sweep Forcing Functions Measure Options Device Terminal A Instrument ID CVH1 Instrument Information Instrument ID CVU1 Instrument Model KICVU Mode Sweeping Forcing Function CVU Voltage List Sweep M Master Advanced CVU Voltage List Sweep Function Parameters DC Bias Conditions AC Drive Conditions Data Points 4 j Frequency 100k Hz PreSoak 2 Voy 74 Voltage 15 m RMS Measuring Options Measure Model Measured M Test Conditions Column Names Column Names Cp_BA Gp_BA DCV_BA F_BA Parameters Cp Gp v DCV F Hz NOTE AB gt A to B Status Compensation Cancel When this test is run see Figure 3 20 the following force measure sequence occurs 4200 900 01 Rev H February 2013 Return to Section Topics 3 21 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 1 The DC source goes to the PreSoak voltage of 2 V for the hold time period 2 The DC Bias goes to the first sweep point voltage 1 V 3 After the built in system delay and programmed delay the Mod
224. ble pulse parameters are determined use Kpulse to define and export the waveforms for use in the Endurance and Disturb projects see Using Kpulse to create and export Segment ARB waveforms The difference between the Flash NAND and Flash NOR are the typical pulse widths and levels specific to the DUT type The Flash switch is a generic example of the Flash testing described above but adds support for an external Keithley switch matrix NVM_examples The NVM_Examples test uses one 4225 PMU two 4225 RPMs and two SMUs to characterize NAND flash phase change memory and ferroelectric memory For additional information see the NVM Application Note link on the Applications page of the 4200 Complete Reference Flash NAND tests Flash NAND tests consist of the following tests Program e Erase e Fast Program Erase e SetupDC Vt MaxGm e Program 8 4200 900 01 Rev H February 2013 Return to Section Topics 3 119 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 120 e Erase 8 e Fast Program Erase 8 NOTE The Flash NAND project navigator is shown in Figure 3 101 Figure 3 101 Flash NAND project TS Flash NAND Keithley Interactive Test En Q Re Yew Projet Run Tools Window Hel gt Moe FlestreHanb 3 wt FlashSvasie ME 4TeminaflostrgGae vE Froan B Erate E Fast ProganrErase JEA Spt l WetdaxGm O even FlostingG te i E Progran 8 Fal Eraso E Fad ProganErassd Figure 3
225. by clicking the Output Values button in the Definition tab for the ITM or UTM An Output Value is selected by clicking a checkbox to insert a vV For details see the Reference manual ITM Output Values page 6 144 and UTM Output Values page 6 151 5 If desired Exit Conditions for an ITM can be set When an exit condition other than None is selected and the source for the ITM goes into compliance the test device plan subsite plan site or project will terminate None is the default exit condition e The window to set the exit condition is opened by clicking the Exit Conditions button in the Definition tab of the ITM For details see the Reference Manual ITM compliance exit conditions page 6 144 6 Save the project plan by selecting Save All from the File menu at the top of the KITE window You can also save the project by clicking the Save All button on the toolbar 7 Repeat steps 2 through 6 for adding more tests for the same device Repeat steps 1 through 7 for adding more devices to the subsite plan 9 Configure the subsite for subsite cycling stress measure mode In the project navigator double click the subsite plan and select the Subsite Setup tab to configure subsite cycling a Set the stress measure mode cycle times for the subsite plan The stress measure mode and cycle times are set from the Subsite Setup tab b Configure the stress properties and connection information for every device in the subsite p
226. card that is the PG2 card in the lowest numbered slot First connect one of the SMA cables to TRIGGER OUT and connect the SMA tee to TRIGGER IN 5 Then connect the other SMA cable to TRIGGER IN on the second PG2 card This second card is the card to the immediate left of the card in step 4 3 116 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests If the FLASH package consists of more than two PG2 cards continue to connect the NOTE cable and Tees to the adjacent cards For a system consisting of four PG2 cards there should be three SMA tees used to connect the triggering across the four cards 6 Take one SMA to BNC adapter and connect one 5 foot 1 5 m black BNC cable 7 Take the cable from step 5 and connect the SMA adapter to CHANNEL 2 of the PG2 in the left most slot PG2 in the slot with the highest number 8 Route BNC cable from step 7 to the switch matrix card Triax input using a Triax to BNC adapter 9 Repeat steps 6 8 for the other three PG2 pulse channels 10 Take one black Lemo Triax to three slot Triax cable and insert the LEMO end into the Force connection on the left most SMU in slot four 11 Route triax from SMU4 to the switch matrix card Triax input 12 Repeat steps 10 11 for the remaining three SMUs 13 Use triax cables to route the switch matrix outputs to the array DUT probe manipulators Figure 3 99 KCON Row Column Card Prop
227. ccceecsceessseceesseeeeessseeeeaes 1 40 Clear Append Data method for deleting Append Worksheets iateveseesredeses ceceteses tcteestuelvactes 2 39 COMPCNSALION seveneartaucccnselsieneaset irina ir 3 19 Configuration ITMS cg iessfancas pitaatavine ci toncen eacinnsinmaiuiaiaianuraegutvas 2 18 Configuring the switch matrix 4 19 4 30 Connect SMUs to N channel MOSFET 4 24 Connect SMUs to NPN transistor 4 24 CONNECT IESU risky Gs tole crs uiias aed 4 14 Connecting Devices Under Test DUTs 1 40 4200 900 01 Rev H February 2013 Index Connecting the switch matrix 0 4 20 4 31 CONMOCHONS srccscssiaicstssssevscaastessecstnendanescreraartoreeres 3 9 Contents of the Keithley Device file new mosfet kdv 2 29 Controlling a CV Analyzer seeen Add a Device Plan oo eeeeeeeeee Add a Subsite Plan oo eee Adda UTM sesisusesctonaaresres crac eaaa Connections 0 0 Create a new project KCON setup n se Modifying the cvsweep UTM 0 4 43 Controlling a probe station KOON SGUD drinkit arada 4 18 Open the probesubsites project 4 21 Open the project plan window 4 4 21 Probe station configuration 0 05 4 20 Prober control overview sssr 4 16 Running the test sequence 0 0 4 25 Test datas n S 4 26 Test descriptions ccccceeeeeeseeeeeeees 4 22 Test
228. ce 3 30 Prober Interconnect ocase ndee a aa a a a a 3 31 DC Prober Interconnect 0 00 cece eee eee 3 31 RF Prober Interconnect 0 0 cece eee eet e eee eee 3 32 PIV A interconnect assembly procedure 2200 eee e ee eee eee 3 33 Section 3 Common Device Characterization Tests Model 4200 SCS Users Manual Using the PulselV Complete project for the first time 0 3 35 Running AutocalScope 000 nannan nrnna nnmnnn annn 3 36 Running PulselVCal 0 00 eee ee 3 36 Running vds id DC ITM 2 c cee es 3 37 Running vds id pulse UTM 000 cee ee 3 38 Running vds id pulse vs dc UTM 200 0c eee eee 3 39 Running vgs id DC ITM 220 e eee ee 3 40 Running vgs id pulSe UTM 2 60 e eee eee 3 40 Running vgs id pulse vs dc UTM 0 0c e eee eee 3 41 Running scope shot ici 20 56 cic eaten acer eaten bea amp dais eee 3 41 Adjustable parameters in scopeshot_cal_pulseiv 2 3 42 Tips for using Pulse lV 20 0c eee ee 3 43 Comparing DC and pulse results 000 2 cee ee 3 43 Pulse IV UTM descriptions 200 cee ee 3 46 Cal pulsSeiy Ane a ee ee eee ee ae 3 46 VOSIC PUISEIV essed Lek cate a aeni ane Ae ad le eh iia ee oe ee Shea nah a taneaaie 3 48 Vdlid_Pulse_DC_Family_pulseiv 0 000 eee eee 3 50 vgsid PUISEN o a auian a auia i oe ae aed eae ae a a er aoe a 3 53 Vale
229. cel NOTE For more information about test library access selection refer to the Reference Manual Customizing directory options page 6 342 Tests can be submitted to a library with or without including measurement data By default data is included when a test is submitted Test results files x1s data and kgs graph files are stored in the test library data folder as shown in Figure 2 21 4200 900 01 Rev H February 2013 Return to Section Topics Section 2 Model 4200 SCS Software Environment 2 32 Figure 2 21 Test library results folder E1 Exploring C S4200 kiuser File Edit View Go Favorites Tools Help Model 4200 SCS User s Manual lolx ae Back komad Up Map Drive Dis ee ee Cut Copy Paste Undo x Delete Properties Address E C 542005kiuser x Folders px 4200 p o m u 1 3 Devices BJT E Capacitor E Diode E General 5 JFET E MOSFET E Resistor 9 Projects Tests H BIT a Capacitor E data H E Diode E General H Mosfet H Prober H Resistor a ustlib E a sys x 4l Projects File Folder E Tests File Folder usib File Folder If data is included when a test is submitted to the Tests subdirectory the data is stored here Modified 5 1 00 2 36 PM 5 1 00 2 36 PM 5 3 00 7 36 PM 5 1 00 2 39 PM 4 abject s lo bytes Disk free space 650MB Usrlib subdirectory
230. channel must be the same e PostPulseDelays Post pulse delay time in seconds The minimum time is 20 ns 20 E 9 All timing delays are made the same across all channels 4 Enter the value for NumPulses e For typical characterization use NumPulses 1 Setting a higher number is useful for testing multiple pulses before performing a SMU measurement 5 Enter the number of SMUs being used as DC bias terminals that is useful wnen DUT terminals require a DC bias to address a particular device e Fora direct connection to a single DUT as shown in Figure 3 95 enter 0 For Figure 3 96 SMU 4 is used to DC bias Bit Line 1 so NumSMUBiasTerminals 1 e Enter the SMU numbers as a string a For Figure 3 95 leave SMUBiasTerminals blank b For Figure 3 96 use SMUBiasTerminals SMU4 If more than one bias terminal is required list all SMUs in ascending order separated by a comma but no spaces 6 Enter the array of bias voltages for the SMUs listed in the previous two steps e The number of values in the array must match the value of NumSMUBiasTerminals e Ifan entry is not needed delete the value and leave it blank not 0 7 Enter the number of SMUs that are sharing a cable with a pulse channel into NumSharedSMus e Sharing means that one pulse and one SMU signal are combined to a single DUT terminal a Figure 3 95 shows four SMUs are paired with a pulse channel with each SMU pulse pair sharing a cable to a terminal b Figur
231. cified SMU Is Not In Current System Configuration 7 Invalid DrainSMU Specified SMU Is Not In Current System Configuration Negative numbers are errors refer to LPT and PulselV documentation for description vdsid_pulseiv_demo Also see vdsid_pulseiv on page 3 48 vgsid_pulseiv_demo Also see vgsid_pulseiv on page 3 53 scopeshot_pulseiv_demo Also see scopeshot_pulseiv on page 3 61 These three UTMs are functionally identical but simpler than their respective routines listed earlier in this section of the manual The difference being less used parameters have been eliminated from the parameter list and hard coded for example SMU channels ranges load line 4200 900 01 Rev H February 2013 Return to Section Topics 3 63 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual How to perform a Quiescent point Pulsed I V test PIV Q on my device 3 64 Q Point Pulse IV Model 4200 PIV Q This application provides q point pulse IV testing for higher power compound semiconductor or LDMOS RF transistors or any device may benefit from low duty cycle pulse IV testing This application uses the Model 4200 PIV Q package that differs from the Model 4200 PIV A package by 1 Pulsing both the gate and drain 2 Providing higher power to the DUT drain 3 Pulsing from non zero bias point or quiescent point testing The compound semiconductor transistors consist of materials made from the III V
232. ck the Apply button at the bottom right hand corner of the window 1 Enable V Project Initialization Steps 2 Enable V Project Termination Steps 3 Start Execution at Site 1 4 Finish Execution at Site 5 4200 900 01 Rev H February 2013 Return to Section Topics 4 21 Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 29 Modified project plan settings Model 4200 SCS User s Manual E E Subsite E 4terminal n fet 3terminalnpn bit i connect ME vceic 2x probe ss move erminationSteps E _prober seperate E prober prompt Test descriptions Test descriptions for the probesubsites project are provided in Table 4 4 Tests can be opened in the workspace by double clicking them in the project navigator NOTE The connect UTMs are used to control the switch matrix 4 22 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Table 4 4 probesubsites test descriptions probesubsites Project Test Description InitializationSteps prober init Initializes the prober driver see Figure 4 30 Subsite1 4terminal n fet Connects the SMUs to the probes for the N channel MOSFET see connect Figure 4 31 Generates a family of curves Ip vs Vp for the MOSFET vds id 1x 3terminal npn bjt Connects the SMUs to the probes for the NPN transistor see Figure 4 32
233. cking Remove see Figure 3 70 Note that the Total Stress Count is cumulative If desired specify a Stress Measure Delay This allows the device to settle after stressing before performing the DC measurements 4 Periodic testing is not available for the Segment Stress Measure Mode 5 Clicking the Apply button updates the settings in the Subsite Setup tab The button will be inactive if updating is not required 6 Click Device Stress Properties to open the window to configure the Segment ARB waveform SMU bias levels and matrix connections see Figure 3 71 Proceed to Configure Device Stress Properties on page 3 84 to continue the configuration process Figure 3 70 Segment stress measure mode Log and list cycle counts Log cycle counts List cycle counts Stress Measure Cycle Times Stress Measure Cycle Times C Linear Log List Stress Counts C linear C log List Stress Counts First Stress Count 10 le Frat Stress Court fO i Total Stress Count fo poA Total Stress Count po pA Stresses Decade Nunberof Sresses f Stress Measure Delay 0 0 Stress Measure Delay 0 0 Configure Device Stress Properties To configure the device stress properties for the Segment Stress Measure Mode see Figure 3 71 3 84 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 71 Segment Stress Measure Mode De
234. cond id vg test This id vg test is the same as the first id vg test It measures the transfer characteristics of the N channel MOSFET This is the after stress characterization test Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Running the test sequence To run the test sequence select click the 4terminal n fet device in the project navigator and then click the green Run button P The test sequence is summarized in Table 4 5 Table 4 5 Test sequence for ivpgswitch project Test Description 1 connect Connects the MOSFET to the four SMUs 2 id vg Measures the initial transfer characteristics of the MOSFET 3 connect Connects the MOSFET to the PGU 4 pgul init Initializes the PGU 5 pgul setup Configures the PGU output pulse 6 pgu trigger Triggers the PGU to output a burst of pulses 7 connect Connects the MOSFET to the four SMUs 8 id vg Measures the final transfer characteristics of the MOSFET Compare the test results A way to compare id vg test results is to do a side by side visual inspection of the two graphs In the project navigator double click the two id vg tests to open them in the Workspace To compare the test results 1 Close some UTMs To reduce clutter you may want to remove any other tests UTMs from the Workspace Figure 4 54 shows the button to close a displa
235. controller and associated software to maintain this probe list The prbgen user modules communicate with the prober controller through the GPIB bus or COM1 port in most cases to instruct it to step through the probe list This technique of prober control is referred to as learn mode because the prober control software is taught where each probe location is physically located Table 4 3 summarizes the user modules included in the prbgen prober control user library Table 4 3 prbgen user modules User Module Description Prinit Initializes the prober driver and establishes the reference site or die All ITM or UTM data acquired by KITE will be tagged with row column site coordinate information that is relative to the reference site PrChuck Instructs the prober to move the probe station chuck up or down making or breaking contact between the wafer and test system pins probe needles PrSSMovNxt Instructs the prober to move to the next subsite or test element group in the probe list PrMovNxt Instructs the prober to move to the next site or die in the probe list Before a KITE project that utilizes the prbgen user library can be executed the probe list must be created using the appropriate prober control software Helpful instructions for creating the probe list for each supported prober are included in the Reference manual Appendix H and Appendix Refer to Table 4 2 for additional information Tes
236. ction Topics 2 51 In this section Section 3 Common Device Characterization Tests Topic Page How to perform an l V test on my device 00 cece ee eee eee 3 4 Default project overview 2000 e cece eee 3 4 4 terminal n MOSFET tests 0 cece eee eee 3 5 Three terminal NPN BJT tests 0 0 eee eee eee eee 3 6 Two wire resistor test 0 0c eee eee eee 3 6 Diode tests oe ities eek ee wea Ree wee a Re eee nee nw Bea 3 7 Connecti s eieseid eis andes Neen oA aa aa ate rad later teas eee keg 3 9 Leveraging the default project 0 0 eee eee 3 9 Copying entire KITE project 2 0c eee ee 3 10 Copying individual tests using the test library manager 3 10 Changing KITE startup behavior 00 002 c eee eee eee 3 11 How to perform a C V test on my device 0 0 0 cece eee eee eee 3 12 KITE ITM configuration 0 2 c eee 3 12 Definition tab ict et Siento ols dhe is debe le ate Sd EENS EA Dai tae ele aa ee E She 3 12 Terminal settings ia nes Api miar ugk ai dedicat nada i ia a a da gente aria ened a ayers cava tance 3 12 Forcing functions and measure options 2000e eee eee eee eee 3 14 Selecting the forcing function 200 eee eee 3 15 Setting the DC bias conditions 2 00 ee 3 16 Setting the AC drive conditions 00 cee ee 3 16 Measure Settings i rnein ea ieee eee a e n a Hane Sees 3 16
237. d drain probes provides a good connection There are two steps to the calibration open and through short To run PulselVCal If not already performed run AutocalScope as explained above Double click PulselVCal in the project navigator see Figure 3 36 Click the green Run button to start the PulselVCal Click OK on the first dialog box to continue the PulselVCal see Figure 3 37 left dialog box e O IN Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 5 The second dialog box requests that the probe pins be raised from the wafer breaking contact Raise the probe pins or lower the wafer to create the Open condition If using the 8101 PIV Test fixture ensure that the pulse socket near the fixture hinge is empty 6 Click OK on the Open dialog box see Figure 3 37 middle dialog box The Open portion should take about one minute 7 The third dialog box requests that the probe pins be connected to each other through another device Lower the probes onto another device 8 Click OK on the Through dialog box see Figure 3 37 right dialog box The Through portion should take about one minute 9 The test is complete when the Run button turns green In the Sheet tab cal_pulseiv 0 implies that there were no errors 10 The system is now ready to test regular devices Figure 3 37 PulselVCal dialog boxes
238. d storage environment 1 4 Powering the 4200 SCS Line POWER ou eeeeeeeteeeeeeeeeeeeteeeeeteeeeteee 1 5 Line frequency setting 00 1 6 LING FUSES sseccrisrnsvercsvartnnieaicceicciineasess 1 7 Line power connection 05 1 6 Warm up period assises 1 7 SMU connections TEStfXU SS siriasi 1 40 Installation and System Connections 1 3 Instrument panels 3 INTOGUCHON desorientat ITM Interactive Test Module Definition tab ncsscyesesvensecreseresgenennnernccnnanen 2 11 ITMs and UTMs in the Project Navigator 2 9 KCON Keithley Configuration Utility ike KCON setup ooo eceeccceesecesessseeesseeeeesseeceesseeeeees Keithley Interactive Test Environment KITE Displaying and analyzing project results Displaying and analyzing data using the Sheet tab oo Saving the worksheet Saving a Sheet tab to the project 2 36 Saving the Sheet tab to an external spreadsheet file using the Save As DUTON assirian 2 37 Understanding and using the Data worksheet of a Sheet tab 2 35 Understanding the data source identifier 2 36 Managing KITE application files and test results Devices Creating and adding 000 2 28 TICS siessenstesstancsritsanre nc mmnaanmabeneeteasaces 2 28 NIDFANIOS saiisine eaaa ea 2 26 library access selection 2 27 subdirectory eeeeeeeeeeeeeeeteeeeeeteees 2 26 Projects subdirectory s s s 2 29 T
239. de 1N970B AY only Diode 1N3595 Keithley PN RF 43 CV only 10 pF Ceramic capacitor CV Keithley PN C 405 10P rana a pa pa pa pa E Defaut Connections The vast majority of l V DUT connections are made by using mini triax cables for SMU or full triax to triax cables for preamp and connecting to the SMU PA source and sense connectors on one end and to your DUT on the other The SenseLO SMU connector is used only under special cases For additional details and schematics on connecting DUTs to the Connecting DUTs page 1 40 or Model 4200 SCS Reference Manual Connections and Configuration Section 4 NOTE In general the Model 4200 SCS utilizes BLACK triax cables for l V testing RED SMA cables for C V testing and WHITE SMA cables for pulse testing Leveraging the default project CAUTION Itis strongly suggested that you do not modify the default project itself but rather copy the entire project or individual test to another KITE project before making modifications 4200 900 01 Rev H February 2013 Return to Section Topics 3 9 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual All modifications to any KITE Default project will be lost when upgrading the Model 4200 SCS software to a new version All customer created KITE projects and data will NOT be deleted or modified in any way when upgrading the Model 4200 SCS software or uninstalling KTE Interactive Se
240. derstanding buttons in the Graph Definition window Opening and using the Graph Definition window KITE library management Submitting devices ITMs and UTMs to libraries Submitting devices to a library 2002200 ee eeee Submitting tests to a library 2 2 Return to Section Topics Model 4200 SCS Users Manual 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Understanding KITE The Keithley Interactive Test Environment KITE is the main software component of the KTE Interactive software tool set KITE is the primary user interface for the Keithley Instruments Model 4200 Semiconductor Characterization System SCS KITE is a versatile tool that facilitates interactive characterization of an individual parametric test device or automated testing of an entire semiconductor wafer Two additional KTE Interactive software tools augment the capabilities of KITE e Keithley User Library Tool KULT Used to create test modules using the C programming language These test modules can then be executed by KITE e Keithley CONfiguration utility KCON Used to manage the configuration and interconnections between all of the test system components that are controlled by KITE A fourth KTE Interactive software tool the Keithley External Control Interface KXCl allows the Model 4200 SCS to be controlled remotely by an external GPIB
241. double The number of steps for Vg Max 10 Vg_off double The DC bias applied by the GateSMU to put device in the OFF state Set to 0 V for enhancement FETs may be non zero for depletion FETs VdStart double The starting sweep value for Vd For DC only sweeps VdStart must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT VdStop double The final sweep value for Vd For DC only sweeps VdStop must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT VdStep double The number of steps for the Vd sweep Max 10000 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Model 4200 SCS User s Manual Table 3 10 continued Section 3 Common Device Characterization Tests Inputs for Vdid_Pulse_DC_Family_pulseiv Input Type Description PulseWidth double The Vgs pulse width PW The PW can be 40 ns to 250 ns 10 ns resolution Pulses wider than 250 ns will begin to be attenuated by the coupling capacitor in the Remote Bias Tee 4205 RBT PulsePeriod double The pulse period for the Vgs pulse The period can be set from 100us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 The period is most easily calculated by multiplying the largest desired pulse width PW by1000 Example
242. e not applicable Generic test fixture not applicable General purpose test instrument Any IEEE 488 or RS 232 or controlled instrument or Ethernet equipment created by user Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS NOTE Contact Keithley for the most current list of supported external equipment Keithley Configuration Utility KCON You do not need to perform system configuration operations if you use only internal instruments factory installed Source Measure Units SMUs preamps and the ground unit GNDU The Model 4200 SCS automatically detects internal instruments and configures the system accordingly for local operation However after adding supported external instruments switch matrices external General Purpose Instrument Bus GPIB probe stations and so on You must properly configure the system so that KITE and Keithley External Control Interface KXCI can utilize these resources Also if you need remote operation of the Model 4200 SCS through KXCl you must further configure the system Perform these configurations using the Keithley CONfiguration utility KCON Figure 4 3 provides an overview of KCON features For details about using KCON refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 To start KCON double click the KCON
243. e Name Gatev I Status If you make any changes to the SMU3 setup click OK to enter the changes and close the window Cancel Programmed C Measured C After making any changes to the test definition click Save All on the toolbar to save the settings Run vds id test In the project navigator see Figure 1 36 make sure the vds id test is highlighted and the checkbox is checked On the toolbar click the green Run Test gt button to run the test one time NOTE While the test is running the Run Test button turns gray and the Abort Test button turns red E Also the ACTIVE indicator light located on the lower right hand corner of the front panel of the Model 4200 SCS will be on while the test is running When the test is finished the Run test button turns green View and save the sheet data View data sheet for the vds id test is displayed by clicking the Sheet tab for the test Use the tabs at the bottom of the Sheet to display the data type A sample data sheet for the vds id test is shown in Figure 1 39 The data sheet for the vds id test is displayed by clicking the Sheet tab 1 46 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Figure 1 39 Sample data sheet for vds id test
244. e see Figure 3 5 4200 900 01 Rev H February 2013 Return to Section Topics 3 7 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 8 Figure 3 5 Diode tests Definition Sheet Graph Status Test Notes Timing Exit Conditions Output Values Speed Normal Mode 7 SMU1 v Anode Cathode SMU2 v FORCE MEASURE FORCE MEASURE Sweep Y Master Measure YES Measure NO Type Linear Ltd uto 1e 0104 Measure Y NO Start OV Measure V YES Compl 0 14 Stop 0 9 Range V Best Fixed Step 0 014 Compl 0 14 Points 91 Description of diode tests vfd This test runs a linear forward l V sweep through the anode uses the formulator to cal culate the exponential line fits and plots anode current vs anode voltage vrd This test runs a linear reverse l V sweep through the anode uses the formulator to cal culate the exponential line fits and plots anode current vs anode voltage These tests serve as good examples on how to configure tests in the definition tab how to use Formulator functions to perform common mathematical calculations and return them to the data sheet and how to configure the graph to plot the data in a variety of ways All test parameters in the default project were written for standard discrete parts but can be easily modified for use with other discrete devices or devices on a semiconductor wafer To see exactly what discrete
245. e voltage drop caused by the 50 Q sense resistor used to measure the drain current Id 1 load line correction active 0 no load line correction Return to Section Topics Model 4200 SCS User s Manual 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 7 continued Inputs for vdsid_pulseiv Input Type Description VPUID char The instrument ID This should be set to VPU1 for 4200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SMUs in the system This is the SMU that applies the DC bias to the DUT drain during the sweep IdSize int Set to a value that is at least equal to the number of steps in the sweep VdMeasSize and all five must be the same value VdProgSize VgSize VgProgSize Table 3 8 Outputs for vdsid_pulseiv Output Type Description IdArray double The measured drain current from channel 2 of the scope card This current is determined by measuring the voltage drop across the scope card 50 Q termination giving Id Vd 50 Q VdMeas double Array of measured drain voltage values VdProg double Array of programmed drain voltage values VgMeas double The measured gate voltage
246. e 3 96 shows that three pairs of SMU pulse channels are shared e The SMA tees on each of the top three SMUs that incorporate both a pulse channel and a SMU signal into a single cable to a DUT terminal Supplying the shared SMU information allows the software to open the SMU relay during the pulse output that is necessary to permit good pulse fidelity e Ifa switch matrix is used in the configuration see Figure 3 97 then use NumSharedSMUs 0 8 Enter the SMU IDs for the SMU s sharing a cable with a pulse channel into SharedSMUs e For the configuration in Figure 3 96 SharedSMUs SMU1 SMU2 SMU3 NOTE There are NO spaces allowed in the SharedSMus string Both of the Segment ARB definition methods are required and are test dependent For all UTMs the UTM array approach is used For any stress measure loop tests such as endurance or disturb use Kpulse to define and export the waveform files then import waveforms into the Device Stress Properties 4200 900 01 Rev H February 2013 Return to Section Topics 3 107 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 108 When the same waveform is required in the stress measure Device Stress Properties and ina UTM the same waveform information must be manually entered using both methods In addition to the waveform definition the interconnect between cards is necessary to provide synchronized multi channel Segment ARB output The
247. e 4200 RBT has a max pulse width of 150 ns not the 250 ns of the 4205 RBT All voltage levels specified below assume a 50 Q DUT load Return to Section Topics 3 55 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 56 Connection Table 3 16 The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the 4205 RBT The RBT connected to GateSMU the RBT with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain Use either G S G probes for RF structures or use DC probes with the 4200 PRB C adapter cables for DC structures Set the appropriate values for the Vds ld parameters Inputs outputs and returned values are provided in Table 3 16 Table 3 17 and Table 3 18 Inputs for Vgid_DC_Pulse_pulseiv Input Type Description Vds double The voltage value for Vd For DC only sweeps Vds must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT For pulse and pulse and DC Sweeps Vds must be between 5 V to 5 V VgStart double The starting step value for Vg For DC only sweeps VgStart must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT For pulse and pulse and DC Sweeps VgStart must be between 5 V to 5 V VgStop double The final s
248. e Keyboard with integrated pointing device e System software and manuals on CD ROM Microsoft Windows XP Professional e Ordered Microsoft Visual Studio factory installed Manual package All 4200 manuals are provided on a CD ROM and are preinstalled on the hard drive If a complete set of printed manuals is required order the optional manual package Keithley Instruments part number 4200 MAN The manual package includes any pertinent addenda Because the manuals are provided in PDF format they can be printed from any computer that is connected to a printer by using Adobe Reader Repacking for shipment Should it become necessary to return the Model 4200 SCS for repair carefully pack the entire unit in its original packing carton or the equivalent and follow these instructions e Call Keithley Instruments repair department at 1 888 KEITHLEY 1 888 534 8453 for a Return Material Authorization RMA number 1 Not included when SMU is ordered with a Model 4200 PA 4200 900 01 Rev H February 2013 Return to Section Topics 1 3 Section 1 Getting Started Model 4200 SCS User s Manual e Let the repair department know the warranty status of the Model 4200 SCS Semiconductor Characterization System e Write ATTENTION REPAIR DEPARTMENT and the RMA number on the shipping label Complete and include the Service Form located at the back of this manual Environmental Considerations Shipping and storage environment
249. e Mask test e Frequency transform e Time domain transform The waveforms for a calculation can be input channels 2 and waveforms that are stored in memory as reference channels 4 For more information about ZTEC refer to the Model 4200 SCS Complete Reference ZTEC User s Manual Chapter 2 Ground unit GNDU Basic characteristics The ground unit see Figure 1 28 provides convenient access to circuit COMMON which is the measurement ground signal shared by all installed Model 4200 SCS instrumentation In addition the GNDU SENSE terminal provides access to the SMU SENSE LO signals 1 36 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 1 28 Ground unit mo2zmn mowvon c o M M o N J Basic ground unit characteristics are summarized in Table 1 8 Table 1 8 Basic ground unit characteristics Characteristic Description Maximum current FORCE triax connector 2 6 A Maximum current COMMON binding post connector 9A Maximum FORCE path cable resistance 1Q Maximum SENSE path cable resistance 100 Basic circuit configurations Ground unit connections Section 1 Getting Started Figure 1 29 shows how the various GNDU signals are related to the SMU signals Note that the GNDU FORCE signal is circuit COMMON The GNDU SENSE terminal is connected to each SMU SENSE LO signal through a unique auto sense resistor When the GNDU SENSE sign
250. e and any unprotected leads wiring with double insulation for 250 V Category I CAUTION The maximum allowed voltage between COMMON and chassis ground is 32 V DC Figure 1 11 Models 4200 SMU and 4210 SMU connectors KEITHLEY 4210 SMU INSTRUMENT F CONNECTIONS orce SMU ONLY and SENSE LO GUARD LO Connectors common Sense SENSE LO SMU AND GNDU SENSE GUARD COMMON PreAmp Control Connector FORCE FORCE terminal The FORCE terminal is a miniature triaxial connector used to apply the SMU FORCE signal to the DUT when a preamp is not being used e The center pin is FORCE The inner shield is GUARD The outer shield is circuit COMMON SENSE terminal The SENSE terminal is a miniature triaxial connector used to apply the SMU SENSE signal to the DUT in a remote sense application when the preamp is not being used The center pin is SENSE Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started The inner shield is GUARD The outer shield is circuit COMMON Nominal internal auto sense resistance appears between SENSE and FORCE NOTE The SENSE terminal does not need to be connected to the DUT for the SMU to operate correctly Remote sensing is automatic If SENSE is connected to the DUT errors due to voltage drops in the FORCE path between the SMU and the DUT will be eliminated and the SMU will sense locally SENSE LO
251. e are many parameters in the UTM GUI view it may be necessary to collapse a group above or below to allow the box to expand For a user module the exact controls and parameter grouping of a UTM GUI view are determined by the GUI view definition This is typically created by the same person that created the underlying user module Figure 2 6 UTM GUI de finition tab Sheet tab Status tab Test device or other Numerical test and analysis results Test definition and graphical illustration and test settings configuration status Graph tab Test Notes tab User modules box Formulator Graphical test Type in notes about Test module selection Mathematical and analysis results the project for the UTM test results A Select the view for the analysis tool User libraries box UTM Classic table Output Values button Click to set export Output Values for this test to the Subsite data sheet a ver Pau User Modules PMU_1Chan_Waveform_Example Test Description area Displays important information about the test module 4200 900 01 Rev H February 2013 Test library selection for the UTM or GUI graphical Sheet Graph Status Test Notes Ranges E Pulse Timi Gov v Ise Timing voltsSourceRng 10V A period 1 0e 5 s width 3 0e 7 s rise 5 0e 8 s fall 1 0e 7 s delay 1 0e 7 s cumentMeasureRng E Test Settings DUTRes Ohms 1 0e
252. e both a pulse channel and a SMU signal into a single cable to a DUT terminal Supplying the shared SMU information allows the software to open the SMU relay during the pulse output that is necessary to permit good pulse fidelity If a switch matrix is used in the configuration see Figure 3 97 then use NumSharedSMUs 0 Enter the SMU IDs for the SMU s sharing a cable with a pulse channel into SharedSMUs For the configuration in Figure 3 96 SharedSMUs SMU1 SMU2 SMU3 There are no spaces allowed in the SharedSMus string Press the green triangle Run button to output the pulses Check the Data tab in the Sheet control The single_pulse_flash value should be O indicating that there were no errors No measurements are taken in this test so there is no data to graph If single_pulse_flash is non zero pulses are not being output or there are error messages in the Project Messages pane see Troubleshooting section Table 3 29 Parameter values for Program or Erase UTM for 4 or 2 channel configurations Parameter Value for 4 channel test Value for 2 channel test NumPulseTerminals 4 2 PulseTerminals VPU1CH1 VPU1CH2 VPU1CH1 VPU1CH2 VPU2CH1 VPU2CH2 PulseVoltages 0 T 0 0 0 T PrePulseDelays 1 E 6 1E 6 1E 6 1E 6 1 E 6 1 E 6 TransitionTimes 3 E 7 3 E 7 3 E 7 3E 7 3 E 7 3 E 7 PulseWidths 5 E 6 5 E 6 5 E 6 5E 6 5 E 6 5 E 6 PostPulseDelays 2 E 6 2 E 6 2 E 6 2 E 6
253. e first time 000220 eee eee 3 125 Running the Flash NAND Flash NOR or Flash Switch Project 3 126 Running the Program or Erase UTM 2002 00 ceeeeeeee 3 127 Running the Fast Program Erase UTM 200 cece eee eee eee 3 129 Running the SetupDC UTM 00 c cece eee eee 3 130 Running the Vt MaxGmITM 200 e eee ee 3 130 Running the ConPin Pulse or ConPin DC UTM Switch projects only 3 130 FlashEndurance NAND tests 00 ete eee eeeeeeeeeeeeee 3 131 FlashEndurance NOR tests 00 c eee e eee eee eee eens 3 137 FlashEndurance switch tests 0 0 0 e teens 3 137 Running a FlashEndurance or FlashDisturb project 00 eee eee 3 138 Running endurance or disturb looping 20 2200 cece eee eee 3 140 FlashDisturb tests 00 0 ccc eee eee eee 3 141 Explanation of flash UTM parameters 0 02 0c e eee eee eee eee 3 142 Error CODGS cid tiered eee eee eee eds VE ee ee eee eee 3 144 Troubleshooting sc 6see see ses ene a aha Se ee ee ees 3 145 NOipuISE OUTDUE inves weeded sada vias eee eta 3 145 Voltage levels do not match expected values 22002 eee reese 3 146 How to perform Charge Pumping 0 0 e seen eee eee eee eee 3 146 How to perform a Charge Trapping test 0 cee eee eee 3 147 Slow single pulse charge trapping high K gate stack 2 22 3 147 Charge trapping procedure
254. e measurement will occur after each on time period expires and before the pulse transitions to the off time level The voltage sweep in Figure 2 8 is a single sweep If dual sweep is enabled the test will continue by going back to the stop level and then step down to the start level For details see Understanding dual sweep on page 2 16 Figure 2 7 Pulse mode example Voltage bias 2V level 1V base i ja On Time si Dr Cumulative Measurement Time Level 2V 4 Off Time Base Voltage 1V 4 OV gt Time 4200 900 01 Rev H February 2013 Return to Section Topics 2 17 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 8 Pulse mode examples Single and dual sweep Dual Sweep Disabled single sweep On A Stop 4V 4 On 3 Data Points Wa On Time lt gt Start 2V 5 Off Time lt gt Base Voltage 1V OV gt Time D Cumulative Measure Time Data Point Dual Sweep Enabled On On A Time Time 6 Stop 4V 4 On On Data Points Time Time 3v4 On l On Time Time aa kf Start 2V Base Voltage 1V OV gt Time How to use the definition tab to configure ITM parameters This topic describes parameter configuration of a library ITM in which connections and test modes are preconfigured For discussions of general ITM configuration including creat
255. e measurements The purpose of the ABB is to create a virtual ground at the DUT to minimize measurement error Every CVU measurement is taken with ABB active The ABB will always attempt to lock the low side of the DUT to virtual ground If the ABB fails to lock A The measurement will still be taken but may be out of specification B The returned data will be flagged and colored yellow in the data sheet C The graph will display an ABB Not Locked message 1 In February 2009 the 4210 CVU replaced the 4200 CVU The 4210 CVU is identical to the 4200 CVU except that it adds the 1 kHz frequency 1 kHz 9 kHz in 1 kHz increments 4200 900 01 Rev H February 2013 Return to Section Topics 1 21 Section 1 Getting Started Model 4200 SCS User s Manual Most common causes of ABB not locked are as follows e Mismatched physical cable lengths e Mismatched physical cable lengths versus the programmed cable length in Keithley Interactive Test Environment KITE Improperly torqued SMA cables e Sub optimal I range setting e Too much parasitic load on the low side of DUT Figure 1 14 Measurement circuit simplified 4200 CVU Measure DUT AC Voltage Measure AC Curren Shields of the cables must be connected together near the DUT The capacitive impedance and conductance are calculated based on the measured AC impedance and phase The capacitance is calculated from the capacitive impedance
256. e of the SMA Tees and connect the two shortest 4 25 inch or 10 8 cm SMA cables to either end 3 Connect this assembly to the right most PG2 card that is the PG2 card in the lowest numbered slot First connect one of the SMA cables to TRIGGER OUT and connect the SMA tee to TRIGGER IN 4 Then connect the other SMA cable to TRIGGER IN on the second PG2 card This second card is the card to the immediate left of the card in step 3 NOTE Ifthe FLASH package consists of more than two PG2 cards continue to connect the cable and Tees to the adjacent cards For a system consisting of four PG2 cards there should be three SMA tees used to connect the triggering across the four cards 5 Take one SMA to BNC adapter and connect one 5 foot 1 5 m black BNC cable 6 Take the cable from step 5 and connect the SMA adapter to CHANNEL 2 of the PG2 in the left most slot PG2 in the slot with the highest number 7 Route BNC cable from step 6 to the DUT array Bit Line Select connection Use a Triax to BNC adapter if necessary Connect cable to probe manipulator 8 Take one black Lemo Triax to 3 slot Triax cable and insert the LEMO end into the Force connection on the left most SMU in slot 4 9 Route triax from SMU4 to the DUT array BL1 connection Connect cable to probe manipulator 10 Take an SMA Tee and connect one SMA to BNC adapter to one of the female connectors 11 Connect the assembly from step 5 to one Triax to SMA Adapter 12 Conn
257. e reading for each subsite cycle Figure 3 77 explains how to display the various graphs Figure 3 77 shows the graph traces for test ID 1 for the NMOS 1 device The three traces are for Output Values IDOFF IDLIN and IDSAT 4200 900 01 Rev H February 2013 Return to Section Topics 3 91 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 77 Subsite graph tab cycle mode NMOS 1 1d 1 Fea er eee ane E peene NOTE P ee re pa ae For a single device subsite plan the Device select buttons and the checkbox to Overlay All amp 200 06 64 EEEN EEEE PECIA PEREAT Drakas Legend Devices are disabled a i IDSAT For a single test subsite i plan the Test select 100 06 64 AEAEE AET PEER elesni TEE buttons are disabled i f 0 0E 0 amp A i i re te 1 2 3 4 5 6 7 Cycle Index Device Test 1 Use to select device NMOS 1 iat Click enter V to display all the graph 2 Use to select test traces for all devices that were measured by the selected Test Stress measure mode The graphs for the stress measure mode plot degradation in versus the stress times Each data point in the graph represents the device degradation Change for tests after each stress cycle stress time Figure 3 78 explains how to show the graphs for a selected device test Figure 3 78 shows the graph traces for test ID 1 for the 4term
258. e test pulse stresses the device for HCI NBTI and TDDB test instead of DC bias by outputting a train of pulses for a period of time stress time Pulse characteristics are not changed during the stress measure test 3 The test then measures device characteristics using SMUs Vth Gm and so on Figure 3 62 AC Pulse stress measure hardware setup block diagram Stress Pulse Generator ge Output 4205 PG2 Measure 4200 SMU 2 4200 SMU 1 4200 SMU 3 4200 900 01 Rev H February 2013 Return to Section Topics 3 75 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 63 AC Pulse stress measure hardware matrix card simplified schematic 4200 SCS as Pa e a aa 4200 SMU 1 4200 SMU 2 4200 SMU 3 Pulse Generator 4205 PG2 Sane 3 76 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 64 AC Pulse stress measure hardware connections Columns 1 23 45 678 9101112 J f Black BNC Cable male to male 1 of 4 Model 7072 4 Model 708A White SMA Cable 2m 6ft male to male Model 4200 SCS Instrument Slots INSTRUMENTS 4200 MTRX X Cables 2m 6ft 3 Model 4200 SMU 1 Model 4205 PG2 Model 4200 SMU 2 Scope Card Model 4200 SMU 3 Model 7072 side view to show
259. e the Model 4200 SCS Release Notes Installation Instructions in the Model 4200 SCS Complete Reference for details on all Default KITE projects See Accessing the release notes on page 1 50 for more information Copying entire KITE project The entire Default project or any KITE project for that matter can be copied in its entirety in one easy step After opening the default project select the menu item File Save Project As See Figure 3 7 Figure 3 7 Copying entire KITE project default Keithley Interactive Test Enviror lo View Project Run Tools Window Help E G New Project off Open Project Close Project x Si This will bring up a dialog fed Save Ctrl 5 window for you to enter a 1G Save all new KITE project name Save Project As Generate Keithley Data File KITE Save Project As Project Name MyProject 1 454200 default kpr 2 54200 probesubsites kpr Location 2 C 4542004 Default1 kor C 4200 kiuser Projects Ej 4 C1542001 NanoDevices kpr tcn MN p Restore Default Location 5 454200 Junkie Junkie kpr 6 Pulsel Complete kpr 6 plete kpi F Inchude data Make new project read only Z QPulsell Complete kpr Make new project run only 8 C 454200 C U_nanowire kpr Exit Cancel STE Raa AA a After entering a new project name click the OK button This will copy the entire KITE project to another KITE project and will inc
260. ect one 8 inch 20 3 cm SMA cable to the remaining SMA female connector 13 Connect one 5 foot 1 5 m black BNC cable to the BNC connection 14 Perform steps 10 13 two more times 4200 900 01 Rev H February 2013 Return to Section Topics 3 115 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 15 Take one of the cable assemblies from step 14 connect the SMA to CHANNEL 2 of the PG2 in the left most slot PG2 in the slot with the highest number 16 Carefully insert the LEMO Triax connector from step 15 into the Force connector on the SMU in Slot 4 17 Route BNC cable from SMU4 to the DUT array WL2 terminal Use a Triax to BNC adapter if necessary Connect cable to probe manipulator 18 Take one of the cable assemblies from step 14 connect the SMA to CHANNEL 1 of the PG2 in the left most slot PG2 in the slot with the highest number 19 Carefully insert the LEMO Triax connector from step 18 into the Force connector on the SMU in Slot 3 20 Route BNC cable from SMU3 to the DUT array BL2 connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator 21 Take one of the cable assemblies from step 14 connect the SMA to CHANNEL 2 of the PG2 in the right most slot PG2 in the slot with the lowest number 22 Carefully insert the LEMO Triax connector from step 21 into the Force connector on the SMU in Slot 2 23 Route BNC cable from SMU2 to the DUT array WL2 connect
261. ecting a probe station 220020005 1 9 Connecting a printer 2 202 eee eee 1 10 Connecting aLAN so meata miara 20 a r ae i a ai aai a 1 10 Model 4200 SCS Hardware Overview 1 11 Front panel ios acest ce aso a ma a aa a deere i 1 11 Instrument panels 00 c cc ees 1 11 Front panel ciesa ssi dias i a iiaa weed Mea eS aed 1 11 Rear Panel aat iie taida E a aAA E aE i E eoi aa iacaa 1 11 Activate LAN2 connection 2000eee ee eeee 1 13 DC source measure unit SMU 2 20005 1 13 Introduction fies Sicha ok RA Ree Re ere a tied ate 1 13 Models 4200 SMU and 4210 SMU overview 1 13 Basic characteristics 0002 eee eee eee 1 13 Basic SMU circuit configuration 1 14 SMU terminals and connectors 000 20003 1 16 SMU with Model 4200 PA overview 2 1 17 Basic characteristics 0002 cece eee eee 1 17 Basic SMU preamp circuit configuration 1 18 DC preamp coiriu iai a aiey eee ee ae 1 19 PreAmp terminals and connectors 00000000es 1 19 FORCE terminal rebia me a eE aa aE aE a aa 1 20 SENSE terminal i e 55 cc tne eo Shoot tein a eaa a e oa aa a a i 1 21 PreAmp CONTROL connector 0000 cece eens 1 21 Multi frequency capacitance voltage unit CVU 1 21 Introduction yaaa a Ge ee a ane ett ge ae ee 1 21 Model 4210 CVU card 2 cee
262. ection 2 Model 4200 SCS Software Environment Figure 2 9 Typical SMU forcing functions measure options window for an existing library ITM Forcing Functions Measure Options Device Terminal Source Instrument ID SM r Instrument Information Instrument ID SMUT Instrument Model KI4200 MPSMU with PreAmp Mode Sweeping Forcing Function Voltage Sweep M Master r Voltage Sweep Function Parameters Sweep Type Linear Log Dual Sweep pure 0 s Start 0 v v Stop 4 Voy Step 0 1 VE On Time 0 1 s Data Points 41 Off Time 0 1 s Base Voltage Src Range 20V X ge jo E Compliance 0 1 A Measuring Options IF Current Vv Voltage Name Source 4 4 7 Programmed C Measured I Status Figures 2 10 2 11 and 2 12 illustrate basic options and functions for each part of the Forcing Functions Measure Options user interface Figure 2 10 Instrument information forcing functions and voltage sweep function parameters Describes the instrument selected for i this device terminal and the mode of the step forcing function acts as test being performed Sweeping mode Select the present forcing a master independent or or Sampling mode in which data is function slave tracks the master recorded vs time for an applied signal Select whether a sweep or Forcing Functions Measure Options Device Terminal Source Instrument ID SM Instrument Ihformation Instrument Model KI420
263. ection Topics 3 47 Section 3 Common Device Characterization Tests 3 48 vdsid_pulseiv Description The vdsid_pulse sweep is used to perform a pulsed Vd Id sweep using the 4200 PIV package This test is similar to a typical DC Vd ld but only two sources are used gate VPUID pulse channel 1 and drain DrainSMU The gate is pulsed but the drain is DC biased Measurements are made with the two channel scope card To create a family of Vd Id curves change Vgs and run the test by using the append button Make sure to set the appropriate values for the Vds ld parameters see Table 3 7 Table 3 8 and Table 3 8 contain outputs and return values respectively Connection The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the 4200 RBT The RBT connected to GateSMU with the power divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 33 Table 3 7 Inputs for vdsid_pulseiv Input Type Description Vgs double The pulsed gate source voltage bias output by channel 1 of the pulse generator card VPUID Vg_off double The DC bias applied by the GateSMU to put device in the OFF state Normally set to 0 V for enhancement FETs may be non zero for depletion FETs
264. ed or open state may also be chosen for any pulse segment The open state is useful when tunneling for programming or erasing a floating gate transistor These projects support from one to eight pulse channels to support typical 4 terminal devices as well as higher pin count devices or array test structures NOTE The 8 terminal testing requires four Model 4205 PG2 cards and for most tests a compatible external switch matrix The purpose of these projects is to initially characterize a floating gate transistor For example determine the appropriate pulse parameters for both the program and erase waveforms to reach a target Vte and Vrp This can be done by setting the Program pulse height to the desired value but setting the pulse width to a fraction of the expected pulse width Entering Segment ARB values into UTM array parameters 1 Set the NumPulses to one and uncheck the Erase and Fast Program Erase tests 2 Run the Program SetupDC and Vt MaxGm tests monitoring the shift in the VT and noting the number of pulses required to reach the target Vtrp Then the same approach can be used for the erase If the DUT was initially in an unknown state the determination of appropriate pulse parameters for the program and erase waveforms may be iterative The Fast Program Erase test may be used to confirm that the chosen pulse parameters are providing an acceptable erase and the VT after the Fast Program Erase is not shifting Once accepta
265. eee eee 1 21 Measurement overview 2 200 eee eee eee eee 1 21 Measurement functions 0022220 eee eeaeee 1 22 Section 1 Getting Started Section 1 Getting Started 1 2 TeStiSignall osai rans a tanas steaks Meee ROS Mee See 1 23 DC bias function and sweep characteristics 1 23 Force measure timing 22 2eeee eee eee 1 24 Bi s TUMCUIOM fai facc stint wie rien agia aera ase tala eee tm ow gn ae 1 24 Sweep function 22 E eee ee 1 25 Pulse CardS 22 evi ce ei wake ee ORR OO 1 25 About the pulse cards 20020 2c eee eee 1 26 Firmware upgrade for the Model 4200 PG2 1 27 standard pulse sse ida ene nnns Bend oe eke eed oe ees 1 27 Segment ARB waveform 00 eee e eee eee eee 1 27 FU AND ii den ee eee eee ee ene ed be ee ee Saws we en 1 29 Pulse card settings 0002 eee eee eee eee 1 30 Remote bias tee RBT and 3 port power divider 1 30 RBT ics eee eh aes aaa areca SA 1 30 3 port power divider 200 eee eee eee eee 1 31 Using an RBT and power divider 1 31 SCP2 Oscilloscope 00 eee eee eee eee eee 1 32 Digital storage oscilloscope card 1 32 Scope card settings 0 eee eee eee eee 1 33 Ground unit GNDU 0 00 eee ee eee 1 36 Basic characteristics 0 000 22 ee ee eee 1 36 Basic circuit configurations 2 055
266. eeeenaeeeeeeeaaes 3 50 WISI UN SOI aoc acca vena ccceessanadacanrtanndacdavwancdatsananeadedan vaaddenga oauadasdaaranacaceaens 3 53 Wold DC Pulse PUB ociera iiai aaa aiaa anaia Ta 3 55 SCOPRSIOL Cal PUSE raaraa aa a a aaa a aaa aaa 3 59 SCOpPESHOT PUBEN iaiia aiaa eia a aaa aaaeaii 3 61 vdsid_pulseiv_demo 2 cccceeccecceceeeeeeeeeeeeeceeaeeeeeeeeeeeeeseeeecsaeaaeeaeeeeees 3 63 vgsid pulse QEMO oana ide aiaiai ideat 3 63 scopeshol pulsli JMO rsrsrsrs s dink naann ENA AnA EESAN 3 63 How to perform a Quiescent point Pulsed l V test PIV Q on my device 3 64 Q Point Pulse IV Model 4200 PIV Q 00 ececeeeeeeeeeeeeeseeeeeeeeeeeeaaeees 3 64 What is the PIV Q PACMAG ciccaccnscdsezeces cheeses stancceslentgneaeyeatamnezveneeaadeveents 3 64 How to perform reliability stress measure tests on my deViC 3 66 Connecting devices for stress measure cycling 3 66 Overviewing the cycling related tabs ceccccceceseneeeeeeseeeeeeesereeeees 3 67 Configuring subsite CYCIING ee ceeeeeeceeeeeeeeeeeeeeeeeeeeeeeeeeeeteneeeeeeeeeaaates 3 67 Configuring device stress properties cccecccceceseeeeeeeeseeeeeeeeneneeeees 3 71 How to perform AC stress for wafer level reliability WLR 0 eee 3 75 Segment Stress Measure Mode cccceceeeceeeeeeseeeeeeeeeeeeceeseeneneeeeee 3 81 Segment ARB SINGSSWIG eii crriirrriii tssirini innan is r dpeceeddanpccervbbeadetanidy 3 82 Segment Stress Me
267. eference Manual Temporarily enlarging a selected area of the graph by zooming page 6 279 Zoom out Restores a graph to the original or previously zoomed size For more information refer to the Reference Manual Temporarily enlarging a selected area of the graph by zooming page 6 279 Return to Section Topics 2 41 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual 2 42 Comment Opens the Comment window which allows you to add and format a comment For more information refer to the Reference Manual Adding a comment page 6 273 Data variables Opens the Data Variables window from which you can configure the display of up to four data variables along with the corresponding names The data variables menu item also toggles the data variable display For more information about the Data Variables item refer to the Reference Manual Numerically displaying extracted parameters and other data variables page 6 257 Legend Toggles the display of an automatically created legend on and off For more information about legends refer to the Reference Manual Adding a legend page 6 271 Test Conditions Displays the primary test conditions used to obtain the data in the graph For more information refer to the Reference Manual Displaying test conditions page 6 264 Title Opens the Title window which allows you to add and format a title For more information refer to the Reference Manual Adding a title
268. eft side of screen and add a Keithley 7174 Low Current Matrix Card to Slot 1 of the switch matrix Add the switch card using the pull down menu on the Properties tab See Figure 4 10 4200 900 01 Rev H February 2013 Return to Section Topics 4 9 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 10 Add a switch card to the system configuration Keithley CONfiguration utility OFFLINE KI System Configuration E E KI 4200 MPSMU SMUT E E KI 4200 MPSMU SMU2 E E KI 4210 HPSMU SMU3 E fq KI 4210 HPSMU SMU4 KI Ground Unit GNDU f KI 7174 Matri Card CARD1 con E Test Fixture TF1 5 Select the KI 7174 Matrix Card CARD1 item in the configuration navigator Connect the SMUs GNDU and test fixture pins as indicated in Figure 4 7 using the pull down menus on the Properties tab See Figure 4 11 Figure 4 11 Define the system connections 8 KI 4200 MPSMU SMUT 8 KI 4200 MPSMU SMU2 8 KI 4210 HPSMU SMU3 8 KI 4210 HPSMU SMU4 c KI Ground Unit GNDU KI 707 7074 Switching Matrix MTRX1 Pin10Force 6 Select File gt Save and save the system configuration and exit KCON See Figure 4 12 4 10 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 12 Save the
269. el 4200 CVU will perform a measurement The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Steps 2 and 3 are repeated for the 2 V 3 V and 4 V DC bias voltages The hold time delay repeats at the beginning of each subsequent step The sweep delay hold time and output disable are set from the ITM timing window for sweeping Figure 3 20 CVU Voltage List Sweep output AC Voltage E 15mV RMS 3V SD Delay Meas PreSoak 2V Frequency 100kHz Disable outputs at completion enabled 80 Delay Meas 80 Delay Meas CVU Frequency Sweep bias Figure 3 21 shows an example of a FFMO window with CVU Frequency Sweep bias selected as the forcing function to measure Cp Gp The Sweeping test mode must be selected for this test see Figure 3 11 3 22 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 21 Forcing Function CVU Frequency Sweep bias Forcing Functions Measure Options Device Terminal A Instrument ID CVH1 Instrument Information Instrument ID CYU1 Instrument Model KICVU Mode Sweeping Forcing Function evu Frequency Sweep M Master Advanced CVU Frequency Sweep Function Parameters DC Bias Conditions AC Drive Conditions Bias C Step Start Frequency 100k v Hz PreSoak 5 Yy v Stop Frequency
270. en stressing with DC current a voltage limit can be set Limits are set to protect the device from damage One or two device terminals can also be stressed with AC voltage by each Keithley Instruments pulse card Each pulse card has two output channels allowing two devices to be stressed by AC voltage NOTE Current stressing When setting the current stress level for each device in the subsite plan keep in mind that a setting of zero 0 connects the device pin to the ground unit 0 V ground In order to current stress a device the current level must be set to a non zero value Device pin connections In the Device Stress Properties window see Figure 3 59 there are input fields for device pin numbers With DC Voltage Stress or DC Current Stress selected the device pins are connected to an SMU or a matrix card With AC Voltage Stress selected checkboxes appear next to the device pin input fields which allow for the user to enable a VPU for each individual pin If the pin is routed to an SMU leave the corresponding VPU checkbox empty If a pin is routed to a pulse card click the corresponding checkbox to enter a checkmark No matrix card system If a matrix card is not being used in the system the pin number assignments for each device must match the actual physical connections to the SMUs For example if the drain of a device is connected to SMU2 the pin number assignment for Drain Pin in the Device Stress Properties window must be set
271. ents This additional airflow could compromise accuracy performance When rack mounting the unit make sure there is adequate airflow around the sides bottom and back to ensure proper cooling e Rack mounting high power dissipation equipment adjacent to the Model 4200 SCS could cause excessive heating to occur To ensure proper cooling in rack situations with convection cooling only place the hottest equipment the power supply at the top of the rack Precision equipment such as the Model 4200 SCS should be placed as low as possible in the rack where temperatures are the coolest Add spacer panels below the unit will help ensure adequate airflow CAUTION A large system for example multiple SMUs multiple pulse generators and a scope draws more power than a small system causing the internal power supply to generate more heat Because of this it is imperative that systems of any size have proper ventilation Even a small system with inadequate ventilation can be damaged by excess heat Cleanliness To avoid internal dirt buildup that could degrade performance and affect longevity the Model 4200 SCS should be operated in a clean dust free environment Powering up the Model 4200 SCS The following information covers power requirements for the Model 4200 SCS power connections power up characteristics and warm up requirements Line power The Model 4200 SCS operates from a line voltage in the range of 100 V to 240 V
272. er s Manual Figure 4 67 Add a device plan r Device Library C S 4200 kiuser D evices hd m BIT E Capacitor H E Diode H General H E MOSFET H E Resistor xl New Device Name Site i capacitor Project Tree UID Before selected node After selected node bad E subsite Cancel 46 capacitor oO O A Window to specify device plan name B Project Navigator Add a UTM To add the cvsweep UTM to the new project by copying it from the default test library C S4200 kiuser tests 1 In the project navigator double click the Capacitor device to open the device plan window 2 On the sequence tab of the device plan window use the Test Library pull down menu to select the default test library as shown in Figure 4 68 3 Double click the Capacitor folder to open it and display the available tests for that device Figure 4 69A shows the Capacitor folder opened 4 For the Capacitor folder click cvsweep to select it Figure 4 69 shows cvsweep selected 5 Click Copy to place the test in the test sequence table Figure 4 69 shows cvsweep copied into the test sequence table 6 At the bottom of the device plan window click Apply to copy the test into the project navigator Figure 4 69B shows the cvsweep UTM added to the project 7 f desired the device plan window may be closed by pressing the close X button The close X button is located on the right above t
273. eries parameter is plotted on the X axis KITE can plot multiple parameters on the X axes when the test does not define a family of curves see the Reference Manual Allow Multiple X s page 6 213 Similarly if you select a cell under Y1 or Y2 the corresponding Data Series parameter is plotted on the Y1 axis or the Y2 axis KITE can plot multiple parameters on the Y1 and Y2 axes Understanding buttons in the Graph Definition window The buttons of the Graph Definition window are used as follows Clear all Click the Clear All button to clear all selections under columns X Y1 and Y2 NOTE Ifyou click the Clear All button by mistake click the Cancel button to exit the Graph Definition window without making any changes e Axis properties A click of the axis properties button opens the axis properties window You can also open the axis properties window by selecting axis properties in the graph settings menu Before using the axis properties window refer to the Reference Manual Defining the axis properties of the graph page 6 213 Opening and using the Graph Definition window To open and use the Graph Definition window 1 Inthe Graph tab display the graph settings menu by right clicking the graph or by selecting Tools gt Graph Settings 2 Inthe graph settings menu select Define Graph The Graph Definition window opens 3 Using the Graph Definition window indicate which parameters are to be plotted and assign them to a
274. erification Since the Model 4225 PMU has measure capability a separate scope card is not necessary NOTE The PMU Flash NAND project in Section 16 of the Reference Manual uses the Model 4225 PMU to test flash memory The NVM_examples project see Table 16 17 samples the voltage and current during pulsing For more information see the NVM Application Note link on the Applications page of the 4200 Complete Reference Theory of operation Programming and erasing flash memory A floating gate transistor is a modified field effect transistor with an additional floating gate The floating gate transistor is the basic storage structure for data in non volatile memory The floating gate FG stores charge that represents data in memory see Figure 3 80 The control gate CG reads programs and erases the FG transistor The presence of charge on the gate shifts the voltage threshold Vz to a higher voltage as shown in Figure 3 81 Figure 3 80 Cross section of a floating gate transistor in both the erased and programmed states Float t Tunnel Oxide ae as Fe OOO Ss 900 M D o o o o P state Prog m state 4200 900 01 Rev H February 2013 Return to Section Topics 3 95 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 96 Figure 3 81 Graph of shifted voltage threshold V7 due to stored charge on floating gate on a 1 bit 2 level cell Programmed State Ve G The Flash
275. eriodic test intervals stress measure mode log timing only 3 70 Step E Update and save the subsite setup configuration 3 71 Configuring device stress properties 2000 cece e eee eee 3 71 Setting AC stress properties 0220s 3 73 How to perform AC stress for wafer level reliability WLR 3 75 Device Stress Properties configuration notes 0 0 0 cee eee eee 3 78 Segment Stress Measure Mode 00 e eee eee 3 81 Segment ARB stressing 00 0c eee eee 3 82 Segment Stress Measure Mode configuration 000 e eee eee eee eee 3 83 Configure stress counts 0 c cece eee eee eee 3 83 Configure Device Stress Properties 0 cece eee eee eee 3 84 Executing subsite cycling 0 0 0 e eee eee eee 3 86 Multiple subsite cycling 0 0 e eee eee eee eee 3 87 Subsite cycling data sheets 0 cece eee eee 3 87 Cycle Mode data sheet 0 ccc nee eee eee eee 3 87 Stress Measure Mode data sheet 0 0 cece eee eee 3 88 Settings WINdOW 0 ccc eee eee 3 89 S bsite cycling graphs 25st Foa sees apts hapa weeded weal Ee ae eases n a ee aces 3 91 Cycle mod mredu ara aa in arih aa a a 3 91 Stress measure mode 00 cee eee 3 92 Configuration sequence for subsite cycling 2 22002e eee eee 3 93 How to perform a flash memory test on my device 0022 eee eee 3 95 3 2 Return
276. erties for Flash testing with four SMUs and four VPU pulse channels p z Card Properties Model Keithley 7174 Low Curent Matrix Card Slot 1 Rows Columns A SMU1 Fore 1 PiniFoce 7 Pin7Fore x B SMU2Force 2 Pn2Foce 8 Pn8Foce C SMU3 Foce 3 Pin3Foce 9 Pin9Fome gt D SMU4 Fore 4 Pn4Foce 10 Pini0Foce gt E VPU Channel v 5 Pn5Foce 11 Pnt Foce x VPU1Channel2 v 6 Pin6Foce 12 Pini2Fome gt VPU2Channel1 v VPU2Channel2 v zo m Memory projects The Memory projects folder covers a variety of non volatile memory testing There are tests for floating gate memory phase change memory and ferroelectric memory There are several projects for floating gate NAND and NOR testing There are three types of flash memory projects 4200 900 01 Rev H February 2013 Return to Section Topics 3 117 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Initial Characterization e Endurance Disturb Each type of project has three different sets of defaults for common setups e NAND device direct connect e NOR device direct connect e Switch using a Keithley 707A 708A switch matrix and compatible card s This results in the nine different projects in the Projects _Memory folder as shown in Figure 3 100 Figure 3 100 Project listing Memory folder Open KITE Project File 2 Look in _Memory x O e e am A 2 My
277. es of devices for which only part of the project plan may be executed e Double clicking a project navigator component opens access to configuration screens for the component and as appropriate test results analysis tools and status information Figure 2 2 describes typical project plan components that are displayed in a project navigator using the example project plan for illustration Subsection ITMs versus UTMs on page 2 8 describes the ITM and UTM components in more detail For details about building a project plan using the project navigator refer to the Reference Manual Building modifying and deleting a Project Plan page 6 47 4200 900 01 Rev H February 2013 Return to Section Topics 2 5 Section 2 Model 4200 SCS Software Environment M Figure 2 2 Project navigator f probesubsites a E 1E KK HA JKK janl RAK wo c T InitializationSteps prober init Subsitel 4terminal n fet E prober contact E connect JE vds id 1 3terminal npn bjt fg connect J vee ic 1x E prober ss move site 4terminal n fet E prober contact fg connect J vds id 2 3terminal npn bjt fg connect JE yvoe ic 2 ME prober ss mhore TerminationSteps ll Projectview prober sejarate prober promipt Project navigator check boxes These are used to enable and disable each project node and all D 0 0 1 0 ON amp NAonNnoztzahpastaa mk
278. est For the other parameter shown in Figure 4 47 the device connects to the SMUs as shown in Figure 4 48 For details about the connect UTM refer to the Reference Manual Appendix B Using Switch Matrices Figure 4 47 First connect test Connects the device to the SMUs Name In Out Type Value 1 OpenAlll Input INT 1 lt Opens all relays 2 TermldStr Input CHAR_P SMU1 z Connects SMU1 to pin 3 of test fixture 3 Pint Input INT 3 4 TermldStr2 Input CHAR_P SMU2 Z Connects SMU2 to pin 4 of test fixture 5 Pin2 Input INT 4 6 TermldStr3 Input CHAR_P SMU3 a Lonnects SMU3 to pin 5 of test fixture 7 Pin3 Input INT 5 8 TermldStr4 Input CHAR_P _ SMU4 7 Connects SMU4 to pin 6 of test fixture 9 Pin4 Input INT 6 Figure 4 48 Signal paths for the pre and post stress tests N Channel MOSFET Drain Gate Substrate pe U QA W gt galau E F 1 2 3 4 5 6 First id vg test The id vg ITM measures the transfer characteristics of the N channel MOSFET The Ip vs Vg data points are graphed The test also calculates and graphs transconductance This is the before stress characterization test 4 32 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Second connect test This connect UTM connects the device to the PGU and the GNDU In the project navigator doub
279. estination folder selected in the Device Library 6 For example the C S4200 kiuser Devices factory default directory or another directory that was specified as the default using KCON such as C S4200 YourName Devices 4200 900 01 Rev H February 2013 Return to Section Topics 2 47 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 36 Selected device and destination folder Sequence m Device Sequence Table r Device Library Device UID Terminal 4 C 4542005kiusesDevices O H 4terminal n fet 2 Drain Bulk Source Gate capacitor B v Move Up Submit gt gt Gp _Hove up Pae oye Dow Submit As gt gt BOPA 6 Doone of the following e If you wish to submit the selected device or devices with the original name s click the Submit gt gt button in the subsite plan window The selected device or devices is submitted to the chosen folder e Stop here You have finished the device submission procedure e If you wish to submit the selected device or devices under a different name or names click the Submit As gt gt button in the subsite plan window The Submit device dialog box opens displaying the original name of the device or if you selected multiple devices displaying the original name of one of the devices See Figure 2 37 Figure 2 37 Submit device dialog box Submit device x Submit device Cancel 7 Inthe As edit bo
280. ests The FlashDisturb tests consists of the following tests e Program e SetupDC Program e Vt MaxGm Program e Erase e SetupDC Erase e Vt MaxGm Erase The six tests listed above are the same ones used for endurance testing see FlashEndurance NAND tests for details Stressing for the disturb tests are configured from the subsite setup tab for a disturb project subsite plan The default subsite setup for FlashDisturb NAND shown in Figure 3 122 uses Segment ARB waveforms defined and saved to file using Kpulse to perform log stressing that ranges from 100 000 to 1 000 000 counts The Segment ARB waveform files Flash NAND Vg ksf and Flash NAND Vd ksf used for stressing are loaded into the device stress properties window shown in Figure 3 123 The stress properties window is opened by clicking the Device Stress Properties button in Figure 3 122 4200 900 01 Rev H February 2013 Return to Section Topics 3 141 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 122 FlashDisturb NAND project subsite setup tab M Flax ativtur MaN Keithley Interactive Test rrirarment Flacsfisturbea1 THE Fie ew Project Run Took Windows Help Le gt FF Hee PT eS E Sita E nen Sealann eal EEE Nahit AAD s a x FE Ferhlireb Erste nee FE Flatrohwe Sserblownre bode Sagrert Gbon Mermeliode Dychs Mode EAR ieir Shen Meomas pce Trsa Cyder BHO CPi i
281. ests subdirectory 00 0 ee 2 30 Overviewing KITE Defining a UTM oaeee 2 11 Defining an ITM onssas 2 10 KITE interface ranson 2 3 Project Navigator cceeeeeee 2 5 Submitting devices ITMs and UTMs to libraries Submitting devices to a library 2 46 Submitting tests to a library 2 49 Understanding KITE Project components s s s 2 7 Devices Sites va SUDSILES sccrmsoniserrcimasmeumsicacainneraty 2 7 TESIS ites pienaari Taa Erei 2 7 Project defined ccccceeeeceeeereeeees 2 6 Keithley Model 590 CV Analyzer DUT connections 4 38 Keyboard connections ccceseeeeeeeeeeeeeeeeees 1 8 KITE Keithley Interactive Test Environment 4200 900 01 Rev H February 2013 Index Configuring the Project ITMs Connections matching physical and virtual 2 18 Forcing functions configuring for each device terminal 2 18 KITE interface overview ou eee eee eereeeeees 2 4 KITE ITM configuration ccccceeeseeeeeseees 3 12 KITE Library management KITE project folders 2 30 KITE project structure cccccceceeeeeeeeeeeneeeeeeee 2 3 KPulse Custom File Arb waveforms Full Arb 5 8 Segment ARB waveforms n se 5 6 Setupiand help scsveast tions cienenesceuciesas 5 3 Standard Pulse waveforms Starting KPulse oe Triggering 5 3 Waveform types ssssssseessieessiessrssnsrressrrn 5 12 LAN Connecti
282. ests subdirectory contains the KITE test library that is provided with each version of KTE Interactive Also by default you can access this test library when operating KITE You can copy tests from this library to their projects or submit tests from projects to this library NOTE For more information about submitting tests to libraries refer to the Reference Manual Submitting devices ITMs and UTMs to libraries page 6 151 This test library is comprised of tests that are stored in folders organized by device category To create a new test category create a new folder in the C S4200 kiuser Tests directory 3 To provide project access to additional test libraries in other directories or to change the KITE test library that appears by default use the KITE Options window 1 Select Options in the Tools menu 3 The c S4200 kiuser Tests is the factory default Tests directory You can create a new folder in another Tests directory such as C S4200 YourName Tests 2 30 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment 2 On the Directories tab of the KITE Options window that appears choose Test Libraries in the Show Directories for Combo box See Figure 2 20 Figure 2 20 Test library access selection Kite Options x Workspace Directories Show directories for ES Met Tes irectories Di C 4542005kiuser T ests Can
283. ete Pulsel Complete Keithley Interac J File View Project Run Tools Window Interactive Test Module Vdsid xi e ee ee M PulselY Complete MI InitializationSteps VE utocalScope ME PulselCal MFE subsite ME 4terminal n fet MJE Vds id ME vds id pulse ME vds id pulse vs de Ww vgs id M vgs id pulse M vgs id pulse vs dc MJE vds id selfheating MIE vds id noselfheating ME scope shot Running AutocalScope AutocalScope should be run before any pulse calibration is performed For best Pulse IV results the AutocalScope should also be run before the first experiments of the day To run AutocalScope 1 The Model 4200 SCS should be turned on at least 30 minutes before performing any calibration or measurements 2 Double click AutocalScope in the project navigator Figure 3 36 Click the green Run button 4 Follow the instructions given in the pop up dialog box and disconnect all connections to the scope card 5 The scope performs an autocal that takes about one minute 6 The test is complete when the Run button turns green In the Sheet tab autoCalStatus 0 means that there were no errors 7 Reconnect the cables to the scope card Use care when installing the cable to the scope card trigger SMB connector a Running PulselVCal Verify proper setup by running a scope shot For on wafer testing have a through or short structure available or ensure that sharing a pad for both the gate an
284. eturn to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 16 Device library access selection Kite Options xi Workspace Directories Show directories for iSFejte aMiale utss Directories C S4200 kiuser Devices Cancel NOTE For more information about Device Library access selection refer to the Reference Manual Customizing directory options page 6 342 Each device stored in a Device Library contains the following three types of files A Keithley device kdv file that follows the Microsoft Windows ini file format A small bitmap 16 x 16 dpi bmp file for the device icon that is displayed in the project navigator A large bitmap 120x100 dpi bmp file for the device graphic that is displayed on the definition tab of each ITM that tests the device 4200 900 01 Rev H February 2013 Return to Section Topics 2 27 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 17 shows the files in the Mos fet Device Library folder Note that a kdv file and two bitmap files are listed for each device Figure 2 17 Device files I Exploring C S4200 kiuser Devices MOSFET File Edit View Go Favorites Tools Help Ea re oo lf fee Back Forward Up Cut Copy Paste U
285. ety Interlock To the N Channel 4200 SCS alicia Orato 236 ILC 3 Cable Wafer Subsite Probe Station KCON setup For this tutorial a Hewlett Packard Model 8110A 81110A pulse generator Keithley Instruments Model 707A Switching Matrix Keithley Instruments Model 7174A Low Current Matrix Card and a test fixture must be added to the system configuration KCON is used to add external equipment to the test system Follow the steps below to add these components to the system configuration Detailed information about KCON can be found in the Reference Manual Keithley CONfiguration Utility KCON page 7 1 To setup KCON Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS 1 Start KCON Double click the KCON icon or use the Start menu Start gt Programs gt Keithley gt KCON 2 Add the Hewlett Packard Model 8110A 81110A Pulse Generator to the system configuration using the KCON Tools menu as illustrated in Figure 4 39 Figure 4 39 Adding a pulse generator Add External Instrument Switch Matrix gt Capacitance Meter Validate Configurati Cirle Pulse Generator Hewlett Packard 8110 Pulse Generator Single Channel Beit eth area ik i Probe Station Hewlett Packard 8110 Pulse Generator Dual Channel Formulator Constants Ctrl F Test Fixture Hewlett Packard 81110 Pulse Generator Single Channel
286. ev H February 2013 Model 4200 SCS User s Manual Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 91 Disturb testing configuration to test a single device a L Pulse this cell Measure one or i more cells j An Pulse waveforms for NVM testing A pulse card has several attributes that support NVM testing To perform the multi level pulse waveforms for the typical program erase waveform see Figure 3 88 each pulse card channel has the Segment ARB capability For more information about Segment ARB waveforms refer to the Segment ARB waveforms The ability to disconnect or float a particular device pin within the Segment ARB waveform requires an inline solid state relay This solid state relay is called the high endurance output relay HEOR The pulse card output channels each have 50 O output impedance When current flows through the pulse channel there is a voltage drop across this 50 Q resistor internal to the pulse card This dictates that the voltage at the output may be different from what is expected based on the resistance of the DUT This effect is called the Load Line Effect and is covered in more detail in Reference Manual DUT resistance determines pulse voltage across DUT page 11 11 e The gate of a flash or NVM device is high impedance The voltage at the gate will be double of the programmed voltage e The voltage at the drain will be a function
287. everts to the last saved configuration Saves the system configuration as an HTML file that can be viewed in a web browser If you first select KI System Con figuration in the configuration navigator this menu item generates a web page that displays general Model 4200 SCS system information Keithley CONfiguration utility File Tools Help Save Configuration Ctrl S Save Configuration as Web Page Ctrl w Print Configuration Ctrl P Exit Closes the KCON program If you revised but did not save the configuration KCON reminds you Prints the general system configuration information the information that displays in the KCON workspace when KI System Configuration is selected in the configuration navigator Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 5 KCON Utility Tools menu Adds a supported external instrument that is selected by category in the first submenu and where applicable by model number in the second submenu External instruments are controlled by KITE User Test Modules UTMs UTMs are in turn connected to KULT user modules libraries that are included with the Model 4200 SCS Switch Matrix gt z z Delete enemnalnstament S A RE ise Generator gt Keithley 595 Quasistatic CV Meter File Tools Help Mareea cii Probe Station System 82 Simultaneous CY Formul
288. example trigger output from the Model 4205 PG2 is used to trigger measurements In the auto mode triggering is provided automatically by the scope in the absence of a trigger event For normal triggering trigger initiation can be provided by internal and external sources The scope can be set to be triggered by a leading edge or falling edge trigger from the Model 4205 PG2 For more information about trigger and arm controls refer to the Model 4200 SCS Complete Reference ZTEC User s Manual Sweep offset reference The offset reference determines when sampling occurs in relationship to the trigger event Offset reference can be set from 0 0 0 to 1 0 100 For the following examples assume the record size sweep points is 100 samples e Post trigger sampling With offset reference set to 0 0 0 sampling of all 100 sweep points will occur after the trigger event e Pre trigger sampling With offset reference set to 1 0 100 sampling of all 100 sweep points will occur before the trigger event e Pre trigger and post trigger sampling With offset reference set to 0 5 50 50 samples will be acquired before the trigger event and 50 samples will be acquired after the trigger A sweep offset time can also be used to affect when sampling occurs Sweep offset time The sweep offset time is the time period between the trigger event and the sweep offset reference Offset time can be set from 0 to 665 seconds For the following exa
289. expanded default project folder shows the pre defined project file structure 4200 900 01 Rev H February 2013 Return to Section Topics 2 29 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 19 KITE project folders File Edit View Favorites Tools Help Q sxx Q x P Search fp Folders A B Folder Sync Address je C 454200 kiuser projects default me Go Folders Bas 54200 G dences ia sini kuser S Devices w default kPulse foal tests 1 Microsoft Office Word 97 20 S projects k E BNT e default default kpr mos WE Rich Text Format KPR Sia a Ae 26 1 KB te DB _Demo gt D _Memory default rtF i default kpr _Miscellaneous i l File k FR File E Nanotech POE ern D oO amp Pulse Reliability E O Resistivity E _Solar 26 devices E O subsites tests data test results are stored E O Tests S O usrlib here amp M svs The default project For each project test results files x1s worksheet and kgs graph are stored in a project specific data folder as illustrated in Figure 2 19 NOTE Refer to the Reference Manual Test data page 6 29 for more information about results files and KITE file naming conventions Projects can be moved from one location to another as long as the entire project folder with all of its contents are relocated Tests subdirectory By default the T
290. for test similar to Figure 3 91 that is used for disturb testing It is strongly recommended to use a switch matrix for testing array test structures whether for endurance or disturb However it is possible to perform a limited test of an array structure without using a switch matrix as one example is shown in Figure 3 96 Figure 3 96 shows connection to an array test structure where one of the four SMU PG2 channels was split to provide a total of five test signals to provide the minimum necessary 3 110 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests channels for the select pins Bit Line Select Bit Lines 1 and 2 to the pulse DUT circled in blue and the measure DUTs circled in dashed purple Figure 3 96 allows for pulsing one DUT while performing disturb measurements on the three DUTs labeled Measure The preferred connection method for disturb testing or any testing of a an array DUT is to add a switch matrix as shown in Figure 3 97 Figure 3 96 Flash direct DUT connections Disturb testing ee 78 2 m Triax BL1 Bit Lines SMU only Bit Line Select Pulse this 4200 SMU 4210 SMU Force Word Lines z Measure 5 1 5m BNC i 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force Trigger OUT Trigger IN Chan 1
291. further details on configuring KITE behavior Return to Section Topics 3 11 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 9 KITE options workspace settings Kite Options x Workspace Directories Graph Defaults Custom GPIB Abort Options Workspace Settings Default Project c s4200 kiuser Projects D efault Environment Preferences Display status bar Load default project C Display clock on status bar C Show UID in project tree C Reset GPIB devices at startup C Enable Over Voltage Protection Control Execution Preferences Changes here will NOT affect tests already running Continue execution on error Override interlock for voltages less than 20V C Auto scroll ITM data sheet during execution Reinitialize hardware when execution completes How to perform a C V test on my device KITE ITM configuration KITE is the graphical user interface used to configure and run interactive test modules ITMs The workspace for KITE includes tabs for ITM configuration Definition tab and tabs for evaluating test results Sheet Graph and Status tabs The following information explains how to configure an ITM that uses the Model 4200 CVU The ITMs provided by Keithley Instruments are documented in Reference manual C V project plans page 15 27 NOTE Details about KITE ITMs are provided in Reference Manual Keithley Interactive Test Environment KITE pa
292. g or specify a voltage value for a fixed range Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 These ranges are Vpp For example the 0 5 range covers 250 to 250 mV DrainScpRange double The voltage measure range for the scope channel measuring the Drain Use 0 for scope autoranging or specify a voltage value for a fixed range where V 50 Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 These ranges are Vpp For example the 0 5 range covers 250 to 250 mV Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Table 3 16 continued Inputs for Vgid_DC_Pulse_pulseiv Section 3 Common Device Characterization Tests Input Type Description GateSMURange int The current measurement range to be used for the SMU on the DUT Gate terminal Values correspond to the table below Limited Auto means that the value given is the minimum measurement range used with automatic ranging for larger currents Full Auto Limited Auto 10 pA Limited Auto 100 pA Limited Auto 1 nA Limited Auto 10 nA Limited Auto 100 nA Limited Auto 1 pA Limited Auto 10 pA Limited Auto 100 pA 10 Limited Auto 1 mA 11 Limited Auto 10 mA 12 Limited Auto 100 mA OOAONDARWNDH DrainSMURange int The current measurement range to be used for the SMU on the DUT Drain terminal Values correspond to the table below Limited Auto means that the value given is
293. g the Run Test Plan and Cycle Subsites button see Figure 3 72 e If the Cycle Mode is selected for subsite cycling all cycles of the Subsite Plan will run e If using the Stress Measure Mode is being used and there are enabled Targets the Subsite Plan will terminate when all enabled Targets are reached e Otherwise all cycles of the Subsite Plan will run 3 86 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 72 Starting subsite cycling Click Run Test Plan and Cycle Subsites button to start subsite cycling Multiple subsite cycling If two or more subsites are configured for subsite cycling they can all be run consecutively When the first subsite is finished cycling the next subsite will start automatically Multiple subsite cycling is started from the project level rather than the subsite level In the project navigator select and enable the Project and then start cycling as shown in Figure 3 72 Subsite cycling data sheets Spreadsheet Data for the Subsite Plan is acquired in the Subsite Data sheet With the Subsite Plan opened in the workspace the data sheet is displayed by clicking the Subsite Data tab Cycle Mode data sheet Figure 3 73 shows an example data sheet for a Subsite Plan that has one device Column A lists the cycles that were run For the example in Figure 3 73 four cycles were run Columns B C D and E l
294. g the graph settings menu Right click on certain graph components When certain graph components are already displayed you can open context appropriate edit windows by right clicking the components Applicable graph components include titles legends comments numerical coordinates and values displayed through the data variables menu item Opening the graph settings menu Open the graph settings menu by either of the following methods Menu access method lI Right click in any blank portion of the Graph tab any place except on a Graph tab component The Graph Settings menu appears as a pop up menu See Figure 2 30 2 40 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 30 Graph settings menu The menu showing Graph Properties The menu submenu Define Graph Define Graph Auto Scale Auto Scale Axis Properties Axis Properties Cursors Cursors Line Fits Line Fits Zoom In Zoom In Zoom Wut Zoom Wut Comment Comment Data Variables Data Variables Legend Legend Test Conditions Test Conditions Title Title Graph Properties gt Graph Properties Comment Crosshair Crosshair PANE Save As Save As rene 4 nee Synchronize Graphs Synchronize Graphs segent ji Series Move Move Test Conditions Reset Reset Title Resize Resize Menu access method II In the tools me
295. g the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and opera
296. ge 6 1 The KITE ITM information provided here is supplemental and pertains specifically to the Model 4200 CVU to configure ITMs Definition tab Terminal settings In the project navigator double click an ITM to open the Definition tab Figure 3 10 shows an example of a typical definition tab for a two terminal device When terminal A is set for CVH1 terminal B will be set for CVL1 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 10 Definition tab for an ITM Section 3 Common Device Characterization Tests Definition Sheet Graph Status Formulator Timing Exit Conditions Output Values Speed Normal Mode ITM Timing window Opens Forcing Functions Measure Options window y P Drop down menu for terminal A FORCE Sweep Y Master PreSoak OV Start 5V Stop 5 Step 0 27 Points 51 ACY 30m RMS ter ITM timing Measure Cp Gp Range Auto The ITM Timing window see Figure 3 11 is used to set measurement speed and the test mode The ITM Timing window is opened by clicking the Timing button located at the top of the definition tab see Figure 3 10 Figure 3 11 ITM timing A Sweeping Mode selected ITM Timing Speed C Fast Delay Factor 1 Normal Filter Factor 1 C Quiet rite A D Aperture Time Auto PLCs Sweeping Mode Sweep Delay 1 s v Hold Time 2 B k d ga NOTE Remove all S
297. gure 3 61 is opened by clicking the VPU Common Settings button at the top of Device Stress Properties window The pulse low values for channel 1 and channel 2 are set from this window Rise time fall time frequency and the impedance of the load are also set from this window 4200 900 01 Rev H February 2013 Return to Section Topics 3 73 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual These settings apply to both channels of the VPU NOTE Ifa switch matrix is used please refer to How to perform AC stress for wafer level reliability WLR on page 3 75 for recommended VPU parameter settings NOTE The bandwidth of the interconnect including any switch matrix will determine the fastest rise fall transition transmitted with minimal over or under shoot The impedance of the device terminal affects both the stress and low level voltages An oscilloscope may be used to ensure that the rise fall times and voltage levels match the desired test parameters Figure 3 60 AC stress properties settings Device Stress Properties Subsite subsite Device 4terminal n fet Site 1 1 Stress CONDENS oon eae Se Drain Stress 1 v Source Stress 0 v Drain Limit 0 1 A Source Limit 0 1 A Gate Stress 1 v Bulk Stress 0 v Gate Duty Cyde 50 Bulk Limit 0 1 A Device Pin SMU Connections Stress Measurements Drain Pin ji ie 3 I Drain Stress Do Not Measure v f Gatepin 2
298. h above 1GHz might oscillate when using a DC probe connection scheme and the PRB C cables RF Prober Interconnect If the device has an RF layout G S G the Y adapter cables and DC probe manipulators will most likely be insufficient In the case of RF G S G pad layout do not use the Model 4200 PRB C Y cables use the shorter SMA cables 6in 15cm supplied with the PIV A package to connect directly from the RBTs to the RF manipulators The RBT with the power divider is connected to the Gate For additional information see the documentation included with the Model 4200 PRB C PA 928 3 32 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests PIV A interconnect assembly procedure 1 Using the Supplied interconnect parts on page 3 28 and Supplied tools on page 3 29 refer to Figure 3 25 Figure 3 26 and Figure 3 27 to configure the test setup for PIV testing Use the supplied torque wrench for the SMA connections on the RBTs power divider and manipulators Use care when installing the cable to the scope card trigger SMB connector 2 Perform one of the following procedures to connect the test system to the DUT For DC structures prepare the probe connection by disconnecting all DC cables from the SSMC connectors on the needle holders Continue setup of PIV A by connecting a PRB C cable to the 15cm 6in SMA cable attached to each RBT Refer to Figure 3 32
299. h tab Cy l Mode wetsxezcsitesewseracedsaaencnbonemsieaieeeeannas Stress Measure Mode Subsite Plan Subsite Plan containing the Device Plan to be SUDMITEM sisiciseseisricecmanranienapnimmanerancnbawne 2 46 Subsite Plan window containing the Device Plan to be SUDMINC somrer aE aa 2 47 Subsite Settings window Cycle Mode scipssasresnae nn 3 90 Stress Measure Mode c cece 3 91 Subsite Setup tab ccmcivisicrssncemminovantaansrsdndeiaees 3 67 S pplied aspris 3 29 Supplied interconnect parts 3 28 Supported external equipment table wi 4 4 Supported Probers seas shedindedcisdcctasdacedieauetsenends 4 17 Sweep mode triggering cc ccceceeeeeeeeeeeee 1 35 System configuration for the probesubsites project 4 18 System configuration with external instruments 4 3 System Connections cccccceeeeeeeeeeteeeteeteeees 1 7 System connections Connecting a LAN cccceeeeeeeeeeeeeeeeee Connecting a printer Connecting a prober 4 Connecting GPIB instruments 0 1 8 Connecting the keyboard and mouse optional 1 7 Target applications and test projects for PIV Q 3 27 TDDB time dependent dielectric breakdown 3 75 TEStCONCIIONS scaancuenicwsustienelmuaacaeanscinnd 3 16 TOSHASTINITION asidscasiunirarersnrachareineniotentannaemanacarsanbe 1 45 Test library ACCESS selection ccc cceceesteeeeeeeeee
300. h tab when the ITM executes asuring Options Current v Voltage l Status Name Source Programmed C Measured Select dynamically opti If you select Limited Programmed specifies If desired enter a mized range Auto Auto specify the limit logging of as configured preferred data label dynamically optimized here data values for example for the voltage in range above a specified calculated from Start lieu of the default lower limit Limited Stop Step Measured label Auto the one best range specifies logging of as for entire sweep Best Fixed or manually speci fied numerical range measured data values Sif sweeping stepping voltages If sweeping stepping currents replaced with programmed and measured buttons as in right panel If sweeping stepping voltages If sweeping stepping currents buttons replaced with range settings similar to those in left panel 2 Referring to the setting explanations in Figure 2 9 2 10 2 11 and 2 12 above configure the following types of parameters for the device terminal s forcing function as appropriate e Linear or log for a sweep type forcing function Dual sweep sweep from start to stop and then sweep from stop to start The current or voltage value s to be forced Level for a static forcing function Start stop and step for a step or linear sweep forcing function Start stop and data points for a log sweep forcing functio
301. hat degrades measurement quality The Keithley Instruments Low Level Measurements Handbook provides an in depth discussion about guarding and other techniques that are useful for building quality test fixtures Contact a Keithley Instruments sales or service office to obtain a copy Figure 1 33 Typical test fixture Test Fixture HI SMU1 Guard Common HI SMU2 Guard Common Interlock Connect to safety earth ground using 18 AWG wire or larger NOTE The Model 4200 SCS will function on all current ranges and up to 20 V without the interlock being asserted The maximum voltage on the SMU and preamp terminals is not hazardous when the interlock is not asserted Testing with more than 20 V If voltages greater than 20 V are required for testing follow these steps e Ensure that hazardous voltages are not present when the fixture s exterior enclosure is open 4200 900 01 Rev H February 2013 Return to Section Topics 1 41 Section 1 Getting Started Model 4200 SCS User s Manual NOTE The Model 4200 SCS voltage output will be higher when the fixture s exterior enclosure is closed e Add an interlock switch to the fixture e Connect the exterior enclosure to COMMON or safety ground using 18AWG wire or greater e Ensure that the wiring FORCE GUARD and SENSE within the fixture does not contact the exterior enclosure For more details about the Model 4200 SCS interlock system see the Reference Manual Contr
302. he device plan window Figure 4 68 Default test library folders Test Library C S4200 kiuser T ests 4 42 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 69 Add the cvsweep UTM Sequence m Test Sequence Table m Test Library Test Name UID 4 C S4200 kiuser T ests cyswee 1 cap Capacitor cable compensate omeas connect ctsweep cvpulsesweep Ho DMiMtgt dislay cap file ME iv cap E save capttile Diode General MOSFET Sumit lt lt Copy SubmitAs lt lt Copy As 85 subsite 0 bretaee Data I7 1 eee 46 capacitor 1 E cvsweep 1 Baa capacitor A Window to specify the test module name B Project navigator Modifying the cvsweep UTM The default cvsweep parameters will sweep the voltage from 4 V to 6 V If these parameters are acceptable proceed to Executing the test on page 4 44 To modify the parameters 1 Inthe project navigator double click the cvsweep UTM to open it The window in Figure 4 70 will be displayed Figure 4 70 cvsweep UTM Definition Sheet Graph Status User Libraries KI590ulib e User Modules CvSweep590 bd Name In Out InstldStr Input InputPin Input OutPin Input OffsetCorrect Input Waveform Input FirstBias Input LastBias In
303. he test sequence for the Segment Stress Measure Mode is the same as the test sequence for the basic Stress measure mode described later in this section NOTE Output Values are imported into this target list from the ITM UTMs in the device plan see the Reference manual ITM Output Values page 6 144 and UTM Output Values page 6 157 8 Next Device and Prev Device buttons For a multi device Subsite Plan click Next Device to display the stress properties window for the next device and repeat steps 1 through 7 e Clicking Prev Device selects the previous device lf there is only one device in the plan these buttons will be inactive 9 Editing buttons Select the Clear Copy Paste and Paste to All Sites buttons to perform editing operations for managing entries see Clear copy paste and paste to all sites on page 3 80 10 OK button e Click when finished setting the stress properties for all devices and all sites 11 In the Subsite Plan tab see Figure 3 69 click the Apply button to apply and save the settings made in the Device Stress Properties window CAUTION After setting the device stress properties for all devices and sites steps 11 of the above procedure must be performed in order to apply and save the new settings Failure to do so will cause the new settings to be lost Executing subsite cycling With the Subsite Plan in the project navigator selected and enabled subsite cycling is started by clickin
304. hley CONfiguration Utility KCON page 7 1 To add the Model 590 to the system configuration using KCON 1 Start KCON Double click the KCON icon or use the Start menu Start gt Programs gt Keithley gt KCON 2 Add the Keithley Instruments Model 590 CV Analyzer to the system configuration using the KCON Tools menu as illustrated in Figure 4 59 Figure 4 59 Adding a Keithley 590 CV Analyzer to the system configuration FEN Add External Instrument Switch Matrix gt Keithley 590 CY Analyzer Pulse Generator gt Hewlett Packard 4284 LCR Meter Probe Station Formulator Constants Ctrl F Test Fixture 1 General Purpose Test Instrument gt 3 Set the GPIB address for the Model 590 by selecting the KI 590 CV Analyzer CMTR1 in the configuration navigator and entering the appropriate GPIB address on the Properties amp Connections tab This is illustrated in Figure 4 60 4 38 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 60 Setting the Model 590 GPIB address Keithley CONfiguration utility File Tools Help ao KI System Configuration E KI 4200 SCS Properties amp Connections F KI 4200 MPSMU SMUT Instrument Properties KI 4200 PreAmp Model Keithley 590 CV Analyzer KI 4200 MPSMU SMU2 GPIB Address 75 7 KI 4200 Pre mp EE AE f
305. hs e PostPulseDelays This rule must be followed for any Program Erase or Fast Program Erase UTM Ensure that all time based pulse parameters are not zero The minimum time interval is 20 ns 20 E 9 This applies to the parameters e PrePulseDelays e TransitionTimes e PulseWidths e PostPulseDelays This rule must be followed for any Program Erase or Fast Program Erase UTM Ensure that all pulse channel waveforms have the same total time or period a To check for a single pulse Program or Erase UTM add up the following for each channel e PrePulseDelays e TransitionsTimes e PulseWidths 4200 900 01 Rev H February 2013 Return to Section Topics 3 145 Section 3 Common Device Characterization Tests e PostPulseDelays All channels should have the same total If they do not have the same total time make them the same by modifying the timing b To check for a double pulse Fast Program Erase UTM add up the following for each channel e PrePulse1Delays e TransitionsTimesPulse1 e Pulse1Widths e PostPulse1 Delays e PrePulse2Delays e TransitionsTimesPulse2 e Pulse2Widths e PostPulse2Delays All channels should have the same total If they do not have the same total time make them the same by modifying the timing Voltage levels do not match expected values If the voltage at the DUT terminal is not the expected level please check the following 1 The pulse channel is a 50 Q output and expects a 50 Q DUT terminal imped
306. ical linear curve fit to find the threshold voltage of a 4 terminal n MOSFET and plots drain current vs gate voltage subvt This test runs an l V sweep and calculates the sub threshold voltage of a 4 terminal n MOSFET and plots drain current vs gate voltage vgs id This test runs an l V sweep on the gate and calculates the threshold voltage using the Max GM method Ig vg This test runs a linear l V sweep on the gate plots gate voltage vs gate current and calculates the gate leakage current using formulator functions and a linear line fit 4200 900 01 Rev H February 2013 Return to Section Topics 3 5 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Three terminal NPN BJT tests The following tests require three SMUs see Figure 3 3 Figure 3 3 Three terminal NPN BJT tests Definition Sheet Graph Status Test Notes Timing Exit Conditions Output Values Speed Noma ie Mode z Collector Smu FORCE MEASURE Sweep Master Measure YES Type Linear Ltd amp uto 1e 0104 Start OV Measure Y YES Stop ZV Range V Best Fixed Step 0 05Y Compl 0 14 Paints 41 Base SMU2 FORCE MEASURE Step Master Measure YES Start 16 0064 Range Best Fixed Stop 1e 0054 Measure Y NO Step 2e 0064 Compl 20 Paints 5 Emitter SMU3 FORCE MEASURE Bias Y OV Measure YES Ltd4uto 1e 0704 Measure Y NO Compl 0 14
307. icon on the Windows desktop NOTE If KCONis running you cannot start KITE or KXCI If KITE or KXCI is already running you can start KCON in read only mode and cannot save any system configuration changes that you make If you select KI System Configuration in the KCON configuration navigator the Workspace displays a summary of the entire system configuration If you select KI Model 4200 SCS in the configuration navigator the workspace displays abbreviated system properties and SMU slot assignments and allows you to perform the following e Specify the correct power line frequency 60 Hz or 50 Hz for your installation e Configure the system for remote control using KXCI e Specify a particular user library to be the active user library or the active user library will default to C S4200 kiuser usrlib 4200 900 01 Rev H February 2013 Return to Section Topics 4 5 Section 4 How to Control Other Instruments with the Model 4200 SCS Internal instruments Factory installed SMUs preamps 4200 PG2 4200 SCP2 and ground unit External Instruments User installed switch matrix capacitance meters pulse generators probe station test fixture and general purpose test instruments Model 4200 SCS User s Manual Figure 4 3 Keithley CONfiguration Utility Overview Keithley CONfiguration utility File Tools Help ao KI System Configuration Properties amp Connections Gq KI 420
308. igure 1 7 LAN connections Model 4200 SCS 8 ee Ro HO 3 ee i ea i O 3 a ae REO O35 ORS jones Seen ee FSR KED HOD HE state Hee pene FE oe HOS E ean aa ie A O D Bet ie ate o a see se oe sae ates S Sa es Oy CORO a aes C C C C Or OF Oe re eee ieee neers te vate vote z ieee ae HC C O C O C Di F F HC EO O O Cy C a m8 C n a oes ne ee i fees OF Or C i O O O ne hae EEO RRS a a ace ace eps Op sts ease aneta ORE CO C k OR OF asters ae OF ee P a O a C ae OER eee es oe CP CP C C Le E e HOO P g EDF Reo Alle es Ie C esea jee a Z a te o ae oe gla 8 og 7 g oO C C 9 b C Lel 9 s CP a C oO Oy a go go PE O 3 G AE EERS Ae 1 CEE O at gt E gt O 7 E LAN Connectors CAT 5 UTP Cable LAN Junction Box or Hub Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Model 4200 SCS Hardware Overview Front panel Instrument panels All operator interfaces are on the front panel of the Model 4200 SCS and all connection interfaces are on the rear panel The next two topics describe the f
309. igure 3 95 Figure 3 96 and Figure 3 97 Figure 3 95 shows the connections for test configuration shown in Figure 3 85 and Figure 3 89 that is used for both initial program erase investigation and endurance testing of a direct connect DUT This configuration does not require a switch matrix and provides four channels of pulse and well as four SMUs to permit full characterization of single non array NVM DUT 4200 900 01 Rev H February 2013 Return to Section Topics 3 109 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 95 Flash connections program erase and endurance testing using direct connection to a single stand alone 4 terminal device 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force Trigger OUT Trigger IN Chan 1 Chan 2 Trigger OUT Trigger IN Chan 1 Chan 2 4205 PG2 1 4205 PG2 2 DUT Connections Adapters Note All interconnect on ew Gate instrument chassis are white SMA Tee male female male SMA cables Cables from the igi Drain instrument to device are BNC lt Source LEMO Triax to SMA Adapter coax Use Triax to BNC Bulk O SMA male to BNC female adapters if necessary to connect to probe manipulators Instrument Connectors E Triax female to BNC female EE LEMO Triax Connector J SMA Connector Figure 3 96 shows the connections
310. iles cannot be imported back into Kpulse and are saved in the path C S4200 kiuser KPulse Sarbfiles by default 7 These waveforms will be chosen in the Subsite Setup Device Stress Properties window used in the FlashEndurance projects as well as FlashDisturb For example the waveforms are chosen by clicking the browse button on the Device Stress Properties in Figure 3 114 The use of these projects is described below 3 104 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 92 Kpulse Segment ARB pulse card settings ft Keithley Internal Pulse Interface C s4200 kiuser KPulse Setup Kpulse_Flash_Example_01 kps File Tools Help WME Arb Generator Waveform Type Trigger Source Output Mode General Settings Pulse Software Continuous Mode Segment rb Burst Mode A Custom File Arb Trigger Out Polarity Positive y Reset All Channel 1 Settings Channel 2 Settings Source Range 20 Current Limit A 0 4 Source Range 20V v Current Limit A 9 4 Pulse Load Pulse Count Pulse Load 50 Pulse Count Start oe V Time s Trig 1 0 SSR 1 0 Start V Stop V Time e Trig 1 0 SSR 1 0 l 2 00E 7 1 D D 1 1 1 5 00E 3 0 0 0 5 ae 0 1 2 00E 7 0 0 0 2 00E 7 0 1 1 00E 2 in im m 14 00F 3_ iat 4 Be Sarb aly Cc Saad Gases Rune Flash_Exam Sarb from C s4200 kiuser KPulse Setup Kpulse_Flash_Exam 0 t
311. in Source W Gate Table 2 3 describes each line of the new mosfet kdv file that appears in Figure 2 18 Table 2 3 Line item descriptions for a kdv file Line item example Description Bitmaps Location of bitmap file information Small new mosfet bmp Name of file to use when displaying the device in the KITE project navigator Big new mosfet big bmp Name of file to use when displaying the device on a KITE ITM definition tab Terminals Location of terminal label information Number 3 Number of device terminals 8 maximum Orientation N Drain S Source W Geographic or screen location and name of each device Gate terminal Valid locations are as follows e N North or top e NE Northeast or upper right East or right e SE Southeast or lower right e S South or bottom e SW Southwest or lower left W West or left NW Northwest or upper left Projects subdirectory The Projects subdirectory contains the default KITE project library that is provided with each version of KTE Interactive By default you can store KITE projects in this directory However KITE projects can be stored in any location using the KITE File gt Save Project As menu Projects are comprised of multiple files stored in a predefined directory structure All of the project components are stored in a project folder Figure 2 19 shows the folders of KITE projects that are included with KTE Interactive The
312. in current at each sweep step The default Definition tab for this test is shown in Figure 3 118 SMU3 is configured to perform a 101 point sweep from 0 to 5 V in 50 mV steps SMU1 is configured to DC bias the drain at 0 5 V and measure current at each step of the sweep The results of the test are shown in the Graph tab see Figure 3 119 The Vt MaxGm tests may be replaced with another Vt or DC test Or additional DC tests may be added after this test Figure 3 118 FlashEndurance plaas project Vt MaxGm Program Definition tab mer ME Fe Hew Project an Took Window Help g eee o xs o Dar en shoe Goh sne ssf adurarce NAND K thimy Interactive Test Environment P Max Programita aE earce ND a i AE FlechErchrerce Famdacr Tang E dCeedinrr Dues ites some due Node AE Fate PA Progen Bian _ Bw Pid AMatinPooe ev ee E 7 aset YES Liso 100 MasaseV NO Coret 0 Vi Maser eer oa fia E Ba fexov s FAE NESS URE FORCE MECELAE Frew Vili on CRD taa Piteeiast S Tae Leow Mowesen V rae Set OY no ben ie Sta W Sew Poras 21 ME Ger nn isin 4200 900 01 Rev H February 2013 Return to Section Topics 3 135 Section 3 Common Device Characterization Tests 3 136 Figure 3 119 FlashEndurance NAND Model 4200 SCS User s Manual M Flash Feducance HiM Keethiry Intercartive Test Erevironment T Max Pragramiiai ME Fie aw Profect Run Taiu
313. inal n fet device The three traces are for Output Values IDOFF IDLIN and IDSAT 3 92 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 78 Subsite Graph tab Stress Measure Mode Sequence Subsite Setup Subsite Data Subsite Graph 4terminal n fet Id 1 KEITHLEY OPED pitty es eee eee heeded boas ee Ei oan d bana aaa ewan 8 LGEHO 0000 eee eee eed EAEE apnoea Fea pele bv sie ANE Sees ogee eee Mm TiGEHO Posse ee eee eee epee EEE ewe per ee etree ree Ee apt erer eae bee dongs eee t i NOTE N EE E e a oe For a single device ii E cpl EES AET subsite plan the A ii Device select buttons E 1 0E 07 ets Sae EEr TT spo i and the checkbox to B soost Ee cnt ane we DUNGI Overlay All Devices IDSAT y1 iaioe P APEE en svt a AA PEE ee are disabled For a single test 400 0E 3 wee cee eee eeeesese op cece mec rccrercecen subsite plan the Test a Ea once cece eed e E EE AEE ETTEN select buttons are dco disabled 0 0E 0 50 0E 3 100 0E 3 150 0E 3 200 0E 3 Time s Device Test 1 Use to select 4terminal n fet Id 1 device Overlay All Devices 2 Use to select test Select check to display all the graph traces for all devices that were measured by the selected Test Configuration sequence for subsite cycling There are
314. indicating that there were no errors No measurements are taken in this test so there is no data to graph 12 If double_pulse_flash is non zero pulses are not being output or there are error messages in the Project Messages pane see Troubleshooting section Running the SetupDC UTM This UTM disconnects the PG2 channels by opening solid state relays This is necessary when using the direct connect method see Figure 3 95 and Figure 3 96 to ensure that a subsequent SMU test is only connected to the DUT terminals 1 Enter the number of shared terminals into SharedPulseTerminals Sharing means that a single cable provides either a pulse or a SMU signal to a DUT terminal 2 Enter the Pulse channel IDs for the VPU channels sharing a cable with a SMU into SharedPulseTerminals For the configuration in Figure 3 96 SharedPulseTerminals VPU1CH1 VPU1CH2 VPU2CH1VPU2CH2 There are no spaces allowed in the string 3 Check the Data tab on the Sheet tab configure_dc_flash 0 If the value is non zero or there are error messages in the Project Messages pane see Troubleshooting section Running the Vt MaxGm ITM This test performs a DC Vg lp sweep on the DUT and extracts the threshold voltage V The VT results for the first run are shown on the graph in the lower left corner Vy values for each test run or append is shown in each tab in the right most column headed VT This test can be run after setting the device in any state using the Pr
315. ing the test To run a selected test 1 Click the green Run Test Plan button P gt 2 Select Run in the Run menu or press the F6 keyboard key While the test is running test data is placed the data sheet In ITMs data is placed in the data sheet real time as data is being acquired In UTMs by default data is not placed in the data sheet until after the test has finished running In the message area of the KITE window time stamps indicate Start time e Stop time e Total execution time NOTE You can also start a test by pressing the F6 keyboard key You can abort a test by clicking the red Abort Test Plan toolbar button by selecting Abort in the Run menu or by pressing the PAUSE BREAK keyboard key For detailed information about running individual tests see Run execution of individual tests and test sequences in Section 6 of the Reference Manual Figure 2 14 Example project plan Project Plan probesubsites zix Site 1 Project Tree Me probesubsites M InitializationSteps E prober init MFE Subsite ME 4terminal n fet E prober contact E connect JE vds id 1s 3terminal npn bjt E connect ME vee ic 1x E prober ss move site2 4terminal n fet E prober contact E connect MJE vds id 2x 3terminal npn bjt i x ERRAR E K VISE Sul ME gt E connect MJE vee ic 2x ME prober ss move wat TerminationSteps prober separate prober prompt H 0N 86F amp NHWNNDHA
316. ining user libraries refer to the Advanced KULT features in Section 8 of the Reference Manual To execute a KULT user module in Keithley Interactive Test Environment KITE create a KITE user test module UTM and connect it to the user module Once this user module is connected to the UTM the following occurs each time KITE executes the UTM e KITE dynamically loads the user module and the appropriate user library KITE passes the user module parameters stored in the UTM to the user module e Data generated by the user module is returned to the UTM for interactive analysis 4200 900 01 Rev H February 2013 Return to Section Topics 4 3 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 2 illustrates the relationships between user libraries user modules UTMs KITE and KULT Figure 4 2 Relationships between KULT and KITE user libraries user modules and UTMs KITE window displaying UTM definition Defiriion Sheet Graph Status sE Projectview Bona asuwn a 10 MODULE Rdson42xx DESCRIPTION lo Connecting SHUI to the source lo Connecting SMU2 to the drain Jo Connecting SMU3 to the gate Jo Connecting SMU4 to the bulk Ld User library directory usrlib KULT window Direc dente 4 4
317. ion Connect Triax to BNC adapter if necessary Connect cable to probe manipulator 24 Take one of the cable assemblies from step 14 connect the SMA to CHANNEL 1 of the PG2 in the right most slot PG2 in the slot with the lowest number 25 Carefully insert the LEMO Triax connector from step 24 into the Force connector on the SMU in Slot 1 26 Route BNC cable from SMU1 to the DUT array WL1 connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator Switch matrix connection to array DUT Cabling instructions for switch connect to an array DUT are below Refer to Figure 3 97 for the following procedure These instructions are compatible with the following projects in the Projects _Memory folder e Flash Switch e FlashDisturb Switch FlashEndurance Switch Unlike the direct connect methods described above the use of a switch matrix permits the use of SMU preamp 1 Setup the Model 4200 SCS referring to the Getting Started page 1 1 Reference Manual Installation page 2 1 and Connections and Configuration page 4 1 2 Setup the 707 or 708 Switch matrix using the Reference manual Appendix B Using KCON to add a switch matrix to the system See Figure 3 99 for a suggested configuration for the row column connection consistent with Figure 3 97 3 Take one of the SMA Tees and connect the two shortest 4 25 inch or 10 8 cm SMA cables to either end 4 Connect this assembly to the right most PG2
318. ion Topics 3 43 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 11 12 13 14 15 16 Click cell A1 To paste DC data into the pulse Calc worksheet right click cell A1 and select Paste from the drop down menu If there is previous data in the Calc worksheet the paste operation will overwrite it Figure 3 47 shows the data that was pasted from the vds id ITM All comparison DC and pulse data is now located in the same test The graph needs to be defined to display the DC data located in the Calc worksheet For vds id pulse click the Graph tab Right click the graph and select the first option Define Graph from the drop down menu The Define Graph dialog box is shown in Figure 3 48 In Define Graph click the cells in Column Y1 to add the appropriate DC curves In this case three vds id curves have been added Drainl 1 Drainl 2 Drainl 3 These Y1 cells are circled in red All three of these Data Series are located in the Calc worksheet as noted in the Sheet column Also shown in Figure 3 48 is graph with the three added curves To change graph colors or add data point shapes patterns move the cursor along the desired curve until the pointer appears With the pointer displayed right click to get the Data Series Properties dialog box Select a shape property to demarcate each data To verify pulse operation use a DUT that does not exhibit any self heating or transient charging effect
319. ion of new ITMs or customization of existing ITMs refer to the Reference Manual Configuring the Project Plan ITMs page 6 86 After inserting library ITMs into your project configure the setup for each ITM as described in the subsections that follow in the order in which they appear Match the physical and virtual connections 1 Inthe project navigator double click the ITM that you wish to configure The definition tab of the ITM window opens by default see Figure 2 4 2 Inthe definition tab review the virtual connections for each device terminal as listed in the instrument object for that terminal see Figure 2 4 3 Ensure that the physical device connections match the virtual definition tab device connections If necessary shut down the instrumentation and correct the physical connections CAUTION Physical device terminal connections must accurately match virtual connections to avoid bad test results and potential device damage Configuring forcing functions for each device terminal With the definition tab for the ITM open do the following for each device terminal 1 On the instrument object for the terminal Figure 2 4 click the FORCE MEASURE button The corresponding Forcing Function Measure Options window appears The Forcing Functions Measure Options window in Figure 2 9 illustrates typical window features 2 18 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual S
320. is can be set from 10 e 9 to 300 e 9 in 10 e 9 10 ns steps This value programs the full transition time 0 100 not the 10 90 time PulseWidth double The gate pulse width PW The PW can be 20 ns to 1us 10 ns resolution Pulses wider than 150 ns will begin to be attenuated by the capacitor in the 4200 RBT PulseBase double The pulse gate base voltage This can be set from 5 to 5 V inclusive of amplitude PulseAmplitude double The pulse gate voltage amplitude This can be set from 5 to 5 V inclusive of base voltage GateLoad double The scope card channel 1 input impedance for the gate Either 50 or 1E6 Use 50 for Pulse IV with RBTs GateRange double The scope card channel 1 Y scale voltage range for the gate measurement Typical values are 1 2 5 V DrainLoad double The scope card channel 2 input impedance for the drain Either 50 or 1E6 Use 50 for Pulse IV with RBTs DrainRange double The scope card channel 2 Y scale voltage range for the drain measurement Typical values are 1 2 5 V PulsePeriod double The pulse period for the Vgs pulse The period can be set from 40 ns to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 This period is most easily calculated by multiplying the largest desired pulse width PW by 1000 Example PW 150 ns so Period 150 us AverageNum int The number of waveforms to average GateBias doub
321. is value may not exceed 128 Section 3 Common Device Characterization Tests Stress Times For the particular example at left these were the Stress Le Times before entering a Periodic 1000 0 Test Interval 10000 0 Stress Times These were the Stress Times after 100 0 1000 0 2000 0 3000 0 4000 0 5000 0 entering a Periodic Test Interval lt Step E Update and save the subsite setup configuration Update the window and save your settings or setting changes by clicking the Apply button NOTE Subsite Setup tab calculations do not execute update until you click Apply see Figure 3 58 Figure 3 58 Saving the subsite setup configuration Apply The Subsite Setup window updates and settings are saved Configuring device stress properties Properties for device stressing are set from the Device Stress Properties windows see Figure 3 59 This window is opened by clicking the Device Stress Properties button on the Subsite Setup tab The button is shown in Figure 3 51 4200 900 01 Rev H February 2013 Return to Section Topics 3 71 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual The device stress properties window that opens will be for the first device in the subsite plan There is a separate properties window for each device in the plan The properties window for each device is displayed by clicking the Next Device or Prev Device button at
322. ists the readings for the four Output Values 4200 900 01 Rev H February 2013 Return to Section Topics 3 87 Section 3 Common Device Characterization Tests Figure 3 73 Subsite Data sheet Cycle Mode Model 4200 SCS User s Manual 3 88 Cycle Index ___ii207 1666E 15 2 2850E 3 2 9236 Sequence Subsite Setup Subsite Data Subsite Graph A B C Id 1 Id 1 IDOFF IDLIN 3 293 2366E 15 2 2360 3 290 9966E 15 2 1390 4 289 1465E 15 2 232 t__t Ea Ea E 393 2 2 2192 D Id 1 IDSAT 91 E E E E 9 6 O a E IgLeak 1 IGLEAK 4 8939E 12 4 8436E 12 3 4 8989E 12 3 4 8900E 12 Save As Output Value readings Output Value readings from test named IgLeak from test named Id The above subsite data is for device 4terminal n fet For a multi device Subsite Plan there would be a separate tab for each device The data for other devices are displayed by clicking the corresponding tab Clicking this tab displays the Calc sheet It is the same as the Calc sheet for an ITM and UTM Clicking this tab displays information about the subsite cycling setup including Output Values See Figure 3 75 for details Stress Measure Mode data sheet Figure 3 74 shows an example data sheet for a Subsite Plan that has one device Spreadsheet columns are explained as follows Column A Lists the cycles that were run For the example in Figure 3 74 eight cycles were
323. itching Matrix MTRX1 KI7174 Matix Card CARD1 Slot3 Empty X Slot4 Empty X S5 Slot 6 Empty X 4 Add a manual probe station to the system configuration using the KCON Tools menu as illustrated in Figure 4 25 If a test fixture is already part of the configuration it must be removed before the probe station can be added To remove any external component from the system configuration select it in the configuration navigator and press the DELETE key Figure 4 25 Adding a probe station Add External Instrument Switch Matrix gt Capacitance Meter Pulse Generator gt Formulator Constants Ctrl F Test Fixture General Purpose Test Instrument gt 5 Connect the instrument terminals and probe station pins to the switch matrix by selecting the KI 7174 Matrix Card CARD1 in the configuration navigator and configuring it as illustrated in Figure 4 26 Detailed information about switch matrix configuration can be found in the Reference Manual Appendix B Using Switch Matrices 4200 900 01 Rev H February 2013 Return to Section Topics 4 19 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 26 Connecting the switch matrix Keithley CONfiguration utility f x File Tools Help ao KI System Configuration S E KI 4200 SCS B F KI 4200 MPSMU SMU1 Properties r Card Properties EE KI
324. ition to be restored to the defaults For more information refer to the Reference Manual Resetting certain graph properties to KITE defaults page 6 285 Resize Toggles between a normal cursor and a ruler cursor Moving the ruler cursor expands or contracts the size of the graph The new size is saved when the graph is saved By contrast selecting Zoom In affects only the view size which cannot be saved For more information refer to the Reference Manual Changing the size of a graph page 6 279 Defining data to be graphed The Graph Definition window is used to define the data to be graphed Figure 2 31 shows the undefined Graph Definition window for a vds id ITM Figure 2 31 Graph definition window for a vds id ITM undefined Graph Definition Clear All Axis Properties Cancel Understanding table columns in the Graph Definition window The table columns in the Graph Definition window are used as follows Data Series Lists the names or other contents of every first row cell of the data and Calc worksheets If you have generated Append worksheets for the test the Data Series column also lists the names of every first row cell in every Append worksheet However when multiple first row cells name the same parameter because multiple sets of data exist under that name the following applies The name of the parameter is listed only once under Data Series because it corresponds to a family of curves
325. ive devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use 04 09 When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the maximum signal levels of the instruments and accessories as defined in the specifications and operating information and as sho
326. ject navigator as shown in Figure 4 63B NOTE For details about creating a project refer to the Reference Manual Building modifying and deleting a Project Plan page 6 47 Figure 4 63 Define new project KITE Define New Project e E Project Name Interactive ooo O Environment Location C 554200 ki Projects os Project Name seabed Bae SubSite 1 Restore Default Location BC Device 1 2 i Number of Sites fi 4 Ar Device 2 AE Subsite 2 m Project Plan Initialization Steps Off C On AS be LE Create Project r Project Plan Termination Steps Off C On Site fi aa A Define new project window B Project navigator Add a subsite plan A subsite or test element group is a collection of devices to be tested To add a subsite plan 1 Open the Add New Subsite Plan to Project window by clicking the Add new Subsite Plan button on the toolbar see Figure 4 64A or click the New Subsite Plan item on the project menu see Figure 4 64B Figure 4 64 Add a new subsite plan to a KITE project dF File View Project Run Tools Window Help JE Zia New Subsite Plan OR Click to add subsite plan A Add new Subsite B Project menu Plan button 2 With the add new subsite plan to project window open see Figure 4 65A type in the name subsite and click Ok The subsite plan appears in the project navigator as shown in Figure 4 6
327. l 3 16 Setting the DC bias conditions The DC bias conditions depend on which forcing function is presently selected As shown in Figure 3 12 settings include pre soak voltage DC bias start voltage stop voltage step voltage number of data points and volts values Table 3 1 lists the DC bias conditions and setting range for each forcing function Setting the AC drive conditions As shown in Figure 3 12 the AC drive conditions include frequency Hz and voltage mV RMS and are summarized in Table 3 1 Frequency can be set to the following values e 10 kHz to 90 kHz in 10 kHz steps e 100 kHz to 900 kHz in 100 kHz steps e 1 MHz to 10 MHz in 1 MHz steps When performing a frequency sweep the Model 4200 CVU will step through all the frequency points from start to stop For example if the start frequency is 800 kHz and the stop frequency is 3 MHz the CVU will step through the following frequency points 800 kHz 900 kHz 1 MHz 2 MHz 3 MHz Measure settings Referring to the Measure Settings area indicated in Figure 3 12 use the drop down menu for Parameters to select one of the following measurement options Z Theta Impedance and phase angle degrees e R jX Resistance and reactance Cp Gp Parallel capacitance and conductance e Cs Rs Series capacitance and resistance e Cp D Parallel capacitance and dissipation factor e Cs D Series capacitance and dissipation factor The Column Names appear in the data sheet see
328. l compatible format The plug and play drivers can be used in most application programming environments for example National Instruments NI LabVIEW Microsoft Visual Basic and Microsoft Visual C The primary differences between the two scope cards are ADC resolution and sample rate Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Model 4200 SCP2HR 16 bit resolution single channel sampling rate of 400 million samples per second 400 MS s Model 4200 SCP2 8 bit resolution single channel sampling rate of 2 5 billion samples per second 2 5 GS s Basic pulse characteristics of the two scope cards are listed in Table 1 6 See the supplied ZTEC User s Manual for complete specifications of the scope card 1 NOTE Refer to the Reference Manual Pulse source measure connections page 11 34 for details about scope card connectors and connections to DUT Table 1 6 Scope card characteristics Scope card characteristic Specifications Model 4200 SCP2HR ZT410 50K Model 4200 SCP2 ZT450 50K 1 MQ DC to 125 MHz Dual channel Simultaneous sampling of both channels Simultaneous sampling of both channels ADC resolution 16 bit 8 bit Bandwidth 50 Q DC to 250 MHz 50 Q DC to 1 GHz 1MQ DC to 350 MHz Maximum input 50 Q 5 VDC 1MQ 25 VDC derated 20 dB decade above 10 MHz 50 Q 5 V DC 1MQ 150 V DC
329. l assages aE 1 11 2 4 Full Kelvin PreAmp ground unit connections 1 39 Full Kelvin SMU ground unit connections 1 38 GPIB instrument connections eee 1 9 Graph scale settings ccecceeeeeeeeeeseeeeeees 4 36 Graph Settings menu ceeceeeeeeeeeeeeeeeeeee 2 41 Graphing the Append worksheet data Ground Unit siccinsccrasiatsccrena piaceaumrusncsasenends HCI process flOW sisiecsavniscstsrcomesrcwemennnnamiaaee 3 94 How do perform a charge pumping 3 147 How do I Use the 4200 SCS to perform a Pulsed l V test on my device eeen How to control a probe station ceee How to control a switch matrix 0 How to Control an external pulse generator How to Control external equipment ss How to Create your own ITMS How to Manage graphical test results in Graph Tab 2 39 How to Run a Basic Test iaee 1 42 1G VG OFAPNS fiesseesies tasece rosaries steatnaticamocceeateae 4 36 Initialization and Termination Steps 2 23 Input attenuation Input coupling INPULTINGR scccarcuccasenscrareuseqrenreuesseanarpasmernacetoremseneres Installation Environmental requirements 0 000 1 4 Operating environment 00006 1 4 Index Cleanliness esssiicsccsesnsscacetunransarsasaaacns 1 5 Proper ventilation 0 ccceeee 1 4 Temperature and humidity 1 4 Shipping an
330. l columns for the test may span several pages horizontally The display of data in a single column may span several pages vertically e Each column heading identifies the data below it The name of a test results parameter for example current or voltage that is assigned by KITE by you for an ITM only or by the KULT programmer for a UTM only For ITM current and voltage naming refer to the Reference Manual Understanding and configuring the Measuring Options area page 6 128 The name of a formulator results parameter e The data source identifier the formula box and the save as button each of which are discussed below e The contents of the Data worksheet are display only However you can manipulate the contents of the Data worksheet after linking it to or pasting it in the Calc worksheet Understanding the formula box of the Data worksheet If a column in the Data worksheet contains the results of formulator calculations you can locally display the formula equation that was used to obtain the results Display the formula by selecting it from the formula box as illustrated in Figure 2 24 The steps in Figure 2 24 display the formula that was used to obtain the SQRID results in Figure 2 23 4200 900 01 Rev H February 2013 Return to Section Topics 2 35 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual 2 36 Figure 2 24 Displaying a formulator equation using the formula box Click
331. lan In the Subsite Setup tab click the Device Stress Properties tab to open the properties window o For detailed information about subsite cycling see Subsite cycling in Section 6 of the reference manual Figure 3 79 Process flow HCI NBTI constant current EM Pre stress characterization Increase stress time Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests How to perform a flash memory test on my device Introduction There are several projects included with the Model 4200 SCS FLASH package that facilitate testing of floating gate transistors NOR NAND as well as other types of Non volatile Memory NVM The package consists of two pulse cards four pulse channels projects described in this section and all required interconnecting cables and adapters see Figure 3 89 Depending on the desired setup at least two SMUs are required To illustrate the flexibility of the Model 4200 SCS FLASH package on page 3 95 Figure 3 84 and Figure 3 85 depict a typical configuration using four SMUs This configuration permits independent source and measure for each terminal in a typical 4 terminal floating gate transistor NOTE The Model 4200 SCS FLASH package does not include a Model 4200 SCP2 2 channel scope card When using the Models 4205 PG2 or 4220 PGU the scope card can be added for manual pulse height v
332. le The DC gate bias provided by the gateSMU DrainBias double The DC drain bias provided by the drainSMU VPUID char The instrument ID This should be set to VPU1 for 4200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SMUs in the system This is the SMU that applies the DC bias to the DUT drain during the sweep TimeSize int Set to a value that is at least equal to the number of steps in the sweep Ch1OutSize and all three must be the same value Ch2OutSize Table 3 23 Outputs for scopeshot_pulseiv Output Type Description Time double Array of time values from the scope card s Ch1Out double Array of gate voltages from channel 1 of the scope card Ch2Out double Array of drain voltages from channel 2 of the scope card 3 62 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 24 Return values for scopeshot_pulseiv Value Description 0 OK 1 Invalid Pulse Width Min 40 ns 2 Invalid Pulse Period Min 40 ns 3 Invalid Average Num 1 1000 4 Array Sizes Do Not Match 5 Invalid VPU Specified VPU Is Not In Current System Configuration 6 Invalid GateSMU Spe
333. le click the second connect test to open it Figure 4 49 shows the parameters that connect the device to the PGU Not shown is line 1 OpenAll that opens the relays closed by the previous connect test Line 1 is shown in Figure 4 47 For the parameters shown in Figure 4 49 the device connection pathways to the PGU and GNDU are shown in Figure 4 50 Remember that if your physical matrix connections are different you will have to change the connection parameters in the UTM to match them Figure 4 49 Second connect test connects the device to the PGU Name In Out Type Value 10 TermldStrs Input CHAR_P PGU lt z Gonnscts PGU to pin 5 of test fixture 11 Pind Input INT 5 12 TermldStr6 Input CHAR_P CMTR1 13 Pin6 Input INT D 14 TermldStrz Input CHAR_P_CMTRIL 15 Pin Input INT D 16 TermldStr8 Input CHAR_P _ GNDU 2 Connects GNDU to pin 6 of test fixture VF Ping Input INT 6 lt Figure 4 50 Signal paths to apply the pulse stress N Channel MOSFET Drain Gate Substrate a IU NO BD gt m pgu1 init test In the project navigator double click pgu1 init to open the test This one parameter test see Figure 4 51 initializes the PGU For example it disables the output resets errors and sets triggering More information about the initialized state is provided in the description area of the definition tab For details about the UTMs for the pulse generator refer to the Reference
334. led the SMU performs a single sweep that steps from start to stop A dual sweep for a slave SMU is typically used with a master SMU that is also set to perform a dual sweep The master SMU does not have to be set for dual sweep in order to use dual sweep for a slave SMU In this case setting the master SMU s sweep points to an even number will ensure that the slave s dual sweep is symmetrical Setting the master SMU count to an odd number will cause the slave SMU to repeat the last sweep point NOTE The slave SMUs will not automatically set for dual sweep when dual sweep is enabled for the master SMU Dual sweep must be enabled individually for each SMU To compare a single sweep to a dual sweep refer to the Reference manual Figure 6 135 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Understanding pulse mode To avoid device overheating in some tests voltages or currents can be applied to a device only for brief periods at widely spaced intervals For sweep linear log and list and bias forcing functions an SMU can be set to provide pulse output With pulse mode enabled the following pulse parameters can be set On Time Off Time e Base Voltage or Base Current The base is the level the SMU goes to between sweep points Pulse on and off times determine pulse period and pulse width as follows e Pulse period
335. lick Paste to All Sites to overwrite the device properties for all available sites Segment Stress Measure Mode NOTE The following supplemental information explains stress testing using the Segment Stress Measure Mode This stress measure mode is similar to the basic Stress Measure Mode but instead uses the Segment ARB pulse mode of a Keithley pulse card Segment Stress Measure Testing consists of two phases e During a measure phase the SMUs perform DC measurements on the DUT During a stress phase the Keithley pulse card provide stress using Segment ARB waveforms and the SMUs provide voltage bias and current limit There are no measurements performed during the stress phase NOTE Refer to Segment ARB stressing on page 3 82 for details about using Segment ARB stressing to endurance test floating gate flash memory devices Figure 3 67 shows a typical stress measure test system using a switch matrix to automate the stress and measure phases of the test e During a measure phase the switch matrix connects the SMUs that will perform the DC measurements on the DUT The Keithley pulse card is disconnected from the DUT during a measure phase During a stress phase the switch matrix connects the pulse generator to the DUT It also connects SMUs that will be used for device pin grounding or biasing NOTE The Model 708A Switching Mainframe and Model 7174A Matrix Card shown in Figure 3 67 are added to the Model 4200 SCS
336. lse IV for CMOS Model 4200 PIV A What is the PIV A PulselV Package The PIV A package is an optional factory installed kit to the Model 4200 SCS The focus for the PIV A package is testing lower power CMOS transistors that exhibit self heating or charge trapping effects Self heating has been an issue for some higher power devices but is emerging as a problem for lower power devices based on smaller dimensions and silicon on insulator SOI technology where it is more difficult for the heat generated by the transistor to leave its immediate surroundings Note that the PIV A package is not compatible with the 4225 PMU or 4225 RPM See the Reference Manual Section 16 for information on using the PMU and RPM for Pulse l V testing Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests In addition to smaller dimensions high k materials are being considered to greatly lower gate leakage current for future transistor technology Unfortunately these high k materials and related integration processes are not yet perfected and have both interface and bulk lattice imperfections that can cause charges to be trapped Both the charge trapping and self heating effects can be largely avoided by using pulse IV instead of DC parametric testing To accomplish pulse IV testing of CMOS transistors the PIV A package consists of the following e Model 4205 PG2 Dual channel volt
337. lse l V instrument card Figure 2 5 illustrates the classic view table based version of the of the UTM definition Figure 2 6 shows the GUI view The GUI view does not change the operation of the UTM or the overall project execution The GUI view Figure 2 6 utilizes a variety of ways to enter values typing text 4200 900 01 Rev H February 2013 Return to Section Topics 2 11 Section 2 Model 4200 SCS Software Environment in an edit box clicking on a drop down list or selecting a check box or option button The UTM GUI view simplifies the presentation of the UTM test parameters by not displaying some of the less used parameters Entering a value in the GUI view also places the value into the table based classic definition entering a value in the classic view also places it in the GUI view If there is a parameter in the table but not in the GUI definition then the table determines the value used by the UTM Figure 2 5 UTM classic definition tab Formulator Graph tab Mathematical ee test i the project test results ane analysis MESUT User libraries box analysis tool Test library selection for the UTM Output Values button Define Sheet Graph Status Test Notes Click to set export Output Values for this test to the Subsite data sheet Cell display edit box Displays WL contents of selected cell and allows data entry Documentation area Displays important information about the test module
338. lude all test definitions formulas graph settings and data by default Copying the default project first will preserve the original default project and allow you to add tests delete tests and modify tests without affecting the default project Copying individual tests using the test library manager Individual tests can be copied to test library and then copied into another project by performing the following steps see Figure 3 5 To copy individual tests using the test library manager 1 Double click the device node that is the parent of the test you want to copy 2 Select one or more tests from the Test Sequence Table hold down the Shift or Ctrl key while clicking with the mouse to select multiple tests see Figure 3 8 3 Click the Submit or Submit As buttons to submit the tests to a test library 4 Create a new KITE project or open a different KITE project Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 5 Double click the device node you want to copy the test to 6 Select one or more tests from the test library and copy or copy as the library tests to the KITE project See the How to display and manage test results page 2 25 or the Reference Manual Keithley Interactive Test Environment KITE page 6 1 for further details on managing KITE tests and projects Figure 3 8 Selecting multiple tests
339. lue given is the minimum measurement range used with automatic ranging for larger currents 1 Full Auto 2 Limited Auto 10 pA 3 Limited Auto 100 pA 4 Limited Auto 1 nA 5 Limited Auto 10 nA 6 Limited Auto 100 nA 7 Limited Auto 1 pA 8 Limited Auto 10 pA 9 Limited Auto 100 uA 10 Limited Auto 1 mA 11 Limited Auto 10 mA 12 Limited Auto 100 mA 4200 900 01 Rev H February 2013 Return to Section Topics 3 51 Section 3 Common Device Characterization Tests 3 52 Table 3 10 continued Model 4200 SCS User s Manual Inputs for Vdid_Pulse_DC_Family_pulseiv Input Type Description LoadLineCorr int Determines whether to use load line correction to compensate for the voltage drop caused by the 50 Q sense resistor used to measure the drain current Id 1 load line correction active 0 no load line correction GateCompliance double The SMU current compliance for the DUT Gate DrainCompliance double The SMU current compliance for the DUT Drain NPLC double The DC measurement integration time in NPLC Number of Power Line cycles DCSourceDelay double Time in seconds between the DC source and measure for each sweep point DC_vs_ Pulse int Determines whether to run a DC and Pulse test or a DC only test or a Pulse only test 0 Pulse Only 1 DC Only 2 DC and Pulse VPUID char The instrument ID This should be set to VPU1 for 4200 systems with a 4200 PIV package
340. m is desired use AverageNum 2000 for Id lt 500 pA Pulse IV measurements have less resolution and sensitivity than typical DC results so test parameters such as averaging or smaller steps sizes and post test processing such as curve fitting may be required to obtain roughly equivalent results Comparing DC and pulse results There are two methods for comparing DC and Pulse IV results The first method uses the UTMs that combine pulse and DC tests Vds id pulse vs dc vgs id pulse vs dc The second method described below uses the data in the Sheet tab of KITE to compare any results across tests This procedure explains how to copy the DC results into a pulse UTM to allow comparison between pulse and DC IV results in a single graph 1 2 3 N In the PulselV Complete project navigator double click the vds id ITM in the project navigator Click the Sheet tab Choose the desired results worksheet If there is only one set of curves then the results are in the Data tab If additional tests have been appended choose the desired Append tab Highlight all of the data in the desired worksheet by clicking the Entries Selection Cell as shown in Figure 3 46 To copy the data right click the Entries Selection Cell and select Copy from the drop down menu In the PulselV Complete project navigator double click vds id pulse UTM Click the Sheet tab Click the Calc worksheet tab 4200 900 01 Rev H February 2013 Return to Sect
341. m types 20 cee eee eee 5 12 Section 5 How to Generate Basic Pulses Keithley Pulse Application KPulse KPulse Getting started Keithley Pulse Application KPulse is a graphical user interface GUI that is a non programming alternative to configure and control the installed Keithley pulse cards It is used for quick tests requiring minimal interaction with other Model 4200 SCS test resources Model 4200 SCS User s Manual The Kpulse application supports the source only configuration of Models 4225 PMU 4220 PGU 4205 PG2 and 4200 PG2 2 channel pulse cards The Model 4225 PMU is identified as PMU on the card tab whereas all other card types are identified as VPU Starting KPulse The KPulse GUI Figure 5 1 is opened by double clicking the KPulse icon on the desktop The GUI example shows one PMU installed in the system From the GUI each pulse generator can be used to configure and control the following waveform types e Standard pulse waveforms and Segment ARB waveforms Pulses are configured and run from the VPU or PMU tabs of KPulse There is a tab for every Keithley pulse card installed in the Model 4200 SCS e Custom file arb waveforms full arb Pulses are configured and saved as a kaf file using the Arb Generator tab of KPulse A VPU or PMU tab can then be used to load the saved kaf file into the pulse generator and run it Figure 5 1 KPulse GUI it Keithley Internal Pulse Interface C S4200 kiuse
342. mall number c Uncheck the Erase and Fast Program Erase tests d Enter the parameter values for the Vt MaxGm test following the procedure in Running the Vt MaxGm ITM e Run the test i Double click 4Terminal FloatingGate ii Click the Run button iii Check the graph on the Vt MaxGm test It will likely be too low on the first few runs but note the total number of pulses sent to the DUT iv Rerun test by following the previous Run the Test steps Once the V has met the target value note the total pulse width to use to program the device using either the Program or Fast Program Erase tests f Repeat above with the Erase test feeding final results into the Erase and Fast Program Erase tests g Ensure that the erase parameters are fully erasing the DUT i Set the parameters in the Fast Program Erase test Set NumPulses 10 ii Uncheck the Program and Erase tests iii Double click 4Terminal FloatingGate Press run iv Note the V7 v Change NumPulses 100 or a larger number vi Double click 4Terminal FloatingGate Press Append vii Note the Vr If the V7 value for the tests are similar then the erase pulse is fully erasing the DUT The following link to procedures for these UTM and ITM tests Running the Program or Erase UTM Running the Fast Program Erase UTM Running the SetupDC UTM 4200 900 01 Rev H February 2013 Return to Section Topics 3 139 Section 3 Common Device Characterization Tests Model 4200 S
343. me at the 0 V base voltage Valid values are 20 ns to 1 sin 10 ns increments s int The number of pulses to output Valid range 1 to 2431 about 4 2 billion Return to Section Topics 3 143 Section 3 Common Device Characterization Tests 3 144 NumSMuUBias Terminals SMUBiasTerminals SMUBiasVoltages NumSharedSMUs SharedSMUs SharedPulseTerminals SharedPulseTerminals OpenAll Error codes Model 4200 SCS User s Manual int The number of bias SMUs to include in the test These are SMUs that are not connected in the SMU Pulse sharing configuration but additional SMUs that could be used for biasing word or bit lines char A string representation of all the SMU channels being used in the test For example if the setup is such that SMU1 and SMU2 are being used for a bias then SMUBiasTerminals would be SMU1 SMU2 double Array of SMU bias values used during the test The values correspond to the number and order in the SMUBiasTerminals string int The number of SMUs sharing a connection to the device with a VPU Sharing a connection means using a Tee to combine a SMU and VPU channel for a DUT terminal instead of using an external switch matrix This variable stores the number of shared SMU Pulse instances char A string representation of all the shared SMU channels being used in the test This string is used to disconnect each SMU from the shared cable during pulse output For example if
344. mple Segments gt 1 2 5 6 7 1 5V Segment Start Time Trig Relay 1 0 0V 50ns 1 1 1 0V 4 1 0V j 100ns 1 1 0V k 20ns 1 1 5V 150ns 1 1 5V j 50ns 1 Segment Arb 0 0V j 500ns 1 Waveform 1 0 0V 130ns 0 Floating Ons ims 1 Trigger 1 O Trigger Low 1 Trigger High High 1 Endurance 0 Relay Open i Output 04 1 i 1 Relay Closed i Relay i i i Start stop and time restrictions The start level of the first segment and the stop level of the last segment must be the same In Figure 1 23 segment 1 start and segment 7 stop are both set for 0 0 V The stop level fora segment must be the same as the start level for the next segment In Figure 1 23 the stop level for Segment 1 is 1 0 V as is the start level for Segment 2 no discontinuities are allowed The minimum time per segment is 20 ns with increments of 10 ns Trigger levels The segment trigger levels are available at the TRIGGER OUT connector When set high 1 a TTL high level will be present at TRIGGER OUT during that time interval When set low 0 the trigger goes low for that segment In Figure 1 23 trigger is set high for the first three segments and low for the rest of the segments NOTE If both channels of a pulse card are being used the segment trigger levels for CHANNEL 1 will be seen at the TRIGGER OUT connector The trigger levels for CHANNEL 2 are ignored High endurance output relay
345. mples assume the record size sweep points is 100 samples and offset time is set to 1 second e Delayed sampling from 0 offset reference With offset reference set to 0 0 0 sampling for all 100 sweep points will start one second after the trigger event Delayed sampling from 100 offset reference With offset reference set to 1 0 100 all 100 samples will have been acquired at the trigger plus one second point in time Delayed sampling from 50 offset reference With offset reference set to 0 5 50 50 samples will have been acquired at the trigger plus one second point in time Sampling will continue for the other 50 sweep points Average type acquisition There are four waveform acquisition types that can be set for the scope Normal average envelope or equivalent time Normal In normal mode a single waveform is captured Average In average mode multiple captured waveforms are averaged Envelope In envelope mode the minimum and maximum waveform points from multiple acquisitions are combined to form a waveform an envelope that shows min max changes over time Equivalent time In equivalent time mode a picture of a repetitive waveform is constructed by capturing a small amount of information from each repetition Because the points appear randomly along the waveform it is important to note that an entire waveform may not be constructed unless there are sufficient repetitions Unfilled points will be
346. n Data points value and list of amperes or volts values for a list sweep e The default or desired Src Range and compliance e The default or desired measuring options 3 Click OK The configuration for this device terminal takes effect and the Forcing Functions Measure Options window closes 4 If using pulse mode see Configuring pulse mode 5 Repeat Steps 1 through 3 for the remaining device terminals Configuring pulse mode With a valid forcing function selected a SMU can be configured to provide pulse output 4200 900 01 Rev H February 2013 Return to Section Topics 2 21 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 13 explains how to use the pulse mode The settings in the Forcing Functions Measure Options window shown in Figure 2 13 configures a voltage sweep The pulse mode controls for the other valid forcing functions are similar Figure 2 13 Pulse mode configuration voltage sweep Forcing Functions Measure Options Device Terminal Drain Instrument ID SMU2 Instrument Information Valid forcing functions for Pulse Mode Instrument ID SMU2 Instrument Model Kl4200 MPSMU with Pre mp Mode Sweeping Voltage Current Bias e Voltage Current Sweep Linear Forcing Function Log and Dual Sweep T Voltage Current List Sweep Voltage Sweep Voltage Sweep Function Parameters Dual Sweep A SMU can perform a dual Sal Type Posenin ooo current sweep or a d
347. n 464 2 t the Device Stress y Device Stress Properties Stress Measure Delay 0 0 1000 0 w Properties window which is used to configure the subsite stressing parameters When Stress Measure a Periodic Test Interval Log Mode AND Log cycle times are selected use to ask fio Total Cycles When a stress KITE to stop stressing and Rate s w Periodic measure mode is selected use to apply and save the settings Rate s field in addition to you have entered in any intervals specified in za the Setup tab make measurements at the intervals specified in the the Stress Measure This button also Cycle Times area For kE subsite 0 1 applies and saves more information refer to settings made in the Step D Set periodic test Device Stress intervals stress Properties window measure mode log timing see Figure 3 59 only on page 3 70 4200 900 01 Rev H February 2013 Return to Section Topics 3 67 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Configuring the Subsite Setup tab To set up cyclical testing configure the Subsite Setup tab as shown in steps A through E below Step A Enable cycling Figure 3 52 Enabling cycling Note that cycling Sequence Subsite Setup Subsite Data Subsite Graph tb f r cannot be configure T Enable Cycles wee until it is enabled J3 Sequence Subsite Setup Subsite Data Subsite Graph M Enable
348. n 3 Common Device Characterization Tests By default reset AC drive is applied to the CVH1 terminal and the current measurement is made at the CVL1 terminal A drop down menu sets the range for the current measurement Auto 1A 30yA or 1mA The terminal properties can be toggled by clicking one of the other AC radio buttons By default reset DC bias is also applied to the CVH1 terminal DC bias can instead be applied to the CVHL terminal by clicking one of the other DC radio buttons Figure 3 14 shows the four possible configurations for terminal properties 4200 900 01 Rev H February 2013 Return to Section Topics 3 17 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 14 Advanced settings for terminal properties Configuration A default Use the following settings to source AC drive voltage and DC bias voltage to terminal A and measure AC current at terminal B x Simplified Test Circuit CVU Terminal Properties Ac DC Measure ACI Source Y MeasureI Source Offset CVH1 A O O C L1 B O uto v O 0 Configuration B Use the following settings to source AC drive voltage to terminal B source DC bias voltage to terminal A and measure AC current at terminal A CVU Terminal Properties x Simplified Test Circuit AC DC Measure ACI Source MeasureI Source Offset CYH1 4 O uto v O CYL1 B O o v
349. n Close Project Project Save Ctrl 5 1G Save al amp S4200 kiuser projects default DER Fie Edt view Favorites Tools Help i Save Project As Q Back Je Favortes P Ei le Foldprs B Search Address C 54200 Kiuser projects default v 8 Go Folders X Name Type E M50Cache A devices File Folder E Program Files subsites File Folder 3 54200 tests File Folder amp kuser a Microsoft Word Doc E Devices default kpr KPR File export E a z coe 2 Use the Open KITE Project File Ba browser to Look in default a aO select the devices Demo i subsites Se ator default project i E Miscellaneous Documents default kor _Nanotech a O Puse Reliability 5 defaut devices subsites a tests a Tests usrlb sys temp SUPPORT a IPA eweHaDe Generate Keithley Data File Page Setup E prit Ctrl P Exit 3 Click Open to open the default project y Open Files of type KITE Project Files kpr zi Cancel v cll een SE Type KPR File Date Modified 11 20 2008 2 44 F 907 bytes 3 My Computer My Network File name default kpr Places 4200 900 01 Rev H February 2013 Return to Section Topics 1 43 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 35 is an example of the KITE interface default project with the vds id test selected Figure 1 35 KIT
350. n Time Per Point OF 1e 008s 1 0E 02 2 0E 02 3 0E 02 4 0E 02 5 0E 02 Period Se 006s Frequency 200000Hz Points Dej a Gaussian waveform An example of a Gaussian waveform using the default settings is shown in Figure 5 17 The waveform for this example is named GAUSSIAN1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 17 Gaussian waveform default settings Waveform Generator Waveform Type Gaussian pel Settings Number of Points 500 Base Offset V Variance 0 2 Mean Voltage Vv Stdn Dev Min 2 Std Dev Max Notes 4 At Given Time Per Point OF 1e 008s 2 0E 00 1 0E 00 0 0E 00 1 0E 00 2 0E 00 Period Se 006s Frequency 200000H2 Paints Ramp waveform An example of a ramp waveform using the default settings is shown in Figure 5 18 The waveform for this example is named RAMP1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 5 How to Generate Basic Pulses Figure 5 18 Ramp waveform default settings Waveform Generator Waveform Type Ramp z Waveform Name RAMP1 Settings Points Pe
351. n Tools Window Interactive Test Module Vt MaxGm x SitefP f Flash Switch ME FlashSubsite ME 4Teminal FloatingGate A E Conpin Pulse E Program E Erase E Fast Program Erase E Open VPU Relay E Conpin DC JE MMG MIE 8Teminal FloatingGate MIE Conpin Pulse 8 ME Program 8 M E Erase 8 ME Fast Program Erase 8 lt K KI KI KI KIRK ConPin Pulse or ConPin DC test This test is used to connect pulse or SMUs to the DUT Figure 3 110 shows the definition tab for ConPin Pulse The parameters are typed into the UTM parameter table with the Pin1 Pin2 etc determining where the instrument SMU VPU signals connect It is also possible to configure a single switch matrix card using the GUI Click the GUI button shown in Figure 3 110 to see the dialog in Figure 3 111 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 110 ConPin Pulse test Definition tab Flash Switch Keithley Interactive Test Environment Conpin Pulse 1 1 E File View Project Run Tools Window Help i gt gt Bex a eo G zT ST H Definition Sheet Graph Status Wee Aash Switch MZE FashSubste Formulator User Libraries Matrixulib ae D on el Output Values User Modules
352. n current Vgs ld from the whole waveform 5 To ensure a determinate number of pulses are applied to the DUT the period must be set to gt 10 ms Wider pulse widths require a longer period If the period is too short pulse s will not be measured and will cause the UTM to hang requiring KITE to be manually halted ad Figure 3 125 Slow single pulse hardware setup block diagram NOTE This configuration can handle pulse widths 100ns which is too wide to use Remote Bias Tees SMA Splitter Scope Channel 1 lee or 4200 SCP2 Saula Trigger 5B Channel 1 3 port power Output divider Pulse Generator Trigger 4205 PG2 i Channel 2 Output Table 3 30 Key parameters Slow Single Pulse Charge Trapping Parameters Range Specification Application Pulse I V like application Rise Fall time Variable 10 ns 10 us Pulse width 5 us 1 ms single pulse Pulse amplitude 0 5 V Base voltage 5V Load impedance 50 Qor1MQ Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 126 Slow single pulse hardware connection Model 4200 SMU 1 Model 4200 PG2 Model 4200 SMU 2 Scope Card ia Model 4200 SCS Instrument Slots or er OES White SMA Cable 2m 6ft male to male 1of6 INSTRUMENTS sLoT SLOT 4 SENSE l 3 port a ee a power divider F
353. n to Section Topics uM 219M 3 39 Section 3 Common Device Characterization Tests JE Fi Ce gt gt ec Fax 7 eo A Site i G PulselV Complete Keithley Interactive Test Environment vgs id 121 fe J lo Vew Projet Run To 8x Model 4200 SCS User s Manual Running vgs id DC ITM The default settings sweep the pulses on the gate from 0 2 V in 50 mV steps and set the drain voltage to 1 V see Figure 3 42 When changing these settings note the voltages and step size used so the same settings can be used in vgs id pulse 1 Double click vgs id ITM in the project navigator 2 Click the green Run button The Vgs id curve will be generated and displayed on the graph Figure 3 42 Default definition and typical graph for vgs id Pulsel Complete Keithley Interactive Test Environment vgs id 121 je View Project Run To JE Fi Ce gt gt ce Fex 7 eo A ini Pise C Definition Sheet Graph Status aek o E Meld PulselV Complete Defintion Sheet Graph Status 03 03 2007 17 41 20 KEITHLEY 503 Femusice Ting E ConBione Output Valves Speed Namal Mode Dian ou FORCE MEASURE V ooe fone z ses E 3 40 E vosidpuls E vdsitpus E vosidpute IE scope shot J E vdsidpuie JIS AutocaSc
354. nce Table r Device Library C AS4200 kiuser Devices kd BJT 4 Capacitor E Diode 3 General G JFET MOSFET Resistor capacitor 0neAAAA composite 1 rTrom7nmovoouorroa Move Up Submit gt gt Move Down Submit As gt gt By Ee subsite_b 3 If you wish to submit the device plan to a Device Library directory other than the default Device Library directory 6 select the alternate Device Library directory in the Device Library box of the subsite plan window NOTE Only the default Device Library directory is available in the Device Library box unless other Device Library directories were previously added through the directories tab of the KITE Options window Access the KITE Options window by selecting Options on the Tools menu through the Tools gt Options menu 4 Inthe Device Library directory tree select a destination folder that is appropriate for the device s 5 In the Device Sequence Table of the subsite plan window select the devices s to be submitted NOTE You may select and submit multiple device plans at the same time To select a sequential group of device plans hold down the Shift key while clicking the first and last device plan in the sequence To select a group of individual device plans hold down the Ctrl key while clicking the individual device plans Figure 2 36 shows the composite device selected in the Device Sequence Table and the General d
355. ndo Delete Properties Views Address 4 C C 4 4200 kiuser Devices MOSFET x Folders x Name ifi A Desktop E 3terminal n fet bmp Bitmap 8 26 99 9 57 AM Keithley 4200 5Cs q a 3terminal n fet kdv 1KB KDY File 8 26 99 9 45 AM The three files that define E a 3 Floppy 4 3terminal n fet big Bitmap 6 26 99 9 55 AM Elgg 4200ses C F 3terminal p fet bmp 1KB Bitmap Image 8 26 99 10 00 AM H E Program Files 3terminal p fet kdv 1KB KDV File 8 26 99 9 45 AM aS 54200 SS 3terminal p fet big EKB Bitmap Image 8 26 99 9 59 AM kiuser 3 Aterminal n fet bmp 1KB Bitmap Image 8 26 99 10 02 AM a Devices a 4terminal n fet kdv 1KB KDV File 8 26 99 9 46 AM Bi 3 Atermina n fet big 6KB BitmapImage 8 26 99 10 03 4M aig SS terminal p fet bmp 1KB Bitmap Image 8 26 99 10 01 AM General a Sterminal p fet kdv 1KB KDY File 8 26 99 9 46 AM f Stet 3 Aterminal p tet big 6KB BitmapImage 8 26 99 10 04 AM Resistor H E Projects H E Tests E ustlib sys Temp 1 4 Winnt x 4 gt 12 object s 25 3KB Disk free space 7 77GB My Computer A How to create and add a new device To create a new device you must create three files The Keithley device kdv file e The small bitmap 16 x 16 dpi bmp file for the project navigator device icon e The large bitmap 120x100 dpi bmp file for the ITM definition tab device graphic The kdv file can be created or modified using text editing software such as Microsoft
356. near stress timing Linear After first stress cycle all stress times are identical l Log After first stress cycle all tress times increase logarithmically Specify the Specify KITE calculates cumulative stress amount of time Linear times for the cycles seconds based seconds that on the values that you enter First devices are Stress Time Last Stress Time etc stressed during 1st cycle Stress Measure Cycle Times aog Specify the total stress time for WKK AE Subsite Plan Specify the total If desired specify a measurement delay number of seconds after each stress interval to stresses 128 allow each device to equilibrate before maximum measuring its parameters Last Stress Time is the total amount of stress time that will have passed when the last stress is completed 4200 900 01 Rev H February 2013 Specify the amount of time seconds that devices are stressed during 1st cycle Specify total First Stress Time amount of time 2 seconds that devices are stressed during the study Specify the number of stresses in each decade gt 128 stresses allowed maximum in all decades combined See the simpler example at right four decades of stress times and 1 stress decade Specify KITE calculates cumulative stress Log times for the cycles seconds based on the values that you enter First Stress Time Total Stress Time etc
357. ned as follows Initial test conditions SMU4 outputs a DC voltage to turn on the control devices for the array This connects instrumentation at the top of array to the flash memory cells SMU2 and SMU3 are set to output 0 V This ensures that only the Cell 2 will be turned on during pulse stressing Pulse stressing The output relay for SMU1 is opened and the gate and drain of Cell 2 are pulse stressed by PG2 1 ch 1 and PG2 2 ch 1 Disturbed cell testing The outputs for the PG2s are turned off and their output relays are opened SMU1 and SMU2 are then used to perform a DC Vg Vd sweep on Cell 1 to determine Vr Using a switch matrix A limitation of the no switch direct connect test configuration shown in Figure 3 91 is that only three devices can be measured The test would have to be manually reconfigured or re cabled to test other devices Without a switch matrix the number of adjacent cells that can be measured is limited Therefore it is recommended that a switch matrix be used for disturb testing as shown in Figure 3 97 Using a switch matrix allows the flexibility of routing pulse and DC signals without having to make connection changes Also this type of structure uses a multi pin probe card that provides an additional opportunity for mapping test resources to DUT pins For example a SMU can be shared across multiple device terminals where the required voltage is the same Return to Section Topics 4200 900 01 R
358. nnected to SMU1 for DC stress NOTE Device Pin SMU connections In this area of the window the 2 pin assignment and the checked box for VPU indicates that the gate is connected to channel 2 of the VPU If the gate is connected to Channel 1instead of the VPU the pin assignment must be set to 1 The 1 pin assignment and the unchecked box for VPU indicates that the drain is connected to SMU1 The 0 assignments for the source and bulk indicate no connec tion Stress conditions In this area of the window the AC stress voltage on the gate is set to 1 V This is the high level for VPU pulse output The DC stress on the drain is set to 1 VDC Since there are no connections for the source and bulk these stress voltages are set to 0 V The Gate Duty Cycle is set to 50 This means the high level 1 V pulse will be applied for half 50 of the pulse period and the low level will be applied for the other half Stress measurements This area of the window indicates that no stress measurements will be made Gate Stress selection is disabled NOTE The VPU does not measure in this instance e The stress measurement settings for the source and bulk are not relevant since there are no SMUs connected to the device NOTE The AC stress settings support multiple pulse cards in the chassis VPU Common Settings The rest of the settings for the VPU are made from the VPU Common Settings window This window shown in Fi
359. nnels for all installed pulse cards in the Model 4200 SCS With the output on the square box will turn red Clicking the red box turns off the outputs of all pulse cards Waveform types KPulse provides the following fundamental waveform types to use as the building blocks for custom file arb Sine waveform e Square waveform e Triangle waveform e Custom waveform e Calculation waveform e Noise waveform e Gaussian waveform Ramp waveform e Sequences waveform As explained in Figure 5 7 a waveform is created using the Waveform Generator After selecting and configuring one of the above waveform types the waveform is placed into the Scratch Pad NOTE The period for the waveforms is determined by the Time Per Point setting in the Arb Generator tab step 4 in Figure 5 8 Sine waveform An example of a Sine waveform using the default settings is shown in Figure 5 10 The waveform for this example is named SINE1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad 5 12 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 5 How to Generate Basic Pulses Figure 5 10 Sine waveform default settings Waveform Generator Waveform Type Sine _y Waveform Name SINE1 Settings Points Per Cycle 500 Number Of Cycles 2 Amplitude V
360. nu of the KITE window select graph settings The menu that appears is identical to the pop up menu shown in Figure 2 30 Understanding the graph settings menu Each item of the graph settings menu is summarized below 4200 900 01 Rev H February 2013 Define graph Defines the parameters to be graphed and the axes on which these parameters are to be graphed For more information refer to Defining data to be graphed on page 2 43 Auto scale Automatically scales all axes at a single chosen time For more information refer to the Reference Manual Automatically scaling the axes page 6 217 Axis properties Opens the Axes Properties window which is the main access point for graph scaling and scale formatting For more information refer to the Reference Manual Defining the axis properties of the graph page 6 213 Cursors Opens the Cursors window from which you can select and format cursors that display the precise numerical coordinates of specific points on the plot lines For more information refer to the Reference Manual Numerically displaying plot coordinates using cursors page 6 229 Line fits Allows you to fit lines directly to Graph tab plots Up to two times Select from the following types Linear line through two data points Regression regression line Exponential Logarithmic Tangent Zoom in Allows you to enlarge and examine a small selected part of the graph For more information refer to the R
361. nvalid value for VdStop 4 Invalid value for VdStep 5 Invalid value for PulseWidth 6 Invalid value for PulsePeriod 7 Invalid value for AverageNum 8 Invalid value for LoadLineCorr 9 Array sizes do not match 10 Array sizes not large enough for sweep 11 Invalid VPUId 12 Invalid GateSMU 13 Invalid DrainSMU 14 Unable to initialize PIV solution 15 Invalid GateSMU Range 16 Invalid DrainSMU Range vgsid_pulseiv Description Connection 4200 900 01 Rev H February 2013 The vgsid_pulse sweep is used to perform a pulsed Vg lg sweep using the 4200 PIV package This test is similar to a typical DC Vg Id but only two sources are used gate VPUID pulse channel 1 and drain DrainSMU The gate is pulsed but the drain is DC biased Measurements are made with the 2 channel scope card Set the appropriate values for the Vgs Id parameters Table 3 13 Table 3 14 and Table 3 15 contain outputs and return values respectively The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the 4200 RBT The RBT connected to GateSMU with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 33 Return to Section Topics 3 53 Section 3 Common Device Characterization Tests Model 4200
362. occur Default user director C S4200 kiuser By default all of the sample projects and standard libraries included with KTE Interactive are stored in the C S4200 kiuser directory as illustrated in Figure 2 15 This folder is referred to as the default user directory 4200 900 01 Rev H February 2013 Return to Section Topics 2 25 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 15 Default user directory I Exploring C S4200 kiuser Jof x File Edit View Go Favorites Tools Help is oy Ml ee fe iews Back Forward Up Cut Copy Paste Undo Delete Properties Address C S4200 kiuser Fal Folders x Name Size Type Mod ied A Desktop Devices File Folder 5 1 00 12 50 PM E Projects File Folder 5 1 00 12 50 PM Tests File Folder 4 19 00 4 37 PM E usib File Folder 5 1 00 12 51 PM Keithley 4200 SCS f a 3 Floppy amp E ga 4200ses C w Program Files a 4200 9 Devices a Projects H Tests 9 usib Gl sys E Temp a ga Winnt H D Printers Control Panel Scheduled Tasks Ej 2 Web Folders El z5 Network Neighborhood gy Recycle Bin gt 4 object s 0 bytes Disk free space 7 77GB My Computer A Default user directory Note however that KITE projects device libraries and test libraries can be stored and shared on any accessible disk drive including a network
363. odel 4200 SCS User s Manual Section 3 Common Device Characterization Tests 16009 Required bias SMU is not available in current configuration 16010 Required shared SMU is not available in current configuration 16011 Required VPU is not available in current configuration 16012 PrePulseDelay value is out of valid range 16013 PrePulseDelay value has to be in 10 ns increments 16014 TransitionTime value is out of valid range 16015 TransitionTime value has to be in 10 ns increments 16016 Pulse level value is out of valid range 16017 Pulse width value is out of valid range 16018 PostPulseDelay value is out of valid range 16019 PostPulseDelay value has to be in 10 ns increments Troubleshooting Check the Error codes for additional information No pulse output If pulses are not being output please check the following 1 Ensure proper cabling The trigger interconnections between the pulse cards must match the diagram shown in Figure 3 95 Figure 3 96 or Figure 3 97 The TRIGGER OUT from the pulse card in the lowest numbered slot right most slot must be cabled into TRIGGER IN of the same card as well as the TRIGGER IN of all adjacent pulse cards All size values PulseVoltagesSize PrePulseDelaysSize and so on must match the value of NumPulseTerminals As shown in Figure 3 93 NumPulseTerminals four and there are four entries in e PulseTerminals e PulseVoltages e PrePulseDelays e TransitionTimes e PulseWidt
364. of DC GateVProg_DC Pulse double The programmed gate voltage either supplied by the pulse card or Gate SMU Table 3 18 Return values for Vgid_DC_Pulse_pulseiv Value Description 0 OK 1 Invalid value for Vds 2 Invalid value for VgStart 3 Invalid value for VgStop 4 Invalid value for VgStep 5 Invalid value for PulseWidth 6 Invalid value for PulsePeriod 3 58 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 18 continued Return values for Vgid_DC_Pulse_pulseiv Value Description 7 Invalid value for AverageNum 8 Invalid value for LoadLineCorr 9 Array sizes do not match 10 Array sizes not large enough for sweep 11 Invalid VPUId 12 Invalid GateSMU 13 Invalid DrainSMU 14 Unable to initialize PIV solution 15 Invalid GateSMU Range 16 Invalid DrainSMU Range scopeshot_cal_pulseiv Description The scopeshot_cal_pulseiv routine is used to display a single Pulse IV scopeshot_pulseiv This routine is useful to understand the basic source and measure concepts behind the Pulse IV methods for pulse vds id and vgs id Measurements are made with cable compensation values applied to them and load line compensation can be used if desired Connection The source and body well of the DUT must be shorted together and connected
365. of its children If a particular project node is unchecked the project run button will be grayed disabled and this particular project node cannot be executed Project defined Users interact with KITE in the context of project A project specifies the start to finish repetitive and nonrepetitive actions and test locations involved in evaluating a semiconductor wafer or other collection of circuits Projects are both created and executed using the KITE GUI Return to Section Topics Model 4200 SCS User s Manual Project plan Defines and sequences all subsites to be tested This node allows resequencing of all subsite nodes There is only one project plan per KITE project Subsite plan Defines and sequences all device plans to be tested This node allows resequencing of all device nodes Device plan Defined and sequences all tests for a specific device This node allows resequencing of all tests Interactive test module ITM e A graphical test definition that requires no programming e All test definition data and graphing is located here Can be used for all instrumentation internal to the 4200 User test module UTM A test definition that is a call into user module written in C All test definition data and graphing is located here Can be used for all instrumentation internal and external to the 4200 Typically used for switch matrix connections prober control and all other external G
366. of the Reference Manual see chargepumping user library You can use the chargepumping User Library and an appropriate User Module to create a new UTM test in a project plan Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests How to perform a Charge Trapping test NOTE The chargetrapping project uses the 4205 PG2 pulse generator card and Model 4200 SCP2 scope card The Model 4225 PMU can also be used for charge trapping see chargepumping user library in Section 16 of the Reference Manual Slow single pulse charge trapping high K gate stack The key to using the single pulse method is to look at the charge trapping and de trapping behavior within a single well configured gate pulse see Figure 3 124 The gate pulse usually starts in a position that discharges the gate capacitor before the voltage ramp begins This is to clean up any residual charges that might be trapped in the gate Then during the rise time of the voltage ramp the corresponding drain current response is captured allowing a Vgs ld curve to be formed Slow single pulse refers to rise and fall transition times of 100 ns minimum with a pulse width of at least 1 ps These relatively slow pulse parameters mean that the RBT are not used and a simple splitter can be used for monitoring the drain current pulse For each measurement a pulse is applied
367. ogram Erase and or Fast Program Erase UTMs This test provides the V7 but does not determine an appropriate or target Vz that is usually provided by historical performance a review of the device structure or the device engineer 1 Enter the voltage values for each SMU Defaults have a voltage sweep on the gate a fixed DC bias on the drain and 0 V or a GNDU signal for the source and bulk 2 Once the test is run review the graph or sheet results Running the ConPin Pulse or ConPin DC UTM Switch projects only This test routes the desired pulse or SMU signals to the DUT by closing switches on a switch matrix card See Switch matrix connection to array DUT for connection and switch matrix setup instructions The UTM entries for TermldStr1 TermldStr8 Pin1 Pin8 define which instrument SMU or VPU channel get connected to which output pin 1 Enter a value for OpenAll The default value is 1 that opens all switches The remaining parameters define which switches to close If more than 8 closures are required for a test use two ConPin tests setting the second ConPin test OpenAll 0 to ensure the first ConPin switch settings are not cleared See Figure 3 110 for the screenshot of the ConPin parameters 2 Enter values for TermldStr1 and Pin1 This first pair of parameters determines which instrument either SMU or VPU channel gets output For a SMU to be output on the 48 output of the switch matrix TermldStr1 SMU1 and Pin1 1 If no
368. ol and data connections page 4 21 CAUTION Asserting the interlock will allow the SMU and preamp terminals to become hazardous possibly exposing the user to high voltage that could result in personal injury or death SMU and preamp terminals should be considered hazardous even if the outputs are programmed to be low voltage Precautions must be taken to prevent a shock hazard by surrounding the test device and any unprotected leads wiring with double insulation for 250 V Category I Probers To learn how probe stations are controlled by Keithley Instruments Model 4200 SCS through user modules refer to the Reference Manual Using a Probe Station Appendix G Advanced connections To learn more about advanced connections for controlling a switch matrix sequencing test on multiple devices and customizing a user test module UTM refer to the Reference Manual Advanced Applications Appendix O How to run a basic test Boot the system and log in To boot the system and log in 1 Make sure the power switch is in the O out position The POWER switch is located on the front panel in lower right hand corner Plug the male end of the line cord into a properly grounded AC line power receptacle Turn on the Model 4200 SCS by pushing in the POWER switch to the I in position When prompted simultaneously press Ctrl Alt Del At the KIUSER prompt press ENTER There is no password for this account ak wn CAUTION When first star
369. ol an external pulse generator ssseeeesssserssseerrrsserrrnsssenen 4 27 Test system CONNECTIONS eee ceeee ee ettee cette tene eee etetaeeeeeetaeeeeeettaeeeeenteea 4 28 KCON SUNY cece ds ce cue aa aa ehd sien Caer aadaas Aa duced 4 28 Open the ivpgswitch PHOPSCE ca 5 c00ccacnceccccessaacacectsacecdcvexthecendecsnacadectenccece 4 31 Desciption Oi teste caii aiaa aa sedge daaa aaia ada Taa 4 32 ailea E A E A E A A doamesuagehs oensesdeeesee dee 4 32 pgu trigger tOSt cece e ee ceeneeeceeeeeneeeeeeeeeneesesesenseeceaeeeneeceeeseeneeeeeenenaaes 4 34 Compare the test PES UNG anaidai a aane daidai 4 35 How to control an external CV analyzer essseeessseeeesseerrsssrrerrsssrernsssenens 4 37 CONNECUONS oaas ea aa a E aaaea aaa 4 37 KC ON SOD oa aia aaa iaaa a aa iai 4 38 Greate d now POISE ooa aia a Aaaa a aa 4 39 Add 8 BUDS PEN noiai aieiaa aaaea aiai 4 40 Add a device plan c cccccccceeeeeeceeeeeeeeaceeceeeeeeeeeseeeasseeaaneaeeeeeeeeeteess 4 41 aT E E E E O E 4 42 Modifying the cvsweep UTM eee eeeneecceenceeeeeeeeaaaeeeseeeaaeeeeeeeaaeeeeeeeaees 4 43 FSU URS LS oc recta E E A T 4 44 What if my equipment is not listed in KCON 2 ececceeeeeeeeeeeeteteeeneees 4 44 4200 900 01 Rev H February 2013 iii Table of Contents Model 4200 SCS User s Manual 5 How to Generate Basic Pulses 0 ccccceecceeeeeeeeeeeeeteeeeeeeeneeeetenenees 5 1 Keithley Pulse Application KPUulSe
370. onnector compatible with many types of probe manipulators Direct connection to single DUT Cabling instructions for direct connect to single DUT are below Refer to Figure 3 95 for the following procedure NOTE In all of the following steps apply sufficient torque using the wrench 4200 900 01 Rev H February 2013 Return to Section Topics 3 113 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 114 These instructions are compatible with the following projects in the Projects _Memory folder NOTE SOEMNOD 11 12 13 14 15 16 17 18 Flash NAND e Flash NOR e FlashDisturb NAND e FlashDisturb NOR e FlashEndurance NAND e FlashEndurance NOR Set up the Model 4200 SCS referring to the Getting Started page 1 1 Reference Manual Installation page 2 1 and Connections and Configuration page 4 1 For examples of cables adapters and connectors see Reference manual Figure 11 35 Take one of the SMA Tees and connect the two shortest 4 25 inch or 10 8 cm SMA cables to either end Connect this assembly to the right most PG2 card that is the PG2 card in the lowest numbered slot First connect one of the SMA cables to TRIGGER OUT Connect the SMA tee to TRIGGER IN Then connect the other SMA cable to TRIGGER IN on the second PG2 card This second card is the card to the immediate left of the card in step 3 If the FLASH package consists of more than two P
371. ons sssseseeseereereerreerrerrerrrerrerreer 1 10 Leveraging the Default Project 0 ccee 3 9 Line power receptacle 1 6 Line item descriptions for a kdv file 2 29 Locate and Run the vds id test module 1 44 Measure settings ccccccccseeeeeeeeeeeeeeeeeeneeees 3 16 Measurement Hardware SMU with Model 4200 PA overview Basic characteristics Voltage characteristics 0 0 1 18 Model 4200 CVU card cccccccccecceesteeeeeeeeeeees 1 21 Force measure timing c0 ceeeeeeee 1 24 Measurement Circuit 0 ccccceeeeseeeeeeeee 1 22 Measurement functions ccceeeeeeeeeeee 1 22 Measurement overview cceeeeeeeeeeeees 1 21 Model 4200 PA COMMECIOMS scarancaivacusenbea san cormncneanneatasamceaaaans Model 8101 PIV test fixture Model 8101 PIV test fixture Models 4200 SMU and 4210 SMU COMMOECTOMS lt pisesinasragioneansnainasneemnertniaabecshaneniens current characteristics ccccccceeeeeeees voltage characteristics Modified project plan settings NBTI negative bias temperature instability 3 75 NBTI process flow serenissimi 3 94 New Project menu selection ceeeeee 4 39 Open KITES runari ieee 1 43 Open KITE and the ivswitch project 4 11 PGU initialization soeone 4 33 PGU stress pulse specifications 0 4 34 pgu trigger test trigger
372. ontrol Other Instruments with the Model 4200 SCS In the Calc spreadsheet click cell A1 to select it and then press Ctrl V This pastes the copied columns into the Calc spreadsheet This after stress data is now available to be graphed In the Calc spreadsheet rename the Drainl and GM columns to distinguish them as after stress AS data For example change Drainl to Drainl AS and change GM to GM AS Click the Graph tab for the present test before stress In an open area of the graph right click the mouse to open the graph menu In the graph menu click Define Graph to open the graph definition window In the graph definition window click the Y1 Drainl AS cell and the Y2 GM AS cell to select them and click Ok The graph will now show the overlaid data From the graph menu use the Legend and Graph Properties Series items to add a legend and to change the line properties of the graph if desired How to control an external CV analyzer This tutorial demonstrates how to control a Keithley Model 590 CV Analyzer to acquire capacitance verses voltage CV data from a MOS capacitor This tutorial also demonstrates how to create a new KITE project The new project will contain one UTM that is connected to a standard CV user module supplied with each Model 4200 SCS The CV Analyzer will apply a linear staircase voltage sweep to a capacitor A capacitance measurement will be performed on every voltage step of the sweep Figure 4 57 shows
373. orts the 4200 PIV A package using the 4200 RBT For this package all test parameters and limits are given below except the 4200 PIV A with the 4200 RBT has a max pulse width of 150 ns not the 250 ns of the 4205 RBT All voltage levels specified below assume a 50 Q DUT load The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the 4205 RBT The RBT connected to GateSMU the RBT with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be con nected to the drain Use either G S G probes for RF structures or use DC probes with the 4200 PRB C adapter cables for DC structures Set the appropriate values for the Vds ld parameters Inputs outputs and returned values are provided in Table 3 10 Table 3 11 and Table 3 12 Inputs for Vdid_Pulse_DC_Family_pulseiv Input Type Description VgStart double The starting step value for Vg For DC only sweeps VgStart must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT For pulse and pulse and DC Sweeps VgStart must be between 5 V to 5 V VgStop double The final step value for Vg For DC only sweeps VgStop must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT For pulse and pulse and DC Sweeps VgStop must be between 5 V to 5 V VgNumSteps
374. p 0 025 V 0 2 V pp 0 1V 0 1 V pp 0 05 V Input coupling Input coupling which is used to pass or block the DC component of an input signal can be set to AC or DC e DC coupling passes all frequencies e AC coupling blocks low frequencies with high input impedance 1 M Q selected AC coupling attenuates frequencies below 10 Hz with low input impedance 50 Q selected AC coupling attenuates frequencies below 200 kHz Input filter For the Model 4200 SCP2 scope A 20 MHz low pass analog filter can be applied to the input signal of each channel The 20 MHz setting applies the filter and the bypass setting bypasses the filter The Model 4200 SCP2HR does not have the low pass filter Input attenuation The input signal for each channel can be attenuated by a factor of 0 9 to 1000 0 Acquisition sample rate The acquisition sample rate for the two input channels can be set in 1 2 5 or 5 steps e Model 4200 SCP2HR 10 k S s to 200 M S s one interleaved channel can be sampled at 400M S s e Model 4200 SCP2 2 5 k S s to 1 25 GS s one interleaved channel can be sampled at 2 5GS s Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Sweep mode triggering There are two sweep modes to trigger scope measurements Normal or auto In the normal mode an internal or external trigger for
375. pA full scale 4200 900 01 Rev H February 2013 Return to Section Topics 1 17 Section 1 Getting Started Table 1 3 SMU with Model 4200 PA current characteristics Model 4200 SCS User s Manual Function 4200 SMU with 4200 PA 4210 SMU with 4200 PA Current source ranges full scale set resolution 1 05 pA 50 aA 10 5 pA 500 aA 100 5 pA 5 fA 1 05 nA 50 fA 10 5 nA 500 fA 105 nA 5 pA 1 05 uA 50 pA 10 5 pA 500 pA 105 pA 5 nA 1 05 mA 50 nA 10 5 mA 500 nA 105 mA 5 pA 1 05 pA 50 aA 10 5 pA 500 aA 100 5 pA 5 fA 1 05 nA 50 fA 10 5 nA 500 fA 105 nA 5 pA 1 05 pA 50 pA 10 5 uA 500 pA 105 pA 5 nA 1 05 mA 50 nA 10 5 mA 500 nA 105 mA 5 pA 1 05 A 50 pA Current measurement ranges full scale nominal resolution 1 05 pA 10 aA 10 5 pA 100 aA 100 5 pA 1 fA 1 05 nA 10 fA 10 5 nA 100 fA 105 nA 1 pA 1 05 uA 10 pA 10 5 pA 100 pA 105 pA 1NA 1 05 mA 10 nA 10 5 mA 100 nA 105 MA 1 pA 1 05 pA 10 aA 10 5 pA 100 aA 100 5 pA 1 fA 1 05 nA 10 fA 10 5 nA 100 fA 105 nA 1 pA 1 05 pA 10 pA 10 5 uA 100 pA 105 pA 1 nA 1 05 MA 10 nA 10 5 mA 100 nA 105 MA 1 pA 1 05A 10 pA Voltage characteristics Table 1 4 summarizes a SMU with Model 4200 PA voltage characteristics that are identical to those for the SMUs alone Table 1 4 SMU with Model 4200 PA voltage characteristics 4200 SMU with 4210 SMU with
376. page 6 270 Graph properties Comment Opens the Comment window which allows you to add and format a comment Same function as comment in the main menu Data variables Opens the Data Variables window from which you can configure the display of up to four data variables along with the corresponding names Essentially the same as Data Variables in the main menu except that it allows you to open a Data Variables window without toggling the data variables display Graph area Opens the graph area menu which allows you to change the graph foreground and background colors toggle the time and date display and make the graph 100 monochrome For more information refer to the Reference Manual Changing area properties of the graph page 6 277 Legend Opens the legend properties window which allows you to reformat the font text or background color or border of the legend For more information refer to the Reference Manual Adding a legend page 6 271 Series Opens the Data Series properties window from which you can define color line pattern plot symbol and line width for each plot For more information refer to the Reference Manual Defining the plot properties of the graph colors line patterns symbols line widths page 6 224 Test conditions Displays the primary test conditions used to obtain the data in the graph For more information refer to the Reference Manual Displaying test conditions page 6 264
377. ph tab 1 Open the ITM or UTM window for the selected test by double clicking the test in the project navigator 2 When the ITM or UTM window opens click the displayed Graph tab The Graph tab opens Figure 2 29 displays an unconfigured graph for the vds id ITM The time and date at which the data was generated are displayed in the upper left corner However the axes are labeled and scaled generically because no project data has yet been assigned to the axes 4200 900 01 Rev H February 2013 Return to Section Topics 2 39 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 29 Example of an unconfigured Graph tab Definition Sheet Graph Status 02 1 0 2000 08 37 25 KEITHLEY ME vdsidt 1 The vds id ITM is one of the ITMs that comes installed on your Model 4200 SCS with sample data including a configured graph Reference manual Figure 6 6 The vds id ITM has been used for illustration purposes through much of Section 6 including construction of the u_build project Reference Manual Building a completely new Project Plan page 6 47 The definition tab for the vds id ITM is shown in multiple places including at the beginning of this section Accessing the Graph tab windows Several Graph tab windows control the properties of a graph You can access these windows in two ways e Use the graph settings menu When defining a graph you typically access all Graph tab windows usin
378. play the Graph Settings menu Right mouse click anywhere in the graph area DK Clear Append Data OR Graph Settings From the Tools menu select Graph Settings Options SMU Auto Calibration C U Connection Compensation CVU Confidence Check Auto Scale Axis Properties Cursors Line Fits Define Graph o Device Clear Zoom In Data Series Properties Comment Data Variables Series Data Draini 1 J Click to select 3 Legend Box v Legend est Conditions Pattern Solid v Title Click Graph Properties and then Comment Series to change the properties Data Variables Crosshair for each of the four series Sava As a Color Synchronize Graphs Width 2 pat Move Test Conditions Reset Title Resize Cancel Shape Dot To learn more about Data Series Properties refer to the Reference Manual Defining the plot properties of the graph colors line patterns symbols line widths page 6 224 1 48 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Firmware upgrade When the system software is updated you should upgrade firmware for each Model 4200 SCS instrument Before starting the firmware upgrade make sure the Model 4200 SCS is powered by an uninterruptable power source see warning Refer to the release notes for detailed instructions on the firmware upgrade of Model 4200 SCS instruments including
379. ppropriate axes by selecting the appropriate X Y1 and Y2 cells 2 44 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 32 Configured Graph Definition window for a vds id ITM Graph Definition Clear All Axis Properties Cancel 4 Click OK The graph now displays plots of the selected parameters In Figure 2 33 the vds id graph now displays scaled axes and a series of four plots based on the selections shown in Figure 2 32 The family of curves corresponds to four sets of data generated by drain voltage sweeps at four different gate voltages Figure 2 33 View of vds id graph after Graph Definition window configuration Definition Sheet Graph status 02 10 2000 08 37 25 Draini 1 Drainv 1 JE vdsidtt 1 The axis labels shown in Figure 2 33 are not yet optimally named KITE inserted the default data sheet column labels for sweep 1 of the Data Series For more information about renaming the axis labels refer to the Reference Manual Defining the axis properties of the graph page 6 213 4200 900 01 Rev H February 2013 Return to Section Topics 2 45 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual KITE library management Submitting devices ITMs and UTMs to libraries If you create a customized device or test and wish to reuse it in more than one place in other
380. pproximate voltage values and both pulse width and pulse height will vary depending on device structure and process details There are many other ways to provide similar electric fields and balance performance across a variety of parameters program or erase speed retention longevity adjacent cell disturbance endurance and others Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 82 Fowler Nordheim tunneling program and erase ov 18 20V Tunnel Oxide cof Tunnel Oxide col O i N pari Open Open 0001 Open _f O n O s f B ov 19 21V Program using FN tunneling Erase using FN tunneling Figure 3 83 Hot Electron Injection HEI program and erase sov Tunnel Oxide ce Ficarewee ce ov 5 7V OV or GND FG oo 10 14V Open OOJ a PONE 0000 NG OV ov Program using hot electron injection Erase using HEI The flash projects support two methods for performing the switching between the pulse and measure phases of the typical flash memory test The first is the typical method using a switch matrix to route the pulse or DC signals to the DUT see Figure 3 84 Using the switch matrix is more complicated but provides flexibility for certain tests and test structures that use arrays The second method utilizes the on card isolation relays on both the
381. protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category II as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category and must not be directly connected to mains voltage o
382. put The CvSweep590 routine performs a capacitance vs voltage CV sweep using the Keithley Model 590 CV Analyzer If desired an offset correction measurement is taken and the cable compensat i fg cvsweep 4200 900 01 Rev H February 2013 Return to Section Topics 4 43 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual 2 Click the Definition tab and make the desired parameter changes to the test NOTE For details about the cvsweep UTM refer to the Reference Manual Appendix C Open and execute cvsweep UTM Executing the test Since this new project has only one subsite plan and only one device plan the test can be run from any level in the project navigator To run the cvsweep test click the green Run button After the test is finished use the sheet and graph tabs to view and analyze the results NOTE The Model 4200 SCS also supports the Keithley Instruments Model 595 Quasistatic C V Meter and the Keithley Instruments Model 82 WIN Simultaneous C V System For more information refer to the Reference Manual KI595 CV Analyzer Properties and Connections tab page 7 24 and Appendix E Using a Keithley Model 82 C V System What if my equipment is not listed in KCON 4 44 A typical test setup often involves several instruments performing sourcing measuring or auxiliary functions all connected to a common communications bus typically
383. put DBL_ARRAY 4 4 10 PulseWidthsSize Input INT 4 1 PostPulseDelays Input DBL_ARRAY 4 5 12 PostPulseDelaysSize Input INT 4 B NumPulses Input INT 1 14 NumSMUBiasTerminals Input INT jo 5 SMUBiasTerminals Input CHAR _P 16 SMUBiasVoltages Input DBL_ARRAY 4 6 17 SMUBiasVoltagesSize Input INT 4 18 NumSharedSMUs Input INT 3 19 SharedSMUs Input CHAR_P SMU1 SMU2 SMU3 5 DESCRIPTION inf The double_pulse_flash function defines and outputs 1 8 vaveforns consisting of 2 pulses vhich have indepedent vidths end levels The waveforms are defined using line segments segment arb mode of the 4205 PG2 The waveform can be defined for just a program lor erase pulse or a waveform combining both program and erase cycles for up to 8 independent pulse channels 8 naxinun channels vith four 420S PG2 cards installed in the 4200 chassis The single_pulse_flash function defines and outputs 1 8 vaveforns consisting of 1 pulse The waveforms are defined using line nts segment arb node of the 4205 PG2 The waveform can be defined for just a program or an erase pulse for up to 8 independent pulse channels 8 maximun channels vith four 4205 PG2 cards installed in the 4200 chassis This routine permits the use of SMUs and VPUs vithout a separate external switch matrix This is possible by using exsiting relays ion each SMU or VPU channel This permits a single shared ae lal 5 T ofS ProiectView E Proaram ti 1 kx 4 zA
384. r s Manual Section 2 Model 4200 SCS Software Environment Graphing the Append worksheet data You can graph Append worksheet data in using the same procedure used to graph Data worksheet data Refer to Appending curves from multiple runs on a single graph in Section 6 of the Reference Manual Deleting Append worksheets You can delete Append worksheets using the following three methods Clear Append Data method Involves the Clear Append Data toolbar button menu item e Run method Involves performing a Run execution Append Sets method Involves reducing the Project window Append Sets value The next subsection outlines advantages and disadvantages for each method Clear Append data method for deleting Append worksheets Use the Clear Append Data function to permanently delete any or all Append worksheets for a selected test test sequence or project plan either at one specific site or at all sites Advantages Perhaps the easiest most straightforward method Deletes Append worksheets without modifying the Data worksheet s e Disadvantages Final Recovery from accidental deletion is not possible The Clear Append Data method is explained in the Reference manual Figure 6 228 If there is no Append data for an ITM or UTM the Append list will be blank and the selection boxes for ITM UTM Append data will be disabled How to manage graphical test results in the Graph tab Opening a Graph tab To open a Gra
385. r types of pulse testing are possible such as charge pumping single pulse charge trapping AC stress and non volatile memory testing Because charge pumping and floating gate memory testing use a pulse source with DC measure these methods are not using pulse IV pulse source with pulse measure capabilities What PulselV Packages are available for the Model 4200 SCS PIV A Package The Model 4200 PIV A package provides pulse IV self heating for CMOS SOI for lt 45nm technology node or any device that may benefit from low duty cycle pulsed IV testing to reduce the amount of power provided to the DUT during the test The PIV A package utilizes bias tees to permit both DC and pulse IV tests without re cabling and pulses the DUT gate while DC biasing the DUT drain See Pulse IV for CMOS Model 4200 PIV A for details about using the PIV A package PIV Q Package The Model 4200 PIV Q package provides higher power pulsing than the PIV A package while also permitting voltage pulsing from a non zero bias or quiescent point The PIV Q package provides voltage pulses to both the DUT gate and drain simultaneously The PIV Q package is appropriate for pulse IV testing of LDMOS and compound semiconductor FETs HEMT pHEMT and other devices that require two channels of voltage pulsing such as some HBTs The PIV Q package also provides DC tests without re cabling See Q Point Pulse IV Model 4200 PIV Q for details about using the PIV Q package Pu
386. r Cycle 500 Number of Cycles 2 Start Voltage Vv 0 Stop Voltage V 2 Number of Steps 500 v 3 x gt Notes 0 0 At Given Time Per Point OF 1e 008s 0 0E 00 2 0E 02 4 0E 02 6 0E 02 8 0E 02 1 0E 03 Period Se 006s Frequency 200000H2 Points Dej a Sequences waveform An example of a sequences waveform is shown in Figure 5 19 The waveform for this example is named SEQ1 but can be any name that is not already used in the Scratch Pad A sequence waveform consists of the waveforms that are present in the Channel 1 or Channel 2 Sequencer Figure 5 7 shows the Sequencer for the two channels After selecting either Channel One Sequencer or Channel Two Sequencer click Preview to show the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 19 Sequences waveform Waveform Generator Waveform Type Sequences v Waveform Name SEQ1 Settings Sequencer Select Channel One Sequencer Channel Two Sequencer Voltage Vv Notes ot i At Given Time Per Point OF 1e 008s 1 0E 03 2 0E 03 3 0E 03 Period 3e 005s Frequency 33333 3H2 Points 4200 900 01 Rev H February 2013 Return to Section Topics 5 17 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual 5 18 Return to Section Topics 4200 900 01 Rev H February 2013 Symbols connect parameters for 4terminal n fet device 4 15 CVSWeG6D UTM perrimena EnEn 4 43
387. r Flash Switch kpr file to open the desired Model 4200 SCS Flash project KITE should resemble Figure 3 104 or Figure 3 109 for Flash Switch Project Touch down or connect the DUT Verify setup and connection by running Vt MaxGm test a Set appropriate voltages b Run the test by clicking the yellow and green triangle Append button c Ensure that the Vg lp and Vy results are reasonable Determine the appropriate pulse voltage levels a Review the section Pulse waveforms for NVM testing b Recall that pulse voltage levels on the gate will double i For example using PulseVoltage 2 will result in Vg 4 V for a typical high impedance 1 k Q terminal c Use oscilloscope to determine appropriate PulseVoltage values for the desired Vg and Vp making sure to use the 1 M Q input setting on the oscilloscope i Drain Connect the oscilloscope probe across the drain source of the DUT iii Use the Program and Erase UTMs to output pulses while using the oscilloscope to measure the pulse height Iterate by modifying the PulseVoltages to reach the target voltage Once the appropriate voltage levels are determined the appropriate pulse width may be determined by iteratively outputting pulses while occasionally measuring the Vr Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests a Start by using a pulse width that is shorter than the expected PW For
388. r KPulse Setup default kps File Tools Help Eo PMU1 Arb Generator l Waveform Type Pulse Segment Arb Trigger Source Software Output Mode Continuous Mode C Burst Mode Custom File Arb z Channel 1 Settings Source Range 5v Current Limit a 0 105 Pulse High v ao o o O Pulse Low v boo Rise Time s 1e 007 Fall Time s ie 007 Pulse Width s 5e 007 Pulse Delay s bp Pulse Load o t Pulse Count _ General Settings Pulse Period s Channel 2 Settings 1e 006 Trigger Out Polarity Positive om Br A F Apply Changes Immediately Reset All Source Range 5 Pulse High v 1 Rise Time s 1e 007 Pulse Width s Se 007 Pulse Load 50 Current Limit 4 foinos ie oo7 Pulse Delay s bo ao Pulse Low Y Fall Time s Pulse Count Pulse from C S 4200 kiuser KPulse Setup default kps Pulse from C S4200 kiuser KPulse Setup default kps 2 0 5 2 z saci E EEE D D a i mam i zs ss 5 5 B gt a il EEEO ere re nie cree ere rec Seer Big AE EAEE A genes 600 0E 9 1 2E 6 600 0E 9 1 2E 6 Time s Time s M Complement Mode DC Mode IV Enable Channel 1 M Complement Mode DC Mode IV Enable Channel 2 Return to Section Topics KEITHLEY 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 5 How to Generate Basic Pulses KPulse setup and help
389. r PG2s in the system For details about using a pulse card as the trigger master see the Reference Manual Pulse output synchronization page 11 29 NOTE For the master pulse card the polarity of the pulse trigger source pulse_trig_source and pulse trigger polarity pulse_trig_polarity function must be the same If you are using a rising edge trigger source the pulse trigger polarity must be positive If you are using a falling edge trigger source the pulse trigger polarity must be negative This requirement applies to all three pulse modes Standard Pulse Segment ARB and FARB NOTE When triggering multiple pulse cards in a master slave configuration changing the master card s trigger output polarity will result in a transition in the trigger output levels that may be interpreted as a trigger pulse by the other cards 4200 900 01 Rev H February 2013 Return to Section Topics 5 3 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual Standard pulse waveforms Standard pulse waveforms are configured and controlled from the pulse card tabs in the GUI Figure 5 3 explains how to use the GUI for Standard Pulse output Standard pulse waveform previewers KPulse provides a preview of configured standard pulse waveforms for each enabled channel Each waveform previewer shows the high and low levels and timing for the waveform In Figure 5 3 the configuration shown in the waveform previewer for Channel 1 uses the default
390. r to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protect
391. rase pulse waveforms for a floating gate DUT with separate pulse waveforms for the DUT gate drain source and bulk Program Erase 10 12 V 3 10 100 ms Ves 3 30 us 10V Vo ov I OPEN float 1 10 us 10 12 V Vs wo l Ff PW lt Voc VB The block diagram for the Flash setup is shown in Figure 3 89 Reconfiguring from the pulse stress to DC measure phases is done by activating the switches on the SMU and PG2 cards During the pulse program erase phase the relays in the PG2 channels are closed and the relays in the SMUs are open For the DC measure phase the opposite is true 3 100 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 89 Basic schematic of flash testing without a switch matrix Endurance testing Endurance testing stresses the DUT with a number of Program Erase waveform cycles and then periodically measures both the voltage threshold in the programmed state Vrp as well as the voltage threshold of the erased state Vt The purpose of these tests is to determine the lifetime of the DUT based on the number of Program Erase cycles withstood by the device before a certain amount of shift or degradation in either the Vtp or Vte as shown in Figure 3 90 The endurance test is performed a set number of program and erase cycles see Figure 3 88 while periodically measuring V for both the programmed and erased s
392. rcing Functions Measure Options FFMO window is used to configure the force and measure options for the Model 4200 CVU This window is opened by clicking the FORCE MEASURE bar for the CVH1 terminal in the definition tab as shown in Figure 3 10 Figure 3 12 shows an example of the FFMO window Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 12 Forcing function CVU voltage bias sampling mode Forcing Functions Measure Options Device Terminal A Instrument ID CVH1 Instrument Information Instrument ID CYU1 Instrument Model KICVU Mode Sampling Forcing Function click to Forcing Function open drop down menu CVU Voltage Bias I Master Advanced CVU Voltage Bias Function Parameters DC Bias Conditions Advanced settings AC Drive Conditions 100k Hz 15 mV RMS PreSoak 5 Frequency AC Drive Conditions DC Bias 1 Voltage DC bias conditions Measure settings Test Conditions Measuring Options Measure Model Measured Column Names Cp_BA Parameters Cp Gp hd NOTE AB gt A to B IV Test Conditions Column Names DCV_BA Gp_BA F_BA DCV F H2 Compensation Cancel Open short load IV Status cable length compensation Status Selecting the forcing function The forcing function options for the Model 4200 CVU are listed in Table 3 1
393. rd firmware See Accessing the release notes on page 1 50 for more information Standard pulse Each channel of a pulse card can be configured for standard pulse output Figure 1 22 shows an example of standard pulse output A pulse card is a dual channel pulse generator Each channel can output high speed low voltage or high voltage medium speed pulses The basic pulse characteristics of the pulse card are listed in the specification sheet Figure 1 22 Standard pulse example pulse high 1 V pulse low 0 V Pulse Period Ips 1 OVpe ei Amplitude 1 0V Pulse Width 500ns Median 4 lt 0 0v Rise Transition Time Fall Transition Time 100ns 100ns Segment ARB waveform Each channel of a pulse card can be configured to output its own unique Segment ARB waveform A Segment ARB waveform is composed of user defined line segments up to 1024 for the Model 4205 PG2 or 2048 for the Models 4220 PGU and 4225 PMU Each segment can have a unique time interval start value stop value output trigger level TTL high or low and output relay state open or closed Figure 1 23 shows an example of a Segment ARB waveform that contains seven segments It also shows the programmed trigger levels and open closed states for the output relay 4200 900 01 Rev H February 2013 Return to Section Topics 1 27 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 23 Segment ARB waveform exa
394. refer to Reference Manual KPulse for Keithley Pulse Generator Cards page 13 1 and Using Kpulse to create and export Segment ARB waveforms These files are specified for each pulse channel in the test The number and interval for the pulse stresses are set as well as the desired SMU measurements The typical measurement is a VT extraction based on a Vg lp sweep but any type of DC test may be configured These projects support from one to eight pulse channels to support typical 4 terminal devices as well as higher pin count devices or array test structures The 8 terminal testing requires four Model 4205 PG2 cards and for most tests a compatible external switch matrix The difference between the FlashEndurance NAND and FlashEndurance NOR are the difference in the typical pulse widths and levels specific to the DUT type The FlashEndurance Switch project is a generic example of the Flash testing described above but adds support for an external Keithley switch matrix Example results for the Endurance tests are shown in Figure 3 113 and Figure 3 90 FlashEndurance NAND tests FlashEndurance NAND tests consist of the following test e Program e SetupDC Program e Vt MaxGm Program e Erase e SetupDC Erase e Vt MaxGm Erase The project navigator for FlashEndurance NAND is shown in Figure 3 112 Stressing for the FlashEndurance NAND tests are configured from the Subsite Setup tab for the FlashEndurance subsite plan The default set
395. rform a DC without signal interference from the pulse outputs It does this by opening the HEOR for each VPU channel in the PulseTerminals list Disconnecting the VPU channels allows for accurate DC results This isolation step is only necessary when using the direct connect method see Figure 3 95 and Figure 3 96 where the SMU and VPU signals are sharing a single connection to each device terminal see Figure 3 89 The same test step is called Open VPU Relay and is optional for switch matrix configurations see Figure 3 97 but is recommended to prevent accidental simultaneous connection of both SMU and PG2 channels to a single terminal The SetupDC test step is used in the configuration without a switch matrix and is required before any DC tests When using a switch matrix a ConPin test can replace the SetupDC test see Reference Manual LPT functions page 8 59 to set the appropriate matrix connections prior to any DC tests 3 122 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 107 Flash NAND project SetupDC definition tab M Flash HAND Ketthiey Interactive Test Fevirmoment Setup te E Fie Siew Propet fun Tooke Winders Help E e e a woe E i Dette tees bra Sts ax Fiai HAH D ME Flehiatata Us Lira fiahsb en updWakar Use Moduler configure d irh Eme E wie Fart Pagi Eun f E0 E hanin MEE
396. rk for a project plan also inserts check marks for all of its plans and tests e Removing the check marks for all the tests in the project also removes the check mark for the project plan NOTE Reference manual Figure 6 16 shows an example of project plan structure that shows a mix of enabled and disabled tests Executing an individual test Selecting a test An enabled check marked ITM or UTM is selected by clicking the test in the project navigator see Figure 2 14 The Run Test Plan button I turns green to indicate that the test is enabled and ready to be run Also the selected test name is displayed in the Test Plan Indicator box located above the project navigator The test can also be selected by double clicking it in the project navigator The double click action places the appropriate ITM or UTM window in the KITE workspace The ITM and UTM definition tabs show the test configurations 1 See Figure 2 4 and Figure 2 5 1 For details about using the ITM and UTM definition tabs see Reference Manual Configuring the Project Plan ITMs page 6 86 and Configuring the UTMs 4200 900 01 Rev H February 2013 Return to Section Topics 2 23 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual NOTE Before executing a test for which data must be labeled with a specific site number refer to the Reference Manual Assigning a site number label to individual test and test sequence data page 6 28 Runn
397. rm reliability stress measure tests on my device Model 4200 SCS User s Manual Connecting devices for stress measure cycling Devices that are stress measure cycled in parallel are connected through a switch matrix Figure 3 49 shows an example of such connections for an HCI evaluation Figure 3 49 Stress measure wiring example 4200 SCS Switch Matrix 8 x 36 Three cards in Mainframe During Characterization of Each Transistor Vds SMU3 Vgs SMU1 Vbb SMU2 Vss Ground Unit During Stress SMU1 Common Gate SMU2 Common Substrate SMU3 All Drains at 3 5 Volts SMU4 All Drains at 4 0 Volts SMU5 All Drains at 4 5 Volts D5 Pp DA IT 6 Cables es 6 Cables es A N pum aD TN 1 2 3 66 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Overviewing the cycling related tabs When you double click the name of a subsite KITE displays the tabs shown in Figure 3 50 Use the Subsite Setup tab to configure cyclical tests the Subsite Data tab to view test results numerically and the Subsite Graph tab to view results graphically Figure 3 50 General tab ove
398. rnal component from the system configuration select it in the configuration navigator and press the DELETE key Figure 4 43 Adding a probe station Add External Instrument Formulator Constants Ctrl F Switch Matrix gt Capacitance Meter Pulse Generator gt Test Fixture General Purpose Test Instrument gt 7 Connect the instrument terminals and probe station pins to the switch matrix by selecting the KI 7174 Matrix Card CARD1 in the configuration navigator and configuring it as illustrated in Figure 4 44 Detailed information about switch matrix configuration can be found in the Reference Manual Appendix B Using Switch Matrices Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 44 Connecting the switch matrix Keithley CONfiguration utility File Tools Help ao KI System Configuration Properties Gq Kl 4200 scs fg KI 4200 MPSMU SMUT AOPE KI 4200 PreAmp Model Keithley 7174 Low Current Matrix Card 4 KI 4200 MPSMU SMU2 Slot 1 KI 4200 PreAmp 4 KI 4210 HPSMU SMU3 Rows peste KI 4200 PreAmp A SMutFoce J 1 Pmi 7 Pny x 9 KI 4210 HPSMU SMU4 B swuzroce ala a rns KI 4200 PreAmp KI Ground Unit GNDU C SMU3Foce m 3 Pina 9 Pns
399. roject navigator double click connect under the 4terminal n fet device to open the test The test is shown in Figure 4 19 4200 900 01 Rev H February 2013 Return to Section Topics 4 13 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 19 The connect test Definition Sheet Graph Status User Libraries Matrixulib a User Modules ConnectPins besl Name In Out Type 1 OpenAll Input INT 1 2 TermldStr1 Input CHAR_P SMU1 3 Pint Input INT 3 4 TermldStr2 Input CHAR_P SMu2 5 Pin2 Input INT j4 6 TermldStr3 Input CHAR_P SMU3 E Pin3 Input INT 5 MODULE ConnectPins The ConnectPins module allows you to control your switch matrix You can connect the instrument terminals to one or more DUT pins If the DUT pin number is less than 1 then that connection is ignored not performed otherwise the 2 B connect 1 1 The connect test is a UTM KITE supports two types of test modules ITMs and UTMs A UTM like an ITM has definition sheet graph and status tabs The operation of each tab regardless of test module type is identical except for the definition tab On the UTM Definition tab you can connect the UTM to a user module located within a user library and then set the module parameter values This information is stored with the UTM when it is saved When a UTM is
400. ront and rear panels Front panel Figure 1 8 shows the front panel of the Model 4200 SCS The various components are summarized below the figure Figure 1 8 Front panel Model 4200 SCS 1 Display Displays graphical user interface data graphs and system operation information NOTE Model 4200 SCS C has no display and requires an external CRT monitor 2 DVD CD RW drive Provides a means to install or update system software manuals and utilities 3 Display brightness Allows you to set the FPD display to the desired brightness and turn off the FPD backlight 4 POWER switch Turns main system power on or off 5 HARD DISK indicator IIluminates when the hard disk is being accessed 6 INTERLOCK indicator Illuminates when the test fixture interlock is closed 7 ACTIVE indicator Illuminates when any internal cards are energized 8 Two v2 0 USB ports Interfaces to peripherals for example pointing devices printers scanners flash drives external hard drives and CD ROMs Rear Panel Figure 1 9 shows the rear panel of the Model 4200 SCS mainframe The various components are summarized below the figure 4200 900 01 Rev H February 2013 Return to Section Topics 1 11 Section 1 Getting Started Model 4200 SCS User s Manual Figure 1 9 Rear panel Parallel Port Serial Port Ground Unit 13 12 11
401. rs shown in Figure 3 102 See Figure 3 94 for two examples of array dialog box displayed after clicking the grey bar on the corresponding UTM parameter see Figure 3 93 red arrows one through five NOTE The number of parameters in each array must match the number specified for NumPulse Terminals If the number of parameters is lower than a previous test delete the values blank not a zero in the unused cells a PulseVoltages Pulse height in volts assuming a 50 Q device impedance The maximum program voltage is 20 V resulting in a nearly 40 V pulse on a gate or similar Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests high impedance terminal To open the solid state relay during the pulse as shown for Vp in Figure 3 88 use 999 b PrePulseDelays Pre pulse delay time in seconds The minimum time is 20 ns 20 E 9 but actual output waveform performance is determined by the channel output capability All timing delays are made the same across all channels c TransitionTimes Rise and fall times in seconds The minimum time is 20 ns 20 E 9 All transition times are made the same across all channels d PulseWidths Pulse width time in seconds FWHM Full width half maximum as shown in Figure 3 102 The minimum time is 20 ns 20 E 9 All pulse widths are made the same across all channels but the total waveform time for each
402. rted together and connected to the common lov outer shield vos lv Name In Out Type Value ooo n LoadLineCor Input MN p Pulse width 10007 5 12 VPU input CHARP VPU1 Pulse Period 0 0001 s 13 GateSMU input CHARP_ SMUI 4 DrainSMU Input CHAR P SMU 15 IdArray Output DBL_ARRAY is 16 dSize Input INT ioo ALB scope set 7 VdMeas Output DBL ARRAY 18 VdMeasSize Input INT ioo 19 VdProg Output DBL_ARRAY iH 20 VaProgSize Input i 1000 2 VgMeas Output DBL ARRAY 2 VaSize Input INT ioo L232 Qutout DBL i pa DESCRIPTION a Ce __ comet The vdsid_pulse sweep is used to perform a pulsed Vd Id isveep using the 4200 PIV pacers ee is feat is similar to a typic Vd Id but only 2 Gate Pulse sE Proiectview E vosid pulse JIE vdsidpuise E vositpuice JIE scopeshot E vdeidpuise E Autocalsco E PulselVCal B Vasiati t uM S17 AM Running vds id pulse vs dc UTM The default settings are the same as the vds id pulse UTM with the addition of the DC measurement parameters see Figure 3 41 To run vds id pulse vs dc UTM 1 If measurement parameters pulse average NPLC measure range need to be set use the definition table 2 Optional If only source parameters need to be changed use the UTM GUI by clicking the GUI button on the vds id pulse vs and click OK when finished Dc test Modify the source parameters in the G
403. ructures or test element groups TEGs which are composed of devices Tests Once the device is in position KITE automatically conducts one or more specified tests for each device on the test structure Each test generates data and if desired parametric curves A test includes the following for each terminal of a device 4200 900 01 Rev H February 2013 Return to Section Topics 2 7 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual e The desired voltage or current forcing functions stimuli e The desired voltage or current measurements e The associated data analyses and parameter extractions The combination of forcing functions and measurements is referred to as the test definition There are two classes of tests or test modules in KITE ITMs and UTMs Both ITMs and UTMs share common data analysis functions such as a Microsoft Excel compatible data sheet and a real time graph tool Key differences between ITMs and UTMs include the following e Interactive test module ITM An ITM allows the you to define a test interactively using a GUI and no coding e User test module UTM A UTM is defined through C programming of its connected KULT created user module but allows the user to configure key test parameters using a GUI Differences between ITMs and UTMs were discussed in more detail under Understanding KITE ITMs versus UTMs KITE tests and operations are performed through ITM
404. rview Le gt gt Aa x xi Site ff Sequence Subsite Graph ME HCI_4_DUT MZE HCI Device Sequence Table T ME MMOS Device UID Terminal ME con 1 a a i Configuring subsite cycling Understanding the Subsite Setup tab Figure 3 51 Subsite setup tab Use to enable or disable cycling If Enable Cycles is Use to choose one of the following cycling modes unchecked KITE ignores the Subsite Setup tab e Stress gt measure cycles for example HCI tests by selecting a stress measure settings and executes the Subsite Plan without cycling mode When Cycle Mode is selected enter here the fixed number of times cycles that you want the subsite to execute up to 128 maximum No stressing is performed When Stress Measure Mode is selected use to set up cycle timing e Linear if you want all stress times to be the same e Log if you want the e Only measure cycles no stressing by selecting Cycle Mode Sequence wubsite Setup Subsite Data IV Enable Cycles Stress Measure Mode Segment Stress Measure Mode Measure Cycle Times C Cycle Mode Cycles stress time to increase C Linear Log List Stress Times i 2 Zz when in cycle mode logarithmically with each fio 00 eB successive cycle First Stress Time 275 When Stress e Lis if you want to Total Stress Time 1000000 A Measure Mode is specify each time Stresses Decade 3 215 4 selected use to ope
405. s Manual Table 1 1 Models 4200 SMU and 4210 SMU current characteristics Function 4200 SMU 4210 SMU Current measurement ranges 105 nA 1pA 105 nA 1pA full scale nominal resolution 1 05 uA 10 pA 1 05 pA 10 pA 10 5 ypA 100pA 10 5 pA 100 pA 105 pA 1nA 105 pA 1nA 1 05 mA 10 nA 10 5 mA 100 nA 105 mA 1 uA 1 05 mA 10 nA 10 5 mA 100 nA 105 mA 1 pA 1 05 A 10 pA Voltage characteristics Table 1 2 summarizes SMU voltage characteristics Table 1 2 Models 4200 SMU and 4210 SMU voltage characteristics Function 4200 SMU 4210 SMU Voltage source ranges 210 mV 5 uV 210 mV 5 uV full scale set resolution 2 1 V 50 uV 2 1 V 50 uV 21 V 500 pV 21 V 500 uV 210 V 5mV 210 V 5 mV Voltage measurement ranges 210 mV 1 uV 210 mV 1 uV full scale nominal resolution 2 1 V 10 uV 2 1V 10 uV 21 V 100 pV 21 V 100 pV 210 V 1mV 210 V 1mV Basic SMU circuit configuration The basic SMU circuit configuration is shown in Figure 1 10 The SMU operates as a voltage or current source depending on source function in series with an Meter and connected in parallel with a V Meter The voltage limit V limit and current limit I limit circuits limit the voltage or current to the programmed compliance value In this local sensing example the SMU FORCE terminal is connected to device under test DUT HI while the DUT LO is connected to COMMON See the Reference Manual Connections and Config
406. s and UTMs as shown in Figure 2 2 Figure 2 3 shows the location of the configuration windows of the vds id ITM and the res_drain to source UTM to their respective locations in the example KITE project plan These windows and some associated windows are examined in more detail in the next two subsections Defining an ITM and Defining a UTM 2 8 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual 1 of ProjectView ne se Le T Hd 4 wireresistor wd TerminationSteps E park_prober 3terminal npn bit Aly 2 wireresistor YH diode F subsite_b 3terminal npn bit2 Figure 2 3 ITMs and UTMs in the project navigator Project Tree example 25 InitializationSteps E setupl subsite_a 1E 4terminal n fet ITM vds id vgs id vtlin subyt ig vg res_drain to source Dita vce ic a JE tes2t UTM JE vid JE vd J gummel2 ME vceic2 JE vesat2 JE resdt E move_prober_to_next_site 0 i es ae eee oo 4200 900 01 Rev H February 2013 Section 2 Model 4200 SCS Software Environment eet Graph Status Timing Speed Noma z FORCE MEASURE Measure YES LidAuto 1 0104 Measure V YES Range V 20V Compt 0 14 Points 4 JE vaita Definition Sheet Graph Status Formula
407. saseceentneeeanetedssdecnetadntaecnesaneaaunesegaeaeeneqanntaennepaneserenenee 1 25 About the pulse CANIS ecoin arininn eei 1 26 Firmware upgrade for the Model 4200 PG2 ee eeeceeeeeeeeteeeeeeeneeees 1 27 OPAPP ANE PUB E deesvaaus aucanveadacdecevanedadaneadhd seasdeandsueesuusandadianaane 1 27 Segment ARB waveform gsc eons ces tecvaxsanddvdnceg ascuesvendandcyeueysadeudesey accu cave dace 1 27 Remote bias tee RBT and 3 port power divider cceeeeeteeeeeeeeees 1 30 BPs OSC SCO PO cic cccece tale cescedius devees stat ceeees Tana ceevsdatadeeeveatancev es vanan cx 1 32 Ground unit GNDU 0 eccnccceeeccneteeeecnsnaaeeceenssedeascsndedeassencadeeeesenntes 1 36 Basic circuit configurations seisi aaisan aiii a eeeauenenceeunnenes 1 37 Ground unit terminals and Connectors cccccccccceeeceeeeteeneceeeeteteeees 1 39 Gonen DUT reen i ae eetd secs E E deeeas tinned 1 40 WEST UM a yf ecad sasscezite npancecie ah ldecsd coanccenie nite acid decid need de nietsdcha ess 1 40 PS oirir eteinen EAE EEr ASETA EEEE EEEE a 1 42 Advanced CONMECTONS ccc caves ccieseeeecnndeeednectaavenencctadeeeatcnaeeeeueeeneces 1 42 How to run a basic teSt cece ee eeneeeeeeeeeeeeeeeeseaeeeeeeseeeaeeeesenneaeeeeseeaaaeeees 1 42 Boot the system and log IN ccena aa 1 42 OPa TE eai o a a e E a aa E 1 43 Locate and run the vds id test MOUIe ceesccceeeseeeceeeseeeeeeeeneneeees 1 44 TBE CUNO acc d ive sec cave E vi dhacec es aashedevnnd
408. se card are summarized in Section 11 of the reference manual see Table 11 1 in the reference manual For more details see the How to Generate Basic Pulses in Section 5 In addition to short descriptions and default settings the table includes the following LPT function The Keithley Instruments Linear Parametric Test Library LPTLib function used for each setting or feature Refer to the Reference Manual LPT Library Function Reference page 8 58 for details e Access level The access level for each setting If a setting can be independently set for each pulse generator channel its access level is channel Otherwise the access level is card to indicate that both channels are affected e Pulse mode A checkmark V is used to indicate which pulse mode is associated to the setting or feature The n a notation indicates that the pulse mode is not applicable to that setting or feature Remote bias tee RBT and 3 port power divider The Model 4205 RBT and power divider are used for the Keithley Instrument s PulselV Complete and Demo PulselV projects Two RBT adapters and one 3 port power divider are included with the Models 4200 PIV A solution bundle Also included are two Model 4200 MAG BASE mounts that attach bias tee adapters to the prober platen magnetically For more information refer to the Reference Manual PulselV Complete and Demo PulselV projects page 12 4 RBT The RBT adapter see Figure 1 25 is
409. semiconductor dies are built up at a given wafer location This location is comprised not only of end product dies but usually has one or more parametric test structures or subsites KITE refers to such a repeating pattern of dies and test structures as a site NOTE In KITE sites can be switched using the site navigator All KITE sites have the same subsite device and test definitions and are not repeated in the Project Tree Subsites The terminals of each device on a test structure are connected to a uniformly spaced series of contact pads These pads are used to connect the devices to the probes of a prober Any single wafer location that the prober moves to and contacts is called a subsite sometimes referred to as a test element group TEG The Model 4200 SCS hardware KITE software combination was optimized to evaluate test structures though it can be effectively used to evaluate dies and discrete components KITE refers to each such test structure or combination of test devices that are tested as a group as a subsite Devices As described in context under Sites each test structure contains a series of devices to be characterized Transistors diodes resistors capacitors and so on A switch matrix is used to connect the Model 4200 SCS sequentially if the SMUs cannot be connected to all devices simultaneously A device is also referred to as a test element because subsites are often referred to as test st
410. sfet E Prober Resistor a General A 6 Doone of the following e If you wish to submit the selected test s with the original name s click the Submit gt gt button in the device plan window The selected test s is submitted to the chosen folder Stop here You have finished the test submission procedure e If you wish to submit the selected test s under a different name s click the Submit As gt gt button in the device plan window The submit test dialog box opens displaying the original name of the test or if you selected multiple tests displaying the original name of one of the tests See Figure 2 42 Figure 2 42 Submit test dialog box Submit test Cancel 7 In the As edit box of the Submit test dialog box type the submittal name for the test 8 Click OK One of the following occurs e If you selected only one test in the Test Sequence Table the selected test is submitted to the chosen folder under the new name Stop here You have finished the test submission procedure e If you selected multiple tests in the Test Sequence Table the following occurs e The test that you renamed in Step 7 is submitted to the chosen folder under the new name e Then another Submit test dialog box opens for another selected test 9 Repeat Steps 7 and 8 until all of the selected tests have been submitted until no more Submit test dialog boxes open 4200 900 01 Rev H February 2013 Return to Se
411. sition as the 0 0 coordinates Line 6 Parameter value 1 sets units for die size lines 2 and 3 to metric Line 7 not used 4200 900 01 Rev H February 2013 Return to Section Topics 4 23 Section 4 How to Control Other Instruments with the Model 4200 SCS 4 24 Figure 4 31 Connect SMUs to N channel MOSFET Matrix Card Bonne A 1 3 4 5 6 7 8 9 SMU1 SMU2 SMU3 GNDU N Channel MOSFET Wafer Subsite Probe Station Figure 4 32 Connect SMUs to NPN transistor Matrix Card eon A 1 3 4 5 6 7 8 9 SMU1 SMU2 SMU3 GNDU N Channel MOSFET Probe Station Return to Section Topics Model 4200 SCS User s Manual 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 33 prober separate User Libraries prbgen Formulator User Modules PrChuck b Name In Out Type chuck_position Input INT 0 Line 1 Parameter value 0 separates the prober pins from the wafer Figure 4 34 prober prompt test and dialog window User Libraries winulib E User Modules OkDialog z Name In Out Type Value NumberOfMessages Input INT 3 MessagelText Input CHAR_P Test Sequence Finished Action Required EJ Message2Text Input CHAR_P T F est Sequence Finished Message3Text Input CHAR_P Click OK to Continue Message4Text Input CHAR_P
412. sssssesesrsrssesernessesrnnaseennneeeennnasee 3 12 KTE NTN como a No exes avececeeumesdeceeuviege dese adaseedetinncadeiaeys 3 12 DTW TG E E N A T A T 3 12 Forcing functions and measure Options ccccccceeeseteceeeeeeeneceeeeeens 3 14 Selecting the forcing function ee cece eee eeeeceeeeeeeeeeeeeeeteneeeeeeeeeeaaeens 3 15 RY VBA Examples occisi a ea aA i ea 3 19 CVU YONGE WOOP ee EEE adeeecrawesuaeieeys 3 20 CVU V ltage List SWE uitiiarcdlei datas tear AEA ANALA NERE 3 21 CVU Frequency Sweep bias s sisrsssirisisinsiniisrninaniiddnneeindinanni nenna 3 22 CVU Frequency Sweep Step cccecceeeceeeeeeeeceeeeeseeeeeeeeeteeeeeeeeteeaaaeens 3 24 How to perform a Pulsed l V test on my device cccceecceeeeeereeeeeeeeeeees 3 25 Introduction PIV A and PIV Q eeeeeeesssernsssesrrssererrsssrernnssennsssrens 3 25 Pulse IV for CMOS Model 4200 PIV A o oo eeeceeeeeeeecteeeeeeteeeeeeeeeeeeeeetens 3 26 4200 PIV A test CONNECTIONS cceteccecsecsteceeeeeetteeetecenteeeeesensteseeseantae 3 27 Using the PulselV Complete project for the first time eeee 3 35 Pulse IV UTM Ge Scriptom c c ccccevescccsccccnneceiccchvseagteanncastectenrensdeceense 3 46 OAL PUISBIV oa ccensscececacnncetaccaneuandscnedaneasererae cuaunaniti ade conhanerddvcaaanetddnenainadeeees 3 46 WISI PUSEI iaa EN dee a deter easteeds Eae denen eee 3 48 Vdld_Pulse_DC_Family_pulSeiv 0 0 0 eccceeeeeeseeeeeeeeenaeee
413. st or trig burst triggering modes The pulse amplitude can be set from 100 mV to 40 V The pulse period can be set from 20 ns to 1 s with a minimum pulse width of 4200 900 01 Rev H February 2013 Return to Section Topics 1 25 Section 1 Getting Started Model 4200 SCS User s Manual 10 ns Transition times pulse rise and pulse fall can be set independently Refer to Pulse card settings for details on all pulse card settings NOTE Pulse amplitude can be set as high as 80 V depending on the pulse high and low levels pulse output range and DUT load settings Refer to the Reference Manual Pulse source measure connections page 11 34 for details on pulse card connectors and connections to the DUT Figure 1 21 shows a simplified schematic the Model 4220 PGU pulse card single channel output The range relay chooses between the high speed and high voltage output ranges The schematic for the Model 4225 PMU is similar except it also includes measure circuitry for both current and voltage see Figure 16 2 in the Reference Manual The HEOR provides fast unlimited open close cycles for demanding tests such as flash memory endurance The HEOR is also known at the SSR solid state relay See Segment ARB waveform for more details about the typical use of the HEOR which is a solid state relay for connecting or disconnecting a pulse channel from a device terminal Figure 1 21 Simplified schematic of each Model 4220 PGU channel High Endurance
414. start level for Segment 2 no discontinuities are allowed e Time values are in 10 ns increments with a minimum of 20 ns Segment ARB pulse waveform previewers KPulse provides a preview of configured Segment ARB waveforms for each enabled channel Each waveform previewer shows the segment levels and timing for the waveform Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 5 4 Segment ARB operat Section 5 How to Generate Basic Pulses ion fit Keithley Internal Pulse Interface C S4200 kiuser KPulse Setup default kps Trigger Source Output Mode General Settings Software Continuous Mode Segment arb C Burst Mode Pierre Trigger Out Polarity Positive v Reset All Channel 1 Settings Channel 2 Settings Source Range 5V y Current Limit A Source Range SV Current Limit A Pulse Load 50 Pulse Count Pulse Load 50 Pulse Count 1 2 3 Sarb from C S4200 kiuser KPulse Setup default kps Sarb from C 54200 kiuser KPulse Setup default kps 15 1 e Voltage Y Channel 1 Start V Stop V Time s Trig 1 0 SSR 1 0 Start V Stop V Time s Trig 1 0 SSR 1 0 a 1 1 00E 7 1 1 1 OOE 7 0 1 15 1 00E 7 0 K o 16 1 N0NE Z zinis v 1 1 1 1 Voltage V i o 400 0E 9 800 0E 0 0E 0 500 0E 3 Time s Time s Pulse Period s 6 1e 007 V Enable Channeli Channel 2 Pulse
415. sure the transfer characteristics of the device after the stress The after stress characteristics can then be compared to the before stress characteristics 4200 900 01 Rev H February 2013 Return to Section Topics 4 27 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual 4 28 Cable Test system connections A typical test system for this application is shown in Figure 4 38 As shown the Model 4200 SCS HP Model 8110A 81110A pulse generator PGU and the DUT are connected to the Model 7174A Low Current Matrix Card UTMs are used to control the switch matrix and the PGU For details about SMU GNDU and matrix card connections refer to the Reference Manual Appendix B Using Switch Matrices The Model 7174A matrix card is installed in the Model 707 707A or Model 708 708A Switching Matrix The switch matrix and PGU are controlled through the GPIB Use the Model 7007 GPIB cables to connect the switch matrix and PGU to the Model 4200 SCS For details about GPIB connections refer to the Reference Manual Appendix B GPIB connections Figure 4 38 Test system for ivpgswitch project 4200 MTRX X or Model 707 or 708 Switch Matrix 4200 TRX X Cables Model 7174A Matrix Card 4801 BNC To the Cable SMU4 4200 SCS 7007 Cable Generator 7078 TRX BNC Adapter COMMON 8007 GND 3 Cable 4200 TRX X Cables Pin Pin Saf
416. system configuration IAES Tools Help Save Configuration Save Configuration as Web Page Ctrl W Print Configuration Ctrl P Exit Open KITE and the ivswitch project To open KITE and the ivswitch project 1 On the desktop double click the KITE icon to open KITE 2 Open the ivswitch project from the File menu on the KITE toolbar click Open Project The project navigator for the ivswitch project is shown in Figure 4 13 Figure 4 13 Project navigator ivswitch project T sooo Vie MZE subsite 1E 4terminal n fet MIE connect MIE vds id MJE subvt MJE vas id MIE igvg ME rdson 3terminal npn bit ME connect MME vceic M v AN v v K ME gummel MJE vesat 2 wireresistor ME connect MJE tes2t M diode ME connect MJE vid MIE vd capacitor ME connect ME cap 1 K zH Tf e r E E E E E pes sii oo Running test sequences NOTE For detailed information about test and sequence execution refer to the Run execution of individual tests and test sequences in Section 6 of the Reference Manual The ivswitch project uses the same ITMs that are used in the default project The primary difference between the two projects is that the ivswitch project uses connect UTMs to control the switch matrix As shown in Figure 4 13 there is a connect UTM at the beginning of each device test sequence 4200 900 01 Rev H February 2013 Return to Section Topics 4 11 Model
417. system configuration as described above For additional information about KCON refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 Similarly for additional information about switch matrix configuration and usage refer to the Reference Manual Appendix B Using Switch Matrices To add a switch matrix to the system configuration 1 On the desktop double click the KCON icon to open KCON 2 Using the Tools menu select Add External Instrument gt Switch Matrix and then select the desired switch matrix to the system configuration as indicated in Figure 4 8 Figure 4 8 Add a switch matrix to the system configuration File BEA Help Add External Instrument Switch Matrix gt Keithley 707 7074 Switching Matrix Capacitance Meter gt Keithley 708 7084 Switching System Pulse Generator gt Probe Station Formulator Constants Ctrl F Test Fixture General Purpose Test Instrument gt 3 Using the Tools menu select Add External Instrument and add a Test Fixture to the system configuration as indicated in Figure 4 9 Figure 4 9 Add a test fixture to the system configuration File Help Add External Instrument i Switch Matrix Capacitance Meter Pulse Generator Probe Station Formulator Constants Ctrl F Test Fixture General Purpose Test Instrument gt 4 Select the KI 707 707A Switching Matrix MTRX1 item in the configuration navigator tree control on l
418. system from KCON See the Reference manual Appendix B Using KCON to add a switch matrix to the system and configure its connections NOTE When using segment stress measure mode with multiple pulse cards installed in a Model 4200 SCS trigger connections must be made as shown in Figure 3 34 For further information see Section 11 Pulse Source Measure Concepts of the Reference Manual Specifically refer to Trigger connections Output synchronization and Multi channel synchronization with the Segment Arb Mode NOTE To effectively transmit the higher frequency components of the typical pulse Segment ARB or Standard a high bandwidth switch matrix should be used for example Keithley Instruments Model 7174A or 7173 50 4200 900 01 Rev H February 2013 Return to Section Topics 3 81 Section 3 Common Device Characterization Tests Figure 3 67 Stress measure test system iA Model 7174A Matrix Card 8 x 12 4205 PG2 Ch 1 4205 PG2 Ch 2 Segment ARB stressing 4200 SCS FR SAB IE e eE Wan peg a es See Model 4200 SCS User s Manual Figure 3 68 shows an example of how a DUT can be stressed using Segment ARB waveforms During a stress phase the matrix shown in Figure 3 67 connects the channels of the Keithley pulse card to the drain and gate of the DUT The pulse generator stresses the drain and gate by outputting Segment ARB waveforms Two Model 4200 SMUs SMU1 and SMU2 are connected to the substrate and
419. t 2 m white SMA cables 4 5 foot 1 5 m BNC cable Connect to probe manipulators Table 3 28 Tools supplied with the Model 4200 SCS FLASH package Quantity Description 1 SMA Torque wrench 8 in pound with 5 16 head installed NOTE Use the supplied torque wrench to tighten each connection as it is assembled Always connect and torque adapter cable assemblies before attaching the assembly to the instrument cards Pre torquing eliminates any non axial stress on the bulkhead connectors on the SMU or pulse cards that could possibly cause damage to the cards installed in the Model 4200 SCS chassis requiring repair To remove the LEMO triax to SMA adapter from a SMU pull on the knurled silver portion of the connector to release the latches and permit the adapter to separate from the SMU connector CAUTION Failure to fully disengage the LEMO adapter latches may result in damage to the adapter and or the SMU requiring repair The connection instructions below assume a four channel Model 4200 SCS FLASH system consisting of two 4205 PG2 cards 4 pulse channels as well as four SMUs either Model 4200 SCS SMU or 4210 SMU with SMU preamps removed see Figure 3 83 or Figure 3 84 To test on wafer devices there are various ways to connect the supplied SMA cables to the probe manipulators For the direct connect method see Figure 3 95 and Figure 3 96 or switch method see Figure 3 97 adapters convert the BNC cabling to the Triax c
420. t define the pulse shape referring to Figure 3 103 and the instructions in Entering Segment ARB values into UTM array parameters The number of non blank entries in the array must match NumPulseTerminals as shown in Figure 3 104 NumPulseTerminals 4 and the size each array Pulse1VoltagesSize PrePulse1 Delays TransitionTimesPulse1Size Pulse1WidthsSize PostPulse1DelaysSize Pulse2VoltagesSize PrePulse2Delays TransitionTimesPulse2Size Pulse2WidthsSize PostPulse2DelaysSize are also 4 a PulseVoltages Use a positive value for a waveform similar to Figure 3 103 If a negative pulse is required use a negative voltage value To put a pulse channel in to a disconnected or high impedance state use 999 b PrePulseDelays TransitionTimes PulseWidths PostPulseDelays The minimum time is 20 E 9 20 ns Number 0 zero is not a valid input value The maximum time is 1 s 4 Enter the number of pulses into NumPulses This parameter determines the number of program and erase pulse waveforms that will be output each time the test is run 5 Enter the number of SMUs that are used as Bias Terminals into NumSMUBiasTerminals An example of using an SMU as a bias terminal is shown in Figure 3 96 The 4th SMU in Figure 3 96 is a dedicated connection to a bit line on the array DUT During a pulse test such as Program or Erase this SMU would output a DC voltage that would provide power to the drain terminal of the first column of the array 6 En
421. t in current system configuration 14 PIV Initialization Failed scopeshot_pulseiv Description The scopeshot_pulseiv routine displays a single Pulse IV scopeshot This routine is useful to understand the basic source and measure concepts behind the Pulse IV methods for pulse vds id and vgs id The scope waveforms are retrieved and displayed for both channels no measurements are made Make sure to set the appropriate values for the scopeshot_pulseiv see Table 3 22 Table 3 23 and Table 3 24 contain outputs and return values respectively Connection The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the 4200 RBT The RBT connected to GateSMU with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 33 4200 900 01 Rev H February 2013 Return to Section Topics 3 61 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Table 3 22 Inputs for scopeshot_pulseiv Input Type Description RiseTime double The gate pulse transition rise time s This can be set from 10 e 9 to 300 e 9 in 10 e 9 10 ns steps This value programs the full transition time 0 100 not the 10 90 time FallTime double The gate pulse transition fall time s Th
422. t ona Through structure or by shorting the two 4200 RBTs AC DC outputs with an appropriate cable or adapter The factors generated by this routine are used during any testing where the 4200 RBTs are used vdsid_pulse vgsid_pulse Make sure to set the appropriate values for the cal_pulseiv parameters in Table 3 4 Table 3 5 and Table 3 6 contain outputs and return values respectively Connection The source and body well of the DUT must be shorted together and connected to the common low outer shield of the SMA cables on the AC DC output of the RBTs The RBT connected to GateSMU with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 33 3 46 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 4 Inputs for cal_pulseiv Input Type Description Default VPUID char The instrument ID This should be set to VPU1 VPUID for 4200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 GateSMU up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 DrainSMU up to the maximum number of SMUs in the system This is the SMU that applies the DC bias
423. t slot PG2 in the slot with the lowest number Carefully insert the LEMO Triax connector from step 16 into the Force connector on the SMU in Slot 2 Route BNC cable from SMU2 to the DUT terminal Drain connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 19 Take one of the cable assemblies from step 9 connect the SMA to CHANNEL 1 of the PG2 in the right most slot PG2 in the slot with the lowest number 20 Carefully insert the LEMO Triax connector from step 19 into the Force connector on the SMU in Slot 1 21 Route BNC cable from SMU1 to the DUT terminal Gate connection Connect Triax to BNC adapter if necessary Connect cable to probe manipulator Direct connection to array DUT for disturb testing Cabling instructions for direct connect to an array DUT are below Refer to Figure 3 96 for the following procedure These instructions are compatible with the following projects in the Projects _Memory folder e FlashDisturb NAND e FlashDisturb NOR e FlashEndurance NAND e FlashEndurance NOR NOTE In all of the following steps when necessary torque both connections using the wrench 1 Setup the Model 4200 SCS referring to the Getting Started page 1 1 Reference Manual Installation page 2 1 and Connections and Configuration page 4 1 2 Take on
424. t system connections A typical test system for this tutorial is shown in Figure 4 22 As shown the Model 4200 SCS and probe station are connected to a Model 7174A matrix card The matrix card is installed in the switch matrix and the switch matrix and probe station are controlled through the GPIB bus For connection details as well as information about the KCON utility refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 4200 900 01 Rev H February 2013 Return to Section Topics 4 17 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual Figure 4 22 System configuration for the probesubsites project 4200 MTRX X Model 707 or 708 Switch Matrix ae 71 si re a or 4200 TRX X Cables To the 4200 SCS 7007 Cable 4200 TRX X 7 Cables Pin Safety Interlock To the 4200 SCS 236 ILC 3 Cable N Channel MOSFET D rce Wafer Subsite Probe Station KCON setup For this tutorial the following external equipment must be added to the system configuration e Switch matrix e Matrix card e Probe station KCON is used to add external equipment to the test system Below is a step by step procedure for adding the necessary equipment to the system configuration To setup KCON 1 Start KCON Double click the KCON icon on the desktop or use the Start menu and select Start gt Programs gt Keithley gt KCON 2 Add
425. tate Figure 3 90 shows typical degradation on a NOR cell for both Vrp and Vr as the number of applied program erase cycles increases Figure 3 90 Example results of V7 shift in an Endurance test on a NOR flash cell Programmed State ViP Voltage Threshold Window t Window Closure Vr V TE Erased State 10 10 10 10 10 10 Program Erase Cycles Disturb testing The purpose of the Disturb test is to pulse stress a device in an array test structure then perform a measurement such as Vy on a device adjacent to the pulsed device The goal is to measure the amount of V shift in adjacent cells either in the programmed or erased states when a nearby device is pulsed with either a Program Erase or Program Erase waveform 4200 900 01 Rev H February 2013 Return to Section Topics 3 101 Section 3 Common Device Characterization Tests 3 102 The typical measurement is a V extraction based on a Vg ld sweep but any type of DC test may be configured This test is similar to the endurance test but the pulsing and measuring are performed on adjacent devices Figure 3 91 shows an example configuration to pulse stress a device Cell 2 and then test an adjacent device Cell 1 in an array cell memory structure The solid line blue circle indicates the cell to be pulse stressed and the dotted line red circles are the adjacent memory cells that will be disturbed by the stressing The stress measure process is explai
426. te Graph B Stress Time C Id 1 IDOFF D Change IDOFF F Id 1 IDLIN G Change Target Id 1 Value IDSAT 0 00 291 1666E 15 2 2350E 3 0 0 2 9236E 10 00 62 2013E 15 71 8 2 2278E 3 2 9278E 21 54 75 6693E 15 GEHE 2 2254E 3 2 9291 E 46 42 66 3425E 15 70 3 2 2171E 3 2 9338E 100 00 154 6986E 15 46 6 2 2062E 3 2 9395E 215 44 244 7654E 15 159 2 1986E 3 2 9432E 464 16 255 5161E 15 12 2 2 1960E 3 2 9444E 1000 00 265 6278E 15 8 8 2 1959E 3 2 9446E The above subsite data is for device 4terminal n fet For a multi device Subsite Plan there would be a separate tab for each device The data for other devices are displayed by clicking the corresponding label Clicking this tab displays any enabled stress measurements See Figure 3 66 for details Clicking this tab displays the Calc sheet It is the same as the Calc sheet for an ITM and UTM Settings window Clicking this tab displays information about the subsite cycling setup including Output Values and Target evaluation See Figure 3 76 for details The Settings window displays information about the subsite cycling setup The Settings window is 4 4200 900 01 Rev H February 2013 Return to Section Topics displayed by clicking the Settings tab at the bottom of Subsite Setup tab see Figures
427. teeeee 2 31 results folder Test sequence eeeeeeteeeeeeteeeeeteeeees Test sequence for ivpgswitch project 4 35 Test system for ivpgswitch project 4 28 Testing with less than 20 volts Testing with more than 20 volts Tests ITMs and UTMs 0 7 Three terminal NPN BJT tests ee Two wire resistor test 0 0 0 cece eeee rene eeeeeeee Typical test fixture Typical CV curve Unconfigured Graph Definition window for the vds id ITM sepenan na A 2 45 Unconfigured Graph Definition window for the vds id ITM arita 2 43 4200 900 01 Rev H February 2013 Index Model 4200 SCS User s Manual Unconfigured UTM message c eeeeeee 2 49 Understanding Append worksheets 2 37 Understanding KITE ccccccceeeeeeeeeeeeeeeneeeeeeee 2 3 Understanding the Formula combo box of the Data WOPKSNGCE sesscssvsrecsasssacasstssnedsistecsbesinnnuitessies 2 35 Unpacking and inspection Inspection for damage Manual package Repacking for shipment nasses 1 3 Shipment contents ccceeeeeeeeeeteeeeeeee 1 3 Unpacking the 4200 SCS 1 3 Usrlib subdirectory cccccceeeeceeeeeeeeeeeeteeees 2 32 UTM User Test Modules Definition tab serssceeccecrssesictnsuecs 2 12 2 13 V Vds id graph after configuring its Graph Definition WINDOW aiapeod anran aena idir 2 45 View and Save the Graph Data 0 1 47
428. tem configuration with external instruments LLLLLLLLLLLL SAL AL AA AAL AL ASAD LALA AA AAA A DLA LEAL ALALE External instruments station Safety Interlock y 4 Z 4 4 IEEE 488 4 y GPI1 8 or Z 4 RS 232 amp Z General purpose 5 j test instruments A y y 4 7 7 y 4 y PGU1 16 7 Z IEEE 488 4 4 Pulse generators 7 4 4 7 4 7 4 7 4 7 4 7 7 y y CMTR1 8 4 4 4 4 5 IEEE 488 4 4 Model 4200 SCS 7 Capacitance meters 4 7 Internal instruments 4 7 7 4 4 G MTRX1 7 4 7 y 4 l IEEE 488 4 4 Switch matrix 7 4 4 7 7 y 4 Ethernet 4 Z eee or 4 4 Instrument BR IEEE 488 7 terminal or 4 4 4 connections oe station RS 232 4 4 4 A A controller 4 4 Device PA 4 e 4 under e 4 f test 4 DUT y TF1 7 PUT 4 Test system 4 Z Test fixture pins y y y fa LLLLLLALAIANALALALALAAAAAAAAAAAAAASALASAAASAAAAASA SAA RED GPIB IEEE 488 BLUE RS 232 Green Ethernet User modules are utilized to access these communication interfaces and control external equipment User modules are stored in user libraries that are created and maintained with the Keithley User Library Tool KULT For information about creating and mainta
429. tep value for Vg For DC only sweeps VgStop must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT For pulse and pulse and DC Sweeps VgStop must be between 5 V to 5 V VgStep double The sweep step size for the Vg sweep output by channel 1 of the pulse card VPUID Vg_off double The DC bias applied by the GateSMU to put device in the OFF state Normally set to 0 V for enhancement FETs may be non zero for depletion FETs This package does not support a similar capability for the drain For full quiescent or bias point testing review the 4200 PIV Q specs PulseWidth double The Vgs pulse width PW The PW can be 40 ns to 250 ns 10 ns resolution Pulses wider than 250 ns will begin to be attenuated by the coupling capacitor in the Remote Bias Tee 4205 RBT PulsePeriod double The pulse period for the Vgs pulse The period can be set from 100 us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 The period is most easily calculated by multiplying the largest desired pulse width PW by 1000 Example PW 150 ns so Period 150 us AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set AverageNum 0 for Adaptive Filtering GateScpRange double The voltage measure range for the scope channel measuring the Gate Use 0 for scope autorangin
430. ter the SMU IDs for the SMU s used as a bias into SMUBiasTerminals For the configuration in Figure 3 96 SMUBiasTerminals SMU4 7 Enter the voltages in the array SMUBiasVoltages These are the voltages for the SMUs listed in SMUBiasTerminals The number of non blank entries in the array must match NumSMUTerminals 8 Enter the number of SMUs that are sharing a cable with a pulse channel into NumSharedSMus Sharing means that one pulse and one SMU signal are combined to a single DUT terminal Figure 3 96 shows that three pairs of SMU pulse channels are shared NOTE The SMA tees on each of the top three SMUs that incorporate both a pulse channel and a SMU signal into a single cable to a DUT terminal Supplying the shared SMU information allows the software to open the SMU relay during the pulse output that is necessary to permit good pulse fidelity If a switch matrix is used in the configuration see Figure 3 97 then use NumSharedSMuUs 0 9 Enter the SMU IDs for the SMU s sharing a cable with a pulse channel into SharedSMUs For the configuration in Figure 3 96 SharedSMUs SMU1 SMU2 SMU3 There are no spaces allowed in the SharedSMus string 10 Press the green triangle Run button to output the pulses 4200 900 01 Rev H February 2013 Return to Section Topics 3 129 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 11 Check the Data tab in the Sheet control The double_pulse_flash value should be 0
431. ter typing in the value 2 Set vgs to the first voltage The default is 1 5 V Make sure to press the Enter key after typing in the value 3 Click the green Run button 4 After the test is finished set vgs to the second voltage The default is 2 0 V 5 Click the yellow and green Append button 6 After the test is finished set vgs to the third voltage The default is 2 5 V 7 Click the yellow and green Append button 8 To add or update the DC results on the pulse Graph perform the procedure for Comparing DC and pulse results 3 38 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 40 Section 3 Common Device Characterization Tests Default Definition tab and GUI For vds id me PulselV Complete Keithley Interactive Test Environment vds id pulse 1 1 E Eie View project Run Tools Widow Help vdsid_pulseiv_setupDLL Ved Pulse IV UTM Setup CE e e aa eo Drain v sweep F vastat ov site T recuse eer sea ws v Mee Pi i g Famas User Libraries PutselV i i a us PUI pulse channel 1 and drain DrainSHU Note that the gat pulsed but the drain is DC biased ts are made vith the 2 channel scope 4200 SCP2 family of Va Td curves change Vgs and run tie test OF unaa Che append Ha PROCEDURE The source and body well of the DUT must be sho
432. test mode applies to any ITM in which voltage or frequency varies with time The sampling test mode applies to any ITM in which the forced voltage and frequency are static with measurements made at timed intervals With the Sweeping Mode selected Figure 3 11A the sweep delay and hold time can be set With the Sampling Mode selected Figure 3 11B the Interval samples and hold time can be set The setting ranges for these timing parameters are as follows e For the sweeping mode Sweep Delay and Hold Time can be set from 0 to 999s Use the drop down menu to select units us ms or s For the sampling mode Interval and Hold Time can be set from 0 to 999s Use the drop down menu to select units us ms or s The Samples measurements can be set from 1 to 4096 The CVU ITM examples provide details about the mode parameters NOTE The test mode sweeping or sampling can also be selected from the Mode drop down menu located at the top of the definition tab Figure 3 10 Timestamp and output disable At the bottom of the ITM Timing window are controls for the timestamp and output disable e With Timestamp enabled checked a timestamp for every measurement will be included in the Sheet tab e With Disable outputs at completion enabled checked the output will turn off 0 V when the test is completed When disabled DC Bias voltage will remain at the last bias voltage level Forcing functions and measure options The Fo
433. test sequence 2200e eeeeee 4 35 Compare the test results 0 0 0 eee 4 35 Overlaying graphs 200 eee eee eee 4 36 How to control an external CV analyzer 4 37 Gonnections osaisi shee ace he ie Ae eda eee 4 37 KCON S6tUD cio t oS lil aaa ae Ue ae ade 4 38 Create anew project 000 cece eee eee 4 39 Add a subsite plain 000 0 eee ek halai See as Ss 4 40 Adda device plan 0 022660 cc eee ee eee E aa 4 41 Adda UTM ied ether eee eels ia ae tte at ana AS EE S ae 4 42 Modifying the cvsweep UTM 22000e eens 4 43 Executing the test 2 2c 4 44 What if my equipment is not listed in KCON 4 44 Section 4 How to Control Other Instruments with the Model 4200 SCS Model 4200 SCS User s Manual How to control external equipment To complete the tutorials in this section and obtain data that functionally correlates with the sample data and projects provided you will need the following equipment 1 Keithley Model 4200 SCS User s Manual with a total of three SMUs preamps not required 1 Keithley Model 590 CV Analyzer 1 Hewlett Packard 8110A 81110A Pulse Generator 1 Keithley Model 707 or 708 Switch Matrix 1 Keithley Model 7072 or 7174 8x12 matrix card 1 Keithley Model 8006 Component Test Fixture 1 Probe station manual or supported semi automatic and a wafer containing test devices MOS capacitor N channel MOSFET and NPN bi polar
434. the Model 4200 SCS 4 1 How to control external CQuIPMeNL ceceeeceeceeeeceeceeeeeeeeeeeeneeneneeeeteeeeeess 4 2 Controlling external equipment OVerview cccccceceeeeeeseeeeeeensneeaeees 4 2 Keithley Configuration Utility KCON cccceceeeeeeeeeeeseeeneenteeeeeeeeeeees 4 5 How to control a switch MaX iiaii aeiiaaie inaia aiiai 4 7 PCY SOIUSA 4 8 Open KITE and the ivswitch projeGt nicesine 4 11 Running test Sequences ecceceeeeenee eee teeeaeeeeeeeaaaeeeeeeeaaaeeeeeeeaeeeeesenaes 4 11 The connect LOBE ii a aeda aiaiai aa aa AE a dudes iadedat ies dharani end 4 13 How te controla probe Station reiini anii aaia 4 15 Probe control oveni iis ccs ccccaccaectadantesvandasdeacsdunctedevenndacuassantacecuraeids 4 16 Testsystem connections reiri siiani enana EENEN EENES 4 17 DLE I o A E TE A O EA A E A EN 4 18 Probe station Configuration 2222 cccct ch eiecceteacee te datteneeet diadheoeectagenedecatacns 4 20 Open the probesubsites Project ccceeceeeecceeceeceeeeeeeeeeeeeeeeecnaeeeeeeeees 4 21 Open the project plan WINdOW 3 cc cccc ccccccececcdiieencntendeeeeeecuecddeetauneracenaens 4 21 Test JOSEPHINE sca cease canes oss oc cnadevnnrsdlacccandced cocevoatenidummssadiczrsedateateasensen 4 22 Running TS tost Seguente rrinin ninan anina R RAAN a 4 25 E E E E E EE S EE 4 26 Running individual plans or tests seseeeeeeeeeeeeeneeeeerrrssrnnnnsseernnssen n 4 27 How to contr
435. the Reference manual Figure 15 175 A default name for example Cs_AB can be changed by typing in a different name CAUTION Changing the measurement options will change the Column vector names which may then cause any formulator functions to be erased When using any of the Keithley Instruments supplied tests or libraries please leave the measurement option set to Cp Gp Test conditions The DC V bias and drive frequency values used for the test will appear in the data sheet when Test Conditions shown in Figure 3 12 is enabled checked The column names appear in the data sheet see the Reference manual Figure 15 175 A default name for example F_AB can be changed by typing in a different name Advanced settings terminal properties The AC drive voltage and DC bias voltage can be applied to either the CVH1 terminal or the CVL1 terminal Clicking the Advanced button shown in Figure 3 12 opens the Model 4200 CVU terminal properties window shown in Figure 3 13 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Figure 3 13 CVU terminal properties window CVU Terminal Properties x AC DC Source Y MeasureI SourceY Offset CVH1 A oO O CLI B O Jato M Oo V Capacitance Range Estimator C Max 15 9mF I i Ger F I Max Range 1m 2HfV Frequency 100kHz AC Drive Voltage 15m RMS NOTE Capacitors greater than 1uF may require additional sweep delay Sectio
436. the bottom of the window The basic steps to configure each device are provided in Figure 3 59 For details about configuration follow the illustration Figure 3 59 Device Stress Properties Setup steps for first device in Subsite Plan 1 Select the wafer site number Subsite HCI Device NMOS 1 Site 1 xj N Stress Properties See Multi site testing goes Conditions 2 Select DC Voltage Stress Aciveste 1 YPU Common settings a DC Current Stress or AC Drain Stress 10 v Source Stress 0 V u mE a eat iar Drain Limit 0 1 A Source Limit 0 1 A e stress values V or I an limit values I or Wy FZ IZ i Gate Limit te 006 A Bulk Limit 0 1 A See DC voltage DC current or AC voltage stressing Device Pin SMU VPU Connection Stress Measurements VPU P Bate k I Drain Stress Do Not Measure x 3 Assign connection pin Drain Pin 2 Northwest Fin numbers for this device With cen 3 salt I Gate Stress Do Not Measure z AC Voltage Stress selected click VPU checkbox if connected to the Model 4205 PG2 See Device pin connections I Source Stress Do Not Measure x I Bulk Stress Do Not Measure Source Pin fa M Southeast Pin S Stress Type C DC Voltage Stress DC Current Stress AC Voltage Stress Lo a r ooo 0000E 3 IDLIN Oo m 000 0000E 3
437. the burst of stress pulses 4 34 PIV A test connections 0 0 0 0 eee ceeeneeeee 3 27 Power Divider iss rataarwstdernssucepanparraanarnassnrenesiagyannan 1 31 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Powering up the 4200 SCS oo eee 1 5 prbgen user modules Primary differences between an ITM anda UTM 2 9 Printer CONNECHONS cassscsrsvestecannnsncensmaeieceeites 1 10 Probe station connections 1 9 Probarinit sesics crecrcertdantornpatcensdenneeteiensde 4 23 prober prompt test and dialog window 4 25 Prober Separate 0 ccecsceeeeseeeeeeeeeeeeeeeeteeneeees 4 25 Programming and erasing flash memory 3 95 Project Navigator ivpgswitch project 4 31 Project Navigator ivswitch project Project Navigator probesubsites project 4 21 Project Navigator Checkboxes n s 2 22 Pulse generator Card ccccceessceeeeteeeeeeeeeeeeeee 1 25 Pulse generator configuration 0ccee 4 29 Pulse IV for CMOS Model 4200 PIV A ow cece ceeeeeeeee 3 26 Pulse Mode SMUS c ccceeeeeeeeeeeeeeeeeees 2 17 Pulse projects P wer Divider sstnsminiiscnenrsiniinniiss 1 31 RBT bessnenasiyr si arnan EN 1 30 1 31 Pulse source measure Full Arb FARB escenes 1 29 PUSS aicccerssscodeseassoies eorsgeoscreatesuesieds 1 30 Pulse generator settings c eee 1 30 Scope card settings 0 0 eee 1 33 St
438. the end of a stress cycle This allows the stress to continue until the next test is performed in the project tree You may want to keep stress on as long as possible so the DUT doesn t have time to relax before the tests are performed Clear copy paste and paste to all sites Clear Clicking the Clear button clears all stress properties data for the displayed device It sets all voltage and current values to zero sets device pin number assignments to zero sets Stress Measurements to Do Not Measure and disables all Targets clears Target Values Copy and Paste Copy and Paste allow properties settings for one device to be copied and pasted into the properties window for a different device It can also be used to copy and paste settings into a different site Use Copy and Paste as follows 1 On the desired Device Stress Properties window click Copy to copy the properties into the buffer 2 If pasting to a different site select the site as shown in step 1 in Figure 3 59 3 Use the Next Device or Prev Device button to display the properties window for the desired device 4 Click Paste to overwrite the device properties with the properties stored in the buffer 3 80 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Paste to All Sites After copying the properties for the desired Device Stress Properties window as explained in step 1 above c
439. the rise time transition time in seconds double Array of time values used as a delay after the first pulse is output that is time at the 0 V base voltage Valid values are 20 ns to 1 s in 10 ns increments s double Array of voltage values for the pulse height 0 V referenced of second pulse on each pulse channel Valid values range from 20 V to 20 V All tests assume a 50 Q load In order to float a channel or disconnect from a DUT pin using the Solid State Relay use 999 Minimum time required for a SSR open or close is 100 us double Array of time values used as a delay before the second pulse is output This delay happens after the PostPulse1 Delays Valid values range from 20 ns to 1 s in 10 ns increments s double The amount of time it will take the second pulse to rise fall 0 100 100 0 from the BaseValue 0 V to the given Pulse Voltage If the pulse voltage level is from 5 to 5 V then the valid transition times are from 20 ns to 33 ms in 10 ns increments else if pulse voltage is within 20 to 20 V then valid values range from 100 ns to 33 ms in 10 ns increments s double Array of values defining the pulse widths for the second pulse in each channel Minimum values are 20 ns to 1s Pulse width is defined as FWHM so it includes half of the fall time and half of the rise time transition time in seconds double Array of time values used as a delay after the second pulse is output that is ti
440. the specific versions required for each instrument See Accessing the release notes on page 1 50 for more information WARNING Make sure to power the Model 4200 SCS with an uninterruptable power supply during the firmware upgrade process This is important because an interruption of the firmware upgrade process may damage an instrument card To upgrade the firmware run the upgrade utility from a command prompt Figure 1 42 Graph settings menu 1 Click the Widows start button 1 2 Type cmd in the search box 2 and press the Enter key A command window will open 3 At the command prompt type fwupgrade and then press the Enter key Figure 1 43 shows the first screen of the utility as well as the warning screen Note that each instrument card type will be upgraded separately Figure 1 43 Firmware upgrade utility dialog windows 1 4200 SCS Flash Upgrade Utility es tert WARNING Before proceeding with the flash upgrade be sure that the 4200 SCS is connected to an uninterruptible power source ay 4200 SCS Flash U A power failure during this process may damage the hardware 4200 SCS Flash Close all other applications before flash upgrading hardware Do you want to continue ae Close 4200 900 01 Rev H February 2013 Return to Section Topics 1 49 Section 1 Getting Started Model 4200 SCS User s Manual Accessing the release notes You can access the release notes by clicking
441. thley pulse card See Setting AC stress properties 10 Click to check SMU or VPU resources and connections for the active displayed site Resource Status will indicate if enough SMUs and VPUs are present Connections status will report any problems with matrix connections See Device pin connections Apply to apply and save the settings made in the Device Stress Properties window NOTE After setting the device stress properties for all devices and sites steps 10 and 11 of the above procedure must be performed in order to apply and save the new settings Failure to do so will cause the new settings to be lost 3 72 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests NOTE In the Device Stress Properties windows the names for device terminals for example Drain Gate Source and Bulk and the enabled fields for those terminals are set automatically by KITE The terminal names correspond to the terminal names used by the ITMs for the device When you double click an ITM in the project navigator for the device it will show the schematic of the device and the names of the terminals Setting AC stress properties With the AC voltage stress type selected DC and AC stress properties can be set Figure 3 60 shows an example for a device that is connected directly no matrix to channel 2 of the VPU AC stress The device is also co
442. ting a KTE Interactive software tool you must answer YES to an on screen license agreement Answering No makes your system nonfunctional until you reinstall the software 1 42 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Open KITE To start KITE open the default project and select the vds id test 1 Start KITE by double clicking the KITE icon me on your Windows desktop 2 When KITE starts the default project will open automatically if it has been set as the default project The vds id test will be opened in the Definition tab see Figure 1 35 3 If a different project opens perform the three steps in Figure 1 36 to open the default project The project navigator for the default project is shown in Figure 1 35 NOTE Ifthe project navigator is not displayed when KITE is started click the View menu and select the Project Navigator item The View menu is located at the upper left hand side of the KITE window For more information about the project navigator refer to the Reference Manual Project Navigator page 6 12 To open a KITE default project follow the steps in Figure 1 34 Figure 1 34 Default project directory View Project Run Tools Window Hel From your windows browser use the following 1 From the ofS New Project directory path to locate the default kpr project File menu of CE file C S4200 kiuser projects default click Ope
443. tion is affected the board should be returned to the factory for proper cleaning servicing Table of Contents Section Topic Page 1 Getting Started icia iiia iaiia 1 1 Installation and system connections cc ccccccceeeescecneesenceeeeeeeeseeeeeenesnees 1 3 Unpacking the Model 4200 SCS 0 0 eecceeeceeeeceeeeeeeeeeeeeeteeeeeeeeeteeeaaeees 1 3 Shipment cantos one Cancaxdaiteacaunetiansracaldeanvantsteie suhacdcdaannaidedaaseeadadvastalnedes 1 3 Environmental Considerations ccc 2 c20s ecceckeneceeeeetiecee ceceeseeeeeedaeeeeeee 1 4 Powering up the Model 4200 SCS oe c cscs sens ceesenceetecieeceecnntieeeeeueneneces 1 5 System COMMECIONS ccgccetsceancsiterssisaiiec eases cocsdoasnievessvableceestauneccreataahees 1 7 Model 4200 SCS Hardware Overview ccccccccceeeeeeeieeeeeeeiteeeeeeetneeeeerenaa 1 11 Front panel occain deeckdtteevecedd Aiedeestnnta eves ata dewedvb daedeesd alaewesd butte 1 11 Peer PONG E 1 11 DC source measure unit SMU oc ccceciccccctecceeecceencueegeneeee caueeneneveeeebbnens 1 13 DC PCAN Ds oc cicavcateedecccave ana ticerracandccaxadasduccasasna daddies aeeacexsnea ana cednetenaeucee desks 1 19 Multi frequency capacitance voltage unit CVU oo eee eseteeeeeeeetteeeeeees 1 21 DP VORA CIV a A P sf E E N E E epuredent dpe 1 21 Model 4210 CVU Card ssssssssssiisssesrrsseirnssstrrnsstttnnnntttnunntnennnnntnnnnnntennn 1 21 Fo rce meas re TIMING encorena 1 24 Pulse Cards es cccc ete teecersi
444. tion when only part of the project plan is to be executed 2 Site navigator Displays the current site Typically a die on a semiconductor wafer that is being evaluated by the project plan Allows selection of the single site to be evaluated when only part of the project plan is to be executed A unique ITM UTM test window and data exists for each different site Menu area Provides choice of icons to select KITE functions 4 KITE workspace Displays the variety of screens windows tabs message boxes and so on Configure all project plan components e Observe evaluation results e Analyze evaluation results 5 Toolbar area Displays a variety of icons that can be used to Start and stop all or part of a project plan e Verify project plan execution e Insert project plan components Save and print project plan files e View KITE help 6 Message area Displays KITE error warning and execution messages Status bar Displays descriptions of menu and toolbar items w N Project navigator The project navigator is the primary interface for building editing viewing specifying and accessing project plan components e Each project plan component may be added sequentially or nonsequentially using menu items or toolbar buttons e Single clicking a navigator component selects it as one of the following A location where a new component may be added or an existing component may be deleted Aan individual test device or seri
445. to the common low outer shield of the SMA cables on the AC DC output of the RBT The RBT connected to GateSMU with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain Set the appropriate values for the scopeshot_cal_pulseiv Set the appropriate values for the Vds ld parameters Inputs outputs and returned values are provided in Table 3 19 Table 3 20 and Table 3 21 Table 3 19 Inputs for scopeshot_cal_pulseiv Input Type Description Vds double The DC drain bias provided by the DrainSMU Vgs double The pulse gate voltage amplitude This can be set from 5 to 5 V VgStart double The starting sweep value for Vg output by channel 1 of the pulse generator card VPUID PulseWidth double The Vgs pulse width PW The PW can be 40 ns to 300 ns 10 ns resolution PulsePeriod double The pulse period for the Vgs pulse The period can be set from 100 us to 1 s 10 ns resolution The period must be set so that the Duty Cycle DC is no more than 0 1 This period is most easily calculated by multiplying the largest desired pulse width PW by 1000 Example PW 150 ns so Period 150 us AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set AverageNum 0 for Adaptive Filtering 4200 900 01 Rev H February 2013 Return to Section Topics 3 59 Section 3 Common Device Characterization Tests 3 60
446. to 2 For a VPU with no matrix assign value 1 to the device terminal that is connected to channel 1 of the VPU If the device terminal is connected to VPU channel 2 assign it to value 2 Matrix card system For a system using a matrix card the pin number assignments for each device must match the actual physical connections to the matrix card Figure 3 65 shows an example of how the Device Pin Connections properties must match the actual connections of the devices to the matrix card SMus If your voltage stress system is using a switch matrix the Model 4200 SCS will try to maximize the amount of SMU sharing in order to allow parallel testing It determines what pins can share SMUs in the following fashion If pins from different devices have the same name for example Gate Pin Drain Pin etc and the like named pins are assigned the same voltage stress then when the stress is applied these pins will all be automatically connected to the same SMU through the switch matrix That SMU will supply the voltage stress to all the pins simultaneously Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 4200 SCS SMU1 Force SMU2 Force SMU3 Force SMU4 Force Figure 3 65 Example of device pin connections to a matrix card Device Stress Properties Device1 pin assignments Device Pin Switch Connections Drain Pin 2 F E Gate Pin 3 D pa Source
447. to enable check Open Short and Load compensation The window is opened by clicking the Compensation button in the force measure window Cable length setting is to be made from the compensation window e 0M Disables compensation e 1 5M 1 5 meters e 3M 3 0 meters e Custom Cable length coefficients measured by the user using the Tools gt Connection Compensation dialog box Figure 3 15 CVU compensation window CVU Compensation k Connection Compensation M Open M Short I Load Cable Length 15M v CVU ITM examples CVU Voltage Bias Figure 3 12 shows an example of a FFMO window with CVU Voltage Bias selected as the forcing function to measure Cp Gp The Sampling test mode must be selected for this test see Figure 3 11 When this test is run see Figure 3 16 the following force measure sequence occurs 1 The DC source goes to the PreSoak voltage of 5 V for the hold time period 2 The DC source goes to the DC bias voltage of 1 V 3 After the built in system delay and Interval the Model 4200 CVU performs a measurement The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Step 3 is repeated for every sample The number of samples measurements interval between each measurement hold time and output disable are set from the ITM timing window for sampling 4200 900 01 Rev H February 2013 Return to Section Topics 3
448. tor User Libraries ki42xxulib z User Modules i D10 Name In Out Type Value 1 Vg Input DOUBLE 2 z Vd1 Input DOUBLE 3 3 v Input DOUBLE 5 4 GatePin Input INT a 5 SourcePin Input INT 0 6 DrainPin Input INT 0 7 BulkPin Input INT 0 8 Id1 Output DOUBLE P 4 MODULE Rdson42xx IDESCRIPTION Measures the drain to source resistance of a saturated MOSFET This is accomplished by o Connecting SMU to the source o Connecting SMU to the drain o Connecting SMU3 to the gate o Connecting SMU4 to the bulk jal E res dino The primary differences between ITMs and UTMs are summarized in Table 2 1 Table 2 1 Primary differences between an ITM and a UTM ITM UTM Is always configured using a series of systematic interactive GUIs without programming Is created and configured by connecting the UTM name to a user module and entering or modifying the input parameter values Is flexible Keithley Instruments provides default ITM configurations for most standard devices and tests you can perform many of your evaluations with no changes or very few to the default parameters However you can create a new ITM or customize any existing ITM to perform a wide variety of static and dynamic evaluations You can even create an ITM for a generic n terminal device Is task specific However you can modify the source code for
449. transistor 2 Keithley Model 4801 BNC cables 1 Keithley Model 7078 TRX BNC adapter 1 Keithley Model 8007 GND 3 cable 4 Keithley Model 4200 MTRX X cables 0 if using preamps 8 Keithley Model 4200 TRX X cables 11 if using preamps 2 Keithley Model 7007 GPIB cables 1 Keithley Model 236 ILC 3 safety interlock cable Controlling external equipment overview The Keithley Instruments Model 4200 Semiconductor Characterization System SCS can control any external instrument or component connected to any of the following communication interfaces IEEE 488 GPIB bus RS 232 COM 1 port Ethernet When an external instrument is added to the system configuration it is grouped into one of the following categories Switch matrix Capacitance meter Pulse generator Probe station or test fixture General purpose test instrument Figure 4 1 shows the relationship between internal and external instrumentation and illustrates each instrument category For more information about relationships between internal and external instrumentation refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 1 See the Reference Manual KXCI Ethernet client driver page 9 104 to learn how to enable ethernet control of exter nal instruments 4 2 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 1 Sys
450. ts Model 4200 SCS User s Manual Table 3 16 continued Inputs for Vgid_DC_Pulse_pulseiv Input Type Description DrainSMU char The SMU used for the Drain This can be SMU1 up to the maximum number of SMUs in the system This is the SMU that applies the DC bias to the DUT drain during the pulse or DC sweep Draini_DC_X_Size int These values must be set to a value that is at least equal to the DrainVMeas_DC_Size number of steps in the sweep and all values must be the same DrainVProg_DC_Size GateVMeas_DC_X GateVProg_DC_Size Drain Size_Pulse_Size DrainVMeas_Pulse_Size DrainVProg_Pulse_Size GateVSize_Pulse_Size GateVProg_Pulse_Size Table 3 17 Outputs for Vgid_DC_Pulse_pulseiv Output Type Description Drainl_DC Pulse double The measured drain current from channel 2 of the 4200 SCP2 or the DrainSMU In the case of Pulse this current is determined by measuring the voltage drop across the 4200 SCP2 50 termination giving Id Vd 50 Q DrainVMeas_DC Pulse double The measured drain voltage from channel 2 of the 4200 SCP2 in the case of pulse and the measured voltage on the DrainSMU in the case of DC DrainV_Prog_DC Pulse double The programmed drain voltage either supplied by the pulse card or the SMU for the drain GateVMeas_DC Pulse double The measure gate voltage from channel 1 of the 4200 SCP2 in the case of pulse and the measured voltage on the GateSMU in the case
451. ts a check mark for its device plan its subsite plan and the project plan 2 22 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Device plan e Clearing a check mark for a device plan also clears the check marks for all of its subordinate tests e Inserting a check mark for a device plan also inserts check marks for all of its tests e Removing the check marks for all the tests in the device plan also removes the check mark for the device plan Subsite plan e Removing a check mark for a subsite plan also removes the check marks for all of its device plans and tests e Inserting a check mark for a subsite plan also inserts check marks for all of its device plans and tests e Removing the check marks for all the tests in the subsite plan also removes the check mark for the subsite plan Initialization and termination steps e Removing a check mark for initialization or termination steps also removes the check marks for all of its UTMs e Inserting a check mark for initialization or termination steps also inserts check marks for all of its UTMs e Removing the check marks for all the UTMs in the initialization or termination steps also removes the check mark for the initialization or termination steps Project plan e Removing a check mark for a project plan also removes the check marks for all of its plans and tests e Inserting a check ma
452. turn to Section Topics 5 13 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual Figure 5 12 Triangle waveform default settings Waveform Generator Waveform Type Triangle _y Waveform Name TRIANGLE1 Settings Points Per Cycle S00 Number Of Cycles 2 Amplitude v 1 Offset v 0 Phase Degrees 0 v 3 5 gt Notes At Time Per Point OF 1e 008s 2 0E 02 4 0E 02 6 0E 02 8 0E 02 1 0E 03 Period Se 006s Points Frequency 200000H2 Preview Custom waveform An example of a custom waveform is shown in Figure 5 13 The waveform for this example is named CUSTOM1 but can be any name that is not already used in the Scratch Pad The voltage values for the waveform are retrieved from an imported file txt or csv After creating a file txt or csv for the custom waveform use Import Filename shown in Figure 5 13 to import the file into the Waveform Generator After importing the file click Preview to show the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 13 Custom waveform Waveform Generator Waveform Type Custom y Waveform Name CUSTOM1 Settings Import Filename l C 454200 kiuser KPulse 4rbFiles custom_1 txt Bl Voltage Vv Notes At Given Time Per Point OF 1e 008s Period 6e 008s Frequency 1 66667e 007H2 Points Preview Cancel Creating a file txt or csv for custom waveform The waveform file is created
453. ty these will be referred to as tests for the rest of this topic 1 In the project navigator locate the device plan that contains the test or tests that you wish to submit Figure 2 39 shows an example device plan capacitor from an example u_build project plan used in the Reference Manual Building a completely new Project Plan page 6 47 The capacitor device plan contains the charg_char ITM to be submitted Figure 2 39 Device plan containing an ITM to be submitted E s u build 3 InitializationSteps E E subsite_a 2 1E 4terminal n fet ME vds id ME vds id B 1E 4terminal n fet 2nd_in_subsite ME vds id2 el 3 subsite_b i 1E 4terminal n fet E res_drain to source a E JE charg_char SE composite TerminationSteps o fi noana as coo 2 Double click the device plan that contains the test or tests that you wish to submit The device plan window opens See Figure 2 40 4200 900 01 Rev H February 2013 Return to Section Topics 2 49 Section 2 Model 4200 SCS Software Environment Model 4200 SCS User s Manual Figure 2 40 Device plan window containing an ITM to be submitted Sequence r Test Sequence Table m Test Library L E CAS4200 Kiuser Tests z Submit gt gt Submit As gt gt Include Data V ak capacitor 3 If you want to submit the tests to a test library directory other than the default test library directory 7 select the alternate test library
454. u that the test sequence is finished see Figure 4 34B Click Ok to continue Figure 4 35 Test sequence Model 4200 SCS User s Manual InitializationSteps Probelnit Test data Site 1 Subsite i T 3 5 2 5 T g connec vds id 1x aj 3 D npn bjt connect vce ic 1x probe ss move N Subsite 4terminal n fet connec vds id 2x BE 3terminal npn bjt connect vce ic 2x probe ss move Site 2 m Subsite probe ss move vce ic 2x probe ss move TerminationSteps prober separate prober prompt Stop Since five sites were tested there will be five sets of test data one for each site Remember a test is opened by double clicking it in the project navigator Test data is viewed by clicking the Graph or Sheet tab for the test When you double click a test to open it its test data corresponds to the site number displayed by the site navigator at the top of the project navigator As shown in Figure 4 36 click the up or down arrow to change the site number For example to view test data for Site 2 set the site navigator to Site 2 and double click the desired test Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Figure 4 36 Site Navigator Click a to increment or
455. ual voltage sweep iii Delay With Dual Sweep selected 3 the SMU will sweep from Start to Stop and then Start 10 yw sweep from Stop back to Start When disabled the SMU will sweep from Start Stop 5 Voy se Step 0 1 y v On Time Data Points 51 Off Time Pulse Mode can be selected ONLY when Base Voltage Tc Range B source and measure ranges are fixed In 7 Ver a a other words Pulse Mode is disabled if the Compliance 0 1 A v Voltage OFF source or measure range is set to AUTO Protection Perform the following steps to select and Measuring Options configure Pulse Mode I Current M Voltage 1 Select 3 Pulse Mode and set the On Name Drain Time Off Time and Base Voltage or girem Massured Base Current for a current sweep 2 Click OK Status Basic test execution Project navigator check boxes As shown in Figure 2 14 each component of the project plan has a check box A check mark ina box indicates that the test or plan is enabled The absence of a check mark indicates that the test or plan is disabled Clicking a check box either inserts a check mark to enable or removes a check mark to disable Only enabled check marked tests or plans can be run There is interaction between the project navigator check boxes and is explained by the following actions Tests ITMs and UTMs e Acheck mark can be inserted or removed for any test e Inserting a check mark for a test also inser
456. ugh 100 kHz in 10 kHz increments e 100 kHz through 1 MHZ in 100 kHz increments e 1 MHz through 10 MHZ in 1 MHz increments The AC signal output level can be set from 10 mV RMS to 100 mV RMS 1 mV resolution The output impedance is 100 Q typical There are three current measurement ranges available to measure current 1 UA 30 pA or 1 mA With auto range selected range selection will be performed automatically DC bias function and sweep characteristics The AC test signal can be biased with a static DC level 30 V to 30 V or a voltage sweep up or down You can also perform a frequency sweep up or down e DC bias waveform The DC bias is set to OV but can be set to any valid DC bias level you specify the number of measurements to perform see Figure 1 17 e DC voltage sweep You specify the start voltage stop voltage and step voltage The number of data measurement points is calculated by the Model 4210 CVU see Figure 1 18 e Frequency sweep You specify the start frequency and the stop frequency the number of data measurement points is calculated by the Model 4210 CVU see Figure 1 19 4200 900 01 Rev H February 2013 Return to Section Topics 1 23 Section 1 Getting Started Model 4200 SCS User s Manual e Voltage list sweep You specify the voltage levels for the sweep not shown e Step frequency sweep Includes voltage stepping A voltage sweep will be performed for every frequency point not shown
457. ulse IV 2 level pulse Parameter identity cells Spreadsheet like cells where the test module parameter names and data types are specified Parameter entry cells Spreadsheet like cells where you enter test parameter values A UTM is created and configured by first selecting a user library and user module and then entering parameter values For details about defining and configuring a UTM refer to the Reference Manual Configuring the UTMs page 6 147 Using the UTM GUI view To understand the test read the explanation of the test in the Test Description area see Figure 2 6 on page 2 13 Note that the UTM GUI view will typically hide the less used parameters these parameters are available in the classic view If a parameter s use is unclear check if the parameter has any hovertext help position the mouse pointer over the parameter entry field Additional 2 12 Return to Section Topics Model 4200 SCS User s Manual Test module selection for the UTM 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment information about parameter usage may also be in the Test Notes tab or in the test device or other graphical illustration area If a group box has a plus sign in it then the box is collapsed click the to expand the box A box will only expand when there is sufficient space to show all of the parameters within the group In cases where ther
458. un Test Subsite button in the red oval on Figure 3 113 c Ensure that the test cycles through each test in the project navigator and that data is input into the Subsite Data tab Move to a fresh device and click the Run Test Subsite icon Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests 10 If errors or unexpected operation occurs see the Error codes and Troubleshooting sections The following three projects are similar and use the shared stress measure looping capability of the FlashEndurance projects e FlashDisturb NAND project e FlashDisturb NOR project e FlashDisturb switch project The purpose of the Disturb test is to pulse stress a device in an array test structure then perform a measurement such as V on a device adjacent to the pulsed device The goal is to measure the amount of V shift in adjacent cells either in the programmed or erased states when a nearby device is pulsed with either a Program Erase or Program Erase waveforms The typical measurement is a V extraction based on a Vg ld sweep but any type of DC test may be configured The difference between the FlashDisturb NAND and FlashDisturb NOR are the typical pulse widths and levels specific to the DUT type The FlashDisturb switch is a generic example of the Flash testing described above but adds support for an external Keithley switch matrix FlashDisturb t
459. und through the ground wire in the power cord Failure to use a grounded outlet may result in personal injury or death due to electric shock Figure 1 1 Line power receptacle and line fuses location Power Receptacle Line frequency setting The Model 4200 SCS can be operated either from 50 Hz or 60 Hz power line sources but it does not automatically sense the power line frequency when it is powered up You can change the line frequency setting using the KCON utility See the Reference Manual Keithley CONfiguration Utility KCON page 7 1 for details NOTE Operating the Model 4200 SCS with the wrong line frequency setting may result in noisy readings because the line frequency setting affects SMU line frequency noise rejection Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Line fuses Rear panel fuses protect the power line input of the unit If the line fuses need to be replaced perform the following steps WARNING Turn off the power and disconnect the line cord before replacing the fuses Failure to turn off the power and disconnect the line cord before replacing the fuses may result in personal injury or death due to electric shock 1 The fuses are located in two fuse holders above the AC receptacle see Figure 1 1 2 Using asmall slotted screwdriver to remove each fuse holder push the fuses in and rotate them counterclockwise to remove
460. up shown in Figure 3 113 and Figure 3 114 uses Segment ARB waveforms to perform log stressing that ranges from 1 to 100 000 counts The Segment ARB waveform files Flash NAND Vg ksf and Flash NAND Vd ksf used for stressing are loaded into the Device Stress Properties window shown in Figure 3 114 The stress properties window is opened by clicking the Device Stress Properties button in Figure 3 113 Example results for the Endurance tests are shown in Subsite Graph tab see Figure 3 115 4200 900 01 Rev H February 2013 Return to Section Topics 3 131 Section 3 Common Device Characterization Tests 3 132 Figure 3 112 Model 4200 SCS User s Manual FlashEndurance NAND project plan FlashEndurance MAND Keith JE File Wew Project Run Tools El ft of Flach Endurence NAND i MISSE Ree Endurance Figure 3 113 AoatingGame Program Setup DC Pr Vi Maxtam Erase Setup DC Er Vi MaxGm FlashEndurance NAND project Subsite Plan tab 3 FlashEndurance NAND Keithley Interactive Test Environment FlashEndurance 0 1 JE File View Project Run Tools Window Help a x gt be gt Guoxnt so I xi Stee E cece Sibata Saip Subste Data Subste Gr ve IV Enable Cycles Mae M4 E FloatingGate C Stress Measure Mode Segment Stress Measure Mode C Cycle Mode M E SetupDC P Stress Measure Cycle Times Cycles MIIE SetupDC Program C Linear C lis Stress Counts
461. uration page 4 1 and Reference Manual Source Measure Concepts page 5 1 for details Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 1 Getting Started Figure 1 10 Basic SMU source measure configuration 4200 SMU or 4210 SMU 4200 SMU or 4210 SMU Measure FORCE Q no r GUARD 100kQ Source Auto Sense Control Resistors l Limit Compliance V Limit DUT Compliance V MEASURE v oe SENSE E LO o ZL a orn V Source gt SENSE LO GUARD 100kQ VY can Ground Unit eX 50kQ CHASSIS COMMON Removable Ground Link 4200 900 01 Rev H February 2013 Return to Section Topics 1 15 Section 1 Getting Started Model 4200 SCS User s Manual SMU terminals and connectors The locations and configuration of the Models 4200 SMU and 4210 SMU terminals are shown in Figure 1 11 Basic information about these terminals is summarized below Refer to the Reference Manual Connections and Configuration page 4 1 for additional information regarding SMU signal connections WARNING Asserting the interlock will allow the SMU and preamp terminals to become hazardous exposing the user to possible electrical shock that could result in personal injury or death SMU and preamp terminals should be considered hazardous even if the outputs are programmed to be low voltage Precautions must be taken to prevent a shock hazard by surrounding the test devic
462. urce measure connections page 4 3 CAUTION The maximum allowed voltage between circuit COMMON and chassis ground is 32 V DC FORCE terminal The FORCE terminal is a standard triaxial connector used as a return path for the SMU or preamp FORCE current e The center pin is FORCE The inner shield is GUARD The outer shield is circuit COMMON NOTE The ground unit FORCE and GUARD signal terminals are connected to circuit COMMON SENSE terminal The SENSE terminal is a standard triaxial connector used to apply the ground unit SENSE signal to the DUT in a remote sense application e The center pin is SENSE The inner shield is GUARD 4200 900 01 Rev H February 2013 Return to Section Topics 1 39 Section 1 Getting Started Model 4200 SCS User s Manual The outer shield is circuit COMMON When the ground unit SENSE signal is connected to a DUT all SMU preamp measurements will be made relative to this DUT connection COMMON terminal The COMMON terminal is a binding post that provides access to circuit COMMON NOTE Normally a link is connected between ground unit COMMON and chassis ground but it may be necessary to remove the link to avoid measurement problems caused by ground loops or electrical interference Refer to the Reference Manual Interference page 5 25 for details Chassis ground This binding post provides a convenient connecting point to system chassis ground for the purpose of shielding a test fixture
463. ure Cycle Times Cycles 3 G linear Clog List Stress Counts kiedo Fist Stress Cout fO fo Total Stress Count fioo Number of Stresses 2 Stress Measure Delay foo Device Stress Properties Stress Time l Add Remove m Periodic Test Interval Log 4 Enable Periodic Testing Total Cycles Rate s Aw Periodic 1 Select Enable Cycles 2 Select the Segment Stress Measure Mode 4200 900 01 Rev H February 2013 Return to Section Topics 3 83 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 Select and configure Stress Measure Cycle Times Linear cycle counts After setting the first and total stress counts and the number of stresses the linear Stress Counts will be automatically calculated and displayed when Apply is clicked Step 5 The Number of Stresses must be less than the Total Stress Count or an error will be displayed Note that the Total Stress Count is cumulative Log cycle counts After setting the first and total stress counts and the number of stresses per decade the log Stress Counts will be automatically calculated and displayed when Apply is clicked step 5 see Figure 3 70 Note that the Total Stress Count is cumulative List cycle counts Cycle counts are added to the Cycle Times list by entering a count value into the Stress Counts field and clicking Add A cycle count value can be removed by selecting it and cli
464. using a text editor utility such as Notepad To create the list of voltage points 1 Open a text editor utility 2 On the first line type the number of voltage points in the waveform and then type the list one per line of values for the waveform txt file format As shown in Figure 5 14 commas are not used to separate values e csv file format As shown in Figure 5 14 commas are used to separate values Only the first column of data is used for the waveform Additional columns are ignored 5 14 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 5 How to Generate Basic Pulses Figure 5 14 Creating a txt or csv file for a custom waveform txt file format csv file format P custom_1 Notepad DAR P custom_1 Notepad DER File Edit Format Yiew Help File Edit Format view Help 3 The custom waveform in Figure 5 13 is a simple 6 point waveform made up of these voltage values 0 V 4 V 1 V 3 V 2 V O V Those seven entries are shown in the text editors in Figure 5 14 NOTE The time at each point is determined by the Time Per Point setting in the Arb Generator tab Step 4 in Figure 5 8 4 Save as a waveform file txt or csv in the ArbFiles folder at the following command path location C S4200 kiuser KPulse ArbFiles Calculation waveform An example of a calculation waveform is shown in Figure 5 15 The waveform for this example is named CALC1 but can be any
465. values for Endurance testing or Disturb testing Before using any of these projects determine the appropriate pulse voltages and widths by first using the appropriate project using the procedures in Running the Flash NAND Flash NOR or Flash Switch Project The Endurance and Disturb projects include everything from the corresponding Flash NAND Flash NOR or Flash Switch projects To use an Endurance or Disturb test ensure that each test in the project navigator is functioning properly by following the procedures below After setting up all of the tests the information below will continue to explain the setup for the stress measure looping that is the core of any endurance or disturb test 1 If system connections have not been made follow the instruction in Running any Flash Project for the first time 2 If KITE is not running start KITE by double clicking the KITE icon on the Model 4200 SCS desktop 3 Open the appropriate KITE Flash project a Within KITE click FILE gt Open Project If the dialog window is not displaying the _Memory folder move up one or two levels to the display the Projects directory Double click the _Memory folder then double click the desired Flash test folder see list above 3 138 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests this procedure then double click the appropriate kpr file to open the desired Model
466. ver the probe station configuration is simple because step 2 can be omitted To configure a manual probe station connect the test system measurement signals to the probe station as indicated in Figure 4 22 and align the prober to the first subsite test element group in the test sequence 4 20 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 4 How to Control Other Instruments with the Model 4200 SCS Open the probesubsites project Open the probesubsites project from the File menu on the KITE toolbar click Open Project The project navigator for the probesubsites project is shown in Figure 4 28 Figure 4 28 Project navigator ixi se H probesubsites Ei InitializationSteps E Probertnit E386 Subsitel 1E 4terminal n fet connect vds id 1x iminal npn bjt connect vee ic 1x probe ss move Bw aK w T Tay a 2 N E 3 Sub eet FAL 2 oo iminal n fet connect vds id 2x erminal npn bijt connect vee ic 2x probe ss move a TerminationSteps prober seperate prober promt Hlg eee p 9 ls Sse 0OfFH HmM 3 0NNENNWNDHOG DIY F s ProjectView Open the project plan window In the project navigator double click probesubsites to open the project plan window For this tutorial five sites on a wafer are to be tested As shown in Figure 4 29 set up the project plan as follows and cli
467. vice Stress Properties Device Stress Properties x General Settings y F NOTE Set a SMU pin to 1 to indicate high impedance mode used when sharing a terminal with a Pulse Channel 1 Active Site 1 SMUs may not be used in Segment Stress Measure Mode if RPMs exist 3 __ gt o fo Pulser Settings 2 PMU 1 C PMU 2 C PMU 3 C PMU 4 C PMU S C PMU 6 Channel 1 Channel 2 4 Load ohm 50 Current Limit A 0 105 Current Limit 4 0 105 C 54200 kiuser KPulse SarbFiles Flash NAND Segment ARB File C 454200 kiuser kKPulse SarbFiles Flash NAND Segment ARB File PMU 1 Channel 1 PMU 1 Channel 2 Device Name FloatingGate Abs Target Target Value o F 0 0 Vt MaxGm Erase 1 VT O a 0 0 8 Clear Copy Paste Paste to All Sites 1 Active Site selection e When active this field is used to select the wafer site number e If there is only one wafer site this field will be inactive 2 Pulser selection There is a Device Settings Properties window for each pulse generator card in the system Model 4225 PMU 4220 PGU 4205 PG2 or 4200 PG2 Select the pulser to be configured 3 SMU Pins No switch matrix With no switch matrix the active SMU pin fields must be set to 0 no connection or 1 high impedance The 1 setting puts the SMU in a high impedance mode which is necessary if it shares a pin with a
468. waveform see Figure 3 103 to program and erase a flash memory device The Definition tab for this test is shown in Figure 3 106 Figure 3 106 Flash NAND project Fast Program Erase definition tab 7 Flach MAND Ketthing Interactive Test Errimrment Fart Program Frasr t 1 E Fie ew Project fun Taou indo Help 2x C e H e M eo a 9 PO Pee Nah HAND Fem Uva Laras tai z AE arining ate i 2E Prym Cult Veh Use kodu dabi pihe Nyh i a Fiye ls Fart Progeret usa w Seta UE a 3 RACE Tenn Posing ate PulesTerminals WPUICH WELT CHD wPLOCHT PPD Binig Pulse iotager PE Fart Mogent uced The Gouble_polee_fleeh function defines and cutpute 1 8 wareforee congizting of 2 peleer vhich kava indepedest widthe ard levels Mha vava oraz ara defined axing lite megment xegeent srb moda of the 4205 PG2 The wevetore can be defined for just a program oY arase cules or wavefors coebinina both orogyse and ets e oyoles tor up 10 9 indepsadent pulse chanrsls 9 mecima changes vith four 1205 Foch vorcices consists cf l soto of poromotoro for cach zo in the vavators PrePulesH eley TreexizticnTimesPulesH Puleetidth FootFulesiDeleay PulasHVYolteges where ix either i or 2 Hote a t gt kiam E Prego j Ewig Ej FatPogen SetupDC test The Definition tab for this test is shown in Figure 3 107 This test isolates the VPU outputs from the DUT allowing the SMUs to pe
469. weeping Stepping functions to allow Sampling Mode selection SMU Power On Sequence Move Up Move Down Down MV Timestamp Enabled M Disable outputs at completion Cancel Speed There are four measurement speed settings 4200 900 01 Rev H February 2013 Return to Section Topics B Sampling Mode selected ITM Timing Speed e Fast Delay Factor 1 Normal Filter Factor 1 C Quiet C Custom A D Aperture Time Auto PLCs C Sweeping Mode k d b z Sampling Mode Interval 25 B Samples 10 Hold Time f1 s B SMU Power On Sequence Move Up _Move Down Down MV Timestamp Enabled IV Disable outputs at completion Cancel 3 13 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual 3 14 e Fast Good choice for quick measurements where noise and settling time are not concerns e Normal Provides a good combination of speed and low noise and is the best setting for most cases Quiet Best choice when you need the lowest noise and most accurate measurements e Custom Allows you to fine tune the timing parameters to meet a particular need For details about this setting refer to the Reference manual Timing window page 6 134 NOTE The above measurement speed selections can also be made from the speed drop down menu located at the top of the Definition tab Figure 3 10 Mode There are two test modes for the Model 4200 CVU sweeping and sampling The sweeping
470. white SMA cables Interconnect between RBT and prober manipulator optional 3 6 6 ft 2 m white SMA cables Interconnect between SCP2 pulse generator and RBTs 4 6 6 ft 2 m black Triax cables Interconnect between SMUs and RBTs 2 SMA female to BNC Male Adapt SCP2 BNC channels to SMA 1 SMA female to SMB plug Adapt SCP2 SMB trigger to SMA 1 Power Divider Male Female Male Connects to Gate side RBT AC IN connector Supplied tools The following tools are supplied with the Model 4200 SCS or PIV A package 1 Phillips screwdriver e Torque wrench 8 in Ib with 5 16 in head installed NOTE The various adapters cables and hardware used for the pulse projects are shown in the Reference manual Figure 11 35 Figure 3 26 Pulse IV hardware connections Model 4200 SMU 1 Model 4205 PG2 Model 4200 SMU 2 Scope Card Model 4200 SCS Instrument Slots White SMA Cable 2m 6ft male to male 1 of 5 AC DC Output e 5 4 3 f 3 port J Pe st e a power O saeu fase eo sense io 2 divider AC White SMA Cable 4200 MTRX X INPUT 15cm 6in Cable 2m 6ft gt AC DC fA male to male 1 of 4 OUTPUT HB SMB Male to SMA Female Adapter Model 4205 RBT 2 al BNC Male to SMA Female Adapter NOTE Use torque wrench to tighten SMA connections to 8 inch lbs 4200 900 01 Rev H February 2013 Return to Section Topics 3 29 Section 3 Common Device Characterization Tests
471. wn on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa screw is present connect it to safety earth ground using the wire recommended in the user documentation The A symbol on an instrument means caution risk of danger The user should refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The A symbol on an instrument means caution risk of danger Use standard safety precautions to avoid personal contact with these voltages The A symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The Al symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performin
472. www keithley com Model 4200 SCS Semiconductor Characterization System User s Manual 4200 900 01 Rev H February 2013 IATA 4200 900 01 KEITHLEY Model 4200 SCS Semiconductor Characterization System User s Manual KTE Interactive Version 9 0 2000 2012 Keithley Instruments Inc All rights reserved Any unauthorized reproduction photocopy or use of the information herein in whole or in part without the prior written approval of Keithley Instruments Inc is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders Document Number 4200 900 01 Rev H February 2013 KEITHLEY Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner not specified the
473. x of the Submit device dialog box type a name for the device 8 Click OK One of the following occurs e If you selected only one device in the Device Sequence Table the selected device is submitted to the chosen folder under the new name Stop here you have finished the device submission procedure e If you selected multiple devices in the Device Sequence Table the following occurs a The device that you renamed in Step 7 is submitted to the chosen folder under the new name b Then another Submit device dialog box opens for another selected device 9 Repeat Steps 7 and 8 until all of the selected devices have been submitted until no more Submit device dialog boxes open 2 48 Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Submitting tests to a library You may submit one or more ITMs or UTMs to any test library if you submit them with names that do not duplicate test names that are already in the library NOTE Before submitting any UTM to a library make sure that it is configured If you try to submit an unconfigured UTM KITE displays the message shown in Figure 2 38 Figure 2 38 Unconfigured UTM message Keithley Interactive Test Environment xi This UTM has not been properly configured and cannot be submitted Please select a valid user library module and parameter set and try again To submit the UTMs or ITMs for simplici
474. y to decrement site number The title bar at the top of the KITE panel indicates which test is presently being displayed In Figure 4 37 test vce ic 2x for Site 2 is displayed The unique identifier UID distinguishes this test from any other test having the same name Figure 4 37 KITE title bar prbesubsifes Keithley Interactive Test Environment yvce ic 2x 1 2 ELJ vce ic 2x test name 1 UID number 2 site number Running individual plans or tests You can run any subsite plan device plan or test in the project The test sequence will stop after the plan or test is finished To show how to run the 3terminal npn bjt device plan for subsite 2 of site 2 1 Manually position the prober to test Subsite 2 of Site 2 Make sure the prober pins are making contact with the subsite pads 2 Set the site navigator to Site 2 3 In the project navigator click 3terminal npn bjt for Subsite2 to select the device plan 4 Click the green Run button gt to start the test sequence How to control an external pulse generator This tutorial demonstrates how to control a pulse generator to stress a semiconductor device and analyze the effects of the stress The applied stress is a burst of 3 5V pulses across the gate substrate bulk terminals of an N channel MOSFET To run the basic test sequence 1 Measure the transfer characteristics of the device before the stress 2 Apply a stress burst of 3 5V pulses 3 Mea
475. yed test 2 Make room for the two graphs a Hide the project navigator to expand the size of the Workspace b Reduce the size of the test documents NOTE The close button X is located at the top right corner of the project navigator Figure 4 54 shows the button to reduce the size of the test documents in the workspace Figure 4 54 Buttons to close or reduce size of test documents 6 x la x Click to reduce size of all test documents Click to close displayed test To close or reduce size of test documents 1 Position tests side by side A test document is moved by clicking the title bar at the top of the document and dragging it to the desired location in the workspace 2 Display the graphs The graph for each test is displayed by clicking the Graph tab Figure 4 55 shows typical graphs for the two id vg tests 4200 900 01 Rev H February 2013 Return to Section Topics 4 35 Section 4 How to Control Other Instruments with the Model 4200 SCS 4 36 Model 4200 SCS User s Manual Figure 4 55 id vg graphs id ygt1 1 id vgt2 1 Definition Sheet Graph Status Definition Sheet Graph Status 0328 2000 07 01 39 MOSFET icd vg KEM mosrFetic vg KE a acl ne ake ks pene Pan mondiale one alll Ie reer oa T E 2 5 5 amp a S sougjonpuossued Drain Current 4 S aoueyjonpuossued Gate Voltage Y Gate Voltage Y A Before stress graph B After stress graph 3 Scale
476. ze value that is at least equal to the DrainPulseSize number of steps in the sweep and all three must be the same value Table 3 20 Outputs for scopeshot_cal_pulseiv Output Type Description Time double Array of time values from the 4200 SCP2 scope s GatePulse double Array of gate pulse voltages from channel 1 of the 4200 SCP2 scope DrainPulse double Array of drain voltages from channel 2 of the 4200 SCP2 scope VgMeas double Measured Gate Voltage VdMeas double Measured Drain Voltage IdMeas double Measured Gate Current Table 3 21 Return values for scopeshot_cal_pulseiv Value Description 0 OK 1 Invalid Gate Voltage Max 5 V 2 Invalid Drain Voltage Max 210 V 5 Invalid Pulse Width Min 40 ns 6 Invalid Pulse Period Min 40 ns Return to Section Topics 4200 900 01 Rev H February 2013 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Table 3 21 continued Return values for scopeshot_cal_pulseiv Value Description 7 Invalid Average Num must be between 1 and 100000 8 Invalid LoadLineCorr must be between 0 and 1 9 Time GatePulse and Drain Pulse array sizes must be equal 11 Invalid VPU Specified VPU is not in current system configuration 12 Invalid GateSMU Specified SMU is not in current system configuration 13 Invalid DrainSMU Specified SMU is no

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