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VisualTCAD Semiconductor Device Simulator

1. Figure 2 12 Choosing a Working Directory for the Simulation Run As the simulation proceeds the progress is updated in the status bar at the right bot tom corner of the window as shown in Figure 2 13 p 23 In addition simulation solutions are listed in the Results pane in the dock widget For advanced users the running log message is available in the process monitor which 1s activated by clicking EJ Console in the toolbar Genius Device Simulator Simulate a PN Junction Diode File Edit Simulation Window Help D PH on x e Simulation Control Simulation Control ex Setup Results ka Label B e Description result ov X OAnode00 1 7713 0 05 V x XX 0 05Anode0 050 C Q lv x XX 0 1Anode0 10 11 0 15 v x XX 0 15Anode0 150 4 elp Project Explorer E x home hash build VisualTCAD Na Sjaj i Name size B Ww translations H D tool H gai tmp jy src amp a python Er gi lib H ws images amp ag help amp ws examples amp gi docs a Gg data a ag a K Electrodes Contact Name Anode Source Type Start Voltage 0 Stop Voltage 1 Step Voltage 0 05 Voltage Sweep v v vV Simulation diode sim Visual TCAD Contact Name Cathode Source Type Voltage 0 Const Voltage v v Tutorials Summary Structure Embedded CGNS data Status Simulation running Solutions B Completed 4 sol
2. PIN VDD PIN IN PIN OUT PIN GND Figure 2 43 editing symbol attribute Our 2D inverter structure is shown in Figure 2 44 p 47 Here total have 8 elec trodes we need connect each 2 electrodes like Figure 2 44 p 47 finally we have 4 electrodes as our symbol of inverter Figure 2 44 2D inverter structure before the interconnect we need do boudary setting like Figure 2 45 p 48 Genius Device Simulator 47 Tutorials Mix Mode Simulation of Inverter IO Circuit p ex 1 Edit Workfunction Boundaries and Contacts Electrical Thermal ADER AE Type Gate contact Boundary workfunction NGate Gate contact Resistance 0 Q X NSource Ohmic contact N gate NSub Ohmic contact Capacitance 0 Calz PDrain Ohmic contact Gate contact Inductance 0 H v Pgate 5 1 Pgate 5 2 Edit Z Width NSub 1 PSource Ohmic contact PSub Ohmic contact Workfunction 5 1 ev iy Xx Override Global Z Width ith J id Interconnect lt lt Less More gt gt Boundary Z Width 2 um Restore Defaults X Cancel PSub 2 Figure 2 45 boundary parameter setting Aboout Numerical simulation as shown in Figure 2 46 p 48 We use intercon nect command to connect each 2 electrodes such as connectting PSub to PSource connectting PGate to NGate connectting PDrain to NDrain and connectting NSub to NSource It is shown in Figure 2 47 p 49 At the same time we need define the
3. eens 1 1 2 Installing on Linux a 4 1 3 Installing the Floating License on Linux 6 1 3 1 Starting FlexLM Server 0 eee ee 6 1 3 1 1 Verifying the FlexLM Server NI 1 3 1 2 Merging with other licenses managed by FlexLM 8 1 4 Using the Graphical Interface 0 aaa 9 1 5 Using the Command line Interface 0 00 11 2 Tutorials 15 2 1 Simulate a PN Junction Diode a 15 2 1 1 Building the Diode Structure 15 2 1 2 Simulating the I V Characteristics 21 2 1 3 Examining the I V Characteristics 04 24 2 1 4 Visualizing the Solutions 0 0 0 0 eee eee Zi ZAMS SUMA 26 sacs en bo ERs BAHAG AA LEA BLG as Se AWA 30 2 2 Simulate a Diode Rectifier Circuit 0 000 eee 31 2 2 1 Assigning Circuit Symbol 2 0 eee eee 31 2 2 2 Drawing Circuit Schematic cc cee ee eee 33 2 2 5 Similans eCe i4 444besd lt teecedueecansecaes 35 2 2 4 SUNMATY i104 c0446404bebesaee dena rde nde ad kiti 36 2 3 A 0 18um MOSFET 2 ccc ee ee eee eee een ees 37 2 3 1 Building MOSFET Device Structure 37 2 3 2 Simulating l V Curves aa 41 2 3 3 Setting Mobility Model Parameters 43 2 4 Mix Mode Simulation of Inverter IO Circuit 45 2 4 1 Creating Symbol and Mapping Device Electrode 45 2 4 2 Mixed Mode Simulation 0 0 cee eee e
4. pami Simulation Result Project Explorer ax home hash build VisualTCAD z a Ee Name Bu size ws translations E tool wa tmp E src mi python i lib mi images ig help i examples i docs a ig data 4 LT 7 Pogessouerall E Those Snap 10 320 Figure 2 28 The Completed Rectifier Circuit Schematic Schematic UnNamed sch Mon February 8 2010 03 16 52 34 Genius Device Simulator Simulate a Diode Rectifier Circuit Tutorials Simulating the Circuit We want to do transient mode simulation so we setup the timing with the 4 Setup Simulation tool as shown in Figure 2 29 p 35 Analysis Settings x Analysis Type Transient z Transient Settings Run to 2us Time Step Use Initial Conditions x Cancel J OK Figure 2 29 Dialog for Setting Up Transient Analysis We click the Run Simulation tool to start the simulation The monitoring and analysis procedure is similar to that in the previous example In the result spread sheet we plot the columns probe1pos and v1pos using time as the x variable The waveform plot is shown in the Figure 2 30 p 35 Visual TCAD m File Edit Plot Window Help D FH NAN he Eko a Plot Tools amp Simulation diode circuit sim 6 Schematics rectify sch B SpreadSheet result dat i 3 Plot Tools Ex 1 JEEE Curve Name Properties 3 Group 2 curves ly vi
5. Figure 2 1 The 2D Device Drawing Window Genius Device Simulator 15 Tutorials 16 Simple Mouse Operations Drawing Device Outline Simulate a PN Junction Diode The coordinates of the mouse cursor is displayed in the status bar at the right bot tom corner of the main window The default unit of the coordinates 1s micron but this can be changed by the user To zoom in or zoom out the viewport one can click the A Zoom in or 4 4 Zoom out tool button Alternatively one could simple scroll the mouse wheel up or down The zooming will leave the view under the mouse cursor stationary To translate the viewport one can hold the mid button wheel of the mouse and drag the viewport We start by drawing a box representing the body of the silicon diode Choose from the drawing tools 1 Add Rectangle We define the first corner of the rectangle by clicking at the coordinates 1 0 One may notice that in the Add Rectangle tool the mouse cursor 1s snapped to the background grip Click again at 1 2 to define the other corner and complete the rectangle This closed rectangle region is slightly shaded We then proceed to define the anode and cathode by drawing the two rectangles 0 2 0 2 0 2 0 and 1 2 1 2 2 respectively The outline of the device struc ture is Shown in Figure 2 2 p 16 Visual TCAD File Edit View Drawing Device Window Help D FH NXB Fa Device Drawing Device Drawing Cl Drawing Tools
6. N Tr Ea EH Aj Layer List Object List Project Explorer ax home hash build VisualTCAD S a Ea e Left click to add start point of rectangle enter Mouse 0 1964 0 7384 Snap 0 2000 0 7000 KA Figure 2 2 The Outline of the PN Junction Diode 1 amp Ma Ea a l l The default snap mode is 4 Auto Snap which is appropriate in most occasions The snapping modes are described in detail in a separate documentation Genius Device Simulator Simulate a PN Junction Diode Tutorials Assigning Every enclosed region in the drawing must be labelled and assigned a material Material Regions To label such a region one chooses the fl Add Region Label tool and click within one of the regions We first click at O 1 which prompts a dialog as shown in Figure 2 3 p 17 We key in the label Silicon the maximum mesh size of 0 1 micron in this region choose the Si material from the list and click OK VisualTCAD Region Label silicon N Material Si z Symbol Color Select Max mesh size um 0 1 Xx Cancel J OK Figure 2 3 Device Region Label Dialog One notices that the region is now filled with the pink color representing the silicon material We similarly assign the Anode and Cathode regions both of the Al material and the drawing becomes as in Figure 2 4 p 17 Visual TCAD File Edit View Drawing Device Window Help D FH INO Xx EI X Dev
7. Simulate a Diode Rectifier Circuit We can combine the semiconductor device simulation with SPICE circuit simu lation This section shows the steps to demonstrate the rectifying effect of the PN diode The files of this tutorial are located at VisualTCAD examples tutorial tut2 Assigning Circuit Symbol We open the simulation file diode sim again and change the Simulation Mode to Circuit element Since this is a two terminal device the default circuit symbol with two pins is displayed as shown in Figure 2 23 p 31 Visual TCAD File Edit Simulation Window Help hve Om ke fo u Simulation Control amp Simulation diode sim Simulation Control Bx Electrodes Summary Setup PRES Circuit Symbol _ Structure Embedded CGNS data Simulation Mode Circuit Element v Status gt Syste See ew gt DJ H e E I3 Solutions f No solutions Simulation Structure C i Structure Viewer Name El Regions Anode Cathode Silicon Boundaries Anode_Neumann Anode to Silicon Cathode Neumann Change Symbol Cathode to Silicon Silicon Neumann Electrode Map Symbol Pin Device Electrode PIN 1 Anode x PIN 2 Cathode Results Project Explorer Bx fhomeshash build VisualTCAD lx ST Name V size 6 Wa translations wa tool sa tmp E src H g python iw lib ua images ua help ia examples
8. Description 1 About only 2D option importing the two dimension doping data it incuding 3 columns first column is x coordinate and its unit is nMeter the second column is y coordinate and its unit is nMeter the third column is doping concentration and its unit is Cubic cMeter the value of the rectangle has been changed to O it means only the baseline from point 1 to point 2 is significative VisuaITCAD makes the center of the baseline as the 2D doping origin the doping data file introduces the two dimension doping profile from the center of the baseline to the doping coordinate of the doping file the x coordinate positive direction is left direction Place Dataset Doping Profile Doping Species Donor J Profile Dataset Only1D Only 2D Both I This profile only have 1D dataset Dataset Po A A Z Logarithmic Interpolation Profile Bound Rectangle Baseline Point 1 0 3 0 2 D Baseline Point 2 0 1 J 0 2 J Height um 0 1 Orientation DJ Left Right J Kana Figure 3 9 1D Dataset Doping Profile Dataset Doping Profile Description 1 About Both option in the bound rectangle region the doping profile is as the same as only 1D option and the doping data from 1D data out of the bound rectangle region the doping profile is as the only 2D option doping profile and the origin is the the box baseline point2 and t
9. Setup Circuit Symbol BJT N Simulation Mode Circuit Element v BJT P Kg setect aac daira td Look in F omefjidm KO pa GI 7 CU PIN l model python PIN E3 imodel script Inverter lib Civ i imodel18 inverter2 lib J script yzl inversemodel sic Device Structure Item Regions Boundaries Change Symbol Electrode Map Symbol Pin inversenarrowwidth solar application Inverter 3 sprocessexample Inverter_old e subset material test_region_lable_clone mod_image tmp mole training nmos 13 VDMOS doc others VDMOSGR 1 Results Figure 2 51 v Visual TCAD File Edit Simulation Window Help D 6 H CF DH p13 e4 VisualFab_Demo rar Folder p18 bjt N lib p18 doping BJT_NPNVIib p18vd2 BJT_NPNVLIib e4 pn diode inverter 4lib SAYU SOI OI SU NGI SU NG SO NG SY PG SP Pi ot inverterlib File name Files of type Library file lib change symbol setting SIE a gie 82 Explorer Start 2 lation Control LI O Simulatic l ex Setup Circuit Element v Simulation Mode Simulation Electrodes m Summary Circuit Symbol Structure EJ Embedded CGNS data Feature switches Status per Ready to run g OSTE AA Regions Boundaries Solutions E F No solutions Structure Viewer Change symbol Results 0 600 2 98e 08 0 600 X um 1 20 1 80 Pr
10. Trap Restore Defaults Figure 3 30 material model Solver Options Restore Defaults 43 VisuaITCAD LINUX Non Linear Solver Options Number of Processors Maximum iterations 30 2 Update damping Potential damping 7 Potential damping factor 3 Misc Options Truncate voronoi cell Always truncate i4 Linear solver type Direct MUMPS 15 Pm f ian Figure 3 31 Solver options Genius Device Simulator 87 GUI Reference 88 t BR W N e Device Simulation Description Chooses the number of processor of simulation Chooses the maxmum iterations the default setting is 30 Chooses whether using update damping and sets potential damping factor Selects the element truncation strategy used in simulation including Always truncate Never truncate and truncate at boundary Selects the linear solver algorithm including Direct MUMPS Direct SuperLU iterative BCGS ASM and iterative BCGS ILU Genius Device Simulator Circuit Schematics GUI Reference Circuit Schematics Place Circuit Component Menu Icon Description device setting Component al Add a Spice component compact model to the circuit Numerical Device he Add a numerical device to the circuit for mix mode simulation Common Circuit Components Ground GND Resistor 0 Add a resistor component Capacitance T Add a capacitor component Inductance 3 Add an inductor component Probe Add a voltage probe to the
11. ig python wa lib wa images wa help wi examples E docs a ig data aj IN of Anode Cathode Change Symbol Electrode Map Symbol Pin Device Electrode X PIN A Anode K PIN_K Cathode Simulation diode sim Summary Structure Embedded CGNS data Status gt Simulation finished Solutions x No solutions Structure Viewer Region Cathode Figure 2 25 Circuit Symbol for the Diode progress overal 100 g p a Genius Device Simulator Simulate a Diode Rectifier Circuit Drawing Circuit Schematic Genius Device Simulator We proceed to draw the circuit schematic Click in the menu File gt New Circuit Schematic to open a new schematic capturing window We first place the numerical device component by clicking F Numerical Device in the dock widget Select diode circuit sim in the dialog The diode symbol appears at the mouse cursor and can be placed to the schematic with a click Visual TCAD File Edit View Place Simulation Analysis Window Help DAH na Xx AE Fo Circuit Schematic Editor Circuit Schematic Editor Bx Circuit Setup Simulation diode circuit sim Schematics JEEE HG gt a Simulation Result Project Explorer Sx home hash build VisualTCAD X aman Name size B ws translations g tool wi tmp LI iam src H
12. measure as signed log sign x log 1 x Figure 3 14 do mesh Description The minimum angle constraint of the triangle mesh is from 15 to 32 degree the triangle angle is wider the mesh quality is better but at the same time the rate of generating mesh is become slow Genius Device Simulator 75 GUI Reference 76 Refine Mesh Statistics Description we VisualTCAD LINUX Mesh Refinement Control Maximum doping difference Figure 3 15 refine Description Device Drawing fine a Coarse measure as signed log sign x log 1 x Calculates the doping Gradient and Specifies the refinement is based on the specified quantity logarithm Refinement the mesh in doping Gradient greater than or equal to an order of magnitude here the range of doping Gradient is from to 5 Figure 3 16 VisualTCAD LINUX Mesh Statistics Point Number 2145 Triangle Number 4096 Mesh Size Statistics Min area 1 953E 03um 2 Max Mesh Quality Statistics Min angle 45 Max angle 90 Triangle angle histogram 0 10 10 20 20 30 30 40 40 50 50 60 60 70 70 80 80 90 mesh statistics 90 100 100 110 110 120 120 130 130 140 140 150 150 160 160 170 170 180 953E 03um42 ooo oo O oc O Genius Device Simulator Device Drawing GUI Reference Description Statsitics the mesh point number triangle number mesh size and mesh quality etc 2 Statistics the disposition
13. setting entries of a column using the data in a numerical array In this example we define an array colData and assign it to column 0 set column data colData e93 451G spreadsheet setColumnData 0 colData One can apply mathematical expression coded in Python to the data of some columes and assign the result to a column The following segment shows how to calculate the absolute value of the sum of the first two columns and assign it to the 3rd column in the spreadsheet calc Column spreadsheet calcColumn 2 abs cols 1 cols 21 One can get and set title of columns with the getColumnName and setColumnName functions and save the spreadsheet to a file using the saveToFile function 56 Genius Device Simulator Scripting and Automation Tutorials Example 3 Building MOSFET Device Structure After creating a new device 2d window we choose in the menu Device gt Run Python Script to run the script file named mosfet py A MOSFET structure is created by the script as shown in Figure 2 58 p 57 Device Drawing 2 a on la sid DB gion label item Drain 726 a Region label item Substrate Figure 2 58 script build the MOSFET device structrure The first section of the script consists of commands to draw outlines of the device As an example in the following segment we define a polygon with the coordinates of its corner points Note that the last point coincide w
14. 0 2061 Snap 0 3865 0 2061 Figure 2 7 The Doping Profiles of the PN Junction Diode The numerical device simulation always relies on a mesh grid that divides the device into many small elements Click on the Do Mesh tool and accepts the default parameters in the mesh parameter dialog The initial mesh is shown in Figure 2 8 p 19 One may notice that the PN junction is slightly highlighted with shading File Edit View Drawing Device Window Help D FH 9 xe FO Device Drawing Device Drawing Drawing Tools 13 0 45 8 4 TOES w HHAH Aak HANG Layer List Object List Project Explorer fhomefhash build VisuaITCAD JMH Name N Visual TCAD Device 2D enter Mouse 1 0220 0 1918 Snap 1 0220 0 1918 4 Figure 2 8 The Initial Mesh Grid of the PN Junction Diode 19 Tutorials 20 Saving the Device Simulate a PN Junction Diode This initial mesh grid is not ideal for device simulation as the junction region would require finer mesh grids One may use the S Mesh Refinement tool to refine the initial mesh Accepting the default refine parameters one sees the mesh 1s refined at the junction region where the gradient of doping concentration is steep We do 2 refinements in sequence and the final mesh is shown in Figure 2 9 p 20 Visual TCAD File Edit View Drawing Device Wi
15. 1 6 Method setGroupTitle 117 4 2 1 7 Method insertCurve 117 4 2 1 8 Method clear cece 117 4 2 1 9 Method saveToFile 117 4 2 1 10 Method setTitle 117 Meee ETE EE EESTE BEE AYAN EE 118 class SpreadSheetScript 0 0 eee eee eee 118 4 3 1 1 Method scriptType 118 4 3 1 2 Method getColumnName 118 4 3 1 3 Method getColumData 118 4 3 1 4 Method insertRows 118 4 3 1 5 Method insertColunms 118 4 3 1 6 Method setColumData 119 4 3 1 7 Method setColumnName 119 4 3 1 8 Method calcColumn 119 4 3 1 9 Method saveToFile 119 4 3 1 10 Method setTitle 119 4 3 1 11 Method clear 0 ce eee eee 120 Medals ache Na ame AG Weare eine ones NAA 121 4 4 1 Class MainWindowScript aa 121 4 4 1 1 Method scriptType 121 4 4 1 2 Method openDocumentFromFile 121 4 4 1 3 Method saveAl1ToFile 121 4 4 1 4 Method newWindow 005 121 4 4 1 5 Method getWindowByName 121 4 4 1 6 Method getWindowByNumber 122 5 Contents 6 Genius Device Simulator CHAPTER 1 Installation The VisuaITCAD device simulation software works on both Windows and Linux platform In the fo
16. 12 3 371518e 11 0 3 37152e 11 2 211654e 10 lo 2 211655e 10 1 481978e 09 9 988694e 09 6 650198e 08 4 124701e 07 4 124701le 07 2 084718e 06 2 084718e 06 Project Explorer 2 526217e 05 8 032421e 06 8 032421e 06 2 526217e 05 thome hash build VisualTCAD 6 944753e 05 E m e i 0 0001680654 Name iy size 0 0003423317 ws translations E tool sa tmp wg src wi python E lib mi images wa help wa examples wi docs ia data dJ IN 6 944753e 05 0 0001680654 o o o o o o o o o o o o o o o o o d 0 0003423317 Figure 2 14 Spreadsheet of the Simulated Terminal Characteristics We first select the columns Anode_ Vapp and Anode_current As in most GUI applications one can select multiple columns by clicking on the column header and holding the Control key When the two columns are selected right click to activate the context menu and choose to plot the data using as the Anode Vapp x variable as shown in Figure 2 14 p 24 The plot appears in a new plot window as shown in Figure 2 15 p 25 To change the axes settings click Edit Axes in the dock widget In the axes property dialog shown in Figure 2 16 p 25 select the Left y axis and key in the title scale and range of the axis To change the curve plotting settings select the curve name from the list in the dock widget and click lt Edit Legend In the dialog window shown
17. 1mgrd command starts the FlexLM server read in the license file saves the log messages to tmp flex1m 1log and turned to background running If the server is correctly started the end of flex1m 1og file should contain the follow ings lmgrd License file s opt cogenda cogenda lic lmgrd lmgrd tcp port 27000 Imgrd Starting vendor daemons Imgrd Started COGENDA internet tcp port 48793 pid 19111 COGENDA FLEXnet Licensing version v11 10 0 0 build 95001 x64 Isb COGENDA Server started on localhost for VTCAD COGENDA VFAB VPTKL GENIUS MISC COGENDA GENIUS COMMON GENIUS DDM2 GENIUS EBM3 COGENDA GENIUS AC GENIUS SPICE GENIUS OPTICAL COGENDA GENIUS HIDDM1 GDS2MESH GSEAT COGENDA EXTERNAL FILTERS are OFF lmgrd COGENDA using TCP port 48793 The license server is running on TCP port 27000 of node00 Verifying the FlexLM Server Usually Cogenda software will automatically find the license server running on the local network but it is advised to explicitly configure the location of the license server One creates a config file flex1mrc under his her home directory 1 e SHOME flex1mrc The content of the file would be COGENDA LICENSE FILE node00 lmstat lmstat Copyright c 1989 2011 Flexera Software Inc All Rights Reserved Flexible License Manager status on Thu 1 5 2012 14 17 One can use the 1mstat command to verify if one can successfully query the license server For example one can run the comma
18. Options Max voltage step V Default not limited Of 1 fv bi Predict next solution yes Initial OP Analysis Options Number of Source Ramp up Steps fo lg Max Voltage Step in Ramp up Default not limited O o lv ly Initial Value of GMin Stepping Default 1 uS OML us Target of GMin Stepping Default 1 pS ok E ok X cancel Figure 3 35 Setup simulation DC sweep analysis Description Selects the analysis type here choosing DC Sweep simulation type Selects the sweep variable Selects the sweep component and sets the sweep range Description Selects the analysis type here choosing AC Sweep simulation type Selects the AC sweep step spacing linear or logarithmic and sets the sweep range Genius Device Simulator Circuit Schematics Check netlist Genius Device Simulator GUI Reference Description Selects the analysis type here choosing Operation Point simulation type Here no settings are needed A Analysis Settings AC Sweep Settings AC Sweep Step Spacing AC Sweep Step Hz AC Sweep Start Frequency Hz v 2 AC Sweep End Frequency Hz 7 Initial OP Analysis Options Number of Source Ramp up Steps o 5 Max Voltage Step in Ramp up Default not limited O o ym Initial Value of GMin Stepping Default 1 uS of Gb Target of GMin Stepping Default 1 pS Of k Figure 3 36 Setup simulation AC sweep an
19. Programming Reference 111 4 1 Device2D Drawing aaa 111 4 1 1 Class Device2DScript 00 0 aaa 111 4 1 1 1 Method scriptType 111 4 1 1 2 Method addPolyLineIten 111 4 1 1 3 Method addRegionLabelIten 111 4 1 1 4 Method addRegionDoping 112 4 1 1 5 Method addRegionMoleFraction 112 4 1 1 6 Method addDataset 112 4 1 1 7 Method addDataset 112 4 1 1 8 Method addDopingProfileItem 113 4 1 1 9 Method addMoleFractionItem 113 4 1 1 10 Method addBoundaryItem 113 4 1 1 11 Method addMeshSizeCtrlItem 113 4 1 1 12 Method addRulerIten 113 4 1 1 13 Method addPointItem 114 Genius Device Simulator Genius Device Simulator 4 2 Curve Plot 4 3 SpreadSheet 4 4 MainWindow Contents 4 1 1 14 Method doMesh 0 114 4 1 1 15 Method exportMesh 114 4 1 1 16 Method clear u 114 4 1 1 17 Method saveToFile 114 4 1 1 18 Method setTitle u 114 AAP 116 4 2 1 PlotScript aaa 116 4 2 1 1 Method scriptType 116 4 2 1 2 Method curveGroupCount 116 4 2 1 3 Method curveCountAt 116 4 2 1 4 Method insertCurveGroup 116 4 2 1 5 Method removeCurveGroup 116 4 2
20. Right Xx Cancel J OK Figure 2 5 Uniform Doping Profile Dialog The p type diffusion is then defined We draw another doping box with baseline 0 2 0 0 2 0 and height to 0 2 0 2 We choose the Gaussian doping function and in the dialog shown in Figure 2 6 p 18 we key in the peak concentration 1 x 10 cm and the characteristic length O 1 um Place Gaussian Doping Profile x Basic Parameters Profile Name diffusion Doping Species Acceptor v Peak Concentration cm 3 le 19 Total Dose cm 2 Characteristic Length Characteristic Length um 0 1 Junction Depth um XY Ratio 1 Profile Bound Rectangle Baseline Point 1 0 2 0 Baseline Point 2 0 2 0 Height um 0 1 Orientation Left Right Xx Cancel wv OK Figure 2 6 Gaussian Doping Profile Dialog The final doping profile of the diode is shown in Figure 2 7 p 19 Note the different color representing the n and p type doping profiles Genius Device Simulator Simulate a PN Junction Diode Meshing Genius Device Simulator File Edit View Drawing Device Window Help D FH 9x Be FO Device Drawing Device Drawing Drawing Tools N iS a B aE oee a ma BB a E Layer List Object List Project Explorer home hash build VisualTCAD ee m E e Tutorials Visual TCAD Device 2D enter Mouse 0 3865
21. a polyline or polygon one can use the polyline tool Single click to add a point to the line double click to add the last point of the line If the first point and the last point coincide a polygon is formed To cancel the unfinished polyline click the right mouse button In some cases it is desirable to enter the exact coordinates of the points of a line For example the thickness of the gate oxide of this MOSFET is 4nm making it difficult to locate the corners of the gate electrode using a mouse Therefore we draw the electrode by keying in the exact coordinates We first enter the polyline tool In the status bar a coordinates input area appears as shown in Figure 2 32 p 38 After one enters the x and y coordinates in the blanks and click the enter button a point is added to the polyline One can similarly use this function in other drawing tools 37 Tutorials 38 Clone and Mirror Labelling Material Regions Figure 2 32 A 0 18um MOSFET Input Coord 0 0 0 0 enter Exact coordinates input area Some times one desire to make a copy of an object or make a mirror image of an object transistor For example the side wall spacers around the gate of the MOSFET are symmetrical so one hope to draw one of them and make the other by mirroring The Hk Clone 4k Mirrorx and 4k MirrorY tools can help you on these tasks One then label each region assign a name and a material to it Opt
22. circuit for monitoring voltage difference between two circuit nodes Voltage Probe Current Probe Add a current probe to the circuit for monitoring current through a circuit branch Connection Wire L Add wirings to the circuit Component Description 1 According to user need to select component Simple description of the component 3 Component preview window Genius Device Simulator 89 GUI Reference Circuit Schematics f Place Component Component Selection Component Description 74HCO4 74HCO8 Component Preview Figure 3 32 Component Numerical Device Load Device 1 o o o aie W Computer P18 sim mH jidm rie game 7 is Fles of type Figure 3 33 Numerical Device Description 1 Load the device component file s path 2 Selects the device component file and opens it 90 Genius Device Simulator Circuit Schematics GUI Reference Simulation Control Menu Icon Description Circuit simulation setting Simulation Setup Solver Options Run Simulation Check Netlist View Netlist Write Deck Files Setup Simulation Genius Device Simulator Choosing the analysis type and setting analysis parameters Fi Numerical solver paramters including Number of Processors in parallel simu lation aa Start the simulation Check the validity of the circuit netlist Viewing the netlist file Gn SPICE format Save the circuit simulation to a direcotry which contains the circuit
23. name then add the line or circles in the process user can using Enable disabled grid snapping mode as needed Genius Device Simulator 45 Tutorials Mix Mode Simulation of Inverter IO Circuit v Bon ex Name inverter 1 Attribute Reference LX Cancel Figure 2 41 inverter symbol When we finish the symbol drawing we need add the pin of the symbol to con nect with other device of the circuit here we need 4 pins named PIN_VDD PIN_GND PIN_IN PIN_OUT the pin name is must begin with PIN_ the draw ing process and is shown in Figure 2 42 p 46 ven exi Name inverter Ch 4 Attribute Reference ry 1 pa Reference P X QI O Ey He ct a Pin PIN VDD PIN_IN 2 PIN_OUT PIN_GND a zj LL gt T Figure 2 42 pin property Last step for drawing the symbol is define the reference attribute About the 1n verter device here we choose the value N and it stands for Numerical Device 46 Genius Device Simulator Mix Mode Simulation of Inverter IO Circuit Tutorials Which can use in Mix Mode simulation The child window is shown in Fig ure 2 43 p 47 V Edit Symbol Name inverter frl a Attribute CET 2 Value N 7 Numerical Device Pin ai e K eS r r a eference N A Tx LNJ v Esit Symbot Attribute x a BS name Reference BY Display Color ER X Cancel iz L
24. netlist Ge nius command file mesh file and other data files if needed A Analysis Settings Analysis Type Transient m Transient Settings Stop Time 0 0 s_ v 2 Time Step 0 0 s 7 Max Time Step 0 0 5 v Use Initial Conditions Max voltage step V Default not limited o WD Predict next solution Auto adjust time step yes x Initial OP Analysis Options Number of Source Ramp up Steps o le 3 Max Voltage Step in Ramp up Default not limited of Gb Initial Value of GMin Stepping Default 1 uS of Target of GMin Stepping Default 1 pS O 1 ps Figure 3 34 Setup simulation transient analysis 91 GUI Reference 92 Ww Ne HK Circuit Schematics Description Selects the analysis type Here choosing transient simulation type Sets the transient simulation condition Initial operator point analysis options including the number of ramp up steps of the bigest nonzero External Source by Attach statement the maxmum voltage steps initial value of Gmin stepping and target of Gmin stepping The perpose of the initial setting is making the simulation more convergence 2 Analysis Settings Analysis Type DC Sweep 4 DC Sweep Settings m Sweep Variable S r Sweep Range Baa sweep Component Sweep Start oo S w v Sweep End 0 0 vir O Resistor oe Sweep Step 0 0 Mase Current source m
25. new electrode as VDD IN OUT and GND it is shown in Figure 2 48 p 49 The new electrode OUT ia attached to current source so choosing Interconnect Floating setting is true as shown in Figure 2 49 p 50 W Visual TCAD O x File Edit Simulation Window Help aa 9Sa UW Ion vE Explorer Start Simulation Control U Simulation Control 8 Boundaries and Contacts Electrical Thermal Bounda Setup a Type Ohmic contact Z sistive Metal Gate contact Resistance 0 Simulation Mode _ Steady state v Ohmic contact i z Ohmic contact Capacitance 0 EJ Ma a 5 P Ohmic contact pi 4 Gate contact Inductance 0 UE Ohmic contact el YA i Ohmic contact Di 1 ucture Item Beas Boundaries Region m Gm ores e 2 Override Global Z Width he m Boundary Z Width mia Interconnect lt lt Less More gt gt m De Restore Defaults pa ka Results Voltage 0 v ir fs Progress Overall Step Figure 2 46 boudary Condition and Interconnect When we finish the boudary setting and interconnect setting we need change the Simulation Mode to Circuit Element Since this is a four terminal device the de fault circuit symbol with four pins is displayed as shown in Figure 2 50 p 50 We want a more suitable symbol for the inverter so we click Change Symbol we change the symbol to we have edited before as shown in Figure 2 51 p 51 48 Genius Device Simulator Mix Mode Simulation of Inv
26. of the triangle angle Mesh 3D view VisuaITCAD LINUX Ze D Material pA Figure 3 17 Mesh 3D view Description 1 User can rotate the structure in the windows and view in any visual angle Save mesh file to Save Mesh to tif file Look in E3 homefjidm p18 Computer m jidm File name Files of type TIF file tif v X Cancel Figure 3 18 Save Mesh File To Genius Device Simulator 77 GUI Reference Device Drawing Description 1 Chooses the file s saving path 2 Inputs the file name and save the mesh structure file Run python e Open File E3 Momefjidm python IG GO0 HO P examples procDopDat py F jidm M home File name Figure 3 19 run python Description 1 Chooses the exist python file s path 2 Selects the python file and open it Export python Save File Look in E3 home jidm python P examples procDopDat py F jidm home File name bd Save Files of type Python Script Files py m Z Figure 3 20 Export python 78 Genius Device Simulator Device Drawing GUI Reference Description 1 Chooses the file s saving path 2 Inputs the file s name and saves the python deck file Genius Device Simulator 79 GUI Reference Device View 80 Menu Device View Fit to View Center Origin Point Zoom In Zoom Out Ruler Icon PARE Device Drawing Description Center the device drawing and scale it to fit the screen size
27. the default physical models and material para meters In practice we often need to modify these parameters to model certain aspects of the real device more accurately VisualTCAD allows you to modify models and parameters in material regions and at boundaries For example suppose we want to use the Lombardi mobility model which de scribes the carrier mobility in the inversion layer more accurately We click the 5 Physical Model tool button and in the material models tab of the physical model dialog Figure 2 39 p 43 we select the substrate region Since this is a semicon ductor region we can choose the mobility model of it We select the Lombardi mobility model From the user manual we found the list of parameters for the Lombardi model which is reproduced here in Table 2 3 p 43 We want to slightly reduce the electron mobility and set the MUN2 LSM parameter to 1400 VisuaITCAD lt hydrogen gt DOO Global Parameters Physical Models Material Models Region Material Type Basic Drain Al Conductor regi EEF Gate NPolySi Conductor regi Source Al Conductor regi Substrate Al Conductor regi pad oxide SiO2 Insulator regior NG ag Mobili spcl Nitride Insulator regior ty spc2 Nitride Insulator regior Model Lombardi Name Value MUN2 LSM 1400 substrate Semiconductor Parameters Optical Thermal K 4 T
28. yData list data for y coordinate title string title for the curve properties list a list of curve properties clear saveToFile filename filename string save to file with filename setTitle title title string title for plot subwindow 117 Programming Reference SpreadSheet SpreadSheet class SpreadSheetScript The SpreadSheetScript class exposes APIs for spreadsheet operations in python language Method scriptType scriptType Returns Return the object name ssheetscript Method getColumnName getColumnName column Arguments column int index of column index from O Returns Return the name of column Method getColumnData getColumnData column Arguments column int index of column index from O Returns Return data in column Method insertRows GSyntax insertRows row count Arguments row int row index where rows will be inserted count int number of rows will be inserted Method insertColums insertColums column count 118 Genius Device Simulator SpreadSheet Programming Reference Arguments column int column index where columns will be inserted count int number of columns will be inserted Method setColumnData setColumnData column data Arguments column int index of column data list assign data to column Method setColumnName setColumnName column name Arguments column int index of column name string name for column Method calcColumn c
29. AD full ib flexlm 1 7 4 1 rhe15 64 Platform rhel5 64 Features Full InfiniBand FloatingLicense The user may choose from the menu the edition to be installed The basic edition 1 is suitable for most users The full edition 2 contains advanced products such as VisualFab and VisualParticle that requires special licenses The ib edition 3 only runs on cluster computers with Infiniband interconnect hardware The user may also enter O to see a full list of editions included in the package If the operating system is not recognized all editions will be displayed and the user may choose one that matches his platform most closely The installer then prompts the user to input the target installation directory the default location is opt cogenda 4 Genius Device Simulator Installing on Linux Install to Platform Features Installation The end user license agreement will be displayed and one must enter y to accept it It then prints out a summary of this installation and asks the user to confirm opt cogenda rhel5 64 Full FloatingLicense Is the above correct Y exit The installer proceeds to unpack the executable binaries and data files Finally it asks the user if a shortcut link is to be created to point to the installed version of the software If one accepts the default setting a soft link named opt cogenda current will be created Make a link to the installed version Y n Enter a name for the installed vers
30. BHAA Layer List Object List Input Coord 0 00_ enter Mouse 0 2429 0 2105 Snap 0 2429 0 2105 Figure 2 34 Doping Profiles of the MOSFET transistor To make sure the mesh in the MOSFET channel region is fine enough we use the 4 Mesh size constrain tool to apply two constraints shown in cyan color in Fig ure 2 35 p 40 After two refinements the final mesh is generated We save the mesh to a tif file for further simulations 39 40 Tutorials A 0 18um MOSFET is Visual TCAD lt hydrogen gt File Edit View Drawing Device Window Help lau 3C x hm she Explorer Start Device Drawing Device Drawin g Ex Drawing Tools m a R 4 TSR G Om Device 2D p18 drw E ul Ea BG ads t aA Layer List Object List input Coord 0 0 enter Mouse 0 3062 0 0226 Snap 0 3062 0 0226 Figure 2 35 Final mesh grid of the MOSFET transistor Genius Device Simulator A 0 18um MOSFET Tutorials Simulating I V Curves Genius Device Simulator Asin the previous diode simulation we create a device simulation and load the tif file containing the mesh grid of the MOSFET As shown in Figure 2 36 p 41 we are in the steady state simulation mode the source and substrate terminals are grounded The drain terminal is connected to a constant voltage source of 0 1 V We shall sweep the gate terminal fro
31. Center the screen at the origin of the device coordinates Zoom in with the point under the mouse cursor fixed in view Zoom out with the point under the mouse cursor fixed in view Add a ruler item for measure the linear distance between two points Genius Device Simulator Device Simulation GUI Reference Device Simulation Simulation Setting Menu Icon Description simulation setting Load ai Open a structure file Resistive Metal Turn on the resistive metal model new in 1 7 1 Run Running the device simulation Write Deck File Save the device simulation configuration to a directory which will contain the command file inp and mesh file cgns and data files if needed Solve Time Control a Time parameters in Transient simulation Sweep Control DC sweep parameters in DC Steady state simulation Boundary Condition Boundary and Contact settings of the device Physical Model YA Physical Model and Material Model parameters Solver Options Fi Numerical solver paramters including Number of Processors in parallel simu Output Show IV Data Show Visualization ty lation Open the IV data file Open the vtu file to visualize the internal variables potential and carrier con centrations etc in the device Load Description 1 Chooses the exist structure file s path 2 Selects the structure file and open it Genius Device Simulator 81 GUI Reference Device Simulation OM Choose the struct
32. Curve Properties 104 Genius Device Simulator XY Plotting GUI Reference Description 1 User can edit each curve properties and slect each line axis style 2 Selects each curve line and symbol style Palette Manageer Palette Manager Figure 3 45 Palette Manager Description VisualTCAD offers 7 palettes for user User can edit new palette 3 User can edit new curves of the selected palette and restore default palettes Genius Device Simulator 105 GUI Reference Text Editor Text Editor Search Menu Icon Description Find Search a string in the text Find Next Go to the next match in the text Find Previous Go to the previous match in the text Replace Replace the matched string Find a Replace O Match case m W jb only LJ Backward Regular expression Figure 3 46 Find Description Inputs the find text 2 Selects the properties Replace Find wreplace oy Match case LJ a only 3 C Backward Regular expression Figure 3 47 Replace 106 Genius Device Simulator Text Editor Genius Device Simulator Description Inputs the find text Inputs the replace text Selects the properties GUI Reference 107 GUI Reference Options 108 Menu Icon Spreedsheet Syntax HighLight Mode Font Settings Font Settings Description Text Editor Highlight the text with the selected syntax mode eg Genius Spice Python XML or no highlight Font settings of t
33. D spreadsheet and plotting and the script must operate at the global scope using the mainwindow object mw We open this script file in VisualTCAD s text editor and run it with the menu item Tools amp Run as Python Script The script first opens the simulated IV data p18 result dat and p18vd2 result dat in two spreadsheet windows using the openDocumentFromFile function User will need to modify the path to the data filename Then it creates a new plotting window open spreadsheet file file home user p18 result dat mw openDocumentFromFile file open spreadsheet file file home user p18vd2 result dat mw openDocumentFromFile file plotA mw newWindow Plot plot2 The windows are numbered we obtain the spreadsheet with the getWindowByNumber function and read data from it The curve is then added to the plotting window as we have done in the first example 60 Genius Device Simulator Scripting and Automation Genius Device Simulator Tutorials insert Curve 1 in Group O spreadsheet mw getWindowByNumber 2 Xdata spreadsheet getColumnData 3 Ydata spreadsheet getColumnData 2 properties hasLine 1 lineColor ff0000 dinestyle l linewidth I hassymbol l symbolColor ff00ff symbolStyle 0 symbolSize 6 symbolFilled 1 title vds 0 2V plotA insertCurve 0 1 Xdata Ydata title properties One can use scripts to operate on more windows to automate TCAD simu
34. Figure 3 3 Add Boundary Label Description Inputs the boundary label name its properties can be set in boudary command 2 Selects the symbol color for the boundary Edit properties Genius Device Simulator 65 GUI Reference Device Drawing Description 1 x and y coordinates of the first corner point of the polygon double click to change the coordinate value 2 Coordinates of the last corner point of a polygon must coincide with the first corner me VisualTCAD LINUX Corner points 1 4211le 17 1 421le 17 0 06 0 06 Figure 3 4 Edit properties 66 Genius Device Simulator Device Drawing Device and Simulation Menu Icon Profiles and Mesh Settings Add Doping Profile o Add Mole Fraction Profile AE Set Mesh Size Constraint Meshing Do Mesh pag Refine Existing Mesh Bas Mesh Quality Statistics Mesh 3D View Delete Existing Mesh T Input Output Save Mesh to File Run Python Script Export Python Script GUI Reference Description Add a impurity doping donor or acceptor profile to the device Add a mole fraction profile for the compound semiconductor material in the device Add a mesh size contraint item to the device Generate a mesh for the device Refine the existing mesh Show statistics on the mesh quality Show 3D visualization of the mesh and doping profile Destroy the existing mesh grid Save the generated mesh to a file in TIF format Run a device drawing Python
35. K K K OK 2K 2K K 2K OK K K K 2K OK K K K 888888 88888888 88 888 88888 888 888 8888888 x 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 88888888 8 8 8 8 8 8 888888 8 8888 8 8 8 8 8 8 8 83 8 8 8 8 8 8 8 8 8 3 888888 88888888 888 88 88888 8888888 8888888 x Parallel Three Dimensional General Purpose Semiconductor Simulator Genius Device Simulator 11 Installation Using the Command line Interface This is Genius Commercial Version 1 7 2 with double precision Copyright C 2008 2011 by Cogenda Company akak A RA k 3k K k 3K K A k 3K kA kA gt k 2A 2A 2A 2k 3K 2A 2A 2k 2K k 2A 2 2A 2A 2A 2K 2K 2A 2A 2A 2A 2A 2K 2A 2A FK gt K K FK 2K gt K gt K 2K OK Constructing Simulation System External Temperature 3 000000e 02K setting each voltage and current source here done DC Scan V Anode 2 000000e 00 V its Eq V Eqa Eq p Eq T JEq Tn Eq Tp delta xl O 3 69e 03 4 42e 05 5 79e 05 0 00e 00 0 00e 00 0 00e 00 0 00e 00 1 T 6Te 11 3 89e 06 3 07e 06 0 00e 00 0 00e 00 0 00e 00 4 93e 02 2 7 98e 15 3 44e 07 3 5bbe 07 0 00e 00 0 00e 00 0 00e 00 2 87e 03 3 2 57e 15 3 47e 08 3 52e 08 0 00e 00 0 00e 00 0 00e 00 2 87e 04 4 1 97e 15 4 09e 09 2 72e 09 0 00e 00 0 00e 00 0 00e 00 2 11e 05 5 1 92e 15 5 06e 10 1 68e 10 0 00e 00 0 00e 00 0 00e 00 1 09e 06 CONVERGED PNORM RELATIVE Write System to XML VIK file pn2d vtu Write System to CGNS file pn2d cgns Write Boundary C
36. VisualTCAD Semiconductor Device Simulator Version 1 7 2 VisualTCAD User s Guide CF kgenda Pte Ltd License Grant Disclaimer Copyright c 2008 2010 Cogenda Pte Ltd Singapore All rights reserved Duplication of this documentation is permitted only for internal use within the organization of the licensee THIS DOCUMENTATION IS PROVIDED BY THE COPYRIGHT HOLDERS AND CONTRIBUTORS AS IS AND ANY EXPRESS OR IMPLIED WAR RANTIES INCLUDING BUT NOT LIMITED TO THE IMPLIED WAR RANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE DISCLAIMED IN NO EVENT SHALL THE COPYRIGHT OWNER OR CONTRIBUTORS BE LIABLE FOR ANY DIRECT INDIRECT INCIDENTAL SPECIAL EXEMPLARY OR CONSEQUENTIAL DAMAGES INCLUDING BUT NOT LIMITED TO PROCUREMENT OF SUBSTITUTE GOODS OR SERVICES LOSS OF USE DATA OR PROFITS OR BUSINESS INTERRUPTION HOWEVER CAUSED AND ON ANY THEORY OF LIA BILITY WHETHER IN CONTRACT STRICT LIABILITY OR TORT IN CLUDING NEGLIGENCE OR OTHERWISE ARISING IN ANY WAY OUT OF THE USE OF THIS SOFTWARE EVEN IF ADVISED OF THE POSSIBIL ITY OF SUCH DAMAGE Linux is trademark of Linus Torvalds Windows is trademark of Microsoft Corp This documentation was typed in DocBook XML format and typeset with the ConT Xt program We sincerely thank the contributors of the two projects for their excellent work as well as their generoisty Genius Device Simulator Contents 1 Installation 1 1 1 Installing on Windows
37. abel materail pos areaConstrain 0 01 strColor ffb6c1 Arguments label string name of the region label item material string name of material which used in region pos point region item position areaConstrain double set region mesh area constrain Genius Device Simulator 111 Programming Reference Device2D Drawing strColor string name of color which used in region Method addRegionDoping addRegionDoping label property concentration Arguments label string name of the region property string property of region Nd or Na concentration double concentration of region Method addRegionMoleFraction addRegionMoleFraction label x y 1 0 Arguments label string name of the region x double x fraction y double y fraction Method addDataset addDataset xList yList vList dsName Arguments xList list list of x coordinate position yList list list of y coordinate position vList list list of value dsName string name of dataset Returns dataset label for this dataset which append SHA1 to dsName Method addDataset addDataset type filename Arguments type string ID or 2D dataset file 112 Genius Device Simulator Device2D Drawing Programming Reference filename string dataset file name Returns dataset label for this dataset which append SHAI to filename Method addDopingProfileItem addDopingProfileItem attr Arguments attr list a list of name and value pair for profile item Me
38. acitance 0 HE inductance 0 ji fz Overnde Global Z Width Interconnect lt lt less E Restore Defaults Interconnect lt lt Less More gt gt Restore Defaults X Cancel Figure 3 23 change boundary setting Description In Device Simulation window load the mesh and click Boundary Settings Click More gt gt to see the full list Change from Neumann to Ohmic and Solder pad boundary conditions respectively WwW N XX Run simulation Submitting simulation job GG You need to save the simulation settings before running it Do you want to save it now al Figure 3 24 run simulation Description When user runs the simulation VisuaITCAD will remind user to save the simulation settings before running it write deck file Genius Device Simulator 83 GUI Reference Device Simulation Description 1 User can transform the simulation to genius deck file and run the deck file in Genius to finish the simulation Exporting simulation job L You need to save the simulation settings before exporting it Do you want to save it now 1 Figure 3 25 write deck file Time Control J VisuaITCAD LINUX Time Steps Start Time Step Time Stop Time Max Step Time Options Max voltage step V Default not limited is O Predict next solution Auto adjust time step Figure 3 26 time control Description 1 For transient
39. alcColumn column expression Arguments column int index of column expression string expression to compute data for column Method saveToFile saveToFile filename Arguments filename string save to file with filename Method setTitle setTitle title Genius Device Simulator 119 Programming Reference SpreadSheet Arguments setTitle string title for spreadsheet subwindow Method clear clear 120 Genius Device Simulator MainWindow Programming Reference MainWindow Class MainWindowScript The MainWindowScript class exposes APIs for operations in top level in python language Method scriptType scriptType Returns Return the object name mainwindowscript Method openDocumentFromFile openDocumentFromFile filename Arguments filename string name of file which to open Method saveAllToFile saveAllToFile filepath Arguments filepath string path to save content of all subwindow to file Method newWindow newWindow type title Arguments type string type of window type can be Device2D Plot or SpreadSheet title string title for window Returns Return a pointer which point to created window if failed return NULL Method getWindowByName getWindowByName subWindowName Genius Device Simulator 121 Programming Reference MainWindow Arguments subWindowName string name of subWindow Returns If find a subwindow which has name GSyntax subWindowName return a pointer wh
40. alysis Description When user finishes the circuit schematic user need check the netlist when it is OK user can run the circuit simulation 93 GUI Reference View netlist 94 Circuit Schematics Check Netlist HD Check Netlist OK Figure 3 38 check netlist Analysis Settings Operation Point Settings No settings are needed for this simulation Initial OP Analysis Options Number of Source Ramp up Steps 0 1 Max Voltage Step in Ramp up Default not limited olb J C Initial Value of GMin Stepping Default 1 uS of _ GD Target of GMin Stepping Default 1 ps OG pl Figure 3 37 Setup simulation operation point analysis Description According to the circuit schematic VisualTCAD generates the netlist automatically the netlist file includes circuit components and wire connection etc Genius Device Simulator Circuit Schematics GUI Reference A View Netlist SPICE Netlist circuit components V2 V2Pos V2Neg 0 1V VProbel ProbelPos ProbelNeg OV V1 V1Pos ViNeg OV R1 R1Pos RiNeg Ik N1 N1PIN_S Source N1PIN_G Gate N1PIN_D Drain wire connection by OV VDC VNET_OOO_ NIPIN D R1Pos OV VNET 001 V2Neg O OV VNET 002 0 NET 000 OV VNET 003 O V1Neg OV VNET 004 NET 000 NIPIN B OV VNET 005 NET 000 NIPIN S OV VNET 006 ProbelNeg RINeg OV VNET 007 VlPos NIPIN G OV VNET 008 V2Pos ProbelPos OV Figure 3 39 View netlist Genius Device Simulator 95 96 GUI Referenc
41. data entries in the selected column Run a spreadsheet Python script VisuaITCAD LINUX Please select the x axis data columfi Figure 3 40 plot column Calculator Genius Device Simulator Description User need select at least two columns and set one column data as x axis data column Description VisualTCAD offers calculate function user can obtain the expression The calculate data come from the column data The expression can include the function of VisuaITCAD offers including absolute value calcu late and square calculate etc 101 GUI Reference 102 Spreadsheet Calculator Please enter the expression for column 12 Valid operators are Columns Functions cols 1 0 V v2pos V v2neg V rlpos V rlneg V vlpos V vlneg V nlpin_s V nlpin_g V cols 10 nlpin_d V cols 11 nlpin_b V cols 12 probelpos V Expression Figure 3 41 Calculator Genius Device Simulator XY Plotting XY Plotting Menu Icon Plot Data Source Insert Curve av Insert Group mi Delete Edit Plot Properties Edit Axis Properties ES Edit Curve Properties Ho Palette Manager Input Output Run Python Script Export Python Script Insert Curve GUI Reference Description Insert curve in the current group Insert group in the plot Delete the selected curve or group Edit the axis properties e g the axis scale range and tick marks Edit th
42. e Result Analysis Menu Simulation Results Load Spice Raw File Plot Probe Wave Icon Circuit Schematics Description Open the simulated waveform in a spreadsheet window Plot the waveform of voltage and current probes Genius Device Simulator Circuit Schematics GUI Reference Schematics View Menu Icon Description Schematics View Fit to View Aol Move the schematics to center and scale it to the fit the screen size Center Origin Point H Move the schematics to center Zoom In RA Zoom in Zoom Out Q Zoom out Genius Device Simulator 97 GUI Reference Device Visualization View 98 Menu General Options Switch Background Color Inverse Y of View Point Camera Options Reset View View at X View at X View at Y View at Y View at Z View at Z Icon Device Visualization Description Toggle the screen background color between black and white Toggle the direction of the y axis between up and down Reset camera position orientation and focal parameters View the device from the direction of x axis View the device from the direction of x axis View the device from the direction of y axis View the device from the direction of y axis View the device from the direction of z axis View the device from the direction of z axis Genius Device Simulator Device Visualization Draw Menu Device Drawing Draw Device Region Draw Device Material Draw Device Bounda
43. e 2 10 The Device Simulation Control Window We first load the diode device structure by clicking EF Load button in the Summary section of the simulation control window We select the diode tif file we just created It takes a few seconds for Visual TCAD and Genius to analyse the tif file When it finishes the device structure 1s visualized in the Structure Viewer and the automatically identified device electrodes are listed in the Electrodes section In this case we have the Anode and the Cathode One may notice that in the Simulation Control dock widget the default Simula tion Mode is Steady state and the other choices are Transient and Cir cuit element There is also the list of regions and boundaries in the device structure Clicking on a region or boundary name would highlight the correspond ing region or label in the Structure Viewer The user can setup physical models boundary conditions and other solver options from the various tools in the dock widget but the options are too vast to be described here For this simple simulation of the I V characteristics it is sufficient to setup the electrical sources attached to the electrodes of the device While the cathode is grounded the anode voltage will be swept from 0 to 1 volt We change the source type of anode to Voltage Sweep and set the start stop and step voltages to 0 1 and 0 05 volt respectively 21 Tutorials 22 Starting Simulation Job Monitoring Progress S
44. e Defaults X Cancel Initial Value of GMin Stepping Default 1 uS 1 Target of GMin Stepping Default 1 pS 1 ps 7 X Cancel Figure 2 54 simulation condition setting and solver Options setting We click the Run Simulation tool to start the simulation The monitoring and analysis procedure is similar to that in the previous example In the result spread sheet we plot the columns Output Voltage andInput Voltage using Input Voltage as the x variable The waveform plot is shown in the Figure 2 55 p 53 Genius Device Simulator Mix Mode Simulation of Inverter IO Circuit 1 5 V out V Figure 2 55 Simulation result Genius Device Simulator 0 4 Plot Untitled 0 6 0 8 V in V 1 2 Tutorials 53 Tutorials Scripting and Automation Scripting and Automation When building the diode and MOSFET in the previous sections we used tools Drawing Device Outline Assigning Material Regions Placing Doping Profiles and Meshing etc in the GUI to draw the device structure step by step If the structure is com plicated this process will take some time to complete It would be okay to do this once but if you are to build several MOSFET devices identical in all respects but different gate lengths the repetion becomes a burden To set you free from the tedious work VisualTCAD provides scripting functional ity in several modules which among other things can generate the device struc ture a
45. e curve properties eg the line style symbol style and color Edit the plot curve style palletes Run a Python for curve plotting Export the current plot to a python script file Select the x and y variables to plot with X Variable 1 Y Variables 2 Name rones ame properes result dat ramp1 dat Figure 3 42 Genius Device Simulator result dat ramp1 dat SpreadSheet SpreadSheet SpreadSheet insert curve 103 GUI Reference XY Plotting Description 1 User can insert several curve to one plot the x and y variable come from the open any data file the left window is for choosing the x variable and only can choose one column data 2 The right window is for choosing y variables user can choose several column data as y variables at the same time Edit Axis Properties Setting line symbol styles Axis Enabled Bottom x axis BI Right y axis Axis Title Top x axis i P Axis Scale Type Linear Scale D8 XX Auto Scale min aisya Max Axis Value Figure 3 43 Edit Axis Properties Description User can edit the plot axis properties inputs the left y axis title Selects the Axis Scale type linear scale logarithmic scale etc Ww N XX Inputs the range of value of the axis Edit Curve properties Setting line symbol styles Symbol Style Solid line 2 r style Square color Bad color Black 3 Filled Figure 3 44 Edit
46. ee 52 2 5 Scripting and Automation aaa 54 2 5 1 Example 1 Curve Plotting 0 0 00 ee 54 2 5 2 Example 2 Spreadsheet 0 0 c cece eee 56 2 5 3 Example 3 Building MOSFET Device Structure 57 2 5 4 Example 4 Using More Than One Window 60 ZO SUN ahas bank NANA AASA haeaseeuadsaenee es 62 Contents 3 GUI Reference 63 S l Device DrawitS 4s 266446 4 096 4844 eed ond ooh eon ends oes dis 63 3 1 1 Structure Drawing 0 eee ees 63 3 1 2 Device and Simulation aa 67 Sil DOC NEN serrer ere couse ose NARULA EET senda 80 3 2 Device Simulation 253 244400 00d0ebebe ne ae AG DAGANG i 81 3 2 1 Simulation Setting 0 0 cc ee ees 81 3 3 Circuit Schematics 0 aaa 89 3 3 1 Place Circuit Component a 89 3 3 2 Simulation Control 00 ee eee 91 3 3 3 Result Analysis 2222 ccc eee teens 96 3 3 4 Schematics VIEW 5a e545 55405 KGAD AGAD ENG 97 3 4 Device Visualization ccc ccc eee eens 98 Sk MilW oxen PP 98 Dee DaN sec ete ea nee yas bee bate peas 99 3 4 3 Animating the simulation result 100 DS BS 0K JI RA AA AA ss 101 3 6 XY PIOLO 7Ha kA don Bah eee ba hy erin bets 103 Di TULI napaasa NAGA ANA PAANO SALAH BG LAESA an 106 Dilek DU erepta Gere ed EBA NALANA AAH AABAD WAH TL KAL 106 Die OPIO 4 44 54 44ce0 enbeesanatanandod a NANA ceeds 108 air T00 26 oene ey anne sa boo aye e Raed oe awe 109 4
47. egment Enter the horizontal line snapping mode Mouse coordinates are snapped to a point on a nearby line the line segment currently being drawn is kept horizontal Enter the horizontal line snapping mode Mouse coordinates are snapped to a point on a nearby line the line segment currently being drawn is kept vertical Enter the free hand drawing mode No snapping of coordinates is applied me VisuaITCAD LINUX Corner points 1 4211e 17 1 4211le 17 0 06 0 06 Figure 3 1 Polygon Property Editing Dialog if neccessary divide the dialog items into a few categories Add Region Label 64 x and y coordinates of the first corner point of the polygon Coordinates of the last corner point of a polygon must coincide with the first corner Genius Device Simulator Device Drawing GUI Reference Placing Region Label Basic Parameters Region Label Material Symbol Color Max mesh size um 5 Doping Species Doping Species Concentration cm 3 Mole Fraction Figure 3 2 Add Region Label Description 1 Inputs the name of the region label each region has one name it can not be reused 2 Selects the material for the region from genius material library more than 50 choices 3 Selects the symbol color for the region 4 Sets the maxmum mesh size for the region material 5 Selects the doping species 1t can introduce uniform doping profile for the region Add Boundary Label VisuaITCAD LINUX
48. enius TCAD Setup Genius TCAD Recommended Software It is recommended to use the Paraview Scientific Visualization program to view the solution generated by Genius TCAD simulator Would you like to install Paraview Install Paraview Figure 1 5 Optional software packages Genius TCAD Setup InstallJammer Wizard Complete The InstallJammer Wizard has successfully installed Genius TCAD Click Finish to exit the wizard Cancel Figure 1 6 Installation completed Installation Installing on Linux Installing on Linux The installation package of the Linux version is a self extracting program typi cally named as Cogenda Linux lt version gt bin The same package includes binaries and data files for several Linux platforms include Redhat Enterprise Linux release 5 and release 6 32 and 64 bit platforms Installing Typically we will run the installer as a super user root su Cogenda Linux 1 7 4 bin The installer will check the operating system and the prerequisite software needed to run VisualTCAD If the operating system is recognized it lists the editions suitable on this platform in the following menu along with the features contained in each edition Checking the machine architecture found rhel5 64 Editions recommended on this machine 1 VisualTCAD flexlm 1 7 4 1 rhe15 64 Platform rhe15 64 Features FloatingLicense 2 VisualTCAD full flexlm 1 7 4 1 rhel5 64 Platform rhel5 64 Features Full FloatingLicense 3 VisualTC
49. ent E dot J E along mesh edge and simple E field Activates the Band to Band Tunneling BBT generation and selects whether the BBT genera tion should be calculated with the local model or the non local model Only the local model is currently implemented Whether the Carrier trapping is enables Genius Device Simulator Device Simulation Description GUI Reference Sets material model of silicon material and other materials choosing the default model Basic model including Default model only 3 Basic model user can modify the parameter of the model by clicking the right button Add Prop erty and input the paramenter Name and Value User can inputs print as the parameter Name and 1 as the Value then runs the simulation all parameters setting of the selected model are printed in Log file 4 Other Material model using the same method user can modify other model by modifying the model parameters the model including Band Impact Mobility Optical Thermal and Trap VisualTCAD LINUX Substrate oxide spcl spc2 substrate Global Parameters Physical Models Material Models Region Material Basic i Electrode regio NPolySi Electrode regio Al TEEN Model Defaut 2 Electrode regio al Elecvode regio Parameters tame ___ vaue_____ SiO2 Insulator region Nitride Insulator region Nitride __ Insulator region Si Semiconductor Band N Impact Mobility 2 Optical N N aaa Thermal gt
50. erter IO Circuit Tutorials NN Leas InterConnect ve Ohmic contact Ohmic contact Ohmic contact Ohmic contact Ohmic contact Ohmic contact Interconnection Properties _ Interconnection Floating Electrical Thermal Resistance Extern Temperature Default ag CH o Inductance 0 0 H gt Heat Transfer Coeff Default o ma Figure 2 47 choose the contact to interconnect Ohmic contact Gate contact Ohmic contact Gate contact i Ohmic contact Ohmic contact Ohmic contact Ohmic contact Interconnection Properties 2 p Interconnection Floating Electrical __________ _ Thermal Resistance fo S O J7 Extern Temperature Default capacitance 0 JE oo EB Inductance fo o Hoy Heat Transfer Coeff Default o Figure 2 48 define new contact Then we must map the four device electrodes to the four pins in the circuit symbol as shown in Figure 2 52 p 51 We save to the file named inverter sim Genius Device Simulator 49 Tutorials 50 v interconnect InterConnect G IN NGate 0 5 o PSource GND NSource PDrain NDrain Type Interconnection Gate contact Gate contact Interconnection Ohmic contact Ohmic contact Interconnection Ohmic contact Ohmic contact Interconnection Ohmic contact Ohmic contact Mix Mode Simulation of Inverter IO Circuit CI Intefconnection Properties ajx Interconnection Floati
51. g python gi lib Wl images amp Ga help H gs examples amp gi docs 6 ss data J agp Tutorials lag Schematic UnNamed sch Mon February 8 2010 03 16 52 Progress Overall Mouse 106 88 Snap 110 90 Figure 2 26 Placing the Semiconductor Diode Device Model in the circuit The other symbol components can be placed using J Component tool the dialog for selecting components is shown in Figure 2 27 p 34 For common components like resistors and capacitors one can alternatively use the shortcut buttons in the dock widget Finally one use the L Wire tool to connect the components together The com pleted circuit schematic is shown in Figure 2 28 p 34 Tutorials Simulate a Diode Rectifier Circuit Place Component x Component Selection Component Description Sources LE Library Sources Component VSIN Sin Voltage Source Component Preview VDC 0V V VOFF 0V VAMP 1V FREQ 1MegHz Xx Cancel Figure 2 27 Dialog for Selecting Components Visual TCAD File Edit View Place Simulation Analysis Window Help D PH nex aa Exo Circuit Schematic Editor E Simulation diode circuit sim Bb Schematics Circuit Schematic Editor Ex Circuit Setup JGJ R gt 2 kale HR 23 gt a o a VDC 0V Vi VOFF 0V VAMP 1V
52. he device as shown in Fig ure 2 38 p 42 It might be interesting to click the NW Play tool button to play the animation and watch the change of electron density as gate voltage increases 41 Tutorials 42 0 00016 0 00014 0 00012 0 0001 8e 05 6e 05 Drain Current A um 4e 05 2e 05 0 0 5 1 Gate Voltage V A 0 18um MOSFET 15 2 Figure 2 37 Simulated Id Vg curve of the MOSFET is Visual TCAD lt hydrogen gt File Edit View Draw Animation Options Window Help D eH 2f h sje Explorer Start Visualization v Visualization idvg inp sol Visualization dx Simulation idvg sim View Options Step 10 1 41 z 000A Drawing T 2 8 bd a a B Render Options Eh View Options ABBAA Description Contact Drain Voltage 0 1 V Potential 0 1 V Current 3 24489e 07 A Contact Gate Voltage 0 45 V Potential 0 45 V Current 5 76368e 105 A Contact Source Voltage 0 V Potential 0 V Current 3 24489e 07 A Contact Substrate Voltage 0 V Potential 0 V Current 3 96399e 16 A Mesh Filter Probe Variable SpreadSheet resultdat Plot Untitled electron density 1 204e 20 Figure 2 38 Electron concentration at Vg 0 45V Genius Device Simulator A 0 18um MOSFET Tutorials Setting Mobility Model Parameters So far we have always been using
53. he left 2D doping of the box is symmetric with the right of the box in the bound region is significant only for one dimension doping data out of the bound rectangle the point and point 2 is significant for two dimension doping data Place mole Ifthe device includes the polycompound material VisuaITCAD introduces 2 meth Fraction Profile ods to place the mole fraction of the compound linear fraction and gaussian frac tion Linear mole Fraction Profile Genius Device Simulator 71 GUI Reference Device Drawing Description Inputs the linear mole fraction profile name Inputs the range of mole fraction profile 3 The linear mole fraction profile is introduced to the bound rectangle region from the baseline to the end of the bound rectangle Place Dataset Doping Profile Profile Name C oo Doping Species Profile Dataset This profile only have 2D dataset Logarithmic Interpolation Profile Bound Rectangle Baseline Point C03 02 Baseline Poit2 01 02 Height um Orientation Left Right Figure 3 10 2D Dataset Doping Profile Gaussian mole Fraction Profile Description Inputs the gaussian mole fraction profile name 2 Inputs the parameter of the gaussian mole fraction including the peak characteristic length and ratio 3 Gaussian mole fraction Profile in the bound region the doping profile is uniform mole fraction and out of the bound region the mole fraction profile is gaussian di
54. he text window Select Font Font Courier Bitstream Vera Sans Mono Bitstream Vera Serif Caladings CLM Century Schoolbook L Console Courier Font style Bold Italic Effects m Strikeout 4 C Underline Writing System Any Figure 3 48 Font Settings RW N e FH Description Selects the font Selects the font style Selects the font size Other effects AaBbYyZz W Genius Device Simulator Text Editor GUI Reference Tools Menu Icon Description Simulation Tools Run As Genius Deck Run Genius device simulator with the curent file as the command input Run As SPICE Deck Run SPICE circuit simulator with the current file as the circuit deck Run As Python Script Run the text file as a Python Script Genius Device Simulator 109 GUI Reference Text Editor 110 Genius Device Simulator CHAPTER A Programming Reference Device2D Drawing Class Device2DScript The Device2DScript exposes APIs for device2d drawing in python language Method scriptType scriptType Returns Object name device2dscript Method addPolyLineItem addPolyLineItem points Arguments points list a list of points which to build a poly line For example points 400 0 400 0 400 1000 400 1000 addPolyLineltem points will draw line 400 0 400 0 line 400 0 400 100 line 400 1000 400 1000 Method addRegionLabelItem addRegionLabelItem l
55. ice Drawing Device Drawing Ex Drawing Tools RS EEE EZ 81 4 2 25 8 8x9 0 Layer List Object List Project Explorer Ex home hash build VisualTCAD 2 3 me gil src Mouse 0 2906 0 5184 Snap 0 2906 0 5184 14 Figure2 4 The Regions of the PN Junction Diode Placing Doping Doping is essential for semiconductor devices to function To place a doping pro Profiles file to the device one chooses the Add Doping Profile tool A doping box consists of a baseline and a height and the available doping functions include uniform Gaussian and Erf We first place the uniform body doping in the entire silicon region Genius Device Simulator 17 Tutorials 18 Simulate a PN Junction Diode In the Doping Profile state we click first at 2 0 and then at 2 0 to define the baseline and finally click at 2 2 to define the height of the doping box A menu pops up and ask for the doping function where we choose Uniform Doping Profile in this case A dialog pops up for us to key in the doping profile parameters as shown in Figure 2 5 p 18 We shall name the profile body and a n type doping concentration of 1 x 10 cm Place Uniform Doping Profile x Basic Parameters Profle Name Doping Species Donor z Concentation cm 3 1e 16 Profile Bound Rectangle Baseline Point 1 1 0 Baseline Point 2 1 0 Height um 2 Orientation Left
56. ich point to it else return NULL Method getWindowByNumber getWindowByNumber number Arguments number int index of subwindow Returns If find a subwindow which has index GSyntax GSyntax number return a pointer which point to it else return NULL 122 Genius Device Simulator
57. igure 2 17 Plot Style Dialog Genius Device Simulator a Cancel 25 Tutorials Simulate a PN Junction Diode Visual TCAD File Edit Plot Window Help D FH NAN x ee Fa Plot Tools on diode sim Visualization resultl vtu FB SpreadSheet Untitiled fe Plot Untitled E8 SpreadSheet result dat Fl Plot Tools ax EVE Curve Name Properties 0 0001 Group 1 curves Anode current A le 06 o o i Current A um le 10 Project Explorer Sx home hash build VisualTCAD ba Hole Ww Name n7 size ss translations ui tool wa tmp wg src mi python E lib le 14 mi images us help wi examples wi docs i data a 0 4 Cr p Gb Voltage V Figure 2 18 Diode I V Characteristics in Log Scale 26 Genius Device Simulator Simulate a PN Junction Diode Tutorials Visualizing the Solutions Filter Animation Genius Device Simulator We switch back to the Simulation Control window and in the Result list we select all solutions Right click and in the context menu click Open Visualization gt A new visualization window is opened Suppose we want to plot the electron concentration profile in the device choose in the menu Draw P Draw Pseudo Color Electron density In the visualization window one can hold the left mouse button and drag in the visualization window Scrolling the mouse wheel w
58. imulate a PN Junction Diode Visual i See File Edit Simulation Window Help DH ANKE BRO Simulation Control A Simulation Simulation Control Ex Electrodes Summary Setup aman anode Structure Embedded CGNS data Simulation Mode Steady state v ear gt ellae E e Source Type Const Voltage ba Solutions F Status gt Ready to run EB Voltage 0 v No solutions Simulation Structure Structure Viewer Name Anode Cathode Silicon Boundaries Anode_Neumann Anode to Silicon Cathode Neumann Cathode to Silicon Silicon Neumann Contact Name Cathode Source Type Const Voltage X Results Voltage 0 v X Project Explorer ex home hash build VisualTCAD X HAAG Sa Name size a wi translations Gas tool ga tmp Gr gf src H g python Er gi lib amp ws images amp a help a ws examples amp jg docs wa data Progress Overall Figure 2 11 The Structure and Electrodes of the Simulated Device We save the simulation setup to the file diode sim To start the simulation job click the Run and choose a working directory in the dialog shown in Fig ure 2 12 p 22 We create a new directory called run1 and all the simulation results will be kept in this directory Choose working SUGA x Look in sa home hash Documents examples VTCAD v t w EF all Compu i circuit el hash Files of type Xx Cancel 4
59. in Figure 2 17 p 25 set the line and symbol options The final plot is shown in Figure 2 18 p 26 Genius Device Simulator Simulate a PN Junction Diode m Plot Tools l File Edit Plot Window Help OFU ANa awo Visual TCAD Tutorials Plot Tools ax HANE Curve Name Properties 1 curves E Group Anode current A Project Explorer ax home hash build VisualTCAD a E s Name 7 Size 2 ss translations E tool i tmp wi src mi python E lib mi images us help G ws examples ji docs wi data a Waaa 0 00035 0 0003 0 00025 0 0002 y Axis 0 00015 0 0001 Se 05 0 2 0 4 0 6 x Axis Figure 2 15 Diode I V Characteristics in Linear Scale Bottom x axis Right y axis Top x axis Setting Mambo led styles Figure 2 16 Axis Property Dialog Axis Enabled 0 8 Axis Title Current A um Min Axis Value Axis Scale Type Logl0 Scale Auto Scale le 15 Max Major Divs 8 Max Axis Value Max Minor Divs 5 Xx Cancel Setting line symbol styles X axis Bottom Y axis Left hd Line Style Solid line D Color Red Thickness 0 X Symbol Style Circle gt Color Red s Filled F
60. ing MOSFET Device Structure p 37 here we omit the drawing structure step About this example we need draw a inverter symbol then use VisuaTCAD to do Mix Mode simulation We can combine the semiconductor device simulation with SPICE circuit simu lation This section shows the steps to demonstrate the output characteristic of In verter The files of this tutorial are located at VisualTCAD examples Inverter Creating Symbol and Mapping Device Electrode The first step is to draw the symbol of Inverter Choose in the menu File gt New Circuit Schematic then choose in the menu Place Library Manager which will start the Library drawing window as shown in Figure 2 40 p 45 Click the child window _ Add Library input the Library name inverter and last click to add symbol Visual TCAD D Component Za gt v EJ Q ay O Cla Numerical Device e a Expl Start tj Schematics Circuit Sche P nd 1 Circuit Setup 9 Resistor gt Capacitance Bjo h 3 Inductance qe 5 la Voltage Probe EF Current Probe L Wire Deas SA gt O 8 Built in library Built in library V Built in library Built in library Built in library Built in library Built in library Component Simulation Result i H p Progress Overall Snap 410 520 Figure 2 40 draw new symbol Now we can obtain the child window of drawing symbol as shown in Figure 2 41 p 46 First input the symbol
61. ion current opt cogenda After installation a typical directory structure would look like the following current gt releases VisualTCAD flex1m 1 7 4 1 rhe15 64 previous gt releases VisualTCAD flexlm 1 7 4 rhel5 64 documents 1 7 4 1 7 4 1 releases t VisualTCAD flexlm 1 7 4 1 rhe15 64 Genius Device Simulator VisualTCAD flexlm 1 7 4 rhe15 64 Installation Installing the Floating License on Linux Installing the Floating License on Linux FlexLM provides floating license and enable computers in the same network to share the same license on the license server When Cogenda software runs on other machines they obtain the license from node00 via network This documents de scribes how to work with the license manager program assuming that the license server runs on the computer node00 and that Cogenda software are installed in a shared directory opt cogenda It is also assumed that users home directories are shared among all hosts with NFS or other distributed file system Starting FlexLM Server Copy the cogenda lic file to opt cogenda cogenda lic The content of the file looks something like the following SERVER node00 any VENDOR COGENDA USE_SERVER FEATURE VTCAD COGENDA 1 000 31 mar 2012 4 SN Customerxxx SIGN FEATURE VFAB COGENDA 1 000 31 mar 2012 4 SN Customerxxx SIGN FEATURE VPTKL COGENDA 1 000 31 mar 2012 4 SN Cu
62. ionally one can set a mesh size constraint to each region The regions are shown in Figure 2 33 p 38 and the parameters for the regions are listed in Table 2 1 p 38 Table 2 1 Region Material Mesh Size um substrate Silicon 0 05 Source Al 0 04 Drain Al 0 04 Gate NPolySi 0 1 Substrate Al 0 05 spcl Nitride 0 1 spc2 Nitride 0 1 Regions of the MOSFET transistor is Visual LI De Layer List Object List File Edit Vie Explorer Start Device Drawing BHAA TCAD lt hydrogen gt w Drawing Device Window Help H s MEZ enter Mouse 0 0368 0 1958 Snap 0 0368 0 1958 Figure 2 33 Regions of the MOSFET transistor Genius Device Simulator A 0 18um MOSFET Tutorials Doping Profiles One then define the doping profiles in the MOSFET The position of the doping boxes are shown in Figure 2 34 p 39 and the doping profile parameters shown Mesh Grid Genius Device Simulator in Table 2 2 p 39 Name Substrate Channel LDD_S LDD_D Source Drain Profile uniform gaussian gaussian gaussian Type Acceptor Acceptor Donor Donor Peak Conc cm Char L um 5 x 10 1 x 1018 0 1 2x10 0 02 1 x 1022 0 04 Table 2 2 Doping Profiles Parameters Visual TCAD lt hydrogen gt File Edit View Drawing Device Window Help DlH 9C aa Explorer Start Device Drawing z Device 2D p18 drw a aam EET pa
63. ith the first so that it forms a closed polygon Then we add the polygon the the device structure using the function addPolyLineItem PolyLineItem 0 points 400 0 400 0 400 1000 400 1000 400 0 device2d addPolyLineItem points The second section defines the material regions of the device As shown below each region must have a label and a material name A point in the region pos 1s used to identify among the many regions in the structure Optionally one can set mesh area constraint and assign a color Finally the region label is added to the device with the function addRegionLabelItem Genius Device Simulator 57 Tutorials 58 Scripting and Automation RegionLabelItem Gate 44 label Gate material NPolysi pos 1 77778 92 8889 areaConstrain 10000 color cc 1585 device2d addRegionLabelItem label material pos areaConstrain color The next section of the code defines mesh size control items We wish to divide the segment 80 60 80 60 by at least 8 mesh grids We add this constraint with the addMeshSizeCtrlItem function as shown below MeshSizeCtrlItem 116 division 8 points 80 60 80 60 device2d addMeshSizeCtrlItem division points One important step is to set the doping profiles in the device In the following lines we define the source LDD doping profile which has a gaussian distribution function The profile attributes such as baseline depth
64. lation and data analysis as in the testMainWindow py script and the result is shown in Figure 2 60 p 61 2 TextDocument testpy T Spreadsheet resultdat S Device 2D ring drw mer Plot 123 plt_ 8b Device 20 ds2 drw ac Plot plot2 pit ui Spreadsheet ssss dat LA Text Document test py SpreadSheet result dat o Device 2D ring drw 6 ja source Vapp V urce potential Ifpurce current L Drain Vapp V rain potenti 2 6959le 13 1 Plot plot2 pit CUA ATA AA Figure 2 60 script build testMainWindow result 61 Tutorials Summary 62 Scripting and Automation With these examples we illustrated how one can use scripting for generating the de vice structure plotting the 2D curves and manipulating spreadsheets etc Through scripting one can save much time and increase the efficiency of TCAD simulation and analysis Genius Device Simulator CHAPTER GUI Reference Device Drawing Structure Drawing Menu Icon Description Adding Geometry Item Add Point a Add a point item to the drawing Add Polyline gt Add a polyline item to the drawing Add Rectangle rt Add arectangle item to the drawing which will be converted to a closed polyline item Add Arc Se Add a circle arc item to the drawing Add Circle Add a circle item to the drawing Add Spline Add a spline item to the drawing Labeling Device Region and Boundar
65. licking the menu Help About and the version number is shown in the dialog Figure 1 9 p 10 Version 1 6 0 beta 6 gf4b1900 f4b1900 Date Feb 6 2010 Copyright C 2008 2010 by Cogenda EDA Figure 1 9 The About Dialog Genius Device Simulator Using the Command line Interface Installation Using the Command line Interface This section outlines the command line usage of Genius under Linux A similar command line interface exists under Windows but is rarely used Configuration After the installation one may want to test the installation with the following steps Daily usage can be and usually should be performed under a normal user account instead of using the root account We first copy the examples to our home directory cp r opt cogenda genius examples HOME genius_examples cd HOME genius_examples PN_Diode 2D For convenience we add the installation directory to his PATH environment for his convenience With the bash shell one can type export PATH PATH opt cogenda genius bin or with csh set PATH PATH opt cogenda genius bin Now we try running the PN diode example with one single processor genius n 4 i pn2d inp Running with The running log will be output to screen It is pretty long we show only the one CPU beginning and ending portions here 2K 2K 2K OK 2K 2K K K OK 2K 2K K 2K OK K OK K 2K K K K K 2K K K OK K K K K K K K K K K 2K OK K K OK 2K K K 2K 2K 2K K K 2K K K K 2K 2K 2K 2
66. llowing sections we shall outline the installation procedures on both platform and the procedure to start the graphical user interface and the command line interface Installing on Windows Genius Device Simulator The installation package comes as an executable file Double clicking on it will start the installation wizard Figure 1 1 p 1 Genius TCAD Setup Welcome to the InstallJammer Wizard for Genius TCAD This will install Genius TCAD version 1 0 on your computer It is recommended that you close all other applications before continuing Click Next to continue or Cancel to exit Setup Cancel Figure 1 1 Welcome message We recommend install Paraview a versatile visualization software package to examine the output file generated by Genius The installer of Paraview is included and the user can choose to install it After installation we can test the installation with the bundled examples Please click Start gt All Programs gt Cogenda Genius TCAD VisualTCAD to start the Simulation manager and follow the tutorial in Chapter 2 Tutorials p 15 Installation Installing on Windows Genius TCAD Setup License Agreement Please read the following license agreement carefully END USER LICENSE AGREEMENT IMPORTANT Do not install this SOFTWARE before you have read this license agreement By proceeding to install this SOFTWARE you are indicating your acceptance of all the terms and conditio
67. m O to 2 V to obtain the transfer characteris tics of the MOSFET sl Visual TCAD lt hydrogen gt QC File Edit Simulation Window Help Explorer Start Simulation Control _ eeaeee simulation dg Sim Simulation Control Fx Electrodes al Summary Setup W CONAN GI Source Structure EJ Embedded CGNS data Simulation Mode Steady state z gt a NO 4 Source Type Const Voltage ihe Status fea Ready to run z fa Voltage 0 v v Solutions gt No solutions Contact Name Drain Source Source Type Const Voltage o spcl Voltage 01 Mia i a substrate keg lon ource Neumann Contact Name Substrate Source Type Const Voltage Voltage 0 v v Contact Name Gate Source Type Voltage Sweep Start Voltage 0 Vv x Stop Voltage 2 Malz Step Voltage 0 05 vV v Results Progress Overall Step i Figure 2 36 Simulation setup for calculating the Id Vg curve of the MOSFET We submit the simulation for running and shall observe that the drain voltage is first ramped up from O to0 1 V before the actual gate voltage scan begins This drain ramp up is necessary to ensure the convergence of the simulation After running the simulation we obtain the spreadsheet containing the terminal voltage current information in the sweep We plot the drain current against the gate voltage and obtain the Id Vg curve shown in Figure 2 37 p 42 One can also visualize the electron concentration in t
68. nd on node03 and expect the following output License server status 27000 node00 License file s on hydrogen opt cogenda cogenda lic node00 license server UP MASTER vi11 10 Genius Device Simulator 7 Installation Installing the Floating License on Linux Vendor daemon status on hydrogen COGENDA UP v11 10 Finally one can use the 1mdown command Merging with other licenses managed by FlexLM If one is using FlexLM licenses issued by other vendor as well as that from Co genda he she can manage them with a single instance of FlexLM server To do this one needs to copy all Vendor Daemons from all vendors along with the lmgrd program to the same directory i e opt flexlm bin Cogenda s vendor daemon is located at opt cogenda 1 7 3 bin COGENDA One then copies all the license files to opt flexlm license and starts the flexlm server with the command opt flexlm bin lmgrd 1 tmp flexlm log c opt flexlm license cogenda lic opt flexlm license synopsys lic Note how license files from various vendors are concatenated with semicolon in the c option 8 Genius Device Simulator Using the Graphical Interface Installation Using the Graphical Interface Checking License Status Genius Device Simulator VisualTCAD is the integrated graphical user interface of the Genius device sim ulation package To start VisuaITCAD in Windows please click Start gt All Programs gt Cogenda Genius TCAD g
69. nd symbol style and assign a title to the curve Finally we insert the curve to group O and at position 0 in the group The two numerical arrays are used as x and y coordinates of the curve insert Group 0 plot insertCurveGroup 0 Group Curve O in Group O sData TO 05 I5 215 Data a ko Oar ne on Ge 25 properties hasLine 1 lineColor ff0000 lineStyle 1 lineWidth 1 hasSymbol 0 symbolColor 000000 symbolStyle 1 symbolSize 6 symbolFilled 1 title y x 2 plot insertCurve 0 0 xData yData title properties The following two lines illustrates how to use the list constructing syntax of Python to define two numerical arrays for plotting the function y x xData i pi 6 for i in xrange 13 sin x for x in xDatal yData 55 Tutorials Scripting and Automation Example 2 Spreadsheet After creating a new Spreadsheet window we choose in the menu Spreadsheet gt Run Script to run the spreadsheet py script the result is shown in Figure 2 57 Explorer L Start Spreadsheet Tools E a SpreadSheet spreadsheet123 5 Spreadsheet Tools Ex kljfdk S za 1 dak uenon Column Name Properties W 3 poi W N ka klifdk ui uw ka o uw wi abs co1s 1 cols a rw s w n r 0 5 5 vw n Figure 2 57 script build spreadsheet result Some explanation of the script follows The function setColumnData is for
70. ndow Help DFU ankea HO ii Device Drawing z sae ak Device 2D Device Drawing Sx Drawing Tools NKEA aal lera En lia LA Jolla fl KO E 89 a o Layer List Object List Project Explorer ax fhome hash build VisualTCAD FE eS a BG 4 i tool amp sai tmp G wi src Mesh refinement 1290 points in 2471 triangles generated nput Coord o0 00 D Ere Mouse 1 0506 0 2118 Snap 1 0506 0 2118 Figure 2 9 The Final Refined Mesh Grid of the PN Junction Diode We save the drawing with lel save and key in the file name diode drw Addi tionally we choose in the menu Device gt Save Mesh to File to export the mesh grid to diode tif Genius Device Simulator Simulate a PN Junction Diode Tutorials Simulating the I V Characteristics Loading Device Structure Setting DC Sweep Genius Device Simulator We start by creating a new simulation control window by clicking in the menu File gt New Device Simulation The empty simulation control window is shown in Fig ure 2 10 p 21 Visual TCAD File Edit Simulation Window Help Ove 9a x ee BfRo Simulation Control Simulation Control ax Setup Simulation Mode Steady state v 87 gt 2 6 8 3 5 8 Results Project Explorer gx home hash build VisualTCAD ST Bjt Figur
71. ng Electrical Resistance 0 Jla ir Capacitance o F ly Inductance 0 H v Thermal Extern Temperature Default J 0 0 K ly Heat Transfer Coeff Default O 0 0 Wikicm x Figure 2 49 Interconnect Floating setting 4 Visual TCAD File Edit Simulation Window Help Dao 9C Nin aM E a Explorer Start Simulation Control e Simulation Control ax Electrodes Setup Circuit Symbol X Cancel Simulation Mode Circuit Element v Steady state EJ B Cy Tansient 4 4k a Mg 2 PIN PIN IN 4 IN 3 Device Structure Item Regions Boundaries Change symbol Electrode Map Symbol Pin Device Electrode 0 8 Simulation Summary Structure EJ Embedded CGNS data Status w Ready to run Solutions E g No solutions Structure Viewer Feature switches Resistive Metal 0 600 2 98e 08 0 600 1 20 1 000 X um Results Progress Overall Step Figure 2 50 Change Simulation Mode Genius Device Simulator Mix Mode Simulation of Inverter IO Circuit Tutorials V Visual TCAD File Edit Simulation Window Help D a D C Dir Explorer Start Simulation Control Simulation Control 5x m Symbol List m Symbol Preview Electrodes Numeric Device v
72. normal direction charac teristic lengths xy ratio label of the profile peak doping concentration doping type and doping species must be set The doping profile is then added with the function addDopingProfileItem DopingProfileItem LDD_S 134 attributes label LDD S type Gauss property Nd n peak 2e 19 polarity 1 0 baseline center 250 0 baseline length 300 0 depth 10 0 unit normal 0 1 zye ratio LO NA 20 0 device2d addDopingProfileItem attributes We can save the completed device structure to file A mesh is needed for simula tion and the doMesh function is invoked for this purpose Finally we export the mesh in the TIF format so that it can be used in simulations Genius Device Simulator Scripting and Automation Tutorials save to file device2d saveToFile home user example mosfet drw do mesh device2d doMesh export mesh device2d exportMesh home user example mosfet tif Genius Device Simulator 59 Tutorials Scripting and Automation Example 4 Using More Than One Window After simulating the MOSFET constructed in the last section we can plot the Id Vg curves use script file An example script for this is provided p18 py and the result is shown in Figure 2 59 p 60 nt A um ain Curre o o r T 7 1 Gate Voltage V Figure 2 59 script build Id Vg curve plot result This involves two modules in VisuaITCA
73. ns VisualTCAD LINUX Global Parameters Physical Models Material Models Type General _ Electrode region Carrier Statistics Boltzmann Gate Electrode region Source Electrode region Energy balance eqn None Substrate Electrode region oxide i Insulator region itri Insulator region Insulator region substrate Semiconductor region X High field mobility Region Material Drain Al Longitudinal E field Simple E field Impact lonization ll driving force Qf Gradient Band to band tunneling Carrier trapping Restore Defaults X Cancel Figure 3 29 physical model Description Sets physical model of silicon material and other materials choosing the default model Carrier statistics chooses Boltzmann distribution or Fermi Dirac distribution Energy balance equaption When the Energy Balance equation solver is selected in the METHOD command this parameter selectively enables the equations for lattice temperature electron temperature and hole temperature Transverse E Field Use effective surface electric field for carrier mobility calculation at insu lator semiconductor interface Longitudinal Synonym to Mobility Force When H Mob is enabled this parameter selects the driving field used in high field mobility calculation When ImpactIonization is enabled this parameter selects the driving field used in impact ionization coefficient calculation including Qf Gradi
74. ns for Genius are listed below Line Options Name genius Genius 3D parallel simulator Synopsis genius n ncpus i filename genius r Options n ncpus Number of processors to be used in the simulation i filename Input file to the simulator r Register the copy with Cogenda Genius Device Simulator 13 Installation Using the Command line Interface 14 Genius Device Simulator CHAPTER 2 Tutorials VisualTCAD is the integrated graphical user interface of the Genius device sim ulation package This chapter provides a step by step tutorial to the Visual TCAD graphical user interface Simulate a PN Junction Diode Our first attempt is to simulate the forward I V characteristics of a short base PN junction diode The files of this tutorial are located at VisualTCAD examples tutorial ti Building the Diode Structure The first step is to construct the diode structure Choose in the menu File gt New Device Drawing which will start the 2D device drawing window as shown in Fig ure 2 1 p 15 Visual TCAD File Edit View Drawing Device Window Help D H ox B Fo Device Drawing Device Drawing ax Drawing Tools N C 32 22 4 4 ral far sj sme 04 8 0 lt 7 Kg 5 t PIE e DO 2 E Layer List Object List Project Explorer Ex home hash build VisualTCAD S a Ea e Mouse 0 1640 0 4220 Snap 0 1640 0 4220 1
75. ns stated in this agreement This is a legal agreement between you either as an individual or a single entity and Cogenda Pte Ltd for this software product which includes computer software and may include associated media printed materials and online or electronic documentation the SOFTWARE By installing copying or otherwise using this SOFTWARE you are agreeing to be bound by the terms of this agreement If you do not agree to the terms of this Agreement do not install or use the SOFTWARE and if it is a non evaluation version return it together with physical materials and media to the place you obtained them For a Full refund si OT do not accept the terms of the license agreement InstallJammer Figure 1 2 License agreement Genius TCAD Setup Choose Destination Location Where should Genius TCAD be installed Setup will install Genius TCAD in the Following Folder To install to this Folder click Next To install to a different Folder click Browse and select another folder pa Folder C Program Files Cogenda InstallJammer Cancel Figure 1 3 Choosing target installation directory Genius TCAD Setup Installing Installing Genius TCAD Please wait while Setup installs Genius TCAD on your computer Installing Program Files InstallJammer Cancel Figure 1 4 Copying files Genius Device Simulator Installing on Windows Genius Device Simulator Installation G
76. ogress Overall Ste g p Figure 2 52 mapping setting Genius Device Simulator 51 Tutorials Mix Mode Simulation of Inverter IO Circuit Mixed Mode Simulation When we finfish the device setting we need open a new circuit Schematic win dow and do circuit simulation then choose Numerical Device menu to draw our inverter symbol and click Component menu to draw Voltage source we can click corresponding menu to add Voltage Probe Ground and Wire The final circuit is shown in Figure 2 53 p 52 Figure 2 53 Circuit Schematics of inverter simulation We want to do DC sweep Mode simulation so we setup the sweep setting with the Ot Setup Simulation tool and 1 Solver Options tool as shown in Figure 2 54 p 52 A Analysis Settings Analysis Type DC Sweep ix DC Sweep Settings Sweep Variable Sweep Range Sweep Component V1 Sweep Start 0 Current source Sweep End 1 8 Resistor x VisualTCAD Sweep Step 20 Non Linear Solver Options Options Number of Processors i O Max voltage step V Default not limited Maximum iterations 30 le p Update damping Potential damping M 52 Predict next solution yes FI Initial OP Analysis Options re v Number of Source Ramp up Steps 3 LX Misc Options Truncate voronoi cell Always truncate v Linear solver type Direct MUMPS s_ fv Max Voltage Step in Ramp up Default not limited ba Restor
77. on the doping profile is gaussian distribution Place Uniform Doping Profile Basic Parameters Profile Name Doping Species Concentration cm7 3 1e 16 Profile Bound Rectangle Baseline Point 1 Baseline Point 2 0 1 0 2 Height um 0 1 Orientation Left Right Figure 3 6 Uniform Doping Profile 68 Genius Device Simulator Device Drawing Erf Doping Profile Hunk wNr Kk Genius Device Simulator GUI Reference Place Gaussian Doping Profile Basic Parameters Profile Name Doping Species Peak Concentration cm 3 Total Dose cm 2 Characteristic Length Y Characteristic Length um Concentration by Distance to Doping Box Distance to Doping Box um Concentration cm 3 XY Ratio X charchar Seer Profile Bound Rectangle A i Baseine Font o S Baseline Point2 Height um Orientation Left Right Figure 3 7 Gaussian Doping Profile Description Inputs Doping Profile name Chooses Doping Species Donor or Acceptor Refers to Gaussian doping Profile Refers to Gaussian doping Profile Refers to Gaussian doping Profile Erf Doping Profile in the bound region the doping profile is uniform distribution and out of the bound region the doping profile is erf distribution 69 GUI Reference Device Drawing e Place Erf Doping Profile Basic Parameters Profile Name Doping Species Donor gt Peak Concentration cm7 3 Total Do
78. ondition to file bc inc Genius finished Totol time is 1 min 2 78475 second Good bye Running with Multiple CPUs number of CPUs to utilize genius n 2 i pn2d inp Registering We can run Genius with more than one CPUs using the n option to specify the If you download the trial version of Genius from the website the default license file included in the package is valid for one month only Some advanced features and disabled and at most 2 processors are supported You need to register your copy with Cogenda in order to continue using Genius To register simply type Genius Device Simulator Using the Command line Interface Installation genius r and a registration code will be displayed on screen akak RC 3K k k 2K 2K K CK KR I 2K 2K KA 2K 3K 2A kA 2A KK 2 kk 2A Ak FK kk 2 kA FK 2K KO To register your copy email the following registration code 81643467 7a0bb0501aabd8bd07b9f621feb1Ibabcabf24fF987 eb83fa083b48a771796178 ac1d9de40cc53f2980fd12de936f ebdcadb16be3b66b08e9e0bd314f 511f63cd2264b9ab1 b10635ad3a515ec4f62e101d86206fd7694ac938210d0a406edabbece9b 60f28f916c88d d83010470068f ebbafbcdff8da09c4aed0d9d Please email this registration code to Cogenda or its redistributors You will be given the license file Lic dat Copy it to opt cogenda genius license lic dat and overwrite the old file Genius now should work under registered mode with all options you subscribed turned on Command The command line optio
79. ould zoom in or out the view and dragging with the mid dle button wheel button would pan the view As shown in Figure 2 19 p 27 the electron concentration is represented by the color scale Check in the menu Options gt Signed Log Scale to enable the log scale for the z axis Visual TCAD File Edit View Draw Animation Options Window Help Arf NXB Fo Visualization Roe Simulation diode sim Visualization result 1 vtu E x Visualization View Options Mesh Filter Region Filter Value Filter Region name Region material Anode Al s electron density Cathode Al x Silicon Si Probe Variable Animation Control Project Explorer gx home hash build VisualTCAD X pA Name size a gg translations ag tool H Ga tmp G i src gai python 6 g lib G gi images Egg help ws examples H gg docs wi data a Figure 2 19 Electron Concentration in the Silicon Region of the Diode One can filter the areas to be included or excluded 1n the visualization in the Mesh Filter section in the dock widget We choose to filter by region names as shown in Figure 2 19 p 27 We have included all the solutions in the visualization each solution at a different anode voltage The electron profile is different for each solution In the Animation Control section of the dock widget we can step through the solutions by clicking the J Next and Previous buttons 21 Tutorials 28 Probe Sim
80. pos V probelpos V Voltage V l Project Explorer ax home hash build VisualTCAD z S m l e 05 Name Size g translations a tool wi images iw help i examples i docs a 1 ua data z 0 50 07 1e 06 F ao Time s 1 5e 06 Figure 2 30 The Voltage of the Sine Source and the Voltage Probe as Functions of Time Genius Device Simulator 35 Tutorials Simulate a Diode Rectifier Circuit Summary In this section we outlined the procedure of simulating devices in circuit This integrated approach allows one to combine the accuracy of device simulation with the power of SPICE circuit simulation 36 Genius Device Simulator A 0 18um MOSFET Tutorials A 0 18um MOSFET The files of this example are located at VisualTCAD examples MOSFET Building MOSFET Device Structure Polyline Tool Exact Coordinates Input Genius Device Simulator As in the previous diode example we shall start with drawing the device struc ture of the MOSFET transistor We first draw the outline of the device with thel 1 Add Rectangle and the l Add Polyline tools as shown in Figure 2 31 p 37 is Visual TCAD lt hydrogen gt File Edit View Drawing Device Window Help hd H Explorer Start Device Drawing a Aag BE pa DAAA Object List er Mouse 0 4578 0 1752 Snap 0 4578 0 1752 Figure 2 31 Outline of a MOSFET transistor To draw
81. rap Restore Defaults X Cancel Figure 2 39 Setting mobility model and parameters Symbol Parameter Unit Si n Si p a EXN1 LSM EXP1 LSM 0 680 0 719 p EXN2 LSM EXP2 LSM 2 0 2 0 4 EXN3 LSM EXP3 LSM 2 22 Table 2 3 Parameters of Lombardi mobility model Genius Device Simulator 43 Tutorials 44 Symbol A EXN4 LSM EXP4 LSM y EXN8 LSM EXP8 LSM Ho MUNO LSM MUPO LSM Hy MUN1 LSM MUP1 LSM H MUN2 LSM MUP2 LSM P PC LSM C CRN LSM CRP LSM C CSN LSM CSP LSM B BN LSM BP LSM C CN LSM CP LSM D DN LSM DP LSM D5 VSATNO VSATPO p BETAN BETAP VSATN A VSATP A cm s Table 2 4 Parameters of Lombardi mobility model A 0 18um MOSFET Sin 0 125 2 0 52 2 43 4 1417 0 0 fixed 9 68 x 101 3 43 x 10 4 75 x 10 1 74 x 10 5 82 x 1014 2 47 2 0 0 8 Parameter Si p 0 0317 2 0 44 9 29 0 470 5 9 23 x 101 2 23 x 10 6 10 x 10 9 93 x 10 8 84 x 10 2 05 x 1014 2 49 1 0 0 8 We can now run the simulation again and observe the change to the Id Vg curve as a result of the change in the mobility model Genius Device Simulator Mix Mode Simulation of Inverter IO Circuit Tutorials Mix Mode Simulation of Inverter IO Circuit As in the previous cmos simulation we can create a device structure of inverter and do Mix Mode simulation So we need draw a structure of inverter the detail step refer to mosfet structure building Build
82. ry Draw Mesh Device Variable Plotting Draw Pseudo Color Draw Contour Draw Vector Genius Device Simulator Icon e DDA Wg GUI Reference Description Plot the regions in the device structure Plot the materials in the device structure Plot the boundary and interfaces in the device structure Plot the mesh elements in the device structure Draw a pseudo color plot of the selected variable Draw a contour line surface plot of the selected variable Draw a vector plot of the selected variable 99 GUI Reference Animating the simulation result 100 Menu Icon Description Animation Control First Frame Show the first frame of the simulation results Previous Frame O Show the previous frame Next Frame Show the next frame Last Frame 51 Show the last frame Play Pause O Play or Pause the animation Add Frames Add Frame s Add frames vtu files to the animation Device Visualization Genius Device Simulator Spreadsheet Spreadsheet Menu Spreedsheet Operation Insert Row Insert Column Delete Row Delete column Plot Column Calculator Scripting Run Python Script Plot column GUI Reference Icon Description Insert one row in the spreadsheet Insert one column in the spreadsheet Delete the selected rows in the spreadsheet Delete the selected columns in the spreadsheet Plot the data in selected columns LC Bi GB E Use mathematical calculator to calculate
83. script Export the procedures to draw the present device as a Python script Add Doping Profile VisualTCAD provide total 4 kinds of doping profiles recently including Uniform Doping Profile Gaussian Doping Profile Erf Doping Profile and Dataset Doping Profile etc Uniform Doping Profile Gaussian Doping Profile Erf Doping Profile Dataset Doping Profile Figure 3 5 Doping Profile Type Uniform Doping Profile Description 1 Inputs Doping Profile name 2 Chooses Doping Species Donor or Acceptor 3 Inputs Concentration of the Uniform Doping Profile 4 Uniform Doping Profile in the bound region the doping profile is uniform distribution and out of the bound region has none doping distribution Gaussian Doping Profile Genius Device Simulator 67 GUI Reference Device Drawing Description 1 Inputs Doping Profile name 2 Chooses Doping Species Donor or Acceptor 3 Inputs Concentration of Doping Profile two styles to choose concentration peak or Total Dose 4 Characteristic Length two styles to choose Y Characteristic Length or Doping Concentration at depth the Distance to doping Box parameter is a relative depth to the edge of bound rec tangle The doping setting has 4 groups total but the combination of Total Dose and Doping Concentration is invalid 5 Sets XY Ratio the value is equal to X char Y char Gaussian Doping Profile in the bound region the doping profile is uniform distribution and out of the bound regi
84. se cm 2 le 13 Characteristic Length Y Characteristic Length um O Concentration by Distance to Doping Box Distance to Doping Box um 0 2 Concentration cm 7 3 le 16 XY Ratio X char Y char Profile Bound Rectangle Baseline Point 1 0 27 Baseline Poit2 Height um Orientation O Left Right X Cancel Figure 3 8 Erf Doping Profile Dataset Chooses profile dataset style total 3 kinds of dataset doping only 1D only 2D Doping Profile and Both Description Inputs Doping Profile name Chooses Doping Species Donor or Acceptor Ww N HK About only 1D option importing the one dimension doping data it incuding 2 columns first column is coordinate and its unit is nMeter the second column is doping concentration and its unit is Cubic cMeter the doping data can come from the opened data file or look for the data file by the data path 4 When VisualTCAD introduces the data from the data file VisualTCAD needs interpolation the mesh point data the default linear interpolation here provides the logarithmic interpolation also 5 In the bound rectangle region introduces one dimension dataset file the baseline from point1 to point2 is the begin of the one dimention doping data the end of doping profile is expanded to the edge of the box out of the bound region has none doping distribution Dataset Doping Profile 70 Genius Device Simulator Device Drawing GUI Reference
85. simulation the time control setting needs set start time step time stop time and Maxmum step time etc 2 Other options user can choose to set maxmum voltage step Boundary condition 84 Genius Device Simulator Device Simulation k BR W N p physical model Genius Device Simulator GUI Reference Description Clicks to choose the boundary Chooses the contact type total includes many types here chooses the ohmic contact Sets ohmic contact parameters some contact have no parameters such as Neumann boundary Sets boundary z width the priority is higer than global z width setting 3 VisuaITCAD LINUX Boundaries and Contacts Drain Ohmic contact Source a Ohmic contact Substrate Ohmic contact Capacitance fo Fy Inductance 0 H_ Override Global Z Width Boundary Z Width um J4 Restore Defaults X Cancel Figure 3 27 Boundary condition VisualTCAD LINUX Physical Models Material Models cr External Temperature 300 Kamal 4 1 Pa Z wi io S Physical Equations Basic Drift diffusion X O pe Restore Defaults Figure 3 28 Global model 85 GUI Reference 86 Device Simulation Description Sets global parameter temperature and z width parameters Chooses the physical equations including Basic Drift diffusion equations Drift diffusion equa tions with lattice heating and Energy balanced drift diffusion equations Here chooses Basic Drift diffusion equatio
86. stomerxxx SIGN FEATURE GENIUS MISC COGENDA 1 000 31 mar 2012 100 SN Customerxxx SIGN FEATURE GENIUS COMMON COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS DDM2 COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS EBM3 COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS AC COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS SPICE COGENA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS OPTICAL COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GENIUS HIDDM1 COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GDS2MESH COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN FEATURE GSEAT COGENDA 1 000 31 mar 2012 32 SN Customerxxx SIGN Fach line corresponds to a feature This file shows a license with all features enabled with 32 way parallel computation enabled in the Genius simulator One first enter the Cogenda environment with the command below source opt cogenda 1 7 3 bin setenv sh One then starts the license server with the following command on node0 0 It is not necessary to use root privilege lmgrd c opt cogenda cogenda lic 1 tmp flexlm log 6 Genius Device Simulator Installing the Floating License on Linux Installation 14 14 14 14 14 14 14 14 14 14 14 14 OT OT OT OT O7 Of OT OT O7 OT OT OT 56 56 56 56 56 56 56 56 56 56 56 56 The
87. stribution 72 Genius Device Simulator Device Drawing Genius Device Simulator Place Linear Mole Fraction Profile Profile Name Linear Mole Fraction Parameters Rang of mole fraction X Mole fraction from Mole fraction to Rang of mole fraction Y Mole fraction from Mole fraction to Profile Bound Rectangle Baseline Point 1 Baseline Point 2 Height um Orientation Figure 3 12 Linear Mole Fraction Profile GUI Reference 73 GUI Reference 74 Figure 3 13 Device Drawing Place Gaussian Mole Fraction Profile Profile Name Characteristic Length Char length of mole X Peak Y Characteristic Length um xy Rato xcharrchan TU Char length of mole Y Vanene ton xv Ratio xeha AF Profile Bound Rectangle Baseine Point Baseine Point 2 Height um Orientation Left Right Gaussian Mole Fraction Profile Genius Device Simulator Device Drawing GUI Reference Place Dataset Doping Profile Proflename C S Doping Species Profile Dataset This profile have 1D amp 2D dataset T a o Logarithmic Interpolation Profile Bound Rectangle Baseline Point 03 J 02 Baseine poina 01 o2 Height um Orientation Left Right Figure 3 11 Both 1D amp 2D Dataset Doping Profile Do mesh VisualTCAD LINUX Mesh Quality Control Minimum triangle angle C Mesh Refinement Control Maximum doping difference fine re Q ai x coarse
88. t VisualTCAD in the Start Menus In Linux one types the following command in a shell opt cogenda 1 7 2 VisualTCAD bin VisualTCAD amp The main window of VisualTCAD is shown in Figure 1 7 p 9 File Edit Window Help SDR AN Fo 7 ax Project Explorer ax home hash build VisualTCAD z m Ba le Figure 1 7 The VisualTCAD Main Window To check the license status click in the menu Helpb License The license status dialog shown in Figure 1 8 p 10 If you download the trial version of Genius from the website the default license file included in the package is valid for one month only Some advanced features and disabled and at most 2 processors are supported You need to register your copy with Cogenda in order to continue using Genius To register click the register button and email the generated registration code to Cogenda or a sales representative Installation 10 Using the Graphical Interface VisualTCAD LINUX x License location home hash build genius license lic dat License status Ok Time to expire days 327 Enabled processors 4 Enabled features feature POISSON DDM1 z o D ox M x x x x x x x x Refresh Register Figure 1 8 The License Status Dialog Every release bears a unique version string which should be quoted when re questing technical support from Cogenda The version number of the release can be checked by c
89. thod addMoleFractionItem addMoleFractionItem attr Arguments attr list a list of name and value pair for mole fraction item Method addBoundaryItem addBoundaryItem label segment strColor ff0000 Arguments label string label for boundary item segment list point pl and p2 to decide item region strColor string background color for item Method addMeshSizeCtrlItem addMeshSizeCtrlItem division points Arguments division int number of division points list start point and end point to decide MeshSizeC trlItem Method addRulerItem addRulerItem points Genius Device Simulator 113 Programming Reference Arguments Device2D Drawing points list start point and end point to decide Rulerltem Method addPointItem Arguments Method doMesh Arguments Method exportMesh Arguments Method clear Method saveToFile Arguments Method setTitle 114 addPointItem point point list x y to decide PointItem doMesh optimization 1 meshCmd pzADenfg30 max_d 3 0 signed_log true optimization int times to refine mesh meshCmd string command to do mesh max_d double signed Log bool exportMesh filename filename string name of tif file when export mesh clear saveToFile filename filename string filename to save file which can be relative or absolute filename if relateive save in current directory where program is running setTitle title Genius Device Simula
90. tor Device2D Drawing Programming Reference Arguments title string title for Device2D SubWindow Genius Device Simulator 115 Programming Reference Curve Plot Curve Plot PlotScript The PlotScript exposes APIs for curve ploting in python language Method scriptType scriptType Returns Return the object name plotscript Method curveGroupCount curveGroupCount Returns Return the count of curve groups Method curveCountAt curveCountAt group Arguments group int group index Returns Return curve count at group group Method insertCurveGroup insertCurveGroup pos groupTitle Group groupPalette QString Arguments pos int index of curve group groupTitle string title for this curve group groupPalette string palette name for this curve group Method removeCurveGroup removeCurveGroup int pos 116 Genius Device Simulator Curve Plot Arguments Programming Reference pos int index of curve group which will be deleted Method setGroupTitle Arguments Method insertCurve Arguments Method clear Method saveToFile Arguments Method setTitle Arguments Genius Device Simulator setGroupTitle group title group int index of curve group title string title for curve group insertCurve group pos xData yData title curve properties Variant group int index of curve group pos int index of curve in curve group xData list data for x coordinate
91. ulate a PN Junction Diode Visualization E x View Options Mesh Filter Probe Variable Animation Control Step 10 20 G 00 Figure 2 20 Animation Control We can probe the hole concentration along the straight line 0 0 0 2 in the Probe section in the dock widget as shown in Figure 2 21 p 28 After clicking the Probe button a spreadsheet containing the interpolated values of hole concen tration is opened We can then plot the hole concentration along the cut line as shown in Figure 2 22 p 29 Visualization E x View Options Mesh Filter Probe Variable Variable Select o hole density v Probe Line End Point in Micron XI O X2 0 Y1 0 Y2 2 Z1 0 Z2 0 Probe Line Resolution Resolution 100 N Probe Animation Control Figure 2 21 Probe Control Genius Device Simulator Simulate a PN Junction Diode Tutorials le 20 le 18 le 16 le 14 le 12 le 10 Electron Concentration cm 3 le 08 le 06 10 000 1 Depth um Figure 2 22 Hole Concentration Along the Probe Line Genius Device Simulator 29 Tutorials Simulate a PN Junction Diode Summary In the preceding sections we went through the steps of simulating the I V charac teristics of an PN junction diode This illustrates the basic flow of device simula tion in VisualTCAD 30 Genius Device Simulator Simulate a Diode Rectifier Circuit Tutorials
92. ure file Look in E3 Mome jidm python 3 examples m jidm home Filename 7 sopa Files of type Structure files tif cgns grd tif3d v X Cancel Figure 3 21 load structure file Resistive Metal When the device exist the boundary of the metal user should be set it to Soder pad Boundary and open the Resistive Metal button before load the device struc ture in the Device Simulation window Visual TCAD Device 2D Untitled on hydrogen localdomaln BSE fle Sel View wine Deweer Wacow Help F K O a 9 AG apm Z ures Cxolcrer Stat Devre Tuning UevzeL awra Fix boundary laba shi kr Lr boundary Al Pa Panay Bu a w a s7 I Mo 3 a boundbry too w CRS at da a DAAA si bayon Los Object List Nama P Diiw ig cuts Poly atam 45 Poly atar 45 C Negicn items eigi li 25 Regi lem 26 l Lakel iterrs Jeuncary label ter 4roce i 23mangary label item Carhaes i Fegweluvel lem Al 1321 Region laoel item dilicov 24 Profile iens Meask rante itens Anrokalhien lerm boundary boundary labe Mouse 0 128b U 3824 S120 U Lb8b U J9Z4 Figure 3 22 define boundary 82 Genius Device Simulator Device Simulation GUI Reference Description Choose boundary tool 2 Add boundary label Anode and Cathode Boundaries and Contacts Electrical Solder pad Type L Resistance 0 _ r Cap
93. utions so far Structure Viewer Region Progress Overall FI Figure 2 13 The Device Simulation in Progress Genius Device Simulator 23 Tutorials Simulate a PN Junction Diode Examining the I V Characteristics 24 Opening the Spreadsheet Plotting the I V Curve Setting Plot Options After the simulation completes we wish to plot the I V characteristics of this for ward biased PN junction diode We can click the RR Show IV Data button to open the spreadsheet containing the terminal information of the solutions The spread sheet is shown in Figure 2 14 p 24 Visual TCAD File Edit Spreadsheet Window Help D FH rx aa ERO PAN Spreadsheet Tools Spreadsheet Tools 8 685 8 m m Column Name Propertie 43034 Insert Row Delete Column Delete Row 1 309817e 14 0 4 689015e 14 0 amp simulation diode sim Visualization resultl vtu FB SpreadSheet Untitiled E Plot Untitled gy SpreadSheet result dat 05 rode vapp ode potential FH rant hada ann ada notentiall hade curren Plot data with x variable gt 1 Anodi Vapp v e lt 2 Anode_current A 2 095601e 16 Insert Column Anode Vapp V 1 170251e 15 Anode potential V 3 981319e 15 Anode_current A 1 313369e 14 Cathode_Vapp V 4 682876e 14 Cathode potential V 1 931088e 13 a pe e he bh Ee EE Cathode current A 9 478766e 13 5 394081e
94. utomatically More importantly one does not have to write the scripts from scratch In the case of device drawing after one drew a first device strucuture in GUI he can export the drawn structure to a script file One then use this generated script file as the template and with minor modifications run the script to generate new device structures The scripting language in VisuaITCAD is Python which is a general purpose pro gramming language with many useful libraries and utilities In this section we shall see some examples on scripting in a few modules of VisualTCAD Example 1 Curve Plotting We creat a new X Y Plot window and in the menu choose Plot Run Python script to run the script plot py located in the examples VisualTCAD script directory Curves are plotted in the window as shown in Figure 2 56 p 54 This figure has two group curves and the first group has two curves Figure 2 56 script build plot result Let us look at the script file for details In the following code segment we first insert a curve group at position O first group which may contain a set of curves 54 Genius Device Simulator Scripting and Automation Genius Device Simulator Tutorials We then define two arrays of numbers xData and yData One observe that they have the same number of items and the corresponding items follow the relation y x The next two commands define some curve properties such as a color line style a
95. wa docs us data 0 bl 4 com oe o E e P Figure 2 23 Default Symbol for the Two Terminal Device We want a more suitable symbol for the diode so we click Change Symbol and in the dialog Figure 2 24 p 32 we choose the diode symbol Then we must map the two device electrodes to the two pins in the circuit symbol as Shown in Figure 2 25 p 32 We save to another file named diode circuit sim Genius Device Simulator 31 Tutorials 32 Symbol List Symbol Selection x Symbol Preview Simulate a Diode Rectifier Circuit CircuitSymbol Ly BJT P Device 2PIN Device 3PIN Device 4PIN Device 5PIN Device 6PIN MOS P Device 7PIN MOS N ShottkyDiode s a PINA PINK File Edit Simulation Window Help OFB ANa awo onia Simulation Control Simulation Control Ex Setup 2X corel Figure 2 24 Dialog for Selecting Circuit Symbol Visual TCAD ag aay Electrodes Circuit Symbol Simulation Mode Circuit Element a gt e 6 44 23 E la Simulation Structure Name El Regions Cathode Silicon Boundaries Anode_Neumann Anode_to_Silicon Cathode_Neumann Cathode_to_Silicon Silicon_Neumann Results Project Explorer ax fhomefhash build VisuaITCAD Iz EJ e Name 5 size 2 wa translations wa tool wa tmp wg src
96. y Add Region Label T Add a material region label to the device structure Add Boundary Label Add a boundary label to the device structure Selecting Objects Select Object Tal Select a graph item polyline rectangle arc etc a label or a mesh size con straint item This also switches to the solid editing mode for moving objects Select Point R Select a vertex point This also switches to the rubber band editing mode for moving vertices General Editing Operations Edit Properties Edit properties e g coordinates of polygon vertices of the current drawing item Make a Clone Make a copy of the selected drawing items Mirror Horizontally Flip the current drawing item in the horizontal direction He amp Mirror Vertically Flip the current drawing item in the vertical direction Enter the corner point editing mode User can select a vertex in the highlighted polygon and move the vertex Move points Genius Device Simulator 63 GUI Reference Menu Snap Auto Snap Grid Snap Line Snap Horizontal Line Snap Vertical Line Snap No Snap Polygon Properties Dialog Icon Description Device Drawing Description Enter the automatic snapping mode Mouse coordinates are snapped to a nearby grid point or a vertex in existing drawing Enter the grid snapping mode Mouse coordinates are snapped to a nearby grid point Enter the line snapping mode Mouse coordinates are snapped to a point on a nearby line s

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