IONIZATION SOLUTIONS Digital AeroBar®
Contents
1. AeroBar with Ultraclean Silicon Emitter Points 13 84 AeroBar with Ultraclean Silicon Emitter Points 17 Silicon Emitter Points 8 2 load port SS EM ce 36 AeroBar with Ultraclean configuration 56 AeroBar with Ultraclean Silicon Emitter Points 12 3 load port configuration 76 AeroBar with Ultraclean Silicon Emitter Points 16 4 load port configuration 91 5570 Infrared Handheld Remote Accessories 33 1700 X Interconnect cable RJ 11 connectors 26 AWG 4 conductor where X is the length 0 5 2 6 10 15 20 30 40 feet 14 21730 DIN rail mount transformer 230 VAC to 24 VAC 14 1535 100 115 230 VAC switchable desktop transformer 14 1725 10 Interconnect cable for use with 14 15353 transformer RJ 11 to RJ 22 connectors 10 ft long 28 6225 End clip for Egg Crate 2 clips required per bar 28 6230 Mid clip for Egg Crate Each 28 6235 End clip for hang mounting 2 clips required per bar 28 6240 Mid clip for hang mounting required for 64 and 84 bars only 28 6255 Flat clip for Horizontal Mounting 2 required for 44 3 required for 64 8 84 28 0505 Pine Tree Clips use two per end or grid clip 28 6257 Grid Mounting Clips requires two Pine Tree clips 28 0505 per Grid clip 28 6245 Wire Clips to secure cables to AeroBar 93 1420 Polycarbonate Rod and Flat Clip Assembly for lowering AeroBar clear 4 51 93 1421 Polycarbonate Rod and Flat Clip Assembly for2. in 0 1 second increments In steady state mode increase the positive and negative voltage outputs if the decay times are too long Troubleshooting the Balancing Procedure 1 Ifdecay times are too long Check that airflow is 70 90 fpm If airflow is too low and cannot be changed see the table Airflows Are Lower Than Tool Specification and Cannot Be Changed For Pulsed DC Mode For Steady state DC Mode If voltage swings are lt 100V adjust and ontimes Increase the positive and negative upward in 0 1 second increments until decay time voltage outputs maintaining a balance stops improving or voltage swings become too high of 20V Maintain last beneficial setting Do not set below 0 7 seconds or alarms will be defeated The normal range is 0 7 to 2 seconds If voltage swings are gt 100V adjust and offtimes upward in 1 second increments until decay time stops improving or voltage swings become too high Maintain last beneficial setting 2 If voltage swings are too high pulsed DC only If Voltage Outputs are gt 80 If Voltage Outputs are lt 50 Decrease voltage outputs in 0 1 Decrease positive or negative on or offtimes in increments maintaining balance until swings 0 1 increments maintaining balance until are lt 100V or in desired range swings are lt 100V or in desired range 3 lfairflows are lower than tool specification and cannot be changed 36 For Pulsed DC Mode For Steady state
3. swab with the IPA solution or use Simco lon Emitter Point Cleaner Gently rotate the swab around the emitter point until dirt or debris is removed Do not alter emitter points in any A way Doing so may void the Figure 10 Cleaning Points with the warranty Emitter Point Cleaner Emitter Point Replacement Emitter point replacement is recommended every 24 to 36 months or when damage or erosion is evident To remove emitter points Use a soft jawed tool to remove silicon points Silicon points are brittle and may break if handled roughly When pulling a silicon point out keep the point straight Do not move the emitter point from side to side or the point may snap Be e Figure 11 Removal of Silicon Emitter Point Clean the area around the socket with a cleanroom compatible cloth and IPA solution before inserting new points 43 To insert new emitter points Gently insert and press the new emitter point into the socket until it is fully seated Do not push on the tip of the emitter point Chassis Cleaning Use a cleanroom compatible cloth moistened with 50 IPA and 50 de ionized water to wipe down the chassis Do not use any cleaners or solvents 4 3 Remote Control Maintenance Battery Life and Replacement The Remote Control 5570 uses two AA alkaline batteries Life is approximately 60 hours for full operation and approximately 500 hours while in sleep mode Figure 12 Replacing Batteries in the Remote Con
4. ion delivery must be periodically regulated or balanced This procedure is commonly referred to as balance adjustment or system calibration Simco lon recommends performing a balance adjustment as part of a regular maintenance program In general AeroBars should be balanced every six months to a year The actual frequency of balance adjustment depends on the specific activity of your application and environment In Pulsed DC mode positive and negative ions are released sequentially during ontimes During offtimes no ions are released and existing ions disperse In Steady state DC mode both positive and negative ions are constantly produced The goal of the adjustment procedure is to regulate the ion delivery so that equal numbers of positive and negative ions arrive at the work surface to neutralize static charges of either polarity in a specified amount of time Adjustment of the AeroBar lonziation System components may be performed during periodic checks of the entire system Tool Parameters that Affect lonization Balancing involves adjusting positive and negative ionization output levels and timing sequence of these outputs You can make adjustments to the AeroBar Model 5225S settings using the Remote Control In addition to the onizer settings be aware of the following variables that can affect balance Airflow The recommended airflow for effective ionization is 70 90 fpm Low airflow moves the ions more slowly allowing
5. or D KI change TP on off switch DN i 0 Olg Dt le 87 No ESC Return to main menu or wake up unit Figure 8 Handheld Remote Control Power An on off slide switch is featured on the right side of the remote control Upon powerup the remote control shows the following UsrMenu Ver 2 6 Passwords Most menu items of the Remote Control reguire a password in order to be changed The positive and negative output levels of an AeroBar can be changed without a password The password is Esc Down Up Select Select Select Select Battery Life and Replacement The Remote Control uses two AA alkaline batteries Life is approximately 60 hours for full operation and approximately 500 hours while in sleep mode If the battery voltage drops to 2V low battery will be indicated on the second line of the LCD display Turn the remote control off with the slide switch to conserve battery life Sleep Mode The Remote Control Model 5570 automatically goes into sleep mode if there is no button activity for 15 seconds Press the Esc key to awaken the remote control While in sleep mode the LCD displays Use ESC To Awake If the battery is low during sleep mode the bottom line is replaced with LowBatt Garbled Responses If you see ReTry or amp on the bottom line of the Remote Control the Remote Control may be too close to the AeroBar or is not lined up correctly Move farther away from the AeroBar and
6. potential ion recombination and reducing the ions available to neutralize surfaces High airflow moves the ions in a more direct path reducing the surface coverage area Configuration Configuration changes differing from the original spec such as adding a pre aligner or metrology tool may change the way the ions disperse Also metal objects closer than 6 inches to the AeroBar will ground ions reducing the amount of ions available to the surfaces 32 e Maintenance Contaminants in the environment are attracted to AeroBar emitter points Dirty emitter points have an adverse effect on ion output and voltage balance As a general rule emitter points should be cleaned every 3 months and AeroBars should be rebalanced every 6 months to a year e Environment Changes in cleanroom humidity and background airflow may affect performance e Location AeroBar settings are based on the performance at a designed in location Repositioning or changing the mounting distance from the FFU will affect performance results Performing the Adjustment 1 Choose a specification for the measurements Ifthe facility has an existing specification for voltage swings and decay times obtain these numbers and use them as a guideline If specs are not available or do not exist use the industry s typical setting 50 to 100V for semiconductor tools and mini environments and 100 to 150V for other fabrication in open areas e A desired balance and d
7. remote Emitter Points Emitter points are replaceable The number of points depends on the length of the bar Length of Bar in Inches No of Emitter Points 22 5 28 7 36 2 load port configuration 8 44 9 56 3 load port configuration 12 64 13 76 4 load port configuration 16 84 17 Indicators Positive and Negative lon Output Indicators These LEDs indicate high voltage HV ionization In pulsed DC mode the lights flash depending on which polarity has high voltage Lights are continuously on when in steady state DC mode Both of the positive and negative ion indicators and the alarm LED flash once simultaneously during communication Transmit and Receive LEDs These LEDs indicate communication with the Remote Control Alarm LED The red alarm LED flashes when the AeroBar is in alarm or standby mode also flashes once during communication with the Remote Control 1 2 Remote Control The Infrared Remote Control Model 5570 is used to communicate and set the power and timing parameters Unlike a typical consumer remote control the 5570 features a narrow infrared beam that prevents communication errors with nearby AeroBars For best results hold the remote control within 18 24 inches of an AeroBar s vertical centerline and aim directly at the receive LED of the AeroBar When the AeroBar receives transmission from the remote control it will flash all three LEDs for one second Each successive transmission is indicate
8. should be set to 50 75 Positive and negative alarm levels can also be changed individually without changing the output levels as long as the alarm levels are adjusted after the output levels have been set In addition note that changing the positive or negative output level will cause the corresponding alarm level to reset Adjusting Alarm Values It is important to set alarm values in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Access the user level menu by holding down any button while turning on the remote control A password prompt will appear 2 Enter in the following password Esc Down Up Select Select Select Select 3 Use the Up or Down button to reach the PosAlrm or NegAlrm item Press Select 4 Point the Remote Control model 5570 directly at the center AeroBar LED and use the Up or Down button to change the alarm level Testing the Alarm 1 Hold down any button while turning on the remote Once the remote comes on enter the following password Esc Down Up Select Select Select Select 2 Use the Down button to reach the PosFdbk or NegFdbk menu item Note the value s for use in Step 4 below 29 3 4 Continue pressing the down button until you reach the PosAlrm or NegAlrm menu item Press Select Use the Up button to change the alarm level so that it is above the corresponding Pos or Neg FeedBack leve
9. target the infrared source at the center red LED Remote Control Menu The following table lists the parameters in both menus of the Remote Control The TFSMenu is a password protected menu Use the UP or DOWN buttons to scroll through these parameters 22 TFSMenu User Menu Hold down any button while turning the remote control on Password and then Esc Down Up Select Select Select Select None Status Status PosFdbk PosOut NegFdbk NegOut Address OpMode PosOn PosOff PosOut Pos Alarm NegOn NegOff NegOut NegAlarm Viewable paramters Eprom This item is not applicable with the Model 5225S AeroBar but appears in the list of parameters in the Remote Control 23 Descriptions of each parameter are below Status PosFdbk NegFdbk Address OpMode PosOn PosOff NegOn NegOff PosOut NegOut PosAlrm NegAlrm Eprom Indicates the reported status of an AeroBar as follows Ok if the AeroBar is operating normally Standby if the AeroBar is in standby PosAlrm if the positive emitter is in alarm NegAlrm if the negative emitter is in alarm Pos amp Neg if both positive and negative emitters are in alarm Retry if the AeroBar did not reply to a communication query amp S if the reply from the AeroBar is not valid The current feedback of the positive or negative emitter given in percent Range is 0 to 100 Not applicable with the Model 5225S AeroBar The Remote Contr
10. Mode 1 Increase voltage outputs in 1 increments maintaining balance until swings reach 100 150V Do not exceed 90 output If decay times are still too long proceed to the next step 2 Increase and ontimes in 0 1 second increments maintaining balance until decay time improves or voltage swings become too high Maintain last beneficial setting 3 Increase and offtimes in 0 1 second increments maintaining balance until performance stops improving Maintain last beneficial setting 1 Increase voltage outputs in 0 1 increments maintaining balance until output reaches 90 2 If decay time is still too long switch to Pulsed DC mode and balance 37 19 5225S M 01 Rev 2 38 Maintenance 4 1 Maintenance Power Down 4 2 AeroBar Maintenance 4 3 Remote Control Maintenance 4 4 System Adjustment 8 Calibration Caution To avoid personal injury or damage to the equipment do not perform any maintenance other than that contained in these instructions There are no user serviceable parts inside the AeroBar 39 4 1 Maintenance Power Down Before performing any maintenance the AeroBar must be powered down Warning Never power down by removing the power cable from the AeroBar as this can result in damage to the ionizer To power down the AeroBar put the AeroBar in standby mode turn off the power source or disconnect the cable from the power source end Standby mode is a conve
11. SIMCO An ITW Company Digital AeroBare lonization System Model 5225S User s Manual SNOILN TOS NOILVZINOI About Simco lon Simco lon develops manufactures and markets system solutions to manage electrostatic charge As the world s largest provider of electrostatics management products and services Simco lon improves its customers business results by providing a total solution to their electrostatic discharge and electromagnetic interference challenges Simco lon is a division of Illinois Tool Works ITW with its Technology Group located in Alameda California For more information about Simco lon visit www simco ion com or call 800 367 2452 Simco lon is ISO 9001 and ANSI ESD S20 20 certified O 2012 Simco lon H NAN NN Important Safety Information Failure to follow these important safety cautions could result in damage to Digital AeroBar System components and voiding of your system warranty Use proper input voltage to avoid damaging the unit Verify that the AeroBar is not powered before connecting or removing cables Failure to do so may result in damage to the equipment Never power down an AeroBar by removing the cables as this can result in damage to the ionizer Do not clean emitter points while unit is powered Doing so may result in additional contamination and possible shock To avoid personal injury or damage to the equipment perform only the installation and maintenance procedures contain
12. alled at the tee sites and wired together using 18 22 AWG cable The RJ 11 connectors from the AeroBar cables can then be plugged into the junction boxes Note In either the daisy chain or the Drop T configuration the alarm outputs of all the ionizers will be logically OR together A bracket or hanging device may need to be constructed depending on your application Wire management clips are available to secure an AeroBar the cables to the topside of the AeroBars where necessary to a custom bracket Operation 3 1 About AeroBar Adjustments 3 2 Using the Remote Control 3 3 lonization Mode OpMode 3 4 Output Voltages 3 5 On and Off times Pulsed DC Mode Only 3 6 FMS Alarm Values 3 7 Balance Adjustment and System Calibration 3 1 About AeroBar Adjustments The following adjustments are available to operate and fine tune ionization performance in a new installation Set the AeroBar ionization mode for each zone of operation Set positive and negative output voltages Set positive and negative ontimes and offtimes pulsed DC mode only Set FMS alarm values Place lonizers in Standby Mode Operating Environment Do not operate any component of the AeroBar lonization System in corrosive or explosive environments Operate the units in 60 95 F 16 35 C temperature 40 65 relative humidity non condensing 20 3 2 Using the Remote Control UP Scroll or change SELECT 2 Select menu ed item DOWN Scroll
13. ct wire or through a junction box alarm wire Connection to the Desktop Transformer Wiring to the 100 115 230 VAC switchable desktop transformer Simco lon p n 14 1535 requires an interconnect cable with an RJ 11 4 wire connector at the AeroBar end and an RJ 22 4 wire connector at the transformer end Pre made interconnect cables with these connectors are available from Simco lon p n 33 1725 10 19 5225S M 01 Rev 2 16 2 3 FMS Connection The AeroBar provides an FMS facility monitoring system output signal The alarm is a non isolated open collector that will pull the alarm pin to ground upon an alarm condition See Figure 4 for the wire information If connecting to the DIN Rail mount transformer the FMS signal must be wired to your FMS system either by direct wire or through the junction box alarm wire E ve RE amp gt a e r a P Power Cable Interconnect Desktop Transformer Figure 7 FMS Module Connection 2 4 Daisy chaining Where AeroBars are used together in the same tool or in close proximity it may be desirable to daisy chain the AeroBars to the same power source Up to 10 AeroBars can be daisy chained together using standard interconnect cables in between the AeroBars Plug the connectors into the ends of each AeroBar and connect the last cable to the power source If it is more convenient to wire the AeroBars in a drop tee configuration junction boxes may inst
14. d with a one second flash after the last received transmission There are four buttons on the Remote Control 5570 Up Down Select and Esc e The Up and Down buttons are used to scroll through menu items e The Select button selects an item to be changed The Esc button wakes the remote control from sleep mode or exits from the activity of a parameter being changed UP Scroll or change ZI SELECT y _ Select menu e AE item DOWN E Scroll or e change d on off switch S Wale a e de Moj J ESC Return to main menu or wake up unit Figure 2 Remote Control Buttons Passwords The Remote Control features two levels of access a User Menu level and a Technical Field Service TFS menu e The User Menu level allows you to view current AeroBar settings change the operation mode change the positive and negative output levels and set the on times and off times e The TFS Menu is password protected and all basic and advanced parameters can be changed Both the User Menu and TFS Menu feature two lines of information The first line displays the item ofthe menu The second line displays the current adjustment level or operation mode for that item An on off slide switch is featured on the right side of the remote control Upon powerup the 5570 remote control shows the following UsrMenu Ver 2 6 Most menu items of the Remote Control require a password in order to be changed The pos
15. ecay time will depend on the sen sitivity of the product to electrostatic related problems Choose values that meet the static charge protection needs of your environment for example the appropriate voltage swings range decreases for products more sensi tive to electrostatic related problems and increases for less sensitive products If possible set the AeroBar mode outputs and timing to any pre determined settings for your process tool If no settings are available use the following parameters for an optimization starting point 50 Positive and Negative Power 1 0 sec On times 0 2 sec off times 2 Set the CPM in an appropriate location for obtaining measurements Remove the charge plate from the monitor refer to the charge plate monitor manual for instructions on removing the plate Simco lon part number 19 0280A M For the AeroBar Model 5225 ideal locations include 33 Centralized in the mini environment chamber Next to a FOUP port Onapre aligner e Ona metrology module Ona buffer stations After placing the CPM in its location step away Standing too close to the CPM may interfere with airflow and ion movement Make sure all access doors are closed Record the Airflow Use an anemometer to measure the airflow at the height of the CPM plate Record the air flow along with the CPM measurements obtained at each sample location Too high or low of an airflow rate will affect the true balance behavior of the i
16. ed The Model 5225S operates as a standalone system with internally maintained settings Setup and adjustment are performed with the infrared Handheld Remote The AeroBar Model 5225S is available in five standard lengths 22 inches 558 mm 711 mm 1118 mm 1626 mm 2134 mm e 28 inches 44 inches 64 inches e 84 inches Three lengths are also available with optimized placement of emitter points over the FOUP openings for use in 300 mm EFEMs 36 inches 907 mm 56 inches 1412 mm 76 inches 1918 mm AeroBar Controls and Connectors May Mac LS Figure 1 AeroBar Model 52255 Bar is longer than shown The number of emitter points will vary per bar 1 Modular Port A modular port on one end ofthe bar allows a RJ 11 connection to the 24 VAC power supply for the bar 2 Emitter Points Emitters points are replaceable The number of points depend on the length ofthe bar 3 Positive and Negative lon Output Indicators LEDs indicate high voltage HV ionization In Pulsed DC mode lights flash depending on which polarity has HV Lights are continuously on when in Steady State mode Both positive and negative ion indi cators and the Alarm LED flash once simultaneously during communication 4 Transmit and Receive LEDs LEDs communicate with an optional IR remote control 5 Alarm LED LED flashes when the AeroBar is in alarm or standby mode also flashes once during communication with the IR
17. ed or StdySDC Press Esc to exit 26 3 4 Output Voltages About Output Voltages The recommended typical output range is 50 80 For bars operating in Pulsed DC mode adjust the positive and negative output voltages so that the maximum swing values are within 20V of each other averaging a value as close to zero as possible The swings should not exceed 150V in either direction For bars operating in Steady state DC mode adjust the positive and negative output voltages so that the combined value of the positive and negative settings are as close to zero as possible and lt 20V For Pulsed DC Mode For Steady state DC Mode Maximum swing values are within 20V of The combined value of the positive and negative each other averaging a value as close to settings are as close to zero as possible and zero as possible less than 20V Note If you modify a positive or negative output setting then that AeroBar will automatically modify its positive or negative alarm to be approximately 1 4 25 of the new output setting These additional changes are not marked as pending since you did not make them yourself Setting Output Voltages It is important to set output voltages in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Use the Up or Down button to reach the PosOut or NegOut item Press Select 2 Use the Up or Down button to adjust the o
18. ed in this manual Contents AMIDES ENID ON laos 1 1 1 OVEIMIGW atika tan Tetin avons ta UST 2 1 2 Remote Control 5 1 3 Power Requirement ENEE 7 REE AA A 9 ZA MOLINA A a MO eda erer 11 Zed WINING RE ERE ERA TRO AD MAVER TRE RE 13 2 3 FMS CONNEGUON sss meri lada else 17 2 4 Daisy Chaining A A 17 3 Op ration tee lilla 19 3 1AboutAeroBarAdjustmenis m e e ene 20 3 2 Using the Remote Control ktm 21 3 3 lonization Mode OpMode emel near sinama tod 25 3 4 Qutput Voltages id 27 3 5 On and Off times Pulsed DC Mode Only 28 3 6 FMS Alarm Values non nrr RER nr ron norris 29 3 7 Balance Adjustment and System Calibration 31 4 Maintenance iaa 39 4 1 Maintenance Power Down 40 42AeroBarMaintenance 41 4 3 Remote Control Maintenance esssrriiirrnn 45 4 4 System Adjustment A Calibration SEENEN 46 5 Specification E 48 5 1 AeroBar Model 92255 49 5 2 Parts ee TEE 53 5 3 Dimensional Drawings E 53 6 Warranty 8 Service 00 arena 56 Description 1 1 Overview 1 2 Remote Control 1 3 Power Requirements 1 1 Overview The Digital AeroBar Model 5225S is specifically designed for use in a variety of applications ranging from inside tools to work stations and cleanroom areas where digital performance with easy integration is desir
19. een subjected to misuse neglect lack of routine maintenance repair alteration or accident In no event is Simco lon be liable for collateral or consequential damages Consumable items such as but not exclusive to emitter points emitter wires batteries filters fuses or light bulbs are only covered under this warranty if found defective as received with the new product To obtain service under this warranty please contact Simco lon Technical Support at techsupport simco ion com or 510 217 0470 56 19 5225S M 01 Rev 2 57 Notes Notes M SIMCO An ITW Company Technology Group 1750 North Loop Rd Ste 100 Alameda CA USA 94502 ISO 9001 Tel 510 217 0600 Fax 510 217 0484 CERTIFIED Toll free 800 367 2452 Sales services 510 217 0460 Tech support 510 217 0470 ioninfo simco ion com salesservices simco ion com techsupport simco ion com service simco ion com www simco ion com
20. hoice unless large metal objects such as a pre aligner or measurement tool are within 12 inches 30 cm of the AeroBar Steady state DC mode is recommended when the distance between the wafer and AeroBar is 8 2 inches 20 30 cm or when large metal objects are within 12 inches 30 cm of the AeroBar Steady state mode may be necessary for most semiconductor tool applications with tight performance specifications or when low swing voltages are required for sensitive devices i e lt 100V swings Use Pulsed DC Mode Use Steady state DC Mode Distances 8 2 inches 20 30 cm between AeroBar EE and wafer and for sensitive devices less than between AeroBar and wafer 100V swings No large metal objects are within 12 Large metal objects are within 12 inches 30 cm of inches 30 cm of AeroBar the AeroBar About Standby Mode Standby mode is a convenient way to turn off high voltage to the ionizer without removing wires or accessing the Interface Module Standby mode is useful for maintenance periods where settings must be remembered 1 Hold down any button while turning on the remote control A password prompt will appear 25 2 Enter in the following password Esc Down Up Select Select Select Select 3 Use the Up or Down button to reach the OpMode item Press Select 4 Point the remote control directly at the LEDs on the AeroBar and use the Up or Down button to select the operation mode Standby Puls
21. itive and negative output levels of an AeroBar can be changed without a password The password is Esc Down Up Select Select Select Select Sleep Mode The Remote Control Model 5570 automatically goes into sleep mode if there is no button activity for 15 seconds Press the Esc key to awaken the remote control While in sleep mode the LCD displays Use ESC To Awake If the battery is low during sleep mode the bottom line is replaced with LowBatt 1 3 Power Requirements The AeroBar can be powered from any 24 VAC source using one of the following options e Hard wire to a DIN rail mount transformer p n 14 21730 Connect to DIN rail mount transformer through a junction box using an RJ 11 to RJ 11 interconnect cable p n 33 1700 xx Connect to a 100 115 230 VAC switchable desktop transformer p n 14 1535 19 5225S M 01 Rev 2 Installation 2 1 Mounting 2 2 Wiring 2 3 FMS Connection 2 4 Daisy chaining Important Safety Information Failure to follow these important safety cautions could result in damage to Digital AeroBar System components and voiding of your system warranty Before installing or operating any components carefully read the following safety information After removing power from the AeroBar s allow a minute for the high voltage power supplies to discharge M Use proper input voltage to avoid damaging the unit 2 1 Mounting General Guidelines Installation methods will vary a
22. l Change the alarm levels one at a time 30 3 7 Balance Adjustment and System Calibration Simco lon balance adjustment and calibration procedure is a regular part of installation and maintenance of the AeroBar and its components Adjustment for the AeroBar may be performed at initial installation during periodic checks of the entire system or anytime additional components are added to the system This section consists of the following information e About Adjustment and Calibration Tool parameters that Affect lonization Performing the Adjustment Understanding lonization Modes Voltage Swing and Output and Decay Timing e Troubleshooting Goals of Balance Adjustment and System Calibration Balanced high ion density arriving to the surfaces and wafers e Similar positive and negative decay times Maximum decay in the amount of available time e Moderate voltage swings Pulsed DC or voltage offset Steady state DC to eliminate the possibility of inducing voltage on the surfaces Recommended Equipment Charge Plate Monitor Model 280A Tripod optional e Anemometer About Adjustment and Calibration Environment variables and the physical properties of ions can lead to degraded ionization performance over time This leads to a greater risk of static or the presence of voltage on your sensitive product surface 31 In order to ensure optimal ionization performance and therefore static charge neutralization
23. lowering AeroBar clear 8 93 1422 Polycarbonate Rod and Flat Clip Assembly for lowering AeroBar clear 12 Replacement Emitter Points and Cleaner 22 0365 1 Ultraclean Sleeved Silicon Emitter Points box of 1 22 0365 10 Ultraclean Sleeved Silicon Emitter Points box of 10 22 0365 15 Ultraclean Sleeved Silicon Emitter Points box of 15 22 0365 20 Ultraclean Sleeved Silicon Emitter Points box of 20 22 0365 25 Ultraclean Sleeved Silicon Emitter Points box of 25 22 0365 30 Ultraclean Sleeved Silicon Emitter Points box of 30 22 1000 Emitter Point Cleaner Box of 50 52 5 3 Dimensional Drawings Standard Lengths Va 1IVL30 33S UHVOB TOYLNO9 gt SINIOd YILLIN3 age BIR TOPON Bess IE A TGA ST IV MEC ri RAT E ONT i ei AL NOLLO3S SSOYI HVGOHIV n sm 0S 53 300 mm EFEM Application Lengths Model 52255 76 ss ETA Model 5225S 56 o 22 o m i n n A N n Ko 4 E MM cenci ME 19 5225S M 01 Rev 2 55 Warranty 8 Service Simco lon provides a limited warranty for the AeroBar Model 5225S and Remote Control Model 5570 New products manufactured or sold by Simco lon are guaranteed to be free from defects in material or workmanship for a period of two 2 years from date of initial shipment Simco lon liability under its new product warranty is limited to servicing evaluating repairing or replacing any unit returned to Simco lon that has not b
24. mm 84 4 bar 2 1H x 1 2W x 84L in 53H x 30 5W x 214 4L mm 3 lengths for 300 mm EFEM applications available 39 7 bar 2 1H x 1 2W x 35 7L in 53H x 30 5W x 90 7L mm 55 6 bar 2 1H x 1 2W x 55 6L in 53H x 30 5W x 141 2L mm 75 5 bar 2 1H x 1 2W x 75 5L in 53H x 30 5W x 191 8L mm 1 5 Ib 1 0 kg 22 bar approx 6 oz oer additional foot 0 17 kg per additional 30 cm 2 year limited warranty CE SEM F47 RoHS Compliant Handheld Remote Model 5570 Dimensions Weight Material Cleanroom Class Indicators Controls Input output Signals Operating Distance Power Life Certifications 4 75H x 2 75W x 88L inches 12 07 x 6 99 x 2 22 cm 1 Ib 0 46 kg ABS high impact plastic minimum particle traps Class 1 or better 2 line 8 character display 4 keys Up Down Esc Select IRDA compatible 2 way InfraRed communication Infrared range operates at a min of 2 ft and max of 10 ft 22 degree cone of operation from the transmitter Two 1 5V batteries Battery life approx 60 hrs in full operation 500 hrs in sleep mode CE 50 5 2 Parts 8 Accessories AeroBars 91 5225SU 22R 91 5225SU 28R 91 5225SU 44R 91 5225SU 64R 91 5225SU 84R 91 5225SU 36R 91 5225SU 56R 91 5225SU 76R 22 AeroBar with Ultraclean Silicon Emitter Points 5 28 AeroBar with Ultraclean Silicon Emitter Points 7 5 7 44 AeroBar with Ultraclean Silicon Emitter Points 9 64
25. nient way to turn off high voltage to the ionizer without removing wires Standby mode is useful for maintenance periods where settings must be remembered 1 Hold down any button while turning on the remote control A password prompt will appear 2 Enter in the following password Esc Down Up Select Select Select Select 3 Use the Up or Down button to reach the OpMode item Press Select 4 Point the remote control directly at the LEDs on the AeroBar and use the Up or Down button to select the operation mode Standby Pulsed or StdySDC Press Esc to exit 40 4 2 AeroBar Maintenance Primary maintenance for the AeroBar consists of periodic emitter point cleaning and replacement system calibration and exterior cleaning of the chassis As maintenance schedules will vary depending on conditions develop a schedule which meets the requirements for your application In general equipment should be checked on a monthly basis to ensure it is operating as originally set Emitter point cleaning is recommended every three to six months and replacement every 24 to 36 months or when damage or erosion is evident Calibration may be performed quarterly semiannually or annually depending on your application Always clean the emitter points prior to calibration Cleaning emitter points after calibration will alter the calibrated settings Where AeroBars are used in environments containing airborne molecular contaminates AMC emi
26. nnection to the DIN Rail Mount Transformer The interconnect cable can be connected to the DIN Rail mount transformer Simco lon p n 14 21730 using either a bare wire 13 termination or an interconnect cable with an RJ 11 connector to a Junction Box p n 33 1825 wired to the transformer An RJ 11 connector is used at the AeroBar Direct Wire To wire directly to the transformer use the wiring diagram shown in the figure below Connect the 24 VAC and 24 VAC return wires and cut the unused 3 wire The Alarm line will be wired to an FMS connection if used 24 VAC Return green 24 VAC white yellow Alarm black Figure 4 Wiring Interconnect Cable or J box Directly to the Transformer J box Wiring To use the RJ 11 connector wire the junction box to the transformer according to Figure 4 and physically attach it to the side of the transformer or in close proximity to the transformer See Figure 7 for suggested mounting 19 5225S M 01 Rev 2 14 MODULAR JACK OUTPUT po 10 IONIZERS MAXIMUM BLUE NC WHITE NC NC NC BLACK YELLOW RED GREEN e TRUNK LINE Figure 5 J box Wiring Contact Simco lon for specific information on wiring the j box techsupport ion com or 510 217 0470 Figure 6 J box Mounting Suggestion When using the FMS output connection with the DIN rail mount transformer the FMS signal must be wired to the your FMS system either by dire
27. ol is used with several models of Simco lon Digital AeroBars Indicates the operating mode of the AeroBar as follows Standby if the AeroBar is in standby AeroBar is powered but ionization is turned off StdySDC if the AeroBar is continuously generating both positive and negative ionization Pulse if the AeroBar is alternately generating the positive or negative ionization with an optional off period between polarities Indicates the internal timing for the on time of the positive emitter with a range of 0 5 to 9 9 seconds or internal timing for the off time of the positive emitter with a range of 0 0 to 9 9 seconds Indicates the on time of the negative emitter with a range of 0 5 to 9 9 seconds or the off time of the negative emitter with a range of 0 0 to 9 9 seconds Indicates the output of the positive and negative emitters with ranges of 0 to 100 Indicates the alarm setpoint with a range of 0 to 100 For the AeroBar Model 5225 this refers to the FMS alarm Identifies the software release version of the AeroBar 24 3 3 lonization Mode OpMode About lonization Modes The AeroBar allows two different methods of onization Both are appropriate for different situations Pulsed DC mode is recommended for process tool environments where the distance from the fan filter unit to the target exceeds 24 inches or where fast discharge is necessary Pulsed DC provides fast decay times and is a good c
28. ons The recommended airflow for optimal ionization is 70 90 fpm Take the measurements on the CPM The measurements taken on the CPM will record the following specifics e Positive and negative peak voltages Balance an average of the positive and negative voltage peaks e Positive and negative decay time a Allow the CPM to warm up for at least 15 minutes b From the Main screen on the Model 280A CPM Press Auto The Auto test performs both Decay tests followed by a balance test O Make sure the symbol D gt is next to the test you want usually the Factory test which runs an auto test with standardized test parameters Press Start c Note the numbers for Vp positive voltage peak Vp negative voltage peak and Vave average or balance Examine the Data and Adjust the AeroBars If the measure ments have been taken for an operation area do not meet your specifications use the Remote Control to adjust the AeroBar settings Understanding lonization Modes Voltage Swing and Output and Decay Timing lonization Modes Ensure that the AeroBar is operating within the appropriate ionization mode Pulsed DC or steady state DC Pulsed DC mode is recommended for tool environments where the AeroBar to target exceeds 24 inches Pulsed DC provides fast decay times and should not be used if large metal objects such as a pre aligner or measurement tool are within 12 inches 30 cm of the AeroBar Steady sta
29. r Active Low Alarm 40 VDC max 200 mA max RJ 11 modular jack receptacle Output and balance stability is achieved by independently regulating the ion emission current of each polarity at each ionizer Precise timing 0 10 sec 0 1 sec resolution LEDs on each Bar indicate the polarity of ion emission Bipolar pulsed DC steady state DC or standby Alarm activates when the bar is no longer able to maintain preset ion output levels Alarm is displayed visually via red LED in middle of the chassis Settable threshold alarm limits for predictive maintenance Single crystal silicon replaceable Annual semi annual or quarterly depending on process sensitivity and presence of AMCs in the environment lt 0 005 ppm 24 hour accumulation Temperature 60 95 F 16 35 C humidity 40 65 RH non condensing Below background level Better than ISO Class 1 2 red POS NEG ION OUTPUT 1 middle red ALARM STANDBY all 3 blink at once when communication occurs 2 transmit receive indicate communication with an optional IR remote control IR Handheld Remote Model 5570 required Din rail mount transofrmer 230 VAC 24 VAC p n 14 21730 Fire retardant ABS plastic 49 Dimensions Weight Warranty Certifications 22 4 bar 2 1H x 1 2W x 22L in 5 3H x 3 05W x 56 9L mm 28 4 bar 2 1H x 1 2W x 28L in 5 3H x 3 05W x 72 1L mm 44 4 bar 2 1H x 1 2W x 44L in 53H x 30 5W x 112 8L mm 64 4 bar 2 1H x 1 2W x 64L in 53H x 30 5W x 163 6L
30. s all process equipment has different requirements Use the following general guidelines Install AeroBars away from all moving components in the tool or environment Place AeroBars directly in the airflow from HEPA filters for effective ionization discharge Make sure that there are no obstructions in the airflow between the AeroBar and the surfaces to be neutralized Ensure there is unobstructed airflow over emitter points Keep emitter points at least 4 inches 100 mm from grounded surfaces including tool frames skins and other modules Keep the AeroBars within a 12 36 300 900 mm working distance from the wafers Keep in mind the following considerations when determining locations for the units Tool and mini environment requirements restrictions Line of sight to infrared LED on the bar Applicable SEMI standards Applicable National Electrical Code standards The least amount of distance for cables from the Interface Module to AeroBars Clips Various mounting clips are available from Simco lon In general Hold the bar to the grid or other structure and mark the locations where the mounting clips will attach Attach the clips to the AeroBar and mount them at the marked locations Check to make sure all clips are secure and that the AeroBar is held firmly in position 11 Flat metal clip p n 28 6255 Two required for 44 bars three for 64 76 and 84 bars A polycarobante rod and clip assembly is al
31. so available 93 1420 4 93 1421 8 93 1422 12 Mid clip for hang mount p n 28 6240 Use alone or in conjunction with end clips for bars over 44 in length N May be used with end clip 28 6235 Grid clip for perforated panels p n 28 6257 5 Use for bars 44 or shorter C 2 Requires two pine tree fasteners 28 0505 J Eggcrate mid clips p n 28 6230 Use alone or in conjunction with end clips for gt bars over 44 in length k Requires eggcrate endclip 28 6225 with two pine tree fasteners 28 0505 Mounting Clip Recommendations Bar Length Number of Clips 22 44 inches 11 8 71 1 cm 2 56 84 inches 162 6 213 4 cm 3 2 2 Wiring The AeroBar may be hard wired directly to 24 VAC line voltage or to a 24 VAC transformer Two 24 VAC transformer options are available from Simco lon e 230 240 VAC DIN Rail Mount transformer p n 14 21730 e 100 115 230 VAC switchable desktop transformer p n 14 1535 Connection to Power The AeroBar can be directly wired to a 24 VAC source using wire terminations MAXIMUM INPUT 1 24VAC yellow TT 2 24VAC Return green 3 No Contact Unused red 4 Alarm black Left to Right RJ 11 Modular Plug Locking Tab on Farside U Flat Modular Cable 4 Conductor 26 AWG 1 24VAC yellow lt 4 Alarm black 2 24VAC Return green 3 No Contact Unused red Ground Figure 3 Interconnect Cable Information Co
32. te DC mode is recommended for most semiconductor tool applications with tight performance specifications or when the distance between the wafer and AeroBar is 8 12 inches 20 30 cm or when large metal objects are within 12 inches 30 cm of the AeroBar Voltage Swing and Output Voltage swing refers to the range of the CPM plate voltage between the positive and negative peak readings at sample locations The recommended typical voltage output range is 50 80 e For Pulsed DC mode adjust the positive and negative output voltages so that the maximum swing values are within 20V of each other averaging a value as close to zero as possible The swings should not exceed 150V in either direction Keep the voltage swings below 100V if it is possible to meet the desired decay time at this output level e For steady state DC mode adjust the positive and negative output voltages so that the combined value of the positive and negative settings are as close to zero as possible and lt 20V Decay Timing Decay timing is a measure of the time in seconds that it takes to decay a charge of 1000V to 100V and 1000V to 100V The conductive plate is charged to the initial test voltage of 1000V and is allowed to discharge to 10 of the initial test voltage The time required for both polarities will be recorded 35 In Pulsed DC mode if decay times are too slow and voltage swings are greater than 100V increase the positive and negative offtimes
33. trol If the battery voltage drops to 2V LowBatt will be indicated on the second line of the LCD display Turn the remote control off with the slide switch to conserve battery life Sleep Mode The Remote Control automatically goes into sleep mode if there is no button activity for 15 seconds Press the Esc key to awaken the remote control While in sleep mode the LCD displays Use ESC To Awake If the battery is low during sleep mode the bottom line is replaced with LowBatt 45 4 4 System Adjustment amp Calibration Adjustment and calibration should be performed as a regular part of installation and maintenance activity Refer to Chapter 3 Operation for instructions on adjusting and calibrating the system 46 19 5225S M 01 Rev 2 47 Specifications 5 1 AeroBar Model 5225S 5 2 Parts 8 Accessories 5 3 Dimensional Drawings 48 5 1 AeroBar Model 5225S AeroBar Model 5225S Input Voltage Input Current Output Voltage Output Current Control Signals Connectors Regulation Timing Operating Modes Alarm Emitter Points Maintenance Ozone Operating Env EMI Cleanliness LED Indicators Components Optional Enclosure 24 VAC 50 60 Hz 1W typ Approximately 40 mA per AeroBar 1W typ 0 20 kVDC 10 for each polarity on an individual AeroBar pos neg output levels can be adjusted separately in 0 1 output power resolution lt 15 JA current and voltage limited Open Collecto
34. tter points should be cleaned every one to three months or wherever significant amounts of debris have accumulated on emitter tips Clean new silicon tip Eroded and dirty silicon tip Figure 9 Clean and Dirty Silicon Tips 41 Emitter Point Inspection Emitter point maintenance ensures continued optimum performance Dirty or eroded points may cause system failure and diminished ionization output Dirt or erosion on emitter points can be cause by a number of environmental factors including the presence of airborne molecular contaminants AMCs It is important to create an inspection schedule for emitter points Schedules will vary depending on your environment Inspect emitter points for white fuzz or buildup on the tips or tips that are blackened or broken Clean any buildup following the procedures described below Emitter Point Cleaning Recommended Cleaning Materials e Cleanroom compatible cloth swabs polyester cloth is recommended with a solution of 50 IPA electronic grade isopropyl alcohol 50 de ionized water Simco lon Emitter Point Cleaner Simco lon part number 22 1000 Caution Do not clean emitter points while the unit is powered Doing so may result in additional contamination and possible shock After powering down the AeroBar allow a minute for the high voltage power supplies to discharge 42 To clean the emitter points and areas around the emitter points moisten a cleanroom compatible
35. utput level accord ingly 3 Press Esc to exit from the change action The output level has been set 27 3 5 On and Off times Pulsed DC Mode Only About On and Off times If the decay time is too slow and the voltage swings are less than 100V increase both the positive and negative ontimes in 0 1 second increments checking the positive and negative decay times between each adjustment When changes no longer positively improve performance set the ontime and offtime at the last beneficial setting Adjusting On and Off times It is important to set positive and negative on or offtimes in coordination with environmental readings you get during a balance adjustment See the Balance Adjustment section in this chapter 1 Access the TFS Menu by holding down any button while turning on the remote control A password prompt will appear Enter the following password Esc Down Up Select Select Select Select Use the Up or Down button to reach the desired PosOn PosOff NegOn or NegOff item Press Select Use the Up or Down button to change the timing parameter Press Esc to exit from the change action 28 3 6 FMS Alarm Values About FMS Alarm Values Normally alarm levels are automatically adjusted when the output levels are set The default alarm percentage value is 25 which means the alarm levels are automatically adjusted to 25 of the output level For proper maintenance and performance alarm percentage
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