Xi - 100 Manual
Contents
1. H b 4 Click on the image that you want to work with From here right click on an individual image and the following pop up menu appears a Cut Ctrl Copy Ctrl C Ea Paste A 2 Delete Select Cut to remove the image from the directory and paste it in another location Select Copy to make a copy of the image for pasting into another directory Select Delete to remove the image from the disk permanently 28 Ambios Technology Open Xi 100 File Management The Open command reads a selected image file and displays it in a New Image window Selecting this option first displays a standard Windows dialog box Move to the desired directory then double click on the appropriate file and display it in a new Image window Open Look in amp Release e Ex E Files of type Image Files bi bmp Cancel you to replace an image with an updated version of itself Save As Close Select this command to close the image and return to the ImageStudio Main screen Save Select this command to save the active image to file If the image already has a name it will be overwritten when you use this command This allows Select this command to save the image with a new name or to a new directory Selecting this option displays a standard Windows dialog box 5 ave As a Necczd C Hours E Manuals Darrell Misc E Deskscan El My DOCUMENTS E Drivers Hectools 7 Paprport Program Files SERWI2. Highlights edges all directions and either positive or negative brightness slopes This filter uses differ ent matrices kernels as shown below Three Four High Pass Accentuates the high frequency details of an image This filter uses different matrices ker nels as shown below The sum of each kernel is 1 The larger center coefficient greatly multiplies the new pixel value while the smaller surrounding coefficients reduce the effect of the large center coeffi cient The net effect is to intensify areas with large changes in pixel intensity without affecting areas with constant pixel intensity Strong Medium Weak Plane Subtract Displays a pull down menu with three selections for removing the tilt of the image to the best fit plane e Least Squares Plane Subtract Automatically finds the least squares plane fit to the entire image and subtracts it e 3 Point Plane Subtract Defines a flat plane for image background removal based on three user selected points in the image Click once to initiate selection of 3 points and a second time to subtract plane e Smooth Plane Subtract Subtracts a smoothed background from the original image This is similar to a high pass filter the higher number of averages leaves more high frequency detail 42 Ambios Technology Xi 100 Image Display and Analysis Flatten e Line by Line Levels the image front to back by removing discontinuities between adjacent lines e Exclude Region E
3. Stage Tilt Knob an side to side Sen E gt ey XK Adjustment Knob Smooth Mode In Smooth Mode Xi 100 measures objects that have a total topography within the vertical range of approximately three microns with no steps greater than 100 nanometers nm Examples of objects with smooth surfaces silicon wafers lenses etc Note Before acquiring an image of your sample we recommend that you use the mirror sample in the enclosed accessory kit and follow the procedure below to get a benchmark image of a smooth sample Then repeat the procedure using your own sample Ambios Technology 21 Xi 100 Non Contact Optical Profilometer 1 Check that the magnification in the drop down list box on the Capture window matches that of the objective you are using If necessary change the magnification in the list box Auto Light Reset Light Pixels Magnification 10 0 o v 1 Illumination xY Size um Stat 480 x 480 y 504x504 a C Texture 2 Averaging 2 Mount the sample and use the X and Y adjustment knobs to position the area of interest midway under the green dot of light on the stage 3 Adjust the illumination slider control to approximately 50 or until the background on the screen approach es light gray 4 Set Pixels listbox to Knife Edge The Knife Edge feature provides a dark band at the far right of the screen Observe this band to help you focus the image When the band is clear dark gr
4. Startup 19 Statistics 34 50 Status bar 35 step height measurement 45 Step height measurement 45 Style field 37 Subtraction 43 Temperature fluctuations 10 temperature issues 10 Texture mode 1 5 24 Texture mode procedure 24 Tile horizontally 49 Tile vertically 49 Toolbars tab 46 Tools menu 43 53 Top radio button 37 Troubleshooting 57 Undo 32 Units 50 vibration 9 Vibration 9 Vibration isolation 9 View menu 35 52 Viewing image files 35 White light measurement 5 Window menu 49 53 Windows Operating Environment 6 Workbook mode 35 Workspace 30 Xi 100 Security Key 13 Xi 100 Security Key Installation 13 Z scale field 37 Zoom in 49 Zoom out 49 Ambios Technology 59 Xi 100 Non Contact Optical Profilometer 60 Ambios Technology
5. This section provides information on viewing analyzing and modifying acquired images Viewing Image Files Viewing Menu ImageStudio offers various ways in which you can view images 3D Display Select this command to view an interactive light shaded 3 dimensional version of the active image Histogram Select this command to view a graph that describes how many of the pixels points in an image have a particular height or value of Z You can click on the image once or twice to display a set s of measuring bars with which to measure different data Refer to the section Histogram for more information Scale Bar Select this command to display scales on the x and y axes with units and unit values listed Show All Controls Select this command to display the Capture screen Reset Control Bars Select this command to return to the default control settings set at the factory Status Bar Select this command to display or remove the Status bar A checkmark in the Status bar box under the View menu indicates that the Status bar is enabled Workbook Mode Select this command to enable the workbook format which provides tabs at the bottom of the screen for quick access to multiple images cross sections histograms etc There are four potential tabs for each image and each tab type is color coded Ambios Technology 35 Xi 100 Non Contact Optical Profilometer e Image e Cross sections e Histograms a a e y e 3D Grap
6. YOU MAY NOT USE COPY MODIFY OR TRANSFER THE HARDWARE AND SOFTWARE IN WHOLE OR IN ANY PART WITHOUT THE PRIOR WRITTEN CONSENT OF AMBIOS TECHNOLOGY INC IF YOU TRANSFER POSSESSION OF ANY PORTION OF THE HARDWARE OR SOFTWARE TO ANOTHER PARTY YOUR LICENSE IS AUTOMATICALLY TERMINATED Term The license is effective until terminated You may terminate it at any other time by returning all hardware and software together with all copies of associated documentation It will also terminate upon conditions set forth elsewhere in this Agreement or if you fail to comply with any term or condition set forth in this Agreement You agree upon such termination to return the hardware and software together with all copies of associated documentation In the event of termination the obligation of confidentiality shall survive Ambios Technology V Xi 100 Non Contact Optical Profilometer vi Ambios Technology Contents Chapter 1 Introduction XP TOO OVEIVI OW src dida ii Be etek Sr op eas Rie cece Pein BU ee eek 1 Operating TOGO 322064 cehew eo s duvind adavaws doe Meee eee dowd eeaiadwinactdades 1 Smooth Mode Phase Measurement 0 0000 ee eee 3 Texture Mode White Light Measurement 0 0000 eee eee eee 5 Windows Operating Environment 0 000 e ee eee 7 Chapter 2 Setup Mal INSPECCI N sete 32 52 2 vache Reed AAA Soa a 7 Packing list NA 7 ACCOSSOMN Ata e idad o ou Batido tio 8 So A O O oc S
7. as shown Ambios Technology 15 Xi 100 Non Contact Optical Profilometer 7 Thread the screw into the underside of the head and finger tighten This will prevent the delicate flexures from being overextended during the shipping process pe shipping screw 8 Place the Xi 100 frame into the shipping carton with the black rear support plate toward one end of the carton as shown below 9 Place the foam cardboard locator over the XY tilt stage foam cardboard locator 10 Place one of the pieces of foam with the cylindrical cutout on top of the foam cardboard locator 11 Place the foam with the optic box profile cutout on top of the first piece of foam 16 Ambios Technology Xi 100 Setup 12 Place the optics box into the foam and place the second piece of foam with the cylindrical cutout over the optics box 13 Put the cables accessory kit and manual into the shipping carton as shown 14 Place the last piece of foam on top of the frame as shown below This helps to secure the Xi 100 frame during shipment Ambios Technology 17 Xi 100 Non Contact Optical Profilometer 15 Put the setup poster on top of all of the foam 16 Seal and ship to Ambios Technology Inc 303 Potrero Street Suite 42303 Santa Cruz California 95060 18 Ambios Technology Xi 100 Image Acquisition Image Acquisition Startup You have set up the Xi 100 and are now ready to begin image acquisition To acquire a
8. electrical noise ground loops and similar manifes tations by attaching the Xi 100 and the computer to filtered AC lines Provide as much isolation from EMI as possible by considering e Setting up the System away from high power electrical equipment such as motors generators or electrical switching devices such as relays that emit EMI noise e Providing separate branch circuits for the Xi 100 and the Computer e Providing surge suppression or an uninterruptible power supply CUPS for the branch circuit that powers the Xi 100 e Grounding the vibration isolation table and other support equipment securely to the Xi 100 Computer Ambios Technology 9 Xi 100 Non Contact Optical Profilometer Air Currents e Avoid placing the Xi 100 where it will be subject to air currents from fans or ducts Temperature Fluctuations e Locate the Xi 100 in an area that is not subject to rapid or frequent temperature changes and drafts due to heat or air conditioning ducts e Avoid placing the Xi 100 in a location where it be subject to direct sunlight Hardware Installation Note Always keep the Xi 100 s original packaging materials Refer to the instructions in Xi 100 Shipping Instructions if you have to send the equipment back to the factory 1 Unpack All Components e Accessory kit e Control cable e Frame Assembly e Head unit e Operating Manual e Video cable Note Follow the computer manufacturer s instructions to unpack and set up
9. of your sample we recommend that you use the textured sample in the accessory kit and follow the procedure below to get a benchmark example of a textured sample Then repeat the procedure using your own sample 1 Check that the magnification in the list box matches that of the objective If necessary change the magnification in the list box 2 Mount the sample and use the X and Y adjustment knobs to position the area of interest mid way under the green dot of light 3 Set the illumination to 50 or adjust until the background on the screen approaches light gray 4 Set Pixels to 480 x 480 5 Using the Coarse Focus Knob move the objective down until it is as close as you can get to the sample without touching it approximately 1 8 inch CAUTION Don t touch the sample you will damage the objective 6 Using the Coarse Focus Knob slowly raise the objective watching the knife edge for something to come into focus 7 Once you see something you must confirm that it is the sample and not something in the light path Use the X and Y adjustment knobs to see if the image moves If it moves it is the sample Note If the image is too bright or too dark adjust the illumination 8 If necessary use the Fine Focus Knob to look for fringes The Fine Focus Knob has measurement numbers on it Fringes found in texture mode have different characteristics than those in smooth mode Wavy or moir patterns contoured lines and static l
10. slider bars to adjust the brightness and contrast of the selected image You will have to practice doing this until you find the right combina tion for the image e Select either Max Min set to full dynamic range or Min Max set to 3 Sigma as the Contrast Default for your images 3 Sigma rejects noise best for most cases The total range of dark to light can be scaled to the full dynamic range of the data Brightness Contrast x Brightness Eoo E z Ki Contrast ooo E E How to scale data for brightness contrast Co Min Max setto full dynamic range Min Max setto three sigmas Co Min Max entered by user Min 732 0104540 Max 1724 29703971 Cancel or to a narrower subset that is less influenced by noise spikes 3 sigmas Generally we recommend that you select the 3 Sigma setting the default because it gives an image the best contrast However in the case of a bimodal step height measurement 3 Sigma may not allow the data to be viewed as clearly as Max Min olor Tables Use of color in an image may accentuate or highlight regions of the image The Xi 100 provides the following color tables e Monochrome is gray scale Standard is the Ambios default orange red color Individual colors such as cyan red olive aqua blue violet Dual colors such as red aqua blue olive Multi gray is useful to visualize the edges of flat surfaces System is 6 color Ambios Technology Xi 100 I
11. that you can use to obtain information on Delta Z or Average Z of a distribution of Z values amp Contrast numeric fields to adjust both functions and options for scaling data Color Tables Displays a drop down list to select a Monochromatic Standard or one of the ten Defined Color Tables that may enhance the image display Crop Image Allows you to select a region on an image to view in greater detail Copy Image Makes a copy of the selected image in a new Window Parameters Displays the Image Parameters dialog to review a summary of the parameters that were selected when the image was scanned 52 Ambios Technology Appendix A Software Reference MENU COMMAND DESCRIPTION Filters Fill Bad Pixels Displays a drop down menu with Strong Medium and Weak choices Use Smooths out pixels from which a signal was not detected to remove high frequency noise from the image by smoothing Median Displays a drop down menu with Strong Medium and Weak choices Use to replace noise spikes at the median of the surrounding area Highlights edges all directions and either positive or negative brightness slopes High Pass Accentuates the high frequency details of an image while leaving the low frequency content intact Plane Subtract Displays a pull down menu with three selections for removing the tilt of the image to the best fit plane AM Least Squares Plane Subtract Automatically finds the least s
12. to the appropri Color Tables gt ate section in this manual for more information on a particular option Filters gt Plane Subtract f Flatten gt Units Subtraction A gt Select this command to change the units displayed on the screen 1998 Window d zoi IQ Crop Image Statistics Eh Copy Image Copy to Clipboard Select this command to change the statistics displayed on the screen You can choose whether to show a statistic on the screen or not You UNE can also select a name for the statistic from the drop down list that Units 4 appears next to the statistic Statistics gt Mean d SC d Show a d Don t Show PeakValley F Name Sq Skewness Eq Kurtosis d RMS 50 Ambios Technology Appendix A Software Reference Appendix A Software Reference The Xi 100 software was designed with a flexible interface to help you easily and quickly access commands To access commands you can e Use the main menu commands File Edit and select a menu item e Select a button icon from the toolbar The toolbar contains a subset of the main menu commands e Select the command from a drop down list displayed when you click the left mouse button on a Xi 100 window This list contains a subset of the main menu commands Table A 1 lists all the main menu commands identifies corresponding icons and if the command is available on the drop down list Commands with an asterisk are av
13. 0 which is what you would get if you subtracted the lower number from the higher number In this case you don t want to subtract If the second number high point is larger than the first low point this means that you crossed the zero mark To accommodate this add 100 to the first number before subtracting 14 Turn the Fine Focus knob to a position halfway between the low and high values for example 40 This puts the focus in the correct position to measure slightly below the lowest point and go up to slightly higher than the highest point based on the vertical range you calculated 15 To set the Z range choose a number higher than your vertical range For example if your vertical range is 40 set the Z range to 50 Ambios Technology 25 Xi 100 Non Contact Optical Profilometer 16 Click the Auto Light button to adjust the light source automatically Note Use the Reset Light button to re establish the image s default set of conditions if you need to go back to the original light conditions 17 Click the Start button to acquire the image A progress dialog box appears as the system acquires the image then a screen appears with the image and the image data B test999 bii Ea Fa 504 1456 Image Sq 242 75 nm Sq 188 2 nm Peak Yalley 4910 45 nm um Proceed to Section 5 Image Display and Analysis to analyze the image Microscope Only Mode This mode allows you to acquire a picture of a sample wit
14. 00 Packing list The Xi 100 Non Contact Optical Profilometer consists of the following components e Accessory kit e Control cable e Frame Assembly e Head unit e Operating Manual e Video cable e Head Unit e Frame Assembly e Video cable and Control cable e Operating Manual Refer to the Hardware Installation section for instructions on setting up the Xi 100 Ambios Technology 7 Xi 100 Non Contact Optical Profilometer Accessory Kit The Accessory Kit contains the following items Extra lamp 10mm extender tube 10x objective lens may be substituted at time of order 25mm extender tube Optics turret inch stainless steel ball 050 inch Hex wrench 5 mm Hex wrench Reversible screwdriver 3 32 inch Hex wrench 5 64 inch Hex wrench 6 M6x16mm shc screws Computer Latest generation Intel processor based computer with keyboard and mouse Windows operating system Xi 100 Image Studio data acquisition and analysis software and data analysis software Note Refer to the computer manufacturer s instructions for setting up the computer Optional Equipment The following optional equipment may also be included e Additional objectives 5X 20X or 50X e Printer e Vibration isolation table 8 Ambios Technology Xi 100 Setup Site Selection Considerations Vibration electromagnetic forces air currents and temperature fluctuations can adversely affect the operation of the Xi 100 While i
15. AMBIOS TECHNOLOGY Xi1 100 Non Contact Optical Profilometer User s Manual Ambios Technology Inc 303 Potrero Street Suite 42 303 Santa Cruz California 95060 Telephone 877 429 4200 Fax 831 427 1160 Email sales ambiostech com User s Manual Rev D 5184 Copyright Ambios Technology Inc 2004 May 2004 All Rights Reserved Copyright Notice Copyright 2004 by Ambios Technology Inc All rights reserved worldwide No part of this manual may be reproduced transmitted transcribed stored in retrieval system or translated into any human or computer language in any form or by any means electronic mechanical chemical manual or otherwise without the express written permission of Ambios Technology Inc or its successors Trademarks Xi 100 and the related Xi software are trademarks of Ambios Technology Inc Microsoft is a registered trademark and Windows is a trademark of Microsoft Corporation Pentium is a registered trademark of Intel Corporation Dell is a registered trademark of Dell Corporation ii Ambios Technology LIMITED WARRANTY EXCEPT AS STATED BELOW IN THIS SECTION THIS PRODUCT IS PROVIDED AS IS WITHOUT WARRANTY OF ANY KIND EITHER EXPRESSED OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE Ambios Technology Inc does not warrant that the functions contained in the product will meet your requirements or that the op
16. CE BULLETINS Temp Toole_395 Windows stepht bi Image Files bi bmp Ambios Technology 29 Xi 100 Non Contact Optical Profilometer Output Image Export Image Files Select this option to display a standard Wind dial b F h Hours Program Files DA a 05 eee ses A Manuals A SERVICE BULLETINS can export the image as a different file E Darrell Mise Temp type You can save files as tif jpg tga EI Deskscan My DOCUMENTS Tools_95 bmp or dib E Drivers Nectools EI windows Faprport Output Data Export Image Files a Necesd C Select this command to export the selected image or cross section as mours Pioaan Fies EA Manuals E SERVICE BULLETINS a text file txt or binary file C bii ZA Darrell bilge Temp Selecting this option displays a 24 Deskscan M Y DOCUMENTS Tools_95 standard Windows dialog box Z Drivers Nectools E windows Paprport Workspace Select this command if you have customized your user interface and want to save it for future use For more information on customizing the workspace refer to the Customize section Open Workspace save Workspace Close Workspace save Workspace As 30 Ambios Technology Xi 100 File Management Print Select this command to print either the active window or the entire window Any installed printer can be used If a full page printout is required select the landscape format before printing To print 1 Click el or select Print from the File menu A dialog bo
17. D view is useful both for presentation purposes and for gaining a better perspective of the surface topography Display a 3D view using the Image 3 D Display or click t You can manipulate the 3D view in a variety of ways as described below Experiment to find the feature that is best for your image 36 Ambios Technology Xi 100 Image Display and Analysis e To freely rotate the 3D image hold the left mouse button down and move the arrow as if rotating a trackball e To display a top view select Top radio button e To redisplay the default perspective view select Default radio button e To show or hide the axis toggle the Show Axis checkbox e To use directional light to accentuate surface height select the Dir Light checkbox default To change the brightness of the directional light source adjust the Illumination slider bar e To use a different 3D view style make a selection from the Style drop down list The selections are Points Wire mesh Filled the default shows a solid surface Ruled XZ lines in the x direction Ruled YZ lines in the y direction Lego blocks and Lego filled e To change the fraction of the data points displayed make a selection from the Data Density drop down list The selections are All shows all points and several fractions 1 4 looks best for 256x256 1 16 for 512x512 The more data points selected the slower the image rotation response In general 1 64 looks best in all modes except filled a
18. L OR CONSEQUENTIAL DAMAGES SO THE ABOVE LIMITATION OR EXCLUSION MAY NOT APPLY TO YOU Ambios Technology iii Xi 100 Non Contact Optical Profilometer GENERAL You may not sublicense assign or transfer the license or the hardware software and documentation except as expressly provided in this Agreement Any attempt otherwise to sublicense assign or transfer any of the rights duties or obligations hereunder is void The laws of the United States and the state of California U S A will govern this Agreement Should you have any questions concerning this Agreement you may contact Ambios Technology Inc by writing or calling Ambios Technology Inc 303 Potrero Street Suite 42 303 Santa Cruz CA 95060 Telephone 831 429 4200 YOU ACKNOWLEDGE THAT YOU HAVE READ THIS AGREEMENT UNDERSTAND IT AND AGREE TO BE BOUND BY ITS TERMS AND CONDITIONS YOU FURTHER AGREE THAT IT IS THE COMPLETE AND EXCLUSIVE STATEMENT OF THE AGREEMENT BETWEEN YOU AND AMBIOS TECHNOLOGY INC iv Ambios Technology LICENSE AGREEMENT YOU SHOULD CAREFULLY READ THE TERMS AND CONDITIONS BEFORE OPENING THE PACKAGE CONTAINING THE COMPUTER SOFTWARE AND HARDWARE LICENSED HEREUNDER CONNECTING POWER TO THE Xi 100 SURFACE PROFILING UNIT INDICATES YOUR ACCEPTANCE OF THESE TERMS AND CONDITIONS IF YOU DO NOT AGREE WITH THEM YOU SHOULD PROMPTLY RETURN THE UNIT TO THE AMBIOS FACTORY Ambios Technology Inc provides the Xi 100 hardware and computer software program conta
19. ailable only when an image is displayed Hot keys for a command are identified on the appropriate menu by an underline Table A 1 Xi 100 Menus MENU COMMAND DESCRIPTION File Offers quick and easy search capabilities for images Open E Displays the Open dialog for selecting an image file bii bmp img and smp to open Closes all windows of a data file Saves the displayed information in a file or resaves an altered file Displays the Save As dialog to save the information in a file Output Displays the Export Image file dialog to export the image to other Image applications Output Data Displays the Export Image data dialog to export the image cross section or histogram data as a text file to other applications Workspace Displays a drop down list with commands Open Save Close and Save As to use the workspace Workspaces are wsp files that are useful when multiple users use ImageStudio Each user can create a custom workspace that contains the user s preferred settings and arrangements of dialogs When this user wants to scan images or review data the user simply opens this customized environment 5 Displays the Print dialog to print the screen or current window Displays the Print Setup dialog for selecting printing information Ambios Technology 51 Xi 100 Non Contact Optical Profilometer MENU COMMAND DESCRIPTION File Lists the names of files that have been opened recently onne Clos
20. amp note 32 file type open 36 Fill bad pixels 41 filters 41 Filters menu 41 53 Flatten filter 43 Full screen 36 Hardware Installation 16 Help menu 54 High Pass filter 42 Histogram Image menu 37 Histogram View menu 37 illumination 3D View 36 image analysis 36 Image acquisition 19 Image display and analysis 35 Image menu 32 36 52 Imaging modes 21 Inspection 7 Installation 7 Interferometry 1 Introduction 1 Keyboard accelerators tab 48 Kohler design 1 Laplacian filter 42 Least Squares Plane Subtract filter 42 Median filter 42 menus 51 Microscope only mode 26 Microsoft Windows 6 Most recently used documents 49 Most recently used file list 31 Open 29 Operating Modes 21 Operating theory 1 Operation 19 Optional equipment 8 Output data 30 Output image 31 Overview 1 Packing list 7 Parameters 32 Parameters Window menu 41 Period measurement 45 Phase measurement 3 pixel coordinates 43 Pixel tool 43 Plane Subtract filter 42 Print 31 Print setup 31 Processing 33 Profile tool 44 Region tool 45 Reset control bars 35 Reset zoom 49 Right clicking 50 Save 29 Xi 100 Index Save as 29 Scale bar 35 Security Key 13 Service 57 Shipping 7 Shipping instructions 15 Show all controls 35 Show Axis checkbox 37 site selection 9 Smooth mode 1 3 21 Smooth mode procedure 21 Smooth Plane Subtract filter 42 Software reference 51 Specifications 55
21. an image of a sample without taking a vertical measurement The Ambios Xi 100 Non Contact Optical Profilometer is designed to image and measure smooth and rough surfaces with an X Y range up to 2mm and a Z range to 100 um With appropriate vibration iso lation and signal averaging vertical resolution on the order of A can be obtained for smooth mode The Xi 100 Non Contact Optical Profilometer provides precise reproducible surface measurements non destructively through Michelson interferometry The Xi 100 uses smooth mode to provide affordable high resolution optical profilometry for relatively smooth surfaces For surfaces with very steep or discontinuous surface features texture mode should be used to avoid the loss of signal and missing data points The Xi 100 can be used in applications that require measurements and or speed of data capture which are beyond the capabilities of scanning probe microscopes including fast non destructive non contact surface roughness measurements and surface topography measurements that are beyond the fine range of SPMs but smaller than those available from stylus profilers There must be at least 2 surface reflectivity for this instrument to work Operating Theory The Ambios Xi 100 Non Contact Optical Profiler uses Phase shifting Interferometric Technology com bined with an optical microscope to provide a non contact 3D method of measuring the roughness of surfaces from the sub nanometer to the mi
22. ar e To measure the average height of one of the surfaces represented by a single peak place the measuring bars on either side of the distribution as shown F stepht bii Histogram 38884 38 Ambios Technology Xi 100 Image Display and Analysis e To measure a Delta Z between two points the vertical distance between two surfaces place one flag in the center of one distribution and the other flag in the center of the second distribution as shown mr stepht bii Histogram 38884 Average Z 22 31 Delta Z 92 59 56 60 nm 61 32 Note The light colors on the image are the high points the dark colors are the low points 4 Click a second time and a set of blue measuring bars appears Use these bars if you want to measure the second distribution F stepht bii Histogram Average Z 58 24 Delta Z 2 76 Average Z 15 77 Delta Z 0 46 To measure the height difference between two surfaces most accurately best statistics use one set of measuring bars for each distribution then take the difference between the two values of Average Z to determine the height difference Average Z 58 24 Delta Z 2 76 Average Z 34 66 Delta Z 2 76 Ambios Technology 39 Xi 100 Non Contact Optical Profilometer B C 40 rightness amp Contrast The Brightness amp Contrast screen allows you to set the brightness and contrast for the image as well as the default scale data e Use the
23. ass Filter Laplacian Filter Ambios Technology 33 Xi 100 Non Contact Optical Profilometer Display This screen allows you to set the measurement units that will appear on your image and the color scheme of the displayed image Default Display Settings xX Color Table Ped v AE Units Microns v Units Nanometers v Contrast Default Max min 3 Sigma Cancel e Select a Color Table from the drop down list The selected image and subsequent images will appear in that color or the combination of colors you picked Choices are Monochrome Standard Cyan Red Olive Aqua Blue Violet Red Aqua Blue Olive Multi gray and System e Select the measurement for the X Y Units Choices are millimeters microns nanometers and microinches e Select the measurement for the Z Units Choices are millimeters microns nanometers and microinches e Select the appropriate Contrast Default 3D is best for most cases For more information refer to Brightness amp Contrast in the Image Display and Analysis section Statistics Show statistic This screen allows you to determine which parameters SHEUIE UE Name will appear next to your acquired images Click on the Mean T Mean square after each parameter that you want displayed Sq Y Sq Sale ha v Peak Valley Peak valley y Skewness Kurtosis F Cancel 34 Ambios Technology Xi 100 Image Display and Analysis IMAGE DISPLAY AND ANALYSIS
24. ave the Capture screen active File Name amp Note Select this feature to give an image file a specific name and number If you set the first image in a series here each image that you capture after the first will be numbered sequentially This is a handy feature when you are capturing many images of a particular sample You can also provide a note if there is something that you need to remember about the image For example you can enter a date a revision letter or a few words about the image The limit for the note is 128 characters File Name amp Note X test 1001 File Mame testi 001 bu Note Cancel Parameters Select this feature to view the parameters on a particular image You can also right click the mouse on a particular image to access this feature 32 Ambios Technology Xi 100 Xi 100 File Management The following screen appears Image Parameters x Date 09 17 99 09 11 01 Mote Mode Texture Mode Wave Length 550 00 nmi Magnification 10 0 Defaults Processing This screen allows you to set the image processing filter defaults for each image that you acquire Refer to the section entitled Filters for more information on each filter Default Image Processing x W Bad Pixel Removal l Flatten Line by Line Y Plane Subtract Average Filtering T Strong l Medium T Weak Median Filtering T Strong T Medium Peak l Image Subtraction Retlmage y Cancel High P
25. ay you are in focus 5 Using the Coarse Focus Knob move the objective down until it is as close to the sample without touching it approximately 2mm CAUTION Don t touch the sample you will damage the objective 6 Using the Coarse Focus Knob slowly raise the objective watching for the sample or the Knife Edge to come into focus 7 Once you see something you must confirm that it is the sample and not something in the light path Use the X and Y adjustment knobs to see if the image moves If it moves it is the sample Note If the image is too bright or too dark adjust the illumination Once you have focused the image change the pixel size to 480 x 480 for easy viewing 8 Use the Fine Focus Knob to look for fringes Fringes should appear as parallel bands of light and dark Fringes represent the rise and fall or tilt of the sample surface As you flatten the tilt using the Tilt Adjustment knobs you will reduce the number of fringes that appear on the computer screen The direction of the tilt is perpendicular to the direction of the bands For example a series of horizontal bands indicates a tilt from front to back Note For best image acquisition you should try to have no more than two fringes within the image 22 Ambios Technology Xi 100 Image Acquisition 9 Use the side to side knob on the left to reduce the vertical fringes Then use the back to front knob to reduce the horizontal fringes Note If
26. cal non overlapping arrangement Zoom In Select this command to magnify the image This only affects what is viewed the full image is still in memory Any filters or analysis will be applied to the entire image however if a magnified view is fil tered the view will remain zoomed in Zoom Out Select this command to view a smaller image Selecting this several times will continue to reduce the size of the image Reset Zoom Select this command to view the image at its original size Close All Windows Select this command to close all windows on the screen Most Recently Used Documents Use this list to open recently used documents This list is updated every time a file is opened or saved up to five files are listed To reopen one of these files click on its entry in the MRU list Ambios Technology 49 Xi 100 Non Contact Optical Profilometer Right Clicking on the Capture Window Right clicking on the Capture window provides the following options which can also be accessed using menus or toolbar icons Refer to the appropriate section in this manual for more information on a particular option File Hame amp Mote Parameters Calibrate P2T Diefaults Processinq Display Statistics Right Clicking on the Image tg 3D Display la Histogram Right clicking on the image provides the following options which can lt Brightness and Contrast also be accessed using menus or toolbar icons Refer
27. chnology 13 Xi 100 Non Contact Optical Profilometer 8 10 14 Insert the Optics Turret Optional _ Remove the Optics Turret from the Accessory Kit and slide it into the Head as shown here Use the 050 Hex Wrench in the Accessory Kit to secure the Optics Turret Note If you are using only one objective lens you may want to use one of the extender tubes found in the Accessory Kit Insert the Optics Turret Remove Objective s from the Accessory Kit and carefully thread them into the Turret Objectives are Fragile Handle With Care Power Up Press the Power Buttons on the Computer and the Monitor Start the Xi 100 Software this will power the Xi 100 Unit Consult your reference material for further information on the Xi 100 You are now ready to use the Xi 100 Continue with Section 3 Image Acquisition Ambios Technology Xi 100 Setup Xi 100 Shipping Instructions Follow the instructions below if you ever need to ship the Xi 100 back to the factory 1 Remove the objective s and place in the plastic shipping tube s 2 Place the plastic shipping tube s in the accessory case 3 Remove the turret or the extender tube and place it in the accessory case 4 Remove the cables from the frame 5 Remove the six screws holding the Xi 100 Optics Box to the Xi 100 frame and store the screws in the accessory case SCrews accessory case 6 Install the shipping screw and shipping tag
28. cron scale Areas in scale from microns to millimeters may be imaged rapidly Interferometry has been a technique in existence for more than one hundred years and consists of viewing the optical path difference between a sample beam and a reference beam the beams undergo constructive and destructive interference and this results in a pattern of bright and dark fringes Ambios Technology 1 Xi 100 Non Contact Optical Profilometer In the case of an interference microscope the objective lens is coupled with a beam splitter so that some of the light is reflected from a reference mirror at 90 degrees Michelson type or co linear with the light path Mirau type MICHELSON CCD Camera OBJECTIVE BEAMSPLITTER SAMPLE Illumination from a white light beam passes through a filter then through a microscope objective lens to the sample surface The light reflecting back from the surface recombines with the reference beam and interference fringes are formed The pattern of these fringes is captured on a CCD camera array If the sample is a perfectly flat mirror but tilted and the illumination is by monochromatic light then the resulting interference pattern will be a series of fringes The distance between the maximum of the dark or light fringes is proportional to the wavelength of light used and the tilt of the mirror Each band in the interference pattern represents a contour height difference of 275 nm half the wavelength of light 550nm used
29. d 24 5 vee aka ae one A 32 A ABs ah ce en et te A Wee a eee Pe eat 32 Mage Menu hau dis td 32 Fl Name Nole ara A as Aa ey Ba es Paramete AA AI ici 32 BE EE o A A a DEAR a AA ak oh a da AIM 33 Chapter 5 Image Display and Analysis VIEWING MAGe FICS scared 35 MEW Med 20g se aotearoa Ge Sse daa 35 Analyzing Image Files 0 ccc ee eee ee ees 36 Made Men sacas sd ah ee a Re E AA 36 FSIS MENU sos caia daras doe apes eno end ot oo tee ee 41 Vili Ambios Technology TOOLS a AA IO AS a e e atone AN 43 Window Menard ta o is 49 Right Clicking on the Capture Window 0 0 eee eee 50 Right Clicking on the Image ccc ee eee eee 50 Appendix A Software Reference 0 00 51 Appendix B Specifications 0 0 cc ee eee 55 Appendix C Troubleshooting and Maintenance 57 NAS arruinan did an e ce ioe ge ete ee eee 59 WAAN narnia dd Ase esata s ii Ambios Technology Xi 100 Non Contact Optical Profilometer Xx Ambios Technology Xi 100 Introduction Introduction Xi 100 Overview The Ambios Xi 100 Non Contact Optical Profilometer is a metallurgical reflected light profiling microscope system measuring a field of up to 2 mm Illumination is produced using the Kohler design the light source is imaged to the objective aperture The Xi 100 operates in smooth mode phase shift and texture mode wave modes You can also use microscope only mode to acquire
30. e expanded or reduced image to the original state Close All Closes all open files Windows Names of Lists the names of the open files Open Files Help About Displays copyright trademark and version information about this ImageStudio software 54 Ambios Technology Appendix Appendix B Specifications R Specifications Modes Computer Monitor X and Y Range Smooth phase Texture white light Microscope Only Latest generation Pentium computer with keyboard and mouse Windows operating system Xi 100 Image Studio data acquisition and analysis software TFT Flat Panel Monitor Up to 100 mm Z Range Minimum Z Resolution Sample Surface Reflectivity Sample Size Bulb lt 1 nm Resolution varies with measurement mode and with the number of measurements averaged Must be at least 2 8 X 8 X 1 12 Volt 20 Watt Halogen Bulb Ambios Technology 55 Xi 100 Non Contact Optical Profilometer Dimensions 15 50 56 Ambios Technology Appendix C Troubleshooting and Maintenance Appendix Troubleshooting and Maintenance Other than the procedures in this manual there is no user service or maintenance that can be done for the Ambios Xi 100 Non Contact Optical Profilometer If any problems arise or if you have any questions please contact the Ambios Customer Service Department Troubleshooting Missing Bad Pixels To reduce the number of bad pixels in a
31. e focal point The resulting camera images are stored as a series of frames rather like a sandwich stack Objective D Approximately 100 times more image data is acquired in Texture Mode than in Smooth Mode so the data capture is slower The advan tage of this so called White Point 1 Point 2 te Nal a A heini 2 Light or texture mode is that steps and vertical peak to valley ranges may be meas ured beyond the microscope depth of focus up to 100um uono 12d Ambios Technology 5 Xi 100 Non Contact Optical Profilometer Windows Operating Environment The manual assumes you have a general knowledge of computers and the Windows operating environment Refer to the Microsoft Windows documentation for any information you need on the display control features of Windows Windows is a trademark of Microsoft Corporation Ambios Technology Xi 100 Setup 2 setup Initial Inspection The Ambios Xi 100 Non Contact Optical Profilometer is shipped in a specially designed carton If the outside of the shipping carton is damaged notify your shipping department immediately they may wish to contact the carrier at this point If the shipping carton is undamaged externally carefully remove and identify all of the components listed below If any components are missing contact Ambios Technology Inc or your local representative It is important to save the special carton for future storage or transportation of the Xi 1
32. e na Ra eee 8 Optional EQUIPMENT vivida da dera barda 8 Site Selection Considerations o ooo oooooor ee eens 9 VIDIAVONMSOIOUON arar vis bas nee eared Made eed aa e eM aoe Se 9 Electrical Isolation y arar aa A ae a eae elm a a 9 AIr CUNEN rs Ad a 10 Temperature Fluctuations o oooooooroor eee 10 Hardware INSTalatl Nes atar Uy oe eee A A bk Ree eee eee 10 Xi 100 Shipping Instructions 0 0 0 ee eens 15 Chapter 3 Image Acquisition Stanu hh ee ween ee as Daan A EA eee GAneees Ghee 19 IMAGING Modes vio Ad eds ANA AA AAA he ea ee A 21 Smooth Modesto ARA ds A tb 21 TES MOdJe rias a AA cn dis 24 Microscope Only Mode sic iia idas AAA ad a 26 Ambios Technology vii Xi 100 Non Contact Optical Profilometer Chapter 4 File Management A skin beta Siesta teat chek A ea bck Sean eS 27 EXPO Sua ads eds ADS A A TES 27 OPEN anni ai ica ad a ves a at ace deat ones 29 OSC Fac Sn O ae seared la ata aM ah Se Mat AA 29 AAN 29 Save AS nea ke eee ood And ra 29 QUO IMAGE assi or Sat eee ces aia a ie a aed eG mine eet ae 30 CUE Ca i cts a ee age de eu sree pie ad AE ont IA Ge Dad een the 30 WOK DACE acu a o cdas Se ses ep et ee Bl ee 30 EP ENING atar id o oh Seti AS ace ee Jat 31 POC OCUD sra eee ete eel eee a eee eed 31 Most Recently Used File LiSt o o o ooooooooooomoomo 31 A E oc dent wee O 31 EdiDMenU errada e eal eee ee eat ki eee Sm ba Alege alan Sea e 32 Copy Copy to Clipboar
33. e the box To measure step height 1 Select Tools Region Tool or click E 2 Place the cursor at the top of a light colored step press and hold the left mouse button down while dragging the cursor to the bottom of the step then release the mouse button 3 Record the mean displayed on the right of the mean for the entire image 4 Select Tools Region Tool or click E I 5 Place the cursor at the top of a darker colored valley and measure this area the same as the step area described in step 1 above 6 Subtract the mean of the valley from the mean of the step to obtain the step height Ambios Technology 45 Xi 100 Non Contact Optical Profilometer Customize Allows you to customize the ImageStudio Main screen Select Tools Customize to use this feature then click on the appropriate tab Toolbars Tab This screen allows you to select the toolbars that will be available on the ImageStudio Main screen 1 Place a checkmark in the boxes in front of the toolbars that you want to use 2 Click the New button Click Reset if you want to return to the default toolbars The toolbars you selected will now appear on the Main screen Toolbars Commands Keyboard Accelerators Toolbars W Show Tooltips New FT Cool Look Large Buttons Woolber name Menu bar coa n o 46 Ambios Technology Xi 100 Image Display and Analysis Commands Tab This screen shows the icon commands associated with a particular m
34. enu You can select the icons that you want to appear on each of the displayed toolbars Use this feature to move icons around or make icon groupings e Click on the icon that you want to add and drag it onto the toolbar of your choice Toolbars Commands Keyboard Accelerators Buttons Categories Full Screen selecta category then click a button to see its description Drag the button to any toolbar Description Cancel Apply Help Ambios Technology 47 Xi 100 Non Contact Optical Profilometer Keyboard Accelerators Tab This screen allows you to create shortcuts for some commands 1 Select the command you want in the Select a macro box 2 Click the Create Shortcut button A dialog box appears Assign Shortcut 3 Enter the shortcut name key The new shortcut appears in the Assigned shortcuts box e Click Remove to delete assigned shortcuts e Click Reset All to return to the default selections Toolbars Commands Keyboard Accelerators Description 3 point plane subtract 3D Display Brightness Contrast Reset All File Explore Create Shortcut 48 Ambios Technology Xi 100 Image Display and Analysis Window Menu Cascade Select this command to arrange all windows in an overlapping arrangement Tile Horizontally Select this command to arrange all windows in a horizontal non overlapping arrangement Tile Vertically Select this command to arrange all windows in a verti
35. eration of the product will be uninterrupted of error free Ambios Technology Inc does warrant as the only warranty provided to you that the product which is furnished to you will be free of defects in materials and workmanship under normal use for a period of twelve 12 months from the date of delivery to you as evidenced by a copy of your warranty receipt LIMITATIONS OF REMEDIES Ambios Technology Inc s entire liability and your exclusive remedy shall be 1 the replacement of any hardware and software not meeting Ambios Technology Inc s Limited Warranty and which is returned to Ambios Technology Inc or to an authorized Ambios Technology Inc dealer with a copy of your purchase receipt or 2 if Ambios Technology Inc or the dealer is unable within ninety 90 days to deliver a replacement product which is free of defects in material or workmanship you may terminate this Agreement by returning the product and your money will be refunded to you by the dealer from whom you purchased the product IN NO EVENT WILL AMBIOS TECHNOLOGY INC BE LIABLE TO YOU FOR ANY DAMAGES INCLUDING ANY LOST PROFITS LOST SAVINGS OR ANY INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OR INABILITY TO USE SUCH PRODUCTS EVEN IF AMBIOS TECHNOLOGY INC OR AN AUTHORIZED DEALER HAD BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGES OR FOR ANY CLAIM BY ANY OTHER PARTY SOME AREAS DO NOT ALLOW THE LIMITATIONS OR EXCLUSION OF LIABILITY FOR INCIDENTA
36. es ImageStudio Edit Copy oe Copies the selected window to the clipboard from which it can be pasted into other Windows applications Undoes the last edit or filter Cancels your last undo command View 3D Display tz Displays a 3 dimensional view of the image that you can rotate Histogram Displays the concentration of data values as a graph with two sets Ln of measurement bars that you can use to obtain information on Delta Z or Average Z of a distribution of Z values Scale Bar Displays scales on the x and y axes with zero values unit names and upper values listed Show All Displays the Scan Controls Mode Controls and Scan Settings Controls E dialogs on the lower portion of the screen Status Bar Enables and disables displaying the status bar below the image area and above the Scan Controls area A checkmark indicates the Status Bar is enabled Workbook Enables and disables displaying data images and profiles on the screen Mode using a workbook format with tabs at the bottom of each for quick access A checkmark indicates the Workbook mode is enabled Full Screen Enables and disables displaying the image as a full screen Image 3 D Display Displays an image as a three dimensional view Refer to E 13D Display for more information Brightness A Displays the Brightness and Contrast dialog with slider bars and NT Displays the concentration of data values as a graph with two sets ET of measurement bars
37. for more information on installing the Head Unit Fringes in Image Will Not Stay in Focus e Tighten the Tensioner knob the knob closest to the microscope on the left side of the Xi 100 by turning the knob counterclockwise This will stop any drifting problem e If there is too much vibration consider purchasing a Vibration table directly from Ambios Computer Maintenance For information on maintenance and service of the computer please contact the Ambios Technology technical support hotline 1 877 429 4200 Within the US 831 429 4200 831 427 1160 FAX service ambiostech com 58 Ambios Technology Index 3 Point Plane Subtract filter 42 3D Display Image menu 36 3D Display View menu 35 3D view 36 Accessory kit 8 Air currents 10 Analysis 35 Analyzing image files 36 Average filter 41 Brightness amp Contrast Image menu 40 Cascade 49 Close 29 Close all windows 49 Color tables 40 colors for image 40 commands list of 51 Commands tab 47 compare regions of image 45 Components 7 Computer 8 Computer Maintenance 58 coordinates of image pixel 43 Copy 32 Copy image 41 Crop image 41 cross section profile 44 Customize 46 Data Density field 37 Default radio button 37 Defaults 33 Dir Light checkbox 37 Display 23 26 34 35 Edit menu 32 52 Electrical isolation 9 electromagnetic interference 9 Exit 31 Explore 27 export image 36 File management 27 File menu 27 51 File name
38. h no vertical measurement taken 26 Ambios Technology Xi 100 File Management A File Management The following file management features can be used with newly acquired images or stored images File Menu The File menu provides commands for opening closing and saving images The Explore option offers expanded image search capabilities the Workspace option gives you the opportunity to open close and save your workspace Explore 1 Select the Explore option to quickly search for image files The first screen provides a list of disks on your computer 2 Click on the in front of the disk you want to open My Computer 7 o fel Fa All Folders a My Computer H E Disk C H E Disk FP H E Disk A A list of folders directories appears Ambios Technology 27 Xi 100 Non Contact Optical Profilometer 3 Click on the in front of the folder you want to open The images in that folder appear on the right side of the Explore screen GY C lmages texture01 bii 8 file s All Folders a Disk C texture01 bii smooth02 bii texture02 bil smooth03 bii 3 GortHorizon GortHorizon2 orizon 3 0 Setup orizon3 0 orizon3 1 orizon3 1Demo Y orizon3 3 smooth01 bii texture03a bii texture03b bii texture03a tb bii orizon3 3Demo orizonDLL orizonDLLNew B A EE COCCECCCCCELCLLE E E LampOff micromap Multimedia Files O My Documents z a Ly OT52 EE EH
39. hics Click on the tab that you desire to view that particular item A checkmark in the Workbook Mode box under the View menu indicates that Workbook Mode is enabled Full Screen Select this command to display the image as a full screen Analyzing Image Files You can open saved files for review comparison with other images and for taking measurements You can perform a variety of standard Windows commands using the image file such as copying it to the clipboard renaming it exporting and printing it All these commands are accessible using the File and Edit commands Some of these commands are also accessible using icons or on a drop down menu Refer to Appendix A for a description of each command You can also review a summary of the parame ters that were active when the image was captured Image Menu There are a variety of affects you can apply to enhance or modify the appearance of a captured image These commands are accessible from the pull down Image and Tools menus by clicking the appropri ate icon on the toolbar or by right clicking the mouse on a selected image Right clicking produces a pop up menu of choices for enhancing the image Note You may want to make a copy of the image using the Copy Image command under the Image menu and apply one or more of these effects to the copied image for comparison with the original image 3D Display The 3D command displays a three dimensional rendering of the selected image This 3
40. ike patterns are all fringes indicating a rough texture Note You should have at least one fringe in order to adjust the light intensity and find the maximum contrast If the sample is not level use the tilt table to level the platform using your eye 9 Once you find the fringes use the Fine Focus knob to observe the fringe motion Move the Fine Focus Knob counterclockwise down to the location where you notice the fringes disappear Ambios Technology Xi 100 Image Acquisition 10 Record the number found on the Fine Focus knob for example 60 microns This represents the lowest point of the sample 11 Use the Fine Focus knob to observe the fringe motion once again this time moving clockwise up to the location where the fringe motion disappears 12 Record the number found on the Fine Focus knob for example 20 microns This is the high point of your sample Note This is a quick way to measure heights if all you need is a rough estimate 13 Subtract the first number from the second one in this example the result would be 40 microns This is your vertical range or distance from the lowest point to the highest point of your sample Note The number of marks on the index indicate the difference in height from top to bottom Crossing the zero mark may complicate the calculation For example if 20 is the low point and 80 is the high point passing through the zero mark makes the difference between the two points 40 not 6
41. in the measurement The contour bands are purely sinusoidal and the phase of the interference fringe pattern can be measured to very high accuracy 2 Ambios Technology Xi 100 Introduction Smooth Mode Phase Measurement If the incident beam is moved vertically with respect to the sample surface the fringe pattern will change from dark to light to dark for each 550nm movement PZT Motion Monochromatic fringes Phase is linear Each pixel is sampled in this manner while the microscope Mo head is moved precisely up and down using a piezoelectric translator above the sample surface The phase differences for each pixel are determined by an algorithm and convert ed into height differences The 3D profile of the surface measured is then reconstructed as a false color map and displayed on the monitor together with surface roughness statistics This method of producing a surface map is called Smooth Mode It works particularly well for smooth sur faces where the typically peak to valley is less than 1 um as illustrated by the image of an optical mirror surface below Ri 3 97 211 un x 211 un Hn 1 P Rt 560 59 Ambios Technology 3 Xi 100 Non Contact Optical Profilometer One disadvantage of Phase Measurement mode is that rough or discontinuous surfaces and steps produce ambiguous measurement data because all fringes look alike Imagine a particular point on the surface whose reflected image prod
42. ined within the computer system and licenses these products to you You assume responsibility for the selection of the product suited to achieve your intended results and for the installation use and results obtained Upon initial usage of the product your purchase price shall be considered a nonrefundable license fee unless prior written waivers are obtained from Ambios Technology Inc License a You are granted a personal nontransferable and non exclusive license to use the hardware and software in this Agreement Title and ownership of the hardware and software and documentation remain in Ambios Technology Inc b you and your employees are required to protect the confidentiality of the hardware and the software You may not distribute disclose or otherwise make the hardware and software or documentation available to any third party c you may not copy or reproduce the hardware and software or documentation for any purpose d you may not assign or transfer the hardware and software or this license to any other person without the express written permission of Ambios Technology Inc e you acknowledge that you are receiving only a LIMITED LICENSE TO USE the hardware and software and related documentation and that Ambios Technology Inc retains the title to the hardware and software and related documentation You acknowledge that Ambios Technology Inc has a valuable proprietary interest in the hardware and software and documentation
43. mage Display and Analysis Crop Image Select this command to separate a region from the whole image so you can get a closer look at it When you crop a region you can then use the brightness and contrast feature to see more detail in craters etc Copy Image Select this command to compare two images two cross sections etc When you make a copy you can change the filters or use some of the other effects and then compare the results to the original eames Select this command to view a i E Date 09 17 99 09 11 01 list of details about the selected EE dll image Mode Texture Mode Wave Length 550 00 nmi Magnification 1 0 0 The parameters displayed are those that are in effect when the image was acquired e You can double click on the Note line if you want to edit the note Filters Menu The filters are each described below Fill bad pixels There are some pixels that cannot be detected no reflected light reaches the CCD camera you can not get a measurement for them Select this feature to smooth out those pixels to produce a continu ous surface Average Displays a pull down menu with Strong Medium and Weak choices Use to remove high frequency noise from the image by smoothing Ambios Technology 41 Xi 100 Non Contact Optical Profilometer Median Displays a pull down menu with Strong Medium and Weak filters Use to replace noise spikes by the median of the surrounding area Laplacian
44. n image 1 Move the appropriate objective into position The field of view for objective lenses is fixed Select an objective that will provide the appropriate field of view OBJECTIVE FIELD OF VIEW 2 mm 1mm 0 25mm 250 microns 0 5mm 500 microns 0 1mm 100 microns Note If you are worried about vibration we recommend that you use one objective with the extender tube rather than the turret which holds several objectives 2 Turn on the computer Ambios Technology 19 Xi 100 Non Contact Optical Profilometer 3 Double click on the Xi 100 icon to start the software The ImageStudio Main screen appears ib ImageStudio 22 File View Tools Help ajajajaj velek u ml Ae a a a 2 0 5 A ej lolx 4 Click l3 Controls Icon The Capture screen appears Pixels xY Size um 480x480 504 X 504 Magnification Z Averaging x100 f Illuminati Auto Light Reset Lignt s pe E 5 Choose the imaging mode you need Smooth or Texture then continue with the appropriate procedure Note We suggest that you first image a smooth or texture sample from the accessory kit to become acquainted with fringes and tilt adjustment 20 Ambios Technology Xi 100 Image Acquisition Imaging Modes There are three imaging modes smooth texture or microscope only Tensioner Knob Course Focus Knob Objective Stage Tilt Knob Fine Focus Knob front to back Y Adjustment Knob
45. n image e Reset the contrast especially for low reflectivity samples using the Auto Light button e Adjust the tilt e Change the operating mode from Smooth mode to Texture mode if the sample features exceed the range of smooth mode e Change the objective to a higher magnification or tilt the sample toward the objective if the sample has a steep slope For the instrument to work there must be at least 2 surface reflectivity No Light Excessive Contrast e Click the Reset Light button on the Capture screen to go back to the default settings e Check for a blown bulb by placing a piece of paper under the objective to see if the green light appears If it doesn t make sure the instrument is on and replace the bulb as necessary e Circuit problem Contact the Ambios Customer Service Department e Make sure the cable is connected properly to the Xi 100 Refer to Hardware Installation for more information on installing the Control cable Ambios Technology 57 Xi 100 Non Contact Optical Profilometer No Video Image e Make sure the cable is connected properly to the Xi 100 Refer to Hardware Installation for more information on installing the Video cable e The lens may be too far out of focus Use the Coarse Focus knob or put something under the sample to fix the focus range between the objective and the sample Sample Won t Fit Under Objective e Optics Box mounted too low Remount the Head Unit Refer to Hardware Installation
46. nd points To change the vertical magnification scale enter values in the Z scale field Values higher than 1 cause the topography to be accentuated stretched in the Z direction Histogram A histogram is a graph that describes how many of the pixels points in an image have a particular height or value of Z The horizontal axis is the height the vertical axis is the number of pixels in the image If you measure a surface there will be a distribution of heights often Gaussian or multi Gaussian You can use the histogram to Dm 252000 measure such items as step height film thickness and surface roughness E stepht bii OLA LETAL MM bii Ioj x 252000 271 Image Mean 1 99 Sq 45 21 Sa 44 09 PeakfValley 111 48 Skewness 0 44 Kurtosis 1 20 The above example has two surface heights displaying a bimodal distribution two Gaussian distributions Ambios Technology 37 Xi 100 Non Contact Optical Profilometer 1 Click LR select Histogram from the Image menu The histogram of the active image appears ILLAS aAypypreaLt De MP stepht bii Histogram 38884 2 Click once anywhere on the image with the mouse and a set of two red measuring bars appears Also the Average Z and Delta Z measurements appear to the right of the screen pr stepht bii Histogram 38884 Average Z 25 51 Delta Z 0 46 3 Place the mouse pointer on one of the boxes at the top of either measuring bar to move the b
47. quares plane fit to the entire image and subtracts it 3 Point Plane Subtract 2251 Defines a flat plane for image background removal 3 based on three user selected points in the image Use once to select points and a second time to subtract plane Smooth Plane Subtract Subtracts a smoothed background from the original image This is similar to a high pass filter Flatten Allows you to level the image using three techniques Refer to Flatten Subtraction for more information Tools Pixel Tool Permits you to place a cursor on any pixel in the image and y displays the coordinates in the status bar Profile Tool Permits you to draw a line on the image to obtain a profile of the ff image surface Region Tool i Permits you to place a rectangle on a region of interest in the __ image to obtain information on the surface in that region and zoom in on the image Customize Displays the Customize dialog for customizing the toolbars commands and keyboard accelerators in ImageStudio Window a Arranges open image files in an overlapping manner Tile Arranges open windows on top of each other Horizontally ii Tile Vertically Arranges open windows side by side Ambios Technology 53 Xi 100 Non Contact Optical Profilometer MENU COMMAND DESCRIPTION Window Zoom In Expands the displayed image continued al Zoom Out a Restores an expanded area one level Reset Zoom Returns th
48. t may not be possible to completely eliminate these sources of interference from the selected site we recommend you provide as much isolation as possible using the suggestions provided here Vibration Isolation The Xi 100 is sensitive to vibrations You may want to quantify the vibrations of the room using an accelerometer if you have reason for concern Minimize vibrations for the Xi 100 by considering e Placing the Xi 100 on its own table and placing other equipment computer monitor keyboard and mouse on another surface Consider purchasing an optical bench or vibration isolation table on which to place the Xi 100 This item can be purchased directly from Ambios e A location on the ground floor or below ground and close to an outside wall of the room Building vibration is typically in the 10 to 100 Hz range and can adversely affect the Xi 100 even with only a 1 micrometer amplitude The floor at the center of a room tends to act as a drumhead e A location as far as possible from foot and vehicular traffic heavy equipment fans air conditioning units or other devices that emit excessive noise e Clamping the cables to the table or bench to prevent movement Electrical Isolation It is important to minimize electromagnetic interference EMD at the site that may corrupt the measurement of small forces The Xi 100 s electronic components are designed to minimize the effects of EMI It is recommended that you prevent problems with
49. the computer 10 Ambios Technology Xi 100 Setup 2 Find a Suitable Location Place the Xi 100 on a flat and stable surface Place the Xi 100 in a room that Is e Thermally stable e Free from noise e Free from vibration e Free from drafts Note You can order a Vibration Isolation table directly from Ambios 3 Attach the Xi 100 Head Unit Accessory Kit nr Ea LLE cit if i d Using the large Hex Wrench and Screws from the Accessory Kit attach the Head to the Frame as shown here CAUTION The metal in the Head is soft do not overtighten or cross thread the Screws Ambios Technology 11 Xi 100 Non Contact Optical Profilometer 4 Remove Shipping Screw 5 Attach Cables to the Back of the Frame Cable attachments are provided on the back side of the granite frame to insure that vibrations transmitted through the cables are minimized 12 Ambios Technology Xi 100 Setup 6 Connect the Control Cable Insert the small 15 pin connector into the 15 pin socket on the top of the Xi 100 Head Unit Insert the large 50 pin connector with the Green Dot into the 50 pin socket with the Green dot in the rear of your computer 7 Connect the Video Cable Insert the small round connector into the round socket marked DC IN SYNC on the top of the Xi 100 Head Unit Insert the 15 pin connector with the Yellow Dot into the 15 pin socket with the Yellow Dot on the rear of your computer Ambios Te
50. the sample goes out of focus during adjustment use the Fine Focus knob to readjust the focus and retain the fringes 10 Maximize the contrast by adjusting the focus so that you can see the two fringes and the maximum contrast between them adjust up and down through maximum to locate it most easily 11 Click the Auto Light button to adjust the light source automatically Note Use the Reset Light button to re establish the image s default set of conditions if you need to go back to the original light conditions 12 Click the Start button to acquire the image A progress dialog box appears as the system acquires the image then a screen appears with the image and the image data E smooth01 bii 504000 16 27 Image Mean 0 08 nm Sq 2 21 nm Sa 2 18 nm PeakiValley 24 37 nm Skewness 0 79 nm nm Kurtosis 3 03 0 nm 304000 13 If you want to average more than one image increment the number in the Z averaging box on the Capture screen by clicking the up arrow Proceed to Chapter 5 Image Display and Analysis to analyze the image Ambios Technology 23 Xi 100 Non Contact Optical Profilometer Texture mode 24 In texture mode depending on the objective lens used the Xi 100 measures surface topography up to 2mm X 2mm X 100 mm X Y and Z The data is collected as the objective scans vertically in Z An example of an object with a textured surface is the metal door on a floppy disk Note Before acquiring an image
51. tion then release the mouse button The cross section appears in a new window accompanied by roughness statistics I stepht bi Profile OF ES PeakfValley Skewness Kurtosis nm 262748 0 Ao 1 44 3 On the cross section click the left mouse button to display a set of red colored markers The position differences associated with the markers are displayed I stepht bii Profile Delta Z 92 26 Delta xY 91345 97 Theta 0 06 nm 262748 0 T Ambios Technology Xi 100 Image Display and Analysis To make a step height measurement move one marker to the top of a step and the other marker of the same set to the adjacent valley To make a period measurement move one marker to the beginning of a step and the other marker of the same set to the beginning of the next or subsequent step 4 Click a second time on the profile to display a set of blue colored markers if you want to take a second measurement To remove a set of markers drag them off the screen using the mouse Region Tool To compare a region of the image with the entire image 1 Select Tools Region Tool or click E 2 Move the mouse to position the cursor near the area of interest press and hold the left mouse button down while dragging the cursor over the area of interest then release the mouse button Statistics for the region in the box are displayed to the right of the data for the entire image 3 Click the left mouse button to remov
52. uces a black fringe on the CCD camera Now if the next point on the surface captured on the adjoining pixel is at the same height it will also be measured as a black pixel However if this point is exactly 1 2 A wavelength higher 275nm it will also show a black pixel and similarly any multiple of this in height difference will result in an identical data point Hence Smooth Mode can get confused when individual step height differences are larger than 1 4 1 137nm This is not always the limitation it sounds since by using a higher magnification objective sharp steps can often be flattened Hence the pixel height difference can be limited to less than 1 2 and data can still be collected Phase measurement is an ideal technique for smooth surfaces without steps or discontinuities 4 Ambios Technology Xi 100 Introduction Texture Mode White Light Measurement For measuring rougher surfaces or those with steps or discontinuities a different technique is employed When filtered white light filament source is used to illuminate the sample the interference fringes are present over a very small depth of focus PZT Motion UO envelope A AN AN A Re Filtered SU UV UY E Phase is linear e Slope of N bon o modulation ui q envelope is be linear The interference fringes contain information about the phase to lt 1nm and also have a unique assignment of fringe count The microscope head is scanned vertically through the surfac
53. x appears giving you two choices Selected Image or Print Screen SCREEN CAPTURE TBD e Click the Selected Image button to print only the active image e Click the Print Screen button to print the entire window of information including all screens menus and toolbars that show on your monitor The standard Windows Print Setup screen appears Print Setup Print Setup Select this command to access the Print screen to change print options Selecting this option displays a standard Windows dialog box Autos elect Tray Most Recently Used File List This list of most recently used files MRU is updated each time a file is opened or saved up to five files are listed To reopen one of these files click on its entry in the MRU list Exit Select this command to close down the software All unsaved data will be lost Ambios Technology 31 Xi 100 Non Contact Optical Profilometer Edit Menu Copy Copy to Clipboard Select this command to place a copy of an image cross section histogram or 3D view on the system clipboard from which it may be pasted into another application for presentation Undo Undoes the most recent filter action except for subtraction Image Menu The Image Menu provides dialog boxes allowing you to sequentially number your images view the parameters of the selected image and set the defaults for the selected image You can also access these features by right clicking the mouse when you h
54. xcludes a user selected area from the line by line filter calculation For example the sample may have numerous bumps or holes that you don t want to include when applying the filter Surrounding these features excludes them from the calculation of the average height of the line of data e Use Region Calculates the line by line filter using only an area of the sample that you select Subtraction e Allows you to determine the difference between a reference image and a subsequently acquired image The images must be the same size e You can also use the multiplier to add images by changing the sign of the multiplier to a minus sign Tools Menu Use the analysis tools to take measurements of the image Pixel Tool To view the coordinates of any image pixel 1 Select Tools Pixel Tool or click use the mouse to position the cursor at the area of interest The x y and z coordinates are displayed in the status bar at the bottom of the screen 2 Click another area to move the cursor 3 Double click the left mouse button to remove the cursor from the screen Ambios Technology 43 Xi 100 Non Contact Optical Profilometer Profile Tool To create a cross section profile and take measurements Li 1 Select Tools Profile Tool or click w i 2 Place the cursor at the point you want to begin the cross section press and hold the left mouse button down while dragging the cursor to the point at which you want to end the cross sec
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