User`s Manual - Newport Corporation
Contents
1. amplification at resonance Q and a Pendulum horizontal decoupling system for effective isolation from low amplitude vibration The leveling valves provided with the system control the height of the table to within 0 01 inch 0 3mm accuracy This tolerance is adequate for most applications More accurate valves are available for specialized applications 3 2 Performance Adjustments Once the system is assembled and floating it is possible to make minor adjustments to suit your individual needs These adjustments involve the system air pressure the control arms and needle valves WARNING Once the system is floating keep fingers away from the area between the support plate and the top of the isolators Any object between these points may be caught if the load or air supply changes Personal injury may result 3 2 1 Stabilizing high center of mass loads If your load has a high center of mass or if the load is particularly heavy the system may oscillate In this case lower the air pressure or close the needle valves slightly This may improve stability and reduce the oscillation or hunting A rule of thumb for determining high center of gravity C G system stability is shown in Figure 16 If the combined center of gravity of the payload is within the stable region the system will be stable If the combined C G is inside the may be stable region the system may be stable If the combined C G is outside bo2. ARP 0 00 16 2 2 5 Connecting Air LINES crror a SE 16 2 3 Squaring and Leveling the INT Frame sssneneesessssseerresssssese 18 2 3 1 Leveling the INT frame for the rigid N and isolated Veron A eona auteet ndsaneouastc 18 ZA Tnstahne the Table eena N 19 2 3 Leveling the table On the Ttae cerusisnirini nka 20 2 5 1 Leveling the Table on INT System ee eeecceee eee 20 20 TOA Te Pa DIS rursncernepu a aulamaaincbebactendles 20 2 7 Adjusting Leveling Valve Sensors ccccccccsssseseseeeeeeeeeeaeeeeees 20 3 Section 3 Operation 22 Sak Principles Or Operation cccdarsiitanieticntisiivaakeudsacetisiwaientscneaaaes 22 32 Perormance Adj stmen Seenen cance nets ZZ 3 2 1 Stabilizing high center of mass loads cc eeeeeeeees 22 3 2 2 Improving leveling response tiMes eeessessseeeeeessse 23 3 2 3 Table loads and or load positions change 0008 23 SO AVIAIIIE NANCE iaaa a ui leeoiechctul eloiiaieeieiads 23 JoL CE eeraa R a 23 Io A O ae at ose reread teeda ea tea nestildetacn albanien ats 24 4 Section 4 Troubleshooting 25 Ak Syse n DOES NOL PIO AU ie xrtyst unde cites ioratene crea weeeccoen eda 25 42 Poor Isolation PerrOrmane sicisisiatissesevieiedathsiemarieieiehe cutee 293 Bed eR OSC OS a a E A tiene 29 4 4 System Leaks Air Constantly ccniccntsenenieceseioon eae 26 Section 5 Factory Service 27 AD Obtaining Factory Service ioiiececanesssscvicaene
3. Newport Integrity VCS Vibration Control System provides an ideal working platform for vibration influenced devices such as interferometers microscopes and balances Sensitive instruments such as these will show significant improvements in resolution and repeatability when isolated from floor motion by the Integrity VCS pneumatic suspension system Special care was taken to ensure excellent performance in the 10 50 Hz floor vibration frequency range corresponding to dominant ambient vibration frequencies common to multi floor buildings The INT pneumatic isolators provide excellent protection against both vertical and horizontal floor motions These optical table systems integrate Newport s rigid laminated honeycomb panel damping technology and pneumatic isolation systems to provide a mounting platform which is rigid yet thin and lightweight The system accommodates high center of gravity loads with exceptional stability Optional casters make the system easy to move without heavy equipment It is possible to tailor the system to a wide variety of applications using the range of sizes and the optional storage accessories 1 2 Getting Started Please read this instruction manual thoroughly before assembling the vibration control system The individual components have been assembled at the factory and require only final system assembly and performance adjustment 1 3 Unpacking and Inspection The components of your Newport Vibratio
4. masisaatiarandengntatelanas 2i 5 Service Form 28 vi List of Figures Figure 1 INT leg weldment with shipping bracket being removed 12 Figure 2 INT leg weldments and cross brace positioning 0 0000008 12 Figure 3 Leveling valve mounting holes located on the cross brace should be positioned inward and facing upward toward the top of the O S ira EEE A E T ects aaa E E E eas T ita 13 Figure 4 Connecting cross braces to INT leg weldments 006 13 Figure 5 Tightening the cross brace bolts to the leg weldment 14 Figure 6 Completed INT frame assembly ccc cceeennneteeeeeeeeeeeees 14 Pisure sy eveline Valve lOCAU OM seesi bens tomeeiaaastes 15 Figure 8 Master Leveling valve installed on cross brace 0000e008 15 Figure 9 Location of Master slave Valve cccccccccccecceeceeeeeeeeeeeeeeeeeeeees 16 Figure 10 Air regulator filter ARF being installed on leg weldment 16 Figure 11 Pneumatic plumbing diagram for isolated version INT system 17 Figure 12 Tubing connection for Master isolator eeeeeeeeeeeeeeeeeeees 17 Figure 13 Tubing connection for master slave 1solator cccsssseeeeeeeeeeees 18 Proure 14 Levene the INTIME e E 19 Figure 15 Close up of leveling feet used to level the INT frame 19 Figure l0 System Stability diagrams ccc a a EN 23 Section 1 General information 1 1 Introduction The
5. vertical structures such as exterior walls or support columns By locating the table near these structures the effects of low frequency floor motion will be minimized thus increasing isolator performance It is also advisable to avoid locations adjacent to major sources of vibration from operating machinery such as elevators air conditioning plants or factory equipment WARNING The payload is not attached to the isolators In the event of an earthquake the system may collapse For areas susceptible to earthquakes we recommend that earthquake restraints be installed on each vibration control system 1 6 Air Supply Requirements A constant supply of air must be connected to the isolators during operation After initial setup and filling the isolators consume air only when the leveling valves adjust the pressure to compensate for changes in the load on the table Bottled nitrogen or mechanically compressed air may be used The required pressure is determined by dividing the total load including table weight by the total isolator diaphragm area 9 5 in per isolator plus 5 10 psig For example if the table plus load is 1850 pounds and will be mounted on 4 isolators the required pressure 1s 1850 lbs 4 9 5 in 10 psig 59 psig Note that the maximum operating pressure for the system is 90 psig 6 3 kg cm The Newport Model ACWS or ACGP air compressor is an extremely quiet source of clean pressure regulated air
6. INT frame as shown in Figure 14 The level measures if the frame is level in the X Y plane Use the 1 open end wrenches provided to adjust the four leveling feet until the frame is level Figure 15 One wrench is used to hold the lock nut while the other is used to rotate the bolt This will either raise or lower the table depending on the direction the screw is rotated Adjust the leveling feet until the frame is level 19 Figure 14 Leveling the INT frame te 1 50 nominal Figure 15 Close up of leveling feet used to level the INT frame 2 4 Installing the Table WARNING Payloads are heavy Use a forklift or other appropriate equipment Be sure to use proper lifting procedures to avoid severe personal injury With the INT frame assembled and leveled as described in Section 2 2 raise the table and position it above the INT frame CAUTION When lowering the payload on to the isolators do not allow the payload to shift sideways Doing so could damage the isolators 20 2 5 Leveling the table on the frame 2 5 1 Leveling the Table on INT System Make sure the table is resting on all four table support plates and does not rock when pressed down on at any of the four corners Make sure all 4 isolator leveling feet are still in contact with floor If the table is not in contact with all four support plates and rocks adjust the appropriate leveling foot until the table support is in contact with the bottom o
7. If another compressor or plant air is used the Newport model ARF Air Regulator Filter should be used to ensure maintenance free operation These filters prevent water and dirt from getting into the leveling valves and causing the valves to fail due to clogging The supply should include a shut off valve so that the air may be shut off during maintenance or extensive setup when the load is changed drastically CAUTION Bottled carbon dioxide CO2 is not recommended since icing can occur during rapid filling of the isolators 1 7 Warranty Information Warranty information may be found on the page preceding the Table of Contents in this manual Should it become necessary to exercise the watranty contact your Newport representative to determine the proper course of action Newport Corporation maintains offices throughout the United States and other locations worldwide Refer to the back cover of this manual for the addresses and telephone numbers of these offices 10 2 Section 2 Unpacking and Assembly 2 1 Unpacking and Inspecting Unpack the Integrity VCS leg assemblies the cross braces and all of the hardware Inspect all of the parts for shipping damage There are 2 different versions of the INT system rigid and isolated The parts shipped with your Integrity VCS vibration control system are shown below Isolated A Version Rigid N version O Description Qy INT cross 3 braces 2 INT cross 3 braces 2 braces a
8. Integnty VCS Users Manual QD Nevwyport Experience Solutions Warranty Newport Corporation warrants that this product will be free from defects in material and workmanship and will comply with Newport s published specifications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever first occurs Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPOR
9. T CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2014 2014 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings Newport Corporation 1791 Deere Avenue Irvine CA 92606 USA Part No 90047911 Rev B Table of Contents Wanani Y sath tee desc Slaw tte eesti ed sci Slaw tare on clean eo 1 Table or COMENS erasian i acai out het wueasboas tion aca ieueeemauns 1V Listol FoU Sp e vi Section 1 General information 7 Hilt Modu MOMs sd A a outa adca aces 7 WD GCI SlAr eC as et cect estonia hee tanec iacdeh ieee 7 Lo Unpacking and Inspec Uosis a daatias 7 l4 Dalety COMSIGCTAUONS seirena e a 8 Is SDV SlCM FLAC CIM Css ia a a arene acca 8 1 6 Air Supply Requirements s cisvcisccdsnstuwastshssord aridustarsicanderstawesdabeiaes 9 LF Warranty Mormane n 9 2 Section 2 Unpacking and Assembly 10 ZA Unpacking and Inspec tne scenei E E 10 22 INT Prime ASS Ci DY cies secaetenttalsa aus cceniad soe nua cused cu caasmtawyescasenet muss 11 2 2 1 Installing Leveling Valves cccccccccccccessseeeseeeeeeeeeees 15 2 2 2 Installing the Air Filter Regulator
10. T frame The cross brace used on top 2 pcs each has 2 holes drilled in it These holes are used to mount the leveling valve brackets and should be positioned inward The cross brace used on bottom 1 pc has multiple 8 32 holes drilled in it for users to mount accessories and should be facing upward see Figure 3 13 Figure 3 Leveling valve mounting holes located on the cross brace should be positioned inward and facing upward toward the top of the frame Figure 4 Connecting cross braces to INT leg weldments Bolt the cross braces one at a time to the INT frame assembly using the 14 bolts washers and lock washers provided with the INT frame Use the 7 16 wrench to tighten the bolts to a torque of 6 ft lbs 14 Figure 5 Tightening the cross brace bolts to the leg weldment CAUTION Do not over tighten The bolts can be stripped if excessive force is used Tighten to a torque of 6 ft lbs After all the cross braces are tightened place bubble level on both sides of the frame and adjust the leveling feet as needed see Figure 6 and Figure 14 ae ka AY 3 Figure 6 Completed INT frame assembly 15 2 2 1 Installing Leveling Valves If your frame is the non isolated N version you do not have leveling valves Please skip this section of the assembly instructions Go to section 2 If your INT system 1s the isolated version A three leveling valves will need to be mounted to the f
11. Use the ARF filter regulator to prevent this situation 4 2 Poor Isolation Performance The following may lead to poor isolation performance of your system 1 Vibration may be transmitted to the table through direct physical contact of equipment with external sources of vibration including cables 2 Isolators that float too high too low or are not centered may conduct floor vibration to the table top Centered isolators will remain centered unless the payload and isolators are moved relative to each other 3 Equipment on the payload may be vibrating at a resonant frequency of other components Improve the rigidity of the mounting for that equipment or remove that item from the system 4 Air currents or pressure fluctuations may be disturbing components on the payload 4 3 System Oscillates If the system oscillates or hunts you may have a set up with a high center of mass or the needle valve opening may be too much Refer to the 26 information in Section 2 7 Section 3 2 1 or consult your Newport representative or Newport Corporation for further assistance 4 4 System Leaks Air Constantly All Newport isolators and valves are pressure leak tested prior to shipment Check all tubing connections for leaks with soapy water Tubing that is crushed out of round or that is not cut squarely may not seal in the push in fittings Use a single edge razor blade to cut the tubing cleanly If testing with soapy water indicates that
12. e selected such that they form the largest triangle possible under the table The larger the triangle the more stable the system will be When two or more isolators are controlled by the same valve they act as a single large isolator supporting the table at the center of force of the several isolators The floating height of the system is determined at the valve position 17 Connect air lines to the isolators as shown in Figure 11 Figure 12 and Figure 13 When cutting tubing be sure the ends are round and cut squarely This is best done with a single edge razor blade scissors will deform the tubing causing leaks The connections are detailed in Figures 11 12 and 13 Use translucent tubing to connect the air supply to the ARF Be sure the connections are firm by tugging on the tube Isolator 4 corners Figure 11 Pneumatic plumbing diagram for isolated version INT system Sensor Table Bottom mi Leveling rm Valve Control Arm Adjustment SETEN Air Supply Line INT Frame al T s Metering Needle Valve Black Tubing Attachment Screws Barb Fitting Figure 12 Tubing connection for Master isolator Leveling Valve Table Bottom Air Supply Line Tee fitting Elbow fitting Grey Tubing Elbow fitting on isolator on isolator Figure 13 Tubing connection for master slave isolator 2 3 Squaring and Leveling the INT Frame 2 3 1 Leveling the INT frame for the rigid N and isolated versions A Place the bubble level on the
13. either the isolator or valve are leaking contact Newport Customer Service 2 Section 5 Factory Service 4 9 Obtaining Factory Service To obtain information concerning factory service contact Newport Corporation or your Newport representative Please have the following information available 1 Model number 2 Purchase order number 3 Complete description of the problem If components are to be returned to Newport Corporation you will be given a Return Number which you should reference in your shipping documents Please fill out the service form located on the next page and have the information ready when contacting Newport Corporation Include the completed service form with any parts or components that are returned 28 Service Form Vibration Control Products Name RETURN AUTHORIZATION Company Please obtain prior to return of item Address Country Date P O Number Phone Number Item s Being Returned Model Serial or manufacturing date Description Reason for return of goods please list any specific problems Please Describe the Problem Attach additional sheets as necessary Where is the Equipment Installed factory controlled laboratory out of doors etc Maximum Air Pressure available Regulated Yes No Any additional information If special modifications have been made by the user please describe below 29
14. elatively corrosion resistant It may be cleaned by applying non abrasive liquid household cleaner to a rag and wiping the isolator Avoid abrasive cleaners 24 3 3 2 Air Quality Oil water or debris in the air supply may contaminate the leveling valves or isolator damping system and degrade performance Use of the Newport model ARF Air Regulator and Filter in the air supply will prevent this occurrence The filter does require occasional cleaning Drain your air compressor frequently to make sure that moisture trapped inside is drained Please refer to your air compressor manual for detailed instructions 25 4 section 4 Troubleshooting 4 1 System Does Not Float Use the following procedure if the system does not float when pressure is applied to the isolators 1 Ensure that the supply pressure is 5 10 psig 0 4 0 7 kg cm2 above the pressure reading of any of the leveling valves If the load is increased the pressure should be increased to maintain the difference between supply and valve pressure Refer to Section 1 6 2 Check to see if all air lines are connected properly and the supply pressure is adequate see step A Refer to Figures 10 11 and 12 Be sure that the needle valves are not closed completely 4 Check each leveling valve for clogging To do this press the control arm down Air should flow into the isolator accompanied by the familiar sound of moving air Repair or replace any clogged valve
15. f the table 2 6 Floating the Table l Close the metering needle valve figure 12 on each isolator then open it 4 turn Turn on the air supply and adjust the regulator for the pressure calculated using the formula given in Section 1 6 This pressure must not exceed 90 psig 6 3 kg cmz Check all connections for leaks Correct or repair any leaks before proceeding If the table does not float within several minutes increase the air pressure until the table floats or adjust the valve height sensors to hold the control arms further down Confirm that the needle valves are open 4 turn per isolator supplied In clean room applications the EXH exhaust port on the valves may be connected to the clean room vacuum system to capture the valve exhaust NOTE Exhaust must be routed to a vacuum system Backpressure in the tubing will cause the exhaust air to leak from the valve 2 7 Adjusting Leveling Valve Sensors l After the system floats check the position of the top of the isolator The isolator should rise about 4 inch 6 mm If the isolator rises close to 2 inch it means the isolator is fully extended and at the end of its travel range The leveling valve sensors should be adjusted accordingly Adjust the control arm adjustment screw of each valve Figure 12 as required to obtain floating height When all isolators are adjusted re check the level of the payload NOTE this step should require only minor adjustment
16. n Control System are packed in individual labeled boxes Carefully inspect all components for shipping damage Report any shipping damage immediately to Newport and the shipping company 1 4 1 5 Safety Considerations The following terms are used in this manual that relate to your safety WARNING Warning is used to indicate dangers that could result in personal injury CAUTION Caution is used to indicate situations that may result in damage to components of your Newport Vibration Control System System Placement To ensure optimal performance from your INT Vibration Control System it should be located on a level surface Uneven floors or mounting surfaces may cause difficulty if their irregularity is outside of the range of the leveling feet The INT isolators must be mounted so that its axis is not more than 0 5 degrees from vertical This is necessary for the isolator to function properly in the horizontal mode Note 0 5 degrees is equal to 0 05 1 3 mm inches in 6 0 inches which is the isolator base dimension A typical spirit level will easily measure 0 5 degrees and can be used to check the vertical alignment of each isolator If the floor where the isolators are being mounted has a depression of more than 0 05 inches under one side of the base then the floor should be grouted or shimmed level at this location If the system is not located on the ground floor of the building it should be located near primary
17. nd leg leg braces and leg leg weldments weldments weldments weldments 1 1 8 open end 2 IPV Leveling frame leveling valve kit wrench Hex head ar screws washer 14 locking washer regulator and mounting bracket 7 16 wrench 14 translucent 40 feet air line tubing Tee connector Black hole oy al Bubble level 14 20 7 16 Hex head screws ae washer washer 7 16 wrench 11 Bubble level Isolated A Version Continue 10 mounting clips 1 1 8 open end frame leveling Black hole 100 gt il plugs 14 Black 40 feet tubing 14 NPT male tubing adaptor 3 8 wrench M5 x 0 8 6 36mm SHCS 2 10mm 2 2 INT Frame Assembly The Integrity VCS leg assemblies are shipped bolted together via two shipping brackets These brackets keep the INT leg assemblies upright during shipping Remove the two shipping brackets using the 7 16 wrench included with your INT system Each bracket has 4 bolts that must be removed 12 Figure 1 INT leg weldment with shipping bracket being removed P n e e vias j r te e i ur SS S A y Figure 2 INT leg weldments and cross brace positioning Roughly position the INT leg assemblies The distance between the assemblies should be about the length of the cross braces Cross brace length is roughly 5 7 9 feet depending on the size of your system WARNING Two people will be required to safely assemble the IN
18. rame Note that only three leveling valves are needed since three points define a plane The diagram in Figure 7 shows the location for the leveling valves Figure 7 Leveling valve location Two sets of holes have been pre drilled and tapped in the frame cross braces One set has been drilled in the leg weldment Attach brackets using 3 8 wrench first Attach the leveling valves to the bracket and use a 4mm allen wrench to tighten the M 5 socket head cap screws that came with the leveling valves See Figure 7 for valve location Mounted leveling valve to frame using mounting bracket provided Use the rectangular nut plate and socket head cap screws to bolt the leveling valve to bracket Figure Master Leveling valve installed on cross brace 2 2 2 2 2 3 Top of the leveling valve mounted about 1 8 from bottom of the tabletop after it is 1 installed Figure 9 Location of Master slave valve Installing the Air Filter Regulator ARF gt a Figure 10 Air regulator filter ARF being installed on leg weldment Attach the ARF air regulator to the mounting bracket Attach the mounting bracket to the INT leg assembly Figure 7 and Figure 10 Use the 4mm allen wrench to tighten the two M 5 socket head cap screws Connecting Air Lines The IPV leveling valve is shown in Figure 12 Three valves are used in all systems as only three points are required to determine a plane The leveling valve locations ar
19. s Do not move the small set screw near the pivot of the valve control arm Verify that the table is freely floating on the isolators Move the table gently from side to side about 1 8 inch You should not encounter any resistance Re check by moving the table up and down the same amount Again there should be no restriction of movement 21 Push one corner of the table down approximately 1 8 and release it The table should return to the original position within less than 4 seconds Response time may be adjusted as described in Section 3 2 2 If the table rocks back and forth oscillates vertically without settling down close all of the needle valve adjustment screws Then re open the screw by 1 8 to turn In each corner of the table gently push down on the table top The table should lower and then return to its starting position Gently push up from the bottom of the table The table should slightly rise then return to its original position If the table does not move freely either up or down adjust the height adjustment screws in the leveling valves until the table moves freely 22 3 section 3 Operation 3 1 Principles of Operation Newport Isolators provide one of the best methods of vibration isolation for critical applications The system operates on the principle of air pistons which are equivalent of soft springs The main advantage of the Newport system over other designs are low vertical resonant frequency with low
20. th regions the system will probably be unstable 3 2 2 3 2 3 3 3 3 3 1 23 May Be Stable Region Stable Region _ SS Figure 16 System stability diagram Improving leveling response times If the system is stable the re leveling response time may be decreased by increasing the system pressure In addition the needle valves may be opened until the system oscillates and then closed slightly This is desirable if components are moving over the surface of the table For systems where the loads are seldom changed slower re leveling may be beneficial This 1s accomplished by closing the needle valves slightly and or decreasing the system pressure Needle valves should be opened the same amount for each master isolator that they supply for the master slave side valve the needle valves should be opened twice the amount to supply air to both isolators on that side Table loads and or load positions change If the loads are moving or changing significantly the control arms may require adjustment Each time the load 1s changed check the relationship of the support plate to the top of each isolator If the desired 14 inch is not maintained adjust the overall system pressure and or the sensor positions Maintenance Newport Isolation Systems require little maintenance No periodic maintenance is required Cleaning Newport isolators are painted powder coated or zinc plated steel This coated material is r
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