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Measuring Microscopes MF/MF

1. Clamp screw T groove dimensions Scale 2 1 V block with Clam Swivel Center Support Holder with Clam Stage Adapter Stage Adapter B Order No 172 378 Order No 172 197 Order No 176 107 176 304 for 2017 Maximum clamping diameter 25mm 10 for swivel position Maximum clamp 35 Order No 3017 4020 Height from the mounting surface Minimum angle index 1 length mm B 176 310 for 2010 to the center 38 to 48mm Suitable for measuring screws or External External 50 W x340 D x15 H External other objects dimensions mm ee dimensions for Note Adapter B is dimensions 117 H x90 W x45 D Maximum horizontal clamping Mass 0 4kg one piece mm _ 280 D mm size 280x140mm MF C MF U C MF D Mass 1 5kg B 1 2kg Mass 0 8kg Maximum clamping size when MF U D ele nlemmodel MF C MF U C MF D MF C MF UC MFD inclined 10 65x140mm Note Size 2010 is used pp MF U D MF U D Mass 2 5kg Applicable model with stage adapter B Note The two pieces are provided as one set Applicable Note Size 2010 is used with MF C MF U C MFD Sizes 2017 3017 and model stage adapter B MF U D 4020 are usable with Sizes 2017 3017 and 4020 are Applicable Note Size 2010 is used with stage adapter usable with stage adapter model stage adapter B Sizes 2017 3017 and 4020 are Polarization Unit Differential Interference Contrast Unit Illumination
2. For transmitted illumination For reflected illumination Halogen Illumination Unit Order No 176 347 MF C 176 348 MF U C l 1176 447 MF D 176 448 MF U D Made up of lamp housing for reflected illumination and transmitted illumination and a halogen control unit The halogen control unit can be fixed to the rear of the column of the microscope main unit 12V 50W halogen lamp continuously variable brightness control Built in cooling fan includes an alarm for indicating that the fan has stopped A color filter can be attached External Reflected and transmitted illumination unit 91x106 dimensions maximum protrusion mm Halogen control unit 118 W x365 D x96 H Note MF U C is available only for transmitted illumination To denote your AC line voltage add the following suffixes to the order No e g 176 345A A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V 100W and 150W Fiber Optics Cable Illumination Unit External Light Source Order No 176 315 100W 176 316 150W 12V 100W halogen lamp No 517181 Rated life 1 000 hours 100W 12V 100W high brightness halogen lamp No 12BAD602 Rated life 50 hours Continuously variable brightness control External 76 W x235 D x120 H dimensions mm Fiberglass cable length 1 500 15V 150W halogen lamp No 12BAJ076 Rated life 500 hours 150W 15V 150W high brightness
3. Quick Release Mechanism and Zero set Switch Incorporated Common to MF C and MF U C q a Mg lt Zero set button The stage movement can be switched between extremely coarse and fine FREE and LOCK by using the quick release handles on the X and Y handles These handles are useful for freeing the stage when the distance to the measurement position is long or you want to quickly return to a reference position Because this mechanism uses the twist roller method switching causes little impact and enables smooth movement Because the display zero set switches are located near the handles you can focus on the eyepiece during measurement and keep your hand near the handle almost all the time except when adjusting the focus 1 Patent pending Japan 2 The zero set buttons are located on the X and Y axes not the Z axis Z Axis Handles Provided on Both Sides of Standard Model MF Cand MF U C 7 MF U C Because the Z axis handles are placed on both sides of the column in standard models the user can easily use one of them regardless of handedness The digital display can also be installed on either side of the column to set up an environment suited to the user s dominant hand Ergonomics have also been taken into consideration and the handle is located in a position where a user of replaced shorter stature can comfortably turn it P Quick release handle Tilting Optical Tube
4. QM Data200 two dimensional data processing unit and the Vision Unit manual image measurement system that detects edges with its installed digital camera It is now possible to perform vision AF by using a vision AF cable together with a vision unit thanks to the new motor drive Auto Focus Vision AF Common Option By using an optional vision unit and vision AF cable you can perform vision AF In the vision unit software QSPAK the position in the acquired image data with the highest contrast is detected and the auto focus operation performed This operation can be conducted faster than carrying out focusing with the naked eye which contributes to reduction in operation time and operator fatigue Motor Driven Option for MF U Power Product and MF U Power LAF Product or A turret must be selected for the MF U power product and MF U power LAF product By selecting the power turret and equipping the measuring microscope with an optional vision unit it is possible to change and detect the turret position This is a new function that is available in the QSPAK VUE version 4 1 and subsequent versions of the 10D vision unit software You can use the software to change and automatically detect the turret position so there is no longer any need to handle the turret Furthermore this also fixes the problem of forgetting to change calibration values when you change the magnification thereby providing you with a system
5. 176 79 1 176 792 E Model No MF UH2017D MF UH3017D MF UH4020D MF UF3017D MF UF4020D Order No 176 787 176 788 176 789 176 793 176 794 176 795 Optical tube eyepiece required Built in 1X tube lens reticle broken cross hair line width 5um observation TV camera 50 50 Built in 1X tube lens reticle broken cross hair line width 5um observation TV camera 50 50 Observation image Observation method Erect image BF DF only for MF UH and UF types simple polarization differential interference Eyepiece optional Adjustable diopter 10X eyepiece field number 24 two eyepieces provided as standard 15X 20X Turret Bright field BF Adjustable manual turret or adjustable power turret Select one Manual turret with BF sensor adjustable power turret required Bright field dark field BD Manual turret or power turret Select one Manual turret with BD sensor power turret Objective Bright field BF M Plan Apo M Plan Apo SL G Plan Apo series optional Bright field dark field BD BD Plan Apo BD Plan Apo SL series 7 axis Max workpiece height 220mm Feed mechanism Motor drive measuring speed max 20mm s LED Illumination unit required Halogen Transmitted Telecentric built in aperture diaphragm white LED light source stepless brightness adjustment equipped with cooling fan Reflected Kohler illumination with adjustable aperture diaphragm white LED lig
6. 12V 50W transmitted 513667 Long life type halogen lamp 12V 50W transmitted 12BAB345 Vision Unit 9UC Note PC and software are required Main unit halogen e N Twin fiber optics illuminator 100W FS objective conversion adapter Attaches BF lens to BD turret Foot switch 12AAJ088 Calibration chart 02AKN020 Calibration chart with holder 02ATN695 Real time process control program MeasurLink Inspection table creation program MeasureReport Note PC is required 359 798 Thermal printer DPU414 with connecting cable QM Data 200 Foot switch 12AAJ088 264 155 RS232C crossing cable 12AAA807 Note D sub 9 pin female female cable Foot switch Thermal printer DPU 414 12AAA846 with connecting cable GIF filter for light source 12AAG806 LB80 filter for light source 12AAG807 Note Use this with the fiber optics illuminator 100W External light source control cable 12AAG888 External light source control cable 12AAD128 LED ring light for FS objective Note Applicable only for 10X or lower FS objective M plan Apo series FS objective M plan Apo SL series 176 343 FS objective G plan Apo series 378 026 1 FS objective set B1 378 911 FS objective FS objective set B2 BD plan Apo series E 378 912 i FS objective FS objective set B3 BD plan Apo SL series 378 913 FS objective set D1 378 931 FS objective set D2
7. 378 932 FS objective set D3 378 933 Standard accessory Required For details see catalog No E14008 Motor Driven Measuring Microscopes MF MF U Series MF D MF U D To the next stage Mitutoyo a MF G2017D MF UG4020D MF UE2017D The binocular tube eyepieces and LED The turret objective lenses and LED illumi The turret objective lenses and LED illumi illumination unit are optional accessories nation unit are optional accessories nation unit are optional accessories A separate LED control unit and control unit A separate LED control unit and control unit A separate LED control unit and control unit are included are included are included Features E The measuring microscope s X Y and Z axes are now motor driven and the stage can be operated trom a remote control box A joystick is used to operate the X and Y axes and a jog shuttle is used to operate the Z axis thus realizing a natural feeling when handling the equipment Furthermore these microscopes are equipped with a Z limit that you can use to set the lower limit of the Z axis movement which enables you to prevent the objective lens from colliding with the workpiece E The operator is relieved from fatigue resulting from repeated handle turning E Installing a vision unit makes it possible to perform vision AF auto focus For the MF U power type and MF U power LAF type selecting the power turret makes it possible for the mic
8. Filter 378 092 378 080 n 12AAA645 For both the bright field for 5X and 10X aera eer 12AAA646 model and the bright 378 079 for 20X waren ND2 filter 12AAA643 NO field and dark field Order No 378 078 ND8 filter 12AAA644 model for 50X and SL20X For a lightsource GIE filter 112AAG806 Each polarizer analyzer is 378 076 for 100X of reflected provided as a one piece SL80X and SL50 illumination set Applicable model MF U C MF U D for 100 W fiber LB80 filter 12AAG807 Applicable model MF U C MF U D Note Use this with a polarization unit Illumination C Mount Adapter Order No 970441 This standard adapter is used to mount a device such as a digital camera to the TV camera port of a microscope Note This is not used when the Vision Unit is mounted na 45x22 5 H dimensions mm Applicable model MF C MF U C MF D MF U D MF C for both transmitted illumination and reflected illumination MF U C only for transmitted illumination 0 5X TV Adapter Including C Mount Adapter Positive type scale Negative type scale Stage Micrometer Order No 375 056 Scale length 1mm Minimum graduation 0 01mm Scale accuracy 1 L um L length 20 C between any two lines mm Scale Negative type Positive type External dimensions mm 76W x26 D Mass 169 MF C MF U C MF D Applicable model MF U D Note After purchasing
9. Front of display Because the resolution can be switched to 1um 0 5um or 0 1um for the digital display two or three axes which is a standard accessory for all models high discrimination measurement can be performed The zero set direction changeover and smoothing functions are also standard Zero can be set using the switch near the X or Y handwheel Because the general purpose RS 232C format is adopted for data transfer data can be output to a standard printer or personal computer Itis also possible to output the display readings to spreadsheet software The digital display can be installed on the left or right side of the column Factory installed option Highly Rigid Column Base Common to MF C MF U C MF D and MF U D Column The base that supports the column holding the optical tube and the rest of the microscope must be absolutely rigid to enable observation and measurement using any amount of magnification This series has been repeatedly evaluated from various aspects including a drop test transportation test and smoothing test and provides steady vision and consistent accuracy over the entire stroke To enhance rigidity horizontal ribs have been added within the column The power supply section is located outside the base to reduce heat effects for higher base rigidity and highly accurate measurement Proprietary Mitutoyo tests executed using appropriate procedures LED illumination Halogen illumination
10. and Y axes when not loaded 2 2 0 02L um L measuring length mm Minimum reading 1 0 5 0 1pm switchable Digital display Display axes X Y and Z axes Functions Zero setting direction switching Joystick X and Y axes drive lock button X and Y axes speed adjustment X Y and Z axes coarse fine adjustment button X Y and Z axes Remote BOX Jog shuttle Z axis drive limit setting Z axis emergency stop switch power source backup switch AF button vision auto focus effective when connecting to vision unit optional Reset button X Y and X axes counter data output button Main unit dimensions WxDxH 632x892x782mm 682x892x782mm 757x907x782mm Main unit mass 150kg 158kg 164kg Control unit dimensions 355x364x106 5mm Main unit mass 7kg Dimensions for control unit for 114x365x96mm illumination unit WxDxH Mass for control unit for illumination unit Maximum power consumption LED 3 5kg halogen 4kg 230W To denote your AC line voltage add the following suffixes to the order No A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V 1 Patent registered in Japan 2 Measured in conformance with JIS B 7153 Mitutoyo Specifications tor MF UD Motorized Motorized LAF Without Z axis scale Model No MF UG2017D MF UG3017D MF UG4020D MF UE2017D MF UE3017D_ MF UE4020D Order No 176 784 176 785 176 786
11. applications for a microscope and greatly improves its usability These objectives are also helpful when installed in a measuring microscope The M Plan Apo series and BD Plan Apo series are provided for bright field observation The SL super long specifications are available tor when a long working distance is required The G Plan Apo series is available corrected for observation through glass of thickness 3 5mm or 2 to 5mm to special order ML objectives Numerical Working o Model No Order No Magnification Aperture Distance Limited correction optical system For MF C MF D N A mm ML 1X 375 036 2 1X 0 03 61 0 ML 3X 375 037 1 3X 0 09 77 0 ML 5X 375 034 1 5X 0 13 61 0 ML 10X 375 039 10X 0 21 51 0 ML 20X 375 051 20X 0 42 20 0 ML 50X 375 052 50X 0 55 13 0 ML 100X 375 053 100X 0 70 6 0 Model No Order No Magnification N A Working Distance mm M Plan Apo 1X 378 800 3 1X 0 025 11 0 i i M Plan Apo 2X 378 801 3 2X 0 055 34 0 FS o bj ectives MPlan Apo 5X 378 802 6 5X 0 14 34 0 Infinity corrected optical system For MF U C MF U D M Plan Apo 7 5X 378 807 3 7 5X 0 21 35 0 For bright field BF observation and measurement M Plan Apo 10X 378 803 3 10X 0 28 33 5 M Plan Apo 20X 378 804 3 20X 0 42 20 0 M Plan Apo 50X 378 805 3 50X 0 55 13 0 M Plan Apo 100X 378 806 3 100X 0 70 6 0 M Plan Apo SL20X 378 810 3 20X 0 28 3
12. factory installed Order No depends on the destination option Slide Type Nose Pieces Factory installed Option Order No 176 314 1 The lens mounted at the centering mechanism standard position and the lens mounted at the focal point adjusting ee are a E Note The magnification of the lens mounted at the foca point djsing mechanism position is not guaranteed Order No 176 211 378 018 176 212 378 016 378 216 Order No 176 314 2 Supported For bright field and For bright field For bright field and For bright field For bright field Magnification of the lens mounted at the centering Note A High observation _dark field BD BF dark field BD BF BF mechanism standard position and that of the lens re elie 5 Number of ways 4 4 4 4 5 mounted at the focal point adjusting mechanism ak iar ee Standard fixed Standard fixed Standard fixed position are guaranteed PRN POGING Centering 1 position 1 position 1 position Note The two lenses are not parfocal and parfocal Centering and Centering and Centering and Applicable model MF C MF D mechanism parfocal parfocal parfocal 3 positions 3 positions 4 positions Driving method Manual Electric Power supply 100 to 240V AC external Turret 164 W x65 H x137 D dimensions 110x51 H Console box 108 W x72 H x193 D mm Cable length 3m Applicable model Required for MF U C MF U D Order No depend
13. halogen lamp No 12BAJ075 Rated lite 50 hours Continuously variable brightness control External 120 W x273 D x119 H dimensions mm Fiberglass cable length 1 500 For reflected illumination when selecting the halogen Applicable model ination unit with MF U C ME U D Order No depends on the destination Dual swan neck light pipe External Light Source Order No 176 343 Fixed to the rear of the microscope column Continuously variable brightness control Includes a condenser lens Auto brightness control can be used for the Vision Unit system with external light source control cable No 12AAD128 12V 100W halogen lamp No 517181 rated lite 1 000 hours 12V 100W high brightness halogen lamp No 12BAD602 rated lite 50 hours LB80 filter No 12AAG807 External 76 W x235 D x120 H includes only the light source dimensions __ Fiber optics cable length 700 from the rear fixed portion to the front edge mm Maximum fiber bending radius 60 Applicable model MF C MF U C MF D MF U D Order No depends on the destination A Reflected and Transmitted Illumination The light is projected vertically R downward onto the surface of Ane an inspected object through an Fg objective An LED or halogen lamp is selectable as the light source fo Image B Dual swan neck light pipe Light piped from a standalone halogen lamp unit and projected from two heads
14. mm Statistical processing value standard deviation range histogram and statistics for each measuring function statistics for each command 196 Display field Color TFT LCD with a backlight Tilt feature Available XYZ for linear scale input up to 3 axes RS 232C for connecting a PC measuring result RS 232C for connecting the counter of the measuring machine main unit VO connector FS for connecting a foot switch PRINTER for connecting a receipt or external printer measuring result USB FDD for connecting a USB FDD measuring result file measuring procedure file USB MEMORY for connecting USB memory measuring result file measuring procedure file File output of measuring result RS 232C output CSV format MUX 10 format Power supply 100V to 240V AC Maximum power consumption 17W without including options External dimensions mm Approximately 260x242x310mm including a stand Weight Approximately 2 9kg 260 Applicable model MF C MF U C MF D MF U D Order No depends on the destination 310 Thermal printer i Specifications DPU 414 Manufactured by SII gt PEC abla Printout example Connected to QM Data Order 200 k J Ne Counter display printing age T E N y Printing method FF a Number of printing digits i Printing speed External dimensions Standard accessories A Spare goods Please contact with your local Mitutoyo sales office P
15. of Standard Model MF U C and MF U D Comfortable observation is possible be cause the eye point can be adjusted to a position suitable for the user s stature The angle of the column can be fixed any where between 0 and 30 The reticle in the optical tube can be Stage Variations Including Long Stroke Common to MF C and MF U C X axis 400mm NN MF B4020 Inspected objects vary in size Widely used in every industry this series provides many measurement stroke variations This series offers a stage for long stroke measurement of 400x200x220mm in X Y and Z This is useful when measuring printed circuit boards shafts knife tools and other objects Although the standard model has a Z axis range of 220mm the Z axis can be extended with a column upgrade A swivel rotation mechanism is also provided as standard This mechanism is useful when fixing an inspected object in parallel with the table movement direction Only for models with a Y axis range of 170mm or longer Sliding Nosepiece Factory installed option for MF C and MF D Usually only one objective lens can be attached to an MF instrument limited com pensation optical system and this must be replaced to change the magnification Because up to two objective lenses can be attached to the sliding nosepiece the mag nitication can be quickly changed when this option is specified Note An external illumination source cannot be attached Mea
16. that is more reliable and easy to use 1 A separate RS 232C cable No 12AAA807 is required Turret Position Display in QSPAK This image corresponds to 4 hole power turrets and 4 hole turrets with sensors Laser Auto Focus Power LAF Type Only LAF laser auto focus can be performed by the power LAF product By employing AF that uses the TTL Through The Lens method in which a semiconductor laser beam with a wavelength of 690nm passes through the lens these microscopes can perform AF even on minutely small areas Laser auto focus has better repeatability than focusing with the naked eye and it can be used to measure heights Furthermore the following two types of focus functions are equipped as standard JF Just Focus which can be used to target the laser on the point where you want to focus in order to detect the height and TF Tracking Focus which always tracks the focus position Specifications for MF D Model No MF G2017D MF G3017D MF G4020D Order No Optical tube eyepiece s required 176 782 176 783 Monocular or binocular angle of column 25 Standard TV camera port for all models reticle broken cross hair line width 5um observation TV camera 50 50 176 781 Observation image Erect image Observation method Eyepiece optional Adjustable diopter Bright field observation 10X eyepiece field number 24 15X 20X Note Monocular one 10X eyepiece provided
17. the MF UB and UD types Measurement system High accuracy digital scale i 2 ie cen A Teo 2 2 0 02L um L measuring length mm Minimum reading 1 0 5 0 1 pm switchable Digital Holey Display axes X and Y or X Y and Z only for the MF UB and UD types Functions Zero setting direction switching RS 232C output Main unit dimensions WxDxH 562x730x667 MmM 624x745x667mm 632x892x782mm 682x892x782mm 757x907x782mm Main unit mass 65 5kg 69 5kg 130kg 138kg 144kg Control unit dimensions and mass 114 W x330 D x90 5 H mm 2 0kg I POE OR uG LED 70W Halogen bulb 70W with the illumination unit Note The following suffixes are added to the order No e g 176 668 10 to specify the User Manual s language 10 for English 11 for Chinese No suffix for Japanese 1 Patent registered in Japan 2 Measured in conformance with JIS B 7153 3 The value only in a transmitted illumination Standard 513667 12V 50W Long life 12BAB345 12V 50W Replacement halogen bulb reflected separate light source Replacement halogen bulb transmitted For details see p 26 13 Options System Diagrams Foot switch highly rigid type 12AAJ088 Calibration chart with holder RS 232C crossing cable O2ATN695 12AAA807 x1 Note D sub 9 pin female female cable Vision Unit 9C a 359 796 Note PC and software are required Focus pilot FP 05 LED type Real time process conte 375 057 Green 375
18. the microscope to allow S Green LED or Red LED fine focus adjustment by turning the electric jog dial by hand eConcentric circle pattern eSlit pattern By using a jog shuttle the variable speed coarse feed focus can be IA LA n n changed in 7 levels wy y LLI Lu Maximum feed 0 4um Light Source a aa mai Maximum drive speed 3 2mm s e The focal point is the position where the top and bottom of the pattern are aligned m eT e The brightness can be adjusted according to the reflectivity of the surface U L WOES A aa JEE e Observation with a wide field of view on a TV monitor using 5X optical Power supply 100 to 240V AC Maximum power consumption approximately 20W magnification is available External dimensions Main unit g69x99 L Focusing Approximately 1 5m when using a 20X lens This is a reference value mm Console box 108 W x72 H x193 D reproducibility based on an inspection performed using our standard sample Applicable model MF C MF U C 0 5X 0 1 within 2 3 of the center of the field of view Optical magnification Magnification accuracy Note This unit is made to order Camera Supports up to 2 3 inch TV adapter Equipped with C mount centering or parfocal adjusting mechanism Power supply 100 to 240V AC Maximum power approximately 10W External dimensions mm Applicable model Main unit 131 H Console box 90 W x78 H x178 D MF C MFD MF U C MF U D Note The combination of MF U and FP 05U is a
19. twin fiber optics illuminator or ring fiber optics illuminator LB80 filter Stage related Power focusing Objective 12AAA646 ND8 filter 176 314 2 factory installed option 12AAA644 aT ide type nosepiece 176 314 1 factory installed option aE m aa 1010 size 2010 size 2017 3017 4020 size 5X ML objective 375 034 1 Rotary table with fine feed wheel A Stage adapter B Stage adapter Rotary table with fine feed wheel B 10X ML objective 176 305 176 310 176 304 176 306 375 035 1 20X ML objective Holder with clamp 176 107 375 051 V block with clamp 172 378 Swivel center support 172 197 50X taa Rotary table with fine feed Holder with clamp 176 107 wheel with scale 172 198 V block with clamp 172 378 100X ML objective Swivel center support 172 197 375 053 Holder with clamp 176 107 Usable with stage adapter 176 304 V block with clamp 172 378 _ Swivel center support 172 197 Vibration damping stand 176 308 1 Order No depends on the destination Mounting stand microscope QM Data 200 176 309 Vertical system rack for Vision Unit 998923 Lens cleaning set 12AAA165 Mitutoyo ae Power focus unit RS232C crossing cable 12AAA807 x1 Note D sub 9 pin female female cable Focus pilot FP 05U 375 067 green 375 068 red Note Factory installed option 15X eyepiece 378 857 two RS232C cr
20. with cramp 176 378 3X ML objective 375 037 1 Slide type nosepiece 176 314 1 factory installed option 176 314 2 factory installed option l l b m m me e e e e e e e e e e eee with connecting cable MeasurLink 176 308 Inspection table creation program Foot switch highly rigid type MeasureReport Mounting stand microscope QM Data 200 Vertical system rack for Vision Unit 12AAJ088 176 309 998923 Note A PC is required Lens cleaning set Stage micrometer RS232C crossing cable 12AAA165 375 056 12AAA807 Mitutoyo 1 Order No depends on the destination External light source control cable 12AAG888 Main unit illumination Remote box reflected transmitted GIF filter 12AAA645 LB80 Filter 12AAA646 Transmitted Optical tube 10X eyepiece 378 866 two 378 866 5 one 15X eyepiece 378 867 two 378 857 5 one 20X eyepiece 378 858 two 378 858 5 one mH HE EF HE EE EE M al mH HH EE EE Polarization differential Differential interference unit 378 080 5X 10X interference 378 078 50X SL20X 378 076 100X SL50X SL80X Polarization unit 378 092 l l l 378 079 20X l l l l Peripheral device for stage Rotary table with fine feed wheel B 176 306 Stage adapter 176 304 Swivel center support 172 197 L Refer to the corresponding page for details
21. 0 5 M Plan Apo SL50X 378 811 3 50X 0 42 20 5 M Plan Apo SL80X 378 812 3 80X 0 55 15 0 M Plan Apo SL100X 378 813 3 100X 0 70 13 0 M Plan Apo SL200X 378 816 3 200X 0 62 13 0 M Plan Apo HR 50X 378 814 4 50X 0 75 5 2 M Plan Apo HR 100X 378 815 4 100X 0 90 1 3 G Plan Apo 20X t3 5 378 847 20X 0 28 Air conversion 29 42 G Plan Apo 50X t3 5 378 848 3 50X 0 50 Air conversion 13 89 Lens set B1 378 911 A set including M plan Apo 10X 20X 50X and 100X Lens set B2 378 912 A set including M plan Apo 2X 5X and SL20X Lens set B3 378 913 A set including M plan Apo 5X 10X 20X and 50X Replacement adapter 378 026 1 Used when a bright field BF lens is attached to a for FS objective bright field and dark field BD turret For observation and measurement using a bright field or dark field BD ane See an ceiticdey nna Working Distance mm BD Plan Apo 2X 378 831 7 2X 0 055 34 0 BD Plan Apo 5X 378 832 7 5X 0 14 34 0 BD Plan Apo 7 5X 378 830 7 7 5X 0 21 34 0 BD Plan Apo 10X 378 833 7 10X 0 28 33 5 BD Plan Apo 20X 378 834 7 20X 0 42 20 0 BD Plan Apo 50X 378 835 7 50X 0 55 13 0 BD Plan Apo 100X 378 836 7 100X 0 70 6 0 BD Plan Apo SL 20X 378 840 7 20X 0 28 30 5 BD Plan Apo SL 50X 378 841 7 50X 0 42 20 0 BD Plan Apo SL 80X 378 842 7 80X 0 50 13 0 BD Plan Apo SL 100X 378 843 7 100X 0 55 13 0 Refer to Catalog No E4191 MICROSCOPE UNITS AND OBJECTIVES for details BD Plan Apo HR 50X 378 845 50X 075 52 BD Plan Apo HR 100X 378 846 100X 0 90 1 3 Lens se
22. 058 Red program MeasurLin Inspection table creation program MeasureReport QM Data 200 Note PC is required 264 155 RS 232C crossing cable 12AAA807 Note D sub 9 pin female female cable 10X eyepiece 378 866 two 378 866 5 one Thermal printer DPU414 Data calculation processing with connecting cable i Foot switch Foot switch highly rigid type E 12AAA846 12AAJ088 Display data printing Thermal printer DPU 414 with connecting cable 15X eyepiece 378 857 two 378 857 5 one 20X eyepiece 378 858 two 378 858 5 one RS 232C crossing cable 12AAA807 Note D sub 9 pin female female cable 10X protractor eyepiece 375 04 043 10X digital protractor eyepiece 176 313 Main unit illumination reflected transmitted GIF filter for light source Reticles j ee ar ae Reticles Transmitted reflected _ ea ere Twin fiber optics illuminator 100W 12AAG806 illumination for main unit Sake 176 343 ee illumination LB80 filter for light source f GiFfitr 3 Ring fiber optics illuminator 100W 12AAG807 2 23 7 7 ea ir er ee 176 366 Note Applicable only for 10X or lower LED ring illuminator white External light source control cable 176 367 2 external brightness adjuster J 12AAD128 Note Applicable only for 10X or lower ND2 filter 12AAA643 l i External light source control cable Note Use this with a
23. Catalog No E14003 Meeting performance expectations for measuring microscopes Mitutoyo Microscopes that also serve as measuring instruments Expectations for Measuring Microscopes A measuring microscope can be used to perform both measurement and observation inspecting a variety of objects including semiconductors electronic and electrical components automobile precision components resin moldings tools and medical products For example this type of microscope can be used to measure an object that is too soft for contact measurement or the diameter of a hole that is too small for a measurement probe to contact A balance between optical performance overall accuracy and ease of use is an important requirement for a measuring microscope A measuring microscope enables you to observe elements that have either been invisible or difficult to see and f measure them Mitutoyo believes that expectations for measuring microscopes will continue to grow and that user friendliness high measurement data throughput and environmental friendliness will be demanded at the same time To play our part in supporting essential technologies in the industry we will continue to provide high quality high definition measuring microscopes while staying true to our commitments and beliefs Mitutoyo From Design and Development to Support after Delivery Mitutoyo designs develops and manufactures all microscope pa
24. Required Standard accessory Holder with cramp 176 107 V block with cramp I I 172 378 ae e 2 RS232C crossing cable 12AAD128 152820 20 m m e e e e Note D sub 9 pin female female 7 cable Thermal printer DPU414 QM Data200 with connecting cable 264 155 ND2 Filter 12AAA643 ND8 Filter 12AAA644 Reflected Data calculation processing Foot switch highly rigid type 12AAJ088 Vision AF cable 12AAN358 Foot switch highly rigid type 12AAJ088 Calibration chart 02AKN020 Calibration chart with holder 02ATN695 GIF filter for light source 12AAG0806 Vision unit 10D 359 763 QSPAK VUE LB80 filter for light source 12AAG807 Twin fiber optics illuminator 100W 176 343 Control unit l J MF U D Focus detection a I H l G e e e e e e e e es ess Motorized 1 zi I 375 067 green 375 068 red J Note Factory installed option l Revolver objective s ba RS232C crossing cable Ooo 12AAA807 i 1 Note D sub 9 pin female female cable Note Make sure that you select this cable for Bright field electric LAF Note Objectives and turrets for LAF are factory installed options Bright field dark field D 1 Order No depends on the destination Optional Accessories Lenses Our eyepieces provide a wide field of view with field number 24 when using 10X magnification to enable easy observation an
25. Ww m inn m A l 551 1203 m1 20 3 _ 734450 p 726 3 50 E 234 50 300 50 726 3 50 MF C MF U C 2010 261 OEE 171 562 551 741 3 50 551 741 3 50 4 268 5 100 355 100 268 5 100 MF U C 261 MF C 621 888 3 85 14 281 5 150 621 4 281 5 150 401 150 888 3 85 MF C 4020 MF UC 90 5 a 90 5 o j 327 pel 2499 738 OEE 457 5 4 621 120 3 305 200 452 200 903 3 100 305 200 452 200 903 3 100 Note All information regarding our products and in particular the illustrations drawings dimensional and performance data contained in this pamphlet as well as other technical data are to be regarded as approximate average values We therefore reserve the right to make changes to the corresponding designs dimensions and weights Th
26. as standard Binocular two 10X eyepieces provided as standard Objective optional ML objective 3X provided as standard 1X 5X 10X 20X 50X 100X Max workpiece height Z axis Feed mechanism 220mm Motordrive Maximum measuring speed 20mm s LED Illumination Transmitted Telecentric built in aperture diaphragm white LED light source stepless brightness adjustment equipped with cooling fan Reflected Kohler illumination with adjustable aperture diaphragm white LED light source stepless brightness adjustment Control unit Power switch main switch AC power supply input connector 100 to 240V unit required Halogen Illumination filter Transmitted Telecentric built in aperture diaphragm 12V 50W halogen lamp stepless brightness adjustment with cooling fan Reflected Kohler illumination with adjustable aperture diaphragm 12V50W halogen lamp stepless brightness adjustment with cooling fan Control unit Power switch main switch AC power supply input connector 100 to 240V One GIF filter is provided as standard and mountable for both transmitted and reflected illumination Stage glass top Measurement system Measurement range 200x170mm 300x170mm 400x200mm Tabletop size 410x342mm 510x342mm 610x342mm Effective stage glass size 270x240mm 370x240mm 440x240mm Swiveling angle 3 Maximum table loading 15kg High accuracy digital scale Measuring accuracy X
27. axes Jog shuttle Z axis drive limit setting Z axis emergency stop switch power source backup switch Remote BOX AF button vision auto focus effective when connecting to vision unit optional LAF button laser auto focus effective only for LAF models just focus JF tracking focus TF Reset button X Y and X axes counter data output button Laser auto focus LAF O O O a a a o 632x892x 632x892x 757x907x 608x790x 658x790x 733x790x 782mm 782mm 782mm 846mm 846mm 846mm Main unit mass 150kg 158kg 164kg 155kg 163kg 169kg Dimensions for control unit for illumination 355x364x106 5mm unit mm Main unit mass 7kg Dimensions for control unit for illuminati 114x365x96mm on unit WxDxH Mass for control unit for illumination unit LED 3 5kg halogen 3 5kg Maximum power consumption 230W To denote your AC line voltage add the following suffixes to the order No A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V 1 Make sure that you use RS 232C cable No 12AAA807 to connect a LAF model and a power turret 2 Patent registered in Japan 3 Measured in conformance with JIS B 7153 Optional Accessories System Diagrams Main unit illumination Data calculation processing reflected l transmitted l l RS232C crossing cable i GIF filter ND2 filter i l 12AAA807 RRACA TARAGA Note D sub 9 pi
28. cameras E Low noise design n aya hE rE a AA ic n 4 e a Ce sa 2 ai are PA p i E ag a P i i Fae E i S i h ahe aia i 7 awe ee oe eres r E E Pie ol N f ri ty p Er Mitutoyo lt MF UB2017C The turret objectives and illumination unit are optional accessories ee gt ae MF UB4020C The turret objectives and illumination unit are optional accessories MF UB3017C The turret objectives and illumination unit are optional accessories Specifications Without Model No MF UA1010C MF UA2010C MF UA2017C MF UA3017C MF UA4020C bright _Z2 sscale Order No 176 668 176 669 176 670 176 671 176 672 field With Model No MF UB1010C MF UB2010C MF UB2017C MF UB3017C MF UB4020C Z axis scale Order No 176 688 176 689 176 690 176 691 176 692 BD Without Model No MF UC1010C MF UC2010C MF UC2017C MF UC3017C MF UC4020C bright Z axis scale Order No 176 674 176 675 176 676 176 677 176 678 field dark with Model No MF UD1010C MF UD2010C MF UD2017C MF UD3017C MF UD4020C field Z axis scale Order No 176 694 176 695 176 696 176 697 176 698 ariel ue Tilting trinocular tube angle of column 0 to 30 Siedentoph type pupil distance adjustment 51 to 76mm built in 1X tube lens reticle broken cross hair line width 5um optical path switching observation TV camera 50 50 Erect image BF DF only for MF UC and UD types si
29. ch 0 2 to 0 2 Line width 7um No 12AAG836 MF C MF D i X No 12AAG877 MF U C MF U D 90 chain line Chain line pitch 0 2 to 0 2 Line width 5pm No 12AAG839 No 12AAG840 No 12AAG841 No 12AAG873 MF C MF D MF C MF D MF C MF D MF C MF D No 12AAG876 MF U C MF U D No 12AAG879 No 12AAG880 No 12AAG881 90 chain lines MF U C MF U D MF U C MF U D MF U C MF U D Chain line pitch 0 2 to 0 2 90 solid lines 45 chain lines 90 chain lines 60 chain lines Zeiss type pattern Line width 3um Chain line pitch 0 2 to 0 2 Chain line pitch 0 2 to 0 2 Chain line pitch 0 2 to 0 2 Line width 5um Line width 5um Line width 5um amp No 12AAG842 No 12AAG843 No 12AAG844 No 12AAG845 No 12AAG846 MF C MF D MF C MF D MF C MF D MF C MF D MF C MF D Cross haired graduation lines Concentric circles with Graduation lines Graduation lines O Gridiines 0 1 20mm graduation lines 0 1 10mm 0 05 5mm Imm 10mm Line width 7um 01 2 to 918 Line width 10um Line width 10um Line width 10um Line width 7um No 12AAG847 No 12AAG848 No 12AAG849 No 12AAG850 No 12AAG851 MF C MF D MF C MF D MF C MF D MF C MF D MF C MF D Metric coarse screw thread Metric coarse screw thread Involute gear reference rack Involute gear reference rack Unified coarse screw thread p 0 25 to 1 0 p 1 25 to 2 0 m 0 1 to 1 0 pressure angle 14 5 m 0 1 to 1 0 pressure angle 20 80
30. cted The plan apochromat specifications are used for the objective lens For the C Series an LED or halogen based lighting system can be used Higher lighting efficiency and sufficient illuminance within the optical system provide an environment for high magnification Mitutoyo In Pursuit of Measuring Accuracy Close to JIS Grade 0 Common to MF C MF U C MF D and MF U D X and Y axes 2 2 0 02L um or less Example Measuring Error Reference Measuring accuracy of each axis of a JIS B 7153 measuring microscope at 20 C Grade 0 2 0 01L um or less op php Grade 1 4 0 02L um or less L measuring length mm Grade 1 error limits Typical X axis performance oe must have high level optical performance and overall measuring accuracy ne This series iS useful for any measurement because it offers both long stroke measurement and high accuracy at the same time r to the JIS B 7153 measurement method for the X and Y axes The above measuring accuracy graph is an example and does not represent all main unit accuracies The digital scale built into the microscope is a photoelectric type transmission linear encoder with a maximum response speed of 50m min This highly accurate encoder was developed in an underground laboratory where the world s best scale accuracy evaluation technique is available Mitutoyo was the first
31. ction using our standard sample Screen internal measuring accuracy 2 5um or less Screen internal repeatability 20 1um or less Windows 7 QSPAK Vision Unit Applicable model MF C MF U C MF D MF U D Software QSPAK and calculation processor are required separately FORMPAK QV Optional software FORMPAK QV allows contour analysis and contour tolerancing against the nominal value from the data acquired using QSPAK e Contour tolerancing function e Fine contour analysis function e Report generation function CAD Import amp Export Optional software Operability has been greatly improved and the time required to create a part program has been greatly reduced by importing the CAD data DXF IGES as generated at the product design stage to QSPAK The measurement result from QSPAK can be converted to CAD data FEATURES e The nominal value of each measuring item is entered automatically e The graphics window can be used to calculate elements e Graphics data can be output in a specified CAD data format S amp S 8 H amp E 2 D Data Processing Unit QM Data 200 Features Displays high contrast color graphics on a large backlit LCD screen Enables frequently performed complex measurement such as measuring the distance between two circles to be performed by pressing just one button E Teaching function for measuring procedure Efficient measurement by performing measuring point navigation
32. d illumination unit are optional accessories optional accessories Features E Observation with a clear and flare less erect image and a wide field of view E Measuring accuracy that is the highest in its class and conforms to JIS B 7153 E Proven M Plan Apo BD Plan Apo G Plan Apo series high NA objectives from the FS optical system long working distance type E Integration of metallurgical and measurement microscope functions provides a high resolution observation and high accuracy measurement solution E Illumination unit retlected transmitted selectable trom a high intensity LED or halogen bulb required Only the halogen light source for transmitted illumination is provided as standard accessory A seperate light source for transmitted illumination must be ordered additionally as optional accessory E Variable aperture diaphragm reflected transmitted allows observation measurement while suppressing light diffraction E Variety of standardized stages in sizes up to 400x200mm E Quick release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity E Coarse fine feed handles equipped as standard on both sides allow precise focus and observation measurement regardless of handedness E High magnitication eyepiece observation up to 4000X when using M Plan Apo SL200X E Standard measuring microscope that has a wide variety of optional accessories including a Vision Unit and various digital CCD
33. d measurement of objects The standard objectives provide a bright image with a long working distance and less flare For both the bright tield and dark tield FS objectives plan apochromat specifications are used We think that being able to observe and measure objects without fatigue even for long periods of time is very important Eyepieces Eyepieces Fixed esata Index Ine i WF10X 24 WF15X 16 WF20X 12 line No i Po 378 866 5 378 857 5 378 858 5 af Stitt ote Japi Wig T a Order No 378 866 378 857 378 858 gs Main gt 2 pieces scale Magnification 10X 15X 20X a emers P3135 Digital Protractor Eyepiece Field number 24 16 12 oe Wied Magnification 10X Applicable MEC MF UC MFED MF UD Field number 1 model Protractor Eyepiece Fen eran eenee Line width 5um for both 90 Only the 10X model includes the eye shade ee 375 043 aa solid lines and 45 chain lines If using a measuring microscope older than the MF B series Magnification 10X unit Measuring range ORE OE A aa l i Arc minutes 0 00 to 369 59 with a binocular eyepiece select Order No 378 866 Field x F i i inber Detection met od Electrostatic capacitance encoder ye External dimensions mm 120x140 D Scale 360 5 Minimum reading 0 01 degree or 1 arc minute Applicable Zero set ABS INC selection degree model ME E NIFO Digital Functio
34. e stated standards similar technical regulations descriptions and illustrations of the products were valid at the time of printing Only quotations submitted by ourselves may be regarded as definitive Our products are classified as regulated items under Japanese Foreign Exchange and Foreign Trade Law Please consult us in advance if you wish to export our products to any other country If the purchased product is exported even though it is not a regulated item Catch All controls item the customer service available for that product may be affected If you have any questions please consult your local Mitutoyo sales office Export permission by the Japanese government may be required for exporting our products according to the Foreign ee and Foreign Trade Law Please consult our sales office near you before you export our products or you offer technical information to a nonresident Sensor Systems Digital Scale and DRO Systems Mitutoyo Corporation 20 1 Sakado 1 chome Takatsu ku Kawasaki shi Kanagawa 213 8533 Japan T 81 0 44 813 8230 F 81 0 44 813 8231 htto Avww mitutoyo co p 105 1303 1 B PA HS Printed in Japan
35. erformed trom the remote control box This eliminates the conventional handle turning and focusing operations reducing fatigue for the operator The X and Y axes are driven with a maximum feed speed of 40mm s and the Z axis with a maximum feed speed of 20mm s The lineup includes models that have large stages with sizes ranging from 200x170mm to 400x200mm Furthermore the change to a motor driven Z axis enables you to use the new vision AF function provided you also use the optional vision unit 1 1 A separate vision AF cable No 12AAN358 must be connected Counter Display A digital counter with a large display providing good visibility and reset buttons is included as standard equipment This counter is also equipped with the following standard functions display resolution switching zero set direction changeover and smoothing While the display is large the counter is thin Because the counter s mounting position can be freely changed the counter can be placed in the optimum position for the operator Mitutoyo Calculation Processor QM Data200 Vision Unit Combination of the MF G2017D the 10D vision unit and a vision AF cable While our motor driven measuring microscopes inherit the options and functions of our manually operated measuring microscopes they have even greater expandability As with our conventional measuring microscopes our motor driven measuring microscopes can be equipped with the
36. es An LED or halogen light can be selected for the coaxial illumination in the main unit While the conventional halogen light can be used for observation and measurement the LED light can also be selected if you want to reduce the time lost to replace a failed halogen bulb with a new one and need high intensity illumination that quickly responds to brightness adjustment The LED light has a long working life and will not suddenly fail In addition the visibility brightness and coloration are constant because unlike fluorescent tubes the LED light is free from glare and changes in color temperature This means less eye fatigue after extended observation Because the LED consumes little power and emits little heat radiation measurement is economical and produces less heat induced effects on inspected objects In addition this light source is impact resistant and does not contain environmental toxins All the models in the MF and MF U Series have transmitted and reflected illumination aperture diaphragms as standard to enable observation and measurement with less light diffraction 1 The working life will be shorter if the maximum illuminance is always used 2 The LED light for MF MF U Series incorporates a quiet cooling fan to further reduce heat effects Mitutoyo High Visibility Digital Display Common to MF C and MF U C a se istie fel krd LAm Ba lli hirra I a T Rear of display
37. ges during image measurement and a dedicated electronic model that can be used for general purposes are available Both models can print out the measurement results or output them to spreadsheet software or inspection tables Features E Auto edge detection tool and various macro icons make measurement straightforward E Easy to use graphics and measurement navigation Enables measurement results to be output to MS Excel and an inspection table cre ated on the same PC E Enables tolerance zone analysis for measurement and calculation results and various types of statistical processing for each item E Auto brightness control that precisely duplicates an illumination setting when using the measuring microscopes MF C MF U C MF D and MF UD together E Enables high accuracy height measurement when combined with the focus pilot E Enables measurement within one screen For details see Catalog No 14008 E Images can be input or saved in BMP or JPEG format 1_ MS Excel is a Microsoft product Typical system More user friendly manual Edge detection support tools measurement environments available One click tools Wide field measurement Patent registered application country Japan Upsizing of the image sensor has made the field of view Each tool has the function of automatically discriminating approximately 40 wider than conventional for both X and Y operations from self tool setup to edge detection calculation by directio
38. ht source stepless brightness adjustment equipped with cooling fan Control unit Power switch main switch AC power supply input connector 100 to 240V Transmitted Telecentric built in aperture diaphragm 12V 50W halogen lamp stepless brightness adjustment with cooling fan Reflected BF BD Kohler illumination with adjustable aperture diaphragm 12V100W or 12V15W halogen lamp selectable external fiber illumination stepless brightness adjustment Control unit Power switch main switch AC power supply input connector 100 to 240 V Illumination filter One GIF filter is provided as standard and mountable for both transmitted and reflected illumination Stage Measuring range 200x170mm 300x170mm 400x200mm 200x170mm 300x170mm 400x200mm Tabletop size 410x342mm 510x342mm 610x342mm 410x342mm 510x342mm 610x342mm Effective stage glass size 270x240mm 370x240mm 440x240mm 270x240mm 370x240mm 440x240mm Swiveling angle 5 3 5 3 Maximum table loading glass top 20kg 15kg 20kg 15kg Measurement system High accuracy digital scale Measuring accuracy 2 2 0 02L um L measuring length mm X and Y axes when not loaded E Minimum reading 1 0 5 0 1um switchable Digital display Display axes X Y and Z Functions Zero setting direction switching Joystick X and Y axes drive lock button X and Y axes speed adjustment X Y and Z axes coarse fine adjustment button X Y and Z
39. ility than a visual check and decreases variation in measured values caused by human error Two types of focus patterns are available either of which can be selected according to the size of the part to be focused on or the surface state material or other properties of the inspected object A clear bright high intensity F LED green or red is employed as the light source The focus pattern for which brightness can be steplessly adjusted can be checked on the eyepiece or TV monitor This substantially improves measurement throughput This is a factory installed option for the MF U Series more details Wide Field Observation Common to MF C MF U C MF D and MF U D The best in class eyepiece field number of 24mm for WF10X offers a wide viewing field that helps prevent extended observation or measurement from affecting your eyes or causing fatigue The WF10X eyepiece which was designed at the same time as the C Series has wider diopter adjustment ranges on the left and right sides than older products Width of an inspected object that can be seen across the whole viewing field when a 1X objective lens is used MF LED and Halogen Light Options for Transmitted and Reflected Illumination Common to MF C MF U C MF D and MF U D Transmitted LED illumination unit Reflected LED illumination unit Reflected LED illumination unit Common to MF MF U Series for MF Series for MF U Seri
40. in the repeat mode E Eliminates the need to switch measuring command keys through Al based measurement which automatically determines the measured element E Includes a user menu in which you can individually register measuring commands or part programs E Enables tolerance zone measurement for measurement and calculation results and various types of statistical processing for each item E Enables measurement results to be output to the MS Excel PC spreadsheet software in CSV format E Enables part programs and measurement results to be stored in USB memory or on a USB FDD floppy disk E A stand that can be tilted to adjust the angle to an easily viewable position Enables measurement during printing 1 MS Excel is a Microsoft product Speciticatio Ns 2 Not all commercially available USB memory is supported QM DATA 200 Stand Type Order No 264 155 Switched among 16 languages Japanese English French German Italian Spanish Displayed language Portuguese Czech Chinese traditional Chinese simplified Korean Turkish Swedish Polish Dutch and Hungarian Unit of measurement Length mm angle degree degree minute second switchable Typical system Foot switch No 12AAJ088 Resolution 0 1um Program function Creating performing and editing measuring procedures 1 1 ai The measured item number of data items maximum value minimum value average Exte rn d d Im n S O NS un It
41. ion the Vision Unit Because the software constantly transmits stage displacements measurements within the camera imaging range on the screen as well as those wider than the screen are supported In addition automatic edge detection provides an efficient measurement environment with a high throughput However eyepiece resolution might be superior to camera resolution in some cases For example the surface of a molded item made of black resin might be clearer to the naked eye than to the camera monitor observation Therefore a measuring microscope that also enables you to see the surtace and other elements is said to be a system that has a very high added value It is recommended to connect the two dimensional data processing unit gt QM Data 200 a dedicated control unit to the measuring microscope for such dimensional measurement MF UB2010C QM Data200 Height Measurement with a High Focus Repeatability For details see page 31 i Focus repeatability is important when measuring a vertical step or other element using the microscope In particular measurement errors due to the depth of focus of the objective lens are inevitable The MF and MF U Series measuring microscopes have a focus pilot which enhances focus repeatability The focus pilot is mounted on the TV camera port section in the main unit as an add on unit and enables focusing position detection with high accuracy and repeatability This realizes higher repeatab
42. ion unit are optional accessories MF B3017C The binocular tube eyepiece and illumination unit are optional accessories Without Model No MF A1010C MF A2010C MF A2017C MF A3017C MF A4020C Z axis scale Order No 176 664 176 665 176 666 With Model No MF B1010C MF B2010C MF B2017C MF B3017C MF B4020C Z axis scale Order No 176 684 176 685 176 686 Optical tube eyepiece s required Monocular or binocular angle of column 25 Standard TV camera port for all models reticle broken cross hair line width 5um optical path switching observation TV camera 50 50 Observation image Observation method Erect image Bright field observation Eyepiece optional Adjustable diopter 10X eyepiece field number 24 15X 20X Note Monocular one 10X eyepiece provided as standard Binocular two 10X eyepieces provided as standard Objective optional Max workpiece height ML objective 3X provided as standard 1X 5X 10X 20X 50X 100X 150mm 220mm Z axis Feed mechanism Coaxial coarse and fine feed handles on both sides coarse 30mm rotation fine 0 2mm rotation Illumination unit Illumination filter LED or halogen is required One GIF filter is provided as standard and mountable for both transmitted and reflected illumination Measurement range 100x100mm 200x100mm 200x170mm 300x170mm 400x200mm Tabletop size 280x280m
43. is suitable for three dimensional observation The condenser lens included as standard makes high brightness Order No 176 366 Continuously variable brightness control Includes a condenser lens Auto brightness control can be used for the Vision Unit system with external light source control cable No 12AAD128 12V 100W halogen lamp No 517181 Rated life 1 000 hours 12V 100W high brightness halogen lamp No 12BAD602 Rated life 50 hours LB80 filter No 12AAG807 External 76 W x235 D x120 H includes only the light source dimensions _ Circular illumination unit outside diameter 60 inside diameter 35 mm Maximum fiber length 1 000 Applicable model MF C MF D ML objective 10X or lower model Order No depends on the destination C Fiber Optic Ring Light External Light Source C Fiber Optic Ring Light Light piped from a standalone halogen lamp unit and projected from around the objective enables observation that is less affected by shadows due to surface irregularities and is suitable for image measurement D LED Ring Light Light from an LED array surrounding the objective enables high contrast observation of deeply colored resins circuit boards and small cylindrical objects and is also suitable for M image measurement In addition spot lighting possible Image 176 367 2 Continuously variable brightness control Auto brightness control can be used for the Vision Uni
44. le model MIF C MF D External To denote your AC line voltage add the following suffixes to the order No e g 176 345A A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V k aa G For transmitted illufhination For CE umination LED Illumination Unit Order No 176 346 MF UC 176 446 MF UD Made up of lamp housing for reflected illumination and transmitted illumination and an LED control unit The LED control unit can be fixed to the rear of the column of microscope main unit White light LED low power consumption 70W Rated life Approximately 30 000 hours Continuously variable brightness control Built in cooling fan includes an alarm for indicating that the fan has stopped A color filter can be attached to a reflected or transmitted illumination unit Reflected illumination unit 68x66 maximum protrusion dimensions Transmitted illumination unit 68x103 maximum protrusion mm LED control unit 118 W x365 D x96 H Applicable model MF U C MF U D External To denote your AC line voltage add the following suffixes to the order No e g 176 345A A for UL CSA D for CEE E for BS DC for China K for EK C for Taiwan No suffix is required for JIS 100V Mitutoyo MEF U series
45. lease contact with your local Mitutoyo sales office Note Combined use with footswitch No 12AAA846 Dot matrix thermosensitive 40 digits 9 normal characters 7 dot matrix Maximum 52 5 normal characters s 160mm W x170mm D x65 5mm H printer Printer cable printing paper 1 roll AC adapter for 100V No 908353 5 rolls Printing paper 5 rolls Other Optional Accessories We offer various optional accessories designed to increase microscope usability These optional accessories which have all been well received by customers include the focus pilot which can reduce focal point variation a power turret and power focusing unit which can be used to change the focus or magnification by under precise power control and a rotary table which has a fine adjustment knob for comfortably rotating objects under inspection You can also select the polarization and differential interference contrast unit to support microscopic observation the TV port adapter to attach a camera which is required by many people during simultaneous analysis and evaluation and other optional accessories as required Focus Detection Unit Focus Pilot Electric Focus Unit Model type FP 05 FP 05U Order No Please contact with your local Mitutoyo sales office Order No 375 057 Green 375 058 Red 375 067 Green 375 068 Red Attached to the Z axis handle on the left side of
46. m 350x280mm 410x342mm 510x342mm 610x342mm Effective stage glass size 180x180mm 250x 150mm 270x240mm 370x240mm 440x240mm Jan Swiveling angle 5 left 3 left Maximum table loading 20kg 15kg glass top Quick release mechanism Provided as standard for the X and Y axes Zero set button Provided as standard for the X and Y axes and for the Z axis only for the MF B type Measurement system High accuracy digital scale 2 i aer oad 2 2 0 02L um L measuring length mm Minimum reading 1 0 5 0 1um switchable Digital display Display axes X and Y or X Y and Z only for the MF B type Functions Zero setting direction switching RS 232C output Main unit dimensions WxDxH 562x730x667mm 624x745x667mm 632x892x782mm 682x892x782mm 757x907x782mm Main unit mass 65 5kg 69 5kg 130kg 138kg 144kg Control unit dimensions and mass 114 W x330 D x90 5 H mm 2 0kg IE a Seve COE eaten LED 65W Halogen bulb 120W with the illumination unit Replacement halogen bulb Standard 513667 12V 50W Long life 12BAB345 12V 50W reflected transmitted Note The following suffixes are added to the order No e g 176 662 10 to specify the User Manual s language 10 for English 11 for Chinese No suffix for Japanese 1 Patent registered in Japan 2 Measured in conformance with JIS B 7153 Universal Measuring Microscopes MF U Series MF U C MF UB1010C MF UB2010C The turret objectives and illumination unit are The turret objectives an
47. manufacturer to acquire accreditation for calibrating line standards standard scales up to 500mm long in Japan A TE ia 4 Line standard calibration unit Underground temperature fluctuation chart Glass scales G LEN E i a For Safe Use Traceability to International Standards I hen are To establish and maintain the traceability of customer measuring ae warmer aes ia f al i i ia tools and instruments Mitutoyo uses length standards that Specified standard ee MIE directly lead to the national standards in Japan to calibrate the Atomic clock and optical frequency comb device synchronized to Coordinated Universal Time standard used to calibrate measuring tools and instruments Mitutoyo also offers temperature calibration services necessary for highly accurate length measurement Level 2 ifi Mitutoyo Utsunomiya Measurement Standards Calibration Center stand Pa a 7 i JCSS accredited calibration laboratory No 0031 lodine stabilized He Ne laser for length purposes with 633nm wavelength Mitutoyo Utsunomiya Measurement Standards Calibration Center Regular reference JCSS accredited calibration laboratory No 0031 standar Stabilized He Ne laser for length purposes with 633nm wavelength for actual use and optical interferometer for standards Inspection and Standard and reference scales calibration units Mitutoyo Solutions Provided by Measuring Microsco
48. mple polarization differential interference 10X eyepiece field number 24 two eyepieces provided as standard 15X 20X Observation image Observation method Eyepiece optional Adjustable diopter Turret Bright field BF Adjustable manual turret or adjustable power turret Select one required Bright field dark field BD Adjustable manual turret or adjustable power turret Select one Objective Bright field BF All lenses including the M Plan Apo M Plan Apo SL and G Plan Apo series optional Bright field dark field BD All lenses including the BD Plan Apo and BD plan Apo L series 7 axis Max workpiece height 150mm 220mm Feed mechanism Coaxial coarse and fine feed handles on both sides coarse 10mm rotation fine 0 1mm rotation Illumination unit Illumination filter LED or halogen is required One GIF filter is provided as standard and mountable for both transmitted and reflected illumination Measuring range 100x100mm 200x100mm 200x170mm 300x170mm 400x200mm Tabletop size 280x280mm 350x280mm 410x342mm 510x342mm 610x342mm Effective stage glass size 180x180mm 250x 150mm 270x240mm 370x240mm 440x240mm Stage Swiveling angle 5 left 3 left Maximum table loading glass top 10kg 20kg 15kg Quick release mechanism Provided as standard for the X and Y axes Zero set button Provided as standard for the X and Y axes and for the Z axis only for
49. n female female cable Thermal printer DPU 414 l l with connecting cable LB80 filter ND8 filter Soe l AAA646 12AAA644 l I Foot switch high rigidity type i i I QM Data200 Coe l 264 155 l l J e e E i a r J l Vision AF cable l a es 12AAN358 Vision unit 10D I 10x eyepiece l J 375 057 green 375 058 red J 359 763 Foot switch highly rigid type 12AAJ088 Calibration chart 02AKN020 Calibration chart with holder 02ATN695 QSPAK VUE Optical tube Control unit l MF D E a Motorized EE 10X eyepiece Control unit 378 866 two 378 866 5 one Remote box 15X eyepiece 378 857 two 378 857 5 one 20X eyepiece 378 858 two 378 858 5 one 10X protractor eyepiece 375 043 l Twin fiber optics illuminator 100W l 10X digital protractor eyepiece i een GIF filter for light source i 176 313 12AAG806 l Ring fiber optics illuminator 100W I I 176 366 LB80 filter for light source l 12AAG807 l LED ring illuminator white I 176 367 2 external brightness adjuster eee el l External light source control cable peal device or stage l External light source control cable l 12AAG888 Refer to Page 28 for details Rotary table with fine feed wheel B hm eee ee ee ee 176 306 l Stage adapter 176 304 l l I Holder with cramp Swivel center support l 176 107 172 197 l l B Objective V block
50. n or arc minute selection data output counter with foot switch 12AAJ088 standard Output RS 232C equipment External dimensions mm 143 W x112 D x57 H Supports CE Power supply AC100 120V E ETT MF C MF D fixable to the top RE surface of the counter This measurement system does not always supply power to the internal scale to display absolute values The system measures coordinates from any fixed origin O pt Ca Tu bes 1 Order No depends on the destination Monocular Tube Binocular Tube Tilting Binocular Tube Order No 176 392 Order No 176 393 Magnification 10X Magnification 10X Magnification 10X Field number 24 Field number 24 Field number 24 Angle of column 0 30 Applicable model Required for MF C MF D Applicable model Required for MF C MF D tilt angle Included in MF U C Applicable model MF U D as standard Mitutoyo For inspection or observation using a microscope high resolution and an ultra long working distance are important factors for objective usability Also using the apochromat specifications for correction of the red blue and yellow wavelengths to correct chromatic aberration over a wide range of wavelengths and the plan specifications to correct distortion in the image surface and point aberrations is also important for getting a clear image across the whole field of view Mitutoyo s high quality FS objectives have these characteristics which expands the range of
51. ns thus allowing concurrent observation of the merely single clicking the vicinity of a measurement point edge circumference of a measurement point with the mouse If measurement is performed in one tool window these tools drastically reduce measurement time thanks to no need for stage travel One click circle tool One click box tool f g i d 1 x i 1 f i i z i a i i Tu 7k a E h I k ia a ch 7 i i r rai zm J An actual image using objective lens ML1X plus LED ring light Mitutoyo Coordinate system creation key Coordinate system Meas Meas Align NP Specifications Vision Unit Order No Magnification of optical system Image detection Coordinate value input formatting function NP measurement Creation key2 Menst Meas Align NP Measi Meas Align NP MF C No 359 796 Vision Unit 9C MF UC No 359 798 Vision Unit 9UC MF D amp MF UD 359 763 Vision Unit 10D 0 5X when a microscope is attached 0 5X when using a TV adapter High sensitivity 1 2 inch CMOS color camera with 300 million pixels Resolution 0 1um Measuring accuracy for each axis in a 20 C environment Depends on measuring microscope Accuracy in a 20 C environment PC system Software Depends on measuring microscope Reference when using a 3X ML objective performing an inspe
52. ossing cable 20X eyepiece 12AAA807 x1 378 858 two Note D sub 9 pin female female cable DIC unit 378 080 for 5X and 10X 378 079 for 20X Data calculation processing Counter data transfer Counter data printing 378 078 for 50X and SL20X 378 076 for 100X SL50X and SL80X Main unit LED illumination reflected transmitted Optical Polarization unit BF BD tube 378 092 Main unit transmitted i PE illumination illumination External reflected Powertociing illumination L 5 ze LB80 filter 12AAA646 ND2 filter 12AAA643 ND8 filter 12AAA644 Power focus unit Stage related Turret objective BD BF 2017 3017 4020 size Stage adapter Rotary table with fine feed wheel B 176 304 176 306 1010 size 2010 size Rotary table with fine feed wheel A 176 305 Holder with clamp 176 107 V block with clamp 172 378 Swivel center support 172 197 Stage adapter B 176 310 Rotary table with fine feed Holder with clamp 176 107 wheel with scale 172 198 V block with clamp 172 378 Swivel center support 172 197 Holder with clamp 176 107 Usable with stage adapter 176 304 V block with clamp 172 378 Swivel center support 172 197 Vibration damping stand 1 Order No depends on the destination 176 308 Mounting stand microscope QM Data 200 Lens cleaning set uae 12AAA165 Vertical system rack for Vision Unit Stage micrometer 998923 375 056 Halogen lamp
53. pes Observation and Inspection of Small Areas By using various types of illumination the MF Series can more precisely reproduce the colors and shapes of objects that are observed and inspected The MF U Series microscopes are high value added instruments that offer microscope observation functions such as dark field mode to observe surface scratches and small steps which are difficult to see in bright field mode simple polarization to observe coloration or contrast through the polarizer or analyzer using polarization properties and differential interference to observe small surface steps and other elements in color contrast using the polarization filter with a differential interference prism as well as measurement functions Bright field observation Dark field observation Polarized observation Differential interference observation Easy Image Photography Anyone can easily photograph microscope images by attaching a digital camera to the microscope Because a general purpose C mount adapter is used any digital camera model that supports Gmounting can be attached For example several people can simultaneously analyze and evaluate the microscope image displayed on the monitor or generation of an inspection chart attached to the image can be automated Microscope Based High Resolution Measurement It is possible to build a manual image measurement system by equipping a measuring microscope with the image measurement opt
54. roscope to automatically recognize the position of the objective lens in the vision unit E A power model lineup with large stage sizes ranging trom 200x170mm to 400x200mm E A button for coarse and fine feed switching and speed adjustment function that are highly useful during long stroke sliding and fine positioning are provided as standard equipment E The buttons on the remote control box which is used to perform operations have been placed to provide operations that feel natural E The remote control box is standard equipped with a data output button and counter reset buttons for the X Y and Z axes which enables you to perform a variety of operations remotely E Products equipped with LAF laser auto focus are also included in the lineup of MF U power products which improves the efficiency of the focusing operation Models that have LAF are equipped not only with the normal Just Focus JF function but also with the Tracking Focus TF function that maintains the focus as the stage moves These functions cater to focusing requirements in a variety of situations reducing the amount of work that the operator has to perform 1 A separate vision AF cable No 12AAN358 is required 2 A separate RS 232C cable No 12AAA807 is required Motor Driven The X Y and Z axes are all motor driven A joystick is used to operate the X and Y axes and a jog shuttle is used to operate the Z axis so operations during measurement can be p
55. rts including those for the body such as the lenses and optical tube and the highly accurate built in digital scale Our in house design and development processes allow us to proactively offer consultation on special requirements and respond to customer requests such as those for customized fabrication Mitutoyo carefully delivers the microscope from the production plant to its desired destination and then installs and adjusts it there The packaging box is recyclable which enables the customer to eliminate as much waste as possible at the delivery destination After adjustment customers can sign a maintenance contract or use our reliable after sales services according to their needs which ensures that they can confidently use their Mitutoyo microscope for a long time to come If a dedicated delivery service is used In Pursuit of Optical Performance The Essence of Microscopy These microscopes use an optical design inherited from the previous B Series for the optical tube and objective lens to reduce flare within the optical system as much possible and so enable the clear E display of subtle details of inspected objects With this series even the surface of black resin can also m1 be clearly observed in high contrast The MF U Series is equipped with the proven FS optical system ii metal microscope head and displays clear images with high color reproducibility in which the three prime colors are corre
56. s on the destination Other Optional Accessories Rotary Table with Fine Feed Wheel A Rotary Table with Fine Feed Wheel B Rotary Table with Fine Feed Wheel with Scale Order No 176 305 Order No 176 306 Order No 172 198 ay 280 W x280 D x23 7 H mm Extena 342 W x342 D x23 2 H mm 240 W x172 D x19 7 H mm Tabletop a240mm 360 rotation no Tabletop 270mm 360 rotation no External T groove pitch of the tabletop 120 dimensions dimensions ee i angle scale angle scale dimensions Tabletop 270mm 360 rotation Mass 5 5kg Mass 6 5kg minimum angle adjustment vernier 2 Effective glass 132mm Effective glass 238mm Mass 2 4kg diameter diameter Effective glass 96mm Applicable model Size 505 10101 2010 MF C MF U C Size 2017 3017 4020 MF C MF U C diameter ss Applicable model FUC Note The V block with Clamp Swivel Center Support and MF D MF U D MF C MF U l Holder with Clamp can be mounted on the table Note The V block with Clamp Swivel Center Support and Applicable model Note Size 2010 is used with stage adapter B Holder with Clamp can be mounted on the table Sizes 2017 3017 and 4020 are used with 280 2 07 hole stage adapter Clamp screws 2 Note The V block with Clamp Swivel Center Support and Holder with Clamp can be mounted on the table Table inside diameter 282 342
57. suring Microscopes MF Series MF C MF B1010C MF B2010C The binocular tube eyepiece and The binocular tube eyepiece and illumination unit are optional accessories illumination unit are optional accessories Features E Observation with a clear and flare less erect image and a wide field of view E Measuring accuracy that is the highest in its class and conforms to JIS B 7153 E ML series high NA objectives that are specially designed tor the MF series long working distance type E Illumination unit reflected transmitted selectable from a high intensity LED or halogen bulb required E Variable aperture diaphragm reflected transmitted allows observation measurement while suppressing light diffraction E Variety of standardized stages in sizes up to 400x200mm E Quick release mechanism useful for moving the stage quickly when measuring workpieces that are large in size or quantity E Coarse fine feed handles equipped as standard on both sides allow precise focus and observation measurement regardless of handedness E High magnitication eyepiece observation up to 2000X E Standard measuring microscope that has a wide variety of optional accessories including a Vision Unit and various digital CCD cameras E Low noise design Mitutoyo MF B2017C The binocular tube eyepiece and illumination unit are optional accessories Specifications MF B4020C The binocular tube eyepiece and illuminat
58. t D1 378 931 A set including BD plan Apo 10X 20X 50X and 100X Lens set D2 378 932 A set including BD plan Apo 2X 5X and SL20X Lens set D3 378 933 Aset including BD plan Apo 5X 10X 20X and 50X Optional Accessories Illumination How illumination a light source is used is important for observing and measuring various inspected objects such as semiconductors electronic or electric components automobile precision components resin moldings tools medical products and printed materials with clarity and high contrast Select the best illumination according to the shape surface conditions color and materials in the inspected object t For transmitted illumination For reflected illumination LED Illumination Unit Order No 176 345 MF C 176 445 MF D Made up of lamp housing for reflected illumination and transmitted illumination and an LED control unit The LED control unit can be fixed to the rear of the column of the microscope main unit White light LED low power consumption 65W Rated life of approximately 30 000 hours continuously variable brightness control Built in cooling fan includes an alarm for indicating that the fan has stopped A color filter can be attached to a reflected or transmitted illumination unit Reflected illumination unit 33x86 maximum protrusion dimensions Transmitted illumination unit 68x 103 maximum protrusion mm LED control unit 118 W x365 D x96 H Applicab
59. t system with external light source control cable No 12AAG888 The four images show the same portion of an inspected object External 75 W x150 D x90 H only the control part dimensions _ Ring LED part outside diameter 70 height 68 to 93 mm LED cable length 1 500 Applicable model MF C MF D ML objective 10X or lower model Order No depends on the destination adjusting the brightness does not change the coloring LED Ring Light for FS Objectives Please contact us Fixed to an objective and projects ring shaped white LED light Continuously variable brightness control Auto brightness control can be used for the Vision Unit system with external light source control cable No 12AAG888 75 W x150 D x90 H only the control part Ring LED part outside diameter 70 height 65 to 80 LED cable length 1 000 Applicable model MF U C MF U D FS objective M plan Pro 10X or lower model External dimensions mm Manual Image Measurement Vision Unit The Vision Unit turns your measuring microscope into a high performance vision measuring system capable of significantly increasing productivity in quality assurance operations Vision measurement simply involves generating enough points from the edges of workpiece features to ensure accuracy and then letting powerful PC based software calculate the measurement results An image measuring model that aligns ed
60. the product we perform calibration For details contact a sales office near you 12AAA165 This exclusive set includes cleaner cloth a blower cotton wads and other items for maintaining eyepieces and objectives Order No 375 054 Lens Cleaning Set This standard adapter is used to mount a Order No device such as a digital camera to the TV camera port of a microscope This adapter enables observation with a wide field of view using a 0 5X minimum relay image Magnification accuracy 0 1 Image field diameter 11mm Note This adapter is included with the Vision Unit as standard External dimensions mm Pale Applicable model MF C MF U C MF D MF U D Mounting Stand for Microscope Order No 176 309 Note When specifying a microscope with the Vision Unit or DV 520L we recommend Maximum loading 300kg selecting the large mounting stand No External dimensions mm 1200 W x900 D x650 H Mass Approximately 50kg Applicable model MF C MF U C MF D MF UD 960945 which has external dimensi ons of 1 800 W x900 D x740 H Vibration Damping Stand Order No 176 308 Supporting method Spring pad Maximum loading 200kg External dimensions mm 750 W x550 D x36 H Mass 36kg Applicable model ar lie CAME Dy Other Optional Accessories Reticles For MF C MF D For MF U C MF U D No 12AAG838 MF C MF D No 12AAG878 MF U C MF U D 90 chain lines Chain line pit
61. to 28 Line width 7um Line width 7um Line width 7um Line width 7um Line width 7um Reticle tor digital protractor eyepiece included as standard J 90 solid lines 45 chain lines Chain line pitch 0 2 to 0 2 No 12AAG852 No 12AAG853 No 12AAG854 x Fa Line width 7m MF C MF D MF C MF D MF C MF D Unified coarse screw thread Unified coarse screw thread Concentric circles with cross hairs 24 to 14 13 to 10 0 01 to 0 20 Line width 7um Line width 7um Line width 7um Each reticle includes an attachment board 1 Use this with an eyepiece that has 10X magnification 2 This is the comparison chart specific to a 3X ML objective Use this with an eyepiece that has 10X magnification 34 External Dimensions The LED illumination unit is included in the following figures The control unit is placed to the side of the microscope or directly attached to the rear of the column For the external dimensions for MF D MF UD please contact with your local Mitutoyo sales office MFC 1010 MF UC 1010 261 90 5 261 90 5 ai TE Ww Ww Ww

Measuring Microscopes MF/MF

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