ANT130 Series Stage User`s Manual
Contents
1. 24 2 2 4 39 5 2 MMCNSIONS sx 38 ate es ee neh iere c at Pls 40 5 3 Basic 222222 2 2 2 2 4 4 4 3 41 5 4 Z Axis InstallatiOri Er e eR Eco c o c eee xu x ve ok pent 42 5 4 1 Securing the Stage to the Mounting 42 5 4 2 Attaching the Payload to the 44 Appendix A Warranty and Field 45 Appendix B Technical 47 ndek 49 Reader s 2 51 www aerotech com lii Table of Contents ANT130 Series Stage User s Manual www aerotech com 130 Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 1 3 Figure 1 4 Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 2 5 Figure 2 6 Figure 2 7 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 5 Figure 3 6 Figure 3 7 Figure 3 8 Figure 3 9 Figure 3 10 Figure 3 11 Figure 5 1 Figure 5 2 Figure 5 3 Figure 5 4 ANT130 L left an2. ceeds 36 lubrication and cleaning process 36 lubrication schedule 35 model 9 Motor 19 Multi axis 36 www aerotech com Index 49 130 Series Stage User s Manual Index 50 Index www aerotech com Reader s Comments 130 Series Manual P N EDS145 January 30 2012 p 1 03 00 Is this manual YES NO Adequate to the subject Well organized Clearly presented Well illustrated How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples J SmemmaDem Nee We Seat ripe Name m 2 11 1 Eee Customer Customer Order E Order Mailyourcommentsto 101 Zeta Drive Pittsburgh PA 15238 emai USA
3. 27 Load Capability of ANT130 110 XY 27 Load Capability of ANT130 160 XY 28 ANT 130 Series Limit Switch 0 000 0 29 Motor Wiring Connector for Optional 4 pin Hi Power D Connector 4DU 25DU Option 32 Encoder Connector with Optional 4 pin Hi Power D Connector 4DU 25DV Option 32 Typical ANT130L Z Series Positioning Stage 37 ANT130L Z with Component 38 ANT130 L Z 40 www aerotech com List of Figures vi ANT130 Series Stage User s Manual www aerotech com 130 Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering System for Single Axis 3 Table 1 2 Model Numbering System for Two Axis XY 3 Table 3 1 Environmental 4 4 22 2 2 17 Table 3 2 ANT130 L Series 4 IIR Rss rl 19 Table 3 3 130 Series
4. 122 2 2 2 21 Table 3 4 BLMUC 95 A Motor 23 Table 3 5 Feedback and Motor Pin Assignments for 25DU Cable 31 Table 3 6 Motor and Feedback Wiring Pinout 42 2 42 33 Table 5 1 Model Numbering 0 39 Table 5 2 ANT130L Z Series 2 4 21 41 Table B 1 Current Changes 1 03 00 0 7 7 7 7 47 Table B 2 Archived 00 00 rr irn 48 www aerotech com vii List of Tables ANT130 Series Stage User s Manual viii www aerotech com 130 Series Stage User s Manual Overview Chapter 1 Overview The ANT130 L and ANT130 XY series stages offer excellent performance in speed accuracy resolution repeatability reliability travel range and are offered in two accuracy grades With its low profile and out standing performance characteristics the ANT 130 stages are the ultimate solution for high accuracy align ment inspection positioning and measurement stations Figure 1 1 ANT130 L left and ANT130 XY right Linear Positioning Stage www aerotech com Chapter 1 Overview ANT130 Series Stage User s Man
5. 130 Series Stage User s Manual P N EDS145 Revision 1 03 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive 4 Pittsburgh PA 15238 AEROTECH Phone 412 963 7470 Fax 412 963 7459 www aerotech com Technical Support Aerotech provides downloadable resources such as up to date software product manuals and Help files training schedules and PC to PC remote technical support You can also complete Product Return RMA forms and get information about repairs and spare or replacement parts Go to http www aerotech com cussv html for information and support about your Aerotech products For immediate help contact a service office listed below or your sales representative United States World Headquarters Japan Phone 412 967 6440 Phone 81 0 47 489 1742 Fax 412 967 6870 Fax 81 0 47 489 1743 Email service aerotech com Email service aerotechkk com jp United Kingdom China Phone 44 118 940 9400 Phone 852 3793 3488 Fax 44 118 940 9401 Email saleschina aerotech com Email service aerotech co uk Germany Taiwan Phone 49 911 967 9370 Phone 886 0 2 8502 6651 Fax 49 911 967 93720 Email service aerotech tw Email service aerotechgmbh de N OTE Aerotech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com
6. Figure 2 5 130 Shipping Bracket Removal Procedure Step 3 NOTE After removing the lifting features or shipping brackets retain them for future use In the event that the product requires service at the factory the lifting features or shipping brackets should be reattached to ensure that the ANT130 ships safely 12 Chapter 2 www aerotech com 130 Series Stage User s Manual Installation 2 3 Preparing the Mounting Surface The mounting surface should be flat to 5 um and have adequate stiffness in order to achieve the maximum performance from the ANT 130 When ANT 130 series stage is mounted to a warped surface the stage can be distorted as the mounting screws are tightened see Figure 2 6 Any distortion will decrease the overall accuracy of the stage Adjustments to the mounting surface must be done before the stage is secured AEROTECH AEROTECH ANT130 Mounting to a Flat Surface Mounting to a Curved Surface Exaggerated AEROTECH AEROTECH ANT13 ANT130 2 Figure 2 6 Mounting to a Flat Surface NOTE To maintain accuracy the mounting surface should be flat within 5 um NOTE The ANT130 base is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting sur face rather than the ANT 130 base Shimming should be avoided if possible If shimming is required
7. MKR Marker Incremental encoder output pulse once per travel length Typically used for home ref erence cycle Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 V DC bias level with amplified sine wave type encoder www aerotech com Chapter 3 33 Operating Specifications ANT130 Series Stage User s Manual 3 7 Vacuum Operation Aerotech can specially prepare the ANT 130 series stage for operation in vacuum environments Aerotech offers two vacuum preparation options one for low vacuum for use in atmospheric pressures to 1073 torr and one for high vacuum preparation for environments from 10 3 to 1078 torr As part of this preparation attention to detail during modification cleaning and assembly results in stages with optimal performance in vacuum applications Preparation techniques for stages that will operate in a vacuum include e Lubrication with vacuum compatible lubricants e Useof materials fasteners and coatings with vacuum outgas performance compatible with the level of vacuum specified e Forhigh vacuum stages elimination of situations that may allow gases to become temporarily trapped during pump down e Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene bag 3 7 1 Special Guidelines To ensure that the stage will continue to perform well in the vacuum environment follow the guidelines listed below in addition
8. Warranty and Field Service ANT130 Series Stage User s Manual On site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by send On site Non warranty Repair Company Address 46 ing and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be war ranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subsistence costs For warranty field repairs the customer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair sec tion apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subs
9. 3 4 Load 222 222 2 1 0 2 24 3 5 Limit 2 2 2 2 22 2 2 2 29 3 5 1 Limit Switch 22 44442 0 0200 29 3 6 Standard 2 22 2 4 4 0 0 0 0 11555544 30 3 7 Vacuum 02 0202 2 34 3 7 1 Special 4 4 4 4 22 2 34 Chapter 4 35 4 1 Service and Inspection 35 4 2 Cleaning and sees leeren 36 4 2 1 Recommended Cleaning 2 36 4 2 2 Important Notes on 2 0 0 007007040 22 2 36 4 2 3 Lubrication and Cleaning 4142 4 4 4 4 4 36 Chapter 5 ANT130 L Z 22 22222 2 2 37 5 1 Standard 2 4 4 0 0 0 00222 37 5 1 1 Model
10. detail the lubrication and inspection process and cover which lubricants are recommended for use NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced Always operate the stage with the hard cover and side seals in place to help keep dirt out N 4 1 Service and Inspection Schedule Lubricant inspection and replenishment in ANT130 series stages depends on conditions such as duty cycle speed and the environment Inspect the stage once per month until a trend develops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces In gen eral lubricate stages operating in a clean environment annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris lubrication every six months is recommended If the application process uses only a small portion of travel for most of the duty cycle it is recommended that the stage be periodically driven through full travel to redistribute the lubrication in the bearings The motor is completely non contact and requires no lubrication www aerotech com Chapter 4 35 Maintenance ANT 130 Series Stage User s Manual 4 2 Cleaning and Lubrication 4 2 1 Recommended Cleaning Solvents For standard linear roller bearings Kluberplex BEM 34 132 grease is recommended For high speed applications i
11. m 200 130 110 AND ANT130 160 XY ONLY S ECCLE Figure 1 3 ANT130 XY Dimensions www aerotech com Chapter 1 Overview ANT 130 Series Stage User s Manual 345 CENTER POST ADJUSTMENT 82 6 SQ AIR FITTING FOR 4 05 32 VACUUM LINE ALTERNATE ATTACHMENT METHOD 4 06 8 SLOT THRU ALL LJ 11 0 SLOT y 8 0 38 1 CABLE TIE MOUNTS i I 7 BOTH SIDES 130 2 38 1 444 349 Y EL i ACP3 INCLUDED WITH XYZ CMS OPTION 11 1 REF NOTE DIMENSIONS SHOWN ARE THE SAME AS ACP2 QTY 4 MAGNETS ALTERNATE ATTACHMENT METHOD ACP2 INCLUDED WITH XY CMS OPTION DIMENSIONS MILLIMETERS Figure 1 4 ANT130 XY CMS Dimensions 6 Chapter 1 www aerotech com 130 Series Stage User s Manual Overview 1 3 Safety Procedures and Warnings The following statements apply wherever the Warning or Danger symbol appears within this manual Failure to observe these precautions could result in serious injury to those individuals performing the procedures and or damage to the equipment Operators should be trained before operating this equipment DANGER Tominimize the possibility of electrical shock and bodily injury or death dis conne
12. of the ANT 130 for unintended applications can result in injury and damage to the equipment WARNING Before using this ANT130 perform an operator risk assessment to determine the needed safety requirements www aerotech com Chapter 1 7 Overview ANT130 Series Stage User s Manual 1 4 EC Declaration of Incorporation Manufacturer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 AEROTECH USA herewith declares that the product Aerotech Inc ANT130 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Part 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Man
13. BLMC 142 19 Preparing the Mounting Surface 13 brushless linear 2 S C safety 7 Cleaning 36 Securing Stage to the Mounting Surface 14 custom configurations 2 service 5 35 19 Declaration of Incorporation 8 Standard 2 2 4 temperature 18 Electrical Installation 16 U 222222 20002 22 30 Unpacking and Handling the Stage 9 Environmental Specifications 17 V l vacuum 2 inspection schedule 35 vacuum preparation 34 L limit 2 29 7 Linear Cross Roller Bearings 2 LI Q 29 lubricants 2 20 2 36 Z Axis Installation 42 vacuum 34
14. Chapter 3 Operating Specifications NOTE For valid system performance the mounting interface should be flat within 1 uum per 50 mm The payload should be flat rigid and comparable to the stage in quality Refer to Section 3 4 for information on cantilevered loads and load positioning NOTE Donotattach a payload to the stage table with screws that are too long A screw passing through the stage table can come into contact with internal parts affecting travel and possibly damaging the stage Mounting screws should not project more than 7 mm 276 into the stage table top www aerotech com Chapter 2 15 Installation ANT130 Series Stage User s Manual 2 6 Electrical Installation Electrical installation requirements will vary depending on stage options Installation instructions in this sec tion are for stages equipped with standard Aerotech linear motors intended for use with an Aerotech motion control system Contact Aerotech for further information regarding stages that are otherwise configured Aerotech motion control systems are adjusted at the factory for optimum performance When the ANT 130 is part of a complete Aerotech motion control system setup usually involves connecting a stage and motor combination to the appropriate drive chassis with the cables provided Connect the provided cables to the feedback and motor connectors on the stage body Labels on the system components usually indicate the appropriate connections R
15. N OTE All drawings and illustrations are for reference only and were complete and accurate as of this manual s release The most recent system drawings and schematics can be found on your software CD ROM or on www aerotech com N OTE This manual and any additional instructions included with the ANT130 should be read in their entirety before operating the ANT130 N OTE This product is intended for light industrial manufacturing or laboratory use Revision History 1 03 00 January 30 2012 1 02 00 November 5 2010 1 01 00 April 23 2010 1 00 00 November 18 2009 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Copyright 2009 2012 Aerotech Inc All Rights Reserved 130 Series Stage User s Manual Table of Contents Table of Contents Table 2222222222222 2 2 1122 iii EE V EISUOR vii Chapter 1 2 22 41 4 10 021 1 1 1 Standard 222 222222222 2 2 2 2 2 2 11 1 Optional Features lt 2 eee eile bec ec eic 2 1 1 2 Model 222 2 22 22222222222222222222 2 2 2 5 4 4 2222 2 2 2 2 2 0 0 3 D
16. to standard handling installation and lubrication guidelines outlined earlier in this manual Do not remove the stage from the sealed bag until it is ready for use 2 Always handle the stage in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners when securing the stage Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vac uum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous torque ratings to be 40 to 60 lower than the value specified for operation in nor mal atmospheric environment Reduce motor usage accordingly 5 Forvacuum applications the recommended lubricant is a small quantity of Braycote9 602EF grease or a substitute of equal quality Baking vacuum components between 100 and 125 C for 24 to 48 hours significantly reduces outgassing at initial pump down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the aluminum surfaces and Teflon cables Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber 34 Chapter 3 www aerotech com 130 Series Stage User s Manual Maintenance Chapter 4 Maintenance This chapter will cover information about intervals between lubrications
17. type encoder or 2 5 VDC bias level with amplified sine wave type encoder e cow Common ground for feedback connectorwiing 22771 75 PALLA Hal EfectA Brushless motor commutation tack ouput PALLG Hal Efect Brushless motor commutation rack ouput 14 COS Cosine Incremental encoder output either TTL line driven or amplified sine wave type sig nal Sine Incremental encoder output either TTL line driven or amplified sign wave type sig nal www aerotech com Chapter 3 31 Operating Specifications ANT130 Series Stage User s Manual MTR MTRSHLD 41 7229 YEL 18 G YEL Figure 3 10 Motor Wiring Connector for Optional 4 Hi Power D Connector 4DU 25DU Option FRMGND 4 GC Qo 2 S 2 oe 1 nrn SEE DETAIL 25 PIN MALE D ENC 5V PIN 6 12 EOT Limit 2 i SHLD SIN N HC vL GL 9L ZL 8L 6L Oc LZ ZZ c vc Sc HC 10 HA 17 SIN LMTCOM HB TO lt 1 PIN 1 DRAIN LMT COM 2 Signal Figure 3 11 Encoder Connector with Optional 4 Hi Power D Connector 4DU 25DV Option 32 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications Table 3 6 Motor and Feedback Wiring Pinout Descriptions PinOutput Description S
18. whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its products shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum period of one year from date of shipment This warranty covers defects in workmanship and material and is voided for all laser power supplies plasma tubes and laser systems sub jectto electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty without first obtaining approval from Aerotech No credit will be given nor repairs made for products returned withoutsuch approval Any returned product s must be accompanied by a return author ization number The return authorization number may be obtained by calling an Aero tech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later tha
19. 8 14 62 Force Constant Sine Drive 5 6 7 83 1 76 1107 Gas Motor Constant 2 41 3 35 0 75 Resistance 25 Line Line Inductance Line Line 6 70 Thermal Resistance No cooling 2 12 Mechanical Specifications Air Flow 20 psi m3 s SCFM 1 5 10 3 3 2 Magnetic Pole Pitch 16 00 0 63 1 Performance is dependant upon heat sink configuration system cooling conditions and ambient temperature 1 2 Values shown 0 100 C rise above a 25 C ambient temperature 3 Peakforce assumes correct rms current consult Aerotech 5 All performance and electrical specifications 10 6 All Aerotech amplifiers are rated Apk use torque constant in N m Apk when sizing 4 Force constant and motor constant specified at stall 7 Bus voltages above 80 VDC require the 4DU 25DU stage output cable option www aerotech com Chapter 3 23 Operating Specifications ANT 130 Series Stage User s Manual 3 4 Load Capability It is recommended that application loads be symmetrically distributed whenever possible i e the payload should be centered on the stage table and the entire stage should be centered on the support structure With the stage lying flat horizontal and the application load vertically applied and symmetrically distributed the maximum vertical load carrying capacity of ANT 130 stages is 12 kg If cantilevered loads are applied refer to Figure 3 1 to find the loading condition th
20. ARRIERE 4 1 3 Safety Procedures and 8 7 2 2222222222 2 2 4 4 4 7 1 4 EC Declaration 2222 2 54 8 Chapter 2 Installation 2 022 222 2 2 9 2 1 Unpacking and Handling the 22222222 2 2 2 1 2 9 2 2 Shipping 2222 2 0 2222222 24 24 2 2 10 2 3 Preparing the Mounting 13 2 4 Securing the Stage to the Mounting 2 14 2 5 Attaching the Payload to the 222222222 2 2 2 2 1 41 4 15 2 6 Electrical 22 4 42 4 16 Chapter 3 Operating Specifications 17 3 1 Environmental 4 44 17 3 2 Accuracy and Temperature 24 18 3 3 Basic 22222 2 2 4 1441 19
21. Ib Stage Mass 2 1 kg 4 6 Ib 2 1 kg 4 6 Ib 2 5 kg 5 5 Ib 2 5 kg 5 5 Ib Material Aluminum Body Black Hardcoat Finish MTBF Mean Time 1 30 000 Hours Between Failure 9s 1 Certified with each stage 2 In Position Stability listing is 30 value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller www aerotech com Chapter 5 41 Overview ANT130 Series Stage User s Manual 5 4 Z Axis Installation The following statements apply to the ANT130L Z Failure to observe these precautions could damage equip ment WARNING Improper handling could adversely affect the ANT 1305 performance Use care when moving the stage Manually lifting or transporting the stage can result in injury 5 4 1 Securing the Stage to the Mounting Surface The following steps outline the stage mounting procedure Refer to Figure 5 4 for part location and descrip tion WARNING The ANT130 must be mounted securely Improper mounting can result in injury and damage to the equipment Remove the shipping bracket It is attached to the stage with four M3 button head screws NOTE Manually support and lower the tabletop onto the hardstop so that it does not fall and damage the pn
22. aching the payload to the stage NOTE For valid accuracies the mounting interface should be flat within 2 um to 5 um WARNING Do not attach the payload to the stage table with screws that are too long It can 10 44 bottom out and deform the lower axis tabletop Break free the two M3 button head screws that secure the shipping clamp to the tabletop This will allow the tabletop to fall a small amount Increase the air supply pressure until the tabletop starts to rise Dial back the air supply pressure until the tabletop is in equilibrium Remove the shipping bracket and verify that the tabletop is still in equilibrium Adjust the air supply pres sure as required The system is now in balance Reconnect electrical power Chapter 5 www aerotech com 130 Series Stage User s Manual Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty materials or poor workmanship for a minimum period of one year from date of shipment from Aero tech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aero tech in specifications or drawings previously or subsequently provided or
23. al Table 3 2 ANT130 L Series Specifications continued ANT130 110 L ANT130 160 L Mechanical Specifications ANT130 110 L PLUS ANT130 160 L PLUS Trave 3 um 300 nm 4 300 120 yin 12 yin 160 12 uin Resolution 1 nm 0 04 uin 1 nm 0 04 uin 1nm 0 04 uin 1nm 0 04 uin 1 x 00r nm 75nm 100 nm 75nm Repeatability Bi Directional 43 yin 4 yin 43 yin Repeatability Uni Directional s hi m 0 1 uin 1 uin 1 pin 1 uin 1 1 0 um 1 0 1 5 1 5 susidhiisss 440 uin 40 460 60 uin 1 0 um 1 0 um 1 5 1 5 1 Maximum Speed 350 mm s 350 mm s 350 mm s xm mm s P 14 in s 14 in s 14 in s 14 in s ET 10 e iN E od E d 2 nm nm E nm nm 0 04 pin 0 04 pin 0 04 pin 0 04 pin Maximum Force Continuous 23N N 23N Horizontal 12 0 kg 26 5 Ib mium 26 516 I 26 5 Ib m 26 5 Ib i3 10 2216 10kgQ21b 10 2216 10kg 2216 1 9 4 216 1 9kg 4 21b 2 3 5 116 2 3 5 110 Stage Mass 3 3kg 7 31b 3 3 7 316 3 9kg 8 6Ib 3 9kg 8 6Ib Aluminum Body Black Hardcoat Finish MTBF Mean Time Between 30 000 Hours Failure 1 Certified with each stage Accuracy 1 2 In Position Stability listing is 30 value 3 Axis orientation for on axis loading is listed 4 Specifications are for s
24. ct all electrical power prior to making any electrical connections DANGER Tominimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the ANT130 is connected to a power source DANGER Tominimize the possibility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments DANGER Moving parts of the ANT130 can cause crushing or shearing injuries All personnel must remain clear of any moving parts WARNING If the ANT130 is used in a manner not specified by the manufacturer the pro tection provided by the ANT 130 can be impaired and result in damage shock injury or death WARNING Cables can pose a tripping hazard Securely mount and position all ANT 130 cables to avoid potential hazards WARNING Donot expose the ANT130 to environments or conditions outside the specified range of operating environments Operation in conditions other than those specified can cause damage to the equipment WARNING The ANT130 must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING Usecare when moving the ANT130 Manually lifting or transporting the ANT130 can result in injury WARNING Only trained personnel should operate inspect and maintain the ANT 130 WARNING This ANT130 is intended for light industrial manufacturing or laboratory use Use
25. d ANT130 XY right Linear Positioning Stage 1 ANT130 L 999 4 ANT130 XY 2222 555 2 11 5 ANT130 XY CMS 2 1 2 6 Shipping Bracket Used on Single Axis 10 Shipping Brackets Used on XY 4 0 02 10 ANT130 XY Shipping Bracket Removal Procedure Step 1 11 ANT130 XY Shipping Bracket Removal Procedure 2 11 ANT130 XY Shipping Bracket Removal Procedure 3 12 Mounting to a Flat RR rh eret nrnna 13 Mounting Hole 2 2 2 1 14 Stage Loading 2 2 24 Load Capability of ANT130 035 L Stages 25 Load Capability of ANT130 060 L 2 4 2 25 Load Capability of ANT130 110 L 2 26 Load Capability of ANT130 160 L 24 4 2 26 Load Capability of ANT130 060 XY
26. e near max speed at a duty cycle of 50 frequent maintenance with stand ard lubricants is required If a solvent is necessary for cleaning the stage use isopropyl alcohol 4 2 2 Important Notes on Lubrication When cleaning and or lubricating components of the ANT130 series stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the linear motion guides for any damage or signs of wear 3 Inapplications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 4 Because proper assembly and calibration can only be done at the factory do not further disassemble the stage If the stage is disassembled then reassembled a laser interferometer is required for post assembly verification to maintain warranties 4 2 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow Before beginning lubrication see Section 4 2 1 for recommended lubricants N Remove power to the stage Remove any accumulated dust or debris from the inside of the assembly Remove any dirty or dried lubricant from the v channels of the linear bearing rails Use a clean lint free cloth with a side to side motion You can use a swab soaked in Isopropyl Alcohol to re
27. efer to the appropriate system manuals and documentation for additional installation and operation infor mation If the system is uniquely configured a drawing showing system interconnects is supplied An integral linear motor comes mounted to all ANT130 stages The electrical wiring from the motor and encoder are integrated into two main connectors at the factory Refer to Section 3 6 for standard motor wir ing and connector pin outputs WARNING Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage can result nector If you are using cables other than those provided by Aerotech you must connect the pin listed as the ground in Section 3 6 to a ground connection WARNING stage s protective ground is integrated into the motor and encoder con 16 Chapter 2 www aerotech com 130 Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications The surrounding environment and operating conditions can affect the performance and service life of the stage This chapter provides information on ideal environmental and operating conditions Also included are instructions for estimating load capability given various loadings 3 1 Environmental Specifications The environmental specifications for the are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The
28. en Figure 3 2 through Figure 3 8 to find the maximum allowable load Pitch 2 2 2 9 Side 2 v Horizontal e Pitch i L gt Figure 3 1 Stage Loading Conditions 24 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications Lhr 12 Ls 10 8 3 6 4 2 0 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 2 Load Capability of ANT130 035 L Stages 14 Lhr Lhp 12 Ls 10 8 3 Ne 4 2 0 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 3 Load Capability of ANT130 060 L Stages www aerotech com Chapter 3 25 Operating Specifications ANT130 Series Stage User s Manual 26 C Lhr Lhp 15 Load kg o a 100 150 200 250 Load Distance From Stage Center mm Figure 3 4 Load Capability of ANT130 110 L Stages Lhr Lhp Ls f Max Load kg 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 5 Load Capability of ANT130 160 L Stages Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications C Lhr Max Load k
29. esef srs sors coo coo DIMENSIONS MILLIMETERS Figure 5 3 ANT130 L Z Dimensions 40 Chapter 5 www aerotech com 130 Series Stage User s Manual Overview 5 3 Basic Specifications Basic ANT130L Z series positioning stage specifications are shown in Table 5 2 Resolution is dependent on the encoder resolution and controller interpolation Table 5 2 ANT130L Z Series Specifications Mechanical Spec ANT130 35 L Z ANT130 60 L Z fications ANT130 35 L Z PLUS ANT130 60 L Z PLUS Travel 35 mm 1 in 35 mm 1 in 60 mm 2 in 60 mm 2 in Accuracy 11 3 0 um 120 uin 300 12 pin 3 0 um 120 uin 300 nm 12 uin MA 100 nm 75 100 75 ectional Repeatability Uni 50 nm 50 nm 50 nm 50 nm directional Straightness 1 2 0 um 80 2 0 um 80 2 0 um 80 pin 2 0 um 80 uin Flatness 1 2 0 um 80 yin 2 2 um 80 yin 2 0 um 80 2 0 um 80 uin Maximum Speed 200 mm s 8 in s 200 mm s 8 in s 200 mm s 8 in s 200 mm s 8 in s Maximum Accel 1 g 10 m s No 1g 10 m s No 1g 10 m s No 1g 10 m s No eration Load Load Load Load 23N 23N 23 23 Continuous Load Capacity 3l Vertical 10 kg 22 Ib 10 kg 22 Ib 10 kg 22 Ib 10 kg 22 Ib Moving Mass 1 2 kg 2 6 Ib 12 kg 2 6 Ib 1 4 kg 3 1 Ib 1 4 kg 3 1
30. eumatic cylinder 2 Remove the pneumatics cover It is attached to the vertical angle bracket with four M3 button head Screws 3 Manually lift the Z Axis tabletop while sliding off the pneumatics cover so that the cylinder rod end does not catch on the cover slot Manually set the Z Axis tabletop back down onto the hardstop 5 Mount the Z Axis assembly with M6 socket head screws using one of the available customer mounting patterns shown in Section 5 2 NOTE You can manually move the pneumatics cylinder to gain access to the mounting holes in the ver tical angle bracket A ball end wrench is recommended Cylinder Base Figure 54 ANT130L Z Mounting Pattern 42 Chapter 5 www aerotech com 130 Series Stage User s Manual Overview 6 Torque the M6 socket head screws to 8 N m 71 in Ibs ware that is too long It will bottom out and deform the lower axis tabletop A WARNING Donot attach the Z Axis assembly to another ANT130 series stage with hard 10 11 12 13 Verify the pneumatics cylinder s alignment NOTE This step is only required if you moved the pneumatics cylinder as described in Step 5 To confirm the alignment manually lift and lower the stage while watching the body of the pneumatics cylinder If you see the cylinder shifting around from front to back or from right to left adjust until move ment is minimized Reattach the pneumatics cover by reversing steps 2 and 3 NOTE To preven
31. formation at www aerotech com Table 1 1 Model Numbering System for Single Axis Stage 130 0351 ANTI30035 PLUS 130 0601 ANTI30 060 L PLUS 110 mm travel stage with linear motor and limits ANT130 110 L PLUS 110 mm travel stage with linear motor and limits high accuracy ANT130 160 L 160 mm travel stage with linear motor and limits ANT130 160 L PLUS 160 mm travel stage with linear motor and limits high accuracy Output Cable Connectors 25DU Single 25 pin D connector standard 4DU 25DU 4 pin HPD and 25 pin D connectors Note 25DU single 25 pin connector option not valid for systems using bus voltages greater than 80 V Table 1 2 Model Numbering System for Two Axis XY Stage ANT130 XY Series Linear Motor Stage ANT130 060 XY 60 mm travel stage with linear motor and limits ANT130 060 XY PLUS 60 mm travel stage with linear motor and limits high accuracy ANT130 110 XY 110 mm travel stage with linear motor and limits ANT130 110 XY PLUS 110 mm travel stage with linear motor and limits high accuracy ANT130 160 XY 160 mm travel stage with linear motor and limits ANT130 160 XY PLUS 160 mm travel stage with linear motor and limits high accuracy Cable Management System Options XY CMS CMS Cable management system for X Y assembly XYZ CMS Cable management system for 3 axis assembly XY stage plus additional axis on top Output Cable Connectors 25DU Single 25 pin D connector standard 4DU 25DU 4 pin HPD and 25
32. fred Besold Address Name Position Location Date AEROTECH GmbH S d West Park 90 D 90449 N mberg Cl Wty hd Weibel Engineer Verifying Compliance Pittsburgh PA September 2010 Chapter 1 www aerotech com 130 Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure for the ANT130 stage including handling the stage pre paring the mounting surface to accept the stage securing the stage to the mounting surface attaching the payload and making the electrical connections WARNING Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Use compressed nitrogen or clean dry air to remove any dust or debris that has collected during shipping Visually inspect the stage for damage If any damage has occurred during shipping report it immediately Remove stage shipping brackets Set the stage on a smooth flat and clean surface This is a simple yet very important step in maintaining the integrity of the stage Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference WARNING I
33. g 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 6 Load Capability of ANT130 060 XY Stages Lhr Lhp 12 4 Load kg 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 7 Load Capability of ANT130 110 XY Stages www aerotech com Chapter 3 27 Operating Specifications ANT 130 Series Stage User s Manual Max Load kg 0 50 100 150 200 250 Load Distance From Stage Center mm Figure 3 8 Load Capability of ANT130 160 XY Stages 28 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications 3 5 Limit Switches ANT 130 series stages are provided with two EOT end of travel limit switches The limit switches signal when the stage has reached its maximum useable travel distance in both directions 3 5 1 Limit Switch Wiring Limit switches are open collector TTL compatible devices that change output states when the stage approaches its maximum travel distance Since they are open collector devices they may be interfaced to 24 Volt logic inputs 4Du 25Du Connectors 1 Single 25Du Connector 45VDC 24 VIO Common 24 GRN Pull Up 24 WHT CW Limit N C Switch Controller N C Switch 24 GRY CCW Limit Figure 3 9 130 Series Limit Switch Wiring The input to the controller is seen as a logic 0 typical 0 4V 12 8 mA when no limit condition is present When t
34. he limit switch is activated a 5V source through a pull up resistor on the controller causes a logic 1 typically 4 8 5 V to be seen by the controller input See Figure 3 9 for a diagram of limit switch wiring www aerotech com Chapter 3 29 Operating Specifications ANT130 Series Stage User s Manual 3 6 Standard Motor Wiring Stages fitted with standard motors and encoders come from the factory completely wired and assembled For reference connector pin outputs and general wiring information is given in Table 3 5 and the following fig ures Pin outputs are defined in Table 3 6 NOTE Refer to the other documentation accompanying your Aerotech equipment Call your Aerotech rep resentative if there are any questions on system configuration NOTE If you are using your own cables to connect the stage ensure that motor and ground wires can handle current higher than the continuous motor current The voltage rating of the wire insulation must be greater than the motor bus voltage 30 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications 5 X of K a d 18 D u Jl Table 3 5 Feedback and Motor Pin Assignments for 25DU Cable Option 2 72 COS moememalencoderoupuLComplementofcs Ls Complements Incremental encoder spleen of Marker with a line driven TTL
35. igured as normally closed If the stage is driven beyond these electrical limits a mechanical shock absorbing hard stop limits carriage movement 1 1 1 Optional Features ANT 130 stages be ordered as a single axis ANT130 L or as and integrated X Y stage ANT130 XY The ANT 130 stages also have the option of two accuracy grades There is the standard ANT130 stage accu racy or the high accuracy grade PLUS designation 130 stage ANT 130 stages come standard with a single 25 pin D connector per axis however there is the option to have a 4 pin hi power D and 25 pin D connector for applications that require bus voltages greater than 80 V For vacuum applications two vacuum preparation options are available one compatible with low vacuum environments down to 10 torr and the other for high vacuum 1073 10 6 torr Custom configurations such as XY Z systems are common and readily available Contact Aerotech for more details on optional fea tures and configurations 2 Chapter 1 www aerotech com 130 Series Stage User s Manual Overview 1 1 2 Model Numbers Stage model number example ANT130 110 L PLUS 25DU The tables below list the available options in the order they appear in the example above Aerotech con tinually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product in
36. ingle axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller 20 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications Table 3 3 ANT130 XY Series Specifications Mechanical Specifications ANT130 060 XY ANT130 060 XY ANT130 110 XY ANT130 110 XY PLUS PLUS 2 5 250 nm 4 0 300 nm 100 yin 10 uin 160 yin 12 uin Resolution 1nm 0 04 uin 1nm 0 04 uin 1nm 0 04 uin 1nm 0 04 uin 100 nm 75nm 100 nm 75nm 4 3 pin 4 3 pin Repeatability Uni Directional 0 p d m 1 uin 1 uin 1 pin 1 uin 1 xn 1 5 um 11 5 11 5 sisighiness 60 yin 60 yin 60 yin a 1 5 1 5 um 1 5 um 1 Maese eese 12 1 10 arc sec 5 10 Maximum Speed 350 mm s 350 mm s 350 mm s 350 mm s 14 in s 14 in s 14 in s 14 in s pu MEE 1 nm 3 nm 3 nm 3 nm lt 0 04 0 04 pin 0 04 0 04 pin LUN MTBF Mean Time Between 30 000 Hours Failure 1 Certified with each stage Accuracy 111 Repeatability Bi Directional 111 2 In Position Stability listing is 30 value 3 Axis orientation for on axis loading is lis
37. istence costs and the prevailing labor cost including travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Fax 412 963 7459 Pittsburgh PA 15238 USA Appendix A www aerotech com 130 Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 03 00 Section s Affected General Information Section 1 1 2 Updated order information Section 1 2 Updated dimension drawings www aerotech com Appendix B 47 Technical Changes ANT130 Series Stage User s Manual Table B 2 Archived Changes Section s Affected 1 02 00 Section 1 4 Added section Section 3 1 Added section Chapter 2 Installation Sec Added safety information and warnings tion 2 1 Section 2 4 Sec tion 2 6 Section 5 4 1 and Section 1 3 Section 3 6 Added note about current requirements of motor and ground wires 1 01 00 Chapter 5 ANT130 L Z Added chapter on ANT130 L Z Section 1 2 Added stage limit travel dimension Section 1 1 1 Section 1 1 2 H option is now PLUS option and Section 3 3 Qo 48 Appendix B www aerotech com Index 130 Series Stage User s Manual Index operating 18 ANT130 L Z LLL 37 Optional 2 Attaching the 15 1 B P
38. it should be minimized to improve the rigidity of the system www aerotech com Chapter 2 13 Installation ANT130 Series Stage User s Manual 2 4 Securing the Stage to the Mounting Surface Move the stage table to access the 6 8 mm 0 27 in diameter mounting holes along the edges of the stage This stage is designed to use socket head cap screws SHCS to secure the base to the mounting surface Use M6 x 18 mm or 1 4 x 3 4 long SHCS to achieve 1 5x diameter thread engagement Torque the mounting Screws to 5 4 4 ft Ib WARNING The ANT130 must be mounted securely Improper mounting can result in injury and damage to the equipment WARNING Donot attempt to manually move the ANT 130 if it is connected to a power Source Figure 2 7 Mounting Hole Locations 14 Chapter 2 www aerotech com 130 Series Stage User s Manual Installation 2 5 Attaching the Payload to the Stage To prevent damage to the stage or parts test the operation of the stage before any payload is mounted to the stage tabletop Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for future reference For information on electrical con nections refer to the Electrical Installation section later in this chapter the documentation of the motion con trol system delivered with the stage and the wiring drawings in
39. itioning Stage Www aerotech com Chapter 5 37 Overview ANT 130 Series Stage User s Manual Pneumatics Cover Counter Balance a Air Regulator D Figure 5 2 ANT130L Z with Component Labeling 38 Chapter 5 www aerotech com 130 Series Stage User s Manual Overview 5 1 1 Model Numbers The stage model number indicates the features on a particular stage To determine the options on your stage refer to Table 5 1 for an explanation of the numbering system Table 5 1 Model Numbering System ANT130 L Z Series Linear Motor Stage 35 L Z 35 mm 1 in vertical travel stage with linear motor and limits 60 L Z 60 mm 2 in vertical travel stage with linear motor and limits Accessories to be ordered as a separate line item PLUS High Accuracy Option www aerotech com Chapter 5 39 Overview ANT 130 Series Stage User s Manual 5 2 Dimensions A 1 2 HARDSTOP 1 TRAVEL T 50 50 B 1 2 NORMAL TRAVEL 2 125 E 1 2 LIMIT Y Y Y M TRAVEL 24 CUSTOMER MOUNTING COUNTERBALANCE AIR SUPPLY 21XM6x1 0 F9 9 130 al 6MM TUBE CENTERED ON CARRIAGE 130 45 95 146 6 F 25 1 Y STAGE MOUNTING 9X 66 THRU ALL CLEARANCE FOR M6 SHCS REGULATOR KNOB FOR COUNTERBALANCE ADJUSTMENT Ei MOTOR FEEDBACK CABLE EXIT LOCATION faf
40. move stubborn debris 4 Apply athin continuous film of lubricant to the exposed v channels of the bearing rails on both ends of the stage A good quality natural bristle artist s brush makes an excellent applicator Do not use any applicator that could scratch or otherwise damage the v channels 5 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides The stage table should move freely with little resistance Repeat steps 2 through 4 for any areas covered by the original table position 7 Restore power to the stage drive the stage table back to its original position to redistribute lubricants 36 Chapter 4 www aerotech com 130 Series Stage User s Manual Overview Chapter 5 ANT130 L Z This chapter covers the standard features of the ANT130L Z series Because the ANT130L Z incorporates the ANT130 35 L and ANT130 60 L many of the topics covered previously in this manual still apply to the ANT130L Z NOTE Aerotech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com 5 1 Standard Features The ANT130 Z series takes the compact 130 35 L and ANT 130 60 L stages and integrates them with a vertical angle bracket and pneumatic counterbalance system Figure 5 1 Typical ANT130L Z Series Pos
41. mproper handling could adversely affect the ANT 130 s performance Use care when moving the stage Manually lifting or transporting the stage can result in injury WARNING Lift the ANT130 only by the base gt www aerotech com Chapter 2 9 Installation ANT 130 Series Stage User s Manual 2 2 Shipping Brackets Aerotech provides shipping brackets to prevent unwanted stage motion and potential damage from occurring during shipment The brackets are red anodized aluminum and they must be removed from the stage before it can operate There are two types of shipping brackets one type forthe linear stages ANT130 L and one type for the integrated XY stages ANT 130 XY Figure 2 1 shows the shipping brackets used to constrain single axis stages Figure 2 2 shows the shipping brackets used to constrain XY systems Figure 2 3 Figure 2 4 and Figure 2 5 show how to properly remove the shipping brackets used on XY systems Figure 2 1 Shipping Bracket Used on Single Axis Stages Figure 2 2 Shipping Brackets Used on XY Systems 10 Chapter 2 www aerotech com 130 Series Stage User s Manual Installation Remove 4 M3 E SHCS to free upper axis Figure 2 3 ANT130 XY Shipping Bracket Removal Procedure Step 1 Remove 2 M4 SHCS Figure 24 ANT130 XY Shipping Bracket Removal Procedure Step 2 www aerotech com Chapter 2 11 Installation ANT130 Series Stage User s Manual Remove 2 M3 SHCS to free lower axis
42. n 30 days after the issuance of a return authorization number will be subjectto review After Aerotech s examination warranty or out of warranty status will be determined If upon Aerotech s examination a warranted defect exists then the product s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such time the buyer must issue a valid purchase order to cover the cost ofthe repair and freight or authorize the product s to be shipped back as is at the buyer s expense Failure to obtain a purchase order number or approval within 30 days of notification will result the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement components are warranted for one year from date of shipment Attimes the buyer may desire to expedite a repair Regardless of warranty or out of war ranty status the buyer must issue a valid purchase order to cover the added rush serv ice cost Rush service is subjectto Aerotech s approval www aerotech com Appendix A Laser Products Return Procedure Warranty and Field Service Returned Product War ranty Determination Returned Product Non warranty Determination Rush Service 45
43. optimal operating temperature is 20 2 68 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Operating 0 m to 2 000 m 0 ft to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Humidity Operating 20 to 60 RH Storage 10 to 70 RH non condensing in original packaging cation Dust Expo The ANT130 stages are not suited for dusty or wet environments This equates to an ingress pro sure tection rating of IPOO Use Indoor use only WARNING Do not expose the ANT130 to environments or conditions outside the specified range of operating environments Operation in conditions other than those specified can cause damage to the equipment Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli www aerotech com Chapter 3 17 Operating Specifications ANT130 Series Stage User s Manual 3 2 Accuracy and Temperature Effects The accuracy specification of ANT130 series stages is measured at the center of travel 25 mm above the tabletop with the stage in a horizontal position The stage is assumed
44. pin D connectors Note 25DU single 25 pin connector option not valid for systems using bus voltages greater than 80 V www aerotech com Chapter 1 3 Overview ANT130 Series Stage User s Manual 1 2 Dimensions M6X1 0 Y 7 19 PLACES CENTERED ON CARRIAGE D 2 D 2 8 2 A 130 21 45 eis C 4 127 8 A ANT130 110 L AND ANT130 160 L ONLY I DETAIL C SCALE2 5 MOUNTING HOLES TYP MODEL STAGE NOMINAL LIMIT D HARDSTOP E LENGTH TRAVEL TRAVEL TRAVEL ANT130 035 L ANT130 060 L ANT130 110 L ANT130 160 L 280 160 166 175 92 DIMENSIONS MILLIMETERS Figure 1 2 ANT130 L Dimensions 4 Chapter 1 www aerotech com 130 Series Stage User s Manual Overview RAD F CABLE BEND RADIUS 21X M61 0 Y 7 0 1 1 3i CARRIAGE 25 50 120 DETAILA SCALE 2 5 We Bie MOUNTING HOLE TYP 75 2 Ind 90 I 2 D 2 le 125 0 2 MODEL A STAGE NOMINAL C LIMIT D HARDSTOP LENGTH TRAVEL TRAVEL TRAVEL ANT130 060 XY 180 60 X 60 66 X 66 75 75 42 87 5 ANT130 110 XY 230 110 X 110 116 X 116 125 X 125 67 100 130 160 280 160 160 166 166 175 X 175 92 112 5 nid LOI
45. t damage to delicate payloads test the operation of the stage before attaching the pay load to the stage table Connect the air supply to the counterbalance and verify that the regulator is set as minimum pressure by tuming the regulator knob counterclockwise the direction Turn on the air supply The table top should still be resting on the lower hardstop Manually lift and support the tabletop While still supporting the tabletop allow it to slowly lower while increasing the air supply pressure Increase the supply pressure by turning the regulator knob clockwise the direction until the tabletop reaches equilibrium The system is now in balance Proceed with the electrical installation and test the motion control system in accordance with the system documentation For information on electrical connections refer to Section 3 6 Standard Motor Wiring www aerotech com Chapter 5 43 Overview ANT130 Series Stage User s Manual 5 4 2 Attaching the Payload to the Stage The following steps outline the payload mounting procedure 1 2 3 4 5 Complete the steps outlined in Section 5 4 1 Confirm that all electrical power is disconnected prior to making any mechanical adjustments Do not turn off air supply to system Manually center the tabletop and reattach the shipping bracket using four M3 button head socket cap screws Attach the payload to the stage NOTE Use three point mounting if possible when att
46. ted 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller www aerotech com Chapter 3 21 Operating Specifications ANT130 Series Stage User s Manual Table 3 3 ANT130 XY Series Specifications continued pm m 1nm 1 nm In Position Stability 0 04 0 04 1 Certified with each stage 2 In Position Stability listing is 30 value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller 22 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications Table 3 4 BLMUC 95 A Motor Specifications Units Specifications Performance Specifications 151 Continuous Force No cooling 21 N Ib Peak Force N Ib Electrical Specifications 5 23 0 5 2 161 9 36 4 Winding Designation BEMF Constant Line Line Max Vim s V in s 9 00 0 23 7 00 Continuous Current No cooling 21 Amprms 2 94 2 08 in s Peak Current Stall 3 20 6
47. to be fully supported by a mounting sur face meeting or exceeding the specification in Section 2 3 Extreme temperature changes could cause a decrease in performance or permanent damage to the stage Aerotech stages are designed for and built in a 20 C 68 F environment Any deviation from standard oper ating temperature will affect stage accuracy The severity of temperature effects on all stage specifications depends on many different environmental conditions including how the stage is mounted Contact the fac tory for more details The thermal expansion coefficient of the encoder scale is 3 25 ppm C Travel will increase or decrease at this rate as the temperature of the encoder scale temperature deviates from 20 C 68 F 18 Chapter 3 www aerotech com 130 Series Stage User s Manual Operating Specifications 3 3 Basic Specifications Basic ANT 130 series positioning stage specifications are shown in Table 3 2 and Table 3 3 Resolution is dependent on encoder resolution and controller interpolation Specifications for the standard BLMUC 95 A motor are given in Table 3 4 Table 3 2 ANT130 L Series Specifications ANT130 035 L ANT130 060 L Mechanical Specifications ANT130 035 L PLUS ANT130 060 L PLUS Aguas 2 250 nm 2 250 nm y 80 yin 10 pin 80 yin 10 1 0 04 uin 1 0 04 uin 1 0 04 uin 1 nm 0 04 uin n 1 100 75 100 75 Repeatabili
48. ty Bi Directional 43 uin 44 yin 3 yin TIMES 25 nm 25 nm 25 nm 25 nm 440 ui 1 0 1 0 um 1 0 um 1 0 1 Maximum Speed 350 mm s 350 mm s 350 mm s 350 mm s P 14 in s 14 in s 14 in s 14 in s 19 10 m s 19 10 m s 19 10 m s 1g 10 m s MexitmomAebelerton No Load No Load No Load No Load lt 1nm lt 1 nm 1 0 um 1 0 um 41 0 um 1 0 um 0 pin lt 1 lt 1 0 04 yin 0 04 0 04 yin 0 04 yin Maximum Force Continuous Horizontal 12 0 kg 26 516 12 0 kg 26 5 Ib 12 0 kg 26 5 Ib 12 0 kg 26 5 lb gp Horizontal 10 2216 10kg 2216 10 2216 10 2216 1 2 2 610 1 2 2 610 1 4 3 116 1 4 3 110 In Position Stability 2 Stage Mass 2 1 kg 4 6 Ib 2 1 kg 4 6 Ib 2 5 kg 5 5 Ib 2 5 kg 5 5 Ib Aluminum Body Black Hardcoat Finish pd Mean Time Between Fail 30 000 Hours 1 Certified with each stage 2 In Position Stability listing is 30 value 3 Axis orientation for on axis loading is listed 4 Specifications are for single axis systems measured 25 mm above the tabletop Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 5 PLUS requires the use of an Aerotech controller www aerotech com Chapter 3 19 Operating Specifications ANT130 Series Stage User s Manu
49. ual 1 1 Standard Features The ANT 130 series stages incorporate linear cross roller bearings a linear motor and a non contact linear encoder These features allow the ANT 130 series stages to provide excellent performance in speed accu racy resolution repeatability and reliability The linear cross roller bearings offer excellent stiffness high load carrying capabilities and minimal friction for smooth movement The cross roller bearings also incorporate a system to prevent cage creep and keep the rollers centered in the bearing rails The ANT 130 series stages are driven by a linear motor The brushless linear motor uses ironless forcer which means there is zero cogging and there are no attractive forces resulting in unsurpassed smoothness of motion moving magnet track design eliminates the need for cable management improving long term reliability A high accuracy non contact linear encoder allows the ANT 130 series stages to have an incremental step size of 1 nm when coupled with Aerotech drives and controls This is especially useful in alignment appli cations where outstanding step to step resolution is critical The single axis linear ANT 130 has four standard travel distances 35mm 60mm 110mm and 160mm The two axis ANT 130 offers three standard travel distance combinations 60mm x 60mm 110mm x 110mm and 160mm x 160mm Optical limit switches are mounted at each end of travel These switches are conf
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