AG-UC2-UC8 - Agilis - Piezo Motor Driven
Contents
1. AG M100N f SCO Wa a lt o O 2 14 154 3 EDH0224En5030 11 15 2 Agilis Series Piezo Motor Driven Components 2 0 AG LS25 xx Linear Stages 2 1 Specifications AG LS25 AG LS25 27 Travel range 0 47 in 12 mm 1 06 in 27 mm Minimum incremental motion um 0 05 0 1 Absolute positioning accuracy um 100 250 Maximum speed mm s gt 0 5 with no axial load 0 4 with no axial load gt 0 2 with 1 7 N axial load 0 15 with 1 7 N axial load Max normal load capacity N 3 max 40 mm cantilever 2 5 max 40 mm cantilever Holding force N 3 3 Axial load capacity N 2 1 5 Pitch Yaw urad 200 200 Material Stainless steel Limits Mechanical hard stops and precision electrical limits switch Weight oz g without cable 2 5 70 without cable 4 4 125 with cable 3 4 95 with cable 5 3 150 Cable 1 2 m length 4 wire mini Din connector Can extend cable length using AG MD4 1 5 extension cable Life time gt 1000 m gt 500 000 cycles of 1 mm motion D The step size for forward and backward direction is adjustable With default settings the step size for the forward direction varies from the step size for the backward direction and may be larger than 50 nm Individual steps are not 100 repeatable 2 For absolute positioning the stage determines the average step size by counting the number of steps between the limits The execution of2. 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales Tel 33 0 1 60 91 68 68 e mail france newport com Technical Support e mail tech _europe newport com Service amp Returns Tel 33 0 2 38 40 51 55
3. Input tests Description Returns Errors EDH0224En5030 11 15 0 Noerror 2 Axis out of range must be 1 or 2 3 Parameter must not be specified 5 Not allowed in local mode controller must be in remote mode 6 Not allowed state axis must not be in state 3 TS Get axis status xxTS xx Axis number xx lor2 _ Check the axis 1 or 2 Check that parameter is not specified Returns the status of the axis Possible returns are Error code Description 0 Ready not moving 1 Stepping currently executing a PR command 2 Jogging currently executing a JA command with command parameter different than 0 3 Moving to limit currently executing MV MA PA commands 0 Noerror 3 Parameter must not be specified VE Get controller firmware version VE None Check that axis is not specified Check that parameter is not specified Returns the firmware version of the controller Returns the firmware version of the controller 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified QY Newport Experience Sulia 24 Agilis Series Piezo Motor Driven Components Syntax Parameters Description Range Input tests Description Returns Errors GO Newport Experience Solutions ZP Zero position xxZP xx Axis number xx lor2 Check controller is in remote mode Check t
4. 11 15 Agilis Series Piezo Motor Driven Components On the AG UC8PC version jumpers on the electronic board do the communication type selection For each communication type only one set of jumpers should be placed at a time Jumper Set COM JS1 1 amp 2 3 amp 4 RS232 JS2 5 amp 6 7 amp 8 RS485 JS3 9 amp 10 11 amp 12 USB The required connections schemes depending on the jumper location is indicated on the figure below Communication parameters are indicated in the table below Protocol Speed Jumper RS232 115200 JS1 RS485 115200 JS2 USB 921600 JS3 JS1 COM Selectior LR E Header E r 4 JS3 E Pont CC coc B Connector COM ul une External CE Power Supply 1 RS 2 Aa _ 3 RSABS Te EE CKU Ca RS48S Rxt ee 7 END _ 8 GD r G a 10 Power supply 5 V WARNING Never plug anything on the USB cable when power is supplied through the external J2 connector QY Newport EDH0224En5030 11 15 28 Experience Solutions Agilis Series Piezo Motor Driven Components 5 4 1 USB Communication Using a Type A mini USB Cable Install the software supplied with the CD on your PC and check that JS3 jumpers are set on pins 9 amp 10 and 11 amp 12 Apply the following settings to the COM port of your PC e Baud Rate 921600 e Data Bits 8 e Parity None e Stop Bits 1 e Flow Control None
5. e Termination Character CR LF 5 4 2 RS232 Communication Install the software supplied with the CD on your PC and check that JS1 jumpers are set on pins 1 amp 2 and 3 amp 4 Apply the following settings to the COM port of your PC e Baud Rate 115200 e Data Bits 8 e Parity None e Stop Bits 1 e Flow Control None e Termination Character CR LF 5 4 3 RS485 Communication Install the software supplied with the CD on your PC and check that JS2 jumpers are set on pins 5 amp 6 and 7 amp 8 Apply the following settings to the COM port of your PC e Baud Rate 115200 e Data Bits 8 e Parity None e Stop Bits 1 e Flow Control None e Termination Character CR LF CAUTION In order to communicate through the RS232 or RS485 protocols provide the power supply through the J2 connector and configure the selection jumpers accordingly CAUTION Mating connectors or equivalent can be used GO Newport Experience Solutions 29 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 5 5 LED Indication The LED can display green or orange to show states Green Orange Solid No axis in the limit 1 or 2 axes in the limit No axis moving No axis moving Blinking No axis in the limit 1 or 2 axes in the limit 1 or 2 axes moving or 2 axes moving CAUTION If there is no communication please check the led status and check if the jumpers are correctly configured
6. equipped with a vacuum compatible cable but a not vacuum compatible connector So the customer has to cut the cable to use one part in vacuum environment and the other part to go from his feed through to the controller Customer has in charge to connect both part of this cut cable on its feed through WARNING Do not use AG UC2 or AG UC8 controllers after the unit experiences abnormal conditions that may compromise safety and functionality Newport cannot be held liable if the above recommendations are not followed CAUTION AG UC8PC boards are very likely to be damaged by electrostatic discharge ESD Please use ESD protective measures when unpacking and handling these devices GO Newport Esperance Solutions ix EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components QY Newport Experience Solutions EDH0224En5030 11 15 x Agilis Series Piezo Motor Driven Components Piezo Motor Driven Components Agilis ano AI en eee CE l lt lt CHANEL 1 CHANNEL O CHANNEL mare aa Agilis components Newport s new piezo motor driven components take a completely new design approach to the adjustments needed for many laser setups Agilis components provide the ultra high adjustment sensitivity and convenient remote operation of a motorized component at the price and size of a manual mount Why Agilis Mechanical friction and the effects
7. 5 6 Agilis Util Software The Agilis Util software provides access to all functions either on the AG UC2 and AG UC8 controllers The Agilis Util software provides access to all functions of the Agilis controller It is compatible with PC s with a minimum of 64 MB of RAM and Windows 98 2000 NT or XP operating system To install the Agilis Util software load the distribution CD The program gives you the option of where to load the files or you can use the default directory C Program Files Newport AGILISTools A GILIS UC2 User Tool After installation is complete reboot your PC and open AgilisUserTool by double clicking on the newly created icon The following image of the AG UC2 controller will open Agilis Util screen after start no controller selected QY Newport EDH0224En5030 11 15 30 cours Skt Agilis Series Piezo Motor Driven Components A right mouse click in the window opens the main menu A right mouse click in the window opens the main menu Click Select controller The following window will open Controllers Select a controller Senal number Controller name FTRDZZWEB AGILIS 1 None None FTRD2ZE AGILIS 1 Select controller screen In the figure above one controller has been detected You can change the controller name by simple typing into the field but you can not change the serial number The serial number is a unique identifier referring to t
8. an absolute positioning command may takes up to 80 s 2 2 Dimensions NOTE For XY assemblies of AG LS25 use 4 x TC M3x4 screws supplied with each stage For mounting AG LS25 stages to B Series adapter plates M SDS25 or M DS25 use 4 x TC M2x4 screws plus washers supplied with each stage 2 2 1 AG LS25 1 02 94 0 _ d RER L HOLE M4 THD ti USABLE DEPTH 12 3 1 02 26 Y 4 CLR HOLES FOR M3 SCREWS 4 HOLES M3 THD ON SOR 79 20 4 SOR 79 20 USABLE DEPTH 14 3 5 4 PIN 2 CABLES 0 07 9 1 8 ND Newport Experience Soilis MINI DIN CONNECTOR LENGTH 45 1140 3 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 2 2 2 AG LS25 27 12 HOLE 8 32 THD OLEM4THD 12 gt t r lt im USABLE DEPTH 12 3 H USABLE DEPTH 12 3 13 HOLE 8 32 THD HOLE M4 THD 6 HOLES M3 THD 2 HOLES C BORED USABLE DEPTH 24 6 USABLE DEPTH 24 6 79 20 SPASING FOR M3 SCREWS USABLE DEPTH 14 3 5 79 20 SPACING 2 CABLES 9 07 1 8 4 PIN MINI DIN CONNECTOR LENGTH 45 1140 2 2 3 gt Newport EDH0224En5030 11 15 4 kai miai Agilis Series Piezo Motor Driven Components 3 0 AG PR100 Rotation Stage 3 1 Specifications Optics diameter Max optics thickness Travel range Minimum incremental motion Maximum speed Wobble Limit
9. of human operation limit the precision of many optical adjustments In theory it is possible to achieve sub um adjustment sensitivity with very fine mechanics and differential screws However in practice the lateral forces applied to a component during an adjustment often have an excessive effect making alignments lengthy and frustrating Also many optical experiments are extremely sensitive to environmental factors and provide consistent results only when shielded well against external influences Motorized mounts overcome the limits of manual components but are typically costly and bulky restricting their use for systems integration or simple remote operation in tight spaces Agilis components provide a lower cost solution in a miniature size without compromising adjustment sensitivity speed or position stability Agilis components feature Newport s new proprietary non resonant piezo step direct motors The motor is directly coupled to the moving platen When idle spring forces lock the position for true set and forget long term stability Agilis components have a faster adjustment speed than alternative screw driven designs and are free of the problems associated with backlash or hysteresis In contrast to ultrasonic motors the Agilis non resonant motor concept makes small adjustments more predictable with its 50 nm incremental motion capability ideal for ultra sensitive optical alignments Agilis components must be driven by the A
10. the TS command detalls Experience Sokrtiors 11 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Agilis status Channel 1 Channel 2 Status screen When selecting Controller Version from the main menu the following window will appear Agilis version Agilis uc2 1 0 0 Controller version screen When selecting About from the main menu the following window will appear Experience Solutions About screen 4 7 ASCII Command Set This section describes the two letter ASCII commands that may be used to configure and operate the AG UC2 controller when the controller is connected to a computer These commands work with LabView Visual Basic C or any other computer application that can issue ASCII commands via a computer COM port Newport s Agilis Util application described in previous section of this manual uses these commands 4 7 1 Syntax The AG UC2 is a command driven controller The general format of a command is a two letter ASCII character preceded axis parameters and followed by parameters specific to the command EDH0224En5030 11 15 12 cower Sate Agilis Series Piezo Motor Driven Components GO Newport Experience Solutions 4 7 2 Command format a nn Axis number 1 or 2 AA Command name xx Optional or required value or to query current value Both upper and lower case characters a
11. 2 Status screen When selecting Controller Version from the main menu the following window will open AG UC8 v2 1 1 Controller version screen When selecting About from the main menu the following window will open About screen Experience Syiti 33 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 5 7 ASCII Command Set NOTE Both AG UC8 and UC8PC controllers feature the same set of commands as the AG UC2 controller so please refer to chapter 4 7 4 for details on available commands The CC command is the only command specific to the AG UC8 UC8PC multi axes controllers see details of this command below CC Change channel Syntax CCnn or CC Parameters Description nn Channel number Range nn 1to4 Input tests Check the controller is AG UC8 Check controller is in remote mode Check there is no background task MA PA Check the current state of both axes must be 0 Check channel number must be integer Description This command is specific to AG UC8 The piezo actuators are selected by pairs which are grouped in four channels This command changes the selected channel Returns None Errors 0 No error 1 Unknown command only available on AG UC8 2 Must not specify any channel 3 Wrong format for nn must be integer 4 Wrong value for nn must be between 0 and 4 in
12. Agilis Series Piezo Motor Driven Components Compliant A Newport Experience Solutions V2 2 x User s Manual Precision Motion Guaranteed Agilis Series Piezo Motor Driven Components QO Newport Experience Solutions EDH0224En5030 11 15 li Agilis Series Piezo Motor Driven Components Table of Contents OY ll ss n u aS usuy ace tence eee noes eens IV EU Declaration of Conformity V sI BA uuu unus VI Warnings and CautIons aaaaaaaaavssssaaaaaaaaaaaaanaaaaaaanananaaanauuaaanuunnnnnnnnnnnaaai vili Piezo Motor Driven Components 1 1 0 AG M050 and AG M100 Optical Mounts 2 LE Speen IIIA 2 Ti Ki oi a eee eet eee 2 20 AG LS25 xx IA 3 PA gt D CO AOI E E de et a TT 3 2 Ia aa 3 L D 2 R uu u u Pe 3 WA AA ere nr ene ene a uns 4 2 2 3 AG LS25 27 Inserter for 1 Diameter OpticS 4 3 0 AC PR100 Rotation Stage wania 5 L S C lO OD u E E re ee hs 5 s2 DR OS eee dd cn 5 4 0 AG UCZ Piezo Controller LIL LULU uuu 6 2 8 WAA ee ee E ne u s 6 4 Mode Or OPETI Oi u uuu una ha 6 4 CRC CE O aus an ne ee eee 6 44 Local Operation ia 7 4 5 USB Communication 8 JO AU SOIC Wy Ale uuu ee tn 9 AT ASCE Ot Co cas asun 12 WI ei de 12 Bcd CTA MOTS a ti ae 13 Ao Ste D AO a u uN 14 KIA ORM AIC Sb SUN
13. G UC2 AG UC8 or AG UC8PC controllers 1 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 1 0 AG M050 and AG M100 Optical Mounts Specifications AG M050 AG M100 Optics diameter 0 5 in 12 7 mm 1 0 in 25 4 mm Allowable thickness of optics 0 16 to 0 24 m 4 to 6 mm 0 16 to 0 24 m 4 to 6 mm Angular range E 2 Adjustment sensitivity 2 urad 1 urad Absolute positioning Accuracy Repeatability 0 059 0 059 with models AG M050L and AG M100L Weight 25 g 85 g NOTE Cable length 1 2 m length 4 wire mini DIN connector Can extend cable length using AG MD4 1 5 extension cable The V6 TI B Max position deviation before an MA command measure absolute current position and after a PA compatible up to 10 hPa command move to absolute position 2 Available with models AG M050L V6 and AG M100L V6 only 1 2 Dimensions Models AG MO50N V6 Rear View Rear View gt a lt AG M050L V6 AG M050N au Le OPTIC MOUNTING 2 x 2 cable 2 x 1 cable 4 5 NYLON TIP SET SCREW 5 64 OR 2MM HEX 9 50 OPTICS 2 HOLES C BORED wA FOR 8 32 M4 SCREWS N Models AG M100N V6 Rear View Rear View AG M100L V6 AG M100N OPTIC MOUNTING 25 2 x 2 cable 2 x 1 cable lt NYLON TIP SET SCREW 5 64 OR 2MM HEX 01 OPTICS 2 HOLES C BORED FOR 8 32 M4 SCREWS 2 14 54 3 1 00 254
14. GA Cal OM anne as mina a ee es 30 OO DES ON ARS ae a at deu 30 s A I Q OO ea ee 34 CE CG th ii uu u buna hs 34 SL TAI O POTD scans luu Erreur Signet non d fini Agilis Series Piezo Motor Driven Components Warranty GO Newport Experience Solutions Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part This warranty also does not apply to fuses This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages First printing 2009 Copyright 2012 by Newport Corp
15. The execution of the command can last up to 2 minutes NOTE The MA command functions properly only with devices that feature a limit switch like models AG LS25 AG M050L and AG M100L Returns the distance of the current position to the limit in 1 1000th of the total travel 0 Noerror 2 Axis out of range must be or 2 3 Wrong format for nn must be integer 5 Not allowed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 Count steps to limit Count steps from limit to limit Move to initial position Process of position measurement Experience Sakina 16 Agilis Series Piezo Motor Driven Components Syntax Parameters Input tests Description Returns Errors Syntax Parameters Input tests Description Returns Errors GO Newport Experience Solutions ML Set to local mode ML None Check that axis is not specified Check that parameter is not specified Sets the controller to local mode In local mode the pushbuttons on the controller are enabled and all commands that configure or operate the controller are disabled To go to remote mode use the MR command At power up the controller is always in local mode None 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified MR Set to remote mode MR None Check that axis is not specifie
16. bViewVI s for all functions are provided as well 4 2 Modes of Operation The Agilis AG UC2 provides two modes of operation In local mode default setting at power up the push buttons are enabled and most computer functions are disabled see table page 13 The local operation is described in detail in section 4 4 In remote mode all push buttons are disabled and the controller can be fully operated from a PC either from the supplied Agilis Util software see section 4 5 for details or by sending ASCII commands see section 4 6 for details To switch from local to remote mode use the Agilis Util software see section 4 4 for details or send the command MR To switch from remote to local mode either close the Agilis Util software or connect to another controller through the software and send the ML command or disconnect and reconnect the controller to power 4 3 Getting Started Connect the two cables from the Agilis optical mount to the AG UC2 controller Connect the Agilis controller to a powered USB port or to the USB power supply Newport part number USB CH EDH0224En5030 11 15 6 Experience Solutions Agilis Series Piezo Motor Driven Components Type A USB connector s Axis 2 Axis 1 Right Left AG UC2 controller connectors ld USB CH USB power supply with changeable international power outlet adapters 4 4 Local Operation Jog buttons Left Right Channel Channel Th
17. ck to local mode NOTE When running several Agilis Util applications in parallel it is possible to select the same controller from different applications However this will generate an error as one controller can only be in remote mode to one application at any given time NOTE The Agilis Util software will not detect controllers that are connected to the computer after communication is first opened To operate a new controller connected to your computer close all Agilis Util applications and start them again NOTE In order to manage all connected controllers and open applications the Agilis Util software uses a temporary file AgilisDevices TMP that is located in the same folder as the Agilis Util software In the unlikely event of a computer crash while an Agilis Util software is open this temporary file might not be removed from your computer If this is the case please delete this file manually and start your application again When selecting Relative move from the main menu the following window appears Relative move Channel 1 Channel HZ Number of steps 0 Relative move screen When selecting Terminal from the main menu the following window will appear In the Terminal screen all ASCII commands can be used see chapter 4 6 for details Terminal Tevminal screen When selecting Status from the main menu the following window will appear For status Information please refer to
18. cluded 5 Not allowed in local mode controller must be in remote 6 _ Not allowed state both axes must be in state 0 NOTE For a particular actuator selection 1 to 8 the range nn 1 to 4 specifies a channel number in CC commands The axis number xx 1 or 2 is specified in other commands For example to control actuator number 8 Axis 2 on channel 4 one has to select the channel number 4 with the command CC4 and then use the index of the second actuator of the channel for example 2PR500 to execute a relative move of 500 steps e Channel 1 Actuators 1 and 2 xx 1 2 e Channel 2 Actuators 3 and 4 xx 1 2 e Channel 3 Actuators 5 and 6 xx 1 2 e Channel 4 Actuators 7 and 8 xx 1 2 EDH0224En5030 11 15 34 Experienes Solutions Agilis Series Piezo Motor Driven Components Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems gt Newport ere 35 EDH0224En5030 11 15 Newport Visit Newport Online at WWWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel
19. d Check that parameter is not specified Check the current state of the two axes need to be 0 Sets the controller to remote mode In remote mode all commands are enabled and the pushbuttons on the controller are disabled To go to local mode use the ML command None 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified 6 The two axis must be in state 0 17 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components MV Move to limit Syntax xxMVnn or xxM V Parameters Description xx Axis number nn Jog mode or Range xx 1012 nn 4 3 2 1 0 1 2 3 4 Input tests Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be 0 or 3 Check jog mode integer ranging between 4 and 4 or Description Starts a jog motion at a defined speed to the limit and stops automatically when the limit is activated See JA command for details NOTE The MA command functions properly only with devices that feature a limit switch like models AG LS25 AG M050L and AG M100L NOTE No motion will be executed when the limit switch is active NOTE The MV 4 and MV4 commands are useful to calibrate the average step size at a certain step amplitude by counting the number of steps between the limits in forward and reverse direction They are used as part of the MA and PA com
20. ere are 6 Jog buttons for each channel Holding down any of the 6 buttons for less than one second results in a single step motion at the defined step amplitude Otherwise holding a button for more than a second results in continuous motion at the designated button speed Connector identification Change forward On each row of buttons the upper three buttons ND Wl step size are assigned to the forward motion When the Limit switch __ lowest of the three button positions is pressed SRE m 3 a and held for more than one second the motor at 170 steps s moves at 5 steps s The medium button moves Change _ vy lt lt and max the piezo at 100 steps s The fastest forward reverse step size step amplitude H p E Medium speed motion at 1700 steps s is performed with the top button position x E at 100 steps s 2 Li fed ah B an To ve The remaining three lower buttons on each row and conn ka E E poe L are assigned to the reverse motion direction The E step amplitude m Pa RUES third highest button position enables 5 steps s Madiun speed and defined speed when pressed and held The lowest button z at Tp 1 H step amplitude position provides the fastest motion at 1700 step amplitude Ili steps s The middle button provides 100 steps s High speed sg far motion at 1700 steps s d and max We step amplitude Mounting holes for 1 4 M6 screws QO Newport Exper
21. ervation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider GO Newport Experience Solutions vii EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components EDH0224En5030 11 15 General Warnings Observe these general warnings when operating or servicing this equipment Read all warnings on the unit and in the operating instructions Do not use this equipment in or near water Route cables so they are not likely to be damaged Do not use liquid or aerosol cleaners use only a damp lint free cloth To avoid explosion do not operate this equipment in an explosive atmosphere General Cautions Observe these cautions when operating or servicing this equipment Use only specified replacement parts Follow precautions for static sensitive devices when handling this equipment This product should only be powered as described in this manual There are no user serviceable parts inside the Agilis system components If this equipment is used in a manner not specified within this manual the protection provided by the equipment may be impaired Manual Conventions The following conventions are used in this manual Acronyms appear on the first occurrence enclosed in parentheses following t
22. ge Input tests Description Returns GO Newport Experience Solutions DL Set step delay or get step delay setting xxDLnn or xxDL xx Axis number nn Step delay or xx lor2 nn Integer between 0 and 200000 included Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be 0 Check the format of the step delay has to be an integer between 0 and 200000 included Sets the step delay of stepping mode The delay applies for both positive and negative directions The delay is programmed as multiple of 10us For example a delay of 40 is equivalent to 40 x 10 us 400 us The maximum value of the parameter is equal to a delay of 2 seconds between pulses By default after reset the value is 0 JA Start jog motion or get jog mode xxJAnn or xxJA xx Axis number nn Jog mode or xx Ilto2 nn _ 4 3 2 1 0 1 2 3 4 Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis Check jog mode integer ranging between 4 and 4 Starts a jog motion at a defined speed or returns jog mode Defined steps are steps with step amplitude defined by the SU command default 16 Max amplitude steps are equivalent to step amplitude 50 4 Negative direction 666 steps s at defined step amplitude 3 Negative direction 1700 ste
23. he axis 1 or 2 Check the status of the axis must be 0 Check that parameter is not specified Resets the step counter to zero See TP command for further details None 0 Noerror 2 Axis out of range must be 1 or 2 3 Parameter must not be specified 5 Not allowed in local mode controller must be in remote mode 6 Not allowed state axis must not be in state 3 25 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 5 0 AG UC8 amp AG UC8PC Multi Axis Piezo Controllers CAUTION AG UC8PC boards are very likely to be damaged by electrostatic discharge ESD Please use ESD protective measures when unpacking and handling these devices 5 1 Description Both Agilis AG UC8 and AG UC8PC controllers provide the capability to drive up to 8 piezoelectric motors They can be powered through the USB port directly from the computer while the AG UC8PC version can also be powered from an external power supply A software utility allows driving the two selected motors at a time and switching from pair to pair A set of ASCII commands and LabViewVI s for all functions are provided 5 2 Modes of Operation Both controllers can be fully operated from a PC either from the supplied Agilis Software Utility see section 5 5 for details or by sending ASCII commands see section 5 6 for detalls 5 3 Motor Selection Channel 4 lt 0 eee ee Channel 1 Mini USB Ax
24. he hardware of the controller The controller names are memorized in a file on the PC So when connecting the same controller to the same PC the same controller name is displayed Select a controller from the list and click Connect When connected the controller is ready to work on the default selected channel Channel 1 in the example below Experience Soit 31 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Agilis Util screen with a connected controller You can now fully operate the controller from the software You can select another pair of motors by scrolling down and selecting from channel 1 to channel 4 as shown below AGILIS 1 UCS When selecting Relative move from the main menu the following window opens lt gt Relative motion AGILIS 1 UC8 Channel 1 Channel 2 Number of steps D Os Relative move screen Experience Soit EDH0224En5030 11 15 32 Agilis Series Piezo Motor Driven Components When selecting Terminal from the main menu the following window will open In the Terminal screen all ASCII commands can be used see chapter 4 6 for details lt gt Terminal AGILIS 1 UC8 Terminal screen When selecting Status from the main menu the following window will open For status information please refer to the TS command details Agilis status AGILIS 1 UC8 Channel 1 Channel
25. heir definition An acronym is a word formed from the initial letters of a string of words Example Read Only Memory ROM Italics or boldface text are used as an alternative to quotation marks to highlight special text such as keyboard keys onscreen buttons or text entries Examples Press Enter AU command QY Newport eco Exper nie Suk lors VIII Agilis Series Piezo Motor Driven Components Warnings and Cautions PLEASE READ THE FOLLOWING RECOMMENDATIONS CAREFULLY BEFORE USING YOUR AG UC2 CONTROLLER FOR THE FIRST TIME CAUTION Do not place any Agilis component in a hostile environment such as X Rays hard UV or in a vacuum environment Do not place a vacuum compatible Agilis component V6 in a hostile environment or in a vacuum environment less than 10 hPa CAUTION Do not leave this actuator in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging WARNING Do not introduce anything in the holes of AG UC2 or AG UC8 controllers or spill any liquid on the product WARNING Do not switch on AG UC2 or AG UCS controllers before connecting all the cables WARNING Do not connect anything to AG UC2 or AG UC8 controllers except the cables provided by Newport for this specific product CAUTION Our vacuum compatible Agilis components V6 are delivered
26. ience Sokrtiors 7 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Connector identification Limit switch detected reverse step size Low speed at 5 steps s and defined step amplitude Medium speed at 100 steps s and max step amplitude High speed Reverse jog and max step amplitude at 1700 steps s ee EDH0224En5030 11 15 4 5 Step amplitude size adjustment buttons NOTE t ae When using the st litude butt t Monnet Dansi g the step amplitude buttons you mus be able to sense the motion Hence you either must be in the high sensitivity range of your application or you need to use an external feedback sensor like a quad cellor an autocollimator to sense the motion of the mirror mount Change forward step size There are 2 step size adjustment buttons for each channel High speed Forward upper button and reverse lower z ss ia as S button buttons control the step amplitude step amplitude adjustment The default step size at power on is a Me an x medium step size at ie ate ps s E Pressing and holding a button initiates the step amplitude amplitude selection beginning with a very low Low speed step amplitude With every next step a slightly at 5 steps s large step amplitude is used When the button 1s an of d released the last step amplitude is saved until power up or the next adjus
27. in 1 1000th of the total travel Range xx lor2 Input tests Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be ready Check target position must be integer between 0 and 1000 included Description Starts a process to move to an absolute position see below During the execution of the command the USB communication is interrupted After completion the communication 1s opened again The execution of the command can last up to 2 minutes NOTE The PA command functions properly only with devices that feature a limit switch like models AG LS25 AG M050L and AG M100L Returns xxPAnn at the end of motion If the sign takes place of nn this command returns the current target position Errors 0 Noerror 2 Axis out of range must be 1 or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be between 0 and 1000 included 5 Not allowed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 Move to limit L Count steps between limits Move back to limit Move nn 1000 steps between limits GO Newport Experience Solutions 19 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components PH Tell limit status Syntax PH Parameters None Input tests Check controller is in remote mode Check that a
28. is 2 Axis 1 Axis 2 Axis 1 Communication Type Selection Headers Extra Communication and Power Supply Connector AG UCSPC Controller Board EDH0224En5030 11 15 26 Experience Solutions Agilis Series Piezo Motor Driven Components lt gt Mtew part B Axis AGILIS Controller AG LICE CHANNEL 1 CHANNEL 2 CHANNEL 3 CHANNEL 4 Axis 1 Axis 2 finie 1 Axis gt Axis 1 Axis 2 finie 1 Axis 2 AG UCS Controller Both Multi Axes Agilis Controller versions are able to control up to 8 piezoelectric motors Multi Axes Agilis controllers drive piezoelectric motors by pairs The CC command allows selecting the desired motor For example to control motor number 8 Axis 2 on channel 4 one has to select pair number 4 with the command CC4 and then use the index of the second motor of the pair for example 2PR500 to execute a relative move of 500 steps 5 4 Communication Type Selection Available on AG UC8PC Only The AG UC8PC controller is able to communicate through 3 different protocols USB RS232 or RS485 The board has a dedicated USB connector and a HE10 connector where the two RS protocols are available see below table for connector pins assignment Standard Mini USB Connector COM Selection Header Us Connector COM External Power Supply i Popop AA ANANA ND Newport Experience Syiti 27 EDH0224En5030
29. laa s v a 14 DL Set step delay or get step delay setting 15 JA Start jog motion or get JOY mode 15 MA Measure current postlllon 16 Mr Set10 1OCAl INOUE u intense 17 iii EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components EDH0224En5030 11 15 MR Set to remote mode 17 MV Move to Limit 18 PA Absolute move 19 PR Tel ot a qt uuu uuu u eee cn 20 PTR Rela iVe MOVE sn oc a 20 RS RES 8 01818 00 Gee 21 S SO ROOMS cn E ee eee aW 21 SU Set step amplitude or get step amplitude setting 22 TE Get error of previous command veeeewwwa 23 TP Tell number OF sr Su uu 222 us 23 DGS SUG u u E N Sana 24 VE Get controller firmware version 24 12 Z Ipo 10 0 da Ree ee us 25 5 0 AG UC8 amp AG UC8PC Multi Axis Piezo Controllers 26 s DEC PIO us ee eee r ee eee eee 26 5 2 Modes of Operation sise 26 3o MOO e ON a ad a sss 26 5 4 Communication Type Selection Available on AG UC8PC Only 27 54 1 USD Communication 2 ae a oo 29 542 R922 COmMUNCA a rR R en 29 DA KASI COM WA de cd 29 sK ED
30. llowing harmonised standards NF EN 61326 1 2013 lt Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements gt NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards O NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 ONF EN 61000 4 6 ONF EN 61000 4 11 ORIGINAL DECLARATION Done in Beaune La Rolande on 06 November 2015 _ Dominique DEVIDAL Quality Director EDH0224En5030 11 15 vi Agilis Series Piezo Motor Driven Components safety Precautions Definitions and Symbols The following terms and symbols are used in this documentation C CE Mark The CE mark indicates that the equipment has been designed and tested to comply with all applicable European Union CE regulations European Union CE Mark C US CSA Mark D C US CSA Mark The presence of the C US CSA mark indicates that the equipment has been designed tested and certified as complying with all applicable US and Canadian safety standards Direct Current DC Direct Current Symbol This symbol indicates that the equipment is suitable for DC power only The Agilis system Is DC power only Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and pres
31. m To install the Agilis Util software load the distribution CD The program gives you the option of where to load the files or you can use the default directory C Program Files Newport AGILISTools AGILIS UC2 User Tool After installation is complete reboot your PC and open AgilisUserTool by double clicking on the newly created icon The following image of the AG UC2 controller will appear Agilis Util screen after start no controller selected A right mouse click anywhere in the window opens the main menu except on keys or on the red cross m ch I L m m m m li m e c right mouse click in the window opens the main menu ND Newport Experience Syiti 9 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Click Select controller The following window will open Controllers Select a controller Senal number Controller name FT 35F22ZV AGILIS UC21 Hone None No selected controller Select a controller screen In the figure above one controller has been detected You can change the controller name by simple typing into the Controller Name field but you can not change the serial number The serial number is a unique identifier of the controller hardware The controller names are saved in a file on the PC So when connecting the same controller to the same PC the same controller name is displayed Select a controlle
32. mands In order to measure the number of steps between the limits you can use the following sequence of commands IMV 3 Move to the negative limit 1PH If reply is 1PH1 or 1PH3 then 1SUnn nn value of step amplitude you want to use 1ZP Reset step counter to zero 1PR100 Move 100 steps Needed to move out of the limit MV4 Move to positive limit and stop 1PH If reply is PHI or PH3 then ITP Tell number of steps The average step size in forward direction at the defined step amplitude is equal to the total available travel range see data sheet divided by the return of the TP command NOTE Individual steps may not be 100 repeatable NOTE When using a too low value for the step amplitude the sequence may take a very long time and may not be very repeatable Returns No return if jog mode is defined If the sign takes place of nn this command returns the current jog mode QS Newport Eei Solutions EDH0224En5030 11 15 18 Agilis Series Piezo Motor Driven Components Errors 0 No error 2 Axis out of range must be 1 or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be 4 3 2 1 0 1 2 3 or 4 5 Not allowed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 or 3 PA Absolute move Syntax xxPAnn or xxPA Parameters Description xx Axis number nn Target position
33. o local mode use the command ML 13 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 4 7 3 State Diagram The AG UC2 uses different states for each axis Not all commands are accepted in all states see sectlons Command Set Summary for detalls Initial The numbers represent the values of the status that can be queried with the TS command Shown are only transitions made by command Internal transitions like from STEPPING to READY at the end of a PR command are not shown State diagram 4 7 4 Command Set Summary Short State Type Modes Name Description 0 1 2 3 Set Query Local Remote DL Step delay D D D D JA Jog D L L L L MA Measure position L D D ML Local mode D D D D D D D MR Remote mode D D D D MV Move to limit D D D D D PA Absolute move D D D PH Tell limit status D D D D D PR Relative move D D D RS Reset D D D D D D L ST Stop motion L L L L L L SU Set step amplitude L L L L TE Get error D D L D D D D TP Tell number of steps D D D D D TS Get status D D D D D D D VE Firmware version D D D D D D L ZP Zero position L D L NOTE Commands MA MV and PA require that the device has an electrical limit switch e g model AG LS25 AG M050L and AG M100L Experience Sakina EDH0224En5030 11 15 14 Agilis Series Piezo Motor Driven Components Syntax Parameters Description Range Input tests Description Syntax Parameters Description Ran
34. oration Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings V EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components EU Declaration of Conformity N N N gt 8 ESS X a Sa YSIS III ISS Agilis Series x EC Declaration of Conformity gt following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 1 rue Jules Guesde ZI Bois de l Epine BP189 F 91006 Evry FRANCE Hereby declares that the machinery Description Agilis Function Piezo Motor Driven Optical mount Rotation Stage and Linear Stage and controllers Models AG UC2 AG UC8 AG UC8PC AG MxxL V6 AG LS25 V6 AG LS25 27 AG MxxN V6 AG PR100 V6 AG MD4 1 2 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the fo
35. plitude is specified If takes place of nn this command returns the step amplitude setting in forward direction If takes place of nn this command returns the step amplitude setting in backward direction Errors 0 Noerror 2 Axis out of range must be or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be an integer between 50 and 50 not zero 5 _ Not allowed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 QY Newport EDH0224En5030 11 15 22 ever Sauter Agilis Series Piezo Motor Driven Components Syntax Parameters Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description Returns GO Newport Experience Solutions TE Get error of previous command TE None Check that axis is not specified Check that parameter is not specified Returns the error code of the previous command Each command generates an error code including 0 for NO ERROR This error code can be queried with the TE command For a safe program flow it is recommended to always query the command error after each command execution The following error codes are defined Error code of the previous command The following error codes are defined Error code Description 0 No error 1 Unknown command 2 Axis out of range m
36. ps s at max step amplitude 2 Negative direction 100 step s at max step amplitude 1 Negative direction 5 steps s at defined step amplitude 0 No move go to READY state 1 Positive direction 5 steps s at defined step amplitude 2 Positive direction 100 steps s at max step amplitude 3 Positive direction 1700 steps s at max step amplitude 4 Positive direction 666 steps s at defined step amplitude No return if jog mode is specified If the sign takes place of nn this command returns the current jog mode 15 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Errors Syntax Parameters Description Range Input tests Description Returns Errors EDH0224En5030 11 15 0 _ Noerror 2 Axis out of range must be 1 or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be 4 3 2 1 0 1 2 3 or 4 5 Not allowed in local mode controller must be in remote mode 6 _ Not allowed state controller must be in state 0 or 2 MA Measure current position xxMA xx Axis number xx lor2 Check controller is in remote mode Check the current state of the axis Check the axis 1 or 2 Starts a process to measure the current position see below During the execution of the command the USB communication is interrupted After completion the communication 1s opened again
37. r from the list and click Connect When connected the controller is in remote mode and the push buttons on the physical controller are disabled The software window now looks like the following Channel Channel 1 2 Set step amplitude of channel 1 in forward direction Value must be Controller between 1 and 50 The default value UT name is 25 See command SU Set step amplitude or get step amplitude setting for more details High speed jog with 1700 steps s at max step amplitude Medium speed jog with 100 steps s 2 at max step amplitude LL Low speed jog with 5 steps s at v defined step amplitude default 25 D D CC Green LED indicates controller is in remote mode and OK Are indicates an error Move cursor over the LED to get error information Agilis Util screen with a connected controller You can now fully operate the controller from the software The function of the jog buttons 1s exactly the same as though you were pressing the push buttons on the physical controller See also chapter 4 4 for details EDH0224En5030 11 15 10 Experience Solutions Agilis Series Piezo Motor Driven Components A right mouse click in the window opens the main menu again With Select controller you can select a new controller from the list When selecting a different controller the new controller is set to remote mode and the previous controller is set ba
38. re accepted Depending on the command it can have an optional or required prefix nn for the axis number 1 or 2 and or a suffix xx value or a Blank spaces Blanks are allowed and ignored in any position including inside a numerical value The following two commands are equivalent but the first example might be confusing 2 PR1 000 2PR1000 Command terminator Commands are executed as the command terminator CRLF carriage return line feed ASCII 13 and ASCII 10 is received The controller will analyze the received string If the command is valid and its parameters are in the specified range it will be executed Otherwise it will memorize an error After the execution of the command all remaining characters in the input string if any will be ignored In particular it is not possible to concatenate several commands on a single string from the PC Each command will properly handle the memorization of related errors that can be accessed with the TE command Operating Modes The Agilis AG UC2 provides two modes of operation In local mode default mode after powering up the controller the push buttons are enabled and all commands that configure or operate the controller are disabled Only commands that are used to monitor or diagnose the controller are enabled In remote mode all push buttons are disabled and all ASCII commands are enabled To go from local mode to remote mode use the command MR To go from remote mode t
39. s Weigh Graduation Cable 1 0 in 25 4 mm 0 40 in 10 mm 360 continuous 5 urad 1 arcsec 2 s 100 urad None 135 g 2 1 2 m length 4 wire mini Din connector Can extend cable length using AG MD4 1 5 extension cable D The step size for forward and backward direction is adjustable With default settings the step size for the forward direction varies from the step size for the backward direction and may be larger than 5 urad Individual steps are not 100 repeatable 3 2 Dimensions 3 HOLES M4 THD USABLE DEPTH 17 4 5 ND Newport 3 H LES 8 32 THD USABLE DEPTH 17 4 5 Aperture 1 1 16 20 UN 2B THD 4 PIN CABLE 5 07 1 8 LENGTH 45 1140 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components 4 0 AG UC2 Piezo Controller AG UC2 Agilis controller 4 1 Description The Agilis AG UC2 controller provides convenient push button remote control and USB computer control of Agilis components For each axis two rows of push buttons are available for step size settings precise low speed adjustments and fast coarse motion Power is supplied through the USB port either directly from the computer or from an independent USB power supply such as the USB CH A software utility allows mimicking remotely the operation of the controller buttons through the computer and selecting and operating a specific Agilis mount as needed A set of ASCII commands and La
40. tment is made F During the first couple of steps you may not amp be sense any motion as the step amplitude might be i m too low to result in consistent motion Hence i E i release the button only when sensing a real Mounting hilek motion Test the new step amplitude at different for 1 4 M6 screws positions When results are inconsistent repeat the step amplitude adjustment and select a larger step amplitude To restore the default step amplitude power down the controller and then power it up NOTE As in any open loop system the step size is not always consistent Agilis technology can provide the required sensitivity but not necessarily repeatable steps in an open loop condition However a feedback sensor is recommended to fully utilize the functionality and sensitivity of the Agilis mirror mount system A red LED indicates a detected limit switch USB Communication Using a Type A A USB Cable Install the software supplied with the CD on your PC Apply the following settings to the COM port of your PC e Baud Rate 921600 e Data Bits 8 e Parity None e Stop Bits 1 e Flow Control None e Termination Character CR LF Experience Soit Agilis Series Piezo Motor Driven Components 4 6 Agilis Util Software The Agilis Util software provides access to all functions of the Agilis controller It is compatible with PC s with a minimum of 64 MB of RAM and Windows 98 2000 NT or XP operating syste
41. ust be 1 or 2 or must not be specified 3 Wrong format for parameter nn or must not be specified 4 Parameter nn out of range 5 Not allowed In local mode 6 Not allowed In current state 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified TP Tell number of steps xx TP XX Axis number X lor2 Check controller is in remote mode Check the axis 1 or 2 Check the status of the axis must not be 3 _ Check that parameter is not specified Returns the number of accumulated steps in forward direction minus the number of steps in backward direction since powering the controller or since the last ZP zero position command whatever was last NOTE The step size of the Agilis devices are not 100 repeatable and vary between forward and backward direction Furthermore the step size can be modified using the SU command Consequently the TP command provides only limited information about the actual position of the device In particular an Agilis device can be at very different positions even though a TP command may return the same result TPnn where nn is the number of accumulated steps in forward direction minus the number of steps in backward direction as Integer 23 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components Errors Syntax Parameters Description Range Input tests Description Returns Errors Syntax Parameters
42. wed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 EDH0224En5030 11 15 20 poetence Sim Agilis Series Piezo Motor Driven Components Syntax Parameters Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description Returns Errors GO Newport Experience Solutions RS None Check that axis is not specified Check that parameter is not specified RS Reset controller Resets the controller All temporary settings are reset to default and the controller is in local mode None NO error F a a xxST xx Axis number xx lor2 Check controller is in remote mode Check the axis 1 or 2 Check that parameter is not specified Axis must not be specified Parameter must not be specified ST Stop motion Stops the motion on the defined axis Sets the state to ready None 0 Co F a 5 No error Axis out of range must be 1 or 2 Parameter must not be specified Not allowed in local mode controller must be in remote mode 21 EDH0224En5030 11 15 Agilis Series Piezo Motor Driven Components SU Set step amplitude or get step amplitude setting Syntax xxSUnn or xxSU or xxSU Parameters Description xx Axis number nn Signed step amplitude or or Range x
43. x 1012 nn Integer between 50 and 50 included except zero Input tests Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be 0 Check the format of the step amplitude has to be an integer between 50 and 50 included except zero Description Sets the step amplitude step size in positive or negative direction If the parameter is positive it will set the step amplitude in the forward direction If the parameter is negative it will set the step amplitude in the backward direction NOTE The step amplitude is a relative measure The step amplitude corresponds to the amplitude of the electrical signal sent to the Agilis motor There is no linear correlation between the step amplitude and the effective motion size In particular too low a setting for the step amplitude may result in no output motion Also the same step amplitude setting for forward and backward direction may result in different size motion steps Also the motion step size corresponding to a step amplitude setting may vary by position load and throughout the life time of the product The step amplitude setting is not stored after power down The default value after power up is 16 This step size is used with the commands PR JA1 JA4 MV1 and MV4 but not with JA2 JA3 MV2 and MV3 JA2 JA3 MV2 MV3 use the maximum step amplitude equivalent to xxSU50 setting Returns No return if step am
44. xis is not specified Check that parameter is not specified Description Returns the limits switch status of the controller Returns Possible returns are Description PHO No limit switch is active PH1 Limit switch of channel 1 is active limit switch of channel 2 is not active PH2 Limit switch of channel 2 is active limit switch of channel 1 is not active PH3 Limit switch of channel 1 and channel 2 are active NOTE If the device has no limit switch the return is always PHO Errors 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified 5 _ Not allowed in local mode controller must be in remote mode PR Relative move Syntax xxPRnn or xxPR Parameters Description xx Axis number nn Number of steps Range xx 1012 nn Signed integer between 2 147 483 648 and 2 147 483 647 equivalent to long integer in C 2 21 23 11 Input tests Check controller is in remote mode _ Check the axis 1 or 2 Check the current state of the axis Check the number of steps has to be integer can be negative Description Starts a relative move of nn steps with step amplitude defined by the SU command default 16 Returns Ifthe sign takes place of nn this command returns the current target position Errors 0 Noerror 2 Axis out of range must be 1 or 2 3 Wrong format for nn must be integer 5 Not allo
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