Variable Leak Valve - Ideal Vacuum Products, LLC
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1. eu vacuum products m www idealvac com Variable Leak Valve Model 951 5106 User Manual 87 400 085 01 D 05 2011 ES Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 400 085 01 D Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in th2. could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Variable Leak Valve User Manual 87 400 085 01 D Variable Leak Valve Variable Leak Valve Variable Leak Valve User Manual 87 400 085 01 D 3 36 Variable Leak Valve 4 36 Variable Leak Valve User Manual 87 400 085 01 D Contents Contents 1 Instructions for Use 7 safety Information 9 General 10 Variable Leak Valve Outline 13 Flange Connection 14 Inlet Gas Connection 14 Use 15 To Establish a New Stop Position16 To Set Stop Position at any Leak Rate 17 Operating at Low Leak Rates 17 Changes in Leak Rate with Variation in Room Temperature 18 Bakeout Procedure 18 To Use as a Roughing Valve 19 Adjustment of Handle Position 20 If Valve Will not Close Leak Tight21 Lubrication Instructions 24 Loss of Sensitivity at High Leak Rates 26 Replacement Parts 28 Accessories 30 Variable Leak Valve User Manual 87 400 085 01 D 5 36 Contents 6 36 Variable Leak Valve User Manual 87 400 085 01 D Q 090 1 u Variable Leak Valve User Ma
3. 30 36 Variable Leak Valve User Manual 87 400 085 01 D Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely EG d gn Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmiss
4. as described in the following para Lubrication Instructions To Use as a Roughing Valve The variable leak valve can be used as a roughing valve when pumping small vacuum systems some litres volume The valve must be opened to its maximum conductance for this operation Connect a roughing pump to the inlet gas fitting Where available install a molecular sieve or liquid nitrogen trap in the line between the pump and valve to reduce contamination from mechanical pump oil vapours Variable Leak Valve User Manual 87 400 085 01 D 19 36 1 Instructions for Use Adjustment of Handle Position 20 36 As described previously continual reduction in gasket height necessitates resetting of the stop position and eventual readjustment of handle position When the angle between the handle and body at point of closure has changed from its original parallel approximate position to an angle of 5 the valve should be readjusted This adjustment will maintain a proper relationship between handle travel and the size of the leak 1 Set handle Turn the locked knobs counterclockwise until the valve handle is approximately parallel to the side of the valve body Close valve using roughing screw as follows Carefully remove the hole cover from the top of the valve Do not exceed 8 ft Ibs or torque or the sapphire may be fractured With a 5 16 Allen wrench tighten the roughing screw to 6 ft lbs of torque Replace the
5. b Disassemble clean and inspect the sealing components Particles oxide on the gasket or other contaminants may prevent the valve from closing leak tight Disconnect the valve from other components and disassemble Inspect and clean the valve sapphire and gasket as described in the following steps Disassemble Refer to the figure Variable leak valve assembly drawing a Turn both knobs counterclockwise four turns b Carefully remove the pressed in hole cover 11 and with a 5 16 Allen wrench loosen the roughing screw two turns c Usea clean 1 4 Allen wrench to remove the gasket assembly 1 The thread is normal right hand and 20 25 ft lbs of torque will be required to loosen it d Clean the sapphire removal tool with acetone insert it into the hole that held the gasket assembly and engage the fingers of the tool with the slots on the periphery of the sapphire assembly Variable Leak Valve User Manual 87 400 085 01 D 21 36 1 Instructions for Use Turn the valve and tool upside down and turn the tool counterclockwise to remove the sapphire assembly Four full turns will disengage the threads Maintain the upside down position of valve and tool and lower the tool and sapphire assembly from the valve Inspect and Clean Sapphire Check the sapphire to be sure that it has no cracks or chips Any fractures will require replacement of the sapphire assembly Check the cleanliness of the polished face by viewing light
6. hole cover The valve should now be leak tight but this can be determined reliably only with a leak detector If the valve leaks across the seal refer to the following paragraph Adjust knobs as follows Turn the knobs together counterclockwise until a leak is generated Turn the knobs clockwise until the valve is closed leak tight Turn the knobs two additional turns clockwise to provide the proper amount of overdrive Loosen the knobs without allowing the fine drive screw to turn then turn the inner knob clockwise until the collar is against the handle Lock the outer knob against the inner one Two counterclockwise turns of both knobs together should open a leak Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 If Valve Will not Close Leak Tight If the valve is not leak tight across the sapphire gasket seal after the knobs have been turned to the stop position one of several problems may be the cause 1 2 4 The gasket has been compressed and the stops must be reset The valve sapphire and or gasket are contaminated and need cleaning The gasket is scratched nicked or compressed beyond further use and must be replaced The sapphire is fractured and must be replaced The following procedures should be followed in the order listed a Follow the steps outlined in para To establish a new stop position If the valve is still not leak tight proceed to step b below
7. reflected from its surface Flush the face with acetone CP grade recommended and wipe off any film or grease Be sure that no particles remain on the sapphire when ready for re assembly Inspect and Clean Valve Body 22 36 Check the valve body for any loose particles of other contaminants Remove any contaminants by flushing acetone through the inlet gas fitting while holding the valve upright Blow out the valve with a clean dry gas through the inlet gas fitting Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 CAUTION Do not use compressed air to blow out the valve The possible high content of particles water vapour and oil will contaminate the valve Re cleaning and possible gasket replacement may then be required Inspect and Clean Gasket Assembly Inspect the copper alloy gasket to be sure that it is clean smooth free of oxide and protrudes above the surface of the gasket collar by at least 0 002 inch A hand lens or microscope will facilitate inspection of the surface If the top surface of the gasket is scored scratched or nicked the gasket assembly must be replaced If the copper portion of the assembly does not protrude at least 0 002 inch above the collar the gasket assembly must be replaced Oily films or other residue should be removed using acetone Oxide or other slight surface imperfections can generally be removed by polishing with a very fine rouge paper When
8. the operator and severe overdriving may fracture the sapphire BODY ASSEMBLY FINE DRIVE SCREW DRIVE SPRING WASHER COLLAR Figure 4 Knob adjustment Variable Leak Valve User Manual 87 400 085 01 D 15 36 1 Instructions for Use The valve is received in a closed leak tight position The adjusting knurled knobs are tightened against the handle During normal operation the knobs are locked together with respect to the fine drive screw To open a leak turn both knobs together a minimum of two full turns counterclockwise To close a leak turn the knobs together until the collar botts against the handle the stop position has been reached To Establish a New Stop Position 16 36 Each time a seal is made the valve s captured metal gasket is compressed High temperature bakeout accelerates the compression of the gasket If no change is made to the position of the knobs on the fine drive screw the point of closure will gradually come closer to the point at which the knobs and collar butt against the handle Eventually the stop will be engaged before a leak tight closure is made When this happens a new stop position must be established 1 The valve must be attached to a leak detector or the system must be equipped with gauging adequate to determine when no leak exists 2 With the knobs tightened against the handle unlock the knobs from each other by holding the inner knob and turning the outer knob counterclockwis
9. 3 5050 2 Sapphire assembly 1 930072 ___ Sprimgwasher 7 Nut 8 Rodassemb ___ _1_____ D Ge 11 Hole cover 1 eee rer rez rez EHER EEE rez s ss uu s sss nn ceereeReRRREERRRCREREEERRREREREES 28 36 Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Ref item Description O ty req d Part Number 12 Pivot rod 2 13 Pamead serew 832x 1 419 2 14 Handle 1 E 1 Knob wo Fine drive screw assembly 1 _ E T Fine drive spring washer Fa MEM E io Collar FE Sapphire removal tool 1 SR0061417400 _ p 5 16 Allenwrench 1 1 4 Allenwrench 1 aM e High temperature lubricant Fel Pro C 100 This item is part of Repair Kit 962 0014 Variable Leak Valve User Manual 87 400 085 01 D 29 36 1 Instructions for Use Accessories Tab 3 Description Part Number mu Denn Mating ConFlat flange 297 non rotatable F0275 0150 NCE _ _ Copper gasket for 2 CFF Pkg 10 FG 0275 Cl nn Ape T e m ating Mini ConFlat Range 11 3 rotatale mE En Mating Mini ConFlat flange 1 1 3 non rotatable 0133 0075 Copper gasket for 11 3 phg 10 8013880 _ Screw and nuts for 1 1 3 pkg 25 FB 0133 C E Flare fitting adapter kit 9515117 Consists of Q ty Adapter flare Mini ConFlat 1 Mini flange screws 8 32 6 Nut for mini flange 8 32 6 Gasket for mini flange 10 Fitting nut 28629886 00 1 Fitting sleeve 28629887 00 1
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13. LERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return s
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15. at there is no clearance between the washers and the nut Reassemble Replace the handle pivot rods roughing screw and cover Repeat the closure adjustment to reposition the handle and knobs Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Variable Leak Valve User Manual 87 400 085 01 D 21 306 1 Instructions for Use Replacement Parts 1 ot S 4 4 4 A 22 NN oe P 2 cx re m vf IT 2 giu e WZ SN 2 ce NN ANN S NS 2228 NN 2 S Figure 5 Variable leak valve assembly drawing Please refer to the preceding figure Tab 2 Ref item Description Q ty req d Part Number 1 Gasket assembly 1 95
16. e about four turns J Turnthe inner knob counterclockwise until it is locked tight against the outer knob 4 Turn the two locked knobs clockwise until the valve closes as indicated on the leak detector or system gauging 5 Turn the knobs clockwise two additional turns past the point of closure 6 Loosen the knobs from each other without allowing the screw to turn Turn the inner knob clockwise until the collar is against the handle then turn the outer knob clockwise until it locks against the inner knob The knobs are now in position to return to and stop at a point two turns past closure 7 After the stop has been adjusted several times the handle must be reset as described in para Maintenance Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 To Set Stop Position at any Leak Rate The stop position can be adjusted to provide any desired leak rate 1 Open the valve to the desired leak rate as determined by a leak detector vacuum gauge or other experimental means 2 Loosen the knobs from each other without allowing the fine drive screw to turn 3 Turn the inner knob clockwise until the collar stops against the handle Turn the outer knob clockwise until it locks against the inner knob 4 The valve can now be opened to larger leak rates and when returned to the stop position will provide a leak of this pre set rate The valve cannot be closed leak tight with the stop set in this man
17. ent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 400 085 01 D Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park
18. gure This forms a seal completely free from friction seizing and shear The sapphire s movement is controlled through a threaded shaft and lever mechanism having a mechanical advantage of 13 000 to 1 Spring washers keep this drive mechanism constantly loaded and eliminate the backlash usually associated with this type of device This provides immediate response to small movements in the finger controlled adjusting knobs While some permanent compression takes place in the gasket each time a seal is made the change is very slight Return of the knob to a previous position will result in approximately the same leak rate The Valve is Shipped in a Closed Leak Tight Condition To open a leak the knurled knobs must be turned together a minimum of two full turns counterclockwise The valve is closed by turning the knobs together clockwise to the stop position against the handle DIAPHRAGM CAPTURED nn METAL GASKET OPTICALLY FLAT SAPPHIRE __ BODY ASSEMBLY Figure 2 sealing detail Variable Leak Valve User Manual 87 400 085 01 D 11 36 1 Instructions for Use Variable Leak Valve Specifications Tab 1 Minimum leak rate 1x 10 Torr litres sec in normal operation 1 x 10 Torr litres sec with condensable vapours D eliminated from leak gas Rate of change of valve provides an increasing rate of change as leak the size of the leak increases giving precise control in proportion to the size of the lea
19. he connection is made through standard Mini Con Flat flanges A Mini ConFlat flange to flare fitting adapter kit Agilent part no 951 5117 is provided as an option 1 Place new gasket Agilent part no 953 5014 between the two ConFlat flanges Lubricate and install bolts and nuts Use Fel Pro C 100 high temperature lubricant on screw threads and under the nuts Tighten each nut 180 apart in sequence to 5 to 8 ft Ibs torque This will partially close the gap between the flange faces Repeat the sequential tightening two more cycles The copper gaskets are partially sheared in making the seal and the bolts should be tightened until the flange faces meet Leak check the connection Variable Leak Valve User Manual 87 400 085 01 D Use Instructions for Use 1 WARNING The main danger of explosion in vacuum equipment occurs during backfilling from pressurized gas cylinders Explosions cause flying debris which may cause serious personal injury or death and destroy equipment The following precautions must be exercised when admitting gas into a vacuum system 1 Check that the leak valve is in the closed position before admitting gas into the backfill line 2 Always use a pressurized relief valve in the backfill line Never operate the valve without knowing the relationship of the stop position to the point of leak tight closure The point at which the valve closes cannot be felt by
20. he pivot rod holes in the handle Do not lubricate the pivot rod holes in the body Reassemble the handle and pivot rods Replace the roughing screw valve cover and two small screws 10 Follow the procedure specified in para Adjustment of handle position to close the valve and adjust the drive mechanism for proper operation Variable Leak Valve User Manual 87 400 085 01 D 25 36 1 Instructions for Use Loss of Sensitivity at High Leak Rates Repeated bakeouts at 450 C will result in partial annealing and a loss of tension in the spring washers that provide the force to open the valve This will be evidenced by decreasing sensitivity of control at high leak rates This is not a common situation but may occur after months of use under high temperature conditions Replacement of the spring washers and adjustment are required 1 a b A gt 26 36 Disassemble drive mechanism Open the valve four counterclockwise turns of the knobs Withdraw the two Phillips head screws on the upper part of the valve body and remove the cover Remove the roughing screw Remove the two pivot rods by grasping each with a screw Lift out the handle Replace spring washers With a 3 4 hex socket wrench remove the nut above the spring washers Remove and replace the spring washers Replace the 3 4 hex nut Adjust tension With a 4 hex socket wrench tighten the nut above the spring washers just enough so th
21. hipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should he issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8
22. in the open position b A leak that has been set with the valve at room temperature will increase due to thermal expansion as the valve is heated during bakeout Monitoring of system pressure and readjustment of the leak is necessary if a constant leak is desired during temperature cycling 18 36 Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Bakeout in Closed Position a The valve must be overdriven three turns past closure normal setting is two turns to compensate for differential expansion of materials during bakeout b To prepare the valve for bakeout follow the procedure described in paragraph establisha new stop position with the following exceptions in steps 5 and 6 substitute three turns for the two turns specified Operation After Bakeout a Bakeout in the closed position to 250 C and above will increase the size of leak for a given setting of the knobs A full three turns may not be required to open a leak after bakeout Length of bakeout and elapsed time at temperature will both affect the amount of change b Ifthe stops are to be readjusted follow the procedure described in steps a and b above CAUTION After each bakeout cycle before openiag or closing the valve tighten the outer knob against the inner one and lubricate the threads of the fine drive screw with Fel Pro C 100 After every three bakeouts over 300 C disassemble and lubricate the drive mechanism
23. ion to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc E Agilent Technologies AE Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 4 5 7 me _ __ ae Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any nece
24. is document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to
25. k Vacuum range From atmospheric pressure to below 10 1 Torr Gasket life For unbaked systems approximately 300 closures For baked systems 20 to 30 closures e asket assemblies are replaceable Material 300 series stainless steel sapphire OFHC copper and copper alloy 12 36 Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Variable Leak Valve Outline The outline dimensions for the variable leak valve are shown in the following figure Dimensions _ MM inches Figure 3 Variable leak valve outline Variable Leak Valve User Manual 87 400 085 01 D 13 36 1 Instructions for Use Flange Connection The valve is shipped in a closed leak tight position lubricated and ready for installation The ConFlat flange on which the variable leak valve is mounted mates with any 2 4 inch O D ConFlat flange 1 Place new gasket Agilent part no 953 5014 between the two ConFlat flanges Lubricate and install bolts and nuts Use Fel Pro C 100 high temperature lubricant on screw threads and under the nuts Tighten each nut 180 apart in sequence to 5 to 8 ft lbs torque This will partially close the gap between the flange faces Repeat the sequential tightening two more cycles The copper gaskets are partially sheared in making the seal and the bolts should be tightened until the flange faces meet Leak check the connection Inlet Gas Connection 14 36 T
26. lve on dusty surfaces Leak Check and Adjust Closure Reset the handle position roughing screw and knobs and leak check the valve as described in para Adjustment of handle position Lubrication Instructions 24 36 Fel Pro C 100 is recommended for lubrication After each bakeout cycle lubricate the threads of the fine drive screw After every three bakeouts at temperatures over 300 C disassemble the drive mechanism and lubricate it Use the SST brush to remove flaky or caked on lubricant before re lubrication Refer to the figure Variable leak valve assembly drawing Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 1 Open the valve by turning both knobs four counterclockwise turns 2 Withdraw the two Phillips head screws on the upper part of the valve body and remove the cover J Remove the roughing screw 10 Lubricate its threads and the spherical socket 4 Insertthe two Phillips head screws that held the cover into the two pivot rods and using the screws as handles pull out the rods 5 Lift out the handle Its sides have been sprayed with a semipermanent coat of molybdenum disulphide The lubricant in most cases will not require replenishing If the user judges that re lubrication is necessary a small amount of Fel Pro C 100 should be applied to each side of the handle where it guides in the body Remove the rod assembly and lubricate both ends Replace it Lubricate t
27. ner To close the valve follow the procedure outlined in the preceding paragraph Operating at Low Leak Rates When the valve operates with leak rates of 1 x 10 Torr litres sec and smaller condensable vapours and contaminants reduce the leak opening The valve must be baked to 250 in the open position and under vacuum for 30 minutes to drive off these internally adsorbed vapours See the paragraph Bakeout procedure For operation at leak rates of 3 x 10 Torr litres sec and lower in addition to the bakeout described above the inlet gas must be free of condensable vapours Use a dry gas or pass the inlet gas through a drying agent such as a liquid nitrogen cold trap A molecular sieve trap can be used for drying the gas but a filter must be employed to assure that no particles of sieve enter the valve Variable Leak Valve User Manual 87 400 085 01 D 17 36 1 Instructions for Use Changes in Leak Rate with Variation in Room Temperature Changes in room temperature will cause changes in leak rate as the temperature rises the leak rate increases A leak setting should be made in the range of interest and then mild heat applied to raise the temperature of the valve to the maximum expected value If the resulting change in leak rate is not acceptable to the intended experiment some means of temperature control should be used Bakeout Procedure Bakeout in Open Position a No special steps are required to bake the leak valve
28. nual Instructions for Use Safety Information 9 General 10 Variable Leak Valve Description 11 The Valve is Shipped in a Closed Leak Tight Condition 11 Variable Leak Valve Specifications 12 Variable Leak Valve Outline 13 Flange Connection 14 Inlet Gas Connection 14 Use 15 To Establish a New Stop Position 16 To Set Stop Position at any Leak Rate 1 Operating at Low Leak Rates 17 Changes in Leak Rate with Variation in Room Temperature 18 Bakeout Procedure 18 Bakeout in Open Position 18 Bakeout in Closed Position 19 Operation After Bakeout 19 To Use as a Roughing Valve 19 Adjustment of Handle Position20 Original Instructions AE Agilent Technologies 7 36 1 Instructions for Use If Valve Will not Close Leak Tight 21 Disassemble 21 Inspect and Clean Sapphire 22 Inspect and Clean Valve Body 22 Inspect and Clean Gasket Assembly 23 Re Install Sapphire Assembly 23 Re Install Gasket Assembly 24 Leak Check and Adjust Closure 24 Lubrication Instructions 24 Loss of Sensitivity at High Leak Rates 26 Disposal 27 Replacement Parts 28 Accessories 30 8 36 Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Safety Information Variable Leak Valve User Manual 87 400 085 01 D This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held resp
29. onsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards This manual uses the following standard protocol The caution messages are displayed before procedures which if not followed could cause damage to the equipment The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury The notes contain important information taken from the text 9 36 1 Instructions for Use General The variable leak valve can be added to any vacuum system to establish an adjustable leak It offers unprecedented control sensitivity and stability with leak rates as small as 1 x 10 Torr litres per second Leak rate adjustment is controlled with knurled knobs The entire valve including the drive mechanism is bakeable to 450 C in either the open or closed position Both components of the seal mechanism sapphire assembly and gasket assembly are easily replaceable Figure 1 Variable leak valve 10 36 Variable Leak Valve User Manual 87 400 085 01 D Instructions for Use 1 Variable Leak Valve Description The variable leak valve includes a movable piston with an optically flat sapphire that meets a captured metal gasket see the following fi
30. polishing rotate the gasket assembly about its centre axis to avoid leaving scratches that cross the sealing surface Clean the gasket with acetone after polishing Keep the gasket free of contamination while awaiting reassembly Re Install Sapphire Assembly Hold the sapphire removal tool upright and attach the sapphire assembly to the tool engaging the four slots Be certain that the tool is clean With the valve in the upside down position carefully insert the tool and sapphire into the valve Turn the tool clockwise to engage the threads Only light finger pressure is required to tighten the assembly into the valve properly Variable Leak Valve User Manual 87 400 085 01 D 23 36 1 Instructions for Use CAUTION Do not overtighten the sapphire assembly with the removal tool Heavy tightening can cause the tool to raise a burr in the slots of the sapphire assembly These burrs can prevent subsequent removal of the sapphire assembly from the valve Re Install Gasket Assembly a To avoid contamination hold the valve in the upright position Install the gasket assembly and tighten finger tight b Tighten the gasket assembly to 22 to 24 ft lbs of torque Check that the Allen wrench is clean before use Install the valve on the vacuum system as soon as possible after re assembly to avoid particle contamination If storage is necessary place valve in a clean polyethylene bag and close the bag securely Avoid setting the va
31. ssary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessaries from the core product e g inlet screens vent valves e Priorto shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LO
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