GTS User Manual - Newport Corporation
Contents
1. GTS Series High Precision Linear Stages OS O w WZ UTS COMPATIBLE Compliant OS USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed GTS Series High Precision Linear Stages Warranty S A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K J EDH0215En1031 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater th2. If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eserco Suns vii EDHO215En1031 07 15 GTS Series High Precision Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage al
3. Index Pulse Phase 1 Pin 15 gt D 0 Oe gt Index Pulse Phase Pin 25 YYYY Y Y RA RA RA Pin 21 5 V 5 Encoders i RE 150 mA max amp Sensors Ly OV Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport Experience Solutions 7 EDH0215En1031 07 15 GTS Series High Precision Linear Stages 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sur
4. following Annex II 1A Experience Solutions QD om KO of Directive 2006 42 EC on machinery AS ee SO AS 6S NAG ES The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE ITN Hereby declares that the machinery Description GTS e Function High Precision Translation Stage e Models GTS70 150 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director D Newport Experience Solutions V EDH0215En1031 07 15 GTS Series High Precision Linear Stages Definitions and
5. Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 5 3 Sensor Position Home Position Origin at Center of Travel Range EOR Limit 4 EOR Limit Mechanical Zero Index Pulse Index Pulse A Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source gt Newport EDH0215En1031 07 15 6 Experience Solutions GTS Series High Precision Linear Stages 5 4 Feedback Signal Position Encoder Phase A Encoder Phase A oo oo Direction pon oo oo Encoder Phase B Encoder Phase B Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A Pin 19 Y Encoder Phase A I Pin 23 Encoder Phase B Pin 20 Output Signals Encoder Phase B i Pin 24 Y
6. WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury
7. oonooccnncnnoonnoonononcconononccnnnononcnnnnonnos 4 3 07 Stage Wel8hts iia nina 5 40 DRIVE oa 5 EU Mola 6 5 1 UE34CC Motor Characteristics 6 5 2 Command Signals for the DC MOtor ccooococconocccccoonocncononononnnooncononononnnonnnos 6 5 3 Sensor POSITION ainia ere n rente etant 6 5 4 Feedback Signal Position ss 7 DB AN 8 6 0 Connection to Newport Controlleys 9 6 1 Warnings on Controllers iii iii 9 022 CONNECTION aida tallas 10 63 Cables illo 10 6 4 MCAB 3 Cable visi n iia ica 10 7 0 Connection to Non Newport Electronics 11 hel COMMCCUH ONS iia a aora 11 8 0 Dimensions 12 D Newport Experience Solutions iii EDH0215En1031 07 15 GTS Series High Precision Linear Stages 9 0 Maintenance ocoinncninononononocononononononononononononononononononononononananos 13 9 1 Maintenance ooccccnnnocnnnnnonannnnnnnnnnannnonananonononnnnnnnnnn non cnnononnnncnann cnn cr canannnnnnns 13 9 2 Repair ia E E 13 93 CallbratO RE ladra EU RE decicion 13 SEE V1 COs FO a TT TE veteessaseesaiay 15 gt Newport EDH0215En1031 07 15 iv Experience Solutions GTS Series High Precision Linear Stages EC Declaration of Conformity SASSER SISOS A POSI ZII RRA x e 6S GTS Series CYS AS EC Declaration of Conformity Newport
8. 1 08 i 27 5 Y lt D gt SUB D25M CONNECTOR lt gt lt gt o o o o o o o o o A 1 97 QD G MADE IN FRANCE L Y 1 53 E 150 A Y 388 Cum BE o y y lt 4 92 125 gt e A gt lt 3 54 90 gt 04 1 gt B lt C gt BK Y 4 r 39 10 KP M mM j N eo MOUNTING SURFACE HEIGHT 017 5 943 208 2 98 11 52 8 75 6 o _ NN _ _ En 4 HOLES 9 31 7 8 COUNTERBORED 9 45 11 5 o DE A NY l KZ i 42 10 6 gt A 3 97 100 8 gt lt GTS150 and GTS70 translation stages in XY configuration gt Newport EDH0215En1031 07 15 12 Experience Solutions GTS Series High Precision Linear Stages 9 0 Maintenance 9 1 9 2 gt Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The GTS stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The GTS stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your GTS stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please
9. 50 nm resolution that is mounted in the center of the stage to eliminate all drive train induced motion errors The space saving fixed reading head design avoids any moving cables inside the stage and underlines the robustness and long lasting value of the GTS stages with an MTBF of 20 000 hours 2 1 Design Details Base Material High strength 7075 Aluminum Bearings Anti creep crossed roller bearings Drive Mechanism 8 mm diameter backlash free ground ball screw Drive Screw Pitch 2 mm Feedback Linear steel scale 20 pm signal period 0 05 um resolution RS422 differential output Limit Switches Optical Origin Optical at center of travel including mechanical zero signal Drive Type DC Servo Cable Length 3 m included NOTE RoHS This product complies with the RoHS directive Restriction of Hazardous Substances Compliant gt Newport EDH0215En1031 07 15 2 Experience Solutions GTS Series High Precision Linear Stages EN Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after t
10. lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 k92 0 25 W resistor must be connected ee between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 261532 or MC3486 D Newport Experience Solutions 1 1 EDH0215En1031 07 15 GTS Series High Precision Linear Stages E Dimensions ATTENTION Screwing torque recommanded for mounting screws 3 5 Nm 4 HOLES M6 THD ON SQR 3 97 100 8 4 HOLES M6 THD ON 2 95 x 3 94 75x 100 DEPTH 24 6 DEPTH 24 6 x F i l MODEL SHOWN GTS150 MOUNTING PR oS DIMENSIONS IN INCHES AND MILLIMETERS SURFACE i i O 0 01 K N H A B c D i 2 16 GTS70 591 59 335 5 91 e E 70 150 15 85 150 4 HOLES M4 THD ON SOR 2 98 75 6 4 HOLES M4 THD ON 3 94x 2 95 100x75 GTSI50 886 79 319 492 DEPTH 24 6 DEPTH 24 6 225 20 81 12 i e Y YA
11. 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france Onewport com Service amp Returns Tel 33 0 2 38 40 51 55
12. Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user gt Newport EDH0215En1031 07 15 vi Experience Solutions GTS Series High Precision Linear Stages Warnings
13. an maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions GTS Series High Precision Linear Stages Table of Contents Warranty iaiiaas ii EC Declaration Of Conor id v Definitions and SyYMbOlS nssss simon itestermernstissnernrneleisteeenrtentiiennnee vi Warnings nresnani ee E ea a axed dites d ele eee tree a tee En vii Cations ii aida viii 1 0 Introduction 1 2 0 Description it 2 2 1 Design Details viii i 2 3 0 Chiaracieristlos conoscan 3 Sil D finitions incisi n 3 3 2 Mechanical Specifications ns 4 3 3 Load Specification Definitions iii ici 4 3 4 Load Characteristics and Stiffness
14. contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your GTS stage to Newport once a year for recalibration to its original specifications 13 EDH0215En1031 07 15 GTS Series High Precision Linear Stages gt Newport EDH0215En1031 07 15 14 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 15 EDH0215En1031 07 15 Nevvport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800
15. ct temperature and quality control The GTS s advanced asymmetric body design with defined flexible preload provides consistent results over varying temperatures and is most insensitive to non ideal mounting surfaces The extra thin and compliant T shape carriage has been optimized for different load conditions including XY configurations and for providing a high vertical load capacity To ensure the most accurate trajectory control GTS stages feature matched pairs of best in class anti creep crossed roller bearings The lack of any re circulating elements in these bearings leads to outstanding ripple free motion adequate for the most demanding scanning and inspection systems Moreover their geared retainers prevent from bearing cage migration which can occur with other linear bearings A high torque DC motor with a precision ground and preloaded low friction ball screw eliminates stick slip effects and delivers ultra smooth motion with 100 nm sensitivity Because GTS stages have been designed to meet all stage performance without a tachometer feedback loop they are compatible with a wide array of motion controllers including our popular ESP301 SMC100CC and XPS The ball screw drive has also the advantage of holding the position without power to the motor and allows for vertical use with loads up to 30 N Manual adjustments can be accomplished by a knob at the end of the motor Precision position feedback is provided by an optical scale with
16. e to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts D Newport Experience Solutions 9 EDH0215En1031 07 15 GTS Series High Precision Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE Newport s exclusive technology that enables Newport ESP motio
17. he compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more inf
18. load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move 3 4 Load Characteristics and Stiffness GTS70 GTS150 Cz Normal centered load capacity N 100 100 Cx Cx Axial load capacity N 25 20 Kax Compliance in roll urad Nm 10 5 Kay Compliance in pitch urad Nm 10 5 Kaz Compliance in yaw urad Nm 10 5 Q Off center load N Q lt Cz 1 D 100 Where D Cantilever distance mm D Newport EDH0215En1031 07 15 4 Experience Solutions GTS Series High Precision Linear Stages 3 5 Stage Weights Weights indicated into the below table are average values Weight Ib kg GTS70 6 0 2 7 GTS150 7 9 3 6 3 meter MCAB 3 Cable 1 32 0 6 4 0 Drive GTS stages are equipped with a DC motor and a metal optical scale Specifications Resolution Maximum Speed Motor pm mm s GTS70 amp GTS150 0 05 50 UE34CC D Newport Experience Solutions 5 EDH0215En1031 07 15 GTS Series High Precision Linear Stages 5 0 Motor 5 1 UE34CC Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE34CC 48 0 9 1 8 2 52 0 51 5 2 Command Signals for the DC Motor Motor v ER Motor v Motor v Displacement gt Direction Direction Displacement a He Direction 4 oo gt oo Motor v In the above drawings
19. n controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely ESP These stages are ESP compatible Enhanced System Performance is COMPATIBLE 6 3 Cables Our stages are delivered with a MCAB 3 3 meter cable This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers 6 4 MCAB 3 Cable lt 2 28 58 gt DISCONNECTED CABLE CONNECTOR STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 1 50 38 CABLE IN MOTION gt 3 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport EDH0215En1031 07 15 10 Experience Solutions GTS Series High Precision Linear Stages 7 0 Connection
20. ormation please consult the metrology tutorial section in the Newport catalog or at www newport com D Newport Experience Solutions 3 EDH0215En1031 07 15 GTS Series High Precision Linear Stages 3 2 Mechanical Specifications GTS70 GTS150 Travel Range mm 70 150 inimum Incremental Motion um 0 1 0 1 Uni directional Repeatability um 0 15 0 15 Bi directional Repeatability um 0 2 or 0 1 0 2 or 0 1 On Axis Accuracy um 2 or 1 2 or 1 aximum Speed mm s 50 50 Straightness Flatness 1 2 um 1 or 0 5 2 or 1 Pitch 2 urad 60 or 30 80 or 40 Yaw 2 rad 60 or 30 80 or 40 TBF h 20 000 20 000 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 Middle 80 of travel 2 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Max Speed mm s 50 Max Acceleration mm s 200 Axial Load Capacity Cx Maximum
21. to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a GTS stage when it is used with non Newport controllers WARNING Newport guarantees CE compliance of the GTS stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a GTS stage is used with non Newport controllers SUB D25M Connection Connector UE34CC 9 a L N C 10 i i N C 1 N C 12 a A N C 1 TEE a 1 NC Zo 2 N C 3 A HT NG are e Tray cory gt NC Y hi T x 5 1 a Motor 6 gt Motor 11 4 Ta 1 Motor 8 i ia 1 Motor Y eo 1 Y 14 gt i i gt Ground 1 po li 4 16 AAA OV logic 13 a 1 Mechanical Zero 19 1 Wt A Encoder Phase A 23 i i L Encoder Phase A 20 y Encoder Phase B 24 1 Encoder Phase B 15 m 1 Index Pulse 25 l _ 1 Index Pulse I 17 X r End of Run 18 A AS End of Run 21 1 m 5 V Encoder 22 Wt A i 0V Encoder Connector l Connector Cap IIE RN Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Stage Mechanical Zero End of Run lin max 10 mA
22. ways unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year D Newport EDH0215En1031 07 15 viii Experience Solutions GTS Series High Precision Linear Stages High Precision Linear Stages GTS Series 1 0 Introduction This manual provides operating instructions for GTS precision linear stages GTS70 and GTS150 translation stages RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the GTS stage 2 GTS stages with a URS100B stage for a XY z configuration gt Newport Experience Solutions 1 EDH0215En1031 07 15 GTS Series High Precision Linear Stages EN Description The GTS high precision linear stages provide high sensitivity and outstanding trajectory accuracy in a compact robust and cost efficient package They are an excellent high performance solution for applications such as surface scanning test and calibration optical component alignment and attachment and optical delays lines GTS stages are machined from stress relieved 7075 aluminum for long term strength and stability All critical stage surfaces undergo multiple machining processes and precision grinding under stri
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