ZQJ-291 HLD
Contents
1. 1 If the LCD displays tJ 22 1 CER 2 Wr it means that one of two filaments is error may be burned or other fault system will switch on the other filament automatically 148 BLAUE 2 If it displays it indicates all the filament are fault push the KYKY 2Q 291K HELD key to validate then system will turn off the high voltage valves and turbo pump you must cut off the supply power to check 3 If the inlet port explores atmosphere suddenly or the vacuum pressure is higher it can lead ion source current higher in order to protect the filament against burning system will cut off the power of filament and close the roughing valve at this time LCD displays it means system take the vacuum protection then you need to check the work when the fault is resolved system can turn on the filament again and LCD displays as following message EB TI AD XXXPa 4 When you change the printer paper you need to take off the printer by loosing the screws and put new paper in printer then install it again KYKY ZQK291 HLD ZQJ 291 Heli Maintenance KYKY ZQJ 291 HLD Catalog Catalog RE 1 O User s Notice eee eenen en AMEN c cose 3 e Maintenance RARAS 3 1 Daily check SERE 3 2 Adjust Peak Coon 3 3 Observe the oil 4 4 Change RVP oil teen nenne2. DD id ie dX HE x OOS D ML EN ZQJ 291 HLD USER MANUAL BEN 1 4t wp KYKY TECHNOLOGY DEVELOPMENT LTD KYKY 200207 HD CONTENTS NOTICES pp 1 WORK STEPS pp 1 OPERATION OD EE AES NM 9 MENU A See 4 DETE NON PROCESU hy 7 KYKY ZQ5 291K HED NOTICES 1 To be sure the supply power plug is good 2 In order to avoid the HLD fault please abide by operation specifications of HLD 3 To be careful of operation don t put other things on the panel lest hurting the LCD WORK STEPS 1 Switch on the HLD LCD displays the following information Z9J 291 A A d ds x Wait for a while it displays ready for vacuum gt roughing turbo pump starting gt turbo pump is normal gt waiting gt detecting system vacuum gt vacuum is ok Until this time the system will spend another 7 minutes on being ready for vacuum RAR HES 2 During this process the LCD will displays starting up ion and the second line is filament No 1 or No 2 the filament will be work 1 3 At the left top of LCD is leak rate and right top of LCD is zero Then the HLD begins to adjust zero KYKY 2Q5 291K HED 4 All of these steps is automatically completed at the end LCD displays s
3. push again to return the test status 7 The key is to exit the system you can push to cancel and push to end the test work then switch off the power 8 The key can zero the current leak signal this is to say push this key you can adjust Ep the current value as the background then on the top right corner of the LCD displays 12 0 1x10 Pa m s 20 C 14 10 00 Note We don t suggest that you should use this function if the leak signal is higher than 2 0x 103 Pa m s 8 The key can do calibration with inner leak or external leak default is inner leak during the test status if you choose the inner leak the HLD can calibrate automatically with the inner leak parameters If you choose the external leak you can operate by the message shown on the LCD During the process the HLD can compensate temperature error 2 5X10 Pa m s 20 C 14 10 00 KYKY 2Q5 291K HED During calibrating if the leak signal is lower it displays then you can push key to do peak automatically 9 The key can set the printer information When you are ready for testing the work you can push this key after testing push this key again then the printer prints the maxim signal value between these two pushing times the details of printer are described in the behind sections 10 The key is used to validate all the information
4. 29IK REM 2 After the zero progress the message in the right above of the LED become calibrated press KA the HLD enter auto adjust peak The message of the right above LED become peak 3 The HLD calibrated after 10 minutes when the auto peak are completed 4 The HLD refreshed the normal stage after calibrated 3 Observe the oil level of RVP Check sight glass If oil level is low add fresh mechanical pump oil until the level is between the marks in the sight glass when the pump is not running 4 Change oil of RVP Use these instructions for the RVP oil change It is necessary to change the RVP oil every six months or if unable to pump below 5 Pa because of oil contamination Proceed as follows 1 Drain the mechanical pump oil as follows a Place drain pan under drain plug then turn on RVP b Remove the drain plug c Place palm of hand over mechanical pump air outlet hole This will force oil out of the pump d When oil has been completely removed shut off the RVP 2 Reinstall drain plug and add one cup of fresh oil through fill plug 3 Repeat steps 2 and 3 above until oil runs clean 4 With drain plug reinstalled refill pump with fresh clean oil Fill until oil level is in middle of sight glass when pump is running Reinstall fill plug 5 With test port plugged turn on mechanical pump 5 Maintenance of Ion Source and MS tube If the LED emerge all the filaments are broken please shu
5. C 35 C humidity lt 85 and the normal cleaning surrounding 4 Check the stage of the HLD timely and put up necessarily maintenance The detail method see Maintenance Maintenance 1 Daily check Press spi key to open the inter standard leak or use the external standard leak observe the difference between the measured value and the calibrated value calibrated when it be necessary Notice you must consider the temperature s influence for the external standard leak Enter the Main menu control by hand calibrated set for system check all parameters 1 Whether the value of the parameter be abnormal Too big or too small 2 Whether the calibrated gain value are suitable If it exceed 4 50 WI it means the signal not enough need to adjust the stage of the ion source refresh the strength of the ion source the detail method see ad just peak 2 Adjust peak Usually the two following stage need to adjust helium peak 1 2 The voltage of the ion source work point badly deflected entirely no helium peak If start at first or after impulse by strength electronic disturb The voltage of the ion source work point a little deflected the calibrated gain value over the 4 50 maintenance people think it be necessarily to adjust helium peak Adjust helium peak has two method hand adjust and auto adjust In the above the first stage need to hand adjust and the second stage ne
6. C lt gt lt V5 ia Sales amp Service Internet users In the China you can contact KYKY TECHNOLOGY DEVELOPMENT LTD Add No 13 Bei ertiao Zhongguancun Haidian District Beijing China Postcode 100190 Tel 86 10 62571592 86 10 62565522 86 10 82548198 86 10 82548998 Service 800 810 62617951 010 62565812 Fax 0086 010 62617951 Send email to Customer Service amp Technical Support E mail sales kyky com cn Visit our web site at http www kyky com cn
7. and EY Ki E Lr Keys are to adjust the parameter and display the menu MEN U At any status you can enter the main menu by inputting password there are 3 different levels and they have different menus if passwords are cancelled you can operate these free options which has been set before you can refer to next section to know how to preset different level passwords Auto zero leak signal lower than 0 Calibrate leak inner or outside Log amp linear barograph display function Control mode key or pc not use now Printer options has 9 options Snuffer test yes or no Standard SI inner or outside leak parameter eject point can be preset 4 points Alarm sound Sound parameter Date amp Time preset system data amp time Communication no use now Main menu Password 3 different levels Response for digital filter Status on or off Cycle test Vent preset time Cycle time Calibration leak parameter parameter anal Turbo pump no use now Valves status 4 valves control lon source status filament and high voltage service product information KYKY Z05 291K HED 1 Auto zero during in test mode if the leak signal is lower than 0 you can determine whether it is zero automatically by E ra keys 2 Calibration leak you can select the inner or outside leak to do calibration the operation method likes above 3 Log or linear you can choose the display mode in log mode the leak signal r
8. ange is from 0 1E 10 to 9 9E 3 operation method just like above 4 Printer options you can define the contents of print it includes HLD style and number work name time temperature standard leak test leak value eject point and pass or not The HLD number is the factory number The work number can be set by ry 4d keys and push Key to validate after this the printer can be automatically increased the number per time Temperature is the inner value of HLD Leak signal value is the maximum between two times of pushing TE key It can judge if the work is passed or not by eject point and current leak signal all these options you can preset by and vy MI keys 5 Sniffer test it is able to choose in the case of this mode the pressure of opening test valve is 20Pa 6 Parameter set the normal parameter is controlled by level 1 push key to do this 6 1 Standard leak parameter these parameters is only for calibration you can set by pushing Key there are 2 options of inner and outside leak with EA vy keys to choose and with key to enter you can adjust leak parameter by Ka vy keys Push the 19 to validate 6 2 Alarm sound there are 4 eject points you can preset with Ka vy keys to change the value during test you can choose the eject point number by Ka ry keys If current leak signal is higher than some eject point the speaker will sound the volume can be adjusted by aa guy 6 3 Date amp Time the syste
9. ated See 3 3 2 and 3 3 3 2 Install the test port plug and the test valve is opened 3 When spraying suspected leak locations always apply helium sparingly starting at the highest points first Once found the large leak ought to mend immediately and then check the suspect places 9 Other maintenance If the HLD emerge the other troubles pleased contacted the service of the KYKY Trouble and Settle 1 RVP don t go round when start Open the switch is on and the RVP don t work leak to the overtime of the low vacuum Cause poor connect of the RVP or the switch is off 6 KYKY ZQF291K ARE Settle a Check that blower is plugged in and operating b Check for poor connection in wiring to the fan c Check for shorted or overloaded power circuit and correct 2 Display trouble message low pressure overtime Phenomena the LED display AZ HAYES little word about 15minuts the messages N BEH is appeared Cause the system is leak or the foreline thermocouple gauge is damaged Settle Change the thermocouple gauge or connect the service of KYKY 3 Pump don t start Phenomena the LED display Aa TR but the pump don t start AITTE Cause a The device 4N33 03 of the controller of pump is damaged b The fuse of the controller is burned Settle a Change the device 4N33 b Change the fuse 4 Display trouble message pump overtime P
10. ed both the two method hand peak D Press UEM key to open the interior standard leak or use the external standard leak The arm makes the signal of helium into the HLD HLD that is helium leak detector 2 Press key and enter the main menu hand adjust calibrated set for system there are three parameters KYKY ZO 2IK ARO e CV JE FR HS V HY SER CV 3 Press KA arrow key and move the cursor down until to second page e mA 0 38 Ari ETE 14 1 00 Set the emission current value is 0 38 then come back the first page the method see the user s manual 4 Set the ion source voltage volt the process is following Increase the accelerate volt and observe the LED display of the leak If continuously increased the accelerate volt and find the leak rate decrease adjust decreased until to find the maximum value Then adjust the repel voltage is same with above to find the maximum value 5 Exit the menu press key to close the interior leak check the helium signal if the helium signal decreased it means the helium signal otherwise it isnot the peak of helium When used the exterior leak directly closed the leak 6 Press iii key then after calibrated can normal leak Auto adjust peak 1 In the test stage 2 6X10 Pa m s 20 C 14 10 00 press Bway akey let the HLD into calibrated progress 3 KYKY ZQF
11. em parameter REEI 2S if the signal is not the HLD can use normally If the signal is too big and the calibra too big ted gain over4 50 it can adjust peak the detail method see Daily Maintenance adjust helium 9 Display trouble message temperature too high Phenomena the LED display or VERE when during test leak Cause the temperature is too high or too small Settle adjust temperature bulb KYKY System parameter table Name Reference Accelerate 240V 35t Repel 0 Focus Emission 0 18 1 0 mA ZQF291K FGI Function Acc Of ion source The compensation of the test port Vacuum Gain System vacuu The test por p b The ion in The gain of t The second amplifier calibrated Calibrated 100times ressure of the pen valve big leak transf aS N e pressure of the open valve 20mV System signal zero C Temperature zero compensation KYKY ZQIF291K Appendix A Principle Principles of Mass Spectrometry A mass spectrometer sorts gases by their molecular weights mass number to determine the quantity of each gas present With the helium leak detec
12. erate voltage V ion source voltage Repelled voltage V ion source repelled voltage Focus voltage V ion source focus voltage Emitted current mA filament emitted current Inlet port vacuum compensation adjusted in program Calibration gain signal calibration parameter System vacuum gain fore line vacuum calibration parameter Inlet port vacuum gain inlet port vacuum calibration parameter 6 KYKY ZQ5 291K HED Ion gauge gain high vacuum calibration parameter Temperature sensor gain environment temperature calibration parameter The first amplifier calibration adjust by program The second amplifier calibration adjust by program Vacuum exchange the inlet port pressure value Zero compensation system zero compensation Temperature compensation environment temperature measure compensation Zero reference is only for KYKY testing Note Thereinto the three voltage of ion source determine the helium peak vacuum exchange value decide the roughing pressure of inlet port the initialization is 10 Pa 9 2 Turbo pump status it is no used now don t enter this menu 9 3 Valve status No 3 password level can control the four of valves including roughing valve test valve vent valve and standard leak valve by manual this function is available only for maintenance man 9 4 Ion source status No 2 password level can control ion source status by ma
13. est Piece Already Sealed KYKY AUS Sealed unit containing Helium Leak Detector Fig B 4 Test Piece Sealed with Helium or Mixture of Helium and Other Gases Bell Jar Used to Determine Overall Leak Rate Sometimes it is necessary to leak check a completely sealed object This may be done by placing helium inside the object before sealing either 100 or mixed with other gas used for backfilling The object is then placed in a vacuum chamber connected to the leak detector Helium escaping from the object into the vacuum chamber is detected by the spectrometer tube Sensitivity depends on the partial pressure of helium in the object If the presence of helium in the finished object is undesirable units already sealed may first be placed in a container that is then pressurized with helium for a specific time at a known pressure Helium will enter the object through any leaks and may be detected later as described in the previous paragraph Gross leaks may sometimes not be detected since all helium entering through a large leak may be lost prior to testing Also spurious signals may be given by helium not entering the object but entering surface fissures and remaining long enough to be detected 1 3pressure and leak rate unit 1 3 1 pressure unit po 075X10 aC 1 133 100 10 E 1 01310 1013 ois Em Ay Tareas 0 A qp 75 wm 99 132 mbar l s i OH KYKY Append
14. henomena The LED message displayed J4aiJ4 gt 4 and the time is over3 minutes the pump speed don t normal the LED display DT RHEN Cause a The device 4N35 01 is damaged of the pump controller b The controller is troubling c The system has leak Settle a Change the 4N35 b Connect the service of KYKY 5 Display trouble message high pressure overtime Phenomena the LED display DFRIEK and the time is over 7 KYKY cS 15minutes the display Cause the HLD vacuum system has little leak or the HLD has not start for long time Settle connect the service of KYKY 6 Filament break_ Phenomena a during the start and leak process the LED display 1 2 tir AER b The LED display 121 1X2 Mr Azii then display RHUL Cause one or two filaments of the ion source burned or the 2731 U36 is damaged Settle a the HLD auto change other filament and normal don t do anything b Check ion source If the two filaments burned change ion source The method see Daily maintenance ion source maintenance otherwise change the 2731 U36 of the switch power box 7 Display trouble message NO He Peak Phenomena the LED display KAR when the auto peak isn t succeed Cause a the stage of ion source has big change when the HLD don t sta
15. ix B The configuration of 291 1 MS Tube MS tube are included ion source magnetic analyzer and receive and the magnetic analyzer is 90 deflexed CESTA 2 vacuum system FEMME Jas Al ud P The vacuum system is composed of turbo pump RVP and solenoid valves KYKY IL VS Wim V2 T e V1 C 291 KYKY APR Appendix C The electric system connect of 291 En 220VAC B01 S01 24V 3 5A tSV 8A 2V 3A 9V 1A 15V 0 5A I24V 2A TCI TC2 B02 S01 AT 22 fj Hs 1 J if EJF Hs TTR OK B05 PCB 330V TCI Bi O RR TC2 gt lt gt lt VI V2 Titi id ii V3 WA id B04 S01 SIA i CPU B03 S01 S03 S04 10 TCLTC2 SYSTEM PRESSURETEMP 11 HELIUMAMPLIFER m T d 12AUDIO DRIVER 45T7 13 RESET LOGIC 5V 220V A
16. lve Block KYKY ZQF291K ARMOR Wash all parts except thermocouple gauge in Freon or Acetone and Gasoline to remove all foreign matter and residual Apiezon grease Dry thoroughly in cleanliness circumstance NOTICE Don t clean the O ring with the acetone Reassembling Valve Block a Check the assembly valve body whether it is be cleaned and the sealing face cannot have radial scratches b Moisten all new O rings with Apiezon vacuum grease until they are shiny c Mount the assembly valve body in the framework Fix the test valve rough valve according to the disassembly order First fix the spool then fix the valve cap body and last fix the coil and the enclosure Insert the power plug NOTICE The four screws which linked the valve cap and the assembly valve body must be over spring and screws down evenly d Assemble thermocouple gauge vent valve and test port e Linked the corrugated pipe and fix the framework panel 8 Self leak test Accuracy reliability and stability of my mass spectrometer leak detector depend upon the leak free integrity of its own vacuum system Inherent helium background and its effect on sensitivity demands elimination of all detectable leak If performance degrades during operation or after some part of the vacuum system is opened for switch a methodical leak check will eliminate the possibility of a leak as the cause 1 The leak detector has tuned and calibr
17. m date and time can be adjusted by Ka vy keys and push key 1 9 to validate 6 4 Communication 1t 1s not used now 6 5 Password setup before you reset password you must input the old password then you can preset the new one the password is made up of 4 numbers vii Y aa keys can change KYKY 2Q 291K HED Note Password has 3 levels the third level is the highest level and the first level is the lowest level higher level has the right to enter lower level All the level is explicated as follows NO 1 level Function selection Parameter setup Cycle test Service information NO 1 level Manual calibration setup Manual ion source status filament NO 1 level Manual Manual valve status turbo pump status Manual ion source ion gauge Manual ion source status high voltage 7 Response time Set the filter response time const the unit if 0 1s you can regulate by ra EJ Keys it is from 0 0s to 5 0s and the default value is 1 0s 8 Cycle test Stop amp start cycle test and the No 1 password level can control corresponding parameters 8 1 Cycle test status open or close the cycle test by E rr keys 8 2 Vent open or close the venting time with E Ss keys can adjust the time 8 3 Test time update the cycle test time 9 Manual you can control system components and inner parameter by manual 9 1 System calibration settings set the main inner parameters by s v and keys All the parameters are as follows Accel
18. nnnm enn enne nee 5 5 JonsourdA I A 5 6 MS mid TREES uere 5 7 Cleaning the blocks seen Henne enne nnne ne 6 8 SIMA Qo 2 Pe ee ft 6 9 Other 6 e AUDIT MAA AAA IA Hr 6 1 RVP don t go round when start ttem Hn nennen enne 6 2 Display trouble message low pfresSUEe_overtime rnt 6 3 Pump don t start tresne HH nen nnn hene nennen noo to nnne eee 7 4 Display trouble message pump Overtime eee 7 5 Display trouble message high pressure otertime e eeeeeeeeeeeeeeeeeeeeeeeee 7 A Zee OO AA 8 7 Display trouble message NO He Peak 8 8 Display message signal too small mH 10 9 Display trouble message temperature too high rmn 10 System parameter tables 11 Appendix A Principle een 12 Appendix B The configuration of 291K mH HH 16 Appendix C The electric System connect of 291K mm Hx 18 KYKY ZQF29IK AVS User s Notice 1 Strictly abide by all operating rules of 291K user s manual and notice below Forbidden inlet port exposure atmosphere when the HLD isn t in the vent stage According to normal rules when Shut off avoid straightly to decrease electric strike Be care for lay down lightly when using exterior standard leak to calibrate avoid to collide Notice Open the leak to decrease the stabilized time of signal when using the standard leak 2 Avoid to collide the LCD leak LED and printer 3 Be sure the temperature of the surrounding between 5
19. nual Filament the special man of No 2 password level can change the filament number by EM rr Keys Ton source gauge only one who has the No 3 password level has the right to control the ion source gauge by manual High voltage it is like to ion source gauge method 9 5 Service information the simply specification of KYKY Note Chinese character 291K HLD has other menu such as gross leak test menu in this menu you can set the inlet port pressure up to 2000Pa DETECTION PROCESS 1 Connect the supply power and switch on LCD displays 291K i character After 10 minutes during this stage HLD will prepare the system vacuum ion source burning and zero etc KYKY ZQ5 291K HED ZQJ 291 z Ex i de de M 2 The HLD is ready if the LCD display and character with 4 times beep 3 Check the inlet port if it is ok then you can push key to test during testing you can adjust some parameters such as opening the standard leak valve auto calibration peaking the helium signal by manual and soon on 4 Push the key to vent the inlet port and mount the work on it then push key to test Note you can stop roughing during roughing the work by EEko 5 After finishing the work you can exit the system wifi key at the end turn the power off ISUPLEMMENT
20. rongs are facing up Align slits at 90 with sidewalls of spectrometer tube and or concentrically align circular hole in plate with smaller guide hole in bottom of ion source cavity See Fig 4 1 15 Wipe new o ting and mating surfaces with clean lint free cloth and place new ion source in cavity Locating pin should be approximately in center of guide hole Be sure pin and 8 arc parallel to the sidewall of the spectrometer tube Fig 4 2 Tighten hold down flange evenly and firmly A straight edge held against pins 1 and 8 of both octal arrays is a convenient way to assure parallelism 16 Install Preamplifier using new O rings Tighten clamps evenly and securely 17 Install total ion monitor See Fig2 4 18 Install spectrometer tube in manifold using flange and O ring 19 To evacuate spectrometer tube act operating switch to the 0 position and leave the Leak Detector is in the Rough stage 6 Valve Block Cleaning 1 DISASSEMBLY Discard all O rings if new ones are available a Relieve the electromagnetic valve plug b Remove the two corrugated pipes which linked the mechanical pump and the turbo pump c Remove the thermocouple gauge vent valve and the test port d Remove the test valve spool Notice Don t lose the four balls of the spool e Remove the rough valve as the same way f Remove the four screws which linked the assembly valve body and the framework take away it from the framework 7 Cleaning Va
21. rt long time b the strength disturb lead to interior parameter been changed enter the menu to check them Settle a press c enter menu adjust helium peak by manual the detail see method to aily Maintenance adjust peak HH adjust peak by manual 1 Shut off the HLD 2 Restart the HLD and press 8 KYKY ZQ5 291K AEO ZQJ 291 key 3The Led display Press key 4 The LED display enter the third passport the LED display KYKY key ZQF291K AES 5 The LED display A REP Kr OJER XXXPa press XXXPa 6 Enter leak progress pres key to open interior calibrated leak or input the exterior leak on te key enter menu manual adjust helium peak the see method aily maintenance WAIE FAWR detailed 8 According to System parameter table set the system parameters 9 Notice if reset the value of calibrated leak 10 Set the passport and recorded it 8 Display message signal too small Phenomena The LED display when the calibrated is over Cause the signal less than the normal Settle Check the syst
22. t off Measure the resistance value of the two filaments need to change the filaments Ensure the HLD power is shut off and drop the power plug 1 Depart the right and back panel you can see the turbo pump and MS 2 Loosen the bar clasp and vent both the turbo pump and MS 3 Loose plug of ion source power and preamplifier power and cutting out plug in the preamplifier 4 Remove spectrometer tube from the manifold KYKY ZQF291K ARMOR 5 Remove three mounting screws and take off magnet assembly 6 Remove four screws on each side of spectrometer tube body and slip out both pole pieces Discard O rings 7 Remove four screws and take down the total ion monitor ion source and preamplifier 8 Using fine emery cloth remove heavy deposits from all surfaces of baffle ground slit plate until bare metal surfaces are exposed NOTE Do not use crocus cloth as it leaves a residue 9 Rinse spectrometer tube body pole pieces ground slit plate and total ion monitor in a Freon type solvent DuPont Freon TF or equivalent 10 If foreign matter or stubborn stains remain rub them with a Plastic scouring pad such as Bear Tex or Scotch Brite very fine grade 11 Rinse again in Freon Type solvent 12 Use warm air to dry all parts 13 Reassemble pole pieces using new O rings and magnet assembly Pole pieces are interchangeable 1 Install ground slit plate When installing ground slit plate be sure that the p
23. tor HLD the point of interest is primarily in helium and the mass spectrometer tube is relatively simple The principle is to ionize the gases in vacuum accelerate the various ions through a fixed voltage and then separate the ions by passing them through a magnetic field A slit properly placed allows only helium ions to pass through and be collected The resulting current is amplified and a leak rate bar graph indicates the presence and amount of helium See in Fig Al The track radius is such as 1 ro o B Z R Ion deflexion track radius B Intensity of magnet field M Z Mass to charge radio U Accelerate power In the mass spectrometer tube R and B are held constant and we are concerned only with singly ionized helium atoms M 4 and Z 1 so the only variable to adjust is U When the voltage is adjusted for collecting helium ions the machine is said to be tuned to helium and mass 4 will plot as shown in Fig A2 EFI TE Fe ER WMA KYKY ZQF29IK AVS Fig A l The principle of the MS A Fig A 2 Mass Spectrum of HLD Test Mode Most leak detection methods depend on the use of a tracer gas passing through the leak and being detected on the other side for example visual detection of air bubbles in water The mass spectrometer leak detector operates with helium as a tracer and is widely used because it combines high sensitivity with production testing capabili
24. ty The three basic methods in common use are described below Test Piece Evacuated The object to be tested is evacuated by the leak detector roughing pump then valve into the spectrometer vacuum system The surface of the test object is then probed with a small jet of helium to locate individual leaks or surrounded by helium hooded for an overall leak check Leak Detector Leak 3 z c o Tr O Fig B 1 Test Piece Evacuated Tracer Probe Used to Locate Leak KYKY Test Piece 3c 0 I pi O Fig B 2 Test Piece Evacuated and Hooded with Helium Atmosphere to Determine Overall Leak Rate Test Piece Pressurized Leak Detector Fig B 3 Test Piece Pressurized Detector Probe Used to Locate Leak A sampling probe is connected to the leak detector The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface Some of the helium escaping from a leak is captured through the probe and enters the leak detector thus locating the leak Sensitivity of this type of testing is limited to about 10 Pa m sec since most of the escaping helium diffuses into the surrounding atmosphere The sensitivity is also limited by operator technique and variation in ambient helium concentration in the vicinity of the testing An alternative to probing is to enclose the object and probe the enclosure for a change in helium content T
25. ystem is ready and please push the test button to work OPERATION Operations after the HLD is ready 1 There are 2 keys of aaa is designed for venting the inlet port if push this key the LCD displays the pressure 1 0ES Pa then the operator can take out the work Fri HU 2 After taking out the work push 575 key to test when the pressure of valve reaches the preset value the test valve will be opened 3 With i key you can enter the menu the details is introduced in the behind sections 4 The key can control the mode of signal range between manual and auto In the auto mode the leak signal displays from 0 1x 10 Pa m s to 9 9x10 Pa m s in the manual mode the leak signal doesn t change unless you change VY and ES keys KYKY ZQ5 291K HED Note During switching the range if the leak signal is in range of 7 push the up arrow it displays FEHR iI then the range is changed to 10 10 Pa m s by the same way if the leak is in range of 8 ush the down arrow the range can be also changed to 10 107 Pa m s 5 The key can open and close the speaker the speaker will sound if the leak signal is more than ejecting point the ejecting point is described in the menu section 6 The key can open inner leak in order to check if the HLD is correct after checking
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