Home

Downloading - Physik Instrumente

1. DC OFFSET potentiometer The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use a PI LabVIEW Analog Driver set to generate that analog signal See Analog Operation on p 17 for details CONTROL INPUT Release 2 15 1 www pi ws Page 28 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Labeling E 505 00 and 10 only LEMO Output of the piezo voltage for the piezo actuator in the stage AN ERA 00 250 cTL Voltage in the range of 30 to 130 V PZT 30 to 130 V E 505 00S only LEMO Output of the piezo voltage for the piezo actuator in the stage AN ERA 00 250 cTL Fixed voltage of 100 V for piezo tip tilt stages PZT 100 V 5 5 2 Operating Limits 160 T et Po pN 7 T ope ree T 140 120 Amplitude V peak peak 10 10 10 Frequency Hz Fig 13 E 505 operating limits with various piezo loads open loop capacitance is measured in uF Release 2 15 1 www pi ws Page 29 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 5 3 Specifications systems Channels rs a Peak current 2 A lt 3 ms 10 A lt 200 us 2 A lt 3 ms Analog input BNC BNC pe 10 V to Control In 10 V to Control In Operating temperature 5 to 50 C 5 to 50 C 5 to 50 C range Release 2 15 1 www pi ws Page 30 E 500 E 501 Series PZT Servo Controllers 5 5 4 Pin Assignment 32 pin connector DIN 41612 male R
2. INPUT DC OFFSET INPUT DC OFFSET g EA aio y o 30 to 130 V 2 to 12 V 30 to 130 Y io 2100 CONTROL INPUT DC OFFSET PZT HO m1 PZT Q k 30 to 130V _5 312V Say 3 EN to Fig 5 E 503 00 amplifier module ig 6 E 503 00S amplifier module POWER LED Amplifier state Green off Green E 503 is ready for normal operation Off The E 500 E 501 system is switched off LEMO Output of the piezo voltage for the piezo actuator in the stage PZT ERA 00 250 cTL Voltage in the range of 30 to 130 V 30 to 130 V E 503 00S only LEMO Output of the piezo voltage for the piezo actuator in the stage ERA 00 250 cTL Fixed voltage of 100 V for piezo tip tilt stages PZT A 100 V Release 2 15 1 www pi ws Page 20 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E CONTROL INPUT In analog operation this control input voltage gives the target 2 to 12 V either as voltage or position depending on the servo mode The input signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control input range can be shifted using the DC OFFSET potentiometer The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use a PI LabVIEW Analog Driver set to generate that analog signal See Analog Operation on p 17 for details DC OFFSET 10
3. PZT SERVO PZT SERVO CONTROLLER CONTROLLER S n So Ae OFI pe A rs A OFF A ZERO 4 SENSOR ji MONITOR SENSOR F SENSOR MONITOR i xT j See Fig 24 E 509 S1 sensor servo Fig 25 E 509 S3 and E 509 S31 sensor controller servo controller INFORMATION In the labeling of E 509 S1 and E 509 S3 modules X stands for S INFORMATION E 509 S31 and E 509 S3N models for use with P 611 NanoCube stages E 509 S31 differs from E 509 S3 only in the settings of the internal E 801 sensor submodule E 509 S3N consists of an E 509 531 module plus a P 611 91 3 channel adapter cable LEMO Sub D 25 f Release 2 15 1 WwWW pi ws Page 44 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E LED Overflow state Yellow oft Yellow Overflow condition i e the amplifier is near its range limit Off No overflow condition When the OFL LED comes on a zero point adjustment of the sensor can be necessary See p 17 and the E 509 User Manual PZ77E for details SERVO ON OFF Toggle switch Switch for the servo mode selection of the corresponding channel 1 2 and 3 stand for m ON Servo mode is switched on closed loop operation nahn OFF Servo mode is switched off open loop operation See also Starting Operation on p 17 Trim potentiometer A trimmer adjustment tool can be used on the ZERO potentiometer for a zero point adjustment of the sensor A zero point adjustment can be necessary after l
4. d The E 500 E 501 system contains electrostatic sensitive devices EGB and can be damaged if handled improperly When operated without chassis the modules of the E 500 E 501 system can emit electrical magnetic or electromagnetic fields which interfere with the environment gt Avoid touching components pins and PCB tracks gt Before touching an electronic component discharge yourself of any electric charges While working wear an antistatic wrist strap or Briefly touch a conducting grounded object gt When modules of the E 500 E 501 series are installed in a third party chassis make sure that the system complies with the EMC requirements Release 2 15 1 www pi ws Page 58 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Supply Power for the Modules The supply power must be stable within a range of 2 of the nominal value For stable supply power with dynamic operation of high piezo loads the power supply must be equipped with a sufficiently dimensioned buffer capacitor The required capacitance of the buffer can be approximated as follows Buffer capacitance 10 x piezo load Amplifier Modules Closing the Circuit In order to feed the Control In signal DC Offset potentiometer and or Control Input into the amplifier short the following pins E 504 E 505 E 506 E 508 gt pin 2c to 4a E 503 gt pin 2c to 4a pin 10c to 12a pin 18c to 20a Otherwise the output voltage of the amplifie
5. 501 Series PZT Servo Controllers User Manual PZ 62E For example in open loop operation the output range 3 to 1100 V and gain 100 yield a Control In range of 0 to 11 V Setting the Output Range Jumper Range E default Range D Range C Range B Range A Release 2 15 1 WwWW pi ws A 3 to 1100 V factory setting 260 to 780 V 550 to 550 V 780 to 260 V 1100 to 3 V To change setting remove red cap shown in Range E position and replace over pins corresponding to desired range Page 41 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 8 E 509 Signal Conditioner Servo Controller Module INFORMATION gt See the E 509 User Manual PZ77 for a detailed description gt See also the User Manuals for the E 802 servo controller submodule with all E 509 versions and the E 801 sensor submodule only with LVDT and strain gauge sensor versions 5 8 1 Front Panel Elements of Modules for Dual Electrode Capacitive Sensors Skee PRN ee ON ZERO S F OFL G OF DO 1D al ur i Ea On Ym a E rA i n ri i i Fig 19 E 509 C1A sensor Fig 21 E 509 C3A servo controller sensor servo controller sensor servo controller LEMO Input for the Target sensor signal from the piezo stage LEMO Input for the Probe sensor signal from the piezo stage coo Trim potentiometer A trimmer adjustment tool can be used on the ZERO potentiomet
6. 503 00S Piezo Amplifier Module 30 to 130 V one of three channels is fixed 100 V E 504 00F High Power Piezo Amplifier Module 1 channel 280 W peak power 100 W average power 30 to 130 V E 504 00S High Power Piezo Amplifier Module 1 channel 280 W peak power 100 W average power fixed voltage 100 V E 505 00 Piezo Amplifier Module 2 A 30 to 130 V 1 channel E 505 10 Piezo Amplifier Module for switching applications 10 A 30 to 130 V 1 channel E 505 00S Piezo Amplifier Module 1 channel fixed voltage 100 V E 506 10 High Linearity Piezo Amplifier Module 30 W average output power 30 to 130 V 1 channel E 508 00 HVPZT Piezo Amplifier Module 3 to 1100 V 1 channel E 508 0E HVPZT Piezo Amplifier Module OEM version 400 mA peak current 1 channel Release 2 15 1 www pi ws Page 9 3 2 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Sensor and Controller Modules E 509 S1 Sensor Piezo Servo Control Module SGS sensor 1 channel E 509 S3 Sensor Piezo Servo Control Module SGS sensors 3 channels E 509 S31 Sensor Piezo Servo Control Module SGS sensors 3 channels for NanoCube stages E 509 C1A Sensor Piezo Servo Control Module capacitive sensor 1 channel E 509 C2A Sensor Piezo Servo Control Module capacitive sensors 2 channels E 509 C3A Sensor Piezo Servo Control Module capacitive sensors 3 channels E 509 E3 PlSeca Sensor Piezo Servo Control Module for Single Electrode Capacitive Sens
7. 517 short version A000T0028 Technical Note for the PI Update Finder A000T0032 Technical Note for Using the PI Update Finder without Internet connection Safety Measures for Installation Start Up and Operation Improper installation of the E 500 E 501 system can result in personal injury and or damage to the E 500 E 501 system gt Install the E 500 E 501 system near the power source so that the power plug can be quickly and easily disconnected from the mains gt Use the supplied power cord to connect the E 500 E 501 system to the power source gt lf the supplied power cord has to be replaced use a sufficiently dimensioned component gt Only use cables and connections that meet local safety regulations Release 2 15 1 WwWwwW pi ws Page 14 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E High temperatures can overheat the E 500 E 501 system gt Install the E 500 E 501 system horizontally with 3 cm air circulation area gt Do not install the E 500 E 501 system vertically since this prevents internal convection gt Ensure sufficient ventilation at the installation site The E 500 621 chassis uses the same main connectors as the E 500 00 and E 501 00 but has incompatible pinouts gt Do not use the modules described in this manual with the E 500 621 chassis Oscillations can cause irreparable damage to the piezo actuator connected to the E 500 E 501 system Oscillations are indicated by a humming a
8. 90 cls Diz 9 9 3 5 5 4 5 6 5 6 1 5 6 2 5 6 3 5 6 4 A Sely 5 7 2 5 7 3 5 7 4 57 5 5 7 6 5 8 9 8 1 9 8 2 9 8 3 5 8 4 9 8 5 0 9 oo Male 5 9 2 9 9 3 5 9 4 Release 2 15 1 Operi LIMIS mensenn 21 SDecCalO NO ear tei ateadiial a tate ade aratde tes aad 22 PINASSIONIMG i nee panee perne EE EEE EGEN ted 23 E 504 High Power Piezo Amplifier Energy Recovery 24 Front Pane Elemen Gns E ace hsdicenles 24 Operating LIMIS cerren Gatetananaannee 25 SPECINCIUONS cerren ena ERAN 26 PIM ASSIONINGIM inci ccdetrel aciviuet tained iuiatoreiiecdniatanareleaiuinntcadenneits 27 E 505 High Power Piezo Amplifier cccccseceeeeeseeeeeeeeeeseeens 28 Font re ay ml 2 0 29 eraran ene neeron perme neers meee errr 28 Operating EiMiS oseiscsaaes odede osstinc sobs N 29 SDCCIIICALIONS vs cceretitarteetdeutiaistussl cas iauttacntausacuaetlat tt iata at oo atetet 30 PIA SSIONINGMictiuccesuetackteaeaeyGac E 31 E 506 Linearized Piezo Amplifier Charge Control 0 32 FFONT Panel Elemen S eerren cavesneebeteseeces 32 Op ralino LIMITS seinna 33 SPECINCAUONS martisor A 34 ASS QIANG IM ea Peedi tuiauevantcmuelnntuetunecmunanl 35 E 508 High Power Piezo Amplifier with 1100 V Output Voltage 36 Front Panel EICMCNIS crite atesistersicinteuiaenteeseish eietecinie et eaeoual 36 COEF AUG LIMIS senn a sete neehioesieniacuniatiwmensades 37 DDSI CANONS ay ateieataiiest ees ut aca
9. E 501 system therefore is 2 to 12 V resulting in a piezo voltage range of 20 to 120 V A control input range of 3 to 13 V is possible results in 30 to 130 V piezo voltage but will reduce the actuator lifetime accordingly Piezo Voltage W Fig 34 Interdependency between the mean MTTF of a PICMA actuator and the value of the voltage applied Fig 35 Interdependency between the mean MTTF of a PICMA actuator and the ambient temperature Release 2 15 1 WwWW pi ws Page 64 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Lifetime Factor Ax Rel Humidity Fig 36 Interdependency between the mean MTTF of a PICMA actuator and the relative humidity Example The simple formula MT TF AU AT AF provides a quick estimate of the reliability in hours In concrete terms The values for 75 RH AF 14 100 VDC AU 75 and 45 C AT 100 result in an approximate MT TF of 105 000 h i e more than 11 years see markings on the diagrams Read the Tutorial Piezoelectrics in Positioning in the PI Catalog for detailed information 10 2 How to Measure the Amplifier Output of E 504 Modules The innovative efficient circuitry of the E 504 amplifier module reduces power consumption and heat dissipation especially in dynamic applications Working with an internal switching frequency of 100 KHz charge is transferred to the piezo actuator using low loss PWM techniques The ripple of the amplifier outp
10. E 517 User Manual PZ214E for a detailed description 5 10 1 Front Panel Elements Digital Digital In Out In Out Y Y E GPIB IEEE488 GPIB IEEE488 Fig 32 E 517 13 interface display module single Fig 33 E 517 i30 interface display module single channel E 517 i1 models have identical front panels channel E 517 i10 models have identical front panels but show only one channel in the display but show only one channel in the display LCD display See Display Screens in the E 517 user manual for details Digital In Out MDR14 socket Digital input and output lines can be used to trigger external devices and to send start and synch signals to the wave generator s See Digital In Out Socket in the E 517 user manual for the availability of the lines and for pinout Sub D 9 pin panel Serial connection to host PC See RS 232 Socket in the E 517 plug male user manual for pinout Trackball Display selection device configuration and triggering of ONLINE motion See Trackball Functions in the E 517 user manual for details lt lt USB B socket Universal Serial Bus for connection to host PC See USB Connection in the E 517 user manual for more information E 517 i3 and E IEEE 488 micro General Purpose Interface Bus GPIB for connection to host PC 917 11 only ribbon socket See GPIB Connection in the E 517 user manual for more GPIB IEEE488 information RJ45 socket Network connection over TCP IP See
11. LED Amplifier state Green off Green E 504 is ready for normal operation Off The E 500 E 501 system is switched off E 504 00F only 10 turn Adds 0 to 10 V to the CONTROL INPUT signal only relevant DC OFFSET potentiometer in analog operation see p 17 for details E 504 00F only In analog operation this control input voltage gives the target CONTROL INPUT either as voltage or position depending on the servo mode The input signal should always be in the range of 0 to 10 V 2 to 12 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control input range can be shifted using the DC OFFSET potentiometer The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use a PI LabVIEW Analog Driver set to generate that analog signal See Analog Operation on p 17 for details Release 2 15 1 WwWW pi ws Page 24 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Labeling E 504 00F only LEMO Output of the piezo voltage for the piezo actuator in the stage AN ERA 00 250 cTL Voltage in the range of 30 to 130 V PZT 30 to 130 V E 504 00S only LEMO Output of the piezo voltage for the piezo actuator in the stage AN ERA 00 250 cTL Fixed voltage of 100 V for piezo tip tilt stages PZT 100 V 5 4 2 Operating Limits Amplitude V 10 10 10 10 Fraquencymz Fig 1
12. TCP IP Connection in the E 517 user manual for more information Release 2 15 1 www pi ws Page 54 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 10 2 Specifications oe mim DAC 24 bit 12 V DAC 24 bit 12 V Resolution ADC 18 bit sampling ADC 18 bit sampling Ethernet TCP IP USB RS 232 Ethernet TCP IP USB RS 232 Interfaces communication IEEE 488 E 517 i1 only IEEE 488 E 517 i3 only 1 trigger input 3 trigger inputs 1 trigger output 3 trigger outputs 5V 5V I O ports MDR14 connector MDR14 connector PI General Command Set GCS Pl General Command Set GCS Lab VIEW drivers Windows and Lab VIEW drivers Windows and software drivers Linux Libraries DLL Linux Libraries DLL Wave generator data recorder Wave generator data recorder Supported functionality macro programming macro programming LCD display for monitor signals LCD display for monitor signals position and voltage states and position and voltage states and Display trackball menus trackball menus Operation via trackball Operation via trackball Miscellaneous Operating temperature range 5 to 50 C 5 to 50 C E 500 E 501 system E 500 E 501 system 5 V 1A 5 V 1A E 517 11 E 517 i10 E 517 13 E 517 i30 Operating voltage 15 V 0 5A 15 V 0 5A Release 2 15 1 www pi ws Page 55 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 10 3 Pin Assignment 32 pin connector DIN 41
13. gives the target E 508 0E SMB either as voltage or position depending on the servo mode Input voltage range Servo off 1 100 of selected output range Servo on 0to 10 V With E 508 00 the control input range can be shifted using the DC OFFSET potentiometer The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use a PI LabVIEW Analog Driver set to generate that analog signal See Analog Operation on p 17 for details See the Specifications table below for the input voltage range LEMO Output of the piezo voltage for the piezo actuator in the stage PZT EGG 0B 701 CJL 1173 See the Specifications table below for the output voltage High Voltage range Pinout on p 39 5 7 2 Operating Limits Fig 18 E 508 operating limits with various piezo loads open loop capacitance is measured in nF Release 2 15 1 www pi ws Page 37 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 7 3 Specifications E 508 00 E 508 0E Function Power amplifier for PICA high Power amplifier for PICA high voltage piezos voltage piezos Output voltage 3 to 1100 Standard 3 to 1100 Standard 260 to 780 260 to 780 550to 550 550to 550 260 to 780 260 to 780 3 to 1100 jumper 3 to 1100 factory selectable settable D sc 5 20 50 Amplifier bandwidth small signal m k
14. lead at 0 V and here the other is in a zero crossing range commonly 500 V Unipolar Actuators The notation of positive and negative polarity of piezo actuators does not refer to their direction of motion Unipolar piezos of any polarity will elongate when a higher voltage is applied to their than to their terminal Positive and negative refers to the sign of the voltage on the core of the cable All standard PI piezo actuators with 2 conductor LEMO connectors have positive polarity Pin Assignment PZT High Voltage Type LEMO EGG 0B 701 CJL 1173 HV OUT HV OUT High voltage output 0 1100 PGND Power ground Controller socket Housing Cable shield front view 32 pin connector DIN 41612 male Row PIN a PINc 2 IN Power Fail OUT control E 508 00 BNC Offset E 508 0E SMB 4 IN control OUT monitor of piezo voltage PZT 1000 6 nc nc 8 nc nc 10 nc nc 12 nc nc 14 internal use Bus_A internal use Bus_B 16 internal use Bus_Vcc internal use Bus _GND 18 nc nc 20 nc nc 22 GND measurement GND measurement 24 GND GND 26 IN 24 V to 27 V IN 24 V to 27 V 28 nc nc 30 nc nc 32 Protective earth chassis Protective earth chassis no connection on E 508 0E Release 2 15 1 WwWwwW pi ws Page 39 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 7 6 E 508 00 Gain Polarity and Output Range Settings NOTICE Damage from electrostat
15. n C n C GND measurement GND power IN 24 to 27 V n C n C Protective earth chassis Page 27 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 5 E 505 High Power Piezo Amplifier DANGER High Voltage The E 505 amplifier can output up to 130 V Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Only authorized and qualified personnel must install operate maintain and clean the E 505 amplifier gt Operate the piezo actuator on the PZT socket only when it is connected to a protective earth conductor 5 5 1 Front Panel Elements LVP2T AMPLIFIER LYPZT AMPLIFIER POWER prn POWER o DC OFFSET G D 7 i Fig 11 E 505 00 and E 505 10 amplifier modules Fig 12 E 505 00S amplifier module POWER LED Amplifier state Green off Green E 505 is ready for normal operation ee Off The E 500 E 501 system is switched off Adds 0 to 10 V to the CONTROL INPUT signal only relevant DC OFFSET potentiometer in analog operation see p 17 for details E 505 00 and 10 only BNC In analog operation this control input voltage gives the target either as voltage or position depending on the servo mode The input signal should always be in the range of 0 to 10 V 2 to 12 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control input range can be shifted using the
16. 0 E 504 operating limits with various piezo loads open loop capacitance is measured in uF Release 2 15 1 WwWW pi ws Page 25 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 4 3 Specifications Function Power amplifier with energy Power amplifier with energy recovery recovery 1 channel 1 channel for tip tilt systems Control input voltage range 2 to 12 V Output voltage 100 V Peak output power lt 5ms 280 W Average output power Equivalent to 100 W reactive power Peak output current lt 5 ms 2000 mA Average output current 1000 mA Current limitation Short circuit proof 10 0 1 Ripple noise 5 mVrms lt 10 kHz lt 30 mVrms lt 100 kHz 20 mVpp lt 10 kHz lt 100 mVpp 100 kHz lt 2 a D Q D Q D lt 30mVrms lt 100 kHz lt 150 mVpp 20 MHz lt 100mVpp 100 kHz lt 150mVpp 20 MHz Base load internal 1 5 uF 1 5 uF Output impedance 1 5 WH 0 5 O 1 5 uF Amplifier type Class D switching amp 100 kHz Class D switching amp 100 kHz 1 5 WH 0 50 1 5 uF Input impedance 100 kQ Piezo connector LEMO ERA 00 250 CTL LEMO ERA 00 250 CTL DC Offset 10 turn pot adds 0 to 10 V to Control In Operating temperature range 5to 50 C 5 to 50 C Dimensions One 14T slot wide 3H high One 14T slot wide 3H high 0 9 kg 0 9 kg Operating voltage E 500 E 501 system E 500 E 501 system The internal base load is required to obtain a stable amplifier output voltag
17. 0 E 501 Series PZT Servo Controllers User Manual PZ 62E 6 Integrating Modules in Third Party Systems 6 1 1 Safety Measures for Integration in Third Party Systems DANGER High Voltage gt Only authorized and qualified personnel must install operate maintain and clean the modules of the E 500 E 501 series gt Remove the third party system from the power source before integrating modules of the E 500 E 501 series The amplifier modules of the E 500 E 501 series output up to 130 V E 503 E 504 E 505 E 506 or up to 1100 V E 508 Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Operate an amplifier module only when it is installed in a suitable chassis and connected to a protective earth conductor via pins 32a and 32c of the 32 pin connector DIN 41612 male Make sure that the resistance of the protective earth conductor is lt 1 Q at 25 Aon all interfaces relevant for the function of the protective earth conductor If the protective earth conductor has to be removed e g in case of system modifications reconnect the protective earth conductor before the next start up of the module gt When you operate E 504 E 505 or E 506 amplifier modules do not touch pins 6a 6c 8a and 8c of the 32 pin connector since the piezo voltage is output on these pins in addition to the output on the PZT socket of the front panel NOTICE Damage from electrostatics
18. 0 to 10 V to Control n Piezo temperature sensor input PT 1000 LEMO socket deactivation of the piezo voltage output at 150 C Miscellaneous Operating temperature range 5 to 50 C Dimensions 14HP 3U Mass 0 9 kg Operating voltage E 500 E 501 system Power consumption 55 W max Max 85 C deactivation of the piezo voltage output internal overtemp protection Minimum frequencies for charge controlled operation Capacitance piezo actuator fee 000 0 33 uF 250 mHz Voltage controlled operation for lower frequencies Release 2 15 1 WwWW pi ws Page 34 5 6 4 E 500 E 501 Series PZT Servo Controllers Pin Assignment PZT High Voltage 40 to 130 V User Manual PZ 62E Top pin Plus Bottom pin Return conductor minus the actuator connected must have a floating ground construction Housing Protective earth PT1000 Temperature sensor LEMO EPL OS 303 HLN Temperature sensor socket Pin 1 Temp _ SA Pin 2 Temp_S Pin 3 GND PE Pinl Pin Pins Schematic circuit diagram of temperature sensor Housing Protective earth conductor GND PE 32 pin connector DIN 41612 male Row PINa 2 Power Fail 4 IN ch1 6 Piezo voltage GND 8 OUT piezo voltage 10 n C 12 n C 14 n C 16 IN 15 V 18 n C 20 n C 22 GND measurement 24 GND power 26 IN 24 V to 27 V 28 IN 37 V 30 IN 137 V 32 Protective earth chassis Release 2 15 1 www pi ws PIN c OUT ch1 BNC Offs
19. 1612 male PinNo Function s Pin No Function O O Z O OUT ch1 control 6a N 15V IN BV 8a sd IN 15 V 8c S IN 15 V internal use Bus_A a a Note Pins labeled with nc may be used internally and must not be connected externally E 509 C1A E 509 C2A E 509 C3A E 509 E3 E 509 E03 32 pin connector DIN 41612 male AO amt al ea pepe penne a CH1 ea 5v ooo o 6c J 15V o er joa oe 12a e use 12c signal CH2 ta aenn fae te fom oa ae i 18a internal use internal use 20a Control signal input Control signal output to JP210 CH1 CH3 pin 1 Control signal input to JP210 Control signal input e E SE 2 CH2 SYNC Ea Ea a onl a 1 a eat 28a overtowchi 280 Servo ON OFF cns no no a a ee a a Doa de ee eee ee a Same as on E 509 C3A E 509 E03 has no servo controller and hence all servo related pins are not connected n c No Connection may be used on the backplane and must not be connected JP210 shorted on E 509 C2A default connects CH3 input to CH3 output i e CH3 bypassed Release 2 15 1 www pi ws Page 49 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 9 E 515 Display Modules 5 9 1 Front Panel Elements p D sru PI t MICRONS VOLTS MICRONS i EE MICRONS EE Fig 29 E 515 03 display module Fig 30 E 515 01 display module INFORMATION In the labeling o
20. 2 3 up to 3 amplifier modules Function Dimensions 4 483 gt ig 450 oa A 3 z 400 a p 7i i o 165 A dag Fig 3 E 500 00 chassis Release 2 15 1 www pi ws Page 18 User Manual PZ 62E Fuses Power Swatch Power Gable E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 2 E 501 00 9 5 Chassis with Power Supply 5 2 1 Specifications Function 9 5 Chassis for Piezo Controller System Amplifier Modules Sensor Servo Control Modules Interface Display Modules 5 2 2 Dimensions j eresseesseeseeareosseeseeseressee at 42TE Fig 4 E 501 00 chassis 344 vi i Release 2 15 1 www pi ws Page 19 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 3 E 503 3 Channel Piezo Amplifier DANGER High Voltage The E 503 amplifier can output up to 130 V Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Only authorized and qualified personnel must install operate maintain and clean the E 503 amplifier gt Operate a piezo actuator on a PZT socket only when it is connected to a protective earth conductor 5 3 1 Front Panel Elements LVPZT AMPLIFIER LVPZT AMPLIFIER POWER POWER CONTROL CONTROL INPUT pc orrser KF E INPUT DG OFFSET OFC 30 t0 130V 515 412V j i fa 7 fc mO h O 30104130 ator CONTROL CONTROL
21. 3 2 Configuration Example csser irre a 10 3 3 Compatibility NOt sssini a a e a 11 3 4 stona Path DiagraiTs sapna a 12 3 5 Maximum Rang Sessea 13 3 6 Ambient Conditions and Classifications ccccsccceseeeeeeeeeees 13 Pla CUEING ssoseeceeceszecncesaecsacosase R 14 4 1 Unpacking Checklist sizcitesicccige suse ni a aa 14 4 2 Safety Measures for Installation Start Up and Operation 14 4 3 Power Connect ccatscn striate a gaia tad naatwete 16 4 4 First Electrical Checks cccccccccseeeceeeeceseceeeceuceseeeseeessusenaess 16 4 5 Connecting Gales esrar a a aa 16 4 6 Starting Operation cccccececsecccceeeeceeeeeeeeeeseeeseeeesseeeeseeeesseeeess 17 4 6 1 Analog OQDerat onneni atte wah a eaett teeta tented 17 4 6 2 Computer Controlled Operation c cccccceeceeseeeeeeeeeseeeeeeeeees 17 Module DeSCIiption siia 18 5 1 E 500 00 19 Chassis with Power Supply cccceeceeeeeeeees 18 SLT SPECI CATIONS henes e N ea 18 5 1 2 DIMENSIONS sasie o a a a ia 18 5 2 E 501 00 9 5 Chassis with Power Supply ccccceeeeeeeeeeeee 19 5 2 1 SPECI CANONS usa a coca teenans 19 5 2 2 DIMENSIONS cre sreiin seca e OT 19 5 3 E 503 3 Channel Piezo Amplifier cccccccsseeeseeeeeeeeeeeeeesees 20 9 3 1 Front Panel Elements recrimina 20 Release 2 15 1 www pi ws Page 1 E 500 E 501 Series PZT Servo Controllers 9 3 2 9 3 3 9 3 4 5 4 5 4 1 5 4 2 5 4 3 5 4 4
22. 612 male Pinc AGND AGND analog L REPZT Monfor eh BIN SersorMonfor eka REPZT Montoro RGND analog RGN arog nce Nc a meea eooo See _ e oom Geno mode oe ee e On Target i On Target ch2 SE 100k SE 200k 27 5 V VCC 5 V VCC GND VCC GND VCC AGND analog AGND analog nc no connection AGND Analog Ground isolated from the GND VCC pins 31ac on E 517 i1 and E 517 i10 lines for channels 2 and 3 should not be used Release 2 15 1 www pi ws Page 56 5 11 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Dummy Modules Your E 500 E 501 system may be equipped with one or more dummy modules E 595 00 Replaces E 509 xx sensor modules all types E 596 00 Replaces the E 517 interface display module or the E 515 display module if E 509 modules for SGS sensors are installed E 596 10 Replaces the E 517 interface display module or the E 515 display module if E 509 modules for capacitive sensors are installed The purpose of these dummies is to complete the internal circuitry and the front panel of the chassis INFORMATION Your E 500 E 501 system may be equipped with one or more dummy modules Do not operate your E 500 E 501 system when dummy modules are removed Without the dummy module s the system will malfunction because no Control In signal can be feed into the amplifier module due to the broken circuit Release 2 15 1 www pi ws Page 57 E 50
23. A mA Hz Hz 200 nF Amplifier bandwidth large 200 nF signal Ripple noise MVrus Oe 100 nF 200 100 nF MVp p Current limitation Short circuit proof Short circuit proof Voltage gain 100 1 100 1 selectable 100 1 100 1 selectable Servo off 1 100 of selected output range Control input voltage Servo off 1 100 of selected output range Servo on 0 to 10 V Servo on 0 to 10 V a itertcesandoperaton SS DC Offset 10 turn pot adds 0 to 10 V to Control In Miscellaneous Operating voltage E 500 E 501 system E 500 E 501 system Operating temperature range 5 C to 50 C output power 5 C to 50 C output power C 10 derated over 40 C 10 derated over 40 C lt Dimensions 14 HP 3 U 14 HP 3 U Release 2 15 1 www pi ws Page 38 5 7 4 0 7 5 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E High Voltage Actuator Types and Terminology If you order the actuator and controller together and or provide PI with sufficient information about your application then the actuator connector output voltage range and gain polarity will be set up as required If you are connecting other actuators or wiring your own connector read the discussion of actuator type carefully and any documentation that came with the actuator Bipolar Actuators Here the output voltage swing is so chosen that the actuator sees both negative and positive high voltages The output always has one
24. ONTROL OUT j LIMITER i K F SERVO NOTCH FILTER SENSOR MONITOR ou oi A SENSOR IN i E EE HN PERO N E 509 SERVO CONTROLLER Fig 2 Interconnections between E 517 digital piezo controller operation module amplifier module and E 509 servo module INFORMATION The backplane of the chassis E 500 00 or E 501 00 carries all connectors to the modules of the system amplifiers sensor servo control modules interface display modules Release 2 15 1 WwwW pi ws Page 12 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 3 5 Maximum Ratings The E 500 E 501 system is designed for the following operating data Maximum Operating Operating Maximum Current Voltage Frequency Consumption System in E 100 to 240 V 50 60 Hz 210 VA 900 00 chassis fuses 2 x T2AH 250 V system in E 100 to 120 V 50 60 Hz 90 VA 220 to 240 V 50 60 Hz 90 VA ss 3 6 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the E 500 E 501 system Area of application For indoor use only Maximum altitude 2000 m Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Storage temperature 5 C to 70 C Transport temperature 25 C to 85 C eet a E Co CT Degree of protection IP20 according to IEC 60529 Release 2 15 1 www pi ws Page 13 4 1 4 2 E 500 E 501
25. PI PZ 62E User Manual E 500 E 501 Series modular Piezo Controller Release 2 15 1 Date 2013 07 11 This document describes the following products E E 500 and E 501 Chassis with Power Supply E E 503 E 504 E 505 E 506 E 508 Amplifier Modules M E 509 Sensor Piezo Servo Control Modules E E 515 and E 517 Display Interface Modules ees A AAARAO EEE AAAA eee eee AAR TS AAAA AAAA AAA E NNNNA ag AAAI eth Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany PIEZO NANO POSITIONING WWW PI Ws Tel 49 721 4846 0 Fax 49 721 4846 1019 E EeE EeEeEEeE gt EEE E A info pi ws www pi ws E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Table of Contents About this DOCUMENL ccceeseeeeseeeeneeeeseeeeneeeeseeeeneseees 4 1 1 Goal and Target Audience of this Manual cccccseeeeeeeeeeees 4 1 2 Symbols and Typographic COnventions cccccccseeeeseeeeeeeeaees 4 ao Other Applicable DOCUMENTS sissors 5 1 4 Downloading Manualls cccccececeeceeeeeeeeeeeeneeeneeeseeeneeeneeeneeenes 6 Salely isniicee nen eee eee eas 7 2 1 intended WSC cree snte a o E SN 7 2 2 General Safety INStrUCtiONS serres irn aa 7 2 3 Organizational Measures cccccccseeeceeeeseeeseeeseeeeceeeeseeeseneeseees 8 MUOdUCHO Diisi ste vede anes siteesaeeetewtes tute aneeeateees 9 3T MOGCl SUV CY seson E O TAN 9
26. Series PZT Servo Controllers User Manual PZ 62E Handling Unpacking Checklist The E 500 E 501 system was carefully inspected both electrically and mechanically before shipment Upon receiving the device unpack it and check for any obvious signs of physical damage that may have occurred during transit Retain and use the original packing material in case reshipment is necessary The following items are shipped with every E 500 E 501 system Chassis with modules installed Power cord PZ62E User Manual this document E500T0011 Technical Note for GCS LabVIEW driver set for analog controllers lf one or more E 509 modules are installed you should also have these items PZ77E Manual for E 509 With all models except for E 509 E03 PZ150E Manual for E 802 Servo Controller Submodule With E 509 Sx and S31 models only PZ117E Manual for E 801 Sensor Submodule With E 509 S3 and S31 models only E 808 90 sensor monitor cable With E 509 CxA models only PZ106E Manual for Capacitive Sensors With E 509 CxA E03 and E3 models only D 893 32 sensor monitor cable With E 509 E03 and E3 models only 3214 banana plug for ground connection of the sensor reference plane lf an E 517 module is installed you should also have these items C 815 34 RS 232 cable C 815 563 crossover network cable 000011448 USB cable 4347 and 4348 MDR connector for I O socket E 517 CD product CD with software and manuals for E 517 PZ214EQU User Manual for E
27. ailable for download p 6 on our website 1 2 Symbols and Typographic Conventions The symbols and labels in this manual have the following definitions DANGER Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to be taken to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to be taken to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Meaning Label 1 Action consisting of several steps whose sequential D order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant 7 List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual Release 2 15 1 WwWW pi ws Page 4 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Other Applicable Documents Some of the devices which are mentioned in this documentation are described in detail in their own User Manuals or Technical Notes The User Manuals and Technical Notes relevant for your configuration are included in delivery see p 14 For the latest versions of the User Manuals and Technical Notes contact our customer service depart
28. ays be connected to that same controller channel Labels on the rear panel of the device indicate the serial numbers of the piezo actuators that belong with each channel After the system has passed the electrical checks the piezo actuators can be connected and the system can be operated Follow these steps 1 Switch the device OFF 2 Connect the piezo actuators Each piezo actuator is equipped with cables for the piezo operating voltage and for the sensor if present Connect the first cable to the PZT output socket on the amplifier module and second with the sensor input socket on the piezo servo controller If Capacitive sensors are used two sensor cables must be connected to the servo controller The cable labeled T must be connected to the T socket target signal and the cable labeled P to the P socket probe signal Release 2 15 1 www pi ws Page 16 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 4 6 Starting Operation 4 6 1 Analog Operation INFORMATION The external analog signal can be generated by a computer e g from a data acquisition board You can use the PI LabVIEW analog driver to generate the analog signal gt See the E50010011 Technical Note for how to download the driver set from our website 1 Turn all DC OFFSET potentiometers CCW zero offset 2 Turn all SERVO switches to OFF open loop operation Position servo controllers can be operated in closed loop SERVO ON con
29. c nc IN ch2 internal use Bus A internal use Bus _ Vcc nc IN ch3 GND measurement GND IN 24 V to 27 V IN 37 V IN 137 V Protective earth chassis E 503 00S ne Release 2 15 1 WwWwwW pi ws User Manual PZ 62E PIN c OUT ch1 BNC Offset OUT ch1 monitor of piezo voltage PZT 100 nc nc OUT ch2 BNC Offset OUT ch2 monitor of piezo voltage PZT 100 internal use Bus_B internal use Bus GND OUT ch3 BNC Offset OUT ch3 monitor of piezo voltage PZT 100 GND measurement GND IN 24 V to 27 V OUT 10 V IN 137 V Protective earth chassis Page 23 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 4 E 504 High Power Piezo Amplifier Energy Recovery DANGER High Voltage The E 504 amplifier can output up to 130 V Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Only authorized and qualified personnel must install operate maintain and clean the E 504 amplifier gt Operate the piezo actuator on the PZT socket only when it is connected to a protective earth conductor 5 4 1 Front Panel Elements Ez Sy i amp LVPZT AMPLIFIER LVP2T AMPLIFIER aa POWER POWER Ga DC OFFSET amp DC OFFSET eS CONTRO CONTROL INPUT INPUT e 2ho i2 S So 504 i a Ce a 2 Fig 8 E 504 00F amplifier module Fig 9 E 504 00S amplifier module POWER
30. cket of E 509 S3 LEMO socket ERA 0S 303 CLL 3 The SENSOR MONITOR socket carries the signals from all three channels Each E 509 S3 comes with the E 808 90 sensor monitor cable The purpose of this cable is simply to 1 2 split up the signals of the SENSOR MONITOR socket for the three channels Fig 27 Three pin LEMO sensor monitor socket The leads of this open ended cable are color coded white channel 1 brown channel 2 green channel 3 shield GND SENSOR MONITOR socket of E 509 CxA and E 509 Ex LEMO socket FGG 0B 306 CLAD56 6 pin pin 1 chi pin 2 ch1 Fig 28 Six pin pin 3 ch2 LEMO sensor pin a monitor socket pin ch3 pin 6 ch3 shield GND Each capacitive sensor version comes with the D 893 32 sensor monitor cable 2 m The purpose of this cable is simply to split up the signals of the SENSOR MONITOR socket onto three separate BNC connectors The BNC connectors are each labeled with the channel number E 509 S3 32 pin connector DIN 41612 male PinNo Function Pin No pea N 15V_ psa INAV 8c IN AB OUT Display cht internal use intemaluse O ooo IN VC EC ch2 IN VC EC cht OUT Overflow cht IN VC EC ch3 OUT Overflow ch3 OUT Overflow ch2 32a nc Note Pins labeled with nc may be used internally and must not be connected externally Release 2 15 1 www pi ws Page 48 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E E 509 S1 32 pin connector DIN 4
31. dule Front Panel Elements LVP2ZT AMPLIFIER POWER OC OFFSET Ey Fig 14 E 506 10 amplifier module POWER LED Amplifier state Green off Green E 506 is ready for normal operation Off The E 500 E 501 system is switched off OVERTEMP LED Overtemp state Red oft Red Piezo voltage output is deactivated due to overtemp condition at the piezo actuator see below Off No overtemp condition DC OFFSET 10 turn Adds 0 to 10 V to the CONTROL INPUT signal only relevant in potentiometer analog operation see p 17 for details Release 2 15 1 www pi ws Page 32 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E labeling Type Function o CONTROL INPUT BNC In analog operation this control input voltage gives the target either 2 to 12 V as voltage or position depending on the servo mode The input signal should always be in the range of 0 to 10 V excursions to 2 or 12 V may cause overflow especially with servo on and reduce actuator lifetime The control input range can be shifted using the DC OFFSET potentiometer The control input voltage can also be a computer generated analog signal e g from a DAQ board You can use a PI LabVIEW Analog Driver set to generate that analog signal See Analog Operation on p 17 for details TEMP SENSOR LEMO Connection for PT1000 temperature sensor or dummy plug EPL 0S 303 HLN Pinout on p 35 N LEMO Output of the piezo voltage for the p
32. e when no external piezo load is connected The total load is the sum of internal base load and external piezo load Note that the amplifier output power is allocated to the internal and external loads according to their capacitance values This is of particular importance under large signal conditions Examples The small signal capacitance of the connected piezo actuator is 550 nF hence its large signal capacitance is approx 1 1 uF 2 550 nF Under large signal conditions gt 7 D n O O Cc te a Release 2 15 1 www pi ws Page 26 5 4 4 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E approx 58 W will be allocated to the internal base load 1 5 uF while approx 42 W will be available for the external piezo load With a small signal capacitance of 1 uF the piezo actuator would have a large signal capacitance of 2 uF and approx 57 W would be available for it Pin Assignment 32 pin connector DIN 41612 male Row PIN a 2 Power Fail 4 IN ch1 6 Piezo voltage GND 8 OUT piezo voltage 10 n C 12 n C 14 IN sync 200 kHz TTL 16 internal use Bus_ Vcc 18 n C 20 n C 22 GND measurement 24 GND power 26 IN 24 to 27 V 28 n C 30 n C 32 Protective earth chassis E 504 00S Pins 2c and 4a are shorted Release 2 15 1 www pi ws PIN c OUT chi SMB Offset OUT chi monitor Piezo voltage GND OUT piezo voltage JN n C n C internal use Bus_B internal use Bus_GND
33. er for a zero point adjustment of the sensor A zero point adjustment can be necessary after longer operation changes in temperature or if the load on the piezo stage is changed LED Overflow state Yellow off Yellow Overflow condition i e the amplifier is near its range limit Off No overflow condition When the OFL LED comes on a zero point adjustment of the sensor can be necessary See p 17 and the E 509 User Manual PZ77E for details Release 2 15 1 WwWW pi ws Page 42 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Labeling SERVO x ON OFF Toggle switch Switch for the servo mode selection of the corresponding channel x stands for the 7 ON Servo mode is switched on closed loop operation channel number OFF Servo mode is switched off open loop operation See also Starting Operation on p 17 LEMO Output of the monitor signal s for the sensor channel s EGG 0B 306 CLL Pinout on p 48 5 8 2 Front Panel Elements of Modules for PlSeca Single Electrode Capacitive Sensors D PiSeca PiSeca EZT Servo Controller Signal Conditioner end Gs Sensor 7 j ted or on ta caro fer an Servo Ch2 Ch a Ch2 Gea cha On Gnd igi in o w ae On Zoro i fer Er a CA Sonor ni nd Sensor E Y et or Lyf a fero a Q Eeg aniier palea i3 1 3 Pe 508 es m E 609 603 Fig 22 E 509 E3 sensor ser
34. et OUT chi monitor Piezo voltage GND i OUT piezo voltage AN n C n C n C n C n C n C GND measurement GND power IN 24 V to 27 V OUT 10 V IN 137 V Protective earth chassis Page 35 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 7 E 508 High Power Piezo Amplifier with 1100 V Output Voltage DANGER High Voltage The E 508 amplifier can output up to 1100 V Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Only authorized and qualified personnel must install operate maintain and clean the E 508 amplifier gt Operate the piezo actuator on the PZT HIGH VOLTAGE socket only when it is connected to a protective earth conductor 5 7 1 Front Panel Elements HVP2ZT AMPLIFIER HVPZT AMPLIFIER Do DC OFFSET Q o E ie someni QF joancent 4 ma VOLTAGE amp w amp Fig 16 E 508 00 amplifier module Fig 17 E 508 0E amplifier module POWER LED Amplifier state Green off Green E 508 is ready for normal operation Off The E 500 E 501 system is switched off E 508 00 only 10 turn potentiometer Adds 0 to 10 V to the CONTROL INPUT signal only relevant DC OFFSET in analog operation see p 17 for details Release 2 15 1 www pi ws Page 36 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Labeling CONTROL INPUT E 508 00 BNC In analog operation this control input voltage
35. ezo actuator can be controlled either by the DC OFFSET potentiometer or by an analog control input voltage applied to the CONTROL INPUT socket In the latter case the potentiometer setting is used as an offset to the control input voltage This allows generation of unipolar output voltages from bipolar control voltages 7 Watch the yellow overflow LED on the servo module If it lights up the amplifier output is being clipped at one of its limits and the current displacement of the piezo actuator no longer complies with the control signal Use the ZERO trim potentiometer to adjust the sensor reading window Trim the potentiometer until the overflow LED stays dark 4 6 2 Computer Controlled Operation If an E 517 Interface display unit is installed remote control via TCP IP USB RS 232 or IEEE 488 interface is possible A comprehensive command set allows controlling any motion of the piezo actuator with maximum resolution depending on the sensor installed See User Manual for the interface unit for details Release 2 15 1 WwWwwW pi ws Page 17 132 a 5 T P i a tt r i in n H ENLI 7A 3 3 SHE ae TJ A 3 La Ca _ o M o ki i T 64T p a 206 278 445 E E 500 E 501 Series PZT Servo Controllers Module Description E 500 00 19 Chassis with Power Supply Specifications 19 Chassis for Piezo Controller System Amplifier Modules Sensor Servo Control Modules Interface Display Modules 1
36. f E 515 01 and E 515 03 display modules X stands for the supported number of channels MICRONS Toggle switch Switch for selection of the signal to be displayed for the channel VOLTS MICRONS Position displacement measured by the sensor VOLTS Piezo voltage as output by the amplifier Re Display with 3 1 2 digits If adjustment of the display should be necessary see p 52 5 9 2 Specifications Function Display Module for Piezo Voltage Display Module for Piezo Voltage and and Position Position 45 C to 50 C 45 C to 50 C Release 2 15 1 www pi ws Page 50 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 9 3 Pin Assignment E 515 01 and E 515 03 32 pin connector DIN 41612 male AGND o B e AGND u 2 D u 3 m a4 6 AGND a 5 B gt AGND VOLTS1 a 6 m Pp SENS VOLTS u y n P SENS VOLTS3 o m e SENSS AGND a 9 m bP AGND a 10 B a lilo a a a a B B B 200 kHz u 100 KHz EX1 a p EX a 15V u b 15V 15V a p 15V 5V a P 5V GND a e GND AGND u e AGND Release 2 15 1 www pi ws Page 51 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 9 4 Display Adjustment NOTICE Damage from electrostatics The E 500 E 501 system contains electrostatic sensitive devices EGB and can be damaged if handled improperly gt Avoid touching components pins and PCB tracks gt Before touching an electronic component discharge yourself of any elec
37. ge power supply and with fuses that are admissible for both 115 V and 230 V operation No settings need be changed when connecting the device to a different line voltage f your system uses a 9 5 chassis E 501 00 it requires new fuses when it is to be connect to a different line voltage Replace both fuses as described in AC Power and Line Fuses on p 60 First Electrical Checks Check the device electrically when using it for the first time after unpacking Perform these steps 1 Connect the power cord 2 Switch the device on without any piezo actuators connected The power switch is at the rear next to the power cord socket 3 Now the green LED on the amplifier module lights up 4 If an E 517 Interface Display module is installed The display shows the main screen see E 517 user manual for details 5 Set the SERVO switch on the E 509 module to OFF 6 If an E 517 Interface Display module is installed Turn the DC OFFSET potentiometer and watch the voltage display The voltage reading is the current output voltage at the PZT output sockets The position values in the display have no meaning because the piezo actuators and sensors are not yet connected If these steps could be performed without unexpected results the device has passed the electrical checks Connecting Cables INFORMATION Each E 509 sensor servo control module is calibrated with one particular piezo actuator That piezo actuator must alw
38. he fuse carrier see figures below Release 2 15 1 www pi ws Page 60 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 4 Be sure to replace both fuses with fuses of the suitable type Model Line voltage ranges and fuse values E 500 00 100 to 240 V 2x IEC T2AH 250 V E 501 00 100 to 120 V 2 x IEC T2AH 250 V 220 to 240 V 2x IEC T1AL 250 V E 500Kxxx see product specific documentation or nameplate label on device E 501Kxxx see product specific documentation or nameplate label on device Note IEC standard fuses are designed to carry the nominal current indefinitely Other fuse rating standards differ 5 Reinstall the carrier and close the door Release 2 15 1 WwWW pi ws Page 61 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the relevant user manuals for your system are available for download on our website www pi ws Release 2 15 1 WwWwwW pi ws Page 62 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Old Equipment Disposal In accordance with the ap
39. ics The E 500 E 501 system contains electrostatic sensitive devices EGB and can be damaged if handled improperly gt Avoid touching components pins and PCB tracks gt Before touching an electronic component discharge yourself of any electric charges While working wear an antistatic wrist strap or Briefly touch a conducting grounded object Making the gain polarity switch and output range jumper accessible Only remove modules from the chassis when you are authorized and have the corresponding qualifications 1 Remove the E 500 E 501 system from the power source by pulling the power plug Wait a minute to be sure that any residual voltage has dissipated Remove the E 508 00 module from the chassis a Loosen the four Phillips screws on the front panel b Using the grip at the bottom of the front panel pull the module out of the chassis 4 To access settings for gain polarity and output range remove the rear cover plate from the E 508 00 module and slide back the perforated aluminum top Perforated Al top Rear cover plate o O See 7 Trim Pots DO NOT TOUCH Gain polarity switch Left Right default gain 100 gain 100 Setting the Gain Polarity Switch It is important to understand the relation between gain and the Control In range With DC offset 0 full CCW the Control In range is equal to output range as set below divided by the gain Release 2 15 1 www pi ws Page 40 E 500 E
40. ided by the manufacturer Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as property damage can result Only install and operate the E 500 E 501 system after having read and understood this user manual Personnel Qualification Only authorized and qualified personnel must install operate maintain and clean the E 500 E 501 system Release 2 15 1 www pi ws Page 8 3 3 1 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Introduction D AQAA aaa a eee eS M a REESE RERS SS MR MOX 1 9 OO WAIT WAALS Sron Fig 1 Three channel system E 501 chassis with E 509 sensor piezo servo control module E 503 piezo amplifier module and E 517 interface display module Model Survey Chassis The E 500 and E 501 chassis are based on an EMl proven chassis with multi function power supply and a backplane carrying all connectors to the system amplifiers servo controllers and interface modules E 500 E 501 systems are assembled to order and tested with all your modules installed E 500 00 19 Chassis for Modular Piezo Controller System 1 to 3 channels with E530B0008 Power Supply E 501 00 9 Chassis for Modular Piezo Controller System 1 to 3 channels with E531B0005 Power Supply Amplifier Modules E 503 00 Piezo Amplifier Module 30 to 130 V three channels E
41. ieeaeaetaeeeteas aaa ees 38 High Voltage Actuator Types and Terminology c000 39 PIMASSIONING MM ireiaiitiendigiclotadieim tain eiugionieuelenduduacnniuelendaavadys 39 E 508 00 Gain Polarity and Output Range Settings 40 E 509 Signal Conditioner Servo Controller Module 42 Front Panel Elements of Modules for Dual Electrode Capacitive DEMS ORS oN 42 Front Panel Elements of Modules for PlSeca Single Electrode AD ACIIVG SONS ONS rasi ee bat re ea sansa ote aas ease a ee 43 Front Panel Elements of Modules for Strain Gauge Sensors 44 SPCCIHICAUONS sanni aieless cisketteelsaeieaiar ema a 45 PINPASSIONING Mae inccanhiaczedeboctietimabueachashiiet mabieainaniaieacneian 47 O Os DiS play IVIOGUIIC S einser 50 Front Panel Elements edre En EE E 50 SPECIICATOINS ensa aicters aietenstaietens lesan steal rinse atoceaent 50 Pil ASSIONIMG WM itcacweiuntacweneee Geeta E 51 Display OVS TMC Tersa a rnses teste ee ak tater 52 www pi ws Page 2 User Manual PZ 62E E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 10 E 517 Computer Interface and Display Module 006 54 5 10 1 Fron EANELEICMER S ae eta ica eee ates ant eta eat 54 5 10 2 SDECHICANOMS clesascse ne eE E E E 55 5 10 3 PIR ASSIONIMGM een A 56 5 11 DUMMY WIOG UGS aenn Seema ut GactnabiSebenhaetgaieatas 57 6 Integrating Modules in Third Party Systems 58 6 1 1 Safety Measures for Integration i
42. iezo actuator in the stage mar EGG 0B 302 CLL Piezo voltage output is deactivated if a temperature of 150 C is Pinout on p 35 exceeded at the piezo actuator Automatic reactivation at a temperature lt 146 C 30 to 130 V 5 6 2 Operating Limits 140 120 a ee ee a a ES je ee ed 100 ii Amplitude V peak peak oo so pas AGS d ilgo Mest Nga h 20 NT NG i SJ s 1 T N ns hs ees ae NL NL 0 Liil a bt tt i ee 10 10 10 10 Frequency Hz Fig 15 E 506 operating limits with various piezo loads open loop capacitance is measured in uF The minimum capacitive load is 0 3 uF Release 2 15 1 www pi ws Page 33 E 500 E 501 Series PZT Servo Controllers Specifications User Manual PZ 62E E 506 10 Tolerance Function Linearized amplifier module charge controlled Channels 1 Amplifier Input voltage 2 to 12 V Output voltage 30 to 130 V Peak output power lt 2 5 ms 280 W max Average output power 30 W max Peak current lt 2 5 ms 2A Average current 250 mA Current limitation Short circuit proof Ripple noise 0 to 100 kHz lt 0 6 mVrms Reference capacitance adjustable 1 to 280 uF Input impedance 1MQ 1 nF Interfaces and operation Piezo connector voltage output LEMO 2 pin EGG 0B 302 CLL Analog input BNC Display LEDs for power and piezo overtemp DC Offset a pot adds
43. lution measurements in the lower frequency range When following those instructions you will obtain valid measurement results EC Declaration of Conformity For the E 500 E 501 an EC declaration of conformity according to the following European directives was issued 2006 95 EC Low Voltage Directive LVD 2004 108 EC EMC Directive 2011 65 EC RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 Safety Low Voltage Directive EN 61010 1 2010 If electrical equipment is intended to be integrated in other electrical equipment The user is responsible for compliant connection of the electrical equipment when implementing the total system SA Eee Release 2 15 1 www pi ws Page 66
44. ment see p 6 E 517 computer interface and display module PZ214E User Manual software manuals for E 517 are on the E 517 CD e g the SM148E PIMikroMove manual Analog controller LabView driver library and PZ181E Software Manual Hyperbit functionality E500T0011 Technical Note with download instructions E530B0008 power supply module for E 500 E530T0003 Technical Note chassis E531B0005 power supply module for E 501 E531T0004 Technical Note chassis Release 2 15 1 WwWwwW pi ws Page 5 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 1 4 Downloading Manuals INFORMATION lf a manual is missing on our website or if there are problems in downloading gt Contact our customer service department info pi ws The current versions of the manuals are found on our website To download a manual proceed as follows 1 Open the website http www pi portal ws Click Downloads Click the corresponding category e g E Piezo Drivers amp Nanopositioning Controllers Click the corresponding product code e g E 517 An overview of the available file types is shown for the selected product If 0 Files is shown in the Documents line log in as follows to display and download the documents a Insert the product CD in the corresponding PC drive b Open the Manuals directory c Open the Release News e g E 517_Releasenews_V_x_x_x pdf on the CD of the product d Find the user name and pas
45. n Third Party Systems 58 6 1 2 Supply Power for the Modules c cccccsseeeceeeesaeeeeseeeesaeeeees 59 6 1 3 Amplifier Modules Closing the Circuit ceeeeeeeeeeeeeeeeeees 59 T Maintenance weieerih titania 60 7 1 COAG aa taceta a ttee ta Arete on cana deme t te ce keen teat Ceente en ctee tanta 60 7 2 AC Power andi Line FUSES ccccccceecceeeeeeeeeeeeeeeeeeeaeeeaeeeaaes 60 8 Customer Service ccccsseccceseeceeneesceseesenseesensesseneesees 62 9 Old Equipment Disposal cccsscceeseeeeseeeeseeeeeeeeeees 63 10 ADDEN ocas E 64 10 1 Lifetime of PICMA Actuators cccceccsececeeeeeeteeeeeeeseeeeeeees 64 10 2 How to Measure the Amplifier Output of E 504 Modules 65 10 3 EG Declaration Of GOnformi sernir 66 Copyright 1996 2013 by Physik Instrumente PI GmbH amp Co KG Release 2 15 1 File E 500 user _PZ62E2151 doc Release 2 15 1 www pi ws Page 3 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 1 About this Document 1 1 Goal and Target Audience of this Manual This manual contains information on the intended use of the E 500 E 501 series piezo control electronics referred to as E 500 E 501 system in this manual lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are av
46. nd can result from the following Causes The load and or dynamics of operation differ too much from the calibration settings The piezo actuator is operated near its resonance frequency If you notice oscillations gt In closed loop operation immediately switch the servo mode off gt In open loop operation immediately stop the piezo actuator The E 500 E 501 system performance can be reduced directly after power on due to thermal instability gt Switch the E 500 E 501 system on at least one hour before working with it The constant application of high voltage to piezos can lead to leakage currents and flashovers that destroy the ceramic If the E 500 E 501 system is not used but should remain switched on to ensure the temperature stability gt Switch the servo mode off open loop operation gt Set the piezo voltage to 0 V Analog mode The input voltage for the target value is 0 V Computer controlled mode Corresponding commanding Release 2 15 1 WwWwwW pi ws Page 15 4 3 4 4 4 5 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Power Connection The power connection is located on the rear panel of the chassis Unless you request otherwise the E 500 E 501 system will be set up for the line voltage we believe predominant in your country How to adapt E 500 E 501 system to a different line voltage f your system uses a 19 chassis E 500 00 it is equipped with a wide ran
47. ng or malfunction with improper system configuration In March 2011 the backplane of the chassis E 500 00 or E 501 00 has been changed The modules of the E 500 E 501 system have been adapted accordingly New chassis and modules date of manufacture is March 2011 or later m Old chassis and modules date of manufacture is before March 2011 If old and new components are to be combined in one system modification of the chassis and or modules by PI may be necessary for proper operation Improper combination of old and new components in the E 500 E 501 system can cause damage by overheating or malfunction of the system With systems assembled by PI the proper configuration is ensured If you want to replace chassis or modules in your E 500 E 501 system gt Contact our customer service department p 62 Release 2 15 1 WwWW pi ws Page 11 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 3 4 Signal Path Diagram The modules of the E 500 E 501 system can be combined in several configurations in an E 500 or E 501 chassis see Section 3 2 for an example The signal path diagram below shows a usual configuration FRONT PANEL REAR CONNECTOR n oe es ns an i SERVO ON OFF CONNECTION USB aapi DIA 18 bit IEEE 488 TARGET OUT TARGET IN SENSOR CONTROL OUT CONTAOL TH PZT AMPLIFIER IN HW OUT CONTRROL IM _ SERVO OM OFF SERY GLE 1 fol SLEW HATE C
48. onger operation changes in temperature or if the load on the piezo stage is changed LEMO Input for the signals of the strain gauge sensor of the piezo stage ERA 0S 304 CLL Pin assignment on p 47 E 509 S1 Output of the monitor signal s for the sensor channel s BNC Pin assignment for E 509 S3 on p 48 E 509 S3 LEMO ERA 0S 303 CLL 5 8 4 Specifications PB 509 01A E 509 C2A E 509 C3A E 509 S1 E 509 S3 E 509 S31 Function Signal conditioner and servo Signal conditioner and servo controller for piezo mechanics controller for piezo mechanics Servo Characteristics Analog proportional integral P I Analog proportional integral P I algorithm with notch filter algorithm with notch filter Sensor type 2 plate capacitive SGS jumper up to 10 kHz on request Linearization ILS Integrated Linearization System Release 2 15 1 WwWwwW pi ws Page 45 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E PB 509 61 A E 509 C2A E 509 C3A Ce T Sensor monitor socket LEMO 6 pin FG G 0B 306 CLAD56 BNC 1 ch 3 pin LEMO ERA 0S 303 CLL 3 ch iscleneous E 500 E 501 system 15 V 0 5A E 500 E 501 system 15 V 0 5 A Function Signal conditioner electronics for sensor Piezo Servo Control Module PlSeca sensors for PlSeca sensors Analog proportional integral P I Sensor type PlSeca single electrode capacitive PlSeca single electrode capacitive sensor bandwidth 3 kHz 3 kHz 0 3 10 kH
49. or Probes 3 Channels E 509 E03 PliSeca Modular Signal Conditioner Electronics for Single Electrode Capacitive Sensors 3 Channels Display and Interface Modules E 515 01 Display Module for Piezo Voltage and Displacement 1 channel E 515 03 Display Module for Piezo Voltage and Displacement 3 channels E 517 i1 Interface Display Module 24 Bit D A TCP IP USB RS232 IEEE 488 1 channel E 517 110 Interface Display Module 24 Bit D A TCP IP USB RS232 1 channel E 517 i3 Interface Display Module 24 Bit D A TCP IP USB RS232 IEEE 488 3 channels E 517 i30 Interface Display Module 24 Bit D A TCP IP USB RS232 3 channels Configuration Example UST OMe oe ee Amplifier Amplifier Amplifier Display Slot 3 Slot 3 Slot 2 Slot 2 Slot 1 Interface Slot The figure above shows a three channel configuration example consisting of the following components e E 500 00 chassis with power supply e Amplifier Slot 1 E 503 00 three channel amplifier module e Amplifier Slots 2 and 3 not used covered with dummy modules e Contr Slot 1 E 509 C1A single channel sensor servo control module for capacitive sensor e Contr Slot 2 and 3 E 509 S1 single channel sensor servo control modules for SGS sensors e Display Interface Slot E 517 13 three channel interface display module Release 2 15 1 www pi ws Page 10 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 3 0 Compatibility Note NOTICE Overheati
50. ow 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 PIN a Power Fail IN ch1 Piezo voltage GND OUT piezo voltage n C n C internal use Bus_A internal use Bus_ Vcc n C n C GND measurement GND power IN 24 V to 27V IN 37 V IN 137 V Protective earth chassis A E 505 00S Pins 2c and 4a are shorted Release 2 15 1 www pi ws User Manual PZ 62E PIN c OUT ch1 BNC Offset OUT ch1 monitor Piezo voltage GND OUT piezo voltage AN n C n C internal use Bus_B internal use Bus_GND n C n C GND measurement GND power IN 24 V to 27 V OUT 10 V IN 137 V Protective earth chassis Page 31 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 6 E 506 Linearized Piezo Amplifier Charge Control DANGER High Voltage The E 506 amplifier can output up to 130 V Touching this High Voltage can result in serious or even lethal injury due to electric shock gt Only authorized and qualified personnel must install operate maintain and clean the E 506 amplifier gt Operate the piezo actuator on the PZT socket only when it is connected to a protective earth conductor INFORMATION Standard nanopositioning stages are not suitable for operation with the E 506 10 and cannot be connected via an adapter See the E506T0002 Technical Note for a more detailed description of the E 506 10 charge controlled amplifier mo
51. plicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 D 76228 Karlsruhe Germany Release 2 15 1 www pi ws Page 63 10 10 1 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Appendix Lifetime of PICMA Actuators The following factors which can have an impact on the actuator lifetime must be taken into consideration Applied voltage temperature and relative humidity The effect of each individual factor on the lifetime can be read off the diagrams shown below The lifetime calculated in hours simply results as the product of all three values read off the diagrams The impact that the applied voltage has is particularly important With decreasing voltage the lifetime increases exponentially This must always be taken into consideration in an application The recommended maximum range of the control input voltage for the E 500
52. r would go to its positive negative limit Release 2 15 1 www pi ws Page 59 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 7 Maintenance 7 1 Cleaning NOTICE Short circuits or flashovers ah The E 500 E 501 system contains electrostatic sensitive devices that can be damaged by short circuits or flashovers when cleaning fluids enter the case gt Before cleaning remove the E 500 E 501 system from the power source by pulling the power plug gt Prevent cleaning fluid from entering the case The housing surfaces of the device can be cleaned using mild detergents or disinfectant solutions Organic solvents must not be used 1 2 AC Power and Line Fuses DANGER Risk of electric shock The E 500 E 501 system requires a supply voltage of 100 to 120 VAC or 220 to 240 VAC line voltage Touching the line voltage can result in serious or even lethal injury due to electric shock gt Remove the power cord from the E 500 E 501 system before you change the line fuses INFORMATION Both line fuses of the E 500 E 501 system are active gt Check both fuses if there is a fault The power connection and line fuses are located on the rear panel of the chassis To access the line fuses proceed as follows 1 Switch off the E 500 E 501 system and remove the power cord 2 Wait a minute to be sure that any residual voltage has dissipated 3 Pry open the door that covers the fuse carrier and pry out t
53. sword in the User login for software download section in the Release News e Inthe User login area on the left margin in the website enter the user name and the password in the corresponding fields f Click Login lf Documents 0 Files is still being displayed no manuals are available Contact our customer service department info pi ws Click Documents Click the desired manual and save it on the hard disk of your PC or on a data storage medium Release 2 15 1 www pi ws Page 6 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 2 Safety 2 1 Intended Use The E 500 E 501 system is a laboratory device according to DIN EN 61010 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Corresponding to its design the E 500 E 501 system is intended for driving capacitive loads e g piezo ceramic actuators The E 500 E 501 system must not be used for purposes other than those named in this user manual In particular the E 500 E 501 system must not be used to drive ohmic or inductive loads The E 500 E 501 system can be used for static as well as dynamic applications Capacitive sensors or strain gauge sensors must be used for closed loop operation PI stages intended for closed loop operation already have the corresponding sensors Other sensors can only be used with PI approval 2 2 General Safety Instructions The E 500 E 501 system is built according
54. to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the E 500 E 501 system gt Only use the E 500 E 501 system for its intended purpose and only use it if it is ina good working order gt Read the user manual gt Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the E 500 E 501 system The E 500 E 501 system comes preinstalled and preconfigured Removing modules from the chassis can result in personal injury and or damage to the E 500 E 501 system gt Only remove modules from the chassis when you are authorized and have the corresponding qualifications gt Before removing modules from the chassis remove the E 500 E 501 system from the power source by pulling the power plug Release 2 15 1 WwWwwW pi ws Page 7 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 2 3 Organizational Measures User Manual gt Always keep this user manual next to the E 500 E 501 system when using the E 500 E 501 system If the user manual is lost or damaged contact our customer service department info pi ws Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the E 500 E 501 system on to other users also turn over this user manual as well as other relevant information prov
55. tric charges While working wear an antistatic wrist strap or Briefly touch a conducting grounded object INFORMATION If ordered as part of a E 500 E 501 system or if PI is informed about the application E 515 01 and E 515 03 display modules come preset range decimal places Making the display adjustment elements accessible Only remove modules from the chassis when you are authorized and have the corresponding qualifications 1 Remove the E 500 E 501 system from the power source by pulling the power plug Wait a minute to be sure that any residual voltage has dissipated Remove the E 515 module from the chassis a Loosen the four Phillips screws on the front panel b Using the grip at the bottom of the front panel pull the module out of the chassis Release 2 15 1 WwWW pi ws Page 52 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E E 515 0x W112 DIP SMTH BANK W 1 Main Connector 32pin ac Fig 31 Location of display adjustment elements on the E 515 0x display module Potentiometers DIP Switch Settings Reading adjustments setting the decimal point V1 V3 Voltage channels 1 3 Micron channel 3 M1 M3 Microns channels 1 3 Volt channel 3 Micron channel 2 Volt channel 2 Micron channel 1 Volt channel 1 Release 2 15 1 www pi ws Page 53 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 10 E 517 Computer Interface and Display Module INFORMATION gt See the
56. trol input is interpreted as target position and open loop SERVO OFF control input determines the output voltage directly modes In closed loop mode the servo control circuit is active and compares the sensor signal with the target position Hysteresis effects nonlinearities and drift effects are eliminated In open loop mode the servo control circuit is deactivated The device works as a high voltage amplifier The input signal is amplified by the gain factor and output to the piezo actuator The output signal can also be offset manually with the DC OFFSET potentiometer In open loop the position sensor if installed is still active and the real time position reading is correct 3 Turn the power on The standard screen appears on the display The current output voltages and displacements derived from the sensor signals are displayed for all channels Because the controller is set to open loop mode the sensor reading is not fed back to control the position If external forces act on the piezo actuator its length will change accordingly and so will the sensor reading 4 Switch the Servo switches to ON closed loop Now the displacement is controlled in closed loop servo mode The display shows the current displacement values as before 5 Use the DC Offset potentiometer to change the expansion 6 Apply an external analog signal from 0 to 10 volts to control the expansion over the nominal range The expansion of the pi
57. turn Adds 0 to 10 V to the CONTROL INPUT signal only relevant potentiometer in analog operation see p 17 for details 5 3 2 Operating Limits 160 140 120 100 80 60 Amplitude V peak peak 40 20 10 10 10 Frequency Hz Fig 7 E 503 operating limits with various piezo loads open loop capacitance is measured in uF Release 2 15 1 WwWW pi ws Page 21 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 3 3 Specifications 503 0080 Amplifier Control input voltage 2 to 12 V 2 to 12 V Ee famas Output voltage 30 to 130 V 30 to 130 V Channel 3 100 V fixed voltage Peak current per channel lt 10 ms gt 140 mA typical 180 mA gt 140 mA typical 180 mA Average current per channel gt 70 mA gt 70 mA gt 10 ms Current limitation Short circuit proof short circuit proof 3 Inteneceandoperaton O OOS S Piezo connecior 8v LENOERA002500TL 3x LEMO ERA00 200TL 3 3 DC Offset x 10 turn pot adds 0 to 10 V to 2 x 10 turn pot adds 0 to 10 V to Control In Control In Miscellaneous S x LEMO ERA 00 250 CTL 3 x LEMO ERA 00 250 CTL x 2 x Operating temperature range 5 to 50 C 5 to 50 C C Release 2 15 1 www pi ws Page 22 E 500 E 501 Series PZT Servo Controllers 5 3 4 Pin Assignment 32 pin connector DIN 41612 male Row 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 PIN a Power Fail IN ch1 nc n
58. ut is lt 100 mVpp at 100 KHz But when measuring the amplifier output signal with low sampling rate and small bandwidth e g with a digital oscilloscope aliasing will occur and distort the measurement result In digital signal processing aliasing refers to an effect that the signal reconstructed from samples is different than the original continuous signal when the sampling rate is too low With the E 504 amplifier output this means that a low frequency signal seems to be measured which is not present at all Example When a 91 Hz signal is sampled with 100 Hz sampling rate the result seems to be a 9 1 Hz signal see figure below Original Signal Samples Fig 37 Signal digitization with too low sample rate time in 1 100 s Original signal 91 Hz and sampling rate 100 Hz the result is mistaked as a 9 1 Hz signal Alias To avoid aliasing the sampling rate must be at least twice as high as the highest frequency in the signal to be sampled according to the Nyquist Shannon sampling theorem l e with Release 2 15 1 www pi ws Page 65 10 3 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E an amplifier switching frequency of 100 kHz the sampling rate must be 200 kHz or higher If the sampling rate provided by your oscilloscope is not high enough use a low pass filter at the oscilloscope input to eliminate frequencies above 100 kHz Alternatively you can use an analog oscilloscope or perform high reso
59. vo Fig 23 E 509 E03 sensor signal controller conditioner Lavali Type Function Banana socket Ground connection for target plane of the PlSeca single electrode Capacitive sensor Input for the Probe sensor signal of the PlSeca single electrode ECP 00 650 NLL Capacitive sensor 543 triaxial With E 509 E3 only Toggle switch Switch for the servo mode selection of the corresponding channel Servo x On Off m ON Servo mode is switched on closed loop operation x stands for the OFF Servo mode is switched off open loop operation channel number See also Starting Operation on p 17 Release 2 15 1 www pi ws Page 43 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E Labeling With E 509 E3 ony LED Overflow state Yellow oft Yellow Overflow condition i e the amplifier is near its range limit Off No overflow condition When the OFL LED comes on a zero point adjustment of the sensor can be necessary See p 17 and the E 509 User Manual PZ77E for details Trim A trimmer adjustment tool can be used on the ZERO potentiometer potentiometer for a zero point adjustment of the sensor A zero point adjustment can be necessary after longer operation changes in temperature or if the load on the piezo stage is changed SENSOR MONITOR LEMO Output of the monitor signals for the sensor channels EGG 0B 306 CLL Pinout on p 48 5 8 3 Front Panel Elements of Modules for Strain Gauge Sensors
60. z selectable 0 3 10 kHz selectable 2 2 5 5 option 2 2 5 5 option factors synchronization 3 synchronized channels 3 synchronized channels Electrical properties oo Output voltage Oto 10V Oto 10V 5 to 5 V 10 to O V selectable Intenecesandoperaton OO o Sensor connection 3 x LEMO ECP 00 650 NLL 543 3 x LEMO ECP 00 650 NLL 543 socket triaxial socket triaxial Dey a T Release 2 15 1 www pi ws Page 46 algorithm with notch filter E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E 5 C to 40 C 5 C to 40 C 7HP 3U 7HP 3U E 500 E 501 system E 500 E 501 system Extension factors to multiply by the nominal measurement range of the selected sensor head D 510 to be specified with order 5 8 5 Pin Assignment SENSOR socket of E 509 S3 and E 509 S1 E E E E E EESETETHEOETTETTETETETTTOETTETOTTTTETETTTOETTTETTTOETOTTOEOETETETESTT ETO lr OO STRAIN GAUGE CONFIGURATION FOR STRAIN GAUGE CONFIGURATION FOR P A2l1 40 P O41 40 PFP 841 60 P A4l 30 P 844 40 FP 844 60 P H43 50 P 845 40 P 845 60 FP 043 40 whid e x stroin gauge an PZT stack 2 x stroin gauge an PZT stack 2 x resisiar in P T hausing Z x resisiar oan ecaniraller board 2 x astroin gauge an P2T stack x resister in P T hausing Fig 26 Strain gauge sensor wiring for various piezo actuators Release 2 15 1 WwWwwW pi ws Page 47 E 500 E 501 Series PZT Servo Controllers User Manual PZ 62E SENSOR MONITOR so

Downloading - Physik Instrumente

Contents

Download Pdf Manuals

Related Search

Related Contents