GE Microwave JEM31M
Contents
1. 15 CLEAR OFF When touched it shuts off the microwave energy and erases all settings except time of day When held for 3 seconds the Lock Out feature will be activated To deactivate press and hold the CLEAR OFF pad for 3 seconds ADD 30 SECONDS Press this pad to add 30 seconds of process time to add 30 seconds to the process time as it s counting down or for an instant on for 30 seconds AM PM Sets AM or PM time of day Also sets display scrolling speed CLOCK Touch this pad to enter time of day or check time of day during processing To set the clock first touch CLOCK pad and then enter time of day then press AM or PM For example if the time is 1 30PM touch number pads 1 3 and 0 and 1 30 will appear in the display touch PM Then touch START or CLOCK pad To reset or change time simply repeat above process 15 16 XV PLASMA PREEN CONTROL PANEL Error No topic specified Denotes functions not used in the PLASMA PREEN system also indicated by lower case letters 16 17 POWER LEVEL DUTY CYCLE To reduce the duty cycle depress the POWER LEVEL pad and one numeric pad The duty cycle is based on a 30 second time interval i e 50 duty cycle is 15 seconds and 15 seconds off The following chart gives the percent duty cycle each Number Pad stands for automatic 100 9 90 4 40 8 80 3 30 7 70 2 20 6 60 1 10 5 50 XVI FUNCTION AND USE OF THE ION TRAP T2. cleaned by operating it empty at full power for 15 minutes preferably using oxygen as the process gas 10 11 X TROUBLE SHOOTING GUIDE Unit stops by itself Line voltage too low or the unit is improperly grounded Nothing happens when the numbers are pushed Remember to press the pads firmly and to press CLOCK before entering time setting Press CLEAR PAD and start over Plasma appears concentrated in one corner of the bell jar Check the vacuum connections and the vacuum tubing for leaks Check vacuum pump oil for contamination Vacuum pump starts noisily Normal operation pump oil is cold and has a high viscosity Vacuum pump does not settle down or gas can be felt exiting from the pump The vent valve is in the vent position for PLASMA PREEN systems without the control panel the bell jar is not fitting snugly against the rubber gasket Vent the system readjust and try again Work is getting too hot Heat sink the work better in the water cooled unit only and or reduce the power or duty cycle No reaction is occurring or the reaction is very slow Increase the work temperature by placing a piece of glass between the work and the heatsink water cooled unit only and or increase the analog power or duty cycle Solder on the work is sputtering or smearing Reduce the process temperature use the ion trap Section XVI and or reduce the power The vacuum baseplate is getting hot Check the water flow and water temperatur
3. ASMAsPREEN CONTROLS 14 XV PLASMA PREEN CONTROL PANEL 16 XVI FUNCTION AND USE OF THE ION TRAP 0 17 XVII DIRECTIONS FOR SETUP AND USE OF THE WATER RECIRCULATING SYSTEM 17 WATER TEMPERATURE MEASUREMENT 11 18 TABLE OF CONTENTS I INTRODUCTION You are now the proud owner of a PLASMA PREEN system The PLASMA PREEN is a plasma etching system capable of performing many functions in the plant or laboratory See applications guide in Section X The PLASMA PREEN system is manufactured from a microprocessor controlled microwave oven and uses the relevant digital control functions incorporated in the microwave oven The PLASMA PREEN system also has an additional analog power control feature added to provide a wider control range of plasma power The PLASMA PREEN system operates by flowing a process gas usually oxygen or argon at reduced pressure from 1 to 5 torr through the process chamber and exciting the plasma discharge with the microwave energy from the microwave oven This process produces ionized gas species and free radicals within the gas These active species sputter and or react with the work within the chamber Since this process occurs in the gas phase at reduced pressure little material is consumed or discharged Reactions occur at the work su
4. EEN units shipped without the Control Panel are equipped with a vent valve The vent valve has a 0 013 diameter flow constricting orifice to prevent small parts from flying around inside the bell jar during the venting operation The gas flow is automatically shut off when the vent valve is in the vent position After the system reaches atmospheric pressure about 20 seconds open the door and the bell jar may be lifted Load the system with the work to be cleaned and repeat the above steps Adjust the time duty cycle analog power and thermal resistance to the heat sink based on the effects of the plasma on the work IX CARING YOUR PLASMA PREEN SYSTEM DO NOT USE abrasive cleaners cleaning pads or steel wool as they can scratch or dull the unit door Clean the interior and exterior of the unit with a damp cloth DO NOT USE SOLVENTS as they may damage or discolor the plastic components Make certain that nothing is blocking the door and the sealing surfaces The bell jar may be removed and cleaned as you would any glass object Soap and water works well Be sure to rinse thoroughly as traces of soap on the inside may cause the glass to weaken in an oxygen plasma Avoid solutions containing hydrofluoric acid as it may weaken the glass The rubber gasket can also be cleaned with a damp cloth Do not use sharp objects as they might cut the rubber and prevent the formation of the vacuum seal Should the unit become contaminated it can be
5. Farenheight of Centagrade Under no circumstances should the water temperature exceed 120 deg F or 48 deg C as damage to the water pump and or the PLCASMA PREEN gasket may result This will give about 2 hours of continuous operation with the water in the tank initially at room temperature 70 deg F NOTE The water in the tank serves as the system heatsink and must be given an opportunity to cool between runs CAUTION Check the water level periodically and refill when the level drops 2 inches 5 cm below the top of the water tank 18
6. NOT Plug the vacuum pump into any of the outlets in the rear of the PLASMA PREEN controller 5 The process gases are connected to the rear gas fitting marked GAS A and GAS B one on the right side and one on the left side NOTE the flowmeter on the right controls the gas on the right side and the flowmeter on the left controls the gas flow on the left The GAS A flowmeter controls gas A and the GAS B flowmeter controls gas B 6 The regulators on the front panel of the PLASMA PREEN controllers should be set for 5 PSI Ta If one of the process gas flowmeters in not being used it should be shut off at the needle valve Plug the domestic model into a standard 110 to 120 Volt 15 amp properly grounded outlet For the export model plug the unit into a 220 Volt 50 Hz grounded outlet NOTE If the unit has been stored in an extremely cold area wait a few hours before plugging it in If the vacuum pump contains non combustible oil DO NOT ADD ANY HYDROCARBON OIL TO THE PUMP USE ONLY KRYTOX 1525 11 Connect the water lines to a water source and drain The water inlet and outlet tubes interchangeable The unit requires minimal water flow about 0 3 Gal min or more IV PLASMA PREEN CONTROLLER FRONT PANEL CONTROLS 1 The left most electrical switch turns any accessories plugged into the rear of the system in the UP position DO NOT PLUG THE VACUUM PUMP INTO THIS UNIT AS THE VACUUM PUMP REQUIRES TOO MUCH CURRENT
7. Plasmatic Systems Inc 1327 Aaron Road North Brunswick NJ 08902 TEL 732 297 9107 FAX 732 297 3306 USER MANUAL FOR PLASMA PREEN SYSTEM GE JEM31GA 001 or GE JEM31WA 001 l INTRODUCTION 2 52 iai anaa ienn 3 ll PLASMA PREEN FEATURES sssssssnnnssnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nenna 3 SYSTEM SETUP WATER COOLED 1 1111 4 IV PLASMA PREEN CONTROLLER FRONT PANEL 5 6 V SYSTEM SETUP BARREL 1 1 220 66 66 7 252555 5 7 Vil AVOIDING POSSIBLE EXPOSURE EXCESSIVE MICROWAVE ENERGV 9 VIII GROUNDING INSTRUG TIONS igi 5555 9 CARING YOUR PLASMA PREEN 5 10 X TROUBLE SHOOTING GUIDE sia 11 XI PLASMA PREEN APPLICATION 12 PLASMA PREEN SYSTEM 8 0 13 XIII SUGGESTED MAINTENANCE 2 ci soseasatnaaessducaana sdunnassabetscusseasssnvadnsassean 13 XIV PL
8. The center switch in the UP position turns on the gas flow into the PLASMA PREEN unit The right switch in the UP position opens the solenoid that is contained in the control box between the PLASMA PREEN unit and the vacuum pump The down position opens up a solenoid that bleeds gas into the vacuum chamber and closes off the vacuum solenoid Between the two vacuum lines in the rear of the PLASMA PREEN controller is a needle valve that controls the rate gas is bleed into the system This is useful if small parts are being cleaned preventing them from blowing around during the vent cycle V SYSTEM SETUP BARREL REACTOR Open the door to the PLASMA PREEN unit and remove the literature inside Locate the inner chamber and place it inside the outer chamber within the unit Connect the vacuum line to the bottom connector on left side of the unit in the rear If the vacuum pump was purchased from Plasmatic Systems set it up as described in Section 4 and 1 8 Connect the process gas line to the bottom fitting on the flowmeter The top of the flowmeter connection or the MIXED GAS OUT of the Plasma Preen controller should be connected to the top gas inlet connection on the left hand side If facing front Plug the domestic unit into a standard 110 to 120 Volt 15 amp 60 Hz properly grounded outlet For the export unit plug it into a 220 Volt 50 Hz grounded outlet NOTE If the unit has been stored in an extremely cold area wait a few hours be
9. This will prolong the life of the analog control unit See the next page for a layout of the PLASMA PREEN touch pad control panel Some of the microwave oven functions not used in the PLASMA PREEN system These functions are indicated by an asterisk symbol 1 DISPLAY Displays time of day time during processing functions power level being used process mode and instructions 2 popcorn 3 chicken 4 TIME COOK Energizes the Plasma Preen system for a selected amount of time using 100 duty cycle 5 REMINDER Can be used like an alarm clock 6 NUMBER PADS Touch these pads to enter process time time of day and power level 7 EXPRESS COOK Touch the number 1 through 6 pad for 1 to 6 minutes of processing time at 100 duty cycle For example touch 2 then START for 2 minutes of processing time 8 POWER LEVEL Touch this pad before changing to another duty cycle 9 SOUND Touch the SOUND pad to change the intensity of the beeper 10 TIMER Uses no microwave energy functions as a timer 11 beverage 12 potato 13 vegetable 14 defrost auto time 15 DELAY START Allows you to program the Plasma Preen system to begin operation at a preset time of day up to a 12 hour delay 16 START PAUSE After all selections are made touch this pad to start the microwave power 17 HELP Touch this pad and the pad that you want help about The display will describe how to use the selected function 14 18 19 20 21
10. amber DO NOT run the water cooled unit at full power in the CW mode for more than 15 minutes at a time without a water flow This will prevent over heating of the baseplate and gasket CAUTION The glass vacuum chamber can become HOT when operating at pull power at 100 duty cycle TAKE PROPER PRECAUTIONS WHEN HANDLING THE HOT GLASS 24 When using the analog power control TRY NOT TO RUN SETTINGS BETWEEN 80 and 99 100 or full power is OK This will prolong the life of the analog power control unit Vil AVOIDING POSSIBLE EXPOSURE TO EXCESSIVE MICROWAVE ENERGY 1 DO NOT attempt to operate the PLASMA PREEN unit with the door open since door operation can result in harmful exposure to microwave energy It is very important not to defeat or tamper with the safety interlocks 2 DO NOT place any object between the unit front face and the door or allow soil cleaner or residue to accumulate on sealing surfaces 3 DO NOT operate the unit if it is damaged It is particularly important that the oven door close properly and that there is no damage to the 1 door bent 2 hinges and latches broken or loosened 3 door seals and sealing surfaces 4 the fittings in the rear of the unit removed or loose 4 The unit should not be adjusted or repaired by anyone except properly qualified service personnel Vill GROUNDING INSTRUCTIONS 1 The PLASMA PREEN system must be grounded and connected to the same ground as the vac
11. ctrical shock fire or other hazard may result The unit should be serviced by qualified service personnel DO NOT cover or block any openings on the oven or fire may result DO NOT use the unit outdoors for damage to the unit or electrical shock may result DO NOT immerse the chord or plug in water for electrical shock may result Keep the cord away from heated surfaces or electrical shock may result See door surface cleaning instructions in Cleaning your PLASMA PREEN unit Section Should materials inside the unit catch fire keep the door closed turn the unit off and disconnect the power from the unit by pulling out the plug or shutting off the main power to the unit at the fuse box or circuit breaker DO NOT use the unit for storage Do not leave paper products books or other combustibles inside the unit when it is not in use for A fire may start if the unit is accidentally turned on DO NOT run the unit with metal parts external to the vacuum chamber CAUTION BE CERTAIN THE VACUUM CHAMBER IS AT ATMOSPHERIC PRESSURE BEFORE ATTEMPTING TO OPENING THE DOOR TO THE PLASMA PREEN UNIT The PLASMA PREEN unit has a built in light filter which filters 90 of the light DO NOT look at the glowing plasma at close range for extended periods of time as eye strain may result Treat the vacuum chamber as you would any large piece of glass DO NOT use incompatible gases such as hydrogen and oxygen mixtures in the reaction ch
12. d fitting on the lower right side when facing the rear of the water cooled unit Screw in the flowmeter brackets into the holes provided in the upper right side of the unit Use one wrench inside the unit 5 8 for the brass water lines and 3 4 for the silver colored vacuum line and one outside the unit 9 16 for the brass water lines and 11 16 for the vacuum line to tighten the fittings Mount the bell jar open side down on the gasket and on top of the base plate Place the unit in any location but be sure to leave at least one inch of clearance at the top and three inches on each side to assure proper ventilation and access to the controls Connect the PLASMA PREEN System to a vacuum pump with a capacity of at least 3 0 CFM 85 l m capable of pumping down to 50 microns ALCATEL MODEL VACUUM PUMP SET UP 1 Remove the pump from the box 22 Remove the plastic from the exhaust port The port to the upper right of the sight glass near the front of the pump Locate the blue exhaust mist eliminator and screw it into the exhaust port until snug DO NOT OVER TIGHTEN 1 Locate the long vacuum hose inlet fitting assembly Insert the O ring and retainer between the inlet fitting on the end of the hose and the vacuum pump inlet port Located to rear left top of the pump near the motor using the clamp provided Make certain the O Ring is still wet with non combustible pump oil to insure a proper vacuum seal NOTE The other end
13. e 11 12 PLASMA PREEN APPLICATION GUIDE INDUSTRY FEATURE BENEFIT Electronic Argon Plasma Cleaning Without Iontrap Between 5 and 10 min Argon Plasma Cleaning With Iontrap 15 to 30 min Oxygen Plasma Cleaning 5 min full power Optical Oxygen Plasma Cleaning 5 to 15 min Wire Bond Pads Pd Ag Die Attach Pads Gold Plated Parts Solder Preforms Epoxy Bleed Preparation for Soldering Photoresist Removal Oxidizable Metal Surfaces Gold or Aluminum Wire Removal of Some Metal Oxides Devices with Sensitive Chips Laser Diode Facets Ceramics with Soft Solder PC Boards with Soft Solder Photoresist Removal Bare Ceramic Substrates Removal of Plastic Encapsulants for Failure Mode Analysis Glass Parts Metal Oxide Parts Gold Plated Parts Silicon Gallium Arsenide Indium Phosphide Preparation of Plastics for Gluing Glass Si or GaAs Optics Finger Prints Epoxy Residues Oil Residues Lapping Compound Binders Parts will Pass the Water Break Test After Cleaning 12 13 PLASMA PREEN SYSTEM SPECIFICATIONS The PLASMA PREEN system comes in three versions The first is a barrel type reactor The second is a water cooled unit with a reaction chamber size of 8 x 6 x 2 The third is a larger water cooled unit with a reaction chamber size of 9 x 7 x 3 System specifications of these units are described below Barrel Reactor System PLASMA PREEN I Chamber Barrel Diameter 4 1 Len
14. fore plugging it in To insure proper air flow DO NOT remove the feet from the bottom of the unit VI SAFETY INFORMATION A microwave oven is one of today s safest appliances Each microwave oven meets the safety performance standards for emissions set by the United States Department of Health and Human Services To reduce the risk of burns electric shock fire injury to persons or exposure to excessive microwave energy Read all instructions before using this equipment Read and follow the specific AVOIDING POSSIBLE EXPOSURE TO EXCESSIVE MICROWAVE ENERGY SECTION THAT FOLLOWS THIS SECTION Install the unit to allow sufficient air circulation around the rear of the unit Install the unit on a stable base where it will not fall or get wet If the unit is water cooled make certain the water lines are tight and secure THIS UNIT MUST BE ELECTRICALLY GROUNDED Connect it only to a properly grounded outlet See GROUNDING INSTRUCTIONS Section VII DO NOT run the unit with the bell jar at atmospheric pressure or without gas flowing through the reaction chamber no load condition unless using the timer feature While short periods of no load operation will not damage the unit this procedure is not recommended 10 11 12 13 14 15 16 17 18 19 20 21 22 23 DO NOT operate the unit if it has a damaged cord or plug if it is not working properly or if it has been damaged or dropped Ele
15. gth 6 0 Material Pyrex Quartz on Special Order Water Cooled Systems PLASMA PREEN II Model No 862 973 Chamber Rectangular Rectangular Dimensions 8 x 6 x 2 OU x 7 x3 Cooling Along 8 x 6 side 9 x 7 side Material Pyrex amp Aluminum Pyrex amp Aluminum External wxhxd DS x 12 x 13 28 x 12 x 13 Shipping Weight 65 pounds 80 pounds Power Electrical 115V ac 15 Amp service grounded or 220V ac 50Hz Plasma Variable 100 to 750 Watts Frequency 2 45 Ghz Duty Cycle From 10 to continuous adjustment Flow meter Standard 5 cu ft Hr at STP Utilities required Vacuum pump Water and Drain Gas Supply Oxygen Argon XIII SUGGESTED MAINTENANCE 1 Change the vacuum pump oil a regular basis to remove accumulated contamination 2 Keep the unit clean especially around the front door seal area 3 If the bell jar becomes dirty clean in any manner appropriate for glassware If soap is used thoroughly rinse to remove all traces as interaction with the plasma will weaken the glass 4 Additional bell jars and gaskets are available from Plasmatic Systems Telephone 732 297 9107 or FAX 732 297 3306 13 14 PLASMA PREEN CONTROLS The ANALOG POWER CONTROL KNOB is located on the right hand side of the unit It is equipped with an indicator dial where 100 corresponds to 100 power and 0 corresponds to about 100 watts of power TRY TO AVOID RUNNING THE ANALOG CONTROL UNIT AT SETTING BETWEEN 80 AND 99 100 or full power is OK
16. he ion trap is made from perforated aluminum sheet Work to be processed is surrounded by the iontrap within the vacuum chamber This has two effects First is the neutralization of the ionic portion of the plasma Second is to shield the work from residual microwave radiation by acting as a Faraday cage The use of the ion trap causes less damage to the work makes for milder reaction conditions and reduces process reaction rates by 50 The use of the ion trap is indicated when process power and temperature reduction still cause damage to the work XVII DIRECTIONS FOR SETUP AND USE OF THE WATER RECIRCULATING SYSTEM 1 Locate the water tank in a convenient location near the PLASMA PREEN II system The location can be on the floor under the bench on which the PLCASMA PREEN is located 2 Fill up the tank to within 1 inch of the top 2 5cm An algaecide like that used in swimming pools may be added to suppress the growth of algae Use about 1 teaspoon 3 Attach one of the water lines of the recirculating system to one of the copper tubes of the PLASMA PREEN system and the other water line to other copper tube of the PLASMA PREEN system Fit the top to the water tank 4 Plug in the water pump into 115V 60Hz outlet 220V 50Hz if so equipped and the water recirculating system is ready for operation 17 18 XVIII WATER TEMPERATURE MEASUREMENT Read the water temperature using the supplied thermometer Note the setting either degrees
17. of the long vacuum hose is connected to the PLASMA PREEN control unit 2 Fill the pump with 2 0 4165 0 9 to 1 8Kilo grams of 1525 supplied Check the oil level in the pump It should be somewhere between the Min and Max levels that are indicated at the side of the oil sight glass 2 The pump is ready for use 4 NOTE Use only KRYTOX 1525 non combustible vacuum pump oil 10 For PLASMA PREEN units purchased without a PLASMA PREEN controller Connect the process gas line to the bottom fitting on the flowmeter If a gas manifold was purchased from Plasmatic Systems then connect a process gas to each of the manifold inlet fittings being used Set the regulators at 10 PSI Ifa PLASMA PREEN controller was purchased from Plasmatic Systems Inc See Figure 2 1 Connect one end of the short piece of vacuum tubing to the controller fitting marked TO PLASMA PREEN on rear of the control unit and the other end of the tubing to the large left fitting facing the front of the unit near the brass water lines of the PLASMA PREEN water cooled units or the bottom filling of the barrel unit 2 The longer piece of vacuum hose connects the vacuum pump to the PLASMA PREEN controller at the fitting marked TO VACUUM PUMP 3 The gas inlet tube is connected to the top center rear gas fitting marked MIX GAS OUT and the large right fitting of the PLASMA PREEN water cooled units or the top fitting of the barrel unit 4 DO
18. rface gas solid interface and are subject to the geometrical constraints this arrangement introduces For example if two flat parts are bonded together the area attacked is the narrow bond line exposed to the plasma Much of the plasma power eventually is dissipated as heat For processing heat sensitive components it becomes necessary to limit the average plasma power or to heatsink the work Plasmatic Systems has therefore developed a water cooled unit for this purpose We feel confident that you will discover many applications for the PLASMA PREEN system in your work that you may not have considered before FEATURES Reasonably Priced Reduces Effluents High Power to 700 Watts Safety Designed Electronic Digital Controls Ease of Use Duty Cycle Control Simplicity of Analog Power Control Maintenance Process Memory Reliability of Water Cooled Base Plate Performance 2 45 GHz Operation Optional 50Hz 220V Power Available SYSTEM SETUP WATER COOLED REACTOR Remove the bell jar and its contents from the inside of the PLASMA PREEN unit The PLASMA PREEN is shipped with the vacuum tube 3 8 O D tube and water tubes 1 4 O D copper tubes with brass fittings disconnected Reconnect the vacuum tube and water tubes to the appropriate fittings in the rear of the unit If the unit was ordered without the PLASMA PREEN gas control panel reconnect the flowmeter assembly to the gas inlet The silver colore
19. uum pump In the event of an electrical short circuit grounding reduces the risk of electrical shock by providing an escape wire for the electric current This unit is equipped with a chord having a grounding wire with a grounding plug The plug must be plugged into an outlet that is properly installed and grounded 2 WARNING Improper use of the grounding plug can result in a risk of electrical shock 3 Consult a qualified electrician or serviceman if the grounding instructions are not completely understood or if doubts exist as to whether the unit is properly grounded 4 If it is necessary to use an extension cord use only a 3 wire extension cord that has a 3 blade grounding plug and a 3 slot receptacle that will accept the plug on the unit The marked rating of the extension cord should be equal to or greater than the electrical rating of the unit 5 CAUTION The glass vacuum chamber can become HOT when operating at pull power at 100 duty cycle TAKE PROPER PRECAUTIONS WHEN HANDLING THE HOT GLASS ESPECIALLY UNDER VACUUM DO NOT OPEN THE DOOR WHEN THE BELL JAR IS UNDER VACUUM THE POSSIBILITY OF IMPLOSION 10 ALWAYS EXISTS WITH GLASS UNDER VACUUM ESPECIALLY IF THE GLASS IS HOT When the run is finished shut off the vacuum pump and vent the bell jar immediately by turning the vent valve towards the back of the unit If the bell jar is not vented immediately oil may suck up from the vacuum pump and contaminate the system PLASMA PR
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