HR8 Ultrasonic Motor User Manual
Contents
1. 6 WARRANTY 6 1 DEFINITION OF 9 1 1 A WARNINGS T Te 9 1 2 PUTIN sec 9 2 INTRODUCTION Q 10 2 1 About the OU cr 10 22 Vacuum iei RR HC n 10 MEME DD culum 11 24 cielo EET UE n 11 25 Installation and Servicing eco sac nto meee 11 3 PREPARATION AND 4 2 2 1 21 4 uuu uuu u u 12 3 1 Preparatli n u 12 34A Mounting BaSe eer 12 3 1 2 Limiting Stage 14 32 s codici MEE mm 15 3 2 1 Bonding the Ceramic Driving Strip to the Stage 15 3 22 Mounting the MODO aa radaros aans iaia tarian deaet 18 222 Motor Grounding S 21 3 2 4 Motor Conneclions a 22 3 2 5 For Ultra High Vacuum motor a 24 3 2 6 Motor2. 25 Nanomotion Ltd Page 7 of 41 Definition of Terms HR8 Ultrasonic Motor User Manual Definition of Terms 4 SPECIFICATIONS uuu echan Nee ur 26 4 1 81248721521 ss g is she ett nite tare loni iat Lan areata natal ede 26 42 Specification PararmeterSuu s a tee eve ostia ee eee 28 4 3 Thermal Envelope of Performance EOP 29 431 DOSCHPtO Mis asit eU ipi UM 29 4 3 2 Stage Heat Dissipation Consideration 30 4 3 8 Thermal EOP for HR8 Motor Driven by AB1A AB2 ABA Drivers 31 434 for HR Motors Driven by AB5 51 Drivers 33 ERE 38 4 4 1 Dimensions for Standard and High Vacuum Motors 38 4 4 2 Dimensions for Ultra High Vacuum 39 4 4 3 Mounting Base Dimensions 40 5 CONTACT INFOBMATION nant cratis icona a nein a pnus 41 5 1 C stomer Service p 41 5 2 General Inquiries and Ordering ease beet ba be cuesta reta ettet 41 Nanomotion Ltd Page 8 of 41 HR8 Ultrasonic Motor User Manual Definition of Terms 1 Definition of Terms CAUTION Identifies conditions or practices that coul
3. 2 6 1 Figure 8 Motor Connector Notes Pins the motor connector are shorted This is done for safety reasons driver voltage is disabled unless pins 1 amp 6 are shorted when motor is connected Nanomotion Ltd Page 23 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 2 5 For Ultra High Vacuum motor The HR8 1 U motor does not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor 1 black wire 1 red and 1 white wire The red and white wires are direction 1 and 2 respectively and the black wire is the common Also the safety shorting between pins 1 and 6 is not implemented and should be performed by the user NWARNINGI Since there is no cable shielding the HR8 1 U motor case to ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions 3 2 5 1 System Electrical Configuration The Motor is to be operated by one of Nanomotion s drivers Following are the two possible configurations Nanomotion s Driver LC we Without an Integrated Box LC circuit Figure 9 Connection to a Driver Using an External LC box Nanomotion s Driver With an Integrated Internal LC circuit Figure 10 Connection to a Driver with Internal LC Circuit Nanomotion Ltd Page 24 of 41 HR8 Ultrasonic Motor User Man
4. 140 C for ultra high vacuum motor Physical Dimensions Nanomotion Ltd Length 41 9mm Width 46 6mm Height 23 8mm Weight 120 170 gr high amp ultra high vacuum motors standard motor Page 28 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 3 Thermal Envelope of Performance EOP 4 3 1 Description Motor operating temperature is a result of the balance between heat generation and heat dissipation e The heat generation depends on motor s work regime driver command level e The heat is dissipated through the following heat transfer mechanisms conduction radiation and convection the convection mechanism is negligible in vacuum environment The heat dissipation mechanisms should be able to dissipate the heat generated in order to avoid overheating The EOP gives the user the tools to assess the permitted operating conditions for set ambient temperature and command deriving the duty cycle and maximal continuous operation that assures safe operation The user can either operate the motor for an extended period of time at a specific duty cycle or alternatively can operate the motor for a continuous time period specified under Maximal Continuous Operation Time see graphs and tables in sections 4 3 3 and 4 3 4 After the continuous operation is completed the driver must be disabled to cool down the motor for 400 sec in air and for 700 sec in vacuum environment Nanom
5. Figure 6 and connect the Ground connection prepared in step 1 Secure the terminal between the two lock washers Connect the other end of this cable to the electrical network ground 5 Connect the motor to its driver according to the instructions given in the following section Nanomotion Ltd Page 21 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 2 4 Motor Connections This section describes the motor connector pinout and the connections to each of the available drivers Make sure the driver is set to operate with the HR8 motor series CAUTION Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable will not damage the motor however it will somewhat decrease its performance 3 2 4 1 Motor Connector Pinout WARNING Do not remove the cover of the motor or disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded Nanomotion Ltd Page 22 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Motor Connector Pinout 5 9 Direction 1 4 8 Direction 2 3 Screen 7
6. for 5 Driver in Vacuum Environment Brake_Off Mode When Brake_Off Mode is used under vacuum conditions the motor will overheat at any duty cycle if operated for a prolong time To calculate the max operation time use curve see Table 2 for time at 0 command and the operation curve for the operating time according to the following formula Tmax Max continues operation at the operation regime DC max continuous operation under regime a 1 DC If operating under curve c see Table 2 using AB5 in a duty cycle of 1095 the total operation time is 150 0 1 230 1 0 9 222 sec Once Tmax is reached the driver should be disabled for a period of 700 sec Page 37 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 4 Schematics 4 4 1 Dimensions for Standard and High Vacuum Motors DIRECTION OF MOTION p in GND PAN SCREW 41 7 REF M3x0 5 9 af i 9 9 40 3 1 4 14 3 30 2 99 99 i TYPx4 n w FRONT COVER FRONTCOVER BORED PU 46 6 mE m BACKWARD BACKWARD k41 1 0 6 0 2 FRONTCOVER FRONTCOVER 40 6 40 1 FO RWARD FORWARD TYPx2 5 NOM Sz NOTES M407 1 PRELOAD RELEASE ECCENTRICS SHOULD 4 THREADS REMAIN ACCESABLE AFTER MOUNTING 4 13 FOR MOUNTING 2 DIMENSIONS REFER TO A MOTOR CORRECTLY A MOUNTED AGAINSTALUMINA STRIP S 2 3 ALLDIMENSIONSARE IN MM m 2 4 GE
7. 2 10 7 0 1 25 8 0 1 2 2 x Figure 19 Base Layout Nanomotion Ltd Page 40 of 41 Technical Release Note Contact Information 5 Contact Information 5 1 Customer Service Contact your local distributor or email Nanomotion Ltd Technical Support Department at techsupport nanomotion com with detailed problem description additions corrections or suggestions 5 2 General Inquiries and Ordering e Outside the USA Nanomotion Ltd Headquarters Nanomotion PO Box 223 Yokneam Israel 20692 Tel 972 73 2498065 Fax 972 73 2498099 Web site www nanomotion com Email nano nanomotion com e Inthe USA Nanomotion Inc US Headquarters Nanomotion Inc 1 Comac Loop Ste 14B2 Ronkonkoma NY 11779 Tel 800 821 6266 Fax 631 585 1947 Web site www nanomotion com Email nanous nanomotion com Nanomotion Ltd Page 41 of 41
8. 6 and Table 2 are designed to help the user determining the correct envelope of performance and avoid overheating and damaging the motor Nanomotion Ltd Page 34 of 41 HR8 Ultrasonic Motor User Manual Specifications Force N 0 50 100 150 200 250 300 Velocity mm sec Figure 16 Force vs Velocity Using the AB5 AB51 Driver at the Various Work Regimes a h AB5 Air 25 C Vacuum Curve Duty Cycle Duty Cycle Continues Duty Cycle Continues Brake_ Off Brake_On Operation Brake_On Operation sec sec 0 a 100 100 28 230 b 100 100 23 210 100 100 19 150 100 100 14 110 50 80 280 13 90 f 33 58 170 12 66 g 24 45 77 10 44 h 11 28 32 6 5 25 Nanomotion Ltd Table 2 EOP Table for HR Motors Driven by AB5 Standard LUT Page 35 of 41 HR8 Ultrasonic Motor User Manual Specifications AB51 Air 25 C Vacuum Curve Duty Cycle Duty Cycle Continues Duty Cycle Continues Brake Off Brake On Operation Brake On Operation 1 1 sec sec 0 100 100 56 500 b 100 100 oe 54 450 c 100 100 45 280 d 100 100 33 170 e 100 100 23 100 53 58 170 12 66 g 33 48 77 10 44 h 17 28 32 6 5 25 Table 3 EOP Table for HR Motors Driven by the AB51 Driver Reduced LUT L Note n n the Brake Off Mode the full advantage of the AB5 driver is enab
9. NERAL TOLERANCE 0 1 IE E S 41 9 FOR HIGH VACUUM MOTOR 40 5 FOR HIGH VACUUM MOTOR 41 3 FOR HIGH VACUUM MOTOR N 1 5 PRELOAD 32 RELEA SE FINGER ECCENTRICS copy of layout drawings MSP8 M 30 120 20 i TIPS 3 05 Figure 17 Dimensions for Standard and High Vacuum Motors Nanomotion Ltd Page 38 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 4 2 Dimensions for Ultra High Vacuum Motors DIRECTION OF 21 40 2 M3x0 5 2 2 THREADS FOR GROUND N 1 sg st N m N 14 3 30 2 X AR 40 5 1 4 s TYPx4 ing FRONTCOVER FRONT COVER N 46 6 _ BACKWARD BACKWARD 41 3 0 6 0 2 FRONTCOVER FRONT COVER 40 6 FORWARD FORWARD 41 9 REF 4 THREADS NOTES ale FOR MOUNTING 1 PRELOAD RELEASE ECCENTRICS SHOULD s REMAIN ACCESIBLE AFTER MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA SIRIP 1 3 ALLDIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 eo N 2 3 TYPx2 ete copy of layout drawing SP8U M10 L00 30 ECCENTRICS Figure 18 Dimensions for Ultra High Vacuum Motor Nanomotion Ltd Page 39 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 4 3 Mounting Base Dimensions STAGE CARRIAGE CERAMIC PLATE MOTOR MOUNTING SURFACE SHOULD BE FIXED TO STAGE BASE TYPx
10. WV wanomorion A Johnson Electric Company HR8 Ultrasonic Motor User Manual D N MSP8458000 01 REV January 2011 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com HR8 Ultrasonic Motor User Manual Copyright Copyright This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd No part of this document may be reproduced translated stored in a retrieval system or transmitted in any form and by any means electronic mechanical photographic photocopying recording or otherwise without the written permission of Nanomotion Ltd Information provided in this document is subject to change without notice and does not represent a commitment on the part of Nanomotion Ltd Copyright April 2000 January 2011 Yokneam Israel All rights reserved Nanomotion Ltd Page 2 of 41 HR8 Ultrasonic Motor User Manual This page is left blank intentionally Nanomotion Ltd Page 3 of 41 HR8 Ultrasonic Motor User Manual Limited Warranty Limited Warranty Nanomotion hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The
11. comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the UHV system design Page 5 of 41 HR8 Ultrasonic Motor User Manual Preface Warranty Nanomotion Ltd This user Manual is designed to help the user in installing and operating the various types of Nanomotion s HR8 Piezoceramic Motors This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical installation procedures for these motors The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Page 6 of 41 HR8 Ultrasonic Motor User Manual Table of Contents CE COMPLIANCE sisssnitaneswsasnanicannnsennedaasinusnsasenecunnsasan saannsannunasansuntesisadasaansalsiablussensuanseatennsavaniaiubs 5
12. d result in damage to this product or other property A WARNING Identifies conditions or practices that could result in personal injury damage to the product or other property 1 1 WARNINGS e Do not remove the cover of the motor or disassemble its connector High voltage inside to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 2 CAUTIONS e Arrows on motor indicate direction of motion Align accordingly Do set power on unless motor is mounted and preloaded Do immerse the motor in any liquid or cleaning agent e Use only aclean cloth to wipe the motor e Be sure that the motor and especially motor s finger tips not subjected to mechanical shocks sure that the distance of the motor to the Ceramic Driving Plate enables the motor s finger tips to contact the Ceramic Driving Strip otherwise the motor might be damaged during operation e The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness e Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation from Nanomotion e Extending the motor cable will not damage the motor however it will affect its performance Nanomotion Ltd Page 9 of 41 HR8 Ultrasonic Motor User Manual Table of Contents 2 In
13. e 4x holes Figure 1 Motor Mounting Base The mounting base dimensions diagram refers to the front surface of the Ceramic Driving Strip Available Ceramic Driving Strip CS dimensions for HR8 motor are as follows CS 20 3 XXX where 20 is the width 3 is the thickness and XXX is the standard lengths Available standard lengths 50 100 150 200 250 300 350 400 and 500 All dimensions are in mm For other dimensions please contact Nanomotion see chapter 5 for Contact Information The four screws securing the motor to the mounting surface will be inserted from its underside Protrusion of the screws might interfere with motion on another axis Nanomotion Ltd Page 13 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 1 2 Limiting Stage Motion The provided Ceramic Driving Strip should not exceed the stage It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic Driving Strip should also be at least 20 mm longer than the stage travel length otherwise the motor s finger tips might be damaged If the above requirements are not met limit the stage travel distance using end stops Nanomotion Ltd Page 14 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 2 Motor Installation The installation procedure consists of Bonding the Ceramic Driving Strip to the stage Mou
14. er surface about 2cm apart The Epoxy must bond between the plate and the stage Recommended adhesive Emerson amp Cuming Ecobond 24 for vacuum applications 2216 epoxy or Arldite Radite for non vacuum applications Notes u Besure the epoxy contacts the upper surfaces of the plate and the stage carriage but does not flow over the Ceramic Driving Strip front surface Ceramic Driving Strip Figure 4 Securing the Ceramic Driving Strip to the Stage 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the motor according to the following section Nanomotion Ltd Page 17 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 2 2 Mounting the Motor 1 Retract the motor using a 3mm flat screwdriver turn both of the two preload setting screws counter clockwise until the turn is completed and the slot is in the position illustrated below E Notes n The motor is usually supplied with the preload screws already retracted If so please continue to step 2 Retracted position Patented HR8 Voltage Rating 270 V RMS Input current 600 mA RMS Rated freq 40 KHz Ww Figure 5 Preload Screws Retracted Position Nanomotion Ltd Page 18 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation Stage Carriage Stage Base Ceramic Driving Plate 2 While making sure not to exert any force
15. er than the original purpose for which the product was designed to be used The warranty stands only when the motors are used with the NM drivers amplifiers NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of the NM products Without limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages Nanomotion Ltd Page 4 of 41 HR8 Ultrasonic Motor User Manual CE Compliance CE Compliance Nanomotion Ltd The motors and drivers comply to the following directive Safety 61010 1 1990 EMC 89 336 as amended by 92 31 EEC and 93 68 Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors
16. hown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR8 motor UT Figure 12 Block Diagram of a Typical HR8 Driver Motor Sub System Velocity Force gt Nanomotion 27 0141 HR8 Ultrasonic Motor User Manual Specifications 4 2 Specification Parameters Performance Maximum Allowable Velocity 250 mm sec Dynamic Stall Force 30 to 36 N Static Holding Force 28 N reference value Non Energized Stiffness 3 3 to 3 8 N u Nominal Preload on Stage 144 N Kf 4 N Volt driver amp command dependant Kfv 120 to 144 N e sec m Offset 1 to 2 V driver dependant Attainable Resolution Better than 100nm see application notes Nominal Lifetime Electrical Maximal Voltage 20 000 hours under nominal operating conditions 270Vrms 39 6KHz sine wave Maximal Current consumption 600 mA rms Maximal Power Consumption 40W Environmental Ambient Temperature 0 50 C Storage 40 C 70 C Humidity 0 80 non condensing Vacuum level high vacuum motors Vacuum level ultra high vacuum motors 10 Torr guaranteed only after baking 10 79 Torr guaranteed only after baking Maximum Baking Temperature for vacuum motors 110 C
17. led giving a linear response best tracking and low velocity performance Using this mode the motor operates continuously even at 0 command and special attention must be given to maintain the work regime within the permitted Duty Cycle and Maximal Continuous Operation Time refer to Table 2 and Table 3 Once the operation time has reached the Maximal Continuous Operation Time even at Brake_Off Mode without motion the driver must be disabled to allow the motor to cool down for at least 400 seconds in air and 700 sec in vacuum environment Nanomotion Ltd Page 36 of 41 HR8 Ultrasonic Motor User Manual Nanomotion Ltd 4 3 4 1 4 3 4 2 Specifications An Example for Defining the EOP for AB5 Driver Vacuum Environment Brake_On Mode A vacuum application requires 8N at a velocity of 80mm sec and the motor is disabled when stand still Brake_On Mode The graph see Figure 16 shows that this point of operation corresponds to the curve see Table 2 Table 2 for AB5 in Brake_On Mode shows that curve e and a vacuum environment require that a duty cycle of 13 will not be exceeded and the maximum continuous operation time is limited to 90 seconds Alternatively AB51 can be used giving duty cycle and continuous operation of 23 and 100 sec respectively The same conditions under Air at 25 C will result in 100 Duty Cycle and unlimited continuous operation An Example for Defining the EOP
18. mance 300 250 200 o 150 100 4 8 50 4 gt o 0 1 2 3 4 5 6 7 8 9 10 Command V Figure 13 Motor Velocity vs Command 1 The motor operates horizontally at room temperature and low duty cycle lt 10 It interfaces with the Ceramic Driving Strip according to Nanomotion Specifications and a cross roller high quality slide Nanomotion Ltd Page 31 of 41 HR8 Ultrasonic Motor User Manual Specifications Figure 14 and Table 1 are designed to help the user determining the correct envelope of performance and avoid overheating and damaging the motor 32 24 Force N o 0 50 100 150 200 250 300 Velocity mm sec Figure 14 Motor Force vs Velocity at the Various Work Regimes a g AB1A AB2 AB4 Air 25 C Air 50 C Vacuum Maximal Maximal Maximal 8 Duty Cycle Continuous Duty Cycle Continuous Duty Cycle Continuous 26 Operation 26 Operation 26 Operation time sec time sec time sec a 100 60 100 00 100 00 b 100 00 100 44 184 100 oo 92 137 26 107 d 100 oO 62 93 17 72 e 78 87 47 70 13 55 f 56 62 33 50 9 39 g 50 56 30 45 8 35 Table 1 EOP Table for HR Motors Driven by AB1A AB2 AB4 Nanomotion Ltd Page 32 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 3 3 1 An Example for Defining the EOP for AB1A Driver Vacuum Environment An example fo
19. nting the motor Grounding the motor Connecting the motor to its driver 3 2 1 Bonding the Ceramic Driving Strip to the Stage The Driving Ceramic Strip interfaces between motor s finger tips and the stage and provides the required friction Bond the driving plate to the stage surface interfacing with motor s finger tips according to the instructions given in this section Stage Ceramic Driving Strip Figure 2 Bonding the Ceramic Driving Strip Nanomotion Ltd Page 15 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic Driving Strip The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 3 5mm between the lower edge of the Ceramic Driving Strip and the motor mounting surface There is a minimum of 21mm between the upper edge of the Ceramic Driving Strip and the motor mounting surface Ceramic Driving Strip Mounting Surface 21 mm min 3 5 mm max Figure 3 Ceramic Driving Strip Position Nanomotion Ltd Page 16 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 4 Referring to the figure below apply two drops of epoxy adhesive on the center of the Ceramic Driving Strip upp
20. o mechanical shocks 2 5 Installation and Servicing It is recommended to follow the installation instructions in this guide when mounting and installing the motor The HR8 does not contain any user serviceable parts Nanomotion Ltd Page 11 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 Preparation and Installation 3 1 Preparation For optimal motor performance it is recommended to use the Ceramic Driving Strip provided by Nanomotion These Ceramic Driving Strips have been specifically designed to work with Nanomotion motors Substituting this strip with any other material might reduce motor performance or damage the motor Note instructions given in this section refer to the standard Ceramic Driving Strips provided by Nanomotion Nanomotion does not guarantee performance attained by strips purchased from other sources 3 1 1 Mounting Base Prepare the base as described further in this section Mounting Base Dimensions The base should be positioned perpendicular to the Ceramic Driving Strip that is bonded to the stage If necessary refer to the schematic for motor dimensions CAUTION The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Nanomotion Ltd Page 12 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation Stage Carriage Ceramic Driving Strip location Stage Bas
21. on motor s finger tips place the motor on the mounting base and loosely secure it using four M4 screws and spring washers inserted from the underside of the mounting base Do not tighten yet Figure 6 Mounting the Motor 3 Gently press the motor against the Ceramic Driving Strip until it just contacts it and tighten the four screws of Step 2 at a torque of 0 5 0 7 Nm Nanomotion Ltd Page 19 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 4 Release the preload setting screws using again the 3mm flat screwdriver turn both screws clockwise until the turn is completed and the slot is in the position illustrated below The motor is now correctly mounted against the Ceramic Driving Strip Released position Patented HR8 Voltage Rating 270 V RMS Input current 600 mA RMS Rated freq 40 KHz Figure 7 Released Position 5 Ground the motor according to the following section Nanomotion Ltd Page 20 of 41 HR8 Ultrasonic Motor User Manual Preparation and Installation 3 2 3 Motor Grounding A Warning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare grounding wire and terminal connection with the following specifications Terminal diameter for screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw see
22. otion Ltd Page 29 of 41 HR8 Ultrasonic Motor User Manual Specifications sul Notes n The duty cycle is the ratio of the operation time and the total work cycle operation time idle time a When operating the motor with the AB5 AB51 driver continuously in Brake Off Mode refer to section 4 3 4 EOP for HR Motors Driven by AB5 AB51 Driver the motor consumes power at all times even when the control command voltage is 0 zero thus the time at 0 command is accounted in the heating process and reduces the thermal EOP n Upon operating a motion system in vacuum it is expected that the Coefficient of Friction of the bearing structure will increase This may require changing the system operation point on the thermal EOP curves 4 3 2 Stage Heat Dissipation Consideration The motor heat dissipation mechanism is by convection and radiation to the motor case and by conduction through motor s finger tips Hence the motor and the Ceramic Driving Strip bases must both be thermally designed to dissipate 2W each per motor s finger tip with maximum temperature rise of 15 C Nanomotion Ltd Page 30 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 3 3 Thermal EOP for HR8 Motor Driven by AB1A AB2 AB4 Drivers Figure 13 illustrates motor velocity as a function of the applied driver command voltage Allowing up to 30 mm sec variations use itas a reference and as a guideline for expected motor perfor
23. r using the graph and table Figure 14 and Table 1 for the AB1A driver A vacuum application requires 10N at a velocity of 100mm sec The graph shows that this point of operation corresponds to the curve d The table shows that curve d and a vacuum environment require that a duty cycle of 17 will not be exceeded and the maximum continuous operation time is limited to 72 seconds 4 3 4 EOP for HR Motors Driven by AB5 AB51 Drivers The AB5 AB51 drivers are preferable for a perfect servo tracking and or very low ripple constant velocity Refer to the AB5 and AB51 Drivers User Manual D N 05458200 The AB5 unique features result in the motor consuming more power and in a lower EOP compared to the EOP for a motor operating with the AB1A driver The 51 driver is a modified version of the AB5 driver which gives a higher EOP compared to the 5 driver with some adverse effect on control performance in respect to tracking error and low velocity ripple Nanomotion Ltd Page 33 of 41 HR8 Ultrasonic Motor User Manual Specifications Figure 15 illustrates motor velocity as a function of the applied AB5 AB51 driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance 300 250 200 o 150 100 9 50 4 0 1 2 3 4 5 6 7 8 9 10 Command V Figure 15 Velocity vs Command Using the AB5 AB51 Driver Figure 1
24. troduction 2 1 About the Motor The HR8 motors are high precision ceramic motors Designed and manufactured by Nanomotion Ltd The HR8 motors combine unlimited stroke with high resolution and compact dimensions Among its applications are microscopy precision motion robotics etc The motors provide a linear response to the input voltage The specifications described in this chapter apply only to the motor driven by AB1A driver Minor differences may result if AB2 driver AB4 driver or AB5 driver are used 2 2 Vacuum Motors Applications of the Nanomotion motors for vacuum and high vacuum environments include wafer inspection and metrology scanning stages and lithography The HR8 V and HR8 U motors are constructed of materials that have been selected and designed for high vacuum compatibility Nanomotion Ltd Page 10 of 41 HR8 Ultrasonic Motor User Manual Introduction 2 3 8 System Parts A complete set for a single axis will comprise of the following a HR8 Motor b Ceramic Driving Strip for linear applications or Ceramic Driving Ring Disk for rotary applications c One of the following drivers e e e AB4 e 5 2 4 Handling CAUTION Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any solvent or cleaning agent Use only a clean cloth to wipe the motor sure that the motor and specially motor s finger tips are not subjected t
25. ual Preparation and Installation Nanomotion Ltd 3 2 6 Motor Run In Run in of the motor is important to reduce wear rate of the system and to increase its lifetime The required run in conditions are as follows e Velocity 100 mm sec Acceleration 1 5 m s e Duty cycle 50 e Duration 4 hours When the run in is completed carefully clean the Ceramic Driving Strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment Page 25 of 41 HR8 Ultrasonic Motor User Manual Specifications 4 Specifications 4 1 General These specifications apply to the standard motor driven by the AB1A Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Offset Figure 11 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor phenomena similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg 5 Laplace variable 1 sec Nanomotion Ltd Page 26 of 41 HR8 Ultrasonic Motor User Manual Specifications A block diagram of a typical HR8 Driver Motor Sub system is s
26. warranty commences thirty 30 days from the date of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and determines that the defect arises from faulty material parts or workmanship and iii the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use oth
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