User Manual MP34E - Physik Instrumente
Contents
1. a O C9 THO Y 0 1 67 6 T LO E 00 00 N 0 L 4 5 T o TEG LO ro za 5 LO o 3 EN KAS O 238 a 42 D2275 Fig 7 M 037 PD www pi ws M 037 M 038 MP 34E Release 3 7 1 Page 17 PI Piezo Nano Positioning A 81 40 EEE LO Y Ml Technical Data 60 ne 238 D42 cial Page 18 M 037 M 038 MP 34E Release 3 7 1 GATTO Fig 8 M 037 2S www pi ws Piezo Nano Positioning PI Technical Data 4 2 2 M 038 Models NOTE Use only the three M4 threaded holes for mounting your application Other holes on platform are for PI use only Dimensions in mm decimal places separated by commas in drawings Fig 9 M 038 001 WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 19 Positioning P I Nano Piezo Technical Data 93 8 DG1 90 8 PD1 81 0 281 28 oer Lsz oge 1ad 0 0p 1 190 9 LSZ 6 10d S 8 190 8 100 264 GAEN Z S AEN SOL Fig 10 M 038 motorized models Page 20 M 037 M 038 MP 34E Release 3 7 1 WWW pl ws Piezo Nano Positioning PI Old Equipment Disposal 5 Old Equipment Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be2. single axis Page 12 Piezo Nano Positioning PI Technical Data Notes to Table M 038 VG1 and M 038 VP1 10 hPa vacuum versions see M 038 DG1 and M 038 PD1 respectively Two phase stepper motors 24 V chopper voltage max 0 8 A phase 400 full steps per revolution resolution given is that with C 663 controller CW clockwise CCW counter clockwise ActiveDrive integrated PWM servo amplifier external 24 V power supply included Design Resolution The theoretical minimum movement that can be made based on the selection of the mechanical drive components drive screw pitch gear ratio angular motor resolution etc Design resolution is usually higher than the practical position resolution minimum incremental motion Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution have to be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions of a micron 4 1 Cable Connectors and Pin Assignments Sub D 15 pin connector Pin M 03706 M 038 D61 gearhead 1 n C T a use www pi ws M 037 M 038 MP 34E Release 3 7 1 Page 13 Piezo Nano Positioning PI Technical Data input 5 to
3. 12 V enable PWM amplifier 2 6 EA 13 output position reference signal 14 output Encoder A standard 15 output Encoder B standard Pin M 037 PD M 038 PD1 PWM 1 3 Pin M 037 2S M 038 2S stepper 1 Phase 1A brown Phase 2A red n C N AIO gt gt o O input 5 V GND Phase 1B orange Phase 2B yellow O COOIN O A aja O O alxl a AJOJN aa E O1O 16 output positive travel limit switch TTL active low out reference signal dl WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 14 Technical Data WWwW pi ws Piezo Nano Positioning PI Motor Power Connector M 037 PD 6 M 038 PD1 only Fig 4 Motor power socket Type 3 pin round socket Reference No Switchcraft Tini Q G PIN Function 1 Power GND 2 Power input 24 V DC 3 n c M 037 M 038 MP 34E Release 3 7 1 Page 15 Piezo Nano Positioning PI Technical Data 2 2 Dimensions 4 2 1 M 037 Models NOTE Use only the three M4 threaded holes for mounting your application Other holes on platform are for PI use only Dimensions in mm decimal places separated by commas in drawings 28 75 4 5 Fig 5 M 037 00 WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 16 Piezo Nano Positioning PI Technical Data 28 75 83 8 19
4. MODO Saa AWA APA WAKA 19 5 Old Equipment Disposal 21 WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 1 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Description WWW pl ws m Ultra High Resolution Compact Design m Unlimited Rotation Range m Preloaded Worm Drive for Zero Backlash m ActiveDrive DC Motor Stepper Motor and Manual Versions Compatible with National Instruments Motion Controllers m Clear Aperture of 20 mm or 40 2 mm m Limit and Reference Origin Switches Worm Gear Drive All M 037 and M 038 rotation stages are equipped with worm gear drives allowing unlimited rotation in either direction An integrated spring pre load eliminates backlash The worm gear ratios are 180 1 M 037s and 176 1 M 038s corresponding to turntable rotations of 2 000 and 2 045 respectively per revolution of the drive shaft Three Motor Drive Options The M 037 DG and M 038 DG1 models are equipped with a DC motor and shaft mounted encoder and have a min incremental motion of 3 5 urad The M 037 2S and M 038 251 models feature a direct drive 2 phase stepper motor providing very smooth operation and a resolution of 5 5 urad per step The M 037 PD and M 038 PD1 models feature the high performance ActiveDrive system The ActiveDrive design developed by PI features a high efficiency PWM pulse width modulation servo amplifier mounted side by side with the DC motor and offers several a
5. the motor shaft The stepper motor versions are equipped with 2 phase stepper motors providing 20 000 micro steps revolution Coarse position can be read from an adjustable scale ring on the outer edge of the turntable graduated in 2 increments or on the M 037 and all manual models from a drive shaft mounted indicator with 0 1 degree graduations The older M 038 00 M 038 DG and M 038 2S are no longer available WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 5 Piezo Nano Positioning PI Model Survey M 037 00 M 037 DG M 038 PD1 Fig 1 Sampling of M 037 and M 038 stages WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 6 Operation Piezo Nano Positioning PI 3 Operation Manual versions are operated by turning the thumbscrew Each full turn corresponds to 2 2 045 for M 038 001 of platform motion The motor driven versions require a compatible motor controller CAUTION Connecting a DC motor to a stepper motor controller or vice versa may cause damage to the motor 3 1 DG Motor Versions WWW pl ws The DC motor versions come in analog and PWM models The PWM versions M 037 PD M 038 PD1 feature much higher power The motor direction is determined by a TTL logic signal on the PWM sign line the speed by a PWM coded TTL level signal on the PWM magnitude line Only low currents flow in these lines because the motor power is drawn from a separate 24 VDC supply In the DC motor
6. Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 July 09 2007 Karlsruhe Germany Ham AAA Dr Karl Spanner President Physik Instrumente PI GmbH 8 Co KG is the owner of the following company names and trademarks PIP ActiveDrive Copyright 1999 2007 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2007 08 24 Document Number MP 34E Release 3 7 1 M 037 User MP34E371 doc This manual has been provided for information only and product specifications are subject to change without notice About This Document Users of This Manual This manual is designed to help the reader install and operate the M 037 M 038 Worm Gear Rotation Stages lt assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 037 M 038 Worm Gear Rotation Stages as well as the installation procedures which are required to put the associated motion system into operation This document is available as PDF file Updated releases are available for dow
7. Notes to Table p 13 www pi ws M 037 M 038 MP 34E Release 3 7 1 Page 11 Technical Data M 037 00 Max torque 0x Oy 3 Torque cw 1 Torque ccw 0 5 Drive properties Motor type Operating voltage Electrical power Current Origin switch Miscellaneous Operating temperature range Material Aluminium Mass 0 3 Cable length Connector Recommended controller driver see Notes to Table next page WWwWw pl ws M 037 DG 3 0 5 O to 12 Hall effect Aluminium 0 65 Sub D15 C 862 single axis C 843 PCI card 1 to 4 axes M 037 PD 3 0 5 DC Motor ActiveDrive 24 30 Hall effect Aluminium 0 62 Sub D15 C 862 single axis C 843 PCI card 1 to 4 axes M 037 2S M 038 001 3 6 0 5 0 8 2 phase stepper motor 24 0 8 Hall effect Aluminium Aluminium 0 64 0 9 Sub D15 C 663 single axis M 038 DG1 6 0 8 0 to 12 Hall effect Aluminium 1 25 Sub D15 C 862 single axis C 843 PCI card 1 to 4 axes M 037 M 038 MP 34E Release 3 7 1 Piezo M 038 PD1 6 0 8 DC Motor ActiveDrive 24 30 Hall effect Aluminium 1 35 Sub D15 C 862 single axis C 843 PCI card 1 to 4 axes PI Nano Positioning M 038 251 Units Tolerance 6 Nm 2 Nm Max 0 8 Nm Max 2 phase stepper motor 24 V W nominal 0 8 A phase Hall effect C Aluminium 1 25 kg 5 3 m 10 mm Sub D15 C 663
8. Piezo Nano Positioning PI MP 34E User Manual MI O 3 Sf M O 3 Worm Gear Rotation Stages Release 3 7 1 Date 2007 08 24 This document describes the following product s gt S E M 037 00 E 60 mm manual drive E M 037 DG 60 mm DC motor gearhead E M 037 PD 60 mm PWM DC motor direct drive E M 037 2S 60 mm 2 phase stepper motor drive open loop E M 038 001 100 mm manual drive E M 038 DG1 M 038 VG1 100 mm DC motor gearhead E M 038 VG1 M 038 VP1 100 mm 10 hPa vacuum versions E M 038 PD1 M 038 VP1 100 mm PWM DC motor direct drive E M 038 2S1 100 mm 2 phase stepper motor drive open loop Physik Instrumente PI GmbH Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH Co KG Manufacturer s Auf der R merstrasse 1 Address D 76228 Karlsruhe E Germany The manufacturer hereby declares that the products Product Name Worm Gear Rotation Stages Model Numbers M 037 M 038 Product Options all complies with the following European directives 73 23 EEC Low voltage directive 89 336 EEC EMC Directive 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic
9. ano Positioning PI Introduction 1 3 Prescribed Use M 037 and M 038 stages must not be used for applications not in conformance with this manual Observe all safety precautions given in this User Manual Standard M 037 and M 038 stages are designed to operate under normal ambient conditions at least as listed here More stringent conditions given in the Technical Data table p 11 are of course also met m Indoor use m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Degree of pollution 2 WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 4 Piezo Nano Positioning PI Model Survey 2 Model Survey M 037 and M 038 stages differ in platform and aperture diameter and related specifications such as weight and the slightly different worm gear ratio The table below summarizes the models available Model Number Drive Type 60 mm 100 mm Platform w Platform w 20 mm 40 2 mm Aperture Aperture M 038 001 Manual thumbscrew M 037 DG M 038 DG1 Closed loop DC motor gearhead SS as to 10 hPa to 10 hPa 037 PD M 038 PID1 Closed loop DC motor direct drive with integrated PWM amplifier ActiveDrive DC motor 2 phase stepper motor open loop The DC motor gearhead versions feature 3 watt DC motors with 29 6 1 backlash free gearheads and 2000 counts revolution encoders mounted on
10. disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 21
11. dvantages m Increased efficiency by eliminating power losses between the amplifier and motor M 037 M 038 MP 34E Release 3 7 1 Page 2 Introduction Piezo Nano Positioning PI m Reduced cost of ownership and improved reliability because no external driver is required m Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in a single electrically shielded case Limit and Reference Switches For the protection of your equipment non contact Hall effect limit and reference origin switches are integrated in the motorized versions The direction sensing reference switch supports advanced high precision automation applications 1 2 Safety Precautions The following safety precautions should be observed when operating M 03x series rotation stages i WARNING si The stages are motorized by powerful electric motors and can accelerate to high speeds and can generate high forces If handled improperly the stages may cause injuries CAUTION When the stage is connected to the motor controller and or amplifier be aware that the stage could start an undesired move for reasons that may not be immediately apparent Be aware that failure of the motor controller may drive the stage into a hard stop at high speed CAUTION Connecting a DC motor to a stepper motor controller or vice versa may cause damage to the motor WWW pl ws M 037 M 038 MP 34E Release 3 7 1 Page 3 Piezo N
12. f C 663 Mercury Step stepper motor controllers with each other and with C 862 Mercury DC motor controllers is supported for control of up to 16 axes off a single RS 232 or USB port The RS 232 output stages of some PCs may not be capable of driving more than 6 units if this is a problem use USB to interface the first C 663 with the PC M 037 M 038 MP 34E Release 3 7 1 Page 9 Operation 3 3 Motion Control Parameters 3 3 1 DC Motor Versions The following tables give recommended starting values for the servo control parameters for M 037 and M 038 stages and the different PI DC motor controllers See the controller User Manual for details Using C 843 C 848 and C 880 Motor Controllers with Stage M 037 DG M 038 DG1 with Gear M 037 PD M 038 PD1 with Drives PWM amplifier Parameter Recommend Operating Range Recom Operating ed Value mended Range Value SA20 SA1200 Using C 862 Mercury Controllers with Stage M 037 DG M 038 DG1 with M 037 PD M 038 PD1 with PWM Gear Drives amplifier Parameter Recommen Operating Recom Operating ded Value Range mended Value Range For the stepper motor versions the maximum velocity is the most important operating parameter depends on various influences like operating voltage phase current setting and mechanical load Datasheet values are for orientation only and may not work in all applications 3 3 2 Stepper Motor Versions The most important operating parameter fo
13. nload from www pi ws or by email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to eguipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be delivered with M 037 M 038 Worm Gear Rotation Stages are described in their own manuals Updated releases are available for download from www pi ws or email contact your Physik Instrumente Sales Engineer or write info pi ws Contents 1 Introduction 2 NA DESC ON rra a 2 12 Salet PIECAUMOMS sto cite 3 19 TPIescribea US Bristol 4 2 Model Survey 5 3 Operation 7 31 DC Mo tor Versis saissetiae a aaee T 32 Stepper Motor Verso ui aa 9 3 3 Motion Control Parameters wwwwmmmamanwamwawanwa mwamuzi 10 331 DC Motor Vers 9 ce tad 10 332 Stepper Motor Versions occcccocccccccnnccccnnccnnnnonncnononcnononncnnnononos 10 4 Technical Data 11 41 Cable Connectors and Pin Assignments c ccccceeeeeeeeees 13 AZ DIMENSION Sadie 16 421 MO37 MOJO Sia aa 16 AZZ gt MIAO SE
14. r the stepper motor versions is the maximum velocity Exceeding it will cause stalling and the position counter will be incorrect Determine the maximum velocity empirically for your individual application and make sure that it is not exceeded in normal operation Use the datasheet value of 10 s as a starting point see User Manual of respective controller for detailed command survey WWwW pi ws M 037 M 038 MP 34E Release 3 7 1 Piezo Nano Positioning PI Technical Data 4 Technical Data M 037 00 M 037 DG M 037 PD M 037 2S M 038 001 M 038 DG1 M 038 PD1 M 038 2S1 Units Tolerance Motion and positioning Rotation range gt 360 gt 360 gt 360 gt 360 gt 360 gt 360 gt 360 gt 360 j Integrated encoder Rotary encoder Rotary encoder Rotary encoder Rotary encoder Encoder resolution 2000 4000 2000 4000 cts rev Design resolution 0 59 34 x 10 8 75 0 0005 5 45 0 00031 0 60 35 x 10 8 95 0 0005 5 58 0 00032 rad deg typ Minimum incremental motion 3 5 27 21 3 5 27 21 urad typ Backlash 200 200 200 200 200 200 urad typ Unidirectional repeatability 30 30 30 20 20 20 urad typ Wobble lt 150 lt 150 lt 150 lt 150 lt 75 lt 75 lt 75 lt 75 urad typ Velocity 6 45 10 6 90 10 deg s Mechanical properties Worm gear ratio 180 1 180 1 180 1 180 1 176 1 176 1 176 1 176 1 Gear ratio 28 12 1 28 12 29 6 1 29 6 1 Motor resolution 6400 6400 steps rev Axial force 300 300 300 300 400 400 400 400 N Max see T
15. trollers operating off a single host PC port RS 422 RS 422 GPIB IEEE 488 USB TCP IP and controlling hundreds of axes are possible WWwW pi ws M 037 M 038 MP 34E Release 3 7 1 Page 8 Operation Piezo Nano Positioning PI 3 2 Stepper Motor Versions CAUTION WWW pl ws Commanding a velocity above the maximum possible for the stage will cause the motor to stall Because stepper motors do not have position encoders the position counter will continue to increment The controller s motor position may not correspond with the actual motor position and this might endanger your application The maximum velocity depends on various influences like operating voltage phase current setting and mechanical load Datasheet values are for orientation only and may not work in all applications M 037 2S and M 038 251 stages are equipped with 2 phase stepper motors In conjunction with the C 663 stepper motor controller high resolution microstepping achieves an angular resolution of 1 1 arc seconds Note that stepper motor versions do not have encoders and are designed for open loop operation See the controller User Manual for details on operating and networking stepper motor axes Fig 3 Mercury Step stepper motor controller Stepper Motor Controller C 663 oe Step Axes per controller Host PC interface and or RS 232 daisy chain bus Multiple controllers on same PC yes same port also with C 862 Internetworking o
16. versions the motor speed is determined by the voltage max 12 V differential on the motor power lines and the direction by the polarity If the Motor line is more positive than the Motor line then the motor moves in the positive direction The motor power thus comes from the controller PI offers DC motor controllers with a wide range of size and performance In general the DC motor versions can be controlled by the C 843 C 848 C 880 and C 862 Mercury controllers illustrated below M 037 M 038 MP 34E Release 3 7 1 Page 7 Piezo Nano Positioning PI Operation Fig 2 DC motor controllers C 848 and C 880 benchtop rackmount background top to bottom C 843 PCI bus cards and Mercury controllers alone and networked foreground DC Motor C 880 C 848 C 843 C 862 Controllers PCI Card Mercury Axes per up to 18 20r4 AS controller Host PC RS 232 RS 232 MN RS 232 RS 422 or RS 422 or PCI bus daisy chain nterface IEEE GPIB IEEE GPIB bus Multiple yes yes yes yes same separate separate separate port also controllers ports ports slots with C 663 on same PC Current models of all of PI s DC motor controllers can handle both PWM and analog motors in any combination The C 862 Mercury is internetworkable with other Mercury controllers including the C 663 Mercury Step Multi axis controllers can drive a mix of PWM and analog motors Custom configurations with networked con
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