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1. across the wall The whole machine is then installed in the grey room Weight of the machine 1200 kg Alcatel Vacuum Technology France AMS 200 User s manual 3 5 ams01556 Edition 03 September 06 B 30 Installing the machine on the site Grey room 800 1265 Utilities and vacuum connections Laminar flow area Wall Mains supply 1300 All dimensions are specified in mm Alcatel Vacuum Technology France AMS 200 User s manual Electrical and gas connections 360 1790 Operator areas Technical areas Maintenance areas Threaded M8 holes for earthquake attachment 4 5 ams01556 Edition 03 September 06 B 30 Installing the machine on the site 5 Earthquake attachment Ten M8 holes have been threaded on the machine frame for earthquake attachment OPTION Alcatel Vacuum Technology France AMS 200 User s manual 5 5
2. ams01556 Edition 03 September 06 B 30 Installing the machine on the site 1 Precautions Whenever handling the machine and the associated pumps use the equipment provided and observe the instructions in the user s manual Connections The inlets and outlets for the different energy sources must be connected correctly in order to ensure optimum machine operation during productive use Commissioning The machine is started up tested and controlled by the ALCATEL field service engineer It is then the responsibility of the user to respect the instructions contained in the user s manual relating to the operation and preventive maintenance of machines Note commissioning does not cover the connection of the different energy sources inlets outlets to the machine and associated pumps A simple validation is performed 2 Environmental conditions a Ambient temperature In use 18 C lt T lt 23 C During storage 12 C lt T lt 30 C m Relative humidity In use 20 lt H lt 80 Respect these conditions imperatively Alcatel Vacuum Technology France AMS 200 User s manual 1 5 ams01556 Edition 03 September 06 B 30 Installing the machine on the site 3 Height requirements In order to insert the machine lower strip the minimal height requested between the machine body and the floor is 105 mm m Adjust the four leveling stands under the machine until you obtain this minimal
3. height m Make sure that the machine body is horizontal m Ensure that there is a clearance of 400 mm above the machine Do not place anything on the machine The ventilation grills must remain clear CLEARANCE FOR MAINTENANCE Q ACCESS TO CHAMBER 2080 Installation through the wall 1990 2 2003 L AMS 200 front view 105 mini Note all dimensions are in mm Alcatel Vacuum Technology France AMS 200 User s manual 2 5 ams01556 Edition 03 September 06 B 30 Installing the machine on the site 4 Installation area The operator areas are the clearance required by operators to load unload the wafers control the machine The technical areas are the clearance required by technicians to perform the different connections electrical gas utilities and vacuum install the chiller install the external pumps install a laminar flow unit above the machine The maintenance areas are the clearance required by technicians to open both the hinged lateral panels and doors access to the programmable PLC and circuit breakers access to the various utilities permit the maintenance of the process chamber access the maintenance keyboard optional perform electrical supervision The plate holding the robot is placed under the laminar flow of the clean room to avoid any pollution of wafers The machine can be placed

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