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Electric CT PUMP

1. 500mA phase chopper constant current control DC24V Mass 3 1kg 3 6kg Notes 1 2 3 a e gt Do not use for fluids that degrade permeate or infiltrate Fluororesin Do not use for fluids that dissolve or degrade the part Ball Dispensing volume flow rates and suction flow rates provided are those obtained within operating ranges possible under Koganei s test conditions These are restricted by normal operating ranges that take account of fluid viscosity and chemical circuit conditions including the pump In cases where these are inappropriate the pump may be damaged For details consult us Maximum pressure is the maximum pressure allowed by the pump It is necessary to examine filter selection pressure loss piping resistance and operating conditions etc to ensure that pressure within the pump and pressure on the secondary side do not exceed this value Also we recommend that a check is made to confirm the connection of a pressure meter on the pump OUT port as near to the pump as possible Repeatability of dispensing volume are those obtained under Koganei s test conditions They do not represent dispensing accuracy for a system that combines other equipment filters valves etc than the pump The input pulse us dispensing volume is the design value That is a difference of 4 from the actual valve Order code SSS D Maximum dispensing volume 6m2 F EPTO6A1 11 4 S
2. As leakage of the built in check valve is not 100 preventable fluid backwash may occur when it is used as a pump unit 3 Check valve leakage strongly affects the stability of the rate Even if there is a minute impurity in the check valve the dispensing flow volume will vary greatly upon occlusion Therefore be sure to use no particle fluid 4 When the solution is suck in the pump prime the pump by means such as bottle pressurization Specifications General specifications Media Note1 Note2 Photo resist solution pure water chemical solution flammable substances not allowed Media temperature range 5 40C Ambient temperature range 18 30C Ambient humidity 20 85 RH no condensation permitted Mounting direction Pump specifications Item Type Horizontal mounting F EPTO6A1 F EPT10A1 Dispensing volume Notes 0 5 6m 0 5 10m z Maximum dispensing pressure Note4 0 15MPa 1 5kgf cm Dispensing flow rate Notes 0 1 4m2 s Suction flow rate Notes 0 1 4m2 s Maximum viscosity of media 200cphotet Repeatability of dispensing volume Notes 0 1 F S Proof pressure 0 2MPa 2 0kgf cm Input pulse vs dispensing volume Note 1 400 pulse full step 1m2 Input pulse vs Encoder output pulse Full step operation 1 1 Half step operation 2 1 Motor type Motor we 5 phase stepping motor Drive current range 450
3. 52 _ y 19 e mki LW T 2 Connector included OUT ports PFA HG tube 6 35X 44 35 L 1500 250 239 IN ports PFA HG tube 6 35X 4 35 L 1500 Purge gas supply port M5X0 8 Connection tube outer diameter 4 throttle valve installed Ke W 45 Earth terminal 3 Loo i E ae J te 4 O A UY 29 52 2 Connector included Inner Construction Koganei s Test Conditions Nozzle inner diameter 2 j i 1 1 iL Environment Clean room Ambient temperature 23 C Relative humidity 50 o Fluids used IPA Less than 100 particles m2 in isopropyl alcohol of 0 1 m or more 1 E Controller Electric balance e lh i me o 7 3 Operating conditions when measuring repeating accuracy of dispensing volume Dispensing volume maximum dispensing volume Major Parts and Materials Dispensing flow rate 1m2 s Suction flow rate 1m s Dispensing interv
4. fire Always perform Type 3 ground contact work ground resistance of 100Q or less There is a possibility of fire or explosion caused by static electricity Also power leaks could lead to electrical shocks or erratic operation When installing the product always ensure that it is securely fixed in place Falling or dropping the product or improper operation could result in injury Never attempt to rebuild the product It could result in abnormal operation leading to injury electric shock fire etc A WARNING When approaching the pump for maintenance etc be sure that the area around the pump is well ventilated Since the use of nitrogen gas for purging causes the risk of oxygen deficiency always check the ambient oxygen levels and exercise care in approaching the equipment When performing maintenance and inspection adjustment replacement or various other similar operations for the product always be sure to completely shut off power and stop the various operations signals Do not scratch the piping tubes Scratching or bending the tubes could damage them resulting in solution leaks fires electrical shocks and abnormal operation Do not touch the terminal and the miscellaneous switches etc while the device is plugged in There is a possibility of electric shock and abnormal operation Avoid scratching the cable sheath etc Letting the cables be subject to scratching excessive bending pulling rolli
5. in the pump s electrical circuits etc could generate a spark that could ignite the photo resist solution and lead to fire or an explosion and cause injury to human life 1 Since this pump is not explosion prevention type provide ventilation etc around the pump and under all circumstances not let the pump be exposed to a dangerous atmosphere 2 Constantly supply N2 nitrogen gas to the pump s purge gas supply port and keep the pump interior under positive pressure to ensure that a dangerous atmosphere does not enter into the pump interior 3 When the system the customer s machinery using this product is shut down there is a possibility of a dangerous atmosphere around and inside the pump Therefore whenever starting up the system always supply ventilation air around the pump purge the pump interior with Nz gas and confirm that no dangerous atmosphere exists around or inside the pump before starting the motor and sending various operation signals 4 When removing the piping or when using solvent to clean the pump fluid contact areas or when conducting any other system maintenance that could result in a dangerous atmosphere around or inside the pump always shut off power and stop various operations signals When restarting operation provide ventilation air around the pump purge the pump interior with Nz gas and then confirm that no dangerous atmosphere exists around or inside the pump before starting the motor
6. point and a tube La is expanded l l I WApplication example Filter Driver Electric CT pump PC programmable controller Resist solution bottle Bellows center is located The bellows center moves at the upper point origin T downward and due to l When the bellows center stops at the upper point the origin position is reached The bellows center moves l upward and the large bellows extends As the The bellows center l tube volume is expanded I I I l stops at the settled the large bellow s dispensing point 1 compression the equivalent I volume is now transmitted 1 1 to compress the center I tube s volume through I the liquid leading to dispense of resist solution I through the liquid it suck s the resist solution INDEX Characteristics Safety Precautions Silicon wafer Specifications 0000 Order code Throttle valve flow rate characteristics Dimensions Diagrams Safety Precautions Electric CT pump Always read these precautions carefully before use Before selecting and using products please read all the Safety Precautions carefully to ensure proper product use The Safety Precautions shown below are to help you use the product safely and corr
7. C equipment Basic type Blank Pump unit only D With driver Piping port T1 4 with 6 35 4 35 tube Maximum dispensing volume 10m2 F EPT10A1 11 4 SC equipment Basic type Blank Pump unit only D With driver Piping port T1 4 with 6 35X 4 35 tube For customer s installation of the electric CT pump please consult first with Koganei about specifications Contact at the nearest Koganei sales office Throttle valve flow rate characteristics for purge gas aS D 0 05MPa 0 03MPa Flow rate min ANR MY wo A aA O NOO O O 0 1 2 3 4 5 6 7 Number of knob rotations Note Number of rotations from the knob s totally closed position Dimension diagrams Unit mm F EPTO6A1 T1 4 4 Mounting hole 4 5 for M4 5 N tt 50 38 ac OUT ports PFA HG tube 6 35X 4 35 L 1500 F EPT10A1 T1 4 4 Mounting hole 4 5 forM4 5 200 189 Purge gas supply port M5X0 8 Connection tube outer diameter 4 throttle valve installed 45 UY IN ports PFA HG tube 6 35X 4 35 L 1500 CN Ds WW 29
8. NNN Catlog NoSKFO002 2 K lt KOGANEI 1S09001 18014001 Se z PAT PEND World s First High precision of dispensing control unit by using CT pump construction re See jEr HoE Efn sw generation pumps for photo resist solution giving World s first CT pump construction Patent pending The CT pump a precision dispensing unit for photo 9 resist solution is completely new in construction and replaces current diaphragm or bellows construction units consistent finer patterns on semiconductor wafers Low Residue By using a surface finish of Rt 0 3um or less the new PFA tubes used in the pump chamber result in less build up of solids due to smaller wet surfaces about 1 5 of current bellows type pumps Good replacing solution characteristic The pump chamber is a thin tube shape Its ideal shape with almost no solution residue enables dispensing of fresh resist solution Good removal of foams The resist solution s flow path travels from downward to upwards Consequently even if foam enters into the solution it will be conveyed to the discharging port and it will not affect the pump s performance enabling it to dispense with high precision Upon start up of equipment and pouring solution it is easy to remove air foams from the solution and it is ideal for solutions apt to generate foams 9Prevents air penetration There are just two sea
9. als regular No Parts Materials Tube NEW PFA Fitting block etc PTFE Seat CTFE O Ball SisN4 O ring IIR Tube NEW PFA Stepping motor Encoder Enclosure SUS URL http www koganei co jp A KOGANEI CORPORATION OVERSEAS DIVISION i 3 11 28 Midori cho Koganei Tokyo 184 8533 Japan KOGANGEI Tel 042 383 7271 Fax 042 383 7276 MICHIGAN REPRESENTATIVE OFFICE 5070 East N Ave Kalamazoo Michigan 49048 USA Tel 269 388 8769 Fax 269 388 8771 SHANGHAI REPRESENTATIVE OFFICE RM 1602 Orient International Plaza Part c NO085 Lou Shan Guan Rd Shanghai 200336 China Tel 021 6278 7759 Fax 021 6278 7770 8 02 30BP KOGANEI CORP PRINTED IN JAPAN
10. and sending the various operation signals 5 Use abnormal temperature output as a part of the interlock circuit and firmly shut down the power and stop the various operations signals whenever an abnormal temperature occurs 6 Never attempt to connect or disconnect the connector when the power is supplied or the various operations signals are transmitted 7 Keep the pump control equipment and motor driver separated from the pump tank or other places where liquid exists placing them in a location where is safe from explosions 8 Whenever you discover a solution leak operation failure abnormal temperature rise or other abnormality immediately shut off power and stop various operations signals 9 Always monitor liquid leaks anywhere along the customer s system using gas or liquid leak sensors etc and take other appropriate safety measures Do not touch the product while it is in operation or otherwise approach too closely Also do not attempt to adjust any mechanisms of the product opening or closing the chamber removing or attaching pipes and tubes removing or connecting connectors adjusting the throttle valve etc while it is in operation Do not splash resist solution other chemical solutions or water on the product Splashing resist solution other chemical solutions or water on the product cleaning it or using it underwater could lead to abnormal operation that could result in injury electrical shock or
11. ectly and to prevent injury or damage to assets beforehand The directions are ranked according to degree of potential danger or damage DANGER WARNING CAUTION and ATTENTION DANGER Expresses situations that can be clearly predicted as dangerous If the noted danger is not avoided it could result in death or serious injury It could also result in damage or destruction of assets WARNING Expresses situations that while not immediately dangerous could become dangerous If the noted danger is not avoided it could result in death or serious injury It could also result in damage or destruction of assets CAUTION Expresses situations that while not immediately dangerous could become dangerous If the noted danger is not avoided it could result in light or semi serious injury It could also result in damage or destruction of assets ATTENTION appropriate use of the product While there is little chance of injury this content refers to points that should be observed for MiThis product was designed and manufactured as parts for use in General Industrial Machinery WiBefore selecting the equipment and using any product always read the Safety Precautions the Catalog the Instruction Manual etc HFor use the customer is responsible for any verifications and judgments regarding the compatibility of this product with customer s systems After reading the Instruct
12. ief period of time For the materials used see the Major Parts and Materials When mounting the product leave room for adequate working space around it Failure to assure adequate working space will make it more difficult to conduct daily inspections or maintenance which could eventually lead to system shutdown or damage to the product When transporting or installing heavy products use a lift or support to firmly hold it up or use a large number of people and take full precautions to ensure personal safety A ATTENTION When using in conditions or environments not covered in the Catalog or the User s Manual or planning to use in situations that require particular safety such as aircraft facilities fuel facilities amusement machines safety equipment or other areas where it can be expected to have a large effect on human life or property use well within the ratings and performance specifications and take adequate failsafe measures In these situations always contact Koganei for consultations Always check the Catalog for product piping and wiring When handling the product use protective gloves safety glasses and safety boots etc where necessary to ensure safety When the product can no longer be used or is no longer necessary dispose of it appropriately as industrial waste Note that the interior parts of the Electric CT Pump use fluororesin material Never incinerate the product for disposal because fluoro
13. ion Manual etc always place the Manual where it can be easily available for reference to users of this product liThe danger warning and caution items listed under these Safety Precautions do not cover all possible cases Read the catalog and user s manual carefully and always keep safety first A DANGER Do not use for the purposes listed below 1 Medical equipment related to maintenance or management of human lives or bodies 2 Mechanical devices or equipment designed for the purpose of moving or transporting people 3 Critical safety components in mechanical devices This product was not planned or designed for uses that require advanced levels of safety Use in situations where equipment failure would immediately lead to dangerous conditions could result in human injury This pump is not explosion prevention type Do not use in dangerous locations where the probability of an explosion is high due to the high densities of explosive gases steam or dust There is a possibility of causing flashes or explosions in such situations Since this pump was designed for photo resist solution do not use with any flammable fluid other than photo resist solution And since photo resist solution normally contains various flammable solvents always observe the following precautions in use Failure to observe the precautions could lead to the build up of dangerous explosive atmospheres inside and around the pump when a failure
14. ls the fewest ever Koganei s electric Bellows pump has five in the pump chamber to keep out external air This new structure with fewer seals eliminates concerns over foam generation caused by air penetration Small bellows Bellows center Check valve Tube Large bellows Check valve Comes with check valves with new configuration Achieved through a combination of single channels almost no solution residue and allows smooth flow Comes with check valves with a new configuration compact and high precision operation The ingenious CT pump construction offers a compact appearance ideally suited for use in side by side installations A five phase stepping motor and a precision feed screw are used for drive achieving high resolution and repeatability and an encoder will detect any potential faults e g accidental out of position SHighly reliable simple construction Simple construction containing liquid between coaxial bellows and tube welded joint section maintains high precision due to preventing loss of leaking liquid or air penetration This arrangement is more reliable than current pumps using many seals Note A sensor is built in for detecting abnormal motor temperature rise and a port for purging Nitrogen gas is available This pump is not an explosion prevention type Consequently explosion preventive measures will be required for customer site equipment where called for l l 1
15. ng up or being placed under heavy objects or squeezed between two objects may result in current leaks or defective transmission that lead to fires electric shocks or abnormal operation Do not allow the product to be thrown into fire The product could explode and release toxic gases Do not sit on the product place your foot on it or place other objects on it Accidents such as falling and tripping over could result in injury Dropping the product may damage or break the product resulting in abnormal improper or erratic operation A CAUTION When transporting or installing the product use a lift or support to firmly hold it up or use a large number of people and take full precautions to ensure personal safety Take adequate shielding measures when using the product in the places listed below Failure to take such measures could result in erroneous operation 1 Locations subject to large electrical currents or magnetic fields 2 Locations subject to static electricity and other electrical noise 3 Locations that may be subject to radiation Do not use in locations under direct sunlight ultraviolet in locations subject to dust salt or iron powder or in the media and or the ambient atmospheres that include organic solvents phosphoric ester based hydraulic fluids sulfur dioxide gas chlorine gas and acids These conditions could lead to functional shutdowns sudden degraded performance or shortened operating life in a br
16. resin can release toxic gases when incinerated This pump can exhibit degraded performance and function over its operating life Always conduct daily inspections of the pump and confirm that all requisite system functions are satisfied to prevent accidents from failure For inquiries about the product contact your nearest Koganei sales office or Koganei overseas division The address and telephone number is shown on the back cover of this catalog A OTHER Always observe the following items KOGANEI cannot be responsible if these items are not properly observed 1 When using this product in pneumatic systems always use genuine KOGANEI parts or compatible parts recommended parts When conducting maintenance and repairs always use genuine KOGANEI parts or compatible parts recommended parts Always observe the required means and methods 2 Do not attempt inappropriate disassembly or assembly of the product relating to basic configurations or its performance or functions Handling Instructions and Precautions Handling instructions Please read the following before using or selecting Koganei s electric CT pump 1 With regard to the chemical circuit when positioning the nozzle dispensing end place the nozzle in a position that is higher than the fluid level in the tank resist bottle 2 This pump requires a valve on the secondary side dispensing side and when necessary on the primary side inlet side

Electric CT PUMP

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